user manual
Contents
1. Front Inspection SINGLE Micro m Inspection CYCLE a E p gt 2A FT TT FI eee SS f l 1 T E d lil l IL _ d pes J ey es Jl IL l W Micro Only CS Inspection c L2 a T SIZE 4 CONFIGURATION 4 full thickness hd z a E oy ra L Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 6 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM E Esi D wrens J ns pec tion Semteon Synapse gt 4 Running machine cycle The previous figure is the screen displayed when accessing the normal cycle run interface This screen has five different parts button section where all the functional button are placed cassette display section where the current cassette is represented giving information about its Status counter bar where three counters inspected good and discarded give the status of inspection information bar where are given wafer size and configuration recipe name message line where 1s displayed a message with machine status or operator recommendations Buttons can be accessed by clicking by pressing the display if touch screen is included only for stand alone machines or pressing the F nn key if a keyboard is connected To start machine cycle plac2. lt QST r gt F gt man E a j totes Ins pection Synapsis 9 System shutdown To shutdown the system follow this procedure First of all go to the main machine screen Then press QUIT F6 IN CASE OF INSPECTION STATIONS PROGRAM WILL THEN QUIT IN CASE OF STAND ALONE SYSTEMS a shutdown screen will be presented as follows dir Exit to 1 Shutdown J Operating System F6 F1 N Cancel There are three possibilities The first is leave the computer and restart under Windows This operation is allowed only to ser vice personnel and requires a special password which is not public When pressing this key a next screen will be presented to enter password Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 24 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM a j y lt QT r gt f gt man E j totes Ins pection Synapsis Logout If password is not correct the system will not be allowed to restart under Windows If password is correct system will reboot under Windows A special procedure have to be followed shutting down Windows to restore machine at the next restart By pressing SHUTDOWN system will shut down turning the computer off After computer shut down press the main switch button to switch off controller power By pressing CANCEL system will return to the main screen Semicon Synapsis is a div
3. 5 3 Creating a new configuration To create a new configuration when accessing in edit mode to the configuration menu press NEW F2 key This will access the dialog box where the name of new configuration can be given Insert name my configuration x CONFIRM F5 CANCEL ESC Write the name and press CONFIRM F5 to accept CANCEL Esc will abort new configuration creation Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 19 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM a 7 y lt g Ti gt T y protien Inspection Synapsis After this access the Strategies and parameters sections Values will be at this point the same than DEFAULT configuration and can be modified according to needs 5 4 Deleting a configuration To delete a configuration select configuration to delete by clicking on the list and then choose DELETE DEL on the configuration selection screen Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 20 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM go rotes Inspection Semteoon Syna bsc s 6 Password change Password is required to access recipe editing menu There is a simple system to manage password change When accessing to the password request box press MODIFY F2 ke
4. but in this case it is possible to act with editing capabilities Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 14 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM D ILE MS gp ctio F eon Esi J rote ns Ins pec CLOMH Synapsi s To select a configuration select before wafer size and then configuration name by clicking on it When configuration 1s selected press CONFIRM F5 to edit There are two sections inside editor The first one 1s about inspection strategies and the second is about motion parameters Inspection strategies can be selected from the following givenoptions 5 1 Choosing inspection strategies The inspection strategy can be chosen by the selection screen Proteus Inspection v1 0 DEMO SPECIFIED RANDOM F7 F8 It is possible to program ALL F6 wafers for inspection and this option will not imply any further choice Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 15 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM g rotes Inspection Semteoon Synapsis If the SELECTION F7 mode is selected only specified wafers will be inspected and these wafers mustbe selected in a further screen as follows by selecting it with up down arrows and by pressing t
5. cycle 4 1 Single cycle operation 4 2 Step by step operation 4 3 Ending a cassette 4 4 Emergency stop 4 5 Changing a configuration 4 6 Going back to startup menu 5 Editing Configurations 5 1 Choosing inspection strategies 5 2 Changing positions and program parameters 5 3 Creating a new configuration 5 4 Deleting a configuration 6 Password Change 7 Parameters 8 Errors and malfunctions 9 System shutdown 10 Screen Keyboard Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM D Zote res Inspec tion Page 3 Page 4 Page 5 Page 7 Page 10 Page 10 Page 11 Page 11 Page 12 Page 13 Page 14 Page 15 Page 17 Page 19 Page 20 Page 21 Page 22 Page 23 Page 24 Page 26 27 Semteon Syna pris NOTE Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM go rotes Inspection 28 MS emtcon Synapsis Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM go rotes Inspection 29
6. of course the same MICRO INSPECTION wafer is loaded on the microscope for micro inspection and can be unloaded by pressing the keys on the joystick box There is also the option to unload wafers by setting a parameter into the recipe named Exclude keys With this parameter enabled the unloading of wafer will be requested by simply putting the microscope stage into the exchange position In this case wafers will be always marked as GOOD unless discarded into the macro inspection MICRO ONLY this mode is intended to speed up inspection when only microscope must be used and macro inspection 1s not needed In this case during the inspection of one wafer the next Is prepared unloaded centered and aligned and at the end of inspection the two wafers are swapped on the microscope chuck to neutralize the loading times There are no keys used to load and unload wafers which will be just driven by stage movements Waters will be always marked as GOOD since there will be no operator selection There are some additional features which can be accessed from the main screen during operation Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 9 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Dro tens Inspec tion Semptoon Synapse gt 4 1 Single Cycle operation It is possible to enable SINGLE CYCLE operation by pressing its bu
7. 1s not activated or deactivated within a given time timeout an error occurs In this case a dialog box with the error message will be displayed There are two possibilities ERROR IS NOT RECOVERABLE click on ABORT or press Enter and program will be quit and then will be restarted going automatically to the main screen ERROR IS RECOVERABLE OR HAVE BEEN ALREADY SOLVED this condition can happen for example in case of a momentary loss in vacuum or other similar conditions click on IGNORE to make the program continue The dialog box has a third button RETRY which has no effect if pressed Its presence was necessary to make the user choose between the two alternatives without making mistakes The dialog box includes also the indication of description number of sensor and hardware module to enable the service to understand what happens Number of line and module are represented into the schematic diagram given with this documentation WARNING BEFORE CONTINUING IN CASE OF ERROR BE ABSOLUTELY SURE THAT MACHINE IS IN A SAFE CONDITION TO AVOID WAFER BREAKAGE IN CASE OF DOUBT QUIT PROGRAM AND RESTART If arm is in a dangerous position such a s inside a full cassette it can be manually moved In this case RESTART MACHINE Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 23 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM ay j y
8. Asrel Electronics and Industrial Automation PROTEUS MIL 8000 MULTI SIZE WAFER MACRO and MICRO INSPECTION SYSTEM USER MANUAL Rev 2 1 October 2010 Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 I e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM g rotes Inspection Semteoon Syna bsc WAFER INSPECTION SYSTEM Proteus Inspection is a sophisticated and effective tool for wafer visual control It have been especially studied for all that cases where it 1s required a simple to use fast and cost ef fective solution in wafer inspection An inspection unit featuring wafer front and rotation or back inspection with Bernoulli end ef fector is provided for the proper inspection phase Machine can be interfaced with microscopes and measurement systems to build a powerful inspection unit or directly mounted into integrated wafer inspection or review stations as a part of the system System is computer controlled and its use and programming is really easy and user friendly It is possible if needed to edit and recall recipes and each recipe includes inspection strategies all wafers fixed wafers and random access for statistical inspection and handling parameters Proteus Macro Inspection is mounted on a vibration free granite base and can be supplied also with different kinds of inspection lamps for any different need Semic
9. ccess the startup menu from operator interface screen This can be useful if it is needed to access the recipe editing section To do so press the MENU Esc key The startup menu will then be displayed Proteus Inspection v1 0 DEMO Inspection MICRO Wafer selection SPECIFIED F7 ACCEPT F5 x RANDOM F8 DISCARD ESC Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM g rotes Jng spec tion Semteoon Syna bsc s 5 Editing Configurations From the Main menu it 1s possible to access configuration menu To do this press CONFIGURATION F1 key To access the configuration menu in EDIT mode a password will be required A dialog box as showed will then be displayed Passwd J etSs I e Please enter your password Input the correct password assa is the default at machine delivery but can be changed and then the configuration selection display will appear Proteus Inspection v1 0 DEMO CONFIGURATION SELECT CONFIGURATION Available configurations 4 full thickness Ld sd Ld sd SEES E 4 CONFIGURATION CONFIRM F5 CANCEL ESC This menu is similar to the one which can be accessed from the CHANGE key on the user interface
10. e a cassette with wafers on the indexer platform and press START F5 If the machine 1s into a protection hood with automated doors in this moment doors will be opened and must be closed once the cassette is mounted before pressing START Platform will then be driven to home position and wafer mapping will be started to identify present wafers after the confirmation by the operator at the message LOAD CASSETTE When mapping is finished machine will proceed extracting the first wafer starting from cassette top and found wafers will be colored yellow into the cassette status section Wafer will be extracted and placed on the macro inspection chuck At this point there are different options depending on the inspection type programmed into the recipe configuration loaded Types of inspection possible are Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 ri e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM md Proteus Inspection Se teo Synapsis MACRO INSPECTION wafer is loaded on the inspection chuck centered and driven to the in spection level Wafer is then tilted in front and rotated and inspection light is switched ON to enable the operator to visually inspect wafer surface operator can then accept the wafer by pressing the GOOD key or discard it by pressing the FAIL key on the remote console provided If FAIL is press
11. ed wafer is put back into the cassette and marked RED on the cassette interface The GOOD and FAIL keys are enabled with a double LED flash when one of the keys is pressed the LED under the button is activated to ask the operator to confirm the choice by pressing the CONFIRM key on the console panel If the CONFIRM key is not pressed within 5 seconds the pressed key is deselected and the system will wait for a new key pressed This is to allow the correction of the pressed key in case of mistake The operator can also adjust the tilt position by acting on the joystick provided on the console Tilt UP Tilt down It is possible to stop and start chuck rotation by just pressing the CONFIRM key before having pressed GOOD or FAIL In this case the operation is toggle switching rotation on and off Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 8 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM E Esi D totins J nS pec tion Semteon Synapse gt BACK INSPECTION wafer is loaded from the inspection chuck to the Bernoulli unit to show its back with the back inspection light Wafer can be tilted by the joystick unit operator can then accept the wafer by pressing the GOOD key or discard it by pressing the FAIL key in case of fail wafer is centered and then placed back into the cassette The mimic of GOOD FAIL and CONFIRM keys remains
12. hanging a configuration It is possible to run a different recipe for inspection Basically differences from a recipe configuration to another can be in wafer size motion parameters or inspection strategies We will describe in the proper section how to modify a configuration but switching from one configuration to another can be done by pressing CHANGE key The configuration selection screen will then be displayed not all the machines has the possibility to choose between multiple sizes refer to the type of machine you are working on Proteus Inspection v1 0 DEMO CONFIGURA TION SELECT CONFIGURATION Available configurations 4 full thickness NEW RENAME COPY DELETE F2 F3 F4 DEL SIZE 4 CONFIGURATION CONFIRM F5 CANCEL ESC Select before wafer size and then the recipe by clicking its name then press CONFIRM F5 to load The previous Interface will then be displayed and recipe can now be run by loading the proper Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 12 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM os era On Synapsi s cassette with wafers to be Inspected Drotens Inspec tion Machine will usually change size automatically If changes have to be done the proper instructions will be given into the service manual 4 6 Going back to startup menu It is possible to a
13. he ENABLE or DISABLE key only clicking Selection can also be performed by pressing the key on the main screen and in this case the found wafers will de displayed and selection can be done by clicking on it to select or deselect TIEN Tt scsccocpaeeonenenencncwes M iz Nn f 5 i Es _ T KT i a Ew Selected wafer will then be marked and will remain until deselected When done press CONFIRM F5 or CLOSE ESC If confirmed modifications will be recorded into the recipe data base If the RANDOM F option is selected the user can define a number of wafers to be inspected and each time the recipe 1s run for each cassette the given number of wafers will be randomly Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 16 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM a gt te re fhectio Ac gx bens Ins pec LLOMH Synapsis selected within the 25 cassette slots If a selected slot is empty wafer will not be inspected The number of wafers to be inspected will be given in the following dialog box Random Access Ingpecton F Number of waters for statistical inspection 1 25 Cancel i Input wafer number and click OK or press ENTER Wafer positions will be generated by a random number generator to allow inspection of different wafers each time Fro
14. ision of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 25 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Pa te ae fhectto m Tole E Ins pection Synapsi s 10 The Screen Keyboard Normally the stand alone machine is working without any keyboard connected even if it is pos sible to work with a standard keyboard and a mouse In case of inspection stations there 1s no touch screen and then keyboard is present To input passwords or parameters a screen keyboard is provided and launched together with the machine software to enable the user to type data Screen keyboard is launched at startup and nor mally appears as a small Icon on the screen When it is needed to use the keyboard just tap on it with the touch pen or the fingertip and it will open as follows To close keyboard just click or tap on the green button Keyboard program termina tion 1s disabled and then can t be used PIDE EN Keyboard can be used by pressing the buttons with the touch pen or the fingertip and can be switched on numbers only and vice versa Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 26 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Semtcon 1 Synapsis TABLE OF CONTENTS 1 Introduction 2 Installation and Facilities 3 System startup 4 Running machine
15. it to the facilities and to the microscope The way to correctly connect 1s simply to follow the given indications since there are no cables which can be exchanged After have done connections switch on the main switch on the front right side of the machine verifying that EMO switch is released in case rotate the knob CCW Proteus control program will be automatically run at startup wait for its introductory screen Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 4 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM g rotes Inspection Semteon Syna rss 3 System startup After having switched on computer or when launched from the desktop Proteus program will automatically run After launch the first screen displayed is the following one Proteus Inspection v1 0 E m S emicon Synapsis TOTAL WAFER 19187 Asrel Electronics and Industrial Automation To run machine with the last configuration used press the INSPECTION button will then run the Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 5 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM g rotes Inspection Semteon Syna pris next interface which is the proper user interface Wafer Selection Inspection f leu F3
16. m this screen it is possible also to choose between FRONT and BACK inspection or both If both modes are selected the FRONT inspection will be performed at first followed by BACK in spection 5 2 Changing positions and program parameters From the parameters section of recipe editing it is possible to change some control parameters such as positions and some threshold and setup for centering and alignment system This section can be accessed by clicking on the PARAMETERS folder bar from the default editing screen When selected this screen will appear as follows Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 17 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM D wore ns Jng spec tion Semicon Sy napsis Proteus Inspection Yer 1 0 7 CONFIGURATION PARAMETERS Positions 3erties Recipe parameters Machine Parameters TU AEN ALT 1 ALT 42 Name WalrlerPitch Value FirstWaferPos Arm Cassette Center Description TO RECIPE F10 Indexer limit asso in step tra una fetta e la successiva MACHINE PARAMETERS F9 7 MODIFY F4 CONFIGLIRATION lt 200urn tutti gt 8 INCH gt ACCEPT F5 DISCARD ESC The parameter section is divided into two sections RECIPE PARAMETERS and MACHINE PARAMETERS To access MACHINE PARAMETERS it is needed to input the password The password required is the sa
17. me but the request is intended to ask the operator to be sure about his request to access ma chine parameters It is strongly recommended not to change any value if machine is correctly running and to perform changes by working on a dummy wafers cassette On any machine each value 1s described into the description section to allow a correct understanding of its meaning In another part of this manual a list of the default recipes for each Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 18 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Q rotes gp ctio s y fH Ole Ms Ins pection Synapsis wafer size is given To change a value select the desired position or parameter by clicking on it then click MODIFY F4 input new value and then ckick MODIFY F4 again to accept modifications When done click CONFIRM F5 to accept or DISCARD Esc IF THERE ARE DOUBTS IN MODIFYING PARAMETERS CREATE A PAPER COPY OF THE ORIGINAL CONFIGURATION AND ACT ON A NEW RECIPE WITH THE SAME PARAMETERS BEFORE It is also possible to change parameter name and description in the same way used to change values Finally it is possible to move parameters from the Machine section to the Recipe section by pressing the given button F10 during the MODIFY mode This is intended to allow the operator to access easily to parameters which will be often modified
18. on Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 2 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Drotens b ctio e y Proteus Inspection Synapsis 1 Introduction Proteus Macro Inspection system have been especially designed to be used as a tool for silicon wafer macro inspection It is composed of four different parts Mechanical part Motion and I O controller Pneumatic controller Computer with display and keyboard All the parts are contained in a single stainless steel body with a granite base for better vibration insulation The whole system have been designed to be easy to use and maintain and in particular the provided computer interface have been studied to allow a simple use and configuration In the following we will introduce the basic use of Proteus Macro System 1 e the basic in stallation procedure the operator interface and the use of its configuration software Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 3 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM a gt te re Shectio S gx bens Ins pec LLOMH Synapsis 2 Installation and Facilities Installing Proteus system can be done in three simple steps First of all put the machine in its place Following the indications on the rear panel connect the un
19. stem will finish the current couple of wafers which means the wafer under Inspection and the one already centered 4 3 Ending a cassette A cassette inspection will finish at the end of all the selected wafers It 1s possible to force a pre mature end by pressing the END button on the cycle interface In this case the current wafer will be finished and then cycle will be closed 4 4 Emergency STOP It 1s possible in case of severe malfunction to stop machine by pressing the EMERGENCY button placed on the right front side of the machine This will force the machine to completely and immediately STOP This will not produce a vacuum or air loss since the valves used are configured to avoid poten tially dangerous situations Machine will detect within about 30 seconds the emergency condition giving a message and then stopping the program from running In this case program must be terminated and restarted WARNING USE EMERGENCY STOP BUTTON ONLY IN CASE OF REAL NEED SINCE ITS IMPROPER USE CAN RESULT IN WAFER BREAKAGE MACRO INSPECTION CHUCK BERNOULLI AND LOADING ARM ARE PROTEC TED AGAINST THE EMERGENCY PRESSED SINCE VACUUM AND CLEAN AIR FLOW ARE DONE WITH A SAFE HOLD SYSTEM Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 11 e mail info semiconsynapsis com WWW SEMICONSYNAPSIS COM Pa y Pa Seen y qMoteas Inspection Synapsis 4 5 C
20. tton or the right key This will force the machine to process a wafer at a time waiting for a START F 1 key before proceeding with the next one SINGLE CYCLE can be disabled by pressing again its key or F3 and then START F1 to proceed SIGLE CYCLE cannot be used in the MICRO ONLY and has no meaning when working on in spection stations with microscope software active 4 2 Step by step operation It is possible for example for setup purposes to run machine in step by step mode To do so simply press F1 key during operation It can be seen that START button changes to PAUSE when machine is running Pressing PAUSE F 1 during operation forces machine to stop at the end of the current phase or movement Pressing again the key which will turn to START starts again the operation It is important to remember that this key is not an instant stop key The current movement is any way finished and then machine stops If a mapping is running it will be finished before stopping If a cassette inspection must be aborted simply press the END F6 key Machine will stop after the end of the current wafer and will be ready for a new cassette Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 10 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM a j re CHeCTLO Fo Si s zx Cx 45 Ins ce LL Hn Synapsi s During the MICRO ONLY mode the sy
21. y to access the password change dialog box as follows Se NE Please enter your password MODIFY CONFIRM CANCEL F2 F5 ESC Simply insert the old password in the first line then the new one in the second and confirm it in the last one 2 New Password 3 Confirm Password CONFIRM CANCEL r5 _ Esc When done press CONFIRM F5 or CANCEL Esc to accept or reject new password Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 21 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Ja te re gp ctio im 9 Lens Ine pec ELON Synapsis 7 Parameters Please note in the following area each parameter of DEFAULT recipe for all the sizes used configurations before making any modification A complete description of recipe paramet ers is given into the service manual PARAMETER NAME VALUES VALUE 6 COMMENTS Semicon Synapsis is a division of Astel Via Torino 253 10015 Ivrea TO Italy 5 Tel 39 0125 230105 Fax 39 0125 633482 27 e mail info semiconsynapsis com WWNW SEMICONSYNAPSIS COM Pa te ae fhectto m Tole E Ins pection Synapsi s 8 Errors and malfunctions There are some conditions which can result In errors These conditions are especially related with sensor verification and especially vacuum sensor and position sensors Basically when an expected sensor
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