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Atmospheric Pre-aligner User`s Manual

1. Copying Files from the Diskette If any of your files are not correct for your Pre aligner follow these instructions to use EQT to download the correct file s from the diskette 1 2 Load the diskette into the diskette drive Access the main EQT window To download a file press the Download button on the Terminal mode window to access the Download dialog On the Download dialog specify the file type to download from the host com puter to the Controller When you select a file type such as parameter the available files for that type are displayed To display your file on the diskette select the disk drive location in the same way you select it elsewhere on an NT or Windows 95 system Double click on the file to select it or select the file and press the Open button Then press the Download button on the Download dialog Brooks Automation Revision 1 4 9 Operation Atmospheric Pre aligner Using the Fast Align Option User s Manual Using the Fast Align Option 4 10 During initialization the firmware detects the Pre aligner type and sets the default speed mode based on the Pre aligner type Speed and acceleration for all Pre aligner axes are set based on the mode of speed To use the Fast Align Option verify the following 1 Your Pre aligner has the Fast Align Option RPTY 2 The speed mode is set to Fast SPMO 1 RPMO 3 If you are using a PUTA macro it is in the currently active macro file 4
2. 2 Safety Overview This chapter describes safety guidelines for the Brooks Automation Atmospheric Pre aligner All personnel involved in the operation or maintenance of the product should be familiar with the safety precautions outlined in this chapter NOTE This manual is not a controlled copy Updates to this manual may be made as Tech nical Support Bulletins or as a new revision To verify this manual is the current revision call Brooks Automation Customer Support These safety recommendations are basic guidelines If the facility where the Atmo spheric Pre aligner is installed has additional safety guidelines they should be fol lowed as well along with the applicable national and international safety codes Chapter Contents Regalaloiy SNe 644 6605 443 E04 Ea eio cd o DG Od ae EUER CER E 2 3 Salety MOAUICS ioe cne as eades raa ERE riase ria rre EIRE r Eda Eer ETKEN 2 4 Safety ear ciu o o NEM 2 5 Fersnnnel Satety Guidelines aaa 4 d REG t E eo eee en 2 5 Equipment Safety Guldelinis casi easaabsbkkda RR erro ARR d E Rad 2 6 EMC and ES Pee 4 cons 5 veh 55 55 4445 5 6 0 ERR Edo Vea dq dicen 2 8 c sr o Ma RT 2 9 ree ile ig 1 a c Qe Ee o Gb dei ao C edo OEC RR CC 2 10 i 0 EQ ro 1 Dr 2 11 Lockout EO CEPI 2 11 Electrical Hazard Classifications es ies sns been RETI REESE RE RExTA TES 2 12 Chemical Hazards e r 2 14 Thermol T bead araa A RENS 2 15 a E Cent 2 16 Firennd Explosion eo
3. 3 Approximate the correct setting and enter that value using the SWL command 4 To restore the speed and acceleration for all axes use the RSA command either RSA a for an integrated system or RSA A for a Pre aligner only system 5 To save the new setting send the command SAV 6 Repeat your test using the PINL macro Adjust the setting as necessary to cor rect the loading position Chuck Position To verify that the chuck or waiting position of the pins is correct execute the PINC macro From the command line in Terminal mode enter Brooks Automation 6 8 Revision 1 Atmospheric Pre aligner Command Reference User s Manual Using the Macros to Verify Positions PINC The pins should be about 1 mm 0 04 in below the wafer in this position If they are not follow the instructions in the r and z Home Offset Diagnostic that begins on page 44 Unloading or Up Position To verify that the unloading aligning position of the pins is correct execute your PINU macro From the command line in Terminal mode enter PINU The pins should lift the wafer above the chuck so that the wafer does not scrape the chuck If the wafer is not being lifted high enough change the wafer lifting position in the Wafer Parameter File by following these instructions 1 Access Terminal mode on the Teach Pendant or in EQT 2 To read the current setting send the command RWU 3 Add 50 to the number from the previous step Enter this new val
4. Figure 7 3 Inside the Atmospheric Pre aligner End Cover 8 The screen prompts Home set Press Enter Press Enter Brooks Automation Revision 1 7 19 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual 9 Exit Diagnostics mode by pressing Shift Esc 10 Activate Terminal Mode by pressing Ctrl T and then T again 11 To restore operational speed and acceleration use the RSA command and then the SAV command 12 Enter SVON and HOM to turn on servos and home the Pre aligner 13 Check and set the Pin Load Position by using the RWU and SWU commands as described in Unloading or Up Position on page 33 14 In Terminal Mode use the SWL and RWL commands to read the current value which should be about 2000 for a chuck loaded PRE 200 Pre aligner 2000 for a pin loaded PRE 201 Pre aligner 3000 for a chuck loaded PRE 300 Pre aligner 3000 for a pin loaded PRE 301 Pre aligner 15 To restore speed and acceleration use the RSA command and then the SAV command Brooks Automation 7 20 Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing Scaling Factor Test Use the Scaling Factor Test to verify the scaling factor on each axis or to verify that the Mechanical Ratio parameter in the Pre aligner Parameter file is correct You need a measuring device The display reads t ttttttt r rrrrrrr Zi Move Axes where tttttt is the theta position in 0
5. 1 Access Terminal mode in EQT or on the Teach Pendant 2 Enter the command to return the serial number for a Pre aligner For an inte grated system enter RSRN 1 For Pre aligner only system enter RSRN 3 The serial number from the Pre aligner Parameter File is displayed Compare it to the number on the Pre aligner manufacturing label If the numbers match you have the correct Pre aligner Parameter File If the numbers do not match follow the instructions in the section Copying Files from the Diskette on page 4 9 to copy the correct file from your diskette 4 To verify the correct Wafer Parameter File enter the command DUMPW The serial number from the Wafer Parameter File is displayed As you press Enter and the file is displayed one line at a time If the serial number is not correct follow the instruction in the section Copying Files from the Diskette on page 4 9 and follow the instructions to copy the correct file from your diskette 5 To verify the correct Wafer Calibration File enter the command DUMPC The serial number from the Wafer Calibration File is displayed As you press Enter the file is displayed one line at a time If the serial number is not correct follow the instruction in the section Copying Files from the Diskette on page 4 9 and follow the instructions to copy the correct file from your diskette Brooks Automation Revision 1 Atmospheric Pre aligner Operation User s Manual Copying Files from the Diskette
6. Another useful test is to use the SWS Set Wafer Size command in terminal mode You can check the wafer size with the command RWS and set the appropriate wafer size using the command SWS For example SWS 300 will set the wafer size to 300 mm or 12 inches Changing the wafer size will activate the corresponding CCD 7 26 Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual 8 Troubleshooting Overview This chapter gives information on using these commands interpreting the responses and taking recovery actions For problems you cannot solve gather information and contact Brooks Automation Technical Support Use the last page of this chapter s form to provide information to Technical Support so that they can better assist you Contents Sa UL i ee ee rorem 8 2 Cause and Recovery Jor STAT MOSSdfgeS lt nccscaccncsaneeeactavsrenaseans 8 4 Checking Alignment Status with the ALST Command 05 8 6 Checking Limit Switch Status with the RLS Command uuuuue 8 7 Lune De GLT LOBO Lee rodea tbe ped ede ee ES bin eens 8 9 Contact Brooks Automation Technical Support caecis sees eeus 8 10 Brooks Automation Revision 1 8 1 Troubleshooting Atmospheric Pre aligner Introduction User s Manual Introduction This chapter describes how to troubleshoot Pre aligner problems Typically you ver ify what does work and what does not work by running the diagnostics described in Chap
7. Brooks Automation Atmospheric Pre aligner User s Manual k For the Single Axis PRE 050 Pre aligner Three Axis PRE 200 and PRE 201 Pre aligners Three Axis PRE 300 and PRE 301 Pre aligners and the Single Axis PRE 350 Pre aligner Revision 1 Atmospheric Pre aligner User s Manual Information provided within this document is subject to change without notice and although believed to be accurate Brooks Automation assumes no responsibility for any errors omissions or inaccuracies If you have any questions or comments about this manual please complete the Readers Comment Form pro vided at the back of this manual and return it to the Technical Publications Dept at Brooks Automation AcuLigner AcuLine AcuTran AcuTrav AquaTran Atmospheric Dual Arm Robot Atmospheric Express Atmo spheric Pre aligner Atmospheric Single Arm Robot BiSymmetrik Dual Controller ExpressLock EQT 2000 EQT32 FabExpress FrogLeg Gemini Gemini Express Gemini Express Tandem Hercules Hercules Express InCooler InLigner InLine Integrated Front End Express Leapfrog Linear eXchange Linear Track MagnaTran 7 MagnaTran 8 2 Axis MagnaTran 8 3 Axis MagnaTran 8 DFR Marathon Marathon Express Marathon Express Tandem MultiTran PASIV PowerPak Reliance ATR Reliance DFR Reliance WCR Smart Controller TCM Time Optimal Trajectory TopCooler Ultrasort VacuTran Vacuum Robot VCD VCE WAVE WAVE II and Z Bot are trademarks of Brooks A
8. Mechanical Pinch Perform one of the following e Press EMO button user accountable circuit Turn off power from source Brooks Automation 2 20 Revision 1 Atmospheric Pre aligner Safety User s Manual Material Safety Information Material Safety Information Hazardous materials may be present during the operation of the Atmospheric Pre aligner or during maintenance Hazardous material distributors provide a Material Safety Data Sheet MSDS for all materials they supply These sheets provide crucial information pertaining to the hazardous material used in the equipment Isopropyl alcohol may be recommended for use with the Atmospheric Pre aligner The following material safety information is provided as a guideline for proper con duct when working with alcohol and corrective action if exposed Isopropyl Alcohol Safety Information Isopropyl Alcohol IPA is a clear colorless mobile flammable liquid with the chemical formula C3H7OH Short term exposure to IPA is irritating to skin eyes and mucous membranes Long term exposure may cause drying cracking or burning of the skin A person working with IPA must be thor oughly familiar with MSDS precautions and corrective action to take in the event of exposure Pre existing medical conditions may be aggravated by IPA Isopropyl alcohol should not be used with aluminum equipment at temperatures above 120 F Isopropyl Alcohol is incompatible with strong oxi dizing agents acids ch
9. remains on replace the signal cable or Galil board Brooks Automation Revision 1 7 13 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual Servo Test 7 14 Run the Servo Test only after you pass the Encoder Read Test This tests the continu ous action of the amplifier modules and the closed loop servo system It automatically increases the Following Error to infinity so that moving an axis manually does not cause the axis to servo off You can also use this test to decrease Torque Limit so that each axis can be easily moved manually Before you move an axis make sure the Pre aligner signal cable is securely connected You will test the t axis only for a PRE 050 or PRE 350 or test all three axes for a PRE 200s or PRE 300s In the display XXXX TL is the torque limit being sent to the corresponding motor and YYY is the current setting for the maximum torque limit t XXXX r XXXX TL z XXXX YYY Move Axes You need cleanroom gloves and a large slotted screwdriver to follow this procedure 1 Set the torque limit TL for each axis to 3333 by pressing the gt gt gt and lt lt lt but tons as needed 2 To test the t axis toggle on the t axis servo motor 3 With cleanroom gloves on carefully grasp the wafer chuck and rotate it about 1 8 of a revolution You should feel the motor apply a smooth and continuous counterforce When you release the chuck the axis should spring back to t
10. Overhead Hoist Transport A rail guided vehicle and hoist used to transport material above the factory floor over the heads of factory personnel See End Effector Parallel I O allows a Host Controller to communicate with the Atmospheric Pre aligner using the commands detailed in Chapter 8 The characters in each command are converted to sets of binary bits 1s and 0s and the bits for each character are trans mitted down a set of wires as a set one wire per bit Additional wires are used for control or handshaking to direct the transfer of data Typically Parallel I O is bidi rectional that is the wires carry data in both directions A mode that requires two steps to move the complete pitch distance In partial step mode each slot is divided into an up and down position The distance between the up and down positions is called the partial step size The distance between the up and down positions of a slot Personal Computer A computer built around a microprocessor for use by an individ ual as in an office or manufacturing plant The location along the spatial axes R T and Z as appropriate Programmable Logic Controller A dedicated Controller used to automate monitoring and control of industrial equipment Can be used stand alone or in conjunction with other systems See Process Module The cool chamber cover designed to raise and lower the wafer The position the wafer is placed in after processing Priority P
11. Overview This chapter provides an overview of the embedded control software for the Brooks Automation Atmospheric Pre aligner The control software provides a broad range of command options including a number of sophisticated integrated command sequences Communications between the Atmospheric Pre aligner and the host Con troller uses standard EtherNet communications for normal operation or RS 232 com munications for setup and test to access all Atmospheric Pre aligner software commands Chapter Contents COURIR Lr OO Edd oid eod d Deiode EGRE OH ICA ES EZ b ee PE QE Ed 6 2 a Ma idw Eo EE E ORE do GER bac clo dc doleo a OG el 6 3 Macro dos ANENG 4 6k eh es Rad duke dE RN RIEQEARATAAuAP PERIERE RR 6 3 Robot Macro for Fast Align Opel sia 3d ehe ERR CR RACE ea ER d dta d 6 6 Using the Macros to Verify Positions eeseesatusr kk tiber RENE E RESERENT 6 8 Lose OS DE 244 ies de ee ciate dct Nb Jb ee asides 6 8 Chack FOG ni eis bx AME etree ri ERE bende PERPE PESE dite Ed 6 8 Lea or Up POOR c 0 dd eX E I e UEM EERE I DOR CE ee EC UH do 6 9 Brooks Automation Revision 1 6 1 Command Reference Commands Atmospheric Pre aligner User s Manual Commands The most often used Pre aligner commands are listed here For a complete listing of commands refer to the Smart Controller User s Manual NOTE For axes use t r z for a system with only a Pre aligner use T R Z and A The Med or a indicates all Pre aligner axes For position
12. R90 Get the wafer size R91 30 R90 Calculate r axis length for the Partial Retract MOVR R R91 Do partial retract WMOR Wait for r axis to complete movement TSKM 2 Define ALIGN as task 2 ALIGN Start alignment process TSKK 2 End task 2 The Partial Retract of the end effector allows the aligning process to begin sooner than if a Full Retract RETH is required Note that the computation of the r axis length requires that the wafer size be expressed in millimeter units Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Command Reference Robot Macro for Fast Align Option Here is an example of an entire PUTA macro Brooks Automation Revision 1 MACRO PUTA C60 R1 TSKM 1 R21 1 RESP A 15 INDEX C60 R1 MTCR C60 1 0 RSEE C60 R35 WMO A SSP Z 300 SAD Z 300 SDL Z 300 STROK C60 1 OUTP R35 1 WMO Z RSA Z WVAC R35 1 5 RWS R90 R91 30 R90 MOVR R R91 WMO R TSKM 2 ALIGN TSKK 2 RETH WMO R TSKK 1 R21 0 D P ISTAR ENDM Set this macro as task 1 Set R21 to 1 Check if condition allows moving robot axes Set Index Move axes to in front of station and extend Read EE Wait for all robot motion to complete Set speed to slow Stroke Z down Turn off vacuum Wait until Z stops Restore Z speed Wait Get the wafer size Calculate r axis length for the Partial Retract Do p
13. The settings in your Wafer Parameter File are correct for Fast Aligning For information regarding macros and the Wafer Parameter Files refer to Chapter 8 Command Reference Brooks Automation Revision 1 Atmospheric Pre aligner Operation User s Manual Shut down Shut down The following shut down procedure is used to remove power from the Atmospheric Pre aligner in an orderly manner and place the components within the product in safe conditions This procedure is used to prepare the Atmospheric Pre aligner for repair removal or maintenance N CAUTION The shut down procedure is used in the normal shut down of the Atmospheric Pre aligner This procedure completely removes the power source and all other facilities to the Atmospheric Pre aligner and provides guidelines for lockout tagout This procedure is NOT the same as an EMO circuit or other safety interlock 1 All wafer transfers should be completed 2 Shut down the host system Brooks Automation Revision 1 4 11 Operation Atmospheric Pre aligner Emergency Conditions User s Manual Emergency Conditions To actuate the EMO circuit press the EMO button An Emergency Off may cause the following effects If an action is in progress when the EMO is received an error is generated After an EMO the error may need to be reset N CAUTION The Atmospheric Pre aligner is not provided with an Emergency Off EMO device The user is accountable for the EMO circu
14. 0 Reserved 10 15000 Constants used for speeds and accelerations for 11 10000 Standard align wafer rotation and movement 12 50001 13 5000 14 10000 15 5000 16 15000 Constants used for speeds and accelerations for 17 10000 Fast align wafer rotation and movement 18 50001 19 50000 20 10000 21 5000 22 9000 Flat angle 23 0 Measurement type 24 0 Wafer type Brooks Automation Revision 1 4 5 Operation Wafer Parameter File Atmospheric Pre aligner User s Manual Table 4 3 Wafer Parameter Files ADM Example File Description 25 3000 Pin loading position Use RWL and SWL com mands to read and set 26 200 Pin unloading or lift position Use RWU and SWU commands to read and set 27 300 Constants for Fast align 28 200 29 37 Lines 29 through 37 are Reserved 38 2588 CCD1 first pixel 39 22520 CCD1 angle 40 Reserved 41 6215 CCD2 first pixel 42 17950 CCD2 angle 43 46 Lines 43 through 46 are Reserved 47 200 Default wafer size 48 0 Default flat type 49 0 Default wafer type 50 56 Lines 50 through 56 are Reserved Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Operation Wafer Calibration File Wafer Calibration File The wafer calibration factors for alignment are stored in the PRE cal file Calibration factors include wafer size and type CCD locations and offsets The file contains sev eral sets of factors one for each size wafe
15. 01 and rrrrrr is the radial position expressed in 0 001 in Manually move the axis you want to check Measure the physical movement that is the displacement of the axis not the absolute position Compare the result with the reading on the Teach Pendant Brooks Automation Revision 1 7 21 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual Vacuum Valve Sensor 7 22 The Vacuum Sensor indicates the presence or absence of a wafer on the chuck A sen sor switch prevents a signal from being sent to the Controller until the magnitude pressure of the vacuum has crossed a preset threshold setting The vacuum sensor is preset at a level that works correctly and accurately it is preset to 8 in Hg 27091 Pa The vacuum sensor has the following characteristics Functions within a pressure range from 0 to 30 in Hg 0 to 101592 Pa Has a pressure set point hysteresis of 3 over the full pressure range The drift of the threshold setting over time does not exceed this hysteresis Performs to a full scale accuracy of 3 from 40 to 100 F and 5 outside of those temperature parameters from 0 0 to 60 C 32 to 140 F The next figure simulates a vacuum pump and a vacuum gauge The sensor is set to a threshold value of 8 in Hg 27091 Pa The tolerance is 1 in Hg 3386 Pa If there is no leak from pump to chuck and the entire vacuum pathway is plugged any part of the pathway exhibits a pressure
16. 100000 Mechanical ratio used in scaling 0 1 0 Second number is used in encoder counts 0 0 0 Reserved Not used 61655 20369 10957 Operational deceleration 66000 6000 6000 Negative software motion limit 300000 6000 6000 Positive software motion limit 0 0 0 Reserved Not used 0 0 0 Reserved Not used You can reset some parameters such as speed and acceleration with commands You can also change parameters by editing the parameter file refer to the Smart Controller User s Manual Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Operation Wafer Parameter File Wafer Parameter File The wafer parameters are stored in the PRE waf file which defines the wafer param eters for Controller calculations The Fast parameters are for the Fast Align option If you do not have the Fast Align option the Standard parameters determine the align ment speed and acceleration The second column in the table contains example values The values set by Brooks Automation differ among various Pre aligner models Your Wafer Parameter File might have different values than the example Table 4 3 Wafer Parameter Files Line NY Nubes Example File Description 1 PRE 3880 Serial number Use DUMPW command to read 2 4000 Constants used for centering 3 20000 4 200 Constants used for finding flat 5 20000 6 3 Chuck dead band 7 6000 Constants used for Fast centering 8 5000 9
17. Linear Rail Load Lock Load Port Module Low Speed Lower G 6 component and identifies their part numbers In line cool module designed to be installed in a Cluster Tool between the Transport Module and another module See Cooler In line aligner module designed to be installed in a Cluster Tool between the Trans port Module and another module See Aligner See Illustrated Parts Catalog Individual Replaceable Component A large diameter valve used to isolate the vacuum chamber from the pumps Move incrementally A precision screw used to move a mechanism Measurement of mass flow through an orifice in torr liters per second Brooks Automation s patented same side dual end effector robot arm system Light Emitting Diode LEDs are used to indicate the presence of voltages on the con trol circuit board monitor serial communication transmissions and detect substrate presence in cassette slots or slide out from the cassette Movement upwards For the robot this is movement of the arm to the Up position For the elevator this is movement of the platform to the Up position A precision rail used to provide support and direction to a moving mechanism See Elevator Factory interface tool meeting SEMI factory interfacing requirements for open cas settes SMIF pods or FOUPs delivered manually or via factory automated handling systems Usually slightly faster than Homing speed the speed at which the robot moves w
18. Operation User s Manual Theory of Operation In normal operating mode you use macros to control the Pre aligner Use either a PC with EQT software or the Teach Pendant to send commands and macros For informa tion on using EQT32 or the Teach Pendant refer to the Smart Controller User s Manual This chapter reviews commands and macros and when to use them Follow the instructions in this chapter to verify the loading chuck waiting and unloading posi tions before you use the Pre aligner with your system Brooks Automation 4 2 Revision 1 Atmospheric Pre aligner User s Manual Operation Pre aligner Files Pre aligner Files Parameters that determine the Pre aligner behavior are stored in the Pre aligner Parameter File Wafer Calibration File and Wafer Parameter File Table 4 1 Atmospheric Pre aligner Files File Type Extension Description Macro mac This file contains one or more macros Pre aligner par This file contains servo parameters speed and accelera Parameter tion for homing and other parameters needed for oper ating the Pre aligner Wafer cal Pre aligners are factory calibrated to optimize accu Calibration racy The data is stored in the Wafer Calibration file Wafer waf The Wafer Parameter File contains information about Parameter the Flat finder and speeds and accelerations used dur ing alignment Pre aligner Parameter File The Pre aligner parameters are stored
19. Pendant Brooks Automation Revision 1 Connect the Teach Pendant cable to the bottom RJ 11 connector next to the DB 25 connector on the Controller This is the COM2 port The Teach Pendant emits a sound and displays the logo screen when you are connected Installation Atmospheric Pre aligner Initial Power up Sequence User s Manual RJ 11 for Teach Pendant o e o o Oo o o o o e Figure 3 5 Back of the Controller Used with the Atmospheric Pre aligner Brooks Automation 3 10 Revision 1 Atmospheric Pre aligner Installation User s Manual Installing the EQT 32 Interface Installing the EOT 32 Interface You can install the EQT 32 interface to be used with Microsoft Windows 959 or Microsoft Windows NT 3 51 or later Follow these steps to install the EQT 32 inter face NOTE Alterations or changes to the software should only be made by qualified Brooks Automation personnel 1 With Windows 95 or Windows NT running insert the EQT 32 Setup Disk into your floppy drive pA Open the Windows Control Panel dialog box 3 Open the Add Remove Programs dialog box and click on Install 4 Follow the instructions displayed on the window You will be prompted for the previous location of your Eqt32 configuration file Eqt32 ini If you have parameters from a previous installation that you want to save access the directory location of the existing Eqt32 ini file Your existing parameters will be combined with
20. Safety Guidelines for Semiconductor Manufacturing Equipment the SEMI S2 Guidelines Safety Safety Features User s Manual Atmospheric Pre aligner Safety Features A Pre aligner is a low inertia mechanism and turns off servo motors quickly when an obstruction is encountered Low mass and inertia allow the following error to be set low even when high speeds are required Mechanical stops are placed at the positive and negative limits of the r and z axes to prevent the Pre aligner from over travel and possible damage The following conditions result in an internally generated signal that disables the amplifiers The Controller bus power fails A servo amplifier fails Motor power fails inside the Pre aligner The signal cable connection is broken The servo motor control fails Cable Connectors 2 4 Cable connectors for the CCD data cable motor signal cable and power cable are heavy duty locking D type connectors If you disconnect the signal cable the ampli fier is disabled N WARNING Be sure the connector locking screws are locked down during installa tion and operation Brooks Automation Revision 1 Atmospheric Pre aligner Safety User s Manual Safety Considerations Safety Considerations Brooks Automation performs safety assessments for each Atmospheric Pre aligner manufactured by Brooks The safety issues generated during these assessments are discussed in this manual The complete Safety Analysi
21. Step Mode FX Gate Valve GUI High Speed High Vacuum High Vacuum Pump Home Homing Speed Brooks Automation Revision 2 0 The distance that the elevator platform must move upward to place a substrate in the substrate present sensor beam for detection A piece of opaque material that interrupts the beam in an optical sensor when a mov ing mechanism reaches a defined point in its travel An electronic device which emits an optical beam from one side of a notch to a detector on the other side of the notch When a mechanical flag interrupts the beam the posi tion of a mechanism is known FOUP Load Port Module A Load Port Module designed to accept standard FOUPs The exhaust line of a vacuum pump in a vacuum system Brooks Automation s patented robot arm system Front Opening Unified Pods Refers to front opening pods designed to carry 300mm wafers Field Replaceable Unit An elevator mode in which when commanded to move one step the platform will increment by a distance equal to the pitch distance between cassette slots FabExpress An Equipment Front End Module used for horizontal wafer transfer between wafer carriers and the process tool See Slot Valve Graphical User Interface An interface for issuing commands to a computer utilizing a pointing device such as a mouse that manipulates and activates graphical images on a display Usually the highest speed the speed at which the robot moves
22. Z axis idle 19 Track t axis in four axis system is idle 20 Pre aligner theta axis idle 21 Pre aligner R axis idle 22 Pre aligner Z axis idle 23 Track w in eight axis system is idle 24 Servo off robot theta axis 25 Servo off robot R axis 26 Servo off robot Z axis 27 Servo off on track t axis in four axis system 28 Servo off Pre aligner theta axis 29 Servo off Pre aligner R axis 30 Servo off Pre aligner Z axis 31 Servo off on track w in eight axis system Brooks Automation Revision 1 8 9 Troubleshooting Atmospheric Pre aligner Contact Brooks Automation Technical Support User s Manual Contact Brooks Automation Technical Support Even the most reliable Atmospheric Pre aligners require service and support To help you receive the most value from our Specialists have the following information ready before you contact Brooks Automation Technical Support 1 8 10 Record the serial numbers from the following components Controller Pre aligner Robot Provide the location of the Atmospheric Pre aligner Provide the name of the person to contact e mail address and telephone num ber List any error codes received during the failure Prepare a detailed description of the events leading up to the error How long has the equipment been in operation Was any work done on the equipment prior to the error What command was the equipment performing when the error occurred List all actions taken after the error was p
23. acceleration See Low Speed without substrate speed and acceleration See High Speed Brooks Automation Revision 2 0 G 11 Glossary Atmospheric Pre aligner User s Manual WPS Wrist WSO WTP Z Axis G 12 See Wafer Present Sensor On the robot arm the joint two bearings located at the attachment to the end effector See Wafer Slide Out Detector See Wafer Transport Plane The axis of vertical motion For a robot it is the up and down of the robot s arms For an elevator it is the up and down of the platform Brooks Automation Revision 2 0 Atmospheric Pre aligner User s Manual NI A NENNEN NN NENNEN GU M NEN NENNEN Um M NENNEN BROOKS AUTOMATION Reader s Comments Brooks Automation Inc attempts to provide documentation that meets the needs of our customers We continually strive to upgrade the quality of our documentation and would appreciate your help Please use this form to report any documentation errors or to make suggestions for improvement Mail or fax completed copies of this form to the Technical Publications Manager at the address on the other side Your comments and suggestions are always welcome All comments and suggestions become the property of Brooks Automation Inc Brooks Automation may use and distribute any of the information provided in any way it deems appropriate Please specify by Page any errors you have found
24. at a specific location for wafer transport User supplied device that disconnects AC power Hardware based safety circuit used by the CDM or by multiple user supplied devices to interrupt motor power See Emergency Off The mechanical device at the end of the robot s arm that supports the substrate during transport see Pan Erasable Programmable Read Only Memory The EPROM is a device which is used to store the Atmospheric Pre aligner s software The EPROM retains its memory during power off periods See PROM Electrostatic Discharge The transfer of a static charge to or from a human being A type of networking technology for local area networks used to connect computers servers and other digital electronics ExpressLock A small volume 2 shelf Load Lock used to transfer wafers from an Equipment Front End Module to a Process Module Movement outward For a robot this is movement of the robot s arm outward away from the robot s body For an elevator this is movement of the platform arm outward away from the elevator s body The area on a Transport Module where Process Modules or other types of modules can be connected for access by the central wafer handler Fan Filter Unit A device suppling filtered air into a minienvironment Brooks Automation Revision 2 0 Atmospheric Pre aligner User s Manual Glossary Find Bias Flag Flag Sensor FLPM Foreline Frog Leg FOUP FRU Full
25. floppy disk and manuals from the shipping box 4 Remove the bag from the Atmospheric Pre aligner and carefully inspect the product for signs of damage that may have occurred during shipping N CAUTION Do not handle a nickel plated Pre aligner with bare hands Use clean latex barrier gloves or similar gloves Fingerprints will stain finish unless removed immediately with Windex M Cs RECYCLE Recycle all packaging materials according to local regulations Brooks Automation Revision 1 3 3 Installation Atmospheric Pre aligner Installation Procedure User s Manual Installation Procedure The Atmospheric Pre aligner is typically supplied in a standard configuration The information required to install the standard configuration of the Atmospheric Pre aligner is provided in the following procedures Mounting on page 3 4 For the facilities connections refer to Specifications on page 1 10 Mounting The Atmospheric Pre aligner is supplied in a standard configuration The following procedure provides the information required to install the Atmospheric Pre aligner 1 Before installing a Pre aligner prepare a baseplate made of either 0 500 in thick aluminum or 0 375 in thick stainless steel 2 Position the Pre aligner to allow the robot end effector to pick and place wafers For a pin loading Pre aligner orient the Pre aligner so the Blade End Effector clears the pins For a chuck loading Pre aligner make su
26. handshaking lines Typically if a pin is being used for an input to the Atmospheric Pre aligner it is not used as an output also G 3 Glossary Atmospheric Pre aligner User s Manual Dog Clamp Dual Pan Arm Set E84 EEPROM EFEM ELPM Elbow Elevator Emergency Off Emergency Stop EMO End Effector EPROM ESD EtherNet EXL Extend Facet FFU G 4 A metal bar with a bolt through one side and a gripping shape on the other side These are used to attach modules to process chambers The Brooks Automation BiSymmetrik frog leg arm set with two end effectors SEMI E84 0302 Specification for Enhanced Carrier Handoff Parallel I O Interface This standard defines the I O interface used to transfer a carrier to and from one piece of equipment to another Both pieces of equipment manage this operation without control by the factory Electrically Erasable Programmable Read Only Memory The EEPROM is the device which stores Atmospheric Pre aligner configuration information after a store com mand is issued The EEPROM retains its memory during power off periods Equipment Front End Module ERGO Load Port Module A Load Port Module designed to accept standard wafer cas settes in an ergonomic manner The joint on the robot s arms between the inner and outer arm members A device used to vertically position a wafer cassette This is typically done to position cassette slots
27. in the PRE par file This file defines the Pre aligner parameters for the Controller Below is an example parameter file annotated to show the line locations of the parameters Your parameter file might have different values Most parameters have three positions The first position is the T axis value the second position is the R axis value and the last position is the Z axis value For example when the T axis is homed a speed of 1000 is used but when the Z axis is homed a speed of 200 is used Table 4 2 Atmospheric Pre aligner Parameter File PRE 3880 Serial number of the Pre aligner 9600 Baud rate 1000 500 200 Home speed 10000 10000 500 Home acceleration 0 0 0 Encoder resolution 0 0 0 Reserved Not used 2997 9997 15000 Operational speed Brooks Automation Revision 1 4 3 Operation Pre aligner Files Atmospheric Pre aligner User s Manual 4 4 Table 4 2 Atmospheric Pre aligner Parameter File 61563 20339 31027 Operational acceleration 300 300 400 Error limit or following error 250 15 35 GN Proportional gain 0 0 0 Servo acceleration forward 50 10 10 KI Integral gain or Response to error 9999 9999 9999 TL Torque limit 1000 120 150 ZR Derivative gain or Damping element 4352 768 768 Ramp value controls radius of the S curve 0 0 3000 Customized home position 0 20227 2025 Home offset in encoder counts 180000 39370
28. motor revolution away This is critical for maintaining repeatability of the Home position of each axis at a given mechanical calibration This diagnostic step measures and displays the Distance to Index of the r and z axes Note that the t axis does not have a Home Switch The homing procedure moves an axis to its Home switch and then moves in the oppo site direction to find the encoder index The encoder index is one encoder revolution mark H A x Home Sw Index 1 lt lt T First move 2 a gt Second move icum coetu ee gt Distance to Index If the Distance to Index is too short the Controller can miss the first occurrence of index signal because it occurs too soon after the Home switch signal Thus the motor is required to move one more revolution to generate the signal At a particular dis tance this doesn t happen every time and thus creates two different home positions where the second home is too far This test determines the Distance to Index evaluates it and assists in making the cor rection Use these instructions only if you have replaced a pulley belt or motor or if the belt slips 1 Press Enter The Amplifier board initializes If there is no closed loop the test stops If this happens check the connection 2 You are prompted to select an axis to home Use the toggle buttons to select the axis 3 The axis homes stopping at the home swit
29. needs immediate action to recover and sometimes the cause is harmless and does not require any direct action The following table lists the probable cause of the problem and suggested recovery for each of the 16 status bits Table 8 2 Status Bit Error Messages with Cause and Recovery Bit Message Cause Recovery 0 Previous com The command cannot be exe Review the command mand not exe cuted for the current condition and the conditions cuted For example a SVON command cannot execute while axes are moving Also see Bit 2 1 Previous com The command is unknown or has Check command syn mand invalid invalid syntax When Bitlissetto tax 1 Bit O is also set to 1 2 Robot vacuum Vacuum sensor is on an object is Adjust the vacuum sen sensor is activated detected When Bit 2is set to 1 Bit sor on the robot For 3 should be 1 vacuum switch is Pre aligner vacuum on If Bit 2 is 1 regardless of pres testing use the Pre ence of object or status of Bit 3 the aligner Diagnostics vacuum sensor is too sensitive 3 Vacuumswitchis A normal condition For example None ON a GET or PUT command turns Bit 3 on 4 Motorerroronone One or more axes havea position Clear the obstacle send or more axes error condition Excessive force the SVON command has been applied to the force gen and continue If ER is erated by the motor An obstacle too small usually about might be in the path Or the Servo 100 200 change the Err
30. oS S dE oe eee C C ME 7 12 Etsi Home TOS nc no TRTTERTTTETT ITINERE 7 13 c pro AL X er ce PES 7 14 Home les aud ras os qud ERA AN eh a eee 4d dida 7 16 Pd Home OSet et eth ote cae dd dede COE AR oe Edd de CIR a 7 18 ced o c 44 a ne ee re er ee ree re ee 7 21 Tam Valve SenNS f ko os ek ew EN eS RR aus unir O Sb ESE ES oe RRS 7 22 Pre aligner I Os for Integrated Systems only 0005 7 24 a es 5 ERE dU RF UR ORE oe eee Ed EC ees 7 25 Brooks Automation Revision 1 7 1 Maintenance Atmospheric Pre aligner Preventive Maintenance User s Manual Preventive Maintenance This section provides cleaning procedures for routine preventive maintenance of the Atmospheric Pre aligner to reduce unscheduled downtime The Atmospheric Pre aligner is designed to require very little routine maintenance However it is recom mended that the preventive maintenance procedures and schedule provided in this section be followed to extend the operating life of the Atmospheric Pre aligner and to minimize unscheduled downtime If additional procedures are required they will be supplied along with their maintenance schedules by Brooks Automation All Preventive Maintenance procedures and schedules provided here assume that the Brooks Atmospheric Pre aligner is operating in a clean dry inert environment Any deviation from this basic environment will affect the scheduling of PM and may also require additional PM procedures be
31. parameters list the value in Table 6 1 Common Commands Command Example Comment HOME axis HOME r HOME the radial axis LMCR LMCR List all MaCRos in NVSRAM LMCR name LMCR HOM List all lines in one MaCRo MOVA axis MOVA z 3000 MOVe Absolute This moves the Pre aligner z axis 3 inch position from the zero 0 position MOVR axis MOVER t 36000 MOVe Relative Completes one revolution or 360 position RES RES RESet the Controller RFAA RFAA Read Flat Angle Alignment RLS RLS Read Limit Switch RPMO RPMO Read Pre aligner MOde of speed 0 is Standard and 1 is Fast RPTY RPTY Read the Pre aligner TY pe which is either Standard or Fast RWL RWL Read Wafer Load position RWS RWS Read the Wafer Size RWU RWU Read the Wafer Up position SAV SAV SAVe parameters coordinate and calibration data in NVS RAM SFAA SFAA 9000 Set Flat Angle Alignment to 90 SPMO SPMO1 Set Pre aligner MOde of speed to Fast align speed SVON SVONa Turn ON all Pre aligner SerVo motors SVOF SVOFa Turn OFf all Pre aligner SerVo motors SWL SWL 3000 Set Wafer Load position to 0 3 in below the Home position SWS SWS 200 Set Wafer Size to 200 mm SWU SWU 200 Set Wafer Up position to 0 02 in above the Home position Brooks Automation Revision 1 Atmospheric Pre aligner Command Reference User s Manual Pre aligner Macros Pre aligner Macros The most commonly use
32. parts due to the risk of fire or explosion Allow the Atmospheric Pre aligner to completely cool before performing maintenance involving flammable cleaning fluids N CAUTION Whenever any cleaning fluid is used during service of the Atmo spheric Pre aligner all power to the Atmospheric Pre aligner should be disconnected and the standard precautions for use of that fluid must be employed Brooks Automation 2 18 Revision 1 Atmospheric Pre aligner Safety User s Manual Environmental Hazards Environmental Hazards Noise The Brooks Automation Atmospheric Pre aligner provides no direct noise hazard Vibration The Brooks Automation Atmospheric Pre aligner provides no direct vibration haz ard Any vibrations produced are minimal and cause no hazardous conditions Brooks Automation Revision 1 2 19 Safety Atmospheric Pre aligner Matrix of Emergency and Corrective Response Actions User s Manual Matrix of Emergency and Corrective Response Actions The following matrix provides emergency and corrective actions for safety issues that may arise regarding the Atmospheric Pre aligner only Emergency and corrective actions required for the equipment that the Atmospheric Pre aligner is installed in should be provided with that equipment Table 2 4 Emergency Action Matrix Emergency Corrective Response Electric Shock Disconnect from power source Fire Use a non conductive fire extinguisher Class C gt gt
33. the new parameters 5 To execute EQT 32 click the EQT icon The Terminal Mode window opens Figure 3 6 on page 3 11 E E Eqt32 current controller firmware version 4 24A Action File Mode View Log Help xiz ele elslalela ale al 4 gt es m Connected to COM1 A 4 Figure 3 6 Terminal Mode Window Brooks Automation Revision 1 3 11 Installation Atmospheric Pre aligner Installing the EOT 32 Interface User s Manual 6 At the cursor type SVON and press Enter This turns on all servo motors on the Atmospheric Pre aligner 7 Type HOM and press Enter to execute your HOM macro This homes all axes of the Pre aligner When all axes are homed EQT displays a status message A status message or code of 1000 or 1008 indicates all devices are working Refer to the Brooks Automation User Interface Manual 4000 0017 for more informa tion on EQT 32 displays of command responses 8 Use the Vacuum Valve and Sensor Test of the Pre aligner Diagnostics to verify that the vacuum source is correctly connected 9 Send the SVON command All servo motors in the system should turn on SVON also checks internal and external connections such as signal cable and power cable connections If there is a problem SVON sends the prompt In that case send the STAT and ALST commands to find the cause and solution for the problem 10 Send the HOME command For a Pre aligner only system send HOME A to home the P
34. triggered 18 Robot positive Z triggered 19 Track positive t in a four axis system triggered 20 Pre aligner positive theta triggered 21 Pre aligner positive radial triggered 22 Pre aligner positive Z triggered 23 Track positive w in eight axis system triggered Brooks Automation Revision 1 8 7 Troubleshooting Atmospheric Pre aligner Checking Limit Switch Status with the RLS Command User s Manual Table 8 4 Limit Switch Activation Using the RLS Command Bit Meaning when set to 1 24 Robot negative theta triggered 25 Robot negative radial triggered 26 Robot negative Z triggered 27 Track negative t in a four axis system triggered 28 Pre aligner negative theta triggered 29 Pre aligner negative radial triggered 30 Pre aligner negative Z triggered 31 Track negative w in eight axis system triggered When a limit switch is triggered during Pre aligner operation the Pre aligner stops and the Controller returns an error message In this situation you should 1 Send the RLS command to determine which switch was triggered 2 Send the RLS command again to determine if the switch is still active 3 If the limit switch remains on after the second RLS command the Pre aligner is probably at its travel limit Manually move it away from this limit Send the RLS command again If it clears it is likely that the Pre aligner was instructed by software to go too close to the limit This can occur even during teaching if the position taught
35. value equal to the pump pressure However no system is completely leak tight and pressure values depend on the pump capacity cross sectional flow areas and the total volume to be evacuated Gauge Value Sensor shugh Bump A Fitting A Figure 7 4 Vacuum Pump and Vacuum Gauge With the recommended pressure of 20 in to 25 in Hg 67728 to 84660 Pa at the fit ting it takes about 30 ms for the sensor to trigger with a wafer on the chuck If the pressure is less than 20 in Hg 67728 Pa the lag time increases which has a direct impact on throughput If the pressure is more than 25 in Hg 84660 Pa the pressure may be enough to trigger the sensor when there is no wafer on the chuck known as a false positive Brooks Automation Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing If the sensor does not trigger the signal during a set time the firmware sets Bit 7 of the STAT response to indicate an error usually that no wafer is present The recommended pressure values to the fitting are required in order to validate the warranty This diagnostic tests the vacuum valve s and vacuum sensor s attached to the Pre aligner The vacuum to the wafer chuck is controlled by Vacuum Valve 1 and sensed by the Vacuum Sensor On the PRE 200 Pre aligners the sensor is visible through the end cover near the CCDs The vacuum to the pins is controlled by Vacuum Valve 2 but does not hav
36. 2 2 High Voltage Warning Label Brooks Automation Revision 1 2 9 Safety Atmospheric Pre aligner Mechanical Hazards User s Manual Mechanical Hazards Provide a baseplate made of either 0 500 in thick aluminum or 0 375 in thick stain less steel Only persons with the proper training should service or operate the Atmospheric Pre aligner All facilities to the Atmospheric Pre aligner must be disconnected as outlined in the facilities lockout tagout procedure before servicing or injury may result from the automatic operation of the equipment The proper precautions for operating and ser vicing remotely controlled electro mechanical equipment must be observed These precautions include wearing safety glasses steel toe shoes and any other precautions specified within the facility where the Atmospheric Pre aligner is being used AN AX A wamne Moving mechanisms have no obstruction sensors Do not operate the Atmospheric Pre aligner without the protective covers in place or per sonal injury could result in the squeezing or compression of fingers or hands between moving parts When servicing the Atmospheric Pre aligner ensure that all equipment connected to it is also shut down using lockout tagout to prevent automatic movement within that equipment AN TIP HAZARD Tip hazard exists when moving the Atmospheric Pre aligner or when it is not attached to the user s process tool A TRIP HAZARD Trip hazard exists if the facilitie
37. 32 graphical user interface for controlling your system or you can incorporate your own interface in your host system Information for creating your own interface is given in the Smart Controller User s Manual Brooks Automation Revision 1 1 5 Introduction Atmospheric Pre aligner Atmospheric Pre aligner Overview User s Manual Alignment Overview The three axis Pre aligners have servo driven mechanisms to rotate the incom ing wafer between the linear array CCD sensor and the LED array The single axis Pre aligner moves the wafer in the theta direction only the robot moves the wafer in the r and z directions Except for the difference the aligning pro cess is the same LED OCDaray chuck vefer oe Figure 1 2 Side View of the Atmospheric Pre aligner 1 When you execute your alignment macro ALIGN AL BAL or PRL the Controller opens the wafer chuck vacuum valve and checks the sta tus of the sensor If it senses that a wafer is present on the chuck the alignment continues If no vacuum is sensed alignment stops 2 Data from the CCD sensor is sent to the Pre aligner I O board over a separate Data Cable The CPU board plots the encoder count in relation to the CCD count A perfectly centered wafer would appear as a straight line while an offset wafer would appear as a sinusoidal waveform The flat or notch appears as a discontinuity in the data 3 The CPU board analyzes the data and computes a correction vector and
38. 36 no wafer on the ccccc chuck to 2720 wafer completely covers the CCD For models built before October 1998 the numbers may be different The scanning range shoud be 285 when there is no wafer on the chuck and 3328 when the wafer blocks the CCD Brooks Automation Revision 1 7 25 Maintenance Diagnostic Testing Atmospheric Pre aligner User s Manual ANGLE aaaaa N N EandR R Reset S Servo Chuck position in encoder counts from 0 to 65 536 By turning the chuck the chuck position can be increased or decreased Number of the working CCDs When there is a communication error between the Pre Aligner and the Controller the E will be 1 instead of 0 If R 1 then a reset is necessary to set it back to 0 There are two parameters that can be adjusted while running this test Pressing R will reset the Pre Aligner while pressing S toggles the Servo on or off To verify that the CCD is working try the following tests At any time during your tests you can press R to reset the Pre aligner or press S to toggle the Servo on or off 1 Manually turn the chuck The chuck position or angle should increase as you turn the chuck clockwise and decrease as you turn the chuck counterclockwise 2 Place a wafer on the chuck so that the chuck is completely covered Slowly move the wafer off the chuck As you move the wafer the ccccc number should decrease Make sure the CCD number increases as you gradually cover the CCD
39. ACERO d GERE REN 8 3 Brooks Automation Revision 1 v Figures Atmospheric Pre aligner User s Manual This Page Intentionally Left Blank Brooks Automation vi Revision 1 Atmospheric Pre aligner User s Manual Table 1 1 1 2 2 1 2 2 2 3 2 4 4 1 4 2 4 3 6 1 6 3 7 1 7 2 7 3 7 4 7 5 7 6 8 1 8 2 8 4 8 5 Title Atmospheric Pre aligner Models 054 500 s0eeses reed es Controller Electrical Specifications LsL et eect sc d 6d d ED OO ERO AC ad OCDE eee ee Controller SpeciDicatlohg occ srs usi cass vaetbasinweiwans Electrical Hazard Classifications ex hecha Emergency oon MOD Lexexenxe tesi vana tex ax Rd XAR Atmospheric Pre aligner Pies Lus adus 3 e pon eC cues Atmospheric Pre aligner Parameter File Waler raameter PUDOR e eo EECOEIRHE RO HEC fe hiri Water Calibration Filesi iaa2a swetae sce wat enna RARE Rae Common C amd uana linc LES OEC nitr iega Cunmmon NIacpms pce laced eG es hea eeeckees bee EER SHES SS Calice P cru PHP tier eki ESERIES EE Preventive Maintenance Schedule i44 ioss rtr en LONG PEDES x35 Rr d p ded rg det Dt ee Vie oe Active Teach Pendant Keys secessasedAneb tes ERA AER RE li t s HE Input and Output Bits for Port Land Port K Number of CCDs for Various Atmospheric Pre aligners Intormation Commands esos ss rak ed ORE ER ER EFIE Status Bit Error Messages with Cause and Recov
40. CD sensor is sent to the Pre aligner I O board over a separate Data Cable The CPU board plots the encoder count in relation to the CCD count A perfectly centered wafer would appear as a straight line while an off set wafer would appear as a sinusoidal waveform The flat or notch appears as a discontinuity in the data The CPU board analyzes the data and computes a correction vector and a flat notch rotation position The wafer is then centered A three axis Pre aligner has three vacuum pins spaced around the rotat ing wafer chuck These pins shift the wafer to the center position by aligning the offset with the r horizontal axis and then lifting and shift ing the wafer using the r axis and the z vertical axis A single axis Pre aligner uses the robot radial and vertical axes to center the wafer Brooks Automation Revision 1 Atmospheric Pre aligner Adjustments and Calibration User s Manual Wafer Alignment Procedures With the wafer centered in the r direction on the wafer chuck the Pre aligner moves the primary flat or notch to the user specified position The Controller sends a message to the host computer giving the status of the alignment attempt Brooks Automation Revision 1 Adjustments and Calibration Atmospheric Pre aligner Wafer Alignment Procedures User s Manual This Page Intentionally Left Blank Brooks Automation 5 6 Revision 1 Atmospheric Pre aligner User s Manual 6 Command Reference
41. MACRO CVON Turn on the chuck vacuum MACRO ICVON ICVON INPUT L R15 RESP R15 R15 1 ENDM OUTP L R15 ENDM MACRO PINC Move Pin to the home position MACRO IPINC IPINC IPVOF RESP MOVA z 0 ENDM WMO a ENDM MACRO PINL Move pin to loading position SWL RWL MACRO IPINL IPINL This moves the pins that raise and lower the IPVOF RESP wafer into the proper position for the robot to RWL R49 ENDM pick or place a wafer MOVA z R49 WMO a ENDM MACRO PINU Move pin up to the ready or lifted position MACRO IPINU IPINU wafer on pins ICVOF RESP RWU R49 ENDM MOVA z R49 WMO aENDM MACRO PVOF Turn off the pin vacuum MACRO IPVOF IPVOF INPUT L R15 RESP R15 R15 amp 253 ENDM OUTP L R15 ENDM Brooks Automation Revision 1 Command Reference Atmospheric Pre aligner Robot Macro for Fast Align Option User s Manual Robot Macro for Fast Align Option The robot macro PUTA starts the aligning process when a wafer is put on the Pre aligner and the robot arm is retracted only to the point where the Pre aligner can start motion The PUTA macro works only for Pre aligners with the required hardware upgrade To determine if your Pre aligner is set for Fast Align enter the command RPTY to read the Pre aligner type If a 1 is returned the Pre aligner is a Fast Pre aligner Your customized PUT macro is the basis for the PUTA macro The difference between your PUT macro and your PUTA macro are the following lines RWS
42. Maintenance Diagnostic Testing Atmospheric Pre aligner User s Manual Starting Diagnostics To enter Diagnostics mode on the Teach Pendant at the main display screen press CTRL D The Teach Pendant displays the following DIAGNOSTICS ESC QUIT HERE GO If your system has both a robot and Pre aligner you are prompted to select Pre aligner Diagnostics or Robot Diagnostics Select Pre aligner Diagnostics In Diagnostics mode the following keys are recognized Table 7 3 Active Teach Pendant Keys Key Action HERE Continues or accepts similar to Enter ESC Quits cancels or aborts gt gt gt Increments the step or current value lt lt lt Decrements the step or current value Q ON OFF Toggles the theta servo R ON OFF Toggles the r servo Z ON OFF Toggles the z servo Either Theta Jog Key Selects the theta Axis Either Radial Jog Key Selects the r axis Either Z Jog Key Selects the z axis A Selects all axes Y Yes N No Brooks Automation Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing NVSRAM Test NVSRAM Test first checks the Non Volatile Static RAM NVSRAM and then checks the files If the NVSRAM is not correctly formatted the message NVSRAM NOT READY is dis played Refer to the FRMT 313 command for formatting information After you for mat the NVSRAM download the required files These files were delivered on
43. PPM MMC rr err aren 2 11 Lockout TREE esos err pe bes ii bo kae bd ban d enboe EEO 2 11 Electrical Hazard CIaesicaliDB e iesexersscrstek es E YEWESTPEETR 2 12 eemal Fe ocaeca dd OR Ie HERR ood e c i al 2 14 Thermal HA o itn dava doceat ebd Re Gc dob e deae arco 2 15 yacnan DIOS QU ks doen oe eh HDI E REAL A RR IER Pcia 2 16 Fireand Explosion Hazards Losses e EROCRES 45 Sneed ERR US S Ind 2 18 Breen a Hazards Lider kas doce de Edd api pe d bbb aded dba bcd da 2 19 loo eee 2 19 bic o 0 PMID 2 19 Matrix of Emergency and Corrective Response Actions 005 2 20 Material Safety InlOlmIABORL 222342444224 4D ERI HER a e UR erac Rando d ca 2 21 Installation Unpacking and Insnerllon sa cies sabes dade basi shes scenes D iEn CEEE 3 2 Unpacking hada sn eee QR eh OG Ee be ded gie e 3 2 Heer ys ole DESEE Lid docks ade C GIGS ac Kaclkdce do ao bd de dole ibo on 3 4 hio Pr PTT 3 4 COUTET UONE 644 454 bd bw E dept deer d t ded ea de eap OR 3 5 Fial Powel np Seguente ota dd Cobre d iE ER Ye eher deo 3 9 stalling tbe ELT OR eae das dide do cp Rr One EGER EU REP GR Sp aa 3 11 giis c FE oco PPM 3 13 Algnment and Calibratio easi oas4qasa uhbKae bas hess Se eed CARE pena 3 14 Operation o s d edP i ee ee ne ee eer ere eee re ere ee rere 4 2 ii Brooks Automation Revision 1 Atmospheric Pre aligner Contents User s Manual Prealigner FOR oi2odas daseduuwbt4t432 iow bd da dU dE dd ERAI
44. Please suggest any topics or information that is not covered Brooks Automation Revision 2 0 Reader s Comments Atmospheric Pre aligner User s Manual Additional comments Name Title Company Address City State Zip Country Phone Fax E mail Attn Technical Publications Manager Brooks Automation Inc 15 Hlizabeth Drive Chelmsford MA 01824 Phone 978 262 2400 Fax 978 262 2500 Brooks Automation Revision 2 0
45. RE RO Odes ERE 4 3 Prealigner Parameter Pile uiscera hadas we C3 bra eo ERE 4 3 ri 4x 51444 PPMEEIEMF T 4 5 Wy ree 01 0501 PERI rm 4 7 bios gu4 7 6 EPI ane a sue Heed cay eee ene eee 4 8 Copying Files fom the Diskette ck icin whicacseesiGedsinbivarsbassdaceews 4 9 Using the Fast Alm Oi is hc che ei dud UE EE eia REIHE ERO E de dU da 4 10 DUO T E ER EERIERIRV EN en rere ee CER FREE PRSE PE 4 11 Rimmer LORS oeedeteusazvescsPpRERSWEERFESCKERVPRE S EE RE EK eT 4 12 Adjustments and Calibration Atmospheric Pre aligner Alignment iei ceses sk eR RE REREREPRE E CE ERR E 5 2 Alpnmenl 002a Pr r 5 2 Level the Atmospheric Pre ab ene ies ceestesezesuanessceoY osse 5 3 Waler Alienment Procedures sod det eased keh oo She ER FERE RV EREP EST 5 4 Pe ho o itis A MT 5 4 Command Reference o p ran 6 2 Pe er MOD La adir AT er Rha bo ERA ER Rte SR CEP ER d 6 3 Macro 108 AUS v0 d5 25 55 ssas oewe Kees reseed rere ETE PRETEREA 6 3 Robot Macro Jor Past Gent CDUDI so sacs e kes reor ur VE EF a RPEXA REN 6 6 Using the Macros to Verity Positions uoeed kc e re I EID CE HEC 6 8 Loading OM oaasdkaxid4kegubbstd th wawiter bebe b rat Er es 6 8 Chuck OM cides ME 6 8 Unloading or Up Posion Liao dd POI CIA e pR RI HEC ST CR CR E aon d 6 9 Maintenance Pree GI is gk da Se id dea e iy a ap dH RU Hbri Get idw qd P rire 7 2 P
46. a diskette with your system If the NVSRAM is OK the parameter wafer parameter and wafer calibration files are checked Messages report the status of each file Check Sum OK indicates the space allocation for file is not corrupt File Not Open indicates there is no file Download the specified file Check Sum Bad indicates the file is damaged Download the file again For the macro file download the file and send the SMCR command to save the macro file to NVSRAM Brooks Automation Revision 1 7 9 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual Galil and I O Test 7 10 To test the Galil board the diagnostics software attempts to communicate with the Galil board During this step a message indicates whether Galil passed or Galil failed If the test fails there is an error in communication between the Galil board and the CPU board Contact Brooks Automation Customer Support for further instructions Testing Ports A and B The I O Board Test verifies communication for each I O port If the port com munications work the message Port A B OK is displayed and the tests con tinue If a port communication fails the message Port X BAD is displayed where X is the port designator Ensure that all cables are correctly connected The Main Menu is displayed Repeat the test If the test fails a second time check the internal cable connections and jumper settings If the jumper settings are cor
47. a flat notch rotation position The wafer is then centered A three axis Pre aligner has three vacuum pins spaced around the rotating wafer chuck These pins shift the wafer to the center position by aligning the offset with the r horizontal axis and then lifting and shifting the wafer using the r axis and the z ver tical axis A single axis Pre aligner uses the robot radial and vertical axes to center the wafer 4 With the wafer centered in the r direction on the wafer chuck the Pre aligner moves the primary flat or notch to the user specified position Brooks Automation 1 6 Revision 1 Atmospheric Pre aligner Introduction User s Manual Atmospheric Pre aligner Overview 5 The Controller sends a message to the host computer giving the status of the alignment attempt Fast Align Option To further increase the throughput of three axis chuck loading Pre aligners Brooks Automation offers the Fast Align Option A combination of faster hardware move ment faster collection of CCD data and firmware algorithms speed up the overall alignment process Information for using the Fast Align Option in conjunction with the robot is given in Chapter 4 Operation Brooks Automation Revision 1 1 7 Introduction Atmospheric Pre aligner Documentation Overview User s Manual Documentation Overview The documentation provided with the Atmospheric Pre aligner includes this manual which provides a complete documentation packag
48. al T and Radial R axes The upper drive subsystem on a MagnaTran robot which transmits its power to the arms through the outer drive shaft Operating with the T1 Drive this axis drives the arms in both the Rotational T and Radial R axes Tool Command Language An open source scripting language for controlling auto mated tools Technical Support Bulletin Brooks Automation Technical Support Bulletins are distributed to user s of TM G 10 Brooks Atmospheric Pre aligners to notify user s of any additional features changes to the manual changes to the software corrections to the manual and safety issues See Top Reference Flag Brooks Automation Revision 2 0 Atmospheric Pre aligner Glossary User s Manual Top Reference Flag See Flag Torr A unit for pressure measurement 1 atmosphere pressure at sea level is approxi mately 760 Torr Transport Module The central hub of a Cluster Tool Typically a large horizontal chamber with a centrally located wafer handler All Wafer Transport Systems and Process Modules are attached to the external facets of the chamber TSB See Technical Support Bulletin Turbo pump Mechanical vacuum pump used to achieve High Vacuum Ultra High Vacuum Pressure ranges from about 10 Torr to less than 1014 Torr Uninterruptible Power Supply A power supply designed to keep equipment operating without interruption for a short duration allowing proper shut down of the equipment if u
49. ardware and software See Cassette Present Sensor The pressure point in a vacuum system when the rough vacuum is switched to high vacuum Mechanical vacuum pump used to achieve High Vacuum A low mid vacuum gauge using a quartz crystal oscillator as a pressure sensing device It provides a fast response and accurate stable repeatable measurement from 10 4 Torr to Atmosphere There is no high voltage high current or high temperature in the vacuum ensuring safe operation even in explosive or reactive gases Cluster Tool Controller See Cassette Type Offset A SEMI standard dimension the distance from a cassette s base to the centerline of slot 1 A device used to heat wafers placed into it This is typically done before processing to boil off any contaminants or to pre heat the wafer to minimize processing time An optional identification code in a Atmospheric Pre aligner transmission which serves to distinguish the Atmospheric Pre aligner from other devices connected to the same host This number is only used when the Atmospheric Pre aligner is using RS 485 communications A low cost industrial network used to connect devices such as limit switches photo electric cells valve manifolds motor starters drives and operator displays to PLCs and PCs De ionized water Discrete I O provides monitoring and control of external device functions using indi vidual I O pins for each function with no additional control or
50. artial retract Wait for r axis to complete movement Define ALIGN as task 2 Start alignment process Kill task 2 Retract R axis Wait Kill task 1 Set flag to 0 Send status Command Reference Atmospheric Pre aligner Using the Macros to Verify Positions User s Manual Using the Macros to Verify Positions Before operating the Pre aligner verify that the pin heights for loading chuck wait ing and unloading are correct You use your PINL PINC and PINU macros in the following instructions The PRE 300 and PRE 301 can be either pin loading or chuck loading To change from one to the other simply reset the pin height for the loading position and install the correct end effector Loading Position The loading position varies between pin loading and chuck loading Pre aligners For pin loading Pre aligners the loading position determines how high the wafer is lifted The pins should lift the wafer above the chuck about 4 83 mm 0 19 in for a PRE 201 or about 7 1 mm 0 28 in for a PRE 301 For chuck loading Pre aligners the loading position hides the pins completely under the top cover To verify that the loading position of the pins is correct execute the PINL macro From the command line in Terminal mode enter PINL If the pins are not set correctly follow these instructions to adjust them 1 Access Terminal mode on the Teach Pendant or in EQT 2 To read the current setting send the command RWL
51. arts Service G 7 Glossary Atmospheric Pre aligner User s Manual Process Module PROM PSS R Axis Radial Movement RAM Ready String Record Type Release Notes Request Commands Reticle Retract RGV Rough Vacuum Rough Vacuum Pump Robot Rotational Movement RS 232 RS 422 RS 485 A user supplied module for processing wafers attached to the Transport Module Programmable Read Only Memory The PROM is a device which is used to store the Atmospheric Pre aligner s software The PROM retains its memory during power off periods See EPROM See Partial Step Size The axis of radial movement For a robot it is the in and out of the robot s arms For an elevator it is the rotation or in and out of the platform Linear movement of the robot s arm in and out of a station Random Access Memory Parameters set with set commands are stored in RAM until transferred to the EEPROM with a corresponding store command Parameters stored in RAM are erased when power is removed In the Serial Mode the string of ASCII characters the Atmospheric Pre aligner sends when it is ready for the next command A single character field in a Atmospheric Pre aligner transmission which identifies it as either action A set S store P request R response X or a system abort E command Software Release Notes are be distributed to user s requiring new software features A softwar
52. ation 12 Not used Not used Bit 12 is always set to 1 None 13 NVSRAM error Refer to the Software Manual 14 Controller error Internal motion Controller com Send another STAT If munication error The Galil board it does not clear Bit 14 might be damaged or the jumper send RES command configuration is wrong 15 Error on COM1 There are several possible causes Sending AST 1 usually Brooks Automation Revision 1 Use AST 1 command for more information clears the bit 8 5 Troubleshooting Checking Alignment Status with the ALST Command User s Manual Atmospheric Pre aligner Checking Alignment Status with the ALST Command When Bit 7 of the STAT response is set to 1 use the ALST command to determine the specific problem Use the following table to interpret the response to ALST Bit WNrR cC Mo O1 12 15 Table 8 3 ALST Command Error Bits Meaning when set to 1 Wafer is not found on chuck Alignment has been repeated maximum tries and failed No flat or notch found No offset vector found Home not performed Servo motor is off use SVON or see STAT bit 10 Arithmetic calculation error attempted to divide by zero Alignment used two or more cycles and failed Wrong wafer size or type specification Not used Not used Not used Not used Brooks Automation Revision 1 Atmospheric Pre aligner Troubleshooting User s Manual Checking Limit Switch Status with the RLS Command Checking Limit Switch Sta
53. by pigtail leads The default baud rate bits per second is 9600 but you can configure this to 19200 4800 or 2400 A block diagram of the connections is shown in Figure 3 2 on page 3 6 Brooks Automation Revision 1 3 5 Installation Atmospheric Pre aligner Installation Procedure User s Manual N CAUTION Never connect or disconnect the communications lines with power applied to the Atmospheric Pre aligner as damage to internal compo nents may result Do not connect the Atmospheric Pre aligner s power supply to facility power until all installation procedures have been completed Figure 3 2 Atmospheric Pre aligner Wiring Diagram Your configuration might be side connected or bottom connected as shown in Figure 3 3 Brooks Automation 3 6 Revision 1 Atmospheric Pre aligner Installation User s Manual Installation Procedure O vacuum O vacuum Side connections for the 200 series Side connections for the 300 series Bottom connections for the 200 series Bottom connections for the 300 series Figure 3 3 Atmospheric Pre aligner Connections for different Models CAUTION Do not connect the power until all Pre aligner connections are made 1 Connect three Pre aligner cables to the Controller Motor power cable with eight pin connector Motor signal cable with 50 pin connector Pre aligner signal cable with CCD data connector Tighten the cable locking screws to prevent accidental disconnection Broo
54. ce procedure Short description of the service maintenance action Signatures of the service supervisor and production supervisor 4 Using a voltmeter electrically verify that the associated circuitry is de energized Lockout Tagout When using lockout procedures a lock is attached to switches circuit breakers to keep equipment from being set in motion and endangering service person nel One key is to be provided for each lock and must be kept by the person or persons doing the work Each person doing the work must attach their own lock and tag Lockout Tagout Procedure Perform Tagout procedure above but also disconnect AC to the End Tool and lockout per local Lockout Tagout procedures Electrical Hazard Classifications The following table describes the four types of electrical hazard classifications as per Brooks Automation 2 12 Revision 1 Atmospheric Pre aligner Safety User s Manual Electrical Hazards SEMI S2 0200 Brooks Automation has designed the Atmospheric Pre aligner to require minimum need to conduct testing or maintenance Calibrations and adjust ments are performed with the power on and live circuits covered No equipment should ever be repaired or replaced with the power on Table 2 3 Electrical Hazard Classifications Brooks Automation Revision 1 Classification Description Type 1 Equipment if fully de energized Type 2 Equipment is energized Energized circuits are covered
55. ch and then at the index mark The Distance to Index is displayed in encoder counts Brooks Automation Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing T R XXXXXXX Z Distance to Indes One revolution is four times the encoder pulses per channel 4 If the Distance to Index is bad you are prompted to move the axis to a GOOD position This is the position where you can release the belt directly attached to the z axis motor or r axis limit switch flag Press ESC to start over or Enter to continue 5 You are prompted to lock the axis so it cannot move Release the belt or limit switch flag When you are finished press ESC to start over or Enter to con tinue 6 While the motor is moving to position the display reads MAKING CORREC TION 7 When the correction is done you are prompted to replace the belt or tighten the limit switch flag After the belt is replaced press Enter Brooks Automation Revision 1 7 17 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual r amp z Home Offset 7 18 This test is for the z axis of three axis Pre aligners only Ignore the r Home Offset test The r axis diagnostic is no longer used The z axis diagnostic performs standard HOMing on the z axis with the pin high Use this step to calibrate the Pin Chuck Position or z axis Home Offset of the z axis pins The correct Pin Chuck Position PINC is 1 mm 0 04
56. command that supports the ALL option The robot s identification of a specific set of R T and Z coordinates The location of the robot s arm relative to station parameters that is Theta Station Number R Extended or Retracted and Z Up or Down and Slot A software command used in serial communications with the Atmospheric Pre aligner that stores a selectable parameter to the EEPROM See Substrate Transport Plane In the context of the Atmospheric Pre aligner a subcategory is a variable parameter in a transmission to or from the Atmospheric Pre aligner Subcategories often describe a position to be acted upon or a variable to be set A thin quartz glass sheet used for producing Liquid Crystal Displays Can also refer to a silicon wafer See Wafer Substrate Present Sensor An optical sensor that senses substrate presence See Wafer Present Sensor Substrate Slide Out Sensor An optical sensor that senses when any substrate is out of a cassette slot See Wafer Slide Out Detector Substrate Transport Plane The plane coincident with the bottom surface of the substrate as the substrate is T Axis T1 Drive T2 Drive TCL being transported See Wafer Transport Plane The axis of rotational movement of the robot s arms The lower drive subsystem on a MagnaTran robot which transmits its power to the arms through the inner drive shaft Operating with the T2 Drive this axis drives the arms in both the Rotation
57. compensate for an uneven mounting loca tion Refer to Mounting on page 3 4 for complete installation information NOTE It should not be necessary to level the Atmospheric Pre aligner unless this is a new installation or if the aligner has been removed and replaced or re installed During the mounting procedure you align the aligner to the robot end effector and also level the Atmospheric Pre aligner chuck surface Brooks Automation Revision 1 5 3 Adjustments and Calibration Atmospheric Pre aligner Wafer Alignment Procedures User s Manual Wafer Alignment Procedures The following alignment procedure provides the information required for standard wafer alignment of the Brooks Automation Atmospheric Pre aligner Aligning a wafer 5 4 The three axis Pre aligners have servo driven mechanisms to rotate the incoming wafer between the linear array CCD sensor and the LED array The single axis Pre aligner moves the wafer in the theta direction only the robot moves the wafer in ther and z directions Except for the difference the aligning process is the same LED QCDaray chuck vefer P di Figure 5 1 Side View of the Atmospheric Pre aligner When you execute your alignment macro ALIGN AL BAL or PRL the Con troller opens the wafer chuck vacuum valve and checks the status of the sensor If it senses that a wafer is present on the chuck the alignment continues If no vacuum is sensed alignment stops Data from the C
58. cter are transmitted down a wire in single file Typically no additional control or hand shaking wires are used The control loop that governs the motions of the drive motors A command which sets a parameter in RAM In general set commands can have their status requested with corresponding request commands and can have their values stored to the EEPROM with corresponding store commands On the robot arm the joint located at the drive shaft The Brooks Automation frog leg arm set with one end effector See Slot Valve One of the positions on the inside of a substrate cassette that holds substrates Usually substrate cassettes have 25 slots The slot number of the home position See Home The valve located at a Transport Module facet that isolates the TM from the module connected to the facet SMIF Load Port Module A Load Port Module designed to accept standard SMIF Pods Standard Liters Per Minute 28 SLPM equals 1 CFM Glossary Atmospheric Pre aligner User s Manual SMIF SPS SSO Standard Order Station Station Coordinates Store Command STP Subcategory Substrate Standard Mechanical Interface Facility Refers to sealed environment containers for transporting wafers See Substrate Present Sensor See Substrate Slide Out Sensor The default order in which parameters are listed when using the ALL option The spe cific standard order is shown in the reference entry for each
59. d Pre aligner macros include ALIGN CVON CVOF HOM and PINL For an integrated system the HOM macro typically sends all axes in the system to the HOME position Your alignment macro might be named AL or some name other than ALIGN Table 6 2 Common Macros ALIGN Align the wafer on the wafer chuck with vacuum source on CVON Wafer Chuck Vacuum ON CVOF Wafer Chuck Vacuum OFf HOM Send to home position for r and z axes The t axis does not have a Home Sensor PINC Move PINs to Chuck position where wafer rests on wafer chuck with pins approxi mately 0 04 in 1 mm below wafer PINL Move PINs to wafer Loading position PVOF Pin Vacuum OFf PVON Pin Vacuum ON PINU Move PINs to Unloading position until wafer is slightly above the wafer chuck about 0 03 in 0 75 mm At this position the radial axis can center the wafer Macro for Aligning The ALIGN or AL BAL or PRL macro performs the steps to align the wafer to the previously user defined angular offset position It calls a series of macros that are listed in the table on the next page This example ALIGN macro might be different than your ALIGN macro MACRO ALIGN R20 1 Set a flag for multi tasking TSKM 0 Define a task for multi tasking RESP a 15 Verify that conditions are correct to proceed IPINC Move pin to the chuck position ICVON Turn on the chuck vacuum R87 271 Set R87 to 271 decimal BCOR 0 R87 Begin correction of off
60. e a vacuum sensor 1 2 Vac Sensor On Off On Off Vacuum Sensors Vac Valve On Off On Off Vacuum Valves Press 1 or 2 When you toggle the switches the valve and sensor have opposite indicators That is when the vacuum valve is on the sensor is off and so on With Vacuum Valve 1 in the Off state valve open and an appropriate vac uum source connected to the Pre aligner repeatedly place and remove a wafer on the Wafer Chuck and watch Vacuum Sensor 1 Turn the vacuum valve off open the valve by using number key 1 for valve one and then pressing the 2 key for the second valve Place and remove a wafer on the chuck The vacuum valve should indicate On and Off respectively If it does not verify that the correct vacuum pressure is present at the fitting Brooks Automation Revision 1 7 23 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual Pre aligner I Os for Integrated Systems only This step tests the input output connections for an integrated system Robot I O ports are Port A and Port G Pre aligner connections are on Port L and input is read from Port K The two Pre aligner output bits and the one input bit are described in the table Table 7 5 Input and Output Bits for Port L and Port K Port Fon Bit Assignments I O Number Type en L Output Bit 0 Chuck vacuum valve High to open 40 Bit 1 Pin vacuum valve High to open 41 Bits 2 through 7 Not co
61. e command used in serial communications with the Atmospheric Pre aligner that requests information from the Atmospheric Pre aligner Glass plate that contains the patterns to be reproduced on the wafer Movement inward For a robot this is movement of the robot s arm inward towards from the robot s body For an elevator this is movement of the platform arm inward towards from the elevator s body Remote Guided Vehicle Pressure ranges from atmosphere to 10 Torr A mechanical vacuum pump used to provide the initial evacuation of a chamber A device used to move wafers between various stations Within a Transport Module the robot moves wafers between the modules connected to the facets Circular movement of the robot s arm between the various stations A serial communications protocol for communications between two devices This pro tocol uses one wire for transmitting one wire for receiving and a common ground in a shielded cable A serial communications protocol for communications between two devices This pro tocol uses two twisted pair wires one for transmitting and one for receiving A serial communications protocol for communications between multiple devices This Brooks Automation Revision 2 0 Atmospheric Pre aligner User s Manual Glossary SCARA SECS I SECS II SECS GEM SEMI SEMI MESC Serial I O Servo Set Command Shoulder Single Pan Arm Set Slit Valve Slo
62. e for selection installation opera tion maintenance and repair of the product Changes An overview of the changes to this manual since its initial release Chapter 1 Introduction An overview of the product Chapter 2 Safety Safety concerns and requirements for the product Chapter 3 Installation Site preparation unpacking and installation information for the product including all setup procedures initial check out and alignment Chapter 4 Subsystems Detailed information on the various subsystems of the product Chapter 5 Operational Interfaces Detailed information on the interfaces to the product Chapter 4 Operation Operating procedures for the product including an overview of all controls and indicators Chapter 5 Adjustments and Calibration Standard adjustments and calibrations required for proper operation of the product Chapter 6 Command Reference Software control features for the product including a com plete Command Reference and Error Reference Chapter 7 Maintenance Preventive maintenance schedules and procedures and basic repair procedures for the standard maintenance of the product Chapter 8 Troubleshooting Troubleshooting guidelines for the product Glossary Definitions of terms used within this manual Brooks Automation 1 8 Revision 1 Atmospheric Pre aligner Introduction User s Manual Using this Manual Using this Manual This User s Manual provides documentation for opera
63. e them consecutively For example if you suspect that the z axis needs to be adjusted you would use only the r amp z Home Offset Diagnostic Step to check the home offset The following maintenance schedule provides the information required for standard user maintenance of the Brooks Automation Atmospheric Pre aligner Table 7 1 is provided as a quick reference to all scheduled maintenance NOTE The following Preventive Maintenance Schedule is based on a certified clean dry environment The user should adjust the Preventative Maintenance Schedule to account for any deviations from this environment AN WARNING Cleaning the Brooks Automation Atmospheric Pre aligner requires that the power is off and power is secured per facilities lockout tagout procedure This is a Type 1 category procedure Table 7 1 Preventive Maintenance Schedule Procedure Page Frequency Cleaning 7 4 As required Brooks Automation Revision 1 7 3 Maintenance Atmospheric Pre aligner Cleaning User s Manual Cleaning If your environment is Class 10 000 or more you will need to regularly clean the CCDs and possibly the LED Required Tools and Test Equipment Isopropyl Alcohol 100 DI Water Cleanroom Wipes Cotton swab Cleaning the CCDs To determine whether or not the CCDs need to be cleaned run the CCD and Chuck Diagnostic Step When a wafer completely covers the CCD the number should be as high as 2720 When the CCD is
64. edures must be followed regarding the venting of gases The standard vacuum safety measures for the application in which the Atmospheric Pre aligner is being used should be applied A DANGER Implosion may result from equipment damage It is essential that a complete inspection of the equipment be performed prior to use CAUTION gt Uncontrolled venting such as opening an unequalized slot valve may result in severe damage to the equipment A CAUTION The Brooks Automation Atmospheric Pre aligner is designed specifi cally for vacuum and has no overpressure protection Internal pres Brooks Automation 2 16 Revision 1 Atmospheric Pre aligner Safety User s Manual Vacuum Hazards sures must never exceed normal atmospheric pressure as damage to the Atmospheric Pre aligner could result Brooks Automation Revision 1 2 17 Safety Atmospheric Pre aligner Fire and Explosion Hazards User s Manual Fire and Explosion Hazards The Brooks Automation Atmospheric Pre aligner provides no direct fire or explosion hazard However the use of Isopropyl alcohol or other flammable solvents around the Atmospheric Pre aligner while power is applied does present the possibility of fire or explosion Cleaning fluids may leave a flammable residue If they are being used during servicing of the Atmospheric Pre aligner the proper precautions for use of those fluids must be observed N WARNING Never use isopropyl alcohol to clean hot
65. ener Models ees dordack re tx dct aded d ee E GRE Pre n 1 3 Dperalion LIUOFVIEW La 66 idee ss ede done shee dk wA RARO HERR REN d da id dia 1 5 AID OVNEN LA e px ER AH PALA IO EA ORE EE OR acd Ea ORE 1 6 Documentalioni CVI 12a 2 CREER AW RCDEVRAOHORR EAR GE VR EO CK deque 1 8 Lung Das DOCU asa Fr EROR ORE AVCARHE HAE ECHO re ee re eee EE ee 1 9 Additional Reference Materials 2s dwevet ri E EaTurPRE CERTES REY 1 9 Note Hazards and FIIDEPMDE a 1 aaa da dH CORO I e DH Re E 1 9 itle i210 RPEMMCCEEICUP WRITER CEP 1 10 Elecucal SpecilcaDloDlb s casser d bed A Rob CE RR Eri bESE RE TREE AREE 1 10 Varom CPCCA ONS a 42 9d OI e CR ICE UE ACE SERI ROC dae E 1 11 Mechanical Specifications 1d odor 3o UR PRICE NOR Dean ACE OE ed acad 1 11 Seleme OCIS Lou a d e p dpi ER DH HCDERERRE HERO HER HERE 1 11 Safety Regulatory Complante iud cesa ke eR RE EVE PETIV EX OR EYE ERN ES E PEEN 2 3 ed PL IGHEER P CER a eo o d o ier d 2 4 Brooks Automation Revision 1 i Contents Atmospheric Pre aligner User s Manual Se rc o PP ere es ae ee ee ere ee eee ree ere 2 4 ates ePIC os os d Pes ERE FFREPVEVEFEVEERFEETEFATEETPEREFMHERPEVA 2 5 Personnel Safety Guidelines dna 00h diode o E ERU EH o oed 2 5 Equipment Safety Guidelines i iler ober dok ar bp ba d itaki 2 6 ENE and EOD PCO 6s ideo bk a idco edo eg bed bdo bdcied nba bea 2 8 BH MC P A 2 9 Mechabical AZAS cnkicds neds A RXEPEERERESAR RE E AREE DE A RR ET EE 2 10 ceni octo PEWP
66. ental mechanical electrical and vacuum requir ments your facitlity must have before installing a Pre aligner The Pre aligner is designed for cleanroom environments It is not intended for use in environments of explosive mixtures corrosive conditions high humidity or dust Specifications for operation and storage are as follows Operating Temperature 59 F to 89 F 15 C to 32 5 C Shipping Temperature 4 F to 104 F 20 C to 40 C Storage Temperature 13 F to 131 F 25 C to 55 C up to 149 F 65 C for 24 hrs Humidity 10 to 80 relative non condensing Lighting Standard lighting provided in the cleanroom environment where the Atmospheric Pre aligner is installed is sufficient for proper operation and maintenance Electrical Specifications 1 10 The Atmospheric Pre aligner requires the use of the Brooks Automation Smart Con troller that provides power for operation The actual power being drawn will depend upon operations being performed however all power wiring must be capable of car rying the full load Internal power converters produce the different voltages required by the different subsystems of the Atmospheric Pre aligner NOTE The facility is responsible for the main disconnect device between the Atmospheric Pre aligner and the facilities power source ensuring it complies with the correct electric codes Service to the Atmospheric Pre aligner should have the appropriate fuse or circuit breaker ra
67. erformed What were the results of those actions Is than any other information that may assist our Specialist Contact Brooks Automation Technical Support Tel 1 978 262 2900 Fax 1 978 262 2515 e mail tscallcenter brooks com Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Glossary This Glossary provides a list of common terms and acronyms used in this document and their defini tions um micron Abort Command Absolute Coordinates Action Commands AGV Aligner ALPM AMHS API ASCII Brooks Automation Revision 2 0 Micrometer 0 001 mm A command to the Atmospheric Pre aligner which causes any action in progress to halt and resets any error condition The Atmospheric Pre aligner is left unreferenced after an abort command The distance from Home the reference position in millimeters or degrees as appropri ate For a robot this is the location of the arm along the three axes R radial T rotational and Z vertical For an elevator this is the location of the platform along Z vertical and depending upon the options installed along R radial All commands that cause the Atmospheric Pre aligner to execute physical actions Automated Guided Vehicle A computer controlled unmanned transport vehicle A device used to ensure the proper centering and alignment of a wafer Mechanical contact aligners use pins or other fixtures to ensure proper wafer
68. ery ALS Command Error BIS lt 2s3rcs lt s p RE E EA ETEE A Limit Switch Activation Using the RLS Command Galil Motion Control Board Status Bits Brooks Automation Revision 1 Tables vii Tables Atmospheric Pre aligner User s Manual This Page Intentionally Left Blank Brooks Automation Vill Revision 1 Atmospheric Pre aligner User s Manual Changes Overview Changes may be made to this manual to ensure that it will continue to provide the most complete documentation possible for the Brooks Automation Atmospheric Pre aligner This section provides a brief description of each change This manual is not a controlled copy Updates to this manual may be made as Tech nical Support Bulletins or as a new revision To verify this manual is the current revision call Brooks Automation Customer Support Revision 1 This manual was previously released as Equipe PRI Automation Atmospheric Pre aligner Manual December 1998 Part Number 4000 0015 Revision 1 The manual was transferred to the Brooks Automation format Brooks Automation Revision 1 Ix Changes Atmospheric Pre aligner User s Manual This Page Intentionally Left Blank Brooks Automation x Revision 1 Atmospheric Pre aligner User s Manual 1 Introduction Overview This Introduction provides a brief overview of Brooks Automation Atmospheric Pre aligner highlighting its features operation and specificatio
69. he original position 4 Increase Torque Limit by using the arrow keys and repeat the preceding step 5 To test the r and z axes remove the Pre aligner End Cover Figure 7 1 which is opposite the CCDs Brooks Automation Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing End cover Figure 7 1 Atmospheric Pre aligner Showing End Cover Notice the large gear pulley This is part of the z axis drive assembly With cleanroom gloves on carefully grasp the gear and rotate it about 1 8 of a revo lution You should feel the same smooth and continuous counterforce as gen erated by the t axis motor Again the axis should spring back to the original position when you release it Notice the lead screw at the upper left corner This is part of the r axis drive assembly With a large slotted screwdriver rotate the leadscrew approxi mately 1 8 of a revolution You should feel the same smooth and continuous counterforce as generated by the t and z motors The axis should spring back to the original position when you release the screw Increase the Torque Limit for r or z and repeat until you feel a much stronger resistance Brooks Automation Revision 1 7 15 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual Home Test and Set 7 16 Each Pre aligner motor is factory set such that the distance between the Home switch and the encoder index is always between 1 3 and 2 3 of a
70. he amplifier board P3 pin 2 and 3 should be 41V to 46V replace the amplifier board If no voltage check motor power supply torroidal trans former and relay 4 Motor Power Sup Check I O to power supply cable and I O board ply indicator 5 Robot Interface Check the Power interface board located above the Board Power Sup switching power supply ponere Tsu e If the LED lights check I O to power aly accompanied supply cable and I O board by bit 3 PP i If LED is not ON check relay input for 5V 6 Switching Power None This condition occurs approximately 30 ms Supply indicator before the Controller shuts down 7 Bus Power Good N A Does not occur during diagnostics indicator Brooks Automation Revision 1 7 11 Maintenance Atmospheric Pre aligner Diagnostic Testing User s Manual Encoder Read Test Use this test to verify that the Controller receives the correct feedback from the Pre aligner Before you move an axis as requested make sure the Pre aligner signal cable is securely connected t XXXXXXX r XXXXXXX Z XXXXXXX Move Axes As you manually move each axis observe whether the encoder number counts up or down As the t axis moves in the positive clockwise direction the number should count up and as it moves in a negative direction the number should count down smoothly As the r axis moves in the positive counter clockwise direction the number s
71. hen a substrate is on the end effector For dual end effector robots the speed at which the robot moves along the T or Z axis when a substrate is present on either or both end effectors or along the R axis when a substrate is present on the active arm Movement downwards For the robot this is movement of the arm to the Down posi tion For the elevator this is movement of the platform to the Down position Brooks Automation Revision 2 0 Atmospheric Pre aligner User s Manual Glossary LPM MAC ID Medium Speed MTR MTTR OCP OCR OEM OHT Pan Parallel I O Partial Step Mode Partial Step Size PC Physical Coordinates PLC PM Poppet Post Position PPS Brooks Automation Revision 2 0 See Load Port Module Media Access Control ID The network address for a component connected to a DeviceNet network Only dual end effector robots radial motions have a medium speed option The speed at which the dual end effector robot performs radial motions when the active arm s end effector has no substrate but the inactive arm s end effector has a substrate Multi end effector Transport Robot See Robot Mean Time To Repair Off Center Pick A feature of Brooks robots that allows the robot to execute compound move trajectories which are not limited to pure radial moves Optical Character Reader A device used for optical character recognition Original Equipment Manufacturer
72. hould count up and as it moves in a negative direction the number should count down smoothly As the z axis moves up the number should count up and as the z axis moves down the number should count down If this test fails for an axis replace the signal cable If the test continues to fail contact Brooks Automation Customer Support for further instructions Brooks Automation 7 12 Revision 1 Atmospheric Pre aligner User s Manual Maintenance Diagnostic Testing Limit amp Home Test Before you move the axes to activate the switch indicators make sure the Pre aligner signal cable is securely connected In the display the square brackets indicate the characters inside might not appear on the screen The symbols H and respectively indicate that the negative limit switch home switch and positive limit switch are activated ts r z H H Act Limit Switches When you move the axes to their limits negative or positive the display changes to indicate activation of the limit switches Activating the negative limit switch on an axis triggers the Home switch for that axis If the Limit switches remain off at all times verify that the signal cable and Pre aligner interface board are securely connected If the Limit switches remain or at all times unplug the signal cable If the limit switch then turns off replace the limit switch assembly If the limit switch
73. ic Interference EMI it is strongly recom mended that you mount the Pre aligner directly to equipment ground forming a metal to metal contact Protection against electrostatic discharge ESD is designed into the Pre aligner The Pre aligner complies with the ESD requirement of the EMC Directive Brooks Automation 2 8 Revision 1 Atmospheric Pre aligner Safety User s Manual Safety Labels Safety Labels Hazards to personnel include electric shock or burns Damage to equipment may result from faulty installation improper operation inad equate or incorrect maintenance and other forms of misuse or abuse Safety labels are attached to both the Pre aligner and Controller N WARNING Ignoring information about potential hazards can lead to serious harm to personnel and or damage to equipment and may result in the nullification of the manufacturer s equipment warranty High Voltage Label The high voltage warning label is attached to the Pre aligner Figure 2 2 shows the label that is affixed to the Brooks Automation Atmospheric Pre aligner These labels are used to alert personnel to hazards on or within the Atmo spheric Pre aligner and to provide information about the Atmospheric Pre aligner To replace a lost or damaged label call Brooks Automation Technical Support A WARNING LN HIGH VOLTAGE CAN CAUSE SEVERE INJURY OR DEATH TRAINED SERVICE PERSONNEL NLY REMOVE POWER BEFORE OPENING Figure
74. in below the underside of the wafer when the wafer is on the wafer chuck 1 The first screen prompts you to select r or z Press the lt Z On Off key to select the z axis PRESS R TOGGLE OR PRESS Z TOGGLE 2 After the z axis moves to its calibrated position the screen displays HOMING Z AXIS OFFSET CORRECT Y YES N NO 3 The correct offset for pins is about 1 mm 0 40 in below the underside of the wafer as shown in Figure 7 2 on page 7 18 Figure 7 2 Pins and Chuck Below the Surface of the Wafer Brooks Automation Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing 4 If the position is correct press Y and Enter to return to the main menu If the position is incorrect and you have a PRE 200 or PRE 201 Pre aligner proceed to the following steps If your model is a PRE 300 301 350 or 050 you cannot access the pulley report the problem to Brooks Automation Customer Sup port 5 Remove the Pre aligner end cover which is opposite the CCDs Refer to Figure 7 3 on page 7 19 6 Press N to indicate the position is incorrect The following message is dis played SWITCHING OFF SERVO Move Z axis to O and Here or Esc 7 Set the position by moving the big pulley manually by hand until the pins are approximately 1 mm 0 04 in below the underside of the wafer Hold the pul ley and then press the Enter key Home amp Limit Switch Big Pulley
75. is Page Intentionally Left Blank Brooks Automation 2 22 Revision 1 Atmospheric Pre aligner User s Manual 3 Installation Overview This chapter provides complete installation procedures for the Brooks Automation Atmospheric Pre aligner including unpacking assembly facilities connections ini tial setup and initial check out Chapter Contents Unpacking and oo iene hone eben ae eee EE db d 3 2 Installation PRA Le rad ed ceo EE Rr EPIRI Reb a bp P add dc Pd dd 3 4 ital Powertip Seguen as iossesxas p Redkbud dg dead dd Rd dad eig bei d ea ia 3 9 Installing the BOT 32 Interia eranc e ence ih REL ERRSEREC RR RE RREEE 3 11 Preliminary Teaching cesssumsteuesrr A RESARRERRE IAPRERK EE ERR PE A TES 3 13 Altepment and ARO a e niea qoa aa pa CE der eaten er aeta 3 14 Brooks Automation Revision 1 3 1 Installation Atmospheric Pre aligner Unpacking and Inspection User s Manual Unpacking and Inspection The Atmospheric Pre aligner is shipped individually sealed to maintain cleanroom conformance Inspect and verify its contents against the checklist provided on the front page of the OR Report any damage immediately to the shipper and to Brooks Automation The contents of the shipping crates will depend on the items purchased Refer to the QR for the exact contents The Quality Report OR is a permanent record of the Atmospheric Pre aligner as it was manufactured by Brooks Automation In addition to providing information ab
76. is beyond the limit In this case change the taught position Also if the Pre aligner goes slightly beyond its taught position as it decelerates at the end of a motion in a given axis and then returns to its designated position To avoid this decrease the speeds and accelerations If the RLS command you sent after changing the Pre aligner position cleared all bits this indicates a problem in the limit switch assembly The Pre aligner might need to be serviced Call Brooks Automation Customer Support for assistance Brooks Automation 8 8 Revision 1 Atmospheric Pre aligner Troubleshooting User s Manual Using the GLST Command Using the GLST Command The Galil motion control board status is given in a 32 bit double word For a four axis system bits 12 to 15 20 to 23 and 28 to 31 are zeros Table 8 5 Galil Motion Control Board Status Bits Bit Meaning when set to 1 0 Write or read time out 1 Responds with the prompt 2 Board is in debug mode 3 Galil command error 4 Integrator output exceeds torque limit TL 5 7 Always 0 8 Position error on robot theta axis 9 Position error on robot R axis 10 Position error on robot Z axis 11 Position error on or track t axis in four axis system 12 Position error on Pre aligner theta axis 13 Position error on Pre aligner R axis 14 Position error on Pre aligner Z axis 15 Position error on or track w in eight axis system 16 Robot theta axis idle 17 Robot R axis idle 18 Robot
77. it Brooks Automation 4 12 Revision 1 Atmospheric Pre aligner User s Manual 5 Adjustments and Calibration Overview This chapter provides directions for the alignment of the Brooks Automation Atmo spheric Pre aligner and for aligning a wafer on the product Chapter Contents Atmospheric Pre aliener Algimnent iss eesesnR n ERU ERFREEN ERE A CE ERE E 5 2 Alpnmenl SE PPP PT 5 2 Level the Atmospheric Pre ahener ov sees caewsnesses ur sesecee ese 5 3 Waler Alipnment Procedures lt 4 5 lt 454005 esis kes reporna r EAr rE ERES 5 4 PEA AM 5 4 Brooks Automation Revision 1 5 1 Adjustments and Calibration Atmospheric Pre aligner Atmospheric Pre aligner Alignment User s Manual Atmospheric Pre aligner Alignment The Brooks Automation Atmospheric Pre aligner must be aligned with the system that it will be operating in to prevent misplacement of wafers or collision with the robot Note that even a small misalignment can interfere with proper system opera tion The user must perform the following alignment procedure as part of installing the Atmospheric Pre aligner in a system during routine maintenance whenever the Pre aligner is moved or replacement is required Brooks Automation recommends an alignment check under the following circumstances A complete alignment when the Atmospheric Pre aligner is first setup at the user s site A complete check when the Atmos
78. ither a Brooks Automation Smart Controller ESC for single arm robots or an Brooks Automation Dual Controller EDC for dual arm robots can control a Pre aligner The number of axes in your system determines the specific ESC EDC model The Controller contains the Pre aligner input output board For a three axis Pre aligner a Pre aligner Amplifier Board amplifies the PWM motor driver signals to drive the three motors in the Pre aligner For a Single axis Pre aligner a single AMC driver unit is used rather than an amplifier board The CPU Board has on board Non Volatile Static Random Access Memory NVS RAM to store macros and critical files Firmware is loaded on EPROMs on the CPU board The Controller processes the wafer edge image data from the Pre aligner Charged Couple Device CCD The CCD LED pairs monitor the edge of the wafer during wafer alignment The Controller CPU board is equipped with an on board Math Coprocessor for processing the image data You can use a hand held Teach Pendant with LCD display or a personal com puter PC to control your Pre aligner b The Teach Pendant communicates through an RS 232C serial link from the COM 2 port on the Controller and executes macros written by the user that reside in the Controller Information on using the Teach Pen dant is located in the Smart Controller User s Manual You can use any standard personal computer using serial communica tions Brooks Automation provides the EQT
79. ks Automation Revision 1 Installation Atmospheric Pre aligner Installation Procedure User s Manual Data cable Motor signal cable o Power cable Figure 3 4 Atmospheric Pre aligner Cable Connections 2 Verify that the power source is properly grounded Adherence to National Electrical Code is required 3 Confirm the AC power setting on the voltage selector Unless otherwise requested the Controller voltage is set to 120 VAC when shipped Your Controller is factory set according to your Certificate of Compliance COC A CAUTION Setting voltage incorrectly can damage the robotic system 4 With system power OFF connect the Controller AC power cable to an AC outlet connected to the host system EMO circuit The Controller does not have a power switch Connecting the Vacuum Line For an integrated system connect the vacuum line to a vacuum source that is separate from the robot vacuum system The robot can move wafers while the Pre aligner is aligning wafers In normal operation both Pre aligner and robot vacuum valves should not open simultaneously but this can happen when the throughput is very fast 1 Locate the quick connect vacuum fitting near the Pre aligner connec tions Connect the hose to the vacuum source Vacuum Specifications on page 1 11 Brooks Automation Revision 1 Atmospheric Pre aligner Installation User s Manual Initial Power up Sequence Initial Power up Sequence Brooks Automa
80. lign the wafer A difference in hardware makes the PRE 200 a chuck loader and the PRE 201 a pin loader The Three Axis PRE 300 and PRE 301 have three axes to center and align the wafer The physical dimensions are larger than those of a PRE 200 or PRE 201 Pre aligner to accommodate 12 in 300 mm wafers A difference in software settings makes the PRE 300 a chuck loader and the PRE 301 a pin loader You can reset the software to change the load type by using the RWL and SWL commands Refer to Chapter 8 Commands for information about using these commands The Single Axis PRE 350 has one axis the t axis to center and align the wafer The physical dimensions are larger than those of a PRE 050 to accommodate 12 in 300 mm wafers Table 1 1 Atmospheric Pre aligner Models Model peus Wafer Sizes Load Type E PUN PRE 050 1 3 to 8 in 76 to 200 mm Chuck Horseshoe PRE 200 3 3 to 8 in 76 to 200 mm Chuck Horseshoe PRE 201 3 3 to 8 in 76 to 200 mm Pin Blade PRE 300 3 200 and 300 mm with Chuck Horseshoe optional 150 mm Brooks Automation Revision 1 Atmospheric Pre aligner Introduction User s Manual Atmospheric Pre aligner Overview Table 1 1 Atmospheric Pre aligner Models Number End Model of Axes Wafer Sizes Load Type Effector PRE 301 3 200 and 300 mm with Pin Blade optional 150 mm PRE 350 1 200 and 300 mm with Chuck Horseshoe optional 150 mm Operation Overview E
81. lorine acetaldehyde ethylene and isocyanates IPA decomposes into hazard ous carbon monoxide and carbon dioxide Hazard Emergency Action Fire Flammable combustible material may be ignited by heat sparks or flames e Vapors may travel to a source of ignition and flash back Container may explode in heat of fire Fire may produce irritating or poisonous gases e Small fires may be put out with a CO or dry chemical type extinguisher Large fires may be extinguished with water spray fog or foam Move the container from fire area if this can be performed without risk Leak Shut off ignition sources No flames or smoking in hazard area e Stop leak if possible e For small spills take up with sand or other noncombustible absorbent material and dispose of properly Inhalation May be poisonous if inhaled e Vapors may cause dizziness or suffocation Move victim to fresh air and call emergency medical care If victim is not breathing perform artificial respiration Skin Contact May be poisonous if absorbed through the skin Contact may irritate or burn skin and eyes e Incase of contact with eyes flush eyes with running water for at least 15 minutes Incase of contact with skin wash skin with soap and water Remove and isolate clothing and shoes at the site Brooks Automation Revision 1 2 21 Safety Atmospheric Pre aligner Material Safety Information User s Manual Th
82. mand cerie dust 44 dE PER RARPENODASAPEE PE iaie reie 8 9 Contact Brooks Automation Technical Support 2ss aoa cuore noa n e 8 10 GN EM ons 4 been REPE iain sd 8 LEE Edu d Let ue LESE T G 1 Reader s Comments iv Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Figures Figure Title Page ld Atmospheric Pre daliemetisieess eru RERO REE FREE RREE EY 1 2 12 Side View of the Atmospheric Pre mllgnet iios ss rex ed tec 1 6 2 1 Safety Hazard Location on the Pre aligner idisse ce acess 2 7 2 2 High Voltage Warming Lapel sass ua Veuvawadcked xaxaiiddawkdn bd dicic d 2 9 3 Atmospheric Pre aligner Mounting Tabs 0 0 0008 3 5 3 2 Atmospheric Pre aligner Wiring Diapram 6s lt lt 0i 00 rr R9 3 6 3 3 Atmospheric Pre aligner Connections for different Models 3 7 3 4 Atmospheric Pre aligner Cable Connections 0000 3 8 3 5 Back of the Controller Used with the Atmospheric Pre aligner 3 10 oo Terminal Mode Wit eaa Rub E ER ERROR eR RARE PP RRE RA Redi d ER 3 11 5 1 Side View of the Atmospheric Prealloner s ccesesssack9 e RATER IR nn 5 4 7 1 Atmospheric Pre aligner Showing End Cover 1 n 7 15 7 2 Pins and Chuck Below the Surface of the Wafer 0 66 2s00seeeees 7 18 7 9 Inside the Atmospheric Pre aligner End Cover sees sor nan 7 19 74 Vacuum Pun and Vacuum CUBE deca a x ara RO e al Ger i OG 7 22 S Informalhon Request Sereen yc cuna d 443 9 R EER ES CA
83. n 8 2 Revision 1 Atmospheric Pre aligner Troubleshooting User s Manual Introduction In EQT 32 select the Troubleshooting button The Troubleshooting dialog is dis played Select Information Request and press the Run button Nine commands are executed and the results are displayed as text messages Problems are highlighted with a red box E Information Request i21 x Teast 1 ast 2 Gist iPura ALS ANCS ALST VER Previous command not execu Alignment in progress Vacuum sensor is activated STAT tab is selected Vacuum switch is on Motor error on one or more axes One or more limit switches are triggered True ne or more axes are not homed vet True Error on last alignment False Running Macro False ne or more axes are moving False Hexadecimal status word Servo off on one or more axes True Error on COM 2 False Not used N NV SR M error False Binary equivalent Controller error False Error on COM 1 False Send status word indicating controller status hex 1460 bin 0001010001100000 Coren Figure 8 1 Information Request Screen Alternatively you can send commands in Terminal mode from either a Teach Pen dant or EQT 32 Brooks Automation Revision 1 8 3 Troubleshooting Cause and Recovery for STAT Messages Atmospheric Pre aligner User s Manual Cause and Recovery for STAT Messages The setting of each status bit is caused by one or more reasons Sometimes the cause is fatal and
84. ner User s Manual Diagnostic Testing 7 6 Brooks Automation provides Diagnostic tests to troubleshoot the Pre aligner Pre aligner Diagnostics are available only with the Teach Pendant not with EQT Refer to the Smart Controller User s Manual for detailed information about using the Teach Pen dant The Diagnostics Menu displays the current step and its title Use the gt gt gt or lt lt lt but tons to select the next or previous step When the desired step is displayed press HERE ENTER After each step press HERE to return to the Diagnostics Menu The Pre aligner Diagnostic Mode has 10 or 11 steps For a system with only a Pre aligner you have Steps 1 to 11 without Steps 5 and 6 as shown in the first column in the table below If you have an integrated system with both robot and Pre aligner you have Steps 14 to 24 as shown in the second column below NOTE The diagnostic tests are presented in numerical order in this chapter but you can run any test by itself as needed Table 7 2 Diagnostic Tests Warnings and PRE INT Test Purpose Cautions Page 1 14 NVSRAM Verify that NVSRAM is cor 7 9 rectly formatted and all required files are available 2 15 Galil and I O Verify that the Galil board and If this test fails 7 10 I O ports are functioning cor you cannot run rectly Do not use to test exter any other steps nal I O 3 16 Encoder Read Verify that the Co
85. nfiguration is added or when a known application specific issue is being corrected CF files receive a part number and a revision number which is changed upon subsequent releases of new CF files If you request a change to a specific application you will see this change on all updated future CF files If new applications are added your application remains the same Brooks Automation Revision 2 0 Atmospheric Pre aligner User s Manual Glossary Control Display Module A small hand held local Controller for the robot It provides access to all robot func Convectron Gauge Cooler CLPM CORBA CPS Crossover Cryopump Crystal Gauge CTC CTO D1 Degas Device ID DeviceNet DI Water Discrete I O Brooks Automation Revision 2 0 tions required for setup and testing of the robot A thermal conductivity vacuum gauge that is gas dependant i e the gauge must be calibrated for the type of gas being used These gauges are used to measure vacuum to 1 millitorr A device used to cool wafers placed into it This is typically done after processing in a hot process to prevent damage to the wafer cassette Cassette Load Port Module A Load Port Module designed to accept standard wafer cassettes Common Object Request Broker Architecture Provides an interface that supports interoperability of software application regardless of platform operating system pro gramming language and network h
86. nnected 42 to 47 K Input Bit 0 Chuck vacuum sensor Low if activated 40 Bits 1 through 7 Not Connected 41 to 47 BYTE 01234567 OUT 00111111 IN 11111111 Use the number keys 0 and 1 to toggle the two output bits The first two bits should toggle indicating that the robot connections are working The third and fourth bits should toggle to indicate the Pre aligner connections are working The remaining bits do not toggle Brooks Automation 7 24 Revision 1 Atmospheric Pre aligner Maintenance User s Manual Diagnostic Testing CCD and Chuck Test Use this test to verify that the CCDs and the wafer chuck are functioning correctly CCD ANGLE E R N ccecce aaaaa 0 0 0 R Reset S Servo 1 2 or 3 CCD The CCD number displayed on the first line is 1 2 or 3 which indicates the size of the wafer The table below summarizes the CCD numbers for various Pre aligners and wafer sizes Table 7 6 Number of CCDs for Various Atmospheric Pre aligners Pre aligner Wafer Size CCD PRE 300 or PRE 350 6 in optional 1 PRE 300 or PRE 350 8in 2 PRE 300 or PRE 350 12in 3 PRE 200 PRE 100 or PRE 050 3 or 4in 1 PRE 200 PRE 100 or PRE 050 5 or 6 in 2 PRE 200 PRE 100 or PRE 050 8 in 3 PRE 100 built before March 3 4 or 5 inch 1 1995 6 or 8 in 2 The remaining display items are defined as follows CCD Scanning range in CCD pixels from
87. not covered the number should be very low about 36 NOTE For models built before October 1998 the numbers might be different Before cleaning the CCDs disconnect the Pre aligner To clean the CCDs use one of these steps 1 Tip the Pre aligner on its side and blow compressed dry air against the three CCDs 2 Wet a cotton swab with isopropyl alcohol and lightly brush the tops and sides of the three CCDs 3 Blow compressed dry air on the CCDs to dry them N CAUTION Dispose of cleaning cloths and cotton swabs per facilities procedures and local regulations Brooks Automation 7 4 Revision 1 Atmospheric Pre aligner Maintenance User s Manual Cleaning Cleaning the LEDs Cleaning the LED is more difficult and unless the environment is extremely harsh is not necessary N CAUTION To maintain the extreme cleanliness achieved at the factory wear gloves when handling any of the Atmospheric Pre aligner compo nents that will enter the vacuum environment Cleaning the LEDs 1 Locate the LED on the underside of the Pre aligner top 2 Dampen a lint free cloth with isopropyl alcohol 3 With the Pre aligner tipped up on its side drop the cloth through the opening so that the ends of the cloth extend through each side 4 Set the Pre aligner down on a flat surface 5 Pull the cloth back and forth gently across the LED Brooks Automation Revision 1 7 5 Maintenance Diagnostic Testing Atmospheric Pre alig
88. ns Additionally the chapter organization and a description of each chapter s contents is presented and notation conventions are explained Chapter Contents Atmospheric Pre aligner Overview eissesesdexeveRr Ur RE REC ERE PESEREES 1 2 l1 o PE rr 1 3 Atmospheric Pre aligner Model iiiesasbasaekadaxokberer exa Ka be 1 3 Operation OVErviEW aid Qo REO IG i eO RO E CU IHRE EM 1 5 Alenen 0 Anm 1 6 Documentation LIVBIVIEME 4 asa esse PERCPEN Y PER DUI RES Teens 1 8 Usine Tao Manual enh 244234 id D EE a EP dE ERA PEE RH d d sas 1 9 Additional Reference Materials auc acaca ddeed dep eR e bn 1 9 Nore Hazards and PIDEN a 1a 3 49 de LP Rot ar dei QR VE RCR eb D o OF V RP Preis 1 9 BUSCO s bic rr Cup dosi ius pdt eee ae etl eo dia du dekh 1 10 EDD SECTOR S vea ERR FRESEA RIP E RPURAR AR PARE RP PA 1 10 TROU CSCIC nk i CI E doe d dal doe eO GE doe CE RC eee 1 11 Mechanical Spectiicalionns 16224 u x ieee ended ritareita hitaina 1 11 Pen EGG PODVEETA La a6 detnr er o oO AHORA Era 1 11 Brooks Automation Revision 1 1 1 Introduction Atmospheric Pre aligner Atmospheric Pre aligner Overview User s Manual Atmospheric Pre aligner Overview 1 2 The Pre aligner determines the center of the wafer and the orientation of the fiducial and positions the wafer for handling A wafer handling system requires a Pre aligner if The fiducial must be oriented to a specific axis in the tool The wafer must be placed in the process or measuremen
89. ntroller Ensure the Pre 7 12 receives the correct encoder aligner signal cable feedback from the Pre aligner is securely con nected 4 17 Limit amp Home Test the limit and home Ensure the Pre 7 13 switches aligner signal cable is securely con nected 7 18 Servo Check servo motors for all three Run only if 7 14 axes of 200 and 300 series For Encoder Read test the PRE 050 and PRE 350 passed checks t axis servo motor Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Maintenance Diagnostic Testing Table 7 2 Diagnostic Tests PRE INT Test Purpose ae ane Page Cautions 8 19 Home Testand Use if belt slipping is suspected Ensure all belts 7 16 Set or after replacing robot parts pulleys motors that require detaching belts and so on are securely attached 9 20 rand z Home Sets the physical Home for pins Ensure no limit 7 18 Offset with z axes switch is triggered 10 21 Scaling Factor Check mechanical ratio Ensure the Pre 7 21 aligner signal cable is securely con nected 11 22 Vacuum Valve Check vacuum sensor adjust Ensure vacuum 7 22 Sensor ment source is con nected NA 23 Pre aligner Check vacuum valves and sen Ensure all cables 7 24 I Os sors and hoses are con nected 12 24 CCDand Chuck Verify the Video Board func Ensure all cables 7 25 tions are connected Brooks Automation Revision 1 7 7
90. or Limit ER is too small See setup and increase also Bit 10 5 One or more limit A limit switch can be positive or Send the RLS command switches are trig negative Use the RLS command to determine which gered to display detailed information on limit switches are on or limit switches triggered and move away from them Brooks Automation 8 4 Revision 1 Atmospheric Pre aligner User s Manual Troubleshooting Cause and Recovery for STAT Messages Table 8 2 Status Bit Error Messages with Cause and Recovery Bit Message Cause Recovery 6 One or more axes With this condition the Controller Get Controller ready to are not homed yet will not allow a Move command Home and then HOME on the axes Power up or discon the Pre aligner nection of the signal cable sets this bit to 1 7 Pre Alignererror This indicates a general error in See ALST command on last alignment alignment Send the ALST com mand to determine the specific error 8 A macro is run The bit is set to 0 after the macro Send the STOP com ning executes the last ENDM com mand mand 9 Oneormoreaxes Any Move command causes Bit9 Send the STOP com are moving to be set to 1 mand 10 Servo OFF onone Bit 10 is set to 1 when SVOF is Send SVON command or more axes issued or a motor error condition is generated 11 Error on COM2 There are several possible causes Sending AST 2 usually Use AST 2 command for more clears Bit 11 inform
91. or insu lated Type 3 Equipment is energized Energized circuits are exposed and inad vertent contact with uninsulated energized parts is possible Potential exposures are no greater than 30 volts RMS 42 2 volts peak 60 volts DC or 240 volt amps in dry locations Type 4 Equipment is energized Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible Potential exposures are greater than 30 volts RMS 42 4 volts peak 60 volts DC or 240 volt amps in dry locations 2 13 Safety Atmospheric Pre aligner Chemical Hazards User s Manual Chemical Hazards The Brooks Automation Atmospheric Pre aligner does not make use of any hazard ous chemicals However it may be recommended that Isopropyl alcohol be used for cleaning sections of the Atmospheric Pre aligner during routine maintenance proce dures A WARNING Some chemicals may leave a flammable or toxic residue When a chemical is used during servicing the Atmospheric Pre aligner the standard precautions for use of that chemical must be observed These safeguards include suf ficient ventilation proper disposal of excess chemical and wipes and any other pre cautions specified for use of hazardous chemicals within the facility where the Atmospheric Pre aligner is being used N WARNING Whenever any cleaning fluid is used during service of the Atmo spheric Pre aligner the facilities environmental procedures must be followed
92. out procedure Potentially hazardous condi tions or actions may exist that may result in personal injury The following are general recommendations for LOCKOUT and or TAGOUT for sys tems manufactured by Brooks Automation Use LOCKOUT TAGOUT for high voltage electrical circuit repair Use TAGOUT for low voltage below 30 volts electrical circuit repair Use LOCKOUT TAGOUT for maintenance cleaning or lubricating moving parts if the Atmospheric Pre aligner is used with in an environment with a robot or high voltage over 30 volts Brooks Automation Revision 1 2 11 Safety Atmospheric Pre aligner Electrical Hazards User s Manual Tagout When using tagout procedures a written warning is attached to the switches circuit breakers that are placed in a SAFE or OFF position The SAME person shall remove the tag once the work has been completed Tags and their attach ments shall be substantial enough to avoid accidental removal The tag and attachment shall be non reusable self locking non releasable and attached by hand A nylon cable tie is recommended Tagout Procedure 1 Notify all affected personnel that a tagout is required 2 Set the system circuit breaker or main disconnect switch to the off position 3 Place a warning tag on the circuit breaker handle bar or main dis connect switch The tag must have the following information Date of maintenance service action Names of the persons performing the servi
93. out serial number model number etc it also provides critical data about load port designations system assignments station numbers etc Make copies of the form and keep a copy close to the Atmospheric Pre aligner Should maintenance be required data from the OR will be needed This chapter gives instructions for installing a Pre aligner only If you are installing an integrated system use the instructions from your Robot Manual and any other compo nent manuals to coordinate the installation of all components To install a Pre aligner you will Unpack the Pre aligner and the Controller Position the Pre aligner and Controller Level the Pre aligner Connect the Pre aligner to the Controller Connect the vacuum source to the Pre aligner Access a user interface EQT or a Teach Pendant Verify connections Teach and operate the Pre aligner Unpacking Instructions NOTE The Atmospheric Pre aligner was assembled and bagged in plastic in a cleanroom environment To ensure the cleanliness of the Atmospheric Pre aligner only unbag it in a cleanroom environment 1 Remove the Pre aligner from its shipping box Remove the anti static plastic bag s Brooks Automation 3 2 Revision 1 Atmospheric Pre aligner Installation User s Manual Unpacking and Inspection 2 If the Pre aligner was shipped wih a Smart Controller unpack is also from the shipping box Remove the anti static plastic bag 3 Remove cables
94. performed The user should adjust the Preven tative Maintenance Schedule as appropriate to account for any deviations from this environment If your environment is Class 10 000 or more you will need to regularly clean the CCDs and possibly the LED To determine whether or not the CCDs need to be cleaned run the CCD and Chuck Diagnostic Step When a wafer completely covers the CCD the number should be as high as 2720 When the CCD is not covered the number should be very low about 36 NOTE For models built before October 1998 the numbers might be different Before cleaning the CCDs disconnect the Pre aligner To clean the CCDs use one of the methods described in the next section of this manual Brooks Automation Revision 1 Atmospheric Pre aligner Maintenance User s Manual Preventive Maintenance Schedule and Procedures Preventive Maintenance Schedule and Procedures The Pre aligner has no user serviceable parts and maintenance is minimal When maintenance occurs the equipment is fully de energized which results in a Type 1 task hazard rating Work defined as Type 1 is considered safe The Preventive main tenance which is cleaning and a five point checklist are Type 1 procedures Diagnos tic tests are Type 2 procedures The operator uses the teach pendant Use the Brooks Automation Diagnostic software to verify any hardware problems Although the diagnostic steps are presented here in numerical order you do not need to us
95. pheric Pre aligner is replaced A complete check if the Atmospheric Pre aligner was involved in a wafer transfer error Alignment Strategy The alignment is performed to ensure proper equipment operation and precise wafer handling within the user s system The teach pendant or a host computer and the command set described in Chapter 6 Command Reference will be used during the per formance of the Alignment Procedure N CAUTION A thorough alignment protects against equipment damage and mis aligned or sliding wafers Prior to beginning the alignment procedure verify the following T Read this chapter and the Alignment Procedures before doing any alignments 2 Read and understand Chapter 2 Safety di Become familiar with the safety warnings and the procedures to ensure safety while performing the procedures 4 Become familiar with the host computer or teach pendant 5 Power up and initialize the Atmospheric Pre aligner Brooks Automation Revision 1 Atmospheric Pre aligner Adjustments and Calibration User s Manual Atmospheric Pre aligner Alignment 6 Follow the alignment procedures provided in this section in the order pre sented Note that this section provides an overview of the alignment process which will reference the actual procedures as required Level the Atmospheric Pre aligner Adjustable feet are provided on the Atmospheric Pre aligner These feet are used to support the Atmospheric Pre aligner to
96. position by mechan ically moving a wafer placed into them Non contact aligners scan the wafer and pass information regarding the wafer s position to the host Controller which then directs the system wafer handler on how to pick up the wafer to ensure that it will be properly positioned AGV Load Port Module A Load Port Module designed for automated loading and unloading by an Automated Guided Vehicle Automated Material Handling System Automated carrier transfer to and from Pro duction equipment including stockers interbay transport and intrabay transport sys tems Application Programming Interface Provides an interface for an application program to access the operating system and other services American Standard Code for Information Interchange An assignment of alphanu meric characters to 8 bit data byte values Used by many communication protocols including RS 232 Glossary Atmospheric Pre aligner User s Manual Assign Commands Atmosphere ATR Backing Pump Bakeout Base Transfer Offset Batch Transfer Arm BCR Bellows BOLTS BTA BTO BiSymmetrik Cassette Elevator Cassette Present Sensor Cassette Type Offset Category CDM Command Response Configuration Files All commands that both set a parameter in RAM and EEPROM The average pressure exerted on the earth s surface Atmospheric Transfer Robot The mechanical pump used to discharge gases at atmospheric press
97. r Brooks Automation sets the values during calibration do not edit this file or modify the values Table 4 4 Wafer Calibration Files Index Wafer Calibration File Description PRE 2636 Serial number 76 Wafer size 0 Wafer type 0 76 Wafer size 1 0 Wafer type 2 1 CCD number 3 3 Number of repetitions 4 3500 Maximum offset 5 0 Reserved 6 0 Reserved 7 0 Reserved 8 2501 CCD position 9 22467 CCD angle 10 1000 Offset correction for Window 0 11 997 Offset correction for Window 1 12 997 Offset correction for Window 2 13 1001 Offset correction for Window 3 14 1060 Offset correction for Window 4 15 1070 Offset correction for Window 5 The above items are repeated for other sizes Use the RCT command to Read the Calibration Table Refer to the Brooks Automation Software Manual 4000 0012 for details Brooks Automation Revision 1 Operation Atmospheric Pre aligner Verifying Correct Files User s Manual Verifying Correct Files The correct files for your Pre aligner must be resident on the Controller NVSRAM Each unit is delivered with the corresponding files on a diskette If the Controller is delivered with the unit the correct files are already downloaded to the Controller If you are not sure you have the correct files loaded for your unit compare the serial number on the unit with the serial number in each file as instructed in the following steps
98. re aligner axes This works for both a single axis Pre aligner or a three axis Pre aligner For an integrated system send HOME A to home the robot axes and then HOME a to home the Pre aligner axes Brooks Automation 3 12 Revision 1 Atmospheric Pre aligner Installation User s Manual Preliminary Teaching Preliminary Teaching With the Pre aligner initialized and homed teach the desired angular positioning of the flat or notch of the wafers 1 Use the RWS and SWS commands to read and set the wafer size 2 Use the RFAA and SFAA commands to read the current flat notch orientation setting and set the desired flat notch orientation setting In the following teaching example the wafer size is set to 200 mm and the angular ori entation is set to 45 15 degrees gt RFAA Read Flatfinder Alignment Angle 9000 Angle is currently set at 90 gt RWS Read Wafer Size 150 Current Wafer Size setting is 150 mm or 6 in gt SWS 200 Set Wafer Size to 200mm gt SFAA 4515 Set Flatfinder Alignment Angle to 45 15 gt SAV SAVe new values to NVSRAM Brooks Automation Revision 1 3 13 Installation Atmospheric Pre aligner Alignment and Calibration User s Manual Alignment and Calibration 3 14 The Brooks Automation Atmospheric Pre aligner must be aligned with the system that it will be operating in to prevent damage to wafers Note that even a small mis alignment can interfere with proper Atmospheric Pre aligner opera
99. re the Horseshoe End Effector will not hit the CCD sensors 3 Verify that the Pre aligner is co planar to the robot end effector The end effec tor must be parallel with the wafer surface If the robot Z column is not perpen dicular to the baseplate use a leveling plate to level the Pre aligner chuck surface 4 Use the four mounting tabs at the corners of the Pre aligner to bolt the Pre aligner to a mounting baseplate or other frame Brooks Automation 3 4 Revision 1 Atmospheric Pre aligner Installation User s Manual Installation Procedure Mounting tabs Figure 3 1 Atmospheric Pre aligner Mounting Tabs Connections The standard configuration of the Atmospheric Pre aligner requires a signal cable data cable power cable and a vacuum connection The following procedures provide the information required to make all connections Safety glasses should be worn at all times when working around the Atmospheric Pre aligner Connecting the Atmospheric Pre aligner to the Controller Brooks Automation provides an RS 232C connection for host control The sys tem host transmits ASCII commands to the Controller through a DB 25 male connector The RS 232 serial port is located on the CPU board at the back of the Controller box The RS 232 cable provides these connections RX TX RTS CTS Signal GND and Shield The shield is either soldered to the D shell connectors at each end or connected to the chassis of the host and Controller
100. rect replace the I O board Testing Input G In the display the order of XXXXXXXX Bit 0 to Bit 7 is left to right Bit 0 XXXXXXXX Bit7 That is the left most digit is the least significant bit LSB and the right most digit is the most significant bit MSB Testing Input G VALUE XXXXXXXX Generate Error Port G is an internal 8 bit port on the Pre aligner I O Board Port G constantly monitors the status of eight subsystems within the Controller In normal oper ating mode Input Port G should be set to all zeros if there are no problems The following table describes each bit when it is set to 1 high and how to cor rect the problem Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Maintenance Diagnostic Testing Table 7 4 Port G Bits Bit Description Corrective Action 0 Internal amplifier Check I O to Galil cable I O to amplifier board and connections or the signal cable If all cables are OK replace the I O Pre aligner signal board If a problem persists contact Customer Sup cable port 1 Motor off Check the interlock switch EMS MOFF to ensure it is in the correct state 2 Stopinput Check stop input 3 Amplifier Board Check green LED on amplifier board d Royer tach If ON board under power check I O to oy amplifier board cable and I O board If OFF board has no power and there is voltage to t
101. regarding the storage handling and disposal of that fluid along with any affected apparatus N WARNING Allow the Atmospheric Pre aligner to completely cool before per forming maintenance involving volatile chemicals Brooks Automation 2 14 Revision 1 Atmospheric Pre aligner Safety User s Manual Thermal Hazards Thermal Hazards The Atmospheric Pre aligner does not use thermal heat during operation However the product may become hot during usage Be aware of these areas during servicing of the robot A DANGER Heating during use could cause burns when in contact with skin Allow time for them to cool before servicing the robot N WARNING Allow the system chamber and robot to completely cool before per forming maintenance involving volatile chemicals Brooks Automation Revision 1 2 15 Safety Atmospheric Pre aligner Vacuum Hazards User s Manual Vacuum Hazards The Brooks Automation Atmospheric Pre aligner is designed for use in vacuum applications The Pre aligner requires an external vacuum source The Pre aligner has a vacuum switch for the wafer chuck vacuum and a vacuum switch for the pin vacuum There is a vacuum sensor for the wafer chuck vacuum but no vacuum sensor for the pin vacuum It is recommended that the vacuum pressure you supply to the fitting is between 20 and 25 in Hg 67728 to 84660 Pa A WARNING Whenever any vacuum pump exhaust is vented the facilities envi ronmental proc
102. resolution of 0 018x ensure consistent performance and repeatability A uniform light source provides optimal illumination of the CCD sensors Atmospheric Pre aligner Models Brooks Automation builds Three Axis and Single Axis Pre aligners Three Axis Pre aligner A three axis Pre aligner can independently align a wafer while the robot is processing another wafer The chuck spins the wafer between the LED array and CCD array and the three pins lift and shift the wafer A Pre aligner Amplifier Board in the Controller amplifies the PWM motor driven signals to drive the three motors in the Pre aligner Three servo axes move in three directions during alignment The vertical axis raises and lowers the wafer using the pins The theta axis rotates the wafer chuck to align the flat or notch to the pro grammed orientation The Pre aligner automatically detects if the wafer being aligned has a notch or a flat The radial axis shifts the wafer laterally to center the wafer Single Axis Pre aligner A Single Axis Pre aligner has no pins and relies on the robot radius R and vertical Z axes to lift and translate the wafer The Controller for a single axis Pre aligner does not have a Pre aligner Amplifier Board as a single AMC driver unit is used Pin Loading and Chuck Loading Pin length and type of robot end effector determine whether a Pre aligner is pin load ing or chuck loading Brooks Automation Pre aligners work with either a Hor
103. reventive Maintenance Schedule and Procedures iius seed ins Rr ERR S or nen 7 3 ooi Pe 7 4 Cupio DELE DEA e bode eee PERRPESARPRRELENUEER ERE UR FERSEAA RC 7 4 Learin Ine LBEIE S cst ene E RR EAE RS HORS a CR d EAR R 7 5 Brooks Automation Revision 1 iii Contents Atmospheric Pre aligner User s Manual LEBSEDOSDO Teo 1aeas4d 4E de ER EORR E RUE HE HER ee ead RARE DE a dE EN eg aa 7 6 SUID LESSDDRUER pads obe deor edere rw I dE eher 7 8 oi 4 OE AEAEE E ET E E EE E E N EE E E E EET 7 9 E MEn Ar onr PME 7 10 Encoder Read eet spc velie bep ARES ibd edd 7 12 lamit e Home Test 3 4 05 bk ax RC RRUORE ORE ROC Sea CR Rd Rr Ru d 7 13 SEI DRE a Locanda pid d o IX IR Pe Ph e ER de Rao eden 7 14 Home Teskand 5ets iosdlenie4E IX RBE4SSPEEGIASWISNERDBECEIESER 4 7 16 r amp z Home Offset eeeeee s 7 18 zac td y oe WI CECI a a e T i e 7 21 Vacuum Valve Sense oc eece cna edacesbGu ee ees ibe INEERNESE CERT PN SENE 7 22 Pre aligner I Os for Integrated Systems only 00050 7 24 A Domi Chuck Vest gic cua bots A redu ARP be Ro ue Sees Reds 7 25 Troubleshooting IDOL as des peace dubbessqka s vict dubisdcbbai dqidubbddebb3s dd 8 2 Checking Pre aligner SATUS i eo edicto ee DEOR Ee eR ee 8 2 Cause and Recovery or STAT Messages cescev eerte Re ed aus 8 4 Checking Alignment Status with the ALST Command i socius E an 8 6 Checking Limit Switch Status with the RLS Command 8 7 Using the GLST Com
104. rna kei uwePtkexepy e cued ee Rees depose ees VERE RE 2 18 Exvironmental Hazards Lua aue DERE ER FR DECIR RES EAE 2 19 Brooks Automation Revision 1 2 1 Safety Atmospheric Pre aligner User s Manual Matrix of Emergency and Corrective Response Actions 00 2 20 Material Safety Information Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual Safety Regulatory Compliance Regulatory Compliance The regulatory compliance information and safety requirements in this chapter are intended for CE compliant and SEMI S2 ready Pre aligners only To determine if the Atmospheric Pre aligner is CE compliant check for the CE mark on the Atmospheric Pre aligner If necessary request the official Declaration of Con formity DOC from Brooks Automation The Atmospheric Pre aligner is also S2 com pliant If necessary request a copy of the Third Party Certificate of Compliance COC from Brooks Automation In addition to this section other sections may include regulatory information Table 2 1 Safety Agencies Approval of Safety Agencies This equipment has been examined for user safety and complies with the regulations set by the following organizations CE Conformit Europ enne The European safety requirements Machinery Directive e LVD Directive e EMC Directive Semiconductor Equipment and Mate rials International SEMI Brooks Automation Revision 1
105. s such as cleaning fluids be used during routine maintenance procedures Perform a complete review of the Safety Information Sheet provided at the end of this chapter for each recommended substance There are no ergonomic or human factor requirements for the Pre aligner Equipment Safety Guidelines The Atmospheric Pre aligner user is accountable for the following safety concepts If hazardous materials are to be present users must take responsibility to observe the proper safety precautions and insure that the material used is com patible with those from which the Atmospheric Pre aligner is fabricated Users are responsible for the detection of unwanted chemical or gaseous releases The user shall determine if the Atmospheric Pre aligner will be employed in an earthquake prone environment and rectify equipment installation accordingly N CAUTION The Atmospheric Pre aligner is not provided with an Emergency Machine Off EMO device The user is accountable for the EMO cir cuit The following safety considerations are provided to aid in the placement and use of the Atmospheric Pre aligner A TRIP HAZARD Do not place the Atmospheric Pre aligner s facilities connections power and communications cables where they could cause a safety hazard Do not place the Atmospheric Pre aligner in a location where it may be subject to physical damage Ensure that all power connections to the Atmospheric Pre aligner are properly gro
106. s connections power and communications cables gas and vacuum lines for the Atmospheric Pre aligner are not routed to ensure they don t cause a safety hazard Brooks Automation 2 10 Revision 1 Atmospheric Pre aligner Safety User s Manual Electrical Hazards Electrical Hazards The proper precautions for operating and servicing electrical equipment must be observed These precautions include following facility lockout tagout procedures and any other specified action within the facility where the Atmospheric Pre aligner is being used The Pre aligner receives its power from the Brooks Automation Atmospheric Pre aligner Controller Electrical specifications for the Controller are as follows Table 2 2 Controller Specifications Operating Specifications Tolerances 100 120 VAC Q 5 amps Voltage 92 VAC to 260 VAC 220 240 VAC 2 5 amps Frequency 47 Hz to 63 Hz Lockout Tagout Per standard industry practices lockout tagout procedures must be followed when service maintenance is performed on the Atmospheric Pre aligner to prevent per sonal injury or equipment damage Local or company procedures must be followed but where no procedures exist follow the guidelines below If a service lock and or tag is installed DO NOT remove the lock tag or engage the circuit breaker without proper authorization AN WARNING All power to the Atmospheric Pre aligner must be disconnected per the facilities lockout tag
107. s is available by request N WARNING Only qualified personnel are permitted to operate or maintain the Atmospheric Pre aligner Properly qualified personnel are those who have received certified training and have the appropriate qualifica tions for their jobs Personnel Safety Guidelines The Brooks Automation Atmospheric Pre aligner may provide several direct safety hazards to personnel if not properly installed or operated Persons operating the Atmospheric Pre aligner should be properly trained Possible injury can result from the automatic operation of the Atmospheric Pre aligner Know the location of the following Fire extinguisher First Aid Station Emergency eyewash and or shower Emergency exit Be aware of sharp edges while working around the Atmospheric Pre aligner The following safety equipment should be donned prior to operating or servic ing the Atmospheric Pre aligner Eye protection Hard hat Safety Shoes Observe the facility guidelines pertaining to loose clothing while working around or operating the Atmospheric Pre aligner Perform a complete review of the Material Safety Data Sheets MSDS for each material used with the Atmospheric Pre aligner These individual sheets are provided by the suppliers of the materials Brooks Automation Revision 1 Safety Atmospheric Pre aligner Safety Considerations User s Manual It may be recommended that the use of hazardous material
108. seshoe End Effector or a Blade End Effector With a Horseshoe End Effector the wafer is loaded directly onto the wafer chuck Using a Horseshoe End Effector is faster because time is not required to raise and lower the transfer pins while loading If the Pre aligner has pins they are short pins With a Blade End Effector the wafer is loaded on the pins The end effector Brooks Automation Revision 1 1 3 Introduction Atmospheric Pre aligner Atmospheric Pre aligner Overview User s Manual then retracts and the pins lower until the wafer is on the chuck Blade End Effectors are durable and have a low relative mass but are slower than the Horseshoe End Effector The pins are long pins The type of loading for the PRE 300 and PRE 301 is determined by a software setting That is if you have a chuck loading PRE 300 you can change it to a pin loader by resetting the pin length with the SWL command Changing wafer size requires only that you enter the new size with the SWS software command No mechanical modifi cations or adjustments are required Summary of Brooks Automation Pre aligners The Single Axis PRE 050 Pre aligner has one axis and no pin assembly to move the wafer in the r and z directions The t axis rotates the wafer and the robot lifts the wafer and centers it on the chuck The PRE 050 is used for applications where throughput is not a critical issue The Three Axis PRE 200 and PRE 201 have three axes to center and a
109. set and flat Brooks Automation Revision 1 Command Reference Pre aligner Macros Atmospheric Pre aligner User s Manual WMOa R87 R87 amp 271 CMP R87 0 JPZ 100 IPINC ICVON R87 271 BCOR 0 R87 WMO a LABEL 100 WAIT 50 ICVOF IPINL TSKK 0 R20 0 ISTAR A ENDM Wait for Pre aligner movement to end Compare for error condition Move pin to the chuck position Turn on the chuck vacuum Turn off the chuck vacuum Move pin to the loading position Kill the defined task Turn off the multi tasking flag Send status prefixed with the letter A Brooks Automation Revision 1 Command Reference Pre aligner Macros Atmospheric Pre aligner User s Manual The macros in the first column of the table call the corresponding macros listed in the third column Notice that the calling macro contains the RESP command When you send the macro from the command line you want the prompt and use the call ing macro But you do not want prompts sent to the command line if you are execut ing from the macro The called macro does not use the RESP command and is used in the ALIGN macro Table 6 3 Calling Macros Calling Macro Purpose Called Macro MACRO CVOF Turn off the chuck vacuum Use this macro to MACRO ICVOF ICVOF turn off the chuck vacuum just prior to picking INPUT L R15 RESP up the wafer R15 R15 amp 254 ENDM OUTP L R15 ENDM
110. t Slot 0 Slot Valve SLPM SLPM Brooks Automation Revision 2 0 protocol uses one twisted pair wire for both transmitting and receiving All devices using this protocol must have an address to ensure that information is sent to the right device Selectively Compliant Articulated Robot Arm SEMI Equipment Communications Standard 1 The SECS I standard defines the phys ical connector signal levels data rate and logical protocols required to exchange mes sages between the host and equipment over a serial point to point data path This employs an RS 232 communication link SEMI Equipment Communications Standard 2 The SECS II standard defines the structure of messages The messages are organized into categories called streams that are identified by an integer between 0 and 255 Generic Model for Communications and Control of Manufacturing Equipment The GEM standard defines the behavior of manufacturing equipment as viewed through a communications link The GEM standard defines which SECS II messages should be used in what situations and what the resulting activity should be Semiconductor Equipment and Materials International SEMI Modular Equipment Standards Committee Serial I O allows a Host Controller to communicate with the Atmospheric Pre aligner using the commands detailed in Chapter 6 Command Reference The characters in each command are converted to sets of binary bits 1s and 0s and the bits for each chara
111. t tool with greater precision than the cassette tolerance allows The wafer must be placed in the process or measurement tool within the field of view of a pattern recognition camera De Figure 1 1 Atmospheric Pre aligner This manual is intended for Brooks Automation customers who have purchased an atmospheric wafer Pre aligner This manual describes the installation operation and troubleshooting of the Equipe PRE 050 PRE 200 PRE 201 PRE 300 PRE 301 and PRE 350 Pre aligners The Pre aligner is an optional component in a robotic system which includes a robot either single arm or dual arm a Brooks Automation Controller and optionally a track a flipper laser scanner or front end loader In addition the robotic system might include one or more customer components The example instructions in this manual cannot be specific to your specialized system Instead the instructions assume a Pre aligner only system That is if your system includes more components than a Pre aligner and a Controller refer to the other com ponent manuals to coordinate the installation and operation of your system Brooks Automation Revision 1 Atmospheric Pre aligner Introduction User s Manual Atmospheric Pre aligner Overview Features Brooks Automation atmospheric Pre aligners combine high resolution optical sensing with Charged Couple Device CCD pixel resolution of 10 7 microns High precision mechanics and chuck encoder
112. ter 9 Maintenance To access the Controller information on the functioning of various components use the EQT Information Request or send various information commands Use the STAT command to check general Controller status Use the ALST command to further specify an alignment error Use the RLS command to check limit switch status Use the GLST command to check for errors in movement As you follow the instructions you might be asked to perform one or more Diagnostic steps Instructions for using the Teach Pendant to perform diagnostics are described in the chapter 9 Maintenance General instructions for using the Teach Pendant and EQT 32 are given in the Brooks Automation Smart Controller User s Manual Document number 4000 0017 Checking Pre aligner Status You can check various connections by sending information request commands to the Controller or by using EQT 32 Information Request The firmware recognizes the cur rent axes and returns information for those axes Table 8 1 Information Commands Command Purpose STAT Send status word AST 1 Check error status on communications port 1 COM1 AST2 Check error status on communications port 2 COM2 GLST Check status of the Galil motion control board INPUT G Read input port G RLS Read limit switches RNCS Read NVSRAM check sum ALST Check Alignment status when STAT bit 7 is set to 1 VER Read firmware version number Brooks Automatio
113. tility supplied power fails Universal Cassette Locator An elevator platform mounted fixture that facilitates positioning 3 inch through 150mm cassettes UPS See Uninterruptible Power Supply Vacuum Gauge A gauge used to measure the vacuum within a chamber See Convectron Gauge Crys tal Gauge and Ion Gauge Vacuum Pump Mechanical pump used to remove gases in an enclosed chamber Types of pumps roughing pump high vacuum pump ultrahigh vacuum pump VCE Vacuum Cassette Elevator See Elevator Vent Valve Valve used to let atmospheric air or other gas into a vacuum system VTR Vacuum Transport Robot See Robot Wafer A thin silicon disk used for producing semiconductors See Substrate Wafer Present Sensor An optical sensor that senses wafer presence See Substrate Present Sensor Wafer Slide Out Detector An optical sensor that senses when any wafer is out of a cassette slot See Substrate Slide Out Sensor Wafer Transport Plane The plane in which wafers are transported horizontally by a system s transport arm The plane is established by the surface of the transport arm end effector which sup ports the wafer If the robot is capable of vertical motion the up position of the end effector is the wafer transport position In the VCE the wafer transport plane is usually established at approximately one half wafer thickness below the centerline of the first slot See Substrate Transport Plane with substrate speed and
114. ting The Pre aligner receives its power from the Controller Electrical specificatios are as follows Brooks Automation Revision 1 Atmospheric Pre aligner Introduction User s Manual Specifications Table 1 2 Controller Electrical Specifications Operating Specifications Voltage 100 120 VACQ 5 amps Voltage 92 VAC to 260 VAC l H e ea a ee The two signal cables connecting the Pre aligner and the Controller are isolated from the power cable that is connected from the Pre aligner and the Controller Vacuum Specifications The pre aligner requires an external vacuum source The pre aligner has a vacuum switch for the wafer chuck vacuum and a vacuum switch for the pin vacuum There is a vacuum sensor for the wafer chuck vacuum but no vacuum sensor for the pin vacuum It is recommended that the vacuum pressure you supply to the fitting is between 20 and 25 in Hg 67728 to 84660 Pa The vacuum fitting is sized to accommodate 1 8 in OD hose unless customized Mechanical Specifications Before installing a pre aligner make sure you have a baseplate made of either 0 500 in thick aluminum or 0 375 in thick stainless steel Seismic Requirements Bolt the Pre aligner to the system Brooks Automation Revision 1 1 11 Introduction Atmospheric Pre aligner Specifications User s Manual This Page Intentionally Left Blank Brooks Automation 1 12 Revision 1 Atmospheric Pre aligner User s Manual
115. tion and maintenance of the Brooks Automation Atmospheric Pre aligner While this document covers specific information and adjustments for the Atmospheric Pre aligner there is information in other manuals which affect the settings or operating mode of the Atmospheric Pre aligner Additional Reference Materials The Atmospheric Pre aligner Manual may refer the reader to these manuals for addi tional information Smart Controller User s Manual Atmospheric Single Arm Robot User s Manual Atmospheric Dual Arm Robot User s Manual NOTE All documents cited shall be the latest publication Note Hazards and Pictograms Notes and hazards used within this manual have very specific meanings and formats A description of the meanings of these terms is provided below NOTE A note provides additional or explanatory information A CAUTION indicates a potentially hazardous situation which if not avoided may result in minor or moderate injury It may also be used to alert against unsafe practices or the potential for equipment dam CAUTION age A WARNING indicates a potentially hazardous situation which if not avoided could result in serious injury or death A DANGER indicates an imminently hazardous situation which if not avoided will result in serious injury or death Brooks Automation Revision 1 1 9 Introduction Atmospheric Pre aligner Specifications User s Manual Specifications This section includes the environm
116. tion and may cause wafer breakage or damage to the system The user must perform a complete alignment as part of installing the Atmospheric Pre aligner in a system Additionally proper alignment should be verified after ser vicing the Atmospheric Pre aligner Refer to Chapter 5 Adjustments and Calibration for the required adjustment procedures N CAUTION Do not attempt to use the Atmospheric Pre aligner until the align ment procedures have been completed Brooks Automation Revision 1 Atmospheric Pre aligner User s Manual 4 Operation Overview This chapter provides complete operation directions for the Brooks Automation Atmospheric Pre aligner The operation of the Atmospheric Pre aligner is covered for both normal conditions and emergency conditions Chapter Contents Theory DE Operi a a khong 40h 644 hoes eben Atos Rd deb ads 4 2 cs 2 i dues bird Seer ee ere ee oe Se ee ee iqesed 4 3 Waler Parameter FUG si icidcbae aks sche addins eeesaseorecinese ieee ced 4 5 Water Calibration Fit c cccascconeiseaconntane den eke sa erndiavedsaees ees 4 7 Yenbyuut Corect Files c indc acd uae RE A RESARREREE IAPRNEI RE AREA PE AP E EE 4 8 Copying Files Doo the DEBEO 2n iua qae oe ane ee eh eee eee seed 4 9 Lune De Fat Alen LOBO d d bea irern ets ED EII CELER doe ed 4 10 sinon o PC ee 4 11 Emory Os aou denar Pri ede dede ador ad oe Gee dada br al gorge 4 12 Brooks Automation Revision 1 4 1 Operation Atmospheric Pre aligner Theory of
117. tion recommends that each operator control station that can initiate robot motion has a readily accessible EMERGENCY STOP or EMO device This includes the Teach Pendant the SEMI S2 compliant TTR 200 has a red EMS button Or use the EQT 32 interface on a personal computer Refer to the Smart Controller User s Manual for details about using the EQT 32 interface and the Teach Pendant You cannot use the EQT 32 interface and the Teach Pendant simultaneously To use EQT with the Teach Pendant connected return to the Brooks Automation logo screen on the Teach Pendant Before connecting a Teach Pendant or installing the EQT 32 interface follow these instructions to ready the Controller 1 2 Connect the RS 232 cable to the host computer and Controller Verify that all cables are plugged into the correct connectors in the cor rect orientation Make sure they are securely fastened using the integral jack screws supplied with the cables as needed Exit the restricted envelope before you apply power Power up the Controller The Controller automatically resets which takes about 4 to 10 seconds depending on the quantity and length of macros stored in NVSRAM After boot up check the indicator LEDs located at the front of the Con troller The following conditions indicate a normal condition The green LED is on The yellow LED is flashing The red LED remains on until the amplifiers are enabled Connecting the Teach
118. tus with the RLS Command Limit switches prevent over travel of the Pre aligner into the hard stops of each axis of motion and are normally activated just prior to contact with the hard stops The limit switches signal the Galil board to kill power to the motor and stop the motion In normal operation the Pre aligner should not move into the limit switch area Limit switches are also used to home the axes Limit switch problems can be caused by software mechanical position setup or hard ware To determine if limit switch hardware is functional perform Diagnostic Step 4 the Limit amp Home Test If the Pre aligner fails because a limit switch was triggered Bit 5 in the response to the STAT command use the RLS command to determine which limit switch was acti vated The response to RLS has the following bit assignments Table 8 4 Limit Switch Activation Using the RLS Command Bit Meaning when set to 1 0 Robot positive theta 1 Robot positive radial 2 Robot positive Z 3 Track positive t in four axis system 4 Pre aligner positive theta 5 Pre aligner positive radial 6 Pre aligner positive Z 7 Track positive w in eight axis system 8 Robot negative theta 9 Robot negative radial 10 Robot negative Z 11 Track negative t in a four axis system 12 Pre aligner negative theta 13 Pre aligner negative radial 14 Pre aligner negative Z 15 Track negative w in eight axis system 16 Robot positive theta triggered 17 Robot positive radial
119. ue using the SWU command 4 Execute the PINU macro If the pin position is good proceed to the next step If the new number is not large enough repeat Step 3 5 To restore the speed and acceleration to all axes enter either RSA a for an inte grated system or RSA A for a Pre aligner only system 6 To save the new setting send the command SAV Brooks Automation Revision 1 6 9 Command Reference Atmospheric Pre aligner Using the Macros to Verify Positions User s Manual This Page Intentionally Left Blank Brooks Automation 6 10 Revision 1 Atmospheric Pre aligner User s Manual 7 Maintenance Overview This chapter provides maintenance schedules and procedures for the Brooks Automa tion Manual I O Reticle Monopods and SMIF Pods The first section of this chapter provides preventive maintenance schedules and procedures The second section of this chapter provides repair procedures for subsystem repair and replacement Chapter Contents Preventive Mamiere 6 bib eed ERE baw s beso bh FRCICCRR eReCROCR 8 7 2 Preventive Maintenance Schedule and Procedures 00 eee eee 7 3 LIU TE 7 4 Clearing Me CCUR EMEND 7 4 Conn he LEDS ee ens ere ere ee re re ew Mere ee rere 7 5 Rr vcrc M HO 7 6 clans cd Rin aan o P Prem 7 8 NYSBRAM DRM 42443354 PROCHECCCACER OR kee eee ded oO dc OR Arbo deca Cede 7 9 a OUR GNI y Semet 7 10 Encoder Read Tesla du ines oh Ses
120. unded Ensure that the Atmospheric Pre aligner receives proper air flow for cooling Do not remove any Warning Hazard or Equipment Identification labels Brooks Automation Revision 1 Atmospheric Pre aligner Safety User s Manual Safety Considerations Turn OFF power before inserting or removing power cables Be aware of the hazardous points of the Atmospheric Pre aligner as described in this section N CAUTION Use of the Atmospheric Pre aligner for any purpose other than as an atmospheric wafer aligner is not recommended and may cause dam age to the Atmospheric Pre aligner or the system Some moving mechanisms have no obstruction sensors and can cause personal injury Whenever power is applied the possibility of automatic movement of the components within the Atmospheric Pre aligner exists which could result in personal injury Moving Parts When power is applied the possi p bility of automatic motion exist Electrical Hazard Removing protective covers exposes risk to electric shock ait Figure 2 1 Safety Hazard Location on the Pre aligner Brooks Automation Revision 1 2 7 Safety Atmospheric Pre aligner EMC and ESD Protection User s Manual EMC and ESD Protection A third party has tested the Atmospheric Pre aligner to ensure electromagnetic com patibility for both emissions and immunity The Atmospheric Pre aligner complies with the EMC Directive For protection against Electromagnet
121. ure from a turbo pump or other pump The degassing process by which a vacuum system is heated during the pump down process A dimension used by robots it is the distance between Z Axis Home and the Substrate Transfer Plane A robotic arm designed with a set of multi level end effectors or tines used for transporting entire batches of substrates into and out of an elevator Bar Code Reader A device used for optical recognition of bar codes A flexible tube that can expand and contract lengthwise while withstanding pressure radially Box Opener Loader and Tool interface Standards Refers to SEMI E15 1 standard interface for 300mm substrates See Batch Transfer Arm See Base Transfer Offset Brooks Automation s patented dual end effector frog leg arm system See Elevator A sensor that detects the presence of a cassette in an elevator The distance downward from the Home position the elevator platform must move a particular type of cassette to position the bottom most wafer slot slot 1 for trans port In the context of the Atmospheric Pre aligner within a record type a category is used to identify a specific command See Control Display Module A transmission from the Atmospheric Pre aligner to the host Controller In addition to the software file the robot includes a Configuration File CF The CF file contains servo application specific parameters The release of a new CF files occurs when a new hardware co
122. utomation All other trademarks are properties of their respective owners Brooks Automation 2005 All Rights Reserved The information included in this manual is Brooks Proprietary Information and is provided for the use of Brooks customers only and cannot be used for distribution reproduc tion or sale without the expressed written permission of Brooks Automation This information may be incorpo rated into the users documentation however any changes made by the user to this information is the responsibility of the user ess 0 NENNEN GU um E NENNEN GU um NENNEN 5 Am BROOKS AUTOMATION Brooks Automation 15 Elizabeth Drive Chelmsford Ma 01824 Phone 978 262 2400 Fax 978 262 2500 www brooks com March 25 2005 Part Number 125516 Revision 1Per EC 432555 B Varnum This manual is available in the following formats CD Paper Cleanroom This manual is available in the following languages English This technology is subject to United States export Administration Regulations and authorized to the destination only diversion contrary to U S law is prohibited Printed in the U S A BrooksAutomation Revision 1 Atmospheric Pre aligner User s Manual Contents PIRE ies cece TERU T PIERII TURA MIS qM ed HE VOD E V coo POETE I I UL E I vii Ecc oc MERECE inina eE E E EE ER ix Introduction Atmospheric Pre aligner Overview uu caa bx RA ci chen ese nedeeeescencenas 1 2 ee ere rer ee ee ee ee 1 3 Atmospheric Pea
123. when no substrate is on the end effector Pressure ranges from about 10 Torr to 10 Torr Vacuum pump used to achieve High Vacuum See also Cryopump The reference position at which the encoders are reset For a robot this position is considered to be 0 for T Home for R slightly past the retract position for a single end effector robot and equivalent to the mount position for a dual end effector robot and completely down for Z For an elevator this is the position of the platform when it activates the home sensor This position is near the top of the elevator s travel The cassette offsets and all Atmo spheric Pre aligner operations including moves steps and partial steps are refer enced to the Home position Usually the slowest speed the speed at which the Atmospheric Pre aligner approaches Home position during a HOME command Glossary Atmospheric Pre aligner User s Manual Host Controller ICL Ion Gauge The user owned Controller that controls the entire system including the Atmospheric Pre aligner Individual Component Level A thermal conductivity vacuum gauge These gauges are used to measure high vac uum There are two types of ion gauges hot cathode and cold cathode Illustrated Parts Catalog A series of illustrations that shows the locations of parts and subsystems within the InCooler InLigner IPC IRC Isolation Valve Jog Leadscrew Leak Rate Leapfrog LED Lift

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