URS-BPPV6 User Manual
Contents
1. m 7 64 194 gt 01 97 MODEL SHOWN URS75BPPVE 9 50 DIMENSIONS IN INCHES AND MILLIMETERS nm comm 150 E Y 167 9 423 ry S Es ml 17 5 39 10 9 D ne D k 01 0 25 03 0 8 08 2 4 HOLES THD ON 91 34 0 34 DEPTH 24 6 12 A1 10 5 4 HOLES 9 31 7 8 C BORED FOR 1 4 M6 ON SQR 2 98 75 6 k lt 32 8 2 gt Newport Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 10 0 Maintenance 10 1 10 2 10 3 QD Newport Experience Solutions RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The URS BPPV6 stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The URS BPPV6 stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your URS BPPV6 stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt t2. tnnt 12 9 1 URS50BPPV6 12 92 URST5BPPV6 12 10 0 Maintenance certnm 13 T0 1 MaintetialiCe yat are ba 13 10 2 13 T0 3 CalIBEAUON 13 Service R 15 QD Newport EDH0225En1030 12 1 5 iv Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages EC Declaration of Conformity The manufacturer MICRO CONTROLE Spectra Physics NASA ONAN AGS OSS KOSS RSS OES a Quy URS BPPV6 Series GO 4 s EC Declaration of Conformity Newport lt e 6 following Annex 1 Experience Solutions lt of Directive 2006 42 EC on machinery ONS 00 ON oN 9 rue du Bois Sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description URS BPPV6 Function Precision rotation stages SN Models URSSOBPPV6 URS75BPPV6 Cre we x e K the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director SUN MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 oF we 9 3 F 45340 Beaune La Rolande France e s 6 NP S complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevan
3. Load on the stage greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Table of Contents Warranty Gre ede vr i exei He Ord es ii EC Declaration Of CONIOrmi Definitions and 5 1 16 vi ee vii CalatiON ss enire a viii 10 Introduction 11 1 sse 1 2 0 DESCFIDIOB oops tad bdo fi catione ead auris 2 21 Design Details icici eii 2 3 0
4. Characterislics eeeer etre 3 Sel Definitions onere ERR SERIE e e EE ETUR mS 3 3 2 Mechanical Specifications ccccsescsecccsseesecsserssesesecssecesansseasererseaes 4 333 Load Specification Definitions nime eere 4 3 4 Load Characteristics and Stiffness essere 4 3 5 pege Welghts Ee SER ERE RUE ERES 5 40 BENVE 5 Stepper Motor Drives 5 5 0 5 5 1 Stepper Motor 5 5 2 Command Signals for the Stepper Motors sess 6 5 3 Sensor POSITION A ERE 6 FA 6 6 0 Connection to Newport 8 6 1 Warnings on Controllers ise dt tt sens e e renis 8 0 2 COMMS CU OI 9 CADIS tosses aed sii Meat gos 9 6 4 MSCABLE 3 Cable reiten en eere 9 7 0 Connection to Non Newport Electronics 10 fl COMMCCU ONS iuter cit o 10 8 0 Disabling of Limit Switches 11 Newport Experience Solutions iii EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 9 0 JDimensions
5. URS BPPV6G Series Vacuum Compatible Precision Rotation Stage 7 Gee Compliant AD USER S MANUAL Newport Experience Solutions Precision Motion Guaranteed URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X A EDH0225En1030 12 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage
6. Vacuum Compatible Precision Rotation Stages URS BPPV6 Series Introduction This manual provides operating instructions for the URS BPPV6 series rotation stages URS75BPPV6 rotation stage RECOMMENDATION We recommend you read carefully the chapter Connection to electronics before using the URS BPPV6 rotation stage Newport Experience Solutions 1 EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 20 Description 2 1 The URS BPPV6 rotation stages features an enhanced lower profile package providing easier top down mounting that is directly compatible with our vacuum compatible stages When using with our XPS or ESP301 motion controllers with high micro step capability low noise operation and very small incremental motions are guaranteed The URS BPPV6 rotation stage does not use encoder feedback but calculates position by the number of commanded steps and micro steps For this purpose the stepper motor is directly attached to the worm screw with a proprietary bellow coupling with high torsional stiffness and no gear or belt drive in between Furthermore the high output torque of the stepper motor minimizes the risk of lost steps and provides optimum motion sensitivity with good linearity between commanded micro step and the actual motion of the stage The URS BPPV6 rotation stages features a proprietary 4 contact point ball bearing The unique 2 piece desi
7. 5 Ground 6 Encoder Phase A 6 N C 7 Encoder Phase 7 o9 8 N C 8 N C e 9 Phase 1 9 Phase 1 15 ME 10 Phase 2 10 Phase 2 11 N C 11 End of Run 12 5V 12 5V 13 Encoder Phase A 13 N C 14 Encoder Phase B 14 N C 15 N C 15 N C lt gt Newport EDH0225En1030 12 1 5 6 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages The SUB D25M connection at the end of the cable is given in the following table 25 QD Newport Experience Solutions 0 0 6 16 URS50BPPV6 URS75BPPV6 UE16PPHSV6 UE41PPV6 1 Phase 1 1 Phase 1 2 Phase 1 2 Phase 1 3 Phase 1 3 Phase 1 4 Phase 1 4 Phase 1 5 Phase 2 5 Phase 2 6 Phase 2 6 Phase 2 7 Phase 2 7 Phase 2 8 Phase 2 8 Phase 2 9 N C 9 N C 10 N C 10 N C 11 11 N C 12 N C 12 N C 13 Mechanical Zero 13 Mechanical Zero 14 Ground 14 Ground 15 N C 15 N C 16 Ground 16 Ground 17 N C 17 End of Run 18 N C 18 End of Run 19 Encoder Phase A 19 N C 20 Encoder Phase B 20 N C 21 5 V 21 5 22 Ground 22 Ground 23 Encoder Phase A 23 N C 24 Encoder Phase B 24 25 N C 25 N C EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Connection to Newport C
8. SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE gt 94 24 CABLE IN MOTION 22 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MSCABLE 3 included with your stage is not adequate Newport offers a 10 m longer length cable MSCABLE 10 designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D15 and SUB D25 connectors WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk Newport Experience Solutions 9 EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages El Connection to Non Newport Electronics 7 1 Connections WARNING Newport is not responsible for malfunction or damage to a URS BPPV6 stage when it is used with non Newport controllers WARNING Newport guarantees compliance of the URS BPPV6 stage only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a URS BPPV6 stage is used with non Newport controllers SUB D25M SUB D15F URS5OBPPV6 URS75BPPV6 Connector Connector UE16PPHSV6 UE41PPV6 9 ca 5 D 10 pg EN 1 a 1
9. and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0225En1030 12 1 5 vi Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics po
10. 0 3 m Drive 4 1 Stepper Motor Drives Full Step Resolution Speed C URS50BPPV6 0 0028 4 UE16PPHSV6 URS75BPPV6 0 02 20 UE41PPV6 D When used with Newport motion controllers these motors are driven in a dynamic micro stepping mode software commutation mn Motor 5 1 Stepper Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport Phase Q mH Utilization UE16PPHSV6 15 0 18 12 5 5 5 Mini Step bipolar UE41PPV6 1 8 0 22 5 7 11 3 Micro Step bipolar Newport Experience Solutions 5 EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 5 2 Command Signals for the Stepper Motors Direction Phase 1 Direction Phase 2 Direction Motion gt Direction 5 3 Sensor Position URS50BPPV6 Sensor Mechanical _ i Zero lt lt Stage Travel Range Motion Direction End of Run and Mechanical Zero are 5 V open collector type CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source 5 4 Pinouts The SUB D15M connection for the URS BPPV6 rotation stage is given in the following table URS50BPPV6 URS75BPPV6 UE16PPHSV6 UE41PPV6 1 Phase 1 1 Phase 1 2 Phase 2 2 Phase 2 3 Mechanical Zero 3 Mechanical Zero 4 N C 4 End of Run 5 Ground
11. 2 M tah 1 ie 1 Phase 1 N C 2 i 3 1 r 1 9 Phase 1 N C 4 m 4 1 4 A 5 L 2 Phase 2 Motor 1 pat 10 Phase 2 Motor 8 TEE 14 A 16 NE bad 22 _ pg Pag 13 A A 1 3 Mechanical Zero Mechanical Zero 19 X 13 Encoder Phase A N C 23 i 1 6 Encoder Phase A 20 or 14 Encoder PhaseB 24 1 1 7 Encoder Phase 15 X X 15 N C N C 25 1 8 N C N C 17 L 11 N C End of Run 2 18 ma 1 4 N C End of Run 2 21 4 lt gt 12 5V 5V Connector m eee i ___ Connector Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newport Newport Stage Mechanical Zero Stage End of Run lin max 10 mA lin max 16 mA V max 30 V V max 5 6 V K EG If the Mechanical Zero output is not used 1 0 25 W resistor must be connected between pins 13 and 21 Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 QD
12. 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
13. Newport EDH0225En1030 12 15 10 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Disabling of Limit Switches NOTE The URSS50BPPV6 stage is not equipped with limit switches The URS75BPPV6 stage is equipped with 160 optical limit switches This limit switch can be disabled for continuous 360 rotation j ACTED 7 INHIBITED LIMIT SWITCHES POSITION X SWITCHES POSITION 160 TRAVEL RANGE CONTINUOUS TRAVEL RANGE LU NOTE On request URS75BPPV6 limit switches can be set in factory at the desired position Please contact our sales engineers CY Newport Experience Solutions 1 1 EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Dimensions 9 1 9 2 EDH0225En1030 12 15 URS50BPPV6 Stage MODEL SHOWN URSSOBPPV6 01 18 401 0 30 8 DEPTH 16 4 THREAD 1 0625 20 UN2B SOR 276 70 4 HOLES 9 18 4 5 4 HOLES THD ON SOR 98 25 DIMENSIONS IN INCHES AND MILLIMETERS ON SOR 2 48 63 DEPTH 16 4 1 18 83 30 o n i SUB D15M CONNECTOR 171 6 73 URS75BPPV6 Stage 4 HOLES M3 THD ON 08 1 26 32 DEPTH 24 6 SUB D15M CONNECTOR
14. gn of the URS BPPV6 provides a low profile compact stage with exceptional stiffness high reliability and outstanding wobble and eccentricity The tilted worm screw arrangement allows for 4 symmetric mounting holes as compared to other designs that only feature 2 or 3 mounting holes As a result the URS BPPV6 stages provides a higher stiffness for better support of higher or off centered loads Additionally the flexible preloading system for the worm gear has been improved to guarantee a backlash free operation with an MTBF of 20 000 hours Design Details Based Material Hardened steel with aluminum body Bearings Large diameter ball bearings Drive Mechanism Grinded worm gear with self compensating preload Worm Gear Ratio URS50BPPV6 1 80 URS75BPPV6 1 90 Feedback URS50BPPV6 Motor Mounted Rotary Encoder 48 pts rev URS75BPPV6 None Limit Switches URS50BPPV6 None URS75BPPV6 Two independently adjustable optical limit switches Origin Optical fixed at position 0 Typical 0 04 repeatability Manual Adjustment Via Allen wrench included at the end of the worm screw Motor URS50BPPV6 UE16PPHSV6 URS75BPPV6 UE41PPV6 Cable Length SUB D15F SUB D25M cable length 3 m Not Vacuum compatible RoHS Compliant EDH0225En1030 12 15 NOTE This product complies with the RoHS directive Restriction of Hazardous Substances Newport Experience Solu
15. ian to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts QD Newport EDH0225En1030 12 1 5 8 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion system quickly and safely ESP These stages are ESP compatible Enhanced System Performance is COMPATIBLE 6 3 Cables Our stages are delivered with a MSCABLE 3 3 meter cable This cable is equipped with SUB D15F and SUB D25M connectors so it can be directly connected to our controllers drivers 6 4 MSCABLE 3 Cable lt 2 24 57 gt DISCONNECTED LOCKING KNOBS gt CABLE es CONNECTOR STAGE if SUB D15 CONNECTOR
16. isabled limit switches 2 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a rotation stage can move while maintaining specifications This value is given with speed and acceleration specified for each rotation stage and with a load perpendicular to bearings Off Centered Load Q Maximum cantilever load a rotation stage can move Q lt Cz 1 D a D Cantilever distance a Construction parameter 3 4 Load Characteristics and Stiffness URSSOBPPV6 URS75BPPV6 Cz Normal centered load capacity N 50 100 a Construction parameter mm 20 25 Ka Transversal compliance urad Nm 100 30 Mz Nominal torque Nm 0 25 0 5 Q Off center load N Q Cz 1 D a Where D Cantilever distance mm QD Newport EDH0225En1030 12 1 5 4 Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages 3 5 Stage Weights Weights indicated into the below table are average values without any cable Weight Ib kg URSSOBPPV6 1 5 0 7 URS75BPPV6 3 7 1 7 3 meter MSCABLE 3 Cable 0 66
17. le whereas MIM is the real output of a motion system Eccentricity Displacement of the geometric center of a rotation stage from the rotation axis in the plane defined by bearings Wobble Tilt of rotation axis during rotation of a stage measured on a reference surface The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 164 points Newport Experience Solutions 3 EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com 3 2 Mechanical Specifications URSSOBPPV6 URS75BPPV6 Travel Range 360 continuous 360 continuous inimum Incremental Motion 0 0015 0 0002 0 0005 in open loop mode Uni directional Repeatability 0 004 or 0 002 0 004 or 0 002 Bi directional Repeatability 0 006 or 0 003 0 014 or 0 007 Absolute Accuracy 0 04 or 0 02 0 03 or 0 01 ax Speed s 4 20 Wobble urad 50 or 25 Eccentricity um 6 or 3 3 0 1 5 TBF 20000 h at 25 load and with a 30 duty cycle With d
18. o disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your stage please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your URS BPPV6 stage to Newport once a year for recalibration to its original specifications 13 EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages QD Newport EDH0225En1030 12 15 14 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 1 5 EDH0225En1030 12 15 Newport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800
19. ontrollers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electric
20. rt Solone vii EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment less than 105 hPa CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0225En1030 12 15 viii Experience Solutions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages
21. t provisions of the Directive 2014 30 EU relating to electro magnetic compatibility X was designed and built in accordance with the following harmonised standards NF 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 K SO EN 4 ee gg 5 SLI OA OS Le ORIGINAL DECLARATION one in Beaune La Rolande 26 June ew uere DA SS Quality Director 6 x DG Newport Experience Solutions EDH0225En1030 12 15 URS BPPV6 Series Vacuum Compatible Precision Rotation Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety
22. tions URS BPPV6 Series Vacuum Compatible Precision Rotation Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievab
23. wer supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit Newpo
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