TASK Turbo Pumping System
Contents
1. 2 5 TASK Turbo Pumping System SH 110 Troubleshooting 2 6 Table 2 3 assists in troubleshooting SH 110 problems Problem Will not start Table 2 3 SH 110 Troubleshooting Guide Possible Causes One or both fuses blown Corrective Actions Replace fuses see SH 110 user manual P N 699904311 Identify cause of overload Check the line voltage and the pump voltage configuration Motor thermal protector open Q Allow motor to cool A Identify cause of overload Defective motor Inspect Contact Varian Poor ultimate pressure System leak Locate and repair leak Water in pump Flush pump with air or dry nitrogen Gas ballast plugged Replace breather vent Contact Varian Solvent in pump Flush pump with air or dry nitrogen Install trap or filter Seals worn out Rebuild pump Hammering noise Pump overheated Check ventilation to pump Check ambient temperature Debris in pump Check intake screen Disassemble pump and inspect Pump runs intermittently Motor thermal protector is intermittently cycling open and closed Allow the motor to cool Identify the cause of the overload a a a A Flush pump a a a The SH 110 is equipped with an auto reset thermal motor protector This protector automatically shuts down the pump when it detects an overload condition and automatically restarts the pump when the motor has2. KF ISO or ConFlat flanges Manual turbo vent valve NW16 14 FNPT exhaust connection Compact console CoO 04 p c E E Air cooled vented case Storage When transporting and storing the TASK system do not exceed the following environmental requirements Temperature 20 C to 60 C 4 of to 140 F Relative humidity 0 to 95 non condensing 1 1 TASK Turbo Pumping System Controller Description The controller is available in two versions that operate with the voltage range listed below A V 81 AG Model 969 8988 100 240 Vac 50 60 Hz Q V 301 AG Model 969 8911 100 240 Vac 50 60 Hz The Turbo V 81 AG and V 301 AG Rack controller is a micro processor controlled frequency converter with a new enhanced feature that allows for greater control and communication capabilities This compact 1 4 rack unit is designed for full worldwide compatibility for vent valve control active gauge pressure reading and pump operation parameters control as well as for self diagnostic and protection features Controller Interface Figure 1 1 shows the V 81 AG front panel The key pad functions are explained in Table 1 1 on page 1 2 for both the V 81 AG and the V 301 AG turbo controllers COUNTERS MEASURES increase next ES decrease SS A previous E uE LOW SPEED START STOP d Figure 1 1 V 81 AG Font Panel
3. NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem 3x Agilent Technologies CE E CANADIAN STANDARDS ASSOCIATION TA SK Turbo INSTRUCTION MANUAL Pumping System Manual No 699933001 Revision C March 2007 TASK Turbo Pumping System Lf m S S NA N S b N N N M LEA ALLL ConFlat Flange is a registered trademark of Varian Inc Copyright 2007 Varian Inc TASK Turbo Pumping System Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve 12 months from date of shipment thereof to Customer and Seller s liability under valid warranty claims is limited at the option of Seller to repair to replace or refund of an equitable portion of the purchase price of the Product Items expendable in normal use are not covered by this warranty All warranty replacement or repair of parts shall be limited to equipment malfunctions which in the sole opinion of Seller are due or traceable to defects in original materials or workmanship All obligations of Seller under this warranty shall cease in the event of abuse accident alteration misuse or neglect of the equipment In warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired o
4. System Front VIEW ziii eee Re eene ete seni e nena eee e YR davon cede dene rh dase ee aae denn 1 5 1 3 TASK System e Rear VIeW erre t IRE ett e rn baee Een ee TER ER po ea Pe a apre Pak Pare Eee sie das 1 5 1 4 SO Planes COn ob ouai eia A amandi ausa 1 6 1 5 KE ETapnse COnmectiotl a AO sect ances d vetus d Aca a a E 1 7 1 6 ConFlat Flange Connection iu aree ette pi eere e pea preserved np tx EA a Re EXP LEE 1 7 vii TASK Turbo Pumping System This page intentionally left blank TASK Turbo Pumping System List of Tables Table Title Page 1 1 V 81 AG and V 301 AG Front Panel Keypad Functions 1 2 1 2 TASK System COMPOMENtS rir reete ern I IRR e ee RE ARR VERE EE REN ee SERT RENE IN INT e ena ls 1 5 1 3 Flange Size Clamps Requitedase eiecti ke tente ban truco daria 1 6 2 1 TASK System Start Up Troubleshooting Guide odi oie cds 2 2 2 2 Turbo Controller Troubleshooting Guide asso oa 2 4 2 3 SH TTO Troubleshooting Glide 2 6 A 1 TASK Technical Specifications Zo vo aee edgs C A t e t A ER uet ud cu iE A 1 A 2 Task Configurations RS A 2 TASK Turbo Pumping System This page intentionally left blank Declaration of Conformity Konformitatserklarung D claration de Conformit Declaraci n de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformit We Wir Varian Inc Nous Vacuum Technologies Nosotros 121 Hartwell Avenue Wij Lexington MA 02421 3133 USA Noi declare under our sole respons
5. ensure the safe handling of the product and is liable for any harm or injury to Varian Inc employees occurring as a result of exposure to toxic or hazardous materials present in the product CUSTOMER INFORMATION Company name Contact person Ship method Shipping Collect esses OE Europe only VAT Reg Number USA only OTaxable ONon taxable Customer ship to Customer bill to PRODUCT IDENTIFICATION Product Description Varian Inc Part Number Varian Inc Serial Number TYPE OF RETURN check appropriate box J Paid Exchange O Paid Repair O Warranty Exchange O Warranty Repair O Loaner Return O Credit O Shipping Error O Evaluation Return O Calibration O Other HEALTH and SAFETY CERTIFICATION VARIAN INC CANNOT ACCEPT ANY BIOLOGICAL HAZARDS RADIOACTIVE MATERIAL ORGANIC METALS OR MERCURY AT ITS FACILITY CHECK ONE OF THE FOLLOWING O confirm that the above product s has have NOT pumped or been exposed to any toxic or dangerous materials in a quantity harmful for human contact O I declare that the above product s has have pumped or been exposed to the following toxic or dangerous materials in a quantity harmful for human contact Must be filled in Print NM a SNA Curas Dating PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE Do not write below this line Notification
6. 997 9 350 Customer Support and Service North America Tel 1 800 882 7426 toll free vtl technical support varianinc com Europe Tel 00 800 234 234 00 toll free vtl technical support varianinc com Japan Tel 81 3 5232 1253 dedicated line vtj technical support varianinc com Korea Tel 82 2 3452 2452 dedicated line vtk technical support varianinc com Taiwan Tel 0 800 051 342 toll free vtw technical support varianinc com Worldwide Web Site Catalog and On line Orders www varianinc com Representatives in most countries CE ap AK VARIAN
7. RA 4E c conocninnncnarononncincnanoss Customer ID 4 Equipment amp arenneren a enrii iun August 2003 Page 1 of 2 VARIAN FAILURE REPORT Please describe in detail the nature of the malfunction to assist us in performing failure analysis 4 AS TURBO PUMPS AND TURBOCONTROLLERS Request for Return Health and Safety Certification 9 9001 Claimed Defect Position Parameters J Does not start J Noise O Vertical Power Rotational Speed O Does not spin freely J Vibrations O Horizontal Current Inlet Pressure O Does not reach full speed O Leak O Upside down Temp 1 Foreline Pressure O Mechanical Contact O Overtemperature O Other Temp 2 Purge flow O Cooling defective FViGlogging MPA Operation Time Describe Failure Turbocontroller Error Message ION PUMPS CONTROLLERS VALVES COMPONENTS J Bad feedthrough O Vacuum leak O Error code on display O Poor vacuum O Other O High voltage problem O Main seal leak O Solenoid failure O Damaged sealing area O Bellows leak O Damaged flange J Other sees Describe failure Describe failure Customer application Customer application LEAK DETECTORS O Cannot calibrate O Vacuum system unstable O Failed to start O No zero high background J Cannot reach test mode O Other neeese INSTRUMENTS O Gauge tube not working OC Communi
8. Table 1 1 V 81 AG and V 301 AG Front Panel Keypad Functions 1 Keyboard push button to recall on the display the cycle number cycle time and pump life 2 Keyboard push button for LOW SPEED mode selection This is active only when the front panel operation is selected Press A Once and the pump runs at stand by speed Q Again to unselect the mode 1 2 TASK Turbo Pumping System Table 1 1 V 81 AG and V 301 AG Front Panel Keypad Functions Continued Keypad Item Description Keyboard push button to recall on the display the pump current pump temperature pump power and rotational speed This is always active regardless of the operating mode selected Press push buttons 3 and 1 together for 2 seconds to put the controller in a routine to program some operation parameters Keyboard push button for START STOP RESET mode selection This is active only when the front panel operation is selected Press A Once and the starting phase begins A Again and the pump stops If the pump has been stopped automatically by a fault press this push button once to reset the controller and a second time to restart the pump LCD back lit alphanumeric display dot matrix 2 lines x 16 characters 1 3 TASK Turbo Pumping System Installation General The TASK system is shipped with a plastic protective cover to prevent debris from entering the turbo pump If the cover shows signs of damage which may have
9. occurred during transport contact your local sales office Always take care to prevent anything including fingers from touching the turbo blades The use of an inlet screen is recommended factory installed Obey the following Q Use this equipment only on a sturdy horizontal surface and indoors Q Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk Q During operation the following environmental conditions must be maintained A Temperature 5 C to 35 C 41 to 95 F A Relative humidity O to 95 non condensing CAUTION Be certain the electrical mains power voltage corresponds to that indicated on the white tab 110 or 220 adjacent to the On Off switch on the rear of the TASK system Q Connect the TASK system to the power supply using an IEC 320 style power cord of at least 10 A capacity power cord included The total weight of TASK system and packaging is approximately 117 3 kg 53 2 Ibs WARNING When unpacking the TASK system do not drop it Avoid j sudden impact or shock vibration NOTE Normal exposure to the environment will not damage the TASK system Nevertheless keep the pump inlet closed until the turbo pump is installed in the system TASK Turbo Pumping System Installation Procedure Figure 1 2 and Figure 1 3 show the TASK system front and back views res
10. the TASK system Q Push the START STOP keypad function button See Startup on page 2 1 Troubleshooting TASK System Start Up Troubleshooting Table 2 1 lists the TASK system start up troubleshooting Table 2 1 TASK System Start Up Troubleshooting Guide Problem Possible Causes Corrective Action Turbo controller display One or both fuses blow Replace fuses see Table 1 3 on does not come on page 1 6 item 8 Turbo controller may be Remove task cover and check unplugged plug connections If the problem is not resolved check Table 2 2 on page 2 4 For more details see the turbo controller operators manual 2 2 TASK Turbo Pumping System Table 2 1 TASK System Start Up Troubleshooting Guide Continued Problem Possible Causes Corrective Action Turbo controller START Turbo controller not configured Reconfigure as per the button is pushed and scroll for one button start One Button Start Configuration pump does not turn on Procedure Scroll pump may be unplugged Remove the TASK cover and check plug connections Defective relay Check that voltage is present at the scroll pump receptacle once the START button is pushed If not replace the relay If the problem is not resolved check Table 2 3 on page 2 6 For more details see the scroll pump operator manual One Button Start Configuration Procedure The turbo controller is configured for one button start To configu
11. 1 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Inc Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011 997 9 350 12 04 Sales and Service Offices Japan Varian Inc Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Building 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Russia Central coordination through Varian Inc via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 252 Fax 39 011 997 9 316 Taiwan Varian Technologies Asia Ltd 18F 13 No 79 Hsin Tai Wu Road Sec 1 Hsi Chih Taipei Hsien Taiwan R O C Tel 886 2 2698 9555 Fax 886 2 2698 9678 UK and Ireland Varian Ltd 28 Manor Road Walton On Thames Surrey KT 12 2QF England Tel 44 1932 89 8000 Fax 44 1932 22 8769 United States Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Other Countries Varian Inc Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9 111 Fax 39 011
12. 7 4 50 CFF TPSK81MCF063120 TPSK81MCF063220 49 4 108 8 ISO 100 TPSK301151001 20 TPSK30115100220 49 8 109 7 6 00 CFF TPSK301CF1001 20 TPSK301CF100220 53 2 117 3 ISO 160 TPSK30115160120 TPSK30115160220 49 8 109 7 8 00 CFF TPSK301CF150120 TPSK301CF150220 53 2 117 3 y 9001 R EG I S T E R E D a V Request for Return VARIAN lt Health and Safety Certification 1 Return authorization numbers RA will not be issued for any product until this Certificate is completed and returned to a Varian Inc Customer Service Representative 2 Pack goods appropriately and drain all oil from rotary vane and diffusion pumps for exchanges please use the packing material from the replacement unit making sure shipment documentation and package label clearly shows assigned Return Authorization Number RA VVT cannot accept any return without such reference 3 Return product s to the nearest location North and South America Europe and Middle East Asia and ROW Varian Inc Varian S p A Varian Vacuum Technologies 121 Hartwell Ave Via F lli Varian 54 Local Office Lexington MA 02421 10040 Leini TO ITALY Fax 781 860 9252 Fax 39 011 997 9350 For a complete list of phone fax numbers see www varianinc com vacuum 4 Ifa product is received at Varian Inc in a contaminated condition the customer is held responsible for all costs incurred to
13. cation failure J Error code on display O Display problem J Degas not working EV Other ier Describe failure Describe failure Customer application Customer application ALL OTHER VARIAN INC DIFFUSION PUMPS O Pump doesn t start O Doesn t reach vacuum O Pump seized O Overtemperature O Noisy pump describe O Other O Heater failure O Doesn t reach vacuum J Vacuum leak J Electrical problem J Cooling coil damage FOET eter tem Describe failure Describe failure Customer application August 2003 Customer application Page2 of2 R EG I S T E R E D Canada Central coordination through Varian Inc 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 860 5437 Toll Free 800 882 7426 China Varian Technologies Beijing Room 1201 Jinyu Mansion No 129A Xuanwumen Xidajie Xicheng District Beijing 1000031 P R China Tel 86 10 6608 1031 Fax 86 10 6608 1541 France and Benelux Varian s a 7 avenue des Tropiques Z A de Courtaboeuf B P 12 Les Ulis cedex Orsay 91941 France Tel 33 1 69 86 38 13 Fax 33 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 6151 703 353 Fax 49 6151 703 302 India Varian India PVT LTD 10
14. conds AUTO TEST OK appears In the event an error code appears follow the repair action in Table 2 2 on page 2 4 After a few seconds STOP HZ FRONT appears Push the START STOP button on the turbo controller front panel STARTING XXXXHz FRONT appears The scroll pump starts and then the turbo starts The controllers are configured at the factory for high speed operation When the pump accelerates to its normal rotational speed NORMAL XXXXHz Front appears XXXX is Q 963 Hz for the V 301 Q 1350 Hz for the V 81M WARNING Never expose the TASK system inlet when operating at normal speed to the atmosphere This could result in permanent turbo AN pump damage and injury to personnel 2 1 TASK Turbo Pumping System TASK System Shutdown To shutdown the system 1 Press the START STOP keypad button on the turbo controller The SH 110 stops immediately The turbo pump winds down slowly unless it is vented 2 Vent the turbo by lifting the toggle lever on the manual vent device located in the rear of the unit See Figure 1 3 on page 1 5 item number 7 Power Failure In the event of a power failure Q The controller shuts down The turbo pump scroll pump and all the interconnected devices also shut down The system remains under vacuum Q When power is restored the controller runs the self diagnostic test When finished with the test STOP Hz Front appears on the display To restart
15. cooled to within an acceptable temperature range TASK Turbo Pumping System Appendix A Specifications and System Configurations Table A 1 lists the TASK technical specifications Table A 1 TASK Technical Specifications TASK System Specifications Description Base Pressure 5 x 10 mbar N5 50 H 46 He 56 N5 77 H5 50 He 65 N 250 Hy 200 He 220 N2 280 H 210 He 230 Pumping Speed l s V 81 M KF 40 2 75 CFF DN 40 V 81 M ISO 63 4 50 CFF DN63 V 301 ISO 100 6 00 CFF DN100 V 301 ISO 160 8 00 CFF DN160 Cuno ovvuvovoooeceno Rotational Speed V 81M 1350 Hz V 301 963 Hz Operating Position Vertical Operating Ambient Temperature 5 C to 35 C Input Voltage Frequency 120 or 220 VAC 50 60 Hz Maximum Input Power 736 W 486 W V 81M V 301 Bakeout Temperature CFF 120 C at Inlet KF ISO 80 C at Inlet Altitude 2000 m maximum Humidity 0 to 95 non condensing Storage Temperature 20 to 60 C TASK Turbo Pumping System Table A 2 lists the TASK configurations available Turbo Pump Inlet Flange KF 40 Table A 2 Task Configurations Part Number 120 V 50 60 Hz TPSK81MKF040120 Part Number 220 V 50 60 Hz TPSK81MKF040220 Shipping Weight kgs Ibs 47 9 105 7 2 75 CFF TPSK81MCF035120 TPSK81MCF035220 49 4 108 8 ISO 63 TPSK81MIS0631 20 TPSK81MIS063220 47 9 105
16. di beet seat irte ceases trust Ede eyes Pte Sve dened codo ed veg t esce s Se XV Introduction and Installation 4 5 2 2 ce Iri ccce eto Lu recu eicere run ou Da nra nna ds 1 1 SLOTA E 4s Secs m 1 1 Controller Descriptio cu sdussecsetadets ides bito tuto o Pike uere bafi uode eret vu toner ma uuo pad 1 2 Controller Interface ot De e REN OR ete te cated ee 1 2 Installation items tee eiie team dE 1 4 Generals nette a S ciere dL ee i deem ee 1 4 Installation Procedure aura cala eoe be tod da dank connote veste ierit 1 5 eden P 2 1 Sr 2 1 TASK Systems bdo Vll e toits ep da 2 2 LOETA REVII E EEEE ouem TR wu LM M EM RU CE ENS 2 2 STIS Ies DOO fi eio deta tate tentative etd vds cs dieat uetus edat a sto t sud 2 2 TASK System Start Up Troubleshooting cua cao terr hrs teet ager Eae eer rires c 2 2 One B tton Start Configuration Procedure uote trat varus sited neta en en od t ash ona 2 3 SH 1 10 Troubles la SOHN oreet da teo ot este ec Ber ea ab acc un pan des 2 6 Appendix A Specifications and System Configurations eene A 1 Request for Return Health and Safety Certification Sales and Service Offices TASK Turbo Pumping System This page intentionally left blank TASK Turbo Pumping System List of Figures Figure Caption Page 1 1 VELAS FONE Panel scarce cng ure re eoo os 1 2 1 2 TASK
17. ibility that the product erkl ren in alleniniger Verantwortung daf dieses Produkt d clarons sous notre seule responsabilit que le produit declaramos bajo nuestra sola responsabilidad que el producto verklaren onder onze verantwoordelijkheid dat het product dichiariamo sotto nostra unica responsabilit che il prodotto TASK Turbo Pumping System to which this declaration relates is in conformity with the following standard s or other normative documents auf das sich diese Erkl rung bezieht mit der den flogenden Norm en oder Richtlinie n bereinstimmt auquel se r f re cette d claration est conforme la auz norme s ou au x document s normatif s al que se refiere esta declaraci n es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione conforme alla e sequente l norma o documento l normativo i EN 61010 1 Safety requirements for electrical equipment for measurement control and laboratory use EMC Emissions EN 55011 1998 Group 1 Class A ISM emissions requirements EU EMC Immunity EN 61326 1997 Measurement control and laboratory equipment EMC requirements Industrial use Frederick C Campbell Operations Manager Vacuum Technologies C Varian Inc Lexington Massachusetts USA D o CANADIAN STANDARDS September 2003 ASSOCIATION ee TASK Turbo Pu
18. mping System Preface Warnings Cautions and Notes The following icons are used in this manual to call attention to hazards and important formation WARNING Warnings are used when failure to observe instructions or j precautions could result in injury or death CAUTION Cautions are used when failure to observe instructions could result in damage to equipment whether Varian supplied or other associated equipment NOTE Notes contain information to aid the operator in obtaining the best performance from the equipment TASK System Hazards This product must only be operated and maintained by trained personnel Before operating or servicing equipment read and thoroughly understand all operation and maintenance manuals provided by Varian Be aware of the hazards associated with this equipment know how to recognize potentially hazardous conditions and how to avoid them Read carefully and strictly observe all cautions and warnings The consequences of unskilled improper or careless operation of the equipment can be serious In addition consult local state and national agencies regarding specific requirements and regulations Address any safety operation and or maintenance questions to your nearest Varian office Xii TASK Turbo Pumping System EMC Warnings EN 55022 Class A Warning This is a Class A product In a domestic environment this product may cause radio interference in which case the user may be required t
19. ng ring and clamp material and style 2 Place the mating flange on the inlet flange and secure with the clamp ConFlat Inlet Flange Figure 1 6 shows the ConFlat flange Figure 1 6 ConFlat Flange Connection To install 1 Selected appropriate size ConFlat flange hardware Silver plated hardware is recommended to prevent galling 2 Select the proper size copper gasket 3 Insert bolts tighten from the nut side in a clockwise rotation TASK Turbo Pumping System This page intentionally left blank TASK Turbo Pumping System Operation The TASK system comes factory configured for normal speed one button operation The controller can be reconfigured to support your specific requirements Please consult the turbo controller manual for more detail Operation of the TASK system consists of Startup Startup Q TASK System Shutdown on page 2 2 Q Power Failure on page 2 2 Q Troubleshooting on page 2 2 To start the TASK system 1 Close the manual vent valve located in the upper left corner on the rear of the unit The lever should be pointed down toward the floor See Figure 1 3 on page 1 5 item number 7 Plug the Task system power cord into the appropriate power source Turn on the system using the on off switch located in the lower left corner on the rear of the unit See Figure 1 3 on page 1 5 item number 8 AUTO TEST appears on the turbo controller display and after a few se
20. o take adequate measures FCC This device complies with Part 15 of the FCC rules Operation is subject to the following two conditions 1 This device may not cause harmful interference and 2 this device must accept any interference received including interference that may cause undesirable operation NOTE This equipment has been tested and found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual can cause harmful interference to radio communica tions Operation of this equipment in a residential area is also likely to cause harmful radio communications interference in which case the user is required to correct the interference at their own expense xiii TASK Turbo Pumping System Contacting Varian In the United States you can contact Varian Customer Service at 1 800 8VARIAN Internet users A Order on line at www evarian com Q Send email to Customer Service amp Technical Support at vpl customer supportQ varianinc com QO Visit our web site at www varianinc com vacuum See the back cover of this manual for a listing of our sales and service offices About this Manual This man
21. oducts should be returned must be obtained Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non acceptable means of transportation When any Product is returned for examination and inspection or for any other reason Customer shall be responsible for all damage resulting from improper packing or handling and for loss in transit notwith standing any defect or non conformity in the Product In all cases Seller has the sole responsibility for determining the cause and nature of failure and Seller s determination with regard thereto shall be final If it is found that Seller s Product has been returned without cause and is still serviceable Customer will be notified and the Product returned at Customer s expense in addition a charge for testing and exam ination may be made on Products so returned 3 1 00 TASK Turbo Pumping System This page intentionally left blank TASK Turbo Pumping System Table of Contents dirum xii Warnings Cautions and INDIOS A beh geo en e iced E xii TASK Systemi EZ AES eae tia A A d eed Das dtc Ded Nec a xii EMGWarnltigs tates Sects dore Ue DR Cb d E mE is xiii Aboutthis Manual sicot UO tie e re REND xiv Maintenance it pie
22. p temperature 1 Wait until the temperature exceeds 60 C decreases below threshold value 2 Press START twice to start the pump CONTROLLER The controller environment 1 Wait until the temperature OVERTEMPERATURE temperature exceeds 70 C decreases below threshold value Or The controller radiator temperature exceeds 60 C 2 Press START twice to start the pump TOO HIGH LOAD The current drawn by the pump is higher than programmed 1 Check that the pump rotor is free to rotate 2 Press START twice to start the pump SHORT CIRCUIT After the starting phase the output connection is shorted 1 Check the connections and shortages between pump and controller 2 Press START twice to start the pump SYSTEM OVERRIDE 2 4 The pump was stopped by an emergency stop signal provided via a remote contact 1 Remove the controller power cable and check the emergency condition 2 Reconnect the power cable and press START twice to start the pump TASK Turbo Pumping System Table 2 2 Turbo Controller Troubleshooting Guide Continued Message Turbo OVERVOLTAGE Description The controller power supply circuitry is faulty or the Controller received a spike Resolution Press START twice to start the pump If the message reappears call Varian for service POWER FAIL Failure in the controller pump power supply section Contact Varian for maintenance
23. pectively and lists the components by number Figure 1 3 TASK System Rear View Table 1 2 TASK System Components Number Number 1 Turbo pump 7 Vent valve lever 2 Turbo controller 8 Main switch on off and fuse holder 3 Turbo controller power receptacle s 9 System cooling fan 4 SH 110 scroll pump 10 Scroll pump inlet filter 5 Scroll pump on off switch factory set 11 Scroll pump exhaust NW16 set on Remove flange for 1 4 FNPT 6 Scroll pump power receptacle TASK Turbo Pumping System There are three types of inlet flange connections for the TASK pumping system Q ISO Inlet Flange Q KF Inlet Flange on page 1 7 Q ConFlat Inlet Flange on page 1 7 ISO Inlet Flange Figure 1 4 shows the ISO flange Figure 1 4 ISO Flange Connection To install 1 Use the Varian claw clamps P N 1C63250DCMZ to connect to a turbo pump Do not use any other style Table 1 3 lists the number of clamps required by flange size Table 1 3 Flange Size Clamps Required Number of clamps Flange size required ISO 63 ISO 100 ISO 160 2 Select the correct size centering ring material and style 3 Place the mating flange on the inlet flange equally spacing clamps around the connection and tighten TASK Turbo Pumping System KF Inlet Flange Figure 1 5 shows the KF flange Figure 1 5 KF Flange Connection To install 1 Select the correct size centeri
24. r replaced parts After expiration of the applicable warranty period Customer shall be charged at the then current prices for parts labor and transportation Reasonable care must be used to avoid hazards Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures Except as stated herein Seller makes no warranty express or implied either in fact or by operation of law statutory or otherwise and except as stated herein Seller shall have no liability under any war ranty express or implied either in fact or by operation of law statutory or otherwise Statements made by any person including representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorized representative Such claims should include the Product serial number the date of shipment and a full description of the circumstances giving rise to the claim Before any Products are returned for repair and or adjust ment written authorization from Seller or its authorized representative for the return and instructions as to how and where these Pr
25. re for one button start ND WB WN NOTE Buttons discussed below are all located on the turbo controller front panel Press the COUNTERS and MEASURES buttons simultaneously for 2 seconds until MODE FRONT appears Press the MEASURES button until INPUT OUTPUT appears Press the COUNTERS button Press the MEASURES button until START OUT MODE STARTING appears Press the COUNTERS button until START OUT MODE RUNNING appears Press the MEASURES button Press the COUNTERS and MEASURES buttons simultaneously for 2 seconds until STOP XXXXHz Front appears If the scroll pump still does not start continue on with the scroll pump troubleshooting procedures 2 3 TASK Turbo Pumping System Table 2 2 lists some turbo controller error messages common to startup and describes how to resolve the error Message Turbo Table 2 2 Turbo Controller Troubleshooting Guide Description Resolution CHECK Incorrect connection between the 1 Check connection between CONNECTION pump and the controller controller and pump TO PUMP Or 2 Press START twice to start the The pump temperature is below 0 C PUMP WAITING The interlock signal of connector P1 is Reset the short circuit between pin 3 INTERLOCK activated by an interruption of the link and pin 8 of connector J1 or close between pin 3 and 8 of connector J1 or the external interlock signal the external interlock signal is open PUMP OVERTEMP The upper bearing pum
26. the pump power supply before beginning maintenance work NOTE Before returning the pump to the factory for repair the Health and Safety sheet in this manual must be completed and sent to the local sales office A copy of the sheet must be inserted in the pump package before shipping Dispose of the pump in accordance with specific national standards XV TASK Turbo Pumping System This page intentionally left blank TASK Turbo Pumping System Introduction and Installation TASK is an indoor bench top turbo pumping system that is comprised of an SH 110 Scroll backing pump and either a V 81M or V 301 turbomolecular pump TASK produces an oil free high vacuum while maintaining one button operation The system is available with a variety of different inlet flanges see Appendix A Specifications and System Configurations The SH 110 is a hermetic dry scroll vacuum pump suitable for pumping air or inert gases The pump is not intended to pump toxic corrosive explosive or particulate forming gases The turbopump controllers are microprocessor based frequency converters with self diagnostic and protection features to ensure the highest degree of reliability They display all of the relevant operating parameters and pump status information TASK system features include Q One button operation Available in 120 VAC 50 60 Hz or 220 VAC 50 60 Hz Oil free high vacuum performance CE and CSA approvals Lifting hand holds
27. ual is intended as an overall guide for installing configuring and operating the TASK turbo pumping system The TASK system is comprised of three critical components Q A turbo pump Either an V 81M or a V 301 Q A turbo controller Either an V 81 AG or a V 301 AG Q An SH 110 scroll vacuum pump Instruction manuals for the turbo pump turbo controller and the SH 110 scroll pump are included with the TASK system Refer to these individual manuals listed below for in depth discussions on use and troubleshooting Component V 81M turbo pump V 301 turbo pump V 81 AG turbo controller V 301 AG turbo controller D D D vo vo SH 110 scroll pump xiv Component Part Number 9698901 02 03 04 9698918 19 20 21 9698988 9698991 SH01101 UNIV Instruction Manual Part Number 8790098301 8790094601 8790098601 8790098201 699904311 TASK Turbo Pumping System Maintenance Personnel responsible for pump operation and maintenance must be well trained and aware of the accident prevention rules WARNING Q Death can result from contact with high voltages Always take extreme care and observe the accident prevention AN regulations in force Q When the machine is powered up be careful of moving parts and high voltages A If you have to perform maintenance on the pump after a considerable time in operation allow it to cool as the temperature of the outer surface may be in excess of 60 C Q Always disconnect
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