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CVI Melles Griot Nanomotion II Manual

1. MELLES GRIOT 143 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com NEW cover 4 18 01 1 03 PM Page 1 T NANOMOTION II USER MANUAL Controller Model Number d 11 NCS 101 BM d 11 NCS 101 IEEE 1 11 NCS 101 Expansion Module Serial Number Purchased by Date the practical application of light MELLES CHIOT Photonics Components 16542 Millikan Avenue Irvine CA 92606 1 800 835 2626 949 261 5600 FAX 949 261 7790 e E mail sales irvine mellesgriot com Asia 81 03 3407 3614 Europe 31 0316 333041 W W W m e e 6 q t C m A member of Barlow Scientific Group Ltd O April 2001 Melles Griot Inc All rights reserved 22 MAN 101 REV C Arisan T onrolog Group Quality Instrumentation Guaranteed 888 sesopnce www artisantg com A rtisan Artisan Technology Group is your source for quality TecmoogyGroup new and certified used pre owned equipment FAST SHIPPING AND SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT DELIVERY Experienced engineers and technicians on staff Sell your excess underutilized and idle used equipment TENS OF THOUSANDS OF at our full service in house repair center We also offer credit for buy backs and trade ins IN STOCK ITEMS www artisantg com WeBuyEquipment EQUIPMENT DEMOS HUNDREDS OF InstraV ea REMOTE INSPECTION LOOKING FOR MORE INFORMATION MANUFACTURERS Remotel
2. A rtisan Artisan Technology Group is your source for quality TecmoogyGroup new and certified used pre owned equipment FAST SHIPPING AND SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT DELIVERY Experienced engineers and technicians on staff Sell your excess underutilized and idle used equipment TENS OF THOUSANDS OF at our full service in house repair center We also offer credit for buy backs and trade ins IN STOCK ITEMS www artisantg com WeBuyEquipment EQUIPMENT DEMOS HUNDREDS OF InstraV ea REMOTE INSPECTION LOOKING FOR MORE INFORMATION MANUFACTURERS Remotely inspect equipment before purchasing with Visit us on the web at www artisantg com 7 for more our interactive website at www instraview com 7 information on price quotations drivers technical LEASING MONTHLY specifications manuals and documentation RENTALS ITAR CERTIFIED yop aed Contact us 888 88 SOURCE sales artisantg com www artisantg com NEW cover 4 18 01 1 03 PM Page 2 F NANOMOTION I USER MANUAL MELLES CRIOT Arisan Tneolog Group Quality Instrumentation Guaranteed 888 sesopnce www artisantg com Nanomotion TOC 4 19 01 3 23 PM Page iii s Table of Contents Chapter 1 General Introduction 0 eee ee eee ee eee 1 1 1 Copyright and Manual Notice 0 0 0 0 ee eee eee 1 1 2 Wattanty Statement yaoi prseter le ee eee ERE OR E Rep Gnd oe 1 1 3 Manufacturer Statement ccs ecc kek e
3. 888 88 SOURCE www artisantg com Programming Nanomotion IT minimum limit should be enabled a limit enable value of 1 01 Hex would be used Only the index enabled is 4 04 Hex The default condition is minimum and maximum limits enable and the index switch disabled or 3 03 Hex Bit 0 minimum limit 1 means enabled 0 means disabled Bit 1 maximum limit 1 means enabled 0 means disabled Bit 2 index switch 1 means enabled 0 means disabled Example WLIME 2 3 Enables the minimum and maximum limit switches Nanomover 2 WLM lt mtr gt lt Imc gt Command Write lost motion compensation Parameters mtr Nanomover Number 1 through 16 Imc LMC value 10 through 10 Description This commands sets the lost motion compensation LMC value to be used for the specified Nanomover The LMC value should be an integer in the range of 10 otherwise the value will be limited to be within the allowable range A value of 0 will disable LMC Any other value will enable it Each unit of LMC corresponds to 10um of Nanomover travel The sign of the LMC value specifies the direction of the LMC at the end of each move Example WLM 1 2 The lost motion compensation will be set to 2 20 um for Nanomover 1 WLT lt mtr gt lt lock gt Command Write lock Parameters mtr Nanomover Number 1 through 16 lt lock gt Position Lock Time value Description This command sets the du
4. Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System Float lstop 100 0 Float rstop 100 0 Float bvel 125 float vell 1 0 float accell 5 0 float move2 0 0 long baud 9600L if com port create port baud N 8 1 2048 2048 amp Port lt 0 printf cannot initialize COM port init clock 0 3333 init ctric hdlr com 232 ctrl ON DTR RTS OUT2 amp Port sprintf out WAL d f r n motor lstop SendString out sprintf out WAR d f r n motor rstop SendString out sprintf out WLM d Sf r n motor lmc SendString out sprintf out WB d sf r n motor bvel SendString out sprintf out WV1 d Sf r n motor vell SendString out sprintf out WAl d Sf r n motor accell SendString out sprintf out MR d f r n motor move SendString out Motor 2 sprintf out MR d sf r n motor move SendString out sprintf out MA d f r n motor move2 SendString out Motor 1 sprintf out MA d f r n motor move2 SendString out End clock End ctrlc hdlr Com port destroy amp Port end of example 66 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 6 Programming Nanomotion II For some applic
5. IP The index pulse bi directional hardware limit switch is active AL The Nanomover is at the absolute left retracted software stop position AR The Nanomover is at the absolute right extended software stop position MV The Nanomover is currently moving OK Normal stationary Nanomover status PK The motor is in the PARKED state When the Nanomover is parked it will ignore all commands to move EN A motor stall has been detected with the encoder ME The last move did not finish at its commanded position the Nanomover may have been commanded to stop or hit a limit switch or a software stop or whatever RS The Nanomover microcontroller has been reset This is an error condition possibly resulting from a power supply brown out 88 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Example RS 2 Retrieves the status for Nanomover 2 If the Nanomover is moving the interface card will respond with the ASCII string 2 MV CRLF RSCUR lt mtr gt Command Read stepping current Parameters mtr Nanomover Number 1 through 16 Description Returns the stepping current for the Nanomover The stepping current will be in the range 0 2 46 A Stepping current is the current to the Nanomover motor when the Nanomover is moving See the library function description for more information Example RSCUR 3 Retrieves the st
6. Local Operation Command Parameters None Description Enable local instrument operation For the Nanomotion II system the GPIB and RS 232C interfaces will begin to ignore all commands except Remote Operation Enable CREM And will permit joystick control of axes Example LOC Disables interface control of the Nanomotion II system except for the REM command And enables Joystick control OPC Command Operation Complete Parameters None Description Sets the operation complete OPC bit message in the Standard Event Status Register SESR when all pending operations are finished Example OPC Commands the interface board to set the OPC bit in the Standard Event Status Register SESR when all pending operations are finished OPC Command Operation Complete Query Parameters None Description Places the ASCII character 1 into the output queue when all pending commands are complete The OPC response is not available to read until all pending operations finish MELLES GRIOT 73 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Example OPC Returns and ASCII 1 if all pending commands are complete REM Command Remote Operation Command Parameters None Description Enable remote instrument operation For the Nanomotion II system the GPIB and RS 232C interfaces will begin to recognize all normal commands Jo
7. On power up the microcontrollers assume that all Nanomovers are located at the zero location The Nanomovers are correctly synchro nized if they have each been manually set with 1 5 mm of shaft extension and the manual location knob has been turned to point directly away from the cable 2 Before the user exits the Nanomotion II system the PARK command can be used to park any or all of the motors When the system is powered up and the software is reinitialized the user has the option to use the UNPARK command to retrieve the previous position s and maintain the synchronization 100 nm 3 The synchronization of any of the Nanomovers can be reset at any time using the WRITE POSITION command This command can be used to reset the position counter to the current physical displace ment of the Nanomover micrometer shaft Note The synchronization position does not need to use the recom mended zero position with 1 5 mm of shaft extension Other locations can be used However the absolute stops must then be carefully applied to ensure that the Nanomover does not exceed tis normal range of travel 2 8 7 Default Movement Parameters The movement characteristics of Nanomotion II are ordinarily determined by user specified values for the parameters available on the motor param eters page If one or more of these parameters is not defined by the user then the parameter will be given a default value The default values have been calculated for
8. data return Reads lost motion compensation for a Nanomover in units of 10 microns range from 10 to 10 LMC does not changed if units are changed it always in terms of 10 micron units For example an LMC value of 10 means that lost motion compensation is in the direction and it is 10 x 10um or 100 um in length If the motor is currently moving this function will wait for it to stop before proceeding nl read lmc 4 npLmcValue Returns the current lost motion value in the location pointed to by npLmcValue nl read lock lt mtr gt lt npLockTime gt Command Parameters Description Read position lock time mtr Nanomover number 1 through 16 lt npLockTime gt Pointer to an integer variable for the data return Reads position lock time for a motor in milliseconds Position lock time is the time allowed to elapse on completion of a move before the motor currents are dropped back to the lower holding current values The default value of 10 milliseconds should suffice for most loads If the motor is currently moving this function will 118 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual wait for it to stop before proceeding Lock times are always in milliseconds and can range from 0 to 255ms Example nl read lock 15 npLockTime Returns the current lock time setting in the location pointed to by npLockTime
9. such as Visual Basis or C C that can access a Windows DLL should be able to use the library You must consult the documentation for your language to determine how to use the Nanomotion II DLL 64 MS C7 0 Library for DOS Applications 6 4 1 Introduction The Nanomotion II libraries are sets of C language functions that allow the user to control the Nanomotion II position system using the Microsoft C and C languages either in a standalone MS DOS EXE program or a Windows application using the DLL This documentation assumes that the user is familiar with the operation of the Nanomotion II system and its associated terminology The Nanomotion II manual details the configuration of the Nanomotion II system and the definition of parameters All Library functions begin with nl that stands for Nanomotion II library The nl_ prefix will help distinguish the Nanomotion II library functions in your source code The rest of the function name is descriptive of the function s use For example nl read position reads the position of a Nanomover This should make using the libraries less of an exercise in memory and produce final code that is easy to understand and maintain Of course the user is free to redefine function names to those that are most descriptive for their application The libraries are compiled with Microsoft C using the most current version available at the time The compiler version is listed in
10. the deceleration curve is the reverse of the acceleration curve The use of four segments allows a reasonable approximation of the ideal exponentially shaped acceleration profile Each of the four segments is defined in terms of velocity and acceleration To move the Nanomover accelerates at its defined rate until it reaches the specified velocity When this velocity is reached the motor accelerates with the value in the next segment continuing this process until the movement is complete slow velocity 4 acceleration 4 1 75 gt 125 z velocity 2 2 o gt P 0 75 velocity 1 base velocity 0 25 a eS i Time Figure 2 3 Velocity Acceleration Ramping 12 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual In the example shown in the figure the Nanomover starts at a base velocity of 0 25 mm sec The acceleration for the first ramp segment occurs at 400 mm sec until a velocity of 0 75 mm sec is reached The next ramp uses an acceleration of 200 mm sec to a velocity of 1 25 mm sec the third ramp uses an acceleration of 125 mm sec to 1 75 mm sec and the fourth ramp uses 100 mm sec to a final velocity of 2 00 mm sec Although the above example uses millimeters as a generic unit any common measurement unit can be used Not all ramp segments must be executed The Nanomotion II system
11. the designated Nanomover will move by 50 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 1 mm If Units to Move is set to 50 nanometers the movement will be 50 nanometers However if the JOG key is pressed and held down the Nanomover will continue to move in a free run mode as long as the key is held down i e not necessarily in multiples of Units to Move Releasing the key will halt movement Step STEP is used to move the selected Nanomover s by the amount of the Units to Move variable It is similar in function to the JOG command but will not repeat unless re selected that is unlike JOG holding down the STEP key does not produce FREE RUN motion Hence STEP is useful for making small precise movements STEP will not cause a Nanomover to move outside the left or right stops Repeat REPEAT is a combination of STEP and JOG REPEAT is used to move the selected Nanomover s in specific increments like STEP but can also be used to make several STEP moves at a time If a REPEAT key is pressed and then released quickly the Nanomover will move the Units to Move amount same as for STEP key However if a REPEAT key is pressed and held down the Nanomover will begin to make a rapid series of moves of the size Units to Move and will continue to make these moves as long as the key is held down Releasing the key will stop the mo
12. will wait for it to stop before proceeding Example nl write lmc 4 nLmcValue Returns O if operation successful non 0 if operation unsuccessful nl write lock lt mtr gt lt nLockTime gt Command Set lock time Parameters mtr Nanomover number 1 through 16 nLockTime New value for position lock time Description Sets lock time wait time in units of milliseconds for the specified motor Lock time is the time that the controller maintains stepping current after the motor stops moving After the motor stops and the lock time expires the controller drops to holding current If the motor is currently moving this function will wait for it to stop before proceeding Example nl write lock 4 nLockTime Returns O if operation successful non 0 if operation unsuccessful nl write microsteps lt mtr gt lt nMicrosteps gt Command Set microsteps per cardinal motor step Parameters mtr Nanomover number 1 through 16 nMicrosteps New value for microsteps per step for the system 25 50 100 125 250 Description Sets the number of microsteps per cardinal motor step for the Z8 to use when moving between positions The PC 128 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual motion control library also uses the value for calculating system resolution etc for maintaining units within the Nanomotion syst
13. 2 2 2 3 2 Controlling from an RS 232C or IEEE 488 2 Interface If a non IBM compatible computer is selected the IEEE 488 2 RS 232C interface board must be used in the controller chassis Either the IEEE 488 2 or the RS 232C interface capability of the board can be utilized according to the preferences of the user see Figure 2 2 IBM compatible PC IEEE 488 2 port 1 IEEE 488 2 Nanomovers or or RS 232C port RS 232C cable power switch front panel IEEE 488 2 RS 232 C Connector Connector Address Switches joystick limit switches Nanomovers ac power fuses 4 computer bus 2 NANOMOTION CHASSIS Figure 2 2 IEEE System showing optional expansion port in lower bay 2 3 3 Controlling more than two Nanomover motors In all of the configurations described above up to seven additional controller chassis can be added to the base system With the full comple ment eight chassis a total of 16 Nanomover motors two per chassis can be controlled by a single host computer The controller chassis are connected in series through the PCinterface boards that must be present in each chassis MELLES GRIOT 7 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT 2 4 System Components 2 4 1 Nanomotion II PC Link Board Included with the 11 NCS 101 IBM Controller Installed in a host personal computer the Nanomotion II PC Lin
14. 4 lt dVelocity gt New value for the designated velocity ramp Sets the velocity corresponding to nRamp 1 4 for nMotor to dVelocity in currently selected units If the motor is currently moving this function will wait for it to stop before proceeding nl write vel 12 3 dVelocity Returns O if operation successful non 0 if operation unsuccessful 130 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 7 Application Notes Motorized positioners that move with the resolution and repeatability of the Nanomotion II system represent state of the art technology There is little or no information available in the literature on how to consistently accomplish movements that are so small Making repeatable nanometer scale mechanical movements on an everyday basis is still uncharted territory In general positioning errors on the order of 1 micrometer are straightforward to achieve But applications that require positioning error of less than a micrometer require care and attention to every detail in the mechanical system Because the mechanical stages and mounts usually contribute a greater error than do the Nanomovers the need to use quality stages and components cannot be overemphasized The notes in this section are based on our research and development experience with motion control systems in general and the Nanomotion II system in particular They can help
15. Example nl get microsteps 1 Returns the microsteps per step for the motor If there is an error the function returns 1 nl get motor address lt mtr gt Command Get I O address PARAMETERS MTR NANOMOVER NUMBER 1 THROUGH 16 Description Returns the PC I O address of the specified Nanomover Each Nanomover occupies four 4 locations in the PC s I O space This function will return the lowest of those locations The Nanomovers are always accessed by their motor numbers and this function is only used as a convenience to help the user identify possible addressing conflicts in his PC system Example nl get motor address 16 Returns an integer address of the Nanomotion II board If there is an error the function returns 1 nl get motor steps mtr Command Get cardinal steps per revolution Parameters mtr Nanomover number 1 through 16 110 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Description Returns the cardinal steps per revolution for the specified motor Maps internally in the library to nl read motor steps but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get motor steps 3 Returns the steps per revolution for the motor If there is an error the function returns 1 nl get n
16. Limit Switch Active Inactive 2 Right Limit Switch Active Inactive 3 Emergency Stop Active Inactive 4 Absolute Left Stop At Not at Abs Absolute Left Left Reserved 6 AtAbsolute Right At Not at Abs Stop Absolute Right Right 7 Index Switch Active Inactive High Byte 8 Motor Parked Parked Not Parked 9 Last Move Status Move No Move Error Error 10 Encoder Error Encoder No Error Encoder Error 11 Reset Interlock Reset No Reset Interlock Detected 12 Reserved 13 Reserved 14 Reserved 15 Reserved MELLES GRIOT 121 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II 1A Move Error is declared when the position after a motor move does not equal the commanded position nl stop commands limits encoder errors etc are all potential causes of move error s 2All the encoder functions in the Nanomotion II libraries require external hardware an encoder with electrical interface to work properly The status bit 10 is undefined Reserved if no encoder is present 3At power up tbe Z8 sets a bit to one in one of its registers and initializes the motor current to 0 0 During the nl_init procedure the PC turns the motor current on and resets the bit to zero If an inadvertent power reset occurs at tbe Z6 the current to the motor current is re initialized to zero preventing motion and the bit is re initialized t
17. Limit switches are not considered necessary but some users may wish to install them for added safety Nanomotion II systems are configured for user supplied limit switches of the normally open switch contact or opto interrupt type Whenever a limit switch is closed by a Nanomover the 46 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Nanomover will not be driven any further in that direction See Limit Switch Circuits in Chapter 3 Specifications for more information 4 5 2 Attaching Nanomovers to Stages Proper connection of a Nanomover to its stage is important for obtaining high resolution movement The mounting barrel of the Nanomover is a standard metric size designed for mounting in a 10 mm diameter socket within a 10 mm thick block High quality translation stages should be used to avoid degraded performance To attach a Nanomover to a stage first retract the micrometer shaft using the manual movement knob leaving approximately 1 5 mm of the shaft exposed It is important that about 1 5 mm of shaft is exposed because the synchronization of position and micrometer shaft displacement registers expect this length Remove the protective cap The Nanomover can now be inserted in the mounting socket of the translation stage The mounting nut should be screwed onto the shaft to hold the Nanomover in place To further ensure against mechanical sl
18. Retrieves the position value for Nanomover 2 If the position value is 2 43325 millimeters the interface card will respond with the ASCII string 2 2 43325 CRLF RRES lt mtr gt Command read system resolution Parameters mtr Nanomover Number 1 through 16 Description Returns the system resolution for Motor in the currently selected units Example RRES 1 Retrieves the system resolution value for Nanomover 1 A standard Nanomover has a default resolution of 10 nm If the units are millimeters the interface card will respond with the ASCII string 1 0 00001 CRLF MELLES GRIOT 87 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II RRINTLK lt mtr gt Command Release reset interlock Parameters mtr Nanomover Number 1 through 16 Description Resets the reset interlock for the specified Nanomover The reset interlock is released as part of the boot procedure for the GPIB RS 232C interface card so the user should not need to use this functionality Example RRINTLK 2 Releases the reset interlock for Nanomover 2 RS lt mtr gt Command Read status Parameters mtr Nanomover Number 1 through 16 Description Read status of the specified Nanomover One of the following status values will be returned LL The left retracted hardware limit switch is active RL The right extended hardware limit switch is active
19. The Nanomover does not move as a result of this command only the internal position in the Z8 microcontroller changes Any relationship to a previously measured as a limit switch etc must be maintained by the host application If the motor is currently moving this function will wait for it to stop before proceeding MELLES GRIOT 129 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT Example nl write position 5 dPosition Returns O if operation successful non 0 if operation unsuccessful nl write units mtr lt cpUnits gt Command Parameters Description Example nl write vel Command Parameters Description Example Set units lt mtr gt Nanomover number 1 through 16 lt cpUnits gt Pointer to a string designating the desired units Sets units type for a motor using the pre defined units string in cpUnits The contents pointed to by cpUnits are not changed The following strings will represent the units CM Centimeters MM Millimeters MI Microns NM Nanometers P Inches ML Mils UI Microinches nl write units 4 MM Returns O if operation successful non 0 if operation unsuccessful lt mtr gt lt ramp gt lt dVelocity gt Set velocity lt mtr gt Nanomover number 1 through 16 ramp Acceleration velocity ramp number 1 through
20. WILT WAI RDIO RRINTLK WAR WP DENCC REBP RS WB WSCUR DSTP REBPE RSCUR WBPE WSTP LF RENCC RSTENC WCURE WU MA RENCE RSTP WEBP WUSTP MON RES RU WEBPE WV MR RGAIN RUSTP WENCC PA RHCUR RV WENCE RA RLIME RVER WGAIN RAL RLM S WHCUR 6 1 4 Interface Status Registers Standard Event Status Register SESR Shows eight types of events that can occur within the Nanomotion II system Use the ESR query to read the SESR register Reading the register clears the bits of the register so that the register can accumulate information about new events Bits y 6 5 4 9 2 1 0 Meanings PON URQ CME EXE DDE QYE RQC OPC PON Power On Shows that the Nanomotion II system was powered on URQ User Request Shows that a local control was pressed the Joystick CME Command Error Shows that an error occurred while the system was parsing a command EXE Execution Error Shows that the system detected an error while executing a command 68 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual DDE Device Error Shows that a device Nanomotion hardware error occurred QYE Query Error Not Used RQC Request Control Not Used OPC Operation Shows that the operation is complete Complete Status Byte Register SBR The SBR shows whether output is available in the Output Queue whether the Nanomotion II system is requesting serv
21. above the user can change the GPIB address of their unit When the VI is started it will check for multiple axes and will shade out axes it does not find as shown above NOTE if tbe IEEE cbassis does not bave tbe address 300 on tbe motor control board tbe VI may not find any axes File Options allows changes final motor position etc to be saved or retrieved in a unique file Park will either park or unpark all motors Edit Axis brings up another screen see Figure 5 7 where additional configuration of the motor can be made Quit will stop running the VI 62 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual gt MG Nanomotion Il Motor Parameters vi Motor Data Ass Nane mm Motor ff Base Velocity X 0 125000 Position 7908160 Unis mm Ramp Corner Points Ramp 1 Ramp 3 Ramp 4 Acceleration 0 000000 2 500000 0 000000 Velocity 25 000000 0 000000 0 000000 Absolute Stops Let Sop 2330 Pigh Stop 2500399 Lost Motion Compensation Direction Length um Minus Melles Griot Y E Nanomotion Il System Figure 5 7 Edit Axis screen CAUTION There are no safeguards in these drivers to keep you from putting in numbers that will not work Numbers out of range should not damage the Nanomotion II system unless they are used repeatedly Please refer to this man
22. an ASCII text file called READ ME on the release disk A complete set of MS DOS libraries is provided which conforms to the Microsoft defined models The standard libraries have the naming convention XMSCNANO LIB where X indicates the memory model 102 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual The supplied libraries are SMSCNANO LIB Small model library MSCNANO LIB Medium model library CMSCNANO LIB Compact model library LMSCNANO LIB Large model library HMSCNANO LIB Huge model library There is one DLL library and a static import library The DLL must be located in your Windows directory or in the directory with your executable program at run time The import library can be linked with your executable program to make accesses to the DLL easier to program refer to the Microsoft compiler documentation for more information on using dynamic link libraries There is also one header file NANOLIB H which should be included whenever the Nanomotion II libraries are used This header file contains Microsoft compatible prototyping statements for all the Nanomotion II library commands It also contains define statements for commonly used Nanomotion II constants Demonstration Program The release diskette s contain a demonstration program that uses the Nanomotion II C library NANODEMO C C Source File This file contai
23. applications should use the nl read ii dio function Example nl read joysticks 2 upJoyvalue Returns the current joystick value for motor 2 in the location pointed to by upJoyvalue Note There is only one joystick port shared by motors 1 amp 2 etc Calling tbis function witb eitber of tbe motors for a specific board will return tbe data from tbe same dio port nl read limit switches enabled lt mtr gt lt npEnabled gt Command Read limit switch status Parameters mtr Nanomover number 1 through 16 npEnabled Pointer to an integer variable for the data return Description Reads whether or not the limit switches are enabled If the motor is currently moving this function will wait for it to stop before proceeding MELLES GRIOT fae Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Example nl read limit switches enabled 1 npEnabled Returns the limits active value in the location pointed to by npEnabled Returns 00 if neither limit is enabled Returns 10 if only minimum limit is enabled Returns 01 if only maximum limit is enabled Returns 11 if both limits are enabled nl read Imc lt mtr gt lt npLmcValue gt Command Parameters Description Example Read lost motion compensation value lt mtr gt Nanomover number 1 through 16 lt npLmcValue gt Pointer to an integer variable for the
24. average conditions and should be adequate for most applications These parameters and their default values are listed on the following page 18 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Parameter Default Value Base Velocity 0625 mm sec Units to Move T 1 0 mm Acceleration 500 mm sec Velocity 2 0 mm sec Absolute Right Stop 25 4 mm Absolute Left Stop 0 0 mm Lost Motion Compensation Enabled at 0 05 mm Table 2 3 Nanomotion II Default Parameters MELLES GRIOT 19 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT This page intensionally left blank 20 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 3 Specifications Nanomover Motor Specifications Characteristic 11 NCM 001 11 NCM 005 11 NCM 007 Tip flat flat spherical Resolution 10 nm Bidirectional Repeatability 100 nm Absolute Accuracy 1 um Calibration Standard H P 5528A laser interferometer to NBS reference Maximum Speed 2 5 mm sec Travel Range 25 mm Maximum Load 10 kg mass 20 kg mass 10 kg mass Maximum Acceleration 1250 mm sec Standard Cable Length 3m Maximum Cable Length 35m Stepping Current 0 9A 1 2A 0 9A Holding Current 0 45A 0 6A 0 45A Steps per Revolution 400 Voltage Required 4 Vdc 78 N
25. can be plugged in and used to check movement of the motors and or stages 5 Install a 9 pin serial cable not included 6 No software is loaded for the serial system Use something like Windows hyper terminal software to check the setup of the system Use the MR command see Chapter 6 Software Commands to move the motors 7 If you need to hook up a multiple axis system contact your local Melles Griot technical support person for detailed instructions 4 4 3 Configuring the IEEE 488 2 RS 232C Interface Board There are three dipswitches on this board that may need to be changed for your configuration see Figure 4 2 for location of these switches To access these dipswitches loosen the two screws that hold the IEEE board in place and pull the board out using even pressure on both sides It is a good idea to record any changes made to these dipswitches for future reference and to avoid handling the board any more than is necessary After making 36 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual changes to the dipswitches insert the board into the slot ensuring that it is seated correctly The system can then be connected via the IEEE 488 or Serial buses WARNING Be sure to wear a grounding strap or take appropriate precautions to avoid damaging the Nanomotion II boards with static electricity When removing or replacing boards in
26. controller Chapter 4 Installation and Setup describes how to configure the Nanomotion II system for operation and how to install the Nanomover motors Chapter 5 Operating the Nanomotion II System shows how to operate the controller using the various software programs included with the system and Chapter 6 Programming Nanomotion II gives a complete description of commands and syntax provided with the system Chapter 7 Application Notes provides information about using the system in a real world environment and finally appendices provide useful reference material For best results read the entire manual before attempting to use Nanomotion II At a minimum first time users should read the following chapters Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Chapter 2 Introduction to Nanomotion II Chapter 4 Installation and Setup Chapter 5 Operating Nanomotion II 1 4 2 Conventions Used in the Manual In order to help you understand the material presented in this manual several text formats are used to highlight important information The following examples demonstrate these text formatting conventions Example 1 WARNING Warnings are intended to alert the user to an important consideration about the operation or safe use of Nanomotion II Example 2 References to other parts of the manual such as Operating Nan
27. end plate will void the product warranty 4 2 5 Vibration Isolation The use of a vibration isolation workstation is strongly recommended to fully exploit the capabilities of Nanomotion II 4 2 6 Lubrication The Nanomover uses special lubrication that must be kept free of particulates to ensure that the high precision micrometer screw operates without errors Any particles of lint or dust that become trapped in the screw mechanism will cause errors or permanent damage During the first 100 hours of use some lubrication may collect on the micrometer shaft This excess lubrication should be carefully removed with a lint free material such as lens tissue 4 2 7 Temperature Nanomovers must be kept at a stable temperature when being operated Differences in temperature can cause changes in the length of metal parts in the positioning system affecting system performance While Nanomover is designed so that thermal expansion of only the relatively short micrometer shaft can affect the system precision many of the translation stages and other components often used with the Nanomotion II system are constructed of metal and are therefore subject to thermal expansion of an indeterminate amount The following table summarizes the thermal expansion of metals commonly used in optical mounting accessories Metal Expansion per C of 25 mm of Metal Stainless Steel 452 nm Aluminum 578 nm Brass 470 nm 32 Artisan Technology Group Qualit
28. is held high after movement is completed before it is reduced to the holding current level A non zero position lock time is necessary to control the inertia contained within a decelerating system In other words for the motor to stop quickly and still maintain position it must have as much current available as possible Therefore the current is maintained at the stepping 14 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual current level until the motor can lock itself into position The current is then reduced to the holding level Position lock time can range between 0 and 255 msec Generally a value of around 10 msec is adequate for the Nanomover Longer times should be used for heavy loads or loads with high inertia 2 7 9 Lost Motion Compensation LMC In any mechanical system there are small clearances or tolerances needed for parts to move These small clearances combine and manifest themselves as a dead space when a small move is attempted or when the direction of motion is reversed Another feature of mechanical systems is stiction which is the static friction that must be overcome to start a movement Lost motion is defined as requested movement that does not result in mechanical motion due to dead space or stiction effects When the dead space has been removed from the system and enough force has been developed to overcome st
29. kg load 1 5 kg load calibrated load 2 3 4 5 6 Velocity in mm sec Figure A 2 Standard curves for motor velocity vs acceleration MELLES GRIOT 139 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Appendix 1300 1200 1100 1000 20 kg load 900 17 kg load 800 14 kg load 700 10 kg load 600 g ao 500 Acceleration in mm sec2 400 300 200 100 0 0 5 1 0 1 5 2 0 2 5 3 0 Velocity in mm sec Figure A 3 Velocity vs acceleration for1 1 NCM 005 high torque motors 140 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Index Absolute Position 11 17 Acceleration and Deceleration Ramps 12 Accuracy 11 21 22 Axes Configuring Additional 42 Base Velocity 14 Baud Rate 36 38 BREAK 76 Bus address dip switch 39 C7 0 Commands 102 Cables 47 Certification Graph 135 Chassis Setup 33 Command Details 67 101 Command Set for IEEE 488 2 RS 232C 67 Components Controller Chassis 8 IBM ISA Interface Card 8 IEEE RS 232 Interface Card 8 Nanomover Motors 8 PC Link Board 8 Configuring Additional Axes 42 Connecting a Joystick 34 42 Connectors 22 28 contact switch 26 Controller Chassis Specifications 22 Controls 22 28 Conventions 3 Copyright 1 Customer Service 4 Data Bits 36 Default Movement Parameters 18 Defi
30. limits are user set and mistakes can be made by inexperienced operators While the Nanomovers themselves cannot be damaged if driven beyond the travel range limit switches are recommended to protect the delicate and expensive equipment devices often used with Nanomotion II Nanomotion II can support up to two limit switches left and right limits for each Nanomover The two most common types of limit switch are contact and opto interrupt Both are supported in the normally open configuration i e the switch is closed to complete the circuit and prevent further travel 24 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 5V Microcontroller chip 28 Right Limit Left Limit Ground Nanomotion II Controller Chassis Figure 3 3 The limit switch interface one channel shown Left Limit Ground 5V Right Limit Figure 3 4 Pin assignments for tbe limit switch interface MELLES GRIOT 25 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Specifications 5 V not used Contact Switch Right Limit normally open or o Left Limit Ground Signal Name Limit Hardware Figure 3 5 Connections for a contact switch Right Limit or Left Limit 5V Series Resistor user supplied Ground Signal Name Opto interrupt Swi
31. seated correctly Screw the retaining pins onto the posts Connect the cable to the next Controller Chassis expansion board for multiaxis operation Master Slave Master Slave type A SIP resistor type B SIP resistor Jumper J1 4 places 3 places m APPUED 9PLOSION INC P N TESKA Eis mimi TT TITLE type C SIP resistor 2 places Figure amp 7 Expansion Board and Jumper Settings WARNING Be sure to wear a grounding strap or take appropriate precautions to avoid damaging the Nanomotion II boards with static electricity When removing or replacing boards in the Controller Chassis be sure that the power is turned off Removing or replacing boards with power on will cause them to be damaged 44 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Terminating Resistors If more than four axes will be used at one GPIB address the terminating resistors will need to be removed from all PC bus boards expansion boards except the last one in the chain When removing the terminating resistors designated as Resistor SIP Types A B and C in Figure 4 6 it is essential that you keep the resistors together by type as they will be required if the controller will ever be used alone or at the end of a chain Jumper Settings To replace the resistors make sure that pin 1 on the SIP goes to the
32. system 4 3 4 Setting the PC Addresses When multiple chassis are daisy chained together each board must be assigned a unique address so that information can be exchanged without becoming lost or misdirected The addresses are assigned using a series of 8 DIP switches together referred to as SW1 located on the back of the Controller Chassis Use the table below to determine the correct SW1 switch settings for your Nanomotion II board s Each board can control two Nanomovers that are referenced in the software by their motor numbers It is recommended that the IEEE chassis remain at address 300 and that all additional units be in contiguous addresses above it 34 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual NANOMOTION Il BOARD ADDRESSES Motor Switch Numbers Address Setting LER NU REN E 3 1and 2 300 EUNETAN LEE EDU EON NN 3 and 4 304 LELELLED B RBRERR SS 5 and 6 308 AERE A 2 3 4 5 8 7 B 7 and 8 30C ERE 32 73 4 5 6 3 8 9 and 10 310 ALLEE iMacs TRENT SY 11 and 12 314 LEREETAD TEREPRE 13 and 14 318 Pe a n Te E Sea TS 15 and 16 31C a Figure 4 1 Motor Board Addresses 4 4 Installing the IEEE 488 2 RS 232C System 4 4 1 IEEE 488 2 GPIB System 1 Read the general precautions covered in section 4 2 2 If you are installing more than one chassis it is recommended that you get each chassis to work as
33. the Nanomover the interface card will respond with the ASCII string 3 3 CRLF RLM lt mtr gt Command Read lost motion compensation Parameters mtr Nanomover Number 1 through 16 Description Read lost motion value Reads the amount of LMC currently enabled for the specified Nanomover The value can be in the range of 10 A lost motion value of zero indicates that LMC is disabled Any other value indicates the amount and direction of LMC Example RLM 1 The value of lost motion for Nanomover 1 is retrieved If the LMC value is 2 the interface card will respond with the ASCII string 1 2 CRLF 86 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual RLT mtr Command Read position lock time Parameters mtr Nanomover Number 1 through 16 Description Read position lock time Reads the length of time to lock the Nanomover rotor into position The units are in milliseconds See the library function description for more information Example RLM 3 Retrieves the position lock time value for Nanomover 3 If the lock time value is 100 milliseconds the interface card will respond with the ASCII string 3 100 CRLF RP lt mtr gt Command Read position Parameters mtr Nanomover Number 1 through 16 Description Reads the position of the specified Nanomover in the current units Example RP 2
34. the Controller Chassis be sure that the power is turned off Removing or replacing boards with power on will cause them to be damaged Record your settings here if different from factory settings Switch 1 Switch 2 Switch 3 Serial GPIB Joystick Switch Settings 3456 3456 23456 On APPLILD toS se EE ser GEES D Figure 42 IEEE board MELLES GRIOT 37 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup Switch S1 Serial Configuration Factory Settings Figure 4 3 Serial Configuration Switch Pint Pin2 Pin3 Baud Rate Off Off Off 19200 Factory setting On Off Off 9600 Off On Off 4800 On On Off 2400 Off Off On 1200 On Off On 600 Off On On 300 On On On 110 Pin 4 Handshaking Off Disabled Factory setting On Enabled Pin 5 Stop Bits Off Two On One Factory setting Pin6 Pin7 Parity Off Off None Factory setting On Off Odd On On Even Pin 8 Data Bits Off Eight Factory Setting On Seven 38 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Switch S2 GPIB Address Factory Settings Figure 4 4 GPIB Address Switch This switch uses binary code to determine the GPIB Address for the device Bit 8 is the most significant and bit 1 is the le
35. to serve as a guide to achieving nanometer size movements 7 1 Making High Repeatability Measurements The key to making movements with high repeatability is minimize the number of variables that are changing It is only when a known controlled set of operating conditions is used that accurate repeatable movements be made with any degree of consistency The most important of these operating conditions is the temperature of the Nanomover which is affected by both the ambient temperature and the heat generated by the Nanomover itself Minimizing the effects of ambient temperature is discussed in Dealing with Temperature Variations Heat generated by the Nanomover can be considered and its effects reduced with careful consideration The most obvious source of heat is the motor Because of the difference between stepping and holding currents the motor will generate more heat when moving than when stationary Further the motor will generate different amounts of heat depending on the velocity at which it is moving A small portion of the motor heat will be conducted through the Nanomover housing to the leadscrew causing positional errors MELLES GRIOT 131 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Application Notes Another important but less obvious source of heat is the friction between the nut and the leadscrew The amount of heat generated is a function of speed
36. use interface NOTE To use the Nanomotion II Control Program your IBM compatible PC must be equipped with a PC Link card the controller must have an installed IBM interface board 11 NIB 001 and the IEEE 488 2 RS 232C interface board if present must be removed 5 1 1 Operating Conventions The Nanomotion II Control Windows Program follows most of the standard conventions for Windows applications It uses a menu driven interface and windows to provide information and access to the system Specific information about the control program is later in this section below are some general operating conventions OK vs Cancel Two buttons can be used to close most windows OK is used to accept any modifications that you have made to the parameters listed in that window Cancel is used to close the window and revert to the parameter values that existed when the window was opened Escape key The escape key will close the open window reverting to the parameter values that existed when the window was opened similar to the Cancel button Standard Filename Extensions Nanomotion II relies on several standard extensions to identify files MELLES GRIOT 49 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System File Extension File Description aXs Axis Configuration File ini Initialization File exe Executable File DLL Dynam
37. wafers Only one direction of LMC is acceptable in these cases in order to avoid damaging the surface If LMC is enabled undershoot at the absolute left stop and overshoot at the absolute right stop may occur during the LMC move The maximum MELLES GRIOT 15 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT magnitude of this under overshoot is the LMC amount Usually this will not present any problem although it may need to be taken into account when setting absolute stops NOTE Each unit of LMC corresponds to a final move of 10 microns Values between 0 and 5 are recommended for most applications 2 7 10 Stopping Movement When a Nanomover executes a requested move it slows down using deceleration ramps and concludes movement with a Lost Motion Compensation move if LMC has been enabled However there are other circumstances under which a Nanomover may stop moving and the details of these need to be considered If a Nanomover reaches an Absolute Stop then the Nanomover will come to a halt using the specified deceleration ramps and LMC Position memory is maintained and no lost motion i e backlash is accumulated Depending on the sign of the LMC a Nanomover may momentarily move beyond an Absolute Stop This is the only circumstance under which an Absolute Stop position may be exceeded If a Nanomover reaches a limit switch the Na
38. 0 MELLES GRIOT 93 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II This command will set the base velocity for Nanomover 1 to 0 100 units per second If the current units are millimeters the base velocity is set to 0 100 mm per second WBPE lt mtr gt lt on off gt Command Enable backporch Parameters mtr Nanomover Number 1 through 16 on off Enable string ON or OFF Description Sets the whether the backporch function is enabled ON or disabled OFF the default status is enabled for the specified Nanomover The final motor position for a move is the same whether the backporch is enabled or disabled The backporch is a short move at the base velocity at the end of each commanded move and is a normal feature of Nanomotion II most system users should have no reason to change it Example WBPE 2 ON Enables the backporch functionality for Nanomover 2 WCURE lt mtr gt lt on off gt Command Enable motor current Parameters lt mtr gt Nanomover Number 1 through 16 on off Enable string ON or OFF Description Enables ON or Disables OFF the motor current for the specified Nanomover the default status is enabled The current is enabled as part of the GPIB RS232 C interface board boot process Most users should have no reason to turn the motor current on or off th
39. 8 speed off on Small Step Big Step bits 3 5 size bits 6 8 size on off Step bits 3 5 speed Repeat bits 3 5 speed bits 6 8 size bits 6 8 size off off Step bits 3 5 speed Jog bits 3 5 speed bits 6 8 size bits 6 8 size Bit3 Bit4 Bit 5 Step Size mm Speed mm second on on on 0 00001 0 0625 off on on 0 0001 0 1 on off on 0 001 0 25 off off on 0 01 0 5 on on off 0 1 1 0 off on off 1 0 1 5 on off off 2 0 2 0 off off off 5 0 2 5 40 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Bit6 Bit7 Bit 8 Step Size mm Speed mm sec on on on 0 00001 0 0625 off on on 0 0001 0 1 on off on 0 001 0 25 off off on 0 01 0 5 on on off 0 1 1 0 off on off 1 0 1 5 on off off 2 0 2 0 off off off 5 0 2 5 NOTE All other jumpers and switches located on tbe IEEE board are set at the factory and are not meant to be changed by tbe customer If for some reason these bave been changed please contact Melles Griot technical support for the correct settings 4 4 4 EEE and RS 232 System Software Installation The Nanomotion II IEEE RS 232C system has a microprocessor included on the board that has the ability to accept commands sent over the IEEE and RS 232 interfaces See Chapter 6 Software Commands for a list of these commands There is no additional software required LabVIEW Drivers The following files will be included on the disket
40. Address Setting 1 1 and 2 300 3 and 4 304 5 and 6 308 7 and 8 30C 11 and 12 314 13 and 14 318 15 and 16 31C 2 3 4 5 9 and 10 310 6 iy 8 Figure 5 4 Set base address window Base Address Determines the address that the PC will use to communicate with the installed PC Link board Board Addresses Determines the addresses that the PC will use to communicate with each of the installed Nanomovers MELLES GRIOT 59 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System Units Window Units Description Name m E Display Precision o Units Per Nanomotion Il mm 1000000 00000 Example 1 Nanomotion ll mm 1000000 nm Delete Figure 5 5 Units Window The Units Window permits custom user created measurement units to be entered into The Nanomotion II control program Custom units can be useful for applications with unique requirements For example a Nanomover that rotates a cylinder might be better described in terms of radians where the exact amount of movement per step is determined and entered into the program The standard measurement units such as mm millimeters cannot be modified 5 2 Operating with LabVIEW Drivers NOTE To operate witb LabVIEW drivers tbe controller must be equipped with a IEEE 488 2 RS 232C expansion board that bas been properly configured 5 2 1 List of Sub Virtual Instru
41. B mtr parks only the specified Nanomover In general it is a good practice to always park the Nanomovers before turning the system off This will avoid the inconvenience of having to reset the synchronization on power up The current positions and the park offset information are stored on the interface card in EEPROM and will be retained when power is removed from the system If a motor is specified which is currently parked this command will be ignored Example P 2 Parks Nanomover 2 The current position and the offset necessary to unpark the Nanomover will be stored on the interface card PA MELLES GRIOT 79 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Parks all Nanomovers Again the information necessary to unpark each Nanomover is stored on the interface card RA lt ramp gt lt mtr gt Command Read acceleration Parameters ramp Ramp Segment Number 1 through 4 mtr Nanomover Number 1 through 16 Description Reads the acceleration value in the current units per second per second for the specified velocity acceleration ramp segment for the specified Nanomover The ramp parameter specifies ramp segment 1 2 3 or 4 Example RA1 2 Retrieves the acceleration value for velocity acceleration ramp 1 for Nanomover 2 If the acceleration value is 100 0 mm s s the interface card will respond with the ASC
42. CSE2 expansion cables are located on the bottom bay A cable for connecting two chassis together should be included with any chassis system with these connectors Cables can be attached to either connector on this board in any order The cable is a standard SCSE2 type available from computer suppliers Detailed instructions on connecting the expansion chassis with the IEEE system is found in Chapter 4 Installation and Setup These connectors are not present on the 11 NCS 101 IEEE unless the 11 NIB 001 expansion card has been ordered Joystick main chassis The 9 pin connector in the upper left hand corner of the back panel is used to plug in the 11 NCA 101 joystick On IBM systems the software can be modified to use the joystick instead of hot keys on the PC keyboard On IEEE systems the joystick can operate the system without being connected to a host computer Motor connectors main chassis Nanomover motors are plugged into the two connectors located directly below the joystick connector The connector on the left is motor 41 on the first chassis and the connector on the right is motor 2 On succeeding chassis in a daisy chain the left connector is always the lowest numbered motor 3 5 7 etc and the right connector is the higher numbered motor 4 6 8 etc MELLES GRIOT zi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Specifications Power connector main chassi
43. Command Get motor status Parameters mtr Nanomover number 1 through 16 Description Returns the current status word for the specified motor Maps internally in the library to nl read status but does not require the user to supply a pointer to a variable buffer See the nl read status function for descriptions of the status word Example nl get status 3 Returns the current status for the Nanomover If there is an error the function returns OxFF nl get vel lt mtr gt lt ramp gt Command Get ramp velocity Parameters mtr Nanomover number 1 through 16 ramp Acceleration velocity ramp segment 1 through 4 Description Returns the velocity for the specified ramp for the specified motor Maps internally in the library to nl read velocity but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get vel 11 2 Returns the velocity value of the second ramp for motor 11 If there is an error the function returns 1 0 nl init Command Parameters None Description Initializes all arrays and variables used internally by the Nanomotion II libraries This should be called near the beginning of your program as all other Nanomotion II functions assume correct variables It MUST be called prior to using any of the routines or moving any motors and MUST be called only once before calling nl e
44. Direction of Motion The Nanomover is capable of moving in two directions as follows a positive motion indicates an extension of the micrometer shaft a negative motion indicates a retraction of the shaft In addition for the purposes of this manual refers to a movement to the right on the travel line and refers to a movement to the left on the travel line MELLES GRIOT 11 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT 2 7 4 Velocity Profile The velocity profile describes the relationship between speed and position as the Nanomover is making a move The profile is broken up into four parts base velocity acceleration and deceleration slew velocity and position lock time In general a Nanomover starts at a base velocity accelerates to the slew velocity using one or more acceleration ramps decelerates back to the base velocity and then stops 2 7 5 Acceleration and Deceleration Ramps The Nanomover can operate at speeds up to 2 5 mm sec 2 000 full motor steps per second but it cannot start or stop while moving at this high rate of speed Instead it must accelerate from an initial velocity until it reaches the specified slew velocity and then decelerate to a final velocity before stopping The Nanomotion II system divides the acceleration and deceleration ramps into four individually controllable segments
45. II string 2 100 00000 CR LF RAL lt mtr gt Command Read absolute left stop Parameters mtr Nanomover Number 1 through 16 Description Reads the position of the absolute left stop for the specified Nanomover in the current units Example RAL 1 Retrieves the absolute left stop position for Nanomover 1 If the absolute left stop value is 0 0 the interface card will respond with the ASCII string 1 0 00000 CRLF RAR lt mtr gt Command Read absolute right stop Parameters mtr Nanomover Number 1 through 16 Description Reads the position of the absolute right stop for the specified Nanomover in the current units Example RAR 1 80 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Retrieves the absolute right stop position for Nanomover 1 If the absolute right stop value is 0 0 the interface card will respond with the ASCII string 1 0 00000 CRLF RB lt mtr gt Command Read base velocity Parameters mtr Nanomover Number 1 through 16 Description Reads the base velocity for the specified Nanomover in the current units per second Example RB 1 Retrieves the base velocity value for Nanomover 1 If the base velocity value is 0 125 mm second and the units are millimeters the interface card will respond with the ASCII string 1 0 12500 CRLF RBPE lt mtr gt Command Read backporch enabled Parame
46. a single system prior to setting up as a multiple axis system 3 The default GPIB address is 5 If this must be changed refer to section 4 4 3 for details on changing the GPIB address 4 Hook up power hook Nanomover motor cable to the motor connec tions on the back If you have a joystick this can be plugged in and used to check movement of the motors and or stages 5 Install a GPIB cable not included MELLES GRIOT 35 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup 6 Install the LabVIEW software see section 5 2 or use a dialog program such as National Instrument s IBIC to check the setup of the system Use the MR command see Chapter 6 Software Commands to move the motors 7 If additional axes need to be used refer to section 4 4 7 for detailed instructions 4 4 RS 232C Serial System 1 Read the general precautions covered in section 4 2 2 If you are installing more than one chassis it is recommended that you get each chassis to work as a single system prior to setting up as a multiple axis system 3 The default serial interface is shown below If this must be changed refer to section 4 4 3 for details on changing it Baud Rate 19200 Handshaking Disabled Stop Bits 1 Parity None Data Bits 8 4 Hook up power hook Nanomover motor cable to the motor connections on the back If you have a joystick this
47. a variable buffer The version is expressed as an integer number word That is the upper byte of the version word is the most significant digit the lower byte is the least significant digit For example version number 0x0300 would be interpreted as 3 0 0x0301 would be 3 1 etc If the motor is currently moving this function will wait for it to stop before proceeding Example nl get eprom version 3 Returns an integer firmware version for the Z8 microcontroller If there is an error the function returns 1 nl get initialized Command Get initialization call status Parameters None Description Returns the flag whether nl init has been called or not so programs at runtime can know when not to call it again Maps internally in the library to nl read initialized but does not require the user to supply a pointer to a variable buffer Example nl get initialized Returns 1 if nl init has been already called Returns 0 if nl init has not been called If there is an error the function returns 1 nl get joysticks mtr Command Get joystick value Parameters mtr Nanomover number 1 through 16 Description Returns the input from the Nanomotion I joystick port for the specified Nanomover Maps internally in the library to nl read joysticks but does not require the user to supply a pointer to a variable buffer This function only works on Nanomotion I hardware Nanomotion II applications should use the nl read
48. allowed to temperature stabilize for at least one hour To temperature stabilize a Nanomover must be unparked or moved and then maintained in that position because current is present in a Nanomover only after it has been unparked or moved MELLES GRIOT 133 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Application Notes This page intensionally left blank 134 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Appendix A 1 Certification and Repeatability Procedure The performance of each Nanomover is tested and certified with a Hewlett Packard laser interferometer model 55284 before it leaves the factory Each Nanomover is certified to have an accuracy of 1 micron and a bidirectional repeatability of better than 100 nanometers Included with each unit is a certification graphs showing its accuracy and repeatability over the full travel range A test program directs the system through a standard test course which is monitored by the laser interferometer Results from the Nanomotion II system and the interferometer are then used to calculate accuracy and repeatability The following algorithm is used to generate the accuracy and repeatability graphs For each 1 mm in position along the travel line After approaching the current position with a positive move read the current actual position locatio
49. and load This nut leadscrew heat and its resulting temperature change will directly change the length of the leadscrew The amount of heat generated by Nanomover motion is difficult to determine But the effects of motor heat and nut leadscrew friction can be minimized by simply letting the heat dissipate Waiting approximately 20 seconds between quick short moves 1 second of movement or less will allow the Nanomover to dissipate the extra heat and reach a constant thermal point in which the effects of motor heat and nut leadscrew friction are negligible For longer movements it may be necessary to wait for a longer period of time Note that both of these internal heating effects are quite small in absolute terms perhaps producing 250nm of error under typical conditions Lost Motion Compensation keeps the positioners themselves constant and will even remove many lost motion errors in the stages used Another important but often neglected source of error that can be easily removed is strain relief in the Nanomover cables The cables should be strain relieved away from the Nanomover so that any disturbances in the cable will not translate to measurement or positioning errors The cables may be strain relieved by fixing them to a solid surface 7 2 Dealing with Temperature Variations Thermal expansion due to slight temperature variations can significantly affect the resolution of high resolution mechanical systems It is physically impo
50. ano ii dio lt mtr gt Command Get DIO input Parameters mtr Nanomover number 1 through 16 Description Returns the input from the Nanomotion II DIO port for the specified Nanomover Maps internally in the library to nl read nano ii dio but does not require the user to supply a pointer to a variable buffer This function only works on Nanomotion II hardware Nanomotion I applications should use the nl read joysticks function If the motor is currently moving this function will wait for it to stop before proceeding Note There is only one joystick port shared by motors 1 amp 2 etc Calling tbis function witb eitber of tbe motors for a specific board will return tbe data from tbe same dio port Example nl get nano ii dio 4 Returns the dio value from motor 4 If there is an error the function returns OxFF nl get position lt mtr gt Command Get current position Parameters mtr Nanomover number 1 through 16 Description Returns the current position for the specified motor Maps internally in the library to nl read position but does not require the user to supply a pointer to a variable buffer Example nl get position 4 Returns the current position of the motor 4 If there is an error the function returns 1 0 MELLES GRIOT b Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT nl get status mtr
51. ar any random residuals thereby resetting the system to its default values It is good programming practice to use timeouts and an error handler when sending or receiving information A timeout of a few hundred milliseconds will prevent the computer from locking up if the serial port becomes incommunicative while the error handler can indicate where any problems occur 64 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 5 4 1 Software Example for Serial Interface The following is an example of programming for the serial port This was developed using a communications library called ENCOM which is a shareware product include lt stdlib h gt include lt stdio h gt include encom h PORT Port RO kk kk kk kk kk ko IC E KK KK eK CK IO ek k KC IC IO IO k joke je ke ek KKKKKK j BK RIK KK kkk k kk k kkk k kk kk Ck A kk k kk k ko kk k k kk k OK KKKKKK void SendString char String int c ine ap int i 0 while String I char NULL if a com getc amp Port 1 putchar a c int String i putchar com putc c amp Port Ltt void main char outi 50 Constant Declarations int port COM2 int end flag 0 c echo 0 int motor 1 int lme 0 MELLES GRIOT 65 Artisan Technology Group Quality Instrumentation
52. arameters mtr Nanomover number 1 through 16 Description Resets nMotor to the default motion profile values as specified for the nl init function The units will be reset to MM Note The position is not affected Neither the physical position of the Nanomover nor the position registers in tbe Z8 microcontroller are changed by this function The nl_write_position function should be used if a position reset is desired The function nl_init calls nl_reset for each motor so most programs will not need to use nl_reset The nl_reset function is included only to provide a quick method to return the accelerations velocities lock times etc to default values If the motor is currently moving this function will wait for it to stop before proceeding Example nl reset 5 Returns O if operation is successful non O0 if operation unsuccessful nl restore cfg cpPathname Command Restore configuration Parameters lt cpPathname gt Pointer to string containing the path and filename of the file to receive the configuration data Description A configuration array is used by the Nanomotion II library to contain information about the park status of a motor The configuration array must be updated prior to MELLES GRIOT 123 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II unparking the motors so that the Nanomotion II library rou
53. art Windows then under the File menu select Run and select your floppy disk drive Then select Setup Choose a location to install the software and verify that a program group entitled Nanomotion II is created This completes the software installation Test the software by double clicking on the Nanomotion II icon The Nanomotion II welcome window should appear DOS Systems If you use the DOS operating system insert the disk labeled Nanomotion II Software into the floppy disk drive Type a setup and respond to the prompts to select an installation path for the software You will be prompted throughout the installation process MELLES GRIOT 55 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup Installed Files The following files will be installed by either of the installation routines described above File Function nanomotn EXE Executable Nanomotion II Control Program nanomotn HLP Nanomotion II Help File nonomotn INI Initialization File demo AXS Example Axis File nanodll DLL nanodll lib Nanomotion II DLL for Windows Applications nanolib lib Nanomotion II Library File Nanolib H C Library Include Files LabVIEW Driver Files 4 3 3 Connecting a Joystick On IBM systems the software can be modified to use the joystick instead of the hot keys on the PC keyboard Note that a host computer must be used with the joystick on an IBM
54. ast significant Settings from 1 through 31 decimal are recognized The factory setting is 5 shown above SW1SW2 SW3 SW4 SW5 SW6 SW7 SW8 GPIB Address off on on on on on on on 1 on off on on on on on on 2 off off on on on on on on 3 on on off on on on on on 4 off on off on on on on on 5 on off off on on on on on 6 off off off on on on on on 7 on on on off on on on on 8 off on on off on on on on 9 on on on off on on on on 10 Switch S3 Joystick Switches The joystick operation allows movement via the x y control pad and extra movement when the control pad is used while the B button is pressed The movement achieved by operation of the control pad is configurable as is the response associated with pressing the B button Bits 1 2 cover the movement due to the x y control pad Bits 3 8 cover the parameters of the move and the B button response See section 4 4 6 about connecting the joystick MELLES GRIOT 39 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup Factory Settings Figure 4 5 Joystick Switches The factory setting sets the joystick to do a slow jog normally but a fast jog when the B button is depressed The speed for the slow jog is 1 0 mm sec and the speed for the fast jog is 2 5 mm sec Possible settings Bit1 Bit2 Control Pad Motion B Button Motion on on Slow Jog Fast Jog bits 3 5 speed bits 6
55. ations the power and flexibility of the Nanomotion II Control Program may not be appropriate Instead users may prefer to control the Nanomotion II system using a custom application Recognizing this need several programming options have been made available First users can use a compre hensive DLL dynamic link library to construct Windows based applications in nearly any Windows development environment Second an MS DOS based application can be created using C and a linkable library of Nanomotion II functions Third the system can be controlled with LabVIEW for Windows Note that the provided LabVIEW drivers will only work with the 11 NCS 101 IEEE system And finally the parameters that control movement can be accessed directly by users controlling the IEEE 488 2 or RS 232C port of their computer using the SCPIl compatible command set All of these options are explained in the sections that follow 6 1 IEEE 488 2 and RS 232C Commands 6 1 1 Available Commands Unique to IEEE 488 2 CLS IDN SRE ESE OPC STB ESE BORG TST ESR 6 1 2 Available Commands Unique to RS 232 BREAK MELLES GRIOT 67 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II 6 1 3 Commands Available to Both IEEE 488 2 amp RS 232C LOGE RAR RLT UA WLIME REM RB RP WA WLM RST RBPE RRES WAL
56. boards to communicate with other controller chassis and to control up to two additional Nanomovers Includes expansion cable for daisy chaining to other 11 NCS 101 chassis Installed in controller chassis interfaces chassis to a computer via a PC Link card Also used for daisy chaining controllers when more than two Nanomover motors are used Standard with 11 NCS 101 IBM and 11 NCS 101 Optional with 11 NCS 101 IEEE Installed in controller chassis interfaces chassis to a computer via the IEEE 488 2 or RS 232C port Included in 11 NCS 101 IEEE MELLES GRIOT 29 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup Name MG Part Number Description PC Link Card 11 NIB 005 For installation into IBM PC AT or later to interface to controller Includes software Standard with 11 NCS 101 IBM Optional with 11 NCS 101 IEEE Motor Control 11 NIB 007 Installed in all controller chassis Board contains Nanomover control electronics and amplifiers Power Cord Included with ac power cord for Nanomotion II 11 NCS 101 Controller Chassis 11 NCS 101 IBM 11 NCS 101 IEEE Expansion Cable Included with Connects Nanomotion Il controller 11 NCS 101 and chassis to expansion chassis 11 NIB 005 Nanomover 11 NCM 001 Motorized micrometer with standard standard specifications Nanomover 11 NCM 005 Motorized micrometer with high high torque torque specifi
57. brary version of this function uses a binary data CFG file The DLL version uses an ASCII INI file Example nl save cfg cpPathname Returns O if operation successful non 0 if operation unsuccessful Return Value 124 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual nl setbase lt uBaseAddress gt Command Set system I O base Parameters uBaseAddress The base address for first Nanomotion board Description Sets the base I O address for the Nanomotion system If a value other than the 0x300 default for PC systems is desired this function should be used prior to calling nl init Example nl setbase lt uBaseAddress gt Returns O if operation successful non 0 if operation unsuccessful nl stop lt mtr gt Command Stop motor s Parameters mtr Nanomover number 1 through 16 1 for all motors Description Stops one motor or all motors An nMotor value of 1 stops all motors If nMotor is 1 through 16 that specific motor is stopped Example nl stop 1 Returns O if operation successful non 0 if operation unsuccessful nl unpark mtr Command Unpark motor s Parameters mtr Nanomover number 1 through 16 1 for all motors Description If nMotor is 1 through 16 this function unparks that motor The function unparks all motors if nMotor is 1 All park information is stored i
58. cations Nanomover 11 NCM 007 Motorized micrometer with a spherical spherical tip tip for use with stages etc without ball bearing connections Nanomover 11 NCA 003 Three meter cable that extends the Extension Cable distance between Nanomover and controller chassis Joystick 11 NCA 101 Allows operation of motors by joystick control Does not require computer connection System Manual 22 MAN 101 Rev C This manual 30 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 4 2 General Precautions Each Nanomotion II system includes precision mechanical and electronic components that will have a useful life of many years Certain precautions must be observed to ensure that these components continue to operate according to the specifications 4 2 1 Power Supply The Nanomotion II Controller Chassis must be connected to a grounded power line Do not use an adapter plug designed to defeat the third grounded prong While the Controller Chassis contains electronics to protect it from power line surges it is recommended that the chassis not be connected on the same circuit breaker as any electrically noisy equipment WARNING Always unplug the power cord when servicing fuses in order to prevent accidental electric shock The chassis uses a universal input power supply that will accept 90 240 volts at 50 60 Hz 4 2 2 Electrical Safegua
59. cceleration value Parameters mtr Nanomover number 1 through 16 ramp Acceleration Velocity Ramp segment 1 through 4 Description Returns the acceleration value for the specified ramp for the Nanomover Maps internally in the library to nl read accel but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get accel 12 3 Returns the acceleration value for the third segment of the twelfth motor If there is an error the function returns 1 0 nl get base address Command Get current base address for the system Parameters None Description Returns the current base address for the system Maps internally in the library to nl read base address but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding 106 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Example nl get base address Returns the current system base address value If there is an error the function returns OxFFFF nl get bvel lt mtr gt Command Get base velocity Parameters mtr Nanomover number 1 through 16 Description Returns the base velocity for the Nanomover Maps internally in the library to nl read bvel but doe
60. ced It defines the beginning of the travel range It is also possible to reference all positions except for the absolute stops with respect to a variable Home position 2 8 2 Absolute Relative and Home Positions Absolute and relative positions are similar but differ in the starting location on which they are based While absolute positions are located with respect to the zero position relative positions are located with respect to the home position Because the home position can be located anywhere with respect to the zero position relative positions provide a convenient means of locating a unique movement index 2 8 3 Stops Stops are used to confine the range of travel to a range shorter than the maximum possible This feature is often used in applications that do not require the full travel range The limits are set by the absolute left stop and the absolute right stop which are expressed relative to the zero position It is recommended but not required that the zero and absolute left stop be set in the same position so that all accessible positions will have positive values The system will never allow a Nanomover to position itself beyond the values set by the absolute left and absolute right stops except for LMC movement as described in subparagraph 2 7 9 Lost Motion Compensation 2 8 4 Defining the Axes Each Nanomover is defined and operated in terms of an axis Up to 16 axes can be supported by the software Therefore becau
61. city value must be within the range specified for the Nanomotion II system otherwise the value will be limited to be within the allowable range Example WV1 1 2 5 This command will set the velocity for acceleration ramp 1 on Nanomover 1 to 2 5 units per second If the units are millimeters the ramp 1 for Nanomover 1 will be set to 2 5 mm per second 6 2 Programming with the PC Link Interface 6 2 1 Introduction For some applications the power and flexibility of the Nanomotion II Control Program may not be appropriate Instead users may prefer to control the Nanomotion II system using a custom application Recognizing this need several programming options have been made available First users can use a comprehensive DLL dynamic link library to construct Windows based applications in nearly any Windows development environment Second an MS DOS based application can be created using C and a linkable library of Nanomotion II functions MELLES GRIOT TOP Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT 6 3 Dynamic Link Library DLL For users who want to control Nanomotion II using a custom Windows application whether because it is part of a larger system of instrumentation or simply to provide unique functionality a DLL dynamic link library containing a comprehensive command library has been provided Any compiled language
62. cklash effects Nanomotion II has a guaranteed bidirectional repeatability of 100nm 2 6 4 Accuracy Accuracy is a measure of another type of system error the absolute positioning error It is defined as the absolute deviation between the target position and the actual position Thus accuracy error is a measure of the ability of the system to move exactly to an absolute position Accuracy is generally not as important as repeatability since consistent repeatable accuracy errors can be evaluated and compensated Nanomotion II has an accuracy of 1 um most of which results from minute variations in the micrometer thread pitch and unavoidable inaccuracies in the stepper motor If you need extremely high accuracy see the calibration graph in the appendix for guidance 2 7 Nanomotion II Concepts 2 7 1 Travel Line The travel line is the range of motion over which the Nanomover can move Each Nanomover can be positioned anywhere along the 25 mm long travel line at a resolution of 10nm with a bidirectional repeatability of 100 nm 2 7 2 Unit Independence The travel line is always considered in terms of 10 nm increments The Nanomotion II software converts this 10 nm unit into most common units so that the user can program a Nanomover in inches mils microinches centimeters millimeters microns or nanometers The Nanomotion II Control Windows Program also allows the user to define custom units for individual applications 2 7 3
63. cm Holding torque Physical Dimensions Mounting Barrel Diameter Weight Operating Temperature 44 5 mm x 44 5 mm x 158 mm 10 mm 0 0 0 009 mm 500 g 18 C to 40 C 40 C to 70 C 370g 370 g Storage Temperature MELLES GRIOT 21 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Specifications 3 2 Nanomotion II Controller Chassis Specifications Amplifiers per Chassis Maximum Amplifier Voltage Maximum Current per Amplifier Bus Compatibility Minimum Speed Maximum Speed Maximum Acceleration Acceleration Deceleration Ramp Segments Number of axes supported Safety Ratings Input Voltages 5 V Power Supply 12 V Power Supply Physical Dimensions Limit Switch Types Weight Operating Temperature Storage Temperature 2 125V 2A IEEE and RS 232 5 mm s 4 full steps sec 6 25 mm sec 500 full steps sec 1 000 000 full steps sec 4 16 Designed per U L CSA TUV and VDE specifications 90 130 Vac or 200 240 Vac at 47 63 Hz 8 A maximum 400 mA maximum 215mm x 326mm x 100 mm Opto interrupter or contact type switches normally open 4 4 kg 10 C to 40 C 40 C to 70 C 3 3 Controls Indicators and Connectors 3 3 1 Front Panel Controls and Indicators The front panel of the Nanomotion II controller is shown in Figure 3 1 The panel contains one control an ON OFF switch located in the lower right hand
64. corner of the unit and a power on indicator light a green LED in the upper right hand corner 22 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual power indicator light MELLES CRIOT NANOMOTION II ON OFF Switch Figure 3 1 Front Panel of Nanomotion II 3 3 2 Back Panel Controls and Connectors The back panel of the Nanomotion II controller shown in Figure 3 2 contains three horizontal card bays The top bay contains the IEEE RS 232 interface board the middle bay contains the motor control board and the bottom bay contains the expansion board used to daisy chain controllers There are three possible configurations for the unit e Standard configuration for IEEE 488 2 RS 232C controller 11 NCS 101 IEEE In this configuration the top bay and center bay are filled The bottom bay contains a blank panel This configuration is limited to the use of two motors e Standard IEEE 488 2 RS 232C configuration shown in Figure 3 2 with expansion board 11 NCS 101 IEEE with 11 NIB 001 In this configuration all bays are filled The unit can now be daisy chained to other controllers for operation of up to 16 motors With appropriate software and a PC Link card it can also be used with the Windows Control Program DLLs and MS DOS C libraries e Standard Configuration for IBM compatible computers 11 NCS 101 IBM In this configuration t
65. ction to Nanomotion II Figure A 2 shows typical limiting acceleration versus velocity for various inertial loads To generate optimum velocity the first step is to determine the maximum load the Nanomover will have to drive Typically this would be approximately given by the springs on the stage used unless an untypical load is being mounted to the stage Next locate a load line on the graph that most closely approximates your worst case load If the maximum load falls between two lines a new line can be approximated by interpolating between the load lines Locate three roughly equidistant points between the top left corner of the curve and the MELLES GRIOT 137 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Appendix desired slew rate These points represent good choices for acceleration values from the graph Enter these values for the ramp segments Use an acceleration value 21200 mm sec in ramp 1 to enter the graph through the top left corner The maximum achievable value will depend on the application 138 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 1250 1200 1100 1000 900 800 700 600 500 400 Acceleration in mm sec 300 200 100 9 kg load 7 kg load 6 5 kg load 3 5 kg load typical for 07 TSC 007 stage 2 25
66. d and present in the SESR MAV Message Available Shows that output is available in the Output Queue 6 1 5 Command Syntax The general syntax of the command set is Command Motor Number Data The command motor number and data are ASCII strings separated by a comma Spaces are simply ignored when encountered and may be used to make the source code more readable if desired Data may include decimal points and a plus or minus sign as required When using the RS 232 interface a carriage return CR causes the command to be executed Line feed LF is ignored if present Data is returned from the Nanomover system with the syntax Motor Number Data Via the serial interface data is terminated with CR or CRLF as specified by the host system Default is CRLE which is the designation used in all of the examples Commands are always expressed with reference to the host computer A write instruction indicates writing to the Nanomotion chassis a read indicates reading from the Nanomotion chassis Data requested by a read instruction will cause the Nanomotion chassis to respond immediately with the appropriate data If due care is given to calling safe absolute right and left stops the Nanomover system will protect itself against accidental damage by improper commands The Nanomover system will NEVER move beyond an absolute left or absolute right stop regardless of the command given except for certain instances wi
67. e Toll Free 800 835 2626 Phone 949 261 5600 Fax 949 261 7790 E Mail sales irvine mellesgriot com Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 2 Introduction to Nanomotion Il Congratulations on purchasing Nanomotion II one of the finest nanometric positioning systems available today This system makes possible computer controlled motorized movements of very high resolution with superior repeatability and accuracy This chapter of the manual introduces Nanomotion II and describes the capabilities of the instrument 2 1 Overall Concept Nanomotion II provides higher speed better repeatability and finer resolution than any other positioner in its class With Nanomotion II an operator can execute sophisticated moves with extreme precision via a user friendly MS Windows interface Alternatively a custom application can be created to control the instrument using a high level computer language The system consists of three components that function together appli cation software controller chassis and motorized positioner s which along with a usersupplied host computer provide an easy to use yet powerful means for precise nanopositioning To execute a movement the user issues a command The computer communicates these commands to the controller chassis which contains electronics that examine the commands and apply power to the posi
68. e Nanomovers Unpark Nanomovers Unpark the Nanomovers Help Menu The Help Menu provides access to the on line help system Nanomotion Help A comprehensive help utility to explain the Nanomotion II system and its use Using Help Help information on how to work with Windows graphical interfaces About Nanomotion II Information about the instrument Motor Parameters Window The Motor Parameters window is available for each of the axes used in Nanomotion II It contains information summarized in the System Window as well as several additional parameters Access the window by clicking on Edit Axis under the Edit menu or by double clicking on an axis in the System Window Each feature in the window is described below or under the System Window MELLES GRIOT 25 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System Motor Parameters Motor Data Axis Name misit Motor it Position 9 000000 Lock Time Units Plus Key Motion Type Minus Key eft Move Length 1 go0000 Base Velocity 0 062500 Ramp Corner Points Ramp 1 Ramp 2 Ramp 3 Ramp 4 Acceleration 125 000000 0 000000 0 000000 0 000000 Velocity 000000 0 000000 0 000000 0 000000 Absolute Stops Relative Stops Left Stop 9 000000 Left Stop 9 000000 Right Stop 25 400000 Right Stop 25 900000 Tab Stop Positions Home Position 9 000000 Lost Motion Compensatio
69. e default motion parameters except for position RGAIN lt mtr gt Command Read system gain parameters Parameters mtr Nanomover Number 1 through 16 84 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Description Retrieves the system gain in units per motor revolution for the specified Nanomover The system gain is defined as the number of units that the mechanical system travels in one revolution of the motor A Nanomover moves 0 5 millimeter for each motor revolution If the units are MM millimeters the system gain is 0 5 mm revolution If the units are IN inches the system gain is 0 5 25 4 or about 0 197 inches revolution This function is only needed for custom non Nanomotion ID applications The default value is correct for Nanomovers Example RGAIN 3 Retrieves the gain value for Nanomover 3 If the units are millimeters for a standard Nanomover the interface card will respond with the ASCII string 3 0 50000 CRLF RHCUR lt mtr gt Command Read holding current Parameters mtr Nanomover Number 1 through 16 Description Returns the holding current for the Nanomover The holding current will be in the range 0 amps to 2 46 amps Holding current is the current to the Nanomover motor when the Nanomover is stationary between commanded moves See the library function description fo
70. e holding current functionality will reduce the current while the motor is stationary to minimize thermal problems Example WCURE 1 OFF Will turn the current off for Nanomover 1 WEBP lt mtr gt lt ext bporch gt Command Write extended backporch Parameters mtr Nanomover Number 1 through 16 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual ext bporch Extended backporch value Description Sets the length of the extended backporch value for the specified Nanomover in microsteps Extended backporches were developed to help settling times in custom non Nanomotion II applications with high inertia low dampening loads like rotary wheels Most users should not need this functionality and should leave the extended backporch disabled Example WEBP 4 100 Sets the extended backporch to 100 microsteps for Nanomover 4 WEBPE lt mtr gt lt on off gt Command Enable extended backporch Parameters mtr Nanomover Number 1 through 16 on off Enable string ON or OFF Description Sets the whether the extended backporch function is enabled ON or disabled OFF for the specified Nanomover the default status is disabled Extended backporches were developed to help settling times in custom non Nanomotion ID applications with high inertia low dampening loads like rotary wheels Most users shou
71. e to be operated from a single host computer 2 4 5 Nanomover Motors Nanomover motors provide linear motion according to commands issued by the user They are self contained units that consist of a two phase brushless dc stepper motor a micrometer screw and a very low backlash coupling The Nanomover can provide a linear resolution of 10 nm from a micrometer screw with a pitch of 0 5 mm per revolution combined with a motor and driver that can provide 50 000 microsteps per revolution It is manufactured to extremely tight tolerances using special fixtures and techniques The Nanomover connects to the rear of the Controller chassis with a 3 m Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual cable and self locking connectors The knob on the back of the Nanomover provides an indication of movement and also allows for coarse manual positioning WARNING Disassembly of a Nanomover will cause permanent damage resulting in severely impaired performance To prevent accidental disassembly of the Nanomover the inside of the cap screws are filled with a solid compound If these screws are tampered with in any manner the comprehensive warranty is automatically voided Each Nanomover is fully tested at the factory and a certification chart showing actual performance is included with every Nanomover The Nanomovers are serialized so that th
72. ecified Nanomover Maps internally in the library to nl read Imc but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get lmc 6 Returns the LMC value for motor 6 If there is an error the function returns 1 nl get lock lt mtr gt Command Get position lock time Parameters mtr Nanomover number 1 through 16 Description Returns the position lock time for the specified MELLES GRIOT 109 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Nanomover Maps internally in the library to nl_read_lock but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get lock 5 Returns the position lock time for the Nanomover in milliseconds If there is an error the function returns 1 nl get microsteps lt mtr gt Command Get number of microsteps per step PARAMETERS lt MTR gt NANOMOVER NUMBER 1 THROUGH 16 Description Returns the microsteps per step for the specified Nanomover Maps internally in the library to nl_read_microsteps but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding
73. ee ee ee re 2 1 4 HowTo Use The Manual 0 0 00 eee 2 1 5 Continuing Improvement esee 3 1 6 Customer Service i csse x prp DE on Wh Sle wot ied 4 Chapter 2 Introduction to Nanomotion II eere 5 2 1 Overall Concept i edo ES wR eee EE ER ARP RR RES 5 2 2 History of NanOmotiOn cies Re e Si eee ETC eee 5 2 3 Nanomotion II Configurations eh 6 2 4 System Components sceler 8 2 5 SOUMWALE nis ox oa RE e a e Kugb S s RR REA EUR NE REESE xS 9 2 6 Nanomotion II Nanopositioning System 00020 000 10 2 7 Nanomotion II Concepts csse ue eth n RR EE R EEERE P E 11 2 8 Location Concepts ierse odd sae HS Seago R4 ERR eS Ea YR 17 Chapter 3 Specifications clle 21 3 1 Nanomover Motor Specifications 0 0 00 00000 21 3 2 Nanomotion II Controller Chassis Specifications 22 3 3 Controls Indicators and Connectors eee 22 Chapter 4 Installation and Setup eeeeeeees 29 AA PANS LISE CDM uu 29 4 2 General Precautions 0 0 ne 31 4 3 Installing the IBM System 0 000 022 c eee eee eee 33 4 4 Installing the IEEE 488 2 RS 232C System 00055 35 4 5 Nanomover Motor Installation lle 47 Chapter 5 Operating The Nanomotion II System 49 5 1 Operating Nanomotion II Using the Nanomoion II Control Program 49 5 2 Operating with LabVIEW D
74. eir individual performance can be traced to the factory certification records Removal of the serial number located on the cable near the connector voids the warranty 2 5 Software 2 5 1 Nanomotion Il Windows Control Program The Nanomotion II Windows control program is a Microsoft Windows based application that provides easy access to all of the functionality that most users will need to operate the system The Nanomotion II control program is discussed in detail in Chapter 5 Operating the Nanomotion II System 2 5 2 Dynamic Link Library DLL In addition to the power and flexibility of the control program described above Nanomotion II includes a dynamic link library DLL that can be used to make a custom Windows application for system control with a PC based computer 2 5 3 Library for MS DOS For users who want to construct a control application for a DOS based IBM type computer a complete library of C functions is provided for MS C7 0 or greater The syntax and functions found in this library are described in detail in Chapter 6 Programming Nanomotion II 2 5 4 Command Set for IEEE 488 2 RS 232C For users who want to control Nanomotion II using either the IEEE 488 2 GPIB or RS 232C serial interface a set of functions is provided These commands are contained in an EPROM on the IEEE board and can be MELLES GRIOT 9 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www arti
75. em The microsteps value establishes the commanded resolution for the Nanomotion II system A Nanomover motor has 400 cardinal steps per revolution and a 0 5 mm per revolution micrometer screw Therefore one cardinal step is 0 5 mm 400 0 00125 mm 1 25 um 1 250 nm The microsteps value is the number of discrete microsteps that this cardinal step is divided into by the Z8 microcontroller The resolution of a Nanomover is Resolution 1 250 nm nMicrosteps For example the default value of 25 corresponds to a resolution of 1 250 nm 25 50 nm and is sufficient for nearly all applications The user should remember that the mechanical resolution also depends on the construction of the Nanomover and the load being driven With appro priate motion parameters especially lost motion compen sation mechanical resolutions of 10nm 125 microsteps have been achieved NOTE when tbe microstep resolution for a z8 is changed tbe current position is automatically reset to zero tbe resolution cbange sbould be a power up initialization and not cbanged afterwards Example nl write microsteps 5 125 Returns O if operation successful non 0 if operation unsuccessful nl write position lt mtr gt lt dPosition gt Command Set position Parameters mtr Nanomover number 1 through 16 dPosition New value for the motor position Description Sets the current position of the Nanomover using the currently selected units
76. end where the resistor location is marked e g RN1 on the board Pin 1 on the SIP is usually designated by a dot or a vertical line on one end of the resistor If you have not kept the resistors use an equivalent to the following or contact Melles Griot customer service for a resistor set SIP Resistor Number of Internal Quantity Type Value Resistors Configuration on Board TypeA 330 Q 9 Pin 1 common 4 Type B 330 Q 5 Each isolated 3 Type C 110 Q 5 Each isolated 2 Setting the PC Addresses When multiple chassis are daisy chained together each board must be assigned a unique address so that information can be exchanged without becoming lost or misdirected The addresses are assigned using a series of 8 DIP switches together referred to as SW1 located on the back of the Controller Chassis Use Figure 4 1 to determine the correct SW1 switch settings for your Nanomotion II board s Each board can control two Nanomovers that are referenced in the software by their motor numbers It is recommended that the IEEE chassis remain at address 300 and that all additional units be in contiguous addresses above it MELLES GRIOT 45 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup Setup for the IBM System Configuring multiple axes for the IBM System follows the same steps as for the single address IEEE systems but with the following exceptions 1 The PC l
77. epping current value for Nanomover 3 If the stepping current value is 0 90 amps the interface card will respond with the ASCII string 3 0 90000 CRLF RSTENC lt mtr gt Command Reset encoder Parameters mtr Nanomover Number 1 through 16 Description Resets the encoder interface for the specified Nanomover After a motor stall is detected by the Nanomover microcontroller this command will re synchronize the Nanomover motor and encoder interface and re enable Nanomover movement See the library function description for more information Example RSTENC 1 Resets the encoder interface for Nanomover 1 If a motor stall had been detected this command will re enable motion for that Nanomover Note All the encoder functions in the Nanomotion II libraries require external hardware an encoder with electrical interface to work properly MELLES GRIOT 89 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT RSTP lt mtr gt Command Read motor steps Parameters mtr Nanomover Number 1 through 16 Description Retrieves the number of cardinal motor steps per revolution for the specified Nanomover Normal Nanomovers use 400 steps per revolution motors Example RSTP 2 Retrieves the motor steps per revolution value for Nanomover 2 For a normal Nanomover the value is 400 steps per revolution so the interface card will re
78. gram Edit Menu The Edit Menu contains commands to modify the parameters that describe the movement axes Add Axis Create a new axis complete with default values for all parameters Copy Axis Copy the highlighted axis to a memory buffer Cut Axis Copy the highlighted axis to a memory buffer then delete the highlighted axis Paste Axis Copy the highlighted axis from a memory buffer to the System Window Edit Axis Modify the parameter values for the selected axis Delete Axis Remove the selected axis This command once issued cannot be undone Setup Menu The Setup Menu provides access to the window that controls the configuration of the Nanomotion II electronics hardware including PC card addresses Hardware For the software to properly use the Nanomotion II board it must be informed about the location of the board and each of the axes 54 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual being used See Hardware Configuration Window for more information Units Adding mechanical hardware to the Nanomovers controlled by the Nanomotion II system could give a setup that would be more conveniently controlled in units other than those pre defined by the system See the Units Setup Window for more information Park Menu The Park Menu contains the commands to Park and Unpark the Nanomovers Park Nanomovers Park th
79. gt Example DENCC 1 This command returns 1 4 CRLF for a standard Nanomover 400 motor steps per revolution with a 1600 count per revolution encoder Note All the encoder functions in the Nanomotion II libraries require external hardware an encoder with electrical interface to work properly DSTP lt mtr gt Command Determine motor steps Parameters mtr Nanomover Number 1 through 16 Description Move the motor to determine the number of motor steps per revolution assuming a 1600 count per revolution encoder The motor will move a small distance 4 motor cardinal steps in each direction If the command is successful the number of motor steps will be returned in the format mtr lt steps gt Example DSTP 1 This command would return 1 400 CRLF for a standard Nanomover 400 motor steps per revolution with the appropriate encoder Note All tbe encoder functions in tbe Nanomotion II libraries require external hardware an encoder with electrical interface to work properly LF lt on off gt Command Line Feed Enable or Disable Parameters on off Enable string ON or OFF Description Determines whether or not to send a line feed LF as part of the data terminating character The serial ports on some computers require CRLE whereas others only require CR consult your computer manual If LF is set OFE all data MELLES GRIOT 77 Artisan Technology Group Qualit
80. have completed before continuing to lt sequence 2 gt lt break gt or BREAK Command Reset communications link Parameters None Description Resets the serial link Sending ASCII code ETX control C or 03 Hex will cause the serial card to terminate any serial command being processed and begin searching for the first byte of a new command The serial card will respond with the ASCII code ACK control F or 06 Hex to indicate it has received and responded to the break In addition to the soft lt break gt command of ASCII ETX a hard line break is also supported The system will respond with an ASCII ACK when it detects either a soft or hard break The hard break is implemented in hardware It may be able to regain control of the system if the soft break is unable to do so Example break ASCII ETX character Resets the Serial link BREAK Resets the serial link DENCC lt mtr gt Command Determine encoder counts Parameters mtr Nanomover Number 1 through 16 Description Move the motor to determine the number of encoder 76 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual counts for each motor cardinal step The motor will move a small distance 4 motor cardinal steps in each direction If the command is successful the number of motor steps will be returned in the format lt mtr gt lt ratio
81. he top bay contains a blank panel and the bottom bay contains the IBM ISA interface board A PC Link card the Windows Control Program DLL library and C libraries are included with this configuration MELLES GRIOT 23 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Specifications e Expansion controller 11 NCS 101 This configuration is daisy chained to the standard controller 11 NCS 101 IEEE to operate additional units In this configuration the top bay is empty and the bottom bay contains the 11 NIB 001 expansion card It is essentially the same as the standard IBM compatible configuration described above but it does not include the PC Link card or software All chassis have a motor control board located in the middle slot This is where limit switches for the motors are connected use of limit switches is optional and where bus addressing is done for multiple axis systems using one IEEE address IEEE 488 bus address RS 232C joystick port connector dip switch connector motor limit switch connectors 2 connectors 2 fuses 4 power connector ETE M e La mra nete guts ms roa VMSSMIN Wt eects expansion bus connectors 2 Figure 3 2 Back Panel of Nanomotion II Limit switch connectors middle bay Limit switches are not necessary with Nanomotion II which is protected by software travel limits However software travel
82. ic Link Library 5 1 2 Defined Movement Types Six movement commands TAB JOG STEP REPEAT ABSOLUTE SCAN are provided with the Nanomotion II Control Program These commands provide a convenient means to direct Nanomotion II through nearly all useful types of motions Units to Move The concept of Units to Move or Move Length is an important part of the Control Program This is a user defined variable that can be modified for each of the different types of movements such as STEP or REPEAT as described below All movements use the profile defined by the user selected acceleration and velocity ramps The defined movement commands available are described below ADVISORY In all cases depressing the pc keyboard space bar causes moving Nanomovers to stop immediately as discussed in Stopping Movement Tab TAB causes the selected Nanomover s to move to the closest tab position A plus TAB key moves to the closest tab position to the right and a minus TAB key moves to the closest tab position to the left Tab requires user definition in the tab position Setup Windows for tab locations Jog JOG is used to quickly position the selected Nanomover s anywhere in its range of motion The JOG feature operates in two modes If a JOG motion key is pressed and then released quickly the Nanomover will move the Units to Move amount For example if Units to Move is set to 1 mm and a JOG key is pressed and released quickly
83. ice and whether the SESR has recorded any events To read the contents of the SBR use a serial poll or the STB Query The bits in the SBR are set and cleared depending on the contents of the SESR the ESR and the Output Queue When a serial poll is used to obtain the SBR bit six is the RQS bit When the STB Query is used to get the SBR bit 6 is the MSS bit The Status Byte Register is not reset when read Bits 7 6 5 4 3 2 1 0 Meanings RQS ESB MAV MSS RQS Request Service From a serial poll The system requests service from the GPIB CIC MSS X Master Status From a STB Query Summarizes Summary the ESB and MAV bits in the SBR ESB Event Status Bit When set to 1 show that one or more of the enabled bits in the SESR have been set to 1 MAV Message Available Set to 1 when data is available in the output queue Service Request Enable Register SRER The SRER controls which bits in the SBR generate a Service Request and are summarized by the Master Status Summary MSS bit The RQS bit remains set at one until either the Status Byte Register is read with a serial poll or the MSS bit changes back to a zero MELLES GRIOT 69 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Bits y 6 5 4 3 2 1 0 Meanings ESB MAV e ESB Event Status Bit Shows that status is enable
84. iction the motion will occur Lost motion is a primary cause of the error described as bidirectional repeatability Lost motion compensation LMC is the novel method used by Nanomotion II to compensate for this error If LMC is enabled by the user the bidirectional repeatability can be equal to or even exceed the unidirectional repeatability This is achieved by always approaching the target position from the same side with a final move that is always the same in every aspect Approaching the target from the same side is a technique that has been used for quite some time However by requiring that the final move always be the same length all lost motion is consistently removed and new levels of bi directional repeatability can be achieved The magnitude and direction of LMC are selected by the user Values from 10 um to 10 um can be selected where negative values refer to a final approach in the negative direction and positive values refer to a final approach in the positive direction If the move is in the direction opposite that for the LMC then the final LMC move will be preceded by a target overshoot Similarly if the overall move is in the same direction as the LMC then the final LMC move will be preceded by a target undershoot Having a choice of direction of LMC can be very useful particularly where there is a definite constraint against shaft overshoot as in the mechanical probing of surfaces e g semiconductor
85. ied motor in currently selected units If the motor is currently moving this function will wait for it to stop before proceeding nl write bvel 6 dBaseVelocity Returns 0 if operation successful non 0 if operation unsuccessful nl write initialized lt ninitState gt Command Set initialization flag Parameters lt nInitState gt The desired value for the flag 1 means nl init already called 0 means nl init not called yet Description Sets the initialized value so programs can know that nl init has been called In general this function should very seldom be used The Z8 microcontroller initializes the flag to FALSE nl init sets it TRUE and nl exit sets it FALSE The flag can be read with the nl read initialized function to tell at run time whether or not nl init has been called for the system Example nl write initialized nInitState MELLES GRIOT id Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Returns 0 if operation successful non 0 if operation unsuccessful nl write Imc lt mtr gt lt nLmcValue gt Command Set lost motion compensation Parameters mtr Nanomover number 1 through 16 nLmcValue New value for lost motion compensation Description Sets lost motion compensation in an integer range from 10 to 10 O disables The units are 10 micron increments If the motor is currently moving this function
86. ing the position and park offsets stored in the EEPROM on the interface card If the requested motor is already unparked or has not been parked this command will be ignored Example Uz2 Unparks Nanomover 2 The current position and the offset necessary to unpark the Nanomover will be restored from the interface card UA Unparks all Nanomovers Again the information necessary to unpark each Nanomover is restored from the interface card WA lt ramp gt lt mtr gt lt accel gt Command Write acceleration Parameters lt ramp gt Velocity Acceleration Ramp Segment Number 1 through 4 lt mtr gt Nanomover Number 1 through 16 lt accel gt Acceleration Value Description Write the acceleration to the specified velocity acceleration ramp segment The ramp parameter specifies ramp segment 1 2 3 or 4 The acceleration value must be within the range specified for the Nanomotion II system otherwise the value will be limited to be within the allowable range Example WA1 1 100 0 This command will set the acceleration for ramp 1 on Nanomover 1 to 100 0 units per second per second If the units are millimeters ramp 1 for Nanomover 1 will be set to 100 0 mm per second per second 92 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual WAL lt mtr gt lt absleft gt Command Write absolute left Parameters mtr Nano
87. ink card is the master of the system and therefore all chassises connected to the host computer must have the master slave jumper JP1 set to slave See Figure 4 6 2 If more than 2 axes are used more than 1 chassis all of the terminating resistors will need to be removed from all the expansion boards except the last one in the chain 3 The IBM and expansion chassis come complete with the expansion board installed No additonal boards need to be installed Setup for Individual GPIB Addresses As mentioned at the beginning of this section the user will need an additional 11 NCS 101 IEEE for each additional 2 axes To set up follow the instructions given in section 4 4 3 to 1 Set switch 2 on the GPIB board to a different GPIB address for each controller 2 2 Hook each controller to the computer via the IEEE address Each controller chassis will have to be addressed individually via the GPIB bus 4 5 Nanomover Motor Installation Each Nanomover includes a permanently attached three meter cable This cable can plug into either of the two motor connectors on the back of the Nanomotion II controller chassis If it is necessary to operate the Nano movers at distances greater than three meters from a controller chassis additional extension cords are available for distances up to 35 meters CAUTION Under no circumstances are improvised cables to be used as doing so may damage the system 4 5 1 Limit Switches
88. ippage the set screw in the mounting block of the stage if applicable should be tightened onto the mounting barrel WARNING Take care to avoid overtightening the set screw as doing so will damage the Nanomover barrel Turn the manual positioning knob after tightening the mounting set screws and nut to ensure that the micrometer shaft can turn freely If the spindle binds or is difficult to turn slightly loosen the setscrews and the nut until it turns freely CAUTION To prevent long term wear to the stage and micrometer tip a small drop of High Pressure grease should be placed on the contact point of the stage Use of light viscosity oils should be avoided because it may flow onto the micrometer barrel and further into the Nanomover housing potentially carrying contaminants to the micrometer threads MELLES GRIOT 47 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup This page intensionally left blank 48 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 5 Operating The Nanomotion II System 5 1 Operating Nanomotion Il Using the Nanomotion II Control Program With the Nanomotion II Control Program up to 16 axis of motion can be controlled via a Windows based application that provides powerful functionality through an easy to
89. isabled for the specified Nanomover The final motor position for a move is the same whether the extended backporch is enabled or disabled The default for Nanomotion II is backporch disabled and most system users should have no reason to change it Example REBPE 2 Retrieves the backporch enabled value for Nanomover 2 If the extended backporch is disabled for the Nanomover the interface card will respond with the ASCII string 2 0FF CRLF RENCC lt mtr gt Command Read encoder counts Parameters mtr Nanomover Number 1 through 16 Description Reads the encoder counts per motor cardinal steps ratio for the specified Nanomover The correct ratio must be present in the Nanomover microcontroller for correct functioning of the encoder as a motor stall detection mechanism Example RENCC 2 Retrieves the encoder counts per motor step value for Nanomover 2 If the Nanomover microcontroller is correctly set up for a 400 step per revolution Nanomover motor and a 1600 quadrature count per revolution encoder the interface card will respond with the ASCII string 2 4 CRLF In this case there would be 4 encoder counts for each motor step Note All tbe encoder functions in tbe Nanomotion II libraries require external bardware an encoder witb electrical interface to work properly MELLES GRIOT 83 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Progra
90. itor function is activated the GPIB RS 232C card will send the motor number to the system host computer when that Nanomover has stopped This will indicate that the Nanomover whose number is sent is ready to make another move Example MON 5 ON Sets the monitor function to ON for Nanomover 5 Now 78 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual whenever Nanomover 5 stops after a move a 5 MON string will be sent to the system host computer MR lt mtr gt lt dist gt Command Move relative Parameters mtr Nanomover Number 1 through 16 dist Distance for move Description Move relative to the current position The Nanomover will move the distance specified relative to its current position If the distance is positive the Nanomover will extend by the specified distance If the distance is negative the Nanomover will retract If the move exceeds an absolute stop the Nanomover will move only to the stop position and will not go further Example MR 1 1 0 This command would cause the Nanomover to move 1 0 unit in the negative direction If the Units are currently millimeters the Nanomover will retract 1 0 mm PA or P lt mtr gt Command Park all or Park motor Parameters mtr Nanomover Number 1 through 16 Description Parks the specified Nanomovers The command PA parks all Nanomovers
91. k interface board provides the connection between an IBM PC AT or later and a Nanomotion II controller chassis Essentially the PC Link board is a PC bus extender which provides all of the digital signals that the Nanomotion II controller chassis requires 2 4 2 Nanomotion Il Controller Chassis The controller chassis contains electronics to control and operate one or two Nanomovers Each controller chassis contains a power supply a two channel Nanomover control board and two card bays one for an IBM ISA interface board and one for an IEEE 488 2 RS 232C interface card Up to eight controller chassis can be connected together allowing for up to a total of 16 Nanomovers to be controlled from the same host computer These configurations are described in Chapter 4 Installation and Setup 2 4 3 IEEE 488 2 RS 232C Interface Card Included with the 11 NCS 101 IEEE Controller This card fits in the top card bay on the controller and is required for operation with an IEEE 4888 GPIB interface or an RS 232C serial interface It is also required when operating with LabVIEW drivers 2 4 4 Expansion Card Included with the 11 NCS 101 IBM controller and the 11 NCS 101 ex pansion controller This card fits in the bottom card bay on the controller chassis and is required for operation using the Windows control program or custom applications using Windows DLLs or the MS DOS C libraries It is also required whenever more than two Nanomover motors ar
92. k should be a switch style contact closure joystick or control pad Tbe more common PC interfaced joysticks are analog and will not work with the joystick port 4 4 7 Configuring Additional Axes When more than two axes will be in use the user has the option of setting up the system as a single GPIB address or as multiple GPIB addresses The choice determines the equipment required Item Single Address Multiple Addresses Master Unit first two axes 11 NCS 101 IEEE 11 NCS 101 IEEE Additional Unit 11 NCS 101 IEEE 11 NCS 101 IEEE per two additional axes Expansion Card 11 NIB 001 Not Required Setup for a Single GPIB IEEE Address To set up follow the instructions in this section to 1 Add an expansion card 11 NIB 001 to the 11 NCS 101 IEEE controller in the bottom slot of the back panel of the chassis Make sure that the Master Slave jumper on this board is set to Master for this chassis and that all of the resistor SIPs on the board remain installed 2 Remove terminating resistors from all remaining expansion cards in the 11 NCS 101 slave controllers with the exception of the last one in the chain For example if only one additional controller is used no 42 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual resistors would be removed If two additional controllers are used resistors need to be removed from one controller and
93. l init If these interrupts are not reset when the program exits the computer may hang or programs executed later may not function properly Example nl exit nl get absleft lt mtr gt Command Get absolute left stop position Parameters mtr Nanomover number 1 through 16 Description Returns the absolute left stop position for the Nanomover Maps internally in the library to nl read absleft but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get absleft 4 Returns the absolute left stop position for Nanomover 4 If there is an error the function returns 1 0 MELLES GRIOT 105 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT nl get absright Command Get absolute right stop position Parameters mtr Nanomover number 1 through 16 Description Returns the absolute right stop position for the Nanomover Maps internally in the library to nl read absright but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get absright 5 Returns the absolute right stop position for Nanomover 5 If there is an error the function returns 1 0 nl get accel mtr ramp Command Get a
94. ld not need this functionality and should leave the extended backporch disabled Example WEBPE 2 ON Enables the backporch functionality for Nanomover 2 WENCC lt mtr gt lt encoder cnt Command Write encoder counts Parameters mtr Nanomover Number 1 through 16 encoder cnt Encoder counts per cardinal motor step value Description Sets the encoder counts per motor cardinal steps ratio for the specified Nanomover The correct ratio must be present in the Nanomover microcontroller for correct functioning of the encoder as a motor stall detection mechanism Supported ratios are 2 4 8 and 16 MELLES GRIOT 95 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II For most users it may be easier to use the DENCC or DSTP functions to let the Nanomover microcontroller determine the ratio for itself Example WENCC 2 4 Sets the encoder counts per motor step value for Nanomover 2 If the Nanomover microcontroller has a 400 step per revolution Nanomover motor and a 1600 quadrature count per revolution encoder this value would correctly set up the encoder functionality with 4 encoder counts for each motor step Note All the encoder functions in the Nanomotion II libraries require external hardware an encoder with electrical interface to work properly WENCE lt mtr gt lt on off gt Command Enable encode
95. lears the interface status data structures ESE lt on off bits gt Command Standard Event Status Enable Command Parameters lt on off bits gt The decimal sum of the bits to be set 1 in the register Description Set or query the bits in the Event Status Enable Register ESER The ESER prevents events from being reported to the Status Byte Register SBR The value is determined as a decimal integer corresponding to the sum of the bit values from the register For example if only the least significant bit in the register OPC is to be turned off the value should be 254 OFE Hex Only the most significant bit PON turned on would be 128 080 Hex etc Example ESE 0 Sets the Event Status Enable Register ESER to all zeros clears the register MELLES CHIOT 71 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT ESE Command Parameters Description Example ESR Command Parameters Description Example IDN Command Parameters Standard Event Status Enable Command None Queries the bits in the Event Status Enable Register ESER The ESER prevents events from being reported to the Status Byte Register SBR The value is returned as a decimal integer corresponding to the sum of the bit values from the register For example if only the least significant bit in the register OPC is t
96. ll be interpreted in terms of the specified units See the library function description for more information WU 2 MM Sets the units base for Nanomover 2 to millimeters WUSTP lt mtr gt lt psteps gt Command Parameters Description Write microsteps mtr Nanomover Number 1 through 16 lt psteps gt Microsteps per cardinal motor step value Sets the microsteps per cardinal motor step for the specified Nanomover microcontroller The microstep per step value must be one of the supported values 25 50 100 125 or 250 The default value is 125 and most users should 100 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual have no reason to change it See the library function description for more information Note Wben tbe microstep resolution is changed the Nanomover software position will be reset to zero but tbe Nanomover will not pbysically move Example WUSTP 2 125 Sets the microsteps per cardinal motor step value for Nanomover 2 to 125 WV lt ramp gt lt mtr gt lt vel gt Command Write velocity Parameters lt ramp gt Velocity Acceleration Ramp Segment Number 1 through 4 mtr Nanomover Number 1 through 16 vel Velocity Value Description Write the velocity to the specified velocity acceleration ramp segment The ramp parameter specifies ramp segment 1 2 3 or The velo
97. mal Normal stationary status Left Limit Left limit switch is active Right Limit Right limit switch is active Left Stop Located at left absolute stop Right Stop Located at right absolute stop Moving Moving Parked Parked Motion Range A mouse or keyboard operated movement control Clicking on the slider box or pressing the indicated keys under Minus Key or Plus Key will cause the Nanomover to move Pull Down Menus File Menu The File Menu contains standard MS Windows commands for control of configuration files These files contain descriptions of Nanomotion II configurations such as number of axes and operating parameters New Create a new file A new Nanomotion II configuration file with default values for each parameter will be created Use this command when setting up a new system Open Open an existing configuration file Save Save a configuration file using the same name it was opened with MELLES GRIOT 53 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System If the file has not been saved previously i e it was created with the New command you will be prompted for a filename Save As Save a file prompting for a name A new name may be entered or the old name may be used If you use the old name the previous file will be overwritten and destroyed Exit Quit the Nanomotion II Control Pro
98. manufacturer reserve the right to make changes to this manual and to the equipment described herein without notice Melles Griot has made considerable efforts to ensure that the information in this manual is accurate and complete However Melles Griot will not be liable for any technical or editorial errors or omissions made herein or incidental special or consequential damages of any nature that result from the use of this manual or operation and performance of equipment in connection with this manual Copyright Melles Griot Inc April 2001 Portions Copyright Applied Precision Inc 1995 All Rights Reserved No part of this manual may be reproduced transmitted stored in a retrieval system or translated into any language in any form by any means without the prior written permission of Melles Griot Inc LabVIEW is a registered trademark of National Instruments Microsoft MS Windows MS DOS and C7 0 are registered trademarks of the Microsoft Corporation 1 2 Warranty Statement The manufacturer warrants the Nanomotion II system against defects in materials and workmanship for a period of one 1 year from the date of purchase 1 2 1 Life Support Policy Nanomotion II is not authorized for use as a critical component in life support devices or systems without the prior written approval of the manufacturer As used herein 1 Life support devices or systems are devices or systems that a are intended for surgical implant in
99. ments VIs Supplied Each system that is equipped with the IEEE 488 2 RS 232C expansion board ships with LabVIEW drivers for LabVIEW 3 x and x These drivers consist of a library of sub VIs and an example VI The complete list is as follows MG Nanomotion II Example VI MG Nanomotion II Check for Motor VI MG Nanomotion II Close VI MG Nanomotion II Get Range Position VI MG Nanomotion II Initialize VI MG Nanomotion II Lost Motion Comp VI 60 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG MG Nanomotion II Motor Parameters Global VI Nanomotion II Motor Parameters VI Nanomotion II Move VI Nanomotion II Park Unpark VI Nanomotion II Query SBR VI Nanomotion II Query SESR VI Nanomotion II Read Limit Switches VI Nanomotion II Read Ramps VI Nanomotion II Read Status VI Nanomotion II Remote Local VI Nanomotion II Reset Motor VI Nanomotion II Reset VI Nanomotion II Revision Query VI Nanomotion II Self Test VI Nanomotion II Set Absolute Stops VI Nanomotion II Set Back Porch VI Nanomotion II Set Base Velocity VI Nanomotion II Set Current Position VI Nanomotion II Set Current VI Nanomotion II Set Gain Steps VI Nanomotion II Set Limit Switches VI Nanomotion II Set Position Lock Time VI Nanomotion II Set Ramp Values VI Nanomotion II Se
100. mming Nanomotion IT RENCE lt mtr gt Command Read encoder enabled Parameters mtr Nanomover Number 1 through 16 Description Reads the whether the encoder checking is enabled or disabled for the specified Nanomover If the encoder is enabled the Nanomover microcontroller will check as it moves the Nanomover to make sure that the stepper motor has not stalled If the motor stalls the Nanomover is stopped and the encoder error status is set for the Nanomover Example RENCE 1 Retrieves the encoder enabled value for Nanomover 1 If encoder stall detection is enabled for Nanomover 1 the interface card will respond with the ASCII string 1 0N CR LF Note All the encoder functions in the Nanomotion II libraries require external hardware an encoder with electrical interface to work properly RES lt mtr gt Command Reset motor Parameters mtr Nanomover Number 1 through 16 Description Resets Motor to the default motion profile values The units will be reset to MM Note Tbe position is not affected Neitber tbe pbysical position of tbe Nanomover nor the position registers in tbe microcontroller are changed by this function This is slightly different from the RST interface command This command will change motor settings to bring them back to a normal state The RST will only stop the motors without changing any motion settings Example RES 2 Resets Nanomover 2 to th
101. mover Number 1 through 16 lt absleft gt Absolute Left Stop Position Description This instruction sets the position of the absolute left stop for the designated Nanomover Any time a Nanomover is commanded to a position less than the lt absleft gt value the motor will stop at the absolute left stop position rather than moving to the commanded position Example WAL 3 1 0 The absolute left stop position of Nanomover 3 will be set to 1 0 units WAR lt mtr gt lt absright gt Command Write absolute right Parameters mtr Nanomover Number 1 through 16 lt absright gt Absolute Right Stop Position Description This instruction sets the position of the absolute right stop for the designated Nanomover Any time a Nanomover is commanded to a position greater than the lt absright gt value the motor will stop at the absolute right stop position rather than moving to the commanded position Example WAR 1 15 0 The absolute right stop position of Nanomover 1 will be set to 15 0 units WB lt mtr gt lt bvel gt Command Write base velocity Parameters mtr Nanomover Number 1 through 16 bvel Base Velocity Value Description This command sets the base velocity for the specified motor to the value lt bvel gt The base velocity should be within the range specified for the Nanomotion II system otherwise the value will be limited to be within the allowable range Example WB 1 0 10
102. mps to 2 46 amps Stepping current is the current to the Nanomover motor when the Nanomover is moving The default value is correct for Nanomovers and most users should have no reason to change it Example WSCUR 3 0 90 Sets the stepping current for Nanomover 3 to 0 90 A MELLES GRIOT 99 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II WSTP lt mtr gt lt steps gt Command Parameters Description Example Write motor steps lt mtr gt Nanomover Number 1 through 16 lt steps gt Number of motor steps for the Nanomover motor Sets the number of cardinal motor steps per revolution for the specified Nanomover Normal Nanomovers use 400 steps per revolution motors and most users should not have any reason to change this value WSTP 2 400 Sets the motor steps per revolution value for Nanomover 2 to 400 steps per revolution WU lt mtr gt lt units gt Command Parameters Description Example Write units mtr Nanomover Number 1 through 16 units Units string This command defines the units for a particular Nanomover units must be one of the following strings NM for nanometers MI for microns MM for millimeters CM for centimeters UI for microinches ML for mils or I for inches All other input or output motion control values position velocity etc for the specified Nanomover wi
103. mum Acceleration Nanometers nm sec 1 250 000 000 Micrometers um sec 1 250 000 Millimeters mm sec 1 250 Centimeters cm sec 125 Microinches uin sec 49 210 000 Mils mils sec 49 210 Inches in sec 49 21 Table 2 2 Nanomotion Il Maximum Acceleration 2 7 6 Base Velocity As mentioned above the motor starts and stops from a preselected speed called the base velocity The base velocity can range between 0 005 to 0 1875 mm sec For most applications this parameter can be kept as high as is appropriate for the mechanical system being moved Note that the lower of the base velocity or the first ramp velocity will be used as the starting velocity 2 7 7 Dual Current Levels One of the many novel technological features of Nanomotion II involves the energy provided to the motors Unlike most stepper motor systems Nanomotion II can supply two different levels of current to the motors Two current levels are ideal because the torque requirements to hold the motor in position are considerably less than the torque requirements to move the motor Extra energy applied during periods of no movement must be dissipated as heat resulting in thermally induced positioning errors Because Nanomotion II can provide two current levels this error can be minimized The default stepping and holding currents are 900 mA and 400 mA respectively 2 7 8 Position Lock Time The position lock time is the length of time that the motor current
104. n ON Length Direction Plus Melles Griot OFF 0 050000 Minus Nanomotion Il System Figure 5 2 Motor parameters window Motor Data Axis Name The name of the selected axis Position The current location of the Nanomover Units A pull down menu to control which measurement units are currently being used Motion Type A pull down menu to control which type of motion is currently active 56 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Move Length Units to Move Movement step size Motor Identifies the selected Nanomover Lock Time Length of time in milliseconds that the Nanomover is to maintain a high torque condition after each movement Plus Key Key dedicated to moving the Nanomover in the positive direction using the selected movement type Minus Key Key dedicated to moving the Nanomover in the negative direction using the selected movement type Base Velocity Speed at which the Nanomover will begin each move unless otherwise instructed by an acceleration profile Ramp Corner Points The acceleration and velocity for each of the 4 regions of the acceleration profile Absolute Stops The left and right locations with respect to the zero position beyond which the Nanomover will not move Relative Stops The left and right locations with respect to the home position beyond which
105. n 1 Move 1 mm in the positive direction Move 1 mm in the negative direction Read the current actual position location 2 Calculate the bidirectional error location 1 docation 2 and plot it Move to the next position 1 mm down the travel line and repeat the process LMC is set to 2 for all testing The weight of the system being moved is a constant 1 5 kilograms The temperature of the screw is measured and recorded at the end of the test and is printed on the certification graph Interpreting the Nanomover Certification Graph Each Nanomover is certified to have an accuracy of 1 micrometer and a bidirectional repeatability of better than 100 nanometers The figure shown below is a typical certification graph with the upper graph a plot of the absolute accuracy and the lower graph a plot of the bidirectional repeatability error The sample interval of both graphs is 1 mm MELLES GRIOT 135 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Appendix Nanomover Calibration Graph Model 11 NCM 001 LMC 5 Serial Number 2698 Load 1 5 Date 12 18 1996 Temperature 20 5 C Test final 5 Time 14 44 21 nm Accuracy 1000 500 500 1000 Travel mm Repeatability o 5 10 Travel mm 15 20 25 Figure A 1 Motor Calibration Grapb The bidirectional repeatability error is obtained by plotting the error
106. n internal variables These variables must be initialized before this function is called with nl restore cfg Example nl unpark 13 Returns O if operation successful non 0 if operation unsuccessful MELLES GRIOT 125 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion IT nl write absleft mtr lt dLeftLimit gt Command Parameters Description Example Set absolute left limit mtr Nanomover number 1 through 16 lt dLeftLimit gt New value for the left absolute limit Sets the absolute left limit of the Nanomover using currently selected units If the motor is currently moving this function will wait for it to stop before proceeding nl write absleft 3 dLeftLimit Returns 0 if operation successful non 0 if operation unsuccessful nl write absright mtr lt dRightLimit gt Command Parameters Set absolute right limit mtr Nanomover number 1 through 16 lt dRightLimit gt New value for the right absolute limit Description Example Sets the absolute right limit of the Nanomover using currently selected units If the motor is currently moving this function will wait for it to stop before proceeding nl write absright 5 dRightLimit Returns 0 if operation successful non 0 if operation unsuccessful nl write accel mtr ramp lt dAcceleration gt Command Paramete
107. nano ii dio function If the motor is currently moving this function will wait for it to stop before proceeding Example nl get joysticks 2 108 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Returns the current joystick value for motor 2 If there is an error the function returns OxFF Note There is only one joystick port shared by motors 1 amp 2 etc Calling tbis function witb eitber of tbe motors for a specific board will return tbe data from tbe same dio port nl get limit switches enabled lt mtr gt Command Get limit switch enabled status Parameters mtr Nanomover number 1 through 16 Description Returns the limit switch enabled bits for the specified Nanomover Maps internally in the library to nl read limit switches enabled but does not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get limit switches enabled 2 Returns 00 if neither limit is enabled Returns 10 if only minimum limit is enabled Returns 01 if only maximum limit is enabled Returns 11 if both limits are enabled Returns 1 if there is an error nl get Imc mtr Command Get lost motion compensation value Parameters mtr Nanomover number 1 through 16 Description Returns the lost motion compensation value for the sp
108. ning the Axes 52 Direction of Motion 11 Dual Current Levels 14 Dynamic Link Library DLL 102 Electrical Safeguards 31 Example Serial Interface Software 65 Expansion Board Setup 44 Expansion bus connectors 27 Fuses 28 GPIB Address 39 Handling 32 Handshaking 36 38 Hardware Configuration Window See Set Base Address Window high torque 21 140 Home Position 17 Hyperterminal 63 IEEE 488 2 GPIB System 35 IEEE 488 2 Commands 67 101 IEEE connector 27 Indicators 22 Installation Motor 47 Software 33 41 Installing the IBM System 33 MELLES GRIOT Artisan Technology Group Quality Instrumentation 141 Guaranteed 888 88 SOURCE www artisantg com Index Introduction to Nanomotion ON OFF switch 23 History 5 opto interrupter switch 26 Overall Concept 5 Overview 2 Introduction To Nanomotion 5 Parity 58 Jog 50 PARK 16 Joystick 34 42 60 Parts List 29 30 Joystick Switches 40 Performance Parameters 10 LabView Drivers 10 1 Position Lock Time 14 Limit switch connectors 25 Position Synchronization 18 Limit Switches 24 26 47 Power connector 28 Location Power Supply 31 mounting 31 power on indicator light 22 Lost Motion Compensation 15 Programming with the PC Link Lubrication 32 Interface 101 Making High Repeatability Relative Position 17 Measurements 131 Repeat 51 Motor connectors 27 Repeatability 10 21 Motor Installation 47 Resolution 10 Motor Paramete
109. nl read microsteps lt mtr gt lt npMicrosteps gt Command Read microsteps Parameters mtr Nanomover number 1 through 16 npMicrosteps Pointer to an integer variable for the data return Description Read the number of microsteps per motor step from the Z8 microcontroller If the motor is currently moving this function will wait for it to stop before proceeding Example nl read microsteps 3 npMicrosteps Returns the value of the microsteps per step being used by the Z8 in the location pointed to by npMicrosteps nl read nano ii dio lt mtr gt lt upData gt Command Read dio data Parameters mtr Nanomover number 1 through 16 upData Pointer to an unsigned variable for the data return Description Reads the data from the dio port for the given motor This function only works on Nanomotion II hardware Nanomotion applications for earlier hardware should use the nl read joysticks function Example nl read nano ii dio 3 upData Returns the current dio value for motor 3 in the location pointed to by upData Note There is only one joystick port shared by motors 1 amp 2 etc Calling tbis function witb eitber of tbe motors for a specific board will return tbe data from tbe same dio port nl read position lt mtr gt lt dpPosition gt Command Read motor position Parameters mtr Nanomover number 1 through 16 MELLES GRIOT 119 Artisan Technology Group Quality Instrumentati
110. nomover will stop according to the specified deceleration ramps While no LMC is used position memory is retained Some lost motion may accumulate but this will disappear on the next move If a Nanomover is stopped by a software STOP command it will stop as if it had reached a limit switch 2 7 11 Park and Unpark The PARK and UNPARK features provide a mechanism to maintain the Nanomover position even when power is turned off The PARK command instructs a Nanomover to move to its closest stable position where the position will be maintained even when the power is turned off The movement necessary to reach that position is recorded in a file and then the power is smoothly removed from the Nanomover in order to prevent any jumping or slipping The system can then be turned off When the system is powered the command UNPARK will read the position file and restore the Nanomover to its initial position If lost motion compensation is enabled UNPARK will restore the motor using the specified LMC sequence NOTE Any movement of tbe Nanomover sbaft wbile power is off will cause tbe system to be incorrectly restored and syncbronization to be lost 16 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 2 8 Location Concepts 2 8 1 Zero Position The Zero position is the location on the travel line from which all other positions are normally referen
111. ns programming examples and comments regarding the use of the Nanomotion II libraries Examination of the example program is probably the quickest way to become familiar with the use of the Nanomotion II libraries Use them as a guide in writing your own programs NANODEMO MAK Visual C make file used to compile and link the demo 6 4 2 Functions by Type Move Parameters nl get absleft nl read absright nl write accel nl read absleft nl write absright nl get bvel nl write absleft nl read accel nl read bvel nl get absright nl get accel nl write bvel MELLES GRIOT 103 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Miscellaneous nl reset nl setbase nl get motor address nl initialized Limit Switches nl enable limit switches nl read lock nl get limit switches enabled nl write lock nl read limit switches enabled nl get position nl get Imc nl read position nl read I1mc nl write position nl write Imc nl get status nl get lock nl read status Digital 1 0 nl get joysticks nl get nano ii dio nl read joysticks nl read nano ii dio Motor Commands nl read units nl write units nl get vel nl read vel nl write vel nl move absolute nl stop nl unpark nl move relative nl park Initialization nl init nl save cfg nl get eprom version nl exit nl get base address nl read eprom version nl get initialized nl read base address nl ge
112. o 1 which the PC can detect using this status read function nl read units lt mtr gt lt cpUnits gt Command Read unit type Parameters mtr Nanomover number 1 through 16 cpUnits Pointer to an usersupplied buffer for tbe data return Description Copies the current units type string into a user provided string buffer The buffer pointed to by cpUnits should be at least 10 bytes long The following strings will represent the units CM Centimeters MM Millimeters MI Microns NM Nanometers STA Incbes MI Mils Ur Microinches Example nl read units 5 cpUnits Returns the units type in the string buffer pointed to by cpUnits as one of the defined units strings nl read vel lt mtr gt lt dpVelocity gt Command Read motor velocity Parameters mtr Nanomover number 1 through 16 122 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual dpVelocity gt Pointer to an integer variable for the data return Description Reads the velocity corresponding to nRamp 1 4 for nMotor into dpVelocity in currently selected units per second If the motor is currently moving this function will wait for it to stop before proceeding Example nl read vel 15 dpVelocity Returns the current velocity ramp value in the location pointed to by dpVelocity nl reset mtr Command Reset motor P
113. obtained by taking the absolute magnitude of half the difference in actual positions for the same location when approached from the positive and negative The difference is divided by two because repeatability is conventionally defined as a symmetric error The highest peak on this graph at 50 nanometers therefore represents a worst case bidirectional repeatability of 50 nanometers A typical bidirectional repeatability error is around 20 or 30 nanometers even though the guaranteed performance is 100 nanometers The absolute accuracy is obtained by plotting the Nanomover s position as determined by the interferometer vs the its expected position Sources of Error Nanomotion II has three main sources of systematic reproducible errors in the mechanical system which contribute to the accuracy error These are the motor tooth pitch error torque errors and the leadscrew error 136 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual The motor tooth pitch error is a deviation of the tooth to tooth spacing in the motor It causes the actual microstep size to decrease or increase linearly between teeth as a function of the tooth pitch error The manufacturer of the motor certifies that the tooth pitch error is within 3 and typically is 1 This translates to a positional error of 150 nanometers maximum typically 50 nanometers and is generally no
114. omotion II appear as italicized text Example 3 NOTE Notes are intended to furtber explain or offer exceptions to tbe text Example 4 Commands that you must type into the computer appear in a different font cd LOCATION windows NanoMotn Example 5 Command parameters that are optional are surrounded by square brackets variable parameter1 parameter2 Example 6 Computer functions libraries and related terms are indicated by a different font nl read position 15 Continuing Improvement Melles Griot is dedicated to supporting Nanomotion II technology Care has been taken to ensure that Nanomotion II is straightforward to use and is complete in all aspects Please report errors and problems with Nanomotion II to Melles Griot MELLES GRIOT Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com General Introduction Melles Griot strives to provide the customer with a high quality high value product Because we want to ensure the continuing improvement of our products we encourage you the user of Nanomotion II to contact us with issues that you feel would improve the system With your help we can continue to produce products of the highest quality value and usefulness 1 6 Customer Service Contact Melles Griot for information about incorporating Nanomotion II into your original equipment OEM application or laboratory experiment Customer Servic
115. on Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II lt dpPosition gt Pointer to an double variable for the data return Description Reads the position of the motor in currently selected units If the motor is stopped the position is immediately returned FOR Z8 EPROM VERSION 1 0 If the motor is moving when this function is called this function will wait for the motor to stop before reading the position and returning it FOR Z8 EPROM VERSION 2 0 and greater all Nanomotion II systems The routine will immediately read and return the position of the motor regardless of whether the motor is moving or not Example nl read position 4 dpPosition Returns the current position value in the location pointed to by dpPosition nl_read_status lt mtr gt lt upStatus gt Parameters lt mtr gt Nanomover number 1 through 16 lt upStatus gt Pointer to an unsigned integer variable for the data return Description Reads the current status of the specified motor in upStatus Example nl read position 5 upStatus Returns the current position value in the location pointed to by upStatus with the following bit values 120 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Bit Meaning 1 0 Number Low Byte 0 Motor Moving Moving Stationary 1 Left
116. on that you created in the installation procedure Alternatively you can start the program by using the Run feature of the File Manager 5 1 4 Operating the Nanomotion II Control Program Nanomotion Il System Window Figure 5 1 below shows a typical system window for Nanomotion II The various menu headings are visible under the title bar Each of the other parameters is explained below Nanomotion Il System UNTITLED File Edit Setup Park Help ENANA 2 Motor Motion Motor Minus Plus Number Type Position Units Status Key Motion Range Key fist Tt foo 2 0 000000 Tee JE Disabled ien Jel a Rich Figure 5 1 Nanomotion II System window Name Identifies the name of each axis The name you select should be something that helps you identify the function of the axis i e X Translation Motor Number Identifies the Nanomover being controlled Motion Type One of the 6 available types of movement available with the Control Program tab jog step repeat absolute scan Position Absolute location of the Nanomover 52 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Units Units currently selected to measure distance See Units Window for more information Motor Status Information about the status of the Nanomover The keywords that may appear in this box are described below Motor Status Meaning Nor
117. ors The specific configuration accompanying this manual is indicated on the inside front cover 2 3 1 Controlling from an IBM Compatible PC If an IBM compatible personal computer is used there are two possible hardware configurations In the first a PC Link board is inserted in the computer and a PC interface board placed in the controller chassis 11 NCS 101 IBM This system can then be operated with the Windows Control Program or a custom application that utilizes the Windows dynamic link library DLL or links to the MS DOS C libraries All of the control choices are available using one does not preclude the other see Figure 2 1 controller IBM PC PC Link Card Nanomovers SCSI cable power switch front panel Address Switches joystick limit switches Nanomovers ac power fuses 4 computer bus 2 NANOMOTION CHASSIS Figure 2 1 IBM System Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual In the second PC configuration an IEEE 488 2 RS 232C interface board is inserted into the controller chassis and no additional hardware other than a user provided cable is added to the PC The system can then be operated with LabVIEW using either the provided drivers or the IEEE 488 2 RS 232C command set or with a user written program that controls the chosen interface port see Figure
118. overs Example WGAIN 3 0 5 Sets the gain value for Nanomover 3 If the units are millimeters for a standard Nanomover the system gain should be 0 5 WHCUR lt mtr gt lt current gt Command Write holding current Parameters lt mtr gt Nanomover Number 1 through 16 lt current gt Holding current for the Nanomover Description Sets the holding current for the specified Nanomover The holding current must be in the range 0 amps to 2 46 amps Holding current is the current to the Nanomover motor when the Nanomover is stopped between moves The default is correct for Nanomovers and most users should have no reason to change it Example WHCUR 3 0 47 Sets the holding current for Nanomover 3 to 0 47 amps WLIME lt mtr gt lt on off bits gt Command Enable limit switches Parameters mtr Nanomover Number 1 through 16 lt on off bits gt Enable Disable bits for the hardware limit switches Description Sets whether the limit switch inputs are enabled or disabled for the specified Nanomover When enabled the limit switches provide a hardware mechanism for preventing mechanical crashes When the Nanomover microcontroller detects a limit switch it will decelerate the Nanomover to a stop The lt enable bits gt is a decimal integer corresponding to the sum of the limit enable values For example if only the MELLES GRIOT 97 Artisan Technology Group Quality Instrumentation Guaranteed
119. r Parameters lt mtr gt Nanomover Number 1 through 16 on off Enable string ON or OFF Description Sets the whether the encoder stall detection mechanism is enabled ON or disabled OFF for the specified Nanomover the default status is disabled See the library function description for more information Example WENCE 2 ON Enables the encoder checking functionality for Nanomover 2 Note All tbe encoder functions in tbe Nanomotion II libraries require external bardware an encoder with electrical interface to work properly WGAIN lt mtr gt lt gain value gt Command Write system gain Parameters lt mtr gt Nanomover Number 1 through 16 lt gain value gt System gain value Description Sets the system gain in units per motor revolution for the specified Nanomover The system gain is defined as the number of units that the mechanical system travels in one revolution of the motor A Nanomover moves 0 5 millimeter for each motor revolution If the units are MM millimeters the system 96 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual gain should be 0 5 mm revolution If the units are IN inches the system gain is 0 5 25 4 or about 0 197 inches revolution This function is only needed for custom non Nanomotion ID applications The default value is correct for Nanom
120. r more information Example RHCUR 2 Retrieves the holding current value for Nanomover 2 If the holding current value is 0 47 amps the interface card will respond with the ASCII string 2 0 47000 CRLF RLIME lt mtr gt Command Read limit switches enabled Parameters mtr Nanomover Number 1 through 16 Description Reads whether the hardware limit switches are enabled or disabled for the specified Nanomover When enabled the limit switches provide a hardware mechanism for MELLES GRIOT 85 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II preventing mechanical crashes When the Nanomover microcontroller detects a limit switch it will decelerate the Nanomover to a stop The value is returned as a decimal integer corresponding to the sum of the limit enable values For example if only the minimum limit is enabled a limit enable read would return a 1 01 Hex Only the index enabled would return 4 04 Hex The default condition is minimum and maximum limits enable and the index switch disabled or 3 03 Hex Bit 0 minimum limit 1 means enabled 0 means disabled Bit 1 maximum limit 1 means enabled 0 means disabled Bit 2 index switch 1 means enabled 0 means disabled Example RLIME 2 Retrieves the limit switch enabled values for Nanomover 2 If the minimum and maximum limits are enabled for
121. ration of time to lock the Nanomover into a new position The units are always in milliseconds The lock time value should be within the Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual range of 0 to 250 milliseconds If the lock time exceeds this range the position lock time will be limited to be within the allowable range Example WLT 1 100 The lock time will be set to 100 ms for Nanomover 1 WP lt mtr gt lt pos gt Command Write position Parameters mtr Nanomover Number 1 through 16 lt pos gt Position Value Description This command sets the current position for the specified Nanomover to the pos value The Nanomover does not move only the software position variable is modified The position should be within the range specified for the Nanomotion II system otherwise the value will be limited to be within the allowable range Example WP 1 10 0 This command will set the position for Nanomover 1 to 10 0 units If the current units are millimeters the software position will be set to 10 0 mm the Nanomover will not move WSCUR lt mtr gt lt current gt Command Write stepping current Parameters mtr Nanomover Number 1 through 16 current Holding current for the Nanomover Description Sets the stepping current for the specified Nanomover The stepping current must be in the range 0 a
122. rds The Nanomotion II cards must be protected from static electricity when they are not mounted in a grounded chassis You must be grounded when handling the cards Once they are mounted in a chassis the cards and the entire system are afforded ESD protection typical for steel enclosed electronic cabinets WARNING Nanomotion II cards should never be inserted or removed from a Controller Chassis or PC chassis unless all power to that chassis is switched off 4 2 3 Location The Nanomotion II Controller Chassis should be mounted on a horizontal surface away from any sources of dust and vibration The chassis should also be protected from direct sunlight excessive heat and moisture The air slots for the cooling fan located on the side of the chassis must remain unblocked or the chassis will overheat and the thermal interlocks will cause the unit to shut down The Nanomover s should also be isolated from excessive dust and must be vibration free to operate at a high resolution MELLES GRIOT 31 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup 4 2 4 Handling Nanomotion II components especially the Nanomovers must not be subjected to physical abuse If a Nanomover is dropped it will almost certainly be permanently damaged WARNING Servicing of nanomovers must be performed by factory personnel only Opening or tampering with the nanomover
123. rivers 20 0000 eee 60 5 3 Operating with the RS 232C Interface 0 0 0 63 5 4 Serial Port Programming Hints 000002000 64 Chapter 6 Programming Nanomotion II 4 67 6 1 IEEE 488 2 and RS 232C Commands 000000 e eee 67 6 2 Programming with the PC Link Interface 2005 101 6 3 Dynamic Link Library DLL 2 e 102 6 4 MS C7 0 Library for DOS Applications 00 0000 102 MELLES GRIOT s 4 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion TOC 4 19 01 3 23 PM Page iv s Nanomotion II User s Manual Chapter 7 Application Notes eee 131 7 1 Making High Repeatability Measurements 00 131 7 2 Dealing with Temperature Variations llle 132 AppendixesS 2093 pre ore roe nox er wisi Bbw ehe eee ere anata 135 A 1 Certification and Repeatability Procedure 0 135 A 2 Setting Acceleration and Velocity 0 000000 ee 137 Index sates tae Rem E wanes ae eee ee tee EGG aa Ves 141 p MELLES CRIOT a Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 1 General Introduction 1 1 Copyright and Manual Notice This manual describes the operation of the Nanomotion II equipment distributed by Melles Griot Melles Griot and the
124. rogramming Nanomotion II lt dpBaseVelocity gt Pointer to a double variable for the data return Description Reads the base velocity for the Nanomover If the motor is currently moving this function will wait for it to stop before proceeding Example nl read bvel 6 dpBaseVelocity Returns the current base velocity setting in the location pointed to by dpBaseVelocity nl read dll version lt npVersion gt Command Read library version Parameters npVersion Pointer to an integer variable for the data return Description Returns the library version as an integer The same function name is used for both the DLL and C library version numbers The version is expressed as an integer number word That is the upper byte of the version word is the most significant digit the lower byte is the least significant digit For example version number 0x0300 would be interpreted as 3 0 0x0301 would be 3 1 etc Example nl read dll version npVersion Returns the library version in the location pointed to by npVersion nl_read_eprom_version lt mtr gt lt npVersion gt Command Read eprom version Parameters lt mtr gt Nanomover number 1 through 16 lt npVersion gt Pointer to an integer variable for the data return Description Reads the Z8 EPROM version for the specified motor The version is expressed as an integer number word That is the upper byte of the version word is the most significant digit
125. rs Description Example Set acceleration ramp mtr Nanomover number 1 through 16 ramp Acceleration velocity ramp segment 1 through 4 dAcceleration New value for the acceleration Sets the acceleration ramp corresponding to nRamp 1 4 for nMotor to dAcceleration in currently selected units per second squared If the motor is currently moving this function will wait for it to stop before proceeding nl write accel 12 3 dAcceleration Returns 0 if operation successful non 0 if operation unsuccessful 126 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual nl write base address lt uBaseAddress gt Command Parameters Description Example Set system base I O address lt uBaseAddress gt The base address for the first Nanomotion Board Sets the base I O address for the Nanomotion system If a value other than the 0x300 default for PC systems is desired this function should be used prior to calling nl init nl write base address uBaseAddress Returns 0 if operation successful non 0 if operation unsuccessful nl write bvel lt mtr gt lt dBaseVelocity gt Command Parameters Description Example Set motor base velocity lt mtr gt Nanomover number 1 through 16 lt dBaseVelocity gt New value for the base velocity Sets the base velocity for the specif
126. rs Window 56 RS 232C Commands 67 101 Nanomotion II RS 232 C connector 7 27 Configurations 6 RS 232C System 36 Nanomotion II Concepts 11 Scan 51 Nanomotion II Control Program Service Request Enable Register 69 49 Set Base Address Window 59 Defined Movement Types 50 Setting Acceleration and Velocity Motor Parameters Window 56 137 Operating Conventions 49 Setting the PC Addresses 45 Set Base Address Window 59 Setup System Window 52 Expansion Board 44 Units Window 60 Software Nanomover Motor Specifications C Library 102 21 Command Set for IEEE RS 232 OK vs Cancel 49 67 142 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Dynamic Link Library 102 LabVIEW Drivers 41 60 MS DOS Library 102 Software Installation 33 1 Sources of Error 136 Specifications 21 22 Standard Command Syntax 70 Standard Event Status Register 68 Standard Filename Extensions 50 Status Registers 69 Step 51 Stop Bits 36 Stopping Movement 16 Stops 17 synchronization 18 Syntax 70 System Components 8 Systems with Stages 137 Tab 50 Temperature Effects 32 Temperature Variations 132 Terminating Resistors 44 45 Travel Line 11 Unit Independence 11 Units to Move 50 Units Window 60 UNPARK 16 Velocity Profile 12 Vibration Isolation 32 VIs 60 Warranty Statement 1 Windows Control Program 9 49 Zero Position 17
127. s This is a standard 3 prong plug A power cable for U S usage is included with each system The chassis uses a universal input power supply that will accept 90 240 V at 47 63 Hz Fuses main chassis The fuse cartridge is located in the power cord input connector inside the chassis This fuse has a slo blow rating of 250 V T2 5AH and is a universally available size 5 mm x 20 mm Fuses motor control board There are 4 fuses located on the back panel of the motor control board These fuses have a fast blow rating at 250 V 1 6 A and are easily accessible from their twist lock holders 28 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Chapter 4 4 1 Parts List Installation and Setup Name Nanomotion II MG Part Number 11 NCS 101 IEEE Description Contains various electronics and Controller Chassis for GPIB or Serial Interface Nanomotion II Controller Chassis for IBM Compatible Computers Nanomotion Il Expansion Chassis IBM Interface Board IEEE RS 232C Interface Board 11 NCS 101 IBM 11 NCS 101 11 NIB 001 11 NIB 003 boards to communicate via IEEE and RS 232C interfaces and to control up to two Nanomovers Contains various electronics and boards to communicate via a PC Link card with Windows and MS DOS based programs Includes PC Link card DLL libraries Windows and DOS software Contains various electronics and
128. s ramp segment 1 2 3 or 4 Example RV1 2 Retrieves the velocity value for velocity acceleration ramp 1 for Nanomover 2 If the velocity value is 2 5 mm s the interface card will respond with the ASCII string 2 2 50000 CRLF RVER lt mtr gt Command Read EPROM version Parameters mtr Nanomover Number 1 through 16 Description Will return the version of the microcontroller EPROM for the specified Nanomover Example RVER 2 Retrieves the EPROM version for Nanomover 2 If the EPROM is version 3 01 the interface card will respond with the ASCII string 1 3 01000 CRLF S or S lt mtr gt Command Stop Parameters mtr Nanomover Number 1 through 16 Description This command stops all motion The command S will stop all moving Nanomovers Sometimes it is convenient to stop a single Nanomover The command S mtr will stop only the specified Nanomover Example S1 This command will stop Nanomover 1 but leave all others unaffected MELLES GRIOT 91 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II UA or U lt mtr gt Command Unpark Parameters mtr Nanomover Number 1 through 16 Description Unparks the specified Nanomovers UA will unpark all parked Nanomovers U mtr will unpark only the specified Nanomover If the specified motor s are parked this command will unpark the motor s us
129. s not require the user to supply a pointer to a variable buffer If the motor is currently moving this function will wait for it to stop before proceeding Example nl get bvel 6 Returns the base velocity for the Nanomover If there is an error the function returns 1 0 nl get dll version Command Get library version Parameters None Description Returns the library version as an integer Maps internally in the library to nl read dll version but does not require the user to supply a pointer to a variable buffer The same function name is used for both the DLL and C library version numbers The version is expressed as an integer number word That is the upper byte of the version word is the most significant digit the lower byte is the least significant digit For example version number 0x0300 would be interpreted as 3 0 0x0301 would be 3 1 etc Example nl get dll version Returns the library version as an integer If there is an error the function returns 1 nl_get_eprom_version lt mtr gt Command Get eprom version Parameters lt mtr gt Nanomover number 1 through 16 Description Returns the Z8 EPROM version for the specified Nanomover Maps internally in the library to nl read eprom version but does not require the user to MELLES GRIOT 107 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II supply a pointer to
130. santg com Introduction to Nanomotion IT accessed using the ASCILbased command set provided in Chapter 6 Programming Nanomotion II or by using the supplied LabVIEW drivers In addition control of Nanomotion II using RS 232C is fully backwards compatible with the original Nanomotion protocol 2 5 5 LabVIEW Drivers 11 NCS 101 IEEE only Nanomotion II includes a complete set of drivers for LabVIEW for Windows both for version 3 x and 4 x These drivers consist of a demo program which allows the basic setup and operation of the Nanomover along with subsidiary virtual instrument programs VIs covering most operations of the Nanomover which can be used for building unique VIs for a specific application A listing of the VIs provided with the system can be found in Chapter 5 Operating the Nanomotion II System 2 6 Nanomotion II Nanopositioning System 2 6 1 Performance Parameters While automated positioning devices have been available for many years specification of their performance is still a source of confusion The most useful and widely accepted set of performance parameters is that specified by the National Machine Tool Builders Association NMTBA The NMTBA defines three separate parameters for linear positioning devices resolution repeatability and accuracy Since these parameters are often used inappropriately their meanings are explained below 2 6 2 Resolution Resolution is a measure of the capability of the s
131. se each Nanomover can be controlled by more than one user defined axis multiple types of motion can be assigned to the same Nanomover 2 8 5 Limit Switches For a particular setup Nanomovers can be protected against movement beyond a safe range by two sets of software limits However some users may wish to install external limit switches to provide additional safeguard input to the system to protect sensitive components or instruments Nanomover systems are configured for limit switches of the normally open switch contact or opto interrupt type Whenever a closed limit switch is detected by a Nanomover the Nanomover will not be driven any farther in that direction see Chapter 3 Specifications MELLES GRIOT 17 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT 2 8 6 Position Synchronization The Nanomovers are open loop devices Extensive tests show that Nanomotion II systems exhibit perfect current pulse to motor step repeatability The microcontroller for each Nanomover always knows the position of the Nanomover from the values stored in the position counters When a system is initialized it is necessary to synchronize these counters with the Nanomover micrometer shaft that is to ensure that the zero and 25 mm in the counters represent zero and 25 mm of shaft extension There are three ways in which the system can be synchronized 1
132. spond with the ASCII string 2 400 CRLF RU lt mtr gt Command Read units Parameters mtr Nanomover Number 1 through 16 Description Reads the type of units in use The returned information will be one of the following strings NM for nanometers MI for microns MM for millimeters CM for centimeters UI for micro inches ML for mils or I for inches Example RU 4 Retrieves the units base for Nanomover 4 If the units are millimeters the interface card will respond with the ASCII string 4 MM CRLF RUSTP lt mtr gt Command Read microsteps Parameters mtr Nanomover Number 1 through 16 Description Retrieves the microsteps per cardinal motor step value for the current Nanomover Example RUSTP 2 Retrieves the microsteps per cardinal motor step value for Nanomover 2 With the default Nanomotion value of 125 microsteps per motor step so the interface card will respond with the ASCII string 2 125 CRLF 90 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual RV lt ramp gt lt mtr gt Command Read velocity Parameters lt ramp gt Velocity Acceleration Ramp Segment Number 1 through 4 mtr Nanomover Number 1 through 16 Description Reads the velocity value in the current units per second for the specified velocity acceleration ramp segment for the specified Nanomover The ramp parameter specifie
133. ssible to make highly repeatable moves if the temperature changes as little as a degree It is therefore important to make every effort to maintain the temperature of the system components at a constant level The performance of the Nanomovers is specified for 20 degrees C Often it will be necessary to maintain the temperature and operate the system at some other value It is still possible to make highly repeatable movements at other temperatures provided the operating temperature is held constant While the absolute position of the Nanomover will be slightly displaced a displacement correction can be calculated using the thermal expansion coefficients described in Installation and Setup In addition to controlling the ambient temperature as much as possible the Nanomovers must be shielded from drafts and wind currents caused by air conditioners heaters and similar equipment Do not place the Nanomovers in an environment where large temperature fluctuations can occur quickly 132 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Mounting the test or experiment on an optical table is desirable not only from the mechanical standpoint but from the temperature standpoint as well The fairly large thermal mass of the table will help keep the Nanomover temperature at a constant value Before doing any experiments or tests with the system it should be
134. started non 0 if motor is parked or an error occurs nl move relative mtr dist Command Move a specified distance Parameters mtr Nanomover number 1 through 16 dist Destination of the move Description Moves the Nanomover the specified distance The variable dDistance is in terms of currently selected units such as mm or nm The and directions of motion are as specified for the Nanomovers is extension of the micrometer shaft and is retraction of the shaft The move will be performed using the defined motion profile using the velocities accelerations and position limits in the Z8 microcontroller This function will not move a parked motor If the motor is currently moving this function will wait for it to stop before initiating a new movement Example nl move relative 12 6 MELLES GRIOT 113 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Returns 0 if motor has started non 0 if motor is parked or an error occust nl park lt mtr gt Command Parameters mtr Nanomover number 1 through 16 1 is all motors Description If nMotor is 1 through 16 this function parks that motor If nMotor is 1 this function will park all motors If the motor to be parked is currently moving this function will wait for it to stop before proceeding The function nl park moves the motor to it s closest s
135. t Units VI Nanomotion II Set Query SESER VI Nanomotion II Set Query SRER VI Nanomotion II Stop Motion VI Complete documentation is available for all of these VIs using the LabVIEW on line HELP function See the Command Reference section in Chapter 6 Software Commands for details on each command issued within the IV MELLES GRIOT 61 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System 5 2 2 The Example VI Basic Operation of the Nanomotion II system can be done via the MG Nanomotion II Example VI included in the library The values in this VI are set to the defaults as discussed in this manual MG Nanomotion Il Example vi Gf x File Edit Operate Project Windows Help ICI in 13pt Application Font zj 25 To e File Options v Park Motor Name Number Units Motion Range Position Motor Status E ui OO O mm vapo 4 bo J Edit Anis xis 2 mm w 3 0 000 o 000000 di MN 2 Edit Anis Axis 3 B 1 mm 0 000000 M Edit Axis Axis 4 mm w g o 000 o 000000 Figure 5 6 LabVIEW Example VI display Running the Example VI allows the motors to be moved either by inputting a number location or by moving the motion range indicator The motors can also be parked and unparked By scrolling up from the screen as shown
136. t a concern The error is non cumulative beyond one motor revolution Torque errors will cause the microstep size to increase or decrease in a sinusoidal manner within a tooth pitch These errors are caused by non sinusoidal torque characteristics of the motor and variations in applied energy due to imperfect electronics The Nanomotion II has torque compensation that minimizes the effects of torque error The total torque error is typically less than 50 nanometers and is generally not a concern This error is non cumulative beyond one full cardinal motor step The lead screw error is the main contributor to the overall accuracy error The accuracy certification graph is primarily a measure of the lead screw error This error is typically in the range of 500 nanometers and should be considered when making absolute measurements Software modifications can remove much of this error if it is a significant drawback in a particular application Performance of Systems with Stages It is possible to purchase the Nanomotion II system with the motors already attached to stages see the Melles Griot catalog for current part numbers and options There have not been any specifications compiled for the performance accuracy of the motors and stages as a system A 2 Setting Acceleration and Velocity Movements of the 11 NCM 001 and 11 NCM 007 Nanomover motors can be increased or decreased using the acceleration ramps discussed in Chapter 2 Introdu
137. t is connected to ground a read of the port would return a 254 OFE Hex Only the most significant bit grounded would return 127 07F Hex Both grounded would return 126 07E Hex etc Example RDIO 2 Retrieves the digital input value for Nanomotion controller board associated with Nanomover 2 addressed to 0300 Hex If the port is unconnected the value hardware read value will be OFF Hex 255 Decimal the interface card will respond with the ASCII string 2 255 CRLF REBP lt mtr gt Command Read extended backporch Parameters mtr Nanomover Number 1 through 16 Description Reads the length of the extended backporch in microsteps Extended backporches were developed to help settling times in custom non Nanomotion ID applications with high inertia low dampening loads like rotary wheels Most users should not need this functionality and should leave the extended backporch disabled Example REBP 3 Retrieves the extended backporch value in microsteps for Nanomover 3 If the extended backporch value is 200 the interface card will respond with the ASCII string 3 200 CRLF 82 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual REBPE lt mtr gt Command Read extended backporch enabled Parameters mtr Nanomover Number 1 through 16 Description Reads the whether the extended backporch is enabled or d
138. t microsteps nl read initialized nl write base address nl read microsteps nl write initialized nl get dll version nl write microsteps nl restore cfg nl read dll version nl enable limit switches mtr min max Command Enable disable limit switches Parameters mtr Nanomover number 1 through 16 min Minimum limit switch 0 for disabled 1 for enabled 104 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual max Maximum limit switch 0 for disabled 1 for enabled Description Enables or disables the limit switches for the specified motor The Nanomotion II system does not need limit switches the Absolute Left and Absolute Right stops will control the motion range of the Nanomover The default for Nanomotion II is limit switches enabled The switches are defined in the Nanomotion II system as normally open so if no switch hardware is connected the microcontroller will allow motion If the motor is currently moving this function will wait for it to stop before proceeding Example nl enable limit switches 4 11 Returns 0 if operation is successful nl exit Command Exit Nanomotion library routine Parameters None Description This function must be called when your program is through using the Nanomotion II library routines and before your program exits This function resets various interrupts set by n
139. table detent position in the retracting direction All park information is stored in internal variables and is not written to disk by this function Use nl save cfg to save the initialization Example nl park 6 Returns 0 if operation successful non 0 if operation unsuccessful nl read absleft lt mtr gt lt dpLeftLimit gt Command Reads absolute left stop position Parameters mtr Nanomover number 1 through 16 dpLeftLimit gt Pointer to a double variable for data return Description Reads the absolute left limit of travel in current units for a specified motor If the motor is currently moving this function will wait for it to stop before proceeding Example nl read absleft 4 dpLeftLimit Returns the current absolute left stop value of motor 4 in the location pointed to by dpLeftLimit nl read absright lt mtr gt lt dpRightLimit gt Command Read absolute right stop position in the location pointed to by dpLeftLimit Parameters mtr Nanomover number 1 through 16 dpRightLimit pointer to a double variable for data 114 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual return Description Reads the absolute right limit of travel in current units for a specified motor If the motor is currently moving this function will wait for it to stop before proceeding Example nl get absright 5 Returns
140. tch Figure 3 6 Connections for an opto interrupter switch The limit switch connectors are located on the back of the Nanomotion II controller chassis When using limit switches it is very important that the switch cables not be crossed so that they correspond to the correct Nanomover 26 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Bus address dip switch middle bay The settings of the 8 pin DIP switch define an address that allows the Nanomotion II system to identify each set of axes that are daisy chained together The settings of this switch should not be changed from the factory default for IEEE systems unless required for multiaxis operation See Chapter 4 Installation and Setup for more details IEEE connector top bay The IEEE GPIB connector is located on the left hand side of the card in the upper bay The mating GPIB cable is not supplied with the system GPIB cables are available from computer suppliers This connector is not present on the 11 NCS 101 expansion chassis RS 232 C connector top bay The 9 pin RS 232C serial connector is located on the right hand side of the card in the top bay The mating serial cable is not supplied with the system These are available from computer suppliers This connector is not present on the 11 NCS 101 expansion chassis Expansion bus connectors bottom bay The two S
141. ter Example SRE Returns the value in the Service Request Enable Register SRER STB Command Read Status Byte Query Parameters None Description Queries the contents of the Status Byte Register SBR The value is returned as a decimal integer corresponding to the sum of the bit values from the register Example STB Returns the value in the Status Byte Register SBR TST Command Interface Self Test Query Parameters None Description Tests the communications interface The command does not affect any Nanomovers but always returns an ASCII 1 Example TST Tests the communications interface The interface card will respond with the ASCII string 1 CR LF WAI Command Wait to Continue Command Parameters None MELLES GrRIOT 75 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II Description Prevents the Nanomotion II system from executing further commands or queries until all pending operations finish This command allows you to synchronize the operation of the system with your application program Example WAI Forces the Nanomotion II system to wait until all previous commands have been finished before continuing That is if commands lt commands sequence 1 gt WAI lt command sequence 2 gt were sent to the interface the WAI command will make sure that all the commands of lt sequence 1 gt
142. ters mtr Nanomover Number 1 through 16 Description Reads the whether the backporch is enabled or disabled for the specified Nanomover The final motor position for a move is the same whether the backporch is enabled or disabled The default for Nanomotion II is backporch enabled and most system users should have no reason to change it Example RBPE 2 Retrieves the backporch enabled value for Nanomover 2 If the backporch is enabled for the Nanomover the interface card will respond with the ASCII string 2 ON CRLF RDIO lt mtr gt Command Read digital input Goystick Parameters mtr Nanomover Number 1 through 16 Description Reads the digital input byte for the Nanomotion II motor controller board associated with mtr Each Nanomotion MELLES GRIOT a Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II II motor controller board controls two Nanomovers and has one digital input port usually used for joystick control Therefore lt mtr gt values 1 and 2 will read the same Nanomotion II motor controller board values 3 and 4 will read the next board and so on The value is returned as a decimal integer corresponding to the sum of the bit values read from the port The bits have internal pull up resistors so an unconnected line returns a high For example if only the least significant bit in the joystick por
143. tes packed with the system They are designed for use with LabVIEW for Windows Disk File Function 22 SFT 101 lv3gpib zip contains a LabVIEW library of VIs for use with LabVIEW 3 x IEEE commands 22 SFT 103 lv3visa zip contains a LabVIEW library of VIs for use with LabVIEW 3 x VISA commands 22 SFT 105 lv4gpib zip contains a LabVIEW library of VIs for use with LabVIEW 4 x IEEE commands 22 SFT 107 lv4visa zip contains a LabVIEW library of VIs for use with LabVIEW 4 x VISA commands MELLES GRIOT 41 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup 4 45 Cables A standard IEEE 488 cable or RS 232 cable with 9 pin connector is required for connection to a computer system These are not supplied with the Nanomover system If operating additional axes the expansion board is connected between the Nanomotion II Controller Chassis by a two meter cable This cable is terminated on both ends with a 50 pin D type connector The cable is physically keyed by the D connector so that it cannot be inserted incorrectly 4 4 6 Connecting a Joystick A joystick connected to the Nanomotion II Controller chassis with a IEEE 488 2 RS 232C interface board can be used to control the system even without the benefit of a host computer It is plugged into the 9 pin connector in the upper lefthand corner of the IEEE RS232 Controller chassis NOTE Tbe joystic
144. th LMC enabled see Chapter 2 Introduction to Nanomotion ID The actual command syntax is described in the following Letters given in CAPITALS must be sent exactly as shown Words enclosed in angle brackets lt gt describe variables which will be represented by numeric strings The angle brackets are for clarity in this manual Do not type the brackets in the actual program With IEEE commands several commands can be sent in one string with each 70 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual command separated by a semicolon For serial interface commands each command must be terminated with a CR or a CRLE In the examples given the values are described in terms of units The units for each Nanomover may be specified independently and all values are interpreted in terms of the specified units The words mtr refer to individual motors numbered one through sixteen Example MR 2 12 34 This command will cause Nanomover 2 to move to the left 12 34 units If units are specified as millimeters the shaft of Nanomover 2 will retract 12 34 mm 6 1 6 Command Details in Alphabetical Order CLS Command Clear Interface Status Command Parameters None Description Clears the interface status data structures the Standard Event Status Register SESR the Status Byte Register SBR except the MAV bit Example CLS C
145. the Nanomover will not move Lost Motion Control LMC On Off Controls whether the lost motion compensation feature which improves resolution and accuracy is active See Lost Motion Compensation in Theory of Nanomotion II for more information MELLES GRIOT 57 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System Length Magnitude of the LMC if it is turned on Direction Direction of the LMC if it is turned on Edit Tab Positions Window The Edit Tab Positions Window lists the position of all 16 available tab positions See the Defined Movement Types for information about how the tab positions are used by the Nanomotion II Control Windows program Edit Tab Positions Tab Positions 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 0 000000 Figure 5 3 Tab positions window Set Base Address Hardware Configuration Window The Set Base Address Window describes the addresses necessary for the software to communicate with the Nanomotion II electronics hardware 58 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Set Base Address Set Base Address Base Address Hex Nanomotion ll Board Addresses Board Motor Switch Number Numbers
146. the current absolute right limit of travel for motor 5 in the location pointed to by dpRightLimit nl read accel mtr lt ramp gt lt dpAcceleration gt Command Read acceleration value Parameters mtr Nanomover number 1 through 16 ramp Acceleration Velocity Ramp segment 1 through 4 dpAcceleration Pointer to a double variable for data return Description Reads the acceleration value for the specified ramp for the Nanomover If the motor is currently moving this function will wait for it to stop before proceeding Example nl read accel 12 3 dpAcceleration Returns the acceleration value for the third segment of the twelfth motor in the location pointed to by dpAcceleration nl_read_base_address lt upBaseAddress gt Command Read current base address for the system Parameters lt upBaseAddress gt Pointer to unsigned variable for the data return Description Reads the current base I O address for the system If the motor is currently moving this function will wait for it to stop before proceeding Example nl read base address upBaseAddress Returns the current system base address value in the location pointed to by upBaseAddress nl read bvel lt mtr gt lt dpBaseVelocity gt Command Read base velocity Parameters mtr Nanomover number 1 through 16 MELLES GRIOT 115 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com P
147. the lower byte is the least significant digit For example version number 0x0300 would be interpreted as 3 0 0x0301 would be 3 1 etc If the motor is currently moving this function will wait for it to stop before proceeding Example nl read eprom version 3 npVersion Returns the EPROM version for the motor in the location pointed to by npVersion 116 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual nl read initialized nplnitialized Command Read initialization call status Parameters lt npInitialized gt Pointer to an integer variable for the data return Description Reads the flag whether nl init has been called or not so programs at runtime can know when not to call it again Example nl read initialized npInitialized Returns the initialized flag value in the location pointed to by npInitialized It returns 1 if nl init has been already called Returns O if nl init has not been called nl read joysticks lt mtr gt lt upJoyvalue gt Command Read joystick value Parameters mtr Nanomover number 1 through 16 upJoyvalue Pointer to the location for the data return Description Reads the input from the Nanomotion I joystick port for the specified motor If the motor is currently moving this function will wait for it to stop before proceeding This function only works on Nanomotion I hardware Nanomotion II
148. this controller needs to be daisy chained between the other two The Master Slave jumper on this board should remain set to Slave 3 Set address switches on the back of the controller at different addresses for each controller box following the instructions in the table below The 11 NCS 101 IEFE controller s address needs to remain at 300 the address set at the factory 4 Daisy chain the controllers together with the supplied expansion cables Remember to keep the controllers with terminating resistors installed at the ends of the chain NOTE The joystick will only operate without computer control on tbe 11 NCS IOI IEEE controller box in this configuration 11 NCS 101 IEEE with 11 NIB 001 expansion card IEEE host computer 11 NCS 101 with 11 NCS 101 resistors removed 2 units Figure 4 6 Hookup for eight axes of motion MELLES GRIOT 43 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Installation and Setup Expansion Board Setup When using the IEEE RS232 System with more than two motors the expansion board is used to daisy chain controllers together Remove the board from its protective bag and identify the bottom slot on the Controller Chassis with the IEEE RS 232 interface board Remove the cover from this slot Set the Jumper at J1 Master Slave jumper to Master see Figure 4 7 for jumper settings Insert the board into the slot ensuring that it is
149. tines know where the motors are currently parked Generally the configuration information should be updated into the configuration array immediately after the Nanomotion II library routines are initialized with nl init The configuration information is obtained from a CFG file and the configuration array is automatically updated when nl restore cfg is called The string cpPathname should be a NULL terminated path and filename that this nl restore cfg routine will use to load the information that was previously saved with the nl save cfg function If only the filename is used the current directory will receive the configuration file The MS DOS library version of this function uses a binary data CFG file The DLL version uses an ASCII INI file Example nl restore cfg cpPathname Returns O if operation successful non 0 if operation unsuccessful nl save cfg cpPathname Command Save configuration to file Parameters lt cpPathName gt A pointer to a string containing the path and filename of the configuration file containing the configuration data Description This function writes the park information to disk in a configuration file The string cpPathname should be a NULL terminated path and filename The configuration file can then later be used by the nl restore cfg function to retrieve the Nanomover information when restoring the Nanomotion II system from a hardware reset or power down condition The MS DOS li
150. tioner motor s The motor moves in response causing the micrometer screw to turn resulting in the desired linear motion 2 2 History of Nanomotion Nanomotion II was released in 1995 as a successor to the highly successful Nanomotion micropositioning system While externally very similar to its predecessor Nanomotion II is significantly improved It offers better resolution 10 nm instead of 50 nm an updated MS Windows based control application a dynamic link library DLL for Windows programming an IEEE and RS232 interface for advanced users and LabVIEW drivers With Nanomotion II Melles Griot and the manufacturer continue to set the standard for mechanized nanometric positioning for the next generation of demanding applications MELLES GRIOT 5 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT 2 3 Nanomotion II Configurations There are three basic configurations of the Nanomotion II controller the 11 NCS 101 IBM controller designed to operate with an IBM compatible personal computer using a PC Link card mounted in the host computer the 11 NCS 101 IEEE controller intended for use with an IEEE 488 general purpose interface bus GPIB or an RS 232C serial interface and the 11 NCS 101 expansion controller used in conjunction with the 11 NCS 101 IBM or 11 NCS 101 IEEE when it is necessary to control more than two Nanomover mot
151. to the body or b support or sustain life and whose failure to perform when properly used in accordance MELLES GRIOT 1 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com General Introduction with instructions for use provided in the labeling and associated literature can be reasonably expected to result in a significant injury to the user 2 A critical component is any component of a life support device or system whose failure to perform can be reasonably expected to cause the failure of the life support device or system or to affect its safety or effectiveness 1 3 Manufacturer Statement Nanomotion II is manufactured by Applied Precision Inc 1040 12th Avenue NW Issaquah WA 98027 Nanomotion II is a registered trademark of Applied Precision Inc 1 4 How To Use The Manual 1 4 1 Overview This manual is a guide to the operation and use of the Nanomotion II micropositioning system in a user friendly and readable format The manual will provide all of the information that needed to understand and operate the instrument In Chapter 2 Introduction to Nanomotion II the background and capabilities of the instrument are introduced including concepts important to understanding the instrument functionality Chapter 3 Specifications describes the detailed performance parameters of the system and identifies the controls indicators and connectors on the system
152. ual for correct settings if the response is not as expected or contact Melles Griot customer support before continuing 5 3 Operating with the RS 232C Interface 5 3 1 Using the Windows HyperTerminal Program The Windows terminal screen shown in Figure 5 8 below shows the default settings required to communicate with the Nanomotion II RS 232 interface The characters at the left of the screen are interactive commands given to the system NOTE Tbe baud rate can be changed by configuring tbe dip switches on Switch 1 as shown in Section 4 4 MELLES GRIOT 63 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System Figure 5 8 Windows HyperTerminal Screen 5 4 Serial Port Programming Hints Each computer has different requirements for using its RS 232C serial interface ports You must consult the documentation for specific informa tion about using the ports to their full capability Serial ports are notorious for being simple devices that are difficult to operate and debug because of the uncertainty that can exist over what is actually being received by the intended target device Any unspecified parameters will be assigned default values The BREAK command should be sent and the ACK response received at the beginning of each program in order to synchronize the serial systems In addition the RESET command should be sent to cle
153. urned off a read of the port would return a 254 OFE Hex Only the most significant bit PON turned on would return 128 080 Hex etc ESE Queries the Event Status Enable Register ESER If only the PON bit is active in the register the interface board would return the ASCII string 128 CR LF Standard Event Status Register Query None Query the contents of the Event Status Register SESR ESR also clears the register reading the register clears it The value is returned as a decimal integer corresponding to the sum of the bit values from the register For example if only the least significant bit in the register OPC is turned off a read of the port would return a 254 OFE Hex Only the most significant bit PON turned on would return 128 080 Hex etc ESR Queries the Event Status Enable Register ESER If only the PON bit is active in the register the interface board would return the ASCII string 128 CR LF Identification Query None 72 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Description Query the identifying information about the instrument and its firmware Example IDN Returns the Nanomotion II identification code The interface board might return the ASCII string Melles Griot Nanomotion II GPIB RS232 C Interface v2 0 CR LF LOC Command
154. vement Repeat will not move outside the left or right stops Absolute ABSOLUTE is used to move the selected Nanomover s to either the home or Zero position see section 2 8 Pressing a plus ABSOLUTE key causes the Nanomover to move to the Home position while pressing a minus ABSOLUTE key causes the Nanomover to move to the zero position This command is useful for restoring the Nanomover to a convenient starting point Scan SCAN causes the selected Nanomover s to go back and forth between the closest Tabs When a plus SCAN key is pressed the Nanomover will go to the closest Tab that is located in a positive direction It will then scan back and forth between that Tab and the closest negative left Tab If the Nanomover is already positioned at a Tab location when the plus SCAN key is pressed it will scan between the current Tab and the closest left Tab The Nanomover will continue scanning until the minus SCAN key is pressed When SCAN is MELLES GRIOT 5I Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Operating tbe Nanomotion II System stopped using the minus scan key the Nanomover will always stop at the right Tab position When a minus SCAN key is pressed to initiate scan all directions described in the preceding paragraph are reversed 5 1 3 Starting the Nanomotion II Control Program Start the Control Program by double clicking on the Nanomotion II ic
155. will stop acceleration whenever a velocity value is lower than the previous ramp velocity or if it encounters an acceleration value of zero In a trapezoidal motion profile only one acceleration ramp is used to reach slew velocity It is interesting to note that for many applications there is a negligible difference in performance between using all four acceleration ramps and using only one ramp In fact the default acceleration values use only one ramp However there are applications involving heavy loads or loads with high inertia where performance will vary significantly with changes in the acceleration curves Other applications may need to have movements occur very quickly or very smoothly Redefining the acceleration curves can improve system performance for all of these situations Units per second Minimum Velocity Maximum Velocity Nanometers nm 5 000 2 500 000 Micrometers yum 5 2 500 Millimeters mm 0 00 2 50 Centimeters cm 0 05 250 Microinches in 197 984 000 Mils 1 1000 in 1 97 984 Inches in 0 00197 0 984 Table 2 1 Nanomotion II Velocity Range For most loads the maximum Nanomover acceleration should be less than 1250 mm sec The accelerations specified in the acceleration ramp must be within the following ranges MELLES GRIOT 13 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Introduction to Nanomotion IT Units Maxi
156. xit In addition to initializing software variables nl init actually performs a hardware reset on the Nanomotion II card This guarantees that the hardware is also initialized properly whenever this 112 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual function is called If nl init returns an error condition non O value nl exit must still be called before exiting your program since the interrupts may have been changed Example nl init Returns 0 if operation successful non 0 if operation unsuccessful or no cards present nl move absolute lt mtr gt lt dest gt Command Move to specified destination Parameters mtr Nanomover number 1 through 16 dest Destination of the move Description Moves the motor to the specified destination The variable dDestination is in terms of currently selected distance units such as mm or nm The and directions of motion are as specified for the Nanomovers is extension of the micrometer shaft and is retraction of the shaft The move will be performed using the defined motion profile using the velocities accelerations and position limits in the Z8 microcontroller This function will not move a parked motor If the motor is currently moving this function will wait for it to stop before initiating a new movement Example nl move absolute 4 3 Returns 0 if motor has
157. y Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual 4 3 Installing the IBM System 4 3 1 Hardware Installation 1 Read the general precautions covered in section 4 2 2 If you are installing more than one chassis it is recommended that you get each chassis to work as a single system prior to setting up as a multiple axis system 3 Hook up power hook Nanomover motor cable to the motor connections on the back If you have a joystick this can be plugged in and used to check movement of the motors and or stages 4 Install the PC Link board in the bus slot of the host IBM compatible computer Consult your PC manual for special instructions regarding inserting boards and remember to remove the cover plate over the appropriate slot so that the cable connector is accessible 5 Connect the PC Link card to the controller chassis using the cable provided This cable is terminated on both ends with a 50 pin D type connector The cable is physically keyed by the D connector so that it cannot be inserted incorrectly The cable can be attached to either of the two SCSI 2 connectors on the rear panel of the controller chassis 6 If additional axes need to be used refer to section 4 4 7 for detailed instructions 4 3 2 PC Software Installation Windows Systems If you use the Windows operating system insert the disk labeled Nanomotion II Software into the floppy disk drive St
158. y Instrumentation Guaranteed 888 88 SOURCE www artisantg com Programming Nanomotion II is terminated with CR If LF is set to ON all data is terminated with CRLE The default system status is ON This command affects all Nanomovers in the system Example LF OFF This command changes the terminating character to CR alone rather than the default value of CRLF MA lt mtr gt lt dest gt Command Move absolute Parameters mtr Nanomover Number 1 through 16 dest Destination for move Description Move to a given absolute position The Nanomover will move to the position specified regardless of the current position The necessary move may be in a plus or minus direction If the position exceeds an absolute stop the Nanomover will only move to the stop position and will not go further Example MA 1 1 0 This command would cause the Nanomover to move to the 1 0 units position MON mtr on off Command Move Monitor Parameters mtr Nanomover Number 1 through 16 on off Enable string ON or OFF Description Sets the monitor function ON or OFF the default status is OFF This is convenient for use in interrupt driven systems to indicate the end of movement and the need for further instructions If the monitor function is set to ON it is activated whenever a MR move relative or MA move absolute command is issued for the assigned Nanomover number When the mon
159. y inspect equipment before purchasing with Visit us on the web at www artisantg com 7 for more our interactive website at www instraview com 7 information on price quotations drivers technical LEASING MONTHLY specifications manuals and documentation RENTALS ITAR CERTIFIED yop aed Contact us 888 88 SOURCE sales artisantg com www artisantg com
160. ystem design It is defined as the smallest move that the system is capable of making Each movement is therefore an integer multiple of the resolution For example a system with a resolution of 100 nanometers is capable of moving to positions N x 100 nanometers e g 100 200 or 300 nm away from its present location A system with a resolution of 100 nm would not be able to move to a location 150 nm from its present position Smaller resolution provides finer gradations of movement The resolution of the Nanomotion II system is 10 nm which allows it to execute moves of 10 20 30 nm etc up to the limit of the travel range 2 6 3 Repeatability Repeatability is a measure of one type of system error the repositioning error It is defined as the error within which a given position can be reproduced The smaller the value for repeatability the better the system 10 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Specifically repeatability is the difference in absolute position that occurs when the system is moved to the same point at several different times Unidirectional and bidirectional repeatability can be separately defined Unidirectional refers to a situation where the target position is always approached from the same side Bidirectional repeatability is typically much worse than unidirectional repeatability because of hysteresis and ba
161. ystick control of axes will no longer be permitted Example REM Enables interface control of the Nanomotion II system and disables Joystick control RST Command Reset Command Parameters None Description Returns the system to a known state but does not purge any aliases or stored settings For the Nanomotion II system this command stops all Nanomovers and clears the communications interface This is slightly different from the RES command which does change the motor settings sets them back to a default state Example RST Resets the Nanomotion II system without changing any aliases or stored settings SRE lt on off bits gt Command Service Request Enable Parameters lt on off bits gt The decimal sum of the bits to be set 1 in the register Description Sets the bits in the Service Request Enable Register SRER The value is determined as a decimal integer corresponding to the sum of the bit values from the register 74 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com Nanomotion II User Manual Example SRE 0 Sets the Service Request Enable Register SRER to all zeros clears the register SRE Command Service Request Enable Parameters None Description Queries the bits in the Service Request Enable Register SRER The value is returned as a decimal integer corresponding to the sum of the bit values from the regis

CVI Melles Griot Nanomotion II Manual

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