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Contents
1. User Manual O 201 Migun Techno World 533 Yongsan Dong Yuseong Gu Daejeon City KOREA 305 500 Tel 82 42 861 1687 1688 Fax 82 42 861 1689 E mail COXEM Table of contents Before using this Product Please be sure to the Caution and Warning in Section 6 1 Components 2 Names of parts 2 1 Front Side 2 2 Back Side 3 How to use lon Coater 3 1 Using Buttons 3 2 Sequence of Coating 3 3 Coating 3 4 Time to reach the Vacuum 3 5 Checking Error 4 Replacing the Target 5 Cleaning the Vacuum unit Chamber 6 Caution and Warning User Manual SPT 20 ION COATER GS ERA REP BUE 533 02435385 2012 COXE 1 8 042 861 1687 1688 Fax 022 861 1689 Power Cable User Manual 2 1 Front Side um OE A A A A A A A A A A A TIR w m 4 Vacuum Unit Chamber Target Main Body Case 1 2 2 2 Top Side Sd N 1 Vacuum Unit Chamber and Target 2 Display LCD 3 Touch Buttons e Start Start Coating with a beef Press the button for 2 3seconds e Up amp Down Arrow Change Target Current Time values Set Select items of Target Current and Time 4 Soft Push Power Button for Off On LED display OFF Press the Push button for 2 3 sec in Setup mode then turned off LED with a beef ON In the Off state press the Push button COXEM Il 2 3 Back Side 1 2 3 4 Main Power Cord and Switch Fuse Holde2. 2 3 4 5 6 7 1 Should prepare cleaning air dust removal alcohol and wiper occurs less lint and dirt for precision equipment To apply an appropriate amount of alcohol to the wiper To clean the inside of contaminated Chamber To clean Rubber Pad after separation from Chamber To clean the Up Down flange surface of Chamber Blow out dust all on the surface and flange which has been cleaned _COXEM_ 6 1 CAUTION Should be careful on the bending of the vacuum hose at the time of installation and use May take a long time to vacuum Before installing make sure the ground wire is connected to the consent outlet By rotating the sample stand depending on the height of the sample the distance between the target and the height of sample should be maintained at 2 3cm If the pump does not work make sure the power switch of the pump Periodically the target and vacuum devices should be cleaned of dust Vacuum can take a long time in case of re use right after awaiting in the air for more than two days without using Coater 6 2 WARNING If necessary the emergency stop during the real Coating progress Do not turn off the Main Power switch but press the Start button for 3 5 seconds to stop safely working of Coater Do not disassemble or re assemble on your own needs There is a risk of electric shock When you have a problem please contact us at the following 201 Migun Techno World 533 Yongsan Do
3. About 0 1 Torr Maximum lon Voltage 3 KV lon Current 1 9 mA Coating Time 10 500 sec 10 sec step X Request A S if you have any problem 201 Migun Techno World 533 Yongsan Dong Yuseong Gu Daejeon City KOREA 305 500 Tel 82 42 861 1687 1688 Fax 82 42 861 1689 http www coxem com E mail infor coxem com _COXEM
4. er paste or coated the side of sample with a tilted support 3 5 Time to reach Vacuum 1 0 10 1 Torr 1 within 3 minutes 3 6 Check Errors 1 V Sensor Error Generated Vacuum Fault gt Request A S 2 Touch SW Error Generated touch program error gt Request A S X Request A S 4201 Migun Techno World 533 Yongsan Dong Yuseong Gu Daejeon City KOREA 305 500 Tel 82 42 861 1687 1688 Fax 82 42 861 1689 http www coxem com E mail infor coxem com _COXEM 3 7 Complete Coating 1 2 3 4 gt Confirm Target set in Setup Mode 2 Thickness Coated G Coating Time An indicated thickness is an tested amp calculated data then the actual values can vary according to conditions 4 Setting Current Value After completion of Coating press any button to re enter into Setup Mode X After using Coating 50th when Clean Message is displayed separate the Chamber and verify Chamber status and re use after Cleaning Refer to Chapter 5 Replacement Procedure 1 2 3 4 1 2 3 4 Wearing vinyl gloves then separate the insulation support of the electrode After tilting the upper surface flange 45 Remove the nut of the high voltage electrode plate Tilt 45 also when you re assemble When you assemble Target it should be confirmed the Target is fully contacted with nuts Target dimensions 50 80 0 1t _COXEM Replacement Procedure 1
5. etting Target Current and Time press Start button 2 3 sec then Coating is started with beep sound Emergency Stop Press Start button 3 4sec during Coating then stopped with displaying CANCEL 7 In the main power ON state you can off LED by pressing the Soft Push Power button during Setup Mode OFF Press the Push button for 2 3 sec in Setup mode then turned off LED with a beef ON Press the Push button in the Off CO EM 3 3 Sequence of Coating 1 Press the Start button 2 3 seconds 2 Start Coating after Vacuum Level 100 1 0 10 Torr 3 Complete Coating when Process time is same as Set time 3 4 Setting Current amp Time of Coating 1 Setting Value of Current amp Time 1 9mA 10 500sec Refer to table below Normal 3mA Normal 120sec If sample particles are less powder or If sample particles are less powder or curvature increase Current curvature increase Time If sample particles are large or plane If sample particles are large or plane decrease Current decrease Time X If there are severe curvatures in cross section of Sample to observe it should be coated with the tilted Sample support com MI 2 Coating of Curvature Sample Silver Paste In case of severe curvature or large size of samples non conductive in order to prevent the sample s Charge up phenomenon it should be coated the wall of samples and the sample support with a silv
6. ng Yuseong Gu Daejeon City KOREA 305 500 Tel 82 42 861 1687 1688 Fax 82 42 861 1689 http www coxem com E mail infor coxem com _COXEM 7 Thickness Rate Graph Au Target amie m ae Sm 10 aie mA 5 25 Pt Target gt 15 g 77 gt 3mA 10 E 5mA NAS e m 5 30 Pd Target 25 20 LS 15 CT OT sd p IM PT s Sn 1h i af mA 5 100s 200s 300s 3 Det WD as 200 nm O 200000x TLD 4 Det WE 10 0 KY 3 0 200000 TLD 47 gt LLI LLI LL gt Ko Le OP S gt UN gt UN O O Di a 00 OkV 3 Acc Y Spot Magn 10 Acc V Spot Magn PT Grain x200 000 Au Grain x200 000 9 Sample Photos Measured FE SEM Carbon Powder x50K x100K Acc V SpotMagn Det WD FT 1xm Acc V SpotMagn Det WD H_ 500 nm 10 0 KV 3 0 50000x TLD 4 9 10 0 KV 3 0 100000x TLD 4 9 i Acc V Spot Magn Det WD FT 1 um Acc V SpotMagn Det WD H_ 500 nm 10 0 kv 3 0 50000x TLD 4 9 10 0 KV 3 0 100000x TLD 4 9 Acc V SpotMagn Det WD 1um Acc V SpotMagn Det WD H_ 500 nm 10 0 kV 3 0 50000x TLD 5 0 10 0 kV 3 0 100000x TLD 5 0 10 Specifications of SPT 20 Specifications of SPT 20 Power Consumption AC 220V 500W Weight 10 Kg Dimension 420 mm W x 220 mm D x 230 mm H Rotary Pump 50 L min 60Hz AC 220V 150 W 14 5Kg Diameter of Target 50 8 mm Operating Vacuum
7. r Power Cord for Rotary Pump Vacuum Valve Connector Connect the Rotary Pump Hose and the Vacuum Valve using by NW16 Clamp X Request A S when moving the installation 201 Migun Techno World 533 Yongsan Dong Yuseong Gu Daejeon City KOREA 305 500 Tel 82 42 861 1687 1688 Fax 82 42 861 1689 http www coxem com E mail infor coxem com _COXEM 3 How to Use lon Coater 3 1 Self Diagnosis First ON the Main Power Switch on the back side 1 POWER OK with Power Check Beep 2 Vacuum Sensor OK with Vacuum Check Beep 3 Touch Program OK with Switch Check Beep 4 Enter into Set Mode at the end of the 3 steps Self Diagnosis above 3 2 Using Buttons shown in Section 2 2 1 Main power switch ON 2 Setting mode If main power is On Enter into Setup mode on LCD 3 Setting Target Set Target using by Up Down buttons in lt Fig 1 gt Setup Mode 4 Setting Current Select Current by pressing Set button in Setup Mode Set Coating Current Values by Up Down buttons GQ Range 1 9mA 1mA increments lt Fig 2 gt 5 Setting Coating Time Select Time by pressing Set button in Setup Mode Set Coating Time Values by Up Down buttons Range 10 500sec 10 second increments Maximum Coating Time SO lt Fig 3 gt 10 500 sec 10 400sec 10 300 sec im 10 240 sec 10 180 sec OmA selection is for vacuum dry 0 1 caer 6 After s
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