Triillium Cryo-Plex 10 Cryopump Manual
Contents
1. sse nennen ennt nennen rennen ense tenen sene ene 11 8 3 4 Reconnect Gas Lines to Complete Decontamination eese enean ennt nnn nnne nnns 12 8 4 Cleaning Equiptmeft ioo noi there eua een Renan pasen viae eua S a eK E aa VER ERES GRE FENTN ERE RUN EE E SENS E RENE SEED RE YER RERI XX NE eR Ca SNAM HA 12 8 5 Returning EquipImBlit esse vena icchsshevseadehessecechesseaccues seasahcsduavanesainsanisajeveaes sig ERR SERA naga sedatwsdecbvanad epa REX E Roy RN SERRE RIA 12 List of Figures Figure 1 Cryo Plex 10 Cryopump with CF Inlet Dimensions essen nenne nnn nennt rn nn isses entra nana nis 4 Figure 2 Cryo Plex 10 Cryopump with ANSI Flange Dimension sesesessseeeesee eene nennen enne enhn nnns en nn nnns sre en n rna nnns 5 Figure 3 Connection DIagtalit 1 erronee eto Posee nomeo ea oce raus eeu peus eene eas ege ppp cR ue CREER MEO SRERS end EE eu ua Paus esos eu Fue Portu PE cst EE d qs 7 Tabl 4 1 Cryo Plex 10 Chaftacteristics iore entr tri In ctr ke e Roche Eoo ince E ERE CER o Rye ines FER LC ER EE RENS TER FARE REESE ERE aeeai TE Rer Ro PR 3 Table 4 2 Cryo Plex 10 Cryopump Ordering Information Cryopump Part NUMDED cc cccccccessssssesecececsesseeeseesceeseeseeeeeseeeees 6 Table 4 3 Optional Accessories and Replacement Parts cccccccccccssssseccecsesssesecececeecseseeaeseeecessesneaeseeeceseeaeeeseeeceeseseaeseeeeeeees 6 Table 7 1 Trouble Shooting2. Roughing Pump as Flange Figure 3 Connection Diagram 5 5 Installing a Roughing Pump To install a roughing pump follow these steps 1 Connect the roughing pump system directly to the accessory port located on the cryopump 2 Avacuum gauge and roughing valve should be installed as close as possible to the cryopump 3 Install an oil back streaming device fore line trap in series to the roughing pump 97 00032 000 7 User s Manual Rev A November 2015 CP10 Cryogenic Pump 6 Operations and Controls 6 1 Cryopump Preperation When a cryopump has been in storage for a period of time or when receiving a new one the charcoal array of the cryopump may be loaded with moisture or other contaminants A so called Extended Nitrogen Purge process should be performed to get the cryopump to its desired condition before cool down operation Follow these steps of the Extended Nitrogen Purge process 1 Install the cryopump per procedures described in Section 5 4 leak check all mounting seals and valves to ensure the cryopump is leak tight 2 Make sure the cryopump is at room temperature d Using a gas supply flex line with proper connections to connect a nitrogen gas N2 cylinder with a pressure regulator to the purge gas valve of the cryopump Open the purge gas valve and regulate the pressure of nitrogen gas to between 18 to 30 psi Turn on the purge gas heater Continue the purging process for at least 4 hours
3. Turn off the purge gas heater and close the purge gas valve 9o m gx ut gm Clean and then remount the o ring of the relief valve on the cryopump The cryopump unit is now ready for start up operation 6 2 Normal Operation 6 2 1 Cryopump Start Up 1 Make sure the gate valve to the main chamber is closed Open the rough valve of the cryopump and rough to appropriate crossover pressure level 3 Perform Rate of Rise test to verify proper regeneration and leak rate of the cryopump Normally a 10 micron minute rate of rise is considered acceptable If the Rate of Rise test fails leak check the cryopump and the gate valve first and fix any leak that is present If the test still fails after that repeat the Extended Nitrogen Purge process described in Section 6 1 Rough pump the cryopump back to its appropriate crossover pressure level Close the rough valve and start the compressor that runs the cryopump When a cryopump is operating properly it usually takes about 907100 minutes to reach 20K So wt om Once the cryopump reaches its operating cryogenic temperature observe the pressure in the main vacuum chamber before opening the gate valve and starting cryopumping the chamber 8 Thecrossover of the main vacuum chamber from rough pump to cryopumping should be at 300 torr liters Only open the gate valve when this condition is met 6 2 2 Rough Pumping Observe the following cautions when rough pumping the cryopump Caution Do not beg
4. 5 3 Tool Needed for Installation The Installation Kit for the Cryo Plex 10 cryopump is offered as an optional accessory that can be ordered from Trillium US Inc Refer to Table 4 3 for the part number 5 4 Installing the Cryo Plex 10 Cryopump Figure 3 shows a typical installation diagram when making connections Follow these steps to install the Cryo Plex 10 cryopump 1 Clean all sealing surfaces apply a thin film of vacuum grease to inlet flange o ring and install it 97 00032 000 6 4 A lt User s Manual Rev A November 2015 CP10 Cryogenic Pump Bolt cryopump to the chamber hi vac gate valve Attach roughing valve to the KF 25 flange on the purge tube adaptor of the cryopump Remove dust plugs from any Aeroquip Self Sealing Couplings and inspect gasket seals Vx qe m d Connect helium gas lines in the following order a Usea helium flex line to connect the Return ports on both the Cryo Plex 10 and the compressor b Useahelium flex line to connect the Supply ports on both the Cryo Plex 10 and the compressor Check gas pressure gauge per compressor specifications Connect cold head drive cable from cryopump to compressor Connect diode cable to temperature monitor if applicable O o N 9 Connect main power cable per compressor specifications Purge Gas Heater Optional Purge Gas Valve Optional Vacuum Cold Head Drive Cable Gauge Roughing Foreline Trap Cold Head Compressor Adsorber
5. Proced res reperti a rper oe hann edo natn a RR ERE eu ERR ES K ed Aa aai aoaaa ea r Rosii Kao 9 97 00032 000 iv e A User s Manual Rev A November 2015 CP10 Cryogenic Pump 1 Revision History Date Revision ECR Description of Change September 2006 1 0 1 Original Release March 2013 1 2 Format and Facilities Address Update November 2015 A 2887 Rebranding and format changes Document Part Number 97 00032 000 97 00032 000 V A User s Manual Rev A November 2015 CP10 Cryogenic Pump 2 Preface 2 1 About Trillium US Inc Trillium US Inc a wholly owned subsidiary of Trillium US Inc specializes in the manufacture and repair of cryogenic vacuum pumps cryocoolers refrigerators and helium compressors for semiconductor optical coating linear accelerators medical equipment and R amp D applications You can find just what you need from our range of products and support services e New Equipment cryopumps such as the Cryo Plex 10 cryopump described in this manual compressors cryocoolers and cryopump controllers e Comprehensive range of accessories for the installation of whole systems and a complete range of spare parts to repair cryopumps and compressors 2 2 Other Services from Trillium US Inc Trillium US Inc offers comprehensive refurbishment services for its own equipment as well as for that of most of our competitors Our products and services are available through our
6. RE Oa rape ee FER os van seb a ENS ANNE N VU E FRNR XR aA GER EA ke sre EE ea Ta c 6 5 Toc e 6 5 1 Safety Warning S isecesieoe tet eoo EXER EN EREEERRVARERERT EGER ERERER DERE FERE VNERRFROE E TERERRERR RR FEST RNTE ERR RATE RAN ANE AXE DRE HANE RET ER ERR RSRERRRER ERR URRETE 6 5 2 Inspect Equipment Before Installing iecore nino eene h aep eR oeei Ron Cn rta e area ena EY o Ee dean ERSTER Eaa EEEE 6 5 3 Tool Needed for Installation iuris oen eene orta una no tk ngon iin danh ta nenne dann n sits ini iioii ienasi Erindi 6 5 4 Installing the Cryo Plex 10 Cryoputmp sass ssassn und enn gera o cha dun necne xn ne dune a de due nuu 6 5 5 Installing a Roughing Pump cccccccssssssceccceceesesessesececesesassesececeeeeseeseseeecceceessseesesececeeseeesesececeeseaesseseesceeeeeeaseseeeesees 7 6 OPEratiONns aMd CONTCONS TTD EET RITE 8 6 1 Cryopump PrebetratiObi eodeni ert ent Sekt a eroe e eni ere den es coe Yoda e eee H es hoe re de e denke PUE ORA cost uumacdedegedecesbecdncacncedtcsanceaccnucdetcesds 8 6 2 Nolim EIRO gho Mig sci RR TL 8 6 2 1 Cryopump Start Up EE 8 6 2 2 Rough P mbpllg s uci nen e a a A A E Aaa EE eaaa E a a a ENG sea ERA 8 6 2 3 Regeneration of the CryopuM pissis sao cos aono eiae ved sus da ER cx E a Ea aaa VERS Fan EXE VE AME A SEa Eaa aaa 9 6 2 3 1 Unassisted R egen ratiON soisissa iaeia aE aa a cad sebaossdeunesaedaadsucnasaeeanaastee
7. Regenerate the cryopump per Section 97 00032 000 9 4 A lt User s Manual Rev A November 2015 CP10 Cryogenic Pump Problem Possible Cause Corrective Action 6 2 3 High base pressure of vacuum system and the cryopump temperature is above 20K High partial pressure of non condensable helium hydrogen or neon within the cryopump because the 15K array has reached its full Capacity Excessive thermal load Decrease in cryopump cold head performance Regenerate the cryopump using the instructions in Section 6 2 3 Re cool the cryopump making note of a Cool down time to the operating temperature b Time to achieve the desired operating vacuum level of the cryopump Compare these figures to those indicated in the operating log If they are significantly different then refer to Possible Cause 3 of this problem Decrease in cryopump cold head performance Reduce the thermal radiation load by a Shielding the cryopump b Lowering the temperature of the radiating surface If the helium pressure gauge reads below the normal operating pressure add helium gas according to procedure described in the compressor manual Regenerate and re cool the cryopump If the temperature remains above 20K the problem may be within the cold head and contact Trillium US Inc for assistance Cryopump fails to cool down to the required operating temperature or takes too long to reach that temperature Low
8. by furnishing this information Trillium US Inc grants no license expressed or implied under any patents copyrights trademarks trade secrets or other intellectual property rights of Trillium US Inc Trillium US Inc copyright owner of the information contained herein gives consent for copies to be made of the information only for use within the customer s organization as related to the use of Trillium US Inc products The same consent is given for similar information contained on any Trillium US Inc Web site or disk used to distribute information to a customer Trillium US Inc does give consent to the copying or reproduction by any means of the information contained herein for general distribution advertising or promotional purposes or for creating any work for resale The names of products of Trillium US Inc or other vendors and suppliers appearing in this document may be trademarks or service marks of their respective owners that may be registered in some jurisdictions A list of Trillium US Inc trademarks and service marks can be found at http www trilliumus com Trillium US Inc 1340 Airport Commerce Dr Bldg 1 Suite 175 Austin Texas 78741 USA TEL 1 512 441 6893 FAX 1 512 443 6665 Email cryo sales trilliumus com Copyright 2015 by Trillium US Inc All rights reserved 7a 97 00032 000 ii A User s Manual Rev A November 2015 CP10 Cryogenic Pump Table of Contents 1 REVISION HISKORY ts V 2 dia
9. global network of agents and dealers e Repair and refurbishment services We offer our own quality products as well as most other manufactures models often with off the shelf availability e Exchanges We offer our own quality products as well as most makes of cryopumps and helium compressors which are refurbished and fully warranted e Technical Support Our support engineers will help determine if your cryopump system is operating correctly so that you can get your system back to optimum efficiency as soon as possible o To contact Trillium US Inc Technical Support o E mail supportG trilliumus com o Telephone 1 512 441 9258 or Toll Free 1 800 404 1055 e Installation On site installation services are available to guarantee performance and save you time e Training We offer on site training to help you and your staff to know more about your cryopump and compressor systems Our training will give you confidence and the ability to maintain a highest possible uptime for your system 2 3 About this Manual The purpose of this manual is to provide our customers using the Cryo Plex 10 Cryopumps with the information needed to safely and efficiently operate the compressor when operating as part of a cryogenic refrigeration system Such a system is often comprised of the following equipment e Cryopump compressor unit such as the Model 600 compressor from Trillium US Inc e Coldhead s or cryopump s e Connecting helium lines Th
10. a lt Trillium Trillium US Inc Cryo Plex 10 Cryogenic High Vacuum Pump User s Manual Rev A November 2015 97 00032 000 User s Manual Rev A November 2015 CP10 Cryogenic Pump For information about Trillium US Inc visit the Trillium US Inc Web site at http www trilliumus com How to Contact Trillium US Inc Support support trilliumus com For contact information and a complete listing of Direct Sales Distributor and Sales Representative contacts visit the Trillium US Inc Web site at http www trilliumus com Trillium US Inc has made its best effort to ensure that the information contained in this document is accurate and reliable However the information is subject to change without notice and is provided AS IS without warranty of any kind express or implied Before placing orders customers are advised to obtain the latest version of relevant information to verify that information being relied upon is current and complete All products are sold subject to the terms and conditions of sale supplied at the time of order acknowledgment including those pertaining to warranty patent infringement and limitation of liability No responsibility is assumed by Trillium US Inc for the use of this information including use of this information as the basis for manufacture or sale of any items nor for infringements of patents or other rights of third parties This document is the property of Trillium US Inc and
11. es e General vacuum systems 4 2 Specifications The Cryo Plex 10 cryopump specifications are listed in Table 4 1 Figure 1 and Figure 2shows the Cryo Plex 10 cryopump dimensions Table 4 1 Cryo Plex 10 Characteristics Characteristic ANSI Flange ISO Flange Conflat Flange Height inches 23 9 23 9 23 9 Maximum Flange Diameter inches 16 0 14 5 14 0 Weight Ibs 85 85 85 e Pumping Speeds liter sec o Air 3000 o Water 9000 o Hydrogen 5000 o Argon 2500 e Argon Throughput o 1500scc min e Capacity o Argon 2000 standard liters o Hydrogen 24 standard liters 5x10e 6 torr e Crossover 300 torr liters e Cool Down Time Room temperature to 20K 120 minutes e Inlet Flange Size Standard o 10 inch ANSI o 14 inch CF o NW 320 ISO Note Cryo Plex 10 cryopumps can operate safely in any mounting orientation 97 00032 000 3 A lt User s Manual Rev A November 2015 CP10 Cryogenic Pump PRESSURE RELIEF VALVE Figure 1 Cryo Plex 10 Cryopump with CF Inlet Dimensions 97 00032 000 4 User s Manual 16 00 ANSI FLANGE 97 00032 000 Rev A November 2015 CP10 Cryogenic Pump DIODE HVB TEMP SENSOR CONNECTION KF 25 FLANGE W BLANK O RING amp CLAMP REGEN PURGE PORT PRESSURE RELIEF VALVE W B T y i REN x COLDHEAD MOTOR ELECTRICAL CONNECTOR Figure 2 Cryo Plex 10 Cryopump with ANSI Flange Dimension User s Man
12. fold valve and close when pressure has been reached Slowly open the valve on the manifold Release the pressure to no less than 30 psig Repeat Steps 1 and 2 in this subsection three more times Re pressurize the coldhead to compressor static pressure Turn on the drive motor for 1 to 2 minutes oP es Repeat Steps 2 through 4 in this subsection three more time to complete a total of 12 flushes and 4 drive motor runs 6 Make sure the helium gas pressure level of the coldhead is charged per compressor static pressure specification 97 00032 000 11 4 A lt User s Manual Rev A November 2015 CP10 Cryogenic Pump 8 3 4 Reconnect Gas Lines to Complete Decontamination Disconnect both gas lines from manifold and reconnect to supply and return fittings on the compressor The cryopump is now ready for cool down procedures 8 4 Cleaning Equipment Caution Do not use solvents to clean connectors The fittings should never be greased or oiled otherwise the helium gas circuit of the system could become contaminated 8 5 Returning Equipment Before returning any equipment contact Trillium US Inc to receive special instructions and to obtain a return authorization number RMA See contact information in Section 2 97 00032 000 12 4 A lt
13. helium supply pressure Vacuum leak in vacuum system or cryopump High partial pressure of non condensable helium hydrogen or neon within the cryopump Compressor problem Add helium gas according to procedure described in the compressor manual Check vacuum system for leaks a Checkcryopump relief valve for proper seating b Check cryopump for leaks Regenerate the cryopump as described in Section 6 2 3 Refer to the Troubleshooting section of the compressor manual Cryopump has intermittent ratcheting or thumping sound during operation Helium gas contamination Refer to Section 8 3 for instructions on how to decontaminate the cryopump 97 00032 000 User s Manual Rev A November 2015 CP10 Cryogenic Pump 8 Maintenance 8 1 Maintenance Personnel Requirements Only trained and qualified personnel should perform the maintenance procedures described in this chapter Observe safety warnings as described in Section 3 All other maintenance work must be performed by Trillium US Inc personnel in the factory Please contact Trillium US Inc to make arrangement for such work See contact information in Section 2 Caution Always use two wrenches when connecting or disconnecting the Aeroquip self sealing couplings 8 2 Tools Needed to Service the Cryo Plex 10 Cryopump The following tools are needed to carry out the maintenance activities described in this Section Refer to Section 4 3 for the c
14. in to rough pump the cryopump without knowing the pre determined roughing pressure Caution Never rough pump the cryopump longer than necessary it could result in back streaming of mechanical pump oil that will contaminate the cryopump 97 00032 000 8 4 A lt User s Manual Rev A November 2015 CP10 Cryogenic Pump 6 2 3 Regeneration of the Cryopump Since cryopumps are capture type pumps they must be periodically warmed up and evacuated in order to remove the accumulated condensed and adsorbed gases The process of warming up and evacuating gases from a cryopump is called regeneration 6 2 3 1 Unassisted Regeneration 1 Close the high vacuum gate valve and turn off the compressor and cryopump 2 Thecryopump condensing arrays should be allowed to warm up to 80 F 26 C 300K 3 Begin roughing the cryopump to the crossover pressure close the roughing valve and restart the compressor and cryopump 4 Cryopump is now ready for cool down 6 2 3 2 Assisted Regeneration 1 Close the high vacuum gate valve and turn off the compressor and cryopump 2 Using a heated dry gas nitrogen argon to purge the cryopump through the purge gas valve The purge gas should be injected at 1 to 2 cfm and a maximum temperature of 150 F 65 C 338K Trillium US Inc offers a purge gas valve heater option that can limit the heated purge gas temperature to 150 F 3 The exterior of the cryopump may be heated using a blanket heater available from Trilliu
15. is manual describes the design operation and maintenance of the Cryo Plex 10 cryopump unit 97 00032 000 1 A e User s Manual Rev A November 2015 CP10 Cryogenic Pump 2 4 Compatibility The Cryo Plex 10 cryopumps are designed for use with Trillium US Inc Model 600 helium compressor or equivalent 3 Safety Warnings 3 1 Standards for the Use of Warnings and Cautions Warnings are noted when there is a possibility of injury or death to persons operating the equipment or performing specific tasks or procedures noted in this manual Cautions are noted when there is a possibility of damage to equipment if the caution is ignored 3 2 Warnings Applicable to All Aspects of Cryo Plex 10 Cryopump Operation Warning If the Cryo Plex 10 cryopump has been used to pump any toxic or dangerous materials this information and associated paperwork must be listed on all shipping containers and on associated paperwork before the equipment is returned to Trillium US Inc for any repairs Warning When pumping any toxic corrosive or flammable gases a vent pipe must be connected to the cryopump relief valve and vented to a safe location Warning Do not install a hot filament vacuum gauge on the cryopump side of the hi vac gate valve as this could be a source of ignition Warning Helium gas can cause rapid asphyxiation and death if released in a confined area Warning Use a pressure reducing regulator when with drawing Helium gases from a high pressu
16. m US Inc P N BH 10 Never let the surface exceed 150 F 65 C 4 When the temperature sensor of the cryopump reaches 80 F 26 C 300K discontinue the regeneration process and rough the cryopump to the initial starting pressure close the roughing valve and restart compressor and cryopump 5 Cryopump is now ready for cool down procedures 6 2 3 3 Automatic Regeneration Automatic regeneration of the cryopump can be accomplished by the use of the Cryo Plex 2200 Automatic Cryopump Controller available from Trillium US Inc Automatic regeneration occurs when predetermined pressure or temperature set points are exceeded 7 Trouble Shooting Activities 7 1 Troubleshooting Activities Table 7 1 describes some problems that users might encounter while operating the Cryo Plex 10 Cryopump and provides solutions to those problems Table 7 1 Trouble Shooting Procedures Problem Possible Cause Corrective Action p 1 Check the following for leaks 1 Vacuum leak in vacuum system or in a Checkthe vacuum chamber and hi cryopump High base pressure of 2 High partial pressure of non ra ERIE Valve ualeat vacuum system and the b Check cryopump relief valve for condensable helium hydrogen or cryopump temperature is DN proper seating neon within the cryopump because below 20K c Check cryopump for leaks after the charcoal array of the cryopump t closing the gate valve has reached full capacity 2
17. orrect part number e Maintenance manifold e Two self sealing coupling wrenches 8 3 Scheduled Preventative Maintenance Activity 8 3 1 Preparation before Decontamination 1 Cool down the cryopump for at least one 1 hour 2 Shut down the compressor and cryopump Then immediately disconnect the supply and return gas lines from the compressor 3 Connect the supply and return helium gas lines to the maintenance manifold Use the manifold to reduce the pressure in the coldhead to 45 psig 4 Allow the second stage of the coldhead to warm to 80 F 26 C 300K Purging the pump with a warm dry gas argon or nitrogen will reduce the time required to warm up the pump 8 3 2 Purging the Regulator and Charging Line 1 Priorto opening the gas cylinder valve turn the regulator adjustment screw clockwise until it is open Open the gas cylinder valve Close the regulator adjustment screw This will purge air from the gas charging line and the regulator 3 Connectthe gas charging line to the flare fitting attached to the valve on the maintenance manifold Do not tighten 4 Follow Steps 1 and 2 in this subsection for at least 30 seconds allowing gas to flow from the flare fitting With gas still flowing tighten the flare fitting 8 3 3 Pressurize and Vent the Cold Head Follow these steps to vent the cold head 1 Open the gas cylinder regulator and pressurize the cold head to the static pressure of the compressor Open the maintenance mani
18. re cylinder Warning Detaching the helium flex lines with the compressor load at low temperature can cause the pressure rise in the system beyond the permissible level therefore creating a safety hazard 3 3 Operator Instructions Follow standard Cryo Plex 10 operating procedures as described in this manual If after reading this manual you still have questions regarding the safe operation of the CP10 cryopump please contact Trillium US Inc Technical Support using the contact information found in Section 2 4 Introduction 4 1 General Information about the Cryo Plex 10 Cryopump Trillium US Inc provides both custom and industry standard cryogenic solutions at highly competitive prices Cryogenic vacuum pumps provide clean oil free high vacuum with high pumping speeds are the pump of choice for sputtering electron beam evaporation accelerator beam lines and many aerospace and coating applications Cryo Plex 10 cryopumps are available in various standard inlet flange configurations ANSI ISO CF and complete UHV with temperature sensors either in diode or hydrogen vapor bulb HVB configurations 4 1 1 Cryo Plex 10 Cryopump Features The Cryo Plex 10 cryopumps as seen in Figure 1 and Figure 2 are typically used in the following applications e Sputtering tools e lon implanters e R amp D bell jar systems e Surface analysis 97 00032 000 2 A lt User s Manual Rev A November 2015 CP10 Cryogenic Pump Accelerators e Beam lin
19. ri me X AEAT EENS 1 2 1 About Trilli mi US lli citet irte reet itt tr oei caabaconsneauiaaevulenbaune Fase ER Cue Rea suas sulenbivas iia aiaeei Pet Eae REIHE 1 2 2 Other Services from Trillium USMC iiie tree nter ner rhe race Rin onnaa anane iain datia bees Fre p ko aen Faro Ee aso Fade 1 2 3 Abut this Man al mee 1 2 4 Compatibility sea p E AE A a aa 2 3 Satety WalkhllBs eeren E A A E a a GEE 2 3 1 Standards for the Use of Warnings and Cautions c ccccccccccesssssseeceessssscecececeeseeeeeaeseeececsesuaaeseeececsessseseescsesesesaeeeeess 2 3 2 Warnings Applicable to All Aspects of Cryo Plex 10 Cryopump Operation sees nnne 2 3 3 Operator Instr ctlOFis eeoc estu en e eene peo temen tentent tene ena pese ewe seva s apes a tenen enun ene dune En Dunne E E Pres nene Va Pepe b Eve Pea t aen a peur EURO aEwUS 2 4 Mtr Od UCONN eR c LEE 2 4 1 General Information about the Cryo Plex 10 Cryopump cccsscccccecsssssesecececseseeaeseeececceesesesseseceeesseseaaesesceesesesaeeeeees 2 4 1 1 Cryo Plex 10 Cryopumbp FeatUles noon eai tu rna ko pe pA RE Ya Deu ous CERS ERR Que EUER aa EEE eDa ERI LEY RR RED V ERA e coa REER 2 4 2 Specifications ccs e aa a a a aa ERR R Re eoa E ERN ae XR UN ERE A ARE REFS uS YR ke cud uia ERR NA ERA FERE F AEE E dese va e Reo FERA Da 3 4 3 Ordering Information socer risen na rebos paene a EX DRM
20. sbaasteiakenn 9 6 2 3 2 Assisted Regeneration nieee a a E ETE E aaa P REN EE AERE E Ea E n Aaii 9 6 2 3 3 Automatic REGENERATION si asincdinsssncstensdecdenassnaseeesccacaonceecedsacdusedaaeseced N pe Cre Rd naa Roe Ene e Eee RR TEk vai ri Sna 9 7 Trouble Shooting ACtiVitiES senesi resres FR rho E en Fen RR ERE YR eR a aA E a HL EE EEA Na E E ERE PARES ENAA aarin 9 7 1 Troubleshooting Activities ccccccsssssssccccecsessssssecccesesssseseeecesseseeseseescesceeeeeeseseseceeeeesseececeeseaaeaeeeeeceeseaaeaaeseeeesesesees 9 8 MEI GDEDICE ieies 11 8 1 Maintenance Personnel REQuireMent ccccsssccccecsesesssceccecsesesaesecececseseaaeseeseeseeceesesseseeececeessseseesceeseseaaeseeeeesees 11 8 2 Tools Needed to Service the Cryo Plex 10 Cryopump sees nn annis enne ranas anser 11 8 3 Scheduled Preventative Maintenance Activity ccccccccccccessssscecececsesesneeesececeesseseeaeseeecsceesesaeeeseseseeeeaeseeseesseseeaees 11 97 00032 000 4 User s Manual Rev A November 2015 CP10 Cryogenic Pump 8 3 1 Preparation before Decontamination ccccccesccccccecsesseaeseeceesesaeeecececeeseseseeeseeeesceesesaeeeeececseseaeseeeesssesseaees 11 8 3 2 Purging the Regulator and Charging Line ccccccccccccssessseeceeceesesneeesececseseeneeeseceesceesesaeeeeeescseseaeseeeesssesaaees 11 8 3 3 Pressurize and Vent the Cold Head
21. ual Rev A November 2015 CP10 Cryogenic Pump 4 3 Ordering Information Table 4 2 contains the ordering information for the Cryo Plex 10 Cryopumps Customers can also order the optional accessories and replacement parts listed in Table 4 3 Table 4 2 Cryo Plex 10 Cryopump Ordering Information Cryopump Part Number Cryopump Part Number Cryo Plex 10 ANSI Flange Diode 10249 Cryo Plex 10 ANSI Flange HVB 10250 Cryo Plex 10 CF Inlet Diode 10296 Cryo Plex 10 CF UHV HVB 10297 Cryo Plex 10 UHV Diode 10307 Cryo Plex 10 UHV HVB 10308 Cryo Plex 10 ISO Diode 92 00003 0SD Table 4 3 Optional Accessories and Replacement Parts Accessories Replacement Parts Part Number Blanket Heater BH 10 Purge Gas Valve 10185 Purge Gas Valve Heater 10340 Rough Valve 10191 Burst Disc BD 133 Relief Valve Cover 60210 Drive Unit Power Cable 10 ft 10144 10 Diode Monitor 10132 Diode Cable for Diode Monitor 10 ft 10133 10 Model 2200 Automatic Cryopump Controller w RS232 220V 93 00015 232 Single Pump Installation Kit 10251 Custom length available 5 Installation 5 1 Safety Warnings Review the safety warnings in Section 3 before beginning any installation activities 5 2 Inspect Equipment Before Installing Remove the cryopump from the box and inspect for any damage during shipping Notify Trillium US Inc immediately if any damage was found
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