VTAC Manual – 220V
Contents
1. VTAC SU A 7 50 Variable Temperature AC Controller Heater Controller and Power Supply SU 200 Substrate Heater OPERATION MANUAL 220V www meivac com A Servicing should be done by qualified personnel aware of the electrical hazards Maintenance may require removing the instrument cover with the power on Do not ground yourself or work under wet or damp conditions Caution notes in the text indicate procedures to be followed to avoid possible damage to equipment Voltage Removing the VTAC cover may expose the User to Hazardous voltages All electrical power to the VTAC circuits and from the heater system must be disconnected before removing the cover from the enclosure or disconnecting any wiring Fire Explosion Disconnect all electrical power from the VTAC prior to removing the cover from the enclosure Failure to do so may result in sparks that could cause a fire or an explosion Heat Do not obstruct air circulation to the enclosure Overheating and possible fire may occur Weight Imbalance The VTAC enclosure has a significant weight imbalance front to rear Use caution in lifting handling mounting or installing this case Electrical Code This product is supplied with Input and Output connectors and power cables suitable for use with the specified MeiVac SU 200 substrate heaters See specification table Section 1 2 Users who substitute cables or connectors of different sizes or capacities do so at2. c eee ees 3 1 2 Specifications DEE 3 1 3 Standard Features EE ee eee cee ee eee 3 4 1 4 User Supplied Items EE E E A AEL EA AEAEE EEEE 4 20 Receiving Installation and Maintenance EE 4 21 Heceiving and Inspection Tet e eT CT eee CC 4 22 Installation Seer ee eee J4 3 ee E eT A AA TET ETE CSE TLE ee eT eT ee ee ee eee 5 6 2 3 Maintenance amp Troubleshooting SE ASC TET Cee eR eT TLE eT Te Te PE ee eer 6 3 0 Principles of Operation STL a Pe 5255155201252 Cee eT Cer ee Ce eC E a 6 4 0 Operation DEE 6 4 Setting up the controller on start up TEE EE EEN 6 4 2 Operating Instructions REENEN ee eee ee ee ee ee ee 7 4 3 Programming Optional Ramp Function oe ae EE ee ee a ee ee ee ee eee 8 10 4 4 Starting a RAMP Cycle from the Home Page e 10 11 4 5 Programming Returning to the STANDARD function e e 12 13 46 Other Watlow Controller Capabilities TC ter TT TC Eege Ee 13 5 0 Options EE 14 6 0 system Schematic TeCitt TT TE Ce eT ee Re ee ee eee ee ee ee eee ee ee ee er ee ee ee 15 7 0 Parts List TCC CCRT Ee EC CTL ECT COR TEE TR TERT ETERS TT OCR CEL CRE eC CCE Ee eer 16 4 16 8 0 Factory Service CTC Re CTC EE eRe Cee eee ea ee ree eee 16 Attachments Watlow EZ Zone PM User s Manual 0600 0058 0000 f WW Table Description Page 1 Specifications VTAC SU A750 for use with MeiVac SU 200 heater 3 2 Programming Ramp Function amp Re locking the Controller Program 9 10 3 Returning to Standard Function amp Re locking the Controller Pr
3. 6 mm deep TypeK o Thermocouple not supplied Type K 1 3 Standard Features and Benefits 1 3 1 Advanced PID Control Algorithm Provides auto tuning for fast efficient start ups Allows tighter control of thermal processes 1 3 2 Variable Set point Temperature controlled to user selected setpoint Setpoint can range from room temperature to 950 C 1 3 3 Programmable Ramp User defined ramps for rate of rise sensitive thermal processes Ramp intervals designated in minutes or hours 1 3 4 Program Lock out Protection against unintended changes Secures process parameters from unauthorized users 3 17 1 3 5 Over temp Alarm Sonalert alarm sounds if operating temperature exceeds the programmed setpoint by 30 C 86 F Corrective action required to silence the alarm 1 3 6 Air Cooled Forced air cooling integrated into the unit to provide protection against overheating 1 4 The User must supply the following which are available from MeiVac as Extra Cost Options See section 5 0 1 4 1 1 4 2 Power and Thermocouple vacuum feedthrough appropriately sized for the VTAC output power and thermocouple type Electrical wiring to connect the vacuum feedthrough to the substrate heater in the vacuum system Thermocouple Thermocouple signal wiring from the thermocouple to the VTAC controller 2 0 Receiving Installation and Maintenance 2 1 Receiving and Inspection A 2 1 1 On receipt the unit should b
4. ART 115 vac MATERIAL NOTES UNLESS OTHERWISE SPECIFIED 1 DO NOT USE SULPHUR BASED CUTTING FLUIDS FOR MANUFACTURE VTAC SU A75 220 VOLT WIRING SCHEMATIC mx _ te 2 BREAK AND DEBURR ALL SHARP EDGES pT cee IP 001 43442 0 oe pe t i AUTOCAD FILE NAME LO1 4542 DWG 7 0 Table 5 Replacement Parts List MeiVac Pt Specification ISuppler Supplier Pt 6056 0001 0 1 Amp 3 AG Little Fuse 312001 6056 6250 0 Fuse 2 Little Fuse 03266 25HXP 6160 5100 0 Red Neon 115 VAC CML Innovative 1050C1 Tech 8 0 Factory Service For factory service and support contact MeiVac by telephone at 1 408 362 1000 or by e mail at Support meivac com In the event that the product needs to be returned to the factory contact MeiVac to request a Return Material Authorization RMA Package properly for return shipment to MeiVac reusing Original factory packaging if possible 17 17
5. ay to a higher or lower value or changes a parameter selection Safety Feature lf the new Setpoint you input is 30 C lower than the Heater temperature the Sonalert alarm will sound indicating an over temperature condition This is a safety feature to alert you that the substrate Heater temperature is significantly higher than the Setpoint temperature The alarm will turn off automatically when the substrate Heater temperature is less than 30 C above the Setpoint temperature To silence the alarm prior to that toggle the HEATER switch to the OFF position until the Heater temperature is less than 30 C above the new Set point then toggle the HEATER switch back to the ON position The temperature controller will then control to the new setpoint 4 3 RAMP Program Programming Optional Ramp Function The VTAC model SU A750 has the ability to be programmed so that the Heater temperature can be ramped to the desired Setpoint temperature over a user defined period of time This feature could be used if the wafer or substrate might be damaged by a rapid temperature increase If you need a slower rate of rise for your wafer or substrate it will be necessary to change the program The program allows you to control the rate of rise in degrees per minute or hour When the VIAC model SU A750 Supply was shipped from our factory this programming feature was locked out To use the RAMP mode you will need to unlock the controller and change the program Belo
6. ccomplished by pressing both the Advance and Infinity key for six 8 T seconds hoid both keys for 6 seconds Press key sec RER If LoC is not displayed press the Up arrow key WS Press key Press the Advance key until Sloc is displayed In 1 CR 3 E the lower display Lower aa E ee Upper Press the Up arrow key until the upper display on 5 l reads Press and W Press and hold the Infinity key for 5 seconds hold for 5 co This will return you to the Home Page seconds GZ Press and we Upper Press and hold both the Up and the Down arrow hold both my Ai keys for 6 seconds The upper display will read Al and the lower display will read GET This will SEt bring you to the Setup Page see page 27 Lower in the Watlow Manual Press key Press the Down arrow key until Loob is LoF displayed in the lower display Z Lower Press key Press the Advance key until rP is displayed in am e lower display X4 EA Press key Upper Press the Up arrow key until the upper display OFF reads QPF omen Press and Press and hold the Infinity key for 5 seconds hold for 5 co v TA A 3 Geff will return you to the Home Page You have esch LA CT LA keys for 6 seconds seconds now changed the program in the controller to allow it to ramp to temperature at a predetermined time from the start of cycle to the temperature set point 12 17 Re locking the controller
7. cts other than specified MeiVac SU 200 heaters may damage the VTAC and or the product it s being used with and void their respective warranties 13 17 5 0 Table 4 Optional Equipment Accessories SU 200 HH 2 Sample Substrate Heater SU 200 IH 2 Wafer Substrate Heater oower leads and insulating ceramics feedthrough on a 2 75 CF Flange feedthrough on a 4 5 CF Flange SU 926 600 Mounting Stand with power amp TC feedthrough on a 6 0 CF Flange Figure 3 Optional Vacuum Power and Thermocouple Feedthrough with Specified Flanges Ceramic Insulator Beads a l 242122 Part of 18 0 Hook up Kit SU 1018 K Ceramic Connectors Part of 18 0 Hook up Kit SU 1018 K Thermocouple 7 Pa of 18 0 Hook up Kit SU 1018 K Vacuum Power and Thermocouple Feedthrough Option available with specified flanges Figure 4 Typical in vacuum heater assembly with optional Heater 18 Hook up Kit and Vacuum Feedthrough 14 17 EIST 2IIVWSH2S NIMIMA 0S V nS OYLA peeo oon wwo Ty 31Y3H fS d31114 9 L 3NI uss ADILYA E a oo 6 0 Figure 5 2 Schematic OHIO JIVOS LON OC _ 31 0D1ND fF9I1539hd JTLYWSROS A ladis j 4 ALld ad4d1V 341 0G V f S 15 17 m 0L01 4342 0 Gol REVISIONS POWER Sw 6 16 WATLOW SSR Fuse 6 om p LINE RF G FILTER LOAD 2 16 1 Seen Fuse 1 om SU 200 HH SONAL
8. e unpacked and checked for damage such as loose parts or dents and scratches on the enclosure or front and rear panels lf damage to the shipping carton is evident on receipt the User should request that shipper s agent be present when the unit is unpacked to confirm visible shipping damage that might be claimed lf necessary file claims for damage with the shipper lf damage appears to be significant contact MeiVac for product repair or return instructions lf return to MeiVac is required repackage and ship in original shipping cartons when possible Caution Do not attempt to operate a VTAC if physical damage is evident When possible retain shipping cartons and packing material should subsequent return of the unit to MeiVac become necessary 4 17 2 2 lnstallation 2 2 1 Mechanical Installation 2 2 1 1 Because of the VTAC enclosures weight and weight imbalance it must be mounted on a flat surface that is properly reinforced and capable of carrying the enclosure s weight Anchoring or otherwise securing the enclosure to its mounting surface must be in accordance with all local codes and regulations 2 2 1 2 Adequate air circulation must be provided to the enclosure A Warning t is very important to insert the thermocouple all the way into the substrate heater block and make sure it cannot come out during operation If the thermocouple comes out during operation severe damage to the substrate heater can occur l the thermocouple br
9. eaks the controller will shut down the system and the Sonalert will sound Figure 1 Typical Heater assembly See Options page for additional information 2 2 2 Electrical Installation Confirm that the VTAC is connected to a power source operating at the required voltage and specified input current A Caution The power supply may be damaged if it is connected to the wrong supply voltage or the wiring is incorrect Before applying power make sure that the input voltage specified on the Input Ratings Label on the rear panel of the enclosure corresponds to the voltage of your system 5 17 A Electrical Code This product is supplied with Input and Output connectors and power cables suitable for use with the specified MeiVac SU 200 substrate heaters See specification table Section 1 2 Users who substitute cables or connectors of different sizes or Capacities do so at their own risk and are responsible for determining that any such substitutions are suitable for the purpose selected and meet all relevant local and national codes A Feedthrough Capacity A vacuum feedthrough that is adequately sized for the specified power levels and thermocouple signals must be utilized Such feedthroughs are available from MeiVac as extra cost Options 2 3 Maintenance amp Troubleshooting 3 0 4 0 2 3 1 Inthe event that toggling the POWER or HEATER switches ON does not power up the controller or heater check the fuses after disco
10. lue of the pa rameter in the lower display EZ ZONY OW Sv WATL Zone Display Indicates the controller zone that the remote user interface RUI is currently communi cating with to 9 zones 1 to 9 A zone 10 E zone 14 b zone 11 F zone l zone 12 H zone 16 d zone 13 Lower Display Indicates the set point or out put power value during opera tion or the parameter whose value appears in the upper display et Infinity Key ES Key Press to back up one This key can be program med level or press and hold to do various tasks such as for two seconds to re starting a profile turn to the Home Page Advance Key Advances through 7 17 parameter prompts Temperature Units Indi cator Lights e Indicates whether the tem perature is displayed in Fahrenheit or Celsius Output Activity Number lights indicate activ ity of outputs 1 through 5 A flashing light indicates re transmit activity 7 Percent Units Indicator Lights when the controller is displaying values as a per centage or when the open d loop set point is displayed Profile Activity Lights when a profile is run ning Flashes when a profile is paused Communications Activity Flashes when another device is communicating with this controller Up and Down Keys In the Home Page adjusts the set point in the lower dis play In other pages changes the upper displ
11. nnecting input power located on the back panel of its main enclosure 2 3 2 For other maintenance and troubleshooting information Refer to System Schematic Section 6 0 Replacement parts list Section 7 0 and or attached Watlow Manual Principles of operation At the heart of the MeiVac VTAC heater power supply and temperature controller is a Proportional Integral Derivative PID controller This controller provides adaptive tuning for tighter control and auto tune for faster start ups A PID controller is a generic control loop feedback mechanism widely used in industrial control systems A PID controller attempts to correct the difference between a measured Process Variable and a desired Setpoint by calculating and then outputting a corrective action that can adjust the process accordingly and rapidly to keep the difference minimal Operation The VTAC utilizes a Watlow Temperature Controller that has been programmed and tested at the factory for use as a setpoint type controller with the SU 200 substrate heater specified in this Manual The controller will drive the heater at full power until the desired setpoint is achieved However certain applications may require slower ramping of the temperature for their process See Sections 4 3 and 4 4 for the Programmable RAMP function 4 1 Setting up the controller on start up Reference Watlow EZ ZONE Panel Figure on the next page 4 1 1 Apply power to the controller by toggling the POWER
12. ogram 12 13 4 Optional Equipment Accessories BEER ee 14 5 Replacement Parts List Trt eT Tee CL Ce eer ee Tee oe ee 0225100205927 7000270850 16 Figure 1 Typical Heater assembly TT Te Cre Teele er Teer er ee Te Tee ee EE ee ee ee ee 5 2 Controller front panel REES 7 3 Optional Vacuum Power and Thermocouple Feedthrough 14 4 Typical in vacuum heater assembly with opflOnS eeneeeenee 14 5 system Schematic TEVe TLE CR CATT 565 CL TR CEC Ce ee TE EE ee Ce ee ee sec 15 1 0 Introduction The SU A750 VTAC is designed to control MeiVac SU 200 Substrate Heaters 1 1 PRODUCT DESCRIPTION The VTAC variable temperature AC controller provides a closed loop solution to drive and control the MeiVac SU 200 series substrate heaters There is a PID controller at the heart of this unit with auto tuning capability for fast and efficient control of your thermal process The controller drives the heater using SSR technology which regulates the voltage applied to the heater Temperature feedback is relayed through a Type K thermocouple which provides for the closed loop control 1 2 Table 1 Specifications VTAC SU A750 220V for use with MeiVac SU 200 heater Input connector or cord length Connector European CEE 7 7 Cord length 6 ft Output conductor length and 10 ft Standard Optional length connector available upon request Output connectors 2 Altech CB4 1 50 pounds 23 kg Dimensions 6 5 165 mm tall 14 35
13. program Function Keys Display Step Type Description me oo ee Press and Upper Unlock the controller programming process This hold both CG Lee is covered on the Factory Page see page 41 in keys for 6 the Watlow Manual This is accomplished by seconds pressing both the Advance and Infinity key for six seconds 1b Press key If LoC is not displayed press the Up arrow key until it is displayed Press key Press the Advance key until Sloc is displayed in SW SLoc the lower display Lower S A S Press the Up arrow key until the upper display WS reads 1 S Press and Press and hold the Infinity key for 5 seconds hoid for 5 Kaes This will return you to the Home Page and the seconds controller program is safe and secure After Re locking Refer to Section 4 2 Operation in the user manual for instructions to operate in the Standard Function mode 4 6 Other Watlow Controller Capabilities The Watlow Temperature Controller can be programmed to have the VIAC operate in other modes besides Setpoint control and RAMP function Information on how to program the Watlow Temperature Controller to make use of its other features can be found in the Watlow EZ Zone PM User s Manual 0600 0058 0000 Rep included with this VTAC equipment However any modification or re programming of the Watlow Controller is done at the User s sole risk Such modification or reprogramming or use of said VTAC equipment with produ
14. r change the setpoint 4 4 10 When you want to start a new heat cycle start from 4 4 1 A Caution You must complete the off auto sequence in order to reset the ramping feature Safety Feature lf the new Setpoint you input is 30 C lower than the Heater temperature the Sonalert alarm will sound indicating an over temperature condition This is a safety feature to alert you that the substrate Heater temperature is significantly higher than the Setpoint temperature The alarm will turn off automatically when the substrate Heater temperature is less than 30 C above the Setpoint temperature To silence the alarm prior to that toggle the HEATER switch to the OFF position until the Heater temperature is less than 30 C above the new Setpoint then toggle the HEATER switch back to the ON position The temperature controller will then control to the new Setpoint A Caution Max Temp The VIAC s Maximum setpoint temperature is programmed at the temperature limit of the MeiVac Substrate Heaters 950 C Reprogramming to exceed this limit may damage the heater module and void the warranty 11 17 4 5 Table 3 Returning to the STANDARD function Follow these instructions to return to the standard Setpoint operation mode gan A Zei ter __St Type Deserption _ SS DESEN _ _ la Press and er Unlock the controller programming process This Ke C ea is covered on the Factory Page see page 41 in the Watlow Manual This is a
15. ress key Press the Down arrow key until LooP is displayed in the lower display Press key Press the Advance key until rP is displayed in the lower display Press key Press the Up arrow key until the upper display reads Str Ramp Action Start up Press key Press the Advance key one time and the lower display will read r SC This is where you will select ramp timing in minutes or hours J y G ee g p sa 8g s 2 Press key Press the Up arrow key to change the upper display from Min to hoUr Press key Press the Advance key one time and the lower display will read r rT This is where you will input the desired Ramp Rate Lower SS SY GY VEER Press either Upper Press the Up arrow or Down arrow key to the the Up or desired temperature Ramp Rate shown in the Down key upper display Rafe will be a numerical value Press and Press and hold the Infinity key for 5 seconds hold for 5 This will retum you to the Home Page You have seconds now changed the program in the controller to allow it to ramp to temperature at a predetermined time from the start of cycle to the perature set Press and Unlock the controller programming process This hoid both is covered on the Factory Page see page 41 in keys for 6 the Watlow Manual This is accomplished by seconds pressing both the Advance and Infinity key for six seconds Press key If LoC is not displayed press the Up arrow key un
16. switch on the front panel to the ON position 4 1 2 The temperature controller display will light up 4 1 3 Press the ADVANCE key 2 The lower display should read C r7l The upper display should read AUTO GE 4 1 4 l the upper display does not read AUTO then push the UP DOWN keys change the display from MANUAL to OFF to AUTO 4 1 5 When AUTO is displayed press the INFINITY ks key 6 17 4 2 Operating Instructions 4 2 1 The Controller is now running in the Auto mode 4 2 2 The upper LED Display is the Heater Temperature 4 2 3 The lower LED display is the Setpoint Temperature 4 2 4 Change the Setpoint Temperature using the UP DOWN keys 4 2 5 When the desired Setpoint Temperature has been entered apply power to the heater by toggling the HEATER switch to the ON position 4 2 6 When the upper display Heater Temperature is equal to the lower display Setpoint Temperature the controller is in the control mode 4 2 7 l will remain in that state until you toggle the POWER switch to the OFF position or change the Setpoint A Caution Max Temp The VIAC s Maximum setpoint temperature is programmed at the temperature limit of the MeiVac Substrate Heaters 950 C Reprogramming to exceed this limit may damage the heater module and void the warranty Figure 2 Controller front Panel Upper Display In the Home Page displays the process value otherwise displays the va
17. their own risk and are responsible for determining that any such substitutions are suitable for the purpose selected and meet all relevant local and national codes Feedthrough capacity A vacuum feedthrough that is adequately sized for the VTAC s specified power levels and thermocouple signals must be utilized Such feedthroughs are available from MeiVac as extra cost Options Process Advisory Glow Discharge A A Plasma discharge may be created around the portion of the feedthrough and conductors located within the vacuum chamber Adequate shielding may be required to minimize interference with process conditions in the chamber Caution The VTAC equipment described in this Manual is designed factory programmed and tested for use with the MeiVac SU 200 substrate heaters specified herein Modifying or re programming this VTAC equipment in any manner other than described in this Manual or using it with any products other than the specified substrate heaters is done at the User s sole risk Such modification re programming and or use with other products may damage the VTAC and or the product it s being used with and void their respective warranties 1 17 Table of Contents Page Safety Cautionary Notes TET A ETE CEEOL E EEE REE CET CCT ER ETC UR CET CET Ce CRETE eee ree 1 1 0 Introduction Wetter e CCC eet Cee Cea UTE ee CCRT eC Ce RT eee ee Ce Tee eT Cee eee Cee ee ee 3 1 1 Description of the VTAC SU A750 T7 n c ga r ch
18. til it is displayed Press key Press the Advance key until Sloc is displayed in the lower display ___ Lower 3a Press key Upper Press the Up arrow key until the upper display DE E e i i Wes Press and Press and hold the Infinity key for 5 seconds hoid for 5 oO This will retum you to the Home Page and the seconds S controller program is safe and secure 4 4 Starting a RAMP Cycle from the Home Page 4 4 1 Push the ADVANCE key and the lower display will read Cr71 4 4 2 Press the DOWN arrow O O until the upper display reads OFF 4 4 3 Press the INFINITY key ESA 4 4 4 Toggle the HEATER switch to the ON position 4 4 5 Push the ADVANCE key and the lower display will read Cr71 4 4 6 Press the DOWN arrow key O until the upper display reads AUTO 4 4 7 Press the Infinity key 4 4 8 This will start the heat cycle and you will see in the top display flashing r rt and heater temperature The bottom display will be flashing Attn and the temperature set point 10 17 4 4 9 l needed you can set the temperature set point with the UP DOWN Arrow Keys The temperature of the heater will ramp per your Rate of Rise setting until it reaches the desired Setpoint When the heater temperature is equal to the Setpoint temperature both displays will stop blinking The controller is now in the control mode It will remain in that state until you toggle the POWER or HEATER switch to the OFF position o
19. w is a step by step method to unlock and re program the controller for the RAMP feature Warning After you unlock the controller and make changes to the program you need to relock the controller to maintain security 8 17 Table 2 Programming the RAMP Function With both the POWER and HEATER switches in the OFF position toggle the POWER switch ON the temperature controller display will light up This is called the Home Page Steps _ Operation Function Keys Display Step Type Description U CECR TEE ee EE er Unlock the controller programming process This oO C EEA is covered on the Factory Page see page 41 in the Watlow Manual This is accomplished by pressing both the Advance and Infinity key for six seconds Press key RER If LoC is not displayed press the Up arrow key HSC ung it is displayed Press key Press the Advance key until Sloc is displayed in C the lower display hoid both keys for 6 seconds Lower Upper Press the Up arrow key until the upper display reads 5 LA Press key Press and Press and hold the Infinity key for 5 seconds hold for 5 This will retum you to the Home Page seconds Press and Upper Press and hold both the Up and the Down arrow hoid both Ai keys for 6 seconds The upper display will read keys for 6 Ai and the lower display will read GEI This will seconds see bring you to the Setup Page see page 27 Lower in the Watlow Manual P
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