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Installation and Maintenance Manual

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1. 10 Attach the round connector to the power connector on the tool Take care to rotate the connector properly so that the key fits 11 The last cable is the tan colored one that is attached to the EMO box Plug it in and then return to the front of the tool 12 You will see a flat red plate above the stage This is the shipping bracket for the sensor head Loosen the two thumb screws and remove the plate 11 13 If you have wafer sample fixture chuck you will need to mount that next Although yours may not look exactly like this one it will still mount with three screws 14 Using the appropriate hex head wrench attach the sample fixture as shown 15 You will need to remove the head cover to gain access to the Z axis shipping bracket Use care when sliding the cover up so as not to damage these cables 12 16 Liftup the right side first this will be easier 17 Use the appropriate hex head wrench to remove the two silver screws 18 Remove the Z axis shipping bracket Jf if i 19 Use a small Phillips screwdriver to remove the two black screws from the bracket 13 20 21 22 23 14 These two screws must be installed back in the holes in the Z axis bearing as shown below Place the environmental over the fully assembled DektakXT tool Make sure that the enclosure does not touch the edges of the DektakXT itself NOTE Always take
2. DektakXT Stylus Profiler Installation and Maintenance Manual Innovation with Integrity DEKTAKXT STYLUS PROFILER INSTALLATION AND MAINTENANCE MANUAL P N 980 389 2011 Bruker Corporation All rights reserved Printed in the United States of America May 31 2011 COPYRIGHT NOTICE The reproduction transmission or use of this document or its contents is not permitted without express written authority Offenders will be liable for damages All rights reserved All configurations and specifications are subject to change without notice TRADEMARK NOTICE Vision 1s a registered trademark of Bruker Corporation All other brand or product names are trademarks or registered trademarks of their respective holders Bruker Nano Surfaces Business 2650 East Elvira Road Tucson Arizona 85756 Phone 520 741 1044 Fax 520 294 1799 TABLE OF CONTENTS mately Precautions onc isicietdsceeed coed e hehe ee eee seed Chevys 1 Unpacking pees gsheeteweaeu ye pee 1 Installing the Stylus 6 Installing the Computer and Powering Up the System 15 Installing the 5 22 Taking a Test Scan 25 Electronically Configuring and Calib
3. 14 Plug all three power cords from the DektakXT tool into a power strip or three wall outlets Turn on the power supply switch 15 On the EMO box make sure the emergency red button is released by rotating it slightly clockwise Then press the white button The light should turn on If it does not recheck all cables and make sure the fan on the power supply is running 20 Turn on the computer and monitor 16 After the computer boots the Vision64 application button 4 appears on the desktop and task bar Vision 4 17 Click the Vision64 application button 4 to launch Vision64 18 As the software launches the following events occur The head on the bridge moves to its upper limit The system stops with the stylus in the Tower Up position The scan stage initializes The Vision64 Welcome screen appears followed by the Vision64 Instrument tab which includes the DektakXT Live Video Display and Measurement Options window as shown on the next page 21 22 122 Instrument Analyze Measurement Pause Cancel nces 4 5 2 Save Tower Tower Tower M Down Up es a Copy To ibration Calibration Dektak Clipboar O Windows Reset Current Windows Scan Type Standard Scan X Stylus Force Range 6 5 Length Profile Valleys 1T Duration X Resolution Stylus Type Radius 12 5 um Sample Add
4. measurements with the enclosure over the tool with the door closed since air currents and noise will affect measurements without this protection Pass the three power cables through the opening at the bottom of the back of the environmental enclosure INSTALLING THE COMPUTER AND POWERING UP THE SYSTEM 1 Remove the software key from inside the Vision64 CD case 2 Insert the key into one of the USB ports in the back of the computer i n SESE Yu peecceecceame q p 15 16 3 Pick up the free ends of the three USB cables s m Cann 4 Insert them the USB ports BELZLL PaH 7 uu E FARE 6 Insert these two USB cables in the remaining two ports on the back of the computer L3 EX lt 6 W 17 18 9 10 Insert one of the power cords into the computer 11 Ifyou rotate the monitor sideways you will be able to easily access the connectors Attach the other end of the cable and tighten the screws 12 Insert the third power cord in the monitor and then rotate the monitor back to its normal position 13 If your system includes the air isolation feet you will find the air line on the right side of the tool Attach a quarter inch OD hard plastic air line between it and your compressed air source Set the pressure to about 20 psi 19 e
5. es a mouse documentation backup CDs and a shipping list The smaller box contains the keyboard 6 Here is the monitor box You will see the base of the stand as you open the box as shown in the second picture below Carefully slide the foam packing material out of the box and set it on a table with the stand on top Remove the stand and set it aside 7 Remove the top half of the foam and you will see the monitor with the screen facing down Take the monitor out of the foam and set it on a clean flat surface with the screen facing down Attach the stand to the monitor 8 This is the environmental enclosure box Although it is similar in size to the box that contains the DektakXT stylus profiler it is much lighter 9 Remove the environmental enclosure and place it on a table near the final location of the DektakXT tool 10 This is the box that holds the DektakXT stylus profiler The tool is very heavy so you will need two people to lift it 11 12 13 14 Lift the tool via both sides of the bridge Be very careful not to touch the center where the head is located Place the tool on the surface that will be its final location either a sturdy workbench or a vibration isolation table Make sure that there is plenty of front and back access room for performing the installation steps outlined in the section that follows Remove and unpack the box containing one or more styli and the stylus exchange tool Remove t
6. he EMO box After you have unpacked all of the boxes find the shipping checklist that was located in the computer documentation and cable box Do a complete inventory of all of the items shown on the checklist before discarding the packing materials If anything is missing recheck the boxes If you have any questions call Bruker Customer Service at 800 873 9750 INSTALLING THE PROFILER This section tells you how to install your new DektakXT stylus profiler Make sure that the tool is sitting on the system s final location with ample access to both front and back The environmental enclosure should be sitting on a nearby table The first picture below shows a standard DektakXT system The second picture shows the system inside its environmental enclosure Hood covered measurement 888 head that includes the tower camera illuminator and sensor head Sensor head and stylus Block sample fixture chuck Manual sample positioning stage can stage ystem base Base foot DektakX1 IMPORTANT sure to save all of the shipping straps brackets and screws in case you need to ship the tool to another facility in the future 1 Loosen the orange Velcro shipping strap that is attached to the top of the stage Then slide it out of the slots in the two red shipping brackets and set it aside 2 Remove the shipping bracket on the front of the s
7. itional Parameters 3D Map Y Extent Resolution Number of Traces Re null Tower Yes No Advanced Options Number of Measurements Data Starting Measurement Number 5 Auto Save File Name Data_ S OPDx Browse Insert Macro Title Note Data Stitching Settings Overlap Length Tower Up After Scan 0 pm trace 0 Use Soft Touchdown Delay After Each Measurement B Auto Save _ Prompt Before Overwrite Overlap Method Average Replace 6 7831 mm 8 1372 mm INSTALLING THE STYLUS The DektakXT system comes with a tool that magnetically holds the stylus This tool and one or more styli if ordered were shipped in the same box that held DektakXT profiler The following picture shows the stylus installed on the sensor head of the DektakXT tool To install the stylus on the sensor head 1 Click the Tower Home button on the toolbar at the top of the Live Video window 2 On the DektakXT profiler turn the brass thumb screw on the left side of the sensor head counter clockwise to loosen the sensor head magnetic shield The sensor head is located just beneath the hood covered measurement head Brass thumb screw on sensor head Magnetic shield 3 Slip the shield off the pin on the right side of the sensor head 4 Carefully move the shield toward the fron
8. le EU Directives based on its design and type as brought into circulation by Bruker In case of alteration of the instrument not agreed upon by Bruker this declaration will become null void and lose its validity Item Description Stylus Profiling System Instrument Model DektakXT Serial Number Council Directives 2006 42 EC Machinery 9 6 2006 1 2004 108 EC 31 12 2004 EN 61326 1 2006 EN 55011 2007 EN 61000 3 2 2006 EN 6G1000 3 3 1995 4 A 1 2001 4 A 2 2005 2006 95 EC Low Voltage 27 12 2006 EN61010 1 2001 Authorized Signature Date May Z7 2011 Name and Title of Signatorv Colin Farrell Director of Engineering European Representative Frank Saurenbach Bruker Nano GmbH Schwarzschildstrasse 12 12489 Berlin Germany Phone 49 30 670990 750 BRUKER CONFIDENTIAL INFORMATION Page 27
9. of the sensor head Gently push up until the tool is flush with the bottom of the sensor head The ridge at the back of the stylus exchange tool must roughly line up with the back of the sensor head 24 Sensor head Alignment pi Stylus tip Stylus exchange too WARNING Avoid any personal contact with the stylus arm or tip This can result in damage to the stylus 11 Disengage the magnet by rotating the thumbwheel in either direction so that a gray circle replaces the green one 12 Lower the stylus exchange tool 13 Position the magnetic shield on the thumb screw shaft on the left side of the sensor head and slip it over the pin on the right side As you do so DO NOT push the magnetic shield up to the bottom of the sensor head This can restrict the full movement of the stylus arm 14 Turn the brass thumb screw clockwise to attach the magnetic shield as shown below Do not tighten the screw just snug it TAKING A TEST SCAN MEASUREMENT Allow the system to warm up for approximately 15 minutes and then take a manual or automated scan measurement according to the instructions in the DektakXT User Manual If you are not satisfied with the results check the index of the User Manual or consult the DektakXT online Help If these steps do not solve your problem contact Bruker Customer Service at 800 873 9750 25 CONFIGURING AND CALIBRATING THE PROFILER On the Instrument tab of the Ribbon in Visi
10. on64 click one of the following icons to open its associated dialog box For instructions on making the settings in each dialog box see the DektakXT User Manual and the DektakXT online Help 4 4 yF PAP xc Advanced Stylus Force Vertical Reset setup Calibration Calibration Dektak GENERAL CARE AND MAINTENANCE 26 Follow these guidelines Do not use lubricants on the stage leadscrews Always position the sample so that the stylus is the only part of the stylus assembly that touches the sample Keep the environmental enclosure door closed both when the DektakXT system is in use and when it is not Never connect or disconnect any cables when the power is on Do not lower the tower without the stage assembly in place Do not move a sample during a scan measurement Avoid vibration and shock during measurements For example ensure that an operator does not bump a surface close to the profiler or the profiler itself during a measurement Always raise the tower to the maximum vertical position when the system is not in use Bruker Nano Inc 2650 E Elvira Rd Tucson Az 85656 USA e Phone 01 520 741 1044 e Fax 01 520 294 1799 Bruker Mano GmbH Schwarzschildstrasse 12 12489 Berlin Germany e Phone 49 30 670990 750 e Fax 417 30 670990 30 DECLARATION OF CONFORMITY Bruker Nano Inc herewith declares that the following instrument complies with the essential health and safety requirements of all applicab
11. rating the Profiler 26 General Care and Maintenance 26 Declaration of Conformity 27 lii SAFETY PRECAUTIONS The DektakXT stylus profiler is designed to minimize potential health and safety hazards during normal installation operation and maintenance activities However as with any mechanical system that uses electrical energy and compressed air it contains some physical and electrical hazards Potential safety hazards associated with the system are clearly identified in this DektakXT User Manual In addition warning and safety labels have been placed on the system where there exists a potential for personal injury or damage to the system You should be aware of these potential hazards and the controls used to minimize them If you have any questions on environmental health or safety related issues associated with the DektakXT system contact Bruker Customer Service at 1 800 873 9750 UNPACKING THE SYSTEM IMPORTANT Before you begin to unpack the DektakXT stylus surface system make sure that you have already reviewed the facility requirement At minimum you will need an AC power strip or three free power outlets that match the voltage requirements of your tool If you have purchased the optional vibration isolation feet or a vibration isolation table you will also need compressed air If you purchased one of
12. t of the profiler and pull it off the sensor head 5 Locate the stylus exchange tool that came in the same box as the DektakXT tool If its green circle is visible rotate the thumbscrew in either direction to disengage the magnet and replace the green circle with a gray one This means that the magnet is NOT engaged as shown below Magnetic disk pad Alignment pin Gray circle tha one of five indicates that the magnet is disengaged hannel for holding the Thumbscre stylus 23 6 Locate the case that holds the stylus that you want to install After opening the case use tweezers to gently lift the stylus holding ONLY THE SILVER MAGNETIC DISK PAD AT ITS BACK END 7 Align the magnetic disk pad of the stylus with the magnetic disk pad on the stylus exchange tool 8 Seat the stylus in the channel the exchange tool The stylus arm should extend out through the front channel on the exchange tool Magnetic disk pad on the stylus exchange tool Magnetic disk pad on the stylus Stylus arm extended out through front of Green circle indicatin channel that the magnet is engaged 9 Rotate the thumbwheel on the left side of the stylus exchange tool counterclockwise to display the green circle and engage the magnet 10 Place the stylus exchange tool underneath the sensor head on the DektakXT profiler Holding the stylus exchange tool by the sides align the alignment pins on its top with the outside of the front
13. tage by loosening the screw with a hex head wrench The wrenches are in the box that contains the computer documentation and cable see the previous section Red plastic bracket on top of the glass block on the front of the tool 3 Retighten the screw since it is part of the stage assembly 4 On top of the glass block you will see two red plastic brackets see the picture above One is located on the front and the other is located at the side Carefully slide these brackets out allowing the stage to rest on the glass block Make sure you don t leave any fingerprints or other debris on the glass If you see any dust on it use clean air to blow it off 5 Go to the back of the tool where you will see the rear shipping bracket and a cable with a small black plastic cable clamp Remove the screw from the bracket and set the bracket aside 7 You will see two more shipping brackets on the front of the stage Loosen the screws with a Phillips screw driver remove the brackets and re tighten the screws While you are at the back of the tool attach the cables before removing the other shipping brackets The connector panel is located on the right side There are three USB connectors so find the three USB cables that shipped with the system Your cables may look slightly different from the ones shown below but this will not be a problem Attach the cables to the tool 10 Locate the power supply a rectangular black box
14. the vacuum sample fixtures chucks you will need a source of vacuum The DektakXT must sit on a sturdy workbench or vibration isolation table If you have any questions call Bruker Customer Service at 800 873 9750 The unpacked components of the DektakXT system minus the environmental enclosure appear on the next page IMPORTANT Be sure to retain and store all installation tools and shipping brackets for possible future use To unpack the DektakXT stylus surface profiling system 1 Ifyou purchased the separate air isolation table assemble it using the documentation inside the crate 2 Move the shipping boxes next to the vibration isolation table or sturdy workbench on which the system will finally sit During the unpacking process this the table or bench that will hold the environmental enclosure Have an another large table nearby to hold the computer components and DektakXT tool as they are unpacked 3 The shipping boxes for your DektakXT system appear in the picture that follows You will have at least two boxes one for the environmental enclosure and one for the system itself If you purchased the computer and monitor from Bruker you also will have one box for each of those items If you purchased the air isolation table it will arrive in a wooden crate 4 This is the box for the Dell computer 5 After you open the box you will see two smaller boxes on top of the computer This first box contains all of the cabl

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