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User`s Manual - UH Petroleum Engineering

1. mi E Em ros is PE z E PE fa n Bo EE Ta E a aa a fae PE Pa re Fl ca a a ao 2a Figure 3 43 Initiating Row Removal by right clicking on Row Header SILVACO 71 VWF User s Manual Main GUI components Using the VWF GUI 3 3 4 Formatting Cells in the Worksheet You can influence the way how the content of cells in the worksheet is formatted The format is defined together with the settings in the Preferences panel and follows the rules below e Inthe Preferences panel you can define a format common to all cells in the worksheet e Columns can be formatted individually This overrules any setting defined in preferences For formats defined in preferences please refer to Chapter 4 Customizing VWF Preferences Panel An individual format for a column is defined by right clicking on the header of that column Figure 3 44 displays the menu entry to open the format dialog Tree Worksheet jobs SplitPlot Worksheet 0 02 0 002 0 016 0 03 0 002 0 016 0 03 et tpoly max_XX_Stres 198457000 202128000 20212800000 20212800000 19823200000 19823200000 19823200000 Format 1984 57 2021 28 2021 28 2021 28 1982 32 1982 32 1982 32 114333000 23297200 22633100 22488600 56465200 59008200 58473100 Figure 3 44 Context Menu to Open Format Dialog Sxx_avel_ 63 23 22 22 56 59
2. Simulator SmartSpice ja e Gateway 3 0 2 R Copyright 1984 2014 Silvaco Inc Figure 5 55 Creating a schematic in Gateway Select Mode snar lx 691 Y 345 SILVACO 166 VWF User s Manual Using VWF to Run SmartSpice Simulations Tutorial bv Gateway build scratch simulations vwf_appnote data examples vwf comparator_sim schir Sheet 1 Stale Eile Edit View Draw Sheet Tools Simulation Post Process Layout Window Help a ag IB BSBAER BIRD AABI A Alle File aM j aS RS a DB v 4 B Siew She Ow ISNA AIO Libraries 5 PARAM VDD 5V PARAM tempval 25 PARAM capval 1p Symbols Large Icons VDD comparator vo 2 5 INM VA 1 Category all hd x MENE Loading Loading Loading Loading Filter pe Capture library library library library default built in sbcd spicelib quickstart Loading library analysis Loading library vwf The workspace build scratch simulations vwf_appnote_data sbcd workspace was read in Opening drawing build scratch simulations vwf_appnote_data examples vwf comparator schir Command Session Review Errors Thresholds OUT a Gi 1p kara Boy PARAM VOD S Select Mode snar lx 267 Y 75 Simulator
3. Setup Worksheet Results Graphics Jobs set size set NEU_RATE set NEU_RATIO Finished VWF Copyright SILVACO Inc Figure 6 31 Optimizer and DOE Parameter Definition Figure 6 32 depicts the setup pane which is used to select a target for the optimization In this example the target is named trenchdepth and identifies the depth achieved by the etch process It is impossible to enter target values in the setup pane This is in contrast to the simple type of optimization experiments which do not use any DOE parameters When a single DOE parameter is defined target values for the selected target must be entered in the worksheet pane instead SILVACO 217 VWF User s Manual Optimization Example Advanced Calibration Task Optimization in VWF bd export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt x File Edit Experiment Tools Help Gil gt Oje Description Resources Deck Parameters Worksheet Results Graphics Jobs Optimizer Levenberg Marquardt x Optimizer Settings Repeat Count 0 Targets Select the target to optimize Enabled trenchdepth underetch Finished VWF Copyright SILVACO Inc Figure 6 32 Definition of Optimizer Target Figure 6 33 depicts the worksheet pane It consists of three horizontally separated areas The top most area shows the entered target val
4. 5 Source the settings files Check which shell you are using echo SHELL If the output is SILVACO 285 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid bash then add in etc bashrec source var opt GRID default common settings sh csh tcsh then add in etc csh cshre source var opt GRID default common settings csh 6 Add administrative host with the following command qconf ah lt hostname gt or use gmon GUI to add an admin host 7 Type the install_execd command This command starts the execution host installation procedure You are asked several questions and you might be required to run some administrative actions The instructions will show the typical output you should expect to see during the setup install_execd Welcome to the Grid Engine execution host installation If you haven t installed the Grid Engine qmaster host yet you must execute this step with gt install_qmaster lt prior the execution host installation For a sucessfull installation you need a running Grid Engine qmaster It is also necessary that this host is an administrative host You can verify your current list of administrative hosts with the command qconf sh You can add an administrative host with the command qconf ah lt hostname gt The execution host installation will take approximately 5 minutes Hit lt RETURN gt to contin
5. Experiment demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc 4 Figure 5 13 Context Menu to Create an Experiment v New Experiment E Name ftutoriai_01 Type Optimization Differential Evolution Genetic Algorithm Hooke Jeeves Levenberg Marquardt Parallel Tempering Simulated Annealing ca Figure 5 14 Creating DOE Experiment SILVACO 130 VWF User s Manual Defining a New Experiment Tutorial A new empty experiment will be created To open the experiment double click on it and a window will open Figure 5 15 tjIx2545 Silvaco COM tutorial_01 tmp vwt_basedir tjet tutorial tutorial_01_10001 Thu Dec 15 10 43 49 2011 Thu Dec 15 10 44 04 2011 Figure 5 15 New Experiment The dialog shows some information related to the opened experiment Among other things you can see the name and type of experiment DOE the status and the owner Author You can double click in the empty space next to the Description label and enter a text of your choice The next step is to define split parameters A split parameter is a parameter in the deck for which several values are assigned when the experiment is run The following sections will explain how to define these parameters and how to influence the selection process for the values SILVACO 131 VWF User s Manual Defining a New Experiment Tutorial Figure 5 16 depicts the contents of th
6. Import single file demo Free space 407 7 GB 5 VWF Copyright SILVACO Inc _ Figure 5 37 File Import Menu Entries SILVACO 151 VWF User s Manual Importing Data into VWF Tutorial You can use both File and Batch options to import previously exported experiments The File option displays a file selector dialog box which allows you to select a single file The Batch option displays a dialog Figure 5 38 where you can select an arbitrary number of experiments for import iv Batch import E Add Directory Name Status Add File s Remove Clear Import Abort Save Report I Use Base Dir PEER Figure 5 38 Batch Import Dialog The idea of the batch option is to allow importing several experiments at a time You need to first compile a list of experiments to import There are several ways to populate the list You can either add all experiments contained in a directory by clicking on the Add Directory button or you can add individual experiments by clicking on the Add File s button Here you can select several experiments in the shown file selector Experiments can be removed from the list using the Remove button The whole list can be emptied by using the Clear Button SILVACO 152 VWF User s Manual Importing Data into VWF Tutorial When you are satisfied with the selection click on the Import button to start the import procedure Figure 5 39 GCP PRARA ES ij GMM
7. Virtual Wafer Fab SILVACO Chapter 8 Security Concepts in VWF Security Concepts in VWF This version of VWF implements a tight security module This module is optional and is only active in database mode Please refer to Section 2 3 2 Database Mode for a description of how to install the system SILVACO 237 VWF User s Manual Introduction Security Concepts in VWF 8 1 Introduction The basic concept of the security module follows the scheme of users and groups For both users and groups access rights can be defined on every entity within the VWF system An entity is either a directory an experiment or a file in the VWF system Methods exist to propagate permissions from a parenting directory to all its children recursively to allow for quickly adding new users groups When you create a new database a superuser called admin is created The initial password for this user is set to admin You can change the password of the superuser and that of any other database user using the SRDB utility Below an example is given to change the password of the admin user from the initial admin to the string mypasswad SRDB gt login lannach simucad SRDB lannach gt list Logged onto server lannach lt Available databases gt baseline 2012 baseline _2012 fdb SRDB lannach gt VWE SRDB lannach gt connect baseline_2012 SRDB lannach baseline_2012 USERS User admin Status U
8. Edit view Tonyplot 3D MaskViews DeckBuild Expert i SmartView Experiment Properties DOE Tree Deck Editor Graph Script Editor Execution Host Grid Registered Filetypes I Display large icons I Display text labels M Display hints Preview V Save these settings on exit Cancel Apply A Figure B 11 Preferences Dialog 4 Figure B 12 displays the Grid Preferences pane At the top of the pane you can select the a profile containing settings for a particular grid type This setting must read SGE drmaa in order to queue jobs into the Grid Engine system Please change the setting accordingly SILVACO 287 VWF User s Manual Submitting Jobs Queuing VWF On The Oracle SUN Grid Engine Open Grid 5 The pane below the grid type setting allows you to specify options Figure B 13 which will be passed to the Grid Engine system These options are essentially identical to the ones as understood by the qsub command of Grid Engine These options are passed to every job that is executed from VWF They are optional You don t need to set change any of these options to use the Grid Engine with VWF It is recommended to first try using the default settings before changing any options Below is a list of options which you may find useful For a full set of options please consult the qsub manual page as Manage Preferences Grid Profiles Local New Copy Delete Queue sy
9. Figure 4 15 displays all registered file types In this pane file types which have been assigned a viewer using the Open With dialog are listed and can be modified The screen shot shows three entries for file types final jpg and png You can see that the VWF internal text viewer is assigned to open files of type final e g results final as they are created by DeckBuild during simulation runs The screen shot further shows that files of type png and jpg are opened using a command called display but with a slightly different command line In the column named Command you can enter any command line to be executed to open a file The file name is either appended at the end as it s done for jpg files in this example or you can use the string lt filename gt as a placeholder as shown in the association for png files w Preferences Manage Preferences Registered Filetypes Application i Shortcuts i Table of user registered filetypes Toolbars Le Spayn final TextEdit Tonyplot jpg custom z display Tonyplot 3D png Custom display lt filename gt antialias e MaskViews DeckBuild m Expert i SmartView Experiment Properties DOE Tree pe Deck Editor Figure 4 15 Preferences File Types SILVACO 116 VWF User s Manual Customizing VWF Preferences Panel Figure 4 16 displays the possible Sipc related setting Timeouts for starting Sipc applications
10. Add File s Remove Pay Jil Glear iiss Import Abort Save Report M Use Base Dir Figure 5 39 Batch Import Processing You can interrupt the batch process by clicking on the Abort button If an error occurs during any of the import operations a short message about the cause of the problem is shown in the status field of the window Note This will only prevent remaining experiments to be imported The currently imported experiment is not interrupted or removed SILVACO 153 VWF User s Manual Importing Worksheet Data to Define a DOE Tutorial 5 10 Importing Worksheet Data to Define a DOE VWE offers a mechanism that allows you to define an experiment based on data available in a comma separated values CSV file This feature is useful in case you want to use an externally created DOE on an experiment and want to run that experiment from within VWF e g to utilize the grid computing facilities Please see also the scripting facility which allows you to define custom DOE designs by means of a JavaScript script see Section 7 2 Defining Custom DOE Strategies and Figure 3 55 In order to use this mechanism you must first create an empty experiment and define split variables in this experiment You should have a tree as the one shown in Figure 5 40 Make sure to not use one of the VWF designs and do not create splits manually Then you create a CSV file using your DOE tool or manually The CSV
11. Figure D 2 Node Information Dialog Displaying Simulator Version Information SILVACO 303 VWF User s Manual Splitting on the Simulator Version Recommended Practice D 6 Splitting on the Simulator Version If you want to split on the version of a simulator you need to use the assign statement together with the DBInternal simulator The following code snippet demonstrates how to split on the version of the SmartSpice simulator go internal assign name myVersion c value 3 16 12 R go smartspice simflags V SmyVersion P 4 You can then define a split on the assign statement and create cells in the worksheet just as with any other parameter Use the runtime output as indicated above to verify that the desired simulator version is being used SILVACO 304 VWF User s Manual Splitting on the Init line of Athena Recommended Practice D 7 Splitting on the Init line of Athena Note The following only applies to Athena If you want to split on the Athena init line make sure that the very first fragment always contains an INIT statement This is important so that line statements are handled proper in the very top fragment You will then need to duplicate the init line in the deck editor and only add split parameters to the second init line rather than the first one Figure D 3 shows how to do this export data1 thomasb simulations vwf_init rot xml DOE File Edit Experiment Tools Help leies ae
12. Manage Preferences Application Shortcuts Toolbars Toolbars Customize Mask Views DeckBuild p Expert SmartView Deck Editor Graph Script Editor Execution Host Registered Filetypes T Display large icons Sipe I Display text labels Optimizer WV Display hints Preview OBE IV Save these settings on exit Cancel Apply Figure 4 1 Preferences Toolbars SILVACO 102 VWF User s Manual Customizing VWF Preferences Panel Figure 4 2 displays the preferences settings for the shortcuts Shortcuts can be selected for every menu operation in VWF Preferences Manage Preferences Expert SmartView See Script Editor Execution Host Grid Registered Filetypes Sipc Optimizer Open Database Close Database Login Logout Running Experiments Change Password Import gt File Import gt Batch Import gt From filemode New gt Directory New gt Baseline New gt Experiment Figure 4 2 Preferences Shortcuts SILVACO 103 VWF User s Manual Customizing VWF Preferences Panel Figure 4 3 displays an entry from the tools section of the preferences panel It is possible to select the versions being used for every tool and also the path where it was installed v Preferences ajx Manage Preferences Spayn Application Shortcuts Toolbars Too
13. nbeta max abs i drain 1 0 max abs v gate nvt ntheta 0 131034 EXTRACT gt quit ATLAS gt quit ATLAS version 5 19 13 C finished at Thu Apr 4 15 47 28 2013 27 08user 27 49system 0 52 12elapsed 104 CPU Oavgtext Oavgdata 275728maxresident k 216inputs 1552outputs 2major 19808minor pagefaults Oswaps 27 089u 27 492s 0 52 12 104 7 0 0k 216 1552i0 2pf Ow END B X Standard Output Standard Error Scroll to Bottom Figure 3 36 Node Information dialog The node information dialog also allows you to open any file that is shown in the Attached Data pane Some of the file types have pre defined tools associated These are well known file formats like 2D 3D structure files str or 1log files as created by Atlas You can see that a TonyPlot icon is shown for the mentioned file types Other files like the simulation deck of the node deck ml in are associated with a text editor The icon shown in the pane indicates that this file is opened using a text file when double clicked Finally there are also files for which no tool is pre defined In Figure 3 36 there are two files called picturel png and picture2 png The icon indicates that no application has been associated with these file types Double clicking on such an icon will produce the error message shown in Figure 3 37 View File i Unknown file format Figure 3 37 Unknown File Type SILVACO 65 VWF User s Manual
14. D 2 Extract Statements Please make sure that no variables i e variable_name are used in names for extract statements The name of an extract is directly used as name for a column in the worksheet You can only have one such column per extract VWF creates one row for each value that gets extracted This is in contrast to DeckBuild where values in names do make sense and are used to avoid overwriting data between different simulation runs and to tell apart different input parameter settings The following example demonstrates a good and a bad case for VWF The example deck fraction contains an input parameter called length which is used as a split variable as well as an extract statement to illustrate the usage D 2 1 Bad Case for VWF set length 0 1 extract name Ion_S length y val from curve v gate i drain where x val 3 0 outfile Ion_length_S length dat If this deck is run from DeckBuild with length parameters of 0 1 and 0 2 respectively then extracts named Ion_0 1 and Ion_0 2 and curve files Ion_length_0 1 dat and Ion_length_0 2 dat will be generated If this deck is run in VWF this would mean two columns in the worksheet one named Ion_0 1 and another named Ton_0 2 This is undesirable Instead there should just be a single column called Ion and two rows one with extracted values for a length of 0 1and another one with an extracted value for a length of 0 2 SILVACO 298 VWF User s Manual Splitting o
15. SILVACO 181 VWF User s Manual Defining an Optimization Experiment Optimization in VWF 6 3 Defining an Optimization Experiment Here are the tasks that you need to perform to run an optimization experiment 1 A baseline deck needs to be imported into VWF same step as for DOE 2 An optimization experiment needs to be created The type of the experiment will be different than DOE 3 Split variables need to be identified same step as for DOE optional A tree for some of the split variables can be defined VWF runs all simulations defined by that tree for every optimizer iteration You have to define a template tree if you want to use several sets of measurements as targets in your optimization problem An optimization algorithm needs to be selected An optimization target must be defined Depending on the selected optimization algorithm this can either be a scalar or a vector target 7 optional Optimizer settings can be defined For example for the genetic algorithm the population size crossover probabilities and mutation probabilities can be set If not changed default values will be used Among other things the truncation criterion s can be defined Optimization is started by using the VWF Run button p Progress of optimization can be monitored by looking at the progress of the target as the optimization proceeds 10 The optimization is finished when the truncation criterion is reached for the target This me
16. File Edit View Help e mra i C localhostvwtmosrer O0 E H Exp02 demo Free space 407 7 GB Faj VWF Copyright SILVACO Inc Figure 3 9 Main Window using filters SILVACO 39 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 10 shows the use of the breadcrumbs portion of the Main Window The breadcrumbs part is located at the top of the window and can be used to quickly change directories VWF Explorer File Edit View Help Folders E S GlocainostwwiMosFeT S Ba localhost vwf MOSFET E E O localhost vwf Exp02 demo Free space 407 7 GB Fall VWF Copyright SILVACO Inc Figure 3 10 Main Window using breadcrumbs SILVACO 40 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 11 shows how the File menu has changed after a successful login Entries to manipulate experiments and directories have been added VWF Explorer File Edit View Help 3 Open Database localhost vwf MOSFET 4 Close Database login amp E H Logout base_deck Exp02 Running Expenments Gheange Password Import Directory Open amp Baseline A Rename F2 jj Experiment Delete Del Exit Idemo Free space 407 7 GB Fal VWF Copyright SILVACO Inc Figure 3 11 Main Window File menu A SILVACO 41 VWF User s Manual Main GUI components Using the VWF GUI Figur
17. like TonyPlot or Spayn can be given v oes Manage Preferences Sipc Application Shortcuts Toolbars 30 seconds 60 seconds 120 seconds MaskViews DeckBuild 5 Expert SmartView Deck Editor Graph Script Editor Execution Host Registered Filetypes ipc Optimizer V Save these settings on exit Figure 4 16 Preferences Sipc Cancel Apply SILVACO 117 VWF User s Manual Customizing VWF Preferences Panel Figure 4 17 depicts preferences for the supported Silvaco optimizers The values defined here can be assigned in an experiment by using the Use settings from preferences functionality when defining optimizer settings Please refer to Section 6 6 3 Defining Optimizer Settings Figure 6 16 for full details b 4 Preferences Manage Preferences pplication Shortcuts Toolbars Spayn i SmartView Experiment Script Editor Execution Host Registered Filetypes Sipc Optimizer Optimizer Configuration Optimizer Levenberg Marquardt x Parameter Maximum number of simulations 1000 Acceptable error 0 1 0 0001 Jacobian factor M Save these settings on exit Cancel Apply Figure 4 17 Preferences Optimizer SILVACO 118 VWF User s Manual SILVACO Chapter 5 Tutorial Prerequisites Tutorial 5 1 Prerequisites
18. 10060 x File Edit Experiment Tools Help IE e m Description Resources Deck Parameters Setup Worksheet implant dose implant energy nvt cost n v n v Graphics Jobs T View all results Running lo Free space 520 7 MB VWF Copyright SILVACO Inc Figure 6 18 Started Optimization Experiment SILVACO 200 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF Figure 6 19 depicts the situation where one simulation job is finished and others have been queued and are waiting to become activated by the queuing system The best target cost so far is drawn in green color Here the best achieved target value so far was found for a dose and energy Of 9 5e11 and 10 respectively and is 0 53v The displayed cost value is 0 12 which is the deviation of the computed 0 53V from the entered target 0 65V voltage Here no JavaScript target script is used h g lannach opt_ga Optimization Genetic Algorithm 10060 File Edit Experiment Tools Help Jel gt mil Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs 14 648467898 n v 9 2048686743 n v 15 _ 8 1898738249e 11 10 773861408 n v n v 6 1 3375318039e 12 7 4316239357 n v n v 8 6930223138e 11 11 892302632 n v n v 8 8 0169058288e 11 14 62395668 n v n v 9 6 9327480119e 11 5 6149178743 n
19. 2014 Silvaco Inc Figure 5 64 Split tree after the tempval split definition kd Add branches IE Additive Multiplicative Percent List Initial Value 1e 12 Number Of Steps 2 a Step size value 1e 12 Figure 5 65 Adding splits for the capval parameter SILVACO 174 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial PV itest2525a xml DOE F X File Edit Experiment Tools Help il4 B 2 Ole Description Resources Deck Tree worksheet Jobs SplitPlot Worksheet Fragment Status R Not Run Queued Running Aborted m Failed a Missing Result Finished N Root sicoooooon N PARAM capval capval hrhrh Manis Finished vwe 2 12 5 R Copyright 1984 2014 Silvaco Inc Figure 5 66 Split tree after the capval definition Now you are ready to run the simulations You can decide to queue all branches or just a subset thereof Depending on your setup simulations are either run locally on your workstation or on a queuing system like Oracle Grid Engine or LSF The quickest way of running all branches is to hit the run button While the experiment is executing you can view the progress in the tree and worksheet tabs Running simulations will be flashing green A successfully finished simulation will be
20. Description Resources Tree Worksheet Jobs SplitPiot Worksheet Deck editor c Silvaco Inc 2013 go athena line x loc 0 0 spac 0 1 line x loc 0 2 spac 0 006 line x loc 0 4 spac 0 006 line x loc 0 6 spac 0 01 line y loc 0 0 spac 0 002 line y loc 0 2 spac 0 005 line y loc 0 5 spac 0 05 First init line Do not define split parameters line y loc 0 8 spac 0 15 eo init orientation 100 c phos 1e14 space mul 2 rot sub 45 init orientation 100 c phos 1e14 space mul 2 rot sub 45 Define split parameters here pwell formation including masking off of the nwell E pe pe p z rot sub init Double g 45 2 time diffus Double ka 30 z Ready Preparing VWF 2 12 5 R Copyright 1984 2014 Silvaco Inc Figure D 3 Splitting on an init line in Athena SILVACO 305 VWF User s Manual Index A POE ean tere rere cr reer errr a E rere TS 76 80 a Custom Strategies ccecscceesseeeessseeeeseeeeesneeeeees 231 234 Advanced Calibration Task ssssssssseeeeesssssssnaiies alo eel DefiniNg 42 Sereas e aneas raTa aE ia Eaei 154 Athena casein pierit i ietaise 55 299 DOE me a a naa E ore 63 110 Automatic Notation eesceeesseeeseeeeeeseeeeseeeeeneeeenaees 107 108 DAMA k j eee 29 81 295 B E Backing Up Data Error Sc nari0S sionais eae ara s 300 301 Automatically through UNIX cron o oo eeeseeeseeeeeseeeeeeneeteneeees 251 seed 1 gi llc ed dae ica Fil
21. Each line in the file specifies exactly one argument host lannachn passwd simucad srdb site alpha bin srdb db vwf_demo2 file vwf_demo2_20130318 tgz Note The character at the beginning of a line introduces a commented unused line Below shows the output of the backup utility for the contents of a properties file above In this example the properties file is called bak props thomasb lannachn vwf_backup properties bak props VWF_BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved INFO version info vwf_backup 2 12 0 R Thu Mar 14 15 32 53 CET 2013 INFO Backing up simulation files from directory build silvaco var vwf_base_local vwf_demo2 to file vwf_demo2_20130318 tgz Note Other options can still be given together with properties Options specified explicitly will override any settings in the properties file SILVACO 250 VWF User s Manual vwt_backup Database Maintenance Automated backup through UNIX cron In a production environment it is easy to automate the task of regularly backing up a database system To do this use the vwf_backup utility together with a properties file and the UNIX cron facility For instance to make a regular backup every day at 3am use a crontab entry similar to the following 00 03 site alpha bin vwf_backup properties build thomasb vwf_training config file backup tgz The following example illustrates the usage of a small sh
22. Figure 4 10 shows all customizable settings for the deck editor of VWF v Preferences Manage Preferences Application Shortcuts Ti Toolbars a Tools i f Spayn Tonyplot Tonyplot 3D MaskViews DeckBuild p Expert SmarView a ieee Graph Script Editor Execution Host Grid Registered Filetypes Sipe Optimizer Deck Editor Editor Foreground amp Background Cad Selected Foreground Ca Selected Background a B Nel pea Text Comment Syntax Highlight Block Name Ca W Italic I Italic P Italic I Italic T Italic IV Save these settings on exit Cancel Apply Figure 4 10 Preferences Deck Editor SILVACO 111 VWF User s Manual Customizing VWF Preferences Panel Figure 4 11 depicts all settings for the graph widget which is used for optimization experiments v Preferences Application Shortcuts Toolbars MaskViews DeckBuild Expert SmartView Deck Editor Graph i Script Editor Execution Host Grid Registered Filetypes re Sipe Optimizer Manage Preferences Graph Colors Background _ Curve Line a Data Point Oo a Highlighted Point HER a Selected Point Oo a Horizontal Lines Oo a Vertical Lines a X Units Oo a Y Units Oo a Grid Rectangle a Rubberband a a Title a V Save these settings on exit Cancel A
23. Note If the firebird system has already been installed previously then it is not installed again by this step 2 3 3 Single Machine Queue Mode This mode allows you to run simulation jobs on the machine which also runs the VWF software i e the machine where you started vwf and is the default queuing mode It can be SILVACO 28 VWF User s Manual VWF Modes Installation used both in file mode and in database mode The queue mode is defined in the preferences panel of the VWF software The single machine queue offers three options to configure The first option is the maximum number of jobs which can execute at the same time The second option is a load limit which defines a maximum load which should not be exceeded Figure 4 14 The load limit is useful when the machine is also used to run jobs outside VWF In this case externally run jobs will increase the load limit of the system which results in less jobs being started from VWE Finally the third option is the nice increment level All processes started by the local queue will have their nice level incremented by the value given in this setting Note When you start jobs outside VWE it will take a while until the configured load limit will be noticeable This is because VWE does not actively terminate running jobs if a limit is exceeded but avoids starting new jobs instead The same is true if you change the load limit during runtime 2 3 4 DRMAA mode This mode allows yo
24. Tonyplot Description Resot She Sensitivity Analysis brksheet Jobs SplitPlot Worksheet Fragment Status m Not Run 4 Queued 8 Running u Aborted m Failed 4 Missing Result a Finished Root Boo000k w a diffus time diffus temp implant dose 9 9r 228 8 2 2 8 maa amp a a amp fimplantenergy Send Worksheet to Spayn Finished Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc _ Figure 3 71 Send to Spayn Menu Entry Figure 3 72 depicts the tab called SplitPlot Worksheet This tab presents another view at the data with the main difference to the regular worksheet being that split variables are listed vertically rather than horizontally This aids in selecting files for plotting with TonyPlot The parameter combinations splits are displayed top to bottom with the root node at the top No extracted parameters are displayed When the experiment has finished all files as generated during the simulation runs are displayed in the cells of this worksheet and are numbered uniquely by adding the row and column numbers of a given cell to the file name You can select multiple files by holding down the Ctrl key and using your left mouse button When satisfied with the selection right click in the SplitPlot Worksheet and select to either Plot Plot in Single TonyPlot window or Plot Plot in separate TonyPlot windows Depending on your choice either a single TonyPlot w
25. export data1 thomasb vwf_examples Browse Preferences Fs Exit Figure 5 53 VWF File Mode Open Examples As soon an example is highlighted the description of the example is shown Figure 5 54 SILVACO 164 VWF User s Manual VWF File Mode Tutorial Open or Create an experiment fex01 tgz EI this example demonstrates simulation of stresses in a test MOSFETstructure with embedded SiGe layer All important geometrical characterisics of the test structure including thicknesses of different layers spacer width gate length etc are parametrized This allows to investigate effects of parameter variations on important device characteristics using Virtual Wafer Fab VWF export datal1 thomasb vwf_examples Figure 5 54 Examples with Descriptions SILVACO 165 VWF User s Manual Using VWF to Run SmartSpice Simulations Tutorial 5 13 Using VWF to Run SmartSpice Simulations The following example shows how to run a SmartSpice analysis in VWF You must create and test a working schematic or netlist free of any simulation errors before using VWF to run SmartSpice simulations 5 13 1 Preparing the Circuit A simple comparator circuit is prepared using the Gateway Schematic Editor Figure 5 55 In this case three split parameters are defined using PARAM Figure 5 56 e Power Voltage VDD e Temperature tempval e Output load capacitor capval The example demonstrates a SPICE model library and the
26. y gt gt n Verifying and setting file permissions You can now verify and set the file permissions of your Grid Engine distribution This may be useful since due to unpacking and copying of your distribution your files may be inaccessible to other users We will set the permissions of directories and binaries to 755 which means executable are accessible for the world and for ordinary files to 644 which means readable for the world Do you want to verify and set your file permissions y n y gt gt y Verifying and setting file permissions and owner in gt 3rd_party lt Verifying and setting file permissions and owner in gt bin lt Verifying and setting file permissions and owner in gt ckpt lt Verifying and setting file permissions and owner in gt examples lt Verifying and setting file permissions and owner in gt inst_sge lt Verifying and setting file permissions and owner in gt install_execd lt Verifying and setting file permissions and owner in gt install_qmaster lt Verifying and setting file permissions and owner in gt lib lt Verifying and setting file permissions and owner in gt mpi lt Verifying and setting file permissions and owner in gt pvm lt Verifying and setting file permissions and owner in gt qmon lt Verifying and setting file permissions and owner in gt util lt Verifying and setting file permissions and owner in gt utilbin lt Verifying an
27. 58 Figure 3 45 displays the dialog to enter the format In this example the format for the column named max_XX_ Stress is defined The name of the column to format is indicated in the dialog header You define the format by selecting one of the entries of the Formatting menu If no format was defined for this column so far the selection shows Automatic This means the format to apply is chosen according to the Preferences setting Below the Formatting menu there s an area called Preview This gives a preview of how a particular format will look when applied You can enter an arbitrary value in the value field to experiment with the format you defined The display field is updated immediately whenever you change value or format SILVACO 72 VWF User s Manual Main GUI components Using the VWF GUI mi Choose format for max_XX_Stress x Formatting a Preview value 1 98457e 10 display 19845700000 cnc Figure 3 45 Define Worksheet Column Format Figure 3 46 depicts the content of the Formatting pull down menu You are presented with the following choices e Automatic Applies an automatic format to that column This is the default if no format for a column has been selected so far Floating point Formats the number according to the defined precision e Scientific Numbers are displayed in scientific notation e Custom Allows to define a custom format using the sy
28. Before starting the software you must have a database installation The VWF database can be located on the same database server as Utmost however a separate VWF database must be created Please see Section 2 3 2 Database Mode on how to install firebird and create the VWFE database In this tutorial you will prepare a small DOE example All steps will be outlined in detail and hints are given as necessary However the tutorial does not cover Optimization with VWF Please refer to Chapter 6 Optimization in VWF for more details SILVACO 120 VWF User s Manual Typical VWF Toolchain Tutorial 5 2 Typical VWF Toolchain When you run experiments in VWF there are several tools that are involved Apart from the VWF software itself the following tools are used by VWF e DeckBuild takes care to run the simulation deck Simulations are always run using DeckBuild It is therefore good practice to try a new deck in DeckBuild first e Simulators any simulator Atlas Athena SmartSpice that can be used in DeckBuild is also available from VWF e TonyPlot visualization tool for 2D structure files str and curve viewer dat files e TonyPlot 3D visualization tool for 3D structure files str e Spayn post processing tool to further analyze the VWF worksheet data The tool is also used to create RSM plots e SmartView visualization tool to view raw files as generated by SmartSpice simulations
29. H O vwfex07 Cl vwfexo8 C vwfex09 Q vwfex10 C vwfex11 Civwfex12 vwfex13 h oanufawi a E Edit Superusers demo Free space 407 7 GB VWF Copyright SILVACO Inc _ Figure 8 1 Edit Superusers Menu Entry admin Superuser tjet Superuser thomasb demo visitor boss manager designer project_leader statistician reporter QAQA OA OA ORN R Figure 8 2 Edit Superusers Dialog SILVACO 240 VWF User s Manual Security Related Dialogs Security Concepts in VWF Figure 8 3 displays the menu which opens when you right click on a directory entry in the browser window When you select the entry Permissions the dialog shown in Figure 8 4 will open This dialog allows to define the rights for every user in the system The screen shot shows 3 groups Design Analyze Taskforce and several individual users You can see that everybody in the system has got read permissions for that directory but only users t jet and admin have full rights VWF Explorer SEX File Edit View Help C localhost vwf_v6_upgraded examples Q vwfex01 CI vwfex02 O vwfex03 C vwfex04 CI vwfex05 O vwfex06 H O vwfex07 C vwfex08 vwfex09 Q vwfex10 CI vwfex11 J vwfex12 vwfex13 banka A Edit Permissions Qa a Qa a vwfex13 vwfex14 vwfexOl vwfex02 vwfex03 vwfex04 vwfex05 vwfex06 vwfexO7 vwfex08 vwfex09 vwfexl0 vwfexll vw
30. Preparing O VWF Copyright 1984 2011 SILVACO Inc Figure 3 27 Experiment Editor Description tab The base directory of an experiment is the top level directory which is used for carrying out simulations with any of the Silvaco simulation tools A template for this base directory has been selected during the installation procedure of VWF When experiments are created this template is taken as the prefix for the base directory for the experiment Note In filemode simulations are run in a sub directory of the directory where the experiment file is stored SILVACO 56 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 28 depicts how you can manipulate the resources of the VWF experiment A resource is a file that is needed when you execute an experiment run the simulations of the experiment Essentially all files that are mentioned in an input deck are resources Typical usage scenarios for resources are mask files or initialization files for simulators There are two possible ways of dealing with resources They can either be linked from the file system or they can be stored in the database Figure 3 28 depicts both variants The file a 1ib is stored in the database During the runtime of an experiment database stored files are copied into the base directory of the experiment into a sub directory called resources and links to those files are created from every sub directory where a simulation is carried
31. SILVACO 121 VWF User s Manual Starting the VWF Software Tutorial 5 3 Starting the VWF Software To start the software simply type vwf on the command line Figure 5 1 depicts the screen which is shown upon startup The contents of the window may differ depending on what databases are available Double clicking on one of the available databases opens the following dialog Note If the left part of the window does not show any databases you will have to use File gt Open Database VWF Explorer File Edit View Help E Folders Folders Folders 20 ASS tocarse o 9 localhost vwf E vwF Copyright SILVACO Inc _ Figure 5 1 Initial VWF Screen After double clicking on an existing database entry or after a new one has been added using File Open Database a dialog as shown Figure 5 2 will open Login to database tjlx2545 Silvaco COM tutorial EJ User Name Password mes Mh Figure 5 2 Database Opening Dialog Enter the user name and password Note that the selected user must already exist in the database Make sure a database and an account has been created as described in Section A 4 SRDB Utility SILVACO 122 VWF User s Manual Defining a New Experiment Tutorial 5 4 Defining a New Experiment Figure 5 3 shows the VWF software after a successful login This figure shows that no experiments have been defined in the database so the database is
32. To achieve a maximum of parallelization simulation jobs are delegated to an underlying job farming system a grid This version of VWF supports two types of job farming One is a built in system called the Silvaco Simple Queue It limits execution of simulations to the local machine but can utilize all CPUs on this machine for SMP machines This queue is best SILVACO 80 VWF User s Manual Main GUI components Using the VWF GUI used if VWF is to be run on a single workstation No extra grid software needs to be installed The second type of systems are networked grid computing facilities They allow you to run simulation jobs on a cluster of workstations and are supported through the Distributed Resource Management Application API DRMAA sub system DRMAA is supported by several vendors of grid computing systems In VWF two systems are available one is the Open Grid Scheduler OGS the other is the Load Sharing Facility LSF Both systems allow you to define an arbitrary number of nodes of workstations OGS is open domain and presents sophisticated scheduling algorithms It allows you to define fine grained rules of how jobs are selected for execution e g based on the CPU load on a given node or at what time a machine is available e g locked during working hours but available for simulation jobs during the night or at weekends LSF is a commercial software package Neither OGS nor LSF are not deployed together with the VWF softwa
33. Virtual Wafer Fab SILVACO Chapter 7 Scripting in VWF Scripting in VWF VWE offers a facility to carry out tasks in customer definable scripts The scripting facility can be used to achieve the following tasks e Run experiments outside the GUI e Define custom DOE strategies e Define target scripts for the optimizer Various examples for JavaScript scripts are given below The JavaScript engine used in VWF is SpiderMonkey 1 7 A comprehensive documentation of the JavaScript engine and the JavaScript language can be found at https developer mozilla org en US docs SpiderMonkey SILVACO 224 VWF User s Manual Run Experiments Outside the GUI Scripting in VWF 7 1 Run Experiments Outside the GUI This mode is started by supplying the option js when vwf is started This option will avoid starting the GUI but will directly start executing the script which is given after the js option When no script is given a short help is displayed thomasb lannach vwf js a script to execute must be given with js As with the VWF GUI you can opt to either run an experiment in filemode or in database mode You will need to provide different information depending on what mode you run an example in For instance in filemode you need to provide the XML file which contains the experiment In database mode you need to provide the hostname where the database runs as well as the full login credentials and the experiment id Belo
34. finished ID 1 type experimentFinished message SILVACO 225 VWF User s Manual Run Experiments Outside the GUI Scripting in VWF Below the example script run_exp_filemode js is shown If you want to run this script you have to change the filename in the XmlExperimentManager object to contain the filename of the XML file you want to run The script demonstrates how job status changes are obtained and displayed using the print_console method and how the termination is handled when Ctrl C is hit The method st opExperiment is called to remove all pending jobs from the queuing system The following script demonstrates how a VWF experiment can be run var myMgr new XmlExperimentManager vwfex01 experiment xml clean all results in experiment myMgr cleanExperimentResults use the local queue var myGrid new Drmaa local var myApp new ApplicationCallback myMgr wie ee var myExp new RunExperiment myMgr myGrid myApp start experiment myExp startExperiment callbacks are delivered via an event object var vent new Object var status do status myApp waitForEventCheckFinished event if status terminate print_console ID t tevent id type tevent typ message tevent msg while status finished amp amp status terminate print_console status status
35. function for PT GA or DE is zero It must be at least 1 OPT_RC_INVALID_TOL The tolerance specified is negative OPT_RC_LOW_POPULATION The population size specified for a GA or DE optimization is less than the minimum value allowed which is 6 OPT_RC_MAX_FUNC_EVALS The specified maximum number of simulations has been reached OPT_RC_MAX_GENERATIONS The specified maximum number of generations for a GA or DE optimization has been reached OPT_RC_NOT_ENOUGH_IMPROVEMENT The cost did not improve between two steps of the optimization algorithm OPT_RC_NOTHING_TO_OPTIMIZE No parameters to optimizer have been specified OPT_RC_USER_TERMINATED The optimization has been terminated on the user s request OPT_RC_UNKNOWN_ERROR The optimization terminated but no cause could be diagnosed Any appearance of this value probably indicates the presence of a bug OPT_RC_LM_WRONG_INPUT The input to the underlying Levenberg Marquardt routine was not acceptable OPT_RC_LM_INVALID_JAC_FACTOR The Jacobian factor was not greater than machine epsilon OPT_RC_HJ_INVALID_STEP_FACTOR The stepsize factor specified for a HJ optimization is outside of its valid range of 0 to 1 OPT_RC_HJ_MAX_ITERATIONS The specified maximum number of iterations in a HJ optimization has been reached OPT_RC_SA_BELOW_MIN_TEMP The specified minimum temperature in a SA optimization has been reached OPT_RC_SA_INVALID_COOL_FACTOR The cooling factor specified for
36. indicated as a solid green node Finally errors are indicated by red nodes Figure 5 67 The content of the worksheet is updated as simulation results become available Figure 5 68 SILVACO 175 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial build scratch simulations vwf_appnote data examples vwf test2525a xml DOE File Edit Experiment Tools Help Igle 2 2 gt mil Description Resources Deck Tree worksheet Jobs SplitPlot Worksheet PARAM PARAM tempval Param VDD VDD Running lo VWF 2 12 5 R Copyright 1984 2014 Silvaco Inc Fragment Status m Not Run Queued o Running Aborted m Failed a Missing Result Finished aa N siWOooOOWrRS N Figure 5 67 Progress of running experiment SILVACO 176 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial bg build scratch simulations vwf_appnote_data examples vwf test2525a xml DOE File Edit Experiment Tools Help ella a oli all Description Resources Deck Tree Worksheet SplitPlot Worksheet l PARAM capval PARAM tempval PARAM VDD fall_dly fall_pass lors 5 1 7172e 08 1 27069e 08 4 5 1 70494e 08 1 22742e 08 5 5 1 73487e 08 1 31133e 08 5 1 37566e 08 1 05318e 08 4 5 1 41056e 08 1 06234e
37. ocalhost vwf_v6_upgraded ocalhost vwf_v7 ocalhost vwf_v7_tpb ocalhost baseline_2012 annachn vwf_v6_upgraded ocalhost vwf MOSFET ALLL demo Free space 407 7 GB Fal VWF Copyright SILVACO Inc A Figure 3 4 Main Window after successful login Note Any given directory may only contain a single base deck The is used to indicate selected version numbers for tools like TonyPlot SPAYN DeckBuild or others Figure 3 5 displays the information when the button is clicked In this case a SPAYN version of 2 12 0 R and a DeckBuild version of 4 0 0 C was selected Please see Chapter 4 Customizing VWF Preferences Panel on how to change version numbers for tools SILVACO 36 VWF User s Manual Main GUI components Using the VWF GUI ace 4G pyright SILVAC spayn 2 12 0 R deckbuild 4 0 0 C Figure 3 5 Tool Version Information Figures 3 6 and 3 9 show the Main Window with the folders pane hidden This can be achieved by clicking on the Folders button of the window The Folders button acts as a toggle switch Thus the folders will reappear by clicking the button again In Figure 3 9 an additional filter was applied to adjust the view of the main pane Here only experiments but not base decks are shown at VWF Explorer ial leg File Edit View Help Greides J al otecmotwmosrer CS 8 B base deck Expo1 Exp02 demo Free space 407 7 GB VWF Copyri
38. 08 5 5 1 37677e 08 1 06717e 08 5 4 5 2 04928e 08 1 37025e 08 5 5 4 5 55i Bia 4 5 5 5 5 4 5 Running vwF 2 12 5 R Copyright 1984 2014 Silvaco Inc Figure 5 68 Live update of extracted parameters in the worksheet Note A more elaborate version of this example is shipped with the VWF software SILVACO 177 VWF User s Manual Virtual Wafer Fab SILVACO Chapter 6 Optimization in VWF Optimization in VWF VWE comes with a set of powerful optimization algorithms If you are already familiar with optimization in UTMOST IV then you will find the supported optimization algorithms and their parameters straight forward and simple to use The idea of optimization in VWF is to directly optimize a target variable by tuning split parameters automatically rather than using a predefined split tree The optimization algorithm will choose a set of values for your split variables so that a chosen target function will be minimized One notable difference between optimization and DOE is that in an optimization experiment the number of jobs simulations that are executed cannot generally be told in advance Whereas in a DOE the exact number of jobs is already known in advance and solely depends on the split tree It is therefore evident that the concept of a split tree does not make sense for optimization Instead a table of simulation results is ke
39. 13 Enter a group ID range Grid Engine group id range GI When jobs are started under the control of the Grid Engine an additional group id is set on platforms that do not support jobs This is done to provide maximum control for Grid Engine jobs This additional UNIX group id range must be an unused group id s in your system Each job will be assigned a unique id during the time it is running Therefore you need to provide a range of id s that will be assigned dynamically for jobs The range must be big enough to provide enough numbers for the maximum number of Grid Engine jobs running at a single moment on a single host For example a range like gt 20000 20100 lt means that Grid Engine will use the group ids from 20000 20100 and provides a range for 100 Grid Engine jobs at the same time on a single host You can change at any time the group id range in your cluster configuration Please enter a range gt gt 20000 20100 Using gt 20000 20100 lt as gid range Hit lt RETURN gt to continue gt gt 14 Verify the spooling directory for the execution daemon Grid Engine cluster configuration Please give the basic configuration parameters of your Grid Engine installation lt execd_spool_dir gt The pathname of the spool directory of the execution hosts User gt root lt must have the right to create this directory and to write into it Default var opt GRID default spool gt gt Hit lt RETUR
40. 2 8 xx 2 6 xx 2 4 xx or 2 2 xx version of VWF then you need to upgrade the database to version 7 v7 Upgrading a database is done by using the SRDB utility Note Version numbers for databases evolve in a different numbering scheme as do version numbers for the VWF software Versions 2 10 0 to 2 10 3 of VWF were based on the version 5 v5 database schema 2 10 xx versions of VWF above 2 10 3 use the database schema version 6 v6 The 2 12 xx series of VWF uses database schema version 7 v7 Note It is advisable to fully backup your existing database before you do the actual upgrade To perform a backup of an existing database and all simulation files you must use the vwf_backup utility This utility is based on the SRDB utility with the notable addition that simulation files are backed up as well If the tool is invoked without a command line argument it prints a short usage message SILVACO 18 VWF User s Manual VWF Modes Installation VWFEF_ BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved ERROR 2013 03 14 09 38 43 749 option host missing ERROR 2013 03 14 09 38 43 749 option passwd missing ERROR 2013 03 14 09 38 43 749 option db missing ERROR 2013 03 14 09 38 43 749 option file missing usage vwf_backup host hostname db database name passwd password file output file srdb path_to_srdb flags flags_to_srdb properties properties file bd base_directory srdb select which s
41. 35 136608000 650 514 6 12236e 07 583 082 0 294137 19687100000 1968 71 142237000 677 319 6 14672e 07 585 402 0 297353 19687100000 1968 71 146993000 699 967 6 41023e 07 610 498 0 310101 19687100000 1968 71 145058000 690 752 6 3521e 07 604 962 0 307289 20237200000 2023 72 72610500 226 908 3 61916e 07 226 197 0 111773 20237200000 2023 72 59724500 186 639 3 2344e 07 202 15 0 0998903 20237200000 2023 72 59425800 185 706 3 22704e 07 201 69 0 099663 19835300000 1983 53 238124000 744 138 9 95497e 07 622 186 0 313676 19835300000 1983 53 212498000 664 056 9 3285e 07 583 031 0 293936 19835300000 1983 53 210951000 659 222 9 30578e 07 581 611 0 29322 19699200000 1969 92 257405000 804 391 1 02736e 06 642 1 0 325952 19699200000 1969 92 244306000 763 456 1 01019e 06 631 369 0 320505 19699200000 1969 92 242136000 756 675 1 00792e 06 629 95 0 319785 z oa a z Ga z zi m mi or Tl aa ie ia H F A ee aod ED EE 2 EN ES E Ga a Figure 4 7 Worksheet Columns Automatic Setting SILVACO 108 VWF User s Manual Customizing VWF Preferences Panel tj x2545 Silvaco COM vwfex01 DOE 10007 eee ee eee 1 98457e 10 1 98457e 03 1 14331e 08 6 35172e 02 5 18903e 07 5 76559e 02 2 90521e 01 2 02128e 10 2 02128e 03 2 32968e 07 2 32968e 02 1 13574e 07 2 27148e 02 1 12378e 01 2 02128e 10 2 02
42. 6 34 Calibration Results Table 6 2 Simulated Trench Depths Width um Trench depth angstrom 2 50707 6 5 71302 1 10 82736 5 17 84801 6 20 84233 SILVACO 220 VWF User s Manual Optimization Example Advanced Calibration Task Optimization in VWF Figure 6 35 depicts how the optimizer progresses over time You can see that the deviation measured as cost decreases with increasing iteration numbers This shows the optimization problem achieves good convergence pedigree vp _calib Optimization Levenberg Marquardt IE File Edit Experiment Tools Help Gil e o Description Resources Deck Parameters Setup Worksheet Results Cost for target trenchdepth 6 99 6 2 5 4 a LOCC oo oof Re AEN AT TE ET fh soot VSal TALL IAT LAL AL A Id tal A OO OHT YTT T 2 23 2 29 5 57 84 5 112 140 167 194 222 250 277 iteration WV Update Graph Ready Finished Q Free space 24 1 mB VWF Copyright SILVACO Inc Figure 6 35 Progress of Optimization SILVACO 221 VWF User s Manual References Optimization in VWF 6 8 References 1 Hauguth M Integrated plasma processing simulation framework linking tool scale plasma models with 2D feature scale etch simulator Journal Microelectronic Engineering archive Volume 86 Issue 4 6 Elsevier Science Ltd Oxford UK April 2009 SILVACO 222 VWF User s Manual
43. 6 6 Target Definition Language VWE can use the DBInternal simulator to define both vector and scalar targets This is particularly useful if some computations will be performed which deviate from the standard default VWF internal implementation The computations are performed using the evalmath language of DBInternal In the following a short example is given It creates a variable called rel_err from two curves read from files ref_curve dat and extract dat go internal read curves into variables for use in evalmath statements read vector name id_vd_ref file ref_curve dat read vector name id_vd_sim file extract dat evalmath result rel_err file target dat compute a relativ rror assume there are no 0 values in ref curve help Sid_vd_sim Sid_vd_ref id vd_ref compute dot product square divide by length of vector and take square root thereof The result is assigned to the result variable rel_err and stored in file target dat Sqrt help help Length help endeval The target language of DBInternal supports the following built in functions and operators e Sqrt computes the square root of a scalar value or of all elements of a vector e Ln computes the logarithm of a scalar value or of all elements of a vector e Abs computes the absolute value of a scalar or of all elements of a vector e Length returns the dimension of a vector Dot computes the dot product of two vectors
44. E E EE tics 18 R V pto y Data eee Variations of USING VWF sccciceiabs caste ciecensceindeassteuscadeoccaatedentenaes 14 eee SS Ra mE a TORR saeou panaan 246 251 E farcsc oedecacorzacescacdeceaceesacts ceeenscic 213 214 AYAL F Cea tla REA EEEE TTE A 28 RSM PIOS icsi a 121 VO GAPE picie siege eens a RUNNING Scripts eee eeeeeeeeeeeeeeeeeeeeeeeeeteaeeseeseeeeeseeeneeeeaees 232 MAUL TIONS sesame stoeat can Seances pice Ba oee Running SmartSpice ccceeseesceseeeeeeeeeeeeeeneeeseeeenees 166 168 w S Worksheet SASL 3i Formatting Cells eeeeseceescesseeeeteeseeeeeeeseeeeeeeeeeeees 72 75 E E tans c tei so tecte eae Sy Worksheets Scientific Notation cccccceccesessssssssssseeeeeeeeeeeeeeeeeess 107 109 Importing Data to Define DOES ceseeseessesseeseeseeeeees 154 157 SCHPUEMHON ite ines eneee ee ae E EE a 113 Sending to SPAYN nnnssnssnsnnnnssnnnennnnnnnsnnsnennnnnresennenna 158 160 Defining Custom Strategies cceseeeeseeseeeeeeeees 231 234 Running Experiments in Batch Mode eeeeeeeeseeees 225 230 Target Scripts for Optimization eeeeceeeeeeeeeteeeeeteeeeeeees 235 e eE A AAE EEEE 238 243 Simulated Annealing SA ecceeeceeeeeesteeeeeeeeeeteateeeeeteeeees 180 Sipc SPAY IN oconnori iee 117 TONYA O e t aana a Tamna ad deeds 117 SmartSpice ssccncasscsdscedss cxsusiensscceesdedeecsues cavseeenssiedeyscee 121 166 SMANVIOW city iseis a a a E 121 SPAYN Sending Worksheets to seceeeee
45. Figure 5 59 Extracting SmartSpice variables in VWF After loading the edited input deck define three split parameters capval tempval and VDD in the VWF deck editor tab See Figure 5 61 Split parameters can easily be added when using PARAM statements in your simulation deck Simply place the cursor anywhere in the PARAM statement line and right click The VWF interface will search the line for recognizable parameters and list the available parameters in a pop up form Then select the parameter using this form For parameters not recognized by the interface use the following method to enter splits 1 Highlight a parameter by either double clicking it or dragging the cursor over the word while holding the left mouse button down 2 Right click and select the command Make selection split SILVACO 170 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial 525r 10017 File Edit Experiment Tools Help 18 z B 32 OLS Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Deck editor go smartspice Schematic name comparator_sim PARAM capval 1e 12 PARAM tempval 25 PARAM VDD 5 C1 OUT GND capval V1 VDD GND DC VDD V2 INM GND DC 2 5 V3 VREF GND DC VDD 2 V4 INP GND SIN 2 5 1 1MEG X1 INM INP OUT VDD VREF GND comparator Schematic name comparator SUBCKT comparator INM INP OUT VDD
46. Figure 7 2 will open allowing you to select a shared object file v Select a dynamic library file to use ook in a site alpha lib vw 2 8 10 R x86_64 linux js gt Ka c EE HF File name vwt_js_setup so File type Dynamic Library so Cancel I Keep as default library to use Figure 7 2 Choosing a Shared Library If the library was not loaded then an error will be displayed when the script is executed Below is the error shown for the Latin Hypercube example 330 ReferenceError srand is not defined Execution failed 1 error s 0 warning s This indicates that a function srand is needed from the script but is unavailable 7 2 5 Writing Messages to the Console The VWF system defines a method where you can write messages directly into the console of VWE This can be done using the print_console function The following code snippet demonstrates this print_console dbar dbar print_console Se Ee VF print_console po p0 Above statements will print the values of variables dbar c and pO to the console SILVACO 234 VWF User s Manual Defining Target Scripts for Optimization Scripting in VWF 7 3 Defining Target Scripts for Optimization This allows you to override the default way of how VWF computes the optimization target out of simulation results Please refer to Section 6 7 Optimization Example Advanced Calibration Task SILVACO 235 VWF User s Manual
47. Free space 407 7 GB 4 VWF Copyright SILVACO Inc A Figure 3 17 Main Window Arrange Icons By Name entry e VWF Explorer El File Edit View Help feren OO Osmose SSS nome Type istmoa owner B base_deck Baseline Fri Mar 15 16 10 13 2013 demo annach vwf_v6_test annach vwf_v5_up annach_test vwf_test jexpor Experiment Fri Mar 15 16 10 18 2013 demo ocalhost vwf_v6_upgrad ocalhost vwf_v7 ocalhost vwf_v7_tpb ocalhost baseline_2012 annachn vwf_v6_upgradi ocalhost vwf MOSFET Ej Exp02 Experiment Fri Mar 15 16 10 22 2013 demo Ee 03 Experiment Fri Mar 15 16 32 05 2013 demo D2OD OOD ODO D demo Free space 407 7 GB 4t5 VWF Copyright SILVACO Inc _ Figure 3 18 Main Window Icons Arranged By Name SILVACO 47 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 19 shows the menu entry to create a new experiment To create new experiments right click into main pane and select New Experiment VWF Explorer File Edit View Help erer Po laccatetwimosret SO lannach vwf_v6_test A lannach vwf_v5_up 8 E E E Q lannach _test vwf test mosl base_deck Exp0l Exp02 Exp03 localhost vwf_v6_upgrad localhost vwf_v7 localhost vwf_v7_tpb localhost baseline_2012 im annachn vwf_v6_upgrad EH Icons 9 ocalhost vwf List 5 Details Arrange Icons Directory P
48. Grid Scheduler Installing the Open Grid Scheduler Queuing VWF On The Oracle SUN Grid Engine Open Grid B 1 Installing the Open Grid Scheduler Please note that the grid computing software Sun Grid Engine is no longer maintained as an open source package as of 12 31 10 Future updates as well as commercial support for the fully compatible Oracle Grid Engine package is available from Oracle Please refer to Section B 7 References for links to the Oracle grid engine web site A direct successor of Sun Grid Engine 6 2u5 is the Open Grid Scheduler This package is available for free and is included in your VWF tar package The instructions below are referring to the Open Grid Scheduler Note If you already have an installation of either Sun Grid Engine 6 2u5 or Oracle Grid Engine you can continue to use these packages with VWF No further installation is necessary Grid Engine consists of several daemons which must be running on the hosts of the cluster These daemons are the qmaster the scheduler and the exec daemons You must nominate one host as the Grid Engine master host This host runs the qmaster and the scheduler daemon Additionally on every host which shall be used to execute jobs the exec daemon must be running You can also install the exec daemon on the master host if you want to run jobs on this host too Note that you can install the Grid Engine system on a single host only In this case however it is recommended you use
49. Main GUI components Using the VWF GUI You can associate a command with a file type by right clicking on the file and selecting Open With from the menu A dialog as shown in Figure 3 38 will open The dialog allows to select among one of several know types as well as to define a custom type Here the utility display is assigned with files ending in jpg If you check the Always use this program to open these files then the association is permanently kept in the preferences under the point Registered Filetypes If you do not check this box then the association is lost when you restart VWF By clicking Ok the file picture2 jpg is opened by running the command display tmp vwf vwf_basedir vwf_v7_tpb exp_10001 jobs 10008 picture2 jpg Please note the used path as indicated in Figure 3 38 hal Node Information x m Details Name diffus temp Status Finished Path tmp vwf vwf_basedir vwf_v7_tpb exp_10001 jobs 10008 Splits JAMES deck ml in picturel png vwf moslex01_0 s tr Open With diffus temp temp 1000 diffus time time 30 Click the program you want to use to open picture2 jpg Or enter a custom command to use TonyPlot H TextEditor TonyPlot3D Ea MaskViews BB Expert Smartview Runtime EXTRACT gt extract name n nbeta 0 00023928 EXTRACT gt extract name n ntheta 0 131034 EXTRACT gt quit ATLAS gt quit V Use a cu
50. Maximin Latin Hypercube Designs V Roshan Joseph and Ying Hung School of Industrial and Systems Engineering Georgia Institute of Technology Atlanta GA 30332 0205 USA roshan isye gatech edu and yhung isye gatech edu In the following methods that are of specific interest for running a DOE script from within VWE are described in more detail When the script starts it needs to determine which parameters have been selected in the Custom Design dialog and what the parameter boundaries are for those parameters The following code snippet retrieves the number of parameters and sets the number of points that will be computed The object DesignDialog is an object which is defined solely in the VWF GUI It is worth mentioning that this object is neither available when scripts are run using the js option as described in Section 7 1 Run Experiments Outside the GUI nor when run from a JavaScript debugger or any other JavaScript engine function run intervals var axes_count DesignDialog getSelectedVarsCount Compute points count var points_count intervals Important Set DOE points count in the dialog DesignDialog setDOEPointsCount points_count SILVACO 231 VWF User s Manual Defining Custom DOE Strategies Scripting in VWF The part below demonstrates how the boundaries can be obtained for every selected parameter for var i 0 i lt axes_count i var d_min Desi
51. Preferences allows you to revert to the default values as stored in your preferences file This can be useful if you accidentally modified a setting or can t remember the default value Use Settings from Prefrences Settings for optimizer Genetic Algorithm iC Parameter Population size 50 Selection Tournament Crossover probability 0 8 Mutation probability 0 05 Use elitism 1 Maximum number of generations 100 Maximum number of simulations 10000 Acceptable error 0 05 Stop condition Number of generations 20 Stop condition Minimum absolute improvement 0 0025 Cancel a Figure 6 16 Optimizer Settings SILVACO 198 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF 6 6 4 Defining Scalar Targets In the following it will be shown how a scalar target can be defined Figure 6 17 shows the selection of a scalar value the threshold voltage of a MOS transistor nvt is selected as target Additionally a target value to achieve was entered a value of 0 65 The effect of this setup is now that VWF internally subtracts 0 65 from the extracted nvt value and passes the absolute value of that difference as target to the optimizer The optimizer is now setup to find a parameter combination for the defined parameters dose and energy within the given bounds to reach a value of exactly 0 65vV for nvt b 4 lannach opt_ga Optimization Genetic Algorithm 10060 File Edi
52. QI vwfex12 Jvwfex13 4 C vwfex14 Description of experiment vwfex02 demo Free space 14 7 GB a VWF Copyright Silvaco Inc Figure 3 7 Main Window description pane Figure 3 8 displays the description pane for the case where the folders are hidden similar to Figure 3 6 but with an experiment being highlighted VWF Explorer File Edit View Help Folders ims C localhost vwf_v7_tpbjexamplesjvwfexo2 0 vwfex02_base ff Description of experiment vwfex02 The objective is to extract 4 process parameters gate oxide time and temp as well as Vt adjust implant dose and energy in order to get a targetted Vt of 0 65V In this experiment we defined a Box benken Doe in order to generate a quadratic model of Vt as a function of the 4 process variables in Spayn and then perform a synthesis analysis in Tonyplot by setting Vt to 0 65V Comparison with the optimization approach can be made see Athena_Atlas exampleunder the OPTIM directory Doe Approach allowing quadradic model generation and use of tonyplot synthesis capability to extract process parameters for targetted VT of 0 65V Diff time 11Temp 941Dose 9 67e11Energy 7 55 demo Free space 14 7 GB a VWF Copyright Silvaco Inc Figure 3 8 Main Window description pane disabled tree view SILVACO 38 VWF User s Manual Main GUI components Using the VWF GUI VWF Explorer
53. VREF VSS M1 NET3 NET3 VDD VDD CMOSP L 2U W 10U AD 30P PD 26U AS 30P PS 26U M 1 M2 NET4 NET3 VDD VDD CMOSP L 2U W 10U AD 30P PD 26U AS 30P PS 26U M 1 M3 NET3 INP NET2 VSS CMOSN L 2U W 5U AD 15P AS 15P PD 16U PS 16U M 1 M4 NET4 INM NET2 VSS CMOSN L 2U W 5U AD 15P AS 15P PD 16U PS 16U M 1 Finished vwF 2 12 5 R Copyright 1984 2014 Silvaco Inc Figure 5 60 Defining Split Parameters in VWF After selecting the split parameters you can set all 27 conditions in only three steps in the VWF tree tab 1 Define splits for the VDD parameter as 5V 10 To do so change into either the tree or the worksheet tab Then open the dialog to add branches by right clicking on the VDD parameter and selecting Add multiple branches The dialog is shown in Figure 5 61 There are several ways to enter splits In this example a percentage is defined 10 After pressing Enter the branches are added and the tree will look as shown in Figure 5 62 2 Repeat step 1 for the tempval parameter This time a list of values 40 25 120 is used Figure 5 63 Note the changed tree view after you press Enter Figure 5 64 3 Repeat step 1 once more to define capval as shown in Figures 5 65 and 5 66 SILVACO 171 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial v ene BIE C Additive Multiplicative f Percent List Initial Value s percent 10 F
54. VWF Modes Installation Verifying permissions done nstalling servers in init d nstallation done Starting and verifying servers LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux usr lib lib usr openwin 1lib build silvaco lib support x86_64 linux build silvaco lib support i386 linux usr lib lib usr openwin lib build silvaco lib support x86_64 linux build silvaco lib support i386 linux Verification done FIREBIRD installation completed successfully After that firebird has been successfully installed and databases can be created in the build silvaco var srdb directory by using the SRDB utility Starting Stopping Firebird It may be necessary to stop the database system for maintenance In this case you can stop the firebird server by using build silvaco bin firebird stop You can later re start firebird again by using puild silvaco bin firebird start Note Firebird is stopped and started automatically whenever you reboot your system Note Starting and stopping the firebird server requires root privileges De Installing Firebird To de install firebird from your system please use the following command build silvaco bin firebird deinstall This will undo what has been done with firebird install but will not
55. a amp 3 8 a ala a T script var result new Array target length print_console target target if target length response length a throw length of target and response not equal 9 var cost 0 0 for var i 0 i lt response length i Ki print_console resp i response i print_console target i target i var diff response i target i print_console diff diff var relErr responsef i taraetl i 1 taraetf i 1 0 Error s 0 Warning s Ln 1 Col 1 Script loaded from file export datal thomasb script js Preparing 5 Free space 592 7 MB VWF Copyright SILVACO Inc Figure 6 6 Using a Target Script The Worksheet pane consists of three parts In the top most part target values can be entered for DOE type parameters The middle part allows to select edit and debug a target script The bottom most part shows debug output from the target script The functionality and advantage of scripted optimization is best illustrated by an example Please refer to Section 6 7 Optimization Example Advanced Calibration Task for an example of how a target script can be used to calibrate an ion enhanced chemical etching IECE model of the 3D process simulator Victory Process SILVACO 188 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF 6 6
56. a Pin from the Worksheet SILVACO 92 VWF User s Manual Main GUI components Using the VWF GUI tjlx2545 Silvaco COM vwfex02 File Edit Experiment Tools Help Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status wm Not Run 4 Queued Running 4 Aborted m Failed 4 Missing Result u Finished Start Experiment diffus time Queue Design Reset DOE 5 diffus temp Remove selected Branch es Kill selected nodes job implant dose r a4 uw implant energy Finished O Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc _ Figure 3 70 Clearing All Previously Set Pins After all jobs of an experiment have been finished you can view the extracted results in the worksheet or with an external tool like SPAYN see Figure 3 71 It is possible that not all simulation jobs finished properly and give results It is also possible that only a subset of results are available from some or even all of the jobs If this is the case you will have to inspect the runtime output of the simulation to further examine the cause of the problem You will also have to tune deck parameters and rerun the failed simulations if you want the results Note The worksheet is actually updated with extracted results whenever a job has finished SILVACO 93 VWF User s Manual Main GUI components Using the VWF GUI tjlx2545 Silvaco COM vwfex02 I
57. a SA optimization is outside of its valid range of 0 to 1 OPT_RC_SA_INVALID_START_TEMP The starting temperature value specified for a SA optimization is not strictly positive OPT_RC_PT_MAX_CYCLES The specified maximum number of cycles in a PT optimization has been reached SILVACO 213 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF e OPT_RC_PT_BAD_TEMP_RANGE The temperature range specified for a PT optimization is invalid The maximum temperature must be strictly greater than the minimum temperature and the minimum temperature must be strictly greater than zero e OPT_RC_GA_INVALID_MUTE_PROB The mutation probability specified for a GA optimization is outside of its valid range of 0 to 1 e OPT_RC_GA_ODD_POPSIZE The population size specified for a GA optimization is not even e OPT_RC_DE_INVALID_AMP_FACT The amplification factor specified for a DE optimization is outside of its valid range of 0 to 1 SILVACO 214 VWF User s Manual Optimization Example Advanced Calibration Task Optimization in VWF 6 7 Optimization Example Advanced Calibration Task In this section an example is presented to demonstrate the setup of an advanced calibration task carried out with the Victory Process simulator This example is also available from the examples shipped with VWF The optimization task consists of the calibration of a 3D ion enhanced chemical et
58. deck line as shown in Figure 3 30 to pop up a list of available parameters of that deck line Select one of the shown parameters By selecting a parameter twice it is denominated again A syntax highlighting scheme is used in the deck so that a selected parameter can easily be identified in the deck A selected parameter is drawn in red As additional information the bottom part of this tab shows a list of all nominated parameters The syntax highlighting scheme will also draw all commented deck lines in green In this example the screen shot shows two parameters in the bottom part time and temp and four different parameters in the deck pane called time temp dose and energy The bottom pane of the Deck tab also shows block type and initial value of the parameter The notion of a block is used to group parameters of a single deck line The block is also visible in the tree tab and will be shown in another screen shot tjlx2545 Silvaco COM vwfex02 Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet amp Deck editor gate oxide grown here diffus time 11 temp 925 dryo2 press 1 00 hcl 3 Extract a design parameter extract name gateox thickness oxide mat occno 1 x val 0 05 vt adjust implant implant boron dose 9 5e11 energy 10 pearson depo poly thick 0 2 divi 10 from now on the situation is 2 D etch poly left p1 x 0 35 Preparing Free space
59. dose 8e 12 4e 12 implant energy 100 50 Figure 3 51 DOE Design Dialog showing 2 Level Full Factorial Design SILVACO 77 VWF User s Manual Main GUI components Using the VWF GUI Other design strategies are available as well In the experiment shown in Figure 3 52 a Box Behnken design with 12 parameters selected is given Figure 3 53 shows the tree which results from this design Me Experiment design a Box Behnken implant dose implant energy impurity Dix 0 impurity Dip O impurity Seg 0 impurity Trn 0 set gate T diffuse time implant dose implant energy diffus time 12 diffus temp Figure 3 52 Box Behnken DOE Design with 12 Parameters SILVACO 78 VWF User s Manual Main GUI components Using the VWF GUI tjlx2545 Silvaco COM DOE_BB12 a x ME a EEEN Figure 3 53 Tree Resulting from Applied Box Behnken Design Experiment custom design Replace existing Add toexisting Figure 3 54 Custom Design Dialog SILVACO 79 VWF User s Manual Main GUI components Using the VWF GUI Instead of using a pre defined DOE strategy you can opt to use a JavaScript program to define an arbitrary strategy Use the Custom Design entry of the context menu which opens by right clicking on any of the lines in the worksheet Figure 3 54 shows this dialog As with the regular Design Dialog Figure 3 51 you need to select whi
60. e operators for two scalars or two vectors element wise To use the computed result rel_err as a target in VWE you must enter an additional extract statement after the evalmath section after the endeval statement define a dummy extract in order to make rel_err available in VWF extract name rel_err outfile target dat This extract statement will tell VWF that there is a target called rel_err which is found in the file name target dat SILVACO 212 VWF User s Manual Optimization in VWF Defining Optimizer Target and Settings Optimization in VWF 6 6 7 Optimizer Return Codes An optimization will finish with one of the following return codes OPT_RC_CONVERGED The best cost obtained is less than the specified tolerance OPT_RC_INCONSISTENT_BOUNDS At least one of the optimization parameterslies outside the defined limits OPT_RC_INCONSISTENT_INPUT The optimization parameters lower bounds and upper bounds arrays are not of the same length OPT_RC_INVALID_CROSS_PROB The crossover probability specified for a GA or DE optimization is outside of its valid range of 0 to 1 OPT_RC_INVALID_STOPPER_DROP The first stopper parameter the analogous function for PT GA or DE is negative OPT_RC_INVALID_STOPPER_STEPS The second stopper parameter the analogous
61. empty To define an experiment first create a directory To do this right click on the shown database localhost tutorial and select New gt Directory A dialog as shown in Figure 5 4 will open VWF Explorer File Edit View Help Directory T Folders A G localhost tutorial Login Logout Running Experiments ma amp Baseline E Experiment demo Free space 407 7 GB VWF Copyright SILVACO Inc _ The name of the directory must be given Note that no two directories with the same name may exist on any given directory level The directories created in this dialog are not related to directories in the file system of your computer or on the network The sole meaning of Figure 5 3 Creating a Directory New Directory Enter name for new Directory ftutori al_01 caca Figure 5 4 Entering a Directory Name directory in this context is to allow you to hierarchically organize experiments SILVACO 123 VWF User s Manual Defining a New Experiment Tutorial Figure 5 5 shows the newly created directory VWF Explorer File Edit View Help G Folders aa E QGlocahosttutoriad a tutorial_01 i tutorial_O1 demo Free space 407 7 GB Psi VWF Copyright SILVACO Inc Figure 5 5 Created Directory After creating a new directory you must create a baseline in this directory
62. general server failed which is displayed when you try logging into the database The problem may have several causes It can be an installation issue where the right version of the vwf_server program was not installed on your system The version of the vwf_server program must be the same as the version of the vwf GUI application You can check the version which is used by using the WV and wvs arguments to the vwf and vwf_server commands as follows thomasb lannach vwf WV 2 8 10 R thomasb lannach vwf_server WVS Available versions for this platform are 2 8 10 R 2 8 9 R 2 8 1 R 2 6 11 R 2 4 15 R 2 2 28 R The output of the first command shows that the default VWF version that is used in your system is 2 8 10 R The output of the second command shows a list of what versions of vwf_server are installed We can see that 2 8 10 R is one of them This works fine as vwf and vwf_server versions are matched automatically In this example if you enter vwf without any options then version 2 8 10 R and vwf_server will be used Another source of errors may be the shell startup file defining your environment variables e g cshre or bash_profile While the output of the vwf_server process is not directly available from the VWF GUI you can look into the log files which are kept in the tmp vwf_logs directory Log files have dates and process IDs in their names so that you can easily identify the log file containing the information for
63. i 2 695e 01 1 982e 10 1 982e 03 5 901e 07 5 901e 02 2 800e 07 i 2 825e 01 1 982e 10 1 982e 03 5 847e 07 5 847e 02 2 y 2 803e 01 7 4 911e 02 5 406 A 628e e 0 5 355e 02 2 720e 0 2 021e 10 2 305e 02 2 1 124e 01 2 021e 10 2 021 03 4 341e 07 2 067e 02 2 196e 07 i 1 035e 01 2 021e 10 2 021e 03 4 309e 07 2 052e 02 2 186e 07 1 030e 01 1 982e 10 1 982e 03 1 417e 08 6 749e 02 6 255e 07 3 005e 01 1 982e 10 1 982e 03 1 381e 08 6 576e 02 6 168e 07 5 874e 02 2 963e 01 1 982e 10 1 982e 03 1 366e 08 6 505e 02 6 122e 07 5 831e 02 2 941e 01 1 969e 10 1 969e 03 1 422e 08 6 773e 02 6 147e 07 5 854e 02 2 974e 01 1 969e 10 1 969e 03 1 470e 08 7 000e 02 6 410e 07 6 105e 02 3 101e 01 1 969e 10 1 969e 03 1 451e 08 6 908e 02 6 352e 07 6 050e 02 3 073e 01 2 024e 10 2 024e 03 7 261e 07 2 269e 02 3 619e 07 2 262e 02 1 118e 01 2 024e 10 2 024e 03 5 972e 07 1 866e 02 3 234e 07 2 022e 02 9 989e 02 2 024e 10 2 024e 03 5 943e 07 1 857e 02 3 227e 07 2 017e 02 9 966e 02 1 984e 10 1 984e 03 2 381e 08 7 441e 02 9 955e 07 6 222e 02 3 137e 01 1 984e 10 1 984e 03 2 125e 08 6 641e 02 9 328e 07 5 830e 02 2 939e 01 1 984e 10 1 984e 03 2 110e 08 6 592e 02 9 3060 07 5 816e 02 2 932e 01 1 970e 10 1 970e 03 2 574e 08 8 044e 02 1 027e 06 6 421e 02 3 260e 01 1 970e 10 1 970e 03 2 443e 08 7 635e 02 1 010e 06 6 314e 02 3 205e 01 1 970e 10 1 970e 03 2 421e 08 7 567e 02 1 008e 06 6 300e 02 3 198e 01 Remove selected Branch es
64. if status finished status myApp waitForEventCheckFinished event SILVACO 226 VWF User s Manual Run Experiments Outside the GUI print_console finished ID event id type event type message tevent msg else if status terminate print_console experiment was terminated by Ctrl C myExp stopExperiment stop experiment to remove all jobs from the queue END 7 1 2 Running a Database Experiment in Batch Mode Running an experiment in database mode requires you to create an experiment in a database You must do so using the GUI You can either use an existing example shipped with VWF or you can define a new experiment Once the experiment is created do not run it but exit from the GUI and open a command window shell The JavaScript script to run a database experiment in batch mode is not much different from the one to run a filemode experiment The only difference is that instead of the XmlExperimentManager object you now need to use an object of type DatabaseExperimentManager Below the line of code which you need to replace is shown Instead of var myMgr new XmlExperimentManager vwfex01 experiment xml you now need to write var myMgr new DatabaseExperimentManager lannach hostname vwf_v5_up database name demo user name demo password 10012 experiment id The remainder of t
65. if you also want to export generated structures and runtime output Note Adding Result Files may considerably increase both the size of the resulting export file and the time for the export to complete tjlx2545 Silvaco COM tutorial_01 x File Edit Experiment Tools Help E423 yale Description Resources Deck Tree Worksheet SplitPlot Worksheet Data M Experiment I Resourc Results tmp vwf_basedir tjet tutd Creation Date Thu Dec 15 10 43 49 20 ge Thu Dec 15 10 58 51 20 M Results Files Description Finished O Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc _ Figure 5 33 Export Experiment SILVACO 148 VWF User s Manual Exporting Worksheet Tutorial 5 7 Exporting Worksheet Apart from the export options displayed above it can also be chosen to export just the worksheet data into a comma separated values CSV file This is useful if an external tool e g Excel is used for further investigations on the computed results To export the worksheet select File gt Export Worksheet in the Experiment Window Figure 5 34 This will open a dialog box which will prompt you to select a file tjIx2545 Silvaco COM tutorial_01 EE ee E E O O SS eee edir tjet tutorial tutorial_01_10001 0 43 49 2011 0 58 51 2011 Figure 5 34 Export Worksheet into CSV SILVACO 149 VWF User s Manual Exporting Optimization Results Tutorial 5
66. in a shared location You can invoke vwf in file mode using vwf filemode Note You have to run every experiment in its own directory This is because the VWF file mode creates and removes uniquely named sub directories whenever the experiment is started or restarted 2 3 2 Database Mode This is the standard mode It is invoked if you start vwf without the filemode option VWF keeps all experiment related data in a database system and all simulation files in a central directory VWF is directly built upon a 64 bit relational database system called Firebird to store experiment data This data includes all the statically entered data as described in Chapter 3 Using the VWF GUI plus the information that is computed during runtime of an experiment These are the results extracted from simulations Firebird originally developed by Borland is freely available from The Firebird Project To utilize this mode you need to first install the Firebird relational database system Next you need to create a specific VWF database in Firebird This setup will then allow you running simulation jobs directly on your local workstation or on a grid computing environment One notable difference to filemode is also that experiments are executing in the background This allows you to close the GUI after the experiment was started In the simplest case the background execution takes place on the very same machine where you also run the GUI from Th
67. jobs put on hold will become active and will run whenever the LSF scheduler decides it can run more jobs SILVACO 296 VWF User s Manual SILVACO Appendix D Recommended Practice Multi Threading Recommended Practice D 1 Multi Threading Under certain circumstances an overqueuing overloading of your system can occur This can happen if you are using the multi threaded option of Silvaco simulators If enabled a multi threaded simulator will use as many CPUs installed in a computer system or as many as specified on the command line Consider the following scenario of a 4 CPU SMP machine which will be used with grid engine The default configuration of grid engine is to allow running 4 jobs concurrently on this host If each job in turn uses all 4 CPUs then the load will increase by a total of 16 This indicates that there are now 16 CPU intensive threads running on this host which most likely was not intended Please note that this problem is not limited to running jobs on a cluster like grid engine but will also occur if VWF is used to run jobs only on a single machine local mode Again overloading can occur if simulators use more than one CPU To avoid such scenarios you should always run simulators in single threaded mode option P 1 when used from within VWF If you still want to use the multi threading option please make sure that there are no more tasks as there are CPUs in your system that run at any given time
68. localhost vwf E Figure 3 3 Main Window with added VWF Databases SILVACO 35 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 4 shows the scenario after a successful login to the database vwf on host localhost VWF is now ready to explore experiments stored in this database The connection to the database remains open until you either log out manually or close the application Experiments can be organized hierarchically by means of using directories In Figure 3 4 the left pane shows a directory named MOSFET which contains a base deck called base_deck and two experiments Exp01 and Exp02 which are based on base_deck The handling of experiments follows VWF 1 xx in that several experiments can be based on one base deck The bottom of Figure 3 4 displays status information Starting from the left most entry the information shown is the user name demo followed by the amount of disk space remaining Free Space 407 7GB followed by the tool version button and the copyright message The disk space is displayed in red color in case the remaining space drops below a configurable limit The limit can be configured in the preferences panel of VWF Please see Chapter 4 Customizing VWF Preferences Panel and Figure 4 13 e VWF Explorer l File Edit View Help S feres Po Ocaso SSCS l 3 amp jeck Exp0l Exp02 annach vwf_v6_test annach vwf_v5_up annach_test vwf_test
69. make sure the change is propagated to all components of VWF To do so please set these variables directly in your cshrc or bash_profile startup files terminate all components of VWF including the vwf_daemon and completely log out of your account After logging back in and re starting the VWF it will indicate that the vwf_daemon is being started again as soon you connect to a database As an advanced configuration option you can decide to run the VWF background processes completely isolated on a separate server machine This makes sense for instance if your workstation is no LSF or OGS submit host It also helps you to share data between several users as all data are kept on a central server location Finally it also allows you to implement a more tight security policy as simulation files are no longer directly accessible from regular UNIX accounts No NFS access is needed from the VWF GUI to the server machine Please proceed directly to Database Mode Installing the vwf_daemon on a central VWF server on page 28 below Upgrading from a Previous VWF Install If you are upgrading from a previous release it may be necessary to manually stop the vwf_daemon after the upgrade This is because the vwf_daemon runs in the background and is not normally stopped when you terminate VWF Stopping of the vwf_daemon is only necessary however in case a new vwf_daemon version was installed by the upgrade If you are upgrading from a 2 10 xx
70. mentioned in this manual are the property of their respective owners Copyright 1984 2014 Silvaco Inc SILVACO 2 VWF User s Manual How to Read this Manual Style Conventions Font Style Convention Description Example 7 This represents a list of items or e Bullet A terms e Bullet B e Bullet C 1 This represents a set of directions To open a door 2 to perform an action 1 Unlock the door by inserting 3 the key into keyhole Turn key counter clockwise 3 Pull out the key from the keyhole 4 Grab the doorknob and turn clockwise and pull gt This represents a sequence of File Open menu options and GUI buttons to perform an action Courier This represents the commands HAPPY BIRTHDAY parameters and variables syntax Times Roman Bold This represents the menu options File and buttons in the GUI New Century Schoolbook This represents the variables of x y 1 Italics equations This represents the additional W Note important information Note Make sure you save often when working on a manual SILVACO VWF User s Manual Table of Contents Chapter 1 INVOGUCHON coprenti ech cea cowkeee nde eet Meek howe creeds pane EE 8 1 1 What is Virtual Wafer Fabi VWF 2cccccccceticeceedeteveterensebeteindltbdeeretwweeeeeaeens 9 TA Advantages iiie e aiia aiara hom a ENE deia ES E E EE A E E ace 9 1 1 2 AppICatONS r eeiseeiri rsio eet A e EN ENR ERREA AA ERIRE DE
71. niv nv 9 5e 11 10 0 534386 0 115614 nv 0 174288 29 0936 2176 84 3 73448e 16 m o 610621 Em 5 3979177095e 11 14 648467898 0 367976 0 282024 niv 0 173696 29 0936 2140 14 2 06072e 16 wK 0 455463 ja 1 2530764016e 12 9 2048686743 0 623833 0 026167 nv 0 174316 29 0964 2206 31 4 80851e 16 x 0 703035 5 _ 8 1898738249e 11 10 773861408 n v niv n v n v niv niv n v niv niv 6 1 3375318039e 12 7 4316239357 n v nv niv niv niv niv n v niv niv 8 6930223138e 11 11 892302632 n v Inv niv n v n v n v Inv niv nfv s 8 0169058288e 11 14 62395668 n v Inv nv niv nv nv niv niv nfv 9 6 9327480119e 11 5 6149178743 n v niv n v iniy n v nfv Inv niv niv 5 324498928e 11 5 876287818 n v n v n v n v n v n v niv niv n v 1 2691351484e 12 12 824925184 n v n v n v in v n v n v niv n v n v 1 0615134942e 12 12 621185184 n v niv n v inv nfv nfv niv n v n v 1 3928837151e 12 11 197377443 n v niv nfv nfv niv n v niv n v n v 5 6033969177e 11 13 43210876 n v niv n v n v kE W View all results Running Free space 586 0 MB VWF Copyright SILVACO Inc Figure 6 20 All Extracts Shown SILVACO 202 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF ad Curve Display sheet cond v bias at iteration 3 0 000235 0 000212 anal Enn A cae Figure 6 21 Viewing a Vector Response SILVACO 203 VWF User s Manual Defining Optimizer Target
72. or the repeat count is exceeded A value of 0 for the repeat count means that simulations are not repeated A failing simulation will stop the optimizer and no further iterations are performed Before the optimization experiment is restarted it is advisable to investigate the reason for the failure by looking into the runtime output of the simulation which has failed For a selected target you can choose to define a value to achieve for instance a certain voltage In this case the optimizer minimizes the difference between the selected target and the entered target value Or you can decide not to enter a value and let the optimizer find the minimum of the selected target This can be useful if your target already is a measure of difference e g least squares error between two curves A separate target language is available in the DBInternal tool for more advanced target definitions Please refer to Section 6 6 6 Target Definition Language for details An alternative way of computing the target is to use a JavaScript script Figure 6 6 shows the Worksheet tab with a target script to compute a vector target SILVACO 187 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF g lannach opt_ga Optimization Genetic Algorithm 10060 File Edit Experiment Tools Help Ie Olle Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs B 4 a
73. remove the databases from your system You will have to remove database files from directory SSILVACO var srdb or remove the directory altogether When you do a deinstall followed by a insta11 the same databases that were available before the deinstal1 will be available after the install again Note Uninstalling the firebird server requires root privileges Creating a VWF Database SILVACO 23 VWF User s Manual VWF Modes Installation Some system and database administration work will be required to setup and maintain the database system for VWF VWF databases can coexist with Utmost IV databases on the same firebird server You do need to create at least one separate VWF database To create a VWF database use the SRDB utility The following gives a short description of how to use this utility See the SRDB User s Manual for more information First invoke the SRDB command line utility Make sure you have an SRDB version of 2 4 22 R or higher You don t need root privileges to run any of the SRDB commands described in this manual thomasb lannachn srdb S RDB Version srdb 2 4 22 R 2013 03 15T15 33 57 Copyright c 1984 2013 Silvaco Inc All rights reserved SRDB gt Next you need to connect to a running database server In this example this is the same machine from where SRDB is invoked 1annachn SRDB gt login lannachn Password for server lannachn lannachn gt The prompt changes from SR
74. run quit Line 1 paste G li pause clear restart kill Stop None za Monte Carlo Deposit Etch Enabled OPTOLITH Enabled It is now Thu Dec 15 10 39 36 2011 Executing on host tj1x2545 Silvaco CoM aa v Loading model file athenamod done ATHENA gt ATHENA started ATHENA Figure 5 10 Started DeckBuild Application 127 VWF User s Manual SILVACO Defining a New Experiment Tutorial For reference Figure 5 11 depicts the second method of importing a deck Here the Import button was pressed to open a file selection dialog A default filter is applied to only show files ending in in and inp VWF Explorer e e File Edit View Help E Folders me localhost tutorial tutorial_O1 Q localhost tutorial Ss tutorial 01 Select a deck to import Look in i export datai thomasb examples z a fl ce EE a FE Baseline base File name moslex01 in File type Deck inp in z Cancel import Export cvs DeckBuild Lo Cancel demo Free space 407 7 GB 4t VWF Copyright SILVACO Inc _ Figure 5 11 Importing Baseline SILVACO 128 VWF User s Manual Defining a New Experiment Tutorial Figure 5 12 shows the dialog which opens right after a baseline deck was selected You can see the deck displayed in the editor pane Some portions of the deck are highlighted in different colors and in bold font Scroll
75. same manner as for the DOE type experiment Figure 6 4 depicts the context menu which is shown when you right click over a deck line bg lannach opt_ga Optimization Genetic Algorithm 10060 Ox File Edit Experiment Tools Help lel olle Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Deck editor vt adjust implant implant boron dose 9 5e11 22 Standard Menu boron depo poly thick 0 2 divi 10 dose from now on the situation is energy etch poly left p1 x 0 35 pennor method fermi compress diffuse time 3 temp 900 weto2 press 1 0 Preparing 5 Free space 592 8 MB VWF Copyright SILVACO Inc A Figure 6 4 Defining Split Parameters SILVACO 185 VWF User s Manual Defining Parameter Boundaries Optimization in VWF 6 5 Defining Parameter Boundaries Figure 6 5 shows the parameters tab You can see that you can change the minimum and maximum values you can decide this parameter to be a DOE parameter and you can select the scaling type for each parameter Selecting a parameter to be of type DOE will exclude it from being used by the optimizer Instead you can define a tree of parameter combinations for all DOE type parameters All combinations are then run for each optimizer iteration This is useful if you have several sets of measurements for parameters which you don t want to optimize For ex
76. set tings sh or settings csh file from your login profile or manually source these scripts iv Experiment exception DrmaaException MSG drmaa error code 1 txt Please set the environment variable SGE_ROOT Copy to Clipboard Figure B 15 Error with SGE_ROOT not set e Jobs not executed If some or all jobs fail when executed on the Grid Engine but the jobs still work when executed in the Local queue this could mean that some or all hosts of the Grid Engine cluster do not have read write access to the VWF fileserver location e No email notifications are sent although options have been configured This could mean that the underlying email system is not configured to allow sending emails Emails are sent directly from the host which executes the job Therefore every host that is a part of the Grid Engine cluster must be configured to allow sending email Note It is possible to have several profiles for the same queuing system This is useful if you want to quickly change the set of options that are passed down to the queuing system For instance you could have one SILVACO 290 VWF User s Manual Submitting Jobs Queuing VWF On The Oracle SUN Grid Engine Open Grid profile defining email notifications and another one without email notifications defined When running experiments with a large number of simulation jobs you can then select to disable email notifications whereas for an experiment with a
77. small number of long running simulation jobs you might want to receive notification as soon a simulation job has finished SILVACO 291 VWF User s Manual Uninstall Open Grid Scheduler Queuing VWF On The Oracle SUN Grid Engine Open Grid B 6 Uninstall Open Grid Scheduler On On the master host run the following to uninstall all the execution hosts SSGE_ROOT inst_sge ux host grid0 gridi the master host run the following to uninstall the master host SGE_ROOT inst_sge um 1 Remove the file rm rf SGE_ROOT 2 Remove the following lines from etc services on all hosts sge_qmaster 536 tcp sge_execd 537 tcp 3 Remove the following line from etc csh cshrc on all hosts source var opt GRID default common settings csh 4 Remove the following line from etc bashrc on all hosts source var opt GRID default common settings sh SILVACO 292 VWF User s Manual References Queuing VWF On The Oracle SUN Grid Engine Open Grid B 7 References For information about the Open Grid Scheduler please go to http gridscheduler sourceforge net For information about Oracle Grid Engine please go to http www oracle com technetwork oem grid engine 166852 html ssSourceSiteld ocomen Full documentation of the old Sun Grid Engine 6 2u5 can be found at http arc liv ac uk SGE howto howto html SILVACO 293 VWF User s Manual Virtual Wafer Fab SILVACO Appendix C Queuing VWF O
78. srdb tutorial fdb vwf VWF 6 build silvaco var srdb vwf fdb vwf_demo2 VWE 7 build silvaco var srdb vwf_demo2 fdb vwf_v2 VWE 7 build silvaco var srdb vwf_v2 fdb SILVACO 25 VWF User s Manual VWF Modes Installation vwf_v5 VWE 5 build silvaco var srdb vwf_v5 fdb vwf_v5_up VWF 6 build silvaco var srdb vwf_v5_up fdb vwf_v5_upgraded VWF 6 build silvaco var srdb vwf_v5_upgraded fdb vwf_v6 VWF 6 build silvaco var srdb vwf_v6 fdb vwf_v6_test VWF 6 build silvaco var srdb vwf_v6_test fdb vwf_v6_tpb VWE 6 build silvaco var srdb vwf_v6_tpb fdb vwf_v6_upgraded VWE 7 build silvaco var srdb vwf_v6_upgraded fdb SRDB lannachn gt To delete a database use the following command SRDB lannachn gt delete vwf LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid lsf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build silvaco lib support 1386 linux Use CONNECT or CREATE DATABASE to specify a database Database vwf deleted from server lannachn SRDB lannachn gt To create anew VWF database use SRDB lannachn gt create vwf VWF build silvaco var srdb Database creation Database version not specified Defaulting to 7 LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib bu
79. string Please note that the usage of the custom format type is considered an advanced feature Care was taken to restrict the format string to floating point formats An error is displayed in case an illegal format string is entered Figure 3 50 displays the situation where an illegal format string s was entered The entered format is not accepted in this case and the OK button is grayed mi Choose format for max_XX_Stress Formatting Custom gt format string 10 31f Preview value 1 98457e 10 display 19845700000 000 cnc Figure 3 49 Custom Format mj Choose format for max_XX_Stress Formatting Custom gt format string s Preview value 1 98457e 10 display illegal format s entered OK Cancel Figure 3 50 Illegal Format was Entered SILVACO 75 VWF User s Manual Main GUI components Using the VWF GUI 3 3 5 Defining Splits There are several ways of entering split points The most convenient way is to select one of the predefined DOE designs as shown in Figure 3 51 The DOE design dialog Figure 3 51 can be opened by right clicking on any of the lines in the worksheet and selecting Design from the context menu The dialog allows you to select one of several designs by using the drop down menu Figure 3 51 shows a 2 Level Full Factorial with no parameters selected yet To complete the definition of the DOE design you have to s
80. that all newly created experiments will be created with the changed baseline Figure 3 24 shows the dialog to create a new baseline deck You can choose to either import a deck from the filesystem from CVS or from DeckBuild Please refer to Chapter 5 Tutorial for a more detailed description of how to import a deck using DeckBuild iv Baseline base E Import Export a eo DeckBuild Cancel Figure 3 24 Dialog to Create A Baseline Deck SILVACO 53 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 25 depicts how a CVS repository can be accessed You need to enter host repository location and valid user credentials la VWF Explorer EN hs Add CVS Repository lannach vwf_v6_test I h vwf_v5 lannach vwf_v5_up Baseline ba Jevsserver lannach_test vwf_test localhost vwf_v6_upgraded O localhost vwf_v7 GQ localhost vwf_v7_tpb GQ localhost baseline_2012 lannachn vwf_v6_upgraded localhost vwf MOSFET CVS Browser H examples Figure 3 25 CVS Repository Information SILVACO 54 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 26 shows a populated tree after a successful browse operation The available content of the CVS repository is shown Here some Athena and Victory examples are shown In the right hand side of Figure 3 26 two files which have been checked out are shown The left pane shows the file a
81. the Silvaco Simple Queue instead These instructions are a cut and modified version of the install procedure explained in the N1 Grid Engine 6 Installation Guide found in Section B 7 References If you require additional information it will be in that guide These instructions will occasionally refer to the N1 Grid Engine 6 Installation Guide These instructions will also be a quick start reference for setting up the Open Grid Scheduler on the single machine SILVACO 258 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid B 2 Open Grid Scheduler Installation with the GUI Installer The Open Grid Scheduler OGS package shipped with this version of VWF comes with a graphical installer GUI installer which simplifies the installation process An example of how OGS can be installed on a single host is given below B 2 1 Prerequisites Before you can run the installer please make sure you login as root user Next you need to select a location where the OGS tar files need to be untarred Here the directory build grid ogs was chosen There are two files that need to be untarred After changing to the directory build grid ogs please enter tar xvzt site alpha lib vwf 2 10 4 R common ogs 2011 11p1 bin linux x64 tar gz tar xvzf site alpha lib vwf 2 10 4 R common ogs 2011 11p1 common tar gz Instead of site alpha as shown above you must sup
82. to start when the system is booted qmaster startup script We can install the startup script that will start gmaster at machine boot y n y gt gt y cp var opt GRID default common sgemaster etc init d sgemaster VWEF2009 usr lib lsb install_initd etc init d sgemaster VWF2009 Hit lt RETURN gt to continue gt gt SILVACO 278 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid Grid Engine qmaster startup Starting gqmaster daemon Please wait starting sge_qmaster Hit lt RETURN gt to continue gt gt 18 Identify the hosts that you will later install as execution hosts Adding Grid Engine hosts Please now add the list of hosts where you will later install your execution daemons These hosts will be also added as valid submit hosts Please enter a blank separated list of your execution hosts You may press lt RETURN gt if the line is getting too long Once you are finished simply press lt RETURN gt without entering a name You also may prepare a file with the hostnames of the machines where you plan to install Grid Engine This may be convenient if you are installing Grid Engine on many hosts Do you want to use a file which contains the list of hosts y n n gt gt n Adding admin and submit hosts Please enter a blank seperated list of hosts Stop by entering lt RETURN gt You may repeat this s
83. use of analysis and measure statements in the control card Figure 5 57 R Gateway build scratchisimulationsivwi_appnote datalexamplesivwi comparatorschir Sheet 1 5 File Edit View Draw Sheet Tools Simulation Post Process Layout Window Help 18 x PERE RCEIINOSARABHE A AO PS a REE S BANA AEA i iy 2 2 RS aSR VG INNO Al IS RaRa BOZ x Libraries VDD Symbols Large Icons z et 9 ca M Met f close T cosp NET3 o va m hess 4 MS Ladi NETI our INP ee Wee INM Me Mel M9 NET2 CMOSN WE M5 M6 a T VREF CMOSN CMOSN VRE Epe ror We Su Mefi Maji i eat vss Category all z VSS G Filter z zj x Enge 7 Loading library quickstart Loading library analysis oe 2 Loading library vwf a The workspace bu cratch simulations vwf_appnote_data sbcd workspace was read in 2 z Eo di Opening drawing scratch simulations vwf_appnote_data examples vwf comparator schlr E E Opening drawing build scratch simulatio _appnote_data examples vwf comparator symbol ee Sas ar Warning Drawing instance build scratch simulations vwf_appnote_data examples vwf comparator symbol has no views E selectSingle new Point 664 392 X ee 4 oe a Command X Session Review Errors Output Thresholds
84. var vwf_base_local vwf_demo2 to file vwf_demo2 tgz The runtime output indicates that the backup succeeded Both the simulation result files and the database dump are put into the file named vwf_demo2 tgz The created file vwf_demo2 tgz can later be used to restore the database and all created simulation files This will be important in case something goes wrong during the upgrade process After creating a backup invoke the SRDB utility and run the upgrade script as shown in the example below thomasb lannachn srdb SRDB Version srdb 2 4 22 R 2013 03 15T15 29 08 Copyright c 1984 2013 Silvaco Inc All rights reserved SRDB gt login lannachn Password for server lannachn SRDB lannachn gt upgrade vwf_demo2 VWF 6 7 LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid 1sf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build sil vaco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database Database vwf_demo2 type VWF upgraded from version 6 to 7 on server lannachn SRDB lannachn gt SILVACO 20 VWF User s Manual VWF Modes Installation The last line of the runtime output of this example indicates that the upgrade was successful The database can now be accessed by VWF version 2 12 0 or greater only It is no longer possible to open the database
85. which are added as active jobs into the OGS system Jobs that would exceed this limit are still added into the system but are put on hold state HOLD As other jobs finish jobs put on HOLD will become active change from HOLD to PENDING and will run whenever the scheduler decides it can run more jobs SILVACO 289 VWF User s Manual Submitting Jobs Queuing VWF On The Oracle SUN Grid Engine Open Grid 8 After having selected SGE drmaa type and you optionally have set the desired options select OK on the dialog A final dialog will appear indicating that you need to restart VWF whenever you change the grid type setting Figure B 14 Press OK and then exit and restart VWF Figure B 14 Request to Restart VWF 9 You have now completed all required steps to configure VWF for Grid Engine usage Note To allow an error free operation with Grid Engine make sure that every host within the used Grid Engine cluster has read write access to the central storage location which was configured during the vwf install step described in this manual Please do not change the settings from the VWF GUI If possible please use the default settings suggested by the install procedure 10 Possible error conditions e Open of an experiment fails and the dialog in Figure B 15 is shown This prob lem will occur if the SGE_ROOT environment of the Grid Engine was not set or wrongly set As a solution please add a command to source the Grid Engine
86. 0 7 1 6 Example JavaScript Files viciet peecivevesedabddedeevebebedwiedsaded deed ided erase pede 230 7 2 Defining Custom DOE Strategies 0c ccc cece e eens 231 7 2 1 Running the OCU canst sarut celiac serch ents kAutin ca oil Sets reroute dite eela kee eameitnbantieks 232 7 2 2 Compiling the Script avcbes Sec eedeeshes acne tereneeAeeeuepeehess Aaaeaueehasetnesees 232 SILVACO 5 VWF User s Manual Table of Contents 7 2 3 Stopping a Running Script s2ccptnaxeg per geeee Gude Sretued eeeereetarecke teases bees pes 233 7 2 4 Loading a Shared Library scnccotiiceterdencetehceededetetceaseeiade eaceadecebionese 233 7 2 5 Writing Messages to the Console 00 ununa 234 7 3 Defining Target Scripts for Optimization cece eect eee eens 235 Chapter 8 Security Concepts In VWF sis ciccneveugreerenentoewereuumensaeerahanea ates 236 8 1 Introduction isisi tees ete dean eR enna Md a oie wu A AEE da Eaa Rk ww 238 8 2 Security Related Dialogs 0 cece cece eee e eee reece eee nee ene sees neeneeeneaee 240 Appendix A Database Maintenance 0 0cceccee cece eee eee eee eee eee eens 244 Aol Backing Up VWF Dalal isisisi torini pinnen eee nenu EEEE KEN eee ewe eee ane ee een 245 A 2 VWt_DacCkUpy tick civatiice cit aeniae taeda ea ea hee doe Kad E ea eee ewe eae eS 246 Axe VEXEMpICS cic nedciceateesab decides vende sie sed oweslewssien OEE PEE EENET E eas een 249 AS vwi reStOl ccrriisririisteredriteri Er r EI dad cia ema R
87. 1 Target Script Editor The script part of Figure 6 6 allows you to edit the script text Additionally there are several icons Starting from the left hand side the icons have the following meaning Define a New Target Script Figure 6 7 depicts the dialog shown when the left most icon is clicked A name for the new script must be entered After the dialog is closed using the OK button the scroll down menu can be used to select among all available scripts Figure 6 8 WY export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt X File Edit Experiment Tools Help Ie ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Enter a description for the script script Cancel 0 Error s 0 Ln 27 Col 1 Script target activated Finished Q VWF Copyright SILVACO Inc Figure 6 7 Defining a New Target Script SILVACO 189 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF bd export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help lali ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs B 4 a a 3 8 a a a a m script j 0 Error s 0 Warning s Ln 3 Col 20 Script scriptl activated Finished VWF Copyright SILVA
88. 1000 _5 70000 E plelalalalallel alallala m target x var result new Array target length print_console target target var help target if target length response length throw length of target and response not equal var cost 0 0 1 Error s 0 Warning s Ln 4 Col 20 target 51000 70000 80000 86000 87000 4 ReferenceError targetl is not defined Execution failed 1 error s 0 warning s Evaluate Script done Finished o VWF Copyright SILVACO Inc Figure 6 13 Checking the Target Script SILVACO 195 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF b 4 export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help Iaue oe Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs B 4 a a 3 8 a a a m target x var result new Array target length print_console target target if target length response length throw length of target and response not equal var cost 0 0 for var i 0 i lt response length i r 0 Error s 0 Warning s Ln 2 Col 37 target 51000 70000 80000 86000 87000 resp 0 0 target 0 51000 diff 51000 relErr 100 resp 1 1 taraet 11 70000 x Evaluate Script done Finished O VWF C
89. 11 SILVACO Inc 4 Figure 3 61 Job status tree view Note There can be unwanted side effects regarding performance when splitting on set variables VWF creates fragments based on where a split variable is defined For set statements the split location can differ from where the variable is actually used For instance if you define a split on a set e g set depth 0 5 variable which occurs at the beginning of the deck but is used further down depth then the deck is still fragmented at the split definition where the set occurs and not at the location where it is used depth In this case you may not achieve the desired speed up that normally occurs from a hierarchical multi level simulation Note Once an experiment has been run and results are available the deck will be locked automatically This is indicated by the background of the slider bar shown in red No changes can be made in a locked deck The deck can be manually unlocked by clicking on the little padlock icon shown right above the deck pane Unlocking and editing a deck has the effect of results being removed This is to avoid situations where a changed deck no longer corresponds to the results obtained from a previous run If you want to keep results it is suggested to copy and paste the experiment and edit the copy instead of the original SILVACO 85 VWF User s Manual Main GUI components Using the VWF GUI tjlx2545 Silvaco COM vwtex02 Figure 3 62 Job s
90. 128e 03 2 26327e 07 2 26327e 02 1 10514e 07 2 21028e 02 1 09351e 01 2 02128e 10 2 02128e 03 2 24879e 07 2 24879e 02 1 09917e 07 2 19834e 02 1 08760e 01 1 98232e 10 1 98232e 03 5 64652e 07 5 64652e 02 2 67099e 07 5 34198e 02 2 69481e 01 1 98232e 10 1 98232e 03 5 90082e 07 5 90082e 02 2 79994e 07 5 59988e 02 2 82491e 01 1 98232e 10 1 98232e 03 5 84721e 07 5 84721e 02 2 77794e 07 5 55588e 02 2 80272e 01 1 96870e 10 1 96870e 03 5 19394e 07 5 19394e 02 2 45547e 07 4 91094e 02 2 49451e 01 1 96870e 10 1 96870e 03 5 69040e 07 5 69040e 02 2 70286e 07 5 40572e 02 2 74583e 01 1 96870e 10 1 96870e 03 5 62794e 07 5 62794e 02 2 67730e 07 5 35460e 02 2 71987e 01 2 02078e 10 2 02078e 03 4 84004e 07 2 30478e 02 2 38453e 07 2 27098e 02 1 12381e 01 2 02078e 10 2 02078e 03 4 34076e 07 2 06703e 02 2 19648e 07 2 09189e 02 1 03519e 01 2 02078e 10 2 02078e 03 4 30874e 07 2 05178e 02 2 18624e 07 2 08213e 02 1 03036e 01 1 98235e 10 1 98235e 03 1 41734e 08 6 74924e 02 6 25501e 07 5 95715e 02 3 00509e 01 1 98235e 10 1 98235e 03 1 38088e 08 6 57562e 02 6 16765e 07 5 87395e 02 2 96312e 01 1 98235e 10 1 98235e 03 1 36608e 08 6 50514e 02 6 12236e 07 5 83082e 02 2 94137e 01 1 96871e 10 1 96871e 03 1 42237e 08 6 77319e 02 6 14672e 07 5 85402e 02 2 97353e 01 1 96871e 10 1 96871e 03 1 46993e 08 6 99967e 02 6 41023e 07 6 10498e 02 3 10101e 01 1 96871e 10 1 96871e 03 1 45058e 08 6 90752e 02 6 35210e 07 6 04962e 02 3 07289e 01 2 02372e 10 2 023
91. 13 4 GB VWF Copyright 1984 2011 SILVACO Inc Figure 3 29 Experiment Editor Deck tab SILVACO 58 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 20 shows the menu that opens when you right click on a deck line Here two entries time and temp of the clicked diffus line are shown as the active parameter Three parameters dryo2 press and hcl are available as further parameters on this line Thereby the menu entries correspond to the list of active parameters of that line as shown in Figure 3 29 Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Deck editor gate oxide grown here diffus time 11 te get Standard Menu gt Extract a design y ime extract name gat t occno 1 x val 0 05 v temp dryo2 vt adjust implant implant boron dose press hcl depo poly thick 0 2 divi 10 from now on the situation is 2 D etch poly left p1 x 0 35 method fermi compress Affen timna tamne MW santan menee NA Preparing 5 Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc Figure 3 30 Experiment Editor Split Parameter Definition Right clicking on any of the parameters in the lower pane of the deck editor reveals a context menu with two entries Figure 3 31 Locate will position the cursor in the main deck pane and within the parameter Remove will remove the parameter from the list of split parameters an
92. 2074 35 11 934 27345634 1 0036735785e 12 110 831 0 172346 29 3186 2222 68 12 022662938 925 9 9407169759e 11 106 258 0 173165 28 9866 2196 98 11 842534864 920 63888818 9 9980251849e 11 100 245 0 174262 29 0929 2183 73 10 825071108 925 1 0410576046e 12 10 0 564752 0 085248 99 1065 0 174477 29 1061 2182 43 ail W View all results Optimizer return code OPT_RC_CONVERGED Export Results Preparing Free space 594 4 MB VWF Copyright SILVACO Inc Figure 5 35 Exporting Results of an Optimization Experiment Export Results into CSV file Look in E tmp VWE Optimizations emela File name vwfex03_results File type l CSV files csv Cancel Figure 5 36 Selecting Files for Results Export SILVACO 150 VWF User s Manual Importing Data into VWF Tutorial 5 9 Importing Data into VWF Data from previously exported files can be imported into the database again Only full exports created through the File gt Export command can be imported Worksheet data as created by File gt Export Worksheet cannot be imported into VWF as an experiment To import data select File Import File or File gt Import Batch see Figure 5 37 VWF Explorer File Edit View Help Open Database Close Database localhost tutorial import Login Logout Running Experiments New gt Batch Open Rename F2 Delete Del I Exit From filemode
93. 2146 96 1 20885e 17 w 0 715884 5 15 100 163 0 172303 29 1023 2272 9 2 89305e 16 w 0 648108 Send Worksheet to Spayn Finished Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc 4 Figure 5 47 Tools Menu SILVACO 158 VWF User s Manual Sending Worksheet to SPAYN Tutorial Send Worksheet To Spayn m Spayn Status Spayn not running Options Mode New Worksheet v Parameter no value fier28 I Send Experiment Name as Attribute I Set DB Constrained I Prepend block name Split Name Send Spayn Type dose V Enable Parameter x energy IV Enable Parameter a Response Enable Enable Enable Enable Enable gateox nxj n sheet rho Idd sheet rho chan surf conc IKK 01 Tw Figure 5 48 Send Worksheet To Spayn dialog To send the worksheet to SPAYN you must specify in VWF whether the data will create a blank worksheet or append to the current worksheet in SPAYN In the latter case some conditions may apply see below You must specify which value to use when a worksheet cell is empty Specify which Split variable to send and their Spayn Type Attribute or Parameter and which Reponse to send SPAYN will not be running if this is the first time data will be sent to it The Spayn Status box provides information whether SPAYN has already been started and about the current status Specify which mode to use New Worksheet or Append to Worksheet
94. 3 Target Values and Target Script SILVACO 219 VWF User s Manual Optimization Example Advanced Calibration Task Optimization in VWF Figure 6 34 shows the results pane You can see that the best parameter combination found by the optimizer was 12 87 for NEU_RATI this combination is 0 0235 2 35 The obtained simulated trench depths are shown in Table 6 2 E and 1 85 for NI EU_RATIO The obtained cost value for pedigree vp_calib Optimization Levenberg Marquardt File Edit Experiment Tools Help OIE Gi gt o e Ready 12 866776116 12 866776116 12 866776116 12 866776116 13 274225349 13 274225349 13 274225349 13 274225349 13 274225349 2 13 681125887 MV View all results Description Resources Deck Parameters Setup Worksheet 1 9707552154 1 9707552154 1 9707552154 1 9707552154 1 8527576028 1 8527576028 1 8527576028 1 8527576028 1 8527576028 1 8527576028 72345 84136 3 2 943 86488 3 85626 8 50707 6 71302 1 82736 5 84801 6 84233 51572 7 72879 9 84864 4 3 38761 87252 2 86725 50033 9 71799 2 83597 1 85623 4 85099 4 52385 6 Graphics Jobs set NEU_RATE set NEU_RATIO trenchdepth 178293 11289 249999 332320 360254 117871 180022 37369 250333 334080 366908 119935 x Optimizer return code OPT_RC_CONVERGED Finished Free space 24 1 MB VWF Copyright SILVACO Inc Figure
95. 32 28 2013 demo Directory Mon Jan 7 11 32 33 2013 demo Directory Mon Jan 7 11 32 38 2013 demo GQ localhost tutorial GQ localhost vwf_v6_tpb O localhost vwf_v6_upgraded tjet Free space 407 7 GB 2 VWF Copyright SILVACO Inc A Figure 8 5 Security Browser View with Several Users Shown mos_ex01r Read only tmp vwt_basedir tjet vwf_security_v4_1_19 mos_exO1r_10174 Creation Date Thu Jun 23 18 49 55 2011 Last Change Thu Dec 15 15 08 55 2011 Description Ready Stopped VWF Copyright 1984 2011 SILVACO Inc _ Sr a er Figure 8 6 Security Experiment Opened Read Only SILVACO 242 VWF User s Manual Security Related Dialogs Security Concepts in VWF Figure 8 7 depicts the case where an attempt was made to change an experiment which is opened read only The edit operation is canceled and a dialog will appear showing that you don t have enough privileges VWF Experiment Thu Jun 23 18 44 Thu Dec 15 15 0 i Figure 8 7 Security Attempt to Open an Experiment without Privileges SILVACO 243 VWF User s Manual SILVACO Appendix A Database Maintenance Backing up VWF Data Database Maintenance A 1 Backing up VWF Data It is advisable to periodically backup all data stored in VWF This ensures you can safely restore your work after a computer or hard disk crash without having to re en
96. 72e 03 7 26105e 07 2 26908e 02 3 61916e 07 2 26197e 02 1 11773e 01 2 02372e 10 2 02372e 03 5 97245e 07 1 86639e 02 3 23440e 07 2 02150e 02 9 98903e 02 2 02372e 10 2 02372e 03 5 94258e 07 1 85706e 02 3 22704e 07 2 01690e 02 9 96630e 02 1 98353e 10 1 98353e 03 2 38124e 08 7 44138e 02 9 95497e 07 6 22186e 02 3 13676e 01 1 98353e 10 1 98353e 03 2 12498e 08 6 64056e 02 9 32850e 07 5 83031e 02 2 93936e 01 1 98353e 10 1 98353e 03 2 10951e 08 6 59222e 02 9 30578e 07 5 8161le 02 2 93220e 01 1 96992e 10 1 96992e 03 2 57405e 08 8 04391e 02 1 02736e 06 6 42100e 02 3 25952e 01 1 96992e 10 1 96992e 03 2 44306e 08 7 63456e 02 1 01019e 06 6 31369e 02 3 20505e 01 1 96992e 10 1 96992e 03 2 42136e 08 7 56675e 02 1 00792e 06 6 29950e 02 3 19785e 01 mi z ral PE H E z m R aot rel az E ia E m A ai m RT HA a a ETI z E H aa Figure 4 8 Worksheet Columns Scientific Setting SILVACO 109 VWF User s Manual Customizing VWF Preferences Panel Figure 4 9 displays the settings for the DOE tree Colors for various components can be changed as well as the style for the connectors line between the tree nodes and the nodes Gi Registered Filetypes Sipe Optimizer l i Figure 4 9 Preferences DOE Tree SILVACO 110 VWF User s Manual Customizing VWF Preferences Panel
97. 74928e 11 11 251627207 0 450864 0 199136 n v 0 174155 29 0932 2157 07 2 7908e 16 w 0 53236 7 0980487092e 11 10 8800143 0 449388 0 200612 n v 0 174214 29 0928 2152 76 2 86474e 16 w 0 531463 1 32114976e 12 8 6583912373 0 651591 0 001591 n v 0 174348 29 0964 2207 32 5 50842e 16 w 0 727176 5 2850141185e 11 8 170992136 0 396318 0 253682 n v 0 174402 29 0927 2113 89 3 25616e 16 wK 0 487377 20 7 2960946138e 11 9 9407869577 0 464864 0 185136 n v 0 174325 29 0942 2148 45 3 22482e 16 wK 0 545722 21 _ 4 8148138228e 11 13 161959648 0 362237 0 287763 n v 0 174009 29 0924 2129 28 2 1023e 16 w 0 448518 22 1 2070238507e 12 10 770807266 0 593 _ _ 0 057 n v 0 174097 29 0957 2218 86 3 8938le 16 w 0 670547 7 2180912442e 11 14 769573212 0 417261 0 232739 n v 0 173422 29 0956 2167 69 2 24596e 16 w 0 500811 24 9 2952568143e 11 6 6696125269 0 531241 0 118759 n v 0 174414 29 0938 2139 82 5 82872e 16 wv 0 609756 25 9 5315172628e 11 8 6675900221 0 541112 0 108888 n v 0 174365 29 0931 2165 18 4 38275e 16 w 0 618724 26 1 1469410701e 12 10 659148097 0 580099 0 069901 n v 0 174137 29 0952 2209 56 3 82806e 16 w 0 656613 8 3774426669e 11 10 559586883 0 494794 0 155206 n v 0 174232 29 0952 2167 36 3 22517e 16 aang gt W View all results Optimizer return code OPT_ RC_CONVERGED Finished Free space 521 5 MB VWF Copyright SILVACO Inc _ Figure 6 22 Finished Optimization SILV
98. 8 z 100 164 0 174404 5 100 164 0 17442 10 100 164 0 174352 5 100 164 0 174422 10 100 164 0 174228 4 75e 11 7 5 43 5678 1 425e 12 7 5 43 5678 0 184559 5 43 5678 0 184584 9 se 11 jo 43 5678 0 184472 4 75e 11 7 5 212 509 0 156362 1 425e 12 7 5 212 509 0 156351 5 212 509 0 156371 10 212 509 0 156243 9 5e 11 7 5 32 1751 0 186183 9 5e 11 7 5 136 468 0 168171 5 64 3829 0 181058 10 64 3829 0 180942 4 75e 11 7 5 64 3829 0 181049 1 425e 12 7 5 64 3829 0 181036 nar Irira ar nonn 9 5e 11 925 4 75e 11 1 425e 12 9 5e 11 9 5e 11 29 0936 29 0942 29 0919 29 0911 29 0944 29 0978 30 1097 30 1067 30 1072 43 0228 43 0279 43 0177 43 0302 30 2995 32 076 29 6118 29 6131 29 6096 29 6154 an o7Ar 2176 84 2152 03 2087 1 2116 9 2146 96 2237 5 2027 24 1960 27 1997 05 3235 01 3411 02 3208 69 3414 66 1963 83 2351 22 2006 49 2049 68 1985 41 2078 56 annar na 5 20473e 4 98391e 2 60449e 1 20885e 4 86257e 7 26523e 8 76006e 3 8445e 4 0482e 8 74459e 6 94299e 4 79716e 5 87976e 5 85093e 8 3851le 3 74169e 3 34033e 6 9565e Y rono gt Finished O Free space 13 4 GB Figure 3 40 Experiment Editor Worksheet tab VWF Copyright 1984 2011 SILVACO Inc The worksheet can also be used to remove rows Figure 3 41 shows a worksheet with several rows selected for removal The selected rows are highlighted and the column number is
99. 8 Exporting Optimization Results The dialog to export results from an optimization run looks different to a DOE run Figure 5 35 shows how the data can be exported Figure 5 36 shows the dialog to select a filename bdg lannach vwfex03 Optimization Parallel Tempering 10047 Bel File Edit Experiment Tools Help Import Deck Export Deck 2 Deck Parameters Setup Worksheet Results Graphics Jobs E Save Cues femp implant dose implant energy mvt cost gateox mj n sheet ho ld sheet ho Add Resource n v n v niv nv niv n v n v n v 1 Vien Resource 925 9 5e 11 10 0 545922 0 104078 100 164 0 174288 29 0936 2176 84 925 9 5e 11 10 0 512733 0 137267 95 0219 0 175242 29 3393 2149 15 expan Emerita 925 9 5e 11 10 0 580727 0 069273 106 258 0 173171 28 9864 2191 4 x Close 925 9 5e 11 10 0 574838 0 075162 105 195 0 173366 28 9951 2185 92 6 10 825071108 925 9 5e 11 10 0 539351 0 110649 99 1065 0 17449 29 1056 2170 89 10 990883958 925 9 5e 11 7 100 109 0 174298 29 0957 2176 53 s 11 934 27345634 9 5e 11 110 831 0 172353 29 3182 2215 75 12 022662938 960 0075987 9 5e 11 153 843 0 165018 34 1529 2545 06 11 842534864 920 63888818 9 5e 11 100 245 0 174269 29 0926 2177 39 10 825071108 1010 5431986 9 5e 11 237 516 0 152746 47 7788 4024 01 10 990883958 896 17183119 9 5e 11 72 525 0 179433 29 4926
100. 9 18s 010209 The o file should contain the output of 1s If you get the following message Unable to run job denied host grid0 silvaco is not submit host then use qconf sh lt hostname gt or use qmon GUI to add a submit host SILVACO 284 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid B 4 5 Install execd on another host 1 Share the Grid Engine root directory var opt GRID on the master host When logging onto the master host do the following cd etc vi exports Add the following line to the file var opt GRID rw no_root_squash sync etc init d nfs start chkconfig level 345 nfs on 2 Mount the Grid Engine root directory var opt GRID on all execution hosts On all execution hosts do the following cd mkdir nodeO cd etc vi auto node0 Add the following line to the file GRID grid0 var opt GRID vi auto master Append the following line to the file node0 auto node0 etc init d autofs start sbin chkconfig level 345 autofs on cd var opt ln s node0 GRID GRID 3 Set up the TCP IP services for the grid engine software Add the correct ports to the etc services file or your NIS services map The following example shows how you might append your etc services file Sun Grid Engine sge_qmaster 536 tcp sge_execd 537 tcp 4 Set the SGE_ROOT environment variable SGE_ROOT var opt GRID export SGE_ROOT
101. ACO 204 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF Figure 6 23 shows the Graphics tab which displays the progress of the target and cost values as the optimization proceeds A dot is shown for every simulated parameter combination As with the Results tab the best cost so far is shown in green In this example this is the value at iteration number 18 b 4 lannach opt_ga Optimization Genetic Algorithm 10060 File Edit Experiment Tools Help Lall olle Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Cost for target nvt 26 5 14 6 3 s k 51 iteration I Update Graph Found optimum Finished O Free space 521 3 MB VWF Copyright SILVACO Inc Figure 6 23 Target Progress SILVACO 205 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF As with DOE type experiments details can be shown for every simulation To display the details of a given simulation navigate to the Results tab and right click on an entry Select results details from the context menu Figure 6 24 depicts the details for iteration number 7 Results Details for iteration 7 tmp vwf_basedir tjet tutorial opt_ga_10005 jobs 10182 a B DO vwf deck ml in results final extract dat moslex01_0 str moslex01_l log moslex01_l str y p Oinputs 1249minor pagef
102. ACO 299 VWF User s Manual Dealing with Error Scenarios Recommended Practice D 4 Dealing with Error Scenarios VWE offers powerful ways of running massive parallel simulation jobs on a network of computers An important point of the software is therefore to properly diagnose error scenarios so you can take action and avoid or solve the problem at hand D 4 1 Dealing with Failing Simulations It can happen that simulations may fail from time to time This can be due to the very nature of the simulation task in which case it can only be fixed by changing the underlying simulation deck The case where all simulations fail however is usually a systematic problem rather than a simulation related one The only visual feedback for failing simulations is ared node in the tree pane A few hints are given below to help in finding the true cause of a problem D 4 2 Standard Output and Standard Error Every process executing in a UNIX environment has an associated standard output and a standard error stream These streams are used by a program to print status and debugging information and to report unexpected situations like the disk becoming full or a file which was not found This is also true for simulations carried out within VWF While you are not normally concerned with these streams you may want to look into both the standard output contains the runtime output of the simulator and the standard error which may indicate additional error cond
103. CO Inc Figure 6 8 Select Among Several Target Scripts You can store several target scripts with an experiment but only one of them can be active at a time The active script is the one that is visible in the editor All operations like editing saving or deleting always impact the active script SILVACO 190 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF Load a Target Script from Disk Figure 6 9 shows how a script can be loaded from disk After activating the Load button second from left a dialog as shown opens allowing you to select a script WV export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help Iel ole Description Resource v Ee a script file to open Look in export data1 thomasb x cf E i a src b_2_6 bin E src b_2_8 E Desktop sync doc temp Ga download 3tmp experiments ut4 G mos1 Gave 0032 3VP1 Ga plugins vp_etch_2 Gai scratch G vwf docs Ga sge build 4 vwf_examples shadow_main workspace Bees 0 Error s 0 Warning L stdjs Ln 3 Col 20 vec js File name script js File type E Script js gt Cancel This is script Script scriptl activate Ready Finished VWF Copyright SILVACO Inc _ Figure 6 9 Loading a Script from Disk SILVACO 191 VWF User s Manual Defining Optimizer Target and Settings Optimi
104. DB gt to lannachn gt to indicate a successful login There is an interactive help available within the SRDB utility which can be invoked anytime by typing help The output of the help command is context sensitive It also depends on whether you are logged into a server or connected to a database Note The default password for a database server is simucad SRDB lannachn gt help Available Commands list databases connect lt database_name gt SILVACO 24 VWF User s Manual VWF Modes Installation backup backup_all create lt database_ create delete disable enable restore upgrade lt database_name gt lt backup_file_name gt overwrite lt target_directory gt overwrite lt database_name gt lt database_type gt lt target_directory gt version gt accutools lt database_name gt lt database_name gt lt database_name gt lt backup_file_name gt lt database_name gt lt target_directory gt lt database_name gt lt database_type gt lt old_version_number gt lt new_version_number gt exit quit SRDB lannachn gt You can use the list command to obtain a list of all databases already existing on the server SRDB lannachn gt list You are logged in to server lannachn Available Databases Name Type Version Number Location baseline _2012 VWE 4 build silvaco var srdb baseline_2012 fdb tutorial VWE 4 build silvaco var
105. E T 17 32 161 164 Prerequisites cccccccceeceeeceeeeeeeeeeeeeeeennereeeeseneeeeeeeeee 259 Single Machine UES ates aria Senma Ea petna aara 28 RUNN NG coc hagseee cae eee stance tt 260 269 M Threading siiscteh Siece inoie a ane eae 298 H N Lg eee ne ee cce erate eee cree creer reece ee eee ee eee eee 49 Node Information ssssssesssesssssiesseessssnteeeeesssnnee 64 65 Hooke Jeeves Method HJ sscsseeecsessseeessessseesssesseseeseesseessees 180 Node SUMMALY 2 cccseeceeesseeeseeeeeeeseeesseeeeesseeeesseeessaes 87 88 l 0 ECE ee eee a Pe 188 215 Open Grid Scheduler 28 29 81 141 259 Importing Installing D a a stance sees sceessensceesstextaces 258 Des cee setos t tasee ease sees teen Setters 151 153 Uninstalling AREAN E A A E E E 292 Worksheet Data to Define DOES ccccccccessseeeeees 154 157 Optimization en Initial SetUp sada ds tiveness 271 PN NCSRT CANpNANON MAER eteienriccetneb cette ee i CONVERGENCE ad e arearen iraniar aiea e ea a eae reae 197 Installation Defining Parameter Boundaries sssscesseeeesesesteeeeeees 186 TAR Tle a c 2nieie he nade ite 15 16 Defining Parameters ccccccsccscsscscsscscececsecsesecseseeecsees 185 installer se icccsccarectscadssvacdascseseansecdiesstensstedhessdieateesaviesatteaache 269 Defining Target and Settings cccsssceessseeesteees 187 214 Defining Target Scripts eicecien 235 J QOD sas E E E aavicteineds 181 Preferences rsisriresvo
106. F_RESTORE Copyright C 1984 2013 Silvaco Inc All rights reserved vwf_restore RestoreError MSG base directory build silvaco var vwf_base_local vwf_demo2 already existing consider using the dbname option Here s the output when everything was restored properly root lannachn thomasb vwf_restore host lannachn passwd simucad vwf_demo2_20130318 tgz VWE RESTORE Copyright C 1984 2013 Silvaco Inc All rights reserved LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux usr lib lib usr openwin lib build silvaco lib support x86_64 linux build silvaco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database SILVACO 253 VWF User s Manual vwf_restore Database Maintenance Below shows the output when you are running VWF in default mode You can see that the simulation files are restored to the default location thomasb lannachn vwf_restore host lannachn passwd simucad dbname tpbl tpb tgz STORE VWE _ R ira Copyright C 1984 2013 Silvaco Inc All rights reserved INFO version info vwf_restore 2 12 1 R Wed Apr 3 13 08 25 CEST 2013 INFO config file build silvaco var vwf_ii cfg not existing using default locations for simulation files INFO VWF DB version 7 INFO Restoring simulation files to directory export datal th
107. ICONS cissi ririri etonan 47 Si IG TT dpe rteess 117 Be NU rece cetera areas erence ee ai Rore or E E E E E E A AT 102 Dt pe ii e r Saa TOO aa ee ee E 104 Details VIEW lt 2cts seesvedosccesiecs ioeie iaei 46 E MONU oocceccccccccccccccccsceccccececcececcccecccceseccessececesceseseecesee 42 PVINLCOMSOIG Mearns a a cs 234 File MGM SATT AE TETARA et EENE one ae te 41 Properties file cs icc cceiescacaccenssecnds doceedyace cee scveteceaeandeesnuaceteeecs 250 Hep Menu earann rece ne eeaeee rea a aa aaa tacctedesd cates 49 aE E E AE E icdanaeats 44 Login to Database isisisiisisiirisicsiekecsesinigotnsneidiucs essaies 36 Main Pane Context Menu cccssececeseeeessneeesseeeeeeeeeees 45 SILVACO 307 VWF User s Manual Index Q TONYPIOU 2 eestesesttssshacceatessdasedcesesthaneedeeheacuen 98 117 121 147 qmaster TOMYPIOUSD soehna ecaa E eieaa 87 121 pnstaling o eeessesssssssssssssssererrrrrrrrrreeereerreersrennnnnnenns 272 281 Tool Version Button sssssssssssssssrsrsrinirirsrsrsnnnsnsesesseseneen 36 161 oe haste em ee 289 TOOMCM AUN ciktnceti E E iaephdiiiaaes sible aes 121 Queuing JObS cicesccccecesceebeeveeetenvetenesdecedcentnseedieveteeceoed 83 87 Queuing VWF U On An LSF Cluster sssessseseeseeeeeseeeeeieeeeeereeeenennee 295 296 UNIX GION sssini eree a aroa riS 251 On the Open Grid Scheduler ccsccscesesseecseeseees 258 292 Upgrading Passing Options TO sss ssssssssisssssrisnstsnnrrnneennnnneennrrnneenns 230 EOE e EE
108. M tutorial_01 Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Deck editor Extract a design parameter extract name gateox thickness oxide mat occno 1 x val 0 05 vt adjust implant implant boron dose 9 5e11 energy 10 pearson depo poly thick 0 2 divi 10 from now on the situation is 2 D etch poly left p1 x 0 35 implant implant Ready Preparing Q Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc I A Figure 5 18 Defined Split Parameters Every parameter selected in a line is formatted in red The highlighting of the relevant deck portion will always reflect the current collection of chosen split parameters Note that the Deck editor allows you to freely edit the deck contents even if split parameters have been defined The editor preserves split parameter definitions when the deck is edited If you edit a line with defined split parameters the parameter definitions of that line are removed and you will have to re define the parameters of that line after the line editing is finished After defining split parameters select the Tree tab to get a view similar to the one depicted in Figure 5 19 It shows a linear graph of all the parameters selected in the previous step If you followed this tutorial then the parameters dose and energy of an IMPLANT statement will be shown The very first entry of the tree will always be called root regardless of the par
109. N gt to continue gt gt 15 Enter the email address of the user who should receive problem reports T Grid Engine cluster configuration continued SILVACO 277 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid lt administrator_mail gt The email address of the administrator to whom problem reports will be sent It s recommended to configure this parameter You may use gt none lt if you do not wish to receive administrator mail Pleas nter an email address in the form gt user foo com lt Default none gt gt me my domain 16 Verify the configuration parameters The following parameters for the cluster configuration were configured execd_spool_dir var opt GRID default spool administrator_mail me my domain Do you want to change the configuration parameters y n n gt gt n Creating local configuration Creating gt act_qmaster lt file Adding default complex attributes Adding default parallel environments PE Adding SGE default usersets Adding gt sge_aliases lt path aliases file Adding gt qtask lt qtcsh sample default request file Adding gt sge_request lt default submit options file Creating gt sgemaster lt script Creating gt sgeexecd lt script Creating settings files for gt profile cshre lt Hit lt RETURN gt to continue gt gt 17 Specify whether you want the daemons
110. New Worksheet will delete a previously created SPAYN worksheet To successfully append data to a previously created worksheet the number of Attributes and Parameters of the new data set must exactly match If a worksheet doesn t contain a value the value specified in the field next to Parameter no value is used In the case when appending from different experiments experiment name can be prepend to each sample as attribute To do this check Send Experiment Name as Attribute You can send Split variables to Spayn as Attributes by default or Parameters individually You can prevent Split Variable from being sent to SPAYN by unchecking Enable in the table The popup menu on the Split Variable table provides shortcuts to enable disable all items to send and to switch from Attributes or Parameters SILVACO 159 VWF User s Manual Sending Worksheet to SPAYN Tutorial You can send Response to SPAYN as Parameters only You can prevent Response from being sent to SPAYN by unchecking Enable in the table The popup menu on the Response table provides shortcuts to enable disable all items to send Once options are set you can click on OK Apply to send worksheet to SPAYN If SPAYN is not running VWF will start it This operation may take some seconds according to the network load A message at the bottom of dialog notify you about the current operation When SPAYN is started data will be sent and a message at bottom of dialog will be upda
111. RA 9 1 2 FOQUICS oin e a E E EAE A Phase EE EAA 10 12 1 Database itineri iein ironi E E EE E ESEE EAE D E 10 Kee 2 User Friendiy iseseisana i aa coven a See R a N ENE 10 1 2 3 Experimental Design 2 4 ace odcg cate ecubuadeckemeaden ease eke Cancsdeees bocce ecdeuans 10 1 2 4 Optimization 225523 pheed booed ee ees ki EE re SEEE EE ESENE RENAE VECANTE CREE REE 10 1 2 5 Network EXGCUION s 0084 cesesweeeeed secant oueeetesesdeese nce kren RaGeR EEE EE Epa 10 1 2 6 Security Features 202296 eevevseeceWeedeee viene a ER TEEN re Neree der seetsieseents 11 1 2 7 SCNPUNG MENACE ceee ie aeia a a a DREA EEE 11 1 3 Simulators esd EENE EEEREN E EE A ENEE EEEE EEEE 12 Chapter 2 fstalation enni a a a a EE E a eee 13 2 1 VWF Variat Soarian enne aaa a deca a a Oa E 14 2 2 Installing the VWF TAR file cisiicericcriorersorsonsrstnats tusis a Renee Euran arkue EE 15 23 NWE MODES cic ccccninds tenia dateniannnedninse N a EE E a Ea 17 PON File Mode 6223 ites peeved os esneibinersoded peeved EENE EANET DONERER DESENATE AA 17 232 Database Mode nsiscehdcuroivesagetdeavedeeeeeseeeloeedeateeerstaavedeenaleeniaeses 17 2 3 3 Single Machine Queue Mode 220 52 0sc00e see bade peeees iene vee deeeesseedseeeesaede wens 28 2 04 DRMAA MOIE cucson eee akebweas rat rin r e a ba beacadience lesen deeeas 29 Chapter 3 Using the VWF GUIs cece ctectcntsacenescnndudiaeunnev et radwerwennsiaeen 30 S VOVEIVIOW i rae aa e EEEN EE a a E TETTE ENEN EE EEE sees 31 3 2 Examples Shipped with VWEi
112. S lt and add an entry in the form sge_execd lt port_number gt tcp to your services database Make sure you use an unused port number Do the following to configure the Grid Engine communication ports e Use the gt shell environment lt 1 e Use a network service like gt etc service lt gt NIS NIS lt 2 default 2 gt gt Hit lt RETURN gt to continue gt gt SILVACO 273 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid Grid Engine TCP IP communication service Use the service sge_execd for communication with Grid Engine Hit lt RETURN gt to continue gt gt 6 Enter the name of your cell T Grid Engine cells Grid Engine supports multiple cells If you are not planning to run multiple Grid Engine clusters or if you don t know yet what is a Grid Engine cell it is safe to keep the default cell name default If you want to install multiple cells you can enter a cell name now The environment variable SSGE_CELL lt your_cell_name gt will be set for all further Grid Engine commands Enter cell name default gt gt Using cell gt default lt Hit lt RETURN gt to continue gt gt 7 Enter unique cluster name The cluster name uniquely identifies a specific Open Grid Scheduler cluster The cluster name must be unique throughout your organization The name is no
113. SILVACO VWF User s Manual Silvaco Inc 4701 Patrick Henry Drive Bldg 2 Santa Clara CA 95054 Phone 408 567 1000 Web www silvaco com June 13 2014 Notice The information contained in this document is subject to change without notice Silvaco Inc MAKES NO WARRANTY OF ANY KIND WITH REGARD TO THIS MATERIAL INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE Silvaco Inc shall not be held liable for errors contained herein or for incidental or consequential damages in connection with the furnishing performance or use of this material This document contains proprietary information which is protected by copyright laws of the United States All rights are reserved No part of this document may be photocopied reproduced or translated into another language without the prior written consent of Silvaco Inc AccuCell AccuCore Athena Athena 1D Atlas Blaze C Interpreter Catalyst AD Catalyst DA Clarity RLC Clever Clever Interconnect Custom IC CAD DeckBuild DevEdit DevEdit 3D Device 3D DRC Assist Elite Exact Expert Expert C Expert 200 ExpertViews Ferro Gateway Gateway 200 Giga Giga 3D Guardian Guardian DRC Guardian LVS Guardian NET Harmony Hipex Hipex C Hipex NET Hipex RC HyperFault Interconnect Modeling WorkBench Laser LED LED 3D Lisa Luminous Luminous 3D Magnetic Magnetic 3D MaskViews MC Etch amp Depo MC Device MC Implant Mercu
114. Smartspice fay e E Gateway 3 0 2 R Copyright 1984 2014 Silvaco Inc Figure 5 56 PARAM setup SILVACO 167 VWF User s Manual Using VWF to Run SmartSpice Simulations Tutorial v SEdit build scratch simulations vwf_appnote_data examples vwf comparator_sim ctr File Edit View Bookmarks SPICE Help K o fac pc amp a IN W oP PZ He m lib export datal thomasb simulations vwf_appnote_data models SBCD 1lib TYP OPTIONS NOMOD TRAN 1n 4u temp tempval E E EE E E E E E E E EE EEE E E E E E E E E EEEE E E E E E E EEEE E E AKAK measure for smartspice HKK HHLHLH O OOO KK measure tran inp_rise_cross cross v inp v inm rise 2 from 0 2u measure tran out_rise_cross cross v out val vdd 0 9 rise Z from 0 2u measure tran inp_fall_cross cross v inp v inm rise 2 from 0 2u measure tran out_fall_cross cross v out val vdd 0 1 rise 2 from 0 2u measure tran rise_dly expr val out_rise_cross inp_rise_cross measure tran fall_dly expr val out_fall_cross inp_fall_cross measure rise_pass param rise_dly lt 25n 1 0 measure fall_pass param fall_dly lt 25n 1 0 measure pass param rise_dly lt 25n fall_dly lt 25n 1 0 0 AO CSCICIOIRIOOOO OO OOOO ACOACO K AOKK measure for only vwf KOKK K HHL OKK xsolve outfile spice log xextract init infile spice log xextract name rise_dly max da value 2 rise_dly xextract name fall_dly max da value 2 f
115. To create a baseline first select the directory in the left part of the main window Then right click into the right empty part of the main window and select New gt Baseline see Figure 5 6 fm VWF Explorer al la File Edit View Help v E Folders gt localhost tutorial tutorial_01 z i localhost tutorial Do amp Permissions E Experiment Baseline demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc _ Figure 5 6 Creating a Baseline SILVACO 124 VWF User s Manual Defining a New Experiment Tutorial Figures 5 7 and 5 8 show how a name for a baseline is entered and how the window looks after an empty baseline has been created New Baseline Enter name for new Baseline base Figure 5 7 Entering Baseline VWF Explorer File Edit View Help Parksi localhost tutorial 8 eis tutorial 01 base Baseline creation Done demo Free space 407 7 GB Fal VWF Copyright SILVACO Inc Figure 5 8 Created Baseline The next step is to import a deck into the defined baseline This is done by double clicking on the baseline icon The dialog will open a prompt for selecting a deck see Figure 5 9 There are two ways of how a baseline deck can be imported One is to import a text file in directly from the filesystem using the Import button the other is to use the DeckBuild application for this In
116. UN Grid Engine Open Grid b 4 Grid Engine 2011 11p1 Installer x Licensing Agreements GRID ENGINE Please read the following license agreement carefully UN INDUSTRY STANDARDS SOURCE LICENSE a ersion 1 2 1 0 DEFINITIONS 1 1 Commercial Use means distribution or otherwise making the Original Code available to a third party 1 2 Contributor Version means the combination of the Original Code and the Modifications made by that particular Contributor 1 3 Electronic Distribution Mechanism means a mechanism generally accepted in the software development community for the electronic transfer of data 1 4 Executable means Original Code in any form other than Source Code 1 5 Initial Developer means the individual or entity identified as the Initial Developer in the Source Code notice required by Exhibit A 1 6 Larger Work means a work which combines Original Code or portions thereof with code not governed by the terms of this License 1 7 License means this document 1 8 Licensable means having the right to grant to the maximum extent possible whether at the time of the initial grant or subsequently acquired any and all of the rights conveyed herein 1 9 Modifications means any addition to or deletion from the substance or structure of either the Original Code or any previous Modifications A Modification is lA Any addition to or deletion from the contents of a file containing Original Code or previous Modificati
117. VACO Chapter 3 Using the VWF GUI Overview Using the VWF GUI 3 1 Overview This chapter gives an overview of the Graphical User Interface GUI components of the VWE software All components are explained by means of screen shots and descriptions The screen shots were prepared on the Linux operating system and the KDE window manager SILVACO 31 VWF User s Manual Examples Shipped with VWF Using the VWF GUI 3 2 Examples Shipped with VWF VWE comes with a set of examples for you to browse Depending on the mode of operation there are three ways you can access these examples The first method uses the vwf_restore command to create a whole database containing only the examples and a user called demo The second method allows you to load the examples into an existing database The third method allows you to open examples individually in filemode Please note that in order to keep the examples small and loading times short they do not contain any result files 3 2 1 Creating the vwf_examples Database To create the database please issue the following command vwf_restore host lannach passwd simucad vwf_examples tgz This command will create a database called vwf_examples which contains a single user called demo password demo When connected to this database see below for a description of how to do this you will find a single directory called examples which contains the shipped examples The command may issue a warn
118. Worksheet Data to Define a DOE Tutorial Figure 5 46 displays the populated tree after a successful import Figure 5 46 Tree Resulting from CSV Imported DOE SILVACO 157 VWF User s Manual Sending Worksheet to SPAYN Tutorial 5 11 Sending Worksheet to SPAYN SPAYN is used for Post processing to perform Data Modeling such as Regression analysis Correlation analysis Multi dimensional data analysis Histogram and Scattergram plots VWF will start a single instance of SPAYN where it sends the worksheet data to There are two ways of invoking the SPAYN interface from an experiment window The first way is to select Tools gt Spayn Figure 5 47 The second way of invoking SPAYN is by using the Tools gt Sensitivity Analysis entry This method will be described further down After selecting Tools Spayn the Send Worksheet To Spayn dialog will appear Figure 5 48 P tjlx2545 Silvaco COM tutorial_01 A E File Edit Experiment Tools Help E z2 BES Il Spayn l Tonyplot Description brksheet Jobs SplitPlot Worksheet Sensitivity Analysis implant dose implant energy gateox mi n sheet rho dd sheet mo chan sur cone sheet cond v bias mian 9 5e11 10 100 163 0 174288 29 0936 2176 84 3 73448e 16 0 610621 a2 4 75e411 5 100 163 0 17442 29 0919 2087 09 4 98391e 16 z 0 450844 3 i 15 100 163 0 173724 29 095 2130 36 1 94176e 16 w 0 4369 4 1 425e 12 5 100 163 0 174422 29 0944
119. _upgrad Exp02 G localhost vwf_v7 Expo3 localhost vwf_v7_tpb localhost baseline_2012 lannachn vwf_v6_upgrad h G localhost vwf H MOSFET 3 Folders IE 5 JB tecathost vwimosret x demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc _ Figure 3 14 Main Window List View SILVACO 44 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 15 shows the main pane context menu which appears upon a right click in the main pane ta VWF Explorer Caie File Edit View Help T Folders h EE localhost vwf mosFeT lannach vwf_v6_test mos1 Q lannach vwf_v5_up base_deck Qlannach_test vwf_test Exp01 8 localhost vwf_v6_upgradi Exp02 O localhost vwf_v7 Exp03 G localhost vwf_v7_tpb Q localhost baseline_2012 i O lannachn vwf_v6_upgradi es Icons 2 9 localhost vwf a List Details Arrange Icons gt New gt f Paste demo Free space 407 7 GB l VWF Copyright SILVACO Inc Figure 3 15 Main Window Main Pane Context Menu SILVACO 45 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 16 shows the Details View Extra information like the date of last modification or the user who created the experiment is shown VWF Explorer File Edit View Help Folders Sa tocathosewwMosFeT S 9 lannachivwf_v6_test Name Type LastModified owner lann
120. a ea Aci Be WMI aad ete teed 281 284 Manually scissione aanre ne eai E aE 249 cee Installing on another host n 285 286 Using Properties File seeeseeeeseeeeesereeesneeeeneeeeeeeeeeaes 250 preferen 114 Using SRDB wis bey niat n EEE a ead 255 Sg eee airy ee eins ae VWE_D CKUD cscsccsecssscsescsesesecscseseceestsesesesecseseseeees 246 251 ae Editor ay OCK vite dlicn dieters ae Backing UP DENA instet treinrit ae D SCIPUOM S2rssacsescxevesscresevsematecgesseneansertenetetentenests es 56 Baseline Deck Reso rcES facta E Sil 57 CROAUING sesinin ieir ni eenaa a raa aa EE ee Ena aaa 53 Split Parameter Context Menu e sccssveceesseeeessseseeeseeessseeeee 60 Batch Mode Split Parameter Definition ccesecsecesesesseseseeteteseeeeeeseees 59 Running a Database Experiment cssesserserseeseenes 227 228 Tree ee R AE 62 64 Running Filemode Experiments sssessererseereeees 225 227 Worksheet e seseececsessesseseceessesseseeseceessesetsaeeeseesenseteatenees 68 Running Several Experiments Sequentially 06 228 229 Experiments Using a Grid Environment sesesseeeesssssssnsetteteee 229 230 Clearing All Results 9 i c0 ct25 coc aciedseciacdere teeattou staan 81 Br AdCrUMbS2s c cececncceccctccdexecedceccssatetgavecscesatedecengenzccessseceten 40 Clearing Result Files cccccccccececececcccecececuceceueuceueuecevanes 81 BrOWSGl o a a a aaa Wace LGPL E 89 Creating soeeeeeeeeeeeeeeeeeeereeeneeneene
121. ach vwf_vS_up C mos1 Directory Fri Mar 15 16 32 10 2013 demo G lannach_test vwf_test E Expo3 Experiment Fri Mar 15 16 32 05 2013 demo O localhost vwf_v6_upgrad O localhost vwf_v7 Elexpo2 O localhost vwf_v7_tpb Ej Expo1 Experiment Fri Mar 15 16 10 18 2013 demo localhost baseline_2012 E base_deck Baseline Fri Mar 15 16 10 13 2013 demo G lannachn vwf_v6_upgrad localhost vwf en s MOSFET Experiment Fri Mar 15 16 10 22 2013 demo demo Free space 407 7 GB 4t3 VWF Copyright SILVACO Inc _ Figure 3 16 Main Window Details View SILVACO 46 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 17 shows the Arrange Icons gt By Name entry of the main pane context menu VWF Explorer File Edit View Help iror localhost vwf MOSFET z lannach vwf_v5_up C mos1 Directory Fri Mar 15 16 32 10 2013 demo lannach_test vwf_test Expo3 Experiment Fri Mar 15 16 32 05 2013 demo O localhost vwf_v6_upgrad l localhost vwi_v7 Byexpo2 Experiment Fri Mar 15 16 10 22 2013 demo localhost vwf_v7_tpb Ej Expo1 Experiment Fri Mar 15 16 10 18 2013 demo sE localhost baseline_2012 E base_deck Baseline Fri Mar 15 16 10 13 2013 demo Pe O lannachn vwf_v6_upgrad os List O localhost vwf Details Arrange Icons New By Type Paste Ctrl V By Date By User Arrange by name demo
122. aco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database KEY_OUT ERR_OUT 6071 lt null gt USERKEY ERROR 1 USEDN LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid 1sf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build sil vaco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid lsf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build sil vaco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database SILVACO 21 VWF User s Manual VWF Modes Installation LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid lsf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build sil vaco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database Database vwf_v2 type VWF upgraded from version 2 to 7 on server lannachn SRDB lannachn gt Please note the last line which indicates that the database was properly upgraded from version 2 to version 7 Installing the Firebird Database System This is the
123. ae aed aae Eti 252 AA SRDS Utility cctv cbr ew tdammsedany Memes una e um aie wa eee aime ham did Wanless 255 BAL Makingia Bal accuse cece nteekeveeewieet dusts aE E A E PED Ea 255 A 4 2 Restoring a Database from a Backup u usuuuaee ee eens 256 Appendix B Queuing VWF On The Oracle SUN Grid Engine Open Grid Scheduler 257 B 1 Installing the Open Grid Scheduler cccceee eee e eee eee eee e en eeeeeeeeeeee 258 B 2 Open Grid Scheduler Installation with the GUI Installer 0 c cece eee eee eee 259 B 2 1 Prerequisite S ccs crcestececrace adenine E EELA EA A eadeerdke Peds ET ERER AEDE 259 B 2 2 Running the GUI Installer nuanua 260 B3 Manuals ee DECENA eer ee er ere eer re ee 270 B 4 Installation using the Traditional Method ccce cece cece e eee eee eens 271 B41 Product M alS ko esan teat ete aeenosn nese cueeeeee Res E een cateuseeeee teas 271 Ba intact UD c cicccenta tassectealetestecasceeterceceteesies cagunedetitactanecaad 271 B 4 3 Install the Master Host qmaster voc cus scccteticcacienceretdeesndesaedsaiepiedensevetn 272 B 4 4 Install the Execution Host execd 0 cee cece een ene tne 281 B 4 5 Install execd on another host 2c2vnicksnetaceevedeess oad ae Pediat tlebSaedesbeee soos ene 285 B5 Submitting JOBS oc adecicddecix deeree e A EE RE E GEEAE dees ade 287 B 6 Uninstall Open Grid Scheduler 00 cc cece eect eee eee eee eens 292 B 7 Referentes iicciscanjeciudensdtarh eee
124. al of three parameters VDD tempval and capval are split each with three different values which creates 27 branches Quite often circuit designers use the alter statement to split simulations But sometimes it can be tedious to setup the combinations VWF helps in setting up split conditions in monitoring simulation status and in reviewing all simulation results In this example use the VWF in filemode Launch VWF by entering the following command in a terminal window vwf filemode After creating a new experiment import the SmartSpice simulation input deck i e comparator_sim in that was generated by Gateway Then make the following changes 1 Remove the section with comments from the header and insert go smartspice as shown in Figure 5 58 2 Remove comment delimiters at the bottom of the file as shown in Figure 5 59 so that VWF will execute the extract statements These statements will enable VWF to display a list of simulation results vESTI File Edit Experiment Tools Help Iez 2 ole Tree Worksheet Jobs SplitPlot Worksheet Description Resources Deck editor go smartspice Schematic name comparator_sim PARAM capval 1e 12 PARAM tempval 25 PARAM VDD 5 C1 OUT GND capval V1 VDD GND DC VDD V2 INM GND DC 2 5 V3 VREF GND DC VDD 2 V4 INP GND SIN 2 5 1 1MEG X1 INM INP OUT VDD VREF GND comparator Schematic nam
125. al spool directory when you installed the master host You can use that directory for spooling jobs from this execution host You can also define a different spool directory for this execution host SILVACO 282 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid ATTENTION For most operating systems the spool directory does not have to be located on a local disk The spool directory can be located on a network accessible drive However using a local spool directory provides better performance FOR WINDOWS USERS On Windows systems the spool directory MUST be located on a local disk If you install an execution daemon on a Windows system without a local spool directory the execution host is unusable The spool directory is currently set to lt lt var opt GRID default spool grid0 gt gt Do you want to configure a different spool directory for this host y n n gt gt n Creating local configuration root gridd Silvaco COM modified grid0 Silvaco CoM in configuration list Local configuration for host gt grid0 Silvaco COM lt created Hit lt RETURN gt to continue gt gt 7 Specify whether you want execd to start automatically at boot time execd startup script We can install the startup script that will start execd at machine boot y n y gt gt y cp var opt GRID default common sgeexecd etc init
126. all_dly xextract name rise_pass max da value 2 rise_pass xextract name fall_pass max da value 2 fall_pass xextract name pass max da value 2 pass zl Line29Col 33 INS Unix RW SEdit 3 17 9 R Silvaco 2014 Figure 5 57 Measure Statements The following measure calculations are performed to monitor the rise fall delay times for an output signal OUT when two input signals INP and INM are crossed They are specified within 25n seconds for convenience e rise_dly Delay time when output signal rise e fall_dly Delay time when output signal fall e rise_pass If rise_dly is within 25ns then it s 1 Otherwise it is 0 e fall_pass If fall_dly is within 25ns then it s 1 Otherwise it is 0 e pass If rise_pass fall_pass are both within 25ns then it s 1 Otherwise it is 0 A section with comment delimiters from line number 24 onwards is used by VWF for displaying a list of measurement results A simulation with center condition is run in advance using SmartSpice A simulation result can be displayed as a transition of output OUT when an input sine wave INP crosses an input dc voltage INM Figure 5 57 SILVACO 168 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial 5 14 Running SPICE Simulations for 27 Conditions and Review the Results Using VWF A tot
127. ameters you selected Right clicking on a node will show a pop up menu as displayed The highlighted entry of the menu called Add Multiple Branches is one way of adding parameter splits This function is also available directly from the worksheet and will be explained further down in this tutorial SILVACO 134 VWF User s Manual Defining a New Experiment Tutorial tjlx2545 Silvaco COM tutorial_01 Preparing Figure 5 19 Empty Tree z Choose Hot Ghoose Unpin Add Multiple Branch Remove selected Branchless SILVACO 135 VWF User s Manual Defining a New Experiment Tutorial Clicking on the Worksheet tab reveals the worksheet view of the experiment Figure 5 20 depicts the situation without any design strategy The single entry in the worksheet consists of all split parameters and their nominal values Split parameters are ordered left to right according to their appearance in the deck The left most parameter is the one which is at the topmost position in the deck Here this is dose of the IMPLANT statement Next in the worksheet the responses are shown tj Ix2545 Silvaco COM tutorial_01 Figure 5 20 Worksheet without Selected DOE Design Strategy SILVACO 136 VWF User s Manual Defining a New Experiment Tutorial There are now two ways to defining parameter values splits to simulate You can either select a predefined DOE design strategy or manually enter the values Y
128. ample you may have measurements for several mask widths but the mask width itself is not an optimization parameter Please refer to Section 6 7 Optimization Example Advanced Calibration Task for an example to demonstrate this functionality This version of the software supports linear and logarithmic parameter scaling Setting a parameter to logarithmic has the effect that the natural logarithm of the value is given to the optimizer rather than the value itself For the shown example the boundaries for the parameter dose as exposed to the optimizer will be 1n 4 75e11 26 89 and 1n 1 43e12 27 99 Whereas the boundaries for the parameter energy will be between 5 and 15 The values that are used for the actual simulation however will always be the unscaled ones In this example this would mean that for the parameter dose a value between 4 75e11 and 1 43e12 and for the parameter energy a value between 5 and 15 would be used in the simulation As with DOE type experiments the default values chosen for parameter boundaries are 50 of the nominal value b 4 lannach opt_ga Optimization Genetic Algorithm 10060 x File Edit Experiment Tools Help laji ofl e Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs implant dose i 4 75e 11 1 425e 12 Preparing io Free space 592 7 MB VWF Copyright SILVACO Inc Figure 6 5 Defining Paramete
129. and Settings Optimization in VWF Figure 6 22 depicts the Results tab after the experiment was finished You can see that the experiment is no longer running by looking at the status light LED shaped at the bottom of the experiment window The status has changed from Running to Finished The status of the optimization is shown at the bottom on the right hand side The optimizer has returned with OPT_RC_CONVERGED This means that the target value could be reached within the given error criterion The best target value is shown in green and the parameter combinations can be found next to the best target Here the values of 1 32e12 and 8 66 for parameters dose and energy were found to lead to a value of 0 652v for nvt and give a cost value of 0 001 Please refer to Section 6 6 7 Optimizer Return Codes for a description of all possible optimizer return codes b 4 lannach opt_ga Optimization Genetic Algorithm 10060 F X File Edit Experiment Tools Help Jelly ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs implant dose implant energy ot cost asta mj ove sheet ho dd sheet ho 5 6033969177e 11 13 43210876 0 378643 0 271357 niv 0 173901 29 095 2141 41 2 17307e 16 w 0 469267 15 _ 5 7507794426e 11 9 0464788675 0 411779 0 238221 n v 0 174374 29 0914 2124 36 3 09604e 16 wK 0 500426 7 24676
130. ans the computed target is now within the defined accuracy or another criterion like the maximum number of simulations was hit 11 You can stop the optimization anytime using the Stop button i SILVACO 182 VWF User s Manual Defining an Optimization Experiment Optimization in VWF When a new experiment is created it must be decided whether this is an optimization or a DOE type experiment This type cannot be changed later Figure 6 2 depicts the dialog which opens when a new experiment is to be created You can decide to either create a DOE type experiment or an optimization experiment using one of the supported optimization algorithms The basic type of the experiment DOE or optimization cannot be changed afterwords but the optimization algorithm can be changed If you want to run an experiment with different optimization algorithms you can first fully define the experiment using one optimizer then save it use copy paste and change the optimization algorithm in the copied experiment Figure 6 2 vj New Experiment E Name fopa Type DOE Optimization Differential Evolution Genetic Algorithm Levenberg Marquardt Parallel Tempering Simulated Annealing Cancel Definition of New Optimization Experiment SILVACO 183 VWF User s Manual Defining an Optimization Experiment Optimization in VWF Figure 6 3 shows the main window after an optimization experiment was create
131. anual Defining Optimizer Target and Settings Optimization in VWF Saving a Script to Hard Disk Figure 6 12 shows how a script can be saved on the hard disk fifth button from left WY export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help Ia ole Description Resource ET script as Look in expor data1 thomasb M t ee Ga src b_2_6 bin amp src b_2_8 4 Desktop sync Gai doc Etemp Ca download tmp experiments jut4 vP VP1 vp_etch_2 vwf docs Ca sge build J vwf_examples shadow_main workspace Some O script js 0 Error s 0 Waming S L stdjs Ln 3 Col 20 J src vec js File name my_saved_script js File type Js Script js x Cancel Script scriptl activate Finished O VWF Copyright SILVACO Inc Figure 6 12 Saving a Target Script to Hard Disk Undo Allows you to undo a previous edit operation Redo Allows you to repeat a previous edit operation Cut Cuts highlighted text from the editor and copies it into the internal buffer Copy Copies highlighted text from the editor into the internal buffer Paste Pastes text from the internal buffer into the editor at the position of the cursor Find Allows you to search for text Replace Allows you to replace occurrences of text in the editor with another text SILVACO 194 VWF User s Manual Defini
132. ast parameter a drawn thinner In Figure 3 33 the split parameter named implant dose is the first of two parameters on a single deck line The split parameter named implant energy is the second and last parameter on this deck line This is indicated by drawing the node a little fatter Only the fat nodes have results and result files available for inspection The pane also shows an icon with an arrow and a question mark You can click on this icon and then click on any component in the tree pane to get useful help information displayed SILVACO 62 VWF User s Manual Main GUI components Using the VWF GUI You can zoom into large DOE trees which don t fit into the tree pane as a whole To do so use the SHIFT key of your keyboard together with the left mouse button to draw a rectangle Once the mouse button is released the view of the tree pane is updated to only contain the nodes you selected when drawing the rectangle Figure 3 34 depicts a part of the tree from Figure 3 33 You can also see that a little icon was added showing a sign Clicking on this icon will zoom out Zooming is organized in zoom levels Every time you start a zoom on a previously zoomed view another level is created The first zoom from the initial tree view creates level 1 the second zoom creates level 2 and so forth By clicking on the sign you are effectively going back one zoom level at a time tjlx2545 Silvaco COM vwfex02 _ File Edit E
133. aste Ctrl V amp Baseline Experiment Idemo Free space 407 7 GB VWF Copyright SILVACO Inc 4 Figure 3 19 Main Window New Experiment Menu Entry SILVACO 48 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 20 shows the help menu entry Selecting this menu entry will open the VWF manual File Edit View Help yFolders VWFHelp F1 O2OOOOO Es MOSFET VWF Explorer ost vwf MOSFET base_deck Exp01 Exp02 Exp03 About VWF annach y annach Load Examples annach_test vwf_test ocalhost vwf_v6_upgrad ocalhost vwf_v7 ocalhost vwf_v7_tpb ocalhost baseline_2012 annachn vwf_v6_upgrad ocalhost vwf demo Free space 407 7 GB _45 VWF Copyright SILVACO Inc 4 Figure 3 20 Main Window VWF Help Menu Entry SILVACO 49 VWF User s Manual Main GUI components Using the VWF GUI The explorer allows you to move directories from one location to another To do so you have to select the directories to move This is shown in Figure 3 21 You can select several directories for movement by holding down the Ctrl key and left clicking the directories to move If you select multiple directories then the selected directories are rendered in red e VWF Explorer el File Edit View Help farer Po octcstwmoser CB j O lannach vwf_v6_test a E E E a annach vwf_v5_up annach_test vwf_test ocalhost vwf_v6_upgraded ocal
134. ation was finished In this example directories named nmos_test1 and nmos_test2 were moved from the root directory to the directory called MOSFET uw VWF Explorer eal lag File Edit View Help Broces oo afatecamostwmosret SSS S y y 3 8 B amp Ba a base_deck Exp01 Exp02 Exp03 mosl mos_testl mos_test2 annach vwf_v6_test annach vwf_v5_up annach_test vwf_test ocalhost vwf_v6_upgraded ocalhost vwf_v7 ocalhost vwf_v7_tpb ocalhost baseline_2012 i lannachn vwf_v6_upgraded Q localhost vwf C mos1 EExpo1 jexpo2 Hj expo3 C mos_test2 CI mos_test1 Cexamples demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc _ Figure 3 23 Resulting Directory Tree after Move Operation SILVACO 52 VWF User s Manual Main GUI components Using the VWF GUI 3 3 2 Creating a New Experiment In order to create a new experiment you will first need a directory to hold the experiment Experiments cannot be stored in the root directory Once a directory is created you will then need to create a baseline Finally based on this baseline you can then create an arbitrary number of experiments When experiments are created the baseline deck is taken as a starting point Both the baseline deck as well as the deck in the experiment can be edited independently from each other Editing the base deck does not influence the deck of an experiment and vice versa Editing the base deck has the effect
135. aults Oswaps 163 780u 0 431s 3 12 45 85 3 0 0k 0 0io Opf Ow i END Figure 6 24 Result Details SILVACO 206 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF 6 6 5 Defining Vector Targets Currently only the Levenberg Marquardt optimization algorithm supports vector targets One of the main applications of this optimization type is fitting parameters by comparing two curves to each other The comparison of the two curves takes place in the optimization algorithm which uses a least squares minimization scheme The simplest way of defining a vector target is to use a curve extract as shown in Figure 6 25 Figure 6 26 shows the selected curve target IV in the optimizer Setup tab 4 lannach solar_opt_ga Optimization Levenberg Marquardt 10063 File Edit Experiment Tools Help Igi ofl Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs amp Deck editor solve prev solve b1 1 0 log outf a log solve vcathode 0 vstep 0 02 vfinal 86 name cathode extract init infile a log here in deckbuild you can define the curve as a target using the LM optimizer extract name IV curve v cathode i anode outfile extract dat knrs exciton material a singlet material Preparing lo Free space 520 8 MB VWF Copyright SILVACO Inc Figure 6 25 Curve Extract SILVACO 207 VWF User s Ma
136. blue again as soon you perform more edit operations You can terminate and restart the VWF between any of the above mentioned steps without losing any of the entered data All the experiment definition is stored in the database and will be retrieved whenever an experiment is opened SILVACO 140 VWF User s Manual Running an Experiment Tutorial 5 5 Running an Experiment Figure 5 26 shows the entries of the Experiment menu of the Experiment window tj1x2545 Silvaco COM tutorial_01 ree Worksheet Jobs SplitPlot Worksheet Clear Result Files R Clear All Results Remove All Overrides a Fai 4 Missing Result Root u Finished implant dose implant ener Start Experiment Preparing Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc 4 bn TTT Figure 5 26 Starting an Experiment Starting an experiment has the effect of queuing simulation jobs in the underlying job farming system VWF supports three job farming systems These are the Open Grid Scheduler OGS the Load Sharing Facility LSF and a local embedded queuing system which allows you to run jobs on the local machine only In the latter case the system detects the number of available CPUs By default it executes no more than one job per CPU at a time It is possible to tune this behavior in the preferences section where you can enter the maximum number of jobs which should be running at any given time Additi
137. build silvaco lib support i386 linux Database vwf backed up to root vwf bak 20080901 on server lann ach Silvaco COM lannach gt The command above will create a backup file called vwf bak 20080901 which contains the contents of the database vwf Note the usage of the date in the filename vwf bak 20080901 Please note that the simulation result files must be backed up separately in this case To do so use the UNIX TAR command as follows tar cvzf root vwf_files bak 20080901 tgz build silvaco var vwf_base The above command will create a GNU zipped TAR file containing all files and directories of the directory build silvaco var vwf_base The given directory must be the base directory for your experiments Note The TAR command must be run as root SILVACO 255 VWF User s Manual SRDB Utility Database Maintenance A 4 2 Restoring a Database from a Backup To restore a previously backed up database you need to have the backup file available For the examples outlined above this is the file called vwf bak 20080901 The database vwf must not be existing in the system where you want to restore or an error will be shown To restore the file start SRDB connect to a database and use the following SRDB command lannach gt list Logged onto server lannach lt Available databases gt lannach gt lannach gt restore root vwf bak 20080901 VWF Database restoration Target directory not specifi
138. ch parameters you want to use in the DOE This is done in the Variables pane of the dialog After selecting the parameters click on the Script pane see Figure 3 55 Here an example script of an advanced latin hypercube algorithm was loaded Please refer to Chapter 7 Scripting in VWF for full details of the VWF scripting interface Experiment custom design Variables Script B o 8 6 4 2 a gl aalsa export datal tjet cvs_b_2_8 apps vwfllGui js lhd js JavaScript implementation of a Orthogonal Maximin Latin Hypercube DOE algorithm The code is an implementation of the algorithm described in Orthogonal Maximin Latin Hypercube Designs V Roshan Joseph and Ying Hung School of Industrial and Systems Engineering Georgia Institute of Technology Atlanta GA 30332 0205 USA roshan isye gatech edu and yhung isye gatech edu CANDAUBWNE This script needs some functions from the C library which are not directly available in JavaScript These functions are x srand rand0 time gt Ln 586 Col 1 Console Compilation Compile Script done Add to existing Cancel Figure 3 55 Custom Design Dialog Script pane After defining a tree with the regular or the Custom Design Dialog you must select which jobs to simulate This can either be the whole lot or a manually selected subset In order to reduce execution time of experiments simulations are carried out in parallel
139. ching IECE model of Victory Process The model will be calibrated to measured data for various mask openings as published in 1 The measurements are available as the experimentally achieved trench depths after 60 seconds of applied chemical etching The depths are given for 5 different mask widths Table 6 1 Trench depths for 5 mask widths Width um Trench depth angstrom 2 51000 5 70000 10 80000 17 86000 20 87000 The parameters to calibrate are the neutral rate and ratio The parameters will be tuned by the optimizer to achieve minimal deviation from measurement To setup this experiment start by defining a Levenberg Marquardt optimization experiment based on the deck depicted in Figure 6 30 SILVACO 215 VWF User s Manual Optimization Example Advanced Calibration Task Optimization in VWF b 4 export datal thomasb vwf_examples vwfex14 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help lal ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs amp Deck editor go victoryprocess simflags P 2 Init material silicon boxmin 20 0 11 boxmax 20 1 6 3 2 resolution 0 4 0 4 0 4 initHeight 11 0 meshDepth 1 higher resolution Init material silicon boxmin 20 0 11 boxmax 20 0 8 3 2 resolution 0 2 0 2 0 2 initHeight 11 0 meshDepth 1 set size 10 set pos s
140. circuit performance e Automated calibration e Optimization of Parasitic interconnect versus circuit performance e Inductor PDK generation e SPICE parameter extraction versus process variation SILVACO 9 VWF User s Manual Features Introduction 1 2 Features VWE helps you perform design experimentation efficiently without resorting to third party software Some of the advanced features provided are described below 1 2 1 Database The heart of the VWF system is a structured multi user database that contains all of the data associated with the design process The software uses a modern scalable SQL 92 based database engine to ensure integrity of your data In addition to the SQL 92 database engine large binary files as generated by simulators are stored in the file system in a central location All files pertaining to a particular experiment can be browsed manipulated and retrieved for visualization by the VWF software 1 2 2 User Friendly Access to or control of the data is provided through comprehensive Graphical User Interface GUD technology It is not required for you to learn any computer specific command syntax or require the use of any other software beyond that provided by VWF The results are automatically presented in the form of spreadsheets and graphical charts that require little or no user interaction to extract the desired information VWE offers a mechanism to extend the built in experimental design mode
141. co var vwf_base_local vwf_demo2 to file vwf_demo2_20130318 tgz Note the usage of the passwd option Create a backup in default mode This example shows the slightly changed output of the vwf_backup utility when the VWF default mode is used You can see that the simulation files are now taken from the default location Note The vwf_backup utility honors the VWF_BASEDIR environment variable thomasb lannachn vwf_backup host lannachn passwd simucad db vwf_v _tpb file tpb tgz VWF BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved Gl NFO version info vwf_backup 2 12 1 R Wed Apr 3 13 08 23 CEST I 2013 INFO config file build silvaco var vwf_ii cfg not existing using default locations for simulation files INFO Backing up database vwf_v7_tpb to file tpb tgz INFO Backing up simulation files from directory export datal thomasb vwf vwf_basedir vwf_v7_tpb to file tpb tgz SILVACO 249 VWF User s Manual vwt_backup Database Maintenance Use a properties file Instead of passing arguments through a command line they can be stored in a separate file This can be useful to quickly backup several databases without having to worry about all the details each time or to ease usage of automated backups see example below It also avoids the specified password being exposed to other users command line arguments can be seen by every user in the system by means of the ps UNIX command
142. d sgeexecd VWF2009 usr lib lsb install_initd etc init d sgeexecd VWF2009 Hit lt RETURN gt to continue gt gt Grid GI ngine execution daemon startup SILVACO 283 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid Starting execution daemon Please wait starting sge_execd Hit lt RETURN gt to continue gt gt 8 Specify a queue for this host Adding a queue for this host We can now add a queue instance for this host it is added to the gt allhosts lt hostgroup the queue provides 2 slot s for jobs in all queues referencing the gt allhosts lt hostgroup You do not need to add this host now But before running jobs on this host add it to at least one queue Do you want to add a default queue instance for this host y n y gt gt Vy root hostname modified allhosts in host group list root hostname modified all q in cluster queue list Hit lt RETURN gt to continue gt gt Once you answer this question the installation process is complete Several screens of information will be displayed before the script exits There is no need to source appropriate settings file to set up environment variables because we did it earlier Grid Engine is ready to recieve jobs 9 Doa quick test qsub b yes bin 1 Your job 10209 ls 1ls LS s has been submitted 1s e1020
143. d You can see the type of this experiment was selected to be Genetic Algorithm Also if you compare this window to the DOE type Figure 3 27 experiment window you can see that some of the tabs have changed The tabs Tree and SplitPlot Worksheet are not available for optimization experiments whereas tabs Parameters Setup Results and Graphics are not available for DOE experiments hg lannach opt_ga Optimization Genetic Algorithm 10058 X File Edit Experiment Tools Help Ie Ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Name __opt_ga Optimization Genetic Algorithm Status i Author Description tmp vwf_basedir thomasb vwf_test_v5 opt_ga_10058 Mon Apr 23 17 00 51 2012 Mon Apr 23 17 00 54 2012 Preparing lo Free space 594 3 MB VWF Copyright SILVACO Inc Figure 6 3 Optimization Experiment Window SILVACO 184 VWF User s Manual Defining Optimization Parameters Optimization in VWF 6 4 Defining Optimization Parameters The first step after creating the optimization experiment is to define the parameters that will be tuned by the optimizer The definition is done similar to a DOE experiment by selecting the parameter in the deck editor Additionally lower and upper bounds for that parameter must be given This avoids the optimizer choosing nonsensical values for a parameter This is done in the exact
144. d feature description please see SPAYN User s Manual SILVACO 160 VWF User s Manual VWF File Mode Tutorial 5 12 VWF File Mode In addition to allowing access to a database VWF also allows to store experiments in single files This mode was introduced to relieve you from installing a database and to be able to quickly view exported experiments It can be invoked by adding the filemode option on the command line For example vwf filemode This will open the following window see Figure 5 50 Open or Create an experiment C Create experiment C Open examples Pe Browse Preferences P Figure 5 50 VWF File Mode Window At the bottom of the dialog you can get access to the Preferences pane using the preferences button Next to the Preferences button there is the tool version 35 button This button will display version numbers of tools as selected in preferences If all tools are set to use the default version then this button is inactive grayed Figure 5 51 shows that version 2 12 0 R of Spayn and version 4 0 0 C of DeckBuild are used respectively For all other tools default versions are being used Please refer to Chapter 4 Customizing VWF Preferences Panel for details on how to change the tool versions SILVACO 161 VWF User s Manual VWF File Mode Tutorial Open or Create an experiment spayn 2 12 0 R deckbuild 4 0 0 C Figure 5 51 Tool Versio
145. d files loaded Please note the titles of the two displays which identify the cells of the SplitPlot Worksheet 4 23 and 4 21 iv Tonyplot Production S os Been Lovoypeys 5 ATHENA ATLAS mos 1ex01_O str_ 4 23 mos 1ex01_1 str_ 4 21 0 1 0 3 07 0 8 Figure 3 76 TonyPlot with files loaded from SplitPlot Worksheet SILVACO 98 VWF User s Manual Main GUI components Using the VWF GUI By selecting Tools Spayn the Send Worksheet To SPAYN dialog will appear Figure 3 77 This dialog allows you to start SPAYN and create a new SPAYN worksheet You can enter which parameters will be taken over into the SPAYN worksheet SPAYN is started after clicking the OK button Figure 3 78 shows the situation after SPAYN has been started and the SPAYN worksheet has been initialized v Send Worksheet To Spayn alx Spayn Status Spayn not running Options Mode New Worksheet gt Parameter no value fe t lt S S SCS S I Send Experiment Name as Attribute V Set DB Constrained I Prepend block name IM Send only complete rows Split Name Send Spayn Type 1 time 2 temp Vv Enable Response 1 gateox W Enable 2 lmj IV Enable 3 _ n sheet rho W Enable 4 Idd sheet rho IV Enable 5 _ chan surf conc IM Enable 6 sheet cond v bias Enable 7 nldvt WM Enable 8 nvt IV Enable 9 nbeta IV Enable 10 ntheta I Enable Cancel Apply F
146. d of numerical algorithm to compute your DOE strategy In the Latin Hypercube example provided there are three functions used from the math library These are srand rand and abs Since these functions are not available in the JavaScript Math object they must be provided in other ways One way of achieving this is to implement these methods directly in JavaScript A more convenient and more performant method of achieving this is to use the underlying math library In order to allow defining arbitrary C functions usable from JavaScript a shared library can be loaded prior to executing a script The library must define a function vwf_js_setup with C linkage and the following signature which is defined in the provided header file called vwf_js_setup h ifndef VWE_JS_SETUP_H_INCLUDED define VWF_JS_SETUP_H_INCLUDED include lt jsapi h gt ifdef _ cplusplus extern C endif typedef int vwf_js_setup_t JSContext ctx JSObject global ifdef _ cplusplus endif endif VWF_JS_SETUP_H_ INCLUDED The implementation used for the Latin Hypercube example is provided as C file vwf_js_setup c An example Makefile is also provided for you to compile the c into a shared library so file SILVACO 233 VWF User s Manual Defining Custom DOE Strategies Scripting in VWF Once the file is compiled it can be selected from the Custom Design dialog s script pane The dialog shown in
147. d setting file permissions and owner in gt catman lt SILVACO 275 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid Verifying and setting file permissions and owner in gt doc lt Verifying and setting file permissions and owner in gt include lt Verifying and setting file permissions and owner in gt man lt Your file permissions are set Hit lt RETURN gt to continue gt gt 10 Specify whether all of your grid engine system hosts are located in a single DNS domain Select default Grid Engine hostname resolving method Are all hosts of your cluster in one DNS domain If this is the case the hostnames gt hostA lt and gt hostA foo com lt will be compar treated as equal because the DNS domain name gt foo com lt is ignored when ing hostnames Are all hosts of your cluster in a single DNS domain y n y gt gt y Ignori ng domainname when comparing hostnames Hit lt RETURN gt to continue gt gt 11 Making directories Making directories creati creati ng directory var opt GRID default spool qmaster ng directory var opt GRID default spool qmaster job_scripts Hit lt RETURN gt to continue gt gt 12 Specify whether you want to use classic spooling or Berkeley DB Setup spooling Your OGS binaries are compiled to link the spooling libraries during runtime dynamically So yo
148. d the coloring will return to that of regular deck text You can also select Locate by simply double clicking on any of the parameter s Value Block or Type fields SILVACO 59 VWF User s Manual Main GUI components Using the VWF GUI tjlx2545 Silvaco COM vwfex02 gate oxide grown here diffus time 11 temp 925 dryo2 press 1 00 hcl 3 Extract a design parameter extract name gateox thickness oxide mat occno 1 x val 0 05 vt adjust implant implant boron dose 9 5e11 energy 10 pearson depo poly thick 0 2 divi 10 from now on the situation is 2 D etch poly left pl x 0 35 method fermi compress Affen Hmn tamne AN sintan mene nT N Figure 3 31 Experiment Editor Split Parameter Context Menu Note Extract statements are recognized whenever a new deck is imported into the experiment or when a new extract statement is added by editing the deck in the deck tab SILVACO 60 VWF User s Manual Main GUI components Using the VWF GUI You can use the Find Text dialog Figure 3 32 to search for arbitrary text elements in the deck To open the dialog press Ctrl F within the deck editor pane Find Text Figure 3 32 Find Text Dialog SILVACO 61 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 33 shows the Tree tab The Tree tab presents a view at the split tree Parameters are grouped in blocks The split tree results from the set of split parameters and
149. default mode of operation where all your simulation jobs are run on your local workstation You will need to install firebird when you want to run VWF in database mode Note If you already have installed firebird with a different Silvaco software package e g Utmost IV then you do not need to redo this step Please proceed directly to Creating a VWF Database on page 23 Note All firebird not SRDB commands described in this manual need to be run as root or they will fail Firebird has been copied onto your hard disk when you untarred the VWF software from the VWF tar package see Section 2 2 Installing the VWF TAR file After the files have been untarred you must install firebird To do this invoke the firebird script as follows root lannach build silvaco bin firebird install Running s_install version 2 0 3 R please wait Currently 921944 KB free in tmp gt 8000 Preparing to install the Firebird Database Server This procedure will modify or create the following system files etc re d init d firebird Backups will be created in var tmp s_install bak before any files are modified Run build silvaco etc s_install rm bak or var tmp s_install bak remove to remove backup files Do you wish to proceed ylin y Using database location build silvaco var srdb owned by host lannach Silvaco com 10 72 5 1 Configuring build silvaco var srdb done SILVACO 22 VWF User s Manual
150. drawn in brackets In this example rows 1 8 9 10 and 15 are selected To select a row click on the row header with the left mouse button To select several rows hold the Ctrl key and click on the row header of the row you want to add Selected rows can be removed by right clicking into the worksheet Figure 3 42 or on the row heading Figure 3 43 and selecting Remove selected Branche s SILVACO 68 VWF User s Manual Main GUI components Using the VWF GUI tjx2545 Silvaco COM vwfex01 DOE 10040 Arep J 021e 10 2 021e 03 2 330e 07 JEET 2 TEE met 2 021e 10 2 021e 03 2 263e 07 1 105e 07 2 210e 02 1 094e 01 2 021e 10 2 021e 03 2 249e 07 2 249e 02 1 099e 07 2 198e 02 1 088e 01 1 982e 10 1 982e 03 5 647e 07 5 647e 02 2 671e 07 5 342e 02 2 695e 01 1 982e 10 1 982e 03 5 901e 07 5 901e 02 2 800e 07 5 600e 02 2 825e 01 1 982e 03 5 S474 07 5 847e 02 2 021e 10 2 021e 03 4 2 305e 02 2 2 271e 02 2 021e 10 2 021e 03 4 2 067e 02 2 2 092e 02 1 035e 01 2 021e 10 2 021e 03 4 2 052e 02 2 2 082e 02 1 030e 01 1 982e 10 1 982e 03 1 6 749e 02 6 255e 07 5 957e 02 3 005e 01 1 982e 10 1 982e 03 1 6 505e 02 6 122e 07 5 831e 02 2 941e 01 1 969e 10 1 969e 03 1 422e 08 6 773e 02 6 147e 07 5 854e 02 2 974e 01 1 969e 10 1 969e 03 1 470e 08 7 000e 02 6 410e 07 6 105e 02 3 101e 01 1 969e 10 1 969e 03 1 451e 08 6 908e 02 6 352e 07 6 050e 02 3 073e 01 2 024
151. e comparator SUBCKT comparator INM INP OUT VDD VREF VSS M1 NET3 NET3 VDD VDD CMOSP L 2U W 10U AD 30P PD 26U AS 30P PS 26U M 1 M2 NET4 NET3 VDD VDD CMOSP L 2U W 10U AD 30P PD 26U AS 30P PS 26U M 1 M3 NET3 INP NET2 VSS CMOSN L 2U W 5U AD 15P AS 15P PD 16U PS 16U M 1 M4 NET4 INM NET2 VSS CMOSN L 2U W 5U AD 15P AS 15P PD 16U PS 16U M 1 Finished vwF 2 12 5 R Copyright 1984 2014 Silvaco Inc Figure 5 58 SmartSpice Deck loaded in VWF SILVACO 169 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial Eel gt File Edit Experiment Tools Help 18 z B Sib OLS Description Resources Tree Worksheet Jobs SplitPlot Worksheet Deck editor measure rise_pass param rise_dly lt 25n 1 0 measure fall_pass param fall_dly lt 25n 1 0 measure pass param rise_dly lt 25n fall_dly lt 25n 1 0 0 Sbissoisinieisiotaisioisioisiaisotoiotaisiaisistoiotkstatai kaa measure for only vwf kok solve outfile spice log extract init infile spice log extract name rise_dly max da value 2 rise_dly extract name fall_dly max da value 2 fall_dly extract name rise_pass max da value 2 rise_pass extract name fall_pass max da value 2 fall_pass extract name pass max da value 2 pass END Finished vwF 2 12 5 R Copyright 1984 2014 Silvaco Inc
152. e 10 2 024e 03 7 261e 07 2 269e 02 3 619e 07 2 262e 02 1 118e 01 2 024e 10 2 024e 03 5 972e 07 1 866e 02 3 234e 07 2 022e 02 9 989e 02 2 024e 10 2 024e 03 5 943e 07 1 857e 02 3 227e 07 2 017e 02 9 966e 02 1 984e 10 1 984e 03 2 381e 08 7 44 1e 02 9 955e 07 6 222e 02 3 137e 01 1 984e 10 1 984e 03 2 125e 08 6 641e 02 9 328e 07 5 830e 02 2 939e 01 1 984e 10 1 984e 03 2 110e 08 6 592e 02 9 306e 07 5 816e 02 2 932e 01 1 970e 10 1 970e 03 2 574e 08 8 044e 02 1 027e 06 6 421e 02 3 260e 01 1 970e 10 1 970e 03 2 443e 08 7 635e 02 1 010e 06 6 314e 02 3 205e 01 1 970e 10 1 970e 03 2 421e 08 7 567e 02 1 008e 06 6 300e 02 3 198e 01 z Em a cei eo a E B MA m EE EE a ioe AE mA mE EE EE AE EE H PE EN a ral sa Figure 3 41 Several Rows Highlighted for Removal SILVACO 69 VWF User s Manual Main GUI components Using the VWF GUI NEE Jobs SpitPlot Worksheet bore oui ee ee ep ee 1 8 2 1 50 1 985e 10 03 1 143e 08 e 02 2 9 2 021e 10 TINA 2 330e 07 2 330e 02 1 136e 07 h EA 2 000e 03 1 zesg 2 021e 03 2 263e 07 2 263e 02 1 105e 07 i 1 094e 01 2 021e 10 2 021e 03 2 249e 07 2 249e 02 1 099e 07 1 088e 01 1 982e 10 1 982e 03 5 647e 07 5 647e 02 2 671e 07 i 2 695e 01 2907210 L 982e 03 5 901e 07 5 901e 02 2 800e 07 d 2 825e 01 1 982e 03 5 atkaaslA f 2 778e 07 5 2 803e 01 2 455 Unp
153. e 3 12 shows the Edit menu This allows you to cut copy paste experiments and also to enter the Preferences dialog VWF Explorer File Edit View Help J Copy Ctrl C localhost vwf MOSFET Paste Ctrl V i Select All 8 E Ei Invert Selection basa deck Expoz i Preferences B Permissions _ Superusers f lannachn vwf_v6_upgrad localhost vwf Has MOSFET demo Free space 407 7 GB _45 VWF Copyright SILVACO inc Figure 3 12 Main Window Edit menu SILVACO 42 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 13 shows the View menu This allows you to apply filters and switch between the different available views of the Main Window fa VWF Explorer leas File Edit View Help localhost vwf MOSFET annachn vwf_v6_upgrad ocalhost vwf Hia MOSFET ar ene m petal E dG lar base_deck Exp02 8 loc Q loc 4 sd Go To Q loc Refresh F5 G 4 9 demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc _ Figure 3 13 Main Window View menu SILVACO 43 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 14 shows the List View of the main pane ui VWF Explorer File Edit View Help lannach vwf_v6_test mos O lannach vwf_v5_up base_deck lannach_test vwf_test Exp01 localhost vwf_v6
154. e System 00 c eect eens 302 D 5 Selecting a Different than the Default Version of a Simulator ccc cece eee eee eee 303 D 6 Splitting on the Simulator VerSion 00 ccc cece eee eee eee ene eens 304 D 7 Splitting on the Init line of Athena 00 cece cece eee teen eee eee eee nee neeeee 305 SILVACO 7 VWF User s Manual SILVACO Chapter 1 Introduction What is Virtual Wafer Fab VWF Introduction 1 1 What is Virtual Wafer Fab VWF VWF is designed to be used interactively to mirror procedures performed in real wafer fabs and to automate the user intensive tasks of preparing experiments running simulations and analyzing results This results in a convenient use of process and device simulation tools both in two and three dimensions and the ability to perform large simulation based design studies 1 1 1 Advantages VWE provides major advantages e Greatly reduces the cost of experimentation because you only need this software to perform them e Greatly reduces the design cycle time because simulations will complete hours or days while actual fabrication typically takes weeks or months 1 1 2 Applications Here are some of the operations that VWF can perform e Studying the effects of process variation on circuit performance e Experimenting layout variation such misalignment and over under etch on Device performance e Synthesis and optimization of inductor design e Optimization of
155. e all jobs from the queue break Ctrl C gt do not run other experiments END 7 1 4 Using a Grid Environment in Batch Mode You can also opt to use a grid computing environment like grid engine or LSF when experiments are run in batch mode This is independent from whether this is a filemode or database mode experiment The example JavaScript scripts shown above contain a line of code to use the local queueing system var myGrid new Drmaa local In order to use a grid environment you need to change that line to read var myGrid new Drmaa sge SILVACO 229 VWF User s Manual Run Experiments Outside the GUI Scripting in VWF The jobs will then be queued into the queuing system when the script is executed 7 1 5 Passing Options to the Queuing System You may need to pass options down to the underlying queuing system For instance with grid engine you need to add the options shell yes The way options are passed on to the queuing system is by means of an argument to the RunExperiment object Below the line of code to achieve this var myExp new RunExperiment myMgr myGrid myApp shell yes To pass options down to the local queue you have to use the setSessionArgs method Currently options maxJobs and maxLoad are supported for the local queuing system Essentially the supported options are the same as what you can also change in the grid preferences pane of the VWF GUI Below
156. e before the experiment is started If you click Cancel in this case then nothing happens SILVACO 143 VWF User s Manual Running an Experiment Tutorial Figure 5 29 displays the situation where two jobs have been selected for execution by the job farming system As jobs finish other jobs will be executed until no more are available tj Ix2545 Silvaco COM tutorial_01 Figure 5 29 The Experiment After Selecting Experiment Start SILVACO 144 VWF User s Manual Running an Experiment Tutorial When the experiment has been successfully started you can observe the status information for every job in the system You can get this information by navigating to the tree tab Right clicking on any node will open the Node Information dialog see Figure 5 30 Node Information Name implant energy DO 5 id C CS vwf deck ml in results final extract dat tatus Finished E Path fedir tjet tutorial tutorial_01_10001 jobs 10010 0S1ex01_0 str_moslex01_l log moslex01_l str Splits implant energy energy 5 implant dose dose 4 75e 11 ATLAS version 5 17 44 C finished at Thu Dec 15 11 03 09 2011 7 1luser 0 40system 0 33 80elapsed 22 CPU Oavgtext Oavgdata Omaxresident k 61456inputs 1552outputs 305major 41832minor pagefaults Oswaps 7 115u 0 409s 0 33 80 22 2 0 0k 0 0i0 305pf 0w wiri END vrir Standard Output Standard Error Scroll to Bottom Figure 5 30 Node Infor
157. e create command above This user is the VWF administrator and can be used to modify the security settings for all objects in the VWE database independent from their ownership The second user is the SRDB internal superuser This is not a VWF specific user It does not have any function in the VWF system Please consult the SRDB manual for more details on that user Finally the third user thomasb is the one that was created using the create user command above Now terminate the SRDB utility by typing quit or use exit several times to go through the different connection levels SRDB lannachn vwf gt exit SRDB lannachn gt exit SRDB gt quit thomasb lannachn You are now ready to start the VWF software SILVACO 27 VWF User s Manual VWF Modes Installation In database mode you can actually close the VWF while experiments are running When you start an experiment VWF starts a background job for you which will take care of executing the experiment Database Mode Installing the vwf_daemon on a central VWF server You can opt to run all experiments on a central VWF server This allows you to completely separate the VWF GUI from the VWF job execution module This enables you to utilize an Open Grid Scheduler or LSF cluster when your workstation does not have direct access to the grid is no submit host This mode also does not store the simulation result files on your workstation but keeps all files on the central server i
158. e default configuration in this mode is to store all simulation result files relative to your UNIX home directory The full directory of an experiment is as follows SHOME vvwf_basedir lt username gt lt database_name gt lt experiment_name gt _10001 where e SHOME is your home directory e username is the name of your UNIX account e database_name is the name of the database which was given when it was created using the SRDB utility and e experiment_name is the name of the experiment in VWF The trailing number _10001 is an automatically chosen sequence number to avoid name clashes The first part of the directory HOME vwf_basedir can be configured to point into a different location using the VWF_BASEDIR environment variable SILVACO 17 VWF User s Manual VWF Modes Installation Note You do not need to change the location of the simulation files unless you want to use either LSF or the Open Grid Scheduler OGS queuing system OGS and LSF will require a location which is accessible from all machines that are part of the grid The VWF background process vwf_server will log information to a log file While not normally concerned with log files they can be helpful in case there is an error condition The location of the log file defaults to S HOME vwf_logs It can be changed by using the VWF_LOGDIR environment variable When any of the VWF_BASEDIR or VWF_LOGDIR variables are changed please
159. e experiment window when the Deck tab is selected A similar view at the deck as the one when a baseline is imported is shown A notable difference is that no split points can be defined at baseline import or that the baseline cannot be edited To define a split parameter right click on any deck line In this tutorial you will create 2 split parameters To define the first parameter scroll down to the line reading vt adjust implant This line is a comment and has no function in the underlining simulator here Athena Right click the IMPLANT statement which directly follows the line of comment A context menu will open which offers several parameters named boron dose energy and pearson Select the parameter called dose The experiment window should now look similar to Figure 5 17 The part of the line identifying the selected parameter dose 9 5e11 is now drawn in red color to indicate this parameter has been defined as a split parameter tj Ix2545 Silvaco COM tutorial_01 Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Deck editor Extract a design parameter extract name gateox thickness oxide mat occno 1 x val 0 05 vt adjust implant implant boron da ar sa a Standard Menu gt boron depo poly thick from now on thi etch poly left p1 Ready Preparing O Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc _ ine Figure 5 16 Defining Spli
160. e files STR log files containing curves LOG or any other generated file In this part you can also view but not edit the deck as given to the simulator Double clicking on any of the files will open the associated viewer For example double clicking on a STR file will open TonyPlot 3D Note Files are only available once the simulation has been finished This pane will be empty for any job that has not run yet SILVACO 87 VWF User s Manual Main GUI components Using the VWF GUI Note Every process in UNIX Windows has assigned a standard output st dout and a standard error stderr stream These streams are used to print low level system information such as debugging output or status information about simulator internals You are not normally concerned with this information unless errors occur or unexpected results are obtained from a simulation tjIx2545 Silvaco COM vwfex02 j Kall node jop Kill Sele Node Summary Unpin Figure 3 64 Node Summary menu entry SILVACO 88 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 65 depicts an alternative way of getting the data associated with a node Instead of using the tree tab of an opened experiment you can use the experiment browser to directly navigate to any given node of the experiment To use this feature select an experiment in the left pane of the browser The icon of the experiment will change and a sig
161. e main difference between the GA and DE optimizers is in the way new generations are created DE uses differences between population members for creating trial solutions while GA operates directly on the population members DE operates by constructing a linear combination of two or more randomly selected members of the existing population SILVACO 180 VWF User s Manual Optimization Loop Optimization in VWF 6 2 Optimization Loop The optimization process carried out in VWF can be seen as a loop where the optimizer acts as an independent component which requests targets for parameter values to be computed by VWE VWE simulates each parameter combination and collects the targets for all carried out simulations The targets are then fed back to the optimizer which in turn requests targets for new parameter values The optimizer chooses the parameter values so that the target decreases When the target is within a certain tolerance the optimizer finishes and the experiment terminates request values return targets Figure 6 1 Optimization Loop Figure 6 1 illustrates that loop The way how parameter values are chosen strongly depends on the selected optimization algorithm A genetic algorithm uses a different strategy as does simulated annealing or a gradient based optimizer A VWF built in algorithm takes care of computing the optimizer target values return targets in Figure 6 1 out of the simulator responses and the user enter
162. e supported by both VWF and the SRDB utility Open Database Server Name localhost List Database Name RTA Query Servers Name Cancel Figure 3 2 Opening a Database Once you select a database close the dialog by clicking on the OK button The left pane of the Main Window will look similar to Figure 3 3 In this example a database named vwf on host localhost was added More databases can be added to the Main Window by repeating the Open Database step Once added a database will not be removed but will be available after restarting the VWF software The list of added databases is stored persistently in a VWF configuration file in your home directory Thus you will not have to re add your own databases every time you use the software Figure 3 3 depicts the popup dialog to enter the password This dialog is opened upon double clicking on a database entry To connect to a database enter a valid username and password When selecting OK or hitting Enter the dialog is closed and an attempt is made to connect to the database Note Users must be created separately for every database using the SRDB utility SILVACO 34 VWF User s Manual Main GUI components Using the VWF GUI VWF Explorer lannach vwf_v6_test lannach vwf_v5_up lannach_test vwf_test localhost vwf_v6_upgraded localhost vwf_v7 localhost vwf_v7_tpb localhost baseline_2012 lannachn vwf_v6_upgraded fe localhost vwf Login to database
163. ecurity sensitive applications all data can be held on a central VWE server It is possible to define privileges such as read write or execute on a per user level Groups can be defined to implement department security profiles User authentication on the network follows the SASL Simple Authentication and Security Layer standard 1 2 7 Scripting Interface VWE supports a powerful scripting interface to run JavaScript scripts In addition to creating your own experimental designs this can be used to run VWF experiments without the need of the GUI batch mode SILVACO 11 VWF User s Manual Simulators Introduction 1 3 Simulators VWE supports 2D and 3D process and device simulators SPICE parameter extraction and circuit simulators as well as interconnect parasitic extraction tools SILVACO 12 VWF User s Manual SILVACO Chapter 2 Installation VWF Variants Installation 2 1 VWF Variants The VWF software can be utilized in several ways Depending on how you use VWF different installation steps are required The following shows a brief outline of the different ways of using VWE This is followed by detailed installation instructions Depending on what features of VWF you would like to use there are four ways you can use VWF e File mode This does not utilize a database at all Instead the necessary information to run experiments is kept in files e Database mode A database is utilized to store experim
164. ed Defaulting to build silvaco var srdb LIBRARIES bpuild silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux usr lib lib usr openwin 1lib build silvaco lib support x86_64 linux build silvaco lib support i386 linux Database VWF restored as build silvaco var srdb VWF fdb on server lannach lannach gt list Logged onto server lannach lt Available databases gt VWE VWE To restore the simulation result files please change to your base directory and untar the TAR file created in the backup step vwf_files bak 20080901 tgz Note You also need to restore the simulation result files in the very same location where you took them from when the TAR file was created In the above example this directory was called build silvaco var vwf_base Use a command as follows to untar the result files cd tar xvzf root vwf_files bak 20080901 tgz Note It is advisable to use dates in names for backup files This ensures you can match a database export file with the corresponding TAR file containing the result files Both the database file and the TAR file should be created at a time where the system is mostly idle e g at night time and at the same time On UNIX systems a cron job is best suited for that task Note The TAR command must be run as root SILVACO 256 VWF User s Manual Virtual Wafer Fab SILVACO Appendix B Queuing VWF On The Oracle SUN Grid Engine Open
165. ed target values The algorithm computes a component wise absolute error vector Depending on whether the optimizer requires a vector or scalar target the error vector is either directly passed on to the optimizer or a root mean square is computed e g for a genetic optimizer If this default algorithm is not suitable for the problem at hand then you can optionally chose to run a user definable JavaScript script to compute the optimizer target When it comes to grid computing it is important to note that an optimization process is not strictly serial in the sense that only one evaluation is requested at a time Instead most optimizers are capable of requesting several evaluations in parallel This is true for a genetic optimizer who will request the evaluation of a whole population but also for the gradient based Levenberg Marquardt optimizer In order to best utilize a given grid environment it can make sense to tune certain optimizer settings For example it s a good idea to make the population size of a genetic optimizer not much smaller as there are CPUs on the grid Note also that an optimizer which is incapable of performing parallel evaluations is not of much use on a computational grid This is because the time to compute the target simulation time is rather large and will normally dominate the whole optimization process Speed up of the optimization process will only be achieved if several CPUs can be utilized at the same time
166. eeeeeeeee 99 100 158 160 SPAY naera E TE 121 Spider Monkey acssvesnieit cacti hie 224 Splits 58 62 68 76 87 94 98 132 139 166 169 175 Splitting Init lines in Athena ceeeeeeeeeeseeeneeeseeteeeeeeeeeneeees 305 Splitting Line Statements 0 0 eee eeeeeeesteeeeeeeneeteaeeeeeeeeeeees 299 SDB ehoehs tees cote EE E T cts 23 27 255 256 Starting VWP asnarin ceanii Sides casinedeedaceteieessecedeis ah teen 33 122 SHOPPING SCHS apese sesiis edeveesascenexcen aeaaea aaka 233 Submitting jobs oo eee eeee cee eceeeeeeeeeeeeeeeeeaeeteaeeeeetaes 287 291 T OF CU eee iterate renner errrcrres errr erry 15 246 255 256 Target Script Editor insisi cirereta 189 196 Targets for Optimizer Defining Language vivecinaciivscxwie A Hecieedee indeed 212 SCQIAM es seSessscegeaneesegeasevueceinesdg vast siereseethe feevedsteees 199 206 Script Editor isnt Rein a Si 189 196 NOGUOM coyre mondine ninas pate niepo To p ai 207 211 SILVACO 308 VWF User s Manual
167. elect which parameters to use and you have to define the lower and upper bounds for each selected parameter After clicking OK the shown design strategy will insert one node for the upper and one node for the lower boundary of the selected parameter values For a total of n parameters 2 branches are entered into the worksheet The depicted initial value is the one that is existing in the deck By confirming the data with OK the worksheet is updated with the new branches Adding splits by using a design can be repeated several times in order to add more branches to the worksheet The buttons labeled Replace Existing and Add to existing allow you to decide whether a worksheet will be overwritten with the new design or whether the values will be appended to the splits that are already in the worksheet Note however that you cannot use this technique to duplicate splits by applying the same design several times No new values will be added in this case even when you select Add to existing This is because VWE compares the newly created splits with the splits already in the worksheet and will only add unique splits Note Only Double valued parameter types can be used in the Design dialog All other parameter types are grayed out SILVACO 76 VWF User s Manual Main GUI components Using the VWF GUI Experiment design 2 Level Full factorial Variable tial Low High la I diffus time 30 12 diffus temp 1000 Fa PE implant
168. ell script to have date and time in the name of the created backup file bin sh site alpha bin vwf_backup properties build thomasb vwf_training config file backup_ date Y m d_ H M tgz Please consult the manual pages of the cron bash csh and date UNIX commands for full details SILVACO 251 VWF User s Manual vwf_restore Database Maintenance A 3 vwf_restore This tool performs the task of restoring a backup previously created with vwf_backup to a database server It restores both the database dump and the simulation results If invoked without any arguments it prints a brief usage message thomasb lannachnS vwf_restore VWF_RESTORE Copyright C 1984 2013 Silvaco Inc All rights reserved file to restore from must be given usage vwf_restore host hostname passwd password filename dbdir directory srdb srdb flags flags properties properties file dbdir select to which directory the database is restored to basedir select a different than the default base directory dbname select a different than the default name for the database The name is relative to the base directory 5rdb select which srdb version to use default uses srdb from SSILVACO bin flags pass flags to srdb command e g to select a particular version properties take all options from a properties file all other options are ignored e g vwf_restore host lannach passwd simucad backup_
169. ents e Main Window This is the first component you are confronted with You can manage several databases and open project project from a given database The Experiment Editor This component opens when you edit an existing or create a new experiment e The Deck Editor This is a part of the experiment editor but realized as a separate application The three components will be presented in detail in the following sections 3 3 1 Main Window When starting VWF the Main VWF Window will appear see Figure 3 1 This is the main entry point to VWF Throughout this manual it will also be called Explorer since it allows you to browse through and open all experiments stored on a given database VWF Explorer File Edit View Help 3 Open Database Close Database Login ogout Import New gt Open Rename F2 Delete Del Exit Dall VWF Copyright SILVACO Inc Figure 3 1 Main VWF Window SILVACO 33 VWF User s Manual Main GUI components Using the VWF GUI When starting VWF for the first time you must first open a database connection To do this select File Open Database The Database dialog will open and ask you to select an available database see Figure 3 2 Only Silvaco VWF databases which have been previously installed using the SRDB utility will be listed Note An arbitrary number of databases can be installed on a given host and that several hosts ar
170. ents and results Execution of experiments takes place either on your local workstation or on a central VWF server Advanced security strategies are enforced e Open Grid Scheduler OGS queue Allows you to utilize an Open Grid Scheduler cluster to run simulations e Load Sharing Facility LSF queue Allows you to utilize an LSF cluster to run simulations All four variants require you to at least install the VWF TAR file This step is explained in the next section SILVACO 14 VWF User s Manual Installing the VWF TAR file Installation 2 2 Installing the VWF TAR file The VWE software is shipped as a single TAR file which contains all components of VWF This TAR file must be untarred in a directory which is accessible from all machines you would like to run the VWF software from A suitable location for this is an NFS drive on a dedicated file server This drive must be mounted on every workstation which will be able to run the software Note If you plan to also install the database system then the database must be running on the very same machine where you untar this VWF TAR package If you want to install the database on a separate machine you will have to download and install an extra TAR package Please contact a Silvaco representative for further details Note You can safely untar this package over a previously created Silvaco installation All packages are versioned so that you can later continue to use the previousl
171. ep and after jobs have been added Jobs can also be added after an experiment has been started and while jobs are being executed Other entries in this menu allow you to add jobs according to their state e Selected Adds all jobs into the queue that have been selected using the mouse surrounded by red rectangles e Not Run Adds jobs that have not run yet e Aborted Adds all jobs that were aborted Aborted means that you have stopped the experiment by selecting Experiment Stop see Figure 3 60 e Failed Adds all jobs that crashed in a previous run This is useful if for instance simulations don t produce any results e g due to convergence problems in the underlying simulator and you want to change numerical parameters in the deck and re run those simulations e Missing results Sometimes a simulation does not produce all requested results but only a subset thereof This menu entry allows you to rerun such simulations tjIx2545 Silvaco COM vwfex02 File Edit Experiment Tools Help IENS Start ree Worksheet tohs _ SnlitPlot Worksheet eg Clear Result Files Not run K aQue Clear All Results Aborted eel Remove All Gverides Eailed m Fai issi Missing Result 0 Basing nut a Finished 0 Remove all 3 Remove selected branches diffus time diffus temp implant dose a i 1 implant energy Queue selected fragment s Preparing Free space 13 4 GB VWF Copy
172. eriment design 2 Level Full factorial Variable o ia fiw High Ja f implant dose 9 5e 11 4 75e 11 1 425e 12 2 f implantenergy 0 o 5 5 Figure 5 23 Chosen DOE strategy SILVACO 138 VWF User s Manual Defining a New Experiment Tutorial By clicking Add to existing or Replace existing the split parameter entries are created and the Worksheet view changes accordingly The difference between adding and replacing is that the latter will remove any previously defined splits In this example it doesn t make a difference as this is the first time splits are defined After selecting add or replace the worksheet should look similar to the one shown in Figure 5 24 Navigating to the Tree tab shows the changed tree view Figure 5 25 y tjlx2545 Silvaco COM tutorial_01 x File Edit Experiment Tools Help 4 75e 11 1 425e 12 Double click here will adjust columns width Preparing O Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc Figure 5 24 Populated Worksheet SILVACO 139 VWF User s Manual Defining a New Experiment Tutorial tjlx2545 Silvaco COM tutorial_01 Figure 5 25 Populated Tree The experiment has now been fully defined and can be saved by using Ctrl S or selecting File gt Save After the experiment has been saved the blue disk shaped icon will turn gray to indicate there are no more outstanding changes to save The color of the icon will change to
173. executing jobs If LSF is not found on your system an error message is printed and VWF exits Note If you have been using LSF with VWF before and want to keep on using LSF then no action is required Note You can have several LSF grid profiles defining various options that are passed down to the LSF queuing system Figure C 1 displays an LSF profile with options L and q in use Options R and U are also defined but are not active not checked SILVACO 295 VWF User s Manual Selecting LSF to be Used Queuing VWF On An LSF Cluster v Preferences je Manage Preferences Grid Application Shortcuts m Profiles F New Copy Delete Spayn Tonyplot Queue system drmaa Tonyplot 3D MaskViews m Settings for current profile DeckBuild Expert F SmartView a Experiment L bin csh q vwf Edit s OR vwt_jobs gt 0 Properties ov Bay Remove DOE Tree Deck Editor Graph Script Editor Execution Host Grid Registered Filetypes pe Sipe Optimizer Status m Max queue jobs p m IV Save these settings on exit Cancel Apply Figure C 1 Options in LSF Profile Max queue jobs Use this field to limit the maximum number of jobs which are added as active jobs into the LSF system Jobs that would exceed this limit are still added into the system but are put on hold state PSUSP As other jobs finish
174. fex12 Idemo Free space 407 7 GB F VWF Copyright SILVACO Inc _ Figure 8 3 Permissions Context Menu Entry Design Analyze Taskforce admin tjet thomasb demo visitor boss manager designer project_leader statistician reporter I Recursive Edit Permissions for Directory REMOTE Read Write Execute Info o Vv r m manager designer project_leader Vv r m manager reporter statistician project_leader Vv r m boss manager Vv Vv Vv Owner Superuser Vv Vv Vv Superuser Vv r Gi Vv m E Vv r Vv r Taskforce Vv r D Taskforce Design Analyze Vv m Design Vv mj mi Analyze Design Vv r m Analyze Vv 5 mi Analyze Cancel 4a Figure 8 4 Permissions Dialog SILVACO 241 VWF User s Manual Security Related Dialogs Security Concepts in VWF Figure 8 5 presents the browser view with a couple of entries for the various users The right hand side depicts the ownership of the shown entities Figure 8 6 displays how the experiment window title changes to show that an experiment was opened read only VWF Explorer File Edit View Help ta Folders ae vwf_v6_upgraded examples Name Type lastwoifies owner Baseline Mon Mar 18 16 57 24 2013 tjet Directory Mon Mar 18 16 53 35 2013 boss Directory Mon Mar 18 16 53 41 2013 boss Experiment Mon Mar 18 16 57 29 2013 tjet Directory Mon Jan 7 11 32 26 2013 demo Directory Mon Jan 7 11
175. file must contain the same amount of split variables and variables need to have the exact same names as the ones that you defined in VWF Note You can first export the empty worksheet from VWF to get the structure of the CSV file You can then select the Edit gt Import Worksheet functionality as shown in Figure 5 41 Figure 5 42 displays the dialog to select a file for import tjIx2545 Silvaco COM doe_test Fragment Status R m Not Run 4 Queued a Running a m Failed 4 Missing Result 8 Finished Root 4 0 0 0 0 0 0 4 diffus temp diffus time implant dose Preparing Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc _ Figure 5 40 Tree of Experiment with only Split Variables Defined SILVACO 154 VWF User s Manual Importing Worksheet Data to Define a DOE Tutorial tjlx2545 Silvaco COM doe_test Import DOE l export datal tjet VwfData WORKSHEETS z C DFM_worksheet csv sens_wks csv B vt_doe csv Figure 5 42 Dialog to Select CSV File SILVACO 155 VWF User s Manual Importing Worksheet Data to Define a DOE Tutorial Before the import function can be completed a number of checks are performed and you are informed of possible errors such as a parameter mismatch Figure 5 43 depicts the error case where no split variables have been defined in your VWF experiment If this happens please OK the dialog and go back to the editor pane t
176. from build silvaco bin rather than from SILVACO bin and that version 10 0 11 R is executed instead of the default version or vwf_backup properties properties config This will take all options from the properties file instead of the commandline The first line of the output displays the version number of the utility After that a list of missing mandatory arguments is given The tool allows two ways of specifying the necessary arguments One is to use the command line the other is to store the info in a separate properties file The following vwf_backup arguments are mandatory host identifies the host of where the database server is running passwd identifies the system password of the database to backup db identifies the database This is necessary since there can be several databases hosted on a database server file is the output file which contains the zipped and tared contents of database and fileserver vwf_backup supports the following optional arguments Note srdb to use a different utility than the default srdb utility found in SILVACO bin flags to pass command line options down to the srdb utility e g to select a particular srdb version properties to specify a properties file which contains all of the mandatory and any of the optional arguments bd to specify a base directory other than the one which was configured at installation time If you are running VWF in default mode when you did n
177. g file each time you log on grid engine host you should insert settings file into the shell rc files 21 Source the settings files Check which shell you are using echo SHELL If the output is bash then add in etc bashre source var opt GRID default common settings sh csh tcsh then add in etc csh cshre source var opt GRID default common settings csh B 4 4 Install the Execution Host execd More details on Execution Host installation process can be found on pages 41 49 of the N1 Grid Engine 6 Installation Guide 1 Change the directory to the installation directory cd var opt GRID 2 Type the install_execd command This command starts the execution host installation procedure You will be asked several questions and you may be required to run some administrative actions The instructions will show the typical output you should expect to see during the setup install_execd Welcome to the Grid Engine execution host installation If you haven t installed the Grid Engine qmaster host yet you must execute this step with gt install_gqmaster lt prior the execution host installation For a successful installation you need a running Grid Engine qmaster It is also necessary that this host is an administrative host You can verify your current list of administrative hosts with the command qconf sh You can add an administrative host with the command qconf ah lt hostname gt The execution hos
178. g in preferences Copy to Clipboard Figure D 1 Login Problem SILVACO 302 VWF User s Manual Selecting a Different than the Default Version of a Simulator Recommended Practice D 5 Selecting a Different than the Default Version of a Simulator Sometimes you may want to use a different version of a simulator as would be run as default To select a different version please use the simflags argument to the go line in the simulation deck The following example demonstrates how version number 5 18 1 R of simulator Athena is used to run the deck In your deck change the go line to select a version number go athena simflags V 5 18 1 R Run the experiment When you look at the runtime output of the node information dialog opened by right clicking on a node you can see the version of the simulator that is being used This is illustrated by the screen shot in Figure D 2 Node Information Details Attached Data Name set tpoly Status Failed Path 1 thomasb vwf vwf_basedir vwf_v6_tpb vwfex01_10102 jobs 22774 Splits gt vwf deck ml in set tpoly tpoly 0 02 set tsige tsige 0 015 set gatelength gatelength 0 018 Runtime ATHENA Version athena 5 18 1 R Thu Mar 25 15 33 49 PDT 2010 Copyright 1984 2010 Silvaco Inc All rights reserved We acknowledge the contribution of the following collaborative partners Standard Output F Scroll to Bottom
179. g vwf_daemon on a Central VWF Server 0005 28 File TPS wisodeheicevdnitiniel Mine nAneeieh cept 116 Mode nsssssssssssssnrrsnnrrstnrrsnennrnnnnrrnnnnrnnnnr rnanera errean et 1 728 Fid TeX petrn R A En i 61 Te Backup secie a Y ae Firebird ANI reeset ener terete De Installing sisinio aaea 23 DBInt rmal crise enia Eei aE 212 304 ASE esceccessesseeseesesseessessessesseessessesseseesseseees 22 23 28 DOCK EGO tccini sisessecrevessstavsstusenstrsnnamteiavetanens 58 111 Starting Stopping ccccccscccssecseesecsssesseeeseesseesseeeeesens 23 DeckBuild vis ciestiecciedts Recast ineine 53 121 125 298 Differential Evolution DE ccceesceeeeeeeseeseeeeeeeeeneeteeeenaeeeaes 180 SILVACO 306 VWF User s Manual Index G Moving Directories 0 0 2 0 eee ee eeeeee tee eeeeeeeeeeeeeeeeeees 50 52 New Experiment eceseeceeseeeeceseeeeseeeeseeeeeseseeeeeeneeeeees 48 Galeway aii vienna i cidade 166 Using Fiers ect tesserae es cee te ce 37 Genetic Algorithm GA scavesiacescsccvtasedensarescceseecntecascnentevianteee 180 View MOnUt iss Atse ch ners trees Sateen eae ascents 43 QO SMANSPICE serne irena a aa 169 With Hidden Folders o c scssseecevevtnteasictaniiesaicaveiecee 37 Grap aana e eaa a A ERA 112 Modes Grid Engine neesseisseiseeieseiseeeseeeereseresreeereerresreeen 115 287 290 Database oiriivesiiivigeidl nnd dain 17 GU ccc a iai eee seine DAMAN n nanan eas a GUI Installer File ess eeeoes A E E
180. ght SILVACO Inc 4 Figure 3 6 Main Window hiding folders In case an experiment is highlighted the description of that experiment is displayed if available Figure 3 7 displays the main screen with experiment vwfex02 highlighted The description pane is only visible if an experiment is highlighted The contents of the pane are updated whenever you highlight a different experiment The description pane is available regardless of the tree view or any defined filters SILVACO 37 VWF User s Manual Main GUI components Using the VWF GUI VWF Explorer File Edit View Help f Folaers 2a afciecathostivwt_v7tpbiexampleswwiex2 o eG examples a th vwfexo1 Bij vwfexo2 Ci vwfexo3 C vwfex04 Cl vwfexos The objective is to extract 4 process parameters gate oxide time and temp as well as Vt adjust implant dose and energy in Cvwfexo6 order to get a targetted Vt of 0 65V In this experiment we defined a Box benken Doe in order to generate a quadratic model of Vt as a function of the 4 process variables in Spayn and then perform a synthesis analysis in Tonyplot by setting Vt to H O vwfexo7 0 65V Comparison with the optimization approach can be made see Athena_Atlas exampleunder the OPTIM directory Doe Cavwfexos Approach allowing quadradic model generation and use of tonyplot synthesis capability to extract process parameters for vwfex09 targetted VT of 0 65V Diff time 11Temp 941Dose 9 67e11Energy 7 55 CI vwfex10 vwfex11
181. gnDialog getMinValue i var d_max DesignDialog getMaxValue i After the computation is finished the computed parameter values need to be transferred into the GUI for var i 0 i lt axes_count i for var j 0 j lt intervals j var doeVal val xbest i J 3 1 incr DesignDialog setDOEValue j i doeVal 7 2 1 Running the Script You can run a previously loaded script directly by clicking gt in the Script pane This will automatically compile the script for you and run it immediately thereafter 7 2 2 Compiling the Script If you want to compile the script independently from running it e g when you are debugging a syntax error you can use the Check Code functionality To invoke this either press jm in the Script pane or press Ctrl K Note Some of the errors are undetectable this way and will only appear once the script is run SILVACO 232 VWF User s Manual Defining Custom DOE Strategies Scripting in VWF 7 2 3 Stopping a Running Script Sometimes your script can be caught in an endless loop or can take unexpectedly long to complete If this occurs you can interrupt a running script To do this press J in the Custom Design dialog 7 2 4 Loading a Shared Library Depending on what kind of script is being executed it may be necessary to use some functions from the C library and math library of the system This will be the case if you re writing any kin
182. he MANPATH accordingly Please refer to the documentation of the man command for further details SILVACO 270 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid B 4 Installation using the Traditional Method Below a description is given of how the grid engine system can be installed without the GUI installer The instructions below are valid for both the original Sun Grid Engine SGE 6 2u5 as well as the newer Open Grid Scheduler all versions B 4 1 Product Manuals These manuals are found in Section B 7 References in the docs directory to accompany the software It is recommended that you make yourself familiar with these manuals See the table below for the names of these manuals Manual Description install_guide817 6118 pdf Install guide This contains more information and explains the installation options in greater depth than this document install_guide817 6118 pdf Install guide This contains more information and explains the installation options in greater depth than this document users_guide817 6117 pdf Users Guide This explains how to run a job on the Grid Engine admin_guide817 5677 pdf Administrators guide This explains how to administer and maintain the system release_notes817 5678 pdf Additional release notes B 4 2 Initial Set Up 1 Log in to the machine as root 2 Create the directory
183. he script is identical to the script to run the filemode experiment The information you have to supply to the DatabaseExperimentManager object is as indicated in the comment above To get the experiment id you have to use the GUI and open the experiment The id is part of the base directory of an experiment and can be obtained as shown in Figure 7 1 The last part of the base directory contains the id In the shown screen shot the id is 10012 SILVACO 227 VWF User s Manual Scripting in VWF Run Experiments Outside the GUI Scripting in VWF bg lannach vwfex12 DOE File Edit Experiment Tools Help JGllz si ole Resources Deck Tree Worksheet Jobs SplitPlot Worksheet M ne Stopped experiment id Author demo tmp vwfi_basedir thomasb vwf_v5_up vwfex12 C0012 _ Wed Sep 19 16 06 58 2012 Last Change Tue Oct 2 12 07 53 2012 Description Figure 7 1 Obtaining the Experiment id for an Experiment 7 1 3 Running Several Experiments Sequentially in Batch Mode In the JavaScript mode of VWF you can essentially run any valid JavaScript code Particularly it is worth mentioning that you are not limited to running a single experiment at a time Instead you can setup a list of experiments which are executed one at a time Below an example script is given which executes experiments with ids 10001 10002 and 10004 one at a time in the order of appearance The following scrip
184. he worksheet pane and the SplitPlot worksheet pane This allows you to easily identify a particular node worksheet cell among the different views Figure 3 67 shows the tree view with 3 pins set tj x2545 Silvaco COM vwfex02 Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status m Not Run 4 Queued a Running u Aborted m Failed 4 Missing Result u Finished slgcoccook diffus time diffus temp implant dose 9 a implant energy i Finished 5 Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc Figure 3 67 Tree with three pins red yellow and blue Figure 3 68 shows how a pin is set in the tree pane You right click on a node for which you would like to set a pin and navigate to the Pin entry of the menu To remove a previously added pin right click on the node again and select Unpin from the menu Figure 3 69 shows how the pin can be activated Pin or deactivated Unpin from the worksheet Clear all pins will remove all previously defined pins Figure 3 70 SILVACO 91 VWF User s Manual Main GUI components Using the VWF GUI tjlx2545 Silvaco COM vwfex02 Figure 3 68 Setting a Pin in the Tree tj1x2545 Silvaco COM vwfex02 1 425e 12 4 75e 1 1 425e 9 5e 1 Arae 1 425e Figure 3 69 Setting
185. host vwf_v7 base_deck Exp01 Exp02 Exp03 mosl ocalhost vwf_v7_tpb ocalhost baseline_2012 annachn vwf_v6_upgraded ocalhost vwf oes MOSFET jexpos examples a mos_test1 O mos_test2 demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc _ Figure 3 21 Selected Directories for Move SILVACO 50 VWF User s Manual Main GUI components Using the VWF GUI To initiate the move operation press and hold down the left mouse button and drag the selection to the new location Once you release the mouse button over the new location the dialog shown in Figure 3 22 will open asking you to confirm the operation If you select OK then the move is started otherwise it is canceled Oo VWF Explorer a BX File Edit View Help earnen Ooa CCC lannach vwf_v6_test lannach vwf_v5_up GQ lannach_test vwf_test GQ localhost vwf_v6_upgraded Q localhost vwf_v7 GQ localhost vwf_v7_tpb GQ localhost baseline_2012 lannachn vwf_v6_upgraded localhost vwf mos_test1 5 localhost vwf localhost vwf mos_test2 Drop target i You are about to move directories Into localhost vwf MOSFET Cancel demo Free space 407 7 GB 45 VWF Copyright SILVACO Inc _ Figure 3 22 Dialog to Confirm Move Operation SILVACO 51 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 23 shows how the directory tree has changed after the move oper
186. icking Next will bring you to the SSL configuration screen as shown in Figure B 7 Again you don t need to change anything on this screen SILVACO 265 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid bd Grid Engine 2011 11p1 Installer SSL certificate configuration GRID ENGINE Heip Country code State Location Organization Organization unit Email address DE GERMANY Building Organisation Organisation_unit hame yourdomain com Previous Oc Figure B 7 OGS Installation SSL Certificate Clicking next will bring you to the host selection screen shown in Figure B 8 This screen allows you to add more hosts to be installed Here we are going to install OGS on a single host only We want to install both qmaster and execution host Please make sure that the option reading Exec is checked as shown in the screen shot SILVACO 266 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid Sd Grid Engine 2011 11p1 Installer F Select hosts GRID ENGINE Hostname or IP lt Enter a hostname or IP adress here gt From file Browse All hosts 1 Reachable hosts 1
187. igure 3 77 Send Worksheet To SPAYN dialog SILVACO 99 VWF User s Manual Main GUI components Using the VWF GUI Sia a5 Fal BI PE Ss ra z ral ro ho EE T2 E ha ns he ra ne ho 20 FE gt Olle 9 5e 11 a e ee e a 1 100e 01 2 1 100e 01 3 1 100e 01 9 250e 02 9 250e 02 9 250e 02 9 500e 11 9 500e 11 4 750e 11 1 000e 01 7 500e 00 5 000e 00 a4 1 100e 01 9 250e 02 4 750e 11 1 000e 01 S 1 100e 01 6 1 100e 01 9 250e 02 9 250e 02 1 425e 12 1 425e 12 5 000e 00 1 000e 01 1 000e 28 zZ 1 100e 01 87 1 100e 01 o 1 100e 01 8 500e 02 8 500e 02 8 500e 02 4 750e 11 1 425e 12 9 500e 11 7 500e 00 7 500e 00 5 000e 00 1 000e 28 1 100e 01 8 500e 02 1 000e 03 9 500e 11 4 750e 11 1 000e 01 7 500e 00 Figure 3 78 Worksheet Data Viewed in SPAYN SILVACO 100 VWF User s Manual SILVACO Chapter 4 Customizing VWF Preferences Panel Customizing VWF Preferences Panel VWF offers a wide range of customizable options They are all found in the Preferences panel When VWF is started you can open the preferences panel by selecting Edit Preferences from the explorer window Figure 4 1 shows the settings for the Toolbars Clicking on Customize will open another window where you can change various settings related to the toolbars used in VWF v Preferences EER
188. igure 5 61 Adding splits for the VDD parameter SILVACO 172 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial v itest2525a xml DOE F X File Edit Experiment Tools Help lez B 2 Ole Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status R m Not Run 3 Queued 0 o Running 0 Aborted 0 a Failed 0 Roat a Missing Result 0 Root Finished i 3 PARAM capval PARAM tempval _ _ PARAM VDD Finished vwe 2 12 5 R Copyright 1984 2014 Silvaco Inc Figure 5 62 Split tree after VDD split definition vE EER Additive Multiplicative C Percent List 40 h2 25 120 Add Replace Remove Move Up Move Down Figure 5 63 Adding splits for the tempval parameter SILVACO 173 VWF User s Manual Running SPICE Simulations for 27 Conditions and Review the Results Using VWF Tutorial v test2525a xml DOE a A x File Edit Experiment Tools Help lez 2 Ole Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status R Not Run 9 Queued 0 Running 0 Aborted 0 m Failed 0 Missing Result 0 Finished 0 9 PARAM capval PARAM tempval PARAM VDD Finished vwe 2 12 5 R Copyright 1984
189. iidccetcd tatvewadaeddteedederdnicedeeerduunedeneiwesdaeaees 32 3 2 1 Creating the vwf_examples Database 0c cece cece eee eee aes 32 3 2 2 Loading Examples into an Existing Database ccsccbsseedieesbsbisoekbveceteedeweedsacns 32 3 2 3 Opening Examples in filemode 0 c ccc cette eee eens 32 3 3 Main GUI COMpPONEMS fic 5i6 cd ciccccdcateene ease tddew cede c se nT ET EEEE Eaa EG 33 3 3 1 Main WiNdOW x0 csicde wivedees ip tesa ioti piu E beers ean E E exer besaeyes 33 3 3 2 Creating a New Experiment scrrcerraccwedshuveivengernsdoueesankhs ncareciameesarees 53 Joo EXPenmMmeNt Ed oriri esii esip EDE EEE EEE AAEE RE EE EEA ETER ERE DRES 56 3 3 4 Formatting Cells in the Worksheet 22 sc2cetuncis tive coddneed ener devdeweiebediiebseveees 72 3 3 5 Defining Splits nunne 76 Chapter 4 Customizing VWF Preferences Panel 0cceeeeeeeeeeeeeeeeeeeenees 101 SILVACO 4 VWF User s Manual Table of Contents Chapter 5 Ct ii err tr ee er errr ee ere rer ree Te ee 119 5 1 Prerequisites iia inden deren tees ee ewe wae a E Aaa EE ee hea mae ee AR RA Ea 120 5 2 Typical VWF TOGhal Mein dcnwnndswndcne dn wnad nad EE EE EEEE Shamed ERANA 121 5 3 Starting the VWF Software i622 csscsiaeeids det ene ke cam neeteneeeeles eeentedaawebeetane es 122 5 4 Defining a NEW EXxpeniMGnt ociccnwiwesisndineenndd canes ended neies nea E eee 123 5 5 Running an Experiment iiccs cece cence eden cede eee eee eee Ae mee 141 5 6 Exporting Da
190. ild silvaco lib firebird 1 5 2 R x86_64 linux build grid lsf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build silvaco lib support 1386 linux Use CONNECT or CREATE DATABASE to specify a database KEY_OUT ERR_OUT 6071 lt null gt SILVACO 26 VWF User s Manual VWF Modes Installation Database vwf created as build silvaco var srdb vwf fdb on server lannachn SRDB lannachn gt This will create a VWF database named vwf The output should be similar to the one shown above Now connect to the new database as follows SRDB lannachn gt connect vwf SRDB lannachn vwf gt The prompt will change again to indicate the connection to the database was successful Finally create a user in the new database The command below will create a user called thomasb with a password called thomasb Note that the password is the second argument to the create user command SRDB lannachn vwf gt create user thomasb thomasb User thomasb created successfully SRDB lannachn vwf gt To print the list of active users on this database you can use the following command SRDB lannachn vwf gt list users User Name admin Status NORMAL Groups User Name superuser Status SUPERUSER Groups User Name thomasb Status NORMAL Groups SRDB lannachn vwf gt Here three users are displayed The first entry admin was created when the VWF database was created using th
191. ilter at the left bottom of the SplitPlot Worksheet to reduce the number of displayed files before starting with your selection For instance you can decide to hide all str files but show all dat files Figure 3 73 shows the dialog which opens upon clicking on the Define Filter button Choose type of files x Figure 3 73 SplitPlot Filter SILVACO 95 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 74 shows the remaining entries after str and 1og files have been selected and the filter dialog has been closed using OK tjIx2545 Silvaco COM vwfex02 ele sl r ale 4 75e 11 1 425e 12 7 5 a3 moslex01_0 str_ 4 21 moslex01_0 str_ 4 22 moslex01_0 str_ 4 23 moslex01_1 log_ 4 21 moslex01_1 log_ 4 22 moslex01_1 log_ 4 23 moslex01_1 str_ 4 21 moslex01_1l str_ 4 22 moslex01_1 str_ 4 23 moslex01_1 str Figure 3 74 Filtered Entries of SplitPlot Worksheet SILVACO 96 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 75 shows two selected files and the menu which opens upon right clicking tjIx2545 Silvaco COM vwfex02 4 75e 11 1 425e 12 9 5e 11 9 5e 11 75 7 5 7 5 7 5 moslex01_1 log_ 4 21 m oslex01_1 str_ Jnpin Figure 3 75 SplitPlot Worksheet with Selected Files SILVACO 97 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 76 shows the started TonyPlot Window with the two selecte
192. imizer Target and Settings Optimization in VWF iv Target Values Sx Look in 3 export datal thomasb Clear src Gai src b_2_6 src b_2_8 sync temp a download tmp experiments jut4 GI mos1 Gj VP 0032 vVP1 Ca plugins G vwf docs Ga scratch vwf_examples Ca sge build workspace C shadow_main KEKEE TINSKEN GI Some G sql File name ftarget_values dat File type Dat file dat x Cancel Remove Edit Load Export PBELELEI Figure 6 27 Vector Target Value Definition SILVACO 209 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF v Leas Clear Remove Edit Load rREELERUEE Figure 6 28 Loaded or Entered Vector Target Values SILVACO 210 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF kg lannach solar_opt_Im Optimization Levenberg Marquardt 10062 File Edit Experiment Tools Help laj oe Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Optimizer Levenberg Marquardt x Optimizer Settings Repeat Count fo 4 Targets Select the target to optimize Enabled Target value o v Preparing le Free space 521 1 MB VWF Copyright SILVACO Inc Figure 6 29 Defined Vector Target Values SILVACO 211 VWF User s Manual Defining Optimizer Target and Settings 6
193. imulation jobs Figure 3 58 Upon clicking OK all jobs will be added to the queue Selecting Experiment Stop will terminate a running experiment It is not available grayed if the experiment is not running All jobs which are currently queued are removed from the queue and their state is set to aborted Additionally all jobs that are currently running are terminated with a state of aborted Selecting Experiment gt Clear All Results will remove all results of this experiment Results consist of data in the worksheet and result files which were created during a simulation run If you only want to remove the simulation result files e g to save on disk space but want to keep the worksheet data you can select Experiment gt Clear Result Files Both entries are only available if the experiment is not currently running SILVACO 81 VWF User s Manual Main GUI components Using the VWF GUI tjx2545 Silvaco COM vwfex02 Remove All Overndes Figure 3 56 Start Experiment Menu Entry Run Experiment OK __cancel_ Figure 3 58 Prompt to add all jobs SILVACO 82 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 59 shows the menu entry to add only some of the available jobs to the queue Jobs to add must be selected using the mouse The selected jobs are surrounded by red rectangles If jobs are added using this menu entry the experiment must be started Experiment Start in a separate st
194. in 2 385e 07 1 124e 01 2 021e 03 f 2 196e 07 A 1 035e 01 2 021e 03 4 2 186e 07 1 030e 01 6 255e 07 i 3 005e 01 2 6 1 5 874e 02 2 963e 01 6 505e 02 6 122e 07 5 831e 02 2 941e 01 6 773e 02 6 147e 07 5 854e 02 2 974e 01 7 000e 02 6 410e 07 6 105e 02 3 101e 01 6 908e 02 6 352e 07 6 050e 02 3 073e 01 7 261e 07 2 269e 02 3 619e 07 2 262e 02 1 118e 01 5 972e 07 1 866e 02 3 234e 07 2 022e 02 9 989e 02 5 943e 07 1 857e 02 3 227e 07 2 017e 02 9 966e 02 2 381e 08 7 441e 02 9 955e 07 6 222e 02 3 137e 01 1 984e 10 a 2 125e 08 6 641e 02 9 328e 07 5 830e 02 2 939e 01 1 984e 10 2 110e 08 6 592e 02 9 306e 07 5 816e 02 2 932e 01 1 970e 10 2 574e 08 8 044e 02 1 027e 06 6 421e 02 3 260e 01 1 970e 10 f 2 443e 08 7 635e 02 1 010e 06 6 314e 02 3 205e 01 1 970e 10 2 421e 08 7 567e 02 1 008e 06 6 300e 02 3 198e 01 cted Branch es E RRRERRRRERERRRRRRR ENNEN Figure 3 42 Initiating Row Removal via Context Menu SILVACO 70 VWF User s Manual Main GUI components Using the VWF GUI bore aie eee ep eee 1 800e 02 1 50 2 2 1 985e 10 1 985e 03 1 143e 08 6 352e 02 5 189 5 766e 02 2 905e 01 2 021e 10 2 021e 03 2 330e 07 2 330e 02 1 136607 1 124e 01 2 021e 10 2 021e 03 2 263e 07 2 263e 02 1 105e 07 i 1 094e 01 2 021e 10 2 021e 03 2 249e 07 2 249e 02 1 099e 07 1 088e 01 1 982e 10 1 982e 03 5 647e 07 5 647e 02 2 671e 07
195. indow will open and all files will be loaded into it or one TonyPlot window will open for every file you selected The name of the file will be used as the title in the TonyPlot display so that you can easily relate a given plot to the cell in the SplitPlot Worksheet and the parameter combination which has lead to the creation of that file SILVACO 94 VWF User s Manual Main GUI components Using the VWF GUI t Ix2545 Silvaco COM vwfex02 1000 deck ml in_ 2 21 a lib_ 2 21 ref dat_ 2 21 y eeutstinal eal 4 75e 11 9 5e 11 9 5e 11 7 5 95 7 5 deck ml in_ 2 22 deck ml in_ 2 23 a lib_ 2 22 a lib_ 2 23 ref dat_ 2 22 ref dat_ 2 23 results final_ 2 22 results final_ 2 23 9 5e 11 10 deck ml in_ 4 21 extract dat_ 4 21 deck ml in_ 4 22 deck ml in_ 4 23 a lib_ 4 21 a lib_ 4 22 a lib_ 4 23 ref dat_ 4 21 ref dat_ 4 22 ref dat_ 4 23 results final_ 4 21 results final_ 4 22 results final_ 4 23 extract dat_ 4 22 extract dat_ 4 23 deck ml in_ 4 2 a lib_ 4 24 ref dat_ 4 24 results final_ 4 2 extract dat_ 4 2 moslex01_0 str_ 4 21 mos lex01_0 str_ 4 22 moslex01_0 str_ 4 23 moslex01_0 str moslex01_1 log_ 4 22 moslex01_1 log_ 4 23 moslex01_l str_ 4 21 moslex01_1 str_ 4 22 moslex01_1 str_ 4 23 Figure 3 72 Populated moslex01_1 lo moslex01_1 str SplitPlot Worksheet For large sets of result files you can use the f
196. ing as follows about the base directory having changed Changing experiment base directories of imported DB from build silvaco var vwf_base vwf_examples to site alpha var vwf_base vwf_examples The warning indicates that the base directory at the time the file was created is different from the base directory on your site You can safely ignore this warning here The file vwf_examples tgz can be found in the examples section of your vwf install tree Depending on where you installed vwf this is typically found at obuild silvaco examples vwf lt version gt vwf_examples tgz Please note that this method of loading examples will only succeed on the machine where the vwf_daemon was installed If you re not using the vw _daemon use the following method 3 2 2 Loading Examples into an Existing Database You must use the Load Examples menu entry of the Help menu found in the VWF Explorer window Please note that this will create a directory called examples in your database In case this directory already exists you must first remove or rename it or you will get an error message 3 2 3 Opening Examples in filemode When you re using filemode you can choose to directly open an example from the main dialog that opens after you started VWF using the filemode option See Figure 5 53 SILVACO 32 VWF User s Manual Main GUI components Using the VWF GUI 3 3 Main GUI components VWE is comprised of the following three main compon
197. inguish queued from dequeued jobs queued jobs are drawn in orange You can see that although not explicitly selected the top level node is also drawn in orange This is necessary since no results are available for the top level node at this time The node was auto selected Note When you later rerun a sub tree of an experiment the results of any upper level node will always be re used and simulations will always start at the lowest possible level tjlx2545 Silvaco COM tutorial_01 Fragment Status m Not Run 4 Queued a Running 4 Aborted m Failed J Missing Result u Finished 3 3 0 ie 0 0 0 6 implant dose implant energy i Preparing Free space 13 5 GB VWF Copyright 1984 2011 SILVACO Inc 4 Figure 5 28 Experiment with Queued Branch When you select the start menu entry all selected jobs are entered into the job farming system This system then decides when and how many jobs are started at any given time Figure 5 29 displays the situation by selecting Experiment Start A total of 3 job entries are shown One job has already been finished two jobs are just running The IDs displayed were assigned by the underlying job farming system and don t necessarily start at 1 When the experiment has unsaved changes you are prompted to save them before the experiment is actually started If you did not add jobs by selecting Experiment gt Queue then you are prompted to add all jobs of the tre
198. is an example on how to set options maxJobs and maxLoad of the local queuing system to 3 and 4 respectively var opts maxJobs 4 maxLoad 3 l var myGrid new Drmaa local myGrid setSessionArgs opts 7 1 6 Example JavaScript Files Example scripts have been shipped with this version of VWF You will find them in the installation directory of VWF They are installed in vwf lt version gt x86_64 linux js The following scripts are shipped run_experiment js run_several_experiments js FF2L js lhd js The scripts called run_experiment js and run_several_experiments js are copies of the examples described above The scripts FF2L js and lhd js are examples for defining custom DOEs as described in Section 7 2 Defining Custom DOE Strategies SILVACO 230 VWF User s Manual Defining Custom DOE Strategies Scripting in VWF 7 2 Defining Custom DOE Strategies This feature allows you to extend the built in DOE design strategies by allowing to run a custom script to compute the sampling strategy A new design dialog is available to select which parameters are to be used in the DOE as well as the script to run Figures 3 54 and 3 55 depict the new dialogs To run the script press gt after the script was loaded VWF provides an example DOE strategy implementing an Orthogonal Maximin Latin Hypercube Design The script is a JavaScript implementation of the algorithm described in Orthogonal
199. itions D 4 3 Extended Job Status Information The Node Information dialog does not only show simulation result files runtime output and error information but will also allow you to look at details like the environment variables that were set during the simulation run or what job limits were applied to the job You will find this information in the sub directory called vwf shown in the Node Information dialog You can change into this directory by a simple double click and then access the shown files from there D 4 4 Grid engine LSF Jobs Failing For the case where an experiment runs fine when the built in queue Simple Queue is used but fails as soon you are using LSF or grid engine so please check the environment variables of your jobs You must supply options to your cluster system to source the shell startup files cshrce or bash_profile since these files may contain important changes to your PATH variable For the grid engine system this option is called she11 and the argument must be set to yes For LSF the respective option is called L and its value must be set to either bin csh or bin bash depending on what shell you want to use SILVACO 300 VWF User s Manual Dealing with Error Scenarios Recommended Practice D 4 5 VWF Background Process not Starting In rare situations the VWF background process which handles execution of simulation jobs may not start This is shown by a dialog saying Starting of
200. ization strategy The SA method mimics the formation of an actual physical solid from a liquid as the liquid cools At high temperature the liquid is highly disordered its components are free to move and its energy is high As the temperature is lowered so the energy of the system falls If the cooling process is slow enough an ordered solid such as a crystal of the lowest possible energy will form e Parallel Tempering PT Global optimization strategy PT is related to SA but instead of mimicking the gradual cooling process of a single physical system it consists of an ensemble of systems at different and fixed temperatures The elements of this ensemble are called replicas Each replica carries its own copy of the optimization parameters The values in different replicas will diverge as the optimization proceeds e Genetic Algorithm GA Global optimization strategy GA is an evolutionary algorithm that is it uses techniques inspired by evolutionary biology GA works with a population of candidate solutions to the optimization problem At each step it generates a new population from the old The idea is that the cost function plays the role of the evolutionary pressures found in nature and causes the evolution of a population that gives better values of the cost function e Differential Evolution DE Global optimization strategy DE is an evolutionary algorithm that is it uses techniques inspired by evolutionary biology Th
201. ize 2 SpecifyMaskPoly maskID 1 p1 pos 5 p2 pos 5 p3 pos 5 p4 pos 5 GeometryDepo maskID 1 material resist thickness 2 0 invert Save name etch_init Export name etch_init Load name etch_init Export name etch_init Module_Begin IECE E_LEFF NEU_LRATE NEU_RATIO NEU_STICKING ION_RATE ION_CONC ION_FOCUS ION_E_TH Stopped VWF Copyright SILVACO Inc Figure 6 30 Victory Process deck to calibrate Select the parameters to vary Identify which parameters are used by the optimizers and which you want to use to define a DOE tree Figure 6 31 depicts the parameters pane with 3 parameters selected The column named DOE is used to distinguish DOE parameters checked from optimization parameters unchecked The shown setup will tune the parameters named set NEU_RATE and set NEU_RATIO using the optimizer whereas the parameter named set size is used to define target values Target values will be entered in the worksheet pane see below Finally you can define lower and upper bounds for each parameter as well as the initial value initial guess that is used by the optimizer SILVACO 216 VWF User s Manual Optimization Example Advanced Calibration Task Optimization in VWF bd export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help E gt ojl e Description Resources Deck
202. l spayn z Tools General IV Use default path Installation site alpha Browse DeckBuild Version Default f Expert SmartView Tonyplot Tonyplot 3D MaskViews Deck Editor Graph Script Editor Execution Host Grid Registered Filetypes p Sipe sa Optimizer IV Save these settings on exit Cancel Apply Figure 4 3 Preferences Tools SILVACO 104 VWF User s Manual Customizing VWF Preferences Panel Figure 4 4 displays the properties for experiments At the top group of settings you can select how the SmartView visualization tool is being started In Sipe mode default only a single instance of SmartView is started and several files will be displayed in this single instance When Classical is selected then one SmartView instance is started per file Preferences Manage Preferences Application iSmartView iment M Figure 4 4 Preferences Experiment Properties SILVACO 105 VWF User s Manual Customizing VWF Preferences Panel The second group of settings allows you to enable and configure a coloring scheme When enabled all windows belonging to an experiment are grouped by adding a small frame around the window Figure 4 5 depicts an example how an open experiment is framed using a green color fy tjlx2545 Silvaco COM vwfex02 x File Edit Experiment Tools Help Mee Description Resources Deck Tree Work
203. le SUN Grid Engine Open Grid B 3 Manuals This version of OGS contains a full set of manual pages for the grid engine components When you untarred the OGS files the manual were put into the following location build grid ogs man A man page can be opened by using the man command and supplying the man page on the command line for example to open the qsub man page you can type man build grid ogs man manl qsub 1 which will open the man page as follows SUBMIT 1 SUBMIT 1 NAME qsub submit qsh submit qlogin submit qrsh submit gqalter modify qresub submit SYNTAX qsub options qsh options qlogin options qrsh options gqalter options galter options qresub options DESCRIPTION Qsub submits batch jobs to the Grid Grid Engine User Commands a batch job to Grid Engine an interactive X windows session to Grid Engine an interactive login session to Grid Engine an interactive rsh session to Grid Engine a pending or running batch job of Grid Engine a copy of an existing Grid Engine job xterm args command command_args wc_job_range_list u user_list uall Job id list supports single and multiple node jobs Command command command_args command_args command_args Engine queuing system Grid Engine can be a Alternatively you can configure t
204. ls A modern scripting language is offered to implement your own design model 1 2 3 Experimental Design The amount of simulations required to cover all possible variations in input values is immense Modern experimental designs are used to generate combinations of Input Parameters that help maximize the amount of information obtained from a given number of simulations VWE generates Split Lot Parameter Values for many of the commonly used experimental design models including Full and Partial Factorial Box Behnken Composite and Latin Hypercube 1 2 4 Optimization VWF allows you to carry out experiments where a chosen optimization algorithm is used to vary split parameters so that a defined target is minimized This allows you to use VWF for automated calibration tasks and to optimize process parameters in a process simulation Supported optimization algorithms are Levenberg Marquardt Genetic Algorithm and Simulated Annealing to name a few 1 2 5 Network Execution A queuing and scheduling system automatically submits simulations for execution on remote machines if they are available This permits the computing load to be spread across any number of machines on a network The software supports standardized modern grid computing facilities like Open Grid Scheduler OGS or Load Sharing Facility LSF SILVACO 10 VWF User s Manual Features Introduction 1 2 6 Security Features VWE supports advanced security features For s
205. ly secure the system the server processes are run under a certain UNIX user id called vwf_user The vwf_user will normally be different from your UNIX account and pemissions of the vwf_user will not normally allow you to directly access any data on the harddisk Instead the VWF GUI decides which VWF user can access what data SILVACO 239 VWF User s Manual Security Related Dialogs Security Concepts in VWF 8 2 Security Related Dialogs In the following all security related dialogs and menu entries are shown Examples of how a particular security setting will look in the browser window will be shown Figure 8 1 displays the menu entry which will open the Superusers dialog shown in Figure 8 2 The Superusers dialog allows you to nominate denominate any of the database users as a superuser The check box at the right hand side of the dialog displays which users are superusers Only a superuser is allowed to change this flag VWF Explorer File Edit View Help Ie Copy Ctrl C localhost vwf_v6_upgraded fi Paste Ctrl V Select all Invert Selection a a a a a a a 3 210 32121 3 21212 3 21213 321214 32122 32123 32124 32125 32126 32129 Qa a a a a a a a 2213222 323232413244 3261 3262 3263 3271 3273 3275 3281 a a a _3_ 4 bulletin examples gauss imp_ws _ E Preferences 3 i amp Permissions 3 examples C vwfex01 Ci vwfex02 C vwfex03 O vwfex04 CI vwfex05 CI vwfex06
206. mation Dialog The displayed node information consists of several parts The Details pane depicts values of parameters as they are used in the underlying simulation The Attached Data pane contains a list of all files which were created during the simulation By double clicking one of the files the associated application will open The Runtime pane displays runtime standard output and standard error of the simulation This will only contain text if the simulation has already been started or finished When the Scroll to bottom box at the bottom right corner is activated the pane will scroll down to the bottom as new data arrives SILVACO 145 VWF User s Manual Running an Experiment Tutorial The Worksheet view changes during simulation The extracted values appear when jobs are finished Once the whole experiment is finished entries for all but simulations which have not been run or did not produce any results are available as shown Figure 5 31 tjlx2545 Silvaco COM tutorial_01 implant dose implant energy gateox_ nxj n sheet tho Idd sheet tho chan surf conc sheet cond v bias _ n1dvt nvt m so os a a E ee 5 100 163 7442 29 0919 2087 09 4 98391e 16 450844 6161 lt a EF 163 a 29 095 2130 36 1 94176e 16 0 4369 3708 ee hH fai fa a a Figure 5 31 Generated Responses SILVACO 146 VWF User s Manual Running an Experiment Tutorial Right clicking on a finished node in the tree and
207. ment Editor Please refer to Figure 6 3 for the optimization experiment type This window appears whenever you create a new experiment or open an existing one The editor is used to collect all data necessary to execute an experiment The window is composed of several tabs These are Description Resources Deck Tree Worksheet Jobs and SplitPlot Worksheet To open a particular tab click on the according label Figure 3 27 shows the Description tab open It displays the name of the opened experiment vwfex02 The shown example is one of the prepared simulation examples that are shipped with VWF which is also available from the Silvaco website iv tj x2545 Silvaco COM vwfex02 File Edit Experiment Tools Help a2 2 5 ole Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Type DOE vwf_user tmp vwt_basedir tjet vwt vwfex02_10013 Creation Date Wed Dec 14 17 08 33 2011 Last Change Wed Dec 14 17 10 23 2011 Description The objective is to extract 4 process parameters gate oxide time and temp as well as Vt adjust implant dose and energy in order to get a targetted Vt of 0 65V In this experiment we defined a Box benken Doe in order to generate a quadratic model of Vt as a function of the 4 process variables in Spayn and then perform a synthesis analysis in Tonyplot by setting Vt to 0 65V Comparison with the optimization approach can be made see Athena_Atlas example under the OPTIM directory
208. mkdir var opt GRID 3 Locate the software see Section B 7 References Copy over the required tar files to var opt GRID and extract files unzip sge62ul_linux24 1586_targz zip tar xzvpf sge 6_2ul bin linux24 i586 tar gz 5 Set up the TCP IP services for the grid engine software Add the correct ports to the etc services file or your NIS services map The following example shows how you can append your etc services file Sun Grid Engine sge_qmaster 536 tcp sge_execd 537 tcp 6 Set the SGE_ROOT environment variable as follows SGE_ROOT var opt GRID export SGE_ROOT SILVACO 271 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid B 4 3 Install the Master Host qmaster More details on the Master Host installation process can be found on pages 28 40 of the N1 Grid Engine 6 Installation Guide 1 Change directory to the installation directory cd var opt GRID Type the install_qmaster command This command starts the master host installation procedure You will be asked several questions and you may be required to run some administrative actions The instructions will show the typical output you should expect to see during the setup install_qmaster Welcome to the Grid Engine installation Grid Engine qmaster host installation Before you continue with the installation please read these hints Your termi
209. n An LSF Cluster Obtaining and Installing LSF Queuing VWF On An LSF Cluster C 1 Obtaining and Installing LSF VWF uses the Distributed Resource Management Application API DRMAA to run simulation jobs This allows you to choose among one of several supported queuing systems Apart from the Open Grid Scheduler this version of VWF supports the Load Sharing Facility LSF LSF can be obtained from IBM Platform Computing Please refer to the installation instructions on how to install LSF on your cluster C 2 Selecting LSF to be Used VWE allows to select which queuing system to be used The selection is done by setting an environment variable in the shell which is used to run VWF The variable that must be set is called S_GRID S_GRID has the following meaning e If unset or set to sge without quotes then either the VWF internal local queuing system is used or the Open Grid Scheduler OGS is used Please note however that OGS can only be used if a version of OGS was found on your system If OGS is not found then the VWF internal local queuing system must be used This system is limited to running simulation jobs on the same workstation that is also executing the VWF GUI To select the local system please start vwf open the Preferences panel and navigate to the Grid section Change the profile from drmaa to local e The variable is set to a value of 1sf without quotes VWF tries to use the Load Sharing Facility for
210. n line statements in Athena Recommended Practice D 2 2 Good Case for VWF set length 0 1 extract name Ion y val from curve v gate i drain where x val 3 0 Above deck can safely be run in VWF A column called Ion will be created in the worksheet and one row per length will be created when the experiment is run The outfile parameter of the extract command is not necessary here If omitted it defaults to results final for scalar values and extract dat for curves It is worth mentioning that while you can have several scalar values in one file results final you still need to put every curve in a different file D 3 Splitting on line statements in Athena To split on an Athena line statement you need to introduce set statements and then define the splits on the set statements Below an example deck which illustrates that go athena set midpoint 5 set edge 2 5 set left_edge Smidpoint Sedge set right_edge Smidpoint Sedge set offset 0 1 set mo_thick 0 05 set igzo_thick 0 03 set al203_thick 0 05 set al_thick 0 1 line x loc 0 00 spac 0 5 line x loc Sleft_edge spac 0 01 line x loc 5 0 spac 0 1 line x loc Sright_edge spac 0 01 line x loc 10 0 spac 0 5 line y loc 0 00 spac 0 1 line y loc 0 5 spac 0 1 In above example you can define splits on variables introduced by the corresponding set statement left_edge or right_edge but not on any of the line xor line y statements SILV
211. n will be added Upon clicking on the a sub tree will open and present the view as shown in Figure 3 65 Note that the breadcrumbs view also changes to contain the path to the selected node tj1x2545 Silvaco COM vwfex02 Kall node job fed nodes job Locate in browser Unpin Figure 3 65 Locate in VWF Browser SILVACO 89 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 66 depicts the context sensitive menu which opens at right clicking an experiment in the left pane of the browser window You can choose to expand all nodes in the view or to collapse all nodes This can be useful for large experiments with many nodes fe VWF Explorer oxX File Edit View Help T Folders aE CJlocalhost vwf examples vwfex02 vwfex02 localhost baseline_2012 lannachn vwf_v6_upgraded 2 localhost vwf amp amp amp time 11 time 5 5 time 16 5 examples vwfexo1 Collapse All Permissions implant energy 7 5 implant dose 4 75e 11 implant energy 5 implant energy 10 mplant dose 1 425e 12 implant energy 5 implant energy 10 M diffu tamn OeEn z Idemo Free space 407 7 GB l VWF Copyright SILVACO Inc 4 Figure 3 66 Expand and Collapse Experiment SILVACO 90 VWF User s Manual Main GUI components Using the VWF GUI VWE allows you to set so called pins which show up in the tree pane t
212. n with a precision of 5 significant digits can be chosen Figures 4 7 and 4 8 display an example worksheet illustrating the difference between automatic and scientific notation Preferences Optimizer Figure 4 6 Worksheet Columns Scientific Notation Selected SILVACO 107 VWF User s Manual Customizing VWF Preferences Panel tjlx2545 Silvaco COM vwfex01 DOE 10007 J gt oj E eee 19845700000 1984 57 114331000 635 172 5 18903e 07 576 559 0 290521 20212800000 2021 28 23296800 232 968 1 13574e 07 227 148 0 112378 20212800000 2021 28 22632700 226 327 1 10514e 07 221 028 0 109351 20212800000 2021 28 22487900 224 879 1 09917e 07 219 834 0 10876 19823200000 1982 32 56465200 564 652 2 67099e 07 534 198 0 269481 19823200000 1982 32 59008200 590 082 2 79994e 07 559 988 0 282491 19823200000 1982 32 58472100 584 721 2 77794e 07 555 588 0 280272 19687000000 1968 7 51939400 519 394 2 45547e 07 491 094 0 249451 19687000000 1968 7 56904000 569 04 2 70286e 07 540 572 0 274583 19687000000 1968 7 56279400 562 794 2 6773e 07 535 46 0 271987 20207800000 2020 78 48400400 230 478 2 38453e 07 227 098 0 112381 20207800000 2020 78 43407600 206 703 2 19648e 07 209 189 0 103519 20207800000 2020 78 43087400 205 178 2 18624e 07 208 213 0 103036 19823500000 1982 35 141734000 674 924 6 25501e 07 595 715 0 300509 19823500000 1982 35 138088000 657 562 6 16765e 07 587 395 0 296312 19823500000 1982
213. naee 187 6 6 1 Target Script Editor eect cectascstnreictneetiaeehenthe aon seca loner ede antie awuletucebecaigin 189 6 6 2 Optimizer Convergence 2154 enctelee hacks dee idee beer heehee ee beeehes tee ee 197 6 6 3 Defining Optimizer Settings 00 c eect teen nents 198 6 6 4 Defining Scalar Targets s 24 5 iveeeietaee teen eas ev ceive seek eden eeewded Peed eked easebess 199 6 6 5 Defining Vector Targets 22 evaclevers cdseeeedersesev enisedseeeawectetassetcesecelaxres 207 6 6 6 Target Definition Language x yiscversceciguevegecsovevstovesse iesee Ulates Seeks oekeass 212 66 7 Optimizer Rei CodeS 2 cnvdt ee eeeh ere cioniies EEEN EAEE AE EEr AATE PERAE ace 213 6 7 Optimization Example Advanced Calibration Task 00ccee eee eee e nee 215 6 8 FGTSROM CSS async nla oe asain sacs re ea in wn da ewe ea a men de mn eR 222 Chapter 7 Scripting INV WE is ccctevarewatekces ak woe core de eee care veaweeeeus nese cs 223 7 1 Run Experiments Outside the GUI 00 cece ee eee cece e eee eee eeeeeeeeeeeeaee 225 7 1 1 Running a Filemode Experiment in Batch Mode 0 cece eee eee tenes 225 7 1 2 Running a Database Experiment in Batch Mode 2 cece eee eee eens 227 7 1 3 Running Several Experiments Sequentially in Batch Mode 0 0 c cece eee eee eee 228 7 1 4 Using a Grid Environment in Batch Mode 00 c cece eee e eee ees 229 7 1 5 Passing Options to the Queuing System 0 cece eee eee eee ees 23
214. nal window should have a size of at least 80x24 characters The INTR character is often bound to the key Ctrl C The term gt ctr1 c lt is used during the installation if you have the possibility to abort the installation The qmaster installation procedure will take approximately 5 10 minutes Hit lt RETURN gt to continue gt gt Choose an administrative account owner Choosing Grid Engine admin user account You may install Grid Engine that all files are created with the user id of an unprivileged user This will make it possible to install and run Grid Engine in directories where user gt root lt has no permissions to create and write files and directories e Grid Engine still has to be started by the user gt root lt e This directory should be owned by the Grid Engine administrator Do you want to install Grid Engine under a user id other than gt root lt y n y gt gt n Installing Grid Engine as user gt root lt Hit lt RETURN gt to continue gt gt Verify the sge root directory setting Checking SGE_ROOT directory The Grid Engine root directory is SGE_ROOT var opt GRID SILVACO 272 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid If this directory is not correct e g it may contain an automounter prefix enter the correct path to this directory or hit lt lt RETURN to use the default
215. ng Optimizer Target and Settings Optimization in VWF Check This is the right most button It allows you to debug the active script The debug operation consists of compiling and running the script with some pre defined values The output of the check operation is then shown in the bottom most part of the worksheet pane The screen shot in Figure 6 13 illustrates the check operation It shows an error in line 4 A non existant variable target 1 was referenced The output shows there was an error in the script 4 ReferenceError targetl is not defined The error indicates that there is a problem in line 4 of the script If this script was run in an optimization experiment the error would stop the optimization after the first iteration was finished Given that simulations can take a comparably long time to finish the error could be undetected for a while It is thus advisable to always check a script when it is first loaded or whenever it is edited When there are no errors then the output of the script consists only of outputs from print_console statements see also Chapter 7 Scripting in VWF Figure 6 14 shows how an error free check will look bd export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help Ien ojl amp Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs trenchdepth 2 5
216. niiace decessi arani en 118 JWASCNDU Soer a e cpeutesccnsetiagstt 230 Running Experiment ccccccsccecsssssesessessseseesesssssseeee 182 184 Jobs Supported Algorithms ccccscssessesestescsteseeeseesesteseseesens 180 PANNING inc E E E ET 80 81 141 QUEUING 5 5255 Sots oot tees et a E tense 83 87 141 P PRUNING 223 es ecbtseacen seedy este ceargetnelernanssceetgdbeseuvedeteecet 7 caste ened 81 Running on a Single Machine cccccccscsesecsseecseeeeseeeesees 28 Parallel Tempering PT sscesecesseeeseeseeeeeeeseeeeeaeeeeeeneees 180 Running on Cluster of Workstations c ccsesesesseseesereeees 29 PNS ceea a a catene det 91 93 SubmiIttiNg oo eee eee eeteeeeeeeeteeteaeeeeeeteeeeeaeeteaeetaees 287 291 Preferences Deck Eqn svissc ccd ccghhaacciedasslaaacedeeiuacccataaxtenescdarataseczeaans 111 L DOE Tree o eeeeeeeeseseseseesesecersesesecevecsesevevstsessevetsesseeneteees 110 Levenberg Marquardt LM ccsccssssssssssssssececseseceeeeeeee 180 207 Execution Host eee eeeeneeeeeneesaeeeaaeeeaniecenetenecenieeniittay 114 ie Experiment Properties c cccceceeeeeeeeeeseeceeeeeeeeeeneeeeers 105 Loading Shared Libraries sssesseseessssssssesesseseeeeeee 233 234 File TYPES sieorsiaiuionisros roos radenie ire 116 LSF soeessesseesseeseeseesseesteeseeseesneesnenseenteesy 28 29 81 141 295 Graphene e a ER E E aN eed 112 GDL Ee E E E eee edete eee 115 M OTOLE EE EE E E E ET 118 A a a ba Sons tO Arranging
217. nnot be shared with anyone else When you use the other radio button then the settings of the host will apply Particularly files are kept on the remote machine in the directory which was selected at install time The files can be shared with other VWF users In this panel you can also change the values for the disk statistics display of the VWF explorer and main windows You can change the interval which is used to update the disk statistics The default is 30s which means that the free disk space is checked every 30 seconds You can also define a warning threshold If the disk space fall below this value then the display of the disk space in the explorer and main windows will change to red Manage Preferences Optimizer Figure 4 13 Preferences Execution Host 114 VWF User s Manual Customizing VWF Preferences Panel Figure 4 14 shows all possible settings for the grid environment Please refer to Section B 5 Submitting Jobs Figure B 13 for further details a x Grid Manage Preferences Profiles Local s New Copy Delete Queue system local m Settings for current profile rid egistered Filetypes Optimizer Status OK Max queue jobs IV Save these settings on exit Cancel Apply Figure 4 14 Preferences Grid SILVACO 115 VWF User s Manual Customizing VWF Preferences Panel
218. ns The dialog allows you to chose among three ways of opening a file To open an existing experiment use the Browse button to display a file selector box and to select the experiment file to open When you select a file the OK button will become enabled and allows to confirm and load the selected file Create experiment Figure 5 52 allows you to create a new experiment You need to define a name and a type 162 VWF User s Manual VWF File Mode Tutorial Open or Create an experiment Optimization Differential Evolution Genetic Algorithm Hooke Jeeves Levenberg Marquardt Parallel Tempering Simulated Annealing Figure 5 52 VWF File Mode Create Experiment SILVACO 163 VWF User s Manual VWF File Mode Tutorial Open examples Figure 5 53 allows to open files from the example section As experiment files also contain runtime output results and example files are normally stored in a read only location the selected example needs to be copied to a writable location first The lower part of the dialog allows you to select a location to copy the file to The default is a directory called vwf_examples in your home directory Open or Create an experiment C Open experiment C Create experiment Open examples Examples vwfex01 tgz vwfex02 tgz vwfex03 tgz vwfex04 tgz vwfex05 tgz vwfex06 tgz vwfex07 tgz vwfex08 tgz vwfex09 tgz vwfex10 tgz vwfex11 tgz zi Destination directory
219. nstead No access to server directories e g using NFS is necessary from your workstation in this mode The server side is completely separated from the GUI which will normally run on a different workstation and which can be closed after an experiment was started As soon an experiment is started processes are created on the server and on the available grid computing environment These processes run under a configured user id A regular VWF user does not need UNIX rights to access data owned by that user Instead control over all data both database as well as files simulation results is controlled solely by the VWF security system Server processes are created and killed by the vwf _daemon process which must be installed prior to running VWF To install the vwf _daemon you need to run vwf install This will prompt for the user ID to use as well as for a directory to store the simulation result files It is suggested to create a separate user e g vwf_user for that purpose The user must be available on all machines which are part of the cluster environment but not necessarily on the user s workstation that is used to run the GUI The command vwf instali will also install the firebird database system Therefore a separate firebird install is not necessary if the vwf_daemon is being installed Note In your VWF preferences you have to change the execution host from the default localhost to match the central server
220. nstex01 in from the directory decks athena athena_stress in The right pane shows the file vpex01 in from the directory decks victoryp vpex01 in One of the checked out files can be chosen to become the baseline athena_adaptmesh athena_advanced_diffusion athena_calibration athena_complex athena_compound athena_diffusion athena_elite athena_implant athena_misc athena_optolith athena_oxidation athena_stress v CVS Browser S pserver cvs_user lannach64 local_build cy E decks athena athena_stress anstex01 in E decks victoryp vpex01 in Victroyprocess example 1 3D process simulation illustrating structure initialisation mask handeling geometrical etching and deposition ion implantation and diffusion Silvaco 2007 go victoryprocess initial structure define the material and the simulation box Init material silicon boxmin 0 4 0 5 0 boxmax 1 6 2 1 1 5 resolution 0 1 0 1 0 1 initHeight 0 5 Load the mask file in lay format is being used LoadMask maskfile vpex01 lay Deposit silicon using mask layer corner GeometryDepo material silicon thickness 0 4 mask Corner Export the data into tonyplot3D format Evnort hacanamao unav l 1 Figure 3 26 Browse View of CVS Repository Two files have been checked out SILVACO 55 VWF User s Manual Main GUI components Using the VWF GUI 3 3 3 Experiment Editor Figure 3 27 shows the Experi
221. ntax as used in the printf C function Choose format for max_XX_Stress x Formatting Automatic Automatic Floating point Scientific Custom value 1 98457e 10 display 19845700000 cnc Figure 3 46 Available Column Formats SILVACO 73 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 47 displays the setting in case the Floating point format was chosen An extra field Precision appears where you can define the number of digits to display In the depicted screen shot a value of 6 is selected for Precision Note that this is also reflected in the Preview mi Choose format for max_XX_Stress x m Formatting Floating point v Precision Js Bj Preview value 1 98457e 10 display 19845700000 000000 cnc Figure 3 47 Floating Point Format Figure 3 48 shows the dialog for the Scientific notation Again the Precision field can be used to define the number of digits to display Choose format for max_XX_Stress x m Formatting a Precision le Bj Preview value 1 98457e 10 display 1 984570e 10 cnc Figure 3 48 Scientific Format SILVACO 74 VWF User s Manual Main GUI components Using the VWF GUI Finally Figure 3 49 displays the dialog for the Custom format type Instead of the Precision field there is now a field called format string It allows you to enter a C type format
222. nual Defining Optimizer Target and Settings Optimization in VWF 4 lannach solar_opt_Im Optimization Levenberg Marquardt 10062 File Edit Experiment Tools Help laji ofje Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Optimizer Levenberg Marquardt x Optimizer Settings Repeat Count 0 Targets Select the target to optimize Enabled Target vae o E ooooooereonm mess0_ OO Preparing 5 Free space 520 9 MB VWF Copyright SILVACO Inc Figure 6 26 Selected Curve Target Double clicking on the Value column of the selected target opens the window shown in Figure 6 27 You can enter values manually or load them from another curve file For instance when you want to do a calibration then you might want to load a measured curve from a file and use this as reference for the optimizer The file format that can be loaded is the format also understood by TonyPlot Figure 6 28 shows the loaded or manually entered values for the vector target The dialog allows to modify any of the loaded values By clicking OK they are taken over into the Setup pane Figure 6 29 For every simulation VWF takes the simulation result and computes a component wise absolute error the difference of the simulated to the reference curve The error vector is then passed on to the Levenberg Marquardt optimizer SILVACO 208 VWF User s Manual Defining Opt
223. o define split variables VWF Experiment i Define one or more splits before importing a DOE Figure 5 43 No splits Have Been Defined for DOE Import Figure 5 44 shows the case where the split variable names in the experiment are different from those in the experiment as they are in the CSV file VWF allows you to ignore this error and continue but it is advisable to check where the cause of the problem is If you decide to ignore the error then VWF assigns split parameters as they occur in the file The first found parameter in the CSV file is assigned to the first found parameter in the deck of the experiment in VWF VWF Experiment AN Parameter names found in file differ from the parameter names in the deck Do you want to continue anyway Figure 5 44 Inconsistency with Variable Names Figure 5 45 depicts the case where the number of split variables in your CSV file differs from the number of split variables in the experiment VWF offers to ignore this error and take over only the amount of variables for which corresponding parameters are existing in VWF This only works if there are more parameters in the CSV file as there are parameters in the experiment Itis advisable to check the cause of this inconsistency VWEFE Experiment More splits found in file than in deck Do you want to proceed with only the first 2 splits Figure 5 45 Inconsistent Number of Splits SILVACO 156 VWF User s Manual Importing
224. om asb vwf vwf_basedir tpbl LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid 1sf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build silvaco lib support 1386 linux Use CONNECT or CREATE DATABASE to specify a database SILVACO 254 VWF User s Manual SRDB Utility Database Maintenance A 4 SRDB Utility The SRDB utility which was used to create a VWF database must also be used to carry out the administrative tasks explained below A 4 1 Making a Backup While it is preferable to use the vwf_backup utility to backup your data you can also do so by using the SRDB utility directly Note When you are using the database remote mode it is preferable to use the vwf_backup utility to backup your simulation files and database in one go Note Only the database dump will be created The simulation result files must be backed up separately as detailed below To create a backup start SRDB connect to a database and use the following SRDB command lannach gt list Logged onto server lannach lt Available databases gt vwt VWF lannach gt backup vwf vwf bak 20080901 LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux usr lib lib usr openwin lib build silvaco lib support x86_64 linux
225. onally to the jobs limit you can also define a load limit VWF tries not to exceed either of the two limits The load limit is particularly useful if the machine is also used for running jobs outside VWF There is also a setting called nice This can be used to define a nice increment level All processes started by the local queue will have their nice level incremented by the value given in this setting The nice level is relative to the nice level VWF runs at For instance if VWF runs at nice level 5 and you set the increment for the local queue to 10 this means that the processes started by the local queue will run at a level of 15 The default value for nice is 10 meaning that all started processes will be incremented by a value of 10 SILVACO 141 VWF User s Manual Running an Experiment Tutorial Before jobs are actually queued into the underlying job farming system you need to select which parts of the tree to simulate This can either be the whole tree or a subset of it Figure 5 27 shows how to select a subset of the tree using Add branch of the Queue submenu tjlx2545 Silvaco COM tutorial_01 Queue Add branch Add threag Kill node job Kill Selected nodes job Plot All Plot Ghoose Figure 5 27 Context Menu to Add a Branch to the Queue SILVACO 142 VWF User s Manual Running an Experiment Tutorial Figure 5 28 depicts the situation after the branch has been added to the queue To dist
226. ons 4 accept the terms of this license agreement do not accept the terms of this license agreement Help Previous Next Figure B 2 OGS Installation License Agreement Accepting the license by selecting I accept the terms of this license agreement and clicking next will bring you to the screen shown in Figure B 3 Here you can select the type of installation custom or express and whether you want to install a qmaster host an exec host or both We recommend to use the custom installation process as shown in Figure B 3 The default express installation will try to install security certificates which will require additional software Note The installation or use of security certificates for grid engine is not covered by this manual SILVACO 261 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid bd Grid Engine 2011 11p1 Installer Ox Choose component GRID ENGINE y Qmaster host x Execution host s Shadow host s Berkeley db host Express installation Custom installation Heip Previous ouit Figure B 3 OGS Installation Custom Installation Clicking Next will bring you to the main configuration screen as shown in Figure B 4 You don t need to change any
227. opyright SILVACO Inc Figure 6 14 No Errors Detected by Target Script Check SILVACO 196 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF 6 6 2 Optimizer Convergence It cannot generally be told in advance whether an optimization problem will have a solution For instance it is possible that the target value cannot be achieved by varying the parameters within the given bounds This can happen if the parameters have no or little impact on the extracted value or if the parameter boundaries were chosen too narrow bd lannach opt_ga Optimization Genetic Algorithm 10060 x File Edit Experiment Tools Help Ie ojl e Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Optimizer Genetic Algorithm x Optimizer Settings Repeat Count lo 4 Targets Select the target to optimize Enabled gateox nxj n sheet rho Idd sheet rho chan surf conc sheet cond v bias nldvt nvt inbeta ntheta am Amn Ys a UY Preparing O Free space 592 8 MB VWF Copyright SILVACO Inc Figure 6 15 Optimizer Setup The different ways of defining the target will be shown below SILVACO 197 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF 6 6 3 Defining Optimizer Settings When you select the Optimizer Settings button of Figure 6 15 the window sho
228. ort no scheduling information actual load Enter the number of your prefered configuration and hit lt RETURN gt Default configuration is 1 gt gt We re configuring the scheduler with gt Normal lt settings Do you agree y n y gt gt y 20 Create the environment variables for use with the grid engine software Using Grid Engine You should now enter the command source var opt GRID default common settings csh if you are a csh tcsh user or var opt GRID default common settings sh if you are a sh ksh user This will set or expand the following environment variables SSGE_ROOT always necessary SSGE_CELL if you are using a cell other than gt default lt SSGE_QMASTER_PORT if you haven t added the service gt sge_qmaster lt SSGE_EXECD_PORT if you haven t added the service gt sge_execd lt SPATH Spath to find the Grid Engine binaries SMANPATH to access the manual pages SILVACO 280 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid Hit lt RETURN gt to see where Grid Engine logs messages gt gt Once you press lt RETURN gt the installation process is complete Several screens of information will be displayed before the script exits Now source appropriate settings file to set up environment variables as described above If you don t want source settin
229. ot use vwf instal1 then vwf_backup takes the simulation files from the default location S HOME vwf vwf_basedir This is also indicated by the output of vwf_backup SILVACO 247 VWF User s Manual vwt_backup Database Maintenance The last line of the output of vwf _backup shown below indicates that you are running VWF in default mode thomasb lannachn vwf_backup VWF BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved 7 INFO version info vwf_backup 2 12 1 R Wed Apr 3 13 08 23 CEST 2013 INFO config file build silvaco var vwf_ii cfg not existing using default locations for simulation files SILVACO 248 VWF User s Manual vwt_backup Database Maintenance A 2 1 Examples The following shows a short list of examples on how to use the vw _backup utility Manually create a backup This example creates a backup of a database called vwf_demo2 on server lannachn and stores it in a TAR file called vwf_demo2_20130318 tgz The runtime output below details the progress of the utility You can see that the backed up base directory is build silvaco var vwf_base_local vwf_demo2 thomasb lannachn vwf_backup host lannachn passwd simucad db vwf_demo2 file vwf_demo2_20130318 tgz VWF BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved INFO version info vwf_backup 2 12 0 R Thu Mar 14 15 32 53 CET 2013 INFO Backing up simulation files from directory build silva
230. ou can also combine these methods For example first selecting a design strategy and then removing or adding additional values Figure 5 21 shows the context menu which is displayed by right clicking on the first line in the worksheet You can use the entries Add single branch and Add multiple branch to add one or several lines to the worksheet This is similar to the functionality in VWF 1 xx The Remove Branch entry will delete the selected line The Change Value entry allows you to change the parameter values of the selected line In this example select Design to open the dialog in Figure 5 22 tj x2545 Silvaco COM tutorial_01 Unpin Remove selected Branch es Design Figure 5 21 Select DOE Design Strategy SILVACO 137 VWF User s Manual Defining a New Experiment Tutorial Figure 5 22 allows you to select one of the predefined DOE design strategies to define which parameters to split and between which bounds they will be split On the top left there is a pull down menu which can be used to select a different strategy The default Low and High values for a parameter are chosen to be 50 of the initial value Experiment design 7 2 f implantenergy 0 o o 5 5 Figure 5 22 DOE Design Strategies Figure 5 23 shows the situation where a Full Factorial design has been chosen all parameters have been selected check marks at the left and bounds have been entered for the parameters Exp
231. our tutorial a deck based on one of the examples of DeckBuild was chosen Examples gt MOS1 example1 moslex01 in Click the button labeled DeckBuild to open the DeckBuild application Once DeckBuild starts Figure 5 10 navigate to the Examples section and select the first example from the list To do so right click on the button labeled Main Control and select the entry called Examples from the displayed menu Another window showing an index of all examples will open Double click on the first entry named MOS1 MOS Application examples The content of the window will change and display a list of examples Double click the first entry named 1 1 moslex0l in NMOS The window will change again and display a description of the selected example SILVACO 125 VWF User s Manual Defining a New Experiment Tutorial Confirm the selection of the deck to import by pressing Load example then close the examples window When you are satisfied with your selection close the DeckBuild application again Another dialog will open to confirm and the deck will then be taken over into VWF as baseline iv Baseline base Cancel Import Export CVS DeckBuild Figure 5 9 Importing a Baseline SILVACO 126 VWF User s Manual Tutorial Defining a New Experiment Deckbuild V3 40 13 R file_1323941960 in dir tmp Filer View r Edity Find r Main Control Commands 7 Tools 7 next dine J stop cont
232. out In contrast the resource called ref dat is a linked resource which resides in the directory tmp VWE Resources No copy of that file is created it will directly be linked to from the simulation sub directories of the experiment It is therefore essential for a successful completion of the simulation that linked resource files are available at the time of experiment execution The experiment depends on these external files The advantage of database stored resources is that the files are copied rather than referenced on import and do not need to be kept in the original location beyond the import operation One of the trade offs between linking and copying is the amount of used disk space This can be important if mask files will be reused among various experiments or users Another aspect to take into account is that a change in a linked mask is reflected in every experiment which uses links to that particular mask It should thus be decided from case to case whether to use external resources v tjlx2545 Silvaco COM vwfex02 File Edit Experiment Tools Help lalz asb oe Preparing Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc 4 Figure 3 28 Experiment Editor Resources tab SILVACO 57 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 29 shows the VWF Deck Editor This editor allows you to nominate parameters as split variables To nominate a parameter right click on any
233. ply the path where you actually installed VWF on your system Before you can proceed to starting the GUI installer make sure you have got java installed and in your path root lannach ogs which java usr bin java root lannach ogs java version java version 1 4 2 gcj GCC 3 4 6 20060404 Red Hat 3 4 6 11 Copyright C 2006 Free Software Foundation Inc This is free software see the source for copying conditions There is NO warranty not even for MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE No particular version of java is required by the GUI installer SILVACO 259 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid B 2 2 Running the GUI Installer You can start the installer as follows start_gui_installer This will open the window as shown in Figure B 1 b 4 Grid Engine 2011 11p1 Installer BEE Welcome GRID ENGINE Welcome to the Grid Engine 2011 11p1 installation wizard This program will install the Grid Engine 2011 11p1 on your computer s Ore Ou Figure B 1 OGS Installation GUI Installer Main Screen Clicking Next will show a dialog where you have to accept the licensing agreements as shown in Figure B 2 SILVACO 260 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle S
234. pply Figure 4 11 Preferences Graph SILVACO 112 VWF User s Manual Customizing VWF Preferences Panel Figure 4 12 shows the settings for the Script Editor You can define the colors used for highlighting as well as settings like tab width and whether to show line numbers v Preferences Manage Preferences Application Shortcuts Toolbars MaskViews DeckBuild bs SmartView Experiment Properties DOE Tree Deck Editor Graph Execution Host Grid Registered Filetypes re Sipe Optimizer Script Editor Properties Tabs Tab width 4 Margin IV Show line numbers Show icons Syntax M Use Highlighting Colors Margin TY a comment mm Margin Border mm a Keyword a a Foregomd E gt commana Background a String En a Selected Foreground a Number Pa a Selected Background M a Math E a Tes W me IV Save these settings on exit Cancel Apply Figure 4 12 Preferences Script Editor SILVACO 113 VWF User s Manual Customizing VWF Preferences Panel Figure 4 13 displays the setting of the execution host You can choose to either run your experiments on your local workstation or you can choose to use a different host for this When choosing the local host radio button then the simulation files are stored locally on the tmp directory of your workstation They ca
235. pt and filled with data as simulation jobs are finished The optimization capability in VWF while often applied in that manner is not limited to sole curve fitting problems Instead it can be applied in a more generic way to solve various optimization tasks ranging from model calibration over inverse modeling to process optimization and others Optimization is supported to be used together with any of the Silvaco simulators that are available from within VWF SILVACO 179 VWF User s Manual Supported Optimization Algorithms Optimization in VWF 6 1 Supported Optimization Algorithms The following Silvaco standard optimization algorithms are supported from VWF e Levenberg Marquardt LM Gradient based local optimization strategy This is a standard nonlinear least squares problem solver and works very well in practice if a reasonably good initial vector of parameter values is available This is used most efficiently for curve fitting problems Due to the nature of this algorithm the optimizer can be caught in a local minima e Hooke Jeeves Method HJ Local optimization strategy While the LM optimizer described above is also a local optimizer there are some important differences between the two LM calculates numerical derivatives but HJ belongs to the class of direct search algorithms and these do not use derivatives In this respect HJ is similar to the global optimizers e Simulated Annealing SA Global optim
236. r Boundaries SILVACO 186 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF 6 6 Defining Optimizer Target and Settings Defining the target of the optimization problem is probably the most crucial part of the optimization experiment Various approaches depending on the nature of the optimization problem at hand are possible VWF attempts to make this process as simple as possible while maintaining a high degree of flexibility so that a wide range of optimization problems can be formulated and solved Depending on the chosen optimization algorithm a target is either a vector of real valued numbers or a single scalar real valued number VWF supports both kinds of targets As an example for scalar targets process variables like thicknesses or junction depths or variables like voltages currents capacitances can be mentioned Examples for vector targets can be I V curves or 1D doping profiles or also a set of several scalar targets merged into a vector Figure 6 15 shows the setup tab of the experiment window which is used to select the target When the baseline is imported all EXTRACT statements are setup as potential targets The main pane of the setup tab shows all these targets Before an optimization can be started exactly one target must be selected for optimization In the setup pane you can also define an optional repeat count for simulations If a simulation fails it is repeated until it succeeds
237. r every node a detailed job status information can be displayed To display this information open the Node Information dialog Figure 3 36 by right clicking at any node This dialog displays name and status of the node and any simulation results which might become available after a completed simulation Additionally the runtime output of a simulation is shown bottom There are two tabs corresponding to the standard output and the standard error of a simulation job respectively In case you are experiencing troubles with simulations it is advisable to check both output tabs Click OK to close the dialog Selecting a different node while the dialog is still active will update the shown information with the details of the newly selected node You can resize the panes by clicking and dragging on the edge between any two panes SILVACO 64 VWF User s Manual Main GUI components Using the VWF GUI Node Information m Details Attached Data Name diffus temp Status Finished Path tmp vwf vwf_basedirjvwf_v7_tpb exp_10001 jobs 10008 Splits B D a deck ml in picturel png vwf moslex01_0 s tr 5 a moslex01_1 1 results final moslex01_1 s extract dat og tr diffus temp temp 1000 diffus time time 30 m Runtime EXTRACT gt extract name nbeta slope maxslope curve abs v gate abs i drain 1 0 abs ave v drain nbeta 0 00023928 EXTRACT gt extract name ntheta max abs v drain
238. rdb version to use default uses srdb from SSILVACO bin flags pass flags to srdb command e g to select a particular version properties take all options from a properties file all other options are ignored e g vwf_backup host lannach db vwf_test passwd simucad file backup_test_20081210 tgz This will attempt to make a backup of database vwf_test on server lannach and store the dump together with all result files in a file called backup_test_20081210 tgz The password used for the connection is simucad or vwf_backup srdb build silvaco bin srdb flags V 10 0 11 R host lannach db vwf_test passwd simucad file backup_test_20081210 tgz Same as above except that srdb is taken from build silvaco bin rather than from SILVACO bin and that version 10 0 11 R is executed instead of the default version or vwf_backup properties properties config This will take all options from the properties file instead of the commandline SILVACO 19 VWF User s Manual VWF Modes Installation Below an example of how a database called vwf _demo2 can be backed up into a file called vwf_demo2 tgz root lannachn vwf_backup host lannachn passwd simucad db vwf_demo2 file vwf_demo2 tgz VWF BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved INFO version info vwf_backup 2 12 0 R Thu Mar 14 15 32 53 CET 2013 INFO Backing up simulation files from directory build silvaco
239. re These packages must be obtained and installed separately See the quickstart guide in Appendix B Queuing VWF On The Oracle SUN Grid Engine Open Grid Scheduler on how to obtain and install the OGS software Note A detailed description of the OGS concepts and installation procedures and scenarios is beyond the scope of this manual An overview of the installation process is given in Appendix B Queuing VWF On The Oracle SUN Grid Engine Open Grid Scheduler The queue which will be used for executing simulation jobs must be selected in the Preferences dialog of VWF prior to starting the experiment and cannot be changed for running experiments Select one of the two available options local Silvaco Simple Queue or DRMAA OGS or LSF The selection of the queuing system is stored persistently together with other settings in a preferences file in the user s home directory Note Parallel should be distinguished from multi threaded Multi threading refers to utilizing several CPUs in a single simulation job whereas parallel refers to running several simulation jobs each on a different CPU at a time Figure 3 56 shows the Experiment menu By selecting Experiment Start the experiment as defined in the steps above will be started If the experiment has unsaved changes you will first be prompted to save the experiment Figure 3 57 If no jobs have been selected for simulation you will also be prompted to add all jobs to the queue of s
240. ria ninen EENET ANT E NANTE dase 293 Appendix C Queuing VWF On Am LSF CluSt l iis iciicenseess se nttatierdetantenienitenen 294 C 1 Obtaining and Installing LSF i sce s6csscedacdeeeieed sedan seaeetcaeaseencavwddaseeane 295 C2 Selecting LSF tobe Used c cecccidcseieenreniseeciaecsoetadeductaen dames EREKE 295 Appendix D Recommended Practice 0 ccctiieeses cir eaenwiiwe da eaeweets euwenenwe es 297 D 1 Multi Thr adihg eT er eer ee cre re 298 D2 Extract Statements s oerien annei aaa NE a ROY MMe ed MMSE REG ae EERE maES 298 D 2 1 Bad Case for VWF coe dvcacaneccneedawnecie cece padeeeceneadeatenpesunemesnaben ads 298 D 2 2 Good Case for VWF 2iccsisgesawelaveebiciyivedsiwebaedbiatiswedeesediaweebacizeie 299 D 3 Splitting on line statements in Athena 1 2 0 0 cece eee eee eee eens 299 SILVACO 6 VWF User s Manual Table of Contents D 4 Dealing with Error Scenarios 0200 ieee cece ceed eee deena cheese eee eens dees eead dene ewew es 300 D 4 1 Dealing with Failing Simulations ovsn2cscbduetuied Oegen dae beg eeeeOin Qwhed dixdebebteyees 300 D 4 2 Standard Output and Standard Error 0 2 0 0c cece eee eens 300 D 4 3 Extended Job Status Information sees sea be ee sbevcedsaeve cebveeeeseetedteveens 300 DAs Grid engine LSF Jobs Failing iceeccehenceeasneatibueceieedveui wekebercewoeinwecdeace 300 D 4 5 VWF Background Process not Starting 0 c cece eee eee eee nee 301 D 4 6 Error Message when Logging into the Databas
241. right 1984 2011 SILVACO Inc Figure 3 59 Queue selected SILVACO 83 VWF User s Manual Main GUI components Using the VWF GUI tj x2545 Silvaco COM vwfex02 ree Worksheet lahs S itPlot Worksheet Fragm Clear Result Files h m Not sQue Clear All Results a Run p m Abo Remove All Overrides Eailed Failed 0 ie Root 3 Missing Resut O Missing result a Finished _ 1B Remove all Remove selected branches diffus time diffus temp implant dose implant energy Queue aborted fragment s Stopped Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc _ See ey Figure 3 60 Queue aborted It is not until the experiment has been started that jobs are actually handed over to the underlying queuing system At this stage the queuing system decides when jobs are executed and how many jobs are executed at the same time You cannot control this directly from VWF Figure 3 61 shows an example of a running experiment with 7 finished green 2 running white and 17 queued orange fragments As jobs are finished new jobs will be taken from the list of queued jobs and will be started Figure 3 62 depicts another example where some jobs have failed red and some jobs have missing results yellow A simulation job is a single simulation that is executed on a CPU A fragment however is a more logical term and identifies a branch in the split tree By selectively sim
242. ry MixedMode MixedMode XL MultiCore Noise OLED Optolith Organic Display Organic Solar OTFT Quantum Quantum 3D Quest RealTime DRC REM 2D REM 3D SEdit SMovie S Pisces SSuprem 3 SSuprem 4 SDDL SFLM SIPC SiC Silvaco Silvaco Management Console SMAN Silvaco Relational Database Silos Simulation Standard SmartSpice SmartSpice 200 SmartSpice API SmartSpice Debugger SmartSpice Embedded SmartSpice Interpreter SmartSpice Optimizer SmartSpice RadHard SmartSpice Reliability SmartSpice Rubberband SmartSpice RF SmartView SolverLib Spayn SpiceServer Spider Stellar TCAD Driven CAD TCAD Omni TCAD Omni Utility TCAD amp EDA Omni Utility TFT TFT 3D Thermal 3D TonyPlot TonyPlot 3D TurboLint Universal Token Universal Utility Token Utmost HI Utmost III Bipolar Utmost III Diode Utmost III GaAs Utmost HI HBT Utmost III JFET Utmost ITI MOS Utmost HI MultiCore Utmost IIT SOI Utmost II TFT Utmost II VBIC Utmost IV Utmost IV Acquisition Module Utmost IV Model Check Module Utmost IV Optimization Module Utmost IV Script Module VCSEL Verilog A Victory Victory Cell Victory Device Victory Device Single Event Effects Victory Process Victory Process Advanced Diffusion amp Oxidation Victory Process Monte Carlo Implant Victory Process Physical Etch amp Deposit Victory Stress Virtual Wafer Fab VWF VWF Automation Tools VWF Interactive Tools and Vyper are trademarks of Silvaco Inc All other trademarks
243. selecting Plot gt All will start TonyPlot on your computer and display the structure and data files curves that were generated during the simulation Figure 5 32 Tonyplot eye Procuction eE gad Re _Drain Curent Silicon layer 1 region 1 N Conductivity o O04 Pdysilia laye 1 roja i Bias 15 ATHINA Figure 5 32 Viewing Result Files SILVACO 147 VWF User s Manual Exporting Data From VWF Tutorial 5 6 Exporting Data From VWF An experiment can be exported into a file and imported into another database This is useful if experiments are shared among different users or databases For instance when a customer requests help on a particular problem and sends in the experiment an AE can then import it into one of Silvaco s databases examine the problem and provide the required assistance To export an experiment into a file select File Export in the Experiment Window A dialog box will prompt you to select a file Figure 5 33 and what kind of information you want to export The minimum to export is the experiment definition Experiment This includes the deck and the split information but not the worksheet data On top of the experiment you can decide to also include Resources Results and Result Files If you want to later rerun the example you need to include Resources To add worksheet data to the exported file you have to click Results Finally click Result Files
244. senee 48 53 55 123 140 E T R 56 100 c PFOD OMICS iscsi aade orso 105 109 RUNNING araea ene ees 141 147 Central VWF Server Running on a Centrral VWF Server ssssscscesesesceteteeseeeene 28 Running Experiments ceesceeeesseeeesneeeeseeeseneeeeesneereaes 28 Running Outside the GUI in Batch Mode c sessseeseeeee 295 29 Compiling SCHPUS sccessccctsccvsiesiesceceietansecetieddecessd eesttonssvnensinel 232 SUANiNG 1 4 deter dul E A tages 81 Console SLOPPING serice oraren rriena dee oleae E E EEE EEA 81 Writing Messages to it Sossisccdvetickicvieacast ent oAtdcacedeedtestaxtased 234 Using VWF File Mode ssssssssssssitsssssrtesesrrresennrreees 161 164 V aisit ina n a i Aa 154 Viewing Nodes ssssssssssssisssrsstnrsnrsnrrstersnnnrstertnnnnnennna tna 90 Custom DOSIOM is iel sceszecaecersasesavaiesedeseastgeseasseussieviasneds 79 80 Explorer Main Window sssssssssesssesssseeeeeeneecenneeennieesens 33 CVS REDDS OY macai tei aie ota 54 55 Exporting Datel EE E A A ste 148 D Optimization Results eeeceeeeeeeeeeeeeeeeeeeeeeetsaeeeeeeeseees 150 Worksheets gcsecc ceccercccasscciadance siesectuseetansacdeveagieeeecnesest 149 Database ciic ccccic cbiccics ienltlat col aedeee a liebe 34 35 Aa 60 298 299 BACKUP sionistisen i aiae aaaea 246 251 Cheatin A e EE aoieceeeyexs 23 28 255 F Examples simia hen ee eee 32 ie oTo eea E E evazaaesadecs izeeyaaevsscazacesct T 22 23 File MODE sursin 17 32 161 164 Installin
245. ser demo Status User demo2 Status User superuser Status SRDB lannach baseline_201 SRDB lannach baseline_201 SRDB lannach baseline_201 SRDB lannach baseline_201 2 NORMA NORMA NORMA SUPE gt gt gt V6 gt list users Groups Groups Groups Groups gt password admin mypassword User admin password modified successfully build silvaco var srdb SILVACO 238 VWF User s Manual Introduction Security Concepts in VWF Compared to the local execution mode no vwf_daemon used or the filemode no database used this mode of operation poses some restrictions as to how and where experiments are executing Here a separate server process will be used to execute your experiments For every experiment that you open in the GUI a separate server process will be started Once you press the Run button in the experiment window you can close the GUI The server process will take care to farm out your jobs to the underlying grid and will collect all job status information and experiment results Later when you restart the VWF GUI you can obtain the results by re opening the previously started experiment You will instantly notice whether the experiment is still be running at this time by looking at the status If the experiment is running live job status updates will be shown in the same way as you know from local database mode and filemode To tight
246. sheet Jobs SplitPlot Worksheet amp Deck editor go athena Find Text line x loc 0 0 spac 0 1 line x loc 0 2 spac 0 006 line x loc 0 4 spac 0 006 line x loc 0 6 spac 0 01 Options line y loc 0 0 spac 0 002 e line y loc 0 2 spac 0 005 I Case Sensitive Find backwards line y loc 0 5 spac 0 05 I Whole words only From cursor line y loc 0 8 spac 0 15 init orientation 100 c phos 1e14 space mul 2 Find Close pwell formation including masking off of the nwell E diffus time 30 temp 1000 dryo2 press 1 00 hcl 3 etch oxide thick 0 02 Finished Free space 1 3 GB VWF Copyright 1984 2011 SILVACO Inc _ Figure 4 5 Coloring Scheme Note that the format as defined in the preferences panel will generally be applied to all columns of the worksheet If you do want to individually format the worksheet columns however you can do so directly in the worksheet Any individual format defined on a column in the worksheet will override the settings as defined in preferences SILVACO 106 VWF User s Manual Customizing VWF Preferences Panel The third group of settings allows you to influence the way how data in columns are displayed The default setting is automatic which means that the format of a column depends on the contents Larger numbers are eapiyeds in scientific notation whereas smaller numbers are displayed in fixed notation Figure 4 6 shows how ae notatio
247. stem local mSettings for current profile Sipe Optimizer Status OK m Max queue jobs ps IV Save these settings on exit Cancel Apply Figure B 12 Grid Preferences SILVACO 288 VWF User s Manual Submitting Jobs Queuing VWF On The Oracle SUN Grid Engine Open Grid Grid Manage Preferences Application Shortcuts Profiles SGE dimaa 4 New Copy Delete Queue system drmaa Settings for current profile Mask Views DeckBuild Registered Filetypes Sipe Optimizer oaie Max queue jobs 3 M Save these settings on exit Cancel Apply Figure B 13 SGE drmaa Preferences Useful qsub Options e m Allows you to activate email notifications on the job level The option expects as argument the reason for which an email should be sent Supported rea sons are b send email at beginning of the job e send email at the end of the job a send email in case job was aborted s send email when job was suspended or n no email is sent e m Specifies the email address to send emails to only useful in case m was spec ified e q Allows you to specify a queue other than the default 6 Below the options settings there s a brief status window This will indicate the status of the OGS system once it was detected 7 Max queue jobs Use this field to limit the maximum number of jobs
248. stom command display Browse WM Always use this program to open these files conc ATLAS version 5 19 13 C finig 27 08user 27 49system 0 52 216inputs 1552outputs 2m 27 089u 27 492s 0 52 12 104 END Standard Output M Scroll to Bottom Figure 3 38 Associating an application with a particular file type If the file name needs to be in the middle of the command you can use a placeholder as shown in Figure 3 39 This will then result in the following command being executed upon clicking OK display tmp vwf vwf_basedir vwf_v7_tpb exp_10001 jobs 10008 picture2 jpg antialias SILVACO 66 VWF User s Manual Main GUI components Using the VWF GUI Open With Click the program you want to use to open picturel png Or enter a custom command to use EXTonyPlot TextEditor TonyPlot3p fa MaskViews BB Expert SmartView M Use a custom command display lt filename gt antialias Browse V Always use this program to open these files cn Figure 3 39 Using a Placeholder for the File Name SILVACO 67 VWF User s Manual Main GUI components Using the VWF GUI Figure 3 40 shows the Worksheet tab The worksheet serves two purposes First it is used to assign split point values to split parameters Second it contains all parameters extracted during simulation tj1x2545 Silvaco COM vwfex02 ET 164 0 17428
249. t i m 5 w 5 5 a 4 D Le a 3 5 E S 2 5 Grid Engine root directory SGE_ROOT build grid jogs Cell name SGE_CELL default Cluster name SGE_CLUSTER_NAME p6444 qmaster port SGE_QMASTER_PORT 6444 execd port SGE_EXECD_PORT 6445 Group id range 20000 20100 qmaster spool directory build grid jogs default spool qmaster Global execd spool directory build grid jogs default spool Spooling method berkeleydb Spooling directory build grid jogs default spool spooldb JMX port 6446 J M library path fusr java latest lib jamd64 server libjym so Administrator mail none C smena snavs serrer aons Submit host s lannach Silvaco com Getting started with Grid Engine Setting the environment e if you are a csh tcsh user source build grid ogs default common settings csh e if you are a sh bash ksh user build grid ogs default common settings sh e This will set or expand the following environment variables 4 B save as Prin Figure B 10 OGS Installation Summary The system is now ready to be used Note In case you experience any troubles during the installation you may need to manually remove configuration files or directories left behind by the installer Please consult the grid engine manuals for more details SILVACO 269 VWF User s Manual Manuals Queuing VWF On The Orac
250. t Experiment Tools Help Ie ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Optimizer Genetic Algorithm x Optimizer Settings Repeat Count 0 Targets Select the target to optimize Enabled gateox nxj n sheet rho Idd sheet rho chan surf conc sheet cond v bias nldvt nvt nbeta ntheta JU TTT TT Preparing 5 Free space 592 4 MB VWF Copyright SILVACO Inc Figure 6 17 Entering a Scalar Target Value SILVACO 199 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF With the completion of the target definition the optimization experiment is now fully defined and ready to be started This is done in exactly the same way as for a DOE type experiment by clicking Jobs are queued immediately after the button was pressed The Results tab will look similar to Figure 6 18 In Figure 6 18 no results have been obtained so far as the experiment was just started There is one extra column called cost which does not correspond to any extracted response Instead the cost is a root mean square of the error vector in case of a vector target or a copy of the target for scalar target values If a JavaScript target script is used to compute the target the cost can also be computed in the script overriding the default implementation hg lannach opt_ga Optimization Genetic Algorithm
251. t Unreachable hosts 0 annach Silvaco com 10 72 5 1 llinux x64 CT WY UCU W _ Reachabie Heip Previous ouit Figure B 8 OGS Installation Select Hosts Screen Clicking on Install will then start the actual installation process Figure B 9 shows the output of the installation process in case of a successful installation SILVACO 267 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid b 4 Grid Engine 2011 11p1 Installer Installing Aka GRID ENGINE Hostname Task List 0 Succeeded 4 Failed 0 IP address Architecture lannach Silvaco com 10 72 5 1 linux x64 Success Jall hosts all all Success lannach Silvaco com 10 72 5 1 linux x64 Success Jadmin submit jall hosts all all Success Figure B 9 OGS Installation Successful Installation Finally the last screen Figure B 10 displays a summary of the configuration of the newly installed grid engine system SILVACO 268 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid b 4 Grid Engine 2011 11p1 Installer Installation finished GRID ENGINE Read me g
252. t demonstrates how several VWF experiments can be Tunic use the local queue var myGrid new Drmaa local var experiments 10001 10002 10004 for var i 0 i lt experiments length i print_console Running experiment texperiments i exp var myMgr new DatabaseExperimentManager lannach hostname ywf_v5_up database name demo user name demo password experiments i experiment id myMgr cleanExperimentResults var myApp new ApplicationCallback myMgr SILVACO 228 VWF User s Manual Run Experiments Outside the GUI Scripting in VWF var myExp new RunExperiment myMgr myGrid myApp start experiment myExp startExperiment callbacks are delivered via an event object var vent new Object var status do status myApp waitForEventCheckFinished event if status terminate print_console ID tevent id type t tevent type message tevent msg while status finished amp amp status terminate if status finished status myApp waitForEventCheckFinished event print_console finished ID event id type tevent type message event msg else if status terminate print_console experiment was terminated by Ctrl C myExp stopExperiment stop experiment to remov
253. t installation will take approximately 5 minutes SILVACO 281 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid Hit lt RETURN gt to continue gt gt 3 Verify the sge root directory setting Checking SGE_ROOT directory The Grid Engine root directory is SGE_ROOT var opt GRID If this directory is not correct e g it may contain an automounter prefix enter the correct path to this directory or hit lt RETURN gt to use default var opt GRID gt gt Your SGE_ROOT directory var opt GRID Hit lt RETURN gt to continue gt gt 4 Enter the name of your cell s Grid E T ngine cells Please enter cell name that you used for the qmaster installation or press lt RETURN gt to use default cell gt default lt gt gt Using cell gt default lt Hit lt RETURN gt to continue gt gt Grid Engine TCP IP communication service GI The port for sge_execd is currently set as service sge_execd service set to port 537 Hit lt RETURN gt to continue gt gt 5 Check execution host has been declared as an administration Host Checking hostname resolving This hostname is known at qmaster as an administrative host Hit lt RETURN gt to continue gt gt 6 Specify whether you want to use a local spool directory Execd spool directory configuration You defined a glob
254. t related to the OGS cell The cluster name must start with a letter A Za z followed by letters digits 0 9 dashes or underscores _ Enter new cluster name or hit lt RETURN gt to use default p536 gt gt VWF2009 Your SSGE_CLUSTER_NAME VWF2009 Hit lt RETURN gt to continue gt gt 8 Specify a spool directory Grid 1 GI ngine qmaster spool directory The qmaster spool directory is the place where the qmaster daemon stores the configuration and the state of the queuing system User gt root lt on this host must have read write access to the qmaster spool directory SILVACO 274 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid If you want install shadow master hosts or start the qmaster daemon on other hosts the account on the shadow master hosts also needs read write access to this directory See the corresponding section in the Grid Engine Installation and Administration Manual for details The following directory var opt GRID default spool qmaster will be used as qmaster spool directory by default Do you want to select another gqmaster spool directory y n n gt gt n 9 Set the correct file permissions Verifying and setting file permissions Did you install this version with gt pkgadd lt or did you already verify and set the file permissions of your distribution y n
255. ta From VWF esences caresme wanien wei OEE nee atk mate edo tina 148 5 7 Exporting WOMSNGCh iiicd dew dd ides ia eee dase ee NN eniti RRA EE RAR ae male 149 5 8 Exporting Optimization Results 00 cc cece eee eee eee eee eee eens 150 5 9 Importing Data into VWF icciiicceierie rears case Ea ee ae aw 151 5 10 Importing Worksheet Data to Define a DOE 1 cece cece eee eee nnaee 154 5 11 Sending Worksheet to SPAYN 0c cece eee tee eee eee eee eee eee eee eeeeeae ena 158 5 12 VWF File Mode sneren REE REEE E Ea EA eae a E ANEA EE E EE E E 161 5 13 Using VWF to Run SmartSpice Simulations 00 c eee e ete ete eee eee eens 166 5 131 Preparing MeCN nccccscetctebeidensavenbiudwheddenahs saqee neces DET TN aad ara 166 5 14 Running SPICE Simulations for 27 Conditions and Review the Results Using VWF 3 itscc aces seca eaveen es econo eres edwin eae e e nae 169 Chapter 6 Optimization in VWF ssi seiissasrasriaronte kais as EE ETa ETERNE AREER 178 6 1 Supported Optimization AlgorithmS 00 c eee e eee eens 180 6 2 Optimization LOOP ices ccccicateieadedar newer ar ip aE E EAEE EEEa 181 6 3 Defining an Optimization Experiment 00 c cece cece eee eee eee eens 182 6 4 Defining Optimization Parameters 0 cece eect eee eee eee eens 185 6 5 Defining Parameter Boundaries 0 ccceceee eee eee eee ne eee neseeteneenenanes 186 6 6 Defining Optimizer Target and Settings cc cece eect e eee eee e eee
256. tatus failed jobs SILVACO 86 VWF User s Manual Main GUI components Using the VWF GUI Job status information is not only displayed in the tree pane but also in the Jobs pane Figure 3 63 depicts the Jobs pane It shows a total of 10 jobs where 1 has been finished 2 are running and 7 are queued The column Id depicts the job ids as assigned by the queuing system In case you are using the grid engine systems these job ids will also show up in the qmon utility tjIx2545 Silvaco COM vwfex02 Finished Wed Dec 14 19 52 14 2011 19 52 34 Success Finished Wed Dec 14 19 52 14 2011 19 52 36 Success Finished Wed Dec 14 19 52 14 2011 19 53 00 Success Running Wed Dec 14 19 52 34 2011 Running Wed Dec 14 19 52 36 2011 Queued Queued Queued Queued Queued 4 Running 2 Aborted 0 Failed 0 Missing Result 0 Finished 4 Running Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc Figure 3 63 Job status Jobs pane You can open the Describe dialog by right clicking on any of the bottom nodes in the tree view see Figure 3 64 This dialog presents information around a single simulation job The bottom most pane of the dialog allows you to select between the Standard Output and Standard Error streams of the simulator The top left pane displays the name of the node and its split variables The top right pane shows all files which were generated during the simulation run These can be structur
257. ted If an error occur a message box is shown with an explanation like Figure 5 49 v Send Worksheet To Spayn Spayn Status Database Name NO DB 0 Attributes 0 Parameters 0 Samples Options Mode Append to Worksheet gt Parameter no value fle28 l Send Experiment Name as Attribute IV Set DB Constrained I Prepend block name vie Send Data to Spayn ZA Response gateox Enable nxj Enable n sheet rho Enable Idd sheet rho Enable chan surf conc Enable Starting Spayn please wait Figure 5 49 Attributes count mismatch The Spayn Status box is updated with the latest SPAYN database information Number of Attributes Number of Parameters and Samples count When you start SPAYN this way it automatically performs a full attribute search and a constrained parameter search with all parameters selected Full details on attributes and parameter searching are presented in Chapter 4 of SPAYN User s Manual The second way of invoking SPAYN is from a Sensitivity Analysis experiment You can create such an experiment by choosing Sensitivity in the Experiment Design dialog Then you select all the variables you want to vary and you choose the percentage of variation Once this is done and validated your experiment has a specialized Sensitivity Analysis Tree and can be run When the experiment has finished select Tools Sensitivity Analysis from the Experiment menu For full SPAYN capability an
258. tep until you are entering an empty list You will see messages from Grid Engine when the hosts are added Hit lt RETURN gt to continue gt gt lt Host s Hit lt RETURN gt to continue gt gt Finished Adding Hosts Hit lt RETURN gt to continue gt gt If you want to use a shadow host then add it to the list of administrative hosts If you are not sure you can add or remove hosts after the installation with lt qconf ah hostname gt for adding and lt qconf dh hostname gt for removing Attention This is not the shadow host installation procedure You still have to install the shadow host separately Do you want to add your shadow host s now y n y gt gt n Creating the default lt all q gt queue and lt allhosts gt hostgroup root hostname added allhosts to host group list SILVACO 279 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid root hostname added all q to cluster queue list Hit lt RETURN gt to continue gt gt 19 Select a scheduler profile Scheduler Tuning The details on the different options are described in the manual Configurations 1 Normal Fixed interval scheduling report scheduling information actual assumed load 2 High Fixed interval scheduling report limited scheduling information actual load 3 Max Immediate Scheduling rep
259. ter all the data or re run lengthy simulations Let us distinguish the types of data that are being dealt with in VWF When you are using the database then there are two basic modes of operation e One mode is the database local mode where all the simulation files are kept locally in the tmp folder of your workstation This is the default mode of operation which did not require you to run the vwf install command when you installed VWF Please proceed directly to Section A 4 SRDB Utility e The second mode of operation will store all simulation files on a central server This mode required you to run the vwf install command when you installed vwf In this mode two separate utilities vwf_backup and vwf_restore are provided to perform the task of backing up and restoring a VWF system Backups can either be created manually or by using a UNIX system utility like cron Note The utilities do not need to be run as root user Note The utilities need to be run on the server which also holds your simulation files Please refer to Chapter 2 Installation for a more detailed description of the VWF modes of operation SILVACO 245 VWF User s Manual vwf_backup Database Maintenance A 2 vwf_backup You can use this utility to create a single zipped TAR file of the contents of the VWF database and the VWF fileserver location The latter contains all the runtime output as it was generated during simulations The tool uses
260. test_20081210 tgz This will attempt to restore a previously created backup from file backup_test_20081210 tgz on server lannach All files are restored together with the database The password used for the connection is simucad or vwf_restore host lannach passwd simucad backup_test_20081210 tgz dbdir build silvaco var srdb SILVACO 252 VWF User s Manual vwf_restore Database Maintenance Same as above except that the database is restored to directory build silvaco var srdb rather than the default or vwf_restore properties properties config This will take all options from the properties file instead of the commandline Options have the same meaning as in vw _backup with the following exception e dbdir allows you to specify the directory where the database dump is to be restored This corresponds directly to the target directory of the SRDB utility see below e basedir allows you to select a different than the base directory as stored in the backup file e dbname allows you to specify an alternative name for the database This is useful if a database with the name stored in the backup file is already existing To restore a backup file the base directory location of that database must be empty and the database must not be existing in firebird Otherwise an error message will be printed and no action will be taken thomasb lannachn vwf_restore host lannachn passwd simucad A vwf_demo2_20130318 tgz VW
261. the assigned split values In the depicted example there are two parameter blocks One block is called diffus It consists of parameters time and temp The other block is called implant It consists of parameters dose and energy Adding or removing a parameter in the deck pane Figures 3 29 and 3 30 will directly influence the split tree The right hand side of the depicted tree tab shows a legend with block and parameter names At the top left there is a legend explaining simulation job status and displays a brief job statistic This legend also shows how the color of nodes corresponds to the state of a given job Here no job has been queued into the job farming system so far You can move this legend anywhere in the pane tj1x2545 Silvaco COM vwfex02 File Edit Experiment Tools Help lEz e Sl gt Ee Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status m Not Run 4 Queued a Running u Aborted m Failed 4 Missing Result u Finished Root tlessocot diffus time diffus temp implant dose e888 ee 2 8 ee ee a oo implantenergy Preparing Free space 13 4 GB VWF Copyright 1984 2011 SILVACO Inc 4 a erwin Figure 3 33 Experiment Editor Tree tab Apart from the coloring scheme the nodes are also drawn in different shapes depending on whether several parameters occur at a single deck line For such parameters all but the l
262. the underlying SRDB utility to create a database dump It does not come with its own GUI Instead it is a command line utility If invoked without an argument it gives a brief usage message thomasb lannach vwf_backup VWF_ BACKUP Copyright C 1984 2013 Silvaco Inc All rights reserved INFO version info vwf_backup 2 12 0 R Thu Mar 14 15 32 53 CET 2013 ERROR option host missing ERROR option passwd missing ERROR option db missing ERROR option file missing usage vwf_backup host hostname db database name passwd password file output file srdb path_to_srdb flags flags_to_srdb properties properties file bd base_directory srdb select which srdb version to use default uses srdb from SSILVACO bin flags pass flags to srdb command e g to select a particular version properties take all options from a properties file all other options are ignored e g vwf_backup host lannach db vwf_test passwd simucad file backup_test_20081210 tgz This will attempt to make a backup of database vwf_test on server lannach and store the dump together with all result files in a file called backup_test_20081210 tgz The password used for the connection is simucad or vwf_backup srdb build silvaco bin srdb flags V 10 0 11 R SILVACO 246 VWF User s Manual vwt_backup Database Maintenance host lannach db vwf_test passwd simucad file backup_test_20081210 tgz Same as above except that srdb is taken
263. thing here SILVACO 262 VWF User s Manual Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid b 4 Grid Engine 2011 11p1 Installer Main configuration GRID ENGINE Heip Admin user Qmaster host Grid Engine root directory Cell name Cluster name Qmaster port Execd port Group id range Shell name Copy command Administrator mail qq Use JMX Ignore domain names a root lannach Silvaco com build grid ogs default p6444 6444 6445 20000 20100 Use CSP product mode ssh scp none __ y Automatically start service s at machine boot Previous ouit Figure B 4 OGS Installation Main Configuration Clicking next will bring you to the JMX configuration screen shown in Figure B 5 JMX is the Java management extension and allows you to use tools like the java console jconsole to connect to a running grid engine master to display and change parameters Please refer to the JMX documentation for full details on JMX Please deselect the enable SSL server authentication to avoid security certificates being created and encryption being enforced Note Encryption options shown here are only related to JMX not VWF in general and do not harm the basic grid engine f
264. through the deck to take a view of the differently formatted areas You can cancel the import process by clicking on the Cancel button If you select OK the deck will be stored in the database lv Baseline base E solve Ini Bias the drain solve vdrain 0 1 Ramp the gate log outf mos1ex01_1 log master solve vgate 0 vstep 0 25 vfinal 3 0 name gate save outf moslex01_l str plot results tonyplot moslex01_1 log set moslex01_1_log set extract device parameters extract name nvt xintercept maxslope curve abs v gate abs i drain abs ave v drain 2 0 quit Import Export CVS DeckBuild Cancel Figure 5 12 Imported Baseline SILVACO 129 VWF User s Manual Defining a New Experiment Tutorial The next step is to define a new experiment which is based on the baseline created in the previous step To do so right click on the right part of the window to reveal the context menu as shown in Figure 5 13 Instead of Baseline select New Experiment this time A dialog will open a prompt for the name of experiment Figure 5 14 Confirm the name and make sure the type DOE is selected then click OK VWF Explorer File Edit View Help Il a gt Folders 2 4 localhost tutorial tutoriat_01 localhost tutorial am tutorial_O1 3 m Icons base g I List T Details Arrange Icons O Directory fi Paste Cti V Baseline
265. ts When the context menu is invoked on a line which already contains split parameter definitions parameters shown in red color then a check box is drawn in front of that parameter This is the situation shown in Figure 5 17 Other variables can now be chosen by selecting one of the unchecked parameters boron energy or pearson When a checked parameter is chosen again this has the effect of undefining that very split parameter In Figure 5 17 if the parameter called dose is chosen then the view of the deck editor is reverted to what is shown in Figure 5 16 SILVACO 132 VWF User s Manual Defining a New Experiment Tutorial tjlx2545 Silvaco COM tutorial_01 Extract a design parameter extract name gateox thickness oxide mat occno 1 x val 0 05 vt adjust implant implant boron dose 9 5e11 energ depo poly thick 0 2 divi 10 from now on the situation is 2 D energy etch poly left pl x 0 35 Name Block Tye Value T fdose implant 9 5e 11 Figure 5 17 Defining Another Split Variable on the Same Line Select energy as the second split parameter from the list of shown parameters After this the Deck editor should look as in Figure 5 18 In this example we will vary dose and energy of the threshold voltage adjust implant to study how these parameters influence the threshold voltage of the device SILVACO 133 VWF User s Manual Defining a New Experiment Tutorial tjIx2545 Silvaco CO
266. u can choose between Berkeley DB spooling and Classic spooling method Please choose a spooling method berkeleydb classic or berkeleydb gt gt Hit lt RETURN gt to continue gt gt The Berkeley DB spooling method provides two configurations Local spooling The Berkeley DB spools into a local directory on this host qmaster host This setup is faster but you can t setup a shadow master host Berkeley DB Spooling Server If you want to setup a shadow master host you need to use Berkeley DB Spooling Server In this case choose a host with a configured RPC service The qmaster host connects through RPC to the Berkeley DB This setup is more fail safe but results in a potential security hole RPC communication as used by Berkeley DB can be easily compromised Please only use this alternative if your site is secure or if SILVACO 276 VWF User s Manual Installation using the Traditional Method Queuing VWF On The Oracle SUN Grid Engine Open Grid you are not concerned about security Check the installation guide for further advice on how to achieve fail safety without compromising security Do you want to use a Berkeley DB Spooling Server y n n gt gt n Hit lt RETURN gt to continue gt gt Berkeley Database spooling parameters Please enter the Database Directory now even if you want to spool locally Default var opt GRID default spool spooldb gt gt Hit lt RETURN gt to continue gt gt
267. u to run simulation jobs on a cluster of workstations DRMAA stands for Distributed Resource Management Application API and defines a standard to interface a grid computing facility The DRMAA queuing system can be used both in file mode and in database mode You must select this mode if you want to utilize a grid computing environment This version of VWF supports two flavors of cluster systems One is the open source product Open Grid Scheduler OGS and the other is the commercially available Load Sharing Facility LSF Note There is a history of open source grid software supported from VWF The formerly open source package called Sun Grid Engine is no longer in the open source Instead a commercial product called Oracle Grid Engine OGE which is based on the Sun Grid Engine is available from Oracle Additionally there is the Open Grid Scheduler which is also based on Sun Grid Engine but is available in the open source Note VWF supports all three flavors the original 6 2u5 version of Sun Grid Engine the newer Oracle Grid Engine and the Open Grid Scheduler The VWF tar package contains a version of the Open Grid Scheduler This is available from the common sub directory of VWF Please consult the installation instructions given in the Appendix B Queuing VWF On The Oracle SUN Grid Engine Open Grid Scheduler on how to install an Open Grid Scheduler cluster system SILVACO 29 VWF User s Manual Virtual Wafer Fab SIL
268. ue gt gt 8 Add submit host with the command qconf sh lt hostname gt or use gmon GUI to add a submit host SILVACO 286 VWF User s Manual Submitting Jobs Queuing VWF On The Oracle SUN Grid Engine Open Grid B 5 Submitting Jobs These instructions are a guide on what settings are necessary to submit jobs directly to a Grid Engine cluster You don t need extra commands to use Grid Engine from within VWF Before proceeding please make sure Grid Engine has been installed as described above and that you are able to interactively run jobs on the grid To use Grid Engine please follow these steps 1 Login to one of the submit hosts of your Grid Engine cluster by using telnet ssh or rsh Make sure you have the DISPLAY variable set to point to your workstation from where you logged into the submit host If you have several submit hosts it does not matter which host you choose to run VWF If your workstation is actually configured to be a submit host you can skip this step 2 Start VWF The main VWF screen should show after a short delay If it doesn t please verify that VWF is available on your chosen submit host and double check the DISPLAY setting 3 From the VWF main screen select Edit Preferences A dialog as shown in Figure B 11 will appear The left pane of this dialog displays a tree with various settings Go to the Grid setting Preferences Toolbars Shortcuts Breadcrumbs Customize Toolbars gt
269. ues Here five target values corresponding to the five measured trench depths as given in Table 6 1 were entered The middle part of the worksheet pane shows the target script This script is executed after all simulations for all combinations of target values were run The supported script language is JavaScript When the script is run there are several pre defined variables that can be accessed e response is an array that contains the simulated target values e target is an array that contains the target values entered at the top of the worksheet pane The order of how the array is populated follows the order of how target values were entered into the worksheet The first value here 51000 is stored in target 0 the second value 70000 is stored in target 1 and so forth up to target 4 as the last entry which contains a value of 87000 The same ordering is also applied for responses so that the value stored in response 0 corresponds to the simulation result for a mask width of 2 During execution the target script must define a variable called result This variable is given back to the optimizer return targets in Figure 6 1 In this example result is an array with a length equal to that of target This is suitable for the used Levenberg Marquardt optimizer Other optimizers like for example the genetic optimization algorithm will require a scalar result value instead SILVACO 218 VWF User s Manual Optimization E
270. ulating only sub branches of the tree and reusing outputs of one branch as input for another the total execution time of an experiment can be drastically reduced You can think of such an evaluation as a multi leveled evaluation with levels spanning vertically between split parameters in the split tree In the example shown in Figures 3 60 and 3 61 the first level only includes the top of the tree The simulated deck fragment is the deck code from the beginning up to but excluding the first split parameter called diffus time The second level would reach from diffus time up to and including diffus temp Please note the rendering of thick and thin nodes on this level indicating that both parameters are on a single line or on a non splittable portion of deck The third and last level reaches from one line below diffus time to implant energy Again thick and thin nodes indicate that the two parameters are on the same line of deck SILVACO 84 VWF User s Manual Main GUI components Using the VWF GUI v tjlx2545 Silvaco COM vwfex02 jos Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status m Not Run 4 Queued 4 Running u Aborted m Failed 4 Missing Result u Finished Root sltcoenuNe diffus time diffus temp implant dose Hyouoouoeee ee eae ee oo oo oo o oo oo fimplantenergy Running Free space 13 4 GB VWF Copyright 1984 20
271. unctionality in any way SILVACO 263 VWF User s Manual Queuing VWF On The Oracle SUN Grid Engine Open Grid Open Grid Scheduler Installation with the GUI Installer bd Grid Engine 2011 11p1 Installer GRID ENGINE JMX configuration JMX port 6446 Enable SSL server authentication y Enable SSL client authenticatior Path to the keystore Keystore password Retype password Heip Previous ouit Figure B 5 OGS Installation JMX Configuration Clicking Next will bring you to the spooling configuration screen as shown in Figure B 6 You don t to change anything on this screen 264 VWF User s Manual SILVACO Open Grid Scheduler Installation with the GUI Installer Queuing VWF On The Oracle SUN Grid Engine Open Grid bd Grid Engine 2011 11p1 Installer Spooling configuration GRID ENGINE Heip Qmaster spool directory Global execd spool directory Spooling method Classic Berkeley db build grid ogs default spool qmaster fbuild grid ogs default spool Berkeley db spooling server Berkeley db host Db directory uild grid ogs default spool spooldb Browse Browse Browse Previous Oc Figure B 6 OGS Installation Spooling Configuration Cl
272. using an older version of VWF There is also no way of downgrading a previously upgraded database If you want to access the data using an older version of VWF you must use the VWF version which actually corresponds to the database schema If there is an error during an upgrade and you want to go back use the vwf_restore utility to restore the state of the database to when you first ran the upgrade Please note that as a safety measure the restore utility does not overwrite any existing data in your system Therefore you must manually remove both the database using SRDB and the simulation files before a restore will succeed Below the output of the SRDB utility is shown for the case where you need to upgrade your system over several schema versions As an example a database called vwf_v2 is upgraded from version 2 to version 7 SRDB lannachn gt upgrade vwf_v2 VWF 2 7 LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid lsf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build sil vaco lib support i386 linux Use CONNECT or CREATE DATABASE to specify a database LIBRARIES build silvaco lib firebird 1 5 2 R x86_64 linux lib build silvaco lib firebird 1 5 2 R x86_64 linux build grid lsf 7 0 linux2 6 glibc2 3 x86_64 lib usr lib lib usr openwin lib build silvaco lib support x86_64 linux build sil v
273. v n v 5 324498928e 11 5 876287818 n v n v 1 2691351484e 12 12 824925184 n v n v 1 0615134942e 12 12 621185184 n v n v 1 3928837151e 12 11 197377443 n v n v 5 6033969177e 11 13 43210876 n v n v 5 7507794426e 11 9 0464788675 n v n v z T View all results l Running jo Free space 590 2 MB VWF Copyright SILVACO Inc d Figure 6 19 Optimization Running SILVACO 201 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF When the View all results box at the bottom left corner is not checked only the selected target is shown in the Results pane Once the box is checked all remaining extracted values responses are shown This is shown in Figure 6 20 For the response named sheet cond v bias a small icon is shown instead of a value This is because this response is a vector and not a scalar Double clicking on the icon will open another window displaying the vector see Figure 6 21 File Edit Experiment Tools Help bd lannach opt_ga Optimization Genetic Algorithm 10060 i gt m Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs implant dose implant energy nwt cost unteox raj n sheet rmo ld sheet tho chan suf cone sheet cond v bias mian n v niv n v niv 100 163 n v nv n v niv
274. var opt GRID gt gt Your SGE_ROOT directory var opt GRID Hit lt RETURN gt to continue gt gt 5 Set up the TCP IP services for the Grid Engine software Grid Engine TCP IP communication service GI The port for sge_qmaster is currently set as service sge_qmaster service set to port 536 Now you can set change the communication ports by using the gt shell environment lt You can also configure it through a network service which is configured in local gt etc service lt gt NIS lt or gt NIS lt and add an entry in the form sge_qmaster lt port_number gt tcp to your services database Make sure you use an unused port number Do the following to configure the Grid Engine communication ports e Use the gt shell environment lt 1 e Use a network service like gt etc service lt gt NIS NIS lt 2 default 2 gt gt Hit lt RETURN gt to continue gt gt Grid Engine TCP IP service gt sge_qmaster lt Use the service sge_gqmaster for communication with Grid Engine Hit lt RETURN gt to continue gt gt Grid Gl ngine TCP IP communication service The port for sge_execd is currently set as service sge_execd service set to port 537 Now you can set change the communication ports by using the gt shell environment lt You can also configure it through a network service which is configured in local gt etc service lt gt NIS lt or gt NI
275. w two examples are given one for running a filemode example and one for running a database example Finally a script is shown which allows to sequentially run several experiments 7 1 1 Running a Filemode Experiment in Batch Mode To run a filemode experiment in batch mode you will first need to create an experiment using the GUI You can do so by running the GUI in filemode and then start with a pre defined example or create a new one from scratch After the experiment was created please exit the GUI and open a command window shell Below the output of an example JavaScript script called run_exp_filemode js is shown thomasb lannach vwf js run_exp_filemode js exec site alpha lib vwf_js 2 10 5 R x86_64 linux vwf_js exe run_exp_filemode js ID 1 type jobQueued message ID 2 type jobQueued message ID 3 type jobQueued message ID 1 type experimentStarted message ID 1 type jobRunning message ID 2 type jobRunning message The output indicates that the experiment was successfully opened and started that some jobs have been queued and that others are already running As the experiment progresses jobs will finish and others will be started until all jobs of the experiment have finally completed The console output will indicate the progress as follows ID 2 type jobFinished message ID 3 type jobRunning message ID 1 type jobFinished message ID 3 type jobFinished message status finished
276. wn in Figure 6 16 will open Here the various settings of the chosen optimization algorithm can be changed Every optimizer will have different settings to tune For instance the shown genetic algorithm type optimizer offers settings Population Size or Mutation Probability The optimizer settings are not to be confused with the parameter definition above In the parameter definition you decide which parameters are varied whereas the settings influence how the parameters are varied and how the optimization proceeds For instance the mentioned population size parameter has an impact on how many simulations can be run at the same time in parallel The value of 50 as shown here will result in 50 simulations being queued and simulated When the simulations are finished the optimizer retrieves the results and chooses 50 more simulations until a truncation criterion is finally reached Therefore it can be noted that the population size should not be set to a too small value For instance if the population size were reduced to a value of 2 then only two simulations would be carried out at a time even if you have a computing cluster with 50 or more CPUs available The optimal values for the settings strongly depend on the situation at hand and need to be tailored to your specific needs Sensible default values are given which allow you to start an experiment right away with the possibility to tune this at a later time The button Use Settings from
277. xample Advanced Calibration Task Optimization in VWF You can decide to optionally define a scalar variable called cost This variable will characterize the quality of one iteration step in terms of deviation of measurement from simulation If the cost variable is not defined in the script a default implementation is used which computes a root mean square over all deviations for all entered target values bd export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help Lal olle Description Resources Deck Parameters Setup 5 70000 10 80000 17 86000 20 87000 B 4 a a 6 3 8 a a a al m target M var result new Array target length print_console target target if target length response length throw length of target and response not equal var cost 0 0 for var i 0 i lt response length i print_console resp i response i print_console target i target i var diff response i target i print_console diff diff var relErr response i target i target i 100 0 print_console relErr relErr result i relErr aft 0 Error s 0 Warning s Ln 27 Col 1 Script target activated Finished VWF Copyright SILVACO Inc Figure 6 3
278. xperiment Tools Help Iez e ar oe Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet enka l a diffus tem a 5 implant dose a a a a rT implant energy Preparing VWF Copyright 1984 2011 SILVACO Inc Figure 3 34 View at Zoomed in Tree You can decide to hide parts of the tree by folding away a sub tree The folding functionality is invoked by holding down the SHIFT key and left clicking on the node you want to fold The function is realized as a toggle switch so that a once folded tree can be unfolded again by SHIFT left clicking on the very same node again Figure 3 35 displays the tree from Figure 3 33 with the two outer most nodes of the di f fus time parameter folded away This is also visually indicated by a small triangle shape right below the node SILVACO 63 VWF User s Manual Main GUI components Using the VWF GUI rc v tjlx2545 Silvaco COM vwfex02 5 File Edit Experiment Tools Help MEA Description Resources Deck Tree Worksheet Jobs SplitPlot Worksheet Fragment Status Nal El m Not Run 36 4 Queued 0 Running 0 Aborted ie Root m Failed 0 3 Missing Result O u Finished ie 36 n diffus time diffus temp implant dose E E E E E E implant energy Preparing O VWF Copyright 1984 2011 SILVACO Inc 4 Figure 3 35 Tree with folded Sub Trees Fo
279. y installed software even after the untar operation has finished In case you want to revert to the state before installation of this package you need to copy the whole install tree into a separate location before you start the untar In the following example the contents of the VWF TAR file are untarred into the build silvaco directory root lannach root cd build root lannach build mkdir silvaco root lannach build cd silvaco root lannach silvaco tar xvzf 12113 vwf 2010 00 rh64 tar gz bin acroread bin dbinternal bin deckbuild bin ghostprint bin vwft bin maskviews bin sedit bin sflm bin sflm_access bin sflm_monitord bin showid bin sipc bin gbak bin gsec bin isql bin fbguard bin fbmgr SILVACO 15 VWF User s Manual Installing the VWF TAR file Installation bin firebird bin smd5sum bin srdb bin vwf_server bin vwf_upgrade bin vwf_backup bin vwf_restore bin spayn bin sencrypt The output of the tar command was truncated Many more files as shown here will be displayed on the screen SILVACO 16 VWF User s Manual VWF Modes Installation 2 3 VWF Modes 2 3 1 File Mode This is the simplest way of running VWF A big advantage of this mode is that no extra installation steps are necessary A disadvantage of this mode however is that sharing data with other users of your department or company may become slightly more difficult as you need to put the files
280. your vwf_server process Note The location of where the log files are stored can be configured See Section 2 3 2 Database Mode for details There are also log files for the vwf_daemon process which can be found in the tmp vwf_logs directory In case there was an error sourcing your startup files the beginning of the vwf_server log file will look as follows Sourcing cshre setenv Syntax Error ERROR sourcing cshrec Above citation from the log file indicates that there was a problem in sourcing the script Note that failing to source the script need not necessarily result in a failing startup of the background process Other symptoms can be that as soon jobs are being executed they immediately fail as certain environment variables are missing SILVACO 301 VWF User s Manual Dealing with Error Scenarios Recommended Practice D 4 6 Error Message when Logging into the Database System When you see an error as shown in Figure D 1 check the setting of Execution host in the preferences panel It is important that the local host radio button is ticked if you are running VWF in local mode all simulation files kept locally Database login CONNECT ISSUE vwf VwfGlobalsException MSG Silvaco LibSipc Exception occurred comment cannot resolve nameservice corbaname myHost CORBA SystemException TRANSIENT minor 1096024066 Verify that vwf_daemon is running on host my Host or check execution host settin
281. zation in VWF Change the name of a script description Figure 6 10 shows how the one line description of the script can be changed by using the third button from the left WY export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt File Edit Experiment Tools Help Jair ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs Current script New fThisissciptili sil cues 0 Error s 0 Warning s Script scriptl activated Ln 3 Col 20 Ready Finished O VWF Copyright SILVACO Inc Figure 6 10 Change Description of Script SILVACO 192 VWF User s Manual Defining Optimizer Target and Settings Optimization in VWF Deleting a Script Figure 6 11 shows the dialog which opens when you click on the trash icon fourth from left You can decide to cancel the operation or to select Ok in which case the script is removed WY export datal thomasb vp_etch_2 experiment xml Optimization Levenberg Marquardt Ox File Edit Experiment Tools Help lIe ole Description Resources Deck Parameters Setup Worksheet Results Graphics Jobs 2 Do you really want to delete this script 0 Error s 0 Warning s Ln 3 Col 20 Script scriptl activated Ready Finished O VWF Copyright SILVACO Inc Figure 6 11 Deleting a Script SILVACO 193 VWF User s M

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