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User Manual MP113E - Physik Instrumente

1. 5 General Safety Instructions esses entente nennen 5 Organizational Measures essei eene nnne enn snnt senten nnns 6 2 1 Intended Use The M 5x1 is a laboratory device as defined by DIN EN 61010 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants Based on its design and realization the M 5x1 is intended for positioning adjusting and shifting loads in one axis at various velocities The M 5x1 is not intended for applications in the field of medical and food technology industrial production or in other areas in which a failure would cause considerable risks to human beings or the environment The M 5x1 is intended for horizontal or vertical mounting For the load limits with vertical mounting see General Notes on Installation p 19 The intended use of the M 5x1 is only possible in a completely assembled and connected state The M 5x1 must be operated with a suitable controller p 13 The controller is not included in the scope of delivery of the M 5x1 2 2 General Safety Instructions The M 5x1 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the M 5x1 Only use the M 5x1 for its intended purpose and only use it if it is in a good working order gt Read the user manual Immediately eliminate any f
2. ssssssssssseeee 60 10 1 5 Reference Point Switch Specifications sess 60 p MED PII ED 61 10 2 1 M 5x1 Stage eee sedes et rider Ri ed rat e de n dde ded 61 10 2 2 Hole Pattern of the Moving Platform of the M 5x1 62 10 2 3 M 592 10 Adapter Bracket sssssseeee 63 10 2 4 M 500 206 Adapter Plate xrrnnnnnnrrnnnnnnvrnnnnnnvrnnnnnnvrnnnnnnrrnnnensrrnnennn 64 10 2 5 M 590 00 Three Point Support Two Part ssssssssssss 65 10 3 Pin Assignment rediere eR Le pr n REPRE 67 10 3 1 Sub D m 15 Controller Connection sss 67 10 3 2 M8 Power Supply Connector m sse 68 Old Equipment Disposal 69 EU Declaration of Conformity 7 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual see 1 Symbols and Typographic Conventions sssssssssseseeeeeen nee 1 Mem 3 a WIIsT C 3 Other Applicable Documents ssssssssssseseeseseeee entente snnt enne 3 Downloading Manuals ertt torrent reu minkende nece RE oae 4 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the M 5x1 It assumes that the reader has a fundamental understan
3. Figure 3 Product Labeling 1 Risk of crushing warning sign 2 Manufacturer s logo 3 CE conformity mark 4 Stage model 5 Serial number 6 Manufacturer s website Position numbers 2 to 6 on the front side of the stage M 5x1 Stages MP113E Version 1 0 0 11 3 Product Description P I 3 3 Scope of Delivery Me feom O Stage according to order p 7 Screw set for attaching the stage load and mounting adapters Four M4x16 A2 hex head cap screws ISO 4762 Four M4x30 A2 hex head cap screws ISO 4762 Four M6x30 A2 hex head cap screws ISO 4762 Allen wrench AF 3 DIN 911 Allen wrench AF 5 DIN 911 Sub D 15 motor cable m f 3 m User manual this document in printed form Only with the models M 5x1 DD1 DD2 EC PG1 PD1 KO50B0003 Adapter for the power supply connection barrel connector to M8 4 pin connector 12 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 4 Accessories Motor cable 10 m Sub D 15 pin m f M 500 206 Adapter plate for mounting H 206 Hexapods on M 511 M 521 and M 531 stages Material Al Three point support for mounting M 505 M 510 M 511 M 521 and M 531 stages on honeycomb tables etc metric and inches Material Al mass 0 4 kg Consisting of Adapter plate wide M59000001 Adapter plate narrow M59000002 Adapter bracket for vertical mounting of M 511 M 521 and M 531 stages Material Al mass 1 5 kg To order c
4. yaw 25 35 35 urad Straightness flatness 1 1 1 1 1 um per 100 mm Velocity 50 100 100 6 20 mm s max M 5x1 Stages MP113E Version 1 0 0 57 10 Technical Data PI M 5x1 model DD1 EC PD1 DG1 281 Unit Tole DD2 PG1 rance Mechanical properties Thread pitch of 2 2 2 2 2 mm recirculating ball screw Gear ratio B 28 12 29 6 1 Load capacity 1000 max Push pull force 80 max Permissible lateral 200 max force Drive properties Motor type DC motor Brushless DC motor DC gear 2 phase with PWM DC motor with PWM motor stepper control with PWM control motor control Motor resolution 6400 steps re v Guiding Precision linear guiding rails recirculating ball bearings Operating voltage 24 PWM 24 PWM 24 PWM DG1 24 V 0 to 12 PG1 24 PWM Motor power 30 60 30 3 5 W nominal Torque 80 70 70 5 150 mNm nominal Reference point and Hall effect Hall effect Hall effect Hall effect Hall effect limit switches Miscellaneous Operating temperature 10 to 50 20to0 65 20t065 20t065 20t065 C range Material Al black anodized Mass 5 M 511 6 1 M 521 7 2 M 531 kg 5 Connector Sub D 15 pin 3 m cable incl M8 4 pin models DD1 DD2 EC PG1 and PD1 58 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 10 Technical Data M 5x1 model DD1 EC PD1
5. 00 three point support two part available as an optional accessory p 13 For attaching the M 590 00 three point support to the M 5x1 Four M6x30 screws in the scope of delivery Allen wrench AF 5 in the scope of delivery For attaching the M 590 00 three point support to the honeycomb plate Four M6 screws of suitable length not in the scope of delivery see M 590 00 Three Point Support Two Part p 65 for the dimensions Suitable tools for fastening the screws Attaching the stage to a honeycomb plate 1 Attach the two parts of the M 590 00 three point support to the M 5x1 a b Place the two adapter plates on the honeycomb plate or on another even clean and safe surface Align the two adapter plates on the surface approximately in the position of the mounting holes a to d in the base body of the stage see the figure of the individual parts to be connected Place the stage on the two adapter plates so that the holes a to d each approximately overlap Align the two adapter plates so that the holes a to d each precisely overlap Completely screw in M6x30 screw into each of the holes a to d of the stage 2 Attach the two parts of the M 590 00 three point support to the honeycomb plate a b C Place the stage to which the two adapter plates are attached on the honeycomb plate Align the stage so that the holes e to h in the honeycomb plate and the three point support each overlap see figure of
6. 5 Brushless Motor The M 5x1 EC models are equipped with a brushless DC motor The motor is electronically commuted and thus very low wear 3 6 6 Integrated PWM Amplifier The M 5x1 DD1 DD2 PD1 and EC models with direct drive are equipped with a PWM amplifier ActiveDrive concept The motor and PWM amplifier are installed in a common case and thus optimally integrated and shielded The PWM amplifier only receives the control signals from the controller whereas the supply voltage is provided via an external power supply The ActiveDrive concept allows a high motor power and dynamics with a low loss of power The M 5x1 PG1 models with DC gear motor are only equipped with a PWM amplifier for compatibility reasons 16 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking M 5x1 Stages Unpack the M 5x1 with care Compare the contents against the items covered by the contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Keep all packaging materials in case the product needs to be returned MP113E Version 1 0 0 17 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation sasnrernnrrnnnrrnnnnvnnnnnvnnerrnnnnrnnannvnnnnnnnnnrreannrnnsnnnenenrenenn 19 Attaching the M 5x1 to a Surface msrnnannvnnonvvo
7. DG1 281 Unit Tole DD2 PG1 rance Recommended C 863 C 863 C 863 C 863 C 663 controller C 884 C 884 C 884 C 884 Bidirectional repeatability for versions with linear encoder Max 0 85 A phase 400 full steps rev motor resolution with C 663 stepper motor controller Ask about custom designs 10 1 2 Maximum Ratings M 5x1 Stages The M 5x1 stages are designed for the following operating data Maximum Power Consumption M 5x1 281 U 0 85 A phase MP113E Version 1 0 0 59 10 Technical Data P I 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the M 5x1 M5xi model DD1 DD2 DG1 PD1 PG1 EC 2S1 Area of application For indoor use only Maximum altitude 2000 m Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Degree of protection IP40 according to IEC 60529 10 1 4 Limit Switch Specifications Magnetic Hall effect sensor Supply voltage 5 V GND Signal output TTL level Signal logic High active The signal level changes when passing the limit switch Normal motor operation low 0 V Limit switch reached high 5 V 10 1 5 Reference Point Switch Specifications Magnetic Hall effect sensor Supply voltage 5 V GND Signal output TTL level Signal logic The signal level changes when passing the limit swi
8. Subject to change without notice This manual is superseded by any new release The latest release is available for download p 4 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual sse 1 1 2 Symbols and Typographic Conventions ssssseeeeneeen 1 1 3 BISTRO DURER 3 1 4 FIGUTGS nedre e w ia 3 1 5 Other Applicable Documents sess 3 1 6 Downloading Manuals sese nnne nnne 4 2 Safety 5 2 1 Intended USE cider t rds e es utu o net dc C enr d rae bae 5 2 2 General Safety Instructions ssssssssssseseseeeeenee enne 5 2 3 Organizational Measures ussssssssssssseseeeeeeee nennen entren nennen nnns 6 3 Product Description 7 3 1 Model OVervieWw r raranununanunununununununununununununununununununnnunnnunnnununununununununununnnununununnnnne 7 3 2 Product m 9 3 2 1 QNI MCMLI 9 3 2 2 Product Details rrrrornrrrnrnnnnrronnrvnnrannnnnanernnrnnnnnnnnnevernnnvnnunnnenesnennnne 10 3 2 3 Product Labeling eeeeeeeene enne 11 3 3 Scope of Delivery sssssssssssssessssseeenennen nennen nnne nennen sinn snnt 12 3 4 AGGOSSOLIGS jure nrecvi cv wr Er reda da cs endene FE FERE gerade a en d raw ud de P FER Y edi 13 3 5 Suita
9. drive NOTICE E Wear from manually moving the moving platform Manually moving the moving platform increases wear in the case of stages with a gearhead gt With the M 5x1 DG1 and PG1 models only move the platform manually if there is no other possibility for motion gt Only install and operate the multi axis system after you have read and understood the user manuals of all components of the multi axis system gt If you require special mounting adapters contact our customer service department p 55 30 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 2 Setting Up an XY System NOTICE Screws that are too long Screws that are inserted too deeply can damage the lower stage gt Observe the depth of the mounting holes in the moving platform of the lower stage gt Only use screws of the correct length for the respective mounting holes Designations in these instructions Lower stage Forms the basis of the multi axis system X axis is attached to a surface Upper stage Forms the Y axis of the multi axis system is attached to the lower stage rotated by 90 Figure 10 Example XY system consisting of two M 511 stages M 5x1 Stages MP113E Version 1 0 0 31 5 Installation P I Figure 11 Example Setting up an XY system consisting of two M 511 stages 1 Lower stage with a d M4 mounting holes in the platform 2 Upper stage moving plat
10. read and understood the user manual of the used controller You have read and understood the manual of the used PC software The controller and the required PC software have been installed All connections on the controller have been set up see user manual of the controller the stage is connected via the motor cable M 5x1 Stages MP113E Version 1 0 0 43 6 Start Up P I Starting up the stage 1 Models M 5x1 DD1 DD2 PD1 PG1 and EC only Connect the power cord of the power supply with the power socket 2 Start up the controller see user manual of the controller Configure the controller during the start up using the PC software for the used stage see user manual of the controller and of the PC software If you use a controller from PI Select the entry in the stage database that precisely fits the used stage model p 45 f you use a controller from another manufacturer Enter the parameters that precisely fit the used stage model in the corresponding PC software see the overview of the operating parameters for DC motor controllers p 45 or stepper motor controllers p 46 3 Start a few motion cycles for testing purposes see user manual of the controller 44 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 2 1 M 5x1 Entries in the Stage Database of PI For PI controllers you can select the connected stage from a stage database in the corresponding PC softwa
11. the individual parts to be connected Completely screw an M6 screw into each of the holes e to h of the three point support 3 Check that the stage fits on the honeycomb without backlash 26 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Affixing the Load to the M 5x1 NOTICE Impermissibly high load on the stage ad An impermissible high load interferes with the motion of the moving platform and can damage the stage gt In respect to the mass and mounting type of the load observe the maximum permissible forces that are allowed to act on the moving platform according to the specification p 57 NOTICE l Screws that are too long Screws that are inserted too deeply can damage the M 5x1 gt Observe the depth of the mounting holes in the moving platform p 62 gt Only use screws of the correct length for the respective mounting holes Prerequisites You have read and understood the general notes on installation p 19 lt You have properly attached the stage to a surface p 21 Y The stage is not connected to the power supply and the controller v You prepared the load so that it can be affixed to the mounting holes on the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast two points are provided for affixing the load to th
12. the upper stage fit without backlash 38 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 5 Connecting the Motor Cable to the M 5x1 Prerequisites v You have read and understood the general notes on installation p 19 Y The motor cable is not connected to the controller Tools and accessories Suitable motor cable from PI e g Motor cable C 815 38 3 m Sub D 15 pin m f in the scope of delivery p 12 C 815 83 motor cable 10 m Sub D 15 pin m f available as optional accessory p 13 Connecting the motor cable to the M 5x1 1 Connect the connector f of the motor cable to the Sub D 15 pin panel plug m of the stage 2 Secure the connector f with the two integrated screws against being unintentionally pulled out of the stage 5 6 Connecting the Power Supply to the M 5x1 Connecting a power supply is only necessary with the models M 5x1 DD1 DD2 EC PG1 and PD1 Prerequisites v The power cord is not connected to the power socket Tools and accessories The included 24 V wide range input power supply for line voltages between 100 and 240 VAC at 50 or 60 Hz Alternatively Sufficiently dimensioned power supply that provides 24 VDC with a maximum of 2 0 ampere Supplied adapter for the power supply connector barrel connector to M8 4 pin connector f Alternatively Sufficiently dimensioned adapter Included power cord Alte
13. you can obtain from our customer service department 7 3 Cleaning the M 5x1 Prerequisites v You have disconnected the stage from the controller Cleaning the stage When necessary clean the stage surface with a towel lightly dampened with a mild cleanser or disinfectant gt Do not use any organic solvents 48 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting In this Chapter General Notes on Troubleshooting cccccceeeeeceeeeeeeeeeeeaeeeeeeeseeeeeeeeeeeaeeeeeeseenees 49 Possible Causes and Correction sssssssssssssseseeeeeen enne 50 Manually Moving the Moving Platform sarnvonnnnnnvvrnnnnnvvnnnnnnvvnnnnnnnnnnnnnnnnnnnsrrnnnnnsrsnnnne 52 8 1 General Notes on Troubleshooting For the M 5x1 DD1 and DD2 models the following applies A Risk of glare and irritation The linear encoder of the M 5x1 uses a class 2 laser according to DIN EN60825 1 2007 Technical data of the laser Lmax s 1 mW 42655 nm On delivery and if used according to the intended use of the M 5x1 the laser is fully shielded Laser radiation can exit from the laser only if M 5x1 is opened The laser beam can cause glare and irritation gt Do not open or disassemble the M 5x1 Contact our customer service department if there is any malfunction of the M 5x1 MP113E Version 1 0 0 49 M 5x1 Stages 8 Troubleshooting P I 8 2 Possib
14. 0 0 51 8 Troubleshooting P I 8 3 Manually Moving the Moving Platform NOTICE ad Wear from manually moving the moving platform Manually moving the moving platform increases wear in the case of stages with a gearhead gt With the M 5x1 DG1 and PG1 models only move the platform manually if there is no other possibility for motion INFORMATION In the following cases it can be necessary to manually move the moving platform Make mounting holes for M4 screws accessible in the base body of the stage Move the moving platform away from the outer limit switch in order to make the stage operational again Figure 16 Position of the spindle access cap removed 1 Motor cover 2 Side part front side 52 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting Prerequisites v The stage is not connected to the power supply and the controller Tools Allen wrench AF 3 in the scope of delivery Manually moving the moving platform 1 Remove the cap of the spindle access in the front face of the stage position see figure 2 Introduce the Allen wrench into the spindle access until you feel resistance 3 Rotate the Allen wrench as far as necessary Clockwise rotation Platform moves away from the motor cover Counter clockwise rotation Platform moves in the direction of the motor cover The rotary motion is transferred directly to the ball screw M 5x1 Stag
15. 18 M 592 10 adapter bracket M 5x1 Stages MP113E Version 1 0 0 63 10 Technical Data P I 10 2 4 M 500 206 Adapter Plate Dimensions in mm Note that the decimal places are separated by a comma in the drawings 58 4 6 114 Figure 19 M 500 206 adapter plate 64 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 5 M 590 00 Three Point Support Two Part Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 20 Wide adapter plate M59000001 M 5x1 Stages MP113E Version 1 0 0 65 10 Technical Data Figure 21 Narrow adapter plate M59000002 66 Version 1 0 0 MP113E PI M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Pin Assignment 10 3 1 Sub D m 15 Controller Connection 1 8 O pum 5 9 1 Figure 22 Sub D 15 m controller connection front view Models with DC motor DD2 Motor brake Input DD1 PD1 DG1 PG1 EC Internal DG1 motor Input DD1 DD2 PD1 PG1 Internal must not be connected EC Not connected DG1 Motor Input DD1 DD2 PD1 PG1 Internal must not be connected EC Not connected Input M 5x1 DD1 DD2 PD1 PG1 EC SIGN PWM sign M 5x1 DG1 Internal must not be connected M 5x1 Stages MP113E Version 1 0 0 67 10 Technical Data P I Models with stepper motor Motor phase 1A Motor ph
16. A 13 Suitable Gontrollers 2 c sa trt tarta va ta tavta rape ga tata nada es ana ed ddr uada s anao carae Tan 13 Technical Features eerte th ebd a enr qexh Ea een has eager a EE Ru a dv n a ERN eR dA 14 3 4 Model Overview Classification of the stages The stages of the M 511 M 521 and M 531 series are summarized under the designation M 5x1 in this manual All models are micropositioning stages with a ball screw They differ in terms of Travel range Drive type Presence of a motor brake Encoder type M 5x1 Stages MP113E Version 1 0 0 7 3 Product Description P I Drive type Brake Encoder type present DC motor Stepper Gear motor head analog Detailed model overview ore Product Name Number M 511 251 Precision Translation Stage 102 mm 2 Phase Stepper Motor M 511 DD1 Precision Translation Stage 102 mm DC Motor PWM Control Linear Encoder M 511 DD2 Precision Translation Stage 102 mm DC Motor PWM Control Linear Encoder Motor Brake M 521 DD1 Precision Translation Stage 204 mm DC Motor PWM Control Linear Encoder M 521 DD2 Precision Translation Stage 204 mm DC Motor PWM Control Linear Encoder Motor Brake M 521 DG1 Precision Translation Stage 204 mm DC Gear Motor Rotary Encoder M 521 EC Precision Translation Stage 204 mm Brushless DC Motor Rotary Encoder 8 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 3 Product Description order Produc
17. G WWW PI WS 5 Installation 1 If necessary Make the required mounting holes in the base body of the upper stage accessible Possible measures Temporary start up of the upper stage p 41 and commanding the platform to a suitable position Manually moving the moving platform p 52 2 Attach the upper stage to the adapter bracket Figure 14 Attaching the upper stage to the adapter bracket a Position the upper stage on the long surface of the adapter bracket as in the figure The stage lies on the inside of the bracket The motor cover of the stage faces the open end of the inside of the bracket i e upwards in the Z system The required mounting holes in the stage and the bracket overlap holes a to d in the above example b Completely screw in one M4 screw into each of the holes M 5x1 Stages MP113E Version 1 0 0 37 5 Installation P I 3 Attach the adapter bracket to the lower stage Figure 15 Attaching the adapter bracket to the lower stage a Position the adapter bracket on which the upper stage is attached as in the figure to the moving platform of the lower stage The open end of the short side of the bracket faces the motor cover of the lower stage The required mounting holes in the bracket and the lower stage overlap holes e to g in the above example b Completely screw in one M4 screw into each of the holes 4 Check that the adapter bracket and
18. MP113E M 5x1 Stages User Manual Version 1 0 0 Date 25 09 2013 PI This document describes the following micropositioning stages M 5x1 DD1 with ActiveDrive DC motor PWM linear encoder M 5x1 DD2 with ActiveDrive DC motor PWM linear encoder motor brake M 5x1 DG1 with DC gear motor rotary encoder M 5x1 EC with brushless DC motor rotary encoder M 5x1 PD1 with ActiveDrive DC motor PWM rotary encoder M 5x1 PG1 with DC gear motor PWM rotary encoder M 5x1 281 with 2 phase stepper motor x stands for travel range 12102 mm 2 204 mm 3 306 mm Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Telephon 49 721 4846 0 Telefax 49 721 4846 1019 E Mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PIG PIC PICMA PiLine PIFOCG PiezoWalk amp NEXACT NEXLINEG NanoCube NanoAutomation Picoactuator PInano amp 2013 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 25 09 2013 Document number MP113E MMa version 1 0 0
19. NANO POSITIONING WWW PI WS 5 Installation 5 2 Attaching the M 5x1 to a Surface INFORMATION The positive direction of motion is away from the cable exit side 5 2 1 Using a Surface with the Hole Pattern of the M 5x1 Base Body NOTICE Warping of the M 5x1 due to mounting on uneven surfaces Mounting the M 5x1 on an uneven surface can warp the M 5x1 Warping reduces the accuracy gt Mount the M 5x1 on an even surface The recommended evenness of the surface is lt 10 um gt For applications with great temperature changes Only mount the M 5x1 on surfaces that have the same or similar thermal expansion properties as the M 5x1 NOTICE Wear from manually moving the moving platform Manually moving the moving platform increases wear in the case of stages with a gearhead gt With the M 5x1 DG1 and PG1 models only move the platform manually if there is no other possibility for motion INFORMATION The M 5x1 can be attached to a surface with M6 screws or M4 screws Advantages when the stage is installed with M6 screws The holes for M6 screws are freely accessible in the delivery state M6 screws can absorb greater forces than M4 screws M 5x1 Stages MP113E Version 1 0 0 21 5 Installation P I Figure 5 Mounting holes in the base body of the stage 1 Mounting hole with counterbore for M6 hex head cap screw 2 Mounting hole with counterbore for M4 hex head cap screw 3 Moving platform in delivery state imp
20. activated In the case of stages with a motor brake The deactivation of the brake can cause unintentional motions of the stage Secure the stage against unintentional motions before you deactivate the brake by command 42 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 6 Start Up INFORMATION The maximum velocity for a stage with a stepper motor should be determined in the application If the commanded velocity is too high the stepper motor might stop without the controller detecting this condition INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side Controllers from PI fulfill this requirement as a result of the automatic direction sensing for reference moves to the reference switch INFORMATION For models with DC motors Unsuitable settings made to the servo control parameters can impair the performance of the M 5x1 The consequences of this can be expressed as follows Oscillations Imprecise approach of the position Settling time is too long gt Ifthe performance of the M 5x1 is not satisfactory check the settings for the servo control parameters of your controller 6 2 Starting up the Stage Prerequisites v You have read and understood the General Notes on Start Up p 41 Y For starting up with a load or in a multi axis system You have properly installed the stage p 29 You have
21. aeeeeaeeseeeeeseaeeetaeeeeaeeseerees 47 Performing a Maintenance Run rranovnnnnnvovnnnannnvnnnnannvnnnnnnnnnnnsannnnnnsannnnnnsannnnnnsannnnnn 47 Cleaning the M 5X1 e 48 7 1 General Notes on Maintenance NOTICE i Damage due to improper maintenance Improper maintenance can lead to misalignment and failure of the M 5x1 gt Only loosen screws according to the instructions in this manual 7 2 Performing a Maintenance Run Depending on the operating conditions and the period of use of the M 5x1 the following maintenance measures are required Maintenance run The maintenance run serves to distribute the lubricant that is present After 500 operating hours or at least after 1 year carry out a maintenance run over the entire travel range in order for the lubricant present to be equally distributed gt If you operate your stage continuously over only a small working range 2096 of the entire travel range perform a run across the entire travel range approximately every 2000 motion cycles Lubrication Under laboratory conditions the stage needs extra lubrication in exceptional cases only For continuous industrial use the lubrication intervals must be defined individually M 5x1 Stages MP113E Version 1 0 0 47 PI 7 Maintenance gt Do not lubricate the M 5x1 without consulting our customer service department p 55 gt To lubricate follow the instructions given in the maintenance manual which
22. artment p 55 The current versions of the manuals are found on our website Access to the manuals of Hexapod systems and electronics whose scope of delivery includes a CD is password protected The password is stored on the CD Download freely accessible manuals 1 2 3 4 5 Open the website http www pi portal ws Click Downloads Click the corresponding category e g M Hexapods Micropositioning Click the corresponding product code e g M 5x1 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium 4 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter tended Use sorses
23. as well as in the dimensional drawing p 62 2 Affix the load to the selected mounting holes in the moving platform using the Screws 3 Check that the load fits on the moving platform of the stage without backlash 28 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 Setting Up a Multi Axis System The M 5x1 can be used in multi axis systems Typical combinations XY system p 31 Z system p 33 XZ or XYZ combination gt For combination possibilities with other stages contact our customer service department p 55 Figure 9 Example of an XYZ system two M 511 DD1 stages one M 501 1PD Z stage 1 M 501 PD Z stage directly mounted 2 Upper stage here M 511 DD1 directly mounted 3 Lower stage here M 511 DD1 M 5x1 Stages MP113E Version 1 0 0 29 5 Installation E I 5 4 1 General Information on Setting Up a Multi Axis System NOTICE Impermissibly high load on the stages In a multi axis system also the stage used for the Y and or Z axis must be moved Impermissibly high loads interfere with the motion and can damage the stages gt Include the masses of the moved stages and the mounting adapters p 13 in the calculation of the load to be moved gt For all stages in a multi axis system Do not exceed the maximum permissible load gt When a stage is installed vertically make sure that the installed load is lower than the self locking of the
24. ase 1B m fi 3 C CS o Wergwem B i a LH 1 2 10 p quuemem 0 goeemem pp quemem pp goeemem p 5 ID chip for future use 13 Internal 14 Limit P positive limit switch Output GND Reference Output Limit N negative limit switch Output 10 3 2 M8 Power Supply Connector m Connecting a power supply is only necessary with models M 5x1 DD1 DD2 EC PG1 and PD1 2 4 1 3 Figure 23 Phoenix M8 panel plug front view 68 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal M 5x1 Stages In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany MP113E Version 1 0 0 69 PIEZO NANO POSITIONING WWW PI WS 12 EU Declaration of Conformity 12 EU Declaration of Conformi
25. aults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the M 5x1 M 5x1 Stages MP113E Version 1 0 0 5 2 Safety PI 2 3 Organizational Measures User manual Always keep this user manual available by the M 5x1 The latest versions of the user manuals are available for download p 4 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the M 5x1 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the M 5x1 after having read and understood this user manual Personnel qualification The M 5x1 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Overvi W scearon a a a d aa A aa a Ran ta dae aa 7 Product VIEW M MUTMT 9 lese moMBITDT I 12 ACC SSOTLIOS 2 ive epe teet ases cea M e d a aa eon dVusE qe aM EDU Enc ER RA a TURN EK NN AR
26. ble Controllers sssssese nnne nnnm nnnm nnns 13 3 6 Technical Features esses nnne en ennnnn nennen nennen asser sns 14 3 6 1 fero re TS RE ERE D m i 14 3 6 2 Limit Switches rrorrrrrnannonnnnrorronennannnannrnvrennensnnnannrnnvensansnnnnnnvnnnenne 14 3 6 3 Reference Point Switch eese 16 3 6 4 Motor Brake rrnrrrnnrnnrrannnnnnnernrnnnrnnnnnnssernnrnnnnnnnsnesnennnrnnnnsnenernennnnnnene 16 3 6 5 Brushless MOtr ccccccccecessessseececeeeceessseseeceeeseaneesseeeeeseeaeeneesees 16 3 6 6 Integrated PWM Amplifier esee 16 4 Unpacking 17 Installation 5 1 General Notes on Installation srrreronnrrrrrrnnrrrrrrnnrverrrnnvvrrrrnnrveerrnarnesrrnnrneerrnnnn 5 2 Attaching the M 5x1 to a Surface ssssssssssseeee eene 5 2 1 Using a Surface with the Hole Pattern of the M 5x1 Base Body 5 2 2 Using Adapters for the 25 mm x 25 mm Hole Pattern 5 3 Affixing the Load to the M 5x1 ssssssssssssssssssssese eene enne 5 4 Setting Up a Multi Axis System srrrernnnrrennrnnrverrnnnrvrrrrnnrrrrrrnnrneerrnnrnesrrnnrneernnnnn 5 4 1 General Information on Setting Up a Multi Axis System 5 4 2 Setting Up an XY System rrrsnvrnrrrarvrnrrssrnrnrrrrrnrnrrrrnnrnrrrsnnrnrsrsnnnne 5 4 3 Setting Up a Z System with an Adapter Bracket 5 5 Connecting the Motor Cabl
27. d is in the center of the platform Max push pull force Maximum force in the direction of motion Some stages may have higher forces but with limited lifetimes In the case of vertical mounting the specified value p 57 for models without a gearhead and brake only applies when the servo mode is on Incremental position Sensor encoder for capturing changes of position or changes sensor of angle Signals from the incremental position sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Controller C 863 11 DC Motor Controller MS205E User Manual C 663 11 Stepper Motor Controller MS208E User Manual C 843 DC Motor Controller PCI Board MS77E User Manual C 884 DC Motor Controller MS213E User Manual M 5x1 Stages MP113E Version 1 0 0 3 1 About this Document P I 1 6 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading Contact our customer service dep
28. ding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 4 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual A Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation M 5x1 Stages MP113E Version 1 0 0 1 1 About this Document p I NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning 1 Action consisting of several steps whose sequential order 2 must be observed Action consisting of one or several steps whose sequential order is irrelevant n List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual Ps 2 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the loa
29. e moving platform ideally three or four attachment points f you use locating pins to align the load You have made two to four locating holes in the load with 4 mm and a suitable tolerance for accommodating locating pins Tools and accessories Suitably long screws Options Atleast two M4 screws One M6 screw and at least one M4 screw M 5x1 Stages MP113E Version 1 0 0 27 5 Installation P I Suitable tools for fastening the screws Optional 2 to 4 locating pins for easy alignment of the load on the M 5x1 suitable for holes with 4 mm for tolerance data see figure of the holes in the moving platform locating pins not in the scope of delivery Affixing the load to the M 5x1 Figure 8 Holes in the moving platform of the M 5x1 1 M4 mounting hole depth 8 mm total of 27 2 Central M6 mounting hole depth 8 mm 3 Locating hole 4 mm H7 depth 5 mm total of 4 1 Align the load so that the selected mounting holes in the moving platform can be used for affixing it If you use locating pins to align the load a Insert the locating pins into the locating holes in the moving platform or the load b Place the load on the moving platform in such a way that the locating pins are inserted into the corresponding locating holes on the other side The arrangement of the mounting and locating holes in the moving platform of the M 5x1 as well as the tolerance data can be found in the corresponding figure
30. e to the M 5x1 ssssssssseseeeeneenes 5 6 Connecting the Power Supply to the M 5x1 ssssssseeeeeee Start Up 6 1 General Notes on Start Up reranrnnonrvnrnrrrnnnrnnnnnnnnnnrvnnnr renn nnnnrnnnnrrrrennnrnnnnnnnnennne 6 2 Starting up the Stage nee xerit enne NANENANE ge xa se neu panna Sea ann oe Y KU 6 2 1 M 5x1 Entries in the Stage Database of PI ssssssss 6 2 2 Operating Parameters of the Models with DC Motor 6 2 3 Operating Parameters of the Models with Stepper Motor Maintenance 7 1 General Notes on Maintenance sssssssssssseeeeee ener 7 2 Performing a Maintenance Run sse eene 7 3 Cleaning the M 5X1 iiec ett edet ertet aa aa edente etus ure Edda ge Troubleshooting 8 1 General Notes on Troubleshooting sssssseeeeeeeneens 8 2 Possible Causes and Correction ssssssssssseeeeneerene 8 3 Manually Moving the Moving Platform rnrrnnronnrrnnronnrrnnnnnnrrnnnnnnrrnnnrnnrnnnrrnnnnn Customer Service PIEZO NANO POSITIONING WWW PI WS 10 11 12 Technical Data 57 10 1 Sp cificaliOhs siete epi end er D eda nave ta aperta een pectori Eua 57 10 1 1 Data Table ei eee eee eit sede tendon en iade 57 10 1 2 Maximum Ratings sesan nennen 59 10 1 3 Ambient Conditions and Classifications ssssss 60 10 1 4 Limit Switch Specifications
31. es MP113E Version 1 0 0 53 PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 4 on our website M 5x1 Stages MP113E Version 1 0 0 55 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data In this Chapter 10 Technical Data lere qe E 57 Bec 61 PIN ciere 67 10 1 Specifications 10 1 1 Data Table M 5x1 model DD1 EC PD1 DG1 281 Unit Tole DD2 PG1 rance Motion and positioning Travel range M 511 102 4 M 521 204 8 M 531 306 12 mm Integrated sensor Linear Rotary Rotary Rotary encoder encoder encoder encoder Sensor resolution 0 02 um 4000 4000 2048 cts rev Design resolution 0 02 0 5 0 5 0 033 0 31 um typ Min incremental 0 1 0 5 0 5 0 1 0 1 um typ motion Unidirectional 0 1 0 5 0 5 0 2 0 2 um typ repeatability Backlash 0 2 1 1 1 1 um typ Pitch
32. form on the positive end of the travel range with a d mounting holes with counterbore for M4 hex head cap screws in the base body of the stage Holes that overlap during attachment are marked with the same letters Prerequisites v You have read and understood the General Notes on Installation p 19 Y You have read and understood the general notes on setting up a multi axis system p 30 v You accounted for the space required for cable routing free of kinks and in accordance with regulations The used stages are disconnected from the power supply and controller You have properly attached the lower stage to a surface p 21 32 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories Four M4 screws of suitable length from the scope of delivery of the upper stage When an M 5x1 is attached to an M 5x1 as in the figure above Four M4x30 screws Allen wrench AF 3 in the scope of delivery of the stages Setting up an XY system 1 If necessary Make the required mounting holes in the base body of the upper stage accessible Possible measures Temporary start up of the upper stage p 41 and commanding the platform to a suitable position Manually moving the moving platform of the upper stage p 52 Position the upper stage rotated by 90 on the moving platform of the lower stage see above figure Align the upper stage so that the required m
33. le Causes and Correction Reduced positioning Warped base body gt Mount the M 5x1 on an even surface accuracy The recommended evenness of the surface is 10 um When the M 5x1 is mounted If you move loads of over 10 N when the vertically The load exceeds M 5x1 is mounted vertically the self locking of the drive gt Use a stage with a motor brake M 5x1 DD2 or with a gearhead M 5x1 DG1 PG1 Increased wear due to small Carry out a maintenance run over the motions over a long period of entire travel range p 47 time Functional impairment Controller has been Controller from Pl after system replaced gt Load the parameters from the stage modification M 5x1 has been replaced database that correspond to the with another model combination of controller and M 5x1 model Controller from a third party supplier gt Check the operating parameters 50 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting Mechanical system Controller and or power gt Check all connection cables does not move no supply are not correctly gt Check the controller operating noise can be connected or defective gt heard If present Check the power supply of the stage When a PI controller is used Motion error The difference between the A motion error of the axis is current position and the commanded position present exceeds the specified maximum value in closed loop operati
34. lied Prerequisites Y You have read and understood the general notes on installation p 19 v You have provided a suitable surface for the required position and depth of the holes for accommodating the screws see Dimensions p 61 Four mounting holes are present Optimum M6 holes alternatively M4 holes The evenness of the surface is lt 10 um For applications with great temperature changes The surface should have the same thermal expansion properties as the M 5x1 e g surface made of aluminum Y You accounted for the space required for cable routing free of kinks and in accordance with regulations Y If you want to make the mounting holes in the base body of the M 5x1 accessible by manually moving the moving platform The stage is not connected to the power supply and the controller 22 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation M 5x1 Stages Tools and accessories Screws in the scope of delivery 4x M6x30 or 4x M4x30 Suitable screwdriver in the scope of delivery For M6 screws Allen wrench AF 5 For M4 screws Allen wrench AF 3 Attaching the stage to a surface with the hole pattern of the M 5x1 1 Align the stage on the surface so that the corresponding mounting holes in the stage and surface overlap If you use M4 screws make the mounting holes in the base body of the stage accessible Possible measures Temp
35. m a stage database in the supplied PC software see also M 5x1 Entries in the Stage Database of PI p 45 The values for the lower and upper limit of the travel range are selected in the stage database so that the limit switches cannot be approached with motion commands The controller furthermore calculates the dynamic profile during the motion so that the stage brakes in time before the end of the permissible travel range The stage can only reach the limit switch in exceptional cases e g with a very high velocity and or under high load For details see the user manual of the controller MP113E Version 1 0 0 15 3 Product Description P I 3 6 3 Reference Point Switch The stage is equipped with a direction sensing reference point switch that is located approximately in the middle of the travel range This sensor transmits a TTL signal that indicates whether the stage is on the positive or negative side of the reference point switch The commands that use the reference signal are described in the user manual of the controller and or in the corresponding software manuals 3 6 4 Motor Brake The M 5x1 DD2 models are equipped with a motor brake Stages with a motor brake are especially suited for vertical mounting The motor brake is activated and deactivated via the connected controller Controllers from PI activate the brake automatically when the servo mode is switched off For details see the user manual of the controller 3 6
36. n setting up a multi axis system p 30 v You accounted for the space required for cable routing free of kinks and in accordance with regulations The used stages are disconnected from the power supply and controller If you set up an XZ combination You have properly attached the lower stage to a surface p 21 v If you set up an XYZ combination You have properly attached the stages for the X and Y axis p 31 Tools and accessories Suitable adapter bracket available as an optional accessory p 13 M 592 10 when an M 5x1 stage is used as Z axis For attaching the Z axis to the adapter bracket Four M4 screws of suitable length from the scope of delivery of the upper stage When an M 5x1 is used as Z axis as in the figure above Four M4x30 Screws For attaching the adapter bracket to the lower stage Four M4 screws of suitable length from the scope of delivery of the lower stage When the M 592 10 adapter bracket is attached to an M 5x1 three M4x16 Screws Allen wrench AF 3 in the scope of delivery of the stage M 5x1 Stages MP113E Version 1 0 0 35 PI 5 Installation Setting up a Z system Figure 13 Example Setting up an XY combination of two M 511 stages 1 M 592 10 adapter bracket 2 Upper stage view of bottom side 3 Lower stage a f mounting holes Holes that overlap during attachment are marked with the same letter 36 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONIN
37. nnrrnannvnnnnnvnrnrrvnnnrnnnnnnenrrrennnrnnsnnnenennenenn 21 Affixing the Load to the M 5Xx1 usnenannrnnannvnnenvvnnnrnnannvnnnnnnnnnrrnannrnnennnnnenresnnrnnsnanensnnenenn 27 Setting Up a Multi Axis System essent nene 29 Connecting the Motor Cable to the M 5x1 sessssssssssseeeneeen eene 39 Connecting the Power Supply to the M 5x1 sesssssssseeeeeenen 39 5 1 General Notes on Installation NOTICE Unintentional changes in position with vertical mounting If the load exceeds the self locking of the drive when the stage is mounted vertically unintentional changes in the position of the moving platform occur Unintentional changes in position of the moving platform can damage the drive the load or the environment gt When a stage is installed vertically make sure that the installed load is lower than the self locking of the drive Stage with direct drive and stepper motor max 10 N Stage with gearhead max 80 N Stage with motor brake max 80 N gt Inthe case of vertical mounting use a stage with a motor brake DD2 or with a gearhead DG1 PG1 NOTICE Protruding screw heads Protruding screw heads can damage the M 5x1 gt Ensure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion M 5x1 Stages MP113E Version 1 0 0 19 5 Installation P NOTICE Cable break A cable break leads to a failu
38. on Motion errors can be caused for example by malfunctions of the drive or the position sensor of the stage 1 Read out the error code of the controller in the PC software If a motion error is present the error code 1024 is output Check your system and make sure that all axes can be moved safely Switch on the servo mode for the affected axis in the PC software For details see the user manual of the controller Moving platform has If you use a controller from PI triggered the inner limit 1 Switch on the servo mode for the affected switch p 14 axis again in the PC software Command an axis motion away from the limit switch in the PC software Moving platform has Manually move the moving platform away triggered the outer limit from the limit switch p 52 switch p 14 In the case of models The motor is overloaded by The motor skips steps The information on with a stepper motor an external load torque or by the current position is lost without the The mechanical system the mass to be driven with a controller recognizing this condition does not move any strong acceleration or delay Determine the maximum velocity for a more but produces an stage with a stepper motor in the operating noise application If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 55 M 5x1 Stages MP113E Version 1
39. ontact our customer service department p 55 3 5 Suitable Controllers The M 5x1 must be connected to a suitable controller The following controllers from PI are suitable for the operation of the M 5x1 Axes per Multiple controllers Drive type Controller PC interf DC motor C 843 20r4 Internal Yes separate boards PCI bus C 863 1 USB RS 232 Yes same interface daisy chain C 884 1to4 USB RS 232 Yes TCP IP Stepper C 663 1 USB RS 232 Yes same interface motor daisy chain PC software is included in the scope of delivery of controllers from PI The operation of the controllers is described in the corresponding user manuals M 5x1 Stages MP113E Version 1 0 0 13 3 Product Description P I 3 6 Technical Features 3 6 1 Encoder Linear encoder The M 5x1 DD1 and DD2 models are equipped with an optical linear encoder For the encoder resolution refer to the table in the Specifications section p 57 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drive such as nonlinearity backlash or elastic deformations cannot influence the measurement of the position Rotary encoder The M 5x1 PD1 PG1 DG1 and EC models are equipped with an incremental rotary encoder A rotary encoder is implemented at a rotating point in the drivetrain e g the motor shaft 3 6 2 Limit Switches 14 The M 5x1 is equipped with noncontact Hall effec
40. ontroller malfunction occurs gt If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion M 5x1 Stages MP113E Version 1 0 0 41 6 Start Up P NOTICE Damage if an incorrect controller is connected Connecting a stage to an unsuitable controller can cause damage to the stage or controller gt Connect a stage with DC motor to a DC motor controller only gt Connect a stage with stepper motor to a stepper motor controller only gt If you use controllers and software from other manufacturers check their technical data to make sure that they are suitable before starting up the stage NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the M 5x1 gt Do not exceed the operating voltage range p 59 for which the M 5x1 is specified gt Only operate the M 5x1 when the operating voltage is properly connected see Pin Assignment p 67 NOTICE Damage or considerable wear from high accelerations High accelerations can cause damage to or considerable wear on the mechanical system gt Stop the motion immediately if a controller malfunction occurs gt Ensure that the end of the travel range is approached at low velocity gt Determine the maximum velocity for your application NOTICE Unintentional motions after brake de
41. orary start up of the stage p 41 and commanding the platform to a suitable position Manually moving the moving platform p 52 Completely screw the screws into all mounting holes Check that the stage fits on the surface without backlash MP113E Version 1 0 0 23 5 Installation P I 5 2 2 Using Adapters for the 25 mm x 25 mm Hole Pattern plate with a hole pattern of 25b mm x 25 mm and M6 screws PI offers the M 590 00 two part three point support as an adapter see Accessories p 13 Figure 6 M 5x1 with adapter M 590 00 three point support on a honeycomb plate 24 Version 1 0 0 MP113E M 5x1 Stages 5 Installation PIEZO NANO POSITIONING WWW PI WS h Figure 7 Individual components to be connected with relevant holes 1 Stage here M 511 2 Wide adapter plate part of the M 590 00 three point support 3 Narrow adapter plate part of the M 590 00 three point support 4 Honeycomb plate with 25 mm x 25 mm hole pattern used holes emphasized a toh Holes for M6 screws Screws that overlap during attachment are designated with the same letters Prerequisites v You have read and understood the General Notes on Installation p 19 Y You have taken into account the space requirements for a kink free and correct cable routing M 5x1 Stages MP113E Version 1 0 0 25 5 Installation PI Tools and accessories M 590
42. ounting holes in the upper and lower stage overlap holes a to d in the above figure Completely screw in M4 screw into each of the holes Check that the upper stage fits without backlash 5 4 3 Setting Up a Z System with an Adapter Bracket NOTICE Screws that are too long Screws that are inserted too deeply can damage the lower stage gt Observe the depth of the mounting holes in the moving platform of the lower stage gt Only use screws of the correct length for the respective mounting holes INFORMATION gt If you use aZ stage for the Z axis e g M 501 PD follow the instructions in Setting Up an XY System p 31 for setting up the multi axis system M 5x1 Stages MP113E Version 1 0 0 33 5 Installation P I Designations in these instructions Lower stage X axis in an XZ combination Y axis in an XYZ combination The stage to which the upper stage is attached with an adapter bracket Upper stage Forms the Z axis of the multi axis system is attached in a vertical alignment to the lower stage with an adapter bracket Figure 12 Example XY combination consisting of two M 511 stages Lower stage M 592 10 adapter bracket Upper stage M4 screw OND gt 34 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 5 Installation Prerequisites v You have read and understood the General Notes on Installation p 19 Y You have read and understood the general notes o
43. re The appropriate operating parameters are thus loaded to the controller You can find a detailed description in the user manual for the controller or in the manual for the PC software used 6 2 2 Operating Parameters of the Models with DC Motor If you use a DC motor controller from a third party supplier it may be necessary to enter operating parameters to e the used stage Parameter vr ET itr lw fm fa fu GR E Limit 2000 2000 2000 2000 a a ae EN ONE acceleration Maximum mm s velocity Maximum 2500000 198666 204800 400000 counts s velocity Gear rato ratio Fo feei 6 1 EM 11 m resolution Limit switch Active high Active Active Active polarity high high high M 5x1 Stages MP113E Version 1 0 0 45 6 Start Up P I 6 2 3 Operating Parameters of the Models with Stepper Motor If you use a stepper motor controller from a third party supplier it may be necessary to enter operating parameters to adjust the used stage Holding current Operating current Holding current delay Max motor current Max acceleration Max velocity Max velocity Hardware properties Limit switch polarity Active high Full steps Max phase current bipolar steps revolution 46 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance c cccceccecceeeeeeeeeeeeeeeeeeeee
44. re of the stage gt Install the stage so that the cable is not bent or squeezed too severely during operation NOTICE Heating up of the M 5x1 during operation The heat produced during operation of the M 5x1 can affect your application gt Install the M 5x1 so that your application is not affected by the dissipating heat INFORMATION For optimum repeatability all components must be affixed without backlash gt Make sure that the stage load and if present the mounting adapter are affixed without backlash INFORMATION Models with DC gear motors are equipped with integrated signal drivers for cable lengths lt 10 m between the stage and the motor controller INFORMATION The holes in the moving platform of the M 5x1 are arranged in the PI standard hole pattern The PI standard hole pattern is used with many micropositioning stages from PI and allows a simple combination of linear and rotation stages with minimum effort gt If possible carry out a simulation of the stage motions with a mounted load or suitable calculations in order to identify collisions or unfavorable center of gravity constellations gt If necessary take suitable constructive measures to avoid collisions and instabilities in the overall system gt Avoid or mark danger zones that result from the installation of the stage and the application in accordance with the legal regulations 20 Version 1 0 0 MP113E M 5x1 Stages PIEZO
45. rnatively Sufficiently dimensioned power cord M 5x1 Stages MP113E Version 1 0 0 39 5 Installation P I Connecting the power supply to the M 5x1 gt Connect the M8 connector of the adapter with the M8 panel plug of the M 5x1 gt Connect the barrel connector of the adapter to the barrel connector socket of the power supply Connect the power cord to the power supply 40 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 6 Start Up 6 Start Up In this Chapter General Notes On Start U piss cist oce e et nee e na ET Laser but kasd cafa 41 Starting up the stage ieiunii n nna agua n aaa Ys nean D ra a aaa KNESET 43 6 1 General Notes on Start Up A Risk of crushing by moving parts There is a risk of slight injuries from crushing between the movable parts of the stage or the load and a fixed part or obstacle gt Use protective structures to keep limbs away from areas in which they could be seized by moving parts gt Observe the safety distances in accordance with DIN EN ISO 13857 when installing protective structures NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Do not place any objects in areas where they can get caught by moving parts v Stop the motion immediately if a c
46. t Name Number M 521 PD1 Precision Translation Stage 204 mm DC Motor PWM Control Rotary Encoder M 521 PG1 Precision Translation Stage 204 mm DC Gear Motor PWM Control Rotary Encoder M 531 251 Precision Translation Stage 306 mm Stepper Motor M 531 DD1 Precision Translation Stage 306 mm DC Motor PWM Control Linear Encoder M 531 DD2 Precision Translation Stage 306 mm DC Motor PWM Control Linear Encoder Motor Brake M 531 DG1 Precision Translation Stage 306 mm DC Gear Motor Rotary Encoder M 531 EC Precision Translation Stage 306 mm Brushless DC Motor Rotary Encoder M 531 PD1 Precision Translation Stage 306 mm DC Motor PWM Control Rotary Encoder M 531 PG1 Precision Translation Stage 306 mm DC Gear Motor PWM Control Rotary Encoder gt For further technical data see the specifications p 57 3 2 Product View 3 2 1 Overview Figure 1 Stages of the M 511 M 521 and M 531 series from front to back M 5x1 Stages MP113E Version 1 0 0 9 3 Product Description P I 3 2 2 Product Details 1 6 5 Figure 2 Components of the stage colored here M 511 Base body Motor cover Spindle cover Moving platform Power supply connection M8 panel plug not with the DG1 and 251 models Controller connection Sub D 15 panel plug Da amp HO DH 10 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 2 3 Product Labeling momo
47. t limit switches The signals of the limit switches are used to stop the moving platform before the hard stop at both ends of the travel range Limit switch function with the M 5x1 signal Inner limit Output to the controller When triggering takes place the switches on the Sub D 15 panel controller switches off the servo mode for N1 and P1 plug p 67 the affected axis and thereby stops the See also Limit Switch motion Specifications p 60 The moving platform can be moved away from the limit switch by command see Possible Causes and Correction p 49 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 3 Product Description M 5x1 Stages signal Outer limit No connection to the The triggering interrupts the power source switches controller of the drive via a relay The moving N2 and P2 platform cannot be moved away from the limit switch by command but must be moved manually p 52 N negative limit switch P positive limit switch Direction of motion negative positive ee ee a i B f mitt 77 ne I N2 NI PI P2 Negative limit switches Positive limit switches Figure 4 Limit switch arrangement with the M 5x1 The distance between N1 and N2 or P1 and P2 is approx 5 3 mm in each case INFORMATION In the case of controllers from PI the permissible travel range of the stage is represented by parameters in the controller Suitable parameter values can be loaded fro
48. tch Direction sensing by means of different signal levels on the left and right side of the reference point switch The signal level changes from 0 to 5 V when the reference point Switch is passed 60 Version 1 0 0 MP113E M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 Dimensions 10 2 1 M 5x1 Stage Dimensions in mm Note that the decimal places are separated by a comma in the drawings PJEPUEIS Id __ wed ejou M 5x1 Stages MP113E Version 1 0 0 61 10 Technical Data PI Was pp pp pe 10 2 2 Hole Pattern of the Moving Platform of the M 5x1 Dimensions in mm Note that the decimal places are separated by a comma in the drawings The platform is attached to the stage via the counter sunk holes 27 undimensioned holes M4 thread 8 mm depth core hole drilled through The four H7 4 mm holes with a depth of 5 mm are intended as locating holes Figure 17 Hole pattern of the moving platform PI standard hole pattern 62 Version 1 0 0 X os SIS AS Wao 2 eg 23 43 k nt a mio noy Ui 9h M 5x1 Stages PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 2 3 M 592 10 Adapter Bracket Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure
49. ty PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 2005 Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Roemerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Heavy Duty Micropositioning Stages Model Numbers M 511 M 521 M 531 Product Options all complies with all relevant provisions of the Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the EMC Directive 2004 108 EC as well as the RoHS Directive 2011 65 EC The applied standards certifying the conformity are listed below Safety of Machinery EN 12100 2010 Electrical Safety EN 61010 1 2010 Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 The person authorized to compile the technical file is Michael Ebert Address see manufacturer s address March 21 2013 f Karlsruhe Germany i vt Norbert Ludwig Managirig Director Physik Instrumente PI GmbH amp Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany PIEZO MAND POSITIONING Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws www plws ree yor el M 5x1 Stages MP113E Version 1 0 0 71 12 EU Declaration of Conformity 72 Version 1 0 0 MP113E PI M 5x1 Stages

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