Microvision User Manual SP101003.201
Contents
1. 2 Using tweezers carefully offer the filament plate onto the mounting posts Be careful not to touch the source cage with either filament There is no orientation of the filament plate required except that the mounting holes line up with the mounting posts 3 Re fit the two M2 x 4 pan head screws through the filament plate and filament screen and tighten securely Do not over tighten 4 Re fit each barrel connector in the same orientation as removed sliding each barrel connector over the connecting lead and filament post and while holding the barrel connector firmly with pliers tighten all screws 5 Before re fitting the analyser to your vacuum chamber carry out the short circuit checks on Page 23 6 Replace the analyser into your vacuum housing and again check for shorts or grounding to the outer vacuum housing You are now ready to pump down and continue the operation of your quadrupole Microvision SP101003 201 19 February 2007 27 MKS Instruments Spectra Products 5 5 I on Source cleaning Sometimes it is possible to clean the ion source without removing it from the analyser For the user who has the necessary equipment available including a means to suitably dry the analyser it is usually worth trying this method before removing or replacing the ion source However it is likely only to be successful where the source is contaminated with loose or alcohol soluble deposits Below is a list of the tools and equipment2. The analyser is fitted with dual filaments mounted on a single plate Changing filaments is the most common maintenance event with quadrupole analysers For this reason the MKS Spectra analyser has been designed to make this task as quick and easy as possible Below is a list of the tools and equipment you will require We recommend that you assemble the following items before you start Remember that the instrument is supplied with a tool kit that contained some of the things you will need small jewelers screwdriver 2mm pair of tweezers small pair of smooth jawed needle nosed pliers pair of clean cotton gloves clean bench on which to work Ohmmeter clean container in which to put small parts replacement filament a method of holding the analyser securely in an upright position a small bench vice is ideal pen and paper on which to make notes and sketches Refer to the exploded views of the Filament Plate shown on Page 36 Microvision SP101003 201 19 February 2007 25 MKS Instruments Spectra Products 5 4 1 Removing the filaments 1 Remove the analyser from the vacuum system making sure that you do not touch the exposed internal surfaces and place it on the bench in an upright position 2 The filaments are located on the very top of the analyser and are retained by two M2 x 4 pan head screws Item 3 The electrical connections are made via three barrel connectors Item 2 one to each filament and one to filament c
3. 2007 17 MKS Instruments Spectra Products 3 Microvision Installation 3 1 Installation Rotate the locking ring on the RF analyser connector so that the slot lines up with the keyway on the connector tube Hold the Microvision unit so that the keyway lines up with the locating key on the analyser flange Gently slide the Microvision unit on to the analyser TAKE GREAT CARE the pins on the vacuum feedthrough are easily damaged DO NOT force the Microvision unit on to the analyser When all of the pins are engaged push the Microvision firmly onto the analyser to ensure electrical continuity The last 3mm 1 8 is important When correctly fitted the front face of the RF analyser connector should butt up against the analyser flange Finally rotate the locking ring to lock the Microvision in place You will not be able to do this if the Microvision is not pushed fully onto the analyser 3 2 Electrical connections The serial communications link between the Microvision and host computer may conform to RS232 RS422 or RS485 and this will determine which of the connectors is used RS232 Using the cable supplied connect the 9 way D Type plug to the 9 way D Type socket labeled RS232 on the rear panel of the Microvision The other end of the cable should be connected to an available Com port on the host computer RS422 Using the cable supplied connect the 9 way D Type plug to the 9 way D Type socket labeled RS422 485 on the rear panel of
4. February 2007 MKS Instruments Spectra Products 39 7 Returning Your Unit for Service If you wish to return the instrument for service please follow these simple guidelines Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation RMA number We will require some instrument details such as the serial numbers date of purchase and a detailed fault description Fill in the relevant sections of the Health and Safety Returns Form on pages 41 and 42 of this manual or we can provide you with a copy This form MUST accompany the instrument when returned delays in providing this completed form will lead to delays in the servicing of the instrument Securely package all items to be returned using the original packaging where possible and send to the address provided by the relevant service department Support Contact Numbers Europe UK 44 0 1270 250150 USA 01 408 750 0347 Microvision SP101003 201 19 February 2007 40 MKS Instruments Spectra Products RETURNS FORM Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility Fax numbers and addresses can be found on the inside front page of this manual Please ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Please Complete T
5. MKS Instruments Ltd must be contacted for technical guidance on possible EMC and safety issues 6 The vacuum system on which the analyser RF head is mounted must be earthed to a protective earth preferably to the same protective earth as the control unit B OPERATI ON 1 The equipment is not authorised for use as a critical component in a life support or safety critical system without the express written approval of MKS Instruments Ltd 2 All instructions given in the operating manual must be followed Microvision SP101003 201 19 February 2007 4 MKS Instruments Spectra Products 3 Adjustments are strictly limited to those accessible from the control panel and computer keyboard and only when running software supplied by MKS Instruments Ltd C MAI NTENANCE WARNING DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT l Maintenance functions must only be carried out by competent persons 2 During the warranty period faulty equipment must be returned to MKS Instruments Spectra Products Ltd unless special arrangements are made 3 There are no user serviceable parts in the electronic equipment Certain components are EMC and safety critical and must not be substituted Replacement parts are available from MKS Instruments Spectra Products Ltd 4 Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and safety performance These must be correctly re fitted after servicing WA
6. is available to connect to the Microvision to further extend its operational capabilities This manual focuses on the Microvision hardware and should be used in conjunction with the manual for the operating software such as RGA for Windows Microvision SP101003 201 19 February 2007 8 MKS Instruments Spectra Products 1 1 General The Microvision is a single unit incorporating all the necessary power supply and data acquisition electronics for the residual gas analyser Power is derived from a dedicated low voltage power supply which is supplied as part of the standard package The Microvision plugs directly onto the quadrupole analyser via the connector mounted on the front panel of the unit All external connections including the power supply and serial communications link are made via connectors mounted on the rear panel of the unit Microvision contains no user serviceable parts and the only manual adjustment is the volume control for the audio tone which is mounted on the rear panel Microvision SP101003 201 19 February 2007 9 MKS Instruments Spectra Products 1 2 Rear Panel Connections 1 2 1 Power connector This is a 15 way D Type socket labelled POWER on the rear panel of the unit used to connect the low voltage power supply unit The pin connections are 1 2 3 24 volts DC 9 10 11 0 volts 24 volt return The power input is 24VDC 1096 2 Amps max The primary power ci
7. the microvision The other end of the cable should be connected to an available Com port on the host computer RS485 The cable from the preceding Microvison in the daisy chain should be connected to the 9 way D Type socket labelled RS422 485 on the rear panel of the Microvision The cable to the next unit in the daisy chain should be connected to the 9 way D Type plug labelled RS422 485 on the rear panel of the Microvision Microvision SP101003 201 19 February 2007 18 MKS Instruments Spectra Products POWER Insert the 15 way D Type socket on the output lead of the power supply unit into the 15 way D Type plug labelled POWER on the rear panel of the Microvision Attach the line cord to the power supply The power supply will automatically set itself to operate with the local line voltage When the power is switched on the LED on the rear of the Microvision will illuminate Care should be taken in routing and securing all cables Avoid running the serial cables next to mains power cables Microvision SP101003 201 19 February 2007 19 MKS Instruments Spectra Products 4 Baking The Microvision should not be exposed to temperatures above 40 C it should therefore be removed from the analyser during baking The analyser may be baked up to 250 C but care should be taken to avoid exposing the ceramic feedthrough to sudden changes in temperature The Microvision may be supplied with the factory fitted Bakeable Extender o
8. the ceramic parts in place while the source assembly is rebuilt 3 Slide one ceramic tube Item 3 down each of the wires and then a ceramic washer Item 4 4 Orientate the source plate so that the largest circular cutout is above the extract plate s barrel connector and carefully slide it down the wires and over the ceramic tubes 5 Place one ceramic washer over each of the exposed ceramic tubes 6 Orientate the repeller plate so the circular cutouts align with the two visible barrel connectors and slide it down the wires over the ceramic tubes and onto the ceramic washers 7 Place one ceramic washer over each of the exposed ceramic tubes 8 Carefully remove one of the wires and replace with a M1 6 pan head screw Item 2 and the M1 6 stainless steel washer Item 1 which should be screwed down but not tightened repeat this for the remaining three wires 9 Check that all the plates and ceramics are seated properly before tightening the screws fully Be careful not to over tighten as this will damage the ceramic spacers 10 Push out the completed source assembly from the jig and place it on a clean non conducting surface Using an Ohmmeter check that there are no short circuits present between any of the three plates or the source mounting ring If any shorts are discovered correct them before continuing Microvision SP101003 201 19 February 2007 32 MKS Instruments Spectra Products 11 The filament plate can
9. the electronics for amplification and subsequent display to the outside world 4 The flanged housing This is the only part of your analyser that you will see under normal operating conditions Comprising of an industry standard 2 75 Conflat amp flange with an electrical feedthrough which carries the various supplies and signals to and from the quadrupole analyser All quadrupole analysers require periodic maintenance the regularity of which is determined by its use The cleanliness of the vacuum hours of operation and the type of sample being analysed all have an effect on the analyser s performance Microvision SP101003 201 19 February 2007 21 MKS Instruments Spectra Products Apart from these considerations there are times when the analyser will require maintenance and these are when accidents happen i e the vacuum is vented with the filaments on or someone forgets to turn on the water cooling for the oil diffusion pump Routinely there is only one area of the analyser that requires any maintenance this is the ion source The ion source contains two filaments only one of which will be in use at any one time The filament is heated to approximately 2000 deg K at which temperature it emits electrons which are used to produce the ions required by the quadrupole filter At this high temperature there are two deleterious effects The filament material slowly evaporates and condenses upon the surrounding surfaces This effect
10. the frequency pitch of the audio tone which increases with increasing signal not the volume The volume control should be turned clockwise to increase the volume and turned anti clockwise to decrease the volume 1 2 9 External Trip The external trip connector is a 3 5mm J ack socket mounted to the right of the Power connector labelled X TRIP The external trip feature is used to protect the filaments and electron multiplier from exposure to high pressures It allows an independent total pressure gauge or a signal from a vacuum control system to be connected to the Microvision It is the most effective of the trips available and we would always recommend its use The external trip input can be driven in three ways 1 Uncommitted relay contact This is a low voltage 5V 1mA contact The contact should be closed for normal operation open to trip the filaments or if the protective equipment is switched off 2 Open collector TTL drive The output transistor should be on for normal operation open for trip or if the protective equipment is turned off 3 Totem pole TTL drive The signal should be low for normal operation high for a trip condition or if the protective equipment is switched off The external trip circuitry is fully isolated from the system ground Microvision SP101003 201 19 February 2007 14 MKS Instruments Spectra Products 2 Analyser Installation This section deals with getting the equipment you have ju
11. you will require We recommend that you assemble the following items before you start Remember that the instrument is supplied with a tool kit that contained some of the things you will need Small jewelers screwdriver 2mm Pair of tweezers Small pair of smooth jawed needle nosed pliers Pair of clean cotton gloves Clean bench on which to work Ohmmeter Clean container in which to put small parts Ultra sonic bath Measuring cylinder Iso propyl alcohol Some method of holding the analyser securely in an upright position a small bench vice is ideal Remove the analyser from the vacuum chamber and place it on the bench in an upright position the use of a small bench vice is recommended remove the filaments as described on Page 26 Insert the analyser into the measuring cylinder so that the knife edge side of the flange rests on the lip of the cylinder Note the level which the ion source comes to on the measuring cylinder before removing the analyser and filling the measuring cylinder with sufficient iso propyl alcohol to cover the ion source Note the measuring cylinder should be of a diameter and length to accommodate the analyser Put the measuring cylinder into the ultra sonic bath for 10 to 15 minutes Remove the analyser and allow any excess alcohol to drain off Keep the analyser inverted feedthrough upper most until it is dry Do not let any alcohol run down the analyser into the flange assembly as this will serious
12. 01 19 February 2007 16 MKS Instruments Spectra Products 2 5 Mounting the analyser The standard 2 34 Conflat amp flange on the analyser can be sealed to the vacuum chamber with either a copper gasket or a Viton gasket with a square cross section Which one you choose depends on the ultimate pressure you expect in your system and whether you intend to bake the system If it is not already clean then clean the gasket with suitable solvent and dry it Remove the analyser from its shipping envelope slip the gasket over the quadrupole structure and set it in the grooves of the flange surface Carefully insert the analyser into the vacuum chamber ensuring that you do not allow the leads to touch the walls of the vacuum chamber Make sure the gasket does not slip part way out of its slot as you push the two flanges together Rotate the flange until the locating key on the feedthrough housing tube is as close to 11 o clock as the bolt holes will allow This will ensure that the Microvision is in its preferred position although it can be mounted in any orientation Bolt the feedthrough flange to the vacuum chamber flange using the torque appropriate for the gasket material used Do not discard the plastic shipping envelope or the two piece foam packing surrounding it If in the future you need to return the analyser for service it should be returned in its original packaging to avoid damage Microvision SP101003 201 19 February
13. 1003 201 19 February 2007 11 MKS Instruments Spectra Products 1 2 5 RS422 485 out Connector This is a 9 way D Type plug marked RS422 485 and situated immediately to the left of the audio connector For RS422 this connector is not used In RS485 which is a daisy chaining system this connector should be used to connect to the RS485 In socket of the next unit in the chain This connector is linked internally pin to pin to the RS422 485 in socket The pin connections are Pinl 0V Pin4 RXD Pin5 RXD Pin8 TXD Pin9 TXD 1 2 6 Audio Socket This is a 3 5mm J ack socket labelled AUDIO It is used to connect headphones wireless headsets or an external speaker enabling audio tones in some of the scan modes E g Leak checking tone and audio alarms The minimum load impedance should be 8 ohms and the power handling is 2 watts max Microvision SP101003 201 19 February 2007 12 MKS Instruments Spectra Products 1 2 7 Aux I O connector This is a 25 way D Type socket AUX I O It is used to connect accessories such as a Remote Vacuum Controller RVC analogue output module analogue input module and Valve Controller The Aux I O connector can also be used to provide alarm output signals and process trip signals Not used Alarm for peak jump channel 2 see note 1 Alarm for peak jump channel 4 see note 1 Alarm for peak jump channel 6 see note 1 Alarm for peak jump channel 8 see note 1 Alarm for peak jum
14. Fils LM508 015PL 4 Filament Plate Thoria Fils LM508 020PL 5 Filament Screen 305080594 6 Screw M1 6 x 4 3 off 200901604 Microvision SP101003 201 19 February 2007 MKS Instruments Spectra Products 36 6 4 Source Assembly Item Description Dimensions in mm Part Number 1 Plain washer SS M1 6 27031600 2 Screw M1 6 x 8 200901608 3 Ceramic Tube 2 8D x 3 5L 400020035 4 Ceramic Washer 4 7D x 1L 400010203 5 Repeller Plate Assembly LM508 018PL 6 Source Plate Assembly LM508 017PL Microvision SP101003 201 19 February 2007 MKS Instruments Spectra Products 37 6 5 Source Alignment Jig Note the orientation of the source assembly when inserted into the jig Align the extract plate s barrel connector with the alignment indicator on the jig Remove the source by pushing it out from the bottom of the jig do not pull out the source Item Description Dimensions in mm Part Number 1 Source Alignment J ig 842 029 Microvision SP101003 201 19 February 2007 MKS Instruments Spectra Products 6 6 Extract Plate Item Description Dimensions in mm Part Number 1 Plain washer SS M1 6 27031600 2 Screw M1 6 x 6 200901606 3 Ceramic Tube 2 8D x 2L 400020020 4 Ceramic Washer 4 7D x 1L 400010203 5 Extract Plate Assembly LM508 016PL 6 Source Mounting Ring 305080603 Microvision SP101003 201 19
15. ITY DIRECTIVE 2006 95 EC LOW VOLTAGE DIRECTIVE THE APPLICABLE STANDARDS ARE EN 61326 1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT CONTROL amp LABORATORY USE EN 61010 1 1993 SAFETY REQUIREMENTS FOR ELECTRICAL EQUIPMENT FOR MEASUREMENT CONTROL amp LABORATRY USE SIGNED J M Higgins GENERAL MANAGER DATE 19 February 2007 Microvision SP101003 201 19 February 2007 3 MKS Instruments Spectra Products Additional I nstallation Maintenance and Operating I nstructions In order to comply with European regulations the following procedures must be followed A INSTALLATI ON l The installation procedures given in the operating and technical manuals must be followed in addition to these instructions 2 The mains power cable must conform to local regulations and must have a protective earth PE conductor securely connected to the power plug protective earth contact 3 The short earthing braid supplied with some products must be fitted between the terminal on the RF head and one of the CF40 vacuum flange bolts 4 Only cables supplied with the equipment may be used for interconnections If extension cables are required to obtain a greater separation between control unit and RF head or if longer serial communications cables are required they must be supplied by MKS Instruments Ltd 5 Cables attached to all other ancillary signal and control ports must have a length of less than 3 metres If greater length is required
16. RNI NG The Electron Multiplier SEM must not be operated at temperatures above 50 C With dual faraday and electron multiplier detector instruments serious damage will be caused to the electron multiplier if it is operated at temperatures above 50 C No damage is caused to the multiplier by high temperatures provided it is not switched on The Microvision electronics should not be exposed to temperatures above 35 C Microvision SP101003 201 19 February 2007 5 MKS Instruments Spectra Products 1 ntrod ction 8 eres du ET Tee er ues 9 1 2 Rear Panel Connections sssssssesse eme 10 1 2 1 emnes 10 1 2 2 PowWer BED 2 Hero 11 1 2 3 R9232 COMME COR aii eterne der rd tene ren e eda 11 1 2 4 RS422 485 in CONNEC eee eee e cette e eee ee teeta aaa 11 1 2 5 RS422 485 12 1 2 O AUGIO SOCK bx cuo 12 1 2 7 AUX 1 0 connectoE siio ren re lade 13 1 2 8 Volume control ssesseee eme 14 1 2 9 External TID 22 tete Poet eene reete eee t etie eee egre 14 2 Analyser Installation eeeeeeeeeee eee ee eene nennen 15 2 1 Unpacking 15 2 2 Inspecting the analyser eene 15 2 3 Installing the analyser reenen 16 2 4 Checking the system pressure neee 16 2 5 Mounting the analyser ssssssee ee
17. ding above 5 Meg Ohm 5x10 ohms as being open circuit The following assumes that the analyser is still on the vacuum system and goes through all the possible tests Tools required Ohmmeter with leads Please refer to Page 34 for analyser pin numbers l Attach a meter lead to pin 1 of the analyser feedthrough 2 Connect the other lead to the analyser flange you should read a short circuit If not you have either a serious problem or more likely a faulty meter meter leads If after checking your meter an open circuit still exists contact your nearest MKS Spectra service center for advice 3 Move the lead from the flange and connect to pins 2 to 12 on the analyser feedthrough in turn Each one should give an open circuit If not you have a short to earth There are two types of short to earth an internal short between one part of the analyser and an earthed part of the analyser or more commonly a short between part of the analyser and the vacuum chamber In either case remove the analyser from the vacuum chamber and repeat the test If the result is the same then you have an internal short and should contact your local MKS Spectra facility for advice Otherwise you have a short to the vacuum chamber check the dimensions of the vacuum chamber around the quadrupole analyser or try refitting the analyser in a slightly different orientation Microvision SP101003 201 19 February 2007 23 MKS Instruments Spectra Products R
18. emks Technology for Productivity Spectra Products Microvision User Manual SP101003 201 19 Feb 2007 As part of our continuous product improvement policy we are always pleased to receive your comments and suggestions about how we should develop our product range We believe that the manual is an important part of the product and would welcome your feedback particularly relating to any omissions or inaccuracies you may discover You can send your comments to MKS Instruments Spectra Products Cowley Way Crewe Cheshire CW1 6AG U K Tel 44 0 1270 250150 Fax 44 0 1270 251939 Windows is a trademark of the Microsoft Corporation All other brand or product names are trademarks or registered trademarks of their respective companies Microvision SP101003 201 19 February 2007 2 MKS Instruments Spectra Products Declaration of Conformity Spectra SensorTech Ltd Cowley Way Crewe Cheshire CW1 6AG United Kingdom DECLARES THAT THE FOLLOWING PRODUCTS LM62 LM10 VACSCAN 100 LM63 LM10 LM4 VACSCAN PLUS 100 200 LM61 LM10 LM4 LM9 SATELLITE 100 200 300 LM56 MICROVISION LM70 LM76 MICROVISION PLUS LM77 VISION 1000P LM78 VAC CHECK LM79 VISION 10001 LM80 MINILAB LM89 VISION 1000B LM90 VISION 1000 C E LM92 MICROVISION IP LM98 e Vision LM99 Cirrus LM100 300mm Resistorr LM102 e Vision ARE IN CONFORMITY WITH THE FOLLOWING EUROPEAN DIRECTIVES 89 336 EEC ELECTROMAGNETIC COMPATIBIL
19. ent current supply capability and the emission current has still not reached 1mA a filament fail condition will exist In the vast majority of cases this will be due to a blown filament more correctly described as an open circuit filament There are other conditions such as a heavily contaminated ion source which will result in a filament fail condition when the filament is not open circuit If you suspect a blown filament carry out the following test before removing the analyser from the vacuum system Connect meter lead one to analyser feedthrough pin 8 which is the common connection to both the filaments Microvision SP101003 201 19 February 2007 24 MKS Instruments Spectra Products Connect the second meter lead to pin 4 Filament 1 You should read a short circuit Now connect the second meter lead to pin 10 Filament 2 again your meter should indicate a short circuit If either or both filaments are blown the meter will indicate an open circuit and the filaments will need to be replaced If the meter reading suggests that the filament is good but the control unit shows a filament fail the most likely cause would be a break down in electrical continuity Ensure that the face of the analyser connector housing on the control unit butts up to the analyser flange Examine the RF analyser connector on the front of the control unit and check that none of the gold sockets are pushed out of place 5 4 Changing filaments
20. epeat the ohmmeter test before pumping down the vacuum chamber Remember that the ion source gets very hot during operation and the stainless steel components will expand slightly Sometimes a short will only develop when the analyser has been run for a while and is up to temperature 4 Move the meter lead from pin 1 and attach it to pin 2 of the analyser feedthrough Connect the other lead to pins 3 to 12 on the analyser feedthrough in turn Each one should give an open circuit Now move the meter lead from pin 2 to pin 3 and check to pins 4 to 12 Proceed around the feedthrough until all possible connections have been checked All the pins should show an open circuit to all other pins EXCEPT pin 4 to pin 8 and pin 8 to pin 10 which should show short circuit as these are the filament connections If any of the pins read short circuit to another pin contact your local MKS Spectra service center with the results of your tests and they will advise you how to proceed 5 3 Checking filaments Filament status is constantly monitored by the control unit and the operating software This is achieved by measuring the flow of electrons emitted by the hot filament referred to as the emission current flowing to the ion source cage This is normally maintained at a fixed value of 1mA The current flow through the filament is increased until the value of emission current is reached If however the control electronics reaches the limit of its filam
21. he Following Our RMA number Customer P O No Customer Bill to Address Company Department Address City Zip Postal Code Customer Return To Address if different from above Company Department Address City Zip Postal Code User s Name Phone No Equipment Shipped Item 1 Serial No Item 2 Serial No Item 3 Serial No Microvision SP101003 201 19 February 2007 41 MKS Instruments Spectra Products Please describe the system fault in detail Details of all substances pumped or coming into contact with the returned equipment Chemical names Precautions to be taken in handling these substances Action to be taken in the event of human contact or spillage hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are named above that the information given is correct and that the following actions have been taken 1 The equipment has been securely packaged and labelled 2 The carrier has been informed of the hazardous nature of the consignment Signed Title Date Phone No Microvision SP101003 201 19 February 2007 42 MKS Instruments Spectra Products
22. his section please ensure that you have the correct Source Alignment J ig and spare ceramics and screws available Refer to the exploded views of the Source Assembly shown on Page 37 1 Carefully unscrew the four M1 6 x 8 screws Item 1 and withdraw them from the assembly 2 Using tweezers remove the four ceramic washers Item 3 if undamaged keep in a safe clean place ready for the re assembly 3 The Repeller Plate Item 4 can now be removed from the mounting ring 4 Using tweezers remove the four ceramic washers Item 3 and the four ceramic tubes Item2 if undamaged keep safe as before 5 The Source Plate Item 5 can now be removed from the mounting ring This is normally as much as you will need to dismantle for cleaning or replacing source components The Extract plate does not usually require service as it is furthest away from potential contamination However if you wish to remove the Extract Plate see the exploded diagram on Page 39 Microvision SP101003 201 19 February 2007 31 MKS Instruments Spectra Products 5 6 3 Source Re assembly Refer to the exploded views of the Alignment Jig shown on Page 38 and the Source Assembly shown on Page 37 1 Place the source alignment jig flat on the bench and slide in the source mounting ring aligning the extract plate s barrel connector with the alignment mark on the jig 2 Insert each of the four lengths of wire into the four castellations which will hold
23. is extremely slow but would require from time to time the cleaning of the surrounding source plates and ceramics and the replacement of the filaments The second effect is similar to the first except that the vacuum under which the source is operating has either a high oxygen or water content Then instead of metal being deposited upon the surrounding source plates layers of metal oxides are deposited Being insulators these have a far more noticeable effect upon the performance of the source and therefore a more frequent cleaning program should be adopted CAUTI ON THE QUADRUPOLE S FI LTER IS ACCURATELY ALI GNED BY SKILLED PERSONNEL USI NG SPECI ALI ST TOOLS AND JIGS UNDER NO CI RCUMSTANCES SHOULD THE FI LTER ASSEMBLY BE DI SMANTLED IF YOU ARE IN ANY DOUBT WHEN SERVICI NG YOUR ANALYSER PLEASE CONTACT YOUR LOCAL SERVI CE CENTRE Microvision SP101003 201 19 February 2007 22 MKS Instruments Spectra Products 5 2 Ohmmeter analyser checks There are a number of circumstances when carrying out some simple checks with an ohmmeter can be worthwhile If you suspect a failed filament or want to check for shorts following some maintenance performing some simple checks can save a great deal of time In carrying out these checks we can legitimately accept two ranges of meter readings as possibly acceptable and anything outside these ranges as being a definite fail Any readings less than 1 ohm we can take as a short and any rea
24. ly Microvision SP101003 201 19 February 2007 28 MKS Instruments Spectra Products damage the multiplier Check the condition of the ion source A second or third wash may be required Note the ultra sonic bath may loosen some of the screws in the ion source take care not to throw these away when discarding the alcohol The analyser must be dried of cleaning solution before it can be used We recommend the use of a clean oven for this purpose The oven should be set at 80 deg C and the analyser baked for at least two hours Note Check the documentation on your cleaning solution for guidelines on handling the substance and any fire or explosion risks involved After the bake period check all the screws in the ion source are tight and re fit the analyser to the vacuum chamber A further bake under vacuum will be required to drive off any remaining residue Microvision SP101003 201 19 February 2007 29 MKS Instruments Spectra Products 5 6 Cleaning or replacing the ion source The analyser design permits the removal of the ion source as one complete assembly which can be replaced or dismantled for cleaning The ion source automatically aligns on the main analyser assembly allowing easy replacement without the need for special jigs Below is a list of the tools and equipment you will require We recommend that you assemble the following items before you start Remember that the instrument is supplied with a tool kit that co
25. n 17 3 Microvision nstallation 1oeeeee rennen nnne 18 3T Installation ciento oen D 18 3 2 Electrical connections ssssseeen men 18 4 Baking 20 5 Analyser Maintenance 1 ccseseeeeeeeseeeeeeneeeeeeeeeeeneaaeeeeneeaeennes 21 5 1T OVEIVIQW an n ed tne si vals eet tee d 21 1 The ion source or ioniser sseseem m 21 2 The quadrupole 21 3 The det ctor nt o Li RR PH per eei 21 4 The flanged 21 5 2 Ohmmeter analyser checks ssena 23 5 3 Checking filaments sssssseeen mme 24 5 4 Changing filaments sssseeememennne 25 5 4 1 Removing the filaments 26 5 4 2 Fitting new filaments ee 27 5 5 lon Source cleaning sssssssese Hee 28 5 6 Cleaning or replacing the ion 5 30 5 6 1 Removing the ion source sssssssee et eeeeeeeeeeaaae 31 5 6 2 Dismantling the source assembly eccerre 31 5 6 3 Source R ASSEMDIY eee eee etter ee 32 6 Exploded Views cssssceceeseeeeeenseeeeenneeeeseenaseeseeneasesnaaeeneneaseenees 34 6 1 Analyser Flange pin Outs ee 34 Microvision SP101003 201 19 Februa
26. now be re fitted and the remaining connection made Once again check all connections with an Ohmmeter before returning the analyser back to the vacuum chamber Microvision SP101003 201 19 February 2007 33 MKS Instruments Spectra Products 6 Exploded Views C 6 1 Analyser Flange pin outs Pin Connection Z o O Earth Source plate Electron Multiplier Filament 1 Extraction plate Suppressor plate RF 1 Repeller plate filament common No connection Filament 2 RF 2 Collector OANA Uil 4 GJ Microvision SP101003 201 19 February 2007 34 MKS Instruments Spectra Products 6 2 Exploded view of the Analyser ETECTOR FLANGE ASSEMBLY g x 4mm LG CH HD SCREWS WITH LOCKWASHERS r Di ah o m 3 P o on lt Q o iu uj Lr Oz E sg L 3 XE et T5 E ak 3 gt a gt zu Ge as Oa RIS ul o5 a Sw ow o9 3 xp Item Description Dimensions in mm Part Number 1 Source Assembly Tungsten Fils 842 021 1 Source Assembly Thoria Fils 842 022 243 Screw M2 x 4 200902004 Microvision SP101003 201 19 February 2007 MKS Instruments Spectra Products 35 6 3 Filament Plate Item Description Dimensions in Part Number mm 1 Screw M1 6 x 3 3 off 200901603 2 Barrel Connector 305040214 3 Screw M2 x 4 200902004 4 Filament Plate Tungsten
27. ntained some of the things you will need Small jeweler s screwdriver 2mm Pair of tweezers Small pair of smooth jawed needle nosed pliers Pair of clean cotton gloves Clean bench on which to work Source alignment jig 4 Pieces of straight clean wire NOT tinned or insulated 1mm x 25mm Ohmmeter Clean container in which to put small parts Replacement filaments Replacement source parts if necessary Set of replacement ceramics is highly desirable if none are cracked and essential if any are broken Some method of holding the analyser securely in an upright position a small bench vice is ideal Pen and paper on which to make notes and sketches Refer to the exploded views of the Analyser shown on Page 35 Microvision SP101003 201 19 February 2007 30 MKS Instruments Spectra Products 5 6 1 Removing the ion source 1 Remove the analyser from the vacuum system place it on the bench in an upright position holding the analyser in a small bench vice is recommended and remove the filaments as described on Page 26 2 Loosen the three M2 x 4 that secure the three insulated wires that run from the analyser flange assembly to the Source Repeller and extractor plates and slightly bend the wires out of the way 3 Remove the four M2 x 4 screws Item 2 that hold the source assembly to the filter assembly and carefully withdraw the source assembly from the filter 5 6 2 Dismantling the source assembly Before proceeding with t
28. ommon 3 Hold one of the barrel connectors firmly with your pliers and slacken the outermost screws Items 1 and 6 until the barrel connector can be removed from the filament plate and the connecting lead 4 Repeat the above for the other two barrel connectors 5 Remove the two M2 x 4 pan head screws that hold the filament plate in place and remove the filament plate assembly Carry out this step carefully so as not to damage the Source Cage 6 Remove the Filament Screen Item 5 It is worthwhile at this stage to see if the source requires any attention especially if the filament s have broken because of an over pressure situation in your vacuum system With the filaments removed you have a clear view of the source cage The signs to look for are powdery deposits these will vary in colour but may be brown blue canary yellow or white depending upon the precise circumstances which led to their formation If these oxides are present it is recommended that you refer to the section on source removal and cleaning before proceeding see Page 28 Microvision SP101003 201 19 February 2007 26 MKS Instruments Spectra Products 5 4 2 Fitting new filaments The fitting of new filaments is simply the reversal of the procedure for removing them Care should be taken at all stages to ensure that no shorts are introduced and that the analyser is kept clean 1 Place and align the new Filament Screen on the source plate mounting posts
29. p channel 10 see note 1 Alarm for peak jump channel 12 see note 1 Used by analogue output module Used by analogue output module OV Digital for alarms OV Analogue for analogue 1 0 15V 15V Alarm for peak jump channel 1 see note 1 Alarm for peak jump channel 3 see note 1 Alarm for peak jump channel 5 see note 1 Alarm for peak jump channel 7 see note 1 Alarm for peak jump channel 9 see note 1 Alarm for peak jump channel 11 see note 1 Used by analogue output module Used by analogue output module 5V Analogue output 0 to 5V full scale Analogue input 2 0 to 10V full scale see note 2 Analogue input 1 0 to 10V full scale see note 2 Note 1 These outputs are TTL levels When the output is in the alarmed state i e the partial pressure is greater than the high alarm setting the output will be at logic 1 When the channel is not alarmed the output is at logic 0 Note 2Two analogue input channels are available which can be monitored in the channel modes e g Peak Jump and Multi Trend The 0 to 10 volt input will be represented as 0 to full scale on the screen These inputs are often used with a thermocouple to track partial pressures and temperature changes Microvision SP101003 201 19 February 2007 13 MKS Instruments Spectra Products 1 2 8 Volume control This controls the volume of the audio tone generated by the external speaker in the Leak Check and Peak Jump Alarm modes Note that in the Leak Check mode it is
30. ption in which case the Microvision need not be removed and the analyser may be run during baking Please contact your local MKS Spectra facility for further details of this option CAUTI ON The Electron Multiplier SEM MUST NOT be operated at temperatures above 50 C Microvision SP101003 201 19 February 2007 20 MKS Instruments Spectra Products 5 Analyser Maintenance 5 1 Overview The quadrupole analyser is the front end of your mass spectrometer it produces electrical signals which when presented to your electronics display the contents of your vacuum chamber in a meaningful fashion The analyser can be broken down into four separate areas by virtue of their function 1 The ion source or ioniser This is located at the top furthest from the flange of your analyser and its function is to take a representative sample of molecules and atoms from your vacuum chamber convert them into ions and present them to the quadrupole filter 2 The quadrupole filter This is the centre section of your analyser Its function is to take the ion beam generated in the source and separate the various ions by their mass to charge ratio m e and present the single selected m e to the collector 3 The detector This area of your quadrupole analyser is hidden inside the flanged housing Its function is simply to convert the filtered ion beam presented by the quadrupole filter into a small electrical current which can be passed to
31. rcuit is fully isolated from the system ground Microvision SP101003 201 19 February 2007 10 MKS Instruments Spectra Products 1 2 2 Power LED The power indicator is a 3mm LED labelled POWER on the rear panel of the unit This will be illuminated when power is applied to the unit 1 2 3 RS232 Connector This is a 9 way D Type socket labelled RS232 used to connect the Microvision to the host computer when using the RS232 interface is being used The pin connections are Pin2 TXD transmit data Pin3 RXD receive data Pin5 0 volts Pin 4 DSR pin 6 DTR and pin 8 RTS are shorted together to ensure that com ports which require DTR and RTS to be asserted will function if DSR is asserted 1 2 4 RS422 485 in Connector This is a 9 way D Type socket labeled RS422 485 and is situated immediately to the right of the Power LED This connector is used to connect to the host computer when using RS422 protocol In RS485 which is a daisy chaining system this connector should be used to connect to the preceding unit in the system or to the host computer if the Microvision is the first unit in the chain The RS485 port can operate in either half or full duplex The separate receive and transmit lines may be connected together under software control This connector is linked internally pin to pin to the RS422 485 plug The pin connections are Pinl OV Pin4 RXD Pin5 RXD Pin8 TXD Pin9 TXD Microvision SP10
32. ry 2007 6 MKS Instruments Spectra Products 6 2 Exploded view of the Analyser nnee 35 6 3 Filament Plat ia cece ects renee mme 36 6 4 Source 5 37 6 5 Source Alignment jigri in a eee 38 o 6 Extract Plate pk 39 7 Returning Your Unit for Service eeeeeeeeeeennre 40 Microvision SP101003 201 19 February 2007 7 MKS Instruments Spectra Products 1 Introduction The Microvision is a complete quadrupole residual gas analyser RGA comprising of a quadrupole analyser a Microvision control unit a low voltage power supply and the necessary interconnecting cables As opposed to traditional RGAs the Microvision incorporates all of the electronics normally found in a separate control unit and RF power supply into one extremely compact unit which fits directly onto the quadrupole analyser Microvision is designed to be operated from a host computer which will normally be an IBM compatible PC running one of the Spectra software packages such as RGA for Windows Complete RGA systems may comprise of one Microvision and a PC referred to as a single headed system or a number of Microvision units connected to a single computer known as a multi headed system Three types of serial communication are available to meet the needs of the various system configurations A range of accessories
33. st bought out of its box and installing it on your system If you have any questions or experience any difficulties contact your local MKS Spectra representative who will be able to help you 2 1 Unpacking When you receive the Microvision carefully check each item before removing the foam packaging and plastic wrapping to ensure that no physical damage has occurred during shipment Also make sure all items have been received correctly by checking each item against the enclosed packing slip f there has been obvious damage during shipment or if there are items listed on the packing slip as shipped which are not in the box immediately contact your local MKS Spectra sales service representative 2 2 Inspecting the analyser CAUTION The analyser is both fragile and very easily contaminated by the slightest touch from your fingers or undesirable surfaces Once you have inspected the analyser return it to the protective envelope until you are ready for installation The analyser is supplied vacuum sealed inside a vac formed plastic envelope for protection Carefully unfold the envelope to allow access to the analyser Do not discard this packaging Hold the analyser ONLY at the vacuum flange Hold the analyser at the flange with the quadrupole and ioniser structure vertically up Carefully inspect all the observable insulators for damage Look at each lead from the flange to its termination point to ensure that it does not to
34. uch any other element of the analyser Microvision SP101003 201 19 February 2007 15 MKS Instruments Spectra Products 2 3 Installing the analyser The vacuum chamber in which you intend to mount the analyser must have a 2 75 inch UHV Conflat amp flange fitted with a tube of 35 0mm 1 378 minimum ID inclusive of a good welded joint The distance from the end of the analyser to its mounting flange depends on the type of system Refer to the table below 100 amu 200 amu single filter 200 amu double filter 300 amu double filter 300 amu triple filter There must be at least the distance given above free of obstructions inside the vacuum chamber If your chamber does not meet the above criteria you should use a specially designed adapter so that the analyser may be mounted outside the chamber Please contact your local MKS Spectra representative for assistance 2 4 Checking the system pressure Quadrupole analysers cannot be operated at pressures higher than 5 x 10 Torr and in the case of dual detector analysers faraday and electron multiplier detectors the multiplier should not be used at pressures above 7 6 x 10 Torr Operation above these limits will cause irreversible damage to the filaments and possibly the ion source Permanent damage to the multiplier will be caused if it is used outside the above ranges Make use of the X Trip interlock to prevent accidental damage to the analyser Microvision SP101003 2
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