XPS-DRVP1 User Manual E1
Contents
1. X to Actuator range X Actuator Origin The control command range remains from 0 to Control range limited by software limits Operator can only control the stage from 0 to Actuator range X Trying to X New move above actuator range X will resting generate an error position after So the usable range is limited figure 4 load increase Figure 4 Close loop with limited range Note When disabling the control loop the stage drifts to its new resting position and jump back to the command position when the loop is re enabled 3 1 2 3 Full range recovery During initialization the XPS software limits are in fact placed at Dgpo DriverStagePositionOffset and Dspo control range values Giving the Depo parameter the value corresponding to the resting position under axial load allows full range recovery as described below Under some axial load the stage resting position is shifted along the sensor scale i e to position X 66 9 A l Positi The actuator range is now from X to Stage Actual Position Actuator range X i Actuat With Do set at X the control jakian command range is now set from X to Control range X software limits Operators can control the stage on its full usable range again from X to Control range X resting The XPS 0 position still corresponds position2. rounded to the next higher 10 micron increment o Click on Save The previous page is displayed again o Click on Reboot and wait for XPS controller initialisation completion o Re logon to the XPS controller WEB as a User o Inthe FrontPanel Move Menu verify that the corresponding axis position is equal to Offset 2 o Click Initialize and then Home buttons The axis is now ready to be used between positions Offset2 and Offset2 usable range CD KNevvport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION t fager ae ad re Move Jog Spindle I O view I Oset Positioner errors Hardware status Driver status 30 aa NPX400SG D Pos 4000 30 Go Go FH ND Newport Experience Solutions XPS DRVP1 7 0 Accuracy linear correction procedure Absolute accuracy of piezoelectric stages equipped with a position sensor and controlled in close loop is directly related to its sensor quality As described in the Position sensors chapter strain gage type position sensors have a typical accuracy linearity of 0 1 The XPS controller and the XPS DRVP1 driver board allow compensation for this linear error by modifying the DriverTravelCorrection parameter of the Stages ini file To modify this parameter proceed as follows o Install an external position measuring device I E interferometer on the moving part of the pi
3. 0 The XPS command 0 position is set to correspond to the stage origin position The XPS control range is set to 80 of the actuator range and software limits are placed at 66499 66 99 0 and control range values Stage Actual Position Operators can use the XPS control range set from 0 to Control range Actuator Usable range The actuator moves between positions Origin and Origin Usable range D on S lt Range Command The actual position of the stage will not be Actuator een Position affected by the hysteresis of the actuator Origin s Figure 3 Figure 3 Close loop default configuration Notes Relatively small axial load variations will not affect the actual position as the close loop control will compensate for actuator shrinking However after an axial load variation when disabling the control loop the stage may drift to its new resting position and jump back to the command position when the loop is re enabled A larger axial load variation may also reduce the usable range see below GO Newport Experience Solutions EDH0259En1010 08 10 6 XPS DRVP1 3 1 2 2 Usable range limitation In case of axial load variation the Stage Actual Position piezoelectric actuator will shrink or expand The stage resting position is shifted along the sensor scale i e to position X The actuator range is now from
4. D Pos x al auf Error Message Error 5 Not allowed due to a positioner error A second click on Initialize is required to complete axis initialization so 42 NPX400SG D Pos x 5 gy Then a final click on Home enables the axis ADS n ADS mc Relat NPX400SG D Pos a 320 Go ol one ol j Maintenance The XPS DRVPI board requires no particular maintenance Nevertheless this is an electronic board that must be kept and handled with precaution WARNING Do not extract the board from the controller until you have read the following and are at an approved anti static work station Use a conductive wrist strap attached to a good earth ground Always turn the controller s power OFF before installing a board Always discharge yourself by touching a grounded bare metal surface or approved anti static mat before picking up an ESD sensitive electronic component Use an approved anti static mat to cover your work surface The XPS DRVP1 board must be kept in its protective packaging when not in an XPS controller Repair CAUTION Never attempt to disassemble an element of the driver board To disassemble an element can cause a malfunction of the board If you observe a malfunction in your board please contact us immediately to make arrangements for a repair CAUTION Any attempt to disassemble or repair a stage without authorization will void you
5. Origin zone When applying the maximum voltage the actuator reaches its maximum expansion called the Actuator Range Without being powered and applying the maximum force permissible the actuator reaches its maximum compression called the Actuator Compression The sum of actuator range and actuator compression is called the Physical Range Actuator i F 0 Physical Actuator Range Origine Range T T pg eer Fae I I l F i F Max Actuator Compression E O0 V 0 Q Newport Experience Solutions XPS DRVP1 2 Piezoelectric Stages Two types of stages use piezoelectric actuators Centered Physical Load range gt o Direct No mechanism is added the crystal directly pushes the moving part i e actuator Axial Load o Amplified the crystal pushes the mobile part decoupled from the base by flexures The motion can be amplified by lever arms shown below i e NPX stages Centered Load Moving Part SEE Actuator range Note The design o f the stage mechanism is important to minimize the motion in the orthogonal dimension y which can be neglected 2 4 Position sensors Stages can be equipped with position sensors of the strain gauge type which is made of thin metallic conductors few um thick placed on a non conductive material L Expansion of the conductors changes electrical resistance following a linear law R R K L L T
6. after to the same stage physical origin Control Range load increase position Figure 5 Figure 5 Close loop after full range recovery To modify Dspo parameter refer to the chapter Offset adjustment procedure WARNING DO NOT OVERLOAD THE STAGE If the axial load exceeds the maximal permissible load of the actuator the available travel range will be reduced and the stage might even be damaged ND Newport Experience Solutions 7 EDH0259En1010 08 10 XPS DRVP1 4 0 Specifications 4 1 XPS DRVP1 Compatibility and Functional description Newport XPS DRVPI driver board has been specially designed to drive the following Newport piezoelectric actuators and stages NPA50 NPASOV6 NPASOSG NPASOSGV6 Stage Series Without Position Sensor With Position Sensor NPA25 NPA25V6 NPA25SG NPA25SGV6 NPA100 NPA 00V6 NPA100SG NPA100SGV6 NPC3 NPC3SG NPM NPM140 NPM140SG NPM180 NPM180SG NPO100 NPO100SG NPO140 NPO140SG NPO250 NPO250V6 NPO250SG NPO250SGV6 NPX400 NPX400SG NPXY 200 NPXY200SG Figure 6 XPS DRVPI compatibility list After installation in the XPS controller the XPS DRVP1 board allows o Automatic reading of stages parameters stored during final testing in the factory o Automatic setting of control loop type open or closed loop o Ensuring absolute positioning of the stage under different axial loads due to its Range shifting function o Providing voltage information relative
7. menu select the corresponding stage and then click on Modify button SYSTEM STAGE gt R Lpr ow Diin CONTROLLER CONFIGURATION FRONT PANEL TERMINAL Add from database Add custom stage Modify Stage modification NPA1005G D NPX400SG D NPX400 D NPXY200SG D X NPXY200SG D Y Renishaw Interpole SRSOCC TRA6CC NPX400SG D XPS DRVP1 UTS150PP Duplicate ND Newport Experience Solutions 13 Delete EDH0259En1010 08 10 XPS DRVP1 EDH0259En1010 08 10 o Then in the parameters list find the line starting with DriverStagePositionOffset Stage configuration edition NPX400SG D SmartStageName NPX4005G D S Position servo loop type CorrectorType NoEncoderPosition MotionDoneMode Theoretical Driver command interface MotorDriverinterface AnalogPositionPiezo Motor driver model IDriverName XPS DRVE1 Driver parameters DriverNotchFrequency 1000 0 Hz float value 0 and lt 5000 DriverNotchBandwidth 50 0 Hz float value 0 and lt 5000 DriverNotchGain 1 0 float value 0 DriverLowpassFrequency 50 Hz float value 0 and lt 5000 DriverKI 31 float value 0 IDriverFatalFollowingError 60 units float value 0 IDriverStagePositionOffset 0 units float value DriverTravelCorrection 0 ppm float value 1e6 and lt ie6 Position encoder interface IBacklash 0 vij Cancel o Replace the current parameter value by Offset2
8. o Verify the current parameter value Ifitis different from 0 default value replace it by 0 and then click on Modify then Reboot and finally restart this procedure Si it is already equal to 0 continue this procedure o Inthe FrontPanel Move menu Click on initialize then Home buttons of the desired axis Launch an absolute move to position 0 o Reset to 0 your external sensor display o Inthe FrontPanel Move menu launch an absolute move to the stage maximum position and note this value as Cry o Note your external sensor position value as Cp o Calculate the correction coefficient Kp 10 Cyy CRY Cry o Return into STAGE Modify menu to display DriverTravelCorrection parameter value Stage configuration edition NPX400SG D SmartStageName NPX4005G D Aa Position servo loop type CorrectorT ype NoEncoderPosition MotionDoneMode Theoretical Driver command interface MotorDriverinterface AnalogPositionPiezo Motor driver model DriverName XPS DRVP1 Driver parameters DriverNotchFrequency 1000 0 Hz float value 0 and lt 5000 DriverNotcnBandwidth 50 0 Hz float value 0 and lt 5000 DriverNotchGain 1 0 float value 0 DriverLowpassFrequency 50 Hz float value 0 and lt 5000 DriverKI 31 float value 0 DriverFatalFollowingError 60 units float value 0 DriverStagePositionOffset 160 units float value DriverTravelCorrection 0
9. 0 DriverNotchBandwidth 50 0 DriverNotchGain 1 0 DriverLowpassFrequency 50 DriverKI 3 1 DriverFatalFollowingError 1 0 DriverStagePositionOffset 0 DriverTravelCorrection 0 Position encoder interface Backlash 0 CurrentV elocity CutOffFrequency 100 CurrentAccelerationCutOffFrequency 100 Positioner MappingFileName Limit sensors input plug ServitudesType Piezo Maximum Velocity 4000 MaximumAcceleration 100000 EmergencyDecelerationMultiplier 4 MinimumJerkTime 0 04 MaximumJerkTime 0 04 TrackingCutOffFrequency 25 Home search process HomeSearchSequenceType CurrentPositionAsHome HomeSearchMaximumVelocity 4 HomeSearchMaximumAcceleration 100 HomeSearch TimeOut 60 Driver board name DO NOT MODIFY Control loop parameters depending on the stage type DO NOT MODIFY Offset parameter See chapter Offset adjustment procedure Accuracy parameter See procedure chapter Offset adjustment Control loop parameters DO NOT MODIFY Control loop parameters DO NOT MODIFY General parameters Not used by XPS DRVP1 Figure 10 XPS file Stages ini Experience Solutions EDH0259En1010 08 10 XPS DRVP1 11 0 Maintenance 11 1 Axis initialization after error In case of malfunction the XPS DRVPI driver board returns an error and the XPS controller will automatically kill the axis XPS website allows checking the type of error s Select FRONT PANEL Driver Status to display the current XPS DRVPI
10. 1 1 Open loop In the case of stages without sensors an open loop control is used and the XPS DRVPI board generates a voltage to control the actuator proportional to the theoretical desired position Stage Actual Position Operators can use the XPS control range set from 0 to Actuator range o oe Gi x a I o lt The actuator moves between positions rest position V 0 and rest position actuator range V Resting position Actuator 0 However the stage s actual position will be Command Position affected by the intrinsic hysteresis shown in Figure 1 Figure I Open loop without axial load If an axial load is initially applied to the stage the actuator shrinks or expands accordingly The actuator rest position is shifted up or Stage Actual Position down Axial The operator still issues a command via the Load XPS to a position between 0 and the Actuator range The actuator moves between positions New rest position V 0 and Positive New rest position actuator range V V max Figure 2 Load d ON g ar ae 4 gt lt Actuator Range Figure 2 Open loop with axial load WARNING DO NOT OVERLOAD THE STAGE If the axial load exceeds the maximal permissible load of the actuator the available travel range will be reduced and the stage might even be damaged Expenence Soutons 5 EDH0259E
11. Driver Board for XPS Controller and Piezoelectric Stages User s Manual Newport Las nrin afa pair ITI yne E AWGI lence sQIUTIONS XPS DRVP1 Warranty EDH0259En1010 08 10 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from 1 Incorrect usage o With a non Newport XPS controller o Improper connection and grounding gt Connectors must be properly secured gt Use of extension cables without Newport agreement gt When the load on the stage presents an electrical risk it must be connected to ground 2 Modification of the board or any part therein THIS WAR
12. NERE SNE ENERET 21 11 3 RDA ne ene LENE BESES NEDRE BES ne Cr ter men EL SED ES REE TEE nee ras meee rennin nent ent SEERE ae TRES RE errr ee 21 SERVICE FOR sivesvccuicesesesecsavedaiweiseeiewsavecadwencbikeveazecviwstebdlawsansasiwotwbdiewsseuanieoteetiecs 23 ND N Experience Solutions iv XPS DRVP1 Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations ATTENTION This board is designed to be used ONLY inside a Newport XPS controller Proper installation procedure must be followed to ensure CE Mark compliance Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or
13. RANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES First printing 2010 Copyright 2010 by Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual is provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings Experience Solutions ii XPS DRVP1 Table of Contents 1 0 2 0 2 1 22 2 24 25 3 0 3 1 4 0 4 1 4 2 5 0 5 1 52 5 3 6 0 7 0 8 0 Experience Solutions NA e E E 11 Penmon and VMS oss a a de te a oneri 1V IVY ES D EEEEEZ Vv CAUTIONS pons Er EErEE TENAAAN En Vil AA NOTA WC I Oi PSP ANNE nee ne anres 1 Overview of piezoelectric technology ssssessssecsseecoseccosecsoseecoseesoseesoo 2 Actuator principle eeccesssscccccessssssseceeecesssessneeeeeeeesessnaaeeeeceseeesseeeeeeeesseeaueeeeeseeseeeaaeeeeeees 2 FU AOR Havel Re EEEE EEEN EEEE EAEE Ee 2 Stages principle eee eeesseceeesceceeseeeeesseeeeesseeeessseeseesseeeees Erreur Signet non d fini BP OSU We SOG See crs soeeetsce cine cence En EEEE EEEE 3 Piezoelectric technology pros and cons 4 Newport solution advantages ccccsscccsss
14. age varies from one stage to another A calibration of this voltage output can be done To do so proceed as follows Memorize output voltage values Vmax et Van for stages maximal and minimal positions Pmax et Pum Calculate resolution V max Vin Pmax Pum en V um WARNING In case of a stage placed in disable mode and without any axial load if BNC output value is lower than 4 Volts or higher then 6 Volts the stage has probably been damaged Contact Newport for service Experience Solutions 17 EDH0259En1010 08 10 XPS DRVP1 9 0 Specific APIs In addition to the standard XPS commands the following XPS DRVPI board specific APIs are available PositionerDriverFiltersGet to get axis current close loop control parameters KI close loop integral coefficient Notch filter frequency Notch filter bandwidth Notch filter gain and Low Pass filter frequency PositionerDriverFiltersSet to set axis closed loop control parameters PositionerDriverStatusGet to get driver board current status number PositionerDriverStatusStringGet to get driver board detailed status PositionnerDriverPositionOffsetsGet to get offset parameters see Offset adjustment procedure chapter 10 0 Parameters description Parameters required to drive piezoelectric stages are preset in the factory within the system ini and stages ini files and some of these can be modified by the us
15. ccsssccssssccsssccsssccsssccessscosess 4 6 0 1 80 I Ta 0 DS a eee herent ESS REE no 4 3 1 1 Open loop eerrereereen rer rcrerr rer esserne esserne etern eee essere nere rte reer errr rer reer 5 3 1 2 Close loop control ESS dre neneenaa anse esta en tereeeetscseennsede 6 SPECIALO S SEE ER 8 XPS DRVPI Functional description siscsesccscisszssosscccsaassanseccacerdianadedecantaadeansdonacacadandieooieetiaads 8 APS DR VPI Specifications Se anne ne ado con de ne no ne es 8 SETA ics ceseetcccoeessecustcecscsvccesssesoesssvcosessssenevscecasievecseseutesseaevsuncarasees 9 Installing the XPS DRVPI in the XPS controller eecsesscceccessessneeeeeeeessessneeeeeeees 9 D LE SCOR CAO oo ae 9 PONS AS D E ee da 10 5 3 1 AP COCO ES ES EN EDESE 10 5 3 2 PORTS VO EAT AO EET EET res 10 5 3 3 Axial Load VER na de 11 Offset adjustment procedure ccccsscccsssccssscccsssccsssccsssccssccescoess 13 Accuracy linear correction procedure 15 Description Use of BNC OUtpult cccccssssssscccsssssccccsssccsseecees 17 iii EDH0259En1010 08 10 XPS DRVP1 EDH0259En1010 08 10 9 0 SPECCHI APIS nn dentiste a 18 10 0 Parameters des riphOM sind 18 10 1 CON SC TI eaten M en TERESE ao FE REDERE 18 10 2 CS 19 11 0 IVE AICO ANIC si aaaeaii 20 11 1 Axis initialization after CLLOL cccccceccscceccecceccscceccecceccaccaccacceecsccaccaccsscaccescascascascsscescasees 20 11 2 INT AAS OIC SERENE NERONE E SEIE EET EET ENE EET E
16. d Edit ee sy NPX4005G D Pos v Cancel PositionerDACOffsetDualGet Edit Cancel PositionerDACOffsetDualSet double StagePositionOffset PositionerDACOffsetGet PositionerDACOffsetSet PositionerDriverFiltersGet double GagePositionOffset PositionerDriverFiltersSet PositionerDriverPositionOffsetsGet PnsitinnerNriverStatiisset The command returns 3 numbers separated by comas The first O indicates the correct execution of the command The second number indicates the current value in microns of the DriverStagePositionOffset parameter of the stages ini file See chapter Offset adjustment procedure Default value 0 ND Newport Experience Solutions 11 EDH0259En1010 08 10 XPS DRVP1 Note 5 3 3 2 Note EDH0259En1010 08 10 The third number indicates the current position in microns of the stage compare to the stage origin Verify that this value is less than 5 of the stage travel range ND Nevvport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION L Sal ry Function list Command PositionerCorrectorPIPositionSet A API to execute nd Et me PositionerDriverPositionOffsetsGet NPX400SG D Po Execute PositionerCurrentVelocityAccelerationFiltersSet Recited message PositionerDACOffsetDualGet x ni PositionerDACOffsetDualSet PositionerDACOffsetGet 0 0 37 4345245 PositionerDACOffsetSet PositionerDriverFil
17. driver board N gan rt SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION r PES ies Jog Spindle 1 0 view I Oset Positionererrors Hardware status Driver status NPX400SG D Pos Refresh rate frames sec 1 00 Manual refresh Refresh Following errors can occur on a XPS DRVPI1 driver board b Broken fuse or Voltage out of range c Thermistor fault d Initialization error e PT Dynamic error or Following error g Stage not connected h Inhibition input 1 Driver fault gt CAD Nevvport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION Le RE EL Move Jog Spindle I O view I O set Positioner errors Hardware status Driver status NPX400SG D Pos Refresh rate frames sec 1 00 Manual refresh After cancelling the error the axis must be re initialize This can be done through the XPS Website FRONT PANEL Move page by clicking on Ca eV SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION L p Sab ere Move Jog Spindle I Oview I Oset Positionererrors Hardware status Driver status ol 22 NPX400SG D Pos 42000 320 CO Newport EDH0259En1010 08 10 20 Experience Solitons XPS DRVP1 11 2 11 3 Experience Solutions However if the driver board error hasn t been reset the XPS will reset it but will also return error 5 st Or NPX400SG
18. equipment NOTE Additional information the user or operator should consider Experience Solutions v EDH0259En1010 08 10 XPS DRVP1 Warning WARNING Do not attempt to modify this board this may cause an electric shock or downgrade its performance WARNING This product like all microcontroller products uses semiconductors that can be damaged by electrostatic discharge ESD When handling care must be taken so that the devices are not damaged Damage due to inappropriate handling is not covered by the warranty Cautions CAUTION As Newport piezoelectric stages might include flexure mechanisms with limited load capacity do not move the moving part of the stage manually CAUTION Do not disconnect the stage cable when the XPS controller is powered ON Experience Solutions EDH0259En1010 08 10 vi XPS DRVP1 XPS DR VP1 1 0 Introduction This manual describes the operating instructions for the XPS DRVPI driver board Position sensor XPS feedback Internal monitoring connector Connector BNC Stage cable connector Sub D 25 Pins XPS DRVP1 Driver board Newport XPS DRVPI driver board has been specially designed to provide POWERFUL and SIMPLE CONTROL through XPS controller of Newport stages motorized by piezoelectric actuators from the following series NPA NPM NPO NPX NPXY NPXY and PSM RECOMMENDATION You must read the cha
19. er Examples of piezoelectric stage parameters 10 1 System ini File Description Remark GROUPS SingleAxisInUse NPX400SG D SingleAxisThetaInUse Group definition chapter Piezoelectric stages can be used SpindleInUse only in the following groups XYInUse SingleAxisInUse XYZInUse XY InUse MultipleAxesInUse XYZInUse Single Axis WithClampingInUse MultipleAxesInUse TZInUse InterlockedGroups aes Positioner definition chapter PositionerInUse Pos P NPX400SG D Pos Positioner name Must correspond to the name defined in the 2 previous chapters PlugNumber 2 Board physical address XPS slot number StageName NPX400SG D Name of the chapter of the stages ini file containing the stage parameters General parameters Not used by XPS DRVP1 Figure 9 XPS file System ini Experience Solutions EDH0259En1010 08 10 18 XPS DRVP1 10 2 Stages ini File Description Remarque NPX400SG D Chapter name Must correspond to the name defined in the System ini file 7 Stage name Must correspond to the name memorized in the SmartStageName NPX400SG D stage EEPROM Position servo loop type CorrectorType NoEncoderPosition MotionDoneMode Theoretical Control loop parameters DO NOT MODIFY Driver command interface MotorDriverInterface AnalogPositionPiezo Motor driver model DriverName XPS DRVP1 Driver parameters DriverNotchFrequency 1000
20. erDriverPositionOffsetsGet Function list Function argument s PositionerDriverPositionOffsetsGet PositionerCurrentVelocityAccelerationFiltersSet PositionerDACOffsetDualGet PositionerDACOffsetDualSet PositionerDACOffsetGet PositionerDACOffsetSet PositionerDriverFiltersGet PositionerDriverFiltersSet PositionerDriverPositionOffsetsGet PositionerDriverStatusGet PositionerDriverStatusStringGet PositionerEncoderAmplitudeValuesGet PositionerEncoderCalibrationParametersGet Get driver stage and gage position offset char PositionerName 251 NPX400SG D Pos v double StagePositionOffset Cancel double GagePositionOffset o Select the Positioner name then click on OK then on Execute Function list Command PositionerDACOffsetSet PositionerDriverFiltersGet PositionerDriverFiltersSet PositionerDriverPositionOffsetsGet PositionerDriverStatusGet PositionerDriverStatusStringGet PositionerEncoderAmplitudeValuesGet PositionerEncoderCalibrationParametersGet O API to execute PositionerDriverPositionOffsetsGet NPX400SG D Po Received message A As 0 0 23 146225 This command returns 0 Offsetl Offset2 with The first O indicating the correct execution of the command Offsetl corresponding to the parameter DriverStagePositionOffset current value Offset2 corresponding to the stage current position O In the list proposed by the STAGE Modify
21. ezoelectric stage to acquire the actual stage position variation o In the list proposed by the STAGE Modify menu select the corresponding stage and then click on Modify button CAD Nevvport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL Lpr oe Di EL Add from database Add custom stage Modify Stage modification NPA100SG D NPX400SG D NPX400 D NPXY200SG D X NPXY200SG D Y Renishaw Interpole SRSOCC TRAG6CC NPX400SG D XPS DRVP1 UTS150PP Duplicate Delete o Then in the parameters list find the line starting with DriverStagePositionOffset Stage configuration edition NPX400SG D SmartStageName NPX4005G D Position servo loop type CorrectorType NoEncoderPosition MotionDoneMode Theoretical Driver command interface MotorDriverinterface AnalogPositionPiezo Motor driver model DriverName XPS DRVP1 Driver parameters DriverNotchFrequency 1000 0 Hz float value 0 and lt 5000 DriverNotcnBandwidth 50 0 Hz float value 0 and lt 5000 DriverNotchGain 1 0 float value 0 DriverLowpassFrequency 50 Hz float value 0 and lt 5000 DriverKI 31 float value 0 DriverFatalFollowingError 60 units float value 0 DriverStagePositionOffset 160 units float value DriverTravelCorrection 0 ppm float value 1e6 and lt ie6 Position encoder interface Backlasn 0 v ND Newport Experience Solutions 15 EDH0259En1010 08 10 XPS DRVP1
22. he relative displacement measured at the strain gauge is directly proportional to the stage mobile part is displacement and so provides position information The sensor s range is greater than the full physical range of the stage Actuator Physical ms Ce panes Sensor Se Range ND Newport Experience Solutions 3 EDH0259En1010 08 10 XPS DRVP1 2 5 Piezoelectric technology pros and cons Stages using piezoelectric technology usually have a relatively small footprint and offer high sensitivity nanometer level combined with fast motion frequency of several hundreds Hertz for actuators Position can be controlled simply in open loop by providing a voltage to the actuator 0 to 100V but hysteresis can reach up to 10 of the range Direct type of stages offers a short range few hundred microns with high axial load capacity several tens of kilograms and good axial stiffness several tens of N um Amplified type of stages offers longer range but drastically reduced axial load capacity kilogram level and axial stiffness N um level Stages equipped with position sensors allow hysteresis compensation but requires close loop control mode Higher absolute accuracy can be obtained but requires stage calibration using an external device 3 0 Newport solution advantages Newport piezoelectric actuators and stages controlled through the XPS controller and the XPS DRVP1 driver board provide simple efficient so
23. lutions for a wide variety of applications from fast positioning with high resolution to fast signal tracking and to true high resolution accuracy absolute positioning All Newport piezoelectric stages are tested and calibrated in the factory Calibration parameters like piezoelectric actuator input voltage range stage range sensor if present position and resolution etc are loaded into the stage s EEPROM During initialization the XPS controller and the XPS DRVPI driver boards read these parameters and automatically configure the axis for optimum control open close loop resolution range etc The stage can then be used like any motorized stage with origin position software limits relative and absolute moves etc XPS DRVPI driver board also features a position sensor feedback analog signal output providing precise stage real position information See chapter BNC output Newport solution also allows sensor calibration to improve the stage absolute accuracy See chapter Accuracy linear correction 3 1 Control loops After power on and during initialization the XPS controller through the XPS DRVPI1 driver board reads the parameters from the connected stage and sets the corresponding control loop type o Without sensor i e NPX400 D NPXY200 D etc Open loop control o With sensor 1 e NPX400SG D NPXY200SG D etc Close loop control GO Newport EDH0259En1010 08 10 4 best Setar XPS DRVP1 3
24. n1010 08 10 XPS DRVP1 3 1 2 Close loop control For stages equipped with a strain gage sensor the XPS controller and XPS DRVPI1 board allow true absolute positioning by generating the necessary voltage to the actuator to maintain the desired absolute position based on the sensor scale At power on and during initialization the stage usable range corresponding control voltage sensor origin and current positions are read from the stage EEPROM and are used to set the necessary driver board closed loop parameters and also the XPS control range at 80 of the open loop actuator range As described in the Actuator travel range chapter modifying the stage axial load will shift the actual stage travel range within its physical range Three cases can be considered o Without any axial load a Newport piezoelectric stage resting position is very close to its sensor origin position and the Default configuration can be used o With a small variation of the axial load the resting position is slightly shifted causing a stage Usable range limitation o In the case of a high axial load although the actuator range is shifted along the sensor absolute scale and the usable range is reduced the XPS controller allows Full range recovery and maintains the same origin This is done by setting the DriverStagePosition Offset Dopo parameter 3 1 2 1 Default configuration By default the DriverStagePositionOffset Dispo parameter is set to
25. ognized the driver board and the stage Example of the XPS Front panel Move page CAD Newport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION Lpr an Sa Move Jog Spindle 1 0 view I O set Positioner errors Hardware status Driver status o 2 initialize Npxaoosc p Pos 000 _ ol 5 3 2 Axis initialization Note When using the stage for the first time initialize the axis without load on the stage The XPS DRVPI driver board must be initialized to set all axis parameters loop type range and software limits This can be done by clicking on Initialize button QD AVANT ete gi SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION Lew an Sat Move Jog Spindle 1 0 view I O set Positioner errors Hardware status Driver status 0 42 Home NPx400SG D Pos l ail Note At the end of initialization the axis control loop is activated and so the stage might slightly move to reach the actual command position Experience Solutions EDH0259En1010 08 10 10 XPS DRVP1 The axis must now be referenced by clicking on Home button CAD Newport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION L FE Sab ry Move Jog Spindle I Oview I Oset Positionererrors Hardware status Driver status o 11 Disable NPxa00sG D Pes 4000 lle Go FH The axis is now ready to be used Note A p
26. ort products are provided with standard cable length The use of extension cable is not advised as it might result in the degradation of your product performance Please contact Newport Corp for any cable extension need 9 EDH0259En1010 08 10 XPS DRVP1 5 3 Powering up After installing the XPS DRVPI board the XPS controller can now be powered on However the presence of this new board requires updating the XPS controller initialization file system ini Then after the correct parameter setting the axis driver board stage without axial load can be initialized Finally in case of a stage equipped with position sensor verify the behaviour of the axis depending on the axial load place on the stage 5 3 1 XPS Controller For instructions on how to update system ini initialization file refers to Getting started configuring the controller section of the XPS UserManual See also the File lt lt System ini gt gt chapter for system ini file example Note If the new driver board and or the stage are not automatically detected the XPS firmware might need to be updated manually Refer to chapter 6 4 Software Tools Maintenance and Service of the XPS UserManual documentation Latest XPS firmware package can be downloaded from Newport ftp site at ftp download newport com MotionControl Current MotionControllers XPS Updates At the end of start up procedure the XPS controller has rec
27. ppm float value 1e6 and lt ie6 Position encoder interface Backlash 0 v o Set the parameter DriverTravelCorrection value to K o Click on Modify and then Reboot buttons and wait for XPS controller initialisation completion The stage is now ready to be used with improved absolute accuracy Note Linear compensation does not affect BNC voltage output ND Newport Experience Solutions EDH0259En1010 08 10 16 XPS DRVP1 8 0 Description Use of BNC output Note This output can be used only if the driver board controls a piezoelectric stage equipped with a position sensor The XPS DRVP1 driver board features a BNC connector that provides an analog voltage image of the stage current position Output voltage ranges from 0 to 9V with Stage 5V when the stage is at its origin physical Sensor corresponding to the sensor R value possible scale BNC range Output Rmax QV when the stage is at its lower limit not energized and maximum axial load ne l0V when the stage is at its upper limit energized at its maximum voltage and without axial load This output can be monitored by an oscilloscope or a multi meter Accuracy of this output voltage is directly related to position sensor quality Figure 8 BNC output during displacement Notes BNC output voltage does not depend on Offset nor Linearity parameter values BNC output volt
28. pter 5 Installing the XPS DRVP1 in the XPS controller carefully before attempting to use the XPS DRVP1 driver board 1 EDH0259En1010 08 10 XPS DRVP1 2 0 Overview of piezoelectric technology 2 1 Note 2 2 EDH0259En1010 08 10 Actuator principle A piezoelectric actuator is made of crystals PZT Plumbium Zirconate Titanate having three properties o Itexpands whenever a voltage is applied at the ends The crystal expands linearly to the voltage applied which can be up to 100V L K V K crystal expansion coefficient in um V o Itshrinks whenever a force is applied on it The compression of the crystal also follows a linear law depending on the applied force L F Ke Kc crystal stiffness in N um represented by the springing the figure beside o Ithas hysteresis H Under the same conditions of input voltage and force applied an actuator does not go back to the exact same size Consequently the length of the crystal depends on the voltage and on the force applied This expansion being relatively small L 0 1 L several crystals can be stacked and wired in parallel to obtain longer travel ranges The piezoelectric principle is reversible by applying a force to this crystal it creates a voltage difference between the ends Actuator travel range Without being powered and without any force applied a piezoelectric actuator rests in an equilibrium region called
29. r warranty 21 EDH0259En1010 08 10 XPS DRVP1 Experience Solutions EDH0259En1010 08 10 22 XPS DRVP1 Service Form Your Local Representative Tel Name eeseseseseses iti Return authorization Fl OO Please obtain prior to return of item Company SS Address 2 Date Country er ee sr ns Ik Phone Number 2 o P O Number Fax Number 2 Item s Being Returned __ Modell _ Serialf __ Description __ Reasons of return of goods please list any specific problems __ EDH0259En1010 08 10 23 Newport Visit Newport Online at Www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 949 253 1461 or 800 222 6440 x31461 e mail sales newport com Technical Support Tel 949 253 1406 or 800 222 6440 x31406 e mail tech newport com Service RMAs amp Returns Tel 949 253 1694 or 800 222 6440 x31694 e mail rma service newport com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde Bat B ZI Bois de l pine BP189 91006 Evry Cedex France Sales Tel 33 0 1 60 91 68 68 e mail france newport fr com Technical Support e mail tech_europe newport com Service amp Returns Tel 33 0 2 38 40 51 55
30. reset value can be set to the current position See chapter Offset adjustment procedure 5 3 3 Axial Load verification For stages equipped with a position sensor the following tests can be performed to verify axis behavior based on an axial load 5 3 3 1 No axial Load All Newport piezoelectric stages are tested and calibrated in the factory Calibration parameters saved in the stage s EEPROM allow the driver board to set the XPS controller scale Zero position at the stage origin With no applied power any Newport piezoelectric stage rests in an equilibrium or rest position based on actuator s hysteresis Although very close this position is always slightly different from the stage origin within 5 of the total travel range The value at this rest position can be obtained using XPS Website terminal page Note Axis must be disabled prior to using this command In the list select the command PositionerDriverPositionOffsetsGet then click on OK and finally Execute ND Nevvport SYSTEM STAGE CONTROLLER CONFIGURATION FRONT PANEL TERMINAL TUNING DOCUMENTATION L y w Sal ere Function list Function argument s PositionerDriverPositionOffsetsGet PositionerCorrectorPIPositionSet A Get driver stage and gage position offset PositionerCorrectorTypeGet sit rie j PositionerCurrentVelocityAccelerationFiltersGet char PositionerName 251 OK PositionerCurrentVelocityAccelerationFiltersSet INPX4005G D Pos s
31. tersGet PositionerDriverFiltersSet PositionerDriverPositionOffsetsGet WARNING If the resting position value of a non energized piezoelectric stage and without any axial load is greater than 15 of its total range the stage is probably damaged Contact Newport for service If the axis is not disabled the command will return an error Error 118 Function is only allowed in DISABLE group state With intended axial Load The intended axial load can now be applied The rest position will change Consult stage documentation to ensure intended maximal axial load is within specification Proceeding the same way as above verify that the current position is less than 80 of the stage travel range WARNING If the resting position value of a non energized piezoelectric stage and with its intended axial load is greater than 80 of its total range the stage is overloaded Using it this way might damage it DO NOT USE THIS CONFIGURATION Contact Newport for service GO Newport Experience Solutions 12 i XPS DRVP1 6 0 Offset adjustment procedure To modify the offset parameter and therefore shift the command range proceed as follows Note Axis must be initialized prior to proceed otherwise the command will return an error Error 117 Positioner must be initialized O O Logon to the XPS website as an Administrator In the Terminal menu select the command Positionn
32. to the sensor position if present in the stage through BNC connector 4 2 XPS DRVP1 Specifications Specifications Output Voltage 10V 130 V Resolution lt 10 mV Max Output Current BNC Output voltage 0 10V Internal Frequency Figure 7 XPS DRVPI Specifications Experience Solutions EDH0259En1010 08 10 8 XPS DRVP1 5 0 Starting up 5 1 DZ Installing the XPS DRVP1 in the XPS controller WARNING Do not open the protective conductive packaging until you have read the following and are at an approved anti static work station Use a conductive wrist strap attached to a good earth ground Always turn the controller s power OFF before installing a board Always discharge yourself by touching a grounded bare metal surface or approved anti static mat before picking up an ESD sensitive electronic component Use an approved anti static mat to cover your work surface To install XPS DRVPI driver board in XPS controller proceed as follows o Select an available slot and remove the corresponding plate 1 screw o Remove the board from its package holding it by the rear plate avoid touching the printed circuit o Insert the board in the slot and tighten the blocking screw Stage connection WARNING Always turn the controller s power OFF before connecting to a stage Connect the 25 pin male Sub D connector to the XPS DRVPI1 driver board terminal WARNING All Newp
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