User Manual PZ210E - Physik Instrumente
Contents
1. E 462 PZ210E Release 1 1 0 Units Rz mA mA MVRMS mVp p kt mm kg VDC mA Page 15 Technical Data Piezo Nano Positioning PI 5 2 Connectors 5 2 1 High Voltage Connector Type E 462 00 LEMO EGG 0B 701 CJL 1173 E 462 0E1 LEMO PHG 0B 701 CJL1173 D42 HV OUT O t 1000 V Controller socket front view Pin Assignments HV OUT HV output up to 1000 V PGND Power ground 5 2 2 Control Input E 462 00 BNC connector center positive E 462 0E1 header pins 5 and 6 see p 10 5 2 3 Supply Power Connector E 462 00 Industry standard 2 conductor mini phone jack tip positive 12 VDC E 462 0E1 header pins 1 and 2 see p 10 WWW pI ws E 462 PZ210E Release 1 1 0 Page 162. WWW pI ws E 462 PZ210E Release 1 1 0 Page 11 Start Up Piezo Nano Positioning PI m Connect an external signal source to pins 5 and 6 m Interconnect pins 4 5 and 6 via an external potentiometer as shown in Figure 2 above This option uses the 5 V DC reference available on pin 4 WWW pI ws E 462 PZ210E Release 1 1 0 Page 12 Piezo Nano Positioning PI Customer Service ac Customer Service Call your PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system WR Current firmware version of the controller if present m Version of drivers and or host software if present m Operating system on host PC if present WWW pI ws E 462 PZ210E Release 1 1 0 Page 13 Piezo Nano Positioning PI Disposal 4 Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH amp Co KG Auf der Rom
3. Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG C C Manufacturers Auf der Romerstrasse 1 Address D 76228 Karlsruhe German The manufacturer hereby declares that the product Product Name Piezo Amplifier Model Numbers E 462 Product Options all complies with the following European directives 2006 95 EC Low voltage directive 2004 108 EC EMC Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 05 98 A1 08 99 class A EN 55022 09 98 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 April 4 2008 Karlsruhe Germany LM eee a Dr Karl Spanner President About this Document Users of This Manual This manual is designed to help the reader to install and operate the E 462 Piezo Amplifier It assumes that the reader has a fundamental understanding of motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the E 462 Piezo Amplifier as well Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death Indicates the presence of high voltage gt 50 V Calls attention to a procedure pr
4. PI DANGER IMPROPER WIRING Improper wiring of HIGH VOLTAGE connectors can cause death injury or damage Modification of HIGH VOLTAGE connectors should only be carried out by the manufacturer Any unauthorized modification may jeopardize operating personnel Treat HIGH VOLTAGES and HIGH CURRENTS with respect CAUTION Exposing some PZTs to voltages too far outside their operating range will destroy the active element in the actuator Make sure that both the polarity and the voltage as seen by the PZT are within the allowable range Be especially vigilant regarding polarity when using older actuators adapter cables and controllers set up for non standard voltage ranges CAUTION Read this before operating the equipment covered in this manual Always keep the User Manual safe and close to the described device In case of loss or damage to the instructions please order a new copy from your PI distributor or download one from www pi ws http www pi ws Also keep and add all further information e g extended instructions or Technical Notes to the User Manual 1 4 Unpacking WWW pI ws Unpack the E 462 Piezo Amplifier with care Compare the contents against the items covered by the contract and against the packing list The following components are included E 462 Piezo amplifier as ordered E 660 PS Wall plug power supply With E 462 00 only PZ210 User manual for E 462 E500T0011 Technical Note for Analog Driver Set Inspec
5. Piezo Nano Positioning PI Introduction Overview The E 462 00 piezo driver is a low cost amplifier driver for PICA high voltage PZTs It can output a peak current of 0 5 mA and is specially designed for static and quasi static applications Analog Control E 462 amplifiers are designed to provide precise control of open loop piezo positioning systems The amplifier output voltage is determined by an analog control signal PCB Mount Version for OEMs The E 462 0E1 version is fully enclosed in a metal case and designed for mounting on circuit boards All input connections are via 6 header pins located on the bottom The PZT piezo high voltage output is via a Coaxial cable with LEMO connector If dynamic gt 1 Hz PZT operation is required please consider instead the E 464 3 channel bench top amplifier E 470 or E 508 amplifiers modular systems with sensor servo option 1 2 Prescribed Use www pi ws Based on their design and realization E 462 Piezo Amplifiers are intended to drive capacitive loads in the present case piezoceramic actuators E 462s must not be used for applications other than stated in this manual especially not for driving ohmic resistive or inductive loads E 462 PZ210E Release 1 1 0 Page 2 Introduction Piezo Nano Positioning PI Observe the safety precautions given in this User Manual The E 462 is a laboratory apparatus as defined by DIN EN 61010 It meets the following minimum speci
6. Piezo Nano Positioning PI PZ210E User Manual E 462 Piezo Amplifier Release 1 1 0 Date 20 July 2011 This document describes the following products E E 462 00 HVPZT Piezo Amplifier 10 to 1000 V Bench Top E E 462 0E1 HVPZT Piezo Amplifier Module 10 to 1000 V OEM Version Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany WS info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PIC PICMA Di mem PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation The following designations are protected company names or registered trademarks of third parties LabVIEW The products described in this manual are in part protected by the following patents US Patent No 6 950 050 Copyright 1999 2011 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Document Number PZ210E BSc BRo Release 1 1 0 E 462 User PZ210E110 doc Subject to change without notice This manual is superseded by any new release The newest release is available for download at www pi ws http www pi ws
7. actice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not i correctly performed or adhered to could result in damage to m equipment NOTE Provides additional information or application hints Any optional elements which might be mentioned in this documentation are described in their own manuals Current releases can be downloaded from the PI Website as PDF files www pi ws http www pi ws Updated releases are available for download from www pi ws or by email contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introduction 2 Mel POW TEE 2 t2 eelere EE 2 To Saey E e EE 3 TA RID AC KIN WEE 4 t9 Computer Control EE 5 Start Up 6 A E AOO A 6 2 1 1 Front and Rear Panel Elements ccccccccseceeceeeeeeeeeeseeeeseeeeesaeeeees 7 212 CONTO SIONA sisi c cccarecees ee ES 8 SE SlaninG peralon acaulescent aa ira aca 8 214 POWEr Supply Tor E 462 00 ccc eee ele 9 22 EAZ OE EE 10 2207 EIER 10 222 STEE 11 2293 E edel ele EE 11 Customer Service 13 Disposal 14 Technical Data 15 Bl SPSCIICAHONS E 15 52 EIER EE 16 5 2 1 High Voltage Connector eoaa1nnnnnneoseennnnnnennssnnnrnnnensennnrrnrnessnnnnnnnnne 16 522 GCOMMO NOUN EE 16 523 Supply Power Connector s ennneeneennnensennenenrnnrneosrnrnrrsrnrerensnnrrernnnne 16 Introduction 1 1 1
8. erstr 1 76228 Karlsruhe Germany WWW pI ws E 462 PZ210E Release 1 1 0 Page 14 Technical Data Piezo 5 Technical Data 5 1 www pi ws Specifications Function Amplifier Channels Output voltage Average output power Peak output power lt 5ms Max average output current Peak output current lt 5 ms Current limitation Ripple noise O to 100 kHz Voltage gain Control input voltage Input impedance Frequency response Interface and operation PZT voltage output socket Control input socket DC Offset Miscellaneous Dimensions Mass Operating voltage Max operating current Operating temperature range Power supply E 462 00 Power amplifier for PICA high voltage PZTs J 10 to 1000 0 3 0 5 0 3 0 5 Short circuit proof 50 50 100 nF 100 1 0 to 10 10 Static and quasi static applications only LEMO EGG 0B 701 CJL1173 BNC 1 turn pot adds 0 to 10 V to Control input 250 x 150 x 73 0 5 12 10 90 5 C to 50 C over 40 C max av power derated 10 Wall plug unit Nano Positioning PI E 462 0E1 Power amplifier for PICA high voltage PZTs 10 to 1000 0 3 0 5 0 3 0 5 Short circuit proof 50 50 100 nF 200 1 0 to 5 10 Static and quasi static applications only LEMO PHG 0B 701 CJL1173 D42 Header pins 67 x 38 x 20 0 25 12 10 90 5 C to 50 C over 40 C max av power derated 10
9. fications for safe operation any more stringent specifications in the technical data table are of course also met Indoor use only Altitude up to 2000 m Temperature range 5 C to 40 C Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Line voltage fluctuations not greater than 10 of the line voltage Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 1 3 Safety Precautions Carefully read also the user manuals and or technical notes of all other components involved such as controllers or software Failure to heed warnings in this manual can result in bodily injury or material damage DANGER IMPROPER WIRING E 462 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Take special care if connecting products from other manufactures Follow general accident prevention rules Working with these devices requires adequately trained and educated operating personnel During operation do NOT touch any part which might be connected to the PZT HV output Make sure that your actuator or actuator cable shield is connected to a protective earth conductor WWW pI ws E 462 PZ210E Release 1 1 0 Page 3 Introduction Piezo Nano Positioning
10. on higher than that of the D A board is in the E 500 ACD driver set Activating Hyperbit requires purchase of the password which can be obtained from Pl under Order No E 500 HCD WWW pI ws E 462 PZ210E Release 1 1 0 Page 5 Start Up Piezo Nano Positioning PI e Start Up WARNING INPUT POWER E 462s need to be installed in such a way that they can quickly and easily be separated from their input power source NOTE The E 462 00 and E 462 0E1 are not equipped with active discharge circuitry but have a 5 M ohm 3 9 nF RC network Therefore PZT charge and discharge times will differ Installation and startup procedure depends on whether the E 462 00 or the E 462 0E1 is concerned 2 1 E 462 00 DANGER HIGH VOLTAGE E 462 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Take special care if connecting products from other manufactures Follow general accident prevention rules Working with these devices requires adequately trained and educated operating personnel During operation do NOT touch any part which might be connected to the PZT HV output Make sure that your actuator or actuator cable shield is connected to a protective earth conductor www pi ws E 462 PZ210E Release 1 1 0 Page 6 Start Up Piezo Nano Positioning PI 2 1 1 Front and Rear Panel Elements The E 462 00 piezo amplifier offers 1 channel with the following operating elements on the f
11. part which might be connected to the HV output Make sure that your actuator and pin 3 or 5 of the E 462 0E1 are connected to a protective earth conductor Figure 1 E 462 0E1 OEM module has HV cable on top and pins on the bottom not shown for PCB mounting 2 2 1 Connections Observe the safety precautions p 3 when handling the E 462 0E1 The piezo voltage output is on a short cable on the top side The connector is the standard LEMO socket PI uses for high voltage piezo actuators see Connectors p 16 With the unit powered down connect the piezo actuator to the LEMO socket The E 462 0E1 module is designed for PCB mounting All connections except for the piezo voltage output are made via the pins on the bottom side WWW pI ws E 462 PZ210E Release 1 1 0 Page 10 Start Up Piezo Nano Positioning PI Connect pin 3 or 5 to a protective earth conductor Pin Function 1 Supply Power GND 2 Supply Power 12 V DC 10 3 GND 4 Output reference voltage 5 V 5 GND 6 Input control voltage 0 to 5 V Figure 2 E 462 0E1 top view shown wired for manual operation with an external potentiometer using the on board 5 V DC reference voltage 2 2 2 Dimensions m Pin 1 1mm J m Ou Figure 3 E 462 0E1 bottom view dimensions in millimeters 2 2 3 Control Signal Output voltage is controlled by an analog signal in the 0 to 5 V range The signal can be generated with one of the following options
12. r The connection is on the rear panel Command the first motion of the piezo actuator by turning the DC OFFSET knob fully clockwise CW to run the actuator over the nominal travel range then turn the knob back fully CCW Make sure that the full voltage swing is attained If an external analog signal is used connect the signal source to the CONTROL INPUT BNC socket If the input signal range is not 0 to 10 V use the DC OFFSET knob to bias it accordingly The Output signal will be 100 times the sum of the DC offset and the control input E 462 PZ210E Release 1 1 0 Page 8 Start Up Piezo Nano Positioning P I 2 1 4 Power Supply for E 462 00 The E 462 00 bench top unit includes a wall plug power supply E 660 PS with interchangeable prong sets Slide the appropriate prong set into the body until it clicks in place Note that to remove a prong set it is necessary to press the plastic tab marked Push Fig 2 E 660 PS with Interchangeable prongs www pi ws E 462 PZ210E Release 1 1 0 Page 9 Start Up Piezo Nano Positioning PI 2 2 E 462 0E1 DANGER HIGH VOLTAGE E 462 Power Amplifiers output VERY HIGH VOLTAGES and HIGH CURRENTS which can cause death or injury Take special care if connecting products from other manufactures Follow general accident prevention rules Working with these devices requires adequately trained and educated operating personnel During operation do NOT touch any
13. ront panel DC OFFSET knob 1 turn potentiometer for DC offset see Control Signal p 8 CONTROL INPUT BNC Connection of control signal see Control socket Signal p 8 PZT LEMO socket High voltage output for PZT see Connectors p 16 Fig 1 E 462 front and rear panels The supply power connection is located on the rear panel 12 V SUPPLY Mini phone jack tip positive for connection of included E 660 PS see p 9 www pi ws E 462 PZ210E Release 1 1 0 Page 7 Start Up Piezo Nano Positioning PI 2 1 2 Control Signal Output voltage is controlled by an analog signal applied to the BNC input it plus the DC offset make up the Amplifier IN signal which must be in the 0 to 10 V range Control In Signal An external voltage in the range of 0 to 10 V can be applied to the CONTROL INPUT BNC socket DC Offset Potentiometer Depending on the position of the DC OFFSET knob a DC voltage between 0 and 10 V is made available If you require a constant DC offset e g 0 make sure the knob stays at the required position 2 1 3 Starting Operation Observe the safety precautions p 3 given in this User Manual Proceed as follows 1 www pi ws With the E 462 powered down connect the piezo actuator to the HV output Turn the DC OFFSET knob fully counterclockwise CCW Make sure that voltage at Control Input is set to 0 V Connect the E 462 to supply powe
14. t the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately Save all packing materials in case the product need be shipped again E 462 PZ210E Release 1 1 0 Page 4 Introduction Piezo Nano Positioning PI 1 5 Computer Control Optionally the control input voltage can be provided by a D A converter For several D A boards from National Instruments PI offers a corresponding LabVIEW driver set which is compatible with the PI General Command Set GCS the command set used by all PI controllers A further option includes the patented Hyperbit technology providing enhanced system resolution E 500 ACD CD with Driver Set for Analog Controllers available on free CD on request or for download See the included E5001T0011 Technical Note for details Computer control can be implemented using a DAC board in a PC to generate the analog input signal PI offers a LabVIEW driver set which can be used with certain D A boards This driver set is compatible with the PI General Command Set GCS LabVIEW driver set available for all newer controllers from PI The PI LabVIEW drivers support all D A converter boards from National Instruments that are compatible with DAQmx8 3 LabVIEW compatibility is given from version 7 1 upwards E 500 HCD Access to HyperBit Functionality for Enhanced System Resolution Supports certain D A boards PI s patented Hyperbit technology for providing position resoluti
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