High-Power Q-Switched Diode-Pumped UV Laser Q
Contents
1. Controller repetition rate Internally triggered 1 kHz to 250 kHz 1 kHz to 250 kHz Externally triggered O kHz to 250 kHz O kHz to 250 kHz Constant pulse energy range 40 kHz 40 kHz Average output power At 40 80 120 kHz gt 22 0 14 4 10 4W gt 40 0 20 0 12 0 W Pulse width At 40 80 120 kHz 80 30 135 60 190 90 ns 70 20 120 20 160 60 ns Power drift over 8 hours lt 2 lt 2 Warm up time From cold start lt 20 minutes lt 20 minutes From standby lt 10 minutes lt 10 minutes Operating ambient temperature 15 to 35 C 15 to 35 C Relative humidity noncondensing 10 to 80 10 to 80 Weight 17 7 kg 18 6 kg Defined as minor axis divided by major axis Ambient temperature constant 2 C O Mm KR W N gt Refer to the rep rate where the energy is clamped Specification holds over different repetition rate ranges depending on the laser model FWHM pulse duration measured according to method detailed in JDSU application note titled Optical Pulse Width Measurement Techniques for Q Series Lasers Time until laser meets all specifications Laser will function almost immediately after turning on but may not immediately meet all specifications www jdsu com High Power Q Switched Diode Pumped UV Laser Q Series Q305 and Q306 Q Series Power Supply Parameters2. Surges EN 61000 4 5 2006 Conducted immunity EN 61000 4 6 2009 Voltage dips and interruptions EN 61000 4 1 1 2004 Passes test report by accredited EMC test house CE marking EMC Directive 2004 108 EC Compliant Declaration of Conformity issued and CE marked Environmental Compliance Restriction of hazardous substances RoHS EU Directive 2011 65 EU Compliant per the Directive 2011 65 EU of the European Parliament and of the Council of 8 June 2011 on the restriction of the use of certain hazardous substances in electrical and electronic equipment recast A ROHS Certificate of Compliance C of C is available upon request The product may use certain ROHS exemptions www jdsu com High Power Q Switched Diode Pumped UV Laser Q Series Q305 and Q306 Laser Safety The Q Series Q305 and Q306 laser heads are Class 4 laser products per international standard IEC 60825 1 2007 2nd edition As Class 4 laser products the lasers output beam invisible and visible emitted from the laser head aperture is extremely hazardous The Q Series Q305 and Q306 laser systems comply with 21 CFR 1040 10 except for deviations pursuant to Laser Notice No 50 dated June 24 2007 Caution Operating these products in a manner inconsistent with their intended usage and specifications may result in hazardous radiation exposure Use of controls or adjustments or performance of procedures othe
3. Q5 PS 1000R Q6 PS 1000R Front panel display Power on off key Power on off key Shutter open closed switch status LED Shutter open closed switch status LED Status display 4 line x 20 character Status display 4 line x 20 character RS232 serial port connector 9 pin D sub RS232 serial port connector 9 pin D sub Rear panel RS232 serial port connector RS232 serial port connector identical to front panel identical to front panel Interlock connector 2 pin 0 1 spacing Interlock connector 2 pin 0 1 spacing Q switch RF connector SMA connector Q switch RF connector SMA connector Umbilical connector Umbilical connector multi pin D shaped multi pin D shaped Chiller communication port RJ45 Chiller communication port RJ45 Emission indicator connector Emission indicator connector 2 pin 0 1 spacing 2 pin 0 1 spacing External control port 10 pin 3M style External control port 10 pin 3M style Slot for optional standard or custom interface board standard Slot for optional standard or custom interface board standard with 3 BNC connectors with 3 BNC connectors Ground pin Ground pin Fuse holder Circuit breaker Power switch Power switch Power cord connector Power cord connector Weight 30 9 Ibs 14 kg 30 9 Ibs 14 kg Umbilical cable length 10 ft 3 m 16 4 ft 5 m 23 3 ft 7 m 10 ft 3 m 16 4 ft 5 m 23 3 ft 7 m Input and Ambient Voltage frequency 200 to 240 V AC 50 60 Hz 200 to 240V AC 50 60 Hz Power
4. Umbilical Cable 3 meter flex umbilical cable Q PS A30R 5 meter flex umbilical cable Q PS A50R 7 meter flex umbilical cable Q PS A70R Chiller Standard Q305 chiller Q5 CH Standard Q306 chiller Q6 CH Hose Kit Pair of 3 m hoses straight straight couplings Q5 CH A33 Pair of 5 m hoses straight straight couplings Q5 CH A35 Pair of 7 m hoses straight straight couplings Q5 CH A37 Note JDSU Q Series portfolio covers a wide range of repetition rate from single shot up to 200 kHz Custom models are available upon request Example for a complete Q305 system Q305 HD 1000R 355 nm 22 W 40 to 120 kHz laser head Q5 PS 1000R power supply Q PS A5OR 5 m flex umbilical cable Q5 CH standard chiller Q5 CH A35 5 m hose set straight straight couplings Example for a complete Q306 system Q306 HD 1000R 355 nm 40W 40 to 120 kHz laser head Q6 PS 1000R power supply Q PS A5OR 5 m flex umbilical cable Q6 CH standard chiller Q5 CH A35 5 m hose set straight straight couplings North America Worldwide Q JDSU www jdsu com Toll Free 800 498 JDSU 5378 Tel 800 5378 JDSU 2015 JDS Uniphase Corporation Product specifications and descriptions in this document subject to change without notice 30175826 0020215 QSERIES305 306 DS CLAE February 2015
5. High Power Q Switched Diode Pumped UV Laser Q Series 0305 and Q306 The high power Q305 and Q306 lasers expand the existing Q Series Rey Pestures to provide solutions for demanding applications that require faster Oia apie mami Omer waaay of UV output power throughput Highest UV energy 1 mJ available on the ket with M han 1 2 JDSU Q Series lasers continue to lead the high power Q switched diode pumped UV laser ee ELN market used for a wide variety of high precision micromachining applications Whether for P 7 seis price oa of i i ates Soli materials due to a large selection of pulse high pulse energy poe ie einai tals such 7 soe high repetition rate processing anctalesinulce widihe mar pe onae of materials such as sapphire or silicon or patterning thin film solar cells the Q Series lasers deliver unsurpassed performance combined with industry leading uptime et TON AE O wie a crystals and no cavity optic coatings exposed Due to intracavity UV harmonic generation s self stabilizing characteristics all Q Series to UV lasers exhibit inherently high energy high pulse to pulse stability and long term output Tighter process control due to superior power stability In addition the excellent thermal management of the unique Nd YAG based energy stability enabled by unique intracavity side pumped architecture achieves excellent beam quality over wide ranging operating harmonic generation conditions and maintains ex
6. ceptionally stable beam position and profile which is important Customization available upon request for processes requiring accurate feature placement These advantages enable Q Series lasers to achieve the tightest possible process tolerances for micromachining and other materials Applications processing applications Wafer scribing e Full cut wafer dicing e Low k dielectric grooving e Micromachining of silicon sapphire ceramics and metal e Micro via drilling PCB and flexboard cutting www jdsu com Data Sheet High Power Q Switched Diode Pumped UV Laser Q Series Q305 and Q306 Q Series 355 nm Laser Head Specifications in millimeters unless otherwise noted Dimensions include mounting pads Feet screw locations match 25 mm and 1 inch grid 9 20 575 00 83 0 5 A 660 g 29 8 a 40 0A 150 00 2 40 a ee D R330 8 75 4 00 250 00 247 108 00 2X CPC WATER CONNECTOR P N HFCD 10635 Power Supply Specifications in millimeters unless otherwise noted Dimensions include mounting pads 3X M4 BOTH SIDES 2X 2X 6 10 ooo x95 SLOTS SSS SSS SCALE 1 2 BACK VIEW www jdsu com High Power Q Switched Diode Pumped UV Laser Q Series Q305 and Q306 Chillers Specifications in millimeters unless otherwise noted Dimensions include mounting pads Q5 CH Ventilation 2 ST pp ventila tion air outle
7. lt 1600W lt 2600 W Operating ambient temperature 15 to 35 C 15 to 35 C Relative humidity noncondensing 10 80 10 80 Storage temperature 20 to 55 C 20 to 55 C Q Series Chiller Parameters Q5 CH Q6 CH Cooling capacity gt 1000 W gt 3000 W Cooling method Air cooled refrigeration Air cooled refrigeration Coolant Resistivity controlled de ionized water Resistivity controlled de ionized water Reservoir volume gt 31 gt 31 Coolant flow rate gt 2 5 GPM at 60 psi at all filter outlets gt 2 5 GPM at 35 psi at all filter outlets Weight reservoir empty lt 99 b 45 kg lt 154lb 70 kg Hose length 3 0 m 9 8 ft or 5 0 m 16 4 ft or 3 0 m 9 8 ft or 5 0 m 16 4 ft or 7 0m 23 0 ft 7 0m 23 0 ft Chiller control cable length 5 0m 16 4 ft 5 0m 16 4 ft Input and Ambient Voltage frequency 200 230V AC 50 60 Hz 200 230V AC 50 60 Hz Power lt 1 kVA lt 2 2 kVA Operating ambient temperature 15 to 35 C 15 to 35 C Relative humidity noncondensing 30 to 70 30 to 70 Storage temperature O to 50 C Oto3U C Orientation Upright position only Upright position only www jdsu com High Power Q Switched Diode Pumped UV Laser Q Series Q305 and Q306 Regulatory Compliance The Q305 and Q306 series laser heads use lead free solder and are confirmed as ROHS 6 6 compliant These laser heads also comply with international elect
8. nection www jdsu com High Power Q Switched Diode Pumped UV Laser Q Series Q305 and Q306 30 r 300 50 45 25 250 40 20 200 35 2 30 Go 9 15 150 25 oD e9 v a Z 10 100 2 45 no 5 50 H 10 m m 5 0 i 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 0 10 Repetition Rate kHz Figure 1 Q305 typical power and pulse width curve Specifications 20 t t 4 4 4 555 noo r 1 1 7 300 250 ne 200 150 100 Pulsewidth ns 50 T T T T J 0 30 40 50 60 70 80 90 100 110 120 130 140 Repetition Rate kHz Figure 2 Q306 typical power and pulse width curve Q Series Laser Head Parameters Q305 HD 1000R Q306 HD 1000R Wavelength 354 7 NM 354 7 NM Polarization gt 100 1 horizontal gt 100 1 horizontal Spatial mode TEM o TEM M squared lt 1 2 lt 1 2 Waist location internal from beam exit 605 mm nominal 575mm nominal Waist diameter 1 e see footnote 1 0 245 mm nominal 0 3 mm nominal Beam roundness 90 typical 90 typical Beam divergence full angle 2 0 mrad nominal 1 6 mrad nominal Pointing drift over 8 hours full angle lt 50 urad lt 50 urad Beam position accuracy unit to unit lt 2 5 mm from nominal lt 2 5 mm from nominal Beam pointing accuracy unit to unit lt 17 5 mrad from nominal lt 17 5 mrad from nominal
9. r than these specified in this product data sheet or in the user s manual may result in hazardous radiation exposure Tampering with this laser product or operating this product outside the limits of this specification may be considered an act of manufacturing and may require recertification of the modified product Warranty JDSU diode pumped Q Series laser systems are warranted to be free of defects in materials and workmanship Multiple warranty options are available Patent Information The products described in this data sheet are based on JDSU Intellectual Property which includes more than 1 800 United States and foreign registered patents These patents are relevant to an extensive set of products and or technology applications including JDSU laser products and associated technologies For further information contact the JDSU Legal Department Ordering Information For more information on these or other products and their availability please contact your local JDSU account manager or JDSU directly at 1 800 498 JDSU 5378 in North America and 800 5378 JDSU worldwide or via e mail at customer service jdsu com Description Product Code Laser Heads 355 nm 22 W class 40 to 120 kHz 355 nm 40 W class 40 to 120 kHz Q305 HD 1000R Q306 HD 1000R Accessories Power Supply Standard Q305 power supply Q5 PS 1000R Standard Q306 power supply Q6 PS 1000R
10. romagnetic compatibility EMC and safety standards Product Certification Standards and Regulations Compliance Verification Safety Electrical safety UL61010 1 3rd ed UL certified recognized component for US and CAN CSA C22 2 No 61010 1 3rd ed EN 61010 1 2010 Compliant test report by accredited safety test house Laser safety IEC EN 60825 1 2007 Compliant test report by accredited safety test house U S 21 CFR 1040 10 FDA CDRH certified with accession number CE marking Low Voltage Directive 2006 95 EC Compliant Declaration of Conformity issued and CE marked Electromagnetic Compatibility Radiated emissions and conducted emissions EN 61000 6 4 2007 A1 2011 Passes Class A digital device with a minimum 4 dB margin to the limit for conducted emissions and 9 dB margin for radiated emissions IEC 61000 6 4 2006 A1 2010 CISPR 11 2009 A1 2010 FCC rules 47 CFR Part 18 Tested frequency range 30 MHz to 1000 MHz for radiated emissions Test report by accredited EMC test house Harmonic currents EN 61000 3 2 2006 A1 A2 Passes Class A test report by accredited EMC test house Voltage fluctuations and flicker EN 61000 3 3 2008 Immunity EN 61000 6 2 2005 AC 2005 IEC 61000 6 2 2005 Electrostatic discharge ESD EN 61000 4 2 2009 Radiated immunity EN 61000 4 3 2006 A1 A2 Electrical fast transients EN 61000 4 4 2004
11. t Aae air inlet 7 1 ox N B Lid for circulating fluid fill port Dperation Display Panel DI Filter Housing Circulating Fluid Outlet 5 HI Particle Filter E O HOUSING A Dran port Rc1 4_ Close the drain port with a ball valve 7 ee a Allow an additional 2 in clearance on the back of the chiller to Caster Caster Free with stopper Dustproor filter accommodate the water hose connection Q6 CH l Ventilation air outlet Ventilation air inlet gt E Ventiation air outlet Maintenance connector Serial communication RS 485 RS 232C connector Contact Mi naa communication connector Circulating fluid fill port lid a Ventilation air outlet te ewer a f Power supply Optional connector 1 Operation display panel cable entry 377 a 592 Grommet with Optional connector 2 CTD Ventilation hole membrane fut Go sd Fluid level Same for the i Circulating fluid indicator return port Rc1 2 In OOOO OOD sana a Same for the opposite side Model no label Circulating fluid outlet Rc1 2 l 707 Caster unfixed with l locking lever Caster unfixed Drain port Rc1 4 Valve stopper Dustproof filter Allow an additional 2 in clearance on the back of the chiller to accommodate the water hose con
Download Pdf Manuals
Related Search