Keysight Technologies On-Wafer Testing of Opto
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1. ee Figure 9 Creating a new calibration kit for probing Defining LOAD If you are setting up a the probe for balanced measurement repeat steps 19 through 23 This time enter LOAD 2 for Label step 21 select probe 2 under Connector step 22 If you set up the calibration kit for full electrical on wafer measurements it is also required set up standards for THRU Please continue to follow the instructions as described in the application note On Wafer SOLT Calibration Using 4 port PNA L NWAs 2 10 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Completion 24 For pure LCA measurements with the LOAD standards added the calibration kit is now complete Click OK 25 The calibration kit is now ready for use as shown here in the Cal Kit list Edit PNA Cal Kits lel identficeton KiNumber Z KitNeme OnWoeter2P KitDesciption Example of OnWater 2 Pon Cal Kit Connectors Class Assignments Jesgip 35 mm with siding load 35 mm Calibration Kit 35 mm Calibration Kit 35 mm SOLT TAL Calibration Kit 24 mm with siding load 2 4 mm Calibration Kit 2 4 mm 2 92 mm with Broadband Load 2 4 mm 2 92 mm with Sliding Load 7 85 mm Preasion Database Cal Kit Probe 1 open Probe short 185mm Economy Ostebese Cal Kit 1 85 mm Reduced Accuracy 1 85 mm Economy Reduced Accuracy 1 00 mm Deta2. Kit Glass Assigaments Add or Edit sor Edit Change Family D Standard Descnption Figure 6 Repeating steps 5 through 8 with probe 2 Defining OPEN 9 Click Add located near the bottom of the dialog box this brings up the Add Standard dialog box 10 Select OPEN then click OK this brings up the Opens dialog box 11 Modify Label to read OPEN 1 12 Under Connector select probe 1 13 Enter the CO value then click OK each ISS Impedance Standard Substrate often comes with its own Calibration Coefficients These values may differ depending on the configuration and pitch of the probes Typical parameters that come with each ISS include Copen the capacitance term for the Open standard Lshort the inductance term for the Short standard Lterm the inductance term for the Load standard For more details regarding ISS and its coefficients please contact Cascade Microtech at www cmicro com LM i y ideenficabon Kit Number 2 KaNome on Waler 2P Ka Descripton Exomple of OnWater 2 Port Col Kit Connectors Class Assignments ors identification Standard 10 1 Label OPEN 1 Open Description Probe 1 open Frequency Renge Connector Probe 1 c2 jo afo F e 45 Hz 3 Figure 7 Creating a new calibration kit for probing Defining OPEN 08 Keysight On Wafer Testin
3. Using the Lightwave Component Analyzers Application Note Defining LOAD 19 Click Add located near the bottom of the Edit Kit dialog page this brings up the Add Standard dialog box 20 Select LOAD then click OK this brings up the Loads dialog box 21 Modify Label to read LOAD 1 22 Under Connector select probe 1 23 Enter the following values because the Loads dialog page does not have an entry for the Lterm specify a high impedance for ZO enter a value of 500 ohms enter a value for Delay that is derived from L 500 where L Is the value of Lterm as provided with the ISS Then click OK Edit Kit x identiceton Kit Number 2 KitNome Jor Water 2P Kit Desciption Example af On Water 2 Port Cal Kit Connectors Class Assignments Descripson Prove I ad Add or Edit fees aoe for en probe 1 Change Famity be obel short Add Standard x Select the type of standard to be added C OPEN identification 0 Standard iD 3 Label LOAD 1 ioan Load Description Probe 1 losd ka l Frequency Range Connector C DATABASED STANDARD Mo p Mie Probe 1 Mex 99900 MHz Load Type Abin FoMplex impart Cancel Fuedlosd C Aia E C Sliding Losd C Ofeet Lo bp Delay Characteristics r Doley 0007 pse z0 500 iiet pod Peintior ser Simdan z ma lindar gt oom coe oy
4. 2p Cancel Fiera Log Mogritude amp Angle Real amp Imaginary Maagntude amp Angl Log Magntude Angle Start O PNA Ser Y untitled LCA Ser O Charac Seh se 5 41PM Figure 19 Saving Adapter S2P File Storing data files 4 Select Data format Log Magnitude amp Angle 5 Select File Directory Enter file name and click Save In the case of balanced probes create two separate adapter S2P files using the adapter characterization macro with the ECAL on the coaxial ports e g NWA port 2 and NWA port 3 and the 1 Port calibrations for probes 1 and 2 Store the adapter S2P files under separate names 18 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note otep 5 start and configure LCA including specifying wafer probe adapter file LCA measurement setup 1 Start the LCA macro by pressing the LCA Softkey Choose the measurement type e g OE measurement or EO measurement and configure the measurement parameters as described in the LCA user manual 3 Enable RF Path Deembedding by clicking the Enable field see Figure 20 4 Select and enter the adapter file name for the wafer probe s corresponding to measurement type a For Single Ended measurements Src 1 corresponds to the path to Port A and Rcv 1 corresponds to the path to Port B b For Differential measurements Src 1 corresponds to the path to Por
5. Keysight Tecnnologies On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note TECHNOLOGIES Introduction When measurements of optoelectronic components are performed on the wafer e g at an early stage in the device processing or under balanced operation where exact phase information at the DUT electrical interfaces is needed it is important to precisely extend the electronic and optical calibration reference planes to the DUT interfaces and to fully reference out the device fixture and cables Use of Electronic Multiport Calibration Kits on wafer calibration standards together with characterization utilities allows electrically calibrating the setup with reference to the coaxial interfaces closest to the DUT and extending this calibration plane to the DUT connection plane e g beyond the wafer probe This application note is intended to assist on wafer applications using the N43 7xB C Lightwave Component Analyzer with single and dual probes to perform single ended and balanced opto electronic component full Soarameter measurements manually Lightwave Component Analyzers are available in 4 5 GHz 20 26 5 GHz and 67 GHz models The principles of Lightwave Component analysis are described in the Keysight Technologies Inc High speed Lightwave Component Analysis Application Note 5989 7808EN This document describes the principles of on wafer measurements on opto electronic com
6. Sweden 0200 882255 Switzerland 0800 805353 Opt 1 DE Opt 2 FR Opt 3 IT United Kingdom 0800 0260637 For other unlisted countries www keysight com find contactus BP 09 23 14 This information is subject to change without notice Keysight Technologies 2008 2014 Published in USA July 31 2014 5989 9136EN www keysight com
7. based Precision Col Kit 1 00 mm Reduced Accuracy 7 16 Co brofion Ki APC 7 with sliding load ADOT TO Osliheation Kit Figure 10 Creating a new calibration kit for probing Complete For the electronic calibration of the LCA for single ended or balanced measurements please follow the steps as described in chapter Calibrating the Network Analyzer before Measurements of your LCA user guide This calibration defines the ECAL reference plane as indicated in Figure 1 11 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note otep 2 Perform an electronic calibration of the coaxial RF interfaces of the LCA For the electronic calibration of the LCA for single ended or balanced measure ments please follow the steps as described in chapter Calibrating the Network Analyzer before Measurements of your LCA user guide This calibration defines the ECAL reference plane as indicated in Figure 1 Starting electronic calibration N5242A PNA X N5230C PNA L and E836xC PNA Models 1 Click Response N5230A PNA L and E836xB PNA Models 1 Click Calibration 2 Select Cal Wizard this brings up the Calibration Wizard Begin Calibration dialog box 3 Select Use Electronic Calibration ECal 4 Click Next gt this brings up the Select Calibration Ports and ECal Module dialog box 5 Under Cal Type Selection select 2 Port Cal for single ended measur
8. e Cal Ka 11 85058BP Pol 1 85 mm Reduced Accuracy 12 85058EPPol 1 85 mm Economy Reduced Accuracy 13 650594 Dete 1 00 mm Oatabased Precision Cal Kit 14 BS5059AP Pol 1 00 mm Reduced Accuracy 15 850384 7 16 Calibration Kit 16 850508 APC with sliding load 17 85050C APC TAL Calibration Kit x 2 RENE AOA Calibration Kit EdtKit Delete E lt a Figure 3 Creating a new calibration kit for probing 3 Click Insert New this brings up the Edit Kit dialog box Port mms Port 4 Figure 4 Assigning test ports as either probe 1 or probe 2 06 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Identification Kit Number 2 KitNeme On Water 2P KitDescription Example of OnWater 2 Port Cal Kit Connectors Description Add or Edit Connector Connector Family Probe 1 Description Frequency Range r Gender C Male Min 0 C Female i Max 199900 No Gender Add Edit Delete E T p Impedance OK z0 5o ohms Figure 5 Creating a new calibration kit for probing Connector definition Adding or editing a kit 4 Enter Kit Name and kit Description 5 Click Add or Edit located near the middle of the dialog box to add connectors to this calibration kit this brings up the Add or Edit Connector dialog box If you are using balanced probes or if
9. ement or 3 Port Cal for balanced measurement Figure 1 Electronic Vauioration start Figure 11 Electronic Calibration Start 12 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note 6 Enter NWA ports used Click Next gt this brings up the Electronic Calibration Step 1 of 1 Connect 4631 60006 ECAL to ports 1 and 4 Select Morsuraj when comnectons have heen made zj Select calhet forms list or type new name below tion completed in Channel 1 This calibration will be saved in the Channel 1 Cal Register wh Pres Finish to eat or Press Save As User CatSet to sito savo the calinration m ewer calset User Calsats may be shared among Colteaton Calibrat In both codes the calorbon will be sored 1 M col registar Figure 12 Electronic Calibration and User Calset Save starting ECAL 7 Connect the RF cable to the ECAL module according to the description in chapter Calibrating the Network Analyzer before Measurements of your LCA user guide for single ended or balanced measurements Click Measure gt this starts the ECAL For balanced measurements repeat this step for the other RF cable 8 Click Save As User CalSet gt this brings up the final dialog Save As User Calset Enter User Calset name e g ECAL 1 and click Save 10 Disconnect ECAL kit from RF cable s and or LCA Test set ca p For si
10. ere the Measure button used to be After all the standards have been measured a green Done button will appear below the ReMeasure button You can always go back to re measure any standard before pressing the Done key At this point one can finish the calibration by simply clicking Done or choose to re measure another standard as needed saving CalSet 10 Click Save As User CalSet gt this brings up the final dialog Save As User Calset 11 Enter User Calset name e g Probe 1 Port and 12 Click Save Calibration completed in Channel 1 x This calibration will be saved in the Channel 1 Cal Register when you exit the wizard Press Finish to exit or Press Save As User CaiSet to also save the calibration in a user calset User Calsets may be s and are not overwritten by a new In both cases the calibration will be stored to the cal register Select calset from Ist or type new name Probe 1 Port Edit Name p Figure 16 User Calset Save for Probe 13 Remove the calibration substrates 16 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Step 4b Run adapter characterization macro on PNA to determine adapter file for wafer probe Adapter characterization macro Activate the macro soft keys by pressing the MACRO button at the PNA front panel Start the Adapter Characterization Macro File Trace Chan Response Marker Analysis Stim
11. ered as an RF adapter The adapter characteristics can easily be determined by the adapter characterization macro provided with the NWA firmware The steps described in this application note refer mainly to LCAs based on the PNA Series Network Analyzers However the principles apply for the ENA Series based Network Analyzers as well The PNA performs 2 and 4 port calibrations using either SmartCal Guided calibration or an Electronic Calibration ECal module With Guided calibration the process chooses the standards to apply from the calibration kit based on how they were defined For on wafer calibration only SmartCal is applicable The on wafer LCA measurement requires the following preparatory steps Step 1 Create anew calibration kit for probing Step 2 Perform an electronic calibration of the coaxial RF interfaces of the LCA Step 3 Connect RF cable to wafer probe Step 4 Characterization of the wafer probe Step 4a Performa 1 port SOL Short Open Load calibration of the wafer probe Step 40 Run adapter characterization macro on PNA to determine adapter file for wafer probe Step 5 Start and configure LCA including specifying wafer probe adapter file OE measurement EO measurement E70 LCA test set RF adaptor J LD on wafer LCA test set E 0 PD on wafer RF adaptor te On wafer cal reference plan Figure 1 LCA configurations for On Wafer measurements Step 1 Create a new calibration kit f
12. g of Opto Electronic Components Using the Lightwave Component Analyzers Application Note If you are setting up the probe for balanced measurements repeat steps 9 through 13 This time enter OPEN 2 for Label step 11 select probe 2 under Connector step 12 Defining SHORT 14 Click Add located near the bottom of the Edit Kit dialog page this brings up the Add Standard dialog box 15 Select SHORT then click OK this brings up the Shorts dialog box 16 Modify Label to read SHORT 1 17 Under Connector select probe 1 18 Enter the LO Lshort value then click OK Edit Kit x Idertacetan Ki Number 2 KitName On Water 2P Kit Oesciption Example at On Water 2 Port Cal Kit r Connectors Class Assignments Desenpson o a rw Famy SOLT Edt Probe Change Femity dd Standard 7 cio os ots C OPEN identification z Si SHORT Standard iD 2 Labet HORT C LOAD aces J co C DATABASED STANDARD Mn jo Short Description Probe 1 short Frequency Range i r Connector Figure 8 Creating a new calibration kit for probing Defining SHORT If you are setting up the probe for balanced measurement repeat steps 14 through 18 This time enter SHORT 2 for Label step 16 select probe 2 under Connector step 17 09 Keysight On Wafer Testing of Opto Electronic Components
13. le contributing wafer probe Diode on wafer S parameter measurement 21 dB 22 dB Diode 21 deembedding Diode S21 Diode 22 deembedding Diode 22 0 10 20 30 40 50 60 70 80 Frequency GHz Figure 21 On wafer OE S Parameters of Detector Diode on wafer S parameter measurement a Diode 21 deembedding ERT Group delay ns Group delay ns Diode 821 Wafer probe Frequency GHz iy ih 5 smoo Figure 22 On wafer Group Delay of Detector 20 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Summary References In this application note we discussed the calibration procedure and measurement performance of on wafer optoelectronic component evaluation by using the N437xB Lightwave Component Analyzers based on the PNA and ENA Series Net work Analyzers Usually the Lightwave Component Analyzers used In high speed component analysis typically employ coaxial interfaces this makes on wafer characterizing high frequency opto electronic devices a challenge The Keysight PNA and ENA network analyzers with the Cascade Microtech single and dual tip ACP and high precision calibration standards provides both an accurate and convenient method for characterization of on wafer single ended and balanced OE devices By understanding how to set up calkits for wafer probes charac terizing the wafer probes as an adapter for
14. ng E5071C ENA N4694A 67 GHz 2 port micro wave electronic calibration kit N4691B 26 5 GHz 2 port microwave electronic calibra tion kit 85092C 2 port RF Electronic Calibration ECal Module Type N 50 ohm Single or dual probes and associated ISS Impedance Standard Substrate 03 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Implementation A typical on wafer measurement of an opto electronic transmitter component uses an RF wafer probe for the electronic stimulus and optical probe for picking up the optical response For receive components the device under test is stimulated via the optical probe and the RF response is picked up by the RF wafer probe For calibrated opto electronic S Parameter measurements on opto electronic components like lasers modulators detectors receivers and PIN TIAs the Light wave Component Analyzer requires an RF calibration of the measurement setup and test fixture up to the electrical RF interfaces of the device under test prior to the LCA measurement The LCA normally requires an electronic calibration up to the coaxial DUT interface Mechanical or electronic calibration kits are available for the coaxial interface calibration The LCA allows for extension of the coaxial calibration plane to the tip of the wafer probe via the RF path deembedding feature see Figure 1 For the RF path deembedding the RF wafer probe is consid
15. ngle ended measurements connect the RF cable to the wafer probe con Con maci RF cable necting to the DUT For balanced measurements connect both RF cables to the tO wafer probe wafer probes connecting to the balanced DUT For the N4373B C and N4374B connect the remaining RF cable to the LCA test set for EO measurements connect to Port B for OE measurements connector for Port A 13 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note otep 4 Characterization of the wafer probe step 4a Perform a 1 port SOL Short Open Load calibration of the water probe Steps 4a and 4b describe the steps on the PNA series NWA to characterize the wafer probe as an RF adapter and to create an adapter file for use with LCA On the ENA series NWA the wafer probe can be directly characterized using the Adapter Characterization VBA program The PNA can perform 1 port to 4 port calibrations with either SmartCal Guided calibration or an Electronic Calibration ECal module but this is not available with Unguided calibration Since ECal modules are not applicable for on wafer we will use SmartCal a calibration process in which the steps are guided by the instrument For the deembedding of the wafer probe for LCA on wafer measure ments only one or two 1 port calibrations are needed for single ended wafer probes or dual ended wafer probes respectively For the 1 port calibration pe
16. or probing 04 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note To create a calibration kit on the PNA network analyzers simply follow the boxed numbers in each of the figures shown below Figure 2 through Figure 10 For creating a calibration kit on the ENA network analyzers please follow the steps as described in the application note On wafer Balanced Component Measurement using the ENA RF Network Analyzer with the Cascade Microtech Probing System N5242A PNA X N5230C PNA L and E836xC PNA Models 1 Click Response 2 Select Cal gt More gt Cal Kit this brings up the Edit PNA Cal Kits dialog box Scale Cal Wizard Edit PNA Cal Kits i lol x Open Save As Restore Defaults installed Kits import KA Save As Inset New Printto File D KtName D scrip on 850520 3 5 mm Calibration Kit CQ 1hk he Ra SOE 3 5 mm Calibration Kit 4 85052C 3 5 mm SOLT TRL Calibration Kit 5 65055A 2 4 mm with sliding losd 6 650560 2 4mm Calibration Kit 7 85 056K 2 4 mm 2 92 mm wth Broadband Load 8 85056K01 2 4 mm 2 92 mm with Sliding Load 9 8505868 Data 1 85 mm Precision Database Cal Kit 1 0 6850568E Data 1 85 mm Economy Database Cal Kit 11 850586P Pol 1 85 mm Reduced Accuracy 12 8S058EP Pol 1 85 mm Economy Reduced Accuracy 13 850594 Data 1 00 mm Datebesed Precision Cal Kit 14 5059AP Pol 1 00 mm Red
17. ponents and provides step by step instructions needed to set up a calibration kit before an on wafer SOL T Short Open Load Thru calibration can be performed to perform the electronic calibration and deembedding of the wafer probes For more detailed instructions on electronic on wafer measurements for RF components with PNA and ENA network analyzers please refer to the application notes On Wafer SOLT Calibration Using 4 port PNA L NWAs 5989 2287EN and On Wafer Balanced Component Measurement using the ENA RF Network Analyzer with the Cascade Microtech Probing System 5988 5886EN The setup and example measurements presented throughout this application note have been performed using the N4373B 67 GHz Lightwave Component Analyzer with an N4694A O0F 2 port microwave electronic calibration kit f f and single ended wafer probes and calibration substrates from Cascade Microtech The principles are also applicable to balanced measurements Equipment used N4373B C 67 GHz LCA using E8361A C 67 G PNA referred to throughout this document as CA N4375B 20 GHz Single Mode LCA using N5230A C 20 G PNA L with Option x2x or Option x4x N4375B 20 GHz Single Mode LCA using N5242A 26 5 PNA X with Option 2xx or Option 4xx N4376B 20 GHz Multimode LCA using N5230A C 20G PNA L with Option x2x or Option x4x N4376B 20 GHz Multimode LCA using N5242A 26 5 PNA X with Option 2xx or Option 4xx N4374B 4 5 GHz Single Mode LCA usi
18. rd on all instruments worldwide Keysight Assurance Plans www keysight com find AssurancePlans Up to five years of protection and no budgetary surprises to ensure your instruments are operating to specification so you can rely on accurate measurements www keysight com go quality Keysight Technologies Inc DEKRA Certified ISO 9001 2008 Quality Management System Keysight Channel Partners www keysight com find channelpartners Get the best of both worlds Keysight s measurement expertise and product breadth combined with channel partner convenience www keysight com find Ica KEYSIGHT TECHNOLOGIES For more information on Keysight Technologies products applications or services please contact your local Keysight office The complete list is available at www keysight com find contactus Americas Canada 877 894 4414 Brazil 5S 1 3351 7010 Mexico 001 800 254 2440 United States 800 829 4444 Asia Pacific Australia 1 800 629 485 China 800 810 0189 Hong Kong 800 938 693 India 1 800 112 929 Japan 0120 421 345 Korea 080 769 0800 Malaysia 1 800 888 848 Singapore 1 800 375 8100 Taiwan 0800 047 866 Other AP Countries 65 6375 8100 Europe amp Middle East Austria 0800 001122 Belgium 0800 58580 Finland 0800 523252 France 0805 980333 Germany O800 6270999 Ireland 1800 832700 Israel 1 809 343051 Italy 800 599100 Luxembourg 32 800 58580 Netherlands 0800 0233200 Russia 8800 5009286 Spain 800 000154
19. rforming an SOL calibration is sufficient N5242A PNA X No230C PNA L and E836xC PNA Models 1 Click Response N5230A PNA L and E836xB PNA Models 1 Click Calibration 2 Select Cal Wizard this brings up the Calibration Wizard Begin Calibration dialog box 3 Select SmartCal GUIDED Calibration Use Mechanical Standards 4 Click Next gt this brings up the Select Guided Calibration Type Mechanical Standards dialog box 9 Under Cal Type Selection make sure 1 Port Cal is selected 6 Select the NWA port to which the wafer probe is connected for 1 port calibration 7 Click Next gt this brings up the Guided Calibration Select DUT Connectors and Cal Kits dialog box Calibration Wizard Begin Calibration 2 J xj Sranda GOED Catbison Use Mechamce Standards Niu ssie Help C UNGUDED Caltwetion Response Ipon Spon Use Mechs C ee Electene Cabteaten ECal Save tee chotne onc Select Ports for Guided Calibration uee cane mo Cal Tyne Selecta 4Pon Cal f Port Cai 2 Por Ca Figure 13 Smart Cal Wizard 14 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note selecting the probe 8 Under Connectors using the dropdown menu select probe 1 4 DUT Connectors Cal Kits Cal Method 1 Port Por4 arc 3 5 male 850528 x 7 Madity Cal pesis eie tenderds used for the selected col kit
20. s mei tao Cont CH1 S11 C 2 Port LCL Figure 14 Selection of calibration kit associated to probe 1 9 Click Next gt Guided calibration steps At this point you should see the dialog box showing Guided Calibration Step 1 of 3 which is the beginning of the calibration For the test port the instrument steps the user through three standards Open Short and Load As requested use the corresponding calibration substrates provided with your wafer probe 4 PORT 4 OPEN 1 Meeswe Connect PROSET OPEN to pon 4 Selaci Mansur when ceana choni Ae Guided Calibration Step 2 of 3 xj PORT 4 SHORT 1 Connect PROBE 1 SHOAT to pot 4 Select Meessre whos comnecions bave baen made uided Calibration Step 3 of 3 PORT 4 LOAD 1 Monue Coina d PROSE F LOAD to pon 4 Solect Mreswe whan coana ciona Rewe Doan mede Beck T Canes Help Figure 15 Guided Calibration Steps for Short Open Load 15 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Throughout the calibration process one sees the Guided Calibration Step shown on the upper left corner of the dialog box Figure 15 the Measure button is on the right and the lt Back and Next gt buttons are toward the bottom Once a standard has been measured a green check symbol appears above the ReMeasure button which is located at the exact spot wh
21. t 2 on the PNA Src 2 corresponds to the path to Port 3 on the PNA Rcv 1 corresponds to the path to Port 2 on the PNA Rev 2 corresponds to the path to Port 3 on the PNA Po ment Setup v PAAA EEA Sg ol Ve viessurement UC Meas Figure 20 LCA Measurement Setup window 5 Click Start 19 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Measurement Example The following measurements performed on wafer e g at an early stage in the device processing demonstrate the importance of precisely expanding the electronic and optical calibration reference planes to the DUT interfaces and to fully reference out the device fixture and cables By applying the steps and procedures described before using electronic calibration kits and the on wafer calibration standards the setup has been electronically calibrated with reference to the coaxial interfaces closest to the DUT and this calibration plane has been extend to the DUT connection plane e g beyond the wafer probe Figure 21 and Figure 22 compare the on wafer S Parameter and Group Delay measurements of an unmatched broadband detector with and without proper deembedding of the wafer probe Both GD curves are offset by the delay of the probe The erroneous group delay ripple which is an important parameter impacting system performance of the DUT Is effectively removed by the proper deembedding of the ripp
22. uced Accuracy 15 85038A 7 16 Calibration Kit 16 650508 APC 7 with sliding load 17 85050C APC TRL Calibration Kit 310 RENENN ADO 7 Catihretan VA Edit Kit Delete v cones iee Figure 2 Creating a new calibration kit for probing 05 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note N5230A PNA L and E836xB PNA Models 1 Click Calibration 2 Select Advanced Modify Cal Kit this brings up the Edit PNA Cal Kits dialog box Fle View Channel Sweep Caliteation Trace 9 Stimulus Calbration Wizard Preferences 10 00d amp y Correction on OFF 0 00d8 LogM v Interpolation ON off Cal Set Cal Set Viewer Port Extension Tool Bar Fixturing on OFF Fixtunng Selections ECal Confidence Check Characterize ECal Module n Advanced Mod y Cal Kit Edit PNA Cal Kits o p x Power Calibration i Open Save s Restore Defaults Properties f Installed Kits Impor Kit Save As Insert New Printto Fie 1 2 3 85033D E 3 5 mm Calibration Kit 4 85052C 3 5mm SOLT TAL Calibration Kit 5 850564 2 4 mm wilh sliding load Com CHI S11 NoCor 6 850560 2 4mm Calibration Kit 2 7 85056K 2 4mm 2 92 mm with Broadband Load 8 85056K01 2 4mm 2 92 mm with Sliding Load 9 850566 Dete 1 85 mm Precision Database Cal Kit 10 85058E Dota 1 85 mm Economy Databas
23. ulus Utility Help 50 00 00 40 00 File View Channel Sweep Calibration Trace Scale Marker System Window Macro 2 of 3 p LCL Status CH1 C 2 Port Ayg 1 Sim LCL Figure 17 Adapter Characterization Macro Softkeys on PNA and PNA X User interface selecting the port 1 a Select Calset from the calibration of the coaxial RF cable interface e g ECAL 1 b Define PNA port where RF cable is connected to e g Port 4 2 a Select Calset from the calibration of the wafer probe e g Probe 1 Port b Define PNA port where the wafer probe has been connected to via the RF cable e g Port 4 HH OE 10MHz 19990MHz 1601 HH TEST HH user cal 10MH2 19990MHz HH user cal 1OMH2 19990MHz HH user cal 10MH2 13990MHz OE_PP23 Schowcase 2log Segment sweep cal 50 percent Y Characterize And Save Figure 18 Defining Calsets for Adapter Characterization 3 Click Characterize and Save 17 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note File Trace Chan Response Marker Analysis Stimulus Utility Help m Characterize 2 Port Adaptors Probes Fixture Path SF j Adopto Type Prode Hesa x Comeued ANA Macro Save file as ajx Setup My0 0am Save int My Documerts YA Single 2 PP23 testset loss s2p Iprobe tip s2p Continuous Optical Pwr h LCA Server Adaptor Char SS Se Files s
24. use in the LCA user interface and to perform and verify the on wafer calibration you will be able to achieve accurate on wafer opto electronic device measurements and have absolute confidence in your results 1 Keysight Highspeed Lightwave Component Analysis Application Note Application Note Document Number 5989 7808EN 2 On Wafer SOLT Calibration Using 4 port PNA L NWAs Application Note Document Number 5989 2287EN 3 On wafer Balanced Component Measurement using the ENA RF Network Analyzer with the Cascade Microtech Probing System Application Note Document Number 5988 5886EN 4 VBA sample program Adapter Characterization see http www home keysight com keysight redirector jspx action ref amp cname KEYSIGHT_EDITORIAL amp ckey 85082 amp lc eng amp cc US amp nfr 11143 0 00 21 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note myKeysight LAI 3 WARRANTY myKeysight www keysight com find mykeysight A personalized view into the information most relevant to you www lxistandard org LAN eXtensions for Instruments puts the power of Ethernet and the Web inside your test systems Keysight is a founding member of the LXI consortium Three Year Warranty www keysight com find ThreeYearWarranty Keysight s commitment to superior product quality and lower total cost of ownership The only test and measurement company with three year warranty standa
25. you make full electrical on wafer measurements in order to maximize the benefits of the minimum thru approach only three thrus not six are needed to achieve a full 4 port calibration it is best to set up a calibration kit with two probes for example probe 1 and probe 2 or male and female and then assign the ports so that it offers the PNA the easiest way to execute minimum thru See Figure 4 for test port assignment The actual calibration sequence will then be determined by the instrument via the Calibration Wizard 6 Enter Connector Family probe 1 was typed in here Select No Gender for connector Gender 8 Double check to make sure Max Frequency Range is above maximum frequency range of the instrument for example 999000 MHz then click OK N Each standard open short load and thru will be defined with two probes described here under Connector Family They are identified as probe 1 and probe 2 As such repeat steps 5 through 8 this time enter probe 2 for Connector Family Figure 6 left At this point you should have two probes defined under Connectors and they are probe 1 and probe 2 Figure 6 07 Keysight On Wafer Testing of Opto Electronic Components Using the Lightwave Component Analyzers Application Note Add or Edit Connector 0 a_i Media KaNumber z KitNeme nwar coax Ka Description Example of OnWofer 2 Port Cal
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