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Instruction µLine F1 - De Grijs Industrieel Onderhoud

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1. In the Cycles in series edit the user can set how many complete measurements cycles are to be performed The more cycles is chosen the better results will be achieved Status Pro maschinenmesstechnik 5 13 www statuspro com MEASUREMENTS POSITIONING s min 1 mm 0 05 inch L Se 0 e min 1 mm 0 05 inch II OOO FIG 5 15 MACHINE MOVEMENT IN THE LINEAR MODE S STARTING POINT min 1 mm 0 05 inch ES min 1 mm 0 05 inch FIG 5 16 MACHINE MOVEMENT IN THE PENDULUM MODE S STARTING POINT G Status Pro aschinenmesstechni www statuspro com MEASUREMENTS POSITIONING min 1 mm 0 05 inch l min 1 mm 0 05 inch FIG 5 17 MACHINE MOVEMENT IN THE PILGRIM MODE S STARTING POINT Max Acceptable Error is an option where the user can set the maximal acceptable error level above which the software will communicate to the user about a machine error Options Point capture after and Vibrations are valid only when the automatic point capture is chosen By changing these options the user can decide after how much time an automatic point capture trial should be made by the program and what is the acceptable level of vibration level of vibration depends mainly on the measured machine Min Points Interval describes minimal distance between positioning points G Status Pro schinenmesstechni 5 15 www statuspro com MEASUREMENTS
2. 0 96 10 EH oH It is worth to notice that the most critical parameter is the temperature because its change influences the coefficient n more than changes in the pressure and much more than changes in the humidity The accuracy of laser interferometers Status Pro 2 7 www statuspro com NE u PRINCIPLES OF OPERATION Errors caused by the environment The most impotent source of errors in machine geometry measurements is the temperature or more exactly the change of the temperature of the measured machine For example if the machine s base is made of steel than the base s length increases 11 7Um when its temperature changes 1K It shows how important it is for very precise measurements to measure the temperature of the controlled part of the machine and to use it in readout corrections This is not a simple task for a few reasons but the most important one is that than when the machine operates there are temperature gradients on it That means that more than one temperature sensor is needed and that the more sensors are used the better accuracy can be achieved Moreover the shape of the measured part of the machine may absorb a part of the expansion of the material or the part may be built of materials of different expandability As was mentioned in the previous chapter the temperature influences the accuracy also as it changes the refraction coefficient of the medium the measurements are made in usually it i
3. POSITIONING Pull down menu Measurement View Help Stop after each cycle Correct target value Automatic point capture Manual point capture Automatic points generate Points from list FIG 5 18 POSITIONING PULL DOWN MENU MEASUREMENT Option Measurement includes the options connected with the process of measurement Stop after each cycle if this option is active program breaks the measurement after realization of a measuring cycle if it is not active the configured number of cycles is executed Correct target value setting this option gives possibility to change an earlier defined distance value of a measuring point during the measurement process Before point capture appears a window in which can be written new distance value whereupon marked are only places after comma what causes that it is not necessary to write all distances Automatic point capture program captures measurement points automatically using settings from Configuration Option exclusive with Manual point capture Manual point capture choosing this option causes that for measuring points the measured displacement value is registered by G Status Pro 5 16 www statuspro com schinenmesstechni MEASUREMENTS POSITIONING the program after pressing a button Manual Capture or a pulse switcher Strobe If this option is not active than points are captured automatically program detects the moment of machine stop Automatic poi
4. Status Pro maschinenmesstechnik 9 7 www statuspro com MEASUREMENTS PITCH YAW Measured data can not only be saved but also a measurement report can be generated either by pressing Print or Preview on the measurement analysis window fig 9 9 The report can be generated either in the basic form where only the plot of the measured values is shown or the extended version in which also tables with measured data are present T Laser Measurement System LSP30 3D Straightness Measurement method Angular le le es Eile Edit Measurement View Help Straightness plot window 2011 02 13 m Pitch Yaw o Y 0 0833 No Xv asec 1 0 0 0 0087 2 0 0 F 3 0 0 0 0173 4 0 0 F 5 0 0 6 0 0 0 026 7 0 0 CH 8 0 1 8 00346 i i 9 0 1 E 10 0 1 H 0 0433 11 0 1 12 0 1 0 0524 i 13 0 1 00524 SS 1 14 0 1 d i 15 0 1 0 0606 o b 1 16 0 1 H H i 17 0 1 0 0693 18 0 0 19 0 0 Z 20 0 0 0 0779 2 3 5 5 7 8 s 10 11 13 14 15 16 17 18 19 20 Point number Min 0 1 asec Max 0 0 asec Ds 0 1 asec x 5 Preview Print 3D preview New Menu Points number 20 Measurement method Pitch Yaw Statistic calculation method End point fit method Ar Ki SE 3c E FIG 9 9 PITCH YAW MEASURED DATA ANALYSIS WINDOW Program makes it possible to save the velocity graph and then load it for example to a Word editor To save graph to the file
5. Start position 0 0000 mm at Di 0 0000 m 50 0000 Istance M mm 100 0000 Interval 00000 mm 150 0000 200 0000 Points number 5 amp 8 250 0000 Calculate Read Save OOO T 2 min 1s Delete point Delete all Apply Cancel FIG 5 13 POSITIONING POINTS GENERATION WINDOW Configuration of Positioning measurement In the panel Positioning of the Config window the user can set up important options of the linear positioning measurements Fig 5 14 There are three available ways of checking machine s positioning Linear Pilgrim1 and Pilgrim 2 buttons in Measurement method panel The directions of the expected movement of the machine are shown on the pictograms and on figures 5 15 5 16 and 5 17 Usually the Linear method is used G Status Pro aschinenmesstechni 5 12 www statuspro com MEASUREMENTS POSITIONING WiMeteo Parameters Interface iti 1 Velocity Straightness Flatness Vibrations Meteo Positioning data files folder Measurement method C Program Files SP30 3DMeasurement result Linear Point detection parameters Min points interval Vibrations less than Point capture after Ca Lei Ca Lei Ca Lei Ca Lei Max acceptable error Pilgrim PEBE Extended report Cycles in series F Simultaneous 3D measurement 3 Unidirectional measurement Apply Cancel FIG 5 14 LINEAR POSITIONING COFIG WINDOW
6. for linear measurements belong 1 pcs Laser head HPI 1GHz lpcs Power supply 1 pcs Tripod stand 1 pcs Linear retro reflector RL1 1 pcs Linear interferometer IL1 aschinenmesstechni 3 11 www statuspro com PREPARATIONS 3 pcs Basis temperature sensor 1 pcs Air temperature sensor lpcs Wireless strobe 1 pcs Magnetic holder UM1 1 pcs Magnetic holder UM2 lt i g e aschinenmesstechni www statuspro com PREPARATIONS In the figure 3 19 there is shown a suitcase for transportation and storing of the interferometer system is shown Additional elements for angular measurements are 1 1 x Angular interferometer IK1 2 1x Angular retro reflector RK1 3 2 x Beam directing mirror ZK1 4 1x Rotary table SO1 FIG 3 19 THE SUITCASE FOR TRANSPORTATION AND STORING OF THE INTERFEROMETER SYSTEM Status Pro 3 13 www statuspro com hinenmess tec PREPARATIONS Preparing the interferometer to work The Laser Interferometer LINE F1 is supplied from autonomous 24VDC 5A power supply Communication with a PC computer is performed by USB interface or by a Bluetooth interface USB connection is faster thus it gives more possibilities in some measurements i e Vibration Before starting the measurements the laser head Laser Interferometer 1 should be placed on the Tripod stand 3 and connected to the power sup
7. measurements e g the movement of a machine table or working tool can be characterized The main parameters of those methods are described in the last Chapter maschinenmesstec 7 1 www stagtuspro com MEASUREMENTS PITCH YAW Measurement Setup Angular straightness measurement For Angular straightness measurements the angular optics should be used Necessary components are Laser head Powersupply Angular interferometer IK1 Angular retro reflector RK1 Optional elements are USB cable Manual Strobe Magnetic holder UM1 Tripod stand Air temperature sensor Base temperature sensor Angular straightness measurements require optical elements IK1 and RK1 to be aligned along laser beam as shown on the figure 6 1 Either of the elements can be moved aschinenmesstechni 7 2 www stagtuspro com MEASUREMENTS PITCH YAW During Angular straightness measurements the usage of the air temperature sensor is recommended Base temperature sensors do not have to be used IK1 RK1 FIG 7 1 OPTICAL PATH SET UP FOR ANGULAR STRAIGHTNESS MEASUREMENTS SCHEMATIC Angular straightness measurements can be performed not only along the laser beam as shown on figures 7 1 and 7 2 but also in directions perpendicular to the laser beam These configurations are s
8. measurements and click on the field to allow the head to find new working point Green Laser head works well No action necessary Signal Red Beam strength too week Using beam indicator set blinking optical components to obtain satisfactorily beam strength then click on the field to reset the error Green Beam strength fine No action necessary Velocity Red Velocity of the registered Click on the field to reset blinking movement too high the error Green Velocity of the registered No action necessary movement in range TAB 3 1 STATUS BAR STATES When measurements are executed with automatic compensation of the atmosphere parameters and the compensation of the basis temperatures one should place the air temperature and humidity sensors THS on the machine in the vicinity of the laser beam place the sensors of the basis temperature along the measured axis on the machine basis Measurement executed without automatic compensation are referred to normal conditions temperature 20 C pressure 1013 25 hPa humidity 50 The reference temperature for material expandability compensation can be modified in Configuration Meteo panel see figure 3 36 Status Pro 3 28 www statuspro com NY maschinenmesstechnik PREPARATIONS LX Ven Geen Temperature unit Pressure unit amp C F hPa mmHg inHg Measurement parameters Humidity automatic measurement Pressure au
9. 23 where each data cycle can be viewed and analyzed Status Pro maschinenmesstechnik 5 22 www statuspro com MEASUREMENTS POSITIONING F Laser Measurement System LSP30 3D Positioning Pos example dt2 eile es Eile Edit Measurement it View Help Distance Cycle no 1 No Xa um Xr um Vous 1 0 0 0 4 Y 63 9 2 9 4 9 9 3 20 6 17 8 4 28 0 27 8 5 36 0 35 3 6 44 9 44 6 7 50 8 50 9 8 56 7 55 7 H 59 2 58 5 10 57 6 563 H EU 11 52 6 508 12 52 1 503 E d 13 46 0 45 0 14 39 5 37 5 15 35 9 34 2 16 30 6 200 17 28 0 26 8 18 25 7 24 6 7A 19 219 23 0 20 216 235 E 21 215 220 22089 233 26 1 23 26 9 283 P 24 28 8 31 5 720 360 1200 1440 1680 1920 2160 2400 Distance mm 25 32 7 34 7 Backlash 2 8 um BE Delete Add Back Menu Points number 25 Measurement method Linear Error um Cycles number 3 ee ALL FIG 5 23 DATA BROWSING WINDOW Both from main positioning window and from data browsing window the measurement report can be generated After at least two series of measuring cycles statistical calculations can be executed and the report from examination can be prepared In order to get the final report the button Report has to be pressed The screen of the computer after pressing the button Report is presented on fig 5 24 Status Pro masc
10. 6 5 MEASUREMENT PROCEDURE testes ni esses eese steer kioin 6 10 MEASUREMENTS STRAIGHTNESS 200000ss000000000000000220000000000n0000020000000000000 7 1 GENERAL DESCRIPTION eene eeeeeeeeeeetetseee sese sese esee eese se esee esee tees e esee esee 7 1 MEASUREMENT SETUP a Zeg 7 2 Angular straightness measurement ae 7 2 Wollaston Sitatchtness Measurement 7 5 SOFTWARE DESCRIPTION nennen nennen enen ea ee esee esee eee eene nennen 7 7 Status Pro maschinenmesstechnik www statuspro com CONTENTS Straightness pull down menus neuere 7 9 PAU 1 enee E A ARANE 7 11 ANGULAR STRAIGHTNESS MEASUREMENTS PROCEDURE cscseseseseseseseseseeeeeeeees 7 14 SQUARENESS MEASUREMENTS PROCEIDURE esee ettet esee ee 7 18 MEASUREMENTS FLATNESS eessen 8 1 GENERAL DESCRIPTION sise 8 1 MEASUREMENT DEITUP etes eset eset esee esee essa esee essa sees esses 8 1 ALIGNMENT OF OPTICS FOR THE FLATNESS MEASUREMENTS eere 8 5 Optical path alignment in E 8 7 Optical path alignment in the axes 3 60 nissen 8 7 Optical path alignment in the axes 5 and e E 8 9 Optical path alignment in the axes 2 and 4 unserer 8 12 MEASUREMENTS PITCH YAW uuu ccccccccsssccsssccccccsccsssccsssscccsccscsssccssssceessosees 9 1 GENERAL DESCRIPTION cccccccesesesesesesesececececesesesesscesesececesesesecesececececeseseseceeeseseees 9 MEASUREMENT SETUP sss ss esses sess sese esses sees esee esse see 9 SOFTWARE
11. O Dead path W Electronics El Unlinearities Bl Thermal drift 0 05 0 1 0 15 0 2 0 25 0 3 Positioning error um m eo FIG 2 8 A CALCULATION OF ERRORS FOR A LASER MEASUREMENT SYSTEM WITH THE COMPENSATION OF THE ENVIRONMENT G Status Pro maschinenmesstechnik 2 14 www statuspro com PREPARATIONS 3 PREPARATIONS To start the measurements using the Laser Interferometer uLINE F1 software LSP software should be installed on HD of a PC computer The hardware requirements are Windows XP Vista 7 system CR ROM Pentium processor 1 GHz or better SVGA graphic card making possible working with resolution 800x600 USB2 0 Bluetooth 2 0 for uLINE F1 Wireless BT version Software installation The software is located on the CD that comes with the measurement system Once inserted into your computer view the contents of the CD and find a file named LSP_Install and then run it The installation process of the application and the necessary drivers should start automatically aschinenmesstec 3 2 www statuspro com PREPARATIONS CA LsP30_30_instai ru m Ee 5P30 3D is Lasertex Co Ltd Fig 3 1 Icon of the setup application After running the setup file in following windows the program asks about the necessary parameters to correctly install the software To let HLINE F1 to work correctly the following components must be installed LSP30 3D application d
12. appropriate chapter The shelf life of the sensors is more than 30000 hours The working time is 10000 hours Under the cap there is hidden a 1 2AA G Status Pro 3 15 www statuspro com hinenmess tec PREPARATIONS 3 6V lithium battery number 14250 which can be replaced when the battery strength monitor on Display screen see below in this Chapter shows that it is depleted Status Pro aschinenmesstechni 3 16 www statuspro com PREPARATIONS Powering the system on Starting hardware The uLine F1 has only one soft switch on the top of the laser head Starting the laser is possible by pressing the Power Button for 3 seconds see figure 3 21 or from the LSP software by clicking on the bottom bar of the screen in Laser text see fig 3 24 T Laser Measurement System HPI 1GHz Linear measurement 8 g H Measurement signal level WiMeteo data Measurement Parameters eunt ware Distance Config 1 Start position 0 0000 vi Humidity Adjustment Laserhead Change sign Air temp gt gt une 9 g btl mi Beso temp x Resolution Normal AT Ti T2 T3 2 E X 0 1 o Averaging Dis cJ I C Material Expandability Sol Sol Sol Sol Steel i 117 amp pm C Bx 8 I Record Reset position Configuration Menu Signal Velocity SWITCH OF THE uLINE Fl Starting software When the software starts a splash s
13. are done with one laser head position shown on Figure 8 5 The flatness measurements are performed in the option Flatness chosen from the Main Menu After setting proper base length standard is 100mm and machine data Edit gt Machine Data and Edit gt Base Length the Measurement button should be pressed Than a measured axis should be chosen fig 8 5 and than the optical path should be adjusted see below After the straightness of a chosen axis is measured a next axis should be chosen Measurement gt New Axis fig 8 6 When all the axes are measured Flatness Plot button should be pressed The received flatness plot fig 8 1 may be saved printed or exported to a text file File gt Save File gt Print or File gt Export Straightness Error um 288882888888588 BRBRERSBRRERRLS ES gi WEES ERE 18 2 24 28 30 32 3 35 35 40 Distance cm Ds 0 08 um Czas oczekiwania 3 5 s DENN gt Flatness Plot End Point Fit maschinenmesstec 8 6 www stagtuspro com MEASUREMENTS FLATNESS FIG 8 6 CHANGING AXIS IN FLATNESS MEASUREMENT Optical path alignment in the axis 1 The straightness measurement in the axis 1 is done with the optical components and in the way described in Chapter 7 Straightness measurements Optical path alignment in the axes 3 6 8 During flatness measurements in the axes 3 6 and 8 an additional beam directing mirror ZK1 is
14. diaphragm on the angle retro reflector to the Alignment position Moving the retro reflector along the axis change the position of the head so that the beam passing through the interferometer falls also in the middle of the retro reflector s diaphragm After changing the positions of the diaphragms on the interferometer and on the retro reflector to Working positions check if the return beam falls in the middle of measuring opening in the head Do the check moving the retro reflector along the axis Corrections if needed can be made both changing the head or the interferometer position maschinenmesstec www staqtuspro com MEASUREMENTS FLATNESS 10 Set the diaphragm on the laser head to Working position and check if the level indicator on the display shows around 10095 11 Now the straightness measurements as described in Chapter 7 can be made Optical path alignment in the axes 2 and 4 Similar to previously described during flatness measurements in the axes 2 and 4 two beam directing mirrors ZK1 are used The difference is that the angle of the second mirror usually differs from 45 The way of using them is shown on Figure 8 9 aschinenmesstechni 8 12 www staqtuspro com MEASUREMENTS FLATNESS FIG 8 9 THE SET OF THE OPTICAL COMPONENTS USED IN STRAIGHTNESS MEASUREMENTS IN THE AXES 2 AND 4 2 The diaphragm on the laser head set to the Alignment position 3 The first be
15. m s The next disadvantage of the heterodyne method is that two frequencies must be used for measurements while in the homodyne method the second may be used for measuring e g a second axis The influence of the outside conditions on the measurement accuracy According to equation 1 an interferometer s unit of measure in length measurement is laser s wavelength From definition 2 a wavelength depends on laser s frequency f and the speed of light v in the measuring path If the measurement is done in vacuum than v c 3 108 m s The speed of light in a medium other than vacuum e g air water is lower and is described as vet 3 Where n a refraction coefficient _ gt sc ER status Pro 2 6 www statuspro com PRINCIPLES OF OPERATION Normally the refraction coefficient n is a complex variable or even a tensor but for less accurate calculations it is simplified to a constant The air coefficient depends mostly on the pressure P temperature T and humidity H The dependence nrpx for the air was empirically determined by Edien and is described as 6 z x 1 10 P 0 613 0 00997 T mo 4 1 0 003661 T Ny pu 1 28715 107 P An 3 033 10 H e 7 5 From the above equations one may obtain the refraction coefficient dependences on T P and H in usual conditions T 293K P 1000hPa H 50 OF 0 93 io oT K n 1 0 27 10 P4 oP hPa Du
16. measurement of positioning and straightness in horizontal and vertical planes This 3D feature simplifies and significantly speeds the process of machine geometry testing Measurement Setup For positioning measurements linear optics should be used Necessary components are see also figures 5 1 to 5 4 Status Pro maschinenmesstechnik 5 1 www statuspro com MEASUREMENTS POSITIONING Laser head Powersupply Linear interferometer IL1 Linear retro reflector RL1 Air temperature sensor Atleast 1 Basis temperature sensor Optional elements are USBcable ManualStrobe Magnetic holder UM1 Tripod stand Positioning measurements require optical elements IL1 and RL1 to be aligned along laser beam as shown on the figure 5 1 Either of the elements can be moved Performing positioning measurements one has to be aware of the Abbe Dead Path and Cosine errors as they are described in Chapter 2 The usage of the air temperature sensor and at least one base temperature sensor T1 or T2 or T3 is absolutely necessary More basis temperature sensors can be used on long measurement axes especially where a temperature gradient is suspected Status Pr esstechnik 5 2 www statuspro com MEASUREMENTS POSITIONING FIG 5 1 OPTICAL PATH SET UP FOR POSITIONING MEASUREMENTS SCHEMATIC Positioning measurements can be performed not only along the laser beam as shown on figures 5 1 and 5 2 but also
17. measuring points is used to move the retro reflector about a distance of 100 mm The time interval should be used in dependence from practices of a person leading the measurements It is suggested to set the time on 10 s and to decrease it if needed An arrangement of the time interval may be done by pressing gt keys on the computer screen The retro reflector base P100 should be placed at the beginning of the examined axis close to the interferometer After the Start button is pressed one should wait on capturing the first measuring point Then one should to move the retro reflector base of about 100 mm and to wait on the next point capture Announcements shown on the computer screen make the measurement easy After capturing the last measuring point press Stop If from some reasons will not be possible to move the retro reflector base before the capture moment the measurement should be repeated from the beginning point and possibly the measuring interval should be enlarged maschinenmesstec 7 15 www staqtuspro com MEASUREMENTS PITCH YAW T Laser Measurement System LSP30 3D Straightness Measurement method Angular Ee Je Je Eile Edit Measurement View Help ibid mm M 2011 02 05 Angular m No Xv urn 1 0 0 2 62 3 12 3 4 154 m 5 184 6 23 1 B 7 355 8 50 1 9 572 10 60 2 11 758 12 781 13 78 7 1 2 3 4 5 8 7 8 9 10 1 12 13 14 15 46 17 18 19 20 14 70 2 Point number
18. of movement and the series number Rules of automatic positioning measurement For correct operation of the automatic option below rules should be followed 1 The time of machine stand still duration in a positioning point must be no less then 1 second default value this can be changed in the Configuration gt Max Accaptable Error 2 Vibrations of the target should be less then 10 Lim default value this can be changed in the Configuration gt Vibrations less thans G Status Pro c inenmesstechni 5 20 www statuspro com MEASUREMENTS POSITIONING 3 After every pass the target should be moved at least 2 mm away from the last positioning point stopped until capture and after it returned to the last positioning point this procedure is necessary for correct backslash error measurements If vibrations are too large and system does not capture points then the option Manual Capture should be switched on in the menu Measurement After choosing the Manual Capture option on the bottom of the screen appears an additional button Manual Capture Capture of the measuring point takes place by pressing this button or pressing the button on the impulse switcher Course of measurements and data analysis Examination of linear positioning of machine consists of at least 2 measuring cycles In every cycle the measured machine will move the retro reflector for programmed distance fore Avers and back Revers After each
19. one to a moving element of the machine second to an element in relation to which displacement will be measured for example the retro reflector may be fasten to a moving element and the interferometer to a motionless table Remember that relative G Status Pro aschinenmesstechni 4 7 www statuspro com MEASUREMENTS POSITIONING linear displacement between the retro reflector and the interferometer is measured Attention It is inadmissible to place one of optical elements i e RL1 or IL1 outside the machine on an additional stand the system measures then also displacements of the machine in relation to the stand 4 The moving element of investigated axis should be moved as close as possible to the position of the laser head and the tripod 5 Place the interferometer optics IL1 and the retro reflector RL1 on the axis of movement If the axis of movement is horizontal check the level indicators Fig 4 3 on the laser head and the interferometer In both cases the blob should be inside the inner circle Attach the retro reflector RL1 to the interferometer IL1 there is a special socket for this purpose in IL1 see fig 4 3 Level indicator FIG 4 3 START POSITION OF ALIGNMENT G Status Pro aschinenmesstechni 4 8 www statuspro com MEASUREMENTS POSITIONING 6 Move the moving element of the machine together with the attached optical element to the opposite extreme position Diaphragms on IL1 and R
20. output of Differential Sine signal pair Sine Cosine Output Status Pro www statuspro com maschinenmesstechnik TECHNICAL DATA System work conditions Temperature range 10 35 C Humidity range 10 90 non condensing Power supply 90 230 VAC 50 60 Hz 100 W during heating 15 W work PC interface USB 2 0 Data rate 3125000 bps VCOM Environment compensation Wavelength compensation Environments parameters entered from keyboard amp Status Pro schinenmesstechnik 11 5 www statuspro com TECHNICAL DATA Automatic With the use of the Environmental Compensation Unit ECU Parameters of the wired Environmental Compensation Unit ECU compensation Time constants Temperature 3 s pressure 2s humidity 20s Wired material temperature compensation Manual Temperature of material entered from Automatic With the use of 1 to 3 wired uL RN temperature sensors Parameters of the wireless Environmental Compensation Unit ECU compensation Time constants Temperature 8 s pressure 2s humidity 20s Status Pro maschinenmesstechnik 11 6 www statuspro com TECHNICAL DATA Wireless material temperature compensation Manual Temperature of material entered from Automatic With the use of 1 to 3 wireless IEEE temperature sensors Net weight 150g Our products are subject to continuous further development and improvement Subj
21. shift the machine should stop for a time at least one second The measured distance by the laser system is saved in the table of results After one cycle if Stop after each cycle is set or after the whole measurement process the window with results would appear figure 5 22 gt Status Pro maschinenmesstechni 5 21 www statuspro com MEASUREMENTS POSITIONING F Laser Measurement System LSP30 3D Positioning Pos example dt2 tlees Eile Edit Measurement t View Help Measurement signal level Measurement value mm 3D Start position Digits Ar RSC o Target value m m Distance Positioning plot window X 2011 02 14 No Xa um Xr um E 1 10 14 10 2 11 1 10 2 15 3 19 6 17 9 eal 4 28 4 28 9 30 5 37 0 36 7 Es 6 45 1 45 0 7 51 2 52 1 50 8 55 3 56 5 55 9 60 4 59 4 i 1 3 4 5 6 7 8 9 10 ii 2 13 M 15 16 17 B 19 20 21 Z 2 M B 10 58 1 57 5 Point number 11 53 1 52 2 Next Repeat Browse Report New Menu Automatic points generate Cycles number 3 Measurement method Linear SS Ser Ki Ki w K Ki H Ces FIG 5 22 POSITIONING WINDOW AFTER FINISHING A FULL MEASUREMENT CYCLE Buttons Remove and Add can be used to remove or add the last measurement cycle It is possible to change the measuring cycle in which accidental error is suspected Button Browse opens data browsing window figure 5
22. through opening in the diaphragm about 2 mm diameter Measurement from the laser head goes out beam about 8 mm diameter FIG 4 1 DIAPHRAGM POSITIONS A MEASUREMENT B ALIGNMENT During transportation or when system is not used correct position of diaphragm is alignment position In this position optics is safe from getting dirty covering with dust and accidental damage during transportation G Status Pro schinenmesstechni 4 5 www statuspro com MEASUREMENTS POSITIONING Beam alignment process 1 In the option Display in the PC program choose type of measurement which will be done and axis along of which measurements will be carried On the screen will appear a drawing showing recommended arrangement of measuring elements at the chosen type of measurement Fig 3 6 2 Linear interferometer IL1 and linear retro reflector RL1 should be mounted on magnetic holders UM1 UM2 Regulating elements see Fig 4 2a b c of the laser head should be placed in central positions to assure maximum range of regulation Status Pro inenmes 4 6 www statuspro com MEASUREMENTS POSITIONING a b Vertical en Ga ball joint Horizontal pra axis Z movement Vertical keiers axis Y rotation a movement axis Z FIG 4 2 THE LASER HEAD ALIGNMENT ELEMENTS 3 Choose which from the optical elements will be moved retro reflector RL1 or interferometer IL1 and attach both with magnetic holders
23. wait for the end of measurements 13 Save the results and or print the measurement report To obtain correct results a point of attaching the retro reflector to the corpse of a measured machine must be carefully chosen If the point is chosen improperly than instead of a sought frequency f a multiple frequencies n f appear where n 1 2 on the FFT chart For that reason the retro reflector must not be in these measurements used with the magnetic holder UM1 UM2 holder can be used instead It must be also remembered that the system measures the vibration only in the axis of the optical path Any vibrations in perpendicular axes do not influence the measurement see fig 10 11 An example of a properly attached retro reflector is shown on fig 10 12 G Status Pro maschinenmesstechni 10 10 www statuspro com MEASUREMENTS VIBRATION Interferometer IL1 Retroreflector Y v Vibrations Vibrations not important important Retroreflector RL1 A FIG 10 11 VIBRATION MEASUREMENT IN DIFFERENT AXES FIG 10 12 EXAMPLE OF PROPERLY ATTACHED RETRO REFLECTOR Status Pro aschinenmesstechnik 10 11 www statuspro com 10 12 MEASUREMENTS VIBRATION aschinenmesstechni www statuspro com 11 TECHNICAL DATA System specifications TECHNICAL DATA Measurement Range Resolution Accuracy Distance 0 30 m 100 pm 0 4 um m Velocity 0 6m s 0 25 um s 0 1 An
24. 0 sec Statistic calculation method Slope between axis ag Md 339742 13 sec 94 22 22 Least squareness fit method Close FIG 7 21 SOUARENESS MEASUREMENT RESULTS Procedure of measuring the squareness of the machine s axes a Set up the laser head at a certain position b Measure the straightness of the movement in the first axis according the previous described procedure Straightness can be measured with the Wollastone or the 3D method c Store obtained results G Status Pro 7 18 WWW Staqtuspro com maschinenmesstechnik MEASUREMENTS PITCH YAW d Measure the straightness of the movement in the second axis according the previous described procedure Use the optical square etalon Do not move the laser head Any shift of the laser head position requires restarting the procedure from point 1 e Store obtained results f Choose Edit gt Squareness option The window like the one shown on the Fig 7 21 g Load stored results and choose the squareness of which axes is of interest i e Horizontal or Vertical h Calculated angle is shown in the bottom part of the window f Status Pro maschinenmesstec 7 19 www staqtuspro com MEASUREMENTS FLATNESS 8 MEASUREMENTS FLATNESS General Description The flatness measurement is done on the basis of angular straightness measurements In order to obtain a measured table flatness the measurement of angular straightness in eight a
25. 1 to be aligned along laser beam as shown on the figure 10 1 The laser measures the difference of vibrations of both optical elements i e IL1 and RL1 During vibration measurements the usage of the air temperature sensor is recommended Base temperature sensors do not have to be used 10 2 amp Status Pro Ces StaATUS FTO www statuspro com MEASUREMENTS VIBRATION FIG 10 1 OPTICAL PATH SET UP FOR VIBRATION MEASUREMENTS SCHEMATIC Vibration measurements can be performed not only along the laser beam as shown on figures 10 1 and 10 2 but also in directions perpendicular to the laser beam These configurations are shown on figures 10 3 and 10 4 In those two configurations only the retro reflector RL1 can be moved FIG 10 2 OPTICAL PATH SET UP FOR VIBRATION MEASUREMENTS IN X AXIS G Status Pro aschinenmesstechnik 10 3 www statuspro com MEASUREMENTS VIBRATION FIG 10 3 OPTICAL PATH SET UP FOR VIBRATION MEASUREMENTS IN Y AXIS FIG 10 4 OPTICAL PATH SET UP FOR VIBRATION MEASUREMENTS IN Z AXIS G Status Pro maschinenmesstechni 10 4 www statuspro com Software description MEASUREMENTS VIBRATION Vibrations are measured in the Vibration option chosen from the Main Menu The pLINE F1 program window should look like it is shown on the Fig 10 5 The window consists of four main parts samples gathered Display showing measurement signal level and percent of T
26. 10 9 VIBRATION REPORT PREVIEW WINDOW PAGE 1 Status Pro 10 8 www statuspro com maschinenmesstechnik MEASUREMENTS VIBRATION Program makes it possible to save the velocity graph and then load it for example to a Word editor To save graph to the file one should click with the right mouse key within the area of the graph From the popup menu that will appear the Copy to clipboard option should be chosen In the Configuration window for Vibration measurement the number of samples in single shot and continuous measurement can be set The default folder for storing measurement data can also be set here T Configuration General iMeteo Parameters Interface Positioning Velocity Straightness Flatness Vibrations Meteo FFT data files folder C Program Files SP30 3D Measurement result Browse Samples number continuous measurement 512 1024 J 2048 Samples number single measurement 512 1024 2048 4096 8192 16384 Apply Cancel FIG 10 10 VIBRATIONS CONFIGURATION OPTIONS G Status Pro aschinenmesstechnik 10 9 www statuspro com MEASUREMENTS VIBRATION Measurement procedure 8 Set up the laser on the measured machine and align optical path 9 Start the uLINE F1 software option Vibration 10 optional Choose the desired Vibration options 11 Press Start button and run the machine 12 In the continuous mode press Stop button in the single shot mode
27. 15 683 Ds 78 7 um 16 64 4 Preview Print 3D preview New Menu Points number 20 Measurement method Angular Statistic calculation method End point fit method FIG 7 18 A RESULT OF STREIGHTNESS MEASUREMENT To make the measurement in the manual capture of the measuring points the Measurement automatic in panel Measurement should be switched off The measurement begins by pressing Start The Capture of the measuring points can be done from the computer keyboard or by pressing the remote Strobe button Each time after the movement of the retro reflector base of about 100 mm measuring point should be captured After capturing the last point Stop should be pressed G Status Pro maschinenmesstechnik 7 16 www staqtuspro com MEASUREMENTS PITCH YAW The results of the measurements may be saved to a file or printed as described earlier Status Pro 7 maschinenmesstechnik 7 17 www staqtuspro com MEASUREMENTS PITCH YAW Squareness measurements procedure Axis squareness mm First axis file name Second axis file name Prostopadlosc 1 dt4 prost woll 2 dt4 First axis select axis Second axis select axis vertical horizontal vertical horizontal First axis plot Second axis plot 250 000 200 000 150 000 SL aks T 100 000 2 2 o 50000 ui 0 0 100 200 300 400 500 sol 0 50 100 150 200 250 300 350 40 Distance mm Distance mm Slope 15738 00 sec Slope 0 0
28. 500 550 600 650 700 750 800 850 900 950 1000 1050 110 1150 1200 1250 1300 1350 1400 Point number 26 1 00 1 194 Mean velocity 1 256 mm s a L T E O pee mm EM NENNEN NN Points number 1400 M FIG 6 8 VELOCITY MEASURED DATA ANALYSIS WINDOW Con I al n amp ae H D coe Print date 2011 02 12 23 41 17 Laser Measurement Sy stem LSP 30 3D Ver 7 8 0e Velocity plot window 50 400 150 200 250 300 350 400 40 600 o 600 850 700 760 800 860 W0 en 1000 1050 1100 1150 1200 1250 1300 1950 1400 Point number Mean velocity 1256 mmis Acquisition date Machine vibration Serial no Axis Company Lasertex Operator engineer Signature 0 Page lofl rr E ze S FIG 6 9 VELOCITY REPORT PREVIEW WINDOW Program makes it possible to save the velocity graph and then load it for example to a Word editor To save graph to the file one Status Pro maschinenmesstechnik 6 9 www statuspro com MEASUREMENTS VELOCITY should click with the right mouse key within the area of the graph From the popup menu that will appear the Copy to clipboard option should be chosen The choice of the speed unit is also possible from menu Edit we should choose option Config where the velocity unit can be set see figure 6 10 F Configuration x General WiMeteo Parameters Interface Posit
29. ATH SET UP FOR VELOCITY MEASUREMENTSIN X AXIS Status Pro 6 3 www statuspro com MEASUREMENTS VELOCITY FIG 6 3 OPTICAL PATH SET UP FOR VELOCITY MEASUREMENTS IN Y AXIS FIG 6 4 OPTICAL PATH SET UP FOR VELOCITY MEASUREMENTS IN Z AXIS Status Pro 6 4 www statuspro com MEASUREMENTS VELOCITY Software description Velocity is measured in the Velocity option chosen from the Main Menu The uLINE F1 program window should look like it is shown on the Fig 6 5 The window consists of four main parts 6 5 Display showing current velocity and measurement signal level Velocity plot blue line is a plot of the measured velocity red line is a plot of the mean velocity Velocity value table combinations of time and measured velocity value are placed in this table Panel with buttons 3 STATUS FTO SD maschinenmesstechnik www statuspro com MEASUREMENTS VELOCITY F Laser Measurement System LSP30 3D Velocity Measurement le Eile Edit View Help Measurement signal level Velocity mmis Digits Change sign Velocity plot window 2011 02 05 No Time s V mm s Point 52 7 1 000 332 2 004 395 3 008 4430 4 012 2531 z 5 16 3797 E 6 020 0781 A 7 024 4588 E 8 028 3481 9 032 3481 10 03 3481 11 040 4588 5 10 15 20 25 30 35 40 45 E 12 0 44 3 639 Point number 13 n 4A 2718 x Stop Menu Points num
30. AW should click with the right mouse key within the area of the graph From the popup menu that will appear the Copy to clipboard option should be chosen Status Pro maschinenmesstechni 7 13 www stagtuspro com MEASUREMENTS PITCH YAW Angular straightness measurements procedure The straightness measurements are driven along a straight line to which side surface of the angular retro reflector base is tangent In order to get the correct measurement the straight ruler along which retro reflector base will be pushed should be fasten on a measured axis In every moment of the measurement side surface of the retro reflector base should be tangent to the ruler see fig 7 17 FIG 7 17 AN EXAMPLE OF OPTICAL COMPONENTS SETUP IN ANGULAR STRAIGHTNESS MEASUREMENT The Straightness measurement is based on pushing angular retro reflector about an interval 100 mm and measuring its angle deviation Before beginning to the measurement measuring points G Status Pro 7 14 www stagtuspro com MEASUREMENTS PITCH YAW should be marked every 100 mm distance on the leading ruler or on the examined surface It is recommended using ruler with scale The measurement can be done in an automatic mode standard arrangement or in a manual mode with manual capturing of measuring points In the automatic mode capturing of the measuring points takes place when a temporary time interval runs out The time between capturing the
31. DESCRIPTION nennen eneseseses esee esee sees ess s sess esses sess s esse esses 9 5 MEASUREMENT PROCEDURE eese eese eese este eset este eese e stesse reus 9 9 MEASUREMENTS VIBRATION ee eee eese ee eee eee ettet eese e sees esee eese eeseeeeee 10 1 GENERAL DESCRIPTION ss 10 1 MEASUREMENT SETUP esse sess sess sess esses esses esse senses 10 2 SOFTWARE DESCRIPTION sic cicieccsscstcsesecsdeccsesencheselesedesesedecsaelehescoedeschesscchadessdsdcssaetecs 10 5 MEASUREMENT PROCEDURE sese se sese ee tester sete eese e esee 10 10 TECHNICAL DATA eiccccoccucc cuoi cs cc eege o a eee ru o eoe e ra eee EEN 11 1 SYSTEM SPECIFICATIONS ese s ese s ese s esse sess sees esses esses sess sess senes 11 1 IyASER FIEAD ao ern eritis EE EE 11 2 LASER HEAD OUTPUTS ANALOG esee essa ss ssessse senes ese s esee sensa 11 2 LASER HEAD OUTPUTS DIGITAL TYPE La entente 11 2 LASER HEAD OUTPUTS DIGITAL TYPE 2 a 11 3 Status Pro maschinenmesstechnik www statuspro com CONTENTS LASER HEAD OUTPUTS EXTENSION CONNECTOR PINOUT eere 11 3 SYSTEM WORK CONDITIONS ae 11 5 POWERSUPPLY hehe 11 5 IE An dud EE 11 5 ENVIRONMENT COMPENSATION anne 11 5 E Status Pro maschinenmesstechnik www statuspro com INTRODUCTION 1 INTRODUCTION Laser measurement system uLINE F1 is a two frequency laser interferometer intended to be used mainly in machine geometry measurements Its small size and low weight simplify transportation and make th
32. E STRAIGHTNESS MEASUREMENTS SCHEMATIC FIG 7 6 OPTICAL PATH SET UP FOR WOLLASTONE STRAIGHTNESS MEASUREMENTS IN X AXIS Wollaston straightness measurements can be performed in two configurations horizontal X figure 7 6 and vertical Z figure 7 7 In configuration X only the straightness of path in X axis is measured The same situation is with Z setup Status Pro inenm ess ec 7 6 www staqtuspro com MEASUREMENTS PITCH YAW FIG 7 7 OPTICAL PATH SET UP FOR WOLLASTONE STRAIGHTNESS MEASUREMENTS IN Z AXIS Software description All kind of straightness are measured in the Straightness option chosen from the Main Menu The pLINE F1 program window should look like it is shown on the Fig 7 12 The window consists of four main parts Display showing current distance and measurement signal level Straightness plot in 3D mode there visible plots for vertical and horizontal axis in Angular and Wollaston mode only one plot is visible Status Pro nmess 7 7 www stagtuspro com MEASUREMENTS PITCH YAW Straightness value table combinations of time and measured straightness value or two values in 3D mode are placed in this table Panel with buttons In the upper right corner a button for changing measurement mode is placed fig 7 12 There are four options available Angular Wollaston 3D and Pitch Yaw The last mode is described in another Chapter of this document T Lase
33. L1 and of laser head place in position Alignment Fig 4 4a FIG 4 4 ALIGNMENT POSITION A AND WORK POSITION B 7 Regulate the tripod height and level of the laser head by means of a sphere joint The laser beam has to fall on the upper hole G Status Pr inenmesstechnik 4 9 www statuspro com MEASUREMENTS POSITIONING of the interferometer diaphragm and after passing by the hole must be found within diaphragm area of the retro reflector The laser head should be placed horizontally for horizontal axes control it on the level indicator 8 Using regulating elements of the laser head Fig 4 2 find a position in which laser beam passes through both upper holes in the diaphragms placed on the interferometer and the retro reflector The spot position on the diaphragm of the interferometer the interferometer is placed closer to the laser head should be regulated with X stage and up down translation stage Z and up down translation of the tripod The spot position on the retro reflector diaphragm the retro reflector is far from laser interferometer should be regulated with o angle alignment in vertical and B angle alignment in horizontal line 9 Switch the diaphragms on RL1 in a position Work 10 Using the regulating elements of the laser head adjust the position of laser beams on the diaphragm of laser head Two return beams should exactly cover each other on the entrance hole on the front pan
34. Laser Measurement System uLine F1 User manual Status Pro aschinenmesstechnik G Status Pro maschinenmesstechnik www statuspro com Ge Status Pro Status Pro GmbH MAUSEGATT 19 Laser measurements systems 44866 BOCHUM GERMANY Measurement systems with data Tel 49 2327 9881 0 acquisition Fax 49 2327 9881 81 email info statuspro com Laser Measurement System ul mme F1 User manual Rev A Status Pro 2012 C Status Pro schinenmesstechni www statuspro com CONTENTS INTRODUCTION sen ee ea eek en 1 1 SAFETY CONSIDERATIONS une ee 1 2 Le 1 2 PRINCIPLES OF OPERATION neun ana 2 1 THE RULES OF LASER DISPLACEMENT MEASUREMENTS rs 2 1 THE CONSTRUCTION OF REAL INTERFEROMETERS eerte enne nnne nitens 2 2 THE INFLUENCE OF THE OUTSIDE CONDITIONS ON THE MEASUREMENT ACCURACY 2 6 THE ACCURACY OP LASER INTERFEROMETERS unseren en 2 7 Errors caused by the ROOMS ao 2 8 Dead path Error teste teen 2 9 COSINE 0 M 2 10 Abb eTTOT NN H 2 12 Laser stability ra ruo UN 2 12 E 2 13 A summary of laser measurement system errors 2 13 PREPARATIONS nennen 3 2 SOFTWARE INSTALLATION E 3 2 ELEMENTS OF LASER SYSTEM anna 3 11 PREPARING THE INTERFEROMETER TO WORK nn 3 14 POWERING THE SYSTEM ON nn ne ane nd 3 17 Sum see 3 17 Starting BO EORTC RM NE 3 17 Connection problems enee ae 3 20 GETTING BASIC INFORMATION FROM THE SYSTEM rss 3 23 e
35. Operator Company Engineer Lasertex Comments Measurement parameters Measurement date 2011 02 12 23 20 52 Humidity 48 Air temperature 25 BB C Pressure 1004 2 hPa Material temperature 23 92 5 Apply Cancel FIG 6 7 MACHINE DATA WINDOW Measured data can not only be saved but also a measurement report can be generated either by pressing Print or Preview on the measurement analysis window fig 6 8 The report can be generated either in the basic form where only the plot of the measured values is shown fig 6 9 or the extended version in which also tables with measured data a present G Status Pro www statuspro com maschinenmesstechnik MEASUREMENTS VELOCITY Eile Edit View Help Velocity plot window 2011 02 12 No Time s V mm s 3 E 7 1 0 00 1357 i S eed deed e rete ded 2 0 04 1 400 3 0 08 1 408 E 4 0 12 1 388 5 0 16 1 285 6 0 20 1 270 us 7 0 24 1 171 8 0 28 1 179 137 9 0 32 1 135 10 0 36 1 179 e 11 040 1 143 H 42 044 1 179 z 13 048 1 238 146 14 052 1 254 15 0 56 1 293 dE 46 0 60 1 321 47 0 64 1 329 E 18 0 68 1 384 d 19 0 72 1 357 20 0 76 1 353 085 21 0 80 1 305 22 0 84 1 333 55 23 0 88 1 313 ENS EB ER TEE M EE PEN ee EE 24 0 92 1 262 i i i i p EE 25 0 96 1 202 50 100 150 200 250 300 350 400 450
36. S PULL DOWN MENU FILE Before saving the file the program asks about changing machine data option available from pull down menu Edit Machine data like machine type machine serial number measured axis or machine operator Entering those values allows describing performed measurement for later analysis Those values are also present on the printed report E Status Pro maschinenmesstec 7 9 www stagtuspro com MEASUREMENTS PITCH YAW Measurement View Helg Machine data Measurement table Base length Squareness Configuration FIG 7 13 STRAIGHTNESS PULL DOWN MENU EDIT Other options available in menu Edit are Measurement table raw data are shown for analysis export and print Base length angular retroreflectror RK1 base length can be set default is 100mm option available also in Configuration gt Parameters Squareness squareness calculation as described later in this Chapter Configuration opens Configuration window as shown on figure 7 14 Status Pro schinenmesstechnik 7 10 www staqtuspro com MEASUREMENTS PITCH YAW P Configuration Parameters General WiMeteo i Interface Positioning Velocity Straightness Flatness Vibrations Meteo Straightness data files folder C Program Files LSP30 3D Measurement result Measurement method Statistic calculation method Angular End point fit method Wollaston 3D _ Least
37. am directing mirror ZK1 set 45 to the laser beam coming out from the head The position of the laser head should be regulated in a way that the beam reflected from the first mirror runs parallel to the axis 3 and falls on the second beam directing mirror The second mirror is set in the necessary angular to the first one G Status Pro maschinenmesstechnik 8 13 www staqtuspro com 8 14 MEASUREMENTS FLATNESS 4 Changing the position and the angle of the second mirror direct the reflected beam along the axis 4 in a way the beam is parallel to the axis 5 Place the angle interferometer in magnetic holder of the second mirror and set it in the optical path 6 Set the diaphragm on the angle interferometer to the Alignment position 7 Change the position of the head so that the beam falls in the middle of upper interferometer s diaphragm 8 Set the diaphragm on the angle retro reflector to the Alignment position 9 Moving the retro reflector along the axis change the position of the head so that the beam passing through the interferometer falls also in the middle of the retro reflector s diaphragm 10 After changing the positions of the diaphragms on the interferometer and on the retro reflector to Working positions check if the return beam falls in the middle of measuring opening in the head Do the check moving the retro reflector along the axis Corrections if needed can be made both changing the head or the i
38. ate a desktop icon m Fig 3 9 Window with installation information 18 Setup LSP30 3D te es Installing 5 Please wait while Setup installs LSP30 3D on your computer Q Extracting files C Program Files LSP30 3D Bdelnst dll Cancel Fig 3 10 Installation window during data copy operation Status Pro 3 7 www statuspro com maschinenmesstechnik PREPARATIONS Borland Database Engine Installation Upgrade The Borland Database Engine will be installed upgraded in the following directory C Program Files Borland Common Files BDE Browse Cano Fig 3 11 BDE Borland Database Environment destination folder window Warning 4 There is not enough space on drive C Install to this location anyway Fig 3 12 Window where Yes must be chosen Kreator instalacji sterownik w urz dze Trwa instalowanie sterownik w En 2 7 E Czekaj a2 sterowniki zostang zainstalowane Moze to chwile potrwa Fig 3 13 FTDI driver load GC Status Pro maschinenmesstechnik 3 8 www statuspro com PREPARATIONS 5 Setup LSP30 3D el il zs Completing the LSP30 3D Setup Wizard Setup has finished installing LSP30 3D on your computer The application may be launched by selecting the installed icons Click Finish to exit Setup d Fig 3 14 Installation summary window In most cases the installation is semi automatic requiring only confirma
39. ation Unit is recommended Base temperature sensors do not have to be used FIG 8 4 OPTICAL PATH SET UP FOR FLATNESS MEASUREMENTS IN ONE OF AXES Status Pro maschinenmesstechnik 8 4 www stagtuspro com MEASUREMENTS FLATNESS Alignment of optics for the flatness measurements The measurement of flatness consists of the measurements of deviations from straightness made along 8 axes The measurement axes are set in panel Measurement gt New Axis on a measured surface as shown on figure 8 5 On this figure are shown also directions of measurements in the axes and margins that must be kept during measurements T Laser Measurement System LSP30 3D Flatness untitled e Jte ES File Edit Help Angular Error um Axis number e Axis 1 D Axis 2 0 Axis 3 Axis 4 Distance mm 5 s a Distance mm Axis 5 Axis 6 H Axis Y Axis 8 Elevation 0 0 um Preview Print Measurement Menu No axis 1 Measurement method Envelope FIG 8 5 THE MEASUREMENT AXES The measurements of deviations from straightness are made with angular optics as described in the Chapter Measurements Status Pro maschinenmesstechnik 8 5 www staqtuspro com MEASUREMENTS FLATNESS Straightness Depending on the measurement axis a different set of optical components is used and the alignment of the optical path is done in slightly different way All flatness measurements
40. ber 0 FIG 6 5 VELOCITY MEASUREMENT WINDOW When the measurements are to be started the button Start should be pressed and the object which displacement velocity is investigated should be moved To finish the velocity measurements the button Stop should be pressed During measurements on the screen the velocity graph will be constantly updated By clicking on a part of the graph and moving the mouse rightwards the graph can be zoomed By clicking on a part of the graph and moving mouse leftwards the zoom is cancelled The graph can be printed or saved to a file This can be done by choosing from the upper menu File and then suitable a option i e Save Save as Print see figure 6 6 Status Pro maschinenmesstechnik 6 6 www statuspro com MEASUREMENTS VELOCITY Edit View Help Open Ctrl O Save Ctrl S Save as Print Ctrl P Print preview Export Exit FIG 6 6 VELOCITY PULL DOWN MENU FILE Before saving the file the program asks about changing machine data option available from pull down menu Edit Machine data like machine type machine serial number measured axis or machine operator see figure 6 7 Entering those values allows describing performed measurement for later analysis Those values are also present on the printed report G Status Pro maschinenmesstechnik 6 7 www statuspro com MEASUREMENTS VELOCITY Machine data Ex Machine type Serial number Axis Lathe SN12345 x
41. creen appears figure 3 24 Pressing F5 on the PC keyboard or the button marked Simulator causes the software to switch into simulation mode connection to Status Pro maschinenmesstechnik 3 17 www statuspro com PREPARATIONS an uLINE F1 device is emulated even if there is a real device connected to the computer LSP software ver 7 8 2c c Lasertex Poland 2011 Connection with system Simulator F5 FIG 3 25 SPLASH SCREEN After the splash screen a connection screen appears figure 3 25 where the connection trials are shown In the right bottom part there shown the interface over which the software is actually trying to obtain connection see a red circle on the figure 3 24 After software installation by default the first trials are made over USB interface When there is successful connection made over other interfaces then the successful interface is taken as a first choice in next runs Status Pro aschinenmess tec 3 18 www statuspro com PREPARATIONS T Laser Measurement System LSP30 3D iS Se me SS FIG 3 26 CONNECTION SCREEN 8 388888 Lp an 2 Display Positioning Straightness Pitch Yaw ime EH Configuration Velocity Vibrations Flatness FIG 3 27 MAIN MENU After the connection screen there appears the Main Menu appears as shown on the figure 3 27 There are two rows of buttons G Sta
42. e Automatic point capture Time period point capture Manual point capture FIG 9 6 PITCH YAW PULL DOWN MENU MEASUREMENT When the measurements are to be started the button Start should be pressed Depending on the chosen point capture method the points will be captured automatically or must be captured by the user To finish the measurements the Stop button should be pressed During measurements the graph on the screen will be constantly updated Edit View Help Open Ctrl O Save Ctrl S Save as Print Ctrl P Print preview Export Exit G Status Pro aschinenmesstechni 9 6 www statuspro com MEASUREMENTS PITCH YAW FIG 9 7 PITCH YAW PULL DOWN MENU FILE Obtained results can be saved printed or exported menu File Before saving the file the program asks about changing machine data option available from pull down menu Edit Machine data like machine type machine serial number measured axis or machine operator see figure 9 8 Entering those values allows describing performed measurement for later analysis Those values are also present on the printed report Machine data Machine type Serial number Axis Lathe SN12345 x Operator Company Engineer Lasertex Comments Measurement parameters Measurement date 2011 02 12 23 20 52 Humidity 45 Air temperature 25 8b C Pressure 1004 2 hPa Material temperature gus ie at res Apply Cancel FIG 9 8 MACHINE DATA WINDOW
43. e EL EE 3 30 Status Pro maschinenmesstechnik www statuspro com CONTENTS FLAT MIRROR MEASUREMENTS OPTION ehe nh hene ener eene tn nnne 3 32 BEAM ALIGNMENT gun CeAEedZeeeE ee NESRggedEEEN EEN AEEdNEENE e 4 2 BEAM ALIGNMENT DPROCESS sse rrrss sae rret sss sees sss reete sare ris 4 6 MEASUREMENTS POSITIONING 22000s0ssr220000000000000222000000000000000000000000 5 1 GENERAL DESCRIPTION sees sees esee sesso eee 5 MEASUREMENT SETUP et reetre sss eenia 5 1 SOFTWARE DESCRIPTION IRR hh hh enit hehehe ee eh a A a r eee a nnn 5 5 Pull down menu le 5 6 ENG DR generatio aM MM MM T 5 6 Compensation table preparation nent 5 7 Pull down menu Edit 5 8 Machine error Jnite eneeres seen enn neeneeees sees e nnne tenes 5 10 Positioning points generation nee ae 5 11 Configuration of Positioning measurement essere 5 12 Pull down menu Aegeurenmient rene nese sees 5 16 MEASUREMENT PROCEDURE eee hh hh tht hte h eene eret eee re rere eere rennen 5 18 Rules of automatic positioning measurement ss rennes 5 20 Course of measurements Eegeregie 5 21 MEASUREMENTS VELOCITY ccsccsssscccccccssssccccssccccsscsssscccssssccsscsssscosess 6 1 GENERAL DESCRIPTION eese seeeseee ses esese sese sese se sese s esses sese sete s esee esee 6 1 MEASUREMENT SETUP hh hh ihre hehe hn ee enhn eere e hehe nene teret rere teen 6 1 SOFTWARE DESCRIPTION RII tettetett t etetett tnte teete eterne ere e eene eret nente
44. e instrument especially useful for service applications Software version for Windows 9x NT 2k XP and automation of many measurement processes make the interferometer easy to use Software compliant with ISO DIS 230 and PN 93 M55580 enable making rapports and diagrams It is possible to choose statistical results processing according to norms ISO 230 2 European VDI DGQ 3441 German NMTBA USA BSI BS 4656 Part 16 British and PN 93 M55580 Polish Laser Measurement System uLINE F1 is highly configurable device although already in its basic configuration it allows performing the complicated measurements at highest possible precision Available options will be described below in this user manual CG Status Pro b S 1 1 www statuspro com 2m INTRODUCTION Very good technical parameters of the interferometer allow using it also in scientific laboratories for precision positioning for scaling optical and magnetic liners etc Safety considerations The Laser Interferometer uLINE F1 is a Safety Class I product designed and tested in accordance with international safety standards It is also a Class II Laser product conforming to international laser safety regulations The instrument and the manual should be inspected and reviewed for safety markings and instructions before operation Warnings Although the laser measurement system uLINE F1 is design to be used in harsh environment the following conditions must be me
45. e laser in the range of lppm 105 causes an error of lum on every 1m of a measured distance Therefore the laser instability error is important mainly in measurements in vacuum where a refraction coefficient is constant and when a low stability laser is used e g a semiconductor laser The stability of usually used in laser measurement systems HeNe gas lasers is 0 02 ppm so the stability error may be neglected Other errors In some conditions a noticeable error may be caused by the electronic part of the interferometer As the electronics is used mainly for counting the errors may be associated either with miscounting some pulses are not counted or with miscalculating the calculations are made with finite precision A summary of laser measurement system errors In order to show which of the errors influence the accuracy of a laser measurement system the most an exemplary calculation of errors on a 1m long steel machine is shown on figures 2 7 and 2 8 Different scales of the charts should be taken into account p P status Pro maschinenmess technik 2 13 www statuspro com PRINCIPLES OF OPERATION Bi Laser Bl Environment O Cosine O Dead path W Electronics EI Unlinearities I Thermal drift 0 1 2 3 4 5 6 7 8 9 10 Positioning error um m FIG 2 7 A CALCULATION OF ERRORS FOR A LASER MEASUREMENT SYSTEM WITHOUT THE COMPENSATION OF THE ENVIRONMENT ElLaser Bl Environment OCosine
46. e smaller than the real distance Ly according to Lims Lu cosO 6 The above equation is valid also when as a reflector a corn cube is used Laser beam Reflectors Laser head Machine s movement axis FIG 2 5 THE BEAM UNALIGNMENT AS A CAUSE OF A COSINE ERROR The only method of eliminating the cosine error is a proper laser beam alignment done before a measurement e Status Pro 2 11 www statuspro com ne EE PRINCIPLES OF OPERATION Abbe error An Abbe error occurs when during measurements the measured part does not move perfectly straight and there appear angular movements which cause sloping of the retro reflector The sloping of the reflector is the greater the longer is the distance between the axis of the measurement and the axis of movement This distance is called An Abbe offset Only the movements in the axis of the measurement are important see fig 2 6 An Abbe error may be avoided only when there are no angular movements of the retro reflector in the axis of the measurements Axis of Reflector measurement oo Q SV 9 o HE axis of Error movement FIG 2 6 AN ILLUSTRATION OF AN ABBE ERROR Laser stability error As was already mentioned in laser measurements the laser wavelength instability changes directly the readout from the Status Pro inenmesstec 2 12 www statuspro com PRINCIPLES OF OPERATION interferometer e g a relative instability of th
47. ear measurement le Measurement signal level WiMeteo data Measurement Parameters 10132 amp i Pressure nn Fee Start position 0 0000 4 Humidity 4 Laser head Change sign Air temp 20 00 I ge sig ES 7 Base temp 89 2 Resolution Normal AT T T2 T3 0 0 Averaging 10 15 D lt p dmm CRW NE dm all al all ad Material Expandability I see 117 Biere E Record Reset position Configuration Menu FIG 4 1 ILUSTRATION OF THE FUNCTION LASER HEAD The arrangement of the tripod helps to adjust the optical path Inspection of the level of arrangement can be made using level fastened on the tripod The angular position of the laser head is set using the function Laser Head The tripod must be levelled and after that with the function Laser Head the position of laser head must be set according the angle of measuring path In the most application the laser head is levelled In special cases when the measuring path is sloped to the level the angle of slope must be set The angle of rotation of laser head must be set to zero degree 90 degree in some configuration The diaphragm of the laser beam on Status Pro 4 4 www statuspro com CV oaa pc hdd su duos 3d o9 TUR MEASUREMENTS POSITIONING the front panel of the laser head helps in the process of alignment The diaphragm can be placed in two positions Alignment the laser beam goes out
48. ect to technical changes without prior notice Status Pro 11 7 www statuspro com NM maschinenmesstechnik
49. ee RS m et ed pe Ie tant 15 108 5 5 9 SE i i 16 86 1 0 0 En 17 1015 298 5 207 18 90 5 326 oaa 19 1044 224 4 20 106 9 334 inu 21 1252 392 Sole ES quem iii BS 22 379 425 123 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 es i oed 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 23 103 7 40 5 24 1118 416 Min 110 0 um Max 78 1 um Ds 188 1 um oe 948 363 A Preview Print 3D preview New Menu Points number 53 Measurement method 3 D Statistic calculation method End point fit method FIG 7 15 STREIGHTNESS MEASURED DATA ANALYSIS WINDOW T Report Prev ceea 1 et l We ei gt Di SG s D ws Print date 2011 02 14 22 37 50 Laser Measurement Sy stem LSP 30 3D Ver 7 7 4c Straightness plot window Error um 123 45 6 7 8 9 10 11 12 13 44 15 16 17 18 19 20 21 22 23 24 25 26 27 28 20 30 31 32 33 34 35 36 37 38 39 4D 41 42 43 44 45 4 4 4B 49 50 51 62 53 Point number Ds 219 8 um Acquisition date 2010 01 29 10 42 08Machine loz szlifierki Serial no Axis Company Lasertex Operator Stawomir Sambor Signature 0 Pagelofl FIG 7 16 STREIGHTNESS REPORT PREVIEW WINDOW Program makes it possible to save the velocity graph and then load it for example to a Word editor To save graph to the file one Status Pro maschinenmesstechnik 7 12 www staqtuspro com MEASUREMENTS PITCH Y
50. el of the laser head during the whole movement range If this is necessary gently correct the position of the IL1 Shift the diaphragm on the laser head to the position Work The level of the measuring signal the green indicator on the screen of the computer should have value not less than 80 during translocation of the moving element along the whole path 12 Reset displayed position using Reset button on the display System is ready to work x rec a US IO ALL 8 maschinenmesstechnik 4 10 www statuspro com MEASUREMENTS POSITIONING Attention Remember that the position when the interferometer touches the retro reflector can serve only to adjust Be sure that during measurements in extreme nearest measuring position the retro reflector does not touch the interferometer because it can be a source of measuring errors Status Pro maschinenmesstechnik 4 11 www statuspro com MEASUREMENTS POSITIONING 5 MEASUREMENTS POSITIONING General Description The linear positioning measurement is the most advanced option of linear measurements It is the most common form of laser measurements performed on machines The system measures linear positioning accuracy repeatability and backlash by comparing the position to which the machine moves i e the position displayed on the machine s readout with the true position measured by the interferometer The HLINE F1 device offers a unique feature of simultaneous
51. equency transformation is shown Status Pro 10 7 www statuspro com maschinenmesstechnik MEASUREMENTS VIBRATION fig 10 9 or the extended version in which also tables with measured data is present file Edit View Help FFT plot window time axis 2011 02 12 Display ooms Distance 0 00158 H 3 me i Melocity Nat Acceleration E 00009 1 3 oo Measurement Type 0 00045 i e Single 000023 a i Continuos ant j j j j i E 0 00023 Ei i 1 4 24 74 124 174 224 274 324 374 424 474 524 574 624 674 724 774 824 874 924 974 1024 4s i Point number FFT plot window frequency axis 0 000244 i 499 0 000195 g 000171 i i pense Zuse 0000075 Log scale X axis 0 000049 n i d 5 Log scale Y axis 1 5 DC value Frequency Hz Preview Print New Menu Points number 0 4096 Single measurement et ES FIG 10 8 VIBRATION MEASURED DATA ANALYSIS WINDOW Ml ee de D SSS Hl D wow Print date 2011 02 12 23 59 33 Laser Measurement System LSP 30 3D Ver 7 8 0e FFT plot window frequency axis Frequency Hz Acquisition date 2009 10 23 12 29 03Machine Serial no Axis Company Lasertex Operator Stawomir Sambor Signature 0 Page Let FFT plot window time axis ez SE e FIG
52. eter IK1 Angular retro reflector RK1 Optional elements are USB cable Manual Strobe Magnetic holder UM1 Tripod stand Air temperature sensor Base temperature sensor Pitch Yaw measurements require optical elements IK1 and RK1 to be aligned along laser beam as shown on the figure 9 1 Either of the elements can be moved During Pitch Yaw measurements the usage of the SMI Environmental Compensation Unit is recommended Base temperature sensors do not have to be used IK1 RK1 FIG 9 1 OPTICAL PATH SET UP FOR PITCH YAW MEASUREMENTS SCHEMATIC LC Status Pro maschinenmesstechnik 9 2 www statuspro com MEASUREMENTS PITCH YAW Pitch Yaw measurements can be performed not only along the laser beam as shown on figures 9 1 and 9 2 but also in directions perpendicular to the laser beam These configurations are shown on figures 9 3 and 9 4 In those two configurations only the retro reflector RK1 can be moved FIG 9 2 OPTICAL PATH SET UP FOR PITCH YAW MEASUREMENTS IN X AXIS G Status Pro aschinenmesstechnik 9 3 www statuspro com MEASUREMENTS PITCH YAW FIG 9 3 OPTICAL PATH SET UP FOR PITCH YAW MEASUREMENTS IN Y AXIS FIG 9 4 OPTICAL PATH SET UP FOR PITCH YAW MEASUREMENTS IN Z AXIS Status Pro 9 4 www statuspro com maschinenmes
53. etween reflected beams fp see fig 2 1 The measured value of the displacement is calculated according to A ae 1 p P status Pro maschinenmesstechnik 2 1 www statuspro com PRINCIPLES OF OPERATION Where N number of pulses light wavelength Reference reflector Zi Moving reflector Z Coherent light SST AF Trooz l source fo 2f c x fp Detector fp frequency resulting from the Doppler effect FIG 2 1 THE MICHELSON INTERFEROMETER The construction of real interferometers The main disadvantage of Michelson interferometer results from the fact that the detector cannot determine whether fp is negative or positive thus from the measurements the displacement of the moving reflector without the sign is obtained Currently there are widely used two methods that allow getting also the direction of the movement Depending on the number of light frequencies Status Pro 2 2 www statuspro com u EE du PRINCIPLES OF OPERATION wavelengths used in the interferometer the first is called homodyne one frequency and the second heterodyne two frequencies method In the homodyne method shown on figure 2 2 as a coherent source of light a linearly polarized laser is used If it is two mode laser i e it generates two wavelengths than one mode must be cut off with the use of a properly set polarizer The polarising splitter splits the light beam from the laser in
54. gular 0 3600 arcsec 0 04 arcsec 0 2 Straightness measurement 0 15m 0 02 um for 100 mm 1 with angular optics base 0 15m 0 02 um for 100 mm t 0 5 96 Flatness Vertical range 2 base mm 0 3m 0 5 um Straightness measurement with wollastone prism 1 0 5 0 15L2 um Squareness t 1000 arcsec 0 4arcsec 1 t 1 arcsec Rotary measurements 69 0 04 arcsec 0 2 L axis length in meters for resolution 1 nm Status Pro maschinenmesstechnik www statuspro com TECHNICAL DATA Laser head HeNe laser with frequency stabilization Heating time Approx 5 min 632 990566 nm H 632 992031 nm V Wavelength accuracy 0 005 ppm Short time stability 0 001 ppm 1 hour Wavelength vacuum Output power 800 pW Distance between out and ingoing 12 7 mm beam Laser head dimensions 45x70x245 mm Net weight 1500 g Class 2 Laser product according to Safety class PN 91 T 06700 Laser head outputs analog SinA CosB Voltage level 1 Vpp Signal resolution User defined from 100nm period to 5mm period in 100nm period step Laser head outputs digital type 1 status Pro schinenmesstechni 11 2 www statuspro com TECHNICAL DATA Voltage level 5 V differential CMOS Signal resolution User defined from 100nm period to 5mm period in 100nm period step Laser head outputs digital type 2 Signal re
55. h is a very useful tools for the laser beam alignment Beam alignment is a process in which the user with the use of certain mechanical arrangements makes the direction of the laser beam parallel to the direction of the movement in a measured axis If the beam is not correctly aligned an effect like the one shown on Fig 4 1 may happen i e the position of the beam returning on the detector in the laser head from the moving retroreflector may vary with the position of the retroreflector resulting in a cosine error see chapter 2 and or misalignment of the optical path no Beam Strength G Status Pro c inenmesstechni 4 2 www statuspro com MEASUREMENTS POSITIONING FIG 4 1 ILLUSTRATION OF BEAM ALIGNMENT The alignment of the optical set up should be conducted in option Display It can be done during laser head heating Final check should be made when the system is ready to work The Laser Head should be firmly attached to the tripod The tripod should not touch a machine as it may cause vibration of the laser head and the optical path Turn special attention not to move the legs of the tripod during the measurements because it will cause shift of elements of the optical path and the necessity of repetition of the alignment process Status Pro schinenmesstechnik 4 3 www statuspro com MEASUREMENTS POSITIONING 2 T Laser Measurement System LSP30 3D Lin
56. here are options for setting measured machine data Fig 5 10 defining machine error Status Pro maschinenmesstechnik 5 8 www statuspro com MEASUREMENTS POSITIONING limits fig 5 11 previewing obtained positioning results editing positioning points when option Target Points from List from menu Measurement is active and changing overall positioning configuration Measurement View Help Machine data Machine error limits Measurement table Positioning points Configuration FIG 5 9 POSITIONING PULL DOWN MENU EDIT Machine data x Machine type Serial number Axis Harnas 123E45 Operator Company Lasertex Comments Measuremert parameters Measurement date 2011 02 05 22 55 45 Humidity 32 Air temperature 20 00 C Pressure 1013 2 hPa Material temperature 20 07 C Apply Cancel FIG 5 10 MACHINE DATAWINDOW Status Pro maschinenmesstechnik 5 9 www statuspro com Machine error limits MEASUREMENTS POSITIONING Machine error limits Exm Machine name NMTBA ISO vo Bs PN Accuracy Repeatability Reverse error Position error Forward Forward Mean Forward 1 2 um 1 2 um 1 2 um 1 0 um Reverse Reverse Maximal Reverse d 12 um 12 um 12 um 12 um Bidirectional Bidirectional Mean Notes DEB ODOB DS Close FIG 5 11 MACHINE ERROR LIMITS WINDOW In the Edit option the user can setup allowable error limits of the machine for different norms optio
57. hinenmesstechnik 5 23 www statuspro com MEASUREMENTS POSITIONING F Laser Measurement System LSP30 3D Positioning UnionX 3 dt2 SES Eile Edit Measurement t View Help Distance Positioning plot window Results n Norm 280 8 H ISO 230 2 187 2 Machine 93 6 m15 ui Param Max Value Accuracy um um forward 120 reverse 120 8509 overall A 120 8509 Error um 8 Repeatability pm um 120 5320 reverse R 120 bidirectionalR 120 7527 Reverse error pm um mean 2 95 maximal 120 640 Position devia um um forward E 100 reverse E 120 2667 mean E 120 2648 561 6 o 1030 2060 3090 4120 5150 6180 7210 8240 9270 10300 Distance mm 9 Forward mean 7 Forward mean 3 Sigma Reverse mean Reverse mean 3 Sigma Backlash Print i Parameters Back Cycles number 2 Points number 104 Measurement method Linear al ae t ara _ w w T K ir FIG 5 24 LINEAR POSITIONING REPORT WINDOW The positioning parameters are presented on the graph In the right side panel Results is found on which the results of statistical calculations the norm according to which calculations were executed and the limit values for the certain machine are presented If the error value exceeds set limit for the machine this error is displayed in red The norm can be chosen from a list After choosing a new
58. hown on figures 7 3 and 7 4 In those two configurations only the retro reflector RK1 can be moved xd G Status Pro maschinenmesstechnik 7 3 WWwW Staqtuspro com MEASUREMENTS PITCH YAW FIG 7 2 OPTICAL PATH SET UP FOR ANGULAR STRAIGHTNESS MEASUREMENTS IN X AXIS FIG 7 3 OPTICAL PATH SET UP FOR ANGULAR STRAIGHTNESS MEASUREMENTS IN Y AXIS FIG 7 4 OPTICAL PATH SET UP FOR ANGULAR STRAIGHTNESS MEASUREMENTS IN Z AXIS Status Pro schinenmesstechnik 7 4 www staqtuspro com MEASUREMENTS PITCH YAW Wollaston straightness measurement For Wollaston straightness measurements the Wollaston optics should be used Necessary components are Laser head Power supply Wollaston prism WP2 3 or WP2 10 Wollaston retro reflector WRP1 Optional elements are USB cable Manual Strobe Magnetic holder UM1 Tripod stand Air temperature sensor Base temperature sensor Wollaston straightness measurements require optical elements WP2 3 or WP2 10 depending on required measurement range and WRP1 to be aligned along laser beam as shown on the figure 7 5 Either of the elements can be moved During Wollaston straightness measurements the usage of the air temperature sensor is recommended Base temperature sensors do not have to be used 7 5 f Status Pro maschinenmesstec www stagtuspro com MEASUREMENTS PITCH YAW WRP1 FIG 7 5 OPTICAL PATH SET UP FOR WOLLASTON
59. ide an Error Table can be found Under the graph three buttons can be found Start beginning of the measurement Reset Position resetting the measured value and the button Main Menu allowing to re enter the Main menu f Laser Measurement System LSP30 3D Positioning Measurement method Linear Tees Eile Edit Measurement View Help Measurement signal level Measurement value mm Dod Start position Digits a p SE Target value mm Distance Horizontal Vertical ositioning plot window X 2011 02 14 No Xa um Xr um ep oint number Start Reset position Menu Automatic points generate Cycles number 1 Measurement method Linear Amer I Er Ki eler _ w K Ki x PAP CHE FIG 5 20 CHOICE BETWEEN 1D AND 3D POSITIONING Status Pro maschinenmesstechnik 5 18 www statuspro com MEASUREMENTS POSITIONING In the right upper corner of the main positioning window see figure 5 20 there is placed the button for choosing if the laser is to measure only the positioning 1D or if the 3D axes straightness is to be measured simultaneously 3D If the 3D option is chosen than together with positioning data the straightness data in horizontal and vertical plane are gathered All measured data can be browsed during measurements by changing data panels figure 5 21 Distance Horizontal Vertical No Xa um Xr u
60. ill move the base point A dead path error is the more severe the greater is the distance between the interferometer and the base point This error is especially important in laser interferometers where the interferometer is build up in a common casing with a laser head because it is than very difficult to reduce a dead path e Status Pro maschinenmesstec 2 9 www statuspro com PRINCIPLES OF OPERATION Interferometer Base point Null point Reflector Laser head Interferometer Base point Null point ester Laser head The correct deployment of the optical components for reducing a dead path error FIG 2 4 AN ILLUSTRATION OF A DEAD PATH ERROR Cosine error If the laser beam is not parallel to a measured axis of a machine ie the optical path is not properly adjusted than a difference between the real distance and the measured distance occurs This error of unalignment is known as a cosine error because its magnitude depends on the angle between the laser beam and the axis of the machine fig 2 5 It as a reflector a flat mirror is used than the beam must be perpendicular to it If the machine changes its position form point A aschinenmesstechnik amp Status Pro 2 10 www statuspro com PRINCIPLES OF OPERATION to point B than the beam stays perpendicular to the mirror but moves on its surface The distance measured by the laser interferometer Lims will b
61. in directions perpendicular to the laser beam These configurations are shown on figures 5 3 and 5 4 In those two configurations only the retro reflector RL1 can be moved FIG 5 2 OPTICAL PATH SET UP FOR POSITIONING MEASUREMENTS IN X AXIS G Status Pro schinenmesstechnik 5 3 www statuspro com MEASUREMENTS POSITIONING FIG 5 3 OPTICAL PATH SET UP FOR POSITIONING MEASUREMENTS IN Y AXIS G Status Pro schinenmesstechnik 5 4 www statuspro com MEASUREMENTS POSITIONING FIG 5 4 OPTICAL PATH SET UP FOR POSITIONING MEASUREMENTS IN Z AXIS Software description In order to start Positioning measurements in the Main Menu the Positioning button should be pressed On the screen there should appear a window Linear positioning as shown on the fig 5 5 F Laser Measurement System LSP30 3D Positioning Measurement method Pendulum ts ee File Edit Measurement View Help Measurement signal level Measurement value mm 1 D Start position Digits 0000 EX Ses Target value mm Distance Positioning plot window X 2011 02 05 No Xa ml Xr um Error um e o Point number Start Reset position Menu Automatic points generate Cycles number 3 Measurement method Pend FIG 5 5 LINEAR POSITIONING WINDOW Status Pro 5 5 www statuspro com maschinenmesstechnik MEASUREMENTS POSITIONING Pull down menu File The upper menu of this window consist
62. ioning E Straightness Flatness Vibrations Meteo Velocity data files folder C Program Files SP30 3D Measurement result Browse V elocity unit mms mis mrm min mimin Apply Cancel FIG 6 10 VELOCITY CONFIGURATION OPTIONS Measurement procedure 1 Set up the laser on the measured machine and align optical path Status Pro esstec 6 10 www statuspro com 6 11 MEASUREMENTS VELOCITY Start the HLINE F1 software option Velocity optional Choose the desired Velocity Unit in the Configuration window Press Start button and run the machine When the machine stops press Stop button save the results and or print the measurement report Status Pro maschinenmesstec www statuspro com MEASUREMENTS PITCH YAW 7 MEASUREMENTS STRAIGHTNESS General Description Straightness measurements is a popular measurement usually used to gain basic information about a machine axis geometry With this measuring option a user can either measure machine base straightness on all important surfaces of the base or check the movement of e g movement of a measured machine s element in space In the uLINE F1 device the straightness measurements can be performed with two different methods Angular and Wollaston Angular method is designed to be used in base straightness measurements like optical autocollimator Wollaston method is designed for movement in space
63. irectory of the languages Languages Hex directory with the firmware for the laser measurement system directory FTDI Driver for USB Documents folder with the manual and other documents depending on system version database BDE Borland Database Environments The window shown in the figure 3 2 appears first during installation It allows choosing the installation language Wybierz jezyk instalacji fe Wybierz j zyk u ywany podczas instalacji EES Fig 3 2 Installation language setup window Status Pro maschinenmesstechnik 3 3 www statuspro com PREPARATIONS 118 Setup LSP30 3D Welcome to the LSP30 3D Setup Wizard This will install LSP30 3D ver 7 8 0 on your computer It is recommended that you close all other applications before continuing Click Next to continue or Cancel to exit Setup Fig 3 3 Welcome window 15 Setup LSP30 3D c Ex User Information b Please enter your information ke A User Name Organization HP Fig 3 4 User Information window Status Pro maschinenmesstechnik 3 4 www statuspro com PREPARATIONS Select Destination Location bay Where should LSP30 3D be installed amp k Setup will install LSP30 3D into the Following Folder To continue click Next IF you would like to select a different Folder click Browse C Program FilesiLSP30 3D At least 45 7 MB of free disk space is req
64. is important The check radio buttons in the bottom right of the window allow to change the vertical scale of the frequency diagram to logarithmic and to eliminate a DC offset T Laser Measurement System LSP30 3D 4 File Edit View Help Open Ctrl O Save Ctrl S TT Save as Print Ctrl P Print preview Export Exit n nz FIG 10 6 VIBRATION PULL DOWN MENU FILE Before saving the file the program asks about changing machine data option available from pull down menu Edit gt Machine Status Pro 10 6 www statuspro com Ces StaAtUS FTO MEASUREMENTS VIBRATION data like machine type machine serial number measured axis or machine operator see figure 10 7 Entering those values allows describing performed measurement for later analysis Those values are also present on the printed report Machine data Exm Machine type Serial number Axis Lathe SN12345 x Operator Company Engineer Lasertex Comments Measurement parameters Measurement date 2011 02 12 23 20 52 Humidity 45 Air temperature 25 8b C Pressure 1004 2 hPa Material temperature 2392 C Apply Cancel FIG 10 7 MACHINE DATA WINDOW Measured data can not only be saved but also a measurement report can be generated either by pressing Print or Preview on the measurement analysis window fig 10 8 The report can be generated either in the basic form where only the plot of the measured values and calculated fr
65. ishes the data recording The results can be saved with the choice of Save to file In fig 3 36 the example of Data Record is presented amp Status Pro aschinenmesstechni 3 31 www statuspro com PREPARATIONS Flat mirror measurements option The flat mirror measurements permits the measurements of displacement velocity positioning and vibrations of a flat surface The surface should have mirror quality surface flatness 8 and the reflection coefficient not less 50 The aluminium gold or dielectric mirror mounted to the moving part is suggested There are two possible configuration double pass setup Fig 3 36 and single pass setup 3 37 The resolution of double pass setup is two time bigger then one pass The setup consist from the laser head the flat mirror interferometer FMI and the flat mirror One have to chose the single double pass option on the screen in display mode to have correct result of measurement Flat mirror FIG 3 37 DOUBLE PASS FLAT MIRROR INTERFREOMETER inen 3 32 www statuspro com PREPARATIONS Flat mirror FIG 3 38 SINGLE PASS FLAT MIRROR INTERFREOMETER aschinenmesstechni www statuspro com MEASUREMENTS POSITIONING 4 BEAM ALIGNMENT The alignment of the optical path is the most difficult and laborious part of the whole measurement process Be very careful reading this chapter The uLine F1 provide unique function Laser Head whic
66. m 38 333 10 120 130 140 Distance mm FIG 5 21 3D DATA BROWSING In the bottom parts of the window a status bar can be found on which there is presented a configuration of the positioning measurements In the first field the information about the method of measuring points capture is placed manual automatic In the second field there is shown the information whether measuring points originate from list or are marked automatically The next field informs about number of cycles in series number of cycles executed one after one if not active is the option Stop After Cycle To execute the linear positioning measurement the program has to know the target position in which it has to make G Status Pro aschinenmesstechni 5 19 www statuspro com MEASUREMENTS POSITIONING measurement and where it has to calculate deviation from an expected value The positioning points can be automatically defined in the first measuring cycle on a condition that distances between points are marked with an accuracy of 1 000mm The positioning points can be also written or calculated after marking an option Target Points From List After activating this option the positioning points can be defined in any accuracy Measurement can be done in an Automatic option or in a Manual Capture option as described earlier in this chapter In the automatic mode the system itself recognizes the moment of stop the value of target point the direction
67. n Machine error limits Fig 5 11 The results of the whole linear positioning measurements are compared with this limits see Fig 5 12 This option is especially useful when there are checked many machines of the same type and the same requirements on their accuracy Status Pro maschinenmesstechnik 5 10 www statuspro com MEASUREMENTS POSITIONING Norm Machine m15 Param Max Value Accuracy um um forward 20 aA reverse 20 32 overall A 120 67 Repeatability pm pm forward R 20 25 reverse R 20 2 1 bidirectional R 20 53 Reverse error um um mean 20 36 maximal 120 38 Position deviation um um forward E 00 20 reverse E 20 13 mean E 20 15 FIG 5 12 MACHINE ERROR LIMITS COMPARATION PANEL Positioning points generation When option Target Points from List from menu Measurement is active then the program expects the measured machine to stop in points defined in the Positioning points window as shown on the figure 5 13 Points can be entered manually or can be generated from the input parameters start position can be negative distance must be positive and interval must be positive or number of points The points are calculated after pressing Calculate button Obtained points can be saved to a file Status Pro maschinenmesstechnik 5 11 www statuspro com MEASUREMENTS POSITIONING Positioning points Points table Parameters Point mm
68. norm the results are recalculated Under the graph there are buttons used for change of the axis scale Axis Scale automatic scaling or assignment minimum and maximum values choosing of parameters shown on the graph Parameters report printout Print and return to looking through the measuring cycles Previous Menu Example of linear positioning report of CNC machine in axis is presented on the fig 5 25 Status Pro maschinenmesstechnik 5 24 www statuspro com MEASUREMENTS POSITIONING POSITIONING RAPPORT Machine BFK130 Serial No Axis X File Name BFK130X1 dt2 Acquisition date 01 11 08 15 41 14 Current date 02 11 06 15 08 15 Measurement System LSP 30 Compact LASERTEX Results Measurement Conditions Norm NMTBA Accuracy Air Temperature 23 3 C Forward Reverse o Bidirectional Material Temperature 19 4 C Repeatability Humidity 36 Forward Reverse Bidirectional Pressure 980 hPa Backlash Mean Max 6 4 2 o 2 4 E us 9 10 20 21 Forward Mean 3 Sigma Reverse Mean Reverse Mean 3 Sigma Bidirectional Mean 3 Sigma X Reverse Data Points Forward Data Points Signature FIG 5 25 LINEAR POSITIONING REPORT EXAMPLE Status Pro maschinenmesstechnik 5 25 www statuspro com MEASUREMENTS VELOCITY 6 MEASUREMENTS VELOCITY General Description Velocity measurements are performed with the use of linear
69. nterferometer position 11 Set the diaphragm on the laser head to Working position and check if the level indicator on the display shows around 100 Status Pro maschinenmesstechni www staqtuspro com MEASUREMENTS FLATNESS 12 Now the straightness measurements as described in Chapter 6 can be made In the case of the measurements in the axis 2 the path alignment procedure is the same as described above The only difference is that the second mirror as not needed is not used f Status Pro maschinenmesstec 8 15 www staqtuspro com MEASUREMENTS PITCH YAW 9 MEASUREMENTS PITCH YAW General Description Measurements of Pitch Yaw are designed to give information about a machine axis geometry With this measuring option a user can either measure machine base straightness on all important surfaces of the base or check the quality of movement of a measured element The measured errors are known in the literature as pitch and yaw errors Pitch Yaw option is very similar to the Angular Straightness option as described in another Chapter of this document Those two measurements differ only by different methods of calculation of end results Measurement Setup For Pitch Yaw measurements the angular optics should be used Necessary components are Laser head Ge Status Pro aschinenmesstechni 9 1 www statuspro com MEASUREMENTS PITCH YAW Powersupply Angular interferom
70. nts generate this option is marked when the positioning points are calculated automatically by the program and not chosen by the user see below Option exclusive with Points from list Points from list after choosing this option on the screen appears a window for edition measuring points in which we write or count distance value for positioning points If this option is not active then the positioning points are marked automatically in first measuring cycle and the option Automatic Points List Generation is marked see also figure 5 13 Help v Target value v Deviation table v All cycles v Cursor position FIG 5 19 POSITIONING PULL DOWN MENU VIEW Option View serves to switching on or off a panel Target value Deviation table and to switching on drawing on the graph of measuring points from All cycles active cycle is drawn using solid line but remaining cycles are illustrated using only points G Status Pro aschinenmesstechni 5 17 www statuspro com MEASUREMENTS POSITIONING Measurement procedure If the system is ready to work then two digital displays and the gauge of measuring signal level appear on the screen On the upper display the measured value is shown On the bottom display the value of the target position read from data points table or appointed automatically is shown Under the displays on the left side there is shown a graph on which the results of measurements are shown On the right s
71. ocity is strictly limited see Technical data chapter for details In the panel Environment the data from Environmental Compensation Unit ECU may be controlled From console of the computer one can switch off the data coming from Status Pro inenme ss ec 3 26 www statuspro com PREPARATIONS Environmental Compensation Unit ECU and insert the parameters of the atmosphere by hand Parameters Start position 0 0000 Change sign Resolution Normal Averaging ois Material Expandability Steel sl 11 7 C um C FIG 3 34 PARAMETERS PANEL Status Bar figure 3 35 shows the state of the laser head and the state of the measurements There are four fields Connection Laser Signal and Velocity signalizing the state of each of the elements In proper operation they should all be green In table 3 1 there are shown the possible states of the fields Field name Field state State description Required action Connection Red No connection to laser Click on the field to open Configuration window Restart the connection Green Laser head is connected to No action necessary the computer properly Laser Red Laser head off Click on the field to switch the laser on Red Laser head on but not Wait for the laser to become blinking ready ready Yellow Laser head near unstable Finish performed Status Pro 3 27 maschinenmesstechnik www statuspro com PREPARATIONS region
72. on Configuration Fig 3 29 the user can configure the behavior of the pLINE F1 during measurements and the appearance of the LSP Software For example the language of the program can be changed after installation the program opens in the language of the installed Windows system In other panels of mentioned window the user can configure many parameters of all types of measurements available with the system These panel can be also reached from other parts of the program as it will be described later in this document In the Interface panel the user can force the software to try connecting with the laser over chosen interface In order to do this the user should choose the right communication interface USB WiFi Bluetooth or Simulator and press Reconnect After a while an appropriate message will be displayed with communication success or failure Status Pro hinenmess tec 3 21 www statuspro com PREPARATIONS Interface Velocity Straightness Flatness Communication interface USB Parameters wess meteo WiFi Bluetooth Simulator IP Configuration WiFi Configuration AdHoc Use DHCP IP address Port IP IP mask IP gateway Connection state System pod czony poprawnie usb 0 FIG 3 29 CONFIGURATION WINDOW INTERFACE PANEL Status Pro www statuspro com maschinenmesstechnik PREPARATIONS Getting basic information from the system After pr
73. one should click with the right mouse key within the area of the graph From the popup menu that will appear the Copy to clipboard option should be chosen Configuration options for Pitch Yaw are available in the Configuration gt Straightness window The important option is the Status Pro 9 8 www statuspro com maschinenmesstechnik MEASUREMENTS PITCH YAW choice of statistic calculation method fig 9 10 of end results End point fit or Least squareness fit can be chosen For the analysis of raw results the option None should be marked f Configuration x General WiMeteo Parameters Interface Positioning Velocity Straightness Flatness Vibrations Meteo Straightness data files folder CA Program Files SP30 3D Measurement result Measurement method Statistic calculation method Angular End point fit method Wollaston 3D J Least squareness fit method Pitch Yaw None Point detection parameters Min points interval 100 e um Vibrations less than 20 a um Point capture after 1 0 sek Default Apply Cancel FIG 9 10 PITCH YAW CONFIGURATION OPTIONS Measurement procedure 1 Set up the laser on the measured machine and align optical path 2 Start the LINE F1 software option Pitch Yaw 3 Choose the desired point capture method Status Pro maschinenmesstechnik 9 9 www statuspro com MEASUREMENTS PITCH YAW Press Start button and run
74. oper software loading the option Display in the Main Menu ought to be chosen The window shown on the figure 3 30 should appear The laser system will be heated up If the output beam of the laser is properly redirected to the laser head e g with the use of the retroreflector RL1 the Beam Strength the green indicator on the screen will appear and disappear The speed of changes will become smaller due to the increase in the temperature of the laser system cover During the heating up time the measuring system is ready for the alignment of the optical arrangement of the laser path see chapter 4 f Laser Measurement System HPI IGHz Linear measurement Tele Es Laser head heating WiMeteo data Measurement Parameters el 527 Distance Config 1 l 2 ech 0 000 S vi Humidity Adjustment Laser head Change sign v Air temp J 9 g E v Base temp Resolution Normal i AT iif T2 T3 p S Averaging 0 1s R Material Expandability Sol Sol Sol Sol Sed 117 Bume E Record Reset position Configuration Menu Signa I Velocity es FIG 3 30 DISPLAY WINDOW On the Display screen there ia a status bar and four panels www statuspro com Status Pro hinenmess tec PREPARATIONS Panel containing the digital result of the measurement figure 3 31 the measuring signal level indicator and the buttons for changing the number of displayed Digits and for changing Units Quantit
75. optics This measurement can be used for example for characterization of motor movement The System allows for measuring velocity in different units as can be chosen in Configuration gt Velocity option The value of velocity is sampled every 40ms Measurement Setup For velocity measurements linear optics should be used Necessary components are see also figures 6 1 to 6 4 Laser head Power supply Status Pro maschinenmesstechni 6 1 www statuspro com Linear interferometer IL1 Linear retro reflector RL1 Optional elements are USB cable Manual Strobe Magnetic holder UM1 Tripod stand Basis temperature sensor Air temperature sensor MEASUREMENTS VELOCITY Velocity measurements require optical elements IL1 and RL1 to be aligned along laser beam as shown on the figure 6 1 Either of the elements can be moved During velocity measurements the usage of the air temperature sensor is recommended Base temperature sensors do not have to be used FIG 6 1 OPTICAL PATH SET UP FOR VELOCITY MEASUREMENTS SCHEMATIC Velocity measurements can be performed not only along the laser beam as shown on figures 6 1 and 6 2 but also in directions 6 2 Status Pro www statuspro com MEASUREMENTS VELOCITY perpendicular to the laser beam These configurations are shown on figures 6 3 and 6 4 In those two configurations only the retro reflector RL1 can be moved FIG 6 2 OPTICAL P
76. ply connector on the back of the laser head The laser head can be also placed directly on the machine because of the strong magnets placed in the laser head base If the USB connection is to be used then the USB cable 10 should be connected to the male socket on the back panel of the Laser Head fig 3 21 The second end of the cable ought to be plugged into the USB socket of a PC computer For Bluetooth connection no more cables are necessary Through the Extension Connector it is possible to drive many peripherals directly from the laser head This give huge possibilities of customization of the usage of the laser interferometer e g in emulation of glass scales driving stepping motors dynamic measurements etc Standard connector pinout is described in Technical Data at the end of the instruction 3 Status Pro 3 14 www statuspro com aschinenmesstechni PREPARATIONS Power Button Power Connector Extension Connector FIG 3 21 CONNECTIONS OF THE pLINE F1 In the wireless versions of the pLINE F1 no sensor cables attachment is necessary Air and base temperature sensors are wireless They are maintenance free they do not require neither switching on nor charging They wake up after the power supply unit is switched on and go into power down mode when the supply unit is switched off Wireless Strobe is used to control the moment of measurement either by hand or automatically during dynamic positioning see
77. r Measurement System LSP30 3D Straightness Measurement method 3 D TES File Edit Measurement View Help Straightness plot window vertical axis 2011 02 14 Angular Ze 3 D B Pitch Yaw Point number Straightness plot window horizontal axis Point number Start Time2 Reset position Menu Points number 0 Measurement method 3 D Statistic calculation method End point fit method rt w w Lef 3 Ki ir e FIG 7 12 STRAIGHTNESS MEASUREMENT WINDOW When the measurements are to be started the button Start should be pressed and the object which straightness is investigated should be moved To finish the straightness measurements the button Stop should be pressed During measurements on the screen Status Pro maschinenmesstechnik 7 8 www stagtuspro com MEASUREMENTS PITCH YAW the straightness graph will be constantly updated By clicking on a part of the graph and moving the mouse rightwards the graph can be zoomed By clicking on a part of the graph and moving mouse leftwards the zoom is cancelled Straightness pull down menus Viewed graph can be printed or saved to a file This can be done by choosing from the upper menu File and then suitable a option i e Save Save as Print see figure 7 13 Edit View Help Open Ctrl O Save Ctrl S Save as Print Ctrl P Print preview Export Exit FIG 7 13 STRAIGHTNES
78. rdinate System x D e mm 3D Measurement G53 v Software table 00001 G94 G40 G98 G49 G53 G90 601 X0 F100 G04 P5000 G81 X 1 G04 P3000 X1 G04 P3000 v mi Preview Print Save Close FIG 5 7 CNC PATH GENERATION WINDOW Compensation table preparation Status Pro maschinenmesstechnik 5 7 www statuspro com MEASUREMENTS POSITIONING Compensation table preparation figure 5 8 is an option used after measurement finish before start it is not enabled From the end results the software calculates the errors and suggests the machine control the compensation values Because different machine controls require different format of compensation file thus in the compensation table preparation window the right data format has to be set together with options required in the chosen format Set data format Ex Compensation parameters Data format SIEMENS Measurement system Base point Axis System 0 0 0000 mm ax Tabela kompensacji 96 M AX1 EEC IMI METRIC n CHANDATA 1 JAA ENG COMP D 0 AX1 RO 0000 44 ENG COMP 0 1 AX1 R 0 0013 AA ENG COMP 0 2 AX1 R 0 0012 AA ENG COMP 0 3 AX1 R 0 0008 AA ENG COMP 0 4 AX1 R 0 0009 AA ENG COMP 0 5 AX1 R 0 0011 Preview Print Save Close FIG 5 8 COMPENSATION TABLE PREPARATION WINDOW Pull down menu Edit In the pull down menu option Edit fig 5 9 t
79. s one polarized leftward and the second rightward A 4 waveplate Status Pro 2 4 www statuspro com maschinenmesstechnik PRINCIPLES OF OPERATION changes circular polarization to linear The main difference between two described methods is that in the heterodyne one the beam frequency in reference arm differs from the beam frequency in the measuring arm A detection path is also different subtracting differential frequencies of reference and measuring arms does the measurement Reference reflector Two perpendicular linear polarizations Moving reflector Nonpolarizing f2 splitter Zeeman laser Polarizing splitter Two circular fs polarizations fi fi F fp X fp fp frequency resulting from the Doppler effect f5 f f fi F fp pean c B vertical polarization I Photodetectors horizontal polarization Reference path Counter Counter Measurement path Substractor FIG 2 3 THE BLOCK DIAGRAM OF AN INTERFEROMETER WORKING ACCORDING TO THE HETERODYNE METHOD Status Pro maschinenmesstechnik 2 5 www statuspro com PRINCIPLES OF OPERATION The heterodyne method gives correct results only when fo does not exceed the difference between the laser frequencies i e f2 fi In reality that difference resulting from the Zeeman effect is about 1MHz This limits the maximum available velocity of measuring arm in one direction to 0 3
80. s air but may be e g water An Edlen equation was presented showing how the refraction coefficient of the air changes with the change of the air temperature pressure and humidity The errors caused by the change of the wavelength are less important than the mentioned above but they cannot be abandoned Roughly a 1ppm error i e Status Pro inenmesstec 2 8 www statuspro com PRINCIPLES OF OPERATION 1um m is caused by the air temperature change of o 1K the air pressure change of 4hPa and the air humidity change of 30 Dead path error A dead path error is an error associated with the change in environmental parameters during a measurement This error occurs when some part of the light path a dead path is not included in the temperature both air and base pressure and humidity compensation The dead path of the light path is a distance between the optical interferometer and the base or the null point of the measuring position L on figure 2 4 Let the position of the interferometer and the retro reflector do not change When there is a change in the air temperature pressure or humidity than the wavelength changes on the whole path length L L2 The path length changes also when the temperature of the base changes But the correction system will use the correct wavelength only on the length L2 and will correct only this length The correction will not be made on a dead path L4 In this way the laser system w
81. s of options File Edit Measurement View Help In the option File figure 5 6 there can be found instructions for reading measured data from a file saving the data to a file printing measurements results or exporting them to a file File Edit Measurement View Help Open Ctrl 0 Save Ctrl S Save a5 Print Ctrl P Print preview Generate CNC path CNC compensation table Export Pos Harnas12345X dt Pos example dt2 Pos BFK130BFK130 XO dt2 UnionX 3 dt2 Exit FIG 5 6 POSITIONING PULL DOWN MENU FILE Other important options available in the File menu are options for generating CNC path and preparing compensation table CNC path generation Status Pro maschinenmesstechnik 5 6 www statuspro com MEASUREMENTS POSITIONING CNC path generation options allows automatic preparation by the uLINE F1 software the G code program compatible with most CNC steerings The options of the path generation are set in the separate window as shown on the figure 5 7 In the upper part of the window the machine movement parameters can be set In the lower part the generated program can be viewed end edited The results can be saved to a text file or previewed and printed i CNC path generation Sofware parameters Measurement method Axis Move speed Stop time linear H E v 100 mm min 3 0 e S Step Clerance Cycles number Points number 10 mm 1 E mm 2 5 E Base point E Unidirectional movement Coo
82. solution User defined from O Inm pulse to 5um pulse in 0 1nm pulse step Maximal signal frequency 100 MHz Laser head outputs Extension connector pinout D Hirose Connector LX40 20P CL No CL245 0017 0 IL 24V Supply Digital IO Reserved for future use Digital IO Reserved for future use Digital IO Reserved for future use Digital IO Reserved for future use Digital IO Reserved for future use Digital IO Reserved for future use Status Pro aschinenmesstechnik 2 itte 11 3 www statuspro com Digital IO Digital IO Digital IO Digital IO Analog Output Analog Output Analog Output TECHNICAL DATA Negative output of Differential B signal pair Digital AquadB Output Negative output of Differential Sign signal pair Shift Sign Output Negative output of Differential A signal pair Digital AquadB Output Negative output of Differential Module signal pair Shift Sign Output Positive output of Differential B signal pair Digital AquadB Output Positive output of Differential Sign signal pair Shift Sign Output Positive output of Differential A signal pair Digital AquadB Output Positive output of Differential Module signal pair Shift Sign Output Negative output of Differential Cosine signal pair Sine Cosine Output Negative output of Differential Sine signal pair Sine Cosine Output Positive output of Differential Cosine signal pair Sine Cosine Output Positive
83. squareness fit method Pitch Yaw None Point detection parameters Min points interval 100 a um Vibrations less than 20 um Point capture after 1 0 sek Default Apply Cancel FIG 7 14 STREIGHTNESS CONFIGURATION OPTIONS Reports Measured data can not only be saved but als o a measurement report can be generated either by pressing Print or Preview on the measurement analysis window fig 7 15 The report can be generated either in the basic form where only the plot of the measured values is shown fig 7 16 or the extended version in which also tables with measured data a present amp oec v 7 1 www staqtuspro com Status Pro maschinenmesstechnik MEASUREMENTS PITCH YAW Fir a System LSP30 3D St File Edit Measurement View Help Straightness plot window vertical axis 2011 02 14 3 D j No Xv um Xh um p 1 0 0 00 2 370 422 EE 3 424 425 g 4 50 6 433 5 340 13 6 375 97 7 78 1 50 2 A A AS A A D D SO SV A D D 8 89 3 70 3 123456 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 9 915 78 1 EE 10 994 69 1 Min 145 4 um Max 74 4 um Ds 219 8um 1 Zune a 12 1044 23 0 Straightness plot window horizontal axis 13 952 11 6 mil H I dEI PECNI MI HMM RHERHHH ERI HH IRIHR HH HRMHERI TEHPRM RFR H H RHA ME
84. stechnik MEASUREMENTS PITCH YAW Software description Pitch and Yaw errors can be measured in the Pitch Yaw option chosen from the Main Menu The uLINE F1 program window should look like it is shown on the Fig 9 5 The window consists of four main parts Display showing recent measured angle and measurement signal level Obtained results plotted on a graph Obtained results displayed in the measurement table Panel with buttons T Laser Measurement System LSP30 3D Straightness Measurement method Pitch Vaw eee Eile Edit Measurement View Help Straightness plot window 2011 02 13 Pitch Yaw No Xv asec Pitch Yaw Arcsec Point number Start Reset position Menu Points number 0 Measurement method Pitch Yaw Base length 100 mm N Gees v FIG 9 5 PITCH YAW MEASUREMENT WINDOW Er amp Status Pro aschinenmesstechni 9 5 www statuspro com MEASUREMENTS PITCH YAW Before starting the measurements the right point capture method from the Measurement menu should be chosen see figure 10 6 There are two methods available Time period point capture points are captured automatically after the time set on the panel with buttons Manual point capture points are captured after the user presses Point capture button on the panel with buttons or presses Manual Strobe button Messuremen View H
85. t The laser head must not be put near strong magnetic fields Status Pro 1 2 www statuspro com EE tec 1 3 INTRODUCTION The head should not be unscrewed from its base and if it is it may not be put on a heat sink e g thick metal plate The head must not be thrown or dropped Keep the optical components clean and avoid scratching them When the optics is dusted clean it with pure alcohol Do not use the system beyond its work conditions Status P www statuspro com rirenmess tec TO PRINCIPLES OF OPERATION 2 PRINCIPLES OF OPERATION The rules of laser displacement measurements Displacement measurements with the use of a laser interferometer allow obtaining the accuracy of an displacement measurements of 0 4 ppm in air and 0 02 ppm in vacuum The interferometer was first built by A A Michelson in 1881 The simplified schematic of the interferometer is shown on fig 2 1 Coherent light beam falls on a semi transparent mirror This mirror splits the light into two beams The first goes to the reference arm and reflects from the reflector Zu the second goes to the measurement arm and reflects form the reflector Z2 The reflected beams meet again on the detector Because these beams come from the same coherent source they will interfere When the moving reflector is being displaced the frequency of the reflected beam in the measurement arm changes The detector counts the frequency difference b
86. t button the type of measurement can be changed The right is used for choosing measuring axis At every change of measuring option ie distance speed angle straightness and or change of measuring axis i e X Y Z a drawing suggesting the arrangement of the optical elements appears on the screen Clicking with left mouse key in the area of the drawing invokes help on a theme of the optical arrangement alignment Panel Measurement can also contains an option Adjustment This option is very helpful in optical path alignment process see chapter 4 Status Pro mas hinenmess tec 3 25 www statuspro com PREPARATIONS Measurement Distance D Axis Y Le O Adjustment Laser head FIG 3 33 MEASUREMENT PANEL Panel Parameters figure 3 34 contains a few options Option Sign allows choosing whether enlarging distances between the retro reflector and the interferometer gives positive default or negative result on the display In the option Material one can choose the material from which a basis of a machine is made of The value of the thermal expandability coefficient of the basis is used for calculations of the real shift value i e measured value referred to the temperature of 20 C Option User makes it possible to enter any value of the thermal expandability coefficient In the panel Resolution one can change between high 10nm and low 100nm system resolution In higher resolution accepted movement vel
87. the machine In the manual mode press the Strobe button in the automatic mode observed the behavior of the software Stop the measurement Save the results and or print the measurement report G Status Pro aschinenmesstechni www statuspro com MEASUREMENTS VIBRATION 10 MEASUREMENTS VIBRATION General Description Vibration measurements are performed with the use of linear optics This measurement can be used for example for characterization of motor movement The laser measurement system uLINE F1 is capable of detecting machine vibrations in the frequency range from 0 to 500 Hz in Bluetooth mode and 0 to 50kHz in USB mode The sensitivity in USB mode is also much higher 100pm compared to 10nm in Bluetooth mode The System allows measuring velocity in different units in single shot and continuous mode The parameters of the measurement can be set in the Configuration Vibration option o status Fro MF masehinenmesstechoik 10 1 www statuspro com MEASUREMENTS VIBRATION Measurement Setup For velocity measurements linear optics should be used Necessary components are see also figures 10 1 to 10 4 Laser head Power supply Linear interferometer IL1 Linear retro reflector RL1 Optional elements are USB cable Manual Strobe Magnetic holder UM1 Tripod stand Basis temperature sensor Air temperature sensor Vibration measurements require optical elements IL1 and RL
88. tion by the Enter key After installation of the first time on the computer the application should not be run right away First the drivers should be allowed to find the laser measurement system To this end the system must be connected by a USB cable to your PC then wait until the system finds the device and Widnows matches for the drivers Znaleziono nowy sprz t x USB Serial Converter Fig 3 15 Message appearing after finding the new USB device Status Pro maschinenmesstechnik 3 9 www statuspro com PREPARATIONS J Znaleziono nowy sprz t LSP30 Fig 3 16 Message appearing after matching the driver with Liner HPI device To run the application see the Windows Start Menu Programs tab and then find the folder pLINE F1 assuming that the installation settings were not changed and run HLINE F1 Running applications can also be made from the desktop if this option was chosen during installation LSP30 30 Skr t IKB Fig 3 17 Icon of uLINE F1 application In order to uninstall the pLINE F1 application please choose Uninstall uLINE F1 from Menu Start Be Deinstalaga programu LSP30 3D lS Skr t HS IKB Fig 3 18 Icon of uLINE F1 deinstallation application Status Pro maschinenmesstechnik 3 10 www statuspro com PREPARATIONS Elements of the Laser System The number of elements of the system depends on desired types of measurements To the standard set
89. to two beams polarized vertically 90 and horizontally 0 The former is directed to the measurement arm and the latter to the reference one The frequency of the beam in the measurement arm changes with the movement of the moving reflector The polarization of the reflected beams is changed to circular with the use of a 4 4 waveplate After 0 and 45 polarizers two signals shifted in phase are obtained The phase shift is 90 when the measurement arm moves to and 90 when it moves from the laser 2 3 www statuspro com maschinenmesstechni PRINCIPLES OF OPERATION Reference reflector Two perpendicular linear polarizations Moving reflector Two mode laser Polarizing splitter lt gt fp frequency resulting from the Doppler effect fp 2fc B vertical polarization horizontal polarization sin COS 5 Photodetectors D gt polarization 45 gt polarization 45 Pulse counter FIG 2 2 THE BLOCK DIAGRAM OF AN INTERFEROMETER WORKING ACCORDING TO THE HOMODYNE METHOD Polarizer 0 L Polarizer 45 In the heterodyne method shown on figure 2 3 two laser frequencies are used Therefore a two frequency laser is needed e g a Zeeman laser A two mode laser is not suitable for the heterodyne method interferometer because the difference between f and f is usually too high for an electronic counter The output beam of a Zeeman laser consists of two circularly polarized beam
90. tomatic measurement Air temperature automatic measurement Material temperature automatic measurement Reference temperature 20 00 amp c FIG 3 36 CONFIGURATION WINDOW METEO PANEL Status Pro maschinenmesstechnik 3 29 www statuspro com PREPARATIONS Recording mode The long term changes of the length of machine axes under changes of temperature condition may give the information about thermal properties of the machine This kind of measurements called Recording mode may be chosen by pressing RECORD button on the Display screen This switches the system into the mode of the data recorder The time interval of the records could be programmed from the computer by setting a required value ep Record s Hour Minute Second Time interval D e 0 e E Start Stop Clear Ignore errors No Time Value H P T T1 T2 T3 1 22 54 05 18 0 32 20 05 20 08 20 05 2 22 54 06 164 32 20 05 20 08 20 05 3 22 54 07 244 32 20 05 20 08 20 05 4 22 54 08 30 1 32 20 05 20 08 20 05 5 22 54 09 359 32 20 05 20 08 20 05 6 22 54 10 41 5 32 20 05 20 08 20 05 7 22 54 11 420 32 20 05 20 08 20 05 8 22 54 12 47 7 32 20 05 20 08 20 05 3 225413 3707 32 2005 2008 2005 Save Close FIG 3 36 RECORDING DATA MODE WINDOW Status Pro maschinenmesstechnik 3 30 www statuspro com PREPARATIONS Pressing End Recording fin
91. tor on the display shows around 10095 10 Now the straightness measurements as described in Chapter 7 can be made Optical path alignment in the axes 5 and 7 During flatness measurements in the axes 5 and 7 two beam directing mirrors ZK1 are used The way of using them is shown on Figure 8 8 maschinenmesstechni 8 9 www stagtuspro com MEASUREMENTS FLATNESS FIG 8 8 THE SET OF THE OPTICAL COMPONENTS USED IN STRAIGHTNESS MEASUREMENTS IN THE AXES 5 AND 7 1 The diaphragm on the laser head set to the Alignment position 2 The first beam directing mirror ZK1 set 45 to the laser beam coming out from the head The position of the laser head should be regulated in a way that the beam reflected from the first mirror runs parallel to the axis 3 and falls G Status Pro maschinenmesstechnik 8 10 www staqtuspro com 8 11 MEASUREMENTS FLATNESS on the second beam directing mirror The second mirror is set 45 to the first one Changing the position and the angle of the second mirror direct the reflected beam along the axes 5 or 7 in a way the beam is parallel to the axis Place the angle interferometer in magnetic holder of the second mirror and set it in the optical path Set the diaphragm on the angle interferometer to the Alignment position Change the position of the head so that the beam falls in the middle of upper interferometer s diaphragm Set the
92. tus Pro maschinenmesstechnik 3 19 www statuspro com PREPARATIONS Button Display opens the window with basic control of the laser operation It is described in details later in this Chapter Button Configuration opens configuration window Pressing Exit button closes the application Other buttons open measurement screens All options are described in details in following Chapters Because of abundance of measurement types offered by the uLINE F1 some of the options are not visible and can be reached by using the buttons with arrows in the second row Connection problems troubleshooting If the program is started before the Power Supply is turned on or the Power Supply is not connected properly to the computer on the monitor an error window will appear fig 3 4 To get rid of this error quit the program check the connection and or the supply of the Interferometer the POWER diode should be on If the interferometer is not connected to the computer an error window with Could not open COM port Check COM port settings line will appear Please check the connection between the computer and the power supply and choose Configuration option from the main menu Status Pro 3 20 www statuspro com aschinenmesstechni PREPARATIONS Error 10 Ex Connection error Check if system is powered on and connected to PC computer FIG 3 28 ERROR THAT MAY OCCUR DURING SOFTWARE LOADING In the opti
93. uired Fig 3 5 Program destination folder window a The folder C Program Files LSP30 3D does not exist Would you like the folder to be created Fig 3 6 Window appearing when the folder name does not exsist in the system Status Pro maschinenmesstechnik 3 5 www statuspro com 3 6 PREPARATIONS Select Start Menu Folder where should Setup place the program s shortcuts e Setup will create the program s shortcuts in the Following Start Menu Folder To continue click Next IF you would like to select a different Folder click Browse Browse Fig 3 7 Menu Start name choice window 15 Setup LSP30 3D eJ Si Es Select Additional Tasks by Which additional tasks should be performed Q Select the additional tasks you would like Setup to perform while installing LSP30 3D then click Next Additional icons m rente p re cit Fig 3 8 Desktop icon setup window Status Pro maschinenmesstechnik www statuspro com PREPARATIONS 15 Setup LSP30 3D te Es Ready to Install E Setup is now ready to begin installing LSP30 3D on your computer Q Click Install to continue with the installation or click Back if you want to review or change any settings User information lasertex HP Destination location C Program Files LSP30 3D m Start Menu folder LSP30 3D Additional tasks Additional icons Cre
94. used The way of using it is shown on Figure 8 7 f Status Pro maschinenmesstec 8 7 www stagtuspro com MEASUREMENTS FLATNESS FIG 8 7 THE SET OF THE OPTICAL COMPONENTS USED IN STRAIGHTNESS MEASUREMENTS IN THE AXES 3 6 AND 8 1 The diaphragm on the laser head set to the Alignment position 2 The beam directing mirror ZK1 set 45 to the laser beam coming out from the head 3 Place the angle interferometer IK1 in the measured axis 4 Set the diaphragm on the angle interferometer to the Alignment position 5 Change the position of the head so that the beam falls in the middle of upper interferometer s diaphragm Status Pro maschinenmesstechnik 8 8 www stagtuspro com MEASUREMENTS FLATNESS 6 Set the diaphragm on the angle retro reflector to the Alignment position 7 Moving the retro reflector along the axis change the position of the head so that the beam passing through the interferometer falls also in the middle of the retro reflector s diaphragm 8 After changing the positions of the diaphragms on the interferometer and on the retro reflector to Working positions check if the return beam falls in the middle of measuring opening in the head Do the check moving the retro reflector along the axis Corrections if needed can be made both changing the head or the interferometer position 9 Set the diaphragm on the laser head to Working position and check if the level indica
95. wo plots upper showing gathered distance velocity or acceleration data lower the Fourier Transformation FFT of the upper plot Options of measurements Panel with buttons T Laser Measurement System LSP30 3D Main Menu File Edit View Help FFT plot window time axis 2011 02 12 Point number Display Distance Velocity Acceleration Measurement Type Single Continuos 4s 3 H A 7 Log scale X axis Log scale Y axis Frequency Hz DC value Start Menu Points number 0 4096 Single measurement a or ur Ki FIG 10 5 VIBRATION MEASUREMENT WINDOW 10 5 www statuspro com CG Status Pro as chinenmesstechni MEASUREMENTS VIBRATION Before starting the measurements the options in the right panel should be set according to requirements When the measurements are to be started the button Start should be pressed When Continuous option is checked then the measurement has to be finished by pressing the Stop button During measurements on the screen the graphs will be constantly updated When both the measurement and the transmission are done the measurement results are presented on the time diagram and its FFT analysis on the frequency diagram fig 10 8 The results can be saved printed or exported menu File With the use of radio buttons the type of input data may be chosen i e whether amplitude of Distance Velocity or Acceleration
96. xes is necessary From obtained data a flatness map is drown fig 8 1 Measurement Setup For flatness measurements the angular optics plus additional mirrors should be used Necessary components are Laser head Power supply Angular interferometer IK1 Angular retro reflector RK1 Two Beam Benders BB2 see figure 8 2 8 1 www staqtuspro com 5555 memmessteenami MEASUREMENTS FLATNESS FIG 8 1 AN EXEMPLARY SURFACE FLATNESS MAP Optional elements are 8 2 USB cable Manual Strobe Magnetic holder UM1 Tripod stand Air temperature sensor Base temperature sensor www staqtuspro com G oec ka Status Pro maschinenmesstechnik MEASUREMENTS FLATNESS FIG 8 2 THE ELEMENT SET FOR THE FLATNESS MEASUREMENTS IK1 RK1 ON P100 BASE AND BB2 Flatness measurements require during measurements of first axis that optical elements IK1 and RK1 are aligned along laser beam as shown on the figure 8 3 Element IK1 is stationary and element RK1 is moved Other axes are measured with the use of one or two beam benders like shown on the figure 8 4 IK1 RK1 mmm mmm ELLE mmm Hr mees SER HEA FIG 8 3 OPTICAL PATH SET UP FOR FLATNESS MEASUREMENTS SCHEMATIC Status Pro nmess tec 8 3 www stagtuspro com MEASUREMENTS FLATNESS During flatness measurements the usage of the SMI Environmental Compens
97. y of significant digits on display may be changed with the use of buttons T l pressing button with an inscription Change changes measurement unit on the display In the upper left corner there is an icon making link to Microsoft Excel if installed Running this link allows to register measurement in Excel cells by each STROBE button press Measurement signal level FIG 3 31 PANEL WITH MAIN DISPLAY Panel Environment figure 3 32 where measured data obtained from the Environmental Compensation Unit ECU are shown On the screen there are shown temperature pressure and humidity of the atmosphere Humidity Pressure and Air Temp and temperatures measured by three base temperature sensors Average temp T1 T2 and T3 Average temperature of the base measured by three sensors is also presented There two types of this 3 24 www statuspro com PREPARATIONS panel in dependence on the uLINE Fl version There is different panel for Wireless and Wired version The main difference in Wireless version is the presence of battery and signal strength monitors for each sensor WiMeteo data Meteo data Pressure 10132 c 7 Humidity gt N 200 S Pressure 10132 8 EE Air temp 2000 amp AT Ti T2 T3 4 Mean temp EE cm Ce T1 TA T3 aE al all eil 2 FIG 3 32 ENVIRONEMNTAL PANELS WIRELESS LEFT WIRED RIGHT Panel Measurement figure 3 33 contains basic information about conducted measurement With the lef

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