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1. Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on page 18 3 Use a 3 mm Allen key to remove the four screws holding the valve to be changed 4 Lift out the old valve A Assemble 1 Install new valve 2 Tighten the screws 2 3 mm 0 08 0 12 in at a time moving the key from screw to screw so that the valve doesn t tilt much 3 Tighten the screws and replace the cover 4 Run through the hardware test again to test that the changed removed valve s perform as required 5 Use hand probe to check that there is no external leakage this part of Hardware Test is routine 24 nipa63e1 a 1410 nipa63e1 a 1410 INFICON 6 Reinstall the cover 49 Changing Pilot Valves Part Part No Qty Consumables Valve ramp 591 565 1 Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on page 18 3 Use small screw driver to loosen the screw holding the valve A You must back the screw all the way out until you feel it jumping in the thread entrance 4 Push down on the LEDs while pressing the screw down until you feel the locking mechanism snap 5 Lift the old valve A out from the coil side If the valve does not come off repeat steps 3 and 4 making sure the screw is completely backed out Assemble 1 Push the screw in while inserting the new valve Insert the end facing the screw first and then p2. 4 7 Changing Venturi Pump Part Part No Qty Consumables Valve block P510 included 599 023 1 2 0800000 Disassemble oa WA N 7 Unplug power supply Open the cover see Open the Cover on page 18 Remove the exhaust hose from the barbed hose fitting Unscrew and remove the barbed hose fitting and the plastic washer Use a 4 mm Allen key to remove the four screws holding the Venturi pump A Remove the o ring under the Venturi pump A Remove the hose from Venturi inlet Push hose into connector and press orange ring down to release hose then pull hose out Remove the hose fitting from the Venturi pump A Assemble 1 a ND Install new Venturi or use compressed air jet and a cotton bud pipe cleaner or small brush to clean the nozzles inside the Venturi Replace hose fitting on Venturi inlet Reconnect inlet hose Clean o ring and install in groove on valve manifold Reinstall and tighten the four screws Put plastic washer inside Venturi outlet and reinstall barbed fitting Tighten with spanner Reconnect the exhaust hose 23 6 8 Run through the hardware test again to test that Venturi delivers adequate max vacuum 9 Reinstall the cover 48 Changing Gas Valves Part Part No Qty Consumables Valve block P510 included 599 023 1
3. I EN MO KA 14 na 10 0 nipa63e1 a 1410 nipa63e1 a 1410 Description Part No Description Part No 1 Power supply ILS500 591 575 32 Torx screw M5x10 fzb 591 954 2 PLC FX3UC 591 718 33 Phillips screw M3x8 fzb 591 483 4 A D CONVERTER BOARD 591 572 48 Cover plate 591 579 5 Valve ramp 591 565 51 Nut M6 591 586 6 Power inlet 591 576 52 Lock washer M6 591 587 7 DIN rail 35 mm l 0 25m 591 580 53 Lock washer 5 591 609 8 Fuse holder 591 577 54 Lock washer M4 591 776 9 Hex nut M6M M4 2 591 019 55 Front stand 591 573 10 Washer BRB 5 3x10x1 A2 591 108 56 Back stand 591 574 11 WEW 35 2 591 434 58 Contact for HMI PLC 591 614 14 HMI Panel 599 027 59 CA51 Operating panel cable 591 544 16 Weld box ILS500 599 025 61 6453 Pilot valve cable 591 546 17 Valve block P510 599 023 63 CAB55PLC I O cable 591 548 18 Torx M4x8 fzb 591 260 64 0456 PLC AIN cable 591 549 19 Pneumatical label 1 ILS500 598 073 65 CA57 PLC RS422 cable 591 550 20 Pneumatical label 2 115500 598 074
4. Burdoyun zo 185 5 9 NODIINI L jo 1995 C8SSL SWIL 72 50 5104 va dounv ev ens sojqeo 9 abed 0002 4 YIM OOSSTI ubisoq ubisapwoy TETSY Ild 2VD 0292 IQAbT DVAODEZ 1972 54013 03 pue NVIN 1824 0055 71 8672 59961491 1 5 JOU SUOD3UU0d 24 35780 3580 1824 0154 0055 TI udg 015 DNITOOL qis TOYLNOD uid 015 Snivis utd 015 PPM L34VS uds 015 INILdO uds 015 TNILdO JINYIHLI wesa Wega HMdI1d LYILNIYd 1013 IWH wszaa NYN LAVT3Y3 PSJUNOLI jou sJOPSUUO 64 1383 42 INFICON F 32018 JAVA LR x ID VAL 0171 e Leggediu 1HOd NOILdO INTIVA ONITOOL JAVA ONMOOL CAAA ONMOOL 3ATVA ONMOOL 43 INFICON AB Westmansgatan 49 S 58216 Link ping Sweden reach sweden inficon com UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM HONG KONG Visit our website f
5. Unplug power supply Open the cover see Open the Cover on page 18 Remove both side covers Carefully lift out the display panel Use a Torx to remove the four screws holding the display A 0 5 Q DY Remove the old display A Assemble 1 Install new display 2 Reinstall and tighten the screws holding the display 3 Reinstall and tighten the screws holding the panel 4 Reinstall the cover Use a Torx screwdriver to remove the fours screws holding the display panel 28 nipa63e1 a 1410 nipa63e1 a 1410 INFICON For information about how to replace lamps and buttons in the display panel please contact INFICON 4 13 Changing ISH2000 Part Part No Qty Consumables Sensistor ISH2000P 599 073 1 Disassemble Unplug power supply Open the cover see Open the Cover on page 18 Remove both side covers Use a Torx screwdriver to remove the four screws holding the ISH2000 A Carefully lift out the ISH2000 A Loosen all cables attached to the ISH2000 A Remove old ISH2000 A oO F Q DO a 29 ET INFICON Assemble 1 Install new ISH2000 2 Reinstall all cables 3 Reinstall and tighten the screws 4 Reinstall the cover 4 14 Changing Panel Cover ILS500 F Model Part Part No Qty Consumables Panel cover ILS500 F 598 069 1 Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on page 18 3 Remove b
6. 66 KB1022 Printer Cable 591 777 21 Electrical label ILS500 598 075 67 CA59 PLC power cable 591 552 22 ILS500 label 598 076 68 CA60 Power cable 1 591 553 23 Nipple Straight outer 01 591 561 69 CA61 Power cable 2 591 554 24 Pneumatic coupling straight 4 4 591 567 71 CA64 Pressure gauge cable 591 571 25 Fuse 2AT 591 578 75 och software ILS500 591 845 26 Torx screw M4x6 591 581 76 Torx screw MC6S 5X25 FZB 591 289 27 Torx screw M4x12 591 298 77 Panelcover ILS500 F 598 069 28 Torx screw M4x20 591 583 78 Torx screw M5x60 591 610 30 Plastic washer M4 4 3x9x0 8 PA 591 584 79 Plug 12 mm 591 976 31 115500 electronic board 591 603 This spare part comprises several parts for details see Component Details on page 12 11 6 2 2 1 Component Details Part No Description HMI Panel Pos e Leggediu 599 027 599 073 599 025 599 023 Sensistor ISH2000P Weld box ILS500 Valve block P510 1 2 3 4 12 nipa63e1 a 1410 2 3 Interior View ILS500 EEG 0 OOS Venturi Pump Ejector Evacuation Valve Tracer Gas Fill Valve Te
7. 8 Fuse holder 591 577 54 Lock washer M4 591 776 9 Hexnut M6M M4 A2 591 019 55 Front stand 591 573 10 Washer BRB 5 3x10x1 A2 591 108 56 Back stand 591 574 11 WEW 35 2 591 434 58 Contact for HMI PLC 591 614 14 HMI Panel 599 027 59 51 operating panel cable 591 544 15 Sensistor ISH2000P 599 073 60 CA52 ISH2000 RS232 cable 591 545 16 Weld box ILS500 599 025 61 CA53 pilot valve cable 591 546 17 Valve block P510 599 023 63 CA55 PLC I O cable 591 548 18 Torx M4x8 fzb 591 260 64 0156 PLC AIN cable 591 549 19 Pneumatical label 1 ILS500 598 073 65 CA57 PLC RS422 cable 591 550 20 Pneumatical label 2 115500 598 074 66 KB1022 printer cable 591 777 21 Electrical label ILS500 598 075 67 CA59 PLC power cable 591 552 22 ILS500 label 598 076 68 CA60 power cable 1 591 553 23 Nipple straight outer g1 591 561 69 CA61 power cable 2 591 554 24 Pneumatic coupling straight 4 4 591 567 71 CA64 pressure gauge cable 591 571 25 Fuse2AT 591 578 72 CA73 Rear probe cable 591 955 26 Torx screw M4x6 591 581 73 1 ISH2000 power cable 591 956 27 Torx screw M4x12 591 298 74 72 ISH2000 APC cable 591 957 28 Torx screw M4x20 591 583 75 and software 115500 591 845 30 Plastic washer 4 3x9x0 8 591 584 76 Torx MC6S 5X25 FZB 591 289 31 115500 electronic board 591 603 This spare part comprises several parts for details see Component Details on page 12 T INFICON 500 F loded View ILS Exp 2 2 7
8. No signal to Check Evac Valve Evacuation pilot valve output For more help please contact INFICON Test Port 2 Valve Function No signal to pilot Check Test Port 2 valve output For more help please contact INFICON Tracer Gas Fill Valve Function No signal to pilot Check Fill Valve valve output For more help please contact INFICON Evacuation Valve Function No signal to Check Evac Valve Evacuation pilot output valve For more help please contact INFICON Lamp Function No signal from PLC Check PLC output For more help please contact INFICON Tooling Valves Function No signal from PLC Check PLC output For more help please contact INFICON 15 6 4 Service Instructions During service at the Service Center all devices must be handled exclusively in an ESD Protected Area EPA Devices must be transported from one EPA to another only in ESD shielding packages On Customers site during exchange or maintenance of electronic card the service personnel must wear a ESD coat and use disposable wristband 16 nipa63e1 a 1410 nipa63e1 a 1410 INFICON 4 1 Safety Equipment Tools and Consumables When performing service of the ILS500 the following equipment may be needed 577 Pos Description Comment 1 Allen Keys hexagonal 3 and 4 mm 2 Torx K
9. SERVICE MANUAL nipa63e1 a 1410 Type no ILS 210 306 Sensistor ILS500 Leak Detection System Sensistor ILS500 F Tracer Gas Filler 6 INFICON nipa63e1 a 1410 Content 2 1 2 3 Safety During Service General Information About This Document Versions Components Exploded View ILS500 Exploded View ILS500 F Interior View ILS500 Troubleshooting Service Instructions Safety Equipment Tools and Consumables Open the Cover Changing Fuses Changing Power Supply Changing Main PCB Changing Pressure or Vacuum Sensor Changing Venturi Pump Changing Gas Valves Changing Pilot Valves Changing Valve Block Changing PLC and AD Module Changing Display Changing ISH2000 Changing Panel Cover ILS500 F Model Functional Verification Software Update Update the Software Reset to Factory Configuration Parameters Supported USB Memories Drawings 6 INFICON 0171 9 nipa63e1 a 1410 Safety During Service Definitions of Warning Caution and Notice Indicates procedures that must be strictly observed to prevent hazards to persons Indicates procedures that must strictly be observed to prevent damage to or destruction of the instrument Notice Indicates special requirements the user must comply with Safety Instructions Failure to observe the foll
10. ck Sensor Voltage Error Gas sensor damaged Replace probe or sensor Detector Error Error Driver name Active Probe error Consult Active Probe Manual Hardware Error Vacuum Sensor Error No power to vacuum sensor Check cable to sensor Sensor not connected to AD Check connection to AD Damaged vacuum sensor Send in for repair Hardware Error Pressure Sensor Error No power to pressure sensor Check cable to sensor Sensor not connected to AD Check connection to AD Damaged pressure sensor Replace sensor Analog Inputs Power Off No power to AD module Check power cable on left side of AD module Emergency Stop Activated Emergency Stop not Reset Pull out emergency Stop Button to reset ISH2000 Comm Error ISH2000 printer mode turned off manually Restart system ISH2000 serial cable disconnected Connect cable internal or external Error message on ISH2000 display Contact your supplier if the suggested action does not clear the error 40 nipa63e1 a 1410 nipa63e1 a 1410 5 Software Update 5 1 Update the Software 1 2 I 9 Turn the ILS500 on When the hourglass symbol disappears press a finger on the screen and hold until the screen turns gray and following message appears Tap anywhere on screen or touch calibrate will start
11. e valve Possible results No Internal Leakage 34 nipa63e1 a 1410 nipa63e1 a 1410 Internal Leakage Internal leakage can result in Erroneous pressure decay results False vacuum decay rejects increased gas consumption Test Port 2 Valve Hardware Test Test Port 2 Valve Valve works Vacuum _0 00 bar Pressurel 0 00 bar C CONTINUE e STOP e Report This test will fail if both test ports are connected to a test object Proceed and then repeat the entire hardware test sequence with both ports plugged to perform this test step This step tests Test Port 2 valve for internal leakage by registering pressure rise behind the valve Possible results No Internal Leakage Internal Leakage Internal leakage can result in False blockage test accepts Tracer Gas Fill Valve Hardware Test Tracer Gas Fill Valve Valve works Vacuum bar Pressure bar continue stop Report This step tests that tracer gas fill valve opens to fill gas Test will fail if tracer gas feed pressure is too low If this is the case adjust pressure and restart hardware test from beginning 35 g INFICON Possible results Valve works Faulty Malfunction will result in Failed gas filling External Gas Leaks Hardware Test Check for Leaks with Hand Probe Vacuum L 0 00 bar Pressure bar CONTINUE STOP e Repo
12. eased tracer gas consumption Venturi Pump Hardware Test Venturi Pump Max Vacuum OK Vacuum bar Pressure bar continue Qo Report Checking max vacuum of Venturi pump Possible results Max Vacuum Poor Max Vacuum Poor max vacuum can result in Failed pre evacuation e Slower evacuation Manifold Tightness gross Hardware Test Manifold Tightness No Leakage from Outside Vacuum bar Pressure ood bar continue stop O Report The overall tightness of the manifold is tested using the vacuum raise method Possible results No Leakage from Outside Leakage from Outside 33 6 The step tests the gas fill valve for internal leakage by registering pressure rise behind Leaks in the manifold can result in False vacuum decay rejects Increased gas consumption Minor external leakage will be found later during the gas test step Vacuum Sensor Valve Hardware Test Vacuum Sensor Valve Valve works Vacuum bar Pressure bar continue stop Report This checks that the valve shuts to protect vacuum sensor before filling Possible results e Valve works Faulty Malfunction can result in Damage to vacuum sensor Failed pre evacuation Tracer Gas Fill Valve Hardware Test Tracer Gas Fill Valve No Internal Leakage Vacuum bar Pressure bar continue stop Report th
13. ey T20 and T25 3 Screwdriver Philips 1 or Pozidriv 1 4 Protective Eyewear When performing tooling output test 5 Protective Ear Plugs When performing tooling output test 6 Tracer Gas 7 Compressed Air 10 bar 8 Loctite 2400 9 Loctite 577 17 42 Open the Cover Disassemble 1 Unplug power supply 2 Use T25 key to remove the two screws holding the cover 3 Slide the cover back and lift it off Rock the rear end of the cover up and down a few times to loosen Assemble 1 Reinstall the cover A 2 Reinstall and tighten the screws 18 nipa63e1 a 1410 nipa63e1 a 1410 g INFICON 4 3 Changing Fuses Part Part No Consumables Fuse 2A slow for 591 578 2 Sensistor 15 2000 d 2 p N 2 m 7 7 7 coms may me amwr 7 Disassemble 1 Unplug power supply 2 Remove the lid A containing the fuses 3 Remove the fuses Assemble 1 Install new fuses 2 Reinstall the lid A containing the fuses 19 6 44 Changing Power Supply Part No Consumables Power supply 591 575 1 Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on page 18 3 Unplug power supply 4 Loosen all cables on the power supply A 5 Remove the p
14. he text 11 About This Document This document is only intended for INFICON service personnel working with the ILS500 Leak Detection System 1 1 1 Document History Revision Date Remark a 10 2014 First edition 1 2 Versions This manual applies to the product versions below Unit Name Software version Leak Detector ISH2000 6 or higher Tracer Gas Filler ILS500 3 or higher Probe P50 2 or higher For more information about the latest software versions please contact your local INFICON office N 6 2 Components 2 1 Exploded View ILS500 nipa63e1 a 1410 1 1410 Description Part No Description Part No 1 Power supply ILS500 591 575 32 Torx screw 5 10 fzb 591 954 2 PLCFXS3UC 591 718 33 Phillips screw M3x8 fzb 591 483 4 A D CONVERTER BOARD 591 572 48 Cover plate 591 579 5 Valve ramp 591 565 51 Nut M6 591 586 6 Power inlet 591 576 52 Lock washer M6 591 587 7 DIN rail 35 mm l 0 50m 591 580 53 Lock washer M5 591 609
15. in 10 seconds Lift the finger and press once again to enter the service menu Click Erase Project then click Yes to delete the project Turn the ILS500 off Insert the USB memory with the new Software Turn the ILS500 on Wait for the Update project window Click Yes to copy project from USB memory The new updates will now be running this may take a while The ILS500 will automatically restart once the new software is loaded into the instrument Wait for the Project transfer window Click Yes to download PLC program 10Choose the program you want to run and click Yes 11 Update is completed and the ILS500 will start as usual Notice If the update fails repeat this procedure 5 2 Reset Factory Configuration Parameters system reset After updating the software 15500 INFICON recommends to do a 1 Click Menu gt gt Advanced Settings gt gt Service Menu gt gt System Reset 2 Click Yes to reset the ILS500 to factory default 5 8 Supported USB Memories The ILS500 supports USB 2 0 full speed 12 Mbps and is backwards compatible with USB 1 1 USB memories must be USB mass storage device class compatible and have a maximum power consumption of 200 mA when no external field buss module is mounted 41 ET INFICON wings Dra 6 0191 e Leggediu 8 4 39049532014 0002 51 0055 Tureberpporqio00ZHSI 00SS TISINVUNBIVD
16. of your specific application 31 6 INFICON Setup all parameters for vour test object or load desired recipe and connect a leak free sample 2 Set test selection switch to ILS500 Object for application specific hardware test You can also test the ILS500 against factory specification In this case you should plug both test ports using the plugs delivered with the units 3 Remove ISO to NPT converters if installed Set test selection switch to ILS500 plugged for factory specified hardware test 4 The Continue button will be displayed at the end of each test step Press Continue for next test step Pressure and Vacuum Sensors Hardware Test Pressure and Vacuum Sensors Zero Points are OK Vacuum bar Pressure ood bar continue stop Zero points of pressure vacuum sensors are tested Possible results Zero Points are OK e Vacuum Zero Point OK Offset zero point can result in Incorrect gas filling Erroneous vacuum or pressure decay results Evacuation Valve Hardware Test Evacuation Valve No Internal Leakage Vacuum bar Pressure bar continue stor Report Evacuation valve is checked for internal leakage Possible results 32 nipa63e1 a 1410 nipa63e1 a 1410 No Internal Leakage e Internal Leakage Internal leakage can result in False vacuum decay rejects Incr
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18. oth side covers 4 Use a Torx screwdriver to remove the two screws holding the Panel Cover A 5 Lift out the Panel Cover A 30 nipa63e1 a 1410 nipa63e1 a 1410 6 Remove old Panel Cover Assemble 1 Install new Panel Cover 2 Reinstall and tighten the screws 3 Reinstall the cover 4 15 Functional Verification 4 15 1 Perform Hardware Test Before performing the hardware test carefully check that your tracer gas and compressed air feed pressures are correct Wrongly set pressure can cause erroneous test results Hardware Test Press TEST 5500 plugged Vacuum bar 5500 Object Pressure bar stor Report For troubleshooting and testing of the system use Service menu For remote troubleshooting use Service Run menu e Venturi Pump and all Gas Valves can be tested automatically The hardware test is a diagnostic tool helping you in preventive maintenance as well as service and repair The test takes you through a number of steps testing all units that are subject to wear and should thereby help you to find almost any problem in the ILS500 system Run through the whole sequence to interpret the results correctly You will need the reference table at the end of this section to help you interpret the test results correctly Keep this manual at hand when performing the test You can choose to test according to the limits
19. ower supply A by loosen the two screws in the bottom Assemble 1 Install new power supply 2 Reinstall and tighten the screws 3 Reinstall all cables 4 Reinstall the cover 20 nipa63e1 a 1410 nipa63e1 a 1410 4 5 Changing Main PCB Part Part No Qty Consumables Electronic board 591 603 1 Disassemble Unplug power supply Open the cover see Open the Cover on page 18 Unplug power supply Loosen all cables on the power supply Remove the power supply by loosen the two screws in the bottom Loosen all cables attached to the main PCB A 0 c Remove the six screws holding the main PCB Assemble Install new PCB and tighten the screws 2 Reinstall all cables attached to the main PCB 3 Reinstall the screws holding the power supply 4 Reinstall all cables attached to the power supply 5 Reinstall the cover 21 6 4 6 Changing Pressure Vacuum Sensor Part Part No Qty Valve block P510 included 599 023 1 Consumables Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on page 18 3 Unplug power supply 4 Loosen the cable from the contact 5 Remove the Sensor contact using a wrench Assemble 1 Install the new Sensor contact 2 Reinstall the cable 3 Reinstall the cover 22 nipa63e1 a 1410 nipa63e1 a 1410
20. owing precautions could result in serious personal injury Pay attention to the Warnings Cautions and Notices in the User Manual for the product before operation The ILS500 must never be introduced to pressures higher than that approved for the object to be tested and never beyond the ILS500 specification Failure to observe the following precautions could result in damage to the equipment During service at the Service Center all devices must be handled exclusively in an ESD Protected Area EPA Devices must be transported from one EPA to another only in ESD shielding packages 6 On Customers site during exchange or maintenance of electronic the service personnel must wear a ESD coat and use disposable wristband Risk assessment is the sole duty of the person handling the ILS500 Check that all relevant legislation and safety standards are complied with before putting ILS500 into service nipa63e1 a 1410 nipa63e1 a 1410 INFICON 1 General Information The Sensistor ILS500 is an all in one tracer gas leak detection system with all necessary functions integrated in one very compact housing The Sensistor ILS500 F is a tracer gas filler Please read this Service Manual carefully before performing service on the ILS500 When reading please pay particular attention to the WARNINGS CAUTIONS and NOTICES found throughout t
21. r amp CONTINUE STOP e Report Hardware Test Green Lamp Top Left OK Vacuum L 0 04 bar Pressure 000 bar CONTINUE STOP Report Hardware Test Red Lamp Bottom Left OK Vacuum o od bar Pressure 0 04 bar e CONTINUE e STOP B Report This is a manual test The ILS500 lights up one lamp at the time Simply check that the right lamp comes on 1 Check function of each lamp by pressing Continue 2 Remember to check lamps on both touch panel and external control panel if installed 38 nipa63e1 a 1410 nipa63e1 a 1410 START and STOP buttons Hardware Test Press Start Button Top Right OK Vacuum o od bar 0 od bar stor Report Hardware Test Press Stop Button Bottom Right OK adal bar aad bar STOP Report This is a manual test The test continues when the correct button is pressed The test checks the activated START and STOP buttons only Use INPUT menu under Service menu to check buttons that are turned off 39 6 INFICON 4 16 Hardware Error Messages Error Message Detector Power Off Detector Error Check Probe and Cable Reason for Error No power to the Leak Detector Corrective Action Check the power cable to the detector internal or external Probe cable disconnected Connect cable Detector Error Che
22. rt The ILS500 is now prepared for a manual test for external leakage Use the hand probe to check for leakage 1 Start by checking all connections between the ILS500 and your test object Follow each test line carefully and check every joint 2 Proceed to check around the gas valves and manifold inside the ILS500 Manifold Tightness gross Hardware Test Manifold Tightness Internal Leakage Vacuum bar Pressure bar continue e Report The overall tightness of the manifold is tested using the pressure decay method This is a complement to the gas test revealing leakage out through the exhaust etc Possible results No Internal Leakage Internal Leakage Internal leakage can result in False pressure and vacuum decay rejects Increased tracer gas consumption 36 nipa63e1 a 1410 nipa63e1 a 1410 Evacuation Valve Hardware Test Evacuation Valve Valve works Vacuum 0 00 bar Pressure L bar continue stop Report This step tests that evacuation valve opens to release tracer gas to exhaust Same test as previously but under pressure instead of vacuum Possible results Valve works Faulty Malfunction will result in Failure to terminate test cycle 37 6 Indicator Lamps Hardware Test Lamp in Start Button OK Vacuum 000 bar Pressure ba
23. st Port Valve 2 Vacuum Sensor Control Valve Pressure Sensor HP model only Vacuum Sensor Pressure Sensor Pilot Valve 6 Pilot Valve 1 Pilot Valve Ramp Position Valve 5A 6A Main Air Valve 5B 6B Venturi Pump Supply 4A Evacuation Valve 4B Tracer Gas Fill Valve 3A Test Port 2 Valve 3B Sensor Protection Valve 2A Tooling Valve 1 2B Tooling Valve 2 1A Tooling Valve 3 1B Tooling Valve 4 13 6 INFICON Main PCB PLC AD Module Fuse holder Power Supply USB nipa63e1 a 1410 nipa63e1 a 1410 3 Troubleshooting Tested Unit Vacuum and Pressure Sensors Tested Feature Zero point Reason for Error Broken disconnected cable Action Check cable of sensors Wrong set A D parameters Check and adjust Analog Input settings Replace sensor if m value needs more than 2096 change Broken vacuum or pressure sensor Replace sensor Venturi Pump Maximum vacuum No signal to Venturi Check Venturi pilot valve Pump output For more help please contact INFICON
24. ush the coil side down 2 Tighten the screw 3 Reinstall the cover 25 6 4 10 Changing Valve Block Part Part No Qty Consumables Valve block P510 included 599 023 1 Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on page 18 3 Use a Torx screwdriver to loosen the three screws on the back 4 Loosen the Pilot Valve cable Vacuum Sensor cable and the Pressure Sensor cable from the Valve Block A 5 Lift the Valve Block A out and clean it from contamination Assemble 1 Install the new Valve Block 2 Reinstall all cables 3 Reinstall and tighten the screws 4 Reinstall the cover 26 nipa63e1 a 1410 nipa63e1 a 1410 INFICON 4 11 Changing PLC and AD Module Part Part No Qty Consumables PLC FX3UC 591 718 1 A D CONVERTER 591 572 1 BOARD Z i 0 0 Disassemble 1 Unplug power supply 2 Open the cover see Open the Cover on 18 3 Loosen all cables attached to the PLC and AD Module A 4 Unlock the hooks on the back 5 Remove the PLC and AD Module A Assemble 1 Install new PLC and AD Module 2 Lock the hooks on the back 3 Reinstall all cables 4 Reinstall the cover 27 6 4 12 Changing Display Part Part No Qty Consumables HMI Panel 599 027 1 Disassemble
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