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1. Cockpit Software Revision 1 1 6 Nano R AFM User Manual FF Pacific Nanotec hnology SPM Cockpit File Device Settings Tools Process Display Window Help F Select oe Align Frequency gt Tip gt Scan gt Image gt Tip ena start ai Mode LALI Sweep gt stage Approach Sample Processi Retract ia Device Directory C pscan pci Free memory coreleft 2236288666 farcoreleft 56064 337 PE Tip Exchange Figure 1 16 Acquisition Module Main Screen EZMode EZMode is intended for new and occasional AFM users A set of short cut buttons forms an easy to follow flow chart that takes you through the basic steps for taking an AFM image Each button opens a dialog offering the choices necessary for accomplishing that step rr Select Align Frequency 5 Tip A gt Image Tip i stan B Mode roe Sweep stage Approach Sample Processin Retract Figure 1 17 EZMode Short Cut Buttons X Pert Mode is oriented toward advanced AFM users who want to take advantage of a wider range of choices and features for acquiring an image The X Pert Mode short cut buttons access the functions for accomplishing the same required steps in EZMode as well as other functions but the buttons are not necessarily organized into sequential steps Se Eh Tod l D l a el rel a A Figure 1 18 X pert Mode Short Cut Buttons ANALYSIS From the acquisition module you can switch to the PNI Analy
2. containing features of a different size as illustrated in Figure 1 13 This pattern is repeated at 15 locations on the reference The pattern for optical microscope reference is composed of a series of four sets of parallel lines and a second series perpendicular to the first SOFTWARE MODULES The SPM Cockpit software modules serve three functions e acquire AFM data e process and analyze the acquired data e display AFM images contained in the analysis modules Figure 1 14 SPM Cockpit Software Modules The interfaces for the image acquisition and analysis modules feature tool bars that provide convenient access to the most commonly used software functions for the given mode of operation However regardless of the module acquisition or analysis or mode EZMode or X Pert you are in all of the SPM Cockpit software functions are always accessible via the menu items Note that the PNI Analysis software is included with all Nano R AFM systems and NanoRule a more full featured analysis software package is available as an option ACQUISITION When you launch the SPM Cockpit software Ps THe Rusch Suan the acquisiuon module apena a default You Sd Toos Process Display Window Help will be in either EZMode or X Pert Mode a Toolbar Mode Efmode depending onthe mode used in the last session fi j Baer Use the Mode menu to switch between the Input Selects to ADC ShiFt F 1 two Figure 1 15 SPM
3. Chapter 1 Instrument Overview l Chapter 1 Instrument Overview WARNING Before operating the Nano R AFM make sure you are familiar with the safety information on page iv A NANO R AFM INSTRUMENT SYSTEM CAUTION To prevent damage to your instrument probe and sample observe all the caution statements in the tutorial chapters Chapter 2 and Chapter 3 Trackball AFM Scaner amp Probe Figure 1 1 Block Diagram of Nano R Instrument System Nano R Stage Includes the AFM scanner probe sample puck video optical microscope and the AFM scanners real time calibration sensors Master Computer The IBM PC type computer is the virtual interface to the Nano R AFM stage Pacific Nanotechnology software programs resident on the computer s hard disk are used for measuring visualization and analysis of AFM images Controller Contains most of the electronics required for operating the Nano R stage It is connected to the Master Computer by a standard Ethernet cable and to the Nano R stage by five cables Video Monitor Displays the optical microscope image of the probe Sample area In Some cases the computer monitor may be used as the video monitor Track ball Provides an optional way to activate many of the motorized features of the Nano R stage including the X Y stage positioning and the video microscope zoom and focus Figure 1 3 Controller Revision 1 1 2 Nano R AFM U
4. an be adjusted to accommodate different sample sizes see page 85 for details The protruding piece on the bottom of the puck fits into the groove on the X Y stage so it can be safely and easily guided into position under the probe Figure 1 12 Sample Puck PNI REFERENCE The Nano R system is supplied with the PNI AFM reference which is helpful for establishing the performance of your instrument s AFM scanners as well as the optical microscope The reference also serves as a useful test sample when learning how to use your instrument the tutorials in this manual are based on this sample AFM Reference A 1 micron square 2 micron pitch B 2 5 micron square 5 micron pitch C 5 micron square 10 micron pitch D 10 micron square 20 micron pitch Notes Feature height nominal 75 nm Feature width within 0 3 microns Optical Reference 15 lines in each a b c d a 1 micron line 2 micron pitch b 2 5 micron line 5 micron pitch c 5 micron line 10 micron pitch d 10 micron line 20 micron pitch Figure 1 13 PNI Reference Revision 1 1 Chapter 1 Instrument Overview 5 The patterns in the reference are made in a silicon nitride film deposited on a silicon substrate This combination gives optimal color contrast when viewed with an optical microscope The pattern for AFM measurements is composed of four blocks of square features The features in each block have uniform size and pitch with each block
5. never touch the cantilever The Light Lever Nano R AFM is shipped with probes for the two basic imaging modes contact and close contact vibrating cantilever The probes come in two marked boxes 10 probes to a box Figure 1 7 AFM Probes Cantilever amp Probe lt Cantilever Chip Cantilever Chip Cantilever Laan a Metal Substrate Metal Substrate Figure 1 8 PNI AFM Probe Top View Not to Scale Figure 1 9 PNI AFM Probe Side View Not to Scale The probe tip extends from the end of a cantilever which is mounted to a chip Figure 1 8 The metal substrate that holds the cantilever chip is mounted in the AFM scanner it is magnetically coupled to the bottom of the scanner The two types of probes appear identical to the naked eye but under the instrument s optical microscope you can see that contact cantilevers are significantly longer than close contact cantilevers ttttie sees 06mcC iaR RR RR RR RRR HR ee eee pereeo SERBS BBG CHEER ES Se amp Saeaeaeeeaetaeaaevre es amp Seana aaa eae faeeaeee LETTESTE RE Re ee amp eae SH BS2ECee Pee eee eee eee SSSESEBERBBESEHe EH REE ee By Seeesee eens eaeeeuae n Figure 1 10 Contact Cantilever Figure 1 11 Close Contact Cantilever Revision 1 1 4 Nano R AFM User Manual SAMPLE PUCK The sample to be imaged is mounted on the sample puck The puck is composed of removable layers so the height of the puck c
6. ser Manual HARDWARE COMPONENTS NANO R STAGE The AFM scanner head rests on three motorized posts which are used to perform a coarse Z approach of the probe tip to the sample surface The sample puck rests on a motorized X Y stage for positioning the sample under the probe The puck can be easily removed for mounting a sample AFM Scanner Head Z Approach Motor Motorized act i Sample Puck X Y Positioning Figure 1 4 Stage Components AFM Scanner Head The AFM Scanner Head contains the components that 1 Measure the force between the probe and the sample and 2 Control the precise positioning of the probe in X Y and Z Detector Adjust Knobs Laser Adjust Knobs wi 1 a n i 5 i TRE m Pi D s Cantilever Figure 1 5 Light Lever Sensing System Figure 1 6 Adjustment Knobs for Laser and Detector The Nano R AFM scanner uses both a light lever design and a crystal design A red laser is focused on the back of the cantilever and then projected onto a quad photodiode photodetector Two pairs of manual adjustment knobs on the scanner head are used to align the sensing system One pair controls the position of the laser light on the backside of the cantilever the other pair moves the photodetector into the light path Revision 1 1 Chapter 1 Instrument Overview 3 AFM PROBES CAUTION Use care when handling AFM probes as they can break very easily Always handle with tweezers and
7. sis module by clicking A series of short cut buttons is displayed for easy access to the most commonly used image processing and analysis tools Figure 1 19 Analysis Module Short Cut Buttons Revision 1 1 Chapter 1 Instrument Overview 7 BASIC IMAGING PROCEDURE Acquiring an image with the Light Lever Nano R AFM requires the following basic steps whether you are a new occasional or advanced user 1 2 10 11 12 Launch the SPM Cockpit software Open a configuration file contact or close contact Retract the tip and raise the AFM scanner to provide safe clearance between the probe tip and the sample puck Load a sample on the sample puck Install a probe on the AFM scanner Align the detector For close contact mode only set the resonance frequency for the installed cantilever Locate features for imaging Bring the probe into contact with the sample Scan the sample Perform image processing and analysis routines Retract the probe from the sample Revision 1 1

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