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Special Turbo-V 1K-G - Agilent Technologies

1. N N DIMENSIONS mm inches Figure 23 238 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Water Cooling Kit Installation Two types of water cooling kits are available to be mounted The Special Turbo V 1K G must be always water cooled The two model part numbers are 969 9825 and 969 9826 Figure 24 Model 969 9825 The customer can alternatively order the 90 bend water cooling kit plastic model 969 9347 or metallic model 969 9337 Figure 25 Model 969 9826 Special Turbo V 1K G User Manual 87 901 006 01 A 239 258 17 Technical Information Water Cooling Kit Installation CAUTION The items of the kit 969 9826 kit must be assembled as shown in the following figure Figure 26 The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm Figure 27 240 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective nozzles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with
2. Special Turbo V 1K G User Manual 87 901 006 01 A 229 258 17 Technical Information When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure remains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt The controller can answers with the following response types Tab 6 Type Length Value Description After a read instruction of a Logic 1 byte o logic window After a read instruction of a Numeric 6 bytes aa numeric window Alphanumeri After a read instruction of an 10 bytes Se c alphanumeric window The command execution has ACK 1b 0x6 yte 0x6 been successfully completed The command execution has NACK 1 byte 0x15 been failed Unknown The specified window in the Window nome 0x32 command is not a valid window The data type specified in the Data Type command Logic Numeric or Error tara 0x33 Alphanumeric is not accorded with the specified Window The value expressed during a Out of write command is out of the Range byte 0x34 range value of the specified window The specified window is Read Only or temporarily disabled for 1 byte 0x35 example you can t write the Soft Start when the Pump is running Win Disabled 230 258 Special Turbo V 1K G User Manual 87 901 0
3. ZAGRO ENIE Komunikaty niebezpieczeristwa przyciagaja uwage operatora co do danej procedury lub danego postepowania kt rego nieprawidtowe wykonanie mogtoby spowodowa powazne uszkodzenia ciata Sa to wazne informacje wyciagniete z tekstu Komunikaty zwiekszonej uwagi sa wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury Magazynowanie 150 258 W celu zagwarantowania najwyzszego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Agilent musza by przestrzegane nastepujace zalecenia podczas transportu przesuniecia i magazynowania pomp nie moga by przekroczone nastepujace warunki srodowiskowe temperatura od 20 C do 70 C wzgledna wilgo od 0 do 95 2 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w sposob Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesiecy od daty wysylki Special Turbo V 1K G User Manual 87 901 006 01 A Podrecznik Instrukcji 12 Je eli z jakiegokolwiek powodu czas magazynowania jest dtuzszy nalezy odesta pompe do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa sie z miejscowym przedstawicielem firmy Agilent Przygotowanie do instalacji Pompa Special Turbo V 1K G jest dostarczana w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj p
4. lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 When a data is indicated between two quotes it means that the indicated data is the corresponding ASCII character lt STX gt Start of transmission 0x02 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric character indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 5 Data Type Field Length Valid Characters Logic L 1 Numeric N 6 0 9 right justified with 0 Alphanumeric 10 from blank to ASCII A lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type
5. NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
6. Instruksjon Manual Den f lgende tabellen beskriver antall skruer som er n dvendige for ISO 160 F flensen og tilh rende strammemoment Tab 1 FLENS ANT STRAMME MOMENT ISO 160 F 8 5 Nm Til flensene F ma stalskruene vere av klasse gt 8 8 Special Turbo V 1K G kan installeres i en valgfri stilling Special Turbo V 1K G ma ikke festes gjennom fundamentet FORSIKTIG Special Turbo V 1K G med Navigator controller h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene for denne klassen Special Turbo V 1K G er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mkretsene slik at ingen deler under spenning er tilgjengelige Forsikre deg om at isoleringen av anordningen koplet til Special Turbo V 1K G har en egnet isolering ogs under forhold med en enkel feil i f lge EN 61010 1 standarden 118 258 For installasjon av tilleggsutstyr vises det til Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A Bruk Instruksjon Manual 9 Alle instruksjoner for korrekt bruk finnes i dette avsnittet Les n ye gjennom denne manualen f r systemet tas i bruk Mens oppvarmingen av kammeret p g r m temperaturen ved inngangsflensen ikke overskride 80 C ADVARSEL Ikke start pumpen hvis inngangsflensen ikke er koplet til va
7. Special Turbo V 1K G User Manual 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar100 Allman Information 101 F rvaring 102 F rberedelser f r installationen 103 Installation 104 Fasts ttning av pump 105 Anv ndning 107 Start och anv ndning av Special Turbo V 1K G 108 Att st nga av Special Turbo V 1K G 108 N dstopp 109 Underhall 109 Bortskaff 110 Oversattning av originalinstruktionerna EE Agilent Technologies 99 258 8 Bruksanvisning S kerhetsanvisningar f r Molekyl ra turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsenergin frig rs VARNING F r att undvika skador p utrustningen och f rhindra att skador orsakas p operat rer m ste installationsinstruktionerna som beskrivs i den h r bruksanvisningen f ljas noga 100 258 Special Turbo V 1K G User Manual 87 901 006 01 A Bruksanvisning 8 Allm n Information Utrustningen r avsedd f r yrkesm ssig anv ndning Anv ndaren b r l sa denna bruksanvisning samt vrig dokumentation fr n Agilent f re anv ndning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna o
8. remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand Afzetten van de Special Turbo V 1K G Hiervoor behoeft slechts de stroomvoorziening te worden onderbroken De ingebouwde controller stopt onmiddellijk de pomp 84 258 Special Turbo V 1K G User Manual 87 901 006 01 A Bedrijfshandleiding 6 Voor de veiligheid van de bediener dient de controller Turbo V gevoed te worden met een driedradige voedingskabel zie de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de controller ontwikkelde hoge voltage kan ernstige letsels of de dood veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden in het systeem uit te voeren Noodstop Om de Special Turbo V 1K G in noodomstandigheden te stoppen moet de stroomtoevoerkabel van de controller losgemaakt worden Onderhoud De Special Turbo V 1K G is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd personeel worden uitgevoerd Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50
9. modul v vevu okam ite zastav 180 258 Special Turbo V 1K G User Manual 87 901 006 01 A N vod na Obsluhu 14 NEBEZPE IE Z d vodu bezpe nosti obsluhuj ceho pracovn ka mus by kontroln zariadenie Turbo V nap jan pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemnenou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e sp sobi v ne kody alebo smr Prv ne za nete prev dza dr b rske pr ce v tejto jednotke odpojte nap jaciu n ru N dzov zastavenie dr ba Ak chcete zariadenie Special Turbo V 1K G okam ite vypn v stave n dze mus te vytiahnu k bel nap jania zo z suvky zdroja nap jania Special Turbo V 1K G nevy aduje iadnu dr bu Ak ko vek pravy a opravy syst mu mus vykona autorizovan person l NEBEZPE IE Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia Special Turbo V 1K G User Manual 87 901 006 01 A 18
10. Teplotn rozp t 20 C a 70 C a Rozp t vlhkosti O a 95 bez sr en turbomolekul rni v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn vyv vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te 162 258 Special Turbo V 1K G User Manual 87 901 006 01 A N vod k Pou it 13 vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v vev firmy Agilent Pr prava k instalaci Special Turbo V 1K G je dod v nave speci ln m ochrann m obalu Pokud toto balen vykazuje zn mky po kozeni k n mu mohlo dojit b hem prepravy kontaktujte va i mistni prodejn pobo ku Pri vybalovani davejte pozor aby Special Turbo V 1K G nespadla a nevystavujte ji nenad lym n raz m ot es m ani vibrac m Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu V norm ln m prost ed se v v va Special Turbo V 1K G nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne
11. illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett h m rs klet 5 C t l 435 C ig l sd a nyom s h m rs klet diagramot a Technical Information f ggel kben relativ p ratartalom 0 95 nem kondenz l Ne t vol tsa el az ntapad s v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt 140 258 Special Turbo V 1K G User Manual 87 901 006 01 A Felhaszn l i K zik nyv 11 Kuva 3 M gneses mez k jelenl t ben a szivattyut v deni kell ferrom gneses pajzs segits g vel R szletes inform ci rt l sd Technical Information A Special Turbo V 1K Got primer szivattyuhoz kell csatlakoztatni asd Technical Information szivattyu r gzit se Ha rotorhiba jelentkezik a szivatty nak a rendszerhez val csatlakoz sa jelent s nyomat knak lehet kit ve Ha a csatlakoz s nem elegend a nyomat k elvisel s re a szivatty lev lhat a rendszerr l illetve a motorh z lev lhat a szivatty burkolat r l Ebben az esetben f mr szecsk k llhatnak ki a szivatty b l vagy a rendszerb l ami komoly s r l st vagy hal lt s vagy k rnyezet k rosod st okozhat R gz tse a Special Turbo V 1K Got stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szer
12. jotka johtuvat laitteen kayttoohjeiden taydellisesta tai osittaisesta laiminly nnist ammattitaidottoman henkil n virheellisest laitteen k yt st valtuuttamattomista toimenpiteist tai kansallisen lains d nn n vastaisesta k yt st Special Turbo V 1K G on turbomolekyylipumppu korkean ja ultrakorkean tyhji n k ytt varten Se kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 45000 kierrosta min max py riv n turbiinin avulla jota kayttaa korkeatehoinen kolmivaiheinen s hk moottori Special Turbo V 1K G pumpussa ei ole lainkaan likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin Kun Special Turbo V 1K G pumppua k ytet n Navigator controller ohjaimen kanssa siihen kuuluu lis ksi apuliittimi joiden avulla on mahdollista k ytt lis tuuletinta ohjata tuuletusventtiili ja k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 125 258 10 Ohjek sikirja N iss k ytt ohjeissa noudatetaan seuraavia merkint j VERDIER Va
13. n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado Special Turbo V 1K G User Manual 87 901 006 01 A 61 258 4 Manual de istrucciones Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se debera introducir en el embalaje del sistema antes de enviarlo En caso de que el sistema se tenga que desguazar eliminarlo respetando las normas nacionales especificas Eliminacion Significado del logotipo WEEE presente en las etiquetas El simbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este simbolo v lido s lo para los paises miembros de la Comunidad Europea indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de
14. pompe Special Turbo V 1K G wystarczy dostarczy napiecie zasilania Wbudowany sterownik rozpoznaje automatycznie obecno sygna w interlock u i uruchomienia i uruchamia pompe Pierwsze uruchomienie pompy odbywa si w spos b Soft Start kt ry na zako czenie cyklu uruchomienia wy cza si automatycznie i dlatego te wszystkie nast pne uruchomienia odbywaj si bez sposobu Soft Start Aby m c ponownie uruchomi z Soft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 OPIS KOMUNIKACJI w dodatku Technical Information Zielona dioda led znajdujaca sie na panelu podstawy sterownika typu Navigator controller wskazuje z czestotliwoScia wtasnego migania stan operacyjny systemu zaSwiecona na sta e pompa znajduje si w normalnych obrotach miga powoli okres 400 ms system w stanie zbocza lub hamowania lub w stanie Stop lub w stanie Waiting for interlock miga szybko okres 200 ms stan b du Zatrzymanie systemu Special Turbo V 1K G Aby zatrzyma Urzadzenie Special Turbo V 1K G wystarczy odtaczy napiecie zasilania Wbudowany sterownik zatrzyma natychmiast pompe 156 258 Special Turbo V 1K G User Manual 87 901 006 01 A Podrecznik Instrukcji 12 ZAGROZENIE Dla zagwarantowania bezpieczenstwa operatorowi kontroler Turbo V powinien by zasilany kablem zasilajacym o 3 przewodach zobacz tabele cz ci daj cych si zam wi i
15. re Toutefois afin d viter toute pollution due la poussi re il est conseill de la garder dans son emballage clos jusqu au moment de l installation Special Turbo V 1K G User Manual 87 901 006 01 A 43 258 3 Mode d emploi Figure 1 Installation Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 35 C Cf graphique dans Technical Information humidit relative 0 95 non condensante Nara Gin Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me 44 258 Special Turbo V 1K G User Manual 87 901 006 01 A Mode d emploi 3 Figure 2 En pr sence de champs magn tiques la pompe doit tre prot g e l aide d crans appropri s Pour tout autre renseignement consulter l opuscule Technical Information La Special Turbo V 1K G doit tre raccord e une pompe primaire Cf sch ma dans Technical Information Fixation de la pompe En cas d endommagement du rotor le raccordement pompe syst me peut tre soumis un couple tr s i
16. sn eller is st v aggressive gasser eksplosjonsfarlige milj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 35 C se diagram i tillegget Technical Information relativ fuktighet 0 95 uten kondens Tapen og beskyttelsesproppen skal fjernes f rst n r turbopumpen koples til systemet 116 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instruksjon Manual 9 Figur 2 Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer Special Turbo V 1K G ma koples til en hovedpumpe se skjema i Technical Information Festing av pumpen Dersom rotoren delegges kan tilkoplingen mellom pumpen og systemet utsettes for et betydelig dreiemoment Dersom tilkoplingen ikke er sterk nok til t le dette dreiemomentet kan pumpen l sne fra systemet eller motoren kan l sne fra pumpens hylster I dette tilfellet kan metallsplinter kastes ut fra pumpen eller fra systemet Dette kan f re til alvorlige skader eller d d og eller skader p annet utstyr i n rheten Fest Special Turbo V 1K G i en stabil posisjon monter turbopumpens innl psflens til systemets motflens med en tilkopling som er i stand til t le et dreiemoment p 8900 Nm rundt sin egen akse Special Turbo V 1K G User Manual 87 901 006 01 A 117 258
17. technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G Special Turbo V 1K G Special Turbo V 1K G User Manual 87 901 006 01 A 3 258 Special Turbo V 1K G 4 258 Special Turbo V 1K G User Manual 87 901 006 01 A Contents 1 Contents Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso23 Manutenzione 25 Smaltimento 26 Gebrauchsanleitung 27 Sicherheitshinweise f r Turbomolekularpumpen 28 Allgemeine Informationen 29 Lagerung 30 Vor der Installation 31 Installation 32 Befestigung de
18. tre effectu e par un personnel agr AHSA AU Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un appareil r g n r en remplacement de l appareil endommag Special Turbo V 1K G User Manual 87 901 006 01 A 49 258 3 Mode d emploi Avant de renvoyer une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau ventes de votre r gion la fiche S curit et Sant jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage du syst me avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment la r glementation nationale en mati re de gestion des d chets Mise au rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole unique ment valide pour les pays de la Communaut euro p enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m na g res ou les d chets industriels ord
19. yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytt laitteen toimittajaan olipa se sitten laitteen valmistaja tai j lleenmyyj tarkastettuaan ensin kaupan m W 4 N D Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 11 Felhasznaloi K zik nyv Biztons gi tmutat Turbomolekularis szivattyukhoz 136 ltal nos inform ci k 137 T rol s 138 El k szit s telepit sre 139 Telepit s 140 A szivattyu r gzit se 141 Hasznalat 143 A Special Turbo V 1K G bekapcsol sa es 144 A Special Turbo V 1K G kikapcsolasa 144 Veszleallitas 145 Karbantartas 145 Megsemmisites 146 Az eredeti utasitas forditasa Agilent Technologies 135 258 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZ LY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 136 258 Special Turbo V 1K G User Manual 87
20. 13 Navod k Pou iti Bezpe nostni navod pro Turbomolekularni vyv wy Turbomolekularni vyv wy jak jsou popisovany v nasledujicim navodu obsahuji velk mno stvi kinetick energie diky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie A 174234180 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence zran n obsluhy 160 258 Special Turbo V 1K G User Manual 87 901 006 01 A N vod k Pou it 13 V eobecn Informace Toto zarizeni je ur eno pro odborn ky U ivatel by si m l pred pou it m zarizeni prec st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do zafizeni nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v pr slu n ch st tn ch norm ch Special Turbo V 1K G je turbomolekul rn vyv va ur en pro aplikace s vysok m a velmi vysok m vakuem Vyv va m e od erp vat libovoln plyn nebo plynnou sm s ale nen vhodna na erp n tekutin nebo pevn ch stic erpani zaji uje velmi rychl turb na max 45000 ot min poh n n vysoce v k
21. 258 Special Turbo V 1K G User Manual 87 901 006 01 A Uso Istruzioni per l uso 1 In questo paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 80 C AVVERTENZA Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pud causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando in funzione I cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas aggressivi gueste pompe sono dotate di una apposita porta attraverso la guale necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinetti vedere l appendice Technical Information AVVERTENZA Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili o radioattivi seguire le appropriate procedure tipiche di ciascun gas No
22. 33 mbar l s This value can be exceeded according to the process requirements Please contact Agilent for specific applications 250 258 The purge gas throughput with the recommended forepump allows to achieve a high vacuum pressure in the 10 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points 1 Close the corrosive gas flow into the system 2 Leaving the Turbo V pump and the backing pump running and the purge gas flowing wait for enough time to evacuate the corrosive gas from the system 3 Turn off the Turbopump 4 Open the Turbo V vent port slowly until to reach atmospheric pressure in the system 5 When the Turbo V pump and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump with the chamber or the Turbo V vent valve opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Purge gas line Pressure regulator Gas purge valve Gas purge port Forevacuum pump Turbopump Mo G KB WN Vent valve Figure 39 Purge
23. F Ili Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc I Agilent Technologies i Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 8 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all
24. Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held raspansible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 2 eme Pg 2 3 e Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Foreline Pressure Mechanical Cantact Overtemperature Other Temp 2 Purge flow Cooling defective Cl
25. Special Turbo V 1K G goed ge soleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 82 258 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn Special Turbo V 1K G User Manual 87 901 006 01 A Gebruik Bedrijfshandleiding 6 In deze paragraaf worden de belangrijkste gebruiksprocedures vermeld Breng alle elektrische en pneumatische aansluitingen tot stand alvorens het systeem te gebruiken Tijdens de eventuele verwarming van de vacu mkamer mag de temperatuur op de inlaatflens niet meer dan 80 C bedragen WAARSCHUWING Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers krijgt geleverd zie bijlage Technical Info
26. V 1K G sufficiente togliere la tensione di alimentazione Il controller arresta immediatamente la pompa Special Turbo V 1K G User Manual 87 901 006 01 A Istruzioni per l uso 1 AVVERTENZA Per la sicurezza dell operatore il controller Turbo V deve essere alimentato con un cavo di alimentazione a 3 fili vedere la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione Arresto di Emergenza Per arrestare in condizioni di emergenza la Special Turbo V 1K G occorre staccare il cavo di alimentazione dal controller Manutenzione La Special Turbo V 1K G non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo l apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto amp possibile usufruire del servizio di riparazione Agilent o del Agilent adva
27. Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products Division 7 Avenue des Tropiques Z A de Courtaboeuf B P 12 91941 Les Ulis cedex France Tel 33 0 1 69 86 38 84 Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Germany and Austria Agilent Technologies Vacuum Products Division Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel 49 0 6151 703 353 Fax 49 0 6151 703 302 Toll free 00 800 234 234 00 Sales and Service Offices India Agilent Technologies India Pvt Ltd Vacuum Product Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280
28. W czenie i U ytkowanie urz dzenia Special Turbo V 1K G 156 Zatrzymanie systemu Special Turbo V 1K G 156 Zatrzymanie Alarmowe 157 Konserwacja 157 Przetworstwo odpadow 158 T umaczenie instrukcji oryginalnej 5 Agilent Technologies 147 258 12 Podrecznik Instrukcji Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obs ugi posiadaj wysok energi kinetyczn spowodowan bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu wirnika ze stojanem lub z powodu p kni cia wirnika mo e nast pi uwolnienie energii obrotu INE IATA Aby nie dopu ci do uszkodzenia aparatury i zapobiec obra eniom cielesnym operator w nale y obowi zkowo przestrzega zalece dotycz cych instalacji opisanych w niniejszej instrukcji obs ugi 148 258 Special Turbo V 1K G User Manual 87 901 006 01 A Podrecznik Instrukcji 12 Ogolne Informacje Ta aparatura jest przeznaczona do uzytku zawodowego Uzytkownik musi przeczyta bardzo uwaznie niniejsza instrukcje kazda dodatkowa informacje dostarczona przez firme Agilent przed uzytkowaniem aparatury Firma Agilent uchyla sie od jakiejkolwiek odpowiedzialnosci w przypadku czesciowego lub catkowitego braku przestrzegania instrukcji w przypadku niewtasciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowaznion
29. a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedelmi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkr t nemzeti szabv nyoknak megfelel en Megsemmis t s A c mken jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad NJ Z JI Ni a 146 258 Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 12 Podrecznik Instrukeji Wskaz wki dotyczace bezpieczeristwa dla Pomp Turbomolekularnych 148 Og lne Informacje149 Magazynowanie 150 Przygotowanie do instalacji 151 Instalacja 152 Mocowanie pompy 153 U ytkowanie 155
30. be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any
31. convenc es UNSS As mensagens de aten o chamam a aten o do operador para um procedimento ou uma pr tica especifica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As mensagens de cuidado s o visualizadas antes de procedimentos que se n o efectuados correctamente podem causar danos aparelhagem As notas cont m informa es importantes destacadas do texto Armazenagem Para garantir o n vel M ximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescri es 66 258 durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 nao condensante ao acionar as bombas turbomoleculares pela primeira vez 0 cliente deve ativ las sempre em modalidade Soft Start o tempo maximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedicao Special Turbo V 1K G User Manual 87 901 006 01 A Manual de Istruc es 5 Se por uma raz o qualquer o periodo de armazenagem for superior sera necessario enviar outra vez a bomba para o fabricante Para mais informac es contatar o representante local da Agilent Preparacao para a instalacao A Special Turbo V 1K G fornecida numa embalagem protectora especial se esta apresentar sinais de danos que poderiam
32. di spedizione Special Turbo V 1K G User Manual 87 901 006 01 A ATTENZIONE Istruzioni per l uso 1 Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent Preparazione per l installazione ATTENZIONE La Special Turbo V 1K G viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere la Special Turbo V 1K G e a non sottoporla ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Onde evitare problemi di degassamento non toccare con le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata La Special Turbo V 1K G non pu essere danneggiata rimanendo semplicemente esposta all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere Special Turbo V 1K G User Manual 87 901 006 01 A 19 258 1 Istruzioni per l uso Figura 1 Installazione Non installare e o utilizzare la pompa in am
33. dos parafusos de aco para as flanges F deve ser gt 8 8 A Special Turbo V 1K G pode ser instalada em qualquer posic o A Special Turbo V 1K G nao pode ser fixada por meio da sua base CUIDADO A Special Turbo V 1K Gpertence segunda categoria de instalac o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimentac o apropriada para esta categoria Special Turbo V 1K G tem dois conectores para as entradas saidas e para a comunicac o de s rie que devem ser ligados aos circuitos externos de modo a nao permitir 0 acesso as partes sob tensdo Assegure se de que o isolamento do dispositivo ligado a Special Turbo V 1K G esteja isolado correctamente mesmo em caso de avaria conforme previsto pela norma NE 61010 1 70 258 Para a instalacao dos acess rios opcionais consultar Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A Utilizac o Manual de Istruc es 5 Neste par grafo sao descritos os principais procedimentos operacionais Antes de usar o sistema efectuar todas as ligac es el ctricas e pneum ticas Durante o eventual aquecimento da camara a vacuo a temperatura no flange de entrada n o deve ser superior a 80 C ATENCAO Nunca activar a bomba se o flange de entrada n o estiver ligado a c mara de v cuo ou n o estiver fechado com o flange de fecho N o tocar a turbobomba e os seus eventuais acess rios durante as opera e
34. gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com
35. i t n m a prachem Special Turbo V 1K G User Manual 87 901 006 01 A 163 258 13 N vod k Pou it Instalace Postava 1 Vyv vu neinstalujte v prost ed kter je vystaveno atmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po aru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak 2 bary nad atmosf rick m tlakem teplota od 5 C do 35 C viz diagram tlak teplota v p loze Technical Information relativn vlhkost 0 95 bez sr en Pred pripojenim turbomolekularni vyv vy do systemu nesundavejte adhezni a ochranne viko 164 258 Postava 2 V pritomnosti magnetickych poli se vyv va musi chranit feromagnetickym stin nim Viz podrobn informace v pr loze Technical Information Special Turbo V 1K G se mus p ipojit k prim rn mu erpadlu viz sch ma v asti Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A Navod k Pouziti 13 Monta vyv wy Pokud dojde k poru e rotoru propojeni vyv vy se systemem by mohlo byt vystaveno velk mu to ivemu momentu Pokud toto propojeni nebude schopno wydr et tento to ivy moment vyv va by se mohla odpojit od syst mu nebo kryt elektromotoru by se mohl odpojit od pl t vyv vy V tomto pripad by z vyv vy nebo systemu m
36. logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale MY S Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 17 Technical Information Pump Description 209 969 8978M002 Controller Description 210 Technical Specification211 Special Turbo V 1K G outline 213 Interconnections 215 P3 Vent 216 P4 External Fan 217 J1 In Out 217 Signal Description 218 How to Connect the Output Open Collector of the Controller 222 How to Connect the Outputs of the Controller 226 J2 Serial 226 RS 232 RS 485 Communication Description 228 Communication Format 228 Communication Protocol 228 Examples 231 Window Meanings 233 Inlet Screen Installation 237 Water Cooling Kit Installation 239 Original Instructions L r Agilent Technologies 207 258 17 Technical Information 208 258 Vent Accessories 242 Navigator Controller Compatible Vent Valve
37. personskader Sister eq Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader Dette g r opm rksom p vigtig information i teksten Opbevaring Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C a relativ fugtighed fra O til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for f rste gang De turbomolekyl re pumper m opbevares i 10 m neder fra forsendelsesdatoen 90 258 Special Turbo V 1K G User Manual 87 901 006 01 A FORSIGTIG Istruktionsbog 7 Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant Forberedelse f r installation FORSIGTIG Special Turbo V 1K G leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn p skader der kan v re opst et under transporten S rg for at Special Turbo V 1K G ikke tabes eller uds ttes for st d eller vibrationer Smid ikke emballagen ud Mate
38. r chla turb na max 45000 ot ok min tu poh an vysokov konn m 3 fazovym elektrick m motorom Special Turbo V 1K G je plne zbaven zne is uj cich l tok a preto je vhodn pre aplik cie vy aduj ce iste vakuum Ke sa v veva pou va so zariaden m Navigator controller je vybaven pomocn mi konektormi na pripojenie al ieho ventil tora na ovl danie vetracieho ventilu a kv li mo nosti ovl dania zo vzdialen ho miesta pomocou hostite sk ho po ta a pripojen ho cez s riov komunika n linku RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 173 258 14 N vod na Obsluhu Navod na pou itie obsahuje tieto Standardn ozna enia NEBEZPECIE Nebezpe ie maju sustredit pozornost pracovnika na ur ity postup alebo innost nespravne vykonanie ktorych mo e sp sobit va ne zranenie POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uj na d le it inform cie z textu Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostr
39. r skal v re mindre end 2 bar over atmosf risk tryk I forbindelse med pumpning af aggressive gasser er disse pumper udstyret med en d r igennem hvilken det er n dvendigt at forsyne pumpen med delgasser kv lstof eller argon for at beskytte lejerne se bilaget Technical Information ADVARSEL N r pumpen anvendes til toksiske brandfarlige eller radioaktive gasser f lges fremgangsm den for den enkelte gastype Anvend ikke pumpen til eksplosive gasser Special Turbo V 1K G User Manual 87 901 006 01 A 95 258 7 Istruktionsbog Start og anvendelse af Special Turbo V 1K G Stop 96 258 De nedenst ende instruktioner g lder for Special Turbo V 1K G brugt sammen med Navigator controller For at starte Special Turbo V 1K G er det tilstr kkeligt at tilslutte et forsyningsstik Den indbyggede styreenhed genkender blokerings og startsignaler automatisk og starter pumpen Pumpen startes f rste gang ved hj lp af SOFT START metoden N r startprocessen er afsluttet frakobles denne funktion automatisk med hensyn til alle efterf lgende aktiveringer af pumpen der vil ske uden SOFT START metoden For at aktivere SOFT START metoden p ny skal ovenn vnte m de programmeres ved hj lp af software se afsnit RS 232 COMMUNICATION DESCRIPTION i bilaget Technical Information Den gr nne LED LDI der er anbragt p panelet p Navigator Controller s fundament angiver systemets funktion ve
40. seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 258 Special Turbo V 1K G User Manual 87 901 006 01 A Istruzioni per l uso 1 Informazioni generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche La Special Turbo V 1K G una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto La pompa capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 45000 giri min max mossa da un motore elettrico trifase ad alto rendimento La Special Turbo V 1K G totalmente priva di agenti contaminanti ed quindi adatta per applicazioni che richiedono un vuoto pulito Quando usata con il Navigator controller la pompa dispone inoltre dei connettori ausiliari tramite i quali possibile alimentare un ventilatore aggiuntivo comandare la valvola di vent pilotarlo da remoto tramite un computer h
41. ter ocorrido durante o transporte entrar em contacto com o escrit rio de vendas local Durante a remo o da embalagem tomar muito cuidado para nao deixar cair a Special Turbo V 1K G e para nao submet la a choques ou vibrag es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do meio ambiente Para evitar problemas de perdas de g s n o tocar com as m os nuas os componentes destinados exposi o do v cuo Utilizar sempre luvas ou outra protec o adequada A Special Turbo V 1K G n o pode ser danificada permanecendo simplesmente exposta atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumula es de p Special Turbo V 1K G User Manual 87 901 006 01 A 67 258 5 Manual de Istru es Instalac o Figura 1 N o instalar e ou usar a bomba em ambientes expostos a agentes atmosf ricos chuva gelo neve poeiras gases agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condi es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 35 C consultar a planilha no ap ndice Technical Information humidade relativa 0 95 n o condensante Re
42. voorzien waarmee een extra ventilator kan worden gevoed de luchtuitlaatkleppen kunnen worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical information Special Turbo V 1K G User Manual 87 901 006 01 A 77 258 6 Bedrijfshandleiding Deze handleiding maakt van de volgende symbolen gebruik WAARSCHUWING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken VOORZICHTIG Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerkingen bevatten belangrijke informatie die uit de tekst is gelicht Opslag 78 258 Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de S
43. will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via
44. 0 och uppfyller EU direktiv 85 399 om milj skydd Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd Normal p verkan fr n omgivningen kan inte skada Special Turbo V 1K G Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den Special Turbo V 1K G User Manual 87 901 006 01 A 103 258 8 Bruksanvisning Figur 1 Installation OBSERVER Installera och anv nd inte pumpen i milj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar over atmosf riskt tryck temperatur fran 5 C till 35 C se bild i Technical Information relativ luftfuktighet O 95 utan kondens Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet 104 258 Special Turbo V 1K G User Manual 87 901 006 01 A Bruksanvisning 8 Figur 2 I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar Special Turbo V 1K G m ste anslutas till en huvudpump se schemat i Technical information Fasts
45. 00 opm koplet til en trefaset elektrisk motor Special Turbo V 1K G har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum N r pumpen brukes sammen med Navigator controller har den dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av utluftingsventilen og fjernstyring av systemet med en serietilkoplet vertsmaskin De f lgende avsnitt inneholder all informasjon som er n dvendig for sikre brukeren n r utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 113 258 9 Instruksjon Manual Denne manualen bruker f lgende standardprotokoll OA Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader a0 ae Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C a Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpen
46. 006 01 A ATENCI N Manual de istrucciones 4 En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Preparaci n para la instalaci n ATENCI N Special Turbo V 1K G se suministra en un embalaje especial de protecci n si se observan da os que podr an haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que Special Turbo V 1K G no se caiga y de no someterla a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada La Special Turbo V 1K G no puede da arse permaneciendo simplemente expuesta a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo Special Turbo V 1K G User Manual 87 901 006 01 A 55 258 4 Manual de istrucciones Figura 1 Instalacion ATENCI N No instalar ni o utilizar la bomba en lugares exp
47. 010 1 s nn sten mukaiseen asennusluokkaan tai ylij nniteluokkaan Kytke laite t m n vuoksi s hk verkkoon joka t ytt t m n luokan vaatimukset Special Turbo V 1K G laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei mihink n j nnitteen alaisena olevaan osaan p st k siksi Varmista ett Special Turbo V 1K G laitteeseen kytketyn laitteen eristys riitt my s yksitt isen toimintah iri n yhteydess EN 61010 1 s nn sten edellytt m ll tavalla Ks Technical Information liitett lis varusteiden asentamista varten 130 258 Special Turbo V 1K G User Manual 87 901 006 01 A K ytt Ohjek sikirja 10 T h n kappaleeseen on kirjattu t rkeimm t k ytt toimenpiteet Suorittakaa ennen j rjestelm n k ytt kaikki s hk ja paineilmakytkenn t Tyhji kammion mahdollisen l mmityksen aikana sis ntulolaipan l mp tila ei saa ylitt 80 C tta VAROITUS lk k ytt k pumppua ellei sis ntulolaippaa ole kytketty tyhji kammioon tai pumppua suljettu sulkulaipalla lk koskeko turbopumppuun tai sen lis osiin l mmitt misen aikana Korkea l mp tila saattaa aiheuttaa henkil iden loukkaantumisia V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa
48. 06 01 A Examples Command START Source PC Destination Controller Technical Information 17 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Special Turbo V 1K G User Manual 87 901 006 01 A 231 258 17 Technical Information Command SOFT START ON Source PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 232 258 Special Turbo V 1K G User Manual 87 901 006 01 A 17 Technical Information Window Meanings Tab 7 N Read Data
49. 1 A Pouziti Navod k Pouziti 13 Tento odstavec popisuje podrobnosti zakladnich pracovnich postupu Pred pou itim syst mu proved te v echna elektricka a pneumaticka pripojeni Pri zahrivani vakuov komory teplota privodni priruby nesmi prekrocit 80 C NEBEZPE Turbomolekul rni vyv vu nikdy nepou vejte nebude li privodni priruba pripojena k vakuov komore B hem zahfivani se turbovyv vy ani jejiho p islu enstv nedot kejte Vysok teplota m e zp sobit pop leniny B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prachu a sm tek Tlak p i odv tr vac m otvoru mus b t men ne 2 bary nad atmosf rick m tlakem Pro erp n agresivn ch plyn jsou tyto v v vy vybaveny speci ln m otvorem kter umo uje plynul p tok inertn ho plynu nap Nz Ar pro ochranu lo isek v v vy viz p lohu Technical Information NEBEZPE I Pokud pou ivate vyv vu pro erpani toxickych hoflavych nebo radioaktivn ch plyn dodr ujte pros m po adovan postupy pro likvidaci ka d ho plynu V v vu nepou vejte v p tomnosti v bu n ch plyn Special Turbo V 1K G User Manual 87 901 006 01 A 167 258 13 N vod k Pou it Zapnuti a pou ivani vyv wy Special Turbo V 1K G Nasledujici pokyny se aplikuji na Special Tur
50. 1 258 14 N vod na Obsluhu Sk r ne system odo lete na opravu alebo vymenu musite wyplnit dotaznik Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebne vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Likvid cia 162 258 Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny V znam loga WEEE nach dzaj ceho sa na t tkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja pri N X ES X Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 15 Prirocnik za Navodila Varnostna navodila za Turbomolekularne rpalke 184 Splo ne Informacije 185 Shranjevanje 186 Priprava za monta o 187 Monta a 188 Priprava za monta o 187 Uporaba 191 Vklop in uporaba naprave Special Turbo V 1K G 192 Izklop naprave Special Turbo V 1K G 192 Zaustavitev v sili 193 Vzdr evanje 193 O
51. 159 Bezpe nostni navod pro Turbomolekul rni vyv vy 160 VSeobecn Informace 161 Uskladn ni 162 P prava k instalaci 163 Instalace 164 Monta wyvawy 165 Pou iti 167 Special Turbo V 1K G User Manual 87 901 006 01 A Contents Udrzba 169 Likvidace 170 14 Navod na Obsluhu 171 Bezpe nostn n vod pre Turbomolekul rne v vevy 172 V eobecn inform cie 173 Uchov vanie 174 Pr prava na in tal ciu 175 In tal cia 176 Upevnenie v vevy 177 Pou itie 179 dr ba 181 Likvid cia 182 15 Priro nik za Navodila 183 Varnostna navodila za Turbomolekularne rpalke 184 Splo ne Informacije 185 Shranjevanje 186 Priprava za monta o 187 Monta a 188 Pritrjevanje rpalke 189 Uporaba 191 Vzdr evanje 193 Odlaganje opadkov 194 Special Turbo V 1K G User Manual 87 901 006 01 A 11 258 Contents 12 258 16 Instructions for Use 195 Safety Guideline for Turbomolecular Pumps 196 General Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 203 Maintenance 205 Disposal 206 17 Technical Information 207 Pump Description 209 969 8978M002 Controller Description 210 Technical Specification 211 Special Turbo V 1K G outline 213 Interconnections 215 P3 Vent 216 P4 External Fan 217 J1 In Out 217 RS 232 RS 485 Communication Description 228 Window Meanings 233 Inlet Screen Installation 237 Special Turbo V 1K G User Manual 87 901 00
52. 258 Special Turbo V 1K G User Manual 87 901 006 01 A Uso ADVERTENCIA Manual de istrucciones 4 En este apartado se citan los procedimientos operativos principales Antes de usar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el posible calentamiento de la c mara de vac o la temperatura de la brida de entrada no ha de ser superior a 80 C No hacer funcionar nunca la bomba si la brida de entrada no est conectada al sistema o no est cerrada con la brida de cierre No tocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCI N Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta deber ser inferior a 2 bar por encima de la presi n atmosf rica Para bombear gases agresivos estas bombas est n dotadas de una puerta espec fica mediante la cual es necesario suministrar a la bomba un caudal de gas inerte Nitr geno o Arg n para proteger los rodamientos v ase el anexo Technical Information ADVERTENCIA Cuando la bomba se utiliza para bombear gases t xicos inflamables o radioactivos seguir los procedimientos apropiados t picos de cada gas No usar la bomba cua
53. 3 fazni elektri ni motor Special Turbo V 1K G ne vsebuje onesna evalnih agentov in je torej primeren za isto vakuumiranje Kadar se uporablja z Navigator controller je rpalka opremljena s pomo nimi konektorji s pomo jo katerih se napaja dodatni ventilator se upravlja zra ni ventil ter se ra unalni ko upravlja ventilator preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information Tehni ne informacije Special Turbo V 1K G User Manual 87 901 006 01 A 185 258 15 Priro nik za Navodila Priro nik navaja naslednje svarilne znake SVARILO Opozorila so za to da usmerijo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo pomembne informacije iz besedila Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil Pri po iljanju premikanju in shranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti O do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjs
54. 6 01 A Contents Water Cooling Kit Installation 239 Vent Accessories 242 Purge Valve Installation 245 Serial Cable Installation 247 Special Turbo V 1K G Navigator Controller Installation 247 Pump Used with Corrosive Gases250 Pump Used in Presence of Magnetic Fields 251 Accessories and Spare Parts 252 Special Turbo V 1K G User Manual 87 901 006 01 A 13 258 Contents 14 258 Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni generali 17 Immagazzinamento 18 Preparazione per l installazione 19 Installazione 20 Fissaggio della pompa 21 Uso 23 Accensione ed Uso della Special Turbo V 1K G24 Arresto della Special Turbo V 1K G 24 Arresto di Emergenza 25 Manutenzione 25 Smaltimento 26 Traduzione delle istruzioni originali Agilent Technologies 15 25 1 Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NANSEN Per evitare danni al apparecchiatura e prevenire lesioni agli operatori necessario
55. 901 006 01 A Felhaszn l i K zik nyv 11 ltal nos inform ci k A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t nemzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A Special Turbo V 1K G egy turbo molekul ris szivatty nagy s rendk v l nagy v kuumalkalmaz sokhoz A szivatty b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 45000 fordulat perc biztos tja A Special Turbo V 1K G szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Ha Navigator controllerrel haszn ljuk a szivatty rendelkezik k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepet amit t voli helyr l ir ny t egy soros vonalon RS 232 vagy RS 485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bek
56. C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp Special Turbo V 1K G User Manual 87 901 006 01 A 85 258 6 Bedrijfshandleiding Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet voor versturing bij de pomp in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk Afvalverwerking 86 258 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het e te hebben gecontroleerd MY S Special Turbo V 1K G User Manual 87 901 006 01 A S
57. Description Admitted Values Write Type 000 R W L Start Stop Start 1 in remote mode the Stop 0 window is a read only 008 R W L Remote Remote 1 default or Serial Serial 0 configuration default 1 100 R W L Soft Start YES 1 write only in Stop NO 0 condition 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold default 582 expressed in Hz mA or s 103 R W N Set Point delay time 0 to 99999 between the pump default lt 0 start and the set point check seconds 104 R W L Set Point signal 0 high level active activation type the 1 low level active signal can be high default 0 level active or low level active 105 R W N Set point hysteresis 0 to 100 in of threshold default 2 106 R W L Intercooling 0 NO 1 YES 107 R W L Active Stop 0 NO write only in stop 1 YES Special Turbo V 1K G User Manual 87 901 006 01 A 233 258 17 Technical Information N Read Data Description Admitted Values Write Type 108 R W N Baud rate 600 lt 0 1200 lt 1 2400 lt 2 4800 lt 3 9600 4 default 4 109 W L Pump life cycle time To reset write 1 110 R W L 111 R W L 120 R W N 121 R W N 122 R W L cycle number reset Interlock type default 1 Analog output type output voltage signal proportional to frequency or power Rotational frequency setting Hz Maximum rotational frequency in Hz act
58. K zik nyv 11 Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez El k sz t s telep t sre FIGYELEM A Special Turbo V 1K Got k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben felmer lhet forduljon a helyi szolg ltat si irod hoz A Special Turbo V 1K G kicsomagol sakor gyeljen arra hogy ne ejtse le s ne tegye ki b rmilyen hirtelen t snek vagy r zk d snak Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak G zkivon si probl m k elker l s re ne rjen puszta k zzel a v kuumnak kitett r szegys gekhez Mindig viseljen v d keszty t vagy m s alkalmas v d felszerel st A k rnyezetnek val norm l kitetts g nem tudja k rositani a Special Turbo V 1K Got M gis aj nlatos z rva tartani a rendszerbe val telepit sig igy megakad lyozva a por ltali szennyez d s b rmely form j t Special Turbo V 1K G User Manual 87 901 006 01 A 139 258 11 Felhaszn l i K zik nyv Telep t s FIGYELEM Abra 1 Ne telep tse valamint ne haszn lja a szivatty t atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban
59. Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschlage zu vermeiden und den Anforderungen der EG Richtlinien zu entsprechen Die Hochspannungen die sich im Controller entwickeln k nnen zu schweren Sch den oder zum Tod f hren Vor den Wartungsarbeiten innerhalb der Einheit die Stromkabel trennen Not Aus Wartung Zur Stillsetzung von Mod Special Turbo V 1K G in Notsituationen ist vom Controller das Netzkabel abzuziehen Die Special Turbo V 1K G erfordert keine Wartung Eventuelle Eingriffe d rfen nur von autorisiertem Fachpersonal ausgef hrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe iiber Offnung des entsprechenden Ventils beliiften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekte System zur Verf gung stellt Special Turbo V 1K G User Manual 87 901 006 01 A 37 258 2 Gebrauchsanleitung Bevor Fa Agilent ein System zur Reparatur oder den Umtauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Bea
60. Model 969 9834 242 Vent Device Model 969 9831244 Purge Valve Installation 245 Serial Cable Installation 247 Special Turbo V 1K G Navigator Controller Installation 247 Bottom Mounting 248 Fore Vacuum Pump Connection 249 Electrical Connection 249 Pump Used with Corrosive Gases 250 Pump Used in Presence of Magnetic Fields 251 Accessories and Spare Parts 252 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Pump Description The pump consists of a high frequency motor driving a turbine The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stators are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by the corresponding rotor discs These are made of aluminium alloy During normal operation the motor is fed with a voltage of 56 Vrms three phase at 750 Hz To reduce losses during start up to a minimum the frequency increases according to a ramp with a higher initial voltage frequency ratio The pump must be always water cooled using the dedicated channels on the pump body Minimum required w
61. Personal nicht autorisierten Eingriffen und Mifsachtung der nationalen einschl gigen Normen tibernimmt die Firma Agilent keinerlei Haftung Die Special Turbo V 1K G ist eine Turbomolekularpumpe fiir Hoch und H chstvakuum Anwendungen Die Pumpe eignet sich fiir die F rderung aller Arten von Gasen oder gashaltigen Gemischen ist jedoch nicht f r die F rderung von Fl ssigstoffen oder Festpartikeln geeignet Die Pumpwirkung wird durch eine hochtourige Turbine max 45 000 1 min erreicht die von einem Hochleistungsdrehstrommotor angetrieben wird Die Special Turbo V 1K G enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch fiir Anwendungen die ein sauberes Vakuum erfordern Wenn sie mit dem Navigator Controller genutzt wird verf gt die Pumpe des weiteren uber Zusatzanschl sse ber die ein zusatzlicher Ventilator versorgt das Entluftungsventil gesteuert oder die Vorrichtung von einem Host Computer tiber eine serielle Leitung gesteuert werden kann RS232 RS485 In den folgenden Abschnitten sind alle erforderlichen Informationen fiir die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten Special Turbo V 1K G User Manual 87 901 006 01 A 29 258 2 Gehrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgendermafsen hervorgehoben Die Warnhinweise lenken die Aufmerksamkeit
62. Protection fuse 1x6 3A Compliance with UNI EN 292 1 UNI EN 292 2 EN 55011CI A EN 61000 4 2 EN 61000 4 3 EN 61000 4 4 EN 61000 4 5 EN 61010 1 EN 1012 2 Power cable With European or NEMA plug 3 meters long optional Serial communication Navigator kit RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional Installation category Il Pollution degree 2 Storage temperature 20 C to 70 C Weight kg Ibs ISO 160 flange 26 8 59 1 Navigator Controller 5 4 12 When the Special Turbo V 1K G has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature 212 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Special Turbo V 1K G outline The following figures show the Special Turbo V 1K G outlines dimensions are in inches mm MENT Turbo V 1K G t oTurbo V 1K G lin Ex lt T WATEI IT 7 za gt 5 vel 1 m 5 ELINE KF25 An D 5 TE DI E KL ELECTRICAL a CONNECTOI E 139 00 135 67 FORELINE KF25 1 ELECTRICAL CONNECTOR LI Figure 3 869 8961 ISO 160 F inlet flange KF25 foreline flange Special Turbo V 1K G User Manual 87 901 006 01 A 213 258 17 T
63. Special Turbo V 1K G Pump model 869 8961 Controller model 969 8978M002 Manuale di istruzioni Instruksjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l i k zik nyv Manual de istrucciones Podrecznik instrukcji Manual de istruc es N vod k pouziti Bedrijfshandleiding Navod na obsluhu Istrukstionsbog Prirocnik za navodila Bruksanvisning User Manual 87 901 006 01 A 04 2011 E Agilent Technologies Notices O Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 006 01 A Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not
64. Special Turbo V 1K G en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8900 Nm en torno a su propio eje Special Turbo V 1K G User Manual 87 901 006 01 A 57 258 4 Manual de istrucciones En la siguiente tabla se indican respecto de la brida ISO 160 F la cantidad de tornillos necesarias y el par de apriete con el cual fijarlas Tab 1 BRIDA N PAR DE APRIETE ISO 160 F 8 5 Nm En el caso de las bridas F los tornillos de acero deben ser de clase gt 8 8 Special Turbo V 1K G puede instalarse en cualquier posici n La Special Turbo V 1K G no puede fijarse utilizando su base ATENCI N La Special Turbo V 1K G pertenece a la segunda categoria de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a La Special Turbo V 1K G tiene conectores para las entradas salidas y para la comunicaci n serial que deben ser conectados a los circuitos externos de manera que ninguna parte bajo tensi n quede accesible Controlar que el aislamiento del dispositivo conectado a la Special Turbo V 1K G mantenga una acci n aisladora incluso en caso de verificarse una aver a de conformidad con lo establecido por la normativa EN 61010 1 Para instalar los accesorios opcionales v ase Technical Information 58
65. Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 901 006 01 A Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service
66. V 1K G Para parar la Special Turbo V 1K G es suficiente desenchufarlo de la corriente El controller detiene inmediatamente la bomba Special Turbo V 1K G User Manual 87 901 006 01 A Manual de istrucciones 4 Para seguridad del operador el controller Turbo V debe ser alimentado con cable de alimentaci n de 3 hilos v ase tabla de partes disponibles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provocar graves dafios o incluso resultar fatales Desconectar el cable de alimentacion antes de ejecutar las operaciones de mantenimiento en el interior de la unidad Parada de Emergencia Para detener en condiciones de emergencia la Special Turbo V 1K G es necesario desconectar del controller el cable de alimentaci n Mantenimiento Special Turbo V 1K G no necesita ningin mantenimiento Cualquier operacion deber ser realizada por personal autorizado Antes de realizar cualquier operacion en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la valvula oportuna esperar hasta que el rotor se pare completamente y esperar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de averia se podra utilizar el servicio de reparaci
67. a na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem z novim Preden odnesete sistem na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je prilo en navodilom in ga poslati lokalni prodajni pisarni Preden ga po ljete morate kopijo obrazca vstaviti v embala o sistema V kolikor je potrebno sistem odlo iti med kosovne odpadke ga je treba odstraniti v skladu z dolo enimi nacionalnimi standardi Special Turbo V 1K G User Manual 87 901 006 01 A 193 258 15 Priro nik za Navodila Odlaganje opadkov 194 258 Pomen oznake WEEE na etiketah Omenjeni znak je v skladu z direktivo ES pod imenom WEEE Ta znak ki velja le v drzavah Evropske Skupnosti pomeni da izdelek ne smemo odstraniti skupaj z ostalimi komunalnimi oziroma industrijskimi odpadki temve v skladu z dolo ili za odlaganje posebnih odpadkov Zato je potrebno da se uporabnik e pri sklenitvi kupoprodajne pogodbe seznani pri prodajalcu o postopkih posebnega odlaganja oziroma lo evanja NEX IX s XK Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 196 Ge
68. ad samostatnej chyby pod a smernice EN 61010 1 178 258 Special Turbo V 1K G User Manual 87 901 006 01 A Pouzitie NEBEZPE IE N vod na Obsluhu 14 T to as popisuje z kladn sp soby pou itia zariadenia Sk r ne za nete syst m pou va zapojte v etky elektrick a pneumatick pripojenia Teplota vstupnej pr ruby po as zahrievania v kuovej komory nesmie prekro i 80 C Nikdy nepou vajte turbov vevu ak vstupn pr ruba nie je pripojen k v kuovej komore V priebehu zahrievania sa nikdy nedot kajte turbov vevy ani iadneho pr slu enstva Vysok teploty m u sp sobi pop leniny Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu alebo inertn ho plynu zbaven ho prachu a ast c Tlak na preplachovacom vstupe mus by ni ne 2 bar pretlakov V vevy s vybaven peci lnym vstupom na vy erp vanie agres vnych plynov ktor umo uj stabiln tok inertn ho plynu napr klad Nz Ar kv li ochrane lo sk v vevy pozri dodatok Technical Information NEBEZPE IE Ak v vevu pou vate na vy erp vanie toxick ch hor av ch alebo r dioakt vnych plynov dodr iavajte pros m po adovan postupy pre likvid ciu jednotliv ch plynov Nepou vajte v vevu v pr tomnosti v bu n ch plynov Special Turbo V 1K G Us
69. alizar operac es de manutenc o no interno da unidade desligar o cabo de alimentac o Paragem de Emerg ncia Para deter a Special Turbo V 1K G em condic es de emerg ncia necessario desligar do controller o cabo de alimentac o Manutencao A Special Turbo V 1K G n o requer qualquer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado Antes de executar qualquer opera o no sistema desliga lo da alimentacao introduzir ar na bomba abrindo a valvula especifica aguardar at a completa paragem do rotor e at que a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito possivel usufruir do servi o de assistencia Agilent ou do Agilent advanced exchange service gue permite obter um sistema regenerado gue substitua a bomba com defeito Special Turbo V 1K G User Manual 87 901 006 01 A 13 258 5 Manual de Istru es Antes de reenviar ao fabricante um sistema para as reparac es ou o advanced exchange service indispensavel preencher e enviar ao escrit rio de vendas local a ficha Seguranca e Sa de anexa ao presente manual de instruc es A copia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso uma bomba deva ser destruida proceder sua elimina o respeitando as normas nacionais especificas Eliminacao 74 258 Significado do log tipo WEEE presente nos r tulos O simbolo abaixo indicado aplicado de a
70. alkalmazni A Special Turbo V 1K G bekapcsol s hoz r kell kapcsolni a t pfesz lts get A be p tett vez rl automatikusan felismeri a kapcsolatot s a start jel jelenl t t s elind tja a szivatty t Az els szivatty ind t s l gy ind t s m dban t rt nik Amikor az ind t si ciklus befejez dik a l gy ind t s m d automatikusan tiltva van s a k vetkez ind t sok l gy ind t s m d n lk l t rt nnek A l gy ind t s m d jb li enged lyez s hez azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 KOMMUNIK CI LE R SA a Technical Information f ggel kben A Navigator controller alapj n elhelyezett z ld LED a villog s nak gyakoris g val jelzi a rendszer zemi k r lm nyeit nem villog sn l a szivatty rendesen forog lassan villog kb 400 ms peri dus a rendszer emelked ben f kez sben ll s vagy kapcsolatra v r llapotban van gyorsan villog kb 200 ms peri dus hibafelt tel A Special Turbo V 1K G kikapcsol sa A Special Turbo V 1K G kikapcsol s hoz egyszer en le kell kapcsolni a t pfesz lts get A be p tett vez rl azonnal le ll tja a szivatty t 144 258 Special Turbo V 1K G User Manual 87 901 006 01 A Felhaszn l i K zik nyv 11 VESZELY A g pkezel biztonsaga rdek ben a Turbo V vez rl egys get haromeres bet pk bellel kell ell tni lasd a megrendelhet alkatr sz
71. amsvarserkl ringen pige Agilent Technologies 111 258 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl r Pumper Turbomolekyl r pumpene som er beskrevet i den f lgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller brudd p rotoren kan roteringsenergien bli frigitt UVA For unng skader p utsyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manaulen f lges n ye 112 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent f r utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer p grunn av manglende oppf lging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som p noen m te er i strid med nasjonale bestemmelser Special Turbo V 1K G er en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuum Pumpen kan pumpe nesten alle typer gass eller gassforening Det er ikke egnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 450
72. ater flow is 200 1 h and the water temperature must be between 10 C and 30 C Select WATER COOLING setting WIN 106 1 if the water temperature is lt 25 C in this case the max power is 350 W Select AIR COOLING setting WIN 106 0 if the water temperature is 25 C lt T lt 30 C in this case the max power is 300 W A thermistor sensor is mounted near the upper bearing to prevent the pump from overheating The pump is balanced after assembly with a residual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 NW flange Special Turbo V 1K G User Manual 87 901 006 01 A 209 258 17 Technical Information 969 8978M002 Controller Description The dedicated controller is a solid state frequency converter which is driven by a single chip microcomputer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase output converts the single phase AC mains supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection A Windows based software is available optional 210 258 Special Turbo V 1K G User Manual 87 901 006 01 A Te
73. ati adiacenti Fissare la Special Turbo V 1K G in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 8900 Nm attorno al proprio asse La seguente tabella descrive per la flangia ISO 160 F il numero di viti necessarie e con quale coppia di serraggio stringerle Special Turbo V 1K G User Manual 87 901 006 01 A 21 258 1 Istruzioni per l uso Tab 1 FLANGIA N COPPIA DI SERRAGGIO ISO 160 F 8 5 Nm Per le flange F le viti in acciaio devono essere di classe gt 8 8 La Special Turbo V 1K G pu essere installata in qualsiasi posizione La Special Turbo V 1K G non pu essere fissata tramite la sua base Fatal La Special Turbo V 1K G con Navigator controller appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere guindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria La Special Turbo V 1K G ha dei connettori per gli ingres si uscite e per la comunicazione seriale che devono esse re connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso alla Special Turbo V 1K G abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 Per l installazione degli accessori opzionali vedere Technical Information 22
74. aufsstelle zu melden Die Special Turbo V 1K G ist vorsichtig auszupacken wobei sie vor dem Herunterfallen zu sch tzen ist und nicht Stof en und Vibrationen ausgesetzt werden darf Das Verpackungsmaterial ist vorschriftsgem fs zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz VORSICHT Um Entgasungen zu vermeiden diirfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefa t werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Das Modell Special Turbo V 1K G kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden Special Turbo V 1K G User Manual 87 901 006 01 A 31 258 2 Gehrauchsanleitung Abbildung 1 Installation Die Pumpe darf nicht in Umgebungen die ungesch tzt vor Wetter Regen Frost Schnee Staub und aggressiven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb mussen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 35 C siehe Diagramm im Anhang Technical Information Relative Luftfeuchtigkeit O 95 nicht kondensierend VORSICHT Das Klebeband abziehen und den S
75. bela prikazuje za prirobnico ISO 160 F tevilo potrebnih vijakov ter potreben navor za pritrjevanje Special Turbo V 1K G User Manual 87 901 006 01 A 189 258 15 Priro nik za Navodila Tab 1 PRIROBNICA N NAVOR ISO 160 F 8 5 Nm Razred jeklenih vijakov za F prirobnico mora biti gt 8 8 Special Turbo V 1K G lahko namestite v poljuben polo aj Special Turbo V 1K G ne morete pritrditi z njegovo lastno spodnjo ploskvijo Po direktivi EN 61010 1 spada Special Turbo V 1K G z Navigator controller v drugo kategorijo za name anje ali prekovolta o Napravo priklju ite na napetost ki je v skladu z zgornjo kategorijo Naprava Special Turbo V 1K G ima vhodne izhodne in serijske priklju ke ki jih je treba povezati na zunanja vezja tako da noben elektri ni del ni dosegljiv Prepri ajte se da je izolacija naprave priklju ene na Special Turbo V 1K G primerna tudi v primeru ene napake kot je opisano v direktivi EN 61010 1 190 258 Special Turbo V 1K G User Manual 87 901 006 01 A Uporaba Priro nik za Navodila 15 Ta odstavek opisuje osnovne postopke za uporabo Pred uporabo sistema pove ite vse elektri ne in pnevmatske povezave Pri segrevanju vakuumskega le i a temperatura dovodne prirobnice ne sme prese i 80 C SVARILO Turbo rpalke ne uporabljajte e dovodna prirobnica ni priklju ena na vakuumsko le i e Tekom segrevanja se turbo rpalke ali njenih delov ne dotikajt
76. bienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali a pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 35 C vedere grafico nel appendice Technical Information umidit relativa 0 95 non condensante aia Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema 20 258 Special Turbo V 1K G User Manual 87 901 006 01 A Istruzioni per l uso 1 Figura 2 In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli La Special Turbo V 1K G deve essere collegata ad una pompa primaria vedere schema in Technical Information Fissaggio della pompa AVVERTENZA Se si verifica un danno al rotore la connessione tra la pompa ed il sistema potrebbe essere sottoposta ad una coppia significativa Se la connessione non sufficiente per resistere alla suddetta coppia la pompa potrebbe staccarsi dal sistema o il motore potrebbe staccarsi dall involucro della pompa In questo caso frammenti di metallo potrebbero essere proiettati dalla pompa o dal sistema i quali potrebbero causare seri danni o la morte e o danni agli appar
77. bo V 1K G pou itou v kombinaci se zarizenim Navigator controller Pro uvedeni vyv vy Special Turbo V 1K G do provozu je nutn priv st sitov nap ti Integrovany regulator automaticky zjistuje blokovani pritomnost spou t cich signalu a uvede vyv vu do provozu Prvni spu t ni vyv vy je v re imu pozvoln ho rozb hu Jakmile bude rozb hovy cyklus dokon en re im pozvoln ho rozb hu se automaticky vypne a dal i starty ji budou probihat bez pozvoln ho rozb hu Chcete li op t zapnout re im pozvoln ho rozb hu musite jej aktivovat pat i n m programov m p kazem viz odstavec POPIS KOMUNIKACE RS 232 485 v p loze Technical Information Zelen kontrolka um st n na eln m panelu za zen Navigator controller indikuje provozn stavy syst mu blik n m bez blik n vyv va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo brzd nebo stoj nebo je ve stavu ek n na blokov n rychl blik n interval cca 200 ms poruchov stav Zastaven Special Turbo V 1K G Pro zastaven Special Turbo V 1K G je nutn p eru it s ov nap t Vestav n regul tor v v vu okam it zastav 168 258 Special Turbo V 1K G User Manual 87 901 006 01 A Navod k Pouziti 13 NEBEZPE Pro zaji t n bezpe nosti obsluhy mus b t regul tor erpadla Turbo V nap jen troj ilovym privodnim kabe
78. breekt kan de rotatie energie vrijkomen WAVE a TIN AN Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 76 258 Special Turbo V 1K G User Manual 87 901 006 01 A Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving De Special Turbo V 1K G is een turbomoleculaire pomp voor hoge en ultrahoge vacu mtoepassingen De pomp is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 45 000 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement De Special Turbo V 1K G is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een schoon vacu m verlangen Indien gebruikt met de Navigator controller is de pomp bovendien van hulpconnectors
79. cal pump must be eliminated through the use of bellows The Special Turbo V 1K G pump is characterized by its high compression ratio also for oil vapors When using a mechanical oil sealed pump it is advisable to install a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil backstreaming Electrical Connection Figure 38 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KO resistance at 25 C and pin E is connected to the pump ground pins G and H are not connected If the temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply Special Turbo V 1K G User Manual 87 901 006 01 A 249 258 17 Technical Information Pump Used with Corrosive Gases To prevent damage to the bearings an inert gas must flow into the pump body around the upper bearing towards the forevacuum line To supply the inert purge gas e g nitrogen to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar l s To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 20 sccm 0
80. cciones de instalaci n descritas en el presente manual 52 258 Special Turbo V 1K G User Manual 87 901 006 01 A Manual de istrucciones 4 Informacion general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informacion suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de posibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales espec ficas Special Turbo V 1K G es una bomba turbomolecular para aplicaciones de alto y ultra alto vacio La bomba puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuada para bombear liquidos o particulas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 45000 r p m max movida por un motor el ctrico trifasico de alto rendimiento Special Turbo V 1K G no posee ningun agente contaminante y por lo tanto es adecuada para aplicaciones que requieren un vacio limpio Asimismo cuando se utiliza con el Navigator la bomba posee conectores auxiliares con los que se puede alimentar un ventilador adicional accionar la v lvula de ventilaci n pilotarla a distancia con un ordenador host conectado mediante linea serial RS 232 RS 485 A continuaci n se facilita toda
81. chem Anzugsmoment sie festzuziehen sind Tab 1 FLANSCH ANZ ANZUGSMOMENT ISO 160 F 8 5 Nm Die Special Turbo V 1K G kann in jeder beliebigen Position installiert werden Die Special Turbo V 1K G kann nicht mittels ihres Sockels befestigt werden VORSICHT Die Special Turbo V 1K G mit Navigator Controller geh rt zur zweiten Installationsklasse Uberdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung angeschlossen werden die dieser Kategorie entspricht Die Special Turbo V 1K G hat Verbinder fir den Ein und Ausgang und die Schnittstellenkommunikation die an die AuBenkreise angeschlossen werden missen sodaf kein Teil unter Spannung zug nglich ist Sicherstellen da die Isolierung der an die Special Turbo V 1K G angeschlossenen Vorrichtung auch bei einer Einzelst rung ausreichend isoliert wie es von der Richtlinie EN 61010 1 vorgesehen wird 34 258 F r die Installation der Optionsteile siehe im Anhang Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A Gebrauch Gebrauchsanleitung 2 In diesem Abschnitt werden die wichtigsten Betriebsvorg nge erl utert Vor Benutzung des Systems sind alle elektrischen und pneumatischen Anschl sse auszufilhren W hrend der eventuellen Aufheizung der Vakuumkammer darf die Temperatur am Eingangsflansch 80 C nicht tiberschreiten Die Pumpe darf nicht in Betrieb genommen werden wenn der Eingang
82. chnical Information 17 Technical Specification Tab 2 Pumping speed without inlet screen Ar 750 l s Nz 810 l s He 950 I s H2 680 I s Compression ratio Ar gt 5 x 108 Nz gt 1 x 108 He 1 x 105 H2 2 x 104 Base pressure with recommended lt 1 x 10 10 mbar forepump According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump Inlet flange ISO 160 Forelineflane RE Rotational speed A E Start up time e E Recommended forepump gt 20 m3h TriScroll 600 DS 602 HS 452 HS 652 DD Operating position Any E Operating ambient temperature 500104850000 K Bakeout temperature 80 Catinlet flange max ISO flange Vibration level displacement lt 0 07 um at inlet flange Lubricant pemanentlubricaton 5 Cooling requirements Mater 0 E Coolantwater Minimum flow 200 I h 0 89 GPM 000 Temperature 10 C to 30 C Pressure 3 to 5 bar 45 to 75 psi Noise level lt 45 dB A at 1 meter Special Turbo V 1K G User Manual 87 901 006 01 A 211 258 17 Technical Information Power supply Input voltage 100 240 Vac Input freq 50 60 Hz Max input power 600 VA Stand by power 30 to 35 W Max operating power 350 W with water Temp lt 25 C WATER cooling setting 300 W with water Temp gt 25 C AIR cooling setting
83. chtung der einschl gigen nationalen Vorschriften zu erfolgen Entsorgung 38 258 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstinmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmull entsorgt werden darf sondern einem speziellen Sammelsystem zugefiihrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen geprift hat Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 3 Mode d emploi Consignes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation a l installation 43 Installation 44 Fixation de la pompe 45 Utilization 47 Mise en marche et utilisation de la Special Turbo V 1K G 48 Arr t de la Special Turbo V 1K G 48 Arr t d urgence 49 Entretien 49 Mise au rebut 50 Traduction de la mode d emploi originale pige Agilent Technologies 39 258 3 Mode d emploi Consignes de s curit pour Pompe Turbomol culaires Les pompes Turbomol culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifi
84. chutzdeckel erst bei AnschluB der Turbopumpe an das System abnehmen 32 258 Special Turbo V 1K G User Manual 87 901 006 01 A Gebrauchsanleitung 2 Abbildung 2 Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen Fur ausfiihrliche Informationen siehe im Anhang Technical Information Die Special Turbo V 1K G ist an eine Prim rpumpe anzuschlief en siehe Schema in Technical Information Befestigung der Pumpe WARNUNG Wenn ein Lauferschaden auftritt k nnte die Verbindung zwischen der Pumpe und dem System mit einem erheblichen Drehmoment belastet werden Setzt die Verbindung diesem Drehmoment keinen ausreichenden Widerstand entgegen besteht die M glichkeit dass sich die Pumpe vom System oder der Motor vom Pumpengeh use l st In diesem Fall k nnten Metallsplitter von der Pumpe oder vom System geschleudert werden die schwere Sch den oder den Tod und oder Sch den an benachbarten Ger ten zur Folge haben k nnten Die Special Turbo V 1K G in einer stabilen Position befestigen Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 900 Nm um die eigene Achse standhalten Special Turbo V 1K G User Manual 87 901 006 01 A 33 258 2 Gebrauchsanleitung Die nachstehende Tabelle gibt an f r den Flansch ISO 160 F wieviel Schrauben fiir jeden ISO F Flansch erforderlich sind und mit wel
85. cial Turbo V 1K G User Manual 87 901 006 01 A 217 258 17 Technical Information Tab 3 PINN SIGNAL NAME INPUT OUTPUT 1 START STOP IN 15 GROUND OUT PROGRAMMABLE ANALOG SIGNAL Signal Description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump INTERLOCK input signal to control the pump rotation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin 218 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 amplitude 24 V max duty cycle range from 25 to 75 corresponding to a pump speed from 500 Hz to 750 Hz see the following diagram 800 700 600 400 Excitation Frequency Hz 300 200 50 60 70 80 Duty Cycle Figure 10 The duty cycle percentage is referred to the low level portion of the PWM signal PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc proportional to a reference qua
86. cordo com a directiva CE denominada WEEE Este simbolo valido apenas para os paises da Comunidade Europeia indica que o produto no qual esta aplicado NAO deve ser eliminado juntamente com os residuos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e elimina o ap s a oportuna verifica o dos termos e condi es do contrato de venda N n h v N a Sy Ve Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 76 Algemene informatie 77 Opslag 78 Uitpakken 79 Installatie 80 Bevestiging van de pomp 81 Gebruik 83 Inschakeling en gebruik van de Special Turbo V 1K G 84 Afzetten van de Special Turbo V 1K G 84 Noodstop 85 Onderhoud 85 Afvalverwerking 86 Vertaling van de originele instructies i a Agilent Technologies 75 258 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor
87. d blink a konstant t ndt pumpen er i normal rotation a langsomme blink periode p ca 400 ms systemet er i stilling for acceleration bremsing stop eller Waiting for interlock a hurtige blink periode p ca 200 ms fejl af Special Turbo V 1K G For at afbryde Special Turbo V 1K G er det tilstr kkeligt at afbryde str mtilf rselen Controller en afbryder straks pumpen Special Turbo V 1K G User Manual 87 901 006 01 A Istruktionsbog 7 ADVARSEL For operat rens sikkerhed skal Turbo V controller en str mforsynes med et 3 tr det f dekabel se tabellen over de bestilbare stykker f dekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske st d og opfylde kravene if lge CE EF normerne De h je sp ndinger som udvikles i controller en kan for rsage alvorlige skader eller d den F r der foretages vedligeholdelses operationer inde i enheden skal man koble f dekablet fra N dstop Afbrydelse af Special Turbo V 1K G i n dsituationer sker ved at koble ledningen fra styreenheden Vedligeholdelse Special Turbo V 1K G beh ver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale ADVARSEL Inden der foretages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pum
88. des Bedieners auf eine bestimmte Prozedur oder Praktik die bei unkorrekter Ausfiihrung schwere Verletzungen hervorrufen k nnen VORSICHT Die Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden Lagerung 30 258 Um ein H chstmaf an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C a Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum Special Turbo V 1K G User Manual 87 901 006 01 A Gebrauchsanleitung 2 TT bo Falls die Lagerdauer aus verschiedentlichen Gr nden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter Vor der Installation Die Special Turbo V 1K G wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verk
89. dlaganje opadkov 194 Prevod navodil v izvirniku 5 Agilent Technologies 183 258 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje opisanim v tem priro niku 184 258 Special Turbo V 1K G User Manual 87 901 006 01 A Priro nik za Navodila 15 Splosne Informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik natan no prebrati navodila in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupoStevanja teh navodil nepravilne uporabe s strani nepoobla enega osebja in nedovoljenega poseganja v opremo ali kakr nekoli uporabe ki ni v skladu s standardi Special Turbo V 1K G je turbomolekularna rpalka za visoko in ultra visoko vakuumsko uporabo rpalka lahko rpa vse tipe plinov ali plinskih zmesi vendar ni primerna za rpanje teko in ali trdnih delcev rpanje se izvaja preko vrtljive turbine z visoko hitrostjo maks 45000 rpm ki jo premika visoko u inkovit
90. e Visoka temperatura lahko povzro i opekline Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali inertni plin brez prahu ali delcev Pritisk na oddu niku mora biti manj i od 2 bara nad pritiskom atmosfere Za rpanje agresivnih plinov so te rpalke opremljene s priklju kom ki omogo a stalen pretok inertnih plinov kot Nz Ar za za ito nosilcev glej prilogo Technical Information SVARILO Ko rpalko uporabljate pri rpanju strupenih vnetljivih ali radioaktivnih plinov sledite zahtevanim navodilom za odstranjevanje vsakega plina rpalke ne uporabljajte v prisotnosti eksplozivnih plinov Special Turbo V 1K G User Manual 87 901 006 01 A 191 258 15 Priro nik za Navodila Vklop in uporaba naprave Special Turbo V 1K G Slede a navodila veljajo pri uporabi Special Turbo V 1K G v kombinaciji z Navigator controller Za vklop Special Turbo V 1K G je dovolj e dovajanje napajalne napetosti Vgrajeni controller avtomatsko zazna prisotnosti signalov za spajanje in zagon ter za ene rpalko Prvi zagon rpalke je v na inu mehkega zaganjanja Soft Start Ko se za etni cikel zaklju i se na in Soft Start samodejno izklopi in naslednji zagoni so izvedeni brez na ina Soft Start Za ponovno aktiviranje Soft Start zagona je potreben ustrezen programski ukaz glej odstavek Opis komu
91. e n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato 114 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instruksjon Manual 9 IS ere Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon Klargj re til installasjon Special Turbo V 1K G leveres i en spesiell beskyttelsesemballasje Viser denne tegn p skader som kan ha oppst tt under transporten m du ta kontakt med det lokale salgskontoret N r Special Turbo V 1K G pakkes ut m du se til at det ikke slippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse ae Fora unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Normale milj messige belastninger kan ikke delegge Special Turbo V 1K G Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving Special Turbo V 1K G User Manual 87 901 006 01 A 115 258 9 Instruksjon Manual Figur 1 Installasjon FORSIKTIG Ikke installer eller bruk systemet i milj er som utsettes for regn
92. echnical Information Special Turbo V 1K G outline 1100 1000 900 800 S 700 600 Qa o 2 500 Qa E 400 a 300 200 100 0 1 10 107 10 105 10 103 102 101 1 Inlet Pressure mbar Figure 4 Pumping speed diagram for 869 8961 turbopump model with a 20 m3 h foreline pump Compression Ratio 102 101 1 10 10 Foreline Pressure mbar Figure 5 Graph of compression ratio vs foreline pressure 214 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Interconnections The following figure shows the Special Turbo V 1K G interconnections with Navigator controller Technical information described in the following paragraphs refer to the standard Navigator controller model 969 8978 Compared to standard model 969 8978 controller model 969 8978M002 has the following special characteristics The unit has been provided with a special software release in order to drive a Special Turbo V 1K G pump A specific accessory bag has been enclosed to this modified unit The controller External Fan Output connector P4 has been modified in order to drive the special vent valve 969 9831M001 The serial window Win112 controls both the fail and the set point output this in order to drive a normally open purge valve The normally open purge valve shou
93. edia po as prevozu pren ania a uchov vania v vev a rozsah tepl t 20 C a 70 C a rozsah relat vnej vlhkosti O a 95 bez kondenz cie z kazn k mus pri prvom spusten turbo v vevy v dy pou i re im soft tartu skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania 174 258 Special Turbo V 1K G User Manual 87 901 006 01 A N vod na Obsluhu 14 Ak z ak hokolvek dovodu wypr i as skladovatelnosti zariadenia vr tte vyvevu do zavodu v ktorom bola vyroben Inform cie ziskate u miestneho zastupenia spolo nosti Agilent pre predaj a servis Priprava na in talaciu POZOR Special Turbo V 1K G je dod van v peci lnom ochrannom balen Ak je balenie po koden o sa m e sta napr klad po as prepravy obr te sa na miestne zast penie spolo nosti Agilent Pri vyba ovan d vajte pozor aby Special Turbo V 1K G nespadla a nevystavujte ju n hlym n razom otrasom alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a spi a po iadavky smernice EEC 85 399 Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Special Turbo V 1K G se nem e po kodi t m e zostane jednoducho vystaven atmosf rick m vplyvom Napriek tomu je vhodn aby zariadenie zostalo zaba
94. efault 0 504 R W L Serial type select 0 RS 232 1 RS 485 default 0 Special Turbo V 1K G User Manual 87 901 006 01 A 235 258 17 Technical Information 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by means of window n 122 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP OVERVOLTAGE CONTROLL OVERTEMP AUX FAIL POWER FAIL Figure 19 Window N 206 Bit Description 236 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Inlet Screen Installation Figure 20 The inlet screen mod 969 9302 prevents the blades of the pump from being damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 21 The screen can be mounted on each pump The screen can be removed as shown in the following figure Special Turbo V 1K G User Manual 87 901 006 01 A 237 258 17 Technical Information Figure 22 The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange ISO 160F
95. ei ole p ly tai hiukkasia Erityisen aukon l pi sy tett v n paineen tulee olla alle 2 baaria yli atmosf risen paineen Pumput on varustettu aggressiivisten kaasujen pumppausta varten aukolla jonka l pi pumppuun kuljetetaan jalokaasuja typpi tai argon laakereiden suojaamiseksi katso Technical Information liite VAROITUS Kun pumppua k ytet n myrkyllisten paloherkkien tai radioaktiivisten kaasujen pumppaamiseen noudattakaa jokaiselle kaasulle sopivaa menettelytapaa lk k ytt k pumppua r j hdysherkkien kaasujen l hell Special Turbo V 1K G User Manual 87 901 006 01 A 131 258 10 Ohjek sikirja Special Turbo V 1K Gin k ynnistys ja k ytt Seuraavat ohjeet koskevat Special Turbo V 1K G pumppua kun sit k ytet n yhdess Navigator controller ohjaimen kanssa Special Turbo V 1K Gin k ynnistykseen riitt ett se kytket n s hk verkkoon Sis nrakennettu valvoja tunnistaa automaattisesti lukitus ja k ynnistyssignaalit ja k ynnist pumpun Pumpun ensimm inen k ynnistys tapahtuu Soft Start menetelm ll joka inaktivoituu automaattisesti k ynnistysjakson j lkeen Siten pumpun seuraavat k ynnistykset tapahtuvat ilman Soft Start toimintoa Jotta k ynnistys voitaisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu tapa aktivoida uudelleen ohjelmiston kautta ks kappale RS 232 VIESTINNAN KUVAUS Technical Informatio
96. ek tablazatat ami egyik v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g ami az ellen rz egys gben keletkezik s lyos s r l seket s t hal lt okozhat Miel tt az egys g belsej ben karbantart si munk t v gezne kapcsolja le az egys gr l a t pfesz lts g szolg ltat k belt V szle ll t s A Special Turbo V 1K G v szhelyzetben val azonnali le ll t s hoz ki kell h zni a t pk belt a h l zati dugaszb l Karbantart s A Special Turbo V 1K G nem ig nyel karbantart st A rendszeren v gzett b rmely munk t arra jogosults ggal rendelkez szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n kapcsolatba l phet a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Special Turbo V 1K G User Manual 87 901 006 01 A 145 258 11 Felhaszn l i K zik nyv Miel tt jav t sra vagy cser re visszak ldi a rendszert
97. eleg t se k zben a bemeneti szelep h m rs klete nem haladhatja meg a 80 C ot VESZ LY Soha ne haszn lja a turb szivatty t amikor a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folyamat k zben Magas h m rs klet g st okozhat FIGYELEM Ker lje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg t vagy k z mb s g zt a szivatty szell ztet s hez A szell z porton l v nyom snak 2 barn l kisebbnek kell lennie a l gk ri nyom s f l tt Agressz v g zok szivatty z s hoz ezek a szivatty k fel vannak szerelve egy k l nleges porttal hogy lehet v tegy k k z mb s g z pl N2 Ar stabil raml s t v delmet visel szivatty sz m ra l sd Technical Information f ggel k VESZ LY Amikor a szivatty t m rgez gy l kony vagy radioakt v g zok szivatty z s ra haszn lja k rem k vesse az egyes g zok rtalmatlan t s hoz sz ks ges elj r sokat Ne haszn lja a szivatty t robban g zok jelenl t ben Special Turbo V 1K G User Manual 87 901 006 01 A 143 258 11 Felhaszn l i K zik nyv A Special Turbo V 1K G bekapcsol sa s haszn lata Az al bbi utas t sokat a Navigator controllerrel egy tt haszn lt Special Turbo V IK G eset ben kell
98. else 97 Bortskaffelse 98 Bruksanvisning 99 S kerhetsanvisningar f r Molekyl ra turbopumpar 100 Allm n Information 101 F rvaring 102 F rberedelser f r installationen 103 Installation 104 Fasts ttning av pump 105 Anvandning 107 Underh ll 109 Bortskaffning 110 Instruksjon Manual 111 Sikkerhetsanvisninger for Turbomolekyl r Pumper 112 Generell informasjon113 Lagring 114 Special Turbo V 1K G User Manual 87 901 006 01 A Contents Klargj re til installasjon 115 Installasjon 116 Festing av pumpen 117 Bruk 119 Vedlikehold 121 Eliminering 122 10 Ohjek sikirja 123 Turbomolekyylipumppujen Turvaohjeet 124 Yleisi Tietoja 125 Varastointi 126 Valmistelut asennusta varten127 Asennus 128 Pumpun kiinnitys 129 K ytt 131 Huolto 133 H vitt minen 134 11 Felhaszn l i K zik nyv 135 Biztons gi tmutat Turb molekul ris szivattyukhoz 136 ltal nos inform ci k 137 T rol s 138 El k szit s telepit sre 139 Telepit s 140 Special Turbo V 1K G User Manual 87 901 006 01 A 9 258 Contents 10 258 12 13 A szivatty r gzit se 141 Haszn lat 143 Karbantart s 145 Megsemmisit s 146 Podrecznik Instrukcji 147 Wskazowki dotyczace bezpieczenstwa dla Pomp Turbomolekularnych 148 Og lne Informacje 149 Magazynowanie 150 Przygotowanie do instalacji 151 Instalacja 152 Mocowanie pompy 153 Uzytkowanie 155 Konserwacja 157 Przetworstwo odpadow 158 N vod k Pouziti
99. elve 8900 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal Special Turbo V 1K G User Manual 87 901 006 01 A 141 258 11 Felhaszn l i K zik nyv A k vetkez t bl zat az ISO 160F karim hoz megmutatja a csavarok sz ks ges sz m t s a hozz tartoz r gz t nyomat kot Tab 1 KARIMA N ROGZITES NYOMATEKA ISO 160 F 8 5 Nm Az F karima ac lcsavarjai oszt ly nak gt 8 8 nak kell lennie A Special Turbo V 1K G barmely helyzetben telepithet A Special Turbo V 1K G nem r gzithet az alapjan keresztiil FIGYELEM A Navigator controlleres Special Turbo V 1K G a masodik telepit si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direktiva szerint Csatlakoztassa az eszk zt a fenti kateg ri nak megfelel h l zathoz A Special Turbo V 1K Gnak olyan bemeneti kimeneti s soros kommunik ci s csatlakozasai vannak amelyeket gy kell k ls ramk r kh z csatlakoztatni hogy elektromos r szek ne legyenek hozz f rhet k Gy z dj n meg r la hogy a Special Turbo V 1K Ghoz csatlakoztatott eszk z megfelel egyes hiba eset n is az RN 61010 1 direkt va szerint 142 258 Special Turbo V 1K G User Manual 87 901 006 01 A Haszn lat Felhaszn l i K zik nyv 11 Ez a bekezd s r szletezi az alapvet zemeltet si elj r sokat V gezze el az sszes elektromos s pneumatikus csatlakoztat st a rendszer haszn lata el tt A v kuumkamra m
100. en avbryter omedelbart pumpens funktion Special Turbo V 1K G User Manual 87 901 006 01 A Bruksanvisning 8 VARNING F r operat rens s kerhet bor Turbo V systemet vara anslutet med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av styrenheten kan orsaka personskador eller till och med d da Dra d rf r alltid ur str mkabeln innan eventuella underh llsarbeten utf rs inuti enheten N dstopp Dra ut elsladden fr n styrenheten f r att utf ra ett n dstopp av Special Turbo V 1K G Underh ll Special Turbo V 1K G r underh llsfritt Allt servicearbete m ste utf ras av auktoriserad personal VARNING Innan n got arbete utf rs p systemet m ste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre an 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renoverat system Special Turbo V 1K G User Manual 87 901 006 01 A 109 258 8 Bruksanvisning Innan systemet l mnas in till tillverkaren f r reparation eller utbyte mot en renoverad enhet m ste h
101. er Manual 87 901 006 01 A 179 258 14 N vod na Obsluhu Zapnutie a pouzitie zariadenia Special Turbo V 1K G Nasleduj ce pokyny sa aplikuj na Special Turbo V 1K G pou it v kombin cii so zariaden m Navigator controller Ak chcete zapn zariadenie Special Turbo V 1K G mus te ho pripoji ku zdroju nap jania Integrovan kontroln modul automaticky rozpozn pr tomnos sign lov spojenia a spustenia a zapne v vevu Prv spustenie v vevy prebehne v re ime Soft Start Jemn tart Po dokon en sp acieho cyklu sa re im Soft Start automaticky zablokuje a v etky nasleduj ce spustenia zariadenia prebehn bez re imu Soft Start Ak chcete re im Soft Start odblokova mus te ho aktivova vhodn m softwarov m pr kazom pozri as RS 232 485 COMMUNICATION DESCRIPTION Popis komunik cie v dodatku Technical Information Zelen di da LED na z kladnom elnom paneli zariadenia Navigator controller Special Turbo V 1K G indikuje frekvenciou blikania sp sob innosti syst mu iadne blikanie v veva norm lne rotuje pomal blikanie interval asi 400 ms syst m je v niektorom z t chto stavov st panie klesanie brzdenie Stop alebo Cakanie na spojenie r chle blikanie interval asi 200 ms chybov stav Zastavenie Special Turbo V 1K G Ak chcete zastavi Special Turbo V 1K G mus te ho odpoji od zdroja nap jania Zabudovan kontroln
102. es de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instru es pelo uso indevido por parte de pessoas n o treinadas por opera es n o autorizadas ou pelo uso contr rio as normas nacionais espec ficas A Special Turbo V 1K G uma bomba turbomolecular para aplica es de alto e ultra alto v cuo A bomba capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequada para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 45660 r p m m x movida por um motor el ctrico trif sico de alto rendimento A Special Turbo V 1K G totalmente isenta de agentes contaminadores e portanto adequada para aplica es que requerem um v cuo limpo Quando usada com o Navigator controller a bomba disp e al m disso dos conectores auxiliares atrav s dos quais poss vel alimentar um ventilador adicional comandar a v lvula de vent accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informa es necess rias para garantir a seguran a do operador durante o uso da aparelhagem Informa es detalhadas s o fornecidas no ap ndice Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 65 258 5 Manual de Istru es Este manual utiliza as seguintes
103. eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 I h The water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested Special Turbo V 1K G User Manual 87 901 006 01 A 241 258 17 Technical Information Vent Accessories The vent valve and vent device allow to avoid undesired venting of the pump during temporary power failure and enables an automatic vent operation Navigator Controller Compatible Vent Valve Model 969 9834 50 mm Figure 28 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To install the vent valve unscrew the threaded plug see figure below 242 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Vent Accessories Figure 29 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2 5 Nm Figure 30 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suitable connector on the controller see the preceding paragra
104. ezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben Special Turbo V 1K G User Manual 87 901 006 01 A 137 258 11 Felhaszn l i K zik nyv Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja VESZ LY A vesz ly zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfelel en s lyos s r l shez vezethet alada ba A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak T rol s A Agilent Turbomolecular szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni a h m rs klettartomany 20 C 70 C a relativ p ratartalom 0 95 nem kondenzal6 A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap a sz ll t s d tum t l 138 258 Special Turbo V 1K G User Manual 87 901 006 01 A FIGYELEM Felhaszn l i
105. f optional accessories see Technical Information 202 258 Special Turbo V 1K G User Manual 87 901 006 01 A Use Instructions for Use 16 This paragraph details the fundamental operating procedures Make all electrical an pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 80 C Never use the turbopump when the inlet flange is not connected to the vacuum chamber Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like Nz Ar for pump bearing protection see the appendix Technical Information When employing the pump for pumping toxic flammable or radioactive gases please follow the required procedures for each gas disposal Do not use the pump in presence of explosive gases Special Turbo V 1K G User Manual 87 901 006 01 A 203 258 16 Instructions for Use Switching on and Use of Special Turbo V 1K G The following instructions apply to the Special Turbo V 1K G used togheter
106. g door stof wordt voorkomen Special Turbo V 1K G User Manual 87 901 006 01 A 79 258 6 Bedrijfshandleiding Installatie VOORZICHTIG Figuur 1 De pomp mag niet geinstalleerd en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk 2 bar boven de atmosferische druk temperatuur van 5 C tot 35 C zie grafiek in de bijlage Technical Information relatieve vochtigheid 0 95 niet condenserend Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden 80 258 Special Turbo V 1K G User Manual 87 901 006 01 A Bedrijfshandleiding 6 Figuur 2 In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De Special Turbo V 1K G moet op een primaire pomp aangesloten zijn zie schema in Technical information Bevestiging van de pomp Als schade aan de rotor optreedt zou de verbinding tussen de pomp en het systeem aan een behoorlijk groot koppel onderhevig kunnen zijn Als de verbinding niet voldoende is om dit koppel te weerstaan zou de pomp van het systeem of de motor van het po
107. gents polluants et elle est par cons quent indiqu e pour toutes les applications exigeant un vide propre Utilis e avec le Navigator controller la pompe est dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de commander la soupape de ventilation de le piloter distance l aide d un ordinateur host connect par ligne s rielle Les paragraphes suivants fournissent toutes les indications n cessaires a garantir la s curit de l op rateur pendant l utilisation de l appareil Des renseignements plus d taill s sont disponibles l annexe Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 41 258 3 Mode d emploi Le pr sent mode d emploi les signes conventionnels suivants VALSSIA Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une man uvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions Melis Les messages d attention attirent attention sur certaines proc dures dont le non respect risque d endommager s rieusement l appareil Les notes contiennent des informations importantes extrapol s du texte Stockage Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir
108. hat is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency thereshold 867 Hz hysteresis 2 activation type high level delay time 0 second The Navigator Software optional allows the operator to set all the programmable feature When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND input see the following figure Special Turbo V 1K G User Manual 87 901 006 01 A 221 258 17 Technical Information MATING CONNECTOR Figure 13 How to Connect the Output Open Collector of the Controller Here below there are the typical connections of the open collector input of Special Turbo V 1K G to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available 222 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 24 Vdc 5 Vdc Customer s device Controller JAK A NPN aH 24 Vdc 7 PNP 5 Vdc Customer s device N i Cont
109. hdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivia 85 399 ymp rist n suojelusta HUOMIO Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain k sin K ytt k aina k sineit tai muuta sopivaa suojausta Special Turbo V 1K G ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen Special Turbo V 1K G User Manual 87 901 006 01 A 127 258 10 Ohjek sikirja Asennus Kuva 1 Pumppua ei tule asentaa ja tai k ytt ymp rist ss miss se joutuu kosketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine Z baaria yli atmosf risen paineen l mp tila 5 C 35 C ks Technical Information liitteen kaaviota suhteellinen kosteus O 95 ei tiivist v Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n 128 258 Special Turbo V 1K G User Manual 87 901 006 01 A Pumpun kiinnitys VAROITUS Special Turbo V 1K G User Ma
110. i denne klasse Special Turbo V 1K G er forsynet med konnektorer til ind udgange og til seriel kommunikation Konnektorerne skal tilsluttes de eksterne kredsl b s ledes at det ikke er muligt at opn adgang til de sp ndingsf rende dele Kontroll r at anordningen der er tilsluttet Special Turbo V 1K G har en passende isolering Dette g lder ogs i tilf lde af enkeltfejl som angivet i normen EN 61010 1 Der henvises til bilaget Technical Information for oplysninger vedr rende installation af ekstraudstyret 94 258 Special Turbo V 1K G User Manual 87 901 006 01 A Istruktionsbog 7 Anvendelse ADVARSEL Dette afsnit beskriver de vigtigste driftsprocedurer Inden anvendelse af systemet b r samtlige elektriske og pneumatiske tilslutninger udf res I forbindelse med opvarmning af vakuumkammeret m indl bsflangens temperatur ikke overstige 80 C Pumpen m aldrig aktiveres hvis indl bsflangen ikke er tilsluttet vakuumkammeret eller hvis pumpen ikke er lukket ved hj lp af lukkeflangen R r aldrig turbopumpen eller dens tilbeh r i forbindelse med opvarmningsprocedurerne Den h je temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen skal forsynes med luft eller delgasser der ikke indeholder st v eller faste partikler Indgangstrykket ved den specielle d
111. ilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler Special Turbo V 1K G er en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger Pumpen er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men den kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 45 000 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt Special Turbo V 1K G er helt uden skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum Hvis Special Turbo V 1K G pumpen anvences med Navigator controlleren er den udstyret med hj lpestik der g r det muligt at forsyne ventilator styre ventilationsventilen og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 RS 485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger Special Turbo V 1K G User Manual 87 901 006 01 A 89 258 7 Istruktionsbog I brugsanvisningen anvendes f lgende standardrubrikker IMUNI Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne modsat fald er der risiko for sv re
112. im plinom ali v okoljih kjer obstaja nevarnost eksplozije ali po ara Med obratovanjem je treba upo tevati naslednje ambientne pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere Temperatura od 5 C do 35 C glej diagram pritisk temperatura v prilogi Technical Information Relativna vla nost 0 95 brez kondenza POZOR Snemite lepilni trak in za itni pokrov ele takrat ko pove ete turbo rpalko na sistem 188 258 Special Turbo V 1K G User Manual 87 901 006 01 A Priro nik za Navodila 15 Slika 2 V prisotnosti magnetnih polj mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information Special Turbo V 1K G mora biti priklju ena na primarno rpalko glejte shemo v Technical Information Pritrjevanje rpalke e pride do napake na rotorju potem lahko med povezavo rpalke s sistemom pride do velikega navora e povezava ne more izdr ati tak nega navora se lahko rpalka izklju i iz sistema ali se ohi je motorja iztrga iz nosilca rpalke V tak nem primeru lahko priletijo kovinski delci iz rpalke ali iz sistema in povzro ijo resne po kodbe ali smrt in ali po kodujejo bli njo opremo Namestite Special Turbo V 1K G v stabilen polo aj tako da montirate dovodno prirobnico turbo rpalke na prirobnico na sistemu da povezava lahko zdr i navor 8900 Nm okoli svoje osi Naslednja ta
113. inaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur de l appareil la maison m re ou le revendeur afin de donner lieu au processus de ramassage et d limination NY y ZA PAL 50 258 Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informaci n general 53 Almacenamiento 54 Preparaci n para la instalaci n 55 Instalaci n 56 Fijaci n de la bomba 57 Uso 59 Encendido y Uso de la Special Turbo V 1K G 60 Parada de la Special Turbo V 1K G 60 Parada de Emergencia 61 Mantenimiento 61 Eliminaci n 62 Traducci n de las instrucciones originales Agilent Technologies 51 258 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energia cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa especifica de sus rotores En el caso de un dafio del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energia de rotaci n podria ser liberada Ee Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instru
114. iowej temperatura na ko nierzu nie mo e przekroczy 80 C ZAGRO ENIE Nigdy nie nalezy uruchomi pompe w przypadku kiedy kotnierz wejsciowy nie jest podtaczony do komory lub nie jest zamkniety z kotnierzem zamkniecia Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura moze spowodowa uszkodzenia ciata na osobach UWAGA Unika uderzen wahan lub gwattownych przesunie turbopompy podezas jej dziatania Moga uszkodzi sie tozyska Dla wlotu do powietrza pompy zastosowa powietrze lub obojetny gaz bez pytu lub innych czastek Cisnienie wejsciowe poprzez odpowiedni wlot musi by nizsze od 2 bar ponad ci nienie atmosferyczne Dla pompowania niszczacych gazow pompy te sa wyposazone w odpowiedi wlot poprzez kt ry nalezy dostarczy pompie przeptyw obojetnego gazu Azot Argon dla zabezpieczenia tozysk Patrz dodatek Technical Information Kiedy pompa jest zastosowana do pompowania gazow toksycznych tatwo palnych lub radioaktywnych nale y wykona odpowiednie procedury typowe dla ka dego z gazow Nie stosowa pompy w obecno ci gazow wybuchowych Special Turbo V 1K G User Manual 87 901 006 01 A 155 258 12 Podrecznik Instrukcji Wiaczenie i Uzytkowanie urzadzenia Special Turbo V 1K G Nizej podane instrukcje maja zastosowanie w przypadku pompy Special Turbo V 1K G stosowanej razem ze sterownikiem typu Navigator controller Aby w czy
115. ive only in Stop condition Set vent valve on off on closed Impulse 0 Continuous 1 0 frequency 1 power default 0 500 to 750 default 750 500 to 750 default 750 On 1 Off 0 default 1 Automatic 0 see note 1 On command 1 see note 2 0 to 65535 corresponding to 0 to 13107 sec 123 Reserved to Agilent service 124 125 R W Set the vent valve operation 126 R W Vent valve opening delay expressed in 0 2 sec 130 Reserved to Agilent service 200 R Pump current in mA de 201 R Pump voltage in Vdc 234 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 N Read Data Description Admitted Values Write Type 202 R N Pump power in W pump current x pump voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intik 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 206 R N Error code Bit description see the following figure 300 R N Cycle time in minutes 0 to 999999 zeroed by the reset command 301 R N Cycle number zeroed 0 to 9999 by the reset command 302 R N Pump life in hours 0 to 999999 zeroed by the reset command 320 to Reserved to Agilent service 399 400 R A CRC EPROM QE QE5XXXX where XXXX are variable 402 R A CRC Param PA PA5XXXX where XXXX are variable 500 Reserved to Agilent service 503 R W N RS 485 address 0 to 31 d
116. ka doba turbomolekularne rpalke je 10 mesecev od datum po iljanja 186 258 Special Turbo V 1K G User Manual 87 901 006 01 A Priro nik za Navodila 15 POZOR e je zaradi kakr negakoli razloga doba skladi enja dalj a je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Priprava za monta o Special Turbo V 1K G je dobavljen v posebni za itni embala i e je embala a po kodovana zaradi transporta kontaktirajte lokalno prodajno pisarno Pri odstranjevanju embala e pazite da vam Special Turbo V 1K G ne pade iz rok in da ni izpostavljen tresljajem ali udarcem Ne odlagajte embala e v okolje Material je mo no v celoti reciklirati in je v skladu z okoljevarstveno direktivo ECC 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Normalna izpostavljenost na okolje ne more po kodovati naprave Special Turbo V 1K G Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom Special Turbo V 1K G User Manual 87 901 006 01 A 187 258 15 Priro nik za Navodila Slika 1 Monta a Naprave ne name ajte ali uporabljajte v okolju ki je izpostavljeno atmosferskim agentom de sneg led prahu agresivn
117. karte Bezpieczenstwo i Zdrowie zataczona do niniejszej instrukcji Jeden egzemplarz kopia karty musi by wto ony do opakowania systemu przed jego wysytka Je eli system musi by poddany rozbiorce nale y przystapi do jego eliminacji zgodnie z obowiazujacymi krajowymi normami w meritum sprawy Przetworstwo odpadow 158 258 Objasnienie znajdujace sie na etykiecie napisu WEEE U yty poni ej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza e wyrob nim oznaczony nie mo e by przetworzony jako odpad razem z innymi domowymi lub przemystowymi odpadami lecz musi by sktadowany w miejscu przeznaczonym dla odpadow do przer bki zr nicowanej Zaleca sie u ytkownikowi po uprzednim sprawdzeniu terminu i warunk w zawartych w umowie sprzeda y nawiaza kontakt z dostawca lub sprzedawca w celu uruchomienia procesu zbi rki i przerobu Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 13 N vod k Pouziti Bezpe nostni navod pro Turbomolekul rni vyv vy 160 VSeobecn Informace 161 Uskladn ni 162 Priprava k instalaci 163 Instalace 164 Mont v v vy 165 Pou it 167 Zapnut a pou ivani vyv vy Special Turbo V 1K G 168 Zastaven Special Turbo V 1K G 168 Nouzov zastaven 169 dr ba 169 Likvidace 170 Preklad origin ln ho n vodu 25 Agilent Technologies 159 28
118. kuumkammeret eller ikke er lukket med lukkeflensen Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen nar den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gass ved forsyning av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell pning Til denne pningen skal flyt av inaktive gasser argon eller kvelstoff koples for beskytte lagrene se Technical Information ADVARSEL N r pumpen brukes for pumpe giftige brannfarlige eller radioaktive gasser skal de relevante forskriftene for de enkelte gasstypene f lges Pumpen skal ikke brukes i eksplosjonsfarlige milj er Special Turbo V 1K G User Manual 87 901 006 01 A 119 258 9 120 258 Instruksjon Manual Starte og bruke Special Turbo V 1K G Instruksjonene nedenfor gjelder Special Turbo V 1K G brukt sammen med Navigator controller Special Turbo V 1K G startes ved sette str mkabelen i veggkontakten Den innebygde styreenheten kjenner automatisk igjen blokkerings og startsignaler og starter pumpen F rste igangsetting av pumpen skjer med MYK START som etter denne f rste igangsettingssyklusen deaktiveres slik at etterf lgende igangsettinger skjer u
119. l mplig anv ndning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala f reskrifter Systemet Special Turbo V 1K G r en turbomolekyl r pump f r h ga och mycket h ga vakuumtill mpningar Pumpen kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte pumpen f r pumpning av v tskor eller fasta partiklar Pumpningen astadkoms med hj lp av en h gvarvig turbin max 45000 varv minut som drivs av en trefas h geffektsmotor Inga f rorenande mnen anv nds i Special Turbo V 1K G som d rf r passar f r till mpningar som kr ver ett rent vakuum D den anv nds med Navigator controller har pumpen dessutom hj lpkontakter som g r det m jlig att f rse str m till en extra ventilator att kontrollera avluftningsventilen och att fj rrstyra den med hj lp av en host dator som r ansluten genom seriell f rbindelse RS 232 RS 485 De f ljande avsnitten inneh ller all information som beh vs f r att garantera operat rens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical information Special Turbo V 1K G User Manual 87 901 006 01 A 101 258 8 Bruksanvisning I bruksanvisningen anv nds f ljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete m ste utf ras exakt enligt anvisningarna annat fall finn
120. l standards The Special Turbo V 1K G is turbo molecular pump for high and ultra high vacuum applications It can pump any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 45000 rpm driven by a high performance 3 phase electric motor The Special Turbo V 1K G is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum When used with Navigator controller the pump is equipped with auxiliary connectors to supply an additional fan to control the vent valve to be controlled from a remote site by means of an host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the equipment Detailed information is supplied in the appendix Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 197 258 16 Instructions for Use This manual uses the following standard protocol Warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury Notes contain important information taken from the text CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment Storage In order to guaran
121. la informacion necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informacion mas detallada Special Turbo V 1K G User Manual 87 901 006 01 A 53 258 4 Manual de istrucciones Este manual utiliza las convenciones siguientes ADVERTENCIA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una ejecuci n espec fica que de no realizarse correctamente podr a provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaci n importante extra da del texto Almacenamiento 54 258 Para garantizar el nivel m ximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deber n aplicarse las siguientes instrucciones durante el transporte desplazamiento y almacenamiento de las bombas no deberan superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C a humedad relativa entre O y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el periodo maximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de envio al cliente Special Turbo V 1K G User Manual 87 901
122. layout Pump Used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor Special Turbo V 1K G User Manual 87 901 006 01 A 251 258 17 Technical Information Accessories and Spare Parts Tab 8 Description Part number Mains cable NEMA Plug 3m long 969 9958 252 258 Special Turbo V 1K G User Manual 87 901 006 01 A Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you
123. ld be connected to the controller fail and set point outputs according to the following instruction Connect the valve positive input to the controller output J1 9 Connect the valve negative input to both controller outputs J1 11 set point and J1 13 fault In other words the negative input of the vent valve needs to be powered by the fault and set point outputs together Nominal rotational frequency is 750 Hz Rotational frequency can be changed from 500 Hz 30 KRPM to 750 Hz 45 KRPM Special Turbo V 1K G User Manual 87 901 006 01 A 215 258 17 Technical Information ERIAL LINE Figure 6 P3 Vent Figure 7 This is a dedicated 24 Vdc connector to control the optional vent valve 216 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 P4 External Fan Figure 8 This is a dedicated 24 Vdc connector to supply the optional external fan J1 In Out Figure 9 This connector carries all the input and output signals to remote control the Special Turbo V 1K G It is a 15 pins D type connector the available signals are detailed in the table the following paragraphs describe the signal characteristics and use Spe
124. led when the Special Turbo V 1K G or the optional vent valve have to be controlled by means of remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure N SERIAL CABLE Figure 36 Special Turbo V 1K G Navigator Controller Installation The controller can be mounted on the pump bottom To install the controller execute the following procedures Special Turbo V 1K G User Manual 87 901 006 01 A 247 258 17 Technical Information 248 258 Bottom Mounting See the following figure 1 Turn the pump upside down 2 Place the three washers on the pump bottom in correspondence of three hole at 120 3 Place the controller on the washers with the pump cable toward the pump body 4 Fix the controller to the pump bottom by means of the three socket head screws M5 5 Turn the pump again 6 Plug the line card and connect the pump cable to the pump 7 Connect the mating connector with the jumper on the interlock signal to start the pump II O Figure 37 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Fore Vacuum Pump Connection A flange KF 25 NW is available to connect the Special Turbo V 1K G pump to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechani
125. leitung Sicherheitshinweise fiir Turbomolekularpumpen 28 Allgemeine Informationen 29 Lagerung 30 Vor der Installation 31 Installation 32 Befestigung der Pumpe 33 Gebrauch 35 Einschaltung und Gebrauch der Special Turbo V 1K G 36 Stoppen von Modell Special Turbo V 1K G36 Not Aus 37 Wartung 37 Entsorgung 38 Ubersetzung der Originalanleitungen pige Agilent Technologies 27 258 2 Gebrauchsanleitung Sicherheitshinweise fiir Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verfiigen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren tiber eine grof e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 28 258 Special Turbo V 1K G User Manual 87 901 006 01 A Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist fir den fachm nnischen Gebrauch bestimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem fsem Gebrauch durch ungeschultes
126. lem viz tabulka dilu kter Ize doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a patri n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap ti kter vznik v regul toru m e zp sobit v n zran ni i smrteln Pred provad nim z sah dr by uvniti jednotky privodni kabel odpojte Nouzov zastaven dr ba NEBEZPE Pro okam it zastaven Special Turbo V 1K G v nouzov situaci je treba odpojit nap jec kabel ze s ov z suvky Special Turbo V 1K G nevy aduje dnou dr bu Ve ker pr ce na tomto zarizeni mus provad t opravn n osoby Ne za nete provadet jak koli pr ce na tomto zarizeni odpojte jej od site odvzdu n te vyv vu otev en m pr slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v vevy neklesne pod 50 C V pripad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan zarizeni v m nou za porouchan Special Turbo V 1K G User Manual 87 901 006 01 A 169 258 13 N vod k Pou it P ed odesl n m v v vy v robci na opravu nebo v m nu za repasovan kus mus te list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu vyplnit a odeslat do kancel e m stn ho prodejn ho odd len P ed odesl n
127. len a do in tal cie kv li prevencii kontamin cie prachom Special Turbo V 1K G User Manual 87 901 006 01 A 175 258 14 N vod na Obsluhu Instalacia Postava 1 Vyvevu neinStalujte ani nepouZivajte v prostredi vystavenom vonkaj m vplyvom d sneh ad prach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho tlaku teplota od 5 C do 35 C pozri z vislos tlaku od teploty v dodatku Technical Information relat vna vlhkos O 95 bez kondenz cie Neodstra ujte lepiacu p sku a ochrann kryt sk r ne pripoj te turbov vevu k syst mu 176 258 Special Turbo V 1K G User Manual 87 901 006 01 A N vod na Obsluhu 14 Postava 2 V pritomnosti magnetick ho pola musi byt vyveva chr nen feromagnetickym Stitom Podrobne inform cie sa nachadzaju v dodatku Technical Information Special Turbo V 1K G musi byt pripojena k primarnemu erpadlu vid sch ma v asti Technical Information Upevnenie vyvevy Ak sa objavi chyba rotora pripojenie vyvewy k systemu bude vystaven silnemu to ivemu momentu Ak pripojenie nie je dostato ne pevne aby to ivemu momentu odolalo m e sa odpoji v veva od syst mu alebo kryt motora od pl a v
128. lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C a humidit relative de 0 a 95 non condensante a Ala premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition 42 258 Special Turbo V 1K G User Manual 87 901 006 01 A ATTENTION Mode d emploi 3 En cas de d passement du temps de stockage la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone Preparation a l installation ATTENTION La Special Turbo V 1K G est livr e dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le revendeur local Pendant l op ration d ouverture de l emballage veiller ne pas laisser tomber la Special Turbo V 1K G et ne pas l exposer des chocs ou des vibrations Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de protection de l environnement Afin d viter tout probleme de d gazage ne pas toucher a mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e La Special Turbo V 1K G ne peut s endommager en restant simplement expos e l atmosph
129. lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen Skrotning av pumpen skall ske enligt g llande lagstiftning Bortskaffning 110 258 Betydelse av logotypen WEEE pa etiketterna Symbolen som visas nedan har till mpats i enlighet med CD direktivet som har betecknats som WEEE Den h r symbolen g ller endast i de lander som tillh r den Europeiska Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att slutanv ndaren tar kontakt med leverantoren av anordningen oberoende om det handlar om moderf retaget eller terf rs ljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter l mplig kontroll av kontraktsenliga tidsgr nser och f rs ljningsvillkor Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl r Pumper112 Generell informasjon 113 Lagring 114 Klargj re til installasjon 115 Installasjon 116 Festing av pumpen 117 Bruk 119 Starte og bruke Special Turbo V 1K G 120 Stoppe Special Turbo V 1K G 120 N dstopp 121 Vedlikehold 121 Eliminering 122 Oversetting av den opprinnelige s
130. m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami Likvidace V znam loga WEEE nach zej c ho se na t tku N e uveden symbol odpov d sm rnic m CE pojmenovanym WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku N SN N Wi f X JA 170 258 Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 14 N vod na Obsluhu Bezpe nostny n vod pre Turbomolekul rne vyvevy 172 V eobecn inform cie 173 Uchov vanie 174 Pr prava na in tal ciu 175 In tal cia 176 Upevnenie v vevy 177 Pou itie 179 Zapnutie a pou itie zariadenia Special Turbo V 1K G 180 Zastavenie Special Turbo V 1K G 180 N dzov zastavenie 181 dr ba 181 Likvid cia 182 Preklad origin lneho n vodu pige Agilent Technologies 171 258 14 N vod na Obsl
131. maet Technical Information Fastg relse af pumpe Hvis rotoren beskadiges kan forbindelsen mellem pumpen og systemet blive udsat for et kraftigt drejemoment Hvis forbindelsen ikke er tilstr kkelig til at modst dette drejemoment kan pumpen rive sig l s fra systemet eller motoren kan rive sig l s fra pumpens bekl dning I dette tilf lde kan metalfragmenter blive slynget ud af pumpen eller systemet hvilket kan medf re alvorlige kv stelser eller d dsfald og eller materiel beskadigelse af apparaterne i n rheden Mont r Special Turbo V 1K G i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 8 900 Nm omkring dens egen akse Special Turbo V 1K G User Manual 87 901 006 01 A 93 258 7 Istruktionsbog Nedenst ende tabel beskriver antallet af skruer som er n dvendige til hver enkelt ISO 160 F flange samt det n dvendige tilsp ndingsmoment Tab 1 FLANGE ANT DREJNINGS MOMENT ISO 160 F 8 5 Nm Stalskruerne til flangerne F skal vare i klasse gt 8 8 Special Turbo V 1K G kan installeres i en hvilken som helst position Special Turbo V 1K G kan ikke fastg res ved brug af dens sokkel dijiste le Special Turbo V 1K G med Navigator controller h rer til den anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene
132. mover a etiqueta autocolante e retirar a tampa de protec o somente no momento de ligar a turbobomba ao sistema 68 258 Special Turbo V 1K G User Manual 87 901 006 01 A Manual de Istruc es 5 Figura 2 Na presenca de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information A Special Turbo V 1K G deve ser ligada a uma bomba prim ria consultar esquema em Technical Information Fixacao da bomba Em caso de dano no rotor a ligac o entre a bomba e o sistema corre o risco de sofrer um torque muito grande Se a liga o n o resistir de maneira suficiente ao referido torque a bomba pode soltar se do sistema ou o motor pode soltar se do inv lucro da bomba Nesse caso fragmentos de metal podem ser projectados da bomba ou do sistema que podem provocar les es graves ou a morte e ou danificar os equipamentos adjacentes Colocar a Special Turbo V 1K G em posi o est vel fixando o flange de entrada da turbobomba ao contra flange do sistema com uma ligacao que resista a um torque de 8900 Nm volta do seu eixo Special Turbo V 1K G User Manual 87 901 006 01 A 69 258 5 Manual de Istru es A tabela a seguir cont m para a flange IS0160 F o nimero dos parafusos necess rios e 0 respectivo torque de aperto Tab 1 FLANGE N TORQUE DE APERTO ISO 160 F 8 5 Nm A classe de resist ncia
133. mpage de gaz agressifs ces pompes sont dot es d une porte sp ciale travers laquelle il est n cessaire de fournir la pompe un flux de gaz inerte azote ou argon pour prot ger les roulements voir en annexe Technical Information AVERTISSEMENT Lorsque la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs suivre les proc dures typiques de chaque gaz Ne pas utiliser la pompe en pr sence de gaz explosifs Special Turbo V 1K G User Manual 87 901 006 01 A 47 258 3 Mode d emploi Mise en marche et utilisation de la Special Turbo V 1K G Les instructions qui suivent concernent la Special Turbo V 1K G utilis e en association avec le Navigator controller Pour allumer la Special Turbo V 1K G il suffit de fournir la tension d alimentation Le contr leur incorpor reconnait automatiquement la pr sence de signaux lectriques de d verrouillage et de d marrage et actionne la pompe La premi re mise en marche de la pompe se fait en mode Soft Start Au terme du cycle de d marrage ce mode se d sactive automatiquement et les mises en marche suivantes se font sans tape Soft Start Pour une nouvelle mise en marche Soft Start r activer ce mode depuis le logiciel Cf paragraphe RS232 COMMUNICATION DESCRIPTION du document en annexe Technical Information La LED verte LD1 situ e sur le panneau de la base du Navigator controller indique par sa fr quence de clignotemen
134. mplichaam los kunnen raken In dit geval kunnen metaalfragmenten door de pomp of het systeem in het rond worden geschoten welke ernstig letsel de dood en of schade aan omliggende apparaten kunnen veroorzaken Bevestig de Special Turbo V 1K G in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8900 Nm rondom de eigen as te weerstaan Special Turbo V 1K G User Manual 87 901 006 01 A 81 258 Bedrijfshandleiding De volgende tabel beschrijft voor de flens ISO 160 F het aantal benodigde schroeven en met welk koppel ze aangetrokken moeten worden Tab 1 FLENS NR AANHAALKOPPEL ISO 160 F 8 5 Nm De klasse van de stalen schroeven voor de F flenzen moet gt 8 8 zijn De Special Turbo V 1K G kan in alle standen worden geinstalleerd De Special Turbo V 1K G kan niet met behulp van zijn eigen basis worden bevestigd OORZICHTIG De Special Turbo V 1K G met Navigator controller behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze categorie voldoet De Special Turbo V 1K G bezit connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat geen enkel deel onder spanning toegankelijk is Controleer of de inrichting verbonden met de
135. mpning av giftiga l ttant ndliga eller radioaktiva gaser b r man f lja de s rskilda anvisningarna f r varje enskild gas Anv nd ej pumpen i n rheten av explosiva gaser Special Turbo V 1K G User Manual 87 901 006 01 A 107 258 108 258 Bruksanvisning Start och anv ndning av Special Turbo V 1K G Instruktionerna nedan g ller Special Turbo V 1K G som anv nds i kombination med Navigator controller F r att starta Special Turbo V 1K G beh ver du bara ansluta till ett eluttag Den inbyggda styrenheten k nner automatiskt igen f rreglings och startsignaler och startar pumpen Pumpens f rsta start sker i Mjukstart l get som i slutet av inledningscykeln sl s av automatiskt D refter sker pumpens inledningar utan funktionen Mjukstart F r att teraktivera Mjukstart m ste man terst lla ovann mnda l ge genom mjukvaran se stycket RS 232 COMMUNICATION DESCRIPTION i bilagan Technical information Den gr na lysdioden LD1 p underdelen av Navigator controller anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blinkande ungef r var 400 ms systemet r i lage for acceleration bromsning Stop eller Waiting for interlock a hastigt blinkande ungef r 200 ms feltillst nd Att st nga av Special Turbo V 1K G Om du vill st nga av Special Turbo V 1K G beh ver du bara dra ut elkabeln ur v gguttaget Den inbyggda styrenhet
136. mportant Si le raccordement n est pas en mesure de r sister a un tel couple la pompe risque de se d solidariser du syst me ou le moteur du corps de la pompe Dans ce cas des fragments de m tal peuvent tre projet s par la pompe ou le systeme et entrainer des blessures graves voire la mort et ou endommager s rieusement les quipements environnants Fixer la Special Turbo V 1K G de fagon stable en fixant la bride d entr e de la turbopompe la contre bride du syst me au moyen d un raccordement en mesure de r sister 4 un couple de 8900 Nm autour de son axe Le tableau suivant indique pour chaque bride d entr e ISO 160 F le nombre de vis n cessaires et le couple de serrage appliquer Special Turbo V 1K G User Manual 87 901 006 01 A 45 258 3 Mode d emploi Tab 1 BRIDE N COUPLE DE SERRAGE ISO 160 F 8 5 Nm Pour les brides F les vis en acier doivent tre de classe gt 8 8 La Special Turbo V 1K G peut tre mont e dans n importe quelle position La Special Turbo V 1K G ne peut tre fix e par sa base La Special Turbo V 1K G appartient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie La Special Turbo V 1K G dispose de connecteurs pour les entr es sorties et pour la communication en s rie qui doivent tre branch s aux circuits ext rieurs de fa on qu aucune pa
137. n liitteess Vihre LED joka sijaitsee Navigator controllerin jalustan paneelissa osoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jatkuvasti pumppu py rii normaalisti vilkkuu hitaasti noin 400 ms n jakso systeemi on kiihdytys jarrutus pys ytys tai Waiting for interlock tilassa vilkkuu nopeasti noin 200 ms n jakso virhetila Special Turbo V 1K Gin pys ytt minen Special Turbo V 1K G pys ytt miseen riitt ett se kytket n irti s hk verkosta Valvoja pys ytt pumpun v litt m sti 132 258 Special Turbo V 1K G User Manual 87 901 006 01 A Ohjek sikirja 10 VAROITUS K ytt j n turvallisuuden takaamiseksi Turbo V valvojan virran sy t n on tapahduttava pistokkeella kansainv lisesti hyv ksytty tyyppi ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehittyv t korkeaj nnitteet voivat aiheuttaa vakavia onnettomuuksia tai jopa kuoleman Irrota s hk kaapeli ennen yksik n sis lle suoritettavien huoltotoimenpiteiden aloittamista H t pys ytys Huolto Special Turbo V 1K G on pys ytett v h t tilassa irrottamalla s hk kaapeli valvojasta Special Turbo V 1K G ei vaadi lainkaan huoltoa Mahdolli
138. n usare la pompa in presenza di gas esplosivi Special Turbo V 1K G User Manual 87 901 006 01 A 23 258 1 24 258 Istruzioni per l uso Accensione ed Uso della Special Turbo V 1K G Le istruzioni seguenti si applicano alla Special Turbo V 1K G usata in combinazione con il Navigator Controller Per accendere la Special Turbo V 1K G sufficiente fornire la tensione di alimentazione Il controller incorporato riconosce automaticamente la presenza dei segnali di interlock e di avvio ed avvia la pompa La prima partenza della pompa avviene nel modo Soft Start che al termine del ciclo di avvio si disabilita automaticamente per cui tutti i successivi avvii della pompa avvengono senza il modo Soft Start Per riavere una partenza con Soft Start attivo occorre riabilitare il modo suddetto tramite software vedere il paragrafo RS 232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED verde posto sul pannello della base del Navigator controller indica con la frequenza del suo lampeggio le condizioni operative del sistema acceso fisso la pompa in rotazione normale lampeggiante lentamente periodo di circa 400 ms il sistema in stato di rampa o di frenata o di Stop o di Waiting for interlock lampeggiante velocemente periodo di circa 200 ms condizione di errore Arresto della Special Turbo V 1K G Per arrestare la Special Turbo
139. nced exchange service che permette di ottenere un sistema rigenerato in sostituzione di quello guasto Special Turbo V 1K G User Manual 87 901 006 01 A 25 258 1 Istruzioni per l uso Prima di rispedire al costruttore un sistema per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione Qualora un sistema dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Smaltimento 26 258 Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita AN FER NG CES N JA ES oe Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual Gebrauchsan
140. ndo haya gases explosivos Special Turbo V 1K G User Manual 87 901 006 01 A 59 258 4 60 258 Manual de istrucciones Encendido y Uso de la Special Turbo V 1K G Las siguientes instrucciones se aplican a Special Turbo V 1K G utilizada conjuntamente con el Navigator controller Para encender Special Turbo V 1K G basta con suministrar la tensi n de alimentaci n El controlador incorporado reconoce autom ticamente la presencia de las sefiales de interbloqueo y de arranque y activa la bomba La primera salida de la bomba se realiza en el modo Soft Start que al final del ciclo de puesta en marcha se deshabilita autom ticamente por lo tanto cuando la bomba se ponga en marcha posteriormente se har sin Soft Start Para volver a utilizar una puesta en marcha Soft Start activa es necesario rehabilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde situado en el panel de la base del Navigator controller indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba est en rotaci n normal parpadea lentamente periodo de 400 ms aproximadamente el sistema est en estado de rampa o de frenado o de stop o de waiting for iterlock parpadea r pidamente periodo de 200 ms aproximadamente condici n de error Parada de la Special Turbo
141. neral Information 197 Storage 198 Preparation for Installation 199 Installation 200 Pump Fixing 201 Use 203 Switching on and Use of Special Turbo V 1K G 204 Special Turbo V 1K G Switching off 204 Emergency Stop 205 Maintenance 205 Disposal 206 Original Instructions 5 Agilent Technologies 195 258 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to equipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 196 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instructions for Use 16 General Information This equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific nationa
142. nikacije RS 232 485 v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i Navigator controller s frekvenco utripanja ozna uje delovne pogoje sistema a Brez utripanja rpalka je normalno vrti a Po asno utripanje perioda pribli no 400 ms Sistem je v stanju ramp breaking stop ali v stanju Waiting for interloc Hitro utripanje perioda pribli no 200 ms Napaka Izklop naprave Special Turbo V 1K G Za izklop naprave Special Turbo V 1K G morate prekiniti dovod napetosti Vgrajeni kontroler takoj zaustavi rpalko 192 258 Special Turbo V 1K G User Manual 87 901 006 01 A Priro nik za Navodila 15 SVARILO Za varnost operaterja mora biti krmilnik Turbo V napajan preko triveznega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku lahko povzro i hude po kodbe ali smrt Preden za nete z vzdr evalnimi postopki v notranjosti izvlecite napajalni kabel Zaustavitev v sili Za takoj en izklop naprave Special Turbo V 1K G je treba izklju iti napetostni kabel iz napetosti Vzdr evanje SVARILO Naprave Special Turbo V 1K G ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje Pred za etkom del
143. nnector to control via an RS 232 or RS 485 connection the Special Turbo V 1K G Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Tab 4 PIN N SIGNAL NAME 1 SPARE 2 TX RS232 m NRA M A ce oO 5 END 6 A RS485 8 B RS485 Oooo 9 RESERVED Note that the vent valve can also be controlled by means of the serial connection A serial communication kit with a serial cable and the Navigation software is available optional Special Turbo V 1K G User Manual 87 901 006 01 A 227 258 17 Technical Information RS 232 RS 485 Communication Description 228 258 Both the RS 232 and the RS 485 interfaces are available on the connector J2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity a I stop bit a baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol is a MASTER SLAVE type where a Host MASTER Controller SLAVE The communication is performed in the following way a 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format
144. ntity frequency or power set by the user The default setting is the frequency see the following example diagram Special Turbo V 1K G User Manual 87 901 006 01 A 219 258 17 Technical Information Output V Frequency Hz Figure 11 FAULT this open collector output signal is ON when a system fault condition is detected PROGRAMMABLE SET POINT this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz hysteresis 1 actiation type high level 220 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 N R 3 gt 2 5 a s 3 a o Q ET n 0 495 500 595 Frequency Hz Figure 12 The set point output stays at 0 Vdc until the frequency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency becomes lower than 495 Hz t
145. nual 87 901 006 01 A Ohjek sikirja 10 Kuva 2 Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja loytyy Technical Information liitteest Special Turbo V 1K G tulee kytke p pumppuun ks Technical Information liitteen kaaviota Jos roottori vaurioituu pumpun ja j rjestelm n v liseen liit nt n saattaa kohdistua huomattavaa v nt momenttia Ellei liit nt kest kyseist momenttia pumppu saattaa irrota j rjestelm st tai moottori pumpun kotelosta T ll in metallikappaleita saattaa sinkoutua pumpusta tai j rjestelm st ja aiheuttaa vakavia vahinkoja tai kuoleman ja tai l hell olevien laitteiden vaurioita Kiinnitt k Special Turbo V 1K G vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n vastalaippaan liitoksella joka kest 8900 Nm n momentin akselinsa ymp ri 129 258 10 Ohjek sikirja Seuraavassa taulukossa ilmoitetaan jokaiselle ISO 160 F laipalle ruuvien kiinnitinm r ja niiden kiristysmomentit Tab 1 LAIPPA M R KIRISTYS MOMENTTI ISO 160 F 8 5 Nm Laippojen F ter sruuvien tulee olla luokkaa gt 8 8 Special Turbo V 1K G voidaan asentaa mihin tahansa asentoon Special Turbo V 1K G ei voida kiinnitt perustansa kautta HUOMIO Navigator controller ohjaimella varustettu Special Turbo V 1K G kuuluu toiseen EN 61
146. o the environment cannot damage the Special Turbo V 1K G Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust Special Turbo V 1K G User Manual 87 901 006 01 A 199 258 16 Instructions for Use Figure 1 Installation Do not install or use the pump in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure temperature from 5 C to 35 C see the diagram pressure temperature in the appendix Technical Information relative humidity O 95 non condensing Do not remove the adhesive and protective cap before connecting the turbopump to the system 200 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instructions for Use 16 Figure 2 In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The Special Turbo V 1K G must be connected to a primary pump see Technical Information Pump Fixing WARNING If a rotor failure occurs the connection of the pump to the system could be subjected to a significant torque If the connection is not sufficient to with
147. odczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku pompy Special Turbo V 1K G ani nie poddawa jej uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowiska UWAGA Aby unikna problemow odgazowywania nalezy nie dotyka gotymi rekoma cz ci przeznaczonych do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie Pompa Special Turbo V 1K G nie mo e by uszkodzona poprzez wystawienie jej na dzia anie atmosfery W zwi zku z tym zaleca si aby pompa do momentu jej instalacji na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em Special Turbo V 1K G User Manual 87 901 006 01 A 151 258 12 Podrecznik Instrukcji Instalacja Posta 1 Nie instalowa i lub u ytkowa pompy w otoczeniach wystawionych na czynniki atmosferyczne deszcz mroz nieg pyly gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagrozeniem pozaru Podczas dziatania obowiazkowo nalezy przestrzega nastepujace warunki otoczenia maksymalne ci nienie 2 bary ponad ci nieniem atmosferycznym temperatura od 5 C do 35 C patrz wykres graficzny w dodatku Technical Information w
148. oft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum Special Turbo V 1K G User Manual 87 901 006 01 A Bedrijfshandleiding 6 al Vile ppal Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent Uitpakken De Special Turbo V 1K G wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat de Special Turbo V 1K G niet kan vallen en geen stoten of trillingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 nl el Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacuiim in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming De Special Turbo V 1K G kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuilin
149. ogging EEG OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage prablem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error cade on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling cail damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or retuming a non rebuildable part crashed will result in an invoice for the non retumed non reb
150. ohly vylet t kovove ulomky kter by mohly zp sobit v n raz nebo smrt a tak po kodit okolni zafizeni Upevn te Special Turbo V 1K G do stabilni polohy a p vodn p rubu turbomolekul rni vyv vy pripevn te k protiprirub syst mu pomoci pripojky ktera odola to ivemu momentu 8900 Nm kolem sv osy Nasledujici tabulka uvadi nezbytny po et roubu pro pro prirubu ISO 160 F ISO F a p slu n utahovaci moment Tab 1 PRIRUBA PO ET UTAHOVAC MOMENT ISO 160 F 8 5 Nm T da ocelov ch roub pro p rubu F musi b t gt 8 8 Special Turbo V 1K G m e b t nainstalov na do libovoln polohy Special Turbo V 1K G nem e b t upevn na prost ednictv m sv z kladny Special Turbo V 1K G User Manual 87 901 006 01 A 165 258 13 N vod k Pou it POZOR Podle sm rnice EN 61010 1 patii Special Turbo V 1K G se zafizenim Navigator controller do druh elektroinstala ni nebo p ep ov t dy Za zen p ipojte do napajeci sit ktera spl uje uvedenou tiidu Vyv va Special Turbo V 1K G je vybavena vstupnimi a vystupnimi konektory a konektory pro s riovou komunikaci kter se musi pripojit k externim obvod m tak aby Zadna elektricka sou ast nebyla pristupna Zajist te aby izolace zafizeni pripojen ho k vyv v Special Turbo V 1K G byla p im en i v p pad jedin poruchy podle sm rnice EN 61010 1 166 258 Special Turbo V 1K G User Manual 87 901 006 0
151. onn m trojf zov m elektromotorem Special Turbo V 1K G je zcela zbavena zne i tujicich l tek a proto je vhodn pro aplikace vy adujici iste vakuum Kdy se vyv va pou v se zafizenim Navigator controller je vybavena p davn mi konektory pro p ipojen p davn ho ventil toru ovl d n odvzdu ovac ho ventilu kter je ovl d n na d lku pomoc hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n tohoto za zen Podrobn informace jsou uvedeny v p loze Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 161 258 13 N vod k Pou it V t to p ru ce jsou pou v na n sleduj c ozna en NEBEZPE I Nebezpe i hla eni jsou ur ena pro upozorn ni obsluhy na ur ity postup nebo innosti kter by v pripad nedodr eni mohly zp sobit va ny raz Pozn mky obsahuji d le it informace prevzat z textu POZOR Pozor hl en jsou uvedena pred postupy ktere by v pripad nedodr en mohly po kodit zafizeni Uskladn ni Aby byla zajist na maxim lni provozuschopnost a spolehlivost turbomolekul rnich vyv v firmy Agilent musite dodrzovat nasledujici pokyny P i p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed
152. operly grounded power socket to avoid electrical shock and to satisfy CE requirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Emergency Stop To immediately stop the Special Turbo V 1K G in an emergency condition it is necessary to remove the supply cable from the mains plug Maintenance The Special Turbo V 1K G does not require any maintenance Any work performed on the system must be carried out by authorized personnel WARNING Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down Special Turbo V 1K G User Manual 87 901 006 01 A 205 258 16 Instructions for Use Before returning the system to the constructor for repairs or replacement with a reconditioned unit the Health and Safety sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be inserted in the system package before shipping Disposal 206 258 If a system is to be scrapped it must be disposed of in accordance with the specific national standards Meaning of the WEEE
153. ost collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical information Special Turbo V 1K G User Manual 87 901 006 01 A 17 258 1 Istruzioni per l uso Questo manuale utilizza le seguenti convenzioni AWAY ANNA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali nta 7400 3 messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo immagazzinamento 18 258 Per garantire il massimo livello di funzionalit ed affidabilit delle pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data
154. pecial Turbo V 1K G User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper 88 Generel Information 89 Opbevaring 90 Forberedelse f r installation 91 Installation 92 Fastg relse af pumpe 93 Anvendelse 95 Start og anvendelse af Special Turbo V 1K G 96 Stop af Special Turbo V 1K G 96 N dstop 97 Vedligeholdelse 97 Bortskaffelse 98 Overs ttelse af originalinstruktionerne Agilent Technologies 37 2 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den hoje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes AVES SE For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 88 258 Special Turbo V 1K G User Manual 87 901 006 01 A Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Agilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden t
155. pen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted eller Agilent advanced exchange service der udskifter systemet med et repareret system Special Turbo V 1K G User Manual 87 901 006 01 A 97 258 7 Istruktionsbog Inden systemet sendes til reparationsv rkstedet eller Agilent advanced axchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love Bortskaffelse 98 258 Betydningen af WEEE logoet p m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det s kaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten Special Turbo V 1K G User Manual 87 901 006 01 A
156. ph INTERCONNECTIONS Special Turbo V 1K G User Manual 87 901 006 01 A 243 258 17 Technical Information Vent Device Model 969 9831 244 258 BE Figure 31 The vent device has adjustable delay time up to 36 min This value can be used only with rack controller To install the vent device unscrew and remove the threaded plug see figure below Figure 32 Screw the flange mod 969 9108 on the pump taking care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Figure 33 Purge Valve Installation A gas purge valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as shown in the following figure Figure 34 Special Turbo V 1K G User Manual 87 901 006 01 A 245 258 17 Technical Information Purge Valve Installation and then screw the gas purge valve with a torque of 2 5 Nm as shown in the following figure Figure 35 246 258 Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Serial Cable Installation The supplied serial cable must be instal
157. ppsamling og eliminering etter ha kontrollert avtaler og betingelser i kj pekontrakten Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 10 Ohjekasikirja Turbomolekyylipumppujen Turvaohjeet 124 Yleisi Tietoja 125 Varastointi 126 Valmistelut asennusta varten 127 Asennus 128 Pumpun kiinnitys 129 K ytt 131 Special Turbo V 1K Gin k ynnistys ja k ytt 132 Special Turbo V 1K Gin pys ytt minen 132 H t pys ytys 133 Huolto 133 H vitt minen 134 Alkuper isen ohjeiden k nn s 2 Agilent Technologies 123258 10 Ohjek sikirja Turbomolekyylipumppujen Turvaohjeet T ss kayttoohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa pyorimisenergia saattaa vapautua AVION Tassa k ytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 124 258 laitteiston vaurioitumisen ja k ytt jien vahingoittumisen v ltt miseksi Special Turbo V 1K G User Manual 87 901 006 01 A Ohjek sikirja 10 Yleisi Tietoja Tama laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista
158. que de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AHSA AU Pour viter tout d g t mat riel et pr venir tout risque de blessure aux op rateurs respecter rigoureusement les instructions d installation et d utilisation d crites dans le pr sent document 40 258 Special Turbo V 1K G User Manual 87 901 006 01 A Mode d emploi 3 Indications Generales L appareil a t concu en vue d une utilisation professionnelle Avant toute utilisation il est conseill l utilisateur de lire attentivement le mode d emploi ainsi que toute autre indication suppl mentaire fournie par Agilent Agilent d cline toute responsabilit en cas de non respect total ou partiel des instructions donn es d usage impropre par un personnel non form d op rations non autoris es ou d usage contraire a la r glementation nationale en la mati re La pompe Special Turbo V 1K G est une pompe turbomol culaire pour applications a haut vide et ultra haut vide La pompe est en mesure de pomper tous les types de gaz et de compos s gazeux mais elle n est pas adapt e au pompage de liquides ou de particules solides L effet de pompage est obtenu grace une turbine tournant a vitesse lev e 45000 tr min maxi mue par un moteur lectrique triphas haut rendement La Special Turbo V 1K G est totalement exempte d a
159. r Pumpe 33 Gebrauch 35 Wartung 37 Special Turbo V 1K G User Manual 87 901 006 01 A 5 258 Contents 6 258 Entsorgung 38 Mode d emploi 39 Consignes de s curit pour Pompe Turbomol culaires 40 Indications Generales 41 Stockage 42 Preparation al installation 43 Installation 44 Fixation de la pompe45 Utilization 47 Entretien 49 Mise au rebut 50 Manual de istrucciones 51 Indicaciones de Seguridad para Bombas Turbomoleculares 52 Informacion general 53 Almacenamiento 54 Preparacion para la instalaci n 55 Instalacion 56 Fijaci n de la bomba 57 Uso 59 Mantenimiento 61 Eliminaci n 62 Special Turbo V 1K G User Manual 87 901 006 01 A Contents 5 Manual de Istruc es 63 Indicac es de Seguranca para Bombas Turbomoleculares 64 Informac es gerais 65 Armazenagem 66 Preparac o para a instalac o 67 Instalac o 68 Fixac o da bomba 69 Utilizac o 71 Manutenc o 73 Eliminac o 74 6 Bedrijfshandleiding 75 Veiligheidsinstructies voor Turbomoleculaire pompen 76 Algemene informatie 77 Opslag 78 Uitpakken 79 Installatie 80 Bevestiging van de pomp 81 Gebruik 83 Onderhoud 85 Afvalverwerking 86 7 Istruktionsbog 87 Sikkerhedsanvisninger for Molekyl re turbopumper 88 Special Turbo V 1K G User Manual 87 901 006 01 A 7 258 Contents 8 258 Generel Information 89 Opbevaring 90 Forberedelse f r installation 91 Installation 92 Fastg relse af pumpe 93 Anvendelse 95 Vedligehold
160. r eingebaute Controller erfaf t automatisch das Vorhandensein von Interlock und Anlaufsignalen und startet die Pumpe Die Erstinbetriebnahme der Pumpe erfolgt im Modus Soft Start der sich nach dem Anlaufzyklus selbstt tig abschaltet Daher erfolgen alle nachfolgenden Pumpenanl ufe ohne den Modus Soft Start Um die Pumpe erneut im Modus Soft Start zu starten ist dieser Modus mittels der Software wieder freizugeben siehe Abschnitt RS 232 COMMUNICATION DESCRIPTION im Anhang Technical Information Die gr ne LED LD1 an der Bodenplatte vom Navigator Controller gibt mit der H ufigkeit ihres Blinkens die Betriebsbedingungen des System an a Daueranzeige Die Pumpe befindet sich im normalen Betrieb Langsame Blinkanzeige ca 400 ms das System befindet sich entweder im Status Rampe Abbremsung Stopp oder Waiting for Interlock Schnelle Blinkanzeige ca 200 ms Fehlerstatus Stoppen von Modell Special Turbo V 1K G Zum Stoppen von Modell Special Turbo V 1K G ist die Versorgungsspannung abzuschalten Der eingebaute Controller sorgt f r den sofortigen Pumpenstopp 36 258 Special Turbo V 1K G User Manual 87 901 006 01 A Gebrauchsanleitung 2 WARNUNG Fiir die Sicherheit des Bedieners muss der Controller Turbo V mit einem dreidrahtigen Stromkabel siehe Tabelle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses
161. r vedlikeholdsfritt Alt arbeid p systemet m kun utf res av autorisert personell ADVARSEL F r noe arbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved pne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for det delagte systemet Special Turbo V 1K G User Manual 87 901 006 01 A 121 258 9 Instruksjon Manual F r systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system m det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket m vedlegges systemet som sendes tilbake Dersom et system skal kasseres m dette skje i henhold til nasjonale bestemmelser Eliminering Betydningen av symbolet p logo WEEE p etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordningen som kan v re et firma eller en forhandler som s rger for o
162. rbo V 1K G User Manual 87 901 006 01 A 153 258 12 Podrecznik Instrukcji Tab 1 KO NIERZ Nr MOMENT DOKRECENIA Dla kotnierzy F ruby stalowe musza posiada klase gt 8 8 Pompa Special Turbo V 1K G mo e by zainstalowana w jakiejkolwiek pozycji Pompa Special Turbo V 1K G nie mo e by mocowana poprzez wtasna podstawe UWAGA Pompa Special Turbo V 1K G Ze sterownikiem typu Navigator controller nalezy do drugiej kategorii instalacji lub nadnapiecia przewidzianej przez norme EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi Pompa Special Turbo V 1K G posiada konektory wej ciowe wyj ciowe i dla komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w spos b aby adna cz znajduj ca si pod napi ciem nie mog a by dost pna Nale y upewni si czy izolacja pod czonego urz dzenia do pompy Special Turbo V 1K G posiada odpowiednie odizolowanie nawet w stanie pojedynczej usterki zgodnie z wymaganiami normy EN 61010 1 Aby zainstalowa opcjonalne akcesoria nale y zapozna si z Technical Information 154 258 Special Turbo V 1K G User Manual 87 901 006 01 A Podrecznik Instrukcji 12 Uzytkowanie W tym paragrafie zosta y przedstawione g wne procedury operacyjne Przed zastosowaniem systemu nale y wykona wszystkie po czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzania komory pr n
163. rialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Normal atmosf risk p virkning kan ikke skade Special Turbo V 1K G Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen Special Turbo V 1K G User Manual 87 901 006 01 A 91 258 7 Istruktionsbog Figur 1 Installation FORSIGTIG Install r og anvend ikke pumpen i milj er der uds ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift a max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 35 C se illustrationen i bilaget Technical Information relativ luftfugtighed 0 95 ikke kondenserende Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet 92 258 Special Turbo V 1K G User Manual 87 901 006 01 A Istruktionsbog 7 Figur 2 Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger Special Turbo V 1K G skal tilsluttes en hovedpumpe se ske
164. rmation WAARSCHUWING Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen Special Turbo V 1K G User Manual 87 901 006 01 A 83 258 6 Bedrijfshandleiding Inschakeling en gebruik van de Special Turbo V 1K G De volgende instructies zijn van toepassing op de Special Turbo V 1K G gebruikt in combinatie met de Navigator controller Om de Special Turbo V 1K G in te schakelen is het voldoende om deze van stroom te voorzien De ingebouwde controller herkent automatisch de aanwezigheid van interlock en startsignalen en start de pomp De eerste start van de pomp geschiedt op de wijze Soft Start die aan het einde van de startcyclus automatisch ontmachtigd wordt Vandaar dat alle volgende starts niet op de wijze Soft Start geschieden Om opnieuw met Soft Start te starten moet bovengenoemde wijze met behulp van de software gemachtigd worden zie paragraaf RS 232 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED op het paneel van de basis van de Navigator controller geeft door de frequentie van zijn knipperen de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal knippert langzaam periode van circa 400 ms het systeem is in de status oploop of
165. rna s att det inte g r att komma t n gon sp nningsf rande del Kontrollera att anordningen som r ansluten till Special Turbo V 1K G har en l mplig isolering ven vid ett enskilt fel enligt standard EN 61010 1 Installation av tillbeh rsutrustning beskrivs i Technical Information 106 258 Special Turbo V 1K G User Manual 87 901 006 01 A Bruksanvisning 8 Anv ndning OBSERVER Anvisningar f r riktig anv ndning finns i styrenhetens bruksanvisning Innan du anv nder systemet ska du utf ra alla elektriska och pneumatiska anslutningar Om vakuumkammaren uppv rms f r temperaturen vid inloppet aldrig verstiga 80 C S tt aldrig ig ng pumpen om intagsfl nsen varken r kopplad till vakuumkammaren eller r blockerad p plats med l sfl nsen Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r att undvika br nnskador Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgaser som rfria fr n damn eller andra partiklar Ing ngstrycket mot r tt d rr m steunderstiga 2 bar ut ver det atmosf riska trycket F r pumpning av fr tande gaser r dessa pumpar f rsedda med en speciell ppning igenom vilken man ska leda en str m av delgas kv ve eller argon f r att skydda lagren se bilagan Technical Information D pumpen anv nds f r pu
166. roitus merkit saavat k ytt j n kiinnitt m n huomion erityiseen k ytt tai toimintatapaan jonka v r nlainen suoritus voi johtaa vakaviin henkil vaurioihin Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen Huomautukset sis lt v t t rke tekstiss k sitelty tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt a l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st 126 258 Special Turbo V 1K G User Manual 87 901 006 01 A Ohjek sikirja 10 Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta Valmistelut asennusta varten Special Turbo V 1K G toimitetaan erityisess suojapakkauksessa mik li siin on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti Special Turbo V 1K Gin putoamista tai siihen ko
167. roller JAK Figure 14 Case 1 Special Turbo V 1K G User Manual 87 901 006 01 A 223 258 17 Technical Information 224 258 24 Vdc Customer s A Controller 5 Vdc JAK 24 Vdc je Controller Customer s device ole 5 Vdc TE X TITT Figure 15 Case 2 with relay utilisation Special Turbo V 1K G User Manual 87 901 006 01 A Technical Information 17 Customer s device L Customer s device 24 Vdc Controller PNP 5 Vdc TRE 24 Vdc i Controller 5 Vdc BSK NPN IT Figure 16 Case 2 with transistor utilisation Special Turbo V 1K G User Manual 87 901 006 01 A 225 258 17 Technical Information 226 258 How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The figure example refers to the programmable set point signal on pins 11 and 9 lt Controller 15 08 45 08 9 f 24 V 4 1 Figure 17 Typical output connection J2 Serial Figure 18 This is a 9 pin D type serial input output co
168. rtie sous tension ne soit accessible S assurer que l isolation du dispositif branch la Special Turbo V 1K G a une isolation appropri e m me en condition de panne individuelle selon les termes de la norme EN 61010 1 Pour l installation des accessoires en option consulter le document en annexe Technical Information 46 258 Special Turbo V 1K G User Manual 87 901 006 01 A Utilization Mode d emploi 3 Ce paragraphe d crit les principales proc dures op rationnelles Avant d utiliser le syst me effectuer tous les branchements lectriques et pneumatiques Pendant le chauffage ventuel de la chambre vide la temp rature de la bride d entr e ne doit pas d passer 80 C INNER AIR Ne jamais faire fonctionner la pompe si la bride d entr e n est pas reli e a ATTENTION la chambre vide ou si elle n est pas ferm e avec la bride de fermeture Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut tre l origine de l sions graves Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque pour ne pas endommager les roulements Pour l alimentation pneumatique de la pompe utiliser de l air ou du gaz inerte exempt de poussi re ou de particules La pression d entr e travers la porte pr vue cet effet doit tre inf rieure 2 bar sup rieure la pression atmosph rique Pour le po
169. s de aquecimento elevada temperatura pode causar les es s pessoas Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomba utilizar ar ou g s inerte sem poeiras ou part culas press o de entrada atrav s da porta espec fica deve ser inferior a 2 bar acima da press o atmosf rica Para bombear gases agressivos estas bombas est o equipadas com uma porta espec fica atrav s da qual necess rio fornecer bomba um fluxo de g s inerte Azoto ou Argon para proteger os rolamentos consultar o ap ndice Technical Information ATEN AO Quando a bomba utilizada para bombear gases t xicos inflam veis ou radioactivos seguir os procedimentos adequados t picos para cada g s N o usar a bomba na presen a de gases explosivos Special Turbo V 1K G User Manual 87 901 006 01 A 71 258 5 72 258 Manual de Istruc es Acendimento e Utilizac o da Special Turbo V 1K G As seguintes instru es se aplicam Special Turbo V 1K G usada em combina o com o Navigator controller Para ligar a Special Turbo V 1K G suficiente fornecer a tens o de alimenta o O controller incorporado reconhece automaticamente os sinais de interlock e de activa o e acciona a bomba O primeiro accionamento da bomba faz se em Soft Star gue no fim do ciclo de arrangue se desactiva automaticamente por
170. s risk f r sv ra personskador MATIN Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst Detta visar p viktig information i texten F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomrade 20 C till 70 C a Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna nar de mottas och s tts i drift f r f rsta g ngen De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet 102 258 Special Turbo V 1K G User Manual 87 901 006 01 A OBSERVER Bruksanvisning 8 Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information F rberedelser f r installationen OBSERVER Special Turbo V 1K G levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att Special Turbo V 1K G inte tappas eller uts tts f r st tar eller vibrationer vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 10
171. set toimenpiteet tulee j tt valtuutetun henkil n teht v ksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin t ydellist pys htymist Antakaa t m n jalkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Special Turbo V 1K G User Manual 87 901 006 01 A 133 258 10 Ohjek sikirja Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdottomasti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla H vitt minen 134 258 Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lis tty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa etta tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker
172. sflansch nicht an die Vakuumkammer angeschlossen oder nicht mit dem Verschlussflansch verschlossen ist Wahrend des Aufheizens dirfen weder die Pumpe noch eventuelle heif e Zubeh rteile ber hrt werden Es besteht Verbrennungsgefahr VORSICHT Wahrend des Betriebs sind StoB und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftung der Pumpe trockene staub und partikelfreie Luft oder Inertgase verwenden Der Eingangsdruck am Bel ftungsanschlu soll unter 2 bar ber dem atmosph rischen Druck betragen Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer ffnungsklappe ausgestattet ber die zum Schutz der Lager Inertgas Stickstoff oder Argon zuzuleiten ist siehe Anhang Technical Information Wenn die Pumpe zur F rderung von giftigen leicht entflammbaren oder radioaktiven Gasen benutzt wird sind die fiir das jeweilige Gas vorgeschriebenen Vorg nge und MaRnahmen zu befolgen Die Pumpe darf niemals bei Vorhandensein von explosionsf higen Gasen verwendet werden Special Turbo V 1K G User Manual 87 901 006 01 A 35 258 2 Gebrauchsanleitung Einschaltung und Gebrauch der Special Turbo V 1K G Die nachfolgenden Anleitungen werden bei der Special Turbo V 1K G kombiniert mit dem Navigator Controller angewandt Zur Einschaltung der Special Turbo V 1K G ist sie mit der erforderlichen Versorgungsspannung zu versorgen De
173. stand that torque the pump could detach from the system or the motor housing could detach from the pump envelope In this case metal fragments could be projected from the pump or system which could cause serious injury or death and or damage to surrounding equipment Fix the Special Turbo V 1K G in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque of 8900 Nm around its axis The following table shows for ISO 160 F inlet flange the necessary number of screws and the relevant fixing torque Special Turbo V 1K G User Manual 87 901 006 01 A 201 258 16 Instructions for Use Tab 1 FLANGE N FIXING TORQUE ISO 160 F 8 5Nm The class of the steel screws for F flange must be gt 8 8 The Special Turbo V 1K G can be installed in any position The Special Turbo V 1K G cannot be fixed by means of its base KANN The Special Turbo V 1K G belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The Special Turbo V 1K G has Input Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the Special Turbo V 1K G is adequate even in the case of single fault as per directive EN 61010 1 For installation o
174. t l tat de fonctionnement de l appareil allum e fixe la pompe est en rotation normale clignote lentement p riode d environ 400 ms le syst me est en tat de rampe de freinage de stop ou d attente interlock a clignote rapidement p riode d environ 200 ms condition d erreur Arr t de la Special Turbo V 1K G Pour arr ter la Special Turbo V 1K G il suffit de couper la tension d alimentation Le contr leur incorpor arr te imm diatement la pompe 48 258 Special Turbo V 1K G User Manual 87 901 006 01 A Mode d emploi 3 A ESA EN Pour la s curit de l op rateur le contr leur Turbo V doit tre aliment par un c ble d alimentation 3 fils voir le tableau des parties qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent dans le contr leur peuvent provoquer de graves endommagements ou la mort Avant d effectuer les op rations d entretien l int rieur de l unit d brancher le c ble d alimentation Arr t d urgence Entretien Pour arr ter la Special Turbo V 1K G en conditions d urgence il faut d brancher le cordon d alimentation du contr leur La Special Turbo V 1K G n exige aucun entretien particulier Toute intervention doit
175. tanto todos os sucessivos arrangues da bomba n o ser o em Soft Start Para poder arrancar a bomba em Soft Start sera preciso reactivar o modo acima referido utilizando o software consultar o paragrafo RS 232 COMMUNICATION DESCRIPTION no apendice Technical Information A luz piloto verde LDI posicionada no painel da base do Navigator controller indica atrav s da frequ ncia de intermit ncia as condi es operacionais do sistema acesa fixa a bomba funciona normalmente a intermit ncia lenta periodo de aprox 400 ms o sistema est em estado de acelera o ou de paragem ou de Stop ou de waiting for interlock intermit ncia r pida periodo de aprox 200 ms condi o de erro Paragem da Special Turbo V 1K G Para deter a Special Turbo V 1K G suficiente desligar a tens o de alimenta o O controller incorporado para imediatamente a bomba Special Turbo V 1K G User Manual 87 901 006 01 A Manual de Istruc es 5 Para a seguranca do operador o controller Turbo V deve ser alimentado com um cabo de alimentac o com 3 fios ver a tabela das partes que podem ser encomendadas equipado de uma tomada aprovada a nivel internacional Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para evitar choques el ctricos e satisfazer os requisitos das normas CE As altas tens es que se desenvolvem no controller podem provocar graves danos ou at morte Antes de re
176. tee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded a temperature range 20 C to 70 C a relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date 198 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instructions for Use 16 If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations Preparation for Installation The Special Turbo V 1K G is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure t
177. ten MYK START For oppn en MYK START igjen er det n dvendig tilbakestille modusen via software se avsnittet RS 232 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gr nne lysdioden LD1 p Navigator controller basepanel angir systemets funksjon ved hjelp av blink den lyser fast pumpen roterer normalt den blinker langsomt ca hver 400 ms systemet er i stilling for akselerasjon bremsing stopp eller Waiting for interlock den blinker hurtig ca hver 200 ms feiltilstand Stoppe Special Turbo V 1K G Special Turbo V 1K G stoppes ved kople det fra str mforsyningen Den innebygde styreenheten stanser pumpen umiddelbart Special Turbo V 1K G User Manual 87 901 006 01 A Instruksjon Manual 9 ADVARSEL Turbo V styreenheten m forsynes med en 3 tr ds str mkabel se tabellen for deler som kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenheten kan f re til alvorlige skader eller d dsulykker F r man utf rer vedlikeholdsoperasjoner inne i enheten er det n dvendig kople fra str mkabelen N dstopp Trekk ut nettkabelen fra styreenheten for stoppe Special Turbo V 1K G i en n dsituasjon Vedlikehold Special Turbo V 1K G e
178. ttning av pump VARNING I h ndelse av rotorfel kan anslutningen mellan pumpen och systemet uts ttas f r ett h gt vridmoment Om anslutningen inte t l ovann mnda vridmoment kan pumpen lossna fr n systemet eller motorn kan lossna fr n pumpens h lje I s fall kan metallf rem l slungas iv g fr n pumpen eller systemet och f rorsaka allvarliga skador eller d dsfall och eller skador p apparater i n rheten F st Special Turbo V 1K G i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till systemets fl ns som m ste t la ett vridmoment p 8900 Nm kring sin axel Tabellen som f ljer anger f r fl ns ISO 160 F hur m nga skruvar som r n dv ndiga f r varje ISO K flans samt motsvarande tdragningsmoment Special Turbo V 1K G User Manual 87 901 006 01 A 105 258 8 Bruksanvisning Tab 1 FL NS ANT TDRAGNINGS MOMENT St lskruvarna f r fl nsarna F ska vara av klass gt 8 8 Special Turbo V 1K G kan installeras i valfri position Special Turbo V 1K G systemet kan inte fastsp nnas med sin egen bas Special Turbo V 1K G med Navigator controller tillh r den andra installationsklassen eller versp nningsklassen enligt standard EN 61010 1 Anslut d rf r anordningen till en elledning som uppfyller kraven f r denna klass Special Turbo V 1K G r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska anslutas till de externa kretsa
179. uestos a agentes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 35 C v ase gr fico en el anexo Technical Information humedad relativa O 95 no condensadora Despegar el adhesivo y quitar el tapon de protecci n solo al conectar la bomba al sistema 56 258 Special Turbo V 1K G User Manual 87 901 006 01 A Manual de istrucciones 4 Figura 2 Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles Special Turbo V 1K G ha de conectarse una bomba primaria v ase diagrama en Technical Information Fijacion de la bomba En caso de dafiarse el rotor la conexi n entre la bomba y el sistema puede ser sometida a un par de fuerza excesivo En estas circunstancias la conexi n podria no resistir a dicho par de fuerza y como consecuencia la bomba podria separarse del sistema o el motor podria separarse respecto del contenedor de la bomba En este caso fragmentos de metal pueden ser proyectados por la bomba o por el sistema con consiguiente grave riesgo de lesiones o muerte y o dafios a los aparatos adyacentes Fijar
180. uhu Bezpecnostny n vod pre Turbomolekul rne vyvevy Turbomolekularne vyvevy ak s nasledovne popisovan obsahuju velk mnozstvo kinetickej energie vd aka vysokej ota avej rychlosti v kombinacii s konkretnym objemom ich rotorov V pripade syst movej poruchy napr pri kontaktu rotora statora alebo pri zrucaniu rotora sa mo e uvolnit rota na energia 317419138 Pokyny k in tal cii uveden v tomto n vode musia by pr sne dodr ovan za elom prevencie zranenia obsluhy 172 258 Special Turbo V 1K G User Manual 87 901 006 01 A N vod na Obsluhu 14 Vseobecne inform cie Toto zariadenie je urcen pre profesion lnych pracovnikov Skor ne za nete zariadenie pouZivat pre itajte si navod na pou itie a v etky dal ie pokyny spolo nosti Agilent Spolo nost Agilent nenesie iadnu zodpovednos za ak ko vek udalosti zapr inen postupom ktor nie je v s lade dokonca ani v iasto nom s lade s t mito pokynmi zapr inen nespr vnym pou van m zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mko vek postupom ktor je v rozpore so pecifick mi tandardmi danej krajiny La Special Turbo V 1K G je turbomolekul rna v veva ur en pre aplik cie s vysok m a ve mi vysok m v kuom V veva dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je v ak vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi
181. uildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd
182. venta IX PA gt 62 258 Special Turbo V 1K G User Manual 87 901 006 01 A Special Turbo V 1K G User Manual 5 Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 64 Informac es gerais 65 Armazenagem 66 Preparac o para a instalac o 67 Instalac o 68 Fixac o da bomba 69 Utilizac o 71 Acendimento e Utilizac o da Special Turbo V 1K G 72 Paragem da Special Turbo V 1K G 72 Paragem de Emerg ncia 73 Manutenc o 73 Eliminac o 74 Traduc o das instruc es originais i a Agilent Technologies 63 258 5 Manual de Istru es Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es t m uma alta quantidade de energia cin tica devida a alta velocidade de rotagao unida a massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rota o pode ser liberada ATENCAO Para evitar danos aparelhagem e prevenir les es aos operadores necess rio seguir atentamente as instru es de instala o descritas neste manual 64 258 Special Turbo V 1K G User Manual 87 901 006 01 A Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instru es e todas as informac es adicionais fornecidas pela Agilent ant
183. vevy V takom pr pade sa m u z v vevy alebo syst mu prudko vymr ti kovov asti a sp sobi v ne zranenie alebo smr a alebo po kodi al ie zariadenia Upevnite Special Turbo V 1K G do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k pr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8900 Nm okolo vlastnej osi Special Turbo V 1K G User Manual 87 901 006 01 A 177 258 14 N vod na Obsluhu Nasledujuca tabulka ukazuje pre per prirubu ISO 160 F potrebny po et svoriek a prislusny upevnovaci krutiaci moment Tab 1 PRIRUBA POCET UTAHOVACI KRUTIACI MOMENT ISO 160 F 8 5 Nm Trieda oce ov ch skrutiek pre pr rubu typu F mus by vy ia ako 8 8 Special Turbo V 1K G m e by nain talovan do ubovo nej polohy Special Turbo V 1K G nem e by upevnen prostredn ctvom jej podstavca Pod a smernice EN 61010 1 patr Special Turbo V 1K G so zariaden m Navigator controller do druhej in tala nej prep ovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji ku zdroju nap jania ktor vyhovuje uvedenej kateg rii Vyv va Special Turbo V 1K G m konektory pre vstup v stup a konektory s riovej komunik cie ktor je potrebn pripoji k vonkaj iemu okruhu tak aby nebola dostupn iadna elektrick s as Presved ite sa i zariadenie pripojen k k Special Turbo V 1K G m adekv tnu izol ciu aj pre pr p
184. vpl ra agilent com http www agilent com Pg 1 3 a sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only O Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if reguesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR I HAS pumped or been exposed ta the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed L IToxic Gorrosive
185. with Navigator Controller To switch on the Special Turbo V 1K G it is necessary to supply the mains The integrated controller automatically recognizes the interlock and start signals presence and start up the pump The first pump start up is in Soft Start mode When the start up cycle is finished the Soft Start mode automatically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start mode it must be activated by the suitable software command see the paragraph RS 232 485 COMMUNICATION DESCRIPTION in the appendix Technical Information The green LED located on the Navigator controller base front panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition Special Turbo V 1K G Switching off To switch off the Special Turbo V 1K G it is necessary to remove the mains The controller immediately stops the pump 204 258 Special Turbo V 1K G User Manual 87 901 006 01 A Instructions for Use 16 WARNING The Turbo V controller must be powered with 3 wire power cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a pr
186. ych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych Special Turbo V 1K G jest pompa turbomolekularna stosowsana w przypadku wysokiej i ultra wysokiej pr zni Pompa jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowana do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 45000 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci Pompa Special Turbo V 1K G jest ca kowicie pozbawiona czynnik w zanieczyszczaj cych i w zwi zku z tym mo e by wykorzystywana do zastosowa gdzie jest wymagana tzw czysta pr nia Je eli pompa jest stosowana cznie ze sterownikiem typu Navigator controller posiada konektory pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania zaworem wentylatora zdalnego pilotowania go poprzez g wny komputer host pod czonego z szeregowym portem RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedstawione w dodatku dotycz cym informacji technicznych Technical Information Special Turbo V 1K G User Manual 87 901 006 01 A 149 258 12 Podrecznik Instrukcji Podrecznik ten opiera sie na nastepujacych konwencjach
187. zamontowan wtyczk zgodna z mi dzynarodowymi normami Kabel ten wraz z wtyczk pod czy do gniazdka uziemionego celem unikni cia pora e pr dem elektrycznym oraz spe nienia wymog w norm CE Du e si y wewn trzne wytwarzaj ce si w kontrolerze mog spowodowa powa ne uszkodzenia cia a lub mier Przed przeprowadzeniem czynno ci konserwacyjnych wewn trz tego urz dzenia od czy kabel zasilaj cy Zatrzymanie Alarmowe Aby zatrzyma w stanie awaryjno alarmowym pomp Special Turbo V 1K G nale y od czy kabel zasilania ze sterownika Konserwacja Pompa Special Turbo V 1K G nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel ZAGRO ENIE Przed wykonaniem jakiejkolwiek interwencji na systemie nale y odtaczy go od zasilania otworzy odpowiedni zawor dla wlotu powietrza odczeka az do catkowitego zatrzymania wirnika i odczeka az temperatura powierzchni pompy bedzie wynosita ponizej 50 C W przypadku usterki mozliwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zastepstwie uszkodzonego systemu Special Turbo V 1K G User Manual 87 901 006 01 A 157 258 12 Podrecznik Instrukcji Przed wysytka do konstruktora systemu do naprawy lub advanced exchange service nale y obowiazkowo wypetni i przekaza do miejscowego biura sprzeda y
188. zgl dna wilgo 0 95 bez opar Usun ta m klej c i zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu 152 258 Special Turbo V 1K G User Manual 87 901 006 01 A Podrecznik Instrukcji 12 Posta 2 W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information Pompa Special Turbo V 1K G musi by pod czona do g wnej pompy patrz schemat w dodatku Technical Information Mocowanie pompy ZAGROZENIE W przypadku uszkodzenia na wirniku potaczenie miedzy pompa a systemem moze by poddane odpowiednio wysokiemu momentowi Je eli potaczenie jest niewystarczajace aby wytrzymac dany moment pompa moze sie odczepi od systemu lub silnik mo e odczepi sie od obudowy pompy W takim przypadku fragmenty metalu moga by wyrzucone przez pompe lub przez system i moga one spowodowa powazne uszkodzenia lub mier osob jak i uszkodzi aparature znajdujaca sie w poblizu systemu Zamocowa pompe Special Turbo V 1K G w pozycji stabilnej montujac kotnierz wejscia turbopompy do kotnierza systemu dokrecajac w taki spos b aby po czenie to wytrzyma o moment 8900 Nm wok t wtasnej osi W niniejszej tabeli przedstawione zostaty dla kazdego kotnierza ISO 160 F ilo potrzebnych rub i moment dokrecenia ich Special Tu

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