TITANIUM SUBLIMATION CARTRIDGE
Contents
1. S Short description Tab 3 Holder Vacuum flange Bakeability TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 2 0 D NW35 ConFlat 250 C for normal operation 450 C with reduced life caused by oxidation of brazed 11 28 1 Instructions for Use Outline Drawing FELD CUF SST Nes KEC PLATED KCINSULATDN WGH ALU CERAMIC FEED TwOUGM RODS STAINLESS STEEL PECEIv ER Ser DB ELLEN EAD 404 MONEL MATES WITH iMYSIOBA XI I7K T ro CTOR f TI LAMENT CLAN Dat STAINLESS STEEL SOCKS WIRE Vin HIGH ALL da X TITANMIUM CERAMIC EPACER FIL AWENTE STAINLESS STEEL CLAMPING COLLARS SET GROUND NOD WITH d 5251 4 SPLIM KOWAA TRANSITION BRAZED E SET SOREN TO NSULATOR SKT FEED THROUGH SOLO PLATED RODS WiTH COPPER GOLO BRATING ALLOT STANDARD EFOD vi T MFLAT i a Fiance A 137 TET S d i374 EEE Figure 2 Outline Drawing of Titanium Sublimation Cartridge 916 0050 3 213 81 60 REF 1 545 39 23 REF 1 444 36 7 RE 23 Q D CFF 7 310 185 68 REF 7 409 188 2 REF 9 077 230 5 REF Figure 3 Drawing of short Titanium Sublimation Cartridge 716 0050 12 28 TITANIUM SUB2. Accumulated flakes may ignite at any time in the presence of air either on or off the substrate Do not clean up the flakes with a vacuum cleaner or leave the flakes in contact with any flammable materials flakes should be stored in a metal container until they can be disposed of For maximum safety during the transportation to a cleaning facility heavily coated surfaces should be enclosed in an air tight container 18 28 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Cleaning Procedure for Stainless Steel WARNING The chemicals used in this procedure are corrosive Only authorized trained personnel should make up the baths and process the parts Check relevant local safety regulations Solvent degrease in trichloroethane or equivalent Hot alkali dip for about two minutes depending on condition Rinse in hot tap water Hydrochloric acid dip Solution 1 1 HC1 tech in water at 70 C Rinse in cold tap water Nitric hydrofluoric acid dip concentrated HNO 97 by volume concentrated HF 3 by volume Dip until surfaces gases slightly then quickly rinse in water Welds and knife edge sealing surfaces will be attacked by the acid Excessive etching may cause pin hole leaks in welds or marginal seals Rinse in cold tap water three times Rinse in cold deionized water NaC 1 less than 1 ppm three times Methanol rinse electronic grade Warm air dry in clean filtered f
3. The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic C Corrosive C Reactive C Flammable Explosive C Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed the customer will be held responsible for al costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model RES Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION Does no
4. uu order cable separately 120 V TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 21 28 1 Instructions for Use Parts List 22 28 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E d Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Action request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action
5. with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the pro
6. LIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Installation Vacuum Connection Insert the cartridge in a vacuum chamber and secure it in place by the ConFlat flange with a new copper gasket between the two flanges To prevent galling apply high temperature lubricant such as Fel PRO C 100 to screw threads and between nuts and flange Uniformly tighten screw and nut set until the flange faces meet Control Unit Connection Connect the output cable of the control unit to the filament cartridge Consult the control unit instruction manual for detailed information TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 13 28 1 Instructions for Use Operating Instructions General For a detailed explanation of the sequential use and operation please refer to the instruction manual of the control unit used The theory of titanium sublimation pumping is also covered in each control unit instruction manual Filament Qutgassing Rough pump the system to a pressure below 10 Torr mbar range and outgas each new filament in turn at a current of 37 to 42 A for at least 1 minute This outgassing procedure will reduce the burst of gas released from a new filament when power is applied for pumping at low pressure Bakeout 14 28 To support the bakeout process the filament can be heated with a reduced current below the sublimation limit A current of 25 A has shown good results in practice Ta
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8. Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 rro Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATION Tel Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only C Taxable Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if requesting a billable service 3A LI Non Billable L Billable mmm New PO hard copy must be submitted with this form 3B Exchange Repair lupgrade Consignment Demo Calibration Evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIGACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem
9. TITANIUM SUBLIMATION CARTRIDGE Models 916 0050 716 0050 User Manual 87 900 097 01 E 05 2011 fh Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 097 01 E Edition Edition 05 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict
10. ate Versus Filament Current 16 28 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Maintenance Filament Replacement Vent the system using dry nitrogen and maintain a slight positive pressure during the replacement procedure Remove the filament cartridge from the system Loosen the mounting screws remove the expended filament mount the new one and install the cartridge in the system Degas the filament as in Operating Instructions Graphic Signals Cleaning of Titanium Film Titanium deposits build up on the surfaces of the vacuum chamber These deposits will flake off adding to the surface area to be pumped and cause the pumping performance to deteriorate Therefore a procedure should be developed to deposit the minimum amount of titanium required for a pumping job so that the interval between cleaning operations is as long as possible TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 17 28 1 Instructions for Use Cleaning Methods When cleaning is needed use one of these methods Bl st the internal surfaces of the pump chamber with glass beads or sand and then degrease it OR Remove loose deposits and then use the cleaning procedure for stainless steel as described in successive paragraphs Titanium flakes are flammable and may spontaneously ignite when exposed to air A dull red short lived flame may result Also vigorous abrasion may produce sparks
11. duct or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Titanium Sublimation Cartridge Titanium Sublimation Cartridge TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 3 28 Titanium Sublimation Cartridge 4 28 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Contents Contents 1 Instructions for Use 7 safety Summary 8 Safety Precautions 9 Description 10 Installation 13 Operating Instructions 14 Maintenance 17 Parts List 21 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 5 28 Contents 6 28 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E f Agilent Technologies 7 28 TITANIUM SUBLIMATION CARTRIDGE User Manual Instructions for Use safety Summary 8 Safety Precautions 9 Description 10 General 10 Product Specification 11 Outline Drawing 12 Installation 13 Vacuum Connection13 Control Unit Connection 13 Operating Instructions 14 General 14 Filament Outgassing 14 Bakeout 14 Normal Operation 15 End of Filament Life 15 Maint
12. e type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning praduct e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e f ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being retumed under a R must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must camply with all applicable Shipping
13. enance 17 Filament Replacement 17 Cleaning of Titanium Film 17 Disposal 20 Parts List 21 Replacement Part List 21 Accessories 21 Original Instructions 1 Instructions for Use Safety Summary 8 28 This instruction manual includes information required to enable qualified personnel to safely and reliably perform those functions for which the product was designed Should the product fail to operate the operator must call upon qualified maintenance personnel to troubleshoot and repair Throughout this manual you will find the words WARNING CAUTION NOTE which has the following meaning WARNING Warnings are used when failure to observe instructions or precautions could result in injury or death to humans Cautions are used when failure to observe instructions could result in permanent damage to equipment Agilent supplied and or other associated equipment Information to help you obtaining best performance from your instrument TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Safety Precautions WARNING Before connecting the cable from the controller the Titanium Sublimation Cartridge must be inserted into the vacuum system TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 9 28 1 Instructions for Use Description 10 28 General The titanium sublimation cartridge model 916 0050 fig 1 716 0050 provides a titanium source for titanium sublima
14. hnologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 0023 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1710 Toll Free 0120 655 040 Korea Agilent Technologies Korea Ltd Vacuum Products Division Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 O Agilent Technologies Inc 2011 Printed in ITALY 05 2011 Publication Number 87 900 097 01 E P Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan 8821 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxfo
15. ke care not exceeding the maximum allowed temperature of you cable amp connector during bakeout TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Normal Operation Adjust the current level to the desired setting and in accordance with the titanium sublimation rate see fig 4 The amount of current determines the temperature of the filament and in turn the rate at which titanium is sublimed For normal TSP filament operation the current should be maintained at the desired current level throughout the life of the filament A desirable current level would be 46 to 48 A CAUTION Using 716 0050 with cable 924 0730 do not exceed flash times of 5 minutes to stay below the maximum temperature of the cable End of Filament Life Filaments do not necessarily burn out at end of life Therefore other means may be used to determine when the usable titanium has been consumed End of filament life can be recognised when Desired current cannot be maintained even at maximum voltage current setting There is no improvement in pressure after power has been applied to a filament Change in resistance open circuit no current reading TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 15 28 1 Instructions for Use gr hr Atoms sec 0 10 3x10 2x10 g QU a c 2 to E n 3 o 1x10 0 45 46 47 48 Filament Current Figure 4 Typical Titanium Sublimation R
16. must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non retumed non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e l frequesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL
17. rd 0X5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
18. see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after installation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc Ee Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 o 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on th
19. t start Noise Vertical Does not spin freely Horizontal Upside down Vibrations Does not reach full speed Leak Mechanical Cantact Overtemperature PARAMETERS Power Rotational Speed Current Inlet Pressure Temp 1 Foreline Pressure Temp 2 Purge flow Cooling defective Clogging ION PUMIPS CONTROLLERS Poor vacuum High valtage prablem Bad feedthrough Vacuum leak Main seal leak Solenoid failure OPERATING TIME VALVES COMPONENTS Bellows leak Damaged flange Error code on display Other LEAK DETECTORS Damaged sealing area Other INSTRUMENTS Cannot calibrate No zero high backround Vacuum system unstable Cannot reach test mode Failed to start Other Gauge tube not working Display problem Communication failure Degas not working Error code on display Other SCROLL AND ROTARY VANE PUMPS Pump doesn t start Noisy pump describe DIFFUSION PUMPS Heater failure Doesn t reach vacuum Electrical problem Doesn t reach vacuum ver temperature Cooling coil damage Vacuum leak Other Pump seized Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments
20. tion pumping in both high vacuum and baked ultra high vacuum systems The cartridge holds three filaments and offers an economical means of pumping chemically active getterable gases at high speeds The titanium sublimation cartridge can be used with other pumps which remove non getterable gases The short TSP p n 716 0050 is for application with restricted space It should not be used in the Cryopanel p n 9190180 Figure 1 Titanium Sublimation Cartridge The filaments are made of a titanium molybdenum alloy and are constructed to prevent burnout They are held in place by gold plated set screws which allow easy filament removal and replacement The titanium sublimation cartridge mates with any 2 4 O D NW35 ConFlat flange TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Product Specification Tab 1 916 0050 716 0050 Description TSP Filament Cartridge on 2 CFF Short description TSP Cartridge 2 CFF Part number Tab 2 Filament specification 85Ti 15Mo 152 4 mm Material VETETTRHOTEEHREEEERHEETEPEEEEEEEESEREUEEEE DER EEUU E TERRA EE EA EE EE E EE EAA E EDDIE E TERRE E S DTE SERERE PEDE TEE PETERSON ERE ER EU T Maximum operating 50A current
21. ume free air at about 65 C Optional Air bake at 150 C to 400 C for 30 minutes to one hour depending on the mass of the part TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E 19 28 1 Instructions for Use Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale 20 28 TITANIUM SUBLIMATION CARTRIDGE User Manual 87 900 097 01 E Instructions for Use 1 Parts List Replacement Part List Tab 4 Replacement filament package 916 0051 Consists of 12 filaments 6 screws 8 32 x lg 3 screws 8 32 x 5 8 lg 3 nuts 8 32 Accessories Tab 5 Description Part Number ConFlat flange copper gasket pkg of 10 FG0275CI European markets Interconnection cable 929 0730 Mini Ti Ball TSP control unit 929 0023 order cable separately 220 V US markets Interconnection cable 924 0730 Mini Ti Ball TSP control unit 929 0022
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