the art300 precision rotary stage
Contents
1. 238 1 21 50 Optional Aperture 6 1 0 24 117 5 4 62 Vertical Mounting Plate 93 7 3 69 Motor Options Length SM 101SMB2 HM 135 1 5 32 46 1 1 81 7 9 0 31 DC 1050LT MSOF 178 6 7 03 9 5 0 37 la BMS BMS60 132 3 5 21 m See motor section for alternate motors and more details n pi Dimensions Millimeters Inches 162 1 26 38 202 2 87 96 O4 e 1 Bottom i Mounting Motor Mounting Surface NEMA 23 Frame 38 2 1 50 203 07 1 20 28 57 2 2 25 42 Figure 2 3 ART320 Series Stage Dimensions 2 4 Aerotech Inc Version 1 0 Setup ART 300 Instruction Manual 2 2 4 ART330 Series Stage Dimensions L 228 6 9 00 M6 1 0 Thd x 10 0 1 4 20 Thd x 0 38 Dp L 158 8 6 25 6 Holes Equally Spaced on a 250 0 10 00 B C 50 8 2 00 1 4 20 Thd x 0 38 Dp Le 114 3 4 50 74102 4 Holes 4 50 8 38 9 1 53 M6 1 0 Thd x 10 0 1 4 20 Thd x 0 38 Dp din d 25 Holes 1 1 b 1 I 4 4 L2. y 125 5 00 14 8 0 54 25 0 1 00 dize 77 43 05 23 6 0 93 7 1 80 28 Thru 25 4 0 97 3 Holes Y i A 12 9 0 47 i M6 1 0 Thd x 8 6 Dp 75 4 2 97 FE 1 4 20 x 0 34 Dp 25 Holes 150 9 5 94 100 0 4 00 125 0 5 00 25 0 1 00 L 8 1 1 50 Optional Aperture Y 26 9 1 06 07 1 20 28 I 4 Holes Home Cam E Optional Motor 52 3 2 03 Length Motor Options Length SM 50SMB2 HM 84 3 3 32 Ho 1035LT MSOF 158 2 6 23 I EET BMS60 132 3 5 21 See motor section for alternate motors and more details 38 0 1 50 m 152 4 6 00 Dimensions Millimeters Inches 0153 9 6 06 Raised Tabletop 57 2 2 25 Optional Sa i r 8 7 0 34 a 1 L 1 59 1 2 33 L za 50 8 2 00 i Tv 31 8 1 25 61 0 2 40 l 30 5 1 20 4 Ta Mounting 10 4 0 41 23 a 22 4 0 88 Figure 2 2 ART315 Series Stage Dimensions Version 1 0 Aerotech Inc 2 3 Instruction Manual Setup 2 2 3 ART320 Series Stage Dimensions M6 Thd x 7 9 Dp 6 Holes Spaced 180 T 100 0 4 00 25 0 1 00 ki a y 127 8 5 03 6 1 0 7 9 1 4 20 x 0 31 Dp 20 28 25 Holes 3 Holes 25 0 1 00 Typ 100 0 4 00
3. Ji Pins a aks ara 37 2230 04V OPTICAL 22 GRN COMMON PONO fi 088 34 1 iu 22GAN o COM a 1 4 1 1 i 14 22 PINK Home LMT N O zi go 22 W BRN A L MARKER N 1 4 1 NE 15 22 YEL Home LMT N C i 3 21 MARKER 1 1 9 OPTICAL LIMIT WIRING For stages using optical limit switch Ji SMALL STAGE LIMIT WIRING Optional op 37 Hee Hay 1 OPTICAL LIMIT SWITCH 31 22 GRN COMMON 3 m Sockel i 22 WHT CW LMI N 27 6 If applicable Mize i Jump 4 5 6 7 22 GRN COMMON 1422 __ CWLMT Remove 3 4 7 8 31 23 2 EN 27 22 WHT CW LMT N O za 1 22 GRY CCW LMT N e o 28 L 5 CCW LMT 24 2 Wires 2 amp 5 are switched with 4 amp 6 with open frame 300 Series stages or 200 Series stages with foldback motors FM e o A 200 Series Stage w 14 Foldback Motor Option FM Wire Colors For CW amp CCW A Limtis Are Switched 1 22 GRY CCW LMT N O 28 T 1 1 H LMT N O A Optional 14 22 PINK STEPPING MOTOR LIMIT WIRING No Stage Optional SMALL STAGE LIMIT WIRING Standard Jt 36 Sockets MMON 1 22 5 1 7 5 22 WHT CWLMTNO NC 22 GRN COMMON i 27 2 7
4. Instruction Manual J1 a SIGNAL SHIELD TIE BACK 16 GRN YEL i 22 GRN YEL AZ STAGE GND MOTOR FRAME 18 73 MOTOR SHIELD Da 16 WHT 2 1 47 1 jo 5 1 MN 800 oz in e LE WAT Q rm 1 uem 1___ 112 12 IT IS STANDARD TO TIE THE MOTOR SHIELD CONNECTION THE MOTOR FRAME AND LEAVE THE SIGNAL SHIELD CONNECTION FLOATING THIS PHILOSOPHY MAY BE VARIED AS REQUIRED J1 CONSISTS OF THE FOLLOWING A AMP PLUG 206151 2 B AMP EXTENDER 207055 1 OPTIONAL C AMP CLAMP 206138 1 D AMP 16 PINS 66098 7 E AMP 22 PINS 66102 7 MATE TO J1 CONSISTS OF A AMP RECEPTACLE 206150 1 AMP CLAMP 206138 1 AMP 16 SOCKETS 66100 7 AMP 22 SOCKETS 66104 7 Drawing 630C1070 Part 2 Figure 5 6 Stepping Motor Wiring Options Version 1 0 Aerotech Inc 5 7 Instruction Manual Electrical Amp Plug 206305 1 ECK111 Extender 207055 1 ECK604 Clamp 206138 1 ECK603 18 24 Pins 66102 7 EIK192 16 17 10 11 32 31 25 19 26 20 27 23 28 24 15 14 22 21 30 15 Or A R 20 WHT 16 20 BRN 17 20 ORN 10 20 YEL 11 20 RED 20 BLU 20 GRN 1 M 18 22 W BRN 35 22 W BLU 37 22 W GRN 32 22 W YEL 31 24 W RED
5. 50 8 2 00 2304 8 212 00 la 139 7 5 50 i 228 6 9 00 228 6 9 00 1 254 0 10 00 247 7 9 75 lo 25 0 1 00 140 2 5 52 4 ft E L t 1 4 20 Thd x 0 38 Dp A 4 Holes M6 1 0 Thd x 10 0 Dp 085 7103 381 6 Holes Equally Spaced Optional Aperture 1 u nn 190 1 07 1 20 28 Thru 4 Holes as Shown 1 00 yP F 50 8 2 00 i LA ET 64 3 2 53 Motor Mounting Top Mounting NEMA 34 Frame Surface a Motor Options Length Vertical Mounting SM 310SMB3 HM 165 4 6 51 Surface DC 1135LT MSOF 202 7 7 98 BMS BMS250 190 0 7 48 See motor section for alternate motors V and more details 1 11 9 0 47 Dimensions Millimeters Inches 127 0 5 00 88 9 3 50 ati 1 15 9 0 62 14 4 0 56 Typ 93 6 3 69 Typ Bottom Mounting T 0235 0 29 25 Surface Figure 2 4 ART330 Series Stage Dimensions Version 1 0 Aerotech Inc 2 5 ART300 Instruction Manual Setup 2 6 Aerotech Inc Version 1 0 Instruction Manual Application Notes CHAPTER 3 APPLICATION NOTES In This Section So 3 1 e Fastening Application 3 2 Life Expectancy and Load Capability 3 4 3 1 Introduction When the stage is secure the motor drive can be installed per
6. VARIED AS REQUIRED SOCKETS PINS J1 CONSISTS OF THE FOLLOWING 02 06 1132 5 3 02 06 2132 5 ON STAGES MOTORS SHIPPED PRIOR TO 5 20 86 MARKER A AMP PLUG 206151 2 S CKETS BIS WENT TO PIN 14 HOME LIMIT WENT TO PIN 21 B AMP EXTENDER 207055 1 OPTIONAL C CLAMP 206138 1 D 16 PINS 66098 7 E 22 PINS 66102 7 MATE TO J1 CONSISTS OF A AMP RECEPTACLE 206150 1 B AMP CLAMP 206138 1 C AMP 16 SOCKETS 66100 7 D AMP 22 SOCKETS 66104 7 Figure 5 5 5 6 MOLEX CONNECTOR DEFINITION 03 06 1061 I SOCKETS 3 02 06 1132 29 SOCKETS 03 06 2062 ete PINS 02 06 2132 PINS ROTATIONAL REFERENCE IS LOOKING INTO THE FLANGE OF THE MOTOR CW LIMIT STOPS CW ROTATION OF THE MOTOR CCW LIMIT STOPS CCW ROTATION OF THE MOTOR Drawing Number 630C1070 Part 1 Limit Home Wiring Options Aerotech Inc Version 1 0 Electrical Ji 30 122 GAN VEL A SIGNAL SHIELD TIE BACK 16 GRN YEL 1 AP STAGE GND MOTOR 182 73 MOTOR SHIELD FRAME qg WHT BRN GRN 10 BAWHT RED 45 50 65 100 RED vil m 101 200 300 5 g LGZWAT ORN DAAA 41 SEN BLK rm EASTERN AIR Ji 5 RED i mu 3 E 11 98 a 1 000 oz in Sigma 24 4272 g P 8 A y 16 GRN YEL _ 7 STAGE GND 22 GRN YEL LTO MOTOR 18 777 MOTOR SHIELD 22
7. Line Driver 75158 or Motorola MC3487 Sink 40 mA MOTOR 16 16 e E Source 40 mA Marker N Spli MOTOR v 10 a die MOTOR Q 17 BLK GNEL To Brd Mtg Standoff 16 Frame GNDIN 1 o YEL 22 D 18 22 G 160 Optional Connection to Frame 45V w 7 22 VIO 20 Te NE PR IEI ifi T onum 22 GRN d GRN A HO a ce er Yen W 400 500 3000 Srs 400 500 3000 Srs CW LIMIT N CW LIMIT R 27 22 WHT ur singe 28 07 en 4 2 mess CCW LIMIT N CCW LIMIT s 28 22 GRY 2 4 HOME LIMIT N HOME LIMIT T 14 22 PINK 5 l X inar Recept wsstoeA 2a LBukhead 206151 1 Form A Form B Standard Insert MS24 28P Pins Mesi Terminal Strip Limit Wiring Limit Wiring MATE 690B1270 Standard Optional Optical LMT SW Wiring Optical LMT SW Wiring MATE Recept 206150 1 Sockets 16 18 66100 7 Sockets 20 24 66104 7 Clamp 206138 1 Str Plug MS3106A 24 Insert MS24 285 Clamp AN3057016 Assembly Drawing Reference 23 Frame Size 1017 1035 1050 MO MSOI 041C01 1700 w Tach 041C01 1000 w o Tach MOF MSOF 035C01 1800 w Tach 035C01 1400 w o Tach 34 Frame Size 1075 1135 MO MSOI 041001 1800 w Tach 041D01 1100 w o Tach MOF MSOF 075D01 1800 w Tach 075D01 1500 w o Tach 42 8 Larger Frame Size 1210 1410 1580 1960 MO MSOI 041D01 1900 2 w
8. SIN N SIN Bias or COS COS N Bias to obtain proper phasing D SIN Wave encoders have SIN SIN N COS COS N outputs Encoder wire colors may be interchanged SIN N SIN or COS N COS to get proper phasing Marker and Marker N are also Output 630C1066 Motor Stage Wiring amp Assembly DC Encoded Drives MSO 1 MSO F 5 2 Aerotech Inc Version 1 0 Electrical Instruction Manual MSOI MSOF 4 MO MOF No connector at Encoder Terminal Card J1 solder wires te 69081207 Board Ji 22 W RED R5 12 5 WHT BLU Amplified COS 25 5 Sinewave k 19 22 W ORN p 8 BLU Encoder 22 W YEL A 7 YEL SIN F 26 7 s nan 20 22W GRN 1 M WANE 32 22 1 1 BLK JP installed as standard RENTE c1 A 422 VEL Remove as required R2 2200 3 RED SV A STD WwraRY 2 Pu 2 DAN MARKER G 21 Wy BRN 4 1202 e A MARKER N 22 3 Delete Jumpers Gale Bada GU 11 12 13 14 15 16 17 18 Due to encoder Variations wire colors may be interchanged to get hasing SIGNAL SHIELD 16 GRN YEL Tord Ma interchanged to get proper phasing D MEE EL Encoder Signal and Electrical Specs TACH CW Motor Rotation b See Note 1 27 34 Hee WIT op
9. Table 4 3 ART320 Series Standard Motor Information Code Type Model Bus Amps Cable Driver BMCHPD BFCD Us renter 004 EMS aussen ww 18 Am P la PMCHPD BFCD BAI BMP2HPD BFCD U100Z U511 DR500 1050LT adc DMS DR600 DC DC Servo MSOF 40 VDC ae A POE BADC MSOI 501 BA E1000LD P BADC MSO1 BAI DCC U100S U511 DR500 D SM Microstepping 40 VDC up to S A N R600 SMC U100M Table 4 4 ART330 Series Standard Motor Information Code Type Model Bus Amps Cable Driver BMC2 BFC U511 DR500 DR600 BM Brushless BM250E Up to 320 up to 7 1 Ayn Cont PMC BFC BB501 BA Default Servo VDC up to 17 8 Aim Peak BAI BMP2 BFC U100Z 11351 DC MSO U511 DR500 DR600 up to 5 5 A Cont BADC MSOI BB501 BA Be DO n 80 VDC upto11 0 A Peak BADC MSOI BAI E1000LD DCC U100S 310SMB3 SMS O U511 DR500 DR600 SM Microstepping HM 80 VDC up to 6 A SMC U100M 4 2 Aerotech Inc Version 1 0 Electrical Instruction Manual CHAPTER 5 ELECTRICAL In This Section GAIN TOUEL ODE e SE E KE 5 1 StEPPIN 5 2 5 1 Introduction Aerotech ART300 series rotary translation stages can be supplied with a full line of Aerotech positioning and motion controls When the ART 300series stage is part of an Aerotech system refer to the system manuals and documentation for additional installation
10. Tach 041D01 1900 1 w o Tach MOF MSOF 075D01 1800 w Tach 075D01 1500 w o Tach Figure 5 4 Active Lo Outputs Standard 1 Motor Rotational Reference CW CCW rotation is viewed from the flange end of the motor 2 Limits CW amp CW N signal indicates over travel in the clockwise direction CCW amp CCW N signal indicates over travel the counter clockwise direction 5V TTL logic output and dry contact switch closure shown Most Aerotech controls are standardly configured to accept active low limits with active high limits or Form being optional Reference applicable system manual or system print Home Limit All Aerotech controls are configured to accept home limit input for generating a cold starting reference point This input may come from an independent switch cam sw on rotary stage or may be paralleled form the CCW Standard or CW optional limit sw on linear stages A Reversed Limit Wiring Reverse limit switch wiring is used for 300 series open frame stages Wire Color Wire colors are reversed with 200 series stages that incorporate a foldback motor FM option Motor Stage Wiring Active Hi Outputs Optional Drawing 630C166 3 Motor Stage Wiring 8 Assy DC Encoded Drives MO MOF MSOF MSO Using SineWave Output Encoders Version 1 0 Aerotech Inc 5 5 Instruction Manual Electrical CAM SWITCH or MICRO SWITCH WIRING OPTICAL HOME WIRING
11. 1 Product Information Sheet 2 1 Product Installation 1 1 Product Mounting 1 1 Pump down 6 2 R Recommended Lubricant 7 4 Resolution 4 1 S Safety Procedures 1 5 Serial Number System 2 1 Setup 2 1 Shipping Label 2 1 Software 2 1 Specifications 4 1 Performance 2 1 Stage 5 1 Stage Dimensions 2 2 Standard Features 1 2 Storing the Mount 6 2 System Hardware Update 2 1 System Labeling 2 1 System Part Number 2 1 System Serial Number 2 1 System Software Update 2 1 T Temperature Effects 3 3 Trapped Gases 6 2 U Update System Hardware 2 1 Update System Software 2 1 Vacuum Applications 6 2 Handling 6 2 Installation 6 2 Preparation 1 3 W Warnings 1 5 Warranty Information 1 Warranty Policy 1 Wiring 5 2 5 3 5 4 5 5 5 6 5 7 ii Aerotech Inc Version 1 0 READER S COMMENTS The ART50 ART100 Precision Rotary Stage User s Manual P N EDA146 March 2001 Please answer the questions below and add any suggestions for improving this document Is the information Adequate to the subject Well organized Clearly presented Well illustrated Would you like to see more illustrations Would you like to see more text How do you use this document in your job Does it meet your needs What improvements if any would you like to see Please be specific or cite examples Your name Your title Company name Add
12. Setup 2 3 Stage Dimensions 2 2 1 ART310 Series Stage Dimensions 25 0 1 00 M6 1 0 Thd 8 6 Mou yp 1 4 20 Thd x 0 34 Dp 9 Holes 63 5 2 50 is de 127 0 5 00 d 100 0 4 00 L 38 1 81 50 Optional Aperture 13 5 0 50 26 9 1 06 71 0 28 Dia 4 Holes 38 5 1 50 Optional Motor Options Length 50SMB2 HM 84 3 3 32 Motor 1035LT MSOF 158 2 6 23 Length BMS60 132 3 5 21 See motor section for alternate p motors and more details Dimensions Millimeters Inches 29 0 1 14 l ent 37 0 1 46 4 2106 1 24 18 Raised Tabletop 57 2 2 25 Optional Sq 8 6 0 34 i 1 59 1 233 FIS 1 61 0 2 40 T NE 88 48 2 1 90 30 6 1 20 34 8 1 37 TI Motor Mounting NEMA 23 Frame Figure 2 1 ART310 Series Stage Dimensions 2 2 Aerotech Inc Version 1 0 Setup Instruction Manual 2 2 2 ART315 Series Stage Dimensions
13. WHT GRY 4 ORN MARKER G 21 4 AWA 22 WHT BRN 3 MARKER N M 22 3 o Pin Connector Connect if L_ interfacing to switching amps 2 16 GRN YEL Connect To 30 7 Frame DATAMETRIC 22 WHT aa W Square Wave Z 34 TACH Output Encoder 60 On 64081207 v 29 22 BLU 70 R4 R8 12M H 5 16 RED M Only 1210 8 Larger Motors 104 Delete R3 ME 20 BLS 16 RED MO MSO I All Motors 40 Add Jumpers J 16 11 12 17 18 10 16 BLK __ Mso4 1210 amp Lgr Motors NI 99081207 1554 Cati o 17 16 MO MSO All Motors u 11 16 BLK___ MO 1210 amp Larger Motors 0000000 0 Small Stage Limit Wiring o Amp Plug 640234 6 6 Opt Con 22 G YEL bo elle Optional Contacts 640230 1 2 5 D 18 Connect sv w or 2200 po ZIEL Optional Optical Brn 42 2 Low Limit x 31 228 te s Lez el ee pi 111 iow Limit CW LIMIT N R 27 22 WHT 131 3 4 A SEE Home Lmt 22 GRY Switch CCW LIMIT N 28 4o 4l 477 777 7 74 When 300 series stgs HOME LIMIT N T 14 22 PINK bo 5 5 vina 0315 interchanged A Recept MS3102A 24 J 206151 1 69081270 B Pins 20 24 66102 7 MATE Str Plug MS3106A 24 Angle Plug Optional MS3108A or B 24 Insert MS24 285 Clamp AN3057016 MATE Recept 206150 1 Sockets 16 18 66100 7 Sockets 20 24 66104 7 Clamp 206138 1 6 For 1035 amp 1050 Motor see ES112
14. and operation information All systems are adjusted for optimum performance The end user need only connect the interconnecting cable from the drive chassis to the stage and apply power Never connect or disconnect any electrical component or interconnecting cable while power is applied Serious damage will result WARNING Version 1 0 Aerotech Inc 5 1 Instruction Manual Electrical 5 2 Stepping Motor Wiring For stages equipped with standard Aerotech stepping motor configurations please refer to the following Figures Standard Color Code Shown Insert MS24 28P Pins 16 18 66098 7 MSOI MSOF MO MOF No connector at Encoder Terminal Card Due to encoder variations wire colors J1 solder wires to 690B1207 may be interchanged to get proper Board hasing DATAMETRIC JI phasing cos 25 22 HT RED 5 K WHT LU Sins Wave cos 22 WHT HORN s Ug BLU Output Encoder 5 22 WHT YEL R 116 7 YEL On 640B1207 SIN F 26 7 Mu 11 FA 120 ap 22 WHT AIR Lg 8 WHT YEL R5 RB ik 22 BRN 1 BLK Delete A3 COM 32 lt 1 ER NET x Bam bassi j e iili sumet 4V 35 22 2 RED 15 16 17 18 1 22
15. the directions in Chapter 5 After becoming comfortable with the drive electronics verify that the maximum speed is obtainable without encountering any fault conditions 1 e loss of steps with the stepper motor assembly Do this before any delicate payloads are attached Document all results Version 1 0 Aerotech Inc 3 1 Application Notes ART 300 Instruction Manual 3 2 Fastening the Application When fastening the payload to the upper mounting surface the mounting interface should be coplanar within 0 00001 in in for valid accuracies It is recommended that feet or pads be used on the mounting surface to minimize the amount of surface needed to be coplanar 3 2 Aerotech Inc Version 1 0 Instruction Manual Application Notes 3 3 Temperature Effects The permissible ambient temperature operating range of the stage assembly is 32 F to 140 F in a non condensing atmosphere Due to thermal expansion or contraction the geometry of the stage will vary slightly with temperature Version 1 0 Aerotech Inc 3 3 Application Notes ART 300 Instruction Manual CS 3 4 Life Expectancy and Load Capability The accuracy specification of ART300 series stages is measured at the center of travel 1 75 inches above the table with the stage in a horizontal position It is recommended that application loads be symmetrically distributed i e the payload should be centered on the stage table and the entire
16. w Tach 035C01 1400 w o Tach 34 Frame Size 1075 1135 MO MSOI 041D01 1800 w Tach 041D01 1100 Tach MSOF 075D01 1800 w Tach 075001 1500 w o Tach 42 amp Larger Frame Size 1210 1410 1580 1960 MO MSOI 041D01 1900 2 w Tach 041D01 1900 1 w o Tach MSOF 075D01 1800 w Tach 075D01 1500 w o Tach Figure 5 2 1 Motor Rotational Reference Active Lo Outputs Standard CW CCW rotation is viewed from the flange end of the motor 2 Limits CW amp CW N signal indicates over travel in the clockwise direction CCW amp CCW N signal indicates over travel in the counter clockwise direction 5V TTL logic output and dry contact switch closure shown Most Aerotech controls are standardly configured to accept active low limits with active high limits or Form being optional Reference applicable system manual or system print Home Limit All Aerotech controls are configured to accept a home limit input for generating a cold starting reference point This input may come from an independent switch cam sw on rotary stage or may be paralleled form the CCW Standard or CW optional limit sw on linear stages A Reversed Limit Wiring Reverse limit switch wiring is used for 300 series open frame stages Wire Color Wire colors are reversed with 200 series stages that incorporate a foldback motor FM option Motor Stage Wiring Active Hi Outputs Option
17. 17 5 Standard wiring shown with solid line Optional wiring dotted 4 CW Limit stops CW rotation 3 Rotational reference is looking into flange of motor 2 Wiring phase applies when the encoder is mounted On the rear of the motor tach assembly 1 Wiring is the same for x and axis 1 1 Marker 1 tor Figure 5 1 Add jumper if no separate Home Limit Switch is employed amp ES11161 is implemented on the system drive card SL or PL Jumper 4 5 is needed for standard CCW Home Jumper 3 5 is needed for optional CW Home 03 06 1032 03 06 2032 Sockets Pins 02 06 1132 02 06 2132 Motor Stage Wiring ot BLU Trump Ross a WHT Encoder ORN Sine Wave ol Output Encoder ot 640B1207 R GRN R4 120 R5 R8 1K 20 BED Del R1 R2 4 RED BLK 301 WHT BLK Delete Jumpers 690B1207 15 16 17 18 Depending on signal phase relationship from encoder jumpers may be different than shown NOTES ON ENCODER OUTPUTS A Both SIN and Square Wave encoder outputs are designed to input to a differential amplifier for noise immunity B Note to Customer The units you receive will be properly phased On account of C amp D below the color codes of the encoder wiring output may be different from the color shown on the drawing C Square Wave Encoders have SIN SIN N Bias COS N COS Bias Marker and Marker N Bias outputs Encoder wire colors may be interchanged
18. 25 24 VIO 19 24 GRN 26 24 RED 20 24 WHT 27 24 ORN 23 24 GRY 28 24 BLU 24 24 YEL 15 24 PINK 14 24 BLK 22 24 BRN 21 30 Cable P N Figure 5 7 682A1021 ECX505 Amp Receptacle 206150 1 12 Extender 207055 1 ECK604 Clamp 206138 1 ECK603 18 24 Sockets 66104 7 EIK152 Cut Two Internal Jacks Back To Different Lengths So Internal Shields Do Not Short Drawing 630C1070 3 Output Interconnecting Cable SM O using 682A1021 Cable Output Interconnecting Cable SM O 5 8 Aerotech Inc Version 1 0 Vacuum Operation ART 300 Instruction Manual CHAPTER 6 VACUUM OPERATION In This Section Introductions e e 6 1 e Prep for Vacuum Operation 6 2 6 1 Introduction As an option Aerotech will prepare the ART300 series stage for operation in a vacuum environment Version 1 0 Aerotech Inc 6 1 ART300 Instruction Manual Vacuum Operation 6 2 Prep for Vacuum Operation Meticulous attention to detail during modification cleaning and assembly has resulted in a stage with optimal performance in high vacuum applications 10 torr Some of the features of this preparation are 1 Lubrication with vacuum compatible lubricants 2 Use of only materials with negligible outgassing under vacuum 3 Elimination of situations that may allow gases to become temporarily trapped during pump down 4 Extensively cleaned and baked ou
19. 3 0 pm 120 pin i 80 pin Axial 25 0 kg 55 1 Ib 45 0 kg 99 2 Ib 0535 i Maximum Load Radial 10 0 kg 22 0 Ib 25 0 kg 55 1 Ib AE 198 4 Ib Output Torque 0 7 kg m 4 6 kg m so 0 3 kgm lb in 60 400 b in Nominal Stage Motor 2 0 kg 4 4616 2 9 kg 6 4 Ib 6 4 kg 14 116 14 3 kg 31 5 Ib Weight w Motor 3 1 kg 6 8 Ib 4 0 kg 8 8 Ib 7 5 kg 16 5 Ib 17 9 kg 39 5 Ib Material Stage and Table Aluminum PARENCAS Tables Aluminum Paint Textured Epoxy Polane T Finish Stage Black Anodize Pebble A y a fade Coating 62 Rockwell Hardness Teflon Impregnated 1 Measured 75 mm 3 in above table includes wobble and eccentricity components Version 1 0 Aerotech Inc 4 1 ART300 Instruction Manual Specifications 4 2 Motor Information Table 4 2 ART310 ART315 Series Standard Motor Information Code Type Model Amps Cable Driver BMCHPD BFCD a Ou fupi aro TARA BOL Au PMCHPD BFCD BAI BMP2HPD BFCD UI00Z U511 DR500 1035LT DR600 DC DC Servo MSOF 40 VDC 82 A Peak BADC MSO1 BB501 BA E1000LD BURN BADC MSOI BAI DCC U100S SMS O U511 DR500 D SM Microstepping ene 40 VDC uptolA R600 SMC U100M
20. 94 81 133 22 ORN 23 SWIMEND ala M22GRY COWLMTNOJNG T H LMT N O UT iara asia s 1 s 22 WHT CWLMTNO 1 ole 14 22 PINK A Optional A FORM A N O T 1 T or p 1 1 LL 1 N C 7 i 1 1 A Form A is standard when 24 22 BLU CCW LMTN C 1 5 5 i interfacing to an Aerotech Drive NE 1 1 STANDARD MOTOR LIMIT WIRING No Stage Standard 1 n 1 22GRY CCW 1 L 8 1 1 i 37 22 VIO ov 6 If needed for Optical Limit H LMT N O A MAY ANE 31 22 GEN COMMON 1220 ecc es el A 23 22 WHT CWLMTNC L 14 22 PINK Optional Sa Ned If 200 Series Stage w 22 ORN CW LMT NO N C 1 l 15 L2 YEL Foldback Motor Option FM 27 2 gt r 9 e 4 H LMT N C Wire Colors ForCW amp CCW po 556534 LI Limtis Switched 24 22 CH SCHLMEN G 5 p 22 BLU CCW LMT N O NC 28 1 1 gt 9 9 FORMA N O 14 422 YEL or 15 FORM B N C Lo Form A is standard when interfacing to an Aerotech Drive A LMT N C IT IS STANDARD TO TIE THE MOTOR SHIELD CONNECTION TO THE MOTOR FRAME AND LEAVE THE SIGNAL SHIELD CONNECTION FLOATING THIS PHILOSOPHY MAY BE MOLEX CONNECTOR DEFINITION STANDARD ARRANGEMENT FOR HOME LIMIT WIRING IS TO PARALLEL THE CCW LIMITS IF CW HOME IS REQUIRED 03 06 1032 1 THE CW LIMITS SHOULD BE WIRED IN PARALLEL INSTEAD 03 06 2032 1
21. B2 HM ART330 310SMB3 HM NM No motor or encoder Options HC Home cam assembly establishes home reference accurate to one count Requires home marker or encoder option on motor RB310U Raised tabletop for ART310 English RB310M Raised tabletop for ART310 metric RB315U Raised tabletop for ART315 English RB315M Raised tabletop for ART315 metric RB310UA Raised tabletop for ART310 English with aperture RB310MA Raised tabletop for ART310 metric with aperture RB315UA Raised tabletop for ART315 English with aperture RB315MA Raised tabletop for ART315 metric with aperture Accessories HDZ3 English right angle L bracket for ART310 ART315 HDZ3M Metric right angle L bracket for ART310 ART315 HDZA English right angle bracket for ART320 ART330 HDZAM Metric right angle bracket for ART320 ART330 Listed options may be superseded at any time Refer to the most recent addition of the Aerotech Motion Control Product Guide for the most current product a information 1 4 Aerotech Inc Version 1 0 Instruction Manual Overview 1 4 Safety Procedures and Warnings The following statements apply throughout this manual Failure to observe these precautions could result in serious injury to those performing the procedures and or damage to the equipment To minimize the possibility of electrical shock and bodily injury make certain that all of the ele
22. D FIELD SERVICE In This Section Laser Product Warranty e Return Products Procedure e Returned Product Warranty Determination e Returned Product Non warranty Determination e Rush Service On site Warranty Repair e On site Non warranty Repair Aerotech Inc warrants its products to be free from defects caused by faulty materials or poor workmanship for a minimum period of one year from date of shipment from Aerotech Aerotech s liability is limited to replacing repairing issuing credit at its option for any products which are returned by the original purchaser during the warranty period Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer where or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided or whether or not Aerotech s products are specifically designed and or manufactured for buyer s use or purpose Aerotech s liability or any claim for loss or damage arising out of the sale resale or use of any of its products shall in no event exceed the selling price of the unit Aerotech Inc warrants its laser products to the original purchaser for a minimum period of one year from date of shipment This warranty covers defects in workmanship and material and is voided for all laser power supplies plasma tubes and laser systems subject to electrical or physical abuse tampering such as opening
23. MO MSOF Using Datametric K3DM XXX 5C0 6B Encoder Aerotech Inc Version 1 0 Electrical Instruction Manual MSOI MSOF MO MOF No connector a Encoder Terminal Card solder wires te P C Board 69081207 l 22 W RED 5 Amplified COS E 25 5 Sinewave cos n k 19 B22 W ORN 6 TRUE SIN F 26 22 W YEL 7 90 A 5 Renco R8023D 3 8 H 5 LD S SIN N L 20 722 en 8 5 a ENC 32 tists LEDEX K3DM JP1 installed as standard L 908 Remove as required R2 22 YEL d AR ex 5 7 5V 35 a 2 Te 5 Fquivalent MARKER G 21 RN 4 00 e MARKER N 22 3 A L Delete R1 R2 Delete Jumpers Standard Color Code Shown 11 12 13 14 15 16 17 18 Due to encoder variations wire colors may be 16 GRN YEL 1 To Mt interchanged to get proper phasing SIGNAL SHIELD 30 T Sendo Encoder Signal and Electrical Specs CW Motor Rotation b See Note 1 TACH z 34 22 WET es 22 BLU rt Supply Voltage 5 TACH Y 29 T Ar Supply Current 150mA t 1 aki SONYA Freq Response Cos Sin 75 kHz 1 1 Marker 20 kHz MOTOR 6 16 4 Vj Output Device Texas Inst
24. MOF MSOF See 075D01 1800 Connect Optional Optical 1 Switch 690 1090 thru 3 690 1095 6 5 When 300 stgs are 7 used wiring to 1 5 amp J1 6 must be interchanged 690B1270 Add jumper if no separate Home Limit Switch is employed amp ES11161 is implemented on the system drive card SL or PL Jumper 4 5 is needed for standard CCW Home Jumper 3 5 is needed for optional CW Home Figure 5 3 AA 22 w gt 9 a Standard Color Code Shown Due to Encoder variations wire colors may be interchanged to get proper phasing Small Stage mit Wiring 6f Opt Con 2 5 SE 1 43 3 3 Limit 4 Le eicow Limit 5 pere JHome Lmt CAM Switch SCKTS 1 2 3 03 06 1032 03 06 2032 Sockets 02 06 1132 02 06 2132 Motor Stage Wiring A ENCODER TERMINAL CARD SET UP 1 Delete jumpers 11 12 13 14 15 16 17 18 2 Delete resistors Ri 8 R2 3 R3 through R8 1200 1 4 W TRIMPOT DEFINITION Marker Marker N Pulsewidth Trimpot SIN SIN N Duty Cycle Trimpot The trimpots are factori set and glyptolled They ordinarily should not require re adjustment A ENCODER SIGNAL DEFINITION cw op P 3 2V ov COS N cos SIN SIN N Marker l Marker Waveforms CW Rotational reference is looking into motor flange Output Device is 74504 630C1066 2 Motor Stage Wiring amp Assembly DC Encoded Drives
25. THE ART300 PRECISION ROTARY STAGE USER S MANUAL P N EDA146 V1 0 AEROTECH AEROTECH Inc 101 Zeta Drive Pittsburgh PA 15238 2897 e USA Phone 412 963 7470 e Fax 412 963 7459 Product Service 412 967 6440 412 967 6870 Fax WWW aerotech com If you should have any questions about the ART and or comments regarding the documentation please refer to Aerotech online at http www aerotech com For your convenience a product registration form is available at our web site Our web site is continually updated with new product information free downloadable software and special pricing on selected products The ART300 Precision Rotary Stage User s Manual Revision History Rev 1 0 March XX 2001 Aerotech Inc 2001 Instruction Manual Table of Contents TABLE OF CONTENTS CHAPTER 1 OVERVIEW ee nah 1 1 1 1 Introd ction DE a 1 1 1 2 Descenption hn DRE sext S 1 2 1 ART300 Model eene emen emen 1 3 1 4 Safety Procedures and 1 5 CHAPTER 25 SETUP 2 1 2 1 Install t100 2 1 2 1 1 Read INStrUCtiIODNS vrrrrrororooooorororororooosorosososooososooseoeoee 2 1 212 Unpack Stage 2 oerte eite eges 2 1 2 1 3 Prepare Mounting Surface eee nn emana ace 2 1 2 1 4 Bolt Down Stage nenea enma ana emana 2 1 2 2 Stage Dimensions ree
26. al Drawing 630C166 1 Motor Stage Wiring amp Assy DC Encoded Drives MO MOF MSOF MSOI Using SineWave Output Encoders Version 1 0 Aerotech Inc 5 3 Instruction Manual Electrical MSOI MSOF cos COS N SIN SIN N ENC COM 5 MARKER MARKER N SIGNAL SHIELD TACH TACH MOTOR MOTOR FRAME GROUND MOTOR SHIELD LIMIT 5V LIMIT COM CW LIMIT N CCW LIMIT N HOME LIMIT N Recept MS3102A 24 Insert MS24 28P MATE Str Plug MS3106A 24 Angle Plug Optional MS3108A or B 24 Insert MS24 285 Clamp AN3057016 MO MOF P h ne Card to P C Board DATAMETRIC 22 w RED nn 22 w ORN aiii 22 w YEL 22 w GRN K3DM XXXX 5CO 6B xxxx line count interfacing to switching 22 w GRY Pin Connector Connect if Output Device is 74804 16 GRN YEL Frame cur lt MT 16 BLK MO MSOI MSOF 1210 amp Lgr Motors Amp Plug 640234 6 Contacts 640230 1 Optional coc ZCO lt Pins 16 18 66098 7 Pins 20 24 66102 7 MATE Recept 206150 1 Sockets 16 18 66100 7 Sockets 20 24 66104 7 Clamp 206138 1 Assembly Drawing Ref Small Motors 1017 1035 1050 MO MSOI See ES11217 MOF MSOF See 035C01 1800 Large Motors 1075 1135 1410 1580 1960 MO MOSI See Motor Outline DWG
27. ction Manual Appendix A Returned Product Non warranty Determination Rush Service On site Warranty Repair On site Non warranty Repair Company Address After Aerotech s examination the buyer shall be notified of the repair cost At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight or authorize the product s to be shipped back as is at the buyer s expense Failure to obtain a purchase order number or approval within 30 days of notification will result in the product s being returned as is at the buyer s expense Repair work is warranted for 90 days from date of shipment Replacement components are warranted for one year from date of shipment At times the buyer may desire to expedite a repair Regardless of warranty or out of warranty status the buyer must issue a valid purchase order to cover the added rush service cost Rush service is subject to Aerotech s approval If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts and cannot be returned to the Aerotech service center for repair and if Aerotech determines the problem could be warranty related then the following policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech covering all transportation and subsis
28. ctrical power switches are in the off position prior to making any electrical connections DANGER To minimize the possibility of electrical shock and bodily injury when any electrical circuit is in use ensure that no person comes in contact with the circuitry m DANGER When this stage is connected to a mechanical system mechanical motion will occur Care must be exercised that all personnel remain clear of any moving parts gt DANGER To minimize the possibility of bodily injury make certain that all electrical power switches are in the off position prior to making any mechanical adjustments m DANGER Version 1 0 Aerotech Inc 1 5 Overview Instruction Manual 1 6 Aerotech Inc Version 1 0 Setup ART 300 Instruction Manual 2 SETUP In This Section 2 1 Stage DIMENSIONS 2 2 2 1 Installation This section covers the handling mounting and installation of the ART300 series stages For added clarity each step of the installation instructions has been broken down into component parts The ART300 series stage should only be installed by those who read and thoroughly understand this manual Each step appears below 2 1 1 Read Instructions When performing the installation instructions do not continue to the next step until you have properly completed the previous step s 2 1 2 Unpack Stage Carefully remove the stage from the protect
29. eter rotary stage Stage Construction Options IVAC3 Vacuum preparation of stage to 10 torr VAC6 Vacuum preparation of stage to 10 torr Mounting and Grid Pattern M Tabletop with metric dimension mounting pattern and holes U Tabletop with English dimension mounting pattern and holes MA Tabletop with aperture and metric dimension mounting pattern and holes UA Tabletop with aperture and English dimension mounting pattern and holes Gear Ratio 54 1 gear ratio G54 ART310 ART315 Standard ART320 Optional 108 1 gear ratio G108 ART310 ART315 Optional ART320 ART330 Standard only ratio available with ART330 216 1 gear ratio ART310 ART315 Optional G216 Version 1 0 Aerotech Inc 1 3 Overview Instruction Manual Table 1 2 Model Options Continued Motor BMS Brushless servo motor with connectors and 1000 line encoder Requires motor to controller cable ART300 ART315 ART320 BMS60 A D25 E1000H BM Brushless servo motor with connectors and 1000 line encoder Requires motor to controller cable ART330 BM250 MS E1000H DC servo motor with connectors and 1000 line encoder Requires motor to controller cable DC ART310 ART315 1035LT MSOF E1000LD ART320 LOSOLT MSOF E1000LD ART330 1135LT MSOF E1000LD Stepping motor with 4 6 m 15 ft integral cable and home marker pulse one per rev SM ART310 ART315 50SMB2 HM ART320 101SM
30. igh strength aluminum plate e Aluminum surfaces are either clear or black anodized e Large aperture versions available e Optional right angle brackets for orienting perpendicular to mounting surface e Compatibility with a full line of Aerotech positioning and motion controls e Standard stage and motor mounted optical home markers DC brushless torque motor comes standard e Optional preparation for vacuum operation 10E 6 torr 1 2 Aerotech Inc Version 1 0 Instruction Manual Overview 1 3 ART300 Model Numbers The stage model number indicates the optional features on a particular stage To determine the options on your stage refer to Table 1 1 The example given is ART310 M G54 BMS which designates a 100 mm stage a metric mounting and grid pattern a 54 1 gear ratio and a brushless servo motor Table 1 1 ART300 Model Numbering System ART310 M G54 BMS ART3 10 M G54 BMS Table Stage Construction Mounting and Gear series Diameter Options Grid Pattern Ratio Motor Options HC RB310U 10 M BMS RB310M 15 NAC3 U G54 BM RB310UA 20 NAC6 MA G108 DC RB310MA 30 VA G216 SM RB315U NM RB315M RB315UA RB315MA Table 1 2 Model Options ART300 Series Rotary Stage ART310 100 mm 4 in diameter rotary stage ART315 150 mm 6 in diameter rotary stage ART320 200 mm 8 in diameter rotary stage ART330 300 mm 12 in diam
31. ions 4 1 Axis Runout 4 1 Wobble 4 1 B Bearing Performance 7 1 Bolts 2 1 Cable 5 1 Cables 5 8 Conductive Heat Transfer 6 2 Cooling System 6 2 Customer Service 2 1 D Damaged Goods 2 1 Data Customer Service 2 1 Dimensions 2 2 ART310 2 2 ART315 2 3 ART320 2 4 ART330 2 5 Drive Chassis 5 1 E Environmental Factors 6 1 F Fastening the Application 3 2 Field Service Information A 1 Field Service Policy A 1 G Gear Ratio 1 3 H Handling 1 1 Hardware 2 1 Hardware Vacuum Operation 6 2 I Identification Tag 2 1 Improper Handling 2 1 Installation 1 1 Instructions Install 2 1 Instructions Unpack 2 1 Interconnecting Cable 5 1 L Labels to Identify 2 1 Life Expectancy 3 4 Linear Motion Guide Lubrication 7 3 Load Capability 3 4 Low Duty Cycle Applications 6 2 Lubrication Motor Bearings 7 2 Worm End Bearings 7 2 Lubrication and Cleaning 7 3 Lubrication Schedule 7 2 Lubrication Vacuum 6 2 M Max Load 4 1 Max Rotary Speed 1 2 Max Speed 4 1 Model Number 1 3 Model Options 1 3 Motor Options 1 4 Mount Bolting 2 1 Mount Storage 6 2 Mounting 1 1 Mounting Surface 2 1 Version 1 0 Aerotech Inc i Index Instruction Manual P Part Number System 2 1 Performance Specifications 2 1 Positioning the Mount 2 1 Precautions 1 5 Preparing the Mounting Surface 2 1 Product Damage 2 1 Product Handling 1
32. ive shipping container Place the stage on a smooth flat and clean surface This is a simple yet very important step in maintaining the integrity of the stage You will notice a label that will include a system part number and serial number Record these numbers for they contain all the information necessary to maintain or update system hardware and software Also find the enclosed customer service information and accuracy certification If it is obvious that damage occurred during shipping report it immediately It is wise to save the shipping container for possible use in the future Therefore use care when moving the stage Do not allow the stage to drop onto the Improper handling of the stage could adversely affect the performance specifications mounting surface Set it down gently a 2 1 3 Prepare Mounting Surface The mounting surface used with the ART300 series stage should be coplanar within 0 0001 in in for valid accuracy For example if the longest distance between the base hole pattern is 8 inches then the mounting surface should be coplanar within 0 0008 inches This can be achieved by scraping or shimming the interface until no rocking occurs beneath the pads of the stage before tightening any of the mounting screws 2 1 4 Bolt Down Stage Install and tighten the mounting screws through the mounting holes See Section 2 2 for outline drawings and dimensions Version 1 0 Aerotech Inc 2 1 ART300 Instruction Manual
33. ndard Motor Information 4 2 Version 1 0 Aerotech Inc vii List Of Tables Instruction Manual Aerotech Inc Version 1 0 Instruction Manual Overview CHAPTER 1 OVERVIEW In This Section slntroducHone Se KE 1 1 eee E 1 2 e ART300 Model 1 3 e Safety Procedures and Warnings 1 5 1 1 Introduction This manual describes technical information needed for typical applications of the ART300 series translation tables Included are instructions detailing the entire installation from unpacking to start up Also included are concise explanations concerning applications and the maintenance of the mechanical and electrical components In addition there is a section defining the specifications pertinent to the ART300 series stage from the package ART320 ART310 Figure 1 1 ART300 Rotary Stages Version 1 0 Aerotech Inc 1 1 Overview Instruction Manual 1 2 Description ART300 Series rotary stages are compact units providing precise positioning capability for lighter applications The following is a list of some features e Maximum rotary speed of 27 rpm and resolution of 1 5 arc second e Table mounted on dual large diameter pre loaded angular contact bearings e Anti backlash gearing e Base and table are machined from h
34. nstruction Manual List of Figures LIST OF FIGURES Figure 1 1 ART300 Rotary Stages ceto hte et iR ta 1 1 Figure 2 1 ART310 Series Stage 2 2 Figure 2 2 ART315 Series Stage 1015 2 3 Figure 2 3 ART320 Series Stage 2 4 Figure 2 4 ART330 Series Stage Dimensions esee 2 5 Figure 5 1 Motor Stage Wiring nonae cepere as bes 5 2 Figure 5 2 Motor Stage Wirng ene aeo e RU ka aa e ei sein 5 3 Figure 5 3 Motor Stage Wiring sees nennen nennen enne 5 4 Figure 5 4 Motor Stage Wiring 5 5 Figure 5 5 Limit Home Wiring 5 6 Figure 5 6 Stepping Motor Wiring Options nene nenea anna a 5 7 Figure 5 7 Output Interconnecting Cable 5 0 5 8 Version 1 0 Aerotech Inc List Of Figures vi Aerotech Inc Instruction Manual Version 1 0 Instruction Manual List of Tables LIST OF TABLES Table 1 1 ART300 Model Numbering System ART310 M G54 BMS 1 3 Table 1 2 Model Options pepe qp petiere oaia 1 3 Table 4 1 ART300 Series Rotary Stage Specifications 4 1 Table 4 2 ART310 ART315 Series Standard Motor Information 4 2 Table 4 3 ART320 Series Standard Motor Information 4 2 Table 4 4 ART330 Series Sta
35. or cover and withdraw the motor 3 Remove any accumulated dust or debris from the inside of the assembly Apply a thin continuous film of lubricant to the motor gear set through the access hole in the top of the housing Rotate the assembly with the indexing knob to cover all of the teeth A good quality natural bristle artist s brush makes a good applicator 5 Apply lubricant in the same manner to worm and worm gear through the access hole in the bottom of the stage with a hypodermic needle 6 Replace the motor cover To minimize the possibility of bodily injury make certain that all electrical power switches are in the off position prior to making any mechanical adjustments DANGER Version 1 0 Aerotech Inc 7 3 Maintenance ART300 Instruction Manual 7 4 Important Notes on Lubrication When cleaning and or lubricating components of the ART series stages Be sure to use a clean dry soft lint free cloth for cleaning 2 Take the opportunity during the lubrication procedure to inspect the linear motion guides for any damage or signs of wear 3 Dow Coming BR2 is recommended as a lubricant Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory In addition a laser interferometer is required for post assembly verification to maintain warranties 7 4 Aerotech Inc Version 1 0 Appendix A ART 300 Instruction Manual APPENDIX A WARRANTY AN
36. ress Remove this page from the document and fax or mail your comments to the technical writing department of Aerotech AEROTECH INC Technical Writing Department 101 Zeta Drive Pittsburgh PA 15238 2897 U S A Fax number 412 967 6870
37. rmt sona bye ra a a 2 2 2 2 1 310 Series Stage Dimensions 2 2 2 2 2 ART315 Series Stage Dimensions 2 3 2 2 3 ART320 Series Stage Dimensions 2 4 2 2 4 ART330 Series Stage Dimensions 2 5 CHAPTER 3 APPLICATION 3 1 3 1 Introduction eee 3 1 3 2 Fastening the 3 2 3 3 Temperature Effects 3 3 3 4 Life Expectancy and Load Capability sess 3 4 CHAPTER 4 SPECIFICATIONS nenea eee nana emen anna eee 4 4 1 Specifications 4 1 4 2 Motor 4 2 CHAPTER 5 ELECTRICAL 5 1 5 1 5 1 3 2 Stepping Motor 5 2 CHAPTER 6 VACUUM 6 1 6 1 Tntroduciiori 6 1 6 2 Prep for Vacuum Operation nana enma en en anna anna ne 6 2 CHAPTER 7 7 1 7 1 INtroductiOn eee 7 1 7 2 Lubrication eee 7 2 7 3 Lubrication and Cleaning Process eee 7 3 7 4 Important Notes 7 4 APPENDIX A WARRANTY AND FIELD SERVICE POLICY 1 INDEX Version 1 0 Aerotech Inc ili Table of Contents Instruction Manual Aerotech Inc Version 1 0 I
38. s 7 3 e Important Notes on Lubrication 7 4 7 1 Introduction It is necessary to keep the bearing surfaces properly lubricated otherwise friction failure and deformation will occur at the contact areas This will seriously affect the performance and life of the bearings Foreign matter or moisture entering the bearing is unacceptable This will seriously affect gear set bearing performance and the life of the bearings Version 1 0 Aerotech Inc 7 1 Maintenance ART300 Instruction Manual 7 23 Lubrication Schedule The interval for inspection and replenishment of lubricant is dependent on duty cycle speed and environment An interval of one week is recommended for inspection until a trend develops for the application Longer or shorter intervals of inspection may be required to maintain the film of lubricant on the gear teeth The worm end bearings and motor bearings are shielded and should not need to be relubricated The table support ball bearings are unshielded although they operate at a low speed in a protected location and should not need to be relubricated under normal applications 7 2 Aerotech Inc Version 1 0 Instruction Manual Maintenance 7 3 Lubrication and Cleaning Process The lubrication and cleaning process is outlined in the steps that follow 1 Turn the power off 2 Remove the socket head screws securing the mot
39. stage should be centered on the support structure If cantilevered loads are to be applied consult the factory for the load capability Be sure to consider dynamic loading when using the stage for high speed applications especially with cantilever loading Aerotech Inc Version 1 0 Specifications ART 300 Instruction Manual CHAPTER 4 SPECIFICATIONS In This Section SIESPECIH CANON Se E eee 4 1 e Motorilntormati on 4 2 4 1 Specifications Table 4 1 ART300 Series Rotary Stage Specifications Basic Model ART30 ART3IS ART320 ART300 Table Diameter 100 mm 4in 150 200 mm 81 300 mm 12 in Total Travel 360 continuous both azimuth and elevation Drive System Precision Worm Gear Precision Worm Gear in Oil Bath 54 1 motor to table ratio standard 108 1 motor to table ratio standard 54 1 6 arc sec 4000 steps rev motor resolution N A Resolution 108 1 3 arc sec 4 000 steps rev motor resolution 216 1 1 5 arc sec 4 000 steps rev motor resolution N A 54 1 11 rpm 27 rpm N A Maximum Speed 108 1 5 5 rpm 27 rpm 32 rpm 216 1 2 75 rpm 13 5 rpm N A Accuracy 3 arc min 1 0 arc min 0 5 arc min Repeatability Unidirectional 12 arc sec 6 arc sec Axis Wobble 20 sec 10 arc sec 5 arc sec 1 Radial 15 0 um 600 pin Axis Runout Axial
40. t before being specially assembled in a clean environment and packed in a nitrogen filled bag To insure that the stage will continue to perform well in vacuum follow the additional guidelines below 1 Handling Do not remove the stage from the sealed bag until ready for use When handling use teflon gloves in a clean environment to prevent any contaminants from adhering to the stage When the stage is not in use for an extended duration place it in a sealed container 2 Installation Use cleaned vented stainless steel fasteners when securing the stage 3 Applications In a vacuum environment the lack of conductive heat transfer could result in excessive motor operating temperatures This coupled with the viscous nature of vacuum compatible greases will make it necessary to derate performance specifications To reduce the amount of heat generated for low duty cycle applications we offer special controllers that reduce the current supplied to the motor when idle For applications that require additional performance contact our applications engineers about implementing a cooling system 4 Lubrication Use only small quantities of Apiezon L grease or a substitute of equivalent quality 6 2 Aerotech Inc Version 1 0 Instruction Manual Maintenance CHAPTER 7 MAINTENANCE In This Section IO epe e UT UIT 7 1 e Lubrication Schedule 7 2 e Lubrication and Cleaning Proces
41. tence costs For warranty field repairs the customer will not be charged for the cost of labor and material If service is rendered at times other than normal work periods then special service rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site field service representative in a reasonable amount of time provided that the customer issues a valid purchase order to Aerotech covering all transportation and subsistence costs and the prevailing labor cost including travel time necessary to complete the repair Aerotech Inc Phone 412 963 7470 101 Zeta Drive Fax 412 963 7459 Pittsburgh PA 15238 2897 TWX 710 795 3125 USA A 2 Aerotech Inc Version 1 0 Instruction Manual Index A Accuracy 2 1 4 1 Accuracy Certification Sheet 2 1 ART310 Dimensions 2 2 Motor Information 4 2 Specifications 4 1 ART315 Dimensions 2 3 Motor Information 4 2 Specifications 4 1 ART320 Dimensions 2 4 Motor Information 4 2 Specifications 4 1 ART330 Dimensions 2 5 Motor Information 4 2 Specificat
42. the housing or removal of the serial tag or improper operation as determined by Aerotech This warranty is also voided for failure to comply with Aerotech s return procedures Claims for shipment damage evident or concealed must be filed with the carrier by the buyer Aerotech must be notified within 30 days of shipment of incorrect materials No product may be returned whether in warranty or out of warranty without first obtaining approval from Aerotech No credit will be given nor repairs made for products returned without such approval Any returned product s must be accompanied by a return authorization number The return authorization number may be obtained by calling an Aerotech service center Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than 30 days after the issuance of a return authorization number will be subject to review After Aerotech s examination warranty or out of warranty status will be Laser Products Return Procedure determined If upon Aerotech s examination a warranted defect exists then the Returned Product product s will be repaired at no charge and shipped prepaid back to the buyer If the buyer desires an air freight return the product s will be shipped collect Warranty repairs do not extend the original warranty period Warranty Determination Version 1 0 Aerotech Inc ART300 Instru
43. tional cos AJA 42V Typ 22 BLU S Supply Voltage 5 TACH Y 29 con A Supply Current 150mA 1 sn X FI eve Freq Response Flat 0 to 25 kHz 646 octave roll off above 25 kHz l BED Output Device Cos Cos N Sin Sin N RV3430A TOREM SES Min Load 5000 to common MOTOR 6 L1 5 ud s MKR MKR N LM393D Open Coll MOTOR J 16 RED Ej H eic pic with 4 KO puli up Max Sink 4 0 mA Marker N 2 5V Max Source 0 5 mA Spl ov MOTOR v 10 a np MOTOR 17 Eur Gren To Brd Mtg Standoff 16 TA Frame GND N 1 7 YEL Je 18 22 160 6 F Optional Connection to Frame ON u COM x 31 gt 1 400 500 3000 Sr 400 500 3000 Si 22 WHT 3 vica ET CW LIMIT N CW LIMIT R 27 Ho 3 Sn dupeta eer CCW LIMIT N CCW LIMIT S 28 Le Jah 4 HOME LIMIT N HOME LIMIT 14 22 PINK 1S9 5 TI Reversed Recept MS3102A 24 Bulkhead 2 66008 Standard Insert MS24 28P ins 16 18 66098 7 Limit Wiri D e prc Pins 20 24 66102 7 imit Wiring Limit Wiring 69081270 Standard Optional Optical LMT SW Wiring Optical LMT SW Wiring Str Plug MS3106A 24 Insert MS24 285 Clamp AN3057016 MATE Recept 206150 1 Sockets 16 18 66100 7 Sockets 20 24 66104 7 Clamp 206138 1 Assembly Drawing Reference 23 Frame Size 1017 1035 1050 MO MSOI 041C01 1700 w Tach 041C01 1000 Tach MSOF 035C01 1800
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