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User Manual MP99E - Physik Instrumente

1. ccccccsseseceeeeeeeeeeeeeeaeeeeeeseaaeees 32 Connecting the Extension Cable cccccccccsssseeeeeceeeeeaeeeeeeeeeeeeseeaeaeeeeeeesessaaaseseeeeees 34 5 1 General Notes on Installation A Dangerous voltage and residual charge on piezo actuators Piezomotors are driven by piezo actuators After being disconnected from the electronics piezo actuators can stay electrically charged for several hours Temperature changes can also induce charges in piezo actuators Touching or short circuiting the contacts in the connector of the M 683 can lead to minor injuries from electric shock gt Do not touch the contacts in the connector of the M 683 NOTICE Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable gt Ensure that the piezomotors of the M 683 do not come into contact with lubricants gt Keep the M 683 free from dirt and condensation M 683 Linear Stage MP99E Version 1 4 0 17 5 Installation P I NOTICE Heating up of the M 683 during operation The heat produced during operation of the M 683 can affect your application gt Install the M 683 so that your application is not affected by the dissipating heat NOTICE Unsuitable cables SAE Unsuitable cables can cause damage to the controller and can affect the performance of the M 683 gt Only use original PI parts to connect the M 683 to the controller gt If you need lon
2. 13 Connecting the extension cable gt Connect the M 683 stage and controller via the adapter box and the extension cable as shown in the respective connection diagram Observe the assignment that is given by the labeling on the sockets conneciors and cables M 663 4B Adapter box PiLine cable Controller Figure 12 Connection of an extension cable to the standard version of the M 683 34 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation C 815 VF Vacuum feedthrough M 663 AB Adapter box PlLine cable Controller Air Vacuum Figure 13 Connection of an extension cable to the vacuum version of the M 683 M 683 Linear Stage MP99E Version 1 4 0 35 PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation cccccccceseeecceecessseceeeeeeeeeeeeeeeeeeeeeeesaeees 37 Starting Up the M 683 with the C 867 Controller ccccccccceeeccceeeeesseeeeeeeeseeeeeeseeees 41 6 1 General Notes on Start Up and Operation A Risk of electric shock if the protective earth conductor is not connected lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the M 683 in the case of malfunction or failure of the system If touch voltages exist touching the M 683 can result in minor injuries from electric shock
3. gt Connect the M 683 to a protective earth conductor p 19 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the M 683 to the protective earth conductor before starting it up again NOTICE Damage if an incorrect controller is connected Connecting a stage to an unsuitable controller can cause damage to the stage or controller gt Only connect a stage with PILine ultrasonic piezomotors to a PlLine controller p 12 M 683 Linear Stage MP99E Version 1 4 0 37 6 Start Up and Operation P J NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the M 683 gt Only operate the M 683 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 51 for which the M 683 is specified gt Only operate the M 683 when the operating voltage is properly connected see Pin Assignment p 59 NOTICE Unintentional motions When the M 683 is being connected to the controller it can carry out unintentional motions Defective software or wrong operation of the software can also result in unintentional motions gt Do not place any objects in areas where they can get caught by moving parts gt Before connecting the M
4. 1 3 DEO eeaeee E E E E E 2 1 4 FOUE O e E E E EAE S 3 1 5 Other Applicable DOCUMENTS cccccceeeeeseeeseeeceeeeeeeueeseeeeeeeessueaeeeeeeeesssuaaaeess 3 1 6 Downloading Manuals ccccseeeececeeeeeeceeeeeeeeeeeeeeseaseeesseeeeeeeaseeesseeeeessaneesenaeeees 3 2 Safety 5 2 1 ETO SC NS Coase teatro sccgane toss sasatene E E 5 2 2 General Safety Instructions 0 0 0 ccccececcceeeeeceeeesseceeeeeeeeeeeeseceeeeessaeeaseeeeeeeessaaaeeess 5 2 3 Organizational MEASULES cccccsseeeceeeceseeceeecseeeeceeeeaeeeeceeeesaaeeeeesseaseeeeessaaeeees 7 2 4 Measures for Handling Vacuum Compatible Products cc cceeesseeeeeeeeeeeees F 3 Product Description 9 3 1 Model OVErviEW cccccccccccsssceecesceeceeeeeeceeeceesausceessuseceessaceessuaeeeeseeeeesaaeeeessaaeees 9 3 2 PO CIICE VIE Waneer ine closes quent eccetney se ceed T E a 10 3 3 Product LADEN secs cts asseteeatesees atsuen access enndenentgacemsag caiteennedeenesecaetsocceeeaveanter 10 3 4 Scope of Delivery tinticncsnenstnaccterceaxateniencotdineeacatindnsccdbadsanaterisncatdnenmensarenentdiatanenaas 12 3 5 S itabie CONMPOMELS sescsccnccccccccvecced ccsseoeaeene veudcecs stanccdecasdcetccueecsteacnececaceneccdeeeedceaeres 12 3 6 Ae COS SONS seor E E E 13 3 7 Technical Features ccccccceeececceeeeeeceeececceaeeecseeeeeseaseeessaueeessaeeeessueeeessgeeeeess 13 3 7 1 Linear TS INC OG Clr acri a a aia 13 3 7 2 EEE E S A E EE TE E EEE 14 3 7 3 Reference Poi
5. C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 0 C to 50 C Storage temperature 20 C to 75 C Transport temperature 20 C to 75 C Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 52 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Motor Power 10 3 1 Motor Power and Operating Voltage The following table shows the relationship between the operating voltage and the motor power of the M 683 The operating voltage is output by the C 867 controller and depends on the actual control value The polarity sign of the control value determines the direction of motion Operating Voltage Corresponding Control Value on the C 867 ome 100 Vpp 16384 or 16384 150 Vo 24575 or 24575 100 200 Vop 32767 or 32767 Generated in closed loop operation via the control algorithm or set in open loop operation via the SMO command INFORMATION The control value and thus the output operating voltage are limited by the C 867 controller with the Maximum Motor Output parameter ID 0x9 When you load the operating parameters of the M 683 from the P Stages2 dat stage database this parameter is set to a suitable value You can check the control value of the C 867 as follows gt Get the current control value with the sMO command gt Record the control value during the motion with the dat
6. C 815 VF 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers 000026699 Screw Set 6 M3x16 socket head cap screws ISO 4762 1 Allen wrench MP121EK Short instructions for PlLine stages 3 5 Suitable Controllers Order Number Description C 867 160 Piezomotor controller driver networkable 1 channel for PlLine systems C 867 260 Piezomotor controller with drive electronics 2 channels for PILine systems C 867 0E OEM driver controller card for PILine ultrasonic motors 1 channel gt To order contact our customer service department p 47 12 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 6 Accessories Order Description Number Adapter bracket for vertical mounting of M 110 series stages on M 683 stages 4 hex head cap screws M3x5 ISO 4762 1 Allen wrench Adapter box MDR to 15 pin Sub D for PILine stages with long cables M663T0015 Technical Note for adapter box Extension cables for use with the M 663 AB adapter box Extension cable for PILine MDR to 15 pin Sub D 1 m Extension cable for PlLine MDR to 15 pin Sub D 3 m Extension cable for PlLine MDR to 15 pin Sub D 5 m Longer cables available on request gt To order contact our customer service department p 47 3 7 Technical Features 3 1 Linear Encoder
7. The M 683 is equipped with an optical linear encoder For the resolution refer to the table in the Specifications section p 49 Optical linear encoders measure the actual position directly direct metrology Therefore errors occurring in the drivetrain such as nonlinearity backlash or elastic deformation cannot influence the measurement of the position M 683 Linear Stage MP99E Version 1 4 0 13 3 Product Description P J 3 7 2 Limit Switches The M 683 is equipped with non contact Hall effect limit switches Each limit switch sends an overtravel signal on a dedicated line to the controller The controller then stops the motion If the controller does not stop the motion in time the stage runs into the hard stop See Limit Switch Specifications p 50 for more information 3 7 3 Reference Point Switch The M 683 is equipped with a direction sensing reference point switch which is located at about the midpoint of the travel range This sensor transmits a TTL signal that indicates whether the stage is on the positive or negative side of the reference point switch See the controller user manual and or associated software manuals for the commands which make use of the reference point signal For more information see Reference Point Switch Specifications p 50 14 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 4 Unpacking INFORMATION When handling the vacuum ver
8. gt gt gt Connect the M 683 to a protective earth conductor p 19 before start up Do not remove the protective earth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the M 683 to the protective earth conductor before starting it up again Mechanical forces can damage or misalign the M 683 gt gt gt Avoid impacts that affect the M 683 Do not drop the M 683 Do not exceed the maximum permissible stress and load capacities according to the specifications p 49 6 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 3 Organizational Measures User manual gt Always keep this user manual available by the M 683 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the M 683 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the M 683 after having read and understood this user manual Personnel qualification The M 683 may only be installed star
9. the protective earth conductor Figure 3 M4 threaded hole for fastening the protective earth conductor M 683 Linear Stage MP99E Version 1 4 0 19 5 Installation PI Figure 4 Mounting of the protective earth conductor profile view 1 Base body of the M 683 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Prerequisite v You have read and understood the General Notes on Installation p 17 v The M 683 is not connected to the controller Tools and accessories Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Supplied M4 screw set for protective earth p 12 for mounting a protective earth conductor Suitable screwdriver Connecting the M 683 to the protective earth conductor l 2 If necessary fasten a suitable cable lug to the protective earth conductor Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the M 683 as shown in the profile view Tighten the M4 screw with a torque of 1 2 Nm to 1 5 Nm Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A 20 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 3 Mounting the M 683 on a Surface NOTICE Protruding screw heads Protruding screw heads can damage the M 683 gt Ens
10. tilting torques at the moving platform M 683 Linear Stage MP99E Version 1 4 0 23 5 Installation P I NOTICE Screws that are too long The M 683 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 57 gt Only use screws of the correct length for the respective mounting holes INFORMATION With a vertically oriented motion axis the M 683 can reliably move a maximum load of 150 g without gravity compensation The velocity is correspondingly reduced see Velocity and Dynamic Force p 54 For operating M 683 with a vertically oriented motion axis and load gt 150 g gt Mount a suitable gravity compensation Contact our customer service department p 47 for details on gravity compensation Figure 6 M 683 Threaded holes for mounting a load see arrows 24 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Prerequisite v You have read and understood the General Notes on Installation p 17 v You have properly mounted the M 683 on a surface p 21 v The M 683 is not connected to the controller v You have prepared the load so that it can be affixed to the mounting holes on the moving platform The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Atleast three points are provided for affixing the load on th
11. 418A US6765335B2 US6806620B1 US6806620B1 US7218031B2 US7598656B2 US7737605B2 US7795782B2 US7834518B2 US7973451B2 US8253304B2 US8344592B2 US8482185B2 Japan JP2011514131 JP2011522506 JP3804973B2 JP4377956 JP4435695 JP4477069 JP4598128 JP4617359 JP4620115 JP4648391 JP4860862 JP4914895 JP2013539346 China ZL200380108542 0 ZL200580015994 3 ZL200580029560 9 ZL200580036995 6 ZL200680007223 4 ZL200680030007 1 ZL200680042853 5 International patent applications WO2009059939A2 WO2010121594A1 W02012048691 A2 WO2012113394A1 WO2012155903A1 WO2013034146A3 W02013117189A2 2014 Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 04 06 2014 Document number MP99E CBo version 1 4 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual ccccccsseeceeeeeesseeeeeeaeeeeees 1 1 2 Symbols and Typographic ConventionS cccccseeecccecceeeeeeeeeeeeeeeeeeeeaeeeeeeeeaaaeeeees 1
12. 683 check whether a macro is defined as the start up macro in the controller and cancel the selection of the start up macro if necessary NOTICE Damage from collisions Collisions can damage the stage the load to be moved and the environment gt Make sure that no collisions are possible between the stage the load to be moved and the environment in the motion range of the stage gt Do not place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if a controller malfunction occurs gt If possible adapt the travel range limits of your mechanical system in the software that you use for commanding the motion 38 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Uncontrolled oscillation Your application can be damaged by uncontrolled oscillation of the M 683 If you encounter noise during operation gt Immediately switch off the servo control system of the affected axes gt Check the settings of the servo control parameters NOTICE Collision of the moving platform with the hard stop The collision of the moving platform of the M 683 with the hard stop can lead to damage or considerable wear on the M 683 gt Prevent motions in open loop operation gt If motions in open loop operation are necessary with the C 867 controller Set the control value with the sMO command so that the axis m
13. D 15 p 12 K030B0420 extension cable for PlLine MDR14 to Sub D 15 1 5 m on the air side p 12 m Suitable tools for installing the vacuum feedthrough Installing the vacuum feedthrough 1 Find the dimensions of the vacuum feedthrough in the C815T0003 Technical Note see shell size 2 2 Provide the vacuum chamber with a suitable opening 3 Install the vacuum feedthrough so that the Sub D 15 f socket is in the vacuum chamber Connecting the vacuum version to the controller gt Connect the M 683 stage vacuum feedthrough and controller as shown in the connection diagram below Observe the assignment that is given by the labeling on the sockets conneciors and cables C 815 VF Vacuum feedthrough Controller I Vacuum Air Figure 11 Connection of the vacuum version to the controller M 683 Linear Stage MP99E Version 1 4 0 33 5 Installation P J 5 7 Connecting the Extension Cable Prerequisites v You have read and understood the General Notes on Installation p 17 v The controller is switched off v You have connected the M 683 to the protective earth conductor p 19 v For vacuum versions The C 815 VF vacuum feedthrough is installed p 32 Tools and accessories M 663 AB adapter box MDR14 to Sub D 15 pin for PILine stages with long cable Extension cable for PILine MDR14 to Sub D 15 pin 1 to 5 m on the air side Not in the scope of delivery see Accessories p
14. MP99E Version 1 4 0 31 5 Installation P J Tools and accessories M 110 05 adapter bracket and supplied screws p 13 Screws and tools for affixing the M 110 see M 110 User Manual Allen wrench AF 1 5 for removing the threaded pin from the moving platform of the M 683 see figure Optional Four M2x6 hex head cap screws not in the scope of delivery Setting up a Z system 1 Remove the threaded pin 1 from the moving platform of the M 683 see figure 2 Affix the M 110 05 adapter bracket to the M 683 using three M3x5 hex head Cap screws see figure 3 Align the M 110 so that the cover of the spindle bearing 2 is on the top see figure the cable exit of the M 110 is then on the top as well 4 Affix the M 110 to the adapter bracket Use either two of the M3x6 screws supplied with the M 110 or four M2x6 screws see figure 5 6 Connecting the Vacuum Version to the Controller For the vacuum version of the M 6838 it is necessary to install a vacuum feedthrough p 12 Prerequisites v You have read and understood the General Notes on Installation p 17 v The controller is switched off v You have connected the M 683 to the protective earth conductor p 19 y You have read and understood the C815T0003 Technical Note for the C 815 VF vacuum feedthrough 32 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories C 815 VF vacuum feedthrough Sub
15. PI MP99E M 683 Linear Stage User Manual Version 1 4 0 Date 04 06 2014 This document describes the following products M 683 2U4 PILine High Speed Linear Stage 50 mm 6N M 683 2V4 PILine High Speed Linear Stage 50 mm 6 N Vacuum Compatible to 10 hPa Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente PI GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano PI owns the following patents or patent applications for the technology field Ultrasonic Piezo Motors PILine Germany DE102004024656A1 DE102004044184B4 DE102004059429B4 DE102005010073A1 DE102005039357B4 DE102005039358A1 DE102006041017B4 DE102008012992A1 DE102008023478A1 DE102008058484A1 DE102010022812A1 DE102010047280A1 DE102010055848 DE102011075985A1 DE102011082200A1 DE102011087542B3 DE102011087542B3 DE102011087801B4 DE102011108175 DE102012201863B3 DE19522072C1 DE19938954A1 Europe EP0789937B1 EP1210759B1 EP1267425B1 EP1581992B1 EP1656705B1 EP1747594B1 EP1812975B1 EP1861740B1 EP1915787B2 EP1938397B1 EP2095441B1 EP2130236B1 EP2153476B1 EP2164120B1 EP2258004B1 EP2608286A2 USA US2010 0013353A1 US5872
16. a recorder as motor output For further information see the user manual of the controller p 12 used to operate the M 683 M 683 Linear Stage MP99E Version 1 4 0 53 10 Technical Data pP I 10 3 2 Velocity and Dynamic Force To estimate the velocity and dynamic for of the M 683 at different motor output levels refer to the following graph Motor output 2 T67 100 26 000 80 16 000 50 v E E T O 2 m Force in N Figure 14 Velocity of the M 683 vs dynamic force push pull force at various levels of the control signal 54 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 3 Motor Power and Lifetime Motor power duty cycle and ambient temperature influence the lifetime of the stage In order to prevent overheating and high wear the motor power and the duty cycle should not exceed the limits given in the following graph in continuous operation A load cycle corresponds to a positioning run and includes the acceleration motion deceleration as well as downtime break The motor should only sporadically be operated at peak power the peak power serves as a control reserve INFORMATION In a vacuum there is no heat dissipation via convection gt Operate the vacuum version of the M 683 with a 20 lower motor power than given in the graph or reduce the duty cycle Peak motor power duty cycle up to 10 of the load cycl
17. ar at the latest gt f you move the M 683 continuously over a small working range lt 20 of the entire travel range in industrial operation perform a maintenance run across the entire travel range every 5000 motion cycles M 683 Linear Stage MP99E Version 1 4 0 43 7 Maintenance pP I Lubrication Under laboratory conditions the guidings of the M 683 only need to be lubricated in exceptional cases For continuous industrial use the lubrication intervals must be defined individually gt Do not lubricate the guidings of the M 683 without consulting our customer service department p 47 gt To lubricate the guidings follow the instructions given in the maintenance manual which you can obtain from our customer service department gt Ensure that the piezomotors of the M 683 do not come into contact with lubricants 7 3 Cleaning the M 683 Prerequisites v You have disconnected the stage from the controller Cleaning the stage gt Do not use any organic solvents Only when the stage is not used in vacuum gt When necessary clean the surfaces of the stage with a cloth slightly dampened with a mild cleanser or disinfectant Only when the stage is used in vacuum gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean 44 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting Noise during Uncontrol
18. atform is as small as possible in all directions for the individual stages gt When the motion axis of the stage is oriented vertically ensure that the installed load is lower than the holding force of the drive NOTICE Screws that are too long Screws that are inserted too deeply can damage the lower stage gt Observe the depth of the mounting holes in the moving platform of the lower stage gt Only use screws of the correct length for the respective mounting holes gt Only install and operate the multi axis system after you have read and understood the user manuals of all components of the multi axis system gt If you require special mounting adapters contact our customer service department p 47 26 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 5 2 Setting Up an XY System Two linear positioning stages can be stacked to form an XY system as shown below Combination of two M 683 Atffixing an M 110 micro translation stage to an M 683 Prerequisite v You have read and understood the General Notes on Installation p 17 v You have read and understood the general notes on setting up a multi axis system p 26 Tools and accessories for combining two M 683 stages Mounting accessories in the scope of delivery p 12 4 M3x16 screws Allen wrench Optional 2 locating pins 2 mm H7 length 10 mm according to DIN EN ISO 13337 for
19. ation of its cable exit 2 Affix the M 110 to the M 683 using the relevant threaded holes see white circles in the figure in the M 683 Follow the instructions given in the M 110 User Manual M 683 Linear Stage MP99E Version 1 4 0 29 5 Installation P I 5 5 3 Setting Up a Z System To form a Z system an M 110 microtranslation stage is affixed to an M 683 using an adapter bracket NOTICE Malfunction with unsealed threaded hole A threaded pin is located in one of the holes of the moving platform of the M 683 If the threaded pin is removed incident light can trigger the reference point switch of the M 683 and cause a malfunction gt Only remove the threaded pin from the moving platform of the M 683 if this is necessary for mounting an adapter bracket gt After removing the threaded pin make sure that the corresponding hole is suitably closed INFORMATION You can also affix the adapter bracket to the M 683 offset in 90 steps 30 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation M 110 2xx M 110 05 wS M2x6 Figure 10 M 683 M 110 05 bracket and M 110 1 Threaded pin in the moving platform of the M 683 2 Cover of the spindle bearing on the M 110 Prerequisite v You have read and understood the General Notes on Installation p 17 v You have read and understood the general notes on setting up a multi axis system p 26 M 683 Linear Stage
20. ccurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 47 46 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website M 683 Linear Stage MP99E Version 1 4 0 47 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter GIO CHING LO INS teie E E Ambient Conditions and Classifications ccccccecccecceeceecceeceeceeceeceecueceecuseusensenseaeeas MOLON POW CF oeren a e E e e a TN DIMENSIONS srei e A a E ea ENET PIN FAS SIUM CUM saienisi e AREER i sa EEEE AASA EE EEE sanS 10 1 Specifications 10 1 1 Data Table M 683 2U4 Unit Active axes X Motion and positioning Travel range 50 mm Integrated sensor Linear encoder Sensor resolution 0 1 um Min incremental motion 0 3 um Bidirectional repeatability 1 um Unidirectional repeatability 0 2 um Pitch 150 urad Yaw 50 urad V
21. dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation M 683 Linear Stage MP99E Version 1 4 0 1 1 About this Document pP I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning 1 Action consisting of several steps whose sequential 5 order must be observed gt Action consisting of one or several steps whose sequential order is irrelevant a List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the stage is mounted horizontally The contact point of the load is in the center of the platform Linear encoder The linear encoder is an incremental sensor for capturing changes in position Signals from the sensor are used for axis position feedback After switching on the controller a reference point definition must be performed before absolute target positions can be commanded and reached 2 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as
22. e High motor power duty cycle up to 30 of the load cycle e g acceleration deceleration a feo Q z O Q See 2 e 20 40 Ambient temperature in C Figure 15 M 683 Recommended duty cycle and motor power depending on the ambient temperature M 683 Linear Stage MP99E Version 1 4 0 55 10 Technical Data pP I 10 3 4 Influence of Downtimes on the Static Holding Force n S5 a zi p 2 TH Z o L _ gi 12 16 Downtime inh Figure 16 Static holding force of the M 683 depending on the downtime of the motor 56 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings 87 0 01 Figure 17 M 683 M 683 Linear Stage MP99E Version 1 4 0 57 10 Technical Data pP I o PAH AL 0 15 0 25 pe B88 1 Figure 18 M 110 05 adapter bracket 58 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 5 Pin Assignment Connector MDR14 N10214 52B2VC 3M All models p 9 except for the vacuum versions are equipped with this connector A1 AT C e ona Psi ch ee AS NSITCH ouput Negative era mt swen owen Bo enom Output EncoderchamnerA RS 422 B4 ENCA Output Encoder channel A inverted RS 422 Bs encer output Encoderchamner aS 422 B6 ENCB Output E
23. e MP99E Version 1 4 0 61 PIEZO NANO POSITIONING WWW PI WS 12 Declaration of Conformity 12 Declaration of Conformity PI Declaration of Conformity according to DIN EN ISO IEC 17050 1 2005 eR Manufacturer Physik Instrumente PI GmbH amp Co KG Manufacturer s Auf der Roemerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name PILine High Speed Linear Stage Model Numbers M 6383 Product Options all complies with all relevant provisions of the Machinery Directive 2006 42 EC Furthermore it complies with all provisions of the EMC Directive 2004 108 EC as well as the RoHS Directive 2011 65 EC The applied standards certifying the conformity are listed below safety of Machinery EN 12100 2010 Electrical Safety EN 61010 1 2010 Electromagnetic Emission EN 61000 6 3 2007 EN 55011 2009 Electromagnetic Immunity EN 61000 6 1 2007 The person authorized to compile the technical file is Martin Schmack Address see manufacturer s address December 11 2012 Karlsruhe Germany Norbert Ludwig Managing Director PIEZO NANO POSITIONING Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstrasse 1 76228 Karlsruhe Germany 3 i Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail infoghpi ws ww ous HSE PT E S M 683 Linear Stage MP99E Version 1 4 0 63
24. e moving platform Tools and accessories Atleast three M3 screws of suitable length p 57 Suitable tools for fastening the screws Affixing the load 1 Align the load on the M 683 so that the mounting holes in the load and the moving platform overlap 2 Affix the load with at least three screws 3 Check that the load fits on the moving platform of the M 683 without backlash 5 5 Setting Up a Multi Axis System The M 683 can be used in multi axis systems Typical combinations XY system p 27 as a stacked system Z system p 30 with micro translation stage of the M 110 series gt For combination possibilities with other stages contact our customer service department p 47 M 683 Linear Stage MP99E Version 1 4 0 25 5 Installation P I 5 5 1 General Information on Setting Up a Multi Axis System NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platforms of the stages in a multi axis system can damage the stages gt Include the masses of the moved stages and the mounting adapters p 13 in the calculation of the load to be moved gt For the mounting type and mass of the load observe the maximum permissible forces according to the specifications for the individual stages gt Avoid tilting torques on the moving platforms Make sure that the distance between the center of gravity of the load and the center of the moving pl
25. easy alignment of the stages not in the scope of delivery Affixing an M 683 to an M 683 Figure 7 Combination of two M 683 stages as a stacked XY system M 683 Linear Stage MP99E Version 1 4 0 27 5 Installation P J Figure 8 Holes to be used for screws white arrows and locating pins gray arrows in the lower M 683 1 If you use locating pins Introduce the locating pins into the two holes in the moving platform of the lower M 683 see gray arrows in the figure 2 Rotate the upper M 683 by 90 and position it on the lower M 683 For a different orientation of the cable exit it is possible to rotate the stage by 180 If you use locating pins Make sure that the locating pins are introduced into the corresponding holes in the bottom side of the base body of the upper M 683 3 Affix the upper M 683 to the lower M 683 using the screws and the relevant threaded holes see white arrows in the figure Proceed as when mounting the stage on a surface p 21 28 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Tools and accessories for affixing the M 110 to the M 683 Screws and tools for affixing the M 110 see M 110 User Manual Affixing the M 110 to the M 683 Figure 9 M 683 Threaded holes for affixing the M 110 white circles 1 Rotate the M 110 by 90 and position it on the M 683 It is possible to rotate the M 110 again by 180 for a different orient
26. eference point switch The signal level changes from 0 to 5 V when the reference point switch is passed Hysteresis 0 2 to 0 4mm when approaching from the positive or negative direction 50 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 4 Maximum Ratings M 683 stages are designed for the following parameters Device Maximum Operating Frequency Maximum Power Operating Voltage Consumption M 683 2U4 200 Vp or 71 Vms 152 to 165 kHz 15W M 683 2V4 10 1 5 Specifications for Vacuum Compatible Versions The following vacuum compatible components are used for the M 683 2V4 Mechanical parts Aluminum blank aluminum anodized black matt steel ceramic PIC181 Al203 Cables FEP ribbon cable FFC from Axon Kabel GmbH Shrink tubing PVDF Kynar Connector ZF5 06 01 connector from Samtec Insulation KU THE 150 Sealant Scotch Weld Adhesives Epo Tek 353 ND Delo Duopox AD895 Bakeout temperature 80 C 176 F Bakeout time 3 hours M 683 Linear Stage MP99E Version 1 4 0 51 10 Technical Data pP I 10 2 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the M 683 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 torr to 0 075 torr Relative humidity Highest relative humidity 80 for temperatures up to 31
27. eiesaandananierninctsa supine sisneieadindanineal 59 Old Equipment Disposal 61 Declaration of Conformity 63 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ccceccceceeeeeeeeeeseeeeeeeeeeeaaaeeeeeeeess 1 Symbols and Typographic CONnventions ccccccccccccccecssesseeceeeeeeeeseeeeeeeeeeessseageeseeees 1 B TIO AE E E E E E E E EEEE EE tanta EE aunt E 2 gE e E E E E E E E AEE E ETE E E E EEE O E TE 3 Other Applicable DOCUMENHS ccccccccceseeeeeeeeeeeeeeaeeeeeeeeeeeeesaeeeeeeeeeeesseaeeeeeeeeeeeesaas 3 Downloading Manuals eiascncaceasecsananssiseacadsmsieiiseh entectasautansnsaGtactdsncle tashnnnedieasawinnannuieacndaansears 3 1 1 Goal and Target Audience of this User Manual This manual contains information on the intended use of the M 683 It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual r i Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the
28. elocity 350 mm s Reference point switch repeatability 1 um Mechanical properties Guiding Crossed roller bearings Load capacity 50 N Push pull force 6 N Holding force 6 N Drive properties Motor type PlLine U 164 dual motor Reference point switch Optical Limit switches Hall effect M 683 Linear Stage MP99E Version 1 4 0 49 52 53 57 59 Tolerance typ typ typ typ typ max typ max max max 49 10 Technical Data M 683 2U4 Unit Miscellaneous Operating temperature range O to 50 C Material Al black anodized Dimensions 130 mm x 95 mm x 21mm Mass 0 65 kg Cable length 1 5 m Connector MDR 14 pin Recommended controller C 867 PILine controller incl driver PI Tolerance 5 10 mm M 683 2V4 Delivery includes 1 m cable vacuum feedthrough and 1 5 m cable air Specifications for vacuum versions can differ Ask about custom designs 10 1 2 Limit Switch Specifications Magnetic Hall effect sensor Supply voltage 5 V GND supply via the motor connector Signal output TTL level Active high When the limit switch is passed the signal Signal logic level changes Normal motor operation low 0 V Limit switch reached high 5 V 10 1 3 Reference Point Switch Specifications Supply voltage 5 V GND supply via the motor connector Signal output TTL level Signal logic Direction sensing by means of different signal levels on the left and right side of the r
29. file name Find the user name and password in the User login for software download section in the Release News In the User login area on the left margin in the website enter the user name and the password in the corresponding fields Click Login The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 2 Safety 2 Safety In this Chapter SSM Se perene R vserdadeanvecigaaninuenaeabsbareedsenpeasnabseeinosataneas 5 General Safety Instructions ccccccceeeeeeccceeeeeeeeeseeeceeeeeesseeeeeeeeeeeessaeaeeeeeeeeesssaaaseeeeeees 5 Organizational MEASUIES ccccccseeeeeccceeececeeeseeeeeeeeeeaaeeeeeceeeeeessaeaeseeeeeeessseeeeeeeeeeeeesaas 7 Measures for Handling Vacuum Compoatible Products ccccescceseeeseeseeeeeeeeeeeeeees 7 2 1 Intended Use The M 683 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the M 683 is intended for single axis positioning adjusting and shifting of loads at different velocities in interval operation The M 683 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment The intended use of the M 683 is on
30. g accessories in the scope of delivery p 12 4 M3x16 screws Allen wrench 22 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation Mounting the M 683 on a surface 1 Manually displace the moving platform of the M 683 until two of the four counter sunk holes in the base body are accessible see figure 2 Align the M 683 on the surface so that the corresponding holes in the M 683 and surface overlap 3 Mount the M 683 with two screws 4 Ensure that the screw heads do not protrude from the counter sunk mounting holes 5 Manually displace the moving platform of the M 683 until the other two counter sunk holes in the base body are accessible 6 Mount the M 683 with two screws 7 Ensure that the screw heads do not protrude from the counter sunk mounting holes 8 Check that the M 683 fits on the surface without backlash 5 4 Affixing the Load to the M 683 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platform can damage the stage gt For affixing type and mass of the load observe the maximum permissible forces according to the specifications p 49 gt When the motion axis of the stage is oriented vertically ensure that the installed load is lower than the holding force of the drive see Data Table p 49 and Influence of Downtimes on the Static Holding Force p 56 gt Avoid
31. ger cables use the M 663 AB adapter box and an extension cable from PI p 34 INFORMATION For the reproducibility of the positioning to be optimal all components must be affixed with zero backlash gt Make sure that stage and load are affixed with zero backlash gt f possible perform a simulation of the stage motions with a mounted load or suitable calculations in order to identify collisions or unfavorable center of gravity constellations gt f necessary take suitable constructive measures to avoid collisions and instabilities in the overall system gt Avoid or mark danger zones that result from the installation of the stage and the application in accordance with the legal regulations For more information about operational conditions refer to the Motor Power section p 53 18 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 2 Connecting the M 683 to the Protective Earth Conductor INFORMATION The supplied M4 screw on the protective earth connection is only for protecting the thread gt Use the supplied M4 screw set p 12 for protective earth to mount the protective earth conductor INFORMATION gt Observe the applicable standards for mounting the protective earth conductor An M4 hole is located on the M 683 next to the cable exit for connecting the protective earth conductor In the following figure this hole is marked with the symbol for
32. guaranteed properties 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals M 110 Microtranslation Stage MP41E User Manual PIMikroMove SM148E Software Manual PliLine stages MP121EK Short Instructions 1 6 Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading gt Contact our customer service department p 47 The current versions of the manuals are found on our website For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD M 683 Linear Stage MP99E Version 1 4 0 3 1 About this Document P I Download freely accessible manuals 1 2 3 4 5 Open the website http www pi portal ws Click Downloads Click the corresponding category e g M Hexapods Micropositioning Click the corresponding product code e g M 683 Click Documents The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 4 Carry out steps 1 to 5 of the download process for freely accessible manuals Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the
33. int of the axis Commanding initial motions in closed loop operation for testing and for run in of the mechanical system The description in the C 867 User Manual assumes that you perform these steps using PIMikroMove 42 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ceccccccecceesceeeceeceeecececeeeeeeeeeeeeaueceueeaeeeneeeneeeneeenees 43 Performing a Maintenance RUN ccccsssccccssseeeccesseecceeseecceeeeeceeeececseseeessaseeessaaeees 43 Cleaning the IMHO SS ass snc csaccceteneisicdbersdeceesesssinelerpeocquseansndiedetendesasasnedyestseceeasgsndueceieeieees 44 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance Improper maintenance can result in the failure of the M 683 gt Only loosen screws according to the instructions in this manual gt Ensure that the piezomotors of the M 683 do not come into contact with lubricants 7 2 Performing a Maintenance Run Depending on the operating conditions and the period of use of the M 683 the following maintenance measures are required Maintenance run The maintenance run is performed to distribute the existing lubricant on the guidings of the M 683 gt To evenly distribute the existing lubricant on the stage guidings perform a maintenance run across the entire travel range after 500 hours of operation or after 1 ye
34. led operation oscillation of the M 683 stage positions Settling window inaccurately around the target position is too large Reaching the target Settling window position takes too around the target long position is too small Increased wear Warped base body Reduced accuracy M 683 Linear Stage MP99E Immediately switch off the servo control system of the affected axes Check the settings of the servo control parameters Reduce the settling window by changing the parameter values for the settling window limits on the controller See the controller user manual p 3 for details Enlarge the settling window by changing the parameter values for the settling window limits on the controller See the controller user manual p 3 for details Mount the M 683 on an even surface The recommended evenness of the surface is 10 um For applications with great temperature changes Only mount the M 683 on surfaces that have the same or similar thermal expansion properties as the M 683 e g surfaces made of aluminum Version 1 4 0 45 8 Troubleshooting pP J With a vertically Excessive load gt Reduce the load to a maximum of oriented motion axis 150 g No or limited motion For operating M 683 with a vertically oriented motion axis and load gt 150 g gt Mount a suitable gravity compensation Contact our customer service department p 47 for details on gravity compensation If the problem that o
35. ls at frequencies between 100 and 500 kHz INFORMATION The positive direction of motion is away from the cable exit side INFORMATION The repeatability of the positioning is only ensured when the reference point switch is always approached from the same side Controllers from PI fulfill this requirement as a result of the automatic direction sensing for reference moves to the reference switch INFORMATION For maximum force generation a run in procedure is necessary during the start up of the M 683 and after longer downtimes see also Influence of Downtimes on the Static Holding Force p 56 After run in the M 683 will generate its maximum dynamic force gt For run in command a few motion cycles at low velocity over the entire travel range For more information about operational conditions refer to the Motor Power section p 53 40 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation 6 2 Starting Up the M 683 with the C 867 Controller NOTICE Incorrect parameter settings When using the software which is included in the scope of delivery of the C 867 controller the operating parameters of the M 683 can be loaded from a stage database The stage P Stages2 dat database contains the default parameter values of your stage for performing initial test motions during start up Depending on the application using the default parameter values e g for P term I te
36. ly possible when completely mounted and connected The M 683 uses PILine ultrasonic piezo linear motors as a drive and must be operated with a suitable controller p 12 The controller is not included in the scope of delivery of the M 683 2 2 General Safety Instructions The M 683 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the M 683 gt Only use the M 683 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the M 683 M 683 Linear Stage MP99E Version 1 4 0 5 2 Safety PI Piezomotors are driven by piezo actuators After being disconnected from the electronics piezo actuators can stay electrically charged for several hours Temperature changes can also induce charges in piezo actuators Touching charged parts of the M 683 can cause slight injuries from electric shock gt Do not open the M 683 gt Do not touch the contacts in the connector of the M 683 lf a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the M 683 in the case of malfunction or failure of the system If touch voltages exist touching the M 683 can result in minor injuries from electric shock
37. ncoder channel B inverted RS 422 C NC eteonnectes M 683 Linear Stage MP99E Version 1 4 0 59 10 Technical Data pP I 60 Connector Sub D 15 m All vacuum versions p 9 are equipped with this connector 4 a i eeeevoeee I 4 f i N eeeeee 9 15 Figure 20 Front view of the Sub D 15 connector ees o iae OO Input Piezo 71 VAC RMS Input Piezo 71 VAC RMS Output Encoder channel A inverted RS 422 Output Encoder channel B inverted RS 422 E 11 Input Piezo 71 VAC RMS E E x E Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany yy M 683 Linear Stag
38. nt SWItCH sicsrcsisoroseiirosiscnirarnai niee i 14 4 Unpacking 15 5 Installation 17 5 1 General Notes on Installation cccccccccccseeceeeeeseceeceeeceeseeeeesseeeeeeseaeeeessaeeees 17 5 2 Connecting the M 683 to the Protective Earth COnductot ccccseseeeeeeeeees 19 5 3 Mounting the M 683 on a Surface 20 cceccceeeeceeceeeeeeeeeeeaeeeeeesseeaeeeessaeeeeeeeeeas 21 5 4 Affixing the Load to the M 683 ccccccccssseeeeceeeeeeeeseeeeeeeeeeeeeeaeeeeeeeeeeeesaaaeeses 23 5 5 Setting Up a Multi Axis System ccccccsecsceeeceeeeeeeeeeseeeeeeeesseeeeeeeeeseaeseeeeesaeees 25 5 5 1 General Information on Setting Up a Multi Axis System 26 5 5 2 Setting Up an XY System cccccccsssecceeceeseeceeeeeaeseceeesseeeeeeeeseeeeeees 27 5 5 3 Setting Up a Z SYStOM cccccccccccsssseceeeceeeeeeeeeceaeseeeeeeeeaseeeeeesageeees 30 10 11 12 5 6 Connecting the Vacuum Version to the Controller ccccccseeeeeeeeseeeeeeeeeeaeees 32 5 7 Connecting the Extension Cable ccccceccccecceeeeeeeeeeeeseeeeeeaeeeeeeeeseaeeeeeessaaees 34 Start Up and Operation 37 6 1 General Notes on Start Up and Operation ccccccssseseeeeeeeeeeeeeeseeeseeeeesaeees 37 6 2 Starting Up the M 683 with the C 867 Controller ccccesceeesseeeeeeeeeeeseneeeees 41 Maintenance 43 7 1 General Notes on Maintenance ccccccccsescccceeseceeceeeceeceeeeesseeeeessaaeeee
39. oves with low velocity Stop the axis in time For this purpose use the 24 STP or HLT command or set the control value to zero with the SMO command gt Ensure that the end of the travel range is approached at low velocity gt Only make changes to the velocity acceleration deceleration and load in small steps gt Do not deactivate the limit switches in the software gt Test limit switch operation at low velocities only gt Inthe event of a malfunction of the limit switches stop the motion immediately NOTICE Overheating during continuous operation The highest dynamic force and holding force are achieved at maximum motor power however the M 683 may overheat during continuous operation gt Observe the recommended motor power depending on the duty cycle and the ambient temperature p 55 M 683 Linear Stage MP99E Version 1 4 0 39 6 Start Up and Operation P J NOTICE Damage or considerable wear from high accelerations High accelerations can cause damage to or considerable wear on the mechanical sysiem gt Stop the motion immediately if a controller malfunction occurs gt Determine the maximum velocity for your application gt Observe the information in the Motor Power section p 53 INFORMATION Although in theory the M 683 operates quietly noise levels of up to 50 dB A are possible during operation The ultrasonic drive of the M 683 can also generate higher noise leve
40. r stage 50 mm 6 N vacuum compatible to 10 hPa M 683 Linear Stage MP99E Version 1 4 0 9 3 Product Description 3 2 Product View Figure 1 M 683 product view Cable for connection to the controller Moving platform Base body x MO m Positive direction of motion of the stage 3 3 Product Labeling Figure 2 M 683 Position of the product labeling example view 10 Version 1 4 0 MP99E M 683 Linear Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description symbol for the protective earth conductor marks the protective earth connection of the M 683 Z o equipment disposal p 61 e eona C E E aa C PI Manufacturers logo C M 683 2U4 Product name example the places after the point refer to the model WWW PI WS Manufacturer s address website C 114000939 Serial number example individual for each M 683 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Country of origin Germany Country of origin M 683 Linear Stage MP99E Version 1 4 0 11 3 Product Description P J 3 4 Scope of Delivery er PlLine high speed linear stage 50 mm 6 N PlLine high speed linear stage 50 mm 6 N vacuum compatible to 10 hPa including C 815 VF vacuum feedthrough Sub D 15 pin m f K030B0420 extension cable for PILine MDR14 to Sub D 15 pin 1 5 m on the air side m C815T0003 Technical Note for
41. rm D term acceleration and velocity can however cause damage to the stage especially when operated with heavy loads gt f possible Perform the first start up without a load gt Always install the latest version of the P Stages2 dat stage database on your PC For start up with a load gt Before start up make sure that the M 683 has been properly installed p 17 gt For optimum performance of the moving axis adjust the operating parameters of the C 867 e g P term I term D term acceleration velocity see C 867 User Manual gt Save the new parameter values for future use in a stage database on the PC or in the non volatile memory of the controller see C 867 User Manual and PIMikroMove User Manual Prerequisites v You have read and understood the General Notes on Start Up and Operation p 37 v You have read and understood the user manual of the C 867 piezomotor controller driver v Inthe case of start up with a load The M 683 has been properly installed p 17 v The C 867 piezomotor controller driver and the required software have been installed All connections on the C 867 have been established see C 867 User Manual M 683 Linear Stage MP99E Version 1 4 0 41 6 Start Up and Operation P J Starting up the M 683 with the C 867 controller gt Start up the axis see C 867 User Manual The start up involves the following steps Selecting the stage type Defining the reference po
42. sion of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking 1 Unpack the M 683 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned M 683 Linear Stage MP99E Version 1 4 0 15 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation cccccccssseccceeeeesecceeeeeeseceeecaeeeceeseeegeeeeeeeaeeeeeeesaaees 17 Connecting the M 683 to the Protective Earth CONCUCTOT ccccccecceeeeeeeeeeeeeeeees 19 Mounting the M 683 on a Surface cceececccceceeceeeeeeeeeeeeeeceseeeseeeeeeeessaaeaeeeeeeeessaaaaeses 21 Affixing the Load to the M 688 ccccsecccccccsesseeeeeeeeseeeeeeeseeeeeeeeseaeeeeeessaaeeeessaaaeeees 23 Setting Up a Multi Axis System cccccccccccccceseseeeeeeeeeeeeseeseeeeeeeeeseeeeseeeeeeeeesssaaeeeeeeeees 25 Connecting the Vacuum Version to the Controller
43. ssaaeees 43 7 2 Performing a Maintenance RUN cccccseseececseeeeecaeeeeeeeeeeeeseaeeeesaaeeeeeaeeeeessaaes 43 7 3 Cleaning the M 688 ccccsssccccsesececceescecceeseeeceeeeeeseaseeeseaeessseuseesssasesessaeees 44 Troubleshooting 45 Customer Service 47 Technical Data 49 10l DOCS INC ATO NS asee E tidannaydranenixtanineshnesiendandusamirawesintesucauborsies 49 10 1 1 et TANS pee 49 10 1 2 Limit Switch Specifications cccccccsseeseeeceeeeeeeeeeseeeeeeeeessseeseeeeeeees 50 10 1 3 Reference Point Switch Specifications ccccccssseeceeeesseeeeeeeeeeees 50 10 1 4 Maximum Ive UNG S serres EREEREER 51 10 1 5 Specifications for Vacuum Compatible Versions ccccccseeeeeees 51 10 2 Ambient Conditions and Classifications cccccccccsssecceeeeeseeceeeeeeseceeesseaeeeees 52 1O MOOT POWO serseri E E A E ER 53 10 3 1 Motor Power and Operating Voltage cccceeecseeeeeeeeeeeeeeeeeeeeaeees 53 10 3 2 Velocity and Dynamic FOrce cccccseeeecceeeeeeeeeeeeeeeaeeeeesaaeeeeenaeees 54 10 3 3 Motor Power and Lifetime ccccccccsecceceeeeeseeeeeeeeeesseeeeseeeeeseeeeees 55 10 3 4 Influence of Downtimes on the Static Holding Force 0 00 56 10 4 DiIMenSionS si ierediccnstternnscsidiseiaicerenieereaecstn duicficeieaemaadie endcicwatiehenmiadeisenauatenntdadbentidncaibeinacntadenteas 57 10 5 Pin PAS SIONS Us cinceacisa cewaicaataiestn ces aiusanenjenauniiasusdnmnchiesie
44. ted up operated maintained and cleaned by authorized and appropriately qualified personnel 2 4 Measures for Handling Vacuum Compatible Products When handling the vacuum version of the stage attention must be paid to appropriate cleanliness At PI all parts are cleaned before assembly During assembly and measurement powder free gloves are worn Afterwards the stage is cleaned once again by wiping and shrink wrapped twice in vacuum compatible film gt Only touch the stage with powder free gloves gt f necessary wipe the stage clean after unpacking M 683 Linear Stage MP99E Version 1 4 0 7 PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model OVErViICW cccecceccececcecceceeceecueceenecuecueaeceecueaesaecueceeaesaecueseeaecuesueseeaesueaeeaesneseeaees 9 PrOOUCU VICW sereia neei eE besuanneretanaiatadsanceeauaaaeh R A 10 POU AD SMG eese EE 10 SCODE OF CUI aisresris oep EEA R 12 Suitable Controllers 2 2 2 c cccecceccecececcecceeeeceeceeceeaeceeceeaecaecueceeaeeecueceeaesueceeaeeaeseesueaneneeas 12 PCS SOS eerie e E A A Aea EREA 13 Technical Features sts enspe sic tmcitdeeudinnaaseitvamadsinsiamcnsaintaciiannuilcanahiibawastinsdamenaambectaaawiinasntldGbansabinsane 13 3 1 Model Overview The M 683 is available in the following versions Model Description OOOO M 683 2U4 PlLine high speed linear stage 50 mm 6 N M 683 2V4 PlLine high speed linea
45. ure that the screw heads do not protrude from counter sunk holes so that they do not interfere with the stage motion NOTICE Warping of the base body Incorrect mounting can warp the base body Warping of the base body will increase wear and reduce accuracy gt Mount the M 683 on an even surface The recommended evenness of the surface is 10 um gt For applications with great temperature changes Only fasten the M 683 to surfaces that have the same or similar thermal expansion properties as the M 683 e g surfaces made of aluminum INFORMATION The positive direction of motion is away from the cable exit side M 683 Linear Stage MP99E Version 1 4 0 21 5 Installation P J Figure 5 M 683 Two of four counter sunk holes in the base body see arrows Prerequisite v You have read and understood the General Notes on Installation p 17 v You have provided a suitable surface for the required position and depth of the holes for accommodating the screws see Dimensions p 57 Four M3 holes are present The evenness of the surface is lt 10 um For applications with great temperature changes The surface should have the same or similar thermal expansion properties as the M 683 e g surface made of aluminum v You accounted for the space required for cable routing free of kinks and in accordance with regulations v The M 683 is not connected to the controller Tools and accessories Mountin

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