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Agilent 4UHV Ion Pump Controller

1. Two independent channels with a maximum of 200 W power per channel One 200 W channel and two 80 W channels One 120 W channel The 4UHV controller can be operated in the modes LOCAL SERIAL or REMOTE Specifications Tab 1 Specifications Component Description Input Voltage 100 240 Vac 10 Input Frequency 50 60 Hz Input Power 600 VA Output HV Voltage 7000 Vdc 5 Output HV Short circuit current 40 mA for 80 W channels 100 mA for 200 W channels Output HV Power max 200 W or 80 W each channel Operating temperature 0 C to 40 C Storage temperature 20 C to 70 C Fuse 5x20 T6 3A 250 V Voltage measurement Resolution 100 V Accuracy 5 Current measurement Measurement range 10 nA to 100 mA logarithmic scale Resolution 2 digit of the mantissa maximum 10 nA Accuracy 6 Weight 6 5 kg Compliance with EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Technical Information Specifications 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 51 114 Figure 7 Output voltage vs Output current 0 1000 2000 3000 4000 5000 6000 7000 8000 0 20 40 60 80 100 120 Current mA Voltage V Output curve 200W O
2. 02 80 35 30 35 30 30 30 30 30 30 30 03 38 33 STX ADDR WINDOW WR DATA ETX CRC Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 83 114 Write 1 02 80 35 30 35 31 30 30 30 30 30 31 03 38 33 STX ADDR WINDOW WR DATA ETX CRC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Error code Win 206 Interlock error 02 80 32 30 36 30 03 38 37 STX ADDR WINDOW RD ETX CRC 02 80 32 30 36 30 30 30 30 30 33 32 03 38 36 STX ADDR WINDOW WR DATA ETX CRC Channel selection Win 505 Write 2 02 80 35 30 35 31 30 30 30 30 30 32 03 38 30 STX ADDR WINDOW WR DATA ETX CRC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Error code Win 206 Interlock not present error because channel 2 has been selected 02 80 32 30 36 30 03 38 37 STX ADDR WINDOW RD ETX CRC 02 80 32 30 36 30 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW WR DATA ETX CRC 5 Technical Information Serial 84 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Old Serial Protocol Binary Protocol The Binary Protocol serial protocol used by some old controllers is no longer supported For new projects Agilent advises that the new protocol Window protocol be used Nevertheless for compatibility with the old systems some commands o
3. Controller PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Read Pressure win 812 Channel 1 PC Controller 02 80 38 31 32 30 03 38 38 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 31 32 30 20 20 20 31 2E 35 45 2D 30 38 03 45 32 STX ADDR WINDOW WR DATA ETX CRC Data 1 5E 8 Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 79 114 Read Voltage win 810 Channel 1 PC Controller 02 80 38 31 30 30 03 38 41 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 31 32 30 30 30 33 30 30 30 03 38 39 STX ADDR WINDOW WR DATA ETX CRC Data 3000 Read Current win 811 Channel 1 PC Controller 02 80 38 31 31 30 03 38 42 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 31 31 30 20 20 20 32 2E 39 45 2D 30 35 03 45 33 STX ADDR WINDOW WR DATA ETX CRC Data 2 9E 5 Operating mode Win 601 Autostart ON PC Controller 02 80 36 30 31 30 30 30 30 30 30 30 30 30 30 31 03 38 34 STX ADDR WINDOW WR DATA ETX CRC Controller PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Autostart OFF PC Controller 02 80 36 30 31 31 30 30 30 30 30 30 30 30 30 30 03 38 35 STX ADDR WINDOW WR DATA ETX CRC 5 Technical Information Serial 80 114 Agilent
4. Agilent 4UHV Ion Pump Controller Models 829 9010 829 9011 829 9020 829 9021 829 9022 829 9101 829 9200 829 9201 829 9210 829 9211 829 9212 829 9213 829 9400 829 9401 829 9402 929 9010 929 9011 929 9020 929 9021 929 9022 929 9101 929 9200 929 9201 929 9210 929 9211 929 9212 929 9213 929 9400 929 9401 929 9402 Manuale di Istruzioni Bedienungshandbuch Notice de Mode D Emploi User Manual 87 900 137 01 C 01 2012 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Notices Agilent Technologies Inc 2012 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 900 137 01 C Edition Edition 01 2012 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Lein TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information contained herein including but not limited t
5. Eteindre le contr leur Brancher le c ble HV et l interlock du c ble H V sur les connecteurs correspondants situ s sur le panneau arri re Appuyer bri vement sur la touche MODE pour s lectionner la modalit LOCAL jusqu ce que l inscription LOCAL s affiche sur l cran Maintenir le bouton HV ON OFF 2 enfonc tout en appuyant sur le bouton HV x 3 4 5 6 x correspond au num ro du canal allumer ou teindre Mode d emploi Utilisation 3 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 35 114 Figure 4 Panneau avant 4UHV sur le contr leur de pompe Figure 5 Panneau arri re 4UHV sur le contr leur de pompe Pour teindre les canaux HV Maintenir le bouton HV ON OFF 2 enfonc tout en appuyant sur le bouton HV x 3 4 5 6 x correspond au num ro du canal allumer ou teindre Pour plus de renseignements sur l usage du contr leur et sur la description des informations de l cran consulter la section Technical Information 2 1 3 4 5 6 3 Mode d emploi Entretien 36 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C AVERTISSEMENT En cas de situation d urgence n cessitant un arr t imm diat de l unit et de tous les canaux haute tension d sactiver l interrupteur g n ral 1 situ sur le panneau avant En pla ant l interrupteur g n ral sur OFF l unit
6. 5 0 1 0E 12 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 Pressure kPa Analog remote Volt 1 3E 6 kPa 1 3E 12 kPa 1 3E 5 mbar 1 3E 11 mbar 5 Technical Information Start Up 70 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 24V A Connection of Input Remote In order to activate the inputs remote CH on off Ch protect CH Step connect the pins as following Figure 17 Input Controller Customer device s 4 7 K Input pin Digital GND Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 71 114 Serial The following figure shows the 4UHV interconnections Figure 18 4UHV interconnections This is a 9 pin D type serial input output connector that allows the 4UHV to be controlled via an RS232 or RS485 connection Tab 8 PIN No Signal Name 1 5 V OUT 2 TX RS232 3 RX RS232 4 Reserved 5 GND 6 A RS485 7 Reserved 8 B RS485 9 Reserved 5 Technical Information Serial 72 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Connector Examples 5 5 2 2 Controller 4UHV PC 3 3 Figure 19 RS 232 Connection Figure 20 RS 485 Connection Window Protocol Both RS232 and the RS485 interfaces are available on the 9 pin D type serial input output connector The communications protocol is the same see th
7. C 77 114 WIN R W Type Description Range 644 R W N I protect CH4 1 100 step 1 mA 645 R W A Set Point CH4 X XE XX 800 R N Temperature FAN 0 200 C 801 R N Temperature HV1 0 200 C 802 R N Temperature HV2 0 200 C 803 R A Interlock Status see below 804 R A Status Set Point see below 808 R N Temperature HV3 0 200 C 809 R N Temperature HV4 0 200 C 810 R N V measured CH1 0 7000 V step 100 V 811 R A I measured CH1 1E 10 9E 1 A 812 R A Pressure CH1 X XE XX 820 R N V measured CH2 0 10000 V step 100 V 821 R A I measured CH2 1E 10 9E 1 A 822 R A Pressure CH2 X XE XX 830 R N V measured CH3 0 10000 V step 100 V 831 R A I measured CH3 1E 10 9E 1 A 832 R A Pressure CH3 X XE XX 840 R N V measured CH4 0 10000 V step 100 V 841 R A I measured CH4 1E 10 9E 1 A 842 R A Pressure CH4 X XE XX 5 Technical Information Serial 78 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Example Turn ON Channel 1 PC Controller 02 80 30 31 31 31 31 03 42 33 STX ADDR WINDOW WR DATA ETX CRC Controller PC 02 80 06 03 38 33 STX ADDR ACK ETX CRC Turn OFF Channel 1 PC Controller 02 80 30 31 31 31 30 03 42 32 STX ADDR WINDOW WR DATA ETX CRC
8. Fax 33 0 1 69 86 29 88 Toll free 00 800 234 234 00 Mexico Agilent Technologies Vacuum Products Division Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 Customer Support amp Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl ra agilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual office information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 1 12 Germany and Austria Agilent Technologies Sales amp Services GmbH amp Co KG Vacuum Products Division Lyoner Str 20 60 528 Frankfurt am Main GERMANY Tel 49 69 6773 43 2230 Fax 49 69 6773 43 2250 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2012 Printed in ITALY 01 2012 Publication Number 87 900 137 01 C
9. X X E X Y X Y X X E 2 X X E b a r a r E 5 Technical Information Display and Menus 90 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Information on a Single Channel You can display all the information voltage current pressure and pump type for each single pump To do this press the HV x key where x corresponds to the channel to display X 4 0 a r S 5 5 7 X X E X E X l 5 3 X m B r 7 0 V X X 0 0 S e l C t A a p e t Figure 23 In this case the pump type pressure current and voltage of channel 3 are being displayed Commands You can give the controller three types of commands Switch on off channels Activate disactivate Protect mode Change output voltage Switching Channels On Off To switch a high voltage channel on or off keep the HV ON OFF key pressed while you press the HV x key where x is the number of the channel you want to switch on or switch off Activating Disactivating Protect Mode To activate or disactivate Protect mode keep the Protect key pressed while you press the HV x key where x is the number of channel for which you want to activate or disactivate the Protect functionality Technical Information Display and Menus 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 91 114 Changing the Outpu
10. a controller fault could result in the emission of smoke If the customer is using the controller in clean environments they should take adequate measures to avoid the environment being contaminated by any eventual smoke The controller must be used in the following environmental conditions Temperature 0 C to 40 C Relative humidity 0 90 non condensing 4 Instructions for Use Usage 42 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Usage This section provides you with the major operating procedures For more information and for the procedures that concern connections or specific options refer to the section USAGE in the Technical Information appendix Before using the controller perform all electrical connections and refer to the manual of the connected pump WARNING Switch on the high voltage channels only if they are connected to the ionic pumps by means of the special purpose high voltage cables equipped with interlock cable It is assumed that the controller will be used together with the high voltage cable having a safety interlock Figure 2 Ground Connections 4UHV Instructions for Use Usage 4 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 43 114 WARNING If an HV cable without interlock is to be used the accessories bag contains a specific kit of preassembled interlock leads However with this type of use t
11. 4UHV Ion Pump Controller User Manual 87 900 137 01 C Controller PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Protect Win 602 PC Controller 02 80 36 30 32 30 03 38 37 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 36 30 32 30 30 30 30 30 30 30 30 31 30 30 03 38 36 STX ADDR WINDOW WR DATA ETX CRC Fixed Step 603 PC Controller 02 80 36 30 33 30 03 38 36 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 36 30 33 30 30 30 30 30 30 30 30 30 30 31 03 38 37 STX ADDR WINDOW WR DATA ETX CRC Status Set Point 804 PC Controller 02 80 38 30 34 30 03 38 46 STX ADDR WINDOW RD ETX CRC Controller PC 02 80 38 30 34 30 30 30 30 30 30 30 30 30 30 31 03 38 45 STX ADDR WINDOW WR DATA ETX CRC Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 81 114 Error Description Controller errors can be displayed in two windows WIN 505 where the user writes the channel whose error is to be viewed WIN 206 where the controller shows the error code of the channel written in window 505 If the value 0 is written in window 505 the errors of all the channels remain displayed in window 206 Tab 12 WIN 505 value Channel 0 All channels 1 Channel 1 2 Channel 2 3 Channel 3 4 Channel 4
12. 9 Pressure unit selected 1 to 99 for mantissa 9 to 1 for exponent see Note 1 2 Set Point C value The first byte is the mantissa the second byte is the exponent 11 Pressure unit selected 1 to 99 for mantissa 9 to 1 for exponent see Note 1 2 Set Point D value The first byte is the mantissa the second byte is the exponent 12 see Note 2 1 B7 4 Set point A mapping default 1 B5 0 Set point B mapping default 1 13 see Note 2 1 B7 4 Set point C mapping default 1 B5 0 Set point D mapping default 1 Technical Information PROFIBUS 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 101 114 Configuration Output Structure Total buffer length 2 bytes Tab 23 NOTE 1 It is not possible to switch between profibus mode and serial mode using the profibus communication you can switch between these two modes only in Local mode Offset byte Unit Res Size byte Description 0 1 B7 HV 1 On Off B6 HV 2 On Off B5 HV 3 On Off B4 HV 4 On Off B3 HV1 protect mode On Off B2 HV2 protect mode On Off B1 HV3 protect mode On Off B0 HV4 protect mode On Off 1 1 B7 HV 1 mode 0 Fixed 1 Step B6 HV 2 mode 0 Fixed 1 Step B5 HV 3 mode 0 Fixed 1 Step B4 HV 4 mode 0 Fixed 1 Step B1 0 1 remote 2 local 3 Profibus 1 5 Technical Information PROFIBUS
13. Error Code The error code is displayed in decimal format Binary representation of this number provides indications regarding the type of error that has occurred The error table is shown below Tab 13 Error code in decimal format Binary Description 0 0000000000000 No error 1 0000000000001 FAN error 2 0000000000010 Power input error from HV 4 0000000000100 Power input error from PFC 8 0000000001000 Overtemp PFC 16 0000000010000 Error communication CPU HV 5 Technical Information Serial 82 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Error code in decimal format Binary Description 32 0000000100000 Interlock cable 64 0000001000000 Overtemp HV 128 0000010000000 Protect 256 0000100000000 Measurement error 512 0001000000000 HV out error 1024 0010000000000 Short circuit 2048 0100000000000 HV disabled Example Interlock cable Error code 32 decimal 0000000010000 binary Interlock cable error Interlock cable Overtemp HV Error code 96 decimal 0000000110000 binary Interlock cable error Overtemp HV Error code Win 206 Error interlock 02 80 32 30 36 30 03 38 37 STX ADDR WINDOW RD ETX CRC 02 80 32 30 36 30 30 30 30 30 33 32 03 38 36 STX ADDR WINDOW WR DATA ETX CRC Channel selection Win 505 Read 02 80 35 30 35 30 03 38 33 STX ADDR WINDOW RD ETX CRC
14. G0 47h 30h 10 Max power J0 4Ah 30h 11 Vmax H0 48h 30h 12 Iprotect K0 4Bh 30h 13 Set point P0 50h 30h 14 V meas S0 53h 30h 15 I meas T0 54h 30h 16 P meas U0 55h 30h 17 Set point status g0 67h 30h 18 Interlock status 0 5Dh 30h 19 Error status z0 7Ah 30h Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 87 114 Tab 17 Interlock Status Coding Bit Field Interlock Coding active if 1 01h HV3 Cable Interlock 02h Reserved 04h Reserved 08h HV1 Cable Interlock 10h HV4 Cable Interlock 20h Reserved 40h Reserved 80h HV2 Cable Interlock Tab 18 Value Error Status Coding active if 1 33h Cable Interlock 36h Excess temperature 37h Power input error 38h FAN Error 39h Protect 31h 30h Short circuit 31h 31h HV out error 31h 32h Zero Measurement 5 Technical Information Display and Menus 88 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Display and Menus Switching on the unit the initial screen that appears is as follows Figure 21 Afterwards a screen of the following type appears which displays for each channel the name of the ion pump selected 5 X X X 5 X X 4 X 3 X X X l X X 4 0 S 5 5 2 t a r C X X X 5 5 4 0 D i o 1 7 d 7 X X l e e Figure 22 Dis
15. Geh use vorne und unten eingelassen Luft ffnungen gew hrleistet sein Wenn der Controller in einem Gestell montiert wird MUSS er in einer vier Rackeinheiten hohen Adapter Einheit installiert werden um zu vermeiden da der Controller nicht in das Gestell f llt siehe dazu Tabelle der bestellbaren Zubeh rteile Die vordere Schalttafel des 4 HV Controllers ist nicht geeignet das gesamte Gewicht der Einheit zu tragen Der Controller darf nicht in Umgebungen installiert u o benutzt werden die Witterungseinfl ssen Regen Frost Schnee Staub und aggressiven Gasen ausgesetzt sind und in denen Explosions und erh hte Brandgefahr besteht Gebrauchsanleitung Installation 2 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 21 114 VORSICHT Der Controller 4UHV geh rt zu der zweiten Einbaukategorie oder auch berspannung die von der Norm EN 61010 1 geregelt ist Schlie en Sie daher das Ger t an eine Stromleitung an die dieser Kategorie gerecht wird Der Controller 4UHV hat Anschl sse f r die Ein Ausg nge und die Serienkommunikation die an externe Kreisl ufe angeschlossen sein m ssen so dass man zu keinem unter Strom stehenden Teil Zugriff hat Vergewissern Sie sich dass die Isolierung des Ger tes das an den Controller 4UHV angeschlossen ist auch bei Einzelst rungen wie sie von der Vorschrift EN 61010 1 vorgesehen sind angemessen isoliert ist HINWEIS Wenn der Controller in einem Gestell i
16. H T s arr te Entretien Le contr leur 4UHV n a besoin d aucun entretien N importe quel entretien sur l unit doit tre effectu par un personnel technique autoris En cas de panne contacter le Support technique Agilent ou bien s abonner au Agilent Advanced Exchange Service o le contr leur endommag est remplac par un contr leur reconditionn En cas de mise au rebut du contr leur proc der son limination conform ment aux r glementations nationales en la mati re Mise au Rebut Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment la directive CE nomm e WEEE Ce symbole uniquement valide pour les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente l utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut Agilent 4UHV Ion Pump Controller User Manual 37 114 4 Instructions for Use General Information 38 Storage 29 Prior to Installation 39 Installation 40 Usage 42 Powering On the Controller from the Front Panel LOCAL Mode 44 Maintenance 46 Dis
17. R W Controller Serial number 503 R W N RS485 Serial Address 0 31 1 def 504 R W L Serial Type Select 0 RS232 def 5 Technical Information Serial 76 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C WIN R W Type Description Range 1 RS485 505 R W N Channel Selection see below 600 R W N Unit pressure 0 Torr 1 mBar def 2 Pa 602 R W A Protect see below 603 R W A Fixed Step see below 610 R W N Device Number CH1 see below 612 R W N Power max CH1 20 W 80 W 613 R W N V target CH1 3000 7000 V step 1000 def 7000 614 R W N I protect CH1 1 100 step 1 mA 615 R W A Set Point CH1 X XE XX 620 R W N Device Number CH1 see below 622 R W N Power max CH2 20 W 80 W 623 R W N V target CH2 3000 7000 V step 1000 def 7000 624 R W N I protect CH2 1 100 step 1 mA 625 R W A Set Point CH2 X XE XX 630 R W N Device Number CH3 see below 632 R W N Power max CH3 20 W 80 W 633 R W N V target CH3 3000 7000 V step 1000 def 7000 634 R W N I protect CH3 1 100 step 1 mA 635 R W A Set Point CH3 X XE XX 640 R W N Device Number CH4 see below 642 R W N Power max CH4 20 W 80 W 643 R W N V target CH4 3000 7000 V step 1000 def 7000 Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01
18. Set point Relay Channel 3 Input Pin 23 CH3 on off Pin 24 CH3 protect Pin 25 CH3 step Pin 22 Digital Gnd Analog Output Pin 20 Analog 3 Pin 3 Analog Gnd Digital Output Pin 35 CH3 NC Set point Relay Pin 36 CH3 Common Relay Pin 37 CH3 NO Set point Relay Channel 4 Input Pin 26 CH4 on off Pin 27 CH4 protect Pin 28 CH4 step Pin 22 Digital Gnd Analog Output Pin 21 Analog 4 Pin 3 Analog Gnd Digital Output Pin 32 CH4 NC Set point Relay Pin 33 CH4 Common Relay Pin 34 CH4 NO Set point Relay 5 Technical Information Start Up 68 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Tab 7 Input Output Electrical Specification I O Ratings I O Type ON OFF Max Load Note Input Digital V lt 12V I gt 2 25mA 24V gt V gt 23V I lt 100uA Analog Output 1mA Range 0 10V Output Relay 24V 1A max 24V dc 24V 10 60mA max Figure 14 Recorder Output Pressure Technical Information Start Up 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 69 114 Figure 15 Analog remote vs Pressure kPa Figure 16 Analog remote vs Pressure mbar Analog remote vs Pressure 0 0 1 0 2 0 3 0 4 0 5 0 1 0E 11 1 0E 10 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 Pressure mbar Analog remote Volt Analog remote vs Pressure 0 0 1 0 2 0 3 0 4 0
19. d avertissement attirent l attention de l op rateur sur une proc dure ou une manoeuvre sp ciale qui si elle n est pas effectu e correctement risque de provoquer de graves l sions ATTENTION Les messages d attention apparaissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage NOTE Les notes contiennent des renseignements importants isol s du texte Mode d emploi Emmagasinage 3 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 29 114 Emmagasinage Pour transporter et emmagasiner le contr leur il faut observer les conditions suivantes d environnement temp rature de 20 C 70 C humidit relative 0 95 non condensante Preparation pour l Installation Le contr leur est fourni dans un emballage de protection sp cial si l on constate des dommages pouvant s tre produits pendant le transport contacter tout de suite le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le contr leur et ne lui faire subir aucun choc Le mat riel est enti rement recyclable et il est conforme aux directives CEE 85 399 en mati re de protection de l environnement Figure 1 Emballage du contr leur 3 Mode d emploi Installation 30 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Installation AVERTISSEME
20. dem Abschnitt Technical Information 2 1 3 4 5 6 2 Gebrauchsanleitung Wartung 26 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C WARNUNG Bei Not Aus schalten Sie den Hauptschalter 1 auf dem vorderen Bedienfeld aus um das Ger t und s mtliche Hochspannungsleitungen auszuschalten Wenn Sie den Hauptschalter auf Off stellen wird das HV Ger t ausgeschaltet Wartung Die 4UHV Controller sind wartungsfrei Eventuell erforderliche Eingriffe m ssen von dazu befugtem Fachpersonal ausgef hrt werden Bei St rungen kann der Agilent Reparaturdienst in Anspruch genommen werden oder schlie en Sie einen Vertrag f r Agilent Advanced Exchange Service ab mit dem ein defekter Controller gegen einen general berholten ausgetauscht wird Eine eventuelle Verschrottung mu unter Einhaltung der einschl gigen landes blichen Vorschriften erfolgen Entsorgung Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in bereinstimmung mit der EURichtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverk ufer kontaktieren um den Entsorgungspro
21. gehen Sie sehr vorsichtig vor damit dabei kein Teil in den Controller f llt Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus HINWEIS Um die Hochspannung HV einzuschalten muss der Interlock des HV Kabels Kabel Iinterlock geschlossen sein Verbinder eingesteckt Gehen Sie wie folgt vor um den Controller mit Strom zu versorgen und die Spannung an den Hochspannungsverbindern H V freizugeben Schalten Sie den Controller aus Schlie en Sie das HV Kabel und den Interlock des H V Kabels an die jeweiligen Verbinder am R ckenteil W hlen Sie die Modalit t LOCAL indem Sie kurz die Taste MODE dr cken bis auf dem Display die Aufschrift LOCAL erscheint Halten Sie die Taste HV ON OFF 2 gedr ckt und dr cken Sie gleichzeitig die Taste HV x 3 4 5 6 wobei x die Nummer der Leitung ist die ein oder ausgeschaltet werden soll Gebrauchsanleitung Gebrauch 2 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 25 114 Abbildung 4 Vorderteil 4UHV Ionenpumpen Controller Abbildung 5 R ckenteil 4UHV Ionenpumpen Controller Um die HV Leitungen auszuschalten Halten Sie die Taste HV ON OFF 2 gedr ckt und dr cken Sie gleichzeitig die Taste HV x 3 4 5 6 wobei x die Nummer der Leitung ist die ein oder ausgeschaltet werden soll Weitere Einzelheiten zum Gebrauch des Controllers und zur Beschreibung der Display Angaben entnehmen Sie bitte
22. is suspended only for output data if the ProfiBus State machine is not in Data Exchange mode As a general rule unrecoverable communication errors make each machine to jump to the state immediately following the power on state WAIT_PRM or SRC_ADDR Technical Information PROFIBUS 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 99 114 Message Mapping The communication is based on the continuous data exchange capability of the ProfiBus standard where the master sends continuously the entire slave configuration and reads back the entire slave status For this purpose one Input from slave to master and one Output from master to slave buffers are provided All the needed parameters are mapped inside each buffer The following tables reassume the ProfiBus parameter access related to the corresponding windows serial protocol NOTE The profibus communication and the serial communication use the same link inside of the controller then you can not use at the same time the profibus communication and the serial communication 5 Technical Information PROFIBUS 100 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Configuration Buffer Structure Total buffer length 15 bytes 4 words 7 byte Tab 22 Note 1 Each set point value is divided into 2 bytes one for mantissa the value is divided by 10 and one for exponent Example1 if you want to set the Set Point A to 3 5E
23. radiation resistant 7 meter 929 0708 HV bakeable cable radiation resistant 10 meter 929 0709 HV bakeable cable radiation resistant 20 meter Request for Return Form Sales and Service Offices United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 India Agilent Technologies India Pvt Ltd Vacuum Products Division G01 Prime corporate Park 230 231 Sahar Road Opp Blue Dart Centre Andheri East Mumbai 400 099 India Tel 91 22 30648287 8200 Fax 91 22 30648250 Toll Free 1800 113037 Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Italy Agilent Technologies Italia S p A Vacuum Products Division Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 32450 Taoyuan Hsien Taiwan R O C Tel 886 34959281 Toll Free 080
24. 0 HV4 Protect Mode diagnostic status 12 B7 4 HV1 Fixed Step Mode diagnostic status B3 0 HV2 Fixed Step Mode diagnostic status 13 B7 4 HV3 Fixed Step Mode diagnostic status B3 0 HV4 Fixed Step Mode diagnostic status 14 B7 4 Serial Remote Local Profibus diagnostic status B3 0 Not used Technical Information Orderable Parts 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 107 114 Orderable Parts Tab 26 Part Description Controllers 829 9010 4UHV with 1 channel 200 W Negative with profibus interface 829 9011 4UHV with 1 channel 200 W Positive with profibus interface 829 9020 4UHV with 2 channels 200 W Negative with profibus interface 829 9021 4UHV with 2 channels 200 W Positive with profibus interface 829 9100 4UHV with 1 channel 120 W Negative with profibus interface 829 9101 4UHV with 1 channel 120 W Positive with profibus interface 829 9200 4UHV with 2 channels 80 W Negative with profibus interface 829 9201 4UHV with 2 channels 80 W Positive with profibus interface 829 9400 4UHV with 4 channels 80 W Negative with profibus interface 829 9401 4UHV with 4 channels 80 W Positive with profibus interface 829 9210 4UHV with 2 channels 80 W Negative 1 channel 200 W Negative with profibus interface 829 9211 4UHV with 2 channels 80W Positive 1 channel 200 W Positive with profibus interface 829 9022 4UHV with 1 channel 200 W Positive 1 channel 20
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26. 0 W Negative with profibus interface 829 9402 4UHV with 2 channels 80 W Positive 2 channels 80 W Negative with profibus interface 829 9212 4UHV with 2 channels 80 W Positive 1 channel 200 W Negative with profibus interface 829 9213 4UHV with 2 channels 80 W Negative 1 channel 200 W Positive with profibus interface 929 9010 4UHV with 1 channel 200 W Negative 929 9011 4UHV with 1 channel 200 W Positive 929 9020 4UHV with 2 channels 200 W Negative 929 9021 4UHV with 2 channels 200 W Positive 929 9100 4UHV with 1 channel 120 W Negative 929 9101 4UHV with 1 channel 120 W Positive 929 9200 4UHV with 2 channels 80 W Negative 929 9201 4UHV with 2 channels 80 W Positive 5 Technical Information Orderable Parts 108 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 929 9400 4UHV with 4 channels 80 W Negative 929 9401 4UHV with 4 channels 80 W Positive 929 9210 4UHV with 2 channels 80 W Negative 1 channel 200 W Negative 929 9211 4UHV with 2 channels 80W Positive 1 channel 200 W Positive 929 9022 4UHV with 1 channel 200 W Positive 1 channel 200 W Negative 929 9402 4UHV with 2 channels 80 W Positive 2 channels 80 W Negative 929 9212 4UHV with 2 channels 80 W Positive 1 channel 200 W Negative 929 9213 4UHV with 2 channels 80 W Negative 1 channel 200 W Positive HV Cables 929 0705 HV bakeable cable radiation resistant 4 meter 929 0707 HV bakeable cable
27. 102 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Configuration Input Structure Total buffer length 40 bytes 9 bytes 8 floating Tab 24 Offset byte Unit Res Size byte Description 0 B7 Communication stetus between CPU and internal profibus card B6 Communication status 0 ok 1 not good B1 0 1 remote 2 local 3 Profibus 1 1 B7 HV 1 On Off B6 HV 2 On Off B5 HV 3 On Off B4 HV 4 On Off B3 HV1 protect mode On Off B2 HV2 protect mode On Off B1 HV3 protect mode On Off B0 HV4 protect mode On Off 2 1 B7 HV 1 mode 0 Fixed 1 Step B6 HV 2 mode 0 Fixed 1 Step B5 HV 3 mode 0 Fixed 1 Step B4 HV 4 mode 0 Fixed 1 Step B3 Set point A 0 not active 1 active B2 Set point B 0 not active 1 active B1 Set point C 0 not active 1 active B0 Set point D 0 not active 1 active 3 1 B7 HV 1 cable interlock B6 HV 2 cable interlock B5 HV 3 cable interlock B4 HV 4 cable interlock B3 HV 1 Remote on off B2 HV 1 Remote on off B1 HV 1 Remote on off B0 HV 1 Remote on off 4 1 bit 100V 1 Controller status 0 no error 6 error 5 1 bit 100V 1 Channel 1 High voltage measured 6 1 bit 100V 1 Channel 2 High voltage measured 7 1 bit 100V 1 Channel 3 High voltage measured 8 1 bit 100V 1 Channel 4 High voltage mea
28. 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Fuse Holder The following figure shows the location of this assembly Figure 11 Rear Panel Proceed as follows to replace one or both fuses 1 Disconnect the mains cable 2 Waiting for 15 second 3 Remove the fuse with a small screwdriver 4 Replace the fuse 5 Use only 5x20 T6 3 A 250 V fuses Technical Information Interlock connection 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 57 114 Interlock connection In order to guarantee a proper working of the interlock connection the user must take care that the total resistance between the ground controller and the input of the interlock cable connected to the ion pump is less than 400 Ohm 5 Technical Information Operating Mode 58 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Operating Mode The controller 4UHV for ion pumps can be operated in three different modes Local Serial Remote The commands sent to the controller for example HVON OFF Target voltage etc can only be given in the mode chosen while the data for example current pressure voltage etc can be read in all the modes E g If you select Local mode the HV channels can only be switched on via the keys on the Front Panel but the current supplied can be read via the Front Panel Serial and Remote Change from one mode to the next can b
29. 19 Vor der Installation 19 Installation 20 Gebrauch 22 Wartung 26 Entsorgung 26 3 Mode d emploi 27 Indications Generales 28 Emmagasinage 29 Preparation pour l Installation 29 Contents 6 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Installation 30 Utilisation 32 Entretien 36 Mise au Rebut 36 4 Instructions for Use 37 General Information 38 Storage 39 Prior to Installation 39 Installation 40 Usage 42 Maintenance 46 Disposal 46 5 Technical Information 47 4UHV Controller Description 49 Specifications 50 Interlock connection 57 Operating Mode 58 Start Up 60 Serial 71 Display and Menus 88 PROFIBUS 95 Orderable Parts 107 Agilent 4UHV Ion Pump Controller User Manual 7 114 1 Istruzioni per l uso Informazioni Generali 8 Immagazzinamento 9 Preparazione per l installazione 9 Installazione 10 Uso 12 Accensione del controller dal pannello frontale modalit LOCAL 14 Manutenzione 16 Smaltimento 16 Traduzione delle istruzioni originali 1 Istruzioni per l uso Informazioni Generali 8 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utente deve leggere attentamente il presente Manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima d
30. 5 you have to write byte offset 4 35d 23hex and byte offset 5 5d FBhex Example2 if you want to set the Set Point A to 1 0E 9 you have to write byte offset 4 10d 0Ahex and byte offset 5 5d F7hex Note 2 This byte is divided in two nibble 4 bits each nibble is the number of HV channel to associated to the set point X Example if you want assign the set point A to channel 2 you have to write byte offset 12 B7 4 0010 if you want assign the set point B to channel 3 you have to write byte offset 12 B5 0 0011 if you want assign the set point C to channel 4 you have to write byte offset 13 B7 4 0100 if you want assign the set point D to channel 1 you have to write byte offset 13 B5 0 0001 Offset byte Unit Res Range Size byte Description 0 1 B7 6 Pressure unit 0 Torr 1 mbar 2 Pa B5 Auto power ON 0 NO 1 Yes 1 1bit 1mA 1mA to 100mA 1 Ch1 Protect current value 2 1bit 1mA 1mA to 100mA 1 Ch2 Protect current value 3 1bit 1mA 1mA to 100mA 1 Ch3 Protect current value 4 1bit 1mA 1mA to 100mA 1 Ch4 Protect current value 5 Pressure unit selected 1 to 99 for mantissa 9 to 1 for exponent 2 Set Point A value The first byte is the mantissa the second byte is the exponent 7 Pressure unit selected 1 to 99 for mantissa 9 to 1 for exponent see Note 1 2 Set Point B value The first byte is the mantissa the second byte is the exponent
31. AL is shown on the display Hold down the HV ON OFF button 2 while pressing the HV x 3 4 5 6 button where x is the number of the channel to be switched on off Instructions for Use Usage 4 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 45 114 Figure 4 Front Panel 4UHV Ion Pump Controller Figure 5 Rear Panel 4UHV Ion Pump Controller To switch off the HV channels Hold down the HV ON OFF 2 button while pressing the HV x 3 4 5 6 button where x is the number of the channel to be switched on off For further details on using the controller and for a description of the information appearing on the display refer to the section Technical Information 2 1 3 4 5 6 4 Instructions for Use Maintenance 46 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C WARNING In situations of emergency to switch off the unit and all the high voltage channels turn off the main power switch 1 situated on the front panel When the main switch is turned off the HV unit is switched off Maintenance The 4UHV controller does not require any maintenance Any form of servicing on the unit must be performed by authorized personnel If servicing is needed contact Agilent Technical Support or subscribe to the Agilent Advanced Exchange Service where the faulty controller is replaced by a refurbished one If the controller needs to be scrap
32. Cell 5 5E 4 A 1 6E 5 A 150 StarCell 3 0E 4 A 8 5E 6 A 75 55 40 StarCell 1 3E 4 A 3 8E 6 A 20 StarCell 6 5E 5 A 1 9E 6 A 5 Technical Information Start Up 62 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Protect The protect function is useful to avoid damages in the ion pump due to the overcurrent If this function is enabled the controller waits 120 seconds from the HV ON then it begins to check the current provided If the current exceeds the threshold in the following table the HV channel turns off and the controller gives the Protect Error This kind of error is not a controller error but it is only a warning informing that the HV channel is turned off because the protect current threshold was exceeded Technical Information Start Up 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 63 114 Tab 5 Pump type Protect current 500 diode 100mA 300 diode 100mA 150 diode 50mA 75 55 40 diode 30mA 20 diode 20mA 10 diode 5mA 500 StarCell 100mA 300 StarCell 100mA 150 StarCell 50mA 75 55 40 StarCell 30mA 20 StarCell 20mA Set point The controller has 4 relays relay A relay B relay C relay D and they can be configured as set points Set point configuration You can configure the four relays to operate with any channels Example 1 default configuration one relay for each channel Relay A channel 1 Rel
33. Dual controller command format header command length command channel data checksum Dual controller to Host reply format header response length command channel data checksum Tab 15 Field No of Bytes Value Description Header command 1 81h 81h A0h Header for the RS232 and RS422 serial Header and address for the RS485 129 160 serial Header response 01h 01h 20h Header for the serial RS232 RS422 Header and address for the RS485 serial Length 2 Data packet length in BCD command channel data fields only Command See description of commands byte 0 command byte 1 subcommand Channel 1 30h 31h 32h 33h 34h No channel High Voltage 1 High Voltage 2 High Voltage 3 High Voltage 4 Data N See description of commands Checksum 1 XOR of all bytes checksum excluded in and with 7Fh Command Listing It is not possible to implement all the Binary Dual protocol commands on the 4UHV controller The commands that are implemented on the 4UHV controller are the following 5 Technical Information Serial 86 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Tab 16 No Description ASCII Hex 1 Local remote Z0 5Ah 30h 3 HV ON OFF A0 41h 30h 4 Device number F0 46h 30h 5 Measurement unit D0 44h 30h 7 Protect C0 43h 30h 8 Fixed Step B0 42h 30h 9 Power supply polarity
34. NT Pour la s curit de l op rateur le contr leur 4UHV doit tre aliment par un c ble d alimentation 3 fils dot d une prise m le approuv e un niveau international Brancher le c ble avec prise m le une prise femelle raccord e la terre de fa on ad quate afin d viter tout risque d lectrocution et de pouvoir remplir les conditions de conformit prescrites par les normes CE Les hautes tensions qui se d veloppent l int rieur du contr leur peuvent tre susceptibles de provoquer des blessures graves voire de causer la mort Apr s l extinction de l unit il reste de l nergie l int rieur du contr leur pendant quelques instants Attendre environ 1 minute pour tre s r que l nergie r siduelle s est dissip e ATTENTION Le contr leur peut tre utilis soit comme unit de table que comme module install dans une armoire De toute fa on il doit tre plac de mani re ce que l air puisse circuler librement travers les trous d a ration pr sents dans la couverture Lorsque le contr leur est utilis comme module armoire il DOIT tre install dans un adaptateur d une hauteur de quatre unit s armoire afin d viter qu il ne tombe l int rieur de l armoire m me voir tableau des pi ces d tach es Le panneau frontal du contr leur n est pas pr vu pour supporter le poids de l unit Ne pas installer ou utiliser le contr leur 4UHV dan
35. PEN ERDE Gebrauchsanleitung Gebrauch 2 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 23 114 WARNUNG Soll ein HV Kabel ohne Interlock zum Einsatz kommen befindet sich in dem Zubeh rbeutel ein daf r bestimmtes Kabelset f r vormontierte Interlock Teile Bei diesem Gebrauch geht die Sicherheitsfunktion verloren die man bei der Interlock Verwendung hat Sehen Sie sich folgende Abbildung genau an um das im Zubeh rbeutel mitgelieferte Interlock Kabel richtig zu montieren wenn auf das Hochspannungskabel mit Interlock verzichtet werden soll Abbildung 3 HINWEIS Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Die Verriegelung des Kabels wird auf der Masse der Pumpe geschlossen Wenn die Verbindung unterbrochen wird wird die Hochspannung deaktiviert Beim Anschluss des Controller an die Pumpe ist ein HV Kabel mit Interlock siehe Bestellteile zu verwenden ZAHNSCHEIBE UNTERLEGSCHEIBE FEDERRRING SCHRAUBE INTERLOCK KABEL 1 oder 2 Stk R CKSEITE 2 Gebrauchsanleitung Gebrauch 24 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Auf der Abbildung Anschl sse sind die richtigen Anschl sse der Erdungen des HV Kabels des Controller an die Pumpe und des Interlock Kabels ersichtlich VORSICHT Beim Montieren des im Zubeh rbeutel mitgelieferten Interlock Kabels
36. R A 5 R S 4 8 2 R S 2 3 T S e r i a l E N N F I G G C O l a C O N G E S e r A d F d E R N r L X X A I G i O N S Y E t s t a r L A u t o N E R A G E C O N I G F C O N F I G G E N E R A L F a n T A L W A Y S O N H R E S H O L D 5 Technical Information Display and Menus 94 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C First Level Second Level Third Level S G E N n t E R C O G N F I S e t p o i S E T P O I N T A E T P B O I N T A L G E N E R A L S E T P O I N T S e t P o i n t H x A C X X E X X A A B L O G A N A A L O G A N A u t o g O n a l N E R A L G E O N F I G C n a O l o T E A L G E R N E A M O R E g u t A C H x C O G U R N F E I H V 1 H V 3 H V 2 H V P u X X X X X m X X X X X p 1 H V 1 I P r o t X X m e A c t H V 1 P o X X e r M a x W X w Technical Information PROFIBUS 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 95 114 PROFIBUS Connectors Pin Out Figure 24 4UHV Profibus Connectors pin out Rotary Switches The inte
37. apposito kit di cavetti per interlock preassemblati Con questo utilizzo si perde la funzionalit di sicurezza offerta dall utilizzo dell interlock Fare riferimento alla seguente figura per montare correttamente il cavo di interlock fornito nel sacchetto accessori qualora si voglia rinunciare al cavo di alta tensione dotato di interlock Figura 3 NOTA L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata L interlock del cavo viene chiuso sulla massa della pompa Se il collegamento interrotto l alta tensione viene disabilitata Per collegare il controller alla pompa utilizzare un cavo HV dotato di interlock vedere nelle parti ordinabili 1 Istruzioni per l uso Uso 14 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Nella figura Collegamenti delle masse sono riportati i corretti collegamenti delle masse del cavo HV tra il controller e la pompa e del cavo di interlock ATTENZIONE Se si monta il cavo di interlock fornito nel sacchetto accessori fare molta attenzione affinch nessuna parte cada accidentalmente all interno del controller Accensione del controller dal pannello frontale modalit LOCAL NOTA Per accendere l alta tensione HV occorre che l interlock del cavo HV cable interlock sia chiuso connettore inserito Procedere come segue per alimentare il controller e abilitare la tensi
38. ation 72 Commands 90 Menu 91 PROFIBUS 95 Connectors Pin Out 95 Rotary Switches 95 Indicators 95 GSD File 97 State Machine 97 Message Mapping 99 Configuration Buffer Structure 100 Configuration Output Structure 101 Configuration Input Structure 102 Diagnosis Management 103 Diagnostic Buffer 15 byte 105 Orderable Parts 107 Technical Information 4UHV Controller Description 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 49 114 4UHV Controller Description The 4UHV controller is a power supply for ion pumps It supplies a high voltage on output selectable as 3 kV 5 kV or 7 kV and measures the output current The controller has the following features Front panel with keypad and a 4 row display 4x20 146 x 62 mm for displaying the operating values voltage current pressure Remote I O card with DB37 connector RS232 and RS485 serial communications Figure 6 4 UHV Controllers The controller contains one or two high voltage modules Each high voltage module can have one 200 W channel or one 120 W channel or two 80 W channels Some examples of how HV channels can be configured are given below for details see the Orderable Parts table Four independent channels with a maximum of 80 W power per channel 5 Technical Information Specifications 50 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C
39. ato con almeno 30 mm di spazio sotto e sopra ATTENZIONE In casi rari di guasto il controller potrebbe emettere fumo Se il cliente usa il controller in camere pulite necessario prevedere adeguate protezioni per evitare di contaminare l ambiente con l eventuale fumo Durante il funzionamento occorre che siano rispettate le seguenti condizioni ambientali Temperatura da 0 C a 40 C Umidit relativa 0 90 senza condensa 1 Istruzioni per l uso Uso 12 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Uso In questo paragrafo vengono riportate le principali procedure operative Per ulteriori informazioni e per le procedure riguardanti collegamenti o particolari opzioni fare riferimento al paragrafi UTILIZZO nell appendice Technical Information Prima di utilizzare il controller effettuare tutti i collegamenti elettrici e fare riferimento al manuale della pompa collegata AVVERTENZA Accendere i canali di alta tensione solo se connessi alle pompe ioniche tramite gli appositi cavi di alta tensione dotati del cavo di interlock L uso del controller inteso con cavo di alta tensione provvisto di interlock Figura 2 Collegamenti delle masse 4UHV Istruzioni per l uso Uso 1 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 13 114 NOTA Se si vuole utilizzare un cavo HV senza interlock nel sacchetto accessori fornito un
40. ay B channel 2 Relay C channel 3 Relay D channel 4 Example 2 two relays for one channel Relay A channel 1 Relay B channel 1 Relay C channel 3 Relay D channel 3 Example 3 all relays for only one channel e g channel 2 5 Technical Information Start Up 64 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Relay A channel 2 Relay B channel 2 Relay C channel 2 Relay D channel 2 All these configurations can be set by front panel menu Description The microprocessor begins to drive the relays about 10 seconds after reaching the target voltage this behaviour is in order to avoid wrong activations due to voltage ramping The threshold of the set point has a hysteresis of 5 Figure 13 Autostart This function allows to restore the high voltage output when the main power supply is restored after a fail When the Autostart is selected If the HV channel is in ON status and the main power supply fails when the supply is restored the HV channel automatically turns on Technical Information Start Up 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 65 114 If the HV channel is in OFF status and the main power supply fails when the supply is restored the HV channel stays in OFF If the Autostart is not selected The HV channel returns always OFF after that the main power fails Fan configurati
41. cables to the controller and to the ion pumps 4 Make sure that Interlock of HV cable is connected 5 To switch on the unit put the main power switch to ON 6 Select Local for the Operating mode 7 Press the keys HV ON OFF keys and HV x where x is the number of the channel you want to switch on Figure 12 Front Panel Main power switch Keys HV x Key HV ON OFF Technical Information Start Up 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 61 114 Functions Step mode Fixed mode The high voltage provided to an ion pump can change from 3kV up to 7kV The user can set the Fixed mode with the voltage of 3kV or 5kV or 7kV using the front panel or through the serial commands or through the remote I O In order to optimize the pumping speed of the ion pump and to minimize the influence of the leakage current the controller implements the Step mode function With this function the controller provides 7kV for about 5 seconds then it changes the voltage among 3 5 7 kV depending on the current drawn by the ion pump and on the ion pump type Tab 4 Pump Type Current for switching from 7kV to 5kV Current for switching from 5kV to 3kV 500 diode 1 4E 3 A 3 9E 5 A 300 diode 7 2E 4 A 2 1E 5 A 150 diode 3 6E 4 A 9 5E 6 A 75 55 40 diode 2 2E 4 A 6 7E 6 A 20 diode 2 0E 4 A 2 7E 6 A 10 diode 2 0E 5 A 6 0E 6 A 500 StarCell 9 0E 4 A 2 5E 5 A 300 Star
42. clically between Serial Front Remote You exit from this display automatically after 5 seconds By keeping this key pressed for a long time gt 2 sec you enter the menu To exit from the menu press the Mode key again for a long time 5 Technical Information Specifications 54 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Graphic Signals Four black squares are present for each channel indicating respectively the 4 states of the channel The meaning of the 4 indicators is the following 1 HV x Solid mark HV on Without mark HV off Blinking mark Error 2 Protect x Solid mark Protect on Without mark Protect off Blinking mark Protect error 3 SP x Solid mark Set point activate Without mark Set point not active 4 Step x Solid mark Step Without mark Fixed Technical Information Specifications 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 55 114 Rear Panel Description Figure 10 Rear Panel The following are present on the rear panel The HV connectors 1 2 3 or 4 according to model The interlock connectors associated to each channel The fuses The DB9 connector for RS232 and RS485 serial communication The DB37 connector for Remote I O signals Fuses Interlock connector HV Connectors Serial Port Remote I O 5 Technical Information Specifications 56
43. ctionnement il est n cessaire de respecter les conditions d environnement suivantes temp rature de 0 C 40 C humidit relative 0 90 non condensante 3 Mode d emploi Utilisation 32 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Utilisation Dans ce paragraphe on indique les principales proc dures op rationnelles Pour tous autres d tails et pour les proc dures concernant des connexions ou des l ments en option se reporter au paragraphe Usage de l appendice Technical Information Avant d utiliser le contr leur effectuer toutes les connexions lectriques et se reporter la notice de la pompe connect e AVERTISSEMENT N allumer les canaux haute tension que s ils ont t branch s aux pompes ioniques par l interm diaire des c bles haute tension pr vus cet effet et dot s de c ble Interlock L usage du contr leur est subordonn l usage d un c ble haute tension dot d Interlock Figure 2 Connexions des masses 4UHV POMPE BRANCHEMENT DE TERRE DE LA POMPE LIGNE Mode d emploi Utilisation 3 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 33 114 NOTE Si l op rateur veut utiliser un c ble HV sans interlock le sachet d accessoires contient un kit sp cial de c bles pour interlocks pr assembl s L utilisation de ces accessoires provoque la perte des fonctions de s curit offe
44. ddress 0x80 device number 0 to 31 for RS485 5 Technical Information Serial 74 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C lt WIN gt Window a string of 3 numerics indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write in the window lt DATA gt an alphanumeric ASCII string with the data to be written in the window In the case of a read command this field is not present The field length varies according to the data type as shown in the following table Tab 9 Data Type Field Length Valid Characters Logic L 1 0 OFF 1 ON Numeric N 6 0 9 right justified with 0 Alphanumeric A 10 From blank to _ ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters following lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and represented by two ASCII characters The SLAVE addressed responds with an ANSWER whose structure depends on the MESSAGE type When the MESSAGE is a read command the SLAVE responds transmitting a string with the same structure as the MESSAGE NOTE Using the RS485 interface the message structure is identical to that used for the RS232 interface the only difference being the
45. der Controller m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur 20 C bis 70 C Rel Luftfeuchtigkeit 0 95 nicht kondensierend Vor der Installation Der Controller wird mit einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den m ssen sofort der zust ndigen rtlichen Verkaufsstelle gemeldet werden Das Verpackungsmaterial muss korrekt entsorgt werden Es ist vollst ndig recyclebar und entspricht der EG Richtlinie 85 399 f r Umweltschutz Abbildung 1 Verpackung des Controllers 2 Gebrauchsanleitung Installation 20 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Installation WARNUNG Zur Sicherheit des Controller Bedieners muss der 4UHV an ein 3 Draht Speisekabel mit einem international anerkannten Stecker angeschlossen sein Dieses Kabel und dieser Stecker m ssen an eine angemessen geerdete Steckdose angeschlossen sein um Stromschl ge zu vermeiden und den Anforderungen der CE Normen gerecht zu werden Die Hochspannungen die im Controller entstehen k nnen schwere Verletzungen oder den Tod verursachen Nach Ausschalten des Ger ts bleibt noch einige Zeit lang Reststrom im Controller Warten Sie etwa 1 Minute um sicher zu sein dass der restliche Strom dissipiert ist VORSICHT Der Controller kann auf einen Tisch oder ein Gestell montiert werden In beiden F llen mu eine ungehinderte Zirkulation der K hlluft durch die im
46. e alcun intervento di manutenzione Qualsiasi tipo di intervento sull unit deve essere eseguito da personale tecnico autorizzato In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un controller rigenerato in sostituzione di quello guasto Qualora un controller dovesse essere rottamato procedere nel rispetto delle normative nazionali specifiche Smaltimento Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita Agilent 4UHV Ion Pump Controller User Manual 17 114 2 Gebrauchsanleitung Allgemeines 18 Lagerung 19 Vor der Installation 19 Installation 20 Gebrauch 22 Einschalten des Controllers von der vorderen Schalttafel LOKAL Modus 24 Wartung 26 Entsorgung 26 bersetzung der Originalanleitungen 2 Gebrauchsanleitun
47. e done either via the Front Panel or a serial command NOTE Change from one mode to another can be done with the high voltage switched on However the channels switch off if Remote mode is selected but no commands for switching on are present on the remote connector Selecting Operating Mode from Front Panel To display the current mode press the Mode key briefly less than 2 seconds To change mode press the Mode key again The three modes will be displayed in a cyclic fashion Local Serial Remote After selecting the required mode wait approximately 5 seconds to return to the previous screen Technical Information Operating Mode 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 59 114 Selecting Operating Mode via Serial Using serial communications via the protocol WIN protocol see chapter SERIAL Window Protocol write the chosen value in window 8 Tab 3 Keys Value Description 0 Serial 1 Remote 2 Local 5 Technical Information Start Up 60 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Start Up This chapter explains how to switch on and off the unit and the high voltage channels In the following chapters all the functions of the controller are explained in detail 1 Put the main power switch situated on the front panel to OFF 2 Insert the power cable into the correct connector on the rear panel 3 Connect the HV
48. e first byte can assume values different from zero for few seconds 5 Technical Information PROFIBUS 104 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Each nibble 4 bits in the bytes following the interface status byte represents the status of the last attempt to write a parameter with following coding diag status byte 1 Write success 2 Protocol error checksum error on low speed network 3 Invalid channel 4 Invalid data 5 Invalid channel 6 Range error 7 Format error 8 Write not allowed while HV ON 9 Write not allowed while HV OFF 10 Write allowed only in serial mode The Profibus external diagnosis services are used to report following unexpected situations Controller Fails If the controller switches to fail mode an external diagnostic service is required and one byte in the diagnostic buffer signals the type of failure User Parameter Mismatch If the user sets one or more parameters out of their allowed range a Profibus external diagnostic service is required and some bits in the diagnosis frame signals which parameter is wrong i e over range or under range Technical Information PROFIBUS 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 105 114 Diagnostic Buffer 15 byte Tab 25 Offset Meaning 0 B0 station non exist set by master B1 station not ready slave not ready for data exchange B2 cfg fault configura
49. e structure below but only the RS485 handles the address field Therefore to enable the RS485 you need to select both the type of communication and the device address using the front panel menu or the Navigator software Ion controller 1 Ion controller 2 Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 73 114 The Window Protocol is the same of the Turbo Pump but the meaning of the Window is different see the below chapter Windows Description Communications Format 8 data bit No parity 1 stop bit Baud rate 9600 Communications Protocol The communications protocol is of MASTER SLAVE type where Host MASTER Controller SLAVE The communication takes place as follows 1 The host MASTER sends a MESSAGE CRC to the controller SLAVE 2 The controller answers with an ANSWER CRC to the host 3 The MESSAGE is a string in the following format 4 lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt NOTE When data is indicated between two quotes it implies that the data indicated is the corresponding ASCII character Where lt STX gt Start of transmission 0x02 lt ADDR gt Unit address when you select the RS232 communication this field is not handled and the controller always answers with its address stored in EEPROM lt ADDR gt Unit a
50. ed proceed to do so in compliance with the specific national norms Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale Agilent 4UHV Ion Pump Controller User Manual 47 114 5 Technical Information 4UHV Controller Description 49 Specifications 50 Controller Outline 52 Front Panel Description 53 Keys 53 Rear Panel Description 55 Operating Mode 58 Selecting Operating Mode from Front Panel 58 Selecting Operating Mode via Serial 59 Start Up 60 Connection of Input Remote 70 Serial 71 Connector Examples 72 Window Protocol 72 Error Description 81 Error Code 81 Old Serial Protocol Binary Protocol 84 Original Instructions 5 Technical Information Disposal 48 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Display and Menus 88 Displaying Channel Related Inform
51. ell utilizzo dell apparecchiatura La Agilent declina ogni responsabilit dovuta alla mancata osservanza totale o anche parziale delle istruzioni fornite in questo documento all uso improprio dell apparecchiatura da parte di personale non addestrato all esecuzione di interventi non autorizzati o alla mancata osservanza delle specifiche normative nazionali Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Nel appendice Technical Information vengono fornite delle informazioni dettagliate Questo manuale utilizza le seguenti convenzioni AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE I messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolate dal testo Istruzioni per l uso Immagazzinamento 1 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 9 114 Immagazzinamento Per trasportare e immagazzinare il controller occorre osservare le seguenti condizioni ambientali Temperatura da 20 C a 70 C Umidit relativa da 0 a 95 senza condensa Preparazione per l installazi
52. f the Binary Dual have been implemented The 4UHV controller cannot implement all the commands of the Dual but only a subset Communications Format These protocols have the following formats Tab 14 Type No of Bytes Description Read 1 3Fh3 performs reads on the Splitter Box Status 1 0 30h false off 1 31h true on 5 Integer 5 xxxxx represented in BCD4 with 5 digits always positive BitField 8 Like integer type but meanings are associated with the single bits of the number Exponential 7 x xEsxx where x is BCD digits E is the 45h character and s is the or sign String n Sequence of n characters included within the 20h and 7Fh range 3 The h notation following a number indicates that the number is expressed in hexadecimal format 4 BCD The number is represented by digits included within the 0 and 9 range ASCII 30h 39h 5 Status can also assume values greater than 1 Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 85 114 The commands have a read and a write mode By specifying the type of read operation being performed the Host queries the Splitter Box that in turn replies in a format that is compliant with the command sent As long as a write operation can be carried out the write and read formats for the same command coincide Host to
53. fined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met WARNING CAUTION 4UHV Ion Pump Controller Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 3 114 4UHV Ion Pump Controller 4UHV Ion Pump Controller 4 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Contents Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 5 114 Contents 1 Istruzioni per l uso 7 Informazioni Generali 8 Immagazzinamento 9 Preparazione per l installazione 9 Installazione 10 Uso 12 Manutenzione 16 Smaltimento 16 2 Gebrauchsanleitung 17 Allgemeines 18 Lagerung
54. g Allgemeines 18 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Allgemeines Dieser Apparat ist f r Fachbetriebe bestimmt Vor Gebrauch sollte der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau lesen Bei Nichtbeachtung auch teilweise der enthaltenen Hinweise unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Missachtung der einheimischen hier zur Geltung kommenden Bestimmungen bernimmt die Firma Agilent keinerlei Haftung In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf bestimmte Vorg nge oder Praktiken die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnen VORSICHT Die Vorsichtshinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam dass bei Nichteinhaltung Sch den an der Anlage entstehen k nnen HINWEIS Die HINWEISE enthalten wichtige Informationen die im Text hervorgehoben werden Gebrauchsanleitung Lagerung 2 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 19 114 Lagerung Bei Transport und Lagerung
55. he safety capability furnished using the interlock is lost Refer to the figure below for correct assembly of the interlock cable furnished in the accessories bag in the case in which an HV cable with interlock is not used Figure 3 NOTE The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted The cable interlock closes on pump ground The high voltage is disabled if the connection is interrupted To connect the controller to the pump use a HV cable with interlock see parts that can be ordered Correct connection of masses of the HV cable between the controller and pump and of the interlock cable is illustrated in the Connections figure 4 Instructions for Use Usage 44 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C CAUTION When using the interlock cable furnished in the accessories bag make sure that no parts drop accidentally inside the controller Powering On the Controller from the Front Panel LOCAL Mode NOTE To switch on the High Voltage HV the interlock of the HV cable cable interlock must be closed connector inserted Proceed as follows to power the controller and apply voltage to the high voltage HV connectors Switch off the controller Connect the HV cable and the interlock of the HV cable in the related connectors on the rear panel Select LOCAL mode briefly pressing the MODE key until LOC
56. nstalliert werden soll m ssen alle vier F e abmontiert und ber und unterhalb wenigstens 30 mm 1 2 Zoll Platz gelassen werden VORSICHT In seltenen F llen k nnte der Controller bei St rungen Rauch aussto en Wenn der Controller in sauberen R umlichkeiten verwendet wird muss er mit angebrachten Schutzvorrichtungen versehen werden um zu verhindern dass die R umlichkeiten durch den Rauch verschmutzt werden W hrend des Betriebs m ssen folgende Umgebungsbedingungen eingehalten werden Temperatur 0 C to 40 C Rel Luftfeuchtigkeit 0 90 nicht kondensierend 2 Gebrauchsanleitung Gebrauch 22 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Gebrauch In diesem Kapitel sind die wichtigsten Betriebsvorg nge aufgef hrt F r weitere Hinweise bez glich Anschlu und Montage des bestellbaren Zubeh rs verweisen wir auf das Kapitel Gebrauch im Anhang zu Technical Information Vor Benutzung des Controllers m ssen s mtliche elektrischen Anschl sse ausgef hrt und die Betriebsanleitung der angeschlossenen Pumpe durchlesen werden WARNUNG Schalten Sie die Hochspannungsleitungen erst ein wenn diese mit Hilfe der daf r bestimmten Hochspannungskabel des Interlock Kabels an die Ionenpumpen angeschlossen sind Der Gebrauch des Controllers muss unter Verwendung eines Hochspannungskabels mit Interlock erfolgen Abbildung 2 Erdung 4UHV KABEL PUMPE LEITUNG PUM
57. o the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no greater than Limited Rights as de
58. on If you select Always ON in the menu configuration configure general fan the two cooling fan in the rear panel are always switched ON If you select Threshold the two cooling fan are switched OFF if the output current of each HV channel is below of the 1mA Reset standard settings If yes is selected the settings are restored to the standard unit configuration 5 Technical Information Start Up 66 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Tab 6 Component Description Remote I O Signal Listing Pin 4 24 V 10 max current 60 mA Pin 5 Reserved Fault A unique fault relay for all channels and for all errors Pin 12 NC Fault Relay Pin 13 NO Fault Relay Pin 31 Common Fault Relay Channel 1 Input Pin 6 CH1 on off Pin 7 CH1 protect Pin 8 CH1 step Pin 22 Digital Gnd Analog Output Pin 1 Analog 1 Pin 3 Analog Gnd Digital Output Pin 17 CH1 NC Set point Relay Pin 18 CH1 Common Relay Pin 19 CH1 NO Set point Relay Channel 2 Input Pin 9 CH2 on off Pin 10 CH2 protect Pin 11 CH2 step Pin 22 Digital Gnd Analog Output Pin 2 Analog 2 Technical Information Start Up 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 67 114 Component Description Pin 3 Analog Gnd Digital Output Pin 14 CH2 NC Set point Relay Pin 15 CH2 Common Relay Pin 16 CH2 NO
59. one Il controller viene fornito in un imballo protettivo speciale nel caso in cui si presentassero segni di danni che potrebbero essere stati causati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballo prestare particolare attenzione a non lasciar cadere il controller e a non sottoporlo ad urti Il materiale dell imballo completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Figura 1 Imballo del controller 1 Istruzioni per l uso Installazione 10 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Installazione AVVERTENZA Per la sicurezza dell operatore il controller 4UHV deve essere alimentato con un cavo di alimentazione a 3 fili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensione che si sviluppano nel controller possono provocare gravi lesioni o la morte Dopo lo spegnimento dell unit rimane dell energia residua all interno del controller per un po di tempo Attendere circa 1 minuto per essere sicuri che l energia residua sia stata dissipata ATTENZIONE Il controller pu essere utilizzato sia come unit da tavolo che come modulo installato in un rack In ogni caso deve essere posizionato in modo tale che l aria p
60. one sui connettori di alta tensione H V Spegnere il controller Collegare il cavo HV e l interlock del cavo H V nei relativi connettori sul pannello posteriore Selezionare la modalit LOCAL premendo per breve tempo il tasto MODE fino a quando appare sul display la scritta LOCAL Tenere premuto il pulsante HV ON OFF 2 mentre si preme il pulsante HV x 3 4 5 6 dove x il numero del canale che si vuole accendere o spegnere Istruzioni per l uso Uso 1 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 15 114 Figura 4 Front Panel 4UHV Ion Pump Controller Figura 5 Rear Panel 4UHV Ion Pump Controller Per spegnere i canali HV Tenere premuto il pulsante HV ON OFF 2 mentre si preme il pulsante HV x 3 4 5 6 dove x il numero del canale che si vuole accendere o spegnere Per ulteriori dettagli sull uso del controller e sulla descrizione delle informazioni del display fare riferimento alla sezione Technical Information 2 1 3 4 5 6 1 Istruzioni per l uso Manutenzione 16 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C AVVERTENZA In condizioni di emergenza per spegnere l unit e tutti i canali alta tensione disattivare l interruttore generale 1 posto sul pannello anteriore Mettendo in off l interruttore generale si spegner l unita HV Manutenzione Il controller 4UHV non richied
61. ossa circolare liberamente attraverso i fori di areazione presenti sulla copertura Nel caso in cui il controller viene utilizzato come modulo rack DEVE essere installato in un adattatore alto quattro unit rack per evitare che cada all interno del rack stesso vedere la tabella delle parti ordinabili Il pannello frontale del controller 4UHV non previsto per reggere il peso dell unit Non installare o utilizzare il controller in ambienti esposti ad agenti atmosferici pioggia neve ghiaccio nella presenza di polvere gas corrosivi o in ambienti esplosivi o ad alto rischio di infiammabilit Istruzioni per l uso Installazione 1 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 11 114 ATTENZIONE Il controller 4UHV appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categoria Il controller 4UHV ha dei connettori per gli ingressi uscite e per la comunicazione seriale che devono essere connessi ai circuiti esterni in modo che nessuna parte sotto tensione sia accessibile Assicurarsi che l isolamento del dispositivo connesso al controller 4UHV abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 NOTA Nel caso in cui il controller viene installato in un rack rimuovere i quattro piedini in modo che venga posizion
62. playing Channel Related Information The display can be configured easily to display different information depending on the needs of the customer Information on All Channels The voltage on all the four channels can be displayed simultaneously or the current of all four channels or the pressure To do this press the V I P key the following screens appear cyclically N O L O T E C H V E S N V A R U U A C I A G I M Technical Information Display and Menus 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 89 114 Tab 19 e e l X X 7 d 1 7 0 D i o X X X 5 5 4 t 2 4 0 S 5 5 l X X a r C X X X X 3 5 X X X 5 X X 4 5 Display the pump type for each channel 6 Press V I P 7 Display the pressure for each channel 8 Press V I P 0 7 0 0 e 4 e V V S t F i S t 2 7 0 0 0 1 7 0 0 0 3 7 0 0 0 S V x t V e p p p 9 Display the voltage and operation mode Step Mode Fixed mode for each channel 10 Press V I P A X E X A X X 3 1 E X X X X X X A 2 X E X A 4 X X E X X 11 Display the current for each channel 12 Press V I P 1 Y X X Y Y Y Y Y X X X m b X X m 3 4 X
63. posal 46 Original Instructions 4 Instructions for Use General Information 38 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C General Information This equipment is intended for professional use Prior to using this equipment the user must carefully read this Instruction Manual in its entirety and any additional information provided by Agilent Agilent declines all responsibility for damage caused by the total or partial misuse of the instructions provided herein by the improper use of the equipment by untrained personnel by unauthorized interventions or by negligence in complying with any specific national rule or regulation The following sections provide you with all the information needed to guarantee the operator s safety when using the equipment Detailed information is provided in the appendix entitled Technical Information The following conventions are used in this manual WARNING Warning messages call the operator s attention to a specific procedure or operation that could cause serious injury if not performed correctly CAUTION Caution messages are provided before procedures that could cause damage to the equipment if not complied with NOTE Notes provide you with important information extracted from the text Instructions for Use Storage 4 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 39 114 Storage The following environmen
64. power on Blink slow Gateway operating properly Technical Information PROFIBUS 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 97 114 GSD File The GSD file provided with this interface is AGIL0D32 gsd The ID number is 0D32 hex State Machine From the software point of view the interface can be seen as two devices one for ProfiBus and the other for RS 485 linked together Each device has its own state machine to manage the device operation Power on WAIT_PRM WAIT_CFG DATA_EXCH SRC_ADDR IDENTIFY DATA_EXCH Profibus state machine RS485 state machine Power on Figure 26 5 Technical Information PROFIBUS 98 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Tab 21 PROFIBUS STATE MACHINE RS485 STATE MACHINE Status Meaning Status Meaning POWER_ON Interface set up POWER_ON Interface set up WAIT_PRM Wait for parameterisation from the master SRC_ADDR Search for the controller serial address WAIT_CFG Wait for configuration from the master IDENTIFY Identify controller model and protocol DATA_EXCH Regular data exchange DATA_EXCH Regular data exchange The two machines continuously share I O data with the relative bus and interact each other only in following conditions ProfiBus Data exchange is suspended static diagnosis activated if the RS 485 serial link in not established RS 485 Data exchange
65. rface has two switches The switches are used to set the ProfiBus address of the device Up to 126 different addresses from 0 to 125 can be selected The address value sets by the 2 switches is expressed in hexadecimal notation so value from 00 to 7D are permitted this setting is read by the interface during the power on phase so any change of the switch position after the power on is ignored Indicators Two LEDs are present on the interface one green and one red The red led indicates that the interface is correctly powered 5 Technical Information PROFIBUS 96 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C The green led shows the interface status according the following table 550 ms period 1 pulse 2 pulses Blink fast Blink slow Figure 25 1 pulse ProfiBus link established controller link NOT established yet Controller state machine not in Regular data exchange This situation could be normal in the first seconds after the interface power on Controller address searching phase or after the controller power on 2 pulses ProfiBus link not established yet ProfiBus state machine not in Regular data exchange This failure has priority in the indication over the previous Blink fast Gateway fail internal check or wrong address set address gt 0x7D or address not stable during
66. rough the Menus The 4UHV controller menu has a three level structure To scroll through the menus remaining on the same level press the keys To go to submenu press Enter in the transition menus To escape to go back press Esc at any time In multiple choice menus the symbol appears next to the value currently in use and the value currently used will flash To change the value in each menu press the key or This causes the symbol to move but the old value continues to flash To save the new value you must press Enter As you press Enter the new value is saved and starts to flash If it is not possible for all the choices to be displayed simultaneously the values will scroll across the titles of the menus remain fixed Technical Information Display and Menus 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 93 114 Menu Screens Examples of all the screens that appear in the Menu are provided below Tab 20 Menu Screens First Level Second Level Third Level O L N F I G U R E G E N E R C A H V 1 H V 2 R N F I C O E N E G e s s m B a r u r e T o r r A L P r G C O S e N F I G E G N E R L r i a l B a u d R a 1 2 0 0 4 8 0 0 A t e L e y p E
67. rtes par l utilisation de l interlock Consulter la figure ci dessous pour monter correctement le c ble d interlock contenu dans le sachet d accessoires en cas de non utilisation du c ble de haute tension quip d un interlock Figure 3 NOTE L interlock du c ble est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue L interlock du c ble est serr sur la masse de la pompe Si le branchement est coup la haute tension est interrompue Pour relier le contr leur la pompe utiliser un c ble HV quip d un interlock voir le bordereau de commande des pi ces 3 Mode d emploi Utilisation 34 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Les branchements corrects des masses du c ble HV entre le contr leur et la pompe ainsi que du c ble d interlock sont report s sur la figure Connexions des masses ATTENTION En cas d utilisation du c ble d interlock contenu dans le sachet d accessoires il faut veiller en particulier ce qu aucune pi ce ne tombe l int rieur du contr leur Allumage du Contr leur du Panneau Frontal Modalit LOCAL NOTE Pour allumer la haute tension HV il faut que l interlock du c ble HV c ble interlock soit ferm connecteur branch Proc der comme suit pour alimenter le contr leur et habiliter la tension au niveau des connecteurs de haute tension H V
68. s des milieux expos s aux agents atmosph riques pluie neige glace En pr sence de poussi re de gaz corrosifs ou dans des milieux explosifs ou fort risque d inflammabilit Mode d emploi Installation 3 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 31 114 ATTENTION Le contr leur 4UHV appartient la seconde cat gorie d installation ou surtension pr vue par la norme EN 61010 1 Il est donc n cessaire de brancher le dispositif une ligne d alimentation qui soit adapt e cette cat gorie d appareils Le contr leur 4UHV dispose de connecteurs pour entr es sorties et pour la communication en s rie qui doivent tre branch s des circuits externes de fa on ce qu aucune des parties sous tension ne soitaccessible Veiller ce que le syst me d isolation du dispositif branch au contr leur 4UHV soit adapt m me en cas de pannes individuelles et ce tel que pr vu par la norme EN 61010 1 NOTE Si le contr leur est install dans une armoire enlever les quatre pieds de mani re ce qu il soit plac avec au moins 30 mm d espace en haut et en bas ATTENTION Dans quelques rares cas de panne il est possible que le contr leur d gage de la fum e Si l unit est utilis e dans des environnements propres il est n cessaire de pr voir la mise en place de protections ad quates afin d viter que la fum e ne puisse contaminer la pi ce Pendant le fon
69. sured 9 Ampere 4 floating point Channel 1 Current measured 13 Ampere 4 floating point Channel 2 Current measured 17 Ampere 4 floating point Channel 3 Current measured 21 Ampere 4 floating point Channel 4 Current measured 25 Pressure unit selected 4 floating point Channel 1 Pressure measured 29 Pressure unit selected 4 floating point Channel 2 Pressure measured 33 Pressure unit selected 4 floating point Channel 3 Pressure measured 37 Pressure unit selected 4 floating point Channel 4 Pressure measured Technical Information PROFIBUS 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 103 114 Diagnosis Management In addition to the Profibus six byte standard diagnostic the interface provides both user diagnostic and static diagnostics functions Standard diagnostic The standard diagnostic management is fully compliant with the Profibus specification User diagnostic The first byte in the user diagnostic area reflects the controller serial link status with following meaning Bit 0 controller doesn t respond Bit 2 first loop of requests not ended values in the input data are not fully coherent yet So if the low nibble in the first byte is equal to 0 the interface is working properly Otherwise there is a problem During the start up phase after one interface power on or controller power on th
70. t Voltage To change the output voltage choosing between 7KV 5KV 3KV Step Mode and Fixed Mode keep the Fixed Step key pressed while you press the HV x key where x is the number of the channel for which you want to change the output voltage The output voltage changes cyclically between STEP 7 KV 5 KV 3 KV Menu Keeping the Mode key pressed for a long time gt 2 sec you enter the Menu In the Menu you can configure some parameters of the controller These configurable parameters can be divided into two groups Controller general parameters Specific parameters for each channel The general parameters of the controller are the following Pressure measurement unit mbar torr pascal Serial baud rate 1200 4800 9600 19200 38400 Serial Type RS232 RS485 RS485 Address from 0 to 31 Auto start Yes No Fan Always on switches on if the current descends below 1mA Set Point The set point can be associated with the channels and a value set Analog output Analog output is associated with the channels Reset to standard settings The specific parameters for each channel are the following Pump Select the type of pump I Protect Set the Protect current Power max Set the maximum power 5 Technical Information Display and Menus 92 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Scrolling Th
71. tal conditions must be met when transporting and storing the controller Temperature 20 C to 70 C Relative humidity 0 95 non condensing Prior to Installation The controller comes in a special protective packaging if there is any sign of damage that could have been caused during transportation contact your local sales office immediately When unpacking the controller be particularly careful to avoid dropping it or knocking it against anything The packaging material is totally recyclable and complies with EEC directives 85 399 for the safeguard of the environment Figure 1 Controller Packaging 4 Instructions for Use Installation 40 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Installation WARNING For the safety of the operator the 4UHV controller must be powered with a 3 wire power cable connected to a plug approved at international level Use this cable and plug together with an adequately earthed socket so as to prevent electrical shocks and satisfy the requirements of EC norms The high voltages that develop in the controller can provoke serious injuries or death After switching off the unit residual energy is present inside the controller for some time Wait approx 1 minute to be sure that the residual energy has been dissipated CAUTION The controller can be used either as a desktop unit or as a rack module In any case it must be positioned in a way
72. that the air can circulate freely through the ventilation slots on the cover If the controller is used as a rack module it MUST be inserted into a four rack high adapter to prevent it from falling inside the rack itself see the table of orderable parts The 4UHV controller front panel is not designed to support the weight of the unit Do not install or use the controller in an environment exposed to atmospheric agents rain snow ice in the presence of dust corrosive gases or in a highly flammable or explosive environment Instructions for Use Installation 4 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 41 114 CAUTION The 4UHV controller belongs to the second installation category or overvoltage as provided for in normative EN 61010 1 Therefore the device must be connected to a power supply line satisfying the requirements for this category The 4UHV controller has connectors for inputs outputs and for serial communications that must be connected to the external circuits in such a way that no powered part is accessible Make sure that the insulation of the device connected to the 4UHV controller provides an adequate insulation even in the case of a single fault condition as stipulated in the EN 61010 1 normative NOTE If the controller is installed in a rack remove its four feet and place it so as to leave at least 30 mm 1 2 inches of free space above and below CAUTION In rare circumstances
73. tion data doesn t match B3 ext diag slave has external diagnostic data B4 not supported slave doesn t support requested function B5 invalid slave response slave sets permanent 0 B6 prm fault wrong parameter assignment B7 master_lock slave is parameterised by another master Standard diagnostics 1 B0 prm req slave has to be re parameterised B1 stat diag static diagnosis B2 fixed 1 B3 wd_on response monitoring active B4 Freeze mode received freeze command B5 Synch mode received synch command B6 reserved B7 diag deactivated slave is parameterised by another master 2 Reserved 3 Master Add master address after parameterisation FF without parameter 4 Ident number high 5 Ident number low 6 External diagnosis Header length indication including header 5 Technical Information PROFIBUS 106 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Offset Meaning 7 Interface Status B0 Controller not responds B1 Not used B2 Input data not fully coherent yet B3 Not used B1 7 Not used External diagnostic 8 B7 4 HV1 On Off diagnostic status B3 0 HV2 On Off diagnostic status 9 B7 4 HV3 On Off diagnostic status B3 0 HV4 On Off diagnostic status 10 B7 4 HV1 Protect Mode diagnostic status B3 0 HV2 Protect Mode diagnostic status 11 B7 4 HV3 Protect Mode diagnostic status B3
74. utput curve 80W 5 Technical Information Specifications 52 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Controller Outline The outline dimensions for the 4 UHV controller are shown in the following figures Front View Rear View Figure 8 Controller Model Dimensions 211 40 141 20 177 00 164 30 400 50 Technical Information Specifications 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 53 114 Front Panel Description Figure 9 Front Panel Keys Tab 2 Keys Main Power This is the main switch for switching on and off the controller HV ON OFF To switch a high voltage channel on or off keep the HV ON OFF key pressed while you press the HV x key where x is the number of the channel you want to switch on or off Fixed Step To change the output voltage choosing between 7 kV 5 kV 3 kV Step Mode and Fixed Mode keep the Fixed Step key pressed while you press the HV x key where x is the number of the channel for which you want to change the output voltage The output voltage will change cyclically between STEP 7 kV 5 kV 3 kV Protect To activate or disactivate Protect mode keep the Protect key pressed while you press the HV x key where x is the number of channel for which you want to activate or disactivate the Protect functionality Mode By pressing this key briefly lt 2 sec the operating mode changes cy
75. value assigned to the ADDRESS lt ADDR gt Technical Information Serial 5 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C 75 114 The controller can reply with the following types of response Tab 10 Type Length Value Description Logic After a read instruction of a logic window Numeric 6 bytes After a read instruction of a numeric window Alphanumeric 10 bytes After a read instruction of a alphanumeric window ACK 1 byte 0x6 Execution of the command has been successful NACK 1 byte 0x15 Execution of the command has failed Unknown Window 1 byte 0x32 The window specified in the command is not a valid window Data Type Error 1 byte 0x33 The data type specified in the command Logic Numeric or Alphanumeric is not in agreement with the Window specified Out of Range The value expressed during a write command is not within the range value for the specified window Win Disabled 1 byte 0x35 The window specified is Read Only or is temporarily disabled Tab 11 Windows Description WIN R W Type Description Range 11 R W L HV ON OFF CH1 0 OFF def 1 ON 12 R W L HV ON OFF CH2 0 OFF def 1 ON 13 R W L HV ON OFF CH3 0 OFF def 1 ON 14 R W L HV ON OFF CH4 0 OFF def 1 ON 108 R W N Baud rate 1 4 1200 2400 4800 9600 205 R N Status 206 R N Error code 319 R W Controller Model 323
76. zess zu starten nachdem er die Verkaufsbedingungen gepr ft hat Agilent 4UHV Ion Pump Controller User Manual 27 114 3 Mode d emploi Indications Generales 28 Emmagasinage 29 Preparation pour l Installation 29 Installation 30 Utilisation 32 Allumage du Contr leur du Panneau Frontal Modalit LOCAL 34 Entretien 36 Mise au Rebut 36 Traduction de la mode d emploi originale 3 Mode d emploi Indications Generales 28 114 Agilent 4UHV Ion Pump Controller User Manual 87 900 137 01 C Indications Generales Cet appareillage a t con u en vue d une utilisation professionnelle Il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi que toute autre indication suppl mentaire fournie par Agilent avant l utilisation de l appareillage Agilent d cline par cons quent toute responsabilit en cas d inobservation totale ou partielle des instructions donn es d utilisation incorrecte de la part d un personnel non form d op rations non autoris es ou d un emploi contraire aux r glementations nationales sp cifiques Les paragraphes suivants donnent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Cette notice utilise les signes conventionnels suivants AVERTISSEMENT Les messages

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