UTS User Manual - Newport Corporation
Contents
1. Motor v Displacement gt Direction Direction Displacement Direction QO Be s 6 o o o 9 LE o de Direction In the above drawings Motor signal is referred to Motor signal When the stage moves in Direction the Motor voltage is higher than Motor voltage When the stage moves in Direction the Motor voltage is lower than Motor voltage 7 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages 5 5 Sensor Position Home Position Origin EOR Limit A Mechanical 7 Zero i i Only i E i DC Versions i Index Pulse i a Stage Travel Range Motion gt Direction End of Run and Mechanical Zero are 5 V open collector type The Index Pulse provides a repeatable Home Position at 1 step CAUTION End of Run and Mechanical Zero are active signals and should not be connected to any other source 5 6 Feedback Signal Position for UTS CC Stages 2 3 4 Encoder Phase A ues E Encoder Direction EA o SS Phase A 9 Encoder 95 de Phase B Encoder Phase B Direction Direction Motion gt Direction EDH0220En1040 07 15 The incremental sensor consi2. SUB D15 MALE 9 Y CONNECTOR 4 HOLES 0 30 7 5 9 HOLES M6 THD 98 25 SPACING 157 TO ACCESS CAPTIVE SCREWS DEPTH 39 10 uo gt USED FOR FIXING THE STAGE B UTS50 7 24 184 3 54 90 MODEL SHOWN UTS100PP UTS100 9 21 234 4 53 115 3 07 UTS150 11 18 284 5 51 140 ii 78 1 26 UTS CC amp UTS PP cer i IE i la 141 35 8 MAX i i Slappe trac UA 1 4 17 A gt lt 106 gt BOTTOM VIEW OF THE UTS100CC 4 HOLES M5 THD O 92 4HOLES MATHD C BORED FOR g 239 UT DEPTH 26 7 CAPTIVE SCREWS ON SOR 2 48 63 109 X Y E ra Es ES 51 e 13 O Oe9 A E du gt 2 ER BENE ne 291 62 2 91 74 1 95 is LT pk 7 Y Y 6 O 96 41 12 N ENS BED gt SUB D15 MALE CONNECTOR 4 HOLES 9 30 7 5 323 TO ACCESS CAPTIVE SCREWS 82 i USED FOR MOUNTING ON THE CARRIAGE UTS150PP UTS150CC D Newport 14 EDH0220En1040 07 15 Experience Solutions UTS Series High Performance Precision Translation Stages 8 2 UTS PPV6 Vacuum Compatible Stages 4 HOLES M4 THD C BORED FOR CAPTIVE SCREWS M ON SOR 2 48 63 4 HOLES M4 THD i ON SOR 1
3. UTS Series High Performance Precision Translation Stages C ESD FX ES Compliant OS USER S MANUAL Nevvport Experience Solutions Precision Motion Guaranteed UTS Series High Performance Precision Translation Stages Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used K A EDH0220En1040 07 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from Incorrect usage Load on the stage
4. 2 Motor 2 Phase 2 2 Phase 2 3 Mechanical Zero 3 Mechanical Zero 3 Mechanical Zero 4 End of Run 4 End of Run 4 End of Run 5 OV 5 OV 5 OV 6 Encoder Phase A 6 N C 6 N C 7 Encoder Phase B 7 N C 7 N C 8 Index Pulse I 8 N C 8 N C 9 N C 9 Phase 1 9 Phase 1 10 Motor 10 Phase 2 10 Phase 2 11 End of Run 11 End of Run 11 End of Run 12 5V 12 5 V 12 5 V 13 Encoder Phase A 13 N C 13 N C 14 Encoder Phase B 14 N C 14 N C 15 Index Pulse I 15 N C 15 N C The SUB D25 connection at the end of the cable is given in the following table UTS CC UTS PP UTS PPV6 UE34CC UE34PP UE41PPV6 1 N C 1 Phase 1 1 Phase 1 2 N C 2 N C 2 N C 3 N C 3 Phase 1 3 Phase 1 4 N C 4 N C 4 N C 5 Motor 5 Phase 2 5 Phase 2 6 Motor 6 N C 6 N C 7 Motor 7 Phase 2 7 Phase 2 8 Motor 8 N C 8 N C 9 N C 9 N C 9 N C 10 N C 10 N C 10 N C 11 N C 11 N C 11 N C 12 N C 12 N C 12 N C 13 Mechanical Zero 13 Mechanical Zero 13 Mechanical Zero 14 Shield Ground 14 N C 14 N C 15 Index Pulse I 15 N C 15 N C 16 0 V logic 16 N C 16 N C 17 End of Run 17 End of Run 17 End of Run 18 End of Run 18 End of Run 18 End of Run 19 Encoder Phase A 19 N C 19 N C 20 Encoder Phase B 20 N C 20 N C 21 5V 21 5 V 21 5 V 22 0 V Encoder 22 OV 22 OV 23 Encoder Phase A 23 N C 23 N C 24 Encoder Phase B 24 N C 24 N C 25 Index Pulse I 25 N C 2
5. 34 34 3 54 5 gt lt DEPTH 16 4 lt B eim 90 gt A Y 2 4 09 Fo in a Q Br 254 2 99 413 16 7 ro O L T T Hu o 64 5 105 Ul N UI SUB D15 MALE Y CONNECTOR 4 HOLES 0 30 D 7 5 9 HOLES M6 THD 98 25 SPACING 1 50 TO ACCESS CAPTIVE SCREWS DEPTH 39 10 DT al A B USED FOR FIXING THE STAGE UTSSPPPVO 728084 35200 UTSIO0PPV6 9 21 234 4 53 115 MODEL SHOWN UTS100PPV6 EF um gt _ c S150PPV6 11 18 284 5 51 140 n 124 A o o o o 1 67 42 3 31 5 o o MAX Y o o o o o o o y mm A 12 3 15 4 HOLES M5 THD O 92 4 HOLES M4 THD C BORED FOR MAX DEPTH 26 7 CAPTIVE SCREWS ON SOR 2 48 63 i Qg 9 z 24 ec od on l i ie 06 L d 1 m 4 HOLES 9 30 7 5 TO ACCESS CAPTIVE SCREWS USED FOR MOUNTING ON THE CARRIAGE UTS50PPV6 gt Newport Experience Solutions 15 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages m Accessories 9 1 Top Plate ES SE iLi MEI 4 HOLES C BORED FOR 9 HOLES 1 4 20 THD M4 SCREW ON SQR 1 34 34 1 00 25 4 SPACING T
6. 8 3 meter MSCABLE 3 Cable 0 66 0 3 m Drive 4 1 DC Motor Drive Version Resolution Speed um mm s oo UTS CC 0 1 40 UE34CC D With axial loads greater than 1 kg the maximum speed must be reduced to 20 mm s 4 2 Stepper Motor Drive Versions Micro Step Resolution Speed um mm s oe UTS PP 0 1 20 UE34PP UTS PPV6 0 1 10 UE41PPV6 D When used with Newport motion controllers the motor is driven in a dynamic micro stepping mode software communication In that case the mechanical sensitivity is approx 1 100 of a full step gt Newport EDH0220En1040 07 1 5 6 Experience Solutions UTS Series High Performance Precision Translation Stages mn Motor 5 1 Stepper Motor Characteristics Motor Angle by Step RMS Current per Resistance Inductance Newport C Phase A 2 mH Utilization UE34PP 1 8 0 71 1 7 2 8 Micro step UE41PPV6 1 8 0 85 5 7 11 3 Micro Step 5 2 Command Signals for Stepper Motors Phase 1 Direction Phase 2 Direction Direction Motion gt Direction 5 3 UE34CC Motor Characteristics Moto Nominal Max RMS Max Peak Resistance Inductance Y Voltage V Current A Current A Q mH UE34CC 48 0 9 1 8 2 52 0 51 5 4 Command Signals for the DC Motor gt Newport Experience Solutions Motor v Motor v Motor v
7. read carefully the chapter Connection to electronics before using the UTS stage UTS50PPV6 C Newport Experience Solutions 1 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages n Description Newport s UTS series linear stages provide superior motion performance in an enhanced short and low profile package They use the an optimized body high performance bearings and lead screw and completely motor configurations UTS linear stages are available in two configurations The first version utilizing a DC motor features an ultra high resolution 20 000 cts rev rotary encoder with index pulse for precision homing and is the recommended choice for applications requiring accurate bi directional positioning For tightest position control the rotary encoder is directly mounted on the lead screw This eliminates the majority of drive train error sources that affect other stages with indirect position read out A high torque DC motor provides the highest dynamic speed control and allows for linear speeds up to 40 mm s A 44 16 belt reduction between the motor and the lead screw increases the available output torque reduces the servo sensitivity and ensures 0 3 pm incremental motion capability with all Newport motion controllers and drivers The stepper motor version is a cost effective solution for less demanding applications When used with our XPS ESP301 or SMC100PP controllers with high mic
8. switch off the motor power and then disconnect the electronics from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this stage this may cause an electric shock or lock the drive Do not use this stage if any foreign objects have entered the stage Switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility for repairs WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this stage has been dropped or the case has been damaged switch off the motor power and then disconnect the electronics power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this stage this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics or cause a short circuit D Newport Eserico Suns vii EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages Cautions CAUTION Do not place this stage in a hostile environment such as X Rays hard UV or in any vacuum environment CAUTION Do not place this stage in a location affected by dust oil fumes steam or high humidity This may cause an ele
9. 3 0 2 38 40 51 55
10. 5 N C EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages m Connection to Newport Controllers 6 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not expose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can
11. Newport Experience Solutions Connections WARNING Newport is not responsible for malfunction or damage to a UTS stage when it is used with non Newport controllers WARNING Newport guarantees C compliance of the UTS stages only if they are used with Newport cables and controllers Nevertheless the figure below shows the wiring when a UTS stage is used with non Newport controllers SUB D25M SUB D15F UE34PP amp Connector Connector UE41PPV6 UE34CC 9 d Ay 10 p ag 11 E bg 12 bg E 1 1 Phase 1 N C 2c fi E m 3 ri CR BE 9 Phase 1 N C 4 c3 Merl rg ros S A 114 b X 5 2 Phase 2 Motor 6c 1 EU 014 7 i 10 Phase 2 Motor B LA TET yi 1 Y 4 cm 1 pa sg le j 4 6 c bg i a 3 m gt Al 3 Mechanical Zero Mechanical Zero 9 ji 13 N C Encoder Phase A 23 i i 1 6 N C Encoder Phase A 20 X r r 14 N C Encoder Phase B 24 c L a i7 N C Encoder Phase B 5 c y 15 N C Index Pulse 25 gt 1 8 N C Index Pulse I 7 X d End of Run End of Run Y 8 gt IN 1 4 End of Run End of Run 21 X aV m 1 12 5V 5V 22 x E i 1 5 OV OV Connector ce eee te Ero QUEM Connector Cap Cap 1 The Mechanical Zero logic signal is open collector type It supports until 30 V and 10 mA 2 Open collector type with a 5 6 V protective Zener diode Newpo
12. age please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a stage without prior authorization will void your warranty Calibration CAUTION It is recommended to return your UTS stage to Newport once a year for recalibration to its original specifications D Newport 1 8 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems CY Newport Experience Solutions 19 EDH0220En1040 07 15 NNevvport Experience Solutions Visit Newport Online at WWw newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 3
13. armonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 ORIGINAL DECLARATION Done in Beaune La Rolande on 26 June 2015 Dominique DEVIDAL Quality Director V EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur A The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by th
14. create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts gt Newport EDH0220En1040 07 15 10 Experience Solutions UTS Series High Performance Precision Translation Stages 6 2 Connection On each stage is represented a label which indicates its name and its serial number WARNING Always turn the controller s power OFF before connecting to a stage Stages may be connected to the rear panel motor connectors any time prior to power up with the supplied cable assemblies NOTE These stages are ESP compatible Enhanced System Performance is ESP Newport s exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters This ensures that the user can operate the motion COMPATIBLE system quickly and safely 6 3 Cables Our stages are delivered with a MSCABLE 3 3 meter cable This cable is equipped with a SUB D25M connector so it can be directly connected to our controllers drivers WARNING The MSCABLE 3 cable supplied is not designed for using
15. ctric shock CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 C in its original packaging CAUTION Do not move this stage if its motor power is on Make sure that the cable to the electronics is disconnected before moving the stage Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the stage is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this stage always unplug the equipment from the power source for safety CAUTION When the carriage is in its end of run position it is strongly recommended not to go beyond this point as this may damage the stage mechanism CAUTION Contact your Newport service facility to request cleaning and specification control every year gt Newport EDH0220En1040 07 15 viii Experience Solutions UTS Series High Performance Precision Translation Stages High Performance Precision Translation Stages UTS Series Introduction This manual provides operating instructions for the UTS series translation stages e UTS PP UTS CC e UTS PPV6 D REMARK Vacuum compatible stages to 10 hPa In this case the max speed and load capacity have to be divided by two UTS translation stages RECOMMENDATION We recommend you
16. e user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a residential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user D Newport EDH0220En1040 07 1 5 vi Experience Solutions UTS Series High Performance Precision Translation Stages Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state Stop using the stage immediately switch off the motor power and then disconnect the electronics power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the stage yourself as this can be dangerous WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage Nevertheless if any liquid has entered the stage
17. ection gives a total of 164 points Guaranteed Specifications Guaranteed maximum performance values are verified per Newport s A167 metrology test procedure For more information please consult the metrology tutorial section in the Newport catalog or at www newport com gt Newport EDH0220En1040 07 1 5 4 Experience Solutions UTS Series High Performance Precision Translation Stages gt Newport Experience Solutions 3 2 Mechanical Specifications UTS CC UTSPP UTS PPV6 Travel Range mm 50 100 150 50 100 150 Minimum Incremental Motion um 0 3 0 30 Uni directional Repeatability um 1 1 Bi directional Repeatability um 3 5 or 1 75 60r 3 On Axis Accuracy um 450r 2 25 5 50r 2 75 6 5 or 3 25 5 or 2 5 7 or 3 5 8 or 4 0 Maximum Speed mm s 409 200 Pitch urad 9 750r 37 5 1000r 50 1200r 60 750r 37 5 1000r 50 1200r 60 Yaw urad 9 50 or 25 70 or 35 90 or 45 50 or 25 70 or 35 90 or 45 MTBF h 20 000 with 5 kg load and 3096 duty cycle 0 3 mm with XPS 0 5 mm with SMC100PP or ESP301 21 Shown are peak to peak guaranteed specifications or half the value as sometimes shown For the definition of typical specifications which are about 2X better than the guaranteed values visit www newport com for the Motion Control Metrology Primer 3 With axial loads greater than 1 kg the maximum speed must be reduced to 20 mm s 4 10 mm s for UTS PPV6 4 mm s for UTS PPV6 whe
18. er eie centem tarea Qtr exi beni Petra iia 16 933 Right Angle Brackets oes eer ier e vena 17 10 0 Maintenance 1 ctn 18 TO T Maintenance erect nae ic 18 10 2 R palE d aee tee degeret a indeed e Er E pr e E ae The 18 LOS CalIDEAUIOES atada 18 Service Oriana daa 19 D Newport iv Experience Solutions UTS Series High Performance Precision Translation Stages EC Declaration of Conformity SSR PSO Go ONG A Ie 4 SN NS amp A 6S SS CS SS ES PAS ES SUN amp SYG QU OS QU AS Ie ONG x NAT XXe NA gt Newport Experience Solutions COLONES SIRI LILI UTS Series EC Declaration of Conformity following Annex II 1A of Directive 2006 42 EC on machinery The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage F 91055 Evry FRANCE Hereby declares that the machinery Description UTS Function High Performance Translation stages Models UTS50 100 150 CC PP PPV6 the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 F 45340 Beaune La Rolande France complies with all the relevant provisions of the Directive 2006 42 EC on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility was designed and built in accordance with the following h
19. greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the stage represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the stage or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings D Newport ii Experience Solutions UTS Series High Performance Precision Translation Stages Table of Contents War alas ii EC Declaration Of Conor aid v Definitions and Symbols sit e hn e ease EH EEEH ERREUR ERREUR AE ERE FEES NUS vi WAPI GS TR vii Call Sven vi catseuv M S viii 1 0 Introduction 1 2 0 Description oops addon fi cation pn ead auus 2 2 1 Design Details 1 2 ie ali 3 3 0 Chiaracieristlos coccion ceci 4 3 l Definitions e ERR PERIIT EET EYE 4 3 2 Mechanical Specifications sr 5 3 3 Load Spec
20. he UTS TP top plate is necessary if you need an interface with an imperial hole pattern It must be to ordered separately 9 2 Base Plates METRIC MOUNTING ENGLISH MOUNTING 4 HOLES 9 268 6 8 ON 150 x 100 4 HOLES 9 268 6 8 ON 6 x 2 4 V P A M5THD T SQ 3 62 92 js HOLES Ma THD zj ON 93 62 s E c 4 HOLES M4 CLR EN ES b ON SQ 2 48 63 2 tet See I 6 69 170 The M PBN12 base plate is used with UTS CC and UTS PP stages whereas the M PBN12V6 plate must be used with UTS PPV6 vacuum compatible stages Both versions must be to ordered separately UTS150CC and UTS50C translation stages in XY configuration EDH0220En1040 07 15 16 A Newport ce Solution UTS Series High Performance Precision Translation Stages 9 3 Right Angle Brackets 4 HOLES 28 7 2 4 HOLES C BORED ON SQR 2 01 51 FOR M4 SCREW ON SQR 63 B MODEL SHOWN EQ100 S 3 60 e DIMENSIONS IN INCHES AND MILLIMETERS 81 5 91 97 50 4 25 108 pe 2 87 73 gt G 24 pom o UD o F 4 7 119 4 gt lt 24 6 MODEL A B C EQ100 S 5 31 135 5 14 130 5 4 13 105 EQ100 L 8 46 215 5 67 144 6 85 174 The EQ100 S right angle bracket mounts vertical UTS50 stages to a horizontal UTS The EQ100 SV6 vacuum compat
21. ible version must be used with the UTS50PPV6 stage The EQ100 L right angle bracket mounts vertical UTS100 and UTS150 stages to a horizontal UTS The EQ100 LV6 vacuum compatible version must be used with the UTSI00PPV6 or UTS150PPV6 stage All these versions must be to ordered separately C Newport Experience Solutions 17 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages 10 0 Maintenance 10 1 10 2 10 3 EDH0220En1040 07 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The UTS stage requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The UTS stage must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your UTS stage to Newport s After Sales Service after every 2000 hours of use for lubrication If your stage is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your st
22. ification Definitions 5 3 4 Load Characteristics and Stiffness essere 6 3 5 Stage Weights cccssccsscsscsecssessecsesssecsecsscssecssessecsesssccsecssesteessesseeeeeees 6 40 Drive CENE 6 4 1 DC Motor Drive Version arne cerei n e ee det 6 4 2 Stepper Motor Drive Versions 6 50 Motors dou dd dou 7 5 1 Stepper Motor Characteristics o ooonconccninnnonnonnnonoonconnoonconcno noo nono nonnnnnnnnos 7 5 2 Command Signals for Stepper Motors 7 5 3 UE34CC Motor CharacteristiCs T 5 4 Command Signals for the DC Motor essen 7 5 5 Sensor POSITION ura iet tei toe eee Ye eon ex edt e eee eges 8 5 6 Feedback Signal Position for UTS CC Stages sssssssss 8 bi A nito ED DIE OE RE HEIDE REED HER ERR 9 6 0 Connection to Newport Controlleys 10 6 1 Warnings on Controllers ressens 10 6 2 ComnmectiM viii 11 bid Cable OM RE 11 6 4 MSCABLE 3 Cable inn iia 12 7 0 Connection to Non Newport Electronics 13 Tel Connections arica iii 13 D Newport Experience Solutions iii EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages EDH0220En1040 07 15 8 0 Dimensions 14 8 1 UTS CC and UTS PP Stages ss 14 8 2 UTS PPV6 Vacuum Compatible Stages esse 15 9 0 Accessories seen 16 94 Top Plate sionistas 16 9 2 Base Plates c
23. in a vacuum environment The customer has the responsibility to link the UTS PPV6 stage to the bulkhead coupling with a vacuum compatible cable and connect the cable supplied between the controller and the bulkhead coupling the SUB D15 connector must be removed gt Newport Experience Solutions 1 1 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages 6 4 MSCABLE 3 Cable lt 2 24 57 gt DISCONNECTED LOCKING gt KNOBS Y STAGE SUB D15 CONNECTOR SHOWN DIMENSIONS IN INCHES AND MILLIMETERS BENDING STATIC CABLE gt 94 24 CABLE IN MOTION gt 2 76 70 WARNING This cable is shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable For applications where the standard 3 meter cable MSCABLE 3 included with your stage is not adequate Newport offers a 10 m longer length cable MSCABLE 10 designed to ensure the integrity of your positioning application These cables are specially shielded and terminated with Newport s standard SUB D15 and SUB D25 connectors WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk gt Newport EDH0220En1040 07 1 5 1 2 Experience Solutions UTS Series High Performance Precision Translation Stages El Connection to Non Newport Electronics 7 1 gt
24. n used with SMC100PP 9 To obtain arcsec units divide urad value by 4 8 CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pm 3 3 Load Specification Definitions Normal Load Capacity Cz Maximum load a stage can move while maintaining specifications This value is given with speed and acceleration specified for each stage and with a load perpendicular to bearings UTS CC UTS PP UTS PPV6 Max Speed mm s 40 20 10 Max Acceleration mm s 160 80 40 Axial Load Capacity Cx Maximum load along the direction of the drive train Off Centered Load Q Maximum cantilever load a stage can move Q lt Cz 1 D 50 D Cantilever distance 5 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages 3 4 Load Characteristics and Stiffness UTS CC UTS PP UTS PPV6 Cz Normal centered load capacity N 200 100 Cx Axial load capacity N 50 Cx Inverse axial load capacity N 10 Kax Compliance in roll urad Nm 10 Kay Compliance in pitch urad Nm 15 Kaz Compliance in yaw urad Nm 15 Q Off center load N Q lt Cz 1 D 50 Where D Cantilever distance mm 3 5 Stage Weights Weights indicated into the below table are average values without any cable Weight Ib kg Travel Range mm 50 100 150 UTS CC 6 2 2 8 7 1 3 2 8 2 3 7 UTS PP amp UTS PPV6 6 4 2 9 7 3 3 3 8 4 3
25. parameters Absolute Accuracy Difference between ideal position and real position On Axis Accuracy Difference between ideal position and real position after the compensation of linear errors Linear errors include cosine errors inaccuracy of screw or linear scale pitch angular deviation at the measuring point Abbe error and thermal expansion effects All Newport motion electronics can compensate for linear errors The relation between absolute accuracy and on axis accuracy is as follows Absolute Accuracy On Axis Accuracy Correction Factor x Travel Repeatability Ability of a system to achieve a commanded position over many attempts Reversal Value Hysteresis Difference between actual position values obtained for a given target position when approached from opposite directions Minimum Incremental Motion MIM or Sensitivity The smallest increment of motion a device is capable of delivering consistently and reliably Resolution The smallest increment that a motion device can theoretically move and or detect Resolution is not achievable whereas MIM is the real output of a motion system Yaw Pitch Rotation of carriage around the Z axis Yaw or Y axis Pitch when it moves The testing of on axis accuracy repeatability and reversal error are made systematically with test equipment in an air conditioned room 20 C linear cycle with 21 data points on the travel and 4 cycles in each dir
26. ro stepping capability low noise operation and very small incremental motions are guaranteed The stepper motor versions do not use encoders instead position is attained by the number of commanded steps and micro steps For this purpose the stepper motor is directly attached to the lead screw with a proprietary bellow coupling with high torsion stiffness and no gear or belt drive in between The high output torque of the stepper motor also minimizes the risk of lost steps and provides optimum motion sensitivity with good linearity between commanded micro steps and the actual motion of the stage All UTS series linear stages feature all steel construction with preloaded linear ball bearing slides Steel has an almost 3 times greater stiffness than Aluminum and provides the UTS stages comparable stiffness to the popular ILS series but in a much more compact and significantly lower profile package In addition because the bearings the body the carriage and the lead screw are all made of steel the UTS has a completely homogenized design minimizing thermal stress or thermal bending effects The result is more consistent performance than other Aluminum stage designs Smooth motion is provided by a diamond corrected lead screw and a matched precision lapped nut to ensure high position stability with high vertical load capacity The nut includes anti backlash preloading and a sophisticated decoupling system that prevents lead screw eccentricity e
27. rrors from affecting stage movement For XY configurations of UTS stages use the M CAP MAI captive screws The same screws can also be used for bolting UTS stages directly to custom mounting surfaces access via thru holes at the carriage For mounting UTS stages to optical tables please use the base plate M PBN12 see page 13 gt Newport EDH0220En1040 07 1 5 2 Experience Solutions UTS Series High Performance Precision Translation Stages D Newport Experience Solutions 2 1 Design Details Base Material Stainless steel Bearings Linear ball bearings Drive Mechanism Precision ground backlash compensated leadscrew with decoupling nut Drive Screw Pitch 2 mm Feedback CC Screw mounted rotary encoder PP and PPV6 No feedback Limit Switches Optical Origin Optical at center of travel Drive Type DC Servo Micro Stepper Cable Length 3 m included NOTE RoHS Compliant This product complies with the RoHS directive Restriction of Hazardous Substances EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages m Characteristics 3 1 Definitions Specifications of our products are established in reference to ISO 230 standard part II Determination of accuracy and repeatability of positioning numerically controlled axes This standard gives the definition of position uncertainty which depends on the 3 following
28. rt Newport Stage i Mechanical Zero Stage End of Run lin max 10 mA lin max 16 mA V max 30 V V max 5 6 V If the Mechanical Zero output is not used a 1 k2 0 25 W resistor must be connected cc c UN between pins 13 and 21 RN Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 13 EDH0220En1040 07 15 UTS Series High Performance Precision Translation Stages m Dimensions 8 1 UTS CC and UTS PP Stages 4 HOLES M4 THD C BORED FOR CAPTIVE SCREWS i ON SOR 2 48 63 4 HOLES M4 THD a ON SQR 1 34 34 B A DEPTH 164 lt B ai 92 gt Y 16 A EN 19 7 SO 0 A nan ds Ti C 226 2 99 L SS 4 13 JDD H5 1 G JUNE 57 5 76 E ME nm 105 eo A BT amp n x J Y UN
29. sts of a optical scale and an encoder head When the carriages of the stage move the encoder head generates square signals in quadrature sent to pins 19 20 23 and 24 of the SUB D25 connector Newport User Stage Encoder Phase A Pin 19 Y D Encoder Phase A I Pin 23 Encoder Phase B Pin 20 Le Encoder Phase B n Pin 24 Y Output Signals Index Pulse Phasel Pin 15 gt gt DO 9 gt Index Pulse Phasel Pin 25 Yo Y Y vY Y Y 1 Pin 21 T hs Encoders mA max Pin 422 amp Sensors DT 0v Power Supply Encoder and Index Pulse are differential pair type RS 422 type output signals Using these signals permits a high immunity to noise Emission circuits generally used by Newport are 26LS31 or MC3487 Reception circuits to use are 26LS32 or MC3486 D Newport 8 Experience Solutions UTS Series High Performance Precision Translation Stages 25 e 6X 9 9 oe SiG SO CLOS p O O O O O O O O O O O O GOOG OOO Oi ec f D Newport Experience Soluti ions 5 7 Pinouts The SUB D15 connection for UTS Series translation stages is given in the following table UTS CC UTS PP UTS PPV6 UE34CC UE34PP UE41PPV6 1 N C 1 Phase 1 1 Phase 1
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