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1. 1927 56 162 6 38 3 M5 depth 10 amp 94 2 through 3 M5 depth 3 amp 9 16 through 2 2 1433 a H ya co W U a z ERS SE TI glad LI Z HH A isis s L ft fii SE 258 10 16 02 4 02 9013 54 360 14 17 90 3 54 Deen wni Reception unit IN 70 28 540 21 26 185 7 28 163 6 42 110 4 33 82 3 23 Laser beam 8 zue 7 32 mg regon 32 Suter Mi CH LSM SOSS Sg m a e O 2 Rg gt YA zl j a i ST e 9 8 LS SR ge EE WE i 7 AA 87 3 42 87 3 42 168 5 6 63 1554455 7102 80 gt L les ala 4 348 13 70 M5 depth 10 8 amp 64 2 through M5 depth 3 8 16 through xl Distance between Emission unit and Reception unit 200 to 700mm 8 to 27 11 5 45 273 10 75 x1 163 10 75 G ES Measuring spot 11 43 __ 631248 1 4 kg 0 8 kg 0 8 kg 0 5 kg 63 1 depih 6 3 M5 depth 10 6 12 depth A Bottom View of Emission unit and Reception unit 3 M5 depth 4 Unit mm inch 3 9 3 5LSM 512S 1 Specifications MODEL LSM 512S Order No 544 540 Applicable display unit i LSM 6200 Laser scanning range i mm inch Up to 126 5 07 Measuring range i mm inch 1 to 120 04 to 4 72 R
2. 20017 87 63406412 o ua 2 Measuring spo S 3A S e m 00 324 8 M4 gt SCH ESSE Emission uri Pace Sl FIS SUM 2 sa III ASPA PE E bal a 4 l Lf Sp fi i l i B a Reception uni 350 13 78 250 9 84 170 6 69 600 23 62 110 4 33 MIN 70 2 8 880 34 65 320 12 6 400 15 75 160 6 3 200 7 87 200 7 87 Emission unt La a 8 7 34 40 157 87134 Receplion uni Laser emission LED i El LZ Shutter EAU Van ange CaO SE E ER Lat l kg H ale als O nl 07 E _ ES SEJMIE gt LESBI EJ OTA S Connection cable 100 107 306 12 05 206 8 11 Base z alee ie Gare Z hie n he 3 M6 dep 12 amp 5 Ihr 5 Z PME 3 M6 dep 46 amp 920 thr 3 M6 dep 12 amp 65 Ihr 3 M6 dep 46 amp 6 20 thr x Distance between Emission unit and Reseption unit 400mm to 800mm 15 75 to 31 5 3 46 51 5 35 218 8 58 88 400 15 75 3 136 3 M6 dep 12 200 7 87 3 M6 dep 47 EA ES A 3 M6 dep 12 4 12 0 M6 dep 47 mai opt 93 1 dep 6 LEZ 037 dep 24 Bottom View of Emission and reception unit Unit mm inch Mass e Emission unit 7 6 kg e Reception unit 3 7 kg Base 2 8 kg e Signal cable 0 5 kg No 99MBC094A 3 13 MEMO 3 1 4 No 99MBC094A DESIGNING THE FIXTURES This chapter de
3. 43110 12 250 984 25 984 Measuring spot EA 1 433 111433 S BBC EE gt I SES ala s II TENE JEE Alm A Sib Sy SO 202 7 95 57 2 24 48 1 89 259 10 20 48 1 89 Enission unit Reception unit 42 1 65 MIN 70 2 8 355 13 98 170 6 69 80 3 15 50 1 97 5502 16 Le 8 32 10 40 81332 Laser emission LED user DE ul E fr Shuler Measuring regon Shutter g i gt p NN z LSM SOSS 4 WR Sja Laag SI la GIAT A os m 2 S je EE Ste als j o 65 5 2 58 84 5 3 33 54 5 2 14 a 250 9 84 105 4 13 z al 2 M depih 88 3 3 through 3 M4depth 8 8 s331brough 2 M4depth 0 3 A 6 13 fhrough 3 M4 depth 0 3 amp 4 13 ihrough x Distance between Emission unit and Reception unit 100 to 350mm 4 to 13 15015 130 5 12 x1 o 10 39 7 28 41 1 61 80 3 15 Measuring spot Mass e Emission unit 1 1 kg e Reception unit 0 6 kg Base 0 5 kg e Signal cable 0 5 kg No 99MBC094A 63 1 depth 6 N 3 M depth 8 63 1 depih 6 E 3 M4 depih 8 1 A DM depth 3 6 12 depth 2 3 Bottom View of Emission unit and Reception unit M4 depth 3 Unit mm inch 3 7 3 4LSM 506S 1 Specifications MODEL LSM 506S Order No 544 538 Applicable display unit LSM 6200 Laser scanning range i mm inch Up to 66 2 6 Measuring ra
4. Vertical adjustment a b a Vertical orientation b Horizontal orientation c Laser beam inclination NOTE The laser scanning range is defined by the distance between the emission unit and the reception unit mounted on the standard support base If the distance between the emission unit and the reception unit is greater than standard a slight machining error will be amplified to the extent it disables the proper reception of the scanning beam This should be considered when designing a dedicated fixture 4 S 4 No 99MBC094A 4 DESIGNING THE FIXTURES 4 4 2 Confirming the optical axis with an oscilloscope No 99MCA094A To monitor with an oscilloscope use the two monitor connectors provided on the rear panel of the display unit SCAN SIG 1 and SCAN SIG 2 for measuring unit 1 and measuring unit 2 respectively Oscilloscope setting e Vertical sensitivity 0 1V DIV for a probe of 1 10 e Horizontal sensitivity 50us DIV Among the waveforms shown below a represents the waveform of normal light reception If the light incidence is not normal to the light reception element adjust the mounting position between the emission unit and the reception unit to ensure that the light comes to the center of the light reception element If the protective glass is soiled a waveform such as that shown in b or c will result If this is the case clean the protective glass according to 1 3 2 Cleaning optical parts t
5. CONVENTIONS USED IN USER S MANUAL Various Types of Notes The following types of notes are provided to help the operator obtain reliable measurement data through correct instrument operation IMPORTANT NOTE TIP e An important note is a type of note that provides information essential to the completion ofatask You cannot disregard this note to complete the task e An important note is a type of precaution which if neglected could result in a loss of data decreased accuracy or instrument malfunction failure A note emphasizes or supplements important points of the main text A note supplies information that may only apply in special cases e g Memory limitations equipment configurations or details that apply to specific versions of a program A tip is a type of note that helps the user apply the techniques and procedures described in the text to his or her specific needs It also provides reference information associated with the topic being discussed Mitutoyo assumes no liability to any party for any loss or damage direct or indirect caused by use of this instrument not conforming to this manual Information in this document is subject to change without notice Copyright Mitutoyo Corporation 2005 All right reserved No 99MBC094A NOTES FOR EXPORTING No 99MBC094A Before exporting this product confirm the final purpose of use at the export destination to prevent the product from being used for developing
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7. 005 Selectable Repeatability 1 i um inch 0 11 0000044 2 Linearity inch 1 0 00004 3 1 Narrow Hm 0 8 OT AD eee 3 4 measuring range 000024 000004 AD Positional error 1 5 um inch 1 5 00006 i 10x30 4 x 1 18 Measuring region i mm inch i Optical axis direction x Scanning direction Number of scans for averaging scan 1102048 Class 2 Max Output 1 3mW with a scanning laser semiconductor Laser classification laser wavelength 650nm Number of laser scans i sec 3200 Laser scanning rate i m sec inch sec 226 8898 sec Protection level IP64 Distance between the laser mm inch Standard 130 5 12 emission unit and reception unit Max 350 13 6 0 C to 40 C Operation environment 35 RH to 85 RH without condensation 2000 m or less Storage environment plore 10 992C 35 RH to 85 RH without condensation 1 Environment for accuracy validation 20 C 1 C temperature 50 10 humidity 2 A value of 20 with a 30mm diameter gage has been measured for two minutes with a measurement interval of 0 32 seconds where o is the standard deviation 3 The value of measurements in the center of the measurement region 4 AD is the difference in diameter of the workpiece and the master gage 5 Error due to the positional shift of workpiece in optical axis direction or scanning direction 6 The distance between
8. 3 3 Permissible error for optical axis alignment nenea nene en ne eee en anna en anna naamua 4 3 4 4 Confirming the el TE E 4 4 4 4 1 Confirming with the laser beam mmm mma muwa en eee aaa mean eee aan anna aaa aaa en nana naaaea aaa 4 4 vi No 99MBC094A 4 4 2 Confirming the optical axis with an oscilloscope cu eee eeeeer nea en nenea aaa 4 5 4 5 Measurement with Two Measuring Units mmomue nene ere nene en nenea anna nnne anna nana na aaa az anna nana naaaae 4 6 4 51 n EE 4 6 4 5 2 HEED 4 8 4 6 Radiuse of Cable Bend 2 s sssnn sa ones eee aan za aaa naa m na amm nana aa anna aaa nenea a anna amana aaa nenea 4 11 5 SAFETY PRECCAUTIONS FOR LASER BEAM 2 eemn anna sa aa ona eee anawa aa NENNEN na 5 1 Dzi CAUTION EE 5 1 5 2 Safety Precaution labels located on LSM 500S Series 2 2 nsar onaanaoozanaaaoozaanaacca 5 2 SERVICE NETWORK No 99MBC094A VII MEMO viii No 99MBC094A INTRODUCTION This chapter describes the maintenance and inspecton of the Laser Scan Micrometer LSM measuring unit 1 1 Outline The Laser Scan Micrometer is a high precision laser measuring system that performs non contact dimensional measurements with a high speed scanning laser beam With non contact measurement capability this system features high precision measurement of workpieces that are difficult
9. causing reduced optical clarity So ensure that the work is done in an air conditioned room 1 3 MEMO 1 z 4 No 99MBC094A CALIBRATION The accuracy of the instrument has been verified by two point calibration using two reference gages High precision calibration is possible and simple to perform as mentioned in the User s Manual attached to the display unit Calibrate the instrument properly Types and sizes of the calibration gages are as follows Model LSM 500S LSM 501S LSM 503S LSM 506S LSM 512S LSM 516S LOW CAL 0 1mm b 20mm GAGE 120mm 1mm With holder Straight HIGH CAL GAGE With holder U LM ee cal With holder type Straight type Stepped type No 99MBC094A 2 1 2 1 Calibration Gage 2 1 1 With holder type e The center point of the gage which is indicated by an arrow 5 is the calibration point e Set up the gage on the stand so that the laser beam is aligned with the vertical line marked on the side of the gage holder 2 1 2 Straight type e The center point of the marks of the gage which is indicated by an arrow 5 is the calibration point e Set up the gage on the stand so that the mark on the end face of the gage comes to vertical 2 1 3 Stepped type e The center point of the gage which is indicated by an arrow gt is the calibration point e Set up the gage on the stand so that the mark on the end f
10. na naaee na naaeen ana aaa 1 3 2 CALIBRATION wi i tao ste da cas aa aa becca Daia ui aa bud oi a inoata aa 2 1 21 ele e E 2 2 2 1 1 With holder type eben ed inca ei EE aaa Gcal id i a nai ai d 2 2 2 1 2 Straight type ni yi o nai ca ata SE WE Ca EE 2 2 2 1 3 Stepped type sasz owsa caci ea aaa EES 2 2 3 SPECIFICATIONS OF MEASURING UNIT e e omas aaa manini amazi aa oaza aaa ez anen aan anan aan nara 3 1 3 1 LENS 3 2 KEE 3 4 3 9 EM tege AEN 3 6 3 4 LSM 506 EE 3 8 3 55 EE 3 10 3 6 LSM 5169 ee ta aa a a AWA a a a aa dn n di ua capatai 3 12 d DESIGNING THE FIXTURES irc ie caiac iai cai odc D d Ea a ta dig ta ence Seege EEN 4 1 4 1 Outline e ao cea ae ta wae ede aaa aaa KE DARA cutee wax cute oaia do lat ada ae a adi aa ea 4 1 4 2 Consideration to Calibration mamare eee eee aan nenea anna nenea anna manea nana za anna anna na auwawa 4 1 4 2 1 Measuring position and resulting accuracy n none eee namana uma na nana anna anna nana anna naw 4 1 4 2 2 On measuring gap cc cae eo p i fevers dente gina dude deste ii dna dan ina at dal aa z 4 2 4 3 Optical Axis Alignment esa i ana iat aut aaa aaa adi an ete adw aaa dat anu cat 4 3 4 3 1 Optical axis alignment in horizontal plane 2 2 sseeesssszea nenea eee aan nene naaaee aaa 4 3 4 3 2 Optical axis alignment in vertical plane ce nene eee eee neon nenea eee aan nana naaaen nana 4 3 4
11. the laser emission unit and reception unit other than the standard may affect the accuracy 2 Standard accessories Part No Qt ID unit 7 1 02AGN770A Signal cable 5m 16ft 1 99MBC094A User s manual 1 7 The ID unit stores data unique to the measuring unit A replacement ID unit is available at extra cost 3 Optional accessories Order No Item 02AGD130 Calibration gages set 1mm 630mm 02AGD240 Air blow unit for LSM 503 also available for LSM 503 02AGD270 Workstage for LSM 501 503 902 also available for LSM 503 02AGD490 Adjustable Workstage for L SM 503 also available for LSM 503 02AGN780A B D Extension signal cables 5m 10m 20m 16ft 32ft 64ft 8 10 11 02AGD150A B Extension connecting cables 1m 3m 3 2ft 9 6ft 9 10 1 1 8 The signal cable can be extended up to 30 m 96ft 9 The connecting cable can be extended up to 5 m 16ft 10 The total length of the signal cable and the intermediate cable can be extended up to 32 m 11 The length of the signal cable and the connecting cable other than the standard may affect the accuracy 3 zi 6 No 99MBC094A 4 External dimensions 3 SPECIFICATIONS OF MEASURING UNIT
12. two units Segment 1 5 units Segment 1 5 The reference pin will help reduce the effect of possible fluctuation of the emission unit being subject to a force In a setup without reference pins the fluctuation of the emission unit due to some external force will produce a significant difference between the measurements B and B as shown in c and d below gt A A Difference of A and A Small b Effect of fluctuation of the a Initial state incorporated with eier RE emission unit in a setup reference pins incorporating reference gt B Difference of B and B Large c Initial state without d Effect of fluctuation of the reference pins emission unit in a setup without reference pins 4 m 8 No 99MBC094A 4 DESIGNING THE FIXTURES Size of reference pins The diameter of the reference pin should be such that it can block the laser beam by more than 2 mm and the beam will not cross the pin A pin of about 10 mm diameter would meet such a requirement The setup must also be fairly robust so that the gap between the reference pins will not change O0 _ while in service S Parallelism adjustment Set up two measuring units integrating the emission unit and the reception unit so that the parallelism of the two measuring units can be adjusted First align the optical axis of each measuring unit then adjust the parallelism between the two measuring units If the parallelism adjust
13. 0m 16ft 32ft 8 9 8 The signal cable can be extended up to 20 m 64ft 9 The length of the signal cable other than the standard may affect the accuracy 3 2 No 99MBC094A 3 SPECIFICATIONS OF MEASURING UNIT 4 External dimensions 43 1 depth6 Center of the measuring region 4 M3 depth Emission unit 702 6 min 103 4 06 46 1181 321 26 Cable space 3413 Measuring region Laser_emission LED Laser beam 1 04 2 o GEES _ CO S S Mitutoyo d La N A nsmscog K nl E U iQ m l cio N Sch U 126 4 96 55 2 17 A 1817 13 Center of the measuring region 9003 54 29 5 1 16 e TI S li pa GEN m i DN m 3 M4 depih8 43 1 depth6 on Unit mm inch Mass e Measuring unit 1 0kg e Signal cable 0 5 kg No 99MBC094A 3 3 3 2LSM 501S 1 Specifications MODEL LSM 501S Order No 544 534 Applicable display unit LSM 6200 Laser scanning range i mm inch Up to 19 74 Measuring range i mm inch 0 05 to 10 002 to 4 Resolution umtinch 0 01 to 10 000001 to 0005 Selectable Repeatability 1 __um inch 0 04 0000016 2 A inch 20 5 00002 3 Linearity 0 3 0 1 AD SA 1 RE G
14. 5 90 SEH Reception uni 48 1 89 N 70 28 700 27 56 272 10 71 321 12 64 107 4 21 Laser enigsion LE 190 7 48 13115 16 Laser beam RE Chy thar 91 35 301 2 35 9 EIS Shutter ri Measuring region az SCT rt I d Mitutoyo I E Mtoa gt hs a ES E LSM 5125 E S iR Ei ra S S E EI a s RB ele i o iii ak 4 5 a Jm ele af OJO SR oo ra e cji Signal cable 2 05 96 3 78 263 10 35 137 5 39 52 Connection c S en Peers 462 18 19 238 9 37 Cal 3 M depih 12 4 5 through EI depth 12 8 9S through M depth 46 amp 20ihroughl 3 M6 depih 46 8 4 20 through xt Distance between Emission unit and Reception unit 280 to 700mm 11 to 27 192 7 56 66 2 60 321 12 64 x1 13151 85 2 35 0 7 48 3 M6 dech 17 DONAS 3 M6 depth 12 Mass e Emission unit e Reception unit Base e Signal cable No 99MBC094A 3 6 depth 46 ue WAW M6 depth AN Lm Gite JI SSL UI Ee a a Z Bi 63 1 depih 6 63 1 depth 6 6 12 depth A 6 12 depth A Bottom View of Emission unit and Reception unit Unit mm inch 3 0 kg 1 2 kg 1 8 kg 0 5 kg 3 11 3 6LSM 516S 1 Specifications MODEL LSM 516S Order N
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16. ERE RZY WEP a 3 4 i 000012 000004 AD Positional error 1 5 um inch 0 5 00002 i 2 x 10 08 x 4 Measuring region 0 05 to 0 1 002 to 004 Measuring region mm inch 4 x 10 16 x 4 Measuring region 0 1 to 10 004 to 4 i Optical axis direction x Scanning direction Number of scans for averaging scan 1 to 2048 Class 2 Max Output 1 3mW with a scanning laser semiconductor Haser classification laser wavelength 650nm Number of laser scans i sec 3200 Laser scanning rate i m sec inch sec 113 4449 sec Protection level IP64 Distance between the laser mm inch Standard 68 2 68 emission unit and reception unit Max 100 3 93 6 0 C to 40 C Operation environment 35 RH to 85 RH without condensation 2000 m or less Storage environment LORDS 35 RH to 85 RH without condensation 1 Environment for accuracy validation 20 C 1 C temperature 50 10 humidity 2 A value of 20 with a 10mm diameter gage has been measured for two minutes with a measurement interval of 0 32 seconds where o is the standard deviation 3 The value of measurements in the center of the measurement region 4 AD is the difference in diameter of the workpiece and the master gage 5 Error due to the positional shift of workpiece in optical axis direction or scanning direction 6 The distance between the laser emission unit and reception unit ot
17. No 99MBC094A 1 3 3 Replacing the protective glass and the condenser lens 1 INTRODUCTION Follow the procedures below to remove the protective glass for replacement or cleaning To replace the protective glass first turn off the power switch then disconnect the signal cable for safety Model LSM 501S LSM 503S LSM 506S LSM 512S LSM 516S Removing steps Unscrew the screws that secure the protective glass Bo Remove the protective glass and the rubber packing Boo Remounting steps Remount the protective glass by reversing the steps above NOTE Dust will enter the enclosure if the protective glass is not re installed In a that is free from dust Model LSM 500S humid environment damp air will enter the enclosure causing reduced optical clarity So ensure that the work is done in an air conditioned room Removing steps Remove the protective glass and the condenser lens by rotating them counterclockwise Remove the O ring Remounting steps Attach the O ring cannot be taken Mount the protective glass and the condenser lens in place by rotating them clockwise as shown below If mounted in the wrong order measurement NOTE Dust will enter the enclosure if the protective glass is not re installed In a that is free from dust Protective glass Condenser lens No 99MCA094A humid environment damp air will enter the enclosure
18. No 99MBC094A SERIES No 544 Laser Scan Micrometer Measuring Unit User s Manual ading eference al thoroughly Manu at hand for future r Mitutoyo Read this User s before operating the instrument After re retain it close CONVENTIONS USED IN USER S MANUAL Mitutoyo manuals use various safety signs The visual cues and the contents of description appended to each cue are described below Safety Precautions A DANGER A WARNING A A W No 99MBC094A To ensure that instruments are operated correctly and safely Mitutoyo manuals use safety signs Signal Words and Safety Alert Symbols to identify and warn against hazards and potential accidents The following signs indicate general warnings Indicates an imminently hazardous situation which if not avoided will result in serious injury or death Indicates a potentially hazardous situation which if not avoided could result in serious injury or death Indicates a potentially hazardous situation which if not avoided may result in minor or moderate injury or property damage The following signs indicate specific warnings or prohibited actions or indicate a mandatory action Alerts the user to a specific hazardous situation The given example means Caution risk of electric shock Prohibits a specific action The given example means Do not disassemble Specifies a required action The given example means Ground
19. XTURES 3 Confirming the presence of reflecting light With the segment set to 1 close the shutter of the emission unit on the X axis then check that the reflection light from the Y axis will not be directed into the reception window of the X axis Allow 5 to 10 minutes for this check of the reflecting light as scanning beams from the X axis and the Y axis are asynchronous Under the normal state the Err 0 message will be displayed Perform the same check with the Y axis With the oscilloscope connected to the monitor connector on the rear panel of the display unit it is also possible to check for the presence of the reception signal due to the reflection light For a model with a visible laser beam the reflection light can be checked by placing a piece of paper on the reception window 4 7 4 5 2 DF type In a DF type setup shown below a workpiece of a larger diameter can be measured by measuring the gap between two measuring units 1 and 2 and referring to the predetermined offset value of the reference gage 1 Improvement of the measurement accuracy To ensure better measuring accuracy of gap measurement use reference pins or knife edges as located at the focal point Reference pins Measyf g i 1 Measuring un unit 2 CR o N 5 Measuring Measuring unit 1 unit 1 GC a Example of setup for stack of two b Example of setup for facing of
20. ace of the gage comes to vertical T U E With holder type Straight type Stepped type 2 2 No 99MBC094A SPECIFICATIONS OF MEASURING UNIT This chapter gives the specifications of the following models No 99MBC094A Model Measuring range Code No LSM 500S o 0 005mm to b 2mm 544 532 LSM 501S 0 05mmto 610mm 544 534 LSM 503S 0 3mmto 630mm 544 536 LSM 506S A mmto 660mm 544 538 LSM 512S immto 120mm 544 540 LSM 516S mmto 160mm 544 542 3 1LSM 500S 1 Specifications MODEL LSM 500S Order No 544 532 Applicable display unit LSM 6200 Laser scanning range mm inch A Up to 12 5449 Detecting regions is limited to about 10 mm 4 approx l i 0 005 to 2 0002 to 08 Measuring range mm inch 0 1 to 2 004 to 08 1 Resolution i um inch 0 01 to 10 000001 to 0005 Selectable Repeatability 2 um inch 0 03 0000012 3 Linearity 2 um inch 0 3 000012 4 Positional error 2 5 f um inch 0 4 000016 i i 1 x 2 04 x 08 Measuring region MECH Optical axis Akai x U direction Number of scans for averaging i scan 16 to 2048 6 Class 2 Max Output 1 3mW with a scanning laser semiconductor laser Laser classification wavelength 650nm Number of laser scans sec 3200 Laser scanning rate m sec inch sec 76 2992 sec Protection level IP64 0 C to 40 C Op
21. ce line D A Al 4 3 3 Permissible error for optical axis alignment Reference line C Refer nce line D Model Distance EEN untang For both X and Y For both 6x and 6y Reception unit 68mm or less 0 5 mm within 0 4 7mrad within LSM 501S 100mm or less 0 5 mm within 0 3 5 2mrad within 130mm or less 1 mm within 0 4 7mrad within LSM 503S 350mm or less 1 mm within 0 16 2 8mrad within 273mm or less 1 mm within 0 2 3 5mrad within LSM 506S 700mm or less 1 mm within 0 08 1 4mrad within 321mm or less 1 mm within 0 18 3 6mrad within LSM 512S 700mm or less 1 mm within 0 08 1 4mrad within LSM 516S 800mm or less 1 mm within 0 05 0 9mrad within No 99MCA094A 4 z 3 4 4 Confirming the Optical Axis The optical axis of a measuring unit can be confirmed by the following methods 4 4 1 Confirming with the laser beam PLO CORIO DES NOW As shown on the right the red laser beam is visible on a a piece of white paper placed on the reception window Adjust it so that the incidence of the laser beam is in the center of the reception window The incidence should be in the center horizontally and at BA the position where a is equal to b vertically Make A adjustments to reduce such deviations as shown in the figures below where a is the vertical deviation b is the horizontal deviation c is the inclination of the laser beam
22. e in optical axis direction or scanning direction 6 The distance between the laser emission unit and reception unit other than the standard may affect the accuracy 2 Standard accessories Part No Qt ID uni 7 1 02AGN770A Signal cable 5m 16ft 1 99MBC094A User s manual 1 7 The ID unit stores data unique to the measuring unit A replacement ID unit is available at extra cost 3 Optional accessories Order No Item 02AGD150 Calibration gages set 61mm 120mm 02AGD260 Air blow unit for LSM 512 also available for LSM 512 02AGN780A B D Extension signal cables 5m 10m 20m 16ft 32ft 64ft 8 10 11 02AGD150A B Extension connecting cables 1m 3m 3 2ft 9 6ft 9 10 11 8 The signal cable can be extended up to 30 m 96ft 9 The connecting cable can be extended up to 5 m 16ft 10 The total length of the signal cable and the intermediate cable can be extended up to 32 m 11 The length of the signal cable and the connecting cable other than the standard may affect the accuracy 3 1 0 No 99MBC094A 4 External di 3 SPECIFICATIONS OF MEASURING UNIT mensions 100 3 937 100 3 937 63 1 9 12 a Measuring spol 50 1 969 8 M4 MN m AF u 4 rsi a REF se S a IM LI e z alo 7 Ge F 318 Ze 312 12 28 88 3 46 E 28 ZE 400 15 75 150
23. egion 4 AD is the difference in diameter of the workpiece and the master gage 5 Error due to the positional shift of workpiece in optical axis direction or scanning direction 6 The distance between the laser emission unit and reception unit other than the standard may affect the accuracy 2 Standard accessories Part No Qt ID uni 7 1 02AGN770A Signal cable 5m 16ft 1 99MBC094A User s manual 1 7 The ID unit stores data unique to the measuring unit A replacement ID unit is available at extra cost 3 Optional accessories Order No Item 02AGM300 Calibration gages set for LSM 516H 02AGN780A B D Extension signal cables 5m 10m 20m 16ft 32ft 64ft 8 10 11 02AGC150A B Extension connecting cables 1m 3m 3 2ft 9 6ft 9 10 11 8 The signal cable can be extended up to 30 m 96ft 9 The connecting cable can be extended up to 5 m 16ft 10 The total length of the signal cable and the intermediate cable can be extended up to 32 m 102ft 11 The length of the signal cable and the connecting cable other than the standard may affect the accuracy 3 1 2 No 99MBC094A 4 External dimensions 3 SPECIFICATIONS OF MEASURING UNIT
24. eration environment 35 RH to 85 RH without condensation Altitude 2000 m or less 15 C to 55 C Storage environment E S Humidity 35 RH to 85 RH without condensation 1 Measuring range available when set to No extra fine wire measurement or Edge specification in the basic setup mode 2 Environment for accuracy validation 20 C 1 C temperature 50 10 humidity 3 The value of 20 with a 2mm diameter gage has been measured for two minutes with a measurement interval of 0 32 seconds where o is the standard deviation 4 The value of measurements in the center of the measurement region 5 Error due to the positional shift of the workpiece in the optical axis direction or scanning direction 6 Averaging scans between 1 and 8 times can be made if No extra fine wire measurement is specified in the basic setup mode The measuring range however is limited to 0 1 mm to 2 mm in this case 2 Standard accessories Part No Qt ID unit 7 1 02AGN770A Signal cable 5m 16ft 1 99MBC094A User s manual 1 7 The ID unit stores data unique to the measuring unit A replacement ID unit is available at extra cost 3 Optional accessories Order No Item 02AGD110 Calibration gages set 60 1mm 2mm 02AGD200 Guide pulley unit for LSM 500H also available for LSM 500 02AGD220 Air blow unit for LSM 500H also available for LSM 500 02AGN780A B Extension signal cables 5m 1
25. esolution i um inch 0 1 to 100 000005 to 005 Selectable Repeatability 1 i umf inch 0 85 000033 2 i Whole range 7 um inch 6 0 00024 3 Linearity Narrow measuring m 4 0 0 5 AD 1 W Fe a 4 0 0 5 AD EE 3 4 range i 00016 00002 AD Positional error 1 5 um inch 8 0 0003 Measuring region mm inch EE i Optical axis direction x Scanning direction Number of scans for averaging i scan 1 to 2048 Class 2 Max Output 1 3mW with a scanning laser semiconductor Laser classification laser wavelength 650nm Number of laser scans i sec 3200 Laser scanning rate i m sec inch sec 904 35590 sec Protection level IP64 Distance between the laser mm inch Standard 321 12 64 emission unit and reception unit Max 700 27 6 0 C to 40 C Operation environment Humidity 35 RH to 85 RH without condensation Altitude 2000 m or less Storage environment E Humidity 35 RH to 85 RH without condensation 1 Environment for accuracy validation 20 C 1 C temperature 50 10 humidity 2 A value of 20 with a 120mm diameter gage has been measured for two minutes with a measurement interval of 0 32 seconds where o is the standard deviation 3 The value of measurements in the center of the measurement region 4 AD is the difference in diameter of the workpiece and the master gage 5 Error due to the positional shift of workpiec
26. for conventional measuring systems to measure including hot workpieces brittle or elastic workpieces workpieces that must be kept free from contamination and soft workpieces subject to the measuring force 1 2 Introduction This measuring unit is used with the display unit of the LSM 6200 Since this User s Manual primarily describes the specifications of the measuring unit please refer to the User s Manual of the LSM 6200 for details about connection with a display unit functions and measurement procedures The measuring unit is provided with a shutter or cap on the emission unit and reception unit Laser equipment has such safety precautions During measurement Open the shutter by sliding it as shown in the below left diagram of fig a or remove the lens cap as shown in the below left diagram of fig b During no measurement Close the shutter by sliding it as shown in the below right diagram of fig a or mount the lens cap as shown in the below right diagram of fig b Laser beam window Laser beam window Lens cap Shutter window RARE Open Close Open Close a LSM 501S 503S 506S 512S 516S b LSM 500S No 99MBC094A 1 1 1 3 Inspection and Maintenance This section describes the inspection and maintenance procedures of the measuring unit 1 3 1 Laser emission display LED The Laser Emission Display LED that is provided on the rear side lights while the laser is being emitted to call the operator s atte
27. her than the standard may affect the accuracy 2 Standard accessories Part No Qt ID unit 7 1 02AGN770A Signal cable 5m 16ft 1 99MBC094A User s manual 1 7 The ID unit stores data unique to the measuring unit A replacement ID unit is available at extra cost 3 Optional accessories Order No Item 02AGD120 Calibration gages set 0 1mm 610mm 02AGD210 Guide pulley unit for LSM 501H also available for LSM 501 02AGD230 Air blow unit for LSM 501H also available for LSM 501 02AGD270 Workstage for LSM 501 503 902 also available for LSM 501 02AGD400 Adjustable Workstage for L SM 501 also available for LSM 501 02AGN780A B Extension signal cables 5m 10m 16ft 32ft 8 10 02AGD150 A Extension connecting cables 1m 3 2ft 9 10 8 The signal cable can be extended up to 20 m 64ft 9 The connecting cable can be extended up to 2 m 6 4ft 10 The length of the signal cable and the connecting cable other than the standard may affect the accuracy 3 4 No 99MBC094A 4 External dimensions 3 SPECIFICATIONS OF MEASURING UNIT li 251 984 250984 t1 dep MI T 33 Center of the sch E Se aS measur
28. ing region MIN 6 23 ele N 8 M3 She R S ai t aT E em in O se PNY SA Jon SLI EE BEE Z kt pi Emission unit jt s A gt Reception unit 40 1 57 150 5 91 401 57 ra lt gt 70 2 8 min 230 9 06 Cable space 23 4 84 68 2 68 39154 4001 57 Lt 5242 05 Measuring regon Laser emission LED z s Shutter 4116 gt A wen E j an SEH m 2 LSM 505 1 S a a S glala gt I S ay 1S e a LA d gt a deht EE SIE EADS Base 45716 18 732 87 S f ele l Reception unit Connecting cable Emission unit x1 Distance between Emission unit and Reception unit 26 5 6682 68 45 x1 48 118 34 34 30 65mm to 100mm 2 6 to 4 3 M4 depths 20974 9 Sew eception unit Cable length 0 6m 19f4 Mounting dime Mass e Emission unit 0 7 kg Reception unit 0 4 kg e Base 0 3 kg e Signal cable 0 5 kg No 99MBC094A 3 1 depth 63 1 depth6 374 GF n lox de iter of the measuring region isions for separate use Bottom view Unit mm inch 3 5 3 3LSM 503S 1 Specifications MODEL LSM 503S Order No 544 536 Applicable display unit LSM 6200 Laser scanning range i mm inch Up to 34 1 3 Measuring range mm inch 0 3 to 30 012 to 1 18 Resolution i um inch 0 02 to 100 000001 to
29. ing unit and electronic components in the display unit Install the LSM in a place that is as free as possible from dust grit Direct sunlight If this instrument is exposed to direct sunlight the heat may deform the instrument and adversely affect the measuring accuracy If this instrument must be placed by a window where it will be subject to direct sunlight protect the instrument by shading it with curtains etc Blow from the air conditioner If the measuring place is exposed to hot or cool air blow from the air conditioner the laser beam may be refracted due to the difference in air density and adversely affect the measuring accuracy If this is the case block direct air flow with curtains etc Ambient temperature and humidity Avoid installing this instrument in an environment where there is rapid temperature or humidity change Otherwise it may reduce measuring accuracy This instrument must be operated in the following ambient conditions Temperature 0 C to 40 C Humidity 35 RH to 85 RH No 99MBC094A WARRANTY This instrument has been manufactured under rigorous Mitutoyo quality control Should it malfunction under normal use within one year from the date of original purchase it will be repaired or replaced at our option free of charge Contact your dealer or the nearest Mitutoyo representative for more information However the following damages may be subject to a repair charge even if damage occurs within the war
30. l is to noise and light disturbance resulting in degraded repeatability Thus due attention should be paid to ensure that the workpiece is located at the measuring position Measuring region Measuring position that is focal point Reception unit side Emission unit side Inclination of the reception a b c No 99MBC094A 4 1 4 2 2 On measuring gap 4 2 For measuring segment 1 as in the case of measuring the runout be sure to arrange a reference pin or knife edge at the focal point as shown on the right The inclination of the reception signal becomes large resulting in degraded repeatability unless the reference pin is provided Reference pin or knife edge Segment 1 t No 99MBC094A 4 DESIGNING THE FIXTURES 4 3 Optical Axis Alignment The optical axis of each measuring unit should be aligned to within the limits shown below 4 3 1 Optical axis alignment in horizontal plane a Parallel deviation in reference lines C and D b Angular deviation in reference lines C and D by X in width direction by 0x in angle Reference line C Reference line D Reference line C Reference line D eet eo aa A 6 o Wa th yA o 0x o X 4 3 2 Optical axis alignment in vertical plane c Parallel deviation in reference planes A and d Angular deviation in reference planes A and B by Y in height B by 6y in angle Reference line C Referen
31. ment is inadequate errors will generate when the workpiece is shifted in the optical axis direction The degree of accuracy to which the adjustment should be made depends on user requirements For reference three example accuracy ranges are given below a Should be 20 to 50 um with the gage shifted within 50 mm from the measuring point b Should be 5 to 10 um with the gage shifted within 10 mm from the measuring point c Should be 5 to 10 um with the gage shifted within 5 mm from the measuring point Generally the larger the amount of shift of the gage the easier will be the adjustment The most appropriate size of the gage would be the median value of the measuring range Measuring position Emission unit Reception unit Emission unit Reception unit No 99MCA094A 4 9 Set the measuring units the support bases EFR a LQ p 5 facing one another with 4 10 3 Precautions for transparent object measurement To measure a larger diameter transparent glass rod the external diameter of a plastic object or the width of a transparent sheet arrange the measuring units with the support bases fitted so the scanning laser beams are opposing one another and set the segment to 1 5 If the laser scanning direction of each unit is reversed to the direction shown below measurement will be disabled Emission unit U Measuring unit 2 Scanning l direction Recepti
32. nge mm inch 1 to 60 04 to 2 36 Resolution i um inch 0 05 to 100 000002 to 005 Selectable Repeatability 1 um inch 0 36 000014 2 Li 3 0 00012 3 Ea 1 5 0 5AD Seen 1 Se ARE STOS E WWE 3 4 i 00006 00002 AD Positional error 1 5 i um inch 4 0 00016 Measuring region mm inch 20 x 60 8 x 2 36 Optical axis direction x Scanning direction Number of scans for averaging i scan 1t02048 Class 2 Max Output 1 3mW with a scanning laser semiconductor Laser classification laser wavelength 650nm Number of laser scans Jeer 3200 Laser scanning rate m sec inch sec 452 17795 sec Protection level IP64 Distance between the laser Standard 273 10 75 emission unit and reception unit Max 700 27 6 0 C to 40 C Operation environment 35 RH to 85 RH without condensation 2000 m or less i 15 C to 55 C orade CARE 35 RH to 85 RH without condensation 1 Environment for accuracy validation 20 C 1 C temperature 50 10 humidity 2 A value of 20 with a 60mm diameter gage has been measured for two minutes with a measurement interval of 0 32 seconds where o is the standard deviation 3 The value of measurements in the center of the measurement region 4 AD is the difference in diameter of the workpiece and the master gage 5 Error due to the positional shift of workpiece in optical axis direction or
33. ntion for safety Do not look the laser beam Laser emission display LED Ta 5 1 3 2 Cleaning optical parts To clean the optical parts turn off the power switch and disconnect the signal cable for safety Always keep the protective glass of the emission unit and reception unit clean Soiled protective glass will not only result in reduced measurement accuracy but possibly produce erroneous measurements due to dust and foreign particles being treated as part of the workpiece For cleaning use a blower brush or use gauze slightly dampened with ethyl alcohol to gently wipe clean soiled portions using very light pressure e Checking the contamination of the protective glass using an oscilloscope A monitor connector SCAN SIG 1 of the reception light signal is provided on the rear panel of the display unit Check the reception light signal by connecting the probe of the oscilloscope with the monitor connector Oscilloscope setup is as follows e Vertical sensitivity 0 1V DIV with a probe of 10 1 e Horizontal sensitivity 100 us DIV JU TL a Normal b Soiled glass c Soiled glass If the waveform generated by the oscilloscope looks like either of the ones shown in b or c clean the protective glass to reduce the disorder of waveform to less than 0 3V NOTE The protective glass of the windows is a precision optical part Handle with care so as not to scratch the glass 1 2
34. o 544 542 Applicable display unit i LSM 6200 Laser scanning range i mm inch Up to 170 6 7 Measuring range i mm inch 1 to 160 04 to 6 3 Resolution i um inch 0 1 to 100 000005 to 005 Selectable Repeatability 1 um inch 1 4 000055 2 ari Whole range um inch 7 0 00028 3 HU range ii 00016 000079 AD Positional error 1 5 um inch 8 0 0003 i 40 x 160 1 57 x 6 3 i Optical axis direction x Scanning direction Number of scans for averaging i scan 1 to 2048 Class 2 Max Output 1 3mW with a scanning laser semiconductor laser wavelength 650nm Narrow measuring um 4 0 2 0 AD 3 4 Measuring region mm inch Laser classification Number of laser scans i sec 3200 Laser scanning rate i m sec inch sec 1206 47480 sec Protection level IP64 Distance between the laser mm inch Standard 400 15 74 emission unit and reception unit Max 800 32 72 6 0 C to 40 C Operation environment Humidity 35 RH to 85 RH without condensation Altitude 2000 m or less Storage environment E 35 RH to 85 RH without condensation 1 Environment for accuracy validation 20 C 1 C temperature 50 10 humidity 2 A value of 20 with a 160mm diameter gage has been measured for two minutes with a measurement interval of 0 32 seconds where o is the standard deviation 3 The value of measurements in the center of the measurement r
35. o 99MBC094A SAFETY PRECAUTIONS FOR LASER BEAM The LSM 500S series uses a low powered visible laser beam which has been designed for safe operation However observe the following points when setting up and operating 10 11 12 This measuring unit conforms to IEC 60825 1 the safety code for lasers This code was established in January 2001 This unit is a Class 2 laser product as defined by IEC code Maximum output power 1 3 mW semiconductor laser with a wavelength of 650 nm IEC International Electrotechnical Commission defines IEC 60825 1 as an international standard This unit satisfies EN 60825 1 Europe FDA CDRH Laser Notice No 50 America and JIS C 6802 Japan corresponding to this standard Safety precaution labels are described on page 5 2 Do not remove the safety precaution labels on the unit Do not look directly into the laser beam Never look into the emission window even when the laser seems to be inactive Do not observe the laser beam directly through an opiical instrument such as a magnifying lens When measuring flat objects with a mirror finish do not look at the reflection on the surface If measuring a workpiece with reflective parts avoid fixing your eyes on the measured surface Close the beam shutter when the measuring unit is not in use The laser beam doesn t harm human skin when irradiating CAUTION Use of controls or adjustments or performance of procedures other
36. o reduce the disorder of the waveform to less than 0 3V FU TL a Normal b Glass contaminated c Glass contaminated 4 5 4 5 Measurement with Two Measuring Units 4 5 1 4 6 To perform dual measurement with a combination of two measuring units each measuring unit must have been optically aligned Refer to 4 3 Optical Axis Alignment for more information Also note that the appropriate considerations must be taken into account according to the type of dual measurement DXY type or DF type DXY type If a workpiece with a high reflection coefficient is measured with two measuring units being completely crossed in a DXY type setup the scanning beam from one measuring unit will be reflected into the reception window of the other measuring unit reducing the measuring accuracy An arrangement is required in such a case so that the light from one measuring unit will not be reflected from the workpiece into the reception window of the counterpart measuring unit 1 Arrangement to provide a step As shown on the right arrange a step of L between the X axis and the Y axis The step L should not be smaller than 10 mm 2 Arrangement to provide an angle As shown on the right arrange an angle 0 between the X axis and the Y axis The angle 8 should not be smaller than 15 degrees or 0 25 radians Light from the Y axis reflected to the X axis No 99MBC094A No 99MCA094A 4 DESIGNING THE FI
37. o Scandinavia A B Box 712 Slantvagen 6 194 27 Upplands Vasby SWEDEN TEL 07 6092135 FAX 07 6092410 Mitutoyo Belgium N V Hogenakkerhoekstraat 8 9150 Kruibeke BELGIUM TEL 03 254 04 04 FAX 03 254 04 05 Mitutoyo France S A R L 123 rue de la Belle Etoile B P 50267 Z Paris Nord Il 95957 Roissy CDG Cedex FRANCE TEL 01 49 38 35 00 FAX 01 49 38 35 35 Mitutoyo France S A R L Agence de Lyon TEL 04 78 26 98 07 FAX 04 72 37 16 23 Mitutoyo France S A R L Agence de Strasbourg TEL 03 88 67 8577 FAX 03 88 67 85 79 Mitutoyo Italiana S R L Corso Europa No 7 20020 Lainate Milano ITALY TEL 02 935781 FAX 02 9373290 Mitutoyo Schweiz AG Steinackerstrasse 35 8902 Urdorf ZUrich SWITZERLAND TEL 01 7361150 FAX 01 7361151 Mitutoyo U K Ltd Joule Road West Point Business Park Andover Hampshire SP10 3UX UNITED KINGDOM TEL 01264 353123 FAX 01264 354883 Mitutoyo Asia Pacific Pte Ltd Regional Headquarters 24 Kallang Avenue Mitutoyo Building SINGAPORE 339415 TEL 6294 2211 FAX 6299 6666 Mitutoyo Malaysia Sdn Bhd Mah Sing Integrated Industrial Park 4 Jalan Utarid U5 14 Section U5 40150 Shah Alam Selangor Darul Ehsan MALAYSIA TEL 60 3 78459318 FAX 60 3 78459346 Mitutoyo Thailand Co Ltd No 668 3 Moo7 Chaengwattana Rd Anusaowaree Bangkaen Bangkok 10220 THAILAND TEL 02 521 6130 to5 FAX 02 521 6136 Representative Office Indonesia TEL 62 21 837 93765 FAX 62 21 837 93
38. on unit N re 5 JE Measuring unit 1 L ZN al 1 O Ta o If two measuring units are set up with the support bases facing one another a step L will be produced between the Scanning direction two units through inconformity of the optical axis of the two units as shown at the right The step values according to model are listed below Model Step L LSM 501S 10mm LSM 503S 10mm LSM 506S 10mm LSM 512S 22mm LSM 516S 33mm Side view Measuring unit 2 side Optical axis Measuring unit 1 side a No 99MBC094A 4 6 Radius of Cable Bend 4 DESIGNING THE FIXTURES The signal cables and the connecting cable will break if bent to an excessively small radius Allow sufficient space for bending cables according to the figures below Cable space more than 70 2 8 i So Cable space more than 80 3 2 a Signal cable HH NE R20 79 R a or more N ZA R10 47 Signal cable Eech or more Connecting cable Measuring unit E Ba AZ R20 79 or more Display unit Unit mm inch Supplied cables are not robot cables which have superior flexibility in bending Special NOTE cables with a high flexibility will be available at extra cost Contact a Mitutoyo sales office No 99MCA094A 4 11 MEMO No 99MBC094A 5 1 Caution A CAUTION N
39. ranty period 1 Unit malfunction or damage arising from improper handling or unauthorized retrofit or repair by the user 2 Unit malfunction or damage as the result of moving dropping or transporiing after purchase 3 Unit malfunction or damage due to fire salt gas abnormal voltage or natural catastrophe This warranty is not transferable and is only valid within the country of the original purchase No 99MBCO94A V CONTENTS CONVENTIONS USED IN USER S MANUAL mwa nene eee neoane ema ana nea ana awe nana aa aa aaa a a nana mana NEE manea aaa i NOTES FOR EXPORTING ze cez atac ca ada aaa a aia eta a acu ai aaa aa au Zepi aa ara iii INSTALLATION CONDITIONS sm eee mea eee ema eee aka awa anna REENEN mea aaa aaa mean aaa aaa waza aaa amana aaa mea aaa iv WARRANTY Goss wo ii O ZONA Z EE EE v 1 INTRODUCTION mianzi aici ca ad atat d atata ada ai da sa aaa a 30 da aia ai cata 1 1 US W e dE 1 1 1 2 introduch nz ec a cca aaa UWAN aa it daia a ot EA ua da alto aa 1 1 1 3 Inspection and Maintenance mme nene eee naamin anakaa anakaa anakaa AKA Aaaa AANIKA nana nana aan zwan wzw nana 1 2 1 3 1 Laser emission display LED c ceeace eee eee nene ne nenea nana anna nana anna nana az znana aa az z anna 1 2 1 3 2 Cleaning optical parts mmm nene ee eee eee nenea anna nea nana anna aaa a az za ana nana aaa az aaa 1 2 1 3 3 Replacement of protection glass neuen nene ere nene nana nana nana
40. scanning direction 6 The distance between the laser emission unit and reception unit other than the standard may affect the accuracy 2 Standard accessories Part No Qt ID unit 7 1 02AGN770A Signal cable 5m 16ft 1 99MBC094A User s manual 1 7 The ID unit stores data unique to the measuring unit A replacement ID unit is available at extra cost 3 Optional accessories Order No Item 02AGD140 Calibration gages set 61mm 660mm 02AGD250 Air blow unit for LSM 506 also available for LSM 506 02AGD520 Adjustable Workstage for L SM 506 also available for LSM 506 02AGN780A B D Extension signal cables 5m 10m 20m 16ft 32f 64ft 8 10 11 02AGD150A B Extension connecting cables 1m 3m 3 2ft 9 6ft 9 10 11 8 The signal cable can be extended up to 30 m 96ft 9 The connecting cable can be extended up to 5 m 16ft 10 The total length of the signal cable and the intermediate cable can be extended up to 32 m 11 The length of the signal cable and the connecting cable other than the standard may affect the accuracy 3 ke 8 No 99MBC094A 4 External dimensions Connectia Mass e Emission unit e Reception unit Base e Signal cable No 99MBC094A Laser emission LED 63 16 12 Measuring spo 3 SPECIFICATIONS 50 1 969 5 25 984 984 7128 OF MEASURING UNIT
41. scribes precautions to be observed when attaching the emission unit and the reception unit which have been detached from the support base of the measuring unit to a specially arranged dedicated fixture 4 1 Outline In application the emission unit and the reception unit may have to be detached from the support base of the measuring unit and attached to a dedicated fixture If this is the case the measuring accuracy cannot be ensured unless the emission unit and the reception unit are properly aligned on the dedicated fixture Design a proper fixture according to this section 4 2 Consideration to Calibration To ensure accurate measurements design the fixture so that the workpiece to be measured can be positioned at the point of measurement that is the focal point of the emission unit Also make allowances for calibration and for a calibration gage to be mounted on the fixture 4 2 1 Measuring position and resulting accuracy As shown in the figure below the scanning beam of the measuring unit is produced by reducing the thick beam to a beam of the minimum diameter at the measuring position that is the focal point However since the inclination of the reception signal is defined as beam diameter scanning speed the inclination will be the steepest at measuring point b and will be less steep at points a and c off from the measuring point The less steep the inclination of the reception signal the more suscepiible the signa
42. than those specified herein may result in hazardous radiation exposure Never open the cover on this measuring unit 5 2 Safety Precaution Labels Located on LSM 500S Series C CAE UA LASER RADIATION DO NOT STARE INTO BEAM 13mW peak SCANNING LASER L D 650nm j 7722 Ba CLASS 2 LASER PRODUCT AA ai SSSSSAAN SU X LL AVOID EXPOSURE LASER RADIATION E ie oe EMITTED FROM THIS APERTURE ASS Laser Notice No 50 dated 26 July 2001 Mitutoyo Corporation Laser Emission LED Shutter 1 20 1 Sakado Takatu ku Kawasaki shi NLU D aa U Code No 544 000 _Serial_No ______000000_ No 000000 18 Mitutoyo Cop e Mitutoyo Corp MADE IN JAPAN g SE ER LASER RADIATION DO NOT STARE INTO BEAM 13mW peak SCANNING LASER LD 650nm 49 ROV FRA CLASS 2 LASER PRODUCT AHA AAA R H ES RI RTS iii e ll 5 2 No 99MBC094A SERVICE NETWORK Mitutoyo America Corporation Illinois Repair Service 958 Corporate Blvd Aurora IL 60504 U S A TEL 630 820 3334 FAX 630 820 2530 Michigan Repair Service 45001 Five Mile Rd Plymouth MI 48170 U S A TEL 734 459 2810 FAX 734 459 0455 Los Angeles Repair Service 16925 East Gale Ave City of Industry CA 91745 U S A
43. weapons of mass destruction or military affairs In the case of export to the U S this product requires an application for prior approval of CDRH Center for Devices and Radiological Health in FDA Food and Drug Administration An additional cost generates in application procedure For detailed information consult a Mitutoyo sales office Also if this product is exported with it incorporated in equipment the final product requires an application for FDA approval If this is the case note that the client must file an application for approval iii INSTALLATION CONDITIONS The Mitutoyo Laser Scan Micrometer LSM 500H series is an instrument for indoor use Also this series is a precision optical instrument and a precision electronic instrument Therefore it must be carefully installed and the following conditions must be taken into account to attain the highest possible accuracy Mitutoyo assumes no liability for any accident or damage caused by use of this instrument not conforming to these conditions Vibration Install the LSM in a place with minimum vibration If the LSM is subjected to vibrations for a long period of time precision components in the system may malfunction thus affecting the measuring accuracy If the vibrations are significant minimize them by laying a vibration damping rubber pad etc Dust Grit Dust if present in the installation site will affect the optical components such as protection glass in the measur

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