4200-SCS - Farnell
Contents
1. 4200 SCS Intuitive point and click Windows based environment Unique Remote PreAmps extend the resolution of SMUs to 0 1fA Self contained PC provides fast test ZAT oMm e aT ELICE LEELA graphing and printing and on board mass storage of test results Unique browser style Project Navigator organizes tests by device type allows access to multiple tests and provides test sequencing and looping control Integrated support for Keithley Model 590 and Agilent 4284 C V meters Keithley switch matrix configurations and Agilent 81110 pulse generators Hardware controlled by the Keithley Interactive Test Environment KITE User Test Module function extends KITE for external instrument control and test station integration Includes software drivers for Cascade Microtech Summit 12K Series Karl Suss Model PA 200 Micromanipulator Model 8860 and manual probers 1 888 KEITHLEY u s ony Semiconductor Characterization The easy to use Model 4200 SCS Semiconductor Characterization System per forms lab grade DC device characterization real time plotting and analysis with high precision and sub femtoamp resolution The 4200 SCS offers the most advanced capabilities available in a fully integrated characterization system including a complete embedded PC with Windows NT operating system and mass storage Its self documenting point and click interface speeds and simpli fies the process of taking data so users can begin analyzing2. EMC Directive 89 336 EEC DIMENSIONS 43 6cm wide x 22 3cm high x 56 5cm deep 17 2 in x 8 in x 22 in WEIGHT approx 29 7kg 65 5 lbs for typical configuration of four SMUs T O PORTS SVGA Printer RS 232 GPIB Ethernet Mouse Keyboard NOTES 1 All ranges extend to 105 of full scale 2 Specifications apply on these ranges with or without a 4200 PA 3 Specified resolution is limited by fundamental noise limits Measured resolution is 6 digits on each range Source resolution is 4 digits on each range 4 Interlock must be engaged to use the 200V range KEITHLEY MEASURE OF CONFIDENCE
3. their results sooner The powerful test library management tools included allow standardizing test methods and extractions to ensure consistent test results The 4200 SCS offers tremendous flexibility with hardware options that include four different switch matrix configurations a choice of Keithley and Agilent C V meters and pulse generators A variety of customer support packages are also available including applications support calibration and repair A Total System Solution The Model 4200 SCS provides a total system solution for DC characterization of semiconductor devices and test structures This advanced parameter analyz er provides intuitive and sophisticated capabilities for semiconductor device characterization The 4200 SCS combines unprecedented measurement speed and accuracy with an embedded Windows NT based PC and the Keithley Interactive Test Environment KITE to provide a powerful single box solution The Keithley Interactive Test Environment allows users to gain familiarity quickly with tasks such as managing tests and results and generating reports Sophisticated and simple test sequencing and external instrument drivers sim plify performing automated device and wafer testing with combined IV and CV measurements The 4200 SCS is modular and configurable The system supports up to eight Source Measure Units including up to four high power SMUs with 1A 20W capability Extended Measurement Resolution An opti
4. 200 PA PreAmp 0 050 1pA 50 0 050 100 fA 0 100 30 fA 0 500 15 fA 1 000 10 fA 0 060 3pA 0 060 300 fA 0 100 80 fA 0 500 50 fA 1 000 40 fA SEE EP EIPBRBBRBE rn pz x pr a VOLTAGE COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected voltage range VOLTAGE SPECIFICATIONS Max Current Voltage Range sue eou estan Source Accuracy rdg volts 0 02 15 mV 0 02 1 5 mV 0 02 300 uV 0 02 150 uV Measure Accuracy rdg volts Resolution 3 mV 1 mV 150 uV 100 uV 5 mV 500 uV 50 uV 5 uy CURRENT COMPLIANCE Bipolar limits set with a single value between full scale and 10 of selected current range 1 888 KEITHLEY u s ony www keithley com g GREATER KEITHLEY MEASURE OF CONFIDENCE D N Ez D Led gt ke ga 2 kz oO fam z D 2 l SEMICONDUCTOR a S o D 2 Ze N oO fa S N lt SEMICONDUCTOR 4200 SCS system Supplemental Information Semiconductor Characterization Supplemental information is not warranted but provides useful information about the 4200 SMU 4210 SMU and 4200 PA COMPLIANCE ACCURACY Voltage compliance equals the voltage source specifications Current compliance equals the current source specifications OVERSHOOT lt 0 1 typic
5. LES AND CONNECTORS Remote PreAmp Cable 0 3m for use inside prober shield Remote PreAmp Cable 2m for remote location of 4200 PA one included with each 4200 PA Remote PreAmp Cable 3m for remote location of 4200 PA Remote PreAmp Cable 6m for remote location of 4200 PA Ultra Low Noise PreAmp Triax Cable 0 3m Triax Triax connects 4200 PA to a test fixture recommended for remote location of the 4200 PA Ultra Low Noise PreAmp Triax Cable 1m Triax Triax connects 4200 PA to a test fixture Ultra Low Noise PreAmp Triax Cable 2m Triax Triax connects 4200 PA to a test fixture two included with each 4200 PA Ultra Low Noise PreAmp Triax Cable 3m Triax Triax connects 4200 PA to a test fixture Ultra Low Noise SMU Triax Cable 1m Mini Triax Triax connects 4200 SMUs to a test fix ture Ultra Low Noise SMU Triax Cable 2m Mini Triax Triax connects 4200 SMUs to a test fix ture two included with each 4200 SMU that is not configured with a Remote PreAmp Ultra Low Noise SMU Triax Cable 3m Mini Triax Triax connects 4200 SMUs to a test fix ture Interlock Cable 3m one included with each 4200 SCS Shielded IEEE 488 Cable 1m Shielded IEEE 488 Cable 2m Coaxial connector for connecting coax instru ments to a triax matrix ACCESSORIES AVAILABLE COMPUTER OPTIONS 4200 CRT 17 SVGA CRT 4200 RPC 0 3 4200 MOUSE Microsoft 2 Button Mouse 4200 RPC 2 REMOTE PREAMP MOUNTING OPTIONS 4200 MAG BASE Magneti
6. al Voltage Full scale step resistive load and 10mA range Current 1mA step R 10kQ 20V range RANGE CHANGE TRANSIENT Voltage Ranging lt 200mV Current Ranging lt 200mV ACCURACY SPECIFICATIONS Accuracy specifications are multiplied by one of the following factors depending upon the ambient temperature and humidity Relative Humidity Temperature 5 60 60 80 10 18 C x3 x3 18 28 C x1 x3 28 40 C x3 x5 REMOTE SENSE lt 10Q in series with FORCE terminal not to exceed a 5V difference between FORCE and SENSE terminals 30V maximum between COMMON and SENSE LO Additional Specifications MAX OUTPUT POWER 22 watts for 4210 SMU and 2 2 watts for 4200 SMU both are four quadrant source sink operation DC FLOATING VOLTAGE COMMON can be floated 32 volts from chassis ground VOLTAGE MONITOR SMU in VMU mode Measure Voltage Measure Accuracy Range Resolution rdg volts 200 V 200 uV 0 015 3 mV 20 V 20 uV 0 01 1 mV 2y 2 uV 0 012 110 uV 200 mV 1pv 0 012 80 uV INPUT IMPEDANCE gt 10 Q INPUT LEAKAGE CURRENT lt 30pA MEASUREMENT NOISE 0 02 of measurement range rms DIFFERENTIAL VOLTAGE MONITOR Differential Voltage Monitor is available by measuring with two SMUs in VMU mode or by using the low sense terminal provided with each SMU GROUND UNIT Voltage error when using the ground unit is included in the 4200 SMU 4210 SMU and 4200 PA specifications No additional err
7. ation for controlling the 4200 SCS from an external computer via the GPIB bus The Keithley Interactive Test Environment KITE The Keithley Interactive Test Environment KITE is the Model 4200 SCS Windows device characterization application It provides advanced test definition parameter analysis and graphing and automation capa bilities required for modern semiconductor characterization A GREATER MEASURE OF CONFIDENCE SEMICONDUCTOR a Oo O D Q Z Oo oO 2 Ld 4200 SCS Ordering Information 4200 SCS F Flat Panel Display 4200 SCS C Composite Front Bezel requires an external SVGA display Accessories Supplied Reference and User Manual on CD ROM and printed User Manual included with 4200 SCS 236 ILC 3 Interlock Cable 3m one included with 4200 SCS Note All 4200 SCS systems and instrument options are supplied with required cables of 2m length 1 888 KEITHLEY u s ony Semiconductor Characterization System E i aa peed ta am er tet lum an i een ea a 1 A a Y a r zorn EJ The Keithley Interactive Test Environment is designed to let users understand device behavior quickly When running a test sequence users can view results and plots for completed tests while the sequence is still running As shown here multiple plots can be viewed at the same time to get a complete picture of device per formance Eere E ami F ADDITIONAL CAB
8. c Base for mounting 4200 PA on a 4200 RPC 3 prober platen 4200 VAC BASE Vacuum Base for mounting 4200 PA on a 4200 RPC 6 prober platen 4200 TMB Triaxial mounting bracket for mounting 4200 4200 TRX0 3 PA on a triaxial mounting panel OTHER ACCESSORIES 4200 MAN Printed Manual Set 4200 CART Roll Around Cart 4200 TRX 1 8006 Component Test Fixture 8007 Semiconductor Test Fixture MODINE C V OPTIONS 4200 590 High Frequency C V Analyzer 100kHz 1MHz 4200 TRX 3 5909 Calibration Sources for Model 590 C V Analyzer 4200 MTRX 1 SWITCH MATRIX OPTIONS Ultra Low Current 100fA offset 30uV offset remote or local sense 4200 MTRX 2 Low Current IpA offset 40uV offset 12 360 pins local sense only General Purpose 100pA offset 5uV offset 12 360 pins remote sense 4200 MTRX 3 CABINETS AND MOUNTING ACCESSORIES 4200 CAB 20UX 20U Cabinet 35 in 4 i 236 ILC 3 4200 CAB 25UX 25U Cabinet 44 in 4200 CAB 34UX 34U Cabinet 60 in 7007 1 4200 RM Slide Rack Mounting Kit for 4200 SCS F and 7007 2 4200 SCS C 4200 CRT RM Fixed Rack Mounting Kit for 4200 CRT TETREBNG 4200 KEY RM Slide Rack Mounting Kit for standard keyboard and pointing device 2288 1G Model 590 Rack Mount Kit A GREATER MEASURE OF CONFIDENCE 4200 SCS System KITE Projects A project is a collection of related tests organized in a hierarchy that parallels the physical layout of the devices on a wafer KITE operates on projects using an interface called the project navigator T
9. he project navigator simplifies organizing test files test execution and test sequencing The project navigator organizes tests into a logical hierarchy presented in a browser style format This structure allows users to define projects around wafer testing e The project level organizes subsites and controls wafer looping execution e The subsite level organizes devices and controls subsite test sequencing e The device level organizes test modules manages test module libraries and controls device test sequencing e The test module level performs tests analyzes data and plots results Prober Control Keithley provides integrated prober control for supported analytical probers when test sequencing is executed on a user programmable number of probe sites on a wafer Contact the factory for a list of supported analytical probers A manual prober mode prompts the operator to perform prober operations during the test sequence Semiconductor Characterization Test Sequencing The Keithley Interactive Test Environment KITE provides point and click test sequencing on a device a group of devices subsite module or test ele ment group or a user programmable number of probe sites on a wafer Keithley User Library Tool KULT The Keithley User Library Tool supports creating and integrating C language subroutine libraries with the test environment User library modules are accessed in KITE through User Test Modules Factory suppl
10. ied libraries pro vide up and running capability for supported instruments Users can edit and compile subroutines then integrate libraries of subroutines with KITE allow ing the 4200 SCS to control an entire test rack from a single user interface KULT is derived from the Keithley S600 and S400 Series Parametric Test Systems This simplifies migration of test libraries between the 4200 SCS and Keithley parametric test systems SPECIFICATION CONDITIONS Specifications are the performance standards against which the 4200 SMU 4210 SMU and 4200 PA are tested The measurement and source accuracy are specified at the termination of the supplied cables 23 C 5 C within 1 year of calibration RH between 5 and 60 after 30 minutes of warm up Speed set to NORMAL Guarded Kelvin connection 1 C and 24 hours from ACAL CURRENT SPECIFICATIONS Current Ena Range Voltage 4210 SMU 1 A 21V High 100 mA 210V Power 4200 SMU 100 mA SMU Medium Power SMU Resolution 100 nA Source Accuracy rdg amps 0 100 350puA 0 050 15 uA 0 050 I5pA 0 042 1 5pA 0 040 150nA 0 038 15nA 0 060 1 5nA 0 060 200 pA 0 060 30pA Measure Accuracy rdg amps Resolution 50 uA 5 uA 1 pA 0 100 200 uA 0 045 3yA 0 045 3A 0 037 300 nA 0 035 30nA 0 033 3nA 0 050 600 pA 500 0 050 100 pA 50 0 050 30 pA 5 500 nA 50 nA 4200 SMU and 4210 SMU with optional 4
11. onal Remote PreAmp the 4200 PA extends the system s measurement resolution from 100fA to 0 1fA by effectively adding five current ranges to either SMU model The PreAmp module is fully integrat ed with the system to the user the SMU simply appears to have additional measurement resolution avail able The Remote PreAmp is shipped installed on the back panel of the 4200 SCS for local operation This installation allows for standard cabling to a prober test fixture or switch matrix Users can remove the PreAmp from the back panel and place it in a remote location such as in a light tight enclosure or on the prober platen to eliminate measurement problems due to long cables Platen mounts and triax panel mount accessories are available KTE Interactive Software Tools KTE Interactive includes four software tools for operating and maintaining the 4200 SCS in addition to the Windows NT operating system e Kei e Ke usi e Kei thley Interactive Test Environment KITE The 4200 SCS device characterization application ithley User Library Tool KULT Allows test engineers to integrate custom algorithms into KITE ng 4200 SCS or external instruments ithley Configuration Utility KCON Allows test engineers to define the configuration of GPIB truments switch matrices and analytical probers connected to the 4200 SCS It also provides sys tem diagnostics functions thley External Control Interface KXCI The 4200 SCS applic
12. ors are introduced when using the ground unit OUTPUT TERMINAL CONNECTION Dual triaxial 5 way binding post MAXIMUM CURRENT 2 6A using dual triaxial connection 4 4A using 5 way binding posts LOAD CAPACITANCE No limit CABLE RESISTANCE FORCE lt 1 SENSE lt 102 1 888 KEITHLEY u s ony www keithley com A GREATER MAXIMUM LOAD CAPACITANCE 10nF MAXIMUM GUARD OFFSET VOLTAGE 3mV from FORCE GUARD OUTPUT IMPEDANCE 100k MAXIMUM GUARD CAPACITANCE 1500pE MAXIMUM SHIELD CAPACITANCE 3300pE 4200 SMU and 4210 SMU SHUNT RESISTANCE FORCE to COMMON gt 102Q 100nA 1 2A ranges 4200 PA SHUNT RESISTANCE FORCE to COMMON gt 10 Q 1pA and 10pA ranges gt 108Q 100pA 100nA ranges OUTPUT TERMINAL CONNECTION Dual triaxial connectors for 4200 PA dual mini triaxial connectors for 4200 SMU and 4210 SMU NOISE CHARACTERISTICS typical Voltage Source rms 0 01 of output range Current Source rms 0 1 of output range Voltage Measure p p 0 02 of measurement range Current Measure p p 0 2 of measurement range MAXIMUM SLEW RATE 0 2V us GENERAL TEMPERATURE RANGE Operating 10 to 40 C Storage 15 to 60 C HUMIDITY RANGE Operating 5 to 80 RH non condensing Storage 5 to 90 RH non condensing ALTITUDE Operating 0 to 2000m Storage 0 to 4600m POWER REQUIREMENTS 100V to 240V 50 to 60Hz MAXIMUM VA 500VA REGULATORY COMPLIANCE Safety Low Voltage Directive 73 23 EEC
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