MM Motor User Manual
Contents
1. A Johnson Electric Company Micro Motor MM User Manual MM01458000 01 REV A August 29 2012 Nanomotion Ltd POB 623 Yokneam 20692 Israel Tel 972 73 2498000 Fax 972 73 2498099 Web Site www nanomotion com E mail nano nanomotion com Micro Motor MM User Manual Copyright Copyright This document contains proprietary information of Nanomotion Ltd and may not be reproduced in any form without prior written consent from Nanomotion Ltd No part of this document may be reproduced translated stored in a retrieval system or transmitted in any form and by any means electronic mechanical photographic photocopying recording or otherwise without the written permission of Nanomotion Ltd Information provided in this document is subject to change without notice and does not represent a commitment on the part of Nanomotion Ltd Copyright December 2002 2012 Yokneam Israel All rights reserved All products and company names are trademarks or registered trademarks of their respective holders Nanomotion Ltd 2 Micro Motor MM User Manual Limited Warranty Limited Warranty Nanomotion Ltd hereinafter NM warrants the product other than software manufactured by it to be free from defects in material and workmanship for a period of time of one year except those parts normally considered as consumable expendable components such as motor conditioning brushes The warranty commences thirty 80 days from the da2. gen ee EG TEA oe i Figure 13 The rotated Eccenter Pin and the Leat Spring Applies Pressure on the Element Holder Nanomotion Ltd 1 8 Micro Motor MM User Manual Motor Mounting 2 4 10 Pull the Eccenter Pin out of the motor by using pincers 3 j 7 amp 3 ur 4 i pr Figure 14 Removing the Eccenter Pin Figure 15 Motor Moutned 2 4 11 Proceed to chapter Error Reference source not found for connecting the motor Note Before dismounting the motor insert the Eccenter Pin and turn it so that it retracts the Leaf Spring refer to steps 2 2 1 and 2 2 2 Nanomotion Ltd 19 Micro Motor MM User Manual Motor Connection 3 Motor Connection This section describes the MM connector pinout and the connections to the Nanomotion driver Extending the motor cable will not damage the motor however it will affect its performance The motor driver connection uses a standard 9 pin D type female connector refer to Figure 16 for connector pinout Pinout Screen Figure 16 Motor Connector Pinout A Important e For safety reasons the driver voltage is disabled unless pins 1 and 6 are shorted when the motor is connected Nanomotion Ltd 20 Micro Motor MM User Manual Motor Run in 4 Motor Run in In order to ensure proper Motor operation reduce wear rate of the system and to increase its lifetime it is important to run in the motor before its normal
3. product was designed to be used NM shall not in any event have obligations or liabilities to the Purchaser or any other party for loss of profits loss of use or incidental increased cost of operation or delays in operation special or consequential damages whether based on contract tort including negligence strict liability or any other theory or form of action even if NM has been advised of the possibility thereof arising out of or in connection with the manufacture sale delivery use repair or performance of the NM products Without limiting the generality of the preceding sentence NM shall not be liable to the Purchaser for personal injury or property damages Nanomotion Ltd 3 Micro Motor MM Micro Motor MM Limited Warranty Patent Information Nanomotion products are covered under one or more of the following registered or applied for patents 5 453 653 5 616 980 5 714 833 111597 5 640 063 6 247 338 6 244 076 6 747 391 6 661 153 69838991 3 6 384 515 7 119 477 7 075 211 69932359 5 1186063 7 211 929 69941195 5 1577961 4813708 6 879 085 6 979 936 7 439 652 7061158 51800356 1800356 1800356 2007 533057 pending 2011 093431 pending 7 876 509 10 2007 7009928 pending 200780019448 6 7713361 9 pending 12 294 926 pending GB20080000041 78 pending GB2009000003796 pending 12 398 216 pending GB2446428 12 517 261 pending 08702695 1 pending 10 2009 7017629 pending 12 524 164 p
4. alternatively machine a cavity in the base refer to Figure 9 2 4 6 Gently push the motor against the filler gauge 2 4 While pushing the motor against the filler gauge see yellow arrow Figure 10 tighten both mounting screws Figure 10 Using a Filler Gauge Nanomotion Lid 16 Micro Motor MM User Manual Motor Mounting 2 4 8 Ensure the following conditions are met e The reference base line is parallel to the ceramic strip e The element should be in contact with the Element Holder on its rear side counter to the tip The element should be in a full contact with the flexure and the Spring Holder e The flexure plane should be parallel to the Reference Base Line e The slide moves freely with the tip contacting the strip but without friction between the tip and ceramic strip aai Reference Base Line Flexure plane bad E 4 A i omg 4 OG NS Eccenter Pin In case the conditions are not met dismount the motor and proceed to section 2 3 Nanomotion Lid 17 Micro Motor MM User Manual Motor Mounting 2 4 9 Gently turn the Eccenter Pin 90 using a flat screwdriver so the Leaf Spring now applies pressure on the Element Holder EE 3 Flat screwdriver Element Holder Leaf Spring Flat screwdriver Eccenter Pin a Element Holder SN Leaf Spring g E g a mid a m d i er gm ai
5. e motor only after it has been well encased and shielded inside a metal enclosure 1 3 Motor Grounding Be sure to ground the motor or its conductive base plate to the electrical network ground before operating Nanomotion Ltd 8 Micro Motor MM User Manual Motor Mounting 2 Motor Mounting 2 1 Motor Nominal Description Nanomotion supplies a bracketed mounted Micro Motor see Figure 1 Reference Base line Bracket plane Tip Flexure Side spring Element Element holder Flexure screws Bracket screws e Nanomotion supplies an aligned and tested Micro Motor However before the removing from the bracket and mounting on the user stage the user is required to verify the correct motor flexure position described further in this manual e DO NOT remove the motor from the bracket prior to reading the instructions specifically listed in section 2 2 2 2 Correct Flexure Position Verification Nanomotion Ltd g Micro Motor MM User Manual Motor Mounting A Important e The flexure screws are for factory use only Opening them will impact motor s performance Use a suitable flat screwdriver for the Eccenter Pin other than for the mounting screws 2 2 1 By using pincers insert the Eccenter Pin supplied by Nanomotion between the Leaf Spring and the Element Holder right under the flexure screws with the groove facing up see Figure 2 Figure 2 Inserting the Ecce
6. ending 12 581 194 pending Nanomotion Ltd 4 Micro Motor MM User Manual Revision History O1 A June Add Mounting the Motor section 2010 NA August Administrative change added patent information to front 2012 matter Nanomotion Ltd 5 Micro Motor MM Micro Motor MM Lists Table of Contents l ENE EO NN E 8 I RCO 0 EE EE E E E E 8 1 2 Handling and Safety Precautions cccccccccsccccseeeeceeeeeeeceseceeseeeeseeeessaeeeseeeessneesees 8 ES MOU lt I OUI CNN 0 PE EE EEE 8 2 MOTOR MOUNTING Lasses nnmnnn nnmnnn mnnn 9 2 1 Motor Nominal DESCHDUON sessirnar ES E E 9 2 2 Correct Flexure Position VerifiCation cccccccccceececeeeeeceeceseeeeseeeeseeeeseeeeeseeeeseeees 9 23 FENG TP OSIMOMNCOMCCHON EEE E E E E 14 2 4 Motor Mounting sanisicnonnancsnonsiincnneanatsienetaceuncguanased elancuncsuaneuevevetanad evant enebewaduiteoanewanieless 15 3 MOTOR CONNE ION r vere 20 4 MOTOR RUNAN Lieder edsekeunes ar snnedninpennnden 21 5 SPECIFICATIONS vesececsceesescdee asec cicuanencecessewccendessenanceawentndeauee secs anoseicecsuncosesseecdaweseecssnanes 22 PEON Oer E 22 De PENN 22 5 EVT OA NN 22 5 4 Physical PFOD CICS wcawncesmeasicusasusincuiesusitsavauuieswsarianaaurasanateraienaseraseraudcuvnswiesaileouwiecuvieoaut 22 5 5 Envelope of Performance cccccccecceceneceneeeneeeneeeseeceueseesaeeteeseeeteeeseeeseeeneeenees 23 36 Motor Ay OUI EE E 23 6 CONTACT INFORMATION voc vsiccssescsctisssstcsesise
7. nter Pin Nanomotion Lid 10 Micro Motor MM User Manual Motor Mounting 2 2 2 Gently turn the Eccenter Pin see Figure 3 by using a flat screwdriver so the Eccenter Pin retracts the Leaf Spring see Figure 4 Thus there is no contact between the Element Holder and the Leaf Spring Ensure that the flat screwdriver Se ae ee ih EE 5 re r En Leaf Spring Eccenter Pin Flat screwdriver Element holder Leaf Spring Eccenter Pin Figure 4 The Leaf Spring is Retracted Nanomotion Ltd 11 Micro Motor MM User Manual Motor Mounting 2 2 3 Detach the motor from the bracket by unscrewing the bracket screws 2 2 4 Place the motor on a clean workplace 2 2 5 Observe the motor before mounting Verify that the flexure is parallel to the Reference Base Line when the Leaf Spring is retracted see Figure 5 If not refer to section 2 3 for correcting the flexure position Figure 5 Correct Flexure Position Nanomotion Lid 12 Micro Motor MM User Manual Motor Mounting 2 2 6 Ensure that there is a contact between the element and the Element Holder surface at point a In case not gently push the element toward point a see Figure 6 2 2 Ensure that the element contacts the Element Holder at both Nanomotion Lid points b If not use pincers in order to place the element so it contacts points b see Figure 6 Figure 6 Motor Bottom View 13 Micro M
8. otor MM User Manual Motor Mounting 2 3 Flexure Position Correction Motor s flexure position could be inclined toward the tip In order to correct flexure position perform the following steps 2 3 1 Hold the motor with one hand 2 3 2 Gently pull the flexure in the opposite direction to flexure inclination by using pincers with Teflon tips For instance if the flexure is inclined toward the tip pull the flexure toward the Leaf Spring as shown in Figure 7 2 3 3 Repeat step 2 3 2 until the flexure plane is parallel to the reference base line 2 3 4 Proceed to step 2 2 6 Nanomotion Lid 14 Micro Motor MM User Manual Motor Mounting 2 4 Motor Mounting 2 4 1 While the Leaf Spring is retracted mount the motor on the base plate 2 4 2 Insert both mounting screws into the mounting holes 2 4 3 Loosely screw both mounting screws by using a flat screwdriver Refer to the motor layout drawing in section 5 6 Flat screwdriver Mouting screws Base plate Leaf Spring retracted a n JE gt Element Holder TT JE gt my A Ha r j tz p Figure 8 Mounting the Motor Nanomotion Ltd 15 Micro Motor MM User Manual Motor Mounting 2 4 4 Move the slide to the left side of the tip until the end of the travel see green arrow Figure 10 2 4 5 Assure a distance of 0 8 0 0 05 mm between the ceramic strip and the motor by using a standard filler gauge refer to Figure 9 or
9. otor MM User Manual Specifications 5 5 Envelope of Performance Maximum continues operation 4 sec at 3 5 10V command Maximum Duty Cycle at 10V 10 command A Important e The MM driver has an internal protection that stops the driver after 4 seconds for command higher than 3 2V so protecting the motor from overheating 5 6 Motor Layout MOUNTING POSSIBLE ON EITHER SURFACE MOUNTING HOLES D1 4 X2 SCREWS MAY PROTRUDE 0 2 mm MOUNTING DISTANCE REFERENCE PLANE ADJUST TO BE PARALLEL TO THE CERAMIC STRIP AND AT A DISTANCE OF 0 8 0 05 mm FROM IT Notes The dimensions refer to a correctly mounted motor All dimensions are in mm Figure 17 Motor Layout Nanomotion Ltd 23 Micro Motor MM User Manual Contact Information 6 Contact Information 6 1 Customer Service Contact your local distributor or email Nanomotion Ltd Technical Support Department at techsupport nanomotion com with detailed problem description 6 2 General Inquiries and Ordering e Outside the USA Nanomotion Ltd Headquarters Nanomotion Ltd PO Box 223 Yokneam Israel 20692 Tel 972 73 2498065 Fax 972 73 2498099 Web site www nanomotion com Email nano nanomotion com e Inthe USA Nanomotion Inc US Headquarters Nanomotion Inc 1 Comac Loop Ste 14B2 Ronkonkoma NY 11779 Tel 800 821 6266 Fax 631 585 1947 Web site www nanomotion com Email nanous nanomotion com Nanomotion Lid DA
10. sisoucssnaveeisencted essence sncasteweseaessnieeesneteieesins 24 el EST 24 6 2 General INQUIFIES and Ordering siccescczseciscstsmasssescveioeiensiedaleunimenieentedaccsamactencianets 24 Nanomotion Ltd 6 Micro Motor MM Micro Motor MM Lists List of Figures Figure 1 Bracketed Motor Top VIEW cccccsecccssecceccceeeceueeceeeceueeceueesaeeseuessaeessueeseeesseeens 9 Figure 2 INSerING the Ecceenter Pl samspel EA 10 Figure 3 Turning the Eccenter FN uuanssevnenenamemmrivnikmo nrivelaevgu veiene 11 Figure 4 The Leaf Spring is Retracted cccccccccseccceesceeeenseeeeeceseueeseeeseueseeeeseueeseeesaeeeneees 11 Figure 5 Correct Flexure POSItION cccccccceececceeeeceeeeceeeeseeeeeseeceseeesseeesaueesseeeeseesessaeeesaes 12 Figure 6 Motor Bottom ViICW cccceccceecceeececeneeeseeeneeeneeeneeeseeeneeeaeeseuesseeseeeseeeseeeteeeseeesaes 13 Figure 7 Correcting the Flexure Position rrnrrrrarrrrnnnrrrarrrnnnrnranrnnnnnrnnanrnnannnnnnnennasennnnennnn 14 Fig re 8 Mounting the MOD armeen md saednaennaronanmuaednaunsaesiaxendenuniaraueumandinenianancons 15 Figure 9 Setting a Distance between the Ceramic Strip and the Motor rrrnnrrnrannrnnnnen 16 Figure 10 Using a Filler Gauge ccccceececeececceeeeceeeeceeeeceeeesseeeeseeseseuseseaseeseeeesseeesseeesags 16 Figure 11 Mounted Motor Correct Position rrarrrrnnnrrnnrrrrnnrrranrrrnnnenranenrnnennnnennanennnsennnn 17 Fig
11. te of shipment NM warrants those parts replaced under warranty for a period equal to the remaining warranty coverage of the original part NM s sole and exclusive obligation under this warranty provision shall be to repair or at its sole option exchange defective products or the relevant part or component but only if i the Purchaser reports the defect to NM in writing and provides a description of the defective product and complete information about the manner of its discovery within ten 10 days of its discovery ii NM has the opportunity to investigate the reported defect and to determine that the defect arises from faulty material parts or workmanship and ili the Purchaser returns the affected product to a location designated by NM These provisions constitute the exclusive remedy of the Purchaser for product defects or any other claim of liability in connection with the purchase or use of NM products This warranty policy applies only to NM products purchased directly from NM or from an authorized NM distributor or representative This warranty shall not apply to i products repaired or altered by anyone other than those authorized by NM ii products subjected to negligence accidents or damage by circumstances beyond NM control iii product Subjected to improper operation or maintenance i e operation not in accordance with NM Installation Manuals and or instructions or for use other than the original purpose for which the
12. ure 12 The Leaf Spring is Retracted cccccceecccseccseeeeeeeeeeeeceeeeseeeseueeseeeeseeesueeaeeesees 18 Figure 13 The rotated Eccenter Pin and the Leaf Spring Applies Pressure on the Element Od ctowvesncnanestunedamtionsnanenmuensccagarsxcncuennisnoasmeatinunnnentneshapp E 18 Figure 14 Removing the Eccenter PIN ccccsccceccceeceeeseeeceeeseeeseeeseesseeesaeeeseenseeneeeneeenes 19 ge Tas Motor WOU CO RENEE 19 Figure 16 Motor Connector Pinout ccccceecccceeeeceeeeceeeeeeeceeseeeecaueeesueessueeeseeeessueessaeeesaes 20 Figure 17 Motor Layout EEE 23 Nanomotion Ltd 7 Micro Motor MM User Manual General 1 General 1 1 Scope The purpose of this user manual is e To introduce the user to the Nanomotion Micro Motor structure e To help the user verify motor s correct setting so that the mounting process is successful e To guide the user how to correctly mount the motor on the user stage and operate it e To provide the user with motor specifications 1 2 Handling and Safety Precautions Do not power on the motor unless it is properly mounted as explained in chapter 2 further in this user manual Ensure that the motor and specifically its tip are not subjected to mechanical shocks The mounting base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness A WARNING HIGHT VOLTAGE e For safety and EMI reasons it is important to set the power to th
13. use Following is the list of parameters for the MM Motor run in e Velocity 100 mm sec e Duty cycle 50 e Duration 4 hours Once the run in is completed carefully clean the ceramic strip with a Q Tip soaked in IPA without dismounting the motor The run in procedure should be repeated if the motor is disconnected and then remounted A WARNING e Never run in the motor in a vacuum environment Nanomotion Ltd 21 Micro Motor MM User Manual Specifications 5 Specifications 5 1 Performance Maximum Allowable Velocity Dynamic Stall Force Static Holding Force Non Energized Stiffness Nominal Preload on Stage Kf Kfv Offset Attainable Resolution Nominal Lifetime 5 2 Electrical Maximal Voltage Maximal Current consumption Maximal Power Consumption 5 3 Environmental Ambient Temperature Storage Humidity Residual Magnetism Vacuum compatibility Bake out Physical Properties Weight Nanomotion Ltd 250 mm sec 170 mN 160 mN reference value 0 04 N u 0 9 N 25 to 35 mN Volt command Driver and command dependant 0 5 to 0 8 N e sec m 2 V Driver dependant Better than 50 nm See application notes 20 000 hours under nominal operating conditions 70 Vrms sine wave 18 mA rms Cable length dependant 350 mW 0 50 C 40 C 70 C 0 80 non condensing 0 22 nT 1E 7 Torr Guaranteed after baking Max 24 hrs at 120 C 5 5gr 22 Micro M
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