Operating instructions for DWL66 laser writer
Contents
1. Design column contains the path and the name of the lic directory where the pattern is stored First click on the Design field that you wish to select in the Edit Job spreadsheet In the DWL_MENU select File Designs Click Refresh if your file does not appear Select the file and click on To Job Continue with the remaining Design fields Defoc column a value between O and 4095 can be used as an autofocus offset If the column is left empty the defocus value of the previous exposure is used The 4095 steps approximately equal 10 um therefore one unit equals about 5 nm Since the focal depth of the 20 mm writehead is 50 um it is not necessary to adjust the autofocus offset When choosing the Defoc value for the 4 mm writehead keep in mind that the focal depth is 1 8 um and the autofocus is stable within 100 nm If you are using the Cr plates coated with 5300A of AZ1500 series resist from Nanofilm Defoc value and other important exposure settings are stored in the file parameters txt on the desktop Energy column sets the laser beam intensity for the exposure 100 sets the energy to 100 90 to 90 etc Use values from 10 to 100 in the increment of 10 We recommend that you use higher energy values Ifa Expose CQEDO5 DWL I value lower than 30 is needed insert neutral e 7 Huts density filter s into the laser beam path ii i ES 1 10 and 31 62 neutral density filter2. After you make all desired changes in the Exposure Map Design click on Draw to apply the changes Click Exit and save the Map if it is not saved automatically Go to Job Make Job to input the exposure parameters The following spreadsheet appears Edit Job DEFAULT DWL The meaning of the columns in the spreadsheet is as follows do column enter 1 if the field should be written enter 0 or leave empty if the field is skipped Alr column determines the alignment method Empty field or O means no alignment 1 is one site alignment 2 is two site alignment etc 4 is the maximum Make sure that the alignment sites were entered earlier in the Exposure Map Design window Xoff and Yoff columns the value entered here in microns determines the X offset resp Y offset of the starting point of the exposure from the point that is set by the big cross in the Map geometry Keep in mind the coordinate system of the sample stage The orientation of the machine s coordinate system is shown in the picture below Remember it when setting the write job The coordinate system on the PC display is different The X axis runs from left to right and the Y axis from bottom to the top The laser writes in y direction and steps in the x direction Switches for turning on off certain vacuum holes Switch for turning the vacuum on and off
3. Measure in the DWL_MENU The automatic feature detection requires good contrast of the measured features on the LCD screen Optimize DeFoc Lmp and Gn in the DWL Control Panel for the best contrast To achieve the best results always use the micro camera during the measurement There is no alignment of the sample with respect to the camera Therefore you must place the sample properly on the substrate holder The following measurements are possible Overlay measures the relative position of two features Distance measures the distances between two features Positions measures die to die alignment to ensure that the machine coordinate system is linear and orthogonal Linewidth measures the width of lines 15 Pitch Stitching Edge pitch measures the distance between two identical features edge measures the edge roughness and because no stitching is used during the exposure there is no need to measure stitching Following are the instructions for the overlay measurement using the Small Box in Box method 1 Load the substrate click on INIT and FOCUS 2 Move the stage to the desired structure 3 Load the corresponding Map file by going to Setup gt New in the DWL_MENU menu 4 Go to Measure Overlay in the DWL_MENU The Overlay Measurements window opens Select Box in Box XY Modell and click on Set Up The Define Box window app
4. Relative to The Point to Reference Site window opens Place the green cross on the reference site Click on OK Enter the description of your reference site and click OK In the Line Width Measurements window select Line Width X or Line Width Y Click on Set Up The Define Box window opens Click on Panel and move to the first feature line that you wish to measure Place the green box over the line Click OK Click on OK when the Define Measurement 2 window appears Click on Panel move to the next line and place the green box over it Continue 17 with the rest of the lines When done click on Cancel in the Define Measurement n window In the Line Width Measurements window go to File Save Measurement Type the file name maximum 8 characters and click on OK Now you may set up other measurements If done click on Exit 5 Go to Job gt Make Job The Map and Edit Job windows open The do column should be set to 1 for every die that should be measured Ali column should be empty Open the VBMENU folder located on the desktop In the measure folder find your measurement file and enter that name into the Design window in the Edit Job The name must look like this M filename msr Close the window Click Yes to overwrite 6 Go to Job Run Job You must be in the F
5. XOR function between any two layers in your design Their meaning is explained below Layer Layeri XOR Layer2 3 Click on Step in the Options window The Step Layers for window appears Under Array enter how many dies should be written in x and y directions e g 3 X 5 The example bellow shows 1 X 3 array selected in red rectangular Under Step Size enter the step size in nanometers in x and y 99 If you are creating one stripe of dies in y direction select O for x and the desired step for y this should be slightly bigger than the die size to allow for some gap between the dies Choose the Rotation and or Mirror Click on Create default Job file will be created To minimize the conversion and write times for repeating patterns it is recommended tocreate the conversion pattern in the following way Example The view of the mask after it is completed It contains 9 identical dies green squares Each die carries your AutoCAD or L Edit design When creating the conversion file make a design that contains one complete stripe in the y direction as shown within the red rectangle That would dramatically reduce the conversion y time 4 There are three basic rules that you should follow when performing the conversion They are listed in the order of importance a Create a complete stripe in the y direction b If the area of your p
6. Develop and etch the Cr Spin AZ1505 on the backside of the mask 4000 rpm 40 seconds Soft bake it in the oven for 20 minutes 90 C Load the mask into the laser writer flip long y axes The Cr pattern should be on the bottom the photoresist layer on the top Use the bottom camera for alignment Write the second layer pattern into the photoresist and develop Spin AZ1505 on the side of the mask that carries the Cr pattern and soft bake it Load the mask into the laser writer Same orientation as for the first layer The Cr Ewen with the layer of photoresist should be on the top Center the front image and set w Turn on the back side camera move to X 80 and Y 680 center and set Perform manual alignment using the bottom camera check the position with the alignment field method and set wol Write the third layer pattern into the photoresist one field only This would give you twice the y error Rotate the substrate by 180 and write the same pattern into a different field This would give you twice the x error Develop Load the substrate and measure the Box in box structures the misalignment between the 1 and 3 layers Enter the numbers gained from the measurement into the configuration file by correcting the values XBEAMBS and YBEAMBS Take the x error including the sign and add to the existing XBEAMBS Take the y error change its sign and add it to the existing YBEAMBS How to calibrate the la
7. ETT Epps ed you have done it already in the Step Ader Ree __Optons DXF window and X offset and Y offset HMT Fe i cc 29 66 io Mage Fes Keep a Calculate exposed area off add Rem Optons insentTet and the Automatic centering on When Plato 0 doing the overlay exposures do not use Automatic centering Define the origin of the designs in AutoCAD or L Edit This ite Ge Lien aa origin is preserved during the conversion by Pixel Siza 200 fnn choosing Automatic centering off Justficabon Expose Options 9 Choose noninverted or inverted design ia iam i aes under Exposure mode When inverting SOF Mote fi A oered ee NES the design you must select a Frame size L one ae NOA around the pattern The entered number R determines how far from any edge of the See TE aru G a pattern the photoresist 1S exposed If you Lit Directory automate Add Poet f z are using the noninverted design you must Scale X iio fe jz enter 0 in the Frame size scale Y ii Ve 10 In the Spot size corrections x and y windows enter numbers from the latest Compote Tasks 11 2A parameters txt file Keep the Scale factor x equal to 1 Default value for y is 1 01138 The Left optic path Scale offset and Calculate exposed area should be all off When done click on Complete
8. Pil n Out Up Down Redraw Show Lic Snapshot Polarity Toggle STOP DRAWING EXIT VIEWER A XMIN 1 325 mm WHIM 1 042 mm AMAA 4125 mm YMAR 1 04 mm Calls 1 Circles 140 Polyipons 4715 vernices 1 060 7 MaxNr 20 Memory 6IKBytes Following are some of these functions XOR to view XOR image as explained above Fill to view the areas that will be filled as opposed to lines Polarity to view the inverted pattern Left Right Down and Up to move the image All to view the complete design Measure measurement tool The value in millimeters is displayed under D Snapshot creates a jpg file of the design shown on the screen The file is automatically saved as image in the home convert directory of the Linux partition Always use the Fill function to see which areas will be exposed The black areas are exposed Use the Polarity function if you plan to create an inverted image If you are not satisfied with your design return to the Options window and click on Step Make changes to the array and click Redraw Continue until you are satisfied Write down the size of your design You will need it later when setting up the write job environment ene 8 Return to GUI HIMT Convert window and aaga set the remaining parameters We job_00 recommend that you ignore the Rotation
9. cables Loosen these screws 5 Go to Setup gt New in the DWL_MENU menu Highlight C vbmenu wafer and click on the Create Map button Input a project name consisting of no more than 8 characters Click on Yes to set the Environment Return to New Exposure Map window and under C vbmenu wafer double click on the folder that you just created In the right window the corresponding fa map and wa files appear Double click on the map file and click on Set Environment to Click on Exit to close the New Exposure Map window 6 Go to Setup Exposure Map The default Map setting is displayed Exposure Map Design Field Width 10000 Field Height 10000 Alignment Site X 0 I Alignment Site Y 0 Ii Fields per Row 5 5 5 5 I Fields Start at X 0 0 0 0 0 Field Zero 13 Click on Draw to display the Map The following picture explains the meaning of the different variables for setting the Map Y Field t 13500 row 1 gt 4 ra lates row 2 5 row 3 gt 6 row 4 6 row 5 5 row 6 4 Fields Start at X 145000 0 0 0 14500 14500 All sizes and distances are in micrometers The Field Zero shown by the large cross in the Map determines the reference field resp the origin of the coordinate system When setting up the fields remember that the origin of the design is placed in the center of the field
10. center position a w 13 Develop the photoresist Mix AZ400K with DI water 1 4 ratio if you have the standard mask plate from Nanofilm It takes about from 30 seconds to 1 minute to develop How to perform the front side overlay exposure If the writehead has been moved exchanged since the last overlay exposure perform the overlay accuracy test Use the designs created by Heidelberg located under File Designs in the DWL_MENU _ The files are called Overlay The names are self explanatory e g Overle and Overle is the first and the second layer for the 4 mm writehead respectively To perform the test use a mask plate that is at least 2 5 inch by 2 5 inch in size Use the standard mode not HQ when writing these designs 1 Make a mark in one corner of the necro Load it click on IN Bem FOCUS Go to Setup gt New in the DV L X l J and double click on C d water align for the 4 mm writehead or lt A VB U wafer ali_20 for the 20 mm i head Darke click on the map file md click on E t Environment to Exit The following pictures show the default map setting for the 4 mm and 20 1 mm writeheads Do not change these map settings Map settings for the overlay using 4 mm writehead rH Mi WNW i MOA I MMA 0 2 aai 10 20 ui MUN il LGA AN ite Y 101 0 i ill Wi MI i ow AAA 1 Kb i i u I Wi Mt i NTA real
11. i iii i Ni I Hi ih i di i Hl Ah CARA AMY AD inl vt CAA MAA AA fii LEE ER AAA EA TA fini il ii iil ill i i ll rey ui on if thifi il ir bie j ji Je tl m Mal Hil Hi y wil He i oy Hl yal fi i ail i AA ae il 2 Use the Stage Find plate center in the DWL Control Panel to set the origin of x y coordinate system to the Ee of ite sone 3 Go to Job Make Job to prepare the job for the first layer pattern We suggest that you always use the uni directional writing mode To load the test pattern click on the 10 corresponding Design field in the Edit Job spreadsheet In the DWL_MENU select File gt Designs Select the required pattern for example Overlay4_1 and click on To Job Write the center die only It takes about 30 minutes to write Go to Job Run Job to start the exposure Develop the photoresist The pattern shown below will be written on your mask First layer pattern First and second layer together 1000 5000 1000 5000 i 20M 42000 M 4HR Ell lings A0 uni pitch 700 nm 200 200 200 200 a 200 200 200 4200 200 4200 200 200 1000 5000 Br 1000 3000 Load the substrate and click on INIT The substrate must be loaded with the same orientation as before You will expose the photoresist layer that you have just developed Us
12. task The Conversion Progress window will show up the progress bar does not work properly During the conversion your design is dissected into stripes each stripe containing 100 pixels Size of the pixel depends on write lens 4 mm lens has 200 nm pixel size 20 mm 1 um A small number of stripes indicates that you designed the conversion pattern correctly Click OK after the conversion is completed After conversion was done press finish button Transfer Lic Files window will appear Press Save and Transfer to transfer the lic files to OS 9 computer All designs lic files are stored there FTP address has to be 170 168 10 98 Exit the program How to perform exposure l 2 Open DWL_MENU by clicking on the D icon located on the desktop Two windows will appear Click on OK in the DWL MENU window The following menu is displayed at the top of the screen Opens or closes DWL Control Panel E Opens or closes current Exposure Map Starts Manual Plate Alignment Sequence Opens or closes Mini Terminal window for login and limited communication with OS 9 operating system used by DWL66 Requests Interferometer Status You must press the button to update the status If label IF changes to IF OK proceed If IF FAIL appears reset the interferometer by clicking on IF R If IF FAIL appears again consult page 38 of the user manual for troublesh
13. the alignment marks must be defined up to 4 in your map Teach the feature and then set up your write job Before starting the exposure go to Job Run Job Click on Test Align Each field will be measured separately and a correction in the starting position is made However there is no correction to the coordinate system only temporary X Y offset correction a a 18
14. the die to the middle of the screen Click on Set X 0 Y 0 in the Manual Global Alignment window and move the green cross to the middle of the alignment cross Click on OK and Exit the Manual Global Alignment window Go to Job Make Job and enter the second layer design into the Design column for example overlay4_2 Open the Map window Go to Commands Jump position in the Map window Click on any die and the camera should move to that position Check that you always see the cross alignment mark Return to the Field zero which in this case 1s the center die Click on Exit in the Edit Job window 12 15 16 17 18 19 20 Go to Job gt Run Job click on Expose and Yes Write one die only The other dies can later be used for additional 2 layer writing resp verification of the achieved alignment Remove your sample and develop recipe as before Load the sample and determine the x and y shifts between the first and the second layer by measuring the distance or the small box in box structures see the section on How to perform metrology below Enter the numbers gained from the measurement into the configuration file by adding or subtracting the absolute values from the values given for XBEAM and YBEAM In the DWL_MENU go to Service Edit Configuration File to open the configuration file A
15. Operating instructions for DWL66 laser writer Things to remember l The DWL66 runs a 405 nm semiconductor laser The laser beam path is covered and you must not remove any of the covers To assure that the user is not accidentally exposed to the laser light the laser writer exposes only if the coverlid is closed Do not open the coverlid when running a job The exposure will stop and you won t be able to resume it The laser writer is equipped with an interferometric system to measure the stage position Touching the mirrors located on the stage with bare hands will damage them beyond repair You need to wait for 30 minutes after the system is turned on The pattern should be 5 mm away from any edge of the mask sample The maximum write area for 6 inch mask is 5 5 inch by 5 5 inch A smart UPS supplies power to the laser writer and the laser not the Windows computer Therefore your writing job should not be affected in a case of a short power outage Login logout procedure l We have to computers Dell with Windows XP OS and writing software HP with Linux OS and conversion software Login as User to Windows XP The password was given to you during the authorization Conversion computer always on there are no passwords on it Computers use the same mouse keyboard and monitor To toggle between the computers you have to double click Scroll Lock button Logout from Windows XP after you are done Le
16. attern has rectangular rather than square shape always rotate the pattern in such a way that the longer side is parallel with the y axes c If your design contains long lines that run preferentially in x or y direction always rotate the pattern in such a way that the lines run along the y axes The orientation of the machine s coordinate system is shown in the picture below Remember it when setting the write job The coordinate system on the PC display is different The X axis runs from left to right and the Y axis from bottom to the top The laser writes in y direction and steps in the x direction 5 Arcres is important when drawing the circles The smaller is the arcres the longer is the conversion time If your file is dxf you must enter Dxf units 6 To display the individual layers of your design select the required layer s in the Options window then click on Create default Click on Preview in the DWL 66 Covert window Two HIMT Viewer windows appear Look at the pattern and decide whether you should rotate it Close the HIMT Viewer windows 7 Inthe DWL 66 Convert window click on Preview to view the design Two HIMT Viewer windows appear One shows the image the other announces the size of the pattern and contains a number of useful functions for the manipulation of the image HIMT Viewer Zoom Navigation Tools Mode window Mouse Left Right Measure Opumizatio mo xor
17. ave the system on Turn off the laser The lifetime of the laser diode is limited and the laser replacement is expensive Always move the substrate holder to the home center position before you exit the DWL_MENU software and logout If the laser writer is shut down for any reason turn it on by pressing the green button on the front panel Wait for 30 minutes for the system to warm up Next you need to reestablish the communication between the Windows and OS 9 computers Open DWL_MENU program DWL does not respond window appears Click OK Open the Mini Terminal window in the DWL_MENU Using the keyboard hit Enter twice and type dwl as username and password Close the Mini Terminal window after DWL appears Finally reset the interferometer and the stage see below How to perform the file conversion After you design the pattern in L Edit Pro or AutoCAD LT you must convert your gdsii cif or dxf file into lic files that are used by the laser writer Switch to the HP computer with Linux OS for the conversion l Insert a floppy USB memory stick or a CD open home directory little house icon in the toolbar at the bottom of the screen and copy your file to appropriate folder CIF DXF or GDSII Remove the storage media Start conversion program clicking on the icon located on the desktop smiling sun at the center of the screen Load your previous conversion job by selecting File load j
18. dd the absolute values if you need to move the laser beam in the positive direction and subtract them if you need to move the beam in the negative direction Click on OK to save the change After you change the configuration file you must load it again You may repeat the writing of the second layer into the developed photoresist again The ultimate goal is to achieve lt 200 nm misalignment for the 4 mm writehead and lt 500 nm for the 20 mm head This finishes the overlay calibration and you may now proceed with writing of your sample Your pattern may not be completely symmetric in x and y and most likely there will be no center cross in your design Therefore define the origin of your design the same for all layers in AutoCAD or L Edit and do not use Automatic centering during the file conversion This origin will be placed in the center of the field s in your map during writing There are other designs that can be used for the calibration of the overlay alignment For example nec_20_Ll cif and nec_20_L2 cif are designed for the 20 mm writehead These designs were not centered and their origin is in the middle of the cross like alignment mark numbered 1 How to perform the back side alignment If the writehead has been moved exchanged since the last backside exposure perform the calibration of the backside exposure Performing the backside exposure is very similar to the front side overlay exposure Follow
19. ears requesting that a measurement frame green square be placed over the structures First move adjust the green square to enclose the inner box in it the larger box should be completely outside the green square Use the X pos Y pos X size and Y size bars arrows to move and resize the square Click OK when done Next place it around the outer box Click OK Click Cancel to close the Define Measurement 2 window 5 The picture below explains the result of the measurement The X and Y values will be displayed in the Overlay Measurements window Be careful when using these values to correct the XBEAM and YBEAM resp XBEAMBS and YBEAMBS values in the Configuration file Click on Exit to leave the Overlay Measurements window Following are the instructions for measuring the Distance using manual alignment 1 Load the substrate click on INIT and FOCUS 2 Load the corresponding Map file by going to Setup gt New in the DWL_MENU menu 3 Move the stage to the desired structure 4 Go to Measure Distance in the DWL_ MENU The Distance Measurements window opens see below Check Manual inside the Alignment box Click on Set Up Measurement and the Point of Ist Site window will appear 16 Distance Measurements Alignment Manual D O tse Template NI 5 Put the green cross on the fi
20. ield zero die before you start the measurement Go to Commands Jump position in the Map window to verify that Click on Measure in the Expose window Click Yes to overwrite After the die is measured it will turn green in the Map field A window pops up to inform you that the measurement is finished Click OK To see the results click on Edit Report in the Expose window Go to File Save As if you wish to save it How to setup the field alignment method 1 Load the substrate click on INIT and FOCUS Load the appropriate map folder Perform manual alignment Open DWL Control Panel and move to the alignment mark in Field 0 To teach the feature go to Setup Simple Cross Alignment Using PosxY Follow the instructions click OK Click Yes to overwrite 6 Go to Setup Field Alignment Method Field Alignment Macros window will open Click on Execute live to verify that the software can detect the feature Click Exit to close the window 7 You may use the automatic feature detection when doing the alignment Click on Alignment Align Along Y Axis When the Point of Ist Site appears click on Auto to find the feature automatically 8 You may also use the automatic feature detection when writing multiple layers or for the back side alignment However
21. ng Y axis The Point to Ist Site window appears Click and drag the small dot in this window to obtain rough alignment of the green cross with the cross like pattern Position it on the edges of the cross see below Use the arrows for fine adjustment Click OK The Point to 2nd Site window opens Click on Panel to open the DWL Control Panel Select the Field option and move to the bottom die If needed switch to FS Macro Cam and move to find the alignment mark Switch to the micro camera and click on Exit to close the DWL Control Panel Now place the green cross on the same two edges of the cross like feature as before Click OK The popped up window reports the angle of misalignment Click OK to write that value into the system The Point of Ist site window opens again and the camera returns to the highest die If needed adjust the position of the green cross and click OK The camera will automatically move to the lowest die Adjust the position of the green cross and click OK You will get the angle of misalignment again If you click on OK the value will be written into the system and you will go through yet another round of alignment You should continue to correct until you get a value lt 0 002 mrad Once that is achieved click Cancel instead of OK Go back to the center die center of the sample and place the big cross located in the center of
22. ob or start new job using File new job Click on Add Select the appropriate design type DXF GSII or CIF The Options window will open The window will automatically reflect the number of layers in your design You need to select every layer that should become part of your conversion GUI HIRT CONVERT 1 43 Fila Tools Help Jo Source Fille EES Typ m m Adde Rem Options DXF saata O O tef Menge Files TA e Preview Add Rem Options Insert Ted Paten Lot Write Lens 4mm Stripe Width 100 ped Poon Sire 200 fim Justification Expose Options Expose Window 78320131 m Deign Width Ina Reset wi 78432150 mm Design Height Upper Border mm Len Border mm TA AT RGSS a z s aes na Lownr Border mm bi z 0 001508 t 2 Place x od 0 mm bAinrar of mm Rotate Compledy Tasks Layer1 OR Layer2 eye Fa3C01S1 re 74432150 real Right Border mm 74504515 Automatic Centering Postion Preview Layer1 CUT Layer2 DXF Options DXF units nm 1000000 Arcres degree 3 Magnification Factor x Layer Nr 0 0 x Layer Nr 1 gt OR lt OR CUT XOR Lstr Select All Unselect All View One View All Cancel Create Layer 0 Array x Step 0 nm Mirror Rotation Default Update To All Create Default design by checking corresponding box You may perform CUT OR or
23. ooting Resets Interferometer upon clicking It also forces a stage reset and initialization 20mm WriteH ead r e UNI directional Configuration file in use wm laser status indicator shown as off Change the configuration in DWL_MENU window by double clicking 20mm WiriteHead UNI directional You may choose between 4 mm min feature 800 nm and 20 mm min feature 4 um writehead and uni directional and gray scale writing Highlight the desired setup and press Load it button Click on OK in the popped up window Switch laser on using pulldown menu Laser Laser will be automatically turned off when you change configuration or close DWL66 MENU Laser worm up time is 3 min Check that the required writehead is installed If not change the writeheads 4 1 Unplug the motor and the piezo cables 4 2 Use 3 metric Allen wrench to loosen three screws see the picture below located on the top of the writehead Hold the writehead with one hand while you use the other to loosen the screws Push the writehead up while removing the screws Be careful that the writehead does not fall and damage the nozzle or the substrate chuck Carefully remove the writehead 4 3 Place the new writehead into the holder Push it up while you insert the screws Don t let the nozzle to touch the chuck Tighten the screws X wise while pushing up on the writehead Do not overtighten the screws Plug the motor and piezo
24. orm the gray scale exposure 1 DWL66 has an additional feature that allows the users to perform a 32 level grey scale exposure In the grey scale mode the photoresist can be exposed into different depths thus allowing to create the multiple step structures in the photoresist The patterns designed by Heidelberg can be found under File Designs in the DWL_MENU Two different patterns exist and the files are called Pyra and Grey The map folders have similar names 2 One must use dxf files for the grey scale exposure The design must contain several layers each layer representing one grey scale level The laser Energy can be chosen with the filters only Instead of a number ranging from 10 to 100 enter g in the Energy column of the job spreadsheet The grey scale writing takes about 8 times longer than the regular writing 3 When calibrating the grey scale create a design with 32 squares and vary the layer weight from 1 to 32 then write the design and develop Next check the linearity with the Tencor profiler The layer weight 1 should be barely exposed while the layer weight 32 should be exposed all the way There should be a linear depth dependence as a function of the layer weight If not adjust the laser energy by choosing a different filter and repeat After the energy is optimized work on the spot size correction How to perform metrology The measurement procedures are listed under
25. r close certain vacuum holes The following settings apply to the solid chuck three outer rows ara closed wo Outer rows of heles are closed all holes are open outer holes are closed To avoid the damage of the writehead check that the substrate is completely underneath Click on FOCUS to lower the writehead Make sure that the nitrogen is on otherwise the nozzle will crash into the sample Click on Yes to set the Defoc value To find the center of the sample go to Stage Find plate center in the DWL Control Panel Click on Start in the popped up window Click Yes after the procedure is finished This procedure assumes that your sample is square or standard rounded wafer Click on Expose to start the exposure The laser writer estimates the write time as it proceeds with the exposure If you hit the Enter key on the keyboard now the writing will terminate Therefore open another window over the Expose window to avoid this kind of accident After the exposure is finished the written fields turn green in the Map and a popped up window notifies you that the exposure is finished If any of the fields remain red it indicates an error during the exposure Click on Edit Report in the Expose window to get the report Click on Unload to remove your sample then hit Exit Click on INIT in the DWL Control Panel to return the stage to the home
26. rst measured site Click OK If the second site is not in the camera field click on Panel to open the DWL Control Panel window Move the stage to the second site Exit the DWL Control Panel window Position the green cross on the second site and click OK The distance and the corresponding X Y distances between the measured sites are displayed in the Distance Measurements window To view the chosen two sites again click on the Goto Site 1 or Goto Site 2 buttons 6 If you would like to perform multiple measurements and obtain the average distance set Repeat Measurement times to the desired number Click on Repeat Measurement to start the measurement Since you are in the manual mode every time the camera moves you need to click OK After the measurement is finished the average distance between two sites and the standard deviation will be shown as depicted in the picture below Following are the instructions for setting up a template for the automated measurement 1 Load the substrate click on INIT and FOCUS 2 Load the corresponding Map file by going to Setup gt New in the DWL_MENU menu 3 Find the desired structure in the Field zero die 4 Let s assume that we want to setup a measurement for measuring the line width of multiple lines Go to Measure Linewidth in the DWL MENU The Line Width Measurements window opens Click on
27. s mate Unigad iT DEBUG i are available The filters can be combined ME Always put the filter at the end of the railing and tighten it with Allen wrench The recommended Energy and the filter configuration for AZ1500 coated Cr plates can be found in the file parameters txt Go to File and Exit to save the Job 8 Go to Job Run Job Select from option menu what the system has to do after writing will be finished Auto Unload will put stage into unload position Job Log will save writing parameters into log file always checked Laser OFF recommended ias ri Heasure E Edn revon 9 10 11 12 Click on the LOAD The writehead moves up and the stage moves to the load position Check that the appropriate chuck is loaded The solid chuck is used for the standard front side exposures and or metrology The chucks with holes are used for the backside alignment When loading different chuck push it all the way in and to the left Be careful that the long o ring in the back does not slip out from the groove Do not bump into the writehead you may destroy the piezo crystal Load the sample on the chuck The resist covered side should face up Center the sample on the chuck Turn the vacuum switch in front of the chuck All vacuum holes must be covered by the sample Turn the white switches located in front of the stage to open o
28. ser energy and focus for other photoresists If you are using the Cr plates coated with 5300A of AZ1518 all necessary information for the proper exposure Energy Defoc value and the filter configuration can be found in the file parameters txt on the desktop When using different photoresist you need to perform the calibration of the laser energy and focus The patterns developed by Heidelberg for this purpose can be found under File gt Designs in the DWL_MENU The files are called Pfm and their names are self explanatory l First perform the laser energy test Write the same pattern 10 times using different laser energy The laser energy should vary from 10 to 100 in steps of 10 Develop To select the best energy investigate the pattern under the microscope Investigate the patterns going from the lowest to the highest energy If the energy is low the last two rectangles will be separated Look for the first image where the last two rectangles became connected That is the right energy You need to perform the focus calibration only for the 4 mm writehead Use the optimum laser energy as Energy and perform the focus calibration Pick 2047 as the middle Defoc value and move in steps of 100 up and down Expose multiple patterns by changing the Defoc value only develop and investigate under the microscope Optimum laser energy Optimum focus 14 How to perf
29. the same procedure with the following changes additions 1 2 DARA Keep in mind that you always expose the top surface of your sample You will use the top cameras macro and micro as explained in the previous section To turn the bottom camera on you need to select BS Check in the DWL Control Panel By deselecting the BS Check you will return to top cameras The menu listed under BS Focus allows you to control the movement of the bottom camera Click on Focus and the bottom surface of the substrate should be in focus Fine adjustment of the camera position e g Up step Up 10 steps and Down is also possible but we recommend not to use it since it will affect your back side calibration For the second layer exposure select the appropriate chuck with a hole Check that the BS Check in the Expose window is selected then click on Expose The ultimate goal is to achieve less than 400 nm misalignment for both writeheads The backside alignment design is called rkbs cif and one can find it in the Linux partition This pattern was designed for 20 mm writehead and converted as RKBS_L1 RKBS_L2 and RKBS_L3 There are three layers in this design L1 L2 and L3 and the design is symmetric The map folder is C WBMENU wafer RKBS 13 7 Use a 4 inch x 4 inch mask plate from Nanofilm Write the first layer pattern into the photoresits
30. ually this can be done several times Click on FOCUS to lower the writehead Move the lamp bar under Lmp in the DWL Control Panel to turn on the lamp An image will appear on the second LCD screen The second LCD screen is normally turned off you need to turn it on Go to Stage Find plate center in the DWL Control Panel to find the center of the sample Place the alignment feature the corner of the pattern into the center of the screen by selecting Move and clicking on the arrows in the DWL Control Panel Click on FS Macro Cam to switch to the FS Micro Cam Go to Setup New in the DWL_MENU to load the Map of the first layer pattern Double click C WBMENU wafer align for 4 mm head or C WBMENU wafer ali_ 20 for 20 mm writehead Double click on the map file and click on Set Environment to Click on Exit 11 10 Next you will align the coordinate system of the laser beam to the structures on the substrate 11 12 13 14 by performing a manual alignment Select the Field in the DWL Control Panel If you now click on the arrows you should move to the same feature in the next die Go to the highest die Optimize the camera settings DeFoc Lmp and Gn gain bars under the FS Micro Cam to achieve the best contrast Click on the Manual Align button WS in the DWL_MENU Select Align alo
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