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User`s Manual - OptoSigma Global Top

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1. BE o 00000 a SO a be a ES ooo oo i 2 S 2 L d L d SCALE x I E 5 5 q D Diagram 3 1 HIT S front side Driving current settings RUN current Driving current can be set with RUN potentiometer Its factory default is set to 0 75A Phase Pot Scale 0 1 2 3 4 5 6 e RUN current A Phase 0 0 17 0 35 0 66 0 75 0 9 11 oe Stopping current settings STOP current Electric current when the motor is stopped can be set with STOP potentiometer STOP current is set as a percentage of the RUN current Its factory default is set to approx 50 STOP current is normally set to approx 50 of RUN current Factory default setting 2 4 Vol Gradation 0 1 2 3 4 5 6 o STOP Current 0 10 21 35 50 60 68 076 12 Copyright 2014 SIGMAKOKI Co Ltd 3 2 Memory Switch settings The Memory Switches store the controller settings When changing Memory Switch settings use the Sample software HIT Sample which can be downloaded from http www sigma koki com 3 3 Memory Switch contents list and detailed settings 3 3 1 General No Memory Switch contents Setting Range Select items Default Value 1 Speed SEL 1 4 1 2 Speed 1 S 1 999999999 10000 3 Speed 1 F 1 999999999 100000 4 Speed 1 R 1 1000 200 5 Speed 2 S 1
2. Command Movement Detail H Return to mechanical origin Detect mechanical origin M Set number of pulses for Setting of Axis of movement direction number of pulses with relative movement relative coordinate A Set number of pulses for Setting of Axis of movement direction number of pulses with absolute movement absolute coordinate E Settings of rotary Circular interpolation Move at minimum speed S movement K Settings of linear Linear interpolation Move at minimum speed S interpolation movement J Jog command Move by minimum speed S G Execute command for Start to move moving L Stop Stop or reduce speed R Set electronic logical Set the electronic logical origin to the current position origin D Speed settings Set S F and R of M and A command C Free motor Excitation ON OFF S Switch number of steps Switch number of steps Full step at 0 729 Q Status1 Return current position etc Status2 Return 1 Busy or 0 READY 9 Internal information Return by internal information O I O output command Output data to OUT terminal of I O connector I O input check Return data to IN terminal of I O connector P Program control Internal program command B Setting of returning origin Setting of returning origin command S F R and M speed Z Mode change Switching to SHOT mode or HIT mode Close loop control works when A or M command is operated and scale is applied to position the sta
3. 0 A 28 4 1 HIT mode command ere 28 4 2 SHOT mode Command x cx cccn anne 43 4 3 Program functions c ccccccccccseesccsssseescsssssessssssssescessssessessssessessssssecesssnseseesssssessssuussseesssueseesssssseessnesensssserseessseds 55 4 4 Origin Reset e d TE 58 4 5 Emergency STOP teste ee 62 Chapter 5 Rotation Stage anaana anaana ana 63 S LA VT TEE 63 5 2 SHOT Mode Close loop contra 64 Chapter 6 Specifleations anaana aaan 65 ke KC 65 6 2 Connector Pin Assienments 67 ebe ef a xs ae aE aa cocina 70 3 Copyright 2014 SIGMAKOKI Co Ltd For Your Safety Before using this product read this manual and all warnings or cautions in the documentation provided Only Factory Authorized Personnel should be changes and or adjust the parts of controller The Symbols Used in This Manual WARNING CAUTION This symbol marks warnings that should be read This symbol indicates where caution should be used and used to prevent serious injury or death to avoid possible injury to yourself or others or damage to property The above indications are used together with the following symbols to indicate the exact nature of the warning or caution Examples of Symbols Accompanying Warnings and Cautions ASymbols enclosed in a triangle indicate warnings and cautions The exact nature of the warning or caution is indicated by the symbol inside the symbol at left indicates risk of electrocut
4. 70 130 ds 50 HIT S INDICATOR o KE e END SW E 8 g 2 o o of E of d io SIGMAKOKI CO LTD Tokyo Head Office SIGMAKOKI Tokyo Head office 19 9 Midori 1 chome Sumida ku Tokyo 130 0021 JAPAN Tel 81 3 5638 8228 Fax 81 3 5638 6550 e mail international sigma koki com Technology center 1 1 Yatsukaho Hakusan shi Ishikawa 924 0838 Japan 5th edition 2014 04 71
5. 4 1 18 O command Output data command 1 Function This command indicates output the data to the output terminal of I O connector 4 bit Output 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 OUT1 OFF ON OFF ON OFF ON OFF ON OFF ON OFF ON OFF ON OFF ON OUT2 OFF OFF ON ON OFF OFF ON ON OFF OFF ON ON OFF OFF ON ON OUT3 OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF ON ON ON ON OUT4 OFF OFF OFF OFF OFF OFF OFF OFF ON ON ON ON ON ON ON ON 2 Example 0 14 4 1 19 I command input data command 1 Function This command indicates iput the data to the input terminal of I O connector 4 bit Data O 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 IN1 OFF ON OFF ON OFF ON OFF VON OFF ON OFF ON OFF ON OFF ON IN2 OFF OFF ON ON OFF OFF ON ON OFF OFF ON ON OFF OFF ON ON INS OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF ON ON ON ON IN4 OFF OFF OFF OFF OFF OFF OFF OFF ON ON ON ON ON ON ON ON 2 Example Is Returned data 14 4 1 20 P command Internal program control command 1 Function This command indicates program number selection of internal program and Operate Stop Please refer to
6. ORG reset speed M TOP Move 0 5mm ORG reset speed S Detect ORG sensor 59 2 In case that ORG sensor is set beyond limit SW toward CW direction ORG sensor CW CCW sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Detect ORG sensor ORG reset speed M Snnnnnnnnnnn q Move 0 5mm ORG reset speed S Detect ORG sensor Caution1 In case that after detect CW CCW sensor stage move toward CCW direction and then can not detect ORG sensor in case of no ORG sensor stage stop at CCW CW sensor position 5 ORG4 for 4 sensor LS SD ORG use 1 In case that NEAR ORG sensor is on the inside of CW CCW sensor NEAR ORG sensor ORG sensor CW CCW sensor ORG reset speed F Detect NEAR ORG sensor ORG reset speed S Detect ORG sensor 60 G 2 In case that ORG sensor is beyond NEAR ORG sensor toward CW CCW direction ORG reset speed F NEAR ORG sensor ORG sensor CW CCW sensor Detect CW limit sensor ORG reset speed M Detect NEAR ORG sensor ORG reset speed S Detect ORG sensor Caution1 In case that after detect CW CCW sensor stage move toward CCW direction and then can not detect ORG sensor in case of no ORG sensor stage stop at CCW CW sensor position Caution 2 In case that after detect NEAR ORG sensor stage move toward CW direction and then can not detect ORG sensor in case of no ORG sensor stage stop at CW CCW sensor position 6 OR
7. When it is sent back with 450000 by Q command a position shows that it is 45 0000 degrees now 64 Chapter 6 Specifications 6 1 Specifications 1 General Specifications Master Power Supply Operating Temperature Storage Temperature Ambient Humidity Altitude Indoor use only Installation category Pollution degree External Dimensions Weight Slave Power Supply Operating Temperature Storage Temperature Ambient Humidity Altitude Indoor use only Installation category Pollution degree External Dimensions Weight 2 Performance Controlling Axis Axes Maximum Driving Speed F Minimum Driving Spped S Maximum No of travel pulse Acceleration Deceleration Time Sensor Input DC24V A 5 40 C 20 60 C 20 80 RH No Condensation up to 2000m I 2 130mm x 120mm x 50mm 620g DC24V 1A 5 40 C 20 60 C 20 80 RH No Condensation up to 2000m I 2 130mm x 120mm x 50mm 630g up to 8 axes 0 01 9999999 99um s 1 500000PPS 0 01 9999999 99um s 1 500000PPS 134217728 Pulse 134217727 Pulse R 1 1000ms Origin sensor Proximity sensor CW Limit CCW Limit Memory switches can be used to change input logic for sensors Interface RS232C Interface Communication Parameters Baud Rate e Data Bits 4800 9600 19200 38400 57600bps 8bit 65 O Parity None Stop Bit 1bit e Flow Control Hardware e Delimiters CR LF USB Interface Transmission Speed Full speed Mode 12Mbps Et
8. 999999999 30000 6 Speed 2 F 1 999999999 300000 7 Speed 2 R 1 1000 200 8 Speed 3 S 1 999999999 70000 9 Speed 3 F 1 999999999 700000 10 Speed 3 R 1 1000 200 11 Speed 4 S 1 999999999 100000 12 Speed 4 F 1 999999999 1000000 13 Speed 4 R 1 1000 200 14 MODE SEL SHOT HIT HIT 15 OUT Level Normal High Normal Low Normal High 16 LED ON ON OFF ON 1 SPEED SEL Speed selection at Power ON Select the initial setting Speed No at Power ON Setting Range 1 4 2 13 Speed 1 4 S F R Speed Setting Set 4 kinds of travel stage Speed minimum S maximum F and acceleration deceleration time R at Power ON Setting Range S 1 500000 Unit pulse s S 1 999999999 Unit 0 01um s F 1 500000 Unit pulse s F 1 999999999 Unit 0 01um s R 1 1000 Unit ms SHOT mode HIT mode SHOT mode HIT mode SHOTmode HITmode Minimum S values should be set smaller than maximum F at Speed Setting 13 Copyright 2014 SIGMAKOKI Co Ltd 14 MODE SEL Operation mode Settting Operation mode is set Select Item SHOT SHOT mode Compatible with SHOT 204MS SHOT 304GS HIT HIT mode 15 OUT Level I O Output signal logic Setting Select Logic Voltage level for I O output signal Select item Normal High Hi level Active low normally Normal Low Lo level Active High normally 16 LED ON Display setting for 7seg LED on HIT M and for LED display on HIT S
9. Set ON or OFF for 7seg LED on HIT M and for LED display on HIT S Select item ON Turn ON OFF Turn OFF OFF setting for LED is available only at normal condition At abnormal condition LED will be light 3 3 2 INTERFACE No Memory Switch contents Setting Range Select items Default value 1 INTERFACE RS232C USB Ethrnet RS232C 2 RS232C_FLOW ON OFF ON 3 Baudrate 4800 9600 19200 38400 57600 38400 1 INTFACE Setting for communication Interface Set communication method with HOST PC Select items RS232C RS232C Interface USB USB Interface Ethrnet Ethrnet Interface 2 RS232C_FLOW Flow control setting on RS232C Specify whether the controller will do flow control in RS232C communication Select item ON Hardware RTS CTS control OFF without Flow control 14 Copyright 2014 SIGMAKOKI Co Ltd 3 Baudrate Baudrate setting Set the data communication speed for the RS232C Interface Select item 4800 4800bps 9600 9600bps 19200 19200bps 38400 38400bps 57600 57600bps 3 3 3 Axis No Memory Switch contents Setting range Select items Default Value 1 Divide0 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 2 Divide1 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 3 Divide2 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 4 Divide3 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 5 Divide
10. direction at speed 3 on the Oth axis 2mm in the direction at speed 3 on the 1 axis 3MM at speed 4 on the 6 axis and 3mm in the direction at speed4 on the 7th axis output OUT10 with waiting 0 5second after completion of positioning In closed loop Execute ORIGIN return of 0 1 297 and 3 axis and output OUT5 then 10seconds wait ORIGIN return speed is set by each axis Execute 3axies linear travel linear interpolation at speed 30n o 1 3 axis move 100 microns 200 microns 300 microns moving sprrd of the long side of the rectangle output OUT1 with waiting 50 seconds after completion of positioning In closed loop nd rd 2 Execute circular interpolation movement linear travel at speed 4 on 2 axis and move 180 degrees from the current position in CW direction with keeping OUT1 and waiting 0 4seconds after completion of circular interporation in closed loop Wating input signal if INPUT is 3 execute next step Repating 1000 times 1 micron move at speed 1 at o axis with keeping OUT Quit 57 4 3 3 Issuing command in program execution Issuable commands when program is running are as below Status Read series Command Q Command Command UO control series Command O Command I Stopping command Command L Program control command Command P P E and P UO Commands unmentioned above will be treated as fault commands If they are issued NG will show 4 4 Origin Reset Setting Ther
11. 01um unit 2 Example K axis0 axis1 axis2 e0 e1 e2 axis0 axis1 axis2 0 7 means to designate the number of slave unit to operate linear interpolation movement Same number of slave unit or unconnect is prohibited To operate linear interpolation movement by 2 axes please abbreviate axis2 e Ended point coordinate e0 axisO setting value e1 axis1 setting value e2 axis2 setting value To operate linear interpolation movement by 2 axes please abbreviate axis2 unit of setting 0 01um unit K 1 4 10000 20000 Ended point coordinate is based on a relative coordinate of the current 4 axis position 0 1mm 0 2mm and move stages of slave unit No1 Slave unit No 4 linearly 1 axis 35 Copyright 2014 SIGMAKOKI Co Ltd 4 1 7 J command Jog command 1 Function This command indicates to drives stages continuously at a constant speed at the minimum pulse speed S During command operation stage will move non stop until the detection of limit sensor or receipt of Stop command L command 2 Example J s0 51 52 53 54 55 56 57 SC or abbreviated is direction is direction abbreviated is NOP No Operation DN E E Jog movement to Slave unit No1 is direction Slave unit No5 is direction Slave unit No6 is direction Slave unit No7 is direction No movement to Slave unit Not 2 4 4 1 8 L command Decelerate and stop command 1 Function Deceleration and stop stage 2 Example L p0 p1
12. 6 RUN Potentiometer INDICATOR DRIVER 2 No of Switch o RUN TE STOP 7 STOP Potentiometer O 8 Connector for Stage Driving 3 END Switch S 4 Scale Connector 39V 9 Power Supply Terminal DC 20000000 O LJ O 24V INK bh o H 5 LINK Connector O wf O 10 FG Terminal 1 INDICATOR LED Shows the HIT S condition When it is booted with no fault LED flashes In case of fault booting LED light is on 2 No Switch Sets the HIT S address Please refer to 2 2 Interface between HIT M and HIT S for further details 3 END Switch Sets the terminating node Please refer to 2 2 Interface between HIT M and HIT SJ for further details 4 Scale Connector Connects to the cable attached to the Glass Scale in use 5 LINK Connector Connects to a straight LAN cable for connecting HIT M and HIT S 6 RUN Potentiometer The current delivered when the motor is moving can be set by adjusting RUN potentiometer above Please refer to 3 1 settings for motor driving current for further details 7 STOP Potentiometer The current delivered when the motor is stopped can be set by adjusting STOP potentiometer above Please refer to 3 1 settings for motor driving current for further details 8 Connector for Stage Driver Connec
13. Black Motor 13 GND 6 GND 14 NEAR proximity detection 7 ORG Mechanical origin detection 15 Sensor Power Source 8 Sensor Power Source Connector XM2D 1501 By Omron used 67 6 2 3 SCALE1 8 Connector No Description No Description 1 GND 9 Alarm 2 GND 10 A 3 5V 11 A 4 5V 12 B 5 13 B 6 E 14 te 7 15 FG 8 Connector XM4L 1542 112 By Omron used 6 2 4 RS232C Connector 6 2 5 USB Connector No Description No Description 1 6 DTR 2 TxD 7 CTS 3 RxD 8 RTS 4 DSR 9 3 5 SG Connector XM3B 0922 132 By Omron used No Description No Description 1 2 3 DATA 2 DATA 4 GND Connector XM7B 0442 By Omron used 6 2 6 ETHERNET Connector No Description No Description 1 Tx 5 S 2 Tx 6 Rx 3 Rx 7 4 8 Connector J0011D21BNL By PULSE used 6 2 7 LINK Connector No Description No Description 1 5 S 2 6 DATA 3 DATA 7 4 8 Connector TM11R 5LF 88 50 By Hirose Electric used 69 6 3 Outlines 1 HIT M Outlines any 50 FA i 12 5 83 2 HIT S Outlines 120 UW 25 80 25 80 20 Il d FH TH 4 M3 120
14. M please refer to 3 4 LAN Settings 2 4 Power Supply Power supply should be done as instructed below Use DC24V for both HIT M and HIT S First switch HIT S on Next switch HIT M on 7 Seg LED on HIT M will show the No of axis of HIT S connected to HIT M for approx 4 seconds and dot in LED will start to flicker Please ensure to follow the Power Supply order instructed above because communication between HIT M and HIT S can not be completed when location of terminating node is unsure Note They can also be switched on at the same time When HIT M is switched on INDICATOR LED on HIT S flashes INDICATOR LED is still lighted when only HIT S is switched on or when fault interface has been made between HIT M and HIT S Communication between HIT M and HIT S can be made when INDICATOR LED flashes Please switch HIT M on once again when LED is still lighted Dot in 7Seg LED on HIT M flashes in good condition 11 Copyright 2014 SIGMAKOKI Co Ltd Chapter 3 Settings 3 1 Settings Motor Driving Current Motor driving current on HIT S should be set in accordance with stage in use RUN STOP Potentiometer is on the front side of HIT S Please refer to Diagram 3 1 Drive Current Potentiometer Potentiometer 2 4 D E STAGE li o S 90000000 0000000 O
15. M set HIT S set OHIT M Stage Controller OHIT S Stage Controller OUser s Manual This Manual CLAN Cable 0 6m 1 2 Overview This controller is a Multi Axes Moterized Stage Controller built in 5 Phase stepping motor Driver Maximum 8 axes connection possible Since micro step driver is installed it is possible to be done with high resolutional operation and positioning When HIT M is connected to an ordinary personal computer via an RS232C USB or LAN interface the stage can be accurately moved to the desired position by simple commands sent from the PC Copyright 2014 SIGMAKOKI Co Ltd 1 3 HIT M HIT S System Diagram Stepping motor specifications SGSP TSDM TAMM GOHIM series External I O control ge Please interface with Stage cable ce DMINIS CA 10120 3000PE by Sumitomo 3M Limited DBCS 15 lt p Control from PC Stepping motor specifications GSE CA Glass Scale compatible GS series cd p USB cable a Gr d LAN cable 1 1 Please use a crossover cable when directly connecting HIT M to PC and a straight cable Scape vobi when connecting through a HUB In case of connection between PC and HIT H directry please use cross cable and in case of connection through HUB please use straight cable Copyright 2014 SIGMAKOKI Co Ltd 1 4 Parts and Functions HIT M Front Panel SIGMA KOKI 1 7Seg LED 6 RS232C Connector z Gen 2 Emergency STOP Conne
16. identical for both axes Otherwise an interpolation movement will be unable to operate due to an incorrect setting Note if there is a difference in Base rate between slave units apparent speed S F R value and Microstep and Acceleration and Deceleration pattern Trapezoidal shape or S shape is same pulse speed and travel per pulse are different However the speed when operates the arc interpolation movement is minimum speed S Coordinate of arc movement is specified based on the relative travel from current position 0 01um unit E 0command Arc interpolation movement command 0 is a setting for the end of Coordinate In order to move out from a circular line as shown by the E 6 image right hand side the end movement of one axis Wy Quadrant 4 Quadrant 1 Yy My Ys when it reaches to a specified position in a quadrant and stop the interpolation function Then another Quadrant 1 Quadrant 4 axis move to reach the end point Note the specified end point as ended coordinate of arc interpolation inside the area of diagonal line the ado h point stage will move non stop and arc interpolation i A g H H Quadrant 3 movement is effective without end i Gasen Due to operation by calculation there is a calculation gt Quadrant 3 Quadrant 4 A error to the ended point of E 1 command Arc interpolation movement command 1 and E 2command Arc interpolation movement command 2 Pl
17. the whole command not being executed When commands are issued to a disconnected slave the command parameter of disconnected slave will be disregarded however commands to the other slaves will be executed normally 28 Copyright 2014 SIGMAKOKI Co Ltd 4 1 1 Command list Command Movement Detail H Return to mechanical origin Detect mechanical origin M Set number of pulses for Setting of Axis of movement direction number of pulses with relative movement relative coordinate A Set number of pulses for Setting of Axis of movement direction number of pulses with absolute movement absolute coordinate E Settings of rotary movement Circular interpolation Move at minimum speed S K Settings of linear interpolation Linear interpolation Move at minimum speed S movement J Jog command Move by minimum speed S L Stop Stop or reduce speed R Set electronic logical origin Set the electronic logical origin to the current position D Speed settings Set S F and R of M and A command C Free motor Excitation ON OFF S Switch number of steps Switch number of steps Full step at 0 729 Q Status1 Return current position etc Status2 Return 1 Busy or 0 READY Hd Internal information Return by internal information O I O output command Output data to OUT terminal of I O connector I O input check Return data to IN terminal of I O connector P Program control Intern
18. 0 01 um unit e Ended point coordinate unit of setting 0 01um unit E 2 2 7 5000 3000 8000 12000 Pass point coordinate and ended point coordinate are based on a relative coordinate of the current position 0 05mm 0 08mm and 0 08mm 0 12mm Then stages of slave unit No2 Slave unit No5 move circularly Axis 2 0 05mm 0 08mm 34 Copyright 2014 SIGMAKOKI Co Ltd 4 1 6 K command Linear interpolation movement command 1 Function This command indicates a designation of axis of movement and a designation of relative movement in order to operate linear interpolation movement Operation of linear interpolation movement is able to designate up to arbitrary 3 axes When this command is sent under condition of busy and unconnected of slave unit it will be responsed by NG as a command error and all command will stop to operate To operate an interpolation with this command a designation of S shape drive trapezoidal shape drive and pulse speed and travel per pulse must be identical for both axes Otherwise an interpolation movement will be unable to operate due to an incorrect setting Note if there is a difference in Base rate between slave units apparent speed S F R value and Microstep and Acceleration and Deceleration pattern Trapezoidal shape or S shape is same pulse speed and travel per pulse are different Coordinate of linear movement is specified based on the relative travel from current position 0
19. 0 01um s r Acceleration deceleration time range of setting 1 1000 unit ms m Intermediate speed range of setting 1 999999999 unit 0 01um s Note the condition of sSmSf Maximum speed calculated by pulse is 800000 pulse s In case of over speed setting travel 0 01um s unit OK will be returned but it will be treated as speed of 800000 pulse s B 5 10000 100000 200 50000 Setting start up speed by 0 1mm s Maximum speed by 1mm s Acceleration deceleration time by 200m and Intermediate speed by 0 5mm s to slave unit No5 4 1 22 Z command Mode change command 1 Function This command indicates the change of mode HIT mode or SHOT mode There are significant different in command format and parameter meaning travel pulse between HIT mode and SHOT mode Do not change the mode during under program operation The change of mode must be done after setting the initial value 2 Example Z p p 0 represents SHOT mode and 1 represents HIT mode Z 0 Changed to SHOT mode 42 Copyright 2014 SIGMAKOKI Co Ltd 4 2 SHOT mode command 4 2 1 Format of SHOT mode command This mode follows a specific pattern of SIGMA KOKI SHOT controller for 5 phase motor stage Therefor there are not available to use more than 4 axes stages in this mode Followings are the general format But please refer each command details as there may be a little different point in some commands code axistPnum Pnum Pnum Pnum Pnum is abl
20. 0 by Q command a position shows that it is 45 0000 degrees now 5 1 3 Speed Speed setting with memory switch in the case of a rotation stage or the speed to set by D command and B command a rotary angle set it in 0 0001 degrees unit second Example In the case of 300000 F speed shows 300 000 x 0 0001 degree 30 degrees s 63 5 2 SHOT Mode Close loop control Because set all items by a number of the pulses unit in the case of open loop control of SHOT Mode in the case of a Translation stage there is not the difference Do not use Base Rate and RES UNIT in the open loop control Only in the case of close loop control there is a difference following than a Translation stage in SHOT Mode 5 2 1 Setiting item Base Rate Memory SW Set the travel Rotaly angle per 1 full step pulse for each axis Setting Unit 0 001 RES UNIT Memory SW Set Scale resolution and direction Setting Unit 0 00001 Example Because a rotary angle per 1 pulse at the time of the full step is 0 005 degrees in the case of SGSP 120YAW Base Rate sets it to 5 When connect a rotary scale of 0 00018 degrees per 1 pulse set it with 18 in RES_UNIT 5 2 2 Command Status Acommand M command set a rotary angle with the integer of the 0 01 degrees unit The positional information that is sent back by Q command send back a position at an angle of a 0 0001 degrees unit now Example When turn 45 degrees by M command set it with M 1 P4500
21. 00 30000 100 18 RES UNIT1 30000 30000 100 19 RES_UNIT2 30000 30000 100 20 RES UNIT3 30000 30000 100 21 RES_UNIT4 30000 30000 100 22 RES _UNIT5 30000 30000 100 23 RES_UNIT6 30000 30000 100 24 RES_UNIT7 30000 30000 100 1 8 CONTO 7 Control method setting Set control method Open Loop control method Closed Loop control method for each axis Select item Open Open Loop control method Close Closed Loop control method 25 Copyright 2014 SIGMAKOKI Co Ltd 9 16 INPOS 0 7 Inposition range setting In case of Closed Loop setting condition set Inposition renge which is the range of stop position at stop completion for each axis Setting range 1 99 Point of view about INPOSITION range In the conition of closed loop control a positioning of stage is completed when a reading of scale reaches inside a range of INPOS And Setting value of 1 99 is based on 1 pulse resolution from glass scale Regarding to Scale resolution it depends on each stage so please refer to sensor resolution in each stage lt Example gt In case of sensor resolution 0 01pm Setting Value 1 INPOS range is 1x 0 01um 0 01um Setting Value 99 INPOS range is 99x 0 01 um 0 99um 17 24 RES_UNIT 0 7 Scale setting Set Scale resolution and direction Setting Range 30000 30000 input is reverse direction Unit is nm Reference Stage RES_UNIT TSDM GS 60 15 X 100 TS
22. 00F1000R200S100F1000R200 Set travel speed of axis 1 to 4 slave no 0 to 3 to S 100pps S100F1000R2008100F1000R200 F 1000pps R 200ms 4 2 13 C command Motor excitation ON OFF command 1 Function This command is to switch ON OFF the excitation of motor When excitation is OFF stage can be manually rotated It can be switched ON OFF by putting the gin digit of command 0 and 1 respectively ou Switch OFF the excitation of axis 1 oa o Switch ON the excitation of axis 4 2 Example Switch ON the excitation of axis 1 to 4 49 4 2 14 S command Divide number switching command 1 Function S command is to switch the step angle of motor number of partitions Select a step angle among settable 15 kinds of step angle with driver Assign the number of divide after the d digit of command Stepping motors rotate 500 steps with 0 72 degrees basic step angle per revolution which means minimum resolution of motor will be 0 72 degrees and the minimum resolution of the stage withimm lead pitch will be 2um 1mm 500 Minimum resolution can be altered by parting basic step angle Minimum resolution for close control should be set to half the scale resolution or less Partition numbers should be assigned on or after the 4 digit of command Multiple axes can not be assigned simultaneously Please assign the partition numbers to each axis No of 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 divides Step an
23. 1 AccelerationO Linear S Curve S Curve 2 Acceleration1 Linear S Curve S Curve 3 Acceleration Linear S Curve S Curve 4 Acceleration3 Linear S Curve S Curve 5 Acceleration4 Linear S Curve S Curve 6 Acceleration5 Linear S Curve S Curve 7 Acceleration6 Linear S Curve S Curve 8 Acceleration Linear S Curve S Curve 9 ORGO Speed S 1999999999 50000 10 ORGO Speed F 1999999999 500000 11 ORGO Speed R 1 1000 200 12 ORG1 Speed S 1 999999999 50000 13 ORG1 Speed F 1 999999999 500000 14 ORG1 Speed R 1 1000 200 15 ORG2 Speed S 1 999999999 50000 16 ORG2 Speed F 1 999999999 500000 17 ORG2 Speed R 1 1000 200 18 ORG3 Speed S 1 999999999 50000 19 ORG3 Speed F 1 999999999 500000 20 ORG3 Speed R 1 1000 200 21 ORG4 Speed S 1 999999999 50000 22 ORG4 Speed F 1999999999 500000 23 ORG4 Speed R 1 1000 200 24 ORGS Speed S 1 999999999 50000 25 ORG5 Speed F 1999999999 500000 26 ORG5 Speed R 1 1000 200 27 ORG6 Speed S 1 999999999 50000 28 ORG6 Speed F 1999999999 500000 29 ORG6 Speed R 1 1000 200 23 Copyright 2014 SIGMAKOKI Co Ltd 30 ORG7 Speed S 1 999999999 50000 31 ORG7 Speed F 1 999999999 500000 32 ORG7 Speed R 11000 200 33 ORGO Speed M 1999999999 250000 34 ORG1 Speed M 1999999999 250000 35 ORG2 Speed M 1999999999 250000 36 ORG3 Speed M 1999999999 250000 37 ORG4 Speed M 1999999999 250000 38 ORGS Speed M 199999999
24. 4 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 6 Divided 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 7 Divide6 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 8 Divide7 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 20 9 Base Rate0 1 1000 20 10 Base Rate1 1 1000 20 11 Base Rate2 1 1000 20 12 Base Rate3 1 1000 20 13 Base Rate4 1 1000 20 14 Base Rated 1 1000 20 15 Base Rate6 1 1000 20 16 Base Rate7 1 1000 20 17 Move0 POS NEG POS 18 Movel POS NEG POS 19 Move2 POS NEG POS 20 Move POS NEG POS 21 Move4 POS NEG POS 22 Move5 POS NEG POS 23 Move6 POS NEG POS 24 Move7 POS NEG POS 25 ORGO SEL 0 6 1 26 ORG1 SEL 0 6 1 15 Copyright 2014 SIGMAKOKI Co Ltd 27 ORG2 SEL 0 6 1 28 ORG3 SEL 0 6 1 29 ORG4 SEL 0 6 1 30 ORG5 SEL 0 6 1 31 ORG6 SEL 0 6 1 32 ORG7 SEL 0 6 1 33 ORG offset20 0 999999999 0 34 ORG offset21 0 999999999 0 35 ORG offset22 0 999999999 0 36 ORG offset23 0 999999999 0 37 ORG offset24 0 999999999 0 38 ORG offset25 0 999999999 0 39 ORG offset26 0 999999999 0 40 ORG offset27 0 999999999 0 41 EMG ExcitationO On Off On 42 EMG Excitation1 On Off On 43 EMG Excitation2 On Off On 44 EMG Excitation3 On Off On 45 EMG Excitation4 On Off On 46 EMG Excitation5 On Off On 47 EMG Excitation6 On Off On 48 EMG Excitation7 On Off On 1 8 DivideO
25. 7 Divide setting Set Divide for each axis Select range 1 2 4 5 8 1 0 20 25 40 50 80 1 00 1 25 200 250 9 16 Base Rate 0 7 Base Rate setting Set the travel distance per 1 full step pulse for each axis In case of closed loop control at HIT mode or SHOT mode connrect value must be set Otherwise it is not able to position correctly Setting Unit 0 1m Setting range 1 1000 0 1um 100um Reference TSDM amp SGSP20 amp SGSP26 SGSP33 SGSP YAW SGSP ACT TAMM Base Rate 10 20 40 120 5 16 Copyright 2014 SIGMAKOKI Co Ltd 17 24 Move 0 7 Travel direction setting 0 7axis Set travel direction for each axis Select item POS Positive rotation NEG Negative rotation 25 32 ORGO 6 SEL Origin reset method setting Set Origin reset method for each axis Select item 0 Origin reset OFF 1 ORG ORG2 ORG3 ORG4 ORGS 6 ORG6 a fF OO ND Regarding each method please refer to Origin Rest Method 33 40 ORG offset20 27 ORG offset setting Set ORG offset value for each axis ORG1 ORG5 ORG6 at the ORG reset Setting range 0 999999999 Unit 0 01 ym When Setting range is set 0 ORG offset value is 0 5mm 41 48 EMG Excitation 0 7 Motor Exitation setting at Emergency STOP Set Motor Exitation ON or OFF for each axis at at Emergency STOP Select item ON Exitation ON OFF Exitation OFF 17 Copyright 2014 SIGMAKOKI Co Ltd Origin Reset Method ORGO Not r
26. 9 250000 39 ORG6 Speed M 1999999999 250000 40 ORG7 Speed M 1999999999 250000 1 8 Acceleration0 7 Speed acceleration profile setting Set speed acceleration profile for each axis Select item 9 40 ORGO 7 Speed S F R M ORG reset speed setting Linear Trapezoidal control S Curve S curve control Set mechanical ORG reset speed minimum speed S maximum speed F acceleration time medium speed M for each axis Setting Range S 1 500000 Unit pulse s 1 999999999 Unit 0 01 um s F 1 500000 Unit pulse s F 1 999999999 Unit 0 01 m s R 1 1000 Unit ms M 1 999999999 Unit 0 01 um s M 1 500000 Unit pulse s SHOT mode HIT mode SHOT mode HIT mode SHOT mode HIT mode HIT mode SHOT mode Regarding Speed setting minimum speed S should be set smaller than maximum speed F and medium speed M Copyright 2014 SIGMAKOKI Co Ltd 3 3 6 Close No Memory Switch contents Setting Range Select item Default value 1 CONTO Open Close Open 2 CONT1 Open Close Open 3 CONT2 Open Close Open 4 CONT3 Open Close Open 5 CONT4 Open Close Open 6 CONT5 Open Close Open 7 CONT6 Open Close Open 8 CONT7 Open Close Open 9 INPOSO 1 99 2 10 INPOS1 1 99 2 11 INPOS2 1 99 2 12 INPOS3 1 99 2 13 INPOS4 1 99 2 14 INPOS5 1 99 2 15 INPOS6 1 99 2 16 INPOS7 1 99 2 17 RES_UNITO 300
27. Arc interpolation movement command 1 Function Set final central coordinates for execution of arc interpolation to relative coordinates pulse rate against current position Activation command G is necessary after execution of this command Rotation is made clockwise at all times The axis which executes arc interpolation is available in setting only between axis 1 slave no 0 and axis 2 slave no 1 and not applicable to the alterations The speed of axis 1 amp 2 S F R travel per pulse and acceleration deceleration speed formula between trapezoidal shape and S shape need to be set to same values on two different axes 46 Copyright 2014 SIGMAKOKI Co Ltd However travel speed is set to speed S for arc interpolation 2 Example E W P0 P0 P5000 P0 Travel clockwise like drawing a circle against the relative center G 4 J J of 5000 pulse position on the first axis as X and the 0 pulse Final coordinates Central coordinates position on the second axis as Y and then stop at the current position Final coordinates are to be assigned in command E However in case when the circular arc is dislocated as shown in the right figure interpolation operation terminates at the position where the other axis reaches final position with final quadrant then it travels to final coordinates Please note that it cannot be terminated and the operation will continue permanently when diagonal line in the right figu
28. DM GS 80 20 X 100 TSDM GS 60 10ZF 100 SGSP GS 26 50 X 100 SGSP GS 26 125 X 100 SGSP CS 20 85 X 500 SGSP CS 26 100 X 500 SGSP CS 26 200 X 500 26 Copyright 2014 SIGMAKOKI Co Ltd 3 4 LAN settings LAN settings for HIT M Connect PC and HIT M using LAN Regarding interface between PC and LAN please refer to 2 3 Interface with PCJ Activate HIT Sample 43 Sample for HIT Ver 1 0 7 TER File Communication Mode so Limit 54 Limit JEE Et LO OA PERS cd Neel Tea ahah Speed F Speed F Divide Divide Alarm Alarm O BUSY O READY O BUSY O READY O R s1 Limit 55 Limit Speed F Speed F E Divide Divide I E Alarm Alarm k BUSY O READY O BUSY O READY O ES s2 Limit 56 Limit Speed F Speed F Divide Divide Alarm Alarm e 1 O check SE BUSY O READY O BUSY O READY O e o C e IN IN2 IN3 IN4 100000 outi Cours Fours our4 83 Limit S7 Limit Speed F Speed F ae Divide Divide f Alarm Alarm READY BUSY READY O B y O Figure 3 2 Sample software Select LAN as interface from communication settings on menu bar Open communication settings Figure 3 3 from menu bar
29. G5 for 3 sensor use LS ORG Z phase ORG sensor Z phase CW CCW sensor ORG reset speed F Detect CW limit sensor ORG reset speed F bs nnnnnnnne Move to offset position ORG reset speed S Detect ORG sensor Z phase 61 7 ORG6 for 3 sensor use LS ORG Z phase ORG sensor Z phase CW CCW sensor ORG reset speed F Detect CW limit sensor ORG reset speed F bh ennnnnnne Move to offset position ORG reset speed S After detect ORG sensor move to 0 5mm position ORG reset speed S Detect ORG sensor Z phase 4 5 Emergency STOP The connector model MSTB2 5 2 GF 5 08 PHOENIX CONTACT Inc is used When in use connect a plug component MSTB2 5 2 STF 5 08 PHOENIX CONTACT Inc that attached to the product The EMG_STOP switch operates in the logic of Normal Close Attach a jumper wire while normal operation Please note that EMG STOP is triggered at the rising edge from CLOSE to OPEN It is not triggered by the signal level For each slave axes the motor excitation ON OFF status during activation of the EMG STOP is selectable Use memory switch No 130 to No 137 EMG Excitation for this setting Controller 39V L y TLP280 4 HE A Ni E Va r z Emergency Stop Switch B type Switch Close gt Normal Switch Open gt Stop Fig 4 5 1 An Example of EMG_STOP Switch connection 62 Chapter 5 Rotation Stage Mainly list
30. I O and P commands are acceptable 4 2 17 command Read command of Internal information 1 Function It responds internal information of controller 2 Example P axis P Parameter letters Refer to the below table Assign Axis 1 4 or W all axes Assign only when parameter letter is P S D or B Otherwise it is abbreviated Parameter letter Data responded Examples of data responded N Device name HIT M V Version V1 00 Subversion 001 Z Mode 0 SHOT MODE 1 HIT MODE P Travel per pulse um 1 00 1 00 2 00 1 00 2 00 S Number of partitions 2 2 2 20 10 D Travel speed S100F1000R200 B Origin return speed 1000 500000 100 200000 L Program running status Program No Program Run Line No residual Loop counter e g 2 1 13 4 13 line of Program No 2 is running and count left from loop is 4 52 4 2 18 O command Data Output command 1 Function Output the data of 4 bit through output terminal of I O connector Output 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 value OUT1 OFF ON OFF ON OFF ON OFF ON OFF ON OFF ON OFF ON OFF ON OUT2 OFF OFF ON ON OFF OFF ON ON OFF OFF ON ON OFF OFF ON ON OUT3 OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF ON ON ON O
31. N OUT4 OFF OFF OFF OFF OFF OFF OFF OFF ON ON ON ON ON ON ON ON 2 Example 0 14 4 2 19 command Data Input command 1 Function Data values of 4 bit at input terminal of I O connector are responded Data 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 values IN1 OFF ON OFF ON OFF ON OFF VON OFF ON OFF ON OFF ON OFF ON IN2 OFF OFF ON ON OFF OFF ON ON OFF OFF VON ON OFF OFF ON ON IN3 OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF ON ON ON ON IN4 OFF OFF OFF OFF OFF OFF OFF OFF ON ON ON ON ON ON ON ON 2 Example 14 Data responded 4 2 20 P command Embedded program control command 1 Function This command directs program No selection and execution stop of embedded program Refer to chapter 4 for further explanation 2 Example p P S E UO U1 can be assigned P Equal to Pn Program No can be selected into n and within 0 to 9 Any numbers apart from those will be recognized as an incorrect command and responded by NG sign Default value is set to 0 exe P P2 Select program No 2 Start program Selected program will start Terminate program Program will end at the point of when ongoing operation finishes once the termination command has been recognized 53 U0 Pause program Program will pause at the point of when ongoing operation finishes once the command ha
32. Open and in micron in Closed loop Open and Closed loop is able to be specified by each axis In case of closed loop control positioning is completed within the range of INPOS after reading scale 2 Example A 1 P100 G A 4 P100 G A W P100 P50 P150 P200 G A W P100 P50 P0 P200 G Travel 100 pulses in the direction on the first axis In open Travel 100 micron in the direction on the first axis In closed loop Travel 100 pulses in the direction on the 4th axis Slave No 3 In open Travel 100 microns in the direction on the 4th axis Slave No 3 In closed loop Travel 100 pulses in the direction on the 1st axis 50 pulses in the direction on the 2nd 150 pulses in the direction on the 3rd axis and 200 pulses in the direction on the 4th axis In open Travel 100 microns in the direction on the 1st axis 50 microns in the direction on the 2nd 150 microns in the direction on the 3rd axis and 200 microns in the direction on the 4th axis In closed loop Travel 100 pulses in the direction on the 1st axis 50 pulses in the direction on the 2nd move to electrical logical ORIGIN on the 3rd axis and 200 pulses in the direction on the 4th axis In open Travel 100 microns in the direction on the 1st axis 50 microns in the direction on the 2nd move to electrical logical ORIGIN on the 3rd axis and 200 microns in the direction on the 4th axis In closed loop 4 2 5 E Command
33. Settings for HIT M in use will also be applied to host and port 6 LAN settings Figure 3 4 will pop up by clicking initial settings on Communication settings Figure 3 3 Click OK after setting IP address on Figure 3 4 LAN settings in accordance with PC condition 42 LAN Detail Settings IP Address Subnet mask ASS LAN Settings 192 168 0 1 Default route gateway 0 0 0 0 The IP address of the permits passive open 255 255 255 0 Port number 9004 partner host who mr Host 0 000 5 0 00 0 19216801 5000 6 0 0 0 0 Rai Timeout BE 0 0 0 0 7 0 0 0 0 9004 5 CRO 0 0 0 0 8 0 0 0 0 OK Cancel Figure 3 4 LAN settings Setting Figure 3 3 Communication settings Redo PC settings according to new LAN settings when any changes have been made in settings 27 Copyright 2014 SIGMAKOKI Co Ltd Chapter 4 Feature 4 1 HIT mode command 4 1 1 Format of HIT mode command This mode can operate up to 8 axes General format is shown below Some formats are different depending on type of command Please refer to each command explanation for details code p0 p1 p2 p3 p4 p5 p6 p7 code Use a string to represent a command Command separation Colon p0 p7 Use command to separate and assign number of slave unit 0 7 Only integer values can be used as parameter values A decimal number is an incorrect command and will be responsed by NG sign can be abbrev
34. Travel 100 pulses in the direction on the first axis In open Travel 1000 microns in the direction on the first axis In closed loop Travel 100 pulses in the direction on the 4th axis Slave No 3 In open Travel 100 microns in the direction on the 4th axis Slave No 3 In closed loop Travel 100 pulses in the direction on the 1st axis 50 pulses in the direction on the 2nd 150 pulses in the direction on the 3rd axis and 200 pulses in the direction on the 4th axis In open Travel 100 microns in the direction on the 1st axis 50 microns in the direction on the 2nd 150 microns in the direction on the 3rd axis and 200 microns in the direction on the 4th axis In closed loop Travel 100 pulses in the direction on the 1st axis 50 pulses in the direction on the 2nd not move on the 3rd axis and 200 pulses in the direction on the 4th axis In open Travel 100 microns in the direction on the ist axis 50 microns in the direction on the 2nd not move on the 3rd axis and 200 microns in the direction on the 4th axis In closed loop 45 Copyright 2014 SIGMAKOKI Co Ltd 4 2 4 A command Absolute movement command 1 Function This command is to specify the axis of travel direction and the travel distance number of pulses This command must always be followed by a drive G command Travel is by means of acceleration deceleration driving The distance travel is specified in pulses in
35. User s Manual Link controller for multi axes stages HIT M HIT S OptoSigma Copyright 2014 SIGMAKOKI Co Ltd Notes regarding these materials These materials are intended as a reference to assist our customers in the use of the SIGMAKOKI CO LTD Product best suited to the customer s application they do not convey any license under any intellectual property rights or any other rights belonging to SIGMAKOKI CO LTD or a third party SIGMAKOKI CO LTD assumes no responsibility for any damage or infringement of any third party s rights originating in the use of any product data diagram charts programs or algorithms contained in these materials All information contained in these materials including product data diagrams charts programs and algorithms represents information on products at the time of publication of these materials and are subject to change by SIGMAKOKI CO LTD without notice due to product improvements or other reasons When using any or all of the information contained in these materials including product data diagrams charts programs and algorithm please be sure to evaluate all information and products SIGMAKOKI CO LTD assumes no responsibility for any damage liability or other loss resulting from the information contained herein SIGMAKOKI CO LTD products are not designed or manufactured for use in equipment or system that is used under circumstances in which human life is poten
36. al program command B Setting of returning origin Setting of returning origin command S F R and M speed Z Mode change Switching to SHOT mode or HIT mode Close loop control works when A or M command is operated and scale is applied to position the stage inside a range of INPOS During operation of close loop control a return of position information by Q command is a scale number 29 Copyright 2014 SIGMAKOKI Co Ltd 4 1 2 H command Return to mechanical origin command 1 Function This command indicates detect the mechanical origin for a stage and set the position as the origin Coordinate value is cleared by 0 When the designated slave number with parameter is 1 the mechanical origin will be operated No operation to 0 or abbreviated slave unit 2 Example H 1 1 0 means to operate the mechanical origin to slave number 0 and 1 4 1 3 M command Relative movement command 1 Function This command indicates relative movement with pulse number Travel is a length and indicates by 0 01um unit Controller enables to output number of pulse 134217728 to 134217727 In case of the over number NG will be returned and stage will not move Note The above limitation is conflicted when a high microstep is set When close loop is set a positioning is completed when a reading of scale reaches inside a range of INPOS 2 Example M 100000 20000 30000 means to move from current position 1mm 0 2mm a
37. anner not specified by the SIGMAKOKI CO LTD the protection provided N WARNING Do not use this product in the presence of flammable gas explosives or corrosive substances in areas by the equipment may be impaired exposed to high levels of moisture or humidity in poorly ventilated areas or near flammable materials e Do not connect or check the product while the power is on O Installation and connection should be performed only by a qualified technician Do not bend pull damage or modify the power or connecting cables Do not touch the products internal parts O Connect the earth terminal to ground Should the product overheat or should you notice an unusual smell heat or unusual noises coming from the product turn off the power immediately Do not turn on the power in the event that it has received a strong physical shock as the result of a fall or other accident Do not touch the stage while operation Use dry clothes only for cleaning the equipment Copyright 2014 SIGMAKOKI Co Ltd Chapter 1 Before You Begin 1 1 Package Contents Purchasers of the Stage Controller should find that the package contains the items listed below Check the package contents using the following checklist Contact your retailer as soon as possible in the event that you should find that any item is missing or damaged As HIT M or HIT S is selling indivisually please take care of this point when you purchase E HIT
38. ctor 3 I O Connector STOP 7 USB Connector RS232C 8 LINK Connector U 5 ZS 4 Power Supply Terminal A 24v Ci A 5 FG Terminal 9 ETHERNET Connector 7 JHNY3H13 CH Nes J 1 7 Segment LED When Power DC24V is supplied it shows No of axis connected for approx 4 seconds then dot in LED box flashes 2 Emergency Stop Connector It connects with Emergency Stop Switch Please refer to 14 5 Emergency STOP for further details 3 I O Connector It interfaces with input output signal for external devices 4 Power Supply Terminal Supply Power DC 24V 1A 5 FG Terminal It is Terminal for Frame Ground Please connect to Earth in the actual environment 6 RS232C Connector When control by RS232C Interface through PC please use RS232C 7 USB Connector When control by USB Interface trough PC please use USB 8 LINK Connector In case of connection between HIT M and HIT S connect with using attached straight LAN cable 9 ETHERNET Connector In case of connection through Ethernet from PC connect with using straight or cross LAN cable VAN Make sure to set up and wire the cable supplying DC 24V and FG GND to the HIT M so that the maximum length of cable is not longer than 2m VAN For your own safety make sure POWER is OFF before connecting every cable Copyright 2014 SIGMAKOKI Co Ltd HIT S Front Panel 1 INDICATOR LED o D
39. d Please refer to table below regarding whether or not each parameter by command code can be omitted indicates cannot be omitted o omittable in circumstances and be omitted at all times in table below Command Axis Parameter Speed Out Wait 2 BID O O D ER D D M O O0O 0 0 0 0 0 0 0 0 0 0 0 0 0 0 O O A O O 0 0 0 0 0 0 0 0 0 0 0 0 0 0 O O H O O 0 0 0 0 0 0O O O K O 0 0 0 0 0 0 O O E O 0 0 0 0 0 0 0 0 O O O p p p Sup ger O RS ps a F Ola e uso my o be N E pes les eps ie Es rs eae ME SANGE y DEN EA se fe E AE DES EA DEN EEN EH EE EEN EENG 56 4 3 2 Program Examples 1 M 1000 1000 1000 1000 1 2 2 1 15 100 2 A 200000 200000 300000 300000 3 3 4 4 10 5 3 H 1 1 1 1 0 0 0 0 5 100 4 K 0 1 2 10000 20000 30000 3 1 500 5 E 1 2 3 0 1000000 1000000 180 4 6 3 7 F 1000 8 M 100 1 9 N 10 Y o o No 10 Travel 10 microns in the direction at speed 1 on the Oth axis 10 microns in the direction at speed 2 on the 1 axis 10 microns at speed 2 on the 6 axis and 10 microns in the direction at speed on the 7th axis output out 15 with waiting 10seconds after completion of positioning In closed loop Travel 2mm in the
40. e Normal OPEN 21 Nsensor Level4 Normal Open Normal Close Normal OPEN 22 N sensor Level5 Normal Open Normal Close Normal OPEN 23 Nsensor Level6 Normal Open Normal Close Normal OPEN 24 Nsensor Level Normal Open Normal Close Normal OPEN 1 8 L sensor Level 0 7 Limit sensor input logoc level setting 0 7axis Select limit sensor detecting level Input logic level for each axis Select item Normal Open Normally switch ON by detecting limit sensor ffom SW OFF condition Normal Close Normally switch OFF by detecting limit sensor from SW ON condition 9 16 O sensor Level 0 7 ORG sensor input logic level setting 0 7axis Select ORG sensor detecting level Input logic level for each axis Select item Normal Open Normally switch ON by detecting ORG sensor from OFF condition Normal Close Normally switch OFF by detecting ORG sensor from ON condition 22 Copyright 2014 SIGMAKOKI Co Ltd 17 24 N sensor Level 0 7 NEAR ORG sensor input logic level setting 0 7axis Select NEAR ORG sensor detecting level Input logic level for each axis Select item Normal Open Normally switch ON by detecting NEAR ORG sensor from OFF condition Normal Close Normally switch OFF by detecting NEAR ORG sensor from ON condition 3 3 5 Speed No Memory Switch contents Setting Range Select item Default value
41. e are six types in Origin Reset setting Please select optimal Origin Reset setting for stage in use depending upon software There are two parameters to do with Origin Reset which are Origin Reset Speed S F R M and Origin offset ORG offset Parameters of each slave can be individually set Please select the optimum value according to the software In case of when PGO Z pulse is used as an Origin sensor ORG5 or ORG6 Origin sensor is not in need at stage since Excitation Reset of motor driver is used 1 ORGO Not reset ORGIN position 2 ORG1 MINI method compatible however stage moves to ORG offset value CW CCW Sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Move 0 5mm bh nnnnnnnnnnnnnnnnne ORG reset speed S O ORG reset speed M Detect CW limit sensor Move to offset position 58 3 ORG2 MIDDLE method CW CCW Sensor ORG reset speed F Detect CW limit sensor ORG reset speed M bh ee Move 0 5mm ORG reset speed S Detect CW limit sensor ORG reset speed F Detect CCW limit sensor ORG reset speed M Snnnnnnnnnnnnsnne Move 0 5mm ORG reset speed S Detect CCW limit sensor ORG reset speed M TOPCO q Move to halfway point between CW CCW sensor LS halfway point 4 ORG3 for 3 sensor use LS ORG 1 Incase that ORG sensor is set on the inside of CW CCW sensor ORG sensor CW CCW Sensor ORG reset speed F Detect ORG sensor
42. e of no ORG sensor stage stop at CCW CW sensor position 19 Copyright 2014 SIGMAKOKI Co Ltd 6 ORG4 for 4 sensor LS SD ORG use 1 Incase that NEAR ORG sensor is on the inside of CW CCW sensor NEAR ORG sensor ORG sensor CW CCW sensor ORG reset speed F Detect NEAR ORG sensor ORG reset speed S Detect ORG sensor G 2 In case that ORG sensor is beyond NEAR ORG sensor toward CW CCW direction ORG reset speed F NEAR ORG sensor ORG sensor CW CCW sensor Detect CW limit sensor ORG reset speed M Detect NEAR ORG sensor ORG reset speed S Detect ORG sensor Caution1 In case that after detect CW CCW sensor stage move toward CCW direction and then can not detect ORG sensor in case of no ORG sensor stage stop at CCW CW sensor position Caution 2 In case that after detect NEAR ORG sensor stage move toward CW direction and then can not detect ORG sensor in case of no ORG sensor stage stop at CW CCW sensor position 20 Copyright 2014 SIGMAKOKI Co Ltd ORG5 for 3 sensor use LS ORG Z phase ORG sensor Z phase CW CCW sensor ORG reset speed F Detect CW limit sensor ORG reset speed F Sr Move to offset position ORG reset speed S Detect ORG sensor Z phase D ORG6 for 3 sensor use LS ORG Z phase ORG sensor Z phase CW CCW sensor ORG reset speed F Detect CW limit sensor ORG reset speed F nnnnnnnne Move to offs
43. e to specify and set from 1 to 4 In case of multipul axes this should be set W Pnum is applied 1 to 4 Slave number is 0 to 4 in order from the left code Use a string to represent a command Command separation Colon Axis 1 to 4 Slave number is 0 to 4 or W In case of multiple number setting e In SHOT mode please note that the axis number is one more than the slave number as above Specify the movement direction P delimiter letter to moveing distance num Spexcify the moving distance by puls numbers However in case of M and A commands in closed loop it is specified the distance asmicrons This value should not be decimal If it is decimal it will be returned NG due to devious command Capital or lower case characters can used Example h and H are both valid for the Home command Backspace is available to delete one character adjacent Command string must not have leading or trailing spaces Otherwise the command string will not be accepted and NG will be returned as a command error If commands which are Q are issued correspondent status will be retured In case of other commands it will be returned OK correct acceptance or NG Reject cceptance due to devious commands In case of command use like drive commands which are M A E K and J except H it needs to be activate command G 43 Copyright 2014 SIGMAKOKI Co Ltd 4 2 1 Command list
44. ease check the actual stage 31 Copyright 2014 SIGMAKOKI Co Ltd 4 1 5 1 E 0 command Arc interpolation movement ommand O 1 Function This command indicates a designation of ended point and center point in order to operate the arc movement 2 Example E 0 axis0 axis1 d e0 e1 c0 c1 axis0 axis1 0 7 means to designate the number of slave unit to operate arc interpolation movement Same number of slave unit or unconnect is prohibited Axis 0 represents X axis andaxis 1 represents Y axis d 0or1 0 is CW rotation Clockwise 1 is CCW rotation Counterclockwise e Ended point coordinate e0 axis0 setting value e1 axis1 setting value unit of setting 0 01 um unit c Center point coordinate c0 axis0 setting value c1 axis1 setting value unit of setting 0 01um unit E 0 2 5 0 0 0 5000 5000 A center point coordinate is based on a relative coordinate of the current position 0 05mm 0 05mm and move stages of slave unit No2 Slave unit No5 one round clockwise until the current position Axis 5 Axis 2 32 Copyright 2014 SIGMAKOKI Co Ltd 4 1 5 2 E 1 command Arc interpolation movement command 1 1 Function This command indicates a designation of center point and degree of ended point in order to operate the arc movement 2 Example E 1 axis0 axis1 d c0 c1 ae axis0 axis1 0 7 means to designate the number of slave unit to operate arc interpolation movement Same number of slave unit or unconnect is prohibi
45. ed it to a foregoing chapter about a Translation stage but list it in this chapter about an item peculiar to a rotaion stage In the case of closing designation and HIT mode appoint movement distance by A command and the M command of the Translation stage in SHOT mode On the other hand in the case of Gonio Stage such as rotation stage or SGSP 60A75 such as SGSP 120YAW it is necessary to set it at a rotary angle not movement distance 5 1 HIT mode 5 1 1 Settting item Base Rate Memory SW Set the travel Rotaly angle per 1 full step pulse for each axis Setting Unit 0 001 RES UNIT Memory SW Set Scale resolution and direction Setting Unit 0 00001 Example Because a rotary angle per 1 pulse at the time of the full step is 0 005 degrees in the case of SGSP 120YAW Base Rate sets it to 5 When connect a rotary scale of 0 00018 degrees per 1 pulse set it with 18 in RES UNIT In addition the rotary angle per 1 pulse of the motor driver becomes 0 0001 degrees 0 005 50 when set Divide to 50 and becomes easy to treat it because agree with the 0 0001 degrees unit of A command and the M command 5 1 2 Command Status A command M command Set a rotary angle with the integer of the 0 0001 degrees unit The positional information that is sent back by Q command send back a position at an angle of a 0 0001 degrees unit now Example When turn 45 degrees by M command set it with M 45000 When it is sent back with 45000
46. eset ORGIN position ORG1 MINI method compatible however stage moves to ORG offset value CW CCW Sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Move 0 5mm bh nnnnnnnnnnnnnnnnne ORG reset speed S Detect CW limit sensor ORG reset speed M Move to offset position L Ce ORG2 MIDDLE method CW CCW Sensor ORG reset speed F Detect CW limit sensor ORG reset speed M bh rnsnnnnnnnnnnnnnnnn Move 0 5mm ORG reset speed S Detect CW limit sensor ORG reset speed F Detect CCW limit sensor ORG reset speed M OLLIE Move 0 5mm ORG reset speed S Detect CCW limit sensor ORG reset speed M Move to halfway point TOPCO q between CW CCW sensor LS halfway point 18 Copyright 2014 SIGMAKOKI Co Ltd ORG3 for 3 sensor use LS ORG 1 In case that ORG sensor is set on the inside of CW CCW sensor ORG sensor CW CCW Sensor ORG reset speed F Detect ORG sensor ORG reset speed M TOP Move 0 5mm ORG reset speed S Detect ORG sensor 2 Incase that ORG sensor is set beyond limit SW toward CW direction ORG sensor CW CCW sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Detect ORG sensor ORG reset speed M E q Move 0 5mm ORG reset speed S Detect ORG sensor Caution1 In case that after detect CW CCW sensor stage move toward CCW direction and then can not detect ORG sensor in cas
47. et position ORG reset speed S After detect ORG sensor move to 0 5mm position ORG reset speed S Detect ORG sensor Z phase 21 Copyright 2014 SIGMAKOKI Co Ltd 3 3 4 Sensor No Memory Switch Contents Setting Range Select item Default value 1 L sensor Level0 Normal Open Normal Close Normal CLOSE 2 L sensor Level Normal Open Normal Close Normal CLOSE 3 L sensor Level2 Normal Open Normal Close Normal CLOSE 4 L sensor Level3 Normal Open Normal Close Normal CLOSE 5 L sensor Level4 Normal Open Normal Close Normal CLOSE 6 L sensor Level5 Normal Open Normal Close Normal CLOSE 7 L sensor Level6 Normal Open Normal Close Normal CLOSE 8 L sensor Level7 Normal Open Normal Close Normal CLOSE 9 O sensor Level Normal Open Normal Close Normal OPEN 10 O sensor Level Normal Open Normal Close Normal OPEN 11 O sensor Level Normal Open Normal Close Normal OPEN 12 Osensor Level3 Normal Open Normal Close Normal OPEN 13 Osensor Level4 Normal Open Normal Close Normal OPEN 14 O sensor Level5 Normal Open Normal Close Normal OPEN 15 O sensor Level6 Normal Open Normal Close Normal OPEN 16 O sensor Level Normal Open Normal Close Normal OPEN 17 N sensor Level Normal Open Normal Close Normal OPEN 18 N sensor Levelt Normal Open Normal Close Normal OPEN 19 N sensor Level Normal Open Normal Close Normal OPEN 20 Nsensor Level3 Normal Open Normal Clos
48. ge inside a range of INPOS During operation of close loop control a return of position information by Q command is a scale number If command in busy condition except Q 7 L LL Q command is issued it return NG as malformed command and not execute the command If the command is issued to unconnected slave command parameter of unconnected slave is ignored and command parameter to the other slave will execute normally 44 Copyright 2014 SIGMAKOKI Co Ltd 4 2 2 H command Return to mechanical origin 1 Function Detect mechanical origin and set the position Origin The coordinate value will be cleared 2 Example Detect the mechanical origin for the first axis Slave No 0 Detect the mechanical origin for the second axis Slave No 3 Detect the mechanical origin for the first to 4 axis Slave No 0 to 3 4 2 3 M command Set number of pulses for relative travel 1 Function This command is to specify the axis of travel direction and the travel number of pulses This command must always be followed by a drive G command Travel is by means of acceleration deceleration driving The distance traveled is specified in pulses OPEN and CLOSED LOOP is able to be specified by each axis In case of closed loop control positioning is completed within the range of INPOS after reading scale 2 Example M 1 P100 G M 4 P100 G M W P100 P50 P150 P200 G M W P100 P50 PO P200 G
49. gle 0 72 0 36 0 18 0 144 0 09 0 072 0 036 0 0288 0 018 0 0144 0 009 0 0072 0 0058 0 0036 0 0029 Pulse 500 1000 2000 2500 4000 5000 10000 12500 20000 25000 40000 50000 62500 10000 12500 rates per 0 0 rev Resolution 2 1 0 5 0 4 0 25 0 2 0 1 0 08 0 05 0 04 0 025 0 02 0 016 0 01 0 008 um X At Closed Loop control method similar other than Original position and do not carry out S command When similar other than Original position and change motor step angle because a coordinate position changes work definitely and not carried out 2 Example Divide the step angle of axis 1 into 2 280 Devide the step angle of axis 2 into 80 4250 Devide the step angle of axis 4 into 250 50 4 2 15 Q command Status 1 command 1 Function It responds the coordinate value of each axis or controller status 2 Example Q status 1 command S 1000 1000 1000 1000 ACK1 ACK2 ACK3 Numbers parted by 4 commas from the left are coordinate values of axis 1 to 4 slave No 0 to 3 These values are set to be 10 digits except for commas Minus sign is to be added on the extreme left Plus sign is abbreviated Numbers are represented right aligned The value for open control is pulse rate and for close control is a distance unit is 0 01microns Note the difference in the units applied to the distance of the parame
50. hernet Interface Data Rate 10 100Mbps half duplex Maximum Data Length 256Byte Input 4 pin Photo coupler Input Internal Resistance 2 2kQ Output 4 pin Open collector Output Maximum Use Conditions DC24V 50mA 3 Driver Specifications Driver Type Bi polar pentagon micro steps system Driving Electric Current 0 1A Phase gt 1 1A Phase Current Down Division settings 0 1A Phase gt 0 7A Phase 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 divisions 4 Electrical Fast Transient Burst Noise EN61000 4 4 2004 Level 2 5 Surge Noise EN61000 4 5 2006 Level 2 6 Electrostatic Immunity EN61000 4 2 1995 A1 1998 A2 2001 Level 2 66 6 2 Connector Pin Assignments 6 2 1 I O Connector No Description No Description 1 IN COM 11 IN1 2 IN2 12 IN3 3 IN4 13 4 14 5 OUT1 H 15 OUT1 L 6 OUT2 H 16 OUT2 L 7 OUTS H 17 OUTS L 8 OUT4 H 18 OUT4 L 9 19 10 V DC24V 20 GND Connector 10220 52A2PE by Sumitomo 3M Limited used TLP280 Figure 5 2 1 IN1 4 Input Circuit Diagram TLP280 OUT H OUT L Figure 5 2 2 OUT1 4 Output Circuit Diagram 6 2 2 STAGE1 8 Connector No Description No Description 1 Blue Motor 9 GND Electromagnetic Brake 2 Red Motor 10 24V Electromagnetic Brake 3 Orange Motor 11 LS positive side Limit detection 4 Green Motor 12 LS negative side Limit detection 5
51. iated 1000 or 1000 is treated as the same command A travel or distance parameter of 1 is equal to 0 01um Parameter is abbreviated when NOP No Operation needs to be set to the designated slave unit number Note cannot be abbreviated Ex p2 p3 p4 p5 p7 Parameter of slave unit 0 and 1 is abbreviated p0 p2 p3 p4 p5 p7 Parameter of slave unit 1 and 6 is abbreviated p0 p1 Parameter of slave unit after 2 is abbreviated Capital or lower case characters can used Example h and H are both valid for the Home command Backspace is effective to delete a prior string Command string must not have leading or trailing spaces Otherwise the command string will not be accepted and NG will be returned as a command error Immediate movement will be made in case when activation commands such as H M A E K and J commands are accepted normally Unlike the SHOT mode the activation command G is not needed in HIT mode Activation command G is treated as an incorrect command in HIT mode When issuing Q or command its status will be responded In case which other commands are issued OK or NG sign will be responded OK and NG signs hereby mean normal acceptance and acceptance refused for an incorrect command respectively When other commands except Q L I O commands are issued to an engaged slave in busy condition NG sign will be responded for incorrect commands which will result in
52. ion OSymbols enclosed in a circle mark indicate prohibitions actions that must not be performed The exact nature of the prohibition is indicates by the symbol inside or next to the circle mark the symbol at left indicates that the product must not be disassembled Symbols inside a black circle mark actions that must be performed to ensure safety The exact nature of the action that must be performed is indicated by the symbol inside the symbol at left is used in cases in which the AC adapter must be unplugged to ensure safety Symbols on the product The symbol mark on the product calls your attention Please refer to the manual in the case that you operate the part of the symbol mark on the product This symbol labeled on the portion calls your attention Copyright 2014 SIGMAKOKI Co Ltd Disclaimer of Liability SIGMAKOKI CO LTD does not accept liability for damages resulting from the use of this product or the inability to use this product SIGMAKOKI CO LTD does not accept liability for damages resulting from the use of this product that deviates from that described in the manual SIGMAKOKI CO LTD does not accept liability for damages resulting from the use of this product in extraordinary conditions including fire earthquakes and other acts of God action by any third party other accidents and deliberate or accidental misuse If the equipment is used in a m
53. mmand indicates to return the current position information of 8 stages of slave unit No 0 7 0 01um unit The returned current position data is separated by mark represents when the current position is minus Maximum 10 digit including marking by left align display 2 Example Q 1000 1000 100 0 0 Return data current position of slave unit NoO is 0 0i1mm 0 01mm to slave unit No1 0 001mm to slave unit No2 no connection for slave unit No3 5 and Omm to slave unit No6 7 4 1 15 Q command Reading status command 1 Function This command indicates to return the status information of master and slave unit NoO 7 The returned data is separated by The status of the unconnected of slave unit No is abbreviated and display only 2 Example Q S stm sts0 sts1 sts2 sts3 sts4 sts5 sts6 sts7 stm 00 Master accepted the received command 01 Master rejected the received command due to wrong command Sts 00 FF Return the status of the slave unit No with hexadecimal number and 2 digit Each bit of Hexadecimal number and status are shown as table below A bit represented by 0 means undetected and 1 means detected 7 6 5 4 3 2 1 0 DRV alarm Scale alarm Z limit Near ORG LS LS Oor1 Dor Dor Oor1 Dor Dor Oor1 Example of returned data 00 01 02 01 means master accepted the received command Detect LS by Slave unit No0 and 7 detect LS by Slave unit No1 and Unconnected
54. nd 0 3mm to slave number 1 2 and 4 respectively 4 1 4 A command Absolute movement command 1 Function This command indicates Relative movement with pulse number Travel is a length and indicates by 0 01um unit Controller enables to output number of pulse 134217728 to 134217727 In case of the over number NG will be returned and stage will not move Actual length of travel is calculated automatically by controller from a specified absolute movement length value Note The above limitation is conflicted when a high microstep is set In the conition of closed loop control a positioning of stage is completed when a reading of scale reaches inside a range of INPOS 2 Example A 0 20000 30000 means to return to origin 0 0 2mm and 0 3mm of absolute position to slave number 1 2 and 4 respectively 30 Copyright 2014 SIGMAKOKI Co Ltd 4 1 5 E command Arc interpolation movement command 1 Function This command for arc interpolation movement enables to specify operation axis and rotation direction 3 different modes of parameter are available to operate the arc interpolation movement with arbitrary 2 axes When this command is sent under condition of busy and unconnected of slave unit it will be responsed by NG as a command error and all command will stop to operate To operate an interpolation with this command a designation of S shape drive trapezoidal shape drive and pulse speed and travel per pulse must be
55. or on 217 HIT S address 1 with straight LAN cable IN this case please set the END Switch on 2 HIT S address 1 ON 2 No Switch Up to 8 stages numbered from 0 to 7 can be controlled by setting address No s of HIT S with No Switch 3 Terminating node Please set terminating node by switching on END Switch in HIT S When a stand more than two displays plural HIT M HIT S and installs it please keep it away more than 20mm to a horizontal direction and vertical directions More than 20mm Sall lues E DEBE 9 More than 20mm Tur Tur seu mg 10 ok of f j of Copyright 2014 SIGMAKOKI Co Ltd 2 3 Interface with PC 1 RS232C Connection Please connect by using RS232C RS232C STR cable In this case please set the memory switch Interface to RS232C 2 USB Connection Please connect by using USB cable In this case please set the memory switch Interface to USB 3 LAN connection Please connect by using LAN crossover cable LAN CA However please use straight LAN cable when connecting via HUB Then set Memory Switch INTFACE to Ethrnet 192 168 0 1 and 255 255 255 0 are set as default value for IP address of HIT M and Subnet Mask respectively Please set IP address for PC to 192 168 0 X X can be any number from 0 to 255 and Subnet Mask 255 255 255 0 in order for PC to be able to communicate with HIT M With regard to LAN settings for HIT
56. p2 p3 p4 p5 p6 p7 p 0 1 or abbreviated 1 is to decelerate and stop stage of the slave unit number 0 or abbreviated are NOP No Operation L 1 1 To decelerate and stop stage of the slave unit No2 and 3 4 1 9 L E command Emergency stop Immediate stop command 1 Function This command indicates to stop stages of all slave units immediately 2 Example L E means to stop stages of all slave units immediately 36 Copyright 2014 SIGMAKOKI Co Ltd 4 1 10 R command Return to logical origin command 1 Function This command indicates a setting of logical origin coordinate value O to the stage of the designated slave unit number based on the current position When this command is sent under condition of busy and unconnected of slave unit it will be responsed by NG as a command error and all command will stop to operate 2 Example R p0 p1 p2 p3 p4 p5 p6 p7 p 0 1 or abbreviated 1 is to set the logical origin to the stage of the slave unit number 0 or abbreviated are NOP No Operation R 1 1 means to set the logical origin coordinate value O to the stage of the slave unit number 2 and 3 4 1 11D command Speed setting command 1 Function This command indicates a speed setting to the designated slave unit number It is unable to set the multiple number of slave unit at the same time When this command is sent under busy condition of slave unit it will be responsed by NG as a command error and all command will s
57. ple Z p p 0 is to be switched into SHOT mode and 1 into HIT mode Z 1 It is to be switched into HIT mode 54 4 3 Program functions 10 kinds of program numbered 0 to 9 can be stored in HIT M controller These programs are stored in unerasable memory which means they will not be erased even when POWER goes OFF Maximum capacity for each program is 1024 lines Please use tool software by Sigma Koki when composing editing loading and saving programs Please set distance modulus unit 0 01um as positioning parameter for HIT SHOT mode and OPEN CLOSE control Please be aware of that abnormal positioning may occur when Base Rate value on Memory Switch has been misset Speed No appointed with Memory Switch is used for travel speed Travel speed is appointed based on distance modulus and No of PULSE in HIT mode and SHOT mode respectively 4 3 1 Program data format There is a command in a line in this program Each command consists of up to 20 fields and each field is distinguished by a comma Different fields are needed depending on type of movement command EIERE DD DIO DIO D W No Command Parameter Speed Selection out wait Line No Any number between 1 and 1024 can be used but it should be a consecutive number of the previous one 2 Command code Relative travel positioning Absolute travel positioning Origin return Linear Inter
58. polation movement capable of up to 3 axes Circular Interpolation movement d mA P S IO terminal input confirmation Setup repeating No 1 2 147 483 or 647 can be input z mm Stop repeating movement Y Exit program Y should be used for command code for last line in program Repeated loop nesting between F and N is not applicable Travel distance of axis O to 7 In case of M A H K E it is equal to command specification in HIT mode Please set distance modulus unit 0 01um as positioning parameter for HIT SHOT mode and OPEN CLOSE control Please be aware of that when Base Rate in Memory Switch is unset it may interfere with correct positioning In case of F please set 3 only and omit 4 to 10 In case of N Y please omit 3 to 10 55 Speed settings for axis O to 7 Please select one from 4 types of Speed sel on Memory Switch In case of K E please set 11 only and omit 12 to 18 For command K and E in HIT mode PULSE speed can be calculated from speed 11 and parameter in divisions and base rate of axis with the smallest No among those in operation It applies to speed for all interpolation object axes In case of H F N Y please omit 11 to 18 OUT signal output instructions Appoint O to15 In case of F N Y it will be omitted When they are not appointed previous condition remains Waiting time Any number from 0 to 32767 can be input Unit 0 1S In case of F N Y it will be omitte
59. re has been set to final coordinates of arc interpolation 4 2 6 K Command Linear interpolation command 1 Function Set final coordinates for execution of linear interpolation to relative coordinates pulse rate against current position Activation command G is necessary after execution of this command The axis which executes linear interpolation is available in setting only between axis 1 slave no 0 and axis 2 slave no 1 and not applicable to the alterations Due to the fact that activation will be processed with speed the speed of axis 1 amp 2 GER travel per pulse and acceleration deceleration speed formula between trapezoidal shape and S shape need to be set to same values on 2 different axes 2 Example E W P1000 P500 Travel using linear interpolation to the 1000 pulse position on the first axis G and the 500 pulse position on the second axis Final coordinates 47 4 2 7 J Command Jog movement command 1 Function This command is to continue the movement with start up speed S speed Activation command G is necessary after execution of this command 2 Example Travel axis 1 toward direction with S speed Travel axis 4 toward direction with S speed Travel axis 1 toward direction 2 toward 3 toward and 4 toward with S speed 4 2 8 G Command Activation command 1 Function After the M A E K and J commands G command is needed to ac
60. s been recognized U1 Restart program Program will restart which has been paused by P U0 4 2 21 B command Origin return speed setting command 1 Function When power is supplied start up speed S maximum speed F acceleration and deceleration time R and mid speed M of speed number that assigned in ORG SPEED n S F R and M memory switch are set to axis 1 to 4 slave No 0 to 3 By this command activation speed S final speed F addition subtraction speed R can be switched Note that Mid speed M is not subject to change Settings Start up speed S 1 500000pps Final speed F 1 500000pps Acceleration and deceleration time R 1 1000ms S should be equal to F or smaller 2 Example B 1S100F1000R200 Set origin return speed of axis 1 slave No 0 to S 100pps F 1000pps R 200ms B 1S100F1000R200 Set origin return speed of axis 4 slave No 0 to S 100pps F 1000pps R 200ms B WS100F1000R200S100F1000R200 Set origin return speed of axis 1 to 4 slave No 0 to 3 to 100F1000R200S100F1000R200 S 100pps F 1000pps R 200ms 4 2 22 Z command Mode switch command 1 Function This command is to switch HIT mode or SHOT mode HIT mode is distinguished from SHOT mode apparently in command format or what parameter indicates distance value pulse rate Switching the mode during the ongoing operation may cause malfunction Switching should be made just afterwards the initial settings when needed 2 Exam
61. status by slave unit No2 6 39 Copyright 2014 SIGMAKOKI Co Ltd 4 1 16 command Reading status command 1 Function This command indicates to return the status Busy Ready of each slave unit 2 Example sts0 sts1 sts2 sts3 sts4 sts5 sts6 sts7 Returned data sts 0 means the ready status of the slave unit 1 represents the busy status of the slave unit Abbreviation represents unconnected Example of returned data Ja cf means the ready status of slave unit No1 and 7 Busy status of slave unit No0 and unconnected status of slave unit No2 and 6 4 1 17 command Reading internal information command 1 Feature This command indicates to return controller information 2 Example Paxis P above represents by string parameter is shown as table below axis above represents slave unit number Note slave unit N00 7 must be written only when D or B string parameter is applied String parameter Returned data Example of returned data N Device name HIT M V Version V1 00 001 Z Mode O SHOT MODE 1 HIT MODE P Travel per pulse um 1 00 2 00 1 00 2 00 S Microstep 2 2 20 10 D Travel speed 1000 500000 100 B Returning origin speed 1000 500000 100 200000 L Status of program operation ProgNo ProgRun LineNo Count of remaining Loop Example 2 1 13 4 13 row of program No 2 is running and count of remaining Loop is 4 40 Copyright 2014 SIGMAKOKI Co Ltd
62. ted Axis 0 represents X axis and axis 1 represents Y axis d 0Oor1 0 is CW rotation Clockwise 1 is CCW rotation Counterclockwise c Center point coordinate c0 axis0 setting value c1 axis1 setting value unit of setting 0 01um unit ae Degree of ended point deg Setting range integer of 0 lt aeS360 The other degree than mentioned is NG E 1 6 7 0 5000 5000 90 A center point coordinate is based on a relative coordinate of the current position 0 05mm 0 05mm and move stages of slave unit No6 Slave unit No7 90 from current position to degree of ended point position clockwise Axis 7 Axis 6 0 05mm qo 33 Copyright 2014 SIGMAKOKI Co Ltd 4 1 5 3 E 2 command Arc interpolation movement command 2 1 Function This command indicates a designation of pass point coordinate and ended point s coordinate in order to opearate the arc interpolation movement Note if 3 points current position pass point coordinate and ended point coordinate lay on the same straight line it is unable to make an arc movement 2 Example E 2 axis0 axis1 p0 p1 e0 e1 axis0 axis1 07 means to designate the number of slave unit to operate arc interpolation movement Same number of slave unit or unconnect is prohibited Axis 1 represents X axis and axis 2 represents Y axis p0 axisO setting value p1 axis1 setting value p Pass point coordinate e0 axis1 setting value e1 axis1 setting value unit of setting
63. tep angle microstep The number of microstep can be set by 15 types Other numbers except mentioned below cannot be set 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 Division 1 2 4 5 8 10 20 25 40 50 80 100 125 200 250 Step angle 0 72 0 36 0 18 0 144 0 09 0 072 0 036 0 0288 0 018 0 0144 0 009 0 0072 0 00576 0 0036 0 00288 Pulse 500 1000 2000 2500 4000 5000 10000 12500 20000 25000 40000 50000 62500 100000 125000 number per 1 rotation Resolution 2 1 0 5 0 4 0 25 0 2 0 1 0 08 0 05 0 04 0 025 0 02 0 016 0 01 0 008 um When this command is sent under busy condition of slave unit it will be responsed by NG as a command error and all command will stop to operate X At Closed Loop control method similar other than Original position and do not carry out S command When similar other than Original position and change motor step angle because a coordinate position changes work definitely and not carried out 2 Example S d0 d1 d2 d3 d4 d5 d6 d7 d means to input the command with the above 15 types of number or abbreviation to set the number of step angle to the designated slave unit number 38 Copyright 2014 SIGMAKOKI Co Ltd The abbreviation is NOP No Operation S 20 40 Setting Division of 20 and 40 to Slave No0 1 4 1 14Qcommand Reading current position command 1 Function This co
64. ter for M A commands for close control which is 1pm and the distance in response of status 1 command which is 0 01pm ACK1 ACK2 ACK3 Acceptance status of command is represented by K or X K indicates the command received has been accepted regularly X indicates there has been an error e g parameter error etc in the command received Status of limit sensor detection is represented by 1 letter K Limit sensor not detected on either axis 1 E Allocate axis 1 4 to 1 9 in hexadecimal numbers and A to E with 4 bit data from right extremity LSB 4 bit data is based on 1 being used when limit sensor is detected on each axis and 0 being when limit sensor is not detected on any axes W W will be responded when limit sensor has been detected from all 4 axes which is supposed to be F in hexadecimal Controller status is represented by 1 letter R Controller is ready for all commands B Controller is engaged and only Q L I O and commands are acceptable Q S command is also effective in SHOT mode Refer to the page 4 1 15 for further explanation Response data format is equal to HIT mode however with 4 axes only 51 4 2 16 command Status 2 command 1 Function It responds the controller status with busy or ready ACK3 2 Example l status 1 command return date ACK3 ACK3 Controller status is represented by 1 letter R Controller is ready for all commands Controller is engaged and only Q L
65. the detail of program feature from 4 3 program feature 2 Example Pip p P S E UO U1 P Pn S E UO n represents program number which can be selected 0 9 The others than mentioned will be responsed by NG as a command error It is O when power on Example P P2 Program No 2 is selected Start operation of the program Start operation of the selecting program Example P S Finish program operation When the finish command is accepted it will finish the under operating in the current Line No Example P E Stop program temporarily When the the command is accepted it will temporarily stop after the under operating program in the current Line No 41 Copyright 2014 SIGMAKOKI Co Ltd Example P UO U1 Restart program The temporary stop of program can be restarted by P UO Example P U1 4 1 21 B command Setting of returning origin speed command 1 Function This command indicates the setting of returning origin speed to the designated slave unit number It is unable to set the multiple number of slave unit at the same time When this command is sent under condition of busy and unconnected of slave unit it will be responsed by NG as a command error and all command will stop to operate 2 Example B axis s f r m axis Slave unit No 0 7 Ss Start up speed Initial speed range of setting 1 999999999 unit 0 01um s f Maximum speed range of setting 1 999999999 unit
66. tially at stake SIGMAKOKI CO LTD products cannot be used for any specific purposes such as apparatus or systems for transportation vehicular medical aerospace nuclear or undersea repeater use The prior written approval of SIGMAKOKI CO LTD is necessary to reprint or reproduce in whole or in part these materials If these products or technologies are subject to the Japanese export control restrictions they must be exported under a license Japanese government and cannot be imported into a country other than the approved destination Any diversion or re export contrary to the export control laws and regulations of Japan and or the country of destination is prohibited Copyright 2014 SIGMAKOKI Co Ltd Contents For TOUR Safety enc mes ee eee a NS eats ak dy 4 Chapter 1 Before You Beem 6 NEP ACK ARS Contents siso 6 TZ OVORVIOW sisi iii E 6 1 3 HIT M HIT S System Diagram 7 1 4 Parts and FUNGOS iere eat nina nina aaa ane 8 Chapter 2 Connection Flo 10 2 1 Connection between HIT S and motorized etage eee 10 2 2 Interface between HIT M and HIT nn eeeeeerteeeeeeeeeereeeeeee meta 10 2 3 Interface With PO tin lle aaeoa rasede tegt 11 2 4 Power SUB BI oi o O Saeed ae ad Na BANDE SES aia eel 11 Chapter 3 Settings 00 A 12 3 1 Settings Motor Driving Gurrent 12 3 2 Memory Switch eettnges EE 13 3 3 Memory Switch contents list and detailed settngs mete 13 3S4 LAN Settings Tarinine eea A 27 Chapter A Feature
67. tivate the stage 4 2 9R Command Electrical logical origin settings command 1 Function Clear the coordinate value by setting current position of the stage to coordinate origin 2 Example Set current position on axis 1 to coordinate origin Set current position on axis 4 to coordinate origin Set current position on axis 1 to 4 to coordinate origin 4 2 10 L Command Deceleration stop command 1 Function It decelerates and terminates designated axis stage 2 Example Decelerate axis 1 until it terminates Decelerate axis 4 until it terminates Decelerate axis 1 to 4 until they terminate 48 4 2 11 L E Command Emergency stop command 1 Function It terminates designated axis stage immediately 2 Example Stop ans 1104 mmedatly 4 2 12 D command Speed setting command 1 Function When power is on start up speed S final speed F and acceleration and deceleration time R of speed number designated by SPEED SEL in memory switch are set within axis 1 to 4 slave no O to 3 The travel speed can be altered according to this command Setting range Start up speed S 1 500000pps Final speed F 1 500000pps Acceleration and deceleration time R 1 1000ms S should be equal to F or smaller 2 Example D 1S100F1000R200 Set travel speed of axis 1 slave No 0 to S 100pps F 1000pps R 200ms D 48100F1000R200 Set travel speed of axis 4 slave No 3 to S 100pps F 1000pps R 200ms D WS1
68. top to operate 2 Example D axis s f r axis Slave unit number O 7 s Start up speed Initial speed range of setting 1 999999999 unit 0 01um s f Maximum speed range of setting 1 999999999 unit 0 01um s ri Acceleration deceleration time range of setting 1 1000 unit ms Note the condition of s lt f Maximum speed calculated by pulse is 800000 pulse s In case of over speed setting travel 0 01um s unit OK will be returned but it will be treated as speed of 800000 pulse s D 5 10000 100000 200 means Start up speed 0 1mm s 1mm s Maximum speed 200ms Acceleration deceleration time to slave unit No5 37 Copyright 2014 SIGMAKOKI Co Ltd 4 1 12 C command Excitation On OFF command 1 Function This command indicates an Excitation On OFF of motor The stage is able to move rotate manually when the excitation OFF of motor When this command is sent under busy condition of slave unit it will be responsed by NG as a command error and all command will stop to operate 2 Example C p0 p1 p2 p3 p4 p5 p6 p7 p 0 1 or abbreviated 1 is an Excitation ON to the stage of the slave unit number 0 is an Excitation OFF to the stage of the slave unit number The abbreviation is NOP No Operation C 1 0 Excitation ON to the motor of the slave unit No2 and OFF to motor of slave unit Nos 4 1 13 S command Setting microstep command 1 Function This command indicates to change motor s
69. ts to the cable attached to the motorized stage in use 9 Power Supply Terminal DC 24V 1A Power Supply 10 FG Terminal Frame Ground Terminal Please connect to EARTH when using VAN Make sure to set up and wire the cable supplying DC 24V and FG_GND to the HIT S so that the maximum length of cable is not longer than 2m Copyright 2014 SIGMAKOKI Co Ltd N For your own safety make sure POWER is OFF before connecting every cable Chapter 2 Connection Flow 2 1 Connection between HIT S and motorized stage First connect HIT S and every mtorized stage Here it shows the case that TSDM GS 60 15X with built in glass scale is connected to HIT S D Connect tne connector round connector 10p Female of TSDM GS 60 15X with standard cable DHR CA Connect the connector of STAGE of FRONT Panel with the other side of standard cable DHR CA connected to TSDM GS 60 15X in No 1 procedure 3 Connect tne scale connector of TSDM GS 60 15X with standard cable GSE CA 4 Connect the scale connector of SCALE of FRONT Panel with the other side of standard cable GSE CA connected to TSDM GS 60 15X in No 3 procedure 2 2 Interface between HIT M and HIT S 1 How to connect HIT M and HIT S Please connect HIT M LINK connector and HIT S LINK connector address 0 with straight LAN cable When 2 axes are in need which means 2 HIT S are being used please connect a LINK connector on SR HIT S address 0 and the other LINK connect

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