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360 Stabil-Ion® Controller Vacuum Measurement System Manual

1. RS 232 ELECTROMETER CONVECTRON _ PROCESS CONTROL x s ES IG 1 AUTO SP On d o Se rd Data Port ort SET yr L o o T s eee SOE d A ict ice 51 io2 Scale 2 0 J O Set OIIO SO Avis E O wc CN Pressure zd bud 3 Range A v P IBS ez ae Af Degas On 4 Hle ore ser Re Cathode NN i Nip oles FN N er t 1f 121 a 2 pud 3 N WS HE O M Oy E IG2 Nec O wc ed L Remot Control Unit Front Panel with Door Open Showing Scale Factor Display Switch 4 Setthe scale factor adjustment to the appropriate factor listed in Table 4 2 5 Return the scale factor switch to the center position 6 Repeat steps 3 4 and 5 for IG2 IG2 may be set for a different gas than IG1 Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation Scale Factors for Use with lonization Gauges Do not use these scale factors for CONVECTRON Gauges He 5 56 H20 8 93 x 10 Ne 3 33 NO 8 62 x 105 D 2 86 Ar 7 75 x 10 H2 2 17 CO 7 04 x 10 N2 1 00 Kr 5 15 x 10 Air 1 00 SF 4 00 x 107 O2 9 90 x 10 Xe 3 48 x 10 CO 9 52 x 10 Hg 25x10 If the Stabil lon Gauge calibration is for a gas type other than Ng or air we suggest placing a label near the first line of the display indicating the gas
2. Control Unit Front Panel Showing Location of Units of Measure Label Review Sections 2 1 3 2 1 4 2 1 5 2 1 6 2 1 7 and 2 1 8 for the factory default settings for the switches on these options the pressure display units of measure and the degas timer to determine if any need changing Now is a convenient time to make any required switch changes before mounting the Control Unit in its desired location Series 360 Stabil lon Instruction Manual 360119 Rev A Initial Setup Procedures 2 1 1 Top Cover Removal 1 With power off remove any Bracket A cables from Control Unit rear P y Je panel E 2 Observe antistatic precautions to avoid damaging static sensitive components inside 3 fo the chassis Use a grounded zt conductive work surface Do gt lt not handle integrated circuits Dg IC devices more than Dar necessary and only when eg oJ wearing a high impedance ee ground strap A high impedance helps Eee f protect human life in case of Do not remove the two inadvertent contact with high lower front screws voltage Location of Screws for Removal of Top Cover 3 Remove the four Phillips head screws identified in Figure 2 3 If the unit is equipped with a rear bracket instead of one rear screw unfasten the Phillips head screw on the b
3. Index 1 Series 360 Stabillon Instruction Manual 360119 Rev A Table of Contents Series 360 Stabil lon Instruction Manual 360119 Rev A Safety Instructions START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for your convenience and repeated with additional information at appropriate points in these instructions These safety alert symbols in this manual or on the Product rear IS 9 N panel mean caution personal safety property damage or danger from electric shock Read these instructions carefully In these instructions the word product refers to the 360 Stabil Ion Vacuum Measurement System and all of its approved parts and accessories NOTE These instructions do not and cannot provide for every contingency that may arise in connection with the installation operation or maintenance of this product If you require further assistance contact MKS Granville Phillips Division at the address on the title page of this manual This product has been designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions Failure to comply with these instructions may result in serious personal injury including death or property damage These safety precautions must be observed during all phases of operation installation and service of this product Failure to comply with thes
4. 8 moc o oo O E 15 5 8 8 515 26 5 9 IG2 COL 12 5 85 se Q ou 14 O O MIN ADJ GND ANALOG OUTPUT B DB 25P connector Control Unit Rear Panel Showing RS 232 Connector Series 360 Stabil lon Instruction Manual 360119 Rev A Installation RS 232 Connector Pin Assignments Protective Ground 1 Transmitted Data 2 To Computer Received Data 3 To 360 Request to Send RTS 4 To Computer Clear to Send DTS 5 To 360 Data Set Ready DSR 6 To 360 Signal Ground common return 7 Data Carrier Detect DCD 8 To 360 Data Terminal Ready DTR 20 To Computer The DTR line is set true by the 360 Controller on power up to indicate it is on line When the 360 receives a start bit on the received data line it will input and buffer a character The DCD line must be true at the time each character is received or that character will be ignored The 360 will continue to receive and buffer characters until the terminator LF is received Upon receiving the terminator the 360 will assert the RTS line as a holdoff to prevent the host computer from attempting to transmit further data until the message just received has been parsed and a reply has been output During output of the reply the incoming handshake lines CTS and DSR are tested prior to beginning transmission of each character The 360 will wait until both are true before beginning transmission of a characte
5. ELECTROMETER OFF Panel toggle switches ON Remote inputs FLASHING Computer interface Electrometer Module Showing the Remote LED Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 7 3 Using the Remote Outputs The relay contact outputs are accessible on the 15 pin remote output connector These contacts provide status indication for IG1 and IG2 on or off degas on or off and fault detection Figure 3 13 shows the pin designations See Section 6 3 on page 6 4 for a description of fault relay indications IG 1 NC DEGAS NC 1G 1 OFF l 9 4 DEGAS OFF Ow T queer IG 1 ON DEGAS ON 2 IG 1 NO DEGAS IG 2 NC FAULT NC 5 2 OFF 4 FAULT DETECTED IG2C 7 T 6 FAULT C T IG 2 ON NO FAULT DETECTED IG 2 NO A FAULT vo Remote Output Connector Use DA 155 Mating Connectors Supplied 3 8 Connecting the RS 232 Computer Interface Instructions for setting up this interface are in Section 2 1 5 on page 2 9 The RS 232 computer interface produces the signals shown in Table 3 4 A mating DB 25S connector is supplied in the hardware kit Use shielded cable to minimize electromagnetic radiation or susceptibility Ground the shield to the metal connector shell or to Pin 1 Do not connect the shield to Pin 7 PROCESS CONTROL ANALOG ELECTROMETER REMOTE POWER OUTPUT A ic4 COL RS 232 OUTPUT SUPPLY O O NA 1 13 E A OUT ago Pee oe 8 O 4 19 9 1 919
6. Preparing the Stabil lon System for Operation Figures 4 10 through 4 15 show the true pressure vs indicated pressure for eleven commonly used gases The following list will help to locate the proper graph Pressure vs Indicated N Pressure Curve 4 10 10 to 10 Torr All 4 11 10 to 1000 Torr Ar CO2 CH Freon 12 He 4 12 10 to 1000 Torr D gt Freon 22 Kr Ne O 4 13 10 to 10 mbar All 4 14 107 to 1000 mbar Ar CO CH Freon 12 He 4 15 10 to 1000 mbar D Freon 22 Kr He O5 Note that 1 mbar 100 Pa so the mbar charts may be used for pascal units by multiplying the values on the axes by 100 A useful interpretation of these curves is for example that at a true pressure of 2 x 10 Torr of CH the heat loss from the sensor is the same as at a true pressure of 3 x 10 of N see Figure 4 10 The curves at higher pressure vary widely from gas to gas because the thermal losses at higher pressures are greatly different for different gases If you must measure the pressure of gases other than Nz or air use Figures 4 10 through 4 15 to determine the maximum safe indicated pressure for the other gas as explained below 4 6 2 Examples Example 1 Maximum safe indicated pressure Assume a certain system will withstand an internal pressure of 2000 Torr or 38 7 psia For safety you wish to limit the maximum internal pressure to 760 Torr during backfilling Assume you wish to measure the pressure of Freon 22 On
7. 2 Aresponse to the IG1 ON command of OK indicates only that a signal requesting that IG1 be turned on has been sent to the electrometer IG1 may fail to come on e g if the system pressure is too high or if the gauge is disconnected To verify that IG1 is on use the DS IG1 command If the gauge is off or in its first few seconds of operation after being turned on a pressure of 9 99E 9 will be returned IG2 Identical to IG1 but applies to IG2 DG Definition Turn degas on or off Modifiers ON or OFF Response OK if command accepted or INVALID if rejected Example From computer DG ON CRLF From 370 OKCRLF NOTES 1 Command is INVALID if neither IG is on 2 Aresponse to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer Degas will not activate if the pressure is above 5 x 10 5 Torr Use the DGS command see below to verify that degas has been successfully initiated DS Definition Display pressure reading Modifiers IG1 or IG2 or IG or CG1 or CG2 Response ASCII string representing the pressure for the selected gauge Example From computer DS CG1 CRLF From 370 1 25E 03CRLF NOTES 1 The DS CG1 and DS CG2 commands are used to display the pressures from the lower 2 display lines with the Convectron Gauge Module installed 2 If the requested ion gauge is turned off or is in its first few seconds of operation or data is requested from a Convectron Gauge when none i
8. Rev A NOTES E Series 360 Stabil lon Instruction Manaul 360119 Rev A System Components Stabil lon Vacuum Measuring System Stabil lon Control Unit Stabil lon Gauges Interconnect cable Stabil lon cables Stabil lon Power Supply Dual Convectron cable BW N o co Power cable Convectron Gauges door UU ud QP GRANVILE PHI 360 STABIL ION UA PATENTE AN I A Pomme ASTU Hor PUPIL is gut Stabi lon Gauge 1 Stabil lon Gauge mounting flange 5 Pin guard 2 Mounting bolt 6 Connector shell 3 Cable 7 Ventilation slots 4 Connector locating pin 8 Guard Series 360 Stabil lon Instruction Manual 360119 Rev A System Components N A Ww UI TORR X MBAR PASCAL E Mounting and Installing Hardware 1 Process Control label 8 2 Rubber stick on feet 9 3 Connector 1 8 in phone 10 4 Mounting Bracket 4 ea 11 5 Screw 10 32 x 31 in 4 ea 12 6 Fuses 3 0 amp 2 0 amp 13 7 Fuses 1 6 amp 1 0 amp 14 11 Washer 4 ea Screw 10 32 x 50 in 4 ea Screwdriver Connector DA 26P remote input Connector DA 155 remote output Connector process control Connector DB 25S RS 232 ON 7 DEGAS Stabil lon Vacuum Gauge Control Unit Front Panel Stabil l
9. Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 1 2 Gas Scale Factor Adjustment If highly accurate pressure measurement of gases is required we recommend calibration for the specific gas and system to be used See Section 4 4 on page 4 8 The standard calibration is for N3 Different gases have different ionization probabilities If a Stabil lon Gauge and Controller are calibrated for Ny and if argon is the predominant gas in the system setting the scale factor at 7 75 x 10 as shown in Table 4 2 on page 4 5 causes the pressure indications for N to be multiplied by 0 775 thus providing correct pressure indications for argon over most of the pressure range At pressures above about 1 x 10 Torr this method may not provide accurate pressure indications Fur additional information on ionization probabilities refer to NASA Technical Note TND5285 lonization Gauge Sensitivities as Reported in the Literature by Robert L Summers Lewis Research Center National Aeronautics and Space Administration To prepare for measuring the pressure of gases other than air or No with IG1 or IG2 proceed as follows 1 Turn off IG1 and IG2 2 Open the front panel door and set the scale factor switch to IG1 or G2 3 The current scale factor setting for IG1 or IG2 will be displayed on the first line of the display if neither Stabil lon Gauge is on
10. PCS CRLF From 360 Controller 1 1 1 0 0 0 CRLF Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 13 Preparing for Use of the IEEE 488 Computer Interface For setup instructions see Section 2 1 7 on page 2 15 For connecting instructions see Section 3 10 on page 3 18 Communication with the 360 Controller is via ASCII strings A message to the 360 consists of a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated by spaces or commas No spaces may appear within the command or the modifier only between them The terminator accepted by the 360 is an ASCII carriage return line feed or New Line denoted here by CRLF The carriage return is optional and messages terminated with only the line feed will be accepted Note that the CRLF terminator is in general appended automatically by the host computer s interface software to the message string supplied by the user A terminator is not required if the last character of the message to the 360 VGC is accompanied by the EOI bus signal If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored Characters can be upper or lower case Response characters will be upper case All messages to the 360 will receive a reply consisting of an ASCII string terminated with CRLF t
11. SRQ mode disabled switch 7 on The serial poll response byte will contain a 1 in bit 4 this bit is also the MAV message available bit Bit 6 will be set if an error has occurred In this case the pending message will be an error message Switch 6 is not used 2 1 8 Degas Timer BUS ADDRESS SRQ MODE TALK ONLY Top View of IEEE 488 SRQ Switches If you do not wish to change the factory setting skip to Section 2 1 9 on page 2 17 NOTE The degas timer is preset for 10 minutes This is the recommended setting for most applications If a Stabil lon Gauge is installed with the Cable Connector on top degas time must be limited to 10 minutes hr to prevent the Connector from overheating To change the degas time 1 Confirm that power is off and all cables are removed from the rear of the Control Unit 2 Setthe degas time switches on the electrometer module as shown below Degas Time Switch Settings 1 Off Off On 2 Off On Off 5 Off On On 10 On Off Off 15 On Off On 20 On On Off 30 On On On factory setting MEL ee HP FAILURE OVP TRIP FACTORY ADJ Top View of Electrometer Module Showing Degas Time Switches Series 360 Stabil lon Instruction Manual 360119 Rev A Initial Setup Procedures 2 1 9 Replacing Control Unit Cover Assuming you have completed the above instructions the Control Unit setup is now complete Replace the top cover Make sure the
12. Under this condition there are no active drivers on the network In order to maintain the proper idle voltage state bias resistors must be applied to force the data lines to the idle condition Figure 3 16 illustrates the placement of bias resistors on a host computer 2 wire configuration for the typical 5 volt and 24 volt systems In a four wire configuration connect TX on the gauge controller to RX on the host computer and connect RX on the gauge controller to TX on the host computer If the computer sends and receives data on 2 wires connect the RS 485 from the computer to both the TX and RX Pins Pins 4 and 8 and connect the RS 485 from the computer to both TX to RX Pins 5 and 9 Figure 3 17 shows the proper wire connections for a 2 wire connection When connecting multiple Series 360 Controllers connect TX to TX and RX to RX on all controllers The polarity may have to be reversed on the computer and other instruments you may have to try it both ways No damage will result if connections are wrong Series 360 Stabil lon Instruction Manual 360119 Rev A 5 volts 24 volts Host 4 7kQ Host 23k Q Computer Computer B B na 5 9K Q A e A 4 7kQ 4 7kQ Figure 3 16 RS 485 Bias Resistor Host Computer RS 485 Option Card RS 485 Connector 41 or J2 Connector Figure 3 17 RS 485 Connectors Table 3 7 5 485 Specifications Communications Format RS 485 half duplex asynchro
13. 1 303 652 2844 Email gp csr mksinst com Corporate Office MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 978 645 5500 www mksinst com Instruction Manual Instruction manual part number 360119 Revision A September 2014
14. 107 Torr Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 1000 H Ar freon 12 CO No air 100 ae CH He True Pressure Torr Use only when gauge axis is horizontal Do not use this data with transducers other than the G P Series 275 Convectron Gauge Pressure units equivalence 1 um Hg 1 mTorr 1 x 10 Torr 1000 um Hg 1 Torr 102 10 1 10 100 1000 Indicated Pressure Torr nitrogen equivalent Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 Torr Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 1000 No air freon 22 O 100 VA Ne Use only when gauge axis is horizontal Do not use this data with transducers other than the G P Series 275 Convectron Gauge True Pressure Torr Pressure units equivalence 1 um Hg 1 miorr 1 x 10 Torr 1000 um Hg 1 Torr 10 10 1 10 100 1000 Indicated Pressure Torr nitrogen equivalent Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 Torr Series 360 Stabillon Instruction Manual 360119 Re
15. 11 Connecting the Gauge Cables i sr e oka ee ies RR DIR II ELE RR RO RR RA 3 18 3 12 Connecting the Power cc eee 3 21 Preparing the Stabil Ion System for Operation 0 0 ccc ccc cee cee n 4 1 4 1 Preparing for Pressure Measurement with the Stabi Ion Gauge 0 eee eee eee 4 1 4 1 1 Alternate ON OFF Gauge Control 4 3 4 1 2 Gas Scale Factor Adjustmentz eere toe eine LA 4 4 4 1 3 Overpressure 5 e 4 5 42 Degassing the Stabil Ion Gauge nett 4 5 4 2 1 Pressure Indication During Degas sse ee 4 7 422 Degas Limer o3 weosi wipe aks WERE err ed ede Io 4 7 42 5 Degas eie e ket Rete qe REDE Pee ora eere eet 4 7 424 Gauge More eee lett vs ree 4 7 4 3 Alternate Cathode Operation e e o hh e 4 7 4 4 Stabil Ion Gauge Calibration Memory 0 neern 4 44 1 Memory Modules for Stabil Ion e 4 44 2 Using a Memory Module for IG1 2 4 8 45 Stabil Ion Gauge Analog Output Signal 0 eect ee 4 10 4 6 Preparing for Convectron Gauge Operation eee ene 4 11 4
16. 2 CONVECTRON V TURN OFF VS SUPPIY AC gt CONTROLLER CALFACTIORY gt A amp B gt POWER SWITCH 7 UNE VOLTAGE CORRECTLY INTERCONNECT SWITCHES CABLE 360 TURNON SEQUENCE FINISH Power Turn On Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance Ss 360 IG TURN ON BEGIN IG1 OR IG2 SWITCH ON DOES IG SWITCH LAMP STAY ON YES NO WV AN SELECT CORRECT RANGE CHECK PRESSURE RANGE SWITCH N NO PRESSURE ANGE SWITCH YES N SELECT CORRECT CATHODE CHECK CATHODE SWITCH CHECK CONTROLLER INTERCONNECT CABLE 5 IS STABILION v NO STABILION CHECK CHECK STABILION E 2 STABILION CAUCE CALL FACTORY CABLE GAUGE YES YES V REPLACE CABLE REPLACE 3G TURNON N STABILION GAUGE NV FINISH p Stabil lon Gauge Turn On C IGPRESSURE V DISPLAY BEGIN A READ PRESSURE SELECT CORRECT SELECT CORRECT SET CORRECT DISPLAY UNITS SCALE FACTOR RANGE hi N AIN V NO NO NO 5 cese ri RANGE PRESSURE SWITCH DISPLAY AS CHECK DISPLAY m m YES CHECK SCALE ERR UNE mde SMICH nm RRECTLY gt EXPECTED UNITS SWITCH FACTOR SWITCH RANGE SWITCH CORRECTLY YES 5 o STABILION SEN o CABLE CALL FACTO
17. 6 1 Understanding Pressure Measurement in Gases other than Nitrogen or Air 4 12 462 Examples o eiu mire tee ree n Ce e DL olen OA anand re te 4 13 47 Ionization Gauge Auto Turn On Off cence een 4 21 4 7 1 Set the On Off Pressure for IGI IG2 e 4 21 4 8 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications 4 22 4 9 Convectron Gauge Analog Output Signal 4 23 4 10 Preparing for Process Control Operation teen 4 24 4 10 1 Setpoint Display and Adjustment lesse 4 24 4 10 2 To Display a Setpoint net RR RD REM E META IM EDI tee oho 4 24 4 10 5 To MoedifyaSetpoint 04 56 00 ces be ee eee e RES eR EUH RESI RU EE 4 25 4 11 Preparing for Use of the RS 232 Computer Interface 0 0 eee eee 4 25 ATNI RS232 Command Synt x c ee oae e ee UR COL i RR ae es 4 26 4 12 Preparing for use of the RS 485 Computer Interface 1 0 0 eee eee ee 4 29 4 12 1 RS 485 Command Syntax 4 30 4 13 Preparing for Use of the IEEE 488 Computer Interface 0 0 eee eee 4 32 4 13 1 488 4 32 Operation of a Stabil Ion System hen 5 1
18. POWER OUTPUT A i4 COL OUTPUT SUPPLY f O C ANA c A 13 2 25 debug 4 29 4 O19 c G R E 5 u T G E E 15 8 8515 9 5 es 12 5 85 X w IG2 COL 1 14 GND ANALOG ANALOG O MIN ADJ Stabil lon Gauge Analog Output Connector Location on Rear Panel of Control Unit 3 5 2 Convectron Gauge Analog Output Signal If you have Convectron Gauge capability installed signal voltages proportional to the logarithm of the Convectron Gauge display indications are provided on the back of the Convectron Gauge module via a standard 1 8 in miniature phone jack Two mating connectors are supplied with this capability See Section 4 9 on page 4 23 pertaining to the characteristics of these signals PROCESS CONTROL ANALOG ELECTROMETER REMOTE POWER OUTPUT A G4 COL nda OUTPUT SUPPLY E C ANA 1 13 OUT O 18 25 ARS 1 9 8 4 O48 Cc G R E G M A i T E 15 578 8 15 9 5 es 12 5 85 x W we COE 46 14 GND ANALOG ALD O MIN ADJ Convectron Gauge Analog Output Connector Locations on Rear Panel of Control Unit Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 6 Connecting Process Control Relays Instructions for setting up this module are in Section 2 1 4 on page 2 5 The process control connector is embossed with letters identifying each pin Table 3 1 shows the letters designating the 3 pins assigned to each of the 6 c
19. System 3 If you have Convectron Gauge capability installed and have prepared your system for automatic operation of the Stabil lon Gauge s per Section 4 7 on page 4 21 the ionization gauge s will turn on and off automatically 4 For manual operation press the Stabil lon Gauge 1 or 2 power switch IG1 or IG2 on the Control Unit The pressure in Stabil lon Gauge 1 or 2 will be displayed on the IG line of the display in the chosen pressure units 5 To degas IG1 IG1 must be on and the pressure within IG1 must be below D IF adore 5 x 10 Torr depress the DEGAS IG 8 56 7 75 o O switch on the Control Unit see Figure 3 x 5 2 When degassing with cathode 1 A EE HAS ae selected both cathodes will operate in B 5 67 2 order to achieve full degas power and emp thorough cleaning of both cathodes Control Unit Front Panel Showing DEGAS Button and LED Indicator When cathode 2 is selected only cathode 2 will be powered during degas and the power will be reduced to half in order to prevent the second cathode from exceeding its emission rating 6 When either cathode is nearing the end of its useful lifetime or is badly contaminated the DEGAS switch LED indicator on the front panel will blink during degassing
20. To verify that IG1 is on use the DS IG1 command If the gauge is off or in its first few seconds of operation after being turned on a pressure of 9 99E 9 will be returned IG2 Identical to IG1 but applies to IG2 PCS Definition Modifiers Response Examples CATH1 Definition Modifiers Response Example NOTES Display process control channel status 1 or 2 or 3 or 4 or 5 or 6 or B or none Depends on modifier Modifier single digit 1 through 6 response single ASCII digit 0 if the corresponding relay is inactive 1 if active See Example 1 Modifier B response a byte of data with bits 0 through 5 set clear according to whether the corresponding relay is active inactive Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte See Example 2 Modifier absent response will be a string of 6 ASCII O s and 1 s separated by commas giving the status of all six channels See Example 3 Assume that channels 1 3 are active and 4 6 are inactive 1 From computer PCS 1 CRLF From 360 1CRLF 2 From computer PCS B CRLF From 360 GCRLF Note that ASCII G corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits O through 5 3 From computer PCS CRLF From 360 1 1 1 0 0 0 CRLF Select Cathode 1 or Cathode 2 for IG1 operation 10r2 OKCRLF From computer CATH1 2 CRLF From 360 OKCRLF This function
21. by the ionization gauge or gauges Channel 1 operates relay 1 Channel 2 operates relay 2 Relays 1 and 2 are also shown as K1 and K2 on the printed circuit board for reference during IG assignment IG1 IC2 or both can be assigned to operate either channel 1 or 2 Use Table 2 2 to assign the IG s to the channels IG Process Control Channel Switch Settings Channel 1 can turn on when IG1 is ON or when IG2 is ON factory setting Channel 1 can turn on when IG1 is ON and will turn off when IG2 is ON Channel 1 will turn off when IG1 is ON and can turn on when IG2 is ON Channel 1 will always be off Series 360 Stabillon Instruction Manual 360119 Rev A OFF Initial Setup Procedures POLARITY PC3 ON t PC2 ig ict f PC2 GAUGE 97 b pci ASSIGNMENT T channel numbers on printed circuit board numbers on lt switch not on circuit board yee lt Partial Top View of Process Control Module Channel 2 can turn on when IG1 is ON or when IG2 is ON factory setting Channel 2 can turn on when IG1 is ON and will turn off when IG2 is ON Channel 2 will turn off when IG1 is ON and can turn on when IG2 is ON Channel 2 will always be off Initial Setup Procedures 2 1 4 2 Relay Polarity Setting The relays can be set to activate as pressure either ur poen rises above or falls below the setpoint A DIP switch is tw provided for each channel Ref
22. configuration shown in Table 3 6 Table 3 6 Computer Cable Pin Assignments for a 25 Pin Connector Signal PC AT Connector Cable Pinout 360 Connector DB25P DE9S DB25S DB25P Wo x T x x AE ee 3 sts of 4 3 7 5 4 RXD XD s o 04 Section 4 11 on page 4 25 contains instructions for communicating using the RS 232 Computer Interface Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 9 Connecting the RS 485 Computer Interface Instructions for setting up this interface are in Section 2 1 6 on page 2 12 The RS 485 communications option permits data output to and gauge control by a host computer using RS 485 digital communications Communications handshake is by a command response mechanism Information on Commands begins in Section 4 12 1 on page 4 30 Connectors J1 and J2 Figure 3 15 on the rear of the control unit are wired parallel and are interchangeable Connection can be made by daisy chaining gauge controllers together with the signal from the host computer going into one connector then out the other connector to another gauge controller 5 RS 485 Pin 4 3 Signals Number 8 TX 4 3 TX 5 2 RX 8 6 RX 9 1 Ground 3 Figure 3 15 RS 485 Connector The maximum total cable length is 4 000 ft No more than 32 devices can be connected to one RS 485 communications line When an RS 485 network is in an idle state all nodes are in listen receive mode
23. couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously A injured or even killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product 2 Provide a connection to ground for other instruments with electrodes in the vacuum system possibly exposed to high voltage electrical discharges 3 Provide a connection to ground for each ungrounded metal component in on or around the vacuum system including the gauge envelopes which personnel may touch and which can potentially be exposed to high voltage electrical discharges within the vacuum system For example a metal bell jar resting on an organic O ring must be connected to ground if an ionization gauge is to be used or if other high voltage sources are present in the vacuum system Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of IS a vacuum system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground All conductors in on or around the vacuum system that are exposed to IS potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected t
24. in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device If you do not have process control capability skip to Section 2 1 5 on page 2 9 Use the catalog number on the front of the Process Control module together with Figures 2 9 and 2 10 to identify the process control capability installed in your unit Even if the control logic is simple and obvious we recommend that you develop a logic diagram of the process control function Prepare a specification table which lists the proposed pressure setting system measurement point and relay status for each Process Control channel Draw a circuit schematic which specifies exactly how each piece of system hardware will be connected to the Process Control relays Do not exceed the relay ratings Relay Ratings Relay Configuration SPDT single pole double throw Relay Contact Rating 5 A 60 Vdc resistive load 30 V rms 42 4 Vpk Relay Contact Type 5 A gold plated for low level switching NOTE Ifthe relay contacts are used to switch high currents the gold plating may be consumed This may make the contacts unsuitable for low level signal switching in the future Attach a copy of the Process Control circuit diagram to this manual for future reference and troubleshooting The required process control connections may be made later See Section 3 6 on page 3 8 If application assistance is desired
25. justify storing calibration data in memory The calibration data is stored in a nonvolatile memory in the electrometer module Granville Phillips calibration data for N3 is averaged over a number of nominally identical Stabil lon MERGE Gauges and programmed in memory Standard Calibration C91 XXXX 11 All Stabil lon Systems are supplied with this feature This is indicated by a sequence of 001 002 in the top display line after the initial powerup 360118 Calibration Memory Module If the Stabil lon Gauge calibration is for a gas type other than N or air we suggest placing a label near the first line of the display indicating the gas type or types used for calibration to prevent mix ups 4 4 1 Memory Modules for Stabil Ion Gauge IG1 and IG2 data is stored independently and must be loaded from separate Memory Modules Each module contains data for both cathodes in a Stabil lon Gauge New data for each gauge can be transferred to the internal memory using a Memory Module which has been programmed by Granville Phillips The IG destination for the data contained in the Memory Module is predetermined at the time it is programmed and is stored along with the data The data is individually serialized and the serial number is printed on the module s label as well as being stored electronically in the memory When the Dual Stabil lon Gauge option is not installed in the Power Supply as evidenced by only one IG connector on the rear pa
26. labeling of each lead will help prevent costly mistakes CONVECTRON PRO Front Panel of Control Unit with Door Open Showing Locations of Override Switches 2 Ensure that the Process Control channel override switches are all set to off 3 Connect the component end of the cable to the system component to be controlled 4 Plug the connector into the back of the Control Unit 5 Refer to Section 4 10 on page 4 24 for instructions for setting setpoints 3 7 Connecting Stabil Ion Remote Control This factory installed option permits the following functions to be controlled from a remote location BI Ionization gauge IG1 1G2 on off M Pressure range selection M Degas on off W lonization gauge lockout Cathode select 1 or 2 Front panel switch disable In addition the following functions are outputted in the form of relay contact closures which can signal the status of the instrument to a remote location or control external devices E 1G 1 on off Degas on off B IG 2 on off Circuit fault detection The optically isolated control inputs are on a 26 pin remote input connector The relay contact outputs are accessible on the 15 pin remote output connector Series 360 Stabil lon Instruction Manual 360119 Rev A Installation Remote Output Remote Input PROCESS CONTROL ANALOG ELECTROMETER REMOTE POWER OUTPUT A ig4 COL RS 232 OUTPUT SUPPLY A O 1 13 c A OUT 13 O es Ona 14
27. o Data Port SET A PM A TEES O 2d IG1 185 fox Io1 IG2 Bele TE 2 gt s O 7 Set OIIO just i M Prebeure V WA Range NP T6 M hy I2 AUT ar Degas On A et SET Mu Cathode Scot 5 c SO b eps Jigal s C 31 bs N Ma O AM aN N 1 2 P Q vac E C 2 Remote Co Control Unit Front Panel with Door Open Showing Convectron Gauge Zero and Atmospheric Adjustments 1 Evacuate Convectron Gauge A to a pressure known to be less than 1x10 Torr 2 With power on and at vacuum less than 1 x 10 Torr for at least 15 minutes adjust VAC for gauge A see Figure 4 17 until display A indicates 0 0 0 Torr mbar or 0 0 0 Pa not 1 0 4 1 0 2 or 0 0 0 A display of 0 0 0 indicates the gauge is set below 0 00 3 Let the pressure in the gauge increase to the local atmospheric pressure 4 Read the local atmospheric pressure on an accurate barometer nearby 5 With the power on adjust ATM adjustment for gauge A until display A indicates the local atmospheric pressure in the pressure units you have selected 6 Repeat the above steps for Convectron Gauge B Series 360 StabiLlon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 9 Convectron Gauge Analog Output Signal If the Convectron Gauge capability is installed a voltage output signal proportional to the common logarithm of the pressure indicat
28. on pressure with the SET adjustment for IG1 5 To deactivate this capability place the AUTO switch for IG1 in the OFF position 6 Set the Convectron Gauge B IG2 function the same way Do not leave either switch in the SET position as this prevents pressure from being displayed Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 8 Adjustment of Convectron Gauge Zero and Atmospheric Pressure Indications Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system See Section 4 6 1 on page 4 12 before using with other gases Each Convectron Gauge is individually computer calibrated for Nz Adjustment of the zero should not be necessary unless readout accuracy is required below 1 x 10 Torr Adjustment of the atmospheric indication should not be necessary unless compensating for long cables or variations in mounting orientation The Convectron Gauge has a stable temperature compensated design and each controller is also calibrated to provide accurate readout of Nz pressure with any gauge when properly installed with the gauge axis horizontal y R 232 ELECTROMETER CONVECTRON PROCESS CONTROL D C IGI AUTO Off SP On S
29. on the units bearing the CE mark Each gauge tube is marked with a date code This date code must be F7 June 1997 or after M Cleanliness pays Keep the port cover in place until moments before installation M ror proper operation above about 1 Torr install Convectron Gauges with the gauge axis horizontal To minimize pressure indication errors avoid installing the Convectron Gauge where it will vibrate Vibration causes convection cooling of the sensor and will cause the pressure indication to be high Series 360 Stabil lon Instruction Manual 360119 Rev A Installation B Do not mount the zin gauge in a manner S n N such that deposition 275071 of process vapors i FOR PROPER OPERATION upon the internal ABOVE 1 TORR THIS CL surfaces can occur TUBE AXIS MUST BE through line of sight HORIZONTAL 275071 i access to its interior If condensates may be present orient the port downward to help liquids drain out PA 275071 1 18 IN 275154 pns REF T 2 25 IN MIN ALLOWS CLEARANCE FOR TURNING TUBE 65 IN MIN 1 8 NPT MOUNT NW16KF FLANGE COMPRESSION MOUNT MOUNT QUICK CONNECT Convectron Gauge Installation 3 3 1 Compression Mount Quick Connect Do not use for positive pressure applications The gauge may be forcefully ejected The gauge port is designed to fit a standard 1 2 in compression quick connect mounting such
30. rises slightly above the auto turn on setpoint if the electrometer overpressure setpoint does not trip first The automatic on off function will execute only once per setpoint crossing For example if the IG is turned off manually when below the setpoint the auto on function will not turn it back on until the Convectron Gauge pressure has risen above the setpoint and then dropped below it again 4 7 1 To Set the On Off Pressure for IG1 IG2 1 Verify that the pressure indication for Convectron Gauge A is reading above the desired setpoint Alternatively unplug Convectron Gauge A See note below prs RS 232 ELECTROMETER CONVECTRON PROCESS CONTROL 7x 6 1 AUTO Of SP On LY o o Data Port eee N SET A m Gel S 81 168 2 Scale YN te Adis t O 2 Set o O Pressure 3 Range v CST ATE 62 AUTO at as Degas On UM OH ore ser E Cathod d NY e NA S HA ja 2 bad N N Neu O amel IG1 IG2 uv L O vac SS Remole Control Unit Front Panel with Door Open Showing lonization Gauge Auto Turn On Off Switches 2 Place the AUTO switch for IG1 in the SET position See Figure 4 16 3 The existing turn on pressure is displayed on the A display 4 Setthe desired turn
31. the Control Unit and make the following settings on the electrometer module for each Stabil lon Gauge channel 1 For completeness all available capabilities are assumed present Not all capabilities may be present in the product you have specified Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation RS 232 ELECTROMETER CONVECTRON ROCESS CONTROL IG 1 Of SP On VJ y X 7 O 9 Data Port ser ye 4 1 d A B AT IG1 105 m ic2 cale 2 N actor lan n TOxsme e o Adjust A e O 1 C vac KON Pressure d 3 Range My v p agb O ez ae it N Degas On J L H N j OFF SET Ney aes e j O O Cathode N Vn P C N d CJ co m J p S N A O m OA J 02 C wc aie w d H C Remot M 4 Control Unit with Door Open Showing Electrometer Module Controls a SCALE FACTOR Assuming the gas in the system is air or N3 adjust IG1 and IG2 scale factors to 1 00 with the scale factor switch set in the respective positions Then set the scale factor switch at OFF See Section 4 1 2 on page 4 4 for other gases b CATHODE Set at 1 for primary cathode set at 2 for alternate cathode if required Sepa
32. the gauge is turned on Voltages as high as 850V peak are present during degas Do not touch the Stabil lon Gauge during degas operation if the Guard has been removed Serious burns can occur Install suitable devices that will limit the pressure to the level that the b vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installing the product In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions are correct on manual systems and 3 the automation is correct on automated gas delivery systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized Series 360 Stabil lon Instruction Manaul 360119 Rev A Safety Instructions Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures The sensor
33. type or types used for calibration to prevent mix ups 4 1 3 Overpressure Shutdown This control is factory set so the ion gauge will shut down when the pressure rises above the overpressure setpoint pressures shown in Table 4 1 See Section 6 4 on page 6 5 if you want to change the overpressure setpoint 4 2 Degassing the Stabil Ion Gauge Danger high voltage 180V is present in the Power Supply on the cable fa and at the ion gauge when the gauge is turned on Voltages as high as 850V peak are present during degas fa Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product fa Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors are maintained at earth ground This hazard is not peculiar to this product Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation fa All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to eart
34. used with this or any similar high voltage product must be maintained at earth ground for safe operation The power cord of this product shall be connected only to a properly grounded outlet Be aware however that grounding this product does not guarantee that other components of the vacuum system are maintained at earth ground Complying with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product Verify that the vacuum port to which the Stabil lon Gauge is mounted is electrically grounded It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground Use a ground lug on a flange bolt i necessary All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times P Danger High Voltage The high voltages present within the Power Supply are capable of causing injury or death To avoid electric shock wait 3 minutes after power is removed before touching any component within the Power Supply This will permit charged capacitors to discharge be Danger high voltage 180V is present in the Power Supply on the cable and at the ion gauge when
35. 1 6A F 250V POWER FUSE AND USE 14A F 250V DEGAS FUSE Stabil lon Power Supply 1 Line power fuse 6 2 Grounding lug connect to earth ground with 7 12 AWG conductor 3 Degas power fuse 8 4 Line voltage selector switch 9 5 Line voltage selector switch 10 Line voltage selector switch Connector for interconnect cable to Control Unit Connector for Stabil lon Gauge 1 Connector for Stabil lon Gauge 2 Connector for power cable Series 360 Stabil lon Instruction Manual 360119 Rev A System Components System Components IEEE 488 RED LED ON INDICATES FAILURE LOG AMP MIMMUM ADJ i li coon Il I TALK ONLY CGA fi INVERT RTS aI CGB OVERCURRENT CGA i pyre FORMAT G rAcTonY BRIDGE CIRCUIT REMOTE OUTPUT o CGB 2 _ ADJ ONLY jen GAUGE UNPLUGGED h BAUD RATE HP FAILURE e AID FAILURE E 29 FAILURE 5 18 f 515 H 51 16 E E 5 5 LED S ITS 5 LOGIC B GREEN LED EL OFFsFAILURE RE mBAR PASCAL PC SLOW UPDATE PO Po ON PCI ms IG GAUGE ore 5 pg f ASSIGNMENT EE ANALOG OUT I6 DCDs1 1 pecas FULL SCALE CTS 1 me DSRe1 BAR PA SLOW D
36. 2 Interface Option None RS 232 RS 485 488 O00 o Gauge Options e None Dual Convectron Setpoint Options None 2 Setpoints for Stabil lon Gauge 6 Setpoint Relays 2 per channel W gt o Display Options Measurement Units Torr mbar Pascal vZ Power Cord Options North America and Japan 115 V North America 240 V Universal Europe 220 V United Kingdom 240 V BRwWN 2 1 2 2 3 1 3 2 3 3 3 4 3 5 3 6 Rep Pop o te a AUR PIRA Rak l v System Components a ed doen tn eet dre d A DS 1 1 Initial Setup Procedures Ste e E er MR REC ale A E 2 1 Control Unit 2 1 21 1 Top Cover Removal ete e RE ei er Jagd eR Re 2 2 2 1 2 Pressure Units Setup COMER ie ae eh el She eee 2 3 2 1 3 Pressure Display Rate of Update 0 ccc eect eee eee 2 4 241 4 Process Control Setups eee Cui shop eugene cag soa SE yess 2 5 2 1 4 1 Ion Gauge Assignment for Process Control 2 7 2134 2 Relay Polarity Setting uo ouch au fee feos SORES Hee NE 2 8 2 1 4 3 Proc ss Control Lips s ick Illy Rel NY PPG OE Pee 2 9 2 1 5 RS 232 Computer Interface Setup eee 2 9 2 1 5 1 Selecting the Byte Format 2 10 21 5 LT Character Framing YR ODE p a rar oP ste 2 10 21 5 12 TallcOnly Mode esee
37. 29 1 949 5 R E 6 M A u T G E E 15 5 8 8 515 9 26 12 5 85 x w IGE AGOE 1 14 GND O ANALOG O MIN ADJ OUTPUT B gx Control Unit Rear View Showing Locations of Remote Input and Output Connectors 3 7 1 Definition of Input States Hi open circuit or TTL 1 state to maximize noise immunity pull up to 5 volts pin 21 Low closed circuit selection to option common or TTL 0 state Maximum current 2 mA per low input INT 5 INT 5 TEER INT 5 40 mA MAX 35 i 5 45 HI LED INPUT 5 INPUT p i oS OR Q LED Q INPUT LOW 5 SUPPLY EXT 5V SUPPLY INT COM INT COM P O vocon Internal diagram Typical connection for optical isolation mode Typical connection for non isolated mode INT COM Remote Input Connections Use DA 26P Connector Supplied Series 360 Stabil lon Instruction Manual 360119 Rev A Installation Connections to DA 26P Connector Remote Operation Inputs 22 IG1 On Off 9 IG2 On Off 8 Degas On Off 7 IG Lockout Turns off IG and prevents turn on from any source 25 Keyboard Disable Prevents IG1 2 and degas buttons on front panel from functioning Remote Parameter Setup Inputs 26 Remote Enable Allows the backup cathode and range selection inputs to override the switches on the electrometer module s front panel The
38. 5 x 10 Torr by pulling the DEGAS input LOW after it has been HI for at least 35 msec The input must remain LOW for the duration of the degas Degas can be terminated through the remote input by 1 switching the degas input HI after it has been LOW for at least 35 msec or 2 turning off the IG Degas can also be terminated by allowing the programmed time to expire NOTE The state of the DEGAS input does not override other degas onloff commands from the front panel button the computer interface or the internal timer IG Lockout Input pin 7 HI allows normal IG operation LOW forces the IGs to turn off and positively stay off Keyboard Disable Input pin 25 HI allows the front panel IG1 IG2 and DEGAS buttons to function normally LOW prevents response from these buttons Remote Enable Input pin 26 The inputs for selecting the pressure range and the backup cathode will take precedence over the computer interface commands as well as the switch settings on the Electrometer Module whenever this line is held LOW When this line is open or HI the remote parameter setup inputs will have no effect Backup Cathode Inputs pins 3 4 HI cathode 1 selected LOW backup cathode 2 selected Pressure Range Inputs pins 5 23 HI high pressure range using 100 emission LOW low pressure range using 4 mA emission The REMOTE LED on the Electrometer module panel indicates parameter control status REMOTE LED Status Indications
39. EGASUM 2 amp 1 ANALOG OUT S 168 OFFSET pP FAILURE C7 RS 232 SHIELD ELECTROMETER CONVECTRON PROCESS CONTROL NOTE IEEE 486 dos Hom M Series 360 Stabil lon Instructi POWER SUPPLYICONTROL Top View of Stabil lon Vacuum Gauge Control Unit Cover and Door Removed on Manual 360119 Rev A Initial Setup Procedures 2 1 Control Unit Setup Open the front panel door and determine if any of the following options are installed Convectron Gauge Process Control RS 232 Computer Interface RS 485 Computer Interface IEEE 488 Computer Interface CONVECTRON PROCESS CONTROL IG 1 AUTO o0 Data Port SET o0 O O Control Unit Front Panel with Door Open Showing Location of Computer Interface and Process Control Modules If none of the above options are present and if the pressure display units of measure are correct See Figure 2 2 and you do not wish to change the degas timer from the factory setting of 10 minutes skip to Chapter 3 Installation If one or more of the above options is present or if you wish to change the 5 2 43 8 E units of measure or degas time setting 2 you may find it necessary to re 5 67 2 pease ON configure certain switches within the 5 o Control Unit 745 8 TORR
40. Figure 4 12 locate 760 Torr on the left hand scale travel to the right to the intersection with the Freon 22 curve and then down to an indicated pressure of 11 Torr Nz equivalent Thus in this hypothetical situation the maximum safe indicated pressure for Freon 22 is 11 Torr For the sake of safety it is prudent to place a warning label on the instrument face which under the assumed conditions would read DO NOT EXCEED 11 TORR FOR FREON 22 If the Convectron Gauge calibration is for a gas type other than N or air we suggest placing a label near the second and third lines of the display indicating the gas type or types used for calibration to prevent mix ups Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation Example 2 Indicated to true pressure conversion Assume you wish to determine the true pressure of helium in a system when the Convectron is indicating 10 Torr On Figure 4 11 read up from 10 Torr N equivalent indicated pressure to the Helium curve and then horizontally to the left to a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indication of 10 Torr Nz equivalent Example 3 True to indicated pressure conversion Assume you wish to set a process control setpoint at a true pressure of 20 Torr of CO On Figure 4 11 on page 4 16 locate 20 Torr on the true pressure scale travel horizontally to the right to the CO curve and then down t
41. Granville Phillips Series 360 Stabil lon Vacuum Measurement Controller eemks Technology for Productivity Granville Phillips Instruction Manual Instruction manual part number 360119 Revision A September 2014 Granville Phillips Series 360 Stabil lon Vacuum Measurement Controller This Instruction Manual is for use with all Granville Phillips Series 360 Vacuum Measurement Controllers eemks Technology for Productivity Granville Phillips For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Email gp csr mksinst com Corporate Office MKS Instruments Inc 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 978 645 5500 www mksinst com Instruction Manual 2014 MKS Instruments Inc All rights reserved Granville Phillips Stabil lon and Convectron are registered trademarks of MKS Instruments Inc All other trademarks and registered trademarks are the properties of their respective owners Granville Phillips Series 360 Stabil lon Vacuum Measurement Controller Catalog numbers for Series 360 Stabil Ion Vacuum Measurement Controller Left Mount side by side with Power Supply 360501 22 2 2 d Half Rack Mount remote Power Supply 36050
42. If the Controller is set for pressure range 1 low pressure range 2 high cathode 1 1 and cathode 2 2 then the response would be 0 1 0 1 CRLF Series 360 Stabillon Instruction Manual 360119 Rev A GTL Definition Modifiers Response LLO Definition Modifiers Response Error Messages Preparing the Stabil lon System for Operation Send control back to the electrometer front panel switches none OK if command accepted or INVALID if rejected Local lockout of the electrometer front panel gauge control switches none OK if command accepted or INVALID if rejected If an error is found in the incoming message the following messages will be returned in place of the normal response and if the SRQ mode is used bit 5 in the serial poll response byte will be set OVERRUN ERROR Returned if the incoming message overflows 360 s buffer SYNTAX ERROR Returned if the message fails to parse as a valid 360 command Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation Series 360 StabiLlon Instruction Manual 360119 Rev A Operation of a Stabillon System The instructions in this chapter assume the instructions for Setup Installation and Preparing For Operation have been completed See Chapters 2 3 and 4 2 Press the power ON switch on the Control Unit see Figure 5 1 If Convectron Gauge capability is installed Convectron Gauge pressures w
43. Level Immunity 3 1 2 Cable Installation Statement It is intended that all wiring either to or from the Stabil lon Gauge Controller unit whether supplied by Granville Phillips or not be installed in accordance with the safety requirements of NEC NFPA 70 Cables provided by Granville Phillips for connection to sensors or transducers is ata minimum designed for use as Appliance Wiring Material UL category AVLV2 and is constructed of appropriate material and dimensions for the voltages and currents provided by the Stabil lon Gauge Controller unit It is emphasized that it is the user s responsibility to install cables to from the Stabil lon Gauge Controller unit whether provided by Granville Phillips or not in accordance with the applicable local state and national safety requirements Raceway and or conduit may be needed for certain installations Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 1 3 Environmental Conditions Indoor Use Altitude up to 2000 meters Temperature 0 C to 40 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Transient overvoltages according to INSTALLATION CATEGORY over voltage category II POLLUTION DEGREE 2 in accordance with IEC664 3 2 Stabil Ion Gauge Installation Verify that the vacuum port to which the Stabil lon Gauge is mounted is y electrically grounded It is essential for personn
44. Phillips for service andi repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications 6 2 Damage Requiring Service Disconnect this product from the wall outlet and any other power sources and refer servicing to Qualified Service Personnel if any the following conditions exist M The gauge cable power supply cord or plug is damaged Liquid has been spilled onto or objects have fallen into the product M The product has been exposed to rain or water Ei The product does not operate normally even if you have followed the Operation Instructions Adjust only those controls that are covered in the instruction manual Improper adjustment of other controls may result in damage and require extensive work by a qualified technician to restore the product to its normal operation M The product has been dropped or the enclosure has been damaged The product exhibits a distinct change in performance This may indicate a need for service Replacement Parts When replacement parts are required be certain to 3 use the replacement parts that are specified by Granville Phillips or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Safety Check pon completion of any service or As to this product A ask t o Qualified Service Person to perform safety checks to determine that the p
45. RR RR 2 11 25 2 Handshaking i tee pru peperEP PS BELA ERSNE ES RORERC REESE 2 11 2 1 6 RS 485 Computer Interface Setup e 2 12 PVG 2 13 2 1 6 2 Response Delay for the RS 485 Interface 1 cee ees 2 13 2 1 6 3 Selecting the Byte Format for RS 485 Communications 000 2 13 2 1 6 3 1 Baud Rate oe Rte edet ERR ER doi ed 2 13 2 1 6 3 2 Character Framing for the RS 485 Computer Interface 2 14 2 1 7 IEEE 488 Computer Interface Setup sees 2 15 2 1 7 1 Selecting the Interface Bus Address 0 eee 2 15 217 32 Talk Only Mode 0 cede eid eee en ea ee eed eee Bee 2 15 2 17 3 SRO Mode 7E wes otek Cole eee A A Lett Bt 2 16 2 1 8 Degas Timer occ eth Steak WG E ee AA cra A eU M et aca tes 2 16 2 1 9 Replacing Control Unit Cover eee ee ene 2 17 Power Supply Setup 1222 9elA EE we et das wet eA ER ne A Ed S PER eed 2 17 3 1 Gauge Installation Dips eeu ei eun ees ete i tbe a 3 1 31 1 EMC scat ria peed oe NARRATUR 3 1 3 1 2 Cable Installation Statement head od avd eee a tna Ae 3 1 3 1 3 Environmental Conditions ressis meneren i ea n 3 2 Stabil Ion Gauge Installation sissi aiai cc m 3 2 Convectron Gauge Installation 3 3 3 3 1 Compression Mount Quick Connect eee en 3 4 3 3 2 TS NPT MOUDE eor
46. RY 7 TAB DIRTY YES YES IGPRESSURE V V DISPLAY FINISH 2 Stabil lon Gauge Display REPLACE CABLE Series 360 Stabil lon Instruction Manual 360119 Rev A CONVECTRON gt Service and Maintenance DISPLAY BEGIN NP A READ PRESSURE SELECT CORRECT REPLACE CABIE DISPLAY UNITS REPLACE GAUGE X al YES IS Is PRESSURE SWITCH DISPLAY AS N CHECK DISPLAY SET YES CHECK CHECK EXPECTED 7 UNITS SWITCH CORRECTLY CONVECTRON CONVECTRON GAUGE GAUGE CABLE YES Is Is CABLE N NO NO y CHECK CHECK RANGE IN Rs CABIE LENGTH LONGER THAN VACUUM RANGE 104 DECADE CALL FACTORY A YES Y RECALIBRATE CONVECTRON gt VAC amp ATM DISPLAY FINISH Convectron Gauge Display 36085232 IEEE 488 BEGIN SEND MESSAGE REPLACE CABLE CORRECT SETUP CORRECT SETUP Np YES YES is a CABLE ENCHE Eu NO CHECK COMPUTER DAMAGED NO CHECK COMPUTER SET NO 2 gt INTERFACE 7 CABLE KEORECINE TERMINAL 360 SETUR INCORRECTLY YES CHECK syntax NQ CHECK P x gt MESSAGE SYNTAX s INCORRECT 7 MESSAGE VALIDI
47. S IG command will return pressure from the gauge which is on and 9 99E 09 if neither is on Definition Turn IG1 on or off Modifiers ON or OFF Response OK if command accepted INVALID if rejected Example From computer IG1 ONCRLF From 360 OKCRLF NOTES 1 ThelG1 ON command will be rejected as INVALID if IG1 is already on and IG1 OFF will be rejected if IG1 is already off 2 A response to the IG1 ON command of OK indicates only that a signal requesting that IG1 be turned on has been sent to the electrometer IG1 may fail to come on e g if the system pressure is too high or if the gauge is disconnected To verify that IG1 is on use the DS IG1 command If the gauge is off or in its first few seconds of operation after being turned on a pressure of 9 99E 9 will be returned IG2 Identical to IG1 but applies to IG2 PCS Definition Display process control channel status Modifiers 1 or 2 or 3 or 4 or 5 or 6 or B or none Response Depends on modifier Modifier single digit 1 through 6 response single ASCII digit 0 if the corresponding relay is inactive 1 if active See Example 1 Modifier B response a byte of data with bits O through 5 set clear according to whether the corresponding relay is active inactive Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte See Example 2 Modifier absent response will be a string of 6 ASCII O s and 1 s separated by commas giving the statu
48. Service and Maintenance ree V he rA LES FUE We He eU eis bee ae 6 1 61 Service Guidelines i4 vec eS km riesci duc R ARE E RR 6 1 6 2 Damage Requiring Service cisco her quite rese e S y une e ba RR A He e Ee 6 2 6 3 sPault Relay esu Ae ete phi diets e ase e 6 4 6 4 Overpressure Shutdown iones p OE Ae ee Hee RE REA AETERNUS 6 5 6 5 Electrometer Minimum Calibration Adjustment eee 6 6 6 6 Flashing De gas Light ey eg sh e re a eR Uere URS 6 6 6 7 Troubleshooting the Convectron Gauge 6 7 6 8 Convectron Gauge Test Procedure cnet 6 6 9 Cleaning Contaminated Convectron Gauges 6 Series 360 Stabil lon Instruction Manual 360119 Rev A Table of Contents 6 10 Process Control Troubleshooting eee 6 9 6 1 RS 232 Troubleshooting sd et Hx ey er e ee s e b ane Me ens 6 9 6 12 RS 485 Troubleshooting 0 eee eee eens 6 10 6 13 JEEE 488 Troubleshooting sd piled ed kd RR e er eee Ea As 6 10 6 14 Field Installation of Modules essseeeeeeee I 6 11 6 15 Troubleshooting Flow Charts 0 0 cece cece III 6 12 6 15 Service Form ete eee si OE RG Eee Gee oe ee AP ot 6 15 n X Hu
49. TY TO gt CALL FACTORY YES YES V 3 CORRECT SYNTAX MAKE MESSAGE 360 5232 IEEE 488 FINISH _ RS 232 IEEE 488 Interface Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance Series 360 Stabil lon Instruction Manual 360119 Rev A AC line voltage Between 180V to 240V 2 18 Between 90V to 130V 2 17 Analog output CONVECTRON Gauge Connecting 3 7 STABIL ION Gauge Connecting 3 7 Bus address 2 15 Byte format 2 10 Cable installation statement 3 1 Cathode 4 2 Certification product 1 ix Command syntax IEEE 488 4 32 RS 232 4 26 Connector STABIL ION Gauge 3 19 Control Unit Drawing 1 2 1 4 1 6 Mounting 3 5 Removing top cover 2 2 Set up 2 1 CONVECTRON Gauge Analog output connecting 3 7 Cleaning Contaminated Convectron Gauges 6 8 Gases other than nitrogen or air 4 12 Installation 3 3 Mounting 3 3 Operation 4 11 5 1 Pressure measurement 4 11 Test Procedure 6 8 Vacuum connections 3 4 Zero and atmospheric indications 4 22 DA 26P Connector 3 11 Damage requiring service safety 1 vi Degas Flashing light 5 2 Power timer 2 16 Display formats 5 1 Drawings Control Unit Front panel 1 2 1 3 Rear panel 1 4 Top view 1 6 Power Supply 1 5 Six channel Process Control 2 6 STABIL ION Gauge 3 20 T
50. alue by one display unit A 10 hysteresis is automatically programmed into each setpoint for returning pressures Table 2 4 illustrates this using an assumed setpoint pressure and assuming the polarity is set for falling pressure activation Setpoint Hysteresis 6 30 X 107 Falling 6 29 X 107 6 30 X 107 Rising 6 30 X 107 10 7 00 X 107 2 1 5 RS 232 Computer Interface Setup If your Control Unit does not have this capability skip to Section 2 1 6 on page 2 12 This available capability permits data output to and gauge control by a host computer Output is either by a command response mechanism or by a talk only mode which is invoked via a switch on the RS 232 board If you have this module in your unit configure it to your system requirements by setting the switches as directed in Section 2 1 5 1 on page 2 10 A variety of baud rates and byte framing options are available as well as switches to force the handshake lines to an always true condition The 360 Controller RS 232 factory defaults are 9600 BAUD 8 data bits no parity 1 stop bit DCD CTS and DSR forced true The interface protocol is set using 8 switches Refer to Figures 2 13 2 14 and 2 15 for switch numbering NOTE Internal switches are read upon 360 power up Changes in settings will take effect upon next power up cycle Series 360 Stabil lon Instruction Manual 360119 Rev A Initial Setup Procedures 2 1 5 1 Selecting the Byte Format Dip switch
51. and and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated by spaces No spaces may appear within the command or the modifier only between them The address expected is programmed via the switch settings on the rear of the module The syntax is AA where AA is an ASCII representation of the hex address of the controller The terminator expected is an ASCII carriage return denoted here by CR Note that the terminator is sometimes appended automatically by the host computer s interface software to the message string supplied by the user If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored All messages will receive a reply consisting of an ASCII string terminated with CR Pressure numbers will be returned in the format X XXE XX Messages may use upper or lower case alpha characters The controller will always respond with upper case characters Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 12 1 RS 485 Command Syntax IG1 Definition Turn IG1 on or off Modifiers ON or OFF Response OK if command accepted INVALID if rejected Example From computer IG1 ONCRLF From 370 OKCRLF NOTES 1 ThelG1 ON command will be rejected as INVALID if IG1 is already on and IG1 OFF will be rejected if IG1 is already off
52. as an Ultra Torr fitting 3 3 2 1 8 NPT Mount Fits standard 1 8 NPT female fitting Wrap the threads of the gauge port with thread sealant tape and hand tighten Do not use a wrench or tool Tighten only sufficiently to achieve a seal 3 3 8 VCR9 VCO Mount Remove the plastic or metal bead protector cap from the bead When using gasket place it into the female nut where applicable Assemble components and snug finger tight While holding a back up wrench stationary tighten the female nut 1 8 turn past finger tight for 316 stainless steel and nickel gaskets or 1 4 turn past finger tight for copper and aluminum gaskets 3 3 4 NW16KF Flange Mount The KF mounting system requires an O ring and centering ring to be placed between the mating flanges The flanges are then held together with the aluminum flange clamp by tightening the wing nut Maximum pressure for this style mounting system is 1000 Torr absolute 3 3 5 ConFlat Flange Mount 1 To minimize possibility of leaks with ConFlat flanges use high strength stainless steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces To avoid contamination do not use nonmetal gaskets 2 After finger tightening all bolts continue tightening about 1 8 turn in crisscross order e g 1 4 2 5 3 6 4 until flanges are in contact After contact further tighten each bolt about 1 16 turn 1 Ultra Torr VCR and VCO are registered trademarks of Cajon Co S
53. ashing No response or garbled output Baud rate incorrect character length incorrect character framing incorrect or bias resistors do not exist or are incorrect Intermittently will not respond Poor cable connections ground fluctuations the maximum common mode potential across the system is 7 volts and EMI from other sources Bias resistors do not exist or are incorrect If the start character is not received properly the Series 360 controller may not interpret it as a start character and the controller will not respond Host software must be prepared to re send a command if a response is not generated within a reasonable period of time OVERRUN ERROR message Stop bit s incorrect host software failure PARITY ERROR message Parity incorrect SYNTAX ERROR message Message to 360 Controller not in accord with specified syntax 6 13 IEEE 488 Troubleshooting If your interface fails to function first verify the following 1 Switch settings Be sure the vacuum system controller knows the address of the 360 as set by the dip switches Be sure the vacuum system controller does not reserve certain addresses for system devices e g a printer Be sure the 360 is not in the talk only mode unless desired for data logging Be sure if the SRQ mode is set that your controller performs a serial poll in response to the SRO from the 360 2 Check interface wiring Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenanc
54. ation 3 Connect the Stabil lon cable s to the Power Supply first before connecting them to either the gauges or the Control Unit vac system uh Foe Gauge STABIL ION System coaxial cable il 1 Power Supply ee coaxial cable facility ground Power Supply and Control Unit Rear Views Showing the Cable Connections to the Stabil lon Gauges 4 Connect the coaxial cable s to the corresponding connector on the Control Unit IG1 to IG1 IG2 to 2 5 Connect the Stabil lon Gauge cable s to the Stabil lon Gauge s as follows a Line up the locating notch on the connector locking ring with the matching ridge on the blue connector shell See Figure 3 20 The cable will exit in line with the locating key SS b Lineup the cable connector with the gauge pin guard SS cs S c Insert the cable connector into the pin guard of the Stabil lon Gauge d Rotate slightly until the locating key engages the cable connector keyway locating ridge e Push on the connector Make sure the connector fully seats and the locking ring ears engage the pin guard zCORTBeter ears f Rotate the blue Guard clockwise until it stops against the detent The cable is now locked to the Stabil lon Gauge connector cable exit Stabil lon Gauge Connector Orientation Prior to Installation The Guard is designed t
55. biLlon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation normal operation Pressure Pa during degas Pressure Torr mbar 0 1 2 3 4 5 6 7 8 9 10 11 IG analog output V MM lonization Gauge Analog Output vs Pressure 4 6 Preparing for Convectron Gauge Operation Convectron Gauge pressures are indicated on lines A and B of the 360 Controller display Using the N calibration to pressurize a vacuum system above about 1 Torr P with certain other gases can cause dangerously high pressures which may cause explosion of the system See Section 4 6 1 on page 4 12 before using with other gases Install suitable devices that will limit the pressure to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below that pressure which the system can safely withstand Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installing the product In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions are correct on manual systems and 3 the automation is correct on automated systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is p
56. bil lon Gauge is first powered up or a Convectron Gauge is disconnected If it is desired that a process control relay be held in one state the manual override switch should be used If the setpoint is adjusted below 1 0 x 10 to 0 0 then it will always be deactivated unless polarity is reversed 4 10 2 To Display a Setpoint ELECTROMETER 1 Be sure the scale factor switch on the electrometer module is in its center position Figure 4 20 or the Data Port calibration data in display line 1 will conflict with the display of setpoints 1 and 2 m N 2 geb 2 Adjust the channel select thumbwheel to the number of B gU m the process control channel for which you wish to display the setpoint xz pange ie N y 3 Press and release either SET button The setpoint will appear for 2 seconds in the same display line as the Cathode r P o RP KO associated gauge T E Setpoints 1 and 2 appear in the IG display line Rd arcs Setpoints 3 and 4 appear in display line A Setpoints 5 and 6 appear in display line B GE Electrometer Module Showing Scale Factor Switch Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 10 3 To Modify a Setpoint 1 Adjust the channel thumbwheel to the number of the channel for which you wish to change a setpoint 2 Press and hold the SET button for the direction you wish the setpoint to change A
57. bil lon System for Operation 1000 No air freon 22 Oo 100 J Ne Use only when gauge axis is horizontal Do not use this data with transducers other than the G P Series 275 Convectron Gauge True Pressure mbar Pressure units equivalence 1 mbar 100 pascal 10 102 10 1 10 100 1000 Indicated Pressure mbar nitrogen equivalent Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 mbar Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 7 Ionization Gauge Auto Turn On Off Warning If used improperly Convectron Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system For use with gases other than air or No consult the gas type correction charts in Section 4 6 1 on page 4 12 If a Convectron Gauge is exposed to the same pressure environment as the lon Gauge then the Convectron Gauge may be used to automatically turn on the IG Convectron Gauge A can turn on IG1 and Convectron Gauge B can turn on IG2 Stabil lon Gauge automatic turn on occurs when the Convectron Gauge pressure drops below the auto turn on setpoint defined by the auto turn on setting The Stabil lon Gauge will also be turned off automatically when the pressure
58. can be implemented from the electrometer front panel or from the remote setup connector as well as from the computer interface Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation CATH2 Identical to CATH1 except applies to IG2 PR1 Definition Modifiers Response Example NOTES Select pressure range for IG1 operation L or H OKCRLF From computer PR1 L From 360 OKCRLF This function can be implemented from the electrometer front panel or from the remote setup connector as well as from the computer interface PR2 Identical to PR1 except applies to 2 SWS Definition Modifiers Response Example GTL Definition Modifiers Response LLO Definition Modifiers Response Error Messages Display status of gauge control switches remotes none 0 cath1 1 0 2 21 O prllow 0 pr2 low 1 cath1 22 1 cath2 2 1 pr1 high 1 pr2 high If the Controller is set for pressure range 1 low pressure range 2 high cathode 1 1 and cathode 2 2 then the response would be 0 1 0 1 CRLF Send control back to the electrometer front panel switches none OK if command accepted or INVALID if rejected Local lockout of the electrometer front panel gauge control switches none OK if command accepted or INVALID if rejected If an error is found in the incoming message the following messages will be returned in place
59. contact a Granville Phillips Application Engineer at the number listed on the title page of this manual Series 360 Stabil lon Instruction Manual 360119 Rev A Initial Setup Procedures NOTE 1 Normally Open Common Channel 1 is user l Normally Closed assignable to IG1 or IG2 or IG1 and 2 independent sets IG2 of relay contacts Channel 2 is user assignable to IG1 or is 2 13 8 IG2 or IG1 and IG2 a 5 87 2 independent of how B 745 Channel 1 is j assigned Rear Panel Connector Pin Designators Two Channel Process Control NOTE 2 6 independent sets of relay contacts Channels 3 and 4 are factory assigned to Convectron Gauge A oo nm Channels 5 and 6 are factory assigned to Convectron onnector Pin Designators Note 2 Gauge B Six Channel Process Control Series 360 Stabil lon Instruction Manual 360119 Rev A 2 1 4 1 Ion Gauge Assignment for Process Control A maximum of 6 process control channels are available depending on the particular option you have specified A channel is defined as the combination of vacuum gauge indication setpoint circuitry and the associated relay which is actuated when the pressure indication corresponds to the setpoint Process Control channels 1 PC1 and 2 PC2 are controlled
60. cters until the terminator LF is received 2 1 6 RS 485 Computer Interface Setup If your Series 360 Stabil lon Gauge Controller does not have this capability skip to Section 2 1 7 on page 2 15 The RS 485 communications option for the Series 360 Stabil lon Gauge Controller permits data output to and gauge control by a host computer using RS 485 digital communications Communications handshake is by a command response mechanism A variety of baud rates and byte framing options are available The RS 485 byte format is configured to your system requirements using configuration switches located on the option board These switches are accessed by removing the controller top chassis cover The RS 485 factory defaults are 9600 BAUD 8 character bits no parity 1 stop bit Address 01 Internal switches are read upon power up Changes in settings will take effect upon next power up cycle Series 360 Stabillon Instruction Manual 360119 Rev A Initial Setup Procedures 2 1 6 1 RS 485 Address The address dial on the RS 485 module on the back of the controller and Switch S1determine the controller s RS 485 address This address can be any hex code from 00 to FF The address dial on the RS 485 module on the back of the controller determines the value of the least significant digit and the S1 switches determine the value of the most significant digit The S1 switch positions are binary and the weight of each switch when OFF is given
61. ction 6 10 on page 6 10 Cycle power and check all setpoints IG at too high pressure Auto turn off circuit in Convectron Gauge module is shutting off IG Emission current setting wrong for pressure in gauge Improper IG connector hookup Badly contaminated IG Damaged or contaminated cathode coating will not sustain emission Try alternate cathode Short in IG cable Short between IG electrodes Open cathode in IG Try alternate cathode Scale factor switch is not in its center position IG AUTO switch is left in the SET position IG contaminated Low L pressure range is not selected appropriately pressure is below 10 Torr Interference from other ion source Poor conductance in gauge s vacuum connection to chamber Gas source in plumbing to gauge such as leak or contamination Chamber pressure high because of leak contamination or pump failure Poor location selected for gauge Faulty gauge or power cable Faulty electrometer Series 360 Stabillon Instruction Manual 360119 Rev A Service and Maintenance Degas will not turn on IG shuts off when degas is initiated IG pressure reads extremely low IG pressure readout very erratic Green 18 LED out on control board Green 15 LED out Green 15 LED out Green 5 display LED out Green 5 logic LED out 6 3 Fault Relay System pressure above 5 x 10 Torr IG not turned on Degas fuse blown Badly contaminated IG Collec
62. d installed per the instructions in Chapters 2 and 3 b The gas in your vacuum system is air or No For other gases you must follow the instructions in Section 4 1 3 on page 4 5 for using Stabil lon Gauges and in Section 4 6 1 on page 4 12 for using Convectron Gauges c That you are reasonably familiar with the general theory of operation of hot cathode ionization gauges and thermal conductivity gauges We recommend you consult a good text book if you are unfamiliar with vacuum technology or require more information on the general theory of operation of an ionization gauge or thermal conductivity gauge Extremely useful information is provided in the following references Dushman S Lafferty J M Scientific Foundations of Vacuum Technique John Wiley amp Sons Inc Second Edition New York 1962 Redhead P A etal Ultrahigh Vacuum Chapman and Hall London 1968 O Hanlon J F A User s Guide to Vacuum Technology John Wiley Sons New York 1980 2 Turn on the Stabil lon System by pressing the Control Unit power switch labeled ON See Figure 4 1 3 Convectron Gauge equivalent N pressures will be displayed whenever power is applied if the gauges and cables are installed Make sure the IG1 AUTO and IG2 AUTO switches are in the IG AUTO ON or OFF position and have not been left in the set positions See Section 4 6 on page 4 11 for information on Convectron Gauge pressure measurement 4 Open the front door of
63. de 2 for normal operation If the same condition occurs after you have switched to cathode 2 it may indicate that the gauge needs to be replaced or that there is a contamination source affecting both cathodes See Step 6 on page 5 2 for more discussion Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 7 Troubleshooting the Convectron Gauge Module Convectron Gauge Module Troubles Pressure reading grossly in Controller out of calibration error Unknown gas type Gauge not mounted horizontally see Section 3 3 on page 3 3 Sensor damaged e g by reactive gas Gauge very dirty Extremes of temperature or mechanical vibration CGA over current indicator lit Cable short pins 1 3 CGB over current indicator lit Cable short pins 1 3 Bridge circuit indicators lit Circuit failure CGA unplugged indicator lit CGA unplugged open sensor wire CGB unplugged indicator lit CGB unplugged open sensor wire Microprocessor reset LED lit Microprocessor failure m EGA OVERCURRENT or flashing CGA BRIDGE CIRCUIT 88 GAUGE UNPLUGGED uP FAILURE AID FAILURE A D integration failure Circuit failure indicator lit or flashing THE REI Display reads blank Gauge unplugged open sensor wire Convectron Module Top View Showing Trouble Indicator LED s Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 8 Convectron Gauge Test Proced
64. door hinge pin is seated correctly Replace the four top cover Phillips head screws or three screws plus bracket screw Location of Screws for Replacing Top Cover 2 2 Power Supply Setup 1 With all cables disconnected check to see that the line voltage selector switches on the back of the power supply are set to local line voltage Incorrect settings may cause extensive damage to the product For AC line voltage between 90V to 130V set 90 130 V 50 60 Hz all switches to 115V as shown to the right Use 34 F 250V Power Fuse and use 2A F 250V Degas Fuse see Note 1 Replacement fuses are available from the vendors below or from Granville Phillips at the address on the title page of this manual NOTE 1 115V Nom Power Fuse is Littelfuse 4312 003 or BUSS AGC 3 or GP 009325 Degas Fuse is Littelfuse 2312 002 or BUSS AGC 2 or GP 009324 When going from 230V to 115V two new fuseholders are required SHURTER 40131 1666 or GP 006966 Series 360 Stabillon Instruction Manual 360119 Rev A Initial Setup Procedures For AC line voltage between 180V to 240V set _ all switches to 230V as shown to the right SUPPE TE Use 1 6A F 250V Power Fuse and use 1A F 250V Degas Fuse see Note 2 Replacement fuses are available from the vendors below or from Granville Phillips at the address on the title pa
65. e Be sure the cable is good try swapping in a known good cable IEEE 488 cables are available from G P Check for too many devices on the bus or too great a total bus length gt 20 meters Too many devices could cause problems due to capacitive loading Check command syntax Be sure you are following the syntax specified in Section 4 13 on page 4 32 IEEE 488 Troubleshooting Guide Micro controller reset LED lit Micro controller failure OVERRUN ERROR message Host software failure SYNTAX ERROR message Message to 360 not in accord with syntax No response Incorrect address setting Faulty cable 6 14 Field Installation of Modules 1 e 2 3 7 8 9 Turn off power With power off remove any cables from the Control Unit rear panel Observe antistatic precautions to avoid damaging static sensitive components inside the chassis Use a grounded conductive work surface Do not handle MOS devices more than absolutely necessary and only when wearing a high impedance ground strap Use conductive envelopes to store or ship MOS devices or printed circuit boards Do not operate the 360 Controller with MOS devices removed from the printed circuit boards See Section 2 1 1 on page 2 2 for how to remove the top cover Locate correct position for module Carefully remove the bus ribbon cable from all modules located to the right as you face the front panel of the position where the module is to be installed Remove connectors slo
66. e precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrument MKS Instrumens Inc disclaims all liability for the customer s failure to comply with these requirements The service and repair information in this manual is for the use of Qualified y Service Personnel To avoid shock do not perform any procedures in this YX manual or perform any servicing on this product unless you are qualified to do so Read Instructions Read all safety and operating instructions before operating the product Retain Instructions Retain the Safety and Operating Instructions for future reference Heed Warnings Adhere to all warnings on the product and in the operating instructions Follow Instructions Follow all operating and maintenance instructions Accessories Do not use accessories not recommended in this manual as they may be hazardous reduce the risk of fire or electric shock do not expose this product to rain 3 moisture Objects and Liquid Entry Never push objects of any kind into this product La through openings as they may touch dangerous voltage points or short out gt N parts that could result in a fire or electric shock Be careful not to spill liquid of any kind onto the products Series 360 Stabil lon Instruction Manaul 360119 Rev A Safety Instructions Do not substitute part
67. ed whenever a setpoint is changed It is then periodically re computed from the existing setpoints and checked against the pre existing value If for any reason such as a power fluctuation or electrical transient in the system a setpoint becomes corrupted this method will trap the error If this occurs the fault relay will be released if the Remote Input Output Module is installed and will remain released until power is cycled on the 360 Control Unit POLARITY ON 2 GAUGE ASSIGNMENT If a setpoint is found to contain garbled data which cannot be eL ee c interpreted as a valid setpoint it will be set to 0 and the fault relay if Spei present released Process Control Module Top View Showing uP Failure LED 6 11 RS 232 Troubleshooting Because the RS 232 standard is found in a bewildering array of configurations the first thing to do if trouble arises is check the following configuration options 1 Check switch settings Be sure baud rate character format and framing and interface protocol are matched to your host computer or terminal s requirements Note that there may be several mismatched parameters Check to see if your computer requires the reversed polarity RTS convention 2 Check interface wiring The pin designations for the RS 232 connector are shown in Table 3 4 on page 3 14 Note that the received and transmitted data lines are defined as seen by the 360 Control Unit Many companies supply null m
68. el safety as well as proper gt N operation that the envelope of the gauge be connected to a facility ground Use a ground lug on a flange bolt if necessary The Stabil lon Gauge is double packaged at the factory for cleanroom compatibility Handle the gauge carefully to avoid damage to the vacuum port screen after the hard plastic packaging is removed To reduce the chance of contamination do not remove a Stabil lon Gauge from its inner bag until moments before it is to be connected to the vacuum system M Any mounting orientation may be used However to minimize the possibility of excessive temperature at the electrical connector when degassing do not install the Stabil lon Gauges with the electrical connector above the gauge If it is necessary to install the gauge with the connector on top degas time must be limited to 10 minutes hour See Section 2 1 8 on page 2 16 When mounted horizontally the ventilation slots in the Guard will be oriented for best cooling if the gauge is installed with the locating key in the pin guard on the bottom See Figure 3 1 and Figure 3 3 Note in Figure 3 3 that the cable will exit in the direction the locating key is oriented Stabil lon Gauge Showing Connector Locating Key For best results locate pressure gauges close to the point where the pressure is to be measured Gas sources long tubulation or other O constrictions can cause large errors in indication If the gauge is placed 1
69. er to the numbers on 2 ET the printed circuit board not on the switch body Agr PC3 for the channel number Use Table 2 3 to assign relay DET polarity settings 7 zm IG2 mE The switches are factory preset as shown below for 9 IM ic channel n mbers relay activation below the pressure setpoint This is 10 on printed circuit most commonly desired when you want the relay to board be de energized under a high pressure condition numbers on xu que Switch not on n circuit board Partial Top View of Process Control Module Relay Polarity Switch Settings gt gt ON 6 above ON 3 above ee m iid m gt 5 xad gt gt ON 5 above ON 2 above lt a j 5 f oci m 5 G gt gt ON 4 above ON 1 above factory setting Series 360 Stabil lon Instruction Manual 360119 Rev A Initial Setup Procedures 2 1 4 3 Process Control Tips 1 The process control override switches can be used to hold relays on or off during initial turn on or during non typical process conditions 2 When IG1 and IG2 are off channels 1 and 2 are inoperative 3 When Convectron Gauges are disconnected channels 3 6 are inoperative 4 The status of relays 1 and 2 will not change during degas They function as if the pressure reading was frozen when degas began 5 Relay actuation occurs when the second digit pressure indication differs from the setpoint v
70. eries 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 4 Installing the Control Unit and Power Supply 1 Provide adequate ventilation for the Control Unit to dissipate 15 watts and for the Power Supply to dissipate 50 watts ALLOW AT LEAST 1 IN CLEARANCE AROUND THE SIDE AND TOP VENTILATION SLOTS ON THE POWER SUPPLY 2 Do not mount the Control Unit or Power Supply above other equipment that generates excessive heat 3 This product is designed to operate over the range 0 50 C Ambient temperatures above 50 C may damage the product For optimum electrometer calibration stability the Control Unit ambient temperature should be 25 5 C 3 4 1 Grounding the System 1 Connect a heavy duty ground wire 12 AWG or larger from the ground lugs on the backs of the Power Supply and the Control Unit to your facility grounding electrode system This will provide an earth ground for the Power Supply and for the Control Unit in the event either the interconnect cable or power cable are not in place Do not connect the ground lug to the vacuum system or other component Connect it directly to the facility grounding system such as a grounded outlet box or a grounded copper water supply pipe Do not rely on small metal water lines to ground a component Later on someone may replace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation Be aware that an electrical discharge through a gas may
71. es 6 8 may be used to set the baud rate The settings are Baud Rate il On On On DE On On Off TALK ONLY On Off On Emi INVERT RTS On Off Off Off On On Off On Off Off Off On Off Off Off factory setting Partial Top View of Process Control Module 2 1 5 1 1 Character Framing Switches 3 5 control the number of characters polarity and number of stop bits Character Framing On On On 8 None On On Off 8 Even On Off On 8 Odd On Off Off 8 None Off On On Z Even guion evre FORMAT Off On Off 7 Odd BAUD RATE Off Off On 7 Even Off Off Off 7 Odd factory setting Partial Top View of RS 232 Module Series 360 Stabillon Instruction Manual 9600 4800 2400 1200 600 150 75 360119 Rev A 2 1 5 1 2 Talk Only Mode Initial Setup Procedures The pressure data from all three displays will be output in a single message string separated by commas approximately every 5 seconds If the Convectron Module is not present only the ion gauge pressure will be output Talk Only Mode Off Talk only On Command response factory setting 2 1 5 2 Handshaking Inputs to 360 CTS 5 CLEAR to SEND amp and DATA SET DSR 6 READY When used both must be TRUE in order for 360 to send the next byte in its message or data DCD 8 DATA CARRIER DETECT Must be TRUE at the time each character is received or that character will be ig
72. g 6 9 RS 485 Address 2 13 Baud Rate 2 13 Byte Format 2 13 Character Framing 2 14 Character framing switch settings 2 14 Computer Interface Setup 2 12 Computer Interface connecting 3 16 Factory defaults 2 12 Troubleshooting 6 10 Vacuum connections 3 4 Warranty 1 ix Safety damage requiring service 1 vi instructions 1 v Scale factor 4 2 4 4 Service form 6 15 Service guidelines 1 ix 6 1 Setpoint display and adjustment Process Control 4 24 Stabil lon Gases other than nitrogen or air 4 4 STABIL ION Gauge Cables 3 19 Connector 3 1 3 19 Guard 3 19 Installation 3 2 Picture 1 1 Stabil lon Gauge Alternate on off 4 3 Analog output connecting 3 7 Gas scale factor 4 4 Operation 4 1 Pressure measurement 4 1 Pressure range settings 4 2 STABIL ION System Operation 5 1 Tips Installation 3 1 Process Control 2 9 Top cover Removing 2 2 Troubleshooting Convectron Gauge Module 6 7 Flow Charts 6 12 IEEE 488 6 10 RS 232 6 9 RS 485 6 10 Series 360 Stabil lon Instruction Manual 360119 Rev A Granville Phillips Series 360 Stabil lon Vacuum Measurement Controller eemks Technology for Productivity Granville Phillips For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX
73. ge of this manual NOTE 2 230V Nom Power Fuse is Littelfuse 21601 6 or SHURTER FSF034 1518 or GP 009323 Degas Fuse is Littelfuse 217001 or SHURTER FSF034 1516 or GP 009322 When going from 115V to 230V two new fuseholders are required SHURTER 031 1663 or GP 006965 2 Replace the fuses whenever the switch settings are changed with correct fuse values as indicated on the power supply panel 3 Do not connect power cables until the Installation Instructions in Chapter 3 are completed The 360 VGC is supplied with a convenient IEC 320 AC mains connection receptacle which allows selection of a detachable line cord to match your available mains power Series 360 StabiLlon Instruction Manual 360119 Rev A Installation It is the installer s responsibility to ensure that the automatic signals A provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device 3 1 Gauge Installation Tips For best results locate pressure gauges close to the point where pressure is to be measured Gas sources long tubulation or other constrictions can cause large errors in indication Note tha
74. h ground at all times fa Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond the manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks crazing or other signs of deterioration Do not use if the electrical insulation has become unsafe Do not touch the Stabil lon Gauge during degas operation if the Guard is removed Serious burns can occur The 360 Stabil lon System employs electron bombardment EB degassing of gauge electrodes which is the most direct and efficient means to remove contaminants High energy electrons striking the anode heat the anode and help remove any foreign materials while the increased cathode power cleans the cathode surface effectively Of course it is necessary to pump the contaminants from the gauge during degas A system pressure below 10 Torr is required to accompl
75. hannels Rear View of Connector PROCESS CONTROL ANALOG ELECTROMETER O REMOTE POWER OUTPUTA G1 coL RS 232 C B A OUTPUT SUPPLY mA e C ANA D OUT 1 18 C A 13 es F E 9 a Ota 1 29 4 O19 K J H 5 L E M G M 9 e 9 E 5 R P u T 59 E E V U T Bic X ew 12 5 25 X w 1 14 X W GND ANALOG OUTPUT B SEMINARS Process Control Output Connector Location on Rear Panel of Control Unit Process Control Output Connector Pin Assignments IG A B Common or Pole W H M C J S Normally Closed NC P U K B X Normally Open NO T D R F E V CHASSIS GND PIN L NO CONNECTION PIN N A mating connector is supplied in the hardware kit It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 1 Using Table 3 1 and circuit schematics you have prepared make up a cable to connect the various system components which are to be controlled Unambiguous
76. he LF being accompanied by an EOI Pressures will be returned in the format 4 13 1 IEEE 488 Command Syntax DG Definition Turn degas on or off Modifiers ON or OFF Response OK if command accepted or INVALID if rejected Example From computer DG ON CRLF From 360 OKCRLF NOTES 1 Command is INVALID if neither IG is on 2 Aresponse to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer Degas may fail to activate if the pressure is above 5 x 10 Torr Use the DGS command see below to verify that degas has been successfully initiated DGS Definition Display degas status Modifiers None Response ASCII 1 if degas is on 0 if degas is off Example From computer DGSCRLF From 360 1CRLF DS Definition Display pressure reading Modifiers IG1 or IG2 or IG or CG1 or CG2 Response ASCII string representing the pressure for the selected gauge Series 360 StabiLlon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation Example From computer DS CG1 CRLF From 360 1 20E 03CRLF NOTES 1 The DS CG1 and DS CG2 commands are used to display the pressures from the lower 2 2 IG1 display lines with the Convectron Gauge Module installed If the requested ion gauge is turned off or is in it s first few seconds of operation or data is requested from a Convectron Gauge when none is installed the 360 will return 9 99E 09 The D
77. ific causes are described in Table 6 2 Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance Fault Cause Action Microprocessor reset occurring on some module probable Cycle power circuit failure Call Qualified Service Technician Unplugged Convectron Gauge Plug in gauge Sensor broken in Convectron Gauge Replace gauge Convectron Gauge zero badly out of calibration Adjust zero calibration See Section 4 8 on page 4 22 Checksum failure on Process Control board Cycle power and check all setpoints 6 4 Overpressure Shutdown As pressure increases the ion current to the collector increases until the high density of gas molecules begins to interfere with the ionization process When some electrons cannot acquire sufficient energy to ionize the gas molecules the collector current no longer increases with increasing pressure This pressure is called the turn around pressure Further pressure increases will result in a decreasing ion current The Stabil lon Controller is factory set so the ion gauge will shut down when the pressure rises above the overpressure setpoint pressures shown in Table 6 3 For reliable operation in general applications the overpressure shutdown point is factory set below the Stabil lon Gauge turn around point at both emission currents Although we strongly recommend that you do not change the factory settings the overpressure shutdown can be readjusted for specific applicat
78. ill be displayed on lines A and B of the display whenever the power switch is on Convectron Gauge Display Formats torr scientific floating point mbar scientific floating point scientific pascal scientific floating point scientific ig 8 56 7 Sg A 9 43 3 Decas on Q 5 OIIO B 5 67 2 E a 1 Torr 1 Torr 1 mbar 1 mbar 999 mbar lt 1 Pa gt 1 Pa gt 999 Pa Control Unit Front Panel Showing Power ON Button 3 23 3 Torr 7 15 Torr 5 18 2 mbar 88 6 mbar 1 23 3 mbar 7 23 1 Pa 78 3 Pa 1 25 4 Pa During a fast pumpdown from atmosphere thermal effects will prevent the Convectron Gauge from tracking pressure accurately below 10 Torr After about 15 minutes indications in the 107 range will be valid and response will be rapid Zero adjustment at vacuum may be performed at this time or sooner if readings in the 10 range are not needed In the 10 Torr range the indication is accurate to about 0 1 millitorr provided the instrument has been carefully zeroed at vacuum See Section 4 8 on page 4 22 for vacuum and atmosphere calibration procedures For accurate use in the 10 range zeroing should be repeated frequently Series 360 Stabillon Instruction Manual 360119 Rev A Operation of a StabiHon
79. im cover is rated at 150 C When the small sensor wire is contaminated with oil or other films its emissivity or its diameter may be appreciably altered and a change of calibration will result Cleaning with trichloroethylene perchloroethylene toluene or acetone is possible but it must be done very carefully so as not to damage the sensor Hold the gauge with the main body horizontal and the port projecting upward at an angle of 45 Slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to where it touches the screen Let the solvent stand in the gauge for at least ten minutes Do not shake the gauge Shaking the gauge with liquid inside can damage the sensor wire To drain the gauge position it horizontally with the port facing downward Slightly warming the gauge will help dry the gauge Then allow the gauge to dry overnight with the port vertically downward and uncapped Before reinstalling the gauge on the system be certain no solvent odor remains Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 10 Process Control Troubleshooting If the uP FAILURE LED is lit or flashing see Figure 6 6 there is a probable circuit failure Return this product to a service facility designated by G P for repair ue eauure The setpoints are read from non volatile memory into RAM when the unit powers up On power up a checksum is computed and stored in RAM and is updat
80. in Table 2 10 To prevent data contentions no two RS 485 nodes should be set with the same address It is not recommended that address 00 be used because some manufacturers use this address for configuration Table 2 10 Switch Weight When OFF RS485 422 Switches O M Response Delay S11 dotis 52 D Character Framing Q Baud Rate 51 2 20 Hex 42 c 2 E o Module Address 1 3 40 Hex B m 51 4 80 Hex o P Figure 2 18 Back Panel and Top View of RS 485 Module 2 1 6 2 Response Delay for the RS 485 Interface Switch S2 1 Figure 2 18 enables a delay of the response from the module of 10 to 13 MS 10 bit times when OFF When 82 1 is ON the delay is greater than 700 microseconds The factory default setting is ON with a delay greater than 700 microseconds 2 1 6 3 Selecting the Byte Format for RS 485 Communications 2 1 6 3 3 Baud Rate Baud rate for the RS 485 communications is determined by the settings of switches S2 6 2 7 and 52 8 See Figure 2 18 Table 2 11 defines the baud rate base on the switch settings The factory default baud rate setting is 9600 Series 360 Stabillon Instruction Manual 360119 Rev A Initial Setup Procedures Table 2 11 Baud Rate Switch Settings ON ON OFF 9600 ON OFF ON 4800 ON OFF OFF 2400 OFF ON ON 1200 OFF ON OFF 600 OFF OFF ON 300 OFF OFF OFF 150 2 1 6 3 4 Character Framing for the RS 485 Computer Interface Character framing for the RS 485 computer
81. interface is determined by setting switches 2 3 S2 4 and S2 5 See Figure 2 18 Table 2 12 defines the character bits parity and stop bits based on the switch settings The factory default setting is 2 3 On S2 4 Off and S2 5 Off Character bits set to 8 Parity None and Stops bits at 1 Table 2 12 Character Framing Switch Settings ON ON ON 8 None 2 ON ON OFF 8 Even 1 ON OFF ON 8 Odd 1 ON OFF OFF 8 None 1 OFF ON ON 7 Even 1 OFF ON OFF 7 Odd 1 OFF OFF ON 7 Even 2 OFF OFF OFF 7 Odd 2 factory setting Series 360 Stabil lon Instruction Manual 360119 Rev A 2 1 7 IEEE 488 Computer Interface Setup Initial Setup Procedures If your Control Unit does not have this capability skip to Section 2 1 8 on page 2 16 This available capability permits data output to and gauge control by a host computer Output is either by a command response mechanism or by a talk only mode which is invoked via a switch on the IEEE 488 board If you have this capability in your unit configure it to your system requirements by setting the switches as directed below NOTE Internal switches are read upon 360 power up Changes in settings will take effect upon next power up cycle To configure the IEEE 488 bus to operate via SRQ interrupts a switch is provided which will cause the 360 to generate an SRQ and wait for a serial poll before outputting each message 2 1 7 1 Selecting the Interface Bus Address Refer to Figure 2 19 and locate
82. ion is provided on the rear panel of the Convectron Gauge module via a standard 1 8 in miniature phone jack If graphed on log linear axes the output voltage is linear with respect to the log of pressure The analog output is 1 volt per decade of pressure with a factory adjusted output of 0 volts at 1 0 x 10 Torr Offset adjustments are provided on the top edge of the Convectron Gauge module that allow shifting the voltage corresponding to 1 x 104 Torr between 7 volts and 1 volt 10 3 10 factory adjustment 10 k A o A Pressure Torr zu o m 7 6 5 4 3 2 1 0 1 2 3 4 5 mBAR UPDATE x ANALOG OUT FULL SCALE H8 CGA ANALOG OUT CGB OFFSET CONVECTRON Top View of Convectron Gauge Module Showing Analog Output Offset Adjustment Pressure Pa lower adjust limit upper adjust limit 6 7 8 9 10 CONVECTRON Gauge analog output V Convectron Gauge Analog Output vs Pressure The voltage signal is smooth and continuous throughout all the decades of pressure measurement This format is useful for computerized data acquisition because a simple equation finding the common antilogarithm may be programmed to calculate pressure from the voltage output Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation The equation is Pi 1071 Torr mbar or Pi 10V Pascal where Pi pressure indication V analog outpu
83. ions according to the following procedure Caution If the overpressure shutdown point is increased from the factory A settings an excess pressure rise may go undetected resulting in possible gauge and or vacuum system damage Consult factory if in doubt Overpressure Shutdown Factory Settings o MP FAILURE OVP TRIP H 2x10 L 5x104 To adjust the overpressure shutdown point to a different level DEGAS LIM 1 Rotate the overpressure adjustment potentiometer clockwise several turns until the overrun clutch clicks ELECTROMETER 2 Turn on the ion gauge Electrometer Module Top View Showing Overpressure Trip Adjust 3 Maintain system pressure at the desired shutdown point Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 4 Rotate the adjustment pot counter clockwise slowly until the IG turns off Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 5 Electrometer Minimum Calibration Adjustment This test and adjustment should only be done with the cover on and securely fastened to the Control Unit This adjustment is used to cancel residual input currents so that the logarithmic electrometer amplifier is accurate in its lowest decades It performs the same function as the zero adjustment on a conventional electrometer even though there is no zero reading on a log amplifier It is factory set by calibrating the
84. ir length to provide strain relief at the connectors and to prevent undesirable effects on performance that might be caused by cable movement and at the ion gauge when the gauge is turned on Voltages as high as 850V gt N Danger high voltage 180V is present in the Power Supply on the cable peak are present during degas Do not use the product to measure the pressure of explosive or combustible Do not operate in an explosive atmosphere Do not operate the product in the presence of flammable gases or fumes Operation of any electrical instrument in such an environment constitutes a definite safety hazard gases or gas mixtures lonization gauge cathodes operate at high temperatures The sensor wire of the Convectron Gauges normally operates at only 125 C but it is possible that Control Unit malfunction can raise the sensor temperature above the ignition temperature of combustible mixtures Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits Operation of the product with line voltage other than that selected by the proper power supply switches can cause damage to the instrument and injury to personnel Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 12 Connecting the Power Cables 1 After completing the set up connec
85. ish this effectively Measurements below about 10 Torr require degassing in the 10 Torr range and again as the system approaches the ultimate pressure Degas cannot be activated unless the Stabil lon Gauge pressure indication is below 5 x 10 Torr 6 6 x 10 mbar or 6 6 x 10 Pa in the High pressure range or below 1 2 x 1050 Torr 1 6 x 1050 mbar or 1 6 x 10 Pa in the Low pressure range Degassing above this pressure is of little value and may cause pressure bursts that can cause an electrical gas discharge which can couple high voltage to the vacuum system hardware shut down the Stabil lon Gauge and in some cases cause damage or create a shock hazard unless the system is properly grounded Degas power may be turned on or off in three ways M Using the front panel degas push button B via the Remote Control input See Ile 8 567 St aee Section 3 7 on page 3 9 Jj M Using an RS 232 RS 485 or IEEE 488 A 9 43 3 2 VERE Q Computer Interface module See B 5 672 Section 4 11 on page 4 25 Section ee f 4 12 on page 4 29 or Section 4 13 on page 4 32 Control Unit Front Panel Showing Degas Button Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 2 1 Pressure Indication D
86. ituation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device electrical codes CONNECT THE POWER CORD ONLY TO A PROPERLY A Installation and wiring must be in compliance with your local building and GROUNDED OUTLET A Primary Mains disconnect is provided by the A C Power Cord Install unit so SX there is access to the A C Power Cord 2 Verify that the line voltage switches are set properly See Section 2 2 on page 2 17 3 Connect the power cable to a grounded outlet 4 Assuming you have completed the set up and installation according to the foregoing instructions the Stabil lon System should now be ready to turn on and operate If you are using the Process Control Option you must prepare for process control operation before turning on the 360 in automatic mode See Section 4 10 on page 4 24 Attempting automatic operation with process control before the controls are properly set can cause costly damage and even be dangerous Series 360 Stabil lon Instruction Manual 360119 Rev A Installation Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 1 Preparing for Pressure Measurement with the Stabil Ion Gauge l The steps in this Section 4 1 assume a Your Stabil lon System has been properly set up an
87. l lon Gauge to provide electron emission at relatively low cathode temperatures has a finite operating life typically two to three years at low pressure lon bombardment at higher pressures tends to erode the coating faster than at lower pressures Stabil lon Gauges have a second independent cathode for use when the first cathode finally tires and does not emit sufficiently The Controller will automatically turn the IG off if the cathode has insufficient emission either due to contamination of the cathode or long use RS 232 ELECTROMETER CONVECTRON PROCESS CONTROL IG 1 AUTO Off SP On VY o EUN V 7 Data ogg ser yr LL B p un X N O p A ici ice Y le 2 N actor A I A Set O O CN a D O we la Range v JEN JE II LAO des Degas On JO l i P EKZ ser Roy p OITO Cathode x KCN E p UE O lt WEISE Sahat 2 a pus 3 N O AM Y rt L 102 C wc Noi Remot Control Unit Front Panel with Door Open Showing Alternate Cathode Switch Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 4 Stabil Ion Gauge Calibration Memory The Stabil lon Gauge is the first ionization gauge with sufficient long term stability to
88. malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate pressure relief device Do not disconnect the ionization gauge cable from either the gauge tube or controller when the ion gauge is on The connectors are not rated to break the currents and voltages delivered to the ion gauge Operation of the product with line voltage other than that selected by the proper power supply switches can cause damage to the instrument and injury to personnel The fumes from solvents such as trichloroethylene perchloroethylene toluene and acetone can be dangerous to health if inhaled Use only in well ventilated areas exhausted to the outdoors Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment r bkbkbbbbbk Series 360 Stabil lon Instruction Manaul 360119 Rev A Safety Instructions Certification MKS Instruments Inc certifies that this product met its published specifications at the time of shipment from the factory MKS further certifies that its calibration measurements are traceable to the National Institute of Standards and Technology to the extent allowed by the Institute s calibration facility See the CE Declaration of Conformity inside the envelope for CE tests performed Extended Warran
89. near the pump the displayed pressure may be considerably lower than Os eO the rest of the system If the gauge is placed near a gas inlet or source of contamination the displayed pressure may be much higher To minimize temperature effects locate pressure gauges away from Os 30 internal and external heat sources in a region where the ambient 4 temperature is reasonably constant Avoid mounting the gauge near O strong magnetic fields ConFlat Flange Bolt Locations Series 360 Stabil lon Instruction Manual 360119 Rev A Installation BI Avoid contaminating the Stabil lon Gauge Do not touch the port Do not talk directly at an open vacuum port Follow good vacuum practice Connector collar must be locked with integral pin guard on ionization gauge tube BEFORE gauge is turned on To minimize the possibility of leaks with Venileten Sets shouid i be positioned above and ConFlat flanges use high strength below gauge for best cooling stainless steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces Do not use nonmetal gaskets After finger tightening all bolts continue tightening about 1 8 turn in crisscross order e g 1 4 2 5 3 6 4 1 5 2 6 3 H rp 1 until the flanges are in contact After m Cable exits in same direction contact further tighten each bolt about pu ee S 1 16t S Fi 205 3 2 Tem
90. nel of the Power Supply two separate Memory Modules can be used for IG1 by selecting either IG1 or IG2 for gauge operation If you wish to use this special capability of the 360 we recommend that you contact the factory for further explanation 4 4 2 Using a Memory Module for IG1 or IG2 Protect the Memory Module from static electricity Touch a grounded A unpainted metal surface on the 360 Control Unit and then touch the surface of the anti static bag before removing the Memory Module from its bag 1 Turn off power 2 Open front panel door 3 Using a high impedance grounding wrist strap or other effective antistatic protection remove the Memory Module from its antistatic packaging Save the antistatic packaging 4 Plug the Memory Module into the data port with the writing on the module label right side up 5 Turn on power Within 5 seconds the data in the Memory Module will transfer to main memory 6 The last 3 digits of the Memory Module identification numbers will be displayed for a few seconds and thereafter for a few seconds each time the Stabil lon System power is turned on If two Memory Modules are utilized two numbers will be displayed in sequence in the top display the first for IG1 the second for IG2 If the memory contains standard factory supplied data the serial number of that data when displayed will begin with O Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil l
91. next 4 input functions will have no effect unless this input is held low 3 Backup Cathode IC1 selects backup cathode Cathode 2 operation for IG1 4 Backup Cathode 2 selects backup cathode Cathode 2 operation for IC2 5 Pressure Range IG1 selects pressure range emission current for IG1 23 Pressure Range IG2 selects pressure range emission current for IG2 Power 21 5 V optical isolator power 5 V at 40 mA max 1 Internal 5 V access to non isolated 5 V 18 Internal Com access to non isolated ground 3 7 2 Using the Remote Inputs IG ON OFF Inputs pins 22 9 Either IG can be turned on by the remote inputs if the pressure in the IG is adequately low and the IG LOCKOUT input Pin 7 is HI by pulling the IG input line LOW after it has been HI for at least 35 msec The input must then remain LOW until it is desired to turn the IG off Either IG can be turned off through the remote input by 1 switching the input HI after it has been low for at least 35 msec or 2 by turning the other IG on as above or 3 by pulling the IG lockout input Pin 7 LOW NOTE The state of this input does not override other IG on and IG off commands from the front panel buttons the Convectron Gauge module or the computer interface Series 360 Stabil lon Instruction Manual 360119 Rev A Installation Degas ON OFF Input pin 8 Degas can be initiated by the remote inputs if the IG is turned on and it is measuring less than
92. nition Display degas status Modifiers None Response ASCII 1 if degas is on 0 if degas is off Example From computer DGS CRLF From 360 1CRLF DS Definition Display pressure reading Modifiers IG1 or IG2 or IG or CG1 or CG2 Response ASCII string representing the pressure for the selected gauge Example From computer DS CG1 CRLF From 360 1 25E 03CRLF NOTES 1 The DS CG1 and DS CG2 commands are used to display the pressures from the lower 2 display lines with the Convectron Gauge Module installed 2 If the requested ion gauge is turned off or is in its first few seconds of operation or data is requested from a Convectron Gauge when none is installed the Control Unit will return 9 90E 09 The DS IG command will return pressure from the gauge which is on and 9 99E 09 if neither ison IG1 Definition Turn IG1 on or off Modifiers ON or OFF Response OK if command accepted INVALID if rejected Example From computer IG1 ONCRLF From 360 OKCRLF Series 360 Stabillon Instruction Manual 360119 Rev A NOTES Preparing the Stabil lon System for Operation 1 ThelG1 ON command will be rejected as INVALID if IG1 is already on and IG1 OFF will be rejected if IG1 is already off 2 Aresponse to the IG1 ON command of OK indicates only that a signal requesting that IG1 be turned on has been sent to the electrometer IG1 may fail to come on e g if the system pressure is too high or if the gauge is disconnected
93. nnel selector thumbwheel Series 360 Stabil lon Instruction Manual 360119 Rev A System Components 13 PROCESS CONTROL REMOTE OUTPUT POWER SUPPLY CONVECTRON ANALOG OUTPUT A 12 11 10 RS232 or IEEE488 O 13 25 Stabi lon Vacuum Gauge Control Unit Rear Panel 1 Grounding lug to be connected to earth ground with 212 AWG conductor 2 Interconnect cable connection from Power Supply 3 Connector for Process Control relay contacts 4 Connector for analog output voltage from Convectron Gauge B 5 Connector for Dual Convectron Gauge Cable 6 Electrometer minimum reading calibration adjustment 7 Connector for Stabil lon Gauge 2 8 Connector for remote parameter selection inputs 9 Connector for RS 232 RS 486 or IEEE 488 computer interface 10 Connector for IG analog output voltage 11 Connector for Stabil lon Gauge 1 12 Connector for analog output voltage from Convectron Gauge A 13 Connector for remote output relay contacts from Stabil lon Gauge 1 and Stabil lon Gauge 2 Series 360 Stabillon Instruction Manual 360119 Rev A 10 POWER 50 60 220 WATTS Or 7 L JL A DEGAS FUSE ALL 3 SWITCHES MUST BE SET TO THE SAME AC LINE VOLTAGE FOR AC LINE VDLTAGE BETWEEN SOV IO 130V SET ALL SWITCHES TO 115V POWER FUSE ANI USE 2A F 250V DEGAS FUSE CONTROL UNIT FOR AC LINE VDLTAGE BETWEEN 180 TO 240V SET ALL SWITQHES TO 230V USE
94. nored by 360 CTS 1 and DSR 1 When ON forces the functions TRUE and thus assumes host is always ready to receive Both ON DCD 1 When ON ON forces DCD function TRUE so 360 will receive all characters sent to it as long as RTS is in de asserted state Series 360 Stabil lon Instruction Manual 360119 Rev A TALK ONLY INVERT RTS favre FORMAT Partial Top View of RS 232 Module OFF ON Be lt DSR 1 pP FAILURE Top View of RS 232 Module Initial Setup Procedures Outputs from 360 RTS 4 REQUEST TO SEND INVERT RTS ON De asserted by 360 on When OFF inverts ao power up Asserted by the polarity of the oF Laie 360 upon receipt of a RTS line allowing gt TALK ONLY INVERT RTS message terminator as a nonstandard BYTE FORMAT hold off to prevent the connection directly lt SEM host computer from to host computer attempting to transmit CTS line When data until the message ON set to operate just received has been as a modem line parsed and a reply has per RS 232 been output De asserted standard after transmitting the terminator of 360 s response to that message DTR 20 Always asserted by 360 A power on indication Top View of RS 232 Module NOTE When 360 receives a start bit on the received data line it will input and buffer a character 360 will continue to receive and buffer chara
95. nous Data Rate 9600 Default 4800 2400 1200 600 300 150 baud Character Length 8 bit or 7 bit ASCII Factory default is 8 bit Parity No parity even or odd Factory default is None Stop Bits 1 or 2 Factory default is 1 Handshake None Poll Response Address 256 selectable combinations Factory default is 01 Number of Connections Up to 32 devices Total Cable Length 4 000 feet maximum Connectors Two 9 pin D sub Parallel Series 360 Stabil lon Instruction Manual 360119 Rev A Installation Installation 3 10 Connecting the IEEE 488 Computer Interface The IEEE 488 Computer Interface uses the industry standard 24 pin ribbon connector IEEE 488 Cables are available from Granville Phillips Secure the mating connector from the bus using the captive screws Instructions for setup of this interface are in Section 2 1 7 on page 2 15 Instructions for communicating using this interface are in Section 4 13 on page 4 32 3 11 Connecting the Gauge Cables Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even y killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unle
96. o an indicated pressure of 6 4 Torr Nz equivalent Thus the correct process control setting for 20 Torr of CO is 6 4 Torr Nz equivalent Example 4 True to indicated pressure conversion Assume you wish to obtain a helium pressure of 100 Torr in the system On Figure 4 11 locate 100 Torr on the left hand scale travel horizontally to the right to attempt to intersect the He curve Because the intersection is off scale it is apparent that this true pressure measurement requirement for helium exceeds the capability of the instrument For gases other than those listed the user must provide accurate conversion data for safe operation The Convectron Gauge is not intended for use above approximately 1000 Torr true pressure Series 360 StabiLlon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 10 10 Kr Ar F E Ne LA 9 He y LY fr on 22 S Tyla freon 12 2 2 103 25 CH o KL jis 2 oA L E 4 YY 7Z jp Do not use this data with transducers PA A other than the G P Series 275 EE Convectron Gauge 7 Pressure units equivalence 1 ZG 1 um Hg 1 morr 1 x 10 Torr 1000 um Hg 1 Torr ptt 2 104 103 102 101 Indicated Pressure Torr nitrogen equivalent Convectron Gauge Indicated vs True Pressure Curve 10 4 to
97. o earth ground at all times Series 360 Stabil lon Instruction Manual 360119 Rev A SIDE OF CONTROL UNIT 8 32X 25 SCREW 2X IT MOUNTING EAR FRONT OF DIMENSIONS IN CM IN REAR view CONTROL UNIT Control Unit and Power Supply Mounting GIROCUNIE POWER SUPHUY 2 CONTROL UNIT MOUNTING ADAPTER J peal Jia OPTIONAL L Md 3 BRACKETS FULL RACK MOUNTING FOR ONE OR N SUPPLIED TWO POWER SUPPLIES POWER SUPPLY i PLACES REMOTE MOUNTIN 9l f 20 3 8 0 ka NIC ALLOW 6 5 CM 2 5 IN CLEARANCE FOR REAR CONTROL UNIT A CONNECTORS 1 2 RACK CONTROL UNIT 27 3 CENTER RACK 10 75 MOUNTING POWER SUPPLY 1 2 RACK d Oo Oo H Hi i 7 6 3 0 1 8 9 3 5 Oo O 223 8 8 von a 46 5 18 3 9 amp m 24 1 9 5 48 2 19 0 ERR Series 360 Stabil lon Instruction Manual 360119 Rev A Installation 3 5 Connecting Analog Outputs 3 5 1 Stabil Ion Gauge Analog Output Signal A signal voltage proportional to the logarithm of the Stabil lon Gauge pressure indication is provided on the back of the electrometer module via a standard 1 8 in miniature phone jack A mating connector is supplied in the hardware kit See Section 4 5 on page 4 10 pertaining to the characteristics of this signal PROCESS CONTROL ANALOG ELECTROMETER REMOTE
98. o shield gauge surfaces that can rise to above 100 C If the Guard must be removed be sure that the gauge is not located where personnel performing necessary system operations might come in contact with the gauge envelope The connector and cable assembly must be removed for system baking above 150 C Series 360 Stabil lon Instruction Manual 360119 Rev A If space does not permit leaving the blue Guard attached to the cable connection during installation separate the Guard from the cable connector and install as follows 6 Grasp the Guard with your fingers Place your thumb on the blue connector between two of the tabs on the connector end of the Guard Carefully insert a small flat screwdriver blade under the tab and gently pry outward on one tab and then the other while forcing the blue connector sideways The connector will pop out of the Guard Use care not to permanently deform the tabs Place the Guard on the Gauge Complete steps 5a through 5f above rotating the connector instead of the Guard in step 5f Push the Guard back on the connector Do not touch the Stabil lon Gauge during degas operation if the Guard has been removed Serious burns can occur To remove the connector from the Stabil lon Gauge rotate the blue Guard counterclockwise about 20 until it hits the stop Pull the connector straight back from the gauge Clamp the gauge cables in a fixed position throughout the
99. odems or switch boxes for the purpose of re configuring the control lines for particular applications 3 Check command format Be sure the strings you output to the 360 are in accord with the syntax defined in Section 4 11 on page 4 25 RS 232 Troubleshooting Guide Micro controller reset LED lit or flashing Micro controller failure No response or garbled output Baud rate incorrect Character length incorrect or stop bit s incorrect Faulty cable OVERRUN ERROR message Stop bit s incorrect host software failure PARITY ERROR message Parity incorrect SYNTAX ERROR message Message to 360 not in accord with specified syntax Could also result from failure to assert DCD handshake line Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 12 RS 485 Troubleshooting In the event of problems with the RS 485 communications verify the following items for proper configuration 1 Check configuration switch settings Ensure the baud rate character framing and interface protocol are matched to the host computer or terminal s requirements Note that there may be several mismatched parameters 2 Check command format Ensure that the command strings output from the host computer or terminal to the Series 360 Controller are in accordance with the syntax defined by this addendum Table 6 7 5 485 Troubleshooting Guide Micro controller reset LED CR1 Micro controller failure illuminated or fl
100. of the normal response OVERRUN ERROR Returned if the incoming message overflows 360 s buffer SYNTAX ERROR Returned if the message fails to parse as a valid 360 command Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 12 Preparing for use of the RS 485 Computer Interface Setup Instructions for the RS 485 computer interface are in Section 2 1 6 on page 2 12 The Series 360 Controller uses a command response half duplex protocol If the controller recognizes received data as a valid command it will check the command string address and compare with its own If the addresses match the controller will process the command and then respond In all configurations only one twisted pair will have data transmissions in one direction at any time The timing of the data transfer is shown in Figure 4 22 TO is 10 13 mS 10 bit times with S2 1 in the OFF position TO is greater than 700 microseconds with S2 1 in the ON position and T1 is greater than 300 microseconds Adhering to these timing constraints will ensure data is not overwritten Computer S Figure 4 22 RS 485 Data Timing Consult the user s manual for the host computer to be sure the character framing settings used are in accord with that established via the switch configuration you have chosen for the RS 485 module Communication is via ASCII strings A message to consists of a start character an address AA comm
101. on System for Operation pce R 232 CONVECTRON PROCESS CONTROL p eim IG 1 AUTO AT on ser VAN Nl po cul p id A IG1 IG2 Q ah j O AM Set OIIO O VAC AN Pressure VY 3 Range v p eZ pro Degas On Li H C Zr or SET O Cathode 4 1 C ales D 2 Ta SY 3 O 2 O ae J Deu E 102 C wc ae C 2 C Remote Control Unit Front Panel with Door Open Showing Memory Module Location 7 Ifthe Memory Module contains Stabil lon Gauge calibration data for the same gas type as is predominately present in the system set the scale factor on the electrometer to 1 00 If the Memory Module contains Stabil lon Gauge calibration data for a 1 i8 i62 2 and the gas in the system is 456 2 o predominately of type X set the scale A Decas ON O factor at the appropriate value for gas 5 o type X See Section 4 1 2 on page 4 4 B 5 Control Unit Front Panel Display Showing Last Three Digits of Memory Module Identifica
102. on display for gauge 1 or 2 Convectron Gauge A display Convectron Gauge B display Unit of measure label Torr mbar or Pascal user selectable Degas power switch Controller power switch 7 Front door closure 8 Stabil lon Gauge 2 power switch 9 Stabil lon Gauge 1 power switch Process Control channel labels Process Control channel indicator lights Series 360 StabiLlon Instruction Manual 360119 Rev A System Components 232221 2019181716 1514 15 1 2 3 456789710 1112 Stabi lon Vacuum Gauge Control Unit Front Panel Door Open 1 RS 232 RS 485 or IEEE 488 Computer Interface 13 Process control setpoint pressure down push button Module 2 Pressure range selector switch IG1 14 Process control setpoint pressure up push button 3 Alternate cathode switch IG1 15 Process control channel setpoint override switch 4 Indicator light for remote override of functions 16 Vacuum zero adjustment Convectron Gauge A 5 Alternate cathode switch IG2 17 Atmosphere adjustment Convectron Gauge A 6 Pressure range selector switch IG2 18 Auto on switch IG1 7 Auto on switch IG2 19 Auto on adjustment IG1 8 Auto on adjustment IG2 20 Scale factor adjustment IG2 9 Vacuum zero adjustment Convectron Gauge B 21 Data port for Calibration Memory 10 Atmosphere adjustment Convectron Gauge B 22 Scale factor display switch 11 Process control channel indicator 23 Scale factor adjustment IG1 12 Process control cha
103. porarily installing Connector urn see rigure on page during installation conveniently captures bolts Stabilion Gauge with Connector and Guard 3 3 Convectron Gauge Installation When high voltage is present all exposed conductors of a vacuum must be maintained at earth ground Under certain conditions dangerous high voltage can be coupled directly to an ungrounded conductor through a gas almost as effectively as through a copper wire connection This hazard which is not peculiar to this product is a consequence of the ability of an electric current to flow through a gas under certain circumstances A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential When high voltages are used within the vacuum system and the Convectron Gauge envelope is not reliably grounded through its vacuum connection either a separate ground wire must be added or the envelope must be shielded to positively prevent human contact The gauge envelope may be grounded by using a metal hose clamp on the gauge connected by a 12 awg copper wire to the grounded vacuum chamber High voltage can couple through a gas to the internal electrodes of a gauge Do not touch the exposed pins on any gauge installed on a vacuum system where high voltage is present If the Convectron option is used with the Series 360 only Series 275 Convectron Gauge tubes manufactured in June of 1997 or later can be used
104. pressure readout to correspond to a very small collector input current It can be checked in the field without a calibration source using the following procedure l Verify that the scale factor is adjusted to 1 00 2 Operate a Stabil lon Gauge with 4 mA emission low pressure range 3 Disconnect the collector lead from the rear panel of the electrometer module 4 Observe the display for 10 seconds as it settles to a minimum reading This reading should be between 1G1 COL 2 50 x 10 and 2 75 x 107 Torr 5 Locate the ADJ control on the rear panel of the Electrometer Module See Figure 6 3 R E 6 Generate a display between 2 50 x 10 11 and 2 75 x 10 11 o Torr by making very small adjustments of less than 1 4 turn E at a time It will be difficult to achieve a stable reading i e Ee because of electronic noise at very low input currents The optimum point is where the control causes the display to O MIN ADJ just switch to its minimum reading of 2 50 x 10 11 Torr Rear View Electrometer Module Showing MIN ADJ Control 6 6 Flashing Degas Light If the DEGAS LED flashes when degassing with cathode 1 selected but stays on continuously with cathode 2 selected this is an indication that only cathode 1 is in poor condition and will eventually fail to maintain normal operating emission When this occurs the IG will fail to stay on with cathode 1 selected and you will need to switch to catho
105. r and will not test them again until ready to begin transmitting the next After transmitting the terminator the 360 will negate RTS and wait for the next incoming message To summarize CTS DSR Set the computer to indicate that 360 may output the next byte in its message As shipped from the factory these lines are forced TRUE by the switch settings of the 360 RS 232 printed circuit board Thus the 360 will automatically assume the host is ready to receive See Figure 2 16 on page 2 11 for the location of these switches DCD Tested by the 360 when a character is received The character will be ignored unless DCD is TRUE As shipped from the factory this line is forced TRUE by the switch settings DTR Always asserted by the 360 A power on indication Series 360 Stabil lon Instruction Manual 360119 Rev A 3 Installation RTS Negated by the 360 on power up Asserted by the 360 upon receipt of a message terminator Negated after transmitting the terminator of the 360 s response to that message RS 232 connections to a 9 pin connector on a Windows based computer can be made by using a cable as shown in Table 3 5 Table 3 5 Computer Cable Pin Assignments for a 9 Pin Connector computer 360 cable Signal PC AT Connector Cable Pinout 360 Connector DE9P DE9S DB25S NI T DB25P ts If the computer has a 25 pin connector use the
106. r printed circuit boards Do not operate the product with static sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely necessary and only when wear ing a ground strap Do not use an ohmmeter for troubleshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance NOTE This product was designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions Danger High Voltage The high voltages present within the Power Supply are capable of causing injury or death To avoid electric shock wait 3 PA minutes after power is removed before touching any component within the Power Supply This will permit charged capacitors to discharge The service and repair information in this manual is for the use of Qualified Service Personnel To avoid shock do not perform any procedures in this ED manual or perform any servicing on this product unless you are qualified to do so Do not substitute parts or modify instrument Because of the danger of introducing additional hazards do not install A substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Granville
107. r may be optionally separated by spaces or commas No spaces may appear within the command or the modifier only between them The terminator expected by the Control Unit is an ASCII carriage return line feed denoted here by CRLF The carriage return is optional and messages terminated with only the line feed will be accepted Note that the CRLF terminator is appended automatically by the host computer s interface software to the message string supplied by the user If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored Characters can be upper or lower case All messages to 360 will receive a reply consisting of an ASCII string of upper case letters terminated with CRLF Pressures will be returned in the format X XXE XX Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 11 1 RS 232 Command Syntax DG Definition Turn degas on or off Modifiers ON or OFF Response OK if command accepted or INVALID if rejected Example From computer DG ON CRLF From 360 OKCRLF NOTES 1 Command is INVALID if neither IG is on 2 Aresponse to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer Degas may fail to activate if the pressure is above 5 x 10 Torr Use the DGS command see below to verify that degas has been successfully initiated DGS Defi
108. r t tot qe eec eet ue eque Dub accessed ala 3 4 x mue also PP 3 4 33 44 NW16KF Flange Mount irc er ER eese er e A te e Re 3 4 3 3 5 ConFlat Flange Mount i i iade RR E RE ae nasal ATA ERR RAUS ons 3 4 Installing the Control Unit and Power Supply cece 3 5 3 4 1 Grounding the System sre eu ec ptt ceni de oett e mas d elei qs 3 5 Connecting Analog Outputs eee et eae DPI OR ea dee DES DOES E bated 3 7 3 5 1 Stabil Ion Gauge Analog Output Signal cect tenes 3 7 3 5 2 Convectron Gauge Analog Output Signal 2 eee 3 7 Connecting Process Control Relays 1 1 2 0 ees 3 8 Series 360 Stabillon Instruction Manual 360119 Rev A Table of Contents 3 7 Connecting Stabil Ion Remote Control 0 cece e 3 9 3 7 1 Deefinition o Inp t States i wl cient ka bet eee es dece e ue i teu e 3 10 Using the Remote Inputs i cetur e Behe he Maga ue ERA ewige 3 11 3 7 9 Using the Remote Outputs oi a ad RR ERREUR RM GUERRE RA MES ie 3 13 3 8 Connecting the RS 232 Computer Interface 3 13 3 9 Connecting the RS 485 Computer Interface 3 16 3 10 Connecting the IEEE 488 Computer Interface 3 18 3
109. racket and slide off the bracket 4 Liftoff top cover Note the layout drawing inside the top cover Series 360 Stabillon Instruction Manual 360119 Rev A 2 1 2 Pressure Units Setup Skip to Section 2 1 3 on page 2 4 See Figure 2 2 and Figure 2 5 if units of measure are as desired Initial Setup Procedures Control Unit Top View Cover Off Showing Locations of Switches for Pressure Display Units of Measure Selection If you wish to change the pressure display units of measure change the settings of the units of measure switches on the Electrometer module and on the Dual Convectron Gauge module if present as shown in Figure 2 5 To change the units of measure label open the door and lift the label card from its slot in the top of the front panel Units of measure labels are included in the mounting hardware kit ON lt OFF gt Torr Setting ON lt OFF gt mbar Setting ON lt OFF Pascal Setting mbar Pa Slow Pressure Display Units of Measure Switch Settings IG 2 13 8 A 5 67 2 B 745 1 IGT IG2 2 O O 3 4 DEGAS ON 5 ollo 6 TORR Series 360 Stabil lon Instruction Manual 360119 Rev A Control Unit F
110. rate switches are provided for IG1 and IG2 c PRESSURE RANGE Select H or L Separate switches are provided for IG1 and IC2 The H range is preferred for applications involving pressure measurement above 1 10 Torr The emission current and cathode power are reduced and the upper pressure limit and overpressure IG shut down setpoint are extended The H range provides increased cathode life when the IG is operated at higher pressures The L range is preferred for applications involving pressure measurement below approximately 1x10 Torr It provides the fastest response to pressures below 1x107 Torr and allows measurement to the x ray limit of the Stabil lon Gauge Whether H or L is preferred between 104 and 107 Torr depends on whether the expected pressures will be above 10 Torr or below 10 Torr The Stabil lon Gauge will provide the best stability and lifetime when the pressure range selector switch is set as shown in Table 4 1 Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation Optimum Pressure Range Settings for N3 H High Range above 10 0 1 mA 2x10 Torr or mbar 2 Pa 8 8 L Low Range below 1077 4 mA 5x10 Torr or mbar 5 x 102 Pa 8 For example if pressures in your application will range from 1 x 107 to say 5 x 1059 Torr leave the range switch on H If much of the time the system pressure will be below approximately 1 x 10 Torr leave the switch on L We sugge
111. ressurized Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 6 1 Understanding Pressure Measurement in Gases other than Nitrogen or Air Convectron Gauges are thermal conductivity gauges of the Pirani type These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature For different gases the heat loss is different at any given true pressure and thus the pressure indication can be very different It is important to understand that the indicated pressure of a Convectron Gauge depends on the type of gas the orientation of the gauge axis and on the gas density in the gauge Convectron Gauges are normally supplied calibrated for air has approximately the same calibration With proper precautions the Convectron Gauge may be used to measure pressure of certain other gases The following information in this section applies only when the Convectron Gauge has been calibrated for N3 with the standard factory memory data and when the Convectron Gauge is mounted with its axis horizontal At pressures below a few Torr there is no danger in measuring pressure of gases other than Nz and air merely inaccurate indications A danger arises if the Nz calibration is used without correction to measure higher pressures of some other gases For example N2 or air at 24 Torr causes the same heat loss from the Convectron sensor as will a
112. rgon at atmospheric pressure Thus if the pressure indication of the Convectron Gauge is not properly corrected for argon an operator attempting to fill a vacuum system with 1 2 atmosphere of argon would observe an indication of only 12 Torr when the actual pressure had risen to the desired 380 Torr Continuing to fill the system with argon to 760 Torr would result in only a 24 Torr indication Depending on the pressure of the argon gas source the chamber could be dangerously pressurized while the display continued to read about 30 Torr of Nz equivalent pressure NOTE The same type of danger likely exists with other thermal conductivity gauges utilizing convection to extend the range to high pressures and with Convectron Gauges calibrated for gas type Y when used with gas type X Understand that with a Convectron Gauge calibrated for Nz to measure the pressure of gases other than N and air you must use the conversion curves specifically for the Convectron Gauge to translate between indicated pressure and true pressure Do not use other data Never use conversion curves for the Convectron Gauge with gauges of other manufacturers Their geometry is very likely different and dangerously high pressures may be produced even at relatively low pressure indications Also you must ensure that the atmosphere adjustments for Convectron Gauges A and B are correctly set See Section 4 8 on page 4 22 Series 360 Stabillon Instruction Manual 360119 Rev A
113. roduct is in safe operating order Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond A the manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks crazing or other signs of deterioration Do not use if the electrical insulation has become unsafe Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance General Symptoms Possible Causes Unit will not power up no response to power switch Power fuse blows repeatedly Fault relay tripped IG will not turn on or turns on briefly then shuts off IG display shows a steady number when IG is off Convectron Gauge display reads a fixed non changing pressure Pressure reading is higher than expected Power fuse blown Incorrect line voltage selection see Section 2 2 on page 2 17 Power interconnect cable improperly connected See Figure 3 21 on page 3 21 Incorrect fuse rating Incorrect line voltage selection see Section 2 2 on page 2 17 Unplugged Convectron Gauge or sensor broken in Convectron Gauge Convectron Gauge zero badly out of calibration Microprocessor reset occurring on a module probable circuit failure Checksum failure on process control board See Se
114. ront Panel Showing Removal of Units of Measure Label Card Initial Setup Procedures 2 1 3 Pressure Display Rate of Update 1 Skip to Section 2 1 4 on page 2 5 if units of measure are as desired See Figure 2 2 and Figure 2 8 nicam xs C pue Ww T p RS232 SHIELD CONVECTRON PROCESS ELECTROMETER CONTROL POWER SUPPLYICONTROL Control Unit Top View Cover Off Showing Locations of Switches for Pressure Display Rate of Update Selection 2 f you wish to change the pressure display rate of update change the setting of the rate of update switch on the Electrometer module and on the Dual Convectron Gauge module if present as shown in Figure 2 8 Setting this switch ON will enable pressure averaging The display will update about every three seconds with the switch ON and 0 5 seconds with the switch OFF ON ON lt OFF OFF gt gt 0 5 second 3 second update update Pressure Display Rate of Update Switch Settings Series 360 Stabillon Instruction Manual 360119 Rev A Initial Setup Procedures 2 1 4 Process Control Setup 5 provided by the product are always used in a safe manner Carefully check It is the installer s responsibility to ensure that the automatic signals the system programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always k provide for fail safe operation As an example
115. s installed the Control Unit will return 9 90E 09 The DS IG command will return pressure from the gauge which is on and 9 99E 09 if neither is on Series 360 Stabil lon Instruction Manual 360119 Rev A DGS Definition Modifiers Response Example PCS Definition Modifiers Response Examples Preparing the Stabil lon System for Operation Display degas status None ASCII 1 if degas is on 0 if degas is off From computer DGS CRLF From 370 1CRLF Display process control channel status 1 or 2 or 3 or 4 or 5 or 6 or B or none Depends on modifier Modifier single digit 1 through 6 response single ASCII digit 0 if the corresponding relay is inactive 1 if active See Example 1 Modifier B response a byte of data with bits O through 5 set clear according to whether the corresponding relay is active inactive Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte See Example 2 Modifier absent response will be a string of 6 ASCII O s and 1 s separated by commas giving the status of all six channels See Example 3 Assume that channels 1 3 are active and 4 6 are inactive 1 From computer PCS 1 CRLF From 360 Controller 1CRLF 2 From computer PCS B CRLF From 360 Controller GCRLF Note that ASCII G corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits 0 through 5 3 3 From computer
116. s of all six channels See Example 3 Examples Assume that channels 1 3 are active and 4 6 are inactive 1 From computer PCS 1 CRLF From 360 1CRLF Series 360 Stabil lon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation CATH1 Definition Modifiers Response Example NOTES 2 From computer PCS B CRLF From 360 GCRLF Note that ASCII G corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits 0 through 5 3 From computer PCS CRLF From 360 1 1 1 0 0 0 CRLF Select Cathode 1 or Cathode 2 for IG1 operation 10r2 OK CRLF From computer CATH1 2 CRLF From 360 OK CRLF This function can be implemented from the electrometer front panel or from the remote setup connector as well as from the computer interface CATH2 Identical to CATH1 except applies to IG2 PR1 Definition Modifiers Response Example NOTES Select pressure range for IG1 operation LorH OK CRLF From computer PR1 L From 360 OK CRLF This function can be implemented from the electrometer front panel or from the remote setup connector as well as from the computer interface PR2 Identical to PR1 except applies to 2 SWS Definition Modifiers Response Example Display status of gauge control switches remotes none 0 cath1 21 O cath2 1 O pr1 low 0 pr2 low 1 cath1 22 1 cath2 22 1 pr1 high 1 pr2 high
117. s or modify instrument Because of the danger of introducing additional hazards do not install nN substitute parts or perform any unauthorized modification to the product Return the product to a service facility designated by Granville Phillips for service and repair to ensure that safety features are maintained Do not use this product if it has unauthorized modifications Disconnect the product from the wall outlet and all power sources and refer servicing to Qualified Service a b c d e Personnel under the following conditions When any cable or plug is damaged If any liquid has been spilled onto or objects have fallen into the product If the product has been exposed to rain or water If the product does not operate normally even if you follow the operating instructions Adjust only those controls that are covered by the operation instructions Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation If the product has been dropped or the enclosure has been damaged When the product exhibits a distinct change in performance This indicates a need for service Replacement Parts When replacement parts are required be certain to use 3 the replacement parts that are specified by Granville Phillips or that have the same characteristics as the original parts Unauthorized substitutions may res
118. see Figure 5 2 This is an indication that the cathode emission properties have deteriorated This may be due to contamination which has temporarily poisoned the cathode coating or to long term permanent erosion of the coating If this condition does not disappear after a few days of operation at clean high vacuum or UHY it is an indication that one or both cathodes are approaching their end of life See Section 6 6 on page 6 7 for more discussion 7 Stable pressure measurement requires that all the environmental parameters in on and around the vacuum gauge and vacuum system remain unchanged during measurement Therefore never attempt meaningful measurements immediately after turning on the Stabil lon Gauge or immediately after degassing the gauge Permit sufficient time for the environmental parameters to stabilize Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 1 Service Guidelines Some minor difficulties are readily corrected in the field Each module has fault indicator LEDs which help localize failures If a qualified service person makes repairs at the component level repairs properly made with equivalent electronic parts and rosin core solder do not void the warranty If the product requires service contact the MKS Granville Phillips Division Customer Service Department at 1 800 227 8766 or 1 303 652 4691 for troubleshooting help over the phone If the product must be returned
119. ss all exposed conductors IS are maintained at earth ground This hazard is not peculiar to this product All conductors in on or around the vacuum system that are exposed to y potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times 1 Never touch the connector pins on any vacuum gauge if high voltages are present in the vacuum system An electrical discharge or plasma may couple high voltage to the pins 2 f you have Convectron Gauge capability connect a Convectron Gauge cable between the Control Unit and each gauge PROCESS CONTROL ANALOG ELECTROMETER REMOTE POWER OUTPUT A 161 COL RS 232 OUTPUT SUPPLY C ANA up to 1 o 43 OUT 13 25 500 ft g 9 4 4 9 1919 al TE E u T 5 15 08 Se IG co 12 6 85 x w 1 014 GND O ANALOG O MIN ADJ OUTPUT B Control Unit Rear Panel Showing the Cable Connection to the Convectron Gauges Warning If used improperly Convectron Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions A within the system For use with gases other than air or N3 consult the gas type correction charts in Section 4 6 1 on page 4 12 or use a Memory Module programmed with data for the specific gas being used Series 360 Stabil lon Instruction Manual 360119 Rev A Install
120. st you do not change the range switch frequently because there is a significant stabilization time to obtain steady state conditions NOTE When the cathode is first turned on or has been exposed to atmospheric pressure it is normal for a relatively large burst of gas to be released momentarily Using the M range will help prevent a nuisance shutdown from this burst 5 When the pressure in the vicinity of IG1 is less than the overpressure setpoint listed above as indicated by a Convectron Gauge or another gauge turn on IG1 See Section 4 7 on page 4 21 for automatic operation 6 The 2 equivalent pressure within IG1 will be displayed in the pressure units you have specified Torr mbar or Pa See Section 2 1 3 on page 2 4 to change pressure units 7 Steps 5 and 6 also apply for IG2 if your Stabil lon System is equipped with the Dual Stabil lon Operation module 4 1 1 Alternate ON OFF Gauge Control The Stabil lon Gauges may be turned on and off in 4 ways M Using the front panel push buttons IG1 and IG2 M Remotely with the available Remote Control module see Section 3 7 on page 3 9 Automatically using the auto on function of the Convectron Gauge module See Section 4 7 on page 4 21 Using the RS 232 RS 485 or IEEE 488 Computer Interface modules See Section 4 11 on page 4 25 Section 4 12 on page 4 29 or Section 4 13 on page 4 32 In addition the Stabil lon Gauge will be automatically turned off by excessive pressure
121. switches 1 through 5 Each instrument on the IEEE 488 bus has an address from 0 to 30 The address for this product is set at the factory to 8 The user must ensure that every device on his bus has a unique address To select an address switches 1 through 5 are adjusted according to binary weights Interface Bus Address Values When OFF Switch Number 5 4 3 2 1 Value when OFF 16 8 4 2 1 Example Switch Settings Switch Number 5 4 3 2 1 Address Setting On Off On On On 8 On On Off Off Off 7 off of of On On 28 Factory default setting 2 1 7 2 Talk Only Mode Switch 8 if set to off during power up places the interface in talk only mode The pressure data from all three displays will be output in a single message string separated by commas approximately every 5 seconds If no Dual Convectron Gauge module is present only the ion gauge pressure will be output The factory default is talk only disabled switch 8 on Series 360 Stabil lon Instruction Manual 360119 Rev A BUS ADDRESS ME SRO MODE TALK ONLY BUS ADDRESS ME SRO MODE ME TALK ONLY Top View of IEEE 488 Module 2 1 7 3 SRQ Mode Switch 7 if set to off during power up tells the interface to generate an SRQ interrupt and expect a serial poll before every message output The SRQ bit will be released when there is a Serial Poll or when the message is read The factory default is
122. t if placed near the pump the pressure in the gauge may be considerably lower than in the rest of the system If placed near a gas inlet or source of contamination the pressure in the gauge may be much higher To minimize temperature effects locate pressure gauges away from internal and external heat sources in a region where the ambient temperature is reasonably constant Parts of the gauge can get quite hot during degassing especially if there is poor ventilation This will not damage the gauge However care should be taken to prevent low temperature rated materials such as plastic wire insulation from touching hot parts of the gauge 3 1 1 EMC Compliance In order to comply with the standards for immunity as called for by the EMC Directive careful consideration to grounding and shielding of instrumentation cables is required User supplied cables must have the drain shield of the cable connected to chassis ground Immunity to radiated and conducted RF energy in industrial environments will depend on cable construction and routing The VGC system will perform within the typical uncertainty of a Stabil lon Gauge system when subjected to industrial levels of RF energy Snap on ferrite sleeves G P P N 013746 4 ea provided must be installed on the ion gauge cable at both the gauge tube end and Controller end of the cable Failure to install these ferrite suppression cores may result in non compliance with the EU EMC Standards for Industrial
123. t the interconnect cable to the Control Unit and to the Power Supply A 0 6 m 2 ft or a 3 m 10 ft for remote mounting interconnect cable is supplied with your Controller and has identical 25 pin connectors at both ends Secure the ends at the Power Supply connector and the Control Unit connector using the two captive screws on each connector SUPPLY wot OUTPUTA em i C A 7 Ten 5 i i TY aot o 109 lt power cable sees 5 ro 1G2 3 161 E m EE Ebr c a a5 5 8 i eco 5 O 5 u O CONTROL UNITS grounded outlet Control Unit interconnect cable Power Supply and Control Unit Rear Views Showing Power Cable Connections Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of IS a vacuum system with this or any similar high voltage producing product Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Carefully check the system using manual operation and the setpoint programming before switching to automatic operation Where an equipment malfunction could cause a hazardous s
124. t voltage and the offset is at the factory adjusted OV at 10 Torr 107 If the offset has been adjusted to other than OV at 104 Torr 10 Pa then the exponent value must be forced to 4 2 for Pa when the pressure is at 1 0 x 107 Torr 10 Pa by adding or subtracting a number other than 4 from the value of V For example if the offset has been adjusted so that the output voltage is 7 V at 10 Torr 10 Pa then 3 5 for Pa must be used in the equation instead of 4 i e P 10 7 9 Furthermore for the same offset if the pressure were say 10 Torr then the output voltage would be 5V The pressure would be calculated as P 104577 4 10 Preparing for Process Control Operation 4 10 1 Setpoint Display and Adjustment Setpoints are stored in non volatile memory and are specified by a 2 digit mantissa and 2 digit exponent They may be set anywhere in the range 1 0 x 10 to 9 9 x 10 This allows for the entire pressure range of the Stabil lon System and its units of measure to be covered The setpoint is compared directly to the display data so units of measure are implicit Changing the units switch on the Controller will not change the stored setpoints They must be reprogrammed to the new units of measure If a setpoint is set to above atmosphere then the relay will always be activated unless its polarity is reversed see Section 2 1 4 on page 2 5 except during transient conditions that occur e g when the Sta
125. tested and found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense If this equipment does cause harmful interference to radio or television reception which can be determined by turning the equipment off and on the user is encouraged to try to correct the interference by one or more of the following measures BE Reorient or relocate the receiving antenna WE Increase the separation between the equipment and the receiver M Connect the equipment into an outlet on a circuit different from that to which the receiver is connected Consult the dealer or an experienced radio or television technician for help UL Listed This product when labeled is Listed to UL 3101 Standard for Safety Laboratory Equipment by Underwriters Laboratories Inc UL Series 360 Stabil lon Instruction Manaul 360119
126. tion 8 Turn off power and using antistatic protection unplug the Memory Module and return it to its antistatic packaging 9 Save the Memory Module together with the original calibration data all properly identified for possible later use Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 4 5 Stabil Ion Gauge Analog Output Signal A signal voltage proportional to the logarithm of the Stabil lon Gauge pressure indication is provided on the back of the electrometer module via a standard 1 8 in miniature phone jack PROCESS CONTROL ANALOG ELECTROMETER REMOTE POWER RR OUTPUT A 151 COL mn OUTPUT SUPPLY O e ANA OUT 12 20 13 c A 13 2 25 MUT 1 9 g 41 O19 Cc G R E G M A s T E E 15 3 8 8 515 9 5 es 12 5 85 x w Ice CoL 1 7o 14 GND ANALOG ANALOG MIN ADJ Control Unit Rear Panel Showing Location of IG Analog Output Normal Measurement Operation Pressure indication Pi 10 11 Torr or mbar 10V Pascal When Degassing Pressure indication Pi 10 13 92 Torr or mbar 10112 pascal When gauge is off V is gt 10 volts This signal voltage is determined by the pressure indicated on the IG display Thus if the scale factor is set correctly for a given gas as specified in Section 4 1 2 on page 4 4 the equations above and curves in Figure 4 9 on page 4 11 still apply for the given gas Series 360 Sta
127. to raise the setpoint V to lower it See Figure 4 21 PROCESS CONTROL 3 After holding the SET button in for about 5 seconds the setpoint will scroll until the button is released It MJ will scroll slowly until a decade boundary is crossed Pd A and then will speed up to facilitate rapid changes 2 across many decades Release the button when you p have entered the desired decade and then depress it m Y again to scroll slowly within the decade to reach the C required setpoint Ns After the setpoint button is released the display will return to pressure data after 2 seconds At this time the new setpoint will be deposited in non volatile memory and will not change when the Controller is turned off TmZZ IO FON LOS Process Control Module Showing Setpoint Set buttons and Channel Select Thumbwheel 4 11 Preparing for Use of the RS 232 Computer Interface For set up instructions see Section 2 1 5 on page 2 9 For connection instructions see Section 3 8 on page 3 13 Check the user s manual for the host computer to be sure the protocol used is compatible with that established via the switch configuration in the RS 232 module Communication with the Control Unit is via ASCII strings A message consists of a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifie
128. to the factory for service request a Return Material Authorization RMA from Granville Phillips Do not return products without first obtaining an RMA In some cases a hazardous materials document may be required The MKS Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning a products to Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the gauge assembly must be handled using proper anti static protection methods and must be packaged in anti static packaging Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility For Customer Service or Technical Support 24 hours per day 7 days per week every day of the year including holidays Phone 1 800 227 8766 or 1 303 652 4691 Email gp csremksinst com MKS Granville Phillips Division 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4691 or 1 800 776 6543 FAX 1 303 652 2844 Because the 370 Controller contains static sensitive electronic parts the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for person nel protection Use conductive or static dissipative envelopes to store or ship static sensitive devices o
129. tor unplugged Bad collector cable Faulty electrometer IG badly contaminated Improper IG or Controller grounding Bad collector cable Excessive noise source Interference from other charged particle source in chamber Faulty electrometer Improper connection of Power Supply cable 18 volt supply to relays faulty 15 volt supply faulty power to analog circuitry and RS 232 15 volt supply faulty power to analog circuitry and RS 232 5 volt supply to display LED s faulty 5 volt logic supply faulty When supplied with the available factory installed Stabil lon Remote Control Cat No 360104 the 360 Control Unit is equipped with a Fault relay The SPDT relay contacts are located on the remote output connector See Figure 6 1 The relay is energized when no fault condition is detected The relay is de energized when There is a fault condition detected by one of the microprocessors There is a microprocessor failure causing the watchdog timer to reset Power is lost due to Power Supply failure Power is removed from the instrument The power switch is turned off H 8 OFF FAILUR a T 5 3 T Control Board Top View Showing Green Power Indicator LED s The source of the fault signal can be determined by observing the fault indicating red LED s and the Power Supply monitor s green LED s located beneath the Control Unit s cover see Figure 1 8 on page 1 6 A list of spec
130. ty MKS Instruments Inc provides an extended warranty period to five 5 years from the date of shipment for the Granville Phillips Series 360 Controllers The MKS General Terms and Conditions of Sale provide complete and exclusive warranty for MKS Granville Phillips Division products This document is located on our website at www mkdinst com or may be obtained by contacting an MKS Granville Phillips Division Customer Service Representative Service Guidelines Some minor problems are readily corrected on site If the product requires service please contact our Customer Service Department at 1 303 652 4400 for troubleshooting help over the phone If the product must be returned for service request a Return Materials Authorization RMA from Granville Phillips See Service Guidelines in Section 6 1 Do not return products without first obtaining an RMA Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility When returning equipment to Cranville Phillips please use the original packing material whenever possible Otherwise contact your shipper or Granville Phillips for safe packaging guidelines Circuit boards and modules separated from the controller chassis must be handled using proper anti static protection methods and must be packaged in anti static packaging Granville Phillips will supply return packaging materials at no charge upon request FCC Verification This equipment has been
131. ult in fire electric shock or other hazards the Qualified Service Person to perform safety checks to determine that the Safety Check Upon completion of any service or repairs to this product ask product is in safe operating order Finite Lifetime After ten years of normal use or even non use the electrical insulation in this product may become less effective at preventing electrical shock Under certain environmental conditions which are beyond the y N manufacturer s control some insulation material may deteriorate sooner Therefore periodically inspect all electrical insulation for cracks crazing or other signs of deterioration Do not use if the electrical insulation has become unsafe Be aware that when high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed conductors y are maintained at earth ground This hazard is not peculiar to this product Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection A person may be seriously injured or even y killed by merely touching an exposed ungrounded conductor at high potential This hazard is not unique to this product Series 360 Stabil lon Instruction Manaul 360119 Rev A Safety Instructions Proper Grounding All components of a vacuum system
132. ure The small diameter sensor wire can be damaged by small voltages Do not perform electrical continuity tests with instruments applying in excess of 1 volt when the gauge is at vacuum or 5 volts when at atmospheric pressure The Convectron Gauge should show the following resistances pin numbers are embossed on the gauge base Convectron Gauge Resistances Convectron Gauge Base Pins 1 to 2 20 to 25 ohms Pins 2 to 3 50 to 60 ohms Pins 1 to 5 175 to 190 ohms If the resistance from pin 1 to pin 2 is about 800 ohms the sensor wire is open 6 9 Cleaning Contaminated Convectron Gauges The fumes from solvents such as trichloroethylene perchlorethylene toluene and acetone can be dangerous to health if inhaled If used use only in well A ventilated area exhausted to the outdoors Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment The Convectron Gauge may be baked to 150 C nonoperating while under vacuum with the Connector removed All materials have been chosen for ultra high vacuum service corrosion resistance and bakeability The envelope is type 304 stainless steel All metallic joints in the envelope are TIG welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy 52 Kovar Kapton gold plated tungsten borosilicate glass and Dow Corning 9015 glass The blue tr
133. uring Degas An approximate indication of pressure within the Stabil lon Gauge is provided on the digital display during degas Observing this pressure indication rise peak out and then fall is an excellent means of determining the optimum time of degas The indication may eventually be unrealistically low due to a reverse x ray current effect or temporary gauge pumping Degassing purposely changes surface conditions in the gauge After degassing permit sufficient time for steady state conditions to be established before attempting to make measurements 4 2 2 Degas Timer The degas timer is factory preset for 10 minutes See Section 2 1 8 on page 2 16 to change this time 4 2 3 Degas Limiter For convenience and improved safety degas power is automatically reduced as gas is liberated to prevent excessive pressure rise and help reduce the possibility of a gas discharge forming As the electrodes clean up power is increased to a maximum of 40 W This feature limits the maximum pressure indication to about 5 x 10 Torr during degas 4 2 4 Gauge Bakeout Applying an external heat source to the vacuum system and to the gauge envelope can speed the removal of contamination from the interior surfaces Bakeout temperatures between 150 C and 300 C are typically adequate Do not exceed 450 C at the Stabil lon Gauge envelope Do not exceed 150 C at the cable and connector 4 3 Alternate Cathode Operation The cathode coating used in the Stabi
134. v A Preparing the Stabil lon System for Operation 10 1072 Kr Ar Ne a 27 9j E He OAM freon 22 L A 7 freon 12 2 E 7A 2 Q 4 VILEGA 2 ZE ELA 2 2193 a A VLA A ha Do not use this data with transd o not use this data with transducers 92 LL other than the G P Series 275 IBN Z Convectron Gauge tj Pressure units equivalence 10 ZG 1 mbar 100 pascal A 104 103 10 Indicated Pressure mbar nitrogen equivalent Convectron Gauge Indicated vs True Pressure Curve 10 to 107 mbar Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Stabil lon System for Operation 1000 Ar freon 12 CO2 No air 100 CH4 10 He 5 Q 2 2 3 a 5 Use only when gauge axis is horizontal Do not use this data with transducers 1 other than the G P Series 275 Ht 10 ILE Convectron Gauge Pressure units equivalence 1 mbar 100 pascal RE 102 107 10 100 1000 Indicated Pressure mbar nitrogen equivalent Convectron Gauge Indicated vs True Pressure Curve 10 to 1000 mbar Series 360 Stabillon Instruction Manual 360119 Rev A Preparing the Sta
135. wire of the Convectron Gauge normally operates at only 125 C but it is possible that Controller malfunction can raise the sensor temperature above the ignition temperature of combustible mixtures gt Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits Warning If used improperly Convectron Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system For use with gases other than air or N3 consult the gas type correction charts in Section 4 6 1 on page 4 12 or use a Memory Module programmed with data for the specific gas being used Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system See Section 4 6 1 on page 4 12 before using with other gases Caution If the overpressure shutdown point is increased from the factor settings an excess pressure rise may go undetected resulting in possible gauge and or vacuum system damage Consult the factory if in doubt It is the installer s responsibility to ensure that the automatic signals provided by the product are always used in a safe manner Carefully check the system programming before switching to automatic operation Where an equipment
136. wly using pull tabs Lift out the filler module at the position where the module is to be installed Install the module in its proper position making sure all ends lock together Carefully reconnect the bus ribbon connectors 10 Select appropriate switch settings See Chapter 2 11 Replace the top cover as directed in Section 2 1 9 on page 2 17 Series 360 Stabil lon Instruction Manual 360119 Rev A Service and Maintenance 6 15 Troubleshooting Flow Charts Troubleshooting Flow Charts Figure 6 7 Power Turn On Figure 6 10 Convectron Gauge Display Figure 6 8 Stabil lon Gauge Turn On Figure 6 11 RS 232 IEEE 488 Interface Figure 6 9 Stabil lon Gauge Display Scale factor center off and IG2 auto off Set switches as follows 360 TURNON SEQUENCE BEGIN POWER SWITCH REPLACE FUSE REPLACE CORD CIRCUIT BREAKER 7 7N YES YES YES 5 Is IS NO NO Is CHECK AC FUSE CHECK AC CHECKMAN lt CIRCUIT ap toy gt LINE FUSE 7 BLOWN 7 UNE CORD E CIRCUIT BREAKER BREAKER j TRIPPED YES VA NO IS ON GAUGE NO PRESSURE DISPLAY BLANK ves Y G GAUGE No 1 AND 2 SET SWITCHES ON OFF TO CORRECT LAMPS VOUAGE REPLACE CABLE OFFS YES Y N ARE NNI J CHECK POWER CHECK
137. wo channel Process Control 2 6 EMC compliance 3 1 Environmental conditions 3 2 FCC verification 1 ix Field Installation of Modules 6 11 Flow Charts Troubleshooting 6 12 Gases other than nitrogen or air 4 4 4 12 Grounding the system 3 5 Guard 3 19 Handshaking 2 11 IEEE 488 Command syntax 4 32 Computer interface setup 2 15 Connecting 3 18 SRQ mode 2 16 Talk only mode 2 15 Troubleshooting 6 10 IG Process Control channel switch settings 2 7 Installation 3 1 CONVECTRON Gauge 3 3 Grounding the system 3 5 STABIL ION Gauge 3 2 Tips 3 1 Series 360 Stabil lon Instruction Manual 360119 Rev A Memory module Stabil lon Gauge 4 8 Mounting Control Unit 3 5 Control Unit and Power Supply 3 6 CONVECTRON Gauge 3 3 Hardware for 1 2 Power Supply 3 5 Operation CONVECTRON Gauge 4 11 5 2 Stabil lon Gauge 4 1 STABIL ION System 5 1 Overpressure Shutdown 6 5 Power cables 3 21 Power Supply Mounting 3 5 Set up 2 17 Pressure measurement CONVECTRON Gauge 4 11 Stabil lon Gauge 4 1 Pressure range 4 2 Pressure units Display formats 5 1 Process Control Connecting relays 3 8 Preparation for operation 4 24 Setpoint display and adjustment 4 24 Setup 2 5 Tips 2 9 Relay polarity setting 2 8 2 14 Remote Control IG on off 3 11 Input states 3 10 output connector 3 13 Pressure range 3 12 STABIL ION Gauge 3 9 RS 232 Command syntax 4 26 Computer interface setup 2 9 Index Connecting 3 13 Troubleshootin

360 Stabil-Ion® Controller Vacuum Measurement System Manual

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360 Stabil-Ion&reg; Controller Vacuum Measurement System Manual

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360 Stabil-Ion® Controller Vacuum Measurement System Manual