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Model 6524 High Resistance Measurement Software User`s Manual

1. 3 8 6517 Step Response Running the test Run Analyze the ending portion of the decay Use the cursors to select an ending section of the decay and press Best Fit Figure 3 5 shows Best Fit for cursor values of 125 and 226 The time constants for this section of the decay is 3 574 As shown in Figures 3 4 and 3 5 those two sections of the current decay have different time con stants Note that the time constant of any linear section of the decay can be determined using the cursors and Best Fit NOTE Moving a cursor changing the scale of the X or Y axis or loading new graph data removes the curve fit from the graph Click Best Fit to re apply the curve fit Figure 3 5 Best Fit Cursor points 125 and 226 Cursors 6517 Hi R Step Response Dese a 1 10 04 Y Log X Log Current amps Time Constant 3 574 0 2 4 6 8 10 12 14 16 Time secs Clicking this button starts the measurement process The Step Voltage is applied to the sample and continuous current measurements are performed by the electrometer At the end of the Mea sure Time the measurement process stops and the current readings are sent to the computer where they are plotted on the main panel graph The graph will not be displayed until all of the data points are plotted A large number of data points will take a longer period of time See Best Fit to analyz
2. 4 9 Auto Range e d duo idet 4 10 Measurement Lype d ere het ee EO EE E UR ER ERREUR ER UE IU IRE Rd 4 10 GPIB Addie3S tenete eld ee eite 4 11 save Load eed reete pe e e E Ee REEF 4 11 Geomettres aset ea e e dn an ne Dn dee 4 11 odo eerte Se e ERE UE ER Tex vet e eat NER dove 4 11 dene Ree do pea teme 4 11 ADOTT RM HN data cd 4 13 6517A Hi R Temp and RH Introd ctioh et ret e eren P eter tree e e ed ce tene 5 2 Measurement configuration controls eese nnne nre eeneet nennen eene nnet nennen 5 3 R adings to Store d ed te E OE E Ru i NoD 5 3 5 5 ui Reden 5 4 TE OD 5 4 General setup controls x HR 5 4 GPIB addres Soe teet et ee EU devs ERU 5 4 atc eta eet tee eee iere EE 5 4 iG conis S 5 5 Running the test iR ERE dun ere E e te 5 5 Rufi au ce RIO PREIS 5 5 BA RC 5 5 List of Figures Getting Started IEBE 488 cOnn Ctot nieto tete e ere a te e e E RC ER EROR ERE er D t tetra beet 1 3 IEEE 488 connector loc
3. e t ep vtero ter en Desde 2 14 6517 Hi R Step Response Settings Panel ea acide teer peo drip e aite oer 3 2 st RE EUR eese 3 4 Current Praph log scale i e tete aa ep re imet le dtd e t ERES 3 7 Best Eit Cursor points 51 and 100 iere eee ee eatete e na AE lad aloes 3 7 Best Eit Cursor points 125 and 2202 tie ite e e ee are te rt ye ei e oe PUE eds 3 8 iii iv 6517A Hi R Sweep Test Sweep test panel e ero d te epe petiit en E 4 3 Measure Time configuration panel ettet eae ertt Rao 4 5 Offset Voltage configuration panel tette treten t eee 4 5 Alternating Voltage configuration panel 4 5 Alternating between Zero and V configuration 4 5 Measure time Option sis i o pote E p aH ui ect ot e its t ERR Ue et 4 8 Offset voltage e reet etude ee tee tere ee ER 4 8 Alternating voltage options acr eite iS eite Le dae o E I de imn e tee ees 4 8 Alternating between zero and V 0 4 8 Setting conflict error messages io RN electi tee oie eio 4 8 4 10 Measurement Type iot tbe trn 4 10 Sample graph uite e e e eO T HOO ERR ERU i
4. This sets the time the voltage is held at a set level see Step Voltage while continuous current measurements are taken The measurement time may be cut short if the buffer becomes full For an NPLC setting of 1 the buffer will not become full before 700 seconds Step Voltage This sets the voltage that will be applied to the sample Current measurements are performed while at this voltage level Current Range This pulldown menu allows you to manually select the current range to be used for current mea surements Figure 2 2 in Section 2 shows an example of this menu Be sure to select the most sensitive measurement range that can accommodate the expected current The lowest two ranges 200pA and 20 ranges should not be used with measurement times less than 15 seconds Since the response time of the electrometer on these ranges is 2 5 seconds current measurements taken at less than 15 seconds from the voltage change may have significant error due to meter settling Auto Range could instead be used if you do not know which current range to use for the test see next control NOTE The Current Range control will be disabled if Auto Range is on To enable manual range selection turn Auto Range off see Auto Range control Auto Range When the optimal current range is not known you could use this pulldown menu to turn Auto Range on see Figure 2 3 in Section 2 With Auto Range on the electrometer will automatical
5. 4 12 Infinity message panel ne Reo n P ERU E DESEE RR I ERE E UI 4 12 6517A Hi R Temp and RH Temp and RH panel egeret trie rto ie Heer soar Pr denen 5 2 and temperature vs time 2 ie ie e n e EE RE ue ead eR TR ERR Rr ee 5 6 Relative humidity vs time ene t b e tp t a A e e ep eR pte eh 5 6 Infinity message panel uo mu Ru eR RR e RE DRE e reU ERR RO 5 7 List of Tables 6517 Hi R Test Measurement configuration controls t rete er 2 3 6517 Hi R Step Response Settings panel controls eoa e HU EE RR HERE 3 3 6517A Hi R Sweep Test Sweep series parameter settID s ces o ER et e EAE INNER CERE DU 4 6 Test setup control SLED GS yao uec EEA E Re RR ERR e o er ERR LE CH M 4 9 6517A Hi R Temp and RH Measurement configuration controls 5 3 1 Getting Started 1 2 Getting Started Introduction The Model 6524 software package contains four test programs to perform resistance resistivity measurements Program information 6517 Hi R Test This test performs resistance resistivity measurements using the Alter nating Polarity method Two graphs are generated I vs Time and R vs Reading Numbers measurements This program is documented in Section 2 If you are unfamiliar with the Alternating Polarity me
6. 6517 Settings Clicking this button brings up the Settings Panel see Figure 3 1 From this panel you can reconfigure the basic measurement parameters See 6517 Settings Panel for details X Log and Y Log When this program is loaded the sample graph is displayed using linear scaling for both the X and Y axis Checkboxes are provided to change the X and or Y axis of the graph to the logarithmic scale The checkboxes are located at the top right portion of the graph Checking a box selects the logarithmic scale for that axis and un checking the box selects the linear scale A box is checked or un checked by clicking on it NOTE The log of 0 or a negative value is not a valid mathematical function When selecting the logarithmic scale for the Y axis any data points that are 0 are omitted from the graph 3 6 6517 Step Response Cursors Best Fit The Cursors are used to define the section of current data on which the Best Fit operation is to apply The cursors are operated by clicking and dragging the slide bars Cursor point values located just below the slides are provided to reference the position of the cursors The cursors can also be moved by keying in the desired cursor point and pressing ENTER on the computer key board The order of the two cursors is irrelevant they only define the end points of the data to be used In order for the Best Fit to execute properly there must be at least two positive data p
7. Auto Range AutoRange off AutoRange off AutoRange on or AutoUprange only Measurement Type Resistance Resistance Surface Resistivity Volume Resistivity or Current GPIB Address 27 0 to 30 Rdgs to discard This control allows you to specify the number of initial measurement conversions readings that are to be discarded for each sweep point This allows the sample to reach a steady state response before performing the four measurements that are averaged to produce a reading for the graph The default is 3 readings and be set from 0 to 9999 Current Range This pulldown menu allows you to manually select the current range to be used for current mea surements Figure 2 2 in Section 2 shows an example of this menu Be sure to select the most sensitive measurement range that can accommodate the expected current The lowest two ranges 200pA and 20 ranges should generally not be used with measurement times less than 15 seconds Since the response time of the electrometer on these ranges is 2 5 seconds current measurements taken at less than 15 seconds from the voltage change may have significant error due to meter settling The Current Range can be set from 20pA to 20mA factory default is the 2 range Auto Range can instead be used if you do not know which current range to use for the test see next control NOTE Manual current range selection is disabled if AutoRange On is select ed To re enable m
8. 10 5 0 5 10 20 50 and 100V Alternating V alt Fixed Point 1000 to 1000V 50V V V alt Linear Sweep 1000 to 1000V 10 20 30 40 100 Step 0 05V minimum 10V V alt Log Sweep 0 01 to 1000V 1 3 16 10 31 62 100 316 23 and 1000V Steps 1 to 1000 6 V alt Custom Sweep 1000V to 1000V 1 2 5 10 20 50 and 100V Alternate 0 to V Fixed Point 1000 to 1000V 100V between V Linear Sweep 1000 to 1000V 100 90 80 100 zero Step 0 05V minimum 10V 0 to V Log Sweep 0 01 to 1000V 1 3 16 10 31 62 100 316 23 and 1000V Steps 1 to 1000 6 to V Custom Sweep 1000 to 1000V 100 50 20 10 5 5 10 20 50 and 100V The parameter options are explained as follows After configuring the desired parameter s click OK Fixed Point This value defines the fixed point setting for the parameter Linear Sweep The series of values for a linear sweep is configured by entering the beginning and ending sweep values and the Step size The sweep series is automatically calculated and displayed on the panel For example 10 to 30 step 5 generates the following series 10 15 20 25 30 If the beginning value is larger than the ending value the series will step down to the final value For example 30 to 10 step 5 generates this list 30 25 20 15 10 Log Sweep This option is used to define a geometrical series of numbers The logarithmic sweep is configured by entering the beginning and en
9. 500 600 ofs Log Sweep 0 fioo in 5 steps 12 51 6 31 15 85 39 81 100 V ofs Custom Sweep 100 50 20 10 5 0 5 10 20 50 100 Figure 4 4 Alternating Voltage configuration panel V alt Fixed Point V alt Linear Sweep n on 10 20 30 40 50 60 70 80 90 1 V alt Log Sweep 1 9 in j steps 1 3 16 10 31 62 100 316 23 1 V alt Custom Sweep Figure 4 5 Alternating between Zero and V configuration panel Zero to V Fixed Point Zero to V Linear Sweep to step 100 90 80 70 60 50 40 Zero to Log Sweep in 6 steps 4 3 16 10 31 62 100 316 23 1 Zero to V Custom Sweep 100 50 20 10 5 5 10 20 50 100 4 6 6517A Sweep Test Table 4 1 Sweep series parameter settings Sweep Parameter parameter Setting range Factory default Measure Time Fixed Point 0 5 to 9999 9 sec 15 sec time Time Linear Sweep 0 5 to 9999 9 sec 2 3 4 5 10 sec Step 0 1 sec minimum sec Time Log Sweep 0 5 to 9999 9 sec 1 3 16 10 31 62 and 100 sec Steps 1 to 1000 4 Time Custom Sweep 0 5 to 9999 9 sec 2 5 10 20 50 and 100 sec Offset V ofs Fixed Point 1000 to 1000V OV voltage V ofs Linear Sweep 1000 to 1000V 0 100 200 300 900V Step 0 05V minimum 100V V ofs Log Sweep 0 01 to 1000V 1 2 51 6 31 15 85 39 81 and 100V Steps 1 to 1000 5 V ofs Custom Sweep 1000 to 1000V 100 50 20
10. KEITHLEY 1 4 Getting Started Resistivity test fixtures Resistance measurements Figure 1 3A shows the connections to the Model 8002A for resistance measurements For details on mounting the DUT device under test in the test fixture refer to the Model 8002A manual If using a different test fixture refer to Figure 1 3B which shows the basic connections between the DUT and the electrometer Resistivity measurements Figure 1 3 shows the connections to the Model 8009 for resistivity measurements For details on mounting the sample in the test fixture refer to the Model 8009 manual ATTENTION Connectionfor Vsource and Ammeter Low terminals must be connected externally The 6524 software does not support the Metter Connect feature of the Model 6517A WARNING prevent electric shock make sure the safety interlock cable is properly installed as shown in Figures 1 3 When the cable is properly installed the V Source of the electrometer will go into standby whenever the test fixture lid is opened Getting Started 1 5 Figure 1 3 Connections for resistivity measurements using Model 8009 test fixture 6517 ILC 3 Interlock Cable Model 8009 250V PEAK SOURCE INTERLOCK 7078 TRX 3 Triax Cable Model 6517A 8607 Banana Plug Cables Warning Connect of fixture to safety earth ground using safety ground wire Temperature and humidity sensors For 6517A Hi R
11. This action displays a message panel that ex plains the error i e Figure 4 10 After clicking OK on the message panel repeat steps 2 and 3 of the above procedure if there are two series of values selected for the sweep 4 8 6517A Sweep Test Figure 4 6 Measure time options Figure 4 7 Offset voltage options Voltage 100 50 20 10 5 0 Figure 4 8 Alternating voltage options 10 20 30 40 50 60 0 20 30 40 50 60 1 6 10 31 62 100 10 20 50 100 1 1 3 161 1 2 5 10 Figure 4 9 Alternating between zero and V options x Alternate Between Zero and V 100 90 80 70 gt 100 90 80 70 60 100 50 20 10 5 5 Figure 4 10 Setting conflict error message You must select a sequence between Measure Time Offset Voltage and Alternating V OK 6517 Sweep Test 4 9 Test setup controls Factory default settings and setting ranges for the Test Setup Controls are listed in Table 4 2 NOTE The Rdgs to store 1 message on the main panel indicates that one reading is stored by the program and graphed for each sweep point Table 4 2 Test setup control settings Factory default Test setup control setting Setting range Readings to discard 3 0 to 9999 Current Range 2nA 20mA 2mA 200 20uA 2uA 200nA 20nA 2nA 200pA or 20pA
12. factory for proper cleaning servicing Table of Contents Getting Started ntrodUctIOn OR e teme a aide 1 2 Software installation ce etas RR CR e ae d He pee ee eet eb eR nodes 1 2 Connections eee Pg Hep e RU GER ELE HR 1 3 GPIB IEEE 488 bus 1 3 Resistance resistivity test fixt res inerte eti reto E e gro i aS 1 4 Temperature and humidity Sensors 1 5 Loading program rtt en P er EE RE e E CREER 1 6 Editing TESTPT INI RL RRA ea Ae T 1 7 GPIB eet o nee Ope HOHER S RH e RR HERR GR ERE E tek RC 1 7 Gic ME 1 8 Printing copying eee dede tno repe HE e HERR ODORE ERR DER ph 1 8 Ico D 1 8 1 9 Peak to Peak atio Renee me be eres barba p odes adve 1 9 Alternating Polarity Test method t CO EE Fee Ee Er breue 1 10 6517 Hi R Test 651 7E anlem plo d ette 2 2 Measurement configuration controls er eite eee e Pt 2 3 Measu
13. problem J Intermittent Analog output follows display Particular range or function bad specify IEEE failure J Obvious problem on power up Batteries and fuses are OK 1 Front panel operational ranges or functions are bad 1 Checked all cables Display or output check one J Drifts Unable to zero J Unstable Will not read applied input LJ Overload J Calibration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether power is turned on or not Also describe signal source Where is the measurement being performed factory controlled laboratory out of doors etc What power line voltage is used Ambient temperature F Relative humidity Other Any additional information If special modifications have been made by the user please describe Be sure to include your name and phone number on this service form 12 06 Specifications are subject to change without notice Keithley trademarks and trade names are the property of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies KEITHLEY GIR EAT MEASURE Q Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 F
14. resistivity measurement surface or volume click this button to bring up the Geometries panel It is used to set geometrical properties that pertain to the sample and test fixture electrodes For details on setting the geometrical properties see Geometries under General setup controls in Section 2 Clicking this button starts the test sequence Because settling time Readings to discard can be long it may be helpful to first run the test with no settling time Readings to discard 0 to verify that the appropriate current range and voltages are being used Figures 5 2 and 5 3 show example graphs These sample graphs can be displayed by loading sample4 dt4 from the Load Data option of the Save Load panel Pk Pk This box on the graph displays the peak to peak difference divided by the average The calculation is provided in Section 1 Compatibility checks Before the test is started compatibility checks are performed If the Model 8009 test fixture is being used and selected in the Geometries panel the safety interlock cable and resistivity switch settings are checked If the safety interlock cable is not connected between the electrometer and the test fixture a warning message will appear After properly con necting the safety interlock cable click OK on the message panel NOTE Some of the panel controls will be disabled during the test to prevent inadvertent parameter changes WARNING prevent electric shock alwa
15. the reading type to plot on the graph see Figure 4 12 If Measurement Type is set to either resistivity setting Surface or Volume the calculations for Surface or Volume resistivity will use settings from the Geometries panel see Geometries but ton If Resistance or Current is selected Geometries settings are not used Figure 4 12 Measurement Type Measurement Type Current Amps Resistance Ohms Surface Resistivity Ohm sq Volume Hesistivit Current Amps 6517 Sweep Test 4 11 GPIB Address Save Load This button is used to check and or change the GPIB address see Figure 2 7 in Section 2 The GPIB Address be set from 0 to 30 If this address does not agree with the Talk Listen address of the electrometer a GPIB timeout error will occur and you will not be able to run this test pro gram With the appropriate address displayed on the GPIB Address panel click OK to enter The factory default address for this program and the electrometer is 27 Refer to the electrometer user s manual if you need check and or change the GPIB address of the instrument Clicking this button brings up the Save Load panel From this panel you can perform the follow ing operations Save Current Settings as Power Up defaults Reset Settings to Factory Defaults Load Settings from a file e Save Settings to a file Load Data from a file Save Data to a file These operations are the same as the Save Loa
16. value can be set from 0 to 1000 factory default is 53 4 When using the Model 8009 08009 fixture checked this setting is disabled and a value of 53 4 will be used 2 10 6517 Test Running the Test Run This button begins execution of the Alternating Polarity Measurement test Two graphs are gen erated and are titled Resistivity or Resistance Test Current Trace and Resistivity or Resis tance vs Reading Number When Run is clicked to start the test the test current graph is displayed and plotted The other graph is located behind the test current graph NOTE Some of the panel controls will be disabled during the test to prevent inadvertent parameter changes NOTE When the graphs are displayed they are positioned such that a small portion of the hidden graph is visible The hidden graph can be brought to the front by clicking on it To display the main panel mini mize or close the graph panels Closed graph panels can be re opened by clicking View Graphs on the main panel Resistivity or Resistance Test Current Trace graph This graph displays the current response of the sample or resistance under test to the alternating voltage being applied Current measurements are performed by the Model 6517 at NORMAL speed NPLC 1 which is 15 rdgs sec Measure Time indicates how long voltage remains at each alternating level For the purpose of calculating resistance resistivity only the last current measurement
17. 0mA 2mA 2001 20 2 200nA 20nA 2nA 200 or 20pA Auto Range Off Off or On Measurement Type Volume Resistance Surface or Volume NOTE The explanations for Measure Time Offset Voltage Alternating Volt age Current Range Auto Range and Measurement Type are covered in Section 2 under Measurement configuration controls Readings to store Readings to discard and the T or RH buttons are explained in the following paragraphs Readings to store The Readings to store value is the number of resistance resistivity readings to plotted and does not include any initial readings that are discarded see next control The amount of time the test will run after discarding initial readings is the product of Measure Time and the number of Readings to store Thus 2000 readings Readings to store at 15 seconds Measure Time each will run uninterrupted for a little over 8 hours Runtime Measure time x Readings to store 15 seconds 2000 readings 30 000 seconds 8 33 hours after discarded readings NOTE Readings to store can be set to the maximum storage capability of the Model 6517A buffer This program configures the buffer so it can store at least 15706 readings The actual maximum buffer size varies as Model 6517A firmware revisions occur but it will always be great er than 15706 readings If you specify a Readings to store value that exceeds the maximum a message will be displayed indicating that the readi
18. 2 Measure TIME oe cb e ER et rer ee pe e E pugne ta dani eaves 3 3 Step Voltagez doeet IR DIR RR RE HD COE He e e EE d M Re 3 3 Current Range acne ee 3 3 Aut Raig Eai 3 3 eaaet DB ud nau i E 3 4 3 4 GPIB Addi de D de E ER C RACER d a 3 5 Saye Load ou Ree e tt aet ee dn e ite e de 3 5 6517 Set GS cem de oe Dg REED pH URDU OB UD RR PERS 3 5 X Log and Y Log iie Sui RR RR RR HU ERN re ERE Re E eu es 3 5 CUTSOTS iate tiet Et b a ER e D n HR esed 3 6 hrodum EE 3 6 Running th test e RU xe e e E erg 3 8 oup EE 3 8 Pim T 3 8 6517A Hi R Sweep Test Introduction A eot moth e i e tec tatus 4 2 Alternating Voltage Options eere 4 2 SWEEP series configuration eni euer ed ee o enr 4 3 Editing measurement parameters assem rete pea ex en e a pner E ES ERES 4 4 Selecting measurement parameter 4 7 Test setup controls nct NI 4 9 Rdgs to discardss 5 4 9
19. 3 Alternating voltage options 4 2 Auto range 2 5 3 3 4 10 B Best fit 3 6 C Connections 1 3 Current range 2 4 3 3 4 9 Cursors 3 6 E Editing measurement parameters 4 4 Editing TESTPT INI file 1 7 G General setup controls 2 6 5 4 Geometries 2 8 4 11 5 5 Getting started 1 1 GPIB address 2 8 3 5 4 11 5 4 GPIB IEEE 488 bus connections 1 3 GPIB timeout error 1 7 Graphs 1 8 Graphs show on run 2 6 Idle Operator indicator 2 13 Inspect 1 8 L Loading a program 1 6 M Main panel 3 4 Measurement configuration controls 2 3 5 3 Measure time 2 3 3 3 Measurement box 2 13 Measurement timing 2 13 Measurement type 2 5 4 10 N NPLCs 3 4 O Offset voltage and alternating voltage 2 3 P Peak to Peak Pk Pk 1 9 Printing and copying 1 8 R Rdgs to discard 2 4 4 9 5 4 Readings to store 2 4 5 3 Resistance resistivity test fixtures 1 4 Run 2 10 3 8 4 11 5 5 Running the test 2 10 3 8 4 11 5 5 5 Save Load 2 6 3 5 4 11 5 4 Selecting measurement parameter options 4 7 Software installation 1 2 Step voltage 3 3 Sweep series configuration 4 3 T T or RH 5 4 Temperature and humidity sensors 1 5 Test setup controls 4 9 V View graphs 2 13 X X Log and Y Log 3 5 i 1 Service Form Model No Serial No Date Name and Telephone No Company List all control settings describe problem and check boxes that apply to
20. 7 78 23 71 31 62 42 17 56 23 74 99 and 100V points 4 12 6517A Sweep Test Pk Pk This box on the graph displays the peak to peak difference divided by the average The calculation is provided in Section 1 For this test data points generated with Alternating V at OV are excluded These data points are sometimes generated when lists inadvertently include zero NOTES Some of the panel controls will be disabled during the test to pre vent inadvertent parameter changes Ifyou use a current range that is too high current may not be mea surable zero The Infinity message panel will be displayed to in dicate this condition and the R value s will be plotted as zero An example of the Infinity message panel is shown in Figure 4 14 Figure 4 13 Sample graph Figure 4 14 Infinity message panel 6517 Sweep Test 4 13 Compatibility checks Before the sweep is started a series of compatibility checks are performed 1 Across check is made to ensure that only one of the enabled measurement parameters has a series of values selected If not a message will appear to that effect and the Run will be aborted 2 Ifthe Model 8000 test fixture is being used and selected in the Geometries panel the safety interlock cable and resistivity switch settings are checked e Ifthe safety interlock cable is not connected between the electrometer and the test fix ture a warning message will app
21. NOTE An Alternate Between Zero and V sweep is an Offset Voltage Alter nating V sweep where Offset Voltage Alternating V For example setting both Offset Voltage and Alternating V to 50V fixed is identi cal to setting 0 to 100V fixed 6517A Sweep Test 4 3 Figure 4 1 Sweep test panel IS Sweep Test loj x 6517 Hi R Sweep Test Edit Parameters Select Measure Time 15 Sweep PkPk ma Alternate Between Zero and V Rdgs to store Le Rags to discard Current Range 2 Auto Range AutoR ange off Measurement Resistance Ohms GPIB Address Sweep series configuration The parameters of an alternating polarity test are Measure Time Offset Voltage and Alternating Voltage In order to perform a sweep one of those parameters must be set to a series of values The other two parameters must be set to a fixed value As shown in Figure 4 1 Measure Time and Offset Voltage are set to fixed values 15 and 0 respectively and Alternating Voltage has a series of values 10 20 30 40 100 The parameters of an Alternate Between Zero and V test are the Zero to voltage and Measure Time This test is enabled by clicking the Alternate Between Zero and V checkbox X appears in box With this test enabled the Offset Voltage and Alternating Voltage parameter buttons are disabled For this Alternating Polarity test voltage alt
22. Temp and RH program simultaneous temperature and or humidity mea surements can be performed along with resistivity resistance measurements The connections for these external sensors are shown in Figure 1 5 Figure 1 4 Temperature and humidity sensor connections Model 6517 6517A K INPU 250V PEAK Model 6517 TP Model 6517 RH Thermocouple Bead Probe Humidity Probe 1 6 Getting Started Loading a program Perform one of the following procedures to load one of the Model 6524 test programs Note that only one program can be run at a time Windows 2000 or XP 1 Click Start select Programs and then select 6517 Hi R Applications to display the pro gram menu 2 Click the desired program on the menu NOTES You cannot load a high resistance application program if another one is al ready in use loaded Attempting to do so will display a message see Figure I 6 to indicate this and the program will be terminated If the program detects no GPIB board at the I O address listed in the TESTPT INI file the GPIB board error message will be displayed see Figure 1 7 After clicking OK the program will proceed but certain functions may not be available After the program is loaded it attempts to communicate with the electrometer via the GPIB interface If this communication fails a GPIB timeout message is displayed see Figure 1 8 The GPIB timeout error is explained a
23. Voltage Ior R vs Alternate Between Zero and V where current readings resistance or resistivity surface or volume readings After this test is loaded from the 6517 Hi R Applications menu the main Sweep Test panel see Figure 4 1 is displayed The various controls to set up and run this test are explained as follows NOTE If the program cannot establish communication with the electrome ter a timeout error occurs GPIB Timeout panel appears See GPIB Timeout Error in Sectionl for details on clearing this error Alternating voltage options There are two voltage alternation options that can be used the Offset Voltage Alternating V option or the Alternate Between Zero and V option Offset Voltage Alternating V With this option a specified voltage Alternating V is alternately added to and then subtracted from a specified Offset Voltage A current measure ment will be performed on every alternation For example to alternate between 50 and 50V Offset Voltage would be set to OV and Alternating V would be set to 50V To alternate between 60V and 40V Offset Voltage would be set to 50V and Alternating V would be set to 10V Alternate Between Zero and V With this option the V Source output alternates between the specified voltage value and OV For example if the voltage value is 100V the output will alternate between 100V and OV A current measurement will be performed on every 100V and OV alternation
24. ak to Peak calculation Typically a zero data point for the Sweep Test indicates invalid data 1 10 Getting Started Alternating Polarity Test overview application programs except the Hi R Step Response program use the Alternating Polarity Test method This method is designed to improve high resistance resistivity measurements These measurements are prone to large errors due to background currents These background currents can arise from many sources and are extremely common and troublesome Sources in clude residual currents from previous voltages applied to the sample currents generated due to piezoelectric effects triboelectric effects temperature or mechanical stress electrochemical currents or instrument bias currents By using an Alternating Polarity stimulus voltage it is pos sible to isolate stimulated currents from background currents When the Alternating Polarity method is used the Voltage Source output of the electrometer alternates between two voltages Offset Voltage Alternating V and Offset Voltage Alternating V at timed intervals the Mea sure Time A current measurement Imeas is performed at the end of each alternation After four Imeas values are collected a current reading is calculated Icalc Icalc is the binomially weighted av erage of last four current measurements Imeas1 through Imeas4 Icalc 1 Imeas1 3 Imeas2 3 Imeas3 1 Imeas4 The signs used for the four terms are the p
25. alue is also invalid For example if the first square is red over flow then the first blue X ICALC will not be valid data In order for an ICALC value blue X to be valid the last four squares must be black 6517 Test 2 11 Resistivity or Resistance vs Reading Number graph This graph displays the R resistivity or resistance values derived from the ICALC values on the Resistance Resistivity Test Current graph blue X s Plotted on the graph are the calculated re sistance or resistivity values Readings to store The values that are initially discarded Readings to discard are not plotted Units for the Y axis of the graph is Ohm cm for volume resistivity Ohm square for surface resistivity or Ohm for resistance Figure 2 10 shows the Resistivity vs Reading Number graph for the last eight ICALC values plotted on the Resistivity Test Current Trace graph Figure 2 9 Peak to Peak This indicator at the bottom of the R vs Reading Number graph gives the per cent deviation of the readings At any time it displays the peak to peak difference divided by the average value in percent NOTE If you use a current range that is too high current may not be measur able zero The infinity message panel will be displayed to indicate this condition and the R value s will be plotted as zero An example of the Infinity message panel is shown in Figure 2 11 Compatibility checks Before the test is started compatibi
26. anel appears See GPIB Timeout Error in Section 1 for details on clearing this error Figure 2 1 Hi R test panel US Hi R Test 6517 Test 2 3 Measurement configuration controls The measurement configuration controls along with the factory defaults and setting ranges are listed in Table 2 1 The factory default settings are also shown in Figure 2 1 Table 2 1 Measurement configuration controls Measurement Factory default configuration control setting Setting range Measure Time 15 sec 0 5 to 10000 sec Offset Voltage OV 1000 to 1000V Alternating Voltage 50V 1000 to 1000V Readings to Store 8 1 to 2000 Readings to Discard 3 0 to 1000 Current Range 20pA 20mA 2mA 200 20uA 2 200nA 20nA 2nA 200pA or 20 pA Auto Range Off Off or On Measurement Type Volume Resistance Surface or Volume Graphs show on run Checked enabled Checked enabled or unchecked disabled Measure time Measure Time sets the time the voltage is held at each polarity This sets the effective frequency of the stimulus voltage Offset voltage and alternating voltage NOTE The sum of the Offset Voltage and Alternating Voltage magnitudes cannot exceed 1000V That is Alternating Voltage Offset Volt age 1000 Entering a value that would cause the sum of the mag nitudes to exceed 1000V results in a message indicating that condition The maximum allowable value will in
27. anual range selection select AutoRange Off see Auto Range control 4 10 6517A Sweep Test Auto Range When the optimal current range is not known you can use Auto Range Note however that the two lowest current ranges 200pA and 20 are not available when using AutoRange On There are three Auto Range options AutoRange Off AutoRange On and AutoUprange Only The pulldown menu for these options is shown in Figure 4 11 With AutoRange On the electrometer will automatically go to the most sensitive range to mea sure current Selecting AutoRange Off enables manual range selection see Current Range con trol With AutoUprange Only selected the electrometer can uprange but not downrange This is use ful for doing sweeps over many decades of voltage or for a sample whose resistance decreases greatly with increasing voltage In either case the sweep can be started at the most sensitive range and the electrometer will uprange as necessary for the higher currents Note that the first measurement in the sweep will be attempted on the present manual Current Range Therefore before starting the test select the most sensitive manual Current Range for the first measurement For example if the first measurement is going to be less than 20 select the 20pA range Figure 4 11 Auto Range Auto Range AutoRange off utoRange AutoH ange off AutoUprange onl Measurement Type This pulldown menu is used to select
28. arted 1 9 Abort NOTE experiment with the various controls to change the inspection copy Close the present inspection copy and start over with a new copy by clicking Inspect again Plot Parameters panel The panel to change the plot parameters is displayed by double clicking the trace From this panel you can change the plot type such as line markers or bars change the line and marker attributes such as color shape style and size or display the graph data in tabular form Vertical and Horizontal Axis panels The panel to change axis parameters is displayed by double clicking the appropriate axis vertical or horizontal From this panel you can change scaling tick marks step position and number of minor ticks line attributes color style and width and grid style color style and width The value in the box labeled Intercept indicates where that axes intercept For example a value of 1 in the vertical intercept box indicates that the vertical axis intercepts the horizontal axis at value 1 Axis Labels panel The panel to change the axis labels is displayed by double clicking the appropriate group of axis labels vertical axis labels or horizontal axis labels From this panel you can change the position of the labels last label options on off or text label format decimal scientific or engineering units and resolution and text parameters such as font color and size Text Paramet
29. at is 196 of the decay constant or 0 2 seconds If the measurement time had a random up to 1 second delay this would create 5 noise in the resulting resistance measurement 2 14 6517 Test On some slower computers timing problems can occur The Windows environment responds to calls for action by many programs that may be running and the timing inside this program cannot be completely controlled internally It is advisable to shut down other programs that may inter mittently take CPU time such as word processing programs that occasionally perform an AutoSave In addition for slower computers 386 and older the action of posting readings to the various graphs within this program may cause significant delays and errors If any of these events occur a warning message will appear see Figure 2 13 indicating that the measurement time is being affected It will suggest closing the data graphs until the measurement is complete Uncheck the Graphs show on run checkbox to avoid showing the graphs during future runs This will reduce the time to process data Figure 2 13 Measurement timing warning Es ial xi Graphical updates may be taking too much CPL time or interference from another program or the user may have delayed a critically timed measurement Un checking the Graphs show on run checkbox may help See operating manual for more details 3 6517 Step Response 3 2 6517 Step Response I
30. ation eie ERR RI eo dre ebd REEF EE yere Hp ee pego 1 3 Connection Ssss tne D RO RR ERE IP CER Dire E Re EHE Fe eee aree ORE P Eee un 1 4 Connections for resistivity measurements using Model 8009 1 5 Temperature and humidity sensor 5 1 5 single 6517 Hi R application message rt C A ieee ieee nh ce HEEL TENE CER RR E 1 6 GPIB board error message ee ee mee te eee c v rer D rea 1 6 GPIB timeout panel 1 an e 1 7 6517 Hi R Test lE rM 2 2 Cutrent range e hi e Hee te e 2 4 Auto range control Menson ted He e cem a Ee ae a tee 2 5 Measurement type menu eter esce emt at E ER ere ette e Po e n mee gerettet 2 5 Graphs show On fun icto e e pm p e deeb asides Pr e P agr e ee PUR ERE ua 2 6 paneloinnin RI e REM REDE RE RE ERU ERE TRE EUR RETE FREE ERES 2 6 GPIB address 252 epe p p e ger re e ire 2 8 Geeom tries panel otto std e a es e RES IM eat ee 2 8 Test cutrent eraph 3 iet hte ER RR EE ERR ERN ERWIN ENTRE REESE 2 11 KR ys Reading Numbers oi RR EHE SER UR 2 12 infinity ici dete er e ente UAR DEHRER REESE ER 2 12 Measurement io eI netu 2 13 Measurement timine
31. ax 440 248 6168 1 888 KEITHLEY www keithley com 12 06
32. cur if the electrometer is not turned on the GPIB cable is not con nected or the electrometer and the program are not set to the same address In this event you can choose one of the following options from the GPIB Timeout panel Figure 1 7 GPIB timeout panel 1 8 Getting Started GPIB timeout panel IGNORE ALL Clicking this button cancels communication between the program and the electrometer You will be able to view and set the various controls of the program but the RUN button will be disabled After correcting the problem that caused the timeout error you have two options that will re enable the RUN button Re load the program e From the Save Load panel click the Reset Settings to Factory Default button Note that if you run the program without correcting the problem that caused the timeout error test data will be invalid IGNORE Click this button to skip the command that caused the timeout error Note however that another timeout error may occur CHECK INSTR ADDRESS Clicking this button displays a panel that allows you to check and change the GPIB address for the program The displayed address must match the GPIB address setting of the electrometer If they do not match correct the address and click OK On the GPIB Timeout panel click Retry RETRY After resolving the problem that caused the timeout error i e electrometer turned off incorrect address or missing bus cable click RETRY to c
33. d operations for the 6517 Hi R Test See Save Load in Section 2 for details and examples of the various panels that are used in these operations Note that the default file extensions for save load files for this program is sv3 set tings file and dt3 data file Geometries Running the test Run When performing a resistivity measurement surface or volume click this button to bring up the Geometries panel It is used to set geometrical properties that pertain to the sample and test fixture electrodes For details on setting the geometrical properties see Geometries under General setup controls in Section 2 Click the Run button to start the test The sweep starts after some preliminary checks are successfully performed see Compatibility checks The graph that is generated depends on which enabled measurement parameter uses a series of values Remember that only one series of values can be used for a sweep The Y axis of the graph is always used for R resistance or resis tivity or I current readings and the X axis is used for Measure Time Offset Voltage Alternating Voltage or Alternate Between Zero and V values Figure 4 13 shows an example log sweep 1 to 100V in 16 steps for Resistance vs Alternating Voltage This sample graph can be displayed by loading sample3 dt3 using the Load Data option from the Save Load panel Resistance readings are plotted at the 1 1 33 1 78 2 37 3 16 4 22 5 62 7 5 10 13 34 1
34. ding sweep values and the number of Steps The sweep list is automatically calculated and displayed on the panel For example 1 to 1000 in 3 steps generates this list 1 10 100 1000 Note that 3 steps generate four values in the series The number of values in a log sweep is always the number of steps plus one Custom Sweep This is user entered series of values consisting of numbers separated by commas This allows you to configure logarithmic sweeps that include negative values i e 100 10 1 1 10 100 or commonly used lists such as 1 2 5 10 20 50 etc Other than commas do not enter non numeric characters Spaces are ignored 6517 Sweep Test 4 7 NOTES To view a long list click the list field and use the left right home and end keys You can also drag the mouse left and right in the field to scroll through the list Long lists are abbre viated by using to separate the first 50 points of the list from the last three points Portions of linear and log lists can be copied and pasted into the custom list field Use the mouse to highlight the desired value s and use the pulldown menu of the panel to Copy and Paste Selecting measurement parameter options Parameter options are selected from the main Sweep Test panel Figure 4 1 shows that the Offset Voltage Alternating Voltage option is selected with Alternating Voltage set to a series of voltage values Measure Time and Offset Voltage a
35. e 2 7 The GPIB address can be set from 0 to 30 If this address does not agree with the Talk Listen address of the electrometer a GPIB timeout error will occur and you will not be able to run this program With the appropriate address displayed on the GPIB Address panel click OK to enter it The factory default address for this program and the electrometer is 27 Refer to the electrometer user s man ual if you need to check and or change the GPIB address of the instrument Figure 2 7 GPIB address panel Test GPIB Addr loj x GPIB Address Geometries When performing a resistivity measurement surface or volume click this button to bring up the Geometries panel see Figure 2 8 It is used to set geometrical properties that pertain to the sample and test fixture electrodes After setting the geometrical properties click OK to enter them Clicking Cancel re instates the previous settings Figure 2 8 Geometries panel Test Geometries B x Geometries Vol Electrode Area cm 2 25 Thickness mm KSurface 8009 fixture 6517 Test 2 9 8009 fixture Click this checkbox X displayed in box if using the Model 8009 test fixture When checked the inputs for Vol Electrode Area cm and KSurface are disabled The program will default to the appropriate values for the Model 8009 electrode geometries Refer to the following para graphs Checking the checkbox also enables cross chec
36. e any current decay curves in the graph NOTE Some of the panel controls will be disabled during the test to prevent inadvertent parameter changes 6517 Hi R Step Response 3 9 Abort The current measurement process can be stopped at any time by clicking Abort The readings that were collected up to that point will be sent to the computer and plotted normally 3 10 6517 Step Response 4 6517A Sweep Test 4 2 6517A Sweep Test Introduction This program uses the Alternating Polarity test method to sweep a series of alternating voltage values using a fixed Measure Time or a series of Measure Time values using a fixed alternat ing voltage This allows you to compare current resistance or resistivity readings made at var ious alternating voltage or measure time values In general four Alternating Polarity current measurements are performed for each point in the sweep series The weighted average of the four measurements is then used to produce a reading 1 or R for the graph Therefore the number of values in the series determines how many read ings will be plotted on the graph Refer to the Model 6517A User s Manual for detailed infor mation on the Alternating Polarity test method Depending on which parameter is set to a series for the sweep one of the following graphs will be generated when the test is run Ior R vs Measurement Time vs Offset Voltage Ior R vs Alternating
37. e to follow instructions THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE THE REMEDIES PROVIDED HEREIN ARE BUYER S SOLE AND EXCLUSIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES SUCH EXCLUDED DAMAGES SHALL INCLUDE BUT ARE NOT LIMITED TO COST OF REMOVAL AND INSTALLATION LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON OR DAMAGE TO PROPERTY KEITHLEY A GREATER MEASURE OF CONFIDENCE Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 1 888 534 8453 www keithley com 3 07 Model 6524 High Resistance Measurement Software User s Manual 2007 Keithley Instruments Inc All rights reserved Cleveland Ohio U S A Document Number 6524 900 01 Rev C March 2007 Manual Print History The print history shown below lists the printing dates of all Revisions and Addenda created for this manual The Revision Level letter increases alphabetically as the manual undergoes subsequent updates Addenda which are released between Revisions contain important c
38. ear After properly connecting the safety interlock cable click OK on the message panel WARNING To prevent electric shock always use the safety interlock e the switch setting surface or volume resistivity on the Model 8009 agrees with the program s Measurement Type setting the sweep is allowed to run Abort The Abort button is used to stop the test The data acquired up to this point is retained until another test is run or data is loaded 4 14 6517A Sweep Test 5 6517 5 2 6517 Introduction This program uses the Alternating Polarity test method to perform resistivity resistance R mea surements These R measurements are performed simultaneously with temperature T and rel ative humidity RH measurements Figure 1 5 in Section 1 shows how to connect the sensors to the Model 6517A Note that temperature and or humidity measurements must be enabled from the Model 6517A see menu general A D controls data stamp in the Model 6517A User s Manual In general each reading is the weighted average of the last four measurements A measurement is performed each voltage alternation level Refer to Alternating Polarity Test method in Section 1 for detailed information on the Alternating Polarity Test Method This program generates three graphs R vs Time T vs Time and RH vs Time that are dis played on the main panel to p
39. ernates between zero and the specified value s One of the two enabled parameters Measure Time or Zero to must be made up of a series of values while the other is set to a fixed point The measurement parameters are explained as follows Measure Time This selector sets the time that voltage is held at each alternation before a current measurement is performed With a series of time values selected a complete Alternating Polarity test is performed for each time value in the series With a series of voltage values selected measure time remains fixed Offset Voltage and Alternating Voltage Offset Voltage is the center level that voltage alter nates around Alternating V sets the magnitude of the voltage that is alternately added to and then subtracted from the Offset Voltage For example to alternate between 95V and 105V Offset Voltage would be set to 100V and Alternating V would be set to 5V 4 4 6517A Sweep Test NOTE The sum of the magnitudes for Offset Voltage and Alternating V must not exceed 1000V At the beginning of any run every sweep point is checked to make sure Offset Voltage Alternating lt 1000V If any sweep point fails this check the test will abort and the Over Voltage Warn ing panel will appear The test cannot be run until you reconfigure Off set Voltage and or Alternating V to eliminate the over voltage condition Alternate Between Zero and V Zero to This selector is used to al
40. ers panel The panel to change the text parameters for an axis is displayed by double clicking the appropriate axis name For example if you want to make changes to an axis named Resistance Ohms double click Resistance Ohms From this panel you can change the name of the axis and other parameters such as font color and size Graph Parameters panel The panel to change graph parameters is displayed by double clicking on an open area of the graph From this panel you can change the position and back ground color of the graph and plotting area and you can add a border B W or color around the graph While a test is in progress you can watch the results being plotted on a graph Every test program has an Abort button to terminate the test Data already gathered will not be erased until you again run the test load a data file or exit the program Peak to Peak Pk Pk Most graphs have a Peak to Peak or Pk Pk display box to indicate the percent deviation for the data in the graph At any time it displays the peak to peak difference divided by the average value in percent Peak to Peak is calculated as follows Peak to Peak max min average x 100 where max is the maximum data point value in the graph min is the minimum data point value in the graph average is the average of all data points in the graph NOTE For the Sweep Test any resistance or resistivity data point plotted as zero are not used in the Pe
41. examined If the sam ple curve is not displayed load sample2 dt2 from the Load Data option of the Save Load panel Decay characteristics are best examined with the current Y axis set to the logarithmic scale see Figure 3 3 Select the logarithmic scale by checking the Y Log checkbox Note that the current decay is not a straight line indicating that it is not a simple exponential decay Instead this curved line is made up of numerous straight lines that have different slopes and different time constants Analyze the beginning portion of the decay Select cursor points that section off a linear portion of the trace at the beginning of the decay and click Best Fit Figure 3 4 shows Best Fit at cursor points of 51and 109 The time constant of this section of the decay is calculated as 2 1936 seconds 3 7 6517 Hi R Step Response Figure 3 3 log scale Current graph i LL i il 1 il a i il I 4 Zs mE lt RHH EH mam Best Fit Cursor points 51 and 109 Figure 3 4
42. hange information that the user should incorporate immediately into the manual Addenda are numbered sequentially When a new Revision is created all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of this print history page Revision A Document Number 6524 900 01 May 1997 Addendum A Document Number 6524 900 02 August 1997 Revision B Document Number 6524 900 01 2 enne nnne rnnt nnn May 1999 Revision C Document Number 6524 900 01 sese eene nennen tnnt March 2007 Keithley product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand and product names are trademarks or registered trademarks of their respective holders KEITHLEY Safety Precautions The following safety precautions should be observed before using this product and any associated instrumentation Although some instruments and accessories would normally be used with non hazardous voltages there are situations where hazardous conditions may be present This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read and follow all installation operation and maintenance information carefully before using the product Refer t
43. imum signal levels of the instruments and accessories as defined in the specifications and operating information and as shown on the instrument or test fixture panels or switching card When fuses are used in a product replace with the same type and rating for continued protection against fire hazard Chassis connections must only be used as shield connections for measuring circuits NOT as safety earth ground connections If you are using a test fixture keep the lid closed while power is applied to the device under test Safe operation requires the use of a lid interlock Ifa Screw is present connect it to safety earth ground using the wire recommended in the user documentation The JN symbol on an instrument indicates that the user should refer to the operating instructions located in the user documentaion The symbol an instrument shows that it can source or measure 1000V or more including the combined effect of normal and common mode voltages Use standard safety precautions to avoid personal contact with these voltages The N symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The symbol indicates connection terminal to the equipment frame The WARNING heading in the user documentation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in
44. ited sources NEVER connect switching cards directly to AC mains When connecting sources to switching cards install protective devices to limit fault current and voltage to the card Before operating an instrument ensure that the line cord is connected to a properly grounded power receptacle Inspect the connecting cables test leads and jumpers for possible wear cracks or breaks before each use 12 06 When installing equipment where access to the main power cord is restricted such as rack mounting a separate main input power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator For maximum safety do not touch the product test cables or any other instruments while power is applied to the circuit under test ALWAYS remove power from the entire test system and discharge any capacitors before connecting or disconnecting cables or jumpers installing or removing switching cards or making internal changes such as installing or removing jumpers Do not touch any object that could provide a current path to the common side of the circuit under test or power line earth ground Always make measurements with dry hands while standing on a dry insulated surface capable of withstanding the voltage being measured The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the equipment may be impaired Do not exceed the max
45. ity vs Time This program is documented in Section 5 If you are familiar with the Alternating Polarity method and want to investigate how tempera ture and humidity affect the resistance resistivity of your sample see 6517 Hi R Temp and RH NOTE The6517HI R Test and 6517 Hi R Step Response programs be run using either the Model 6517 or 6517A electrometer The 6517A Hi R Sweep Test and 6517A Hi R Temp and RH programs can only be run using the Model 6517A electrometer Software installation Perform one of the following procedures to install the Model 6524 software in your computer Windows XP or 2000 1 Insert the CD installation disk into a CD ROM drive 2 Click the Start button and then click Run 3 Type x setup where x is the drive letter and press Enter Getting Started 1 3 Connections GPIB IEEE 488 bus connections The electrometer is connected to the computer using an IEEE 488 cable i e Keithley Models 7007 1 or 7007 2 The cable is terminated on both ends with the connector shown in Figure 1 1 One end of the cable connects to the IEEE 488 interface of the computer and the other end con nects to the IEEE 488 connector on the rear panel of the electrometer see Figure 1 2 Figure 1 1 IEEE 488 connector Figure 1 2 IEEE 488 connector location 2 UNE RATING LINE FUSE SLOWBLOW SOVA MAX 1 2 90 125V AC ONLY 1 488 4 CHANGE IEEE ADDRI WITH FRONT PANEL DIGITAL vo
46. king to verify that the program and the Model 8009 are set for the same type of resistivity measurement Vol Electrode Area cm 2 When not using the Model 8009 test fixture 08009 fixture not checked this setting is used to define the effective area of the test electrode for volume resistivity measurements The value can be set from 0 to 10000 The factory default is 22 5 When using the Model 8009 08009 fixture checked this setting is disabled and defaults to an effective area of around 22 5 It is a function of the thickness of the sample and varies from 22 5cm for a 10mm thickness to 20 2cm for a thickness approaching 0 as explained in ASTM D257 1 1 1 Thickness mm This setting is used to specify the thickness of the sample for volume resistivity measurements It does not affect the calculation for surface resistivity measurements The value can be set in millimeters from 0 00001 1 5 to 1000 The factory default is 1 When using the Model 8009 08009 fixture checked a warning message is displayed if you enter a sample thickness that is too small 0 001mm or too large gt 3 175mm for the test fix ture Note that the warning will not change the value that you entered KSurface When not using the Model 8009 test fixture 08009 fixture not checked this setting is used to define the ratio of current path width to current path length across the surface of a sample for sur face resistivity measurements The
47. lear the error Graphs Each test program generates and displays one or more graphs Printing and copying Every graph panel has a pulldown menu that is displayed by clicking the top left corner of the panel From this menu you can print the graph Print Object Data or the entire panel Print Panel You can also use the Copy option of the menu to copy the graph image to a word proces sor document or the XY data coordinates of the graph to a spreadsheet or word processor To copy you must first select the graph by clicking the graph title just inside the upper left corner of the graph A selected graph for copy is denoted by a dotted line that boxes the title You can also use the Tab key to select a graph Inspect Each graph has an Inspect button Clicking this button displays an inspection copy of the graph From the pulldown menus you can print copy and zoom for linear graphs The copy feature lets you copy the X and Y data points to a spreadsheet or word processor CAUTION you minimize the inspection copy of a graph the Inspect button on the original graph becomes inoperative The only way to dis play the inspection copy is to bring it back up from the Windows 95 taskbar or double click its icon for Windows 3 1 The presentation of the inspection copy can be changed by double clicking various points on the graph The following summarizes the panels that can be used to change the inspection copy of the graph Getting St
48. lity checks are performed If the Model 8009 test fixture is being used and selected in the Geometries panel the safety interlock cable and resistivity switch settings are checked If the safety interlock cable is not connected between the electrometer and the test fixture a warning message will appear After properly con necting the safety interlock cable click OK on the message panel WARNING prevent electric shock always use the safety interlock If the switch setting surface or volume resistivity on the Model 8009 agrees with the program s Measurement Type setting the test is allowed to run Figure 2 9 Test current graph 9 x Resistivity Test Current Trace Inspect 20x10 2 x 5 6 5x10 7 3 8 2 0 10 4 0x10 0 30 45 60 75 90 105 120 135 150 165 180 195 210 2 12 6517 Hi R Test Figure 2 10 R vs Reading Number HI R Graph n Figure 2 11 Hi R test infinity panel Biel Es 6517 Test 2 13 Abort An Abort button is located on the main panel and on each graph panel Clicking this button aborts the test Data already gathered will not be erased and the last resistance or resistivity read ing will remain in the measurement box located near the bottom of the main panel Idle Operate indicator On the main panel the Idle Operate indicator box is located above
49. ly go to the most sensitive range to measure current Turning Auto Range off enables manual range selection see Current Range control With Auto Range on automatic downranging while current is decaying could cause glitches in the current trace graph In this event disable Auto Range and select an appropriate current range 3 4 6517 Step Response NPLCs The NPLCs Number of Power Line Cycles setting is used to control the analog to digital con verter aperture With a PLC setting the actual sampling of the current will occur in 1 60th sec ond and the reading rate will be slightly higher than 15 readings per second A 10 PLC setting is generally used to obtain a quieter current measurement though it is not as well suited for capturing fast decays or dynamic signals This setting will result in a reading rate of 1 to 2 readings per second This setting is also useful for reducing the data required if the mea surement times of interest are long Main panel The main panel see Figure 3 2 shows the current trace graph and provides the various controls to use the program When this program is loaded the main panel will display a sample graph Figure 3 2 Main panel KEITHLEY 6517 Hi R Step Response 3 5 GPIB Addr This butt
50. m ing errors When a timing error occurs the Warning Message panel appears see Figure 2 13 See Measurement Timing for more information Hidden graphs can be viewed after the test is completed by clicking the View Graphs button Test completion is declared by the Test Status panel and Idle indicator General setup controls Save Load This button brings up the Save Load panel see Figure 2 6 This panel will automatically close after executing one of the following operations Figure 2 6 Save Load panel SL Save Current Settings as Power Up Reset Settings to Factory Defaults Load Settings Save Settings Load Data Save Data 6517 Test 2 7 Save Current Settings as Power Up This button saves all user input values including sample geometry and all instrument settings The next time the program is loaded it will default to these settings Reset Settings to Factory Defaults This button restores all settings to the defaults set at the factory Save Settings This button saves the present test instrument and geometry settings to a user defined file After clicking this button the Save As window is displayed Select or enter a filename for the present setup The sv1 default file extension is used to avoid confusion with files of other types Click OK to save the setup Click Cancel to abort the save operation Load Settings This button recalls the settings saved in files After clicking thi
51. measurement the settling of the amplifier from range changing may vary from one alternation to the next This results in erratic background currents that cannot be fully canceled Turning Auto Range off enables manual range selection see Current Range control When Auto Range is turned off this program selects the manual current range that the electrometer is presently on Figure 2 3 Auto range control menu Auto Range Dff Measurement type This pulldown menu is used to select the type of measurement to perform see Figure 2 4 If Measurement Type is set to either resistivity setting Surface or Volume the calculations for Surface or Volume resisitivity will use settings from the Geometries panel If Resistance is selected Geometries settings are not used Figure 2 4 Measurement type menu Measurement Type Volume hm cm M Resistance Ohm 2 6 6517 Test Graphs show on run This checkbox see Figure 2 5 is used to display or hide the graphs at the start of the test With an X in the checkbox the graphs will be displayed as soon as the test is started This allows you to watch data being plotted With the checkbox unchecked the graphs will not be displayed when test is started Clicking the checkbox inserts or removes the checkmark X Figure 2 5 Graphs show on run x Graphs show run For slow computers keeping the graphs hidden while the test is in progress helps eliminate ti
52. ngs to store value is being set to the maximum storage capability of the Model 6517 That value will be displayed in the Readings to store box 5 4 6517 Readings to discard T or RH This value specifies how many initial R readings to discard before plotting subsequent readings It is typical to discard a few readings i e 3 to achieve steady state response Longer settling times can be used to allow for temperature stabilization Settling Time is calculated as follows Settling Time Readings to Discard x Measure Time For example if it takes a test fixture 30 minutes to reach temperature equilibrium the test could discard the first 30 minutes of data Rearranging the calculation as follows determines the num ber of readings to discard for the desired temperature settling time For this example assume that the Measure Time for each reading is 15 seconds and a settling time of 30 minutes is required Readings to Discard Settling Time Measure Time 30 minutes 15 seconds 1800 seconds 15 seconds 120 Due to the nature of the electrostatic shield the Model 8009 as well as many other sample fix tures exhibit a considerable time lag between external temperature and sample temperature After closing the fixture lid it is advisable to discard at least 30 minutes of data or wait 30 min utes before starting the test to ensure that resistivity readings correlate accurately to
53. ntroduction This program allows the analysis of a sample s current in response to a voltage step This is use ful for determining an appropriate measure time for the Alternating Polarity resistance measure ment This program provides a means to analyze a current decay and display the current transient in several useful forms Log and linear scaling is provided for both the current and time axes 6517 settings panel When this program is loaded the settings panel see Figure 3 1 is displayed The settings panel is used to set the basic measurement parameters When finished click OK to view the main panel behind it Note that this panel can be recalled from the main panel NOTE If the program cannot establish communication with the electrome ter a timeout error occurs GPIB Timeout panel appears See GPIB Timeout Error in Section 1 for details on clearing this error Figure 3 1 Settings panel 6517 Hi R Step Response Settings Ioj x 504 6517 Settings 15 Step Voltage V Current Range 2 n Range 6517 Hi R Step Response 3 3 Table 3 1 Settings panel controls Measurement Factory default configuration control setting Setting range Measure Time 15 sec to 1000 sec Step Voltage 50V 0 to 1000V Current Range 2nA 20mA 2 200 20 2uA 200nA 20nA 2nA 200 or 20 pA Auto Range Off Off or On NPLCs 1 11010
54. o the user documentation for complete product specifications If the product is used in a manner not specified the protection provided by the product warranty may be impaired The types of product users are Responsible body is the individual or group responsible for the use and maintenance of equipment for ensuring that the equipment is operated within its specifications and operating limits and for ensuring that operators are adequately trained Operators use the product for its intended function They must be trained in electrical safety procedures and proper use of the instrument They must be protected from electric shock and contact with hazardous live circuits Maintenance personnel perform routine procedures on the product to keep it operating properly for example setting the line voltage or replacing consumable materials Maintenance procedures are described in the user documentation The procedures explicitly state if the operator may perform them Otherwise they should be performed only by service personnel Service personnel are trained to work on live circuits perform safe installations and repair products Only properly trained service personnel may perform installation and service procedures Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category and Measurement Category as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most mea
55. oints in the section Thus if the two cursors are set to the same point an error message will appear and no curve fit will be applied The initial points of both cursors are 0 There is no factory default value and they are not saved or restored by save load operations Best Fit is used to examine a section of the current decay It performs a regression on the graphed current data between the Cursors When Best Fit is clicked a curve fitis plotted along with the current data as a heavy blue trace The curve fit is an exponential decay exp constant The time constant of the curve fit is displayed in the time constant box on the main panel The fit is performed as a linear regression on log current vs time data Any negative current points are omitted If the data points between the cursor including the endpoints do not contain at least two positive values an application error message will be displayed and Best Fit will not be cal culated When viewing the curve fit which is a simple exponential decay with current Y axis on the log arithmic scale and time X axis on the linear scale it appears as a straight line If the decay portion of the current trace does not appear as a straight line then it is not a simple exponential decay The regions of the current decay that have different slopes will have different decay characteristics Example analysis The sample curve is used to show how the decay of a current trace can be
56. olarities of the alternating portion of the voltages gen erating the respective currents This calculation of the stimulated current is unaffected by back ground current level slope or curvature effectively isolating the stimulated current from the background current The result is a repeatable value for the stimulated current and resistance or resistivity that are calculated from it The time dependence of the stimulated current is a material property That is different results will be obtained when using different Measure Times due to material characteristics One of the intended purposes of the 6524 is to explore this property as the Measure Time is varied 2 6517 Test 2 2 6517 Hi R Test 6517 Hi R test This program provides a way to evaluate your Alternating Polarity method measurement The actual current measurements can be seen and the resulting resistance resistivity data plotted By examining these two graphs a reasonable measurement time can be found that gives the most meaningful R resistance or resistivity measurement in the least amount of time The number of Alternating Polarity cycles required to reach steady state response can also be found After this test is loaded the HI R Test panel see Figure 2 1 is displayed The various controls to set up and run this test are explained as follows NOTE If the program cannot establish communication with the electrome ter a timeout error occurs GPIB Timeout p
57. on brings up a panel to set the GPIB address The GPIB address panel is shown in Figure 2 7 The GPIB address can be set from 0 to 30 If this address does not agree with the Talk Listen address of the electrometer a GPIB timeout error will occur and you will not be able to run this program The factory default address for this program and the electrometer is 27 Refer to the electrometer user s manual if you need to check and or change the GPIB address of the instrument Save Load Clicking this button brings up the Save Load panel From this panel you can perform the follow ing operations Save Current Settings as Power Up defaults Reset Settings to Factory Defaults Load Settings from a file e Save Settings to a file Load Data from a file Save Data to a file e Cancel These operations are the same as the Save Load operations for the 6517 Hi R Test See Save Load in Section 2 for details and examples of the various panels that are used in these operations Note that the default file extensions for save load files for this program are sv2 and dt2 NOTES The sample graph that is initially displayed when this program is start ed can be displayed at any time by loading sample2 dt2 from the Load Data option of the Save Load panel Cursor positions points are not saved by any of the Save operations If pre existing cursor values are outside the allowable range for newly loaded graph data the values will be adjusted
58. on each volt age alternation is relevant Figure 2 9 shows an example Resistivity Test Current Trace graph using factory default settings This graph can be displayed by loading samplel dtl from the Save Load panel and clicking View Graphs At the end of each voltage alternation the last current measurement IMEAS is plotted as a small black box After four of these IMEAS values are collected two positive two negative a calculated current value ICALC is plotted This ICALC value plotted as a blue X is the weighted average of the last four IMEAS values black squares Each subsequent ICALC value X is the weighted average of the last four IMEAS values For the graph shown in Figure 2 9 11 calculated current values ICALC are plotted as blue X s The first three X s are Readings to Discard The discarded readings allow the material or resis tance to reach steady state response The next eight ICALC values are converted to resistivity readings for the Resistivity vs Reading Number graph NOTE Ifthe electrometer goes into overflow response current higher than the selected current range after the voltage is applied the current trace will be plotted at the maximum measurable current for that range When the current decreases to within the measurement range the trace will plot normally If an IMEAS value is out of range invalid it will appear as a larger red square Therefore any ICALC value that is derived from that IME AS v
59. re set to fixed points Keep in mind that only one enabled measurement parameter can be set to a series of values Perform the following steps to select the measurement parameter options 1 Select the desired alternating voltage option If the Alternate Between Zero and checkbox is not checked the Offset Voltage Alternating Voltage option is selected If the checkbox is checked the Alternating Between Zero and V option is selected Click the checkbox to toggle between the two alternating voltage options Offset Voltage Alternating V option With this option selected the Measure Time and Zero to parameter buttons are enabled Alternating Between Zero and V option With this option selected the Measure Time and Zero To parameter buttons are enabled Display the pulldown option menu for the parameter that contains the series of values that is going to be used for the sweep The pulldown menu is displayed by clicking the down arrow of the appropriate measurement parameter Figures 4 6 through 4 9 shows the pulldown menus for all the measurement parameters values shown the factory defaults From the option menu click the desired series of values The other enabled measurement parameter s will automatically select their respective point setting s NOTES e To view a long list see the previous note Any action that results in the selection of two series of values for a sweep causes a settings conflict error
60. re time o ae I n He te E aue e ti PR E 2 3 Offset voltage and alternating 2 3 Alternating voltape i oni RC eb ee e ce etta teste 2 3 Readiness to 5 E 2 4 Readings to discard dee e et REIR UE CERE PANE Ee HN EE EN ERR 2 4 e 2 4 AAuto fange heist ANE ie UR OR e REIS 2 5 Measurement LY Pe er ee ree TO n ERE egi REPE EPI VS 2 5 Graphs show on Eun a ea A RA PRI 2 6 General setup Controls 2 6 save Lodd RR ono eese tee eb estende Ne Re 2 6 GPIB addiess 3 one e etr t uter ep teile ceste dme iie pee 2 8 Geometrl s 5 oot dedit ac m iet d a er Ete eed eerte ets 2 8 Running the oet E inest 2 10 RUD isse dee datei 2 10 VaN OTO m L M 2 13 Idle Operator indicator 2 13 Measurement DOK e 2 13 Graphis tente e E 2 13 Measurement did e tup eee aa 2 13 6517 Hi R Step Response Introduction E RD de peti 3 2 6517 Setting panels det tele edo Bes ade ede rto te io tel e rd 3
61. rovide easy analysis If either of the external measurement devices thermocouple or 6517 humidity sensor are not connected invalid dada will be displayed on that graph After this test is loaded the main panel see Figure 5 1 is displayed The various controls to set up and run this test are explained as follows NOTE If the program cannot establish communication with the electrome ter a timeout error occurs GPIB Timeout panel appears See GPIB Timeout Error in Section 1 for details on clearing this error Figure 5 1 Hi R Temp and RH panel 0 x KEITHLEY 6517A Hi R Temperature and Humidity R vs time Inspect Measure Time Sec 5 Offset Voltage V p Alternating Voltage V Readings to store Readings to discard B Current Range 2n ANO nange T vs time Inspect Measurement 6517 5 3 Measurement configuration controls The measurement configuration controls for this program are listed in Table 5 1 Also included are factory default settings and setting ranges Table 5 1 Measurement configuration controls settings Measurement Factory default configuration control setting Setting range Measure Time 15 sec 0 5 to 9999 9 sec Offset Voltage OV 1000 to 1000V Alternating Voltage 50V 1000 to 1000V Readings to store 8 1 to 15706 minimum Readings to discard 3 0 to 9999 Current Range 2nA 2
62. s button the Open window is displayed Select the desired file and click OK to load the setup Clicking Cancel aborts the load operation NOTES e lf a file other than a settings file sv1 saved from this program is selected numerous errors will occur Default settings are stored defprogl svl Load Data This button is used to recall graph data previously stored in a file After loading the file the graphs can be displayed by clicking the View Graphs button on the main panel Clicking this button displays the Open window Select the desired file and click OK to load the graph data Clicking Cancel aborts the load operation NOTES e lf a file other than a data file dt1 saved from this program is selected nu merous errors will occur Sample graph data are stored samplel dt1 Save Data After the test is run the data for the two graphs can be stored in a file It does not store the set tings used to generate the data Clicking this button displays the Save As window Select or enter a file name for the present graph data The default file extension of dt1 is used to avoid confusion with files of other types Click OK to save the graph data Clicking Cancel aborts the save operation Cancel If you do not perform one of the above actions you can click this button to close the Save Load panel 2 8 6517 Test GPIB address This button is used to check and or change the GPIB address see Figur
63. s follows Figure 1 5 Single 6517 Hi R application message Hotice X Only one 6517 Hi R Application can be run at a time Figure 1 6 GPIB board error message Ho GPIB Board found X No GPIB board present Check configuration settings for 1 0 address in This program will ignore all future errors of this type but you will be unable to run certain portions of the program Editing TESTPT INI file If the GPIB board error message see Figure 1 7 appeared when you loaded a test program you must edit settings in the TESTPT INI file Perform the following steps Getting Started 1 7 1 Close the 6524 application program 2 Using Notepad or another text editor open C RESISTIV TESTPT INI 3 In the GPIB sections s of the TestPoint configuration settings file add or change the following lines for each board that is installed An line is needed which indicates the I O address of the card e iostep line is needed which indicates the I O address change between ports on the card e line is needed if the board uses a clock signal other than 8MHz Table1 1 provides the default settings for various GPIB board models GPIB timeout error When a program is loaded it attempts to communicate with the electrometer via the GPIB inter face If this communication is not established the GPIB Timeout panel appears see Figure 1 8 This timeout error will oc
64. stead be entered Offset Voltage is the center level that voltage alternates around For example to alternate between 95V and 105V Offset Voltage would be set to 100V and Alternating Voltage would be set to 5V Alternating voltage Alternating Voltage sets the magnitude of the voltage that is alternately added to and then sub tracted from the Offset Voltage For example to alternate between 100V and 100V the Offset Voltage see previous control would be set to OV and the Alternating Voltage would be set to 100V 2 4 6517 Test Readings to store Readings to store sets the actual number of resistance resistivity readings to plot on the R vs Reading Number graph It does not include any initial readings that are discarded Note that each resistance reading is the weighted average of the last four current endpoint readings Readings to discard The Readings to discard control specifies how many initial R readings to discard before plotting the subsequent readings on the R vs Reading Number graph This allows the sample to reach steady state response to the alternating voltage before accepting calculated output values To determine how many cycles are necessary run this test first with zero 0 discarded readings and observe the number of readings required for the R values to stabilize Two or three readings are typically sufficient Current range This pulldown menu see Figure 2 2 allows you to manually selec
65. surement control and data I O signals are Measurement Category and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Measurement Category connections require protection for high transient over voltages often associated with local AC mains connections Assume all measurement control and data I O connections are for connection to Category sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is present Lethal voltage may be present on cable connector jacks or test fixtures The American National Standards Institute ANSI states that a shock hazard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present any unknown circuit before measuring Operators of this product must be protected from electric shock at all times The responsible body must ensure that operators are prevented access and or insulated from every connection point In some cases connections must be exposed to potential human contact Product operators in these circumstances must be trained to protect themselves from the risk of electric shock If the circuit is capable of operating at or above 1000V no conductive part of the circuit may be exposed Do not connect switching cards directly to unlimited power circuits They are intended to be used with impedance lim
66. t the current range to be used for the R measurements Be sure to select the most sensitive measurement range that can accom modate the expected current The lowest two ranges 200pA and 20pA ranges should not be used with measurement times less than 15 seconds Since the response time of the electrometer on these ranges is 2 5 seconds current measurements taken at less than 15 seconds from the voltage change may have significant error due to meter settling The Current Range can be set from 20pA to 20mA Auto Range can be used if you do not know which current range to use for the test NOTE The Current Range control will be disabled if Auto Range is on To enable manual range selection turn Auto Range off see Auto Range control Figure 2 2 Current range menu Current Range 6517 Test 2 5 Auto range When the optimal current range is not known you can use this pulldown menu to turn Auto Range on see Figure 2 3 With Auto Range on the electrometer will automatically go to the most sensitive range to measure current With Auto Range on automatic range changes during the test could cause errors If the current readings are not taken on the same current range there may be substantial errors due to offset current in the meter This offset current is part of the background current Also because the electrometer may not always downrange at the same time after reversals and can even occur just before the critical current
67. temperature The R vs Time graph is always displayed on the main panel Below the R vs Time graph you can display either the T vs Time graph or the RH vs Time graph by clicking the T or RH button General setup controls GPIB address Save Load This button brings up the panel to set the GPIB address The GPIB address panel is shown in Figure 2 7 The GPIB address can be set from 0 to 30 If this address does not agree with the Talk Listen address of the electrometer a GPIB timeout error will occur and you will not be able to run this program The factory default address for this program and the electrometer is 27 Refer to the electrometer user s manual if you need to check and or change the GPIB address of the instrument Clicking this button brings up the Save Load panel From this panel you can perform the follow ing operations Save Current Settings as Power Up defaults Reset Settings to Factory Defaults Load Settings from a file e Save Settings to a file Load Data from a file e Save Data to a file 6517 5 5 These operations are the same as the Save Load operations for the 6517 Hi R Test See Save Load in Section 2 for details and examples of the various panels that are used in these operations Note that the default file extensions for save load files for this program are sv4 settings and dt4 data Geometries Running the test Run Abort When performing a
68. ternate between zero 0V and the configured stimulus voltage s Measurements occur at both the zero and V levels With a fixed voltage set a measurement occurs at the end of each listed Measure Time value By setting voltage to a series of values a measurement will occur at the end of the fixed Measure Time period for each Zero and V alternation Editing measurement parameters Each measurement parameter has four options fixed point linear sweep log sweep and custom sweep The panel to edit parameters is displayed by clicking the appropriate edit parameters button Measure Time Offset Voltage Alternating Voltage or Zero to Keep in mind that an edit parame ters button must be enabled in order to display its configuration panel Clicking the Alternating Between Zero and V checkbox X in box enables the Zero to button and disables the Offset Volt age and Alternating Voltage buttons NOTE The configuration panels and the factory default settings are shown in Figures 4 2 through 4 5 Table 4 1 provides the setting limits and factory defaults 6517 Sweep Test 4 5 Figure 4 2 Measure Time configuration panel Time Fixed Point 5 Time Linear Sweep P to step 2 3 4 5 6 7 8 9 10 Time Log Sweep 1 0 in 4__ steps 113 16 10 31 62 100 Time Custom Sweep 2 5 10 20 50 100 Figure 4 3 Offset Voltage configuration panel V ofs Fixed Point V ofs Linear Sweep 0 to step 0 100 200 300 400
69. the Run button When dis played as Idle red indicator a measurement is not in progress When displayed as Operate green indicator a measurement is in progress Measurement box The measurement box is located near the bottom of the main panel This reading reflects the lat est resistance or resistivity reading plotted on the R vs Reading Number graph Thus the initial reading appears in this box after the first Reading is plotted and updated for each subsequent reading After the test 15 finished the last reading value remains in the box until another test is run Figure 2 12 shows an example resistivity reading Figure 2 12 Measurement box Resistmity Ohm cm 4 5000E 12 View Graphs This button on the main panel is used to recall the graphs that have been closed or minimized The graphs are lost only if you run another test load a data file or exit from the program Measurement timing For high resistance resistivity measurements timing can be critical If the current measurement used in calculations is not taken precisely at the designated measurement time significant errors can occur For example if the current response to the voltage is a decaying current and the specified mea surement time is before the current has stabilized the current will still be decaying at that time If the time constant of the current decay at that time was 20 seconds a 146 error in that current reading would be caused by a timing delay th
70. the user documentation explains hazards that could damage the instrument Such damage may invalidate the warranty Instrumentation and accessories shall not be connected to humans Before performing any maintenance disconnect the line cord and all test cables To maintain protection from electric shock and fire replacement components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instruments Standard fuses with applicable national safety approvals may be used if the rating and type are the same Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product If you are unsure about the applicability of a replacement component call a Keithley Instruments office for information To clean an instrument use a damp cloth or mild water based cleaner Clean the exterior of the instrument only Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument Products that consist of a circuit board with no case or chassis e g a data acquisition board for installation into a computer should never require cleaning if handled according to instructions If the board becomes contaminated and operation is affected the board should be returned to the
71. thod for high resistance measurements see 6517 Hi R Test 6517 Hi R Step Response This program allows you to analyze a sample s current in response to a voltage step Tools are provided to analyze the decay characteristics of the cur rent trace Logarithmic and linear scaling are provided for the I vs Time graph This pro gram is documented in Section 3 If you need to see in more detail the transient current response of your sample to a voltage step see 6517 Hi R Step Response 6517 Hi R Sweep Test This program uses an alternating stimulus voltage with measure ments performed at specified sweep points The test can sweep a series of alternating voltage values or a series of measure time values The output plots Measurements vs a Sweep Parame ter Measurements can be resistance surface resistivity volume resistivity or current The Sweep Parameter can be a varying measure time alternating voltages various offset voltages or a voltage that alternates between zero and the specified values This program is documented in Section 4 If you are familiar with the Alternating Polarity method and want to study how voltage and time parameters affect the resistance resistivity of your sample see 6517A Hi R Sweep test 6517 Hi R Temp and RH This program allows resistivity resistance measurements to be made simultaneously with temperature and or humidity The three graphs plot R vs Time Temperature vs Time and Relative Humid
72. www keithley com Model 6524 High Resistance Measurement Software User s Manual 6524 900 01 Rev C March 2007 KEITHLEY A GREATER MEASURE CONFIDENCE WARRANTY Keithley Instruments Inc warrants this product to be free from defects in material and workmanship for a period of one 1 year from date of shipment Keithley Instruments Inc warrants the following items for 90 days from the date of shipment probes cables software rechargeable batteries diskettes and documentation During the warranty period Keithley Instruments will at its option either repair or replace any product that proves to be defective To exercise this warranty write or call your local Keithley Instruments representative or contact Keithley Instruments headquarters in Cleveland Ohio You will be given prompt assistance and return instructions Send the product transportation prepaid to the indicated service facility Repairs will be made and the product returned transportation prepaid Repaired or replaced products are warranted for the balance of the original warranty period or at least 90 days LIMITATION OF WARRANTY This warranty does not apply to defects resulting from product modification without Keithley Instruments express written consent or misuse of any product or part This warranty also does not apply to fuses software non rechargeable batteries damage from battery leakage or problems arising from normal wear or failur
73. ys use the safety interlock If the switch setting surface or volume resistivity on the Model 8009 agrees with the program s Measurement Type setting the test is allowed to run Clicking this button will stop the test sequence in progress Data acquired up to this point is retained 5 6 6517 Figure 5 2 vs time and temperature vs time R vs time Pk Pk 4215 Inspect 1 6x 105 1 5510 1 4510 1 3 10 1 2 10 1 1 10 1 0 10 9 0 104 T C vs time Inspect 26 24 22 20 0 10000 20000 30000 40000 50000 Seconds from 20 15 Figure 5 3 Relative humidity vs time vs time Inspect 18 16 14 12 0 10000 20000 30000 40000 50000 Seconds from 20 15 6517 5 7 If you use current range that is too high current not mea surable zero The Infinity message panel will be displayed to indi cate this condition and the R value s will be plotted as zero An example of the Infinity message panel is shown in Figure 5 4 Figure 5 4 Infinity message panel 5 8 6517 Index Numeric 6517 settings 3 5 6517 setting panels 3 2 6517 Hi R step response 3 1 6517 Hi R sweep test 4 1 6517A Hi R Temp and RH 5 1 6517 Hi R test 2 1 A Abort 1 9 2 13 3 8 4 13 5 5 Alternating polarity test method 1 10 Alternating voltage 2

Model 6524 High Resistance Measurement Software User`s Manual

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