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MP 36E User Manual F-206 MicroMotion Hexapod Positioning System

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1. Response if two X F 206_AXIS_XISP LF E Y F 206_AXIS_YSP LF for M 505 6PD Z F 206 AXIS ZISP LF U F 206_AXIS_UISP LF V F 206_AXIS_VISP LF W F 206_AXIS_WSP LF A M 505 6PDISP LF B M 505 6PDLF CST XA Response ifno X F 206_AXIS_X SP LF separate axes are _ configured A NOSTAGELF Response if axis X F 206 AXIS_X SP LF A is configured for _ M 505 6PD A M 505 6PDILF line feed F 206 MP 36E Release 3 5 0 Page 48 System Commands Piezo Nano Positioning PI ECO Echo String Description Example Remarks www pi ws A string will be echoed The string must not contain non printable characters INI ECO INI_FINISHED MOV X 10 ECO MOV FINISHED Facilitates the handling of the FIFO command stack especially in a test environment The string to echo must not contain the string STOP F 206 MP 36E Release 3 5 0 Page 49 System Commands Piezo Nano Positioning PI ERR Get Error Description www pi ws Get Error code Error codes almost always refer to the previously received command some innocuous commands like VER do not always set the code to 0 Note that the ERR command itself never fails and always sets the error code to 0
2. vt 1 Q lt EX XT N J0o gt uuo9 uoqq eyed UIN uid 89 i A www pi ws l G i iHe q H y Fig 76 F 206 Mechanics www pi ws Hexapod F 20 40 2001 ion 89L F 206 MP 36E Release 3 5 0 44x M376 228 60 01 3x20 7 40 41 O0t 0LXp z eog Page 126 Piezo Nano Positioning PI Dimensional Drawings Fig 77 F 206 controller dimensions et www pi ws F 206 MP 36E Release 3 5 0 Page 127
3. Description Get result of the FSN command The system reports the position of the highest analog input and its value Format FSN Arguments none Response X 0 1001 SP ILF SP space Y 1 0026P LF LH line feed _ LW shows the analog signal Z 0 01SP LF level at its maximum For an U 0 0ISP LF optical board the unit is volts 7 for an OPM the response will V 1 1 SP LF contain unit as set with the W 0 1 SPIILF TAV command LW 3 99LF The position is given in absolute coordinates not relative to the start position of the scan trajectory or the position when evoking FSN HELP Description Same as HLP HELP Description Lists available commands Format HLP Arguments none Response List of commands with short descriptions Troubleshooting WWwW pi ws RS 232 communication breakdown Command awaiting execution in queue F 206 MP 36E Release 3 5 0 Page 70 Piezo Nano Positioning PI System Commands INI Initialize Format INI A B Arguments none for F 206 A for separate axis A B for separate axis B Response none Troubleshooting DC power failure Command awaiting execution in queue In case INI is invoked without any arguments the F 206 goes to its reference point at a safe speed The initialization is carried out in a number of steps 7 All actuators start toward their reference positions midpoint reference switches at the same time and
4. www pi ws Tell analog value Reports the level of the analog signal at the specified device in floating point with 12 bit resolution With an OPM the value reported will include the units of measure which can be specified in a TAV command Value of 10000 indicates invalid reading With an optical board value is in volts unit not included in response in a 0 10 V range TAV A U R A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed U Unit OPM only R Sensitivity OPM only If U and R are omitted lt InputID gt lt float gt LF If U is present no analog value will be returned but the measuring unit instead U uW or U dBm or U mW UuW measuring unit is uW 1E 6 Watt UmW measuring unit is mW 1E 3 Watt UdBm measuring unit is dBm dBm 10 logio Power 1 mW If R is present no analog value will be returned but the measuring range instead R 0 or R 1 F 206 MP 36E Release 3 5 0 Page 93 Piezo Nano Positioning PI System Commands Troubleshooting Attempt to address device A1 when device A2 is desired or vice versa With F 361 OPM F 361 device is not powered up Connect the power supply and turn on the F 361 device by pressing t
5. 0 No error 1 Parameter syntax error 2 Unknown command 3 Command too long 5 INI or Servo ON required before move at this time 6 SGA parameter out of range 7 Motion range exceeded 8 Velocity range exceeded 9 Attempt to set pivot point while U V or W not all equal to 0 10 Last command was STOP or DRV 11 SST parameter out of range 13 NAV parameter out of range 14 Invalid analog channel 15 Invalid axis identifier 17 Command parameter out of range 23 Invalid Axis 25 Invalid Real Number 26 Missing Parameter 27 Soft Limit out of Range 46 F 361 Optical Power Meter missing 47 F 361 cannot be initialized is not initialized 48 F 361 communications error 53 MOV command motion in progress 54 Unknown parameter 57 Data Record Table does not exist 63 INI is running 200 No stage connected 201 File with stage axis parameters not found 202 Invalid Axis Parameter File 210 Illegal File Name 211 File not found 212 File write Error 213 DTR hinders Velocity Change 214 Position Unknown F 206 MP 36E Release 3 5 0 Page 50 System Commands 217 218 219 301 333 555 Piezo Nano Positioning PI Unexpected Strut Stop Reported Position is based on Interpolation MOV MWG or MAR is running Reported Position is based on Estimation MOV is running Buffer overflow Hardware Error motion deviation limit exceeded Gereral error in using macros 1000 Too many nested macros 1001 Macro already defi
6. Fig 22 U V W 0 amp L TT DOARA O NA PE ELT DIZ TOTE WHE se SS LTE X Y Z Fig 23 U 4 V W 0 Fig 24 U 4 V W 0 www pi ws F 206 MP 36E Release 3 5 0 Page 39 PI Piezo Nano Positioning F 206 Coordinate System 9 i n Di Il gt S il N a N ig D UTTE RT Hi i ll om gt Ss il gt A to N g D X Y Z X Y Z 4 U V 0 Fig 28 V 0 W 4 U 7 Fig 2 Page 40 F 206 MP 36E Release 3 5 0 WWW pI wWS Macro Storage on Controller Piezo Nano Positioning E I G Macro Storage on Controller The F 206 supports controller macros in the BasMac language Here only a brief description of the features available will be given The controller commands used to manage the BasMac macros are described in detail in the command reference section For a description of BasMac statements and syntax see the BasMac User Manual SM145 provided with the installation BasMac is much more highly developed as a macro language than GCS The macro management commands of the two models are the same but the format of the statements in the macros is different 6 1 BasMac Statements BasMac has statements not only to command action from the controller e g CMD MOV Z 3 but also to enable branching looping storing controller responses in variables parsing strings and performing arithmetic and logical calculations NOT
7. Nano Positioning PI Operating Examples S Operating Examples The following two examples show how to communicate with the F 206 system using PASCAL In both cases a line scan with 10 steps is performed Version 1 waiting for motion ready answer procedure y_scan_m const check_str string 2 1 10 1 linefeed var ch char a integer pos double str_pos string temp_str string begin pos 0 set position to zero for i 1 to 10 do 10 steps loop begin pos post 0 1 increment position str pos 1 4 str_pos make a string set_output MOV Y str_pos send CMD to the controller set_output MOV request for move complete temp_str i repeat loop waiting for 1 if readinputbuf ch then temp_str temp_strt ch until temp_str check_str until move complete end set_output MOV X0 YO ZO UO VO WO end WWw pi ws F 206 MP 36E Release 3 5 0 Page 100 Operating Examples Piezo Nano Positioning PI Version 2 polling until movement ready procedure y_scan_5 const check_str string 2 0 10 0 Linefeed var ch char is integer pos double str pos string temp_str string begin pos 0 set position to zero for i 1 to 10 do 10 steps loop begin pos post 0 1 increment the position str pos 1 4 str_pos make a string set_output MOV Y str_pos send CMD to the controller repeat loop until move complete
8. other fuse standards are defined differently 90 60 Hz and equivalent fuses may have higher current ratings Fuse Rating IEC 4 AT To access fuses push tab circle down and pull out carrier Fig 59 Rear panel fuse carrier and fuses 10 2 Dust Filter The ventilation holes at the left of the controller front panel are protected by a dust filter which can be replaced if necessary To access the dust filter remove the 8 screws which hold the front panel and tip it slightly forward the on off switch connection prevents the panel from being removed Remove and replace the dust filter as shown in Fig 60 Be sure that it does not extend over the keyboard connector socket at the bottom of the front panel Fig 60 Dust filter replacement www pi ws F 206 MP 36E Release 3 5 0 Page 105 Piezo Nano Positioning PI Maintenance 10 3 Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente P
9. temp_str chist ty sendcharrs232 5 send an ascii 5 repeat loop for RS232 until LF if readinputbuf ch then temp_str temp_str ch until ch 10 until linefeed LF comes until temp_str check_str until move complete end set_output MOV X0 YO ZO UO VO WO end WWw pi ws F 206 MP 36E Release 3 5 0 Page 101 Troubleshooting Piezo Nano Positioning PI 9 Troubleshooting 9 1 RS 232 Communication Check the configuration of the COM port Is it set to 57600 baud 8 data bits 1 stop bit no parity on both sides Connect a keyboard and a monitor to the controller and watch the boot procedure During the firmware startup process the communication settings appear on the screen All commands sent via RS 232 can be seen in the firmware status line The data file hexbrate dat which is located in the C HEXAPOD directory of the controller file system see p 29 must have the following structure PHYSIK INSTRUMENTE PI GmbH Auf der Romerstrake 1 76228 Karlsruhe Germany Baudrate 57600 and must not contain a 6th line Is the right cable being used Use the original null modem cable that comes with the device If no communication can be established interface settings on the host PC should be checked Try disabling the infrared port if any and make sure the serial port is enabled If the host is running LabVIEW under Linux consult the included A000T0021 Technical Note Fig
10. All work done with and on the modules described here requires adequate knowledge and training in handling high voltages WWwW pi ws F 206 MP 36E Release 3 5 0 Page 8 Introduction Piezo Nano Positioning PI CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately CAUTION Electrostatic Hazard Add In Cards Subject to Damage Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when installing or removing boards or opening the controller for any other reason CAUTION Enter only valid commands Commands with Incorrect syntax can have unexpected results The fact that error codes exist for syntax errors does not guarantee that all syntax errors will be recognized Unrecognized syntax errors can lead to execution of the command with altered parameters 1 6 Prescribed Use Based on their design and realization PI F 206 controllers are intended to drive PI F 206 positioners and optionally separate piezo or motor driven axes F 206 systems must not be used for applications not in conformance with this manual Observe the safety precautions given in this User Manual F 206 systems conform to Measurement Category CAT I and may not be used for Measurement Categories Il III or IV Other use of the device i e operation other than instructed in this Manual may affect the safeguards provided Standard F 206 sys
11. Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente Pl GmbH amp Co KG Manufacturer s Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name _ Six Axis Precision Alignment System Model Numbers F 206 Product Options all complies with the following European directives 2006 95 EC Low voltage directive LVD 2004 108 EC EMC Directive 98 37 EC Machinery Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 July 8 2008 Karlsruhe Germany Vie Dr Karl Spanner President About This Document Users of This Manual This manual is designed to help the reader to install and operate the F 206 MicroMotion Hexapod Positioning System It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the F 206 MicroMotion Hexapod Positioning System as well as the software and hardware installation procedures which are required to put the associated motion system into operation Updated releases are available for download from www pi ws or email contact your Physik Inst
12. 760 its X Y and Z axes are addressed as axes K L and M by the commands which support them The directions of motion are those marked on the NanoCube note that the handedness of the P 611 differs from that of the F 206 Refer to the P 611 User Manual and any included Technical Notes for details on this device Magnetically Clamped Platform 8 Degree Wave Guide k NanoCube 100x100x100um Fig 66 Example of a setup for aligning a 8 deg waveguide using the F 206 the NanoCube and PI s standard holders for 8 deg optical devices 11 7 Installing Add On Cards in the F 206 Controller CAUTION Electrostatic Hazard Add In Cards Subject to Damage Electronic components are sensitive to electrostatic electricity Take appropriate electrostatic protection measures when installing or removing boards or opening the controller for any other reason www pi ws F 206 MP 36E Release 3 5 0 Page 113 Piezo Nano Positioning PI PC Cards amp Options A number of available options require installation of an associated add on card in the F 206 controller To install such cards follow the steps below 1 Prior to opening the controller case disconnect the power cable 2 Open the controller housing by removing the four Torx screws inside the plastic decorations on the back panel of the controller using the Torx driver TX8 3683 that comes with the system 3 Lift the cover slightly and disconnect the ground cable Remove
13. Electric Shock Hazard Systems with the E 760 Piezo Axis NanoCube Controller Piezo stages are driven by amplifiers generating HIGH VOLTAGES The output power on the optional E 760 card and connected stage may cause serious injuries All work done with and on the modules described here requires adequate knowledge and training in handling High Voltages 11 6 E 7GO Piezo Axis NanoCube Controller Board The F 206 controller can be equipped to control three piezo driven nanopositioning axes with an E 760 controller board If your E 760 was not delivered preinstalled refer to Section 11 7 below and to any technical notes included with the shipment If the card is installed the firmware will also have been configured Fig 65 E 760 piezo axis controller with NanoCube in background CAUTION If You Have a NanoCube Protect It from Damage Read the NanoCube Handling Instructions Before Unpacking In addition to the piezo controller the E 760 has an optical input which can be accessed as optical device A5 This input however is WWw pi ws F 206 MP 36E Release 3 5 0 Page 112 PC Cards amp Options Piezo Nano Positioning PI not accessable if an external optical power meter is configured in the controller firmware The optical intensity can be processed with a settable gain factor of 1 10 100 or 1000 Input range 0 to 5 V 0x0000 to 0x1FFF Resolution 13 bit If a PI NanoCube is connected to the E
14. The strut force calculation program F206_force_Direction exe included on the product CD can be used as an aid Simply enter the force and torque components click on an orientation normally Z up and it calculates the forces on the struts These must not exceed the values given on the screen Load Calculation Using the F206_force_Direction exe program on the product CD in the Simulation F206_force_Direction directory the load on individual struts can be approximately calculated as a function of the type and position of loads on the platform NOTE F206_force_direction exe is for F 206 Hexapods with standard geometry only F 206 strut Force T FxIN 0 Fi 2 600580N X up Xdown FyIN fo F2 0 000000 N Fz N ft F3 2 843320 N Y up Y down Mx Nmm La F4 2 843320 N ser My Nmm C F5 0 000000 N Z down Mz Nmm SSS F6 2 600580 N Insert Pulling Forces as Positive Yalues Force Limits for F1 F6 8 5 N 20N Fig 4 F206_force_Direction exe calculates strut stress with the unit in different orientations Platform force and moment components can be entered in the fields on the left The values labeled F1 through F6 are the resulting loads on struts 1 to 6 respectively The values are recalculated whenever one of the orientation buttons is clicked because of the weights of internal components the strut loads will differ depending on how the unit is oriented Z up corresponds to normal hor
15. a scan of 2 mm may result in an additional deviation of up to 11 um from the desired trajectory which if unexpected could damage the attached setup For additional runout information see the individual fast scan command descriptions www pi ws F 206 MP 36E Release 3 5 0 Page 7 Piezo Nano Positioning PI Introduction CAUTION Warning Fragile Mechanics The F 206 mechanics can be permanently damaged by applying excessive force to the mobile platform To maintain a safety factor the maximum compressive force on this platform should never exceed 10N The maximum shock acceleration on the system without the platform installed should never exceed 25g For transportation and shipment the special safety shipping box supplied by PI must be used Protect the intermediate plate from damage by mechanical forces by using the transport cover Take special care when connecting products from other manufacturers Follow the General Accident Prevention Rules The program F206_force_Direction exe on the product CD can be used to calculate the allowable stresses in different directions and with the unit in different orientations Do not lift the F 206 by the top platform DANGER Warning Electric Shock Hazard Systems with the E 760 Piezo Axis NanoCube Controller Piezo stages are driven by amplifiers generating high voltages The output power on the optional E 760 card and connected stage may cause serious injuries
16. at the same velocity Note that the platform trajectory in X Y Z U V W coordinates can be quite complicated 8 The platform is then moved slightly so that the reference switches can all be re approached from the same side 9 The actuators are then adjusted one by one to their reference points 10 All motion parameters except the pivot point velocity and manual pad step size are reset NOTE To stop motion during an INI command send an ASCII 24 to the controller with HexControl on the host computer this can be done by pressing the ESC key Alternatively Ctrl X can be pressed on the controller keyboard if present INI with A or B parameters will move separate motorized axes to their reference positions www pi ws F 206 MP 36E Release 3 5 0 Page 71 System Commands Piezo Nano Positioning PI MAC Manage Macros www pi ws Description Format Arguments Response Troubleshooting Example Permits recording deleting and running BasMac macros on the controller see Macro Storage on Controller p 41 and BasMac manual for details MAC BEG macroname MAC DEL macroname MAC END MAC ERR MAC START macroname lt keyword gt determines which macro function is performed MAC BEG macroname Start recording a BasMac macro on the controller to be named macroname A Z and 0 9 only GCS macros not accepted If a macro with name macroname already exists or if macroname is unsuitable mac
17. given not speeds for specific directions The A and B velocities do however refer to the individual separate axes Piezo axes K L and M will always be reported as 0 0 since the piezo velocity cannot be set or reported at present Troubleshooting Command awaiting execution in queue Example WWwW pi ws VEL XUA X 3 716 SP LF U 3 716 SP LF A 21 028 LF VEL 3 716 LF F 206 MP 36E Release 3 5 0 Page 96 System Commands Piezo Nano Positioning PI VER Get Version Description Format Arguments Response Get firmware version The system reports the firmware version of the controller as well as some additional information for internal use VER none Firmware version Troubleshooting Command awaiting execution in queue VMO Virtual Move Description Format Arguments Response Virtual Move The system reports whether or not the target position is reachable directly from the current position The command can be used to check the F 206 workspace and the travel ranges of axes A and B No motion occurs The current target position is not changed VMO X Y Z U V W A B Similar to MOV command except that no motion occurs Coordinates of position to test each preceeded by its axis keyword current position is used for any omitted axes 0 indicates target position can be reached 1 indicates target posi
18. into the controller where 24 V is available F 206 Power Connector m Controller Mechanics cable and connectors a T H The cable carrying control signals between the controller and mechanics has identical 68 pin MDR connectors on both ends and is wired one to one The pinout is shown here Signals are TTL level Power for the PWM amplifiers in the mechanics is supplied over a i separate cable EREE N w lo N ja j Jw H o AAAALAAAAAA YYYYYYYYYY H H y MDR 68 Socket y T or e y E v en Pi ty a y 5 N E ias Y ai b F 206 MP 36E Release 3 5 0 Page 121 Piezo Nano Positioning PI Connectors and Pinouts 13 2 Controller and Options Fig 71 Controller rear panel connections and removable media reader Note rear panel KBD connector inactive on units with built in keyboard and display Connectors from top to bottom left to right m Line power to wide range 100 240 V power supply see p 105 for line fuses m Power sockets for F 206 mechanics For some custom versions 12 V 4 pin socket 4 unused www pi ws F 206 MP 36E Release 3 5 0 Page 122 Piezo Nano Positioning PI Connectors and Pinouts Standard F 206s 24 V 3 pin socket unused m DB9 unused m Connection for optional external VGA monitor stand
19. large angular fast scan this command should be used in two steps First perform a large angle scan with normal velocity and low threshold level then add a small angle scan with reduced velocity e g 0 2 mm s and higher threshold level Format Arguments FAA ax L A ax axis identifier can be U V or W followed by scan area size in deg L Threshold level at analog input A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used NOTE www pi ws F 206 MP 36E Release 3 5 0 Page 52 System Commands Piezo Nano Positioning PI If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed Example FAA V0 2 L1 A2 Performs a scan in V over a range of 0 2 deg The maximum intensity in the scanning line should exceed 1 V for analog input 2 Response 1 if there is a maximum which exceeds the threshold level 0 if the threshold was not reached or any other error occured Troubleshooting Parameter out of range FAM Fast Angular Scan to Maximum CAUTION Scan command runout may cause
20. limits t lt 0 or t gt 10000 Remarks WWwW pi ws When a cycle time has been set with the SCT command the MOV command will reach the target position at the end of the given cycle time by adjusting the velocity according to the target position distance It is recommended to set a cycle time SCT command exceeding the real average cycle time in order to prevent any stutter effects caused by time period jitter Set the cycle time to 0 if no cycle time dependant velocity changes are desired As a consequence of this the Hexapod struts will move with velocities that are limited only by the VEL command and the target position might be reached before the cycle time has ended Though an appropriate velocity is calculated for each MOV command the real Hexapod velocity cannot fall below a certain minimum value nor will the strut velocities exceed the velocity set by the VEL command F 206 MP 36E Release 3 5 0 Page 82 Piezo Nano Positioning PI System Commands SCT Get MOV Timing Configuration Description Get cycle time setting in ms used by MOV Format SCT Response T vvvvv SGA Set gain To use this command an optical board or piezo controller optional must be installed Description Set gain of the optical amplifier Format SGA N A Arguments N Gain value can be 1 10 100 or 1000 A Optical board specifier optional can be A1 A2 or A5 if not specified input 1 is used Def
21. maximum voltage did not reach the threshold level or an error occurred Since errors will also cause this response the ERR command should be issued to see what happenned Parameter out of range Start of Scan Position Table Position Para DO DO D1 D1 before meters Co C1 Co C1 evoking of FSN FSN Xs X Xs Xs X 2 Xs Xs X 2 Ys Y Ys Ys Y 2 Ys Ys Y 2 Zs Z Zs ZstZ 2 Zs Zs Z 2 Us U Us UstU 2 Us Us U 2 Vs V Vs VstV 2 Vs Vs V 2 Ws W Ws WstW 2 Ws Ws W 2 End of Scan Position Table Position Para DO DO D1 D1 before meters Co C1 co C1 evoking of FSN FSN Xs x Xs X Xs X 2 Xs X Xs X 2 Ys Y Ys Y Ys Y 2 Ys Y Ys Y 2 F 206 MP 36E Release 3 5 0 Page 68 www pi ws System Commands Piezo Nano Positioning PI Zs Z Zs Z Zs Z 2 ZstZ ZstZ 2 Us U Us U Us U 2 UstU Ust U 2 Vs V Vs V Vs V 2 Vs V Vs V 2 Ws W Ws W Ws W 2 WstW Ws W 2 FSN Finished Position Table Position before RO R1 evoking FSN Xs End of Scan Position Xs Ys End of Scan Position Ys Zs End of Scan Position Zs Us End of Scan Position Us Vs End of Scan Position Vs Ws End of Scan Position Ws www pi ws F 206 MP 36E Release 3 5 0 Page 69 System Commands PI Piezo Nano Positioning FSN Get Fast Scan Result
22. of some of the host software will do so directly for example PlTerminal and PIMikroMove Other programs may require installation of redirection drivers not included in order to make use of the TCP IP connection Read the driver documentation carefully Typically when the driver is installed a new COM port will appear in the system Data sent to that COM port will be sent out the TCP IP link addressed to the desired correspondent here the F 206 Hexapod controller on port 50000 When the driver has been installed start the software choose connection type RS 232 and choose that new COM port 4 3 IEEE 488 GPIB Connection 4 3 1Controller Side Parameters To command the device over a GPIB link the controller must have the GPIB interface card and GPIB must be enabled as the ASCII command interface This is the factory default setting for controllers ordered with the interface card If the card was ordered separately then this setting and the setting of the GPIB address must be made in the controller file system as described in Section 4 4 below The procedure requires using a directly connected monitor and keyboard because there are no ASCII commands for that purpose WWw pi ws F 206 MP 36E Release 3 5 0 Page 28 Communication with the Controller Piezo Nano Positioning PI 4 3 2Host Side Parameters The host must have IEEE 488 GPIB communications capability PI does not offer GPIB cards but tests its devices wi
23. the C HEXAPOD directory of the controller Use the F 361 device keys to change baud rate The required RS 232 null modem cable comes with the system See the F 361 User Manual for details WWw pi ws F 206 MP 36E Release 3 5 0 Page 119 Technical Data Nano Positioning P I Optical Input Model Piezo axes and sensors Maximum output power Average output power Peak output current lt 5 ms Average output current gt 5 ms Current limitation Voltage gain Polarity Control input voltage Output voltage PZT voltage output socket Position Servo Control Sensor Type Servo Characteristics Sensor socket Optical Metrology1 Detector input via FC connector Optical Power Range A D Resolution Bandwidth WWwW pi ws 12 4 E 76GO Piezo NanoCube Controller with E 760 3 9W 3W 90 mA 30 mA Short circuit proof 10 0 1 Positive 2 to 12 V 20 to 120 V 25 pin sub D on rear Strain Gauge P I analog notch filter 25 pin sub D on rear same as PZT voltage IR detector E 760 3Si Vis detector E 760 3SV 5 nW 1 mW 12 bit 300 Hz optical Input F 206 MP 36E Release 3 5 0 Page 120 Connectors and Pinouts Piezo Nano Positioning PI 13 Connectors and Pinouts 13 1 F 206 Mechanics www pi ws m Power Connector Motor power for all six F 206 motors is provided over a separate supply line Standard is 24 V DC The other end of the supplied cable is designed to be plugged
24. the cover Fig 67 Daughterboard clamp removal replacement 4 Lift the lever to release the daughterboard retaining clamp Remove the clamping plate 5 Remove the screw and cover bracket from a free ISA slot 6 Carefully insert the new card into a free ISA slot and fasten it with the screw CAUTION Be gentle when inserting the card use of excessive force can cause hairline cracks WWw pi ws F 206 MP 36E Release 3 5 0 Page 114 PI PC Cards amp Options Piezo Nano Positioning 7 Replace the clamping plate and relatch using the lever 8 Make sure that no internal header connectors have been dislodged 9 Connect the ground cable to the controller cover slide the cover carefully into position then insert and tighten the screws Replace the plastic decorations with the Torx screws WWw pi ws F 206 MP 36E Release 3 5 0 Page 115 PI Piezo Nano Positioning Technical Data 12 Technical Data 12 1 F 206 Mechanics Specifications WWwW pi ws Models Travel range X Travel range Y Travel range Z Travel range 0x Travel range Oy Travel range 0z Actuator design resolution Minimum incremental motion X Y Z Minimum incremental motion 0x Oy Oz Bidirectional repeatability X Y Z Bidirectional repeatability 0x Oy 0z Speed X Y Z Maximum load in Z Mass Material Operating temperature range F 206 S0 F 206 SD 8 to 5 7 mm 5 7 to 5 7 mm 6 7 to 6 7 mm
25. the various parameters The voltage at the analog input specified by the value in A lt value gt is read more than 500 times per F 206 MP 36E Release 3 5 0 Page 65 Piezo Nano Positioning PI System Commands second during motion Pivot Point FSN Y2 6 DO CO RO L0 5 A2 FSN V0 6 DO CO RO L0 5 A2 Fig 50 Fast scan examples CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately Defaults A 1 analog input 1 L 1 threshold in volts or in unit specified in TAV D 1 do not invert direction R 0 do not return to start C 0 do not center around starting point Format FSN X Y Z U V W L D R C A Arguments A indicates which optical board channel or which Optical Power Meter F 361 analog input to use Can be A1 or A2 If omitted A1 is used If there is an F 361 Optical Power Meter OPM configuration file C HEXAPOD F 361 DAT in the controller file system the OPM will be addressed and any optical board present will not be accessible otherwise the specified optical board channel will be addressed L Threshold Level Level of analog input in volts for an optical board analog input or in the unit specified in the TAV command for an OPM D If DO is specified the scan direction will be inverted www pi ws F 206 MP 36E Release 3 5 0 Page 66 System Commands Examples WWwW pi ws Piezo Nano Posi
26. 0100 6 600000 6 06001 0 000000 41 010901 50 000000 50 00001 9 000000 8 9000 0 000000 57 420000 57 42001 0 000000 22 570000 63 580901 0 000000 0 600000 6 0600 Manual Pad Cantroller Board AVAILABLE Fig 62 Bottom of firmware boot screen when manual pad controller board is installed 11 5 Optical CAnalog Signal Inputs Available for use with the F 206 are highly stable configurable external F 361 optical power meters maximum 2 per controller F 206 VVU and F 206 iiU 2 channel optical boards max 1 per controller and E 760 piezo controllers with optical input 1 per controller These devices make the power level of optical signals on an FC connector or other analog signal available to the program The various optical analog inputs can be configured accessed by the TAV TAV SGA SGA NAV NAV commands and fast scan algorithms as devices A1 A2 and A5 NOTE F 206 VVU visual and F 206 iiU infrared 2 channel boards cannot both be installed in the same system www pi ws F 206 MP 36E Release 3 5 0 Page 109 PC Cards amp Options Piezo Nano Positioning PI Optical Power Meters OPM cannot be operated on the same system with other optical inputs at the same time The presence of the OPM configuration file F 361 DAT in the C HEXAPOD directory of the controller deactivates recognition of the optical input of an E 760 card and any optical board installed The discontinued F 206 00U and F 206 IRU si
27. 2 TCP IP Connection This section describes establishing a connection between the controller and the host PC using TCP IP The controller is shipped with a fixed IP address of 192 168 1 28 Depending on how you wish to access the system you may need to change this setting see Controller Side IP Parameters p 26 To command the hexapod over TCP IP it is necessary to enable TCP IP as the ASCII command interface see Enabling Configuring ASCII Interface p 31 for details establish a connection to the device s IP address see below and send ASCII commands to port 50000 e g with PIMikroMove or PlTerminal To configure the TCP IP interface itself you need to connect via TCP IP to port 80 with a browser see p 26 because no ASCII commands are available for that purpose TCP IP access differs depending on the network availability which can be as follows m Local Area Network LAN use a suitable cable some older LAN connection points only support straight through cables see Section 4 2 1 for details www pi ws F 206 MP 36E Release 3 5 0 Page 22 Piezo Nano Positioning PI Communication with the Controller m Direct connection to Ethernet card in host PC use cross over cable see Section 4 2 2 for details NOTE In order to change the TCP IP settings on the controller side it is necessary to establish a TCP IP connection with the controller The controller has a fixed IP address of 192 168 1 28 as
28. 206 MP 36E Release 3 5 0 Page 103 Piezo Nano Positioning PI Troubleshooting F 206Test Strut Test 1 6 Select strut F5 Test all Fi Help F10 Exit ESC Stop To select a strut use 1 6 keys default 1 To change velocity use or keys To pre position selected strut use up down arrow keys display Cartesian line color will toggle To run test on selected strut from current position use rt lft keys display polar line color will toggle To run test on all struts use F5 Press any key to continue Fig 57 F206TEST strut following error test screen as seen on F 206 controller showing HELP window displayed 9 3 Optical Power Meter Test Press F2 to choose the optical power meter test The OPM can also be tested on the host computer via its plug and play USB interface A Windows test program LP METERO1 exe is included on the product CD for this purpose see the F 361 User Manual for details B LAseR POWER METER ee x USB Connection OK CW HCT99HID DLL V1 32 f 65 2913 75 70 65 60 55 50 45 40 35 30 25 20 15 10 Fig 58 LPMeter01 exe display Note that no software is provided to coordinate the OPM on the host with the Hexapod during operation www pi ws F 206 MP 36E Release 3 5 0 Page 104 Maintenance Piezo Nano Positioning PI 10 Maintenance 10 1 Fuses Crear panel lower left Use IEC Standard T class slow blow fuses 100 240 V
29. 4 are reserved and may not be used Fig 74 Visible CAD open A K Fig 75 Infrared m Connections on optional 2 channel optical board infrared F 206 iiU or visible F 206 VVU For flexibility the optical signal level is output electrically and a cable is provided to loop that output back to the analog input See Optical Analog Signal Inputs p 109 for details m Connection for manual control pad m Optional GPIB IEEE 488 interface connection F 206 MP 36E Release 3 5 0 Page 124 Piezo Nano Positioning PI Connectors and Pinouts m Motor control connectors for axes A and B optional Pinout is as follows L 12V 10 PWM GND 3 MAGN motor PWM TTL level 11 SIGN motor direction 4 output 5 V 12 negative limit active high 5 positive limit active high 13 REFS 14 15 6 Limit GND Encoder A ENCA 7 Encoder A Encoder B ENCB 8 Encoder B m Connection for control of six F 206 motors Pinout is as the same as on mechanics see p 121 Optional connections for up to two F 361 Optical Power Meters industry standard RS 232 sub D9 m COM 3 and 4 to the controller OS The upper connector is for OPM 1 the lower for OPM 2 WWw pi ws F 206 MP 36E Release 3 5 0 Page 125 Piezo Dimensional Drawings PI Nano Positioning 14 Dimensional Drawings Decimal places separated by commas in drawings
30. 42 Enabling Configuring ASCII Interface 0 0 eeceeeeeeeeeeneees 31 45 Communication Checks ccccecceececcceeceeeeseeeceeeeseesasaeeeeeeeees 32 40 Direct Control iieiaeie aa aa 33 46 12 MaimScreeM ena a a aa a aa aa otek 33 10 11 Contents 462 Command Entry Pane cecceeceeeeeeeeeeeseeneeeteeeneeeeeeeaees 34 47 Firmware Update Upgrade csecsseeseeeseeeeseeeseerseeseeeeees 34 F 206 Coordinate System 36 5 1 Translation and Rotation Axis Definitions 0 cccceeeeee 36 52 Translations s sec a a tacts hceeat duets anode duadadunwacaeets astanssias ves 36 DiS HROLAIONS acercrtetdsd shee aececacaccrencancsntitegnalscdessacscnaeqeaes nese ek ashen TE 36 5A WorkSpace aea G a a A A N antes 39 Macro Storage on Controller 41 6 1 BasMac Statements c cccseeceeeeeeeeeeeeseeneeeeseesseesseesseeees 41 6 2 Macro Management Options ccc eeeeeeeeeeeeeeeeeteeenaaeees 41 System Commands 43 7 14 Command Structure ccccceccceececeeeceeeeeeeeeeeeeeeeaeeenseeneeeen 43 7 1 1 Mnemonics and Argument ccceeeeeeeeeeneeeeeeneeeeeeeneeeeeneaas 43 7 12 Command Terminator esinin aae aea tia eE EAA 44 FAS Report Termnihator isee n eie aaeain Sed eaid 44 7 2 Command Reference alphabetical c ccceeeeeeeeeeeeeeees 45 Operating Examples 100 Troubleshooting 102 9 1 RS 232 Communication ccccccccccceccccecceeeceeeeeeeeeeeeeeeees 102 92 T
31. 5 7 to 5 7 6 6 to 6 6 5 5 to 5 5 33 nm 0 1 um 6 axis move 2 urad 0 4 arc seconds 6 axis move 0 3 um 3 6 urad 0 003 to 10 mm s 2 kg centered on platform 5 8 kg Aluminum 50 to 50 C Travel ranges in the coordinate directions X Y Z 8x Oy 0z are interdependent The data given shows maximum travel range of the axis in question i e its travel when all other axes are at their zero positions If this is not the case the available travel may be less Move involving all 6 actuators No moving cables unlike serial kinematics stacked systems Eliminates bending inertia and friction improving accuracy F 206 MP 36E Release 3 5 0 Page 116 Technical Data PI Piezo Nano Positioning WWwW pi ws Model Function Display Keyboard Host Communication Command Interfaces Operating voltage Software Operating Temperature Power consumption Fuses Dimensions Mass Optical Analog Boards Channels Optical Power Range Analog Input Range A D Resolution Sample Rate Bandwidth 12 2 F 206 Controller F 206 Hexapod Controller Built in display D versions only connection for VGA Buitlt in keypad D versions only external US keyboard included RS 232 TCP IP amp optional GPIB IEEE Over host link or direct via keyboard monitor 100 240 VAC 50 60 Hz LabView drivers software for alignment of arrays DLL and PIMikroMove t
32. 55 Main screen of the F 206 firmware www pi ws F 206 MP 36E Release 3 5 0 Page 102 Piezo Nano Positioning PI Troubleshooting Testing Actuators and OPM A program named F206TEST EXE is available on the controller for testing the individual strut actuators and for testing the optical power meter OPM To run it proceed as follows 1 Unless you have a controller with a built in keyboard that you wish to use connect a keyboard included and monitor not included to the F 206 hexapod controller 2 Start the controller and choose F206TEST from the startup menu or exit the control program with F10 and enter F2ZO6TEST followed by ENTER at the C HEXAPOD gt prompt Fig 56 F 206TEST EXE program press F1 for strut test F2 for OPM test Strut Test Irregularities in the strut mechanics cause slight differences between the targeted and actual positions during motion Under static conditions these divergences are eliminated by the servo control loop but the higher the velocity the greater they become The test program allows control over the individual F 206 actuators struts and allows you to preposition the strut and set the velocity as desired before a test The following error test itself covers a displacement equal to one full revolution of the spindle which drives the strut To use the strut test program press the F 1 key at the main screen WWw pi ws F
33. 9 Relative responsivity curve for visible diode Responsivity curves same as those of optical board see Section 12 2 1 www pi ws F 206 MP 36E Release 3 5 0 Page 118 Piezo Nano Positioning PI Technical Data Sensitivity F 206 IR Board 100 90 a 80 70 0 a 50 40 30 20 10 0 eas Ce pee ee ee ee SS et et eee Fd eee et Ee e e 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 Wavelength Relative Responsitivity Fig 70 Relative responsivity curve for infrared diode valid for both optical boards and optical input of E 760 piezo controller 12 3 F 361 Optical Power Meters OPM Using the OPM F 361 absolute light power measurements can be performed and the results made available to the software The F 361 is delivered with a calibration certificate and spectral responsitivity table This table is stored in the F 361 EEPROM and will be used to perform a built in auto correction OPMs are equipped with three photo diodes each having different sensitivities and different built in ranges so that a wide range of power can be measured precisely Two OPMs can be installed It is necessary to install the included serial card in the controller as an interface to the OPMs The OPM USB interface which can be connected to the host computer is for testing purposes only To assure serial communication the baud rate setting on the device must agree with those in the configuration file F 361 dat in
34. A5 the optical input on the E 760 piezo axis controller if installed WWw pi ws F 206 MP 36E Release 3 5 0 Page 46 System Commands Example Response Troubleshooting WWw pi ws Piezo Nano Positioning PI AAP YZ0 1 SA0 001 N3 A2 Performs a scan in the YZ plane over an area of max 0 1 mm side length with 1 um step size Maximum intensity position should be reached 3 times before scan stops Optical board 2 is read 1 if the auto align was successful max gt threshold within given max area 0 if the auto align was not successful max lt threshold in given max area Parameter out of range F 206 MP 36E Release 3 5 0 Page 47 System Commands Piezo Nano Positioning PI CST Get Stage name Description Format Examples www pi ws space LF Reports the names of the stages connected to the specified axes CST X Y Z U V W K L M A B X Y Z U V W linear and rotary axes of the F 206 K L M Piezo Nanocube axes A B separate motorized axes support optional CST without any parameters is interpreted as CST X Y Z U V W if no separete axes are configured or CST X Y Z U V W AB if separate axes are configured CST Response with X F 206_AXIS_XSP LF ka gan axes Y F 206_AXIS_YSP LF Z F 206_AXIS_ZSPI LF U F 206_AXIS_USP LF V F 206_AXIS_V SP LF W F 206_AXIS_WILE
35. AT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed Response Troubleshooting WWwW pi ws 1 if the threshold level was exceeded O the threshold level was not exceeded Axis identifier is incorrect Parameter out of range F 206 MP 36E Release 3 5 0 Page 62 System Commands Piezo Nano Positioning PI Example FSC YZ0 2 L1 S0 05 A2 Fig 47 Schematic scanning Performs a scan in the YZ plane over an area of 0 2 mm side length with 50 um distance between the scan lines A threshold level of 1 V should be reached for opt board 2 The scan starts at the current position and returns to this position if the programmed threshold level L is not exceeded If L is exceeded during the scan the system stops at this position Distance between scan lines is defined by S Default L 1 V S 0 01 mm A 1 0 05 mm The controller automatically reports 1 on exceeding the programmed threshold level L and motion stops algorithm for FSC yzo 2 t the threshold is not exceeded 0 is L1 S0 05 L not reported at the end of the scan 0 2 mm exceeded FSM Fast Scan to Maximum CAUTION WWwW pi ws Scan command runout may cause damage to the attached application
36. ATE DAT should have the structure shown in Fig 16 Depending on which interface is enabled as ASCII command interface there may be a 6th line in the file There must be no blank lines 5 Edit the file as required for the desired configuration see corresponding below 6 Save the file exit the editor and reboot the controller If using EDIT access the menu bar by pressing and releasing the ALT key Save Speichern and Exit Beenden are under the leftmost item Select yes ja if asked if the file may be overwritten Such i ee eu fnen Speichern nter Fig 17 DOS EDIT German version shown Press and release Ald to activate menu bar then save with S www pi ws F 206 MP 36E Release 3 5 0 Page 30 Communication with the Controller Piezo Nano Positioning PI Enabling Configuring ASCII Interface RS 232 For RS 232 communication to be enabled there must be no 6th line in the HEXBRATE DAT file see Section 4 4 The baudrate to use when the RS 232 interface is enabled is alone on line 5 Do not use a thousands separator Other RS 232 parameters cannot be changed from 8 data bits 1 stop bit no parity The required RS 232 null modem cable comes with the system TCP IP The Ethernet TCP IP interface on the controller is always activated but by default it is not enabled as the ASCII command interface Its default setting is to use a fixed IP address of 192 168 1 28 To enable the
37. E The syntax of the statements after the MAC BEG command on the F 206 differs from that of GCS macros Examples in the Quick Start Section of the BasMac User manual provided with the installation however contain all the information necessary to make BasMac macros out of GCS macros 6 2 Macro Management Options Controller macros can either be managed directly by the controller commands provided see the MAC and MAC command descriptions p 72 or the Controller Macro feature of PIMikroMove can be used Note that PIMikroMove will not translate macros from GSC to BasMac format or vice versa but it will formulate and issue the commands needed to store execute read delete and otherwise manage the entire controller macro collection not just those entered with PIMikroMove WWw pi ws F 206 MP 36E Release 3 5 0 Page 41 Piezo Nano Positioning P I Macro Storage on Controller PIMikroMove TM 2 1 99 4 Bi E e O E E erter hep serrer O 2 N O Byen SP Hack per e Controller macros ee Hexapod on TCP IP host 172 17 128 207 port 50000 axes X Y Z 0 3 CMD MOV U 5 CMD MOV U 5 END Load as Host macro start as Host macro e Fig 29 Managing controller macros with PIMikroMove showing BasMac statements in a macro www pi ws F 206 MP 36E Release 3 5 0 Page 42 Piezo Nano Positioning PI System Commands 7 System Commands The native command set of t
38. I GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany E www pi ws F 206 MP 36E Release 3 5 0 Page 106 PC Cards amp Options Piezo Nano Positioning PI 11 PC Cards amp Options 11 1 If your system was ordered together with any of the optional ISA bus add on cards it should be delivered with them installed and configured If you order the cards separately refer to the corresponding section for installation TCP IP Interface The TCP IP interface is standard in current production Hexapod controllers It is implemented with the C 880 TCP ISA bus add on card Be sure to use the RJ 45 socket on the back of the card to connect to the network or host other RJ45 sockets that may be present are inactive See Section 4 2 for communicating with the controller and configuring the card Most older Hexapod controllers can be retrofitted for TCP IP but it may be necessary to return the unit to PI Contact your PI Sales Engineer or write info pi ws for information 11 2 Control for Additional Separate Axes Adding control for additional motion axes is a software option or upgrade order number F 206 AC8 You must specify the stage type s to be connected when ordering the option or upgrade If ordered together with the system it will be delivered preconfigured If ordered separately you will receive instructions for the required firmware update When using two additional axes of different types be sure not to in
39. IEEE 488 communications card can be included in addition or added later as an upgrade PI part number F 206 I3 if ordered with the controller will be installed before shipping Otherwise see p 113 and p 107 4 1 RS 232 Connection This section explains the settings required for using the RS 232 interface for sending ASCII commands to the controller from a host PC via a null modem cable like the one included All the included www pi ws F 206 MP 36E Release 3 5 0 Page 21 Piezo Nano Positioning PI Communication with the Controller software supports this connection type without installation of any additional drivers 4 1 1Controller Side Parameters To command the device over RS 232 sub D9m connector RS 232 must be enabled as the ASCII command interface This is the factory default setting with the COM port set at 57600 baud These settings must be made in the controller file system as described in Section 4 4 below The procedure requires using a directly connected monitor and keyboard because there are no ASCII commands for making these settings The other RS 232 settings are 8 data bits 1 stop bit no parity and cannot be changed 4 1 2Host Side Parameters The baud rate should be set to match that of the controller whose factory default is 57600 the other settings are always 8 data bits 1 stop bit and no parity The COM port to choose is the one the null modem cable is plugged into on the host PC 4
40. Piezo Nano Positioning PI MP 36E User Manual F oO O 6 MicroMotion Hexapod Positioning System Release 3 5 0 Date 2008 07 16 This document describes the following product s E F 206 S0 MicroMotion Hexapod Positioning System E F 206 SD MicroMotion Hexapod Positioning System with Built in Front Panel Display and Keyboard Custom models differ in some respect see included Technical Notes if any Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Physik Instrumente PI GmbH amp Co KG is the owner of the following company names and trademarks PI PlLine NanoCube PIMikroMove The following designations are protected company names or registered trademarks of third parties Microsoft Windows LabVIEW Copyright 1999 2008 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source First printing 2008 07 16 Document Number MP 36E Release 3 5 0 F 206_User_MP36E350 doc This manual has been provided for information only and product specifications are subject to change without notice
41. TCP IP interface as the ASCII command interface for the device the HEXBRATE DAT file on the controller must have TCPIP Firmware 6 xx or newer or COM2 in line 6 the line after the baudrate value which must be present See Section 4 4 1 for detailed instructions on accessing this file No spaces are allowed in the entry and no blank lines in the file which looks as follows Changing the TCP IP parameters including the IP address behavior is not possible here It is done by addressing the IP address with a browser port 80 from the host PC over the Ethernet cable see Section 4 2 3 This is possible even when TCP IP is not enabled as ASCII command interface WWw pi ws F 206 MP 36E Release 3 5 0 Page 31 Piezo Nano Positioning PI Communication with the Controller GPIB IEEE 488 For GPIB the HEXBRATE DAT file on the controller must have an entry like GPIB4 in Line 6 the line after the baudrate value which must be present but is ignored See Section 4 4 1 for detailed instructions on accessing this file This setting enables GPIB communication with the default address 4 The general entry is GPIBx where x is the GPIB address of the system 4 5 Communication Checks Install PITerminal or PIMikroMove on the host PC if you have not already done so Connect the controller and the host PC with the appropriate cable or network Switch on the controller start the terminal program or PIM
42. The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an F 206 MP 36E Release 3 5 0 Page 63 Piezo Nano Positioning PI System Commands additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately Description Fast Scan to Maximum This function is similiar to the FSC command In contrast with the FSC command this function does not stop when the threshold level is reached but performs a complete scan of the scan area If the maximum intensity exceeds the threshold level the stage is moved to that position after the scan Fig 48 Especially for intensity distributions with side maxima the use of FSM instead of FSC or FSA is recommended Default L 1 V S 0 01 mm Fig 49 Format FSM ax L S A Arguments ax axis pair specification can be YZ or XZ followed by scan area size in mm L Threshold level at analog input S Distance between scan lines A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used www pi ws F 206 MP 36E Release 3 5 0 Pa
43. Unit uW dBm or mW UuW Sets the measuring unit to uW 1E 6 watt UmW Sets the measuring unit to mW 1E 3 watt UdBm Sets the measuring unit to dBm dBm 10 log10 Power 1mW R Sensitivity where Sensitivity 0 or 1 RO Achieves high accuracy with low signals should be selected if the signal power is extremely low R1 Should be selected to enlarge the measurement range in order to measure higher power signals The default value of R Sensitivity is set by the corresponding entry in the F 361 dat configuration file which is located in the c HEXAPOD directory of the controller The factory default value for U is mW The F 361 has 9 power ranges and switches from one to another automatically when necessary The highest range and the lowest range however cannot both be made available at the same time RO enables measuring in the lowest power range and disables measuring in the highest power range R1 enables measuring in the highest power range and disables measuring in the lowest power range F 206 MP 36E Release 3 5 0 Page 92 System Commands Piezo Nano Positioning PI TAV Tell Analog Value NOTE This command can address either an optical board or an F 361 optical power meter The presence of an F 361 DAT configuration file in the C HEXAPOD directory on the controller deactivates access to any optical board that might be present Description Format Arguments Response
44. aa a a aaaea 13 24 Connection and StartUp sssessrressrrrrrrrrrrrrrrrrrrrrrrrrrrrrrennt 14 System Description 17 3 1 F 206 Hexapod Mechanics ssessneseresrrrrrrrrrrrrrrrrrrrrrrerrenns 18 Ski DESG eunn ienei A a er 18 312 Referencing nersini n e e a a eie 19 3 1 3 Six Axis Motion Synchronization 19 32 Electroni CS apaa aaa a a a a a 19 Communication with the Controller 21 41 RS 232 Connection sepais irrien ie ia tn oi riia aea aaia 21 4 1 1 Controller Side ParameterS c ccccceceeeeeeeeeeeceeeeeeeeeeteees 22 412 Host Side ParameterS c cccccccececceeceeeeeeeseeeeeneeeeeeeeeeeees 22 42 LCP IP COnn Ctlo ms inaran a a 22 421 Via Local Area Network cccccccccceeeccceeeeeeeeeeseeenaeeeeeeeeeteees 23 422 Direct Connection to PC c ccccccceceecceeeeeeeeeetecenaeeeeeeeeeeeees 24 423 Controller Side IP Parameters cc ccceceseeeeeceeeeeeeeeeeeees 26 424 Host Software Parameters c cccceccececeeeeeeeeeeeaeeeeeeeeeeeees 28 43 IEEE 488 GPIB Connection eeeeeeeeeeeeeeereeeteeeteeeee 28 43 1 Controller Side ParameterS c ccccceceeeeeeeeeeeeeeeeeeeeeeeeees 28 432 Host Side ParameterS cccccccsccecceeceeeeeeeeeceecseeeeeeeeeeeees 29 44 Controller Configuration File cccccceeeeeeeeeeeeeeeneeeeeeeeeeeeeeees 29 44 1 Editing HEXBRATE DAT ccccccccccssccssceseceseeeeeesseecseecseeees 29 4
45. alled motor control board which can control the 6 DOF F 206 and optionally two separate DC motor or voice coil axes An optional add on board the E 760 for control of 3 piezo axes is also available The controller s internal firmware accepts motion commands via an RS 232 TCP IP or optionally GPIB communication link from a host PC not included for the F 206 and any additional axes which are configured All commands for positioning the F 206 platform are given in orthogonal coordinates and transformed by the controller to the F 206 actuator specific positions and velocities before execution www pi ws F 206 MP 36E Release 3 5 0 Page 17 Piezo Nano Positioning PI System Description With the F 206 AC8 firmware upgrade option the controller can be configured to control additional axes A and B Any stages compatible with Pls DC motor controllers including voice coil stages can be used see p 107 With the F 206 NCU add on card and included firmware upgrade the F 206 can control additional axes K L and M Piezo positioners compatible with the E 760 controller like the P 611 NanoCube XYZ nanopositioner can be used see p 112 3 1 F 206 Hexapod Mechanics 3 1 1 Design The F 206 is based on a parallel kinematics parallel metrology design with stationary vertically acting linear actuators Constant length struts are mounted on top of the actuators to transfer the motion to the platform which they alone suppo
46. and F 206 iRU optical boards are no longer available because of ROHs regulations They are not supported by the current firmware and have been replaced by the two channel F 206 VVU visual and F 206 iiU IR optical boards Only one of the new optical boards can be installed in the controller at a time The optical photodiodes simply drive the optical converter analog outputs while the on board analog to digital converters are connected to the electrical analog inputs The digitized input voltage is made available by the TAV command As a result either an optical or electrical input can be used FC optical inputs 1 and 2 Reserved S h A to D converter analog inputs 1 and 2 pa Input 2299 Optical converter analog outputs 1 and 2 Fig 64 F 206 iiU or F 206 VVU optical board bracket face with connections NOTE To use the optical FC input the optical converter analog OUT must be looped back to the A to D converter IN connector on the card see schematic diagram p 118 A BNC cable for this purpose is included 11 5 3 Optical Input on E 760 Piezo Controller Board In addition to its piezo controller the E 760 has an optical analog input which can be accessed as optical device A5 This input however is not accessible if an external optical power meter is configured in the controller firmware www pi ws F 206 MP 36E Release 3 5 0 Page 111 PI PC Cards amp Options Piezo Nano Positioning DANGER Warning
47. and can lie inside or outside the system workspace Moves which specify new X Y or Z translation parameters also shift the pivot point i e the pivot point moves with the platform Similarly a non zero rotation around X U move rotates the V and W rotation axes and a non zero rotation around Y V parameter rotates the W axis This means for example that a W move always rotates the platform about a line perpendicular to its plane To execute a move command the system first evaluates the target position specification then calculates how to get there from the current position in a smooth continuous vector motion then performs that motion See F 206 Coordinate System p 36 for examples and illustrations 3 2 Electronics Most of the system electronics is in the PC based controller The controller can be located up to about 10 m away from the mechanics The controller contains an 8 axis DC motor controller and the software needed to transform the user commands into hardware specific commands for the six F 206 Hexapod motors and optionally for any additional axes installed Software is provided to send ASCII commands to the controller from a host PC not included In addition the controller s ASCII command interface is fully described so as enable creation and use of custom software if desired www pi ws F 206 MP 36E Release 3 5 0 Page 19 System Description Piezo Nano Positioning PI The F 206 controlle
48. ard pinout m RS 232 DB 9m COM1 for connection to host PC via null modem cable standard pinout m Connections for optional external keyboard standard AT type keyboard pinout all keyboard connectors present should work properly except the rear panel connector on units with a built in keyboard m Connection for TCP IP interface Ethernet RJ 45 cable Optional connections for 3 axis piezo stage and optical input A5 13 PZM on optional E 760 board see aS ee 12 PZR AGND 24 also p 112 AGND 23 ee 10 AGND ID Chip 22 9NC N C 21 8 NC N C 20 7 NC AGND 19 6 RFI B12 18 5 B11 AGND 17 l in ic 4 REF2 Fig 72 J 4 25 pin sub D seno 45 oe 2 REF connector for NanoCube B2 4 IK 1 B31 stage Pin 1 GND Pin 2 AUXO TTL digital out bit 0 max 20 mA Pin 3 AUX1 TTL digital out bit 1 max 20 mA Pin 4 AUX2 TTL digital out bit 2 max 20 mA Pin 5 AUX3 TTL digital out bit 3 max 20 mA Pin 6 Analog out 16 bit resolution analog output OV to 5V Pin 7 Analog in 14 bit resolution analog input Fig 73 5V to 5V Aux signals Pin 8 AGND WWww pi ws F 206 MP 36E Release 3 5 0 Page 123 Connectors and Pinouts Piezo Nano Positioning PI www pi ws The E 760 3Si and E 760 3SV versions come with a photodiode already installed at J7 Wiring is as A follows END GS A K A Anode J7 2 K Cathode J7 1 Connector count starts with pin 1 closest to the bracket Pins 3 and
49. arguments is interpreted as NLM XYZUVW NLM Response X vvvvvSP LF Y vvvvviSP LF Z vvvvvVSP LF U vvvvwv SP LF V vvvvvSP LF We vvvvv LF NLM X W Response X vvvvvVSP LF W vvvvvLF SP space LF line feed PLM Set Positive Soft Limit NOTE Soft limits are only respected if soft limits are activated by SSL Description Format Examples Response Troubleshooting Sets the positive soft limit for the specified Hexapod axis All limit values must be positive so that the zero point cannot be excluded from the working space The platform can be moved only if the target position lies inside the soft limits If the platform is outside the soft limits the platform may move to positions that are inside the soft limits All soft limits are initialized with values stored in the configuration files factory defaults are same as travel range limits PLM X Y 2 U V W X Y Z U V W linear and rotary axis designators of the Hexapod PLM X 1 PLM Y2 Z2 W2 none Parameter out of limits PLM Get Positive Soft Limit www pi ws F 206 MP 36E Release 3 5 0 Page 79 System Commands Description Format Examples Piezo Nano Positioning PI Gets the positive soft limit for the specified platform axis PLM X Y Z U V W X Y Z U V W linear and rotary axes of the He
50. ault N 100 A1 Example SGA 10 A2 Sets the gain of optical board 2 to a value of 10 Response none Troubleshooting Command awaiting execution in queue SGA Get Gain Value To use this command an optical board or piezo controller optional must be installed Description Get optical gain value Reports the gain setting of the specified analog in channel optical input Format SGA A Arguments A Analog channel specifier can be A1 A2 or A5 if not specified input 1 is used Response A 1 or 10 or 100 or 1000 Troubleshooting Command awaiting execution in queue www pi ws F 206 MP 36E Release 3 5 0 Page 83 Piezo Nano Positioning PI System Commands SPI Set Pivot point Description Set pivot point with R S T in mm This command is only executed if angular positions are U V W 0 Format SPI R S T Alternative SPI X Y Z Format Troubleshooting Platform tilted U V or W not all 0 NOTE The pivot point and rotation axes move with the platform This means that the physical location of the pivot point in space is equal to the sum of the coordinates specified in SPI and the X Y Z coordinates of the platform position This is true even if the letters X Y and Z are used in the SPI command When the firmware is started the pivot point value is set to the default values stored in lines 28 30 of the F206GEOM DAT file on the controller file system us
51. ction Piezo Nano Positioning PI m F206_force_Direction exe Program for calculating approximate loads on the individual struts as a function of the load on the platform Historical Software Certain programs predating the PI General Command Set GCS are also included for historical and compatibility reasons They include a set of LabVIEW drivers and a DLL and may not support many new features 1 4 Documentation Overview This manual contains the product description as well as a listing of the commands which are used with the F 206 Controller A detailed description of the software that runs on your host PC can be found in separate manuals which are included on the F 206 software CD the latest releases are available for download from www pi ws Your system may include accessories like the F 361 optical power meter which are described in detail in separate manuals In addition to the manuals there may be Technical Notes included describing certain parts of the system The information in Technical Notes may augment or supersede that in the manuals 1 5 Safety Precautions CAUTION Scan and MOV command runout may damage attached application The trajectory specified by the X Y Z U V and W parameters to the fast scan commands is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For this reason large scanning ranges are not recommended for example
52. ction i e connect to port 80 as follows 1 Input the current controller TCP IP address as determined with Search for Controllers in PIMikroMove or PITerminal in the address line of the browser and press ENTER If a password is requested just press ENTER and continue The binary representation of a valiid subnet mask consists of a string of 1 s followed by a string of zeros WWwW pi ws F 206 MP 36E Release 3 5 0 Page 26 Communication with the Controller Piezo Nano Positioning PI 2 If the controller is not found try changing settings on the host or network side and try again 3 When a connection is established with the browser follow the instructions that appear If a password is requested just press ENTER and continue Choose the network tab on the left and make your desired settings as shown below The settings made become the new power up defaults Do not set the controller to obtain its IP address automatically unless you are sure a compatible service is available Note the settings made in case communication is lost Y Lantronix xPort Device Server Microsoft Internet Explorer Datei Bearbeiten Ansicht Favoriten Extras 2 ezuock gt gt O A A Ashen iFavorten Bmeden A B d N a Adresse http 172 17 128 207 secure kx_conf htm z inks LANTRON IX Firmware Version V6 1 0 0 MAC Address 00 20 48 A3 A2 E1 Network Settings h Server Serial Tunne
53. damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately WWwW pi ws F 206 MP 36E Release 3 5 0 Page 53 System Commands Description Fig 32 Fig 33 Arguments WWw pi ws Piezo Nano Positioning PI Fast angular scan to maximum Executes a 2 dimensional angular scan over the axis pair specified in ax ax can be UW VW or UV The voltage at the analog input specified by A is read gt 500 sec during motion The scan starts at the current position and returns to this position if the programmed threshold level L is not exceeded The distance between the scan lines is defined by S If the maximum intensity during the scan exceeds the threshold level the stage is moved to that position after the scan Especially for intensity distributions with secondary maxima the use of FAM instead of FAS is recommended Default L 1 V S 0 02 deg A 1 FAM ax L S A ax axis pair specification can be UW VW or UV fo
54. damaged when the axes move If any Hexapod axes are selected all F 206 axes will be referenced and all will move Axes A and B are referenced separately Click Automatic to reference the selected axes Start up controller connected Hexapod on RS 232 COM1 57600 baud Select all Select unreferenced Select axes with stored states x APO y Connect controller H HI 1 HEXAPO H H y gt HEXAPO ec M 605 2DD yes no servo off M 511 DD yes no servo off gt SS 2 Configure hexapod Seema fe ES selected axes by moving to Automatic Hep close 3 Start up axes Fig 7 PIMikroMove Start up Controller screen at Start up Axes step 12 If there are any problems with communication please read the Troubleshooting section p 102 13 After referencing make a few test moves to make sure that the system is operating properly www pi ws F 206 MP 36E Release 3 5 0 Page 16 Piezo Nano Positioning PI System Description 3 System Description F 206 systems consist of the F 206 mechanics the movable platform supported by six linear actuators the control electronics and two connecting cables Motion in all six degrees of freedom is performed using DC motor driven linear actuators Fig 8 Controller included with F 206 SD has built in display and keypad The mechanics is controlled by a PC based multi axis DC motor controller with an inst
55. e commands take neither arguments nor terminator and evoke a response Many single character commands can be issued at times when other commands would not be executed and cause an error Arguments follow the mnemonic separated by a space SP In general keyword arguments are used with one or two character keywords WWwW pi ws F 206 MP 36E Release 3 5 0 Page 43 System Commands Piezo Nano Positioning PI though some commands like TAV have place sensitive arguments The most common keywords are the axis designators X Y Z U V and W The keyword is usually followed by a numeric value which may be separated by a space The value must follow the keyword but the order of the keyword value units is usually not important Example FSC YZ0 2 S0 05 A2 L1 Performs a scan in the YZ plane over an area of 0 2 mm side length with 0 05 mm distance between the scan lines until optical input A2 exceeds a value of 1 7 1 2Command Terminator Commands transferred as strings over the interface must be terminated with a LF linefeed ASCII character decimal 10 hex OA It may be possible to use a carriage return CR in addition to or instead of a line feed The command line terminators are not usually shown explicitly in this manual NOTE The command line terminators are not usually shown explicitly in this manual Commands entered on a keyboard connected to the controller are executed when ente
56. ent to set new values only for the axes to be changed Range X Y Z 0 0001 0 5 mm U V W 0 0001 0 5 deg SST X Y Z U V W X Y Z U V W linear and rotary axis designators follow each keyword by numeric value in mm or deg defaults are all 0 01 SST Y0 002 U0 05 Sets the step size for axis Y to 2 um and for U to 50 mdeg none Troubleshooting Parameter out of limits SST Get Step Size Description Format Response www pi ws Get step size setting being used for manual position control pad SST X vvvvviSP LF Y vvvvviSP LF Z vvvvvSP LF U vvvvvSP LF V vvvvvSP LF W vvvvviLF SP space LFI line feed F 206 MP 36E Release 3 5 0 Page 88 System Commands Piezo Nano Positioning PI STOP Stop Motion Description Format Arguments Stops all motion immediately except fast scan motion including motion of separate axes A amp B if present clears any unexecuted commands from the queue and sets the error code to 10 This command is executed immediately not queued behind other commands awaiting execution STOP and 24 are identical but 24 is to be preferred because under certain conditions STOP may not be recognized at typing speed With current firmware the command queue is flushed and the actual position calculated so that a subsequen
57. ept fast scan motion including motion of separate axes if present clears any unexecuted commands from the queue and sets the error code to 10 This command is executed immediately not queued behind other commands awaiting execution but may wait for fast scan motion to finish STOP and 24 are identical but 24 is to be preferred because under certain conditions STOP may not be recognized at typing speed With current firmware the command queue is flushed and the actual position calculated so that a subsequent POS command will give the correct value and other motion commands can be allowed 24 ASCII character 24 none none With firmware older than 6 0 the queue is not cleared In case of a MOV or INI failure as a consequence of a hardware failure use the 24 command to quit these commands in order to continue with diagnostic commands 27 ESC System Abort Description Format Arguments Response www pi ws System abort this command is executed immediately not queued behind other commands awaiting execution may wait for current fast scan command to finish Motion of the platform stops immediately except all servo registers are reset the servo loop is disabled The controller emits a continuous beep at 300 Hz For restart the controller must be manually reset or turned off and on power switch 27 ASCll character 27 none none F 206 MP 36E Release 3 5 0 Page 99 Piezo
58. er MAR Move and Respond Identical to the MOV command see below except that two separate one line responses are given one when the motion of the platform actually begins and one when the motion of the platform completes Some versions of the Control software may not recognize these responses as valid and instead display an error message even though the command executes properly The MAR command sends 1 when the platform move actually begins and 0 at its end Separate stages should not be commanded with the MAR command since strut movements will be ignored completely when the on line responses are generated The use of singe char polling commands should be avoided while using this command to prevent problems in the data flow protocol MOV Move Absolute Description Move F206 and or separate motorized or piezo axes Units X Y Z F 206 linear axes in mm WWwW pi ws F 206 MP 36E Release 3 5 0 Page 73 System Commands Format Example Response Piezo Nano Positioning PI K L M mm with P 611 NanoCube piezo axes K L M correspond in order and direction to X Y Z marked on stage Handedness of P 611 differs from that of F 206 U V W deg the direction of the axis around which a V move is calculated depends on the U position the W axis direction depends on both U and V positions See page 36 for details Units for A B depend on connected stage The values are interp
59. er current P address and Subnet mask settings if any in case they need to be restored later 5 Make at least the first portion of IP address identical to that of the IP address of the controller factory default 192 For the other portions of the PC s IP address choose values from 1 to 254 with at least one of them different from the controller s Set Subnet mask to a valid value with no binary 1 s in any position where the controller and PC addresses differ examples are 255 0 0 0 255 255 0 0 and 255 255 255 0 To apply the changes confirm with OK in this window and then in the Properties window of the LAN connection 6 Use the Search for Controllers feature of PIMikroMove or PlTerminal to establish the connection between PC and the controller If no controller is found then it may be helpful to return to Step 5 and try 10 169 or 172 in the first portion of the PC IP address with a subnet mask of 255 0 0 0 Make sure such settings are not used on a machine connected to a network or the Internet 4 2 3Controller Side IP Parameters NOTE The controller side IP parameters can only be changed over the TCP IP connection If the controller is set to obtain its IP address automatically not default then the appropriate IP address service must be available to it otherwise it may not be possible to establish a connection at all Use a browser on the PC to change the controller side IP parameters over the TCP IP conne
60. erminal software 5 C to 50 C Max 340 W incl mechanics and all built in options 2 x IEC 4 AT see p 105 180 x 450 x 460 mm 19 rack 11 kg F 206 VVU visible range F 206 iiU IR range 2 2 5 nW 10 mW 5 nW 10 mW 0 10V 0 10V 12 bit 12 bit 10 kHz 10 kHz 300 Hz optical input 10 kHz analog input 300 Hz optical input 10 kHz analog input either 1 F 206 VVU or 1 F 206 iiU can be installed in the controller F 206 MP 36E Release 3 5 0 Page 117 Piezo Nano Positioning PI Technical Data T 1K Optical L 1 10 100 1000 Analog In In I Out Fo Poul gt e pe D TOM PGA 202 45V T Offset E Digital m 15K 10K gt 12 bit Latch gt Qt n t ISA bus lt AD BNO L xf T NSN Gain A I 40 kHz Fig 68 Optical board schematic diagram showing the separate optical and analog to digital converters NOTE To use the optical FC input the optical converter analog OUT must be looped back to the A to D converter IN connector on the card A BNC cable for this purpose is included 12 2 1 Responsivity Sensitivity F 206 vis Board 100 90 80 70 60 50 40 30 20 10 0 400 500 600 700 800 900 1000 1100 1200 Wavelength Relative Responsitivity Fig 6
61. es for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup F 206 MP 36E Release 3 5 0 Page 55 System Commands Piezo Nano Positioning PI CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately Description Fig 34 Format Arguments NOTE Fast angular scan Executes a 2 dimensional angular scan in the axes specified in ax ax can be the UW VW or UV The voltage at the analog input specified by A is read gt 500 sec during motion The scan starts at the current position and returns to this position if the programmed threshold level L is not exceeded The distance between the scan lines is defined by S If L is exceeded during the scan the system stops at this position Default L 1 V S 0 02 deg A 1 FAS ax L S A ax axis pair specification can be UW VW or UV followed by scan area size in deg L Threshold level at analog input S Distance between scan lines A indicates which analog input or which optical power meter F361 to use Can be 1 2 or 5 If omitted A1 is used If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present
62. eserve all packing materials in case the F 206 ever needs to be shipped again Fig 1 F 206 packaging includes shipping case with foam inserts a cardboard box cage and top b WWw pi ws F 206 MP 36E Release 3 5 0 Page 11 Quick Start Piezo Nano Positioning PI Fig 2 F 206 itself comes i gt The size and elasticity of the packaging has been calculated to prevent damage to the equipment during shipping mounted on a wooden baseplate for shipping ry Be sure not to get the baseplate upside down when reshipping The protruding rings not shown should face downwards Wrap the F 206 and baseplate in foil wrapping before placing in cardboard box Aaa ca Prior to use the transport cover must be removed and the platform mounted Mount the moving platform on the intermediate low weight platform as shown in Fig 3 All 12 screws should be used to provide a secure and stiff connection CAUTION Avoid Damage Do not lift the F 206 by the top platform Z Fig 3 Remove shipping protection cover and install the platform before use www pi ws F 206 MP 36E Release 3 5 0 Page 12 Quick Start Piezo Nano Positioning PI 2 2 Mounting The F 206 may be mounted in any orientation but different load limits apply to loads not on the Z axis and to loads applied when the unit is switched off see Technical Data table p 116 Be sure not to exceed the load limits while installing your application
63. esting Actuators and OPM ii eiccacesiencceeieecver ctinstiuecessontiecenics 103 ODA SMUt NE PEE AE AE EEE 103 9 3 Optical Power Meter Test cccccccccceccceeceeceeeeeeeeeeaeeeeeenes 104 Maintenance 105 10 1 Fuses rear panel lower left cccecceesseereceeeeeeeeteeeses 105 LoD A A EAE E E AE 105 103 Disposal Sse e a a 106 PC Cards amp Options 107 11 1 TCP IP Interface 0000eennnneennnnnnennrreneseserrnrnrrrneeesrrernnrnneeeeesne 107 11 2 Control for Additional Separate Axes sssssennrennrnn reenn rene 107 113 GPIB IEEE 488 Communications Option ee 107 114 Manual Control Pad ccc ceceeecsecceccseeeeeeececeeeeeeeneeeneeeneees 108 12 13 14 Contents 115 Optical Analog Signal Inputs 109 11 5 1 Optical Power Meter cccecceeeeeeeceeceeeeeeeseeeeaaeeeeeeeeeeees 110 11 52 Optical Board with 0 10 V Analog Input 0 0 eeee 111 11 53 Optical Input on E 760 Piezo Controller Board 000 111 116 E 760 Piezo Axis NanoCube Controller Board 0 112 11 7 Installing Add On Cards in the F 206 Controller 113 Technical Data 116 12 1 F 206 Mechanics Specifications eeeeeeeeeeeteeeeeeees 116 122 F 206 Controller sisien n ates 117 N22 RESPOMSIVILY e a a E aE TE TI 118 123 F 361 Optical Power Meters OPM sseenesesseeeeeeenn 119 124 E 760 Piezo NanoCube Controller with Opt
64. factory default 4 2 1 Via Local Area Network If a local area network is available a straight through cable can be used to connect the controller to a network access point Some newer network access points also support use of a cross over cable If the factory default IP settings are not compatible with the network then they may have to be changed using the direct connection described in Section 4 2 2 Once connected over TCP IP the controller can be assigned a different fixed address or configured to obtain its IP address automatically from a server e g DHCP The IP address can be confirmed over the connection with the Search for Controllers feature of PIMikroMove or PlTerminal if IP 0 0 0 0 appears select the line with a single click and the actual address will appear in the Address field in the upper right www pi ws F 206 MP 36E Release 3 5 0 Page 23 Piezo Nano Positioning PI Communication with the Controller PI Terminal 5 2 0 5 oxi m Connection Interface Static text Connect GCS DLL m Terminal Connect x History p rse TCP IP Hostname TCP IP Address 192 168 1 28 Port 10001 MPI Controllers Search for controllers Identification IP Address PHYSIK INSTRUMENTE PI Hexapod 0 Y5 1 7 010807900 192 168 1 28 10001 Page Setup Mercury ni i Fig 11 The Connect dialog in PIMikroMove or PITerminal can be used to dete
65. ge 64 System Commands Piezo Nano Positioning PI NOTE If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed Example FSM YZ0 1 L1 S0 001 A2 Performs a scan in the YZ plane over an area of 0 1 mm side length with 1 um distance between the scan lines A threshold level of 1 V should be reached for analog input 2 Response T if there is a maximum which exceeds the threshold level 0 if no maximum was found or maximum was lower than the threshold Troubleshooting Parameter out of range FSN Fast Scan CAUTION WARNING Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble Large scanning ranges are not recommended partly because for example a 2 mm scan may incur a deviation of up to 11 4 um from the desired trajectory which if unexpected could damage the attached setup Description Fast scan Executes a fast scan following a WWwW pi ws trajectory described by
66. he F 206 controller is very similar to Pl s General Command Set which is implemented for most PI motion controllers Non compatible commands differ usually only in some minor way The system comes with control software for running on a host PC see the appropriate software manuals for details regarding the use of this software Alternatively the system can be controlled with custom software or manually with a keyboard and monitor connected directly to the controller see p 33 The commands described in this section can be entered with the direct input facilities of the host software or on a keyboard connected directly to the controller Custom software must either send the commands as ASCII strings over the interface or use the DLL or COM libraries described in their respective manuals 7 1 Command Structure F 206 controller native commands are almost all GCS compatible Because there are a few differences all the commands are described in detail in this manual as they function with the F 206 controller 7 1 1 Mnemonics and Arguments Command mnemonics and keyword arguments such as axis designators are not case sensitive Most mnemonics are 3 letters in length Query commands end with an additional question mark Some special commands end with an additional exclamation point and IDN has an initial asterisk One group of commands consists of a single ASCII character The characters used are not alphanumeric th
67. he power on button Since this button is also used to access configuration menus it is labeled menu enter Inconsistent baud rate settings at F 361 and in the F 361 DAT configuration file F 361 connected to configured for incorrect serial port With optical board F 361 DAT file exists in controller C HEXAPOD directory thus deactivating access to any optical boards Rename this file VEL Set Velocity NOTE Even though F 206 axis designators can be specified the F 206 velocity as a whole is set not the speeds in the specific directions Description Set velocity to be used for moves Range 0 004 to 10 mm sec For platform motion VEL is the speed in the direction of the velocity vector For moves with rotation components the velocity considered is that of the fastest joint point on the platform The allowable velocity settings for separate axes A and B depend on stages configured Format VEL X MIZ IUINVIIW K L M A B www pi ws F 206 MP 36E Release 3 5 0 Page 94 System Commands Arguments Examples Response Piezo Nano Positioning PI VEL v No matter which if any of the F 206 axis designator keywords X Y Z U V W is used the value following the keyword if present at all in mm s is the velocity limit for the platform as a whole If more than one of these axes is specified the associated values must be the same K L M piezo axes designators will be igno
68. i ws F 206 MP 36E Release 3 5 0 Page 90 Piezo Nano Positioning PI System Commands SVO Get Servo State Description Reports the servo state of the F 206 and axes A and Format SVO X Y Z U VI WI K L M A B Response if 0 for servo is off evoked without any parameters Example SVO XYUAB 1 for servo is on Response in case servo is on X 1 SP LF Y 1 SP LF U 1 SP LF A 1 SP LF B 1LF SP space LF line feed NOTE Axes X Y Z U V W A and B always have the same servo state Troubleshooting Command awaiting execution in queue WWw pi ws F 206 MP 36E Release 3 5 0 Page 91 System Commands Piezo Nano Positioning PI TAV Settings for use by TAV This command addresses F 361 Optical Power Meters OPM only and can not be used to address an optical board To use this command an F 361 configuration file with an entry for the specified OPM must be present in the C HEXAPOD directory of the controller and an F 361 must be properly connected and switched on See the F 361 User Manual for details Description Format Arguments Default values Background www pi ws Sets measuring unit and measuring range for an F 361 OPM optical power meter TAV A UuW UmW UdBn RO R1 A Optical Power Meter can be 1 or 2 if not specified OPM 1 will be addressed U Unit where
69. ical Input 120 Connectors and Pinouts 121 13 1 F 206 MeChanics ccceeeeeeeeeeeeeeeeeeeeeeeeeeeseeeseeeeeeeseeeeeeees 121 132 Controller and Options 0 ccc ceeseeeeeeeeeeeeeeeeeeeeeeeeseeeseeees 122 Dimensional Drawings 126 Piezo Nano Positioning PI Introduction 1 Introduction The F 206 hexapod six axis positioning system consists of the positioner and a controller A keyboard and monitor on the controller either built in or connected as peripherals can be used to control the system directly or more commonly the controller can be controlled from a host PC connected to it over an RS 232 TCP IP or optionally a GPIB IEEE 488 link The mechanics uses a parallel kinematics positioning system The mechanics contains six linear actuators with leadscrew drives and optical encoders The system provides six degrees of freedom and a minimal incremental motion of 0 1 um The workspace limits are not parallel to the axes but they cannot exceed a rectangular solid that is given by the X Y and Z travel ranges The controller is equipped with firmware that allows definition of a pivot point anywhere inside or outside the F 206 workspace Rotation about that pivot point can be commanded for any combination of the three rotation axes The digital controller also handles complex positioning and motion tasks including scan and align routines using optical or analog feedback signals from up to 2 power
70. ikroMove on the host PC select the communication mode and appropriate host side parameters PIMikroMove will lead you through initialization of the mechanics automatically With a terminal program first send an innocuous command like HLP LF the answer reports all commands that are currently available in the controller Next make sure that nothing will be damaged by motion of the platform to its central position and type in the initialize command to reference the axes INI LF Watch the system it will move to the INI position Even if the system is close to the INI position a small movement of all struts can be observed because they always approach their reference points from the same direction Next type in the simplest move command WWw pi ws F 206 MP 36E Release 3 5 0 Page 32 Communication with the Controller 4 6 1 Piezo Nano Positioning PI MOV Z1 LF Watch the system All struts will move as to move the platform by 1 mm Similarly in PIMikroMove command a few moves with the buttons in the Axis list window See the PIMikroMove manual for more details Direct Control The Hexapod system comes in versions with built in keyboard and display An external keyboard included and display can be connected to all versions Main Screen The main screen shows a graphic display of the hexapod position the current position pivot point coordinates maximum veloc
71. in mm L Threshold level at analog input S Distance between scan lines SA Step size for auto align recommended 0 0005 0 002 mm A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used NOTE If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed www pi ws F 206 MP 36E Release 3 5 0 Page 60 System Commands Example Response Troubleshooting Piezo Nano Positioning PI FSA YZ0 1 L1 S0 01 SA0 001 A2 Performs a scan in the YZ plane with 0 1 mm side length with 10 um distance between the scan lines If a threshold level of 1 V for analog input 2 is found during the scan the system stops at this position and proceeds with an automated alignment using a step size of 1 um T if the automated alignment was started 0 if the automated alignment was not started Parameter out of range FSC Fast Scan with Abort Description NG Fig 46 Executes a scan in the ax plane ax can be the YZ XZ or XY plane The voltage at the analog input specified by A is read gt 500 sec du
72. itioning PI and A5 the optical input on the E 760 piezo axis controller if installed See p 109 for details Description Format Arguments Example Set number of readings of the analog signal to average in order to determine its level Subsequent TAV commands will reply with the average of the specified number of readings Range 1 to 10000 Default N 1 A1 NAV N A N Number of readings A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used NAV 10 A2 The next TAV A2 command will reply with the average of 10 readings of the analog input 2 NAV Get Number of Values Used by TAV NOTE To use this command at least one analog input optical board E 760 piezo cotroller or external power meter must be installed See p 109 for details If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed See p 109 for details Description WWwW pi ws Reports the programmed number of readings of the analog signal to be averaged when a value is required F 206 MP 36E Release 3 5 0 Page 77 System Com
73. ity setting and key assignments Fig 18 Main screen on F 206 Hexapod controller with MOV W5 in last command line Key Function S Initialize system INI command Move one step in the specified direction using step size U V W set with Doo Executes the commands starting in line 5 of DEMO DAT z e l rl Open a command entry pane close it with ESC Show hide axis channel A amp B display Open field to set step sizes for X Y amp Zand U W amp W www pi ws F 206 MP 36E Release 3 5 0 Page 33 Communication with the Controller 4 6 2 Piezo Nano Positioning PI Command Entry Pane Fig 19 Command entry direct on F 206 Hexapod controller exit with ESC to activate other buttons The direct command interface and one remote interface can be active at the same time Remote commands are shown below the command entry field as they arrive Useful keys are ENTER Repeat the last entered command Close the Command Entry pane While the Command Entry pane is open the shortcut buttons visible around it like F10 EXIT on the screen are not available Nor are multi character representations of single character commands accepted Firmware Update Upgrade It is not possible to send firmware changes over the ASCII or TCP IP interface Firmware updates and upgrades are applied using removable media The update upgrade will be accompanied by a Technical Note containing installation i
74. izontal mounting www pi ws F 206 MP 36E Release 3 5 0 Page 13 Quick Start Piezo Nano Positioning PI 2 4 Connection and Startup 1 Connect the F 206 mechanics and the controller using the cables supplied DC power for the F 206 mechanics is also drawn from the controller for standard F 206s 24 V Note that some controller sockets are for special versions or options and are otherwise unused 2 If you ordered control of the optional separate motorized axes with the system order number F 206 AC8 it will be delivered with these axes preconfigured Otherwise use the software upgrade diskette in the controller to configure the interface for the stages in question see p 107 for details 3 If you have ordered the optional E 760 piezo axis controller it will be delivered preinstalled and precalibrated with the mechanics See the E 760 and Nanocube documentation for more information Note that information there on commanding the controller card is not of importance as this task is handled by the F 206 controller in response to the commands it receives 4 Verify that the mechanics is not at the end of a travel range or in contact with any object that might hinder movement 5 Connect controller to host PC using the appropriate cable for the interface you will be using e g the included null modem cable for the RS 232 interface If using TCP IP connect the PC directly to the controller with a cross over network cable or c
75. l IP Configuration Hostlis C Obtain IP address automatically Channel 1 Auto Configuration Methods aot BOOTP Enable Disable Email DHCP Enable Disable AutolP Enable Disable Triggers DHCP Host Name l Configurable Pins Apply Settings Use the following IP configuration Apply Factory Defaults IP Address 192 168 1 28 Subnet Mask 255 255 255 0 Default Gateway 0 0 0 0 Ethernet Configuration Auto Negotiate Speed 100 Mbps 10 Mbps Duplex Full Halt ox Fig 13 Controller side network settings as accessed over the TCP IP interface with a browser 4 Confirm with OK and on the next screen choose Apply Settings www pi ws F 206 MP 36E Release 3 5 0 Page 27 Piezo Nano Positioning PI Communication with the Controller 5 A progress bar will appear When it has completed the unit will reboot with the new settings dropping communication if the address has been changed Please wait while the configuration is saved The unit will reboot in order for the settings to be applied Fig 14 Progress bar appears after Apply has been selected If communication is lost and you wish to see the mask with the new settings again reestablish it in the address line of the browser 4 2 4Host Software Parameters Once a TCP IP connection has been established and enabled as the ASCII command interface it is necessary to get the host software to use it The current versions
76. l with almost all PI controllers PIMikroMove application for Microsoft Windows platforms is operating software for this and many other PI controllers With PIMikroMove you can start your motion system host PC controller and mechanics immediately without writing customized software PIMikroMove offers motion control displays and features that in many cases make it unnecessary to deal with ASCII command formats It also has a complete command input facility which lets you experiment with various commands easily PIMikroMove uses the GCS DLL described below to command the controller GCS LabVIEW drivers to communicate with the system from the National Instruments LabVIEW environment not included using the GCS DLL see GCS LabVIEW Manual MS93E GCS DLL Windows DLL Library The GCS DLL is an intermediate layer providing easy access to the controller from Windows programs The use of the DLL and the functions it contains is described in a separate manual MS181E Most of the DLL functions correspond directly with the commands of the PI General Command Set OPM Test Windows program for testing the optional F 361 optical power meter directly on the host PC F 206 Simulation Software collection making it possible to simulate a controller and mechanics and if desired to run the simulation in an emulated PC running in a Windows window in the same PC as the host software F 206 MP 36E Release 3 5 0 Page 6 Introdu
77. llowed by scan area size in deg L Threshold level at analog input S Distance between scan lines A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used F 206 MP 36E Release 3 5 0 Page 54 System Commands Piezo Nano Positioning PI NOTE If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed Example FAM VW0 1 L1 S0 001 A2 Performs a scan in VW over an area of 0 1 deg side length with 1 mdeg distance between the scan lines The maximum intensity in the scanning area should exceed 1 V for analog input 2 Response T if there is a maximum which exceeds the threshold level 0 if no maximum was found or maximum was lower than the threshold Troubleshooting Parameter out of range FAS Fast Angular Scan CAUTION www pi ws Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning rang
78. mands Format Arguments Response Troubleshooting Piezo Nano Positioning PI NAV A A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used N 1 to 10000 Command awaiting execution in queue NLM Set Negative Soft Limit NOTE Soft limits are only respected if soft limits are activated by SSL Description Format Examples Response Troubleshooting NLM Description Format www pi ws Sets the negative soft limit for the specified Hexapod axis All limit values must be negative so that the zero point cannot be excluded from the working space The platform can be moved only if the target position lies inside the soft limits If the platform is outside the soft limits the platform may move to positions that are inside the soft limits All soft limits are initialized with values stored in the configuration files factory defaults are same as travel range limits NLM X Y Z U V W X Y Z U V W linear and rotary axis designators of the Hexapod NLM X 1 NLM Y 2 Z 2 W 2 none Parameter out of limits Get Negative Soft Limit Gets the negative soft limit for the specified Hexapod axis NLM X Y Z U V W X Y Z U V W linear and rotary axes of the Hexapod F 206 MP 36E Release 3 5 0 Page 78 System Commands Examples Piezo Nano Positioning PI NLM without any
79. meters Additionally two separate PI stages and a 3D piezo system NanoCube can be driven and complex macro sequences in the BasMac language can be recorded and executed on the controller see the BasMac User Manual The F 206 mechanics can be mounted in any orientation but different load limitations apply 1 1 Model Survey The following models are available m F 206 S0 MicroMotion Hexapod Positioning System m F 206 SD_ MicroMotion Hexapod Positioning System with Controller with Built in Display and Keyboard If you have a custom version some portions of this manual may not apply or may be superceded by a Technical Note The following accessories are available for use with the F 206 WWwW pi ws F 206 MP 36E Release 3 5 0 Page 4 Introduction Piezo Nano Positioning PI GPIB card for faster communications between controller and host PC order number F 206 13E Optical Analog Input Board infrared order number F 206 iiU visual F 206 VVU External configurable high precision and highly stable optical power meter F 361 Interface card for attaching 1 or 2 optical power meters F361B0001 Manual Control Pad F 206 MC6 and interface board C 855 60 Firmware upgrade to control two additional separate motor driven axes software upgrade order number F 206 AC8 Driver card E 760 for controlling a three axis piezo nanopositioner NanoCube P 611 If you have a custom design some portions of thi
80. ned 1002 No macro recording 1003 Invalid MAC parameter Format ERR Arguments none Response Error number Troubleshooting Command awaiting execution in queue FAA Fast Angular Line Scan to Maximum CAUTION Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately www pi ws F 206 MP 36E Release 3 5 0 Page 51 System Commands Description Fig 31 NOTE Piezo Nano Positioning PI Fast angular line scan to maximum Executes an angular scan in the ax direction ax can be the U V or W The voltage at the analog input specified by A is read gt 500 sec during motion The scan starts at the current position and returns to this position if the programmed threshold level L is not exceeded If the maximum intensity during the scan exceeds the threshold level the stage is moved to that position after the scan Default L 0 1 V A 1 Because of the out of plane motion during a
81. ngle channel optical boards are no longer supported 11 5 1 Optical Power Meter One or two external F 361 Optical Power Meters can be connected to the system The F 361 is highly flexible configurable can be delivered with a certificate of accuracy and is equipped with three photo diodes each having different sensitivities and different built in ranges so that a wide range of power can be measured precisely The F 361 is described in detail a separate User Manual F 361s are connected to the controller over RS 232 interfaces See Section 11 7 for installation of the included Fig 63 Optical Power Meter serial port interface card in the and serial interface controller and see the F 361 User card Manual for other installation and configuration details For testing purposes the OPM can be connected to the host computer via the USB plug and play interface A Windows test program is included on the product CD for this purpose see p 104 NOTE No software is provided to coordinate an OPM cpmmected to the host with the F 206 For operation the F 361 must be connected to the F 206 controller via an RS 232 port The OPM s when configured in and connected to the controller can be accessed using the TAV TAV NAV and NAV commands WWw pi ws F 206 MP 36E Release 3 5 0 Page 110 PC Cards amp Options Piezo Nano Positioning PI 11 5 2 Optical Board with 0 10 V Analog Input The single channel F 206 00U
82. nstructions Follow the www pi ws F 206 MP 36E Release 3 5 0 Page 34 Communication with the Controller Piezo Nano Positioning PI instructions very carefully in some cases breaking off an installation or repeating steps can have adverse effects If the instructions require booting from a drive other than C and the controller boots from C even with the medium inserted then the controller boot sequence must be changed press DEL while booting to get to the BIOS Setup where the boot sequence is under Advanced There the first boot device should be the removable media drive the second the HDD and Boot Other Device must be enabled www pi ws F 206 MP 36E Release 3 5 0 Page 35 F 206 Coordinate System Piezo Nano Positioning 5 PI F 206 Coordinate System 5 1 Translation and Rotation Axis Definitions Translations linear moves are all measured relative to the position of the platform after an INI command Angular moves are referenced around the pivot point If the pivot value is 0 0 0 it is located relative to the platform as shown in Fig 20 Reference X 72 58 mm Z 13 48 mm Pivot Point 0 0 0 a with F 206 at INI A Fig 20 Location of pivot point after start up initialization Translations Translations XYZ moves are measured relative to the position of the platform after an INI command All translations XYZ moves are performed on an interp
83. o be restored for later operation The following steps may vary in some details depending on the language and version of the operating system on the PC 1 Follow the Start Settings Control Panel Network and Dial up Connections Local Area Connection menu sequence 2 Inthe Local Area Network LAN status window click the Properties button 3 Inthe Properties window of the LAN connection make sure Internet Protocol TCP IP is checked and open its Properties window Internet Protocol TCP IP Properties easy General You can get IP settings assigned automatically if your network supports this capability Otherwise you need to ask your network administrator for the appropriate IP settings Adapt P address and Subnet mask do not change the Default gateway setting Use the following IP address IP address 192 168 0 10 Subnet mask 255 255 255 0 Default gateway 192 168 0 2 Use the following DNS server addresses Preferred DNS server Click OK Eee Fig 12 Internet Protocol TCP IP Properties window the settings shown are only examples and may not match those you wish to use for your PC 4 Inthe Internet Protocol TCP IP Properties window Fig 12 activate Use the following IP address Make a note of the WWw pi ws F 206 MP 36E Release 3 5 0 Page 25 Piezo Nano Positioning PI Communication with the Controll
84. ogress bar or any other feedback will be seen on the controller s monitor MOV can move the F 206 platform but not the separate axes During MOV motion all commands except MOV MAR FSN MWG MVC FSN MOV and INI will be performed immediately These commands will be queued until the MOV target position is reached before executing During MOV motion it is the strut velocities that are limited by the velocity value set with the VEL command rather than the platform velocity As a consequence of this F 206 velocity will depend on its position and orientation and may be slightly higher than expected MWG Move Without Graphics Description This command is identical to the MOV command but is slightly faster because no graphics will be displayed or position information updated on the controller s monitor Cannot be used for separate axes NAV Set Number of Values for TAV NOTE www pi ws To use this command at least one analog input optical board E 760 piezo controller or external power meter must be installed If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board F 206 MP 36E Release 3 5 0 Page 76 System Commands Piezo Nano Pos
85. olated straight line path That means all struts start and stop their moves at the same time and their velocities are calculated accordingly For pure translations the orientation of the platform stays unchanged Rotations For rotations the current pivot point is taken into consideration It can be set with the linear coordinates R S T defined relative to the 0 0 0 point located along the centerline of the mechanics at an offset from the top platform surface which is given in Fig 20 Note that R S and T move with the platform the pivot point translates with platform XYZ moves Any rotations U V and W moves are performed about www pi ws F 206 MP 36E Release 3 5 0 Page 36 F 206 Coordinate System Piezo Nano Positioning PI the current pivot point The pivot point value cannot be changed unless the platform is parallel to the X Y plane U V W 0 The final position after a move with rotation components is calculated by considering the UVW position components in the order U then V then W This is done without regard to whether these values were explicitly given in the current command or the result of previous commands Furthermore the actual motion to the final position so calculated is smooth with all motion components executing concurrently Note that the INI command does not reset the pivot point from its previous value The pivot point start up default coordinate values are set in lines 35 37 of the Hexdata dat file on
86. onnect both controller and host to network connection points with straight through cables see Section 4 2 NOTE Use Correct RS 232 Sockets With an RS 232 link on the F 206 controller side you will be using RS 232 port COM1 labeled RS 232 On the host PC side any available COM port can be used If the system was ordered with the optional F 361 Optical Power Meter OPM an additional RS 232 board is installed in the controller with two sockets labeled OPM1 and OPM2 These sockets are only for connecting F 361 OPMs 6 Power up host PC and F 206 hexapod controller See Troubleshooting p 102 if you suspect that the controller is not booting properly 7 Install the host software on the host PC The software package supports a common installation WWwW pi ws F 206 MP 36E Release 3 5 0 Page 14 Quick Start Piezo Nano Positioning PI procedure A setup program guides you through all installation steps using interactive dialogs This program setup exe E is located in the root directory of the F 206 hexapod software CD that comes with the system After running the setup program the host software is ready to use 8 If you are planning to use TCP IP to communicate with the controller make the correct settings as described in Section 4 2 9 Start the PIMikroMove host software on the host PC In the Start up controller window select Hexapod as controller type and select the communications link used in step 5 If u
87. r WWw pi ws the F 206 system Verify that jumpers JP1 and JP2 on the C 855 60 manual pad control interface board are both open base address 0340 hex Install the interface board in the F 206 controller see Section 11 7 below Connect the cable of the manual control pad to the newly installed control board Switch on the controller firmware versions newer than hex0030 exe required The manual pad should be recognized automatically F 206 MP 36E Release 3 5 0 Page 108 PI PC Cards amp Options Piezo Nano Positioning The step size to use for each axis can be set using the SST command p 88 Troubleshooting If the controller does not have a built in display connect a standard VGA monitor to it Switch on the controller and observe the controller boot process on the monitor The firmware detects the board automatically and a green colored Manual control board available message appears If no such board is installed a red colored message reading Manual control board not available can be seen 40 900000 7 000100 57 420000 5 42001 28800 000000 7 000100 22 570000 63 58001 6 500000 7 000100 6 600000 6 06001 1 000000 7 006100 6 600600 41 01001 2 000000 7 000100 50 600000 50 00001 10 000000 7 000100 0 000000 9 00001 7 100000 6 600100 42 5860000 42 58001 6 000100 4 430000 6 42001 6 000100 0 000000 0 00001 6 000100 42 560600 42 58001 6 000100 47 430000 6 42001 6 00
88. r is connected to the mechanics with a special shielded control cable and a PWM amplifier power cable Data transfer between the Hexapod controller and the host PC is based on a TCP IP RS 232 or optionally a GPIB link This technique allows data transmission over large distances or remote locations if required www pi ws F 206 MP 36E Release 3 5 0 Page 20 Piezo Nano Positioning PI Communication with the Controller e Communication with the Controller The controller is itself a PC based system A directly connected keyboard and monitor can be used to change certain operating parameters and enter commands directly see p 33 but this is not necessary in normal operation Some models have a built in display and keyboard and all models have connections for external VGA monitor and keyboard After starting the system almost all activity direct or via the host will be displayed on the monitor connected to the controller if present Fig 10 F 206 Hexapod controller with RS 232 TCP IP and GPIB optional connections circled All operating commands to be performed by the controller can be sent via the communications interface Some configuration changes e g firmware update must be made at the controller itself either with a keyboard and monitor or via removable storage media The standard controller comes equipped for RS 232 and TCP IP communication RS 232 at 56 kbaud is activated as factory default A GPIB
89. r key is pressed pressing on a blank line reececutes the previous command 7 1 3Report Terminator Report messages responses are terminated by line feeds LF If a report consists of more than one line all lines but the last have a single space SP ASCII 32 20h preceding the line feed This fact can be used to determine whether the controller has more data to send Response terminators are shown in this manual for some multi line responses only WWw pi ws F 206 MP 36E Release 3 5 0 Page 44 System Commands Piezo Nano Positioning PI 7 2 Command Reference Calphabetical CAUTION Enter only valid commands Commands with incorrect syntax can have unexpected results The fact that error codes exist for syntax errors does not guarantee that all syntax errors will be recognized Unrecognized syntax errors can lead to execution of the command with altered parameters IDN Get Identity Number Description Reports the controller device ID Format IDN Arguments none Response One line response similar to PHYSIK INSTRUMENTE PI F 206 0 V5 1 1 2510399LF AAP Fast Automated Alignment Procedure CAUTION Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amo
90. ral plus angular scan Troubleshooting Parameter out of range Example FIO YZ0 1 S0 01 ARO 1 L1 A2 Performs a linear spiral scan in YZ over an area of max 0 1 mm side length with 10 um step size The angular movement covers 0 1 deg for axis U A threshold level of 1 V should be reached for analog input 2 FSA Fast Scan with Automated Alignment CAUTION Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately www pi ws F 206 MP 36E Release 3 5 0 Page 59 System Commands Description Fig 45 Format Arguments Piezo Nano Positioning PI Fast Scan with Auto Align This function is based on the FSC command On exceeding the Threshold level L during the scan the auto align procedure see AAP command is automatically executed Default L 1 V S 0 01 mm SA 0 001 mm A 1 FSA ax L S SA A ax axis pair specification can be YZ or XZ followed by scan area size
91. red A B separate axis designator keywords the allowable velocity settings and units depend on the stages configured VEL 3 sets the velocity of the F 206 to 3 mm s VEL X3 sets the velocity of the F 206 to 3 mm s VEL W3 sets the velocity of the F 206 to 3 mm s VEL A0 02 sets the velocity of the separate axis A to 0 02 units as defined for that axis VEL X3 U3 sets the velocity of the F 206 to 3 mm s VEL X1 U3 will cause an error message since velocity settings are inconsistent none Troubleshooting Parameter out of limits www pi ws Specified separate axis not configured or F 206 AC8 software option not installed Specified separate axis unit size parameter incorrect F 206 MP 36E Release 3 5 0 Page 95 System Commands Piezo Nano Positioning PI VEL Get Velocity Setting Description Format Arguments Response Reports the current velocity setting for the F 206 as a whole in mm s and or for the specified separate axes in mm s or deg s depending on stages configured rounded to 3 decimal places VEL X Y Z U V W K L M A B X Y Z U V W linear and rotary axes of the F 206 K L M NanoCube axes return 0 0 A B separate axes Axis vvvvSP LF Axis vvvv LF Value of the velocity setting s currently in effect Even though F 206 axis designators can be specified and reported the F 206 velocity setting as a whole is
92. reted as floating point format Internal accuracy for all transformations is 18 digits The controller checks whether the specified target position can be reached directly before it starts motion If it cannot or if any separate axis is out of range motion will not be started Axes not explicitly mentioned in the command retain their current positions so it is sufficient to set new positions only for the axes to be moved MOVI XIE YJE ZIE UJE VIE WIL KIE LJE MII All B X Y Z U V W linear and rotary axis designators of the F 206 K L M separate piezo axes A B separate motorized axes Follow each axis keyword by numeric target in mm or deg After initialization the system position is X 0 Y 0 Z 0 U 0 V 0 W 0 The new command is MOV Y3 245678 X1 23 V4 56789 The new target position is X 1 23mm Y 3 2457mm Z 0mm U Odeg V 4 5679deg W Odeg After a new command MOV Z1 2 the new target position is X 1 23mm Y 3 2457mm Z 1 2mm U Odeg V 4 5679deg W Odeg The pivot point is set by the SPI command See the discussion on page 36 for a description of the rotation axis definitions none Troubleshooting Specified target position out of limits www pi ws F 206 MP 36E Release 3 5 0 Page 74 System Commands Piezo Nano Positioning PI MOV Motion Complete Description Motion complete The system reports 1 when the F 206 platform motion is complete This command is run af
93. ring motion The scan starts at the current position and returns to this position if the programmed threshold level L is not exceeded If L is exceeded during the scan the system stops at this position Distance between scan lines is defined by S Defaults L 1 V S 0 01 mm A 1 The controller automatically reports 1 on exceeding the specified threshold level L and motion stops If the threshold is not exceeded 0 is reported at the end of the scan WWw pi ws F 206 MP 36E Release 3 5 0 Page 61 System Commands Piezo Nano Positioning PI CAUTION The scanning path is trajectory controlled only for YZ and XZ scans Using FSC for XY will result in a wobbly motion with runout Large XY scanning areas gt approx 1 0 mm are not recommended because they may result in out of plane motion of gt 2 um Make sure the attached setup will not be damaged CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately Format Arguments FSC ax L S A ax axis pair specification can be YZ or XZ followed by scan area size in mm L Threshold level at analog input S Distance between scan lines A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used NOTE If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 D
94. rmine IP addresses of connected controllers Timeout milliseconds fiooo OK Cancel When the controller is detected attempt to establish a connection either with PlTerminal or with a browser If the controller is not found or no connection can be established then it will be necessary to change network or controller settings To change controller settings in this situation connect it directly to a PC as described in the next section 4 2 2 Direct Connection to PC When no network is available or the network connection could not be established for some reason you can try connecting the controller directly to an Ethernet socket in the host PC using a cross over cable This may be necessary as a temportary measure just to change the controller s IP settings to make it compatible with the network For the direct connection you may need to change the network settings of the PC The PC and controller must be configured to be on the same subnet i e the PC and controller IP addresses must be identical in all positions where the subnet mask expressed in binary has 1 s note 255 decimal is all 1 s in binary To change the PC IP address and subnet mask proceed as follows WWw pi ws F 206 MP 36E Release 3 5 0 Page 24 Piezo Nano Positioning PI Communication with the Controller NOTE Be sure the PC is not connected to a network before changing the settings and note the previous settings if they have t
95. ro recording mode will not be entered an error code will be set and controller will beep MAC END End macro recording ERR after this command will show certain recording errors MAC DEL macroname Deletes specified macro MAC START macroname Starts execution of specified macro Responses to commands for the controller in the macro are not sent to the host directly see PRINT statement in BasMac User Manual A controller running a macro will respond directly to single character commands MAC ERR Show error messages from BasMac usually about a macro just run none Macro recording is active keywords BEG DEL ERR or inactive END Macro recording did not begin because macroname unsuitable MAC BEG TWIST CMD MOV W 5 END MAC END For more examples see BasMac User Manual F 206 MP 36E Release 3 5 0 Page 72 Piezo Nano Positioning PI System Commands MAC List Macros Description List macro names or contents of a given macro Format MAC lt macroname gt Arguments lt macroname gt name of the macro whose contents shall be listed if omitted the names of all stored macros are listed Response lt string gt if lt macroname gt is given lt string gt is the contents of this macro BasMac statements if lt macroname gt is omitted lt string gt is a list with the names of all macros stored on the controller one per line Troubleshooting No macro named macroname on controll
96. rom one channel is transferred to another channel within one chip For this application the alignment of the input channel requires the V simultaneous alignment of the output channel to get a signal Therefore the platform follows a linear spiral path and at each point of that spiral an angular scan is performed around Fig 35 the pivot point which needs to have been set to the location of the input or output channel Format FIO ax S AR L A Arguments ax axis pair specification can be YZ XZ or XY followed by linear scan area size in mm S Stepsize of the linear spiral AR Size of angle scan deg L Threshold level at analog input A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used NOTE If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed Response 1 if the threshold level was exceeded 0 if the threshold level was not exceeded WWw pi ws F 206 MP 36E Release 3 5 0 Page 58 Piezo Nano Positioning PI System Commands Fig 44 Fast l O scanning procedure performs linear spi
97. rt The advantages of this design are low weight high stiffness six DOF motion high resolution and no moving cables to cause drag or friction Fig 9 F 206 internal linkage with parallel linear actuators and constant length connecting struts It is not possible to cause excessive mechanical stress to a standard F 206 by driving the struts to some random position This may not be true of your attached application however see the SSL and other soft limits command descriptions WWw pi ws F 206 MP 36E Release 3 5 0 Page 18 Piezo Nano Positioning PI System Description 3 1 2 Referencing Upon power up an initialization routine must be first be run INI command during initialization each linear actuator is commanded to the absolute center of its travel range All positioning commands are referenced to this center position 3 1 3 Six Axis Motion Synchronization Even when the electronics drives the platform along orthogonal axes or around a fixed pivot point all six actuators have to be moved in harmony based on complicated interpolations to guide the platform along the expected trajectory All motion commands refer to a platform position defined by three linear and three rotational coordinate values The axes about which rotations are defined U V W are initially coincident with XYZ of the F 206 coordinate system Their intersection the pivot point can however be shifted with a user command by any amount desired
98. rumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings DANGER Indicates the presence of high voltage gt 50 V Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The software tools which might be delivered with F 206 MicroMotion Hexapod Positioning System are described in their own manuals Updated releases are available from the download area of www pi ws or via email contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introduction 4 1 1 Model Survey sch oiiase aes Oates Sages 4 12 Contents of Delivery isc scgciteaten sy andhelatans Coidatndeateescuienceanstabeern Ghee 5 13 Software Overview ccccccccccceeeseceeeecescaseeeseeeeeeeeesaeaeaseeeeeeees 6 14 Documentation OVErview cccccccccccccecescsseseseceeeesesessseeseeeeeeees 7 15 Safety Precautions siren de dicen tears teiten testes Autabie iprataauatesaenan adn 7 1 6 Prescribed Use csc eienen a seabed aa 9 Quick Start 11 21 Unpacking eanan ined Eaa aA A AARETE 11 22 MOUNN geeen ei Repel arn Mone AA EE i 13 23 LOA Calculation teirt e
99. s manual may not apply or may be superseded by a Technical Note 1 2 Contents of Delivery The exact contents are given in the packing list A standard system should include the following WWwW pi ws F 206 mechanics F 206 controller Mechanics controller connecting cables DC power and motor control Controller line power cord RS 232 null modem cable Ethernet TCP IP straight through amp crossover RJ45 cables US keyboard CD ROM with PIMikroMove Software LabVIEW drivers DLL additional software sample programs and documentation files latest releases are available for download from Www pi ws F 206 MP 36E Release 3 5 0 Page 5 Introduction Piezo Nano Positioning PI User Manual MP36E this document in printed form m Torx driver 8 m Allen wrench 1 3 Software Overview With the F 206 Controller all motion of the connected mechanics is programmed or controlled by software To offer maximum flexibility software interfaces at a number of different levels are provided and documented Most of the individual programs and driver libraries are described in separate manuals The included software and documentation is on the product CD but not all of it will be copied to host during the installation procedure Updated releases are available on www pi ws or via email contact your PI Sales Engineer or write info pi ws www pi ws PITerminal is a Windows program which can be used as a simple termina
100. s return to their power up defaults RBT none READ Read file Description Format Arguments Example Remarks WWwW pi ws Reads a file on the controller file system the file is sent line by line with a space and line feed added after the last line a blank line line feed only is sent indicating the end of transmission READ file file is a relative or absolute path and filename Relative paths are evaluated starting at C HEXAPOD READ HEXBRATE DAT The error code is always set to 0 Only files with certain extensions can be read Attempting to read a non existent or disallowed file results in no response F 206 MP 36E Release 3 5 0 Page 81 System Commands Piezo Nano Positioning PI SCT MOV Timing Configuration Description Format Arguments Example Default Response Specifies the time in which the motion specified in MOV commands is to complete Allows MOV commands to be sent periodically to avoid stutter effects in motion such as when system motion is controlled by an external servo loop MOV uses the cycle time set with SCT to adjust the velocity of the move so as to be close to the target at the end of the interval SCT T T cycle time ms max 10000 if omitted or 0 default MOV will use the VEL velocity setting If T is omitted SCT may need a trailing space SP to ensure command recognition SCT T29 p 0 none Troubleshooting Parameter out of
101. sing RS 232 make sure the baud rate setting is the same at the controller and the host PC the controller firmware defaults to 57600 baud Click Connect to continue 553 Start up controller 21x M 8x0 F 206 Hexapod 6 Axis Positioning System Rs 232 Tcp COM Port com x Baudrate 57600 C 843 PM 3 Start up axes C 702 S Version Info Connect Help Cancel Fig 5 PIMikroMove Start up Controller screen at Connect Controller step 10 Inthe screen that follows Configure Hexapod check the optional features you wish to use The separate axes and analog optical inputs checked must be installed properly and configured on the controller Click OK to continue www pi ws F 206 MP 36E Release 3 5 0 Page 15 Quick Start Piezo Nano Positioning PI Start up controller connected Hexapod on RS 232 COM1 57600 baud x r Additional axes Select additional axes which are connected to the Hexapod 1 Connect controller M Ais A Iv axis B Tz I ManoGube R Axes K L M gt 2 Configure hexapod m Select active analog input channels gt Channel 1 PPP ROTA F chenned 3 Channel 2 LF spn Ss I Channel 5 3 Start up axes J set next time on new connection OK Help Cancel Fig 6 PIMikroMove Start up Controller screen at Configure Hexapod step 11 In Step 3 Start up Axes you can reference the axes runs INI command Make sure that nothing will be
102. t Limits Description Format Examples WWwW pi ws Activates or deactivates soft limits set by the commands NLM and PLM for the specified hexapod axes SSL X Y Z U V W X Y Z U V W linear and rotary axis keywords for the Hexapod axes each followed by a value of 0 for OFF or 1 for ON SSL X1 Soft limits for Axis X are set ON activated SSL YO Z1 W1 Soft limits for axis X are set OFF soft limits for axes Z and U are set ON F 206 MP 36E Release 3 5 0 Page 86 System Commands Piezo Nano Positioning PI SSL Get Soft Limit Status Description Gets the soft limit status for the specified platform axes Format SSL X Y Z U V W X Y Z U V W linear and rotary axes of the Hexapod SSL without any arguments is interpreted as SSL XYZUVW Examples SSL Response SPI LF SP LF SP LF SP LF SP LF LF eana OO lt CN lt amp I SSL X W Response LF sx s 09 U aN Tl SP space LF line feed WWw pi ws F 206 MP 36E Release 3 5 0 Page 87 System Commands Piezo Nano Positioning PI SST Set Step Size Description Format Example Response Set step size for optional manual position control pad Units for X Y Z mm U V W deg The values are interpreted as floating point format It is suffici
103. t POS command will give the correct value and other motion commands can be allowed STOP none Troubleshooting Communication breakdown Remarks With firmware older than 6 0 the queue is not cleared In case of a MOV or INI failure as a consequence of a hardware faliure use the 24 command to quit these commands in order to continue with diagnostic commands SVO Set Servo on or off Description Set servo loop of the F 206 ON or OFF NOTE With the servo control loop OFF no positioning of the F 206 or axes A and B is possible Servo OFF is recommended during nanopositioning with piezo axes K L and M to prevent servo dither 1 encoder count equals up to 34 nm that could otherwise interfer www pi ws F 206 MP 36E Release 3 5 0 Page 89 System Commands Format Arguments Example Response Piezo Nano Positioning PI The SVO command always affects both the F 206 and the separate axes A and B To move the F 206 again the servo loop must be turned on again The INI command automatically turns servo on SVO n Or SVO X Y 2 U V W K L M A B 0 for servo off 1 for servo on SVO 1 Turns the servo loop on SVO U0 Turns the servo loop off none Troubleshooting Incorrect parameters NOTE The servo loop setting affects both F 206 and separate motor and piezo axes Therefore the following commands are identical SVO1 SVO X1 SVO A1 SVO M1 www p
104. tems are designed to operate under normal ambient conditions at least as listed here More stringent conditions given in the Specifications tables are of course also met m Indoor use WWw pi ws F 206 MP 36E Release 3 5 0 Page 9 Piezo Nano Positioning PI Introduction m Altitude up to 2000 m m Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations not greater than 10 of the line voltage m Transient overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 WWw pi ws F 206 MP 36E Release 3 5 0 Page 10 Quick Start Piezo Nano Positioning PI r Quick Start 2 1 Unpacking CAUTION Fragile Mechanics The F 206 mechanics can be permanently damaged by applying excessive force to the mobile platform To maintain a safety factor the maximum compressive force on this platform should never exceed 10N The maximum shock ac celeration on the system without the platform in stalled should never ex ceed 25g F 206 systems are usually b shipped attached to a wooden baseplate and with with the top platform replaced by a shipping cover These are a protective measures to avoid mechanical damage Remove the unit carefully Pr
105. ter all previous commands complete and no 1 is sent until the system has come to a standstill Format MOV Arguments none Response T when motion complete Troubleshooting Command awaiting execution in queue MOV Move To Absolute Position CAUTION The move is executed along a trajectory described by the initial and target linear and angular positions The motion does not follow the ideal trajectory exactly There is a wobbly motion occuring instead For large scanning trajectories for example 1 mm this may result in a deviation of gt 2 5 um from the desired trajectory which could cause errors or in rare cases even damage the attached setup Identical to the MOV command see above except that m During MOV motion a new target position can be set by a new MOV command When this is done the new target will be programmed immediately Motion will change in a smooth manner according to the acceleration limitation settings in the C842data dat configuration file entry By sending MOV commands at periodic intervals it is possible to avoid pauses in motion between moves Furthermore the MOV command adjusts the velocity so as to reach the target at the end of the interval which is set using the SCT command WWwW pi ws F 206 MP 36E Release 3 5 0 Page 75 System Commands Piezo Nano Positioning PI The MOV command will not refresh the current real position that is displayed on the controller monitor No pr
106. terchange axes A and B The CST command provides the name s of the configured stages Control of the piezo axes requires installation of an add on card in the controller as well See Section 11 7 for instructions if you order the card separately Typically a NanoCube 3 axis nanopositioner is connected to axes K L and M Note that the NanoCube axes are left handed 11 3 GPIB IEEE 488 Communications Option A GPIB also known as IEEE 488 interface card is available as F 206 I3E When installed and configured in the F 206 controller the controller will use that interface as its remote ASCII command WWwW pi ws F 206 MP 36E Release 3 5 0 Page 107 PC Cards amp Options Piezo Nano Positioning PI interface 1 Install the card as described in Section 11 7 below The default address setting is 4 Change the command interface configuration in the controller to GPIB as described in Section 4 4 2 p 31 11 4 Manual Control Pad The Manual Control Pad F 206 MC6 option is a useful addition for simplifying test setup and manual alignment procedures It consists of an interface board C 855 60 that installs in the F 206 controller and a control pad with six digital potentiometer knobs The control pad allows manual control in all 6 degrees of freedom with a variable step size Firmware versions newer than hex0030 exe support this option Fig 61 Six axis manual position control pad and interface board fo
107. th cards from National Instruments Consult the manufacturer documentation for further information Controller Configuration File Except for the controller side TCPIP configuration discussed in Section 4 2 3 controller side interface configuration changes must be made by editing a file on the controller file system The parameters include ASCII interface selection TCP IP RS 232 or IEEE 488 RS 232 baud rate default 57600 and IEEE address default 4 WWW CIGIGISIRIEIE ee RTT HAHAAHA OBE EUW Oe J OO Fig 15 Keyboard with US layout included with the hexapod system Editing HEXBRATE DAT To check or change settings you must access the HEXBRATE DAT file on the controller file system as follows 1 If your controller has a built in keyboard and display and you wish to use them go on to the next step Otherwise connect a standard PC keyboard US layout Fig 15 and VGA monitor to the appropriate connectors of the controller 2 Power up the Hexapod controller and after it boots exit the Hexapod software with F10 you will now have a DOS prompt 3 Inthe HEXAPOD directory use the EDIT command or alternatively the DOS Commander DC command to access the HEXBRATE DAT file SHEXAPOD gt edit hexbrate dat WWw pi ws F 206 MP 36E Release 3 5 0 Page 29 Piezo Nano Positioning PI Communication with the Controller Fig 16 DOS prompt above HEXBRATE DAT in editor below 4 HEXBR
108. the controller file system Factory default is 0 0 0 The evaluation of U V and W position specifications is illustrated below WWw pi ws F 206 MP 36E Release 3 5 0 Page 37 F 206 Coordinate System Piezo Nano Positioning PI The evaluation of U V and W position specifications is illustrated below Platform at INI position Platform at INI position Platform position of x y z U 10 and E Platform at a position x y z and U 10 U V 10 note direction of the V axis axis is always parallel to X always parallel to plane of platform X Y Z axes are shown displaced to avoid clutter pivot point set to upper left corner of platform In summary m Axis around which a U rotation is measured is always parallel to the X axis m V rotation axis direction depends on the U position E Platform at INI position E Platform position of x y z m W rotation axis direction U 10 V 10 and W 10 note direction of depends on both the U and V the W axis always normal to platform positions Fig 21 F 206 coordinate system interdependencies with pivot point set to upper left corner of platform www pi ws F 206 MP 36E Release 3 5 0 Page 38 PI F 206 Coordinate System Plazo Nano Fosltoning 5 4 Workspace The available XYZ workspace depends the values of the rotation coordinates U V and W as shown in the examples that follow NY NN Nie Nl f SS N RN AN Wi XYZ
109. tion cannot be reached directly from the current position Troubleshooting Command is executed only after all previous commands have executed and any associated motion finished 5 Query Motion Status WWwW pi ws F 206 MP 36E Release 3 5 0 Page 97 System Commands Description Format Arguments Response Piezo Nano Positioning PI Polls the motion status immediately 5 ASCII character 5 none Response sent immediately even if there are other commands waiting to be executed 0 motion complete system ready for new command 1 Platform is moving state of axes A and or B if present is not indicated 2 Only separate axis A is moving 4 Only separate axis B is moving 6 Only separate axes A and B are moving 6 Position Change Description Format Arguments Response Remarks www pi ws Asks if position has changed since last POS query 6 ASCII character 6 none Response sent immediately even if there are other commands waiting to be executed 1 Position of X Y Z U V W A B K L or M has changed 0 No position change During an INI command platform moving is always reported even if only the separate axes are being initialized F 206 MP 36E Release 3 5 0 Page 98 System Commands Piezo Nano Positioning PI 24 Stop Motion Description Format Arguments Response Remarks Stops all motion immediately exc
110. tioning PI R If R1 is specified the position after finishing the command will be the same as the position before If RO is specified the Hexapod remains at its last scan position C Describes whether the area scanned is centered around the current position or not Fig 51 FSN C1 centered CO startat parameters current position FSN YO 1 FSN X0 1 DO R1 FSN V0 1 C1 Let Xs Ys Zs Us Vs and Ws be the position when FSN is invoked The trajectory begins at Xs Ys Zs Us Vs Ws and stops at Xs Yst0 1 Zs Us Vs Ws Since DO invert is specified this command is interpreted as the command FSN X 0 1 R1 Here the resulting trajectory begins at Xs Ys Zs Us Vs Ws and stops at Xs 0 1 Ys Zs Us Vs Ws Having finished scanning a move to the start position of Xs Ys Zs Us Vs Ws will be executed Preparing to scan the Hexapod moves to the scan start position at Xs Ys Zs Us Vs 0 05 Ws The scan stops at Xs Ys Zs Us Vst0 05 Ws The Hexapod remains at this position See figure below F 206 MP 36E Release 3 5 0 Page 67 System Commands Response Fig 52 Before and after FSN V0 1 C1 Troubleshooting Parameter Charts Piezo Nano Positioning PI END OF SCAN XS YS ZS US VS 0 05 WS POSITION WHEN INVOKING FSN XS YS ZS US VS WS i START OF SCAN XS YS ZS US VS 0 05 WS 1 The maximum voltage reached the threshold level 0 The
111. ually 0 0 0 INI commands do not change pivot point settings Reference X 72 58 mm Z 13 48mm Pivot Point 0 0 0 with F 206 at INI Fig 53 Location of pivot point at start up after initialization WWw pi ws F 206 MP 36E Release 3 5 0 Page 84 Piezo Nano Positioning PI System Commands NOTE For the SPI command X Y and Z are simply aliases for R S T Example SPI RO 3 S22 T12 same as SPI X0 3 Y22 Z12 will set the pivot point to the position X 0 3 Y 22 Z 12 Example SPI R 72 58 35 0 T13 48 sets the pivot point to the corner of the platform Pivot Point Fig 54 Example showing how to set the pivot point to the corner of the platform www pi ws F 206 MP 36E Release 3 5 0 Page 85 System Commands Piezo Nano Positioning PI SPI Get Pivot point Description Format Response to SPI Response to SPI XYZ R vwwwviSP LF S vvvvwvSP LF T vvvvvLF X vwvvViSP LF Y vvvvwviSP LF Z VvVVLF Get pivot point Reports coordinates of pivot point as R S and T or X Y and Z SPI XYZ NOTE The pivot point moves with the platform but its R S T coordinate values do not change when doing so For the SPI command X Y and Z are simply aliases for R S T The values reported are always the same Troubleshooting Command awaiting execution in queue SSL Activate Deactivate Sof
112. unt of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup WWwW pi ws F 206 MP 36E Release 3 5 0 Page 45 Piezo Nano Positioning PI System Commands CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately Description Fast Automated Alignment Automated alignment part of the FSA command but works for combinations of both linear and angular axes 24 stops execution e g if tracking mode was commanded Default SA 0 001 mm N 3 Fig 30 A 1 Format AAP ax SA N A Arguments ax axis pair specification can be XZ YZ XZ UV or UW followed by scan area size in mm or deg SA Step size recommended 0 0005 to 0 002 mm default 0 001 mm N Number of repeated positions to stop procedure default 3 Use N 0 for continuous tracking A indicates which analog input or which optical power meter F 361 to use Can be 1 2 or 5 If omitted A1 is used NOTE If there is an F 361 Optical Power Meter OPM configuration file in the F 206 controller firmware file system C HEXAPOD F 361 DAT an OPM will addressed max 2 A1 and A2 and any other analog inputs present will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and
113. will not be accessible If that file does not exist A1 and A2 will address the corresponding optical board and A5 the optical input on the E 760 piezo axis controller if installed Example WWwW pi ws FAS VW0 1 L1 S0 001 A2 F 206 MP 36E Release 3 5 0 Page 56 System Commands Piezo Nano Positioning PI Performs a scan in VW over an area of 0 1 deg side length with 1 mdeg distance between the scan lines A threshold level of 1 V should be reached for analog input 2 Response 1 if the threshold level was exceeded 0 if the threshold level was not exceeded Troubleshooting Parameter out of range FIO Fast Input Output Alignment Procedure CAUTION Scan command runout may cause damage to the attached application The trajectory specified by the X Y Z U V and W parameters is not followed as exactly as motion initiated with a MOV command but rather with a certain amount of wobble For large scanning ranges for example 1 mm this may result in an additional deviation of up to 2 6 um from the desired trajectory which if unexpected could cause errors or in rare cases even damage the attached setup CAUTION During fast scan motion the STOP 24 and 27 commands may not take effect immediately www pi ws F 206 MP 36E Release 3 5 0 Page 57 Piezo Nano Positioning PI System Commands Description Scanning procedure for aligning waveguides or fiber arrays where light f
114. xapod PLM without any arguments is interpreted as PLM XYZUVW PLM Response X vvwvw SP LF Y vvvvvSP LF Z vvvvVSP LF U vvvvvSP LF V vvvvvSP LF W vvvwv LF PLM X W Response X vvvvvSP LF W vvvvvLF SP space LF line feed POS Get Position Description Format Examples www pi ws Get Position of the F 206 or separate piezo or motor axes No response unitl motion caused by certain commands completes POS X Y Z U V W K L M A B X Y Z U V W linear and rotary axes of the F 206 K L M Piezo axes with P 611 NanoCube piezo axes K L M correspond in order and direction to X Y Z marked on stage Handedness of P 611 differs from that of F 206 A B separate motorized axes POS without any parameters is interpreted as POS XYZUVW POS Response X VVVVWVISP ILF Y vvvvwviSP ILF F 206 MP 36E Release 3 5 0 Page 80 System Commands Piezo Nano Positioning PI Z VVVWVVISP LF U vvvvv SP LF V vvvvviSP LF W vvvvv LF POS A X Response A vvvvviSP LF X vvvvv LF ISP space LFI line feed RBT Reboot Description Format Arguments Restarts the hexapod controller All operating parameter

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