Advanced Test Equipment Rentals
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1. Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade Maximum Transmitted Beam Deviation 30 arc seconds Optical Efficiency Typical 75 Worst Case 71 M3x0 5 16 Places lt lt a 40 0 mm 1 57 86 30 0 mm 1 18 18 0 mm Aperture lt gt 30 0 mm 0 71 1 18 4 Places Figure 7V 4 Agilent 10770A Angular Interferometer User s Manual 7V 9 Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Specifications Agilent 10771A Angular Reflector Specifications Dimensions see figure below Weight 650 grams 23 ounces Materials Used Housing Stainless Steel 416 Apertures Plastic Nylon Optics Optical Grade Glass Adhesives Low Volatility Vacuum Grade M3x0 5 19 Places Ki 10771A S y Agilent Nodal Point Spacing 32 61 mm 72 6 mm 1 284 2 86 A 30 0 mm 1 18 18 0 mm Aperture 1 0 71 DIA 2 places m gt 30 0 mm 27 0 mm 1 18 1 06 40 0 mm 1 57 Figure 7V 5 Agilent 10771A Angular Reflector Product specifications and descriptions in this document subject to change without notice Copyright C 2002 Agilent Technologies Printed in U S A 07 02 This is a chapter from the manual tit2. s apertures are 18 0 mm in diameter With this aperture the beam spacing will be 11 0 mm This beam spacing 11 0 mm differs from that used for other interferometers This difference means that you cannot use the receiver s alignment aid to establish proper spacing between the receiver and the beam from the laser head to the interferometer Alignment target To help in aligning the Agilent 10770A Interferometer an alignment target Agilent Part Number 10767 67001 is included Alignment procedure There are two techniques for aligning the angular optics They are e Autoreflection Method and e Moving Dot Method 7V 4 User s Manual NOTE CAUTION Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Installation and Alignment Autorefl ection Method The principal alignment procedure for the angular optics is the same as that for the linear interferometer and retroreflector The following is the step by step procedure that corresponds to the example in Chapter 4 System Installation and Alignment of this manual In this case however the angular optics instead of the linear interferometer and retroreflector will be used on the X axis 1 With all optical components in place visually align the laser beam parallel to the axis of travel Do this by blocking the laser beam with a piece of paper and moving the paper along the axis of travel 2 With thelaser beam passing through the 5
3. the receiver s LED is ON and that the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F or 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A 7V 6 User s Manual Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Installation and Alignment COMPOSITE PATH fag and fp Agilent 10771A Agilent 10771A Agilent 10770A Angular Reflector Angular Reflector Angular Interferometer Position 1 Position 2 Laser Beam X gt reer FS ih isplaced Measurement Beams Travel Axis Laser Axis Figure 7V 3 Measurement beam dots movement User s Manual 7V 7 Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Operation Operation Accuracy considerations There are three error sources that are controlled by the operator 1 The accuracy depends on the nodal point spacing The optics must be temperature stabilized in the 15 to 25 degree C range or thermal expansion will change the nodal point spacing causing excessive error 2 Misalignment in roll effectively reduces the nodal point spacing in the plane of the measurement The accuracy specification includes allowance for 1 degree of roll misalignment by the operator 3 Theinitial angle must be near zero when the system is initialized or the measured change in angle will have an error The accuracy specification includes allowance for 20 arc minutes of ini
4. 0 beam splitter coarsely adjust optical components so the measurement beams strike the center of the receiver aperture Use the Moving Dot method described in the following subsection to do this 3 Place a referenced mirror between the interferometer and the reflector so the measurement beams from the interferometer strike this mirror Align the referenced mirror with a precision indicator until the mirror s reflective surfaceis perpendicular tothe direction of travel 4 Select the small aperture on the laser head by rotating the front turret 5 Adjust the laser head angularly until the beam reflects back on itself from the referenced mirror and is centered on the small aperture of the laser head 6 Lock down the laser head and interferometer securely Make sure the alignment is not disturbed 7 Reposition the reflector until the return measurement beams are centered on the receiver Select the large aperture on the laser head Placing a piece of translucent tape over the receiver lens will help in observing the impinging beams Do not let the tape adhesive touch any optical surface 8 Verify that the receiver s LED is ON and that the voltage at the receiver test point is between 0 6 and 1 3 Vdc for 10780C F or 1 5 and 8 0 Vdc for E1708A or 1 8 and 10 0 Vdc for E1709A User s Manual 7V 5 NOTE CAUTION NOTE Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflect
5. Alignment General considerations 1 Carefully read chapters 2 through 4 and Chapter 15 Accuracy and Repeatability and complete the following items before installing a laser positioning system into any application 2 Alignment of the angular optics is similar to alignment of a Linear Interferometer Read the alignment procedure for the Linear Interferometer given in subchapter 7A of this manual 3 Theangular interferometer must be located between the laser head and the angular reflector The beam from the laser head must enter the angular interferometer either through the single opening on one side for an in line measurement or through the opening in the bottom for a measurement along an axis perpendicular to the laser beam The side of the angular interferometer with two openings should always face the angular reflector 4 When initializing the laser measurement system the angular optics must be parallel to within 20 arc minutes to achieve the specified accuracy corresponds to 40 arc minutes misalignment by autorefl ection 5 Supply a rigid mounting surface for both optics The mounts should be adjustable for alignment The adjustable mounts available from Agilent for these optics include the Agilent 10785A Height Adjuster and Post The Agilent 10784A Base may be used as a support for the post Dimension drawings for these items are provided in Chapter 9 Accessories of this manual 6 The Angular Interferometer
6. L Advanced Test Equipment Rentals e lished 1981 www atecorp com 800 404 ATEC 2832 IN Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Description Description The Agilent 10770A Angular Interferometer and the Agilent 10771A Angular Reflector are normally supplied as part of the Agilent 55281A Angular Optics Kit They are shown in Figure 7V 1 These Angular Measurement optics are designed for usein a calibrator system such as the Agilent 5529A 55292A More detailed information about the use of these optics can be found in Agilent calibrator system user s documentation With these optics the angular rotation of the Agilent 10771A Angular Reflector can be measured over a range of 10 degrees o I Agilent 10770A Agilent 10771A Angular Interferometer Angular Reflector Figure 7V 1 Agilent 10770A Angular Interferometer and Agilent 10771A Angular Reflector Optical schematic Figure 7V 2 shows the laser beam path through the optics 7V 2 User s Manual Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Description The angular optics create two parallel beam paths between the angular interferometer and the angular reflector The spacing between the two paths 32 61 mm or 1 28 inches is precisely known because it is set by the optics and the retroref
7. lectors within the angular reflector Both components are positioned 32 61 mm apart at their centerlines The optics are initially set parallel to each other and the system is initialized COMPOSITE PATHS fA and fp Angular Angular Interferometer Reflector fo ere a ee Se ne ay l l fa l Beam ae aN r m m a m m l l l l A fatty il l l esse m a l j os l l fa fg Y A fB l From Laser Head a A 7 l l Fatty fg fg l il fptAfg To Photodetector lt 4 lt F i l i l Me 4 Ips ee ee 4 Figure 7V 2 Angular optics laser beam paths The two beam paths are initially the same length If either optic is rotated the relative path lengths will change This change will cause a Doppler shifted frequency change in the beam returned from the interferometer to the receiver The change will result in an indicated change in path length From geometry the angle of rotation is related to the change in relative path length by sin 0 D 32 61mm so 6 arcsin D 32 61 mm where 0 theangleof rotation and D theindicated change in relative path length in mm and 32 61 mm is the spacing of the retroreflectors in the angular reflector and also the spacing between the parallel beam paths from the angular interferometer to the angular reflector User s Manual 7V 3 Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Installation and Alignment Installation and
8. led Laser and Optics User s Manual For complete manual order Paper version p n 05517 90045 CD version p n 05517 90063 This chapter is p n 05517 90129 7V 10 User s Manual
9. or Installation and Alignment Moving Dot Method The principal steps used for the moving dot method of alignment are 1 The laser head and optics are mounted in their desired locations Select the small beam aperture on the laser head With the reflector as close as possible to the interferometer adjust any component laser head interferometer or reflector to center the measurement beams on the receiver aperture Placing a piece of translucent tape over the receiver lens will help in observing the impinging beams Take care that you do not let the tape stick to any optical surface 4 Move the reflector away from the interferometer If the laser beam is not parallel to the axis of travel the measurement beams will begin to move away from their original position on the receiver aperture The impinging beams will move until the beam is cut off by the edge of the interferometer s aperture Stop moving the reflector before the beam is blocked or when the end of travel is reached Figure 7V 3 illustrates this situation Adjust the laser beam by angularly moving the beam until the dots again overlap at the receiver This adjustment of the laser beam is accomplished by moving the laser head beam bender or interferometer depending on the optical layout Some translations of either the laser head or interferometer may also be necessary to achieve alignment 6 Select the large aperture on the laser head Verify that
10. tial angle The error in measured path length due to an initial angle error is given by Dt Dm amp in t sin 6t 0i sinei Where Dt thetruechangein path for the true angle of rotation t thetrueangle of rotation Dm the measured changein path length caused by an initial angle error and Qi the initial angle error Specifications Specifications describe the device s warranted performance Supplemental characteristics indicated by TYPICAL or NOMINAL are intended to provide nonwarranted performance information useful in applying the device Accuracy Angle measurements are accurate to 0 2 of calculated value 0 05 arc second per meter of distance traveled by the moving optic This assumes that the Agilent 10771A Reflector is aligned within 40 arc minutes using retroreflection techniques roll alignment by the operator is within 1 relative to the measurement plane and the temperature of all optics is stabilized in the range 15 25 C Resolution 0 06 arc second 7V 8 User s Manual 72 6 mm 2 Chapter 7V Agilent 10770A Angular Interferometer with Agilent 10771A Angular Reflector Specifications Range 36000 arc seconds 10 Axial Separation Typical with proper alignment 15 25 C distance between the laser head and the reflector 15 meters 50 feet Agilent 10770A Angular Inteferometer Specifications Dimensions see figure below Weight 553 grams 19 5 ounces Materials Used
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