User Manual PZ255E - Physik Instrumente
Contents
1. gt For applications with great temperature changes Only mount the S 334 on surfaces that have the same or similar thermal expansion properties as the S 334 20 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 5 Installation PIEZO NANO POSITIONING WWW PI WS NOTICE Damage from unsuitable cables Unsuitable cables can damage the tip tilt mirror and the electronics gt Only use cables provided by PI for connecting the S 334 to the electronics 5 2 Mounting the S 334 and Connecting it to a Protective Earth Conductor The S 334 can be mounted as follows Mounting on a surface with two screws Clamping in a clamping holder Figure 10 M3 holes of the S 334 2Sx1 for mounting on a surface and or protective earth connection Figure 11 Clamping width for mounting the S 334 2Sx1 by clamping S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 21 5 Installation gt I NOTICE Damage due to incorrect mounting Incorrect mounting can damage the S 334 gt When mounting the S 334 by clamping observe the maximum clamping width of 20 mm and the maximum clamping force of 30 N gt Only mount the S 334 according to the instructions in this manual INFORMATION The contact of the S 334 with the protective earth conductor is made as follows Two M3 holes in the base body of the S 334 marked with the symbol for the protective earth conductor Suitable conductive M3 screws When the S 332. AXIS 1 to SENSOR for channel 1 SERVO 1 AXIS 2to SENSOR for channel 2 SERVO 2 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 25 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ooooncccnncccccccoonncnnnnccnnnnonnncnnnonononenanonnnns 27 Operating TNS A o UA e 30 Discharging N AAA o e yA 30 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the S 334 in the case of malfunction or failure of the system If touch voltages exist touching the S 334 can result in minor injuries from electric shock gt Before start up establish contact between the S 334 and the protective earth conductor p 21 gt Do not remove the protective earth conductor during operation gt Make sure that the contact resistance is lt 0 1 Q at 25 A at all connection points relevant for mounting the protective earth conductor gt lf the protective earth conductor has to be temporarily removed e g for modifications reconnect the S 334 to the protective earth conductor before Starting it up again S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 27 6 Start Up and Operation E I NOTICE Destruction of the piezo actuator by electric flashovers The
3. corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Storage temperature 20 C to 80 C Transport temperature 25 C to 85 C Overvoltage category Protection class Degree of pollution Degree of protection according to IEC 60529 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 43 10 Technical Data i gt I 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 15 The dimensions for S 334 25D1 and S 334 2SL1 are identical L cable length Eos EURE MAN MA ii ing JOD Figure 16 S 334 2SL1 Position and dimensions of the cable splitter box 44 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 3 Pin Assignment 10 3 1 S 334 25D1 Sub D 25 m Piezo and Sensor Connection FEA A e e AAA DA A AAA 14 25 Figure 17 Piezo and sensor connector Sub D 25 m contact side SGS Y SGS signal axis 2 positive SGS Ref Y SGS reference axis 2 SES X SGS signal axis 1 positive SGS Ref X SGS reference axis 1 7 O 02 O 09 x 1 PZT X Piezo voltage axis 1 PZT Y Piezo voltage axis 2 100 V fix 100 V fixed voltage 4 4 4 4 4 4 i al il an O U SGS GND Y Ground SGS signal axis 2 SGSX 0000 SGS signal axis 1 negative SGS
4. displacement see controller manual or contact our customer service department p 39 Only with S 334 2SL1 gt Note the assignment of the axes to Axes were mixed up during the controller channels which is given connection by the calibration label of the piezo servo controller Operating temperature outside of the gt Contact our customer service permissible range p 41 department p 39 If the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 39 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 37 PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail mailto info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 39 PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 Technical Data In this Chapter SDRCHICANON ranita 41 PITTS SIONS terceros 44 FINAS SIC MIMI en East O anne ee O 45 10 1 Specifications 10 1
5. gt To order contact our customer service department p 39 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 13 3 Product Description E 3 6 Suitable Electronics Tip Tilt S 334 2SD1 E 616 SS0 multi channel servo controller driver for piezo tip tilt mirror platforms with SGS and differential drive E 616 5S0G multi channel servo 205 mm x 105 mm controller driver for piezo tip tilt mirror x 54 1 mm platforms with SGS and differential drive bench top device S 334 2SL1 E 509 53 sensor E 503 00S piezo E 501 00 91 2 Optional piezo servo control amplifier module chassis for modular E 517 13 module 30 to 130 V piezo controller interface display SGS sensors 2 channels system module 3 channels modified E 503 00 for 1 to 3 channels 24 bit D A S 330 S 334 S 340 TCP IP USB tip tilt systems RS 232 IEEE488 with one fixed voltage 3 channels of 100V two variable voltages gt To order contact our customer service department p 39 14 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 7 Control Ha LLM U Piezo Uin O 100 V me GND Figure 9 Differential drive of the piezo tip tilt mirror functional principle using the tilting of a single axis as an example 1 Piezo actuator 1 of the axis 2 Piezo actuator 2 of the axis 3 Moving platform with mirror The S 334 is a piezo tip tilt mirror with a differenti
6. 1 Data Table S 334 25D1 ECO CC FE AA da EU moas f BE BE osado ago fm apenas E de Resonant frequency under 20 load with standard mirrors Distance of pivot point to 0 1 mm platform surface Ceramic type PICMA P 885 pf axis S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 41 10 Technical Data i gt I S 334 2SL1 Tolerance 334 2SD1 a cee temperature BEE to 50 range Mn nn I I Sensor voltage connection LEMO connectors Sub D connector 25 pin Recommended controller Version with Sub D connector amplifier E 616 servo controller for tip tilt mirror systems Version with LEMO connectors E 500 modular piezo controller system with E 503 00S amplifier module three channels and E 509 controller 10 1 2 Maximum Ratings S 334 tip tilt mirrors are designed for the following operating data Maximum Operating Maximum Operating Maximum Power Voltage Frequency with Standard Consumption Mirror A A A With a rise time of the piezo voltage of 10 ms Maximum operating frequency with standard mirror for sinusoidal control signal 50 Hz 42 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 10 Technical Data PIEZO NANO POSITIONING WWW PI WS 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the S 334 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa
7. COD OF AP ee ee ee ee 13 AECESSOMOS ee een ee een 13 S itable ElSCHFONICS ctas 14 COMOT AAA 15 IO ati E taa 16 3 1 Model Overview Two standard versions of the S 334 tip tilt mirror are available RR AA S 334 25D1 High dynamics piezo tip tilt platform 50 mrad SGS Sub D connector incl mirror S 334 2SL1 High dynamics piezo tip tilt platform 50 mrad SGS LEMO connectors incl mirror gt For further technical data see the specifications p 41 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 7 3 Product Description E l 3 2 Product View Figure 1 Schematic product view of the S 334 without transport lock Case material aluminum Mirror on moving platform Cover plate Base body material titanium NDA N a Connection cable for piezo actuators and sensors Figure 2 Schematic diagram of the axes in relation to the cable exit 1 Axis 1 corresponds to tip tilt axis X on the E 616 controller 2 Axis 2 corresponds to tip tilt axis Y on the E 616 controller 3 Cable exit 8 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 3 Product Description Figure 3 Maximum displacement in the positive direction of motion around axis 1 Atthe connected channel 1 of the amplifier the output voltage Upiezo is 100 V The displacement shown is strongly exaggerated for better understanding Figure 4 Maximum displacement in the positive direction of motion a
8. o yn 5 General Safety Instructions ccccccccccoconnnccnnnncnonnnonnnennnnnonononancnnnnnnnononannnennnnnononenanennnns 5 Organizational Measures oooccccnncccconconnncnnonononononnncnnnononononannnnnnnnnnnnnnnnnnnnnnnnnnnananennnnnnns 6 2 1 Intended Use The S 334 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the S 334 is intended for the precise positioning and alignment of a mirror in two orthogonal axes with a common pivot point parallel kinematics The S 334 can be mounted in any orientation The S 334 is equipped with strain gauge sensors SGS The intended use of the S 334 is only possible in combination with suitable electronics p 14 that is available from Pl The electronics is not included in the scope of delivery of the S 334 The electronics must provide the required operating voltages To ensure proper performance of the servo control system the electronics must also be able to read out and process the signals from the strain gauge sensors 2 2 General Safety Instructions The S 334 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the S 334 gt Only use the S 334 for its intended purpose and only use it if it is in a good working order Read the user
9. use of the S 334 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the S 334 in environments that can increase the electric conductivity gt Only operate the S 334 within the permissible ambient conditions and classifications p 43 NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the actuator gt When the S 334 is not used but the controller remains switched on to ensure temperature stability discharge the S 334 p 30 NOTICE Impermissible mechanical load due to unsuitable control The S 334 is designed for the following control Maximum range of piezo voltage 0 to 100 V Minimum rise time of the piezo voltage 10 ms Maximum frequency with sinusoidal control signal 50 Hz Maximum frequency with 10 ms rise time of the piezo voltage 30 Hz An unsuitable control of the S 334 results in an impermissibly high mechanical load and can cause damage to the S 334 gt Set the control signal so
10. 34 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the S 334 in environments that can increase the electric conductivity gt Only operate the S 334 within the permissible ambient conditions and classifications A 43 NOTICE Destruction of the piezo actuator from short circuiting without a discharge resistor When a charged piezo actuator is short circuited without a discharge resistor this can lead to a contraction shock and thus to the destruction of the piezo ceramic gt Only discharge the S 334 according to the instructions in A AE S 334 p 30 NOTICE Damage when the mirror is removed The mirror of the S 334 may only be replaced by Pl Otherwise the S 334 can be damaged gt Donot remove the mirror of the S 334 gt If A o AA Sel need a different mirror contact our customer service department p 39 NOTICE Warping of the S 334 due to mounting on uneven surfaces Mounting the S 334 on an uneven surface can warp the S 334 Warping reduces the accuracy gt Mount the S 334 on an even surface The recommended evenness of the surface is lt 30 um
11. 4 is mounted on a surface via the two MS holes The surface is sufficiently conductive and connected to the protective earth conductor When the S 334 is mounted by clamping The protective earth conductor is connected to both M3 holes of the S 334 via two screws INFORMATION gt Observe the applicable standards for mounting the protective earth conductor Prerequisites v You have read and understood the general notes on installation p 19 v The S 334 is not connected to the controller v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories For the dimensions of the tip tilt mirror and the position and depth of the M3 holes see Dimensions p 44 When the S 334 is mounted on a surface You have provided a suitable surface The surface must be connected to a protective earth conductor 22 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 5 Installation Two through holes for M3 screws are present The holes for accommodating the screws have to be sufficiently conductive to ensure the proper functioning of the protective earth conductor The contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25 A The evenness of the surface is s30 um When the S 334 is mounted by clamping Suitable clamping holde
12. GND X Ground SGS signal axis 1 20 E A CA 2 EA 3 PZT GND Ground piezo voltage 4 PZT GND Ground piezo voltage 25 PZT GND Ground piezo voltage is 1 SGs SGS signal axis 2 negative is 1 2 3 8 4 an O 0 7 co 2 2 2 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 45 10 Technical Data Pp I 10 3 2 S 334 2SL1 LEMO Piezo and Sensor Connections ES Figure 18 Sensor connection LEMO connector FFA 0S 304 CLAC32Y contact side SGS Ref SGS reference reference m SGS signal negative SGS signal positive SGS GND Ground SGS signal Figure 19 Piezo connector 46 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old Pl equipment you can send it postage free to the following address Physik Instrumente PI GmbH Co KG Auf der R merstr 1 D 76228 Ka
13. NG the Transport Lock nsscnioniacirici id anne en 24 Connecting the S 334 to the Controller oooccccnnccccocononnconnnoconnnonnncnonoconononaconnnns 25 5 1 General Notes on Installation A Dangerous voltage and residual charge on piezo actuators The S 334 is driven by piezo actuators Temperature changes and compressive stresses can induce charges in piezo actuators After being disconnected from the electronics piezo actuators can also stay charged for several hours Touching or short circuiting the contacts in the connector of the S 334 can lead to minor injuries In addition the piezo actuators can be destroyed by an abrupt contraction gt Do not open the S 334 gt Discharge the piezo actuators of the tip tilt mirror before installation Connect the tip tilt mirror to the switched off Pl controller which is equipped with an internal discharge resistor gt Do not pull out the connector from the electronics during operation In the case of tip tilt mirrors with Sub D connectors a Touching the contacts in the connector can lead to an electric shock max 100 V DC and minor injuries gt Do not touch the contacts in the connector gt Secure the connector of the tip tilt mirror with screws against being pulled out of the controller S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 19 5 Installation gt I NOTICE Destruction of the piezo actuator by electric flashovers The use of the S 3
14. PI PZ255E S 334 Piezo Tip Tilt Mirror User Manual Version 1 0 1 Date 19 09 2014 This document describes the following products 334 2SD1 High Dynamics Piezo Tip Tilt Platform 50 mrad SGS Sub D Connector incl Mirror 334 2SL1 High Dynamics Piezo Tip Tilt Platform 50 mrad SGS LEMO Connectors incl Mirror Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PIO PICO PICMA PlLine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2014 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 19 09 2014 Document number PZ255E KSch Version 1 0 1 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this U
15. S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 7 Maintenance Packing the S 334 for transport Figure 13 Transport lock of the S 334 the arrows mark the recommended adhesion points 1 Fix the transport lock on the S 334 with double sided adhesive tape as shown in the figure above Figure 14 S 334 in the original packaging with dessicants 2 Pack the S 334 as shown in the figure above if possible S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 35 PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting 8 Troubleshooting No or uncontrolled Cable not connected correctly gt Check the cable connections p 25 motion Gonir llardefeeiive gt Contact our customer service Cable defective department p 39 Piezo ceramic defective after electric flashover 334 damaged due to open gt Contact our customer service loop operation department p 39 Reduced accuracy Warped base body Only mount the S 334 on surfaces with the following characteristics Evenness of at least 30 um The thermal expansion properties are similar to those of the S 334 e g surfaces made of titanium Impermissible clamping of the S 334 gt Observe the permissible clamping width and clamping force p 21 S 334 or controller has been After the S 334 or controller has been replaced replaced it is necessary to recalibrate the axis displacement gt Perform a recalibration of the axis
16. al piezo drive Tip tilt motions in two axes are realized by the pairwise interconnection of a total of four piezo actuators Both pairs of actuators are electrically connected in such a way that when the piezo voltage Upiezo is changed an increased voltage is applied to one actuator of a pair while the applied voltage on the other actuator is decreased by the same amount The actuator with the increased voltage expands while the other actuator with the decreased voltage contracts This produces the tip tilt motion For a simplified representation of the functional principle only one axis is shown in the figure above The moving platform is shown with a tilt of 0 When the control input voltage Un increases piezo actuator 1 expands and piezo actuator 2 contracts This produces a tilt in the positive direction S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 15 3 Product Description E Due to the type of interconnection both actuators of a pair always move in opposite directions It is thus impossible to command linear motions in the Z axis The position of the Z axis can change with temperature fluctuations however Due to the symmetrical design of the piezo tip tilt mirror temperature fluctuations do not cause the moving platform to tilt but cause the length of the piezo actuators to change evenly in the direction of the Z axis Most applications are not very sensitive to such deviations as long as the tip tilt angle does not
17. as a result of the optimum alignment of mechanical components and piezo actuators Loosened screws cause a loss in positioning accuracy gt Only loosen screws according to the instructions in this manual gt Do not open the S 334 NOTICE Damage when the mirror is removed aD The mirror of the S 334 may only be replaced by PI Otherwise the S 334 can be damaged gt Donot remove the mirror of the S 334 gt If you need a different mirror contact our customer service department p 39 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 33 7 Maintenance Fr I 7 2 Cleaning the S 334 NOTICE Damage due to incorrect cleaning The mirror of the S 334 can be damaged from applying force during cleaning gt Only clean the mirror when actually necessary gt Avoid exerting any force on the mirror during cleaning gt Do not use compressed air Prerequisites v You have discharged the piezo actuators of the S 334 p 30 v You have disconnected the S 334 from the controller Tools and accessories Bellows Optic brush Cleaning the S 334 gt Clean the surfaces and the mirror of the S 334 with bellows and or an optic brush without exerting force Do not use compressed air for cleaning Do not do any ultrasonic cleaning 7 3 Packing the S 334 for Transport Accessories Easy to remove double sided adhesive tape Suitable foil Transport lock p 17 34 Version 1 0 1 PZ255E
18. change The four piezo actuators of the S 334 are each equipped with a strain gauge sensor For this reason a servo loop with a sensor channel must be available to each pair of actuators in addition to the amplifier channel 3 8 Mirror The S 334 is equipped with a factory mounted mirror with the following characteristics Diameter 10 mm 2 mm thickness Surface accuracy 1 10 Surface quality 20 10 Parallelism 30 arc seconds 16 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4 Unpacking INFORMATION The S 334 is delivered with a transport lock gt To avoid scratches on the mirror surface during mounting it is recommended not to remove the transport lock until after mounting p 24 1 Unpack the S 334 with care 2 Compare the contents against the items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If there is any sign of damage or missing parts contact Pl immediately 4 Keep all packaging materials in case the product needs to be returned S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 17 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation oocccccccconncnnccononnnnnnnononnnnncnnnonnnnnnnnonnnnnnnononncnnnnnnnns 19 Mounting the S 334 and Connecting it to a Protective Earth Conductor 21 REMOVI
19. g operated INFORMATION In the case of a S 334 tip tilt mirror with Sub D connector ground loops can occur when the tip tilt mirror is grounded via its protective earth connection as well as by the shield of the connection cable for the electronics gt lf aground loop occurs contact our customer service department p 39 INFORMATION The S 334 2SL1 can also be optionally operated from a PC via a program such as e g PIMikroMove using the digital E 517 i3 interface module S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 29 6 Start Up and Operation E I INFORMATION The expansion of the piezo actuators depends on the ambient temperature and can vary by up to 10 in the given temperature ranges p 43 6 2 Operating the S 334 Prerequisites v You have read and understood the general notes on start up and operation p 27 You have read and understood the user manual of the controller If you use the E 517 i3 interface module You have read and understood the user manual of the interface module and the PC software You have properly installed the tip tilt mirror p 19 The controller and the required PC software have been installed All connections with the controller have been set up see user manual of the controller You have removed the transport lock p 24 You have ensured that the servo mode is switched on for all axes of the S 334 on the controller Operating the S 334 gt Follow the instructio
20. manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operator is responsible for the correct installation and operation of the S 334 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 5 2 Safety PI 2 3 Organizational Measures User manual gt Always keep this user manual available by the S 334 The latest versions of the user manuals are available for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the S 334 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the S 334 after having read and understood this user manual Personnel qualification The S 334 may only be installed started up operated maintained and cleaned by authorized and appropriately qualified personnel Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Model Overview ccccecceccececcecceceeceeceeceeeecuecueaecuecuesesaecuecueaeeaecueseeaeseesueseeaesueaeeaesneeneaess 7 PIOQUEL VIEW ea dera ren ee een datan 8 oi GE nase ee ee aan ee ee 10
21. n the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals Pl website gt Follow the corresponding instructions for downloading S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 3 1 About this Document I Download freely accessible manuals l 2 3 4 Open the website http www pi portal ws Click Downloads Click the corresponding product category Go to the corresponding product code The available manuals are displayed Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 2 3 Insert the product CD in the PC drive Switch to the Manuals directory on the CD In the Manuals directory open the Release News file including releasenews in the file name Find the user name and the password in the section User login for software download in the Release News Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer Log in with the user name and the password from the Release News In the directory of the corresponding product go to the Manuals sub directory Copy the desired manual to the hard disk of your PC or to a data storage medium Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter apo IS AAA E
22. n the connection cable of the S 334 25D1 A 334 2SL1 Labeling of the connection cables Warning sign Residual voltage Notice of risk of electric shock p 5 Figure 8 The cables of the S 334 2SL1 Sensor connection of axis 2 labeled AXIS 2 Sensor connection of axis 1 labeled AXIS 1 Piezo connection for 100 V fixed voltage labeled PZT 100V Piezo connection of axis 2 labeled PZT2 NDA ONS Piezo connection of axis 1 labeled PZT1 12 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 4 Scope of Delivery memo Components S 334 Piezo tip tilt mirror according to order PZ255E User manual this document in printed form S334T0001 Technical Note with handling information in printed form S334E0002 Transport lock 3 5 Accessories Order Description Number E 517 i3 Interface display module 24 bit D A TCP IP USB RS 232 IEEE488 3 channels P 891 05 Extension cable for piezo voltage LEMO connector s 5 m P 891 10 Extension cable for piezo voltage LEMO connector s 10 m P 892 01 Extension cable for strain gauge sensors LEMO connector s 1m P 892 02 Extension cable for strain gauge sensors LEMO connector s 2 m P 892 03 Extension cable for strain gauge sensors LEMO connector s 3 m P 892 05 Extension cable for strain gauge sensors LEMO connector s 5 m P 892 10 Extension cable for strain gauge sensors LEMO connector s 10 m
23. nnnnnnnnnnnonnnnnonononannnnnos 1 A A e POR PEPPER Fer Ed Eugen 2 Other Applicable DOCUMENTS cccccccncccnnccnnncccccnnnonccnnnnonononnonennnnnonononannnnnnnonononannnnnnnnnnnss 3 Downloading Manuals marine ica 3 1 1 Goal and Target Audience of this User Manual This user manual contains the information needed for the intended use of the S 334 Basic knowledge of servo systems drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual IN Dangerous situation If not avoided the dangerous situation will result in minor injury gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 1 1 About this Document INFORMATION PI Information for easier handling tricks tips etc Symbol Label 1 2 gt p 5 RS 232 AA 1 3 Figures Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item Cross reference to page 5 Labeling of an operating element on the product example
24. ns in the manual of the controller used for start up and operation of the S 334 6 3 Discharging the S 334 The S 334 must be discharged in the following cases Before installation If the S 334 is not used but the controller remains switched on to ensure temperature stability Before pulling out the connector e g before cleaning and transport of the S 334 and for modifications in the application The S 334 is discharged through the internal discharge resistor of the controller from Pl 30 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation Discharging a S 334 that is connected to the controller 1 Switch the controller off 2 Wait at least 10 seconds before pulling out the connector Discharging a S 334 that is not connected to the controller gt Connect the S 334 to the switched off controller from PI S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 31 7 Maintenance PIEZO NANO POSITIONING WWW PI WS 7 Maintenance In this Chapter General Notes on Maintenance ccccccccececcececcececccceccccececceccccecucaeceeauceeacsucueuecauaecass 33 Cleaning ihe A e mM en 34 Packing the S 334 for Transport ooccccnnccccccccnnccnnnncconononnnnnnnnnonononanennnnnnnnnnnnnncnnnnnnnnnnanos 34 7 1 General Notes on Maintenance NOTICE Misalignment from loosening screws The S 334 is maintenance free and achieves its positioning accuracy
25. ock For removing the adhesion points if necessary isopropanol and cotton swab Prerequisite v You have mounted the S 334 p 21 Removing the transport lock 1 Carefully remove the transport lock 2 If necessary Remove the adhesive strips for the transport lock and the adhesive residue with a cotton swab soaked in isopropanol 3 Keep the transport lock in case the product needs to be transported again later 24 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 4 Connecting the S 334 to the Controller Prerequisites v You have read and understood the general notes on installation p 19 v You have installed a suitable controller p 14 v You have read and understood the user manual of the controller v The controller is switched off Connecting the S 334 25D1 to the E 616 controller 1 Connect the connector of the S 334 25D1 with the corresponding socket of the controller see user manual of the controller 2 Secure the connection with the integrated screws against accidental disconnection Connecting the S 334 2SL1 to E 50x modules 1 Connect the piezo connections of the S 334 2SL1 to the E 503 00S piezo amplifier module as follows PZT1 to PZT for channel 1 CH1 PZT2to PZT for channel 2 CH2 PZT 100V to PZT for channel 3 CH3 2 Connect the sensor connections of the S 334 2SL1 to the E 509 S3 servo controller module as follows
26. otes on Start Up and Operation ooocccccccooonccnncccnnncconcnononccnnononanccnncnnnnns 27 6 2 Operating the S 334 oooooconcccnonoccncnononnccnnnnnnnnnonnnccnnnnnnonnnannnnnnnnnnnnnnnnnennnnnnnnnenans 30 6 3 Discharging the S 334 cococccnoccccccnoocccnnnncnconononccnnnnnnononnnncnnnnnnnnnnnnnnnnnnnnnnnnnnannnnnns 30 10 11 12 Maintenance 7 1 General Notes on Maintenance cccccccccececcececcecccececcececcececeecucaucecucuseceesaees 7 2 Cleaning the S 334 uussssessnnssnnnnnnnnennnnnnnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnnnnnnn 7 3 Packing the S 334 for TranSpoOrt ooocccccccccccoccnnnccnnnncconononnncnnnnnononnnannnnnnnnnnonenannnnnns Troubleshooting Customer Service Technical Data 10 1 Spone loa oil iii 10 1 1 Data Tal eo A 10 1 2 Maximum Ratings acacia 10 1 3 Ambient Conditions and Classifications oooocococcnnocincocincncnninnnnnno 10 2 o EE E EE ES asic stein ET A tein ace EE EE A 10 3 PIRASSIOHMEN anne Nee 10 3 1 S 334 25D1 Sub D 25 m Piezo and Sensor Connection 10 3 2 S 334 2SL1 LEMO Piezo and Sensor Connections Old Equipment Disposal EC Declaration of Conformity 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 About this Document In this Chapter Goal and Target Audience of this User Manual ooocccnncccccoonnnnccnnnccnnnnnonnccnnnnnononanannnnnns 1 Symbols and Typographic CONVONtIONS cccccccccccconnccnnnccnnonononennnn
27. r for optical components permissible clamping width of the S 334 see figure above Suitable protective earth conductor Cross sectional area of the cable gt 0 75 mm Two electrically conductive M3 screws of appropriate length p 44 Suitable tools Mounting the S 334 on a surface and connecting it to a protective earth conductor 1 4 Align the S 334 on the surface so that the M3 holes in the S 334 and the surface overlap Introduce the two screws through the holes in the surface into the base body of the S 334 from below Tighten the two screws Maximum screw in depth 4 mm Maximum torque 1 1 Nm Check that the S 334 fits without backlash Mounting the S 334 with a clamping holder and connecting it to the protective earth conductor gt Mount the S 334 in the clamping holder Permissible clamping width see figure above Maximum clamping force 30 N S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 23 5 Installation gt I gt Connect the protective earth conductor to the M3 holes marked with the symbol for the protective earth conductor in the base body of the S 334 via two screws Maximum screw in depth 4 mm Maximum torque 1 1 Nm 5 3 Removing the Transport Lock The S 334 is delivered with a transport lock Figure 12 Transport lock of the S 334 the arrows mark the recommended adhesion points Tools and accessories Suitable tool for removing the transport l
28. rlsruhe Germany S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 47 12 EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the S 334 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50581 2012 a laa S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 49
29. round axis 2 At the connected channel 2 of the amplifier the output voltage Upiezo Is 100 V The displacement shown is strongly exaggerated for better understanding S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 9 3 Product Description E l 3 3 Product Labeling S 334 25x1 JO 114010244 Country of origin Germany gt WN e UW Figure 5 Position of the product labeling for explanation of the labeling see table Figure 6 Product labeling on the bottom side of the S 334 10 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror PIEZO NANO POSITIONING WWW PI WS 3 Product Description The S 334 is labeled as follows 1 S 334 25x1 Product name example the places after the point refer to the model UN 2 114010244 Serial number example individual for each S 334 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers Country of origin Country of origin Germany 4 Warning sign Observe manual 5 WWW PI WS Manufacturer s address website amp Symbol for the protective earth conductor marks the position of the holes via which the S 334 is to be connected to the protective earth conductor Manufacturer s logo Old equipment disposal p 47 S 334 Piezo Tip Tilt Mirror PZ255E Version 1 0 1 11 3 Product Description E l S 334 2SD1 Labeling of the Sub D 25 m connector 1 Figure 7 Sub D 25 m connector o
30. ser Manual cccccessseceeeeeesseeeeeeeeeseeees 1 1 2 Symbols and Typographic CONVENTIONS ccooocccncccccnccnncccnnnnconnnonnnnnnnnnonnnnnnnononanenns 1 1 3 FOUG APRO OO ahammar ncacaneindesmneniadasesonacanibedudicibeda E E 2 1 4 Other Applicable DOCUMENTS ccccccccccocnnccnnnccconononncononononononannnnnnnnnnnnnnannnnnnnnonononano 3 1 5 Downloading Manuals ccccceecececeeeeeeceeeeeecaeeeeeeseeueeesseeeeeeaeuseeessueeessaneeeenaeees 3 2 Safety 5 2 1 o AAA ee ee 5 2 2 General Safety Instructions cccccccooccnnnccnnnccncnnnonnnnnnnnnnononannnnnnnnnnnononnnenononononnnans 5 2 3 Organizational MCASUMES cccccsssseceecceeeseceeeceaeseceeecseaeeeeeseseaeeeeesseaeeeeeesaaaeeeess 6 3 Product Description 7 3 1 es LO A y 7 3 2 mo A e PA 8 3 3 Product LaBbEliNd un een 10 3 4 Scope of Delivery vrai rai 13 3 5 FCCC SS OSS nee E E a 13 3 6 SUftable Eleeir flies u u a 14 34 o o E 15 3 8 E oo ee ie 16 4 Unpacking 17 5 Installation 19 5 1 General Notes on Installation ooccccccoconncnncccnooncnnnonnnanennnnononncnnonononncnnnnnnnns 19 5 2 Mounting the S 334 and Connecting it to a Protective Earth Conductor 21 5 3 Removing the Transport LOCK ooccncccocccnccccccncoconcnnononcnnnonanononnnncnnononcnnonancnnnnnos 24 5 4 Connecting the S 334 to the Controller cccooonnncnncccccnncnnccononnennnnononnennnnnnnns 25 6 Start Up and Operation 27 6 1 General N
31. socket of the RS 232 interface Warning signs affixed to the product that refer to detailed information in this manual For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 4 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals E 616 SS0 E 616 S0 multi channel servo PZ200E User Manual controller for piezo tip tilt mirrors platforms with SGS E 616 SS0G E 616 S0G multi channel servo PZ219E User Manual controller for piezo tip tilt mirrors platforms with SGS bench top E 509 S3 sensor servo controller module PZ77E User Manual E500T0011 Technical Note for Analog Drivers E 503 00S piezo amplifier module PZ62E User Manual E 501 00 9 5 chassis for modular piezo controller system E 517 13 interface display module PZ214E User Manual 1 5 Downloading Manuals INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 39 INFORMATION For some products e g Hexapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored o
32. that the piezo voltage stays within the limit values gt Only use the S 334 in closed loop operation 28 Version 1 0 1 PZ255E S 334 Piezo Tip Tilt Mirror 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS NOTICE ab Damage from start up with transport lock x If the transport lock has not been removed before start up the mirror can collide with the transport lock Collisions can cause damage to the mirror gt Remove the transport lock before you start up the S 334 p 24 INFORMATION Systems consisting of an S 334 and controller are calibrated at the factory to achieve optimum performance gt Note the assignment of the axes to the controller channels which is given by the calibration label of the piezo servo controller gt Do not change the dynamic servo control parameters of the controller e g P term and term for a system calibrated by PI Only when replacing system components gt If the controller or the S 334 has to be replaced recalibrate the axis displacement see controller manual or contact our customer service department p 39 gt If the controller has to be replaced set the dynamic servo control parameters see controller manual INFORMATION Sound and vibration e g footfall impacts can be transmitted to the tip tilt mirror and can affect its performance with regard to position stability gt Avoid transmitting sound and vibration while the tip tilt mirror is bein
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