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Manual - Stanford Research Systems

1. tt p Menu Monitor Process Chart Help PROCESS CONTROL Figure i PPM100 Front Panel 1 FILAMENT BUTTON Black w green LED Filament Emission power switch 2 E MULTIPLIER Black w green LED Electron Multiplier power switch 3 POWER Button Red w green LED Controller power switch 4 LINE LED Red Line voltage indicator 5 LCD Display w touchscreen Partial pressure and menu display area 6 PROCESS CONTROL LEDs green Process control channel indicator lights PPM100 Partial Pressure Monitor SRS Overview xi Touchscreen Display Overview Choose Partial Pressure or Input Setup Monitor Setup PP1 tf PP1 Measurement E Enabled Alarm Mass amu PP1 Scan rate Main Pressure Display format 13 14 we Pressure Trend graph 2 amu Torr Hydrogen Silent leak trend 2 3 PP1 Detector Faraday cup PP1 Correction factor Audio leak trend PP1 Name Hydrogen Set via library Hydrogen Auto scaling bar graph Full range bar graph 4 amu Torr Helium Status information Leak rate Help QuickKey o display help on an item ouch the Help QuickKey It becomes Main Menu The help is displayed xt 1313 hen se up and down to scroll Touch done to eturn to normal operation or ouch More for a list of related topics hoose a topic in the
2. DIGITAL TTL I O Use the female DB37 port to connect to the 1 eight Process Control TTL Outputs 2 eight Process Control TTL inputs and 3 seven Remote Control TTL inputs of the Process Control Board A male DB37 connector is provided to facilitate connection to the controller Figure iv The PPM100 DB37 TTL I O connector Module Description 1 PPM100 Vcc Remote Control 2 ANODE COM External User 5 V IN TTL IN 3 Not Used 4 Not Used 5 RGA_Degas Edge trigger J Degas On T Degas Off 6 RGA_FIL_Lockout Level LOW RGA emission Off 7 RGA_Key_Disable Level LOW Disable front panel Keypad 8 Not Used 9 Not Used 10 Clear_Data_Log Edge trigger J clear the data log 11 RGA_Remote_Enable Level HIGH Ignore RGA_Degas_On RGA_FIL_On RGA_EMULT_On pins PPM100 Partial Pressure Monitor ASRS ASRS Remote Control TTL IN Process Control TTL OUT Process Control TTL IN RGA_FIL_On Overview XV Description Edge trigger J FIL ON T FIL Off 13 Not Used 14 RGA_FP_Disable PPM100 Vcc TTL_OUT 5 Level LOW2 Disable Front Panel Controls TTL OUT for Channel 5 LOW ACTIVE 17 TTL_OUT_6 TTL OUT for Channel 6 LOW ACTIVE 18 TTL_OUT 7 TTL OUT for Channel 7 LOW ACTIVE 19 TTL_OUT 8 TTL OUT for Channel 8 LOW ACTIVE 20 ANODE COM Externa
3. Figure 3 19 Logging Setup Menu Display Format Select the log display format Table or Chart This also changes between the Table and Chart QuickKeys Important The PPM100 always stores readings from all enabled data sources in the data log However the chart and table only show data from the three measurements shown in the Pressure Display To display other measurements change sources in the ID Boxes of the Pressure Display Logging Enable data logging Log or disable data logging Pause Display Date Enable or Disable the Date Display in the Table format Enabled means that the date will be included in the time stamp in the Table format display This requires more lines per entry and fewer entries will be shown per page Disabled means that the date will not be included in the time stamp Enable this to keep track of the date through data logs that extend over more than one day PPM100 Partial Pressure Monitor ASRS Logging Display 3 33 ASRS Logging Interval Enter the Logging Interval The Logging Interval is the time between data log entries For example a 5 minute setting indicates that a complete set of pressure and analog input readings are added to the data log every 5 minutes The Logging Interval affects the time length of the log The data log stores a fixed number of entries thus the Time Length of the data log and the Logging Interval are directly related Use a small Logging Int
4. B Back Py a Back Pressure Monitor Process Main Help Pressure Monitor Process Remote Help Figure 7 2 Getting to the Web menu In order to use the EWS you will need to have a connection to the internet and some information about your network environment The best source of information about your network environment is your network administrator Here is a list of information you will need from that person 1 2 3 4 5 An IP Internet Protocol address for the instrument The IP address of a domain name server DNS The IP address of the gateway The address of a simple mail transfer protocol SMTP server The Subnet mask PPM100 Partial Pressure Monitor ASRS Installing the EWS 7 7 ASRS An IP address is made up of four bytes It is often expressed as a set of three digit numbers separated by a such as 209 239 160 084 The Internet protocol maps each machine s individual media access control MAC address to an IP address Every page you are served from the world wide web is actually from a machine with a particular IP address People have a difficult time remembering and using long strings of numbers so domain name servers DNS are in use You can think of these machines as a kind of telephone book they associate a particular IP address 209 239 160 084 with a string of characters www thinksrs com A DNS is not required to use the EWS but it can make your life a little easier
5. Figure 7 14 Process History SRS PPM100 Partial Pressure Monitor 7 22 Using the EWS Get Datalog The Get Datalog function downloads PPM100 log data to your computer via the web You can select data from four categories pressures analog port values relay states and TTL levels The data is downloaded either as a web page or as a comma separated variable csv file compatible with Microsoft Excel Web Output The number of log points in a web page is fixed at 10 points per data type Datalog Generated at 12feb03 at 15 44 Partial Pressures TIMESTAMP PPI 12feb03 15 44 05 950 09 332 10 139 08 170 07 12feb03 15 4403 950 09 413 10 8 170 07 921 09 418 10 aa 921 09 412 10 170 07 12feb03 15 43 57 921 09 412 70 07 12feb03 15 43 55 921 09 413 10 03 170 07 21 09 4 170 07 921 09 921 09 9 43 09 Capacitance Manometer Pressures TIMESTAMP CMI CM2 CM3 CM4 N A N A 1 2feb03 15 43 4 Figure 7 15 Web Output of datalog PPM100 Partial Pressure Monitor ASRS Using the EWS 7 23 ASRS CSV Output The CSV file is downloaded when you click Get Datalog If the browser is not set up to automatically handle a csv file the data will be displayed in the browser Users of Netscape Navigator can easily configure the browser to automatically launch Excel or another graphing program whenever a csv file is downloaded In Navigator 1 Go to Edit in the menu bar and choose Preferences 2 In the Category pane
6. Module Pin Name Description Process Control 20 ANODE COM External User 5 V IN TTL IN 21 TTLIN 1 TTL Input Signal for Channel 1 Active LOW 22 TTL_IN_2 TTL Input Signal for Channel 2 Active LOW 23 TTL_IN_3 TTL Input Signal for Channel 3 Active LOW 24 TTL_IN_4 TTL Input Signal for Channel 4 Active LOW 25 TTL_IN_5 TTL Input Signal for Channel 5 Active LOW 26 TTL_IN_6 TTL Input Signal for Channel 6 Active LOW 27 TTL_IN_7 TTL Input Signal for Channel 7 Active LOW 28 TTL_IN_8 TTL Input Signal for Channel 8 Active LOW 29 unused 30 PPM100 Ground 31_ PPM100 Ground PO Process Control 32 COM_EMTR_REF External User Ground TTL OUT 33 COM_COLTR_PULLUP External User 5 V IN 34 TTL_OUT_1 TTL OUT for Channel 1 LOW ACTIVE 35 TTL_OUT_ 2 TTL OUT for Channel 2 LOW ACTIVE 36 TTL_OUT 3 TTL OUT for Channel 3 LOW ACTIVE 37 TTL_OUT_4 TTL OUT for Channel 4 LOW ACTIVE Note J HIGH to LOW T LOW to HIGH transition ASRS PPM100 Partial Pressure Monitor 5 20 Process Control Input Circuit The TTL inputs are opto isolated from the PPM100 The schematic of a TTL input is shown below Anode COM Connect to O PPM100 Vcc external Vcc 5 to 15 Vdc 3 3k Internal TTL Signal TTL Input Pin Z i Pull low to O PPM100 Ground external ground PPM100 Figure 5 13 TTL input pin schematic For isolated operation of ALL TTL inputs connect ANODE_COM pins 2 and 2
7. Step 1 Starting from the Pressure Display Screen touch the Monitor QuickKey to access the Monitor Display Monitor t 11 22 PP2 apps tgiiPPa 28 2 09 09 256 07 3 95 06 Alarm High a Helium Water Nitrogen Pre dol aire 44 gt i 6 02 08 2 24 09 9 91 09 Monitor i Alarm Low Argon Pump oil CO 2 Kag EN pA Back P Pressure AnaloglO MassSpec Pressure Help Figure 1 6 Monitor Display PPM100 Partial Pressure Monitor ASRS PPM100 Quick Setup 1 15 ASRS Step 2 Select the Partial Pressure Box PP1 PP8 where you want the new single mass partial pressure readings to be displayed by touching it This brings up a Monitor Setup menu for the selected box Monitor Setup PP1 t PP1 Measurement E Enabled Alarm a Mass amu PP1 Scan rate 2 3 PP1 Name AgCHPP1 Detector Hydrogen Faraday cup Hydrogen Set via library g PP1 Correction factor 133 Hydrogen 1 2g Back P9 Oo Pressure Monitor Help Figure 1 7 PP1 Partial Pressure Box and Monitor Setup menu Step 3 Modify the Partial Pressure setup parameters based on the measurement requirements specific to the single gas to be monitored see Partial Pressure Parameters section below for details Once finished press the Back QuickKey to return to the Monitor Display Screen Step 4 gt Once finished modifying parameters touch the Pressure QuickKey to return to the original Pressure Display or sim
8. Active Manual Each Data Box contains four lines of information top to bottom e Channel Number and Description e Channel Active Inactive Message e Output status Active or Inactive e Mode Manual override or Auto Touch a Channel Data Box and choose an option to e Switch to Auto mode channel controlled by its Rules e Deactivate the channel manual override e Activate the channel manual override e Edit the channel s Rules for Auto mode e Edit the channel s Messages Auto Manual Channel Control To control a channel state manually touch a Channel Data Box and choose Active or Inactive To switch a channel to Auto mode controlled by its Rules touch a Channel Data Box and choose Auto GATE VALVE 4 OPEN Active Manual Edit rules Edit Messages Figure 3 21 Manual Channel control Tip All process channels must be set to a safe manual state either Active or Inactive prior to e accessing the MassSpec Display e calibrating the RGA electrometer e degassing the RGA e changing the Silent Audio Leak Trend mode in the Monitor Display PPM100 Partial Pressure Monitor ASRS Process Control Display 3 39 Edit Rules Menu ASRS Access the Edit Rules menu from the Process Control Display touch a Channel Data Box and choose Edit Rules Process Rules ROUGH VALVE Linked to E Percent Hysteresis 15 0 Delay 15 00 00 00 Gauge off DAC state S I
9. Examples LCPX Returns the value of Pmax in the current pressure units LCPX 1 3e 6 Sets Pmax to 1 3x10 in the current units LCVN 7 x Vmin LCVX x LCSA The LCVN command sets queries the value of the Chart Y Axis Vmin The parameter x is expressed in Volts Examples LCVN Returns the value of Vmin in Volts LCVN 10 0 Sets Vmin to 10 0 Volts Vmax The LCVX command sets queries the value of the Chart Y Axis Vmax The parameter x is expressed in Volts Examples LCVX Returns the value of Vmax in Volts LCVX 10 0 Sets Vmax to 10 0 Volts Autoscale Chart Y Axis The LCSA command Autoscales the Chart Y Axis This command has no effect unless the chart display is on the screen This command has no parameters and no query Example LCSA Autoscale the Chart display LCRG n ASRS Time Range The LCRG command sets queries the Chart X Axis Time Range The parameter n is a number of seconds 60 Examples LCRG Returns the X Axis Time Range in seconds LCRG 600 Sets the X Axis Time Range to 10 minutes 600 s PPM100 Partial Pressure Monitor 6 34 Logging and Charts LCSF Scale X Axis to Full The LCSF command Scales the X Axis to Full This sets Time Range to display all of the data in the log This command has no effect unless the chart display is on the screen This command has no parameters and no query Example LCSF Set the X Axis to the full log PPM100 Partial Pressure Mo
10. Prdrooen Show Storad Plot Enoi Status Description DIFF PUMP PWR PLLSED VALVE MECH PUMPS Get Chot Type Figure 7 11 Main EWS web page PPM100 Partial Pressure Monitor ASRS Using the EWS 7 19 Bookmarking the PPM100 You can add a bookmark to the PPM100 in your browser Be sure to rename the bookmark to something meaningful If you are accessing multiple PPM100 s make sure each bookmark is unique Monitoring the PPM100 The simplest use of the EWS is to monitor your data The EWS offers four distinct ways to monitor e Display a page with all active gauges and current relay states e Monitor selected parameters in an automatically updated window e Display the data log to see how your system is behaving over time e Display a graph of partial pressure versus time or partial pressure versus mass MassSpec Display Get Readings Get Readings reports the value of all inputs that are not in an error state as well as the process control relay states If a gauge reading does not appear use the Auto Monitor function described below to display the error state of the gauge Note that all analog ports which can be converted to capacitance manometer readings are listed twice the display shows both the analog voltage and the corresponding pressure value The system name default SRS PPM100 can be changed in the Main Remote menu of the PPM100 This is important if you are monitoring multiple units This scr
11. 5 17 5 17 5 17 5 17 5 18 5 18 5 20 5 21 5 21 5 22 5 22 5 22 5 23 5 23 5 24 5 24 5 24 PPM100 Partial Pressure Monitor ASRS 5 2 Process Control PPM100 Partial Pressure Monitor ASRS Process Control 5 3 Process Control Warnings ASRS It is the user s responsibility to ensure that the automatic control signals provided by the process control module of the PPM100 are always used in a safe manner Carefully check the programming of the system and test every individual channel connection under MANUAL control before switching to AUTO Mode operation When an equipment failure or power shutdown condition could cause a hazardous situation always provide fail safe precautions As an example a pressure relief check valve should be used in conjunction with an automated backfill valve when the risk of dangerous overpressure is possible Even if the control logic seems simple and obvious we recommend that you always develop a logic diagram flowchart of the process control function you wish to implement To minimize programming and connection errors prepare a Specification Table which lists the rule parameters measurement sources and connection scheme for each channel Keep a copy of the circuit schematic which illustrates how each piece of equipment is connected to the process control module in this manual Carefully consider the response of your process control setup during and after power losses A
12. Next we need to consider the gateway The gateway is simply the machine that connects your network to the outside world It is the link between two networks routing data traffic between those networks For this reason a gateway is sometimes referred to as a router Its IP address is required for you to be able to send email from the EWS If you will not be using the email notices feature of the EWS and you will always be contacting the EWS from a machine on the same network this IP address is not required A simple mail transfer protocol SMTP server often has one purpose in life to relay email from one machine to another It follows some simple rules for how the information that makes up the email is exchanged between the machine sending the email and the machine that will relay the message to its destination This address is not required if you will not be using the email feature of the EWS Lastly the subnet mask is required In a network there are quite often sub networks The subnet mask is required to let the EWS know which subnet it will be on Enable the EWS After entering network addresses set the Web Server to Enabled Your EWS stores the network addresses into non volatile memory then gathers data on your PPM100 setup gauge and relay descriptions etc Allow the EWS about 30 seconds before continuing To make sure the EWS is functioning touch the Web Queue button If commands are streaming across the display the E
13. Pressure Display 3 11 Figure 3 3 Choosing a source for the top data bar Important Even though only three readings can be simultaneously displayed on the Pressure display PPM100 constantly monitors and logs ALL analog I O ports ALL enabled partial pressure readings and ALL enabled capacitance manometer readings Data Box The Data Box displays the readings from the selected source 1 e 24 0 6 Touch the Data Box to choose one of the eight display formats 16 00 2 amu Trend graph Torr Hydrogen Silent leak trend 4 amu Audio leak trend 0 Torr Helium Auto scaling bar graph 18 amu Full range bar graph Torr Water Status information a i Leak rate Figure 3 4 Choosing a display format for the middle data bar Big Numbers 2 amu Torr Hydrogen Figure 3 5 Big Numbers data display Best display for accurate easy to view pressure readings Easily visible across the room SRS PPM100 Partial Pressure Monitor 3 12 Pressure Display Trend Graph 4 amu 4 62 09 sore Helium Figure 3 6 Trend Graph display Best display for trend analysis A stamp sized P vs Time plot of the most recent readings It also includes a small instantaneous reading next to the plot Use trend graphs to see pressure changes in time dependent processes such as leak testing pump downs venting bakeout etc Silent Audio Leak Trend LEAKTREND PP3 LEAKTREND Figure 3 7 Leak Tre
14. pins are connected together e its channel LED on the front panel is ON INACTIVE When a process control channel is INACTIVE e its TTL output is logic high e its relay is de energized or off the Common and Inactive normally closed N C pins are connected together e its channel LED on the front panel is OFF When a process control channel is in Auto mode it becomes ACTIVE when the conditions specified by its rule s parameters are met Manual operation of the channel output is possible using Manual Override from the front panel or over a computer interface Power On State All process control channels are set to Manual Mode and INACTIVE when the PPM100 is powered up The user must switch the required channels back to Auto Mode to restart automated operation every time the unit is powered up Programming Rules The process control board provides eight independent channels for system automation Each channel has a relay closure output and associated opto isolated TTL output signal The channel state may be controlled 1 manually Manual Override below or 2 automatically by linking its state to an input source through user programmable rules While in AUTO mode the state of a channel can be linked to the readings from 1 any partial or total pressure measurement or analog input 2 the system clock 3 a dedicated TTL input pin or 4 an alarm notification Channel Rules define the exact conditions under w
15. CM4 Touch an individual data box to modify its measurement parameters and or the T O properties of its port The AnalogIO QuickKey is available only in the Monitor display MassSpec QuickKey MassSpec Access the Analog MassSpec Screen The Analog Scan Screen provides the only way to display mass spectra generated by the SRS RGA Head directly on the front panel of the PPM100 The MassSpec QuickKey is available only in the Monitor display and only displays spectra if all process control channels are in a manual state Process QuickKey EN Process Show the Process Control Display The Process Control Display shows the current state of the eight 8 process control channels Touch an individual Channel Data Box to control a channel or modify its configuration The Process QuickKey is available only in the Pressure display Important Process Control is performed through an 8 channel Process Control board standard in all PPM100 controllers Each channel includes a relay closure output with corresponding opto isolated TTL output While in AUTO mode each channel can be linked to any partial or total pressure reading any analog input the system clock RGA status or a TTL input trigger signal through user programmable Rules The Process Control Display allows editing of channel Rules and Labels as well as manual control of all channels Table Chart QuickKey EN Chart Display the Data Log in either Table or Chart format
16. Enter a value le 14 to 1e 5 for the alarm level low When a Level Alarm is enabled the PPM100 sounds an audible alarm and displays an Alarm prompt in the appropriate partial pressure box every time 1 the pressure drops below the Alarm level low or 2 the pressure rises above the Alarm level high Pressure The current partial pressure reading is displayed for convenience while setting the alarm levels Alarm Beep Enable or disable the alarm beep When the alarm is on a beep is sounded as long as the alarm condition is satisfied ASRS PPM100 Partial Pressure Monitor 3 20 Analog I O Display AnaloglO Display WARNING Read the entire Safety and Preparation for Use section of this manual before using the PPM100 Read Chapter for detailed instructions and safety information regarding the installation and connection of gauges Access the AnalogIO Display from the Monitor Display by touching the AnaloglO QuickKey Analog t 12 28 AN2 ANS ANA 0 275 V 8 737 V 4 444 V Dose Valve CM 10Torr Argon buff ADC input Manual out ADC input PP6 out EY CM1 CM2 CM3 CM4 gt DISPLAY OFF DAC OUTPUT 8 74 Torr DAC OUTPUT AnaloglO Temp Dose Valve CM 10Torr Argon buff Off Off Linear Off 2g Back By i Pressure Monitor Help Figure 3 14 AnalogIO Display The AnalogIO display shows the voltage levels input or output at the four analog I O
17. A host computer connected to the instrument can easily configure diagnose and operate the PPM100 controller using simple ASCII commands An intuitive and complete Remote Command Set facilitates integration of all controller functions into any processing or diagnostic software As an added feature the RS 232 interface includes a pass through mode which passes RGA commands through the PPM100 directly into the SRS RGA head and transmits the RGA responses back out using communication parameters identical to the RGA head Tip Use the RS 232 pass through mode to communicate directly with the RGA head through the PPM100 with a host computer running RGA Windows Since the PPM100 RS 232 port will be configured identically to the one in the RGA head RGA Windows operates as if the host computer were connected directly to the RGA head The RS 232 interface is easily configured through the front panel user interface A variety of baud rates byte framing and handshaking options are available The PPM100 buffers the most recent characters received and transmitted over the communication interface RS 232 GPIB USB and Web The Queue can be displayed on the front panel at any time Queue display mode simplifying testing and debugging of communication programs Note that the PPM100 is a stand alone instrument there is no need to connect the controller to an external computer to access its full performance and functionality All PPM100 Partial Pressure
18. March 2001 p 22 PPM100 Partial Pressure Monitor ASRS Contents vii Safety and Preparation For Use i Contents vii Front Panel Overview x Touchscreen Display Overview xi Back Panel Overview xii Connector Pinouts xiii Specifications xvii Command List xviii Damage Requiring Service xxi Declaration of Contamination of Vacuum Equipment xxiii Chapter 1 Getting Started Unpacking 1 3 Installing the PPM100 Controller 1 4 Installing and Connecting the RGA Head 1 6 Installing and Connecting Capacitance Manometers 1 8 PPM100 Quick Setup 1 12 Pressure Measurement 1 18 Pressure Display Screen 1 21 MassSpec Display 1 27 Leak Testing with the PPM100 1 29 Proper Grounding Test Procedure 1 31 Chapter 2 PPM100 Basics PPM100 Overview 2 3 Front Panel 2 13 Back Panel 2 16 Maintenance and Service 2 22 Chapter 3 Displays and Menus ASRS QuickKeys 3 5 Menu Buttons 3 8 Pressure Display 3 10 Monitor Display 3 15 Partial Pressure Setup Menu 3 16 Alarm Menu 3 19 PPM100 Partial Pressure Monitor viii Contents Analog I O Display 3 20 Analog I O Setup Menu 3 23 Zero Manometer 3 26 MassSpec Display 3 27 Y Axis Menu 3 29 Logging Display 3 30 Logging Setup Menu 3 32 Chart Y Axis Menu 3 34 Chart X Axis Menu 3 35 Process Control Display 3 36 Edit Rules Menu 3 39 Edit Messages Menu 3 43 Main Menu 3 45 RGA Menu 3 46 Advanced Menu 3 48 Utilities Menu 3 50 Selftest 3 51 Remote Menu 3 52 RS 232 3
19. Pressure in units of Torr 1 00 06 Time elapsed since this plot was taken 15 Secs Figure 7 18 An Analog Scan You can control the RGA s filament and electron multiplier from the analog scan page Figure 7 19 as well as setting scan range noise floor and displayed pressure limits WARNING Process control is suspended during analog scans Filament Control Click to Turn Emission Off Scanning Parameters Mass Range AMU Pressure Range Torr Dynamic Range Initial 1 Maximum 1E 6 7 Noise Floor 2 z Final 50 Minimum 1 E 10 gt Multiplier Of Click to Set Parameters WARNING Process control is suspended during analog scans Click to Accept all Parameters and Begin Analog Scan Figure 7 19 Analog Scan Setup Filament Control Filament control is a dynamic button The function of the button changes depending upon the current state of the RGA For example if the RGA s filament is off when this PPM100 Partial Pressure Monitor ASRS Using the EWS 7 27 page is loaded into your browser the button s label will read Click to Turn Filament On and clicking the button will send a request to energize the filament If the RGA s filament is already on when the page is loaded the label will read Click to Turn Filament Off and clicking the button will send a request to turn the filament off Multiplier Control Multiplier control is a dynamic but
20. The Info Box includes e gas mass in amu e gas gauge or port name e units pressure or voltage e CM Display e Analog I O mode Pressure Units The factory default for pressure units is Torr 1 Torr 1 mm Hg To change the units of the Pressure Display use the Menu QuickKey then touch Units in the menu Choose a units system Torr micron bar mbar or Pascal All three Data Bars use the same units system PPM100 Partial Pressure Monitor ASRS Monitor Display 3 15 Monitor Display Use the Monitor or Back to Monitor QuickKey to bring up the Monitor Display Monitor xt 12 27 PP2 4 PP3 18 PP4 28 1 75 09 6 80 08 3 81 06 En Alarm High Hydrogen Helium Water Nitrogen PPS 32 PP6 40 PP 43 PP8 44 Monitor 5 79 08 1 80 09 5 05 09 Alarm High Alarm Low Oxugen Argon Pump oil CO 2 Beg EN by Back Fy Pressure AnaloglO MassSpec Pressure Help Figure 3 12 Monitor Display The Monitor display consists of eight rectangular Partial Pressure Data Boxes PP1 PP8 each displaying a single mass partial pressure measurement from the RGA Head Gas name gas mass in amu alarm status and important RGA status information are also included in each box Touch a Partial Pressure Box to access its Monitor Setup menu and display the Partial Pressure Setup parameters for that measurement Partial Pressure Data Box PP6 4o Each Partial Pressure Data Box displays a
21. The PPM100 buffers the most recent characters received and transmitted over the RGA RS 232 interface and corresponding to all communications between the PPM100 controller and RGA Head The Queue display shows the interface history The Queue display may slow down communications and should be displayed only when testing or debugging a host program Press any QuickKey other than Help to exit from this display The lower half of the Remote Queue display is the Transmit Queue These are the most recent commands which have been placed in the output buffer The upper half of the Remote Queue display is the Receive Queue These are the most recent characters which have been received by the PPM100 displayed in UPPER case and transmitted from the RGA Head The RGA sends back both ASCII text and binary characters not printable as text The PPM100 user needs to see both to be able to interpret debug the responses from the RGA head Each character from the RGA is actually displayed as a three characters set First the character is displayed we show a dot if unprintable this is followed by the two digit hex representation for it For example the sequence 00 00 00 00 is four bytes of zeros and the sequence R52G47A41 is the 3 letter string RGA all upper case and printable PPM100 Partial Pressure Monitor ASRS Remote Menu 3 53 ASRS RS 232 Submenu Display the RS 232 configuration menu for the HOST RS 232 interface por
22. and the AN1 port and the other one connected to the Rough Line and the AN2 port In this case give the gauge connected to AN1 CM1 the name HiVac and the CM2 gauge the name Rough This labels the two readings with meaningful names PPM100 Partial Pressure Monitor ASRS Analog I O Display 3 25 ASRS DAC Source Link the DAC output to one of the partial pressure readings PP1 PP8 or choose Manual for front panel output level control The analog outputs may be linked to the log of the partial pressure readings These signals are often connected to devices such as programmable logic controllers throttle valve controllers and other common feedback controlled instruments When PP1 PP8 is the DAC source the analog output follows these parameters P Torr 10 for 10 Torr lt P lt 10 Torr OV indicates gauge off 12 V indicates gauge fault When Manual is the DAC source the analog output is set with the Volts when source Manual menu button Volts When Source Manual Enter the voltage setting for the DAC Output when Source Manual The valid range is 12 V Tip The actual output voltage is measured and displayed in the Analog Signal Data Box AnalogIO Display CM Display Select a pressure calculation method for CM pressure readings The options are Linear Log or Off Linear assumes a linear relationship between the pressure and the voltage output of the gauge Pmax P 10V is the pressure correspon
23. button again to resume MassSpec analog scanning E MULTIPLIER Button and LED Press the black E MULTIPLIER button to turn the RGA s electron multiplier on or off during analog MassSpec scans The green LED located next to the button lights up while the E Multiplier is active e The E MULTIPLIER button is only active during analog scans Each Partial Pressure i e single mass reading has its own individual detector setting Touchscreen LCD Display The PPM100 has a large backlit touchscreen LCD display The resolution of the display is 320 x 240 pixels Screen size is 4 7 in diagonal The LCD displays an intuitive menu driven interface for instrument setup and operation The pressure display shows large easy to read numeric readings from each gauge as well as bar graphs and trends Full screen Pressure vs Time plots are available for all gauges and analog inputs PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 15 ASRS Screen contrast is user adjustable and a screen saver is available to extend the life of the fluorescent backlight A touchscreen calibration is available to align the touchscreen with the LCD display Use the Clean Screen menu to desensitize the touchscreen for 20 seconds while cleaning the touchscreen display Touchscreen Cleaning Procedure For best results use a clean non abrasive cloth towel and a commercial window cleaner to regularly clean the screen The cleaning solut
24. during which the input signal must remain unchanged following a level transition before the edge is validated by the PPM100 and triggers a controller function PPM100 Partial Pressure Monitor 5 22 Process Control Remote Control Inputs RGA_Degas Pin 5 Trigger mode Edge J ON T OFF Debounce time 50 ms Prerequisites e RGA filament is turned on e RGA_Remote_Enable is logic LOW e RGA_Fil_Lockout is logic HIGH Pulling the RGA_Degas control line LOW after it has been high for at least 50 ms and holding the line LOW for at least 50 ms starts the degassing process on the RGA s ionizer The input must remain LOW for the duration of the degas process Degassing takes place for a period of 3 minutes default degas time Degas can be terminated before the Degas Time has elapsed through the remote input by e Switching the RGA_Degas input HIGH after it has been LOW for at least 50 ms e Turning the RGA filament off e Pulling the RGA_FIL_Lockout pin LOW RGA_FIL_Lockout Pin 6 Trigger mode Level LOW RGA Filament locked off HIGH Normal RGA filament operation Debounce time 50 ms Prerequisites e RGA_Remote_Enable is logic LOW HIGH allows normal RGA operation unconnected default LOW forces the RGA Filament to turn off and stay off any request to turn the RGA Filament on is denied as long as the RGA_FIL_Lockout line remains LOW This applies to requests from the front panel keys the computer interface
25. i 6 26 RGA Ionization Source IRFE i 6 27 _RF7 Error Handling LRER 0 6 27 Last RGA Error PASS i 6 28 RGA Pass Through SYNC 6 28 RGA SYNC Logging PLDS i 6 30 Chart Table Display PLCL 6 30 Clear Data Log PLGF 6 30 Read Data Log First PLGN 6 30 Read Data Log Next PLIN n 6 31 Logging Interval PLWT n 6 32 Log Length PLEN i 6 32 Logging Enable PLDD i 6 32 Display Date PLTR i 6 32 TTL Reset Enable Charting LCPN x 6 33 Chart MassSpec Pmin LCPX x 6 33 Chart MassSpec Pmax LCVN x 6 33 Vmin LCVX x 6 33 Vmax LCSA 6 33 Autoscale Y Axis LCRG n 6 33 Time Range LCSF 6 34 Scale X Axis to Full Mass Spectrum Display SCOK 6 35 Analog Scan OK MENU d 6 35 Display Screen SCMF n 6 35 MassSpec Final Mass SCMI n 6 35 MassSpec Initial Mass SCAN i 6 36 Start Stop Analog Scan OSCC 6 36 MassSpec Complete LCPN x 6 36 Chart MassSpec Pmin LCPX x 6 36 Chart MassSpec Pmax SYSA 6 36 Autoscale MassSpec Y Axis CTOM n 6 36 Move MassSpec Cursor MACB 6 37 Read MassSpec Mass PACB 6 37 Read MassSpec Peak Process Control RDES d s 6 38 Channel Description RLCL d s 6 38 Channel Active Message RLOP d s 6 38 Channel Inactive Message RBEP d i 6 38 Channel Beep RMOD d i 6 38 Channel Mode RSTA d 1 6 39 Channel State RAMS d i 6 39 Channel Input PPM100 Parti
26. 00000000 1 State Active indicates the date time that channel 1 switched to the Active state The first bitfield shows that only channel 1 is active The second bitfield shows that no channels are in Auto mode Event format When an event occurs an entry is returned with the following format lt date gt lt time gt lt event description gt For example the returned string 22may01 04 36 25 PM Instrument turned on indicates the date time that the unit was turned on Clear Process Log The RHCL command clears the Process Log All entries in the Process Log are lost after sending the RHCL command Example RHCL Clear the Process Log immediately RBAD ASRS Relay Failure Status RBAD query returns the decimal value of an 8 bit binary number representing the state of the process control relays Bit O corresponds to Channel 1 and bit 7 corresponds to Channel 8 If the bit is 0 the relay is ok If the bit is set the relay is not trustworthy Example RBAD Return the Relay Failure Status PPM100 Partial Pressure Monitor 6 44 Backlight Backlight Commands Backlight Saver Enable BLEN 7 i The BLEN command sets queries the Backlight Saver The parameter i selects Disabled 0 or Enabled 1 Examples BLEN Returns 1 if the Backlight Saver is Enabled or 0 if Disabled BLEN 1 Enables the Backlight Saver BLIT i Backlight On Off The BLIT command sets queries the state of the LCD
27. 1 4 Installing the PPM100 Installing the PPM100 Controller Read the entire Safety and Preparation for Use section of this manual before starting any installation procedure Mounting Options The PPM100 offers a variety of mounting options to fit your needs 1 bench top 2 half rack and 3 two units side by side in full rack width Place the controller in a secure place on your bench top or mount it into an equipment rack tray SRS O100IGRM compatible w standard 19 inch rack In all cases provide adequate ventilation for the control unit to dissipate heat inch clearance around the side ventilation slots is recommended Allow at least 6 inches at the back of the controller for cable routing Do not mount the unit above other equipment that generates excessive heat The PPM100 is designed to operate over the range 0 40 C Ambient temperatures above that value may damage the instrument Line Power Connection Line Voltage Selection The PPM100 operates from a 100 V 120 V 220 V or 240 V nominal AC power source having a line frequency of 50 or 60 Hz Use the power entry module on the back panel of the PPM100 to power the unit from a wall outlet Make sure that suitable power is available for the controller 100 240 Vac 50 60 Hz 500 W Use the three wire power cord provided by Stanford Research Systems to connect the PPM100 to a properly grounded wall outlet Contact Stanford Research Systems if a power cord compatible w
28. 10 Using two relays in series to provide an interlock function Both relays shown in Active state PPM100 Partial Pressure Monitor 5 16 Process Control Remote Operation Channel relays can be operated remotely through the computer RS 232 GPIB or USB and web interfaces Use this convenient feature to control experiments or processes from anywhere in the world For example turn off your bakeout jackets from home before leaving for work so that the system can cool down during your commute and is ready to start an experiment as you get into the lab PPMIO0 Micieroft Intomet Explores Ee Ei Yim Favoites Iode Heb Function MONITOR Last Reading 15jul03 at 13 31 Gauges Web Enabled PPM100 Name SRS PPM100 Functions Monitor Get Readings Current State Get Chad Type Figure 5 11 PPM100 web page showing relay status and control via the internet PPM100 Partial Pressure Monitor ASRS Process Control 5 17 Digital I O Module ASRS The DIGITAL I O module included with the Process Control board supports three types of logic signals The TTL signals are opto isolated from the PPM100 chassis The inputs may be electrically floated as a group The outputs may be electrically floated as a group separate from the inputs TTL Input 8 pins Each process control channel has a dedicated TTL input pin While in AUTO mode channel control can be linked to this TTL input The logic level TTL HIGH or LOW
29. 31 Proper Grounding Test Procedure Read the entire Safety and Preparation for Use section of this manual before starting any installation procedure WARNING e Safe operation of any high voltage ion producing vacuum equipment including the SRS RGA PPM100 requires proper grounding of all electronics control units and vacuum chamber LETHAL VOLTAGES may be established under certain operating conditions if proper grounding is not assured This risk is not specific to the PPM100 As a rule of thumb all parts of a vacuum system utilized with the SRS RGA PPM100 or any similar high voltage product must be maintained at earth ground for safe operation e The vacuum chamber should be directly and explicitly connected to a heavy duty earth ground minimum 12 AWG ground lead wire e All electronic instrumentation must be connected to properly grounded 3 prong electrical outlets A chassis grounding lug must also be directly tied to an earth ground electrode minimum 12 AWG wire Do not connect the controller s ground lug to the vacuum system or another component Connecting the power cord to a properly grounded outlet is a necessary but not sufficient grounding condition with this or any similar high voltage producing vacuum equipment e All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or be
30. 6 17 PPM Monitor Setup Commands 6 21 Analog I O Setup Commands 6 24 RGA Commands 6 25 Logging Commands 6 30 Charting Commands 6 33 Mass Spectrum Display Commands 6 35 Process Control Commands 6 38 Backlight Commands 6 44 System Commands 6 45 Interface Commands 6 47 ASRS Status Reporting 6 49 Status Registers 6 49 Status Enable Registers 6 49 Serial Poll Status Register 6 49 STB to Read the Status 6 50 Serial Poll to Read the Status 6 50 Service Request 6 50 Power On Status 6 51 Status Reporting Commands 6 52 Using USB 6 58 Introduction 6 58 Windows 2000 XP and 98 6 58 Installing VCP Virtual Com Port without PNP support 6 58 Testing 6 59 VCP Options COM port number 6 59 Mac OS8 and OS9 6 60 Installing USBSerial extension 6 60 PPM100 Partial Pressure Monitor 6 2 Remote Programming PPM100 Partial Pressure Monitor ASRS Index of Commands 6 3 Index of Commands Important Always use the GPMU command at the start of a program to ensure that the desired units are in effect Use VERB 0 to set the RS 232 interface to terse mode for computer programs Use VERB 1 to use verbose mode for console communications Variables i j d n p integers x real number s t text strings Partial Pressure and Analog Input Measurement GPMU n s 6 17 Pressure Units GPBA n p 6 17 Data Bar Assign GPDF n i 6 17 Display Format GDAT p 6 18 Read Source Data GDTX p 6 18 Re
31. 7 diu Figure 1 25 Analog MassSpec screen with factory default 1 thru 50 amu mass range Analog scanning is the most basic operation of the SRS RGA as a quadrupole mass spectrometer During analog scanning the quadrupole mass spectrometer is stepped at fixed mass increments i e 0 1 amu through a prespecified mass range The ion current is measured after each mass increment step and transmitted to the PPM100 over RS 232 Analog scanning simplifies the detection of mass peaks for individual component gases and provides the most direct view of the peak shapes and resolution of the instrument Warning All single mass Partial Pressure readings are suspended while the PPM100 displays MassSpec analog scans As a consequence all process control channels must be set to Manual mode before this display mode may be accessed Partial pressure readings resume as soon as the MassSpec display is exited Tip Use the Analog MassSpec Display mode to identify and select single masses during the Partial Pressure Measurement setup Press the E MULTIPLIER button at any time to activate the electron multiplier detector during analog scans and enhance the detection limit of the SRS RGA Press the E MULTIPLIER button again to turn the electron multiplier off and return to Faraday Cup detection Notes e The E MULTIPLIER button has NO function outside of the MassSpec mode e The electron multiplier can only be turned on if the filamen
32. CMPX command sets queries the Maximum Pressure Pmax of capacitance manometer n 1 4 for CM1 4 The parameter x is the pressure Pmax in the current units Examples CMPxX 1 100 0 Set Pmax of CM1 to 100 0 in the current units CMPX 1 Return the value of Pmax for CM1 in the current units PPM100 Partial Pressure Monitor ASRS RGA 6 25 RGA Commands These commands set and query settings inside the RGA head For more information about these parameters please see the RGA manual Communication between the PPM100 Controller and the RGA head may be slower than the host PC interface to the PPM100 so allow time for these commands to execute Sending many RGA commands in quick succession may cause the RGA to fall behind and the PPM100 to abort pending commands MAXM Read RGA Mass Range The MAXM query returns the mass range of the RGA either 100 200 or 300 amu Example MAXM Returns 300 for an RGA300 RGAI Read RGA Identification The RGAI query returns the RGA identification string This string has the form SRSRGA300VERO 24SN08560 The string contains the RGA model number firmware version and serial number Example RGAI Returns the RGA ID string Electron Energy EEEV n The EEEV command sets queries the Electron Energy in eV The parameter n is an integer 25 105 with units of eV The default is 70 Examples EEEV Returns the Electron Energy in eV EEEV 100 Sets the Electron Energy to
33. Hardware Self Test Firmware Revision Firmware Build Serial Number Verbose RS 232 Identification Reset Web Server Enable Status CLS PSC 2 i STB i SRE i j ESR i ESE i J ERSW i ERSE i j GSSW i GSSE i j RSSW i RSSE i J Clear Status Power On Status Clear Read Serial Poll Status Serial Poll Enable Read Standard Event Status Standard Event Enable Read Error Status Error Status Enable Read Gauge Status Gauge Status Enable Read Process Status Process Status Enable PPM100 Partial Pressure Monitor ASRS Damage Requiring Service xxi Damage Requiring Service Caution Do not use this product if it has unauthorized modifications Unauthorized modifications may result in fire electric shock and other hazards Do not use accessories not recommended in this manual as they may be hazardous Note Within this section the word product specifically refers to the PPM100 Partial Pressure Monitor any of its accessories or any SRS manufactured RGA Contact the factory for instructions on how to return the instrument for authorized service and adjustment Service of this product by Authorized Service Personnel only may be required under any of the following conditions e Any cable or plug is damaged The product does not operate properly even after strictly following the operating instructions The product exhibits a distinct change
34. Help QuickKey a On screen Help provides information on the operation of the PPM100 Help information is available for menus buttons displays and hardware Help To display help on an item first touch the Help QuickKey at the bottom right corner of the screen The button becomes highlighted next touch the button or box you wish to learn about The screen changes to the Help Display Window and help text is displayed then use the up and down buttons to scroll through the text Touch done to return to normal operation or touch More for a list of related topics Choose a topic in the list to display its help then use back to display previous topics and forward to return to later topics ASRS PPM100 Partial Pressure Monitor oo 8 Menu Buttons Menu Buttons The PPM100 uses various types of menu buttons identified by the icon in the upper right corner Submenu aw Remote Display a submenu Use the submenu to access setup parameters that do not fit or belong on the top menu Choose multiple choices Units Torr Display a multiple choice selection list Touch an item from the list to choose it Choose two choices PP1 Measurement Enabled 3 m S p lt PP1 Mass amu 133 2 Display a two choice selection list Touch one of the two items on the list to choose it Display the numeric entry keypad Enter a parameter value
35. Injury due to explosion is another important safety concern during the operation of a vacuum system and gas manifold system Explosion is possible in systems that are routinely cycled from vacuum to pressures above atmosphere and can be caused by many different reasons Dangerous overpressure conditions can be established if a pressure regulator is set to the wrong value the wrong gauge or gauge calibration is used for positive pressure measurements or even if a bad setpoint value is programmed into an automated process control setup Explosions can also occur if flammable or explosive gases are exposed to hot elements such as the hot filaments of an RGA or the sensor wire of a Pirani gauge PPM100 Partial Pressure Monitor ASRS ASRS Safety and Preparation For Use v Check that the right cylinders with the right gases are connected to the gas handling system before starting any process Check the pressure regulator settings before starting any process Confirm that the right units were used to program the setpoints of all automated process control channels Install suitable devices that will limit the pressure to the level that the vacuum system and its gas manifold can safely withstand Use pressure relief valves in the gas manifold and in the vacuum chamber that will release pressure at a level considerably below that pressure which the system can withstand Do not use the product to measure the pressure of flammable explosiv
36. LRER 0 6 27 Last RGA Error M MACB 6 37 Read MassSpec Mass MAME p n 6 21 PPM Mass MAXM 6 25 Read RGA Mass Range MENU d 6 35 Display Screen MENU d 6 45 Display Screen MESG s 6 45 Message N NAME s 6 45 System Name NFTM p n 6 22 PPM Scan Rate PPM100 Partial Pressure Monitor ASRS Index of Commands 6 9 O OABP p i 6 23 Alarm Beep OAEN p i 6 22 PPM Alarm Enable OALH p x 6 22 Alarm Level High OALL p x 6 23 Alarm Level Low OAQU 6 20 Read Monitor Alarm Status OSCC 6 36 MassSpec Complete P PACB 6 37 Read MassSpec Peak PASS i 6 28 RGA Pass Through PCME 7 p i 6 21 PPM Measurement Enable PLCL 6 30 Clear Data Log PLDD i 6 32 Display Date PLDS i 6 30 Chart Table Display PLEN i 6 32 Logging Enable PLGF 6 30 Read Data Log First PLGN 6 30 Read Data Log Next PLIN n 6 31 Logging Interval PLTR i 6 32 TTL Reset Enable PLWT n 6 32 Log Length R RAMS d i 6 39 Channel Input RBAD 6 43 Relay Failure Status RBEP d i 6 38 Channel Beep RDEL d n 6 40 Setpoint Delay RDES d s 6 38 Channel Description RGAI 6 25 Read RGA Identification RGOS d 1 6 39 Gauge Off State RHCL 6 43 Clear Process Log RHGF 6 42 Read Process Log First RHGN 6 42 Read Process Log Next RLCL d s 6 38 Channel Active Message RLOP d s 6 38 Channel Inactive Message RMO
37. Label of channel 1 OFF in this case RBEP d i Channel Beep The RBEP command sets queries whether the Beep channel audio alert is On i 1 or Off G 0 The parameter d selects a process channel 1 8 and is required Examples RBEP 1 Returns 1 if channel 1 Beep is on 0 if off RBEP 1 1 Turns channel 1 Beep on RMOD d i Channel Mode The RMOD command sets queries whether the mode of process channel d is Auto i 1 or Manual i 0 The parameter d selects a process channel 1 8 and is required If the channel is Auto its state is controlled by its process rules If the channel is Manual use the RSTA to set the channel state active or inactive Examples RMOD 2 Returns if channel 2 is Auto 0 if Manual RMOD 2 1 Sets channel 2 to Auto mode PPM100 Partial Pressure Monitor ASRS Process Control 6 39 RSTA d i Channel State The RSTA command sets queries the state of process channel d when its mode is Manual The parameter d selects a process channel 1 8 and is required The parameter i selects Inactive 0 or Active 1 This command requires that channel d is in Manual mode RMOD command Examples RSTA 7 Returns 0 if channel 7 is Inactive 1 if Active RSTA 7 0 Deactivates process control channel 7 RAMS d i Channel Input The RAMS command sets queries the process control input channel Linked To for process channel d The parameter d selects a pro
38. Manual and Programming Reference Please read and strictly follow those detailed instructions during installation and operation of the RGA Head e Ifyou have any doubts about how to use this product safely contact Stanford Research Systems at the address listed in this manual e Retain these safety and operating instructions for future reference e Identify and adhere to all warnings posted on the product e Failure to comply with these instructions may result in serious personal injury including death as well as significant property damage e Due to the variety of vacuum system configurations and applications it is impossible to account for all safety concerns that may arise during the installation operation and maintenance of this product Please contact the factory for any specific safety concerns not addressed directly by this manual ASRS PPM100 Partial Pressure Monitor ii Safety and Preparation For Use e It is the installer s responsibility to ensure the safe operation of automated vacuum systems Carefully check manual operation of the system and the setpoint programming instructions before switching to automatic operation e Provide for fail safe operation wherever an equipment malfunction could lead to a hazardous situation Electrical Shock Risks The most common risk associated with the operation of vacuum equipment is electrical shock e Dangerous voltages capable of causing injury and death are present during
39. Not Used Not Used 10 Clear_Data_Log 11 RGA_Remote_Enable 12 RGA_FIL_On 13 Not Used 14 RGA_FP_Disable 15 PPM100 Vcc Process Control 16 TTL_OUT_5 TTL OUT 17 TTL_OUT 6 18 TTL_OUT_7 19 TTL_OUT 8 PPM100 Partial Pressure Monitor TTL OUT for Channel 6 LOW ACTIVE TTL OUT for Channel 7 LOW ACTIVE TTL OUT for Channel 8 LOW ACTIVE ASRS PPM100 Basics 2 19 ASRS Module Pin Name Description Process Control 20 ANODE COM External User 5 V IN TTL IN 21 TTL_IN1 TTL Input Signal for Channel 1 Active LOW TTL Input Signal for Channel 2 Active LOW TTL Input Signal for Channel 3 Active LOW TTL Input Signal for Channel 4 Active LOW TTL Input Signal for Channel 5 Active LOW TTL Input Signal for Channel 6 Active LOW TTL Input Signal for Channel 7 Active LOW TTL Input Signal for Channel 8 Active LOW 22 TTLIN2 23 TTLIN3 24 TTLIN_4 25 TTLIN5 26 TTL_IN6 27 TTLIN7 28 TTL_IN 8 29 unused 30 PPM100 Ground 31 PPM100 Ground Process Conirol 32 COM_EMTR_REF External User Ground TTL OUT 33 COM_COLTR_PULLUP External User 5 V IN 34 TTL_OUT_1 TTL OUT for Channel 1 LOW ACTIVE TTL OUT for Channel 2 LOW ACTIVE TTL OUT for Channel 3 LOW ACTIVE TTL OUT for Channel 4 35 TTL_OUT_2 36 TTL_OUT_3 37 TTL_OUT 4 LOW ACTIVE Note HIGH to LOW T LOW to HIGH transition Process Control TTL OUT These outp
40. O inputs is graphed according to Vmax and Vmin However the grid lines correspond to the values of Pmax and Pmin Autoscale Autoscale the graph based on the data displayed in the graph This changes the values of Pmax Pmin and Vmax Vmin to use the entire vertical space of the chart display PPM100 Partial Pressure Monitor ASRS Logging Display 3 35 Chart X Axis Menu This button is only available from the Chart display Chart Time Range Set the time span of the chart The right edge of the chart is the most recent point the left edge is a Time Range ago The data moves across the chart as newer points are recorded resembling a chart recorder Zoom to Cursor Set the left edge of the chart to the cursor position The right edge remains the most recent point Scale to Full Set the Time Range to display all data points ASRS PPM100 Partial Pressure Monitor 3 36 Process Control Display Process Control Display Use the Process or Back to Process QuickKey to bring up the Process Control Display Process e192 ROUGH VALVE 1 FORE VALVE 2 GATE VALVE 3 FORE STATUS 4 CLOSED OPEN CLOSED OK E Inactive Inactive Inactive Inactive gt Manual Manual Auto Manual VENT VALVE 5 iChannel 6 6 Channel Channel 6 8 Process VENTING Inactive Inactive Inactive Inactive Manual Manual Manual Manual Back P i Pressure History Overview Pressure Help Figur
41. PPM100 screen A CONNECTED icon 3 indicates that a fully functional RS 232 link is present between the RGA Head and the PPM100 Controller An UNCONNECTED icon A indicates that the PPM100 has failed to detect a connection to the RGA Head Consult Chapter 8 Troubleshooting if this icon is present Reset If your Pressure Display Screen does not appear like the one in Figure 1 5 at this point it is possible to force the PPM100 to revert to its factory preset settings by holding down the E MULTIPLIER button during the Power On procedure However keep in mind that this will also revert many other important settings of the instrument to factory default values you might lose some important setup information Holding down the E MULTIPLIER Button should not be required for new instruments being powered right out of the shipping box The PP1 PP2 and PP3 Data Bars of your PPM100 should display a FILAMENT OFF message at this time the RGA Filament is not yet activated If NO RGA is displayed consult Chapter 8 Troubleshooting for diagnostic procedures related to the RS 232 connection between the RGA Head and the PPM100 Controller PPM100 Partial Pressure Monitor 1 14 PPM100 Quick Setup Partial Pressure Setup PPM100 can monitor and display partial pressures of up to eight independent single gases in a mixture Each individual gas component is differentiated from all others based on its unique contribution to the mixture s total
42. Pressure Monitor ASRS Displays and Menus 3 3 Selftest Submenu 3 51 Control Submenu 3 57 System Selftest 3 51 Web Control 3 57 Button amp LED Test 3 51 Security Type 3 57 Xmit via RS 232 3 51 Password 3 58 Trusted IPs 3 58 Remote Menu pies Start Trusted Range End Trusted Range 3 58 System Name pas Trusted IP Address 3 58 RgaQueue 3 52 RS 232 Submenu 3 53 ere ee Baud Rate 3 53 Word Length 3 53 Screen Menu 3 60 Parity 3 53 Contrast Up Contrast Down 3 60 Flow Control 3 53 Clean Touch Screen 3 60 RGA Pass Through 3 53 Calibrate Touch Screen 3 61 RS 232 Queue 3 54 Test Touch ScreenError Bookmark not defined GPIB Submenu 3 54 Backlight Menu 3 62 Address 3 54 Backlight Saver 3 62 GPIB Queue 3 54 Backlight Delay 3 62 Web Submenu 3 55 TurnOff Time Turnon Time 3 63 Web Server 3 55 IP Address 3 55 Subnet Mask 3 55 DNS 3 56 Gateway 3 56 Web Queue 3 56 Port Number 3 56 ASRS PPM100 Partial Pressure Monitor 3 4 Displays and Menus PPM100 Partial Pressure Monitor ASRS QuickKeys 3 5 QuickKeys Each display includes up to five QuickKeys lined up across the bottom of the screen The QuickKeys presented in the main Pressure Display below provide fast access to the most important displays Menu Monitor Process Table Chart and Help Within any of these other displays the QuickKeys may provide access to additional display modes In each case use the Pressure or Back QuickKeys to return to the Pressure Display Use the P
43. SRQ by performing a serial poll to read the Serial Poll Status to determine the requesting status bit Bit 6 SRQ will be reset by the serial poll The controller should then investigate the appropriate status register to find the requesting status bit The SRQ handler should deal with the actual problem e g removing an overload condition NOT just clear the bit and continue This can lead to repeated SRQ events PPM100 Partial Pressure Monitor ASRS Status Reporting 6 51 Power On Status Powering on does not clear the status registers Reading status registers or issuing CLS clears status registers Upon power on the PPM100 may either clear all of its status enable registers or maintain them as they were on power off The PSC command determines which action will be taken ASRS PPM100 Partial Pressure Monitor 6 52 Status Reporting Status Reporting Commands CLS Clear Status The CLS command clears all status registers The enable registers are not changed PSC i Power On Status Clear The PSC command sets the value of the power on status clear bit If i 1 the power on status clear bit is set and all status registers and enable registers are cleared on power up If i 0 the bit is cleared and all enable registers are stored at power down The status registers are cleared and the enable registers are restored to their stored values on power up This allows a service request to be generated at power up T
44. The factory default for pressure units is Torr 1 Torr 1 mm Hg Users may choose a different units system micron mbar bar and Pascal in the Main Menu For More Information Consult Chapter 3 for a guide to the menus required to change pressure units PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 9 ASRS On Screen Help On screen help is available in all PPM100 controllers Extensive Help information is readily available for menus buttons displays and even hardware From any screen where it is displayed touch the Help button and then any button for which help is required For More Information Touch Help then Help again for a complete description of the PPM100 help system Backlight Saver The PPM100 touchscreen LCD is illuminated by a fluorescent lightbulb physically located to the side of the screen Use the Backlight Saver to extend the life of the bulb All PPM100 features remain functional while the backlight is off When the Backlight saver is enabled the light turns off when the touchscreen is inactive for period longer than a user specified period Turn off and turn on times can also be programmed into the controller to keep the backlight off overnight For More Information Consult Chapter 3 for menu options related to the Backlight saver capabilities RS 232 Computer Interface The PPM100 controller comes standard with an RS 232 communications port HOST RS 232 connector on the back panel
45. To send your desired relay states to the PPM100 click the button labeled Click Here To Set All 8 Relays Function CONTROL Process Control Status at 12feb03 at 16 11 GATE VALVE HEATING JACKET WATER LINES E INACTIVE INACTIVE Current State MANUAL AUTO MANUAL C Inactive Inactive C Inactive Inactive Desired State C Activ O Active Active O Active Auto O Auto Auto C Auto Click Here To Set All 8 Relays ARGON VALVE FLOW CONTROL MECH PUMPS DIFF PUMP PWR ACTIVE Current State C Inactive Inactive Inactive Desired State C Active Active Active Auto Auto Auto C Auto Figure 7 21 Relay control web page SRS PPM100 Partial Pressure Monitor 7 32 Networking Terms Networking Terms Some terms that are used throughout this chapter are defined here Server A server is simply a computer capable of delivering data to another computer Typically the server is only used to deliver data and all its resources are allocated to that task IP Address Each computer that is connected to the world wide web needs to have a unique address in order for other machines to access that computer An IP address is made up of four bytes It is often expressed as a set of three digit numbers separated by a e g 209 239 160 084 Static IP Address A static IP address never changes Static IP addresses are often used for servers so that computers on the web can find them Dynamic IP Address
46. Use the Setup button to choose the Default Display format Table or Chart and other data logging parameters The Table Chart QuickKey is available only in the Pressure Display All PPM100 controllers include Data Logging When Data Logging is enabled data from the RGA capacitance manometers and analog inputs are stored in a circular memory buffer at the rate specified by the programmed logging interval Auto Scale QuickKey Autoscale the Y axis of the graph based on the data currently displayed PPM100 Partial Pressure Monitor ASRS QuickKeys 3 7 History QuickKey En Display the Process Control History log This key is available only in the Process Control display The PPM100 logs all important controller RGA and process control related events manual auto de activation in a memory buffer Use the information stored in the log to track and diagnose system problems Important The History log is preserved if the PPM100 is turned off using the front panel power button However all records are lost if power is removed by unplugging the unit from the wall Overview QuickKey Display a complete Process Control Overview Use the Overview to quickly review the state and rules for all process control channels in a single display screen Overview The Overview QuickKey is only displayed in the Process Control display Back to Previous QuickKey Back P Return to the previous menu screen indicated in the button
47. Voltage Setpoint in Volts Examples RTRP 8 Returns the Voltage Setpoint for channel 8 in Volts RTRP 8 5 2 Sets the Voltage Setpoint for channel 8 to 5 2 V Percent Hysteresis The RPHY command sets queries the Percent Hysteresis for process channel d The parameter d selects a process channel 1 8 and is required The parameter n is the hysteresis percentage Examples RPHY 8 Returns the hysteresis percentage for channel 8 RPHY 8 10 Sets the Setpoint Hysteresis for channel 8 to 10 RVHY 2 d x Voltage Hysteresis The RVHY command sets queries the Voltage Hysteresis for process channel d The parameter d selects a process channel 1 8 and is required The parameter x is the hysteresis voltage Examples RVHY 8 Returns the hysteresis percentage for channel 8 RVHY 8 1 2 Sets the Voltage Hysteresis for channel 8 to 1 2V RPOL d i RDEL d n Setpoint Activation The RPOL command sets queries the Setpoint Activation for process channel d The parameter d selects a process channel 1 8 and is required The parameter i selects Active Below 0 or Above 1 Examples RPOL 6 Returns 1 if channel 6 is active Above 0 if Below RPOL 6 1 Sets channel 6 to Active Above the setpoint Setpoint Delay The RDEL command sets queries the Setpoint Delay for process channel d The parameter d selects a process channel 1 8 and is required The parameter n is the Delay in milliseconds Note T
48. a terminator Examples of Commands GADM 4 1 lt lf gt Set Analog Port 4 to DAC output mode GADM 4 lt lf gt Query the mode of Analog Port 4 GDAT 1 lt lf gt Query the reading of PP1 IDN lt lf gt Query the Device Identification String Command Synchronization IFC Interface Ready bit 7 in the Serial Poll status signals that the PPM100 is ready to receive and execute a command When a command is received this bit is cleared indicating that command execution is in progress No other commands will be processed until this command is completed Commands received during this time are stored in the buffer to be processed later Only GPIB serial polling will generate a response while a command is in progress When all pending commands have executed the IFC bit is set again By checking IFC with serial polls a host computer can ensure that all previously sent commands have finished before sending a new command Since most commands execute very quickly the host computer does not need to continually check the IFC bit Commands may be sent one after another and they will be processed immediately However some commands may require a long time to execute In addition the host program may need to check that these operations executed without error In these cases after the command is sent the status should be queried When using the GPIB interface serial polling may be used to check the IFC bit in the Serial Poll status while an o
49. activity on the EWS and it shows the IP address and files accessed The network settings of the PPM100 are also displayed including the MAC address Email Status This page displays information about email notification including a summary of the email setup and a list of emails which have been sent from the PPM100 In addition the number of messages sent is shown along with the maximum number allowed For more information about setting up email see the next section Controlling the PPM100 PPM100 Partial Pressure Monitor 7 24 Using the EWS Controlling the PPM100 The world wide web allows the ultimate in remote control You can change parameters of the instrument from virtually any location For security purposes the EWS only allows control of relay states email configuration some RGA settings and obtaining pressure graphs All the control functions are under the security layer and require either the correct trusted IP address and or password in order to gain access Request Control If web control is disabled from the front panel of the PPM100 the control functions do not appear on the EWS web pages If control is disabled while someone is browsing the page the control functions will still be in the web page but any control operation is prevented You must log on as the controller before any of the control functions can be accessed Click this button to log on as the controller Once you log in the page reloads a
50. and designed for non programmers A complete listing of the Rule editing menus can be found in Chapter 3 of this manual and will not be reproduced in this chapter During automated operation the output status of all eight channels can be monitored in real time from the front panel see Process Control Display in Chapter 3 Also eight dedicated Process Control LEDs located below the screen and programmable audio alarms are available to announce process control events Manual Override is available for all channels This allows channel relays and their TTL outputs to be operated directly from the front panel All process control events are automatically time stamped and recorded in the Process Control Log Use the History QuickKey in the Process Control Display to review the log Note that the log is erased when the power is turned off The Process Control module also includes 7 opto isolated TTL inputs These inputs can be used to remotely control various controller functions including e remote enable e filament on off e degas on off e RGA Filament lockout e RGA Keypad disable e Data Log reset e touchscreen disable PPM100 Partial Pressure Monitor 5 6 Process Control ACTIVE vs INACTIVE The state of a process control channel is either ACTIVE or INACTIVE ACTIVE When a process control channel is ACTIVE e its TTL output is logic low e its relay is energized or on the Common and Active normally open N O
51. and load lock procedures Signal when a process is complete or alert operators to system conditions that require their attention Link process control channels together to create powerful system logic to control a wide variety of functions Automate repetitive operations Use e mail notification to warn operators about possible system problems over the internet Control a system remotely through the computer or web interfaces PPM100 Partial Pressure Monitor ASRS Process Control 5 5 Process Control Basics ASRS A PPM100 box fitted with a Process Control Module is a powerful and versatile vacuum system controller The process control module provides eight independent channels for system automation Each channel has a relay closure output and associated opto isolated TTL output logic signal that may be linked to a variety of input sources through user programmable rules When in AUTO mode the state of a channel is linked to the readings from an input source This input source can be e any partial total pressure measurement or analog input e the system clock e a dedicated TTL input pin Channel Rules define the exact conditions under which channels change state during automated operation The parameters required to fully specify a rule include e input source e setpoint level polarity and hysteresis e setpoint delay e channel description and labels e audio alerts Process control programming is fast straight forward
52. any of the equipment exposed to potentially harmful substances circle one No e Yes Please attach list of all known harmful substances including chemical name and symbol precautions associated with the substance and first aid measures in the event of accident Were any of the harmful substances e Radioactive Yes e No e Toxic e Yes e No e Corrosive e Yes e No e Explosive e Yes e No Was the equipment decontaminated cleaned before being shipped to SRS e Yes e No e Not Applicable Legally Binding Declaration I hereby declare that the information supplied on this form is complete and accurate The dispatch of equipment will be in accordance with the appropriate regulations covering Packaging Transportation and Labeling of Dangerous Substances Name print Job Title Organization Address Telephone Fax Email Legally binding signature Date SRS Use Only RMA Form reviewed by Signature Page 2 Name Initials Date PPM100 Partial Pressure Monitor ASRS 1 1 Chapter 1 Getting Started This chapter provides instructions for e unpacking checking and installing the PPM100 Partial Pressure Monitor connecting the cabling between the controller and the RGA Head e setting up the controller parameters e measuring partial pressures total pressures i e capacitance manometers and voltages In This Chapter Unpacking 1 3 Pressure Measurement
53. browser s address window This should bring up the PPM100 web page Click on Get Userlog on the left This displays the network settings of the PPM100 including its MAC address PPM100 Partial Pressure Monitor ASRS Installing the EWS 7 9 Choosing a Network Configuration This section illustrates some possible network configurations for the EWS This may help in choosing the best network configuration for your EWS Crossover Cable Configuration This setup uses a crossover ethernet cable that allows the EWS to connect to a single computer without a network A crossover cable is wired differently than regular network cables A normal ethernet cable is wired straight through Tx to Tx Rx to Rx while a crossover cable connects transmit to receive Tx to Rx Rx to Tx To use this configuration make sure you use a crossover cable This configuration will NOT allow email use of a DNS or access from more than one computer It will NOT allow the computer connected to the PPM to connect to the internet However it does allow you to use a standard web browser to monitor control and receive data from the PPM100 Crossover Cable Configuration RS232 Cable Crossover Cable Vacuum Chamber PPM100 Laboratory PC Figure 7 3 Crossover Cable Configuration This configuration does NOT allow access to the PPM100 from the outside world However if security is a concern this limitation is a strong reason for its use
54. connected to one of the four Analog T O ports on the back panel The analog port must be configured as an ADC input in the Analog I O Setup menu The full scale pressure of the CM Pmax must be set before pressure readings are correct CM Display must be set to Linear to properly scale the pressure measurements CMs need to be periodically re zeroed A trim pot is built into most gauge heads for that purpose However if the trim pot is out of reach use the Zero Manometer function in the Analog Setup menu For More Information Chapter 1 includes all the basic information required to install and set up your PPM100 controller and its gauges including capacitance manometers Consult Chapter 4 of this manual for further details on the operation of capacitance manometers and their proper connection to Analog I O ports Analog Signal Data Box ANT 0 257 V Temp ADC input Each Analog Signal Data Box top row AN1 AN4 displays a voltage level at an analog T O port For example AN1 displays the voltage signal input or output at the ANALOG T O port labeled 1 on the back panel of the PPM100 Each Analog Signal Data Box contains four lines of information top to bottom e ID Label AN1 AN4 For example the AN1 Box displays voltage signals at the analog I O port labeled 1 on the back plane of the PPM100 e Voltage level Voltage level input or output in Volts at the port e Port Name A unique name assigned to the physical port con
55. display pressure vs time plots built in relays for vacuum system control and several multipurpose analog and digital I O ports RS 232 USB GPIB and Web ethernet interfaces are standard in all controllers Four Analog I O ports configurable as inputs or outputs can be independently programmed to provide 1 capacitance manometer readings 2 analog input signal readings 3 output voltages linked to partial pressure values and 4 manual or software controlled output voltages Controller operation is simple and intuitive via a menu driven touchscreen user interface The screen displays readings in a large easy to read numeric format as well as in bar graph and trend formats Readings are updated twice a second and pressures can be displayed in several units systems Data Logging and Pressure vs Time plots allow you to follow pump down and venting cycles and keep track of process relay activity analog input signals and gauge operations to within a fraction of a second Complete controller specifications are included in the introductory pages of this manual This section details the main features of the PPM100 Residual Gas Analysis RGA100 200 300 The PPM100 Partial Pressure Monitor is designed to monitor and control a single SRS RGA 100 200 300 residual gas analyzer within the 10 to 10 Torr pressure range supported by the quadrupole based mass spectrometer A menu driven user interface allows the PPM100 operator to e
56. firmware revision code VRDT SNUM Firmware Build The VRDT query returns the date of the PPM100 firmware revision Serial Number The SNUM query returns the unit serial number PPM100 Partial Pressure Monitor ASRS Interface 6 47 Interface Commands VERB i IDN RST WSEN i ASRS Verbose RS 232 The VERB command sets queries the verbose serial communication mode The parameter i selects Verbose 1 or Terse 0 This command only affects the RS 232 interface The GPIB interface is always in Terse mode Use Terse for programming All responses to queries are as documented in this chapter Use the Verb 0 command at the start of all programs Use Verbose for terminal applications or debugging All terse responses are followed with a verbose message which explains the response For example a query might return 0 terse or 0 off verbose Examples VERB Returns 1 if verbose mode 0 if terse mode VERB 0 Use terse responses Identification The IDN query returns the PPM100 s device identification string This string is in the format Stanford_Research_Systems PPM100 s n0 ver001 In this example the serial number is 0 and the firmware version is 001 Reset The RST command resets the PPM100 to its default configurations The communications setup is not changed All other modes and settings are set to their default conditions and values This command takes some time to comple
57. is disabled 9 Source is disabled 10 ADC is overloaded 11 The A D is in DAC output mode CM gauge not running 12 External gauge is off Voltage lt 1V 13 External gauge shows fault condition Voltage gt 10V 15 There is no data to display 16 RGA filament is off 18 No RGA detected 19 A TTL port was used to turn the source port off 20 No measurement RS232 port is in RGA Pass Through Mode 21 The controller detected a fault 22 There is no hardware to run the source port See the GSTT command Example GSTA 9 Returns 0 if CM1 is operating normally PPM100 Partial Pressure Monitor 6 20 Partial Pressure Analog Measurement GSTT p Source Status Time The GSTT query returns the time and date that source port p last changed status The parameter p selects a source below and is required p source p source p source p source 1 PPI 5 PP5 9 CMI 13 ANI 2 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 See the GSTA command Example GSTT 9 Returns a string of the form 13 50 05aug03 OAQU Read Monitor Alarm Status The OAQU query returns an 8 bit integer corresponding to the state of the partial pressure alarms Bit 0 is 1 if PP1 alarm is on bit 1 is 1 if PP2 alarm is on etc Example OAQU Returns 5 if PP1 and PP3 alarms are on PPM100 Partial Pressure Monitor ASRS PPM Monitor Setup 6 21 PPM Monitor Setup Commands PCME p i PPM Measurement Enable The PCM
58. is the security measure to use Note that no password is required if the IP address is trusted control access is granted IP and Password Checking As an extra measure of security in addition to IP checking you can also assign a password to gain access to control of the PPM100 If you have set special parameters that are to remain unchanged even by in house personnel this is this measure to use PPM100 Partial Pressure Monitor ASRS Installing the EWS 7 17 Password Checking Only This is the lowest level of security for the PPM100 s control functions However if you require access to the control functions over a dial up connection to the instrument this is the method to use A dial up connection almost always assigns a different IP address to your connection each time you log on to your internet service provider ISP This means IP checking is not a feasible option Note The password exchange is not encrypted This means that if someone is monitoring your communication with the EWS they will see your password ASRS PPM100 Partial Pressure Monitor 7 18 Using the EWS Using the EWS To view the EWS web pages simply type the IP address of the EWS into your web browser Eie Edi View Go Cormmmusiicnior Help sak Sochmets Gowin 200 18404189 Figure 7 10 Enter the PPM100 s IP address into your browser PPMION Micierott Intemet Explores Function MONITOR Last Reading 15jul03 at 13 37 Gauges
59. isolated TTL level inputs for triggering RGA_Remote_Enable RGA_Filament on off RGA_Degas on off RGA_Fil_lockout RGA_Keypad_Lockout datalog reset and touchscreen enable disable PPM100 Partial Pressure Monitor ASRS Process Control Display 3 37 During process control the output status of all eight channels can be monitored directly from the Process Control Display or remotely via the computer or web interfaces In addition the 8 dedicated LEDs below the touchscreen provide across the room indication of channel status Manual override is available for all channels making it possible to control channel relays and TTL output levels directly from the front panel With its Process control module the PPM100 can operate as a stand alone controller capable of manual or automatic operation of any standard vacuum system All process control events are time stamped and recorded to be reviewed at any time The process control log is also accessible remotely through the computer or web interfaces Active vs Inactive When a process control channel is ACTIVE the corresponding relay is powered connecting the Common and Active N O relay pins and the TTL output pin is logic low INACTIVE means that the relay is unpowered connecting the Common and Inactive N C relay pins and the TTL output pin is logic high When a process control channel is in Auto mode it becomes Active when the conditions specified by its rule s parameters ar
60. materials that are vapors at the gauge s operating temperature Gauge heads are specified by their full scale range Pmax 10 000 Torr 0 1 Torr and have a dynamic range of approximately 4 decades The standard output is a dc analog voltage independent of the gas linear with pressure and equal to 10 V at Pmax Gauge volume is small and response is fast Capacitance manometers commonly offer accuracies of 0 25 while high accuracy products can offer 0 08 Capacitance manometers are so accurate that gauge head temperature variation is a critical source of error The long term accuracy of capacitance manometers better than 1 justifies their use as secondary standards and transfer gauges For critical applications where repeatability precision and composition independent readings are required a capacitance manometer gauge should be used to monitor and control the process pressure This is particularly true if complex or changing gas mixtures are involved Note Capacitance manometers may be ordered from several commercial sources Gauge heads can be purchased with two ports for differential measurements or with an evacuated reference side for absolute pressure measurements Heated capacitance manometers maintained at temperatures above ambient are used extensively in chemical processes gas handling systems and semiconductor processing systems operating under two sets of conditions 1 ambient temperature undergoes large fluctuatio
61. never be turned off Enabled means that between the Turnoff and Turnon times the display backlight will turn off if the touchscreen is inactive for a period longer than the Backlight Delay All PPM100 controller functions remain functional while the backlight is off Important Touch the LCD screen to restart the backlight Recommendation Use the Backlight Saver to extend the life of the screen s backlight Enable the backlight saver mode and program the on off delay times to shut off the light overnight Backlight Delay Enter the Backlight Delay time If the Backlight Saver is enabled and the time of day is between the Turnoff and Turnon times then the display backlight turns off if the touchscreen is inactive for the Backlight Delay time PPM100 Partial Pressure Monitor ASRS Backlight Menu 3 63 TurnOff Time Turnon Time Enter the backlight Turnoff Turnon Time If the Backlight Saver is enabled and the time of day is between the Turnoff and Turnon times then the display backlight turns off if the touchscreen is inactive for the Backlight Delay time Recommendation Set the Turnoff time to the time at which you leave the lab at night Set the Turnon time to just before you return in the morning There is no need to keep the light on when nobody is looking at the screen ASRS PPM100 Partial Pressure Monitor 3 64 Backlight Menu PPM100 Partial Pressure Monitor ASRS 4 1 Chapter 4 Analog Input Output
62. not had time to initialize Testing Within a Network In order to test your EWS with a real network you will need an IP address from your network administrator You will also need the subnet mask and IP address of the default gateway machine You can get these addresses from the administrator If you wish to use electronic mail you may also wish to obtain the address of a domain name server DNS 1 2 3 4 5 6 7 Make sure the EWS is Disabled Go to the Main Remote Web menu on the PPM100 if necessary Set the IP address Set the gateway address and subnet mask Connect the PPM100 EWS to a hub or other network connection with a standard ethernet network cable Do not use a crossover cable In the PPM100 Main Remote Web menu set EWS to Enabled This sets the IP addresses in the EWS and starts the EWS Under Main Remote Web touch Web Queue This screen should show web server activity as it queries the PPM for information Allow the web server to gather information from the PPM for several seconds Run a web browser on your computer At the browser s http prompt type the IP address you entered on the PPM100 front panel and hit the return key If you did not see the opening screen within a few seconds make sure of the following The web server is enabled Check Main Remote Web Web Queue see above for activity When the cable is plugged in and the server is enabled a green activity light on
63. operation RGA_Fil_On Pins 12 Trigger mode Edge J ON T OFF Debounce time 50 ms Prerequisites e RGA_Remote_Enable is logic LOW e RGA_FIL_Lockout is logic HIGH Pulling the RGA_Fil_On control line LOW after it has been high for at least 50 ms and holding the line LOW for at least 50 ms activates filament emission in the RGA Ionizer The input must remain LOW until it is required to turn the filament off RGA_FP_Disable Pins 14 Trigger mode Level LOW Disable front panel touch screen LCD and keys Debounce time 50 ms HIGH allows normal operation of the front panel touch screen display and keys unconnected default LOW locks the front panel touch screen LCD and keys The front panel including the Power Button does not respond to touches Recommendation The RGA_FP_Disable signal is often used to lock the front panel and block unauthorized changes to the controller during a process or experiment PPM100 Partial Pressure Monitor ASRS Chapter 6 Remote Programming In This Chapter Index of Commands 6 3 Alphabetical List of Commands 6 7 Introduction 6 11 Communicating With RS 232 6 11 Communicating With GPIB 6 11 Communicating with USB 6 11 Screen Indicators And Queues 6 12 Command Format 6 12 Command Synchronization 6 13 RGA Commands 6 14 PPM100 to RGA Communication 6 14 RGA Pass Through Mode 6 14 Command Syntax 6 15 Pressure Units 6 15 Partial Pressure and Analog Input Measurement Commands
64. parameter p selects a source below and is required p source p source p source p source 1 PPI 5 PPS 9 CMI 13 ANI 20 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 The returned string has the form 1 000e 009 with current units implied If the RGA is off or disconnected reading a partial pressure results in an error If an analog port has its CM Display Off or is configured as an output reading the CM gauge results in an error Example GDAT 1 Returns the reading of PP1 in the current units GDTX p Read Source Data With Units The GDTX query returns the reading from source port p with units The parameter p selects a source below and is required p source p source p source p source 1 PPI 5 PPS 9 CMI 13 ANI 2 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 The returned string has the form 1 00 09 Torr This string is identical to data display on the screen Example GDTX 1 Returns the reading of PP1 with the current unit string LRAT p Read Leak Rate The LRAT query returns the leak rate for partial pressure p in the current units The Leak Rate Coefficient LRCE command must be set for this query to be meaningful The parameter p selects a source below and is required p source p source p source 1 PPI 5 PP5 9 CMI 2 PP2 6 PP6 10 CM2 3 PP3 7 PP7 11 CM3 4 PP4 8 PP8 12 CM4 The returned string has the form 1 000e 007 Example LRAT 1 Returns the leak
65. pressure Pmax must be programmed to the pressure corresponding to 10V output and CM Display must be set to Log A 1V decade relationship between voltage and pressure is assumed over the entire useful pressure range of the gauge The level of a DAC output can be set manually Volts When Source Manual or remotely through the computer interface or may be linked to the log partial pressure PP1 PP8 DAC Source The PPM100 allows you to assign a descriptive Location name text string to each analog port and each capacitance manometer reading Locations are displayed in the Info Box of the Pressure Display screen and in the AnaloglO and CM Data Boxes of the AnaloglO Display This makes it easy to identify the signal source For More Information The menus used for Analog I O port configuration are described in detail in the Gauges Display section of Chapter 3 PPM100 Partial Pressure Monitor ASRS Analog I O Ports 4 5 Analog Inputs When an analog port is configured as an ADC Input its signal levels dc voltage or CM pressure can be displayed on the front panel Pressure and AnalogIO Display Screens and or monitored remotely through the computer and or web interfaces When Data Logging is enabled all analog input voltages are stored in memory as part of the data log Voltage levels beyond the 12V range display the message OVERLOAD Process Control Channels can be linked to ADC Input ports Channel activation takes place ab
66. pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter i selects disabled 0 or enabled 1 Examples OAEN 2 Returns the Alarm Enable state 0 or 1 of PP2 OAEN 2 1 Enable PP2 Alarm OALH p x Alarm Level High The OALH command sets queries the Alarm High Level of partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter x is the Alarm High Level expressed in the current system units Examples OALH 1 Returns the Alarm High Level for PP1 in the current units OALH 1 1 2E 3 Set the Alarm High Level for PP1 to 0 0012 in current units PPM100 Partial Pressure Monitor ASRS PPM Monitor Setup 6 23 OALL p x Alarm Level Low The OALL command sets queries the Alarm Low Level of partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter x is the Alarm Low Level expressed in the current system units Examples OALL 1 Returns the Alarm Low Level for PP1 in the current units OALL 1 3 4E 5 Sets the Alarm Low Level for PP1 to 0 000034 in the current units OABP 7 p i Alarm Beep ASRS The OABP command sets queries the Alarm Beep mode on off of partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter i selects off 0 or on 1 Examples OABP 1 Returns the Alarm Beep mode for PP1 OABP 1 0 Sets the Alar
67. properly wired setup should protect the system and operators from hazardous conditions whenever power is lost and should remain in a safe state after power is reestablished Keep in mind that all process control channels are set to Manual Mode INACTIVE every time the PPM100 controller is powered up this should be considered a Fail safe state You must switch the appropriate channels to Auto Mode to restart automated operation after every power up No process control actions take place based on RGA readings while the spectrometer is establishing emission current while the ionizer is degassing or while in the MassSpec Display performing analog scans To prevent relay arcing use transient absorbers when connecting inductive loads such as motors or solenoids to the process relays It may be necessary in some cases to use an external power relay driven by a process relay to switch a device on and off No single mass partial pressure readings are performed while the MassSpec display is active As a consequence all partial pressure related process control events are frozen while mass spectra are being displayed Partial pressure readings and related process control resume when the MassSpec display is exited All process channels must be set to a safe manual state either Active or Inactive prior to e accessing the MassSpec Display e calibrating the RGA electrometer e degassing the RGA e changing the Silent Audio Leak Trend mode in t
68. regarding the installation and connection of gauges Each partial pressure measurement PP1 PP8 has its own setup menu and measurement parameters Access the Monitor Setup menu of a partial pressure measurement to modify its Setup Parameters 1 from the Monitor Display touch a Partial Pressure Data Box or 2 from the Pressure Display touch the Info Box of the corresponding partial pressure Data Bar Monitor Setup PP1 PP1 Measurement 8 Enabled Alarm pe oo oe g0 00 cos o9 PP1 Mass amu 13 PP1 Scan rate Alarm High Alarm Low 2 3 Oxygen Argon Pump oil co2 Back Po O PP1 Name PP1 Detector Pressure Help Hydrogen Faraday cup Pet 96 08 Pt 5 32 08 Hydrogen PPS Eria 3 Nitrogen 9 a Pressure Analogio Set via library l PP1 Correction factor 15 Hydrogen 1 Back P a Pressure Monitor Help Figure 3 13 Monitor Setup Menu For More Information Chapter 1 includes all the installation and setup information required to set up your PPM100 controller and its gauges PP8 Measurement Enable or Disable the partial pressure measurement and display for the selected partial pressure data box or data bar When a partial pressure reading is disabled i e skipped NO DATA is shown in place of the partial pressure readings Disabled is also shown in the partial pr
69. register This allows a single read of the Serial Poll Status to determine if any enabled bits in all of the other status registers is set These bits in the Serial Poll Status are not cleared by reading They remain set as long as the enabled bit in the other status register is set Read the other status registers to determine which bit s are set and clear them PPM100 Partial Pressure Monitor 6 50 Status Reporting The Serial Poll Status register has a matching Serial Poll Enable register When a bit in both becomes set the Service Request or SRQ bit will be set This causes an IEEE 488 bus service request When an enabled Serial Poll bit becomes set a single service request is generated STB to Read the Serial Pol Status The Serial Poll Status register is NOT cleared by reading the status using STB A bit stays set as long as the status condition exists This is true even for bit 6 SRQ Bit 6 will be set whenever the same bit in the Serial Poll Status AND Serial Poll Enable registers is set Serial Poll to Read the Status Except for SRQ a bit in the Serial Poll Status is NOT cleared by GPIB serial polling the status register A bit stays set as long as the status condition exists When reading the status using a GPIB serial poll the SRQ bit signals that the PPM100 is requesting service The SRQ bit will be set the first time the PPM100 is polled following a service request The serial poll automatically clears the servic
70. responsible for channel activation must be specified by the user factory default setting is active low meaning that the channel is ACTIVE when the logic level on the pin is LOW TTL Output 8 pins Each process control channel has a dedicated TTL output signal Following common industry standards all process control TTL output signals are Active Low when a process control channel is ACTIVE the corresponding TTL output is logic LOW INACTIVE means the channel s TTL output pin is logic high Remote Control Input 7 pins The Process Control module also includes 7 TTL logic inputs for remote logic control of various controller functions e RGA remote enable e RGA Filament On Off e Degas On Off e RGA Filament lockout e RGA keypad disable e Data log clear reset e Front Panel disable Recommendation Use the Remote Control TTL inputs to control important PPM100 functions remotely without the need for a computer interface A common application is clearing the data logging buffer to synchronize the start of the data log with a particular event such as 1 the opening of a gate valve or 2 the achievement of full speed by a turbo pump Gate valve and turbo pump controllers often provide logic outputs compatible with the remote control module Remote control inputs can also be interfaced with Programmable Logic Controllers signals PPM100 Partial Pressure Monitor 5 18 Process Control Digital I O Connections
71. scale ranges most commonly encountered in commercial capacitance manometers are 50 and 100 mTorr and 1 2 10 100 and 1000 Torr Consult your gauge manufacturer s directly if unsure about your gauge s full scale range CM Name The CM Name entry is very convenient and its use is highly recommended in multi gauge setups PPM100 allows you to assign a unique name to each CM gauge CM Names are displayed next to their pressure readings Use the CM Name to differentiate between identical gauges in a multiple gauge setup CM display The CM display must be set to Linear so that capacitance manometer pressures are calculated and displayed properly i e following a linear relationship between output voltage and pressure and using the CM Pmax setting Once finished entering the new parameters touch the Back QuickKey lAnalosio to return to the AnalogIO Display Screen CM gauge voltages and pressures are now displayed in their corresponding data boxes SRS PPM100 Partial Pressure Monitor 1 18 Pressure Measurement Pressure Measurement This section describes the steps required to measure and display partial and total pressures from an SRS RGA and up to four capacitance manometer gauges connected to the PPM100 This is the final step of the installation procedure It is assumed that one SRS RGA and at least one capacitance manometer CM1 connected to AN1 are connected to the back ports and that the controller has been comp
72. the currently displayed data Press to move the mass spectrum cursor to the left or right in 1 amu increments and find the exact mass position and height of peaks throughout the spectrum 4 Mass Spectrum Graph Area This is the actual area where the mass spectrum is displayed The mass range extends from Initial Mass to Final Mass Logarithmic Y Axis scaling takes full advantage of the large dynamic range of the RGA Pmin and Pmax are displayed below and above the graph respectively If not already on press the FILAMENT button to establish electron emission and activate the acquisition and display of mass spectra Press the FILAMENT button again to turn off the filament and stop analog scanning The most recent full mass spectrum is preserved on the screen for analysis Electron Multiplier e Wait for electron emission to be established in the RGA head before pressing the E MULTIPLIER button e Press the E MULTIPLIER button to activate the electron multiplier detector during analog scans and improve the detection limit of the SRS RGA e The electron multiplier can only be turned on if the filament is already on and emitting electrons e The electron multiplier is shut down if the filament is turned off during a scan e The electron multiplier is shutdown when the MassSpec Display is exited Tip Use the Analog MassSpec Display mode to identify and select single masses during the Partial Pressure Measurement setup Curs
73. the PPM100 while in Pass Through Mode All process control channels must be set to a safe manual state before Pass Through mode is chosen PPM100 Partial Pressure Monitor 3 54 Remote Menu Tips e Pass Through Mode is indicated by the P T RGA connection icon in the upper right portion of the screen e Use the Pass Through Mode to communicate with directly with the RGA head through the PPM100 with a host computer running RGA Windows In this case RGA Windows operates as if the host were connected directly to the RGA head RS 232 Queue Display the transmit and receive buffers for the PPM100 HOST RS 232 port The PPM100 buffers the most recent characters received and transmitted over the interface The Queue display shows the interface history The Queue display may slow down communications and should be displayed only when testing or debugging a host program Press a QuickKey to exit from this display The upper half of the Remote Queue display is the Receive Queue These are the most recent characters which have been received by the PPM100 displayed in UPPER case Commands which have already been executed are shown in normal text Commands which have not yet been executed are shown with a gray background Command errors are shown in inverse text The lower half of the Remote Queue display is the Transmit Queue These are the most recent characters which have been placed in the output buffer Characters which have already bee
74. to monitor the condition of their system Status checking and error reporting should be an integral part of any custom built control software The PPM100 controller offers sophisticated error and status reporting capabilities beyond the simple error reporting capabilities of the RGA Head Tip Keep in mind that the PPM100 also offers a pass through communication mode that can be used to query the RGA s Error and Status bytes directly through the PPM100 interface PPM100 Partial Pressure Monitor 8 6 Error Detection For More Information Consult Chapter 6 for a complete listing of the error checking commands and status registers Consult Chapter 6 of the SRS RGA Operation and Programming manual for details on RGA error codes and status checking commands Interface Queues The PPM100 buffers the most recent characters received and transmitted over the RS 232 HOST RS 232 GPIB USB and Web interfaces A Queue Display accessed through the Remote submenu of the Main Menu shows the interface history for both transmitted and received data Use this feature to troubleshoot communications during the development of your custom control software For More Information Consult the RS 232 GPIB USB and Web Queue menu items in Chapter 3 of this manual Consult Chapter 6 for communications troubleshooting information PPM100 Partial Pressure Monitor ASRS Error Messages 8 7 PPM100 Error Messages Error Messages alert PPM10
75. via a direct PC to instrument connection You will need an ethernet crossover cable and a computer with a network card already configured with network parameters If you need to set up a computer for networking contact your network administrator Please do not contact SRS for support of your network A workstation attached to the same network you wish to use the EWS with is ideal for this test If the computer is already hooked up to a network make sure disconnecting it will not cause problems for others on that network In this crossover configuration real networking parameters Subnet mask DNS Gateway are not required 1 2 3 4 5 6 7 8 9 Make sure the PPM100 is powered up and running normally Disconnect the computer from its ethernet network Connect the PPM100 EWS to the computer using a crossover cable From the command line prompt of your workstation enter the command ipconfig This command will report the workstation s IP address On the PPM100 go to the Main Remote Web menu Make sure the EWS is Disabled For this test the IP address can be fictitious Set the EWS to use a fictitious address by subtracting one from the IP address of your workstation For example if your workstation IP address was reported as 111 111 111 111 use 111 111 111 110 for your fictitious EWS IP address This is the only networking parameter required for this crossover test In the PPM100 Main Remote Web menu s
76. which are waiting to be sent are shown with a gray background PPM100 Partial Pressure Monitor 3 60 Screen Menu Screen Menu Touch Screen in the Main menu to display the Screen menu Main Screen 3k Clean touch screen 3k Calibrate Touch Screen Contrast Up Contrast Down Eg a Pek a Pressure Monitor Process Main Help Figure 3 29 Main Screen menu Contrast Up Contrast Down Adjust the screen contrast according to your viewing needs Clean Touch Screen Display the Touchscreen Cleaning display with countdown timer This allows the user to clean the screen without turning the power off The cleaning display has no touch sensitive areas and can be wiped clean without changing any instrument settings The touchscreen should be cleaned according to the procedure below and only while the Touchscreen Cleaning display is on or the unit is off The timer indicates the time remaining before returning to the menu Cleaning procedure For best results use a clean non abrasive cloth towel and a commercial window cleaner to regularly clean the screen The cleaning solution should be applied to the towel NOT the surface of the touchscreen Fluid may seep behind the panel if it is not cleaned properly WARNINGS Do not operate the touchscreen with the tips of pens or sharp objects that might permanently stain or damage the screen surface The surface of the touchscreen shoul
77. 0 to the external Vcc supply 5 to 15 Vdc Pull inputs to external ground for low inputs For non isolated operation of ALL TTL inputs connect ANODE_COM pins 2 and 20 to PPM100 Vcc pin 1 or 15 and pull inputs to PPM100 Ground pin 30 or 31 for low inputs In both cases leaving an input unconnected or open is equivalent to a HIGH input Output Circuit The TTL outputs are opto isolated from the PPM100 The schematic of a TTL output is shown below COM_COLTR_PULLUP Connect to external Vcc PENMON MEES 5 to 15 Vdc 10k O TTL Output Pin 0 to external Vcc Z gt o COM_EMTR_REF O Connect to external ground Internal TTL Signal PPM100 Figure 5 14 TTL output pin schematic For isolated operation of ALL TTL outputs connect COM_COLTR_PULLUP pin 33 to the external Vcc supply 5 to 15 Vdc and COM_EMTR_REF pin 32 to the external ground The TTL output will be external 0 V or Vcc low or high For non isolated operation of ALL TTL outputs connect COM_COLTR_PULLUP pin 33 to PPM100 Vcc pin 1 or 15 and COM_EMTR_REF pin 32 to PPM100 Ground pin 30 or 31 The TTL output will be external 0 V or 5 V low or high PPM100 Partial Pressure Monitor ASRS Process Control 5 21 ASRS Connection Tips All TTL inputs may be connected to respond to relay closure signals such as those provided by the mechanical position indicators of gate valves or full speed indicators of turbomolecular p
78. 0 Pressure Display Pressure Display ID Box Use the Pressure Display as the main starting point in operating the PPM100 Use the Pressure or Back to Pressure QuickKeys to bring up the Pressure Display Pressure 12 25 2 amu Torr Hydrogen A 4 amu 2i 99 09 z Helium Pressure any i Menu Monitor Process Chart Help Figure 3 2 Use the Pressure QuickKey to bring up the Pressure Display This display has three horizontal Data Bars each displaying a measurement from a pre selected source i e RGA CM or analog signal Readings may be displayed in various formats and are updated twice a second Customize a Data Bar by touching the ID Box left the Data Box center or the Info Box right The QuickKeys presented in the main Pressure Display provide fast access to the most important displays Menu Monitor Process Table Chart and Help Within any of these other displays new QuickKeys may provide access to additional displays In each case use the Pressure or Back QuickKeys to return to the Pressure Display The ID Box identifies the source of the readings in the Data Bar The data source can be the RGA a capacitance manometer or an analog signal Touch the ID Box to display a list of available data sources partial pressure PP1 PP8 capacitance manometer CM1 CM4 and analog signal AN1 AN4 Select a data source for the Data Bar PPM100 Partial Pressure Monitor ASRS
79. 0 Sets Pmin to 1 3x10 in the current units LCPX x Chart MassSpec Pmax The LCPX command sets queries the value of the Chart MassSpec Y Axis Pmax The parameter x is a pressure expressed in the current units Examples LCPX Returns the value of Pmax in the current pressure units LCPX 1 3e 6 Sets Pmax to 1 3x10 in the current units SYSA Autoscale MassSpec Y Axis The SYSA command Autoscales the MassSpec Y Axis This command has no effect unless the MassSpec display is on the screen This command has no parameters and no query Example SYSA Autoscale the Y Axis in the MassSpec Display PPM100 Partial Pressure Monitor ASRS MassSpec Display 6 37 CTOM n MACB PACB ASRS Move MassSpec Cursor The CTOM command sets queries the cursor position for the MassSpec display analog scan The parameter n is a mass in AMU 1 300 Note If the desired position is not within the current scan the cursor will be placed at the edge of the display Example CTOM Returns the Cursor mass position CTOM 18 Sets the Cursor mass position to 18 AMU Read MassSpec Mass The MACB query returns the exact location of the highest peak within a 1 AMU wide region centered on the cursor position as set by the CTOM command Note Use this command only if a MassSpec is complete as indicated by the OSCC query Example MACB Returns the exact mass position of the highest peak within 0 5AMU of the cur
80. 0 users of instrument malfunctions detected during normal operation They are short descriptive messages one or two words displayed within a Data Box or Data Bar where measurements are normally displayed Touch the Data Box and choose Status Information to display a more complete description of the problem The following tables list all Error Messages along with possible causes and recommended solutions Pressure Voltage Display Error Message Cause Solution GAUGE FAULT OVERRANGE The Data is too large for a valid Reduce the pressure or voltage in your reading system NEGATIVE The PPM100 cannot display Rezero the controller negative numbers in this display Choose a different display mode mode OVERLOAD The input voltage is beyond the Limit the voltage range of the input signal 12V range of the analog I O port Use a voltage divider if necessary Excessive input voltage Reduce the pressure of the capacitance manometer connected to the port FAULT There is a serious system hardware Contact SRS problem in the controller that needs Do NOT use the PPM100 until the immediate attention problem is diagnosed RESET There has been no data to display Contact SRS since the unit was turned on DISPLAY OFF Pressure Display turned off This usually means that the CM Mode has been set to Off for the AnaloglO Port DAC OUTPUT The CM is connected to an analog Configure the capacitance manometer I O port configure
81. 00 In this case change the port to something else like 8080 You will need to specify this port in your browser address window as 208 123 123 32 8080 where 208 123 123 32 is the IP address of the PPM100 and 8080 is the port number For more information about NAT routers and ports see your network administrator Wait at least 30 seconds after changing the port number for the change to take effect PPM100 Partial Pressure Monitor ASRS Remote Menu 3 57 ASRS Control Submenu Display the Web Control submenu The web server can disallow any user from controlling the PPM100 via the web In this case only monitoring is allowed from the web If web control is required there are two types of security Password security requires the user to enter the password from their browser and Trusted IP allows control only to those IP addresses entered in this menu Both types can be used together See Chapter 7 Embedded Web Server for more information on configuring the PPM100 for the internet Web Control Enable or Disable web control of the PPM100 Disabled prevents any user from controlling the PPM100 via the web In this case only monitoring is allowed on the web This provides the most security but only allows monitoring Enabled allows both monitoring and control of the PPM100 Important There are two types of security Password security requires the user to enter the password from their browser and IP Checking allows acce
82. 1 18 Before You Open the Box 1 3 Warm up times 1 18 Checklist 1 3 Partial Pressure Measurements PP1 PP8 1 18 Standard Equipment Supplies 1 3 Capacitance Manometer Readings CM1 CM4 1 20 oplone Sampe B Pressure Display Screen 1 21 Installing the PPM100 Controller 1 4 Data Display Options 1 22 Mounting Options 1 4 Big Numbers 1 22 Line Power Connection 1 4 Trend Graph 1 23 Grounding 1 5 Silent Audio Leak Trend Graph 1 23 Installing and Connecting the aE a eF RGA Head 1 6 Leak Rate 1 24 Installing the RGA Head 1 6 Status Information 1 25 Connecting to the RGA Head 1 6 Pressure Units 1 25 Installing and Connecting Logging 1526 Capacitance Manometers 1 8 MassSpec Display 1 27 Installing a capacitance manometer 1 8 Using the Display 1 28 Connecting a Capacitance Manometer 1 9 i i Grounding 1 9 Leak Testing with the PPM100 1 29 e E ae Proper Grounding Test Procedure 1 31 Ground Test Procedure 1 32 PPM100 Quick Setup 1 12 Power On Procedure 1 12 Connection Status 1 13 Reset 1 13 Partial Pressure Setup 1 14 Partial Pressure Parameters 1 15 Capacitance Manometer CM1 4 Setup 1 16 ASRS PPM100 Partial Pressure Monitor 1 2 Getting Started PPM100 Partial Pressure Monitor ASRS Installing the PPM100 1 3 Unpacking Before You Open the Box Read the entire Safety and Preparation for Use section of this manual before starting any installation procedure Take a moment at this time to read or review the installation operation and
83. 100 Partial Pressure Monitor ASRS MassSpec Display 1 29 Leak Testing with the PPM100 ASRS An RGA can be used as a leak detector to detect helium as well as many other gases The preferred method for using an RGA in this application is to mount it directly on the vacuum chamber and spray helium on the suspect flanges welds and bellows If there is a leak the helium will enter the system and the RGA will detect its presence inside the vacuum environment The PPM100 includes two leak trend displays silent and audio with audible alarms and real time displays of tracer gas pressure versus time to simplify leak testing Since the mass spectrometer is not restricted to helium detection other tracer gases can be used as alternatives to helium neon oxygen argon fluoroform and krypton are the five most common helium substitutes used in conjunction with RGAs The most distinguishing advantage of an in situ RGA over a conventional helium leak detector is its ability to detect leaks in real time and without the need for any specific tracer gas The most common problem in vacuum systems is air leaks A PPM100 connected to an RGA can be set to continuously monitor the mass spectrum of a vacuum chamber looking specifically for the distinctive 4 1 ratio of nitrogen mass 28 and oxygen mass 32 corresponding to an air leak An in situ RGA provides the only way to detect leaks that only manifest themselves during dynamic processes such as the actuat
84. 100 eV IEEV 7 i lon Energy The IEEV command sets queries the Ion Energy The parameter i selects Low 8eV 0 or High 12eV 1 The default is High 1 Examples IEEV Returns the Ion Energy setting 0 or 1 IEEV 1 Sets the Ion Energy to High 12eV FOPV n Focus Voltage The FOPV command sets queries the Focus Voltage The parameter n is an integer 0 150 with units of Volts The default is 90 Examples FOPV Returns the Focus Voltage in Volts FOPV 90 Sets the Focus Voltage to 90 Volts PPM100 Partial Pressure Monitor ASRS 6 26 RGA SCRA n ECMA x Scan Rate The SCRA command sets queries the Scan Rate The parameter n is an integer 1 8 The default is 5 Examples SCRA Returns the Scan Rate 1 8 SCRA 3 Sets the Scan Rate to 3 Electron Current The ECMA command sets queries the Electron Current The parameter x 0 02 3 5 is the current in mA The default is 1 00 Examples ECMA Returns the Electron Current in mA ECMA 1 5 Sets the Electron Current to 1 5 mA EMIS 7 i ENEM i EMBV n RGA Filament Emission On Off The EMIS command turns RGA Filament Emission On i 1 or Off G 0 This command duplicates the function of the FILAMENT button on the front panel EMIS queries whether the RGA Filament is on or off Turning Filament Emission OFF will cancel any pending commands to the RGA If commands changing RGA settings immediately precede the EMIS 0 c
85. 100 logs all process control events To read the process log use the RHGF query to return the most recent entry in the log Then issue RHGN repeatedly to get the rest of the entries until the string amp is returned signaling that all entries have been read This command pair retrieves the log as it was when the RHGF command was received Log entries created while you download the log do not appear in it If you try to retrieve history over two interfaces at the same time you will not get the complete history on either WARNING The Embedded Web Server continually issues RHGF and RHGN If you have the web server option you must disable it from the Remote Web menu or with the WSEN command to use these commands PPM100 Partial Pressure Monitor ASRS Process Control 6 43 RHCL The returned string has one of the formats below State or Mode change When a channel changes state or mode an entry is returned with the following format lt date gt lt time gt lt StateBits LSB first gt lt ModeBits LSB first gt lt channel gt lt State or Mode gt lt new State or Mode gt For example the returned string 23jun01 12 15 49 PM 10100000 01000000 2 Mode Auto indicates the date time that channel 2 was switched to Auto mode The first bitfield shows 2 channels are active 1 and 3 The second bitfield shows that only channel 2 is in Auto mode Another example the returned string 23jun01 10 42 35 AM 10000000
86. 15 to j 0 or 1 The ERSE query returns the value 0 65535 of the Error Status Enable register The ERSE i query returns the value 0 or 1 of bit i 0 15 When a bit becomes set in BOTH the Error Status register AND the Error Status Enable register bit 1 IERR of the Serial Poll Status is set This causes an SRQ if bit 1 in the Serial Poll Enable register is set To clear a bit in the Error Status use ERSW Examples ERSE Returns the Error Status Enable register 0 65535 ERSE 2 Returns 0 if bit 2 is clear 1 if it is set ERSE 48 Sets the Error Status Enable register to 48 decimal bits 4 and 5 set ERSE 12 0 Clears bit 12 of the Error Status Enable register Read Gauge Status The GSSW query returns the value of the Gauge Status register The value is returned as a decimal number from 0 to 65535 The GSSW i query returns the value 0 or 1 of bit i 0 15 GSSW clears the entire register while GSSW i clears just bit i The conditions for each bit are listed below bit name set when 0 RGA_Com a problem communicating with the RGA head occurs This includes the RGA being turned off or disconnected 1 Unused 2 Unused 3 Unused 4 AN1_Rng ANI reading is out of range 5 AN2_Rng AN2 reading is out of range 6 AN3_Rng AN3 reading is out of range qi AN4_Rng AN4 reading is out of range 8 13 Unused 14 Scan_Done an analog scan in the MassSpec display completes 15 Log_Entry a new point is added to the pressure log These bit
87. 53 GPIB 3 54 Web 3 55 Web Control 3 57 USB 3 59 Screen Menu 3 60 Backlight Menu 3 62 Chapter 4 Analog I O Ports Analog I O Ports AN1 AN4 4 3 Capacitance Manometers CM1 CM4 4 6 Compact Gauges 4 8 Chapter 5 Process Control Process Control Warnings 5 3 Why Use Process Control 5 4 Process Control Basics 5 5 Relay Connections 5 11 Digital I O Module 5 17 Remote Control Inputs 5 22 PPM100 Partial Pressure Monitor ASRS Contents Chapter 6 Programming Index of Commands 6 3 Alphabetical List of Commands 6 7 Introduction 6 11 Command Syntax 6 15 Partial Pressure Analog Input Measurement Commands 6 17 PPM Monitor Setup 6 21 Analog I O Setup 6 24 RGA Commands 6 25 Logging Commands 6 30 Charting 6 33 Mass Spectrum Display Commands 6 35 Process Control Commands 6 38 Backlight Commands 6 44 System Commands 6 45 Interface Commands 6 47 Status Reporting 6 49 Status Reporting Commands 6 52 Using USB _ 6 58 Chapter 7 Embedded Web Server EWS Quick Start 7 3 Installing the EWS 7 5 Using the EWS 7 18 Networking Terms 7 32 Chapter 8 Troubleshooting ASRS Warnings 8 3 Resetting the PPM100 8 3 Error Detection 8 4 PPM100 Error Messages 8 7 Basic Troubleshooting 8 9 Maintenance 8 13 Damage Requiring Service 8 14 PPM100 Partial Pressure Monitor x Overview Front Panel Overview MODEL PPM100 z PARTIAL PRESSURE MONITOR Pressure h 1321 1 i 54 07 heal 1 00 14 a 2 13 07
88. 6 Detect Hardware E ECMA x 6 26 Electron Current EEEV n 6 25 Electron Energy EMBV n 6 26 RGA Electron Multiplier Bias Voltage EMIS i 6 26 RGA Filament Emission On Off ENEM i 6 26 RGA Scan Electron Multiplier On Off EREQ i 6 26 RGA Ionization Source ERSE i j 6 55 Error Status Enable ERSW i 6 54 Read Error Status ASRS PPM100 Partial Pressure Monitor 6 8 Index of Commands F FOPV n 6 25 Focus Voltage FREV 6 46 Firmware Revision G GADM n i 6 24 I O Mode GCMM n 1 6 24 CM Mode GDAS n i 6 24 DAC Source GDAT p 6 18 Read Source Data GDAV n x 6 24 Output Value GDES p s 6 18 Gas Name Port Location GDES p s 6 21 Gas Name Port Location GDTX p 6 18 Read Source Data With Units GPBA n p 6 17 Data Bar Assign GPDF n 1 6 17 Display Format GPMU n s 6 17 Pressure Units GSSE i j 6 56 Gauge Status Enable GSSW i 6 55 Read Gauge Status GSTA p 6 19 Source Status GSTT p 6 20 Source Status Time H HVTM p i 6 22 PPM Detector l IEEV i 6 25 Ion Energy IRFE i 6 27 _RF7 Error Handling L LCPN x 6 33 Chart MassSpec Pmin LCPX x 6 33 Chart MassSpec Pmax LCRG n 6 33 Time Range LCSA 6 33 Autoscale Y Axis LCSF 6 34 Scale X Axis to Full LCVN x 6 33 Vmin LCVX x 6 33 Vmax LRAT p 6 18 Read Leak Rate LRCE n 6 18 Leak Rate Coefficient
89. 7 s System Name The NAME command sets queries the System Name The string s is the name and is converted to UPPER case Examples NAME Returns the System Name NAME my PPM Sets the Name to MY PPM TIME s DATE 7 s VOLC n MENU d ASRS Time The TIME command sets queries the System Time of day The string s is the time in the format 9 30PM or 17 30 Examples TIME 9 30pm Sets the system time to 9 30 PM TIME 21 30 Sets the system time to 9 30 PM TIME Returns 21 30 Date The DATE command sets queries the System Date The string s is the date in the format ddMMMyy where MMM are the first 3 letters of the month jan feb mar etc Examples DATE 23may01 Sets the system date to May 23 2001 DATE Returns 23may01 Volume The VOLC command sets queries the system audio Volume The parameter n is the volume setting from 0 to 10 Examples VOLC Returns the Volume setting VOLC 9 Sets the Volume to 9 loud Display Screen The MENU command changes queries the screen display The parameter d selects a display listed below d display d display 0 Pressure Display 4 Table Display 1 Monitor Display 5 MassSpec Display 2 Process Display 6 Analog I O Display 3 Chart Display Note Use the SCOK query before using MENU 5 to switch to the MassSpec Display Example MENU 2 Shows the Process Display on the screen PPM100 Partial Pressure Monitor 6 46 System
90. A dynamic IP address changes frequently Often clients have dynamic IP addresses that are assigned to them when they boot up When you use a dial up connection an IP address is assigned to you each time This means you get a different IP address every time you log on from a dia up connection Fictitious IP Address Networks that are not directly connected to the world wide web sometimes use fictitious IP addresses valid only for local communication Machines connected to this type of network are not directly accessible from outside that network This improves security of the network and conserves the number of real IP addresses required for a facility A network of fictitious addresses can be connected to the web using a router MAC Address The media access control MAC address is another unique address that belongs to the physical network interface card It is sometimes called an ethernet address It is often expressed as a series of hexadecimal codes separated by a dash for example 00 00 1A 18 FF 00 The Internet Protocol IP maps each machine s individual MAC address to an IP address DNS Address People have a difficult time remembering and using long strings of numbers so domain name servers are in use You can think of these machines as a kind of telephone book they associate a particular IP address 209 239 160 084 with a string of characters www thinksrs com A DNS is not required to use the EWS but it can make your life
91. Cable included in the RGA package Connect the female cable connector to the RGA RS 232 DB9 Connector on the back plane of the PPM100 controller Connect the other end of the cable to the female DB9 connector labeled RS 232 DCE 28 8k on the back panel of the RGA s electronic control unit ECU SRS STANFORD BESEAACH SYSTEMS MADE IN USA ch s 1 ossa J DIGITAL 4 vO 1 Figure 1 3 RGA RS 232 Connector on the back of the PPM100 SRS PPM100 Partial Pressure Monitor 1 8 Connecting a Capacitance Manometer Installing and Connecting Capacitance Manometers Capacitance manometers are also called Capacitance Diaphragm Gauges The PPM100 can display pressure as measured from standard capacitance manometers CMs Up to four independent CM readings can be monitored simultaneously using the four ANALOG I O ports located on the back panel of the controller The PPM100 also supplies auxiliary power 15 Vdc 100 mA sufficient to operate a pair of standard i e non heated capacitance manometers The PPM100 precisely measures the 0 to 10 Vdc linear output signal from the CM to determine pressure Full scale ranges up to 1000 Torr are supported by the controller CMs may be ordered from several commercial sources The specifications of CMs should always be compared with the PPM100 specifications before a connection is established Stanford Research Systems is not responsible for changes in design or specifications of third part
92. D d i 6 38 Channel Mode RPHY d n 6 40 Percent Hysteresis RPOL d i 6 40 Setpoint Activation RSSE i j 6 57 Process Status Enable RSSW i 6 56 Read Process Status RSTA d 1 6 39 Channel State RTCL d n s 6 41 Activation Time RTIL d i 6 41 TTL Activation Level RTOP d n s 6 41 Deactivation Time RTRP d x 6 39 Pressure Setpoint RTRV d x 6 40 Voltage Setpoint RVHY d x 6 40 Voltage Hysteresis S SCAN i 6 36 Start Stop Analog Scan SCMEF n 6 35 MassSpec Final Mass SCMI n 6 35 MassSpec Initial Mass SCOK 6 35 Analog Scan OK SCRA n 6 26 Scan Rate SMCF p x 6 21 Gas Correction Factor ASRS PPM100 Partial Pressure Monitor 6 10 Index of Commands SNUM 6 46 Serial Number SVGL p i 6 22 Set Gas via Library SYNC 6 28 RGA SYNC SYSA 6 36 Autoscale MassSpec Y Axis T TIME s 6 45 Time TTLL 6 42 Read TTL Inputs V VERB i 6 47 Verbose RS 232 VOLC n 6 45 Volume VRDT 6 46 Firmware Build Ww WSEN i 6 47 Web Server Enable PPM100 Partial Pressure Monitor ASRS Remote Programming 6 11 Introduction The PPM100 Partial Pressure Monitor may be remotely programmed via its standard 1 RS 232 serial HOST RS 232 2 GPIB IEEE 488 or 3 USB Universal Serial Bus interfaces Any computer supporting one of these three interfaces may be used to program the PPM100 All in
93. E command sets queries the PPM Measurement mode enabled disabled for partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter i selects disabled 0 or enabled 1 Examples PCME 2 Returns the Measurement Enable state 0 or 1 of PP2 PCME 2 1 Enable PP2 measurement MAME 7 p n PPM Mass GDES p s SMCF p x ASRS The MAME command sets queries the mass for partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter n is the mass in AMU 1 300 Note The actual mass range is determined by the model of RGA connected to the PPM100 Examples MAME 1 Returns the mass of PP1 MAME 1 18 Sets the mass of PPI to 18 AMU Gas Name Port Location The GDES command sets queries the gas name or port location string The parameter p selects a source below and is required The string s is the name or location string p source p source p source p source 1 PPI 5 PPS 9 CMI 13 ANI 2 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 Examples GDES 3 WATER Sets the gas name of PP3 to WATER GDES 3 Returns the gas name of PP3 WATER in this case Gas Correction Factor The SMCF command sets queries the Correction Factor for partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter x is the Correction Factor unitless Examples S
94. Enable the RGA Pass Through Mode SYNC RGA SYNC The SYNC query is used when beginning a remote session SYNC forces the settings of the PPM100 to match those of the RGA This is important if the PPM100 has been in RGA Pass Through mode running RGA Windows for example and the RGA settings have been changed without the PPM100 knowing about it If the RGA has only been under PPM100 control then SYNC is unnecessary The SYNC query takes up to 30 seconds to complete SYNC returns the value of the RGA status byte see the RGA manual for details Important Do not send any other RGA commands until the response to SYNC has been received Another way to accomplish the same thing is to run an initialization routine which sets every parameter in the PPM100 that is required for the measurement This will ensure that the RGA settings are in agreement with the PPM100 Example SYNC Synchronize the PPM100 with the RGA and return the RGA status byte PPM100 Partial Pressure Monitor ASRS RGA 6 29 Warning The following commands CALL CEIV and DGAS all interrupt PPM100 partial pressure measurements All process channels must be set to a safe manual state either Active or Inactive prior to calibrating or degassing the RGA CALL Calibrate RGA Detectors The CALL query calibrates all RGA detectors and returns the RGA status when complete See the RGA manual for details This process takes about a minute and no other comman
95. F7 Error Handling The IRFE command sets queries the RF7 Error Handling to Ignore i 1 or Warn i 0 If set to Ignore the PPM100 will ignore the RF7 error from 300 AMU RGA units Examples IRFE Returns 1 if Ignore RF7 0 if Warn on RF7 IRFE 1 Sets RF7 Error Handling to Ignore LRER 0 ASRS Last RGA Error If the PPM100 encounters an RGA status error code while running or scanning it will halt and briefly display an error message The LRER query returns the code i for that message This code is cleared by the LRER 0 command 1 name description 0 No error 1 Unknown error 2 RS6 RS232 parameter conflict 3 RS1 Bad RS232 parameter 4 RS4 RS232 transmit buffer overwrite 5 RS3 RS232 receive buffer overwrite 6 RSO Bad RS232 command 7 RS2 RS232 command too long 8 RSS RS232 jumper protection violation 9 EM7 The RGA doesn t have an electron multiplier 10 DET1 Electrometer op amp input voltage out of range 11 DET3 Electrometer compensate can t read SnA 12 DET4 Electrometer compensate can t read 5nA 13 DET5 Electrometer detect can t read 5nA 14 DET6 Electrometer detect can t read 5nA 15 DET7 Electrometer ADC failure 16 FLO Single filament operation 17 FL5 Vacuum chamber pressure too high 18 FL6 Filament unable to set requested emission current 19 FL7 No filament detected 20 RF4 RF power supply in current limit mode 21 RF6 RF power supply current gt 2 0A 22 RF7 RF power supply RF_CT exceeds limit 23 PS6 External 24V powe
96. MCF 2 Returns the Correction Factor x of PP2 SMCF 2 1 8 Sets the PP2 Correction Factor to 1 8 PPM100 Partial Pressure Monitor 6 22 PPM Monitor Setup SVGL p i NFTM p n HVTM p i Set Gas via Library The SVGL command sets queries the Gas Name and Mass via Library for partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter i selects a library entry below i input i input 0 hydrogen 6 pump oil 1 helium 7 carbon dioxide 2 water 8 methane 3 nitrogen 9 neon 4 oxygen 10 krypton 5 argon 11 unknown Examples SVGL 5 Returns the library entry used by PP5 SVGL 5 4 Sets the name and mass of PP5 to oxygen PPM Scan Rate The NFTM command sets queries the Scan Rate for partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter n is the Scan Rate 1 8 Examples NFTM 8 Returns the Scan Rate n of PP8 MAME 8 5 Sets the Scan Rate of PP8 to 5 PPM Detector The HVTM command sets queries the PPM Detector for partial pressure monitor p The parameter p selects PP1 1 through PP8 8 and is required The parameter i selects Faraday Cup 0 or Electron Multipler 1 Examples HVTM 4 Returns the Detector setting 0 or 1 of PP4 HVTM 4 1 Set PP4 to use the CDEM detector OAEN p i PPM Alarm Enable The OAEN command sets queries the PPM Alarm mode enabled disabled for partial
97. MESG 7 s DHWR d TST FREV Message The MESG s command sends the message string s to the screen The message is cleared after about 10 seconds or may be cleared from the front panel sooner The MESG query returns 1 if the message has not been cleared and 0 if it has been cleared Examples MESG warning Displays the message WARNING on the screen MESG Returns 1 until the message has been cleared and then 0 Detect Hardware The DHWR d command returns 1 if component d listed below is present O if not installed This is a query only command d component d component 3 Process control 11 USB port 4 RS232 interface 13 Web server 10 JEEE488 GPIB interface Example DHWR 13 Returns 1 if the Web server is installed Self Test The TST query performs a self test and returns 0 if the test passes Returned values which are warnings are listed below value description Test pass Unable to perform all tests Excess load on Aux 15 V supply Relay failure Communication port problem RGA comm port problem RS232 comm port problem USB comm port problem GPIB comm port problem web port problem 10 calibration checksum failed OMAN DNHRWNeK CO If TST returns any other value reboot the PPM100 by cycling its power be sure that all process channels are unconnected If the problem persists contact Stanford Research Systems for further instructions Firmware Revision The FREV query returns the PPM100
98. Monitor 2 10 PPM100 Basics instrument functions and parameters are manually accessible and easily modified through the front panel Computer interfacing is only required for 1 Computer monitor control of the PPM100 and vacuum system 2 Remote access to data logs and history lists 3 calibration data uploads and 4 firmware upgrades for controller and web server For More Information Consult Chapter 6 of this manual for more detailed information on the available computer interfaces RS 232 USB and GPIB programming options and complete command set Consult Chapter 3 for information on menu items related to configuration of the RS 232 interface A complete Command Set is also listed at the beginning of this manual GPIB Interface A GPIB IEEE 488 interface is standard in the PPM100 The GPIB interface uses the industry standard 24 pin connector The same command set is shared between the RS 232 USB and GPIB interfaces For More Information Consult Chapter 6 of this manual for detailed information on computer interfaces RS 232 USB and GPIB programming options command set and firmware upgrade procedures controller and web server Consult Chapter 3 for information on front panel configuration of the GPIB interface USB Interface A USB Universal Serial Bus interface is standard in the PPM100 The USB port located on the back plane of the PPM100 uses the industry standard 4 pin connector For More Informat
99. Operating Manual and Programming Reference PPM100 Partial Pressure Monitor S RS Stanford Research Systems Revision 2 2 Nov 2003 Certification Stanford Research Systems certifies that this product met its published specifications at the time of shipment Stanford Research Systems further certifies that its calibration measurements are traceable to the United States National Institute of Standards and Technology NIST Warranty This Stanford Research Systems product is warranted against defects in materials and workmanship for a period of one 1 year from the date of shipment Service For warranty service or repair this product must be returned to a Stanford Research Systems authorized service facility Contact Stanford Research Systems or an authorized representative before returning this product for repair Information in this document is subject to change without notice Copyright Stanford Research Systems Inc 2003 All rights reserved Stanford Research Systems Inc 1290 C Reamwood Avenue Sunnyvale California 94089 www thinksrs com Printed in U S A PPM100 Partial Pressure Monitor ASRS Safety and Preparation For Use i Safety and Preparation For Use CAREFULLY READ THE IMPORTANT SAFETY INSTRUCTIONS AND NOTES INCLUDED IN THIS SECTION BEFORE USING THE PPM100 PARTIAL PRESSURE MONITOR AND ITS ACCESSORIES SAFETY PAYS Within this section the word product specifically refers to the PPM100 PAR
100. P d i RMOD 7 d i RSTA d i RAMS 2 d i RGOS d i RTRP d x ASRS Analog Scan OK Display Screen MassSpec Final Mass MassSpec Initial Mass Start Stop Analog Scan MassSpec Complete Chart MassSpec Pmin Chart MassSpec Pmax Autoscale MassSpec Y Axis Move MassSpec Cursor Read MassSpec Mass Read MassSpec Peak Channel Description Channel Active Message Channel Inactive Message Channel Beep Channel Mode Channel State Channel Input Gauge Off State Pressure Setpoint PPM100 Partial Pressure Monitor XX Commands RTRV d x RPHY d n RVHY 2 d x RPOL 2 d i RDEL d n RTCL d n s RTOP d n s RTIL 2 d i TTLL RHGF RHGN RHCL RBAD Backlight BLEN i BLIT i BLOF n s BLON n s BLTD n System NAME s TIME 7 s DATE 2 s VOLC n MENU d MESG s DHWR d TST FREV VRDT SNUM Interface VERB i IDN RST WSEN 9 i Voltage Setpoint Percent Hysteresis Voltage Hysteresis Setpoint Activation Setpoint Delay Activation Time Deactivation Time TTL Activation Level Read TTL Inputs Read Process Log First Read Process Log Next Clear Process Log Relay Failure Status Backlight Saver Enable Backlight On Off Backlight Turn Off Time Backlight Turn On Time Backlight Delay System Name Time Date Volume Display Screen Message Detect
101. Ports This chapter includes a complete description of the Analog I O capabilities of the PPM100 including specifications connections possible configurations and capacitance manometer operation In This Chapter Analog I O Ports AN1 AN4 4 3 Connection 4 3 Configuration 4 4 Analog Inputs 4 5 Analog Outputs 4 5 ASRS Capacitance Manometers CM1 CM4 4 6 Basics 4 6 CM Connection 4 7 Tips For Using CMs 4 7 Compact Gauges 4 8 PPM100 Partial Pressure Monitor 4 2 Analog I O Ports PPM100 Partial Pressure Monitor ASRS Analog I O Ports 4 3 Analog I O Ports AN1 AN4 All PPM100 controllers have four analog input output ports BNC connectors on the back panel Each port can be individually configured as an input or an output from the front panel or through the computer interface The specifications are identical for the four ports Range 12 V Input resolution 14 bits Input Impedance 1 2 MQ Output resolution 12 bits Output impedance 100 Q Update Rate 2 Hz Connection The four Analog I O ports are located on the back panel of the PPM100 and are easily identified as the vertical row of four BNC connectors labeled ANALOG I O 1 through 4 ASRS STANFORD RESEARCH SYSTEMS MADE IN USA i A s Cy process couma DIGITAL vo r 2 3 z L Figure 4 1 Rear panel Analog I O ports The BNC connectors are wired in the standard fashion with the center pin connected to the signal input or o
102. Process Control ASRS 2 3 2 3 2 4 2 5 2 5 2 5 2 6 2 7 2 7 2 7 2 8 2 9 2 9 2 9 2 10 2 10 2 10 2 11 Front Panel Power LINE LED POWER Button and LED Reset RGA Controls FILAMENT Button and LED E MULTIPLIER Button and LED Touchscreen LCD Display Touchscreen Cleaning Procedure Process Control LEDs Back Panel 15 V AUX Power Connector Process Control Relay Contacts DIGITAL TTL I O RGA RS 232 Connector HOST RS 232 Connector Analog I O BNC Ports AN1 4 Maintenance and Service 2 13 2 13 2 13 2 13 2 14 2 14 2 14 2 14 2 14 2 15 2 15 2 16 2 16 2 17 2 17 2 18 2 20 2 20 2 21 2 21 2 22 PPM100 Partial Pressure Monitor 2 2 PPM100 Basics PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 3 PPM100 Overview ASRS WARNING e Read the entire Safety and Preparation for Use section of this manual before using the PPM100 e Read Chapter 1 for detailed instructions and safety information regarding the installation and connection of the SRS RGA and capacitance manometer gauges The PPM100 Partial Pressure Monitor is a fully programmable microprocessor based vacuum system controller The PPM100 is a high accuracy controller that measures 1 partial pressures from an SRS RGA100 200 300 residual gas analyzer and 2 total pressures from up to four capacitance manometers providing uninterrupted pressure readings from 1000 Torr to UHV The PPM100 has a touchscreen LCD
103. Remote Control TTL inputs are not connected or disabled Q Manual RGA operation i e the controller is not under the control of an external computer via one of its interfaces RS 232 GPIB USB or web Power On Procedure Power up the RGA Head Flip the power switch located on the back plane of the RGA s ECU The Green POWER LED turns on and a brief Power on Self Test procedure is executed Power up the PPM100 controller Press the red POWER button located at the lower left corner of the front panel The green POWER LED turns on a brief Power On Self Test procedure is executed and the Pressure Display Screen is displayed on the touch screen LCD For all new units i e straight out of the shipping box the Pressure Display Screen preset at the factory includes 1 three Data Bars corresponding to partial pressure measurements PP1 gas Hydrogen mass 2 amu PP2 gas Helium mass 4 amu and PPM100 Partial Pressure Monitor ASRS PPM100 Quick Setup 1 13 ASRS PP3 gas Water mass 18 amu top to bottom plus 2 Menu Monitor Process Chart and Help QuickKeys lined up along the bottom of the screen left to right FILAMENT OFF D Figure 1 5 PPM100 Pressure Display Screen with factory default PP1 PP2 and PP3 Data Bars Connection Status The status of the RS 232 connection between the PPM100 Controller and the RGA Head is indicated with an icon located near the upper right corner of the
104. S Pressure Display 1 23 ASRS Trend Graph 4 amu 4 62 09 ror Helium Figure 1 17 Trend Graph display Best display for trend analysis A stamp sized Signal vs time plot of the 10 most recent readings sampled at the data logging interval see Logging below It also includes a small instantaneous reading next to the plot Use trend graphs to see pressure changes in time dependent processes such as leak testing pump downs venting bakeout etc Silent Audio Leak Trend Graph 2 amu LEAKTREND v Hydrogen 4 amu Torr Helium 18 amu PP3 LEAKTREND w Water Figure 1 18 Leak Trend Graph display Best display for leak detection applications see Leak Testing with the PPM100 below Use this display while leak testing components attached to the vacuum system Use leak trend graphs to detect leaks as partial pressure transients while spraying the vacuum system components with a tracer gas such as helium or argon A stamp sized Signal vs time plot of the 10 most recent partial pressures for the selected mass is displayed A small instantaneous partial pressure reading is also included next to the plot When Audio Leak Trend is selected a repetitive audio signal whose frequency is proportional to the partial pressure readings provides a means to hear pressure transients eliminating the need to look at the front panel display while searching for leaks In order to provi
105. Send A Test Message button To learn the fate of your email message click Email Status Your sent email and the reply from the SMTP server will be listed there Any reply other than 250 OK is an error Click Email Status again to refresh the status if it was listed as 2 Awaiting reply If the SMTP reply is 1 No Reply a connection to the SMTP server was never made Re check your physical network connection as well as the gateway and SMTP addresses If no error occurs but you still do not receive the email check the from and to addresses used Using the Email Function Once you have successfully tested the email function you can set a carbon copy CC address to send a copy of the notice to another user Use only one email address in the CC field 1 Set the email notices to Enabled A test message can always be sent by clicking the Send A Test Message button even if email notification is disabled If you will be unable to receive email for an extended period it is a good idea to disable relay linked email notification 2 Set the maximum number of relay linked email notices the EWS is allowed to send This feature prevents accidental flooding of your mailbox The default is 16 You probably wish to limit this number even further The maximum cannot be set higher than 32 To reset the email count after a number of emails have been sent disable email by setting the notices to Disabled and then clicking Use T
106. TE the channel Auto to switch the channel to Auto mode its state is now controlled by the channel rules Edit Rules to edit the channel rules Edit Labels to edit the text and audio options for the channel Recommendations Always use Manual Operation to test your process control connections before switching to and relying on Automatic mode for channel operation Use Manual Override to quickly switch an automated procedure to manual control in an emergency Use Channel Labels to display real system names and states for each channel This eliminates confusion over which channel is connected to which device All process control channels default to Manual Mode INACTIVE when the PPM100 controller is first turned on This must be regarded as the Fail Safe state of the system For More Information Consult the Process Control sections of Chapter 3 including descriptions of the Process Control Display Channel Data Boxes and Rules Editing menus Fail Safe Logic WARNING When equipment malfunction or power loss could cause a hazardous situation always provide fail safe operation Fail Safe logic must be very carefully planned designed and tested before reliance on process automation is allowed PPM100 Partial Pressure Monitor ASRS Process Control 5 9 ASRS PPM100 users must carefully consider the behavior of their process control setup during and after e system failures e equipment malfunct
107. TIAL PRESSURE MONITOR and any of its accessories Safety risks are associated with all research and production activities Though long experience has proven high vacuum instrumentation to be remarkably safe hazards are always associated with vacuum system operation The most effective way to minimize risk to yourself and others is to read and strictly follow all safety instructions and warnings during the installation operation and maintenance of the equipment connected to your vacuum system The intent of this section is to collect in a single place the most common risks associated to the installation operation and maintenance of this product The instructions are also repeated with additional information at the appropriate points throughout this manual This product has been designed with user safety as a priority and has been proven to show reasonably safe operation provided it is installed operated and serviced in strict accordance with all the safety instructions included in its manual Safety Instructions and Warnings e SAFETY PAYS Safety instructions must be strictly followed during all stages of installation operation and service of this product Failure to comply with these precautions and warnings violates the safety standards expected of users of this product e Safety Instructions and Warnings specific to the installation and operation of the Residual Gas Analyzer RGA Head are included in the RGA100 200 300 Operating
108. The only security question to ask is who will have access to this computer Since there is no intermediate connection or dependence on outside hardware this is also a very reliable connection Furthermore since the EWS will not actually be on the internet you do not need a real IP address The crossover cable forms a network of one PC to one instrument Since you have created your own enclosed network you can use any IP addresses you wish use the same subnet mask for both the PC and the PPM100 See the section below entitled Testing with a crossover cable for more details PPM100 Partial Pressure Monitor ASRS 7 10 Installing the EWS Internal LAN Configuration You can retain the security of the crossover connection and still allow more than one computer to access the PPM100 An ethernet hub will allow you to make a local area network LAN that can use fictitious IP addresses in order to access the instrument as well as other computers on the LAN The figure below shows a conceptual diagram of this configuration While the IP addresses are fictitious other networking parameters are still required and your network administrator can help you set up this type of LAN LAN Connection Using Fictitious IP Addresses a Vacuum Chamber Pl PM 100 lt gt ____Ethemet ee Hub i a aa Lab PC 1 y Lab PC 4 Lab PC 2 Figure 7 4 Internal LAN Configuration Note that no connection to the inte
109. Use the female DB37 port located on the back panel of the PPM100 controller labeled DIGITAL I O to connect to the 1 eight PC TTL Output 2 eight PC TTL input and 3 7 Remote Control TTL input pins of the Process Control Board Note A Male DB37 connector is included with every PPM100 controller shipped directly from Stanford Research Systems to facilitate interfacing of the TTL I O port to your system 19 1 Pa eta so ae eee 666 60 666 37 20 Figure 5 12 DB37 TTL I O connector TTL I O Pin Assignments Unconnected inputs are HIGH Module in Name Description PPM100 Vcc 5 V OUT Remote Control ANODE COM External User 5 V IN TTLIN Not Used Not Used RGA_Degas Edge trigger Degas On T Degas Off RGA_FIL_Lockout Level LOW RGA emission Off RGA_Key_Disable Level LOW Disable front panel Keypad Not Used Not Used Clear_Data_Log Edge trigger J clear the data log RGA_Remote_Enable Level HIGH Ignore RGA_Degas_On RGA_FIL_On RGA_EMULT_On pins RGA_FIL_On Edge trigger L FIL ON T FIL Off Not Used RGA_FP_Disable Level LOW Disable Touchscreen and Keypad PPM100 Vcc 5 V OUT Process Control 16 TTL_OUT_5 TTL OUT for Channel 5 TTL OUT LOW ACTIVE 17 TTL_OUT 6 TTL OUT for Channel 6 LOW ACTIVE 18 TTL_OUT_7 TTL OUT for Channel 7 LOW ACTIVE 19 TTL_OUT_ 8 TTL OUT for Channel 8 LOW ACTIVE PPM100 Partial Pressure Monitor ASRS Process Control 5 19
110. WS is communicating with the PPM100 Important Whenever network setup information is changed the new addresses are read and burned into flash memory then the EWS is re started You must wait at least 5 seconds for the changes to take effect System Name The System Name Menu Remote System Name identifies this PPM100 on the web This is important if your setup includes multiple web enabled PPM100 s The system name is displayed in the web pages to identify the source of the data PPM100 Partial Pressure Monitor 7 8 Installing the EWS MAC Address Your administrator may want to know the media access control MAC address of your instrument The MAC is a unique address used at a lower layer of the internet protocol Each IP address is mapped to a unique MAC address Administrators often like to know this address as a crosscheck for the IP address both should be unique Knowing the MAC address also provides some extra security if the administrator finds a MAC address that isn t listed in their directory it could be an unauthorized user When you put a server on a network you are essentially inviting people to come and get information Your administrator will want to make sure that this server doesn t create a security risk for the rest of the network To find the MAC address of your PPM100 from a standalone PC use a crossover cable to connect the PPM100 to the PC Type in the PPM100 s IP address and port if not 80 in your
111. a little easier SMTP Address In order to send email a special machine called a Simple Mail Transfer Protocol server is often used These servers respond to commands for sending email and will forward your messages to the recipient s local mail handling machine PPM100 Partial Pressure Monitor ASRS 8 1 Chapter 8 Troubleshooting and Maintenance Troubleshooting a vacuum system can be a complex and daunting task This chapter contains troubleshooting information for the PPM100 Please read and follow all warnings presented in this chapter See Safety and Preparation for Use at the beginning of this manual to remind yourself of some of the dangers involved in working with vacuum systems In This Chapter Warnings Resetting the PPM100 Error Detection Built in Checks Event Logging Remote Status Checking Interface Queues PPM100 Error Messages Pressure Voltage Display RGA Basic Troubleshooting Input Power RGA Capacitance Manometer Process Control Analog I O Maintenance Touchscreen Damage Requiring Service ASRS PPM100 Partial Pressure Monitor 8 2 Troubleshooting and Maintenance PPM100 Partial Pressure Monitor ASRS Troubleshooting and Maintenance 8 3 Warnings e Read and follow all Safety and Preparation for Use warnings before handling this product see front of this manual e Dangerous voltages capable of causing injury or death are present in this instrument Use extreme ca
112. a gas from the list to configure the partial pressure Name and Mass PPM100 Partial Pressure Monitor 3 18 Monitor Display PP1 PP8 Scan Rate Choose a Scan Rate for the selected partial pressure measurement The Scan Rate sets the measurement time for the selected partial pressure measurement As a rule of thumb a decrease in the Scan Rate setting results in 1 lower baseline noise 2 better detection limits but 3 increased measurement time The Scan Rate setting is transmitted to the RGA Head prior to each partial pressure measurement Consult the SRS RGA Manual for complete details on the noise floor NF setting of the RGA Head Scan rate NF 1 PP1 PP8 Detector Choose Faraday cup or Electron Multiplier detector for the selected partial pressure measurement Use the Electron Multiplier to increase the RGA s sensitivity improve its detection limit or simply provide faster readings Limitations associated to the Electron Multiplier are limited dynamic range mass discrimination effects gain instabilities and finite lifetime of the device Consult the SRS RGA Manual for full details on detector selection criteria Alarm Level alarm warnings can be programmed for each individual partial pressure measurement Alarm control and level settings are modified through the Alarm submenu When a Level Alarm is enabled the PPM100 sounds an audible alarm and displays an Alarm prompt in the appropriate partial p
113. ability of these options in your gauge heads ASRS PPM100 Partial Pressure Monitor 1 12 PPM100 Quick Setup PPM100 Quick Setup This section describes the setup steps required to prepare the PPM100 for accurate partial and total pressure measurements with a Residual Gas Analyzer and up to four capacitance manometer gauges The steps in this section assume Q The PPM100 box has been properly installed and grounded Q Line power is connected to the controller LINE LED on Q The controller is turned off POWER LED off a An SRS RGA Head and a capacitance manometer ANALOG I O 1 CM1 port are connected to the controller Q Power is being delivered to the capacitance manometer The RGA Head is turned off POWER LED Off Q All gauges are 1 mounted on the vacuum system 2 properly grounded 3 known to be compatible with the controller and 4 safely connected to your PPM100 using Stanford Research System s cables except for CMs Q The RGA probe is exposed to a high vacuum environment with a known pressure lt 10 Torr and the gas composition is either air nitrogen or residual gas i e typical base pressure composition of a clean high vacuum system Q You are reasonably familiar with the general theory of operation of mass spectrometers and capacitance manometers Q The Relay and Logic Process Control ports if available are not physically connected to any devices or in a safe MANUAL mode status Q The
114. able register to 48 decimal bits 4 and 5 set ESE 7 0 Clears bit 7 of the Standard Event Enable register ERSW i Read Error Status The ERSW query returns the value of the Error Status register The value is returned as a decimal number from 0 to 65535 The ERSW i query returns the value 0 or 1 of bit i 0 15 ERSW clears the entire register while ERSW i clears just bit i The conditions for each bit are listed below bit name set when 0 Tst_Err Selftest fails 1 Math_Err An internal math error occurs 2 RAM_Err The RAM checksum fails 3 ROM_Err The ROM checksum fails 4 Batt_Err Data in battery backed up RAM was lost 5 Stk_Err An internal stack error occurs 6 Heap_Err An internal heap error occurs 7 Rly_Err A process control relay failure is detected 8 Com_Err An error with a communications port occurs 9 Mnot_Err A selftest requests routine maintenance 10 Unused 11 Unused 12 Unused 13 Reset_Err A Watchdog timer reset has occured 14 15 Unused These bits REMAIN SET until read cleared by CLS or power up with PSC enabled Examples ERSW Returns the Error Status register 0 65535 ERSW 8 Returns 0 if bit 8 Com_Err is clear 1 if it is set PPM100 Partial Pressure Monitor ASRS Status Reporting 6 55 ERSE 7 i j GSSW i ASRS Error Status Enable The ERSE i command sets the Error Status Enable register to the decimal value i 0 65535 The ERSE i j command sets bit i 0
115. ack to the PPM100 and converted into partial pressure readings for the specified single mass A single sensitivity factor calibrated for Nitrogen gas 28 amu is used to convert all ion current readings into partial pressures Use correction factors to display partial pressure readings for other gases i e the Gas Correction Factor is used to convert nitrogen equivalent pressure readings into direct readings for other gases The nitrogen equivalent pressure reading is multiplied by the gas correction factor and displayed as the partial pressure Use a value of 1 0 when detecting nitrogen PP1 PP8 Name Enter the gas name for the selected partial pressure measurement This name is displayed in the partial pressure data boxes The SRS RGA head can measure individual peak heights on the mixture s mass spectrum at any integer mass within its mass range Peak height readings i e ion currents are transmitted back to the PPM100 and converted into partial pressure readings for the specified single mass Most often the single mass peak being monitored is associated to a single gas and the partial pressure readings track its contribution to the total pressure of the mixture Set via library Select a gas name from the list Hydrogen Helium Water Nitrogen Oxygen Argon Pump Oil CO Methane Neon Krypton Pre loaded gas name mass pairs are available for the most common residual gas components present in vacuum applications Select
116. ad Source Data With Units LRAT p 6 18 Read Leak Rate LRCE n 6 18 Leak Rate Coefficient GDES p s 6 18 Gas Name Port Location GSTA p 6 19 Source Status GSTT p 6 20 Source Status Time OAQU 6 20 Read Monitor Alarm Status PPM Monitor Setup PCME p i 6 21 PPM Measurement Enable MAME 7 p n 6 21 PPM Mass GDES p s 6 21 Gas Name Port Location SMCF p x 6 21 Gas Correction Factor SVGL p i 6 22 Set Gas via Library NFIM p n 6 22 PPM Scan Rate HVTM p i 6 22 PPM Detector OAEN p i 6 22 PPM Alarm Enable OALH p x 6 22 Alarm Level High OALL p x 6 23 Alarm Level Low OABP p i 6 23 Alarm Beep Analog Port Setup GADM n i 6 24 I O Mode GDAS n i 6 24 DAC Source GCMM n i 6 24 CM Mode GDAV n x 6 24 Output Value CMPX n x 6 24 CM PMax RGA MAXM 6 25 Read RGA Mass Range RGAI 6 25 Read RGA Identification EEEV n 6 25 Electron Energy TEEV i 6 25 Ion Energy FOPV n 6 25 Focus Voltage SCRA n 6 26 Scan Rate ASRS PPM100 Partial Pressure Monitor 6 4 Index of Commands ECMA x 6 26 Electron Current CALL 6 29 Calibrate RGA Detectors CEIV 6 29 Calibrate RGA Electrometer DGAS i 6 25 RGA Degas On Off EMIS i 6 26 RGA Filament Emission On Off ENEM i 6 26 RGA Scan Electron Multiplier On Off EMBV n 6 26 RGA Electron Multiplier Bias Voltage EREQ
117. ain Menu The Main Menu provides access to many important PPM100 internal parameters and settings Units Display the Units selection list Select from Torr Micron Bar mbar or Pascal This units system is global to the PPM100 All pressure readings in the Pressure Display and data logs use the same units All pressure parameters in menus use these units This button is also available in the numeric entry keypad of pressure parameters SRS Display contact information about Stanford Research Systems Inc ASRS PPM100 Partial Pressure Monitor 3 46 RGA Menu RGA Menu Touch RGA in the Main Menu to display and or modify the RGA Setup parameters Main RGA t 12 53 Electron energy eV 1 3 Scan rate 13 70 2 lon Energy Electron Current m 13 High 12eV 1 RGA info Calibrate electrometer gt e Advanced Back Py i Pressure Main Help Figure 3 25 Main RGA menu The RGA Setup menu includes all ionizer and detector settings required to configure the RGA head as well as some advanced settings for specialized applications of RGAs The ionizer settings are used by all partial pressure and scanning measurement modes of the PPM100 RGA system Important The detector settings are only used by the Analog Scanning mode MassSpec Display since partial pressure readings have individualized detector settings Electron Energy eV Adjust the electron impact ionization energy of the i
118. al Interfaces Power Operating temperature Weight Dimensions Warranty Display Type Resolution Modes Units Numeric resolution Update rate Electrical 20 C to 30 C Analog I O Ports Range Resolution Update rate Connector Gauges Capacitance Manometer Number of gauges Auxiliary power output Process Control Number of channels Input signals Output signals Relays TTL outputs Manual control Remote TTL control ASRS Specifications apply after 1 hour of warm up RS 232 USB GPIB and Ethernet interface with embedded web server 90 to 264 VAC 47 to 63 Hz 240 W 0 C to 40 C non condensing Less than 90 humidity 15 Ibs 8 5 x5 25 x16 WHD One year parts and labor Back lit touchscreen LCD 4 7 diag 320 x 240 pixels Numeric bargraph P vs T Torr mbar bar Pa and micron 3 digit mantissa plus exponent 2 samples per second 4 configurable analog ports 12 Vdc 14 bit In 12 bit Out 2 Hz BNC Simultaneous readout of up to four capacitance manometers using the auxiliary inputs 15 Vdc 100 mA for CM power 8 channels with programmable setpoint polarity hysteresis delay audio signal and text messages Total pressure CM gauge partial pressure RGA voltage analog I O ports time internal clock TTL and gauge status Relay and TTL level SPDT form C 5A 250VAC 30VDC resistive load Active low opto isolated All channels can be operated from front pane
119. al Pressure Monitor ASRS Index of Commands 6 5 RGOS d i 6 39 Gauge Off State RTRP d x 6 39 Pressure Setpoint RTRV d x 6 40 Voltage Setpoint RPHY d n 6 40 Percent Hysteresis RVHY d x 6 40 Voltage Hysteresis RPOL d i 6 40 Setpoint Activation RDEL d n 6 40 Setpoint Delay RTCL d n s 6 41 Activation Time RTOP d n s 6 41 Deactivation Time RTIL d i 6 41 TTL Activation Level TTLL 6 42 Read TTL Inputs RHGF 6 42 Read Process Log First RHGN 6 42 Read Process Log Next RHCL 6 43 Clear Process Log RBAD 6 43 Relay Failure Status Backlight BLEN i 6 44 Backlight Saver Enable BLIT i 6 44 Backlight On Off BLOF n s 6 44 Backlight Turn Off Time BLON n s 6 44 Backlight Turn On Time BLTD n 6 44 Backlight Delay System NAME s 6 45 System Name TIME s 6 45 Time DATE s 6 45 Date VOLC n 6 45 Volume MENU d 6 45 Display Screen MESG s 6 45 Message DHWR d 6 46 Detect Hardware TST 6 46 Self Test FREV 6 46 Firmware Revision VRDT 6 46 Firmware Build SNUM 6 46 Serial Number Interface VERB i 6 47 Verbose RS 232 IDN 6 47 Identification RST 6 47 Reset WSEN i 6 47 Web Server Enable Status CLS 6 52 Clear Status PSC i 6 52 Power On Status Clear STB i 6 52 Read Serial Poll Status SRE i j 6 53 Serial Poll Enable ESR i 6 53 Read Standard Eve
120. also common for Compact Gauges to bracket their useful pressure related output between 2 and 10Vdc Voltages below 1V indicate a Gauge Off Condition and voltages greater than 10V indicate a Fault condition These conditions are detected by Default by the PPM 100 when CM Display Log is selected Consult the manufacturer s power requirements for the compact gauge It is often possible to use the 15Vdc auxiliary output provided by the PPM100 to power compact gauges as well as capacitance manometers PPM100 Partial Pressure Monitor ASRS 5 1 Chapter 5 Process Control This chapter provides the basic guidelines required to successfully interface and program the automation features built into the Process Control module of the PPM100 controller In This Chapter Process Control Warnings Why Use Process Control Process Control Basics ACTIVE vs INACTIVE ACTIVE INACTIVE Power On State Programming Rules Manual Override Fail Safe Logic Relay Connections Connection Basics Connection Schemes Active Common Inactive Common Active Common Inactive Connection Tips Channel Linking Remote Operation 5 3 5 4 Digital I O Module TTL Input 8 pins TTL Output 8 pins Remote Control Input 7 pins Digital I O Connections TTL I O Pin Assignments Output Circuit Connection Tips Debounce Time Remote Control Inputs RGA_Degas RGA_FIL_Lockout RGA_Key_Disable Clear_Data_Log RGA_Remote_Enable RGA_Fil_On RGA_FP_Disable
121. an explicit heavy duty earth ground connected to the vacuum chamber Check with an electrician if necessary All electronic instrumentation must be connected to properly grounded electrical outlets and include a chassis grounding lug that must be tied to the common earth ground of the vacuum system Beware Failure to safely ground your vacuum system can be fatal The electrical insulation in this product may become less effective at preventing electrical shock after ten years of normal use or even non use Products placed in harsh environments might deteriorate even faster Inspect all electrical insulation periodically for signs of cracking and deterioration Return the product to the factory for service if the insulation has become unsafe To reduce the risk of fire and electrocution do not expose this product to rain or moisture Be careful not to spill liquid of any kind onto or into the product This product is intended for use only in a clean and dry laboratory environment Operation in other environments may cause damage to the product and reduce the effectiveness of the safety features Keep in mind that O ring seals without metal clamps or bolt connections can isolate big portions of a vacuum system from its safety ground Verify that the vacuum port to which any new component is mounted is electrically grounded Use a ground lug on a flange bolt if necessary Keep all electrical wiring in your vacuum system neatly organized and in go
122. an overnight bakeout system with over temperature protection Since heating jackets have been known to runaway and cause serious system damage it is always a good precaution to add a safeguard system that will shut down the heating power if the temperature generated by the heater exceeds the maximum allowed threshold This is easily implemented with the PPM100 if a thermocouple is attached to the vacuum system and its amplified voltage signal is monitored through one of the Analog I O ports of the controller A straightforward implementation of this function might be 1 link channel 1 to the clock and program its activation period throughout the middle of the night 2 link channel 2 to the AN1 thermocouple readings and program it to activate at voltage readings below the maximum allowed temperature value 3 connect the channel 1 and channel 2 relays in series using the Active Common connection described above and use the dual switch combination as a power switch for the heater s power cord Under this configuration heating is only possible if channel 1 AND Channel 2 are both simultaneously Active If the temperature exceeds the maximum specified value channel 2 deactivated or the bakeout time expires channel deactivated no electrical power can flow into the heating jacket and the bakeout is interrupted Power SPDT Relay SPDT Relay Active Active Heater Inactive Inactive Common Ground Figure 5
123. and getting line power from an AC outlet POWER Button and LED Press the red POWER button to turn the PPM100 ON or OFF The green LED located next to the POWER button lights up to indicate that the PPM100 is fully powered and completely operational SRS PPM100 Partial Pressure Monitor 2 14 PPM100 Basics Reset To reset the instrument to its default settings turn the unit on using the red POWER key while holding down the E MULTIPLIER key This will erase all user entered parameters RGA Controls FILAMENT Button and LED Press the black FILAMENT button to turn the RGA filament emission on or off The green LED located next to the button lights up while the RGA filament is emitting electrons and the unit is reading partial pressures or collecting mass spectra from the RGA Head e Filament emission must be turned on in order to acquire partial pressure readings or mass spectra with an RGA e The FILAMENT button provides the only means to manually control the emission status of the RGA e Asa general rule if the RGA electron emission is on the PPM100 is either collecting single mass partial pressure measurements or performing analog scans The only way to interrupt data collection from the RGA Head is by turning off the filament emission Tip Press the FILAMENT button to interrupt analog scanning at any time and freeze the MassSpec display This is convenient for analyzing the spectrum Press the FILAMENT
124. anual Volts when source Manual 1 3 0 000 CM display E Off 2g Back P a Pressure AnalogiO Help CM 10Torr Linear Figure 3 15 AnalogIO Setup Menu Each analog I O port AN1 AN4 and each Capacitance manometer CM1 CM4 has its own setup menu For any given port both menus share the same settings ADC or DAC Configure the analog I O port as either an ADC Input or a DAC Output ADC Input When ADC Input is selected the analog port is connected to a 14 bit 12 V full scale Analog to Digital Converter updated at 2 Hz Input signals can be monitored through the Pressure Display choose ID AN1 4 or CM1 4 or the AnalogIO Display top row Inputs may be linked to Process Control channels to control relays or TTL outputs All inputs are logged in the Data Log along with all partial pressure readings Use analog inputs to read voltages from additional vacuum equipment such as capacitance manometers thermocouples mass flow controllers turbo pump controllers etc ASRS PPM100 Partial Pressure Monitor 3 24 Analog I O Display Capacitance manometers must be connected to Analog I O ports configured as inputs For direct pressure readings program the full scale pressure Pmax to match your gauge and set CM Display to Linear DAC Output When DAC Output is selected the analog port is connected to a 12 bit 12 V full scale Digital to Analog Converter updated at 2 Hz Each DAC port may be p
125. applications where repeatability precision and composition independent readings are required a capacitance manometer gauge should be used to monitor and control the process pressure This is particularly true if complex or changing gas mixtures are involved For More Information Chapter 1 includes all the basic information required to install and set up your PPM100 controller and its gauges including capacitance manometers Consult Chapter 4 of this manual for further details on the operation of capacitance manometers and their proper connection to ANALOG I O ports Chapter 3 describes in detail the menu based user interface including all menus required to configure the PPM100 to display pressure readings from capacitance manometer gauges Data Logging Charts and Tables All PPM100 controllers include Data Logging capabilities When Data Logging is enabled data from all monitored partial pressures and all analog inputs are stored in a circular memory buffer at the rate specified by a user programmable logging interval The logged data can be accessed through the touchscreen LCD the logged data for the three Data Bars in the Pressure Display screen are presented in a single window Both table and chart P vs Time displays are available The chart display includes convenient graphical tools such as 1 cursor 2 zoom 3 x y scaling manual and auto and 4 cursor readings Users can switch rapidly between current and logged rea
126. apter 1 for detailed instructions and safety information regarding the installation of the PPM100 and connection to the RGA Head 4sRs STANFORD RESEARCH SYSTEMS MADE IN USA Cy process couma 2 DIGITAL 6 3 C r ANALOGUO 4 O Figure 2 4 The PPM100 back panel Power Power Entry Module and CHASSIS GND RGA RS 232 RS 232 connection to RGA Head HOST RS 232 RS 232 computer interface port Capacitance Manometer 15 V AUX POWER Analog I O BNC Ports AN1 4 Process Control RELAY CONTACTS and DIGITAL I O Computer Interfaces USB GPIB and ethernet 10BASET Opt 01 Bl OY IM E Se mo 15 V AUX Power Connector Use this 3 pin 15 V 100 mA max connector to provide electrical power to standard i e non heated capacitance manometers PPM100 Partial Pressure Monitor SRS PPM100 Basics 2 17 Process Control Relay Contacts Use these two 12 Position Terminal Block Plugs to connect to the eight process control relays All relays are SPDT form C 5A 250VAC 30VDC resistive load only Process Action Relay Common Connected to Rear Panel Label INACTIVE Normally Closed pin NC I ACTIVE Normally Open pin NO A Block 1 Block 2 13 CH5 24 CH8 Figure 2 5 The 2 12 position terminal blocks for process relay connections i Block Pin P Control Label Relay Pin rocess Channel Process 1 Common C C NC Inactiv
127. are set when a channel changes state and REMAIN SET until read CLS executes or power on with PSC enabled These bits can be enabled PPM100 Partial Pressure Monitor ASRS Status Reporting 6 57 to generate an SRQ Reading this register will clear these bits and they will remain cleared until the relay changes state again The upper 8 bits always reflect the state of the process control channels at the time this status is read These bits should NOT be enabled to generate an SRQ Reading this register will clear these bits but if the relay remains active the bit will immediately be reset and generate another SRQ Examples RSSW Returns the Process Control Status register 0 65535 RSSW 10 Returns 0 if bit 10 Ch3_Act is clear 1 if it is set RSSE i j ASRS Process Status Enable The RSSE i command sets the Process Status Enable register to the decimal value i 0 65535 The RSSE i j command sets bit i 0 15 to j 0 or 1 The RSSE query returns the value 0 65535 of the Process Status Enable register The RSSE i query returns the value 0 or 1 of bit i 0 15 When a bit becomes set in BOTH the Process Status register AND the Process Status Enable register bit 0 PCSQ of the Serial Poll Status is set This causes an SRQ if bit 0 in the Serial Poll Enable register is set To clear a bit in the Process Status use RSSW Examples RSSE Returns the Process Status Enable register 0 65535 RSSE 2 Retu
128. art X axis setting keyed in on the front panel of the PPM100 A typical result from a partial pressure plot is shown in Figure 7 16 If you need to change the displayed pressure range click on Analog Scanning and change the pressure range on that page see Analog Scanning below Note that the charts plot new data on the left and old data on the right this is opposite from the way the data are plotted on the PPM100 chart display PPM100 Partial Pressure Monitor ASRS Using the EWS 7 25 ASRS Chart of PP4 Nitrogen Pressure in units o 1 00 05 Time span of this chart 14 Mins Time elapsed since this plot was taken 10 Secs Figure 7 16 Partial pressure versus time chart Chart of AN3 HEATING JACKET Analog channel values are in Volts 10 000 10 000 13 47 49 Time span of this chart 14 Mins Time elapsed since this plot was taken 10 Secs Figure 7 17 Voltage versus time chart MassSpec Display and Analog Scanning Warning Process control is disabled during an analog scan The interruption of process control may be lengthy depending upon the scan s parameters If your PPM100 is actively being used for process control be sure that it is safe to interrupt your process before performing an analog scan This function allows you to set up and acquire an analog scan similar to that shown in Figure 7 18 PPM100 Partial Pressure Monitor 7 26 Using the EWS Analog Scan
129. as the Noise Floor setting NF for the single mass measurement by the SRS RGA Head Consult the SRS RGA manual for details on this important measurement setting PP1 Detector Faraday Cup or E Multiplier Select Faraday Cup or Electron Multiplier detector for all PP1 partial pressure measurements Consult the SRS RGA Operating Manual for details on detector options PP1 Correction factor 0 01 100 All partial pressure readings are calculated by the PPM100 from the ion current readings obtained from the RGA based on a sensitivity factor stored in the RGA Head and factory calibrated against Nitrogen 28 amu In order to correct the partial pressure readings for methane and according to the specific ionization efficiency and mass specific throughput of its 16 amu mass peak a correction factor needs to be calculated and applied Note This number usually requires special calibration Alarm High and Low levels Enable or Disable High and low alarm levels can be set for each individual partial pressure measured to indicate system status directly in the Partial Pressure Boxes of the Monitor Display The alarm levels are independent from and must not be confused with the partial pressure levels used by the process control channel rules Capacitance Manometer CM1 4 Setup Configure an Analog Port All four Analog I O ports are configured as inputs as a factory default To configure an analog port to read capacitance manometer pressure
130. asily program all required RGA Setup parameters from the controller s front panel i e no PC setup is required Pressure readings are updated at rates up to 2 Hz Warning PPM100 is not compatible with third party residual gas analyzers PPM100 Partial Pressure Monitor 2 4 PPM100 Basics All communications between the PPM100 and the SRS RGA Head take place over a standard RS 232 serial interface connection No power is delivered to the RGA Head from the PPM100 controller Up to eight independent partial pressures can be monitored and simultaneously displayed on the front panel Each partial pressure reading can have its own i e individualized 1 mass 2 detector 3 scan rate and 4 alarm settings This mode of operation is used to generate single gas data for leak testing measurements and to track changes in the concentrations of up to eight independent components of a gas mixture as a function of time The partial pressure signals can also be linked to alarms process control relays and digital output ports A MassSpec Display mode is also available to graph RGA Mass Spectra directly on the front panel of the instrument Analog scanning is the most basic mode of operation of the SRS RGA as a quadrupole mass spectrometer During analog scanning the quadrupole mass spectrometer is stepped at fixed mass increments i e 0 1 amu through a prespecified mass range The ion current is measured after each mass increment
131. assSpec Display takes full advantage of the RGAs dynamic range Touch the Y Axis QuickKey in the MassSpec Display to access the Y Axis SubMenu Note A new analog scan is triggered when exiting the Y Axis SubMenu Y Axis Submenu Display the Y Axis submenu for the MassSpec Display Pmax Set the pressure corresponding to the top of the mass spectrum Pmax is displayed above the mass spectrum graph area Pmin Set the pressure corresponding to the bottom of the mass spectrum Pmin is displayed below the mass spectrum graph area PPM100 Partial Pressure Monitor 3 30 Logging Display Logging Display Use the Table or Chart QuickKey to bring up the Logging Display The data log is presented in either Table or Chart display formats Select the format in the Logging Setup menu This also changes the QuickKey between Table and Chart The logged data for the three data bars in the Pressure Display are displayed in a single screen All inputs are logged to display different data choose new sources in the Pressure Display ID Boxes Chart 12 31 PPS PPa PP current 671 08 3 76 06 1 56 09 12 31 29 671 08 3 74 06 2 17 09 10volts a Pe 1e 009 10volts SSec div Span 60 Secs Logoo 00 02 Figure 3 17 Chart Display Display the data log in graphical P or V vs Time format The small table above the chart displays the most recent entry and the readings at the cursor position Pmax and V
132. b e Click on ASCII setup and check the Echo typed characters locally and append line feeds to incoming line ends boxes e Click OK and OK again to finish the Properties dialog e Select File Save to save your HyperTerminal configuration for later use This HyperTerminal setup will allow you to try out the PPM commands before you include them in your program However only one application can be connected to a COM port at a time If HyperTerminal is running your program will fail to open the COM port Likewise HyperTerminal will not be able to use the COM port if your program is running VCP Options COM port number Some Applications e g HyperTerminal can only use COM ports within a certain range e g COMI through COMA If this is the case you may want to manually select the COM port number that VCP uses To change the virtual COM port properties e Open the Device Manager e Select the USB Serial Port e Click Properties e Select Port Settings e Select Advanced e Click the drop down arrow on COM Port Number and scroll to the required COM port e Select OK PPM100 Partial Pressure Monitor 6 60 Using USB Be sure not to select a COM port which is already in use When you return to the Device Manager Screen you will see that the USB Serial Port installation has been changed to the desired COM number Mac OS8 and OS9 Installing USBSerial extension e Download the mac drivers from http www
133. b Control Enable Security Type IP Checking IP and Password Checking Password Checking Only 7 3 Using the EWS Bookmarking the PPM100 Monitoring the PPM100 Get Readings Show Stored Plot Auto Monitor Process History Get Datalog Get Userlog Email Status Controlling the PPM100 Request Control Release Control Get Chart Type MassSpec Display and Analog Scanning Email Notices Change Relays Networking Terms 7 18 7 19 7 19 7 19 7 19 7 20 7 21 7 22 7 23 7 23 7 24 7 24 7 24 7 24 7 25 7 28 7 31 7 32 PPM100 Partial Pressure Monitor ASRS 7 2 Embedded Web Server PPM100 Partial Pressure Monitor ASRS EWS Quick Start 7 3 EWS Quick Start If you are comfortable with networking and wish to get your EWS up and going as quickly as possible use the Quick Start instructions here Please read the rest of this chapter for a more complete description of the EWS features and capabilities Connect the PPM100 to Your Network Warning e Connecting your vacuum system to the world wide web can expose it to unauthorized access resulting in harm to personnel as well as equipment e Network security is a serious matter Consult your network administrator for more information about using web enabled instruments in your lab Use a CATS ethernet cable to connect your hub or switch to the ethernet connector on the back of the PPM100 with EWS installed Do not use a crossover cable Bring up the We
134. b setup menu by pressing the Menu QuickKey in the Pressure Display choosing Remote and then Web Set the Network Addresses For full use of the EWS you will need a static IP Internet Protocol address subnet mask DNS Domain Name Server address and gateway address See your network administrator to obtain addresses appropriate for your network environment If you already know the IP address you will be using you may be able to find your subnet mask and gateway by typing ipconfig from your workstation s command line prompt Enter these values in the Main Remote Web menu of the PPM100 Set the Security Level To quickly allow access to all EWS features go to the Main Remote Web Control submenu and set Web Control to Enabled and Security Type to Password The default password is PPM100 Read the section Configuring EWS Security later in this chapter for a complete description of EWS security features Enable the EWS Return to Main Remote Web and set Web Server to Enabled Your EWS stores the network addresses into non volatile memory then gathers data on your PPM100 setup gauge and relay descriptions etc Allow the EWS about 30 seconds before continuing To make sure the EWS is functioning touch the Web Queue button If commands are streaming across the display the EWS is communicating with the PPM100 ASRS PPM100 Partial Pressure Monitor 7 4 EWS Quick Start Access the Web Page Start your w
135. cess channel 1 8 and is required The parameter i selects a control input below i input 1 input i input 0 PPI 8 CM1 16 PPM alarm 1 PP2 9 CM2 17 Clock 2 PP3 10 CM3 18 TTL pin 3 PP4 11 CM4 4 PP5 12 ANI 5 PP6 13 AN2 6 PP7 14 AN3 7 PP8 15 AN4 Examples RAMS 2 Returns the control input i for process channel 2 RAMS 2 3 Sets the control input for channel 2 to PP4 RGOS d i Gauge Off State The RGOS command sets queries the Gauge Off State for process channel d The parameter d selects a process channel 1 8 and is required The parameter i selects Inactive 0 or Active 1 Examples RGOS 2 Returns 1 if channel 2 Gauge Off State is Active O if Inactive RGOS 2 1 Sets channel 2 Gauge Off State to Active Pressure Setpoint RTRP 7 d x The RTRP command sets queries the Pressure Setpoint for process channel d The parameter d selects a process channel 1 8 and is required The parameter x is the Pressure Setpoint expressed in the current units Examples RTRP 8 Returns the Pressure Setpoint for channel 8 in the current units RTRP 8 1 0e 3 Sets the Pressure Setpoint for channel 8 to 1 0x10 in the current units PPM100 Partial Pressure Monitor ASRS 6 40 Process Control RTRV d x RPHY d n Voltage Setpoint The RTRV command sets queries the Voltage Setpoint for process channel d The parameter d selects a process channel 1 8 and is required The parameter x is the
136. ch the Chart or Table QuickKey to display the log in Chart Table format 12 12 PPS PPS current B 11 08 3 858 06 6 65 09 212 20 8 41 08 3 88 06 6 72 09 10volts Chart G 909 10volts C f diu Span 60 Secs Logoo 00 02 Figure 1 23 Press Chart to display the chart of the data log Step 3 Touch the Setup button to access the Logging Setup menu Chart Setup t 12 13 i Logging 8 Y Axis Log E Logging interval 15 Disabled 00 00 02 TTL reset enable Time length of log 13 Setup Enabled 13 Mins Clear log gt k piy 2 Pressure Pressure Chart Help Figure 1 24 Logging Setup menu Choose between Chart and Table display formats or adjust Logging Parameters g Step 4 Select Table or Chart display format Activate Logging or change the Logging Interval as required using the menu PPM100 Partial Pressure Monitor SRS MassSpec Display 1 27 MassSpec Display ASRS The MassSpec Display Screen provides a direct and flexible way to display mass spectra collected by the RGA head directly on the front panel of the PPM100 W From the Monitor Display screen press the MassSpec QuickKey to access the Monitor MassSpec Display If not already on press the FILAMENT button to establish electron emission and activate the display of mass spectra on the front panel Monitor MassSpec canning Scan rate 2 FC 17 9 AMU M 54e 008 Torr e 12 005 M Uh i Ali 10AMU
137. cting via an RS 232 program Communicating With GPIB PPM100 supports the IEEE 488 1 1978 interface standard It also supports the required common commands of the IEEE 488 2 1987 standard Before attempting to communicate with the PPM100 over the GPIB interface the PPM100 s Device Address must be set in the Main Remote GPIB menu Communicating with USB PPM100 supports USB Universal Serial Bus communication with PCs The USB interface makes setup and communication very simple Simply connect the USB cable between the PPM100 and USB port on the computer download the required drivers into your computer power up the PPM100 and hardware setup is finished Consult the USB Setup section at the end of this chapter for details ASRS PPM100 Partial Pressure Monitor 6 12 Remote Programming Screen Indicators And Queues To assist in programming the PPM100 has an interface activity indicator displayed in the upper right corner of the screen next to the time The arrow symbol flashes whenever there is interface activity transmit or receive The X symbol indicates a computer interface error has occurred such as an illegal command or out of range parameter is received The SRQ indicator is on when the PPM100 generates a GPIB service request SRQ stays on until a GPIB serial poll is completed To help find program errors the PPM100 can display the interface buffers on the screen This screen is accessed by touching Queu
138. d Remember email is inherently unreliable SMTP servers fail delivery time is inconsistent you don t read your mail regularly etc Use email notification as a backup to an interlock system not in replacement of one 129 156 023 040 ppm 1 00 vacuumisb com othervacuser vacuumlab com z T Fivectesimessosercre ste Valve Clasec Notity Bob X221 eating Jacket Of End of Bakeout urbo Pump Of Call Facilities x222 ater Cooling Off Call John x223 Figure 7 20 Email configuration web page PPM100 Partial Pressure Monitor SRS Using the EWS 7 29 ASRS Testing the Email Function It is very important to test the email function before using it routinely If any address is incorrect you will never get an email notice 1 Set the SMTP address Make sure you type it correctly If you are using a verbose address relay mailhandling com make sure the DNS address was entered correctly on the PPM100 2 Set the from address The SMTP may require a from address that has a certain domain name The domain name is typically the string after the sign in an email address For example if your email address is me mycompany com you may wish to use PPM100 mycompany com as the from address Ask your network administrator if a particular domain name is required is required to use your SMTP server 3 Set the to address this is the email address where you want notifications to be sent 4 Click the
139. d as a DAC output port as an AD input so that you can read pressures directly GAUGE OFF The external Gauge is off The voltage provided by the gauge is The external Gauge is in a FAULT Status lt 1V indicating an OFF condition Note Most compact gauges provide voltage outputs between 2 and 10V A voltage output below 1V is interpreted as the gauge being Off The voltage provided by the gauge is gt 10V indicating a FAULT condition Note Most compact gauges provide voltage outputs between 2 and 10V A voltage output above 10V is interpreted as the gauge being in a FAULT Condition ASRS PPM100 Partial Pressure Monitor 8 8 Error Messages Error Message WAIT Cause The controller is computing the answer Emission current is being established in the RGA The RGA has not returned the data requested yet RS 232 cable to RGA is damaged Solution Wait for the answer Wait for the emission current to stabilize Wait for the data to be returned Check RS 232 cable continuity or replace cable NOT SELECTED The gauge has not been selected Select the gauge RGA Error Message NO RGA The RGA connect icon is indicating no communication with the RGA head Cause No RGA is connected to this PPM100 RGA power is off RS 232 cable to RGA is damaged Solution Connect RGA to PPM100 see Chapter 1 Turn RGA power on Check RS 232 cable continu
140. d be kept free of dirt dust fingerprints and other materials that could degrade its optical properties Long term contact with abrasive materials will scratch the front surface and harm image quality PPM100 Partial Pressure Monitor ASRS Screen Menu 3 61 Calibrate Touch Screen Display the Touchscreen Calibration window If there is consistent misalignment between the LCD buttons and their touchsensitive areas follow this calibration procedure to realign the LCD and touchscreen Tip Use the eraser on the end of a pencil to touch the screen This ensures the best alignment of the LCD and the touchscreen ASRS PPM100 Partial Pressure Monitor 3 62 Backlight Menu Backlight Menu Display the Backlight saver submenu Main Backlight Backlight saver E Disabled Backlight delay 133 00 05 00 Turnoff time 18 00 Turnon time 133 08 00 2 EJ fek Po Pressure Monitor Process Main Help Figure 3 30 Main Backlight menu The PPM100 has a back lit LCD display Backlighting is supplied by a fluorescent tube Use the Backlight Saver feature to extend its useful lifetime by automatically turning it off after hours Using the Backlight Saver can double the lifetime of the fluorescent tube All PPM100 controller functions remain functional while the backlight is off Backlight Saver Select the Backlight Saver mode Enabled or Disabled Disabled means that the backlight will
141. de optimum data acquisition rates at the mass of interest all other partial pressure readings and displays are disabled while in this display mode The other Data Bars will show LEAKTREND until a non LeakTrend display is chosen for this Data Bar Warning All process control channels must be in manual mode to be able to access the Silent Audio Leak Trend Display mode PPM100 Partial Pressure Monitor 1 24 Pressure Display Auto Scaling Bar Graph Figure 1 19 Auto Scaling Bar graph Best display to detect instantaneous changes in pressure readings Three decade logarithmic bargraph display scaled about the current reading Often used during leak testing procedures This display preserves the feel of the old analog needle displays preferred by some vacuum users Full Range Bar Graph Figure 1 20 Full Range Bar Graph display Best display to view the overall status of your vacuum system at any given time Fifteen decade logarithmic bargraph display covering the entire useful range of the instrument 10 to 10 Torr The scale covers the entire range from UHV to atmosphere Leak Rate Pressure Torr Leak Rate Helium Figure 1 21 Full Range Bar Graph display Use this display to calculate and view leak rates from the measured partial pressure Use this display to measure leak rates for components attached to the vacuum system Leak Rate Partial Pressure X Leak Rate Coefficient where th
142. described at the end of this chapter if uncertain about the electrical safety of your vacuum setup Consult an experienced electrician if necessary i m ANALOG yo gt YS gt Figure 1 2 Power and chassis ground connection on the back of the PPM100 controller 1 Power entry module with power cord connected to grounded wall outlet on the other end 2 CHASSIS GND lug with heavy gauge ground wire connected directly to facility earth ground PPM100 Partial Pressure Monitor 1 6 Installing the RGA Head Installing and Connecting the RGA Head When properly connected to an SRS RGA Head the PPM100 controller can monitor and display partial pressure measurements for up to 8 independent component gases A Scan Display mode is also available to graph RGA Mass Spectra directly on the front panel of the instrument All communications between the PPM100 and the SRS RGA Head take place over an RS 232 serial interface connection No power is delivered to the RGA Head from the PPM100 controller Installing the RGA Head WARNINGS e Read the entire Safety and Preparation for Use section of the RGA Manual before starting the SRS RGA Head installation procedure Read and strictly follow all RGA installation instructions in the RGA Manual to ensure that the performance of the instrument is not compromised by an incorrect installation PPM100 is not compatible with any third party residual gas analyz
143. ding to 10 Vdc output signal and is used to scale all pressure readings for the gauge This mode must be selected for standard capacitance manometers with linear outputs Log assumes a logarithmic relationship between the pressure and voltage output of the gauge Pmax is the pressure corresponding to 10 V output and a 1 V decade logarithmic relationship between voltage signal and pressure is assumed over the entire range of the gauge This mode is compatible with many standard compact gauges with logarithmic voltage outputs and 1 V decade scaling Off turns pressure calculation off for that port No CM pressure is displayed in the CM Data Box This condition indicated in the fourth line of the CM Data box Tip Use the Log mode to display pressures from compact gauges providing a logarithmic voltage output signal PPM100 Partial Pressure Monitor 3 26 Analog I O Display Zero CM Submenu Adjust the Capacitance Manometer CM Zero indication Follow the on screen directions to adjust the zero of the capacitance manometer gauge Periodic Zero readjustments of the capacitance manometer readings to compensate against background drift are required for operation close to base pressures Important Before making this adjustment the CM must be connected to a vacuum system with a pressure lower than 0 01 of full scale 0 0001 x PMax Trim Pot Zero Adjustment All capacitance manometers include a trim pot adjustment used to adjust the ou
144. dings for the pressures or analog signals of interest The data log can also be accessed remotely through the computer interface or through the Internet when using the embedded web server The data log can be cleared manually at any time from the front panel use Clear Log remotely via the Remote TTL Control Module or via the computer interface Typical applications of the Data Logging capabilities include capturing pump down or venting curves for vacuum system characterization monitoring mass flow controller signals during deposition processes and monitoring temperatures and other time dependent variables during bakeouts or heat treatments For More Information Consult Chapter 3 of this manual for detailed information on the Data Logging capabilities of the PPM100 and Chapter 5 for information on the Remote TTL Control Module PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 7 Pressure Data Displays Monitor Display The Monitor Display Screen provides simultaneous display of up to eight partial pressure measurements in eight data boxes labeled PP1 through PP8 Motor 1222 PP1 2 PP2 4 PP3 18 PP4 28 5 37 08 1 46 09 7 14 08 3 82 06 Alarm High Hydrogen Heliurn Water Nitrogen PPS 32 PP6 40 PP 43 PP8 44 7 57 07 5 69 08 2 17 09 4 87 09 Alarm High Alarm Low Oxugen Argon Pump oil Back Py Pressure AnaloglO MassSpec Pressure Help Figure 2 1 The Monitor Display screen with factory defa
145. double click on Navigator then click on Applications 3 Click on New Type Enter the description comma separated values file extension csv MIME type text and browse to your application Do not type the quote symbols 4 Click OK 5 Download the CSV data and your chosen application should open Remember the application must be able to handle data in this format Internet Explorer uses the Windows file associations Installing Excel usually associates csv files to Excel If you need to add the association go to Windows Explorer or My Computer Go to View in the menu bar then choose Options Click on the File Types tab Either edit an existing entry or add a new one If Internet Explorer will not automatically open Excel try saving the downloaded csv data to a file To do this right click on the downloaded data frame and choose view source This usually opens a Notepad window with the data in it Save this file to disk Either double click on this file to launch Excel or open it from within Excel Some browsers may require a page reload after a CSV download Simply hit the reload icon in your browser Note The EWS is limited in how much data it can send out at a time Selecting fewer quantities for example pressures only instead of pressures and relay states will increase the number of log points you acquire in a single CSV download Get Userlog This feature is simply for security purposes It displays the recent
146. ds to the RGA should be sent during this time Note This corresponds to the RGA s CA command Example CALL Perform detector calibration and return the RGA status CEIV Calibrate RGA Electrometer The CEIV query calibrates the RGA electrometer s I V response and returns the RGA status when complete See the RGA manual for details This process takes about a minute and no other commands to the RGA should be sent during this time Note This corresponds to the RGA s CL command and the Calibrate Electrometer button in the RGA menu Example CEIV Perform electrometer calibration and return the RGA status DGAS 7 i Degas On Off The DGAS i command turns RGA Degas On i 1 or Off i 0 DGAS queries whether degas is on or off DGAS 1 will turn Degas On If no other command is sent to the RGA then degas will last 3 minutes and then turn off If DGAS 0 or another RGA command is sent before 3 minutes degas will turn off immediately Examples DGAS Returns 1 if RGA Degas is on 0 if Degas is off DGAS 1 Turns RGA Degas on ASRS PPM100 Partial Pressure Monitor 6 30 Logging and Charts Logging Commands PLDS 7 i Chart Table Display The PLDS command sets queries the Data Log Display to Chart i 0 or Table i 1 Examples PLDS Returns 0 for Chart and 1 for Table PLDS 0 Sets the Log Display to Chart PLCL Clear Data Log The PLCL command clears the Data Log All entries in the Data Log are lost after sending
147. e 3 Active A NO 4 Common C Inactive 1 6 Active A 3 Common C C 8 Inactive NC Active A NO 10 4 Common C C Inactive Active A 2 5 Common C C 14 Inactive 1 NC Active A NO 16 6 Common C C Inactive 1 NC 18 Active A NO 19 7 Common C C Inactive 1 NC 21 Active A NO 22 8 Common C C 23 Inactive NC Active A mo ASRS PPM100 Partial Pressure Monitor 2 18 PPM100 Basics DIGITAL TTL I O Use the female DB37 port to connect to the 1 eight Process Control TTL Outputs 2 eight Process Control TTL inputs and 3 seven Remote Control TTL inputs of the Process Control Board A male DB37 connector is provided to facilitate connection to the controller 19 1 ee eeeeebeceeee ee oe 37 20 Figure 2 6 The PPM100 DB37 TTL I O connector Pin Name Description 5 V OUT External User 5 V IN Edge trigger J Degas On T Degas Off Level LOW RGA emission Off Level LOW Disable front panel Keypad Edge trigger J clear the data log Level HIGH Ignore RGA_Degas_On RGA_FIL_On RGA_EMULT_On pins Edge trigger J FIL ON T FIL Off Level LOW2 Disable Touchscreen and Keypad TTL OUT for Channel 5 LOW ACTIVE Module 1 PPM100 Vcc Remote Control 2 ANODE COM TTL IN 3 Not Used 4 Not Used 5 RGA_Degas 6 RGA_FIL_Lockout 7 RGA_Key_Disable 8
148. e ACTIVE valve open use gate valve as the Description open for the Active Message and closed for the Inactive Message The Channel Data Box would then display gate valve open or gate valve closed depending on the state of the channel Active Message Inactive Message Enter the channel Messages The Active Message is displayed in the Channel Data Box whenever the channel is ACTIVE The Inactive Message is displayed whenever the channel is INACTIVE ASRS PPM100 Partial Pressure Monitor 3 44 Process Control Display Recommendations Combine Descriptions and Active Inactive Messages to provide useful information about the status of your system For example for a channel controlling a gate valve ACTIVE valve open use gate valve as the Description open for the Active Message and closed for the Inactive Message The Channel Data Box would then read gate valve open or gate valve closed depending on the state of the channel Beep Enable the Channel Beep On or Off On means that a beep is sounded every time the channel changes states Off means that no beep is sounded PPM100 Partial Pressure Monitor ASRS Main Menu 3 45 Main Menu Use the Menu or Back to Main QuickKey to bring up the Main Menu This menu can only be accessed from the Pressure Display if Menu wae Backlight 2 E a Pek a Pressure Monitor Process Pressure Help Figure 3 24 M
149. e combustible or corrosive gases or mixtures of gases Turn off hot filament gauges during the exposure to flammable or explosive gases Do not use this product to measure the pressure of unknown gases Avoid enhanced Pirani and thermocouple gauges for pressure measurements in systems routinely pressurized above atmosphere capacitance diaphragm gauges are much safer and recommended instead If used improperly Pirani gauges can supply incorrect pressure readings For example using the N calibration of a convection enhanced Pirani gauge i e PG105 or PG105 UHV to pressurize a vacuum system above Torr with certain other gases can cause dangerously high pressures and may lead to explosion Do not use compression fittings for positive pressure applications Pirani thermocouple and even capacitance diaphragm gauges mounted in this fashion can be forcefully ejected and injure anybody in their path Implosion Risks The risk of implosion must also be considered in high vacuum systems using glass windows glass tubulation and glass envelope ionization gauges Dropping a tool on a gauge under vacuum or pulling on the cables can easily break the glass The resulting implosion may then throw glass fragments around the room injuring personnel Glass tubulated ionization gauges should not be treated roughly or be bumped Install the ion gauge cable on glass tubulated gauges before the gauge reaches vacuum pressures Stress relief all cables a
150. e in the Main Remote RS 232 GPIB or USB menus The Queue display may slow down communications and should be displayed only when testing or debugging a host program Press a QuickKey to exit from this display The upper half of the Queue display is the Receive Queue These are the most recent characters which have been received by the PPM100 displayed in all UPPER case Commands which have already been executed are shown in normal text Commands which have not yet been executed are shown with a gray background Command errors are shown in inverse text The lower half of the Queue display is the Transmit Queue These are the most recent characters which have been placed in the output buffer Characters which have already been sent over the interface are shown in normal text Characters which are waiting to be sent are shown with a gray background Command Format Communications with the PPM100 uses ASCII characters Commands may be in either UPPER or lower case A command to the PPM100 consists of a four character command mnemonic with optional arguments if necessary and a command terminator The command arguments and terminator may be separated by spaces The terminator must be a linefeed lt lf gt or carriage return lt cr gt on RS 232 and USB or a linefeed lt If gt or EOI on GPIB No command processing occurs until a terminator is received Commands function identically on all interfaces whenever possible Command mnemonics beginni
151. e 3 20 Process Display This display consists of eight rectangular Channel Data Boxes each displaying state and mode information for a single process control channel This display allows fast access to the state and configuration of all process control channels Touch a Channel Data Box to choose a channel state Active Inactive or Auto or edit the channel rules and messages The 8 dedicated LEDs below the touchscreen provide across the room indication of channel output status On Active WARNING Using process control channels in your vacuum system requires careful programming and thorough testing Double check all logic and wiring and use manual activation to test the action of each and every channel Test all scenarios in a safe manner before relying on automatic unattended operation About Process Control The Process Control module provides eight channels of process control Each channel has a relay closure output with corresponding opto isolated TTL signal that may be linked to a variety of input sources with intuitive user programmable rules Channel rules include all variables required for full process automation including input source selection activation threshold level polarity and hysteresis delay settings and audio and text notification The available input sources include any partial pressure or analog input the system clock RGA status or a TTL input trigger signal This option also includes 7 opto
152. e 7 main display screens Pressure Monitor AnaloglO MassSpec Logging Process Control and Menus These displays are the primary interface to your vacuum system The Pressure Display presents three pressures partial or total or analog input readings in a large easy to read format The Monitor Display shows up to eight partial pressure readings on a single display panel including alarm information It also provides access to the AnalogIO and MassSpec displays The AnalogIO display shows the voltage levels at the analog I O ports and also up to four capacitance manometer readings The MassSpec display is used to graph mass spectra directly on the front panel of the controller The Logging Display shows the stored Data Log in Table or Chart format The Process Control Display shows the state of the 8 process control channels and relays The Menu is used to setup various operating parameters of the PPM100 such as remote interfaces screen and time date settings Displays are accessed via the QuickKeys displayed at the bottom of most displays This allows fast access to the most critical information in the vacuum system Within each display the individual Data Boxes where the data is presented are also buttons For example touch a box in the Monitor Display to reconfigure a partial pressure data box Help for any button or box is available on screen by touching the Help QuickKey then touch any button or box for help about its function Touch do
153. e Leak Rate Coefficient is a user specified parameter stored in the PPM100 PPM100 Partial Pressure Monitor SRS Pressure Display 1 25 Status Information 9 72 08 Operating normally Figure 1 22 Status Information display Use this display to learn more about the state of the RGA Head a gauge or an analog port This is especially useful if the gauge is in a fault or error condition The lowest line in this display shows who last modified the status of the gauge front panel user remote user etc Pressure Units The factory default for pressure units is Torr 1 Torr 1 mm Hg Use the Menu QuickKey to display the Main menu Touch Units to choose a different units system Torr micron bar mbar or Pascal ASRS PPM100 Partial Pressure Monitor 1 26 Pressure Display Logging When Logging is enabled factory default data from all partial and total pressures and analog signals are stored in a circular data buffer at a rate specified by a user adjustable Logging Interval The logged data for the three sources selected in the Pressure Display screen can be viewed at any time in the Data Log Display in either table or chart format This allows users to switch readily between instantaneous and logged readings for the measurements of interest In order to access the Data Log display follow these simple steps Step 1 Qe Bring up the Pressure Display by touching the Pressure QuickKey Fl Step 2 Tou
154. e full scale range PMax of the gauge is programmed and CM Display is set to Linear in the controller Full scale ranges up to 1000 Torr are supported by the controller Simultaneous display of voltage and pressure levels in the AnalogIO display provides a convenient way to check proper configuration of the CM measurements An OVERLOAD message is displayed when the output signal from the CM exceeds 12 V For added convenience the PPM100 also supplies an auxiliary 15 Vdc 100 mA power output This power is usually sufficient to operate a pair of standard i e non heated capacitance manometers For More Information Chapter 1 includes all the basic information required to install and set up your PPM100 controller and its gauges including capacitance manometers Chapter 3 describes in detail all menus required to configure the IPPM100 to display pressure readings from capacitance manometer gauges Tips For Using CMs 1 Avoid overpressurizing the gauge head Use pressure relief and isolation valves whenever required Alway vent pressure safely If working with toxic gases vent to a hood or approved outlet Never vent toxic gas to the room air 2 Maintain a stable temperature around non heated gauges 3 Allow long warm up times for heated gauge heads Consult manufacturer s recommendations 4 Avoid contamination and particulate buildup inside the gauge since that could affect diaphragm motion Some gauge designs offer special
155. e met Rule parameters include setpoint hysteresis polarity above or below and delay Manual control of the channel output is also possible Process Control History History All process control events channels active inactive auto and some RGA related events are time stamped and logged in the Process History log Touch the History QuickKey to display the contents of the process control event log Each line of the log is a change in either State or Mode of a process channel For state changes Active Inactive the bitfield shows the state of all channels 1 Active 0 Inactive starting with channel 1 For mode changes Auto Manual the bitfield shows the mode of all channels 1 Auto 0 Manual starting with channel 1 Important History event logs are preserved if the unit is turned off using the front panel power switch However all records are lost if power is removed by unplugging the unit from the wall Process Control Overview Touch the Overview QuickKey to obtain a complete summary report of status and configuration information including Rules for all channels in a single screen PPM100 Partial Pressure Monitor 3 38 Process Control Display Channel Data Box GATE VALVE 1 A Process Control Data Box displays the state Active Inactive mode Auto Manual OPEN and message for a single process control channel Touch the Data Box to access the channel s rules and messages or to manually control its output
156. e of vacuum equipment or components can only be carried out if a completed Declaration of Contamination has been submitted to Stanford Research Systems SRS The completed declaration must be reviewed by qualified personnel before a return authorization number RMA can be issued Contact SRS to request additional copies of this form or if you have any questions regarding the contents of this declaration e SRS reserves the right to refuse acceptance of vacuum equipment submitted for repair or maintenance work where the declaration has been omitted or has not been fully or correctly completed e SRS reserves the right to refuse to service any vacuum equipment which could potentially be harmful to the personnel carrying out the repair and service of the equipment e SRS will not accept any equipment which has been radioactively or explosively contaminated e SRS will not service any equipment that might contaminate its vacuum calibration equipment Description of equipment Equipment type model Serial No Date of Purchase Reason for return circle one Repair e Maintenance Please describe symptoms and problems Equipment condition Has the equipment been used circle one e Yes e No Describe the operating environment the instrument was exposed to Page 1 ASRS PPM100 Partial Pressure Monitor xxiv Damage Requiring Service Declaration of Contamination of Vacuum Equipment cont Was
157. e port I O mode is set to DAC output e Gauge Name A unique name can be assigned to each CM gauge by the user e CM Display Linear Log or Off Linear is required to assure proper pressure calculations for Capacitance Manometers Off indicates that no pressure calculations are performed from the analog voltages at that ANALOG I O port Log indicates that a logarithmic relationship between voltage and pressure is assumed for the calculation of pressures for the gauge connected to the port this extends the use of the CM Data Boxes to display pressures from compact gauges with logarithmic pressure outputs Touch a Capacitance Manometer Data Box to display its Setup menu Monitor AnalogIO Setup AN1 4 and edit its measurement setup parameters PPM100 Partial Pressure Monitor ASRS Analog I O Display 3 23 Monitor AnaloglO Setup Menu Analog I O and CM measurement setup WARNING Read the entire Safety and Preparation for Use section of this manual before using the PPM100 Read Chapter for detailed instructions and safety information regarding the installation and connection of gauges Access the Monitor AnalogIO Setup menu from 1 the AnalogIO Display touch an Analog Signal or Capacitance Manometer Data Box or 2 from the Pressure Display touch the Info Box of an Analog signal or a Capacitance Manometer Data Bar Monitor Analogl0 Setup AN1 t 12 29 ADC or DAC g AN1 Name AgCl ADC input Temp DAC source E M
158. e request Subsequent serial polls will return SRQ cleared until another service request occurs Polling the status word and reading it with STB can return different values for SRQ When serial polled SRQ indicates a service request has occurred When read with STB SRQ indicates that an enabled Serial Poll Status bit is set Service Request A GPIB service request SRQ will be generated whenever a bit in both the Serial Poll Status register AND Serial Poll Enable register is set Use SRE to set bits in the Serial Poll Enable register A service request is only generated when an enabled Serial Poll Status bit becomes set changes from 0 to 1 An enabled status bit which becomes set and remains set will generate a single SRQ This prevents a single persistent condition such as overload from generating an endless stream of service requests If another service request from the same status bit is desired the requesting status bit must first be cleared In the case of the PCSQ GERR IERR and ESB bits this means clearing the enabled bits in the Process Gauge Error or Standard Event Status registers by reading them or clearing the appropriate bits in the corresponding enable registers Multiple enabled bits in these status registers will generate a single SRQ Another SRQ from PCSQ GERR JERR or ESB can only be generated after clearing the PCSQ GERR IERR or ESB bits in the Serial Poll Status The controller should respond to the
159. eactivation Time of channel 4 to 77 400 000 ms after midnight 9 30 PM TTL Activation Level RTIL d i The RTIL command sets queries the TTL Activation Level for process channel d The parameter d selects a process channel 1 8 and is required The parameter i selects Active when TTL input Low 0 or High 1 Examples RTIL 3 Returns 1 if channel 3 is active when TTL Input High 0 if Low RTIL 3 1 Sets channel 3 to active when TTL Input High PPM100 Partial Pressure Monitor ASRS 6 42 Process Control TTLL Read TTL Inputs The TTLL query returns the decimal value of a 24 bit binary number representing the state of the process control TTL Inputs as listed below Each bit is 0 if the input is TTL low and 1 if the input is TTL high All unused bits are 0 bit description 0 unused 1 unused 2 RGA_Degas_On 3 RGA_Fil_Lockout 4 RGA_Key_Disable 5 unused 6 unused 7 Clear_Data_Log 8 RGA_Remote_Enable 9 RGA_Fil_On 10 unused 11 RGA_TS_Disable 12 unused 13 unused 14 unused 15 unused 16 Process control TTL input 1 17 Process control TTL input 2 18 Process control TTL input 3 19 Process control TTL input 4 20 Process control TTL input 5 21 Process control TTL input 6 22 Process control TTL input 7 23 Process control TTL input 8 Example If the returned value is 197136 the hex equivalent is 030210H indicating that all bits are low except bits 4 9 16 and 17 RHGF Read Process Log RHGN The PPM
160. east 50 ms and holding the line LOW for at least 50 ms clears and resets the data log Recommendation Use this input to synchronize the start of data logging with an important event such as a gate valve closing a turbo pump achieving full rotational speed or a heating cycle getting started For example connect the Clear_Data_Log line to the logic output of your gate valve s mechanical position indicator to restart the data log buffer every time the gate valve is opened This is useful for the collection of pump down curves Connect the Clear_Data_Log line to a logic signal from your temperature controller indicating the start of a heating ramp to monitor the entire temperature profile of a TPD experiment ASRS PPM100 Partial Pressure Monitor 5 24 Process Control RGA_Remote_Enable Pin 11 Trigger mode Level HIGH ignore RGA_Degas RGA_FIL_On and RGA_FIL_Lockout pins Debounce time 50 ms Prerequisites e None The RGA_Remote_Enable line must be LOW for the PPM100 Remote Control Module to acknowledge the edge triggers from the RGA_Degas and RGA_FIL_On and the level of the RGA_FIL_Lockout pins If unconnected this pin will be HIGH and remote control is disabled default Recommendation This pin is often used to enable disable Remote Control of RGA functions For example it might be useful to lock the remote control signals during an electrically noisy process to prevent logic glitches from accidentally affecting RGA
161. eb browser and in the location URL bar type the IP address you assigned to the EWS Make sure JavaScript is not disabled in your browser You should see a web page similar to below PPM1O0 Micrerott Intemet Explorer SRS Web Enabled PPM100 Name SRS PPM100 om Readings F Show Storad Plot E mol Status Control Get Chot Type PPM100 Partial Pressure Monitor Function MONITOR Last Reading 15jul03 at 13 31 Gauges Reading Name enr Tor a Figure 7 1 EWS web page ASRS Installing the EWS 7 5 Installing the EWS This section covers the network installation and configuration of the Embedded Web Server While this adds powerful functionality to the PPM100 connecting your vacuum system to the world wide web can expose it to unauthorized access resulting in harm to personnel as well as equipment Warning Network security is a serious matter Consult your network administrator for more information about using web enabled instruments in your lab Network Administration Concerns Your network administrator has a difficult job In addition to making sure your network is always running smoothly she also needs to keep track of which IP addresses are assigned to which machines This prevents IP address collisions where more than one computer has the same IP address as well as maintains the security of the network Your administrator may have a limited number of free IP address
162. ecalibration of the RGA s electrometer response A complete electrometer calibration takes approximately one minute and cannot be interrupted A count down timer shows the calibration progress The electrometer is designed for maximum long term stability however it is good practice to recalibrate it periodically particularly in the presence of a large change in the operating temperature or humidity around the RGA Head Note No partial pressure readings can take place while electrometer calibration is in progress Hence all process control channels must be switched to a safe manual state before electrometer calibration may be performed RGA Info Display a complete report of all important calibration and timing parameters stored in the RGA head including error byte values Use this display to query the RGA head during diagnostic procedures Have this information handy when contacting SRS for support ASRS PPM100 Partial Pressure Monitor 3 48 RGA Menu Advanced Submenu Display the RGA Advanced submenu Main RGA Advanced t 13 57 Degas Leak rate coefficient 13 off 50 lonization source 8 RGA Filament IRF error handling 8 Warn on RF Last RGA err oe 2g Back Py i Pressure RGA Help Figure 3 26 Main RGA Advanced menu Degas Touch this button to Degas the RGA ionizer by heating and electron stimulated desorption The Degas time is 3 minutes and a count down timer shows the progre
163. ectrometer drift Tube sensitivity improperly programmed Contaminated RGA probe Poor conductance in RGA s connection to vacuum system Cross talk with other ion sources Solution Bakeout the RGA probe Wash the RGA probe if no change Contact SRS Perform Calibrate Electrometer operation Reprogram the RGA s sensitivity factor using the RGA Windows software Bakeout and or degas the RGA probe Wash the RGA probe if no change Move the RGA probe to the point of measure and or increase conductance Separate the RGA head from other ion sources such as magnetrons ion gauges ion pumps ion guns etc ASRS PPM100 Partial Pressure Monitor 8 10 Basic Troubleshooting RGA Symptom Possible Cause Solution Pressure reading too Electrometer drift Perform Calibrate Electrometer low operation Defective electrometer circuit Contact SRS Contaminated RGA head Clean RGA head Defective RGA head Replace repair the RGA head Pressure readings RGA probe badly contaminated Bakeout and or degas Wash the RGA erratic probe if no change Improper grounding Perform a Proper Grounding Test see Chapter 1 Bad electrical connection Check connection between RGA probe and ECU Faulty electrometer Contact SRS Cross talk with other ion sources Turn off all other sources of ions Separate shield the RGA from other ionization gauges ion pumps etc Excessive vibrations Isolate the vacuum system from t
164. een only updates when you click Get Readings For continuous updates use Auto Monitor Show Stored Plot Show Stored Plot exists to allow examination of a pressure graph after it is acquired If the system the PPM is sampling shows unusual yet transient behavior performing the scan again at a later time may not reveal the problem Any plot analog scan pressure versus time chart or voltage versus time chart is automatically stored in the EWS memory after it is acquired If desired a technician can inform a supervisor at a remote location to look at the unusual scan through Show Stored Plot Note that only one plot can be stored at any given time If a new plot is acquired it overwrites the old one Access of the stored plot is allowed by all users even those without control privileges ASRS PPM100 Partial Pressure Monitor 7 20 Using the EWS Auto Monitor a ee ee ee a met a a m s x m ee ee ee ie ete deco ke Figure 7 12 Auto Monitor menu This function allows automatic monitoring of specific inputs or values Select the quantities you wish to monitor from the menu and how often you wish the display to update A new browser window will be created displaying only the selected data This window will refresh every 20 seconds depending upon network availability The auto monitor function will show the status of a gauge that cannot report a value The auto monitoring window can be on your deskto
165. erface are shown in normal text Characters which are waiting to be sent are shown with a gray background Web Submenu Display the Web server configuration menu The parameters in this menu must be entered in order to use the web interface See Chapter 7 Embedded Web Server for step by step information on configuring the PPM100 for the internet Web Server Enable or Disable the web server Important Use the web security measures in the Web Control menu to prevent unauthorized control of the PPM100 via the web Disable the server to prevent ALL web access to the PPM100 IP Address Enter the IP Address for the PPM100 web server Obtain a valid IP Address from your network administrator Entering invalid addresses may disrupt your network When accessing the PPM100 from your browser enter this IP address in the address box to display the web pages Make a favorite to provide one click access Subnet Mask Enter the Subnet Mask for the network Obtain the appropriate Subnet Mask from your network administrator PPM100 Partial Pressure Monitor 3 56 Remote Menu DNS Enter a DNS Address for the PPM100 web server Obtain a valid Domain Name Server DNS Address from your network administrator The DNS is used by the web server s e mail notification feature The DNS allows e mail addresses to be entered using full domain names Gateway Enter a Gateway Address for the PPM100 web server Obtain a valid Ga
166. ers An RGA100 200 300 Head must be mounted on the vacuum system and properly pumped down P lt 10 Torr before connection to the PPM100 box can be completed and partial pressure readings can be displayed If not already in place unpack and mount the SRS RGA Head on your vacuum system at this time and pump the vacuum chamber down to a compatible base pressure i e below 10 Torr If possible confirm proper operation of the SRS RGA Head before connecting to the PPM100 use the RGA Windows program included and a host computer connected directly to the RGA s serial communication port to test the mass spectrometer by itself Connecting to the RGA Head waRNINGs e Connect the interface cable to the PPM100 controller first before establishing a connection to the RGA Head e DO NOT switch the controller power on until instructed to do so e The RGA Head chassis must be properly grounded during operation to assure operator safety e Cables once installed must be secured to provide strain relief for the gauge pins PPM100 Partial Pressure Monitor ASRS Installing the RGA Head 1 7 This section describes the electrical connection between the RGA Head and the PPM100 controller A one cable serial communication connection between the two devices is all that is required to complete this connection No power is delivered to the SRS RGA Head from the PPM100 box Locate the DB9 DB9 Serial Communication
167. erval to record closely timed data points over a short period of time Use a large Logging Interval to record data over a long period of time TTL Reset Enable Enable or Disable data logging TTL Time Reset Enabled allows the Data Logging Time Reset input of the remote TTL control module to reset the data log Enable this to synchronize the start of the data log with an external event such as the closing of a gate the opening of a valve or the achievement of full speed in a turbo pump Disabled means that the Data Logging Reset input of the TTL control module does not have any effect on the data log Time Length of Log This box displays the Time Length of the data log This parameter can not be entered directly The data log stores a fixed number of entries thus the Time Length is determined by the Logging Interval The Time Length is the length of time covered by the data log After this amount of time the earliest data in the log will be overwritten by the newest data PPM100 Partial Pressure Monitor 3 34 Logging Display Chart Y Axis Menu This button is only available from the Chart display Pmax Pmin Set the pressure corresponding to the top and bottom of the chart Note All pressure readings are displayed with the same chart scale The grid lines correspond to the values of Pmax and Pmin Vmax Vmin Set the voltage corresponding to the top and bottom of the chart Note Voltage data from the analog I
168. es and may show concern about having an instrument on the network in the first place Some of the first questions she may ask include e Why does an instrument need an IP address e Why does it need a static IP address e What happens if everyone in the department wants instruments with IP addresses e What is the MAC address for this instrument e What kind of security measures are in place These are all very valid concerns You will need to explain what you want to do and allow your administrator enough leeway to accomplish your goals while still satisfying hers Some of the information in this chapter may help you both Static IP The reason your instrument needs a static IP address is because it is a server You need your server to be at the same address all the time so you always know where to point your browser It is likely that once your instrument is running it will remain on 24 hours a day 7 days a week This makes using a dynamic IP address one that changes with each power up sequence somewhat infeasible Note that the EWS does not use a conventional file system data is generated on the fly for dynamic pages and static pages are stored in flash memory This makes the server less prone to common security risks ASRS PPM100 Partial Pressure Monitor 7 6 Installing the EWS Port Number The default port is 80 and should NOT be changed except in the following situations 1 If IP addresses are scarce in your net
169. essure box in the Monitor Display Tip PPM100 can display up to 8 independent partial pressures in its Monitor Display screen However not all partial pressure readings need to be enabled at all times It is sometimes useful to limit the number of partial pressures continuously monitored and stored by the PPM100 to increase sampling frequency for the species of interest or to store partial pressure measurement settings for common gases not present in the current mixture PPM100 Partial Pressure Monitor ASRS Monitor Display 3 17 ASRS PP1 PP8 Mass amu Enter the mass in amu for the selected partial pressure measurement The minimum mass is 1 and the maximum is the mass range of the RGA head 100 200 or 300 The SRS RGA head can measure individual peak heights on the mixture s mass spectrum at any integer mass within its mass range Peak height readings i e ion currents are transmitted back to the PPM100 and converted into partial pressure readings for the specified single mass Warning Partial pressure measurements for the channel are disabled if the specified mass exceeds the mass range of the RGA head PP1 PP8 Correction Factor Enter a Gas Correction Factor value 0 01 to 100 for the selected partial pressure measurement The SRS RGA head can measure individual peak heights on the mixture s mass spectrum at any integer mass within its mass range Peak height readings i e ion currents are transmitted b
170. et EWS to Enabled This sets the IP addresses in the EWS and starts the EWS Under Main Remote Web touch Web Queue This screen should show web server activity as it queries the PPM for information Allow the web server to gather information from the PPM for several seconds Run a web browser on your workstation At the browser s http prompt type the fictitious IP address you set on the PPM100 front panel and hit the return key In a moment you should see the opening screen of the web page If you did not see the opening screen within a few seconds make sure of the following The web server is enabled Check Main Remote Web Web Queue see above for activity When the cable is plugged in and the server is enabled a green activity light on the ethernet connector on the rear panel should be illuminated Verify this light is on If it does not light there may be a hardware problem with the crossover cable or your PC network card The IP address on the front panel of the PPM100 matches the IP address you typed in on your browser The crossover cable is connected directly from the PC to the PPM no hub or switch is in the path PPM100 Partial Pressure Monitor 7 14 Installing the EWS The cable is wired as a crossover cable If the web page display seems garbled or if parts are incomplete try waiting a few seconds and reloading the page in your browser The most likely cause for this problem is that the web server has
171. ety ground Add metal clamps if necessary Q Verify that the vacuum port to which any new component is about to be mounted is electrically grounded Use a ground lug on a flange bolt if necessary Step 2 With the SRS RGA and PPM100 controllers turned off but still plugged into an outlet Q Test for both AC and DC voltages between the metal parts of the vacuum system and the controller s chassis No voltage differences should be detected Ifno voltages are detected measure resistance between all parts of the vacuum system and between the vacuum system and the controller lt 2 Ohms assures a commonality of grounds between the different parts of the vacuum setup and prevents the development of high voltages between different sections of the vacuum setup in the presence of a high voltage plasma discharge a If AC or DC voltages exist or more than 2 ohms is detected professional help is recommended PPM100 Partial Pressure Monitor ASRS 2 1 Chapter 2 PPM100 Basics This chapter describes the basic features and functionality of the PPM100 controller In This Chapter PPM100 Overview Residual Gas Analysis RGA100 200 300 Analog I O Ports AN1 4 Input Output Capacitance Manometers CM1 4 Data Logging Charts and Tables Pressure Data Displays Monitor Display Pressure Display Pressure Units On Screen Help Backlight Saver RS 232 Computer Interface GPIB Interface USB Interface Embedded Web Server Opt 01
172. faster than the RGA RS 232 connection it is possible that the PPM100 will start to accumulate a backlog of commands for the RGA The RCC bit bit 3 in the Serial Poll Status register is cleared when the PPM100 has pending commands for the RGA A safe way of using GPIB commands is to serial poll until RCC becomes set between PPM100 commands to make sure that the RGA is keeping up No Communication with RGA The RGA_Com bit bit 0 of the Gauge Status word is set whenever the PPM100 detects a problem with the communication link to the RGA head This includes the RGA head power being turned off or the cable to the RGA being disconnected RGA Pass Through Mode When RGA Pass Through is enabled the PPM100 will pass ALL commands received via the Host RS 232 port directly to the RGA and all responses from the RGA will be transmitted from the Host RS 232 port The Host RS 232 port is also set to emulate the serial port on the RGA itself This allows the host computer to run RGA Windows or other direct RGA software without changing any serial cables Once Pass Through is enabled the PPM100 will not recognize any PPM100 commands it receives via the Host RS 232 port Only native RGA commands should be sent After using Pass Through mode the SYNC command should be used to synchronize the PPM100 with the RGA Important The PPM100 will not perform any RGA related activity while in Pass Through mode Only measurements related to the Analog port
173. features to avoid such buildup 5 Avoid mechanical vibrations 6 Eliminate any chances of mechanical stress to the gauges Use bellows if necessary 7 Recalibrate frequently Rezero often ASRS PPM100 Partial Pressure Monitor 4 8 Analog I O Ports Compact Gauges Compact Gauges are becoming increasingly popular in vacuum applications and share some standard characteristics 1 the measurement and control electronics are integrated into a small package mounted directly on the gauge head 2 a modest DC power supply is required to operate the gauge and its electronics and 3 pressure data is directly read via an output voltage proportional to the pressure In its most popular implementation the voltage output is related to the log of the pressure and the typical scaling factor is 1V decade of pressure Torr Most compact gauges can be connected directly to the ANALOG I O ports of the PPM100 The controller includes a logarithmic scaling mode for the CM pressure calculations which makes it possible to display compact gauge pressures directly on its front panel A 1V decade relationship between voltage output and pressure is the only requirement for compatibility To implement this pressure display mode 1 program Pmax to the pressure corresponding to a 10V gauge output signal 2 set CM display Log The pressure readings are displayed in the CM Data box or Data Bar associated to the analog port connected to the gauge It is
174. g the PPM100 turning it off or issuing RST do not clear the status registers Reading the status registers or issuing CLS clears the status registers Powering up with PSC enabled also clears the status registers This instrument extends the IEEE 488 specification by allowing you to check and clear individual bits in a status register Status Enable Registers Status enable registers let you decide which conditions you care about and check them all with one STB query or GPIB serial poll The Standard Event Error Gauge and Process status registers all have a corresponding status enable register Each bit in the enable register matches with a bit in the corresponding status register Bits in the enable registers are set with the status enable commands The enable bits do not affect the value of the status register and are not affected by status reads When a bit in BOTH a status register AND its enable register are set then a bit in the Serial Poll Status register will become set This mechanism reports underlying status conditions to a single status register Serial Poll Status Serial Poll Status Register The Serial Poll Status register is a special status register It is a single byte 8 bits and contains bits corresponding to the other four status registers When a status bit in another status register and the matching enable bit in its corresponding enable register are both set a bit is set in the Serial Poll Status
175. hange the Logging Interval Examples PLWT Returns the Log Length n in seconds PLWT 3600 Sets the Log Length to 1 hours 3600 sec PLEN 7 i Logging Enable The PLEN command sets queries whether Data Logging is enabled The parameter i selects Log Enabled 1 or Pause Disabled 0 Examples PLEN Returns 1 if logging is enabled 0 if disabled PLEN 1 Turns data logging on PLDD i Display Date The PLDD command sets queries whether Date Display in Table display format is Enabled i 1 or Disabled i 0 Examples PLDD Returns 1 if Date Display is enabled 0 if disabled PLDD 1 Turns Date Display on PLTR i TTL Reset Enable The PLTR command sets queries whether the TTL Log Reset input is Enabled i 1 or Disabled G 0 Examples PLTR Returns if TTL Log Reset input is enabled 0 if disabled PLTR 1 Enables TTL Log Reset input PPM100 Partial Pressure Monitor ASRS Logging and Charts 6 33 Charting Commands LCPN x Chart MassSpec Pmin The LCPN command sets queries the value of the Chart MassSpec Y Axis Pmin The parameter x is a pressure expressed in the current units Examples LCPN Returns the value of Pmin in the current pressure units LCPN 1 3e 10 Sets Pmin to 1 3x10 in the current units LCPX x Chart MassSpec Pmax The LCPX command sets queries the value of the Chart MassSpec Y Axis Pmax The parameter x is a pressure expressed in the current units
176. he vibration source RGA filament is Contaminated damaged filament Bakeout and or degas the RGA probe unusually bright as Try alternate filament if available Identify soon as emission is and eliminate any source of turned on Requires a contamination viewport in the system Pressure is too high Reduce the pressure at the RGA head Defective power supply Contact SRS Degas will not turn on RGA filament not turned on Turn on the RGA filament before selecting DEGAS Defective RGA ECU Contact SRS RGA shuts off after Damaged filament Replace the filament degas is initiated g Badly contaminated tube Bakeout or wash the RGA probe RGA not detected PPM100 is in RS 232 Pass Check the Main Remote RS232 menu Through Mode and set RGA Pass Through to Normal Operation PPM100 Partial Pressure Monitor ASRS Basic Troubleshooting 8 11 ASRS Capacitance Manometer Symptom Capacitance Manometer Problems Possible Cause Solution Pressure reading grossly in error Gauge zero is off Gauge contaminated or damaged Excessive mechanical vibration Wrong full range CMPmax setting Poor conductance in gauge s connection to vacuum system Gauge needs to warm up Controller out of calibration or faulty gauge electronics Wrong supply voltage Zero drifted off Consult your gauge manual or manufacturer for possible solutions Remove the vibrations or mechanically isolate Check the CM Pmax value and adju
177. he Gauge Enable register to 48 decimal bits 4 5 set GSSE 14 0 Clears bit 14 of the Gauge Status Enable register RSSW i Read Process Status The RSSW query returns the value of the Process Status register The value is returned as a decimal number from 0 to 65535 The RSSW i query returns the value 0 or 1 of bit i 0 15 RSSW clears the entire register while RSSW i clears just bit i The conditions for each bit are listed below bit name set when 0 Ch1_Chg Process control channel 1 changes state 1 Ch2_Chg Process control channel 2 changes state 2 Ch3_Chg Process control channel 3 changes state 3 Ch4_Chg Process control channel 4 changes state 4 Ch5_Chg Process control channel 5 changes state 5 Ch6_Chg Process control channel 6 changes state 6 Ch7_Chg Process control channel 7 changes state 7 Ch8_Chg Process control channel 8 changes state 8 Chl1_Act Process control channel is active 9 Ch2_Act Process control channel 2 is active 10 Ch3_ Act Process control channel 3 is active 11 Ch4_Act Process control channel 4 is active 12 Ch5_Act Process control channel 5 is active 13 Ch6_Act Process control channel 6 is active 14 Ch7_Act Process control channel 7 is active 15 Ch8_Act Process control channel 8 is active The Process Control Status reflects the current process control state and indicates channels that have changed state 1 or more times since the last time the status was read The lower 8 bits
178. he Monitor Display PPM100 Partial Pressure Monitor 5 4 Process Control Why Use Process Control Fully automatic vacuum system operation is universally recognized as the most effective way to provide Reproducible process conditions increased productivity Fault protection decreased down time Unattended operation more efficient use of operators time Safe operation in the hands of reduced chances of errors and accidents inexperienced users System automation for repetitive automate repetitive events such as processes sample loadings and pump downs One of the best ways to improve process yield and reduce system failure is through automation Process automation is most important in complex systems or in systems operated by inexperienced personnel The process control capabilities of the PPM100 make it unnecessary for the operator to be physically present to operate valves and or actuate switches at the right time In fact a PPM100 with its embedded web server provides remote control capabilities from anywhere in the world The PPM100 Process Control Module is commonly used to Automatically control vacuum components such as valves heaters power supplies shutters and other process equipment Interlock process control operations with external signals that are related to time pressure temperature gauge status system status TTL logic levels and other parameters Automatically control pumpdown venting
179. he default value is 0 STB i Read Serial Poll Status The STB query returns the value of the Serial Poll Status register The value is returned as a decimal number from 0 to 255 The STB i query returns the value 0 or 1 of bit i 0 7 The conditions for each bit are listed below bit name set when 0 PCSQ An enabled bit in the Process Control Status is set 1 IERR An enabled bit in the Error Status is set 2 GERR An enabled bit in the Gauge Status is set 3 RCC PPM100 has no pending commands for the RGA 4 MAV Data is available in the GPIB output buffer 5 ESB An enabled bit in the Event Status is set 6 SRQ Service request occurs 7 IFC No PPM100 Command Execution is in progress The value of bit 6 SRQ when read using STB returns 1 if a bit is set in BOTH the Serial Poll Status register AND the Serial Poll Enable register This is independent of serial polling and GPIB service requests Bit 6 is the SRQ bit only when serial polled STB has no effect on the value of the Serial Poll Status register To clear a bit in the Serial Poll Status the condition which causes it to be set must be cleared For the PCSQ GERR IERR or ESB bits this is accomplished by clearing the enabled status bits in the Process Gauge Error or Standard Event status words by reading them Examples STB Returns the Serial Poll Status register 0 255 STB 2 Returns 0 if bit 2 GERR is clear 1 if it is set PPM100 Partial Pressure M
180. hich channel state activation or deactivation takes place during automated operation The parameters required to fully specify a rule include 1 input signal source 2 activation setpoint level polarity and hysteresis 3 delay and 4 audio alerts For channels linked to partial total pressure PPM100 Partial Pressure Monitor ASRS Process Control 5 7 ASRS measurements the user must also specify a channel state for when the RGA gauge is off or in a fault condition Process control programming is fast straight forward and designed for non programmers Rule editing menus do not require any prior programming experience and present choices in a simple format The variety of signal sources available to every channel provides process control versatility that extends beyond what has been traditionally expected from vacuum gauge controllers For example one channel could open the main gate valve every time the PP1 readings from the main chamber drop below a user specified level while the next channel controls overnight bakeouts by using the clock to power a heating envelope during off hours For More Information Consult Chapter 3 of this manual for a complete description of the Process Control menus parameters and displays used to program monitor and control the process control module See Chapter 7 for information about controlling the process channels over a remote computer interface Manual Override Manual Override i
181. his Email Configuration then re enable email 3 Link process relays to email notices by clicking their checkboxes The subject line of each email will be the channel number of the relay that changed and its new state e g Channel 1 Inactive 4 Enter a message you wish to send in the notification for both the activation and deactivation of the relay Note the message cannot be more than 50 characters long 5 Click Use This Email Configuration to store your email setup in the EWS Verify the configuration is correct by clicking Email Status PPM100 Partial Pressure Monitor 7 30 Using the EWS 6 Test that your configuration by manually changing the state of a linked relay from the front panel If you wish to clear the configuration when you begin a new process click Erase This Email Configuration To reset the email count after a number of emails have been sent disable then re enable email Note Email notification remains enabled after control is released PPM100 Partial Pressure Monitor ASRS Using the EWS 7 31 Change Relays Warning Changing relay states from a remote interface can be dangerous Make sure you understand your vacuum system and all process controls you have in place before using this feature By clicking this button you receive a web page showing the current state of all eight relays of process control You can set a relay to be active inactive or under automatic control
182. ically Touch Setup to display the Logging Setup menu a Table Figure 3 18 Table Display Column 1 The absolute time and date at which the readings were logged Columns 2 3 4 Pressure or voltage readings from the three Data Bars of the Pressure Display Use the up and down buttons to scroll through the entire log Touch Setup to display the Logging Setup menu PPM100 Partial Pressure Monitor 3 32 Logging Display Logging Setup Menu Touch Setup in either the Table or Chart Display to show the Logging Setup menu Bl current J Y Axis sos X Axis Setul p P Setup g Logging interval Disabled 00 00 02 Back P 5 16 008 10vons L reset enable Time length of log 1353 Pressure sses 7 aw span 60 Secs tagoo cooz 7 y Enabled 13 Mins be PP3 PP4 PP 12 32 09 6 61 08 3 76 06 2 05 09 123207 668 08 376 06 2 05 09 12 32 05 668 08 3 76 06 2 05 09 fi23203 668 08 376 06 235 09 a 12 32 01 6 65 08 3 78 06 2 35 09 Back P p Back By i 1231 59 6 65 08 3 78 06 2 35 09 Pressure ifd fiz31 57 665 08 378 06 207 09 f12 31 55 6 69 08 3 75 06 2 07 09 i i ars3 689 08 375 06 207 09 Tf Pressure Chart Help fi231 51 6 69 08 3 75 06 1 56 09 12 31 49 6 69 08 3 75 06 1 56 09 12 31 47 671 08 376 06 1 56 09 1231 45 6 71 08 3 76 06 1 56 09 hiz31 43 671 08 376 06 1 74 09 N3141 6 70 08 3 774 06 1 74 09
183. imes are stored in milliseconds but this timer is only accurate to within a second Examples RDEL 5 Returns the Setpoint Delay of channel 5 in ms RDEL 5 10000 Sets Setpoint Delay of channel 5 to 10 seconds 10 000 ms PPM100 Partial Pressure Monitor ASRS Process Control 6 41 RTCL d n s Activation Time The RTCL command sets queries the Activation Time of day for process channel d The parameter d selects a process channel 1 8 and is required The parameter n is the time of day in milliseconds from midnight or the string s is the time in the format 9 30PM Do not use both n and s in the command The RTCL query returns the value n in ms Examples RTCL 4 Returns the Activation Time of channel 5 in ms RTCL 4 9 30pm Sets the Activation Time of channel 4 to 9 30 PM RTCL 4 77400000 Sets the Activation Time of channel 4 to 77 400 000 ms after midnight 9 30 PM Deactivation Time RTOP d n s The RTOP command sets queries the Deactivation Time of day for process channel d The parameter d selects a process channel 1 8 and is required The parameter n is the time of day in milliseconds from midnight or the string s is the time in the format 9 30PM Do not use both n and s in the command The RTOP query returns the value n in ms Examples RTOP 4 Returns the Deactivation Time of channel 5 in ms RTOP 4 9 30pm Sets the Deactivation Time of channel 4 to 9 30 PM RTOP 4 77400000 Sets the D
184. in performance A liquid has spilled inside the product The product has been exposed to rain or water An object has fallen into the product The product has been dropped or the enclosure has been damaged e The product contains unauthorized modifications Do not substitute parts or modify the product No user serviceable parts are inside the controller All service and repair information in this manual is for the use of Authorized Service Personnel only If the product is a vacuum Gauge or RGA a Declaration of Contamination describing the condition of the product and listing the gases it has been exposed to must be submitted to Stanford Research Systems for review before a return authorization can be issued The repair and or service of products exposed to vacuum systems can only be carried out if a completed Declaration of Contamination has been submitted in advance Stanford Research Systems reserves the right to refuse acceptance of vacuum equipment where the Declaration of Contamination has not been fully or correctly completed SRS also reserves the right to deny return authorizations for any vacuum equipment that could potentially be harmful to the personnel carrying out the repair and service of the product ASRS PPM100 Partial Pressure Monitor xxii Damage Requiring Service PPM100 Partial Pressure Monitor ASRS Damage Requiring Service xxiii Declaration of Contamination of Vacuum Equipment The repair and or servic
185. ion Consult Chapter 6 of this manual for detailed information on computer interfaces RS 232 USB and GPIB programming options command set and firmware upgrade procedures controller and web server Consult Chapter 3 for information on front panel configuration of the USB interface Embedded Web Server The Embedded Web Server EWS connects the PPM100 to the Internet The EWS is a TCP IP compatible web server that resides inside the PPM100 box continuously gathering data from the instrument When connected to an ethernet network with an internet gateway the EWS can deliver PPM100 data to a user anywhere on the world wide web using a standard browser Users can monitor your vacuum system from anywhere in the world E mail notification can notify a client list of potential or actual system problems The EWS provides the most PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 11 ASRS convenient way to access PPM100 data from a computer without writing custom serial or GPIB based software The EWS can be configured to allow access to process control functions so that a user can control their vacuum process from anywhere in the world Use the web interface to monitor your vacuum system from your office or from home without having to pay periodic visits to your lab while waiting for your system to pump down Use the control capabilities to turn heating jackets on off or activate deactivate valves or pumps and gauges from the co
186. ion of defective sample manipulators gates or valves Because of its ability not only to detect and alert of a leak problem but also to help with its correction the RGA is the tool of choice in many high throughput vacuum manufacturing facilities The RGA is invaluable for the detection of virtual leaks Small trapped volumes of gases such as air water and machining oils within the inner surfaces of a vacuum system are virtually impossible to detect without using an RGA to detect AND identify the gases being released into the vacuum RGAs have been used for many years as the preferred sensors for ultrahigh sensitivity helium leak detectors with leak rate capabilities extending into the 10 std cc sec as required for extreme vacuum applications These leak detectors rely on an adsorption desorption method to first preconcentrate the leaking gas on a cold surface and then release the gas quickly by allowing the surface temperature to rise Pressure t 17 34 Pp2 3 34 12 4 amu betel 3 34 12 T T T l 13 Helium i E E E i Menu Monitor Process Chart Help Figure 1 27 A common Pressure Display while leak testing The top data bar provides a leak trend graph the middle bar displays the actual leak rate and the bottom bar provides a bargraph to visualize leaks peo ti PPM100 Partial Pressure Monitor 1 30 MassSpec Display PPM100 Partial Pressure Monitor ASRS Proper Grounding 1
187. ion should be applied to the towel not the surface of the touchscreen Fluid may seep behind the panel if it is not cleaned properly Perform the above procedure while the unit is off or use the Clean Touchscreen menu described in Chapter 3 to temporarily desensitize the touchscreen of a working instrument Process Control LEDs The green Process Control LEDs are linked to the eight 8 process control channels Each LED is associated with a single process control channel and turns on to indicate when its channel output is ACTIVE The LEDs are broken into two groups of four to facilitate visualization and channel identification from across the room Process Control channel status information can be quickly accessed on the LCD display by touching the Process QuickKey at any time However LEDs make it possible to view channel activities that might otherwise go undetected and have serious consequences on the vacuum system PPM100 Partial Pressure Monitor 2 16 PPM100 Basics Back Panel The back panel of the PPM100 includes all the electrical connectors required to 1 power and ground the controller 2 power its gauges 3 read pressure and analog signals 4 connect the process control channels relays and DIGITAL I O and remote TTL control pins and 5 interface to a host computer and or the web WARNING e Read the entire Safety and Preparation for Use section of this manual before using the PPM100 e Read Ch
188. ions operator errors e power losses Typical unsafe situations that must be anticipated and accounted for in logic designs include e Gauges and RGAs used as input sources for process control channels can turn off in the middle of a process due to overpressure electronics failure or operator error e Input Analog I O ports used as channel sources can overload or be mistakenly switched into outputs in the middle of a process e Complete power loss can result in total system shutdown A properly designed process control setup must respond to all of the above conditions by immediately shifting the system into a fail safe state A carefully wired and programmed fail safe state should be available to protect the equipment and operators from danger under any one of the potentially dangerous events described above Fail Safe logic must be very carefully planned designed and tested before reliance on process automation is allowed The following guidelines MUST be considered during fail safe logic design e Channels linked to gauge readings include the Gauge Off DAC State rule This must be specified to provide the proper fail safe response in case the RGA or gauge shuts down and no pressure readings are available to the channel e Channels linked to analog input readings AN1 4 and CM1 4 also include the Gauge Off DAC State rule This must be specified to provide the proper fail safe response in case the analog port is mi
189. it or activate the Clean Touchscreen Main menu then Screen menu while wiping the screen s surface ASRS PPM100 Partial Pressure Monitor 8 14 Damage Requiring Service Damage Requiring Service Caution Do not use this product if it has unauthorized modifications Unauthorized modifications may result in fire electric shock and other hazards Do not use accessories not recommended in this manual as they may be hazardous Note Within this section the word product specifically refers to the PPM100 Partial Pressure Monitor any of its accessories or any SRS manufactured vacuum gauge Contact the factory for instructions on how to return the instrument for authorized service and adjustment Service of this product by Authorized Service Personnel only may be required under any of the following conditions e Any cable or plug is damaged e The product does not operate properly even after strictly following the operating instructions e The product exhibits a distinct change in performance e A liquid has spilled inside the product e The product has been exposed to rain or water e An object has fallen into the product e The product has been dropped or the enclosure has been damaged e The product contains unauthorized modifications Do not substitute parts or modify the product No user serviceable parts are inside the controller All service and repair information in this manual is for the use of Authorized Service Pe
190. ith your outlets was not included with your unit The connection of LINE power to the box is clearly indicated by a lighted LINE LED red located below the POWER button at the lower left corner of the front panel Figure 1 1 LINE LED below the POWER button indicates that Line Power is connected WARNING Do not switch on the power yet Wait until instructed to do so later Make sure that the green POWER LED is off PPM100 Partial Pressure Monitor ASRS Installing the PPM100 1 5 ASRS Grounding Connect a heavy duty ground wire 12 AWG or larger from the CHASSIS GND lug on the back of the PPM100 directly to your facility earth ground This will provide an earth ground for the PPM100 in case the power cable is not in place Do not connect the CHASSIS GND lug to the vacuum system or other electrical component Connect it directly to the facility grounding system such as a grounded outlet box or a grounded copper water supply line Do not rely on small metal water lines to ground a component Get professional help from an experienced electrician if necessary waRNINGs e Connecting the power cord to a properly grounded outlet is necessary but not sufficient with this or any similar high voltage producing vacuum equipment e Grounding the PPM100 does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground e Perform a Proper Grounding Test on your vacuum system
191. its manufacturer directly if you are uncertain about the power requirements of your gauges Consult Stanford Research systems if uncertain about the compatibility of your CM s with the PPM100 controller Identify the three pins assigned to the 15 Vdc power connection typically labeled 15 VDC 15 VDC and Power Return and use three wires to connect the gauge to the auxiliary 15 VDC 3 position terminal block located on the back of the controller SRS STAMFORD RESEARCH SYSTEMS MADE IN USA t 2 n m r i 4 process couma 9 QI 2 T DIGITAL G i ie L INAY e 2 Fi ia Figure 1 4 Capacitance Manometer Connection Ports 1 Signal Four ANALOG I O BNC Ports 2 Power 3 position terminal block PPM100 Partial Pressure Monitor SRS Connecting a Capacitance Manometer 1 11 Recommendation Heated CMs often include additional pin connections assigned to heater status signals such as 1 At Temperature Status At Temperature Status Return pair and 2 Heater Failure Status Heater Failure Status Return pair In many cases these pin pairs act as semiconductor switches and their contact signals can be interfaced to the Process Control ports and used to trigger events in response to heater failure This can be used to assure the reliability of your CM gauges at all times and to protect delicate and expensive components sensitive to inaccurate pressure readings Consult your gauge manual for avail
192. ity or replace cable FILAMENT OFF RGA Filament is turned off Turn the RGA Filament on using the FILAMENT button on the front panel Or Set lonization Source External in the RGA Setup menu of the PPM100 if an external ion source is being used TTL LOCKOUT The RGA filament is turned off by the RGA_Fil_Lockout pin of the TTL Remote Control Module The filament remains off as long as this pin is held LOW and RGA_Remote_Enable is LOW PPM100 Partial Pressure Monitor Set the RGA_Fil_Lockout pin high or disable Remote Control set RGA_Remote_Enable High ASRS Basic Troubleshooting 8 9 Basic Troubleshooting This section documents symptoms causes and possible solutions for some of the common problems encountered during the operation of a PPM100 controller Note The problems listed below DO NOT GENERATE Error Messages Input Power Power Problems Symptom Possible Cause Solution LINE LED is off RGA No AC power available to the controller Defective internal power supply module RGA Check your connection to the AC power outlet Look for defective power outlet defective power cord or power cord not connected If AC power is available to the controller but the LED is still off contact SRS Symptom Pressure reading is very inaccurate Possible Cause Electrical leakage in the RGA feedthrough Defective electrometer circuit El
193. ivate When High means the channel is ACTIVE when the TTL input level is HIGH and INACTIVE when LOW Activate When Low means the channel is ACTIVE when the TTL input level is LOW and INACTIVE when HIGH PPM100 Partial Pressure Monitor ASRS Process Control Display 3 43 Edit Messages Menu Access the Edit Messages menu from the Process Control Display touch a Channel Data Box and choose Edit Messages Process Rules ROUGH VALVE Description 1 Agt GATE VALVE 1 OPEN Active GATE VALVE Active Message AgCI OPEN Inactive Message Agt CLOSED Manual Edit rules Edit Messages 2g Back Fy i Pressure Process Help Figure 3 23 Edit Channel Messages Menu Each process channel has its own description and messages shown in the Channel Data Boxes The messages are updated whenever the channel changes state Description Enter a Channel Description The PPM100 assigns a Description text string to each process control channel The Description is displayed at the top of each Channel Data Box next to the channel Assign Description to all channels used for process control Descriptions such as heater or gate valve make it easier to visualize and control a system and minimize the chances of errors Recommendations Combine Descriptions and Active Inactive Messages to provide useful information about the status of your system For example for a channel controlling a gate valv
194. l 8 opto isolated TTL channels Fil on off Degas on off Fil lockout Control keypad lockout data logging time reset touchscreen enable disable remote enable disable PPM100 Partial Pressure Monitor xviii Commands Index of Commands Important Always use the GPMU command at the start of a program to ensure that the desired units are in effect Use VERB 0 to set the RS 232 serial interface to terse mode for computer programs Use VERB 1 to use verbose mode for serial console communications Variables i j d n p X s t integers real number text strings Partial Pressure and Analog Input Measurement GPMU n s GPBA n p GPDF n i GDAT p GDTX p LRAT p LRCE n GDES p s GSTA p GSTT p OAQU Pressure Units Data Bar Assign Display Format Read Source Data Read Source Data With Units Read Leak Rate Leak Rate Coefficient Gas Name Port Location Source Status Source Status Time Read Monitor Alarm Status PPM Monitor Setup PCME p i MAME 7 p n GDES p s SMCE p x SVGL p i NFTM p n HVTM p i OAEN p i OALH p x OALL p x OABP 2 p i Analog Port Setup GADM n i GDAS n i GCMM n i GDAV Dn x CMPX n x PPM Measurement Enable PPM Mass Gas Name Port Location Gas Correction Factor Set Gas via Library PPM Scan Rate PPM Detect
195. l User 5 V IN 21 TTL_IN_1 TTL Input Signal for Channel 1 Active LOW 22 TTL_IN_2 TTL Input Signal for Channel 2 Active LOW 23 TTL_IN_3 TTL Input Signal for Channel 3 Active LOW 24 TTL_IN_4 TTL Input Signal for Channel 4 Active LOW 25 TTL_IN_5 TTL Input Signal for Channel 5 Active LOW 26 TTL_IN_6 TTL Input Signal for Channel 6 Active LOW 27 TTL_IN_7 TTL Input Signal for Channel 7 Active LOW 28 TTL_IN_8 TTL Input Signal for Channel 8 Active LOW Process Control TTL OUT Note J HIGH to LOW T LOW to HIGH transition 29 unused 30 PPM100 Ground 31 PPM100 Ground 32 COM_EMTR_REF External User Ground 33 COM_COLTR_PULLUP External User 5 V IN 34 TTL_OUT_1 TTL OUT for Channel 1 LOW ACTIVE 35 TTL_OUT_2 TTL OUT for Channel 2 LOW ACTIVE 36 TTL_OUT_3 TTL OUT for Channel 3 LOW ACTIVE 37 TTL_OUT_4 TTL OUT for Channel 4 LOW ACTIVE Process Control TTL OUT These outputs are opto isolated from the PPM100 For isolated operation of ALL outputs connect pin 33 to the external 5 V supply and pin 32 to the external ground For non isolated operation of ALL outputs connect pin 33 to PPM100 Vcc pin 1 or 15 and pin 32 to PPM100 Ground pin 30 or 31 PPM100 Partial Pressure Monitor xvi Overview Process Control TTL IN These inputs are opto isolated from the PPM100 For isolated operation of ALL Process Control inputs connect pins 2 and 20 to the external 5 V supp
196. le the PP1 Data Bar above displays partial pressure readings from the RGA in Torr corresponding to the single mass peak at 2 amu and assumed to be originating from the single gas hydrogen Touch the ID box to select a different data source i e another partial pressure measurement a CM pressure or an analog signal for that Data Bar To display capacitance manometer readings identify the Analog I O port 1 4 connection and choose the appropriate CM port CM1 4 For example choose CM1 for a capacitance manometer connected to the Analog I O 1 port PPM100 Partial Pressure Monitor 1 22 Pressure Display Figure 1 14 Select a source for the top data bar Note The analog and pressure output display will show OVERLOAD if the Pressure Output signal exceeds 12 V Data Display Options The Data area of the Data Bar is where the readings are displayed Touch inside the Data box to choose a display format Eight options are available 16 00 2 amu Trend graph Torr Hydrogen Silent leak trend 4 amu Audio leak trend 0 Torr Helium Auto scaling bar graph 18 amu Full range bar graph 7 Torr Water Status information Leak rate art Help Figure 1 15 Select a display option for the middle data bar Big Numbers 2 amu Torr 6 Hydrogen Figure 1 16 Big Numbers data display Best display for accurate easy to view pressure readings Easily visible across the room PPM100 Partial Pressure Monitor SR
197. lectron emission The filament current ramps up over a few seconds minimizing pressure bursts in the vacuum system and emission current overshoot in the RGA head As soon as full emission current is established partial pressures from the RGA Head start to be displayed on all enabled PP1 PP8 Partial Pressure Boxes of the Monitor and Pressure Display Screens and all related process control and alarm activation is enabled PPM100 Partial Pressure Monitor ASRS Pressure Measurement 1 19 Figure 1 9 Front panel controls FILAMENT power button LED and E MULTIPLIER power button LED A WAIT message is displayed in the Partial Pressure Data Box while electron emission current is being established and all pressure readings are ignored until full and stable emission current is detected in the SRS RGA Head No process control or alarm actions are performed based on ionization gauge readings during the time the emission current is being set Partial Pressure readings in the PP1 PP8 data boxes are continuously updated in a sequential and circular fashion and at an update rate determined by the collective Scan Rate settings of all the single mass measurements enabled Monitor PP2 4 4 95 09 1 03 07 Alarm High Hudrogen Heliurn Water Nitrogen PPS 32 PP6 40 PP 43 PP8 44 7 70 07 5 86 08 2 90 09 7 02 09 Alarm High Alarm Low Oxugen Argon Pump oil c02 2g E E Back P 1 Pressure AnaloglO MassSpec Pressure Help Figu
198. letely configured using the instructions of the previous section For simplicity the front panel is assumed to be in Monitor Display with factory default gas settings Only manual operation of the gauges is discussed Pressure readings may be displayed in various formats in several different units and are continuously updated When logging is enabled data from the SRS RGA CM gauges and analog inputs are stored in an internal data log at a user programmable rate The data log can be displayed in either table or chart P vs time formats Warm up times To minimize temperature induced drift in partial pressure readings warm up times must include operation of the SRS RGA at the selected emission current for at least thirty minutes PPM100 warm up times of at least twenty 20 minutes are recommended for stable analog voltage readings Partial Pressure Measurements PP1 PP8 WARNING e Do not operate the SRS RGA in the presence of explosive flammable or combustible gases e Do not operate the SRS RGA at pressures gt 10 Torr since that will significantly affect the filament s lifetime and will deliver useless results In order to perform partial pressure measurements with a residual gas analyzer its filament must first be turned on For manual operation press the FILAMENT power button located on the PPM100 front panel The green FILAMENT LED to the right of the FILAMENT button lights up to indicate the presence of e
199. list Backlight Pressure M current 12 12 20 E jack P9 Process Pressure Help Monitor Display 10volts Monitor PP2 4 t PP1 2 PP3 1B PP4 28 6 09 08 4 95 09 1 03 07 3 86 06 Alarm High Hydrogen Helium Water Nitrogen 1e 009 a tovorts SSec div Span 60 Secs Logoo 00 02 PPS 32 PP6 40 PP 43 PP8 44 7 70 07 5 86 08 2 90 09 7 02 09 Alarm High Alarm Low Process Control Display Oxugen Argon Pump oil co2 Process FORE VALVE 2 OPEN Inactive Manual Channel 6 6 xt 13 21 GATE VALVE 3 FORE STATUS 4 CLOSED OK Inactive Inactive Auto Manual Channel 7 iChannel 6 8 ROUGH VALVE 4 CLOSED Inactive Manual VENT VALVE 5 VENTING Beg E by Back By i Pressure AnaloglO MassSpec Pressure Help MassSpec Display Monitor MassSpec Analog I O Display AnaloglO w 11 54 1217 Off ASRS Back Py Monitor Help M Uh 1OAMU 7 diu Back P Monitor ANA AN AN3 ANg E E Scan rate 2 FC 4 gt Inactive Inactive Inactive Inactive 0 257 V 0 274 V 8 735 v 4 450 v y Axis FP Manual _ Manual j Manual j Manual Temp Dose Valve CM 10Torr Argon buff Cursor 133 2g Back P a ATE eut j Mea out AEE et a 18 P
200. ly Pull inputs to external ground for low inputs For non isolated operation of ALL Process Control inputs connect pins 2 and 20 to PPM100 Vcc pin 1 or 15 and pull inputs to PPM100 Ground pin 30 or 31 for low inputs Remote Control TTL IN These inputs are opto isolated from the PPM100 For isolated operation of ALL Remote Control inputs connect pins 2 and 20 to the external 5 V supply Pull inputs to external ground for low inputs For non isolated operation of ALL Remote Control inputs connect pins 2 and 20 to PPM100 Vcc pin 1 or 15 and pull inputs to PPM100 Ground pin 30 or 31 for low inputs RGA RS 232 Connector The PPM100 includes a male DB9 connector for serial communication RS 232 DTE with the RGA Head Pin Signal unused Receive data from RGA Transmit data to RGA unused ground unused handshake from PPM handshake from RGA unused O OIN OD a AJ VJIN gt Figure v The PPM100 DB9 RGA RS 232 connector HOST RS 232 Connector The PPM100 includes a female DB9 connector for serial communication RS 232 DCE with a host PC computer Pin Signal l unused Transmit data to Host Receive data from Host unused ground unused handshake from Host handshake from PPM unused Figure vi The PPM100 DB9 RGA RS 232 connector 1 2 3 4 5 6 7 8 o PPM100 Partial Pressure Monitor ASRS Specifications xvii Specifications Gener
201. m Beep mode for PP1 to off PPM100 Partial Pressure Monitor 6 24 Analog IO Setup Analog I O Setup Commands GADM n i GDAS n i GCMM n i 1 0 Mode The GADM command sets queries the I O Mode of analog port n The parameter n 1 4 selects AN1 AN4 and is required The parameter i selects ADC Input 0 or DAC Output 1 Examples GADM 4 Returns the AN4 I O Mode i GADM 4 1 Sets AN4 into DAC Output mode DAC Source The GDAS command sets queries the DAC Source for analog port n The parameter n 1 4 selects AN1 AN4 and is required The parameter i selects Manual 0 or PP1 PP8 1 8 Examples GDAS 1 Returns the AN1 DAC Source i GDAS 1 2 Sets the AN1 DAC Source to PP2 CM Mode The GCMM command sets queries the CM Mode for analog port n The parameter n 1 4 selects AN1 AN4 and is required The parameter i selects Off 0 Linear 1 or Log 2 Examples GCMM 1 Returns the CM Mode for AN1 GCMM 1 1 Sets the CM Mode for ANI to Linear GDAV n x CMPX n x Output Value The GDAV command sets queries the DAC output value for analog port n This is the output voltage when the analog port is a DAC Output and the DAC Source is Manual The parameter n 1 4 selects ANI AN4 and is required The parameter x is an output voltage in Volts Examples GDAV 1 Returns the AN1 DAC output value in Volts GDAV 1 2 5 Sets the AN1 DAC output value to 2 5 V CM PMax The
202. manometer gauge PP1 8 or CM1 4 The Pressure Setpoint is the pressure threshold at which the channel becomes Active or Inactive Set the Setpoint Activation to choose Active above or below this threshold The Setpoint determines the exact level at which channel switching occurs Use the channel Delay to ignore acceptable pressure transients Voltage Setpoint Enter the channel Voltage Setpoint Volts when the Channel Source is an analog input AD1 4 The Voltage Setpoint is the voltage threshold at which the channel becomes Active or Inactive Set the Setpoint Activation to choose Active above or below this threshold The Setpoint determines the exact levels at which channel switching occurs Use the Setpoint Delay to ignore transient voltages Setpoint Activation Select the Setpoint Activation for the channel Above or Below Above The channel becomes ACTIVE when the pressure or voltage goes ABOVE the Setpoint The channel becomes INACTIVE when the pressure goes BELOW Setpoint 1 Hysteresis_ 100 or the input voltage goes BELOW Setpoint Hysteresis_V Below The channel becomes ACTIVE when the pressure or voltage goes BELOW the Setpoint The channel becomes INACTIVE when the pressure goes ABOVE Setpoint x 1 Hysteresis_ 100 or the input voltage goes ABOVE Setpoint Hysteresis_V Percent Hysteresis Enter the Percent Hysteresis for the channel 0 to 999 Percent Hysteresis applies when the chan
203. mass spectrum i e a single mass is selected to track each individual component s partial pressure For this reason partial pressure measurements are also often called single mass measurements in this manual All partial pressure readings are performed within the RGA Head and transmitted back to the PPM100 for storage display process control and alarm activation The PPM100 simply queries the RGA for the specified single mass measurements and displays the data on its front panel For detailed information on how gas specific partial pressure measurements are performed by the RGA Head consult the SRS RGA Operating Manual at this time PPM100 has a menu driven user interface All operating parameters are grouped into menus Consult Chapter 3 of this manual for detailed menu information Help Help for any menu button is available on screen by touching the Help QuickKey and then the menu button PPM100 is preconfigured at the factory with partial pressure setup parameters for eight 8 very common residual gas components hydrogen helium water nitrogen oxygen argon pump oil and carbon dioxide PP1 through PP8 respectively In order to enter new Partial Pressure setup parameters for component gases not included in the factory default list the user must follow the simple Partial Pressure setup procedure described below This procedure must be repeated for every new partial pressure measurement programmed into the controller
204. max are displayed above the graph Pmin and Vmin below the graph The right edge is the most recent data point and the left edge is a Time Range ago This resembles a chart recorder with new data appearing at the right edge The X axis scale span and logging interval are shown at the very bottom of the screen Touch Setup to display the Logging Setup menu Touch Y Axis or X Axis to change the chart scales and time scale Moving the Cursor To move the cursor first touch the cursor readout above the graph it highlights with a box Touch the right half of the chart to move the cursor to the right the left half to move it to the left Touch close to the center to move slowly farther from center to move quickly Touch and hold to move continuously PPM100 Partial Pressure Monitor ASRS Logging Display 3 31 Changing the Graph Table ASRS The chart scale parameters can be modified within the chart display To adjust the graph scales first touch the displayed scale parameter it highlights with a box For Pmax Pmin Vmax and Vmin touch the upper half of the chart to adjust the parameter up the lower half to adjust the parameter down For the Time Range touch the left half of the chart to increase the range the right half to decrease the range In both cases touch close to the center to make small changes farther from center for large changes Touch Y Axis or X Axis to change the chart scales and time range numer
205. may be different for each port require the p parameter These values must be queried separately for each port All numeric variables may be expressed in integer floating point or exponential formats i e the number five can be either 5 5 0 or 0 5E1 Strings are sent as a sequence of ASCII characters Pressure Units The entire PPM100 operates with a SINGLE units system All commands that query or set pressure parameters use the global units system of the PPM100 The units may be changed in the Main Menu or with the GPMU command For example if the PPM100 units are Torr all commands that query pressures will return values in Torr All commands that set pressures must send values in Torr PPM100 Partial Pressure Monitor 6 16 Remote Programming All pressure parameters have minimum and maximum allowed values These values are converted to the current units and may not be exceeded in a command These limits are displayed in the entry screen when entering new values from the front panel WARNING Always use the GPMU command at the start of a program to ensure that the desired units are in effect PPM100 Partial Pressure Monitor ASRS Partial Pressure Analog Measurement 6 17 Partial Pressure and Analog Input Measurement Commands GPMU 7 n s Pressure Units The GPMU command sets queries the system pressure units The parameter n selects the units system below or use string s micron bar etc Do
206. mfort of your office For More Information The individual functions of the EWS are described in detail in Chapter 7 of this manual Consult Chapter 3 for information on menu items related to configuration of the web interface Process Control Eight channels of process control are a standard feature in the PPM100 controller Each channel has a relay closure output and corresponding opto isolated TTL output signal and may be linked to a variety of input sources with intuitive user programmable rules Each channel can be linked to any partial pressure or analog input the system clock gauge status or a TTL input trigger signal Channel Rules apply in AUTO mode and include all variables required for full process automation including setpoint level polarity and hysteresis delay settings and audio and front panel notification Process Control also includes several opto isolated TTL level inputs used to remotely control filament on off degas on off Electron Multiplier On Off keypad lockout datalogging reset and touchscreen enable disable functions Programmable audio alarms and on screen text messaging alert the user when process control activity takes place During process control the status of all eight channels can be monitored directly and in real time on the LCD display Eight dedicated LEDs located below the screen provide across the room indication of channel status Manual override is available for all channels making it po
207. most basic operation of the SRS RGA as a quadrupole mass spectrometer During analog scanning the quadrupole mass spectrometer is stepped at fixed mass increments 0 1 amu through a prespecified mass range The ion current is measured after each mass increment step and transmitted to the PPM100 over RS 232 Analog scanning simplifies the detection of mass peaks for individual component gases and provides a direct view of the peak shapes and resolution of the instrument WARNING No single mass partial pressure readings take place while the PPM100 is in the MassSpec Display As a result all process control channels must be switched to a safe manual state before the MassSpec Display can be accessed Partial pressure readings resume when the MassSpec Display is exited The MassSpec Display Screen consists of four main areas 1 QuickKeys Five QuickKeys located on the left side of the MassSpec Display provide fast access to important analog scan settings Y Axis scaling Cursor Position Initial Scan Mass Final Scan Mass and Back button Use the Back button to exit this display PPM100 Partial Pressure Monitor 3 28 MassSpec Display 2 Info Box A small rectangular box located above the mass spectrum graph area displays mass partial pressure reading pairs for mass peaks at the current cursor position and also provides relevant RGA status information 3 Cursor and AutoScale Buttons Press to autoscale the Y axis based on
208. n sent over the interface are shown in normal text Characters which are waiting to be sent are shown with a gray background GPIB Submenu Display the GPIB IEEE 488 configuration menu This menu also includes a Rx Tx display button which shows receive transmit activity on the GPIB port Address Set the PPM100 Device Address Before attempting to communicate with the PPM100 over the GPIB interface the PPM100 s device address must be set GPIB Queue Display the GPIB transmit and receive buffers The PPM100 buffers the most recent characters received and transmitted over the interface The Queue display shows the interface history PPM100 Partial Pressure Monitor ASRS Remote Menu 3 55 ASRS The Queue display may slow down communications and should be displayed only when testing or debugging a host program Press any QuickKey other than Help to exit from this display The upper half of the Remote Queue display is the Receive Queue These are the most recent characters which have been received by the PPM100 displayed in UPPER case Commands which have already been executed are shown in normal text Commands which have not yet been executed are shown with a gray background Command errors are shown in inverse text The lower half of the Remote Queue display is the Transmit Queue These are the most recent characters which have been placed in the output buffer Characters which have already been sent over the int
209. nactive Back P i Process Help PP1 Pressure setpoint 13 1 00 Torr Setpoint activation 8 Above Edit rules Edit Messages Figure 3 22 Edit Rules Menu Each process channel has its own rules These rules determine the channel state when the channel is in Auto mode Linked To A process control channel can be linked to e any partial pressure PP1 8 or capacitance manometer CM1 4 specify the pressure setpoint hysteresis delay and polarity e any analog input port AN1 4 specify the voltage setpoint hysteresis delay and polarity e the partial pressure monitor alarm notification system ALARM specify the delay e the system clock CLOCK specify the activation and deactivation times e its corresponding TTL channel input TTL PIN specify the polarity and delay For example select PP1 to link the channel state to the PP1 partial pressure readings from the SRS RGA Head Select ALARM to link a process control channel to the alarm notification system This process control channel becomes active if ANY partial pressure monitor alarm is tripped Use this as a fail safe rule to activate the channel if any partial pressure goes beyond acceptable limits PPM100 Partial Pressure Monitor 3 40 Process Control Display Pressure Setpoint Enter the channel Pressure Setpoint Torr when the Channel Source is an RGA partial pressure measurement or capacitance
210. nal multiplexing For example it is not unusual to multiplex a single input temperature reader between two temperature sensors e Sound alarms on off e Start stop processes In order to prevent costly mistakes label every cable connected to the process control relays with an unambiguous name Include the pin pin label and channel in case the cable comes loose and needs to be reattached to the controller PPM100 Partial Pressure Monitor ASRS Process Control 5 15 ASRS e Do not exceed the relay ratings 5 A 250 VAC 30 VDC resistive load during operation e Use transient absorbers when connecting inductive loads such as motors or solenoids to the process relays It may be necessary in some cases to use an external power relay driven by a process relay to switch a device on and off e Ensure that all process control channels are under manual control and in the desired state prior to connecting a wired terminal block plug into the process control board s receptacle e During a power shutdown all relays are de energized and switch to their INACTIVE state i e Common and Inactive pins connected This must be carefully considered during the design of your process control setup to assure proper fail safe operation during and after power losses Channel Linking Process control relays can be linked together to create powerful system logic and control complicated functions As an example consider the implementation of
211. nalog I O ports as outputs to control auxiliary vacuum equipment such as heaters actuators ion sources programmable logic controllers and throttle controllers For More Information Consult Chapter 4 of this manual for a complete description of the ANALOG I O capabilities of the PPM100 including specifications connections possible configurations and capacitance manometer operation Chapter 3 describes in detail the menu based user interface including all menus required to configure the PPM100 for proper operation of its ANALOG I O ports Capacitance Manometers CM1 4 The standard PPM100 controller can display pressure as measured from standard capacitance manometers CMs Up to four independent CM readings can be monitored simultaneously using the four ANALOG I O ports located on the back of the controller Pressure readings are updated at 2 Hz The PPM100 precisely measures the 0 to 10 Vdc linear output signal from the CM to determine pressure Direct pressure readings are available only if the full scale pressure Pmax of the gauge is entered into the controller and CM Display is set to Linear Full scale ranges up to 1000 Torr are supported by the controller For added convenience the PPM100 also supplies an auxiliary AUX 15 V 100 mA power output This is usually sufficient to power up a pair of standard i e non heated capacitance manometers ASRS PPM100 Partial Pressure Monitor 2 6 PPM100 Basics For critical
212. ncorrect rule Review the Channel Rules Check the channel connections Reduce the Delay setting Reduce the Hysteresis setting Exit the MassSpec Display Check the Channel Rules Setpoint Hysteresis and Delay settings Relay closure does the opposite of what is expected Relay contact opens and closes intermittently around the setpoint Wrong connection Hysteresis percentage setting is too small Check the relay connection Each SPDT relay has three connection pins make sure you are connected to the right ones Increase the Hysteresis Percentage setting Check for excessive noise in the input signal Filter if necessary Analog I O Symptom The analog output does not follow the log of the pressure of the gauge Analog reading is OVERLOAD Analog I O Problems Possible Cause The Analog I O port is not configured properly The input signal exceeds 12V range PPM100 Partial Pressure Monitor Solution Make sure the analog I O port is configured as an Output and linked to the right gauge Reduce the input voltage until it is between 12V and 12V ASRS Maintenance 8 13 Maintenance SRS RGA The SRS RGA requires routine maintenance and occasional troubleshooting For information consult the Maintenance chapter of the RGA s Operating Manual and Programming Reference PPM100 Controller IMPORTANT The PPM100 controller box does not have a
213. nd Graph display Best display for leak detection applications see Leak Testing with the PPM100 in Chapter 1 Use this display while leak testing components attached to the vacuum system Use leak trend graphs to detect leaks as partial pressure transients while spraying the vacuum system components with a tracer gas such as helium or argon A stamp sized Signal vs time plot of recent partial pressures for the selected mass is displayed A small instantaneous partial pressure reading is also included next to the plot When Audio Leak Trend is selected an audio signal whose frequency is proportional to the partial pressure readings provides a means to hear pressure transients eliminating the need to look at the front panel display while searching for leaks To provide optimum data acquisition rates at the selected mass all other partial pressure readings and displays are disabled while in this display mode The other Data Bars will show LEAKTREND until a non LeakTrend display is chosen for this Data Bar Warning All process control channels must be in manual mode to be able to access the Silent Leak Test Display mode PPM100 Partial Pressure Monitor ASRS Pressure Display 3 13 Auto Scaling Bar Graph Figure 3 8 Auto Scaling Bar graph Best display to detect instantaneous changes in pressure readings Three decade logarithmic bargraph display scaled about the current reading Often used during leak
214. nd this button is re drawn as Release Control Only one user can have control of the EWS at a time The log on prompt depends upon the type of security selected on the PPM100 If you have selected password or both password and IP checking security you will have to enter the password If you are just using IP checking for security no password is required In both cases you will need to enter a controller name for identification purposes If someone is already controlling the instrument you will be informed of their log on name their IP address and how long it has been since that controller performed a control function their idle time If the current controller has been idle for hours it is likely they simply forgot to logout by clicking Release Control For this reason you are allowed to take control from an idle user provided you know the password and or have a trusted IP Release Control Click this button to logoff as the controller of the instrument Note Email notification will remain enabled after control is released Get Chart Type This function provides a way to get pressure or voltage versus time graphs over the world wide web You first select the chart type from a drop down list You can select to plot a partial pressure PP1 8 a capacitance manometer pressure CM1 4 or a voltage AN1 4 versus time Clicking on the button Get Chart Type produces the chart The time span of the chart depends upon the ch
215. ne to exit help In This Chapter QuickKeys 3 5 Numeric Entry 3 8 Pressure QuickKey 3 5 Text Entry 3 8 Menu QuickKey 3 5 Action 3 8 Monitor QuickKey 3 5 Time Date 3 9 AnaloglO QuickKey 3 6 Text Display 3 9 Bore ane oy Pressure Display 3 10 Process QuickKey 3 6 ID Box 3410 Table Chart QuickKey 3 6 Daa Box 3614 Auto Scale QuickKey 3 6 Big Numbers 3 14 History QuickKey 3 7 Tend Graph 342 ee ef Silent Audio Leak Trend 3 12 Back to Previous QuickKey 3 7 Auto Scaling Bar Graph 5 Hey a Full Range Bar Graph 3 13 Menu Buttons 3 8 Leak Rate 3 13 Submenu 3 8 Status Information 3 13 Choose multiple choices 3 8 Info Box 3 14 Choose two choices 3 8 Pressure Units 3 14 ASRS PPM100 Partial Pressure Monitor 3 2 Displays and Menus Monitor Display 3 15 Time Length of Log 3 33 Partial Pressure Data Box 3 15 Chart Y Axis Menu 3 34 Monitor Setup Menu Pmax Pmin 3 34 Partial Pressure Setup Parameters 3 16 Vmax Vmin 3 34 PP1 PP8 Measurement 3 16 Autoscale 3 34 PECAT EA Mapo am ae Chart X Axis Menu 3 35 PP1 PP8 Correction Factor 3 17 Chart Time Range 3 35 KEI PES Name S Zoom to Cursor 3 35 Set via library 3 17 Scale to Full 3 35 PP1 PP8 Scan Rate 3 18 PP1 PP8 Detector 3 18 Process Control Display 3 36 Alarm 3 18 About Process Control 3 36 Active vs Inactive 3 37 alam erat s an Process Control History 3 37 be rS ali Sells g Process Control Overview 3 37 a pelle Ba os Channel Data Box 3 38 PE ree Aarni ever ow 7 Auto Manual Channel C
216. nection by the user e I O Mode Each port can be individually configured as input ADC Input manual output Manual out or PP1 PP8 linked output PP1 8 out Touch an Analog Signal Data Box to display its Setup menu Monitor AnalogIO Setup AN1 4 and edit its measurement setup parameters Capacitance Manometer Data Box CM3 8 74 Torr CM 10Torr Linear ASRS When properly configured each Capacitance Manometer Data Box bottom row CM1 4 can display a total pressure calculated from the analog voltage measured at the corresponding ANALOG I O port For example CM1 can be used to display CM Pressures calculated from the voltages measured at the AN1 Analog Port Capacitance manometers must be connected to Analog I O ports configured as inputs For direct pressure readings program the full scale pressure Pmax and set CM Display to Linear Each CM Data Box contains four lines of information top to bottom PPM100 Partial Pressure Monitor 3 22 Analog I O Display e ID Label CM1 CM4 For example the CM1 Data Box can display pressures calculated from the input voltage levels measured at the ANALOG I O port labeled 1 on the back plane of the PPM100 e Pressure reading DISPLAY OFF DAC OUTPUT CM pressures are displayed if the analog port is set to ADC input Pmax is properly programmed and CM Display is set to Linear or Log DISPLAY OFF replaces the pressure readings if CM Display is set to OFF DAC OUTPUT is displayed if th
217. nel is linked to a pressure reading PP1 8 or CM1 4 See Setpoint Activation above for more information PPM100 Partial Pressure Monitor ASRS Process Control Display 3 41 Hysteresis allows the process control channel to ignore normal slow variations or drift in the readings Use the Delay setting to ignore transient events Voltage Hysteresis Enter the Voltage Hysteresis for the channel 0 12V Voltage Hysteresis applies when the channel is linked to an analog input AN1 4 See Setpoint Activation above for more information Hysteresis allows the process control channel to ignore normal slow variations or drift in the readings Use the Delay setting to ignore transient events Delay Enter the Setpoint Delay time The Setpoint Delay is the amount of time that a channel switching condition must be present before channel switching actually takes place Use the Setpoint Delay in systems known to experience brief pressure or voltage transients during normal operation The addition of the delay eliminates unnecessary channel switching Gauge Off DAC State Specify the channel state Active or Inactive when the pressure gauge is turned off disconnected or in a fault condition RGA or when the analog input port is overloaded or accidentally switched into DAC Output mode while linked to CM or AnalogIO For Channel Sources PP1 8 specify the desired channel state when the filament emission is turned off o
218. ng lug that must be directly connected to the facility ground by a 12 AWG copper wire If necessary use a ground lug on a flange bolt or a metal hose clamp on the sensor port to establish a dedicated connection to the facility ground IMPORTANT Consult the CM s manual for gauge specific grounding requirements PPM100 Partial Pressure Monitor 1 10 Connecting a Capacitance Manometer Pressure Signal Connection To read CM pressures the Pressure Output Signal must be connected to one of the four ANALOG I O ports BNC connectors labeled 1 through 4 on the back panel Identify the two pins assigned to the pressure output signal on the gauge s interface connector typically labeled signal out and signal common Construct a cable from these pins to a BNC connector center pin connected to signal out and outer shield connected to signal common Other names for the signal pins are PRESS OUT OUTPUT RTN Pressure Signal Output Pressure Signal Output Return SIGN OUT SIGN COM etc Power Connection For added convenience the PPM100 also includes an auxiliary 15 Vdc 100 mA CM Power connector 3 position terminal block on its back panel This output is usually sufficient for the simultaneous operation of a pair of standard gauges i e non heated 15 Vdc 35 mA typ Additional gauges or heated gauges will generally require help from an external source of power IMPORTANT Consult your CM manual or contact
219. ng with an asterisk are IEEE 488 2 1987 defined common commands These commands also function identically on RS 232 and USB whenever possible Commands may require one or more parameters Multiple parameters are separated by commas Multiple commands may be sent on one command line by separating them with semicolons In this case no commands are executed until a terminator is received There is no need to wait between commands The PPM100 has a 256 character input buffer and processes commands in the order received If the buffer fills up the PPM100 will hold off handshaking on the GPIB and attempt to hold off handshaking on RS 232 Similarly the PPM100 has a 256 character output buffer to store output until the host computer is ready to receive it If either buffer overflows both buffers are cleared and an error reported PPM100 Partial Pressure Monitor ASRS Remote Programming 6 13 ASRS The present value of a particular parameter may be determined by querying the PPM100 for its value A query is formed by appending a question mark to the command mnemonic and omitting the desired parameter from the command Values returned by the PPM100 are sent as a string of ASCII characters terminated by a carriage return lt cr gt on RS 232 and USB and by a line feed lt If gt on GPIB If multiple query commands are sent on one command line separated by semicolons of course the answers will be returned individually each with
220. nitor ASRS MassSpec Display 6 35 Mass Spectrum Display Commands SCOK MENU d Analog Scan OK The SCOK query returns 1 if the prerequisites for turning on the MassSpec Display exist These include e connection to RGA e PPM100 and RGA operating normally with measurement enabled e all process control channels in manual mode active or inactive e filament emission on or RGA set to use an external ion source If any of these conditions is not met then SCOK returns 0 If SCOK returns 1 then use the MENUS command below to turn on the MassSpec Display If SCOK returns 0 then the MENU5 command will NOT turn on the MassSpec Display Display Screen The MENU command changes queries the screen display The parameter d selects a display listed below d display d display 0 Pressure Display 4 Table Display 1 Monitor Display 5 MassSpec Display 2 Process Display 6 Analog I O Display 3 Chart Display Use the MENU 5 command to show the MassSpec display and start analog RGA scanning Example MENU 5 Shows the MassSpec Display on the screen SCMF n MassSpec Final Mass The SSPM command sets queries the Final Mass for the MassSpec display analog scan The parameter n is the mass in AMU from 1 to the RGA max 100 200 or 300 The default is 50 Examples SCMF Returns the Final Mass SCMF 100 Sets the Final Mass to 100 AMU SCMI n ASRS MassSpec Initial Mass The SSTM command set
221. not use both n and s n units 0 Torr 1 micron 2 bar 3 mbar 4 Pascal Example GPMU Returns the pressure units n GPMU 1 Sets the pressure units to microns GPMU pascal Sets the pressure units to Pascal GPBA n p Data Bar Assign The GPBA command sets queries the Data Bar assignments in the Pressure Display ID Box The parameter n selects Upper 0 Middle 1 or Lower 2 Data Bar and is required The parameter p selects a source port below p source p source p source p source 1 PPI 5 PPS 9 CMI 13 ANI 2 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 Example GPBA 0 Returns the ID p of the upper Data Bar GPBA 2 3 Sets the lower Data Bar to PP3 GPDF n i Display Format The GPDF command sets queries the Display Format of a Data Bar The parameter n selects Upper 0 Middle 1 or Lower 2 Data Bar and is required The parameter i selects a Display Format below i format i format 0 Big Numbers 4 Auto Scaling Bar Graph 1 Trend Graph 5 Full Range Bar Graph 2 Silent Leak Trend 6 Gauge Status Information 3 Audio Leak Trend 7 Leak Rate Examples GPDF 0 Returns the display format i of the upper Data Bar GPDF 2 3 Sets the lower Data Bar to Full Scale Bar Graph PPM100 Partial Pressure Monitor ASRS 6 18 Partial Pressure Analog Measurement GDAT p Read Source Data The GDAT query returns the reading from source port p in the current units The
222. ns 2 system contains vapors that would otherwise condense on the sensor Heated CMs are used in measuring pressures found in 1 chemical processes containing water vapor and organic materials that boil at modest temperatures and 2 semiconductor manufacturing processes particularly aluminum etching where AIC vapor exists When heated sensor heads are used the temperature of the sensor usually is greater than that of the chamber whose pressure is to be measured The pressure reading will be a few percent high under some conditions due to an effect known as thermal transpiration For More Information For additional information on CMs and the thermal transpiration effect consult 1 Foundations of Vacuum Science and Technology Ed J M Lafferty John Wiley and Sons NY 1998 p 384 2 R W Hyland and R L Shaffer Recommended Practices for the Calibration and Use of Capacitance Diaphragm gauges as transfer standards J Vac Sci Technol A 9 1991 2843 PPM100 Partial Pressure Monitor ASRS Analog I O Ports 4 7 CM Connection The standard PPM100 controller can display pressures measured from standard capacitance manometers CMs Up to four independent CM readings can be monitored simultaneously using the four Analog I O ports Pressure readings are updated at 2 Hz The PPM100 precisely measures the 0 to 10 Vdc linear output signal from the CM to determine pressure Direct pressure readings are accurate only if th
223. nstalled uninstall it using Uinstal exe Plug the PPM100 into the PC USB port and turn the unit on Windows will prompt a new device has been found and Building Driver Information Database followed by the Add New Hardware Wizard If Windows asks to search for the driver click OK Windows should find the file that you just unzipped If not navigate to the correct directory Select Next To confirm that the installation has completed successfully look under Device Manager of the System Properties screen The device should have installed as a USB Serial Port COMx attached to USB High Speed Serial Converter PPM100 Partial Pressure Monitor ASRS Using USB 6 59 ASRS Testing It s a good idea to test the COM port installation before attempting to write a program to communicate with your PPM100 e Open Hyperterminal from the Start Menu Programs Accessories Communications Hyperterminal e Enter a name e g PPM on COMS at the New Connection dialog e Choose the COM port that VCP installed to in the Connect To dialog e Ignore the COMx settings page just click OK If the PPM is connected and turned on you should be able to type in IDN lt Enter gt and get the instrument identification string in response You can modify the terminal settings to improve the readability of your session as follows e Select Call Disconnect from the Hyperterminal menu e Select File Properties and click on the Settings Page ta
224. nt Status ESE i j 6 54 Standard Event Enable ERSW i 6 54 Read Error Status ERSE i j 6 55 Error Status Enable GSSW i 6 55 Read Gauge Status GSSE i j 6 56 Gauge Status Enable RSSW i 6 56 Read Process Status RSSE i j 6 57 Process Status Enable ASRS PPM100 Partial Pressure Monitor Index of Commands 6 7 Alphabetical List of Commands Important Always use the GPMU command at the start of a program to ensure that the desired units are in effect Use VERB 0 to set the RS 232 interface to terse mode for computer programs Use VERB 1 to use verbose mode for console communications Variables i j d n p integers x real number s t text strings CLS 6 52 Clear Status ESE i j 6 54 Standard Event Enable ESR i 6 53 Read Standard Event Status IDN 6 47 Identification PSC i 6 52 Power On Status Clear RST 6 47 Reset SRE i j 6 53 Serial Poll Enable STB i 6 52 Read Serial Poll Status TST 6 46 Self Test B BLEN i 6 44 Backlight Saver Enable BLIT i 6 44 Backlight On Off BLOF n s 6 44 Backlight Turn Off Time BLON n s 6 44 Backlight Turn On Time BLTD n 6 44 Backlight Delay c CALL 6 29 Calibrate RGA Detectors CEIV 6 29 Calibrate RGA Electrometer CMPX n x 6 24 CM PMax CTOM n 6 36 Move MassSpec Cursor D DATE s 6 45 Date DGAS i 6 25 RGA Degas On Off DHWR d 6 4
225. ny serviceable parts and requires no scheduled maintenance The PPM100 is only recommended for use in a clean dry laboratory environment Operation in other environments may cause damage to the controller and reduce the effectiveness of the safety features In all cases provide adequate ventilation for the control unit to dissipate heat 1 inch clearance around the side ventilation slots is recommended Allow at least 6 inches at the back of the controller for cable routing Do not mount the unit above other equipment that generates excessive heat The PPM100 is designed to operate over the range 0 40 C Ambient temperatures above that value might damage the product For optimum electrometer stability particularly while using calibrated gauges the control unit ambient temperature should be 25 5 C Touchscreen The surface of the touchscreen should be kept free of dirt dust fingerprints and other materials that could degrade its optical properties Long term contact with abrasive materials will scratch the front surface and harm image quality Do not operate the touchscreen with the tips of pens or sharp objects that might permanently stain or damage the screen surface Use a clean non abrasive cloth towel and a commercial window cleaner to regularly clean the screen The cleaning solution should be applied to the towel NOT the surface of the touchscreen Fluid may seep behind the panel if it is not cleaned properly Turn off the un
226. o the eight process control relays Relay pins are labeled I Inactive C Common and A Active for easy association to channel states Block 1 Block 2 1 13 CH5 CH4 12 24 CH8 Figure 5 3 The 2 12 position terminal blocks for process relay connections Block Pin Process Channel Process Control Label i Common C Inactive 1 C 3 Active A 4 2 Common C 5 Inactive 1 Active A 7 3 Common C 8 Inactive 1 C 9 Active A N O 10 4 Common C C Inactive 1 N C A 2 13 5 Common C C Inactive 1 N C 15 Active A N O 16 6 Common C C Inactive 1 N C 18 Active A N O Common C Inactive 1 Active A N O E 8 Common C C 23 Inactive 1 N C Active A N O Note Block 2 must be removed in order to be able to access its side screws PPM100 Partial Pressure Monitor 5 12 Process Control Connection Basics When a process control channel is ACTIVE its relay is energized or on connecting the Common and Active N O pins Active Pins are labeled A on the back panel and correspond to the Normally Open pin of the SPDT relay SPDT Relay A Active Normally Open N O I Inactive Normally Closed N C O C Common Figure 5 4 Active relay connection When a process control channel is INACTIVE its relay is de energized or off connecting the Common and Inactive pin
227. od working conditions Label and color code all high voltage cables Inspect all HV wires periodically for problems as part of your safety checkups Use tie downs and cable channels to hold all electrical wiring in place i e no dangling cables Keep all electronic instrumentation neatly organized and remove unconnected cables and connectors from the vacuum setup If possible rack mount your vacuum instrumentation Only use instrumentation with high quality cables and connectors that properly shield all high voltage terminals Eliminate homemade connections from your vacuum setups High voltage cables from ion gauge controllers ion guns photomultiplier tubes mass spectrometer probes power supplies etc can be inadvertently damaged if pinched while tightening flange bolts Keep all cables away from vacuum ports frequently opened to air PPM100 Partial Pressure Monitor iv Safety and Preparation For Use e The voltages delivered by the RGA PPM100 system can be lethal particularly during electron bombardment degas Do not touch any of its connection pins even if the gauge is off e Do not push objects of any kind into this product through openings as they may come in contact with dangerous voltage points or short out parts that could result in a fire or electric shock e Verify that the vacuum port to which the RGA Head is mounted is electrically grounded It is essential for personnel safety as well as proper operation tha
228. ommand they may not be executed Verify the RGA settings before turning emission on again Examples EMIS Returns 1 if RGA Filament is on 0 if off EMIS 1 Turns RGA Filament on RGA Scan Electron Multiplier On Off The ENEM command turns the RGA Scan Electron Multiplier On i 1 or Off i 0 This command duplicates the function of the E MULTIPLIER button on the front panel ENEM queries whether the RGA Scan Electron Multiplier is on or off The RGA Scan Electron Multiplier may only be turned on during analog scans MassSpec Display Examples ENEM Returns 1 if RGA Electron Multiplier is on 0 if off ENEM 1 Turns RGA Electron Multiplier on RGA Electron Multiplier Bias Voltage The EMBV command sets queries the electron multiplier bias voltage The parameter n is the bias voltage in Volts 0 or 10 2490 The default is 1400 This command fails if the RGA does not have an electron multiplier Examples EMBV Returns electron multiplier bias in volts EMBV 1000 Sets the electron multiplier bias to 1000 Volts PPM100 Partial Pressure Monitor ASRS RGA 6 27 EREQ i IRFE 7 i lonization Source The EREQ command sets queries the RGA Ionization Source to RGA Filament i 1 or External i 0 If set to RGA Filament the PPM100 will not measure pressures without RGA filament emission being on Examples EREQ Returns RGA Ionization Source 0 or 1 EREQ 1 Sets RGA Ionization Source to RGA Filament R
229. onitor ASRS Status Reporting 6 53 Serial Poll Enable SRE i j The SRE i command sets the Serial Poll Enable register to the decimal value i 0 255 The SRE i j command sets bit i 0 7 to j 0 or 1 The SRE query returns the value 0 255 of the Serial Poll Enable register The SRE i query returns the value 0 or 1 of bit i 0 7 When a bit becomes set in BOTH the Serial Poll Status register AND the Serial Poll Enable register an SRQ GPIB service request is generated The SRQ is cleared by performing a serial poll The bit in the Serial Poll Status which caused the SRQ must be cleared before this bit can cause another SRQ To clear this bit the condition which causes it to be set in the Serial Poll Status needs to be cleared For the PCSQ GERR IERR or ESB bits this is accomplished by clearing the enabled status bits in the Process Gauge Error or Standard Event status words by reading them Examples SRE Returns the Serial Poll Enable register 0 255 SRE 2 Returns 0 if bit 2 is clear 1 if it is set SRE 40 Sets the Serial Poll Enable register to 40 decimal bits 3 and 5 set SRE 1 0 Clears bit 1 of the Serial Poll Enable register ESR i Read Standard Event Status The ESR query returns the value of the Standard Event Status register The value is returned as a decimal number from 0 to 255 The ESR i query returns the value 0 or 1 of bit i 0 7 ESR clears the enti
230. onizer The parameter represents the desired electron ionization energy in units of eV The available range is 25 to 105 eV The default value is 70 eV lon Energy Adjust the ion energy to one of two possible settings Low 8 eV or High 12 eV The default value is High 12 eV Focus Voltage V Adjust the focus plate voltage The available range is 0 to 150 V The default value is 90 V Note Careful adjustment of the focus voltage results in optimum coupling of the ion beam into the quadrupole mass filter and maximum sensitivity PPM100 Partial Pressure Monitor ASRS RGA Menu 3 47 Electron Current mA Adjust the electron emission current in the ionizer This parameter represents the desired electron emission current in units of mA The available range is 0 to 3 5 mA The default value is 1 0 mA Scan Rate Adjust the detector s scan rate for analog scanning The available range is 1 to 8 integers only The default is 3 The scan rate parameter represents the desired averaging for the detection and defines the scanning rate and detection limit for mass measurements during analog scans The scan rate setting is used to set the noise floor NF of the RGA during analog scanning Scan Rate NF 1 In general smaller scan rates result in reduced background noise increased signal to noise ratios improved detection limits and slower scan updates Calibrate Electrometer Perform a complete r
231. onnector e aJ BR Po NIJO e HOST RS 232 Connector The PPM100 includes a female DB9 connector RS 232 DCE labeled HOST RS 232 for serial communication with a host PC computer N Signal eT a Transmit data to Host Receive data from Host unused ground unused handshake from Host handshake from PPM unused COIN MD oO RY Figure 2 8 The PPM100 DB9 RGA RS 232 connector PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 21 Analog I O BNC Ports AN1 4 Use these four BNC ports to input or output analog signals into or out of the controller All PPM100 controllers have four analog input output ports BNC connectors on the back panel The range is 12 V with 14 bit input resolution and 12 bit output resolution The update rate is 2 Hz Each individual port may be configured as an input or as an output for complete I O flexibility Inputs All inputs are logged in the Data Log along with all pressure readings These inputs may be displayed on the Pressure and AnalogIO Displays and are also available in either Table or Chart mode in the Data Log Display When used as inputs these ports can read the output signals from standard capacitance manometers The PPM100 will display the readings as pressures provided the full scale range Pmax of the gauge and CM Display Linear are programmed into the controller Inputs may be linked to Process Con
232. ontrol Adjust the speaker volume 0 to 10 The PPM100 speaker is used for different purposes such as user interface feedback alarm sounding during process control and over under pressure events or audio leak testing Configuration Display the Configuration Report The Configuration Report shows a complete listing of all internal modules detected when the unit was turned on PPM100 Partial Pressure Monitor ASRS Utilities Menu 3 51 Selftest Submenu Display the Selftest menu System Selftest Touch this button to perform the power on test again This also displays the firmware version and date Button amp LED Test Touch this button to test the BLACK hardware keys the 8 process LEDS and the 2 RGA LEDS Xmit via RS 232 Transmit the string SRS PPM100 over the RS 232 interface Tip Use this button to test your RS 232 connection and settings ASRS PPM100 Partial Pressure Monitor 3 52 Remote Menu Remote Menu Touch Remote in the Main menu to display the Remote menu Main Remote Sustem name SRS PPM100 row O RgaQueve 28 EJ fek Po Pressure Monitor Process Main Help Figure 3 28 Main Remote menu System Name Enter a system name for this PPM100 The system name identifies this unit over the remote interfaces In addition the name is displayed on all web pages served by this unit RgaQueue Display the RGA RS 232 transmit and receive buffers
233. ontrol 3 38 Pressure 3 19 Alarm Beep 3 19 Edit Rules Menu 3 39 Linked To 3 39 AnaloglO Display 3 20 Pressure Setpoint 3 40 About Capacitance Manometers 3 20 Voltage Setpoint 3 40 Analog Signal Data Box 3 21 Setpoint Activation 3 40 Capacitance Manometer Data Box 3 21 Percent Hysteresis 3 40 Monitor AnaloglO Setup Menu Analog I O Voltage Hysteresis 3 41 and CM measurement setup 3 23 Delay 3 41 ADC or DAC 3 23 Gauge Off DAC State 3 41 CM Pmax P 10V 3 24 Activation Time Deactivation Time 3 41 AN1 4 CM1 4 Name 3 24 Activate When TTL 3 42 DAC Source 3 25 Edit Messages Menu 3 43 Volts When Source Manual 3 25 Description 3 43 CM Display 3 25 Active Message Inactive Message 3 43 Zero CM Submenu 3 26 Beep 3 44 MassSpec Display 3 27 Main Menu 3 45 Cursor 3 28 Units 3 45 Moving the Cursor 3 28 SRS 3 45 Ne ioi 329 RGA Menu 3 46 u Final 3 29 Electron Energy eV 3 46 YAKS 3 29 lon Energy 3 46 Y Axis Submenu 3 29 Focus Voltage V 3 46 Pmax 3 29 Electron Current mA 3 47 Pmin 3 29 Scan Rate 3 47 f Calibrate Electrometer 3 47 Logging Display 3 30 RGA Info 3 47 Chart 3 30 Moving the Cursor 3 30 Advanced Submenu 3 48 Changing the Graph 3 31 Degas 3 48 Table 3 31 lonization Source 3 48 RF7 Error Handling 3 49 Logging Setup Menu 3 32 Leak Rate Coefficient 3 49 Display Format 3 32 vice ising 3 32 Utilities Menu 3 50 Display Date 3 32 Time Date 3 50 Logging Interval 3 33 Volume Control 3 50 TTL Reset Enable 3 33 Configuration 3 50 PPM100 Partial
234. operation 9 EY a Back a a Pressure Monitor Process Web Help Figure 7 8 Web Control menu Security Type The PPM100 offers a choice of security options when web control is enabled IP Checking Within a networking environment in which the IP addresses do not change the IP addresses are static you can limit who has access to the instrument by checking the IP address of users asking for data Main Remote web Control t web control Security type Disabled Both ey Trusted IPs Main Remote Web Control Trusted IPs_ k 14 06 Start trusted range 1 3 End trusted range 13 0 0 0 0 0 0 0 0 Trusted IP address 1 3 Trusted IP address 133 0 0 0 0 0 0 0 0 Trusted IP address 1 3 Trusted IP address 13 0 0 0 0 0 0 0 0 Pressure Monitor Process Control Help R5232 port mode 8 Normal operation a a Pack a gy Pressure Monitor Process Web Help Figure 7 9 Trusted IP setup menu The PPM100 allows you to specify the IP addresses that will be allowed to access the instrument over the web You may specify a range of addresses as well as four addresses that are outside that range The addresses outside the range are for trusted users outside the local network with static IP addresses If your network uses dynamic IP addresses but they always fall in the same range you can still use IP checking security If you do not require control of the EWS via a dia up connection this
235. or Enter a new destination mass in amu for the cursor or track the location of the cursor while using the left and right cursor arrows Moving the Cursor There are 3 ways to move the cursor 1 Enter a destination mass with the Cursor button 2 Move the cursor in 1 amu increments using the left and right cursor arrows PPM100 Partial Pressure Monitor ASRS MassSpec Display 3 29 ASRS 3 Touch and select the Info Box above the graph and then touch the right half of the spectrum to move the cursor to the right the left half to move it to the left Touch close to the center to move slowly at the edges to move quickly Touch and hold to move continuously Every time the cursor is moved to a new position 1 amu increments the exact mass and pressure of maximum amplitude at that position is displayed in the info box Use this feature to identify gas species and test the mass axis calibration of the RGA M Init Specify the initial mass value in amu for the analog scan The lower mass limit for this number is 1 amu The upper mass limit depends on the SRS RGA model number 100 for RGA100 200 for RGA200 and 300 for RGA300 M Final Specify the final mass value in amu for the analog scan The lower mass limit for this number is 1 amu The upper mass limit depends on the SRS RGA model number 100 for RGA100 200 for RGA200 and 300 for RGA300 Y Axis Logarithmic scaling of the mass spectra Y Axis in the M
236. or PPM Alarm Enable Alarm Level High Alarm Level Low Alarm Beep T O Mode DAC Source CM Mode Output Value CM PMax RGA MAXM RGAI EEEV n IEEV i FOPV 7 n SCRA n ECMA 2 x Read RGA Mass Range Read RGA Identification Electron Energy Ion Energy Focus Voltage Scan Rate Electron Current PPM100 Partial Pressure Monitor Commands xix CALL CEIV DGAS i EMIS i ENEM i EMBV n EREQ i Calibrate RGA Detectors Calibrate RGA Electrometer RGA Degas On Off RGA Filament Emission On Off RGA Electron Multiplier On Off RGA Electron Multiplier Bias Voltage RGA Ionization Source IRFE 7 i RF7 Error Handling LRER 0 Last RGA Error PASS i RGA Pass Through SYNC RGA SYNC Logging PLDS i Chart Table Display PLCL Clear Data Log PLGF Read Data Log First PLGN Read Data Log Next PLIN n Logging Interval PLWT n Log Length PLEN 7 i Logging Enable PLDD i Display Date PLTR 7 i TTL Reset Enable Charting LCPN x Chart MassSpec Pmin LCPX x Chart MassSpec Pmax LCVN x Vmin LCVX x Vmax LCSA Autoscale Y Axis LCRG n Time Range LCSF Scale X Axis to Full Mass Spectrum Display SCOK MENU d SCMF n SCMI n SCAN i OSCC LCPN x LCPX x SYSA CTOM n MACB PACB Process Control RDES d s RLCL d s RLOP d s RBE
237. ormed as required during the routine operation of the mass spectrometer Error and Status registers routinely queried by the PPM100 store the results of all tests in the RGA head s internal memory Tip For a detailed listing of RGA Error conditions and Troubleshooting options consult the RGA s Operation and Programming Manual Several additional built in hardware test procedures automatically check the PPM100 electronics when the unit is turned on and continuously track the internal workings of the controller during operation All detected PPM100 and RGA errors are immediately reported through on screen messages audio alarms LEDs or over the computer interfaces Error Messages Text error messages are shown in the Data Bars and Data Boxes of the PPM100 display Consult the Error Messages section of this chapter for more information PP4 FILAMENT OFF s Touch the Data Box and choose Status Information to display an explanation of the gauge status message 9 72 08 Operating normally Audio Alarms Sounds are used to draw the user s attention to potentially serious problems PPM100 Partial Pressure Monitor ASRS Error Detection 8 5 ASRS Error Status Words Internal status words signal all status and error conditions through the computer interfaces RGA Error Pop up Windows RGA Errors are reported through pop up windows which display RGA error codes and in some cases troubleshooting instruction
238. ove or below a user specified input signal level For example use the amplified voltage readings from a thermocouple gauge to prevent overheating of your sample during inductive heating Recommendation Use Analog I O ports as inputs to read voltages from additional vacuum equipment such as capacitance manometers thermocouples mass flow controllers turbo pump controllers throttle valve controllers etc For More Information Consult the Process Control Display section in Chapter 3 of this manual for information on how to link process control channels to analog input ports Analog Outputs The level of a DAC output can be set manually Volts When Source Manual or remotely through the computer interface or may be linked to the log partial pressure PP1 PP8 DAC Source When PP1 PP8 is the DAC source the analog output follows these parameters P Torr 10 for 10 Torr lt P lt 10 Torr OV indicates gauge off 12 V indicates gauge fault Recommendation Use analog outputs to control auxiliary vacuum equipment such as heaters actuators ion sources and throttle controllers Connect analog output signals to Programmable Logic Controllers to perform sophisticated process control ASRS PPM100 Partial Pressure Monitor 4 6 Analog I O Ports Capacitance Manometers CM1 CM4 Basics Capacitance manometers CMs are very accurate devices for measuring both absolute and differential pressures They measure all gases and
239. p while you work allowing you to keep tabs on critical parameters see below You can create multiple windows to group critical parameters by type or use a single window and look at several types of data at once This feature can be especially useful when a relay state is tied to a pressure reading you can make absolutely sure that the relays are functioning correctly with the given pressure input These same ideas can be applied to the analog inputs to monitor parameters such as temperature Favorites Tools Help Date taken at 12feb03 at 1542 Gauge Type Gauge Reading Gauge Name 9 30 09 Tor Figure 7 13 Auto Monitor window PPM100 Partial Pressure Monitor SRS Using the EWS 7 21 Process History This function will return up to the last 20 events in the process history Each entry of the history has a timestamp a listing of what relays were active at that moment a listing of what relays were under automatic control at that moment and what change took place at that moment By examining the process history you can trace how your vacuum system arrived in its current state Often you can quickly diagnose a problem in your vacuum system when you learn which interlocks were activated and the order in which they were activated Proceee Central Hietery Timestunp Active Relays Astematic Relays Channel no miN 0101111 un sda 11 Name SE PM Monitor Ena GetRosdngs Show Stored Piot PPM j Get Userlog
240. peration is in progress After the IFC bit becomes set signaling the completion of the command then the ESB Event Status bit may be checked to verify successful completion of the command If the RS 232 or USB interface is used or serial polling is not available then the STB query command may be used to read the Serial Poll status word However STB NEVER returns the IFC bit set since STB is itself a command Since the PPM100 processes one command at a time status queries will not be processed until the previous operation is finished Thus a response to a status query in itself signals that the previous command is finished The query response may then be checked for various errors PPM100 Partial Pressure Monitor 6 14 Remote Programming RGA Commands The PPM100 is capable of detecting and handling all native RGA commands For more information on RGA commands see the SRS RGA Operation and Progamming Manual Once a valid RGA command is received by the PPM100 over any interface it is immediately transmitted to the RGA through the RGA RS 232 port without any changes The responses from the RGA are also detected by the PPM100 and sent back to the host computer over the same computer interface PPM100 to RGA Communication Pending Commands Many PPM100 commands cause the PPM100 to send commands to the RGA head via the RGA RS 232 port Since the PPM100 can receive commands from the host computer via an interface which is
241. permanently connected to the facility s earth ground Consult an experienced electrician if necessary e High voltage ion producing equipment such as a hot cathode ionization gauge or residual gas analyzer can under certain circumstances provide sufficient electrical conduction via a plasma to couple a high voltage potential to the vacuum chamber walls Any exposed conductive parts of a gauge or vacuum chamber may attain high voltage potentials through this process if not properly grounded Grounding the PPM100 does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground Perform regular electrical ground tests on your entire vacuum system particularly if it is shared by multiple users who often perform custom modifications on the chamber s configuration ASRS PPM100 Partial Pressure Monitor 1 32 Proper Grounding Ground Test Procedure Step 1 Carefully examine your vacuum system Q Are all exposed connectors and conductors on the vacuum chamber grounded Q Are all ground connections properly connected to a solid earth or facility ground Q Beware Some vacuum systems rely on water piping for the earth ground connection Proper ground connection can be easily lost by inadvertently inserting a plastic interconnect into the water line Q Keep in mind that the use of O ring seals without metal clamps or bolt connection can isolate big portions of a vacuum system from its saf
242. ply remain in the Monitor Display Screen for simultaneous display of up to eight partial pressure measurements Partial Pressure Parameters A unique set of Partial Pressure parameters is required for each of the eight 8 single mass partial pressure measurements performed by the PPM100 As an example consider setting up the PP1 Partial Pressure measurement of the Monitor Display to track the partial pressure of methane formula CH4 mass 16 amu in the gas mixture in contact with the RGA Head For this common gas the following parameters must be entered into the setup menu of the PP1 Partial Pressure measurement PP1 Measurement Enabled Each partial pressure measurement PP1 PP8 can be individually enabled or disabled at any time and according to changes in measurement requirements or gas composition PP1 Mass amu 16 The 16 amu mass value is commonly selected for monitoring methane since it is the location of its main peak in the mixture s mass spectrum PPM100 Partial Pressure Monitor 1 16 PPM100 Quick Setup PP1 Name Methane A name entry is recommended to identify the PP1 Partial Pressure Measurement as the one tracking methane gas at the single mass 16 amu PP1 Scan rate 1 8 The Scan Rate determines the averaging performed by the RGA head during the PP1 partial pressure measurements Averaging increases and detection limit decreases as the scan rate setting is reduced The scan rate setting is interpreted
243. ports and also up to four capacitance manometer pressure readings It consists of two rows of four data boxes 1 Top Row Analog Signals AN1 AN4 Boxes 2 Bottom Row Capacitance Manometer Readings CM1 CM4 Boxes Touch a Data Box to display its Setup menu and edit its measurement parameters About Capacitance Manometers Capacitance Manometers CMs also known as capacitance diaphragm gauges are the most accurate devices for measuring absolute and differential pressures of gases and vapors at the gauge s operating temperature CM gauge heads are specified by their full scale pressure Pmax The gauge output is a dc voltage linearly related to the pressure By industry standard the output is 10 Vdc at Pmax Dynamic range is typically 10 Most gauge heads require 15 Vdc 35 mA to operate Heated head assemblies require much higher power and some models require higher voltages Consult the gauge manual for power requirements and maximum pressure specifications Most manufacturers list the maximum pressure power requirements and connector pinouts right on the gauge body The PPM100 has a 15 Vdc 100 mA output connector on the back panel to directly power standard non heated capacitance manometers PPM100 Partial Pressure Monitor ASRS Analog I O Display 3 21 Using capacitance manometers The PPM100 is designed to read pressures from up to four capacitance manometers To read CM pressures the CM output signal must be
244. put PP6 out CM1 CM2 CM3 CMa DISPLAY OFF DAC OUTPUT 8 74 Torr DAC OUTPUT Temp Dose Valve CM 10Torr Argon buff Off Off Linear Off Beg Back Py i Pressure Monitor Help Figure 1 11 AnalogIO Display Screen PPM100 Partial Pressure Monitor ASRS Pressure Display 1 21 Pressure Display Screen ASRS The Pressure Display Screen provides an additional convenient and flexible way to display up to three pressures and voltage signals It is also the only display mode that provides access to the Logging i e Table Chart and Process Control modes of the PPM100 controller Pressure 11 55 5 96 08 4 91 09 P319 93 08 TEREE Figure 1 12 Pressure Display Screen with three data bars a Use the Pressure QuickKey to bring up the PPM100 Pressure Display at any time The Pressure Display Screen consists of three Data Bars each displaying a pressure total or partial or analog signal Readings may be displayed in various formats and are updated twice a second 2 amu Torr Hydrogen Figure 1 13 Data Bar consisting of three adjacent boxes ID left Data center and Info right Each Data Bar consists of three adjacent boxes ID left Data center and Info right Customize a Data Bar by touching the ID or the Data boxes The ID box shows the source of the readings displayed by the data bar PP1 PP8 CM1 CM4 or ANI AN4 For examp
245. put resolution and 12 bit output resolution The update rate is 2 Hz Each port is individually configured as an input or an output for complete I O flexibility PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 5 Input Input signals dc voltages may be displayed on the Pressure or AnalogIO Display Screens and monitored remotely through the computer and web interfaces When Data Logging is enabled all analog input voltages are stored in memory as part of the logging data set Use ANALOG I O ports as inputs to read voltages from additional vacuum equipment such as capacitance manometers third party gauges with analog outputs mass flow controllers turbo pump controllers etc Capacitance manometers must be connected to ANALOG I O ports configured as inputs and CM Display must be set to linear Direct pressure readings are available only if their full scale pressure Pmax is programmed into the controller i e pressure corresponding to 10 V output Direct pressure display from compact gauges are also possible if 1 Pmax is properly programmed i e pressure corresponding to 10 V output 2 CM Display is set to Log and 3 if the voltage output of the compact gauge is related to the log of the pressure with a 1 V decade scaling factor Output Analog output levels can be adjusted manually from the front panel remotely through the computer interface or they can be linked to the log of partial pressures PP1 PP8 Use a
246. r example use this connection scheme to turn an auxiliary power supply on after a main power failure As the main power shuts down the relay is deactivated delivering backup power to the experiment In general use this connection scheme whenever you need a contact to open during the active state of the channel Power Ground SPDT Relay Active O O Inactive Common Figure 5 7 Using a relay as a back up power switch Shown in Inactive power off state In this case the Inactive and Common connections may be swapped Connecting as shown prevents power from appearing on the Active pin when the channel is Active Active Common Inactive The relay is used as a true double throw switch with connections to its three pins As an example consider a system where an electrical power source is shared between two instruments 1 and 2 but only one instrument is powered at a time sequential operation In this scheme the supply wire is connected to the Common pin and the Active and Inactive pins are connected to the power input pins of instruments 1 and 2 respectively Switching the channel state between ACTIVE and INACTIVE redirects the power from instrument 1 to instrument 2 SPDT Relay Active O Inactive Common L Ground ay Figure 5 8 Using a relay as a power multiplexer Shown in Inactive power off state ASRS PPM100 Partial Pressure Monitor 5 14 Process Control A
247. r a fault exists no pressure readings available or the measurement is disabled For Channel Sources CM1 4 specify the desired channel state when its Analog I O port is switched to DAC Output mode or the input is overloaded no pressure readings available or the CM Display is set to Off For Channel Sources AN1 4 specify the desired channel state when port is switched to DAC Output mode or the input is overloaded no voltage readings available Activation Time Deactivation Time Enter the Channel Activation Deactivation Time when the Channel Source is Clock The Activation Time is the exact time at which the channel switches to ACTIVE The Deactivation Time is the exact time at which the channel switches to INACTIVE ASRS PPM100 Partial Pressure Monitor 3 42 Process Control Display All times are represented in 24hr format 18 30 is 6 30pm The current time is displayed at the top of the screen in most displays Use the clock to control scheduled operations such as overnight system bakeouts The channel Activation Time can start unattended system bakeout an hour after everybody leaves Use the channel Deactivation Time to stop the bakeout and allow the system to cool down three hours before arriving in the morning Activate When TTL Select the TTL Activation mode High or Low Each channel has a dedicated TTL input pin see Chapter 5 When the Channel Source is TTL the level of this input controls the channel Act
248. r supply lt 22V 24 PS7 External 24V power supply gt 26V Examples LRER Return RGA error code i LRER 0 Clear the last RGA error PPM100 Partial Pressure Monitor 6 28 RGA PASS 7 i RGA Pass Through The PASS command sets the RGA Pass Through to Normal Operation i 0 or Pass Through i 1 If set to Pass Through the PPM100 will pass all characters received via the Host RS 232 port directly to the RGA and all responses from the RGA will be transmitted from the Host RS 232 port The Host RS 232 port is also set to emulate the serial port on the RGA itself This allows the host computer to run RGA Windows or other direct RGA software without changing any serial cables This command should not be used over the RS 232 interface Once Pass Through is enabled the PPM100 will not recognize any PPM100 commands it receives via the Host RS 232 port thus the PASS 0 command will not work to restore normal PPM100 operation Use the USB or GPIB port to issue the PASS 0 command or restore normal operation via the front panel When PASS 0 is used to return to normal mode the Host RS 232 port settings are not restored to their previous settings After using PASS 0 the SYNC query should be used to synchronize the PPM100 with the RGA Important The PPM100 will not perform any RGA related activity while in Pass Through mode Only measurements related to the Analog ports continues Examples PASS Returns the RGA Pass Through Mode PASS 1
249. rate of PP1 LRCE n Leak Rate Coefficient The LRCE command sets queries the Leak Rate Coefficient The parameter n is an integer from 1 to 3000 Examples LRCE Returns the Leak Rate Coefficient LRCE 500 Sets the Leak Rate Coefficient to 500 PPM100 Partial Pressure Monitor ASRS Partial Pressure Analog Measurement 6 19 GDES p s GSTA p ASRS Gas Name Port Location The GDES command sets queries the gas name or port location string The parameter p selects a source below and is required The string s is the name or location string p source p source p source p source 1 PPI 5 PPS 9 CMI 13 ANI 2 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 Examples GDES 3 WATER Sets the gas name of PP3 to WATER GDES 3 Returns the gas name of PP3 WATER in this case Source Status The GSTA query returns the status of source port p The parameter p selects a source below and is required p source p source p source p source 1 PPI 5 PPS 9 CMI 13 ANI 2 PP2 6 PP6 10 CM2 14 AN2 3 PP3 7 PP7 11 CM3 15 AN3 4 PP4 8 PP8 12 CM4 16 AN4 The returned value is an integer n described below n description 0 The gauge is operating normally 2 The reading is underrange 3 The reading is overrange 4 The reading is not yet accurate 5 There is no data from this DAC source 7 PPM100 is scanning and is not measuring partial pressures 8 Another source is displaying Leak Trend this source
250. re 1 10 Monitor Display Screen for the PPM100 with the eight Partial Pressure Boxes enabled Press the FILAMENT power button again to turn the emission off FILAMENT OFF is displayed in all partial Pressure boxes As a general rule if the RGA electron emission is on the PPM100 is either collecting single mass partial pressure measurements or performing analog scans The only way to interrupt data collection from the RGA Head is by turning off the filament emission ASRS PPM100 Partial Pressure Monitor 1 20 Pressure Measurement Capacitance Manometer Readings CM1 CM4 The most direct way to display simultaneous total pressure readings from up to four capacitance manometers is to access the AnalogIO Display Screen of the PPM100 through the Monitor Display Screen a From the Monitor Display touch the AnalogIO Button to access the AnalogIO Display screen The total pressure readings for up to four capacitance manometers CM1 4 are displayed in the bottom four CM Data Boxes CM1 4 respectively For convenience the corresponding voltage outputs of the gauge heads are simultaneously displayed in the top four AnalogIO Data Boxes The analog I O ports are continuously monitored and its readings stored in memory independently from the SRS RGA readings Analogl0 t 11 54 AN2 ANS ANA 0 274 V 8 735 V 4 450 V Dose Valve CM 10Torr Argon buff ADC input Manual out ADC in
251. re register while ESR i clears just bit 1 The conditions for each bit are listed below bit name set when 0 OPC The OPC command completes 1 Unused 2 Unused 3 Unused 4 EXE A command cannot be executed 5 CME A command syntax error occurs 6 Unused fi PON Unit turns on The Standard Event Status is defined by IEEE 488 2 1987 and is used primarily to report errors in commands received over the interface These bits remain set until read cleared by CLS or power up with PSC enabled Examples ESR Returns the Standard Event Status register 0 255 ESR 5 Returns 0 if bit 5 CME is clear 1 if it is set PPM100 Partial Pressure Monitor ASRS 6 54 Status Reporting ESE 7 i j Standard Event Enable The ESE i command sets the Standard Event Enable register to the decimal value i 0 255 The ESE i j command sets bit i 0 7 to j 0 or 1 The ESE query returns the value 0 255 of the Standard Event Enable register The ESE i command queries the value 0 or 1 of bit i 0 7 When a bit becomes set in BOTH the Standard Event Status register AND the Standard Event Enable register bit 5 ESB of the Serial Poll Status is set This causes an SRQ if bit 5 in the Serial Poll Enable register is set To clear a bit in the Standard Event Status use ESR Examples ESE Returns the Standard Event Enable register 0 255 ESE 2 Returns 0 if bit 2 is clear if it is set ESE 48 Sets the Standard Event En
252. res e Signal when a process is complete or alert operators to system conditions that require their attention e Link process control channels together to create powerful system logic to control a wide variety of functions e Perform repetitive operations e Use e mail notification to warn operators about possible system problems over the internet requires web interface e Track the throughput of single gas mass flow controllers by measuring the partial pressure of the components they control For More Information Consult Chapter 5 of this manual for detailed connection configuration and operation information for PPM100 Process Control Consult Chapter 3 for information on menu items related to the configuration and operation of the Process Control module PPM100 Partial Pressure Monitor ASRS PPM100 Basics 2 13 Front Panel All PPM100 functions can be manually configured and controlled through the instrument s intuitive front panel graphical interface m1 00 14 l2 13 07 Figure 2 3 The PPM100 front panel Front panel components can be divided into five categories see Figure 2 2 which are described individually in the following sections 1 Power LINE LED and POWER button with LED 2 RGA Controls FILAMENT and E MULTIPLIER buttons with LEDs 3 Touchscreen LCD Display 4 Process Control LEDs Power LINE LED The LINE LED red lights up to indicate that the PPM100 is connected to
253. ressure History Overview Pressure Help CM1 CM2 CM3 CMa IM Init 133 DISPLAY OFF DAC OUTPUT 8 74 Torr DAC OUTPUT 1 Temp Dose Valve CM 10Torr Argon buff M Final i Off Linear Off 50 PPM100 Partial Pressure Monitor xii Overview Back Panel Overview WARNING e Read the entire Safety and Preparation for Use section of this manual before using the PPM100 e Read Chapter 1 for detailed instructions and safety information regarding the installation of the PPM100 and connection to the RGA Head ASRS STANFORD RESEARCHSYSTEMS MADE IN U S A y x process CONTROL Eit Q3 DIGITAL 6 Hom oth Ey ai A WARNING parts RELAY O 45 CONTACTS ies 20 H i a wyj Nj ae Bs gt es a 4 100 to 240 VAC 125 WATTS CHASSIS b aN Figure ii The PPM100 back panel Power Power Entry Module and CHASSIS GND RGA RS 232 RS 232 connection to RGA Head HOST RS 232 RS 232 computer interface port Capacitance Manometer 15 V AUX POWER Analog I O BNC Ports AN1 4 Process Control RELAY CONTACTS and DIGITAL I O Computer Interfaces USB GPIB IEEE 488 and Ethernet 1OBASET Opt 01 sar Oy ye eS PPM100 Partial Pressure Monitor ASRS Overview xiii Connector Pinouts WARNING e Read the entire Safety and Preparation for Use section of this manual before using the PPM100 e Read Chapter 1 for detailed instructions and
254. ressure Display as the main starting point in operating the PPM100 Pressure 13 14 t 1 66 07 z 5 20 11 3 8 07 MRAPA Menu Monitor Process Chart Help Figure 3 1 Pressure Display Pressure QuickKey Show the main Pressure Display screen The Pressure Display has three Horizontal Data i eal Bars each displaying a pressure or analog input Readings may be displayed in various Pressure formats and are updated twice a second The Pressure QuickKey is available in most displays other than the Pressure Display Menu QuickKey 19 Access the PPM100 Menu Use the Menu to modify important PPM100 and RGA parameters such as units communications clock touchscreen backlight audio RGA Menu ionizer settings etc The Menu QuickKey is available only in the Pressure Display Monitor QuickKey E Access the Monitor Display The Monitor Display shows up to eight partial pressure readings on a single screen including alarm and RGA status information Touch an Monitor individual Partial Pressure Box PP1 PP8 to modify its partial pressure measurement settings The Monitor QuickKey is available only in the Pressure display SRS PPM100 Partial Pressure Monitor A 3 6 QuickKeys AnaloglO QuickKey Ey Analogio Show the AnalogIO Display The AN Display consists of 1 four data boxes for analog signals top row AN1 AN4 and 2 four data boxes for CM readings bottom row CM1
255. ressure box every time 1 the pressure drops below the Alarm level low or 2 the pressure rises above the Alarm level high Important The alarm levels are independent from and must not be confused with the partial pressure limits used by process control rules However process control channels can also be programmed to activate every time an alarm is tripped for any of the partial pressure measurements Recommendation Use the Level Alarms to call attention to over under pressure conditions while you are not close to the controller PPM100 Partial Pressure Monitor ASRS Monitor Display 3 19 Alarm Submenu Display the Level Alarm Setup submenu for the selected partial pressure measurement PP1 PP8 Alarm Status Select level alarms enabled or disabled for the selected partial pressure measurement Choose Disabled to interrupt alarm notification and beeping Important Partial Pressure measurement level alarms are independent from and must not be confused with the partial pressure levels that can be associated to process control channels PP1 PP8 Alarm Level High Enter a value 1e 14 to le 5 for the alarm level high When a Level Alarm is enabled the PPM100 sounds an audible alarm and displays an Alarm prompt in the appropriate partial pressure box every time 1 the pressure drops below the Alarm level low or 2 the pressure rises above the Alarm level high PP1 PP8 Alarm Level Low
256. rnet is made in this LAN The network is completely within your laboratory or plant floor so security from an outside attack on this LAN is not a concern Of course this also means that you cannot access the LAN outside of the workplace However the PPM100 can be accessed from other computers on the same LAN PPM100 Partial Pressure Monitor ASRS Installing the EWS 7 11 Conventional LAN Configuration Chances are good that you are currently using a LAN with real IP addresses that is also connected to the internet through a firewall A firewall is a piece of hardware designed to exclude unwanted data traffic coming from the outside world A gateway is often employed in order to allow data traffic from the LAN to reach the outside world Within a LAN that is using real IP addresses you need to contact your network administrator in order to set up your EWS For details see the section Network Administration Concerns This configuration allows anyone on your LAN to use the EWS With a gateway in place it also allows the EWS to send out email to a computer which is outside the LAN However this configuration may not allow you to monitor or control your vacuum system from outside your workplace Talk with your network administrator for their advice on setting up this configuration to allow outside access to the PPM100 To maintain the security of the LAN your administrator may wish to place the PPM100 outside the firewall as described in
257. rns 0 if bit 2 is clear 1 if it is set RSSE 48 Sets the Process Status Enable register to 48 decimal bits 4 and 5 set RSSE 12 0 Clears bit 12 of the Process Status Enable register PPM100 Partial Pressure Monitor 6 58 Using USB Using USB Introduction Remote control of the PPM using USB requires An OS that supports USB Windows 2000 XP 98 Mac OS 8 or OS 9 Linux Application software your own Labview C etc program or a terminal emulator such as HyperTerm that can access a COM port USB driver for your OS USB hardware on your computer A USB cable SRS supplies the Virtual COM Port VCP driver from FTDI ftdi com for Windows and Mac OS Once installed VCP makes an attached USB device appear as if it were connected via a normal serial port COM port Programmatic control is possible in Windows using LabView the Windows VCOMM API or a 3rd party COM library RealBasic and LabView can be used on a Mac The baud rate start stop and parity are ignored by VCP The port number COM1 COM2 etc can be manually set in the VCD driver page of the Windows device manager Linux users should follow the link from the FTDI Driver Download page for Linux drivers Windows 2000 XP and 98 Installing VCP Virtual Com Port without PNP support Download the Windows driver set from http www thinkSRS com remember where you put it Unzip it into a temporary directory If the FTDI driver is already i
258. rogrammed manually or linked to the log partial pressure readings PP1 PP8 DAC Source This provides logarithmic analog outputs compatible with programmable logic controllers and data loggers Use analog outputs to control auxiliary vacuum equipment such as heaters actuators ion sources and throttle controllers CM Pmax P 10V Enter the full scale range of the capacitance manometer 0 1000 Torr connected to the port Note The full scale ranges most commonly encountered in commercial CM gauges are 50 and 100 mTorr and 1 2 10 100 and 1000 Torr Important Analog I O ports connected to capacitance manometer signals must be configured as inputs ADC Input for pressure measurement to be possible Direct pressure readings are possible only if PMax is programmed into the controller and CM Display is set to Linear AN1 4 CM1 4 Name Enter a unique name for the analog I O port and the CM Gauge The PPM100 assigns a unique name text string for each signal port Location names are displayed in the ID Box of the Pressure Display and also in the Data Boxes of the AnaloglO Display The same name is shared by both the AN and CM Data boxes linked to a common port The default location is the name of the port AN1 or CM1 Note Use the Location name to differentiate between identical gauges in multiple gauge setups For example consider a vacuum system with two identical CM gauges one connected to the High Vacuum Chamber
259. rsonnel only e The repair and or service of products exposed to vacuum systems can only be carried out if a completed Declaration of Contamination at front of manual has been submitted Stanford Research Systems reserves the right to refuse acceptance of vacuum equipment where the Declaration of Contamination has not been fully or correctly completed SRS also reserves the right to deny return authorizations for any vacuum equipment that could potentially be harmful to the personnel carrying out the repair and service of the product PPM100 Partial Pressure Monitor ASRS
260. rst digit is channel 8 the last digit is channel 1 A 1 means the input is high 0 means low Data that isn t available shows up as an asterix All pressure readings are expressed in the current units All ADC inputs are in Volts Example The returned string 06oct03 16 42 1 64 06 2 34 01 1 2 02 0 046 7 34 0 029 0 029 00000100 1111111 has the following interpretation e This data was sampled at 4 42 PM on October 6 2003 e PPI read 1 64e 6 in the current units e PP2 and PP3 were off no data available e PP4 read 2 34e 1 in the current units e PP5 through PP8 were off e CMI read 1 2e 3 in the current units e CM2 through CM4 were off e ANI read 0 046V e AN2 read 7 34 V e AN3 and 4 read 0 029 V e Process control channel 3 is active all others are inactive e All Process TTL inputs are high inactive Logging Interval The PLIN command sets queries the Logging Interval The parameter n is the Logging Interval in milliseconds This command will change the Log Length as well Note Times are stored in milliseconds but this timer is only accurate to within a second Examples PLIN Returns the Logging Interval n in ms PLIN 60000 Sets the Logging Interval to 1 minute 60 000 ms PPM100 Partial Pressure Monitor 6 32 Logging and Charts PLWT n Log Length The PLWT command sets queries the Log Length The parameter n is the Log Length in seconds This command will c
261. ry environments particularly in proximity to water sources GFCl s are generally regarded as an important defense against electrocution However the use of a GFCI in conjunction with PPM100 s and vacuum systems must not be regarded as a substitute for proper grounding and careful system design GFCI s must also be tested regularly to verify their functionality Always consult an electrician when in doubt e Do not use accessories not recommended in this manual as they may be hazardous e Always turn off the power to the instrument before connecting any cable to the controller or to the RGA Head PPM100 Partial Pressure Monitor ASRS ASRS Safety and Preparation For Use iii High voltage ion producing equipment such as a hot cathode ionization gauge or an RGA can under certain circumstances provide sufficient electrical conduction via a plasma to couple a high voltage potential to the vacuum chamber walls Any exposed conductive parts of a gauge RGA probe or vacuum chamber may attain high voltage potentials through this process if not properly grounded All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to the system earth ground at all times All parts of a vacuum system utilized with this or any similar high voltage product must be maintained at earth ground for safe operation There should be
262. s Consult Chapter 9 of the SRS RGA Operation and Programming manual to obtain troubleshooting information for all RGA error codes RGA Error LED A Red LED on the back plane of the RGA Electronics Box lights up to indicate the presence of detected Errors within the RGA Head All detected RGA Errors are prompted and described on the front panel of the PPM100 RGA Connection Indicators The status of the RGA RS 232 connection between the PPM100 and the RGA head is indicated by a connection icon at the upper right of the LCD screen w The connected symbol indicates that the RS 232 connection to the RGA head is fully functional and in normal operation mode A The unconnected symbol indicates that the RS 232 interface is configured for normal operation mode but that the PPM100 has failed to detect the RGA head P T Indicates that the HOST RS 232 port is in Pass Through Mode Event Logging All Process Control events are stored in the Process History log Use the History QuickKey in the Process Control Display to trace all channel actions and debug your process control settings Use the Overview QuickKey to list the state and rules for all the Process Control channels Remote Status Checking Status reporting commands are available to query the RGA Gauges and Process Control Status through the computer interfaces Users developing their own control software should integrate status checking commands into their programs and use them
263. s Inactive Pins are labeled T on the back panel and correspond to the Normally Closed pin of the SPDT relay SPDT Relay A Active Normally Open N O I Inactive Normally Closed N C O C Common Figure 5 5 Inactive relay connection Connection Schemes Process control relays have three pins and three connection schemes are possible Active Common The relay is wired as a single throw switch with connections to the Active and Common pins only Contact closure takes place during the ACTIVE state of the channel Contact is open during the INACTIVE state of the channel and during power shutdowns For example use this connection to turn a heater on and off using the relay as a power switch Heat is available only when the channel state is ACTIVE Power Ground SPDT Relay Active Heater Inactive Common Figure 5 6 Using a relay as a power switch Shown in Inactive state PPM100 Partial Pressure Monitor ASRS Process Control 5 13 In this case the Active and Common connections may be swapped Connecting as shown prevents power from appearing on the Inactive pin when the channel is Inactive Inactive Common The relay is also wired as a single throw switch but with connections to the Inactive and Common pins Contact closure takes place during the INACTIVE state of the channel Contact between the pins is also established during power shutdowns fail safe state Fo
264. s queries the Initial Mass for the MassSpec display analog scan The parameter n is the mass in AMU from 1 to the Final Mass 1 The default is 1 Examples SCMI Returns the Initial Mass SCMI 1 Sets the Initial Mass to 1 AMU PPM100 Partial Pressure Monitor 6 36 MassSpec Display SCAN 7 i Analog Scan On Off The SCAN 1 command starts analog scanning in the MassSpec display Any current scan is aborted the scan data is lost and a new scan is started The SCAN 0 command stops analog scanning in the MassSpec display Current scan data is preserved until scanning is started again These commands have an effect only when the PPM100 is in the MassSpec display The SCAN query returns 1 is a scan is in progress 0 is not Example SCAN 1 Start analog scanning in MassSpec Display only SCAN Returns 1 is a scan is in progress OSCC MassSpec Complete LCPN 7 x The OSCC query returns 1 if a MassSpec has been completed a complete Mass Spectrum is available and 0 otherwise Use the OSCC query to determine whether mass spectrum data is available for all masses in the scan range before attempting to read the data Example OSCC Returns 1 if a complete Mass Spectrum is available Chart MassSpec Pmin The LCPN command sets queries the value of the Chart MassSpec Y Axis Pmin The parameter x is a pressure expressed in the current units Examples LCPN Returns the value of Pmin in the current pressure units LCPN 1 3e 1
265. s REMAIN SET until read cleared by CLS or power up with PSC enabled For example if AN1 is out of range bit 4 will become set Reading this status register will clear the bit However if AN1 remains out of range then bit 4 will become set again within 0 5 second This can lead to repeated SRQs if the appropriate enable bits are set In this case the SRQ handler should not just read the status to clear the bit but also deal with the actual cause in this case why is the signal at AN1 out of range and remove the source of the problem Examples GSSW Returns the Gauge Status register 0 65535 GSSW 14 Returns 0 if bit 14 Scan_Done is clear 1 if it is set PPM100 Partial Pressure Monitor 6 56 Status Reporting GSSE 7 i j Gauge Status Enable The GSSE i command sets the Gauge Status Enable register to the decimal value i 0 65535 The GSSE i j command sets bit i 0 15 to j 0 or 1 The GSSE query returns the value 0 65535 of the Gauge Status Enable register The GSSE i query returns the value 0 or 1 of bit i 0 15 When a bit becomes set in BOTH the Gauge Status register AND the Gauge Status Enable register bit 2 GERR of the Serial Poll Status is set This causes an SRQ if bit 2 in the Serial Poll Enable register is set To clear a bit in the Gauge Status use GSSW Examples GSSE Returns the Gauge Status Enable register 0 65535 GSSE 15 Returns 0 if bit 15 is clear 1 if it is set GSSE 48 Sets t
266. s and the web server Recommendation RGA_FIL_Lockout is one of the most useful remote control lines and is often used to interlock RGA Filament emission For example the RGA_FIL_Lockout line is often connected to the logic output of the mechanical position indicator of a load lock s vent valve If the vent valve is opened indicating that high pressure is present in the load lock chamber the RGA Filament shuts down and any attempt to turn it back on is denied effectively protecting its filament PPM100 Partial Pressure Monitor ASRS Process Control Worksheet 5 23 RGA_Key_Disable Pin 7 Trigger mode Level LOW Disable front panel RGA Keypad i e black buttons Debounce time 50 ms Prerequisites e None HIGH allows full manual control of the RGA from the front panel RGA Keypad FILAMENT and EMULT black buttons If unconnected this pin will be HIGH and the RGA Keypad is fully operational default LOW locks out some of the RGA Keypad functionality the FILAMENT and E MULTIPLIER keys cannot be used to turn the filament or electron multiplier on as long as this line remains LOW Turning off is unaffected The Power red button is unaffected by this pin Recommendation Use this pin to protect the filament or electron multiplier during a process Clear_Data_Log Pin 10 Trigger mode Edge J Clear the data log Debounce time 50 ms Pulling the Clear_Data_Log control line LOW after it has been high for at l
267. s available for all channels making it possible to manually operate channel relays and TTL outputs directly from the front panel Manual control of the channels is performed from the Process Control Display Use the Process or Back to Process QuickKey to bring up the Process Control Display screen This display consists of eight Channel Data Boxes each displaying state and configuration information for a process control channel Process EN gt Process ROUGH VALVE 1 CLOSED Inactive Manual OPEN Inactive Manual FORE VALVE 2 GATE VALVE 3 CLOSED Inactive Auto Inactive Manual VENT VALVE 5 VENTING Inactive Manual Channel 6 6 Inactive Manual Channel 7 Inactive Manual Channel 8 8 Inactive Manual Keg Back Py i Pressure History Overview Pressure Help Figure 5 1 Process Control Display Touch a Channel Data Box to choose a channel state Active Inactive or Auto or edit the channel rules and labels PPM100 Partial Pressure Monitor 5 8 Process Control 14 15 GATE VALVE 3 FORE STATUS 4 CLOSED CLOSED Ok Inactive Inactive Inactive Manual Auto Manual Biieeamea channels 8 Inactive Inactive Inactive Manual Manual Manual g Edit rules f Back P9 a Pressure HEt Messaoes Iyiew Pressure Help Figure 5 2 Channel Options Choose Inactive to manually DEACTIVATE the channel Active to manually ACTIVA
268. s continue PPM100 Partial Pressure Monitor ASRS Remote Programming 6 15 Command Syntax ASRS The four letter mnemonic shown in CAPS in each command sequence specifies the command The rest of the sequence consists of parameters Parameters shown in are not always required Generally parameters in are required to set a value in the PPM100 Multiple parameters are separated by commas Multiple commands may be sent on one command line by separating them with semicolons The present value of a parameter may be determined by sending a query command e Commands that MAY be queried show a question mark in parentheses after the mnemonic e Commands that are ONLY queries have a after the mnemonic with no parentheses e Commands that MAY NOT be queried have no A query is formed by including the question mark after the command mnemonic and omitting the queried parameter from the command The query parameters shown in are NOT sent with a query The query returns the value of these parameters Values are returned as a string of ASCII characters unless otherwise noted Do NOT send or as part of the command For example the command sequence GADM i j is used as follows GADM 1 0 Set the Analog Port 1 to ADC Input mode GADM 1 Query the mode of Analog Port 1 Variables are defined as follows i j d n p integers x real number s t text strings Commands to set values which
269. s start by touching the AnalogIO Quickey in the Monitor Display Screen This brings up the AnalogIlO Display Screen with 1 four data boxes for analog voltages top row AN1 AN4 and 2 four data boxes for CM readings bottom row CM1 CM4 Select the CM port corresponding to your capacitance manometer by simply touching its box for example touch CM3 for a capacitance manometer connected to the AN3 port This brings up the Monitor AnalogIO Setup menu for the selected CM box PPM100 Partial Pressure Monitor ASRS PPM100 Quick Setup 1 17 Analogl0 Monitor AnalogI0 Setup AN3 t AN2 ADC or DAC 0 273 V i ADC input CM 10Torr Dose Valve A DAC source Manual out ADC input PP6 out Manual fe CM2 cm3 CM PMax P 10V 1 3 Volts when source Manual 153 DAC OUTPUT 8 73 Torr DAC OUTPUT 10 0 Torr 0 000 AnaloglO Dose Valve CM 10Torr Argon buff CM display Off Linear Off Linear Back P a pt Back Fy a Pressure Monitor Help AnalogiO Help Figure 1 8 The AnaloglO QuickKey and AnalogIO Display screen Several parameters must be adjusted in order to display capacitance manometer readings ADC or DAC The I O Mode should be set to ADC Input so that input voltages are read from the port CM Pmax P 10V Pmax is the full scale range of the capacitance manometer i e the pressure at which its output signal 10 Vdc Its value is usually indicated on the outer casing of the gauge head The full
270. safety instructions of the SRS RGA100 200 300 Head Read and strictly follow all installation instructions in this chapter to ensure that the performance of this instrument is not compromised by an incorrect installation Read and follow all safety and warning instructions in this manual to minimize the risk of injury and death to yourself and others DO NOT power up the instrument until specifically directed by the instructions Checklist Open the box es and inspect all components of the PPM100 system Report any damage to Stanford Research Systems immediately Compare the contents of the shipping boxes against your original order and the checklist below Report any discrepancies to Stanford Research Systems immediately Standard Equipment Supplies a PPM100 Partial Pressure Monitor Box Power cord Operating Manual and Programming Reference Three 3 Position Terminal Block Plug for AUX 15 Vdc output O OD O D Process Control Module Preinstalled at the factory Includes 1 one DB37 Digital I O Connector male 2 two 12 position Terminal Block Plugs for relay connections D GPIB USB Computer Interface Preinstalled at the factory Web Interface Preinstalled at the factory Optional Equipment Q Rack Mount Shelf for up to two PPM100 s SRS O100IGRM Q SRS RGA100 200 300 Mass Spectrometer Includes DB9 DB9 cable for serial connection to PPM100 ASRS PPM100 Partial Pressure Monitor
271. safety information regarding the installation of the PPM100 and connection to the RGA Head 15 V AUX Power Connector Use this 3 pin 15 V 100 mA max connector to provide electrical power to standard i e non heated capacitance manometers Process Control Relay Contacts Use these two 12 Position Terminal Block Plugs to connect to the eight process control relays All relays are SPDT form C 5A 250VAC 30VDC resistive load only Process Action Relay Common Connected to Rear Panel Label INACTIVE Normally Closed pin NC I ACTIVE Normally Open pin NO A Block 1 Block 2 1 13 CH5 Figure iii The 2 12 position terminal blocks for process relay connections Block Pin Process Channel Process Control Label Relay Pin 1 1 1 Common C C 2 Inactive 1 NC 3 Active A NO 4 2 Common C C 5 Inactive 1 NC 6 Active A NO 7 3 Common C C 8 Inactive 1 NC 9 Active A NO ASRS PPM100 Partial Pressure Monitor Overview Process Channel Process Control Label Relay Pin Common C Inactive 1 Active A 2 13 5 Common C C 14 Inactive 1 NC 15 Active A NO 16 6 Common C C 17 Inactive 1 NC 18 Active A NO 19 7 Common C C 20 Inactive 1 NC 21 Active A NO 22 8 Common C C 23 Inactive 1 NC 24 Active A NO
272. screen backlight The parameter i selects On 1 or Off 0 Examples BLIT Returns if the backlight is On or 0 if Off BLIT 1 Turns the screen backlight On BLOF n s Backlight Turn Off Time The BLOF command sets queries the Backlight Turn Off Time of day The parameter n is the time of day in milliseconds from midnight or the string s is the time in the format 9 30PM Do not use both n and s in the command The BLOF query returns the value n in ms Examples BLOF Returns the Turn Off Time in ms BLOF 9 30pm Sets the Turn Off Time to 9 30 PM BLOF 77400000 Sets the Turn Off Time to 77 400 000 ms after midnight 9 30PM Backlight Turn On Time BLON n s The BLON command sets queries the Backlight Turn On Time of day The parameter n is the time of day in milliseconds from midnight or the string s is the time in the format 9 30PM Do not use both n and s in the command The BLON query returns the value n in ms Examples BLON Returns the Turn On Time in ms BLON 9 30pm Sets the Turn On Time to 9 30 PM BLON 77400000 Sets the Turn On Time to 77 400 000 ms 9 30PM Backlight Delay BLTD n The BLTD command sets queries the Backlight Saver Delay The parameter n is the Delay in milliseconds Examples BLTD Returns the Backlight Saver Delay in ms BLTD 300000 Sets Delay to 5 minutes 300 000 ms PPM100 Partial Pressure Monitor ASRS System 6 45 System Commands NAME
273. similar scheme could be used to monitor sequentially two separate sensors from a single input reader signal multiplexing In this case the reader s input is connected to Common and sensors and 2 connect to pins A and I of the relay respectively Activate the channel to monitor sensor 1 or deactivate the channel to switch to sensor 2 SPDT Relay Common Figure 5 9 Using a relay as a signal multiplexer Shown in Inactive power off state Connection Tips Both Terminal Block Plugs can be disconnected from the back panel making it possible to transfer the controller to a different location without having to undo the relay connections Spare Terminal Blocks are also available from Stanford Research Systems for lab environments where more than one wire connection scheme is required Make sure all wire ends are securely fastened to the Terminal Block Plugs always tighten the wire lock screws Block 2 Relays 5 8 must be disconnected from the process control board in order to be able to access its side wire lock screws Gently pry the block out with a small screwdriver using the access slots in the panel above and below the connector Relays are used in vacuum systems for many different purposes e Power distribution switching to system components such as gate valve actuators heating jackets etc e Interlocking Many pump controllers include relay closure detection ports designed for interlocking purposes e Sig
274. single mass partial pressure reading 5 79 08 originating from the RGA head and usually corresponding to the partial pressure contribution from a single gas to the mixture s total pressure Alarm Low Argon Each Partial Pressure Data Box contains four lines of information top to bottom e ID Label PP1 PP8 source identification labels shared by both Monitor and Pressure Displays and gas mass amu units e RGA Reading Status Partial pressure reading or RGA Head status NO DATA is displayed when partial pressure measurements are disabled for the box LEAKTREND is displayed if any Data Bar in the Pressure Display is in Silent or Audio Leak Trend mode e Alarm Display Status Alarm High Low is displayed and the controller beeps intermittently when measurements and alarms are enabled and a level alarm condition is met Disabled is displayed on this line when partial pressure readings are disabled for this box e Gas name The name of the gas associated to the single mass being measured is displayed on this line Touch a Partial Pressure Data Box to display its Monitor Setup menu and edit its partial pressure setup parameters ASRS PPM100 Partial Pressure Monitor 3 16 Monitor Display Monitor Setup Menu Partial Pressure Setup Parameters PP1 WARNING Read the entire Safety and Preparation for Use section of this manual before using the PPM100 Read Chapter 1 for detailed instructions and safety information
275. sor postion Read MassSpec Peak The PACB query returns the highest pressure within a 1 AMU wide region centered on the cursor position as set by the CTOM command Note Use this command only if a MassSpec is complete as indicated by the OSCC query Example PACB Returns the highest pressure within 0 5AMU of the cursor postion PPM100 Partial Pressure Monitor 6 38 Process Control Process Control Commands RDES 7 d s RLCL d s Channel Description The RDES command sets queries the process channel Description string The parameter d selects a process channel 1 8 and is required The string s is the channel description Examples RDES 3 pump Sets the Description of process channel 3 to PUMP RDES 3 Returns the Description of channel 3 PUMP in this case Channel Active Message The RLCL command sets queries the process channel Active Message The parameter d selects a process channel 1 8 and is required The string s is the label Examples RLCL 1 on Sets the Active Label of process channel to ON RLCL 1 Returns the Active Label of channel 1 ON in this case RLOP 7 d s Channel Inactive Message The RLOP command sets queries the process channel Inactive Message The parameter d selects a process channel 1 8 and is required The string s is the label Examples RLOP 1 off Sets the Inactive Label of process channel 1 to OFF RLOP 1 Returns the Inactive
276. ss Note e The filament must already be turned on before degas may be initiated e Press the abort button to stop the degas process early e No partial pressure readings can take place while RGA degas is in progress Hence all process control channels must be switched to a safe manual state before degas may be performed lonization Source Use this button to select where the ions are formed Select RGA Filament to allow partial pressure measurements and analog scanning only if filament emission is present Select External to allow partial pressure measurement and analog scanning even in the absence of filament emission Tip Select External if you wish to use the RGA to monitor ions originating somewhere other than the ionizer region or from an ionization method different from electron impact PPM100 Partial Pressure Monitor ASRS RGA Menu 3 49 ASRS RF7 Error Handling Select Ignore to ignore RF7 Errors reported by the RGA head Select Warn to acknowledge RF7 error reports and prevent the RGA from operating under conditions where unreliable measurements are possible Tip Select Ignore for RGA300 models where RF7 errors are common while the unit is warming up Consult the RGA s Operating Manual for details on the causes troubleshooting of RF7 error reports Leak Rate Coefficient Enter a Leak Rate Coefficient for your system The range is 1 to 3000 and the default is 50 The Leak Rate Coefficient is used by
277. ss only to those IP addresses entered in this menu Both types can used together The PPM100 requires the use of at least one type of security Security Type Choose the type of web security Password IP Checking or Both Password requires the entry of the Web Password from the user s browser before accessing any PPM100 web pages IP Checking only allows computers with trusted IP s to access the web server Only users with static IP addresses can use this feature Do not use this if you use a dial up account or DHCP account to access the internet These accounts have dynamic i e temporary addresses Both requires the password AND a trusted IP address checking before web access to PPM100 is allowed The default is Both Change this setting to Password when using a dial up connection PPM100 Partial Pressure Monitor 3 58 Remote Menu Password Enter a password for web access When accessing the PPM100 web server from your browser it will ask for this password before any pages will be displayed Trusted IPs Enter trusted IP addresses When IP Checking security is enabled the web server only allows access to those IP addresses entered in this menu A trusted range of IP addresses allows all users on a local network or subnet to access the web server Use this in a laboratory environment where groups of computers and users are on a single subnet Enter individual IP addresses for remote users with static IP addresses o
278. ssible to manually control channel relays and TTL output levels directly from the front panel Manual relay control makes it possible to use the PPM100 as a standalone controller capable of manually or automatically controlling the operation of any standard vacuum system All process control events are automatically time stamped and recorded in memory Event Log so they can be reviewed at any time Use the History button on the Process Control panel to access the Process Control Event Log at any time Why Use Process Control One of the best ways to improve process yield and reduce system failure is through system automation This is especially important in complex systems or in systems operated by inexperienced personnel The process control capabilities of the PPM100 PPM100 Partial Pressure Monitor 2 12 PPM100 Basics make it unnecessary for the operator to be physically present to open valves and actuate switches at the proper time In fact a PPM100 with an embedded web server provides remote control capabilities from anywhere in the world Use PPM100 Process Control to e Automatically control vacuum components such as valves heaters power supplies shutters and other process equipment e Interlock process control operations with external signals that are related to time pressure temperature gauge status system status TTL logic levels and other parameters e Automatically control pumpdown venting and load lock procedu
279. st if necessary Move the gauge to the point of measurement or increase conductance Temperature compensated gauges need up to one hour to completely warm up Contact SRS Check power supply voltage and current limit settings Do not use the AUX 15V supply for heated gauges Adjust the Zero calibration using the Gauge Setup menu Perform a Trim Pot Zero Adjustment Consult Chapter 3 for details Gauge Pmax reading is Off Vout 10V when P Pmax Gauge reading is too low and unresponsive to pressure changes Gauge reading is OVERLOAD The gauge s gain calibration has drifted This is a rare problem Gauge is unpowered Gauge output circuit is faulty The pressure output signal from the CM exceeds 12V Follow the manufacturer s recommendations to adjust your gauge s calibration trim pots Check your cable and connections check the current limit in your power supply check the power supply operation Contact the gauge manufacturer Reduce the pressure at the CM until it is below Pmax PPM100 Partial Pressure Monitor 8 12 Basic Troubleshooting Process Control Symptom Process Control Problems Possible Cause Solution Channel output does not respond to input signal Channel activates at wrong setpoint or time Incorrect rules Bad connection Delay is too long Hysteresis is too large MassSpec Display is active analog scan in progress I
280. stakenly switched into an output and no voltage or capacitance manometer readings are available to that channel This rule also applies when the analog input is in overload e During a power shutdown all relays are de energized and in the INACTIVE state Common and Inactive pins connected This must be carefully considered during the design and implementation of your process control setup to assure proper fail safe operation during power loss and after power recovery e The PPM100 controller does not automatically turn back on once power is re established after power loss Instead the user must turn the unit back on manually During this time all relays are de energized and in the INACTIVE state fail safe state e When the PPM100 is turned on all channels are set to Manual Mode and INACTIVE This is considered the fail safe operating mode The user must PPM100 Partial Pressure Monitor 5 10 Process Control set the required process control channels back to Auto to restart automated process control every time the PPM100 controller is turned on PPM100 Partial Pressure Monitor ASRS Process Control 5 11 Relay Connections ASRS Each process control channel has an associated relay The relay specifications are Configuration SPDT Single Pole Double Throw Contact Rating 5 A 250 VAC 30 VDC resistive load only Contact Material AgsnOInO Use the two 12 Position Terminal Block Plugs located on the back panel to connect t
281. stalled interfaces are active at all times WARNING The SYNC query is used when beginning a remote session SYNC forces the settings of the PPM100 to match those of the RGA This is important if the RGA settings have been changed without the PPM100 knowing about it If the RGA has only been under PPM100 control then SYNC is unnecessary The SYNC query takes up to 30 seconds to complete SYNC returns the value of the RGA status byte see the RGA manual for details Communicating With RS 232 The PPM100 uses a female DB9 connector labeled HOST RS 232 for RS 232 serial communications The female DB9 connector is configured as a DCE transmit on pin 2 receive on pin 3 device and supports CTS DTR hardware handshaking The CTS signal pins 1 6 and 8 is an output indicating that the PPM100 is ready while the DTR signal pin 7 is an input that is used to control the PPM100 s data transmission Ground is pin 5 If desired the handshake pins may be ignored and a simple 3 wire interface pins 2 3 and 5 may be used The RS 232 interface Baud Rate Word Length Parity and Flow Control must be set in the Main Remote RS 232 menu WARNING The VERB command sets the instrument s RS 232 verbosity When controlling the PPM100 from a computer program set VERB to 0 for terse return values and error messages When using a terminal program set VERB to 1 for descriptive return values and error messages Set VERBO first when conne
282. step and transmitted to the PPM100 over RS 232 Analog scanning simplifies the detection of mass peaks for individual component gases and provides the most direct view of the peak shapes and resolution of the mass spectrometer Tip Use the Analog MassSpec Display mode to identify and select single masses during the Partial Pressure Measurement setup Partial pressure measurement with a residual gas analyzer requires that the filament be turned on The PPM100 includes a FILAMENT button on its front panel for manual activation of partial pressure measurements Press the E MULTIPLIER button to activate the electron multiplier detector during analog scans Filament emission and electron multiplier can also be activated remotely through 1 software control 2 Remote TTL control and 3 web interface requires Web Interface Opt 01 Degassing of the SRS RGA ionizer can be activated from the PPM100 front panel Consult Chapter 3 for details on menu options For More Information Chapter 1 includes all the installation and setup information required to set up your PPM100 controller and its gauges Chapter 3 describes in detail the menu based user interface including all menus required to configure the PPM100 for operation with an SRS RGA100 200 300 and up to four capacitance manometers Analog I O Ports AN1 4 All PPM100 controllers have four analog input output ports BNC connectors on the back panel Their range is 12 V with 14 bit in
283. t Baud Rate Select the RS 232 Serial interface Baud Rate 300 115 2k The available baudrates are 300 1200 2400 9600 19200 28800 38400 57600 and 115200 Word Length Select the RS 232 Serial interface Word Length 7 bits 8 bits 8 bits is standard Parity Select the RS 232 Serial interface Parity None Even Odd None is standard Flow Control Select the RS 232 Serial interface Flow Control None Xon Xoff Hardware None is standard At high baud rates gt 19200 flow control may be necessary to prevent data loss Check the host serial interface for the type of flow control in use RGA Pass Through Select Pass Through RGA to activate the RS 232 Pass Through Mode of the PPM100 Select Normal Operation default to exit the Pass Through Mode and resume normal PPM100 operation While in Pass Through Mode the PPM100 RS 232 interface passes all data from the host computer directly to the RGA head and all data from the RGA head is passed directly back to the host computer The PPM100 RS 232 port uses serial communication parameters identical to the RGA head not the parameters previously set in this menu WARNINGS e All PPM100 Partial Pressure and analog MassSpec measurements are suspended while in the Pass Through Mode e All RS 232 communication parameters must be manually restored when the PPM100 is switched back to Normal Operation e No partial pressure readings are performed by
284. t Best for trend analysis Silent Audio Leak Trend A stamp sized P vs Time plot of the most recent points It also includes a small instantaneous pressure display next to the plot When Audio Leak Trend is selected an audio signal whose frequency is proportional to the pressure provides a means to hear pressure transients eliminating the need to look at the front panel while detecting leaks To provide optimum data acquisition rates at the selected mass all other partial pressure reading boxes are disabled by this display mode Auto Scaling Bar Graph Three decade logarithmic bargraph display scaled about the current readings Full Range Bar Graph Fifteen decade logarithmic bargraph display covering the entire useful range of the instrument 10 to 10 Torr The scale covers the entire range from UHV to atmosphere Leak Rate Calculate and display the Leak Rate based on the partial pressure Use this for leak testing Status Information Display additional information about the gauge status Use this to troubleshoot fault conditions The Pressure Display is also the only screen that provides access to the process control and chart logging modes of the PPM100 For More Information Consult Chapter 3 for a complete listing of menu items related to data display formats Chapter 1 discusses examples of common applications of the different display formats in its Pressure Measurement section Pressure Units
285. t is already on and emitting electrons PPM100 Partial Pressure Monitor 1 28 MassSpec Display e The electron multiplier is automatically shut down if the filament is turned off in the middle of an analog scan This is to protect the electron multiplier from overpressure e The electron multiplier is shut down when the MassSpec Display is exited Using the Display Touch the M Init and M Final buttons to adjust the mass range of the spectrum Use the cursor button to move the vertical cursor and obtain partial pressure information at a specific mass Use the left and right arrows to step the cursor in 1 amu increments over the mass spectrum while displaying the mass and partial pressures of the mass peaks detected after each step Use the up and down arrow button to autoscale the vertical axis Eganing SGah rate z FC 17 9 AML 1 54008 Torr gt Figure 1 26 Cursor display of Analog MassSpec The scan rate and RGA ionization parameters are adjusted through the RGA Setup menu which is accessed through the Main Menu Starting from the Pressure Display press the Menu QuickKey Once in the Main Menu touch the RGA button to access the RGA Setup menu Use this menu to 1 adjust ionizer parameters i e electron energy ion energy filament emission and focus voltage 2 change the noise floor i e scan rate for analog scans and 3 calibrate the detector Consult Chapter 3 for details on these menu items PPM
286. t the RGA Head mounting flange be properly connected to the facility earth ground Use a ground lug on a flange bolt if necessary e Perform regular electrical ground checkups on your entire vacuum system particularly if it is shared by multiple users running unrelated experiments During a ground checkup carefully examine all vacuum system components Are all exposed connectors and conductors on the vacuum chamber grounded Are all ground connections properly connected to a solid earth i e facility ground Some vacuum systems rely on water piping for the earth ground connection Proper ground connection can be easily lost by inadvertently inserting a plastic interconnect into the water lines Refer to the step by step vacuum system grounding test procedure in Chapter of this manual e Operation of this product with line voltages other than those accepted by the power supply can cause damage to the instrument and injury to personnel Burn Risks Another common safety concern for vacuum system operators is burns e Filament based devices such as Bayard Alpert ionization gauges and RGAs radiate heat to areas adjacent to the filament sometimes making them too hot to touch e Do not touch hot cathode Ionization Gauges and RGA s during degassing operation Serious burns can occur e Acetone toluene and isopropyl alcohol are highly flammable and should not be used near an open flame or energized electrical equipment Explosion Risks
287. t your final mass is within the mass range allowed by your RGA lt 100 for an RGA100 and so on Pressure Range This parameter allows you to set the minimum and maximum displayed pressure Rather than keying in a number as in the Mass Range parameters a drop down box is used to allow quick changes of scale Click on the drop down box and choose an exponent from 0 to 12 For each parameter this gives a range of 1 to 1E 12 in the pressure units in force on the PPM Noise Floor This parameter changes how fast the RGA performs a scan A drop down box is used to select a value from 0 7 If the noise floor is set to 7 the RGA scans very quickly If the noise floor is set to 0 the RGA scans very slowly The slower the scan the better the signal to noise ratio and the lower the detection limit ASRS PPM100 Partial Pressure Monitor 7 28 Using the EWS Email Notices This function allows configuration of the email notification feature In order to use email you must have entered a valid gateway address in the PPM100 A valid Simple Mail Transfer Protocol server SMTP address is also required The gateway address is required so the EWS can access the SMTP server The SMTP server is the machine typically outside your network that accepts email and routes it to the appropriate address These addresses should be obtained from your local network administrator A mnemonic address may be used only if the PPM100 has a valid DNS address entere
288. te Do not send other commands on the same command line after RST Do not send another command until RST is complete This takes about 10 seconds You can send a query command like OPC and wait for the response When the response comes the unit is ready Web Server Enable The WSEN command sets queries whether the Web Server Option is Enabled i 1 or Disabled i 0 Disable the web server to prevent web users from interfering with local computer control It may take up to 10 seconds for this to take effect Example WSEN Returns 1 if web server is Enabled 0 if Disabled WSEN 0 Disables the web server option PPM100 Partial Pressure Monitor 6 48 Interface PPM100 Partial Pressure Monitor ASRS Status Reporting 6 49 Status Reporting ASRS The PPM100 reports on its status by means of five status registers the Serial Poll Standard Event Error Gauge and Process Control status registers Status Registers In the PPM100 a status register is a read only 16 bit word where the state of each bit indicates a specific instrument state or condition Bits in status registers are set when their corresponding condition or status is met Except for the Serial Poll status bits once a status bit is set it remains set until cleared by a read with the appropriate status reporting command Whenever a status bit is set it remains set until read Some status bits report that a bit is set in another status register Resettin
289. testing procedures This display preserves the feel of the old analog needle displays preferred by some vacuum users Full Range Bar Graph Figure 3 9 Full Range Bar Graph display Best display to view the overall status of your vacuum system at any given time Fifteen decade logarithmic bargraph display covering the entire useful range of the instrument 10 to 10 Torr The scale covers the entire range from UHV to atmosphere Leak Rate Pressure Torr Leak Rate i Helium Figure 3 10 Full Range Bar Graph display Select this option to display leak rates calculated from the partial pressure reading and the system s user specified Leak Rate Coefficient Leak Rate Partial Pressure X Leak Rate Coefficient Status Information 1 24 07 Dperating normally Figure 3 11 Status Information display SRS PPM100 Partial Pressure Monitor 3 14 Pressure Display Use this display to learn more about the state of a data source This is especially useful if the gauge is in a fault or error condition Info Box The Info Box shows additional information related to the measurement 2 amu Torr Touch the Info Box to access the Measurement Setup Parameters for the displayed data Hydrogen This allows easy access to all setup parameters for the displayed measurement For example touch the Info Box of a PP1 Data Bar to access its partial pressure measurement setup parameters i e PP1 monitor setup screen
290. teway Address from your network administrator The Gateway is used by the web server s e mail notification feature Web Queue Display the web transmit and receive buffers The PPM100 buffers the most recent characters received and transmitted over the interface The Queue display shows the interface history Press any QuickKey other than Help to exit from this display The upper half of the Remote Queue display is the Receive Queue These are the most recent characters which have been received by the PPM100 The lower half of the Remote Queue display is the Transmit Queue These are the most recent characters which have been placed in the output buffer As long as the web server is enabled and functioning properly there will be continuous traffic on this queue Port Number Change the HTTP port number of the web server The default port is 80 and should NOT be changed except in the following situations 1 You are using multiple PPM100 s in a network behind a NAT network address translation router In this case all of the PPM100 s will appear at the same IP address to the outside world they will have different IP addresses on the local network Each PPM100 needs to be on a different port and the router must be configured to forward port requests to the correct PPM100 From the outside each PPM100 is accessed at its own port number but the same IP address 2 If you are experiencing attacks on port 80 that block access to the PPM1
291. the ethernet connector on the rear panel should be illuminated Verify this light is on If it does not light there may be a hardware problem with the crossover cable or your PC network card The IP address on the front panel of the PPM100 matches the IP address you typed in on your browser The ethernet cable is connected from the PPM100 to a hub or other ethernet port not directly to a PC The cable is NOT a crossover cable If the web page display seems garbled or if parts are incomplete try waiting a few seconds and reloading the page in your browser The most likely cause for this problem is that the web server has not had time to initialize PPM100 Partial Pressure Monitor ASRS Installing the EWS 7 15 ASRS Note Your local network environment may prohibit your ability to get web pages from the EWS from outside your facility See the section below entitled Network Configurations and consult your network administrator for possible solutions Configuring EWS Security You must decide if the PPM100 EWS offers enough security for your application The EWS employs a number of security measures however no network can be made entirely secure All security measures are implemented from the front panel of the PPM100 and cannot be changed via the web interface This ensures that only authorized users set security levels Monitoring of the PPM100 through the EWS is allowed for all users The security measures are designed
292. the operation of this product Do not remove the covers while the unit is plugged into a live outlet e Always operate the unit in its proper horizontal orientation Do not operate the unit on its side as foreign objects or liquids may enter through the ventilation slots creating an unsafe condition e Do not use this product if it has unauthorized modifications Unauthorized modifications may result in fire electric shock and other hazards e Do not install substitute parts or perform any unauthorized modifications to this instrument e The line fuse is internal to the instrument and may not be serviced by the user If the red Line LED does not turn on when line power is provided contact Stanford Research Systems e The PPM100 has a detachable three wire power cord for connection to the power source and to a protective ground The exposed metal parts of the instrument are connected to the outlet ground to protect against electrical shock Always use an outlet which has a properly connected protective ground Consult with an electrician if necessary Be aware that grounding this product does not assure proper grounding of the rest of the vacuum system e The most important safety measure required to eliminate electric shock risks is to provide an earth ground to all conductive parts of the vacuum chamber gauges and controllers e GFCI Ground Fault Circuit Interrupter protected outlets are often available in production and laborato
293. the PLCL command Example PLCL Clear the Data Log PLGF Read Data Log PLGN The PPM100 logs all pressure analog process readings in the Data Log To read the log use the PLGF query to return the most recent entry in the log Then issue PLGN repeatedly to get the rest of the entries until the string amp is returned signaling that all entries have been read This command pair retrieves the log as it was when the PLGF command was received Log entries created while you download the log do not appear in it If you try to retrieve history over two interfaces at the same time you will not get the complete history on either WARNING The Embedded Web Server continually issues PLGF and PLGN If you have the web server option you must disable it from the Remote Web menu or with the WSEN command to use these commands These commands return a string with the following fields separated by commas e Date in DDMMYY format 06oct03 e Time in 24 hour format 16 42 e PPI data e PP2 data e PP3 data e PP4 data e PP5 data e PP6 data e PP7 data e PP8 data e CMI data e CM2 data PPM100 Partial Pressure Monitor ASRS Logging and Charts 6 31 PLIN n ASRS e CM3 data e CM4 data e ANI data e AN2 data e AN3 data e AN4 data e Process control bitfield The first digit is channel 8 the last digit is channel 1 A 1 means the channel is active 0 means inactive e TTL input bitfield The fi
294. the PPM100 to calculate and display leak rates i e gas throughput from partial pressures in the Pressure Display choose Leak Rate for the data bars Leak Rate Partial Pressure X Leak Rate Coefficient Tip The Leak Rate Coefficient is often interpreted as the effective pumping speed of the vacuum system for the single gas being measured For example If helium is the gas being measured during leak testing and the effective pumping speed of the vacuum system for He is 50 L sec a partial pressure of 10 Torr of He would be displayed as a leak rate of 5x10 Torr L s into the vacuum system This value is displayed directly in the Pressure Display if the Data Bar for helium is set to Leak Rate PPM100 Partial Pressure Monitor 3 50 Utilities Menu Utilities Menu Touch Utilities in the Main menu to display the Utilities menu Main Utilities T4200 08 jan00 a Back P9 Pressure Monitor Process Main Help Figure 3 27 Main Utilities menu Time Date Adjust the time and date settings of the PPM100 The clock is used to e log pressure and voltage readings data log e log process control events process history e to trigger process control events at specific times All times are represented in 24hr format 18 30 is 6 30pm The current time is displayed at the top of the screen in most displays The clock requires adjustment after daylight savings corrections take place Volume C
295. the next section Conventional LAN Connection Vacuum Chamber PPM100 Ss S Ethernet ee Hub N a Firewall Gateway Lab PC 3 The Internet Lab PC 1 Figure 7 5 Conventional LAN Configuration ASRS PPM100 Partial Pressure Monitor 7 12 Installing the EWS Outside Firewall Configuration Here the PPM100 is connected to the world wide web via a router outside the workplace firewall This connection requires setting up real network parameters as discussed in the previous sections and your network administrator should work with you to set up this type of connection This configuration allows you to interact with your instrument from any computer anywhere on the internet via a standard browser You can monitor your data control relay states and even receive email notification about relay state changes from any location There is a trade off for all this flexibility and power Once your instrument is accessible throughout the world security issues must be addressed See Configuring EWS Security later in this chapter World Wide Web Connection eee Firewall Gateway ieee The Internet yO PPM100 _ Ethernet Hub a Lab PC 1 T Vacuum Chamber Lab PC 2 Lab PC 3 Figure 7 6 Outside Firewall Configuration PPM100 Partial Pressure Monitor ASRS Installing the EWS 7 13 ASRS Testing with a Crossover Cable Before putting your instrument on the web it is best to test it
296. thinkSRS com e Unstuff it e Drag it into the System Extensions folder e Reboot e Open AppleWorks and Open a new Comm Module e Select USBSerial instead of modem e Begin a session and check echo locally and carriage return on line feed If the PPM is connected and turned on you should be able to type in IDN lt Enter gt and get the instrument identification string in response PPM100 Partial Pressure Monitor ASRS 7 1 Chapter 7 Embedded Web Server EWS The embedded web server EWS provides an ethernet connection between the PPM100 and a network The EWS allows monitoring and control of the PPM100 from a local network or the world wide web The EWS allows you to e Monitor and control the PPM100 from virtually anywhere in the world e View vacuum system data using a standard web browser e Get log data from the PPM100 without writing a custom program In This Chapter EWS Quick Start Connect the PPM100 to Your Network Set the Network Addresses Set the Security Level Enable the EWS Access the Web Page Installing the EWS Network Administration Concerns Static IP Port Number Setting Network Addresses Enable the EWS System Name MAC Address Choosing a Network Configuration Crossover Cable Configuration Internal LAN Configuration Conventional LAN Configuration Outside Firewall Configuration Testing with a Crossover Cable Testing Within a Network Configuring EWS Security Web Server Enable We
297. to prevent unauthorized users from making changes to the PPM100 settings Web Server Enable If you use your EWS only during certain hours simply disable it when not in use No web monitoring or control of the PPM100 is possible when the EWS is disabled This setting can only be changed from the front panel Fort number 133 Queue 80 gt E E Back By i Pressure Monitor Process Remote Help Figure 7 7 Web server enable disable Important Whenever network setup information is changed you must wait at least 5 seconds for the changes to take effect Web Control Enable If you only wish to monitor your vacuum system from the web you should disable Web Control Web Control of the PPM100 includes setting relay states running scans and configuring email When control is disabled the EWS does not allow changes to the PPM100 settings If you allow web control make sure that the security features below are enabled Touch Control in the Main Remote Web menu to access the control and security features of the EWS PPM100 Partial Pressure Monitor 7 16 Installing the EWS Main Remote web Web server Disabled Control Main Remote Wweb Contral Web control 8 Disabled w 14 06 A IP Address 133 208 184 84 151 Subnet mask 255 255 255 0 18 a 0 0 0 0 Gateway 133 208 184 84 1 Port number 13 80 Ey Trusted IPs Security type Both Agt Password R5232 port mode 8 Normal
298. ton The function of the button changes depending upon the current state of the RGA For example if the RGA s electron multiplier is off when this page is loaded into your browser the button s label will read Click to Turn Multiplier On and clicking the button will send a request to activate the electron multiplier If the RGA s multiplier is already on when the page is loaded the label will read Click to Turn Multiplier Off and clicking the button will send a request to turn the filament off Note that your RGA must be equipped with an electron multiplier RGA Option 01 for this button to have physical meaning Scanning Parameters If you are satisfied with the state of the filament and multiplier you may still need to adjust some parameters before your scan begins Each parameter and its function is described below When you are satisfied with the parameters press the button labeled Click to Set Parameters The changes you made will be sent to the PPM and RGA and the page will be re drawn to reflect these changes If you are happy with the changes Click to Accept all Parameters and Begin Analog Scan Note Your scanning parameter changes are NOT submitted until you press the button labeled Click to Set Parameters Do not press Click to Accept all Parameters and Begin Analog Scan before your changes are submitted Mass Range Set the initial and final mass for your scan by typing values in AMU into these boxes Make sure tha
299. tput of the CM to zero at base pressure Use the trim pot adjustment regularly to adjust the internal zero of the capacitance manometer head The standard trim pot adjustment procedure is simple 1 Connect the CM to a vacuum chamber with a pressure lt 0 01 of PMax 2 Switch the PPM100 to the AnalogIO Display 3 If necessary configure the analog port connected to the CM as an ADC input set its CM Display to linear and program its Pmax setting to match that of the gauge 4 Turn the trim pot until the voltage displayed in its Analog Signal Box is zero 5 Perform a Zero CM operation to adjust the PPM100 zero 6 The AnalogIO and CM readings should be zero at the base pressure conditions PPM100 Partial Pressure Monitor ASRS MassSpec Display 3 27 MassSpec Display ASRS WARNING Read the entire Safety and Preparation for Use section of this manual before using the PPM100 Read Chapter for detailed instructions and safety information regarding the installation and connection of gauges Access the MassSpec Display from the Monitor Display by touching the MassSpec QuickKey Monitor MassSpec canning Scan rate 2 FC 17 9 AMU m S4e 005 Torr gt 12 005 MassSpec Uh Uh 1OAMU div Figure 3 16 RGA MassSpec Display The MassSpec Display provides the only way to graph mass spectra generated by the SRS RGA head directly on the front panel of the PPM100 Analog scanning is the
300. trol channels to control relays or TTL outputs Outputs All output voltages may be set manually or linked logarithmically to a partial pressure reading When an output port is linked to a partial pressure PP1 through PP8 the analog output behaves as follows P Torr 10 for 10 Torr lt P lt 10 Torr OV indicates gauge off 12 V indicates gauge fault For More Information Consult Chapter 4 of this manual for a complete description of the Analog I O capabilities of the PPM100 including specifications connections possible configurations and capacitance manometer operation Chapter 3 all menus required to configure the PPM100 for proper operation of its Analog I O ports including direct pressure display from capacitance manometers ASRS PPM100 Partial Pressure Monitor 2 22 PPM100 Basics Maintenance and Service 1 The PPM100 does not have any user serviceable parts and requires minimum routine maintenance 2 Do not perform any unauthorized service adjustment or modification of the controller 3 Do not install any substitute parts 4 Consult the Damage Requiring Service section of this manual for instructions on how to return the instrument for authorized service and adjustment PPM100 Partial Pressure Monitor ASRS 3 1 Chapter 3 Displays and Menus The PPM100 has a menu driven touchscreen user interface To activate an on screen button simply touch the LCD display over the button area There ar
301. ttached to glass tubulated ionization gauges Do not allow the gauge tube temperature to exceed 100 C in glass tubulated gauges Sustained high temperatures can damage the tube causing air leakage into the vacuum system and increasing the chances of dangerous implosion Make all glass windows as small and thick as possible Wherever feasible replace glass tubulated gauges with all metal ones Protect all glass components with internal vacuum with tape or metal shields PPM100 Partial Pressure Monitor vi Safety and Preparation For Use References For additional information on vacuum technology safety recommendations consult 1 Charles F Morrison Safety Hazard From Gas Discharge Interactions with the Bayard Alpert Ionization Gauge J Vac Sci Technol A 3 5 1985 2032 2 R N Peacock Safety and Health Considerations Related to Vacuum Gauging J Vac Sci Technol A 11 4 1993 1627 3 John T Yates Jr Experimental Innovations in Surface Science A Guide to Practical Laboratory Methods and Instruments Springer Verlag New York Inc 1998 1 Section 238 p 832 titled Electrical Shocks in the Laboratory and 2 Section 239 p 836 titled Accidental Electrical Charging From Ionization Gauge 4 Gerardo Brucker Prevention is Key to Vacuum System Safety R amp D Magazine February 2001 p 57 5 Donald M Mattox Safety Aspects of Vacuum Processing Vacuum Technology and Coating Magazine
302. ult Partial Pressure settings Each Partial Pressure Box displays a partial pressure reading along with the mass gas name and alarm status for its single mass measurement Press a data box to access its Partial Pressure setup menu and modify its single mass measurement parameters The Monitor display also provides the only access to 1 the AnalogIO display screen AnalogIO QuickKey used to display analog I O voltages and CM readings and 2 the MassSpec screen MassSpec QuickKey used to display analog mass spectra Pressure Display The Pressure Display Screen provides an additional convenient and flexible way to display up to three pressures and voltage signals It is also the only display mode that provides access to the Charting i e logging and Process Control modes of the PPM100 controller The Pressure Display Screen can present pressures and analog signals in a variety of numeric and graphical formats Pressure 12 23 il 37 08 ia 18 amu Alarm High Torr is L Water i Menu Monitor Process Chart Help Figure 2 2 Pressure display using 3 different data display formats ASRS PPM100 Partial Pressure Monitor 2 8 PPM100 Basics Big Numbers Best for pressure readings Easily visible across the room Trend Graph A stamp sized P vs Time plot of the most recent points It also includes a small instantaneous pressure display next to the plo
303. ump controllers Input and output pins can be linked together to create powerful system logic and control a wide variety of system functions For example Process Control TTL outputs can be connected to Remote Control TTL inputs and used to control functions such as powering gauges on off or clearing the Data Log The use of external TTL logic circuitry to provide additional logic manipulation of the TTL I O signals complements the process control capabilities of PPM100 For example connect the TTL I O pins to an external PLC programmable logic controller or a home built logic circuit to extend the capabilities of the process control ports Use the TTL output signals to operate external relays with ratings exceeding those of the built in relays Use the TTL outputs to indicate the status of the individual process control channels to external devices such as computers logic analyzers and PLCs Debounce Time A 50 ms debounce time is standard for ALL TTL inputs Process Control and Remote Control This prevents spurious glitches on the TTL lines from triggering process control events or controller functions For a level triggered input the debounce time is the minimum amount of time the input signal must remain unchanged at the new logic level before that level is recognized by the PPM100 and triggers a process control event or controller function For an edge triggered Remote Control input the debounce time is the length of time
304. using the touchscreen keypad then touch accept to store it The parameter valid range and current units are shown in the numeric entry box Touch cancel to quit entry with no change Text Entry PP1 Name Agt Display the text entry keypad Hydrogen Enter a text string using the touchscreen keypad and touch ok to store it Touch abort to quit entry with no change Action D ca a i Perform the indicated action Touch the button to perform the action indicated Further instructions may be presented on the screen ASRS Menu Buttons 3 9 Time Date 11 05 4M 11mar00 Display the Time Date entry keypad Enter the new time and date and touch accept to store the new settings Touch cancel to quit entry with no change The clock is used e to log pressure readings data log e to log process control events process history e to log gauge activity gauge history e to trigger process control events at specific times The clock requires adjustment after daylight savings corrections take place Text Display Configuration Display text data Touch the button to display text data on the screen The text display includes scroll up down and page up down buttons This button is used to display large amounts of text information such as annotated Data Log event entries Table display format and PPM100 configuration information Utilities submenu PPM100 Partial Pressure Monitor ASRS 3 1
305. ution whenever troubleshooting any of its parts e Do not substitute parts or modify the instrument Do not use the product if it has unauthorized modifications Return the product to Stanford Research Systems for service and repair to ensure that safety features are maintained e Use only SRS supplied replacement accessory parts e The PPM100 controller does not have any serviceable parts e Consult the Damage Requiring Service section at the end of this chapter for instructions on how to return the instrument for authorized service and adjustment Resetting the PPM100 If the unit appears to be hung and unresponsive to front panel inputs disconnect and then reconnect line power To reset the instrument to its default settings turn the unit on using the red POWER key while holding down the E MULTIPLIER key ASRS PPM100 Partial Pressure Monitor 8 4 Error Detection Error Detection Important Diagnose and troubleshoot problems as soon as they are detected Even though the hardware tests built into the PPM100 can test the instrument for a large variety of problems they cannot detect all possible error conditions If system downtime is of prime concern it is recommended that a spare PPM100 unit be available for immediate replacement in the cause of failure or problems Built in Checks Several built in hardware tests automatically check the RGA head when the unit is turned on Additional tests are perf
306. utput and outer shield connected to the signal return ground SRS PPM100 Partial Pressure Monitor 4 4 Analog I O Ports Configuration Each individual Analog I O port may be programmed to perform one of many possible functions To configure a port touch the Monitor QuickKey to bring up the Monitor Display Once in the Monitor Display touch the AnaloglO QuickKey to access the AnalogIO Display Touch an analog port Data Box AN1 AN4 to display the Analog Port s Setup menu AnaloglO0 Monitor Analogl0 Setup AN1 t AN2 ADC or DAC g AN1 Name ADC input Temp DAC source Manual out PP6 out Manual Ey CM2 CM3 cma Volts when source Manual 1 3 DAC OUTPUT 18 74 Torr DAC OUTPUT 0 000 Monitor Dose Valve CM 10 Torr Ar Level CM display E Off Linear Off Off 2g Back Py a gt Back Py a Pressure Monitor Help Pressure AnaloglO _ Help Figure 4 2 Analog I O Port Setup The first and most important configuration option is selection of I O mode ADC Input Analog to Digital Converter or DAC Output Digital to Analog Converter For each analog port connected to a capacitance manometer CM Pmax must be programmed to the full scale range of the gauge and CM Display must be set to Linear for CM pressure readings to be properly calculated and displayed in the bottom row of the AnalogIO Display For compact gauges with DC voltage outputs related to the log of the
307. uts are opto isolated from the PPM100 For isolated operation of ALL outputs connect pin 33 to the external 5 V supply and pin 32 to the external ground For non isolated operation of ALL outputs connect pin 33 to PPM100 Vcc pin 1 or 15 and pin 32 to PPM100 Ground pin 30 or 31 Process Control TTL IN These inputs are opto isolated from the PPM100 For isolated operation of ALL Process Control inputs connect pins 2 and 20 to the external 5 V supply Pull inputs to external ground for low inputs For non isolated operation of ALL Process Control inputs connect pins 2 and 20 to PPM100 Vcc pin 1 or 15 and pull inputs to PPM100 Ground pin 30 or 31 for low inputs Remote Control TTL IN These inputs are opto isolated from the PPM100 For isolated operation of ALL Remote Control inputs connect pins 2 and 20 to the external 5 V supply Pull inputs to external ground for low inputs For non isolated operation of ALL Remote Control inputs PPM100 Partial Pressure Monitor 2 20 PPM100 Basics connect pins 2 and 20 to PPM100 Vcc pin 1 or 15 and pull inputs to PPM100 Ground pin 30 or 31 for low inputs RGA RS 232 Connector The PPM100 includes a male DB9 connector RS 232 DTE labeled RGA RS 232 for serial communication with the RGA Head i unused O Receive data from RGA Transmit data to RGA unused ground unused handshake from PPM handshake from RGA unused Figure 2 7 The PPM100 DB9 RGA RS 232 c
308. utside the trusted range IP Checking can not be used with users who have dial up accounts These accounts do not have a static or permanent IP address Start Trusted Range End Trusted Range Enter the Start and End of the Trusted IP Range Trusted IP Address Enter individual Trusted IP addresses Up to four individual addresses can be stored in the controller PPM100 Partial Pressure Monitor ASRS Remote Menu 3 59 ASRS USB Submenu Display the USB Universal Serial Bus submenu Queue Display the USB transmit and receive buffers The PPM100 buffers the most recent characters received and transmitted over the interface The Queue display shows the interface history The Queue display may slow down communications and should be displayed only when testing or debugging a host program Press a QuickKey to exit from this display The upper half of the Remote Queue display is the Receive Queue These are the most recent characters which have been received by the PPM100 displayed in UPPER case Commands which have already been executed are shown in normal text Commands which have not yet been executed are shown with a gray background Command errors are shown in inverse text The lower half of the Remote Queue display is the Transmit Queue These are the most recent characters which have been placed in the output buffer Characters which have already been sent over the interface are shown in normal text Characters
309. wer on until instructed to do so e The gauge chassis must be properly grounded during operation to assure operator safety e Cables once installed must be secured to provide strain relief for the gauge pins This section describes the electrical connection of Capacitance Manometers CM to the PPM100 controller Capacitance Manometers are also known as Capacitance Diaphragm Gauges Up to four independent CM readings can be monitored logged and displayed simultaneously Full scale ranges up to 1000 Torr are supported by the controller software Unfortunately there are a variety of conventions for connecting CMs Consult your installation and operation manuals for gauge specific information including connector type pin assignments electrical specifications cable requirements and grounding recommendations In many cases pin assignments are conveniently silk screened on the gauge casing close to the electrical connector Be prepared to manufacture your own custom cables to interface CMs to the PPM100 controller IMPORTANT General guidelines for the manufacturing of generic interface cables are often listed in the CM manual or can be obtained directly from the gauge manufacturer Standard CMs require three basic connection steps e Grounding e Pressure Signal Connection e Power Connection Grounding The gauge chassis must be properly grounded during operation to assure operator safety Most CMs feature a chassis groundi
310. work environment consider using a network address translation NAT router With such a device several PPM100 s can share a single IP address Each PPM100 is assigned a fictitious IP address and the router presents a single IP address to the rest of the world In this case all of the PPM100 s will appear at the same IP address to the outside world they will have different IP addresses on the local network Each PPM100 needs to be on a different port and the router must be configured to forward port requests to the correct PPM100 From the outside each PPM100 is accessed at its own port number but the same IP address If you are experiencing attacks on port 80 that block access to the PPM100 In this case change the port to something else like 8080 You will need to specify this port in your browser address window as 208 123 123 32 8080 where 208 123 123 32 is the IP address of the PPM100 and 8080 is the port number For more information about NAT routers and ports see your network administrator Setting Network Addresses To enter network addresses into the PPM100 press the Menu QuickKey from the Pressure Display then choose Remote from the Main Menu Finally choose Web in the Remote Menu Main Remote Main Remote wWeb g System name Web server IRS232 SRS PPM100 Disabled IP Address GPIB 208 184 84 151 0 0 0 0 Subnet mask Gateway 255 255 255 0 208 184 84 1 g Port number ee
311. y products that might render them incompatible with the PPM100 controller Installing a capacitance manometer WARNINGS e Read the entire Safety and Preparation for Use section of this manual before starting any installation procedure e Consult your gauge manufacturer for specific gauge installation requirements and Stanford Research Systems if uncertain about the compatibility of PPM100 with your third party capacitance manometer It is generally recommended CMs be mounted with the inlet port pointing vertically downward Although the gauge can be mounted in any orientation mounting it as suggested allows any foreign matter entering the pressure port to fall away from the diaphragm Isolate the unit from vibration as much as possible While not susceptible to gas damping the diaphragm may become susceptible to resonance The low range transducers lt 1 Torr are particularly sensitive and should be carefully isolated from any vibrations Isolate the vibration through the cable as well as through the port WARNING Do not connect a capacitance manometer gauge to the PPM100 until instructed to do so later in this chapter PPM100 Partial Pressure Monitor ASRS Connecting a Capacitance Manometer 1 9 ASRS Connecting a Capacitance Manometer WARNINGS e Connect all gauge signal cables to the PPM100 controller first before establishing a connection to the gauge heads e DO NOT switch the controller po

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