User Manual MP35E - Physik Instrumente
Contents
1. m 405 M 410 M 415 Series mr 35e release 3 3 3 1 000 1 200 000 Page 312. Electrical power 2 3 30 W Limit and reference switches Hall effect Hall effect Hall effect Hall effect Miscellaneous Operating temperature range 29 to 65 20 to 65 20 to 65 20 to 65 CG Material Aluminum steel Aluminum steel Aluminum steel Aluminum steel Mass 20123 27 2 1 2 4 2 8 2 1 2 4 2 8 2 1 2 4 2 8 kg Recommended C 863 single axis C 843 PCI board up to 4 axes C 663 single controller driver axis 2 phase stepper motor 24 V chopper voltage max 0 8 A phase 400 full steps rev motor resolution with C 663 stepper motor controller 16x interpolation www pi wSs M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 14 Piezo Nano Positioning PI Technical Data NOTES Design Resolution The theoretical minimum movement that can be made based on the selection of the mechanical drive components drive screw pitch gear ratio angular motor resolution etc Design resolution is usually higher than the practical position resolution minimum incremental motion Minimum Incremental Motion The minimum motion that can be repeatedly executed for a given input which is sometimes referred to as practical or operational resolution Design resolution and practical resolution have to be distinguished Design resolutions of 1 nm or better can be achieved with many motor gearbox and leadscrew combinations In practical applications however stiction friction windup and elastic deformation limit resolution to fractions o
3. C 663 leading to the following divergent specifications Models 25 Units versions Design resolution 0 025 um Max velocity 6 mm sec Motor resolution 20 000 steps rev Linear transmission ratio 40 000 steps mm When controlled with C 600 or C 630 PI stepper motors do not have position sensors and operate in open loop mode The limit switches can be used to determine absolute position at startup or if confidence in the count is lost WWwW pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 27 Piezo Nano Positioning PI Appendix Il Older Controllers Settings for C 600 Apollo and C 600 Controllers 400 25 0 Max velocity 6 mm s 4800 full steps s 240000 C 600 C 630 microsteps s 50x interpolation Drive phase current Application dependent 500 mA to 1000 mA Hold current Application dependent 200 mA recommended 6 2 Discontinued DC Motor Controllers eur Err TT TELLE Fig 14 Discontinued DC motor controllers C 844 C 842 ISA bus card and C 862 black Mercury Covered in this section are the C 844 C 842 C 862 and pre 2007 models of the C 848 and C 880 Proper operation of the DC motor controllers requires appropriate setting of the servo control parameters The following sections describe the parameter settings appropriate for using DC motor versions with different older PI controllers Values for current PI controllers are given in Section 5 www pi ws M 405 M 410 M 415
4. Series MP 35E Release 3 3 3 Page 28 Piezo Nano Positioning PI Appendix Il Older Controllers 6 2 1 Parameter Settings for C 842 PC ISA Bus Card The amplifier mode can also be set by command PWM mode is enabled by the SOP command while analog mode is enabled by the SOH command Use PWM mode with the ActiveDrive stages PD models All axes connected to a given card must be in the same mode Mixing PWM and non PWM stages on the same card is possible using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode Parameter Settings for C 842 and older C 880 C 848 Stage Type CG DG PD Parameter versions versions versions 50 to 250 50 to 300 50 to 250 0 to 50 0 to 50 0 to 50 d term SPA DD ca 00 DL2000 100 1 to 400 Limit SPA DD Acceleration SPA 99 1 to 600 1 to 600 Velocity VEL SV 210000 120000 70000 1 to 280 000 1 to 190 000 1 to 120 000 2 0 to 1000 0 to 1200 0 to 1000 2 6 2 2 Parameter Settings for Older C 848s amp C 880s C 848 and C 880 controllers manufactured in 2007 and later have C 842 x3 motor controller cards with the same motion processer as the C 843 and are covered in Section 5 2 2 For models older than 2007 use the settings for the C 842 ISA bus card given above Use PWM mode with the ActiveDrive stages PD models All axes connected to older C 848s or to the same card on an o
5. 3 3 Page 5 Piezo Nano Positioning PI Introduction Respect the safety instructions given in this User Manual The operator is responsible for the correct installation and operation of the stages The verification of the technical specifications by the manufacturer does not imply the validation of complete applications In fact the operator is responsible for the process validation and the appropriate releases The M 405 M 410 M 415 Series Linear Positioning Stages meet the specifications as defined by DIN EN 61010 for safe operation under normal ambient conditions See the specifications table for details 1 3 Model Survey The following table summarizes the most important characteristics of the M 405 M 410 M 415 Series Linear Positioning Stages available Max Velocity Meter Power W Resolution um count Repeatability DC motor gearhead Travel Range Gearhead Ratio 50 0 2 0 7 2 2 0 1 1 1 H ETA EE BE E ME WEN meng JS e in DIS wam Jm fom im DI waso Jl D m DIS EE mess je p for fe JE mme fm p or fe 24 Mana pep fom for fe 2 GET a a E For complete technical data see the table on p 4 www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 6 Piezo Nano Positioning PI Introduction 1 4 Contents of Delivery M 400 series stages are delivered with m 4 metric screws M4x30 w hex wrench purpose mounting two stages as an XY combination m Conne
6. 8 37 EC Machinery Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 October 30 2006 Karlsruhe Germany IE ae Dr Karl Spanner President Physik Instrumente Pl GmbH amp Co KG is the owner of the following company names and trademarks PI PIC ActiveDrive Copyright 1999 2008 by Physik Instrumente PI GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Document Number MP 35E Release 3 3 3 M 405 M 410 M 415 UserMP35E332 doc This manual has been provided for information only and product specifications are subject to change without notice About This Document Users of This Manual This manual is designed to help the reader to install and operate the M 405 M 410 M 415 Series Linear Positioning Stages It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 405 M 410 M 415 Series Linear Positionin
7. G M 4xx DG Connector J 2 from controller Type 15 pin sub D m Reference No AMP 9 215594 1 Pin Signal function O O O O OOOO O O 1 not connected 12 Limit signal for positive side active high TTL www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 20 Technical Data Piezo Nano Positioning PI 4 3 2 M 4xx PD PWM J2 SIGNALS J1 POWER Connector J 1 motor power Type 3 pin round socket Switchcraft Tini Q G note that pins are numbered counter clockwise starting from latch Function GND Power input N C Connector 2 controller signal Type 15 pin Sub D Reference No AMP 9 215594 1 Pin Signal function 1 Brake ON 0 to 5 12 V and motor disable signal active low input n c n C 10 PGND power ground MAGN signal magnitude speed input 11 SIGN signal sign direction TTL input 5 V input for encoder and logic 12 NLIMIT Limit signal for negative side active high TTL output PLIMIT Limit signal for positive side active high TTL output 13 REFS reference signal TTL output GND Logic 14 A encoder TTL output A encoder TTL output 15 B encoder TTL output B encoder TTL output www pi wSs M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 21 Piezo Nano Positioning PI Technical Data 4 3 3 M 4xx S1 Stepper Motors Connector type sub D15 m 1 phase 1a 9 phase 1b 2 phase 2a hase 2b output Limit signal pos
8. Motor on all versions may be rotated about its axis as desired changing cable connector orientation Fig 3 Drawing and current production may differ www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 17 max 38 Technical Data Piezo Nano Positioning PI 4 2 4 M xx 2S Stepper Motor Stages 2x M4 v 10 e EE ESN EE EE se BEER el 106 5 Fig 9 25 Stages Length Related Dimensions L A B C M 405 2S 207 38 5 13 5 M 410 2S 257 63 5 98 5 M 415 2S 307 38 88 5 123 5 NOTE Motor on all versions may be rotated about its axis as desired changing cable connector orientation Fig 3 Drawing and current production may differ www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 18 Piezo Nano Positioning PI Technical Data 4 2 5 Z Axis Mounting Bracket This bracket is available as an option for assembling stacked systems that include a vertical axis of motion 4x counter bore Op 5x 10x57 11x counter bore 4 Sx Geax 6 Fig 10 M 592 00 Z Axis Mounting Bracket www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 19 Piezo Nano Positioning PI Technical Data 4 3 PIN Assignments DC Motor driven M 400 series stages are equipped with sub D15 m socket for connecting the motor controller The PD versions have a separate motor power connector 4 3 1 M 4xx C
9. Piezo Nano Positioning PI MP 35E User Manual M 405 M 410 M 415 Series Linear Positioning Stages Release 3 3 3 Date 2008 03 17 This document describes the following product s E M 405 DG M 410 DG M 415 DG Linear Positioning Stages DC Motor gearhead E M 405 CG M 410 CG M 415 CG Linear Positioning Stages DC Motor gearhead E M 405 PD M 410 PD M 415 PD Linear Positioning Stages with integrated amplifier PWM E M 405 2S M 410 2S M 415 2S Linear Positioning Stages stepper motor WM AO MO M 410 MO MATS MO Linear Positioning Stages manual operation Physik Instrumente PI GmbH amp Co KG Auf der R merstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO IEC Guide 22 and EN 45014 GmbH amp Co KG C s Manufacturer s Auf der R merstrasse 1 Germany The manufacturer hereby declares that the product Product Name M 405 M 410 M 410 Series Translation Stages Model Numbers M 405 M 410 M 415 Product Options all model types complies with the following European directives 73 23 EEC Low voltage directive 89 336 EEC EMC Directive73 23 EWG Niederspannungsrichtlinie 98 37 EG Maschinenrichtlinie 9
10. RR 2000 0 2 000 LIM IERR 2000 0 2 000 Velocity MVEL 210000 1 280 000 MVEL 120000 0 190 000 MVEL 70000 0 120 000 Acceleration SA ACC 900000 0 1 500 000 ACC500000 0 1 500 000 ACC800000 1 000 1 500 000 Letters are ASCII commands see the C 844 Motor Controller User Operating Manual MS52E for more details www pi ws m 405 M 410 M 415 SeriesS mp 35E release 3 3 3 Page 30 Piezo Nano Positioning PI Appendix Il Older Controllers 6 2 4 Parameter Settings for C 862 Mercury C 862s are daisy chain networkable with each other with the new C 863 DC motor controller and the C 663 stepper motor controller meaning a multi axis system can be controlled from a single PC RS 232 interface Using C 862 Mercury Controllers with Stage M 4xx CG gearhead drive M 4xx DG gearhead drive M 4xx PD integrated amplifier Parameter Recommended Value Operating Range Recommended Value Operating Recommended Value Operating Range Range p term DP DP320 150 400 DP130 50 220 DP140 100 250 i term DI DI30 0 50 DI20 0 50 DI20 0 50 d term DD DD300 0 1 000 DD320 0 1 000 DD600 0 1 200 i Limit DL DL2000 0 2 000 DL2000 0 2 000 DL2000 0 2 000 Velocity SV SV210000 1 260 000 SV120000 1 190 000 SV70000 1 90 000 Acceleration SA Letters are ASCII commands see the C 862 Mercury MN Controller User Manual MS 74E for more details www pi ws SA900000 1 000 2 500 000 SA500000 1 000 1 500 000 SA800000
11. actual power is provided by the external supply All current PI controllers can drive either analog or PWM stages by operating in the corresponding mode NOTE Be sure your software turns the brake OFF before operation even though standard M 4xx series stages are not equipped with brakes If the signal on the brake line from the motor controller pin 1 is in the Brake ON state 0 V the PWM amplifier output to the motor is disabled and no motion is possible www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 10 Piezo Nano Positioning PI Operational Considerations 3 2 Motion Polarity Limit amp Reference Sensors 32 1 DC Motor Versions HARD STOP HARD STOP RANGE OF TRAVEL CO DIRECTION POSITIVE NEGATIVE LIMIT SENSOR LIMIT SENSOR active high active high Ref igral SEI i I ov Reference point difference when approached from positive or negative side Positive Travel Direction ss Fig 4 DC motor versions NOTE Limit and reference signal polarities on DC and stepper motor versions are reversed 3 2 2 Stepper Motor Versions RANGE OF TRAVEL DIRECTION NEGATIVE active low active low RE mm E En E E E E E E E E e E E E E E Reference sensor signal POSITIVE LIMIT SENSOR LIMIT SENSOR 5V f CA sten r i 1 Reference point difference when approached from positive or negative side Posit
12. an be mounted in any orientation horizontally or vertically To achieve the specified guiding accuracy the stages have to be mounted on even surfaces to avoid torsion of the basic profile If necessary use the clearance holes in the platform to access the mounting holes in the stage base The platform can be moved with the knurled knob for this purpose www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 8 Installation Piezo Nano Positioning PI Adapter plates and mounting brackets are available for stacking stages to form XY or XYZ systems See p 19 and the PI catalog at www pi ws for more information or contact your PI Sales Engineer To mount an object on the platform use the threaded mounting holes and M4 screws CAUTION Be aware that overlength mounting screws will interfere with motion and may cause permanent damage 2 2 Interconnecting the System Motorized versions of the M 405 M 410 M 415 Series can be internetworked other PI micropositioning stages in many different combinations including m Mercury Class devices can be daisy chained off a single RS 232 or USB port meaning that even stepper and DC motors PWM and analog can be networked together with C 663 and C 863 controllers m PWM and DC motor devices can be mixed on the current models of the multi axis controllers with C 843 C 848 C 880 2 3 Host PC Most PI controllers are in turn controlled by a host PC provided by the
13. controller may drive the stage into a hard stop with high forces When the stage is connected to the motor controller be aware that the stage could start an undesired move due to whatever reason Be aware that overlength mounting screws will interfere with motion and may cause permanent damage WARNING To avoid injury do not put any parts in the gap between the moving stage and the motor cabin Never put your finger at a place where the moving platform or any connected object could possibly trap it 1 2 Prescribed Use Correct operation of the M 405 M 410 M 415 Series Linear Positioning Stages is only possible in combination with a suitable controller driver ordered separately and software The controlling device must be able to read out and process the signals from reference and limit switches and the incremental position encoder to ensure proper performance of the servo control system Based on their design and realization these stages are intended for single axis positioning adjusting and shifting of loads at various velocities M 405 M 410 M 415 Series Linear Positioning Stages can be mounted horizontally or vertically To achieve the specified guiding accuracy the positioners have to be mounted on a flat surface to avoid torsion of the basic profile The positioners may only be used for applications suitably in accordance with the device specifications www pi ws M 405 M 410 M 415 Series MP 35E Release 3
14. cting cable motorized stages only m This document MP 35E User Manual 1 5 Unpacking Unpack the stage with care Compare the contents against the items covered by the contract and against the packing list Inspect the contents for signs of damage If parts are missing or you notice signs of damage such as loose contacts or hairline cracks please contact PI immediately Save all packing materials in case the product need be shipped again www pi wSs M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 7 Piezo Nano Positioning PI Installation 2 Installation 2 1 Mechanical Mounting WARNING CRUSH HAZARD When mounting the stage keep in mind that the motor will move with the platform and possibly might trap your finger or any equipment Make sure that there is sufficient clearance for the motor when it and the platform move 2 1 1 Cable Connector Position Before mounting one of the motorized versions decide whether or not the cable connector is in a suitable position To change connector orientation loosen the 2 set screws which clamp the motor housing with a 2 mm Allen wrench shown and rotate the housing and connector to the desired position arrows Then retighten the set screws NOTE Motor may be rotated about its axis as desired to change cable connector orientation Fig 3 Fig 3 Changing connector orientation 2 1 2 Attachment M 405 M 410 M 415 Series Linear Positioning Stages c
15. ennnnnennnnnsnnnenenrnrennne 9 23 OP EE 9 Operational Considerations 10 3 1 PWM Amplifiers amp Brake Gonal 10 32 Motion Polarity Limit amp Reference Sensors cccceeeeee ees 11 321 DC Motor Versions cccccccseececceseceeceeeeceeseeeeeeseeeeessaeeessaaes 11 3 22 Stepper Motor Vereoons 11 323 Limit SWITCHES eege eseu 12 324 Reference Switch cccccccccssssecceeeeeseeceeeeeeeceeeseeeeeeeesseeeees 12 EC HE Mee En Le 13 Technical Data 14 Ad SPCCIICAUOMS EE 14 22 DIMENSIONS se 15 421 M 4Xx CG Stages eseseeeananenensaneneneirareneiararerrirarerenrirarerererran 15 422 M 4xx DG Stages rvrsvrvrvvrvrvrrvrvenervrvererrevererrererrevererrevererverenn 16 4225 EE Eeer 17 424 M xx 2S Stepper Motor Stages rrrrrrrrvrnnnnnnnrrrrrrnnrrnnnnrrserens 18 425 Z Axis Mounting Bracket 19 43 PIN e ln Eu CC 20 431 M 4xx CG M AxvxDo a a a 20 232 MK POPNM use 21 433 M 4xx S1 Stepper Moiors 22 AA VEIS er 22 Appendix I Current Controllers 23 51 Stepper Motor Controller rarrrrrrranrrrnrnnnnrrnrnnnnnrnnrnnnnnnnnnnnnenn 23 www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 1 Contents 52 DOMO CONTOS onin A 24 52 1 Parameter Settings for C 863 Mercury rrrrrnnnnnnnvnvnnnnnnnne 25 522 Parameter Settings for Other DC Motor Controllers 26 6 Appendix II Older Controllers 21 6 1 Discontinued Stepper Motor Controllers 27 62 Discontinued DC Motor Contro
16. f a micron Max Normal Load Capacity Centered vertical load horizontal installation Max Push Pull Force Active and passive force limit in operating direction at center of stage Some stages may be able to generate higher forces at the cost of reduced lifetime 4 2 Dimensions Dimensions in mm decimal places 4 2 1M 4xx CG Stages separated by commas in drawings B 120 _ 2xM4710 Fig 6 CG versions Length Related Dimensions L A B C M 405 CG 207 38 5 73 5 M 410 CG 257 63 5 98 5 M 415 CG 307 38 88 5 123 5 www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 15 Piezo Nano Positioning PI Technical Data NOTE Motor on all versions may be rotated about its axis as desired changing cable connector orientation Fig 3 Drawing and current production may differ 4 2 2 M 4xx DG Stages 2x counter bore Ay counter bore 2x M for hex screw M for hex screw M 5 ee from bottom side N i i Fi 106 5 11 L 124 8 Fig 7 DG Stages Length Related Dimensions L A M 405 DG 207 38 5 M 410 DG 257 63 5 M 415 DG 307 88 5 www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 16 Technical Data Piezo Nano Positioning PI 4 2 3 M xx PD Stages 2x M4T 10 Let Fig 8 PD Stages Length Related Dimensions L A B Be M 405 PD 207 38 5 73 5 M 410 PD 257 63 5 98 5 M 415 PD 307 38 88 5 123 5 NOTE
17. g Stages as well as the procedures which are required to put the associated motion system into operation This document is available as PDF file Updated releases are available for download from www pi ws or by email contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings WARNING Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion controller and the software tools which might be delivered with M 405 M 410 M 415 Series Linear Positioning Stages are described in their own manuals All documents are available as PDF files For updated releases visit download section of the PI Website www pi ws contact your Physik Instrumente Sales Engineer or write info pi ws Contents Introduction 3 ti Salet e te TEE 5 12 Prescnibhed E 5 13 Oe E EE 6 14 Contents of Delivery rrrrrnnrrrvrnnnnrvrrrnnnrvrrrnnnrerrrnnnrenrnnnsennnnsnee 7 to WEIDER 7 Installation 8 21 Mechanical dereen 8 2 1 1 Cable Connector Roeton 8 212 AtachMEn ena ee 8 22 Interconnecting the System neoeannnneennnn
18. grease the ball screw and linear bearings from time to time The time interval depends of the degree of pollution and can vary from 100 to 800 operating hours Recommended lubricant for leadscrews KLUBER Staburags Type NBU 8EP or Beacom 325 www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 13 PI Piezo Nano Positioning Technical Data 4 Technical Data 4 1 Specifications Models M 405 CG M 405 DG M 405 PD M 405 2S M 410 CG M 410 DG M 410 PD M 410 2S M 415 CG M 415 DG M 415 PD M 415 2S Motion and positioning Travel range 50 100 150 50 100 150 50 100 150 50 100 150 mm Integrated sensor Rotary encoder Rotary encoder Rotary encoder Sensor resolution 2048 2000 4000 cts rev Encoder bandwidth Design resolution 0 0035 0 0085 0 125 0 0781 um Min incremental motion 0 1 0 1 0 25 0 1 um Unidirectional repeatability 0 2 0 2 0 2 0 2 um Bidirectional repeatability 2 2 2 2 um Pitch yaw 25 50 75 oH OOo 25 50 75 t25 50 E79 urad Max velocity 0 7 1 5 15 3 mm s Mechanical properties Spindle pitch 0 5 0 5 0 5 0 5 mm 69 12 1 28 12 1 Gear ratio 29 6 1 Motor resolution E 6400 steps rev Max load 200 200 200 200 N Max push pull force 40 40 50 50 50 50 50 50 N Max lateral force 150 150 150 150 N Drive properties Motor type DC motor DC motor ActiveDrive DC 2 phase stepper yP gearhead gearhead Motor motor Operating voltage O to 12 0 to 12 0 to 24 24 V
19. he positive or negative side of a fixed point The rising or falling edge of this signal can be used as to indicate a known reference position always approach the reference point from the same side to achieve repeatability the difference in the reference points when approached from the positive side and from the negative side is about 0 3 mm to 0 5 mm See the controller User Manual and or associated software manuals for the commands which make use of the reference signal See Fig 4 and Fig 5 for location details WWW pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 12 Piezo Nano Positioning PI Operational Considerations Average reference position accuracy 0 3 um Motor controllers with GCS command set C 843 C 880 C 848 as well as C 862 C 863 and C 663 when used with GCS software approach the reference sensor always from the negative side The reference move goes from the side with the negative limit switch towards the positive limit switch until the reference signal changes its state If the moving platform is located between positive limit switch and reference switch when referencing is started it will first move to the negative side crossing the reference sensor and then back until the reference signal changes its state again 3 3 Maintenance Operating the stages in clean environments no maintenance is required If the stages are operated in extremely dusty environments we recommend to clean and to
20. itive side active low TTL output output Reference signal 10 D A 5 1 1 D 1 6 input 5 V supply from controller 1 7 1 4 4 Disposal In accordance with EU directive 2002 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH amp Co KG Auf der Romerstr 1 76228 Karlsruhe Germany WWW pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 22 Appendix Current Controllers Piezo Nano Positioning E I 5 Appendix I Gurrent Controllers Each motorized stage in the motion system must be connected as an axis to a motion controller The controller is either networked with or installed in a PC NOTE This section covers the controllers currently available from PI If you are using an older controller see Section 6 Controller setup and in most cases operation is effectuated with software after being properly set up with a PC a certain level of stand alone operation is possible with the controller and stage a
21. ive Travel Direction pe Fig 5 Stepper motor versions www pi wSs M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 11 Piezo Nano Positioning PI Operational Considerations 3 2 3 Limit Switches All M 405 M 410 M 415 Series motorized stages are equipped with non contacting Hall effect limit switches with TTL drivers On stepper motor versions limit switch outputs are active low on other versions active high Each limit switch controls an overtravel signal on its own dedicated line to the controller It is the controller that is then responsible for stopping motion If it does not do so in time the stage will run into the hard stop Should this happen it may be necessary to push the stage manually out of the end zone CAUTION High speed crashes can cause irreparable damage Do not disable limit switches in software Test limit switch operation at low speeds Type Magnetic Hall Effect sensors Power supply 5V GND supplied by the motor controller through the motor connecior Voltage output TTL level Sink Source capability 48 mA Logic DC motor versions Active high normal motor operation low limit switch hit high Stepper motor versions Active low normal motor operation high limit switch hit low 3 2 4 Reference Switch Motorized versions are equipped with direction sensing Hall effect reference switches These switches provide a TTL signal indicating whether the stage is to t
22. lder C 880 must be in the same mode Mixing PWM and non PWM stages on the same card is possible only by using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 29 Piezo Nano Positioning PI Appendix Il Older Controllers 6 2 3 Parameter Settings for C 844 The C 844 is a 19 inch rackmountable or desktop controller capable of controlling up to 4 axes DCMove is the standard C 844 operating program This program uses a configuration file to define the motion control parameters First use the parameter menu to set these values Use PWM mode with the M xxx PD models PWM mode is enabled by the OUTP SIGN PWM command while analog mode is enabled by the OUTP SIGN DAC command All axes connected to a given C 844 must be in the same mode Mixing PWM and non PWM stages on the same controller is possible using a PWM converter box order number C 842 AP1 with analog stages while the card is in PWM mode Using C 844 Motor Controllers with Stage M 4xx CG gearhead drive M 4xx DG gearhead drive M 4xx PD integrated amplifier Parameter Recommended Value Operating Recommended Value Operating Recommended Value Operating Setting Range Setting Range Setting Range p term 150 P 150 350 250 P 150 350 140 P 50 250 i term 20 i 0 50 40 i 0 50 20 i 0 50 d term 300 D 0 1 200 800 d 0 1 200 600 d 0 1 000 i limit LIM IERR 2000 0 2 000 LIM IE
23. llers eoaannnoaannnneannnenennnnenne 28 621 Parameter Settings for C 842 PC ISA Bus Card 29 622 Parameter Settings for Older C 848s amp Ce 29 623 Parameter Settings for C 244 30 624 Parameter Settings for C 862 Mercum 31 www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 2 Piezo Nano Positioning PI Introduction 1 Introduction Fig 1 M 415 DG M 410 DG and M 405 DG Translation Stages from left to right M 405 M 410 M 415 Series Linear Positioning Stages are leadscrew driven stages with a travel range of 50 100 and 150 mm Precision crossed roller bearings guarantee straightness of travel of better than 2 um 100 mm The stage base is precision machined from high density stress relieved aluminum for exceptional stability and minimum weight Motorized versions are available with high resolution DC motors with and without gearhead drives and with stepper motors NOTE In this manual the designation M 4xx will be used to mean M 405 M 410 M 415 Note that M 403 and other similarly numbered stage families are covered in other manuals Models M 4xx DG DC motor gearhead drive use closed loop DC motors with shaft mounted position encoders and backlash free gearheads providing 0 1 um minimum incremental motion Models M 4xx PD DC motor direct drives are equipped with 30 watt Active Drive DC motors providing 0 25 um minimum incremental motion and velocity up to 15
24. llers 5 2 DC Motor Controllers The following sections give ranges of numeric parameter settings appropriate for using DC motor versions with different PI controllers The values are in encoder counts and should be considered approximate It may be necessary to fine tune the system for optimum operation DIGIAL CONIROUER bah e etete eters RRRA Sel e Fig 12 Currently available DC motor controllers from PI C 848 C 880 benchtop rackmount from top C 843 PCI card left and the C 863 Mercury right DC motor versions can be used with C 843 C 848 C 880 and C 863 Mercury controllers Drive type DC Motor Controller C 880 C 848 C 843 C 863 Mercury Axes per up to 19 2or4 2or4 1 controller Host PC RS 232 RS 232 Internal USB interface RS 422 or RS 422 or PCI bus RS 232 bus or IEEE GPIB IEEE GPIB daisy chain Multiple yes on yes on yes in yes all on same controllers on separate separate separate port same host PC ports ports slots Custom configurations possible with networked controllers controlling hundreds of axes www pi wSs M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 24 Appendix l Current Controllers Piezo Nano Positioning PI 5 2 1 Parameter Settings for C 863 Mercury The C 863 Mercury controller is a compact palm size single axis controller The C 863 and other Mercury Class controllers like its software and hardware compatible predecesso
25. lone With PI user interface software controller parameter settings specific to the stage are made automatically when the operator indicates which stage type stage is connected to the controller See the controller User Manual and the software manual for the software you are using for details they should be on the product CD that came with the controller but can also be downloaded from www pi ws If using non PI software the software must take care of setting the parameters The controller CD includes DLLs and LabVIEW drivers to facilitate this task See the corresponding software manuals for details 5 1 Stepper Motor Controller Fig 11 Single axis C 663 Mercury len Step stepper motor controllers are networkable with each other and with C 862 and C 863 DC motor controllers PI stepper motors do not have position sensors and operate in open loop mode The limit or reference switches on the stage can be used to determine absolute position This is usually done at startup or if confidence in the count is lost C 663 Mercury Step Parameter Settings eh M 400 2S Max velocity 3 mm s 2400 full steps s 38400 C 663 microsteps s 16x interpol older controllers p 27 Drive phase current Application dependent 500 mA to 1000 mA Hold current Application dependent 200 mA recommended www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 23 Piezo Nano Positioning PI Appendix l Current Contro
26. mm sec The active drive concept features an integrated high efficiency power amplifier and reduces overall system cost because the stage can be driven directly from PI motor controllers Models M 4xx 2S use a high resolution stepper motor allowing for 0 1 Um incremental motion in conjunction with a C 663 stepper motor controller www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 3 Introduction Piezo Nano Positioning PI All stages are equipped with magnetic origin sensors and end of travel sensors M 405 M 410 M 415 Series stages can be cross stacked and combined with the M 592 00 Z axis mounting bracket to provide multi axis motion Fig 2 M 400 with stepper motor M 400 Features www pi ws Travel Ranges to 150 mm Stress Relieved Aluminum Stage Base for Highest Stability Crossed Roller Bearings High Resolution DC and Stepper Motor Drives ActiveDrive Concept Manual Knob for Convenient Position Adjustment Non Contact Origin and Limit Switches M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 4 Introduction Piezo Nano Positioning PI 1 1 Safety Precautions Before operating M 400 Series Linear Stages read this CAUTION M 400 stages are motorized by powerful electrical motors and can generate high forces due to gearhead transmission Be aware that automatic limit switch halt may not be supported by the motor control electronics Be aware that failure of the motor
27. r the C 862 and the C 663 Stepper Motor Controller are daisy chain networkable meaning that a multi axis system can be controlled from a single PC RS 232 or USB interface Both Windows user interface programs that come with the Mercury controller allow choice of the stage or drive type as a start option for operation Mercurys always have PWM mode enabled without requiring any extra command C 863 Mercury Parameter Settings Stage Type CG DG PD Parameter versions versions versions 150 to 400 50 to 220 100 to 250 0 to 50 0 to 50 20 0 to 1000 0 to 1000 0 to 1200 Limit SPA DU Acceleration SPA 900000 500000 800000 ACC 1 000 1 000 1 000 2 500 000 1 500 000 1 200 000 Velocity VEL SV 210000 120000 70000 1 to 280 000 1to 190 000 1 to 90 000 GCS and MCC native commands respectively for setting corresponding parameters PI GCS software usually loads parameters automatically The values given can be used directly with native commands For GCS some values need to be converted from encoder counts to mm See GCS and Native Commands manuals for further details www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 25 Piezo Nano Positioning PI Appendix l Current Controllers 5 2 2 Parameter Settings for Other DC Motor Controllers The C 843 is an add on card to be installed in a PCI slot of a PC Two and 4 axis versions are available and more
28. than one card can be installed in the same PC PWM and analog stages can be run off the same card without using a converter box See the C 843 user and software manuals for detailed information on this controller and its software interfaces The currently available C 848 and C 880 controllers use C 842 x3 cards with the same processor as is on the C 843 so the same settings apply for them For models manufactured before 2007 see Section 6 C 843 C 848 amp C 880 Parameter Settings Stage Type CG DG Parameter versions versions versions p term i term d term i Limit vff term Acceleration 2830000 5930000 2400000 max Velocity max 170000 119000 120000 J www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 26 Piezo Nano Positioning PI Appendix Il Older Controllers D Appendix Il Older Controllers This section covers controllers which are no longer available but which may still be in use in the field 6 1 Discontinued Stepper Motor Controllers 3 eg geb BEE EE Es z Paa E a a ao x EE Egg ae siste lt men ee os mm aa AA gt EEE VS mm e teg r b eem KA T eg Fig 13 Discontinued stepper motor controllers 3 axis Apollo foreground and 4 axis C 600 background both networkable but not with newer controllers When controlled with the C 600 or C 630 controllers the microstepping behavior is different from that of the current
29. user The only exceptions are programmable controllers with stand alone mode C 862 Mercury controllers with a joystick port or manual control pad The controller is either installed directly in the PC e g C 843 or connected to it over a communications interface See the controller User Manual for details PI generally provides software and or drivers that run on the host PC to control the system Typically there will be a control program with a graphic user interface for testing and simple operation and in addition DLL COM and or LabView drivers for users who wish to use custom software If the controller is a PC ISA or PCI card there will also be hardware drivers to install See the controller User and Software manuals for installation details www pi ws M 405 M 410 M 415 Series MP 35E Release 3 3 3 Page 9 Piezo Nano Positioning PI Operational Considerations 3 Operational Considerations 3 1 PWM Amplifiers amp Brake Signal The PD version stages with the ActiveDrive direct DC motor drive have the platform connected directly to the 30 watt DC motor by a flexible coupling For maximum dynamic performance the DC servo motors are driven by high efficiency PWM power amplifiers integrated into the stages An external plug in power supply is provided to supply the built in amplifiers directly This architecture allows high torque and high velocities while loading the motor controller with control signals only The
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