CVM211 User Manual (Torr/mTorr)
Contents
1. Values listed under each gas type are in volts The log linear output signal and pressure are related by the following formulas G T W e V logio P 5 where P is the pressure in torr and V is the output signal in volts An analog output of less than 01 volts to near 0 volt indicates a damaged or faulty sensor The chart on the following page shows the graphical results of the table and formulas given above for nitrogen True pressure N is plotted on the X axis with a log scale The output signal is plotted on the Y axis on a linear scale InstruTech Inc Page 21 Instruction Manual CVM211 Stinger Log Linear Analog Output Voltage vs Pressure Output Signal Volts 0 0001 0 001 0 01 0 1 1 10 100 1000 Pressure Torr Chart of the calculated pressures using the formulas and data for the log linear output signal for nitrogen from the previous page InstruTech Inc Page 22 Instruction Manual CVM2 11 Stinger 8 Service 8 1 Calibration Every InstruTech module is calibrated prior to shipment using nitrogen N2 However you can calibrate the instrument by adjusting zero and span atmosphere using the procedure described previously in section 4 3 titled Programming also see User Interface Map Zero and span atmosphere calibration affect the displayed value and the output signal Zero calibration optimizes performance of the gauge when operating at a low pressure range of 1 00 x 104 Torr to 1 00 x 10 To2. mp W NAR He SA en k ke San dka na Kane ban ORE 11 4 1 Initial Set D mcm 11 4 2 User lnterfaC BASICS iiy i Hina OI Up ninin ndsti een aerd kU ceke ne d wan A ku taplavy etel ka dand 11 4 3 duum 12 4 4 Return to Factory Default Settings iei eure nid coi ENEE Ka k KA KAKA KA KA KA KA KA E 13 5 Using the gauge with different gases M E kk eke ke kek ke keke k k Ka k KAKA KA KAKA A KA KHK seen HA KA KA KA KK 15 InstruTech Inc Page 1 Instruction Manual CVM2 11 Stinger EDS Do cs rcm ecc EE 17 7 Analog O oo ecc 18 7 1 Non Linear Analog KEREN A KA KAKA KA KAKA A KA HA KA KA HAA 19 7 2 Log inear Analog Output Si i i cami kar EE tma Haag va tan sede Rada eade kina kana ki l nin r ka bale Mexx IS kin MU ka E ka 21 TON LEE 23 8 4 AMMA e EE 23 8 2 Mali eu 23 8 3 Troubleshooting EE 23 84 coctum 24 8 5 Module and sensor replacement ekere ke kek k enne ka A KAKA KA KA KAKE A KA HA KA KA KAR 25 9 Factory Service RE E 26 T0 A DEELEN eeneg 26 InstruTech Inc Page 2 Instruction Manual CVM2 11 Stinger 1 Introduction General Information 1 1 Description Thermal conductivity gauges measure pressure indirectly by sensing the loss of heat from a sensor to the surrounding gases The higher the pressure of the surrounding gas the more heat is conducted away from the sensor Pirani thermal conductivity gauges maintain a sensor usu
3. Agilent Technologies Lexington MA p n 000219 108 Instruction Manual CVM2 11 Stinger Table of Contents 1 Introduction General InFormiettoliasaaseee s dec RO Aer kk REED ia bas ERU NI EURO KA ER a 3 1 1 BI ITugeunE c U 3 e DE e Te CN 3 1 3 PIlsszi ehc L 4 l4 Pat N m De LS as ac des vh ean efe nd Pun qa o uU dr ke n E eaa e ima aba iua i aaa teo bo a D RE 4 1 5 Options amp Accessorles ENEE 4 2 Important Safety Information E E kk kek kak kake k k kake kk k Ka KA KAKA A KA KA KA KAKA KA KA HA KA KA AA 6 2 1 Safety Precautions General 6 2 2 Safety Precautions Service and operation kk eene kake k K k KA A KAKA KA KA 7 J3 Electrical COnditiDE5 ai s ziy klan dial tera eU M wak ala Ed bie IQ h nade ak kul aa kr kana kek k n le t ERA ca 7 2 3 1 Proper Equipment Grounding uu keke ke be keke eap DE EN e DE Lo KA KA KARE KA KAKA A KA NIE KA 7 2 3 2 Electrical Interface and Control Li egener Eerad anc eO Gu 7 2 4 Overpressure and use with hazardous gases EE kk ek k enne nnne 8 2 5 Basesotherthan Nitrogen Ee 8 CE E EE 9 3 1 Mechanical InstallatlODi eese penne ptt Eek keke keke dr bn net anri KAKE kk KA kk Rana bes 9 3 2 ge ME EE 10 3 2 1 lp qt ON 10 3 2 2 lege EE og 10 4 Setup and OBSFAUOR uii itis dient kina el Ay min dba L M kn
4. 30 in 33 0 mm 29 0 mm 48 3 mm 11 3in Mini Conflat 147 in 37 3 mm 2 3 A in Conflat 1 47 in 37 3 mm A 1 4in Cajon AVCR 1 86 in 47 2 mm 1 2in Cajon 8VCR 1 75 in 44 5 mm 1 4 Part Numbers Part Number Part Number With Log Linear With Non Linear CVM211 Fittings Flanges Analog Output Analog Output Combination 1 8 in NPT male 1 2 in tube CVM211GAL CVM211GAA use 1 8 in NPT male or 1 2 in O D O ring compression NW16KF CVM211GBL CVM211GBA NW25KF CVM211GCL CVM211GCA NWAOKF CVM211GDL CVM211GDA 1 1 3 in Mini CF NW16CF Mini Conflat CVM211GEL CVM211GEA 2 3 4 in CF NW35CF Conflat CVM211GFL CVM211GFA 1 4 in Cajon AVCR female CVM211GGL CVM211GGA 1 2 in Cajon 8VCR female CVM211GHL CVM211GHA 1 5 Options amp Accessories Part Number Optional Wall Mount AC DC PS401 Power Supply Input 100 240 Vac Output 24 Vdc 9 750 mA 18 W Various AC plugs 6 ft cable length with North American AC Plug PS401 A with Universal European AC Plug PS401 EU with UK AC Plug ad PS401 UK with China AC Plug PS401 C with Australian AC Plug PS401 SP InstruTech Inc Page 4 Instruction Manual CVM2 11 Stinger Options amp Accessories Continued Part Number PS401 UX For Use With User This variation of the PS401 power supply may PS401 UX Supplied AC Power Cord be used when an AC plug that is not listed above is required The conventional IEC60320 AC power entry receptacle allows use with any user supplied
5. CVM211 Stinger with a log linear analog output InstruTech Inc Page 20 Instruction Manual CVM2 11 Stinger 7 2 Log Linear Analog Output The following table is for use with CVM211 Stinger part numbers ending with the letter L providing an output voltage that is linear with respect to the log of pressure Log Linear analog output for CVM211GAL through CVM211GHL True Pressure CO2 Freon12 CH 0 0001 1 000 1 000 1 000 1 000 1 000 om 1 000 1 000 1 000 1 69 0 0010 2 000 1 845 Lal 2 000 2 041 el el el 2 114 aal 2 230 2 17 2 602 2 699 zo 2362 2881 2845 2778 254 0 0100 2000 2 820 2 908 2 987 3 041 2 681 el 3 130 3 083 2 851 3 185 3 207 3 207 3 340 2 978 3 476 3435 3380 3 14 3 54 0 1000 4 000 3 808 3 914 3 988 4 029 eg Ass 4 201 4 14 4 55 1 0000 __s ooo _4 778 4973 4987 4978 4 602 5 021 sol sai 4 872 5 204 5 288 5 28 5 20 6 13 5 524 5 107 5 989 5418 7391 571 10 0000 6 000 sen 8 041 6 013 5 471 5530 8041 8 04 5 819 5 36 7 76 8 04 5 915 5 41 8 04 100 0000 __7 000 5 946 sol __7 320 5 670 5 691 8 041 8 04 6 090 5 52 8 04 8 04 3 w o Eat co Ru 8 04 8 04 8 04 8 04 _ J 00 Nala 8 04 8 04 6 900 5 698 6 021 sa 8 041 an 1000 0000 8 000 oa sol sol 7 045 sol 6 045 6 104 8 041 8 041 8 041
6. SELLER s satisfaction that it is defective returned to SELLER s plant properly identified within twenty four 24 months unless otherwise noted after the date of shipment from InstruTech Plant BUYER must obtain the approval of SELLER and a return authorization number prior to shipment Alteration or removal of serial numbers or other identification marks renders this warranty void The warranty does not apply to products or components which have been abused altered operated outside of the environmental specifications of the product improperly handled or installed or units which have not been operated in accordance with SELLER s instructions Furthermore the warranty does not apply to products that have been contaminated or when the product or part is damaged during the warranty period due to causes other than ordinary wear and tear to the product including but not limited to accidents transportation neglect misuse use of the product for any purpose other than that for which it was designed THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE THIS WARRANTY EXTENDS ONLY IN FAVOR OF THE ORIGINAL BUYER THE BUYER S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT AS IS EXPRESSLY PROVIDED HEREIN OF ANY WARRANTED DEFECTIVE PRODUCT OR PART AND UNDER NO CIRCUMSTANCE SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUEN
7. See span adjustment in section 4 3 Note Setting zero and atmosphere is normally required only once during the initial setup and maybe checked by the user periodically After power has been applied to the gauge during the initial setup allow five minutes for the gauge to stabilize warm up before setting zero and atmosphere 4 2 User Interface Basics The user interface is designed for easy operation and a natural progression of setup parameters This section gives a brief explanation of operation and programming parameters A complete user interface map is provided following this section The CVM211 Stinger module has four settings that can be programmed by the user with a 3 position switch located on the side of the module housing Pressing the switch straight in is referred to as pressing the select key Pressing the switch upward is referred to as pressing the up key Pressing the switch downward is referred to as pressing the down key During setup and operation be sure to consider the Torr mTorr LEDs InstruTech Inc Page 11 Instruction Manual CVM2 11 Stinger 4 3 Programming 1 With the CVM211 in the normal pressure display mode press and hold select for 3 seconds 2 The readout displays the value of the setpoint turn on pressure The relay energizes when the pressure is below this value Factory default 100 mTorr 3a To keep this value and proceed to the next step press select 3b To c
8. gas mixture This could cause an explosion which could result in serious injury or death InstruTech Inc Page 8 Instruction Manual CVM2 11 Stinger 3 Installation 3 1 Mechanical Installation Mount the CVM211 as close as possible to the pressure you want to measure Long or restricted small diameter tubing will create a pressure difference between your process chamber and the gauge This may cause a delay in response to pressure changes Mounting the CVM211 too close to a gas source inlet may also cause measurement and control instability Do not mount the CVM211 near a source of heating or cooling such as heaters or air conditioning vents Mount the CVM211 with its main long axis horizontal see diagram below Pressure reading errors may occur above 1 Torr if the unit is not mounted horizontally Below 1 Torr mounting position has little to no effect For Accurate Measurements Above 1 Torr Mount the Gauge Axis Horizontally as Shown Below Vacuum chamber Vacuum chamber Correct Orientation Incorrect Orientation Mount the CVM211 with port down if possible to help minimize the effect of any particles or condensation from collecting in the gauge Do not mount the CVM211 where it will be subjected to excessive vibration Vibrations may cause unstable readings measurement errors and possible mechanical stress to components in the CVM211 Flanges Fittings follow the manufacturer s recommend
9. gas other than N air is used correction must be made for the difference in thermal conductivity between nitrogen N and the gas in use The charts and tables on the following pages indicate how different gases affect the display and output from an InstruTech convection gauge A WARNING Using a thermal conductivity gauge with gases other than that for which it is calibrated could result in death or serious injury Be sure to use gas correction data in this manual when measuring pressures of gases other than N air For N the calibration shows excellent agreement between indicated and true pressure throughout the range from 10 to 1000 Torr At pressures below 1 Torr the calibration curves for the different gases are similar The difference in readings at these low pressures is a constant a function of the difference between thermal conductivities of the gases At pressures above 1 Torr indicated pressure readings may diverge significantly At these higher pressures convection currents in the gauge become the predominant cause of heat loss from the sensor and calibration depends on gauge tube geometry and mounting position as well as gas properties Generally air and N are considered the same with respect to thermal conductivity but even N and air will exhibit slight differences in readings at higher pressures For example when venting a system to atmosphere using N you may see readings change by 30 to 40 Torr after the chamber is opene
10. not have a known pressure in the gauge press select briefly less than 3 seconds to exit the setup menu and return to the normal pressure display without saving a new span value 9b If you do have a known pressure in the gauge use the up down keys to change the displayed value to agree with the known pressure Press and hold select for 3 seconds until the displayed pressure switches to the new value This will save the new span setting and return to the normal pressure display It is good practice to perform the sequence of checking and adjusting span ATM then zero VAC and then finally re checking the span setting to ensure that the circuitry is properly balanced for use in measuring pressure throughout the intended measurement range InstruTech Inc Page 12 Instruction Manual CVM2 11 Stinger 4 4 Return to Factory Default Settings You can reset all values to the original factory default settings by holding the up key for 5 seconds The display will read dEF until 5 seconds has passed at which point all user settings will be replaced by the original factory default values and the display will return to the normal pressure display If you release the up key before 5 seconds has passed the display will return to normal pressure display without resetting to factory defaults If you reset all values to original factory default settings you would need to repeat the initial setup procedure as described in
11. 0 9 J 6 jojo 0 006866 For Non Linear Analog Output voltage range of 4 94 to 5 659 volts use this table Coefficients for y x gt ium S 100 624 b 0 37679 S 20 5623 d 0 0348656 Where y x pressure in Torr x measured analog output in volts Example Measured analog output voltage is 0 3840 V From first table shown above use equation 2 3 4 5 y x 2a bx cx dx ex fx X 0 3840 volts A 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008738 y x Pressure 1 0E 03 Torr The equations listed above are used to calculate the non linear voltage outputs for N2 air shown in the table below Non linear voltage outputs for various other gases are also shown in the same table InstruTech Inc Page 19 Instruction Manual CVM2 11 Stinger The following table is for use with CVM211 Stinger part numbers ending with the letter A providing a non linear analog output Non Linear analog output for CVM211GAA through CVM211GHA ESSE NE Pressure 0 375 0 375 0 375 0 376 0 376 0 877 0 379 0 381 0 384 0 385 0 392 0 395 0 417 0 412 0 4290 0 4410 0 4530 0 462 0 522 0 536 0 681 0 705 0 878 0 8680 0 900 1 155 11410 1 179 1 683 1 6640 1 668 2 172 2 841 2 8140 2 695 3 675 3 6720 3 316 3 670 4 576 4 6200 3 903 4 846 4 9160 4 071 4 0449 4 1220 5 019 5 111 5 223 5 329 5 419 5 494 5 534 5 5581 4 663 5 6141 4 706 4 745 0 375 0 375
12. 0 376 0 377 0 379 0 384 0 395 0 375 0 376 0 378 0 382 0 388 0 401 0 437 0 488 0 581 0 778 1 009 1 315 1 826 2 257 2 647 3 029 0 375 0 376 0 378 0 381 0 388 0 400 0 432 0 4800 0 4700 0 4330 0 4920 0 566 0 764 0 9900 0 9440 0 7680 1 0530 1 291 1 2650 1 8050 1 914 2 247 1 9760 2 6320 2 6660 3 508 3 0900 5 0590 3 7150 ______ 6726 6 8030 68900 6 9200 6 942 7 0000 7 056 6 642 0 451 0 544 0 668 0 847 1 194 eo ojojo eio 1 921 2 429 2 734 2 966 3 075 ojojo 3 308 3 430 3 618 3 827 3 938 4 016 4 076 4 124 4 166 4 190 4 203 4 237 4 270 3 414 3 509 3 660 3 883 4 005 4 088 4 151 4 203 4 247 4 271 4 286 4 321 ojo eo 5 106 5 2000 4 502 53150 4621 5 4220 4708 EEE pz 4 336 3 269 3 384 3 466 3 526 3 573 3 613 3 632 3 645 3 674 3 690 o ojojo o ojojo o o 4 775 4 830 4 860 4 877 4 919 e o o o e Values listed under each gas type are in volts Note By design these values are identical to the outputs from MKS Instruments Granville Phillips Convectron gauges Mini Convectron modules and controllers so that equivalent units can be interchanged without affecting your process system or software An analog output of less than 01 volts to near 0 volt indicates a damaged or faulty sensor Refer to the next page if you have a
13. 1 mTorr materials exposed to gases gold plated tungsten 304 amp 316 stainless steel glass nickel Teflon internal volume 1 589 in 26 cm internal surface area 9 25 in 59 7 cm weight 4 8 oz 136 g housing electronics molded plastic operating temperature 0 to 40 C storage temperature 40 to 70 C bakeout temperature 70 C max humidity 0 to 95 relative humidity non condensing altitude operating 8 200 ft 2 500 m max storage 41 000 ft 12 500 m max mounting orientation horizontal recommended orientation has no effect on measurements below 1 Torr analog output log linear 1 to 8 Vdc 1 V decade or non linear analog S curve 0 375 to 5 659 Vdc Granville Phillips compatible input power 12 to 28 Vdc 2 W protected against power reversal and transient over voltages setpoint relay one single pole double throw relay SPDT 1 A at 30 Vdc resistive or ac non inductive connector 9 pin D sub male CE compliance EMC Directive 2004 108 EC EN61326 1 EN55011 Low Voltage Directive 2006 95 EC EN61010 1 environmental RoHS compliant InstruTech Inc Page 3 Instruction Manual CVM2 11 Stinger 1 3 Dimensions fitting dimension A 1 8 in NPT male 1 2 in tube 1 00 in 25 4 mm NW16KF 1 30in 33 0 mm NW25KF 1 30 in 33 0 mm 4 12 in 104 7 mm aM 1 14 in 1 9 in NWAOKF 1
14. 2 4 00 oo 00 01 01 0f 02 02 02 05 05 05 07 08 10 14 16 20 33 40 50 66 81 97 13 1 161 198 hd 0 0 2 0 a 1 4 2 9 ES 00 0 01 0 05 1 0 1 20 2 60 A N gt Ciel l a N IE N 0 0 1 3 7 10 0 20 0 8 1 11 0 15 3 Ca os DES 0 e Q 1 2 5 1 0 4 1 1 7 13 1 16 1 19 8 22 2 9 14 1 Ca 0 0 2 549 25 600 348 100 107 465 20 210 315 a89 217 6m 594 657 359 100 600 940 S70 400 1 60 2 00 171 700 3 53 5 00 334 1 28 7 53 10 0 400 OP 103 497 178 279 200 580 OP 355 50 0 785 OP 842 100 883 OP 200 979 OP 300 113 OP 380 169 400 155 OP 485 224 50 161 OP 604 287 Cor Cor OP OP OP OP 5 725 690 N i CH 0 1 0 1 0 2 0 2 1 3 1 7 3 4 7 4 5 9 2 1 1 159 0 1 1 2 2 1 3 E EI 1 Q 6 59 229 1 2 0 0 E 7 8 22 9 25 2 57 12 3 OP OP OP 274 468 491 OP 3 32 599 642 OP 3 59 689 752 OP 3 94 763 842 OP 421 828 921 OP 36 4 95 OP OP OP OP OP OP 4 44 700 46 1 4 65 475 4 84 4 99 5 08 760 53 9 800 1000 Notes 1 OP overpressure indication display will read 999 Torr 2 Display auto ranges between Torr and mTorr at 1 Torr
15. 2 2 Safety Precautions Service and operation Ensure that the vacuum port on which the CVM211 vacuum gauge is mounted is electrically grounded Use an appropriate power source of 12 to 28 Vdc 2 W Turn off power to the unit before attempting to service the module Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this User Manual Contact qualified InstruTech service personnel for any service or troubleshooting condition that may not be covered by this User Manual It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised Do not use if the unit has been dropped or the enclosure has been damaged Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation 2 3 Electrical Conditions A WARNING When high voltage is present in any vacuum system a life threatening electrical shock hazard may exist unless all exposed electrical conductors are maintained at earth ground potential This applies to all products that come in contact with the gas contained in vacuum chambers An electrical discharge within a gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity A person could be seriously injured or killed by coming in contact with an exposed un
16. 59 4 OP 795 OP 111 lt Examples 1 Gas used is nitrogen N3 Display shows pressure measurement of 10 Torr True pressure of nitrogen is 10 Torr 2 Gas used is argon Ar Display shows pressure measurement of 600 mTorr True pressure of argon is 1 Torr 3 Gas used is oxygen O Display shows pressure measurement of 486 mTorr True pressure of oxygen is 500 mTorr InstruTech Inc Page 17 Instruction Manual 7 Analog Output The CVM211 is provided with either a non linear or a log linear analog output Non Linear Output The first Convectron gauge controllers produced a non linear output signal of 0 375 to 5 659 Vdc for 0 to 1000 Torr of N roughly in the shape of an S curve as shown at right Granville Phillips adopted the same output curve for most of their Mini Convectron modules and controllers with non linear output although in recent years some Granville Phillips controllers may output variations of the original S curve The non linear output from InstruTech convection gauges modules and controllers duplicates the original S curve of 0 375 to 5 659 Vdc for 0 to 1000 Torr The table shown in section 7 1 contains the lookup data for converting the non linear output voltage into pressure values for nitrogen and various other gases Log Linear Output Many InstruTech modules and controllers also provide a log linear output signal as an alternative to the non linear signal
17. AC mains power cord set available worldwide Input 100 240 Vac Output 24 Vdc 2 5 A 60 W Cable Length 6 ft InstruTech Inc Page 5 Instruction Manual CVM2 11 Stinger 2 Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service provided it is installed and operated within the strict safety guidelines provided in this manual Please read and follow all warnings and instructions To avoid serious injury or death follow the safety information in this document Failure to comply with these safety procedures could result in serious bodily harm including death and or property damage Failure to comply with these warnings violates the safety standards of installation and intended use of this instrument InstruTech Inc disclaims all liability for the customer s failure to comply with these instructions Although every attempt has been made to consider most possible installations InstruTech cannot anticipate every contingency that arises from various installations operation or maintenance of the module If you have any questions about the safe installation and use of this product please contact InstruTech 2 1 Safety Precautions General A WARNING There are no operator serviceable parts or adjustments inside the product enclosure Refer servicing to service trained personnel Do not modify this product or substitute any parts without authorization of qualified Ins
18. I InstruTech Inc CVM211 Convection Vacuum Gauge Module The Stinger User Manual Unit of measure in Torr mTorr InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000219 108 Instruction Manual CVM2 11 Stinger Importa nt User Information There are operational characteristic differences between solid state equipment and electromechanical equipment Because of these differences and because there are a variety of uses for solid state equipment all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner In no event will InstruTech Inc be responsible or liable for indirect or consequential damages that result from the use or application of this equipment Any examples or diagrams included in this manual are provided solely for illustrative purposes Because of the many variables and requirements imposed on any particular installation InstruTech Inc cannot assume responsibility or liability for any actual use based on the examples and diagrams No patent liability is assumed by InstruTech Inc with respect to use of information circuits equipment or software described in this manual Throughout this manual we use notes notices and apply internationally recognized symbols and safety mes
19. TIAL DAMAGES TO PERSONS OR PROPERTY FOR INCIDENTAL DAMAGES OR LOSS OF TIME FOR ANTICIPATED OR LOST PROFITS OR ANY OTHER LOSS INCURRED BY THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY THIS EXCLUSIVE REMEDY SHALL NOT BE DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING EXECUTED BY AN AUTHORIZED OFFICER OF SELLER InstruTech Inc Page 26 InstruTech Inc 1475 S Fordham St Longmont CO 80503 USA Phone 1 303 651 0551 Fax 1 303 678 1754 E mail info instrutechinc com www instrutechinc com p n 000219 108
20. ally a wire at some constant temperature and measure the current or power required to maintain that temperature A standard Pirani gauge has a useful measuring range of about 10 Torr to 10 Torr By taking advantage of convection currents that are generated above 1 Torr convection enhanced Pirani gauges increase the measuring range to just above atmosphere The InstruTech CVM211 Stinger module provides the basic signal conditioning required to turn a convection vacuum gauge into a complete measuring instrument There are two different models of Stinger One model provides a non linear analog output and one setpoint relay The non linear analog output is identical to the MKS Instruments Granville Phillips S curve The other model provides a Log linear analog output and one setpoint relay A built in display provides a convenient user interface for setup and operation of the vacuum gauge This User Manual is intended to be used with CVM211 displaying pressure in Torr mTorr units of measure 1 2 Specifications measurement range 1x104 to 1 000 Torr 1 3 x 10 to 1 333 mbar 1 3 x 10 Pa to 133 kPa accuracy N typical 1x104 to 1x10 Torr 0 1 mTorr resolution 1 3x10 to 400 Torr 1096 of reading 400 to 1 000 Torr 2 5 of reading repeatability typical 296 of reading display 3digit LED 3 digits from 999 Torr to 10 0 mTorr 2 digit LED from 9 9 mTorr to 1 0 mTorr 1 digit LED from 0 9 mTorr to 0
21. ations and note the following NPT fittings When connecting the device using a NPT fitting apply a thread sealant compound or wrap the threaded portion of the tubing with one and a half to two wraps of pipe thread seal tape such as PTFE Teflon tape and hand tighten the gauge into the gauge port Do not use a wrench or other tool which may damage the gauge InstruTech Inc Page 9 Instruction Manual CVM2 11 Stinger 3 2 Electrical Installation 3 2 1 Grounding A Be sure the vacuum gauge and the rest of your vacuum system are properly grounded for safety as well as intended operation of the equipment When using KF flanges metal clamps must be used to ensure proper grounding Be aware that some vacuum fittings such as NPT connections installed using Teflon tape may not allow for metal to metal contact between the vacuum gauge and the vacuum chamber If such is the case use a 12 gauge or larger copper wire to connect the vacuum gauge to a ground lug on your vacuum chamber as shown below Gauge tube Use 12 gauge or larger ground wire Metal clamp or metal hose clamp Ground lug Vacuum Chamber Vacuum gauge fitting 3 2 2 Electrical Connections A good recommended practice is to remove power from any cable prior to connecting or disconnecting it The InstruTech CVM211 will directly replace Granville Phillips Mini Convectron modules that have a 9 pin D sub connector DE 9P and you can u
22. d and air gradually displaces the N in the gauge For most other gases the effect is much more significant and may result in a hazardous condition as described below Other considerations when using gases other than N air Flammable or explosive gases A WARNING InstruTech convection gauges are neither intrinsically safe nor explosion proof and are not intended for use in the presence of flammable or explosive gases or vapors Under normal conditions the voltages and currents in InstruTech convection gauges are too low to cause ignition of flammable gases However under certain failure conditions sufficient energy could be generated to cause flammable vapors or gases to ignite or explode Thermal conductivity gauges like the InstruTech convection gauges are not recommended for use with flammable or explosive gases Moisture water vapor In some processes lyophilization for example the gas composition may not change significantly except for moisture content Water vapor can significantly change the response of a thermal gauge and correction should be made as you would for any other gas Other contaminants If your gases condense coat or corrode the sensor the gauge calibration and response to different gases will change Generally if the gauge can be calibrated zero and span settings these changes are small enough to be ignored If you can t set zero and span the gauge should be replaced or return to factory for evalua
23. described above This output shown at right is a 1 Volt per decade signal that may be easier to use for data logging or control The table shown in section 7 2 contains the lookup data and provides the formulas for converting the log linear output voltage into pressure values for nitrogen and various other gases CVM211 Stinger Non Linear Analog Output Output Volts Pressure Torr 103 10 107 10 10 10 109 Log Linear Analog Output Output Volts Pressure Torr 10 10 107 10 10 410 10 InstruTech Inc Page 18 Instruction Manual CVM2 11 Stinger 7 1 Non Linear Analog Output You may calculate the N air pressure represented by the 0 375 to 5 659 V non linear analog output voltage for the S curve using a multi segment n order polynomial function calculation The coefficients for the n order polynomial equation defined for various pressure measurement ranges are given in the following table For Non Linear Analog Output voltage range of 0 375 to 2 842 volts use this table Coefficients for y x a bx cx dx ex f 0 02585 0 03767 0 04563 0 1151 0 04158 0 9 6 jojo 0 008738 For Non Linear Analog Output voltage range of 2 842 to 4 945 volts use this table o cx ex Coefficients for v x 12h date fan 0 1031 0 3986 0 02322 0 07438 0 07229
24. e factory As such it is very important to perform your own initial setup and calibration by setting zero and span atmosphere with the gauge installed in your actual system Please note the following Setting Zero vacuum Setting zero optimizes performance of the gauge when operating at a low pressure range of 1 00 x 10 Torr to 1 00 x 10 Torr If your minimum operating pressure is higher than 1 00 x 10 Torr it is not normally necessary to set zero and thus setting atmosphere should be adequate If you are able to evacuate your system to below 1 00 x 10 Torr it is always a good practice to check and set zero if necessary See zero adjustment in section 4 3 Setting Span atmosphere Setting span atmosphere is the most important step for a newly installed gauge If you prefer to use air to set atmosphere vent your vacuum system chamber to expose the gauge to the local atmospheric pressure air and set atmosphere to match your known local uncorrected barometric pressure air This is the reading of ambient air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding the outside of your chamber At sea level this pressure is usually near 760 Torr At elevations above sea level the pressure decreases Check your local aviation authority or airport web sites or your current local weather conditions online to help find your local uncorrected barometric pressure if you do not have this information
25. e normal pressure display To proceed to next step without changing the zero value press select Readout displays current span value Factory default 760 Torr Is system backfilled with air or N to some known pressure above 400 Torr Or open to atmosphere with known barometric pressure Use up down keys to change the displayed value to agree with the known pressure To exit setup mode and return to the Press and hold select for 3 seconds until the display normal pressure display without switches from the original span value to the new saving a new span value press span value Unit will then exit setup menu and lt select gt briefly return to the normal pressure display mode To return all settings to original factory defaults press up key and hold for 5 seconds Display will read dEF After 5 seconds factory default settings will replace all user settings and readout will return to normal pressure display InstruTech Inc Page 14 Instruction Manual CVM2 11 Stinger 5 Using the gauge with different gases A thermal conductivity gauge senses heat loss which depends on the thermal conductivity of the gas surrounding the sensor Since different gases and mixtures have different thermal conductivities the indicated pressure readings and outputs will also be different InstruTech convection gauges and most other thermal conductivity gauges are calibrated using nitrogen N2 When a
26. grounded electrical conductor at high voltage potential This condition applies to all products that may come in contact with the gas inside the vacuum chamber vacuum pressure containment vessel 2 3 1 Proper Equipment Grounding A WARNING Hazardous voltages that could seriously injure or cause death are present in many vacuum processes Verify that the vacuum port on which the CVM211 vacuum gauge module is mounted is electrically grounded Consult a qualified Electrician if you are in doubt about your equipment grounding Proper grounding of your equipment is essential for safety as well as intended operation of the equipment The CVM211 module vacuum gauge must be connected directly to a good quality earth ground Use a ground lug on the CVM211 gauge vacuum connection flange if necessary A WARNING In order to protect personnel from electric shock and bodily harm shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system 2 3 2 Electrical Interface and Control It is the user s responsibility to ensure that the electrical signals from this product and any connections made to external devices for example relays and solenoids are used in a safe manner Always double check the system InstruTech Inc Page 7 Instruction Manual CVM2 11 Stinger set up before using any signals to automate your process Perform a hazardous operation analysis of your system design and ensure safegua
27. hange the value use the up down keys Then press select to save and go to the next step 4 The readout displays the value of the setpoint turn off pressure The relay de energizes when the pressure is above this value Factory default 200 mTorr 5a To keep this value and proceed to the next step press select 5b To change the value use the up down keys Then press select to save and go to the next step 6 The readout will display 000 to indicate the unit is in the zero adjust mode To properly set zero with the CVM211 installed on your vacuum system the gauge should be evacuated to a pressure below 1 00 x 104 Torr Factory default 000 mTorr 7a If the gauge is not evacuated to a pressure below 1 00 x 104 Torr press select to proceed to the next step without saving a new zero value 7b If the gauge is evacuated to a pressure below 1 00 x 10 Torr press down to save the new user zero and proceed to the next step 8 The readout will display the current span value To set the atmospheric pressure reading also known as the span adjustment flow nitrogen gas or air into your closed vacuum chamber to allow the pressure to rise to a known value above 400 Torr Alternatively if your local uncorrected barometric pressure air is known simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure Factory default 760 Torr 9a If you do
28. late contamination is the most difficult to remove as particles can become stubbornly trapped inside the gauge In some processes solid particles are created during the process throughout the chamber including inside the gauge Particles tend to form on cooler surfaces such as in a gauge at room temperature You may slow down the build up of particles in the gauge by keeping the gauge warm within specified limits during the process cycle Particles in the process chamber may be swept into the gauge during the vent cycle The CVM211 has a screen built into the gauge port to help keep the largest particles out of the gauge In very dirty applications or where particles are small enough to get through the screen an additional filter installed on the inlet may help prolong the gauge life In some vacuum processes desorbed and sputtered materials from the process may enter vacuum components connected to the process vacuum chamber by line of sight transport especially under high vacuum conditions i e in the molecular flow regime To prevent materials that may be transported via line of sight momentum from entering your vacuum gauge or other components it is advisable to install some form of apparatus that will block the line of sight In many cases a simple 90 elbow may help prevent or reduce the transport of particles from entering your vacuum gauge In the event of gauge contamination please contact the factory to return the gauge for possible clea
29. module by cleaning Contamination may be as simple as condensed water or as difficult as solid particles Oils and hydrocarbons Exposure of the gauge internal surfaces to oils and hydrocarbons can result in sensor contamination Some of these types of contamination may be removed by cleaning the gauge If there is the possibility of oil back streaming from wet vacuum pumps it is recommended that a filter or trap be installed to prevent contamination of components of your vacuum system Condensation Some gases such as water vapor can condense on sensor surfaces forming a liquid coating that changes the rate at which heat is removed from the sensor which changes the calibration The sensor can often be restored simply by pumping on the gauge between process cycles A dry N purge will help speed up InstruTech Inc Page 24 Instruction Manual CVM2 11 Stinger drying or the gauge may be gently heated provided temperature doesn t exceed the specified limit of 40 C operating Coatings Some gases can condense on sensor surfaces forming a solid coating which changes the rate at which heat is removed from the sensor Some of these coatings may be removed by cleaning the gauge Particles Particles generated by the process may enter the gauge during the process cycle or during the venting cycle The result is interference with heat removal from the sensor In this case cleaning may be able to remove particles from the gauge However particu
30. ning if the gauge has not been exposed to hazardous materials 8 5 Module and sensor replacement The CVM211 module is factory calibrated for the specific sensor gauge tube installed in it If the device fails for any reason return the CVM211 to the factory to determine if either the sensor or the electronics could be replaced or if the entire module should be replaced InstruTech Inc Page 25 Instruction Manual CVM2 11 Stinger 9 Factory Service and Support If you need help setting up operating troubleshooting or obtaining a return materials authorization number RMA number to return the module for diagnosis please contact us during normal business hours 8 00am to 5 00pm Mountain time Monday through Friday at 303 651 0551 Or e mail us at support instrutechinc com For the safety of our employees you must down load a material disclosure form from our website at www instrutechinc com Please use this form to provide a history of the gauge detailing what gases have been used We cannot work on gauges that have been exposed to hazardous materials 10 Warranty SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in SELLER s catalog or product specifications under the normal use and service for which they are intended The entire warranty obligation of SELLER is for the repair or replacement at SELLER s option of products or parts examination of which shall disclose to
31. ration Ensure gauge is not mounted where excessive vibration is present Gauge cannot be calibrated zero and Contamination Return to factory for possible cleaning span can t be adjusted P J Sensor failure for other cause Return to factory for evaluation Setpoint does not actuate Incorrect setup Check setpoint setup Display shows bAd Sensor wire damaged Return to factory for evaluation Atmospheric pressure reads too high and Contamination Return to factory for possible cleaning can t be set to correct value Sensor wire damaged Return to factory for evaluation Atmospheric pressure reads too low and Sensor wire damaged Return to factory for evaluation can t be set to correct value Contamination Return to factory for possible cleaning InstruTech Inc Page 23 Instruction Manual CVM2 11 Stinger 8 4 Contamination The most common cause of all vacuum gauge failures is contamination of the sensor Noisy or erratic readings the inability to set zero or atmosphere and total gauge failure are all possible indications of gauge contamination Contamination can be generally characterized as either A a reaction of process gases with sensor elements or B an accumulation of material on the sensor elements Sensors that fail due to chemical reaction are generally not salvageable Sensors that fail due to condensation coatings or particles may possibly be restored by cleaning A Reactive Gases If process gase
32. rds and personnel safety measures are taken to prevent injury and property damage 2 4 Overpressure and use with hazardous gases A WARNING Install suitable protective devices that will limit the level of pressure inside your vacuum chamber to less than what the vacuum chamber system components are capable of withstanding InstruTech gauges should not be used at pressures exceeding 1000 Torr absolute pressure In cases where an equipment failure could cause a hazardous condition always implement fail safe system operation For example use a pressure relief device in an automatic backfill operation where a malfunction could result in high internal pressures if the pressure relief device was not installed on the chamber The CVM211 vacuum gauge module is not intended for use at pressures above 20 psia 1000 torr DO NOT exceed 35 psig lt 2 bars pressure inside the sensor If your chamber goes to higher pressures you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions With some fittings actual safe overpressure conditions may be lower for example a quick connect O ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few psi over local uncorrected barometric atmospheric pressure A CAUTION If the internal pressure of a vacuum gauge device is allowed to increase above local uncorrected barometric pressure atmospheric pressu
33. re side vacuum fittings may release and possible overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the atmosphere of the surrounding environment Toxic pyrophoric and flammable gases are examples of hazardous gases that if allowed to leak out of the vacuum pressure containment vessel into the atmospheric environment could cause bodily injury and possible damage to equipment Never expose the gauge tube internal volume to pressure above local atmospheric pressure when using hazardous gases 2 5 Gases other than Nitrogen air A WARNING Do not attempt to use with gases other than nitrogen N2 or air without referring to correction factor data tables InstruTech gauges and modules are calibrated for direct readout of nitrogen or air Do not attempt to use with other gases such as argon Ar or carbon dioxide CO unless accurate conversion data for N to other gas is properly used Refer to sections titled Using the gauge with different gases Display and Analog Output for a more complete discussion A WARNING Do not use this device in an explosive atmosphere or in the presence of flammable gases vapors or fumes Do not use this device to measure the pressure of explosive or combustible gases or gas mixtures The sensor wire in the gauge normally operates at 125 C but if malfunction should occur the wire temperature could exceed the ignition temperature of certain combustible gases and
34. rr If your minimum operating pressure is higher than 1 00 x 10 Torr it is not normally necessary to perform calibration at zero and thus span calibration should be adequate If you are able to evacuate your system to below 1 00 x 10 Torr it is always a good practice to check and set zero if necessary This will also improve performance in cases where gauge contamination is causing higher readings than 1 00 x 10 Torr even though the system has been evacuated to below 1 00 x 10 Torr Care should be exercised when using gases other than nitrogen N air 8 2 Maintenance In general maintenance is not required for your InstruTech module Periodic performance checks may be done by comparing the gauge to a known reference standard 8 3 Troubleshooting Possible Cause Possible Solution Display is off blank Check power supply amp power cable Readings appear very different from The process gas is different from the gas Correct readings for different gas expected pressure used to calibrate the CVM211 thermal conductivity See section 5 on using the gauge with different gases Module has not been calibrated or has Check that zero and span are adjusted been calibrated incorrectly correctly Readings are noisy or erratic Loose cables or connections Check and tighten connections Contamination Inspect gauge for signs of contamination such as particles deposits discoloration on gauge inlet Return to factory for possible cleaning Vib
35. s react with the materials of construction of the sensor the result is corrosion and disintegration of the sensor over time The chemistry of the gases used for plasma etching and other reactive semiconductor processes are examples where this failure mode is possible In this case cleaning can t solve the problem because the sensor has been destroyed The sensor or module must be replaced If you experience this failure mode quickly or frequently you should consider a different vacuum gauge for your application Thermal vacuum gauges may be available with different sensor materials that are not as reactive with your particular process gases The standard gold plated tungsten sensor used in the InstruTech convection gauge is offered for use with air and inert gases such as N argon etc InstruTech also offers platinum sensors for applications not compatible with gold plated tungsten There is no material that is universally chemical resistant your choice of vacuum gauge as well as all other vacuum components should take into consideration the potential reactions between your process gases and the materials of construction Consider what effect water vapor will have when combined with your process gases because a finite amount of water will enter the chamber during venting to atmosphere with air B Oil Condensation Coatings and Particles If the failure is due to an accumulation of material in the gauge we may be able to restore your gauge or
36. sages to make you aware of safety considerations AN WARNING Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in death or serious injury property damage or economic loss A CAUTION Identifies information about practices or circumstances that can cause electrical or physical hazards which if precautions are not taken could result in minor or moderate injury property damage or economic loss NOTICE Identifies information that is critical for successful application and understanding of the product deen HAZARD Labels may be located on or inside the device to alert people that dangerous voltages may be present InstruTech Inc Page 1 Copyright 2012 by InstruTech Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by InstruTech Inc Printed in the United States of America Swagelok VCO VCR are registered trademarks of Swagelok Co Solon OH Convectron Mini Convectron and Granville Phillips are registered trademarks of MKS Instruments Andover MA Teflon is a registered trademark of E du Pont de Nemours and Company Wilmington DE Conflat is a registered trademark of Varian Inc
37. se your existing cables and electronics For new installations fabricate a cable to connect to the signals functions you want to use Signals and pin assignments are described below Connector and Pinout PIN NUMBER PIN DESCRIPTION Relay 1 Normally Open Relay 1 Normally Closed Power Input 12 28 Vdc Power Ground Analog Output Log Linear 1 8 V or Non linear Granville Phillips compatible Relay 1 Common Relay Disable Disables Relay 1 when connected to pin 4 Ground Analog Ground e e O 00 NI On 1 3 QO N InstruTech Inc Page 10 Instruction Manual CVM2 11 Stinger 4 Setup and Operation 4 1 Initial Setup Two of the most important steps for the initial setup of the gauge are to set zero and set span atmosphere as described in the Programming section 4 3 below This will ensure proper operation of the gauge and accurate pressure measurements The gauge is calibrated at the factory using nitrogen Furthermore the gauge is also installed in a certain orientation when calibrated at the factory Without setting zero and atmosphere after the gauge is installed in your system the gauge may not display the expected and correct pressures This could be caused by the fact that you may be using a different gas than Nitrogen such as air to setup and calibrate the gauge most commonly the case and the gauge orientation is different than the orientation used at th
38. section 4 1 and reprogram other parameters as required InstruTech Inc Page 13 Instruction Manual CVM2 11 Stinger User Interface Map Normal pressure display To enter setup mode press and hold select for 3 seconds Readout displays value of setpoint turn on pressure Relay energizes when pressure is below this value Factory default 100 mTorr To keep this value and go to next To change this value use up down keys Then step press select press select to save and go to next step Readout displays value of setpoint turn off pressure Relay de energizes when pressure is above this value Factory default 200 mTorr To keep this value and proceed to To change this value use up down keys Then next step press select press select to save and go to next step Readout displays 000 to indicate unit is in zero adjust mode Factory default 000 mTorr I I I I I I l I I I I I I I I I l Li I l I l I Is system evacuated to a pressure below 1 00 x 10 Torr i I l 1 l i Press lt down gt to save the new user zero and exit 1 l I I I l l I L j LI I I I I l l I I I I I I I I I I I I I Li to th
39. system reaches a pressure of 760 Torr true pressure your gauge will be reading about 23 Torr Continuing to backfill your system attempting to increase the reading up to 760 Torr you will over pressurize your chamber which may present a hazard Ex C If the gas is helium He the gauge will read 999 Torr when pressure reaches about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both people and product CAUTION What these examples illustrate is that using gases other than nitrogen N without using accurate gas conversion data and other proper precautions could result in injury to personnel and or damage to equipment Suggested precautions when using gases other than nitrogen N Install a pressure relief valve or burst disk on your chamber to protect it from overpressure Post a warning label on your gauge readout that states Do Not Exceed Torr Indicated Pressure fill in the blank for maximum indicated pressure for the gas you use so that an operator using the gauge will not exceed a safe pressure InstruTech Inc Page 16 Instruction Manual CVM2 11 Stinger 6 Display The table below shows the displayed readings at various pressures for selected gases Displayed Pressure Readings vs True Pressure for selected gases Pressures shown in bold italic font in the shaded areas are in mTorr Pressures shown in normal font and in non shaded areas are in Torr True Total 0 1 0
40. tion and possible cleaning InstruTech Inc Page 15 Instruction Manual CVM2 11 Stinger Convection Vacuum Gauge Indicated vs True Total Pressure Test Gases N2 Ar He 1000 100 0 1 True Total Pressure Torr capacitance manometer 0 01 0 001 4 0 0001 0 001 0 01 0 1 1 10 100 1000 Indicated Pressure Torr convection gauge 8 CVG N2 4 Convectron N2 CVG Ar x Convectron Ar Convectron He e CVG He Gas Correction Chart The Y axis of the above chart is actual pressure as measured by a capacitance manometer a diaphragm gauge that measures true total pressure independent of gas composition The X axis is the pressure reading indicated by the convection gauge under test This chart shows readings for an InstruTech convection gauge CVG and Granville Phillips Convectron gauge to illustrate that the difference in the response for both of these types of gauges is virtually indistinguishable CAUTION Do not assume this data applies to other convection gauges which may or may not be the same Refer to the table in section 6 and note the following examples Ex A If the gas is nitrogen N when the true total pressure is 500 Torr the gauge will read 500 Torr Ex B If the gas is argon Ar when the true pressure is 100 Torr the gauge will read about 9 Torr If you are backfilling your vacuum system with Ar when your
41. truTech service trained personnel Return the product to an InstruTech qualified service and repair center to ensure that all safety features are maintained Do not use this product if unauthorized modifications have been made A WARNING Source power must be removed from the product prior to performing any servicing After servicing this product ensure that all safety checks are made by a qualified service person When replacement parts are required ensure that the parts are specified by InstruTech Inc Substitutions of non qualified parts may result in fire electric shock or other hazards Use of unauthorized parts or modifications made to this product will void the warranty To reduce the risk of fire or electric shock do not expose this product to rain or moisture These products are not waterproof and careful attention must be paid to not spill any type of liquid onto these products Do not use these products if they have been damaged Immediately contact InstruTech Inc to arrange return of the product if it is damaged Due to the possibility of corrosion when used in certain environmental conditions it is possible that the product s safety could be compromised over time It is important that the product be periodically inspected for sound electrical connections and equipment grounding Do not use if the equipment grounding or electrical insulation has been compromised InstruTech Inc Page 6 Instruction Manual CVM2 11 Stinger
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