User Manual MP84E - Physik Instrumente
Contents
1. M 511 HD stages are protected against running into the hard stop by magnetic limit sensors Hall effect sensors with TTL drivers at each end of travel The limit switches act to inhibit commanded motion as appropriate The limit signals TLL active high are available on the controller connector CAUTION Crashes can cause irreparable damage Test limit switch operation at low speeds Stop system if necessary Do not let it run against a hard stop 3 2 Position Reference Signal Sensors A position reference sensor is located approximately in the middle of the operating range and can be used to determine the absolute position of the stage within 1 um accuracy Always approach the reference sensor from the same side to reach the same position The difference in the reference points when approached from the positive side and from the negative side is about 0 2 mm to 0 4 mm The reference sensor in M 511 HD stages provides a static signal level which depends on the platform position If the platform is on the positive side of the reference switch the signal is 5 V while if the platform is on the negative side the signal level is O V see Fig 3 3 3 Linear Scale Position Encoder An optical linear encoder is mounted in the M 511 HD series stages lt measures relative motion with 0 002 um linear resolution and can be used at velocities up to 125 mm s The optical encoder is mounted in the center of the stage close to the pla2. Fig 5 shows the step performance with a series of 10 nm steps forward and backward The motion was measured with an external interferometer The hysteresis measured is considerably less than 1 nm During motor motion the piezo actuator compensates for the influences of friction and roughness as shown in Fig 6 vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 17 EYOA sotog OZ J PFNOYYONQO ZE I 12 13 14 15 400 Page 18 340 360 380 Positioning P I Nano Piezo Technical Data i i i i i i i i Le eb a r E TTT TES TT TTA I E e e I I I LI 1 LI LI I LI I 1 LI LI 1 1 LI i i i i i i LI i i I I I I LI i i i i i I I I I i I I LI I I I I LI I LI LI I ae ee Oe a Do m ie keshe P Sema e e Si E eet e ee m I I I i I LI i I LI LI LI I 1 LI I 1 1 I t LI 1 1 LI 4 LI 1 i i i i i i i I i i i i i i i I I H i i I I I I LI I I I i i I i Ti i 1 i i 1 jeme mjm m a E jam jem i oo LI LI LI i 1 1 U LI i i i I r LI I i i I LI 1 LI LI I 1 i i i i Ti i i i 1 i i i i i i i i i i i i i i i i i I i I LI 1 I i ad Genes earn Po Rt Mr ee ree Bia ne n md mh wig i i i i i i I i i i i i LI LI I I T LI LI I I I LI i i 1 u i 1 i i i S i i I i i i i LI I i i i i rt minimi es es es ioa i ias ee mal ni pi X fak r i i i i i i i i i i i i i i I M i i I i i i I I r i 1 I 1 I 1 1 I i i i i i i i 1 i shtek m hem eM k b m e o m e e i LI I I 1 mi I 1 t I Aa 1 i i i imi i i
3. Make sure that metal dust and liquid spray do not enter the case via the gap between the cover and the aluminum body 2 1 2 Mounting Be sure not to exceed load limits during or after mounting Standard M 511 HD series stages can be mounted horizontally or vertically If subjected to normal gravitational loading when mounted vertically the motor housing must be at the top end To achieve the specified guiding accuracy the stages have to be mounted on a surface flat enough to avoid torsion of the basic profile NOTE If the counter sunk mounting holes in the stage base are covered by the platform you must first move the platform to a position which allows access Read Moving the Stage p 8 for instructions To mount an M 511 HD stage on a base plane use the two holes for M6 screws or the four counter sunk holes for M4 screws in the stage base and the corresponding mounting screws which come with the stage The arrangement of the M6 holes complies with the 25 mm hole pattern of standard metric honeycomb tables You have best access to the M6 mounting holes when the platform is at its central reference switch for reaching the reference position see the controller User Manual vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 7 Piezo Nano Positioning PI Start Up 2 2 Mioving the Stage WARNING Crush Hazard Never put anything where the moving platform or any connected object could possibly trap it The moving plat
4. i i i i I i I i U ul i i 1 Mi 1 i 1 i 1 u i 1 i i a shoenke amp k gt ees mts nr E i x i i I I I 1 I I 1 1 i i LI LI LI i LI 1 1 LI 1 km LI i i i i i i i i aol i I I i i I i I I 1 I 1 1 bsshashmahoni ksshesmnb t k L ba i i i Pa i i a i n t I LI I i 1 I I I i 1 I I I LI 1 a 4 LI i i MM u i i i i i i i i i al i i i 8 I L L 1 I L L 1 L 1 i L L T e i E E E Fo m NS ee es oe T t i i i i i i i i i i i I I I I LI I I I Ti i i 1 1 1 i i m eee ee T ee See e oe ee ee ee ee Tr eS ee a a ban lime a ea LI I I I 1 I LI I i i 1 1 i i i 1 i i L i i LI i I i 1 LI LI i i i i i i r E n p I LI LI i i i i i i I E p LI i i I Taikaa LI a i ti i ni i U i E a i i u smerna see vnueene 240 260 280 180 200 60 80 220 Time msec 160 120 140 100 40 Fig 6 Motor voltage velocity and piezo voltage position correction during 20 um step M 511 HD MP84E Release 1 0 0 VYVVVV PI VVS Technical Data Piezo Nano Positioning PI 5 3 Dimensions 107 283 130 uo uo 46 27X M48 43 PI Standard Hole Pattern 26 23 mj Wo 5 Fig 7 M 511 HD dimensions in mm decimal places separated by commas in drawings vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 19 Piezo Nano Positioning PI Technical Data 5 4 Pin Assignments 5 4 1 Controller Connector The pin numbers and associated signal names of the
5. than 1 um 100 mm The stage base is precision machined from high density stress relieved aluminum for exceptional stability and minimum weight vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 3 Piezo Nano Positioning PI Introduction Low voltage PZTs 36 V and flexures are employed in the piezo drive section The flexures provide zero backlash motion and excellent guiding accuracy 1 3 Prescribed Use Based on their design and realization M 511 HD Ultra High Resolution Positioners must not be used for applications other than stated in this manual Observe the safety precautions given in this User Manual Operation other than instructed in this Manual may affect the safeguards provided M 511 HDs conform to Measurement Category CAT I and may not be used for Measurement Categories Il III or IV Other use of the device i e operation other than instructed in this Manual may affect the safeguards provided M 511 HDsmeet the specifications of EN 61010 for safe operation and are designed to operate under normal ambient conditions at least as listed here More stringent conditions given in the Specifications table p 15 are of course also met m Indoor use m Altitude up to 2000 m m Temperature range 5 C to 40 C m Max relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C m Line voltage fluctuations not greater than 10 of the line voltage m Transient
6. 2 AA Dago SS sh a 12 42 CUstomer SEVICE pesien a are a a nete epe 13 43 DISDOSAll pane 14 Technical Data 15 OA SSPECINCAUONS pt A E E ES 15 52 PENONNAMCO s gjin nde a A 17 99 MBIMEDSION Seni iecesaciele uceasccanrsoentcainiaceateate E T 19 54 PIMVASSIOMIMGIMNS den gota ruset te od da 20 541 Controller Connector aaa aaa anen nene nane ea eke ea eke ese re eee rene re ee ecen 20 542 Power Comme ctor aaa aaan aa ana na ananas enen sirene e pese tete eres et eee rene rene eres 20 M 511 HD MP84E Release 1 0 0 Page 1 Piezo Nano Positioning PI Introduction 71 Introduction 11 M 511 HD Description M 511 HD Ultra High Resolution Positioners are equipped with a combination drive consisting of a motorized and a piezo actuator which provides minimum incremental motion of 4 nm High resolution incremental scales and appropriate interpolation electronics achieve a design resolution of 2 nm Reference and limit switches are integrated for easy handling and protection of the equipment The M 511 HD can be controlled by the C 702 Hybrid controller The M 511 HD features can be summarized as follows m 100 mm Travel Range with 2 nm Actual Resolution E Speeds up to 125 mm s m Load Capacity to 50 kg m Millisecond Settling to Nanometer Accuracy m High Velocity Constancy m Active Compensation of Stick Slip Effects While Starting m Active Compensation of Backlash m Reliable Execution of Minimal Increments m High Drive and Holding
7. Forces at Minimal Power Consumption and Heat Generation Hybrid systems are ideal for applications where the position of an incident needs to be read and to be repositioned precisely or where an external target position needs to be hit within few a nanometers such as in surface inspection or metrology vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 2 Piezo Nano Positioning PI Introduction Fig 1 M 511 HD with C 702 controller 1 2 Hybrid Technology Pls hybrid technology stages are driven by both a flexure guided piezo actuator and DC motor at the same time Because a single extremely high resolution incremental sensor placed close to the moving platform is used for the servo loops of both drives nanometer realm trajectory resolution is attained over the entire 100 mm travel range Single LELIITILLILITILI PI Hybrid Fig 2 Hybrid system schematic representation The incremental sensor sees the position of the platform which is driven by both the piezo and the motor at the same time During operation the piezo actuator vvith a travel range of a fevv microns is continuously working to smooth out the motion irregularities of the motor This is made possible by the controller which calculates the desired trajectory and controls the motion with two separate servo loops running at different rates but using data from the same sensor Precision recirculating ball bearings assure straightness of travel of better
8. H 8 Co KG Karlsruhe Germany The text photographs and drawings in this manual enjoy copyright protection With regard thereto Physik Instrumente PI GmbH amp Co KG reserves all rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Document Number MP84E Release 1 0 0 M 511HD User MP84E100 doc This manual has been provided for information only and product specifications are subject to change vvithout notice About This Document Users of This Manual This manual is designed to help the reader to install and operate M 511 HD Ultra High Resolution Positioning Stage with Hybrid Drive It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The manual describes the physical specifications and dimensions of the M 511 HD Linear Positioning Stages as well as the motion control parameter settings which are required to put the associated motion system into operation This document is available as a PDF file For updated releases visit the download area on www pi ws contact your Physik Instrumente Sales Engineer or write info pi ws Conventions The notes and symbols used in this manual have the following meanings Calls attention to a procedure practice or condition which if not correctly performed or adhered to could result in injury or death CAUTION Calls attention to a proc
9. Piezo Nano Positioning PI MP84E User Manual M 51 1 HD Ultra High Resolution Positioner Release 1 0 0 Date 2008 02 27 This document describes the follovving product E M 511 HD Ultra High Resolution Positioning Stage vvith Hybrid Drive Pi Hybrid O Physik Instrumente PI GmbH 8 Co KG Auf der Romerstr 1 76228 Karlsruhe Germany Tel 49 721 4846 0 Fax 49 721 4846 299 Moving the NanoWorld www pi ws info pi ws www pi ws Declaration of Conformity according to ISO 1 IEC Guide 22 and EN 45014 Manufacturer Physik Instrumente PI GmbH amp Co KG C Manufacturer s Auf der Romerstrasse 1 Address D 76228 Karlsruhe Germany The manufacturer hereby declares that the product Product Name Ultra High Resolution Positioning Stage with Hybrid Drive Model Numbers M 511 HD Product Options all complies with the following European directives 73 23 EWG Niederspannungsrichtlinie 73 23 EEC Low voltage directive 89 336 EWG EMV Richtlinie 1 89 336 EEC EMC Directive 98 37 EG Maschinenrichtlinie 1 98 37 EC Machinery Directive The applied standards certifying the conformity are listed below Electromagnetic Emission EN 61000 6 3 EN 55011 Electromagnetic Immunity EN 61000 6 1 Safety Low Voltage Directive EN 61010 1 Safety of Machinery EN 12100 February 20 2007 Karlsruhe Germany VW paa Dr Karl Spanner President Copyright 1999 2008 by Physik Instrumente PI Gmb
10. edure practice or condition which if not correctly performed or adhered to could result in damage to equipment NOTE Provides additional information or application hints Related Documents The motion controller and the software tools which might be delivered with M 511 HD Linear Positioning Stages are described in their own manuals Updated releases are available for download from www pi ws or email contact your Physik Instrumente Sales Engineer or write info pi ws vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 4 vvvvvv pi vvs Contents Introduction 2 E UVES FISD IDESCHIDUOMN nenit den AAT 2 M2 WYONG LCCMNOIOGY sz torsade a 3 l3 SPTOSCTID Q 2 S pe ean 4 14 Safety Precautions s n n s an zhkoEnt duart dd dyti ace 5 Io Unpacking sna tash at nscaesutcenicteba E 5 Start Up 1 21 Mechanical Mounting aaa nnaa nana ann nena kene k e ner ene rene rene tee ee eren re ne T 2 1 1 Operating Environment aaa aaa ena eee e ee nene pene eee rei ne ee epe eee T 22 Mounino on Sc oh nsec ats a t shina e ntackdea a thaivadeas T 22 MOVING the Stagenn EE 8 Operational Considerations 10 S MEIMIE SIVILON Sh gazit vese dd adi seevundysuchsouais suoceuntavaanees 10 32 Position Reference Signal Sensors nana aaa nanen nee ee ane enes 10 33 Linear Scale Position Encoder aaa aaa aaa nana aaa nenen ek ea er ee r ese ees 10 34A Controle ag 11 34 1 MAnle h ANCE qanin pranstaadasacntaniiasnadiwiwndd samiesueds 11 Troubleshooting 1
11. form can accelerate rapidly and generate high forces which can cause damage or injury l Do not exceed the push pull load capacity in the motion direction itis limited to 80 N 18 Ibf ptical Encoder it Piezo 7 i 1 f y M Fig 3 M 511 HD stage unit arrow indicates positive motion direction vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 8 Start Up Piezo Nano Positioning PI Prior to operation read the controller documentation To operate a stage proceed as follows vvvvvv pi vvs 1 Install connect the controller following the instructions in the controller manual If you are going to use a host computer install the host software in the host computer This procedure is described in the controller User Manual and or associated software manuals Connect the stage to the controller using the connecting cable which comes with the stage part number KO40B0055 With multi axis systems be sure to note the axis designation of the connection selected Connect the stage to the M 500 PS power supply which also comes with the stage and connect the power supply to line power wide range input To turn on the M 500 PS power supply place the o rocker switch in the position Command a few test moves to make sure everything is working properly M 511 HD MP84E Release 1 0 0 Page 9 Piezo Nano Positioning PI Operational Considerations 3 Operational Considerations 3 1 Limit Switches
12. ify that the included MS 500 PS power supply is connected and turned on Positioner or positioner cable is defective m Test system with a working cable and or positioner of the same type to determine if the fault is in the positioner cable or elsewhere positioners of a different type may malfunction due to unsuitable parameter settings on the controller Wrong command or wrong syntax m Check the error code use the ERR command to read the error code see controller and software manuals for the error code explanations Positioner is not referenced The controller will not execute closed loop motion commands as long as the positioner is not referenced ERR replies 5 see controller and software manuals Reference the axis as described in controller user manual Wrong axis commanded m Check if commanded axis is that of the desired positioner Incorrect configuration m Check the parameter settings on the controller SPA see controller and software manuals for details vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 12 Piezo Nano Positioning PI Troubleshooting Positioner does not reach position vvith expected accuracy Motion parameters are not optimized m Adjust the motion parameters according to the values provided by Pl Positioner runs jerkily and not smoothly enough Motion parameters are not optimized m Adjust the motion parameters according to the values provided by PI Positioner did not
13. n the dimensional drawing on p 19 Do not exceed the push pull load capacity in the motion direction it is limited to 80 N 18 Ibf 1 5 Unpacking Unpack the M 511 HD Linear Translation Stage with care Compare the contents against the items covered by the contract and against the packing list The following components are included m Stage vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 5 Introduction Piezo Nano Positioning PI M 500 PS power supply and power cord K040B0055 motor cable 3 m for connecting the stage to the controller Screw set with four M6x30 four M4x30 and four M4x16 metric screws together with 2 Allen wrenches User Manual this document MP84E Inspect the contents for signs of damage If parts are missing or you notice signs of damage please contact PI immediately Save all packing materials in case the product need be shipped again Standard and custom adapter plates may be available for interfacing M 511 HD stages with your application Contact your PI Sales Engineer or write info pi ws if you need additional information vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 6 Start Up Piezo Nano Positioning PI 2 Start Up 2 1 Mechanical Mounting 2 1 1 Operating Environment M 511 HD series stages should be operated in clean environments Although the bearings and ballscrew are covered to offer some protection against dust and liquids the case is not hermetically sealed
14. ning Travel range Integrated sensor Sensor resolution Design resolution Min incremental motion Hysteresis at the platform Unidirectional repeatability Accuracy Pitch Yaw Straightness Flatness Max velocity Origin repeatability Mechanical properties Drive screw Guiding Spindle pitch Load Push pull force Lateral force Drive properties M 511 HD Units X 100 mm Linear Encoder 0 002 um 0 002 um 0 004 um 0 01 um 0 01 um lt 0 05 um 25 urad t295 urad 1 um 1 um 125 mm s 1 um Recirculating ballscrews Precision linear guiding rails recirculating ball bearings 2 mm rev 500 80 80 200 N Drive type Hybrid piezo actuator riding on motor leadscrew drive Motor type DC motor Operating voltage motor 24 V Electrical power 30 W Piezo drive type PICMA Multilayer piezo with flexure vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 15 Technical Data Piezo Piezo voltage Limit and reference switches Miscellaneous Operating temperature range Material Mass Nano Positioning P I 36 Hall effect 20 to 65 Al black anodized 5 1 vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 kg Page 16 Piezo Nano Positioning PI Technical Data 5 2 Performance 0 100 0 200 0 300 0 400 0 500 0 600 0 700 0 800 0 900 1 000 1 100 1 200 1 300 1 400 1 500 1 600 Time s Fig 5 Step response of the hybrid stage for 10 nm steps measured with external laser interferometer
15. overvoltages as typical for public power supply Note The nominal level of the transient overvoltage is the standing surge voltage according to the overvoltage category II IEC 60364 4 443 m Degree of pollution 2 vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 4 Piezo Nano Positioning PI Introduction 1 4 Safety Precautions WARNING Crush Hazard S To avoid damage or injury do not put anything where the moving platform or any connected object could possibly trap it CAUTION Unexpected Motion When the stage is first connected to the motor controller be aware that the stage could start an undesired move CAUTION Avoid Damage Disassembly will result in loss of the specified accuracy as well as voiding the warranty A PZT system achieves its high accuracy by the proper matching of the mechanics and the drive Do not exceed the maximum push or pull forces given in the technical specifications Doing so can result in damage to the PZT elements or misadjustment of the mechanics Do not drop the stage or subject it to any kind of mechanical shock Doing so can result in damage to the PZT elements or misadjustment of the mechanics Attach the positioning stage only at the mounting holes provided for that purpose Attach loads only at the threaded holes provided for that purpose Follow the mounting instructions provided Overlength mounting screws may damage the stage Be sure to respect the specifications o
16. stop in time and ran into a hard stop The limit switches did not stop the positioner in time m Too high velocity See Limit Switches section m Turn off the motor 4 2 Customer Service If problems persist call your local PI representative or write to info pi ws please have the following information about your system ready m Product codes and serial numbers of all products in the system E Current firmware version of the controller m Software version of driver or host software m Operating system on host PC 4 3 Disposal In accordance with EU directive 2002 1 96 EC WEEE as of 13 August 2005 electrical and electronic equipment may not be disposed of in the member states of the EU mixed with other wastes vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 13 Troubleshooting Piezo Nano Positioning PI To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH amp Co KG will ensure environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have such old equipment from PI you can send it to the following address postage free Physik Instrumente PI GmbH 8 Co KG Auf der Romerstr 1 76228 Karlsruhe Germany vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 14 Technical Data Nano Positioning P I 5 Technical Data 51 Specifications Models Active axes Motion and positio
17. sub D 26 pin Controller socket are as follows HO VCC i GND GND 11 VCC Piezo Zjpos SDI A ENC A _ 20 GND 12 VCC Piezo Bjneg SDI A ENC A BRAKE REF 4 pos ENC B 22 Analog GND 7 pos END gt 5 neg ENC B 23 DAC neg END 6 pos SCLK Spindle REF DOW A 7 neg SCLK pos SDO PWM MAG 8jpos SEN neg SDO PWM SIGN 9 neg SEN These signals are not used for servo control but provided for diagnostic purposes 5 4 2 Power Connector Type 3 pin round socket Switchcraft Tini Q G GND power Voltage input 24 V 3 V Fig 8 Power connector front view vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 20
18. tform for highest accuracy The linear encoder measures the position of the moving carriage directly thus eliminating drive train errors such as non linearity backlash or elastic deformations The encoder is based on an optical grating and a noncontacting read head with integrated signal conditioner and interpolator vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 10 Piezo Nano Positioning PI Operational Considerations 3 4 Controller M 511 HD series stages can be used with the C 702 Hybrid Drive controller Servo control of the stage relies on separate coupled control loops for the piezo and motor drives both using the single high resolution position feedback sensor parallel metrology This makes the high resolution available over the entire travel range Both the piezo and motor servo control loops are active at the same time meaning that the trajectory deviation is also kept in the nanometer range during motion Furthermore the piezo position is fed back through an integrator into the motor control loop so that the motor will tend to drive the piezo voltage toward zero when settling thus preserving piezo lifetime Fig 4 C 702 Hybrid drive controller vvvvvv pi vvs M 511 HD MP84E Release 1 0 0 Page 11 Piezo Nano Positioning PI Troubleshooting 4 Troubleshooting 4 1 Diagnosis Positioner does not move Cables not connected properly m Check K040B0055 connecting cable Check power supply m Ver
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