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Granville Phillips 475 Convectron Instruction Manual

1. Figure Number Pressure Range and Units Gases Figure 3 5 10 4 to 10 1 Torr All Figure 3 6 107 to 1000 Torr Ar CO CH Freon 12 He Figure 3 7 107 to 1000 Torr D Freon 22 Kr Ne 05 Figure 3 8 10 4 to 10 1 mbar All Figure 3 9 10 1 to 1000 mbar Ar CO CH Freon 12 He Figure 3 10 10 1 to 1000 mbar D Freon 22 Kr He 0 Note that 1 mbar 100 Pa so the mbar charts may be used for Pascal units by multiplying the values on the axes by 100 A useful interpretation of these curves is for example that at a true pressure of 2 x 10 2 Torr for CH the heat loss from the sensor is the same as at a true pressure of 3 x 10 2 for N see Figure 3 5 The curves at higher pressure vary widely from gas to gas because thermal losses at higher pressures are greatly different for different gases If you must measure the pressure of gases other than N or air use Figure 3 5 through Figure 3 10 to determine the maximum safe indicated pressure for the other gas as explained in the examples that follow Example 1 Maximum safe indicated pressure Assume a given vacuum system will withstand an internal pressure of 2000 Torr or 38 7 psia For safety you want to limit the maximum internal pressure to 760 Torr during the backfilling process Assume you want to measure the pressure of Freon 22 On Figure 3 6 locate 760 Torr on the left hand scale travel to the right to the intersection with the Freon 22 curve
2. 13 2 2 Pre Installation Considerations 15 2 3 Installation Procedure 15 2 4 Install Pressure Relief Devices 16 2 5 Mount the Controller 16 2 6 Install the Convectron Gauge 18 Install Vacuum Chamber Fittings 19 Ground the Convectron Gauge 20 27 Connect the Wiring raser eevee sedans een RE 20 2 8 CONMECIOMS sis wed na acts UE RAY eee er ad eal es 22 2 9 Configure the Relays for the Application 23 2 10 Requirements for Process Control Option 23 Operation Lc set ERE RAE RR pe dana A REN EU 25 3 1 Preparing for Pressure Measurement 25 3 2 Button Overview 25 3 3 Initial Power UD eres canada RERO RE E 25 3 4 Menu Overview Lie oes SE RE te eee SE T YS 26 Product Information 27 Keypad stad 4 wound enr n e tard VI d dere d 27 DDiagriOse seo her SUA aE RS ae Ne LR ME 27 Calibtate s mit sade e MERI MAS ESTIS TEES 28 3 5 CONFIB TE ioi dans de te ead eile exe e A EN Shade ee 29 Setpoint Parameters 29 RS 232 Parameters 2 ass ob esr ean ee EN 30 Analog Output iix ee RUE AERE EI Re dre 30 Pressure Unit oos eee op gasto eae rae ERR 31 Display Options ione rh bate eee e ere REIS P
3. Figure 3 7 Convectron Gauge Indicated vs True Pressure Curve 01 to 1000 Torr 1000 N or air freon 22 O 100 Ne 10 True Pressure Torr Do not use this data with transducers other than the G P Series 275 Convectron gauge Pressure units equivalence 10 1 1 um Hg 1 mTorr 1 x 10 Torr 1000 um Hg 1 Torr 107 1 10 100 1000 Indicated Pressure Torr nitrogen equivalent 44 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation Figure 3 8 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 mbar Kr freon 22 freon 12 True Pressure mbar LS Do not use this data with transducers i other than the G P Series 275 Convectron gauge ip Pressure units equivalence 10 A 1 mbar 100 pacal 10 4 103 10 107 Indicated Pressure mbar nitrogen equivalent Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 45 Chapter 3 Figure 3 9 Convectron Gauge Indicated vs True Pressure Curve 01 to 1000 mbar 1000 Ar freon 12 CO N or air 100 CH 10 8 He E e 2 a E Do not use this data with transducers other than the G P Series 275 Convectron gauge 107 Pressure units equivalence 1 mbar 100 pascal 107 107 1 10 100 1000 Indicated Pressure mbar nitrogen equivalent 46 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation Figure 3 10 Convectron Gauge I
4. then down to an indicated pressure of 11 Torr Ny equivalent In this hypothetical situation the maximum safe indicated pressure for Freon 22 is 11 Torr For the sake of safety it is prudentto place a warning label on the instrument face stating DO NOT EXCEED 11 TORR FOR FREON 22 for this example Example 2 Indicated to true pressure conversion Assume you want to determine the true pressure of helium in a system when the Convectron is indicating 10 Torr On Figure 3 6 follow the vertical graph line up from the 10 Torr N equivalent indicated pressure to the Helium curve then move horizontally to the left to reveal a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indication of 10 Torr N5 equivalent Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation Example 3 True to indicated pressure conversion Assume you want to set a process control setpoint at a true pressure of 20 Torr of CO On Figure 3 6 locate 20 Torr on the true pressure scale travel horizontally to the right to the CO curve then down to an indicated pressure of 6 4 Torr N equivalent The correct process control setting for 20 Torr of CO is 6 4 Torr N equivalent Example 4 True to indicated pressure conversion Assume you want to obtain a helium pressure of 100 Torr in the system On Figure 3 6 locate 100 Torr on the left hand scale travel horizontally to the right to attempt to intersect the He
5. 2 The micro controller A D is damaged 2 Can still be used if the pressure reporting is still accurate ERR 17 OVPRS 1 The maximum pressure limit has been 1 Check to be sure that the actual pressure reached The reported pressure is the is within the range of the Controller If it maximum reported pressure for the gas is recalibrate the Controller or replace species 999 Torr for N the gauge 2 The gauge is contaminated or 2 Check and clean or replace the gauge damaged See Convectron Gauge Test 3 The controller is out of calibration Procedure on page 81 and Cleaning Contaminated Convectron Gauges on page 81 3 Check the calibration and reset if necessary See Calibration on page 48 ERR 18 FAC 1 CRC 16 checksum verification of 1 The Controller will automatically revert to factory settings has failed the default values ERR 19 FS 1 CRC 16 checksum verification of FS 1 Revert to the N or other gas curve curve has failed 7 5 RS 232 See RS 232 Troubleshooting on page 72 in the chapter for the RS 232 Troubleshooting 80 interface Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 7 6 Convectron Gauge Test Procedure Figure 7 1 Convectron Gauge Pins 7 7 Cleaning Contaminated Convectron Gauges Service and Maintenance The small diameter sensor wire can be damaged by even small voltages Do not perform electrical continuity tests with instruments a
6. 56 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 5 1 RS 232 Theory of Operation for the 475 Controller 5 2 Connecting the RS 232 Computer Interface The RS 232 interface option permits data output to and Convectron gauge control by a host computer Output control is by a command response mechanism and a hardwire control line between RTS Request To Send and CTS Clear To Send If you have this controller option configure it to your system requirements as directed in this chapter NOTE CTS and RTS are used only if handshaking is enabled The DSR Data Set Ready line is set true upon power up to indicate it is on line and is ready to receive data When the controller receives a start bit on the received data line it will input and buffer a character The controller will continue to receive and buffer characters until the terminator carriage return is received Upon receiving the terminator the controller will assert the RTS line as a holdoff to prevent the host computer from attempting to transmit further data until the message just received has been decoded and a reply has been output During output of the reply the incoming handshake line CTS is tested prior to beginning transmission of each character The controller will wait until CTS is true before beginning transmission of a character and will not test them again until ready to begin transmitting the next character After transmittin
7. 69 Yes ST Get Set Convectron gauge sensor type 69 SU Set the units of pressure 69 TS Set span 70 TZ Set zero 70 UC Restore save user configuration 71 VC Void NIST calibration 71 VER Read code version 71 RS232 Troubleshooting 72 RS 232 Error Messages 72 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 61 Chapter 5 AO Analog Output Definition Get Set the analog output mode Modifiers 1 2 or3 Response PROGM OKJ Example From host computer AO1 4 or AO2 or AO3 From 475 controller PROGM OKJ e Command AO1 sets the analog output to log 0 7V e Command AO2 sets the analog output to log 1 8V e Command AO3 sets the analog output to log 0 9V S curve See Figure 3 11 on page 51 Note Applies ONLY when N is selected Invalid displayed if a gas other than N is selected AOO Analog Output Definition Get Set analog output offset voltage Offset Modifiers 0 to 0 5 Response PROGM OK Set analog output offset voltage Example From host computer AOO 0 24 From 475 controller PROGM OK Sets analog output offset voltage by 0 2V CA Read NIST Check status of NIST Traceable System Calibration Traceability Definition Calibration status Calibration Status Modifiers None Response CAL CERT NIST traceable calibration is valid CAL VOID NIST traceable calibration is void See VC to void the NIST calibration 62 Series 475 Convectron Gauge Controller In
8. Example From host computer From 475 controller The pressure unit is being set via the front panel SUTJ PROGM OKJ Rev A 69 Chapter 5 TS TZ 70 Calibrate at Atmosphere Calibrate at Vacuum Definition Set span typically at atmospheric pressure Modifiers Pressure value above 399 Torr for N Response PROGM OKJ Other possible responses GAIN LIMJ Gain programmed at limit Readout will be the pressure at maximum TS setting OPN SNSR Sensor defect no change in programming See Convectron Gauge Test Procedure on page 81 SNSR UNPH Sensor unplugged no change in programming RANGE ER Command error TS must be set above 399 Torr and system pressure must be above 399 Torr INVALID System is calibrated and locked F P ERR Span is set through the front panel of the controller Example From host computer TS 7 60E 02 J From 475 controller PROGM OK e Send the TS command only at pressures above 399 Torr The controller will respond with range error if done near vacuum The change occurs as soon as the function is performed e If the controller is system calibrated the response for this command will be INVALID see NIST Traceable System Calibration on page 49 Definition Set zero Modifiers O or pressure below 1 x 107 Torr in scientific notation Response PROGM OKJ Other possible responses OFST LIMA Offset programmed at li
9. The Convectron gauge is either 1 Check the cable between the gauge and unplugged or defective The reported the Controller and replace it if necessary pressure is 999T and the relays are off Check and clean or replace the gauge 2 The Controller is out of Calibration See Convectron Gauge Test Procedure on page 81 and Cleaning Contaminated Convectron Gauges on page 81 2 Check the calibration and reset if necessary See Calibration on page 48 ERR 09 NVRAM Not able to retrieve information from EEPROM Turn OFF and turn ON power to the Controller ERR 14 CABLE The cable is either unplugged or defective The reported pressure is 999T and the relays are off Check the cable between the gauge and the Controller and replace it if necessary Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 79 Chapter 7 Table 7 1 Failure Symptoms or Error Codes Possible Causes and Possible Solutions Symptom or Error Code Possible Causes Possible Solutions ERR 15 ADBAD 1 The Analog Digital Converter A D is reporting an erroneous value 1 Turn OFF and turn ON power to the Controller 2 The reported pressure is 999T and the 2 Check the calibration and reset if relays are off necessary See Calibration on page 48 ERR 16 AOBAD 1 The Analog Output is reporting an 1 Turn OFF and turn ON power to the erroneous value Controller
10. and press the ENTER button 2 In the Auto Test mode press the ENTER button to allow the 475 Controller to perform the diagnostics check 3 In the Manual Test mode press the UP or Down button to enter the desired voltage to be output 4 Press ENTER to perform the diagnostics check When the Calibrate function is selected the 475 Controller reads the current pressure in the vacuum chamber and determines whether you can calibrate at atmosphere or vacuum based on the current pressure See Calibration and NIST Traceable System Calibration on page 49 for more detailed information 1 Press the UP or DOWN button to scroll to Calibrate and press the ENTER button Either Calibrate Vacuum or Calibrate Atmosphere will be shown depending on the current reported pressure NOTE Invalid Pressure for Cal will be displayed if the pressure is out of range to perform the calibration Calibrate Atmosphere 1 Press the UP or DOWN button to select the desired calibration setting and press the ENTER button 2 Press the BACK button a few times or wait one minute to return to Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation pressure display Calibrate Vacuum 1 Press the UP or DOWN button to select the desired calibration setting and press the ENTER button 2 Press the BACK button a few times or wait one minute to return to pressure display 3 5 Configure The Configure me
11. 3 3 6 Error Codes A known error produces an error code that is displayed to the user More than one error results in a rotation of errors on the display An error is also reported to the user through digital communications When there are errors the pressure readout is readjusted to a smaller font 36 Table 3 1 Series 475 Controller Error Codes Comm Error Code Error Code for RD Error Comments ERR 01 CGBAD OPN SNSR The Convectron gauge is Reported pressure is 999T either unplugged or relays off defective ERR 09 NVRAM Not able to retrieve information from EEPROM ERR 14 CABLE SNSR UNP The cable is either Reported pressure is 999T unplugged or defective relays off ERR 15 ADBAD The A D Converter is Reported pressure is 999T reporting an erroneous relays off value ERR 16 AOBAD The Analog Output is reporting an erroneous value ERR 17 OVPRS SNSR OVP The maximum pressure Reported pressure is max limit has been reached reported pressure for gas species 999 Torr for N3 verification of FS curve failed ERR 18 FAC CRC 16 checksum Revert to the hardcoded verification of factory values settings failed ERR 19 FS CRC 16 checksum Revert to the N curve Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 3 7 3 8 Figure 3 4 Preparing For Convectron Gauge Operation Operation Convectron gauge pressure is indicated on the Controller fr
12. 9 8 V TD A 7 m 9 6 E n Alternate p 5 0 9 V ma 2 O 3 2 1 0 0 0001 0 001 0 01 0 1 1 10 100 1000 Nitrogen ONLY Pressure Torr Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 51 Chapter 3 3 12 1 Default Analog Output of 0 to 7 V 3 12 2 Optional Analog Output of 1t08V 3 12 3 Optional Nonlinear Analog Output S Curve 3 13 Analog Output Mode Programming 3 14 Process Control Setpoints amp RS 232 52 The output equations for 0 to 7 V are P jo Torr Where V 4 P Pressure P 10 mbar V Analog Output Voltage P 10 Pa In some applications a O V output is used to indicate that the controller is off To accommodate these situations a one volt offset is available as an alternative For this Alternate output format a 0 0 indication produces 0 5 V output A 10 V output means the gauge is unplugged or faulty If the output is adjusted to 1V at 10 4 Torr 10 2 Pa the output equation for 1 to 8 V is V 5 P 10 Torr P 10 mbar P 10 Pa In some applications a O to 9 V output similar to the Series 275 controller output is desirable To accommodate these situations a third analog output option is available A 10 V output means the gauge is unplugged or faulty 1 Press the UP or DOWN button and select Setup Parameters with the ENTER button 2 Press the UP or DOWN button and select Analog Out Mode with the ENTER button 3 Th
13. Like the gas species the 475 is also able to change the bridge voltage vs pressure relationship for different sensor types And like the gas species the 475 also has different user calibrations for each sensor type Switching the sensor type also switches the user calibration See Gauge Sensor Type on page 34 to change the setting in the Controller The 475 Convectron Gauge Controller calculates pressure by balancing the Convectron bridge measuring the bridge voltage applying any user calibration settings and looking up the corresponding pressure in a bridge voltage vs pressure table Among other factors the bridge voltage vs pressure relationship is dependent on the gas species in the system The gas species and therefore the bridge voltage vs pressure relationship can be changed through the front panel of the Controller or through the RS 232 interface See Cas Species on page 32 to select and use correction parameters when using Ar He COs or Oo The 475 Controller has a different user calibration for each gas species Ar He CO or O5 except CF which uses N calibration and FS where the calibration is built into the lookup table Switching the gas species automatically switches the user calibration Resetting the calibration to factory defaults only affects the gas species currently in use Calibrating for each gas species provides more accurate pressure readings Correction Factor CF The corre
14. Normal handshake control can be accomplished using the command response mechanism and a hard wired handshake by using the RTS CTS connection as outlined in Table 5 3 This RTS CTS connection has to be enabled via a separate function Table 5 3 Handshaking Outputs from Controller Line Pin Description Factory Setting RTS 8 Output from controller to be tied to the computer s CTS input Always high for hardware handshake control CTS input 7 Input to controller Used to sense the RTS line of the No control of data output computer before sending data DSR output 6 Set high when the controller is turned ON Not applicable 58 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 5 4 Command Response Timing RS 232 Interface Table 5 4 RTS CTS Handshake Display Readouts Display Readout Handshake disabled Handshake enabled Byte Format Disable RTS CTS handshake Enable RTS CTS handshake When the handshake is enabled 1 Upon receiving the terminator the controller will assert the RTS line as a holdoff to prevent the host computer from attempting to transmit further data until the message just received has been parsed and a reply has been sent 2 During the transmission of the reply the CTS incoming handshake line is tested prior to transmission of each character The controller will wait until CTS is true before beginning transmission
15. Rev A 71 Chapter 5 5 7 72 RS 232 Troubleshooting 5 7 1 RS 232 Error Messages Because the RS 232 standard is found in various configurations the first thing to do if trouble arises is check the following configuration options 1 Check the RS 232 setting via the front panel of the 475 Controller Be sure the baud rate character format and framing and interface protocol are matched to the requirements of your host computer or terminal Note that there may be several mismatched parameters Check the handshaking to verify that the host computer and the 475 Controller settings match 2 Check the interface wiring The pin designations for the RS 232 connector are shown in RS 232 Connector Pin Assignments on page 58 Note that the received and transmitted data lines are defined as seen by the controller Many companies supply null modems or switch boxes for the purpose of re configuring the control lines for particular applications A standard 9 pin extension cable with a gender changer will work for many applications 3 Check the command syntax Be sure the strings you send to the controller are in accordance with the syntax defined in RS 232 Command Syntax on page 61 If an error is found in the incoming message the following messages will be returned in place of the normal response No Response or garbled output Baud rate incorrect Character length incorrect or stop bit s incorrect Bad c
16. SP1 Enable Disable Enable Disable e SP2 Enable Disable Enable Disable Analog Out Mode Log 0 7V Log 1 8V Log 0V 7V S curve Analog Out Offset 0 0V to 0 5V OV Correction Factor 0 1 to 1 5 None Low Pass Filter LPF Disable Enable Enable Pressure Response 0 to 200 ms 0 ms Delay ms RS 232 Baud Rate Format Baud Rate 1200 2400 4800 9600 19200 38400 Bits e 8N1 8 data bits No parity 1 stop bit 7E1 8 data bits Even parity 1 stop bit 701 8 data bits Odd parity 1 stop bit 19200 baud 8 data bits No parity 1 stop bit RTS CTS disabled Hardware Handshake Disable Enable Disable Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Installation 2 2 Pre Installation This chapter guides you through the basic setup procedures for the 475 Considerations Controller including mounting the Controller installing a Convectron gauge connecting vacuum chamber fittings and connecting wiring If your application requires different settings than the factory defaults listed in Table 2 1 see Chapters 3 4 and 5 for instructions on changing the settings You can reconfigure options before or after completing the basic setup procedures described in this chapter WARNING Installing removing or replacing the 475 Controller in a high voltage environment can cause an electrical discharge through a gas or plasma resulting in property damage or personal in
17. button a few times or wait one minute to return to pressure display Relay 1 The indicated setpoint relay setting will show in reverse video Press the UP or DOWN button to select Enabled or Disabled 2 Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display 4 4 Process Control Tips Relay actuation occurs when the pressure reading is greater than the setpoint for reverse polarity or less than the setpoint for normal polarity A default 10 hysteresis is programmed into each setpoint for returning pressures Table 4 2 exemplifies this function using an assumed setpoint pressure The example also assumes that the polarity is set to activate the relay when pressure falls below the setpoint Table 4 2 Setpoint Normal Polarity minus Setpoint Pressure Pressure Change Relay Transition Pressure 6 30 x 102 Falling 6 30 x 102 6 30x 102 Rising Releases at 6 30 x 10 2 10 6 93 x 102 Table 4 3 Setpoint Reverse Polarity plus Setpoint Pressure Pressure Change Relay Transition Pressure 6 30 x 102 Rising 6 30x 102 6 30 x 102 Falling Releases at 6 30 x 102 1096 5 67 x 102 4 5 Process Control Table 4 4 lists the factory default the settings for the process control relays Factory Default Settings Table 4 4 Process Control Relay Default Settings Feature Default Se
18. computer interface options Figure 2 1 Series 475 Convectron Controller Front and Rear Panels GRANVILLE PHILLIPS CH1 NC NO CINCNOC CH2 eee Vo SERVICE rh 00000 ZEN z Jo A FA GAUGE CE OUT PORT 12 24V 6W 475 Convectron Figure 2 2 Convectron Vacuum Measurement System Components 2 channel process control connector I O output connector CH1 NC NO INC NO C cH2 Gauge cable ig Convectron Gauge g Analog output connector NOTE The Service Port is for factory use only 24 Vdc power supply cable and converter Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 13 Chapter 2 14 Table 2 1 475 Controller Factory Defaults Setting Range or Selection Factory Default Setting Units of Measure Torr mbar pascal Torr mbar or pascal as selected when the Controller was purchased Maximum Pressure 1E 3 Torr to 999 Torr 999 Torr Gas Species N Ar O He CO N FS CF Front Panel Display e Brightness 1 2 0r3 3 Bright e Setpoints displayed Yes No No Gauge Sensor Gold Tungsten Platinum Gold Tungsten SetPoints Outputs e SP1 Pressure 1E 4 Torr to 1000 Torr 1 00E 4 e SP2Pressure 1E 4 Torr to 1000 Torr 1 00E 4 e SP1 Hysteresis 5 to 1000 percent 10 e SP2 Hysteresis 5 to 1000 percent 10 e SP1 Polarity Normal Reverse Normal e SP2 Polarity Normal Reverse Normal e
19. current pressure screen is shown by default 1 Press the UP or DOWN button to scroll to Keypad and press the ENTER button 2 Press the UP or DOWN button to select Enable or Disable and press the ENTER button 3 Press the BACK button a few times or wait one minute to return to pressure display 4 Tore enable the keypad enter the sequence Up Down Back Enter within five seconds 3 4 3 Diagnose During the diagnostics Test Measurement function pressure reporting is suspended and the Convectron simulator is switched ON See Convectron Gauge Simulator beginning on page 75 For the Auto Test the Convectron simulator simulates five different equally spaced Analog to Digital A D voltages across the whole range 0 317 to 5 635V These voltages are measured and compared by the external A D and the internal microcontroller A D The Convectron simulator is switched OFF pressure reporting resumed and a pass fail is reported to the user See Chapter 6 for more information on the diagnostics The same process is used for the Manual Test except the user can enter either pressure or bridge voltage and pass fail criteria is not determined by the microcontroller During the Analog Output diagnostic function pressure reporting is suspended to the analog output and the analog output is tested at discrete points between 0 V and 10 5 V 1 Press the UP or DOWN button to scroll to Diagnose and press the Series 475 Convect
20. example From host computer UCR3 From 475 controller PROGM OK Restore the settings from the specified slot 3 in this example Save Configuration allows the user to save up to three configurations in addition to the factory default configuration Three different user settings can be programmed and saved Each user setting will include the unique setpoint parameters unit of measure analog output setting computer interface parameters atmosphere and vacuum calibrations gas species setting and display options Restore Configuration allows the user to switch to any of the four saved configurations Four different configurations one factory default and three user set configurations can be programmed and saved Each user setting will include unique setpoint parameters unit of measure analog output setting computer interface parameters atmosphere and vacuum calibrations gas species setting and display options Initial user settings are programmed to the factory defaults For NIST Traceable System Calibration Definition Void calibration Modifiers None Response PROGM OK Calibration functions and gas settings are now unlocked GS ST TS TZ and FAC commands will now work Definition Read code version Modifiers None Response Code version alpha numeric Example From host computer VER From 475 controller 30134 A l Series 475 Convectron Gauge Controller Instruction Manual 475101
21. of a character and will not test it again until ready to begin transmitting the next character 3 After transmitting the terminator the controller will negate RTS and wait for the next incoming message To summarize CTS Clear To Send This is sent by the computer to indicate that the controller may transmit the next byte in its message As shipped from the factory this line is disabled The controller will automatically assume the host is ready to receive RTS Request to Send This is negated by the controller at power up The RTS is asserted by the controller upon receipt of a message terminator RTS is negated after transmitting the terminator of the controller s response to that message The speed of the response from the controller varies depending on the type of command being carried out all commands will cause a response to begin in less than 100 msec Depending on the selected baud rate there will be an additional delay as noted in Table 5 5 for the 9 character response from the controller The response length will vary from nine characters see the specific command Table 5 5 TX Time of Response Baud Rate TX Response Time T Data to Host 38 400 2 4 msec 19 200 4 7 msec 9 600 9 4 msec 4 800 18 7 msec 2 400 37 5 msec 1 200 75 msec Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 59 Chapter 5 5 9 60 Preparing the RS 232 Computer Inter
22. you must do to prevent or avoid the potential result of the specified hazard or unsafe practice Each caution or warning statement explains 1 The specific hazard that you must prevent or unsafe practice that you must avoid 2 The potential result of your failure to prevent the specified hazard or avoid the unsafe practice and 3 What you must do to prevent the specified hazardous result 1 2 Reading and You must comply with all instructions while you are installing operating or Following Instructions maintaining the controller Failure to comply with the instructions violates standards of design manufacture and intended use of the controller Granville Phillips and Brooks Automation disclaim all liability for the customer s failure to comply with the instructions Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Read instructions Read all instructions before installing or operating the controller Retain instructions Retain the instructions for future reference Follow instructions Follow all installation operating and maintenance instructions Heed warnings and cautions Adhere to all warnings and caution statements on the controller and in these instructions Parts and accessories Install only those replacement parts and accessories that are recommended by Granville Phillips Substitution of parts is hazardous Chapter 1 1 3 1 4 1 5 1 6 10 Syste
23. 2 3 13 Analog Output Mode Programming 52 3 14 Process Control Setpoints amp RS 232 52 PIOGGSS COMMON eroi a scuto NA Se e etica eer IRR 93 4 1 Process Control Setup 53 4 2 Connecting Process Control Relays 54 4 3 Setpoint Display and Adjustment 54 4 4 Process Control Tips ee tee sede edet oss 55 4 5 Process Control Factory Default Settings 55 4 6 Process Control Relay Trip Points 56 HS 232 MBA ede ht tee er cao 97 5 1 RS 232 Theory of Operation for the 475 Controller 57 5 2 Connecting the RS 232 Computer Interface 57 5 3 RS 232 Handshake a si ey ras ERR 58 5 4 Command Response Timing 59 5 5 Preparing the RS 232 Computer Interface 60 5 6 RS 232 Command Syntax 61 5 7 RS 232 Troubleshooting 72 RS 232 Error Messages 72 Diagnostics nu fog Oh Cas A AS ae Ve Re Sh A T3 6 1 Continuous Diagnostics 74 6 2 Diagnostics Requiring User Interaction 74 Analog Output ss rina asia ie nr des ten den 74 Measurement Circuits 74 6 3 Convectron Gauge Simulator 75 Simulate a Process Operation Prior to Full System Integration 75 Analog Output Te
24. 3 Controller Calibration Verification display and analog outputs can be set to a specific pressure and the system process controller pressure input calibrated to match the pressure display of the 475 Controller The voltage displayed during the simulation mode is the bridge voltage of the Convectron gauge and not the analog output voltage from the 475 Controller To set the 475 Controller output voltage to a specific value see the section on Analog Output Test If during normal operation of a process a non functioning valve or lockout has locked the system operation the Convectron Simulator can be used to override the non functioning system component The Analog output voltage of the 475 Controller can be set to a specific value for setting system calibration points For instance to calibrate the vacuum system process controller at 10 V set the analog output voltage of the 475 Controller to 10V and calibrate the system process controller to display 10 V The voltage measurement circuit of the 475 Controller can be verified on a yearly basis to assure the unit remains properly calibrated The output of the Simulated Measurement Circuit can be measured using an external voltmeter on pins 1 and 9 of the Convectron gauge 9 pin D connector on the back of the Controller See Figure 2 12 on page 22 Measurement of this simulated bridge voltage against the pressure displayed on the front panel is a check of the Controller s stability This te
25. Convectron Gauge Controller Instruction Manual 475101 Set Parity to 7 Bits Even Parity Check Set Parity to 8 Bits No Parity Check Set Parity to 7 Bits Odd Parity Check Get Set Convectron Gauge Sensor Type Set Unit of Pressure Definition Modifiers Response Example From host computer From 475 controller RS 232 Interface Set bits parity to 7 bits even 1 stop bit None PROGM OKJ SPEJ PROGM OKJ To enable changes after sending the SPE command cycle power or send the RST command Definition Modifiers Response Example From host computer From 475 controller Set bits parity to 8 bits none 1 stop bit Factory default None PROGM OKJ SPN PROGM OKA To enable changes after sending the SPN command cycle power or send the RST command Definition Modifiers Response Example From host computer From 475 controller Set bits parity to 7 bits odd 1 stop bit None PROGM OKJ SPOJ PROGM OKJ To enable changes after sending the SPO command cycle power or send the RST command Definition Modifiers Response Examples Definition Modifiers Response Get Set the gauge sensor type Gold plated tungsten or Platinum Au Pt AU or PTJ PROGM OKI AU PROGM OKJ Gold Plated Tungsten PTJ PROGM OK4 Platinum Selects and sets the units of pressure T M or P Torr mbar or pascal PROGM OKJ Other possible responses F P ERRJ
26. Granville Phillips Series 475 Convectron Vacuum Measurement Controller a A ee NU GN ETE ee GU GN C un BROOKS AUTOMATION 6450 Dry Creek Parkway Longmont CO 80503 USA Phone 1 303 652 4400 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 Worldwide Customer Service Support 24 7 Phone 1 800 367 4887 To obtain a copy of this instruction manual online visit our website at www brooks com Adobe Reader version 5 0 or higher required 2009 Brooks Automation Inc Instruction Manual Instruction manual part number 475101 Revision A November 2009
27. a terminator The terminator is an ASCII carriage return the OD character denoted here by the symbol The data field is explained in the command descriptions All alpha characters can be upper or lower case All data fields responses will contain up to 9 upper case alphanumeric characters A response of SYNTX ERR is caused by an incorrect character string from the host A response of F P ERR is displayed when a function is set via the front panel on the 475 Controller See Chapter 3 Table 5 6 List of RS 232 User Commands RST to Command Description Page Change AO Set analog output mode 62 AOO Get Set analog output offset 62 CA Get calibration status 62 DT Perform diagnostic tests 63 FAC Set calibration to factory defaults 63 GS Modify gas species settings 64 HA Set handshaking 64 Yes KP Enable Disable keypad 65 LPF Enable Disable LPF Low Pass Filter 65 PC Get or set process control setpoint value 65 PCE Enable Disable relays 66 PCH Get or set process control setpoint hysteresis 66 PCP Get or set process control setpoint polarity 66 PD Modify programmable delay settings 67 RD Read the pressure 67 RST Reset the controller 68 RU Read units of pressure 68 SB Set the baud rate 68 Yes SN Get the serial number 68 SPE Set parity and data bits Even 69 Yes SPN Set parity and data bits None 69 Yes SPO Set parity and data bits Odd
28. able or connection e Command does not include OD 4 terminator character OVERRUN ERROR Returned if the incoming message overflows the controller s buffer This may indicate a flaw in the host software PARITY ERROR Returned if the parity of a byte in the incoming message does not match that programmed by the RS 232 setting in the 475 Controller SYNTAX ERROR Returned if the message fails to parse as a valid controller command F P ERROR Returned if a function is being controlled via the front panel inputs on the 475 Controller INVALID Function is not valid or possible at this time Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A The 475 has diagnostic functions to help determine if critical areas are operating correctly Some diagnostic functions are continuously running and some require user interaction The Analog Digital Converter A D and the Analog Output are monitored continuously for errors Figure 6 1 Diagnostics Flow Chart Continuous Continuous Diagnostics Test Diagnostics Test Convectron External Micro Gauge A D controller Convectron Gauge Simulator Figure 6 2 Diagnostics Menu AUTO TEST BRIDGE 317 Vdc to 5 563 Vdc VOLTAGE PRESSURE 0 0 mTorr to 999 Torr See Diagnose beginning MANUAL TEST on page 27 AUTO TEST ANALOG OUTPUT MANUAL TEST Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 73 Chapter 6 6 1 Conti
29. ay setting will show in reverse video Press the UP or DOWN button to select Enabled or Disabled Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 29 Chapter 3 30 3 5 2 RS 232 Parameters 3 5 3 Analog Output The RS 232 interface permits data output to and Convectron gauge control by a host computer Output control is either by a command response mechanism or a hardwire control line between RTS and CTS A variety of baud rates and byte framing options are available See Chapter 5 for detailed information regarding the RS 232 parameters 1 Press the UP or DOWN button to scroll to Configure and press the ENTER button 2 Press the UP or DOWN button to select RS 232 Parameters and press the ENTER button 3 Press the UP or DOWN button to select Baud Rate Data Format or Handshake and press the ENTER button Baud Rate 1 The indicated setting will show in reverse video Use the UP and DOWN buttons to scroll to the desired Baud Rate setting 2 Press the ENTER button to save the selection 3 Press the BACK button a few times or wait one minute to return to pressure display Data Format 1 The indicated setting will show in reverse video Use the UP and DOWN buttons to scroll to the desired Data Format setting 2 Press the ENTER butto
30. ble System Calibration on page 49 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 63 Chapter 5 GS Gas Species Definition Get Set gas species commands See Gas Species on page 32 for a detailed explanation Modifiers N Nitrogen AR Argon HE Helium CO Carbon Dioxide O Oxygen FS Factory Specified CF Correction Factor Response See the examples below NOTE F P ERRJ The gas species is being set via the front panel Examples Command Root From Host Computer From 475 Controller GS GSJ N ARJ HEJ CO l 0 4 FSJ or CF FS Factory Specified curve CF Correction Factor GSN2 1 or AR HE PROGM OKI Set the gas species to the CO2 O2 FS CF gas being used INVALIDJ The system is NIST calibrated GSFS INVALID The data in memory is not valid or the system is NIST calibrated GSCFH 1 54 The correction factor being used CF of 1 5 in this example GSCF 1 04 PROGM OK Set the gas species to a new correction factor 0 1 to 1 5 in 0 1 increments this example 1 0 CF GSCF 1 0 20041 PROGM OK Set the gas species to a new correction factor and maximum pressure 0 1 to 1 5 CF and 1mTorr to 999 Torr this example 1 0 CF and 200 Torr GSCFP J 1 00E 241 Get current max pressure setting this example 100 Torr GSCFP 1504 PROGM OKJ Set the gas species to the correction factor and maximum pressure 1mTorr to 999 Torr this example 150 To
31. clamp on the gauge connected by a 12 AWG minimum size copper wire to the grounded vacuum chamber Connect the Convectron gauge cable between the gauge and the controller See Figure 2 9 Connect the power supply by inserting the power cord with the locking tab up See Figure 2 10 NOTE The 475 Controller is internally limited to 28 Vdc maximum and 1 4 A Do not connect the input to high voltage Power supply wiring depends on the power supply voltage and the type of mounting There are two ways to supply power to the 475 Controller 1 UseaCE compliant power supply 90 to 250 VAC input 24 Vdc output with connection plugs to accommodate the local AC plug type catalog number 475008 1 through 4 See page 2 of this Instruction Manual 2 User supplied power to the controller using a wire adapter and plug to connect to a 12 to 24 Vdc supply voltage Granville Phillips part number 167820 If you use the wire adapter the wires to be connected to the user supplied power are marked on the end of the cable Outside Supply ground for 12 to 24 Vdc power supply Center 12 to 24 Vdc power 0 5 A 12 V i e lt 6 Watts continuous Inrush limited to 1 4 A for 7 msec Colored End Safety chassis ground Both options accommodate the same orientation and connection plug The locking tab mechanism is on the top side of the connector when you plug it into the rear panel See Figure 2 10 Series 475 Convectron Gau
32. ction factor CF function can be used at low pressures on the Convectron gauge when most gases are proportional to N and the proportion is known The controller uses the N bridge voltage vs pressure relationship and user calibration and multiplies it by the correction factor P P N3 CF Factory Specified FS The factory specified function can be used when the factory at the request of the customer has loaded a bridge voltage vs pressure relationship that is specific to the controller cable gauge combination Contact Brooks Automation for more details Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation 3 10 2 Indicated vs NOTE Use the information in this section only if you are NOT using True Pressure for the Calibrated Gas Species function of the 475 Controller The 475 Gases Other Than N Controller uses lookup tables of bridge voltages and pressures to or Air convert the voltage given from the Analog to Digital converter A D to a pressure reading Factory programmed lookup tables exist for N default Ar He CO and O WARNING If accurate conversion data is not used or is improperly used a potential overpressure explosion hazard can be created under certain conditions Using the N calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system Convectr
33. curve Because the intersection is off scale it is apparent that this true pressure measurement requirement for helium exceeds the capability of the instrument For gases other than those listed the user must provide accurate conversion data for safe operation The Convectron gauge is not intended for use above approximately 1000 Torr true pressure Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 41 Figure 3 5 42 True Pressure Torr Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 Torr 10 4 Kr 97 A ZA freon 22 gt E f 12 O CD 7 reon Z Y CH Do not use this data with transducers other than the G P Series 275 Convectron gauge f Pressure units equivalence 1 um Hg 1 mlorr 1 x 102 Torr 1000 um Hg 1 Torr 10 gt 107 107 Indicated Pressure Torr nitrogen equivalent Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation Figure 3 6 Convectron Gauge Indicated vs True Pressure Curve 01 to 1000 Torr 1000 Ar freon 12 CO N or air 100 CH 10 HE S He g 2 a 2 Er Do not use this data with transducers other than the G P Series 275 Convectron gauge Pressure units equivalence 1 um Hg 1 mlorr 1 x 10 3 Torr 1000 um Hg 1 Torr 107 1 10 100 1000 Indicated Pressure Torr nitrogen equivalent Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 43 Chapter 3
34. ding Depending on the pressure of the argon gas source the chamber could be dangerously pressurized while the display continued to read about 30 Torr of N equivalent pressure This type of danger is not unique to the Convectron gauge and likely exists with other thermal conductivity gauges using convection to extend the range to high pressures To measure the pressure of gases other than air or Ny with a Convectron gauge calibrated for N5 you must use the conversion curves listed specifically for Convectron gauges to translate between indicated N pressure and true pressure or use the correct gas species setting The gas species settings can be selected by using the Menu buttons on the front of the controller Do not use other data Never use the conversion curves designed for Convectron gauges to translate pressure readings for gauges made by other manufacturers Their geometry is very likely different and dangerously high pressures may be produced even at relatively low pressure indications Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 39 Chapter 3 40 3 10 3 Examples You must ensure that the atmosphere adjustments for the Convectron gauge are correctly set See Atmosphere Calibration on page 48 Figure 3 5 through Figure 3 10 show the true pressure vs indicated pressure for 11 commonly used gases Table 3 2 will help to locate the proper graph Table 3 2 Pressure vs Indicated Nj Pressure Curve
35. e Controller Instruction Manual 475101 Rev A Installation The Controller may be free standing or panel mounted For free standing benchtop use install the provided self adhesive rubber feet on the bottom of the controller To use the Controller in a free standing benchtop configuration 1 Apply the four provided adhesive rubber mount feet on the bottom of the controller Figure 2 4 Mount Feet on the Bottom of the Controller 0 5 A 0 5 B TYPICAL a li 4 PLACES a B Bottom of 475 Controller n im To mount the controller in a panel refer to Figure 2 5 and Figure 2 6 and follow these steps Panel opening dimensions are 92 mm x 45 mm 3 6 inches x 1 77 inch e Panel thickness is 3 mm 1 8 inch e Provide a minimum of 64 mm 2 5 inch clearance behind the controller to allow for cables 1 Prepare the panel opening per the dimensions listed on Figure 2 3 and the bullet points listed above 2 Remove the Front Panel bezel as shown in Figure 2 5 Hold the Controller in your hands and use your thumbs to push on the bezel Push the bottom of the bezel loose then the top Figure 2 5 Remove the Front Panel bezel SAIT IE HS 3 Insert the Controller through the front of the panel Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 17 Chapter 2 Figure 2 6 Pawl Screw Used to Secure Controller to Pan
36. e current mode will show in reverse video Press the UP or DOWN button to select I V Decade I 8V or I V Decade 0 7V or S Curve 0 9V 4 Press the ENTER button to save the mode 5 Press the BACK button a few times or wait one minute to return to pressure display Programming the process control setpoints is explained in Chapter 4 Configuration of the RS 232 interface is explained in Chapter 5 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A The process control option provides a convenient method of organizing and establishing automatic control of vacuum system operations Control is based on configuring pressure setpoints to activate relays in the controller Two process control setpoints are available to provide control of other vacuum system equipment such as valves pumps heaters alarms and safety interlocking 4 1 Process Control Setup Before putting the controller into operation you must perform the following procedures 1 Use the Product Info menu item to identify the process control options installed in your unit See Product Information on page 27 Install the controller in accordance with the instructions in Chapter 2 Use Table 4 1 to record the proposed activation and deactivation setpoints for each relay Table 4 1 Relay Setpoints Relay Activation setpoint Pressure Deactivation setpoint Pressure Relay 1 Relay 2 4 Develop a ci
37. e high pressure readings Do not locate the gauge where it will subjected to extreme temperature fluctuations For greatest accuracy and repeatability the gauge should be located in a stable room temperature environment 18 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Installation Install Vacuum Do not use a compression mount quick connect fitting for positive pressure Chamber Fittings applications The gauge may be forcefully ejected The gauge port fits a standard 1 2 inch compression quick connect mounting such as an Ultra Torr fitting WARNING Failure to install appropriate pressure relief devices for high pressure applications can cause product damage or personal injury For automatic backfilling and other applications in which malfunction or normal process conditions can cause high pressures to occur install appropriate pressure relief devices 1 8 NPT Pipe Thread The 1 8 NPT pipe thread accommodates a standard 1 8 NPT female fitting 1 Wrap the threads of the port to the vacuum chamber with Teflon tape 2 Tighten the gauge just enough to achieve a seal Do NOT over tighten Remove the plastic or metal bead protector cap from the fitting If a gasket is used place the gasket into the female nut Assemble the components and tighten them to finger tight N While holding a back up wrench stationary tighten the female nut 1 8 turn past finger tight on 316 stainles
38. e value entered is 5 or gt 1000 PCH141 Get setpoint 1 hysteresis 200 1 Setpoint 1 hysteresis is 200 PCH2 1004 Set setpoint 2 hysteresis PROGM OK The setpoint hysteresis is 100 Get Set the polarity of the relay activation factory default is relay activation lt the current pressure setting relay activation gt the current pressure setting 1 or 2 or PROGM OK PCP14 Get polarity setting for Relay 1 POS POLI or NEG POLAJ PCP1 41 Set polarity to PROGM OKJ If the PCP command is sent while the setpoints are being changed by the 475 controller the command is disregarded and the response is F P ERR The controller setting has priority over the PCP command to change the setpoints See Setpoint Parameters on page 29 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A PD RD Set Delay Read Pressure RS 232 Interface Definition Pressure filtering response delay Modifiers 0 to 200 ms Response PROGM OKJ Other possible responses F P ERRJ The delay is being set via the front panel Examples Command Root From Host Computer From 475 Controller PD PD Get show the current 1504 delay setting PD10 1 Set 10 ms delay PROGM OKJ PD150 1Set 150 ms delay PROGM OKJ Response Delay provides a delayed readout of the indicated pressure You can set the delay time in milliseconds for the 475 Controller to display a p
39. eck the power to the Controller which current to the controller must be 12 to 24 Vdc 6 W continuous The displayed pressure 1 Poor gas conductance in gauge s 1 Check the system for leaks and repair as reading is higher than vacuum connection to chamber or a required expected gas source in the plumbing to the 2 Make sure the gauge is mounted close to gauge such as a leak or contamination the location where pressure measurement 2 The Convectron gauge is mounted too is desired far from the area of desired 3 Recalibrate the Controller See measurement For example the gauge Calibration on page 48 could be mounted on a long adapter 4 Check the gas type being used and make tube or chamber fitting that prevents sure the proper correction curves or the gauge from reading the actual settings are being used for that specific pressure in the chamber gas 3 The Controller is out of calibration 5 Remount the gauge if necessary See 4 Unknown gas type in the vacuum Install the Convectron Gauge on chamber page 18 5 The Convectron gauge is not mounted 6 Remount the gauge if necessary See horizontally Install the Convectron Gauge on 6 Extremes of temperatures or vibration page 18 of the Convectron gauge 7 Check and clean or replace the gauge 7 The sensor wire in the Convectron See Convectron Gauge Test gauge is damaged or contaminated Procedure on page 81 and Cleaning Contaminated Convectron Gauges on page 81 ERR 01 CGBAD 1
40. el 4 Use a Phillips head screwdriver to rotate the Pawl Screw to lock the Controller to the panel See Figure 2 6 5 Replace the bezel by aligning it with the keys and push the top and the bottom of the bezel to snap it into place 2 6 Install the Convectron To install Convectron gauges refer to Figure 2 7 and follow the instructions Gauge below Orient the Convectron gauge to prevent condensation of process vapors on the internal surfaces through line of sight access to its interior If vapor condensation is likely orient the port downward to help liquids drain out For proper operation above about 1 Torr install Convectron gauges with the gauge axis horizontal Figure 2 7 Convectron Gauge Installation 275071 275071 For proper operation above 1 Torr this axis MUST be horizontal 275071 F 2 25 inch minimum allows clearance to rotate gauge 0 65 inch p during installation minimum 1 8 NPT Mount Compression Mount NW16KF Flange Mount Quick Connect Do not locate the Convectron gauge near the pump where gauge pressure might be lower than normal vacuum pressure Do not locate the gauge near a gas inlet or other source of contamination where inflow of gas or particulates causes atmospheric pressure to be higher than system atmosphere Do not locate the gauge where it will be subjected to vibration which causes convection cooling resulting in inaccurat
41. en a gas other than N is a constant multiplication factor rather than a curve of N See the graphs in Indicated vs True Pressure for Gases Other Than N or Air on page 39 This is only accurate at low pressures and has a range of 0 1 to 1 5 in increments of 0 1 The CF gas setting can be selected and programmed by using the Menu buttons on the front of the controller See Correction Factor Parameters on page 35 At the time the gas species is changed a pressure high limit is changed so that a warning is given of possible over pressure conditions If a correction factor is entered you can enter an upper limit An example process e Switch gas species from N to Ar Pressure conversion switches to the Ar curve The over pressure error limit is changed to reflect Ar 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Gas Species and press the ENTER button 3 The indicated unit will show in reverse video Press the UP or DOWN button to select N5 Ar CF Correction Factor or FS Factory Specification 4 Press the ENTER button to save the gas species selection 5 Press the BACK button a few times or wait one minute to return to pressure display 3 5 7 Pressure Pressure Filtering allows additional filtering of the pressure reading You can Filtering set the delay time in milliseconds for the 475 Controller to display a pressure reading and Enable o
42. essure X XXExXXX l pressure PC 1 4 35E 024 PROGM OKJ Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 65 PCE PCH PCP 66 Relays Process Control Setpoint Hysteresis Set Relay Polarity Definition Enable Disable relays Modifiers 1 or 0 1 enable 0 disable Response PROGM OKJ Other possible responses F P ERRJ The relays are being set via the front panel Examples Command Root From Host Computer From 475 Controller PCE PCE Cet relay status PROGM OKJ PCE014 Enable Relay 1 disable relay 2 PROGM OKJ PCE104 Enable Relay 2 disable relay 1 PROGM OKJ PCE114 Enable both relays PROGM OKJ PCEO00 1 Disable both relays PROGM OKJ If you disable a relay you must re enable itto make it operable The previous relay settings are still applicable and can be recalled Enabling or disabling a relay that doesn t exist results in a syntax error Definition Modifiers Response Set the process control setpoint hysteresis 1 or 2 for setpoint 1 or 2 PROGM OKJ Other possible responses F P ERRJ RANGE ERR Examples From computer From 475 controller From host computer From 475 controller Definition Modifiers Response Examples From host computer From 475 controller From host computer From 475 controller The hysteresis is being set via the front panel Th
43. eturn to pressure display Analog Offset 1 The indicated setting will show in reverse video Press the UP or DOWN button to select the desired Analog voltage offset 2 Press the ENTER button to save the selection 3 Press the BACK button a few times or wait one minute to return to pressure display 3 5 4 Pressure Units The selected pressure unit of measure will be displayed for measured pressure and setpoint pressure values 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Pressure Units and press the ENTER button 3 The indicated unit will show in reverse video Press the UP or DOWN button to select Torr mbar or Pa 4 Press the ENTER button to save the unit selection 5 Press the BACK button a few times or wait one minute to return to pressure display 3 5 5 Display Options The Display Options menu allows you to select the displayed pressure format setpoints and the brightness of the display screen Pressure Format The Display Format affects pressure notation which can be set to scientific notation or Torr mTorr notation units dependent Scientific notation provides a consistent display width Torr mTorr format is similar to that of the Series 375 Controller 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Display Options and press the ENTER bu
44. face Check the user s manual for the host computer to be sure the protocol used is compatible with that established via the configuration of the RS 232 controller Communication with the control unit is via ASCII strings A message consists of a command and a command modifier followed by a terminator The message may contain leading spaces and the command and modifier may optionally be separated by spaces or commas No spaces may appear within the command or the modifier only between them The terminator expected by the control unit is an ASCII carriage return the ODhex character denoted in this instruction manual by the J symbol The line feed is optional and messages terminated with only the carriage return will be accepted Note that the LF line feed terminator may be appended automatically by the host computer s interface software to the message string supplied by the user This line feed will be ignored If extra characters are found in the message after it has been successfully interpreted but before the terminator they will be ignored Characters can be upper or lower case All messages to the controller will receive a reply consisting of an ASCII string of upper case letters terminated with J Pressures will be returned in the format X XXExXX Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A RS 232 Interface 5 6 RS 232 Command A command from the host must include data and a terminator Syntax dat
45. g the terminator the controller will negate RTS and wait for the next incoming message Figure 5 1 Control Unit Rear Panel Showing RS 232 1 0 Output Connector See I O RS 232 9 Pin Connector pins on page 22 NOTE The Service Port is for factory use only CH1 NC NO C NC NO C CH2 SES o A SERVICE d DES c ANA L J C OUT PORT 12 24V 6W A mating 9 pin D type connector is supplied in the hardware kit Use shielded cable to minimize electromagnetic radiation or susceptibility Ground the shield to the metal connector shell or to Pin 5 Do not connect the shield to Pin 7 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 57 Chapter 5 5 3 RS 232 Handshake Table 5 1 RS 232 Connector Pin Assignments Signal Pin Number Direction Signal Ground 5 Transmitted Data TXD 2 To Computer Received Data RXD 3 To Controller Data Set Ready DSR 6 To Computer Clear To Send CTS 7 To Controller Request To Send RTS 8 To Computer Not Used 1and4 Table 5 2 Computer Cable Pin Assignments for a 9 Pin Connector Controller PC Cable Connector Connector Pinout DE9S Signal at Signal at 475 DB9S DE9P DB9P Computer Controller 2 2 2 3 RXD TXD 3 3 3 2 TXD RXD 5 5 5 1 Signal Ground Signal Ground 8 8 8 5 CTS RTS 7 7 7 4 RTS CTS 6 6 6 6 DSR DSR Use metal connector shell to provide shield wire ground
46. ge Controller Instruction Manual 475101 Rev A 21 Chapter 2 2 8 Connectors 22 Figure 2 10 Locking Tab for Power Supply Cord Locking Tab gt The following figures illustrate the connectors on the back of the 475 Controller Figure 2 11 1 0 RS 232 9 Pin Connector pins Pin Pin 1 Not Used 6 Data Set Ready DSR 2 Transmit TXD 7 Clear To Send CTS 3 Receive RXD 8 Request To Send RTS 4 Not Used 9 Not Used 5 Signal Ground Figure 2 12 Convectron Gauge 9 Pin Connector sockets Pin Pin 1 Simulated Bridge 6 Gauge Null Point 2 Chassis Ground 7 Gauge Bridge 3 Gauge Bridge 8 Gauge Bridge Reference 4 Gauge Bridge Reference 9 Simulated Bridge 5 Gauge Null Point Figure 2 13 2 Channel Process Control Connector pins CH1 CH2 NC NO CINC NO C ae 1 Channel 1 Normally Closed 2 Channel 1 Normally Open 3 Channel 1 Common 4 Channel 2 Normally Closed 5 Channel 2 Normally Open 6 Channel 2 Common Figure 2 14 Analog Output Connector socket Pin Mating Jack Tip Signal Output Ring Ground ANA See Convectron Gauge Analog OUT Output Signal on page 50 Figure 2 15 3 Pin Power Supply Connector Pin Rs 1 Supply Ground 2 Supply Power 12 Vdc to 24 Vdc 3 Chassis Ground 12 24V 6W Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 2 9 2 10 Configure the Relays for the Application Requirements for Process Cont
47. he most common type of sensor used in the Convectron gauge is Gold plated Tungsten However a Platinum sensor is used for some applications where chemically corrosive gases such as chlorine fluorine or mercury vapor are used Check the list of Convectron gauge catalog numbers on page 4 of this manual to determine which type of sensor is in the Convectron gauge on your system 1 Press the UP or DOWN button to select Configure and press the ENTER button Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation 2 Press the UP or DOWN button to select Gauge Sensor Type and press the ENTER button 3 The indicated unit will show in reverse video Press the UP or DOWN button to select Gold Tungsten or Platinum 4 Press the ENTER button to save the selection 5 Press the BACK button a few times or wait one minute to return to pressure display 3 5 11 Correction The Correction Factor is a scaling of a pressure reading to a new reading The Factor Parameters Correction Factor CF can be applied when a gas other than N is a constant multiplication factor rather than a curve of N See the graphs in Indicated vs True Pressure for Gases Other Than N or Air on page 39 This is only accurate at low pressures and has a range of 0 1 to 1 5 in increments of 0 1 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Gas Species and pre
48. icant digits in the 103 range 3 significant digits in the 102 range and above Communication Interface Optional RS 232 Data format ASCII 8 7 data bits odd even no parity one stop bit the default is 8N1 selectable hardware handshake Baud rate 1200 2400 4800 9600 19200 38400 19200 default Convectron Gauge Sensor material Gold plated tungsten platinum Other materials exposed to gas 304 stainless steel borosilicate glass Kovar alumina NiFe alloy polymide Internal volume 40 cm3 2 5 in 3 Weight 85 gm 3 oz Mounting orientation Horizontal preferred Gauge operating temperature 0 9C to 50 C ambient non condensing Gauge bakeout temperature 150 C maximum non operating cable disconnected Cable bakeout temperature 105 9C maximum 1 Measurements will change with different gases and mixtures Correction parameters must be used for gases other than N or Air 2 Do NOT use Convectron gauges with flammable or explosive gases 3 The 24 Vdc input power must be supplied from a power supply certified to IEC Standard with a safety extra low voltage certified output Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 83 Chapter 7 84 NOTES Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A A Analog Output From Convectron Gauge 50 Scaling 52 B Before You Begin Cau
49. ies Brightness The display brightness 1 2 or 3 can be adjusted to a preferred level Setting the display to a lower brightness will extend the life of the display The factory default setting is 3 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Display Options and press the ENTER button 3 Press the UP or DOWN button to select Brightness and press the ENTER button 4 Press the UP or DOWN button to change the brightness of the display 5 Press the ENTER button to save the display brightness setting 6 Press the BACK button a few times or wait one minute to return to pressure display The selected gas species will be displayed and can be changed to another type of gas The controller is calibrated for N5 unless otherwise displayed on the front panel for custom applications When a gas other than No is selected the Indicated vs True Pressure charts listed in Indicated vs True Pressure for Gases Other Than N or Air beginning on page 39 are not required Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation The 475 controller uses a lookup table of bridge voltages and pressures to convert the voltage given from the A D to a pressure Lookup tables exist for N default Ar He CO and O A Factory Specified FS lookup table may also exist In addition a Correction Factor CF can be applied wh
50. ion Damage Requiring Service Customer Service level considerably below that pressure which the system can safely withstand Suppliers of pressure relief valves and pressure relief disks are listed in Thomas Register under Valves Relief and Discs Rupture Confirm that these safety devices are properly installed before installing the Series 275 Convectron gauge In addition check that 1 the proper gas cylinders are installed 2 gas cylinder valve positions are correct on manual systems and 3 the automation is correct on automated systems Using the N calibration to pressurize a vacuum system above 1 Torr with certain other gases can cause dangerously high pressures which can cause explosion of the system See Indicated vs True Pressure for Gases Other Than N or Air on page 39 If used improperly Convectron gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system It is the installer s responsibility to ensure that the automatic signals provided by the process control module are always used in a safe manner Carefully check manual operation of the system and the setpoint programming before switching to automatic operation Where an equipment malfunction could cause a hazardous situation always provide for fail safe operation As an example in an automatic backfill operation where a malfunction might cause high internal pressures provide an appropriate
51. jury due to electrical shock or fire Vent the vacuum chamber to atmospheric pressure and shut off power to the controller before you install remove or replace the controller WARNING Exposing the controller to moisture can cause fire or electrical shock resulting in product damage or personal injury To avoid exposing the controller to moisture install the controller in an indoor environment Do not install the controller in any outdoor environment Do not spill any liquid onto the controller 2 3 Installation Procedure The controller installation procedure includes the following steps 1 Install the appropriate pressure relief devices in the vacuum system 2 Establish the desired location and orientation for the Series 475 Controller 3 Install the Convectron gauge that connects to the Controller Assemble and connect the Controller wiring 5 Adjust the process control relays for the process pressures that will be used Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 15 Chapter 2 2 4 Install Pressure Relief Before you install the Controller install appropriate pressure relief devices in Devices the vacuum system Granville Phillips does not supply pressure relief valves or rupture disks Suppliers of pressure relief valves and rupture disks are listed in the Thomas Register under Valves Relief and Discs Rupture CAUTION Operating the controller abo
52. leshooting MOS circuits Rely on voltage measurements Use a grounded electrostatic discharge safe soldering iron This controller is designed and tested to offer reasonably safe service provided it is installed operated and serviced in strict accordance with these safety instructions Turn OFF power to the controller and refer servicing to qualified service personnel under the following conditions e If any liquid has been spilled onto or objects have fallen into the controller e If a circuit board is faulty e If the Convectron gauge sensing wire is open or the gauge is contaminated If the controller has been exposed to moisture e Ifthe controller does not operate normally even if you follow the operating instructions Adjust only those controls that are explained in this instruction manual Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the controller to its normal operation e If the controller has been dropped or the enclosure has been damaged If the controller exhibits a distinct change in performance Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 77 Chapter 7 If the controller requires repair See Returning a Damaged Controller on page 82 e Phone 1 303 652 4400 or 1 800 776 6543 within the USA or e Email co csr brooks com WARNING Substitution or modifying parts can result in
53. lf diagnostics tests to allow the 475 Controller to perform a self diagnostics test See Diagnose beginning on page 27 to run the tests Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 25 Chapter 3 Figure 3 2 READ PRESSURE AND OR SETPOINTS Series 475 Convectron Gauge Controller System Menu Flowchart CALIBRATE VACUUM CALIBRATE ATMOSPHERE AUTO TEST ALL CALIBRATE AUTO TEST DIAGNOSE MEASUREMENT CIRCUITS MANUAL TEST AUTO TEST ANALOG OUTPUT MANUAL TEST CONFIGURE FACTOR MAXIMUM PRESSURE ENABLE KEYPAD DISABLE Hog win t CODE VERSION PRODUCT NUMBER OF INFO SETPOINTS SERIAL NUMBER NIST gt CALIBRATION STATE L SERIAL RS 232 INTERFACE CF Correction Factor FS Factory Specifications GOLD PLATED TUNGSTEN PLATINUM 3 4 Menu Overview All functions settings and options can be accessed and displayed by using 26 the four buttons on the front panel of the controller Some of the displayed settings are for information only and others can be changed and saved Use either the UP or DOWN button to scroll through the menu selections The five main menu selections are Calibrate Configure Diagnose Keypad and Product Info See Figure 3 2 Each of these menu selections and their relevant sub selections are explained in the following sections of this chapter When using a PC and the RS 232 optio
54. m Grounding Explosive Gases Explosion Implosion Overpressure Conditions WARNING Read these safety notices and warnings before installing using or servicing this equipment If you have any doubts regarding the safe use of this equipment contact the Granville Phillips Customer Service department at the address listed in this user manual Each warning statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice lon producing equipment such as ionization gauges mass spectrometers sputtering systems etc from many manufacturers may under some conditions provide sufficient electrical conduction via a plasma to couple a high voltage electrode potential to the vacuum chamber If exposed conductive parts of the gauge controller and chamber are not properly grounded they may attain a potential near that of the high voltage electrode during this coupling Potential fatal electrical shock could then occur because of the high voltage between these exposed conductors and ground All components in a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation Connect power cords only to properly grounded outlets or sources Do not use the Series 475 Controller or a Series 275 Convectron Gauge in an environment of explosive or combustible gases or gas mixtures Operation of any electrical instrument in s
55. mit Readout will be the pressure at maximum TZ setting OPN SNSR Sensor defect No change in programming See Convectron Gauge Test Procedure on page 81 SNSR UNPJ Sensor unplugged No change in programming RANGE ER Command error TZ must be set below 1 x 10 1 Torr and system pressure must be below 1 x 10 1 Torr INVALID System is NIST calibrated and locked F P ERR Zero is set through the front panel of the controller Examples From host computer TAO From 475 controller PROGM OKJ From host computer TZ1 00E 024 From 475 controller PROGM OKJ e Send the TZ command only at pressures below 1 x 10 1 Torr The response will be a range error if done near atmosphere Change occurs as soon as the function is performed Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A UC VC VER User Configurations Void NIST Traceability Calibration Read Version RS 232 Interface If the controller is system calibrated the response for this command will be INVALID see NIST Traceable System Calibration on page 49 Definition Save a program configuration or restore a previously saved configuration Modifiers S Save R Restore or F Factory 1 2 or 3 Response PROGM OKJ Other possible responses F P ERRJ The settings are being set via the front panel Examples From host computer UCS14 From 475 controller PROGM OK Save the settings to the specified slot 1 in this
56. n additional information is provided in the Process Control Chapter and the RS 232 Chapter Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation 3 4 1 Product Product information allows the user to read the product revision and Information installed options 1 Press the UP or DOWN button to scroll to Product Info and press the ENTER button Press the UP or DOWN button to browse the product information Code Version displays the software part number and revision Setpoints displays the number of relays Serial Number is the same as the label on the product oO OU BW hh NIST Calibration displays Yes if the gauge and controller have been calibrated on NIST traceable instrumentation or displays No if there s no NIST calibration or it has been voided See NIST Traceable System Calibration on page 49 for more detailed information Serial Interface displays if the RS 232 serial interface is installed Press the BACK button a few times or wait one minute to return to pressure display 3 4 2 Keypad The keypad consists of five momentary switches one is used as a power switch four are used for user interaction with the display menu The keypad can be enabled or disabled Disabling the keypad prevents unwanted key presses similar to the Series 375 lock switch When disabled any key press EXCEPT the Power key causes a keypad disabled notification to be shown for two seconds The
57. n to calibrate Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation To reset VAC and ATM back to their original factory settings turn OFF the Controller and hold the ENTER button while turning ON power to the controller Factory CAL is displayed for approximately three seconds The controller will then resume normal power on operation 3 11 4 Convectron During a fast pumpdown from atmosphere thermal effects will prevent the Gauge Use Below 10 3 Convectron gauge from tracking pressure accurately below 10 3 Torr After Torr waiting about 15 minutes indications in the 10 4 range will be valid and response will be rapid Zero adjustment at vacuum may be performed at this time or sooner if readings in the 10 4 range are not needed In the 10 4 Torr range the indication is resolved to about 0 1 mTorr provided the instrument has been carefully zeroed at vacuum For accurate use in the 10 4 range zeroing should be repeated frequently 3 11 5 NIST Brooks Automation offers a calibration service for the Series 475 Convectron Traceable System gauge controller A controller and Convectron gauge tube are calibrated as Calibration a system the built in calibration functions of the controller are locked and a calibration certificate is provided to the customer NOTE When using a 475 Controller that is NIST calibrated for a specific gas selecting any function to change the gas species or calibration will ca
58. n to save the selection 3 Press the BACK button a few times or wait one minute to return to pressure display Handshake 1 The indicated setting will show in reverse video Use the UP and DOWN buttons to select Enable or Disable 2 Press the ENTER button to save the selection 3 Pressthe BACK button a few times or wait one minute to return to pressure display See RS 232 Handshake on page 58 for more detailed information on the Handshake function The Analog Output produces a DC voltage at the output with a range of at least O to 10 5 Vdc You can request a voltage value on the Analog Output so you can calibrate verify a system The Controller must be in the Diagnostic menu You can also apply an offset to the Analog Output See Convectron Gauge Analog Output Signal on page 50 for more detailed information 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Analog Output and press the ENTER button 3 Press the UP or DOWN button to select Analog Format or Analog Offset and press the ENTER button Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation Analog Format 1 The indicated setting will show in reverse video Press the UP or DOWN button to select the desired Analog Format voltage range 2 Press the ENTER button to save the selection 3 Press the BACK button a few times or wait one minute to r
59. nal factory settings turn OFF the Controller and hold the ENTER button while turning ON power to the controller Restore Factory Calibration is displayed for approximately three seconds The controller will then resume normal power on operation If the Series 475 Convectron Gauge Controller must be returned to the factory for service request a Return Authorization RA from Brooks Automation Granville Phillips Do not return products without first obtaining an RA In some cases a hazardous materials document may be required The Brooks Automation Granville Phillips Customer Service Representative will advise you if the hazardous materials document is required When returning equipment to Brooks Automation Granville Phillips be sure to package the products to prevent shipping damage Circuit boards and modules separated from the controller chassis must be handled using proper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the Buyer s responsibility To obtain a Return Authorization RA number contact Granville Phillips Customer Service at Phone 1 303 652 4400 or 1 800 776 6543 8 00 AM to 5 00 PM Mountain Time Zone weekdays excluding holidays within the USA Phone 1 800 367 GUTS 1 800 367 4887 24 hours per da
60. ndicated vs True Pressure Curve 01 to 1000 mbar 1000 N or air freon 22 O2 100 Ne 19 i 2 E E a o Do not use this data with transducers other than the G P Series 275 Convectron gauge Pressure units equivalence 1 mbar 100 pascal 107 102 107 1 10 100 1000 Indicated Pressure mbar nitrogen equivalent Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 47 Chapter 3 3 11 48 Calibration 3 11 1 Calibration Ranges for Different Gas Species 3 11 2 Vacuum Calibration 3 11 3 Atmosphere Calibration Each Convectron gauge is individually calibrated for Ny Zero adjustment of the gauge should not be necessary unless readout accuracy is required below 1 x 10 3 Torr or the gauge has been contaminated Adjustment of the atmospheric indication should not be necessary unless compensating for long cables variations in mounting orientation or contamination The Convectron gauge has a stable temperature compensated design Each controller is also calibrated to provide accurate readout of N pressure with any Convectron gauge when the gauge is properly installed with the gauge axis horizontal Calibration is possible only within certain pressure ranges The ranges are gas specific as listed below Table 3 3 Calibration Limits Calibration Limit Calibration Limit at Atmosphere at Vacuum Gas Species Sensor Type Torr Torr Nitrogen N3 Gold T
61. nu item allows the user to view select and set the control functions of the 475 Controller See Figure 3 2 3 5 1 Setpoint Two process control setpoints provide control of other vacuum system Parameters equipment such as valves pumps heaters alarms and safety interlocking 1 Press the UP or DOWN button to scroll to Configure and press the ENTER button 2 Press the UP or DOWN button to select Setpoint 1 or Setpoint 2 and press the ENTER button 3 Press the UP or DOWN button to select Value Hysteresis Polarity or Relay and press the ENTER button Value 1 The indicated setting will show in reverse video Press the UP or DOWN button to select the desired setpoint 2 Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display Hysteresis 1 The indicated setting will show in reverse video Press the UP or DOWN button to select the desired Hysteresis percentage 2 Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display Polarity 1 The indicated setpoint polarity setting will show in reverse video Press the UP or DOWN button to select Normal or Reverse Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display Relay 1 The indicated setpoint rel
62. nuous Diagnostics 6 2 Diagnostics Requiring User Interaction 6 2 1 Analog Output 6 2 2 Measurement Circuits 74 The External A D and the Analog Output are both monitored by the A D on board the micro controller automatically Discrepancies are reported to the user through the errors ADBAD and AOBAD User interactive diagnostics can be accessed through the front panel or the RS 232 interface Auto Runs the Analog Output through a voltage range and verifies the voltages are being met Example The pressure reported by the Analog Output is significantly different than the pressure reported by the display With the Analog Output cable attached the auto test reports a FAIL With the Analog Output cable disconnected the auto test reports a PASS The problem is most likely external to the 475 Controller Manual Allows the user to set the voltage to a specific voltage Example The Analog Output cable to a DMM is causing a small voltage drop because it is exceptionally long Setting the manual test to 7V the DMM reads 6 8V A 0 2V offset can now be added to the Analog Output Auto Uses the Convectron Simulator to check the External A D and Bridge Amplifier through their ranges Example With the system at atmosphere the controller is showing a CABLE error The auto test reports a FAIL the problem is most likely with the controller and not the cable or gauge Manual Uses the Convectron Simulator to se
63. o help prevent costly mistakes 2 Connect the component end of the cable to the system component to be controlled This is done with a small screwdriver and screw post connections 3 Plug the connector into the back of the 475 Controller 1 On the front panel of the 475 Controller press the UP or DOWN button to scroll to Configure and press the ENTER button 2 Press the UP or DOWN button to select Setpoint 1 or Setpoint 2 and press the ENTER button 3 Press the UP or DOWN button to select Value Hysteresis Polarity or Relay and press the ENTER button Value 1 The indicated setting will show in reverse video Press the UP or DOWN button to select the desired setpoint 2 Press the ENTER button to save the selection 3 Press the BACK button a few times or wait one minute to return to pressure display Hysteresis 1 The indicated setting will show in reverse video Press the UP or DOWN button to select the desired Hysteresis percentage 2 Press the ENTER button to save the selection 3 Press the BACK button a few times or wait one minute to return to pressure display Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Process Control Polarity 1 The indicated setpoint polarity setting will show in reverse video Press the UP or DOWN button to select Normal or Reverse 2 Press the ENTER button to save the selection Press the BACK
64. on Gauges are Pirani type thermal conductivity gauges These gauges measure the heat loss from a heated sensor wire maintained at constant temperature The controller converts this measurement into gas pressure readings For gases other than nitrogen or air the heat loss varies at any given true pressure and can result in inaccurate pressure readings It is important to understand that the pressure indicated by a Convectron gauge depends on the type of gas the orientation of the gauge axis and the gas density in the gauge Convectron gauges are normally factory calibrated for N air has approximately the same calibration With proper precautions the Convectron gauge may be used for pressure measurement of certain other gases At pressures below a few Torr there is no danger in measuring pressure of gases other than N and air merely inaccurate readings A danger arises if the N calibration is used without correction to measure higher pressure levels of some other gases For example N at 24 Torr causes the same heat loss from the Convectron sensor as argon will at atmospheric pressure If the pressure indication of the Convectron gauge is not properly corrected for argon an operator attempting to fill a vacuum system with 1 2 atmosphere of argon would observe a pressure reading of only 12 Torr when the actual pressure had risen to the desired 380 Torr Continuing to fill the system with argon to 760 Torr would result in a 24 Torr pressure rea
65. onant te 31 Gas Species cunc epe ee RNV RENE YER 32 Pressure Filtering obe sega eh ETATE 33 Restore Configuration 34 Save Configuration 34 Ga ge Sensor Type jc xc casse Eus RE ERES 34 Correction Factor Parameters 35 3 6 Error Codes iocur aan ann te DES 36 3 7 Preparing For Convectron Gauge Operation 37 3 8 Convectron Gauge Theory of Operation 37 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 5 Table of Contents Chapter 4 Chapter 5 Chapter 6 3 9 Convectron Gauge Sensors 38 3 10 Using Gases Other than N2 or Air 38 Effects on User Calibration 38 Indicated vs True Pressure for Gases Other Than N or Air 39 Examples 2s esp eh he Res SUE er deed 40 3 11 Calibration ossi ES S lE tata tes 48 Calibration Ranges for Different Gas Species 48 Vacuum Calibration sscerconseerebebcesscerkitees 48 Atmosphere Calibration 48 Convectron Gauge Use Below 10 SO deco tus 49 NIST Traceable System Calibration 49 3 12 Convectron Gauge Analog Output Signal 50 Default Analog Output of Oto 7 V 52 Optional Analog Output of 1 to 8 V 52 Optional Nonlinear Analog Output S Curve 5
66. one jack If graphed on loglinear axes the output voltage is linear in proportion to the log of pressure see Figure 3 11 The analog output is 1 volt per decade of pressure with a factory adjusted output of O volts at 1 0 x 10 4 Torr An alternate analog output format that has a built in 1 Volt offset which has 1 V to 8 V range can be selected The voltage signal is smooth and continuous throughout all the decades of pressure measurement This format is useful for computerized data acquisition because a simple equation finding the common antilogarithm may be programmed to calculate pressure from the voltage output An output voltage of 10 V indicates the gauge is unplugged or faulty Also a selectable non linear S curve signal 0 to 9 V that is backwards compatible with older Convectron gauge controllers is available In addition a programmable offset of 0 1 V to 0 5V can be entered for the analog output signal The offset voltage signal can be selected and programmed by using the Menu buttons on the front of the controller Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Operation Figure 3 11 Convectron Gauge Analog Output vs Pressure Linear with Logarithmic Signal of Pressure 10 9 8 V 7 E o 6 2 Alternate 5 5 1 8 V Q s 5 4 ji 3 5 Me Standard 0 7 V 1 0 0 0001 0 001 0 01 0 1 1 10 100 1000 Nitrogen or Selected Gas Curve Pressure Torr Nonlinear Signal S Curve 10
67. ont panel display Install pressure limiting devices calibrated to a level that the vacuum system can safely withstand In addition install pressure relief valves or rupture disks that will release pressure at a level considerably below the maximum safe pressure level of the system Confirm that these safety devices are properly installed before installing the controller In addition make sure The proper gas cylinders are installed Gas cylinder valve positions are correct on manual systems and The automation settings are correct on automated gas delivery systems Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized Convectron Gauge The Convectron gauge transducer is represented in Figure 3 4 as R1 R2 R3 Theory of Operation and R4 These four resistances form the legs of a bridge circuit with R1 designating the sensor wire of the transducer R2 is a resistive network in the gauge tube that compensates for changes in the ambient temperature At bridge null R1 R2xR3 R4 If there are no changes in ambient temperature the value of R1 is a constant and the bridge is balanced Convectron Gauge Schematic SSS SS SS R1 Bridge Control Convectron Gauge D Transducer sm LI The Convectron gauge operates like a standard Pirani gauge which employs the principle of a Wheatstone bridge to convert pressure to voltage but uses con
68. ontroller Menu Flowchart on page 26 in the Operation Chapter and the Diagnostics Menu on page 73 Two relays and an analog switch are used to switch the simulator in and out of the Bridge Amplifier network NOTE The Convectron Gauge Theory of Operation is explained in Section 3 8 on page 37 Convectron Simulator Theory of Operation Schematic Bridge Control Amp Simulated Convectron Load The 3 primary functions of the Convectron gauge Simulator are 1 Send an Analog Output signal and Setpoint signals to the system process controller to simulate a system process operation 2 Provide a self diagnostics tool to check the 475 Controller to assure that it is operating properly 3 Calibration of the analog inputs outputs between the 475 Controller and the system process controller The Test and measurement circuit can be used to test and troubleshoot the 475 process control outputs prior to full vacuum chamber operation The 475 Controller can be put in the manual mode and simulated pressures entered causing the process control channels to change state During the initial setup of an Analog input channel for the System Process Controller for system process control it may be helpful to calibrate the process voltage input to the pressure displayed on the 475 Controller The Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 75 Chapter 6 76 6 3 2 Analog Output Tests 6 3
69. pplying in excess of 0 1 V when the gauge is at vacuum or 2 V when at atmospheric pressure The Convectron gauge should show the resistances listed in Figure 7 1 pin numbers are embossed on the gauge cable connector e Pins 1 to 2 18 to 23 ohms Pins 2 to 3 50 to 60 ohms Pins 1 to 5 180 to 185 ohms If the resistance from pins 1 to 2 reads about 800 ohms the sensor wire in the gauge is broken Replace the Convectron gauge Note If the resistance values shown here are correct but you still think the gauge is not reading correctly the gold plating on the tungsten sensor wire may be eroded and the gauge will have to be replaced When the small sensor wire in the Convectron gauge is contaminated with oil or other films its emissivity or its diameter may be appreciably altered and a change of calibration will result Baking to clean the gauge The Convectron gauge may be baked to 150 C nonoperating while under vacuum with the cable disconnected All materials used in the Convectron gauge are corrosion resistant and bakeable to 150 C Chemically cleaning the gauge Cleaning with trichloroethylene perchloroethylene toluene or acetone is possible but it must be done very carefully to not damage the sensor wire WARNING Use of flammable solvents near open flame or energized electrical equipment can cause an explosion or fire To avoid product damage or personal injury due to explosion or fire use flammable sol
70. pressure relief device Turn OFF power to the controller and refer servicing to qualified service personnel under the following conditions e If any liquid has been spilled onto or objects have fallen into the controller e If a circuit board is faulty e If the Convectron gauge sensing wire is open or the gauge is contaminated If the controller has been exposed to moisture e Ifthe controller does not operate normally even if you follow the operating instructions Adjust only those controls that are explained in this instruction manual Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the controller to its normal operation If the controller has been dropped or the enclosure has been damaged If the controller exhibits a distinct change in performance Phone 1 303 652 4400 or 1 800 776 6543 8 00 AM to 5 00 PM Mountain Time Zone weekdays excluding holidays within the USA Phone 1 800 367 GUTS 1 800 367 4887 24 hours per day seven days per week within the USA Email co csr brooks com Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 11 Chapter 1 12 NOTES Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 2 1 System Components Figure 2 1 and Figure 2 2 illustrate all available options and system capabilities including controllers with process control and RS 232
71. product damage or personal injury due to electrical shock or fire e Install only those replacement parts that are specified by Granville Phillips e Do not install substitute parts or perform any unauthorized modification to the controller Do not use the controller if unauthorized modifications have been made WARNING Failure to perform a safety check after the controller has been repaired can result in product damage or personal injury due to electrical shock or fire If the controller has been repaired before putting it back into operation make sure qualified service personnel perform a safety check 78 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 7 4 Error Codes and Possible Solutions Table 7 1 Service and Maintenance Table 7 1 lists failure symptoms and error codes possible causes and possible solutions NOTE Running the Controller diagnostics can possibly assist you in determining if the problem is with the 475 Controller or the Convectron gauge Failure Symptoms or Error Codes Possible Causes and Possible Solutions Symptom or Error Code Possible Causes Possible Solutions The Controller will not power up no response to 1 Power interconnect cable improperly connected see page 20 1 Check the power supply cable and power to the 475 Controller the power switch 2 Over voltage under voltage or over 2 Ch
72. r Disable the Low Pass Filter Response Delay provides a delayed readout of the indicated pressure 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Pressure Filtering and press the ENTER button 3 Press the UP or DOWN button to select Response Delay or LPF Low Pass Filter 4 Press the ENTER button to open the selection Response Delay 1 The indicated unit will show in reverse video Press the UP or DOWN button to select the desired delay time 2 Press the ENTER button to save the time selection 3 Press the BACK button a few times or wait one minute to return to pressure display Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 33 Chapter 3 34 3 5 8 Restore Configuration 3 5 9 Save Configuration 3 5 10 Gauge Sensor Type LPF Low Pass Filter 1 The indicated unit will show in reverse video Press the UP or DOWN button to select Enable or Disable 2 Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display Restore Configuration allows the user to switch to any of the four saved configurations Four different configurations one factory default and three user set configurations can be programmed and saved Each user setting will include unique setpoint parameters unit of measure analog output setting computer inte
73. rcuit schematic that specifies exactly how each piece of system hardware will connect to the controller relays 5 Attach a copy of the process control circuit diagram to this manual for future reference and troubleshooting 6 Do not exceed the relay ratings listed below Relay Configuration Normally Closed Normally Open Common NC NO C Relay Contact Rating 5 A 250 VAC or 30 Vdc resistive load 7 f you desire application assistance contact a Granville Phillips application engineer See Customer Service on page 77 for contact information Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 53 Ch apter 4 Figure 4 1 Convectron Gauge Output and Power Connections Chassis Ground Connector Input Output 2 Channel Connector Process Control Connector ee Power Supply auge Connector NOTE The Service Port is Connector for factory use only Analog Output Connector 4 2 Connecting Process The process control connector located on the rear panel of the controller is 4 3 54 Control Relays Setpoint Display and Adjustment marked with letters identifying each pin See Connectors on page 22 A mating connector Granville Phillips part number 0167820 is supplied in the hardware kit 1 Using a drawing of the process control output connector and the circuit schematics you have prepared make a cable to connect the various system components to be controlled Clearly label each lead t
74. ressure reading Also see LPF Definition Read Convectron gauge pressure response Modifiers None Response Pressure Value X XXE XX J Simulated Pressure Reading TX XXE XX4 Other possible responses OPN SNSRJ Defective transducer SNSR UNP J Sensor is unplugged SNSR OVPJ Pressure higher than 999 Torr or gasses other than nitrogen in the system Atmosphere pressure of helium will cause this response Example From host computer RDA From 475 controller 9 34E 02 1 e ASCII string representing pressure in scientific notation Three significant digits except in 103 Torr range with two significant digits and a zero filler 1074 Torr range with one significant digit with two zero fillers While at vacuum the output should be 0 00E 04 2 0 0 mTorr displayed Output 0 00E 00 0 0 mTorr displayed occurs when the transducer voltage at vacuum has drifted lower than the Convectron gauge can sense The number received at vacuum will fluctuate under normal operation but if it reads negative consistently calibration may be required See TZ Calibrate at Vacuum on page 70 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 67 Chapter 5 RST RU SB SN 68 Reset Controller Read Pressure Unit Set Baud Rate Serial Number Definition Reset controller Modifiers None Response None Example From host computer RSTA From 475 controller None The RST command
75. rface parameters atmosphere and vacuum calibrations gas species setting and display options Initial user settings are programmed to the factory defaults 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Restore Config and press the ENTER button 3 The indicated unit will show in reverse video Press the UP or DOWN button to select 1 2 3 or Defaults 4 Press the ENTER button to save the selection 5 Press the BACK button a few times or wait one minute to return to pressure display Save Configuration allows the user to save up to three configurations in addition to the factory default configuration Three different user settings can be programmed and saved Each user setting will include unique setpoint parameters unit of measure analog output setting computer interface parameters atmosphere and vacuum calibrations gas species setting and display options 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Press the UP or DOWN button to select Save Config and press the ENTER button 3 The indicated unit will show in reverse video Press the UP or DOWN button to select 1 2 or 3 Press the ENTER button to save the selection Press the BACK button a few times or wait one minute to return to pressure display Sensor Type allows the user to set the type of sensor in the Convectron gauge T
76. rol Option Installation To configure the setpoint relays for the process control option see page 53 To configure the setpoint relays using the RS 232 option see PCE Relays on page 66 If the controller will measure the pressure of a gas other than N or air you must adjust relay setpoints for the process gas The true pressure of a gas other than N or air may be substantially different from the pressure that the output indicates For example outputs might indicate a pressure of 10 Torr 13 3 mbar 1 33 kPa for argon although the true pressure of the argon is 250 Torr 333 mbar 33 3 kPa Such a substantial difference between indicated pressure and true pressure can cause over pressurization resulting in an explosion See Using Gases Other than N2 or Air on page 38 and Cas Species on page 32 WARNING Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to overpressurization If the controller will measure any gas other than N or air before putting the controller into operation adjust relays for the process gas that will be used If you are using the process control option you must prepare for process control operation before turning ON the controller See Chapter 4 for complete process control setup instructions CAUTION Failure to check system setup configuration before switching to automatic operation can cause errors Series 475 Convec
77. ron Gauge Controller Instruction Manual 475101 Rev A 27 Chapter 3 28 3 4 4 Calibrate ENTER button 2 Press the UP or DOWN button to select Auto Test Meas Circuit or Analog Output and press the ENTER button Auto Test All Performs the Auto Test described above 1 Press the ENTER button to allow the 475 Controller to automatically perform a self diagnostics test Test Measurement Circuit The Auto Test mode automatically tests the Measurement Circuits In the Manual Test mode you can enter a voltage signal for the Bridge Voltage or a pressure rating to simulate system pressure 1 Press the UP or DOWN button to select Auto Test or Manual Test and press the ENTER button 2 In the Auto Test mode press the ENTER button to allow the 475 Controller to perform the diagnostics check 3 Inthe Manual Test mode use the UP or DOWN button to select either Bridge Voltage or Pressure and press the Enter button 4 Press the UP or Down button to enter the desired voltage in the Bridge Voltage mode or the desired pressure in the Pressure mode Test Analog Output The Auto Test mode automatically tests the Analog Output Circuits In the Manual Test mode you can enter a voltage to apply to the Analog Output to simulate system pressure or for system setup 1 Press the UP or DOWN button to select Auto Test or Manual Test
78. rr HA Enable Disable Definition Enables or disables RTS CTS handshake RTS CTS Modifiers 1 or 0 1 enable 0 disable Handshake Response PROGM OKJ Example From host computer HA1 J From 475 controller PROGM OK 64 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A KP Keypad Definition Modifiers Response RS 232 Interface Get the keypad status or Enable Disable the keypad on the 475 controller 1 or 0 1 enable 0 disable PROGM OKJ Other possible responses F P ERRJ Examples From host computer From 475 controller From host computer From 475 controller LPF Low Pass Filter Definition Modifiers Response The keypad is being set via the front panel KPJ Get the Keypad status Enabled or Disabled 14 or 24 KP 14 Enable keypad KPO Disable keypad PROGM OKJ Enables another order of low pass filtering for the pressure reading 1 or 0 1 enable 0 disable PROGM OKJ Other possible responses F P ERRJ Example From host computer From 475 controller PC Set Setpoint Definition Pressure Modifiers Response Example From host computer From 475 controller The Low Pass Filter is being set via the front panel LPF1 Enable Low Pass Filter LPF O Disable PROGM OK Setpoint pressure setting factory default is 1E 4 1 or 2 X XXExXX pr
79. rs for Series 475 Convectron Vacuum Measurement Controller with Graphic Display 1 8 DIN Panel Mount or Benchtop Mount Controller 1 8 DIN Panel Mount or Benchtop Mount 475001 X X Interface Setpoint Options None 0 RS 232 with 2 Setpoints A Measurement Units Torr T mbar M Pascal P Power Supply Universal CE Compliant 475008 X Power Cords North American 115 VAC amp Japan 100 VAC 1 North American 240 VAC 2 Universal Europe 220 VAC 3 United Kingdom 240 VAC 4 Convectron Gauge Sensor Types by Catalog Number Gold plated Tungsten Platinum 275071 275320 x 275154 275168 275185 275196 275203 275233 275238 275256 275282 275316 ConFlat is a registered trademark of Varian Associates CAJON VCO and VCR are registered trademarks of Swagelok Company Chapter 1 Chapter 2 Chapter 3 REI es 2 amer a anne einen Cdi 9 1 1 Caution and Warning Statements 9 1 2 Reading and Following Instructions 9 1 3 System Grounding 10 1 4 Explosive Cases oso amas Sea EE OO Uere de 10 1 5 Explosion Implosion 10 1 6 Overpressure Conditions 10 1 7 OPTION EEE ate uva DERBI pg Prep ve ORO S heus 11 1 8 Damage Requiring Service 11 1 9 Customer SEVICE sese ser een eas PE TRE RE 11 Installation cune teme Re pr RR t ae 13 2 1 System Components
80. ruction Manual 475101 Rev A 85 Index P Power Up Initial 25 Preparing for Operation Analog Output Scale 52 Button Overview 25 Calibration 48 Convectron Gauge 37 Convectron Gauge Analog Output 50 Pressure Measurement 25 Preparing RS 232 60 Pressure Relief Devices 16 Process Control Connecting Relays 54 Requirements 23 Setpoint Display and Adjustment 54 Settings 55 Setup 53 R Reading and Following Instructions 9 Relays Configuring for Application 23 Connecting 54 Setpoint Display and Adjustment 54 Returning a Damaged Controller 82 RS 232 Command Syntax 61 Command Response Timing 59 Handshake 58 Preparing 60 Reset to Factory Defaults 63 Theory of Operation 57 Troubleshooting 72 80 User Commands List of 61 Wiring 57 Service and Maintenance Convectron Gauge Test Procedure 81 Customer Service 77 Damage Requiring Service 77 Factory Default Settings 82 Returning a Damaged Controller 82 Service Guidelines 77 Service Guidelines 77 Settings Factory Default 82 Settings for Process Control 55 Simulator Convectron Gauge 75 Specifications Controller 83 Convectron Gauge 83 86 System Components Installation 13 System Menu Flowchart 26 T Theory of Operation Convectron Gauge 37 Convectron Gauge Simulator 75 RS 232 57 Troubleshooting Error Codes 79 RS 232 72 80 U User Commands RS 232 61 W Wiring RS 232 57 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Series 475
81. s steel or nickel gaskets or 1 4 turn past finger tight on copper or aluminum gaskets The KF mounting system requires O rings and centering rings between mating flanges 1 Tighten the clamp wing nut to compress the mating flanges together 2 Seal the O ring To minimize the possibility of leaks with ConFlat flanges use high strength stainless steel bolts and a new clean OFHC copper gasket Avoid scratching the seal surfaces To avoid contamination install metal gaskets 1 Finger tighten all bolts 2 Usea wrench to continue tightening 1 8 turn at a time in criss cross order 1 4 2 5 3 6 until the flange faces make contact Further tighten each bolt about 1 16 turn Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 19 Chapter 2 Ground the f the Convectron Gauge has a VCR type fitting or ConFlat flange it will Convectron Gauge be properly grounded via the vacuum chamber connection f the Convectron Gauge has a KF flange or an NPT fitting use a length of 12 AWG braided copper wire which connects to the Convectron Gauge and to the vacuum chamber ground connection See Figure 3 WARNING Improper grounding could cause product failure or personal injury Follow ground network requirements for the facility Maintain all exposed conductors at earth ground e Make sure the vacuum port to which the gauge is mounted is properly grounded Figure 2 8 Convectron Gauge
82. ss the ENTER button 3 Press the UP or DOWN button to select Correction Factor and press the ENTER button 4 Press the ENTER button again to highlight the current CF setting 5 Press the UP or DOWN button to select the desired Correction Factor 0 1 to 1 5 and press the ENTER button to save the new CF setting 6 Press the BACK button a few times or wait one minute to return to pressure display Correction Factors The Correction Factor is a scaling of a pressure reading to a new reading 1 Press the UP or DOWN button to select CF 2 Press the ENTER button to open the Correction Factors Press the ENTER button to display the current Correction Factor 3 Press the UP or DOWN button to select the desired Correction Factor multiplier 0 1 to 1 5 and press the ENTER button to save the new setting Maximum Pressure When a gas species is changed a pressure high limit must be entered so a warning is given of possible over pressure conditions If a correction factor is entered you can enter an upper limit 1 Press the UP or DOWN button to select Max Pressure 2 Press the ENTER button to open the Max Pressure Press the ENTER button to display the current Maximum Pressure setting 3 Pressthe UP or DOWN button to select the desired Maximum Pressure Setting 1 mTorr to 999 Torr and press the ENTER button to save the new setting Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 35 Chapter
83. st verifies ONLY the factory calibration Not a user applied calibration Vacuum calibration services are available through Granville Phillips for validating the accuracy of the Convectron gauge and measurement system Contact Customer Service for additional details Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 7 1 7 2 7 3 Customer Service Service Guidelines Damage Requiring Service Phone 1 303 652 4400 or 1 800 776 6543 8 00 AM to 5 00 PM Mountain Time Zone weekdays excluding holidays within the USA Phone 1 800 367 GUTS 1 800 367 4887 24 hours per day seven days per week within the USA Email co csr brooks com For Global Customer Support go to www brooks com click on Contact Us then click on Global Offices to locate the Brooks Automation office nearest you Because the 475 Controller contains static sensitive electronic parts the following precautions must be followed when troubleshooting Use a grounded conductive work surface Wear a high impedance ground strap for personal protection Use conductive or static dissipative envelopes to store or ship static sensitive devices or printed circuit boards Do not operate the controller with static sensitive devices or other components removed from the controller Do not handle static sensitive devices more than absolutely necessary and only when wearing a ground strap Do not use an ohmmeter for troub
84. struction Manual 475101 Rev A RS 232 Interface DT Diagnostics Test Definition Perform diagnostics tests on A D and analog out Modifiers C CS CE CP CV CD A At AD Response See the examples below NOTE F P ERR Diagnostics are being performed via the front panel Examples Command Root From Host Computer From 475 Controller DT DTJ PASS Run auto test on A D and analog output FAILA Both functions failed AD FAILA A D failed AO FAIL Analog output failed DTC DTC PASS Run auto test on A D FAIL A D failed DTCS l 1 Simulator enabled 0 1 Simulator disabled DTCD PROGM OK Disable simulator DTCE PROGM OK Enable simulator DICP1 00E 3 PROGM OK Set simulator pressure DTCV5 534 1 PROGM OK Set simulator bridge voltage DTA DTA PASS I Run auto test on analog output FAIL Analog output test failed DTA5 00 1 PROGM OK Set analog output voltage DTAD I PROGM OKJ Resume pressure reporting to analog output FAC Reset User Definition Set to factory defaults Calibration to Modifiers None Factory Detaults Response PROGM OK Example From host computer FAC From 475 controller PROGM OK The FAC command will cause default VAC and ATM parameters to be programmed to the factory default settings If the controller is NIST calibrated the response for this command will be INVALID see NIST Tracea
85. sts 76 Controller Calibration Verification 76 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Chapter 7 Service and Maintenance 7 1 Customer Service 7 2 Service Guidelines 7 3 Damage Requiring Service 7 4 Error Codes and Possible Solutions 7 5 RS 232 Troubleshooting 7 6 Convectron Gauge Test Procedure 7 4 Cleaning Contaminated Convectron Gauges 7 8 Reset the Factory Defaults 7 9 Returning a Damaged Controller 7 10 Specifications Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Table of Contents Table of Contents 8 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 1 1 Caution and Warning This manual contains caution and warning statements with which you must Statements comply to prevent inaccurate measurement property damage or personal injury CAUTION Caution statements alert you to hazards or unsafe practices that could result in minor personal injury or property damage Each caution statement explains what you must do to prevent or avoid the potential result of the specified hazard or unsafe practice WARNING Warning statements alert you to hazards or unsafe practices that could result in severe personal injury or death due to electrical shock fire or explosion Each warning statement explains what
86. t a bridge voltage or a pressure Example When the Analog Output of the controller gets below a certain voltage corresponds to a pressure an external process is started The vacuum system is fairly large requiring a long pump down time The Convectron Simulator is used to set simulate the pressure below the threshold to see if the Controller is working and to see if the external process is started This can be done without waiting to pump down the system Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 6 3 Convectron Gauge Simulator Figure 6 3 Convectron Gauge Transducer 6 3 1 Simulate a Process Operation Prior to Full System Integration Diagnostics The 475 has an in circuit Convectron Gauge Simulator that can be used for self diagnostics or system setup The simulator is controlled by a PWM controlled voltage source similar to the Analog Output It is calibrated in the same manner as the Analog Output Changing the voltage of the simulator forces the Bridge Amplifier to change the voltage across a resistor network effectively simulating a Series 275 gauge The Convectron simulator can be operated from the front panel on the 475 Controller or through the RS 232 interface Test Mode is displayed across the bottom of the front panel display screen when the Convectron Simulator is enabled Access to the Simulator via the Controller front panel is by entering the Diagnose functions See the 475 C
87. tion and Warning Statements 9 Customer Service 11 Damage Requiring Service 11 Reading and Following Instructions 9 Button Overview 25 C Calibrate How To 28 Calibration Atmosphere 48 NIST Traceable 49 Preparing for Operation 48 Vacuum 48 Caution and Warning Statements 9 Chapters Installation 13 Preparing for Operation 25 Process Control 53 RS 232 Interface 57 Safety Instructions 9 Service and Maintenance 73 77 Command Syntax RS 232 61 Command Response Timing RS 232 59 Controller Error Codes 36 Factory Defaults 14 Specifications 83 Convectron Gauge Analog Output Signal 50 Cleaning 81 Installation 18 Preparing for Operation 37 Simulator 75 Specifications 83 Test Procedure 81 Theory of Operation 37 Customer Service 11 77 D Damage Requiring Service 11 77 Default Settings 82 Diagnostics 73 How to 27 Display Setpoints 54 E Error Codes Controller 36 Troubleshooting 79 F Factory Defaults Controller 14 Figures vacuum chamber ground connections 20 Flowchart Menu 26 G Gases Other than N2 or Air 38 I Initial Power Up 25 Installation Configure the Relays 23 Connect the Wiring 20 Convectron Gauge 18 Mount the Controller 16 Pre Installation Considerations 15 Pressure Relief Devices 16 Requirements for Process Control Option 23 System Components 13 Vacuum Chamber Fittings 19 M Menu Flowchart 26 Overview 26 0 Overview buttons 25 Series 475 Convectron Gauge Controller Inst
88. to Vacuum Chamber Ground Connection qui DR z And 2 7 Connect the Wiring The 475 Controller has connectors for Convectron gauge cable RS 232 setpoints analog output cable and power supply wiring as illustrated in Figure 2 9 shown with the optional RS 232 and setpoint connectors Figure 2 9 Convectron Gauge Output and Power Connections Chassis ground CH1 NC NO CINCNOC CH2 connection ass A I O RS 232 Vo rh 2 channel connector 0 0 0 0 9 process control setpoint connector Convectron gauge Power supply connector NOTE The Service Port is Analog output connector connector for factory use only 20 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Installation Connect a 12 AWG ground wire to the chassis ground connection on the rear of the Controller and to a known Earth ground Do NOT connect a ground wire from the Controller directly to the vacuum chamber or system ground WARNING Improper grounding can cause product damage or personal injury Follow ground network requirements for the facility Maintain all exposed conductors at earth ground e Connect the power cord to a properly grounded outlet e Make sure the vacuum port to which the gauge is mounted is properly grounded e Connect the gauge envelope to a facility ground or shield the envelope If necessary use a ground lug on the flange bolt Ground the gauge envelope by using a metal hose
89. tron Gauge Controller Instruction Manual 475101 Rev A 23 Chapter 2 24 NOTES Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 3 1 Preparing for Before you prepare for process measurement make sure Pressure Measurement The controller was properly set up and installed per the instructions in Chapter 2 The gas in your vacuum system is air or N3 If you are using other gases you must follow the instructions in Using Gases Other than N2 or Air on page 38 and Indicated vs True Pressure for Gases Other Than N or Air on page 39 You are reasonably familiar with the general theory of operation of thermal conductivity gauges See Convectron Gauge Theory of Operation on page 37 Figure 3 1 Series 475 Convectron Gauge Controller Front Panel GRANVILLE PHILLIPS Vacuum Fluorescent Display Screen Back Button Enter Button Power ON OFF ci LA ignia amp La 475 Convectron 3 2 Button Overview The POWER button is press ON press OFF In case of power failure the controller will restart if it was ON when power was interrupted Use the BACK button to exit menus Use the UP and DOWN buttons to make menu selections and change parameter settings Lal Use the ENTER button to enter menus and to execute parameter changes Figure 3 2 page 26 illustrates the button menu flow 3 3 Initial Power Up 1 Pressthe Power ON OFF button see Figure 3 1 The display screen will illuminate 2 Runthe se
90. tting Setpoint 1E 4 Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Relay Polarity Activation below pressure setpoint Normal Polarity minus Returning Pressure Hysteresis 10 55 Chapter 4 4 6 Process Control Relay The 475 Controller is shipped from the factory with the trip point relays set Trip Points to a pressure of 1 00E 4 The relays need to be adjusted for your application The trip point may be set from 1 x 10 4 to 100 The pressure measurement unit restricts the trip points at the extremes of the measurement range A built in default hysteresis of 1096 prevents oscillation around the trip point In the default mode relays activate with decreasing pressure and deactivate at a 10 higher pressure than the activation pressure as illustrated in Figure 4 2 You can reverse relay polarity so relays activate with increasing pressure and deactivate at a lower pressure than the activation pressure Figure 4 2 Process Control Relay Behavior Relay Behavior with Decreasing Pressure Time gt Deactivate Default 1096 Hystersis Activate Vacuum Chamber Pressure Relay Activated Activated Deactivated op LE Relay Behavior with Increasing Pressure S Time D 9 5 Deactivate a s Default 1096 S Hystersis E Activate 2 2 S gt Relay Activated Activated gt Deactivated
91. tton 3 Pressthe UP or DOWN button to select Pressure Format and press the ENTER button 4 Press the UP or DOWN button to select Torr mTorr or Scientific and press the ENTER button to save the selected format 5 Press the BACK button a few times or wait one minute to return to the pressure display Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 31 Chapter 3 Figure 3 3 32 Setpoint Indicators Show Setpoints The pressure display may be set so it shows pressure only or shows pressure and setpoint status When pressure only is selected the font is larger and can be seen from a greater distance When setpoint status is shown status and pressure will be shown Setpoint status is indicated by a rectangle icon that will be filled if the relay is energized or open if the relay is not energized See Figure 3 3 1 Press the UP or DOWN button to select Configure and press the ENTER button 2 Pressthe UP or DOWN button to select Display Options and press the ENTER button 3 Press the UP or DOWN button to select Show Setpoints and press the ENTER button 4 Press the UP or DOWN button to change the setpoint display status to Yes or No 5 Press the ENTER button to save the show setpoints parameter Press the BACK button a few times or wait one minute to return to pressure display Filled rectangles indicating an energized relay ve iur 9 99E 2 i Bem 3 5 6 Gas Spec
92. uch an environment constitutes a definite safety hazard Do not use the product to measure the pressure of explosive gases or gas mixtures The sensor wire of a Convectron gauge normally operates at 125 degrees Centigrade If a malfunction causes the sensor wire to reach a higher temperature it could raise the sensor wire temperature to above the ignition point of combustible materials or gases Danger of explosion or inadvertent venting to atmosphere exists in all vacuum systems which incorporate gas sources or involve processes capable of pressuring the system above safe limits Danger of injury to personnel and damage to equipment exists on all vacuum systems that incorporate gas sources or involve processes capable of pressuring the system above the limits it can safely withstand For example danger of explosion in a vacuum system exists during backfilling from pressurized gas cylinders because many vacuum devices such as ionization gauge tubes glass windows glass belljars etc are not designed to be pressurized Do NOT subject Series 275 Convectron gauges to pressures above 1000 Torr Install suitable devices that will limit the pressure from external gas sources to the level that the vacuum system can safely withstand In addition install suitable pressure relief valves or rupture disks that will release pressure at a Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A Safety 1 7 1 8 1 9 Operat
93. ungsten 400 to 999 0 to 0 1 or Platinum Argon Ar Gold Tungsten 400 to 999 0 to 0 1 or Platinum Helium He Gold Tungsten 1 to8 0 to 0 1 Helium He Platinum 1 to 6 0 to 0 1 Carbon Dioxide CO Gold Tungsten 400 to 999 0 to 0 1 or Platinum Oxygen O2 Gold Tungsten 400 to 999 0 to 0 1 or Platinum Evacuate the Convectron gauge to a pressure less than 100 mTorr If the calibration is for 0 0 evacuate to less than 1 x 10 5 Torr and allow system to stabilize for 15 minutes 1 Press the UP or DOWN button until Calibrate is displayed and press the ENTER button Calibrate VAC 0 0 is displayed 2 If Invalid Pressure for CAL or Invalid Function NIST CAL is displayed calibration will not be possible 3 Press the ENTER button to calibrate at vacuum or press the UP or DOWN button to calibrate at any pressure between 0 0 and 100 mTorr then press the ENTER button to calibrate Allow the pressure in the Convectron gauge to rise above the Calibration Limit shown in Table 3 3 Read the local atmospheric pressure on an accurate barometer 1 Press the UP or DOWN button until Calibrate is displayed and press the ENTER button Calibrate ATM 760 actual reading is displayed 2 If Invalid Pressure for CAL or Invalid Function NIST CAL is displayed calibration will not be possible 3 Pressthe UP or DOWN button to calibrate at any pressure between 400 and 999 Torr then press the ENTER butto
94. use the display panel to indicate INVALID Controller Function After NIST Calibration The Product Info menu will display NIST Calibration Yes The controller cannot be calibrated the Calibrate VAC or ATM menu indicates INVALID and the TS TZ and FAC commands of the computer interface respond with INVALID Voiding the NIST Calibration To set VAC or ATM thereby voiding the NIST traceable calibration you must first unlock the calibration functions Hold down the BACK and UP buttons during power up or send the VC Void Calibration command through the computer interface The Product Info menu will display NIST Calibration NO to indicate that the controller can now be calibrated The controller can then be calibrated at vacuum or atmosphere as described in Vacuum Calibration and Atmosphere Calibration on page 48 NOTE Once the NIST calibration has been voided the settings cannot be restored The Controller and Convectron gauge must be returned to the factory for NIST calibration Hold down the ENTER button during power up to restore the factory calibration settings but not the NIST calibration settings Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 49 Chapter 3 3 12 50 Convectron Gauge Analog Output Signal A voltage output signal proportional to the common logarithm of the pressure indication is provided on the rear panel of the controller via a standard 1 8 inch miniature ph
95. ve 1000 Torr 1333 mbar 133 kPa true pressure could cause pressure measurement error or product failure To avoid measurement error or product failure due to overpressurization install pressure relief valves or rupture disks in the system if pressure exceeds 1000 Torr 1333 mbar 133 kPa 2 5 Mount the Controller To locate and orient the Controller refer to Figure 2 3 and follow the Figure 2 3 16 instructions below For greatest accuracy and repeatability locate the Controller in a stable room temperature environment Ambient temperature should never exceed 40 C 104 F operating non condensing or 85 C 185 F non operating Provide adequate ventilation for the Controller to dissipate 6 Watts Locate the Controller away from internal and external heat sources and in an area where ambient temperature remains reasonably constant Do not locate the Controller where it will be exposed to corrosive gases such as mercury vapor or fluorine See Install the Convectron Gauge on page 18 for Convectron gauge installation instructions Controller Dimensions 159 4 6 28 6 16 NOTES Allow 64 mm 2 5 in clearance for the connectors on the back of the controller All dimensions are shown in mm inch 1 8 DIN panel cutout for mounting the controller through 45 0 a panel 1 77 The controller mounts through the front of the panel Series 475 Convectron Gaug
96. vection cooling to enable accurate pressure measurement when properly calibrated from 10 4 to 1000 Torr The sensing wire is an ultra fine strand of gold plated tungsten or solid platinum As the vacuum system pressure is decreased there are fewer molecules in the system to conduct the heat away from the sensor wire causing the temperature and resistance of R1 to increase The increased resistance of R1 causes the bridge to unbalance and a voltage is developed across the null terminals The bridge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero When the bridge voltage is decreased the power dissipated in the sensor wire is decreased causing the resistance of R1 to decrease to its previous value The opposite events happen for a pressure increase The bridge voltage is a nonlinear function of pressure Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 37 Chapter 3 3 9 3 10 38 Convectron Gauge Sensors Using Gases Other than No or Air 3 10 1 Effects on User Calibration Using Sensors other than Gold Plated Tungsten Another factor that affects the bridge voltage vs pressure relationship is the type of sensor wire used in the 275 Convectron gauge which is either a gold plated tungsten common or a platinum sensor wire The platinum sensor is used only in some applications that are corrosive to the gold plated tungsten sensor
97. vents such as acetone and toluene only in a well ventilated area that exhausts to the outdoors Do not use such solvents near an open flame or energized electrical equipment Exposure to fumes from solvents in an improperly ventilated area can cause personal injury To avoid personal injury from inhaling fumes from solvents such as trichloroethylene perchloroethylene toluene and acetone use these solvents only in a well ventilated area that exhausts to the outdoors Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 81 Chapter 7 7 8 7 9 82 Reset the Factory Defaults Returning a Damaged Controller Hold the gauge with the main body horizontal and the port projecting upward at an angle of 45 degrees Slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to the point where it touches the screen Let the solvent stand in the gauge for at least ten minutes Do not shake the gauge Shaking the gauge with liquid inside can damage the sensor wire To drain the gauge position it horizontally with the port facing downward Slightly warming the gauge will help dry the gauge Allow the gauge to dry overnight with the port vertically downward and uncapped Before re installing the gauge on the system be certain no solvent odor remains Follow the procedure below to return the controller to its factory default settings To reset VAC and ATM back to their origi
98. will reset the controller as if the power had been cycled The RST command has no response but resets the controller operation Communication is re enabled in two seconds Definition Identifies the selected units of pressure Modifiers Torr mbar Pascal Response None Other possible responses F P ERRJ The pressure unit is being set via the front panel Example From host computer RUA From 475 controller TORR See SU Set Unit of Pressure to change the display form unit of measure to another Definition Set baud rate Factory default is 19200 Modifiers 1200 2400 4800 9600 19200 38400 Response PROGM OKJ Example From host computer SB192004 From 475 controller PROGM OKJ The baud rate needs to be set at a valid rate i e 1200 2400 4800 9600 19200 38400 If the rate is set to an odd value for example 2234 the controller will stay at the present rate and respond with SYNTX ERR See Command Response Timing on page 59 The controller will continue to operate at the old baud rate setting until power is cycled or the RST command is sent Definition Get the serial number of the 475 Controller Modifiers None Response 475A1234J Example From host computer SNJ From 475 controller 475A1234 1 The serial number can be up to 16 characters long Leading zeros are trimmed Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A SPE SPN SPO ST SU Series 475
99. www idealvac com Series 475 Ideal qu cuum producis Granville Phillips Series 475 Convectron 2 lt 505 872 0037 Vacuum Measurement Controller _ RS UN BR D M o M RS D S GN RS Am BROOKS AUTOMATION Instruction Manual Instruction manual part number 475101 Revision A November 2009 Series 475 Granville Phillips Series 475 Convectron Vacuum Measurement Controller This Instruction Manual is for use with all Granville Phillips Series 475 Vacuum Measurement Controllers A list of applicable catalog numbers is provided on the following page O O a A ee D GN O 3 9m RS D GN ee Sl BROOKS AUTOMATION Customer Service Support For customer service 24 hours per day 7 days per week every day of the year including holidays toll free within the USA phone 1 800 367 4887 For customer service within the USA 8 AM to 5 PM Mountain Time Zone weekdays excluding holidays Toll free phone 1 800 776 6543 Phone 1 303 652 4400 e FAX 1 303 652 2844 Email co csr brooks com e World Wide Web www brooks com Instruction Manual 2009 Brooks Automation Inc All rights reserved Granville Phillip and Convectron are registered trademarks of Brooks Automation Inc All other trademarks and registered trademarks are the properties of their respective owners Granville Phillips Series 475 Convectron Vacuum Measurement Controller Catalog numbe
100. y seven days per week within the USA e Email co csr brooks com Series 475 Convectron Gauge Controller Instruction Manual 475101 Rev A 7 10 Specifications Table 7 2 Service and Maintenance Specifications for the Series 475 Convectron Controller and 275 Convectron Gauges Measurement Range for N Air 12 See notes 1 and 2 below Torr 1x10 4 to 1000 Torr mbar 1x10 to 1333 mbar pascal 1x10 to 133 3 kpa Resolution 1x10 4 Torr 1x10 4 mbar 1x10 Pascal Display Vacuum Fluorescent Update rate Every 0 5 sec Input power 3 12 to 24 Vdc 6 W continuous Inrush lt 1 4A for lt 7 msec see note 3 below Weight 720 gr 25 oz Operating environment 0 C to 40 C ambient non condensing indoor use only ordinary protection from moisture maximum altitude 3000 meters Operating conditions Suitable for continuous operation category 1 for insulation overvoltage pollution degree 2 Class 1 Non operating temperature 40 9C to 85 9C CE Compliance EMC EMC directive 2004 104 EC EN61326 1 Safety Low voltage directive EN61010 1 Environmental RoHS compliant Setpoint relays Optional 2 single pole double throw SPDT Limit overvoltage to 2 4kv Contact rating 5 A 250 VAC resistive load Range 1x1074 to 1000 Torr 0 1 to 1333 mbar 0 01 to 133 3 kPa Resolution 1 significant digit in the 10 4 range 2 signif

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