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SI-F80R Series

1. an p O1 Unit mm Head oe g1 LK H020 LK H022 LK H023 A EN a AES AT LK H025 LK H027 LK H028 CD o 55 500 a hs 312 E LASER ON STABILITY LED 15 n 22 8 97 12 7 13 max 13 5 max LASER ON STABILITY LED i 05 T 62 53 4 785 975 i 11 8 20 4 4 ee 2x04 4 8 i L Mounting hole 92 7 44 514 60 014 LK H022K LK H027K LK H050 LK H052 LK H053 LK H052K LK H057K LK H055 LK H057 LK H058 500 LASER ON STABILITY LED 10 1 max 13 4 7 7 7 max _ 24 2x04 4 Mounting hole Hi j 05 68 5 59 9 EA 4 4 P 92 12 2 fy L 9 68 7 7 max 3934 374 LK H080 LK H082 014 LK H150 LK H152 914 LK H085 LK H087 LK H155 LK H157 LASER ON STABILITY LED LASER ON STABILITY LED 4 H 82 2 7 7 max 24 2x 94 4 N 20 2 Mounting hole 2x 94 4 0 6 T m Mounting hole i 76 2 68 LT 4 2 salt T 1475 55 Z A 75 max 33 5 38 5 LK G5000 Series SE c ol c CD
2. Mounting bracket Display unit Panel thickness 1 2 to 4 0 Mounting screw LS D501 HEN 149 om Mounting B 124 5 bracket dimension o fo T Eg RA n 108 MEN 5 I 49 N c 163 E lt 173 min Panel cutout 159 min Scanning heads LS 3032 3034 3036 12 331 40 Distance is fixed for LS 3033SO 8073 Controllers LS 3100 LS 3100D R11 LS 3100 5000 Series Separate display controller x 9 al 1 LS 5001 zc hi 37 3 ie Ekterne 130 Lb AT IPA Cb AT JB E dini lo z pa ses HF TENE bracket baoak i jf 140 LJ 85 4 Y Ls e 5j i Approx 116 gt 80 99 Ie 170 gt Built in display controller LS 5501 ICE N i i T 41 k 148 230 Approx 80 LS 3060 4 94 5 through hole 98 spot facing d 4 5 30 34 on 180 5 4 34 3 85 5 mounting hole je gt lt gt lt gt 30 i 3 5 5 mounting hole Measuring area 7 y 98 5 L m 33 p i 60 8 100
3. Depth 2 8 173 145 145 l LJ V7000 Series Controller EtherNet IP unit CB EP100 Display output unit LJ VM100 Multi function controller LJ V7001 P 150 6 DIN rail mounting unit DIN rail mounting unit 2x M4 Depth 6 4x M4 Depth 6 NOANA 13 2 Head connection cable Head connection extension cable Console CB B3 CB B10 CB B5E CB B10E CB B20E OP 87504 41 51 97 6 55 gt 31 14 Cable length 18 e L 5 m 10 m 20 m z p 16 5 144 4 E 165 o CB B cable side Sensor head side Monitor Touch panel monitor CA MP120T 2474 45 Cable length 3 m Effective display 35 T 186 240 Effective display 0 115 360 6 49 5 55 5 Panel mounting Panel thickness
4. Oto 1 1 eis 2 000 Detection range 80 21 28 18 26 11000 4 0 05 to 1 1 25 Measurement range a i 8 3 92 0 Optical fiber SI F80RU 91 3 L 124 6 i i i 22 5 msn 47 i L 2 Np A 2 ey S 47 22 5 p twa 9 5xM4 5xM4 Depth 6 13 5 er Depth 6 Eo um co c 3 gt 1 o Unit mm 47 A co OO ep a d qB t qB Se Surface Scanning Laser Confocal Displacement Meter LT 9000 Series CE Features Precise 2 um diameter beam spot 0 3 um resolution Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www measurecentral com The surface scanning method allows measurements of all types of targets A tuning fork unit and oscillation unit are combined to create a surface scanning laser This results in advanced displacement and profile measurements that are unaffected by target colour or angle Z axis scanning X axis scanning Vertical Horizontal amorc A p The coaxial optical system improves Wide scanning enables various measurement performance measurements E EE n High angular Measurement of Profile Angular characteristics film thickness measurement measurement i Angle measurement An angle can be measured in increments of 0 01 degrees based on the measurement values of two or more points e gt obtained by scannin
5. Hardware environment for the LS H1W LS Navigator Extension cables Model LS H1W Model Cable length CPU Pentium IIl 400 MHz or higher Cable between the controller and measuring head Supported OS Windows 7 Windows Vista ANindows XP Professional Edition LS C3A 3m Home Edition Windows 2000 Professional LS C10A om Memory capacity 128 MB or more LS C30A 30m Display XGA 1024 x 768 pixels or greater 256 colours or greater gt Camera cable between the controller and measuring head Hard disk space 30 MB or more LS C3AM 3m Interface RS 232C Serial port LS C10AM 10m Windows is a registered trademark of Microsoft Corporation of America e Pentium is a registered trademark of Intel Corporation LS C30AM 30m 1 Home Premium Professional and Ultimate editions are supported 2 Ultimate Business Home Premium Home Basic editions are supported For Windows Vista Ver 1 6 and later versions are supported Cable between the receiver and transmitter OP 42182 1m AC power supply stand LS S11 SUDO F Model LS S11 Applicable controller LS 7001 LS 7601 Power supply voltage 100 to 240 VAC 10 50 60 Hz Current consumption 110 VA max Ambient temperature 0 to 40 C Relative humidity 35 to 85 No condensation Weight Approx 1 7 kg l Options AC power supply stand Air purge unit Air purge unit LS S11 OP 79428 OP 79429 For LS 7030 M For LS 7070 M a 0D ik T I I i Dimensions Measuring heads LS 7070 LS 7070M
6. c D D D Cable length 3 m 96 3 Cable length 500 52 5 Y i 135 3x 94 5 mounting hole 78 i Y Y 15 30 2 Reference distance 46 926 4 51 ae C Q 2D D CQ CD 3 CD c CCD Optical Micrometer LS 7000 Series CE Features High repeatability 0 06 um High speed 2400 samples second Maintenance free design Expert Engineering Sites A new site with answers to all of your difficult measurement application questions a www measurecentral com rr Speed accuracy and durability have been improved by advanced pis image sensor Telecentric optical system TIS GaN green LED optical technology using a high intensity Green LED a telecentric lens Beam splitter and the HL CCD in the receiver i a i Target Special diffusion HL CCD for unit IL measurement Collimator lens Receiver Transmitter Controller Principle diagram of the LS 7000 Series The green LED light is distributed as a uniform collimated beam and is 1 bin T processor m CPU applied to a target The edge between the bright and dark area on the as by CCD is detected and used to calculate a measured value such as an outer diameter N Excellent repeatability of 0 06 um 4 times better than conventional systems By using LED and CCD technologies repeatability is four times greater than with a conve
7. l Specifications Sensor head Model TM 006 TM 040 TM 065 Measuring range g6 mm g40 mm g65 mm Smallest detectable object 0 04 mm 0 3 mm 0 5 mm Transmitter receiver distance 60 mm 180 mm 270mm Light source GaN Green LED InGaN Green LED Measurement accuracy 0 5 um 2 um 3 um Repeatability 0 06 um 0 15 um 0 2 um Sampling cycle trigger interval 5 5ms 33ms at the initial setting Enclosure rating IP64 Environmental o resistance Ambient temperature 0 to 50 C Relative humidity 35 to 85 No condensation Material Aluminium Transmitter Approx 140g Approx 560g Approx 12809 Weight Receiver Approx 340g Approx 720g Approx 1460g Base Approx 220g Approx 630g Approx 1500g 1 In a measurement area of 2 mm x 94 mm error when measuring width of KEYENCE standard object glass calibration scale 2 Value of 26 measuring the width of KEYENCE standard object glass calibration scale in the centre of the measurement area an average 16 times average 1 3 mm line 3 In a measurement area of 10 mm x 926 mm error when measuring width of KEYENCE standard object glass calibration scale 4 Value of 26 measuring the width of KEYENCE standard object glass calibration scale in the centre of the measurement area an average 16 times average 8 mm line 5 Error when measuring width of KEYENCE standard object glass calibration scale in a measurement are
8. pet 257 80 i mms 7 23 32 23 39 a Z axis measurement range X axis measurement range Controller LJ G5001 P DIN rail mounting position 4 x M4 Depth 6 LLLI EL ULL IEEE es n na aS as Se ESKE sd SSS SS _ ESS SS SS SSE E let 1 TT 1 TE Ie 1 SSS OSEE Se 80 47 Cable between the sensor head and the controller LJ GC2 5 10 20 30 97 Cable length 2 m 5m 10m 914 Saas 9 f1 39 ze I TI Co c ON iq 3 iq Se Micro Head Spectral Interference Laser Displacement Meter SI F1000 Series CE Features Resolution of 0 001 um Micro head size of 92 mm Spectral interference method m man E Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www measurecentral com i Spectral interface method First in the Industry Development of a new principle can meet incompatible needs for small size with high accuracy that was previously impossible Se UT SLD Interference light Spectroscopic analysis RUE Sensor head Part of the broad wavelength The two reflected light beams interfere Splitting the interference light into Light source SLD Tea eae ee EU light emitted from the SLD with each other The intensity of different
9. CD 2 o p Pl Je eC Je 4 M4 screws 4 M4 screws Depth 6 Depth 6 Cable between the head and controller LK GC2 LK GC5 LK GC10 LK GC20 LK GC30 7 Cable length g14 33 2 m 5 m 10 m 20 m 30 m E F 55 Y 26 Display panel LK GD500 Panel cutout dimensions 62 Panel thickness m min g BS 0 5 t0 5 is Panel mounting ring 75 Pus 91 bn p 45 Tom au min 23 C cD CD N CCD Laser Displacement Sensors LK Series CE Features Linearity of 0 1 of F S Repeatability of 1 um 30 um diameter beam spot Ultra long measuring distance up to 750 mm Measurement unaffected by colour surface texture or stray light Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www measurecentral com Measurement of various target surfaces FrEYENLE Laser beam spot of 30 um diameter The LFTC circuit enables measurement of multicoloured or patterned targets Low reflectance targets such as black rubber can be measured without additional adjustment KEYENCE unique optical system minimizes lens aberration to give the LK 031 a minimum spot
10. Multi point 2D measurement Tilt correction for inline measurement gt P 62 High speed sampling of 5 5 ms 2 Sal18S 000 IN L A wide variety of measurement amp auxiliary tools Cutting edge sub pixel processing algorithm P 68 Simultaneous inspection of up to 99 features gt Revolutionary iPASS target position correction function s 00S9 INI Jldli9NItd PRINCIPLE HIGH SPEED WIDE RANGE LK G5000 Series Measurement Principle Triangulation type The semiconductor laser emits the laser beam to the target as shown below The light reflected off the target is focused by the ernostar lens and forms an image on the light receiving element The position of the beam spot on the receiving element varies with the distance to the target This variation is evaluated and converted into a measurement of target position At the reference distance Light receiving element Semiconductor Transmitter lens Light receiving element At a short distance Semiconductor Light receiving laser element Transmitter lens So Light receiving element At a long distance Light receiving element Semiconductor Transmitter lens 99 Light receiving element 2D Ernostar lens SI Series measurement principles Spectral Interference type Actual size SLD Part of the broad wavelength light emitted from t
11. p Active layer measurement of solar modules Position control of an air knife Measurements of glass board thickness warpage and parallelism I Lineup Sensor Head WIDE SPOT TYPE 50 10 mm LK H057 80 18 mm LK H087 150240 mm LK H157 8 0 5 mm 0 005 um LK H008 SOM 8 0 5 mm LK H008 W 16 122 8 mm LK H027K SPECULAR REFLECTION TYPE 46 3 5 2 mm LK H057K 76 7 17 6 mm 414 5 mm LK H087 amp LK F3 147 5 39 5 mm 424 4 mm LK H157 amp LK F2 Main controller Display All in one type Separate display type Additional head unit CC Link unit DeviceNet unit Touch panel display Compact display LK G5001 P V LK G5001 P LK HA100 LK CC100 CCuinx LK DN100 DeviceNet LK HD1001 LK HD500 Configuration Cable Neutral density filter Software Sensor head to Extension cable between Controller to display I O Cable and For LK H08x LK Navigator2 controller cable the head and cable connection cable Connector LK F3 LK H2 0 7 2 5 10 20 30 m 5 10 m 0 33 m OP 84427 OP 51657 For LK H15x CB Axx CB AxxE 3 m OP 51655 LK F2 10 m OP 51656 Ethernet cable OP 66843 11 N ep on C Cp iq iq o i Convenient calculation functions Instantly calculates values based on measurements obtained by more than one head enabling the user to easily set complicated calculations inside the controller that were conventionally done with PLC
12. 4 M2 5 effective depth 5 4 95 5 through hole 09 5 spot facing d 5 5 Measuring head 4 9 30 Front surface of a receiver 3 95 5 Mounting hole Front surface of a transmitter 104 20 Imt 15 5 3 95 5 mounting hole Cable length 260 Figures in parentheses are the values for the LS 7070M LS 7010 LS 7010M 4 94 5 through hole 98 spot facing 4 5 d 15 15 4 M4 through Measuring head p 36 Jos 16 0 2 Measurement position 227 Measuring area 51 4 8 E mi 3 4 Mounting hole EE ID Cable length 500 Cable length 500 Cable length 140 140 Figures in parentheses are the values for the LS 7010M Controllers LS 7601 191 LS 7001 LS 7000 Series Unit mm LS 7030 LS 7030M 4 94 5 through hole o4 28 spot facing 4 5 d 4 M4 effective depth 10 24 10 T 122 0 2 Measurement position 55 55 4 M2 5 effective depth 3 45 13 5 Front surface of a transmitter Front surface of a receiver 3 95 5 mounting hole Cable length 200 Cable length 500 Cable length 200 Figures in parentheses are the values for the LS 7030M Panel cutout 207 ra 169 4 g Moun
13. Lead outer dimension 1 Lead outer dimension 2 Threshold value Before threshold value adjustment _ ee 4 Gap between leads Threshold value After threshold value adjustment f Air purge unit Optional amp IP64 Rating i Controller compatible IP64 head OP 79428 for LS 7030 M m OP 79429 for LS 7070 M r Attaching the air purge unit in front of the measuring head and feeding an air flow prevents dirt or dust from accumulating on the head surface Air purge The head stores compensation unit data to ensure compatibility j with the controller This greatly improves measurement accuracy and head maintainability In addition the measuring Air duct head conforms to IP64 It is drip proof and suitable for harsh environments i Specifications Controller Type Model Appearance No of connectable measuring heads Measurement display LS 7000 Series High performance Standard LS 7601 LS 7001 me E 2 All types 2 LS 7070 LS 7030 LS 7010 only Main display 7 segment red LED Character height 20 3 mm Sub display 7 segment red LED Character height 9 9 mm x 3 TFT 5 5 inch LCD display Backlight CCFL Average life 40 000 hours Minimum display unit Display Display range Measurement position monitor 0 01 um to 100 um 7 level selectable 99 99999 to 9999 9 mm Linked to minimum display unit setting mm inches selectable Monitor imag
14. i o o Front suifass of receiver 55 55 6 Front surface of transmitter 4 3 95 5 mounting hole FR Measurement area fem 3 95 5 mounting hole 1 i 040 975 88 EE 88 65 5406 is T 5 5 20 47 29 90 58 5 6 5 180 8 Cable length 235 Cable length 500 Cable length 175 T9 2 8 cr When minimum bend R When minimum bend R 2 M4 effective depth 6 2 M4 effective depth 6 4 M4 effective depth 8 31 34 103 103 5 TM 3000 Series TM 065 4 5 5 cut 99 5 depth 5 5 4 M3 Depth 3 5 4 M3 Depth 3 5 P Measurement 4 M4 area 35 35 70 94 70 47 0 6 o o 12 Front surface of receiver 115 1 65 Front surface of transmitter Measurement area 129 7 FS 30 97 130 4 i 130 115 82 0 8 120 9 5 5 20 Pun 3 95 5 mounting hole Cable 3 95 5 mounting hole Cable length 500 length 175 160 L Cable length 420 115 8 7 9 5 270 66 las 19 When minimum bend R When minimum bend R 66 5 4 M5 Depth 10 2 M4 effective depth 6 2 M4 effective depth 6 47 53 176 131 5 LCD monitor 241 2 TM 3001
15. 11 3 to Measurement range 0 05 to 1 1 mm Resolution 0 001 um Linearity 0 2 um Head size 902 mm Measurement range 11 3 to 12 35 mm LL 12 35 mm j Head size ole mm Measurement Setting distance thickness 80 mm 0 05 to 1 1 mm a Resolution 0 01 um 1 Linearity 0 3 um e c Head size 08 mm D Setting distance 80 to 81 1 mm Measurable thickness 0 05 to 1 1 mm Resolution 0 001 um Linearity 0 2 um Head size 12 mm Sensor head Micro head type Long distance type Thickness measurement type Spectrum unit Optional unit Head mounting jig For SI F01 SI F01 SI F10 SI F80 SI F01U OP 84480 SI F10U SI F80U F c Pd fe at my One spectroscopic unit is needed for each sensor head Controller Single unit type Separate type Expansion controller Spectrum unit spacer SI F1001V SI F1001 SI FA100 OP 84474 Back surface Supplied together with the spectroscopic unit Display Cable Software Display panel Controller to sensor head unit Controller to spectrum unit Dedicated PC software SI Navigator SI FD500 connecting cable extension cable SI H1 CB A07 CB A2 CB A5 CB A10 CB A20 CB A30 CB A5E CB A10E Display to controller cord 0 33 m OP 84428 3 m OP 51655 10 m OP 51656 A Specifications Sensor head Type Micro head type Long distance type Thickness measurement type Mods Sensor head SI F01 S
16. 77 Extension cable Extension cable Cable between the head and controller Cable between the head and cable CB A07 CB A2 CB A5 CB A10 CB A20 CB A30 CB A5E CB A10E o7 97 g14 Cable length 5 m 10 m 914 Cable length 33 0 7 m 2 m 5 m 10 m 20 m 30 m 55 55 014 i Y i mer P E Controller LK G5001 P V LK G5001 P LK HA100 65 65 65 105 5 26 3 128 65 _ e 65 1055 DIN rail 8 g d DIN rai SII mountin B al m position M 8 g i ona 124 5 T fa 124 h l E eoo uli zn d JE D dn f o 6 i TET 6 M4 Depth
17. SEYENLE 3J9N3A4 3 ANDSOWLVS 1VH3N39 LNANAYNSVAN TERIS rf ae I dida CUR a High Precision Measurement General Catalogue LK G5000 Series LK G3000 Series LK Series LJ V7000 Series LJ G Series SI F1000 Series SI F80R Series LT 9000 Series LS 7000 Series LS 3100 5000 Series TM 3000 Series IM 6500 Series KEYENCE Measurement Technology Evolution KEYENCE Corporation has continuously developed measurement technology for over 30 years Each generation of measurement systems provided additional capabilities and significant improvements in inspection quality Surface scanning provides a new level ie of sta ility and flexibility Confocal System Revolutionary system enables new measurement capabilities for transparent materials LED PSD System Small sensor head and robust controller t i LASER PSD System CCD Optical Semiconductor laser enables Micrometer small sensor head and high Innovative CCD based system stability on shiny targets enables high repeatability and high speed development I aj E i s ITI Ultra High Speed Laser Completely original design device achieves world s fastest sampling rate 392kHZ 2D Micrometer Inline imaging system measures 2 dimensions in with sub micron precision Spectral Interferometry Original principle provides E3CMOS 2
18. Temperature fluctuation 8 Enclosure rating mbient light 0 02 of FS C F S 1 mm 0 01 of FS F S 20 mm IP67 0 01 of FS C FS 6 mm Incandescent lamp or fluorescent lamp 10000 lux max 0 01 of ES FS 2 36 mm 0 01 of ES FS 80 mm Incandescent lamp or fluorescent lamp 5000 lux max 0 to 509C 0 to 50 C 0 to 509C 5 A Ambient temperature R elative humidity 35 to 85 RH No condensation Environment resistanc Vibration resistance Approx 240 g Approx 230 g Approx 260 g Approx 280 g 10 to 55 Hz 1 5 mm double amplitude in X Y and Z directions Aluminium die cast 2 hours respectively Approx 300 g 1 Measurement range when the sampling cycle is 20 us or more 2 This value is obtained when the KEYENCE standard target White diffuse workpiece or workpiece with a metal mirror surface only for the LK H008 LK H008W is measured in the normal measurement mode 3 This value is obtained when the KEYENCE standard target White diffuse workpiece or workpiece with a metal mirror surface only for the LK H008 LK HO08W is measured at the reference distance with the number of averaging measurements set to 16384 The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 us 4 Use one of the following dark filters when measuring a transparent or mirror surface object L
19. 2013 KEYENCE CORPORATION All rights reserved MeasurementE WW GC2 GB 1024 2 600B48 Printed in Japan Il Ill Ill Ili 6 0 0 B 4 8 P
20. Compact Super Precision High Accuracy Multi purpose Long Distance High speed Long Distance Ultra Long Distance i Applications Small spot Model Wide beam Small spot Wide beam Small spot Wide beam Small spot Wide beam Small spot Wide beam Small spot Wide beam LK G152 LK G157 LK G402 Thickness measurement of a glass plate Laser Class Class II FDA Class 1 IEC Class II FDA Class 2 IEC gt dZ Measuring range of gt Measuring range 10 1 mm 25mm r 30 mm sr 35 mm e Measuring range 30 5 mm 65 mm 80 mm 95 mm Measuring range 80 15 mm 110 mm 150 mm 190 mm Measuring range 150 40 mm 300 mm 400 mm 500 mm NV z o pem Measuring range 400 100 mm 250 mm 500 mm 1000 mm i r Measuring range 500 250 500 mm LK G3000 Series i e oo c a CD 2 Height measurement of PCB resin Repeatability Spot diameter 920 um 20 x 500 um 930 um 0 05 um 30 x 850 um 970 um 0 2 um 70 x 1100 um 9120 um 0 5 um 120 x 1700 um 9290 um 2 um 290 x 8300 um 9300 um 2 um 300 x 9500 um 19 I Specifications Sensor heads Red semiconductor laser Wavelength 655 nm visible light Class II FDA CDRH Part 1040 10 N ep OD N iq iq o Light source La
21. Laser remote interlock input Non voltage input Encoder input NPN open collector output voltage output 5 V 12 V 24 V and line driver output all supported Trigger inputs Timing 1 2 input Auto zero1 2 input put AATE Reset 1 2 input i block Non voltage input Voltage input Start measurement stop input Start storage stop input Clear memory input Laser OFF input Programme switch input Non voltage input x 4 inputs Voltage input x 4 inputs Analogue voltage output 10 V x 2 outputs Output impedance 100 Q NPN open collector output x 12 outputs PNP open collector output x 12 outputs OUT comparator output Can freely assign 16 OUTs x 3 stage judgement results Can freely assign 16 OUTs x 3 stage judgement results Output Strobe output terminal block Disable trigger output NPN open collector output PNP open collector output Memory FULL output Ready output Error output NPN open collector output N C PNP open collector output N C Ethernet interface 1000BASE T 100BASE TX USB Interface USB 2 0 high speed compliant USB 1 1 Full SPEED compatible RS 232C interface Measurement data output and control I O Can select a baud rate of up to 115 200 bits s Rating Voltage Includes 24 VDC 10 ripple P P Maximum current consumption 1 3 A or less when connected to 1 head 1 9 A or less when connected to 2 heads Environmental Operating ambient temperature 0 to 50 C resistance Operating ambie
22. Microscope Field of view 1 3 mm x 1 05 mm m 2 5mm x2 0 mm function mmm Infrared LED Infrared LED JOVEN jeune ole wavelength 870 nm Pe wavelength 870 nm Ambient light Incandescent lamp fluorescent lamp 10000 lux max Ambient temperature 0 to 35 C No condensation Relative humidity 35 to 85 No condensation Weight Approx 400 g Approx 500 g 1 The value when the measurement target is a mirrored surface object measured in displacement mode scan width interval 120 um 2 um and 8 times average 2 Sampling cycle differs according to the manufacturing variation of individual measuring units The value when the FINE mode is set to OFF Cable between the sensor head and controller Extension cable Model LT C2 LT C10 Cable length 10m Weight Approx 200 g Approx 700 g Up to 3 cables can be connected with a total maximum length of 20 m LT 9000 Series i Dimensions Controllers Unit mm LT 9501H 9001H LT 9501HSO 5654 9001HSO 5655 67 220 Measuring units Extension cable LT 9011M 9011 Cable between the measuring unit and the controller a LT C2 LT C10 96 3 Cable length 500 x7 i 96 3 Cable length 2m i0m 5 94 Remote control console 3 x 04 5 37 Standard OP 51542 mounting hole 47 p 2 1 6 0 5 Reference distance 46 LT 9031M 9031 65 T
23. an item As an example it can measure targets moving at 6 4 m s with a pitch of 0 1 mm The LJ V7000 Series does not allow the passing of abnormal or defective areas 64 times the dynamic range of conventional devices Overwhelming workpiece response capabilities and detection stability Normally detection stability is inversely proportional to speed However the LJ V7000 Series has achieved the improvements in both speed and detection stability Shapes are accurately measured even in cases where black surfaces or inclines with low reflectivity and metallic surfaces with high reflectivity are mixed together under the same optical axis fl Applications Measuring loose bearing seals Bearings are rotated to detect loose seals and perform a variety of measurements High speed measurement is possible and in addition to bearings the completion time to inspect shapes for rotating objects is also greatly improved j Lineup Measuring welding grooves and bead shapes Welding grooves and bead shapes are measured Can be used on site without worry due to its strong IP67 structure shock resistance and high flex cable Measuring the swe steel sheets The shapes of continu on steel sheets that are flowing at high speeds are measured determine if the shapes of moulded Because it is possible to measure speeds are correct or not Various at speeds of up to 64 can perform high definition measur
24. in a different location or orientation which significantly reduces measurement time i Easy Setup for Difficult Applications Easy setup by checking the entire image of a target Even the initial setup is easy just specify points with the mouse while checking the entire image of a target You can easily complete the setup procedure for a wider range of measurements from outer diameter circular pitch and angle measurements to measurements using virtual lines or points Improved quality Cost efficiency E Eri i Eliminating Operator Errors High precision automatic measurement using the latest image processing technology Since the shape of a target is automatically recognised before measurement the result is not affected by individual differences such as alignment errors or variations in the skill level of equipment users The same results can be obtained consistently no matter who is taking the measurements i Easy Data Management Statistics analysis function for easy trend checking or reporting HILL All measurement results will be saved FEX p Tis automatically The included statistics and analysis function allows easy checking of the points for improvement and preparation of inspection records Of course measurement data can be imported to and used on spreadsheet software or exported in real time to a data server Shorter lead time Four Feature
25. 21 yi 43 d 200 50 167 216 50 85 12 4 M4 4 M4 12 6 o oo e ol co 1 Cu 1 o High speed 2D Measurement Sensor lt C2 ap Co iq iq Se TM 3000 Series CE Features Multi point 2D measurement Tilt correction for inline measurement High speed sampling of 5 5 ms Expert Engineering Sites A new site with answers to all of your difficult measurement application questions E m z i a wali www measurecentral com Because the system works in two Position correction function dimensions it can edge correction pattern correction Simultaneously measure dimensions that require both X and Y values Automatically corrects misalignments and tilt of the target which is directly In addition inspection time is reduced due to the elimination of motion linked to measurement errors Can measure accurately even when components positioning is difficult or objects are conveyed in random orientations m 0n 10 0007 per l L d I F 1 i Because the measurement area autotracks according to the position and tilt of objects within the compensation area it can be measured accu rately Area Example of measurement Master image Measured image Perpendicular TU Hole diameter PIER oue s SS Centre pitch Angle Interse
26. 6 114 LK CC100 LK DN100 26 3 26 3 13 2 105 5 26 3 128 13 2 26 3 3 o DIN rail e r DIN rail B mounting D mounting position position 124 124 om S quur S ou m S US 4 lg lg M4 Depth 6 3 2 13 5 113 5 3 2 m M4 Depth 6 14 LK HD1001 Touch Panel Display LK HD500 PANEL CUTOUT DIMENSIONS Panel thickness 237 nm ipm 92mm 170 9 Effective display area 6 r3 13 ring 7 752 us 167 5 display area Tenn 45 oa 51 LT Eee j Warning The LK G Series conforms to the following FDA and IEC standards Model LK H008 LK H022 H022K H027 H027K H052 H052K LK H020 H025 H050 H055 LK HOO8W LK H057 H057K H082 H087 H152 H157 LK H080 H085 H150 H155 FDA CDRH Part 1040 10 Class Il Laser Product Class Il Laser Product Class Illa Laser Product IEC60825 1 Class 1 Laser Product Class 2 Laser Product Class 3R Laser Product 17 ep C2 je a Sp CD CD N High Speed High Accuracy CCD Laser Displacement Sensor LK G3000 Series CE Features Sampling rate of 50 kHz Linearity of 0 05 of FS Repeatability down to 0 01 um E m Tl ot al i Tm Can measure diffuse specular transparent or translucent targets i Wide beam spot models are available Expert Engineering Sites A new sit
27. Binary output Binary output OUT1 to OUT8 measured data output 21 bits Binary output OUT1 to OUT8 measured data output 21 bits NPN open collector output PNP open collector output Strobe output NPN open collector output PNP open collector output AE For sensor head B NPN open collector output For sensor head B PNP open collector output Analogue RGB monitor output SVGA 800 x 600 pixels RS 232C interface Measured data output and control input output Maximum baud rate 115200 bps selectable USB interface In conformity with USB Revision 2 0 HI SPEED USB 1 1 Full SPEED compatible Ethernet interface 100BASE TX 10BASE T Memory card Compatible with NR M32 32 MB GR M256 256MB and NR M1G 1GB with FAT32 Sensor heads calculation Profile adjustment Filter Smoothing Averaging Position adjustment OUT name change Measurement mode selection Height position gap width centre position section area intersection angle profile comparison profile tracking Major functions Scaling Average Measurement Measured value alarm Tolerance setting Auto zero Storage data profile Memory card saving Program memory Trigger mode change Mutual interference prevention Measuring range change Calibration Laser light adjustment Sampling time setting Mask Profile alarm setting Inclination adjustment Height adjustment Display language switch Setting support software connection Trigger pitch Measuring time display etc er 24 VDC
28. CB BxxE and these cables should be kept to a total length of 30 m or less Approx 750 g Approx 400 g Approx 800 g Approx 1500 g 31 TT S 000ZA iq cD o I Dimensions Sensor head High accuracy specular reflection model LJ V7060K High accuracy model Depth 4 2 42 13 16 4x M3 Depth 3 5 18 5 54 6 ME 76 ee 176 E Measurement area Middle range model LJ V7080 4 x M3 Depth 3 5 80 l 25 FE I 23 32 23 Measurement a area L 39 LJ V7060 Depth 2 8 2x 04 4 42 Mounting hole 13 16 4xM3 Depth 3 5 z 30 Ee E 25 18 5 I 60 l 485 8 15 8 Measurement 15 area Depth 2 8 g 74 Mounting hole ri Long range model Ultra long range model LJ V7300 LJ V7200 42 13 16 4x M3 Depth 3 5 9 30 9 25 18 200 7 48 62 4 Measurement 48 aee 48 Depth 4 2 57 16 25 4x M3 Depth 3 5 IEEE Measurement area 75 t 1 3 x 04 4 Mounting hole 30 ss I oe bJ 110 300 145 180 145 240
29. LED The newly developed InGaN LED system provides consistent noise resistant illumination In addition because the system is LED based there are none of the optical hazards associated with lasers Diffusion unit Receiver Transmitter CMOS LED S99 000 A f 1 S8H38S J s 00089 X1 Sales 00069 1 ENDE 2 Li 1 e co D m CD o senes 000E NL sedes 000G 00LE S1 savas 000 S1 SaaS 0006 11 S8H8S Y084 1 SaHas 0069 IAI NOIIV9ITddV 1N4SSIIINS SUCCESSFUL APPLICATION Substrate thickness measurement of solar cells LK G5000 Series Height and difference HDD arm assembly adjustment LK G5000 Series 9 Width and outside diameter Drill outer diameter measurement TM 3000 Series Measurements of glass sheet thickness warpage and parallelism LK G5000 Series E Height and width measurement of rubber LJ G Series Roller outer diameter measurement LS 7000 Series Thickness measurement of transparent film LT 9000 Series Height control of dispenser LK G3000 Series Film width measurement LS 7000 Series L Swinging and vibration N and vibration Disk rotor warpage measurement Vibration evaluation of cellular phone Ultrasonic welder monitoring LK G5000 Series LK G5000 Serie
30. LK H008 is measured at the reference distance with the number of averaging measurements set to 16384 The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 us 4 When the ambient temperature rises to 40 C or more mount this on a metal plate before use Transparent mirror target measurement specular reflection type Model LK H008 LK HOO8W LK H022K LK H027K LK H052K LK H057K LK H082 LK H087 LK H152 LK H157 Mounting mode Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection 76 7 mm 147 5 mm Reference distance Measurement range 8 mm 0 5 mm Red semiconductor laser 17 6 mm to 14 5 mm 39 5 mm to 24 4 mm S Wavelength 655 nm 2 Laser IEC 60825 1 Class 1 Class 2 E class FDA CDRH Part 1040 10 Class II 0 3 mW 0 95 mW Spot diameter at reference distance g20um 20 umx550 um 925 um 25 umx1400 um 950 um 50 umx2000um 70um 70gmx2500um 120um 120 um x 4200 um Linearity 0 05 of ES FS 1 mm 0 02 of ES FS 6 mm 0 02 of ES FS 20 mm 0 02 of F S FS 36 mm 0 02 of FS FS 80 mm Repeatability 0 005 um 0 001 um 0 02 um 0 01 um 0 025 um 0 1 um 0 25 um Sampling cycle 2 99 5 10 20 50 100 200 500 1000 us 9 steps selectable
31. Mounting brackets Panel cut dimensions 1 6 to 4 0 Mounting screws 263 Mounting bracket ate dimensions 157 157 Specialised monitor stand OP 87262 33 xa rar ep N q 5 ime d qD de High Accuracy 2D Laser Displacement Sensor LJ G Series CE Features Linearity of 0 1 of F S High speed sampling of 3 8 ms Simultaneous measurement judgement of up to 8 features Stable measurement for all targets Expert Engineering Sites A new site with answers to all of your difficult measurement application questions wA cS x wali www measurecentral com 8 point simultaneous measurement judgment Bestin its class The LJ G Series provides 8 point simultaneous measurement in various Measurements measuring modes height width height difference angle profile cross s Peak height Bottom height section area etc Desired measuring points can be specified relative to a rofile waveform Furthermore the LJ G Series provides outputs of individual b P P Width Position Section area measured values and upper lower tolerance comparator outputs Average height Angle Intersection Profile comparison Measurement menus i Useful Adjustment Functi
32. O rings Model Appearance TM 3001 TM 3001P A flexible combination of 15 types of basic measurement modes and 8 types of auxiliary measurement modes can support a variety of inspections Outer diameter Step Width Measures a maximum diameter minimum diameter within the specified area and a step width between the detected edges Maximum diameter Minimum i diameter Width m em Height Position Coordinates Measures height position of detected edges and coordinates of specified points A Intersection point position X Y coordinates eee eee eb eee ee eee ee ee eee ee ee i Height Y direction re Position X direction Angle Measures an angle between two detected straight lines and a tilt angle from a virtual line ngle Tiltangle froma virtual line 4 Radius Roundness Measures radius and roundness of specified arc A Radius Em N Roundness Distance Intersection Point Distance Measures a centre of the circles and intersection point distance between 2 specified points distance from a point to a straight line Centre distance 1 EM dup t yw 4 Intersection point distance 4 Distance between a point and a straight line Pitch Measures a maximum minimum average pitch within the specified area o 7 7 c 1 Z 9 an eee Pitch 63 lt C2 je de iq nns iq c
33. capable d Sales 00069 1 sampling rate of 50 kHz Linearity of 0 05 of F S Repeatability down to 0 01 um gt P 8 Can measure diffuse specular transparent or translucent targets P Wide beam spot models are available Saas 000 9 1 Linearity of 0 1 of FS Repeatability of 1 um 30 um diameter beam spot D P DA Ultra long measuring distance up to 750 mm Measurement unaffected by colour surface texture or stray light Sal1ag y1 An emphasis on inline measurement The world s fastest at 64 000 profiles sec pe P 26 Blue laser optical system saHas 000 f 1 Linearity of 0 196 of FS High speed sampling of 3 8 ms P 34 Simultaneous measurement judgement of up to 8 features gt Stable measurement for all targets Resolution of 0 001 um Micro head size of 2 mm i pP 40 Spectral interference method ENDE i XU LEUR WES Resolution of 0 001 um Sampling speed of 5 kHz gt P A Working distance 80mm SELLERS Y084 I Precise 2 um diameter beam spot gt P 48 0 3 um resolution i SaaS 0006 11 I High repeatability 0 06 um I High speed 2400 samples second p F 52 S I Maintenance free design D Repeatability of 0 3 um Wide measuring range P 5 8 Touch screen controller gt I Up to four heads are connectable to one controller salas 0006 00L S1
34. centre of the stage at the operating temperature range of 23 1 0 C degrees at the focused focal point position 2 20 in the range of 9220 mm from the centre of the stage at the operating temperature range of 23 1 0 C degrees at the focused focal point position Measurement points 99 points max 99 x 9 points possible when the measurement setting binding function is used Pattern search Profile tracking function XYO with 360 rotary position compensation Registration of measurement configuration 1000 or more Distance measurement 8 types point point line point line line circle point circle line circle circle circle arc Basic measurement function Angle measurement Provided Calculation Provided Point Middle point intersection Conjunction edge Line conjunction circular conjunction Virtual line function x ENS Line 6 types midline perpendicular line parallel lines tangent line line passing through the point approximate line Circle Middle circle approximate circle auxiliary circle Pitch measurement Line circumference s Width measurement Edge width Application tool Thickness measurement Thickness measurement Gap measurement between inner and outer diameters Special tool Rounded corner curved surface oval reticle point position perimeter Shape tolerance Straightness circularity profile GD amp T Orientation tolerance Squareness parallelism Position tolerance Point position concentricity Point Point o
35. cyclic transmission and station to station cable length relaxation of CC Link Ver 2 00 LK DN100 DeviceNet unit Model LK DN100 Designation DeviceNet communication unit dedicated to LK G5000 Series Communication protocol DeviceNet compliant Master unit ODVA certified master unit Transmission speed 500 kbps 250 kbps 125 kbps Generic Miu Dedicated 5 cables 2 signal cables 2 power supply cables 1 shielding cable connection Maximum trunk line cable length Thick cable 500 m at transmission speed of 125 kbps 250 m at 250 kbps 125 m at 500 kbps Thin cable 100 m at all transmission speed settings Communication type I O communication Poll Explicit message communication Power supply Current consumption Environment Ambient temperature 11 VDC to 25 VDC 10 mA max when network power supply 24 V is applied When one or less head expansion unit is connected 0 to 50 C When two or more head expansion units are connected 0 to 40 C FERIE Relative humidity Rated voltage 35 to 85 RH No condensation 24 VDC 10 supplied from controller Current consumption Weight 1 DeviceNet is a registered trademark of ODVA Open DeviceNet Vendor Association LK G5000 Series Touch Panel Display 200 mA max Approx 300 g Model LK HD1001 Name LK G5000 Series Touch Panel Display Display elements TFT colour LCD Display panel ixels 640 x 480 1709 x 1282 Approx 50 000 hours Whi
36. diameter at reference distance Approx 0290 um 6402 Approx 0300 um 6502 0 05 of F S 250 um 5 250 to 250 mm high accuracy range 0 02 of F S 100 um Linearity 0 05 of F S F S 100 mm 250 to 50 mm long range 0 196 of F S 500 um 250 to 500 mm F S 250 mm Repeatability 2 um Sampling time 20 50 100 200 500 1000 us Selectable from 6 levels Near the centre of the measurement Green lights LED display Within the measurement area Orange lights Qutside the measurement area Orange flashing Temperature characteristics 0 01 of F S C F S 100 mm 0 01 of F S C F S 250 mm Enclosure rating IP67 IEC60529 Ambient light Incandescent lamp or fluorescent lamp 5000 lux max Ambient temperature 0 to 50 C Relative humidity 35 to 85 No condensation Vibrations resistance 10 to 55 Hz double amplitude 1 5 mm two hours in each direction of X Y and Z Material Aluminium die cast Weight including the cable Approx 380 g 1 The value is obtained by measuring KEYENCE s standard target ceramic lt LK G407 G402 gt When the sampling rate is 20 us the value becomes 70 mm NEAR side to 100 mm NEAR side for diffuse reflection When the sampling rate is 20 us the value becomes 70 mm NEAR side to 99 mm NEAR side for specular reflection lt LK G507 G502 gt When the sampling rate is 20 us the value becomes 230 mm NEAR side to 250 mm NEAR side for diffuse reflection When
37. diameter of 30 um This enables the surface contour of a target to be accurately measured f Lineup Type Compact high accuracy High precision Standard Model LK 011 LK 031 036 LK 081 086 Measurement mode Mirror surface Reference distance Repeatability Linearity Sampling cycle Type Model Measurement mode Reference distance Repeatability Linearity Sampling cycle 3m 30 C uoo c L 3o A o I ce 0 1 um 0 25 of FS 128 256 512 2 048 us High precision mode 450mm 350mm 250mm i i I I I I I I I I I I I I T 9 350 100 mm 10 um 35 30 25 mm mm mm IL l ER Ion dg I 1 1 pog d 95 mm 80 mm 65 mm 30 5 mm 80 15 mm 1 um 3 um 0 1 of FS 512 is 1 024 us Long distance LK 503 Long range mode 250 mm 750 mm 500 mm 500 250 mm 10 196 of F S 1 024 us fo 50 um i Specifications Compact ME Er Model Sensor head LK 011 LK 031 036 LK 081 086 Controller LK 3101 LK 2001 2011 LK 2101 2111 LK Series Long distance LK 503 LK 2503 Normal Measurement mode mirror surface m High precision mode Long range mode Reference distance 10 mm 7 0 mm 500 mm Measuring range 1 mm 0 9 mm 250 mm Light source Visible red semiconductor laser Output 0 95 mW Wavelength 670 nm 690 nm FDA CDRH Part 1040 10 Class II Laser Product Laser Class IEC 60825 1 Clas
38. distribution LT 9000 Series Measurement Principle Confocal type High accuracy measurement method uses the confocal principle and tuning fork The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork The beam reflected off the target surface is converged on a pinhole and then enters the light receiving element By measuring the exact position of the objective lens when the light enters the light receiving element the target height can be determined The sensor measures the distance to the target surface accurately without being affected by the material colour or angle of the target When the focal point is not on the target surface When the focal point is on the target surface Semiconductor n laser Light receiving Light receiving element element Pinhole The received light The received light i Tuning Tot intensity is low intensity is low I I I I l l V Yay oe N i d Sensor VERLE ELEELE EELEE ELEA FOEUIATT I EOE TTT A small amount of received light All of the received light passes passes through the pinhole through the pinhole LS 7000 Series Measurement Principle Thrubeam type Telecentric optical system The system allows only parallel light to form an image ensuring accurate measurement HL CCD This specifically designed CCD achieves high speed and
39. head 600 mA or less with 2 heads 0 to 50 C 35 to 85 No condensation Weight 1 LK G3001 P can be operated singly The measured value display and setting modifications can be performed on the display panel LK GD500 or via the setting support software LK H1W 2 The rating of the NPN open collector 50 mA max 40 V max residual voltage of 0 5 V max The rating of the PNP open collector 50 mA max 30 V max residual voltage of 0 5 V max 3 NPN model The rating of non voltage input 1 V or less ON voltage 0 6 mA or less OFF current PNP model The rating of voltage input 10 2 V or more ON voltage 26 4 V max 0 6 mA or less OFF current Hardware environment Approx 480 g LK G3001V G3001PV Approx 370 g LK G3001 G3001P Approx 60 g LK GD500 Item Hardware requirements CPU Pentium IIl 400 MHz or higher Windows 7 Windows Vista Supported OS Windows XP Windows 2000 Professional Memory capacity 64 Mbytes or more Display 800 x 600 pixels 256 colours or more Hard disk space 10 Mbytes or more Interface RS 232C serial port or USB2 0 1 1 must be installed 1 Home Premium Professional and Ultimate editions are supported 2 Ultimate Business Home Premium Home Basic editions are supported For Windows Vista Ver 1 5 and later versions are supported 3 Professional and Home edition are supported 4 Select one for communication Multiple interfaces cannot be used for communic
40. improved accuracy High intensity GaN green LED The light source features a gallium nitride GaN green LED that provides a short wavelength and reliable operation Collimator lens and special diffusion unit This optical unit distributes Green GaN LED light as a uniform collimated beam CMOS monitor camera Extremely compact CMOS camera captures an image of the target to aid alignment Improvement over the laser scanning method Light receiving element The green LED light is distributed as a uniform parallel beam and is applied to a target The edges between the bright and dark areas on the CCD detected and used to calculate a measurement value The conventional scanning method as shown in the figure on the left uses a high speed motor which limits the sensor s durability and stability The solid state LS 7000 Series solves this problem and ensures excellent durability MICRO HEAD J ULTRA HIGH ACCURACY Polygon mirror Motor target image on the receiver element does not W telecentric optical system W telecentric lens system ensures that the depend on target position Principle of measurement A collimated green LED beam is used to generate a shadow on the high precision CMOS receiver This shadow is then analysed to produce two dimensional measurements of distances angle etc Telecentric lens Collimator lens Mirror Target Lens High luminance InGaN green
41. light intensity E CMOS LJ G All ranges could be measured The exposure time is short so inclines could not be measured Reflectivity and light intensity in the Lu es width direction will change greatly depending on the shape colour material or sampling speed exposure time of the target All ranges could be measured Even though the exposure time is short all ranges could be measured without issue GP 64 Processor Achieves 64 kHz ultra high speed measurement Newly developed We have newly developed a custom IC that can perform ultra high speed pipeline processing that in addition to reading CMOS image capture data and performing high resolution subpixel processing also performs highprecision linearisation and data output This allows for the measurement of objects moving at high speeds with room to spare G Generating P Profiles M UMM Wil sine Ml FED E gt 22 avn sm Wl ZEND een UO Wl UUO UND T eS s rey REN sus dUEEE s cece beens LJ V7000 Series 74 types of measurement modes 16 point complete simultaneous measurement The industry s greatest variety With 13 types of measurement details and 7 types of measurement target specifications this single device can handle a total of 74 types of measurements This single device achieves the measurement of a wide variety of target and responds to customer demands without Missing a beat Types of measurements Types of measu
42. temperature 0 to 50 C Relative humidity 35 to 85 No condensation Transmitter Approx 540 g Transmitter Approx 540 g Transmitter Approx 420 g Transmitter Approx 420 g Transmitter Approx 140 g Transmitter Approx 140 g Weight Receiver Approx 770 g Receiver Approx 730 g Receiver Approx 570 g Receiver Approx 470 g Receiver Approx 380 g Receiver Approx 340 g Base Approx 660 g Base Approx 660 g Base Approx 430 g Base Approx 430 g Base Approx 220 g Base Approx 220 g 1 The error when a moving rod 20 mm in diameter is measured in the measuring area of 20 x 40 mm 2 The value of 26 when the outer diameter of a rod 20 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512 8 The error when a moving rod 10 mm in diameter is measured in the measuring area of 10 x 20 mm 4 The value of 20 when the outer diameter of a rod 10 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512 5 The error when a moving rod 1 0 mm in diameter is measured in the measuring area of 2 x 4 mm 6 The value of x26 when the outer diameter of a rod 1 0 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512 7 1200 samples sec when the mutual interference prevention function is used 8 The connector section is excluded
43. to OUT16 measured data output 21 bits Binary output OUT1 to OUT16 measured data output 21 bits NPN open collector output PNP open collector output Strobe output NPN open collector output PNP open collector output Trigger input enable output Analogue RGB monitor output RS 232C interface USB interface Ethernet interface Memory card SVGA 800 x 600 pixels Measured data output and control input output Maximum baud rate 115200 bps selectable In conformity with USB Revision 2 0 HI SPEED USB 1 1 Full SPEED compatible 1000BASE T 1000 BASE TX 10 BASE T SD card CA SD4G 4GB CA SD1G 1GB support Position correction function OUT name change function select measurement mode outer diameter height step height position width distance intersection distance angle radius roundness coordinates area search ring test pitch functions OUT function between operators auxiliary measurements straight edge circular edge the edge bounding line centre line intersection straight line between two points any line any point functions scaling function average function measurement function measurement value alarm setting function tolerance setting function auto zero LEJDE Rape function storage data image function memory card storage function program memory function trigger mode change function mutual interference prevention function adjustable measuring range function detection threshold value chan
44. value becomes 0 37 FAR side to 1 mm NEAR side LK G32 G37 When the sampling rate is 20 us the value becomes 1 8 FAR side to 5 mm NEAR side for diffuse reflection and 1 6 FAR side to 4 5 mm NEAR side for specular reflection LK G82 G87 When the sampling rate is 20 us the value becomes 9 NEAR side to 15 mm NEAR side for diffuse reflection and 8 7 NEAR side to 14 mm NEAR side for specular reflection LK G152 G157 When the sampling rate is 20 us the value becomes 22 NEAR side to 40 mm NEAR side for diffuse reflection and 22 NEAR side to 39 mm NEAR side for specular reflection 2 The value is obtained by measuring KEYENCE s standard target ceramic with the Standard mode 3 The value is obtained by measuring KEYENCE s standard SUS with 4096 times of averaging at the reference distance The value in parenthesis is the typical repeatability obtained by measuring the target with 16384 4 Consult your nearest KEYENCE representative for the Class llla type with increased repeatability Model LK G402 G407 LK G502 G507 Mounting mode Diffused reflection Specular reflection Diffused reflection Specular reflection Reference distance 398 mm 500 mm 497 5 mm Measuring range 99 mm 250 to 500 mm 249 to 498 mm Red semiconductor laser Wavelength 655 nm visible light Light source Class II FDA CDRH Part 1040 10 Class 2 IEC 60825 1 I Approx 290 x 8300 um 6407 Approx 300 x 9500 um 6507 Spot
45. wavelengths with the E is reflected by the head s the interference light with a specific spectroscope produces an optical Interference light Emitted fight l reference surface while the gt wavelength is determined according gt intensity distribution for a specific Rairaicerclenigicunciee Target part that passes the reference to the distance between the reference wavelength The distance to the ccp grating surface is mirror reflected on surface and the target The relative target is obtained by carrying out the target and returns into the maximum interference is reached when waveform analysis on the head the determined distance is an integral distribution Displacement data SLD Super Luminescent Diode multiple of the wavelength No heat generation and no noise Advantages of the optical fiber head structure The measurement head consists of only optical fibers and lenses with no electronic parts Small size light weight and heat resistant No heat generation Not influenced by electromagnetic noise These features greatly reduce the constraints on selecting an An exothermic body is one of the error causing The measurement head contains no electrical circuits installation area A micro head of this type can be used with factors in high accuracy measurement The Because of this it is not influenced by electromagnetic a wider range of measurement applications because it can be optical fiber head structure produces no heat
46. 10 Ripple 10 P to P or less Current consumption 800 mA or less with 1 sensor head 1 A or less with two sensor heads Environmental 0 to 50 C resistance 35 to 85 No condensation Weight Approx 1050 g 1 When LJ G015 or LJ G015K is connected only When other sensor heads are connected the minimum display unit is 1 pm 2 Time sharing output of judgment results or binary measured data The rating of the NPN open collector output 50 mA max 30 V max residual voltage of 1 V max The rating of the PNP open collector output 50 mA max 30 V max residual voltage of 1 V max The rating of the non voltage input 1 V or less ON voltage 0 6 mA or less OFF current Trigger input terminal 1 V or less ON voltage 1 0 mA or less OFF current The rating of the voltage input 26 4 V maximum rating 10 8 V or less ON voltage 0 6 mA or less OFF current Trigger input terminal 26 4 V maximum rating 10 8 V or less ON voltage 1 0 mA or less OFF current Hardware environment for the LJ H1W LJ Navigator Model LJ H1W CPU Pentium IIl 400 MHz or higher Windows 7 Windows Vista Windows XP Professional Edition Supported OS Home Edition Windows 2000 Professional Memory capacity 128 MB or more Display XGA 1024 x 768 pixels or greater 256 colours or greater Hard disk space 30 MB or more interlace Includes one of the following USB 2 0 1 1 Ethernet RS 232C Serial port e Windows is a registered trademark of Microsoft Corporation of A
47. 2 5939 6461 Fax 421 2 5939 6200 BELGIUM HONG KONG MALAYSIA SLOVENIA Phone 32 1 528 1222 Fax 32 1 520 1623 Phone 852 3104 1010 Fax 852 3104 1080 Phone 60 3 2092 2211 Fax 60 3 2092 2131 Phone 386 1 4701 666 Fax 386 1 4701 699 BRAZIL HUNGARY MEXICO SWITZERLAND Phone 55 11 3045 4011 Fax 55 11 3045 5219 Phone 36 1 802 73 60 Fax 36 1 802 73 61 Phone 52 81 8220 7900 Fax 52 81 8220 9097 Phone 41 43 45577 30 Fax 41 43 45577 40 CANADA INDIA NETHERLANDS TAIWAN Phone 1 905 366 7655 Fax 1 905 366 1122 Phone 91 44 4963 0900 Fax 91 44 4963 0901 Phone 31 40 20 66 100 Fax 31 40 20 66 112 Phone 886 2 2718 8700 Fax 886 2 2718 8711 CHINA INDONESIA POLAND THAILAND Phone 86 21 68757500 Fax 86 21 68757550 Phone 62 21 2939 8766 Fax 62 21 2939 8767 Phone 48 71 36861 60 Fax 48 71 36861 62 Phone 66 2 369 2777 Fax 66 2 369 2775 CZECH REPUBLIC ITALY ROMANIA UK amp IRELAND Phone 420 222 191 483 Fax 420 222 191 505 Phone 39 02 6688220 Fax 39 02 66825099 Phone 40 269 232 808 Fax 40 269 232 808 Phone 44 1908 696900 Fax 44 1908 696777 FRANCE JAPAN SINGAPORE USA Phone 33 1 56 37 78 00 Fax 33 1 56 37 78 01 Phone 81 6 6379 2211 Fax 81 6 6379 2131 Phone 65 6392 1011 Fax 65 6392 5055 Phone 1 201 930 0100 Fax 1 201 930 0099 WWh1 1014 The information in this publication is based on KEYENCE s internal research evaluation at the time of release and is subject to change without notice Copyright c
48. 5 mm range X axis 14 mm range X axis 15 mm range X axis 32 mm range X axis 62 mm range X axis 180 mm a Z axis 0 4 yum 4X Z axis 0 4 um a Z axis 0 5 um vi Z axis 1pm a Z axis 5 um Repeatabilit Repeatability Repeatability Repeatability Repeatability X axis 5um X axis 5 um X axis 10 um X axis 20 um X axis 60 um Monitor Cable connector Head connection extension cable Touch panel monitor extension cable OP 87258 3 m Controller Controller Touch panel monitor Display output unit CA MP120T Settings monitor USB cable software LJ H2 OP 66844 LJ H2 accessory OP 87504 LJ V7001 P Controller variation LJ VM100 NPN output type LJ V7001 PNP output type LJ V7001P Console Specialised EtherNet IP OP 87262 unit CB EP100 Head connection cable monitor stand CB B3 3 m CB B10 10 m CB B5E 5 m CB B10E 10 m CB B20E 20 m OP 87259 10 m Display monitor connection cable RS 232C cable D sub9 pin connector OP 66842 3 m 0P 87055 10 m OP 96368 2 5 m OP 26401 27 lt N Co da qp zd qp o Blue laser optical System Forms images of profiles with ultra stability and high accuracy World s first The LJ V7000 Series is the first 2D laser displacement sensor in the world to adopt a blue laser A sharp line beam is formed on the light receiving element by focusing a short wavelength 405 nm laser to its maximum li
49. 7035 2 per pack CB Axx OP 87033 1m OP 66842 3m for TM 040 0 7 2 5 10 20 30m OP 87034 3m OP 87036 2 per pack for TM 065 7 c Ethernet cable RS 2320 D sub9 pin conversion D sub25 pin conversion Memory card a OP 66843 3 m communication cable connector connector CA SD4G 4GB OP 96368 2 5m OP 26401 OP 96369 CA SD1G 1GB S E Ww 65 fj Dimensions Sensor heads Unit mm TM 006 S 000E WL iq iq o 4 94 5 through hole 28 spot facing 4 5 ES i TOT 36 ere RR 24 26 t l15 445 e 4 M4 through hole 25 25 ba 3 84 mounting hole 2 84 mounting hole 4 46 46 56 Cable length 500 Cable length 100 Cable length 190 6 25 2 M4 through hole Base 35 4 5 2 M4 through hole 2 M4 Effective depth 5 2 M4 Effective depth 5 16 TT 18 TM 040 4 MS3 effective depth 3 5 7 48 Measurement area 4 M3 effective depth 3 5 4 94 5 cut 25 25 N 8 depth 4 5 4 M4 48 62 T exec ed 50 415 3140 3
50. D Laser Newly developed high e nanometer level measurement in a sensitivity receiver enables highly mall sensor head design stable and accurate 2D measurement eiie es High speed 2D 3D Laser Scanner 64 000 profiles per second allow precision inspection of even the most difficult parts fy CCD Triangulation CCD based receiver element enables stable measurement on any material INDEX Laser Triangulation Spectral Interferometer LK G5000 Series Ultra High Speed High Accuracy Laser Displacement Sensor LK G3000 Series High Speed High Accuracy CCD Laser Displacement Sensor LK Series CCD Laser Displacement Sensors LJ V7000 Series High speed 2D 3D Laser Scanner LJ G Series SI F1000 Series High Accuracy 2D Laser Displacement Sensor Micro Head Spectral Interference Laser Displacement Meter SI F80R Series Spectral Interference Wafer Thickness Meter Confocal laser Optical Micrometer LT 9000 Series LS 7000 Series Surface Scanning Laser Confocal Displacement Meter CCD Optical Micrometer LS 3100 5000 Series Laser Scan Micrometers TM 3000 Series High speed 2D Measurement Sensor Optical Measurement System IM 6500 Series Image Dimension Measurement System Fastest in the World 392 kHz Best linearity in its Class 0 02 of F S gt pP O Connect up to 12 sensor heads network
51. Diffuse reflective Reference distance 15 mm 30 mm 80 mm 200 mm Z axis Height 2 3 mm 2 6 mm 10 mm 23 mm 48 mm Measuring Near 6 5 mm 20 mm 25 mm 91 mm range E Reference distance 7 0 mm 22 mm 32 mm 62 mm Far 7 5 mm 25 mm 39 mm 73 mm Red semiconductor laser i Wavelength 655 nm Visible light Light source Laser Class Class II Laser Product FDA CDRH PART1040 10 Class 2 Laser Product IEC 60825 1 Output 0 95 mW Spot diameter at reference distance Approx 32 um x 12 mm Approx 180 um x 70 mm Repeatability ERE CUOI 0 2 um 1 um 1 um 2 um X axis Width 2 5 um 5 um 10 um 20 um Linearity Z axis Height 0 1 of FS Sampling frequency Trigger interval 4 3 8 ms Temperature characteristics 0 02 of F S C Enclosure rating IP67 IEC60529 Ambient light Incandescent lamp or fluorescent lamp 5000 lux max Environmental resistance Ambient temperature 0 to 50 C Relative humidity 35 to 85 No condensation Vibration 10 to 55 Hz double amplitude 1 5 mm two hours in each direction of X Y and Z Material Aluminium Weight Approx 260 g Approx 290 g Approx 350 g Approx 480 g 1 The value obtained after 64 times averaging at the reference distance 2 The target is KEYENCE standard object White diffusing material The value is the average of the widths in the Height mode 3 The target is 910 mm pin gauge The value is the edge in the Position mode after 16 times of the Smoothing 4 With initial setting minimum
52. I F10 SI F80 ode Spectrum unit SI F01U SI F10U SI F80U 0 05 to 1 1 mm Possible detection distance 80 to 81 1 mm Mant eoue Infrared SLD Central wavelength 820 nm Output 0 6 mW g Class 1 Laser product IEC60825 1 FDA CDRH Part 1040 10 Linearity 0 2 um 4 0 3 um 4 0 2 um Se I ER C C C iq mi iq n Measurement range 0 05 to 1 1 mm 11 3 to 12 35 mm Resolution 0 001 um 0 01 um 0 001 um 7 Sampling cycle 200 us Red semiconductor laser Wavelength 650 nm Output 0 1 mW Class 1 Laser product IEC60825 1 FDA CDRH Part 1040 10 Target near centre of measurement range green lights Light source for guide LED display Target within measurement range orange lights Target outside measurement range Flashes orange Temperature r o Aau Spectrum unit 0 01 of F S C Enclosure rating Sensor head IP67 IP64 IP64 Ambient light Incandescent lamp or fluorescent lamp 10000 lux max Ambient Sensor head 0 to 85 C 0 to 40 C 0 to 50 C Environment temperature Spectrum unit 0 to 35 C resistance Relative Sensor head 35 to 85 RH No condensation humidity Spectrum unit 35 to 80 RH No condensation Vibrati Sensor head 10 to 55 Hz 1 5 mm double amplitude in X Y and Z directions 2 hours respectively ibration Spectrum unit 10 to 55 Hz 0 5 mm double amplitude in X Y and Z directions 2 hours respectively i Sensor head SUS Material Spec
53. K H082 LK H087 LK F3 LK H152 LK H157 LK F2 5 When the ambient temperature rises to 40 C or more mount this on a metal plate before use 6 Value measured at the event of diffuse reflection installation Please contact us for the case of regular reflection installation LK CC100 CC Link unit LK G5000 Series aS D ol a co 17 1 mn Model LK CC100 Designation CC Link communication unit dedicated to LK G5000 Series Ver 1 10 Extended cyclic setting Single Ver 2 00 Extended cyclic setting Double or more CLPA certified master unit CC Link Ver 2 00 Ver 1 10 1 to 4 Sea l Communication speed 156 kbps 625 kbps 2 5 Mbps 5 Mbps 10 Mbps Connection cable Dedicated CC Link cable supporting Ver 1 10 Shielded 3 core twisted pair cable OP 79426 OP 79427 Maximum total cable extension length 156 kbps 1200 m 625 kbps 900 m 2 5 Mbps 400 m 5 Mbps 160 m 10 Mbps 100 m Station type Ambient temperature Relative humidity Rated voltage Environment resistance Remote device station When one or less head expansion unit is connected 0 to 50 C When two or more head expansion units are connected 0 to 40 C 35 to 85 RH No condensation 24 VDC 10 supplied from controller Current consumption 200 mA max Weight 1 CC Link is a registered trademark of Mitsubishi Electric Corporation Approx 300 g 2 The LK G5000 Series supports the extended
54. P CA MP81 s 1 0 to 4 0 Outer dimension of mounting bracket Panel thickness 15 135 5 230 ls 151 i Mounting bracket d T Mounting screw DIN rail mounting 191 2 position Outer 180 dimension of m mounting display area bracket P SE Di 7 H 156 gt 172 4 gt 6 34 Effective display area Stand OP 42278 B oe 7 7 c 1 Z 9 an 67 C on Co CD m CD c Image Dimension Measurement System IM 6500 Series CE 99 features are measured in seconds cE Just place a target Expert Engineering Sites A new site with answers to all of your difficult measurement application questions o www measurecentral com th E Drastically Reduced Measurement Time Just place and press 99 features are measured in seconds Just place a target and press the button Ninety nine points are measured in seconds The system automatically finds and measures targets even when they are placed
55. Y and Z directions 2 hours respectively Vibration Spectrum unit Material Spectrum unit Sensor head including cable Weight Spectrum unit The sensor head and spectrum unit are calibrated as a pair They are not interchangeable 1 Indicates the thickness measurement range when the refractive index is 3 5 The thickness measurement range is 35 to 1100 um when the refractive index is 1 2 Indicates the minimum beam spot diameter within the measurement range 10 to 55 Hz 0 5 mm double amplitude in X Y and Z directions 2 hours respectively SUS Polycarbonate Approx 70 g Approx 1 2 kg 3 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256 converted to a refractive index of 3 5 4 This value is obtained by measuring a 0 3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4096 5 The laser classification for FDA CDRH is implemented based on IEC60825 1 in accordance with the requirements of Laser Notice No 50 j Dimensions SI F80R
56. YENCE s standard target Zirconia block gauge LK 031 036 LK 081 086 LK 011 White ceramic block gauge LK 503 8 When measurement is impossible 12 V 31 2 mA is output 4 The LK 503 can both be used in High precision mode or Long range mode f Dimensions Controllers en LK 3101 2001 2011 2101 2111 2503 4 76 hg E oo aa Extension cable Optional 3 Cable length Model 2m LK C2 5m LK C5 10m LK C10 Sensor head LK 011 LK 503 250109750 250 to 450 1 Measurement reference or gt position Data in applies to at high precision mode 97 Cable length 500 43 15 13 8 24 5 25 High speed 2D 3D Laser Scanner rer lt JJ O O N q 5 mi qB o NEW LJ V7000 Series CE Features An emphasis on inline measurement The world s fastest at 64 000 profiles sec Blue laser optical system Expert Engineering Sites A new site with answers to all of your difficult measurement application questions www measurecentral com 240 times greater than conventional devices 64 000 profiles sec sampling 12 800 000 points sec World s fastest The LJ V7000 Series has achieved the world s fastest sampling speed Other devices within the 2D laser measuring device market cannot even come close It can measure the shapes of products running on a line or through equipment at ultra high speeds with high resolution and without missing
57. a of 20 mm x 940 mm 6 Value of 26 measuring the width of KEYENCE standard object glass calibration scale in the centre of the measurement area an average 16 times average 14 mm line 7 When measurement area is minimum others are initial settings 8 Apart from connector component Controller Model TM 3001 TM 3001P Sensor head compatibility Compatible Number of connectable sensors 2 units max Disp Minimum display unit 0 01 um 0 001 mm 0 01 ispla di Maximum display range 9999 99 mm 99999 9 mm 99999 9 Laser remote interlock input Non voltage input Input Trigger input for Head A terminal Timing 1 input Non voltage input block Voltage input Auto zero 1 input Reset input Analogue voltage output 10 V x 2 outputs out put impedance 100 Q Total judgment output NPN open collector output PNP open collector output Mad Error output NPN open collector output N C PNP open collector output N C ermina block Process output Trigger input enable output NPN open collector output PNP open collector output Adjusted error output Trigger input for Head A Timing 2 input Non voltage input Voltage input Auto zero 2 input Program switching input Non voltage input 4 inputs Voltage input 4 inputs Expansion Memory card save input Non voltage input Voltage input connector 3 level judgment output OUT1 to OUT16 total judgment output 3 level judgment output OUT1 to OUT16 total judgment output Judgment Binary output Binary output OUT1
58. alogue output 10 V x 2 outputs output impedance 100 Q UNS Timing input Reset input Auto zero input Non voltage input Monitor dedicated power supply 24 VDC 1A 3 step limits output For OUT1 and OUT2 and NPN open collector output Measured data output 21 bits OUT1 OUT2 PROFILE selectable Binary output NPN open collector output Binary mode Strobe output NPN open collector output Control 1 0 Binary selection output NPN open collector output Binary selection input Non voltage input Stability output NPN open collector output Laser remote input Non voltage input Non voltage input x 3 inputs RS 232C interface Measured data output and control 1 0 Selectable up to baud rate 115200 bps Video output NTSC compliant PIN connector Distance measurement Transparent object thickness measurement Angle measurement Relative angle measurement i measurement Surface selection Dark out Mask Trend graph Surface selection UE m display and Scan display and Scan width interval change Main Area selection Average Maximum Minimum Maximum to function Profile mode 4 minimum Area Area calculation Scan width interval change B Dark out Smoothing Averaging and Profile data output Light intensity accumulation Microscope LT 9501H LT 9501H 0 5654 only Tolerance Common judgment 8 program registration Calibration Averaging Hold modes Auto zero and interface language selection Distance measurement Transpare
59. ance r e AJ i c D D o Measuring range 0 5 to 65 mm 0 3 to 30 mm 0 04 to 6 mm Measurement accuracy 3 um 2 um 0 5 um Repeatability 0 2 um 0 15 um 0 06 um Controller Type High performance Standard Model LS 7601 LS 7001 Appearance Measurement indicator Monitor display Red LED 7 level display 53 C Q Co iq cD Se i Function Dual head mode Newly developed One head simultaneous measurement Measuring the outer diameter of a metal pipe Measuring both the outer diameter and eccentricity of a This simple special mode measures large diameter targets or wide sheet copy roller simultaneously materials Complicated calculations or other settings are unnecessary One measuring head allows simultaneous measurement using two measurement modes such as measuring the outer diameter and eccentricity Measuring area designation Transparent object measurement Measuring IC lead pitch Checking the width or edge position of a glass plate The measuring area can be designated according to the inspection Even transparent objects that were difficult to detect with conventional purpose such as measurement of the IC lead gap or pitch micrometers can be measured The edge detection level can be easily changed via the controller u i Change in received light intensity caused by the edge of a glass Measuring EH object oo RER i 30 mm
60. and control 1 0 printer Baud rate can be selected up to 115 200 bps Conforming to the NTSC system RCA connector 24 VDC 10 1 2 A max 0 7 A max IP64 Panel surface only 0 to 40 C 35 to 85 No condensation Approx 1010 g Approx 820 g 2 AC power supply can be used when the LS S11 AC power supply stand is connected The rating of the NPN open collector inside the terminal block is 100 mA max 40 V max with a residual voltage of 0 5 V max The rating of the NPN open collector inside the connector 1 0 is 30 mA max 30 V max with a residual volt age of 0 5 V max The rating of non voltage input is ON voltage of 1 V max OFF current of 0 6 mA max r P e i i c D D o 55 l Specifications Measuring head Type Large diameter type Wide measurement range Super fine measurement Monitor camera Provided Not provided Provided Not provided Provided Not provided Model LS 7070M LS 7070 LS 7030M LS 7030 LS 7010M LS 7010 Appearance i C Q D de iq cD o Measuring range 0 5 to 65 mm 0 3 to 30 mm 0 04 to 6 mm Smallest detectable object 0 5 mm 0 3 mm 0 04 mm Transmitter receiver distance 250 50 mm 160 40 mm 60 mm Light source GaN green LED CCD scanning range Approx 69 mm Approx 33 mm Approx 7 mm Measurement accuracy 3 um 2 um 0 5 um Repeatability 0 2 um 0 15 um 0 06 um No of samples 2 400 samples sec Enclosure rating IP64 Ambient
61. ation at the same time 5 Operations are not guaranteed when connected through a USB hub Use under an environment that exceeds the recommended environment of the your OS Windows is a registered trademark of Microsoft Corporation of America Pentium is a registered trademark of Intel Corporation Extension cable Cable between the head and controller Model LK GC2 LK GC5 LK GC10 LK GC20 LK GC30 Cable length 2m 5m 10m 20m 30m Weight Approx 200 g Approx 1400 g Approx 2000 g Approx 750 g Approx 400 g Extension cable Cable for display panel Model OP 51654 OP 51655 OP 51656 21 m i e oo c a CD 2 5918 000 9 X Dimensions Sensor heads LK G10 G15 Mounting hole LK G82 G87 Diffused reflection type mounting 2 04 5 Mounting hole 06 5 25 65 to 95 SMAI 13 5 LK G402 G407 G502 G507 Data in applies to LK G407 G402 Diffused reflection type mounting 108 1 mounting hole 250 to 1000 300 to 500 LK G32 G37 Diffused reflection type mounting 85 Mounting hole LK G152 G157 Diffused reflection type mounting 2 04 4 Mounting hole 110 to 190 Unit mm 91 Q D LK G3000 Series Controllers LK G3001V LK G3001PV LK G3001 LK G3001P m i e oo c a
62. ction Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection 8mm 20 mm 20 mm 50 mm 50 mm 80 mm 80 mm 150 mm 150 mm Reference distance 240 mm Measurement range Red semiconductor laser z Wavelength 655 nm Laser EC 60825 1 Class 1 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 Class 3R Class 2 E class FDA CDRH Part 1040 10 Class II Class Illa Class II Class Illa Class II Class Illa Class Il Class Illa Class II 095mW 4 8 mW 0 95 mW 70 um x 2500 um 120 um x 4200 um Spot diameter at reference distance 20 um x 550 um 25 um x 1400 um 50 um x 2000 um 0 05 of F S 0 02 of FS 0 02 of F S 0 02 of F S 0 02 of F S y F S 1 mm F S 6 mm F S 20 mm F S 36 mm F S 80 mm Repeatability 0 005 um 0 001 um 0 02 um 0 01 um 0 025 um 0 1 um 0 25 um Sampling cycle 2 55 5 10 20 50 100 200 500 1000 ys 9 steps selectable 7 EE 0 02 of F S C 0 01 of F S C 0 01 of FS C 0 01 of FS C 0 01 of FS C Meta Uea F S 1 mm FS 6 mm FS 20 mm F S 36 mm F S 80 mm Enclosure rating IP67 S Incandescent lamp PA Incandescent lamp or fluorescent lamp 10000 lux max or fluorescent lamp 5000 lux max EA 0 to 50 C 0 to 50 C 0 to 50 C s Relative humidity 35 to 85 RH No condensation E Vibration resistance 10 to 55 Hz 1 5 mm double amplitude in X Y and Z directions 2 hours respectively Aluminium die cas
63. ction point coordinates b Intersection point Position correction area Radi i adius Outer diameter Outer ag s Width Position measurement diameter E Angle correction area area lal j Y i i area after V D coordinates E JM JEU I m E m Perpendicular distance orrection js Radius Centre pitch B eee EL 4 Area a S i Applications Overall length 50 000 Outer diameter 5 000 Tip angle 45 0 Outer diameter 16 000 Measures outer diameter tip angle of needle valves Maximum diameter 8 000 Minimum diameter 6 000 Outer diameter 12 000 Measures maximum diameter minimum diameter of ampules i Lineup Sensor head Type Model g6 mm type TM 006 940 mm type TM 040 g65 mm type TM 065 I Features Diverse measurement modes Overall length oae ub ouem ae V groove angle 22 5 Groove pitch 5 000 Measures pulley groove pitches V groove angles Outer thread height 14 000 Neck ring height Guter 26 000 thread diameter 26 500 Measures outer diameter and threading a PET bottle Controller Appearance Type Standard type PNP Output type TM 3000 Series Unit mm Point angle 15 0 Outer diameter Outer diameter Outer diameter 0 300 0 299 0 148 Measures multi point outer diameter point angle of injection needles Thickness 3 500 Roundness 0 020 Measures roundness thickness of
64. e When the measuring head with the monitor function is connected 7 level display with a red LED Tolerance check output display Alarm output 5 level comparator output Comparator ready output 5 level LCD indicator Green LED GO Red LED x 2 HI LO NPN open collector output N C NPN open collector output for OUT1 5 Strobe output Synchronous input E Reset input Non voltage input for OUT1 E Auto zero input Program selection input Non voltage input x 4 inputs Statistical processing input Non voltage input for OUT1 Analogue output 10 V x 2 outputs 5 level comparator output Comparator ready output NPN open collector output for OUT2 up Strobe output Statistical processing output NPN open collector output x 2 outputs e Function output Selectable from focus area check and difference check NPN open collector output x 2 outputs 8 BCD output Measurement data output Sign 7 digits OUT1 OUT2 selectable NPN open collector output ae BCD selection output NPN open collector output BCD selection input Non voltage input Synchronous input Reset input Auto zero input Non voltage input for OUT2 Statistical processing input RS 232C interface Video output Power supply voltage Current consumption Enclosure rating Ambient temperature Relative humidity Weight 1 Either SUB mode or BCD mode can be selected Non voltage input for OUT2 Measurement data output
65. e constantly monitored inside equipment while polishing e The sensor can easily make measurements just by being positioned 80 mm from wafers e Non contact So wafers are not damaged e The sensor can directly measure just wafer thickness so measurements are not influenced by BG tape thickness i Lineup Components Sensor head Wafer thickness measurement type SI F80R I Specifications Spectrum unit SI F80RU SI F80R Series External device IR sensor card Type Wafer thickness measurement type Measurement range 10 to 310 um when n 3 5 Possible detection distance 80 to 81 1 mm Light source Infrared SLD Output 0 6 mW Class 1 Laser Product IEC60825 1 FDA CDRH Part 1040 10 Beam spot diameter 925 um Linearity 0 1 um when n 3 5 Resolution 4 1nm Sampling cycle 200 us Target near centre of measurement range green lights Target within measurement range orange lights esti Target outside measurement range flashes orange Temperature 0 o fluetustion Spectrum unit 0 01 of F S C Enclosure rating Sensor head IP64 Ambient light Incandescent lamp or fluorescent lamp 10000 lux max Sensor head 0 to 50 C Ambient temperature Spectrum unit 0 to 35 C Environment resistance Sensor head Relative humidity Spectrum unit 35 to 85 RH No condensation 35 to 85 RH No condensation Sensor head 10 to 55 Hz 1 5 mm double amplitude in X
66. e with answers to all of your difficult measurement application questions www measurecentral com The newly developed algorithms support various applications RPD ALGORITHM Laser light tends to react differently with translucent targets generating diffused reflections which result in gradual broadening of the received light waveform The RPD algorithm cancels the influence of the broadened waveform and detects the true peak Real Peak RPD Real Peak Detect MULTI ABLE CONTROL The reflected light at each layer is sensed to optimize the intensity of laser light Highly accurate thickness measurements are enabled by optimizing the optical setting for each layer MRC ALGORITHM When two or more peaks are generated by multiple reflections the algorithm compares the waveforms to the most recent received light waveform and determines the one with the most similarity to the correct waveform MRC Multiple Reflection Cancel Light from subduction Light from subduction Translucent object Waveform obtained by optimizing the 1st surface using ABLE Waveform synthesized by the multi ABLE function Waveform obtained by optimizing the 2nd The 1st surface using ABLE GI The 2nd Saturation ass surface level Normal reflection Light from multiple reflections i VUE L 1 g 1 AJ Multiple reflections Detecting the runout of a HDD i Lineup Type
67. ement at fine LJ V7000 Series Hi iling of Measuring the shapes of projections and depressions on extrusion moulded products Measurement is performed to ous swelling parts that are extruded at high gt WM 5 i 5 7 KHz you targets can be supported including rubber metal ceramics concrete pitches and food products Ultra long range Middle range High accuracy ENN ZLINENN LJ V7080 Long range High accuracy specular reflection mm mm mm mm mm 450 450 450 450 450 400 400 400 400 400 d 350 350 350 350 350 B 300 300 300 300 300 E 34 15 MN i Width 110 mm 250 250 250 250 s 250 200 200 200 200 d 200 ES E B 150 150 150 i 150 _ 150 Tir ae B B Width 180 mm 100 100 100 100 100 ih Width 51 mm 50 50 i Tee t d 0 50 SET 5 Width 25 mm 200mm Se Width 62 mm 47 mm i 52 mm i Width 32 mm o 546 zm Em i jo E um ee ae i I 622mm 77 Width 8 mm Toomm Nea Width 15 mm ON eem Width 39 mm D Width 73 mm mm ae Width 240 mm i Measurement range i Measurement range i Measurement range i Measuremen range Measuremen 54 6 7 6 mm 60 8 mm 80x23 mm 200 48 mm 300 145 mm Measurement Z axis 54 6 7 6 mm Measurement Z axis 6028 mm Measurement Z axis 80223 mm Measurement Z axis 200248 mm Measurement Z axis 300214
68. ets are placed randomly it is unnecessary to align them in a jig because the location and orientation of each target is automatically adjusted before measurement This further reduces measurement time Even targets placed randomly are measured simultaneously Clicking each target shows its measurement result SIGNIFICANT TIME REDUCTION E Example When 5 or more minutes are required to measure 10 points with an optical comparator In addition to the inspection time the standby i time during product changeover is also reduced Projector oaii 5 minutes or more This helps improve the facility utilization ratio and a reduce costs IM Series 5 seconds or less No need for positioning focus adjustment and stage movement I 69 c c gt N D CD o C C c ON iq iq n Sub pixel processing for measurement down to one hundredth or less of one pixel Best in its class Latest technologies to eliminate operator ae One pixel of the light variation receiving element One pixel of the light receiving element is divided into 100 or i more squares and used as a unit for shape recognition This neni allows high resolution measurement in a wider field of view E The optical system is also taken into consideration to improve 100 or more Without sub pixel processing With sub pixel pr
69. g the laser beam spot N Y ul aL gt ib 4 Profile measurement The surface profile can be traced accurately using the oscillation unit PRGO UP LIMIT LO LIMIT POSITION The surface profile can be traced using the double scanning method The height difference between the two points can be measured i Transparent object thickness measurement The surface condition and thickness of transparent objects can be measured stably by utilizing the confocal principle The first surface The second surface The third surface The thickness of transparent Multi surface measurement function disks can be measured In addition the slant correction function enables more reliable measurements NEW The first surface The second surface The third surface The fourth surface The peak value of light intensity of up to four target surfaces can be detected with one measurement unit The selected measurement surface can be measured with high accuracy LT 9000 Series fl Applications PRGO UP LIMIT The first surface The second I POSITION surface F The third a E surface LO LIMIT Measuring the thickness of an optical disc The intermediate layer of an optical disc can be measured Measuring the profile of solder paste on a PWB The profile of lead free solder can be measured for detecting abnormalities such as cracks bridges and insufficient so
70. ge function mask function attitude correction function display language switching function support software setting function trigger interval measurement time display function others Rati Power supply voltage 24 VDC 10 Ripple 10 P to P or less atings Current consumption 1 head connected 480mA max 2 heads connected 550mA max Environmental Ambient temperature 0 to 50 C resistance Relative humidity 35 to 8596 No condensation Material Polycarbonate Weight Approx 1120g 11 or 2 units can be connected only with the same head model 2 OUT 1 to OUT 8 decision result OUT 9 to OUT 16 decision result time share output of binary measurement data e The rating of the NPN PNP open collector output output terminal block 50 mA 30 V or less max residual voltage 1 4 V or less 50 mA 1 0 V 20 mA e The rating of the NPN PNP open collector output expansion connector 50 mA 30 V or less max residual voltage 1 0 V or less Rating for non voltage input ON voltage 1V max OFF current 0 3mA max trigger input terminal ON voltage 5V max OFF current 1mA max Voltage rating maximum rating 26 4V ON voltage 10 8V OFF current 0 3mA trigger input terminal maximum rating 26 4V ON voltage 10 8V OFF current 1mA TM 3000 Series Operating system environment CPU Pentium III 1GHz min recommended 1 7GHz min Windows 7 Windows Vista Support OS Windows XP Professional Edition Home Edition Windows 2000 Professiona
71. gh is 300 times larger The reflected light intensity A changes according to the shape color and material of the target E CMOS gt Low The dynamic range is 300 times larger than The entire profile is measured the conventional model and covers the entire range ASAP Automatic Sensitivity Adjustment by Pixel This function adjusts the sensitivity and laser power of the E CMOS to obtain suitable waveform data for each measurement position that has a different reflectance The obtained data is merged as a single measurement profile Dynamic range 6000x 3 oE BH Qo Target with an extremely different Sensitivity Small Sensitivity Medium Sensitivity Largest Measurement profile reflectance at each position High capacity memory for saving data Best in its class High capacity memory is built into the controller A memory card slot is included to store the production records of mass produced products Handling many product types Profile saving The built in memory can store up to 16 programs When the memory card For analyzing NG records or production history is used up to 160 programs can be stored to handle various product types Internal memory 1024 x 2 65536 x 8 CF 1GB 1024 x 300 65536 x 3200 ON Handles 160 types 1024 profiles LOW Specifications LJ G Series Model LJ G015K LJ G015 LJ G030 LJ G080 LJ G200 Type Specular reflective
72. he SLD is reflected by the reference reflector mounted in the sensor head while the part that passes the reference surface is mirror reflected on the target and returns into the head HSE CMOS Semiconductor Lasers Spectroscopic unit SI F01U Light source SLD Measurement principle GP64 Processor The laser light is projected in a horizontal line by the cylindrical lens and diffusely reflects on the target object This reflected light is formed on the HSE3 CMOS and by detecting changes in position and shape displacement and shapes are measured ultra high accuracy Sensor head Polarization maintaining 2 optical fiber SI F01 Spectro scope Waveform W N analysis Diffraction CCD grating Displacement data Optical interference The two reflected light beams interfere with each other The intensity of the light with a specific wavelength is determined according to the distance between the reference surface and the target The relative maximum interference is reached when the determined distance is an integral multiple of the wavelength Interference light Emitted light Reference reflection surface SLD Super Luminescent Diode Spectroscopic analysis oplitting the returned light into different wavelengths with a diffraction grating produces an optical intensity distribution for a specific wavelength band The distance to the target is obtained by carrying out waveform analysis on this
73. he cables external devices For details refer to Precautions on wiring Operating environment required to use SI H1 SI Navigator Item Minimum system requirements CPU Pentium IIl 1 GHz or higher 1 7 GHz or higher is recommended 0s Windows TY Windows Vista Windows XP 3 Windows 2000 Professional Memory capacity 256 MB or higher 1 GB or more is recommended Display resolution 1024 x 768 pixels 24 bit full colour or higher Free hard disk space 1 GB or larger One of the following interfaces is required Trente USB Revision 2 0 high speed full speed in USB1 1 compatible mode LAN 100BASE TX or 10BASE T RS 232C serial port The other system requirements must meet those recommended for your OS 1 Home Premium Professional and Ultimate editions are supported 2 Ultimate Business Home Premium and Home Basic editions are supported 3 Professional SP2 and later versions and Home Edition SP2 and later versions are supported 4 SP4 and later versions are supported 5 Connections via a USB hub are not supported 6 Connections via an in house LAN or a router are not supported Direct or local connections must be used Windows is a registered trademark of Microsoft Corporation Pentium is a registered trademark of Intel Corporation 43 2 LI 1 co D CD o se I mn C C C iq iq n Dimensions Unit mm Sensor head Micro head type L
74. i Specifications IM 6500E Model Ce IM 6020 Image pickup device 1 6 6 mega pixel CMOS Display 10 4 LCD monitor XGA 1024 x 768 Light receiving lens Double telecentric lens i l Wide field measurement mode g100 mm g100 mm Field of view zT High precision measurement mode 925 mm Minimum display unit 0 1 um Wide field measurement mode 1 um 1 um Repetition Accuracy High precision measurement mode 0 5 um Wide field measurement mode 5 um 5 um Measurement accuracy FE High precision measurement mode 2 um External remote input No voltage input with and without contact External output Comparator output OK NG FAIL Relay output rated load 24 VDC 0 5A ON resistance 50 mQ or less IE LAN RJ 45 10BASE T 100BASE TX 1000BASE T nterface USB 2 0 series A 6 ports Front 2 Rear 4 Record Hard disk drive 160 GB i l Operating ambient temperature 10 to 35 C Resistance to environment Operating ambient humidity 20 to 80 RH no condensation Coaxial transparent illumination Telecentric transparent illumination green LED Illumination system C TOMENUES ie UE ODER Ring epi illumination Four division ring illumination white LED i Moving range along Z axis 30 mm Z axis stage Withstand load 3 kg Power supply voltage 100 to 240 VAC 50 60 Hz Power supply Power consumption 180 VA max Controller Approx 8 kg Weight Head Approx 24 kg Approx 25 kg 1 20 in the range of 280 mm from the
75. inals due to the potential difference between the cables external devices For details refer to Precautions on wiring in the User s Manual LK H2 LK Navigator2 Operating environment CPU Pentium III 1 GHz or higher 1 7 GHz or higher recommended Supported OS Windows 7 Windows Vista Windows XP Windows 2000 Professional Memory capacity 256 MB or more 1 GB or more recommended Display resolution 1024 x 768 pixels 24 bit full colour or better Available hard disk space 1 GB or more The PC must be equipped with one of these interfaces Interface USB 2 0 Hi Speed USB 1 1 compatible full speed e LAN 100BASE TX 10BASE T 1 Editions supported Ultimate Professional and Home Premium 2 Editions supported Ultimate Business Home Premium and Home Basic 3 Supports Professional SP2 and Home Edition SP2 or later 4 Supports SP4 or later 5 Does not support connection via a USB hub 6 Does not support connection via private LANs or routers Use in a 1 1 or local connection Windows is a registered trademark of Microsoft Corporation of America Pentium is a registered trademark of Intel Corporation 13 N ep on a a ON cD iq o Sensor heads Coarse target measurement wide spot type Model LK H008W LK H025 LK H027 LK H055 LK H057 LK H085 LK H087 LK H155 LK H157 Mounting mode Specular reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse refle
76. ing advantage of new captures displacement of moving or rotating Series provides the highest repeatability in its technology the series provides high targets but also increases stability in all class and is highly capable in any application performance with the high accuracy that is manner of applications increasingly required Selectable variations Wide spot type Focused spot type Specular reflection type stable measurement on coarse targets Optimal for fine or profile measurements measurement Surfaces that may appear flat once magnified The smallest spot diameter in its class The LK G5000 Series includes a group of will often contain minute projections and of 225 um LK H022 can measure any heads specifically designed for use on highly depressions This microscopic surface target from fine components to profile reflective targets such as glass or other mirror roughness can often cause measurement measurements with the highest level of surfaces These heads are available with wide errors with conventional focused spot accuracy in the industry or focused beam spots and are ideally suited sensors By using a sensor head with a wide for high accuracy measurements on such beam spot the surfaces effect of the uneven surface is averaged and stable measurements of even coarse targets are possible 2x wider than conventional model LK G5000 Series Applications m TN lt P ol N 3 CU 1 c
77. ion 2400 mW max Environmental Operating ambient temperature 0 to 50 C g ra resistance Operating ambient humidity 20 to 85 RH No condensation Weight Approx 470 g 7 1 The number of connectable hubs is not limited when using a switching hub e 1 Sensor head unit D Model LJ V7060K LJ V7060 LJ V7080 LJ V7200 LJ V7300 Mounting conditions Specular reflection Diffuse reflection Reference distance 54 6 mm 60 mm 80 mm 200 mm 300 mm S E M 7 6 mm 8 mm 23 mm 48 mm 145 mm MW ES 15 2 mm ES 16 mm ES 46 mm ES 96 mm ES 290 mm em E NEAR side 8 mm 13 5 mm 25 mm 51 mm 110 mm 3 DEDE Reference distance 14 mm 15 mm 32 mm 62 mm 180 mm es width Far side 8mm 15mm 39 mm 73 mm 240 mm Blue semiconductor laser Wavelength 405 nm visible beam ener Laser class ur SOURS Class 2 Laser Product Class 2M Laser Product 10 Class 2 Laser Product FDA CDRH Part 1040 10 1 Output 4 8 mW 10 mW 4 8 mW Spot shape reference distance Approx 21 mm x 45 um Approx 48 mm x 48 um Approx 90 mm x 85 um Approx 240 mm x 610 um i Z axis height 2 0 4 um 0 5 um 1 um 5 um Repeatability 7 l d L H H H T X axis width 9 5 ym 10 um 20 um 60 um 5 Linearity Z axis height 4 0 1 of FS Dae Profile M woad X axis width 20 um 50 um 100 um 300 um Sampling cycle trigger interval amp Temperature characteristics Enclosure rating Ambient operating illuminance 9 Environmental A
78. l Memory capacity 512MB min 1GB min recommended Resolution of display XGA 1024 x 768 pixels min 256 colours min Free disk space 1GB min Interface As described above all those mounted USB2 0 1 1 Ethernet For your OS use environments above that recommended 1 Supports all editions Home Premium Professional Ultimate 2 Supports all editions Ultimate Business Home Premium Home Basic 64 bit versions are not supported 3 Communicate selecting any of them Simultaneous communication is not possible 4 Connection through a USB hub is not included in the guarantee 5 Connection to LAN and connection via a router is not included in the guarantee e Windows Vista Windows XP Windows 2000 Professional are registered trademarks of US Microsoft Corporation Pentium is a registered trademark of intel Corporation Controller Sensor head Sensor head Sensor head Sensor head Controller 96 mm type 240mm type g65mm type TM 3001 P TM 006 TM 040 TM 065 Controller lineup NPN Output type TM 3001 PNP Output type TM 3001P so Monitor Console Optional Setting and support USB cable Optional High resolution monitor Monitor stand OP 82125 software OP 66844 CA MP81 OP 42278 TM H1 Cable connector Option Cable between Transmitter to receiver Cable between I O connector cable Protective cover head and controller expansion cable controller monitor OP 51657 3m OP 8
79. lass 2 Class 3R Class 2 0 3 mW 4 8 mW Class II Class Illa Class II Class Illa Class II Class Illa Class II 0 95 mW 4 8 mW 0 95 mW 4 8 mW 0 95 mW 4 8 mW 0 95 mW Spot diameter at reference distance 920 um 925 um 950 um g70 um 9120 um Linearitv 0 05 of ES 0 02 of F S 0 02 of F S 0 02 of F S 0 02 of F S y F S 1 mm F S 6 mm F S 20 mm F S 36 mm F S 80 mm Repeatability 0 005 um 0 001 um 0 02 um 0 01 um 0 025 um 0 1 um 0 25 um Sampling cycle 2 55 9 10 20 50 100 200 500 1000 ys 9 steps selectable 0 o 0 o 0 o 0 o 0 fo Pneu ato Edu Csesar SETS SER SEE g Enclosure rating IP67 S Incandescent lamp amp Ambient light Incandescent lamp or fluorescent lamp 10000 lux max or fluorescent lamp E 5000 lux max 0 to 50 C 0 to 50 C 35 to 85 RH No condensation E 10 to 55 Hz 1 5 mm double amplitude in X Y and Z directions 2 hours respectively Material Aluminium die cast Weight Approx 240 g Approx 230 g Approx 260 g Approx 280 g Approx 300 g 1 Measurement range when the sampling cycle is 20 us or more 2 This value is obtained when the KEYENCE standard target White diffuse workpiece or workpiece with a metal mirror surface only for the LK H008 is measured in the normal measurement mode 3 This value is obtained when the KEYENCE standard target White diffuse workpiece or workpiece with a metal mirror surface only for the
80. ldering Measuring the parallelism of a CCD and cover glass The inclination of a CCD surface against the rear surface of the glass can be measured accurately using the newly developed relative angle measurement i Lineup Measuring unit Type Model Measurement range Reference distance Appearance Scan width Interval Resolution Linearity Measuring the cross sectional area of liquid sealing material The profile and cross sectional area of sealing material applied for bonding glass substrates High accuracy LT 9011M 0 3 mm 6mm 0 to 1100 um 6 steps 1 to 10 um 4 steps 0 3 um 0 5 of FS Measuring the height of wire The height of narrow pitch bonding wire can be measured reliably Long range LT 9031M 2 DM 1 mm D N 30 mm 0 to 560 um 6 steps 1 to 8 um 4 steps 0 3 um 0 3 of FS 49 i Specifications de le le le o qB man qB o Controller Model Controller LT 9501H LT 9001H LT 9501HSO 5654 LT 9001HSO 5655 ode Measuring unit LT 9011M LT 9011 LT 9031M LT 9031 Measuring unit compatibility Measuring units are interchangeable without factory recalibration Minimum display unit 0 1 um 1 um 0 01 0 1 um Display range 9999 99 um 999999 um 9999 99 9999 99 um Displa is Microscope function Available LT 9501H LT 9011M only Available LT 9501HS0 5654 LT 9031M only Display cycle 10 times sec An
81. mage capture is ON in high speed mode All other settings are default When the measurement area is at its minimum binning is ON and image capture mode is set to standard in advanced function mode All other settings are default 7 This value is from a case in which the head cable CB B or extension cable CB B E has been connected 8 When measuring white paper this is the illuminance for the light receiving surface of the sensor head when light has been shined onto white paper 9 Use the sensor head after first mounting it on a metal plate 10 Viewing the laser output with certain optical instruments for example eye loupes magnifiers and microscopes within a distance of 100 mm may pose an eye hazard 15 G 6 msec Aluminium Approx 400 g Approx 550 g 11 The laser classification for FDA CDRH is implemented based on IEC60825 1 in accordance with the requirements of Laser Notice No 50 110 IE 240 Approx 1000 g 0 05 of F S 0 1 of F S Cables Model CB B3 CB B20E Cable type Head cable Extension cable Cable length 3m 10m 5m 10m 20m Minimum bend radius 22 mm Enclosure rating 1 IP67 IEC60529 Material outer covering PVC Weight Approx 250 g 1 This value is from a case in which the sensor head has been connected However the controller side connector is not included Regarding cable extension between the head and controller Up to 2 cables can be connected with the
82. mbient temperature 9 Top speed 16 us high speed mode Top speed 32 us advanced function mode 0 01 of F S C IP67 IEC60529 Incandescent lamp 10000 lux max 0 to 45 C resistance Operating Ambient humidity Vibration resistance Impact resistance Material Weight Approx 450 g 20 to 85 RH No condensation 10 to 57 Hz 1 5 mm double amplitude in X Y and Z directions 3 hours respectively 1 This value is from a case in which measurement has been performed with a reference distance at an average frequency of 4096 times 2 The measurement targets are KEYENCE standard targets white diffused objects This value is from a case in which the average height of the default setting area has been measured in height mode All other settings are default 3 The measurement target is a pin gauge This value is from a case in which the position of the intersection between the rounded surface of the pin gauge and the edge level has been measured in position mode All other settings are default 4 The measurement targets are KEYENCE standard targets white diffused objects The profile data is from a case in which measurement has been performed with 64x smoothing and 8x averaging All other settings are default 5 The linearity will differ depending on the measurement area See the diagram on the right 6 When the measurement area is at its minimum binning is ON image capture mode is set to standard and parallel i
83. measuring range and single smoothing processing 5 The illumination on the receiver of the sensor head when targeting an illuminated white paper sanas 9 r1 37 c ep Sp cD CD N Controller Model LJ G5001 LJ G5001P Sensor head compatibility Compatible Number of connectable sensors 2 units max D Minimum display unit 0 1 um 0 001 mm 0 01 ispla i Maximum display range 99999 9 mm 999999 mm 99999 9 Laser remote interlock input Non voltage input Input For sensor head A non voltage input For sensor head A voltage input a Auto zero 1 input Non voltage input Voltage input 10 V x 2 outputs output impedance 100 Q Total judgment output NPN open collector output PNP open collector output WIS Error output NPN open collector output N C PNP open collector output N C block Process output NPN open collector output PNP open collector output For sensor head A NPN open collector output For sensor head A PNP open collector output Non voltage input Voltage input Trigger input For sensor head B non voltage input For sensor head B voltage input Program switching input Non voltage input 4 inputs Voltage input 4 inputs Non voltage input Voltage input m Laser Off input For sensor head A B non voltage input For sensor head A B voltage input 3 level judgment output OUT1 to OUTS total judgment output 3 level judgment output OUT1 to OUTS total judgment output Judgment
84. merica e Pentium is a registered trademark of Intel Corporation 1 Home Premium Professional and Ultimate editions are supported 2 Ultimate Business Home Premium Home Basic editions are supported For Windows Vista Ver 1 6 and later versions are supported 3 Select one for communication Multiple interfaces cannot be used for communication at the same time 4 Operations are not guaranteed when connected through a USB hub 5 Operations are not guaranteed when connected through a router or a LAN connection i Dimensions Sensor head Ultra high accuracy specular reflection LJ G015K Z axis measurement range X axis measurement range LJ G030 914 500 34 2x 94 4 mounting hole 0 7 25 Z axis measurement range X axis measurement range LJ G200 s mounting hole 0 7 19 138 4 2 200 c VY 62 E ma 73 Z axis measurement range X axis measurement range Cable between the sensor head and the controller Model LJ GC2 LJ GC30 Cable length 2m 30m Weight Approx 200 g Approx 750g Approx 1400 g Approx 2000 g 14 Ultra high accuracy I LJ G015 LJ G Series Unit mm 34 68 9 9 2 x 94 4 mounting hole 0 7 B5 Z axis measurement range X axis measurement range LJ G080 H 42 2X 04 4 88 mounting hole EE
85. mit with a 2D Ernostar lens This generates a stabilised high precision profile Also the received light density for the laser has been increased to successfully secure a greater level of received light intensity This achieves ultra stable and highly accurate measurement with all types of targets that are typically difficult to detect E i 3 Red laser conventional Blue laser LJ V With a conventional red laser the With a blue laser the image forming beam that formed the image is thick beam becomes sharp to enable resulting in the generation of variation the measurement of shapes with in the profile excellent accuracy HSE CMOS can perform stable measurement of any target even at ultra high speeds Newly developed world s greatest The LJ V7000 Series is equipped with the newly developed HSE CMOS In addition to improved speed the dynamic range has been further powered up over the established and conventional E CMOS Even with the extremely short exposure time of 64 kHz 15 6 us it has achieved sensitivity that allows it to reliably measure a range of surfaces from black small amount of reflection surfaces to those with lustre large amount of reflection as well a wide dynamic range HS High Speed E Enhanced Eye Emulation When using low speed sampling When using high speed sampling CMOS General displacement metre Measurement is impossible due Could not be measured at all to insufficient
86. n a line or arc maximum minimum rectangle circle arc Line Line centreline Element tool Circle Circle arc Profile extraction Provided Special tool Automatic generation Manual measurement Provided Coordinate system configuration Provided Batch configuration of tolerance Provided Element list editing Provided Measurement setting data binding function Provided 3 Depending on the measurement setting data and number of data pieces being stored j Dimensions Head Controller Unit mm IM 6010 6020 IM 6500E 551 i Er e NO 9 a 240 322 5 264 7 www measurecentral com bpa XEYENCE see mome MeasureCentral com prar faves by A Reda lanam arom 034 ah i Wici a mome Garmonstnathon of the new LE OSOUD CMOS Lara Dispglkcarar Senior ANAL ERE World s first 2 mm 20 08 micro head NEW ci Series Your online portal to A complete knowledge centre to assist you with all of your measuring needs Get Useful Technical Literature FREE Proust Fini Boo EN Mirinur urine Tage Barth Penso MC Be Ppa Welg REE BE LA qucTPR PIT PR Cua Him CHOE Laer Dougpyaciemaen Benig Migi eptir FEER a ee pur ec pea C Bo ES Steet Debe dn ie Coe ee nlite gg ioe Degataque a De ye Lg mus cae Product Scie RpaccAy he eee ghe a OW D R00 Ti cand ee nd wk ni Fa puden Fal eee us epee Laien Tope Cere amp s cor g l ceo eco Would you like to learn more abou
87. ng head shape i Specifications LS 5000 Controller Display unit Type Built in display Separate display Model LS 5501 LS 5001 LS D501 Number of connectable scanning heads 4 max Measurement display LCD display LCD display Display range 99 99995 to 999 99995 mm 99 99995 to 999 99995 mm Display Display units mm inches selectable mm inches selectable Tolerance check output display 7 level LCD indicator 7 level LCD indicator Laser emission indicator Terminal block Program selection input input Laser stop input Interface RS 232C Input I O board Analogue voltage output LCD Green LED at scanning head Non voltage input contact solid state Measurement data output and control output Timing input Reset input Auto zero input LCD Green LED at scanning head Non voltage input contact solid state 10 V Output impedance 100 Q 7 level comparator output Power supply voltage Power consumption Ambient temperature No condensation Relative humidity Weight 1 The 1 0 board is optional 2 The LS D501 does not comply with EMC directive 100 mA max 40 V max 85 to 264 VAC 50 60 Hz 24 VDC 10 85 VA max 1 4 A max 0 to 40 C 0 to 45 C 35 to 85 No condensation Approx 3 7 kg Approx 1 1 kg Note BCD output is available as an option Please inquire with KEYENCE Measuring head 24 VDC 10 0 6 A ma
88. ng range 200 48 mm 100 152 mm w 51mm Measuring range 50 80 23 mm Measuring range i TP 15 32 6 mm Measuring inane 57 mm w 25 mm 200 mm w 62 mm l 30 10 mm 20 mm w 20 mm 80 mm w 32 mm eim i 30m w 22 mm 17 3 mm Ww 7mm 17z6mm w 7mm 40 mm w 25mm 103mm w 39 mm 248 mm w 73mm Z axis Height 15 2 3 mm 15 x2 6 mm 30 10 mm 80 23 mm 200 48 mm X axis Width 7 mm 7 mm 22mm 32 mm 62 mm Z axis repeatability 0 2 um 0 2 um 1 um 1 um 2 um X axis repeatability 5 um 10 um 20 um 35 E CMOS providing ultra wide dynamic range Firstin the world The E CMOS provides ultra wide dynamic range which is approximately 300 times wider than conventional modes The LJ G Series enables target profile measurement and the measurement of different target materials such as black rubber low reflected light intensity and reflective metal high reflected light intensity E CMOS sensor Enhanced Eye Emulation CMOS image sensor r ep C cD CD N Laser light reflection Light intensity Profile measurement High Light receiving sensitivity range Sensor head a Conventional gt Out of 1799 measurement Traditional light receiving elements do not The edges of the profile are not measured have enough sensitivity to cover the entire i o because the light intensity is far less on the range Light receiving angled surfaces than the flat surfaces sensitivity range Target object Hi
89. noise which is difficult to isolate and remove installed in places where conventional units cannot generation in the head section i Resolution of 1 nm 0 001 pm Highest in its class i Head size of 02 mm World s smallest High resolution of 1 nm 0 001 um has been realised by the development The simple fiberoptic structure for the of new principles and the application of sophisticated controllers This measurement head has allowed KEYENCE resolution can fully respond to a variety of needs for high accuracy to develop the world s smallest sensor head without any heat generation problems associated with compact electronics In addition as the sensor head has no electronic components it is immune to electromagnetic noise Actual Size i Applications Measuring the behavior of critical components inside an assembled device i Lineup Type Micro Head Type Best suited for measurements requiring ultra high accuracy compact spaces or high temperatures Long Distance Type Long distance measurement with high accuracy Thickness Gap Measurement Type High accuracy achieved by targeting thickness measurement SI F01 SI F10 SI F80 Model Positioning of high precision stages SI F1000 Series Head size g2 mm HE Measuring the thickness of glass discs Major technical data Measurement range 0 05 to 1 1 mm Head size g8 mm Measurement range
90. nsor head compatibility Compatible No of connectable sensor heads 2 1 Minimum display unit 0 001 um LD Display range 999 999 um to 9999 99 mm 7 settings selectable N A Display cycle Approx 10 times sec Haste Display port eset eee HAB anced n LED indicator LASER ON POWER ON STABILITY BRIGHT DARK Analogue voltage output 10 V output Output impedance 100 Q Analogue current output 4 to 20 mA Maximum load resistance 350 Q No of analogue outputs 2 1 TIMING1 input Non voltage input Voltage input Terminal RESET1 input block Auto zero1 input Non voltage input Voltage input Laser control input N A Laser remote input Non voltage input Alarm output NPN open collector output PNP open collector output General comparator output TIMING input Non voltage input Voltage input RESET input Auto zero input Non voltage input Voltage input Expansion Program switch input N A connector Binary selection input Alarm output Comparator output NPN open collector output PNP open collector output Binary output Perce WINE TEE Data length 8 fit 5109 D Ena Pal None even odd USB interface USB 2 0 Hi Speed compliant WA Ethernet interface 100Base TX 10Base T Head expansion unit connector Up to 10 head expansion units can be connected to one main controller Expansion unit connector Either of the CC Link unit LK CC100 or DeviceNet unit LK DN100 can be connected N A RTT Power supply voltage 24 VDC 10 24 VDC 10 Supplied from the c
91. nt humidity 20 to 8596 RH No condensation Weight Approx 1500 g e The rating for NPN open collector output is up to 50 mA 40 V or less residual voltage of up to 1 V e The rating for PNP open collector output is up to 50 mA 30 V or less residual voltage of up to 1 V e The rating for non voltage input is up to 1 V for ON voltage and up to 0 6 mA for OFF current e The rating for voltage input is a maximum input voltage of 26 4 V a minimum ON voltage of 10 8 V and up to 0 6 mA for OFF current Display output unit Model LJ VM100 Analogue RGB XGA 1024 x 768 DUO ai Touch panel monitor CA MP120T specialised connector included Voltage Supplied from the controller Power consumption 2 5 W or less Environmental Operating ambient temperature 0 to 50 C resistance Operating ambient humidity 20 to 8596 RH No condensation Weight Approx 400 g LJ H2 LJ Navigator 2 operation system environment Item Minimum system requirements Ethernet 1000BASE T 100BASE TX USB USB 2 0 high speed compliant USB 1 1 Full SPEED compatible PC Interface Windows Home Premium Professional Ultimate Supported OS Windows Vista Home Basic Home Premium Business Ultimate Windows XP SP2 or later Home Edition Professional Edition Supported languages Japanese English German French Simplified Chinese Traditional Chinese CPU Core i3 2 3 GHz or higher Memory capacity 2 GB or more 2D cache memory 2 MB or m
92. nt object thickness Distance mode Power supply voltage 100 to 240 VAC 10 50 60 Hz Current consumption 110 VA or lower Ratin Overvoltage category II Pollution degree 2 Ambient temperature 0 to 35 C No condensation Relative humidity 35 to 85 No condensation Weight Controller Approx 2 4 kg 1 Varies depending on the setting 2 Dedicated power supply for the monitor specified by KEYENCE 3 Select either the Limits mode or the Binary mode 4 Select either the Distance mode or the Profile mode Distance mode is only available with the LT 9501HS0 5654 and LT 9001HS0 5655 The rating of the NPN open collector output is 30 mA 30 V or lower maximum and residual voltage is 0 5 V The rating of the Non voltage input is ON voltage 1 V or lower and OFF current 0 6 mA or lower 5 Display changes every 0 3 um Measuring unit Type High accuracy Long range Model LT 9011M LT 9031 Measurement range 0 3 mm 1 0 mm Reference distance 6mm 30 mm Red semiconductor laser Wavelength 670 nm Light source Output 170 uW IEC 60825 1 3 0 uW FDA CDRH Part 1040 10 sorts e ime eR Spot diameter Approx 92 um Approx o7 um Scan width interval 0 AL me Fa 0 i E m Ed Resolution 0 3 um 0 3 um Linearity 0 5 of F S 0 3 of FS Sampling cycle 640 ys to 356 ms 14 steps 640 us to 187 ms 14 steps eno eure Siete nes 0 5 of ES 0 25 of FS 20 to 30 C Available Unavailable Available Unavailable
93. ntional laser scan micrometers i Easy operation and quick inspection i High durability Input output TFT liquid crystal monitor Frame memory Video output Target viewer for easy position adjustment CCD without moving parts amp Long life LED The sensor incorporates a CMOS monitor camera to capture a real time The laser scan method was reviewed thoroughly Resulting in the image of a target Measurement conditions can be checked on the LCD combination of Green LED and HL CCD that solved the problem of motor monitor The target viewer function allows the optical axis to be aligned durability which had been the weak point of the laser scanning method exactly with the desired measurement point even if a target has a Furthermore the long life LED achieved continued reliability over the complicated shape or is very small long term The measuring area for the current measurement mode is displayed in real time LS 7070M LS 7030M LS 7010M Measurement line Outer diameter measurement HL CCD Green LED Target Viewer LS 7000 Series i Applications Measuring the deflection of a crank journal Measuring the width of a sheet Measuring the outer diameter of a wafer Measuring the outer diameter of a catheter i Lineup Measuring head Wide range Standard Super fine Model LS 7070M LS 7070 LS 7030M LS 7030 LS 7010M LS 7010 Appear
94. o 9999 99 mm Display Display range 7 settings selectable me Display cycle 10 times sec Laser remote interlock input TIMING input RESET1 input Auto zero1 input Non voltage input N A Terminal Laser control input block 10 V x 2 outputs 10 V x 1 output Analogue voltage output Output impedance 100 Q Output impedance 100 Q 4 to 20 mA x 2 outputs 4 to 20 mA x 1 output Analogue current output Maximum load resistance 350 O Maximum load resistance 350 0 Alarm output NPN open collector output N C N A General comparator output NPN open collector output TIMING input Non voltage input 2 RESET input P Non voltage input Auto zero input Program switch input Non voltage input x 3 inputs Alarm output NPN open collector output N C xd 21 bits OUT selectabl N A Connector Binary output Measured value data output 21 bits selectable NPN open collector output Comparator Strobe output NPN open collector output binary Binary selection output mper NPN open collector output Binary selection input Non voltage input Measured data output and control input output Fo ZL LITERE Baud rate selectable to 115 200 bps max A USB 2 0 high speed compliant N A USB interface USB 1 1 Full SPEED compatible Ethernet interface 100Base TX 10Base T 12 Out simultaneous measurement calculation average filter scaling measurement measured value alarm tolerance setting auto zero data s
95. o all of your difficult a measurement application questions l Pacem Ali www measurecentral com Dd a DGS RE ww w measurecentralicom TEA 4 Xs I High resolution display of 0 05 um l Large touch screen for easy operation High speed high precision calculation achieves a display resolution The system is operated via a of 1 2 that of previous models This enables stable high precision touch screen in which menu measurement at the sub micron level items are selected simply by Based on KEYENCE findings touching the screen i Connects up to four scanning heads Up to four scanning heads can be connected to a single controller for centralised control This provides a low cost system for measuring EM ne il T Wide measuring range Objects from 0 2 to 120 mm in diameter can be measured The LS 5121 increases transmitter receiver distance to a maximum of 1000 mm _ _ _ an multiple lines simultaneously SH a ES uU i Lineup Measuring head LS 3100 5000 Series Type Wide range Fine measuring Standard Wide range Scanning head type Separate Single body Separate Single body Single body Separate Model LS 5041 LS 5121 LS 3034 DRESS LS 3032 LS 3033 LS 3036 LS 3060 Measuring range 0 2 to 40 mm 0 8 to 120 mm 0 08 to 30 mm 0 3 to 30 mm 0 5 to 30 mm 0 3 to 30 mm 0 8 to 60 mm Repeatability 1 um max 0 3 um 0 5 um 1200 scans s Laser scan rate 400 scans s Scanni
96. ocessing The target is measured by one pixel of The target is measured by one hundredth or less of the light receiving element a pixel of the light receiving element Just click the points to be measured with the mouse Easy point and click programming interface To set up feature inspections just select the desired tool from the menu and roughly specify the measurement points on the screen with the mouse Since the entire image of a target is displayed you can set details intuitively through simple mouse operations Select a desired measurement type from the Roughly specify the measurement points with menu the mouse Automatic calculation of major statistical values Group extraction is also easy Statistics analysis functions Critical statistical values required for inspection reports are automatically calculated and displayed including maximum minimum average o 3o and CPK You can also set various conditions for group extraction for statistical analysis and inspection records Groups can be extracted on Dnm various conditions Critical statistical values required for inspection reports are provided by default System configuration Monitor Head IM 6010 6020 Controller IM 6500E Indicator buzzer etc Accessories Inkjet printer Sapphire glass for the measurement stage OP 86986 Foot switch Normal glass OP 86985 IM 6500 Series
97. ong distance type SI F01 SI F10 11 1000 11 3 to 12 35 42 3 1000 11000 Measurement range 11000 5 0 05 to 1 1 1 10 25 uaa Measurement range E or aab 4 IC 00 9 an 00 9 92 0008 Optical fiber 980 05 Optical fiber i 1 25 0 01 Thickness measurement type SI F80 Detection range ge TEN 0 05 to 1 1 Measurement range TERI rp 8 3 0 01 812 0 01 98 0 05 0 05 Optical fiber Head mounting jig For SI F01 OP 84480 M2 Set screw SUS304 Spectrum unit SI F01U SI F10U SI F80U With decorative panel Without decorative panel 63 105 Depth 6 Controller Single unit type SI F1001V Expansion controller SI FA100 Depth 6 With decorative panel Display Display panel SI FD500 Panel thickness 0 5 to 5 mm 8 5 Depth 6 13 Display panel attachment ring 74 5 Separate type SI F1001 o O1 ie 124 O oco0000000000 FE ALL HU JES Panel cutout 100min r 62min 10 6 75 0 NT me SI F1000 Series Without decorative panel Fr 65 i LI m ce co 17 1 c Additional acces
98. ons Peak TET Postion 2 coorinay POSITION ADJUSTMENT FUNCTION he sale d Average er A After the adjustment the LJ G Series can provide specified stable measurements though the targets are not condition STEP Measured point al a Determines the height difference Step betweena measured point and the reference Reference point point ANGLE INTERSECTION Measures the angle or intersection of detected lines DF Position of intersection XZ coordinate SECTION AREA Measures the area on the basis of the reference surface F Section area Reference surface PROFILE COMPARISON Master profile _____ Compares the target profile with the master profile to measure the largest difference F Measurement value neatly arranged or positioned Measuring range Since the workpiece is not in the measuring range a precise measurement cannot be carried out Displacement of target Measuring range Adjustment wv The measuring range moves according to the displacement of the workpiece for precise measurement J Applications X Confirmation of door hood mounting accuracy irm Confirmation of sealant coating profile i Lineup Sensor head LJ G015K LJ G030 LJ G015 Pre weld position feedback LJ G080 LJ G Series l sauag 9 r1 LJ G200 250 200 150 Measuri
99. ontroller Maximum current consumption 0 6 A or less with 1 head 3 5 A or less with 12 heads Environment Ambient temperature EE ee Relative humidity 35 to 85 RH No condensation Weight Approx 600 g Approx 300 g 1 This input is applied to all of the synchronised OUT 2 When the laser class 3B sensor head is connected a key operated switch must be used for the input to this terminal The laser is emitted only when the key operated switch is set to the ON position Select a key which can be removed only when it is set to the OFF position When the laser class 2 3R sensor head is connected the laser turns on when this terminal is opened and turns off when it is short circuited 3 When a PC supporting USB 1 1 or USB 2 0 full speed is connected the data refresh cycle and other operations may slow down 4 Use the Ethernet interface only for direct connections with a PC or for local network connections with a PC or LK G5000 Series units e NPN open collector output rating 50 mA max 40 V max Residual voltage 0 5 V max e PNP open collector output rating 50 mA max 30 V max Residual voltage 0 5 V max Non voltage input rating ON voltage 1 V max OFF current 0 6 mA max Voltage input rating Maximum input rating 26 4 V ON voltage 10 2 V OFF current 0 6 mA e Part of the input output circuit of the LK G5000 Series is internally common Be careful that no potential difference is generated between the internally common term
100. ore Free space on hard disk 10 GB or more Display resolution XGA 1024 x 768 or higher Weight Approx 400 g 1 Connections through a hub are not covered under warranty 2 All languages except for Japanese and English are expected to receive support in the near future e Windows is a registered trademark of the Microsoft Corporation U S A Core is a registered trademark of the Intel Corporation Communication unit Model LJ V7000 Series CB EP100 Compatible network EtherNet IP and displacement sensor s own protocols socket communication Compliant standards IEEE 802 3 10BASE T IEEE 802 3u 100BASE TX Transmission speed 10 Mbps 10BASE T 100 Mbps 100BASE TX Eternet Transmission media STP or Category 3 or higher UTP 10BASE T STP or Category 5 or higher UTP 100BASE TX Maximum cable length 100 m Distance between the unit and Ethernet switch Maximum number of connectable hubs 4 hubs 10BASE T 2 hubs 100BASE TX Cyclic communication Implicit messaging Supported functions i i Message communication Explicit messaging Compatible with UCMM and Class 3 Number of connections 64 EtherNet IP RPI 0 5 ms to 10000 ms in 0 5 ms es Sree EUD bandwidth for cyclic 6000 pps Message communication UCMM Class 3 Conformance test Compatible with Version A9 Power supply voltage 24 VDC including 10 ripple P P supplied from the controller unit of the laser scanner Power consumpt
101. rea 59 o oe e ol co 1 Cu 17 o i Specifications LS 3100 Standard controller 2 head controller Scanning head type Single body Single body Single body Separate r 0 OD h aD ep O1 en en a c q 3 q WN SEE Scanning head LS 3034 LS 3033S0 8073 LS 3032 LS 3033 LS 3036 LS 3060 ode Standard controller 2 head controller LS 3100 LS 3100D Measuring Scanning head 0 08 to 30 mm 0 08 to 30 mm 0 3 to 30 mm 0 5 to 30 mm 0 3 to 30 mm 0 8 to 60 mm range Controller mmp inch selectable Light source Invisible infrared semiconductor laser Visible red semiconductor laser 0 5 mW FDA 0 5 mW FDA Output 3 0 mW FDA 55 uW IEC 35 uW IEC 20 UW IEC Wavelength 780 nm 670 nm Pulse duration 111 us 55 6 us FDA CDRH cI ass Laser Product Class II Laser Product IEC 60825 1 Class 1 Laser Product Display resolution 0 1 um Laser scan rate 400 scans s Laser scan range Approx 33 mm Approx 65 mm Measured value Main display 7 segment green LED 8 digits Sub display 16 character x 2 line LCD Backlight colour yellow green Minimum display unit 0 1 um 0 2 um Display range 999 9999 to 9999 9999 Target position indicator Green LED 7 levels Comparator output indicator Green LED x 3 HI GO LO Laser emission indicator Green LED x 2 HEAD 1 HEAD 2 Een Hold synchronous LASER REMOTE PROGRAM SELECT Program Nos 1 to 5 Te
102. rement targets for each measurement dcm E Peak Bottom Knee eae brani Tier et al Any 16 points can be measured simultaneously with a measurement mode that has been selected from the 74 types that are available Simultaneously completes measurements and inspections that were considered to be a lost cause until now gt lt WM 5 a 3 7 Width Bottom height position Cross section area Giga bit Ethernet SO Profile data The LJ V7000 Series has now been equipped with a TOE TCP IP off load engine specifically for processing high speed communication This achieves high throughput that does not affect CPU load With this it is possible to output 64 000 units of profile data at a top speed of 1 second Rather than performing measurements in standard measurement mode the LJ V7000 Series is used as a measuring probe and is effective in cases when you would like to perform measurements using your own original algorithms The communications library is also publicly available as standard Pixel pitch Height data that has been linearised at 20 bits for each point 29 Specifications Controller C lt N O Co da qp md qp o Model LJ V7001 LJ V7001P No of connectable sensors Max 2 units Denias Minimum display unit 0 1 um 0 00001 mm2 0 01 Maximum display range 99999 9 mm 999999 mm
103. rminal Non voltage input contact solid state block 1 0 Analogue voltage 6 V Output impedance 0 Q Contact output Relay output 3PST NO contact 250 VAC 2 A resistive load Hold synchronous AUTO ZERO SET RESET PROGRAM SELECT Program Nos 1 to 5 36 pin EIE TTL level negative logic connector 1 0 Control output 7 level 3 level 40 mA max 30 V max Interface port RS 232C GP IB optional BCD optional Power supply 85 to 264 VAC 50 60 Hz Power consumption 40 VA max temperature Controller 0 to 45 C Relative humidity 35 to 85 No condensation ma coo er Controller Approx 4 6 kg 1 When the outer diameter is measured 2 When a rod 10 mm in diameter is measured in a 2 x 20 mm 4 x 20 mm or 10 x 20 mm measuring area 8 When measuring a rod 20 mm in diameter in a 20 x 40 mm measuring area 4 T indicates a transmitter R indicates a receiver i Dimensions Scanning heads Unit mm LS 5041 LS 5121 4 94 5 through hole 98 spot facing d 4 5 4 M4_ 4 96 5 through hole effective depth 10 914 spot facing d 7 145 8 04 5 through hole 10 spot facing d 5 4 M6 effective depth 10 4 706 16 4 M4 effective depth 6 4 M4 effective depth 6
104. s LK G5000 Series otroke and positioning Wafer position measurement Feedback control of a welder Position tracking of high temperature steel pipe LJ G Series 4 LK G3000 Series SI Series shape and warp Warpage measurement of a circuit board Ampoule shape inspection Thermal expansion of a lithium ion battery LK G5000 Series TM 3000 Series LJ G Series Q saHues 000 A f 1 Salas J Saas 000 9 1 SallaS 00069 1 Saag 9 1 ea LI mu ce co 3 a gt c senes 000E NL sedes o00G 00LE S1 Sands 000 S1 SaaS 0006 11 S8H8S Y084 I SaHas 0069 IAI 1 Ultra High Speed High Accuracy Laser Displacement Sensor ep C1 C e C CD CD N LK G5000 Series CE Features Fastest in the World 392 kHz Best linearity in its Class 0 02 of F S Connect up to 12 sensor heads network capable Expert Engineering Sites A new site with answers to all of your difficult measurement application questions did p i 2 www measurecentral com SR Ai m E erm E i Best specifications in class Highest Repeatability in its Class Highest Accuracy in its Class Fastest in the World 0 005 um 0 02 392 kHz The need to improve product quality makes High linearity enhances the LK G5000 s The world s fastest sampling rate not only high performance critical The LK G5000 capabilities By tak
105. s 2 Laser Product Sg RTT e Mei NS APTO 20 MIN m a um T 20x 1000 um BEDS A em popes am LK 036 LK 086 n Repeatability 0 1 um 50 um Linearity 0 25 of F S 0 1 of ES Sampling cycle age ee ph 512 us 1024 us Voltage output cia wry 1 uum 3 3 aim 10 y md 50 dumis 5 Analogue output Impedance 1000 Current output 4 to 20 mA Applicable load 350 Omax Alarm output NPN 100 mA max 40 V max N C Residual voltage 1 V max Other functions AUTO ZERO Response selection Shift Span adjustment Holding output in alarm condition Power supply 24 VDC 10 Ripple 10 P to P or less Current consumption 400 mA max Temperature Sensor head 0 04 of F S C 0 01 of F S C 0 02 of F S C fluctuation Controller 0 005 of F S C 0 01 of F S C Enclosure rating IP64 IP67 Ambient light Incandescent or fluorescent lamp 10000 lux max Ambient temperature 0 to 50 C Relative humidity 35 to 85 No condensation AES Sensor head Aluminium die cast Controller Polycarbonate Weight Sensor head Approx 80 g Approx 260 g Approx 385 g Approx 700 g including cable Controller Approx 515 g 1 Repeatability was obtained using KEYENCE s analogue sensor controller RD 50 with the number of averaging measurements set to 64 Note The ripple of the analogue output may be 1 mV or more due to common mode noise when observed with an oscilloscope or a high speed A D conversion board 2 Linearity was obtained using KE
106. s or PCs standard Step Measurement Calculates the differences between a reference point and each measuring point Measured value1 B A Measured value2 B C Measured value3 A C Warpage Measurement Calculates the amount of warpage Measured value1 B A C 2 Maximum Minimum Measurement Calculates the maximum and or minimum values Measured value1 MAX A B C Measured value2 MIN A B Multi Point Thickness Measurement Calculates the thickness with each pair of sensors Measured value1 X A D Measured value2 Y B E Measured value3 Z C F Measurement of Velocity m s Acceleration m s Flatness Measurement Calculates the difference between the maximum and minimum values among the measurement points ahg Measured value1 MAX A B C MIN A B C Average Height Measurement Calculates the average height Measured value1 Ave A B C D The LK G5000 Series is equipped with a function to directly measure the speed m s and acceleration m s of targets Just select the type of measurement displacement speed or acceleration Using the differential processing circuit is inside the controller it is possible to directly output or evaluate measurements that were previously calculated externally The LK G5000 Series is suitable for lightweight easily deformed and high temperature targets which are diffic
107. s will Support your QCD Improvement IM 6500 Series i Description ADVANCED TECHNOLOGIES FOR ACHIEVING PLACE AND PRESS MEASUREMENT Pattern search for automatic orientation correction Industry first The location and orientation of the target placed on the stage are automatically adjusted based on the recorded shape of the target There is no need for positioning of a target or preparation of a jig at the beginning of measurement This is literally place and press measurement The location and orientation of the target placed in the field of view are automatically adjusted for measurement Simultaneous measurement of 99 features by capturing an entire part Industry first This is a completely new measurement system which measures by capturing the entire image of a target within the field of view It does not require time for alignment of the stage and completes the measurement of 99 features in seconds Measurement time can be reduced significantly compared with conventional optical comparators measuring microscopes and optical CMMs 124 Even when many feature are specified on a dimension drawing all features can be measured within a few seconds Batch measurement for further reduction in measurement time Industry first The dimensions of all targets on the stage are measured simultaneously Even when the targ
108. ser Class Class 1 IEC 60825 1 Class II FDA CDRH Part 1040 10 Class 2 IEC 60825 1 Output 0 3 mW 0 95 mW Approx 20 x 500 um 615 Approx 30 x 850 um G37 Approx 70 x 1100 um 687 Approx 120 x 1700 um 6157 SIEUT E LIIS Hedas Approx 020 um 610 Approx 030 um G32 Approx 070 um G82 Approx 0120 um G152 Linearity 0 03 of F S FS 1 mm 0 05 of ES F S 5 mm 0 05 of F S FS 2 15 mm 0 05 of F S F S 40 mm Repeatability 0 02 um 0 01 um 0 05 um 0 2 um 0 5 um Sampling time 20 50 100 200 500 1000 us Selectable from 6 levels LED display Near the centre of the measurement Green lights Within the measurement area Orange lights Outside the measurement area Orange flashing TT 0 01 of F S C 0 01 of F S C 0 01 of F S C 0 01 of ES C Terreni eee s FS 1 mm FS 5 mm FS 15 mm FS 40 mm Enclosure rating IP67 IEC60529 Incandescent lamp or fluorescent Ambient luminance Incandescent lamp or fluorescent lamp 10000 lux max lamp 5000 lux max Ambient temperature 0 to 50 C Relative humidity 35 to 85 No condensation Vibration resistance 10 to 55 Hz double amplitude 1 5 mm two hours in each direction of X Y and Z Material Aluminium die cast Weight including the cable Approx 190 g Approx 280 g Approx 380 g Approx 290 g 1 The value is obtained by measuring KEYENCE s standard target ceramic LK G10 G15 When the sampling rate is 20 us the
109. sories Controller to spectroscopic unit connection cable CB A07 CB A2 CB A5 CB A10 CB A20 CB A30 07 Cable length 0 7 m 2 m 5 m 10 m 20 m 30 m o7 Cable length 5 m 10 m 914 45 Spectral Interference Wafer Thickness Meter ce RA Co je JJ c CD CD N SI F80R Series CE Features Resolution of 0 001 um Sampling speed of 5 kHz Working distance 80mm Expert Engineering Sites A new site with answers to all of your difficult measurement application questions a Fiore Fer m mm a www measurecentral com The SI F80R Series employs a near Variations from wafer surface patterns and measurement alarms can be infrared SLD that can penetrate held to a minimum by decreasing the spot beam diameter and surface through Si GaAs SiC InP a Si aberrations inside the beam spot and other semiconductors It can accurately measure wafer thickness i Patterned Si wafer thickness profile data uk even when covered with BG TFT i backgrind tape P um light 185 Setting distance 180 p p 1 to 2 um ue 170 165 Measurement thickness 160 150 100 50 0 50 100 150 Measurement position mm Patterned wafer Simple accurate measurements next to i Constant monitoring in process the line e With a small head that can be installed 80 mm from the wafer wafer thickness can b
110. t Weight Approx 240 g Approx 230 g Approx 260 g Approx 280 g 1 Measurement range when the sampling cycle is 20 us or more 2 This value is obtained when the KEYENCE standard target White diffuse workpiece or workpiece with a metal mirror surface only for the LK H008W is measured in the normal measurement mode 3 This value is obtained when the KEYENCE standard target White diffuse workpiece or workpiece with a metal mirror surface only for the LK H008W is measured at the reference distance with the number of averaging measurements set to 16384 The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 us 4 When the ambient temperature rises to 40 C or more mount this on a metal plate before use Approx 300 g Fine target measurement focused spot type Model LK H008 LK H020 Specular reflection Diffuse reflection Diffuse reflection Diffuse reflection Mounting mode LK H022 LK H050 LK H052 LK H080 Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection LK H082 LK H150 LK H152 Reference distance 8mm 80 mm 150 mm 150 mm Measurement range Wavelength Light source FDA CDRH Part 1040 10 0 5mm Class II Class Illa semiconductor laser 655 nm Re a 18 mm 40 mm 40 mm IEC 60825 1 Class 1 Class 3R Class 3R Class 2 Class 3R C
111. t today s Measurement Technology MEASUREMENT TECHNG O nm Beginner s Help Measurecentral com has a vast database of technical resources to Ask the Experts help beginners and experts learn Our experts are ready to answer your more about effectively implementing questions on measurement applications measurement technology www measurecentral com www measurecentral com services ask php URE T cl ts ex Fel SET Sa Pd Measurement Information Topics Not sure which product is right for you he Cini ibi wu rug hor amari bi Ophea Cau rey PRODUCIR F N DE ETE Mafe Wr mage Mihia ya ACE ener xb Laser a rr Seared pa EEEN OREN inductee Lh clc met Senor Product Finger Let KEYENCE help you determine pum epei i ri RS rA na 7 eee P the ideal measurement solution to S mu arenas m i pee tanyai Mendsa Drest Quale Selec your specific application a HEDKDHIEQO TR terne www measurecentral com www measurecentral com productfinder topics index php a SAFETY INFORMATION Please VISIt WWW 5 com A Please read the instruction manual carefully in order to safely operate any KEYENCE product KEYENCE CORPORATION 1 3 14 Higashi Nakajima Higashi Yodogawa ku Osaka 533 8555 Japan Phone 81 6 6379 2211 AUSTRIA GERMANY KOREA SLOVAKIA Phone 43 22 36 3782 66 0 Fax 43 22 36 3782 66 30 Phone 49 61 02 36 89 0 Fax 49 61 02 36 89 100 Phone 82 31 789 4300 Fax 82 31 789 4301 Phone 421
112. tage input Comparator output For OUT1 NPN or PNP open collector output Alarm output For OUT1 NPN or PNP open collector output N C Timing Reset Auto zero input For OUT2 non voltage or voltage input Program switching input Non voltage or voltage input x 3 inputs 8 Laser Off input For Head A Head B non voltage or voltage input Comparator output For OUT2 NPN or PNP open collector output Alarm output For OUT2 NPN or PNP open collector output N C Binary output Measured data output 21 bits OUT1 OUT2 selectable NPN or PNP open collector output TM Strobe output NPN or PNP open collector output Binary selector output NPN or PNP open collector output Binary selector input Non voltage or voltage input Measured data output and control input output Maximum baud rate 115200 bps selectable In conformity with USB Revision 2 0 Full speed USB1 1 compatible 2 OUT simultaneous measurement Operation Averaging Filter Calibration Measurement AUTO ZERO Sampling frequency setting Mutual interference prevention Data storage 8 program memory ECO mode ABLE setting Target setting ABLE tuning Selection of measurement surface of transparent target Statistics processing Connection of setting support software Selectable head mounting etc Power supply voltage 24 VDC 10 Ripple 10 P to P or less Current consumption Ambi ent temperature Relative humidity 500 mA or less with 1
113. te LED Approx 50 000 hours 40 x 30 per 1 image Type Number of switches Mode Operating force Service life Communication function Structure Pixels W x H pixels Touch switch Matrix resistance membrane mode 0 98N or less More than one million times Available only with the LK G5000 Series Panel built in type IP65f equivalent dust proof waterjet proof on only front panel Operating environment Limit dust and corrosive gas Ambient temperature 0 to 50 C Ambient humidity Storage temperature Storage humidity 35 to 8595 RH no condensation When the ambient temperature is higher than 40 C limit the absolute humidity to 8596 RH at 40 C 10 to 60 C no freezing 35 to 8595 RH no condensation When the ambient temperature is higher than 40 C limit the absolute humidity to 8596 RH at 40 C Vibration resistance 10 to 57 Hz 0 3 mm double amplitude 57 to 500 Hz 2G 3 hours in each direction X Y and Z Weight Rated voltage Current consumption Head to controller cable Approx 1150 g 24 VDC 10 1 A or less Extension cable between the head and cable Model CB A07 CB A5 CB A10 CB A20 CB A30 Model CB A5E CB A10E Cable length 0 7m 2m 5m 10 30m Cable length 51m 10m Weight Approx 100g Approx 200 g Approx 400g Approx 750g Approx 1400 g Approx 2000 g Weight Approx 400 g Approx 750 g 15 f Dimensions
114. the sampling rate is 20 us the value becomes 230 mm NEAR side to 249 mm NEAR side for specular reflection When the sampling rate is 50 us the value becomes 125 mm NEAR side to 250 mm NEAR side for diffuse reflection When the sampling rate is 50 us the value becomes 125 mm NEAR side to 249 mm NEAR side for specular reflection 2 The value is obtained by measuring KEYENCE s standard target ceramic with the Standard mode 3 The value is obtained by measuring KEYENCE s standard SUS with 4096 times of averaging at the reference distance 4 All are calculated at F S 250 mm 5 High accuracy range and long range refer to the linearity when those ranges are used LK G3000 Series Controller Type All in one model Separate monitor model PM NPN LK G3001V LK G3001 LK GD500 ode BNPO LK G3001PV LK G3001P LK GD500 RS 232C interface USB i nterface Major functions Head compatibility All LK G sensor heads are compatible z Number of connectable sensors Maximum of 2 units 2 Minimum display unit 0 01 um E Display range 9999 99 mm to 9999 99 um Selectable from six levels Refresh rate 10 times sec Analogue voltage output 10 V x 2 outputs output impedance 100 0 3 Analogue current output 4 to 20 mA x 2 outputs maximum load resistance 350 O Timing Reset Auto zero input For OUT1 non voltage or voltage input Laser remote interlock input Non vol
115. ting screw Dimension of mounting bracket 125 oe 989 223 111 Panel thickness Effective display area 1 2 to 4 0 191 5 60 Dimension of mounting bracket 175 Panel thickness 1 2 to 40 25 Mounting screw 124 FAA 23 2 25 i T z 60 Mounting bracket n T Mounting bracket 83 vig zs 130 tH Effective d display area lt b 130 i Extension cables Cable between the controller and sensor head r P i c D D o AC power supply stand LS S11 LS CxxA Camera cable between the controller and sensor head LS CxxAM Cable between the receiver and transmitter OP 4218x 57 r co CO c ep O1 e a a o iq n q c Laser Scan Micrometers LS 3100 5000 Series CE Features Repeatability of 0 3 um Wide measuring range Touch screen controller Up to four heads are connectable to one controller Expert Engineering Sites A new site with answers t
116. torage light monitor 8 program memory interferometer mode mask connection of setting support software etc Power supply voltage 24 VDC 10 Ripple 10 P P max Power supply Supplied from the main controller Maximum current consumption One head connected 0 6 A or less Six heads connected 1 5 A or less Ambient temperature 0 to 50 C Major functions Environment a SISTI Relative humidity 35 to 8595 RH No condensation Vibration 10 to 55 Hz 0 5 mm double amplitude in X Y and Z directions 2 hours respectively Weight Approx 600 g Approx 300 g 1 Up to four expansion controllers can be connected to the main controller 2 The SI F1001 can be used independently The measured value display and setting change can be done with the display panel SI FD500 and setup support software SI H1 3 When two or more expansion controllers are connected the ambient temperature is 0 to 40 C 4 When two or more expansion controllers are connected the vibration resistance is 10 to 55 Hz 0 3 mm double amplitude in X Y and Z directions 2 hours respectively NPN open collector output rating 50 mA max 40 V max Residual voltage 0 5 V max Non voltage input rating ON voltage 1 V max OFF current 0 6 mA max Part of the input output circuit of the SI Series is internally common Be careful that no potential difference is generated between the internally common terminals due to the potential difference between t
117. trum unit Polycarbonate Wane Sensor head including cable Approx 24 g Approx 38 g Approx 39 g ei 2 Spectrum unit Approx 1 kg 1 Indicates distance from the front of the sensor head For long distance type sensor heads there is an individual difference of up to 0 2 mm 2 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass Ensure that the measurement target is within the possible detection distance range Indicates the minimum beam spot diameter within the measurement range 4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256 5 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256 6 This value is obtained by measuring a glass plate surface located at the centre of the measurement range with the number of averaging measurements set to 4 096 7 This value is obtained by measuring a 0 3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4 096 8 The laser classification for FDA CDRH is implemented based on IEC60825 1 in accordance with the requirements of Laser Notice No 50 SI F1000 Series Controller Type Main Controller Expansion controller Single unit type SI F1001V Model SI FA100 Separate type SI F1001 SI FD500 Minimum display unit 0 001 um 999 999 um t
118. ult to measure with contact accelerometers Example of measurement of stage movement 3 Displacement Speed Acceleration Data filter functions made easy Vibration test of high temperature muffler 4 types of easy to use data processing filters are incorporated directly in the controller The filters are user selectable for ease of use Median filter Removes any intermittent noise in the output High pass filter Captures sudden changes and removes low frequency variations Unfiltered wave pattern Wave pattern when using the median filter LLf lab il Unfiltered wave pattern Moving average filter Averages the measured values to reduce high the overall noise level in the mea surement Wave pattern when using the high pass filter Low pass filter Unfiltered wave pattern NN Wave pattern when using the average filter Captures moderate changes while removing high frequency noise Unfiltered wave pattern Wave pattern when using the low pass filter TN LK G5000 Series Specifications 5 Controller 7 Main unit head expansion unit Single unit type LK G5001V LK G5001PV Model LK HA100 Separate type LK G5001 LK HD500 LK G5001P LK HD500 Designation Main controller Head expansion unit Se
119. x 0 to 40 C 35 to 85 No condensation Approx 0 7 kg Type Standard Wide range Scanning head LS 5041 LS 5121 ee Controller LS 5501 LS 5001 LS 5501 LS 5001 Measuring range 0 2 to 40 mm 0 8 to 120 mm Minimum target width 0 2 mm 0 8 mm Transmitter receiver distance 160 40 mm 400 100 mm 1000 mm max Light source Visible red semiconductor laser Output 0 8 mW FDA CDRH Part 1040 10 130 pW IEC 60825 1 0 6 mW FDA CDRH Part 1040 10 45 uW IEC 60825 1 Pulse duration 63 us 14 us Wavelength 670 nm Laser FDA CDRH Part 1040 10 Class II Laser Product IEC 60825 1 Class 2 Laser Product Measurement accuracy 2 yum max 8 um max Repeatability 0 3 um max 1 um max Display repeatability 0 05 um Laser scan rate 1200 scans sec Laser scan velocity 121 m sec 504 m sec Laser scan range Approx 46 mm Approx 124 mm IP64 IP65 Enclosure rating Ambient temperature Relative humidity Weight 0 to 50 C No condensation 35 to 85 No condensation Approx 1 4 kg including base Approx 5 5 kg including base 1 The measurable area is within 800 mm from the transmitter 2 When a round rod 10 mm in diameter is measured in a 10 mm x 20 mm measuring area 3 When a rod 40 mm in dia is measured in a 40 mm x 80 mm measuring area 4 When the average number of measurements is set to 768 in a 10 mm x 20 mm measuring area 5 When the average number of measurements is set to 768 in a 40 mm x 80 mm measuring a

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