DRY SCROLL PUMPS, OPERATING INSTRUCTION, Leybold, SC 5
Contents
1. 25 3 Operation brud Sete 26 3 1 Start dte n VR HE e UR CS NI 27 3 2 rne EDD eg 28 3 3 Pumping vapor air flush 28 3 4 Ont doWE casti oem 31 4 Maintenance ccc cece hn nm hh nh ht 32 4 1 Table Maintenance c der eee dup E wr Te E E 34 4 2 L6ybold Setrvie8 ua rs muse e e ceci ne Ma acu du UA GE A Rc LEA 35 4 3 DISpOSal siase Pad dradd bale id At he eoe E eee ltd 35 5 Troubleshooting RR RARI ee eb Rx ET 36 6 Spare parts v c illiid see 37 EC Conformance Declaration 38 Figures The first digit of a reference 1 2 for example is the figure number the second digit is its item number in this figure We reserve the right to modify the design and the specified data The illu strations are not binding 2 GA01423 0102 11 2004 General safety information Indicates procedures that must be strictly observed to prevent hazards to persons Indicates procedures that must be strictly observed to prevent damage to or destruction of the appliance The Leybold Oil free Scoll vacuum pump is designed for safe and efficient operation when used properly and in accordance with this manual It is the responsibility of the user to carefully read and strictly observe all2. 301 Building 110 Dongguangzhuang Rd Tianhe District Guangzhou 510610 China Sales Phone 86 20 8723 7873 Phone 86 20 8723 7597 Fax 86 20 8723 7875 leybold_gz leybold com cn ndia Leybold Vacuum India Pte Ltd A 125 Road No 30 IDC Wagle Industrial Estate Thane W 400 604 Maharashtra ndia Sales and Service Phone 91 22 2581 2929 Fax 91 22 2581 2626 ivt2004Qyahoo com Japan Leybold Vacuum Japan Co Ltd Head Office Bldg 4th Floor 23 3 Shin Yokohama 3 chome Kohoku ku Yokohama shi Kanagawa ken 222 0033 Sales Phone 81 45 4713330 Fax 81 45 4713323 Leybold Vacuum Japan Co Ltd Osaka Branch Office MURATA Bldg 7F 2 7 53 Nihi Miyahara Yodogawa ku Osaka shi 532 0004 Sales Phone 81 6 6393 5211 Fax 81 6 6393 5215 Leybold Vacuum Japan Co Ltd Tsukuba Technical S C Tsukuba Minami Daiichi Kogyo Danchi 21 Kasumi no Sato Ami machi Inashiki gun Ibaraki ken 300 0315 Service Phone 81 298 89 2841 Fax 81 298 89 2838 Korea Leybold Vacuum Korea Ltd 761 4 Yulkeum ri SungHwan eup Chonan Choongchung Namdo 330 807 Korea Sales Phone 82 41 580 4421 Fax 82 41 588 3737 Service Phone 82 41 580 4419 Fax 82 41 588 0166 Singapore Leybold Vacuum Singapore Pte Ltd No 1 International Business Park B1 20B The Synergy Singapore 609917 Sales and Service Phone 65 66652910 Fax 65 65668202 vacuum leyboldvac co
3. Eastern amp Central time zones Phone 1 724 327 5700 Fax 1 724 733 1217 Pacific Mountain Alaskan amp Hawaiian time zones Phone 1 480 752 9191 Fax 1 480 752 9494 Service Phone 1 724 327 5700 Fax 1 724 733 3799 Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 34 Fax 49 221 34 info leybold com 7 0 va Worldwide Asia P R China Leybold Vacuum Tianjin International Trade Co Ltd Beichen Economic Development Area BEDA Shuanghai Road Tianjin 300400 China Sales and Service Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 leybold leybold com cn Leybold Vacuum Tianjin Equipment Manufacturing Co Ltd Beichen Economic Development Area BEDA Shuanghai Road Tianjin 300400 China Phone 86 22 2697 0808 Fax 86 22 2697 4061 Fax 86 22 2697 2017 leybold leybold com cn Leybold Vacuum Tianjin International Trade Co Ltd Beijing Branch 1 908 Beijing Landmark Towers 8 North Dongsanhuan Road Chaoyang District Beijing 100004 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 leybold_sh leybold com cn Leybold Vacuum Tianjin International Trade Co Ltd Shanghai Branch Add No 33 76 Futedong San Rd Waigaoqiao FTZ Shanghai 200131 China Sales and Service Phone 86 21 5064 4666 Fax 86 21 5064 4668 leybold_sh leybold com cn Leybold Vacuum Tianjin Guangzhou Branch Add G F
4. The motor restarts without warning after the protector trips CE Requirement Min circuit current capacity of conductor is 10 A Max branch circuit brea ker is 15 A industrial rated Warning Protect the motor by installing the recommended breaker refer to chart 1 Failure to do so can cause electrical shock or fire 18 Ga01423 0102 11 2004 SC 15D 30D Ground Terminal Bus Bar t2pieces Installation Electric Source Terminal M4 Nut EU wiring Fig 11 Single phase connection When you use this pump in Europe This vacuum pump must be equipped with a main disconnect device in accordance with requirements of EN 60204 1 It is recommended to use a circuit breaker as main breaker which is suitable for isolation according to EN 60947 2 and is equipped with an operating handle which is lockable in OFF position and complies with the other requirements of EN 60947 3 Remove the terminal cover of motor and check the terminal block inside The wiring diagram is shown inside the terminal cover You can change between 100 115 V and 200 230 V connection by chan ging the bus bars If you want to change the connection remove the M 4 nut for the power terminal and change the bus bars as illustrated in Figure 11 Two bus bars are used at the 200 230 V connection Connect the power cord through the cable gland on the bottom side of Terminal Box Activate the emergency stop by the main d
5. atmospheric air is drawn back from the Air Flush Port to the inside of pump and pressure inside pump be comes about atmospheric pressure To maintain vacuum in the vacuum chamber and prevent the drawback of debris from vacu um pump into vacuum chamber close the isolation valve to the vacuum chamber before shutting off the pump Warning Operation GA01423 0102 11 2004 31 Maintenance 4 Maintenance Caution Neglecting maintenance and inspection can cause poor perfor mance and pump failure To remove debris accumulated in the vacuum pump operate the pump several times for 3 5 seconds once a day with its inlet open to atmospheric air or open the purge valve if one is instal led Warning Allow the pump to cool down before doing maintenance Performing maintenance immediately after shutdown can cause bodily injury Such as burns SC 5D 15D Lj Elk Burn Fig 25 Warning Be careful of automatic restart The thermal protection on the single phase motor automatically resets This motor restarts without warning after the protector trips Be sure to switch off the electric power before maintenan ce or inspection Warning Switch off electric source Be sure to switch off the electrical power before maintenance or inspection Failure to do so can cause bodily injury from electric shock or rotating objects Caution More frequent maintenance is required if ambient temperature is too high The
6. SC5D Inlet Cooling Fan Fan Cover Cooling Fan Fixed Scroll FS 2 ON OFF switch inside cover Air Flush Hour Meter Orbiting Scroll OS Fixed Scroll FS 1 Rotating Direction Plate gt r _ gpoogg LLLI Motor Termina Box inlet Flange NW25 Handle Fan Cover Air Flush Port ES Rc1 8 Outlet Flange Hour Meter Fig 2 Name of each section 6 GA01423 0102 11 2004 Description SC 15D Rotating Direction Plate Motor Inlet Fiange NW25 Motor Terminal Box Fan Cover Air Flush Port Rc1 8 Outlet Flange NW16 Rubber Plate Hour Meter SC 30D Rotating Direction Plate Motor Inlet Flange NW40 Air Flush Port Fan Cover 1 8 Outlet Flange INW25 Fig 3 Connections and controls SC 15 D 30 D GA01423 0102 11 2004 7 Description SC 30D Fan Cover Cooling Fan Fixed Scroll FS 2 Orbiting Scroll OS Fixed Scroll Fig 4 Connections and controls SC Inlet Outlet Air Flush FSt1 Exhaust Valve Cooling Fan Hour Meter 30 D 3 phase 1 2 Order Information SC 5D single phase motor SC 15 D single phase motor SC 30 D single phase motor SC 15 D three phase motor SC 30 D three phase motor SC 5D single phase motor SC 15 D single phase motor SC 30 D single phase mot
7. hole of motor terminal box If the connection is loose it can cause bodily injury or electrical fire 22 GA01423 0102 11 2004 You can change to 208 230 V or 380 460 V connection by changing the bus bars It is wired to 208 230 V connection when delivered to you If you want to change to 380 460 V connection remove electric source terminal M 4 nut and change the bus bars as illustrated in Figure 15 Connect the power cord through the cable gland on the bottom side of Terminal Box Connect L1 L2 L3 to U1 V1 W 1 terminals of the motor respectively Activate the emergency stop by the main disconnect switch or breaker Protect the motor with a breaker Be sure to ground Connect a ground wire to the ground terminal in motor terminal box Failure to ground can cause bodily injury Such as electric shock Use a power cord and ground wire rated sufficiently Use round type terminal Fit cable gland Connect ground wire to ground terminal After each modification of power supply cable wiring a new electrical safety test has to be done according to the national rules 200 200 208 230 380 415 460 Hz 50 60 60 60 50 50 60 Three phase specification Recommended breaker capacity A SC 15 D 1 8 2 2 2 2 2 2 1 1 1 2 1 2 SC 30D 3 1 3 2 3 0 2 9 1 8 1 9 1 7 Installation Warning Warning GA01423 0102 11 2004 23 Installation Electric source M4 Ground terminal Cable gland
8. maintenance interval is based on 5 40 ambient temperature and 25 average yearly temperature Shorten the maintenance interval if the ambient temperature is higher Otherwise the pump may fail prematurely The maintenance schedule assumes the pump is exposed to clean gas You must shorten the maintenance interval when pumping vapor since vapor temperature disposal volume disposal frequency and substances in the vapor influence the pump s operation 32 GA01423 0102 11 2004 Maintenance Fan Electric shock Electric OFF during inspection and maintenance Fan Cover SC 5 D 15 D A Electric OFF Fan Cover Fan Electric shock during inspection and maintenance QN Fig 26 GA01423 0102 11 2004 33 Maintenance 4 1 Table Maintenance When the maintenance interval has been reached contact Leybold to arrange the required maintenance Never disassemble reassemble or alter the pump yourself We are not responsible for any accidents caused by disassembly assembly or alteration which was done by the user or non specialist Maintenance interval Where to inspect Yearly or every Biennially or every every 400 times Remarks 8 000 hr 16 000 hr vapor pumping Needle bearing FS 2 grease A e A Needle bearing OS grease A Ball bearing FS 1 A Needle bearing Pin crank grease A O ring Pin crank Needle bearing A Spider Seal Pin crank Needle bearing Shaft seal 2 FS 2 Sha
9. nut Terminal section Fig 16 Electrical connection SC 30 D 200 V Caution 24 GA01423 0102 11 2004 Rotation direction of pump is clockwise viewed from motor side Rotation direction plate e HHS E Rotation direction HIT CETT ag L mes Fig 17 Check rotation direction after wiring Fig 18 Avoid dropping foreign matter inside Operate pump with inlet opened and check that air comes out from out let If you plan to switch the pump ON OFF with remote control check the pump s rotation direction before connecting it to the vacuum system When checking rotation avoid dropping foreign matter into the inlet Dropping foreign matter into the pump can cause failure If the rotation is wrong ensure that the incoming power is OFF and then interchange two of the input leads Purge valve Chamber p Vacuum pump Isolation valve Automatic valve Fig 19 Connection to vacuum system 2 5 Connection to vacuum system E Inlet of SC 5 D is NW 25 and outlet is NW 16 E Inlet of SC 15 D is NW 25 and outlet is NW 16 E Inlet of SC 30 D is NW 40 and outlet is NW 25 M Install an isolation valve between the vacuum chamber and the pump s inlet to prevent the drawback of debris from the vacuum pump into the vacuum chamber during start up or shut down We recommend the use of an automatic valve as isolation valve which clo
10. off electric Source Be sure to ground GA01423 0102 11 2004 3 Safety information Do not touch A Avoid moisture Do not alter With a thermal protector Install in a proper location Use designated temperature Conduct periodic maintenance Maintenance after pump is cool Start or stop after closing isolation valve 4 01423 0102 11 2004 Q Q AN AN AN AN A AN Never put fingers or foreign matter into the pump s inlet or the clearance of cooling fins If done it can cause injury Install in an area which is not exposed to moisture such as rain or steam Exposure to moisture can cause electric shock Never alter the equipment Modifications damage the equipment of shorten its lifetime Be sure to check Wiring diagram before connecting a power Supply Failure to do so can result in damage Pumps with single phase motors have an internal thermal pro tector This motor restarts without warning after the protector trips Be sure to switch off the electric power before maintenance or inspection Failure to do so can result in electric shock or bodily injury by rotating objects Install in a proper location W Install on a level foundation an inclination of less than 5 in a location free of dirt or dust from iron stone or wood W in a location free of corrosive gas Failure to install in a proper location can result in damage decrease in performance or shorter lifetime
11. pumping Moisture or solvent has condensed in pump O ring is damaged Air flush port is clogged Connection becomes loose The pump is not level Foreign matter enters inside of Pump Failure of exhaust valve Failure of motor Failure of pump Remedy Inspect and repair Repair or replace Check length and size of cable Inspect and repair Inspect and repair Turn switch ON Replace Inspect connection in thermal box Inspect wiring Inspect voltage Inspect and repair Check tightness of piping Open inlet to atmosphere and operate for a few minutes and then operate for about 24 hours with the inlet closed Install a trap or a filter to prevent water and solvent from entering the pump Replace Clean air muffler Replace Tighten connection Level the pump Inspect and repair Inspect and repair Inspect and repair Inspect and repair Spare parts 6 Spare parts Parts name SC5D SC 15D SC 30D Major service kit 870000499 EK870000500 EK870000501 Minor service kit EK870000496 EK870000497 EK870000498 GA01423 0102 11 2004 37 EC Conformance Declaration We the Leybold Vacuum GmbH declare herewith that the products listed below in the embodiment which we have placed on the market comply with the applicable EC guidelines This declaration becomes invalid if modifications are made to the product without consultation with us Compliance with the EMC guideline requires that the compon
12. reduce the inlet vapor temperature to less than 50 Pumping vapor of over 50 can cause failure 3 3 Pumping vapor air flush operation When pumping vapor open the Air Flush Port If you pump vapor with the Air Flush Port closed condensed moisture remains in the pump resulting in failure Use care to avoid damaging the Air Flush Port especially the air muffler When the Air Flush is open noise level and ultimate pressure increases Purpose of Air Flush The moisture volume drawn into pump varies depending on the tempera ture and pressure in the chamber Pumping humid gas can result in moi sture condensing in the pump This remaining moisture can cause deterio ration of the ultimate pressure or pump failure When the vacuum chamber contains gas with humidity of over 60 96 RH the pump must be operated with the Air Flush open Operating the pump with the Air Flush open remo ves the moisture which allows the pump to reach its ultimate pressure Operation Remove plug Co 2 40 Fit air muffler Remove piug Fit air mutfler SC 15D Air flush port Fig 23 Operate with Air Flush Port opened Never change Air Flush condition ON OFF during operation Open or close the Air Flush Port only after shutting down the pump Opening or closing the Air Flush during operation can cause the pump to fail and cause bodily injury To open the Air Flush shutdown the pump remove
13. 10 10 Torr 10 Inlet Pressure Fig 5 Pumping speed characteristics GA01423 0102 11 2004 11 Description 1 3 3 Outside dimensions MART 319 SC5D 308 123 91 NS ES 180 4 07 mid Fig 6 Dimensional drawing for the SC 5 D GA01423 0102 11 2004 Description SC 15D BM i d I3 Sx rion i alli ri 1 M E i amp 7 IET SUM e foo D o vA nmm W A ju h o i d F Li NN run M uin us NW2Sy Inlet Fla Fig 7 Dimensional drawing for the SC 15 D GA01423 0102 11 2004 13 Description SC 30D OEE mi MANE 2 NOOO 41 4 amp 4 Vig E x Hl Fad Outlet Flange NW25 328 288 Figtures in parentheses are dimensions when inlet and outlet are placed vertically Fig 8 Dimensional drawing for the SC 30 D 14 GA01423 0102 11 2004 Installation 2 Installation 2 1 Check the product M Check that the package is right side up and then open it Caution Check that model of th
14. 15 Installation Be careful about moisture Warning 8N Temperature Ventilation Avoid dust Avoid direct sunshine 16 Ga01423 0102 11 2004 2 2 Operating environment Danger of electric shock Install in an area which is not exposed to moisture such as rain or steam Moisture on electric power connection can cause bodily injury by short circuit or electric shock Danger of explosion and fire Install in an area which is not exposed to explosives flammable gas or other related hazards Otherwise the pump can cause an explosion or fire Operate at ambient temperature of 5 40 Operating outside of this ambient temperature range can cause damage fire or failure Ensure proper ventilation Install in a well ventilated area Poor ventilation can cause abnormal overheating fire or failure since the scroll pump is air cooled Neccessary ventilated air SC5D over 2 m min SC 15D over 4 m min SC 30D over 8 m min Install in a proper location Install in an area which is not exposed to dust or corrosive gas Failure to install in a proper location can result in dama ge or failure Install the pump in an area which is not exposed to debris such as iron stone polishing or wood dust Debris can clog air mufflers reducing the effectiveness of the Air Flush Install in an area which is not exposed to sunshine Direct sunshine can cause high temperature and failure Installatio
15. Leybold SC 5D SC 15D SC 30D Dry Scroll Vacuum Pump OPERATING INSTHUCTIONS GA01423 0102 OIL FREE SCROLL VACUUM PUMP 5 5D SC 15D SC 30 D Part Nos 133 000 133 100 133 001 133 101 133 003 133 002 133 102 133 004 deal qu vacuum products Our Website L 505 812 0037 idealvac com LLeybold idealvac com vacuum Contents Section Page General safety information 3 1 Description via ssvrastyrinesr Soe ee dk dee eee Ge ed 6 1 1 Name ofeach settini vue euer den I E e RE P IV ane EGRE X wg 6 1 2 Order Information us le ed OS acer v ect eves alet 8 1 8 Technical Data is ude natie hig Aad Mish ed Batok Gene de den 9 1 3 1 Motor Related Data se ar Rex a RR RS 10 1 3 2 Performance data aw Ate ELLO ERES 11 1 3 3 Outside diMENSIONS over pU ERE Ru fader We e 12 2 Installation seat aod We an Ea er RR o RR X 15 2 1 Check the product 2 2 Beate ER Bede idi 15 2 2 Operating environment Deb ae a leas se eG Gea 16 2 3 SeHING UP INE pump uode Re ier a ER dre n 17 2 4 Electrical Connectloris xu ua deed ee AC Tau bte ut Vi 18 2 4 1 Singl phase Motors Lus Lar vesc RE Rp ed E UR cst eae Ds 18 2 4 2 Three phase 22 2 5 Connection to vacuum system
16. Use at ambient temperatures of 5 40 C during operation Operating outside of this range can cause damage or shorten lifetime Do not operate when the fan cover is removed Do not operate when the terminal cover is removed Do not operate the single phase pump when its condenser cover is removed Conduct periodic maintenance and inspections Failure to do so can cause damage or shorter lifetime Do the maintenance after the pump has fully cooled down Performing maintenance on a hot pump can cause burns Be sure to close the isolation valve between pump and vacu um system chamber during startup and shutdown If this valve is open debris attached to inside of pump can be drawn back into the vacuum chamber SC5D SC 15D Single phase SC 15D Three phase SC 30 D Single phase SC 30D Three phase Fig 1 Where to attach warning stickers Description Terminal Electric Condenser Cover Shock Cover Condenser H r EEE Th LT Terminal Cover Electric Hour Meter Shock Cover Terminai Electric Hour Meter Cover Cover Shock Terminal Cover Hour Meter Electric Condenser Cover Shock Cover Terminal AN over i Hour Meter ES Always keep warning stickers clean If they become dirty or lost replace them with new ones If you need stickers contact Leybold GA01423 0102 11 2004 5 Description 1 Description 1 1 Name of each section
17. age V 100 115 200 230 Rated current 50Hz A 2 6 1 3 1 6 60 Hz A 2 1 2 2 1 1 1 1 Speed at 50Hz min 1430 1430 1440 60 Hz min 1730 1740 1730 1740 Noise level at im dB A lt 52 with air flush ON opened dB A lt 57 Direction of inlet Vertical Dimensions L x W x mm 308 x 214 x 225 Weight kg 14 Order information 133 100 133 000 Motor Related Data SC 15D Type Single phase Induction motor 4P 3 phase Induction motor 4P Totally Enclosed Totally Enclosed Insulation Class B IP 44 Insulation Class B IP 44 Thermal Protector TP 212 Automatic Reset Type Power consumption KW 0 4 0 4 Voltage V 100 115 200 230 200 208 230 380 415 460 Rated current 50 Hz A 4 8 2 6 2 4 1 6 A 0 9 1 0 60 Hz A 4 8 4 3 2 8 2 4 1 9 1 9 1 8 1 0 Speed at 50 Hz min 1440 1430 1450 1420 1440 1440 60 Hz min 1710 1740 1700 1730 1660 1660 1690 1720 Noise level at 1m dB A lt 58 with air flush ON opened dB A lt 66 Direction of inlet Vertical Dimensions L x W x mm 400 x 252 x 336 370 x 252 x 336 Weight kg 25 23 Order information 133 101 133 001 133 003 10 GA01423 0102 11 2004 Motor Related Data Type Power consumption kW Voltage V Rated current 50 Hz A 60 Hz A Speed at 50Hz min 60 Hz min Noise level at 1m dB A with air flush ON opened dB A Direction of inlet Dimensions L x W x H mm Weight kg Order information SC 30D Single phase Induction motor 4P Totally Enclosed Insulation C
18. aly Leybold Vacuum Italia S p A 8 Via Trasimeno 20128 Milano Sales Phone 39 02 27 22 31 Fax 39 02 27 20 96 41 salesQleybold it Service Phone 39 02 27 22 31 Fax 39 02 27 20 96 41 service leybold it Field Service Base Z Le Capanne 05021 Acquasparta TR Phone 39 0744 93 03 93 Fax 89 0744 94 42 87 service leybold it Sales 49 221 347 1234 Service 49 221 347 1765 sales leybold com service leybold com 01 05 LV_07420_2005 Netherlands Leybold Vacuum Nederland B V Computerweg 7 NL 3542 DP Utrecht Sales and Service Phone 31 346 58 39 99 Fax 31 346 58 39 90 sales netherlands leybold com service netherlands leybold com Spain Leybold Vacuum Espafia S A C Huelva 7 E 08940 Cornella de Llobregat Barcelona Sales Phone 34 93 666 46 16 Fax 34 93 666 43 70 sales spain leybold com Service Phone 34 93 666 49 51 Fax 34 93 685 40 10 Sweden Leybold Vacuum Scandinavia AB Box 9084 SE 40092 G teborg Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 info leybold se Visiting delivery address Datavagen 57B SE 43632 Askim Switzerland Leybold Vacuum Schweiz AG Leutschenbachstrasse 55 CH 8050 Z rich Sales Phone 41 1 308 40 50 Fax 41 1 302 43 73 sales leybold ch Service Phone 41 1 308 40 62 Fax 41 1 308 40 60 America USA Leybold Vacuum USA Inc 5700 Mellon Road Export PA 15632 info leyboldvacuum com Sales
19. e product is one that you ordered M Check that there is no damage If there is any damage file a damage claim with the carrier Remove inlet blank flange and outlet blank flange If you ope rate the pump with blank flanges it can cause damage Check that the Air Muffler for the Air flush port is in the plastic bag SC5D Plastic Bag Clamp Air Muffler Blank Flange Q ring SC 5D OILFREE SCROLL VACUUM PUMP CatNo 133 000 Motor 150 W e C Cycles Hz 50 60 Serial No C3 Displacement mh 5 6 4 ra GmbH 50968 K ln Bonner Str 498 Year 5 1 Germany MADE IN JAPAN 77 c O ring Blank Flange Clamp SC 15D Plastic Ba 3 INLET Clamp LAM Blank Flange Air Muffler ER O ring SC 15 D OILFREE SCROLL VACUUM PUMP CatNo 133001 Motor 0 4 kW O C Cycles Hz 50 60 Serial No Displacement mh 15 18 ra GmbH 50968 K ln Bonner Str 498 Year varkieyP 1 Germany MADE IN JAPAN gt gt O ring Blank Fiange OUTLET SC 30D Plastic Bag r Muffler INLET Blank Flange O ring clamp 2 SC 30 D OILFREE SCROLL VACUUM PUMP CatNo 133 002 Motor 0 6 kW O C Cycles Hz 50 60 Serial No Displacement m3h 30 36 GmbH 50968 K ln Bonner Str 498 Year ra vaL SY 1 Germany MADE IN JAPAN Fig 9 Check the product GA01423 0102 11 2004
20. ents be installed within the system or machine in a manner adapted to EMC requirements The tests are performed on a normal measurement workbench using an arrangement typical for the type of System Date of CE approval year 2004 Designation of the products Scroll Vakuumpumpen Models SC5D Part Nos 133 000 133 100 SC 15 D 133 001 133101 133 003 SC 30D 133 002 133102 133004 The products comply to the following guidelines Machinery Directive 98 37 EG and 98 79 EG Low Voltage Directive 73 23 EWG and 93 68 EG E EC Directive Electromagnetic Compatibility 89 336 EWG 91 263 EWG 92 31 EWG and 93 68 EWG Related harmonized standards B EN 1012 2 1996 B EN 60204 1 1997 B EN 60034 1 A11 1998 2002 Cologne 17 12 Marcus Eisenhuth Member of the Executive Board Product Manager Head of Product Development Leybol Vacuum Leybold Vacuum GmbH Bonner Strasse 498 Bayenthal D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 documentation leybold com www leybold com 38 GA01423_0102 11 2004 Leybol vacuum Declaration of Contamination of Compressors Vacuum Pumps and Components The repair and or servicing of compressors vacuum pumps and components will be carried out only if a correctly completed declaration has been sub mitted Non completion will result in delay The manufacturer can refuse to accept any equipment without a declaration A separate declaration ha
21. ft seal 1 FS 1 G seal FS 2 G seal OS G seal FS 1 only SC 30 D Exhaust valve set O Ring Outlet flange only SC 15 D O ring FS 2 O ring Inlet flange Tip seal set 1 Tip seal set 2 Pin crank set Air flush kit Replace Replace if something goes wrong Note 1 Be sure to use designated DIS exclusive grease Note 2 The maintenance interval is the time interval or running hours whichever is reached first Ga01423 0102 11 2004 4 2 Leybold Service If you send a pump to Leybold indicate whether the pump is free of sub Contamination stances damaging to health or whether it is contaminated If it is contami nated also indicate the nature of hazard To do so you must use a pre printed form which we shall send to you upon request A copy of this form is printed at the end of the Operating Instructions Declaration of Contamination of Vacuum Equipment and Components Form Another suitable form is available from the Leybold homepage www leybold com under the headline support amp download Please attach this form to the pump or enclose it with the pump This Declaration of Contamination is required to meet German Law and to protect our personnel Leybold must return any pumps without a Declaration of Contamination to the sender s add
22. isconnect switch or breaker Protect the motor with a breaker Use power cord and ground wire rated at greater than 10 A Use round type terminal Fit cable gland Connect ground wire to ground terminal After each modification of power supply cable wiring a new electrical safety test has to be done according to the national rules 200 230 V connection 100 115 V connection US wiring Warning GA01423 0102 11 2004 19 Installation This shows 200 230 V connection Ground terminal M5 bolt Cable gland Fig 12 Electrical connection SC 5 D 20 GA01423 0102 11 2004 Electric source M4 nut 100 100 115 200 200 230 230 Hz 50 60 60 50 60 50 60 ti LIG TET Terminal section Chart 1 Single phase specification Recommended breaker capacity SC 5 3 0 2 5 2 5 1 5 1 3 1 9 1 3 D 6 0 6 0 5 4 3 0 3 2 2 7 2 7 SC 15D SC 30 D 10 7 12 5 10 8 5 4 6 0 4 9 5 0 Installation Rotation direction of pump is clockwise viewed from motor side Rotation direction decal Motor Rotation direction Mir f Fig 13 Check rotation direction after wiring Operate pump with inlet opened and check that air comes out from out let If you plan to switch the pump ON OFF with remote control check the pump s rotation direction before connecting it to the vacuum system When checking rotation direction avoid dropping foreign matter Caution into in
23. l name Residues 8 Yes b Yes Yes No d Yes Yes No 2 Are these substances harmful 3 Dangerous decomposition products when thermally loaded C C Which without written evidence of decontamination Components contaminated by microbiological explosive or radioactive products will not be accepted D Legally binding declaration 1 we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level Name of authorised person block letters date signatur of authorised person Leybold Vacuum K ln firm stamp GA01423 0102 11 2004 39 Germany Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 221 347 1234 Fax 49 221 347 1245 sales leybold com Leybold Vacuum GmbH Sales Area North East Branch office Berlin Buschkrugallee 33 1 Obergeschoss D 12359 Berlin Phone 49 30 435 6090 Fax 49 30 435 609 10 sales berlinGleybold com Leybold Vacuum GmbH Sales Area South Southwest Branch office Munic Karl Hammerschmidt Strasse 38 D 85609 Aschheim Dornach Phone 49 89 357 33 90 Fax 49 89 357 33 933 sales muenchen leybold com service muenchen leybold com Leybold Vacuum GmbH Sales Area West Branch office Cologne Emil Hoffmann StraBe 43 D 50996 Cologne Suerth Phone 49 221 347 1270 Fax 49 221 347 1291 sales koelnQleybold com Leyb
24. lass B IP 44 Thermal Protector TP 212 Automatic Reset Type 0 6 100 115 200 230 8 5 4 3 3 9 10 8 6 4 8 4 0 1430 1430 1450 1660 1720 1690 1730 lt 62 lt 70 Description 3 phase Induction motor 4P Totally Enclosed Insulation Class B IP 44 0 6 200 208 230 380 415 460 2 4 1 57 41 68 2 8 26 25 li 1 47 1460 1470 1470 1740 1740 1760 1770 lt 60 lt 68 Horizontal Laterally fitted 448 x 328 x 372 443 x 298 x 397 44 133 102 133 002 372 x 328 x 372 372 x 298 x 397 38 133 004 Can not operate at 115V 50 Hz 208V 50Hz 230V 50Hz 460V 50 Hz 380V 60 Hz or 415V 60 Hz Note 1 Pumping speed remain the same when air flush is ON opened and OFF closed Note 2 Noise level is measured at ultimate pressure in an anechoic room Note 3 Leak tightness is measured when pump is stopped and air flush is OFF closed Note 4 Air Flush is OFF closed when pump is delivered Note 5 Three Phase Motor does not have internal thermal protection Be sure to install thermal protection like a breaker 1 3 2 Performance data 1000 5 SOLE 100 SC 16102012 60H 5 SC 5 D 59 Hz Q 2 2 10 E E D 107 10 10 102 10 10 10 103 10 10 10 10 10 par 10 103 10 107 0 1 10
25. lation valve between the vacuum pump and vacuum chamber during start up and shut down of pump Otherwise debris from the pump can be drawn back into the vacuum chamber When restarting a pump that is already at operating temperature open the purge valve for 3 5 seconds to atmosphere before restarting the pump Otherwise the pump s temperature can become unbalanced causing it to fail Warning Warning Operation GA01423 0102 11 2004 27 Operation 28 Ga01423 0102 11 2004 Caution Proceed as follows to start the pump 1 Close the isolation valve to prevent drawback of debris from the vacu um pump into vacuum chamber Open the purge valve if one is instal led 2 Switch the vacuum pump ON 3 Open the isolation valve close purge valve if one is installed and pump the vacuum chamber 3 2 Pumping Operating the pump continuniously near its ultimate pressure for example backing a turbomolecular pump can cause deposits of foreign matter or moisture in the pump resulting in failure Operate with the Air Flush open see below or close the isolation valve and open the purge valve for 3 5 seconds to atmosphere several times once a day to remove foreign matter from inside the pump Operate at designated temperature When pumping vapor the inlet gas temperature must be less than 50 C When vapor temperature is more than 50 C install a chiller or trap in the piping between the vacuum chamber and the pump to
26. let Dropping foreign matter into the pump can cause failure Foreign matter Fig 14 Avoid dropping foreign matter inside GA01423 0102 11 2004 21 Installation SC 15D 30D Electric source Terminal M4 Nut Terminal block Ground terminal M5 bolt 208 230 V connection 380 460 V connection delivered to you Fig 15 Three phase connection 2 4 2 Three phase motors For SC 15 D 30 D only Warning Be sure to install a reliable main disconnect switch or breaker which meets the IEC standard for emergency stop Failure to do SO can cause damage or fire CE Requirement The 3 phase motor is not protected External protection must be provided Min circuit current capacity of conductors is SC 15 D 3 phase 7 A SC 30 D 3 phase 15 A E Max branch circuit breakers is SC 15 0 15 SC 30 D 15 Warning Protect the motor by installing the recommended breaker Failure to do so can result in injury from electrical shock or fire Use a power cord and ground wire of over 2 mm rated at 7 A 3 phase for SC 15 D rated at 15 A 3 phase for SC 30 D If the cord is underrated it can cause injury from electrical shock or fire Firmly fit proper round crimp style terminal to electric cord with application device and connect to motor terminal If the connection is loose it can cause bodily injury or electrical fire Be sure to connect electric cord to terminal by using cable gland at 20 mm
27. m sg Taiwan Leybold Vacuum Taiwan Ltd No 416 1 Sec 3 Chung Hsin Rd Chu Tung Hsin Chu Taiwan R O C Sales and Service Phone 886 3 5833988 Fax 886 3 5833999 Leybol vacuum 1250 www leybold com
28. n less than 5 Fig 10 Install on a firm level floor 2 3 Setting up the pump The SC D is eaipped crane eyelets for transport Warning Use lifting devices with sufficient carrying capacity Never stand beneath the suspended pump while it is being moved Ji Install on a firm level floor less than 5 inclination Uneven installation can cause failure If the floor is unstable secure the pump by using B 4x 7 mm holes of the pump leg SC 5 D or B 4x 11 mm holes of the pump leg SC 15 D or B 4xM 10 tap screws on the pump base SC 30 D GA01423 0102 11 2004 17 Installation 2 4 Electrical Connections Warning Wiring must be done by a qualified electrician Otherwise electric shock or fire may occur Turn off power Turn off incoming main electricical power before wiring the pump Failure to do so can cause injury from to electric shock Check voltage Check electric power and voltage before doing the wiring Three phase motor has dual voltage 200 380V 50 Hz 208 460 V 60 Hz Single phase motor has dual voltage 100 200V 50 Hz 115 208 230V 60 Hz Check electric source and voltage and wiring 2 4 1 Single phase motors Warning Be sure to install a reliable main disconnect swtich or breaker for emergency stop In addition shut off the SC 5 D by turning off the Switch on the motor Failure to do so can cause damage or fire Warning The single phase motor has an internal thermal protector
29. old Vacuum GmbH Service Center Emil Hoffmann StraBe 43 D 50996 Cologne Suerth Phone 49 221 347 1439 Fax 49 221 347 1945 service leybold com Leybold Vacuum GmbH Mobile after sales service Emil Hoffmann StraBe 43 D 50996 Cologne Suerth Phone 49 221 347 1765 Fax 49 221 347 1944 kundendienst leybold com Leybold Vacuum Dresden GmbH Zur Wetterwarte 50 Haus 304 D 01109 Dresden Service Phone 49 351 88 55 00 Fax 49 351 88 55 041 info leybold dresden de www leybold dresden de Sales and Service Net Europe Belgium Leybold Vacuum Nederland B V Belgisch bijkantoor Leuvensesteenweg 542 9A B 1930 Zaventem Sales Phone 32 2 711 00 83 Fax 32 2 720 83 38 sales belgium leybold com Service Phone 32 2 711 00 82 Fax 32 2 720 83 38 service belgium leybold com France Leybold Vacuum France S A 7 Avenue du Qu bec Z A de Courtaboeuf B P 42 F 91942 Courtaboeuf Cedex Sales and Service Phone 33 1 69 82 48 00 Fax 33 1 69 07 57 38 leybold vacuum leybold fr Leybold Vacuum France S A Valence Factory 640 rue A Berges B P 107 F 26501 Bourg l s Valence Cedex Phone 33 4 75 82 33 00 Fax 33 4 75 82 92 69 marketing valence leybold fr Great Britain Leybold Vacuum UK Ltd Waterside Way Plough Lane GB London SW17 OHB Sales Phone 44 20 8971 7000 Fax 44 20 8971 7001 sales leybold co uk Service Phone 44 20 8971 7030 Fax 44 20 8971 7003 service leybold co uk It
30. oling fins of FS 1 FS 2 Fig 21 Be careful about entanglement Never put your fingers or foreign matter into ventilation holes of the fan cover motor set or clearance between cooling fans of FS 1 and FS 2 If done you can injure your fingers or foreign mat ter can blow into your eyes Warning 26 GA01423 0102 11 2004 Terminal S Cover Q Fan Cover Condenser Cover Fig 22 Never alter equipment Never remove or alter safety equipment or insulation parts Removing or altering this equipment can cause electric shock or bodily injury by rotating objects Do not operate when the fan cover is removed Do not operate when the terminal cover is removed Do not operate the single phase pump when its condenser cover is removed 3 1 Start up Remove blank flanges from the inlet and outlet before starting the pump Operation with blank flanges can cause damage If you will be pumping humid air or condensable vapors open the Air Flush refer to Sec 3 3 before starting the pump as described below The pump takes 6 8 hours to reach its ultimate pressure during its initial start up or after a long idle period Close the inlet isolation valve and continue operation for 6 8 hours opening the purge valve for 3 5 seconds to atmosphere 2 3 times per hour While the pump was off moisture may have entered the pump extending the time needed to reach ultimate pressure Close the iso
31. or 8 GA01423 0102 11 2004 cable with Schuko plug cable with Schuko plug cable with Schuko plug cable with NEMA plug cable with NEMA plug cable with NEMA plug Part No 133 000 133 001 133 002 183 003 133 004 133 100 133 101 133 102 HH GI Motor Description 1 3 Technical Data Model SC5D SC 15D SC 30D 50 Hz 60 Hz 50Hz 60Hz 50Hz 60Hz Displacement min 90 108 250 300 500 600 swept volume m h1 5 6 48 15 18 30 36 cfm 3 1 3 8 8 8 10 6 17 6 21 2 Pumping speed l min 80 93 210 230 420 500 m 4 8 6 2 13 6 16 4 26 3 31 5 cfm 2 8 3 6 8 9 6 15 4 18 5 Ultimate pressure Pa lt 5 lt 1 6 lt 1 0 mbar lt 0 05 lt 0 016 lt 0 01 Torr lt 0 037 lt 0 012 lt 0 0075 Leak tightness mbar 1 s lt 1 0 108 lt 1 0 10 lt 1 0 104 Max inlet pressure Atmospheric pressure Ambient operating 5 40 5 40 5 40 temperature range Inlet connection NW 25 25 40 Outlet connection NW 16 16 25 Cooling system Air cooling Protection class IP 20 20 20 Class of equipment Class 1 Others With hour meter and air flush Water vapor handling g day 5 25 25 at 25 C humidity 60 with opened air flush I min 9 10 10 GA01423 0102 11 2004 Description 1 3 1 Motor Related Data Type Motor Related Data SC5D Single Phase Induction Motor 4P Totally Enclosed Insulation Class B IP 44 Thermal Protector TP 212 Automatic Reset Type Power consumption 150 Volt
32. ress The pump must be packed in such a way that it will not be dama Warning ged during shipping and so that any contaminants are not relea sed from the package 4 3 Disposal The pump may be contaminated by the process or by environmental influ Contamination ences In this case it must be decontaminated in accordance with the rele vant regulations Leybold offers this service for fixed prices Further details are available on request Contaminated parts can be detrimental to health and environ Warning ment Before beginning to work find out whether any parts are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Separate clean components according to their materials and dispose of If you send a pump to Leybold mind the regulations given in Section 4 2 Leybold Service GA01423 0102 11 2004 35 Troubleshooting Fault Pump does not rotate only SC 5 D only SC 5 D Ultimate pressure is Insufficient Abnormal sound vibration 36 Ga01423 0102 11 2004 5 Troubleshooting If the pump malfunctions please refer to the following chart for help in sol ving the problems If you cannot solve the problem please contact Leybold Possible cause Breaker malfunction Wiring becomes loose or cut Voltage drops Motor malfunctions Pump malfunctions Switchis turned OFF ON OFF switch is damaged Termal protector trips Air leaks for
33. s to be copleted for every single component This declaration may be completed and signed only by authorised and qualified staff Customer Dep Institute Address Person to contact Phone Fax Order number of customer Reason for returning applicable please mark repair O chargeable warranty Austausch chargeable U warranty O DKD calibration 0 Factory calibration restoring goods because of following reason O rent loan O for credit U against exchange exchange already received arranged A Description of the equipment machine or component Ancillary equipment Type Part number Serial number Type of oil used B Condition of the equipment No Yes No Contamination No Yes 1 Has the equipment been used QO XM oxic 2 Drained Product service fluid corrosive m m 3 All openings sealed airtight microbiological 4 Purged m explosive If yes which cleaning agent radioactive d d and which method of cleaning other harmful substances C Description of processed substances Please fill in absolutely 1 What substances have come into contact with the equipment Trade name and or chemical term of service fluids and substances processed properties of the substances According to safety data sheet e g toxic inflammable corrosive radioactive Tradename Chemica
34. safety pre cautions described in this section and throughout the manual This product must be operated and maintained by trained personnel only Consult local state and national agencies regarding specific requirements and regulati ons Address any further safety operation and or maintenance questions to your nearest Leybold Vacuum office Failure to observe the following precautions could result in serious personal injury Never pump toxic explosive flarmmable corrosive gases chemicals solvents or powders Flowing substances explosion or fire can cause bodily injury Install in an area without explosive or flammable substances Oherwise it can cause explosion or fire Wiring must be done by a qualified electrician Otherwise electric shock may occur Prevent short circuit with ground fault circuit interuptor GFCI of proper capacity Failure to do so can result in electric shock or fire Ask specialist to perform repairs If not it can cause failure damage or shorter lifetime Trained customers may perform maintenance themselves Be sure to install a main disconnect switch Failure to do so can result in damage fire or injury Be sure to disconnect the electric source before wiring or inspection Failure to do so can result in electric shock or damage by the rotating fan Be sure to ground Failure to ground can result in electric shock or fire Safety information Warning Caution Warning Cut
35. ses during power failurer to prevent the drawback of debris from in side the pump into the vacuum chamber E Install a purge valve between the isolation valve and the pump s inlet Opening this purge valve during operation removes dirt and water vapor from the pump E Use the clean connecting tubing between vacuum chamber and vacu um pump We recommend the use of flexible tubing between inlet of pump and the vacuum chamber so that the pump s vibration is not transmitted to the vacuum chamber When connecting an exhaust line to the outlet of the vacuum pump we recommend the following maximum straight length SC5D pump model 30 meters of NW 16 tubing SC15D pump model 5 meters of NW 16 tubing SC30D pump model 15 meters of NW 25 tubing B Make sure that the exhaust line is not clogged during operation Make sure that the pressure at the pump s outlet does not exceed atmospheric pressure Installation Outlet duct GA01423 0102 11 2004 25 Operation 3 Operation SC 30D Fig 20 Never pump hazardous gases Do not pump hazardous gases to humans or explosive flamma Warning ble toxic or corrosive gases or substances which contain chemi cals solvents or powders Pumping such gases can cause bodi ly injury from exposure to harmful substances explosion or fire Fingers Ventilation hole Foreign Ventilation hole for fan cover C CJ Fingers Foreign matter i Q for motor set Clearance of co
36. the plug from the Air Flush Port and screw the air muffler into the Air Flush Port To close the Air Flush shutdown the pump see below remove the Air Muffler from the Air Flush Port and replace it with the plug Lightly tighten the plug with a wrench When supplying nitrogen gas or dry air to the air flush port set the pressure equivalent to atmospheric pressure while keeping the flow less than B 9 min forthe SC 5 D or B 101 min for the SC 15 D and SC 15 D Exceeding 9 or 10 l min air flush can cause pump failure Air flush port SC5D Fit air muffier fe Remove plug SC 30D Caution Caution GA01423 0102 11 2004 29 Operation SC5D a iL SC 15 D Air muffler tee Female branch Outlet flange Air Flush Port SC 30D Air muffler Housing Female branch tee Flush Port Air Pipe Inlet flange Fig 24 Position of Air Flush Port GA01423 0102 11 2004 3o 3 4 Shut down After vapor is pumped continue to operate with the Air Flush open for over one hour If you close Air Flush Port or stop the pump soon after vapor is pumped condensed moisture remains in the pump resulting in failure W To prevent the drawback of debris from the vacuum pump into vacuum chamber during shutdown close the isolation valve open the purge valve if one is installed Switch the vacuum pump off When the pump stops
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