User Manual MP129E - Physik Instrumente
Contents
1. cccccsesseceeeeeesseeeeeeeeeeeeees 1 1 2 Symbols and Typographic CONVENTIONS ccccseeeccceceeeeeeeeeeeeeeeeeeeesaeeeeeeeeaaaeeeess 1 1 3 DE TNO eta een wetness E E E E E 2 1 4 VU CS eh cree a E E E E EEA 2 1 5 Other Applicable DOCUMENTS cccccccecessseeseeeceeeeeeeaeeeeeeeeeeeessueeseeeeeeeesssaaaaeess 3 1 6 Downloading Manuals ccccseeeececeeeeeeceeeeeeeeeeeeeeseaseeesseeeeeeeaseeesseeeeessaneesenaeeees 3 2 Safety 5 2 1 Mendog UGE serea E E qecisooce cassava qeetosaeaneatenedodeus 5 2 2 General Safety Instructions 2 0 cccccccccccceeeceeeeseeceeeeeeeeeeseeeceeeeessueeaseeeeeeeessaaaeeess 5 2 3 Organizational MEASUMES cccccssseececccsesseceecceeeseceeecaaeseceeseaaaeeeeessuaaeeeeeesaaaeeeees 6 3 Product Description 7 3 1 POGUE CG en e ee ee ee 7 3 2 Product LABEING une ee 8 3 3 Scope of Delivery anne ee ee en ie 9 3 4 Suitable Drive Electronics 200002220000200nn0ennnnnnennnnnnnnnnnnnnennnnnnnennnnnnnnnen 10 4 Unpacking 11 5 Installation 13 5 1 General Notes on Installation u0s22222200002220nnnnennnnnnnneennnnnnnnnennnnnnnneennn 13 5 2 Mounting the Q 632 on a Surface and Connecting Itto a Protective Earth ONU TO ee E T re 14 5 3 Setting Up a Multi Axis System cccccccseeeeeeeceeeeeeeeeeeeeeceeessaeeeeeeessaaeeeeessaaees 18 5 4 Affixing the Load to the Q 632 uuessssesssnnnessnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nennen 19 5 52. 3 3 Scope of Delivery mao Components Q 632 Rotation stage according to order RPS32 5003 Screw set for mounting the Q 632 consisting of 21 5 m6 x 4 A2 dowel pins ISO 8734 4 M2x4 1 4567 machine screws 4 M2x6 A2 socket head cap screws ISO 4762 7202500042 Adapter cable for connection to the E 870 drive electronics 0015 Sub D 15 f to Mini DIN 4 m 0 3 m MP129E Manual for Q 632 rotation stage Q 632 Miniature Rotation Stage MP129E Version 1 0 0 9 3 Product Description i 3 4 Suitable Drive Electronics E 870 10 PlIShift Piezomotor PiezoMike Drive Electronics 1 Channel OEM Board E 870 11 PIShift Piezomotor PiezoMike Drive Electronics 1 Channel OEM Board with Connector Strip E 870 1G PIShift Piezomotor PiezoMike Drive Electronics 1 Channel Bench Top Device E 870 21 PlShift Piezomotor PiezoMike Drive Electronics 2 Channels OEM Board with Connector Strip E 870 2G PIShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device E 870 41 PlShift Piezomotor PiezoMike Drive Electronics 4 Channels OEM Board with Connector Strip E 870 4G PlShift Piezomotor PiezoMike Drive Electronics 2 Channels Bench Top Device gt To order contact our customer service department p 33 10 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage 4 Unpacking PIEZO NANO POSITIONING WWW PI WS 4 Unpacking 1 Unpack the Q 632 with care 2 Compare the contents against th
3. 1 0 0 MP129E Q 632 Miniature Rotation Stage 2 Safety PIEZO NANO POSITIONING WWW PI WS 2 Safety In this Chapter Mendod USG nenn ae nee ee ee nee 5 General Safety Instructions 0uss002200040000neennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnn 5 Organizational Measures uuussss0000nnnnnneeennnnnnnnnnnnnennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 6 2 1 Intended Use The Q 632 is a laboratory device as defined by DIN EN 61010 1 It is intended to be used in interior spaces and in an environment which is free of dirt oil and lubricants In accordance with its design and realization the Q 632 is intended for positioning adjusting and rotation of loads in a rotational axis at different velocities in interval operation The Q 632 uses a PIShift piezomotor as a drive When at rest the drive is self locking requires no current generates no heat and maintains its position The Q 632 can be mounted in any orientation The specifications of the Q 632 apply to horizontal mounting p 35 The Q 632 is not intended for applications in areas in which a failure would present severe risks to human beings or the environment The Q 632 is not intended for continuous operation For further information on the operating conditions of the Q 632 see Technical Data p 35 The intended use of the Q 632 is only possible in combination with suitable drive electronics that provides the required operating
4. classifications p 37 NOTICE Damage from collisions Collisions can damage the rotation stage the load to be moved and the environment gt Make sure that no collisions are possible between the rotation stage the load to be moved and the environment in the motion range of the rotation stage gt Do not place any objects in areas where they can get caught by moving parts gt Stop the motion immediately if an electronics malfunction occurs NOTICE Considerable wear due to high operating frequency A high operating frequency in step mode can cause considerable wear on the mechanical system gt Reduce the value of the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 on the drive electronics see user manual of the electronics gt Reduce the operating time with a high operating frequency p 37 gt Stop the motion immediately if an electronics malfunction occurs NOTICE Increased wear due to small working range gt If you only move the Q 632 over a small working range lt 20 perform at least one full rotation of the moving platform at regular intervals Q 632 Miniature Rotation Stage MP129E Version 1 0 0 25 6 Start Up and Operation i I INFORMATION The drive electronics is adapted via parameters to the Q 632 Changing parameter values can cause undesirable results gt Only operate the Q 632 when the parameters of t
5. M2 machine screw into the inner counter sunk hole c Tighten the machine screw with a maximum torque of 35 Nem d Make sure that the screw head does not protrude from the counter sunk hole e Repeat the steps a to d for the other three inner counter sunk holes in the base body of the Q 632 4 Check that the Q 632 fits on the Q 522 without backlash 5 4 Affixing the Load to the Q 632 NOTICE Impermissibly high forces and torques Impermissibly high forces and torques that are applied to the moving platform can damage the Q 632 gt For affixing type and mass of the load observe the maximum permissible forces according to the specifications p 35 gt Avoid tilting torques at the moving platform Q 632 Miniature Rotation Stage MP129E Version 1 0 0 19 5 Installation gt I NOTICE Screws that are too long The Q 632 can be damaged by screws that are too long gt Note the depth of the mounting holes in the moving platform p 38 gt Only use screws of the correct length for the respective mounting holes Figure 7 Black arrows indicate locating holes for alignment of the load whereas white arrows indicate threaded holes for affixing the load Prerequisites v You have read and understood the general notes on installation p 13 v You have properly mounted the Q 632 on a surface p 14 or on a Q 522 stage p 18 The Q 632 is not connected to the drive electronics You have prepare
6. can warp the Q 632 Warping reduces the accuracy gt Mount the Q 632 on an even surface The recommended evenness of the surface is lt 2 um gt For applications with great temperature changes Only mount the Q 632 on surfaces that have the same or similar thermal expansion properties as the Q 632 14 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation INFORMATION The contact of the Q 632 with the protective earth conductor is made as follows gt Holes that are used for attaching the Q 632 Four counter sunk holes with 2 2 mm 4 2 mm in the base body of the Q 632 Alternative Four counter sunk holes with 2 2 mm 3 2 mm in the base body accessible by turning the moving platform gt Suitable conductive screws p 9 gt Protective earth conductor connected to the surface on which the Q 632 is mounted INFORMATION gt Observe the applicable standards for mounting the protective earth conductor Figure 5 Top side of the Q 632 The rotation stage is mounted on a surface with four screws Options 4 socket head cap screws for outer counter sunk holes or 4 machine screws for inner counter sunk holes Figure 4 Bottom side of the Q 632 Two of the four available locating holes can be used for alignment on a surface Q 632 Miniature Rotation Stage MP129E Version 1 0 0 15 5 Installation PI Prerequisites v v v You ha
7. 2 to the Drive Electronics INFORMATION The Q 632 and the drive electronics can be delivered as a pre configured system gt f a connection assignment is given on the labels of the Q 632 and or drive electronics observe this assignment when connecting the Q 632 Prerequisites v You have read and understood the general notes on installation p 13 v You have installed the E 870 drive electronics v You have read and understood the user manual of the drive electronics v The drive electronics is not connected to the supply voltage Q 632 Miniature Rotation Stage MP129E Version 1 0 0 21 5 Installation gt I Tools and accessories If the drive electronics has a Mini DIN 4 socket models E 870 x1 E 870 xG 7202500042 0015 adapter cable included in the scope of delivery p 9 If the drive electronics has a connector strip model E 870 10 Suitable adapter from Sub D 15 f to the connector strip The pin assignment of the J10 connector strip 2x4 pin can be found in the E870T0001 Technical Note f you need a suitable adapter contact our customer service department p 33 Connecting the Q 632 to E 870 drive electronics with a Mini DIN 4 socket 1 Connect the Q 632 with the adapter cable Connect the Sub D 15 m connector of the Q 632 with the connector of the adapter cable Sub D 15 f 2 Connect the adapter cable with the drive electronics Connect the Mini DIN 4 connector of the
8. 581 2012 Q 632 Miniature Rotation Stage MP129E Version 1 0 0 43
9. Connecting the Q 632 to the Drive Electronics u 4 04444Bnnnn nennen 21 6 Start Up and Operation 23 6 1 General Notes on Start Up and Operation ccccccseeeeecseeeeeeeeeeeeeeeeseeeenaeeees 23 6 2 Starting Up the Rotation Stage uuuss02004000ennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn nn 26 6 3 Operating Parameters of the Q 632 uuuuuesssnnnsssnnnnnneennnnnnnnnnnnnnnnnnnnnnnnnnnnn nennen 27 Maintenance 29 7 1 General Notes on Maintenance ccccccccccceccecceccececceceuccececeeeeecneceeeersesaeseneeees 29 7 2 Performing a Maintenance RUN ccccccsseecceceeseeecaeeeeeseeeeeeeaseeessaeeeessaeeeeenaees 29 7 3 Cleaning the Q 632 uuuueessssnsssnannnneennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnennnnnnnnnn 29 Troubleshooting 31 Customer Service 33 Technical Data 35 10 1 SPCC ONE ee ee een een ge 35 10 1 1 Data Table a nee nn ee en euere 35 10 1 2 Maximum Ratings nennen een poemeamaeisiend 36 10 1 3 Ambient Conditions and Classifications ccccceceececceceeeeceeeeees 37 10 2 Operating Times neuen 37 10 3 BTS ION a a ee ee 38 10 4 Pin ASSIIONMEN een een Nena 39 Old Equipment Disposal 41 EC Declaration of Conformity 43 PIEZO NANO POSITIONING WWW PI WS 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ccccescececeeeeeeeeeseeeeeeeeeeeaaaseeeeeeees 1 Symbols and Typographic Conv
10. PI MP129E Q 632 Miniature Rotation Stage User Manual Version 1 0 0 Date 24 02 2015 This document describes the following product Q 632 900 Q Motion Rotation Stage gt 360 Rotation Range without Position Sensor for Open Loop Operation 6 mNm Torque 30 mm Turntable Diameter Piezoelectric Inertia Drive Physik Instrumente Pl GmbH amp Co KG Auf der Roemerstr 1 76228 Karlsruhe Germany Phone 49 721 4846 0 Fax 49 721 4846 1019 E mail info pi ws PIEZO NANO POSITIONING WWW PI WS PI Physik Instrumente Pl GmbH amp Co KG is the owner of the following trademarks PI PIC PICMA PILine PIFOC PiezoWalk NEXACT NEXLINE NanoCube NanoAutomation Picoactuator Plnano 2015 Physik Instrumente Pl GmbH amp Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente Pl GmbH amp Co KG retains all the rights Use of said text photographs and drawings is permitted only in part and only upon citation of the source Original instructions First printing 24 02 2015 Document number MP129E KSch version 1 0 0 Subject to change without notice This manual is superseded by any new release The latest release is available for download p 3 on our website PIEZO NANO POSITIONING WWW PI WS Contents 1 About this Document 1 1 1 Goal and Target Audience of this User Manual
11. Steps per Second 20000 the rotation stage ID 0Ox1F000600 moves per second with the set operating frequency 28 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance cccccceecsceeeceeeceeeeeecececeeeeeeeceueeaueeeueeaneenseeaeeeaneeaees 29 Performing a Maintenance RUN ccccsssccccseseecceeseecceseeeceeseeecseeeeeseseessseneesssageees 29 Cleaning ihe 6 92 essen ee isn re ei ee ee 29 7 1 General Notes on Maintenance NOTICE Damage due to improper maintenance Improper maintenance can lead to misalignment and failure of the Q 632 gt Only loosen screws according to the instructions in this manual 7 2 Performing a Maintenance Run The maintenance run must comprise at least one full rotation of the moving platform of the Q 632 gt Perform the maintenance run after every 10 million steps 7 3 Cleaning the Q 632 Prerequisites v You have disconnected the rotation stage from the electronics Cleaning the rotation stage gt When necessary clean the surfaces of the rotation stage with a cloth that is lightly dampened with a mild cleanser or disinfectant gt Do not use any organic solvents Q 632 Miniature Rotation Stage MP129E Version 1 0 0 29 8 Troubleshooting PIEZO NANO POSITIONING WWW PI WS 8 Troubleshooting Drive electronics from PI Drivecleciion
12. adapter cable with the Mini DIN 4 socket of the drive electronics 3 Take suitable measures to prevent the adapter cable from being accidentally disconnected Connecting the Q 632 to E 870 drive electronics with a connector strip gt Connect the Q 632 to the connector strip of the drive electronics with a suitable adapter 22 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage 6 Start Up and Operation PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation In this Chapter General Notes on Start Up and Operation ccccccecsseseeeeeeeeeseaeeeeeeeeeeeessuaaeeeeeeees 23 Starting Up the Rotation Stage cccccccccccssssccccsseceeeeeeecesseeeceeseeeeessegeeesseseeessaeeeeeas 26 Operating Parameters Of the Q 632 uuessssssunessnnsnnnnnsnnnnnnnnnnnnnnnnnnnennnnnnnnnennnnnnnneennn 27 6 1 General Notes on Start Up and Operation Risk of electric shock if the protective earth conductor is not connected If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the Q 632 in the case of malfunction or failure of the system If touch voltages exist touching the Q 632 can result in minor injuries from electric shock gt Connect the Q 632 to a protective earth conductor p 14 before start up gt Do not remove the protective earth conductor during operation gt If the protective earth conductor has to be removed temporarily e g in the case of
13. cal Data 10 Technical Data In this Chapter IC CC ION Seen aa an Dane en ae nee nee 35 CS AA Tide aS 37 DIMENSION essen ae re En een gene nee ae ne rede 38 PASSIONE I rasen ee een ee Dan ee ed 39 10 1 Specifications 10 1 1 Data Table Preliminary Data Motion and positioning Active axis Rotation range Resolution Min incremental motion Maximum velocity open loop Mechanical properties Load capacity Holding torque de energized Torque Length Width Height Turntable diameter Q 632 Miniature Rotation Stage MP129E Version 1 0 0 35 10 Technical Data I Preliminary Data Drive properties Motor type Miscellaneous Operating temperature range Material Mass without cable Cable length Connector Recommended controller Ask about custom designs Open loop The Q 632 stage series replaces the RPS 32 series The specifications were determined on a surface with an evenness of 2 um 10 1 2 Maximum Ratings The Q 632 rotation stage is designed for the following operating data Maximum Operating Maximum Maximum Power Operating Consumption Frequency 36 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 1 3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the Q 632 Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa
14. d the load so that it can be affixed to the moving platform for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 38 The distance between the center of gravity of the load and the center of the moving platform is as small as possible in all directions Four points are provided for affixing the load to the moving platform If you use locating pins for aligning the load You made two to four locating holes of 1 5 mm H7 in the load for accommodation of locating pins 20 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS Tools and accessories 4 M2 screws of suitable length p 38 Suitable tools for fastening the screws Optional 2 to 4 locating pins of suitable length for locating holes with 1 5mm H7 Affixing the load to the Q 632 1 Align the load on the Q 632 so that the mounting holes in the load and the holes in the moving platform overlap If you use locating pins to align the load a Insert the locating pins into the locating holes in the moving platform or the load b Place the load on the moving platform so that the locating pins are inserted into the corresponding locating holes on the other side 2 Affix the load using the screws Maximum torque 35 Ncm 3 Check that the load fits on the moving platform of the Q 632 without backlash 5 5 Connecting the Q 63
15. e center of gravity of the load and the center of the moving platform is as small as possible in all directions Unfavorable load mounting Only operate the Q 632 in a clean environment and within the permissible ambient conditions p 37 Replace the Q 632 and make sure that the Wear of the drive operating parameters of the electronics are adapted to the rotation stage Unsuitable ambient conditions Carefully release the blockage by manually Drive is blocked turning the moving platform back and forth Contact our customer service department p 33 lf the problem that occurred with your system is not listed in the table above or cannot be solved as described contact our customer service department p 33 32 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 9 Customer Service 9 Customer Service For inquiries and orders contact your PI sales engineer or send us an e mail info pi ws If you have questions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or the software if present Operating system on the PC if present The latest versions of the user manuals are available for download p 3 on our website Q 632 Miniature Rotation Stage MP129E Version 1 0 0 33 PIEZO NANO POSITIONING WWW PI WS 10 Techni
16. e items covered by the contract and against the packing list 3 Inspect the contents for signs of damage If parts are missing or you notice signs of damage contact PI immediately 4 Keep all packaging materials in case the product needs to be returned Q 632 Miniature Rotation Stage MP129E Version 1 0 0 11 PIEZO NANO POSITIONING WWW PI WS 5 Installation 5 Installation In this Chapter General Notes on Installation ccccccccsssscceecceseceeeeeeeseceeeeaeeeeceeeeeeaeeeeeeeeeeeeseesaaees 13 Mounting the Q 632 on a Surface and Connecting It to a Protective Earth Conductor BE NEL eva enna EEEE E N EEES E EE E E EEA E EEE T 14 Setting Up a Multi Axis System uuesssssssssnnnneeennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 18 Affixing the Load to the Q 632 ssssessesssessssssssessessssssssssessseeseseesetseeseseeeeeeens 19 Connecting the Q 632 to the Drive Electronics uuuuuuuuseeeeennnnnnnnnnnnnnnnnnnnnnnnnnnnnnnn 21 5 1 General Notes on Installation NOTICE Heating up of the Q 632 during operation An The heat produced during operation of the Q 632 can affect your application gt Install the Q 632 so that the application is not impaired by the dissipated heat gt Ensure sufficient ventilation at the place of installation gt Make sure that the complete bottom side of the Q 632 is in contact with the surface on which the Q 632 is mounted NOTICE U
17. e sure that the parameters of the E 870 drive electronics have been correctly set see Operating Parameters of the Q 632 p 27 2 Provide the control signal required for operating the system Details can be found in the E870T0001 or E870T0002 Technical Note 3 If necessary Adapt the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 to your application see also Operating Time p 37 6 3 Operating Parameters of the Q 632 The following table lists the settings for the parameters of the E 870 drive electronics Further information on the parameter settings is found in the Operating Time section p 37 Parameter Parameter in E 870 Drive Electronics in E 870 Drive Electronics De EN TEE voltage ae Upper Supply Voltage upper limit ID 0x1F000000 Operating voltage PIShift Lower Supply Voltage lower limit ID 0x1F000100 Charging current PIShift Forward Current 0 2 A during forward ID 0x1F000200 motion Charging current PIShift Backward Current 0 2 A during backward ID 0x1F000300 motion Operating frequency PIShift Frequency 20000 Hz in step mode ID 0x1F000400 Duty cycle of the PIShift Charge Cycle 1 current source during D 0x1F000500 the output of one period of the modified sawtooth signal in step mode Q 632 Miniature Rotation Stage MP129E Version 1 0 0 27 6 Start Up and Operation i I Number of steps that PIShift
18. een assigned The cable shield is connected to the connector shell Q 632 Miniature Rotation Stage MP129E Version 1 0 0 39 11 Old Equipment Disposal PIEZO NANO POSITIONING WWW PI WS 11 Old Equipment Disposal In accordance with the applicable EU law electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU When disposing of your old equipment observe the international national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente Pl GmbH amp Co KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005 free of charge If you have old PI equipment you can send it postage free to the following address Physik Instrumente Pl GmbH amp Co KG Auf der R merstr 1 D 76228 Karlsruhe Germany Q 632 Miniature Rotation Stage MP129E Version 1 0 0 41 12 EC Declaration of Conformity PIEZO NANO POSITIONING WWW PI WS 12 EC Declaration of Conformity For the Q 632 an EC Declaration of Conformity has been issued in accordance with the following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Safety Low Voltage Directive EN 61010 1 2010 EMC EN 61326 1 2013 RoHS EN 50
19. entions ccccccccccccccecssesseecceeeeeeeueeeeeeeeeeessueaeeeeeeeees 1 B TION AE E E E E E E E EEE IRRE taut INNEREN E EN 2 PQ CS e E E EIEHENER PEFRIONE REIS EEE 2 Other Applicable DOCUMENHS ccccccecceseeeeeeceeeeeseaeeeeeeceeeeeesaeeseeeceeeeeesaaeeeeeeeeeeeeeaas 3 Downloading Manuals eiascncaceasecsananssiseacadsmssieitsasientectasautansnsaGhactdanele tsinnnedieasawinnannaiieacndaanieart 3 1 1 Goal and Target Audience of this User Manual This user manual contains the information needed for the intended use of the Q 632 Basic knowledge of motion control concepts and applicable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual r i Dangerous situation If not avoided the dangerous situation will result in minor injury A gt Actions to take to avoid the situation NOTICE Dangerous situation If not avoided the dangerous situation will result in damage to the equipment gt Actions to take to avoid the situation Q 632 Miniature Rotation Stage MP129E Version 1 0 0 1 1 About this Document gt I INFORMATION Information for easier handling tricks tips etc Symbol Label Meaning 1 Action consisting of several steps whose sequential 5 order must be observed gt Action consisting of
20. gt Only operate the Q 632 when the operating voltage is properly connected see Pin a e A e p 39 Operating frequency too high NOTICE An operating frequency that is too high can cause damage to the Q 632 gt Only operate the Q 632 with controllers drivers and original accessories from PI gt Do not exceed the operating frequency range p 36 for which the Q 632 is FOR NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the rotation stage gt When the Q 632 is not used switch off the electronics 24 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation NOTICE Destruction of the piezo actuator by electric flashovers The use of the Q 632 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and conductive materials such as metal dust In addition electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air gt Avoid operating the Q 632 in environments that can increase the electric conductivity gt Only operate the Q 632 within the permissible ambient conditions and
21. he drive electronics have been correctly set see Operating Parameters of the Q 632 p 27 INFORMATION The PIShift drive develops noises in step mode The noise development depends on the current step frequency 6 2 Starting Up the Rotation Stage INFORMATION If the parameters of the drive electronics are not adapted to the Q 632 and the application load orientation of the Q 632 the Q 632 will either not move or not move satisfactorily gt Only operate the Q 632 when the parameters of the drive electronics have been correctly set see Operating Parameters of the Q 632 p 27 gt Pay particular attention to the parameter settings for operating voltage and operating frequency INFORMATION The values of the PIShift Steps per Second parameter ID 0x1F000600 and the PIShift Frequency parameter ID 0x1F000400 should be identical for optimum drive performance Further information can be found in the user manual of the electronics Prerequisites v You have read and understood the general notes on start up and operation p 23 The Q 632 has been installed properly p 13 The E 870 drive electronics has been properly installed and all connections on the E 870 have been set up see E870T0001 Technical Note or E870T0002 Technical Note 26 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 6 Start Up and Operation Starting up the Q 632 with E 870 drive electronics 1 Mak
22. installed started up operated maintained and cleaned by authorized and appropriately qualified personnel 6 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 3 Product Description In this Chapter Product VIEW ernennen ara a E ae ae re RESET E 7 POCU TAS MAG ass ee es beoatceeseceainet N 8 COS Ol DEINEN reset esse nee nee nee ee ee 9 Suitable Drive El CtroOnics ccccccccccecceccecceccecceeceeceeceeceecneeaeeaeeaeeceeceeceesuecuesuesueeeeeaees 10 3 1 Product View Figure 1 Q 632 product view 1 Moving platform 2 Base body 3 Motor cable for connection to the electronics The arrow in the figure shows the positive direction of motion Q 632 Miniature Rotation Stage MP129E Version 1 0 0 7 3 Product Description i l 3 2 Product Labeling Figure 3 Q 632 Position of the product labeling example view 8 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 3 Product Description 113064246 Serial number example individual for each Q 632 Meaning of the places counting from left 1 internal information 2 and 3 manufacturing year 4 to 9 consecutive numbers A Warning sign Observe manual Old equipment disposal p 41 AG je oom A CE Symbol for the protective earth conductor marks the position of the holes via which the Q 632 is to be connected to the protective earth conductor
23. modifications reconnect the Q 632 to the protective earth conductor before Starting it up again Burning from hot surface The surface of the Q 632 and its vicinity can heat up during operation Touching the Q 632 and surrounding parts can result in minor injuries from burning gt Cool the Q 632 so that the temperature of its surface and surrounding parts does not exceed 65 C gt If sufficient cooling is not possible Make sure that the hot Q 632 and its Surrounding parts cannot be touched gt If sufficient cooling and protection against contact are not possible Mark the danger zone in accordance with the legal regulations Q 632 Miniature Rotation Stage MP129E Version 1 0 0 23 6 Start Up and Operation i I NOTICE Overheating during continuous operation The highest velocity is achieved at maximum operating frequency however the Q 632 can overheat during continuous operation as a result gt Observe the recommended operating time according to the operating frequency in step mode p 37 gt Ensure sufficient ventilation at the mnie nee Deca eee of installation NOTICE Operating voltage too high or incorrectly connected Operating voltages that are too high or incorrectly connected can cause damage to the Q 632 gt Only operate the Q 632 with controllers drivers and original accessories from PI gt Do not exceed the operating voltage range p 36 for which the Q 632 is specified
24. ng Up a Multi Axis System In a stacked X 8Z system the Q 632 can be mounted as a 0Z axis on a Q 522 X axis Figure 6 Mounting a Q 632 on a Q 522 Prerequisites v You have read and understood the general notes on installation p 13 v The stages are disconnected from the electronics v You have properly mounted the Q 522 stage on a surface and connected it to a protective earth conductor see user manual of the Q 522 v You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories 21 5 m6 x 4 dowel pins ISO 8734 for use as locating pins from the scope of delivery of the Q 632 p 9 4 M2x4 machine screws from the scope of delivery of the Q 632 p 9 18 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage 5 Installation PIEZO NANO POSITIONING WWW PI WS Suitable screwdriver Setting up a multi axis system 1 Insert the two locating pins into the selected locating holes on the bottom side of the Q 632 or in the moving platform of the Q 522 see figure above 2 Place the Q 632 on the Q 522 so that the locating pins are inserted into the corresponding locating holes on the other side 3 Mount the Q 632 on the Q 522 a Manually turn the moving platform of the Q 632 until one of the four inner counter sunk holes 2 2 mm 3 2 mm in the base body is accessible through the largest hole in the moving platform b Insert an
25. nintentional changes in position with vertical mounting If the load exceeds the maximum torque of the drive when the rotation stage is mounted vertically unintentional changes in the position of the moving platform occur Unintentional changes in position of the moving platform can damage the drive the load or the environment gt When a rotation stage is mounted vertically make sure that the installed load is lower than the maximum torque of the drive p 35 Q 632 Miniature Rotation Stage MP129E Version 1 0 0 13 5 Installation gt I Lubricants dirt condensation Dirt oil lubricants and condensation will render the motor drive inoperable NOTICE gt Keep the Q 632 free from lubricants gt re ae UT the Q 632 free from dirt and condensation NOTICE Damage from unsuitable cables Unsuitable cables can damage the electronics gt Only use cables provided by PI for connecting the Q 632 to the electronics INFORMATION The positive direction of motion is a counterclockwise rotation 5 2 Mounting the Q 632 on a Surface and Connecting It to a Protective Earth Conductor NOTICE Protruding screw heads L Protruding screw heads can damage the Q 632 gt Ensure that the screw heads do not protrude from counter sunk holes so that E 112 LSA a eo 1 do not interfere with the stage motion NOTICE Warping of the Q 632 due to mounting on uneven surfaces Mounting the Q 632 on an uneven surface
26. one or several steps whose sequential order is irrelevant List item p 5 Cross reference to page 5 RS 232 Labeling of an operating element on the product example socket of the RS 232 interface Warning sign on the product which refers to detailed information in this manual 1 3 Definition Load capacity Maximum load capacity in the vertical direction when the rotation stage is mounted horizontally The contact point of the load is in the center of the platform 1 4 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ and must not be seen as guaranteed properties 2 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage 1 About this Document PIEZO NANO POSITIONING WWW PI WS 1 5 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals Description E 870 10 E 870 11 E 870 21 E87010001 Technical Note E 870 41 Piezomotor PiezoMike Drive Electronics OEM Board 1 to 4 Channels E 870 1G E 870 2G E 870 4G E870T0002 Technical Note Piezomotor PiezoMike Drive Electronics Bench Top 1 to 4 Channels 1 6 Downloading Manuals INFORMATION lf a manual is missing or problems occur with downloading gt Contact our customer service department p 33 INFORMATION For some products e g He
27. orresponding locating holes on the other side 16 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 5 Installation 3 Mount the Q 632 on the surface Options Mounting with four socket head cap screws Insert one M2 socket head cap screw into one of the four outer counter sunk holes 2 2 mm 4 2 mm in the base body of the Q 632 Tighten the socket head cap screw with a maximum torque of 35 Ncm Make sure that the screw head does not protrude from the counter sunk hole Repeat the steps a to c for the other three outer counter sunk holes in the base body of the Q 632 Mounting with four machine screws Manually turn the moving platform of the Q 632 until one of the four inner counter sunk holes 2 2 mm 3 2 mm in the base body is accessible through the largest hole in the moving platform Insert an M2 machine screw into the inner counter sunk hole Tighten the machine screw with a maximum torque of 35 Ncm Make sure that the screw head does not protrude from the counter sunk hole Repeat the steps a to d for the other three inner counter sunk holes in the base body of the Q 632 4 Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is lt 0 1 Q at 25A 5 Check that the Q 632 fits on the surface without backlash Q 632 Miniature Rotation Stage MP129E Version 1 0 0 17 5 Installation I 5 3 Setti
28. to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Er fM Procciondass I Degree of protection IP20 according to IEC 60529 10 2 Operating Time The operating time and the operating frequency in step mode affect the lifetime of the rotation stage In order to prevent overheating and high wear the operating time with the given operating frequency and 100 duty cycle must not exceed the values given in the following table Operating Frequency in Hz Operating Time 48 V 0 2 A 20000 10 s max 10000 20 s max lt 1000 120 s max For the relevant parameters see Starting Up the Rotation Stage p 26 and the user manual of the electronics used Q 632 Miniature Rotation Stage MP129E Version 1 0 0 37 10 Technical Data r I With 100 duty cycle without heat dissipation 10 3 Dimensions Dimensions in mm Signs that are used to separate decimal places Depth and diameter of holes Period All other dimensions Comma Figure 8 Q 632 900 38 Version 1 0 0 MP129E Q 632 Miniature Rotation Stage PIEZO NANO POSITIONING WWW PI WS 10 Technical Data 10 4 Pin Assignment Connector Sub D 15 m The Sub D 15 m connector transmits the signals of the drive Motor Motor The sign indicates that the corresponding pin has not b
29. ts gt Set the parameters in the E 870 Control PC Functional has been replaced program so that they correspond to the impairment after combination of drive electronics and Q 632 system modification The rotation stage model for details see Operating Parameters of has been replaced the Q 632 p 27 and E870T0001 or E870T0002 Technical Note The cable is not connected correctly or Check the connecting cable is defective Reduce the load Observe the information in the Technical Data section p 35 Excessive load When a rotation stage is mounted vertically make sure that the installed load is lower than the maximum torque of the drive gt Check the settings for the parameters of the drive electronics for details see Operating Parameters of the Q 632 p 27 and E870T0001 or E870T0002 Technical Note Parameters of the drive electronics No or limited motion incorrectly set Operating voltage too low Provide an operating voltage of 48 V Adapt the operating frequency for the step mode for details see Starting Up the Rotation Stage p 26 and E870T0001 or E870T0002 Technical Note Warped base bod gt Mount the Q 632 on an even surface The i recommended evenness of the surface is 2 um Unfavorable operating frequency for step mode Q 632 Miniature Rotation Stage MP129E Version 1 0 0 31 8 Troubleshooting P I Observe the maximum torque when affixing the load p 19 The distance between th
30. ve read and understood the general notes on installation p 13 The Q 632 is not connected to the drive electronics You have provided a suitable surface for the required position and depth of the holes for accommodating the screws and locating pins see Dimensions p 38 The surface must be connected to a protective earth conductor Two locating holes with 1 5 mm H7 and four M2 mounting holes are available in the surface The holes for accommodating the screws have to be sufficiently conductive to ensure the proper functioning of the protective earth conductor For applications with great temperature changes The surface should have the same thermal expansion properties as the Q 632 e g surface made of aluminum The evenness of the surface is lt 2 um You have accounted for the space required for a cable routing free of kinks and in accordance with regulations Tools and accessories RPS32 5003 screw set from the scope of delivery of the Q 632 p 9 21 5 m6 x 4 dowel pins ISO 8734 for use as locating pins 4 M2x4 machine screws 4 M2x6 socket head cap screws ISO 4762 Suitable screwdriver Mounting the Q 632 on a surface and connecting it to a protective earth conductor 1 Introduce the two locating pins into the locating holes on the bottom side of the Q 632 see figure above or in the surface Place the Q 632 on the surface so that the locating pins are inserted into the c
31. voltages The drive electronics is not in the scope of delivery of the Q 632 PI offers suitable drive electronics see p 10 2 2 General Safety Instructions The Q 632 is built according to state of the art technology and recognized safety standards Improper use can result in personal injury and or damage to the Q 632 gt Only use the Q 632 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety Q 632 Miniature Rotation Stage MP129E Version 1 0 0 5 2 Safety Fr I The operator is responsible for the correct installation and operation of the Q 632 2 3 Organizational Measures User manual gt Always keep this user manual available by the Q 632 The latest versions of the user manuals are available for download p 3 on our website gt Add all information given by the manufacturer to the user manual for example supplements or Technical Notes gt If you pass the Q 632 on to other users also turn over this user manual as well as other relevant information provided by the manufacturer gt Only use the device on the basis of the complete user manual Missing information due to an incomplete user manual can result in minor injury and property damage gt Only install and operate the Q 632 after having read and understood this user manual Personnel qualification The Q 632 may only be
32. xapod systems and electronics that are delivered with a CD access to the manuals is password protected The password is stored on the CD Availability of the manuals Password protected manuals FTP download directory Freely available manuals PI website gt Follow the corresponding instructions for downloading Download freely accessible manuals 1 Open the website http www pi portal ws 2 Click Downloads 3 Click the corresponding product category Q 632 Miniature Rotation Stage MP129E Version 1 0 0 3 1 About this Document I 4 Goto the corresponding product code The available manuals are displayed 5 Click the desired manual and save it on the hard disk of your PC or on a data storage medium Download password protected manuals 1 Insert the product CD in the PC drive 2 Switch to the Manuals directory on the CD 3 Inthe Manuals directory open the Release News file including releasenews in the file name 4 Find the user name and the password in the section User login for software download in the Release News 5 Open the FTP download directory ftp pi ftp ws Windows operating systems Open the FTP download directory in Windows Explorer 6 Log in with the user name and the password from the Release News 7 Inthe directory of the corresponding product go to the Manuals sub directory 8 Copy the desired manual to the hard disk of your PC or to a data storage medium 4 Version
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