RAMAN & MicroPL System - Nanoelectronics and VLSI Lab
Contents
1. So for 514nm LASER the accumulation can start from 600nm Coarse Objective Stage Fig 11 Microscope and Stage Fig 12 Fiber optic light source Deepak Ranjan Nayak drnayak ece 1isc ernet in r ee q aV AA Mr TA hye SALAF 2 Fig 13 Fig 14 Lenses for Different LASER source Deepak Ranjan Nayak drnayak ece 1isc ernet in Filters Fig 16 Position of sieges used for 325nm LASER Source Deepak Ranjan Nayak drnayak ece 1isc ernet in a Fig 18 Lense and Detector selection Deepak Ranjan Nayak drnayak ece 1isc ernet in 6 325nm RAMAN and PL Measurement 6 1 Pull the Knob upward and rotate clockwise on the 1 optics column Fig 21 6 2 Push the knob behind the u eye camera inside Fig 18 6 3 Change the objective to LMU 40x NUV 6 4 Change the filters in the LabRAM HR box with the filters of 325nm specification Fig 16 6 5 Change the wavelength option in the control panel of the software to 325nm Fig 10 6 6 Follow the standard procedure for measurements as depicted from 5 1 to 5 26 without changing the above stated settings 7 IR PL Measurement 7 1 Follow the standard LASER settings depending on the used LASER for the equipment 7 2 Set the grating to 600IR on the software window control panel Fig 10 7 3 Check Acquisition PMT ON on the software window tabs 7 4 Set Options gt Unit to nm 7 5 Push the Exit Mirror knob in Fig 18 7 6 Keep the Filtre Colores OG570 in the path2. from the bottom right corner of the software window Fig 10 Set the slit width by changing the Hole input Recommended hole 100um or 200um If the filter is set in the control panel then unselect it by setting it to Set the LASER according to the LASER source that is 514nm For Raman the grating has to be changed to 1800 Select Options Unit gt 1 cm The first entry in the ACQUISITION tab is for the exposure value in seconds to be used for the spectrum and image RTD acquisition Set it to Is Run the Spectrum RTD and use the fine focus on the microscope to get maximum counts The Extended Range Acquisition tab on the top of the software window is for the PIG Run Spectrum Acquisition The range can be set in the From and To entry e g 50 3500 cm range The 3 column on the first row is the exposure time to the CCD Depending on Deepak Ranjan Nayak drnayak ece 1isc ernet in the number of counts the time can be set from Is to 999s The mode has to be multimode Select the Combine Data Adjust Intensity and Run to First Window option 5 24 Select Acquisition Auto Save and entry the details of the Format Destination Folder and File Name in the popped up window 5 25 Select Options Unit gt nm 5 26 Select the Extended Range Acquisition tab on the top of the software window and set the range Generally for the PL the sample is excited at lower wavelength and collected at higher wave length
3. 8 3 3 Rotate the knob anticlockwise to turnoff PS TC 1 CONTROLLER JELECTRO OPTICAL SYSTEMS INC Temperature Setpoint Knob Fig 8 Temperature Controller for InGaAs Detector 4 Starting the Software 4 1 0pen LabSpec5 and move the mouse for it to get initialized which shows Synapse Initialization Gain Updating on window Fig 9 4 2 The working temperature of the CCD is 70 C Select Acquisition gt Detector and SET the temperature to 70 C and check whether the temperature is decreasing by moving the mouse once after 10s This procedure has to be followed even if the CCD is ON Deepak Ranjan Nayak drnayak ece 1isc ernet in Vaal JE File Edit Data Options Acquisition Video Setup Help aa BOE DMs README AKREAVKY BAM OD synapse Initialization Gain Updating Laser Filter Lau b a XYZ Coords heo zilen ix fen m B 2 gt l x100 y 367050 W el 325nm 2 519828 cm Met zfo i For Help press F1 ai Cistat MPT start bse EN Search Desktop el E S 5 35 PM Au ana i Fig 9 LabSPEC software interface Laser Fig 10 Software control panel 5 514nm RAMAN and PL Measurement 5 1 Click the Video tab camera icon on the software window to switch to the video mode 5 2 Turn the LASER OFF from the LabRAM Control Box not from the source Fig 13 5 3 Turn on the Euromex Fiber Optic light Source by rotating the knob CW and adjust the brightness
4. CEN at Indian Institute of Science is capable of performing the following types of measurements UV Visible Raman with 325nm and 514nm LASER using CCD detector gt Photoluminescence PL in o Visible range using CCD with multi window o Near IR NIR using the InGaAs detector 800nm to 1600nm All the above measurements can be done with X Y and Z mapping Components associated with the equipment The instrument consists of four parts 1 Lasers The system by default has an internal slot for HeNe 633nm LASER which is unavailable in the discussed setup It is equipped with two external LASERs those are 514nm and 325nm LASER The Argon 514nm Visible Green LASER is mounted on the extended chassis behind the LabRAM HR system The He Cd UV 325nm LASER is fixed to the table Fig 1 514nm LASER enters the LabRAM HR system through the first optical stand where as the 325nm LASER through the second optical stand Fig 1 2 Microscope Sampling is carried out through a standard optical microscope The present microscope has 5 objectives MPlan N 10x MPlan N 50x MPlan N 100x and MPlanFC N 50x Long Working Distance are for visible light During measurements the focus is done on the sample by using 10x 50x and 100x respectively but the final spectra is taken using 100x If the sample is liquid or powder using 100x for RAMAN or PL may damage the objective and in that case the 50x long working distance objective is used For measur
5. USER MANUAL FOR RAMAN amp MicroPL System Available Under Center of Excellence in Nanoelectronics CEN at ISC Deepak Ranjan Nayak drnayak ece 1isc ernet in IMPORTANT INSTRUCTIONS 1 This manual is a brief step by step instruction guide Refer to the system manual to use any other feature of the software or hardware 2 Before using the equipments read the manual carefully and follow the instructions 3 Before making the reservations for the equipments the user should carefully read the Booking Rules and should abide by them 4 Itis mandatory for the users to make an entry in the log book after using the equipment 5 After measurement is done shutdown LASERS and switch off the main power supply except the CCD power supply 6 Extreme care should be taken while handling the filters and focusing on the sample using 10x objective 7 If you face any problem using the equipment contact the Equipment Owner immediately Deepak Ranjan Nayak drnayak ece 1isc ernet in INTRODUCTION Overview The LabRAM HR UV system is a state of the art RAMAN uPL This spectroscopic system provides high spectroscopic resolution and a unique wavelength range capability that offers both great flexibility and high performance LabRAM HR allows the collection of large area Raman images using the X Y and Z mapping features in seconds minutes The available equipment in the Characterization Lab of Center of Excellence in Nanoelectronics
6. ements using 325nm LASER that is LMU 40x NUV Fig 2 Deepak Ranjan Nayak drnayak ece 1isc ernet in 3 Spectrometer Dispersing the Raman signal into its constituent parts for detection by detector CCD or InGaAs The spectrometer is in the LabRAM HR box It is connected to the detectors There are two detectors associated with the system Fig 3 The CCD detector is for the sensing the signal for RAMAN and PL in near UV and Visible range The RAMAN measurement can be taken from 50cm to 3000 and the IR is from 350nm to 800nm depending on the source The InGaAs detector is used for PL in IR range 800nm to 1600nm 4 Optics For coupling the lasers to the sample and carrying the Raman signal through to the spectrometer The special optics to be attached to the systems are the filters depending on the LASER source or the type of measurements As shown in the figure Fig 14 there are 4 filters which have to be changed as per the specification 1 e the type of LASER written on them Those filters are to be placed inside the LabRAM HR box as shown in the figure Fig 15 amp 16 For IR PL measurement the Filtre Colores OG570 has to be placed in the path of the reflected light signal Fig 17 Deepak Ranjan Nayak drnayak ece 1isc ernet in TASER power E supply umt Figl Picture of the Equipment showing LASERs Power Supply Units and Optical Stands Deepak Ranjan Nayak 2 1 Optical Column _ 15tOp
7. inside the optics chamber Fig 17 7 7 Check the RTD by clicking start to see the signal in Lock in amplifier by focusing the microscope and keeping the spectrometer at the near peak of the PL spectra 7 8 Select Acquisition Auto Save and entry the details of the Format Destination Folder and File Name in the popped up window 514nm LASER Chopper Opper Frequency SI Fig 19 Chopper Deepak Ranjan Nayak drnayak ece 1isc ernet in 8 Switching Off the 514nm LASER Fig 3 8 1 Rotate the ADJUST knob anti clockwise to minimum and put the control in STANDBY mode Fig 4 8 2 On 361C turn the key to 0 and wait for the fan of the LASER to stop Then switch off the power button behind the power supply unit and switch off the main power source marked as Argon 514 nm on the power chord Fig 3 4 amp 5 9 Switching Off the 325nm LASER 9 1 Press LASER OFF button on the He Cd LASER Remote Controller Wait for the 300s countdown to get over Fig 7 9 2 Switch off the HV by turning the key Fig 6 9 3 Wait for the fan of the LASER to stop Then switch off the AC Input of the power controller Then switch off the main power source marked as Argon 325 nm on the power chord Power Supply for 514nm LASER Power r Supply for 325nm LASE E A ry i 3 In Amplifier Power Switch Fig 20 Deepak Ranjan Nayak drnayak ece 1isc ernet in Selection Optics Columns Fig 21 Optics Columns Reflec
8. l the knob behind u eye camera and pull the Knob on 1 optics column to select 514nm LASER Refer to 5 10 to 5 13 Perform the spectral calibration using the Si substrate RAMAN amp PL eee Perform the Specified operations described from 6 1 RAMAN amp PL 514nm LASER Perform RAMAN and PL measurement Place the Filtre Colores OG570 filter inside LabRAM HR Set the grating 600IR on software control panel Refer to 7 2 and 7 6 Measurement Type and Source IR PL Perform RAMAN and PL measurement as per 6 6 Follow the steps in 7 to perform IR PL Follow the procedure for switching off the 325nm LASER Refer to 9 Follow the procedure for switching off the 514nm T ASKER Turn off the LabRAM HR instrument main power supply Which will also disconnect power supply to LabRAM controller and PC Deepak Ranjan Nayak drnayak ece 1isc ernet in Flow Chart Operation of the Equipment 1 Switching On the 514nm LASER 1 1 Check 361C Power Controller for 514nm LASER before switching on the LASER Ensure that power is at its minimum by keeping the adjust knob at its minimum position and the mode in SATNDBY Fig 4 1 2 Switch on the main power supply marked Argon 514 nm on the plug connected to the LASER power supply unit Fig 3 1 3 Switch on the power button behind the LASER power supply unit Fig 5 1 4 Turn the key on 361C ON it should point to 1 and wait for ab
9. of the light on the sample Fig 12 Deepak Ranjan Nayak drnayak ece 1isc ernet in 5 4 Turn the switch of the microscope to VIDEO option located on the top of the microscope 5 5 Set the MPlan N 10x obyective of the microscope 5 6 Use the joystick to move the stage and to keep the sample under the obyective 5 7 Focus the objective by using the coarse and fine knob on the right hand side of the microscope Fig 11 ACW objective goes down CW objective goes up 5 8 Set the MPlan N 50x objective and focus 5 9 Set the MPlan N 100x objective and focus If the sample is powder then use 50x long working distance objective LMPlanFL N 50x 0 5 in order to prevent damage to the objective 5 10 5 11 5 12 5 13 5 14 5 15 5 16 5 17 5 18 5 19 5 20 SHA 2D D225 Change the filters in the LabRAM HR box with the filters of 514nm specification Fig 15 Turn the LASER ON from the LabRAM Control Box Fig 13 Pull the Knob upward slightly and rotate anti clockwise on the 1 optics column The spring arrangement on the knob will pull it down Fig 21 Pull the knob behind the u eye camera outward Fig 18 Turn off the Euromex Fiber Optic light Source by rotating the knob ACW Fig 12 The parameters in the control panel of the software need to be changed before measurement To change the values in the fields write the number and then press ENTER Wait for the software to respond and update which can be seen
10. out 30s for the emission of laser light to start This will be reflected on 361C power analog display as current reaching 4A If more power is required change the mode to RUN on 361C and use the ADJUST knob to get the desired power However DO NOT CROSS AT ANY TIME BEYOND 8Amp Fig 4 Emission Indicator Power E Mode LASER Control Switch Power Control Switch LASER Remote Controller Power Switch Fig 4 514nm LASER Remote Controller Fig 5 Power Unit for 514nm LASER 2 Switching On the 325nm LASER 2 1 Switch on the main power supply marked He Cd 325 nm on the plug connected to the LASER power supply unit Fig 3 2 2 Then switch on the AC input behind the LASER power supply unit Fig 6 2 3 On the LASER Remote Controller switch ON the HV by turning the key Fig7 2 4 Press the LASER ON button on the controller Fig 7 2 5 Wait for the LASER to warm up and wait another 30min to get a stable beam Deepak Ranjan Nayak drnayak ece 1isc ernet in Power Switch LASER Remote Controller gt AC INPUT High Voltage Key LASER Control a Switches Fig 6 Power Unit for 325nm LASER Fig 7 325nm LASER Remote Controller 3 Switching On Off the PMT PS TC 1 3 1 Rotate the Temperature set point knob clockwise slowly to set temperature in between 30 and 40 Fig 8 3 2 During this process 1f the STATUS LED turns red without turning the knob wait for some time for the STATUS LED to turn back to green Fig
11. tical i Column a drnayak ece 1isc ernet in Microsgope er O n ght Source Fig 2 Picture of the Equipment showing Microscope Fiber Optics Light Source and Stage arrangement Deepak Ranjan Nayak drnayak ece 1isc ernet in InGas Detector ak Mba HORBA ON ae a s bin 7 Lock in Amplifier Fig 3 Picture of the Equipment showing Detectors LASER modules Deepak Ranjan Nayak drnayak ece 1isc ernet in He Cd 325 UV LASER Power Supply Argon 514 Visible LASER Power Supply Chopper Controller Chopper 316C Remote Control Lock In Amplifier Detector InGaAs He Cd LASER Remote Controller HORIBAJOBIN YVON CCD Detector CCD InGaAs Temperature Temperature LabRAM HR Control Control 2 w ee 5 Pe x 8 LabRAM HR a Y 1ber Optics Controller Light Source AA Pel LN Block Diagram Deepak Ranjan Nayak drnayak ece 1isc ernet in Switch on the main power supply for the LASER to be used Turn On the power switch on the back panel of the LASER power and Wait for the LASER beam to stabilize Refer to1 3 amp 2 2 Switch on the LabRAM HR instrument main power supply This step will also supply power to LabRAM controller and PC Run the LabSpec5 software and follow the initialization procedure and temperature control for CCD Refer to 4 Change the filters for 514nm LASER Turn ON the LASER from LabRAM Control box and pul
12. tion of 514nm LASER due to Notch Filter Fig 22 Direction of LASER Beam for 514nm LASER Deepak Ranjan Nayak drnayak ece 1isc ernet in Reflection of 325nm LASER due to Notch Filter Fig 23 Direction of LASER Beam for 325nm LASER InGaAs CAN Detector Fig 24 Detectors Deepak Ranjan Nayak drnayak ece 1isc ernet in
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