FSM-300UserManual
Contents
1. 1 LU 10 1000 10000 Frequency H Nde Amplitudeis 0 262 mrad Figure 4 Typical phase angle Bode plot for small angle angle excitation Amplitude 0 262 mrad 3 5 Safe Operating Area Typical Safe Operating Area 100 o a FSM 300 Command Amplitude mrad o 0 01 0 40 50 150 250 350 450 550 650 750 850 950 Frequency Hz Figure 5 Typical shut down curve as a function of amplitude and frequency at 20 C Continuous operation is safe below the line Derate for higher ambient temperatures D Newport Experience Solutions 9 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver FSM operation is limited to an envelope of mirror deflection amplitude versus frequency For the FSM 300 amplitude is mechanically limited to 26 mrad up to 40 Hz Above 40 Hz long term continuous operation is limited by the allowed thermal loading of the drive coils The latter is approximately proportional to signal amplitude times frequency squared This means that above 40 Hz the maximum allowed amplitude is inversely proportional to the square of frequency If the coils reach a temperature warning threshold as measured by thermistors a yellow warning light labeled CURR comes on however the system continues to operate as before If the coils reach an upper temperature shut off threshold a red warning light labeled TEMP comes on and the mirror rever2. 219 5X 09 82 7 4mm FSM 300 Series Pe 54 HOLES FOR 01 4 M6 225 MOUNTING SCREWS Fe gr e 635 2 26 pe 57 3 CLEAR APERTURE gt 20 80 20mm H DIELECTRIC MIRROR Zil 2 63 224 66 7 56 8 1 50 38 1 1 12 m 28 6 66 ia 38 1 25 16 6 pu 35 81 7 50 125 127 pem 81 8 DO fo 26 3 o 1 53 38 7 gt Ww O 4X 44 40 SCREWS ATTACH BASE TO FSM P N 40342 01 Rev E Figure 9 FSM 300 Mirror Head Housing 14 GO Newport Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver 5 2 FSM CD300B Controller Driver The FSM CD300B controller driver establishes the feedback interface between the angle position sensors and the drivers providing current to the voice coils that tip and tilt the mirror assembly It also provides an interface between the user and mirror allowing control voltages to be applied and mirror positions to be ascertained The FSM CD300B is equipped with a universal power supply that handles 100 240 V 50 60 Hz A standard power cord interface IEC 950 facilitates power plugs that are suitable for most European North American and Pacific Rim Countries E 0 5A Il A en Figure 10 Removal of Fuse Block A fuse block is located above the power connector and utilizes two 5 x 20 mm slow blow glass fuses rated 2 5 A 250 Vac To remove the fuse block
3. PSD Optical Beam Delivery Input Tilt Error System Frequency PSD Beam Stabilization Module Feed back Circuit Centers on Quad 4 Frequency Figure 1 Two fast steering mirrors used to compensate for input tilt errors A practical fast steering mirror head is shown in There are eight basic head components voice coil actuators mirror mirror carrier flexure suspension frame housing internal position sensors and position P N 40342 01 Rev E 4 FSM 300 Fast Steering Mirror amp Controller Driver sensor electronics These components work with the controller to produce the precision rotation and speed characteristic of these devices Figure 2 FSM mirror head assembly The voice coil actuators provide the torque necessary to tilt the mirror substrate Four actuators are mounted behind the mirror one in each quadrant Voice coils are connected in pairs along the diameter of the mirror and operate in a push pull manner rotating the mirror about the axis that bisects them Two actuator pairs four coils plus a coordinate transformation are used to produce two orthogonal rotations x and Oy about the X and Y axes The high force generated by four distributed actuators rotates large mirrors more effectively than the one actuator used in galvanometer scanners The distributed force combined with thick optics enables the FSM mirror head to preserve static and dynamic surface flatness excellent po
4. complies by exemption granted to test Measurement and Control equipment with all the relevant provisions of the Directive 2011 65 EU relating to the restriction of the use of certain hazardous substances in electrical and electronic equipment RoHS2 was designed and built in accordance with the following harmonised standards EN 61326 1 2013 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use Part 1 General requirements EN 60825 1 2007 Safety of laser products Equipment classification and requirements was designed and built in accordance with the following other standards EN 61000 3 2 EN 61000 4 5 ENS EN 61000 3 3 EN 61000 4 6 AS eS EN 61000 4 2 EN 61000 4 8 e Q EN 61000 4 3 EN 61000 4 11 o EN 61000 4 4 PS ALS SS SS GO Date 13 03 2014 C9 Se Dominique DEVIDAL y A PA Quality Director AS 50 Gr ee MICRO CONTROLE Spectra Physics 9 Zone Industrielle my vA LS F 45340 Beaune La Rolande France CO BROKE v P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver Preface Confidentiality amp Proprietary Rights Reservation of Title The Newport Programs and all materials furnished or produced in connection with them Related Mat
5. Fast Steering Mirror amp Controller Driver r Model FSM CD300 gt Newport a Fast Steering Mirror Controller Drive COMMAND INPUTS POWEI X Y INTERFACE yo iS A r 8 B i ee GUS ED gt OFF gt L AD User s Manual Newport Experience Solutions For Motion Think Newport FSM 300 Fast Steering Mirror amp Controller Driver Warranty Newport Corporation warrants that this product will be free from defects in material and workmanship and will comply with Newport s published speci fications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period then product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the product freight prepaid to the indicated service facility Repairs will be made and the instrument returned freight prepaid Repaired products are warranted for the remainder of the original warranty period or 90 days whichever first occurs Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse
6. VAC Supply 60 50 Hz Fault Detection Yellow A Overcurrent Figure 12 Functional Block diagram of FSM CD300B controller driver P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 5 4 FSM CD300B Controller Driver Cable Pin Connections The electrical connection between the mirror head and the controller driver is via a 15 pin D connector terminated cable This cable attaches between the connector located on the back of the mirror head and the connector labeled FSM on the front of the FSM CD300B controller driver The position sensors and voice coils are located on A and B axes at 45 to the X and Y axes A coordinate transform is done in the controller driver to produce X and Y axis rotations Pin Pin Controller FSM Head on ID ele Telefe hjulni o un Name 15VA I5VA DCpower _ FSM negative 15V power 2 B O Analog input B axis position sensor negative 10V 8 B_RTN Analog output B axis actuator drive return Type Controller Description DC power IFSM positive 15V power Analog output B axis actuator drive output Analog input A axis position sensor negative 10V A OUT Analog output A axis actuator drive output OND Analog ground FSM ground reference and power return a rF axis position sensor positive 10V 12 BLTEMP_RTN Analog ground B axis temperature sensor return Analog Ground 3 BTEMP Analoginput
7. first unplug the power cord compress the two plastic tabs on the right and left sides of the fuse block and pull out the fuse block No tools are needed When reinserting the fuse block make sure that the alignment tab is at the bottom WARNING Dangerous voltages are present inside the FSM CD300B controller driver when connected to AC line power To avoid the possibility of electrical shock always unplug the unit from AC line power when checking or changing fuses 15 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 10 0 11 02 254 279 9 FRONT VIEW BACK VIEW 9 00 lt 228 6 e 7 gt QS Newport Fast Steering Mirror Controller Driver Model FSM CD300B pwen 397 2 al El a nice es 100 8 87 6 HU ce al oaee A E we que o Figure 11 FSM CD300B Controller Driver P N 40342 01 Rev E 16 FSM 300 Fast Steering Mirror amp Controller Driver 5 3 FSM Electronics The FSM electronics are housed in two locations 1 The FSM Mirror Head containing the voice coil actuators the angle position sensors and the position sensor electronics 2 The FSM CD300B Controller Driver containing the control circuits PIDs calibration factors current drivers power supply user interface and interlocks T
8. the over temperature condition would damage the coils While the red light is on the mirror will be in the unpowered state Upon cooling of the coils the red light will go off and the system will automatically resume normal operation In the event that the red warning light comes on during continuous system operation decrease the amplitude and or frequency of the drive signal Also check for possible inverse polarity of an External Feedback signal F WS Newport Fast Steering Mirror Controller Driver Model FSM C POWER O ON COMMAND INPUTS 7 1 X y 1 INTERFACE 1 0 OFF 7 100 240V 0 5A Dd 50 60 Hz AN E 2 5A T 250V 6 DA Newport a EN MODEL FSM CD3008 WA m Y S N MMYYXXXX a l 10 IRVINE CA USA WEEET3AUG2005 L j is Ey A LO SZ E E I 7 I 3 Figure 17 Model FSM CD300B controller driver front and rear panels P N 40342 01 Rev E 2 2 Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver 6 6 External Sensor Feedback Control Mode The Model FSM CD300B controller driver can be used in an External Sensor Feedback Control mode with position feedback from an external sensor such as a quad cell or lateral effect cell This allows the FSM to lock a laser beam onto a target such as the center of a quad cell The default alternative i
9. 10D20ER 4 Protected Gold Coating Multi layer dielectric stack deposited over a gold film for excellent reflectivity from the near IR to the far IR Average reflectivity is gt 96 from 650 1700 nm and gt 98 from 1 7 2 0 um GO Newport Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver 3 0 Typical Specifications 3 1 3 2 D Newport Experience Solutions FSM System FSM 300 Number of Axes 2 tip tilt Angular Range from 10 V 26 2 mrad 1 5 mechanical Resolution lt 1 urad rms mechanical Repeatability lt 3 urad rms mechanical Accuracy From 26 2 mrad 20 002 lt 0 262 mrad 0 0159 mechanical Linearity From 26 2 mrad 20 C lt 1 0 Closed Loop Amplitude Bandwidth 3 dB 600 Hz at 10 mV typical Closed Loop Phase Bandwidth 60 lag 250 Hz typical Response Flatness Peaking lt 3 dB Noise Equivalent Angle 1 Hz to 10 kHz lt 3 urad rms Resolution of Local Position Sensor lt 0 5 urad Quiescent Power at FSM Assembly lt 5 W at any angle 26 2 mrad Operating Temperature Range Storage Temperature Range 0 to 50 C 32 to 122 F 20 to 55 C 4 to 131 F Warm up Time for Mirror Stability at 20 C lt 10 minutes Mirror Thermal Drift 2 Optical Axis Location Mirror Head Weight with Base lt 5 urad C mechanical 1 1 5 in 38 1 mm high centered l
10. B axis temperature sensor signal 2 ei A axis position sensor positive 10V 18 ATEMPRIN Analog ground axis temperature sensor return Analog Ground A_TEMP 13 Bour aN SNE 10 ARN Analog output JA axis actuator drive return HECHA de Analog input A axis temperature sensor signal 15 PIN FEMALE 15 PIN MALE 15V 15V GND GND 15V 15V B B B B B_TEMP_RTN B_TEMP_RTN B_RTN B_RTN B_TEMP B_TEMP B_OUT B_OUT A A A A A_TEMP_RTN A_TEMP_RTN A_RTN A_RTN A_TEMP A_TEMP A_OUT A_OUT Figure 13 FSM pinout diagram of 15 pin interface cable gt Newport P N 40342 01 Rev E Table 1 FSM pinout descriptions of 15 pin interface cable 18 Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver 5 5 Interface I O Pin Connections A 25 pin D connector on the front of the FSM CD300B controller driver provides access to key diagnostic and control parameters from the control board Pin Name Type Description 1 Y_CMD Analog Input Y Axis Command Signal 10V differential 2 Y_CMD Analog Input Y Axis Command Signal 10V differential 3 X_CMD Analog Input X Axis Command Signal 10V differential X_CMD Analog Input X Axis Command Signal 10V differential 5 Y_ERR Analog Output Y Axis Error Voltage Output 6 GND Ground Ground 7 X_ERR Analog Output X Axis Error Voltage Output 8 GND Gr
11. Installation Location amp Ventilation The FSM CD300B controller driver is designed for indoor operation in an ambient temperature of 0 to 35 C 32 to 95 F Component cooling is provided by a fan which aspirates air through slots in both sides of the unit and ejects air through the back To assure adequate airflow provide a minimum clearance of 25 mm 1 on both sides of the unit and 2 50 mm in back of the unit Also adequate spacing behind the fan provides quieter operation 6 2 Electrical Connections The FSM mirror head is interfaced to the FSM CD300B controller driver by the system s 15 pin connector cable The controller driver is powered from an AC wall outlet It is equipped with a universal power supply that accommodates 100 240 Vac 50 60 Hz No switch or fuse needs to be changed when going from 100 to 120 or 240 Vac power Prior to applying AC power verify that the protective cover and protective packing material have been removed from the FSM mirror head Prior to applying AC power connect the system s15 pin connector cable to the FSM mirror head and FSM CD300B controller driver If you later need to remove the 15 pin connector cable first remove AC power Connecting and disconnecting the 15 pin connector cable in the absence of power will avoid making or breaking powered signal connections Once connected to the mirror head and to the wall outlet the FSM CD300B controller driver may be turned on using the POWE
12. R switch located on the left side of the front panel see Figure 16 GO Newport Experience Solutions P N 40342 01 Rev E 20 FSM 300 Fast Steering Mirror amp Controller Driver Figure 15 15 pin interface cable from controller to mirror head 6 3 Command Inputs Figure 16 Front panel I O connections Control voltages called Command Inputs are used to direct the mirror to specified angular positions around two orthogonal axes These voltages are normally applied to the two BNC connectors labeled COMMAND INPUTS X and Y on the front panel but can also be applied to the 25 pin INTERFACE I O connector on the front panel Please see Figure 16 Scaling is set so that 10V DC offsets correspond to the full scale motion of 1 5 26 mrad mechanical angular range on each axis A command voltage of zero will bring the mirror to the powered on null position for that axis The X and Y inputs are differential Neither lead of the BNC connector is grounded Certain FSM system output results overshoot settling time and point to point travel path are dependant upon the input waveform amplitude and frequency of the signal Due to the many possibilities customers are encouraged to experiment with their particular drive signal parameters when optimizing their application As a practical guide a well defined smooth sinewave input will generate the best output results Self heating of the mirror drive coi
13. Solutions Heed all Cautions marked on the unit and in the operating instructions Do not use this equipment in or near liquids Do not operate this equipment in an explosive atmosphere This product is electrically compatible of operating with virtually all the delivered electrical service anywhere in the World The detachable Electrical Power Cord used must have plug that matches the local on site receptacles and is approved by local EU Member authorities Only plug the controller driver unit into an EARTH grounded Electrical AC receptacle Route power cords and cables where they are not likely to be damaged Disconnect power before cleaning the controller driver unit Do not use liquid or aerosol cleaners Only qualified service personnel should open the case of the controller driver There are no user serviceable components inside unit Dangerous voltages associated with the 100 240 VAC power supply are present inside controller driver unit To avoid injury do not touch exposed connections or components while power is on To avoid fire hazard use only the specified fuse s with the correct type number voltage and current ratings Only qualified personnel should replace fuses Qualified service personnel should perform a safety check after any service The Fast Steering Mirror is only for use with Lasers of Class 1 Class 1M Class 2 Class 2M and Class 3R To avoid potential Hazardous Conditions for Personnel and Possible Prop
14. accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damage from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS First printing 2003 2014 Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings 1791 Deere Ave Irvine CA 92606 949 863 3144 P N 40342 01 Rev E EDH0347En1010 03 14 D Newport Experience Solutions P N 40342 01 Rev E ii FSM 300 Fast Steering Mirror amp Controller Driver Table of Contents Warrantys OS 11 EU Declaration of Conformity sise v A vi 1 0 Safety ProStreet L 1 1 General Description iieri vri neeese esse Erea e Ear EEEE EN EEE EER E eae N E 1 1 2 General Cantons tail ideada dlls 2 2 0 Fast Steering Mirror Technology cccsssccssssscssssccssssscssscccsssssssees 4 3 0 Typical Specifications sassiscicossisesesscctasacrecceceecescseerdetsevansaet
15. avercencceencnesevacce 7 Sel FSM Ys iia 7 3 2 Standard Marror OPLODS siciss sstcescisstcsaveagcsssestesssseseseasvenesonsecnsogescessbsasedoessussenas sgsetzcepesnss 7 3 3 FSM CD300B Controller Driver ss 8 3 4 Bode Plots 8 3 5 Safe Operate Area se tso sscicecvstesceveshdedsest nia A EEE Aea EE vanes E EAEE REEE EEEE TEE EERTE 9 4 0 Unpacking the FSM cria LL del Packing Dita dd 11 4 2 Freeing the Mirror Head ses 11 4 3 Storing and Shipping the Mirror Head ooooncniccnncnnonnconononcnnncnononnnonnnonn nono nonn conc canon nocnneos 11 4 4 Replacing the Mirror AAA 12 5 0 System Components oisecisensssecsocssensssesessssensessionssvecseosonsceeeseevsvanssvesteeven L3 5 1 FSM Mirror Head Assembly 13 5 2 FSM CD300B Controller Driver ss 15 9 3 A AA sivuesadtetnsedhseyvennsdeddeagntvovecedseuueess 17 5 4 FSM CD300B Controller Driver Cable Pin Connections coooncononnnonnconcnanonnninncnanananonos 18 5 5 Interface I O Pin Connections ss 19 6 0 System Operation AA 6 1 Installation Location amp Ventilation 20 6 2 Electrical CONNECTIONS rosessi un LEE EENE REKE EKER 20 6 3 Command Inputs sister tin dater neige doabedeaaensbevedeabeeenbends 21 6 4 Position QUIPUTS sise Obie nn timides 21 6 5 Fault Indications aiii UI a deban 22 D Newport Experience Solutions iii P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver P N 40342 01 R
16. cified herein may result in hazardous radiation exposure blindness skin damage or a fire WARNING The use of optical instruments with this product will increase eye hazard Do not allow the FSM to direct the laser beam in the direction of other people or at reflective surfaces that might cause exposure to the human eyes Do not mount the laser and or FSM at eye level All personnel to wear Approved Eye Ware suitable for the Type and Class of Laser s operating in the Designated Laser Area 3 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 2 0 Fast Steering Mirror Technology Originally conceived for military aerospace applications such as high speed target tracking and secure satellite to satellite communication fast steering mirror technology has been developed to the point where it is economically viable for widespread commercial use in dynamic mirror alignment applications This technology can be used to stabilize laser beams Figure 1 track work pieces for precision laser micro machining scan laser beams for real time confocal microscopy track optical receivers for laser free space communication and increase sharpness in sophisticated imaging systems Output Beam Is Stable And Aligned To The Optical Axis Defined By Quads A amp B Feed back Circuit Centers on Quad B EA Distributed Vibration Sources Create Input Tilt Errors Output Residual Error Images FSM B On Quad A
17. e mirror If you ever have to ship the mirror head also reposition the lens tape GO Newport Experience Solutions 11 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 4 4 Replacing the Mirror The FSM is designed so that the user can replace the mirror assembly in the event that the original mirror has been damaged or different spectral characteristics are required FSM mirrors bonded to a metal carrier are available from Newport as subassemblies Hex wrenches are required tools for mirror removal and reinstallation The FSM 300 requires 0 050 hex wrenches Use of Loctite 222 thread locker on mounting screws is recommended Figure 7 Replacement of FSM 300 mirror carrier To remove the mirror carrier first remove the front protective cover plate To do so remove the four retaining socket head cap screws using the appropriate hex wrench Then remove the mirror carrier To do so remove the four retaining socket head cap screws using the appropriate hex wrench Reverse the process to install the new mirror carrier Application of Loctite 222 thread locker to each of the mounting screws is recommended CAUTION The mirror surface is extremely delicate Wear latex gloves to minimize the possibility of fingerprints Be extremely careful not to scratch the mirror surface with the wrench or cap screws QAD Newport P N 40342 01 Rev E 12 FSM 300 Fast Steering Mirror am
18. e of the FSM Fast Steering Mirror System beyond the procedures outlined in this manual Any problem that cannot be resolved should be referred to Newport s Service amp Returns Department and any failed product should be returned to that department for service A Return Materials Authorization RMA number must be obtained in advance and should be stated on the outside of the shipping box To obtain an RMA number please fill out and fax back the Return Material Authorization Request form included at the end of this manual Packaging for Returns Any FSM Fast Steering Mirror Head or FSM CD300B Controller Driver being returned under an RMA must be securely packaged for shipment The RMA number must be stated on the outside of the shipping box If possible reuse the original factory packaging The mirror must be secured for shipment Please contact Newport s Service amp Returns Department if you no longer have the original shipping restraints for the mirror gt Newport Experience Solutions vii P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver GO Newport Experience Solutions P N 40342 01 Rev E viii FSM 300 Fast Steering Mirror amp Controller Driver FSM 300 Fast Steering Mirror amp Controller Driver 1 0 Safety Precautions 1 1 General Description Observe these Cautionary Notes when setting up operating or servicing this system gt Newport Experience
19. eft to right 15 3 oz 434 g Interconnect Cable Length 9 8 ft 3 m Standard Mirror Options FSM 300 Mirror Substrate Material Pyrex Mirror Retaining Mechanism Mirror bonded to aluminum carrier user replaceable Mirror Pivot Point centered on mirror Gimbaled 12 19 mm behind mirror surface Mirror Diameter 25 4 mm Mirror Thickness 6 0 mm Mirror Wedge lt 5 arc min Clear Aperture at 0 angle of incidence gt 20 3 mm Clear Aperture at 45 angle of incidence gt 14 4 mm Surface Flatness after coating and bonding lt 4 10 at 632 8 nm over clear aperture Surface Quality 15 5 scratch dig Reflectivity Standard Coatings ER 1 Coating Enhanced Aluminum gt 93 450 700 nm ER 4 Coating Protected Gold gt 96 650 1700 nm gt 98 from 1 7 2 0 um Additional coating options Please contact Newport 1 Optical angular range is equal to twice the mechanical angular range 2 Measured under position output control Optical closed loop performance is also determined by external feedback electronics P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 3 3 3 4 P N 40342 01 Rev E 3 Optical parameters apply to central 80 of mirror aperture NOTES Performance data is based upon well defined smooth D A sine wave inputs Alternate inputs square waves triangle waves
20. erials contain trade secrets of Newport and are for use only in the manner expressly permitted Newport claims and reserves all rights and benefits afforded under law in the Programs provided by Newport Corporation Newport shall retain full ownership of Intellectual Property Rights in and to all development process align or assembly technologies developed and other deri vative work that may be developed by Newport Customer shall not challenge or cause any third party to challenge the rights of Newport Preservation of Secrecy and Confidentiality and Restrictions to Access Customer shall protect the Newport Programs and Related Materials as trade secrets of Newport and shall devote its best efforts to ensure that all its personnel protect the Newport Programs as trade secrets of Newport Corporation Customer shall not at any time disclose Newport s trade secrets to any other person firm organization or employee that does not need consistent with Customer s right of use hereunder to obtain access to the Newport Programs and Related Materials These restrictions shall not apply to information 1 generally known to the public or obtainable from public sources 2 readily apparent from the keyboard opera tions visual display or output reports of the Programs 3 previously in the possession of Customer or subsequently developed or acquired without reliance on the Newport Programs or 4 approved by Newport for release without restric
21. ers motion about two axes intersecting at a common pivot point When the pivot point is placed at the surface of the mirror the design is called gimbaled The advantage is that a mirror centered optical beam does not experience a change in path length with angular rotation The FSM is such a gimbaled design On the other hand the two galvanometers and two mirrors used in dual axis galvanometer based designs make it impossible for the axes to intersect with no common pivot point and no gimbaled motion Relay optics can solve the problem by imaging the first galvo mirror onto the second but at substantially increased complexity and cost The lack of a common pivot point complicates post objective and pre objective scanning applications requiring a compromised optical design to accommodate the separate rotation axes The FSM 300 System comes with a 1 25 4 mm diameter 1 10 Pyrex mirror which is available with a choice of reflective coatings for different wavelengths The mirror is bonded to an aluminum carrier which is user replaceable in the event that wavelength requirements are changed or the mirror surface has been damaged Two standard mirrors can be specified at the time of order P N 40342 01 Rev E 10D20ER 1 Enhanced Aluminum Coating Multi layer dielectric stack deposited over an aluminum film for improved performance in the visible and enhanced durability of the coating Average reflectivity is gt 93 from 450 700 nm
22. erty Damage DO NOT USE WITH CLASS 3B or CLASS 4 LASERS 1 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 1 2 P N 40342 01 Rev E WARNING RISK OF EYE DAMAGE OR BLINDNESS RISK OF INJURY TO THE SKIN RISK OF FIRE AND PROPERTY DAMAGE DO NOT USE WITH CLASS 3B OR CLASS 4 LASERS AS DEFINED BY EN 60825 1 ALWAYS WEAR APPROVED EYE PROTECTIVE GLASSES IN LASER AREA General Cautions Observe these cautions when operating or servicing this equipment e Handle equipment with care like other delicate electronic equipment e To prevent damage to equipment when replacing fuses locate and correct the problem that caused the fuse to blow before re applying power e Use only specified replacement parts e Follow precautions for static sensitive devices when handling electronic circuits e This product should only be powered as described in this manual e If this equipment is used in a manner not specified within this manual the protection provided by the equipment may be impaired e Do not position this equipment in a location that would make it difficult to turn off power to the equipment or disconnect the AC power cord e When the Fast Steering Mirror is used with lasers care must be taken to avoid any hazardous conditions involving eye damage skin damage or cause of fire e The Fast Steering Mirror is not intended for use with Class 3B and 4 lasers Serious injury blindnes
23. ev E 6 6 6 7 6 8 External Sensor Feedback Control Mode 23 Open Loop Control Mode inestleinhe ne ie re ena 24 Maintenance amp Service ic itsicccccerivasededcscvescnsccscvenccdnesensocedsecesdecsenscaccvcectenesenseacdeeceedocsenss 24 7 0 7 1 1 2 Appendices iiicuriniriai ii 20 Appendix Troubleshooting the FSM System 26 Appendix B Abbreviations ss 26 SERVICE POLI APP II O D Newport Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver EU Declaration of Conformity NAR SRY IQS IQS ISIS IRI REA he SSSR SOW RO ROW ROMO SNS K FSM CD300B AD V PNS e PS x AS Co FSM 300 Newport Q K Year C mark affixed 2014 sic Ge e eS DES eS EU Declaration of Conformity The manufacturer Newport Corp 1791 Deere Avenue Irvine CA 92606 USA Hereby declares that the product Description FSM CD300B and FSM 300 Function Driver Controller and Mirror Module Type of equipment Electrical equipment for measurement control and laboratory use complies with all the relevant provisions of the Directive 2004 108 EC relating to electro magnetic compatibility EMC complies with all the relevant provisions of the Directive 2006 95 EC relating to electrical equipment designed for use within certain voltage limits Low Voltage
24. he mirror head is connected to the controller driver by a 3 meter long 15 pin cable The controller has a universal power supply that can be plugged directly into most wall outlets The appropriate power cord for the destination country should be included with your controller If the correct cord is not present please contact your local Newport representative for assistance J2 OL CL II Re eee DR Ne nee be eee ee Le X Axis i OL Command 1 1 OL CL eS hg O Axis DRIVERA J1 Y Axis 1 Command OLCommand A Axis t i gt Command 1 A Axis X Axis H X Axis Actuator Drive Command Control Sense f Rs A E A A Axis 1 Position Be ae O i 1 X Axis lt A Axis A Axis a Position Le Position Lg Position i i AS A K B Axis 1 Position Int ext 1 INTEXT neto ag DRIVER B i Y Axis f Command 30 A B axis 1 L_ Command 7 B Axis Y Axis Y Axis Actuator Drive Command i Control Sense A Axis ET donee eat SAE K Position Rs Y Axis i Y Axis e B Axis Axi Ext Optical i ut B Axis Feedback 9 Gaston Position Position E Green Red 7 e 15 VDC X Overtemperature ower gt Newport Experience Solutions H 15 VDC 120 220
25. low resolution D A sine waves are addressed in section 6 3 FSM CD300B Controller Driver Command Input and Position Output Analog 10 V 26 2 mrad Peak Operating Power to Mirror 30 W Continuous Max Operating Power to Mirror 15 W Thermal Protection 60 C at mirror coil Operating Temperature 0 to 35 C 32 to 95 F Storage Temperature 20 to 55 C 4 to 131 F Use Location Indoor use only Relative humidity lt 95 non condensing Operating altitude lt 3 000 m 10 000 ft Power 100 240 Vac 10 47 63 Hz Current consumption typical 0 40 A 100 Vac 0 25 A 240 Vac Fuses 2 ea slo blo T 5 x 20 mm rated 2 5 A 250 Vac Weight 5 5 Ibs 2 5 kg Case Dimensions excluding connectors 3 9 x 9 0 x 10 0 hx w xd 100 x 229 x 254 mm Bode Plots Megiitude dB 1000 10000 Note Amplituders 0262 mad Figure 3 Typical gain response Bode plot for small angle excitation Amplitude 0 262 mrad GO Newport Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver Preso Leg degrees 8 8 170 Hat
26. ls is proportional to command signal amplitude and to the square of frequency Consult Figure 5 in the specification section of this manual for the Safe Operating Area before driving your FSM system near its frequency versus amplitude maxima The gain and phase response as a function of frequency for typical FSM systems are shown in Figures 3 amp 4 6 4 Position Outputs If confirmation of mirror position is desired the position angle sensors can be monitored at the Position Output pins pins 18 and 20 of the 25 pin INTERFACE 21 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver T O connector on the front panel A full scale deflection of 1 5 on either axis cor on responds to a 10 V output swing Zero volts output corresponds to a powered null or 0 6 5 Fault Indication Tw use o LED fault indicator lights on the front panel labeled CURR and TEMP are d to indicate overheating of the drive coils as measured separately by thermistors for the X and Y axes The yellow CURR warning indicator light comes when the temperature of the drive coils has reached a warning threshold as a result of applying too high an RMS drive current In the event that the yellow light comes on during continuous system operation decrease the amplitude and or frequency of the drive signal The red TEMP shut off light comes on when thermistors have reached the shut off temperature threshold above which
27. ntrol voltages on the required pins Yellow CURR indicator LED 1s on The drive signals to the mirror are clipped The attempt is made to apply to much RMS current to the FSM drive coils which would create a potential over temperature condition Decrease amplitude and or frequency of drive signal Red TEMP indicator LED is on Mirror does not respond at all Thermistors have detected an over temperature condition of the drive coils because these are being driven too hard Decrease amplitude and or frequency of drive signal Also check for possible inverse polarity of an External feedback signal System will automatically resume normal operation once coils have cooled Mirror moves in opposite direction of intended Polarity is reversed at X and Y Command Inputs or X and Y External Feedback Inputs To remedy reverse your electrical connections since the above four inputs are differential without a fixed ground 7 2 FSM D A IR NIR Near Infrared P N 40342 01 Rev E 26 Appendix B Abbreviations Fast Steering Mirror Digital to Analog Infrared GO Newport Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver Service Form Name Company Address Country P O Number Item s Being Returned Model Description Your Local Representative Tel Fax Return authorization Please obtain prior to ret
28. ound Ground 9 Y oL SW Digital Input Y Axis Open Loop Selector Switch Input OV closed loop 5V 5 mA open loop 10 X_OL_SW Digital Input X Axis Open Loop Selector Switch Input OV closed loop 5V 5 mA open loop 11 Y_EXTFB Analog Input Y Axis External Feedback Input 10V differential 12 Y_EXTFB Analog Input Y Axis External Feedback Input 10V differential 13 NC No Connection No Connection 14 NC No Connection No Connection 15 X_EXTFB Analog Input X Axis External Feedback Input 10V differential 16 X_EXTFB Analog Input X Axis External Feedback Input 10V differential 17 INT EXT_SW Digital Input paca Feedback Selector Switch Input OV internal SV 5 mA external 18 Y_POS_OUT Analog Output Y Axis Position Output 19 GND Ground Ground 20 X_POS_OUT Analog Output X Axis Position Output 21 GND Ground Ground 22 Y_OL_CMD Analog Input Y Axis Open Loop Command Voltage 10V Single Ended 23 GND Ground Ground 24 X_OL_ CMD Analog Input X Axis Open Loop Command Voltage 10V Single Ended 25 GND Ground Ground D Newport Experience Solutions 19 Table 2 Front Panel Interface 1 0 Connector Pinout P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 6 0 System Operation AD Newport Fast Steering Mirror Controller Driver Model FSMCD3008 a FERA C AAND ai AU INTERFACE 1 0 SR ARR FS SR JOON Es Figure 14 FSM CD300B controller driver 6 1
29. p Controller Driver 5 0 System Components 5 1 FSM Mirror Head Assembly Envelope and Mounting Interface The FSM head assembly conforms to both 1 inch and 25 mm on center hole patterns and is configured for mounting at 0 and 45 angles on a standard optical table or breadboard The optical axis height is 1 50 when mounted The FSM 300head dimensions and mechanical interface are shown in Figure 9 Rotation Axes The X and Y rotation axes are shown in Figure 8 Note that X rotation is about the X axis The definition of these axes should be considered in the mechanical layout and the coordinate frame definitions in the optical layout The polarity of the mirror rotation complies with the right hand rule i e positive voltage applied at the command input creates positive clockwise rotation as viewed looking along the axis If an external quad cell or lateral effect detector is used as the angle sensor the sensor axes of the detector must be aligned to the rotation axes of the FSM mirror head Figure 8 X and Y axes corresponding to FSM input commands and position outputs gt Newport Experience Solutions 13 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 09 103 8 25 6 4
30. s or a fire may result if used with Class 3B or Class 4 Lasers Modifications that affect any aspect of the product s performance or intended functions may require re certification and re identification of the product Consult NEWPORT prior to making any modifications WARNING AC power line voltages are present inside the controller driver unit To avoid possibility of electrical shock refer all service to qualified personnel WARNING If the Fast Steering Mirror is used with lasers avoid possible eye damage by not looking into the laser beam and avoid possible burns or skin damage by taking precautions not to allow the laser beam to come in contact with persons area All persons in the designated Laser Area are required to wear Certified Protective Eye Wear approved for the Type and Class of Laser s in operation GO Newport Experience Solutions FSM 300 Fast Steering Mirror amp Controller Driver A 4 A oy j gt Newport Experience Solutions CAUTION Static sensitive electronic equipment Wear grounding strap when handling electronic circuit boards and components found inside the controller driver unit FRAME amp CHASSIS TERMINAL Static sensitive electronic equipment Wear grounding strap when handling electronic circuit boards and components found inside the controller driver unit WARNING Use of controls adjustments or procedures other than those spe
31. s the Internal Control mode which utilizes a quad cell sensor built into the mirror head and feeds the error signal back to the controller driver via the system s 15 pin 3 foot interface cable A beam stabilization system with external position feedback sensing is shown in Figure 18 To switch system operation to External Feedback Control from the Internal Control a high TTL level signal must be applied to the INT EXT selector switch Pin 17 of the 25 pin INTERFACE I O connector External Feedback inputs can then be applied to Pins 11 12 15 and 16 Returning the signal on Pin 17 to a low state will switch the FSM back to Internal Control In the illustration in Figure 18 a Logic Unit supplied by the user provides the TTL level signal for locking the FSM onto the quad cells The sum of the outputs from the quad cell determines whether sufficient light is on the detector If light is sufficient the Logic Unit switches the FSM s to External Feedback Control and cancels out the tilt errors If light is insufficient the Logic Unit keeps the FSM s on Internal Control and flags an error to the operator The external feedback signals should be scaled so that 10V yields 26 mrad of mechanical rotation Care needs to be taken to align the external sensors so that X and Y rotation axes of the FSM correspond to the correct X and Y outputs of the quad lateral effect cell amplifier Reference position voltages can be applied to the Command Inp
32. s voltage signals to current to drive the coils Maintenance amp Service Clanging sounds from the mirror head are normal when the unit is first turned on when a high step function is applied or when the mirror is unpowered and is shaken by hand Such sounds are normal and occur when the mirror hits its hard stops They are not a sign of malfunction The FSM system does not require periodic maintenance or calibration There is no reason for a user to ever open the FSM CD300B Controller Driver unit Opening the unit would break a label and void the warranty The only reason for a user to open the FSM Mirror Head would be to replace the mirror Any repairs if necessary are to be done by Newport Corporation To clean the FSM CD300B Controller Driver unit first unplug the unit Then wipe the exterior using a damp soft cloth Do not use solvents or detergents GO Newport Experience Solutions 24 FSM 300 Fast Steering Mirror amp Controller Driver gt Newport Experience Solutions The best way to maintain cleanliness of the mirror is to protect it from dirt in the first place If the Mirror Head Assembly is to be stored always install the protective metal cover as described in the section Unpacking the FSM Also store the Mirror Head Assembly in a hermetically sealed zipped bag The mirror surface is delicate and scratches easily A qualified optics professional should do any mirror cleaning To remove loo
33. se dust gently blow across the optical surface using a can of optical grade compressed air You may also gently brush the surface with a clean optical grade dust brush In case of heavy contamination that would interfere with the operation of the FSM system a qualified optics professional may remove the front cover and attempt to use some of the techniques described in the section Care amp Cleaning of Optics on Www newport com In case of any mechanical contact with the optical surface some scratches are unavoidable 25 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver 7 0 Appendices 7 1 A POWER Hal COMMAND INPUTS My Appendix A Troubleshooting the FSM System LEP INTERFACE O SR COS FSM SR a GH e G cco Problem Possible Cause amp Solution Mirror does not respond to command inputs Green PWR indicator light is off Controller does not receive power Assure that power plug is live that power switch is ON and that fuses located above power connector are good Mirror does not respond to command inputs Green PWR indicator light is on 5V is applied to the INT EXT selector switch input Pin 17 causing the system to expect External Feedback inputs Pins 11 2 15 16 Or 5V is applied to Open Loop selector switch inputs Pins 9 or 10 causing the system to expect Open Loop inputs Pins 22 24 Remove the 5V source or supply co
34. sitional resolution large angular range and rapid motion The coil portion of the actuators is placed within the support structure and contacted to a heat sink such that heat produced in the actuator is dissipated far from the mirror surface thus minimizing thermal distortions A flexure suspension system is used to support the mirror carrier that holds the mirror This system allows free rotation about orthogonal X and Y axes while constraining side to side motion rotation about the normal Z axis and pogo motion along the Z axis Different types of flexure systems are used for different FSM applications Some flexure systems are stiff large spring constant and offer a relatively stable and repeatable power off mirror position One downside to stiff flexures is the increased current necessary to move the mirror The FSM series of mirror heads is designed around a small spring constant to keep the current and the consequential heating to a minimum As expected the FSM in power off status is greatly affected by external effects such as gravity and vibrations This power off susceptibility must be taken into consideration when designing the mirror into an integrated system Proper turn on and turn off procedures should be followed to ensure that light is only applied to the mirror when it is powered and under the control of either internal or external position feedback A position transducer is included in the FSM mirror head to provide posi
35. tion Sales Tech Support amp Service North America amp Asia Europe Newport Corporation MICRO CONTROLE Spectra Physics S A S 1791 Deere Ave 9 rue du Bois Sauvage Irvine CA 92606 USA 91055 Evry Cedex Sales France Tel 800 222 6440 Sales France e mail sales newport com Tel 33 0 1 60 91 68 68 Technical Support e mail france Onewport com Tel 800 222 6440 Sales Germany e mail tech newport com Tel 49 0 61 51 708 0 Service RMAs amp Returns e mail germany newport com Tel 800 222 6440 Sales UK e mail service newport com Tel 44 0 1635 521757 e mail uk newport com Technical Support e mail tech_europe Onewport com Service Y Returns Tel 33 0 2 38 40 51 55 D Newport Experience Solutions P N 40342 01 Rev E vi FSM 300 Fast Steering Mirror amp Controller Driver Technical Support Information When calling Newport Technical Support with a technical issue or problem please be prepared to provide the following information Your contact information System serial number or original order number Description of problem Environment in which the system is used State of the system right before the problem Can you identify anything that may have caused the problem Can the system continue to operate or is it non operational Frequency and repeatability of problem Service amp RMA Information The user should not attempt any maintenance or servic
36. tion feedback with reference to the support frame This transducer senses the angle of the mirror carrier and transfers this information to the position sensor electronics board located within the mirror head This board processes the position 1 Historically voice coils were first used in loudspeakers from which they derive their name A linear voice coil consists of a tubular coil of wire situated within the radially oriented magnetic field of a permanent magnet When current flows through the coil a force is generated that causes axial linear motion This linear motion is then used to move the mirror GO Newport Experience Solutions 5 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver information and outputs a differential voltage A B This signal is sent to the FSM CD300B controller driver to provide the appropriate feedback current to the voice coils Two significant advantages of FSM technology are derived from the flexure suspension 1 FSM flexure suspension eliminates bearing surfaces often used with galvanometer scanners and eliminates their associated stiction and wear With bearing surfaces stiction interrupts the smooth motion of the actuator and limits its accuracy smallest incremental motion Wear sets a device lifetime based on the number of commanded cycles On the other hand properly designed flexure suspensions have infinite cycle lifetimes FSM flexure suspension deliv
37. ts to the unpowered state Upon cooling of the coils the red light will go off and the system will automatically resume normal operation If the yellow warning light comes on during normal continuous operation consider decreasing the drive signal frequency and or amplitude to prevent overheating of the drive coils and avoid a possible thermal shutdown GO Newport Experience Solutions P N 40342 01 Rev E 10 FSM 300 Fast Steering Mirror amp Controller Driver 4 0 Unpacking the FSM 4 1 Packing List Included with each FSM System are the following items e FSM 300 Mirror Head e FSM CD300B controller driver e FSM CD300B controller driver interconnect cable 3 m e Allen wrench for protective cover of Mirror Head e Instruction manual 4 2 Freeing the Mirror Head Y Figure 6 Protective lens tape and metal cover for mirror For shipment the FSM mirror is secured by adhesive lens tape plus an oval hinged metal cover as illustrated in Figure 6 To free the mirror loosen the two diagonally opposed retaining screws so that the protective cover can be pivoted for easy removal The appropriate Allen wrench is supplied with the mirror head Once the cover is removed gently pull off the lens tape Store the lens tape inside a clean polyethylene bag for possible later use 4 3 Storing and Shipping the Mirror Head When the mirror head is not in use replace the oval protective cover so that it covers and protects th
38. urn of item Date Phone Number Fax Number Serial Reasons of return of goods please list any specific problems D Newport Experience Solutions 27 P N 40342 01 Rev E Newport Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 vry CEDEX France Sales Tel 33 0 1 60 91 68 68 e mail france Onewport com Technical Support e mail tech_europe Onewport com Service amp Returns Tel 33 0 2 38 40 51 55
39. uts so that if the INT EXT selector switch voltage input returns to Internal Control mode the FSM will move to a defined position Otherwise the mirror will return to the powered on null position See Application Note 23 in www newport com for details of active beam stabilization with external feedback signal using Position Sensing Detectors PSD D Newport Experience Solutions 23 P N 40342 01 Rev E FSM 300 Fast Steering Mirror amp Controller Driver External X FSM Controller 6 7 6 8 P N 40342 01 Rev E Stabilized Output LASER BEAM STABILIZATION Kj MODULE FSM Controller FSM 2 Tilt Displacement Error Input UNSTABLE OPTICAL SYSTEM Figure 18 FSM configured with external feedback sensor for laser beam stabilization Open Loop Control Mode The Model FSM CD300B controller driver can be used in Open Loop mode which does not make use of External or Internal feedback signals The Open Loop mode is selected by applying a high TTL level signal X_OL_SW selector switch for X Pin 9 and or Y_OL_SW selector switch for Y Pin 10 The Open Loop command signals are applied to the X_OL_CMD input for X Pin 22 and or Y_OL_CMD input for Y Pin 24 These input are single ended Ground pins are adjacent on Pins 23 and 25 The Open Loop mode allow users to develop their own control systems In this mode the FSM CD300B controller driver is only used as an amplifier driver which convert
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