UV Exposure Machine.Manual EN
Contents
1. e In order to protect the operator from the UV light opening the cover when this machine is working is forbidden When the cover is open this machine is build to stop working immediately However there are still possibilities that the security structure expires because of the aging or some other reasons Thus opening the cover when working and manual pushing down or de structing the security structure are forbidden e In order to protect the operator from the UV light please install and set up this machine correctly Otherwise there are possibilities that the UV light hurts the operator s skin e Please turn off the power and unplug the cable before cleaning the exposure window Otherwise there are possibilities that the UV light hurts the operator s skin and eyes e Disassembling this machine is forbidden Otherwise there are possibilities that the UV light hurts the operator s skin and eyes e In order to prevent other people from coming close barrier or other isolating fixtures are recommended to install e Please wear glasses that can isolate the UV light when operating this machine e Operating this machine not following the method regulated in this manual is forbidden Otherwise there are possibilities that the UV light hurts the operator s skin and eyes Security policy for the operator In the user manual of GB7247 1 2001 the preventive measures and management standard that the operator should follow are regulate2. the things in the package One Exposure machine One cable One manual A1ooe manual 9 Wexorop Names and functions of the main parts Safe sign Display Scree Indicating LEB Power switch Nitrogen Input Connectoion A1ooe manual Power Input Connection 10 Ii uoror Names and functions of the main parts Illustration of the display screen and the indicating LEDs No Name Display Illustration After the machine is connected to the power supply and the i Power LED Green power switch is turned on this LED will lighten 2 Exposure time Number The exposure time that the operator sets is shown here 3 Working time Number It shows how long this exposure has passed 4 Wafer size Number It shows the exposure range 5 Door LED Green This LED will lighten when the cover is closed correctly This LED will lighten when the N is being input to the exposure 6 N LED Green or hee 7 Working LED Green This LED will lighten when the UV LEDs is irradiating This LED will lighten when the N pressure is abnormal or the 8 Fault LED Red cover is open while working or there is a short circuit or open cir cuit PHOTOP SS r C1000 N Working Fault UV EXPOSURE MACHINE BR As bg GA SARL A1ooe manual 11 Ii uoror Operating illustration 1 Power on off Plug in the machine then connect the Nitrogen hose 1 2kg cm G to the N In put connector at the back of th
3. Ii prrorop UV LED Exposure Machine C Series C1000 Manual Thank you very much for buying UV LED Exposure Machine Please read this manual carefully before using this machine and please use it correctly Please preserve this manual carefully for the future consulting Ii uoror m Safe notes for LED products AE 3 EE A Safe notes is EE 5 Usage notes ccccccccssssscccesscssessssccseessceccsessceeesencceessesecsseeeeceeseeeeseesseeeeeenseeseeses 6 Services and Commitments cccccccssscessscssssesssscessssssssscesescssescessessecussesees 7 es dn lee e e DEN 8 Constitution of this Procuct c ccessoscccesscsscseessnsosesossocsosnsenssroodsoseveconssnsssoetsoes 9 Names and functions of the main port 10 Operating Ulustrotion e cecsccsssscesssesssccesssscesscscsssecesseseescssssessescessesenseecs 12 DEEN 14 Standard of UV light power and Uniformity cccccesesssessscessessseseeeeeseees 15 Revision biston ENEE ENNER 16 A1ooe manual UE E Safe notes for LED products About the class division of LED products The light source of this machine uses Class 3B LEDs according to GB7247 1 2001 Because there are tens of LEDs this machine is a Class 4 LED system Max output light power 310mW Wavelength 365 5nm Class 4 LED System GB7247 1 2001 If the set up and the control don t follow the steps regulated in this manual there will be a risk to be irradiated by UV lights
4. It s very dangerous and please don t do that If there is an interference superposing on the power supply it may cause this machine breakdown or misoperating Please don t sharing the same power with electric machinery inductance machinery or high power equipment Please don t exert a curving pressure on the cable near the plugs and don t exert a tensile force between the cable and the plug Otherwise it may cause the cable break Before this machine leaves the plant Chinese English safe signs have been stuck to its cover Please take care of those safe signs Otherwise it may cause the operator s misoperation A1ooe manual Ii uoror Services and Commitments Commitments e In one year after the delivery we can provide free repair if this machine breaks down while working normally If the breakdown is caused by the user or the consumables or the natural disasters we won t provide free repair e The warranty period is one year after the delivery production compensations e We don t compensate any loss of production stagnation or non confirming products caused by the breakdown of this machine A1ooe manual 7 UE E Characteristic of C1000 C1000 is a machine used to UV irradiate the tape below the wafer after the wafer scribing UV light can lower the stickiness of the tape so that the wafer can be picked up easily It s suitable for wafers in different sizes It s suitable for 2 4 and 6
5. d Please use the security policy for Class 4 LED products when operating this machine Moreover please consulting the GB7247 1 2001 for the detailed situation A1ooe manual 3 Wexorop Safe sign Before the shipment of this machine the Chinese English safe sign regulated by GB7247 1 2001 has already plastered on its cover Please protect the safe sign when installation and operation We won t be responsible for any breakdown or damage caused by the safe sign s damage Chinese English safe sign GB 7247 1 2001 fe FR UV Led Source SaHLEDAGR Eye and Skin Hazard iZ PH AR StF AR AAA AK Check to ensure UV Source FRMiRIA is OFF before open the cover KILED RAS Class IV LED System IV RLEDR A A1l000 manual Iii uoror Safe notes The points for attention in this manual are used to regulate the safe and correct operations and prevent the humans and machine In order to show the damages and urgency clearly the mis taken operations are classified as warning and attention The following contents are very important safe notes Please make sure of obeying them Warning Attention contents that may cause human s death or severe wound contents that may cause human s wound or property s damage Opening the cover when this machine is working is forbidden and manually push down or destructing the protection structure are forbidden too Otherwise it may cause severe damage to human s eyes a
6. e machine Move the red button Power Switch at the up left corner of the machine to the position then the machine is power on When the machine is power on the green Power LED lamp at the frontage will lighten This means the machine is on and it can be set and work Move the red button Power Switch at the up left corner of the machine to the O position then the machine is power off After the machine is power off please unplug it 2 Time and size setting A1ooe manual When the machine is on press the Set button then the tens digit of the time shown in the display screen will start twinkling like Time 88 8s the digit in blue shows the twinkling digit The twinkling digit is the adjustable digit By pressing the A button once the twinkling digit will add 1 By pressing the ge button once the twinkling digit will subtract 1 There is one thing needed to be noticed that the digit adjusting may affect other digits If the initial status is O1 0s it will change to OO 0Os after pressing the Y button once and it will change to 99 0s after pressing the Y button once again If the initial status is O1 0s it will change to OO 9s after pressing the V button once and it will change to O1 0s after pressing the A button once again After the first press on the Set button the first adjustable digit is the tens digi
7. is machine on the hands non hand hold machine Otherwise it may cause an electric shock A1ooe manual Iii uoror Usage notes 10 Please don t use any power supply with incorrect voltage and frequency Otherwise it may cause damages to the machine The attached cable is a 220V cable that can be in Mainland China When this machine is used in other countries or regions please use authen ticated cables that can fit the appearance and the use Please use this machine in the conditions listed below Otherwise it may shorten the life of the machine e Ambient temperature 0 C 35 C e Relative humidity lower than 85 e Environment with less dust soot and polluted air without rapid temperature change without violent vibration and impact e Storage temperature 10 C 60 C relative humidity less than 85 without con densation Please don t put anything on this machine or obstruct the vents of this machine Otherwise it may cause the machine damaged because of the high temperature If there are some stains on the exposure window it may decrease the UV light power and reduce the solidification capability Please clean the exposure window using alcohol Please don t drop this machine or exert a violent impact to it When installing this machine please use rubber cushions adjust to the horizon and operate it correctly If operating this machine while it s tilting or inverted it may be breakdown and damaged
8. n the exposure time is up the Working and HX lamps will black out and the actual working time will be cleared 4 Breakdown warning After pressing the Starting button the machine won t start exposure and the Fault lamp will lighten if there are some abnormal situations While the machine is working and some ab normal situations take place the Fault lamp will lighten and the exposure will stop automati cally There are three possible abnormal situations e The nitrogen pressure in the exposure chamber is abnormal e __ The cover is not closed correctly before starting or it s open suddenly while working e There are some short circuits or open circuits A1ooe manual 13 UE E Specs Parameter Unit Wavelength nm 3655 Nitrogen Input Pressure Mpa 0 15 0 2 Nitrogen Input Caliber mm p6 Nitrogen Charge Time Typ s 3 Exposure Time s 0 1 99 9 Light Power Density Typ mW cm 43 8 Wafer Size inch 2 4 6 Size mm 300x330x370 WxDxH A1ooe manual Iii uoror Standard of UV light power and uniformity Average UV light power density in the exposure window is about 43 8mW cm UV light uniformity in the exposure window is shown below mcm A1ooe manual 15 Ii uoror Revision history Release time 2008 07 A1ooe manual Initial release Revision
9. nd skin Class 4 LED system Must obey The operator must wear glasses and other protection apparatuses when oper ating this machine Otherwise it may cause severe damage to human s eyes and skin The wavelength of the UV light emitted from this machine is 365nm please use protection apparatuses that can block 365nm UV light Forbid to disassem ble Ak Never disassemble repair or reconstruct this machine using any methods that aren t regulated in this manual Otherwise it may cause accidents or human s wound Attention Must obey Please make sure of turn off the power and unplugging the cable after finish ing the operation Otherwise it may cause an electric shock or an electric leakage and fire because of insulation breaking down etc Please unplug the cable with hand holding the plug Otherwise it may cause an electric shock or a short circuit fire Don t use any power supply besides the regulation Otherwise it may cause a fire Please don t use this machine if the cable or plug is broken or the socket is loose Otherwise it may cause an electric shock or a short circuit fire Don t use this machine in some place with rapid temperature change or easy to condensing Otherwise it may cause the machine breakdown Don t use this machine in some place with violent vibration or impact Otherwise it may cause the machine breakdown Don t operate th
10. t of the time like TIME 88 8s If press the Set button again the twinkling digit will change to the units digit like TIME 88 8s The effect of pressing the Set button is tens digit of time gt units digit of time gt tenths digit of time gt size gt exit n n n When setting the wafer size the displayed size can change among 2 rA n on 6 Whatever is being set it will exit the setting mode if pressing the Enter button When the machine is shut down the current time setting will be saved automatically and it will be the default setting of the next time However the wafer size setting can t by pressing A or e button n yy be saved and the default setting is always 6 The adjustable range of the exposure time is 0 1 99 9s 12 BeHorop Operating illustration 3 Irradiation and Stop e Close the cover and ensure the Door lamp is lightened If the Door lamp is not lightened it means the cover is not closed correctly and the exposure cannot be started e After pressing the Start button the machine will start to inflate and the N lamp will lighten This means the exposure chamber is inflated with nitrogen This process takes 3 seconds e After inflation the Working lamp will lighten which means the UV LEDs have lightened and the exposure has begun Meanwhile The actual working time dis played on the screen begins to time e Whe
11. wafers and the exposure range can be adjusted according to the wafer size Over 10 000 hours lifetime of the light source The lifetime of the light source is several times longer than the that of the tube in tradi tional machines It can lower the run cost The volume of this machine is much smaller than that of the traditional machine and it can reduce the field occupancy There is no need to preheat Because the preheat is no longer necessary this machine can be turned of during the intervals This can save energy and reduce the effect to the lifetime of the LEDs Nitrogen pressure protection Only if the Nitrogen pressure in the exposure chamber reaches a threshold the machine will start to irradiate UV light No heat radiation in the irradiation process The light source is an array of UV LEDs there is no IR heat radiation Simple and easy to operate Simple and brief operation interface make the operation easier UV LEDs short circuit and open circuit protection When there is a short circuit or open circuit this machine will not start to irradiate Open cover protection While this machine is working it will stop irradiating automatically if the cover is open incorrectly UV light leakage protection There is a light leakage protection structure in the cover It can block the UV lights while this machine is working A1ooe manual Ii uoror Constitution of this product Please ensure
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