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A469F_EDH0201En2010_XPSDocumentation V2.6

1. Time Axis 1 Axis 1 Axis 2 Axis 2 Period s Displacement Velocity Out Displacement Velocity Out 1 0 0 4167 1 25 0 0 1 0 2 9167 5 0 0 0 1 0 7 0833 8 75 0 0 1 0 9 5833 10 0 0 1 0 10 10 0 4167 1 25 1 0 10 10 2 9167 5 1 0 10 10 7 0833 8 75 1 0 10 10 9 5833 10 1 0 9 5833 8 75 10 10 1 0 7 0833 5 10 10 1 0 2 9167 1 25 10 10 1 0 0 4167 0 10 10 1 0 0 0 9 5833 8 75 1 0 0 0 7 0833 5 1 0 0 0 2 9167 1 25 1 0 0 0 0 4167 0 Table 1 The trajectory data file Petter Arm 1 Aen n Figure 34 Executing trajectory data file with the PVT algorithm CW Newport 101 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 9 3 8 PVT Trajectory Verification and Execution To verify and execute a PVT trajectory there are four functions e MultipleAxesPVTVerification Verifies a PVT trajectory data file e MultipleAxesPVTVerificationResultGet Returns the last trajectory verification results actuator by actuator This function works only after a MultipleAxesPVTVerification e MultipleAxesPVTExecution Executes a trajectory e MultipleAxesPVTParametersGet Returns the trajectory current execution parameters This function works only during the execution of the trajectory The function MultipleAxesPVTVerification can be executed at any moment and is independent from the trajectory execution This function is doing the follow
2. Set to apply the new parameters Set only changes the temporary working parameters You can still recover the old parameters by rebooting the system 8 To test the behavior of your system with the new parameters redo the same data gathering and compare the results You can now also make manual changes to the settings For further instructions and recheck the behavior 9 To permanently save the settings to the stages ini press Save Save overwrites the current settings in your stages ini Press Save only when fully satisfied with the results For recovery Newport recommends taking always a copy of the stages ini with the old settings NOTE For further information about the meaning of the different tuning parameters see chapter 14 0 5 0 FTP File Transfer Protocol Connection FTP is the protocol for exchanging files over the Internet It works in the same way as HTTP for transferring web pages from a server to a user s browser and SMTP for transferring electronic mail across the Internet FTP uses the Internet TCP IP protocol to enable data transfer An FTP connection is needed to review the information inside the XPS controller to download documentation to transfer configuration files to modify them directly to transfer TCL scripts etc To connect to the FTP server e Start the XPS controller and wait until the boot sequence completes e Open an Internet browser window e Connect to
3. Trajectory element segment An element of a spline trajectory is defined by a 3rd order polynomial curve joining two consecutive control points Trajectory velocity The tangential linear velocity speed along the trajectory during its execution Trajectory acceleration The tangential linear acceleration used to start and end a trajectory Trajectory acceleration and trajectory deceleration are equal by default Trajectory Conventions When defining and executing a spline trajectory a number of rules must be followed e The motion group must be an XYZ group e All trajectories must be stored in the controller s memory under public trajectories one file for each trajectory Once a trajectory is started it executes in the background allowing other groups or positioners to work independently and simultaneously e Each trajectory must have a defined beginning and end Endless infinite trajectories are not allowed Though N times N defined by user non stop executing a trajectory is possible As the trajectory is stored in a file the trajectory maximum size maximum elements number is unlimited for practical purposes e Spline trajectory elements segments are 3 order polynomial curve segments S u joining the positions P _ X 1 Y 1 Z and P X Y Z Here u is the normalized time presenting parameter varying from 0 corresponding to P to 1 corresponding to Pj e Spline trajectories form a contin
4. set Task1 Task1 set Prog2 ProgXY tcl set Task2 Task2 open TCP socket set code catch OpenConnection TimeOut socketlD if code 0 puts stdout ProgGen TCP_ConnectToServer OK gt code ID socketlD lt Socket 1 set code catch TCLScriptExecute socketID Prog1 Task1 0 puts stdout ProgGen TCLScriptExecute gt error code lt Socket 2 set code catch TCLScriptExecute socketID Prog2 Task2 0 puts stdout ProgGen TCLScriptExecute gt error code lt Socket 3 close TCP socket set code catch TCP_CloseSocket socketID puts stdout ProgGen TCP_CloseSocket gt code ID socketlD else puts stdout ProgGen TCP_ConnectToServer NOT OK gt code 180 Motion Tutorial WH Niewport NOTE Socket 2 and Socket 3 are not opened by the TCLExecuteScript function but we supposed these scripts open some sockets on their own LabView VIs In a VI file several processes can easily be created all beginning with a TCP Open and all finishing with a TCP Close Each TCP Open will open its own socket Shown below is a simple VI that opens 4 sockets at the same time i ip mn pe hora e pa BORSE TE I Es ae presse respon ER pre ES E o _ T_ re les bn Sy Socket 1 i E ao as eee pg as tes o 2 Socket 2 C program A C program is executed sequentially E
5. then the secondary positioner moves to the End referencing position whiles the primary positioner stays at his home position Hence this parameter allows correcting the angle of the gantry 42 Software Tools Newport 4 8 2 The below sketch illustrates this process Primary Secondary A na La Pos Endeferencingosition Pos 0 Y pi vani Di Pos ne Initial position 1 Search home of the Secondary positioner The primary positioner follows 2 Search home of the Primary positioner The secondary positioner follows 3 If the distance of the secondary positioner s position to the End referencing position is greater than the value for the End referencing tolerance the homing is aborted If not the Secondary positioner moves to the End referencing position while the primary positioner stays at his home position Index difference refers to the difference of the secondary positioner s position when the primary positioner is at his home position to the home position of the secondary positioner The value for the Index difference can be queried by the function PositionersEncoderIndexDifferenceGet When no other metrology tools are available the following method can be used to determine a value for the End referencing position of an assembled gantry Set the value for End referencing position and End referencing tolerance to 0 Complete the configuration of your system
6. 0 00534 ZMappingFileName XYZMapping_Z txt ZMappingXLineNumber 7 ZMappingYColumnNumber 7 ZMappingZDimNumber 3 ZMappingMaxPositionError 0 0003 See ae 115 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 Use of the functions e GroupInitialize X YZ e GroupHomeSearch XY Z e GroupMoveAbsolute XY Z 3 1 1 The mapping files must at least cover the minimum and the maximum travel of the XYZ group they must cover the MinimumTargetPosition and the MaximumTargetPosition for the X Y and Z positioners parameters defined in the stages ini part Travels So in the above example the travel of the X and Y positioners can not be larger than 3 units and the travel for the Z positioner can not be larger than 1 unit But they can be smaller than this The units for the data are the same as defined by the EncoderResolution in the stages ini The data reads as follow at position X Y Z 3 00 2 00 1 00 the corrected X position is 2 99848 units 3 00 0 00152 the corrected Y position is 2 9989 units 3 00 0 00110 and the corrected Z position is 3 0002 units 3 00 0 0002 Between two data the XPS controller is doing a linear interpolation of the error The three mapping files for X Y and Z don t need to contain the same X Y and Z positions NOTE Mapping is a functionality implemented inside the XPS controller to correct the errors of accuracy But when mapping is
7. 29 Jun 2005 10 20 13 23 51 5 EventExtendedConfigurationTriggerSet Always 0 0 0 0 EventExtendedConfigurationActionSet GPIO2 DAC1 DACSet SetpointPosition 0 1 10 0 0 GPIO2 DAC2 DACSet SetpointVelocity 0 5 0 0 0 EventExtendedStart In this example the analog output 1 on GPIO2 will always output a voltage in relation to the SetpointPosition of the positioner G1 P1 and the output 2 on GPIO2 will always output a voltage in relation to the SetpointVelocity of the same positioner The gain on output 1 is set to 0 1 V unit and the offset to 10 V This means when the stage is at the position 0 unit a voltage of 10 V will be outputted When the stage is at the position 10 units a voltage of 9V will be outputted Here the event Always makes that these values will get updated every servo cycle means every 0 1 ms If instead of the event Always the event Immediate will be used only the most recent values will be outputted and kept If instead of the event Always a motion related event such as MotionState will be used the update will only happen every profiler cycle or every 0 4 ms 6 TimerSet Timer1 10000 EventExtendedConfigurationTriggerSet Timer1 Timer 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOToggle 255 0 0 0 EventExtendedStart EventExtendedRemove 1 The function Timer sets the Timerl at every 10 000th servo cycle or at one second Hence in this example eve
8. A gathering file can have a maximum of 1 000 000 data entries and a maximum of 25 different data types The first line of the data file contains the sample period in seconds minimum period 0 0001 s the second line contains the names of the data type s and the other lines contain the acquired data A prototype of a sample file is shown below 136 XPS Motion Tutorial Gathering dat SamplePeriod 0 0 GatheringTypeA GatheringTypeB GatheringTypeC ValueA1 ValueB1 ValueC1 ValueA2 ValueB2 ValueC2 ValueAN ValueBN ValueCN 12 1 Time Based Internal Data Gathering The data for the time based gathering get latched by an internal interrupt related to the servo cycle of the system 10 kHz The function GatheringConfigurationSet defines which type of data will be stored in the data file The following is a list of all the data type s that can be collected Positioner Name CurrentPosition Positioner Name SetpointPosition Positioner Name FollowingError PositionerName CurrentVelocity PositionerName SetpointVelocity PositonerName CurrentAcceleration PositionerName SetpointAcceleration PositionerName CorrectorOutput GPIO ADC DAC DI DO See Programmer s Guide for a list of all the GPIO Names for the Analog and Digital I O The Setpoint values refer to the theoretical values from the profiler whereas the current values refer to the actual or real values of position velocity and acceleration For gathering information from the secondary po
9. A good example for using analog velocity tracking is for an analog joystick C amp gt Newport 84 XPS Motion Tutorial Example Following is an example that shows the sequence of functions used to set up Analog Velocity Tracking GroupInitialize Group GroupHomeSearch Group Positioner AnalogTracking VelocityParameterSet Group Positioner GPIO2 ADCI Offset Scale DeadBandThreshold Order Velocity Acceleration GroupAnalogTrackingModeEnable Group Velocity GroupAnalogTrackingModeDisable Group CW Newport 85 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 9 0 Trajectories XPSDocumentation V2 6 x 08 11 9 1 9 1 1 The XPS controller supports 3 different types of trajectories The line arc trajectory is a trajectory defined by a number of straight and curved segments It is available only for positioners in XY groups The major benefit of a line arc trajectory is the ability to maintain a constant speed speed being the scalar of the trajectory velocity throughout the entire path not including the acceleration and deceleration periods The trajectory is user defined in a text file that is sent to the controller via FTP Once defined the user executes a function to begin the trajectory and the XPS automatically calculates and executes the motion including precise monitoring of the speed and acceleration all along the trajectory Simply executing the same trajectory mor
10. Acceletaticn Potitien ayy gt nes o o t o a o gt in C Displacement 150 e units Maximum velocity 0 8 units s Maximum acceleratione 12 units s Minimum jerk time 0 004 s Maximum jerk time 0 04 s Notice The minimum displacement lasts at least 4 times the minimum jerk time Figure 17 SGamma Motion Profile The SGamma motion profile provides better control of dynamic systems It allows for perfect control of the excitation spectrum that a move generates In a multi axes system this profile gives better control of each axis independently but also allows control of the cross coupling that are induced by the combined motion of the axes As shown in figure 1 the acceleration plot is parabolic The parabola is controlled by the jerk time jerk C amp gt Newport 69 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial being the derivative of the acceleration This parabolic characteristic of the acceleration allows for a much smoother motion The jerk time defines the time to reach the necessary acceleration One feature of the XPS controller is that it automatically adapts the jerk time to the step width by defining a minimum and a maximum jerk time This auto adaptation of the jerk time allows a perfect adjustment of the systems behavior to different motion step sizes NOTE Because of the jerk controlled acceleration time any move has a duration of at least four ti
11. EventExtendedStart EventExtendedConfigurationTriggerSet Always 0 0 0 0 G1 P1 SGamma ConstantVelocityEnd 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 0 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 GroupMoveAbsolute G1 P1 50 In this example when positioner G1 P1 reaches constant velocity bit 3 on the digital output on connector number 1 is set to 1 Note 4 00000100 and when the constant velocity of the positioner G1 P1 is over bit 3 will be set to zero Different than in the previous example here the concatenate with the event Always avoids that the event trigger gets removed after the event is over Hence the state of the bit 3 will change with every beginning and with every end of the constant velocity state of a motion 4 EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantVelocityState 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 255 0 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 XPSDocumentation V2 6 x 08 11 132 XPS Motion Tutorial In this example during the constant velocity state of the positioner G1 P1 1 ys pulses are generated on all 8 bits on the digital output on connector number 1 every cycle of the motion profiler Note 255 11111111 The cycle time of the motion profiler is 400 ys so pulses are generated every 400 ys see picture below Tek Prevu A 0 00 V 19 120mv M loops A Chi J 3 08 V
12. Figure 69 GPIO4 Additional Digital I O Connector General Purpose Inputs Outputs GPIO4 is an additional digital I O connector XPSDocumentation V2 6 x 08 11 190 XPS Appendices 21 0 Appendix E PCO Connector CW Newport Figure 70 Position Compare Output Connector There is one PCO connector for every two axes Axis 1 refers to the upper odd encoder plug and axis 2 refers to the lower even encoder plug The signals provided on this plug depend on the configuration of the output triggers see section 13 Output trigger for more details The state of the enable signal is low when the stage is inside the programmed position compare window Note also that only the falling edge of the trigger pulse is precise and only this edge should be used for synchronization irrespactable from the PCOPulse Width setting The duration of the pulse is 200 nsec by default and can be modified using the function PositionerPositionComparePulseParametersSet Possible values for the PCOPulseWidth are 0 2 default 1 2 5 and 10 us Successive trigger pulses should have a minimum time lag equivalent to the PCOPulseWidth time times two The signals are open collector type and accept up to 30 Volts and 40 mA The 5V output provided on the PCO connector can be used to pull up these outputs and can supply 50 mA max NOTE To ensure fast transitions with an open collector it is necessary to have enough current to speed u
13. e Disconnect or do not plug in the AC power cord in the following circumstances Ifthe AC power cord or any other attached cables are frayed or damaged Ifthe power plug or receptacle is damaged Ifthe unit is exposed to rain or excessive moisture or liquids are spilled on it Ifthe unit has been dropped or the case is damaged e Ifthe user suspects service or repair is required e Keep air vents free of dirt and dust e Keep liquids away from unit e Do not expose equipment to excessive moisture gt 85 humidity e Do not operate this equipment in an explosive atmosphere e Disconnect power before cleaning the Controller Driver unit Do not use liquid or aerosol cleaners e Do not open the XPS Controller Driver stand alone motion controller There are no user serviceable parts inside the XPS Controller Driver e Return equipment to Newport Corporation for service and repair XPS User s Manual e Dangerous voltages associated with the 100 240 VAC power supply are present inside Controller Driver unit To avoid injury do not touch exposed connections or components while power is on e Follow precautions for static sensitive devices when handling electronic circuits CW Newport 5 XPSDocumentation V2 6 x 08 11 XPS User s Manual 2 0 System Overview Specifications Number of Axes 1 to 8 axes of stepper DC brush or DC brushless motors using internal drives Other motion devices
14. or as Administrator Users can log in only with User rights Administrators can log in with User or with Administrator rights When logged in with Administrator rights you have an extended set of tools available The predefined user has the log in name Anonymous Password Anonymous The predefined Administrator has the log in name Administrator Password Administrator Both the Log in name and the password are case sensitive fine Penna Poem po n 0 e e Gra TT z amp amejT lVlTmI q Motion Controller Driver XPS C8 sa eet coma penso ore stona to nq Mee ego ae teeni ee tu Er gt oa Rio cH Newport 33 XPSDocumentation V2 6 x 08 11 XPS Software Tools The main tag is displayed across the top of the XPS Motion Controller Driver main program window and lists each primary interface option Each interface option has its own pull down menu that allows the user to select various options by clicking the mouse s left button On the following pages we provide a brief description of all tools Administrator Menus LIO Mewoort Sub Menu for CONTROLLER CONFIGURATION Restricted set of User Menus PEOI Pamit TIRMINAL DOCUMINTA NON QO Mevwport Move log Spindi 1 0v w I O eet Positioner error itardmare statue Orewer status 4 2 CONTROLLER CONFIGURATION Users Management This tool allows managing user accounts There are two type of users defined Administrators and U
15. All digital outputs are in negative logic NPN open collector 74LS06 TTL type circuit and have no internal pull up to permit levels above 5 V CW Newport 185 XPSDocumentation V2 6 x 08 11 XPS Appendices 18 1 2 Digital Outputs Parameter Symbol Min Max Units Low Level Output Voltage VoL 0 1 V High Level Output Voltage Vou 24 30 V Input Current LOW Tor 40 mA Input Current HIGH Ion 0 2 mA gt Digt Ouna 4 ha Figure 64 Open Collector Digital Output GPIOn outputs n 1 to 4 can be accessed via the GPIODigitalSet GPIOn DO function 18 2 Digital Encoder Inputs Driver Boards amp DRV00 All digital encoder inputs are RS 422 standard compliant e All digital encoder signals are not isolated but are referenced to the electrical ground GND e Encoder signals must be differential pairs using 26LS31 or MC3487 line driver type circuits Encoder inputs have a terminating impedance of 120 Q e Inputs are always routed on differential pairs For a high level of signal integrity we recommend using shielded twisted pairs of wires for each differential signal e Encoder power supply is 5 V 250 mA maximum referenced to the electrical ground and is sourced directly by the driver boards 18 3 Digital Servitudes Driver Boards DRV00 amp Analog Encoders Connectors All servitude inputs are TTL compatible e All servitude inputs are not isolated but are referenced to
16. MultipleAxesInUse QD Newport 39 XPSDocumentation V2 6 x 08 11 XPS Software Tools XPSDocumentation V2 6 x 08 11 My_XY_Group PositionerlnUse StepAxis ScanAxis InitializationAndHomeSearchSequence Together Mapping XY XMappingFileName YMappingFileName My_XY_Group StepAxis PlugNumber 3 StageName VP 25XA SECONDARY My_XY_Group ScanAxis PlugNumber 4 StageName VP 25XA PRIMARY Spin PositionerlnUse Rot Spin Rot PlugNumber 2 StageName URS100CC_ Spindle Q gt Newport 40 XPS Software Tools 48 cao Report SYSTEM Manual Configuration Gantries Secondary Positioners This section refers to experienced users of the XPS controller and addresses the configuration of a gantry via a secondary positioner A gantry is a motion device where two positioners each of them having a motor an encoder limits etc are used for a motion in one direction With most gantries the two positioners are rigidly attached to each others see example below Hence all motions including motor initialization homing and emergency stops must be done in perfect synchronization Figure 16 Example of a gantry The XPS controller allows configuring single axis gantries Xx configuration and XY gantries For XY gantries it is possible to define XxY XYy and XxYy configurations Here X and Y refer to the primary positioner and x and y to an assigned secondary positione
17. The new sequence is shown in Figure 20 Encode n s Pulse Figure 20 High Low Speed Home Origin Switch Search Motion segment B is performed at high speed with the pre programmed home search speed When the home switch transition is encountered the motion device stops with an overshoot reverses direction and searches for the switch transition again this time at half the velocity segment C Once the switch transition is encountered it stops again with an overshoot reverses direction and executes D and E with one tenth of the programmed home search speed In the case when the positioner starts from the other end of the home switch transition the routine is shown in Figure 21 Encode ndex Pulse Figure 21 Home Origin Search from Opposite Direction The positioner moves at high speed up to the home switch transition segment A and then executes segments B C D and E This home search process guarantees that the last segment E is always performed in the positive direction of travel and at the same reduced speed This method ensures an accurate and repeatable reference position Q gt Newport XPSDocumentation V2 6 x 08 11 72 XPS Motion Tutorial There are 8 different home search processes available in the XPS controller e MechnicalZeroAndIndexHomeSearch is used when the positioner has a hardware home switch plus a zero index from the encoder This process is the default for most of New
18. amp DRV00 ii 186 Digital Servitudes Driver Boards DRVO00 amp Analog Encoders Connectors 186 Analog Encoder Inputs Analog Encoder Connectors iii 186 Analog I O GPIO2 Connector ie 187 189 A a Inputs arie loan lello nb sali iui lia i ii li gli el 187 18 52 Analog Outplits alain urina 187 19 0 Appendix C Power Inhibit Connector rrsvrrrrrrrcrreresrcoseoneceo0o 188 20 0 20 1 20 2 20 3 20 4 Appendix D GPIO Connectors ssscccssscsssccssccsecccssccsscssscssseees 189 GPIOT Connectori prat ia lalla 189 GPIO2 Comme ctor RR Ritira 189 GPIO3 Connectoti ri lola alal ha ane a ae 190 GPIO4 Connector tiene una du ana una aaa navata 190 21 0 22 0 22 1 222 22 3 224 22 5 Appendix E PCO Connector vvvsrrrrrrrrrerreresssenesecosenescesocenesceoso 191 Appendix F Motor Driver Cards sscsssssssccssssssccssscssecsscsssrees 192 DC and Stepper Motor Driver XPS DRVOL ii 192 DC Motor Driver XPS DRVM e a a a aa a eaat aaaea a 193 Three phases AC brushless driver XPS DRV02 194 DC Motor Driver XPS DRV03 a Ea 194 Pass Through Board Connector 25 Pin D Sub XPS DRVO00 in 195 23 0 Appendix G Analog Encoder Connect or ccessssccssscsssecsscscerees 196 24 0 Appendix H Trigger IN Connector
19. 0 0003 0 0003 0 0003 0 0003 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 Q gt Newport XPSDocumentation V2 6 x 08 11 114 XPS Motion Tutorial Verify in the stages ini For the X axis Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE The limit travels must be equal or within the X limit positions of the mapping files here 3 and 3 For the Y axis Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE The limit travels must be equal or within the Y limit positions of the mapping files here 3 and 3 For Z axis Travels MinimumTargetPosition 1 unit HomePreset 0 unit MaximumTargetPosition 1 unit NOTE The limit travels must be equal or within the Z limit positions of the mapping files here 3 and 3 In the system ini file Mapping XYZ XMappingFileName XYZMapping_X txt XMappingXLineNumber 7 XMappingYColumnNumber 7 XMappingZDimNumber 3 XMappingMaxPositionError 0 00787 YMappingFileName XYZMapping_Y txt YMappingXLineNumber 7 YMappingYColumnNumber 7 YMappingZDimNumber 3 YMappingMaxPositionError
20. 0 001 unit LinearEncoderCorrection 5 ppm Positioner Mapping Positioner mapping allows correcting for any nonlinear errors of a positioner Positioner mapping is available with all positioners and can be used in addition to other compensations except for the backlash compensation 106 XPS Motion Tutorial Profiler alt i Porr si ore Driver gt Stage VAS IP Corrector Axis lai Axis linear Encoder si mapping correction PositionerMappingFieName PosstionerMappingLineNumber PosibonarMappingMaxPostionError Figure 36 Positioner Mapping e HomePreset Encoder position value at the home position e LinearEncoderCorrection Value in ppm Correction is given by Corrected Position HomePreset EncoderPosition HomePreset 1 LinearCorrection 106 e Mapping file Declaration of the mapping in the stages ini file part Positioner mapping The positioner mapping data gets defined in a text file Each line of that file represents one set of data Each set of data is composed of the position and the error at this position The separator between the two data entries in each line is a tab All positions are relative to the physical home position of the positioner The data file must contain the line 0 0 which means that the error at the home position is 0 This hardware reference for positioner mapping has the advantage of being independent of the value for the HomePreset The following shows the general
21. 00102 0 00769 0 00845 0 00331 0 00 0 00787 0 00228 0 00787 0 0 00787 0 00228 0 00787 1 00 0 00232 0 00210 0 00342 0 00089 0 00342 0 00210 0 00232 2 00 0 00134 0 00308 0 00675 0 00101 0 00675 0 00308 0 00134 3 00 0 00789 0 00148 0 00234 0 00121 0 00234 0 00148 0 00789 Matrix Y XYMapping_Y txt 0 3 00 2 00 1 00 0 00 1 00 2 00 3 00 3 00 0 00172 0 00434 0 00154 0 00013 0 00204 0 00234 0 00122 2 00 0 00433 0 00222 0 00376 0 00029 0 00636 0 00222 0 00353 1 00 0 00311 0 00635 0 00569 0 00089 0 00739 0 00245 0 00231 0 00 0 00737 0 00128 0 00387 0 0 00567 0 00128 0 00387 1 00 0 00212 0 00110 0 00142 0 00079 0 00332 0 00310 0 00132 2 00 0 00114 0 00208 0 00375 0 00089 0 00375 0 00348 0 00122 3 00 0 00689 0 00128 0 00134 0 00101 0 00232 0 00138 0 00689 Verify in the stages ini for both stages Travels MinimumTargetPosition 3 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE The limit travels must be equal or within the X and Y limit positions of the mapping files here 3 and 3 respectively XPSDocumentation V2 6 x 08 11 110 cH Newport XPS Motion Tutorial CW Newport 10 5 Apply the following settings in the system ini file Mapping XY XMappingFileName XYMapping_X txt XMappingLineNumber 7 XMappingColumnNumber 7 XMappingMaxPositionError 0 00845 YMappingFileName XYMapping_Y txt YMappingLineNumber 7 YMappingColumnNumber 7 YMappingMaxP
22. 3rd element and the end of the 5th element MultipleAxesPVTVerification Group1 Traj trj 153 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial Loads and verifies the trajectory Traj trj GatheringConfigurationSet Group1 P CurrentPosition GPIO2 ADC1 Configures data gathering to capture the current position of the Group1 P positioner and the analog input GPIO2 ADCI EventExtendedConfigurationTriggerSet Always 0 0 0 0 Group1 PVT TrajectoryPulse 0 0 0 0 Triggers an action for every trajectory pulse The link of the event TrajectorPulse with the event Always is important to make the event permanent Otherwise the event will be removed after the first pulse EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 Defines the action gathers one set of data each trajectory pulse EventExtendedStart Starts the event trigger MultipleAxesPVTExecution XY Traj trj 1 Executes the trajectory Traj trj one time GatheringStopAndSave Saves the gathering data from memory in a file gathering dat in the admin public folder of the XPS In this example one set of data will be gathered every 10 ms on the trajectory between the start of the 3rd and the end of the 5th element XPSDocumentation V2 6 x 08 11 154 XPS Motion Tutorial 14 0 Control Loops 14 1 14 1 1 Profiler Trajectory Generator XPS Servo Loops Servo structure and Basics The XPS controller can be used to control a wid
23. 5 4 or 3 5 5 depending on your configuration NOTE If you want to reset the IP address to the default factory setting follows the section 3 5 4 to set the IP address back to 192 168 0 254 3 6 Testing your XPS PC Connection To check if the XPS is connected to the host computer you could send a ping message from the computer to the XPS This is done by using the menu Start gt Run gt then type ping IP address of the XPS See the example below for the IP address 192 168 33 236 Type the rue of a progam fetter document o Femra pease i miro ed ogee for pay er CTD If the XPS is connected it replies in the terminal window that appears when users click on the OK button CIWINOIW wpyriem 37 ping ose If the XPS controller is not connected the window displays that the time delay of the request is exceeded CWO Newport 23 XPSDocumentation V2 6 x 08 11 User s Manual XPSDocumentation V2 6 x 08 11 3 7 Connecting the Stages CAUTION Never connect disconnect stages while the XPS controller is powered on CAUTION Lay stage s on a flat stable surface before connecting to the XPS controller With the power off carefully connect one end of the supplied cables to the stage and the other end to the appropriate axis connector at the rear of the controller Secure both connections with the locking thumbscrews When using stages with analog encoder interface a
24. All drivers except TCP Open and TCP Close require a connection ID in top left pane a connection ID out top right pane an error in bottom left pane and an error out bottom right ej gt Add two Group move absolutes from the single axis group and indicate the name of the group On the pane Target position add a constant in which the desired absolute positions is written Finally link the drivers together and link the last move to the TCP Close To test the program press the button DI This example displays the firmware version of the XPS controller and executes a motion of the single axis group from 0 to 10 and then to 10 units To learn more the XPS LabView drivers and their use refer to the Software drivers manual accessible from the documentation menu of the XPS web site 177 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 16 3 DLL Drivers A DLL simplifies function calls from most programming languages The DLL of the XPS controller is located in the Admin Public Drivers DLL folder of the XPS controller The files XPS_C8_drivers h and XPS_C8_drivers lib must be copied to the project folder and the file XPS_C8_drivers dll to the folder of the executable file Workspace Ex V ni 1 piocis GF Ext_VersionGet ties a O Source Files 3 Sy Header Fie Im D Ex1_VenorGeth B Ex1_VersonGeOlkgh Gois Gdin Adege Face Oth l B Resouceh didina gt gt O Qaede ins 9 4S Xaa T 20
25. Controller Driver being returned to Newport must have been assigned an RMA number by Newport Assignment of the RMA requires the item serial number Packaging XPS Series Controller Driver being returned under an RMA must be securely packaged for shipment If possible re use the original factory packaging xii XPS User s Manual User s Manual 1 0 Introduction 1 1 Scope of the Manual The XPS is an extremely high performance easy to use integrated motion controller driver offering high speed communication through 10 100 Base T Ethernet outstanding trajectory accuracy and powerful programming functionality It combines user friendly web interfaces with advanced trajectory and synchronization features to precisely control from the most basic to the most complex motion sequences Multiple digital and analog I O s triggers and supplemental encoder inputs provide users with additional data acquisition synchronization and control features that can improve the most demanding motion applications To maximize the value of the XPS Controller Driver system it is important that users become thoroughly familiar with available documentation The XPS Quick Start and XPS User s Manual are delivered as paper copies with the controller Programmer s manual TCL manual Software Drivers manual and Stage Configuration manual are PDF files accessible from the XPS web site DLLs and corresponding sources are available from the
26. Gantries with linear Motors anioni navi 43 4 8 3 Gantries with linear motors and variable force ratio in 44 49 STAGE Add from Data Base 46 4 10 STAGE Add Custom Stage O E ii 47 ATI STAGE Modify ripa alia dia sg inten ll denen gees ari lun 47 4 12 FRONT PANEL MOV 00 ae ae LIL anes eet ee teeta 49 XPS Universal High Performance Motion Controller Driver 4 13 FRONT PANEL J0f a ara teen teen dened 50 4 14 FRONTIPANED Spindle iceic scoscscees cele le Stee a ole al a os aaa ua 50 4 15 FRONT PANEL 1 O View tx ORA ee a a a a aana eeraa 51 4 16 FRONT PANED 1 O S t ces tensile sh hee Se eal Sa i saio 51 4 17 FRONT PANEL Positioner Etrors i 52 4 18 FRONT PANEL Hardware Status cseesessesseeeeceeeseeseeseeseeaeeseeaeeaeeeeeaeeaeeaseaeeaeeeeeaeenees 52 4 19 FRONT PANEL Driver Status rire 53 420 TERMINA D scri ili lc A e a e a aaa e ASS ii 53 42 TUNING Aito Scaling eee R bili 56 4 22 TUNING Auto Tuning inaa aa a RE EE RE RARR RR RRRA AE RE RARR RRR 57 5 0 FTP File Transfer Protocol Connection cccccccssssssssssssscccccccsssseees II 6 0 Maintenance and Service seeseesseesoesseesoesoessoesoessoesoessoesoessoesoessoesoeeseeseees OM 6 1 Enclosure Cleanmo rocca 61 02 AOD aime SCL VAC S ais sss tes sects Ai ais ie Ne eae ii Ali ia ii eil iii NALI 61 6 3 Troubleshooting viivcirc
27. Heidenhain standard on each axis An ultra high resolution very low noise encoder signal interpolator converts the sine wave input to an exact position value with a signal subdivision up to 32 768 fold For example when used with a scale with 4 um signal period the resolution can be as fine as 0 122 nm This interpolator can be used for accurate position feedback on the servo corrector of the system An additional hardware interpolator with 40 MHz clock frequency and programmable signal subdivision up to 200 fold is used for synchronization purposes This fast interpolator latches directly the position with less than 50 ns latency and provides a much higher level of precision for synchronization than alternative time based systems And unlike most high resolution multiplication devices the XPS interpolators do not compromise positioning speed With a maximum input frequency ranging from 180 kHz to 400 kHz depending on the interpolation factor the maximum speed of a stage with a 20 um signal period scale can be up to 3 6 m s Compatible Newport Positioners and Drive Power Consumption The list of all Newport positioners that are directly compatible with the XPS controller and the corresponding drive module needed are available from the Newport catalog or the web site C amp gt Newport XPS User s Manual 2 4 XPS Hardware Overview VO Board _ Figure 6 XPS Hardware Overview 2 5 Front Panel Description Figure 7 Fron
28. MyGroup and the event has a category The event happens when the trajectory element number 5 on the next LineArc trajectory on this group starts EventExtendedConfigurationTriggerSet GPIO2 ADC2 ADCHighLimit 3 0 0 0 In this case the actor is a GPIO name GPIO2 ADC2 and the event has no category The event happens when the voltage on the GPIO ADC2 exceeds 3 Volts It is also possible to link different events to an event configuration The same function EventExtendedConfigurationTriggerSet is used and the different events are just separated by a comma The event combination happens when all individual events happen at the same time It is comparable to a logic AND between the different events Examples EventExtendedConfigurationTriggerSet GPIO2 ADC2 ADCHighLimit 3 0 0 0 MyGroup MyPositioner SGamma MotionState 0 0 0 0 This event will happen when the voltage of the GPIO ADC2 exceeds 3 Volts during a SGamma motion of the MyGroup MyPositioner EventExtendedConfigurationTriggerSet Always 0 0 0 0 MyGroup MyPositioner SGamma MotionStart 0 0 0 0 This event will happen during each SGamma motion started on the positioner MyGroup MyPositioner The addition of the event always has here just the effect that the event gets not removed anymore after the next motion has been started see difference to first example above 119 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial The exact meaning of the different
29. Position or a PositionerSGammaParametersSet e MoveToPreviouslyLatchedPosition This action moves the positioner to the last latched position see section 8 3 1 Move on sensor events for details It verifies there was a position latched since this last GroupReferencingStart call This is important because an old latched position can still be in memory from a previous home search or referencing And moving to this previous latched position could have unexpected results The move is done with the SGamma profiler The speed is specified by a parameter The acceleration is the default value or the last ones defined by a PositionerSGammaParametersSet CW Newport 75 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 8 3 3 8 3 4 Position Counter Resets The position counter resets sets the current position to a certain value There are two options SetPosition and SetPositionToHomePreset The main use of these actions is when the positioner is at a well defined reference position after a MoveToPreviouslyLatchedPosition action Another use of this action is for a soft system start by referencing a group to a known set position without executing a home search process for example In this case a suggested sequence of functions follows GroupReferencingStart GroupName GroupReferencingActionExecute PositionerName SetPosition None KnownCurrentPosition GroupReferencingStop GroupNam
30. PositionErrorMeanValue lt MotionDonePositionThreshold AND VelocityMeanValue lt MotionDoneVelocityThreshold is verified during the MotionDoneCheckingTime period The different parameters have the following meaning A Velocity Fed of thea etc al tose MotonDone Chectang Time M ne vert ob Figure 23 Motion Done e MotionDonePositionThreshold This parameter defines the position error window The position error has to be within of this value for a period of MotionDoneCheckingTime to validate this condition e MotionDoneVelocityThreshold This parameter defines the velocity window The velocity at the end of the motion has to be within of this value for a period of MotionDoneCheckingTime to validate this condition e MotionDoneCheckingTime This parameter defines the period during which the conditions for the MotionDonePositionThreshold and the MotionDoneVelocityThreshold must be true before setting the motion done e MotionDoneMeanPeriod A sliding mean filter is used to attenuate the noise for the position and velocity parameters The MotionDoneMeanPeriod defines the duration for calculating the sliding mean position and velocity The mean position and velocity values are compared to the threshold values as defined above This parameter is not illustrated on the graph e MotionDoneTimeout This parameter defines the maximum time the controller will wait from the end of the theoretical move for the
31. Servo Tuning 14 3 1 Corrector PIDFFVelocity The PIDFFVelocity corrector should be implemented into applications where the positioner driver requires a speed input constant voltage to the driver provides constant speed output to the positioner using MotorDriverInterface AnalogVelocity KFeedForwardVelocity PIO Corrector i Filtering amp re a Calculations 9 gt pei To the driver l Driver Board n S ji amp Stage Z From arj Umetatton the encoder Figure 55 Corrector PIDFFVelocity 161 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 143 11 14 3 1 2 XPSDocumentation V2 6 x 08 11 Parameters FeedForward Method e Velocity e KFeedForwardVelocity is a gain that can be applied to this feed forward e When the system is used in open loop the PID output is not applied and the feed forward gain is set to the entire output of the controller is FF gain PID corrector e Total output of the PID is a speed units s so Kp is given in 1 s Ki is given in 1 2 Kd has no unit Filtering and Limitation e ScalingVelocity units s is the theoretical speed resulting from a 10 V input to the driver e VelocityLimit units s is the maximum speed that can be commanded to the driver Basics For a perfect system no friction all performance factors known no following errors a KFeedForwardVelocity value of 1 will generate the exact amount of output required
32. StageName IMS400LM eH Niewport 45 XPSDocumentation V2 6 x 08 11 Software Tools XPSDocumentation V2 6 x 08 11 4 9 STAGE Add from Data Base With the help of this tool a stage from the Newport stage data base can be added to the personal stage data base called stages ini In the lower left corner you can review the name of the stages that are already in this stage data base To add a new stage do the following 1 Select a family name from the list Double click 2 Select the part number corresponding to your hardware Double click 3 Select the driver corresponding to your hardware and configuration For all continuous rotation stages you can choose between a regular stage configuration and a Spindle configuration A Spindle is a specific rotary device with a periodic position reset at 360 means 360 equals 0 When defining the stage as Spindle in the stages ini you must assign this stage also to a Spindle group in the system configuration and vice versa For details about Spindles please refer also to section 7 3 4 Once the stage name appears you can modify it if you like The default name is the Newport part number but in some cases it makes sense using a different name That ways for instance it is possible adding the same set of parameters several times in the stage data base under different stage names Later you can modifying certain parameters like travel ranges or PID s
33. To get the number of arguments use tcl_argc inside the script To get each argument use tcl_argc i inside the script For example this parameter can be used to specify a number of loops inside the TCL script A zero 0 for this parameter means there are no input arguments Action parameter 4 This parameter must be 0 by default XPSDocumentation V2 6 x 08 11 128 XPS Motion Tutorial KillTCLScript This action stops a TCL script on an event Action parameter 1 Task name This parameter defines which TCL script is stopped Since several different or even the same TCL scripts can run simultaneously the TCL Task Name is used to track individual TCL programs Action parameter 2 to 4 These parameters must be 0 by default GatheringOneData This action acquires one data as defined by the function GatheringConfigurationSet Different than the GatheringRun see next action which generates a new gathering file the GatheringOneData appends the data to the current gathering file stored in memory In order to store the data in a new file you first need to launch the function GatheringReset which deletes the current gathering file from memory Action parameter 1 to 4 These parameters must be 0 by default GatheringRun This action starts an internal gathering It requires that an internal gathering was previously configured with the function GatheringConfigurationSet The gathering must be launched by a punc
34. XPS programming User s Manual 12 Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the XPS Series Controller Driver where safety related issues occur General Warning or Caution Figure 1 General Warning or Caution Symbol The Exclamation Symbol in Figure 1 may appear in Warning and Caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible Electric Shock Figure 2 Electrical Shock Symbol The Electrical Shock Symbol in Figure 2 may appear on labels affixed to the XPS Series Controller Driver This symbol indicates a hazard arising from dangerous voltage Any mishandling could result in damage to the equipment personal injury or CE Figure 3 CE Mark European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union CE regulations and recommendations ON Symbol Figure 4 ON Symbol The ON Symbol in Figure 4 appears on the power switch of the XPS Series Controller Driver This symbol represents the Power On condition O Figure 5 OFF Symbol OFF Symbol The Off Symbol in Figure 5 appears on the power switch of the XPS Series Controller Driver This symbol represents the Power Off condition 3 XPSDocumenta
35. ZMappingYColumnNumber Total number of columns e ZMappingZDimNumber Number of successive tables e ZMappingMaxPositionError Maximum absolute error in that file Any value larger than the actual largest value in that file will be accepted as well The X Y Z MappingXLineNumber X Y Z Mapping YColumnNumber X Y Z MappingZDimNumber and X Y Z MappingMaxPositionError are only used to check for the correctness of the mapping file Example The following shows examples for the X Y and Z mapping files for an XYZ mapping Matrix X XYZMapping_X txt 1 00 3 00 2 00 1 00 0 00 1 00 2 00 3 00 3 00 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 2 00 0 00453 0 00322 0 00376 0 00412 0 00258 0 00111 0 00287 1 00 0 00331 0 00445 0 00769 0 00126 0 00153 0 00298 0 00487 0 00 0 00787 0 00228 0 00787 0 00320 0 00154 0 00169 0 00369 1 00 0 00232 0 00210 0 00342 0 00169 0 00265 0 00169 0 00125 2 00 0 00134 0 00308 0 00275 0 00369 0 00337 0 00214 0 00456 3 00 0 00189 0 00148 0 00234 0 00458 0 00333 0 00152 0 00335 0 0 0 0 0 0 0 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00453 0 00322 0 00376 0 00412 0 00258 0 00111 0 00287 0 00331 0 00445 0 00769 0 00126 0 00153 0 00298 0 00487 0 00787 0 00228 0 00787 0 0 00154 0 00169 0 00369 0 00232 0 00210 0 00342 0 00169 0 00265 0 00169 0 00125 0 00134 0 00308 0 00275 0 00369 0 00337 0 00214 0 00456 0 00189 0 00148 0 00234 0 00458 0 00333
36. activated it is transparent for the user At position X Y Z 3 00 1 00 1 00 the function GroupPositionCurrentGet XYZ X doesn t return 3 00333 3 00 0 00333 but 3 116 XPS Motion Tutorial 11 0 Event Triggers CW Newport Important Note to Users of XPS Firmware prior to Revision 1 6 0 With XPS firmware 1 6 0 Newport has significantly expanded the use of the event triggers However this extended use also requires changes to the event structure and the introduction of new functions that now all start with EventExtended The old functions like EventAdd etc are still part of the new firmware but no longer documented The XPS event triggers work similar to IF THEN statements in programming If the event occurs then an action is triggered Programmer s can trigger any action from a list of possible actions see section 11 2 at any event from a large list of possible events see section 11 1 It is also possible to trigger several actions at the same event Furthermore it is possible to link several events to an event configuration In this case all events have to happen at the same time to trigger the action s It is comparable to a logic AND between the different events Some events are singular time events like motion start They will trigger an action only once when the event occurs Some other events have a duration like motion state They will trigger the same action each
37. as the distance spaced pulses PCO or the time spaced pulses see next section The function PositionerPositionCompareEnable enables always the last configuration sent either distance spaced pulses defined with the function PositionerPositionCompareSet or AquadB pulses defined with the function PositionerPositionCompareA quad BWindowedSet I 149 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 13 3 Time spaced pulses Time flasher In the time spaced configuration a first pulse is generated when the motion axis enters the time pulse window From this first pulse a new pulse is generated at every time interval until the positioner exits the time pulse window Hardware attains less than 50 ns jitter for the trigger pulses The duration of the pulse is 200 nsec by default and can be modified using the function PositionerPositionComparePulseParametersSet Possible values for the PCOPulseWidth are 0 2 default 1 2 5 and 10 us Please note that only the falling edge of the trigger pulse is precise and only this edge should be used for synchronization irrespactable from the PCOPulseWidth setting Note also that the duration of the pulse detected by your electronics may be longer depending on the time constant of your RC circuit Successive trigger pulses should have a minimum time lag equivalent to the PCOPulse Width time times two The following functions are used to generate time spaced pulses PositionerTimeF
38. be written and maintained independently of the source code for other objects Also an object can be easily passed around in the system e Information hiding An object has a public interface that other objects can use to communicate with it The object can maintain private information and methods that can be changed at any time without affecting the other objects that depend on it All objects have a life cycle and state diagrams are used to show the life cycle of the objects The transition from one state to another will be initiated by the reception of a message from another object Like all other diagrams state diagrams can be nested in different layers to keep them simple and easy to read 63 XPSDocumentation V2 6 x 08 11 Motion Tutorial 72 State Diagrams State diagrams are a way to describe the behavior of each group or object They represent each steady state of a group and every transition between states in an exhaustive way State diagrams contain the following components initial Point e Final Point State Nome State _ gt Transition Between 2 States QI Choice Point Here is an example of a simple stage diagram ee _ gt i First State gt i Second eel Inetial y L Point p gt Third State Choice Point ra w Final Point State diagrams can also include sub state diagrams First State Second State Third State The state diagrams that are specific to the XPS contro
39. both considered major faults the corresponding group goes to a not initialized state the system has to be initialized and homed again before any further motion e After a following error as it is considered a minor fault the corresponding group goes to a Disable state a GroupMotionEnable command puts the system back into ready state At any given time the group status can be queried from the controller The function GroupStatusGet GroupName returns the current state number The state numbers are associated to the state and to the event that has generated the transition if any The function GroupStatusStringGet StateNumber returns the state description corresponding to the state number 65 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial atal KAAGrosp 8 yoy NOTINIT tewtral eS Cal ite atel mcoderi 14 Error iro MOTOR_INIT T reteboe Actuetor t Set motor on Y ENCOOR_CAUB Scar oe HOMING Emergency Siop Y Emo gency Brake n The mumbers A the boses are the Ucton Orisdie _ _ ______ EMERGENCY BRAKING en pp ae n beid are the barators calet DE T a by API see below the oferi are eternal tr amutora behalve 1 reg Erro f ETE Serer l ANALOG j DISABLE e MOVING SPINNING SLAVE TRACKING 4 s a spin Sore Er table Abon Shop 10 Dessie 17 Donate 34 Move 7 son dea Pa smese i Slave Tracking
40. by setting the position counters to the stored position values For these special situations the XPS controller offers the referencing state as an alternative to the predefined XPS home search processes NOTE The referencing state should be only used by experienced users Incorrect use could cause damage The referencing state is a parallel state to the homing state see state diagram page 76 Figure 22 To enter the referencing state send the function GroupReferencingStart GroupName while the group is in the NOT REFERENCED state In the referencing state the function GroupReferencingActionExecute PositionerName Action Sensor Parameter is available to perform certain actions like moves position latches of reference signal transitions or position resets The function PositionerSGammaParametersSet PositionerName can be used to change the velocity acceleration and jerk time parameters To leave the referencing state send the function GroupReferencingStop GroupName The Group will be in the HOMED state state number 11 The syntax and function of the function GroupReferencingActionExecute PositionerName Action Sensor Parameter will be discussed in detail With this function there are four parameter to specify e PositionerName is the name of the positioner on which this function is executed e Action is the type of action that is executed There are eight actions that can be distinguished in three categories Move
41. cccssssccssssssccssccssecssccscrees 197 SERVICE ULI bi LI sivseekecencsecdatceiavcsveeicevecescerecessbentecesdeassessduesssssauncssseivedetesdcnestsedacese LOD Q gt Newport viii XPS Universal High Performance Motion Controller Driver Warranty CW Newport Newport Corporation warrants that this product will be free from defects in material and workmanship and will comply with Newport s published specifications at the time of sale for a period of one year from date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s option To exercise this warranty write or call your local Newport office or representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the product freight prepaid to the indicated service facility Repairs will be made and the instrument returned freight prepaid Repaired products are warranted for the remainder of the original warranty period or 90 days whichever comes first Limitation of Warranty The above warranties do not apply to products which have been repaired or modified without Newport s written approval or products subjected to unusual physical thermal or electrical stress improper installation misuse abuse accident or negligence in use storage transportation or handling This warranty also does not apply to fuses batteries or damag
42. communication requests priority over TCL script execution When using TCL scripts for machine security or other time critical tasks it is therefore important to limit the frequency of continuous communication requests from a host computer which includes the XPS web site and to confirm the execution speed of repetitive TCL scripts 13 XPSDocumentation V2 6 x 08 11 User s Manual 3 0 Getting Starte d XPSDocumentation V2 6 x 08 11 3 1 3 2 3 3 3 4 Unpacking and Handling It is recommended that the XPS Controller Driver be unpacked in your lab or work site rather than at the receiving dock Unpack the system carefully small parts and cables are included with the equipment Inspect the box carefully for loose parts before disposing of the packaging You are urged to save the packaging material in case you need to ship your equipment Inspection for Damage XPS Controller Driver has been carefully packaged at the factory to minimize the possibility of damage during shipping Inspect the box for external signs of damage or mishandling Inspect the contents for damage If there is visible damage to the equipment upon receipt inform the shipping company and Newport Corporation immediately WARNING Do not attempt to operate this equipment if there is evidence of shipping damage or you suspect the unit is damaged Damaged equipment may present additional hazards to you Contact Newport technic
43. controller disk in the folder Public Drivers DLL DLLs can also be downloaded through FTP LabView VIs with examples are also available on the controller disk in the folder Public Drivers LabView They can be downloaded through FTP To connect through FTP please see chapter 5 FTP connection The first part of this manual is the getting started part of the system It serves as an introduction and as a reference It includes 1 Introduction 2 System Overview 3 Getting Started Guide QD Newport XPSDocumentation V2 6 x 08 11 1 XPS User s Manual XPSDocumentation V2 6 x 08 11 The second part provides a detailed description of all software tools of the XPS controller It includes also an introduction to FTP connections and some general guidelines for troubleshooting maintenance and service 4 Software Tools 5 FTP connection 6 Maintenance and Service The third part provides an exhaustive description of the XPS architecture its features and capabilities Different than the programmer s guide this part is educational and is organized by features starting with the basics and getting to the more advanced features It provides a more complete list of specifications for the different features It includes 7 XPS Architecture 8 Motion 9 Trajectories 10 Compensation 11 Event Triggers 12 Data Gathering 13 Triggers 14 Control Loops 15 Analog Encoder Calibration 16 Introduction to
44. driver Figure 75 DRVOO Pass Through Connector Analog A output and Analog B output have 16 bits resolution and are 10 V output These signals are used to command an external driver CW Newport 195 XPSDocumentation V2 6 x 08 11 XPS Appendices 23 0 Appendix G Analog Encoder Connector XPSDocumentation V2 6 x 08 11 ENCODER 1 TO 8 Mating connector Mate 0615 mith UNC4MO lockers J PN Fi N F Anah A tw Ar A x Analog VB VPP Are pe 4 vA eN NC NC i L ypu 4 Are pe Analog A 0 Spe 5 NC r Home TTL input Figure 76 Analog Encoders Connector This connector is used to receive sine cosine encoder signals The sinusoidal position signals sine and cosine must be phase shifted by 90 and have signal levels of approximately 1 Vpp Each of these two signals is composed of an analog sinusoidal signal and his complement entering in a differential amplifier Sine Analog VA Analog VA Analog VA Analog VA Analog VB Analog VB Analog VI and Analog VI Levels for these signals must be 0 5 Vpp VA VA VB and VB inputs are the sine and cosine signals from the encoder glass scale VI and VI inputs are used to receive Index information from the encoder glass scale 5 VA This 5 V DC supply is provided for supplying the encoder 5 VL This 5 V DC supply is provided for supplying digital circuits Limit and Home Limit and Home are TTL inputs for Limit switch man
45. each servo cycle means every 100 ys or each profiler cycle means every 400 ps as long as the event is happening Event triggers and their associated action get automatically removed after the event configuration has happened at least once and is no longer true anymore The only exception is if the event configuration contains any of the permanent events Always or Timer In that case the event trigger will always stay active With the function EventExtendedRemove any event trigger can get removed The function EventExtended Wait can be used to halt a process It essentially blocks the socket until the event occurs Once the event occurs it gets deleted It requires a preceding function EventExtendedConfigurationTriggerSet to define the event at which the process continues The functions EventExtendedGet and EventExtendedAllGet return details of the event and action configurations 117 XPSDocumentation V2 6 x 08 11 Motion Tutorial 11 1 Events General events are defined as Always Immediate and Timer With the event Always an action is triggered each servo cycle means every 100 ys For events that are defined as Immediate an action is triggered once immediately means during the very next servo cycle For the events Timer an action is triggered immediately an
46. esssssoscecseccsoososcccccescoososccoseccsoosssececeesesososseesecessssssssesses 2 SpecICANONS nnn AR R N R ANRA 6 22 DVS OPONSE A 7 2 3 Compatible Newport Positioners and Drive Power Consumption 8 24 XPS Hardware OVECVISW iii iaia ia 9 23 Front Panel DESCIPloni urerili rara 9 2 6 Rear Panel Description need nane aio 10 2 6 1 Axis Connectors AXIS 1 AXIS 8 10 22 Ethernet Configuration ricatta a rai 11 2 7 1 Communication Protocols ieser naiaiaee 11 22 POTS SUG IRR Rai 12 2 8 Sockets Multitasking and Multi user Applications ii 12 29 Propramminp With TED eiie EEr E A NAAN A IAN EIN EEIE 12 CW Newport iii XPSDocumentation V2 6 x 08 11 XPS Universal High Performance Motion Controller Driver 3 0 Getting Sarei 3 4 Unpacking and Handlitig i i ella ala airi eee 14 32 Inspection Tor Damage seis ciescuadevenvevevecdarscocdsscceasitsteve RE A 14 33 Packinp List tall lalla 14 34 System Sepine ee chk ian ail ini alleno i o dun e i 14 SAL Installing Drivercards ag Sei A ek tee ea ent 15 SAD POWT ON rotenone aA a sadve scene dens vecdhe TAO albatdba clei ata ail sade cde 15 3 5 I onneclin gto dhe A S cioe ono e oe i ell i ele eats ie ia 16 3 5 1 Straight through cables black i 16 3922 CrOss OVer Cables Gray Jensona fea tes testes eusages a A lina 16 3 5 3 Direct Connection to the XPS controller ri 17 3 54 Connecting the
47. events and event parameters is as follow Always Triggers an action ALWAYS means each servo cycle Event parameter to 4 0 by default NOTE This event is PERMANENT until the next reboot Call the EventExtendedRemove function to remove it Immediate Triggers an action IMMEDIATELY means once during the very next servo cycle Event parameter 1 to 4 0 by default NOTE This event is EPHEMERAL Timer Triggers an action every nth servo cycle where n gets defined with the function TimerSet Event parameter 1 to 4 0 by default NOTE This event is PERMANENT until the next reboot Call the EventExtendedRemove function to remove it MotionDone Triggers an action when the motion done is reached Event parameter 1 to 4 0 by default For the exact definition of MotionDone please refer to section 8 5 ConstantVelocityStart Triggers an action when the constant velocity is reached Event parameter 1 to 4 0 by default ConstantVelocityEnd Triggers an action when the constant velocity is finished Event parameter 1 to 4 0 by default ConstantVelocityState Triggers an action during the constant velocity state Event parameter 1 to 4 0 by default Loritarntvesoerty State i t Event Evere Figure 40 Constant Velocity Event ConstantAccelerationStart Triggers an action when the constant acceleration is reached Event parameter 1 to 4 0 by default ConstantAccelerationEnd Triggers an action when the c
48. every one second Please note that the action GatheringOneData appends data to the current data file In order to store the data in a new file it is required to first launch the function GatheringReset which deletes the current data file from memory 8 GatheringConfigurationSet G1 P1 CurrentPosition EventExtendedConfigurationTriggerSet G1 P1 SGamma MotionStart 0 0 0 0 EventExtendedConfigurationActionSet GatheringRun 20 1000 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 GatheringStopAndSave In this example an internal data gathering of 20 data points every 0 1 second every 1000 servo cycle is launched with the start of the next motion of the positioner G1 P1 The type of data that gets gathered is defined with the function GatheringConfigurationSet CurrentPosition of positioner G1 P1 To store the data from internal memory to the flash disk in the XPS controller you need to send the function GatheringStopAndSave The GatheringRun deletes the current data file in the internal memory in contrast to the GatheringOneData which appends data to the current file Also the function GatheringStopAndSave stores the data file under a default name Gathering dat on the flash disk of the XPS controller and will overwrite any older file of the same name in the same folder Hence make sure that you store your valuable data files under different name after the GatheringStopAndSave NOTE When using the function Even
49. fractional but as the move size or distance to final position is small the Kform term approaches 1 and full GKx output is provided GKp 10 Kp 2 Target Position 0 Encoder Postion 100 to 100 Kform KP inser Encoder Poston 1 GK P tarm Encoder Ponto Target Position Encoder Position Kform Encoder Postion Figure 53 Variable Gains The parameter GKx is used to adjust the amplitude of the total output and the parameter Kform is used set how soon this Gkx is applied As seen in the figure below if a Kform of is implemented the GKx is not applied until the positioner is very close to it s target position in this case 0 But a Kform of 10 will implement the GKx much sooner and tighten the control of the loop further from the target position This can be very effective when positioning high inertial loads or when very short settling times are critical The default setting for the Kform parameter is 0 for all standard Newport stages QD Newport 160 XPS Motion Tutorial SetPoint Position C Newport rase _ Velocity _ SetPoint 14 2 Filtering and Limitation In addition to the various PID correctors and calculations the filtering and limitation parameters also have the same structure for all the correctors PIDFFVelocity PIDFFAcceleration and PIDFFDualVoltage etc OUTPUT from i ai Y h m PID and Feedforward gt VY m gt V Pez heres a E Correctors
50. function GatheringRun starts always a new internal data gathering and deletes any previous internal gathering data hold in the buffer If you want to append data to the file use the function GatheringRunAppend instead Event Based Internal Data Gathering The event based gathering provides a method to gather data at an event For instance gathering data at a certain value of a digital or analog input during a constant velocity state of a motion or on a trajectory pulse The event based data gathering uses the same file as the time based and the function based data gathering see sections 12 1 and 12 3 However unlike the time based gathering the event based gathering appends data to the existing file in memory This allows gathering of data during several periods or even with different methods in one common file see examples To start data gathering in a new file use the function GatheringReset which deletes the current gathering file from memory The data type s that can be collected with the event based gathering are the same as for the time based and the function based gathering Positioner Name CurrentPosition Positioner Name SetpointPosition Positioner Name FollowingError PositionerName CurrentVelocity PositionerName SetpointVelocity 139 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial PositonerName CurrentAcceleration PositionerName SetpointAcceleration PositionerName CorrectorOutput GPIO ADC DA
51. generated with continuous movements of the MultipleAxes group s positioners over several time periods For each period each positioner must complete a defined displacement from its current position and a defined output velocity at the end of the period By definition there is no constant vector velocity and no definition for a vector acceleration in contrast to line arc trajectories or splines Trajectory element segment An element of a PVT trajectory is defined by a set of all positioner displacements and output velocities and the duration for this segment In the PVT data file each element is presented by a line DT DP1 VOI DP2 VO2 DPn VOn DT The segment duration in seconds DP1 DP2 DPn Positioners 1 2 n displacements during DT VOI VO2 VOn Positioners output velocities at the end of DT 9 3 2 Trajectory Conventions When defining and executing a PVT trajectory a number of rules must be followed e The motion group must be a MultipleAxes group e All trajectories must be stored in the controllers memory under public trajectories Once a trajectory is started it executes in background allowing other groups to work independently and simultaneously e Each trajectory must have a beginning and an end Endless infinite trajectories are not allowed Though N times N defined by user non stop execution of a trajectory is possible As the trajectory is stored in a file the trajectory maximum size max
52. in open loop the PI output is cut and the feed forward in position is applied PI corrector e Output of the PI is a position Kp has no units Ki is given in 1 s 166 XPS Motion Tutorial CW Newport 14 3 4 2 Basics amp Tuning In most cases only Ki is needed to correct static errors The overall gain of the integral part of the servo loop at a given frequency Frq is Gain 20 OFrq This gain is equal to one at Ki Frqi ae 167 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 15 0 Analog Encoder Calibration This section refers only to analog sine encoder inputs The purpose of the analog encoder interpolation feature is to improve the stage accuracy by detecting and correcting analog encoder errors such as offsets sine to cosine amplitude differences and phase shift Other kinds of errors can exist in the encoder such as impure sine or cosine signals This feature will not compensate for them and will disturb the results of the calibration process Also this calibration process assumes that the errors are small i e less than a few percent Below are figures and numbers to illustrate the type of errors and their impact on accuracy Offset Error Error when 1 of sine or cosine offset w Penod Eacoder Per od Figure 59 Offset Error The offset error generates 0 32 interpolation error per percent offset on the sine or cosine signals With a 20 um scale pit
53. information about some of the steps described here Once you are logged in as Administrator click on STAGE and then click on Add from database 1 The following screen appears S o ey ed SD Rina 6 2 Select a family name from the list Double click 3 Select the part number corresponding to your hardware Double click CW Newport 28 User s Manual eH Newport Select the driver corresponding to your hardware and configuration For all continuous rotation stages you can choose between a regular stage configuration and a Spindle configuration A Spindle is a specific rotary device with a periodic position reset at 360 means 360 equals 0 When defining the stage as Spindle in the stages ini you must assign this stage also to a Spindle group in the system configuration and vice versa For details about Spindles please refer also to section 7 3 5 Once the stage name appears you can modify it if you like see comments above 6 The box Use ESP Compatibility for Hardware detection is checked by default If your stage has an ESP chip inside see blue ESP compatible sticker on the stage this box shall remain checked Otherwise with vacuum compatible stages or with old Newport stages uncheck this box Click on Add new stage to add the stage Once all stages have been added you can review or modify these parameters from the screen Modify under the main tag
54. of the PC s operating system Windows Linux Unix Mac OS and programming language LabView C C VisualBasic Delphi etc The XPS controller supports the development of host managed processes with a Windows communication DLL a complete set of LabView drivers and a number of example programs in C VisualBasic and LabView A few basic examples are provided in this section For more details please refer to the Software Drivers Manual XPS managed processes TCL The XPS controller is also capable of controlling processes directly using TCL scripts TCL stands for Tool Command Language and is an open source string based command language With only a few fundamental constructs it is very easy to learn and it is almost as powerful as C Users of XPS can use TCL to write complete application code and XPS allows them to include any function to a TCL script When developed the TCL script can be executed in real time on the motion controller in the background utilizing time that the controller does not need for servo or communication Multiple TCL programs run in a time sharing mode To learn more about TCL refer to the TCL Manual which is accessible from the web site of the XPS controller The advantage of XPS managed processes compared to host managed processes is faster execution and better synchronization in many cases without any time taken from the communication link XPS managed processes or sub processes are particularly valuable
55. of the mapping file here 3 and 3 Use of the functions e GroupiInitialize MyGroup e GroupHomeSearch MyGroup e GroupMoveAbsolute MyGroup Positioner 0 25 The mapping file must at least cover the minimum and the maximum travel of the positioner It must cover MinimumTargetPosition and MaximumTargetPosition parameters defined in the stages ini section Travels In the example above the travel of the positioner can not be larger than 3 units but it can be smaller than this The units for the data are the same as defined by the EncoderResolution in the stages ini The data reads as follows the corrected position at position 3 00 units is 2 99846 units 3 00 0 00154 Between two data the XPS controller is performing a linear interpolation of the error The corrected position at position 0 25 units is 0 24965 units 0 25 0 00140 0 25 1 NOTE Mapping is a functionality implemented within the controller to correct the errors of accuracy Once activated mapping is transparent for the user The function GroupPositionCurrentGet doesn t return 0 24965 0 25 0 00140 0 25 1 but 0 25 108 Motion Tutorial API gt move to XY TargetPosstion X Mapping Frie 0 Yma VI Zt Xen Xerr00 E 2 XI A t OI a Am QU Newport 10 4 XY Mapping XY mapping is only available with XY groups It compensation for all errors of an XY group at any position of that XY group XY mapping can be used in
56. of the motor driver connectors in appendix F Configure your system with a number of those dummy stages Dummy stages can be found in the stages ini file see Admin Config folder of the controller under DUMMY_STAGE 24 User s Manual 3 8 C Newport es Configuring the Controller When the driver boards are installed and the IP address is configured the controller can be configured Switch off the XPS controller Connect the stages or motion devices Switch on the XPS controller and wait for the end of the boot sequence There is an initial beep a few seconds after the power on and a second beep when the controller has finished booting The time between the first beep and the second beep is approx 1 2 minutes Open an internet browser and connect to http lt your fixed IP address gt pma mnan raro Gee oer eee Pme Mev port lpewu inar Motion Controller Driver KPS C8 ore Se Login Administrator Password Administrator Rights Administrator There are two possibilities to configure the controller Auto configuration and manual configuration Auto Configuration is the simplest method to configure the controller but has some limitations Auto configuration works only with Newport ESP compatible positioners Auto configuration configures all detected positioners as single axis groups But single axis groups provide only limited functionality no synchronized motion no trajectories n
57. parameter Positioner name Minimum Position Maximum Position To enable the AquadB signals the function PositionerPositionCompareEnable must be sent C amp gt Newport 148 re XPS Motion Tutorial Example GroupInitialize MyStage GroupHomeSearch MyStage Positioner PositionCompareA quadBWindowedSet MyStage X 10 20 PositonerPositionCompareEnable MyStage X Positioner PositionCompareGet MyStage amp MinimumPosition amp MaximumPosition amp EnableS tate This function returns the parameters previously defined the minimum position 10 the maximum position 20 and the enabled state 1 enabled 0 disabled GroupMoveAbsolute MyStage 30 Positioner PositionCompareDisable MyStage X The figure below shows a screen shots from an oscilloscope for the example above CHTS CHOSEN 20msfdiw DO it WE HEI T NORIESICH fs RI nu MUD PIRLA ee Ri Ft FILE YEr eee The group has to be in a READY state for the position compare to be enabled Also the PositionerPositionCompareA quadB WindowedSet function must be completed before the PositionerPositionCompareEnable function In this example AquadB signals are generated when the positioner is between the minimum position of 10 mm and the maximum position of 20 mm IMPORTANT NOTE The AquadB signal configuration is only available with positioners that have an encoder AquadB or AnalogInterpolated The AquadB signals can not be provided at the same time
58. right driver 1 to the left driver 8 when looking at the controller from the back If 8 boards or less are used the remaining slots must disabled with the appropriate covers that were delivered with the controller The surrounding ventilation holes at the sides and back of the XPS rack must be free from obstructions that prevent free flow of air 3 4 2 Power ON cH Newport Plug the AC line cord supplied with the XPS into the AC power receptacle on the rear panel Plug the AC line cord into the AC wall outlet Turn the Main Power Switch to ON located on the Rear Panel The system must be installed in such a way that power switch and power connector remain accessible by the user After the main power is switched on the LED on the front panel of the XPS will turn green There is an initial beep after power on and a second beep when the controller has finished booting The time between the first and the second beep can be 1 2 minutes There is also a STOP ALL button on the front panel that is used to shut down all the motors 15 XPSDocumentation V2 6 x 08 11 User s Manual 3 5 3 5 1 3 5 2 XPSDocumentation V2 6 x 08 11 Connecting to the XPS The Newport s XPS Controller Driver is a multi axis motion controller system that is based on a high performance 10 100 base T Ethernet connection using CATS cable The controller can be connected in 2 different ways 1 Direct connection PC to XP
59. s or 500 mm s e Ifthe output velocity is equal to 50 mm s Poison 100 p o 0 y 40 60 x oc ns e Ifthe output velocity is equal to 500 mm s Porman ns Figure 33 PVT trajectory element in execution the comparison ye re 99 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 9 3 6 9 3 7 A PVT trajectory must have three parameters position velocity and time With given target displacement output velocity and time duration the PVT trajectory calculates intermediate positions and velocities as a function of time With an output velocity of 50 mm s the positioner has enough time to achieve the displacement within the assigned time 100 ms in the forward direction The velocity increases at the beginning and then slows down towards the end The position always increases up to the target position 5 mm On the other hand when the output velocity is set to 500 mm s the positioner does not have enough time to achieve the displacement and speed requirements in the forward direction So the positioner will first reverse the direction of motion to be able to approach the end position with a speed of 500 mm s Trajectory File Description The PVT trajectory is described in a file that is in the public trajectories folder of the XPS controller Each line of this file represents one element of the trajectory A line contains several data separated by a comma The number of data i
60. same event To do so just define another action in the SAME function Several actions are separated by a comma Example EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerError 2 0 0 0 EventExtendedConfigurationActionSet ExecuteTCLScript ShutDown tcl 1 0 0 ExecuteTC LScript ErrorDiagnostic tcl 2 0 0 EventExtendedStart In this example the TCL scripts ShutDown tcl and ErrorDiagnostic tcl are executed when a fatal following error is detected on the positioner MyGroup MyPositioner The exact meaning of the different action and action parameters is as follow DOToggle This action is used to reverse the value of one or many bits on the Digital Output When using this action with an event that has some duration for example motion state the value of the bits will be toggled each profiler cycle as long as the event occurs Action Parameter 1 Mask The mask defines which bits on the GPIO output will be toggled change their value For example if the GPIO output is an 8 bit output and the mask is set to 4 then the equivalent binary number is 00000100 So as an action the bit 3 will be toggled Action Parameter 2 to 4 These parameters must be 0 by default DOPulse This action is used to generate a positive pulse on the Digital Output The duration of the pulse is 1 microsecond To function the bits on which the pulse is generated should be set to zero before When using this action with
61. structure of such a data file PosMin Error 0 Pos 1 Error 1 Pos 2 Error 2 0 0 PosMax Error LineNumber 1 To activate the positioner mapping the mapping file must be in the admin config directory of the XPS controller and the following settings must be done in the stages ini e PositionerMappingFileName Name of the mapping file e PositionerMappingLineNumber Number of lines of that file e PositionerMappingMaxPositionError Maximum absolute error in that file any value larger than the actual largest value in the file will be accepted as well The PositionerMappingLineNumber and the PositionerMappingMaxPositionError are only used to check for the correctness of the mapping file CH Newport re 107 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 Example The following shows an example of a positioner mapping data file PosMapping txt 3 00 0 00125 2 00 0 00112 1 00 0 00137 0 00 0 00000 1 00 0 00140 2 00 0 00145 3 00 0 00154 Define the positioner mapping in the stages ini file Backlash Backlash 0 unit Positioner mapping PositionerMappingFileName PosMapping txt PositionerMappingLineNumber 7 PositionerMappingMaxPositionError 0 00154 Travels MinimumTargetPosition 2 unit HomePreset 0 unit MaximumTargetPosition 3 unit NOTE These travel limits must be equal to or within the positioner limit positions
62. the FTP server with the IP address of the controller Q gt Newport 59 XPSDocumentation V2 6 x 08 11 XPS Software Tools Example Brown eee e Itis normal that the following error message appears Windows cannot accesi Bri old Mate sure pou typed the lie nane comectly and that you have permeson te scones the foibe Dersi 220 Wewerts PIP server VeWorts 4 2 ready CE e Press OK e Select File from the top menu of the Internet browser and then Connect as The following window appears O O 9 Pme bi a pman F Don M i e ee nr ee er eee re mano ae i ee ae Ot ete et et eee Aree eee etn wegen me o nm _ ce m du fi 2 oe ra e Specify the XPS user name and XPS password Press log on The folders of the XPS controller are displayed see below Browse through the different folders and transfer data from or to your host PC the same way as with Windows Explorer 0e Cit p rpm Joe tie 3 4 ma toon TT agree UB re rite sen rar Be un Google 2 hasta BG Puri Bice 4 Prits x ies le et G pete on ee Potter np mans On teomert Pros Pia Price CE 2008 peas yn Gree Oaa Fd tie 2 po er 3 RY wert nem etre Pee Putter Gu 0m 2908 10 33 toa eterna Dret ure iian x lorda Poet 2 hee vtan Lr aeure Orr QO Newport XPSDocumentation V2 6 x 08 11 60 XPS Software Too
63. the distance the frequency divisor the velocity and the acceleration Define the velocity acceleration and jerk time When done click Set amp Move The gathering results are displayed in a Java applet window To see the results you have to install Java Runtime Environment Standard Edition on your computer The XPS provides a direct link to download Java Runtime when not installed on your computer Em ooa cn et Peterson noe toe 2 Qq Die eS III AH HI ololelole When satisfied with the results there is no need to tune the stage When not satisfied go back to the tuning page and move back to the start position Next to the button auto tuning you have a choice field for the Auto tuning parameters Select Short settling or High robustness Choose Short settling to improve the settling time after a motion or to reduce the following error during the motion Short settling will define high PID vales for your stage but there is a risk of oscillations Choose High robustness to improve the robustness of your system and to avoid oscillations during or after a motion A High robustness tuning for instance can avoid oscillation of rotation stage with high payload inertias When done with your selection press Auto tuning 58 XPS Software Tools 6 The stage vibrates for a couple of seconds When done the following screen appears et tree e edie te 7 Press
64. the electrical ground GND e Input levels must be between 0 V and 5 V All servitude inputs are refreshed synchronously with control loop 10 kHz All servitude inputs are identical All servitude inputs expect normally closed sensors referenced to ground input is activated if the sensor is open and have internal 2 2 KQ pull up resistors to the 5 V 18 4 Analog Encoder Inputs Analog Encoder Connectors Analog encoder interface comply with the Heidenhain LIF481 glass scales wiring standard XPSDocumentation V2 6 x 08 11 186 XPS Appendices CW Newport 18 5 18 5 1 18 5 2 Analog I O GPIO2 Connector Analog Inputs The 4 analog inputs have 10 V range 14 Bit resolution and a 15 kHz 2nd order low pass filter front end In all cases the analog input values must be within the 10 V The analog input impedance is typically 22 kQ The maximum input current is 500 pA 1 LSB 20 V 16384 1 22 mV The maximum offset error is 17 1 mV Analog Outputs The 4 analog outputs have 10 V range and 16 Bit resolution The maximum offset error is 2 mV and the maximum gain error is 6 LSB The output settling time is typically 50 usec at 1 of the target value output filter is a 15 kHz Ist order low pass filter Analog outputs are voltage outputs output current less than 1 mA so to use them properly they must be connected to impedance higher than 10 kQ 1 LSB 20 V 65536 0 3 mV Analog outputs
65. to function Each of the four available motion groups has specific features Specific SingleAxis Group Features Master Slave To enable this function the slaved positioner must be defined as a SingleAxis group The master positioner can be a member of any motion group So it is possible to define a Positioner as a slave of another positioner that is part of an XYZ group Specific Spindle Group Features The Spindle Group is a single positioner group that enables continuous rotations with no limits and with a periodic position reset Master Slave In Master Slave spindle mode the master and the slave group must be Spindle groups Specific XY Group Features Line Arc trajectories XY mapping These features are only available with XY groups It is not possible for an XY group to perform a Spline or a PVT trajectory Also an XY group cannot be slaved to another group however any positioner of an XY group can be a master to a slaved SingleAxis group Specific XYZ Group Features Spline trajectories XYZ mapping These features are only available with XYZ groups It is not possible for an XYZ group to perform a Line Arc or a PVT trajectory Also an XYZ group cannot be slaved to another group however any positioner of an XYZ group can be a master to a slaved SingleAxis group Specific MultipleAxes Features PVT trajectories PVT trajectories are only available with MultipleAxes groups It is not possible for a MutipleA
66. trajectory acceleration can also be set to zero In this case the controller uses executable default values which are the Min All V max actuatory for the trajectory velocity and the Min All Amax actuators for the trajectory acceleration A trajectory can be executed many times up to 2 times by specifying the ExecutionNumber parameter with the XYLineArcExecution function In this case the second run of the trajectory is simply appended at the end of the first run while the end position of the first run is taken as a new Start position referenced to zero of the second run The trajectory endpoint does not need to be the same as the start point The total trajectory is executed without stopping between the different runs Finally the function XYLineArcParametersGet returns the trajectory execution status with trajectory name trajectory velocity trajectory acceleration and current executed trajectory element This function returns an error if the trajectory is not in execution Examples of the Use of the Functions XYLineArcVerification XYGroup Linearcl trj This function returns a 0 if the trajectory is executable XYLineArcVerificationResultGet XYGroup X Positioner Name NegTravel PosTravel MaxSpeed MaxAcceleration This function returns the name of the trajectory checked with the last sent function XYLineArcVerification to that motion group Linearc1 trj the negative or left travel requirement for the XYGroup XPositio
67. trajectory is stored in a file the trajectory maximum size maximum elements number is unlimited for practical purposes e Two types of trajectory elements segments are available lines Line X Y and arcs Arc R A Radius SweepAngle Any line arc trajectory is a set of consecutive line or arc segments The line segments are true linear interpolations y A x B the arc segments are true arcs of circles x x0 y yO R e A line arc trajectory forms a continuous path so each segment s final position is equal to the next segment s starting position However as the segment s tangential angles around the connection point of any two consecutive segments may not be continuous there might be some velocity discontinuities from one segment to next which means that the line arc trajectory continuity property is RO An excessive velocity discontinuity at joints can damage the mechanics so the trajectory definition process must take this into account e Each line arc trajectory element is defined relative to the trajectory starting point Every trajectory starting point has the coordinates 0 0 which has no relation to the zero position of the positioners All trajectories physically start from the current X and Y positions of the XY group Geometric Conventions The coordinate system is an XY orthogonal system The X axis of this system correlates to the XPositioner and the Y axis correlates to the YPositioner of the XY gro
68. trajectory is stopped Event parameter 1 to 4 0 by default TrajectoryState Triggers an action during the trajectory state Event parameter 1 to 4 0 by default Tr ageciory Stato f vent Y y frajeciary Start Trmectorytad tweet Event Figure 44 Trajectory Event ElementNumberStart Triggers an action when the trajectory element number is started The first event parameter specifies the number of the trajectory element The other event parameters are 0 by default ElementNumberState Triggers an action during the execution of that trajectory element number The first event parameter specifies the QD Newport 121 XPSDocumentation V2 6 x 08 11 Motion Tutorial TrajectoryPulse number of the trajectory element The other event parameters are 0 by default Figure 45 Element Number Event Triggers an action when a pulse on the trajectory is generated see chapter 13 0 Output Triggers for details All event parameters are 0 by default Note that any event trigger gets automatically removed when it has happened at least once and not anymore on the next servo or profiler cycle Hence in order to trigger an action at every TrajectoryPulse it is required to link that event to the event Always see also section 114 Examples TrajectoryPulseOutputState Triggers an action during the trajectory pulse output DILowHigh DIHighLow DIToggled ADCHighLimit ADCLowLimit XPSDoc
69. used during the move can be a little bit different from the velocity defined in the parameters The function PositionerSGammaExactVelocityAdjustedDisplacementGet can be used as described below to achieve the exact desired speed in applications that require an accurate value of the velocity during a move In this case the velocity value is adhered to but the target position can be slightly different from the one required In other words according to the application requirements the user can choose between very accurate positions or very accurate velocities Example PositionerSGammaExactVelocity Adjusted DisplacementGet MyGroup MyStage 50 55 ExactDisplacement This function returns the exact displacement for that move with the exact constant velocity set above 10 mm s The result is stored in the variable ExactDisplacement for instance 50 552 GroupMoveAbsolute MyGroup MyStage 50 552 In the above example for a position of 50 55 mm the command returns a value of 50 552 This means that in order for the positioner MyStage to achieve the desired C amp gt Newport XPSDocumentation V2 6 x 08 11 70 XPS Motion Tutorial 8 2 velocity in the most accurate way the commanded position should be 50 552 mm instead of 50 55 mm The XPS can report two different positions The first one is the SetpointPosition or theoretical position This is the position where the stage should be according to the profile gener
70. using the default setting for the EncoderSettlingTime 0 075 ys under these conditions it is well likely possible that more than one trigger pulse is generated since the stage seen by the controller is moving back and forth A higher value setting for the EncoderSettlingTime could avoid these unwanted and unpredictable extra trigger pulses in this case Pulses oreng gt 4 Poutor 4 Encoder Settinglime gt lt Figure 47 Position Compare Output The following functions are used to configure the distance spaced pulses Positioner PositionCompareSet Positioner PositionCompareGet Positioner PositionCompareEnable PositionerPositionCompareDisable The function PositonerPositonCompareSet defines the position window and the distance for the trigger pulses It has four input parameters Positioner Name Minimum Position Maximum Position Position Step To enable the distance spaced pulses the function PositionerPositionCompareEnable must be sent QD Newport 145 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial Example GroupInitialize MyStage GroupHomeSearch MyStage PositionerPositionCompareSet MyStage X 5 25 0 002 PositonerPositionCompareEnable MyStage X PositionerPositionCompareGet MyStage amp MinimumPosition amp MaximumPosition amp PositionStep amp EnableState This function returns the parameters previously defined the minimum position 5 the maximum position 25 the position st
71. with repeating tasks tasks that run in a continuous loop and tasks that require a lot of data from the XPS controller Examples include anti collision processes processes that utilize security switches to stop motion when stages are in danger of collision tracking auto focusing or alignment processes processes that use external data inputs to control the motion or custom initialization routines processes that must constantly be executed during systems use The XPS controller has real time multi tasking functionality and with most applications it is not only a choice between a host managed or an XPS managed process but also a recognition of splitting the application into the right number of sub tasks and defining the most efficient process for each sub task An efficient process design is one of the main challenges with today s most complex and critical applications in terms of time and precision It is recommended to spend a lot of thought to the proper definition of the best process approach The aim of this section is to provide a brief introduction to the different ways of XPS programming This section however cannot address all details For further information refer to the TCL and the software drivers manual of the XPS controller which are accessible via the XPS web site interface 173 XPSDocumentation V2 6 x 08 11 Motion Tutorial 16 1 XPSDocumentation V2 6 x 08 11 TCL Generator The TCL generator provide
72. x 08 11 The 2 data XY X CurrentPosition and XY Y CurrentPosition will be gathered GatheringDataAcquire Gathers one set of data GatheringCurrentNumberGet This function will return 1 500000 I set of data acquired max 500 000 sets of data can be acquired GatheringDataAcquire GatheringDataAcquire GatheringCurrentNumberGet This function will return 3 500000 3 sets of data acquired max 500 000 sets of data can be acquired Trigger Based External Data Gathering The trigger based data gathering allows acquiring position and analog input data at receive of an external trigger input TRIG IN connector at the XPS see section 24 0 for more details The position data is latched by dedicated hardware The jitter between the trigger signal and the acquisition of the position data is less than 50 ns The analog inputs however are only latched by an internal interrupt at a rate of 10 kHz and the XPS will store the most recent value Hence the acquired analog input data might be up to 100 ys old NOTE There must be a minimum time of 100 us between two successive trigger inputs The data of the trigger based external data gathering is stored in a file named ExternalGathering dat which is different from the file used for the internal data gathering Gathering dat Hence internal and external data gathering can be used at the same time The function GatheringExternalConfigurationSet defines which type o
73. y Digital Digital Limitation Scaling Notch Fiter 1 Notch Filter 2 Figure 54 Filtering and Limitation The first section of the above diagram shows the succession of two digital notch filters Each filter is defined by its central frequency NotchFrequency its bandwidth NotchBandwidth and its gain NotchGain The gain usually in the range of 0 01 to 0 1 is the value of the amplification for a signal at a frequency equal to the central frequency and the bandwidth is the range about the central frequency for which this gain is equal to a 3 db reduction Notch filters are typically used to avoid the instability of the servo loop due to mechanics natural frequencies by lowering the gain at these frequencies When they are implemented these filters add some phase shift on the signal This phase shift increases with the filter bandwidth and must remain small in the frequency range where the servo loop is active to maintain stability The result is that notch filters are only effective at avoiding instabilities due to excessive and constant natural frequencies The last section of the diagram shows the limitation and scaling features Scaling is used to transform units of position speed or acceleration in the corresponding voltage The Limitation factor is a safety that is used to limit the maximum voltage that can be applied to the driver to protect against any runaway or saturation situations that may occur 14 3 Feed Forward Loops and
74. 0 00152 0 00335 o o o o o o 5 5 00 0 0 0 0 0 0 0 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00453 0 00322 0 00376 0 00412 0 00258 0 00111 0 00287 0 00331 0 00445 0 00769 0 00126 0 00153 0 00298 0 00487 0 00787 0 00228 0 00787 0 00320 0 00154 0 00169 0 00369 0 00232 0 00210 0 00342 0 00169 0 00265 0 00169 0 00125 0 00134 0 00308 0 00275 0 00369 0 00337 0 00214 0 00456 0 00189 0 00148 0 00234 0 00458 0 00333 0 00152 0 00335 113 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial Matrix Y XYZMapping_Y txt 1 00 3 00 2 00 1 00 0 00 1 00 2 00 3 00 3 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 2 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 1 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 0 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 1 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 2 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 3 00 0 00190 0 00530 0 00190 0 00125 0 00190 0 00530 0 00190 0 0 0 0 0 0 0 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0
75. 00137 0 00110 0 00123 o ooo oO 0 0 0 0 0 0 0 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 0 00192 0 00534 0 00254 0 00125 0 00137 0 00110 0 00123 Matrix Z XYZMapping_Z txt 1 00 3 00 2 00 1 00 0 00 1 00 2 00 3 00 3 00 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 2 00 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 1 00 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 00 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 1 00 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 2 00 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 3 00 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0 0 0 0 0 0 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0003 0 0003 0 0003 0 0 0003 0 0003 0 0003 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0003 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 1 00 0 0 0 0 0 0 0 0 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0002 0 0 0003 0 0003 0 0003
76. 100 ys or equal to the profiler cycle time of 400 us for motion related events For events with duration it means also that the same action is triggered each servo cycle means every 100 ys or each profiler cycle which means every 400 us as long as the event is happening C amp gt Newport 130 Motion Tutorial eH Niewport 114 Event triggers and their associated action get automatically removed after the event configuration has happened at least once and is no longer true anymore The only exception is if the event configuration contains any of the permanent events Always or Trigger In that case the event trigger will always stay active With the function EventExtendedRemove any event trigger can get removed e EventExtendedWait This function halts a process essentially by blocking the socket until the event defined by the last EventExtendedConfigurationTriggerSet occurs e EventExtendedRemove This function removes the event trigger associated to the defined event identifier e EventExtendedGet This function returns the event configuration and the action configuration associated to the defined event identifier e EventExtendedAllGet This function returns for all active event triggers the event identifier the event configuration and the action configuration The details of the different event triggers are separated by a comma Examples Below is a table that shows possible events t
77. 11 184 TAGE XPS Appendices 18 0 Appendix B General I O Description This paragraph briefly describes all XPS signal types Description of each XPS connector interface is detailed in further paragraphs 18 1 Digital I Os All GPIO Inhibit and Trigger In and PCO Connectors All digital I Os are TTL compatible e All digital I Os are not isolated but are referenced to electrical ground GND e Input levels must be between 0 V and 5 V e Output levels should be at least 5 V up to 30 V absolute maximum rating with open collector outputs e Outputs must be pulled up to the user external power supply 5 V to 24 V This external power supply must be referenced to the XPS ground GND All digital I Os are refreshed asynchronously on user requests Therefore digital inputs or outputs have no refreshment rate Typical availability delay is 100s due to function treatment All digital inputs are identical except for GPIO3 inhibition input described with GPIO3 All digital inputs are in negative logic and have internal 5 V pull up resistors 18 1 1 Digital Inputs Parameter Symbol Min Max Units Low Level Input Voltage Vi 0 0 8 V High Level Input Voltage Vin 1 6 3 V Input Current LOW IL 2 5 mA Input Current HIGH lu 0 4 mA Figure 63 Digital TTL Input GPIOn inputs n 1 to 4 can be accessed via the GPIODigitalGet GPIOn DI function All digital outputs are identical
78. 15 15 6 771 3 0 0 16 20 20 4 5 0 635 17 15 33 229 5 10 2 679 18 10 37 321 6 15 6 771 19 5 39 365 7 20 20 20 0 40 8 15 33 229 21 5 39 365 9 10 37 321 22 10 37 321 10 5 39 365 23 15 33 229 11 0 40 24 20 20 12 TA 0 CW Newport Figure 32 Executing the above trajectory data file with the Catmull Rom spline algorithm 95 K Ans XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 9 28 Spline Trajectory Verification and Execution To verify and execute a spline trajectory there are four functions e XYZSplineVerification Verifies a spline trajectory data file e XYZSplineVerificationResultGet Returns the last trajectory verification results actuator by actuator This function works only after a XYZSplineVerification e XYZSplineExecution Executes a trajectory e XYZSplineParametersGet Returns the trajectory current execution parameters This function works only during the execution of the trajectory The function XYZSplineVerification can be executed at any moment and is independent from the trajectory execution This function performs the following e Checks the trajectory file for data coherence e Calculates the trajectory limits which are the required travel per positioner the maximum possible trajectory velocity and the maximum possible trajectory acceleration This function helps defi
79. 156 XPS Motion Tutorial CW Newport 14 1 2 MotorDriverInterface AnalogStepperPosition CorrectorType NoEncoderPosition These are just examples of available positioner associations in the XPS The flexibility of positioner associations allows many other configurations to be developed to drive non Newport positioners or other products Before developing other configurations the user should be aware that the main goal of creating these associations is to match the servo loop output to the appropriate driver input as stated by the manufacturer For instance The Corrector PIPosition is used when a constant voltage applied to a driver results in a constant position of the positioner stepper motor piezo electrostrictive etc Corrector PIDFFVelocity is used when a constant voltage applied to a driver results in a constant speed of the positioner DC motor and driver board in speed loop mode Corrector PIDFFAcceleration is used when a constant voltage applied to a driver results in a constant acceleration of the positioner DC motor and driver board in current loop mode Corrector PIDDualFFVoltage is used when a constant voltage applied to a driver results in a constant voltage applied to the motor DC motor and driver board with direct PWM command XPS PIDFF Architecture Corrector loops PIDFFVelocity PIDFFAcceleration and PIDFFDual Voltage all use the same architecture as the PID corrector that is detailed below PIPo
80. 3 Direct Connection to the XPS controller For a direct connection between a PC and the XPS controller you need to use the gray cross over cable and the HOST connector at the back of the XPS mainframe Figure 14 Direct Connection to the XPS using cross over cable First the IP address on the PC s Ethernet card has to be set to match the default factory XPS s IP address 192 168 0 254 Here is the procedure to set the Ethernet card address This procedure is for the Windows XP operating system 1 Start Button gt Control Panel gt Network Connections 2 Right Click on Local Area Connection Icon and select Properties Ce Shem Corn roti shen ane wher torrent CEI CE 3 Highlight Internet Protocol TCP IP and click on Properties 4 Type the following IP address and Subnet Mask as shown in the next window QD Newport 17 XPSDocumentation V2 6 x 08 11 User s Manual XPSDocumentation V2 6 x 08 11 n can get rete erre afore aly you retreat nooo Pu capote ferme a remi b et poy eteri An wor bo te omase iP trg Obten an iP ahders atomic al Use te tndserg if ade abbr iret mat Deins gerwa 5 Click OK NOTE The Last number of the IP address can be set to any number between 2 to 253 100 for example NOTE When configuring the controller to be on the network the settings for the PC s Ethernet card will have to be set back to default under Obtain an IP addr
81. 350 ys Use this rounded time interval to calculate a corrected velocity 268 nm 1 350 ws 198 51852 mm s GroupMoveAbsolute MyStage X 50 PositionerSGammaParametersSet MyStage X 198 51852 2500 0 02 0 02 Positioner TimeFlasherSet MyStage X 30 30 0 00000135 Positioner TimeFlasherEnable MyStage X GroupMoveAbsolute MyStage X PositionerTimeFlasherDisable MyStage X In this example a first pulse is generated when the stage crosses the position 30 mm Further pulses are generated every 1 350 ms until the stage reaches the maximum position of 30 mm As the stage moves at a speed of 198 51852 mm s the nominal distance between successive pulses is 198 51852 mm s 1 35 ws 268 nm CW Newport 151 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 13 4 XPSDocumentation V2 6 x 08 11 Triggers on Line Arc Trajectories This capability allows output of pulses at constant trajectory length intervals on Line Arc Trajectories The pulses are generated between a start length and an end length All lengths are calculated in an orthogonal XY plane The StartLength EndLength and PathLengthInterval refer to the Setpoint positions The trajectory length is calculated at a rate of 10 kHz This means that the resolution of the trajectory length is 0 0001 trajectory velocity For a trajectory velocity of 100 mm s for instance the resolution of the trajectory length is 10 wm If the programmed PathLengthInterval i
82. 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail rma service newport com Europe MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde Bat B ZI Bois de l pine BP189 91006 Evry Cedex France Sales Tel 33 0 1 60 91 68 68 e mail france newport fr com Technical Support e mail tech_europe newport com Service amp Returns Tel 33 0 2 38 40 51 55
83. 9 ko r ok ance 15 Ex1_VernonGetico dea to Pater de apple 8 Ex1_VersionGetsc2 BD Peace rt es Eternal Depercdencaet Saletiorre n element pos oft ene re ATENON Once these files are added for instance to a C project the prototypes of the functions can be called in the program with the respective syntax of the functions parameters number type The file XPS_C8_drivers h can be opened to see the list of the available functions and their prototypes For instance the prototype of the function FirmwareVersionGet is as follow DLL int __stdcall FirmwareVersionGet int SocketIndex char Version It requires two arguments int and char Example of C sequence char buffer 256 0 char pIPAddress 15 192 168 33 236 int nPort 5001 double dTimeOut 60 int SocketlD 1 II TCP IP connection SocketID TCP_ConnectToServer pIPAddress nPort dTimeOut if SocketID 1 sprintf buffer Connection to s port ld failed n plPAddress nPort AfxMessageBox buffer MB_ICONSTOP else AfxMessageBox Connected to target MB_ICONINFORMATION Il Get controller version FirmwareVersionGet SocketID buffer Get controller version AfxMessageBox buffer MB_ICONINFORMATION Il TCP IP disconnection TCP_CloseSocket SocketID Close Socket AfxMessageBox Disconnected from target MB_ICONINFORMATION cH Newport XPSDocumentation V2 6
84. After reboot initialize and home the gantry group With high probability the homing will fail with error 85 due to the zero value for the End referencing tolerance Query the index difference with the function PositionersEncoderIndexDifferenceGet Repeat the initialization homing and querying of the index difference several times and build the average and the standard deviation from all values Now configure a new system with the same gantry For End referencing position apply the average value of the index difference For End referencing tolerance apply a value that is approximately equal to 6 times of the standard deviation of the index difference Complete your configuration and reboot your system Initialize and home your gantry group several times Your system should now work properly Gantries with linear motors The parameter Offset after initialization defines the offset of the magnetic tracks of the linear motors between the primary and the secondary positioner This parameter is important to provide optimum performance of a gantry with linear motors It ensures a correct sinusoidal commutation of the two motor signals An accurate measurement of the offset can be done only with dedicated metrology tools For gantries NOT driven in acceleration mode e g gantries with NO linear motors this value can be put to 0 Also With all stages driven in acceleration mode and that are configured for gantries it is reco
85. C DI DO See Programmer s manual for a list of all the GPIO Names for the Analog and Digital I O The Setpoint values refer to the theoretical values from the profiler where as the current values refer to the actual or real values of position velocity and acceleration For gathering information from the secondary positioner of a gantry append SecondaryPositioner to the positioner name Example PositionerName Secondary Positioner FollowingError For details about gantry configurations see chapter 4 8 The following sequence of functions is used for an event based data gathering GatheringReset GatheringConfigurationSet EventExtendedConfigurationTriggerSet EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart Use the function GatheringStopAndSave to store the gathered file from the buffer to the flash disk of the XPS controller Other functions associated with the event based gathering are GatheringConfigurationGet GatheringCurrentNumberGet GatheringDataGet Please refer to the programmer s manual for details Example 1 GatheringReset Deletes gathering buffer GatheringConfigurationSet X Y X CurrentPosition XY Y CurrentPosition GPIO2 ADC1 The 3 data XY X CurrentPosition XY Y CurrentPosition and GPIO2 ADCI will be gathered EventExtendedConfigurationTriggerSet GPIO2 ADC1 ADCHighLimit 5 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventEx
86. C8_Install exe file in FirmwarePack and follow the instructions without rebooting the controller 2 Double click on the StageDBInstall exe file in StageDataBase follow the instructions and reboot the controller 3 Uninstall both installers To do so click on Windows Start menu Programs gt Newport XPS Tools Firmware Pack FTP Updater Uninstall Firmware Pack FTP Updater then click on Accept and OK A history file for the firmware and the stage database is added to the web documentation Cc Newport 62 Motion Tutorial 7 0 XPS Architecture Motion Tutorial QD Newport 7 1 Introduction The architecture of the XPS firmware is based upon an object oriented approach Objects are key to understanding object oriented technology Real world objects share two characteristics state and behavior Software objects are modeled after real world objects so they have state and behavior too A software object maintains its state in one or more variables A variable is an item of data named by an identifier A software object implements its behavior with methods A method is a function subroutine associated with an object Therefore an object is a software bundle of variables and related methods Encapsulating related variables and methods into a neat software bundle is a simple yet powerful idea that provides two primary benefits to software developers e Modularity The source code for an object can
87. Care must be taken to the cross effects when using XYZ mapping and other compensations at the same time XYZ mapping is defined by 3 compensation files compensation for X Y and Z in a text format Each of these files can be seen as the juxtaposition of successive tables where the first column of the first table contains the X position the first row of the first table contains the Y position and the first cell of each table contains the Z position The separator between the different data in each row is a tab For better readability inserting an empty line between successive tables is recommended but is not mandatory The other cells contain the corresponding error All positions are relative to the physical home position of the XYZ group The data files must contain the X position 0 the Y position 0 and the Z Position 0 The error at X Y Z 0 must be 0 which means that the error at the home position is 0 This hardware referential for the XYZ mapping has the advantage of being independent of the value for the HomePreset Figure 39 shows the structure for the three mapping files for X Y and Z correction 111 XPSDocumentation V2 6 x 08 11 Motion Tutorial MappingZDemNumber MappingYColumnNumber Si E 2 2 3 Sy L 4 Z min lt 0 Err Err Err Err Err s mad Err Err Err Ent Err 0 lt 0 Err Err 0 Err Err __ Err Err Err Err Err vs Zmaxi 0 Err Err Err Err Err 0 Err Err Err E
88. EventExtendedConfigurationActionSet similar to how it is done with events Actor Action Name Parameter Group GPIO Positioner TimerX 1 2 3 4 v DOToggle Mask v DOPulse Mask v DOSet Mask Value v DACSet CurrentPosition Positioner name Gain Offset Vv DACSet CurrentVelocity Positioner name Gain Offset v DACSet SetpointPosition Positioner name Gain Offset v DACSet SetpointVelocity Positioner name Gain Offset v DACSet SetpointAcceleration Positioner name Gain Offset ExecuteTCLScript TCL file name Task name Arguments KillTCL Script Task name GatheringOneData GatheringRun Nb of points Divisor GatheringRunAppend GatheringStop ExternalGatheringRun Nb of points Divisor v MoveAbort CAUTION Certain events like MotionState have a duration These events trigger the associated action in each motion profiler cycle as long as the event is true For example associating the action DOToggle with the event MotionState will toggle the value of the digital output in each profiler cycle as long as the MotionState event is true An event doesn t reset the action after the event For example to set a digital output to a certain value during the constant velocity state and to set it back to its previous value afterwards two event triggers are needed One to set to the digital output of the desired value at the event ConstantVelocityStart and another one to set it back to its original value at the event ConstantVelocityEnd The same effect can NOT be achieved with
89. MotionDone condition before sending a MotionDone time out Important The XPS controller can only execute a new move on the same positioner or on the same motion group when the previous move is completed MotionDone and when the positioner or the motion group is again in the ready state C Newport yeeo ras 79 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 8 6 XPSDocumentation V2 6 x 08 11 The XPS controller allows triggering an action when the motion is completed MotionDone by using the event MotionEnd For further details see chapter 11 0 The functions PositionerMotionDoneGet and PositionerMotionDoneSet allow reading and modifying the parameters for the VelocityAndPositionWindow MotionDone These parameters are only taken into account when the MotionDoneMode is set to VelocityAndPositionWindow in the stages ini Example Modifications of the MotionDoneMode can be made only manually in the stages ini file The stages ini file is located in the config folder of the XPS controller see chapter 5 FTP connection for details Stage parameters can also be modified from the website in Administrator mode STAGES menu Modify submenu Make a copy of the stages ini file to the PC Open the file with any text editor and modify the MotionDoneMode parameter of appropriate stage to Velocity AndPositionWindow and set the following parameters Motion done MotionDoneMode VelocityAndPositionWin
90. S through a cross over cable gray 2 Corporate Network connection requires input from Network Administrator black Two cables are provided with the motion controller e Cross over cable used when connecting XPS directly to a PC e Straight Ethernet cable used when connecting XPS through an intranet Straight through cables black Standard Ethernet straight through cables are required when connecting the device to a standard network hub or switch Pin Arsignmenta Bai Pei T rT a 3 i i IR A i A i a e Qrange Wiete 2 0 ange Gren Wae 4 Eius sot used 4 Mua Wte inct wed Greer Beown Witete not used 8 Beown Inc uted Figure 12 Straight through cables Cross over cables gray Standard Ethernet cross over cables are required when connecting the device directly to the Ethernet port of a PC NOTE Cross over cables are typically labeled cross over or XO at one or both ends Pin Atsignmenti z E si RAI le e se a i 1 is t 8 E a a 3 e Orange Wtete Geeen Wee I Orange 2 Geren Gren Whar 3 Orange Whute 6 Bis not used 4 Base ot used Biue Whte inct soed 5 Biue Whte inot used E Groon 6 Grange Brown Wte not vet Beowr Winte not wed l Brown nce sed 8 Brown inot used Figure 13 Ethernet Cross Over Cables C amp gt Newport 16 XPS User s Manual 3 5
91. STAGE NOTE From this screen you have access to all stage parameter Only experienced users should modify these parameters For the exact meaning of the different parameters please refer to the document ConfigurationWizard pdf accessible from the main tag DOCUMENTATION When done with all stages click on Manual Configuration under SYSTEM The following screen appears ee e R g e Entera group name For example if you are setting up two ILS stages you can set them up as two Single Axis groups one XY group or one or two MulipleAxis groups Any group name can be given In the example the name of the XY group is MyXYGroup 10 Click on ADD to get to the next screen 29 XPSDocumentation V2 6 x 08 11 XPS User s Manual e omn n nmp e n F fra 11 Enter the positioner names Any positioner name can be used In this example the X positioner name is ILS150CC_UPPER The home sequence can be either Together or X then Y The other fields refer to the error compensation mapping of the XPS controller see chapter 10 0 for details For a first configuration don t enter anything in these fields 12 Click on VALID to get following screen es 9 g Ora 13 Enter the appropriate PlugNumber The plug number is the axis number where the stage is physically connected to the XPS controller Plug number 1 is the first plug on the right and the number i
92. Software Tools 3 When all arguments are defined click OK Now you can review the final syntax of the function and can make final text changes if you want When done click Execute Oren em one fn CE ten Gia T mend neotena het dgr mammary ii coste same mg sarto 4 When the function is executed you ll see the controller s response in the Received message window A returned 0 means that the function has been executed successfully In all other cases you ll receive an error code Use the function ErrorStringGet to get more information about the error O2 a a gt Green ee ones fa jm Oro te 0 z pan The functions are listed in alphabetic order Only those functions are listed that are available with the current system configuration For example if the system consists only of SingleAxis groups no group specific functions for Spindles XY groups XYZ groups or MultipleAxis groups will be listed CO Newport ee 55 XPSDocumentation V2 6 x 08 11 Software Tools 4 21 XPSDocumentation V2 6 x 08 11 TUNING Auto Scaling Auto scaling is only available with positioners that feature a direct drive motor such as XM IMS LM or RGVIOOBL To guarantee consistent performance of these stages it is strongly recommended to perform an Auto scaling once the load is attached to the stage During the auto scaling the XPS controller measures the mass in
93. Step 3 Apply the compensation values gathered in step 1 into the stages ini reboot the controller Initialize the positioner run the AnalogEncoderCalibrationDiplay VI move the positioner at a very low speed Notice the difference to the previous results It might be necessary to run the compensation at several positions and several times to optimize the results C amp S Newport 172 XPS Motion Tutorial 16 0 Introduction to XPS Programming For advanced applications and repeating tasks it is usually better to sequence different functions in a program rather than executing them manually via the web site interface Motion processes can be written in different ways but essentially can be distinguished between host managed processes processes controlled from a PC with communication to the XPS via the Ethernet TCP IP interface and XPS managed processes processes controlled directly by the XPS controller via a TCL script Host managed processes Host managed processes are recommended for applications that require a lot of data management or a lot of digital communication with other devices other than the XPS controller In this case it is more efficient to control the process from a dedicated program that runs on a PC and which sends and gets information to and from the XPS controller via the Ethernet TCP IP communication interface Communication to the XPS controller can be established from almost any PC and is independent
94. The XPS controller provides four methods for data gathering 1 Time based internal data gathering With this method one data set is gathered every n servo cycle 2 Event based internal data gathering With this method one data set is gathered on an event 3 Function based internal data gathering With this method one data set is gathered by a function 4 Trigger based external data gathering With this method one data set is gathered every n external trigger input see also chapter 13 0 Output Triggers With method 1 2 and 3 we are also referring to an internal or servo cycle synchronous data gathering With the trigger based data gathering we are also referring to an external data gathering as the event that triggers the data gathering the receive of a trigger input is asynchronous to the servo cycle The time based the event based and the function based data gathering store the data in common file called gathering dat The trigger based external data gathering stores the data in different file called ExternalGathering dat The type of data that can be gathered differs also between the internal and the external data gathering Before starting any data gathering the type of data to be gathered needs to be defined using the functions GatheringConfigurationSet in case of an internal data gathering or ExternalGatheringConfigurationSet in case of an external data gathering During the data gathering new d
95. This parameter defines the name of the positioner which SetpointAcceleration is used to output on the analog output Action Parameter 2 Gain The SetpointAcceleration is multiplied by the gain value For example if the gain is set to 10 and the corrected SetpointAcceleration is 1 mm 82 then the output voltage will be 10 V Action Parameter 3 Offset The offset value is used to correct for any voltage that may be present on the Analog output Analog output SetpointAcceleration value gain offset Action parameter 4 This parameter must be 0 by default NOTE The gain can be any constant value used to scale the output voltage and the offset value can be any constant value used to correct for any offset voltage on the analog output ExecuteTCLScript This action executes a TCL script on an event Action Parameter 1 TCL File Name This parameter defines the file name of the TCL program Action Parameter 2 TCL Task Name Since several different or even the same TCL scripts can run simultaneously the TCL Task Name is used to track individual TCL programs For example the TCL Task Name allows stopping a particular program without stopping all other TCL programs that run simultaneously Action Parameter 3 TCL Arguments List The Argument list is used to run the TCL scripts with input parameters For the argument parameter any input can be given number string These parameters are used inside the script
96. When done with your gantry configuration the secondary positioner is almost invisible for the application All functions are sent directly to the motion group or to the primary positioner of that group However it is possible to get information from the secondary positioner by data gathering by appending SecondaryPositioner to the positioner name Example MySingleGantry S1 SecondaryPositioner FollowingError For further details about data gathering see chapter 12 0 Home search of gantries During the home search of a gantry first the secondary positioner is homed and the primary positioner follows the motion Then the primary positioner is homed and the secondary positioner follows the motion At the end the primary positioner is at his home position but the secondary positioner will be off his home position due to the tolerances in the assembly of the gantry The parameter End referencing position defines the ideal position of the secondary positioner when the primary positioner is at his home position The parameter End referencing tolerance defines the maximum allowed distance between the secondary positioner s position when the primary positioner is at his home position and the end referencing position When the actual distance is greater than the value for the End referencing tolerance the homing is aborted When the actual distance is less than the value for the End referencing tolerance
97. XPS Controller Universal High Performance Motion Controller Driver N User s Manual NDS Software Tools Tutorial Newport V2 6 x Experience Solutions For Motion Think Newport XPS Universal High Performance Motion Controller Driver CH Newport XPSDocumentation V2 6 x 08 11 ii XPS Universal High Performance Motion Controller Driver Table of Contents Waranli nanliulibcalanaal alli licia little ix EU Declaration of Contormity sesionar e A R x Preface ii Li li LL Iulia Lai xi Confidentiality amp Proprietary Rights eeeeeeeeeeseeeeseeeeseeeseeseeeaeees xi Sales Tech Support amp Service i xi Service Informati Oiana aan aaa a AEA OA lalla lai xii Newport Corporation RMA Procedures iii xii Packaging ii xii User s Manual 1 0 Wt WCthOnisnccscccccs sccecececccecsdicecscscccccsesdeascececesscscesoaesacasodeooceoodscecesesesocsecese L WL Scope of the Manbali iucilie alici 1 12 Detimitions and Symbols excita ciindidinaiedd ania E ada 3 1 2 1 General Warning or Caution ii 3 1 22 Electric Shocker 3 1 2 3 European Union CE Matk eecceesceceseeeseeseeeeeeesaceecaeeecseeeseeceseesaseesaeeesaeeeeaes 3 124 ON Symboll ucaroaanta area 3 125 OFEssymbola ln 3 13 Warnings atid Car tiGins iti O I I rn 4 14 General Warnings and Cautions iranica R a 4 2 0 System Overview
98. XPS to a Corporate Network Using Static IP Configuration 19 3 5 5 Connecting The XPS to a Corporate Network Using Dynamic IP Configuration curarli dini dira i e iene ako ia e e E 20 3 5 6 Recovering lost IP configuration isisisi onena aii 21 3 6 Testing your XPS PC Connection a E A 23 37 I onnecting thess ta es zie ani peli ii aan ia 24 JS Confisuring ihe Controller utilita pa Ae ad a a 25 3 8 1 LAUto Confisurationi ci ssi oa LOL ud dala 26 3 8 2 Manual Configuration for Newport Positioners ie 28 3 8 3 Manual Configuration for stages not made by Newport n 32 3 9 System Shut DoWit si araldici 32 Software Tools XPSDocumentation V2 6 x 08 11 4 0 Software Tools cccccccssssccccssssscccssscccccccsscssccssscccsccsccccscssssscsssssccseses S AT Software Tools Overview a al ae a a slilole alilolo fici lai RRR 33 4 2 CONTROLLER CONFIGURATION Users Management iii 34 4 3 CONTROLLER CONFIGURATION IP Management ie 35 44 CONTROLLER CONFIGURATION General ie 35 45 SYSTEM Error File Display aaa aaa 36 4 6 SYSTEM Auto Configuration i 36 4 7 SYSTEM Manual Configuration 0 iii 37 4 8 SYSTEM Manual Configuration Gantries Secondary Positioners 41 4 3 1 Home Search of cantis i scssclssdscsdea dh aaa Lada uan ani 42 4 32
99. XYZ mapping is dynamically taken into account on the corrector loop of the XPS controller XYZ mapping works in parallel to other compensation methods For this reason care must be taken to the effects when using for instance XYZ mapping and positioner mapping at the same time TargetPosition SetpointPosition amp CurrentPosition are accessible via function and Gathering Data Collection SetpointVelocity SetpointAcceleration amp FollowingError are accessible via Gathering Data Collection C amp gt Newport 104 Motion Tutorial API MoveAbsolute MoveRelatrve TargetPosition Double precision C Newport API MoveAbsolute MoveRelatrve Profiler 10 1 SetPoimPosnion SetPoimVelocity SetPointAcceleration FollowingError Pol fa PIO NG 2 J 2 J Correct Driver a gt Stage hes front Pam Group Aus PE Axis linear Encoder le Mapping mapping correction Figure 35 Definition of different positions for one actuator Backlash Compensation Backlash compensation is available with all positioners but works only under certain conditions e The HomeSearchSequenceType in the stages ini must be different than CurrentPositionAsHome e Backlash compensation is not compatible with positioner mapping So for positioners with backlash compensation it is not allowed to have any entry for PositionerMappingFileName in the stages ini e Backlash co
100. Y na ted a zay Dasbie 5 1 DO t NOTREF READY REFERENCING Lr end Called function 1 Grouplnitialize 7 GroupMoveAbort 13 GroupAnalogTrackingModeEnable 2 GroupHomeSearch 8 GroupKill or KillAll 14 GroupAnalogTracking ModeDisable 3 GroupMoveAbsolute 9 GroupSpinParametersSet 15 GroupInitializeWithEncoderCalibration 4 GroupMoveRelative 10 GroupSpinModeStop 16 GroupReferencingStart 5 GroupMotionDisable 11 SpinSlaveModeEnable 17 GroupReferencingStop 6 GroupMotionEnable 12 SpinSlaveModeDisable XPSDocumentation V2 6 x 08 11 73 State diagram of the XPS controller Motion Groups Within the XPS controller each positioner or axis of motion must be assigned to a motion group This group can either be a SingleAxis group a Spindle group an XY group an XYZ group or a MultipleAxes group Once defined XPS automatically manages all safeties and trajectories of the motion group from the same function For instance the function GroupHomeSearch GroupName automatically homes the whole motion group GroupName independent of its definition as a SingleAxis group a Spindle group an XY group an XYZ group or a MultipleAxes group Within the system configuration file system ini you can select the home sequence as sequential one positioner after the other or in parallel with all positioners homing at the same time With a single function such as GroupMoveAbsolute GroupName Position the whole motio
101. a new motion group do the following 1 Enter the name of the new group My_XY_Group in this case Click on ADD to confirm the new group 2 Enter the name for each positioner associated with the motion group StepAxis and ScanAxis in this case Define the home sequence Together or XThenY or YThenX For error compensation you need to define the name and structure of the correction data otherwise leave these fields blank For details about error WH Newport 37 XPSDocumentation V2 6 x 08 11 Software Tools XPSDocumentation V2 6 x 08 11 compensation see chapter 10 0 When done click on VALID to accept the configuration vee a fan lt 3 Specify the plug number The plug number is the number of the drive card 1 to 8 where the stage is physically connected to the XPS controller see back of XPS controller Select the name of the Stage from your stage data base scroll down menu Checking the box Use a secondary Positioner assigns a secondary positioner for a gantry configuration A gantry is a motion device where two positioners each of them having a motor an encoder limits etc are used for a motion in one direction With most gantries the two positioners are rigidly attached to each others Hence all motions including motor initialization homing and emergency stops must be done in perfect synchronization For details about Gantries and their configura
102. a spiral from 0 20 0 starting point to 0 20 24 ending point As described before the trajectories first 5 19 365 1 and last 5 19 365 25 points are only needed to define the start and end conditions of the trajectory Because the second line 0 20 0 is not equal to zero 0 0 0 all points that the motion group will hit during the execution of the trajectory are reduced by this value from the physical start position of the motion group C amp gt Newport 94 Motion Tutorial The original data file is except for the tabs that are only added for better readability 5 0 5 10 15 20 15 10 5 0 5 10 15 20 19 365 20 19 365 17 321 13 229 0 13 229 17 321 19 365 20 19 365 17 321 13 229 0 1 0 1 2 3 4 5 6 7 8 9 10 11 12 15 10 5 0 5 10 15 20 15 10 5 0 5 13 229 17 321 19 365 20 19 365 17 321 13 229 0 13 229 17 321 19 365 20 19 365 13 14 15 16 17 18 19 20 21 22 23 24 25 With this data file the real trajectory points relative to the physical start position of the motion group are first and last lines are eliminated because the motion group will not hit these points and the values from the second column are reduced by 20 as the first line was 0 20 0 0 0 0 15 6 771 13 5 0 635 1 10 2 679 14 10 2 679 2 5 0 635
103. a zoom of the second pulse The duration of the pulse should be 200 ns however there is a longer fall time that is related to the time constant of the RC circuit used Please note that only the falling edge of the pulse is precise and should be used for synchronization purposes IMPORTANT NOTE The parameters PositionStep MinimumPosition and MaximumPosition specified with the function PositionerPositionCompareSet are rounded to the nearest detectable trigger position When using the Position Compare function with AquadB encoders the trigger resolution is equal to the EncoderResolution of the positioner specified in the stages ini When using the Position Compare function with AnalogInterpolated encoders the trigger resolution is equal to the EncoderScalePitch defined in the stages ini divided by the interpolation factor defined by the function PositionerHardInterpolatorFactorSet AnalogInterpolated encoder Figure 48 AnalogInterpolated Encoder Trigger resolution EncoderScalePitch PositionerHardInterpolatorFactor 147 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 13 2 Trigger pulses MamunPosson Marma P ordon Figure 49 Trigger Pulses MinimumPosition MaximumPosition and PositionStep should be multiples of the Trigger resolution If not rounding to the nearest multiple value is made AquadB signals In the AquadB signal configuration AquadB encoder signal
104. acts as a gain that increases with the frequency of the variations of the following error sin 2 Frt 2 Frcos 2 Frt The result is that the derived term becomes preponderant at high frequencies compared to proportional and integral terms For the same reason the value of Kd is in most cases limited by high frequency resonance of the mechanics This is why a low pass filter cut off frequency DerivativeFilterCutOffFrequency is implemented in the derivative branch to limit excitation at high frequencies Increasing the value of Kd increases the stability of the system The steady state error however is unaffected since the derivative of the steady state error is zero These two gains alone can provide stable positioning and motion for the system However to eliminate the steady state errors an additional gain value must be used Integral Term The Integral term Ki acts as a gain that increases when the frequency of the variations of the following error decrease sin 2 Fr t Fr sin 2 Fr t The result is that integral term becomes preponderant at low frequencies compared to the proportional and derivate terms The gain becomes infinite when frequency 0 Even a very small following error will generate an infinite value of the integral term The advantage of the integral term is that it will eliminate any steady state following error However the disadvantage is that the integral term can reach values where the corrector is
105. addition to other compensations including positioner mapping So care must be taken to the cross effects of using XY mapping and other compensations at the same time Za X positioner f x nce bi Profilerto gt To servo loop X rofiler E Corrector a interpolation X Y postioner Y pasaet je Profiler to To servo loop Y rofiler suj i Corrector XMappingColumnNumber Interpolation Y Error Mapping Figure 37 XY Mapping XY mapping is defined by 2 compensation tables each for X and Y in a text file format In each of these files the first column specifies the X positions X being the first positioner of the XY group and the first row the Y positions Each cell represents the error for that X Y position The first entry in that file must be 0 zero The separator between the different data in each row is the tab All positions are relative to the physical home position of the XY group The data files must contain the X position 0 and the Y position 0 The error at X Y 0 must be 0 which means that the error at the home position is 0 This hardware reference for tXY mapping has the advantage of being independent of the value for the HomePreset The following shows the structure of such mapping files Y Mapping File YMappngColumaNumber o Ymax 0 Yma vi Ymax gt Xma Yero E XI 5 on ae z Xmax Figure 38 XY Mapping Files NOTE Err
106. agement and homing purposes directly from the encoder glass scale Limit wmi init Signal iaia g Mome youl Figure 77 Heidenhain Servitude TTL Input Signals 196 Tara XPS Appendices 24 0 Appendix H Trigger IN Connector RIG IN Ma ma wet 2440 lochera 4 F f GND GND 7 N N N Figure 78 Trigger Input Connector Synchro is a TTL input It is used to trig the XPS controller acquisition External gathering A low to high transition will latch all encoders and analog inputs inside the controller CW Newport 197 XPSDocumentation V2 6 x 08 11 XPS Appendices CH Newport XPSDocumentation V2 6 x 08 11 198 XPS Universal High Performance Motion Controller Driver Service Form Name Company Address Country P O Number Item s Being Returned Model Description Your Local Representative Tel Fax Return authorization Please obtain prior to return of item Date Phone Number Fax Number Serial Reasons of return of goods please list any specific problems C Newport maa 199 XPSDocumentation V2 6 x 08 11 Newport Visit Newport Online at Www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel
107. ajectory defined as a continuous multidimensional motion path Line arc trajectories are defined in a two dimensional XY plane These are used with XY groups The major requirement of a line arc trajectory is to maintain a constant speed speed being the scalar of the vector velocity throughout the entire path except the acceleration and deceleration periods Trajectory element segment an element of a trajectory is defined by a simple geometric shape in this case a line or an arc segment Trajectory velocity the tangential linear velocity speed along the trajectory during its execution Trajectory acceleration the tangential linear acceleration used to start and end a trajectory Trajectory acceleration and trajectory deceleration are equal by default 86 XPS Motion Tutorial 9 1 2 9 13 914 Trajectory Conventions When defining and executing a line arc trajectory a number of rules must be followed e The motion group must be a XY group e All trajectories must be stored in the controller s memory under public trajectories one file for each trajectory Once a trajectory is started it executes in the background allowing other groups or positioners to work independently and simultaneously e Each trajectory must have a defined beginning and end Endless infinite trajectories are not allowed Though N times N defined by user non stop executions of the same trajectory without stopping is possible As the
108. al support for advice before attempting to plug in and operate damaged equipment Packing List Included with each XPS controller are the following items e User s Manual and Motion Tutorial e XPS controller e Cross over cable gray 3 meters e Straight through cable black 5 meters e Power cord e Rack mount ears and handles If there are missing hardware or have questions about the hardware that were received please contact Newport CAUTION Before operating the XPS controller please read chapter 1 0 very carefully System Setup This section guides the user through the proper set up of the motion control system If not already done carefully unpack and visually inspect the controller and stages for any damage Place all components on a flat and clean surface CAUTION No cables should be connected to the controller at this point First the controller must be configured properly before stages can be connected C amp gt Newport 14 oe User s Manual 3 4 1 Installing Driver cards r E Figure 11 Installing Driver cards Due to the high power available in the XPS controller 300 W for the CPU and 500 W for the drives ventilation is very important To ensure a good level of heat dissipation the following rules must be followed 1 It is strictly forbidden to use the XPS controller without the cover properly mounted on the chassis Driver boards must be inserted from the
109. an event that has some duration for example motion state a 1 ys pulse will be generated each cycle of the motion profiler or every 400 us as long as the event occurs Action Parameter 1 Mask The mask defines on which bits on the GPIO output the pulse will be generated For example if the GPIO output is an 8 bit output and the mask is set to 6 then the equivalent binary number is 00000110 So as an action a 1 ys pulse will be generated on bit 2 and 3 of the GPIO output Action Parameter 2 to 4 These parameters must be 0 by default C amp gt Newport XPSDocumentation V2 6 x 08 11 126 XPS Motion Tutorial DOSet This action is used to modify the value of bit s on a Digital Output Action Parameter 1 Mask The mask defines which bits on the GPIO output are being addressed For example if the GPIO output is an 8 bit output and the mask is set to 26 then the equivalent binary number is 00011010 Therefore with a Mask setting of 26 only the bits 2 4 and 5 are being addressed on the GPIO output Action Parameter 2 Value This parameter sets the value of the bits that are being addressed according to the Mask setting So for example since a Mask setting of 26 bits 2 4 and 5 can be modified a value of 8 00001000 will set the bits 2 and 5 to 0 and the bit 4 to 1 Action parameter 3 and 4 These parameters must be 0 by default DACSet CurrentPosition and DACSet SetpointPosition This actio
110. ant with RS 422 electrical standard and are received with a 26LS32 differential line receiver A resistor of 120 Q adapts the input impedance The B and B encoder signals originate from the stage position feedback circuitry and are used for position tracking These Index and Index inputs are differential inputs Signals are compliant with RS422 electrical standard and are received with a 26LS32 differential line receiver A resistor of 120 Q adapts the input impedance The Index and Index signals originate from the stage and are used for homing the stage to a repeatable location Ground reference for encoder feedback This input is pulled up to 5 V with a 2 2 KQ resistor by the controller The Origin signal originates from the stage and is used for homing the stage to a repeatable location mA Maximum A 5 V DC supply is available from the driver This supply is provided for stage home index travel limit and encoder feedback circuitry Ground for stage travel limit signals Limit ground is combined with digital ground at the controller side Motor cable shield ground Brake available only on DRVM board Voltage command 24 V or 48 V strap on the driver board to drive the brake Brake available only on DRVM board Reference of the above voltage command Tachometer amp Tachometer These inputs are used to receive tachometer voltage information This voltage depends on the output voltage rating of the employ
111. art during motion then decrease Kp slightly to cancel these oscillations 3 Set Ki increase it to limit static errors and improve settling time until the appearance of overshoot or oscillation conditions Then reduce Ki slightly to eliminate these oscillations 4 Kd is generally not needed but it can help in certain cases to improve the response when the speed loop of the driver board is not efficient enough 14 3 2 Corrector PIDFF Acceleration The PIDFFAcceleration must be used in association with a driver having a torque input constant voltage gives constant acceleration using MotorDriverInterface AnalogAcceleration AnalogSin60Acceleration AnalogSin90Acceleration AnalogSin120Acceleration AnalogDualSin60Acceleration AnalogDualSin90Acceleration or AnalogDualSin120Acceleration SetPoint Ser Acceleration ne a E KFeedForwardAcceleration SetPoint 4 Position f 4 PID Corrector Filtering amp ha dra r H gt Calculations gt J gt Limitation Pe To the driver i Driver Board amp Stage Z From 4 7 i the encoder we Figure 56 Corrector PIDF FAcceleration 14 3 2 1 Parameters FeedForward e A feed forward in acceleration is used e KFeedForwardAcceleration is a gain that can be apply to this feed forward e When the system is used in open loop the PID output is cut and the feed forward gain is set to 1 PID corrector e Output of the PID is an acceleration value in units s Kp is give
112. ata is appended to a buffer With the functions GatheringCurrentNumberGet and GatheringExternalCurrentNumberGet the current number of data sets in this buffer and the maximum possible number of data sets that fits into this buffer can be recalled The maximum possible number of data sets equals 1 000 000 divided by the number of data types belonging to one data set The function GatheringDataGet index returns one set of data from the buffer Here the index 0 refers to the Ist data set the index n 1 to the n th data set When using this function from the Terminal screen of the XPS utilities the different data types belonging to one data line are separated by a semicolon To save the data from the buffer to the flash disk of the XPS controller use the functions GatheringStopAndSave and GatheringExternalStopAndSave These functions will store the gathering files in the Admin Public folder of the XPS controller under the name Gathering dat with function GatheringStopAndSave for an internal gathering or GatheringExternal dat with function GatheringExternalStopAndSave for an external gathering CAUTION The functions GatheringStopAndSave and GatheringExternalStopAndSave overwrite any older files with the same name in the Admin Public folder After a data gathering it is required to rename or better to relocate valid data files using an ftp link to the XPS controller see also chapter 5 FTP connection
113. ationTriggerSet MyGroup MyPositioner PositionerError 2 0 0 0 This event happens when the positioner MyGroup MyPositioner has a fatal following error EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerError 12 0 0 0 This event happens when the positioner MyGroup MyPositioner has either a home search time out or a motion done time out QD Newport 123 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial PositionerHardwareStatus Triggers an action when the current hardware status applied with the error mask results in a value different than zero The first event parameter specifies the status mask in a decimal format The other event parameters are 0 by default Example EventExtendedConfigurationTriggerSet MyGroup MyPositioner PositionerHardwareStatus 768 0 0 0 This event happens when the positioner MyGroup MyPositioner has either a plus end of run or a minus end of run detected C amp Newport XPSDocumentation V2 6 x 08 11 124 Motion Tutorial 11 2 Actions There are several actions that can be triggered by the events listed above Users have the full flexibility to trigger any action out of the list of possible actions at any event out of the list of possible events It is also possible to trigger several actions at the same event by adding several sets of parameters to the functions
114. ator The second position is the CurrentPosition This is the actual position as reported by the positioner s encoder after taking into account all compensation The relationship between the SetpointPosition and the CurrentPosition is as follow Following error SetpointPosition CurrentPosition The functions to query the SetpointPosition and the CurrentPosition are GroupPositionCurrentGet and GroupPositionSetpointGet Home Search Home search is a specific motion process Its goal is to find a reference point along the travel accurately and repeatedly The need for this absolute reference point is twofold First in many applications it is important to know the exact position in space even after a power off cycle Secondly to protect the motion device from hitting a travel obstruction set by the application or its own hardware travel limits the controller uses software limits To be efficient the software limits must be referenced accurately before running the application After motor initialization any motion group must first be homed or referenced before any further motion can be executed Here homing refers to an XPS predefined motion process that moves a stage to a unique reference position Referencing refers to a group state that allows the execution of different motions and the setting of the position counters to any value see next section for details The referencing state provides flexibility for the definition of cu
115. can be accessed via the GPIOAnalogSet GPIO2 DACn function 187 XPSDocumentation V2 6 x 08 11 XPS Appendices 19 0 Appendix C Power Inhibit Connector XPSDocumentation V2 6 x 08 11 NIBIT Mating connector Mate 0615 mith UNCAMO lockers Figure 65 Inhibition connector This connector is provided for the wiring of a remote STOP ALL switch It has the same effect as the front panel STOP ALL button Inhibition input is a standard TTL input Inhibition Pin 2 must always be connected to GND during normal controller operation An open circuit is equivalent to pressing STOP ALL on the front panel Wire the switch contacts normally closed NOTE Connecting more than one switch is not recommended on this input 188 TAGE XPS Appendices 20 0 Appendix D GPIO Connectors 20 1 GPIO1 Connector Figure 66 GPIOI Digital I O Connector General Purpose Inputs Outputs GPIO1 is the main XPS digital I O connector 20 2 GPIO2 Connector Figure 67 GPIO2 Analog amp Digital Connector General Purpose Inputs Outputs GPIO2 is an additional digital input connector This connector is also the main analog I O connector with 4 analog inputs and 4 analog outputs CW Newport 189 XPSDocumentation V2 6 x 08 11 XPS Appendices 20 3 GPIO3 Connector Figure 68 GPIO3 Digital I O Connector General Purpose Inputs Outputs GPIO3 is a digital I O connector 20 4 GPIO4 Connector
116. ccessive moves that are not equal to an integer of an encoder steps without accumulating errors See section 8 4 for further details Absolute and relative moves can be commanded to positioners and to motion groups When commanding a move to a positioner only the position parameter for that positioner must be provided When commanding a move to a motion group the appropriate number of position parameters must be provided with the move command For instance for a move command to an XYZ group 3 position parameters must be defined When commanding a move to a motion group all positioners of that group will move synchronously It means at any time any positioner of that group has executed the same part of its trajectory while the slowest positioner defines the speed and acceleration of the other positioners All positioners will start and stop their motion at the same time This type of motion is also known as linear interpolation The functions for absolute and relative motions are GroupMoveAbsolute and GroupMoveRelative respectively 77 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 8 5 Example A motion system consist of one XY group called ScanTable and one SingleAxis group called FocusStage ScanTable has two positioners in use called ScanAxis and StepAxis GroupHomeSearch ScanTable GroupHomeSearch FocusStage After homing is completed GroupPositionCurrentGe
117. ce until a maximum position has been reached In most cases this mode provides the most precise synchronization of the motion to an external tool In the AquadB configuration AquadB encoder signals are output on the PCO connector These signals can be either provided always or only if the positioner is within a defined position window When used with stages that feature a digital encoder AquadB as opposed to a SinCos encoder AnalogInterpolated the AquadB configuration essentially provides an image of the encoder signals on the PCO connector In the time flasher configuration an output pulse is generated when crossing a defined position and then a new pulse is generated at a defined time interval until a maximum position has been reached In some cases this mode can provide an even more precise synchronization of the motion to an external tool in particular if the variation of the speed multiplied with the time interval is smaller than the error of the encoder signals during the same period Dedicated hardware is used to check the position crossing and the time interval to attain less than 50 ns latency between the position crossing and the trigger output In addition and independent from the above the XPS controller can output distance spaced pulses on line arc trajectories and time spaced pulses on PVT trajectories In these cases the distances time intervals are checked on the servo cycle and a resolution of 100 ys is provided Di
118. ch 1 sine offset generates 63 5 nm peak to peak interpolation error Amplitude Mismatch Emar whee 1 amplitace difference Pernod Encoder Period Figure 60 Amplitude Mismatch The amplitude mismatch between sine and cosine signals generates 0 17 interpolation error per percent amplitude mismatch With a 20 yum scale pitch 1 amplitude mismatch generates 33 nm peak to peak interpolation error C amp Newport XPSDocumentation V2 6 x 08 11 168 XPS Motion Tutorial Phase Shift Errar when 1 of phase shif Penod 0 01 02 03 04 23 06 07 os 09 ie Eacoder Pernod Figure 61 Phase Shift The phase shift between sine and cosine generates 0 28 interpolation error per degree phase shift With a 20 wm scale pitch 1 degree phase shift between sine and cosine generates 55 5 nm peak to peak error Combined Errors The combination of these errors is not a simple sum but is more likely a root mean square relationship With a 20 um scale pitch 1 sine offset 1 cosine offset 1 phase mismatch and 1 degree phase error between sine and cosine generates 132 5 nm peak to peak error 2000 0 32 0 32 0 164 0 28 111 373 Note that the calculated value 111 373 nm is lower than the measured 132 5 nm Analog encoder compensation feature The compensation for repeatable distortions of the analog encoder input signals is always active It uses the following parameters read from the
119. ch servo cycle or each profiler cycle as long as the event lasts When used with events that have no duration like MotionStart or MotionEnd the analog output gets only updated once and this value is hold until its next change Action Parameter 1 Positioner Name This parameter defines the name of the positioner which Velocity value is used Action Parameter 2 Gain The Velocity value is multiplied by the gain value For example if the gain is set to 10 and the velocity value is 1 mm s then the output voltage is 10 V Action Parameter 3 Offset The offset value is used to correct for any voltage that may be present on the Analog output CW Newport 127 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial Analog output Velocity value gain offset Action parameter 4 This parameter must be 0 by default DACSet SetpointAcceleration This action is used to output a voltage on the Analog output to form an image of the theoretical acceleration The gain and the offset are used to calibrate this image This action makes most sense with events that have some duration Always MotionState ElementNumberState etc as the analog output will be updated each servo cycle or each profiler cycle as long as the event lasts When used with events that have no duration like MotionStart or MotionEnd the analog output gets only updated once and holds this value until its next change Action Parameter 1 Positioner Name
120. current loop RGV no tachometer DriverName XPS DRVM4 10 V Input gives ScalingAcceleration stage acceleration Current loop configured by hardware MotorDriverInterface AnalogAcceleration CorrectorType PIDFFAcceleration Stages with low current lt 3 A DC motor amp tachometer VP ILSCCHA DriverName XPS DRVOI in velocity mode Input 1 10 V results in ScalingVelocity theoretical stage velocity Input 2 10 V results in ScalingCurrent 3 A J Speed loop programmable MotorDriverInterface Analog Velocity CorrectorType PIDFF Velocity Stages with low current lt 3 A DC motor without tachometer ILSCC type DriverName XPS DRVOI in voltage mode Input 1 10 V results in ScalingVoltage 48 V Input 2 10 V results in ScalingCurrent 3 A MotorDriverInterface AnalogVoltage CorrectorType PIDDualFFVoltage 4 Stages with Stepper motor amp Encoder UTMPP RVPE ILSPP DriverName XPS DRVOI in stepper mode Input 1 10 V results in ScalingCurrent in motor winding 1 Input 2 10 V results in ScalingCurrent in motor winding 2 MotorDriverInterface AnalogStepperPosition CorrectorType PIPosition Stages with Stepper motor amp no encoder CMA SR50PP PRSOPP MFAPP DriverName XPS DRVOI in stepper mode Input 1 10 V results in ScalingCurrent in motor winding 1 Input 2 10 V results in ScalingCurrent in motor winding 2 C amp gt Newport XPSDocumentation V2 6 x 08 11
121. d every nth servo cycle Here n corresponds to the FrequencyTicks defined with the function TimerSet There are five different timers available that get selected by the actor 1 5 Actor is the object that actions events are linked to All events that are motion related from MotionStart to TrajectoryPulseOutputState in the below table beside MotionDone refer to the motion profiler of the XPS controller The motion profiler runs at a frequency of 2 5 kHz or every 400 ys Thus events triggered by the motion profiler have a resolution of 400 us Consequently events with duration such as MotionState will trigger an action every 400 ys All motion related events except MotionDone have a category such as Sgamma or Jog This category refers to the motion profiler Here SGamma refers to the profiler used with the function GroupMoveRelative and GroupMoveAbsolute and Jog refers to the profiler used in the Jogging state The other event categories refer to trajectories The separator between the category the actor and the event name is a dot Actor Category Event Name Parameter Group GPIO SGamma XYLineArc PVT Positioner TimerX Jog Spline 1 2 3 4 Immediate Always v Timer V V v MotionStart v V v MotionStop v v v MotionState v Vv v ConstantVelocityStart v V ConstantVelocityEnd v v v ConstantVelocityState v v ConstantAccelerationStart v v ConstantAccelerationEnd v v ConstantAccelerationState v v ConstantDeceleratio
122. d 10 units per second and an acceleration of 20 and 40 units per second respectively GroupJogParameterSet MyX YGroup 0 20 0 40 Both stages stop moving their velocities being 0 units per second To apply new parameters to only one stage use the following function GroupJogParameterSet MyX YGroup XPositioner 5 20 Only the X axis starts moving with a velocity of 5 units per second and an acceleration of 20 units per second GroupJogParameterSet MyX YGroup XPositioner 0 20 The X axis stage stops moving its velocity being 0 units per second GroupJogModeDisable MyX YGroup Disables the Jog mode In Jog Mode the profiler uses the CurrentPosition and the defined velocity and acceleration to calculate a new Setpoint position every 0 4 ms These new Setpoint positions are then transferred to the corrector loop which runs every 0 1 ms To accommodate the different frequencies between the profiler and the corrector a linear interpolation between the new Setpoint and the previous Setpoint is done Worst case a new velocity and acceleration can be taken into account only every 0 4 ms In Jog mode the profiler uses a trapezoidal motion profile see also section 8 1 for further details on motion profiles Master Slave In master slave mode any motion axis can be electronically geared to another motion axes including a single master with multiple slaves The gear ratio between the master and the slave is user defined During
123. d the end of the trajectory Two consecutive points form a trajectory segment The line format of the file is X Position Y Position Z Position The separator between the X Y and Z Position is the comma As mentioned before the first and last lines of the file are only needed for the first and the last segment spline interpolation These define the angle the trajectory starts and ends but the motion system will not hit these points So the trajectory s first real point starting point is the one defined by the second line and the trajectory s real last point end point is the one defined by the second to the last line The position values in the data file are relative to the physical position of the motion group at the start of the trajectory If the position in the second line of the file starting point is not equal to zero 0 0 0 the real trajectory positions those that the motion group will hit are furthermore shifted by this value Example The spline trajectory file has the following format Xo Yo Zo Xx Vi 4 X Yo Za X3 Va Zs X4 Yq Z4 At the moment of the execution of the trajectory the motion group is at the position Xc Yo Zc So the real matrix in absolute coordinates of the motion group is Xoxo x Yosyy y Zeszozi X Ye Z CFIS Va z C Z3 Z X2 X Ya Yi Z3 Z C X3 X Vea C Z3 Z Iwi Xa fi 3741 X Z C X4 X Vety yi C Z4 Zy Trajectory File Example This trajectory represents
124. dow instead of Theoretical MotionDonePositionThreshold 4 units MotionDoneVelocityThreshold 100 units s MotionDoneCheckingTime 0 1 seconds MotionDoneMeanPeriod 0 001 seconds MotionDoneTimeout 0 5 seconds Replace the current stages ini file on the XPS controller with this modified version make a copy of the old ini file first Reboot the controller To apply any changes to the stages ini or system ini the controller has to reboot Use the following functions Grouplnitialize My Group GroupHomeSearch MyGroup Positioner MotionDoneGet MyGroup MyPositioner This function returns the parameters for the VelocityAndPositionWindow Motion done previously set in the stages ini file so 4 100 0 1 0 00 and 0 5 Positioner MotionDoneSet MyGroup MyPositioner PositionThresholdNewValue VelocityThresholdNew Value CheckingTimeNewValue MeanPeriodNewValue TimeoutNew Value This function replaces the parameters by the new entered values JOG Jog is an indeterminate motion defined by velocity and acceleration parameters Unlike a GroupMoveAbsolute or a GroupMoveRelative the end of the motion is not defined by a target position It can be best described by a go command with a definition how fast but not how far In jog mode the speed and acceleration of a motion group can be changed on the fly to accommodate varying situations This is not possible with a GroupMoveAbsolute or a GroupMoveRelative which are d
125. e SetPosition sets the current position to a value defined by a parameter SetPositionToHomePreset sets the current position to the HomePreset value stored in the stages ini configuration file It is equivalent to a SetPosition of the same positioner to the HomePreset value It is important that all positioners of a motion group are referenced to a position using the SetPosition or SetPositionToHomePreset before leaving referencing state State Diagram The referencing state is a parallel state to the homing state It is between the NotReferenced state and the Ready state Please see state diagram below G Hi Sea Done et Ta HOMING rs Tis NOT REFERENCED READY REFERENCING Retereac ig Action Execute WAITING MOVING CroupRelerencingStar1 GeoupMeterencing Stop Figure 22 State Diagram C amp gt Newport XPSDocumentation V2 6 x 08 11 76 a XPS Motion Tutorial 8 3 5 Example MechanicalZeroAndIndexHomeSearch The following sequence of functions has the same effect as the MechanicalZeroAndIndexHomeSearch GroupReferencingStart GroupName PositionerHardwareStatusGet PositionerName amp status if status amp 4 0 I 4 is the Mechanical zero mask on the hardware status GroupReferencingActionExecute PositionerName LatchOnLowToHighTransition MechanicalZero 10 GroupReferencingActionExecute PositionerName LatchOnHighToLowTransition MechanicalZero 10 GroupReferencingActionExecute Po
126. e example of an encoder with a resolution of and a target position equal to 1 4 The real position cannot reach the value of the target position 1 or 2 instead of 1 4 so the following error will never be equal to zero closest values are 0 6 and 0 4 Thus due to integral gain of the PID filter the system will never settle but will oscillate between the positions and 2 The XPS controller avoids this instability while allowing the use of natural units instead of encoder counts by using a rounded value of the TargetPosition to calculate the motion profile and a rounded value for the following error But the non rounded value of the TargetPostion will be stored as final position so that there is no accumulation of errors due to rounding in case of successive relative moves To understand the difference consider a positioner with a resolution of that is at the position 0 This positioner receives a relative motion command of 10 4 At the end of the motion the CurrentPosition will be 10 and the SetpointPosition will be 10 but the TargetPosition will be 10 4 The positioner then receives the same relative motion command again At the end of this motion the CurrentPosition will be 21 the SetpointPosition will be 21 and the TargetPosition will be 20 8 NOTE When an application requires a sequence of small incremental motion of constant step size close to the encoder resolution make sure that the commanded incremental motion is equal
127. e set a value different from 0 in section Backlash Backlash Backlash 5 units This example shows the sequence of functions to enable the backlash compensation Positioner BacklashEnable MyGroup MyPositioner GroupInitialize MyGroup GroupHomeSearch MyGroup PositionerBacklashSet MyGroup MyPositioner 10 PositionerBacklashGet MyGroup MyPositioner Backlash Status Returns the backlash value 10 and the backlash status Enable PositionerBacklashDisable MyGroup MyPositioner Linear Error Correction Linear error correction is available with all positioners and works in parallel to any other compensation To use the linear error correction you need to set a value for LinearErrorCorrection in the stages ini When set the corrected positions are calculated the following way Corrected position HomePreset EncoderPosition HomePreset x 1 LinearEncoderCorrection 106 The LinearEncoderCorrection is specified in ppm parts per million The correction is applied relatively to the physical home position of the positioner the Encoder position by definition is set to the HomePreset value at the home position This hardware reference for linear error correction has the advantage of being independent of the value for the HomePreset Example In the stages ini file set a value different from 0 in section Encoder parameter LinearEncoderCorrection Encoder EncoderType AquadB EncoderResolution
128. e from battery leakage THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES EXPRESSED OR IMPLIED INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE NEWPORT CORPORATION SHALL NOT BE LIABLE FOR ANY INDIRECT SPECIAL OR CONSEQUENTIAL DAMAGES RESULTING FROM THE PURCHASE OR USE OF ITS PRODUCTS First printing 2003 Copyright 2011 by Newport Corporation Irvine CA All rights reserved No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual is provided for information only and product specifications are subject to change without notice Any change will be reflected in future printings ix XPSDocumentation V2 6 x 08 11 XPS Universal High Performance Motion Controller Driver EU Declaration of Conformity Year mark affixed 2011 Experience Solutions EC Declaration of Conformity The manufacturer MICRO CONTROLE Spectra Physics rue Jules Guesde ZI Bois de l Epine BP189 F 91006 Evry FRANCE Hereby declares that the product Description XPS Function Universal High Performance Motion Controller Dnver Type of equipment Electrical equipment for measurement control and laboratory use complies with all the relevant provisions of the Directive 2004 108 EC relating to electro magnetic compatibility EMC complies with all the relevant provisions of the Directive 2 06 95 EC relating to electrical equipment de
129. e parameters must be 0 by default QD Newport 129 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial ExternalGatheringRun This action starts an external gathering It requires that an external gathering was previously configured with the function GatheringExternalConfigurationSet The gathering must be launched by a punctual event and does not work with events that have duration Action Parameter 1 NbPoints This parameter defines the number of data acquisitions NbPoints multiplied with the number of gathered data types must be smaller than 1 000 000 For instance if 4 types of data are collected NbPoints can not be larger than 250 000 4 250 000 1 000 000 Action Parameter 2 Divisor This parameter defines every Nth number of trigger input signal at which the gathering will take place This parameter has to be an integer and greater or equal to 1 For example if the divisor is set to 5 then gathering will take place every 5th trigger on the trigger input signal Action Parameter 3 and 4 These parameters must be 0 by default For further details on data gathering see chapter 12 Data Gathering MoveAbort This action allows to stop abort a motion on an event It is similar to sending a MoveAbort function on the event After breaking the group is in the READY state Action Parameter 1 to 4 These parameters must be 0 by default 11 3 Functions The following functions are related to the even
130. e position relative position Absolute Relative positions position C Newport 49 XPSDocumentation V2 6 x 08 11 XPS Software Tools 4 13 FRONT PANEL Jog The jog page allows executing a jog motion A jog motion is a continuous motion where only the speed and acceleration are defined but no target position Speed and acceleration can be changed during the motion but not during the acceleration period For a jog motion the jog mode must be enabled see Action button O A a ia guri oes O ajm O 4 14 FRONT PANEL Spindle The Spindle page provides similar functions to the jog page However specific jog actions are replaced by spindle actions that only works for Spindle groups XPSDocumentation V2 6 x 08 11 50 Software Tools 4 15 FRONT PANEL T O View The I O Review page provides review of all analog and all digital I O s of the controller To set the outputs use the page I O Set O a ama a Queene senta i P 4 16 FRONT PANEL T O Set The I O set page provides access to set the analog and digital outputs of the controller CO Newport oe XPSDocumentation V2 6 x 08 11 Software Tools XPSDocumentation V2 6 x 08 11 4 17 4 18 FRONT PANEL Positioner Errors The positioner errors page is an important page for trouble shooting When encountering any problems during the use of the system you find her
131. e range of motion devices which are categorized within the XPS as positioners Within the structure of the XPS firmware a positioner is defined as an object with an associated profile trajectory a PID corrector a motor interface a driver a stage and an encoder The general schematic of a positioner servo loop is below Corrector Loop n Feedforward j Input PID Filtering di Corrector 4 a amp gt Voltage to thea Driver power oston we to ct a Semen Calculations Limitation driver _ to stage Y Feedback fromt Motorized the encoder Stage n Figure 51 Servo structure and Basics The calculations done by the servo loop result in a voltage output from the controller that is applied to the driver which can be either an internal driver like Newport s Universal drive modules or to an external driver through the XPS pass through module Depending on the corrector loop type selected the level of this output voltage can be the result of two gain factors the PID corrector and the FeedForward loop The XPS has imbedded configuration files that provide optimized corrector loop settings for all Newport stages Non Newport stages may need to be assigned a specific corrector loop setting during the set up process In addition to the two main gain loops the XPS also adds filtering and error compensation parameters to this servo loop to improve system response and reliability The profiler T
132. e than once results in continuous path contouring A dedicated function performs a precheck of the trajectory which returns the maximum and minimum travel requirements per positioner as well as the maximum possible trajectory speed and trajectory acceleration that is compatible with the different positioner parameters The spline trajectory executes a Catmull Rom spline which is a 3rd order polynomial curve on an XYZ group The major requirements of a spline is to hit all points except for the first and the last point that are only needed to define the start and the end of the trajectory and to maintain a constant speed throughout the entire path except for the acceleration and deceleration period The definition and execution of the spline trajectory is similar to the line arc trajectory with similar functions for trajectory pre checking The PVT mode allows for the most complex trajectories and is only available with MultipleAxes groups In a PVT trajectory each trajectory element is defined by the end position and end speed of each positioner plus the move time for the element When all elements are defined the controller calculates the cubic function trajectory that will pass through all defined positions at the defined times and velocities PVT is a powerful tool for any kind of trajectory with varying speeds and for trajectories with rotation stages or other nonlinear motion devices Line Arc Trajectories Trajectory Terminology Tr
133. e valuable information about the errors related to the positioners Note that all positioner errors encountered since the last Clear all positioner errors are displayed even if some of the errors may not be present anymore The button Refresh refreshes the error page This means new errors are displayed but old errors that do not exist anymore are not removed To clear the errors use the button Clear all positioner errors e ma a dust ronzio n a TT Seria ma ot panza ert NI Newport s TE FRONT PANEL Hardware Status The Hardware status page is another important page for trouble shooting You find more valuable information related to your hardware here Not all information is related to an error pr EL gt lt a SO nego Gono RI C amp Newport qoe rr XPS Software Tools 4 19 FRONT PANEL Driver Status The Driver status page is another important page for trouble shooting Here you find valuable information related to the status of the driver Not all information is related to an error The type of status information that you can get depends on the drivers used Pmannen oes 5 mE tp Ore T SO noon Bier ed don 4 20 TERMINAL The terminal tool allows executing all functions of the XPS controller It provides also a convenient method for generating executable TCL scripts For more details about TCL scripts see chapter 16 1 o g
134. ed tachometer DC Motor Driver XPS DRVM RIVER TOR Mating conmector Mate DG25 wah UNC440 lockers t Ta hormaren 4 TLachomete 38 Travo beva Mode Encoder A G Motors 2 Encoder D r Motor 29 5 Moto 23 Er Figure 72 XPS DRVM Motor Driver Connectors 193 XPSDocumentation V2 6 x 08 11 XPS Appendices 22 3 Three phases AC brushless driver XPS DRV02 DRIVER 1 TO 8 DRIVER 1 TOS Mates concerto gt Matry connector Mato 039 Fermato O89 we UNCA4 40 lockers n wih UNC440 lochera 9 i PN F bo PA F Prase U 1 Treat beret prano LU 2 Travel bt J Prato Onge 4 Prone s 4 NC Ther tres fune VW Therma Vano W 7 GAD GND Thermas Thes resio 9 GND Moto Drover Connector Serntudes Connector Figure 73 XPS DRV02 Motor Driver Connectors 22 4 DC Motor Driver XPS DRV03 DRIVER 1 TOS Naino commento Mate DG25 wah UNC4 40 lochers 4 PHN t unchor PN Pur w t atrio toe achorwter t Ur grour achometer Travel wra 4 dtt Teawed let Mordor 6 Encoder A t Motors Ernod 1 r Motor 1 WN r Motor Encoder g 9 S Encoder A t N 4 Erodo H n MC nosa Zi NC 1 ign m Pij GN Figure 74 XPS DRV03 Motor Driver Connectors CW Riewport XPSDocumentation V2 6 x 08 11 194 XPS Appendices 22 5 Pass Through Board Connector 25 Pin D Sub XPS DRV00 WARNING This pass through board connector takes the place of the motor interface connector only if this axis is connected to an external motor
135. efined moves Practical examples for jog are with tracking systems or coordinate transformations where the speed or acceleration of the Jogging group is modified depending on the position or speed of the other motion groups or based on an analog input value The Jog mode can be enabled using the function GroupJogModeEnable and is available to all motion groups Once this mode is enabled the motion parameters can be set using the command GroupJogParameterSet which applicable to positioners and to motion groups To exit the jog mode first set the velocity to zero and then send the function GroupJogModeDisable C amp gt Newport 80 XPS Motion Tutorial 8 7 CW Newport Examples For a single axis group GroupJogModeEnable MySingleGroup Enables the Jog mode GroupJogParameterSet MySingleGroup 5 20 The single stage starts moving with a velocity of 5 units per second and an acceleration of 20 units per second GroupJogParameterSet MySingleGroup 5 20 The single stage starts moving in the reverse direction with the same absolute velocity and same acceleration GroupJogParameterSet MySingleGroup 0 20 The single stage stops moving its velocity being 0 units per second GroupJogModeDisable MySingleGroup Disables the Jog mode For a XY group GroupJogModeEnable MyX YGroup Enables the Jog mode GroupJogParameterSet MyXYGroup 5 20 10 40 The X axis and Y axis start moving with a velocity of 5 an
136. ement of the positioner as close as possible to the desired move that is independent of the encoder feedback loop Adding this Feed Forward gain can help reduce any encountered following errors and thus requires less compensation by the PID gain corrector For 155 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial example if a driver and positioner respond to a constant voltage by moving at a constant speed then feed forward input would be dictated by the SetpointSpeed The XPS stores standard Newport stage configuration files that can be used to quickly and easily develop the stage and system initialization ini files Below is a sample of typical stages and the type of DriverName MotorDriverInterface and CorrectorType each is assigned These standard Newport settings will be optimal for virtually every application and users would only need to modify their corrector loop parameters Kp Kd Ki to optimize positioner performance Similar configurations can be adopted for non Newport stages that are of similar motor driver types Stages with high current gt 3 A DC motor RV IMS with tachometer or back emf estimation DriverName XPS DRVM1 2 3 10 V Input gives Scaling Velocity stage velocity Speed loop amp Current loop configured by hardware MotorDriverInterface Analog Velocity CorrectorType PIDFFVelocity for Speed loop and PIDFFAcceleration for current loop Stages with DC motor driven through a
137. ep 0 002 and the enabled state 1 enabled 0 disabled GroupMoveAbsolute MyStage 30 PositionerPositionCompareDisable MyStage X The group has to be in a READY state for the position compare to be enabled Also the PositionerPositionCompareSet function must be completed before PositionerPositionCompareEnable function In this example one trigger pulse is generated every 0 002 mm between the minimum position of 5 mm and the maximum position of 25 mm The first trigger pulse will be at 5 mm and the last trigger pulse will be at 25 mm The output pulses are accessible from the PCO connector at the back of the XPS controller See appendix E PCO connector for details This table summarizes the results of the example above The figure below shows actual screen shots from an oscilloscope for the example above The enable window is displayed in ch1 and the pulses in ch2 A 2 24V S 620V D Ops A Chi i 260v 17 Jun 2005 610 00 5 14 13 04 Q gt Newport XPSDocumentation V2 6 x 08 11 146 Motion Tutorial C Newport yeeo ras At position 5 mm the position compare output functionality becomes active and the first pulse is generated Then pulses are generated every 2 ym which equals a time span of 100 xs at a speed of 20 mm s 2 wm 20 mm s 100 ys Tek Prevu M 20 05 D ct A LMN y 6 20 y S S Chi 2 000 ME 2000 2 1 00us A Chi 200V 17 Jun 200 me 101 3406p 14 16 13 This second picture shows
138. epper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to Winding B lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to the center tab of Winding B of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to the center tab of Winding A of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This input is pulled up to 5 V with a 2 2 KQ resistor by the controller and represents the stage positive direction hardware travel limit This input is pulled up to 5 V with a 2 2 KQ resistor by the controller and represents the stage negative direction hardware travel limit These A and A inputs are differential inputs Signals are compliant with RS422 electrical standard and are received with a 192 XPS Appendices 22 2 Encoder B and B Index amp Index Encoder ground Origin 5 V DRVO1 250 Limit ground Shield GND 26LS32 differential line receiver A resistor of 120 Q adapts the input impedance The A and A encoder signals originate from the stage position feedback circuitry and are used for position tracking These B and B inputs are differential inputs Signals are compli
139. er Hardware Status e PositionerErrorGet Returns an error code e PositionerErrorStringGet Returns the description of the error code e PositionerHardwareStatusGet Returns the status code e PositionerHardwareStatusStringGet Returns the description belonging to the status code In a fault condition it is also very important to know the current status of the group and the cause of the transition from the previous group status to the current group state The following functions can be use to retrieve the Group Status e GroupStatusGet Returns the group status code e GroupStatusStringGet Returns the description belonging to the group status code NOTE Refer to the Programmer s Manual for a complete list of status and error codes Also refer to chapter 4 0 for troubleshooting the XPS controller with the help of the Newport web utilities 61 XPSDocumentation V2 6 x 08 11 Software Tools XPSDocumentation V2 6 x 08 11 6 4 Updating the Firmware Version of Your XPS Controller Users can regularly update the controller with new firmware releases To review the current available versions refer to the FTP server ftp download newport com MotionControl Current MotionControllers XPS Updates There are separate folders for the different versions each folder contains the Firmware pack the RC IHM and the Stage data base To install a new version follow these instructions 1 Double click on the XPS
140. ertia with rotation stages on the positioner and returns recommended values for the Scaling Acceleration parameter Repeat Auto scaling with any major change of the payload on the positioner With no major change of the payload there is no need to redo the auto scaling To perform an auto scaling do the following 1 Select the main tag TUNING Select a positioner name The following screen appears 111h1hkh12R e et tie i Soares ee di EELT Gag 7 CS rene oo a pene de Conan fi aas me t evo 0 cme mere porematere 6 omamme cenere baad ve tome tl Set tet 229 See Senet em mg ee Sonme Go _ cas Click Kill group then click Auto scaling The stage vibrates for a couple of seconds Then the following message appears Aa ia ee te duet Mani ade dama arse LOFT ama preso A ot pee ae r ems Lo e Some a nti mee ia o og na ed ser n w Sami 1 ae ae j a eom n 56 XPS Software Tools 3 To save the recommended values click Save To apply these new values you need to reboot the controller Your positioner should now work properly Repeat auto scaling with any major change of the payload of the positioner NOTE All other functions of the tuning page should be used only by experienced users 4 22 TUNING Auto Tuning NOTE Apart from the Auto scal
141. ess automatically Once the Ethernet card address is set you are ready to connect to the XPS controller Following is the procedure for connecting to the controller 6 Open Internet Browser and connect to http 192 168 0 254 Login Name Administrator Password Administrator Please see the picture below Rights Administrator NOTE Please note that the login is case sensitive C amp gt Newport 18 User s Manual 3 5 4 eH Niewport 2 pn 2 0 o Dora Newport laren lt ewe Motion Contretier Orever KPS C9 Once logged in the XPS has established a direct connection to local computer If you don t want to connect the XPS controller through a Corporate Network you may skip to section 3 7 Connecting the Stages NOTE If you want to change the IP address of the XPS controller follow the next section explanations but keep using the gray cross over Ethernet cable to connect the XPS controller directly to the PC Connecting the XPS to a Corporate Network Using Static IP Configuration Once you are logged in using the previous described steps for direct connection you can change the IP configuration of the controller in order to connect the XPS over a Network Select CONTROLLER CONFIGURATION of the web site and select the sub menu IP Management The static IP address the subnet mask and the Gateway IP address have to be provided by your Network Admin
142. etersSet Positioner AnalogTracking Velocity ParametersGet The functions PositionerAnalogTrackingPositionParametersSet and PositionerAnalogTracking VelocityParametersSet define the maximum velocity and acceleration used during analog tracking Analog Position Tracking The parameters that can be set for analog position tracking are the GPIO Name scale and offset The GPIO Name denotes which connector and pin number the analog signal will be input The scale and the offset are used to calibrate the output position in the following way Position InitialPosition AnalogValue Offset Scale Typical applications of analog position tracking is for beam stabilization tracking systems auto focusing sensors or alignment systems When connecting a function generator to the GPIO input analog tracking provides an easy way to make cyclical motion sinusoidal motion for example Example Following is an example that shows the sequence of functions used to setup Analog Position Tracking GroupInitialize Group GroupHomeSearch Group Positioner Analog Tracking PositionParameterSet Group Positioner GPIO2 ADCI Offset Scale Velocity Acceleration GroupAnalogTrackingModeEnable Group Position GroupAnalogTrackingModeDisable Group 83 XPSDocumentation V2 6 x 08 11 Motion Tutorial 8 8 2 XPSDocumentation V2 6 x 08 11 Analog Velocity Tracking The parameters that can be set for analog ve
143. ettings to optimize the stage for different applications The box Use ESP Compatibility for Hardware detection is checked by default If your stage has an ESP chip inside see blue ESP compatible sticker on the stage this box shall remain checked Otherwise with vacuum compatible stages or with old Newport stages uncheck this box Click on Add new stage to add the stage O ga da Gren em oes w uo AD Newport 46 XPS Software Tools 4 10 STAGE Add Custom Stage This tool supports the configuration of the XPS controller to a stage or to a positioning device that is not made by Newport For detailed information about this tool please refer to the document ConfigurationWizard pdf provided under the main tag DOCUMENTATION e tem 4 11 STAGE Modify This tool allows you to review and modify all parameters of all stages included in the stages ini Only experienced users should modify these parameters For the exact meaning of the different parameters please refer to the document Configuration Wizard pdf accessible from the main tag DOCUMENTATION L f wctmeenene dol e DEE zezione n agri C Rewport A 47 XPSDocumentation V2 6 x 08 11 Software Tools XPSDocumentation V2 6 x 08 11 To modify parameters of a stage do the following 1 Select a stage from the list Click on Modify 2 Scroll down to the section that contains the parameters that yo
144. etween a first and a last trajectory element see 9 3 PVT Trajectories for details The minimum possible time interval is 100 jus Two signals are provided GPIO2 pinll Window A constant 5 V signal is sent between the beginning of the first and the end of the last trajectory element GPIOZ2 pin12 Pulse A 1 us pulse with SV peak voltage is sent for every time interval For details about the XPS I O connectors see appendix section 20 2 To define the first element the last element and the time interval use the function MultipleAxesGroupPVTPulseOutputSet Example 1 MultipleAxesGroupPVTPulseOutputSet Group1 3 5 0 01 One pulse will be generated every 10 ms between the start of the 3rd element and the end of the Sth element MultipleAxesPVTVerification Group1 Traj trj Loads and verifies the trajectory Traj trj MultipleAxesPVTExecution XY Traj trj 1 Executes the trajectory Traj trj one time Note that the pulse output settings are automatically removed when the trajectory is over Hence with the execution of every new trajectory the pulse output settings must be defined again It is also possible to use the trajectory pulses and the pulse window state as events in the event triggers see section 11 0 Event Triggers for details This allows the gathering of data on a trajectory Example 2 MultipleAxesPVTPulseOutputSet Groupl1 3 5 0 01 One pulse will be generated every 10 ms between the start of the
145. f data will be gathered and stored in the data file The following data types that can be collected Positioner Name ExternalLatchPosition and Positioner Name Secondary Positioner ExternalLatchPosition for secondary positioners of gantries see chapter 4 8 for details These positions refer to the uncorrected encoder position means no error corrections are taken into account For devices with RS422 differential encoders the resolution of the position information is equal to the encoder resolution For devices with sine cosine 1Vpp analog encoder interface the resolution is equal to the encoder scale pitch divided by the value of the positioner hard interpolator see function PositionerHardInterpolatorFactorGet Its value is set to 20 by default the maximum allowed value is 200 Please refer to the Programmer s Manual for details The external latch positions require that the device has an encoder No position data can be latched with this method for devices that have no encoder GPIO2 ADCI to GPIO ADC4 referring to the 4 analog input channels on the GPIO2 The following sequence of functions is used for a trigger based data gathering GatheringExternalConfigurationSet EventExtendedConfigurationTriggerSet EventExtendedConfigurationActionSet EventExtendedStart 142 XPS Motion Tutorial Other functions associated with the event based gathering are GatheringConfigurationGet GatheringCurrentNumberGet GatheringE
146. f the Use of the Functions ecseeseecseeeeseeeeseneeseeeeseeseseeaeeaes 97 P V E TFrajectories 2 rio lesa i ga nile de dini Re einen ila cl dee See i 97 93 1 Trajectory Ferminology izle aa li ili Ila lla 97 9 32 Trajectory Conventions eisin lakes aL LIA I nt I II sl SU in iL 97 9 33 Geometric Conventions ia eee ei ee habeas ie 98 9 34 PNT Interpolation 213 0210100 ai to th dies dice Ai taal td aa aa ll ui 98 9 3 5 Influence of the Element Output Velocity to the Trajectory eee 99 9 3 6 Trajectory File Description i 100 9 37 Trajectory File Example 2 2 2 4 ria ila nina 100 9 3 8 PVT Trajectory Verification and Execution i 102 9 3 9 Examples of the Use of the functions ii 103 10 0 Compensation sssoooecsssssssscccccesssssssococesesessssoooccesesssssossocssssessssssosesesss L04 10 1 Backlash C mpensatio n nonane iar iui 105 10 27 Linear Error OO ECO a SEs Sv 106 C amp gt Newport XPSDocumentation V2 6 x 08 11 vi an XPS Universal High Performance Motion Controller Driver 10 3 Positioner Mapping sic sch eevee tthe gece a desi see dese ade a eed ee eed 106 ORAS O A Mp divieto aes thal ts anaes cola ie ile cine ii lie Goes iI 109 105 XYZ Map pine ins lO A a a A a a A 111 11 0 Event Eropers antenna niro ALT Ed EVedis oil ani ni dio ia AR AAEE LA i i e ilo 118 TAD ACHONS iaia ea 125 1 15 FUNCUONS ERARIALI Cna 130 TA CE
147. file gets executed with a velocity of 10 units sec and an acceleration of 70 units sec When this trajectory starts more precisely when the positioner of the X axis starts moving the bits 2 4 and 6 of the output GPIO3 are set to 1 4210 1010102 C amp Newport o ae 174 Motion Tutorial C Newport re 16 2 001 002 DO3 DO DOS DOG eras our O O O e Output set to 1 O Output set to 0 NOTE Selecting the function TC LScriptExecute from the terminal menu opens a drop down list for the available TCLFileNames However this list is limited to 100 entries To learn more TCL programming refer to the TCL Manual accessible from the documentation menu of the XPS web site The TCL manual provides a complete description of all TCL commands and some more complex examples of TCL scripts LabView VIs LabView is one of the most popular programming languages for the XPS controller Newport provides a complete list of LabView drivers for the XPS controller which means that LabView VIs exist for all XPS commands In this section a simple LabView application was developed that sequentially sends a number of commands to the XPS The final application is illustrated as follow i ip ss om Paone ESCO METTE oes ia a TETE aa g uie __p gt C ER eee To use the XPS LabView drivers the library files from the Admin Public Drivers LabView XPS C8 Controller folder of the XPS control
148. function MultipleAxesPVTParametersGet returns the trajectory name and the number of the trajectory element that is currently in execution This function returns an error if the trajectory is not in execution 102 XPS Motion Tutorial Examples of the Use of the functions MultipleAxesPVT Verification NGroup PVT1 trj This function returns a 0 if the trajectory is executable MultipleAxesPVTVerificationResultGet NGroup 1Positioner Name NegTravel PosTravel MaxSpeed MaxAcceleration This function returns the name of the trajectory checked with the last sent function MultipleAxesPVTVerification to the motion group NGroup PVT1 trj and the trajectory limits for the positioner NGroup Positioner These trajectory limits are the negative or left travel requirement the positive or right travel requirement the maximum reached speed and the maximum reached acceleration Make sure that these trajectory limits negative and positive travel requirements speed and acceleration are below the soft limits of the stages defined in the stages ini file section Travel MinimumTargetPosition MaximumTargetPosition and section Profiler MaximumVelocity MaximumAcceleration MultipleAxesPVTExecution NGroup PVT1 trj 5 Executes the trajectory PVTI trj five 5 times MultipleAxesPVTParametersGet NGroup FileName ElementNumber Returns the trajectory file name in execution PVTI trj and the number of the current executed t
149. ges of speed and acceleration Synchronized point to point Spindle motion continuous motion with periodic position reset Gantry mode including XY gantries with variable load ratio Line arc mode linear and circular interpolation incl continuous path contouring Splines Catmull Rom type PVT complex trajectory based on position velocity and time coordinates Analog tracking using analog input as position or velocity command Master slave including single master multiple slaves and custom gear ratio Compensation Linear error Backlash positioner error mapping XY and XYZ error mapping All corrections are taken into account on the servo loop Servo Rate 10 kHz Control Loop Open loop PI position PIDFF velocity PIDFF acceleration PIDDualFF voltage Variable PID s PID values depending on distance to target position Deadband threshold Integration limit and integration time Derivative cut off filter 2 user defined notch filters XPSDocumentation V2 6 x 08 11 Cc Newport XPS User s Manual TO 30 TTL inputs and 30 TTL outputs open collector 4 synch analog inputs 10 V 14 Bit 4 synch uncommitted analog outputs 16 Bit Watchdog timer and remote interlock Trigger In Hardware latch of all positions and all analog I O s 10 kHz max frequency lt 50 ns latency on positions lt 100 us time jitter on analog I O s Trigger Out One high speed position compare output per axes that can be eithe
150. grams commands are blocked until the request for data has been satisfied When the remote system writes data on the socket the read operation will complete it and write it in the received message window of the Terminal menu 0 if command has been well executed or the error number in case of an error That way commands are executed sequentially as each command always waits for a feedback before allowing execution of the next function The main benefit of using this type of socket is that an execution acknowledgement is sent to the host computer with each function In case of any error it allows an exact diagnostic which function has caused the error It also allows a precise sequential process execution On the other hand more functions could be sent in parallel using non blocking sockets However the drawback is that it is almost impossible to diagnose which function has caused an error To execute several processes in parallel for instance to request the current position during a motion and other data simultaneously it is possible to communicate to the XPS controller via different sockets The XPS controller supports a maximum number of 30 parallel opened sockets The total number of open communication channels to the XPS controller be it via the website TCL scripts a LabView program or any other program can not be larger than 30 User s who prefer not to use blocking sockets or whose programming languages don t support mu
151. hat can be associated with possible actions Some of these examples however may have unwanted results Since the XPS controller provides great flexibility to trigger almost any action at any event the user must be aware of the possible unwanted effects Possible events Possible actions Always w t Toggle digital output immediate _ ___ Generate pulse on digita output Motion start sa a ae Set digital output Motion end A Copy setpoint position to analog output Motion state Analog output setpont ponhon gan offset Constant velocity start NI Copy setpoint velocity to analog output Constant velocity end a Analog output setpont velocity gan ottset Constant velocity state e Copy setpoint acceleration to analog output da Analog output setpoint acceleramon gain offset Trajectory element start ke Start TCL script Trajectory element state Start data gathering 1 Possitie Dut prodadiy wet ummarted result Wil shvenys toggle the cdigrtal Output wate the group a n moton Figure 46 Possible Events 131 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial Examples 1 EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantVelocityStart 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 4 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 In this example when positioner G1 P1 reaches constant vel
152. hen no error has been detected during the system boot this file is empty SYSTEM Auto Configuration With the help of this screen a quick basic configuration of the XPS controller can be done Check un check those stage models that you want don t want the XPS controller to configure to When done click Generate Configuration Files The XPS controller reboots After re booting you are able to use the XPS controller in this basic configuration For further information refer also to chapter 3 8 1 NOTE Generate Configuration Files deletes your current system ini configuration file For troubleshooting a system make sure that you have a copy of your system ini file for recovery Under Driver Model and Stages model all motor drivers and Newport ESP compatible stages seen by the XPS controller are listed Hence this screen provides also very valuable information for diagnosing or troubleshooting the system C amp gt Newport XPS Software Tools o 2 el e eee a na mumm e ee Perin Gr N D aro Ome r oe OMeet Cee M 4 7 SYSTEM Manual Configuration This tool allows you to review the current system configuration and to define a new one See also chapter 3 8 2 for further information To define a new system you need to define all motion groups that should belong to that system There is no possibility of appending a motion group to an existing configuration from this tool To define
153. ial Figure 50 Temporal resolution of time spaced pulses in oscilloscope view Example 2 The time flasher function is of particular use with high precision direct drive stages At high speeds these stages typically provide very good speed stability In other words the position change over a short time interval is highly consistent and repeatable Hence time spaced pulses can be used for synchronization with similar in some cases even higher precision as distance spaced pulses The time spaced pulse configuration however provides some further flexibility with regards to the nominal distance between successive triggers Consider an XM stage for instance XM stages feature an analog encoder with 4 wm signal period The max resolution of the distance spaced pulses is 20 nm setting PositionerHardInterpolatorFactorSet 200 If the goal is to get pulses at a nominal distance of 268 nm at a speed of 200 mm s speed this is not possible using the distance spaced pulse configuration Either 260 nm or 280 nm are possible but not 268 nm With some minor adjustments to the target speed however this is well possible using the time spaced pulse configuration e The target speed is 200 mm s the desired distance between successive pulses is 268 nm So the nominal time interval between successive pulses is 268 nm 200 mm s 1 340 ys e Round this nominal value to the next possible time interval means to the next integer multiple of 25 ns 1
154. ifferent forces required by the primary and the secondary X axes positioner depending on the position of the Y axis When correctly set it ensures a torque free acceleration and deceleration on the x axis see picture below for illustration Axe X Axe Y For applying a variable load ratio for an XY gantry check the box Use a force ratio during the group definition See example below There are three parameters to input e Y Offset for force ratio e Primary Y Motor Force Ratio e Secondary Y Motor Force Ratio A correct definition for these three parameters is not simple In case of interest in this function please call Newport CAD Newport 44 XPS Software Tools o oee tam This is an example of a system ini file with one XY gantry GROUPS SingleAxisInUse SpindlelnUse XYInUse MyXYGantry XYZlInUse MultipleAxesInUse MyXYGantry PositionerlnUse X Y InitializationAndHomeSearchSequence YThenX XMappingFileName YMappingFileName Gantry Force Ratio parameters YOffsetForForceRatio 0 PrimaryYForceRatio 0 SecondaryYForceRatio 0 MyXYGantry X PlugNumber 1 StageName IMS600LM Secondary positioner X2 SecondaryPlugNumber 4 SecondaryStageName IMS600LM SecondaryPositionerGantryEndReferencingPosition 10 2243 SecondaryPositionerGantryEndReferencingTolerance 0 1 SecondaryPositionerGantryOffsetAfterlnitialization 7 47 MyXY Gantry Y PlugNumber 3
155. imum elements number is practically not limited e PVT trajectory elements segments are 3 order polynomial pieces for each positioner that hit the positions P at time ti 1 with a velocity v and positions P at time ti with a velocity v There is no direct link between the trajectories of the different positioners of the MultipleAxes group CW Newport 97 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial e PVT trajectories form a continuous path each segment output position is equal to the next segment input position and the segment tangential angles at the connection point of any two consecutive segments are continuous including its derivative It means that the PVT trajectory continuity property is R e The input velocity of any element is equal to the output velocity of the previous element The input velocity for the first element is always zero The output velocity of the last element must be zero as well 9 3 3 Geometric Conventions e The coordinate system can be any system convention it does not need to be an orthogonal system e A PVT trajectory can be defined on any MultipleAxes group There is no limit to the number of positioners belonging to that MultipleAxes group It is also possible to define a PVT trajectory on a MultipleAxes group that contains only one positioner 9 3 4 PVT Interpolation For each positioner belonging to the MultipleAxes group the PVT trajectory calculates a 3 order poly
156. ine Arc Trajectory between 10 mm and 30 mm XYLineArcVerification XY Traj trj Loads and verifies the trajectory Traj trj GatheringConfigurationSet XY X CurrentPosition XY Y CurrentPosition GPIO2 ADC1 Configures data gathering to capture the current positions of the XY X and the XY Y and the analog input GPIO2 ADCI EventExtendedConfigurationTriggerSet Always 0 0 0 0 XY LineArc TrajectoryPulse 0 0 0 0 C amp gt Newport 152 06 XPS Motion Tutorial 13 5 CW Newport Triggers an action for every trajectory pulse The link of the event TrajectorPulse with the event Always is important to make the event permanent Otherwise the event will be removed after the first pulse EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 Defines the action gathers one set of data each trajectory pulse EventExtendedStart Starts the event trigger XYLineArcExecution XY Traj trj 10 100 1 Executes the trajectory at a trajectory speed of 10 mm s and a trajectory acceleration of 100 mm s one time GatheringStopAndSave Saves the gathering data from memory into a file gathering dat in the admin public folder of the XPS In this example one set of data will be gathered on the trajectory between length 10 mm and 30 mm at constant trajectory length intervals of 10 wm Triggers on PVT Trajectories This capability allows output of pulses at constant time intervals on a PVT trajectory The pulses are generated b
157. ing e Checks the trajectory file for data coherence e Simulates the trajectory to determine the positioner s requirements which are the travel requirements in negative and positive direction and the maximum reached speed and acceleration for each positioner This function helps determine whether the trajectory is executable e If all is OK it returns an OK 0 Otherwise it returns a corresponding error An error for instance is reported if one of the positioner s speed or acceleration reached during the trajectory exceeds the maximum allowed speed or acceleration The function MultipleAxesPVTVerificationResultGet can be executed only after a MultipleAxesPVTVerification It returns the trajectory limits for each positioner which are the travel requirements in positive and negative direction the maximum reached speed and the maximum reached acceleration To execute a PVT trajectory send the function MultipleAxesPVTExecution while specifying the file name and the execution number This function does not verify the trajectory coherence or geometric conditions exceeding any positioner s min or max travel speed or acceleration before execution so users must be careful when executing a trajectory without verifying the trajectory first In case of an error during the execution f because of bad data or because of a following error the motion group will make an emergency stop and will go the disabled state Finally the
158. ing feature which is described in the previous chapter only experienced motion control users should use the TUNING tool of the XPS controller All Newport positioners are supplied with default tuning parameters that provide consistent high quality results for the vast majority of applications Use the tuning tool with Newport positioners only when not fully satisfied with the dynamic behavior of your positioners The following provides a brief description of the TUNING tool 1 Selecta positioner name The following screen appears TT im mesme e rn i deu oy nE nae e i cera 7 i a we oad 1 om o et Jete some mtoto _ tome _ ee ete toome eet o E OO See M eae rot Wet Vie 57 XPSDocumentation V2 6 x 08 11 Software Tools 2 4 5 XPSDocumentation V2 6 x 08 11 Perform a gathering with your current parameter settings To do so Initialize and home your positioner then move to the desired start position Define the gathering data For a stage tuning Newport recommends gathering only the following error and the current position Define a motion distance Define the frequency divisor The frequency divisor defines the sampling rate of the gathering A frequency divisor equal to one means one data point is gathered every servo cycle or every 100 us With most positioners it is sufficient to set a value of 10 means one data set every 1 ms Define the number of points in relation to
159. is frequency FrqP must remain lower than the frequency FrqD of the derivative part to keep the stability The integral gain Ki drives the capability of the closed loop to overcome perturbations at low frequencies and to limit static error Due to the double integration of the acceleration command in a position by the stage encoder the overall gain of the integral part at a given frequency Frq is Gain ee 20 Fra This gain is equal to one at Frql 1 L FrqI Ki 20 This frequency FrqI must remain lower than the frequency FrqP of the proportional part to keep the stability Methodology of Tuning PID 1 Verify the AccelerationFeedForward in open loop adjustment done using Scaling Acceleration Close the loop set Kd increase it to minimize following errors until vibrations appears during motion 2 Decrease Kd to eliminate oscillations 3 Set Kp increase it to minimize following errors until the appearance of oscillations decrease it to eliminate oscillations 4 Set Ki increase it to limit static errors and settling time until appearance of overshoot oscillations 164 XPS Motion Tutorial 14 3 3 Corrector PIDDual FFVoltage The PIDDualFFVoltage must be used in association with a driver having a voltage input constant voltage gives constant motor voltage using MotorDriverInterface Analog Voltage Can also be used in velocity or acceleration command SetPoint 3 Acceleraton KFeedFor
160. is not in execution C amp gt Newport 96 XPS Motion Tutorial 9 2 9 Examples of the Use of the Functions XYZSplineVerification XY ZGroup Splinel trj This function returns a 0 if the trajectory is executable XYZSplineVerificationResultGet XY ZGroup X Positioner Name NegTravel PosTravel MaxSpeed MaxAcceleration This function returns the name of the trajectory checked with the last sent function XYZSplineVerification to that motion group Splinel trj the negative or left travel requirement for the XYZGroup XPositioner the positive or right travel requirement for the XYZGroup XPositioner the maximum trajectory velocity and the maximum trajectory acceleration XYZSplineExecution XYZGroup Splinel trj 10 100 Executes the trajectory Spline trj with a trajectory velocity of 10 units s and a trajectory acceleration of 100 units s XY ZSplineParametersGet XY ZGroup FileName Trajectory Velocity Trajectory Acceleration ElementNumber Returns the name of the trajectory in execution Splinel trj the trajectory velocity 10 the trajectory acceleration 100 and the number of the current executed trajectory element 93 PVT Trajectories 93 1 Trajectory Terminology Trajectory continuous multidimensional motion path PVT stands for Position Velocity and Time PVT trajectories are defined in an n dimensional space n to 8 These are available with MultipleAxes groups A PVT trajectory is
161. istrator to avoid network conflicts Once you have obtained 19 XPSDocumentation V2 6 x 08 11 XPS User s Manual these addresses you can input them in the IP configuration window as shown above The above shown addresses are only examples NOTE To avoid conflict with the REMOTE Ethernet plug the IP address must be different than 192 168 254 NOTE For majority of Networks the above setting for the Subnet Mask will work However for larger networks 200 computers or more the Subnet Mask address has to be verified with IT department In most cases for larger networks Subnet Mask is set to 255 255 0 0 Once the appropriate addresses for the Static IP configuration are set click on SET and switch off controller Connect now CAT 5 network cable black to the HOST connector of the XPS controller and to your network After restarting controller and restoring your PC s Ethernet card default configuration open the Internet browser and connect using your given Static IP address If you don t want to connect directly to Corporate Network Using Dynamic IP Configuration you may skip to section 3 7 Connecting the Stages 3 5 5 Connecting The XPS to a Corporate Network Using Dynamic IP Configuration Obtain DNS suffix from network administrator for the DNS suffix field a o uan n U w Db GE eee See E Assign any name for the Controller name field Click on SET and swi
162. lasherSet Positioner TimeF lasher Get PositionerTimeF lasherEnable Positioner TimeFlasherDisable The function PositonerTimeFlasherSet defines the position window and the time intervals for the trigger signals It has four input parameters Position Name Minimum Position Maximum Position Time Interval The time interval must be greater than or equal to 0 0000004 seconds 0 4 ys and less than or equal to 50 seconds Furthermore the time interval must be a multiple of 25 ns To enable the time spaced pulses the function PositionerTimeFlasherEnable must be sent Example 1 GroupInitialize MyStage GroupHomeSearch MyStage Positioner TimeFlasherSet MyStage X 5 25 0 00001 Positoner TimeF lasherEnable MyStage X GroupMoveAbsolute MyStage 30 Positioner TimeFlasherDisable MyS tage X The group has to be in a READY state for the time flasher to be enabled Also the PositionerTimeFlasherSet function must be completed before PositionerTimeFlasherEnable function In this example one trigger pulse is generated every 0 00001 seconds or at a rate of 100 kHz between the minimum position of 5 mm and the maximum position of 25 mm The first trigger pulse will be at 5 mm and the last trigger pulse will be at 25 mm or before The output pulses are accessible from the PCO connector at the back of the XPS controller See appendix E PCO connectors for details C amp gt Newport XPSDocumentation V2 6 x 08 11 150 XPS Motion Tutor
163. lectual Property Rights in and to all development process align or assembly technologies developed and other derivative work that may be developed by Newport Customer shall not challenge or cause any third party to challenge the rights of Newport Preservation of Secrecy and Confidentiality and Restrictions to Access Customer shall protect the Newport Programs and Related Materials as trade secrets of Newport and shall devote its best efforts to ensure that all its personnel protect the Newport Programs as trade secrets of Newport Corporation Customer shall not at any time disclose Newport s trade secrets to any other person firm organization or employee that does not need consistent with Customer s right of use hereunder to obtain access to the Newport Programs and Related Materials These restrictions shall not apply to information 1 generally known to the public or obtainable from public sources 2 readily apparent from the keyboard operations visual display or output reports of the Programs 3 previously in the possession of Customer or subsequently developed or acquired without reliance on the Newport Programs or 4 approved by Newport for release without restriction Sales Tech Support amp Service North America amp Asia Europe CW Newport Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech
164. ler must be copied to the folder Program Files National Instruments LabVIEW6 1 user lib XPS C8 Controller of your host computer Start the LabView software and open an empty VI All drivers are located in the menu Window gt Functions Pallet gt Functions gt User library gt XPS C8 The drivers are classified in groups TCP General Single axis XY axes XYZ axes Multiple axes Positioner GPIO Gathering and Events actions 175 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial Bate tgn g A EC E I ES I I osi Boinae 1 Gra circ aa opm Ova Sn vare a Grin ife Ero 00 SEG sm All LabView routines must begin with a TCP Open and must end with a TCL Close If the TCP connection is not well managed there will be no communication with the XPS Then add a constant chain Window gt Functions Pallet gt Functions gt Chain to indicate the IP address of the controller and link it to the TCP Open driver When passing the cursor on the in out panes of the driver the required information is displayed Add a Firmware Version Get from the general group and associate an indicator to its second output Link TCP Open to Firmware Version Get Then add the initialization part Add Group Kill Group Initialize and Home search drivers from the single axis group and indicate the name of the group to each driver Q Newport XPSDocumentation V2 6 x 08 11 176 Motion Tutorial C amp S Newport
165. lingTime applies a filter to the encoder signals for the trigger pulse generation Possible values are 0 075 default 1 4 12 us The setting of this EncoderSettlingTime should be done in relation to the application in particular speed and encoder resolution and the encoder position noise For most applications the default value works fine At very low speed with high encoder resolution and significant encoder position noise however it may be possible that additional trigger pulses are generated where no trigger pulse should be generated from the application In these cases a higher value setting for the EncoderSettlingTime could avoid these unwanted extra pulses The value for the EncoderSettlingTime however should not exceed the value for the Encoder resolution divided by the speed Please note also that the EncoderSettlingTime adds a nominal delay between the encoder transition and the trigger pulse Example With XM stages and hardware interpolator set to 200 see function PositionerHardInterpolatorFactorSet the resolution of the trigger pulses is 20 nm 4 um encoder scale pitch 200 At continuous speed motion with 20 m s speed the nominal time between successive encoder counts is 1 ms 20 nm 20 ym s In a not optimum environment of the XM stages it is possible that the actual position detected by the trigger circuitry is not continuously increasing but flickering around one encoder count 20 nm from time to time When
166. ller follow the same format Within the XPS controller all positioners are assigned to different motion groups These motion groups have the following common state diagram Not initialized state I Groupinitialize Motor Following error Following Errar initiakzation or state timeout I Motor initialization done GroupHomeSearch Homing done Not referenced state Homing state eo i i Niewport XPSDocumentation V2 6 x 08 11 64 XPS Motion Tutorial As shown in the above state diagram all groups have to be first initialized and then homed before any group is ready to perform any other function Once the group is homed it is in a ready state There are five different motion groups available with the XPS controller e SingleAxis group e Spindle group e XY group e XYZ group e MultipleAxes group Each group also has group specific states Please refer to the Programmer s Manual for group specific state diagrams for the five different groups All positioners of a group are bundled together for security handling Security handling on different groups is treated independently Following is a list of the different faults and consequences that can happen in the XPS controller Error type Consequence General inhibition Emergency stop Motor fault Encoder fault End of travel Emergency brake Following error Motion disable e After an emergency brake or an emergency stop
167. locity tracking are the GPIO Name offset scale deadband threshold and order The relationship among offset scale deadband and order is illustrated in Figure 24 Without order Vv Scale A i gt Ottse Dead Bard o With order gt 1 on the output v Scsi Ow A 4 nr I gt ttre Li l Deed Bard Figure 24 The Relationship Among Offset Scale Dead Band amp Order The tracking velocity calculates as follow e AnalogInputis the voltage input at the GPIO e AnalogGain refers to the AnalogGain setting of the analog input e Offset Order DeadBandThreshold and scale are defined with the function PositionerAnalogTracking Velocity ParametersSet e MaxADCAmplitude InputValue OutputValue are internally used parameters only InputValue AnalogInput Offset if InputValue gt 0 then InputValue InputValue DeadBandThreshold if InputValue lt 0 then InputValue 0 else InputValue InputValue DeadBandThreshold if InputValue gt 0 then InputValue 0 OutputValue IInputValuel MaxADCAmplitude Order Velocity Sign InputValue OutputValue Scale MaxADCAmplitude In the dead band region there is no motion If the order is set to 1 then the velocity is linear with respect to the input voltage If order is set greater than 1 then the velocity response is polynomial with respect to the input voltage This makes the change in velocity more gradual and more sensitive in relation to the change in voltage
168. ls 6 0 Maintenance and Service 6 1 6 2 6 3 Enclosure Cleaning The XPS Controller Driver should only be cleaned with a sufficient amount of soapy water solution Do not use an acetone or alcohol solution this will damage the finish of the enclosure Obtaining Service The XPS Controller Driver contains no user serviceable parts To obtain information regarding factory service contact Newport Corporation or your Newport representative and be ready with the following information e Instrument model number on front panel e Instrument serial number on rear panel or original order number e Description of the problem If the instrument is to be returned to Newport Corporation a Return Number will be issued which should be referenced in the shipping documents Complete a copy of the Service Form as shown at the end of this User s Manual and include it with your shipment Troubleshooting For troubleshooting the user can query different error and status information from the controller The XPS controller can provide the Positioner Error the Positioner Hardware Status the Positioner Driver Status the Group Status and also a general system error If there is an error during command execution the controller will return an error code The command ErrorStringGet can be used to retrieve the description belonging to the error code The following function commands are used to retrieve Positioner Error and Position
169. ltiple sockets such as Visual Basic versions prior to version Net can C Newport 179 XPSDocumentation V2 6 x 08 11 Motion Tutorial XPSDocumentation V2 6 x 08 11 disable the blocking feature by setting a low TCPTimeOut value 20 ms for instance In this case the XPS will unblock the last socket after the TCPTimeOut time However this method loses the ability to pinpoint which commands were properly executed Examples of the use of parallel sockets The following examples illustrate how to open several sockets via the web site interface TCL scripts LabView VIs and C programs Web site interface The simplest way to open several sockets in parallel is to open several windows on the IP address of the controller This is completely transparent to the user Two or more groups of stages can be commanded for instance from two terminal menus at the same time to execute different motions multitasking TCL scripts A TCL script is carried out sequentially the commands are executed one by one following the order they are written in the script Consequently there is no great interest to open several sockets in a single TCL script However it is possible to start a TCL script from another TCL script That way as many sockets and parallel processes can be started in parallel as needed Below is an example with 3 open sockets FERRE TCL program GEN FREE set TimeOut 10 set code 0 set Prog1 ProgRV tcl
170. mes the jerk time For the XPS controller the following parameters need to be configured for the SGamma profile e MaximumVelocity units s e MaximumAcceleration units s e EmergencyDecelerationMultiplier Applies to Emergency Stop e MinimumJerkTime s e MaximumJerkTime s The above parameters are set in the stages ini file for the positioner When using the XPS controller with Newport stages these settings are automatically done during the configuration of the system The velocity acceleration and jerk time parameters can be modified by the function PositionerSGammaParametersSet Example PositionerSGammaParametersSet MyGroup MyStage 10 80 0 02 0 02 This function sets the positioner MyStage velocity to 10 units s acceleration to 80 units s2 and minimum and maximum jerk time to 0 02 seconds The set velocity and acceleration have to be less than the maximum values set in the stages ini file These parameters are not saved if the controller is shut down After a re boot of the controller the parameters will be set back to the values set in the stages ini file In actual use the XPS places a priority on the displacement position values over the velocity value To reach the exact demanded position it may be possible that the speed of the positioner varies slightly from the value set in the stages ini file or by the PositionerSGammaParametersSet function So the drawback of the SGamma profile is that the velocity
171. mmended to force the initialization position using the LMI mode Large Move Initialization To do so append LMI to the line MotorDriverInterface AnalogSinXAccelerationLMI X 60 90 or 120 and add a line InitializationCycleDuration 5 at the end of the section driver command interface parameters of the stages ini Example 43 XPSDocumentation V2 6 x 08 11 Software Tools 4 8 3 XPSDocumentation V2 6 x 08 11 Driver command interface parameters MotorDriverInterface AnalogSin120AccelerationLMI ScalingAcceleration 30641 units s AccelerationLimit 27856 units s MagneticTrackPeriod 24 units InitializationAccelerationLevel 20 percent InitializationCycleDuration 5 seconds With the LMI setting during initialization the motor gets energized and the stage moves to the closest stable magnetic position The result is a quick motion of the stage by maximum plus or minus half of the length of the magnetic track This behavior might be undesired but provides a more failure proof method for initialization than the Newport default process that applies only very small oscillations to the stage during the initialization Gantries with linear motors and variable force ratio For XY gantries where the two X axes are driven by linear motors means driven in acceleration mode it is also possible to apply a variable force ratio for the two X axes positioners This variable force ratio accounts for the d
172. motion all axes compensations of the master and the slave are taken into account The slave must be a SingleAxis group The master can be a positioner from any group The master slave relation is set by the function SingleAxisSlaveParametersSet The master slave mode is enabled by the function SingleAxisSlaveModeEnable To enable the master slave mode the Slave group must be in the ready state The Master group can be in the not referenced or ready state 81 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 8 8 XPSDocumentation V2 6 x 08 11 Example 1 This example shows the sequence of functions used to set up a master slave relation between two axes that are not mechanically joined means all axis can move independently GroupInitialize SlaveGroup GroupHomeSearch SlaveGroup GroupInitialize MasterGroup GroupHomeSearch MasterGroup SingleA xisSlaveParametersSet SlaveGroup MasterGroup Positioner Ratio SingleA xisSlaveModeEnable SlaveGroup GroupMoveRelative MasterGroup Positioner Displacement SingleA xisSlaveModeDisable SlaveGroup Example 2 This example shows the sequence of functions used to set up a master slave relation between two axes that are mechanically joined Different than example 1 all motions including the motion done during the home search routine are done synchronously Important First set the HomeSearchSequenceType of the Slave group s positioner to Curren
173. mpensation is not compatible with trajectories Line Arc Spline PVT jog or analog tracking So it is not possible to execute any trajectory to use the jog mode or to enable the analog tracking with any motion group that contains positioners with enabled backlash compensation After the above has been taken into consideration a number of steps need to be done to enable the backlash compensation First of all there must be a value larger than 0 for backlash in the stages ini But this setting does not automatically enable the backlash compensation To do so you need to send the function Positioner BacklashEnable while the motion group to which this positioner belongs must be disabled To disable the backlash compensation for instance to execute some jog motion or to use analog tracking use the function PositionerBacklashDisable The value for the backlash compensation can be changed at any time by the function PositionerBacklashSet The new value for the backlash will be taken into account with the next following move Finally the function PositionerBacklashGet returns the current value for the backlash and the backlash status enabled or disabled For set backlash to remain set after power down the stages ini file must be modified with the value desired 105 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 10 2 10 3 XPSDocumentation V2 6 x 08 11 Example In the stages ini fil
174. n subroutines string manipulation 12 XPS User s Manual file management and much more TCL is used worldwide with a user base approaching one million users It is quickly becoming a standard and critical component in thousands of corporations Consequently TCL is field proven very well documented and has many tutorials applications tools and books publicly available www tcl tk XPS users can use TCL to write complete application code and XPS allows them to include any function to a TCL script When developed the TCL script can be executed in real time in the background of the motion controller processor and does not impact any processing requirements for servo updates or communication The VxWorks hardware real time multitasking operating system used on the XPS controller assures precise management of the multiple processes with the highest reliability Multiple TCL programs run in a time sharing mode with the same priority and will get interrupted only by the servo communication tasks or when the maximum available time of 20 ms for each TCL program is over The advantage of executing application code within the controller over host run code is faster execution and better synchronization in many cases without any time taken from the communication link The complete communication link can be reserved for time critical process interaction from or to the process or host controller NOTE It is important to note that XPS provides
175. n V2 6 x 08 11 tote Que p ut Burner fete fue Analog encoder display Comde hiten shah ime n forme det de ature oc am ae I 2 Cona V Example of the use of the functions GroupInitialize WithEncoderCalibration MyGroup Positioner EncoderCalibrationParametersGet MyGroup MyStage This function returns the encoder calibration parameter values encoder sinus signal offset encoder cosinus signal offset encoder differential gain and encoder phase compensation These values need to be entered in the appropriate section of the stages ini Positioner EncoderAmplitudeValuesGet MyGroup MyStage This function returns the encoder amplitude values encoder sinus signal maximum amplitude value encoder sinus signal current amplitude value encoder cosinus signal maximum amplitude value and encoder cosinus signal current amplitude value Following is the complete process for calibrating a stage with an analog encoder QD Newport 170 XPS Motion Tutorial Step 1 Initialize the positioner and run the calibration routine dia ie e tere dee I tant i Step 2 Start the AnalogEncoderCalibrationDiplay VI Move the positioner at very low speed Notice the variations between the actual green values and the ideal red values In this case it makes sense to apply new compensation values cH Newport 171 XPSDocumentation V2 6 x 08 11 Motion Tutorial XPSDocumentation V2 6 x 08 11
176. n each line depends on the number of positioners belonging to the MultipleAxes group The first data in each line is the duration of the element The following data is grouped in pairs of two representing the displacement and the output velocity for each positioner of the group So the line format is as follow Data 1 Element duration seconds Data 2 Ist positioners displacement units Data 3 Ist positioners output velocity units s Data 4 2nd positioners displacement units Data 5 2nd positioners output velocity units s And so on NOTE The first positioner is always defined first in the system ini of the MultipleAxes group see ActuatorInUse the second positioner is always defined as second and so on Trajectory File Example Following is an example of a PVT trajectory defined on a MultipleAxes group that contains two positioners The tabs are added for better readability 1 0 0 4167 1 25 0 0 1 0 2 9167 5 0 0 1 0 7 0833 8 75 0 0 1 0 9 5833 10 0 0 1 0 10 10 0 4167 1 25 1 0 10 10 2 9167 5 1 0 10 10 7 0833 8 75 1 0 10 10 9 5833 10 1 0 9 5833 8 75 10 10 1 0 7 0833 5 10 10 1 0 2 91667 1 25 10 10 1 0 0 41667 0 10 10 1 0 0 0 9 5833 8 75 1 0 0 0 7 0833 5 1 0 0 0 2 91667 1 25 1 0 0 0 0 41667 0 C amp gt Newport XPSDocumentation V2 6 x 08 11 100 A XPS Motion Tutorial This file represents the following data
177. n group GroupName is moved synchronously to the defined absolute position where Position may be one or more parameters depending on the number of positioners this motion group contains You can also use this same command to move a single positioner of a group to an absolute position by using the syntax GroupMoveAbsolute GroupName PositionerName Position These powerful object oriented functions are not only extremely intuitive and easy to use they are also more consistent with other programming methods and reduce the number of commands to be learned by the user compared to traditional mnemonic commands Another benefit provided by motion groups is improved error handling For instance whenever an error occurs due to a following error or a loss of the end of run signal only the motion group where the error originated gets affected disabled while all other motion groups remain active and enabled The XPS manages these events automatically This greatly reduces complexity and improves the security and safety of sensitive applications Q gt Niewport 66 XPS Motion Tutorial 7 3 1 7 3 2 7 33 734 7 3 5 7 4 To illustrate this let s consider a typical scanning application If there is an error on the stepping axis of the XY table which is set up as an XY group then only the XY table will be disabled while the auto focusing tool a vertical stage that is defined as a separate SingleAxis group can continue
178. n in 1 s Ki is given in 1 s Kd is given in 1 s Filtering and Limitation e ScalingAcceleration units s is the theoretical acceleration of the stage resulting from a 10 volts input on the driver depends on the stage payload e AccelerationLimit units s is the maximum acceleration allowed to be commanded to the driver C amp Newport 163 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 14 3 2 2 143 23 XPSDocumentation V2 6 x 08 11 Basics The derivative term Kd drives the cut off frequency of the closed loop and must be adjusted first the loop will not be stable with only Kp Due to the double integration of the acceleration command in a position by the stage encoder the overall gain of the derivative path at a given frequency Frq is equal to Kd 2xFrq This gain is equal to one at FrqD Kd 2x close to servo loop cut off frequency This frequency must remain lower than the cut off frequency of the current loop of the driver and lower to mechanical natural frequencies to keep the stability The proportional gain Kp drives mainly the capability of the closed loop to overcome perturbations at medium frequencies and to limit following errors Due to the double integration of the acceleration command in a position by the stage encoder the overall gain of the proportional part at a given frequency Frq is Gain ems ee 20 rq This gain is equal to one at FrqP FrqP gt Qa Kp Th
179. n sets a voltage on the Analog output in relation to the actual current or theoretical Setpoint position The gain and the offset are used to calibrate the output This action makes most sense with events that have some duration always MotionState ElementNumberState etc as the analog output will be updated each servo cycle or each profiler cycle as long as the event lasts When used with events that have no duration like MotionStart or MotionEnd the analog output gets only updated once and this value is hold until the next change Action Parameter 1 Positioner Name This parameter defines the name of the positioner which position value is used Action Parameter 2 Gain The position value is multiplied by the gain value For example if the gain is set to 10 and the position value is 1 mm then the output voltage is 10 V Action Parameter 3 Offset The offset value is used to correct for any voltage that may be present on the Analog output Analog output Position value gain offset Action parameter 4 This parameter must be 0 by default DACSet CurrentVelocity and DACSet SetpointVelocity This action sets a voltage on the Analog output in relation to the actual current or theoretical Setpoint velocity The gain and the offset are used to calibrate the output This action makes most sense with events that have some duration Always MotionState ElementNumberState etc as the analog output will be updated ea
180. nStart v v ConstantDecelerationEnd v v ConstantDecelerationState v v v v TrajectoryStart v v v v TrajectoryEnd v v v v TrajectoryState v v v v ElementNumberStart Element v v v v ElementNumberState Element v MotionDone V v v TrajectoryPulse V y v TrajectoryPulseOutputState v DILowHigh Bit index v DIHighLow Bit index v DIToggled Bit index Vv ADCHighLimit Value v ADCLowLimit Value v PositionerError Mask v PositionerHardwareStatus Mask C amp gt Newport XPSDocumentation V2 6 x 08 11 118 XPS Motion Tutorial CW Newport An event is entirely composed by Actor Category Event Name Parameter1 Parameter2 Parameter3 Parameter4 Not all event names have a preceding actor and category but all events have four parameters even though most parameters have no specific meaning For the parameters with no meaning it is still required to have a zero 0 as default To define an Event use the function EventExtendedConfigurationTriggerSet Examples EventExtendedConfigurationTriggerSet MyGroup MyPositioner SGamma MotionStart 0 0 0 0 In this case the actor is a positioner MyGroup MyPositioner and the event has a category The event happens when the next motion with the SGamma profiler on the positioner MyGroup MyPositioner starts After the motion is started the event gets removed EventExtendedConfigurationTriggerSet MyGroup XYLineArc ElementNumberStart 5 0 0 0 In this case the actor is a group
181. ncreases to the left looking at the back of the controller 14 Select the StageName from the list of stages These stage names refer to the stages defined with the Web Tool Stage Management 15 Checking the box Use a secondary Positioner assigns a secondary positioner for a gantry configuration For details about gantries please refer to section 4 8 Don t check this box for a regular XY group or for a regular SingleAxis group 16 Click on VALID to get back to the initial screen i Niewport XPSDocumentation V2 6 x 08 11 30 XPS User s Manual dl er n e re 17 Continue the same way with the other motion groups 18 When done click on Create new system ini file to complete the System configuration The controller re boots and the following message appears _ lt 7zZ2 OI s A Voi es ee a meee Oe Be de 1 tee bet J Click on OK When the controller has finished booting hear second beep after 1 2 minutes press F5 to reload the page select FRONT PANEL then select Move The following screen appears Group names will be different according to your definition ne Peeran po er fn 0 0 e 0w Click Initialize The State number changes from 0 to 42 and the Action button changes from Initialize to Home Click Home The stage starts moving to find its reference position When done the state number is 11 and the action but
182. ne the parameters for the trajectory execution e Ifallis OK it returns an OK 0 Otherwise it returns a corresponding error The function XYZSplineVerificationResultGet can be executed only after a XYZSplineVerification and returns the following e Travel requirement in positive and negative direction for each positioner e The maximum possible trajectory velocity speed that is compatible with all positioner velocity parameters It returns a value for the trajectory velocity that when applied at least one of the positioners will reach its maximum allowed speed at least once along the trajectory So the returned value varies between Min Vmax_actuator and Square Root Summ Vmax_actuator 2 However this value does not take into account that also the positioners acceleration can limit the trajectory velocity This is the case with splines that contain sharp curved segments e The maximum trajectory acceleration that is compatible with all positioner parameters At this trajectory acceleration one of the positioners will reach its maximum allowed acceleration during the trajectory execution The function XYZSplineVerificationResultGet returns the trajectory execution limits that have previously been calculated by the XYZSplineVerification function Note on this function s response Only the returned travel requirements are specific for each positioner the returned velocity acceleration values are the same for all positio
183. neaees 163 14 3 3 gt Corrector gt PID Dual FF Volti enor anaana Madehadwiededieigee 165 143 4 Corrector PIPoSition ta cca cca dina deca dana naan 166 15 0 Analog Encoder Calibration ccccssssssssssscccssssssssssscsscescsssssssees 108 16 0 Introduction to XPS Programming sccccccsssssssssssssssccssssssseees 173 16 1 TCL Generatori sc nia ala dna aman ERE ERR 174 16 2 Lab View VISiiicieieiviekaiaindetgiatin shadenstaisiahoiakaiossdatodesgiseas 175 16 3 DLE Drivers rails hata anne eni RG RCA ra aaa 178 16 4 Running Processes in Parallel 100 iodio siii iaia die dated daa AI 179 CW Newport vii XPSDocumentation V2 6 x 08 11 XPS Universal High Performance Motion Controller Driver XPSDocumentation V2 6 x 08 11 Appendices 17 0 17 1 17 2 17 3 AppendixA HardWat egia gala 183 Controller venale sosia cc share arca Ad etd ala al cli rad sila id dial 183 Rear Panel Connectors cria loin i Nana 184 Environmental Requirements esceeesesseeeseseeseeeeseeeesesacsesaeeesseeecseseeseeseseeseeesaeeees 184 18 0 18 1 18 2 18 3 18 4 18 5 Appendix B General I O Description scsscsssccssssscrecssscssreees 185 Digital I Os All GPIO Inhibit and Trigger In and PCO Connectors 185 1814 Digital INPUIS sierra AERE 185 18 1 2 0 Digital Outpuis a ai lia lei onora 186 Digital Encoder Inputs Driver Boards
184. ner the positive or right travel requirement for the XYGroup XPositioner the maximum trajectory velocity and the maximum trajectory acceleration XYLineArcExecution XYGroup Linearc1 trj 10 100 2 Executes the trajectory Linearcl trj with a trajectory velocity of 10 units s and a trajectory acceleration of 100 units s two 2 times XYLineArcParametersGet XYGroup FileName TrajectoryVelocity Trajectory Acceleration ElementNumber Returns the name of the trajectory in execution Linearcl trj the trajectory velocity 10 the trajectory acceleration 100 and the number of the current executed trajectory element 91 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 9 2 9 2 1 9 2 2 9 2 3 924 XPSDocumentation V2 6 x 08 11 Splines Trajectory Terminology Trajectory Continuous multidimensional motion path Spline trajectories are defined in a three dimensional XYZ space They are available with XYZ groups only The major benefit provided by a spline trajectory is to hit all points except for the first and the last point that are needed to define the start and the end and to maintain an almost constant speed speed being the scalar of the vector velocity throughout the entire path except the acceleration and deceleration periods Please note that the trajectory speed can vary in some areas depending on the distribution of the reference points This is related to the spline algorithm used
185. ners because they represent the trajectory velocity acceleration To execute a spline trajectory send the function XYZSplineExecution with the parameters for the trajectory velocity and the trajectory acceleration the trajectory acceleration that is used during the start and the end of the trajectory The motion profile for spline trajectories is trapezoidal The function XYZSplineExecution does not verify the trajectory coherence or geometric conditions exceeding any positioners min or max travel speed or acceleration before execution so users must pay attention when executing a trajectory without verifying the trajectory and without looking to the maximum possible values In case of an error during the execution because of bad data or because of a following error for example the trajectory acceleration or speed was set too high the motion group will make an emergency stop and will go to the disabled state The parameters for trajectory velocity and trajectory acceleration can also be set to zero In this case the controller uses almost surely executable default values which are the Min All V max actuator for the trajectory velocity and the Min All A max acwator for the trajectory acceleration Finally the function XYZSplineParametersGet returns the trajectory execution status with trajectory name trajectory velocity trajectory acceleration and current executed trajectory element This function returns an error if the trajectory
186. newport com Service RMAs amp Returns Tel 800 222 6440 e mail rma service newport com MICRO CONTROLE Spectra Physics S A S 1 rue Jules Guesde Bat B ZI Bois de l Epine BP189 91006 Evry Cedex France Sales France Tel 33 0 1 60 91 68 68 e mail france newport fr com Sales Germany Tel 49 0 61 51 708 0 e mail germany newport com Sales UK Tel 44 0 1635 521757 e mail uk newport com Technical Support e mail tech_europe newport com Service amp Returns Tel 33 0 2 38 40 51 55 XPSDocumentation V2 6 x 08 11 XPS Universal High Performance Motion Controller Driver XPSDocumentation V2 6 x 08 11 Service Information The user should not attempt any maintenance or service of the XPS Series Controller Driver system beyond the procedures outlined in this manual Any problem that cannot be resolved should be referred to Newport Corporation When calling Newport regarding a problem please provide the Tech Support representative with the following information e Your contact information e System serial number or original order number e Description of problem e Environment in which the system is used e State of the system before the problem e Frequency and repeatability of problem e Can the product continue to operate with this problem e Can you identify anything that may have caused the problem Newport Corporation RMA Procedures Any XPS Series
187. nomial curve P u that can be presented by the following equations Profile coefficient e Acceleration jerk 60 DT Vin Vow 20DX Jerk a DT e Initial acceleration _ 20 30DX DT 2 0Vin Vow DT in e Final acceleration 20 DTAVin 20Vou 30DX DT Gout Profile equation e Acceleration Acc t Gin Jerk Ot e Velocity 2 ieri 0t E vu e Position O N2 3 Post Va 0t E Ay Jek 2 6 Here DT isthe segment duration in seconds DX is the displacement during DT Vin is the output velocity of the previous segment which is equal to the input velocity of the current segment Vou is the output velocity of the current segment t is the time in seconds starting at 0 entry of the current element and ending at DT end of the segment XPSDocumentation V2 6 x 08 11 98 Motion Tutorial QD Newport 9 3 5 Influence of the Element Output Velocity to the Trajectory The contour of each PVT trajectory element is not only influenced by the displacement but also by the input and output velocities As the user decides on these velocities attention must be placed to these values to get the desired results The effect of the velocity is illustrated in the following example which shows the position and velocity profiles for one segment of a PVT trajectory that has a displacement of 5 mm a duration of 100 ms an input velocity of 10 mm s and an output velocity of either 50 mm
188. ny name for their stages The default name is the Newport part number but in some cases it makes sense using a different name That ways for instance it is possible adding the same set of parameters several times in the stage data base under different stage names Later you can modify certain parameters like travel ranges or PID settings to optimize the stage for different applications All stage parameters can be modified using the Web Tool Modify under the main tag STAGE Alternative the stage parameters can be modified directly in the stages ini file using a text editor The stages ini file is located in the Config folder of the XPS controller This folder is accessible via ftp see chapter 5 for details When all stages are added to the stages ini file build the system using the web tool Manual Configuration under the main tag SYSTEM In this tool the stages get assigned to positioners and the positioners get assigned to motion groups Please refer to chapter 7 3 for details on the different motion groups and their specific features The group name and positioner name can be any user given name Once the system has been built all system information is stored in a file called system ini Also the system ini file is located in the Config folder of the XPS controller The following describes the different steps needed to add a stage to modify the stage parameters and to build a manual configuration Chapter 4 0 provides further
189. o XY or XYZ compensation To take full benefit of the capabilities of the XPS controller a manual configuration is needed For Non Newport stages or very old Newport stages manual configuration is required See document ConfigurationWizard pdf for details This document is accessible from the XPS web tools under the tag DOCUMENTATION Manual configuration is also required for some vacuum compatible stages no ESP chip and for stages with adjustable home position 1 0 1 if the home position is changed from the standard position 0 to 1 or 1 The positions 1 and 1 require different settings in the stage data base as the home switch position is not recognized by the ESP chip 25 XPSDocumentation V2 6 x 08 11 XPS User s Manual 3 8 1 Auto Configuration When logged in as Administrator select SYSTEM then Auto configuration The following screen appears 1 1a negro o J gt Surano Oo edt Gre Check if all connected stages are recognized by the system If yes click on GENERATE CONFIGURATION FILES The controller reboots and the following screen appears this action may take up to two minutes ira rene rt te s mnan eni poten Cell Click OK When the controller has finished booting hear second beep after 1 2 minutes press F5 to reload the page select FRONT PANEL and then select Move The following screen appears cH Newport XPSDocumen
190. o ticks means every I ms GatheringReset Deletes gathering buffer GatheringConfigurationSet X Y Z X CurrentPosition XYZ Y CurrentPosition XY Z Z CurrentPosition EventExtendedConfigurationTriggerSet Timer1 0 0 0 0 XYZ Spline TrajectoryState 0 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart In this example during the execution of the next spline trajectory on the group XYZ one set of data will be gathered every 10 ms In contrast to the time based gathering which allows programming of a similar function here the data gathering will automatically stop with the end of the trajectory Also it is not need to define the total number of data sets that will be gathered 12 3 Function Based Internal Data Gathering The function based gathering provides a method to gather one set of data by a function It uses the same file as the time based and the Event based data gathering see chapters 13 1 and 13 4 for details At receipt of the function one set of data is appended to the gathering file in memory The data type s that can be collected with the event based gathering are the same as for the time based and the event based gathering see chapter 12 1 and 12 2 for details Example GatheringReset Deletes gathering buffer GatheringConfigurationSet XY X CurrentPosition XY Y CurrentPosition QD Newport 141 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 12 4 XPSDocumentation V2 6
191. obal polynomial interpolation One polynomial presents the whole trajectory Examples are Lagrange polynomial or Newton polynomial e Local polynomial interpolation Each segment that links two consecutive trajectory points has its own polynomial The resulting curve is obtained by segment polynomial concatenation To limit oscillations inside segments the polynomial order is generally limited to 3 or less This is called spline interpolation If the polynomial order is equal to 3 we have the cubic spline interpolation The interpolation methods are also classified by the continuity criterion Ck An interpolating curve has the continuity C if it and its derivatives up to k degree are continuous in all its points The interpolating spline curves generally have C or C continuity Catmull Rom splines are a family of local cubic interpolating splines where the tangent at each point pi is calculated based on the previous pi 1 and the next point pi on the spline In case of the spline curve tension t 1 2 normal case the Catmull Rom spline is described by the following equation 1 3 3 1 p 2 5 4 1 S u w uu olo Q Pi 2 1 0 1 0 py 0 2 0 0 py Here pi are the coordinates of the predefined trajectory point in x y and Z Pxi Pyi Pri u is the normalized interpolating parameter varying from 0 starting at p to 1 ending at pj Catmull Rom splines have a C1 continuity continuity up to the first derivative local contr
192. ocity bit 3 on the digital output on connector number is set to 1 Note 4 00000100 Note that the state of the bit will not change when the constant velocity of the positioner is ended In order to do so a second event trigger would be required see next example 2 EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantVelocityStart 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 4 0 0 EventExtendedStart EventExtendedConfigurationTriggerSet G1 P1 SGamma ConstantVelocityEnd 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 0 0 0 EventExtendedStart GroupMoveAbsolute G1 P1 50 In this example when positioner G1 P1 reaches constant velocity bit 3 on the digital output on connector number 1 is set to 1 Note 4 00000100 and when the constant velocity of the positioner G1 P1 is over bit 3 will be set to zero Note that the same effect can not be reached with the event name ConstantVelocityState After both events have happened the event triggers will get automatically removed In order to trigger the same action at each motion it is required to link the events with the event Always see next example This link will avoid that the event trigger gets removed after it is not happening anymore 3 EventExtendedConfigurationTriggerSet Always 0 0 0 0 G1 P1 SGamma ConstantVelocityStart 0 0 0 0 EventExtendedConfigurationActionSet GPIO1 DO DOSet 4 4 0 0
193. ol and interpolation Catmull Rom splines have the advantage of simple calculation without matrix inversion for on line calculations which is a great advantage for splines with a large number of trajectory points For this reason the XPS controller uses the Catmull Rom spline interpolation n Pa a py eer Pa Tip Pol Figure 31 A Catmull Rom spline 9 2 5 Trajectory Elements Arc Length Calculation Spline contouring at constant speed requires a high precision calculation of the segment s arc length The segment s arc length can be expressed as follow 2 2 2 d d d 8 gt S S d a x u du y u du z u du uy L u u C Newport yeeo rat 93 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 9 2 6 9 2 7 XPSDocumentation V2 6 x 08 11 Here u 0 is the segment starting point and ul 1 is the segment ending point Sx Sy Sz are x y and z components of the segment function This integral can only be numerically calculated which is done by the XPS controller using the Romberg numerical integration algorithm This guarantees that the arc length is calculated with an error less than 107 Trajectory File Description The spline trajectory is described in a file that is in the public trajectories folder of the XPS controller Each line of this file represents one point of the spline trajectory except for the first and the last lines that are needed only to define the start an
194. on of one of the positioners will reach its maximum allowed acceleration during the trajectory execution The XYLineArcVerificationResultGet function returns the trajectory execution limits that have previously been calculated by the XYLineArcVerification function Note about this function s result Only the returned travel requirements are specific for each Q gt Newport 90 XPS Motion Tutorial CW Newport 9 1 10 positioner The returned velocity acceleration values are the same for all positioners because they represent the trajectory velocity acceleration To execute a line arc trajectory send the function XYLineArcExecution with the parameters for the trajectory velocity and the trajectory acceleration that is used during the start and the end of the trajectory The motion profile for line arc trajectories is trapezoidal The function XYLineArcExecution does not verify the trajectory coherence or geometric conditions exceeding any positioners min or max travel speed or acceleration before execution so users must pay attention when executing a trajectory and verify the trajectory relative to the maximum possible values or interference In case of an error during the execution because of bad data or because of a following error for example if the trajectory acceleration or speed was set too high the motion group will make an emergency stop and will go the disabled state The parameters for trajectory velocity and
195. on stops after the latch However this means that the motion doesn t rest on the sensor transition but at some small distance from it To move exactly to the position of the sensor transition use the action MoveToPreviouslyLatchedPosition The latch does not change the current position value In order to set the current position value use the action SetPosition or SetPositionToHomePreset for instance after a MoveToPreviouslyLatchedPosition In the referencing state the limit switch securities are still enabled until the MinusEndOfRun sensor is specified with a GroupReferencingActionExecute function When specified the limit switch securities get disabled and will only get re enabled with the function GroupReferencingStop The Parameter is a signed velocity floating point This means that the direction of motion is specified by the sign of the parameter 8 3 2 Moves of Certain Displacements These two move commands which don t use the same parameters are explained below e MoveRelative The action MoveRelative allows commanding a relative move of a positioner similar to the function GroupMoveRelative However the function GroupMoveRelative is not available in the referencing state The relative move is specified by a positive or negative displacement The move is done with the SGamma profiler The speed and acceleration are the default values or the last ones defined by either a move on sensor event a MoveToPreviously Latched
196. one is not excessive Define Arcs An arc is defined by specifying the radius R and the sweep angle A Figure 28 Figure 28 An arc defined with radius and angle Q gt Newport 88 Motion Tutorial C Newport eee 9 1 7 9 18 Both radius and sweep angles are expressed in double precision floating point numbers The sweep angle can range from 1 E to 1 797 E allowing a definition of arcs from a fraction of a degree to a practically infinite number of overlapping circles Trajectory File Description The line arc trajectory is defined in a file that has to be stored in the public trajectories folder of the XPS controller This file must have the following structure The first line sets the FirstTangent Define the tangent angle for the first point in case of an arc This parameter has no effect if the first element is a line The second line sets the DiscontinuityAngle Define the maximum allowed angle of discontinuity The third line must be empty for better readability The following lines define the line arc trajectory Each line defines an element of the trajectory An element can be a Line or an Arc Line Define X and Y positions to build a linear segment Line X Y Arc Define radius and sweep angle to build an arc of circle Arc R A Trajectory File Examples The following is an example of a trajectory file that represents a rectangle with rounded corners and wi
197. onstant acceleration is finished Event parameter 1 to 4 0 by default ConstantAccelerationState Triggers an action during the constant acceleration state Event parameter 1 to 4 0 by default ConttansA c eler bon State Lvem DI AG m n ConstansA celerabonStart ConstantAcceterstonind Event Evera Figure 41 Constant Acceleration Event The same definition applies to ConstantDecelerationStart ConstantDecelerationEnd and ConstantDecelerationS tate C amp gt Newport XPSDocumentation V2 6 x 08 11 120 XPS Motion Tutorial ComstartDeceler ation Start Constant eceter sponine Event Evert 4 4 Constantiecelerapon State Evera Figure 42 Constant Deceleration Event MotionStart Triggers an action when the motion starts Event parameter 1 to 4 0 by default MotionEnd Trigger an action when the motion is ended Event parameter 1 to 4 0 by default Note MotionEnd refers to the end of the theoretic motion which is not the same as MotionDone depending on the definition see also section 8 5 MotionState Triggers an action during the motion Event parameter 1 to 4 0 by default Monon Sute vert ca Lai efasfteri MosonEna freni Enea Figure 43 Motion Event There are also several trajectory events that can be defined TrajectoryStart Triggers an action when the trajectory is started Event parameter 1 to 4 0 by default TrajectoryEnd Triggers an action when the
198. or in X Y 0 must be 0 This value in the file corresponds to the HomePreset positions in the XY group reference 109 XPSDocumentation V2 6 x 08 11 XPS To activate XY mapping the mapping files must be in the admin config directory of Motion Tutorial the XPS controller and the following settings must be done in the system ini The X Y MappingMaxPositionError are only used to check for the correctness of the X Y MappingLineNumber mapping file Example XMapping FileName Name of the mapping file YMappingFileName Name of the mapping file XMappingLineNumber Total number of lines of that file YMappingLineNumber Total number of lines of that file XMappingColumnNumber Total number of columns of that file YMappingColumnNumber Total number of columns of that file XMappingMaxPositionError Maximum absolute error in that file any value larger than the actual largest value in that file will be accepted as well YMappingMaxPositionError Maximum absolute error in that file any value larger than the actual largest value in that file will be accepted as well X Y MappingColumnNumber The following shows an example of the X and Y mapping files Matrix X XYMapping_X txt 0 3 00 2 00 1 00 0 00 1 00 2 00 3 00 3 00 0 00192 0 00534 0 00254 0 00023 0 00254 0 00534 0 00192 2 00 0 00453 0 00322 0 00676 0 00049 0 00676 0 00322 0 00453 1 00 0 00331 0 00845 0 00769 0
199. ositionError 0 00739 Use of the functions e Groupinitialize XY e GroupHomeSearch XY e GroupMoveAbsolute XY 3 2 The mapping files must at least cover the minimum and the maximum travel of the XY group they must cover the MinimumTargetPosition and the MaximumTargetPosition for the X and Y positioners parameters defined in the stages ini part Travels So in the above example the travel of the X and Y positioners can not be larger than 3 units but they can be smaller than this The units for the data are the same as defined by the EncoderResolution in the stages ini The data reads as follow at position X 3 00 units Y 2 00 units the corrected X position is 2 99852 units 3 00 0 00148 and the corrected Y position is 1 99862 units 2 00 0 00138 Between two data the XPS controller is doing a linear interpolation of the error The two mapping files don t need to contain the same X and Y positions NOTE Mapping is a functionality implemented within the XPS controller to correct the errors of accuracy When mapping is activated it is transparent for the user At position X Y 3 00 2 00 the function GroupPositionCurrentGet X Y X doesn t return 2 99852 3 00 0 00148 but 3 XYZ Mapping XYZ mapping is only available with XYZ groups It compensation for all errors of an XYZ group at any position of that XYZ group XYZ mapping can be used in addition to other compensations including positioner mapping
200. p the transistor s junction capacitor charge discharge A good value is around 10 mA So to pull up the PCO signals to 5 V a 470 Q resistor can be used Refer to section B 1 Digital I Os Digital Outputs for detailed electrical description 191 XPSDocumentation V2 6 x 08 11 XPS Appendices 22 0 Appendix F Motor Driver Cards 22 1 DC and Stepper Motor Driver XPS DRV01 Motor Motor Phi Ph2 Ph3 Ph4 Common 3 amp 4 Common 1 amp 2 Travel limit Travel limit Encoder A amp A XPSDocumentation V2 6 x 08 11 DRIVER 1 TOS STEPPER MOTOR Oc MOTOR STEPPER MOTOR Common M4 2 Encoder LA E chew A n MA 24 Ercoder 8 E ohw Figure 71 XPS DRVO1 Motor Driver Connectors This output must be connected to the positive lead of the DC motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to the negative lead of the DC motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to Winding A lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to Winding A lead of a two phase stepper motor The voltage seen at this pin is pulse width modulated with maximum amplitude of 48 V DC This output must be connected to Winding B lead of a two phase st
201. port standard stages as described above e MechanicalZeroHomeSearch is used with positioners that have a hardware home switch but no zero index from the encoder e IndexHomeSearch is used with positioners that have a home index but no home switch signal In this process the positioner always moves initially in the same direction to find the index When a limit switch is detected the direction of motion reverses until the index is found Note For users with CIE03 boards if a limit is detected before the index there will be an emergency brake and the group will go in NOT_INITIALIZED status e CurrentPositionAsHome is used when the positioner has no home switch or index This process will keep the positioner s home at its current location e MinusEndOfRunAndIndexHomeSearch uses the positioner s minus end of run limit as a hardware home switch and a zero index from the encoder This process is comparable to MechanicalZeroAndIndexHomeSearch but uses the minus end of run limit signal as hardware home switch The positioner homes to a position that is different from the MechanicalZeroAndIndexHomeSearch location e MinusEndOfRunHomeSearch uses the positioner s minus end of run limit for homing e PlusEndOfRunHomeSearch uses the positioner s plus end of run limit for homing Note This home search works only with the CIEOS board or later versions The home search process is set up in the stages ini file When using the XPS controller
202. r To define a gantry check the box Use a secondary positioner during the definition of a Single Axis group or XY group See chapter 4 7 for further instructions how to define a new motion group When done the following screen appears example Single Axis group I ET nni 41 XPSDocumentation V2 6 x 08 11 XPS Software Tools XPSDocumentation V2 6 x 08 11 48 1 Define the plug number for the secondary positioner and the name from the stage data base The secondary positioner must have at least common values with the primary positioner for the following parameters e MaximumVelocity MaximumAcceleration HomeSearchMaximumVelocity HomeSearchMaximumAcceleration MinimumTargetPosition MaximumTargetPositioner The parameters End referencing position and End referencing tolerance refer to the homing process of the gantry see chapter 4 8 1 for details The parameter Offset after initialization is relevant only for gantries with linear motors See chapter 4 8 2 for details For all other gantries enter 0 for this parameter Furthermore for certain XY gantries it is also possible to apply a variable force ratio for the two X positioner This variable force ratio accounts for the different forces required by the primary and the secondary X axes positioners depending on the position of the Y axis to ensure a torque free motion For details see chapter 4 8 3 NOTE
203. r compensation For this reason care must be taken to the effects when using linear error compensation in addition to other compensation methods Positioner mapping In contrast to the linear error compensation positioner mapping allows to compensate also for nonlinear error sources Positioner mapping is done by sending a compensation table to the XPS controller and doing the needed settings in the stages ini Positioner mapping is available with all positioners and works in parallel with other compensations except for the backlash compensation For this reason care must be taken to the effects when using linear error compensation in addition to other compensations XY mapping XY mapping is only available with XY groups It allows compensation for all errors of an XY group at any position of the XY group by sending two compensation tables to the XPS controller x and y compensations mapped to x and y positions The XY mapping is dynamically taken into account on the corrector loop of the XPS controller XY mapping works in parallel to other compensation methods For this reason care must be taken to the effects when using for instance XY mapping and positioner mapping at the same time XYZ mapping XYZ mapping is only available with XYZ groups It compensates for all errors of a XYZ group at any position of the XYZ group by sending three compensation files to the XPS controller x compensations mapped to x y and z positions and so on The
204. r configured for position synchronized pulses or for time synchronized pulses lt 50 ns accuracy latency 2 5 MHz max rate Dedicated Inputs Per Axis RS 422 differential inputs for A B and I Max 25 MHz over velocity and quadrature error detection 1 Vpp analog encoder input up to x32768 interpolation used for servo amplitude phase and offset correction additional 2nd hardware interpolator used for synchronization up to x200 interpolation Forward and reverse limit home error input Dedicated Outputs Per Axis when using external drives 2 channel 16 bit 10 V D A Drive enable error output Drive Capability Analog voltage analog velocity and analog acceleration used with XPS DRVO1 and XPS DRV03 for DC brush motor control Analog position used with XPS DRVOI for stepper motor control Analog position used with external drives for example for piezo control Analog acceleration sine acceleration and dual sine acceleration used with XPS DRV02 for brushless motors control Step and direction and pulse mode for stepper motors requires XPS DRVOO and external stepper motor driver 500 W 230 VAC and 425 W 115 VAC total available power Dimensions W x D x H 19 4U L 508 mm Weight 15 kg max CW Newport 2 2 Drive Options The XPS controller is capable of driving up to 8 axes of most Newport positioners with internal drives that slide through the back of the chassi
205. r is not directly accessible For instance for the parameter XY X SetpointPosition first select XY X from the choice list Then click on the choice field again and select SetpointPosition See also screen shots on the next page For specifying more than one data type use the ADD button Select the next parameter as described above Step 2 Step 3 Click in the choice field again To add another parameter press ADD Select parameter name and click Repeat step 1 and step 2 Femi teem esy sroeti0 Lottery entigar ateo tet Punctioe ergusmort 0 Coetheregi cntigar etre Cosi Example 1 Using the terminal screen of the XPS utility this example shows the sequence of functions to accomplish a time based data gathering triggered at an event GroupInitialize XY GroupHomeSearch XY GatheringConfigurationSet XY X SetpointPosition XY X CurrentVelocity XY X SetpointAcceleration The 3 data XY X SetpointPosition XY X CurrentVelocity and XY X SetpointAcceleration will be gathered EventExtendedConfigurationTriggerSet XY X SGamma MotionStart 0 0 0 0 EventExtendedConfigurationActionSet GatheringRun 5000 10 0 0 EventExtendedStart GroupMoveRelative XY X 50 GatheringStopAndSave CH Newport 138 XPS Motion Tutorial CW Newport 12 2 In this example a gathering is started when the positioner XY X starts its next motion using the Sgamma profiler for instance by the functions GroupMoveRelative or G
206. rackin g s iscsi ete riallaccia REE E RA eect acta ate ates 82 8 8 1 Analog Position Tracking iii 83 8 8 2 Analog Velocity Tracking iii 84 9 0 9 1 9 2 9 3 DTA J OCEONICS siii iraniani ee Elmne ArcTraJectoriestxi meraia zz antinave sanza Made TE 86 O11 Trajectory Terminolopy iania ene ila la alata nai 86 9 1 2 Trajectory Conventionsi til ila IR ted aaaea 87 91 3 Geometric CONVENTIONS sate Sila ii Msi Siete pect ean Sa 87 9 14 Defining Line Arc Trajectory Elements eeeeseeeeseeecseeeeseeeeseeaeeees 87 OM oe Detneemes o i REAL iaia me i ae lio 88 OG Define Ares ii il al i Oli oi a DI i i i ii di ui 88 ON Trajectory File Descriptions lia lla 89 9 15 Trajectory File Exampl s in eli do Li cli i lei La ene ia lo 89 9 1 9 Trajectory Verification and Execution ii 90 9 1 10 Examples of the Use of the Functions ii 91 Splines e ened weet nk sali ain E sce el on ii ei ee 92 9 2 1 Trajectory Termmnolopy srcrerninatane alla lalla 92 9 22 Trajectory Conventionis n ari 92 9 23 Geometric Conventions i rele 92 9 24 Catmull Rom Interpolating Splines ii 92 9 2 5 Trajectory Elements Arc Length Calculation ii 93 9 2 6 Trajectory File DEeSCrIptiohi c i RR iii 94 9 27 Trajectory File Example colei ae e iii Ani 94 9 2 8 Spline Trajectory Verification and Execution ii 96 9 2 9 Examples o
207. rajectory Generator within the controller calculates in real time the position velocity and acceleration deceleration that the positioner must follow to reach its commanded position Setpoint Position This profile is updated at a rate of 2 5 kHz The PID corrector then compares the SetpointPosition as defined by the profiler and the current position as reported by the positioner s encoder to determine the current following error The PID corrector then outputs a value that the controller uses to maintain increase or decrease the output voltage which is applied to the driver This loop is updated at a rate of 10 kHz The adjustment of the PID parameters allows users to optimize the performance of their positioner or system by increasing or decreasing the responsiveness of the output to increasing or decreasing following errors Refer to the section on PID tuning for more information and tips on PID tuning The PID corrector loop and trajectory generation loop rates have been optimized to provide the highest level of precision In most applications the critical control loop is the PID corrector since it has the most significant impact on positioning performance Because of this the PID loop is updated 4 times during each profiler cycle to improve profile execution and minimize following errors The Feed Forward gain generates a voltage output to the driver that is directly proportional to the input The purpose of this gain is to generate a mov
208. rajectory element 103 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 10 0 Compensation XPSDocumentation V2 6 x 08 11 The XPS controller features different compensation methods that improve the performance of a motion system Backlash compensation The setting of a backlash compensation improves the bi directional repeatability and bi directional accuracy of a motion device that has mechanical play Backlash compensation is available with all positioners but it is not compatible with all motion modes When the backlash compensation is activated the XPS controller adds a user defined BacklashValue to the TargetPosition to calculate a new target position whenever reversing the direction of motion This internally used new target position is then the basis for the calculations of the motion profiler No modification of the actual target is done Linear error compensation The linear error compensation helps to improve the accuracy of a motion device by eliminating linear error sources Linear errors can be caused by screw pitch errors linear increasing angular deviations abbe errors thermal effects or cosine errors angles between feedback device and direction of motion Linear error compensation is available with all positioners It s value is defined in the stages ini When set different than zero the encoder positions are compensated by this value Linear error compensation can be used in parallel to any othe
209. recise picture of this behavior which depends a lot on the response of the stage speed and acceleration versus motor voltage Methodology of Tuning PID 1 Adjust KFeedForwardVelocityOpenLoop to optimize the following of the speed at high speed 2 Close the loop using the same value for KFeedForwardVelocity set Kp increase it to minimize following errors until oscillations vibrations appears during motion decrease Kp to eliminate oscillations 3 Set Kd increase until oscillations vibrations appear during motion and decrease it to eliminate oscillations 4 Increase Ki to cancel static error and minimize settling time until appearance of overshoot oscillations Corrector PIPosition PIPosition corrector can be used with AnalogStepperPosition or AnalogPosition interface AnalogPosition interface is to be used with a driver having a position input example piezo driver AnalogStepperPosition interface is to be used with a driver having two sine and cosine current inputs constant voltage gives constant currents in motor windings so position is constant Posibon 4 XPSDocumentation V2 6 x 08 11 d 143 4 1 Calculations Driver Board ps amp Stage From Pe Limetation PID Corrector gt gt p Fitering amp To the driver the encoder Figure 58 Corrector PIPosition Parameters FeedForward e One feed forward in position No adjustable gain e When the system is used
210. rected For instance if a positioner or group of positioners is expected to have small following errors as is the case for small moves where overcoming static friction of the system is predominant then the Kp may need to be increased to produce sufficient output to the driver For larger moves the following errors are generally larger and require lower Kp values to produce the desired output Also note that for larger moves the kinetic friction of the system is generally much lower than static friction and would generally require less correction gain than Q gt Niewport 158 XPS Motion Tutorial 14 123 14 1 2 4 smaller moves However if Kp becomes too large the mechanical system may begin to overshoot encoder position gt SetpointPosition and at some point it may begin to oscillate becoming unstable if it does not have sufficient damping Kp cannot completely eliminate errors However since as the following error e approaches zero the proportional correction element Kp x e also approaches zero and results in some amount of steady state error For this reason other gain factors like Kd and Ki are required Derivative Term The Kd or derivative gain multiplies the differential between the previous and current following error by the derivative gain value Kd The result of this gain is to stabilize the transient response of a system and can also be thought of as electronic damping of the Kp The derivative
211. roupMoveAbsolute The types of data being collected are the Setpoint Position Current Velocity and Setpoint Acceleration for the positioner XY X A total of 5000 data sets is collected one data point every 10 servo cycles or one data point every 10 10000 s 0 001 s Example 2 Using the terminal screen of the XPS utility this example shows the sequence of functions to accomplish a time based data gathering started by function call GroupInitialize X GroupHomeSearch X GatheringConfigurationSet X X SetpointPosition X X FollowingError GatheringRun 5000 10 GroupMoveRelative X 10 GatheringStop GatheringStopAndSave In this example the gathering is started by function call The SetpointPosition and FollowingError of the positioner XY X are gathered at a rate of 1 kHz every 10 servo cycle 10 kHz servo cycle rate The data gathering is stopped after the relative move is completed The gathering will stop automatically once the number of points specified has been collected However data will not be saved automatically to a file The function GatheringStopAndSave has be to used to save the data to a file It is also possible to halt a data gathering at an event To do so define another event trigger and assign the action GatheringStop to that event Use another event trigger and assign the action GatheringRunAppend to continue with the gathering For details see chapter 11 0 Event Triggers Note The
212. rr Err w Err Err e Err 0 Err Err Err Ent Err T Err Err Err Err Err 0 Err Err Err Ert Err Figure 39 XYZ Mapping Files NOTE Error in X Y Z 0 must be 0 This value in the file corresponds to the HomePreset positions in the XY group reference A terminator must be added at end of each matrix To activate the XYZ mapping the mapping files must be in the admin config directory of the XPS controller and the following settings must be done in the system ini XPSDocumentation V2 6 x 08 11 XMappingFileName Name of the mapping file XMappingXLineNumber Total number of lines of each table including header XMappingYColumnNumber Total number of columns XMappingZDimNumber Number of successive tables XMappingMaxPositionError Maximum absolute error in that file Any value larger than the actual largest value in that file will be accepted as well YMappingFileName Name of the mapping file YMappingXLineNumber Total number of lines of each table including header YMapping YColumnNumber Total number of columns YMappingZDimNumber Number of successive tables YMappingMaxPositionError Maximum absolute error in that file Any value larger than the actual largest value in that file will be accepted as well CW Newport 112 XPS Motion Tutorial e ZMappingFileName Name of the mapping file e ZMappingXLineNumber Total number of lines of each table including header e
213. ry line segment the user must choose the X Y end point in that way that the angle discontinuity to the previous segment does not exceed the maximum allowed angle discontinuity The angle discontinuity is measured in degrees and is defined in the head of the trajectory data file In theory a trajectory can be defined only by straight lines if two adjacent line segments have an angle difference smaller than the allowed angle of discontinuity as shown in the Figure 26 Figure 26 Contouring with linear lines only In practice this is not recommended since each angle of discontinuity corresponds to an instantaneous velocity change on both axes which produces large accelerations This can result in a shock to the stages and an increase of the following error The larger the angle of discontinuity the larger the shock and the following error will be Special consideration must be given to both these effects when increasing the maximum discontinuity angle from its default value Define Lines A line element is defined by specifying the X Y ending point The element starting point is always the end point of the previous segment X Y Note that all line element positions are defined relative to the trajectory starting point 0 0 Figure 27 Line element to X Y position coordinates As described before when adding a new line element the user must make sure that the discontinuity angle between the new segment and the previous
214. ry second all bits on digital output on connector number 1 will be toggled Note 255 11111111 The event Timer is permanent In order to remove the event trigger use the function EventExtendedRemove with the associated event identifier 1 in this case C Newport yeeo ras 133 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 7 MultipleAxesPVTPulseOutputSet G1 2 20 1 GatheringConfigurationSet G1 P1 CurrentPosition EventExtendedConfigurationTriggerSet Always 0 0 0 0 G1 PVT TrajectoryPulse 0 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart MultipleAxesPVTExecution G1 Traj trj 1 In this example first the generation of an output pulse every one second between the 2 and the 20 element on the next PVT trajectory executed on the group G1 is defined function MultipleAxisPVTPulseOutputSet Then the data gathering is defined CurrentPosition of positioner G1 P1 Hence in this example with every trajectory pulse one data point is gathered and appended to the current gathering file in memory Here the concatenate of the event TrajectoryPulse with the permanent event Always makes sure that the event trigger is always active Without the event Always only one data point will be gathered This is because any event gets automatically removed when once happened and not happening anymore on the next servo or profiler cycle which is the case here as a pulse is only generated
215. s These factory tested drives are powered by an internal 500 W power supply which is independent of the controller power supply The XPS DRVO1 is a software configurable PWM amplifier that is compatible with most of Newport s and other companies DC brush and stepper motor positioners When used with Newport stages the configuration of the amplifier is easy using the auto configuration utility software Advanced users can also manually develop their own configuration files specifically optimized for each application The XPS DRVO1 motor driver supplies a maximum current of 3 Amps and 48 Volts It has the capability to drive bipolar stepper motors in microstep mode sine cosine commutation and DC brush motors in velocity mode for motors with tachometer or voltage mode for motors without tachometer Programmable gains and a programmable PWM switching frequency up to 300 kHz allow a very fine adjustment of the driver to the motor For added safety a programmable over current protection setting is also available The XPS DRV02 is a software configurable PWM amplifier for 3 phase brushless motors It has been optimized for performance with XM2000 and IMS LM linear motor stages The XPS DRV02 supplies a 100 kHz PWM output with a maximum output current of 5 A per phase and 44 Vpp The XPS DRVO2 requires 1 Vpp encoder input 7 XPSDocumentation V2 6 x 08 11 XPS User s Manual XPSDocumentation V2 6 x 08 11 2 3 signals
216. s a convenient way of generating simple executable TCL scripts These scripts may serve also as a good place to start for the development of more complex scripts The TCL generator is accessible from the terminal menu of the XPS web site Pressing the TCL generator button generates a TCL script that includes the commands previously executed and listed in the Command history list Note that the order in the TCL script is the same as executed and inverse to the order of the Command history list The name of the TCL script is History tcl and is stored in the Admin Public Scripts folder of the controller Example This is an example using three stages two of them in an XY group and one in a SingleAxis group The following functions were executed KillAllQ GroupInitialize S GroupInitialize XY GroupHomeSearch S GroupHomeSearch XY GroupMoveAbsolute S 70 GroupMoveAbsolute S 70 GPIODigitalSet GPIO3 DO 63 0 EventAdd XY X XYLineArc TrajectoryStart 0 DOSet GPIO3 DO 42 42 XYLineArcVerification XY Linearc2 trj XYLineArcExecution XY Linearc2 trj 10 70 1 History P Novo To execute the script use the function TCLScriptExecute History tcl task1 0 In this example after initializing and homing both groups the TCL script moves the single axis stage to the position 70 units then to the position 70 units It also sets the digital output GPIO3 to 0 Once checked the line arc trajectory defined in the Linearc2 trj
217. s are provided on the PCO connector see Appendix E PCO connector for details and pinning These signals are either output always Always configuration or only when the positioner is within a defined position window Windowed configuration When used with stages that feature a digital encoder AquadB the AquadB signals are the same as the encoder signals of the stage When used with SinCos encoders AnalogInterpolated the resolution of the AquadB signal is defined by the signal period of the encoder and the settings of the hardware interpolator by the function PositionerHardInterpolatorFactorSet Example XM stages feature an analog encoder with a signal period of 4 um With the setting PositionerHardInterpolatorFactorSet 200 the post quadrature resolution of the AquadB signals is 4 wm 200 0 02 yum In this case one full period of the AquadB signals equals 0 08 um The following functions are used to configure AquadB signals Positioner PositionCompareA quadBWindowedSet Positioner PositionCompareA quadB WindowedGet Positioner PositionCompareEnable Positioner PositionCompareA quad BAlwaysEnable Positioner PositionCompareDisable The function PositonerPositonCompareAquadBAlwaysEnable has only one input parameter the positioner name When sent AquadB signals are generated always To disable this mode use the function PositionerPositionCompareDisable The function PositonerPositonCompareAquadBWindowedSet has three input
218. s not a multiple of this resolution the pulses can be off from the ideal positions by a maximum half of this resolution Two signals are provided GPIO2 pin11 Window A constant 5 V signal is sent between the StartLength and the EndLength GPIOZ2 pin12 Pulse A 1 us pulse with 5 V peak voltage is sent every PathLengthInterval For details about the XPS I O connectors see appendix section 20 2 To define the StartLength EndLength and PathLengthInterval use the function XYLineArcPulseOutputSet Example XYLineArcPulseOutputSet XY 10 30 0 01 One pulse will be generated every 10 um on the next Line Arc Trajectory between 10 mm and 30 mm XYLineArcVerification XY Traj trj Loads and verifies the trajectory Traj trj XYLineArcExecution XY Traj trj 10 100 1 Executes the trajectory at a trajectory speed of 10 mm s and with a trajectory acceleration of 100 mm s one time Please note that the pulse output settings are automatically removed when the trajectory is over Hence with the execution of every new trajectory it is also required to define the pulse output settings again It is also possible to use the trajectory pulses and the pulse window state as events in the event triggers see section 11 0 Event Triggers for details This allows the gathering of data on a trajectory at constant length intervals Example XYLineArcPulseOutputSet XY 10 30 0 01 One pulse every 10 um will be generated on the L
219. s that stop on a sensor event moves of certain displacement and position counter reset actions e Sensor is the sensor used for those actions that stop on a sensor event It can be MechanicalZero MinusEndOfRun or None e Parameter is either a position or velocity value and provides further input to the function The following table summarizes all possible configurations XPSDocumentation V2 6 x 08 11 74 XPS Motion Tutorial 8 3 1 Move on sensor events The move on sensor events start a motion at a defined velocity latches the position when a State transition of a certain sensor is detected then stops the motion There are four possible actions under this category e LatchOnLowToHighTransition e LatchOnHighToLowTransition e LatchOnIndex e LatchOnIndexAfterSensorHighToLow With LatchOnLowToHighTransition and LatchOnHighToLowTransition latching happens when the right transition on the defined sensor occurs The sensor can be either MechanicalZero or MinusEndOfRun With LatchOnIndex and LatchOnIndexAfterSensorHighToLow the latching happens on the index signal With LatchOnIndexAfterSensorHighToLow the latching happens on the first index after a high to low transition on the defined sensor MechanicalZero or MinusEndOfRun Because of the dedicated hardware circuitries used for the position latch there is essentially no latency between sensor transition detection and position acquisition In all cases the moti
220. saturated causing the system to become unstable at the end of a move and cause the positioner to hunt or dither To reduce this effect two additional parameters are included in the PID corrector to help prevent these instabilities Ks and Integration Time Ks The saturation limit factor Ks permits users to limit the maximum value of Ki that is applied to the total PID corrector output The Ks saturation can be set between 0 and 1 a typical setting is 0 5 As an example at a setting of 0 5 the maximum output generated by the Ki term applied to the PID output would be 0 5 x the maximum set output However if the Ki gain factor output is less than 0 5 x the maximum set output then the entire gain will be applied to the PID corrector This maximum output is set within the section MotorDriverInterface in the stages ini using the parameters AccelerationLimit VelocityLimit or VoltageLimit Refer to the Programmers manual for more information on this function Integration Time The IntegrationTime is used to adjust the duration for integration of the residual errors This can help in applications where large following errors can occur during motion The 159 XPSDocumentation V2 6 x 08 11 Motion Tutorial XPSDocumentation V2 6 x 08 11 14 1 2 5 use of a small value of Integration Time will limit the integration range to the latter parts of the move avoiding the need of a large overshoot at the end of the move to clear the integra
221. separate encoder cable has to be connected to the appropriate connector of the control board labeled Encoder 1 to Encoder 8 Please note that the XPS controller will not detect cross connection errors between the motor of one stage and the encoder of another stage So please make sure that motor encoder and other cables are plugged to the appropriate axis CAUTION It is strongly recommended that the user read the section 3 4 System Setup before attempting to turn the controller or the motors on Serious damage could occur if the system is not properly configured All Newport ESP compatible stages are electrically and physically compatible with the XPS controller ESP compatible stages are visually identified with a blue ESP Compatible sticker on the stage If an ESP compatible motion system was purchased all necessary hardware to connect the stage with the XPS controller is included The stage connects to the XPS via a shielded custom cable that carries all power and control signals encoder limits and home signals The cable is terminated with a standard 25 pin D Sub connector Dummy stages might be used to simulate a stage They allow users to configure and test system behavior without real stages connected For a dummy stage use a male 25 pin D Sub connector with signals for and travel limit connected to ground and plug this device to the Newport stage interface see pinout description
222. sers Administrators have configurations rights Users have only restricted rights to use the system The following steps are needed to create a new user 1 Enter a new user name in the login field 2 Choose the access rights User or Admin 3 Check the box Reset PWD to XXXXXXKXX Your password is reset to XXXXXXXX 4 Select the VALID button to add the new access account NOTE The default password is XXXXXXXX and must be changed after the first log in XPSDocumentation V2 6 x 08 11 34 XPS Software Tools 4 3 CONTROLLER CONFIGURATION IP Management See chapter 3 5 for details GQ fuoeanseneg ror F persia cee O0 arm Ge 4 4 CONTROLLER CONFIGURATION General This screen provides valuable information about the firmware and the hardware of the controller It is an important screen for troubleshooting the controller o 2 orti ee Lett ua QD Newport 35 XPSDocumentation V2 6 x 08 11 Software Tools 4 5 XPSDocumentation V2 6 x 08 11 4 6 SYSTEM Error File Display The Error File Display is another important screen for troubleshooting the XPS controller When the XPS encountered any error during booting for instance because of an error in the configuration files or because the configuration is not compatible with the connected hardware you ll find some entries in the error log file that guides you to correct the error W
223. signed for use within certain voltage limits Low Voltage was designed and built in accordance with the following harmonised standards NF EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Part 1 General requirements NF EN 55011 2007 Class A NF EN 61000 3 2 2006 A1 2009 A2 2009 Electromagnetic compatibility EMC Part 3 2 Limits Limits for harmonic current emissions NF EN 61010 1 2001 Safety requirements for electrical equipment for measurement control and laboratory use Part 1 General requirements was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 NF EN 61000 4 11 Date 10 06 2011 Dominique DEVIDAL Quality Director MICRO CONTROLE Spectra Physics Zone Industrielle F 45340 Beaune La Rolande France XPSDocumentation V2 6 x 08 11 x XPS Universal High Performance Motion Controller Driver Preface Confidentiality amp Proprietary Rights Reservation of Title The Newport Programs and all materials furnished or produced in connection with them Related Materials contain trade secrets of Newport and are for use only in the manner expressly permitted Newport claims and reserves all rights and benefits afforded under law in the Programs provided by Newport Corporation Newport shall retain full ownership of Intel
224. sition is a simplified version of this loop that is used to provide closed loop positioning via encoder feedback to stepper motor positioners 157 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 14 1 2 1 14 1 2 2 XPSDocumentation V2 6 x 08 11 PID Corrector Architecture The PID corrector uses the following error SetpointPosition EncoderPosition as its input and applies the sum of three correction terms Kp Kd and Ki to determine the output SetPoint x Position _ Encoder OUT _ Position _ x x X KForm GKP 1 E TargetPosition EncoderPosition KForm O gh gt Kb X SY dt 9 Low pass filter Derivative filter cut off frequency KForm GKD 1 TargetPosition EncoderPosition KForm Hit ot KTX gt meg aton line Lear 2 Saturation at KS x Limit KI KForm GKI41 TargetPosition EncoderPosition KForm Figure 52 PID Corrector Architecture Proportional Term The Kp or proportional gain multiplies the current following error of that servo cycle by the proportional gain value Kp The effect is to react immediately to the following error and attempt to correct it Changes in position generally occur during commanded acceleration deceleration and in moves where velocity changes occur in the system dynamics during motion As Kp is increased the PID corrector will respond with a increased output and the error is more quickly cor
225. sitioner of a gantry append SecondaryPositioner to the positioner name Example PositionerName SecondaryPositioner FollowingError For details about gantry configurations see chapter 4 8 It is possible to start the gathering either by function call or at an event The following sequence of functions is used for a time based data gathering started by function call GatheringConfigurationSet GatheringRun The following sequence of functions is used to start a time based data gathering at an event GatheringConfigurationSet EventExtendedConfigurationTriggerSet EventExtendedConfiguration ActionSet EventExtendedStart A function which triggers the action for instance a GroupMoveRelative When all data is gathered use the function Gathering StopAndSave to save the data from the buffer to the flash disk of the XPS controller QD Newport 137 XPSDocumentation V2 6 x 08 11 Motion Tutorial Step 1 Select the positioner name and click Creme tim em gaemernt e Cotherteng eatqer et li te XPSDocumentation V2 6 x 08 11 Other functions associated with internal Gathering are GatheringConfigurationGet GatheringCurrentNumberGet GatheringDataGet GatheringDataMultipleLinesGet GatheringStop GatheringRunA ppend See Programmer s Manual for details on functions NOTE When using the function GatheringConfigurationSet from the terminal screen of the XPS utility the syntax for one paramete
226. sitionerName LatchOnLowToHighTransition MechanicalZero 5 GroupReferencingActionExecute PositionerName LatchOnIndexAfterSensorHighToLow MechanicalZero 5 GroupReferencingActionExecute PositionerName MoveToPreviouslyLatchedPosition None 5 GroupReferencingActionExecute PositionerName SetPositionToHomepreset None 0 GroupReferencingStop GroupName 84 Move A move is a point to point motion On execution of a move command the motion device moves from a current position to a desired destination absolute move or by a defined increment relative move During the motion the controller is monitoring the feedback of the positioner and is updating the output based upon the following error The XPS controller s position servo is being updated at 10 kHz and the profile generator at 2 5 kHz providing highly accurate closed loop positioning Between profiler and corrector there is a time based linear interpolation to accommodate for the different frequencies There are two types of moves that can be commanded an absolute move and a relative move For an absolute move the positioner will move relative to the HomePreset position as defined in the stages ini file In most cases the HomePreset is 0 which makes the home position equal to the 0 position of the positioner For a relative move the positioner will move relative to the current TargetPosition In relative moves it is possible to make su
227. so commanded to the positioner and not to the group In the previous example the function GroupMoveAbort ScanTable ScanAxis is rejected for a motion that has been launched with GroupMoveRelative ScanTable 100 50 If you want to stop this motion you need to send the function GroupMoveAbort ScanTable With XPS firmware 1 5 0 and higher the XPS controller supports also asynchronous moves of several positioners belonging to the same motion group The individual motion however need to be managed by separate threads see also section 16 4 for details Motion Done The XPS controller supports two methods to define when a motion is completed MotionDone The theoretical MotionDone and the VelocityAndPositionWindow MotionDone The preferred method for MotionDone used is set up in the stages ini file In theory MotionDone is when motion is completed as defined by the profiler It does not take into account the settling of the positioner at the end of the move So depending on the precision and stability requirements at the end of the move the theoretical MotionDone might not always be the same as the physical end of the motion The VelocityAndPositonWindow MotionDone allows a more precise definition by C amp gt Newport 78 XPS Motion Tutorial specifying the end of the move with a number of parameters that take the settling of the positioner into account In the VelocityAndPositionWindow MotionDone the motion is completed when
228. stages ini file The default values are 0 for all stages EncoderSinusOffset 0 volts EncoderCosinusOffset 0 volts EncoderDifferentialGain 0 EncoderPhaseCompensation 0 deg The function GroupInitializeWithEncoderCalibration initializes the positioner and runs the encoder calibration process During calibration the stage moves for 25 EncoderScalePitch and the controller determine the appropriate calibration values The controller though will not automatically apply these values The function PositionerEncoderCalibrationParametersGet returns the results of the last encoder calibration To apply these values add them manually to the appropriate section in the stages ini file and reboot the controller In the folder Admin Public Drivers LabView XPS C8 of the XPS controller embedded in Examples llb there is a LabView application to display the current analog encoder values The display zone matches the maximum possible amplitude of the analog signals When they are larger than this the AD converter will clip and the interpolation error will increase dramatically The dotted circle represents the 1 volt peak to peak ideal encoder the red circle represents the current mean encoder settings and the green dot the current encoder value This application uses the function PositionerEncoderAmplitudeValuesGet for display C Newport yeeo ras 169 XPSDocumentation V2 6 x 08 11 Motion Tutorial XPSDocumentatio
229. stance Spaced Pulses PCO Position Compare Output In the distance spaced pulse configuration one first output pulse is generated when the positioner enters the defined position window This is independent of the positioner entering the window from the minimum position or from the maximum position From this first pulse position a new pulse is generated at every position step until the stage exits the window NOTE To make sure that the trigger pulses are always at the same positions independent of the positioner entering the window from the minimum or from the maximum window position the difference between the minimum and the maximum window position should be an integer multiple of the position step The duration of the trigger pulse is 200 nsec by default and can be modified using the function Positioner PositionComparePulseParametersSet PositionerName PCOPulseWidth EncoderSettlingTime Possible values for PCOPulseWidth are 0 2 default 1 2 5 and 10 us Please note that only the falling edge of the trigger pulse is precise and only this edge should be used for synchronization irrespactable from the PCOPulseWidth setting Note also that the duration of the pulse detected by your electronics may be longer depending on the time constant of your RC circuit Successive trigger pulses should have a minimum time lag equivalent to the PCOPulseWidth time times two 144 XPS Motion Tutorial The second parameter EncoderSett
230. stom home search and system recovery processes It should only be used by experienced users A number of hardware solutions may be used to determine the position of a motion device The most common are incremental encoders these are the ones supported by XPS By definition these encoders can only measure relative position changes and not absolute positions The controller keeps track of position changes by incrementing or decrementing a dedicated counter according to the information received from the encoder Since there is no absolute position information position zero is where the controller was powered on and the position counter was reset To determine an absolute position the controller must find a reference position that is unique to the entire travel called a home switch or origin switch An important requirement is that this switch must have the same accuracy as the encoder pulses If the motion device uses a linear scale as a position encoder the home switch is usually placed on the same scale and read with the same accuracy If on the other hand a rotary encoder is used homing becomes more complicated To have the same accuracy a mark on the encoder disk could be used called index pulse but because the mark repeats every revolution it does not define a unique point over the entire travel An origin switch on the other hand placed in the travel of the motion device is unique but typically is not accurate or repea
231. t Ce Shes Com n rotix stor ane ether corrected ima 3 Highlight Internet Protocol TCP IP and click on Properties 4 Type the following IP address and Subnet Mask as shown in the next window 21 XPSDocumentation V2 6 x 08 11 User s Manual XPSDocumentation V2 6 x 08 11 n tan get eatery erre afore aly you retreat oper Pu capote Perae a reed et poy eteri An a ho te omase IN trg Obten an iP agere autor ah Une te hiser IP ade abbr iret mat Deins gerwa 5 Click OK NOTE The last number of the IP address can be set to any number between 2 to 253 100 in this example NOTE When configuring the controller to be on the network the settings for the PC s Ethernet card will have to be set back to default which is Obtain an IP address automatically Once the Ethernet card address is set you are ready to connect to the XPS controller Following is the procedure for connecting to the controller 6 Open Internet Browser and connect to http 192 168 254 254 Login Name Administrator Password Administrator Please see the picture below Rights Administrator NOTE Please note that the login is case sensitive C amp gt Newport 22 XPS User s Manual Mev port larene Lt are Motion Comrelier Orever KPS C9 eeemseeewenes Once you are logged you can change the IP configuration by following the steps described in section 3
232. t ScanTable Pos1 Pos2 will return 0 to Posl and 0 to Pos2 assuming PresetHome 0 GroupPositionCurrentGet FocusStage Pos3 Will return 0 to Pos3 assuming HomePreset 0 GroupMoveAbsolute ScanTable 100 50 GroupMoveAbsolute ScanTable StepAxis 20 The second move is only for one positioner of that group and can be only executed after the first move is completed After all moves are completed GroupPositionCurrentGet ScanTable Pos1 Pos2 will return 100 to Posl and 20 to Pos2 GroupMoveRelative FocusStage 1 GroupMoveRelative FocusStage 1 The second move can be only executed after the first move is completed After all moves are completed GroupPositionCurrentGet FocusStage Pos3 Will return 2 to Pos3 The velocity acceleration and jerk time parameters of a move are defined by the function PositionerSGammaParametersSet see also section 8 1 When the controller receives new values for these parameters during the execution of a move it will not take these new values into account on the current move but only on the next following moves When wanting to change the velocity or acceleration of a positioner during the motion use the Jogging mode see section 8 5 A move can be stopped at any time with the function GroupMoveAbort that accepts GroupNames and Positionernames It is important to note however that the function GroupMoveAbort PositionerNames gets accepted when the motion has been al
233. t Panel of XPS Controller Driver The XPS RC Remote Control plugs into the front panel of the XPS controller to enable computer independent motion and basic system diagnostic For more information refer to the XPS data sheet and the manual that is supplied with the XPS RC QD Newport XPSDocumentation V2 6 x 08 11 XPS User s Manual 2 6 Rear Panel Description GPIO4 Trigger in GPI03 8 x Heidenhain Male Sub 037 Male Sub D9 Sub D15 1 Vpp encoder input GP101 Female Sub 037 Power ON OFF A a Base T ACIN ei ma l Ethernet 10 10 Gra Base T Female Sub D25 8 x Newport INHIBIT Input 8 x Position stage interface Female Sub D15 compare out 4 Female LEMO Connectors Figure 8 Rear Panel of XPS Controller Driver NOTE The Main Power ON OFF Switch is located above the inlet for the power cord The switch and the inlet must remain accessible to the user 2 6 1 Axis Connectors AXIS 1 AXIS 8 Each installed axis driver card features a connector to attach a cable between the controller and a motion device CAUTION Carefully read the labels on the driver cards and make sure the specifications motor type voltage current etc match those for the motion devices you intend to connect Serious damage could occur if a stage is connected to the wrong driver card QD Newport XPSDocumentation V2 6 x 08 11 10 XPS User s Manual Figure 9 Axis Driver Card Please see next sec
234. t triggers XPSDocumentation V2 6 x 08 11 EventExtendedConfigurationTriggerSet This function configures one or several events In case of several events the different events are separated by a comma in the argument list Before activating an event one or several actions must be configured with the function EventExtendedConfigurationActionSet Only then the event and the associated action s can get activated with the function EventExtendedStart EventExtendedConfigurationTriggerGet This function returns the event configuration defined by the last EventExtendedConfigurationTriggerSet function EventExtendedConfigurationActionSet This function associates an action to the event defined by the last EventExtendedConfigurationTriggerSet function EventExtendedConfigurationActionGet This function returns the action configuration defined by the last EventExtendedConfigurationActionSet function EventExtendedStart This function launches activates the last configured event and the associated action s defined by the last EventExtendedConfigurationTriggerSet and EventExtendedConfigurationActionSet and returns an event identifier When activated the XPS controller checks for the event each servo cycle or each profiler cycle for those events that are motion related and triggers the action when the event occurs Hence the maximum latency between the event and the action is equal to the servo cycle time of
235. tExtendedConfigurationTriggerSet or EventExtendedConfigurationActionSet from the terminal screen of the XPS utility the syntax for one parameter is not directly accessible For instance for the event XY X SGamma MotionStart first select XY X from the choice list Then click on the choice field again and select SGammaMotionStart See also screen shots below For specifying more than one data type use the ADD button Select the next parameter as described above Q gt Newport XPSDocumentation V2 6 x 08 11 134 Motion Tutorial Step 1 Step 2 Select the positioner name and click Premi Tina argernmet s Puoatt stented sost lt moro eoma o ferte orthome te tendo eo thrre iti Caa mart Tock Pet TARTE E taas mte ts Due 5 part conie cl aye pwertacrme t seteme rua ees cul arie Quo ns mere Da ace wince Ord l eet Shoe i ove eee e i ose QD Newport Click in the choice field again and select the parameter name Pam hae erperentie toesti stende seel 135 Step 3 Define event parameters To add another event click ADD else click OK Pom Team a guenesit 0 Poeti ctondodi artager ehen I yor det rogo e euro Tartufi edeme 12 oe epruno v fe rina C f to lito ao a Cte ameno gt oe seat e nere Co b Comte armena XPSDocumentation V2 6 x 08 11 Motion Tutorial 12 0 Data Gathering XPSDocumentation V2 6 x 08 11
236. tPositionAsHome in the stages ini and reboot the XPS controller GroupInitialize SlaveGroup GroupHomeSearch SlaveGroup GroupInitialize MasterGroup SingleA xisSlaveParametersSet SlaveGroup MasterGroup Positioner Ratio SingleA xisSlaveModeEnable SlaveGroup GroupHomeSearch MasterGroup GroupMoveRelative MasterGroup Positioner Displacement NOTE The slave positioners should have similar capabilities as the master positioner in terms of velocity and acceleration Otherwise you might not be able to use the full capabilities of the master or the slave positioners Analog Tracking Analog tracking allows the control of the position or velocity of a motion group via external analog inputs Analog tracking is available with all motion groups To enable this mode first set the tracking parameters of the positioners belonging to that motion group Then enable tracking while the motion group is homed in ready state after homing In analog tracking mode the analog inputs are filtered by a first order low pass filter Its cut off frequency is defined by the parameter Tracking CutOffFrequency given in the section profiler of the stage ini parameter file 82 XPS Motion Tutorial CW Newport To set or get the tracking parameters use the following functions Positioner Analog Tracking PositionParametersSet Positioner Analog Tracking PositionParametersGet Positioner AnalogTracking Velocity Param
237. table enough The solution is to use both in a dedicated search algorithm as follows Figure 18 Home Origin Switch and Encoder Index Pulse A Home switch Figure 18 separates the entire travel in two areas one has a high level and the other has a low level The most important part is the transition between the two 71 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial areas Just looking to the origin switch level the controller knows already on which side of the transition the positioner is and which direction to move The task of the home search process is to identify one unique index pulse as the absolute position reference This is first done by finding the home switch transition and then the very first index pulse Figure 19 0 E Encoder n s Pulte Figure 19 Slow Speed Origin Switch Search Labeling the two motion segments D and E the controller is searching for the origin switch transition in D and searching for the index pulse in E To guarantee the best accuracy possible both D and E segments must perform at a very low speed and without stopping in between The homing process described has a drawback At low search speeds the process could take a very long time if the positioner happens to start from the one end of travel To speed things up the positioner is moved fast until it is in the vicinity of the origin switch and then performs the two slow motions D and E at half the home search velocity
238. tation V2 6 x 08 11 26 XPS User s Manual Cee en S Click Initialize The State number changes from 0 to 42 and the Action button changes from Initialize to Home Click Home The stage starts moving to find its reference position When done the state number is 11 and the action button changes to Disable Enter an allowed position value in the Abs move 1 field and click Go The stage moves to this absolute position Your system is now ready to use For more advanced functions please proceed reading the rest of this manual NOTE In AUTO CONFIGURATION the default group is set as SingleAxis To set the positioners to a different group type use manual configuration C amp gt Newport 27 XPSDocumentation V2 6 x 08 11 User s Manual XPSDocumentation V2 6 x 08 11 Manual Configuration for Newport Positioners The manual configuration provides users access to all capabilities of the XPS controller For a manual configuration first users need to build their personal stage data base using the web tool Add from Database under the main tag STAGE When adding a new stage from this web tool the controller copies the parameters from its internal database which contains parameters for all Newport stages and stores these parameters in a file called stages ini Hence the stages ini file contains the parameters for only a subset of stages as defined by the user Users can assign a
239. tcccscetecenag ia io nni 61 64 Updating the Firmware Version of Your XPS Controller eee eseseeseceeeeeseeeeseeeeseeeeees 62 Motion Tutorial 7 0 XPS A POMC COUR sci ra tr Tl Introducton aaa deals dna long lina ioni nananana 63 LZ State Diagramsat io E i e a E a i oa i RA guai i a 64 63 Motlon Groups L ala iii lalla 66 7 3 1 Specific SingleAxis Group Features eee eeseeeeeesseeeeseeeeseeeeseeecseeeeeeaenees 67 7 3 2 Specific Spindle Group Features i 67 7 33 Specific XY Group Features 67 7 34 Specific XYZ Group Features i 67 7 3 5 Specific MultipleAxes Features ii 67 I a Native UDS oraa EE aiar tiara 67 8 0 Motioli ia snai OF S L MOtiOW PrO ES a igienico 69 824 GHOME Searching ala 71 8 3 Referencing S tate A E A la Ve ui ci Ue OEE EE E ile REE 74 8 3 1 Move On Sensor events ane tion a aa E E EE EE E EEEE 75 8 3 2 Moves of Certain Displacement i 75 8 3 3 Position Counter Resets siicc iconica rana 76 SSA State Diastase 76 8 3 5 Example MechanicalZeroAndIndexHomeSearch eseeeeseeecreeeeseeeeeees 77 CX Newport v XPSDocumentation V2 6 x 08 11 XPS Universal High Performance Motion Controller Driver 84 8 5 8 6 8 7 8 8 MOV a ai ilo 77 Motion Done cesses el ile i ei ahd lei alice ia il 78 OG are pe Reece nl ellerre i in li dll ci lano 80 Master Slaves Ni Sua a ali lied ib i ali at 81 Analog T
240. tch off the controller Make sure that the standard CAT 5 network cable black is connected to the HOST of the XPS controller and to your network After restarting the controller open the internet browser and connect using your controller name You may skip to section 3 7 Connecting the Stages Q gt Newport XPSDocumentation V2 6 x 08 11 20 User s Manual cH Newport NOTE Do not use Dynamic IP configuration if your DHCP server uses Windows NT 4 0 server 3 5 6 Recovering lost IP configuration If you want to recover a lost IP configuration you need to connect directly the PC to the REMOTE connector at the back of the XPS mainframe with the gray cross over cable Figure 15 Direct Connection to the XPS using cross over cable and REMOTE connector First the IP address on the PC s Ethernet card has to be set to match the XPS s fixed IP address for the REMOTE plug 192 168 254 254 Here is the procedure to set the Ethernet card address This procedure is for the Windows XP operating system 1 Start Button gt Control Panel gt Network Connections 2 Right Click on Local Area Connection Icon and select Properties Comi Aperto Advent Correct rg gt Ka RST baei Pere Adera flere Cempe The cre ter ue Pa kdg tomer A T Cere te Merasa Hamme A f od Pete A Masao Nemat 1 Turena arti Pictur al rta Pardon ci The Stat ie wea r poa Hat po Commer ater ace Svene rewcerrected retes
241. ted following error value The drawback is that the static error will be less compensated Variable Gains In addition to the classical Kp Ki and Kd gain parameters the XPS PID Corrector Loop also includes variable gain factors GKp GKd and GKi These can be used to reduce settling time on systems that have nonlinear behavior or to tighten the control loop during the final segment of a move For example a positioner or stage with a high level of friction will have a response which is dependent on the size of the move friction is negligible for a large move but becomes a predominant factor for small moves For this reason the required response of the system to reach the commanded position is not the same for small and large moves The optimum value of PID parameters for small moves is very often higher then the optimum value for large moves It is advantageous to modify PID settings depending on the move size For users that do not need to make PID corrector adjustments or prefer not to benefit from the compensations provided by the variable gain correctors This compensation is made automatically by the XPS variable gain corrector by applying a gain that is driven by the distance between the Target Position position that must be reached at the end of the motion and the Encoder Position As shown in the figure below when the distance to move completion is large the total output gain from these parameters is fractional the Kform term is
242. tendedStart The data gathering starts when the value of the GPIO2 ADCI exceeds 5 Volts One set of data will be gathered each servo cycle or every 100 ys as the event is checked each servo cycle The data gathering automatically stops when the value of the GPIO2 ADCI falls below 5V again as the event is automatically removed then see chapter 11 0 Event Triggers for details Example 2 TimerSet Timer1 10 XPSDocumentation V2 6 x 08 11 140 XPS Motion Tutorial Sets the timer I to 10 servo ticks means every I ms GatheringReset Deletes gathering buffer GatheringConfigurationSet XY X CurrentPosition XY Y CurrentPosition GPIO2 ADC1 The 3 data XY X CurrentPosition XY Y CurrentPosition and GPIO2 ADCI will be gathered EventExtendedConfigurationTriggerSet Timer1 0 0 0 0 GPIO2 ADC1 ADCHighLimit 5 0 0 0 EventExtendedConfigurationActionSet GatheringOneData 0 0 0 0 EventExtendedStart Different than the previous example here the event ADCHighLimit is linked to the event Timerl This has two effects First the event gets permanent as the event timer is permanent Second one set of data is gathered only every 10 ms combination of events must be true For details on the event definition please see chapter 11 0 Event Triggers As a result in this example one set of data is gathered every 10 ms whenever the value of the GPIO2 ADCI exceeds 5 Volts Example 3 TimerSet Timer1 10 Sets the timer I to 10 serv
243. th the end point equal to the starting point fwrtTangect 0 Degrees DiscontrmuatyAngie 001 Degrees F Aris gt K Axis Figure 29 Graphical display of the first line arc trajectory data file example 89 XPSDocumentation V2 6 x 08 11 Motion Tutorial 9 1 9 XPSDocumentation V2 6 x 08 11 The following is an example of a trajectory file that represents a rectangle with rounded corners and with the end point equal to the starting point Foulengent Degrees OncommmutyAnge 00 Degrees Arc 10 90 Une 66 16 Arc 10 180 Line 40 8 Arc 10 180 Une 60 50 Arc 18 59 Line 75 35 Ae 18 90 Une 60 50 Arc 5 180 Une 60 40 Arc 5360 m 40 0 Arc 5 180 Une 60 20 Are 5 180 une 40 10 Arc 10 180 10 10 Are 10 50 F 8 w ac hi 20 5 K Aan Figure 30 Graphical display of the second line arc trajectory data file example Trajectory Verification and Execution To verify and execute a line arc trajectory there are four functions XYLineArcVerification Verifies a line arc trajectory data file XYLineArcVerificationResultGet Returns the last trajectory verification results actuator by actuator This function works only after a XYLineArcVerification XYLineArcExecution Executes a trajectory XYLineArcParametersGet Gets the trajectory s current execution parameters This function works only during the execution of the
244. the sole use of the event ConstantVelocityState An action is entirely composed by Actor Action Name Parameter1 Parameter2 Parameter3 Parameter4 Not all action names have a preceding actor but all actions have four parameters Even though not all actions have a specific meaning for all four parameters it is still required to have a zero 0 as default To define an action use the function EventExtendedConfigurationA ctionSet Example EventExtendedConfigurationActionSet GPIO1 DO DOToggled 4 0 0 0 QD Newport 125 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial In this case the actor is the digital output GPIO1 DO and the action is to toggle the output The mask 4 refers to bit 3 00000100 Hence this action toggles the value of bit 3 on the digital output GPIO DO EventExtendedConfigurationActionSet ExecuteTCLScript Example tcl 1 0 0 The action ExecuteTCLScript has no preceding actor This action will start the execution of the TCL script Example tcl The task name is 1 and the TCL script has no arguments a zero for the third parameter means no arguments EventExtendedConfigurationActionSet GatheringRun 1000 10 0 0 The action GatheringRun has no preceding actor This action will start an internal data gathering It will gather a total of 1000 data points one data point every 10th servo cycle means one data point every 10 10000 s 1 ms It is also possible to trigger several actions at the
245. time as applicable as long as the event occurs For events with duration the event can be also considered as a statement that is checked whether it is true or not A third event category are the permanent events Always always happens and Timer happens every nth servo cycle They will trigger the action always on every nth servo cycle As the XPS controller provides the utmost flexibility on programming event triggers the user must be careful and consider possible unwanted effects Some events might have duration although only one single action is asked Some other events might never occur This is especially true when linking several events to an event configuration The different possible effects get illustrated in section 11 3 by some examples To trigger an action with an event first the event and the associated action need to get configured using the functions EventExtendedConfigurationTriggerSet and EventExtendedConfigurationActionSet Then the event trigger needs to get activated using the function EventExtendedStart When activated the XPS controller checks for the event each servo cycle or each profiler cycle for those events that are motion related and triggers the action when the event happens Hence the maximum latency between the event and the action is equal to the servo cycle time of 100 ys or equal to the profiler cycle time of 400 ys For events with duration it means also that the same action is triggered
246. tion please refer to section 4 8 When all positioners are configured click on VALID to confirm the group configuration Bpsiem Ged Pendle Ade Wy EV Groep feta Mee tee Prodnaner ande i Niewport XPS Software Tools 4 When the configuration of each positioner is validated the new group gets listed in the New system build window GO SS dir gt n o tjm 9m ne Peru rea Moro tao cor da e tom 5 Continue the same way with all other motion group When done click on Create new system ini file to apply the new configuration NOTE Create new system ini file deletes the current system ini file To keep a copy of the current system ini file get a copy from the admin config folder of the XPS controller The following screen appears Saag y A See eo ee a poed oc e an lio t a Click on OK 6 When the controller has finished booting hear second beep after 1 2 minutes select SYSTEM tag then Error File Display When there is no entry in the error file your system is configured correctly and ready to use When not this file provides some valuable information for trouble shooting see also chapter 4 5 This is an example of a system ini file with one XY group and one Spindle group GENERAL BootScriptFileName BootScriptArguments GROUPS SingleAxisInUse SpindlelnUse Spin XYInUse My_XY_Group XYZlInUse
247. tion V2 6 x 08 11 User s Manual XPSDocumentation V2 6 x 08 11 1 3 14 Warnings and Cautions The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Situation has the potential to cause bodily harm or death CAUTION Situation has the potential to cause damage to property or equipment NOTE Additional information the user or operator should consider General Warnings and Cautions The following general safety precautions must be observed during all phases of operation of this equipment Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the equipment e Heed all warnings on the unit and in the operating instructions e To prevent damage to the equipment read the instructions in this manual for selection of the proper input voltage e Only plug the Controller Driver unit into a grounded power outlet e Assure that the equipment is properly grounded to earth ground through the grounding lead of the AC power connector e Route power cords and cables where they are not likely to be damaged e The system must be installed in such a way that power switch and power inlet remains accessible to the user
248. tion for installation instructions NOTE Power Input 100 240 V 50 60 Hz 11 A 5 5 A 2 7 Ethernet Configuration ETHERNET INTRANET or INTERNET gt ETHERNET Figure 10 Ethernet Configuration 2 7 1 Communication Protocols The Ethernet is a local area network through which information is transferred in units known as packets Communication protocols are necessary to dictate how these packets are sent and received The XPS Controller Driver supports the industry standard protocol TCP IP TCP IP is a connection protocol The master must be connected to the slave in order to begin communication Each packet sent is acknowledged when received If no acknowledgment is received the information is assumed lost and is resent QD Newport ee 11 XPSDocumentation V2 6 x 08 11 XPS User s Manual 2 7 2 2 8 Socket IDI Addressing There are two levels of addresses that define Ethernet devices The first is the MAC address This is a unique and permanent 6 byte number No other device will have the same MAC address The second level of addressing is the IP address This is a 32 bit or 4 byte number The IP address is constrained by each local network and must be assigned locally Assigning an IP address to the controller can be done in a number of ways see section 3 5 Connecting to the XPS Sockets Multitasking and Multi user Applications Based on the TCP IP Internet communication pro
249. to a multiple of encoder steps The TargetPosition SetpointPosition CurrentPositon and FollowingError can be queried from the controller using the appropriate function calls 68 XPS Motion Tutorial 8 0 Motion 8 1 Motion Profiles When talking about motion commands we refer to certain strings sent to a motion controller that will initiate a certain action usually a motion The XPS controller provides several modes of positioning from simple point to point motion to the most complex trajectories On execution of a motion command the positioner moves from the current position to the desired destination The exact trajectory for the motion is calculated by a motion profiler So the motion profiler defines where each of the positioners should be at each point in time There are specifics worth mentioning on the motion profiler used by the XPS controller In a classical trapezoidal motion profiler trapezoidal velocity profile the acceleration is an abrupt change This sudden change in acceleration can cause mechanical resonance in a dynamic system In order to eliminate the high frequency portion of the excitation spectrum generated by a conventional trapezoidal velocity motion profile the XPS controller uses a sophisticated SGamma motion profile Figure 1 shows the acceleration velocity and position plot for the SGamma profile Jers Vesco 1000 1 n se Jere Time g 6 la r 5 55 1000 d 03 Tone a Tone Cu
250. to reach the TargetPosition The Kd parameter is generally redundant when using the speed loop of the driver and is usually set to zero but a higher value can be used to improve the tightness of the speed loop The proportional gain Kp drives the cut off frequency of the closed loop Due to the integration of the speed command in a position by the encoder the overall gain of the proportional path at a given frequency Frq is equal to Kp 2xFrq This gain is equal to 1 at Frq P Kp 2z close to the cut off frequency This frequency must remain lower than the cut off frequency of the speed loop of the driver and lower than the mechanic s natural frequencies to maintain stability The integral gain Ki drives the capability of the closed loop to overcome perturbations and to limit static error Due to the integration of the speed command in a position by the stage encoder the overall gain of the integral path at a given frequency Frq is Ki Gain _ __ 20 rq This gain is equal to one at Frql 1 FrqI 0vKi rq a VKi This frequency FrqI must typically remain lower than the frequency FrqP of the proportional path to keep the stability of the servo loop 162 XPS Motion Tutorial 143 13 Methodology of Tuning PID 1 Verify the speed in open loop adjustment done using ScalingVelocity 2 Close the loop set Kp increase it to minimize following errors to the level until oscillations vibrations st
251. tocol the XPS controller has a high number of virtual communication ports known as sockets To establish communication the user must first request a socket id from the XPS controller server listening at a defined IP number and port number When sending a function to a socket the controller will always reply with a completion or error message to the socket that has requested the action The concept and application of sockets has many advantages First users can split their application into different segments that run independently on different threads or even on different computers To illustrate this see below Op nSocket SocketiID OpenSocket For i I to nbpos Zerror ReadAFSensor GoalePosition 1 erroreGroupMoveRelative Socket1D2 Z Zerror erroreGroupMoveAbsolute SocketID 1 XY goal if erroreQOK than TakePicture Next 2 9 XPSDocumentation V2 6 x 08 11 In this example a thread on socket 1 commands an xy stage to move to certain positions to take pictures while another thread on socket 2 manages independently and concurrently an auto focusing system The second task could even be run on a different PC than the first task yet be simultaneously executed within the XPS Alternatively if the auto focusing system is providing an analog feedback this task could have been also implemented as a TCL script within the XPS see next topic Second the concept of sockets has another practical advantage for man
252. ton is Disable Enter an allowed position value in the Abs move 1 field and click Go The stage moves to this absolute position Q gt Niewport 31 XPSDocumentation V2 6 x 08 11 XPS User s Manual 3 9 XPSDocumentation V2 6 x 08 11 Your system is now ready to use For more advanced functions please proceed reading the rest of this manual Manual Configuration for stages not made by Newport For configuring the XPS controller to stages or positioning devices not made by Newport use the tool Add Custom Stage under the main tag STAGE For detailed information about this tool please refer to the document ConfigurationWizard pdf provided under the main tag DOCUMENTATION System Shut Down To shut down the system entirely perform the following procedure Wait for the stage s to complete their moves and come to a stop Turn off the power see power switch above the power cord at the back of the controller 32 XPS Software Tools Software Tools 4 0 Software Tools 4 1 Software Tools Overview The XPS software tools provide users a convenient access to the most common features and functions of the XPS controller All software tools are implemented as a web interface The advantage of a web interface is that it is independent from the user s operating system and doesn t require any specific software on the host PC There are two options to log in to the XPS controller As User
253. trajectory The function XYLineArcVerification can be executed at any time and is independent from the trajectory execution This function performs the following Checks the trajectory file for data coherence Calculates the trajectory limits which are the required travel per positioner the maximum possible trajectory velocity and the maximum possible trajectory acceleration This function helps define the parameters for the trajectory execution If all is OK it returns an OK 0 Otherwise it returns a corresponding error The function XYLineArcVerificationResultGet can be executed only after a XYLineArcVerification and returns the following Travel requirement in positive and negative direction for each positioner The maximum possible trajectory velocity speed that is compatible with all positioner velocity parameters It returns a value for the trajectory velocity that when applied at least one of the positioners will reach its maximum allowed speed at least once along the trajectory So the returned value varies between Min V max_actuator and Square Root Summ V max_actuator Y However this value does not take into account that the positioners acceleration can also limit the trajectory velocity For example the case of a line arc trajectory containing arc segments with a small radius The maximum possible trajectory acceleration that is compatible with all positioner parameters At a trajectory accelerati
254. tual event and does not work with events that have duration Action Parameter 1 NbPoints This parameter defines the number of data acquisitions NbPoints multiplied with the number of gathered data types must be smaller than 1 000 000 For instance if 4 types of data are collected NbPoints can not be larger than 250 000 4 250 000 1 000 000 Action Parameter 2 Divisor This parameter defines the frequency for the gathering in relation to the servo frequency of the system 10 kHz This parameter has to be an integer and greater or equal to 1 For instance if the parameter is set to 10 then the gathering will take place every 10 servo cycle or at a rate of 1 kHz 10 kHz 10 or at every 1 msec Action Parameter 3 and 4 These parameters must be 0 by default GatheringRunAppend This action continues a gathering previously stopped with the action GatheringStop see next action Action parameter 1 to 4 These parameters must be 0 by default GatheringStop This action halts a data gathering previously launched by the action GatheringStart Use the action GatheringRunAppend to continue the data gathering Please note that the action GatheringStop does not automatically store the gathered data from the buffer to the flash disk of the controller For doing so please use the function GatheringStopAndSave For more details about data gathering please refer to chapter 12 Data Gathering Action parameter 1 to 4 Thes
255. u want to modify Parameters that require quite common changes are the minimum and the maximum target position of a rotation stage For example to enable larger rotations of a rotation stage that is not configured as a Spindle set the maximum target position to a very high value and the minimum target position to a very low value In this case it is also required to disable the limit switches of the rotation stage see stage manual for details OPO rara cu a 2 gt pmm n w Oe 3 When done click Save to apply the new values else click Cancel 4 To take the new values into account you need to reboot the controller The same tool allows also duplicating stages in the stages ini in most case some parameters are modified as a second step or to delete stages from the stages ini 48 XPS Software Tools 4 12 FRONT PANEL Move The move page provides access to basic group functions like initialize home or motor disable and allows executing relative and absolute moves The move page provides also a convenient review of all important group information like group names group states and positions All motion groups are listed in the MOVE page NOTE A spindle group can do relative moves and absolute moves So it can be used in the MOVE page FRONT PANEL Menu Move Submenu Positioner name Positioner J Kill n st gt Mapon all groups Da Positioner Move to the Move to the velocity absolut
256. umentation V2 6 x 08 11 state means between the start and the end definitions of the trajectory output pulses see sections 13 4 and 13 5 Triggers on Trajectories for details All event parameters are 0 by default Triggers an action when the digital input bit switches from low state to high state The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default Triggers an action when the digital input bit switches from high state to low state The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default Triggers an action when the digital input bit switches from low to high or from high to low The first event parameter is the bit index 0 to 15 The other event parameters are 0 by default Triggers an action when the analog input value exceeds the limit The first event parameter is the limit value in volts The other event parameters are 0 by default Triggers an action when the analog input value is below the limit The first event parameter is the limit value in volts The other event parameters are 0 by default C amp gt Newport XPS Motion Tutorial PositionerError Triggers an action when the current positioner error applied with the error mask results in a value different than zero The first event parameter specifies the error mask in a decimal format The other event parameters are 0 by default Examples EventExtendedConfigur
257. un a ter ia amp Greene oes lt jm Gra T de t s ons 5 o ae eea seeto bor Miani i tia ce _ q says Sumpor Sn RE CW Niewport 53 XPSDocumentation V2 6 x 08 11 XPS Software Tools To execute a function from the Terminal do the following 1 Select a function and double click to validate the selection 2 Define the arguments for the function For functions with dynamic arguments ADD and REMOVE buttons are co available Alternative you can use a as separator between different arguments Los teeters hot ese nanary Iia e ome my seri SN RSS S For some arguments like ExtendedEventName ExtendedActionName or GatheringType the argument name is not directly accessible In these cases define the first part of the argument name then click in the choice field again and define the second part of the argument name See example below for defining the GatheringType with the function GatheringConfigurationSet Step 1 Step 2 Step 3 Select the positioner name Click in the choice field again To add another parameter press ADD and click Select parameter name and click Repeat step 1 and step 2 Prova tim erguer e Cathervegl moli gar et sensie esy aresta Lethermg antegn afro tet Femction ergeet e Cothermel cotiger etre z se v ta v En ee Tyge i aau n lt ca ciwe e x hw CX Newport XPSDocumentation V2 6 x 08 11 54
258. uous path each segment output position is equal to the next segment input position and the segment tangential angles at the connection point of any two consecutive segments are continuous including its derivative It means that the spline trajectory continuity property is R Geometric Conventions The coordinate system is a XYZ orthogonal system The X axis of this system correlates to the Xpositioner the Y axis to the YPositioner and the Z axis to the ZPositioner of the XYZ group as defined in the stages ini The origin of the XYZ coordinate system is in the lower left corner with positive values up Z to the right X and forward Y All angles are measured in degrees represented as floating point numbers Angle origin and sign follow the trigonometric convention positive angles are measured counter clockwise Catmull Rom Interpolating Splines To trace a smooth curve that links different predefined trajectory points the intermediate points must be calculated following a mathematical model For the sake of simplicity in most cases this is done by a polynomial curve polynomial interpolation C amp W Newport 92 XPS Motion Tutorial For motion systems the resulting curve should hit all predefined points This is called precise interpolation in contrast to approximate interpolation like Bezier splines where the predefined points only act as control points Within the class of precise interpolation we have e Gl
259. up as defined in the stages ini The origin of the XY coordinate system is in the lower left corner with positive values up and to the right All angles are measured in degrees represented as floating point numbers Angle origin and signs follow the trigonometric convention positive angles are measured counter clockwise Defining Line Arc Trajectory Elements A line arc trajectory is defined by a number of line and arc elements The trajectory elements are executed in the same order as defined in the trajectory data file Lares Figure 25 Line arc trajectory example 87 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial XPSDocumentation V2 6 x 08 11 9 1 5 9 1 6 Figure 25 shows a trajectory example Every trajectory must have a first element entry angle called First Tangent defined in the head of the trajectory data file If the first element is a line this parameter has no effect If the first element is an arc the entry angle is the tangent to the first point of the arc Each trajectory element is identified by a number starting from 1 The references for synchronizing external events with the trajectory execution are the starting and ending points of these elements Line and arc elements can be sequenced in any order An arc is automatically placed by the controller so that its entry angle corresponds to the exit angle of the preceding element to ensure the continuity of the trajectory But with eve
260. used also for motor commutation Motor initialization is done by a special routine that forces the motor to a known magnetic position without the need for Hall or other sensors The XPS DRV03 is a fully numerical programmable PWM Amplifier that has been optimized for the use with high performance DC motors The high switching frequency of 100 kHz and appropriate filter technologies minimize noise to enable ultra precision positioning in the nm range The XPS DRV03 supplies a maximum current of 5 Amps and 48 Volts It is capable of driving DC motors in velocity mode for motors with tachometer in voltage mode for motors without tachometer and in current mode for torque motors All parameters are free programmable in physical units for instance the bandwidth of the velocity loop Furthermore the XPS DRV03 features individual limits for the rms current and the peak current The XPS DRVOO pass through module can be used to pass control signals to other external third party amplifiers drivers By setting the controller s dual DAC output to either analog position analog stepper position analog velocity analog voltage or analog acceleration including sine commutation the XPS is capable of controlling almost any motion device including brushless motors voice coils and piezoelectric stages In addition to conventional digital AquadB feedback encoder interface the XPS controller also features a high performance analog encoder input 1 Vpp
261. using external third party drives Communication Interfaces Internet protocol TCP IP One Ethernet 10 100 Base T RJ45 connector with fixed IP address for local communication One Ethernet 10 100 Base T RJ45 connector for networking dynamic addressing with DHCP and DNS Typically 0 3 ms from sending a tell position command to receiving the answer Optional XPS RC remote control Firmware Features Powerful and intuitive object oriented command language Native user defined units no need to program in encoder counts Real time execution of custom tasks using TCL scripts Multi user capability Concept of sockets for parallel processes Distance spaced trigger output pulses max 2 5 MHz rate programmable filter Time spaced trigger output pulses 0 02 Hz to 2 5 MHz rate 50 ns accuracy Trigger output on trajectories with 100 ys resolution Data gathering at up to 10 kHz rate up to 1 000 000 data entries User defined actions at events monitored by the controller autonomously at a rate of 10 kHz User definable system referencing with hardware position latch of reference signal transition and set current position to value capability Axis position or speed controlled by analog input Axis position speed or acceleration copied to analog output Trajectory precheck function replying with travel requirement and max possible speed Auto tuning and auto scaling Motion Jogging mode including on the fly chan
262. utorial XPSDocumentation V2 6 x 08 11 The CurrentPosition is the current physical position of the positioner It is equal to the encoder position after all compensations backlash linear error and mapping have been taken into account The SetpointPosition is the theoretical position commanded to the servo loop It is the position where the positioner should be during and after the end of the move The FollowingError is the difference between the CurrentPosition and the SetpointPosition The TargetPosition is the position where the positioner must be after the completion of a move When the controller receives a new motion command after the previous move is completed a new TargetPosition is calculated This new target is received as an argument for absolute moves For relative moves the argument is the length of the move and the new target is calculated as the addition of the current target and the move length Then the profiler of the controller calculates a set of SetpointPositions to determine where the positioner should be at each time When the positioner is controlled by a digital servo loop with a PID corrector a part of the signals sent to the motor of the positioner is a function of the following error Part of this function is the integral gain of the PID filter that requires a following error equal to zero to reach a constant value The encoder in the positioner delivers a discrete signal encoder counts Take th
263. ven if it calls many functions they are always executed one by one following the order they are written In order to open several sockets for multitasking the C multithreading functionality must be used The XPS driver DLL allows a maximum number of 100 simultaneously opened sockets One XPS controller supports a maximum number of 30 simultaneously opened sockets but a program could control several XPS controllers 181 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial CH Newport XPSDocumentation V2 6 x 08 11 182 XPS Appendices Appendices 17 0 Appendix A Hardware 17 1 Controller 9 4 SLOTS 0 28 0 7 0 m 482 al y i 1 MIN 18 2 MAX 186 2 169 din M MIN 463 MAX 473 i ro 508 i re 429 i Weight 16 kg 32 Ib Input voltage 100 240 VAC Input current 11 A 115 V 5 5 A 230 V Frequency 60 50 Hz QD Newport ee 183 XPSDocumentation V2 6 x 08 11 XPS Appendices 17 2 Rear Panel Connectors PCA mi RATING A 5 CAUTION CAUTION molini I Geen corn ies wwe IPS u cet ant gt ones oa pres a SATIN CLI DOOR gt W S Ew re i Bi ee 4 i i HOOT i 17 3 Environmental Requirements Temperature range Storage 20 to 80 C Operating 5 to 35 C Relative Humidity Non condensing Storage 10 to 95 RH Operating 10 to 85 RH Altitude Storage To 10 000 ft Operating To 5 000 ft C amp Newport XPSDocumentation V2 6 x 08
264. wardAcceleration Frict on i SetPoint ho Velocity P KFeedForwardVelocity 4 SetPoint _ Position _ f PIO Corrector Cosi Filtering amp gt a oa rr L gt Calculations gt i gt Limitation i To ve sare ae w l Driver Board j amp Stage From n the encoder yy Figure 57 Corrector PIDDual FFVoltage 1433 1 Parameters FeedForward e 3 feed forwards are used Speed Acceleration and Friction e KFeedForwardAcceleration is a gain that can be apply to the feed forward in acceleration e KFeedForwardVelocity is a gain that can be apply to the feed forward in velocity e Friction is a value which is applied with the sign of the velocity e When the system is used in open loop the PID output is cut and only one feed forward in velocity is applied with the gain defined by KFeedForward VelocityOpenLoop PID corrector e Output of the PID is a voltage Kp is given in V unit Ki is given in V unit s Kd is given in V s unit Filtering and Limitation e ScalingVoltage is the theoretical motor voltage resulting from a 10 V input on the driver 48 V e VoltageLimit volts is the maximum motor voltage allowed to be commanded to the driver QD Newport 165 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial SetPoint 14 3 3 2 143 33 14 3 4 Basics The PIDDualFF Voltage corrector can be seen as a mix between the PIDFFVelocity and PIDFFAcceleration correctors It is difficult to give a p
265. with Newport stages this setting is done automatically with the configuration of the system The home search velocity acceleration and time out are also set up in the stages ini file Each motion group can either be homed together or sequentially meaning all positioners belonging to that group home at the same time in parallel or all the positioners home one after the other respectively This option is also set up in the system ini file or during configuration A Home search can be executed with all motion groups and any motion group MUST be homed before any further motion can be executed To home a motion group that is in a ready state that motion group must first be killed and then re initialized Example This is the sequence of functions that initialize and home a motion group GroupInitialize MyGroup GroupHomeSearch MyGroup GroupKill MyGroup QD Newport 73 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 8 3 Referencing State The XPS predefined home search processes described in the previous section might not be compatible with all motion devices or might not be always executable For instance if there is a risk of collision during a standard home search process In other situations a home search process might not be desirable For example to ensure that the stages have not moved the current positions are stored to memory In this case it is sufficient to reinitialize the system
266. x 08 11 178 XPS Motion Tutorial This example opens a TCP connection gets the firmware version of the XPS controller and closes the connection The execution is displayed in message boxes bet versonGet x1 versonGet versionGet IL Connected to target 3 XPS CB Firrewesre V1 4 0 IL Disconnected from target lt To learn more about the DLL prototypes refer to the Programmer s Manual accessible from the web site interface of the XPS controller All DLL prototypes are described there The Software drivers manual also accessible from the XPS web site interface provides further information about the use of the DLL and additional C programming examples 16 4 Running Processes in Parallel TCP provides a reliable point to point communication channel that client server applications on the Internet use to communicate with each other To communicate over TCP a client program and a server program establish a connection to one another Each program binds a socket to its end of the connection To communicate the client and the server both read from and write to the socket that binds the connection Sockets are interfaces that can plug into each other over a network Once plugged in the connected programs can communicate P address P address of the XPS of De computer stan socket socket st t Figure 62 Running Processes in Parallel XPS uses blocking sockets In other words the pro
267. xampl ssstoe lata aac dui aac aaa a aa ani 131 12 0 Data Gather in gs asa LOO 12 1 Time Based Internal Data Gathering eeeeeeeseeseeeeeceeceeseeseeseeseaeeaeeaeceeeaeeaeeaeeaeeaes 137 12 2 Event Based Internal Data Gathering i 139 12 3 Function Based Internal Data Gathering ei eeeeseeeeseeececeeseeseeseeseeseeseeeeeeeeneeeeaeeaeeaes 141 124 Trigger Based External Data Gathering eeeeeeeeeeceeeseeeeseeseseeseseeseeeseseeeesseseeaeeees 142 13 0 Output Tt COT 5 are 144 13 1 Distance Spaced Pulses PCO Position Compare Output i 144 13 2 AquadB signal S RARO 148 13 3 Time spaced pulses Time flasher cescecseeseseeseeeeseeeeseeecsesecsessesecaesesseeeeseeaesesaeeees 150 13 4 Triggers on Line Arc TrajectorieS eeeseeseecseseeseeeeseeesenecseeeesessesaeseseeseeeeseeesseeaeeee 152 135 Trigserson PVT a COT OS cilea alal 153 14 0 Control Loops iranica iaia L55 144 XPS servo Loops ii rire E E i ice 155 14 1 1 Servo structure and Basics eseseeseeseeseeseeseeseeseeseeseeseeseeseeaeeaeeascneeaeeaeeaeenees 155 14 12 XPS PIDFF Architecture aula aaa 157 14 2 Filtering and Limitation ssi IR asia iaia illo 161 14 3 Feed Forward Loops and Servo Tuning iii 161 143 1 Corrector PIDEEV clocity ie AIA I III I 161 14 3 2 Corrector PIDFFAcceleration eceseeseeseeseeeeeseeseeseeaeeaeeaeeaeeaeeaeeaec
268. xes group to perform a Line Arc or a Spline trajectory Also an XYZ group cannot be slaved to another group However any positioner of a MultipleAxes group can be a master to a slaved SingleAxis group For further details on the different types of trajectories Line Arc Spline PVT and how to define these trajectories please refer to chapter 9 0 Trajectories For simple point to point motion of individual positioners the most commonly used group is the SingleAxis group Native Units The XPS controller supports user defined native units like yum inches degrees or arcsecs The units for each positioner are set in the configuration file where the parameter EncoderResolution indicates the number of units per encoder count When using the XPS controller with Newport stages this part of the configuration is done automatically Once defined all motions speeds and accelerations can be commanded in the same natural unit without any math needed All other parameters like stage travel maximum speed and all compensations are defined on the same scale as well This is a great advantage compared to other controllers that can be commanded only in multiples of encoder counts which can be an odd number In the XPS controller there are 4 types of position information for each positioner TargetPostion SetpointPosition FollowingError and CurrentPosition These are described as follows 67 XPSDocumentation V2 6 x 08 11 XPS Motion T
269. xternalDataGet Please refer to the Programmer s Manual for details Example GatheringExternalConfigurationSet XY X ExternalLatchPosition GPIO2 ADC1 EventExtendedConfigurationTriggerSet Immediate 0 0 0 0 EventExtendedConfigurationActionSet ExternalGatheringRun 100 2 0 0 EventExtendedStart In this example a trigger based external gathering is started immediately with the function EventExtendedStart The types of data being collected are the XY X encoder position and the value of the GPIO2 ADCI A total of 100 data sets are collected one set of data at each second trigger input The gathering will stop automatically after the 100th data acquisition Use the function GatheringExternalStopAndSave to save the data to a file The file format is the same as for the internal data gathering C amp gt Newport 143 XPSDocumentation V2 6 x 08 11 XPS Motion Tutorial 13 0 Output Triggers 13 1 XPSDocumentation V2 6 x 08 11 External data acquisition tools lasers and other devices can be synchronized to the motion For this purpose the XPS features one dedicated trigger output per axis see Appendix E PCO connector for details The XPS can be configured to either output distance spaced pulses AquadB encoder signals or time spaced pulses on this connector In the distance spaced configuration one output pulse is generated when crossing a defined position and then a new pulse is generated at every defined distan
270. y laboratory users since the use of threads allows them to share the same controller for different applications at the same time With XPS it is possible that one group uses one axis of the XPS controller for an optical delay line while another group simultaneously uses other axes for a totally different application Both applications could run completely independently from different workstations without any delays or cross talk The XPS controller uses TCP IP blocking sockets which means that commands to the same socket are blocked until the XPS gives a feedback about the completion of the currently executed command either 0 if the command has been completed successfully or an error code in case of an error If customers want to run several processes in parallel users should open as many sockets as needed Please refer to section 16 4 Running Processes in Parallel for further information about sockets and parallel processing Programming with TCL TCL documentation is available in a PDF file accessible from the XPS controller web site TCL stands for Tool Command Language and is an open source string based command language With only a few fundamental constructs and relatively little syntax it is very easy to learn yet it can be as powerful and functional as traditional C language TCL includes many different math expressions control structures if for foreach switch etc events lists arrays time and date manipulatio

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