User`s Manual - Newport Corporation
Contents
1. 6 OAS 5 2 on 26 June 2015 6 Quality Director 60 ONG 2 amp Newport Experience Solutions EDH0349En1020 08 15 HXP100P MECA 6 Axis Parallel Kinematic Positioning System Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety related issues occur N The exclamation symbol may appear in warning and caution tables in this document This symbol designates an area where personal injury or damage to the equipment is possible General Warning or Caution The following are definitions of the Warnings Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety safety and preservation of the equipment or important tips WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment NOTE Note indicates additional information that must be considered by the user or operator European Union CE Mark CE The presence of the CE Mark on Newport Corporation equipment means that it has been designed tested and certified as complying with all applicable European Union regulations and recommendations Warnings and Cautions ATTENTION This stage is a Class A device In a re2. HXP100P MECA Hexapod 6 Axis Parallel Kinematic Positioning System RoHS Compliant AD USER S MANUAL Nevvport Experience Solutions Precision Motion Guaranteed 100 6 Axis Parallel Kinematic Positioning System Warranty EN A CAUTION Please return equipment in the original or equivalent packing You will be responsible for damage incurred from inadequate packaging if the original packaging is not used X 2 EDH0349En1020 08 15 Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment If found to be defective during the warranty period the product will either be repaired or replaced at Newport s discretion To exercise this warranty write or call your local Newport representative or contact Newport headquarters in Irvine California You will be given prompt assistance and return instructions Send the instrument transportation prepaid to the indicated service facility Repairs will be made and the instrument returned transportation prepaid Repaired products are warranted for the balance of the original warranty period or at least 90 days Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part CAUTION Warranty does not apply to damages resulting from e Incorrect usage Loa
3. FOR ENCODER CABLES WARNING Each Hexapod strut label corresponds to the axis number of the HXP100P ELEC controller This label is also indicated on connectors of the strut CY Newport Experience Solutions 5 EDH0349En1020 08 15 100 6 Axis Parallel Kinematic Positioning System 4 3 Cables Each Hexapod is equipped with cables terminated with SUB D25M connectors and can be directly connected to the HXP100P ELEC controller CAUTION Numbering of axes is important for strut connections mismatch will cause fatal errors during initialization WARNING These cables are shielded correctly For a correct operation make sure to lock connectors ground continuity provided by the cable WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk NOTE On each connector a sticker indicates the home preset and backlash on the SUB D25M connector and the resolution on the SUB D15M connector These parameters have to be set into the HXP100P ELEC controller for each strut This is done at our factory when the HXP100P MECA Hexapod is ordered with the HXP100P ELEC controller WARNING The HXP100P MECA must be grounded via a threaded hole to avoid electrical disturbances generated by ground loops Newport EDH0349En1020 08 1 5 6 Experience Solutions 100 6 Axis Parallel Kinematic
4. MECA QD 5 65 9 oe Experience Solutions 6 Declaration of Conformity Q0 NA following Annex II 1A e WA NOE of Directive 2006 42 EC on machinery gt lt 69 5 Hereby declares that the machinery Description HXP100P MECA Function 6 Axis Kinematic Positioning System SN Models HXP100P MECA Cre we x e K the technical file of which was compiled by Mr Dominique DEVIDAL Quality Director SUN MICRO CONTROLE Spectra Physics Zone Industrielle B P 29 oF 2 5 F 45340 Beaune La Rolande France e s lt gt complies with all the relevant provisions of the Directive 2006 42 on machinery complies with all the relevant provisions of the Directive 2014 30 EU relating to electro magnetic compatibility TX was designed and built in accordance with the following harmonised standards NF EN 61326 1 2013 Electrical equipment for measurement control and laboratory use requirements Part 1 General requirements NF EN 55011 2010 A1 2011 Class A was designed and built in accordance with the following other standards NF EN 61000 4 2 NF EN 61000 4 3 NF EN 61000 4 4 NF EN 61000 4 5 NF EN 61000 4 6 E K 9 ONG EN ORIGINAL DECLARATION P AERA E ERE 5 ORM MOO MOA RN SESS
5. Number Fax Number Item s Being Returned Model Serial Description Reasons of return of goods please list any specific problems Newport Experience Solutions 9 EDH0349En1020 08 15 NNevvport Experience Solutions Visit Newport Online at www newport com North America amp Asia Newport Corporation 1791 Deere Ave Irvine CA 92606 USA Sales Tel 800 222 6440 e mail sales newport com Technical Support Tel 800 222 6440 e mail tech newport com Service RMAs amp Returns Tel 800 222 6440 e mail service newport com Europe MICRO CONTROLE Spectra Physics S A S 9 rue du Bois Sauvage 91055 Evry CEDEX France Sales amp Technical Support Tel 33 0 1 60 91 68 68 e mail france newport com Service amp Returns Tel 33 0 2 38 40 51 55
6. Positioning System m Dimensions TOP VIEW m 591 10 E HF 3 94 100 1 97 lt lt 50 gt 12 HOLES M6 THD 1 HOLE M6 THD DEPTH 20 5 a CNN S 394 197 100 50 2 PINHOLES o 197 7 1 HOLE 0 394 H7 DEPTH 39 10 DEPTH 31 8 4 HOLES M6 THD ON SOR 1 97 50 6 HOLES M6 THD EQUIDISTANT AT 60 6 HOLES M6 THD ON 04 9 125 EQUIDISTANT AT 60 ON 06 9 175 NOTE The X axis points in the direction of the cable output DEPTH 38 10 between struts 3 and 4 MODEL SHOWN HXP100P MECA DIMENSIONS IN INCHES AND MILLIMETERS Z 97 9 200 gt pe CARRIAGE 25 8 2325 209 HEXAPOD AT MIDDLE POSITION BASE 6 CLR HOLES FOR M6 SCREW EQUIDISTANT AT 60 ON 97 9 200 0118 4 300 006 2 PINHOLES ud DEPTH 39 10 FOR 1 4 SCREW 8 0 203 2 SPACING NOTE 4 CLR SLOTS FOR 1 4 SCREW 3 CLR HOLES FOR M6 SCREW ON 4 0x8 0 101 6x203 2 EQUIDISTANT AT 120 OR M6 SCREW Top and base plates of the HXP100P MECA ANTATT OR Me Hexapod are made of anodized aluminum 8 00 203 2 gt Newport Experience Solutions 7 EDH0349En1020 08 15 100 6 Axis Parallel Kinematic Positioning S
7. d on the Hexapod greater than maximum specified load Carriage speed higher than specified speed Improper grounding 5 Connectors must be properly secured 5 When the load on the Hexapod represents an electrical risk it must be connected to ground Excessive or improper cantilever loads Modification of the Hexapod or any part thereof This warranty is in lieu of all other warranties expressed or implied including any implied warranty of merchantability or fitness for a particular use Newport Corporation shall not be liable for any indirect special or consequential damages No part of this manual may be reproduced or copied without the prior written approval of Newport Corporation This manual has been provided for information only and product specifications are subject to change without notice Any changes will be reflected in future printings Newport ii Experience Solutions HXP100P MECA 6 Axis Parallel Kinematic Positioning System Table of Contents aes ah canta He Ordres ii EC Declaration Of IM eas Definitions and 5 1 16 GS Sn vii viii 1 0 Introduction 1 1 15 ci een
8. e 1 2 0 DescrIDIOB conipeoies dread lion on elders 2 3 0 Characteristics eee 3 3 1 Mechanical Specifications eese eene 3 3 2 Max Cantilever Distance of the Load eee 3 Sid Jd MEER 3 4 0 Connection to the HXP100P ELEC Controllers 4 Warnings on Controllers 4 42 dics Hach eredi 5 AS Cables RR T EE 6 5 0 3 5 2222 1 24 2 1 6 0 Maintenance 2 2 2424 2 8 6 L 22222 vafe teta ERE Send 8 6 2 RepalE uote aie n nere re P ean Er E EY Pe EAT wares 8 Service tetra tn vea dee 9 lt gt Newport Experience Solutions iii EDH0349En1020 08 15 HXP100P MECA 6 Axis Parallel Kinematic Positioning System QD Newport EDH0349En1020 08 1 5 iv Experience Solutions HXP100P MECA 6 Axis Parallel Kinematic Positioning System EC Declaration of Conformity The manufacturer MICRO CONTROLE Spectra Physics 9 rue du Bois Sauvage 91055 Evry CEDEX FRANCE NS 2 NS ON NS ON re GO RO ORO RC NO OY PSS 5526 N 545 HXP100P
9. od in places subject to extremely high temperatures or low temperatures This may cause an electric shock Operating temperature 10 to 35 C Storage temperature 10 to 40 in its original packaging CAUTION Do not move this Hexapod if struts power is on Make sure that the cable to the electronics is disconnected before moving the Hexapod Failure to do so may damage the cable and cause an electrical shock CAUTION Be careful that the Hexapod is not bumped when it is being carried This may cause it to malfunction CAUTION When handling this Hexapod always unplug the equipment from the power source for safety CAUTION Contact your Newport service facility to request cleaning and specification control every year QD Newport EDH0349En1020 08 15 viii Experience Solutions 100 6 Axis Parallel Kinematic Positioning System 6 Axis Parallel Kinematic Positioning System HXP100P MECA Hexapod m Introduction This manual provides operating instructions for the Hexapod that you have purchased CAUTION Do not use the top plate for handling CAUTION Do not manually turn struts CAUTION Please read chapters 3 3 and 5 0 carefully before operating your Hexapod CAUTION Do not use the HXP100P MECA Hexapod neither up side down nor horizontally NOTE This product complies with the RoHS directive Restriction of Haza
10. pose the unit to excessive moisture 85 humidity Read this manual before using the unit for the first time WARNING attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized Contact your electrician to check your receptacles WARNING This product is equipped with a 3 wire grounding type plug Any interruption of the grounding connection can create an electric shock hazard If you are unable to insert the plug into your wall plug receptacle contact your electrician to perform the necessary alterations to ensure that the green green yellow wire is attached to earth ground WARNING This product operates with voltages that can be lethal Pushing objects of any kind into cabinet slots or holes or spilling any liquid on the product may touch hazardous voltage points or short out parts QD Newport EDH0349En1020 08 1 5 4 Experience Solutions 100 6 Axis Parallel Kinematic Positioning System 4 2 Connection WARNING Always turn the controller s power OFF before connecting to a strut Anytime prior to power up each strut must be connected with the supplied cables to the corresponding 2 plugs located at the rear panel of the HXP100P ELEC controller The SUB D25 cable must be connected to the plug labeled MOTOR the SUB D15 cable to the plug labeled ENCODER 6 SUB D25F CONNECTORS 6 SUB D15F CONNECTORS FOR MOTOR CABLES
11. racy and throughput making the programmer s life much easier Order the hexapod with the corresponding HXP100P ELEC controller Hexapod Trajectory 2 0 18 1 6 14 12 1 0 0 8 Standard Motion m RightPath Z Motion mm 06 RightPath Trajectory 04 Control enables minimal 02 runout in linear and arc 04 trajectories 30 20 10 0 10 20 30 X Motion mm Newport 2 Experience Solutions HXP100P MECA 6 Axis Parallel Kinematic Positioning System m Characteristics 3 1 Mechanical Specifications X Y Z ey Travel range 27 5mm 25 mm 14 11 5 10 5 19 MIM Minimum incremental motion 0 1 um 0 1 um 0 05 um 0 05 mdeg 0 05 mdeg 0 1 mdeg Uni directional repeatability typical 0 2 um 0 2 um 0 1 um 0 1 mdeg 0 1 mdeg 0 2 mdeg Bi directional repeatability typical 0 5 um 0 5 um 0 25 um 0 25 mdeg 0 25 mdeg 0 5 mdeg Max speed 12 mm s 10 mm s 5 mm s 89 65 89 6 16 s Stiffness 3 N um 3 N um 24 Centered load capacity 60N 1 Travel ranges are interdependent The listed values are max travels per axis when all other axis in their centered position 2 With standard compensation For allowable cantilevered loads refer to section 3 2 Max Cantilever Distance of the Load CAUTION To reach specifications stated stages must be fixed on a plane surface with a flatness of 5 pum 3 2 Ma
12. rdous Substances GO Newport Experience Solutions 1 EDH0349En1020 08 15 100 6 Axis Parallel Kinematic Positioning System Description WORLD 1e The HXP100P MECA 6 Axis Hexapod is a parallel kinematic motion device that provides six degrees of freedom X Y Z pitch roll and yaw The HXP100 has long travel capability and is an effective solution to complex motion applications that demand accuracy in up to six independent axes Contrary to the image of being complex and highly priced the HXP100P MECA hexapod is not only affordable but extremely easy to use The HXP100P MECA design also includes two programmable pivot points enabling more flexibility to align a sample at a particular point or points of that sample The HXP100P MECA Series also takes advantage of the RightPath trajectory capability enabling scanning in a path along a defined trajectory line arc or rotation at a constant and definable speed with low runout Derived from the HXP50 MECA the HXP100P MECA is driven by six DC servo motor actuators with encoder feedback at the leadscrew nut providing precise MIM low backlash and fast speed The quality of the actuators has obviously a strong impact on the overall motion performance of the HXP100P MECA but of equal importance are the joints with which the actuators are attached to the base and the moving top plate With size and rigidity in mind our engineers came up
13. red the Hexapod Switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility for repairs WARNING Do not place this Hexapod in unstable locations such as on a wobbly table or sloping surface where it may fall or tip over and cause injury If this Hexapod has been dropped or the case has been damaged switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility and request repairs WARNING Do not attempt to modify this Hexapod this may cause an electric shock or downgrade its performance WARNING Do not exceed the usable depth indicated on the mounting holes see section Dimensions Longer screws can damage the mechanics cause a short circuit Newport tiefe Solone vii EDH0349En1020 08 15 HXP100P MECA 6 Axis Parallel Kinematic Positioning System Cautions CAUTION Do not place this Hexapod in a hostile environment such as X Rays hard UV orin any vacuum environment CAUTION Do not use the top plate for handling This may cause it to malfunction CAUTION Do not manipulate struts This may cause it to malfunction CAUTION Do not use the Hexapod neither up side down nor horizontally CAUTION Do not place this Hexapod in a location affected by dust oil fumes steam or high humidity This may cause an electric shock CAUTION Do not leave this Hexap
14. sidential environment this device can cause electromagnetic interference In this case suitable measures must be taken by the user QD Newport EDH0349En1020 08 1 5 vi Experience Solutions HXP100P MECA 6 Axis Parallel Kinematic Positioning System Warnings WARNING The motion of objects of all types carries potential risks for operators Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved WARNING Do not use this Hexapod when struts are emitting smoke or is unusually hot to the touch or are emitting any unusual odor or noise or is in any other abnormal state Stop using the Hexapod immediately switch off struts power and then disconnect the HXP controller from power supply After checking that smoke is no longer being emitted contact your Newport service facility and request repairs Never attempt to repair the Hexapod yourself as this can be dangerous WARNING Make sure that this Hexapod is not exposed to moisture and that liquid does not get into the Hexapod Nevertheless if any liquid has entered the Hexapod switch off struts power and then disconnect the HXP controller from power supply Contact your Newport service facility and request repairs WARNING Do not insert or drop objects into this Hexapod this may cause an electric shock or lock the drive Do not use this Hexapod if any foreign objects have ente
15. with innovative spherical joints that are not only very simple but also enhance the stiffness of the hexapod CARRIAGE common requirement for many Hexapod motion BASE applications is a virtual pivot point allowing the user to freely choose the point in space that is a pivot point for all rotations The Newport Hexapod can not only relocate the Absolute moves and positions are defined in the work coordinate system pivot point but through advanced technology the entire coordinate system can be relocated In addition two Incremental moves can be done in the tool or in the work coordinate systems user definable coordinate systems are provided called tool As a standard feature the HXP100P ELEC controller allows the user to choose a virtual pivot point in space for all rotations EDH0349En1020 08 15 moves with the Hexapod and work stationary coordinate systems Incremental displacements are possible in either one of these systems in user friendly Cartesian coordinates and positions can be easily calculated from one system to the other by a function call without the need for complex external coordinate transformations The HXP100P ELEC provides advanced features including instrument grade I O s hardware based input triggers event triggers high speed on the fly data acquisition fast TCP IP communication and integrated TCL programming language for on board processes these features improve accu
16. x Cantilever Distance of the Load Load Position D 0 to 140 mm 0 to 200 mm 80 H 0 70 60 lt D 50 Load 40 Au Max Load N 30 20 0 20 40 60 80 100 120 140 Radial Distance D mm 3 3 Weight Weight Ib kg Hexapod without cables 15 9 7 2 Cables 2 2 1 0 lt gt Newport Experience Solutions 3 EDH0349En1020 08 15 HXP100P MECA 6 Axis Parallel Kinematic Positioning System m Connection to the HXP100P ELEC Controllers 4 1 Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury Read the controller user s manual carefully before operating the instrument and pay attention to all written warnings and cautions WARNING Disconnect the power plug under the following circumstances If the power cord or any attached cables are frayed or damaged in any way If the power plug is damaged in any way If the unit is exposed to rain excessive moisture or liquids are spilled on the unit If the unit has been dropped or the case is damaged f you suspect service or repair is required Whenever you clean the electronics unit CAUTION To protect the unit from damage be sure to Keep all air vents free of dirt and dust Keep all liquids away from the unit Do not ex
17. ystem m Maintenance 6 1 6 2 EDH0349En1020 08 15 RECOMMENDATION It is recommended to contact our After Sales Service which will know to define the appropriate maintenance for your application Maintenance The Hexapod requires no particular maintenance Nevertheless this is a precision mechanical device that must be kept and operated with caution PRECAUTIONS The Hexapod must be used or stocked in a clean environment without dust humidity solvents or other substances RECOMMENDATION It is recommended to return your Hexapod to Newport s After Sales Service after every 2000 hours of use for lubrication If your Hexapod is mounted on a workstation and cannot be easily removed please contact Newport s After Sales Service for further instructions Repair CAUTION Never attempt to disassemble a component of the Hexapod that has not been covered in this manual To disassemble a non specified component can cause a malfunction of the stage If you observe a malfunction in your Hexapod please contact us immediately to arrange for a repair CAUTION Any attempt to disassemble or repair a Hexapod without prior authorization will void your warranty Newport 8 Experience Solutions Service Form Your Local Representative Tel Fax Name Return authorization Please obtain prior to return of item Company Address Date Country Phone Number P O
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