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Surfscan® 6100/6200 Operations Manual Main Contents

1. Section 4 3 Using the Scan Window Section 4 4 Quick Reference Section 4 5 Using the Summary Box Section 4 6 Using the Cassette Catalog Section 4 7 Using the Histogram Section 4 8 Using the Wafer Map Section 4 9 Zooming the Map Section 4 10 Examining a MicroView Section 4 11 Printing Summaries Description Starting the Scan application and preparing for a scan The methods you can use to scan wafers How to use Scan application window to scan wafers print and save data and analyze re sults A brief description of important commands and functions How to use the Summary box where scan results are listed How to use the cassette catalog to choose slots move wafers and home the cassette How to zoom the histogram and change bin splits How to use a wafer map How to zoom the wafer map How to MicroView an area of the wafer and use the MicroView cursor to determine ap proximate defect size Printer setup and how to print wafer and lot summaries 343153 Rev B 5 97 4 1 STARTING THE SCAN APPLICATION To start the Scan application At the System Menu choose the Scan icon A blank Scan window appears The Scan window is divided into areas that display results of scans Recipe This area displays a summary of the results of a scan This area displays the defect or haze map Scan Sequence Statu
2. 343153 Rev B 5 97 5 8 Data Display Parameter Haze Range Haze From Surfscan 6200 Operations Description Limited full extended or autorange The haze value range in parts per million are determined by the current gain setting In autorange the instrument chooses the range that provides the best resolution The instrument automatically zooms on the peak of the data if any The minimum haze value collected Defaults to 1 250 of the Haze Range value 5 3 3 CONFIGURATION PARAMETERS Configuration parameters provide cassette sorting automatic operation and substrate selection Configuration Parameter Cassette Sorting Auto Align X Y Auto Gain Setting Auto Print 343153 Rev B 5 97 Description Cassette type and wafer handling configuration Cassette types can be scrolled using the cycle control You can select only a cassette type that has been calibrated for the current substrate diameter See Chapter 7 Calibra tion for details on creating cassette types Cassette wafer handling can be L gt lt left only R gt lt right only L gt R lt left to right L lt R gt right to left or L lt R gt lt sorted Your instrument is configured for either right to left or left to right wafer handling To switch to the other cassette configuration contact your Tencor Service Representa tive Off or On When sorting is On and the cassette setting is L lt R gt
3. Figure 8 14 Disk Access Message Box Click OK to proceed with the restore 8 The following window appears showing the progress of the restore H cc50104d ful cc00104d_ful Figure 8 15 Restore Progress Window When prompted remove the first diskette insert the next and click OK or press ENTER If restoring from a network there are no disks to add and no prompt appears 9 When the restore is completed the following message box appears aD Restore Complete Files Selected 5 Files Restored 45 Figure 8 16 Restore Complete Message Box Click OK or press ENTER to return to the main Backup window 343153 Rev B 5 97 Working with the Database 8 15 10 Click on Quit in the button bar The following message box appears You are about to exit Microsoft Backup L Figure 8 17 Exit Backup Message Box Click OK 8 4 REPORTS This section provides instructions for viewing and printing recipes the system configura tion table the user configuration table and exclusion patterns using the database Report utility To print the system log see Chapter 11 ViewLog To print data summaries and maps stored in the database see Chapter 9 Browser To start the database Report utility Select Report from the Database menu The database system displays the Reports window Figure 8 18 Reports Window 343153 Rev B 5 97 8 16 Surfscan 6200 Operations 8 4 1 VIEWING REPORTS
4. Year 1980 Month Day Hour Minute Sec 2 12 9 8 15 30 27 010 0 1 1 0 0 11101011 011 010 010 1 111 1 0 111 1 1 0 1111011 1 1 9 2 8 7 B D B 343153 Rev B 5 97 7 24 Surfscan 6200 Operations Serialized Lot ID naming The instrument forms the filename from the Lot ID recipe name and a serializing digit XLLLLRR BMP Where X a serializing character from A Z LLLL characters 3 7 from the current Lot ID defaults to RR the last two characters in the current recipe name defaults to BMP the file extension defaults to the file extension assigned to the selected file type User selectable The instrument asks for the filename for each file saved e Select a File Type using the cycle control The available formats are Device independent bitmap BMP Tag based file format TIF Macintosh PICT PCT 5 Choose OK to close the Setup dialog box and choose OK again to close the Printers dialog box 7 11 2 SETTING UP FOR PRINTING 132 COLUMN REPORTS The instrument can print 132 column wafer summaries and lot summaries Your printer can be set to print 132 column reports by using one of the following procedures e If you have a wide carriage printer set the Windows Generic Text Only printer driver for wide carriage printing e If your printer supports compressed printing you can automatically enable com pressed mode when printing by using the Windows Control Panel e You can manually set your printer to a compre
5. RESET POWER OFF O Figure 2 2 Auxiliary Panel The controls available on the auxiliary panel are Control Action Emergency Off Press to shut off instrument power For emergency use only Key switch Not implemented in the current version Power On Press to turn on instrument control power and start the computer Reset Press to restart the computer without turning off instrument power The instrument s software is automatically loaded when the in strument is reset The disk in use indicator lights when the system accesses the hard disk The indicator is not present on all instru ments The instrument should be reset only when this indicator is off Power Off Press to turn off instrument power and the computer system CAUTION Do not reset the instrument or turn power off when the disk in use indicator is lit Data loss can result 343153 Rev B 5 97 Basic Skills 2 3 2 1 2 KEYPAD The operator keypad is located on the top of the console just below the display monitor Except where noted otherwise in this manual you can use the keypad mouse or a combination of both input devices to enter data or issue instrument commands eTe fom EE 0E Figure 2 3 Keypad MICRO The actions of the operator keypad are Key 0 9 UNDO ID NO or CANCEL YES or ENTER HELP MENU N H e e SEL RCP ZOOM MICROSCOPE Action Numeric keypad for the entry of the numbers 0 through 9 the de
6. To view system status Choose System Status from the View menu to display a status window showing the current system date and time available memory disk space information current 343153 Rev B 5 97 12 10 Surfscan 6200 Operations user name and current user type Date and Tite Tut Sep I7 1991 1430 Memory Avadable ISAE 4S Contiquoars Total Disk Free in bytes C AE LEIL Total Disk Space in bytes Et 719176960 User Hamz Customer Manager User Type User Manager Figure 12 8 System Status NOTE To view the current disk and database usage double click on the disk icon contained in the Tencor Instruments banner at the top of the screen To view version information Choose Versions from the View menu to display a status window showing the current date and time hardware version Microsoft Windows version and Surfscan 6000 series software version Date and Tinie Hardware Version vindis Version SF 56200 Soflware Version Figure 12 9 System Versions To print a status report Choose an item from the Print menu 343153 Rev B 5 97 Diagnostic Tools To arrange status windows 12 11 Choose options from the Window menu as follows Option Action Tile Shows all open windows on the screen at one time Cascade Arranges windows in an overlapping fashion Arrange Icons Arranges icons at the bottom of the screen Close All Closes all open status windows Tiled windows all fit within the applica
7. e A TFF file contains the data currently displayed on a wafer map including changes to wafer orientation wafer origin and bin splits To view or create a text version of a TFF data file use the TEXTOUT EXE program TEXTOUT EXE is in the SOVA BIN directory 7 7 1 SETTING TFF FILENAMING When saving Tencor File Format TFF files the instrument uses the file path and file naming conventions specified in the Tencor File Format Control dialog box To set TFF filenaming 1 Choose User from the Config menu in the Setup application to open the User Configuration dialog box 2 Choose the More button to open the second part of the dialog box Choose the TFF Control button to open the Tencor File Format Control dialog box File Naming and Format Drive Path c sovaidatal FileName Date Time encoded naming OC File Extension iff Event Size Format Standard TFF s Use TFF file name as the Wafer ID C e Loa Figure 7 8 Tencor File Format Control Dialog Box 4 In the Drive Path field enter the disk drive and directory path for TFF files It is good practice to save user created files such as TFF files and bitmaps into a separate directory 343153 Rev B 5 97 Setting Up the System 7 13 5 Choose a Filename method When saving TFF files the instrument will automati cally supply the filename convention specified in this dialog box Date Time encoded naming The instrument forms the TFF filename using the
8. Area From A recipe parameter that sets the maximum size for LPDs during data collection Defects larger than the Area From value are classified as areas Arrow keys The arrow keys on the operator keypad These keys can be used to highlight a menu item or dialog box option or to move a text or graphics cursor Attributes In statistical process control qualitative data that can be counted Examples include defects per wafer number of failed die per wafer defect density per wafer Attributes are measures on a discrete scale and use Poisson statistics Automatic operation A scan option that allows each selected wafer in a cassette to be scanned automatically in sequence See scan mode and scan sequence Back up To save data from the instrument s hard disk to diskettes or a network drive if available The data can be restored at a later time Bin splits Color coded defect or haze ranges The instrument displays data on maps and histograms using the color coding scheme Data within a bin split range can be enabled or disabled by clicking a bin split button in the wafer summary Bin split ranges can be changed through the histogram 343153 Rev B 5 97 Glossary 2 Surfscan 6200 Operations C chart In statistical process control an attribute control chart used to track the number of non conformities with a constant sample size for example to track the total number of defects per wafer Calibration curve A curve that matches cr
9. To select and view a Recipe report 1 From the Select menu choose Recipes 2 The following dialog box appears Available Recipes Selected Recipes ALANOTO34 ALANO1036 Figure 8 19 Database Reports Window The Available Recipes list box displays the recipes currently available The Select ed Recipes list box displays the recipes you have selected for the Recipe report The move buttons allow you to move recipe substrate size items to or from the Selected Recipes list as described below Button Description gt Adds the selected recipe to the Selected Recipes list lt Removes the selected recipe from the Selected Recipes list gt gt Adds all recipes to the Selected Recipes list lt lt Removes all recipes from the Selected Recipes list Select the recipe s to add to the export list using the Move buttons Use the horizontal scroll bars at the bottom of each list to see additional data 3 Click OK to display the selected Recipe report 343153 Rev B 5 97 Working with the Database 8 17 4 The selected report is displayed in the Report window farPecer Beripe Bapert Traen riram FM Dam urep deen ee ee Doe 2 ke ap Fagot Daas ee r ie haport Tira Ae 2 LH Femi pm PAT TE Be Lee eo fb aed Ieee be Pee Fe DATA COLLE TIH DATA OFA ILA Sipe Cpi doe Biepler Tyee Aap TET Bin Epin ieres Fuam rao os am Tima amp hc 1 Tana Fanga E S feted pete Limir Pra ughe Ba a Rs Fana Frar Loa PE
10. or to highlight the menu title you want and then press J to open the menu To close a menu from the menu bar Click on any blank screen area or press MENU or CANCEL To choose an item from an open menu Click on the item you want to select Or press or gt to highlight the choice you want Then press ENTER 343153 Rev B 5 97 2 12 Surfscan 6200 Operations To choose an item from a closed menu shortcut method Move the mouse pointer over the menu Press and hold the left mouse button The menu opens Move the mouse pointer over the choice you want The item is highlighted Release the mouse button HINT Ifa menu item has an underlined number you can choose it by opening the menu and pressing the number Each application has a special menu called the Control menu that can be opened by clicking on the Control menu icon or by pressing ALT SPACEBAR To open the Control menu for an application Click the Control menu icon in the upper left corner of the window Be careful not to double click the icon or you will close the window Control Menu Icon Restore Figure 2 12 Control Menu Restore returns the window to its previous size Minimize shrinks the window to an icon Close exits the application Switch to opens the Task Manager window 2 5 WORKING WITH DIALOG BOXES The instrument uses dialog boxes to obtain additional information about an action you have selected A dialog box can c
11. 2 Select the Sort Mode Absolute Relative or Disabled using the cycle control Enter the desired Ceiling and Floor limits in the appropriate fields 4 Enter the desired Region the percentage of the wafer surface that must fall within the deviation limits for the wafer to pass 5 Click OK 5 8 RECIPE PARAMETER GUIDELINES e Area Total should be less than 10 mm for a 150 mm wafer Adjust range using Gain and Threshold parameters to reduce total area e If the instrument displays Data Overload in the status box instrument sensitivity is too high Count accuracy and repeatability might not be reliable Reduce sensi tivity by raising threshold reducing gain or increasing throughput e If the histogram shows an exponentially increasing distribution at the low end of the graph the instrument might be collecting phantom defects or haze noise Raise threshold and gain proportionately 343153 Rev B 5 97 Calibration 6 1 6 CALIBRATION This chapter describes Surfscan 6200 calibration procedures available through the Cali bration application polystyrene latex PSL spheres on a substrate haze and cassette calibration PSL spheres on substrate calibration allows you to add calibration curves for new substrates and film thicknesses or edit existing curves The instrument uses the calibration to calculate defect sizes See Section 6 2 Calibrating PSL Spheres on a Substrate The haze calibration procedure produces a
12. Histogram Key features of the instrument are e Software applications use Microsoft Windows allowing data to be presented in easy to understand graphics e The instrument uses a single puck wafer transport mechanism that minimizes contamination from wafer handling The standard cassette indexers can handle wafers from 100 mm to 200 mm Optional 2 in and 3 in configurations are available e Each user can have a unique user name and access code The system manager can assign specific privileges to each user e Wafer summaries and maps can be stored in the Surfscan 6X00 database Data in the database can be reviewed imported exported backed up and restored A query language provides selection of specific database records 343153 Rev B 5 97 Introduction 1 3 The instrument can sort passed and failed wafers into separate cassettes The instrument can be calibrated for multiple substrate types Defect and haze calibration curves can be easily customized The instrument can save data into Tencor File Format TFF files that can be used for further data analysis Tencor Instruments MicroView technology displays a three dimensional view of a substrate s surface Yiewing from front PEREN Amplitude range 9 12285 Displaying 1 4mm x 1 4mm Figure 1 2 Surfscan 6000 Series MicroView MicroViews are useful for identifying defects contaminants and other wafer features from the characteristics of their scattered l
13. Onentation Paper is Portrait Size Letter 8 1 2 x 11 in Landscape Source Figure 8 21 Print Setup Dialog Box 2 Click on the pull down list under Specific printer Select one of the following e HP LaserJet HP DeskJet and DeskJet Plus e HP PaintJet and PaintJet XL 343153 Rev B 5 97 Working with the Database 8 19 e Generic Text Only Best print spooling speed can be achieved when the default printer is a fast continuous tractor feed printer capable of 66 lines per page If available set the default printer to Generic Text Only Click the Setup button to verify that printer settings are as follows Printer Text Only Paper Size Letter Paper Feed Continuous No Page Break Disabled Printer Codes all blank To print a report 1 Click on the printer icon in the tool bar at the bottom of the report window Fig 8 20 The following dialog box appears Printer HP LaseWet 4517451 HX on tennet pub4si LPT1 Copies ho EJ Collate Copies Figure 8 22 Print Dialog Box 2 Select the desired print options range of pages number of copies and so on Then click OK to print the report To fast print to the default printer 1 Choose Print All from the Report menu 2 Choose Long Report or Short Report from the submenu The selected report is sent immediately to the default printer To print all selected reports Choose Print all selected from the Print menu All selected reports are
14. 203 212 212 221 eel 230 230 240 240 250 Meant T 21d Std Dew El Area Cnt NIA Scratch Cnt NIA Sum of All Defects 0 Haze Region Haze Average Haze Peak x 2002 Laser d8 nm Gain 1 Diameter 142205 Thresh 1804m Exclusion Haze Rng S0000ppm Thruput aama 200 210 220 Cross Section Figure 9 6 Database Browser Window Viewing and analysis functions are available See Chapter 4 Scanning for details on these functions A summary of available functions are listed below To zoom the map Double click the left button or press ZOOM To print the summary Choose the type of summary from the Print menu To change the graphics display Choose an option from the Display menu To add or remove haze defect or area data Choose a bin split or overlay control button in the Summary box 343153 Rev B 5 97 Browser 9 7 To display the data currently selected from the database Choose Review from the Database menu Browser displays the Review window To zoom the histogram Double click the left button in the histogram or press NEXT repeatedly to select the histogram and then press ZOOM To change bin splits Double click the right button in the histogram To view or set X Y coordinates See Chapter 13 X Y Coordinates Option To extract data for use in statistical process control SPC requires the Statistical Process Control Option Choose Extract for SPC fro
15. 343153 Rev B 5 97 6 22 343153 Rev B 5 97 Surfscan 6200 Operations Recipe Parameter Description Maximum CV Maximum coefficient of variation CV This value is a product of variations of instrument sensitivity geometric sampling errors Poisson noise broadening and the nat ural dispersion of PSL sphere sizes If the CV calculated for the calibration scan exceeds the displayed value the program alerts you and allows you to accept or cancel the calibration CV can be from 0 to 30 Edge Exclusion mm The edge exclusion distance in mm Edge exclusion can be from 2 to 30 PMT Gain Setting The gain max size setting to be used for the calibration scan See Chapter 5 Recipes for gain settings Haze Range The maximum haze range Lower Display Limit The smallest haze value used in calculations ppm Upper Display Limit The largest haze value used in calculations ppm Choose OK to accept the recipe settings Click START in the menu bar or press START The application displays the wafer map and histogram window and the Scan Wafer dialog box instructs you to place the sample wafer in the bottom slot of the right cassette Place the 100 ppm haze calibration wafer into the bottom slot of the HIGHT cassette now Figure 6 18 Scan Wafer Dialog Box Calibration 10 6 23 Place the sample wafer in the bottom slot of the right cassette and choose Start Scan The instrument scans the wafer and displ
16. 8 11 8 12 8 13 8 13 8 13 8 14 343153 Rev B 5 97 XVIII Figure 8 15 Figure 8 16 Figure 8 17 Figure 8 18 Figure 8 19 Figure 8 20 Figure 8 21 Figure 8 22 Figure 9 1 Figure 9 2 Figure 9 3 Figure 9 4 Figure 9 5 Figure 9 6 Figure 9 7 Figure 9 8 Figure 9 9 Figure 9 10 Figure 9 11 Figure 9 12 Figure 10 1 Figure 10 2 Figure 10 3 Figure 10 4 Figure 10 5 Figure 10 6 Figure 10 7 Figure 10 8 Figure 10 9 Figure 10 10 Figure 10 11 Figure 10 12 Figure 10 13 Figure 10 14 Figure 10 15 Figure 10 16 Figure 10 17 Figure 11 1 Figure 11 2 Figure 11 3 Figure 11 4 Figure 11 5 343153 Rev B 5 97 Surfscan 6200 Operations Restore Progress Window Restore Complete Message Box Exit Backup Message Box Reports Window Database Reports Window Recipe Report Print Setup Dialog Box Print Dialog Box Browser Menus Printer Selection Dialog Box Desired IDs Dialog Box Data Selection Dialog Box Review Data Dialog Box Database Browser Window Map to Map Display Map to Map Menu Map to Map Preferences Removed Defects Map Added Defects Map Choosing the Second Map Database Export Import Utility Window Import From Dialog Box Import in Progress Message Box All Records Message Box Selected Import Dialog Box Confirm Write to Database Dialog Box Record Already Exists in Database Dialog Box Export To Dialog Box Export All Records Message Box Select Recipes to Export Dialog Box Data Selection Dialog Box Export Al
17. CONFIGURATION SORT PARAMETERS ot Be Bo be Lo m GED Tashi FO T LITO oom fin Limir rte rae ANF ii p Grick 6 era Lete Bede Jeiki imp i Terain C mar E FFF FE FEE om huts Frinn m Sie DE ALL De oe Ce F TEF Erra Aseas Er Hams raraga ED pai ppa Film Type rE Li i Hage Fenk IO Darpan Beqian LOGS Te 115 Ta TD Go to last page Go to next page Go to previous page Go to first page Figure 8 20 Recipe Report e By default the first page of the Recipe report occupies the entire Report window Each individual recipe in the report is displayed in a single page To view other pages use the page control arrows Fig 8 20 e If another Recipe report is open before selecting another it is cleared and replaced by the new Recipe report Any other reports System Configuration User Configuration or Exclusion Pattern previously selected are still open even though they are currently not visible Any selected reports are listed in the Window menu below the standard menu selections 1 4 allowing you to switch between reports You can also use CTRL F6 or CTRL TAB to switch between reports To display two or more reports at the same time select Tile Horizontally Tile Vertically or Cascade from the Window menu e To close a report window without leaving the Report application click on Close in the tool bar at the bottom of the Report window Fig 8 20 343153 Rev B 5 97 8 18 Surfscan 6200 Operations To
18. Choose the local database and select OK A progress bar indicates the repair has begun When done the following dialog box should be displayed MicrosoftAcceess OK heip Figure 8 4 Database Repair If any other result is displayed contact Tencor Service Select Repair from the File menu again Choose the remote database and select OK Because this database can become quite large possibly hundreds of megabytes repairing might take a while tens of minutes Again if any result other than success is displayed contact Tencor Service Select the Exit from the File menu Double click on the Surfscan Application icon in Program Manager to restart the Surfscan application If you have any doubt regarding the success of the repair contact Tencor Service 343153 Rev B 5 97 Working with the Database 8 9 8 3 BACKING UP AND RESTORING THE DATABASE The database Backup and Restore operations make use of the Microsoft Backup for Windows utility MS Backup allows full incremental and differential backups of any files on your system It uses setup files to save lists of files selected for backing up as well as settings and options This section describes how to use MS Backup to back up the Surfscan database For more information on backup strategies setup files backup catalogs and so on see the MS DOS User s Guide To start the Backup Restore utility Choose the Backup Restore icon from the Database Menu
19. Displays instrument status 343153 Rev B 5 97 4 10 Surfscan 6200 Operations When you display a haze map and histogram the instrument displays haze data in the summary a haze map and the histogram displays the distribution of haze values F Haze Li LPD Ce Wea Alte a Map i DILI ajes DWN El aea gt wah B Scraboh nik Sumi ol Aji Galette _ Recon IBSPE Uieil Brina Haze Fange Erih Cari We oo Haze Bin Splits Haze Histogram GDh iia Figure 4 7 Haze Results in Scan Window Note that the haze range bin splits are listed in the lower part of the summary 4 3 1 MENUS AND COMMANDS In the Scan menu bar choosing ID Cass Start Auto Home or Save is the same as pressing the key of the same name on the instrument keypad Recipe XY Print and Display are pull down menus Display 1 Short Summary 40 col Figure 4 8 Scan Application Menus The Recipe menu allows you to load a new recipe view and modify the current recipe create a new recipe save a recipe set user IDs delete a recipe enter remote mode SECS 343153 Rev B 5 97 Scanning 4 11 II Communications Option required enter the Lot ID extend the puck for inspection and cleaning and exit the Scan application For details on recipes see Chapter 5 Recipes The XY menu provides map rotation and reference point definition X Y Coordinates Option required and allows you to save map data in Tencor File Format TFF Note
20. From value Area From Max Size True Dynamic Range Threshold Figure 5 5 LPD Ranges The Area From parameter determines the LPD size at which the instrument classifies areas The instrument classifies LPDs at or above the Area From value as an area Area From defaults to Max Size Fig 5 6 but can be increased if necessary Fig 5 7 LPDs larger than Area From are classified as areas Area From Max Size LPD collected Threshold LPDs below threshold are not counted Figure 5 6 Area From Equals Max Size 343153 Rev B 5 97 Recipes 5 13 Area From gt Max Size LPD below Area From is collected Max Size Figure 5 7 Area From Greater Than Max Size Using a combination of gain and threshold settings you can scan for a broad or narrow band of LPDs depending upon your requirements Figure 5 8 shows choosing a gain and threshold to match the LPD range you want expressed as LPD cross section in um 1000 250 100 50 10 r 10 i 25 c os 3s 1 2 13 0 5 a N a 0 427 n Of 001 0 022 0 005 0 001 0 0043 0 00086 0 0001 0 00022 R 0 00011 Gain 1 2 3 4 5 6 7 8 Surfscan 6200 Figure 5 8 Gain versus Cross Section for the Surfscan 6200 343153 Rev B 5 97 5 14 P S L Diameter Surfscan 6200 Operations The range of interest determines the Gain and Threshold combination to use For example if you
21. The Microsoft Backup window appears 5 files 432 474 bytes selected for backup 1 catalog file 13 888 bytes will be added 1 1 44 Mb 3 5 estimated diskettes needed Omin 10 sec estimated backup time Figure 8 5 Backup Window NOTE When backing up to floppy diskettes be sure to label each backup diskette with the date and a sequential disk number Each 3 25 in disk stores up to 1 4 MB of data 343153 Rev B 5 97 8 10 8 3 1 Surfscan 6200 Operations BACKING UP DATA You can back up the database to floppy disks or to a network drive if available To back up the database l 2 343153 Rev B 5 97 In the Backup window click on Backup in the button bar below the menu bar Click on the Backup To pull down button and select the appropriate destination drive for your backup as follows e If the destination is a floppy drive choose A 1 44 MB 3 5 in e If the destination is a network drive choose MS DOS Path then type the full path of the network destination into the second text field below Select Open Setup from the file menu and select the file SOVABK SET in the CA SOVA DATABASE directory Click OK or press ENTER The main Backup window reappears with updated information to the right of the Select Files button This information includes an estimate of how many floppy diskettes you will need and how long the backup will take Select Full from the Backup Type pull down list under the Select Files bu
22. To cancel one substrate scanning Click Home or press HOME 343153 Rev B 5 97 4 2 5 LOT SUMMARY The instrument displays a Lot Summary when all substrates in a cassette have been scanned or when you home the cassette iz Tuesday September 15 1992 8 49 25 AM Rep ID DEMO Lot fen meyy Lok J cancel Print goc IL LPO LPO Area A Tot Scratch Scr_Tot Sum Ot H_Ran H_Avg Count fom Count mima Count Lifcts 1025 6 12 130 11 1155 1023 1155 1023 441 422 1025 786 80 324 41 Figure 4 5 Lot Summary Window The Lot Summary lists LPD counts area counts scratch counts totals and haze data for each substrate and lists statistical data for the lot You can enter a Lot ID and Wafer IDs as necessary Click on the field or press NEXT to select the field to enter NOTE The Lot Summary does not appear when the Suppress Lot Summary Display option is set in the User Configuration dialog box To exit the Lot Summary Choose Print 80c to print using 80 columns or choose Print 132c to print using 132 columns These commands close the Lot Summary window Or choose OK or press ENTER to save the Wafer IDs and Lot ID and close the Lot Summary Or choose Cancel to close the window without printing the Lot Summary 4 3 USING THE SCAN WINDOW The Scan window is the control panel for scanning and analyzing substrates You can use the menu bar or keypad to catalog and scan substrates in a cassette and to print save and display
23. and other features that slow print speed 11 2 1 CHOOSING A PRINTER Reports from the ViewLog application are printed to the current default printer unless another printer is selected from the Print Setup dialog box NOTE To print a system log report a printer that supports graph ics mode must be selected To select a printer 1 Choose Print Setup from the Report menu The following dialog box opens currently HP Lasenlet 451 451 MX on tennet pub4s LPT1 OO Specific Printer HP Laserjet 451 451 HX on tennet pub4si LPT1 Onentation Paper hs Portrait Size Letter 8 1 2 x 11 in Landscape Source Figure 11 5 Print Dialog Box 2 Click on the pull down list under Specific printer Select one of the following e HP LaserJet e HP DeskJet and DeskJet Plus e HP PaintJet and PaintJet XL e Generic Text Only Best print spooling speed can be achieved when the default printer is a fast continuous tractor feed printer capable of 66 lines per page If available set the default printer to Generic Text Only Click the Setup button to verify that printer settings are as follows 343153 Rev B 5 97 ViewLog 11 5 Printer Text Only Paper Size Letter Paper Feed Continuous No Page Break Disabled Printer Codes all blank 11 2 2 VIEWING A REPORT You can view a report on the screen by opening the Viewlog Report window To view a report 1 Choose View and Print from the Report menu 2 Choose
24. lt sorted failed wafers unload to the left cassette passed wafers unload to the right cassette This parameter has no effect for other cassette configurations On or Off When On the instrument automatically aligns the wafer map to the feature specified in the User Config uration dialog box Not implemented Automatic printing parameter Set to On to allow automat ic printing Off to disable To select detailed print options choose the SEL button Recipes Configuration Parameter Auto Save substrate name 5 3 4 SORT PARAMETERS 5 9 Description Automatic save parameter Set to On to allow automatic saves Off to disable To select detailed save options choose the SEL button Calibrated substrate type and thickness To select a sub strate type choose the SEL button The dialog box lists the substrate types and thicknesses currently available Use the cycle control to select an available film thickness T Tencor supplied calibration curve C customer supplied calibration curve Sort parameters provide pass fail limits Sort Parameter LPD Count LPD cm Bin limit Area Count Area mm Scratch Count Scratch mm Sum of All Haze Average Haze Deviation Description The maximum number of light particle defects LPD allowed 0 to 99999 Number of light particle defects allowed per square centi meter Defaults to measurable wafer surface area total LPD Off or On Set t
25. the operator must press START for each wafer scan See scan sequence Scan sequence The order in which wafers in a cassette will be scanned Select To highlight an item by clicking it with the mouse or by using the keypad Select button A button within dialog boxes that when selected opens another dialog box Selection bar The highlighted bar or dotted rectangle appearing in a dialog box that indicates the option or command button that will be selected if you press the ENTER key The selection bar can be moved by using the keypad Slot selector A control displayed in Cassette Catalog window that allows you to choose slots for scanning Sort In the scan application sort parameters specify the pass fail limits When two cassettes are used substrates can be sorted to appropriate cassettes SPC See Statistical Process Control Standard deviation A measure of the spread of the process output or the spread of a sampling statistic from the process 343153 Rev B 5 97 Glossary Glossary 9 Statistical control A condition describing a process from which all special causes have been removed evidenced on a control chart by the absence of points beyond control limits and by the absence of non random patterns or trends within the control limits Statistical process control The use of statistical techniques such as control charts to analyze a process or its output so as to take appropriate actions to achieve and maintain a state o
26. 14 5 Standard curve calibration 6 17 START key 2 4 Statistical Process Control Option 14 1 Statistical process control tutorial 14 6 Status application 12 9 STOP key 2 4 Substrate and film calibration 6 4 Substrate calibration curve 6 13 Sum of all defects 4 15 Surfscan SWIFT Station 7 13 System configuration 7 19 Analog board type 7 21 Debug 7 21 GEM version 7 21 Laser type 7 20 Machine type 7 20 Maximum haze at gain 7 21 Model number 7 20 Index Printing 8 15 Processor type 7 20 Sampling rate 7 20 SECS 7 21 Wafer handler 7 21 System log Event description 11 13 Reports 11 4 Selecting events 11 8 Sorting 11 2 Viewing 11 2 System menu 3 2 System Sign on Banner 7 3 System status 12 9 Printing 12 10 System version 12 9 T Tencor File Format 7 12 Database IDs 7 14 Event size format 7 13 Extra precision 7 13 Filenaming 7 12 Setup 7 12 Standard precision 7 13 Text printer selecting 7 22 TEXTOUT EXE 7 12 TFF Filename as the Wafer ID 7 14 Threshold MicroView 4 29 TIF Tagged image file format 7 24 Trend chart 14 7 Tutorial statistical process control 14 6 U UNDO key 2 3 User accounts Adding or changing 7 15 Deleting 7 18 Testing 7 18 User accounts managing 7 15 User configuration dialog box 7 2 User configuration printing 8 15 User IDs entering 4 13 User name Defining 7 16 Select by 11 9 User name and type 12 9 V Video printer 7 22 Viewing files 7 12 ViewLog utility 11 1 Index 5 ViewLo
27. 3 To change the number of bins enter the number of bins to use in the Number of Bins box The color bar and bin fields automatically change as necessary a Lo Pa Lo a aE oo aE oo Lo as T r r r OEE a e im Lo Lo f E 8 30 999 g Scratches and Areas Bin Spht Sequential p 3 ma jal E wn T El T i Figure 5 10 Defect Histogram Bin Splits Dialog Box 4 Change bins splits using any or all of the following methods e To reset bins to default values choose the Default Bin Splits button All bins and limits are set to default values e To enter values directly Click on the To field of the bin to change Enter a value When entering values into the To fields be sure to follow the rules for bin boundaries Or double click the left mouse button over the color bar at the bottom of the dialog box The pointer changes shape when over a bin boundary Move the pointer over the boundary you wish to change Press and hold the left mouse button and move the boundary Release the button when the boundary is set Change boundaries for all bins you want to change When complete click the right mouse button 5 Select the Count Range Auto Fixed 10 Fixed 30 Fixed 100 Fixed 300 Fixed 1000 Fixed 3000 or Fixed 10000 The Fixed count ranges set the histogram Y axis to the fixed value The Auto count range automatically scales the histogram Y axis to the maximum count 6
28. Choose Import Export from the Procedure menu The application displays the Calibration Tables Import Export dialog box Type the name of the export file in the To File field and choose Export 4 Choose Exit to close the dialog box 343153 Rev B 5 97 Calibration 6 27 6 5 CASSETTE CALIBRATION This section describes calibrating the instrument for the cassettes used by the instrument The cassette calibration procedure allows you to calibrate for a cassette During calibration the instrument measures the movement required to load substrates from slots that are second from the top and second from the bottom The instrument moves the puck toward the substrate in upper slot with vacuum on The indexer then lowers the wafer toward the puck When the instrument senses a reduction in vacuum pressure indicating contact with the substrate the instrument records the number of moves taken The instrument moves the puck to the lower slot and repeats the test If cassette calibration fails check the following e The locator is correctly installed e The cassette is firmly seated on the locator e The substrates do not touch the rails or back of the cassette e Insome cases it might be necessary to move the substrates 2 to 3 mm approximately 1 8 in toward the front of the cassette to insure that they lie flat NOTE Chapter 3 Maintenance in the Surfscan 6100 6200 Ref erence Manual describes Surfscan 6100 6200 mainte nance proc
29. Corporation DECnet PATHWORKS and VAX are trademarks and DEC is a registered trademark of Digital Equipment Corporation NetWare and Novell are registered trademarks of Novell Inc U S PATENTS This instrument is protected under the following patents 4601576 4766324 4641967 4378157 and patents pending 343153 Rev B 5 97 OPERATING SAFETY The Surfscan 6200 contains an Argon Ion laser rated for 30 mW with a maximum operating power of 0 5 W A Safety interlock is provided on the laser scan circuit that automatically turns off the laser if the scanning mirror fails to operate Do not defeat the function of this safety feature CAUTION Use of controls or adjustments or performance of procedures other than those specified herein might result in hazardous light exposure Caution labels located on the front and back sides of the scan unit are reminders of the laser hazards See label reproductions below DANGER DANGER LASER LIGHT LASER LIGHT DANGER LASER LIGHT WHEN OPEN WHEN OPEN WHEN OPEN AND INTERLOCK DEFEATED AND INTERLOCK AVOID DIRECT EXPOSURE TO BEAM DEFEATED AVOID DIRECT AVOID DIRECT EXPOSURE EXPOSURE TO BEAM TO BEAM Pursuant to the Regulations for the Administration and Enforcement of the Radiation Control for Health and Safety Act of 1968 pertinent to laser products a document describing this product has been filed with the Consumer Industrial Products Branch HFZ 312 of the Division of Rad
30. Dialog Box Early Warning System Panel Dialog Box Alarms Dialog Box Preferences Dialog Box System Status System Versions Tiled Windows Cascaded Windows SMEZ Definition Example SMEZ Definition Example Rotated 45 Degrees Moving the Cursor to an LPD Reference Coordinate Dialog Box Defined X Y Reference Point Reference Coordinates Dialog Box Applying User Coordinates to the Wafer Map SPC Editor Set SPC Limits Dialog Box Calculate SPC Limits Dialog Box SPC Display Window Slot Processing Haze Range Throughput SEMI Substrate Thickness Calibration Curves used for Diameter and Cross Section Calibration Curves used in Defect Sizing X X 11 5 11 6 11 7 11 7 11 8 11 9 11 10 11 11 11 12 12 2 12 3 12 4 12 6 12 7 12 8 12 9 12 10 12 10 12 11 12 12 12 15 12 15 13 3 13 3 13 4 13 5 13 5 14 2 14 2 14 3 14 5 6 10 6 19 6 20 343153 Rev B 5 97 XX Table 7 1 Table 7 2 Table 7 3 Table 10 1 Table 12 1 Table 15 1 Table 15 2 Table 15 3 Table 15 4 Table 15 5 Table 15 6 Table 15 7 343153 Rev B 5 97 TFF Format Standard Precision TFF Format Extra Precision Date Time Encoded Filenaming Approximate Storage Space for Surfscan Data Default EWS Function Values Patlite Scan States Patlite Cassette States Patlite Cassette Done States Patlite Error Message States Patlite Error Message States Patlite GEM Link States Example Patlite ASCH File Entries Surfscan 6200
31. If the primary recipe data is defects set the Display Option to Defect Haze 343153 Rev B 5 97 5 22 Surfscan 6200 Operations 5 6 SELECTING AUTOMATIC OPERATIONS This section describes the automatic operations available through a recipe including e Automatic sorting of failed wafers to the left cassette e Automatic alignment of the wafer to a feature e Automatic printing of summaries or the screen e Automatic saving of summaries or wafer maps 5 6 1 AUTOMATIC SORTING OF FAILED WAFERS The instrument can automatically sort failed wafers to the left cassette and passed wafers to the right cassette For a discussion of pass fail sorting see Section 6 7 Selecting Sort Options To enable automatic sorting 1 Set the recipe Cassette parameter to the sorting configuration L lt R gt lt 2 Set Sorting to On 3 When scanning the cassette of wafers must be loaded on the right indexer and an empty cassette on the left indexer Passed wafers unload to the right cassette failed wafers unload to the left cassette 5 6 2 AUTOMATIC WAFER ALIGNMENT The instrument can automatically align a wafer map to a flat or notch as specified in the Standard Orientation Selection dialog box Requires X Y Coordinates Option See Chapter 13 X Y Coordinates Option When Auto Align X Y is On the instrument automatically aligns the wafer map after each scan 343153 Rev B 5 97 Recipes 5 23 5 6 3 AUTOMATIC PRINTIN
32. MicroView cursor is a vertical line having a small square at its base and a circle that that slides up and down the cursor to indicate the defect amplitude or approximate size When the cursor is at the base of a defect the circle moves to the top of the defect and the information box displays the approximate size and coordinates of the defect Approximate defect coordinates an 1 Approximate me I defect size Top of defect Base of defect a i aL M a neni Iel L Figure 4 22 MicroView Cursor To display the Micro View cursor In the Panning window press MICROSCOPE To move the cursor Using the mouse 343153 Rev B 5 97 Move the mouse left or right to move the cursor along the MicroView X axis Move the mouse up and down to move the cursor along the MicroView Y axis Using the arrow keys 1 Press lt or gt to move the cursor along the MicroView X axis 2 Press T or Y to move the cursor along the MicroView Y axis NOTE When displaying different views of the MicroView remember that the cursor moves along the X and Y axis of the MicroView not in the X and Y directions of the screen In a left view for example and gt move the cursor along the MicroView X axis which is top to bottom on the screen and 1 and J move the cursor along the MicroView Y axis which is left to right across the screen To move the cursor to the nearest defect within range Click the mouse but
33. Operations e Data can be generated automatically by curve fitting for nitride and oxide films e Data can be collected by the customer using calibration scans Sample wafers can be scanned using the Calibration application to obtain scattering efficiency measure ments The calibration curve window displays the current calibration curve and any recorded measurement points The curve can be customized as needed e Data can be obtained by the customer by scanning calibration wafers using the Scan application Points on the curve can be added deleted or changed using the calibration curve window To create a substrate calibration curve you must add the substrate name and film thickness to the database Initial substrate calibration curves match the instrument standard curve for bare silicon 6 2 1 USING SUBSTRATE AND THICKNESS RECORDS Use the Substrate Type and Film Thickness dialog box to create a new substrate calibration curve review or edit an existing substrate calibration delete a substrate or measure a sample wafer for a given substrate and PSL diameter To import or export substrate records use the Import Export action in the Procedure menu NOTE Where possible the Database Export Import utility should be used to import and export substrate records The Cal ibration Export Import action uses a different format than the Database utility To open the Substrate and Film Thickness dialog box 1 Choose PSL Spheres on Sub
34. P N 175325 old analog board P N 223670 newer analog board Determines wafer handling method Standard SMIF Robotic or Alt Robotic Cassette indexer configuration None Left Right or Left Right Chooses the maximum haze range for Gain I 50000 ppm or 100000 ppm Selects the GEM version GEM 92 or GEM 93 Not present if SECS Option is not installed See Chapter 10 SECS Option in the Surfscan 6100 6200 Reference Manual and the Surfscan 6XX0 SECS Interface Man ual for details The Options group provides additional configuration settings as listed below Option Juggler SECS Removable Disk Streaming Tape Debug Description Enables the software Juggler utility Not implemented Enables the optional Semiconductor Equipment Com munications Standard SECS interface Not present if SECS Option is not installed See Chapter 10 SECS Option in the Surfscan 6100 6200 Reference Manual and the Surfscan 6XX0 SECS Interface manual for details Enables the optional removable disk accessory Not implemented Enables the optional streaming tape accessory for back ing up and restoring data Not implemented in the current release The default is Off The Debug option is used by Tencor Instruments field service personnel When Debug is On the instrument displays debug messages when errors occur 343153 Rev B 5 97 7 22 Surfscan 6200 Operations 7 11 SETTING PRINTER CONFIGURATION Instrument
35. Process Control Option 14 3 4 To save the SPC definition choose Save As from the File menu The SPC Editor displays the File Selector dialog box 5 Enter anew SPC data filename and choose OK To edit an SPC file 1 Start the SPC Editor by clicking on the SPC Editor icon in the Database menu or by choosing Editor from the SPC Display window The SPC Editor dialog box appears 2 Choose Open from the File menu At the File Selector dialog box choose the file to open Change settings as required 4 To calculate limits select a data category option from the group at the left of the dialog box and choose Calculate Limits from the Limits menu SPC displays the Calculate SPC Limits dialog box Total Points First Point Last Point Figure 14 3 Calculate SPC Limits Dialog Box Enter the first point and last point to use in the limit calculation and choose OK See Section 14 5 SPC Tutorial for details on limit calculations 5 To save the new settings choose Save from the File menu 343153 Rev B 5 97 14 4 Surfscan 6200 Operations 14 2 EXTRACTING DATA FOR SPC To analyze wafer data using statistical process control you must select the wafer records from the database extract the records and associate the records with an existing SPC data file The extracted data replaces any existing wafer data in the SPC file To extract data from the database for SPC analysis l 343153 Rev B 5 97 Open
36. SCREENS The instrument provides a print screen feature that allows you to print either the full screen or the active window To print the screen using the default print settings Press PRINT To change the default print screen setting 1 Press PRINT twice The Print Screen dialog box appears 5 Choose the print setting to use Print Screen Option Description Full Screen Normal Print the screen using normal colors Full Screen Switch B W Print the screen switching black and white Active Window Normal Print the active window using normal colors Active Window Switch B W Print the active window switching black and white To save the current settings check the Save As Default check box Choose OK to print the screen or window using the specified settings NOTE When you choose Switch B W for a color printer only black and white colors are switched Yellow for example does not change When you choose Switch B W for a black and white printer all colors are reversed 343153 Rev B 5 97 Getting Started 3 1 3 GETTING STARTED This chapter provides basic startup procedures for the instrument including e Powering up the instrument e Logging on to the instrument e Starting Scan e Quitting from an application e Logging off the system e Setting up the system for first use e Using the DOS shell advanced use e Monitoring disk and database space To perform wafer scans or other instrument functions yo
37. TELE aR a A Figure 4 20 MicroView 343153 Rev B 5 97 4 10 2 CHANGING MICROVIEW DISPLAY OPTIONS You can change the view and the display format and you can set the view area to full screen or to within the wafer map section of the Scan window To change the MicroView view Press 1 through 7 to change the view as described in the following table View Description 1 Front view angled and elevated This is the initial default view Left view elevated Front view elevated Right view elevated Top view looking down the Z axis Left view looking down the X axis NY DO A A WW N Front view looking down the Y axis To change the MicroView display format Press NEXT to change the MicroView format from color to wireframe or from wireframe to color Wireframe rendering A wireframe displays more quickly on the screen 343153 Rev B 5 97 Scanning 4 27 To view the MicroView in full screen Press ZOOM To exit full screen view press ZOOM again or choose CANCEL to exit the MicroView To exit from a MicroView If the instrument is displaying a MicroView click the right button or press CANCEL to exit the MicroView display In the Panning window click the right button or press CANCEL to exit zoom mode To return the substrate to the cassette press HOME 4 10 3 USING THE MICROVIEW CURSOR Using the MicroView cursor you can obtain the approximate size of defects displayed in the MicroView The
38. achieve statistical control the condition of describing a process from which all special causes have been removed evidenced on a control chart by the absence of points beyond the control limits and by the absence of non random patterns or trends within the control limits The benefits of a successful statistical process control program are e predicting out of control conditions before they occur e making decisions based upon data rather than best guesses e preventing the fire fighting mode e providing a systematic approach and a pro active mode of operation e providing constant and rapid response to line problems e enabling continuous improvement A successful SPC program enables you to study the history of a process learn from your mistakes and solve problems more quickly 14 5 2 CONTROL CHARTS The type of control chart you use to track a process depends upon the type of data you are collecting and the sample size There are two categories of data types used to describe characteristics of a semiconductor manufacturing process attributes and variables 343153 Rev B 5 97 Attributes are characteristics of the process that can be counted and that describe non con formities defects or nonconforming articles defectives For example the number of failed die per wafer number of particles per wafer or percentage of failed wafers per lot are attributes Attributes are counted using a discrete scale and are described using Po
39. and is running wafers The following entries in the ASCII file satisfy as closely as possible the above require ments Note that the order of these entries is important Table 15 7 Example Patlite ASCII Flle Entries Line in ASCII File Explanation NoScan NoError Clear Yellow FlashSlow IF Scan is not running AND no error condition is currently displayed on the screen or has been sent to the host THEN clear all lights and flash the yellow one ScreenMsg Clear Red FlashSlow IF any error message is currently being displayed on the HostMsg Clear Red FlashSlow screen OR any error message has yet to be acknowledged by the host THEN clear all lights and flash the red one Note that since these two entries handle ALL possible error conditions all remaining entries effectively specify NoError for the ErrorMessageStatus 343153 Rev B 5 97 15 8 Surfscan 6200 Operations Table 15 7 Example Patlite ASCII Flle Entries continued Line in ASCII File Explanation Complete Clear Yellow FlashSlow IF the Lot Summary is currently being displayed THEN clear all lights and flash the yellow one Ready Clear Green FlashSlow IF Scan is idle OR has a wafer on the puck OR is WaferInSystem Clear Green FlashSlow performing an operator intensive function THEN clear Manual Clear Green FlashSlow all lights and flash the green one Running Clear Green On IF Scan is in some normal phase of the wafer scan process THEN c
40. bar To set panel display options Choose Panel Display from the Variables menu EWS displays the Panel dialog box 7 EARLY WARNING SYSTEM PANEL Display Type Points Data Display Interval Continuous gt No Change Steps gt Histogram Days No Change Bidirectional Hours a O Unidirectional Minutes Trend O No Limite gt Seconds No Trend gt No Change No Change Trend No Change Panel 1 Figure 12 5 Early Warning System Panel Dialog Box Choose default options as required and click OK to accept the changes or Cancel to ignore the changes Choose Clear to set all panel display options to default values 343153 Rev B 5 97 12 8 Surfscan 6200 Operations 12 1 6 EWS CONTROLS You can select preference and alarm settings for EWS and you can clear all or selected functions and data values 12 1 7 ALARMS EWS can alarm when a limit or warning level has been exceeded The alarm can be a beep flashing EWS driver icon or both To set alarms 1 Choose Alarms from the Variables menu to display the Alarms dialog box FA Flash Beep Alarm On Out OF Limits Values Alarm On Warning Levels Alarm On Projected Limits Alarm On Projected Warnings Figure 12 6 Alarms Dialog Box 2 Select alarm options and choose OK to enable selected alarms You can choose to have EWS beep flash the EWS driver icon or both for signaling an alarm Alarm Option Description Alarm On Ou
41. box listing the current wafers by date time and ID Please choose one of the following two maps Thu Jan 05 1995 14 28 45 ID Thu Jan 05 1995 14 44 40 ID for comparison with the map you have selected _cencet_ Figure 9 12 Choosing the Second Map Choose one of the current maps to compare to the map selected in the Review window 343153 Rev B 5 97 Browser 9 11 9 5 DELETING SUMMARIES AND MAPS You can delete summaries and maps from the database by using the Select dialog box or Review window Before deleting wafers from the database export any wafers that you might need in the future See Chapter 8 Working with the Database for details on backing up the database See Chapter 10 Export and Import for details on exporting wafers You can delete selected wafer records by choosing the wafers to delete at the Select dialog box and then e Using the Select dialog box Delete button e Using the Select dialog box Select button to open the Review window and then using the Delete or Delete All buttons You can delete all wafer records in the database by choosing Delete ALL Summaries and Maps from the Select dialog box CAUTION Before deleting Summaries and Maps be sure that any records you wish to save have been exported or backed up To delete all wafer records from the database 1 Choose Select from the Database menu The Select dialog box appears 2 Choose Delete ALL Summaries a
42. clicking on an item MicroView An analytical tool that displays the topography of a substrate s surface and that reveals the characteristic light scattering distribution often associated with contaminants MicroViews can be rendered in color or wireframe and can be viewed using different perspectives Microsoft Windows A graphical user environment developed by Microsoft Corp that uses windows to present information and a pointing device usually a mouse for user interaction On screen keypad The miniature keyboard displayed on the screen that is used for entering alphabetic and numeric data with the mouse One Wafer scan A scan mode in which only one wafer is selected for scanning Also called Direct Access mode Option group A group of fields check boxes option buttons or command buttons found on dialog boxes Out of control action In statistical process control a list of steps to take when a process 1s flagged as out of control The aim of these actions is to bring the process back into control Panning cursor The cursor that allows you to select an area of the magnified wafer map to view 343153 Rev B 5 97 Glossary Glossary 7 Panning window The window that appears at the upper left of a magnified wafer map and that allows the user to specify the general area of the wafer to magnify See panning cursor Pareto chart A plot of data that has characteristics of the data on one axis and the frequency of those character
43. describes restoring the database When restoring from floppy diskette each backup disk must be supplied in the order the floppies were used for backup If necessary the volume label of a backup disk can be examined to determine the sequence of disks by their date and time of backup CAUTION When you restore the database all data in the current database will be removed Essential data such as system calibration tables recipes and user accounts should be saved before restoring Any wafer maps summaries and system log entries you want to keep should be saved also You can save data by backing up the entire database or exporting selected database entries After restoring the database you should verify instrument calibration To restore the database 1 Iffloppy diskettes were used for the backup insert the first diskette from the backup set 2 Inthe Backup window click on Restore in the button bar below the menu bar Backup Set Catalog L_ Ccs0104D FUL 1 7 4795 10 10AM Restore From Restore To Driginal Locations E Restore the selected files to the drive and directories Where they were when originally backed up Restore Files B gre _Select ries Figure 8 10 Restore Window 5 files 432 474 bytes selected for restore 3 Choose the source drive containing the backup from the Restore From pull down list 343153 Rev B 5 97 Working with the Database 8 13 4 Choose Retrieve from the Cata
44. displays the Lot Summary at the end of the scanning process 4 2 3 SCANNING SELECTED SUBSTRATES The following procedure can be used to scan substrates selected in the Cassette catalog All selected substrates in the cassette can be scanned in sequence To scan only one substrate see Section 4 2 4 Scanning One Substrate Direct Access 343153 Rev B 5 97 Scanning 4 7 To select specific substrates to scan 1 Press CASS to catalog the cassette NOTE If pressing cass does not catalog the cassette lift the cassette off the indexer and then return it to the indexer This resets the cassette status switch and all slot positions should show question marks Press CASS to catalog the cassette 2 Click on the slots to process Or press NEXT to highlight the Cassette catalog use T and J to move to a slot and press SEL One or more slots can be selected using this method 3 Press START to begin the scan 4 2 4 SCANNING ONE SUBSTRATE DIRECT ACCESS The following procedure can be used to scan one substrate from the cassette To scan one substrate direct access 1 Press CASS to catalog the cassette 2 Click on the slot to process Double click on the slot to select the slot and start the scan Or press NEXT to highlight the Cassette catalog use T and J to move to the slot and press SEL 3 Press START The instrument displays Direct Access in the status box and scans the selected substrate
45. exported as a set Equidistant sampling EDS collector uniformity data XY alignment data and haze calibration data To select calibration tables for export Click on the check box at the left of the Calibration Tables row in the Selected Items to be Exported section see Fig 10 1 10 5 8 SELECTING CONFIGURATION TABLES System and User configuration tables can be selected for export as described in this section To select System Configuration data for export Click on the check box at the left of the System Config row in the Selected Items to be Exported section see Fig 10 1 To select User Configuration for export Click on the check box at the left of the User Config row in the Selected Items to be Exported section see Fig 10 1 343153 Rev B 5 97 ViewLog 11 1 11 VIEWLOG This chapter describes viewing printing and deleting entries from the System Log The Database ViewLog utility allows you to view all or selected entries to format the log listing to print log reports and to delete entries from the log The instrument stores the system log entries events specified in the User Configuration dialog box See Chapter 7 Setting Up the System NOTE It is good practice to regularly view the system log and delete unwanted entries This keeps the database smaller and more manageable To start the ViewLog utility Choose the ViewLog icon from the Database Menu The instrument displays the System Log w
46. listed in the System Log Description field Log Message Description field contains Caution Error message Error Message for the most severe error Mode Change New mode application name or DOS command line New Recipe Old recipe gt new recipe Recipe Change Name of recipe viewed or changed Status Status message The least severe error System Configuration blank System Startup System startup information The user name field contains the last logged user when Last User Name for System Startup is checked in the User Configuration dialog box User Configuration blank User Logoff User name User Logon User name If logon is through the Setup application this field lists the current user name and logon user name separated by an arrow for example Analyst gt Opl Warning Error number in parentheses and warning description For example 1000 No summaries found meeting specified criteria 343153 Rev B 5 97 Diagnostic Tools 12 1 12 DIAGNOSTIC TOOLS This chapter describes Surfscan 6000 series diagnostic tools Diagnostic tools are avail able to users having Analysis Manager access The tools include e Early warning system e Status application e Scribe mark exclusion zones SMEZ 12 1 EARLY WARNING SYSTEM This section describes the Early Warning System EWS EWS allows you to monitor and record instrument performance and to set alarm limits for functions EWS can monitor the following instrument func
47. match is found the corresponding lt LightCondition gt is sent to the Patlite decoder box If no file entries match the current Surfscan status no changes to the Patlite are made Patlite Option 15 7 e This syntax does not easily permit the illumination of more than one light at a time The beeper can be turned on in conjunction with a light only if a separate status can be identified for which the beeper must be turned on e If required an extension to this syntax can be made that easily permits the illumi nation of more than one light However at the present time the illumination of more than one light at a time or support for a beeper is not required 15 3 2 AN EXAMPLE The following example demonstrates how to configure version 3 2 software for the Patlite REQUIREMENTS For this example consider that the requirement for lighting corresponding to instrument States 1s as follows Light Red flashing Red steady Yellow flashing Green flashing Green steady IMPLEMENTATION Description Indicates failure abort immediate assistance 1s required Indicates the equipment is not fully capable an alarm has been acknowledged but not corrected Indicates the alarm is unacknowledged and needs assistance for example during unload cassette completion or run PM and so on Indicates the equipment is capable of performing all functions but no product is running Indicates that the equipment is fully capable
48. out of control The aim is to bring the process back into control Print out charts and annotate them with historical information For example when was the last preventive maintenance what was done to bring a process back into control when were wafers broken in the system and so forth Use the charts to target problem areas Run short loop experiments to attempt to determine what reduces particles Patlite Option 15 1 15 PATLITE OPTION 15 1 INTRODUCTION A Patlite provides a highly visible indicator of a tool s status The multi light device can be used to signal that an instrument is in production or the reason that it 1s not The current Patlite implementation allows for customer definition of the lighting corre sponding to specific instrument states This approach involves some relatively simple hardware and new Surfscan software which translates instrument states into commands to the new hardware 15 1 1 SYSTEM CONFIGURATION A check box appears in the System Configuration titled Transmit Patlite Messages When checked the Patlite will be lit corresponding to the instrument s state 15 1 2 LIGHTING OPTIONS The implementation allows for any of the three lights red yellow and green to be set independently Lights can be tuned on off or set to flashing All lights can be turned off simultaneously or cleared 15 2 STATUS INFORMATION AVAILABLE Selected portions of the current status of the machine are always ava
49. over a point Deletes a point When the cursor is exactly over a point allows you to delete or change the location of the point When the cursor is not exactly over a point allows you to add a point Displays a bounding box around the point to add delete or change Used to change between custom values and standard values as shown in the message box in the lower right of the Calibration Curve window To move the calibration curve cursor Move the mouse or press gt T V and SEL To add a point to the calibration curve iif 2 Move the cursor to the location on the curve to add the point Double click the left button or press ZOOM to enter edit mode The bounding box shows the limits for the point Move the mouse or press T or J to move the point up or down within the box Press ENTER to add a point at the cursor location You can define up to 13 points for a curve The delete point and change point procedures require that you position the cursor exactly over the point to delete or change To move the cursor exactly over a point first move the cursor close to the point then press T to move the cursor to the right or J to move the cursor to the left If you double click the left button or press ZOOM and the cursor is not exactly over a point the application enters Add a Point mode If you enter this mode by mistake press CANCEL to exit and try again To delete a point from the calibration
50. printer configuration consists of setting the printer s to use when printing text and graphics and for setting up your system for printing 132 column reports In addition to selecting printer devices you can choose to print screens to a disk file using the device independent bitmap BMP format or you can choose to print to a video printer For fast printing of system log reports the Windows default printer should be used See Section 7 11 3 Setting Up for Fast Printing of System Log Reports 7 11 1 SELECTING TEXT AND GRAPHICS PRINTERS The Printer Selection dialog box allows you to select a graphics and text printer The system prints wafer maps and screens on the graphics printer and prints summaries and reports on the text printer Where only one printer is available you can assign the same printer for text and graphics If a text only printer is selected for graphics wafer maps and screen printouts will not be printed When printing graphics the screen can be printed to disk as a bitmap BMP TIF or PCT file To set the default text and graphics printers 1 Open the System Configuration dialog box and choose the Printer button Setup displays the Printer Selection dialog box Text Printer Graphics Printer Epson Fx 65 Epson Fx 65 Epson Fx 850 Epson FX 650 Generic Text Only FILE HF DeskJet Plus Generic Text Only HP LaserJet INS HP DeskJet Plus HP LaserJet IIIlS1 PostScript HP LaserJet INS Figure 7 1
51. proves defective in material or workmanship within twelve months after delivery to Buyer except for optional printers If it is recognized that some components and accessories fail to give reasonable service for a reasonable period of time as determined solely by Tencor Instruments Tencor Instruments will at its election replace or repair them Tencor Instruments may at any time discharge its warranty as to any item by refunding the purchase price and taking back the item Unless Buyer shall inspect all items and within thirty days of delivery notify Tencor Instruments of any apparent defects discovered and shall return the apparently defective item transportation charges prepaid to the Tencor Instruments factory or service office if so directed Tencor Instruments shall have no liability hereunder The foregoing warranty and remedy are exclusive and Tencor Instruments shall have no other liability under any other warranty express or implied either in fact or by operation of law statutory or otherwise Tencor Instruments shall have no liability for special or consequential damages of any kind and from any cause arising out of the installation or use of any item TRADEMARKS Surfscan and the Tencor logo are a registered trademarks of Tencor Instruments Hewlett Packard and PaintJet are registered trademarks of Hewlett Packard Corporation Windows is a trademark and Microsoft MS DOS and Access are registered trademarks of Microsoft
52. record s to the Selected Values list lt Removes the selected Film record s from the Selected Values list gt gt Adds all Film records to the Selected Values list lt lt Removes all Film records from the Selected Values list 2 Select the Film records s to add to the export list using the Move buttons Use the horizontal scroll bars at the bottom of each list to see additional data 3 Choose OK to add these selections to the export list The number of selected Film records appears in the Count column to the right 343153 Rev B 5 97 Export and Import 10 13 10 5 5 SELECTING EXCLUSION PATTERNS Selected exclusion patterns can be exported to floppy disk or to the hard disk To select all Exclusion Patterns for export 1 Click on the check box at the left of the Exclusion Patterns row in the Selected Items to be Exported section see Fig 10 1 2 When you click on Export the following message box appears No Exclusion Patterns records selected Do you want to Export all records Figure 10 14 Export All Exclusion Patterns Message Box Click Yes to proceed or No to cancel To select Exclusion Patterns for export 1 Click on Select next to the Exclusion Patterns row in the Selected Items to be Exported section see Fig 10 1 The system displays the Select dialog box Possible Values Selected Values Exclusion Patterns Exclusion Patterns lt Default gt Atmel Be ee Loox J L_ cancer _ Figure 10 1
53. screen The access privileges assigned to a user account determine which functions or actions are available to each user and which icons are displayed in the System Menu When a user logs on the system determines the user s access privileges from the entered access code NOTE A user with Add Delete Modify Users privileges can modify or delete any user account User operators can create user operator accounts only User managers can create all types of accounts 7 8 1 ADDING OR MODIFYING USER ACCOUNTS Access to the instrument 1s controlled through user accounts Each account consists of a user name access code user type menu type and access privileges 343153 Rev B 5 97 7 16 Surfscan 6200 Operations To add a new user 1 Choose Add User from the Access menu to display the Add New User dialog box Add New User Type Menu Type Tencor Factory Tencor Service User Manager User Operator Figure 7 10 Add New User Dialog Box 2 Enter the user s name in the User Name field using the alphanumeric keypad User names appear at the bottom of System and Database menus 3 Enter the user s password in the User Access Code field This is the code that must be supplied by a user to log on to the instrument After being created a password cannot be viewed or changed If you are creating several user accounts note the password assigned to each account 4 Specify the user type either user manag
54. select and view System Config User Config or Exclusion Pattern reports 1 From the Select menu choose System Configuration User Configuration or Exclusion Patterns 2 The selected report is displayed in the Report window e By default the latest report occupies the entire Report window If another report of the same type is open before selecting another it is cleared and replaced by the new report Any other reports previously selected are still open even though they are currently not visible Any selected reports are listed in the Window menu below the standard menu selections 1 4 allowing you to switch between reports You can also use CTRL F6 or CTRL TAB to switch between reports e To display two or more reports at the same time select Tile Horizontally Tile Vertically or Cascade from the Window menu e To close a report window without leaving the Report application click on Close in the tool bar at the bottom of the Report window 8 4 2 PRINTING REPORTS Reports from the Report application are printed to the current default printer unless another printer is selected from the Print Setup dialog box NOTE To print a report a printer that supports graphics mode must be selected To select a printer 1 Choose Print Setup from the Print menu The following dialog box opens currently HP Lasenlet 451 451 HA on tennet pub4s LPT1 OO Specific Printer HP Lasewet 451 451 HX on tennet pub4si LPT1
55. start a scan 343153 Rev B 5 97 4 4 Surfscan 6200 Operations To enter a Lot ID 1 Choose Lot ID from the Recipe menu to display the Lot ID dialog box Please enter Lot ID LOTTEST Persistence Next scan only Until end of cassette All subsequent scans Figure 4 3 Lot ID Dialog Box 2 Choose a persistence setting Next scan only Until end of cassette or All subse quent scans 3 Enter the Lot ID and choose OK 4 2 SCANNING METHODS This section describes scanning methods The procedures below describe how to scan all substrates selected substrates or one substrate from a cassette The table at the end of this section tells you where to go in this manual to use advanced scan features and options The recipe sets the primary data of interest defect or haze and the initial data displays map or histogram or both For each scan the instrument displays the primary data and lists the results of the scan in the summary If the recipe specifies alternate data the data can be manually chosen for display The recipe also can specify automatic saving or printing of data When the last substrate in the cassette is scanned or when you press HOME the instrument homes the cassette and displays the Lot Summary window The Lot Summary screen does not appear if Suppress Lot Summary Display is enabled in the User Configuration dialog box The Cassette catalog lists the occupied slots of the cassette The c
56. system date and time See Section 7 11 1 Selecting Text and Graphics Printers for details on date and time encoding Serialized Lot ID naming The instrument forms the filename from the Lot ID recipe name and a serializing digit XLLLLRR TFF where X a Serializing character from A Z LLLL characters 3 7 from the current lot ID Defaults to characters RR the last two characters in the current recipe name Defaults to TFF the file extension Defaults to TFF User selectable The instrument asks for the TFF filename for each file saved 6 Choose the Event Size Format Standard TFF or Extra Precision If you want to review TFF files on the DataHub Data Analysis System Surfscan Revisit Station or Surfscan SWIFT Station save the files in the Standard TFF format The Extra Precision format increases the resolution of the X and Y size of events and reports haze summary information Event size values are stored either in 1 10 microns or nanometers When the event value is greater than 32768 Ox8000 the event size is specified in 1 10th of microns When the event value is greater than 32767 the event size is specified in nanometers and the high order bit is set to 1 To obtain the event size subtract 32768 Ox8000 from the event value NOTE The TFF specification requires that X and Y event size values are stored as unsigned 16 bit integers Table 7 1 and Table 7 2 define the range of Particle and Area values in a TFF f
57. the Display menu A check mark appears in front of the current display option Use arrow keys to highlight the display you want and press ENTER Choose automatic scan Press AUTO Enter the Lot ID Choose Lot ID from the Recipe menu Enter the ID in the Lot ID dialog box and click OK Or press MENU Press arrow keys to highlight the Lot ID choice Press ENTER Type the Lot ID and press ENTER Enter the wafer substrate ID Press ID or click ID in the menu bar The instrument displays the Wafer ID dialog box Type the ID for the substrate and press ENTER 343153 Rev B 5 97 4 12 To Extend the puck for cleaning Home the cassette Load a new recipe Print a substrate or lot sum mary Print the screen Save data manually Save a TFF file manually Start a scan 343153 Rev B 5 97 Surfscan 6200 Operations Do this Choose Extend Puck from the Recipe menu after removing the cassette You must be logged on as a User Manager Press HOME Choose Load from the Recipe menu Select the recipe and click OK Or press MENU Press arrow keys to highlight the Load choice Press ENTER Select the recipe name and press ENTER Choose an item from the Print menu Or press MENU use arrow keys to highlight the Print title and press down arrow to open the menu Use arrow keys to highlight the item to print and press ENTER Press the PRINT key No mouse equivalent Press SAVE The instrument saves maps
58. the current recipe name and equipment ID is set to SFS6x00 where x is 1 2 3 or 4 depending upon the instrument model or SFS6420 To assign database IDs to TFF file parameters 1 Choose Database IDs from the Config menu The program displays the ID selection dialog box Product Id Process Level Id Processing Equipment ld ok J cance Figure 7 9 Database ID Selection Dialog Box 2 Choose one ID for each TFF parameter An ID can be assigned to only one parameter at a time 3 Choose OK 343153 Rev B 5 97 Setting Up the System 7 15 7 8 MANAGING USER ACCOUNTS The Setup application Access menu allows you to add modify or delete user accounts The user manager should assign user names and access privileges update them as necessary and delete accounts for users no longer needing access to the system The instrument provides two menu types Fab Line and Analysis and two user levels also called access classes user operator and user manager The Fab Line menu provides access to the Scan and Calibration applications the Windows Program Manager and the DOS prompt The Analysis menu provides access to the Scan Calibration Setup Data base and Status applications the Windows Program Manager and DOS prompt User levels provide a convenient method of broadly categorizing users within each menu type The System Menu and Database Menu display the user name user level and menu type at the bottom of the
59. the histogram Two markers appear 2 To move the left marker to define the lower limit press and hold the left mouse button and move the mouse Drag with left button Release the mouse button 343153 Rev B 5 97 Scanning 4 21 3 To move the right marker to the upper limit press and hold the right mouse button and move the mouse Drag with right button Release the mouse button Repeat Steps 2 and 3 as necessary to define the range of interest 4 Double click the left mouse button to zoom the histogram to the range between the two markers If desired you can zoom again by repeating Steps 2 3 and 4 5 Press NEXT to move to the map keeping the defined range intact Using the keypad 1 Press NEXT one or more times to select the histogram 2 Press ZOOM Two markers appear in the histogram 3 Press SEL to select the marker s to move Each time you press SEL markers are chosen in the following order left marker right marker both markers no markers The program highlights the selected marker s Use and to move the markers Histogram markers DE OE os 10 12 14 Diameter um 1 60 Figure 4 16 Histogram Markers 4 Press ZOOM to zoom the histogram Repeat Steps 3 and 4 as necessary to narrow the range further 4 7 2 EDITING BIN SPLITS The histogram can be used to change LPD bin splits To edit bin splits Double click the right button in the histogram There is no keypad equivalent to this o
60. the scan results This section briefly describes the major parts of the Scan window provides examples of defect and haze displays lists the steps for entering User ID information and summarizes the steps for using other scan functions When you scan a substrate the instrument displays the results in the scan summary Depending upon recipe settings the instrument also displays scan results in a map histogram or both Data are color coded as shown by the bin splits in the summary The 343153 Rev B 5 97 Scanning 4 9 Cassette catalog displays the contents of the cassette and can be used to select individual substrates for scanning Slot Map Scan Summary Box FAI Cassette 3 k x Catalog 0 Ste d para 1HR LES DaT 1A 1H IED Sid Lees 1H q WE Status non Box ILE me id Histogram Figure 4 6 Scan Window Parts The Scan window contains the following areas Window Area Summary box Wafer map Cassette Catalog Histogram Status box Description Displays the date time wafer comment wafer ID scan results and recipe settings See Section 4 5 Using the Summary Box Displays the color coded defect map or haze map See Section 4 8 Using the Wafer Map Displays cassette contents See Section 4 6 Using the Cassette Catalog Displays a histogram of the displayed data The histogram be used to change LPD bin splits See Section 4 7 Using the Histogram
61. then the last point in that pattern is deemed out of control For C charts and X MR charts the following rules apply e One point outside the control limits e Five rising or falling consecutive segments e Six consecutive up and down pairs only applies during setup Additionally X MR charts can be tested against the following rules e Two out of three consecutive points beyond zone B two sigma e Four out of five consecutive points beyond zone C one sigma e Seven points on one side of the center line e Thirteen consecutive points in zone C only applies during setup e Five consecutive points outside of zone C only applies during setup 343153 Rev B 5 97 14 10 Surfscan 6200 Operations 14 5 3 IMPLEMENTATION GUIDELINES The following implementation guidelines should be observed 343153 Rev B 5 97 Valid control limits can be calculated after 20 data points have been collected However trial control limits can be calculated before 20 points have been collected so that you have limits for comparing succeeding measurements Prioritize your equipment and processes Implement your SPC program in phases rather than starting everything at one time Break the equipment into sub processing steps and monitor the steps independently This will make troubleshooting easier For each process and piece of equipment define out of control actions List the specific steps that should be taken when a process is flagged as
62. to Step 2 to add more substrates and thicknesses or choose OK to close the dialog box To change a substrate record 1 Choose Substrate from the Calibration menu bar The program displays the Select Substrate Type and Thickness dialog box Choose Select to expand the dialog box Select a substrate and thickness from the list boxes and choose the optical configuration Choose Change The substrate and new thickness appears in the substrate lists Return to Step 2 to change other substrates and thicknesses or choose OK to close the dialog box To delete a substrate record 1 Choose Substrate from the Calibration menu bar The program displays the Select Substrate Type and Thickness dialog box Choose Select to expand the dialog box Select the substrate and thickness from the list boxes Choose Delete The selected substrate and thickness are removed from the substrate lists and calibration data for this substrate thickness 1s deleted from the database Note You cannot delete Bare Silicon Return to Step 2 to delete other substrates and thicknesses or choose OK to close the dialog box If you have more than one change to make to the substrate table you can save time by opening the Select Substrate Type and Thickness dialog box and making all additions changes and deletions before choosing the OK button 343153 Rev B 5 97 6 8 Surfscan 6200 Operations To import a substrate record l Select a subst
63. to a wafer lot This ID can be entered in the Scan application Lot summary A summary of the data collected for wafers in a cassette The instrument displays a lot summary when a scan sequence completes or when you press HOME after a scan 343153 Rev B 5 97 Glossary 6 Surfscan 6200 Operations LPD cursor The cursor used in a magnified zoomed wafer map This cursor automatically snaps to the nearest LPD The particle box displays the location and size of the particle Map to Map A defect comparison technique The before map and after map are compared and the instrument generates an added defects map defects found on the after map but not on the before map removed defects map defects found on the before map but not on the after map and common defects map defects common to both maps Measurable wafer surface area The substrate area measured by the instrument The total substrate area minus the edge exclusion and exclusion regions if any Menu A list of commands Two types of menus are supported full screen menus and drop down menus Full screen menus such as the System Menu display application icons You can start an application by double clicking the left button on its icon A menu in the menu bar opens when clicked See menu bar Menu Bar Menu bars are displayed at the top of application windows and list menu titles You can open a menu listed in the menu bar by clicking on its title You can choose from the menu by
64. use Choose OK to return to the Exclusion Pattern dialog box Define the dimensions and location of the exclusion region s Exclusion parameter values can be from 9 99 mm to 99 99 mm and cannot be greater than one half the wafer diameter The parameters for each region are diagrammed on the map Two parameters for each region define the size of the region one parameter defines the distance from the edge of the wafer and one parameter defines the distance from the center line of the wafer flats only To ignore a region assigned to an exclusion pattern set the location and dimension values for the region to 0 The size or location of an exclusion region can be changed at a later date To save exclusion patterns Choose the Save button from the Exclusion Pattern dialog box To delete an exclusion pattern At the Exclusion Pattern dialog box select the pattern to delete and choose Delete The lt default gt pattern cannot be deleted To save an exclusion pattern under a new name Choose the exclusion pattern name from the list and choose Save As To use a pattern in a recipe 1 2 Using the Scan or Setup applications open the Recipe dialog box In the Data Collection group cycle through Flat Notch Exclusion options Choose the pattern name to use for the recipe Choose OK to close the recipe dialog box Save the recipe 343153 Rev B 5 97 7 10 Surfscan 6200 Operations 7 5 SETTING DATA COLORS Y
65. using the move buttons as follows Button Description gt Adds the selected message type to Selected User list lt Removes the selected message type from Selected User gt gt Adds all message types to Selected User lt lt Removes all message types from the Selected User list When all desired types of messages are selected choose OK to select by the messages chosen 11 3 3 SELECTING BY ACCESS CLASS To select an access class l 343153 Rev B 5 97 Choose Selected from the View menu The utility displays the View Selected dialog box Fig 11 10 Click the check box in front of the Access Class entry on the left side of the dialog box The button to the right is activated to allow you to define selection criteria ViewLog 3 11 11 Click the Access Class Selection button The following dialog box appears below the View Selected dialog box Tencor Service User Manager Figure 11 13 Access Class Selection Dialog Box Choose one or more message types to list by first selecting from the Possible Access Class in the list box on the left side then using the move buttons as follows Button Description gt Adds the selected message type to Selected Access Class list lt Removes the selected message type from Selected Access Class gt gt Adds all message types to Selected Access Class lt lt Removes all message types from the Selected Access Class list When all desired types of messages are s
66. want to overwrite it Choose OK to overwrite or Cancel to cancel the export Choose Exit to close the dialog box Calibration 6 9 6 2 2 MEASURING PSL SPHERES This section describes the process of measuring PSL spheres on a sample wafer To measure PSL spheres on a substrate you must scan a sample wafer The PSL Sphere Diameter dialog box allows you to set scanning parameters and select the sphere diameter of interest When the scan is complete the Calibration application displays a wafer map of the scanned wafer a histogram and a summary of scan results The measurement can be displayed on the substrate calibration curve To select the substrate diameter and PSL diameter 1 Choose the substrate size from the Size menu The Calibration application displays Select Cassette dialog box Cassette properties Cassette height Hormal a Humber of slots in 26 Figure 6 7 Select Cassette Dialog Box 2 Choose the cassette type The application uses the lt default gt cassette type unless more than one cassette type has been defined for the wafer size Then the application displays the Select Cassette dialog box Select the cassette being used and choose OK The Specify Thickness of the Calibration Wafer dialog box appears Specify thickness of the Calibration Water Thickness of the substrate to be scanned pm L_Defaur 675um _ ox cancer Figure 6 8 Specify Thickness Dialog Box 343153 Rev B 5 97 6 10 S
67. zoom a map Double click the left button in the map Or press NEXT repeatedly to select the map and then press ZOOM For details on using a zoomed wafer map see Section 4 9 Zooming the Map To display a MicroView Proceed to Section 4 10 Examining a MicroView To refresh the map Click the left button in the map or press NEXT Any bin split changes will be made to the wafer map 343153 Rev B 5 97 Scanning 4 23 4 9 ZOOMING THE MAP The instrument provides a multilevel zoom feature When you zoom the map the instrument displays a panning window and magnifies the map The menu bar lists the instrument keys that can be used when zooming To magnify zoom a map Double click the left button in the map or press NEXT repeatedly to select the map and then press ZOOM Panning Panning Magnified cursor window map X Coordinate at cursor A l 1 l l l l l I I l Magnification scale Figure 4 18 Zoomed Wafer Map To change magnification levels In the Panning window press SEL to choose the next magnification level The scale at the bottom of the map shows the current scale setting To locate the area on the map to magnify Move the panning cursor by moving the mouse or by using the arrow keys Notice that the magnified map changes as you move the panning cursor If the X Y Coordinates Option is installed you can press 1 or 2 to move to these reference points To move f
68. 10 2 11 2 12 2 13 2 14 2 14 2 15 2 16 2 16 2 17 2 18 3 1 3 2 4 2 4 3 4 4 4 5 4 8 4 9 4 10 4 10 4 13 4 14 4 15 4 16 4 16 4 18 4 20 4 21 343153 Rev B 5 97 XVI Figure 4 17 Figure 4 18 Figure 4 19 Figure 4 20 Figure 4 21 Figure 4 22 Figure 4 23 Figure 4 24 Figure 4 25 Figure 4 26 Figure 4 27 Figure 4 28 Figure 4 29 Figure 4 30 Figure 4 31 Figure 4 32 Figure 5 1 Figure 5 2 Figure 5 3 Figure 5 4 Figure 5 5 Figure 5 6 Figure 5 7 Figure 5 8 Figure 5 9 Figure 5 10 Figure 5 11 Figure 5 12 Figure 5 13 Figure 5 14 Figure 5 15 Figure 5 16 Figure 6 1 Figure 6 2 Figure 6 3 Figure 6 4 Figure 6 5 Figure 6 6 Figure 6 7 Figure 6 8 Figure 6 9 Figure 6 10 Figure 6 11 343153 Rev B 5 97 Surfscan 6200 Operations Histogram Bin Splits Zoomed Wafer Map Locating Defects in the Zoomed Wafer Map MicroView Wireframe MicroView Format MicroView Cursor Moving the MicroView Cursor by Clicking and Double Clicking MicroView Display Options Dialog Box Outline of MicroView Area Defect Shown in MicroView Scratch Shown in MicroView Area Shown in MicroView Example of a Short Wafer Summary Example of a Long Wafer Summary Example of an 80 Column Lot Summary Printer Selection Dialog Box Recipe Menus Recipe Dialog Box Measurable Surface Area Recipe Film Calibration Curves Dialog Box LPD Ranges Area From Equals Max Size Area From Greater Than Max Size Gain versus Cross Secti
69. 2 8 Resume Printer 4 32 Reverse cassette processing 7 3 Reverse ladder 7 3 Rotating a wafer 13 2 S SAVE key 2 4 Saving a bitmap 7 22 Saving maps and summaries automatically 5 24 Saving TFF files 4 14 Saving TFF files automatically 5 24 Scan application 4 1 Cassette catalog 4 18 Histogram 4 20 Menus and commands 4 10 Quick reference 4 11 Starting 4 2 Using the window 4 8 Wafer map 4 22 Wafer summary 4 15 Scan procedures 4 13 Scan sequence changing 4 19 Scanning one wafer 4 7 Scanning options 4 6 Scanning wafers Details 4 6 General description 4 4 MicroView 4 30 Options 4 6 Scratches classifying 5 19 343153 Rev B 5 97 Surfscan 6200 Operations Screen print 2 19 Scribe mark exclusion zone 12 12 Scroll bars 2 18 SEL key 2 3 Select button 2 17 Selecting wafer records 9 2 Sending X Y coordinates via COM3 13 6 Setting up for the first time 3 4 Setup Colors 7 10 Data compression 7 11 Database IDs 7 14 Error and message response 7 3 Exclusion patterns 7 7 Log event recording 7 5 Number of cassette slots 7 4 Printers 7 22 Recipes 7 19 Starting the Setup application 7 1 System configuration 7 19 Tencor File Format files 7 12 User accounts 7 15 Wafer orientation 7 6 Shutting down the instrument 3 4 Simulated data 7 3 Simulated data option 7 3 Slots number of 7 4 SMEZ See Scribe mark exclusion zone 12 12 Software version 12 9 12 10 SPC data Editing 14 1 Extracting from database 14 4 Printing 14 6 Viewing charts
70. 22 21 20 27 28 129 12720794 12720794 1 40 36 12720794 1 37 52 12720794 1 46 21 12720794 12720794 12720794 12720794 12720794 1 48 56 12720794 1 55 31 12 20 94 2 06 42 Hode Change Hode Change Hode Change Hode Change Hode Change Hode Change Hode Change Hode Change Hode Change warning Hode Change Expand reduce cursor ser TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service TENCOR Service Figure 11 4 Changing the Width of a Column Access Class Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service Tencor Service 2 Drag the mouse left or right to change the column width 343153 Rev B 5 97 W4e__Surfscan 6200 Operations 11 2 VIEWING AND PRINTING SYSTEM LOG REPORTS ViewLog provides two report formats short and long A system log report is a formatted list of entries The entries listed in a report are the records selected through and in the order shown in the System Log window The fields listed in the reports cannot be changed A full system log report can be printed to the default printer by choosing Print All from the Report menu Speed improvements of from 3 to 12 times can be achieved This option speeds system log printing by avoiding the use of special characters graphics modes
71. 5 SPC Tutorial 14 1 EDITING SPC DATA FILES An SPC data file should be created for each process step you wish to analyze The data file specifies the upper and lower chart limits the default data display and category of data to use You create an SPC data file using the SPC Editor Data can be stored into an SPC file by using the Extract to SPC feature in Browser 343153 Rev B 5 97 To create an SPC data file 1 Start the SPC Editor by clicking on the SPC Editor icon in the Database menu or by choosing Editor from the SPC Display window Fab ID PF Total Detect Count pee aa eee Limits Bin 1 Count Set Date Bin 2 Count Limits Bin 3 Count Lower Upper PP Bin 4 Count C Chart MR Chart Bin 5 Count Bin 6 Count Default Display Bin Count LJ C Chart C Tabular Display Bin 8 Count O XMR Chart Figure 14 1 SPC Editor 2 Enter the Fab ID and Process ID in the fields provided 3 The upper and lower limits should be set for each data count category To specify limits select a data count category option from the group at the right of the dialog box and choose Set Limits from the Limits menu The SPC Editor displays the Limits dialog box Figure 14 2 Set SPC Limits Dialog Box Enter upper and lower limit values and choose OK NOTE When data has been extracted to the SPC file you can have the SPC Editor calculate upper and lower limits 343153 Rev B 5 97 Statistical
72. 5 Printer Selection Dialog Box 2 Choose the default text printer from the Text list and the default graphics printer from the Graphics list Choose the printer you are using or e Choose FILE for the default graphics printer to print screens to a disk file e Choose Video for the default graphics printer to print screens to a video printer The printer should be configured for VGA 800x600 3 To change printer setup choose Setup 343153 Rev B 5 97 Setting Up the System 7 23 4 If you have chosen to print to disk choose Setup to specify the file information Setu Screen save File Naming Drive Path FileName Date Time encoded naming oo File Type Device Independent bitmap BMP Ca Lok J Loca f Figure 7 16 Screen Save Setup Dialog Box e Enter the path for screen saves in the Drive Path field It is good practice to create a directory for storing user created files such as bitmaps or TFF files e Select a filenaming convention Date Time encoded naming The instrument forms the filename based upon the system date and time Decimal date and time values are converted to binary coded decimal The hexadecimal result of the date and time values produces the filename Table 7 3 Date Time Encoded Filenaming es fone re For example a file created on September 8 1992 at 15 30 55 would be named 19287BDB
73. 5 Selecting Exclusion Patterns to Export Dialog Box The Possible Values list box displays Exclusion Patterns currently available in the database The Selected Values list box displays Exclusion Patterns selected for export The move buttons allow you to move items to or from the Selected Values 343153 Rev B 5 97 10 14 Surfscan 6200 Operations list as described below Button Description gt Adds the selected Exclusion Patterns s to the Selected Values list lt Removes the selected Exclusion Patterns s from the Selected Values list gt gt Adds all Exclusion Patterns to the Selected Values list lt lt Removes all Exclusion Patterns from the Selected Values list Select the Exclusion Patterns s to add to the export list using the Move buttons Use the horizontal scroll bars at the bottom of each list to see additional data Choose OK to add these selections to the export list The number of selected Exclusion Patterns appears in the Count column to the right 10 5 6 SELECTING ACCESS CODES Selected user accounts can be exported to floppy disk or to the hard disk To select all Access Codes for export l Click on the check box at the left of the Access Codes row in the Selected Items to be Exported section see Fig 10 1 2 When you click on Export the following message box appears 343153 Rev B 5 97 No Users records selected Do you want to Export all records Figure 10 16 Export All Access Code
74. ASS 343153 Rev B 5 97 4 7 USING THE HISTOGRAM The histogram displays the distribution of light point defects or haze values The color coding corresponds to the bin splits shown in the summary Using the histogram window you can zoom the histogram and change bin splits Defect Size Histogram at Cursor Cursor Total Area 2 Diameter Curr Figure 4 15 Histogram The Scan window can display a histogram in combination with the map a histogram only no map or no histogram the map is enlarged The recipe sets the initial map histogram display combination The display can be changed through items in the Display menu A LPD histogram plots the LPD count versus LPD diameter or cross section as specified in the recipe A haze histogram plots the number of defects versus haze values Defect histograms display a red total area bar at the right When you magnify the map select or deselect a bin zoom the histogram or edit bin splits the histogram changes as necessary When you move the cursor into the histogram the cursor changes to an I beam To change the histogram display Choose a display type from the Display menu Using the histogram window you can zoom the histogram to narrow the data range and change bin splits 4 7 1 ZOOMING THE HISTOGRAM The histogram can be zoomed allowing you to narrow the range of interest for the primary data To zoom the histogram Using the mouse 1 Double click the left button in
75. CONFIGURATION BUTTONS Command buttons allow you to specify Tencor File Format filenaming wafer orientation wafer exclusion patterns and bin colors 343153 Rev B 5 97 TFF Control displays the Tencor File Format Control dialog box allowing you to set the disk path filenaming convention and file extension for TFF files See Section 7 7 Setting Up for TFF Files Wafer Orientation displays the Wafer Orientation dialog box allowing you to set wafer map origin location and edge feature orientation Wafer map rotation requires the X Y Coordinates Option See Section 7 3 Setting Wafer Orientation Exclusion Pattern displays the Exclusion Pattern dialog box allowing you to define up to three exclusion areas for a single exclusion pattern See Section 7 4 Defining Exclusion Patterns Particle Colors displays the Particle Colors dialog box allowing you to change the colors used to display data in histograms and maps See Section 7 5 Setting Data Colors Setting Up the System 7 5 7 2 SELECTING EVENTS FOR THE SYSTEM LOG The User Configuration dialog box provides system log entry options The system log can record any or all of the following events Event Records a log entry when System Startup The instrument is started or restarted User Logon A user logs on User Logoff A user logs off Mode Change The instrument mode changes switching between Surfscan 6200 software applications Recipe Change The
76. Count 1613 Area Total 37 0mm2 Scratch Count 3 Scratch Total 28 9mm Sum of All Defects 4023 Laser 488nm Gain 3 Diameter 150 mm Threshold 2 00um Exclusion 2mm Haze Range 1000ppm THEUpuUtE Medium 343153 Rev B 5 97 NOTE In wafer summaries disabled bin values are listed in brackets Disabled bins counts are not included in the total LPD count or Sum of All defects count 4 11 2 PRINTING A LOT SUMMARY You can print 80 column or 132 column lot summaries When printing 132 column summaries the printer must be set up as described in Section 7 11 2 Setting Up for Printing 132 Column Reports To print a lot summary Choose Lot Summary 80 Col or Lot Summary 132 Col from the Print menu For an example of an 80 column lot summary see Figure 4 31 LOT SUMMARY Date Tuesday March 08 1994 2 27 55 PM Recipe ID DEMO LotID ID LPD LPD lt Area gt lt Scratch gt Sum lt Haze gt Count cm2 Count Total Count Total OF Rgn Avg R mm2 mm Dfcts 5 ppm T x01 2143 12 8 1613 37 0 3 28 9 3756 0 QO P x02 2410 14 4 1613 37 0 3 28 9 4023 0 O P Group Statistics Min 2ta AZO Oks 310 3 28 9 3756 0 0 Max QAO IAA TET B70 8 2659 4023 0 0 Average 227650 A386 61S 3720 3 28 9 3889 5 0 0 Std Dev 188 80 1 13 0 0 0 O 188 8 0 0 Figure 4 31 Example of an 80 Column Lot Summary NOTE A lot summary also can be printed from the Lot Summary window that appears at the end of casset
77. EZ definition is saved with it When a map is retrieved through the Browser application and rotated and no SMEZ definitions were saved with the wafer the current SMEZ definitions for that recipe if any will be applied 12 3 3 CREATING SCRIBE MARK EXCLUSION ZONES This section describes one method for defining a SMEZ To create a SMEZ 1 Select wafer orientation and coordinate origin from the User Configuration dialog box NOTE Whenever you change wafer orientation or origin SMEZ definitions must be redefined 2 Open the SMEZ INI file The file can be opened by clicking the Diagnostic Tools icon in the System menu and then clicking the SMEZ INI icon Scan a wafer 4 Rotate the wafer to the edge feature Zoom and wafer map Click once in the panning window to display the magnetic cursor Move the magnetic cursor to the defect of interest 6 Note the X and Y coordinates at the cursor Return to the SMEZ INI file Press CTRL ESC to display the Task List then double click on the Notepad entry 343153 Rev B 5 97 12 14 343153 Rev B 5 97 Surfscan 6200 Operations Or press ALT TAB to cycle through open windows and display the Notepad Enter the X and Y coordinates of the scribe mark SMEZ center point and the dimensions of the SMEZ The format of the SMEZ INI file is recipe name RECTI X y dx dy 0 RECT2 X y dx dy 0 RECT3 X y dx dy 0 RECT4 X y dx dy 0 RECT5 X y dx dy 0 Where Parameter Descr
78. Exporting more than 500 summaries in one export operation can require a long period of time If you need to export a large number of summaries divide them into small groups by selecting by date and time ranges e If you need to move a large number of summaries over 1000 summaries or 25 maps from an instrument to a Surfscan 6000 series Desktop computer use the Backup and Restore utility Use Backup to make a complete copy of the database then use Restore to restore the data to the desktop database e When the database contains a large number thousands of summaries and a large number hundreds of maps the Export and Import utility is more effective to move 200 or less summaries or 10 or less maps 10 2 STARTING THE EXPORT IMPORT UTILITY To start the Export Import utility Choose the Export Import icon from the Database menu The utility displays the Database Export Import window 343153 Rev B 5 97 10 2 Menu Bar Filename Entry Box Status List Box 343153 Rev B 5 97 Title Bar Gece ae Pe Bee ESTASS lia or F Hecpe AHEA FHL lacpe MATESI Heppe RIGA Aecee DELSAHPI Hace UE A Hace AP Herpe PATTER Hocer REPEAT STD A Heep SS TESIT Harpe WEGRIF mmm Pee eA Mi Surfscan 6200 Operations Selection List Selection Buttons Record Count Column Takiri kema in he F api _ Fiecipsi C ummm apa O PSL Sphere on Subchates C teuin Mahama Caitustian Tablas C Seater Condi F
79. Floppy Disk Drive aa Find eal Eject Button In Use Indicator Figure 2 5 Floppy Disk Drive To insert a diskette into the drive Insert the disk label side up into the drive When the system reads from the disk or writes to the disk the in use indicator lights To remove the disk from the drive Press the eject button Be sure the in use indicator is off before ejecting the disk 2 1 5 WORKING WITH CASSETTES The instrument scans wafers contained in a cassette Cassettes can be loaded onto the left indexer right indexer or both indexers When you change a cassette size the cassette locator plate must be changed When scanning the following cassette configurations can be selected See Chapter 5 Recipes for details on casssette configurations Cassette Shown in Load Unload Action Configuration Recipe as Right only R gt lt Waters load from the right and unload to the right Left only Li gt lt Waters load from the left and unload to the left Right to left L lt R gt Waters load from the right and unload to the left Left to right L gt R lt Wafers load from the left and unload to the right Sort Wafers L lt R gt lt Wafers load from the right cassette Passed wafers unload to the left cassette Failed wafers unload to the right cassette When sorting is disabled wafers load and unload using the right cassette only 343153 Rev B 5 97 Basic Skills 2 7 NOTE When using two cassettes th
80. G The instrument can automatically print the wafer summary or the entire screen To open the Detailed Print Configuration dialog box choose the Auto Print select button All Wafers Detailed Print Configuration Failed Waters Summary Summary Long D CD Print Screen Swap B W CD Print Screen swap B W Passed Wafers Summary Print Screen Short CD Swap B W CD Figure 5 13 Detailed Print Configuration Dialog Box The instrument can automatically print short long or one line summaries and screens can be printed using normal colors or swapped black and white Choose automatic printing options for all wafers passed wafers and failed wafers Summary Option None One Line Short Long Print Screen Option Off Normal Swap B W Description Do not print a wafer summary Print a one line summary Your text printer must be set for 132 column printing See Section 9 12 2 Setting up for Printing 132 Column Reports Print a 40 column summary on the text printer Print a long summary on the text printer Description Do not print the screen Print the screen on the graphics printer using the colors shown on the screen On color graphics printers swaps inverts black and white only On black and white graphics printers such as dot matrix printers inverts all colors 343153 Rev B 5 97 5 24 Surfscan 6200 Operations NOTE To print the screen manually press PRINT To change screen pr
81. GE STATE Eleven states are defined that indicate the status of error messages displayed on the screen or sent to the host Table 15 4 Patlite Error Message States No error message is currently displayed or unresolved ScreenError An error message requiring user intervention is presently displayed on the screen ScreenCaution A caution message requiring user intervention is presently displayed on the screen ScreenWarning A warning message requiring user intervention is presently displayed on the screen ScreenStatus A status message requiring user intervention is presently displayed on the screen 343153 Rev B 5 97 15 4 Surfscan 6200 Operations Table 15 4 Patlite Error Message States continued HostError An error message has been sent to the host but has not yet been cleared by the host HostCaution A caution error message has been sent to the host but has not yet been cleared by the host HostWarning A warning message has been sent to the host but has not yet been cleared by the host HostStatus A status message has been sent to the host but has not yet been cleared by the host ScreenMsg A message error caution warning or status requiring user intervention is presently displayed on the screen HostMsg A message error caution warning or status has been sent to the host but has not yet been cleared by the host GEM CONTROL STATE Two states are defined for GEM 92 and five states are defined for GEM 93 T
82. I in the Status box NOTE An existing Summary will not be overwritten if a summary in the import file has the same date and time 10 5 EXPORTING DATA Selection of data for export from the database is managed through the Selection List in the Import Export window see Fig 10 1 Data can be exported to floppy diskettes to the hard drive or to a network drive requires DECnet or Windows for Workgroups options When exporting data for use on a Surfscan 6000 series Desktop system to reduce the Desktop import time avoid exporting more than 500 wafer summaries in one export operation Use the Backup and Restore appli cation when you want to move a large number over 1000 wafer sum maries or 25 wafer maps to a Desktop system 343153 Rev B 5 97 Export and Import 10 7 First you select a file to export to Then you create an export list by selecting data from the database To create an export file 1 Select Export To from the File menu The following dialog box appears File Hame Directories tlest sfs E gt ach test sts qj Lance Her i Network E Save File as Type Surtscan est E Figure 10 8 Export To Dialog Box 2 Choose the destination drive for the export file from the Drives pull down list This can be a network drive if you have the DECnet Option or Windows for Workgroups Option 3 Enter a filename for the export file The filename must follow the DOS convention When r
83. J or T to select the select button and press SEL on the keypad 2 5 9 USING DATA ENTRY FIELDS A data entry field is an area for entering data Most data entry fields are enclosed within rectangular boxes When you select a data entry field a flashing vertical bar called the text cursor appears The text or values you type begin at the text cursor As you type the text cursor moves to mark the next location where a letter or value will appear New Name Text cursor Entry field Alphanumeric keypad Figure 2 19 Data Entry Field The instrument displays an alphanumeric keypad when alphabetic or numeric data can be entered with the mouse To enter data with the mouse Click on characters in the alphanumeric keyboard If you make a mistake choose Clear to start over again or press UNDO to delete the previous character s When all the characters are entered click OK or press ENTER To abandon an entry click on the Cancel button or press CANCEL To enter numeric values in a data entry field with the keypad Type the numeric value by pressing keys on the operator keypad then press ENTER to enter the value If you make a mistake while entering values choose Clear to start over again or press UNDO to delete the previous character s To abandon the entry press CANCEL 343153 Rev B 5 97 2 18 Surfscan 6200 Operations 2 5 10 USING SCROLL BARS A window or dialog box uses scroll bars to display data that does not fit
84. Manager application as follows At the System Menu click on the Program Manager icon Then click on the File Manager icon in the Main group If you cannot access the Surfscan 6220 System Menu e Restart the computer e When the Microsoft Mouse message appears press CTRL BREAK the BREAK key is at the upper right on the AT keyboard e Press the BREAK key several more times until the Terminate batch Y N message appears Type y and press ENTER e At the DOS prompt type win and press ENTER Microsoft Windows starts e Double click on the File Manager icon in the Main group The amount of free disk space is listed at the bottom of the File Manager window You must increase free disk space to at least 3 MB Use the File Manager Search feature or disk tree to locate the files to delete For example to search for all bitmap files with the BMP file extension choose Search from the File menu Type bmp in the Search For text box Type c in the Start From text box Check the Search All check box Click OK to view all bitmap files on drive C Before deleting check each file to ensure that it is not needed CAUTION Do not delete any files from your hard disk that you are not sure about Be especially careful when deleting files from the following directories WINDOWS and its subdirectories SOVA and its subdirectories SQL and its subdirectories SQLBASE and its subdirectories UTILS and DOS 343153 Rev B 5 97 Whe
85. Operations 7 13 7 14 7 23 10 8 12 5 15 1 15 3 15 3 15 3 15 4 15 5 15 7 Introduction 1 1 1 INTRODUCTION This chapter provides a brief introduction to the Surfscan 6100 and Surfscan 6200 Wafer Surface Analysis Systems lists key instrument features and describes the conventions and organization of this manual The Surfscan 6100 locates sizes and counts defects down to 0 157 um at a 95 capture rate The Surfscan 6200 locates sizes and counts defects down to 0 09 um at an 80 capture rate Surfscan 6100 6200 Wafer Surface Analysis System Figure 1 1 Surfscan 6100 6200 343153 Rev B 5 97 1 1 BEFORE STARTING Before using the instrument review Chapter 1 Introduction Chapter 3 Basic Skills and Chapter 4 Getting Started Then you can use Chapter 5 Scan to start the Scan application and become familiar with basic scanning techniques 9 1 2 ABOUT THE INSTRUMENT The instrument detects counts and sizes defects on semiconductor substrate materials The instrument uses laser beam scanning for detecting defect contamination and displays scan results in color coded wafer maps histograms and summaries FA po h iF i eae EI 1 H ana e L bl Arca ont Scr athe Crt a Shire ed A Lee Paes UI Haze Reger ie Hare AJ mHE Toir Ap Haze Poni 66 Ojai ne La in lon a Laer Tt Qigdue Ex aire Wafer Map Paes A aw Bia Wafer Summary 2 Diameter urn
86. Printing a Lot Summary 4 11 3 Choosing Automatic Printing Options 4 11 4 Setting Up Printers 5 Recipes 5 1 Recipe Menus 5 2 Using the Recipe Dialog Box 5 3 Recipe Parameters 5 3 1 Data Collection Parameters 5 3 2 Data Display Parameters 5 3 3 Configuration Parameters 5 3 4 Sort Parameters 5 3 5 Selecting Substrate Parameters 5 4 Setting the Data Collection Range 5 4 1 Selecting an LPD Range 5 4 2 Selecting a Haze Range 5 4 3 Selecting Throughput JI Selecting Display Options 5 5 1 Selecting the Data Display 5 5 2 Displaying Defects 5 5 3 Displaying Haze 5 6 Selecting Automatic Operations 343153 Rev B 5 97 5 6 1 Automatic Sorting of Failed Wafers Surfscan 6200 Operations 4 8 4 8 4 10 4 11 4 13 4 15 4 18 4 20 4 20 4 21 4 22 4 23 4 24 4 25 4 26 4 27 4 29 4 29 4 30 4 32 4 32 4 34 4 35 4 35 5 1 5 1 5 3 5 4 5 7 5 8 5 9 5 10 5 11 5 12 5 14 5 16 5 16 5 16 5 17 5 20 5 22 5 22 Table of Contents 5 7 5 8 5 6 2 Automatic Wafer Alignment 5 6 3 Automatic Printing 5 6 4 Automatic Saving Selecting Sort Options 5 7 1 Haze Deviation Sort Parameters Recipe Parameter Guidelines 6 Calibration 6 1 6 2 6 3 6 4 6 5 Using the Calibration Application Calibrating PSL Spheres on a Substrate 6 2 1 Using Substrate and Thickness Records 6 2 2 Measuring PSL Spheres 6 2 3 Using the Substrate Calibration Curve Calibrating the Tencor Standard Curve 6 3 1 About Calibrati
87. RY You can print a short 40 column or long 80 column wafer summary To print a wafer summary Choose Short Summary 40 Col or Long Summary 80 Col from the Print menu See Figs 4 29 and 4 30 343153 Rev B 5 97 Figure 4 30 Example of a Long Wafer Summary Scanning 4 33 Tuesday March 08 1994 2 26 49 PM ID x02 Comments Sort PASS LPD Count 2410 LPD cm2 14 4 Bin1 Agee O10 E Tie Be 2410 Binz Pee 2 80 2114 Bin3 280 Gis 2s 1847 Bin4 Ror ae Se OAs 1600 Bind 3392 4 64 1360 Bin6 4 64 SD0 1098 Bin7 Too Gaos 764 Bane OaD 7 70 427 Mean C 4 54 std Dev 1 80 Area Count 1613 Area Total 37 0mm2 Scratch Count 3 Scratch Total 28 9mm Sum of All Defects 4023 Haze Region 03 Haze Average Oppm Haze Peak Oppm Laser 488nm Gain 3 Diameter 150 mm Thresh 2 00um Exclusion 2mm Haze Rng LOOOppm ITnru uput Medium Recipe ID DEMO Figure 4 29 Example of a Short Wafer Summary Tuesday March 08 1994 ID x02 Sort PASS Time 2 26 49 PM LPD Count 2410 Haze Region 03 Recipe ID DEMO LPD 7 m2 14 4 Haze Average Oppm Database ID 2a VO Traks 2410 Haze Peak Oppm IDFL Aua Tegi 2114 Below Haze Range 03 ID 2 2 80 7 70 1847 4 00 146 05 ID 3 24 Teros 1600 146 289 05 ID 4 392 7 70 1360 289 431 OS TOO 4 64 7 70 1098 431 Di Se OS ID 6 See c 7 70 764 oa TES OS ID 7 6a 51 7 70 427 TES S 358 05 Comments Mean C 4 54 858 1000 05 Std Dev 1 80 Above Haze Range 05 Area
88. Select the bin split counting method Sequential or Cumulative In sequential counting the LPDs for each bin are counted and displayed separately In cumulative counting the count for each bin is added to the counts of lower bins to give arunning total For example the count for bin 4 is the sum of the counts for bins 1 2 3 and 4 7 Choose OK to save the bin splits setup 343153 Rev B 5 97 Recipes 5 19 To specify the LPD size calculation method Choose a Show option as follows Option Description Diameter The instrument calculates LPD size using the calibration curve for the selected substrate and thickness See Section 6 3 5 Selecting Substrate Parameters The instrument matches scattering efficiency measurements to the LPD diameters listed in the calibration curve Cross Section The instrument calculates LPD size from scattering efficiency Sizes are normalized based on the instrument s standard response curve Sort options can be set as described in Section 6 7 Selecting Sort Options AREAS AND SCRATCHES The instrument classifies a defect larger than the recipe Area From value as an area or as a scratch Areas are displayed as red regions on wafer maps The total surface area occupied by areas is shown by a red vertical bar in histograms The instrument estimates the size of an area by totaling the length of all chords recorded for the area The instrument defines a scratch as an area that when an
89. Starting 6 1 Calibration record Automatic 6 6 Measured 6 5 Calibration tables exporting 10 16 CASS key 2 4 Cassette Calibration 6 27 Loading 2 7 4 3 Number of slots 7 4 Reverse processing 7 3 Reversing the slot numbering 7 3 Using 2 6 Cassette catalog using 4 18 Cassette configuration 5 8 Cassette option 26 slots 7 4 Cassette types 5 8 Check box 2 14 Checking disk and database usage 8 5 Clicking the mouse 2 5 Colors setting 7 10 COM3 13 6 Command button 2 13 Common particle radius 9 9 Compressed printing mode 7 24 Compression methods data 7 11 Configuration Printers 7 22 System 7 19 User 7 2 Configuration tables exporting 10 16 Control charts 14 7 Control menu 2 12 Control Type 7 3 Coordinates X Y translating 13 2 Cycle Control 2 16 D Data compression 7 11 Data entry field 2 17 Data extraction for SPC 9 7 Data simulated 7 3 Database About the database 8 1 Backing up 8 9 Browser utility 9 1 Checking usage 8 5 Database menu 8 2 Deleting wafers 9 1 Export 10 1 Extracting wafers for SPC 9 1 Import 10 1 Managing 8 3 Repairing 8 7 Report utility 8 15 343153 Rev B 5 97 Index 2 Restoring 8 9 Reviewing wafers 9 1 Selecting summaries and maps 9 2 Starting a utility 8 3 Utilities described 8 2 ViewLog utility 11 1 Database menu 8 2 DataHub Data Analysis System 7 13 DataHub requirements 7 12 Date System Log select by 11 11 Destination slot numbering 7 4 Diagnotic tools 12 1 Dialog box 2 12 Chec
90. Surfscan 6100 6200 Operations Manual Main Contents Copyright 1996 Tencor Instruments Version 3 2 1 Introduction 9 Browser 2 Basic Skills 10 Export and Import 3 Getting Started 11 ViewLog 4 Scanning 12 Diagnostic Tools 5 Recipes 13 X Y Coordinates Option 6 Calibration 14 SPC Option 7 Setting Up the System 15 Patlite Option 8 Working with the Database Bars spas Q a Ka O Click on a topic or chapter Surfscane 6200 Wafer Surface Analysis System Operations Yrencor Software Version 3 2 Online Manual 343153 Rev B 5 97 2400 Charleston Road Mountain View CA 94043 Phone 415 969 6767 FAX 415 968 9482 COPYRIGHT NOTICE Copyright 1996 by TENCOR INSTRUMENTS All rights reserved worldwide No part of this publication may be reproduced transmitted transcribed stored in a retrieval system or translated into any human or computer language in any form or by any means electronic mechanical magnetic chemical manual or otherwise without the express written permission of TENCOR INSTRUMENTS 2400 Charleston Road Mountain View California 94043 WARRANTY Except as otherwise indicated Tencor Instruments warrants to the Buyer that the items sold by it hereunder are free from defects in material and workmanship and meet applicable specifications In discharge of this warranty Tencor Instruments agrees either to repair or replace as it may elect any part or parts which under proper and normal use
91. Y menu 2 If automatic filenaming has been selected the instrument saves the file using a date time based or Lot ID based filename If user selectable filenaming has been selected the instrument asks for the TFF filename The TFF file contains any changes to the map made by rotating the map changing bin splits or zooming the histogram 343153 Rev B 5 97 Scanning 4 15 4 5 USING THE SUMMARY BOX The summary displays the date and time of the scan the results of the scan bin splits overlay controls and a selection of recipe parameters The bin splits are color coded as shown by the numbered buttons You can enable or disable a bin from the map or histogram by selecting a bin split button The summary updates when you enable or disable a bin split edit a defect or haze bin or magnify the map hursday August 20 1992 11 20 07 AM IDF Comment LPD Cnt 1025 i 0 160 0 213 0 213 0 284 0 284 0 379 0 379 0 506 Bin Splits 0 506 0 675 aA 0 675 0 900 0 400 1 20 H 1 20 1 60 O802 Std Dev Area Control 130 Haze Overlay Control Haze Region Have Average Haze Peak Laser 48dnm Gain 4 Diameter 150mm l 01604m Exclusion 2mm Haze Ang 250ppm Thruput Medium Figure 4 11 Summary Box Buttons through 8 control the bin splits for the primary data Button O overlays the alternate data Button 9 overlays area data For example all haze data can be overlayed onto a defect map
92. afer map the system alerts you when the database already contains more than 299 maps Some database error messages might indicate a disk full condition as described in Section 8 2 1 Disk Full Messages When the disk is full you can create free disk space by deleting nonessential files See Section 8 2 3 Recovering from a Disk Full Condition DISK FULL MESSAGES The following database error message can indicate that the error is from a disk full condition In the Scan application 34 1070 Inserting summary data into database database has been shut down please disconnect 34 1070 Inserting map into database database has been shut down please dis connect 34 1001 Disconnecting from database database has been shut down 5 65 Database access failure During instrument initialization 343153 Rev B 5 97 34 1000 Connecting to database read or write failure 34 1050 Reading blobs from database Invalid cursor number Working with the Database 8 5 See Section 8 2 2 Checking Disk and Database Free Space for displaying disk and database statistics See Section 8 2 3 Recovering from a Disk Full Condition for the steps to take to free disk space 8 2 2 CHECKING DISK AND DATABASE FREE SPACE The status of free disk and database space is indicated by the disk status icon at the top of the screen Tencor Instruments I The disk icon changes colors to alert you to current disk and da
93. and thickness to the table Return to Step 2 to add more substrates and thicknesses or choose OK to close the dialog box 343153 Rev B 5 97 6 6 Surfscan 6200 Operations To add a new automatic substrate calibration record NOTE Only Nitride or Oxide calibration records can be generated automatically in version 3 2 of the Surfscan 6000 series software 1 Choose Substrate from the Calibration menu bar The application displays the Select Substrate Type and Thickness dialog box 2 Choose Select to expand the dialog box then select the Automatic radio button if it is not already selected Select Substrate Type and Thickness Substrate name Thickness 3250 A 3290 A ALSTI J BACKSIDE 5S Bare Silicon C3 Measured Optical Configuration Illumination P polarized gt Collector Polarization S polarized Figure 6 5 Adding a New Substrate 3 Select Nitride or Oxide from the Substrate pull down list enter the desired thick ness and choose the desired optical configuration 4 Choose Create The instrument adds the new substrate and thickness to the table The following message appears in the message area at the lower left corner of the Calibration window Substrate type Nitride nnnn A has been added 343153 Rev B 5 97 Calibration Note that the prefix precedes the substrate name This prefix identifies curves that you generate distinguishing them from measured curves Return
94. arly Warning System Window A panel can contain up to eight functions The chart for each function displays the function s data values versus time For forward sweep time for example sweep time 1s plotted in microseconds versus days of instrument operation You can change display and collection options for a function by choosing from the Variables menu Display options also can be chosen by clicking on one of the icons at the top of the function chart Switches the chart to log scale or linear scale Turns on trend data Switches the time interval to Switches the Switches alarm limits to D days H hours M display type to bidirectional unidirectional or minutes S Seconds points steps none moon M months continuous or histogram 343153 Rev B 5 97 Diagnostic Tools 12 3 To display a function using full screen Double click on the function or select the function and choose Function from the menu bar To return to panel view from full screen function view Double click on the full screen function or choose 3 Panel from the menu bar To view another panel Choose Next or Prev from the menu bar or choose an item from the Panel menu 12 1 1 FUNCTION CONTROLS For each function you can view data values and set display and collection options 12 1 2 VIEWING DATA VALUES You can view the current or previous 100 data values in tabular form To view function data for the selected function C
95. atalog can be numbered from bottom to top the default or top to bottom and the scanning sequence can be set to bottom to top or top to bottom 343153 Rev B 5 97 Scanning 4 5 To scan substrates from the cassette Press START The instrument scans the first substrate in the cassette When a substrate is scanned the instrument highlights its slot number in the Cassette catalog and displays the results in the scan summary The map and histogram show data graphically See Fig 4 4 Scan Summary Map Thede agiris 1407 11760 AN lia i FAIL LPO Ont 2 2 Som Cassette J 11 O21 Catalog Fl ra has El ET TEPI Fl IA SJE Fi 1406 pars a LES MEn Fi 1400 120 t 1 150 deere Dm Siim Fl area Cnt Wir Scratch Ont al bel EEFI El kes Pii saar em Gand Ciwrarer otra Y wear ATE Emerton Cai Err me Png 2059m Theepot Padu aani LiT Histogram Figure 4 4 Scan Window after a Scan In manual operation press START to scan the next substrate In automatic operation the instrument automatically scans the next substrate in sequence 343153 Rev B 5 97 4 2 1 ABOUT SCANNING The instrument can scan all substrates in a cassette selected substrates or one substrate called direct access You can choose three scanning options automatic or manual operation scan sequence and microscope hold for MicroViewing Table 4 1 Slot Processing Slot Status Auto Off Auto On No slots selecte
96. atches and areas are shown in the MicroView examples below LPDs appear as higher cross section regions with 343153 Rev B 5 97 Scanning 4 31 characteristic peaks Scratches appear as an elongated strand of low cross section defects rising above the sea of haze Defects shown in MicroView Figure 4 26 Defect Shown in MicroView Viewing trom ironi Example of a scratch shown in a MicroView AnH ide rang 0 7599 Hanlayig imm 1 0m0i0 Figure 4 27 Scratch Shown in MicroView 343153 Rev B 5 97 In MicroViews areas are similar in appearance to LPDs but lack the characteristic peak In areas the peak is truncated at the Area From value as defined in the recipe Example of an area shown ina MicroView Figure 4 28 Area Shown in MicroView 4 11 PRINTING SUMMARIES The Scan application Print menu provides options for printing wafer summaries lot summaries and a one line summary The Print menu also can be used to select text and graphic printers and to resume a printing operation NOTE When printing is in progress a flashing Printing message appears at the top of the Scan window When a print job encounters a problem such as the printer being out of paper or offline the job is suspended When the problem has been corrected the print job can be continued by choosing Resume Printer from the Print menu The printer is automatically resumed when after the next scan 4 11 1 PRINTING A WAFER SUMMA
97. ays a map histogram and results summa ry Map of Scanned YYafer Histogram of Haze Pixels Count Mean Std dev Std dev B00 550 500 450 400 350 a300 250 200 150 100 50 Below limit Above limit 0 10 0 15 Haze value ppr Figure 6 19 Haze Calibration Results The histogram displays the distribution of haze values Dashed lines identify the mean and standard deviation The summary at the bottom of the window lists the following data Haze Field Haze Value Select Haze Pixels Mean Haze Value Coeff of Variation Description The haze value selected for scanning The selected haze range The number of haze pixels used out of the total found The mean haze value for the scan The calculated coefficient of variation Click Resume in the menu bar or press SEL to accept the calibration results and display the measured value in the calibration curve Click Cancel in the menu bar or press CANCEL to return to the Calibration window When you accept the measured results the application displays the calibration 343153 Rev B 5 97 6 24 Surfscan 6200 Operations curve which can be customized as necessary 6 4 2 USING THE HAZE CALIBRATION CURVE You can use the Haze Calibration Curve window to view or edit the haze calibration curve To display the Calibration Curve window view the current calibration curve by selecting Haze from the Procedures menu and choosing Results or accept the results of a calib
98. by creating a set of data selection instructions You use queries when exporting data reviewing wafer data stored in the database and managing the system log for example Range A measure of the variation in a data set It is calculated by subtracting the lowest value in the data set from the highest in that same set Recipe A set of instrument data collection data display configuration and sort parameters that are stored by a unique name The name of the current recipe is displayed in the Scan window title bar 343153 Rev B 5 97 Glossary 8 Surfscan 6200 Operations Rendering A MicroView display format color or wire frame Restore To return data previously saved by a backup operation Sample In statistical process control one or more individual events or measurements selected from the output of a process Sample size is denoted by the letter n Sample wafer A water having defects of a known diameter and that is used for calibrating the instrument Scan To collect defect or haze data from a substrate The Surfscan 6000 series instrument collects and processes data using the data collection data display configuration and sort parameters specified in the current recipe The instrument displays the results of the scan and can print or save the data Scan operation Automatic or manual In automatic operation the instrument scans all wafers or selected wafers automatically in the specified scan sequence In manual mode
99. by selecting button 0 The summary lists primary data and alternate data 1f one is selected in the recipe Data Description LPD Count The total of all light point defects and their total surface area Bins 1 8 Bin splits intervals and the count of LPDs for each bin Mean The mean of collected LPDs Std Dev The standard deviation of collected LPDs Area Count The count of all areas areas and scratches on the substrate and their total surface area Scratch Cnt The total number of scratches and their total surface area Sum of All Defects The sum of all LPDs and areas including scratches 343153 Rev B 5 97 Data Description Haze Region The percentage of the measurable surface area containing haze Haze Average The sum of all haze values divided by the number of haze values including those that are over the Haze Range limit and under the Haze From limit When the haze map is zoomed only those haze values in the magnified map are included in the average including values under or over the haze range limits When the haze histogram is zoomed only those haze values within in the zoomed histogram interval are included in the haze average Values under or over the haze range limits are not included Haze Peak The highest haze value To enter a Wafer ID after scanning 1 Choose ID from the menu bar or press the ID key to open the Wafer ID dialog box Finaste ender Waher Lod cence Figure 4 12 Wafer ID Dia
100. ch color identifies a separate range of data called a bin split Haze bin splits can be edited through the Detailed Haze Bin Split dialog box described below or through histogram editing To edit haze bin splits 1 Set Display Option to Haze Defect or Haze Only to allow haze bin split editing 2 Choose the Bin Split select button to open the Detailed Haze Bin Split dialog box Bin fields are color coded From and To fields indicate the total haze range as 343153 Rev B 5 97 Recipes 5 Sort options can be set for percentage of haze versus total measurable surface area average haze and peak haze See Section 5 7 Selecting Sort Options 5 21 specified by Haze From and Haze Range The current bin boundaries are shown to the right of the bin column Detailed Hare Rin Spil lo ZW Figure 5 12 Detailed Haze Bin Splits Click on the boundary to change The boundary cursor blinks Carefully move the pointer over the blinking cursor and press and hold the left mouse button Move the cursor to the new boundary location and release the button Or press NEXT repeatedly until the boundary cursor blinks Use to move the cursor to the next lower boundary Use to move the cursor to the next higher boundary When at the boundary to change use T to move the boundary up J to move the boundary down Choose OK to save the bin splits as shown Choose Default to apply the default ratios to the bin splits
101. cimal sign and the minus sign Numbers are positive if not preceded by the minus sign Cancels the previous action Also used to move the text cursor backwards backspace to erase the text in fields Displays the Wafer ID dialog box when using the Scan application Also allows you to enter a wafer ID during a microscan Cancels the current action Starts the current action Displays help information for the active application Selects the menu bar when an application window is displayed The first option in the menu bar is highlighted Moves the cursor or selection bar in the direction of the arrow Selects items as indicated in this manual Displays the current recipe Magnifies the wafer map or histogram Places the wafer on hold After the current scan is completed the wafer is retained in the instrument Press MICROSCOPE a second time while the wafer map 1s zoomed to begin a microscan 343153 Rev B 5 97 2 4 Surfscan 6200 Operations Key Action NEXT Selects the next item or icon in a list or menu SAVE In the Scan application saves the wafer summary wafer map or both to the database CASS In the Scan application catalogs the cassette If the cassette 1s already cataloged changes the scan order HOME In the Scan application homes the cassette indexers to the load un load positions If the puck is not at the home position 1 the wafer is unloaded into the first empty slot in the cassette 2 the puck is mov
102. ckness When a Tencor Instruments supplied calibration curve is used the substrate name is followed by T in the Recipe dialog box When a customer supplied calibration curve 1s used the substrate name is followed by C in the Recipe dialog box The T or C designation also is shown in the wafer summary in the Mean field To use the recipe limits used when calibrating for the film and thickness specified check the Recipe Limits from Calibration Curve check box Requires analog board P N 223670 5 4 SETTING THE DATA COLLECTION RANGE This section tells you how to obtain the desired data collection range by selecting instrument gain threshold the defect to area boundary and haze range for a recipe The instrument collects defect and haze data from a wafer by illuminating the wafer surface with a laser beam collecting the scattered light through an optics system and amplifying the scattered light with a photomultiplier tube PMT The gain of the PMT determines the dynamic range for collecting data 343153 Rev B 5 97 5 12 Surfscan 6200 Operations 5 4 1 SELECTING AN LPD RANGE To specify the light point defect LPD range use Gain Threshold and Area From parameters The Gain setting determines the maximum LPD size of interest the Max Size recipe parameter Threshold determines the smallest LPD collected during a scan and can be adjusted as necessary to isolate a particular LPD range Area User selected Area
103. could plot defect type versus number of each defect type for example A pie chart is a plot of data represented by a circle divided into pie shaped segments Each segment represents a characteristic of the data set The size of each segment is proportional to the percentage of the full data set represented by the characteristic A trend chart is a plot of data that preserves the time order sequence in which the values occur A trend chart is also called a running record Graphical summaries provide a good snapshot of the overall relationship between data points but they do not predict what the next data point will be what its relationship will be within the present data set or whether the data 1s in control The tool that is used for these kinds of analyses is statistical process control Statistical process control SPC is the use of statistical techniques such as control charts to control and improve the capability of a process by analyzing the process or the output of the process Control charts present a graphical representation of the data and provide statistical analyses in the form of control limits Control charts enable you to characterize the statistical or random variations in your process This is powerful for two reasons First it allows you to identify and eliminate any special causes or non random forces that might be acting Secondly it prevents you from trying to fix problems that are inherent in the process The key is to
104. curve 1 2 Move the cursor exactly over the point to delete Double click the left button or press ZOOM to enter edit mode The bounding box shows the limits for the point Press UNDO to delete the point at the cursor The curve re fits 343153 Rev B 5 97 6 26 Surfscan 6200 Operations To change the location of a point on the calibration curve 1 Move the cursor exactly over the point to delete 2 Press ZOOM to enter edit mode The bounding box shows the limits for the point 3 Move the mouse or press T or J to move the point up or down within the box 4 Press ENTER to complete the point change and exit edit mode To cancel curve editing or exit the Curve Results window Click the right button or press CANCEL 6 4 3 IMPORTING AND EXPORTING THE HAZE TABLE You can import or export haze calibration data using the Import Export action in the Procedure menu To import the haze calibration table 1 Select Haze from the Procedure menu 2 Choose Import Export from the Procedure menu The application displays the Calibration Tables Import Export dialog box Haze Calibration File Import Export Functions IMPORT Calibration File EXPORT Calibration File Figure 6 21 Calibration Tables Import Export Functions Dialog Box 3 Type the name of the import file in the From File field and choose Import 4 Choose Exit to close the dialog box To export the haze table 1 Select Haze from the Procedure menu 2
105. d When you start a scan the When you start a scan the instrument scans the next instrument scans all or all substrate in the cassette remaining substrates in the cassette More than one slot selected When you start a scan the When you start a scan the including up to all slots in the instrument scans the next instrument scans all remaining cassette selected substrate in the cassette selected substrates in the cassette One slot selected When you start a scan the Not applicable in single direct instrument scans the substrate access scans again When all substrates in a cassette have been scanned the instrument homes the cassette and displays the Lot Summary screen where you can view a summary of scan results and enter IDs for each substrate scanned and a Lot ID if not already entered See Section 4 2 5 Lot Summary To remove a cassette before all substrates have been scanned Click Home or press the HOME key Auto must be off to home the cassette The instrument displays the Lot Summary See Section 4 2 5 Lot Summary For details on holding a substrate for a MicroView see Section 4 8 Using the Wafer Map 4 2 2 SCANNING ALL SUBSTRATES To scan all substrates 1 Select automatic scanning by pressing the AUTO key or choosing Auto from the menu bar AUTO appears in the Status box 2 Press the START key or choose Start from the menu bar The instrument scans all wafers in the cassette and
106. data to floppy disks the hard disk or network disk e View maps and summaries stored in the database and delete them e View system log entries and delete them e Extract data and analyze it using statistical process control For a discussion of database concepts and detailed descriptions of searching the database using data selection and database query functions see the Microsoft Access User s Guide 8 1 2 AVOIDING DISK FULL OR DATABASE FULL CONDITIONS If the disk or database becomes full you can no longer save data to the database To avoid this condition the database and the hard disk should be managed as follows e The database should be regularly monitored backed up and purged of unnecessary data e The hard disk should be regularly monitored and purged of unnecessary files Using data compression you can reduce the amount of space required for saving data See Section 7 6 Setting Data Compression for details For details on managing the disk and database see See Section 8 2 Managing the Disk and Database 343153 Rev B 5 97 8 2 Surfscan 6200 Operations To open the Database Menu Choose the Database icon at the System Menu The Database Menu displays utility icons Database Menu V Backup Viewlog Browser Restore SPC ED SPC SPC Display Editor Peace select the function you desir to pertorm ly Customer Manager Manager Anaka is Help Figure 8 1 Database Menu The following
107. database utilities can be selected Database Icon Allows you to Browser Review wafer records set X Y coordinates produce map to map com parisons and delete wafer records Extract records for statistical pro cess control See Chapter 9 Browser Export Export or import recipes wafer maps and summaries substrate records Import system or user configuration access codes and instrument calibration tables See Chapter 10 Export and Import Backup Back up the database to floppy disk or hard disk or restore the database Restore See Section 8 3 Backing Up and Restoring the Database Report Print recipes system configuration or user configuration See Section 8 4 Reports ViewLog View print or delete system log events See Chapter 11 ViewLog 343153 Rev B 5 97 Working with the Database 8 3 Database Icon Allows you to SPC Display Display statistical process control data Requires SPC option to use SPC Editor Create or edit SPC data files Requires SPC option to use Help Exit Start the Surfscan 6220 help system Quit the Database Menu To start a database utility Double click on the icon or press NEXT to highlight the icon and then press ENTER 8 2 MANAGING THE DISK AND DATABASE It is important to regularly manage the disk and database and to avoid disk or database full conditions The following information will help you to understand how to manage the disk and da
108. diameter to be entered must not be less than 0 326 nor greater than 0 400 Figure 6 15 Specify Actual PSL Sphere Diameter Dialog Box 4 Ifthe calibration wafer contains a PSL sphere size different than one of the standard sizes enter the actual PSL sphere diameter in Um The value must be within 10 of the sphere diameter specified in Step 3 343153 Rev B 5 97 6 18 343153 Rev B 5 97 Surfscan 6200 Operations Prepare a bare silicon wafer for the calibration Insert the sample wafer in slot 1 of the cassette and place the cassette on the right locator PSL spheres of the size selected in Step 3 must exist on the wafer Scan the wafer by choosing START The Calibration application displays a histogram and wafer map of the scanned water The histogram shows the mean cross section for the PSL sphere and dashed vertical lines show the standard deviation Wap of Scanned Wafer Histogram of Spheres Hean Std dev Std dev I I 0 4 0 6 0 8 Cross section ur Figure 6 16 Calibration Results The Summary at the bottom of the screen shows the PSL sphere calibration results substrate PSL sphere diameter selected sensitivity range peak width the number of spheres found mean cross section and the coefficient of variation The instrument adjusts the mean cross section to match the standard value for the selected sphere diameter For example when measuring 0 364 um PSL spheres the instrument automatically adjusts th
109. ding a Point to the Calibration Curve Move the mouse or press 7 or J to move the point up or down within the bounding box 343153 Rev B 5 97 6 16 Surfscan 6200 Operations 4 Press ENTER to add a point at the cursor location The delete point and change point procedures require that you position the cursor exactly over the point to delete or change To move the cursor exactly over a point first move the cursor close to the point then press 1 to move the cursor to the right or J to move the cursor to the left If you double click the left button or press ZOOM and the cursor is not exactly over a point the application enters Add a Point mode If you enter this mode by mistake press CANCEL to exit and try again To delete a point from the calibration curve 1 Move the cursor exactly over the point to delete 2 Double click the left button or press ZOOM to enter edit mode The bounding box shows the limits for the point 3 Press UNDO to delete the point at the cursor The curve re fits To change the location of a point on the calibration curve 1 Move the cursor exactly over the point to delete Use SEL T or J to move the cursor directly over the point 2 Press ZOOM to enter edit mode The bounding box shows the limits for the point JT Boa erodgon aw oand ee gt Custom Entered 0 667 pm a ee eT 1 2 A Diameter um Calibrated Tue Feb 18 1992 03 02 AM Changing existing ca
110. ding a Point to the Calibration Curve Moving a Calibration Curve Point Specify Actual PSL Sphere Diameter Dialog Box Calibration Results Select Haze Calibration Value Dialog Box Scan Wafer Dialog Box Haze Calibration Results Haze Calibration Curve Calibration Tables Import Export Functions Dialog Box Cassette Calibration Window Select Cassette Dialog Box Select Cassette Dialog Box Setup Menus User Configuration Dialog Box Standard Wafer Orientation Dialog Box Exclusion Pattern Dialog Box New Exclusion Pattern Selection Dialog Box Particle Color Selection Dialog Box Compression Methods Dialog Box Tencor File Format Control Dialog Box Database ID Selection Dialog Box Add New User Dialog Box User Access Privileges Dialog Box Delete a User Dialog Box Recipe Menu System Configuration Dialog Box Printer Selection Dialog Box Screen Save Setup Dialog Box Database Menu Hard Disk and Database Usage Statistics Dialog Box Repair Database Dialog Box Database Repair Backup Window Disk Access Message Box Backup Progress Window Backup Complete Message Box Exit Backup Message Box Restore Window Retrieve Catalog Dialog Box Insert Last Diskette Message Box Retrieve Complete Message Box Disk Access Message Box xvii 6 14 6 15 6 16 6 17 6 18 6 21 6 22 6 23 6 24 6 26 6 28 6 29 6 30 7 1 7 2 7 6 7 8 7 8 7 10 7 11 7 12 7 14 7 16 7 17 7 18 7 19 7 20 7 22 7 23 8 2 8 5 8 8 8 8 8 9 8 10 8 11 8 11
111. display by choosing Open from the File menu and choosing the SPC file SPC files have an SPC file extension 2 The SPC Display utility automatically displays the current data in the default format To view other formats choose from the Display menu You can organize data display windows using the actions in the Windows menu 3 To change the range of points choose Display Range from the Display menu The Select Display Range dialog box appears Enter the first and last point to be used in the range and choose OK 4 To change the upper limits lower limits or default display for the SPC file use the SPC Editor 343153 Rev B 5 97 14 4 PRINTING SPC DATA SPC charts and tables can be printed using the screen print feature and the SPC data file can be printed using the File Print command To print the contents of an SPC file 1 Make sure that Windows Printer Setup is set for landscape orientation 2 Choose Print from the File menu To set landscape printing 1 Minimize the current Surfscan window by clicking on the minimize button at the top of the window Run the Windows Control Panel application Run the Printer accessory Choose the printer from the Installed Printers list Choose the Setup button to view the printers setup options In the Orientation group click Landscape Close all Control Panel dialog boxes and close the Control Panel oe at Oy ek ae ae a Double click on the Surfscan icon at the bottom of t
112. displays the slot selection dialog box Select cassette slot for scanning gt From specified slot From bottom slot Figure 6 2 Select Cassette Slot Dialog Box 2 Choose From Specified Slot to specify the slot number in the slot field or choose From Bottom Slot to use the bottom cassette slot 3 Choose OK 6 2 CALIBRATING PSL SPHERES ON A SUBSTRATE This section describes the Surfscan 6200 substrate calibration procedure Using the Calibration application you can e View the current calibration curve for a substrate and film thickness e Add delete or change substrate thickness records e Measure a selected PSL diameter using a sample wafer The measured result can be displayed in the calibration curve window e Customize the calibration curve of a selected substrate Tencor Instruments supplies a bare silicon calibration curve that is the standard curve for the instrument and cannot be changed by the customer Curves for other substrates and film thicknesses can be added to the instrument and customized as required In calibration windows standard curves are green and custom curves are red Yellow points are measured calibrated points Substrate calibration curves can be created and customized as follows e Data can be obtained from Tencor Instruments and imported into the Surfscan 6200 database The data can be customized as needed in the Calibration Curve window 343153 Rev B 5 97 6 4 Surfscan 6200
113. dle paused between wafers in a cassette Scan application is recovering from a previous motion system error In Robotics mode but no motions are in progress RoboticsInit Positioning pedestals in preparation to enter Robotics mode Handoff Low level puck and wafer handling remote commands are possible in this mode Running Scan application is performing any one of the following processes Cataloging Cassette Loading Wafer Scanning Wafer Unloading Wafer Homing Indexer s Raising Cassette Waiting Manual Scan application is performing any one of several special operator intensive tasks Holding Wafer Direct Access Sizing wafer Paused Recovering 343153 Rev B 5 97 Patlite Option 15 3 15 2 2 CASSETTE STATE The following states represent the status of cassettes on the indexers Table 15 2 Patlite Cassette States A cassette is present on both indexers A wafer is currently being loaded from the cassette onto the puck A cassette is present on one or both of the indexers CASSETTE DONE STATE Two states are defined that indicate the status of the processing of the wafers in a cassette Table 15 3 Patlite Cassette Done States Value Description Processing of all wafers in a cassette is not taking place or is not complete Complete Processing of all wafers in a cassette is complete the Lot summary is currently displayed on the screen Will not get this status when in Remote mode controlled by the host ERROR MESSA
114. e Bin Split parameter The following rules apply to setting bin splits e The number of LPD bins can be from one to eight e All bins must be within the data collection range displayed at the bottom of the dialog box e Each bin represents a separate range of values Bins cannot overlap e The value of the lower boundary of a bin defaults to the value of the upper boundary of the previous bin For example if the upper boundary of bin 2 is set to 0 379 the lower boundary of bin 3 is automatically set to 0 379 The lower boundary of bins cannot be set directly e The Area From value defaults to the Max Size value but can be changed When Area From exceeds Max Size the LPD range is extended to the Area From value and the ranges of LPD bins and bin split limits are adjusted as necessary To change bin ranges use the histogram bin split editing technique as described in Section 5 5 Using the Histogram or use the Detailed Bin Split dialog box To set LPD bin splits 1 Open the recipe to edit and set Display Option to Defect Haze or Defect Only to allow LPD bin split editing 2 Choose the Bin Split select button to open the Detailed LPD Bin Split dialog box Bin fields are color coded The color bar at the bottom of the dialog box indicates the LPD range specified by the current threshold and gain The current bin boundaries are shown in the From and To data fields 343153 Rev B 5 97 5 18 Surfscan 6200 Operations
115. e in the To field Check the Show box of a value to display the field in the Review window To view wafers proceed to Section 9 2 Reviewing Data To delete wafer records proceed to Section 9 5 Deleting Summaries and Maps Browser 9 5 9 2 REVIEWING DATA You can display a summary and map if any from the database 1 Select the data to review as described in Section 9 1 Selecting Summaries and Maps Choose Select to start the database query When the search completes Browser displays the Review window if matching records were found Figure 9 5 Review Data Dialog Box The Review window lists the data that match your selection criteria Only the fields with their Show check box marked are listed If Browser finds no matching data it displays a dialog message 2 Choose Display to remove the Review window and display the selected data CAUTION The Delete and Delete All commands in the Review window permanently delete data from the database See Section 9 5 Deleting Summaries and Maps for details on deleting data from the database Proceed to Section 9 3 Using the Browser Window for details on viewing summaries and maps 343153 Rev B 5 97 9 6 Surfscan 6200 Operations 9 3 USING THE BROWSER WINDOW When you display data from the database the Browser window shows the summary map if any and histogram Tencor Instruments amp J31 180 188 188 195 195 ela
116. e instrument s wafer handling system can be configured for left to right or right to left handling but not for both To change the cassette wafer handling configuration contact your Tencor Service representative To load a cassette 1 Orient the wafers in the cassette When using a mechanical aligner the flats should face the rear of the cassette See Fig 2 6 Using a mechanical aligner CARK SA Flats to the rear of the cassette Figure 2 6 Aligning Wafers with a Mechanical Aligner When manually aligning wafers one of the flats of each wafer should face the front of the cassette See Fig 2 7 2 Set the heel of the cassette into the carrier guide 3 Set the front edge down on the locator plate Manually aligning wafers Flats to the front of the cassette A A N De YZ Figure 2 7 Manually Aligning Wafers 343153 Rev B 5 97 2 8 Surfscan 6200 Operations 4 Twist the cassette left to right two to three times to seat firmly Step 3 Figure 2 8 Seating the Cassette CAUTION If wafers become scratched or otherwise damaged or are mishandled during wafer handling immediately perform cassette calibration as described in Chapter 6 Calibration 2 2 USING THE INSTRUMENT This section and the remaining sections in this chapter describe the basic techniques needed to operate the Surfscan 6000 series instrument To power up the instrument Pres
117. e mean cross section scattering efficiency to 0 667 um for bare silicon The ratio used to adjust the mean value can be applied to the substrate s calibration curve as described in Step 7 If you entered an actual PSL sphere diameter that is different than one of the standard diameters see Step 4 the instrument adjusts the results accordingly Press SEL to apply the ratio described in Step 7 to the substrate s calibration curve or press CANCEL to exit the calibration procedure If you accept the calibration the instrument adjusts the entire calibration curve for Calibration 6 19 bare silicon by the adjustment ratio The ratio is displayed in the lower right corner of the calibration screen ee TENCOR standard 0 252m 7 Custom Entered 0 282pm Custom Ratio 1 0000 at U 364um Press 2 to use Custom Entered values The custom calibration ratio should be between 0 9 and 1 1 If the ratio is not within these limits contact your Tencor Instruments service representative for a hardware adjustment You can choose to use the custom curve shown 1n red or the Tencor standard curve shown in green To choose the curve to use press 2 The gt gt gt gt symbols identify the selected curve 6 3 1 ABOUT CALIBRATION CURVES The following notes apply to calibration curves e The Tencor standard bare silicon white calibration curve cannot be customized e The Tencor standard bare silicon white calibration curve f
118. e menu The program displays the Select Cassette dialog box default gt Hew Test Cassette properties Cassette height Hormal Humber of slots in Figure 6 24 Select Cassette Dialog Box 3 Choose the cassette to delete from the list box You cannot delete the lt default gt cassette type 4 Choose the Delete button You only can delete cassettes that are not used in any recipe If the Delete button is gray the cassette 1s being used in one or more recipes 5 Choose the OK button to remove the Select Cassette dialog box 343153 Rev B 5 97 Setting Up the System 7 1 7 SETTING UP THE SYSTEM This chapter describes setting up the system using the Setup application and reviewing system status using the Status application The Setup application provides general system setup functions You can set e Cassette slot numbering e Compression methods when saving data into the database e Login method e Message indicators e Printer configuration e Recipes e System log recording e Tencor File Format TFF options e User accounts e Wafer exclusion patterns e System configuration To start the Setup application Choose the Setup icon from the System Menu The Setup window appears Setup menus provide general setup actions user account actions and recipe management actions 2 ACCess 1 Login Recipe 1 Load 1 Config 1 System Figure 7 1 Setup Menus Config menu items provide system configura
119. e user To test a user account 1 Choose Login from the Access menu Setup displays the Surfscan 6000 series Login dialog box Enter the password of the user account you want to test and press ENTER 2 Minimize the Setup window by clicking the Minimize icon at the upper right of the screen If the System Menu is not on the screen double click on the SFS 6200 icon 4 Verify that menus and other accessible actions are correct To exit this user account and return to your original user account minimize the current application window Choose Windows Program Manager from the System Menu and choose Setup or double click on the Setup icon shown at the bottom of the screen Choose Revert from the Setup Access menu to return to your account 343153 Rev B 5 97 Setting Up the System 7 19 7 9 MANAGING RECIPES Using the Setup application you can create edit delete or rename recipes The Recipe menu provides the following choices Hecipe I Load Figure 7 13 Recipe Menu For details on creating recipes see Chapter 6 Recipes The Send to Host and Receive from Host choices are active when the SECS option is installed and SECS is enabled These choices allow you to send or receive a recipe from a host computer See Chapter 21 SECS Option for details 7 10 SETTING SYSTEM CONFIGURATION System configuration can be set through the Setup application s System Configuration dialog box To print a system configura
120. eady click OK If you know the path and filename you can enter the path and filename of the import file in the Device Path Filename field of the Import Export window 10 5 1 SELECTING DATA FOR EXPORT AN OVERVIEW You can select for export individual Recipes Summaries Maps PSL Spheres on Sub strates records Exclusion Patterns and Access Codes Calibration Tables are exported in their entirety and there is only a single System Configuration and User Configuration table Table 10 1 is a general guide to the storage requirements for different types of data 343153 Rev B 5 97 10 8 Surfscan 6200 Operations Table 10 1 Approximate Storage Space for Surfscan Data Recipe ewwa o User configuration 60 bytes total Selecting data for export differs slightly for each type of data The procedures for selecting each type are described in the following sections 10 5 2 SELECTING RECIPES To select all recipes for export 1 Click on the check box to the left of the word Recipes in the Selected Items to be Exported section see Fig 10 1 2 When you click on Export the following message box appears No Recipes records selected Do you want to Export all records Figure 10 9 Export All Records Message Box Click Yes to proceed or No to cancel 343153 Rev B 5 97 Export and Import 10 9 To select recipes for export 1 Click on Select next to the word Recipes in the Selected Items to be Exported section
121. ed sort parameters in the recipe the wafer fails otherwise the wafer passes Certain recipe parameters interact When you change Gain for example Threshold Area From and Haze Range values automatically change to the default values for that gain You 5 3 1 can change the values for these parameters after setting the gain DATA COLLECTION PARAMETERS Data collection parameters are described in the table below See Section 5 5 Selecting Display Options for details on selecting parameter values for the range of interest Data Collection Description Parameter Substrate diameter Substrate size 2 in 3 in 82 mm 100 mm 125 mm 150 mm or 200 mm Edge exclusion The distance from the edge of the wafer toward the center 343153 Rev B 5 97 that 1s excluded from scan results Minimum value is 1 mm Maximum value is one half wafer diameter Recipes 5 5 Data Collection Description Parameter Flat Notch exclusion The wafer exclusion pattern to apply One or more exclu sion regions can be defined by the exclusion patterns listed in this field The areas of the wafer specified by exclusion regions are excluded from scan results See Section 9 5 Defining Exclusion Patterns for details Haze Suppression Increases the Haze Range and Haze From by the value entered Requires analog board P N 223670 Gain Max Size Instrument gain setting Gain determines the range of data collected during a scan Gain is a val
122. ed to the home position and 3 the indexers are moved to the load unload positions If the puck is already in the home position the indexers are moved to the load unload positions PRINT Prints the contents of the current screen Press PRINT twice to select the area to print and to select normal or reverse printing AUTO In the Scan application sets automatic or manual scan sequencing The current mode is shown in yellow in the Status window When Auto is enabled wafers are loaded from the source cassette in a continuous sequence until all the wafers in the cassette are scanned STOP In the Scan application stops the current scan If a scan is not taking place the wafer is returned to its original slot in the source cassette all instrument motion then stops If a scan is taking place it is terminated before returning the wafer to the cassette START In the Scan application starts a wafer scan sequence or resumes a motion after pressing STOP 2 1 3 MOUSE The mouse is a pointing device that can be used to start applications select commands and options enter data and exit applications As you move the mouse the pointer on the screen moves The pointer can change shape depending upon its location in a window For example in the Scan window the pointer changes to a particle cursor when over the wafer map and to a vertical cursor when over the histogram When the system is busy performing an action the pointer changes to an hourgla
123. edures including cleaning the puck Since the distance between slots slot pitch and other dimensions of cassettes can vary the Surfscan 6200 allows more than one cassette type to be calibrated and stored at one time When different cassettes are used the cassette type must be assigned to one of the standard cassette heights set to one or more wafer sizes and calibrated for each size Cassette types can be deleted when no longer needed The lt default gt cassette type is available for all size wafers is set to Normal cassette height and cannot be deleted A cassette type must be selected in each recipe When more than one cassette 1s defined the cassette being used must be selected before calibrating PSL spheres on substrates or haze To calibrate the instrument to a cassette 1 Choose Cassette from the Calibration application Procedure menu 2 Choose the substrate diameter size from the Size menu The program displays the Select Cassette dialog box Select the cassette type to calibrate 4 Choose START to begin the calibration routine The application displays the Cassette Calibration window showing the right cas 343153 Rev B 5 97 6 28 Surfscan 6200 Operations sette tasa Hot Position Callhration basste hype eiom Fince n cee mi the ART edron niw owe hei suima am OHLY in coe Hite f aad Fal be ae Weed They resp oe iah a Former eg fig he coswate Amc fe costes irmi ned conch on Fru ieaie Lee Waiti
124. either Short Report or Full Report from the submenu The utility displays the Viewlog Report window 1 2 95 SYSTEM LOG SHORT REPORT Fage 1 Event Mo Date Time Log Message User Name Access Class z 19941107 1446 09 00 UserLogofi TEHCOR REZE Tencor Factory 4 19941107 14465 12 00 User Logon TEH COR Fd E Tencor Factory el als 1o11 p p cacal Q eA Cose 1178 16 41 Tota2 100 Figure 11 6 System Log Report The Report preview window displays the first page of the report The window contains menus for paging through the report changing the page view size and printing the report To scroll through the current page use the scroll bars 343153 Rev B 5 97 WE Surfscan 6200 Operations To display a page from the report The page buttons in the tool bar control which page you view The counter between the page buttons identifies which page of the total number of pages is currently displayed Display first page Display previous page Display last page Display next page Page currently displayed Figure 11 7 System Log Page Buttons Click the first page button to display the first page of the report the previous page button to display the previous page the next page button to display the next page or the last page button to display the last page of the report Note In a report with many entries the Last Page and First Page actions can require several seconds to complete To change the page view Clic
125. elected choose OK to select by the messages chosen 11 3 4 SELECTING BY DATE To select a date or range of dates l Choose Selected from the View menu The utility displays the View Selected dialog box Fig 11 10 Click the check box in front of the User entry on the left side of the dialog box The button to the right is activated to allow you to define selection criteria 343153 Rev B 5 97 11 12 343153 Rev B 5 97 Surfscan 6200 Operations Click the Date Time Selection button The following dialog box appears below the View Selected dialog box Figure 11 14 User Selection Dialog Box Select the starting date and time from the pair of horizontal scroll bars on the left side of the dialog box as follows e Scroll the Date horizontal scroll bar until the selected date appears above the scroll bar e Scroll the Time horizontal scroll bar until the selected time appears above the scroll bar next to the selected date Select the ending date and time from the pair of horizontal scroll bars on the right side of the dialog box as follows e Scroll the Date horizontal scroll bar until the selected date appears above the scroll bar e Scroll the Time horizontal scroll bar until the selected time appears above the scroll bar next to the selected date Choose OK to add the date range to the selection criteria ViewLog 11 13 11 4 SYSTEM LOG ENTRY DESCRIPTIONS The table below describes the information that is
126. elects the primary and secondary data display Option Description Defect Haze The instrument collects all data and displays defect data in maps and histograms Haze data can be displayed in the wafer map by using the 0 button in the summary table or haze data can be chosen for display through the Display menu Haze Defect The instrument collects all data and displays haze in maps and histograms Defect data can be displayed in the wafer map by using the O button in the summary table or defect data can be chosen for display through the Display menu Defect Only Displays defect data only The instrument does not collect or save haze data Haze Only Displays haze data only The instrument does not collect or save defect data 343153 Rev B 5 97 Recipes 5 17 After each wafer scan the instrument displays the primary data in the Scan window The recipe s Display Type parameter specifies the map and histogram display for the primary data map only histogram only or map and histogram The operator can override the current data display by choosing from the Scan application Display menu 5 5 2 DISPLAYING DEFECTS When Display Option is set to Defect Haze or Defect Only the instrument automatically displays LPDs in the Scan window for each wafer scan Area and scratch defects also can be displayed LIGHT POINT DEFECTS LPDS The instrument color codes LPD bin splits You can set the number of LPD bin splits by setting the recip
127. ellipse is drawn around the area e The length of the major axis of the ellipse is equal to or greater than the Scratch Minimum Length value specified in the User Configuration dialog box e The ratio of the major axis of the ellipse to the estimated width must be equal to or greater than the Scratch Length To Width Ratio value specified in the Detailed Scratch Definition dialog box The instrument estimates width by dividing the area by the length of the major axis of the ellipse e The ratio of the major axis to the minor axis of the ellipse must be equal to or greater than three The instrument reports scratch count and area total in the wafer summary table 343153 Rev B 5 97 5 20 Surfscan 6200 Operations When zooming a wafer map with areas displayed areas appear as follows Areas are shown as a series of chords Figure 5 11 Areas as a Series of Chords Sort options can be set for area count scratch count total area and total scratch length See Section 6 7 Selecting Sort Options 5 5 3 DISPLAYING HAZE When the Display Option parameter is set to Haze Defect or Haze Only haze is the primary data The instrument automatically displays haze data in the Scan window for each wafer scan When Display Option is set to Defect Haze haze is the secondary data The instrument collects haze data which can be displayed by choosing a haze display option from the Display menu The instrument color codes haze data Ea
128. ellow slot number indicates that the instrument is processing the substrate 343153 Rev B 5 97 Scanning 4 19 To select the scan sequence for a cassette NOTE Press CASS The status box displays the scan sequence To start slot numbering at the top of the cassette see the Reverse Ladder Numbering option in Section 7 1 User Configuration Dialog To select one substrate to scan Double click on the slot in the Cassette catalog Or click on the slot of the substrate you want to scan Note If you select only one substrate to scan the instrument enters Direct Access mode Direct Access mode allows you to repeatedly scan the selected substrate by pressing START for each scan Or press 7 or J to move the slot selector to the substrate you want to scan press SEL and then press START When you select only one substrate for processing the instrument enters Direct Access mode To select substrates to scan Press CASS to catalog the cassette Press T or J to move the slot selector to the substrate s to select Press SEL at each slot Selected slots are highlighted To clear the Cassette catalog Press HOME The instrument homes the indexer and if not in Direct Access mode displays the Lot Summary for the substrate s scanned To recatalog a cassette l 2 3 4 Press HOME Wait for indexer motion to stop and then lift the cassette off the indexer Replace the cassette on the indexer Press C
129. els the action Any changes made to dialog box options are ignored The OK button keeps any selections and proceeds with the action To select a command button Click on the command button Or press ENTER to choose OK or press CANCEL to choose Cancel 343153 Rev B 5 97 2 14 Surfscan 6200 Operations 2 5 3 USING CHECK BOXES Check boxes indicate options that can be selected or deselected When an option is selected a small x appears in the check box When the option is off the check box is blank A check box is dimmed when the option is unavailable Bq ID i Selected check box x ID 2 ID 3 L Deselected check box CT ID 4 LE cence Figure 2 14 Check Boxes To select or deselect a check box Click on the check box Or press NEXT to highlight the check box Press SEL to select or deselect the check box 2 5 4 USING RADIO BUTTONS Radio buttons are used to display a group of options where only one item in the group can be selected at a time The selected radio button contains a black dot Blank radio buttons are deselected Gray colored buttons are not available Detailed Save Configuration Summary All Wafers Failed Wafers Passed Wafers None Map Radio button group O AH Weleres O Fated Walters O Pacced Watars None Selected radio button TFF gt All Wafers Failed Wafers gt Passed Wafers None Figure 2 15 Radio Buttons 343153 Rev B 5 97 Basic Skil
130. en you start the instrument you will be warned when available disk space is less than the disk space warning limit of 15 MB e The database can store approximately 10 000 wafer summary records e The exact storage requirements for wafer maps are directly related to the size of the wafer and number of data points collected for the wafer e The system saves TFF data as DOS files 5 7 SELECTING SORT OPTIONS Recipe sort parameters determine when a wafer passes or fails the scan Limits can be set for total number of defects found defects em LPDs per bin area count scratch count area total scratch length total haze as a percentage of total measurable wafer area average haze and peak haze A wafer passes when data does not exceed any limits that are On Sort results are reported in the wafer summaries and in Lot Summary reports When cassettes are configured for sorting L lt R gt lt failed wafers unload to the right cassette passed wafers to the left cassette The Defect Histogram Bin Splits dialog box sets the bin split sort limits For descriptions of other sort parameters see Section 6 3 Recipe Parameters 343153 Rev B 5 97 5 26 Surfscan 6200 Operations To open the Defect Histogram Bin Splits dialog box choose the Bin Limit select button From gt To 0 489 0 6597 ai E 0 69 999 0 99 999 mj m coy Po m co oo oo oo oo oo oo oo A a e L
131. er Desktop The software running on a desktop computer rather than an instrument Data data can be analyzed by importing it into the desktop Dialog box A rectangular box on the screen that can contain a combination of lists options data entry fields and command buttons A dialog box appears when the instrument needs more information before performing an operation Direct access mode See One Wafer mode Disk space The total amount of space available on the hard disk Free disk space is the amount of disk space unused Directory Computer files are stored on the computer s hard disk in directories The directory name identifies the location where the files are stored See Path DOS Disk Operating System also called MS DOS The central program used to control and manage the computer system Double click The mouse action performed when you press and release the mouse button twice in rapid succession The first click selects the item and the second click performs the action associated with the item When 343153 Rev B 5 97 Glossary 4 Surfscan 6200 Operations you double click the left button on an application icon the application starts Left and right buttons have different functions when double clicking Compare to click Drag The mouse action performed when you hold down the mouse button and move the mouse Dragging can be used to choose a menu item and to move a graphics cursor Drive disk The disk drive identifie
132. er or user operator Note that Tencor Engineer and Tencor Service options can be accessed by Tencor personnel only 5 Choose the Menu Type Analysis or Fab Line The menu type setting determines the functions that can be displayed in the System Menu The Analysis menu type provides access to all instrument functions The Fab Line menu type provides access to Scan Calibration Windows Program Manager DOS Prompt and Log Off functions The icons that appear in the user s menu are specified at Step 6 343153 Rev B 5 97 Setting Up the System 7 17 6 Choose OK The program displays the User Account Record dialog box Te NOTE 8 9 User has ability to _ L Change User Configuration _ Create Modify Recipes L Change System Configuration Save Recipes _ Add 7 Delete Modify Users L Import 7 Export Data L Change Host Local Hode L_ Access DataBase Facilities L Modify GEM 7 SECS Parameters L Access System Utilities L Access Early Warning Info Type User Manager L Edit SPC Info Name Customer Manager L Run Diagnostic Software _ Perform System Calibration L Perform Data Backups L Use Windows and DOS Menus Analysis Figure 7 11 User Access Privileges Dialog Box Select access privileges The Setup application allows you to check any privilege listed in the dialog box However only those privileges allowed by the user s user type and menu type will be enabled See Steps 4 and 5 Cho
133. es all field values If you do not enter any selection values in this dialog box and Has Map field is Yes No Wafer Size is All Sizes and the Slot Number is Any Browser selects all wafer records in the database 343153 Rev B 5 97 9 4 343153 Rev B 5 97 Surfscan 6200 Operations Data can be selected using the fields described in the following table Field Name Recipe ID ID 1 ID 7 Has Map Substrate Slot Number Defect Range Date Range Time Range Description Name of arecipe The pull down list gives current recipe names The substrate ID User ID fields Pull down lists give current field values Indicates whether the record must have a map Yes No or Yes No Yes No matches data that is with or without a map The substrate size All Sizes matches all wafer sizes Slot number Any matches any slot number The defect range of interest Enter the starting defect total in the From box and the ending defect total in the To box The creation date range Enter the starting date in the From field and the ending date in the To field The following keys can be used within the Date field period fills in the current date UNDO erases the date field SEL displays the calendar dialog box Use arrow keys or mouse to select a date Use the scroll arrows to view a different month Choose OK to use the selected date The creation time range Enter the starting time in the From field and the ending tim
134. etting does not affect the time required to read data from the database The user manager should experiment with a variety of compression settings to determine the ideal combination for your system Where high throughput is important lower or no compression can be used and regular database maintenance used to archive important data records before deleting them Where conservation of disk space is important higher compression methods can be used It is recommended that the Haze method be set to Light initially To select data compression methods 1 Choose Compression from the Config menu Setup displays the Compression Methods dialog box Compression Methods Particles Heavy Chords Moderate Areas Light Edges Hone Margins Hone Haze Figure 7 7 Compression Methods Dialog Box 2 Select compression methods for each item by cycling through the available param eters 3 Choose OK when complete 343153 Rev B 5 97 7 12 Surfscan 6200 Operations 7 7 SETTING UP FOR TFF FILES Before saving Tencor File Format TFF files first set up the filenaming convention and database Ds The following notes apply to TFF files e When using TFF files on a Tencor DataHub Data Analysis System set wafer origin to Center of Wafer e TFF files can be automatically saved at scan time by selecting an automatic save option in the recipe Files can be manually saved by choosing Write to TFF from the XY menu in Scan or Browser applications
135. ev B 5 97 13 2 Surfscan 6200 Operations 13 1 ROTATING A MAP In the Scan and Browser windows a map can be rotated to a flat or notch position as specified by the orientation settings To have the instrument automatically rotate maps to the selected edge feature Set the Auto Align X Y recipe parameter to On See Chapter 5 Recipes To rotate a map manually to the selected edge feature In the Scan window or Browser window choose Rotate to Edge Feature from the XY menu 13 2 TRANSLATING X Y COORDINATES The Surfscan 6000 series instrument allows you to apply user coordinates from a SEM or other device to a map The translation process consists of the following steps define two points on the map assign user coordinates to these points and apply these coordinates to the map The instrument relocates the origin as necessary When defining a reference point on a map locate a feature using the zoom feature assign a reference number to the feature and save the reference point If user coordinates from a SEM or other device are available you can assign them as you locate the reference point If user coordinates are not available coordinates can be assigned at a later date as described below To define an X Y reference point 1 Display a map Double click the mouse in the map or press ZOOM to magnify the map The instrument displays the Panning window at the upper left 2 Move the cross hair pointer in the Panning wi
136. f statistical control and to improve the capability of the process Status box The box in the lower left of the Scan window that displays the scan sequence scan mode and status messages Subgroup A collection of samples Substrate record A database record for a given substrate and film thickness that contains calibration data Summary The scan summary results System log A list of activities or events performed on the system Using the ViewLog utility the system log can be viewed and printed Log entries can be deleted when no longer needed System Menu The System Menu displays icons of the applications available to the user Tencor File Format A file interchange format that is used for analyzing data on a review station or Surfscan SWIFT Station Text cursor The vertical straight line appearing in fields The text cursor marks the location where characters will appear when typed TFF See Tencor File Format Threshold The bottom limit of the defect or haze range for a scan Throughput The speed at which the instrument processes wafers 343153 Rev B 5 97 Glossary 10 Surfscan 6200 Operations Tile The smallest area on the wafer when collecting haze values Each tile is 832 x 860 um Also refers to an action of displaying more than one window at a time on the screen Title bar Each application displays a title bar at the top of the application window The title bar shows the application name current recipe
137. finable coordinate system to a substrate to rotate the map to an edge feature and to enable map to map displays in Browser User defined coordinates from a scanning electron microscope SEM or other device can be applied by selecting two features on the map as reference points assigning coordinates to these reference points and applying the new coordinates to the map The Surfscan 6000 series instrument automatically relocates the origin based upon the coordinates you supplied This chapter discusses e Rotating a map automatically or manually e Assigning reference points to a map The points can be assigned user specified coordinates e Applying user coordinates to a map e Sending coordinates and size to the COM3 port NOTE To permit map to map displays in Browser one or both maps must have been saved with the X Y Coordinates Option enabled In the Scan and Browser windows X Y Coordinate actions can be selected from the X Y menu 1 Rotate to edge feature These X Y Coordinate actions can be used during the scan process in the Scan window or applied to wafers already saved in the database in the Database Browser window NOTE If TFF files are to be used on the Tencor DataHub Data Analysis System Surfscan SWIFT Station or Surfscan Revisit Station set the origin position to Center of Wafer See Chapter 7 Setting Up the System for details on setting substrate orientation and origin location 343153 R
138. g starting 11 1 W Wafer alignment automatic 5 22 Wafer comment entering 4 16 Wafer ID 4 8 From TFF filename 7 14 Wafer ID entering 4 16 Wafer map Using 4 22 Zooming 4 23 Wafer orientation 7 6 Wafer origin 7 6 Wafer records selecting 9 2 Wafer summaries and maps Exporting 10 10 Wafer summary 4 15 4 32 4 33 Wafers Selecting 4 19 Wafers selecting 4 19 Wireframe MicroView 4 26 X X Y coordinates option 13 1 X Y coordinates sending via COM3 13 6 Y YES key 2 3 Z Zoom Histogram 4 20 Wafer map 4 23 ZOOM key 2 3 343153 Rev B 5 97
139. g from the menu bar The following message box appears Importing Record Listing From Desktop Abort impor Figure 10 3 Import in Progress Message Box As each record in the import listing is read from the import file it appears in the Status box Each item in the Status box is prefixed with a blank space to indicate that this record is in the import file but has not yet been imported into the database You can abort the import listing before it is finished by clicking on the Abort Import button When the import listing is finished the Import in Progress dialog box closes 5 You can scroll the Status box if necessary to view the list of all records contained in the import file 343153 Rev B 5 97 10 4 Surfscan 6200 Operations 10 4 IMPORTING DATA Before importing data enter the path and filename of the file on the diskette drive or hard disk directory using the alphanumeric keyboard CAUTION All data with identical IDs will be overwritten when importing a new record A message will appear indicating that the data is being updated if records with the same ID exist To import all records from a data file 1 Select Import From from the File menu The Import From dialog box appears Fig 10 2 2 Choose the destination drive for the export file from the Drives pull down list This can be a network drive if you have the DECnet Option or Windows for Workgroups Option 3 Select the desired import file and cl
140. ghts This section describes how to bind various Surfscan states to lights on a Patlite device Briefly the idea is to process data from an ASCII file that maps combinations of states to light displays Each time the status changes the new state is compared to entries in the list derived from the ASCH file When a match is found the corresponding light configuration is sent to the Patlite device Each entry in the ASCII file is in the following general format lt Status gt lt LightCondition gt lt Status gt is specified as follows e Select either nothing or one keyword from any of the Tables 15 1 through 15 6 shown earlier in this section The order of the keywords is unimportant since no keywords are duplicated in any of the tables When no keyword from one of the tables is specified that portion of the status information is disregarded e For a match to occur and the corresponding lt LightCondition gt to be selected each specified status must currently exist on the Surfscan Those status conditions that are not specified tables from which no keyword has been selected are ignored and might have any value lt LightCondition gt is specified as follows Clear lt AddressOfLight gt lt Action gt The keyword Clear is optional When present all existing lights are turned off before the specified action takes place 343153 Rev B 5 97 15 6 Surfscan 6200 Operations lt AddressOfLight gt specifies which light i
141. haze calibration curve that can be modified as necessary See Section 6 4 Haze Calibration The cassette calibration procedure allows you to calibrate for one or more wafer cassettes and to save cassette calibrations See Section 6 5 Cassette Calibration 6 1 USING THE CALIBRATION APPLICATION The Calibration application provides PSL spheres haze and cassette calibration proce dures stores calibration results in the Surfscan 6200 database and allows PSL sphere and haze calibration curves to be customized To start the Calibration application Choose the Calibration icon at the System Menu The instrument displays the Calibration window Figure 6 1 Calibration Window The Calibration menu bar lists the following menu titles Procedure Substrate Size Options and Results Clicking START in the menu bar is equivalent to pressing START on the keypad 343153 Rev B 5 97 6 2 Surfscan 6200 Operations The Procedure menu lists calibration procedures and other application commands 1 Procedure x 1 Cassette Learn Procedure Menu Item Cassette Learn PSL Spheres on Substrate Haze Calibration Load Wafer From Export Import Extend Puck Exit Description Starts the cassette calibration procedure Not available when indexer system configuration is set to None Starts the PSL on spheres calibration procedure You must choose a substrate substrate diameter size cassette type and PSL sphere
142. he Standard Orientation Selection dialog box Standard Onentation Selection Flat Position gt Right gt Bottom Top Notch Position Lett Right gt Bottom Top Origin Position Lower Lett gt Upper Left Center of Wafer Figure 7 3 Standard Wafer Orientation Dialog Box 4 Select the standard flat and notch orientations 5 Select the origin position Choose OK to set these positions 343153 Rev B 5 97 Setting Up the System 7 7 7 4 DEFINING EXCLUSION PATTERNS Regions of a wafer can be excluded from the result of a scan by defining an exclusion pattern An exclusion pattern can contain up to three regions that are excluded from defect and haze counts Each region can be defined using the Exclusion Pattern dialog box For a wafer with a flat one of the following exclusion regions can be defined the flat 1s assumed to be at the bottom of the wafer Bottom left Top right Bottom middle Top left Bottom right Top middle For wafers with a notch one of the following exclusion patterns can be defined the notch is at the bottom of the wafer Bottom and left Top and left Bottom top and left Bottom and right Top and right Bottom top and right Bottom only Top only Bottom and top 7 4 1 EXCLUSION REGIONS Exclusion regions are always rectangles An exclusion region is defined by specifying the location and dimensions of the region in millimeters The Exclusion Pattern dialog box displa
143. he screen After printing SPC data be sure to reset the printer to Portrait orientation for normal Surfscan operation 14 5 SPC TUTORIAL This section describes the fundamentals of statistical process control This section presents a brief description of statistical process control methodology a description of control charts and a discussion of control limits and rules and implementation guidelines 14 5 1 INTRODUCTION There are many ways to describe a body of data The simplest and least descriptive is to list data in tabular form Further data can be described by expressing one or more specific characteristics of the data such as the mean median range or standard deviation However these descriptive statistics provide no information about the overall relationship between data points A better way to interpret a body of data is to display it graphically While graphical summaries of data are not as specific as numeric summaries they often can reveal features that are not otherwise recognizable Histograms Pareto charts pie charts and trend charts are all examples of graphically summarizing a set of data A histogram plots the distribution of frequency of data 343153 Rev B 5 97 Statistical Process Control Option 14 7 A Pareto chart plots characteristics of the data on one axis and the frequency of those characteristics on the other axis Generally the characteristics are arranged in decreasing frequency A Pareto chart
144. hese states indicate the Local Remote and OffLine OnLine for GEM 93 state of GEM SECS Table 15 5 Patlite Error Message States Local GEM is operating locally GEM is OnLine but is being operating locally Remote GEM is being remotely operated by the host GEM is OnLine and is being operated remotely by the host OffLineEgOff N A GEM is OffLine Equipment is OffLine OffLineAttemptOn N A GEM is OffLine attempting to go OnLine OffLineHostOft N A GEM is OffLine host is OffLine OffLine Never in this state GEM is in one of the two OnLine states Local or Remote OnLine Always in this state GEM is in one of the three OffLine states listed above 343153 Rev B 5 97 Patlite Option 15 5 GEM LINK STATE Three states are defined that indicate the Link State of the GEM SECS module Table 15 6 Patlite GEM Link States Disabled Communication with the host is disabled on the Surfscan Operator intervention is required to attempt to communicate with the host Enabled Communications with the host are enabled but the host has not yet responded Communicating Communications with the host are proceeding normally 15 3 CONFIGURING THE PATLITE 15 3 1 ASCII FILE FORMAT So far we have defined the bit patterns that must be sent to the Patlite decoder box to turn various lights on and off Also we have defined several classes of status information that are available to control the Patlite li
145. hite curve Cross section Tencor standard editable green curve C Diameter Diameter Tencor standard non editable white curve Cross section Tencor standard editable green curve Diameter Custom red calibration curve Film C Cross section Diameter Tencor standard non editable white curve Cross section Tencor standard editable green curve 6 4 HAZE CALIBRATION This section describes the Surfscan 6200 haze calibration procedure Using the Calibration application you can view the current haze calibration curve measure haze using sample wafers and customize the haze calibration curve To view the current haze calibration curve 1 Choose Haze from the Procedure menu 2 Choose a substrate diameter size from the Size menu 3 Click on Results in the menu bar Or press MENU Press to highlight Results and then press ENTER 6 4 1 MEASURING HAZE This section describes the process of measuring haze To measure haze you must scan a sample wafer The Haze Value dialog box allows you to set scanning parameters and select the haze value of interest When the scan is complete the Calibration application displays a wafer map of the scanned wafer a histogram of haze pixels and a summary of haze results The measured haze can be displayed on the haze calibration curve 343153 Rev B 5 97 Calibration To measure a haze value 6 21 1 Choose Haze from the Procedure menu 2 Choose the substrate diameter size from the S
146. hoose Data from the Variables menu EWS displays the Data dialog box DATA DAILY YALUES la FORWARD SWEEP TIME jal wa HHS RHHS HH 1 2 3 4 5 6 7 8 9 1 1 1 1 1 1 1 a1 1 1 BO Do OT aT fa Gd M a Sree SSS SES Figure 12 2 Data Dialog Box Data values preceded by a pound sign have been calculated by the system Values without a pound sign are measured values To view the previous 100 values choose Previous 100 To change the time scale for the function choose Change Scale and choose a new time scale from the Time Scale dialog box 343153 Rev B 5 97 12 4 12 1 3 FUNCTION DISPLAY Surfscan 6200 Operations Function displays consist of a unit of measurement for data values such as microseconds a display interval a display scale linear or logarithmic limit controls upper and lower threshold settings and the display type To view display options for the selected function l 343153 Rev B 5 97 Choose Display from the Variables menu EWS displays the Display dialog box 7 EARLY WARNING SYSTEM FUNCTION DISPLAY i FORWARD SWEEP TIME Units MicroS econds Display Scale Linear a Log Limits Bidirectional Unidirectional gt No Limits C Trend Data Display Interval Months Days Hours Minutes Sees Display Type Thresholds Upper Limit Upper Warning 2495 Nominal 2440 Lower Warning Pai C Step
147. how Bin Split Area From Description The data to collect display and save Defect Haze the instrument collects defect and haze data and displays defect data when the scan completes Haze data can be overlaid by selecting the summary table O button Haze Defect the instrument collects defect and haze data and displays haze data when the scan completes Defect data can be overlaid by selecting the summary table O button Defects Only the instrument collects displays and saves defect data only Haze Only the instrument collects displays and saves haze data only The initial map and histogram display combination The display can be changed temporarily by selecting from the Scan application Display menu Map Histogram displays a wafer map and histogram Map displays map only Histogram displays histogram only LPD size calculation and display parameter diameter um or cross section um Bin split value indicates number of bins used To set bin splits choose the SEL button The Bin Split dialog box allows you to edit LPD bin split ranges and to set the number of bins used This value determines the LPD size above which the instrument classifies LPDs as areas Defaults to the current Max Size value Maximum diameter 1s 9900 um and max imum cross section is 99000 um To set scratch parameters click the Area From SEL button See Areas And Scratches in Section 5 5 2 Displaying Defects
148. ick OK Note If the file does not have an SFS extension select All Files from the List Files of Type pull down list If you know the path and filename you can enter the path and filename of the import file directly into the Device Path Filename field of the Import Export window 4 Click on Import in the menu bar The following message box appears All the records from the data file will be imported into the data base Figure 10 4 All Records Message Box 5 Click OK The system imports the data from the file to the database A message box appears that shows the progress of the data transfer the Status box is also updated To import selected records from a data file 1 Select Import From from the File menu The Import From dialog box appears Fig 10 2 2 Choose the destination drive for the export file from the Drives pull down list This can be a network drive if you have the DECnet Option or Windows for Workgroups Option 3 Select the desired import file and click OK Note If the file does not have an SFS extension select All Files from the List Files of Type pull down list If you know the path and filename you can enter the path and filename of the 343153 Rev B 5 97 Export and Import 10 5 import file directly into the Device Path Filename field of the Import Export window 4 Click on Get Import Listing in the menu bar to generate an import list in the Status box You can scroll the Status bo
149. ight MicroViews can help you identify scratches surface film and other features Optional features include support for operation over a DECnet local area network an X Y coordinates function a statistical process control SPC package remote instrument control using Semiconductor Equipment Communications Standard II SECS II desktop operation and an expanded I O option 343153 Rev B 5 97 Wao Surfean 6200 Operations 1 3 ABOUT THIS MANUAL This section provides information that will help you to understand the conventions and organization of this manual 1 3 1 CONVENTIONS The following conventions are used in this manual Convention Used to show italic Information you type at the instrument keypad or using the alphanumeric keypad Bold Messages and examples SMALL CAPS Keys to press Initial Caps Parameter names NOTE In this manual 6XX0 refers to any Surfscan 6000 series instrument 1 3 2 HOW INFORMATION IS ORGANIZED This manual provides instructions on using the instrument to take measurements The chapters include basic operating instructions getting started steps scanning procedures recipes calibration system administration topics and so on The manual includes a glossary and an index 1 3 3 RELATED MANUALS Tencor Instruments also provides the Surfscan 6100 6200 Reference Manual and the Surfscan 6XX0 SECS Interface Manual The Surfscan 6100 6200 Reference Manual is a reference guide covering installati
150. igure 10 1 Database Export Import Utility Window The menu bar provides command actions The filename box is used to enter the export or import filename The Status box lists the status of an export or import in progress and lists the contents of an import file when Get Import Listing is used The selection list shows selected data with check boxes The selection buttons allow selection of particular items of the each record type except Calibration Tables System Config and User Config The Count column reports the number of records exported or imported Export and Import 10 3 10 3 VIEWING AN IMPORT LIST To view an import list 1 Select Import From from the File menu The following dialog box appears Si mport rom File Hame Directories ac test sfs Es ach test sts ry L cancer Her i _ Network E List Files of Type Sufscan cst E Figure 10 2 Import From Dialog Box 2 Choose the destination drive for the export file from the Drives pull down list This can be a network drive if you have the DECnet Option or Windows for Workgroups Option 3 Select the desired import file and click OK Note If the file does not have an SFS extension select All Files from the List Files of Type pull down list If you know the path and filename you can enter the path and filename of the import file directly into the Device Path Filename field of the Import Export window 4 Choose Get Import Listin
151. igure 2 3 Figure 2 4 Figure 2 5 Figure 2 6 Figure 2 7 Figure 2 8 Figure 2 9 Figure 2 10 Figure 2 11 Figure 2 12 Figure 2 13 Figure 2 14 Figure 2 15 Figure 2 16 Figure 2 17 Figure 2 18 Figure 2 19 Figure 2 20 Figure 3 1 Figure 3 2 Figure 4 1 Figure 4 2 Figure 4 3 Figure 4 4 Figure 4 5 Figure 4 6 Figure 4 7 Figure 4 8 Figure 4 9 Figure 4 10 Figure 4 11 Figure 4 12 Figure 4 13 Figure 4 14 Figure 4 15 Figure 4 16 List of Figures and Tables LIST OF FIGURES AND TABLES Surfscan 6100 6200 Surfscan 6000 Series MicroView Surfscan 6100 6200 Major Components Auxiliary Panel Keypad Mouse and Mouse Pad Floppy Disk Drive Aligning Wafers with a Mechanical Aligner Manually Aligning Wafers Seating the Cassette Surfscan 6000 Series Application Window Example of a System Menu Pull Down Menu Control Menu Command Buttons Check Boxes Radio Buttons List Boxes Pull Down Lists Cycle Controls Data Entry Field Scroll Bar Logon Dialog Box System Menu Analysis Manager Access Scan Application Window Recipe Selection Dialog Box Lot ID Dialog Box Scan Window after a Scan Lot Summary Window Scan Window Parts Haze Results in Scan Window Scan Application Menus Database ID Definitions Dialog Box Lot ID Dialog Box Summary Box Wafer ID Dialog Box Comments Dialog Box Cassette Processing Commands and Indicators Histogram Histogram Markers XV 2 1 2 2 2 3 2 5 2 6 2 7 2 7 2 8 2 9 2
152. ilable to the Patlite control software This part of the software will be made aware of any changes in the status of the instrument at the time the changes occur Each of the tables below lists a keyword Value and a description of the state of the Surfscan when that value is true The keywords shown are specified by the user as described later in this appendix The following information is available to the Patlite control software 15 2 1 SCAN STATE At the present time 18 states are defined for the Scan application The following 18 states plus several combined states are available for Patlite purposes Table 15 1 Patlite Scan States NoScan Scan application is not running Ready Scan application is idle WaferInSystem Scan application is idle but there is a wafer on the puck Cataloging A cassette is currently being cataloged 343153 Rev B 5 97 15 2 Surfscan 6200 Operations Table 15 1 Patlite Scan States continued One or both of the indexers are being returned to the home position Preparing the cassette for a scan from an uncataloged cassette Waiting Next wafer has been loaded to the puck and is ready for scanning still processing data from the previous scan Holding A wafer is currently being held on the puck possibly for a microscan operation Its cassette slot position is known Idle only one wafer from the cassette has been selected for scanning Measuring the size of a wafer in preparation for a safe unload I
153. ile Note that TFF stored values are in Diameter Units Also note that a 0 will be stored in the TFF file for any Particle or Area value exceeding the Measured Value range Table 7 1 TFF Format Standard Precision Range of TFF Range of Range of Stored Values Field Type Measured Values Diameter Values 10 x diameter Particles gt 0 to 6553 5 um gt 0 to 6553 5 um gt 0 to 65535 Areas gt 0 to 33 73 mm gt 0 to 6553 5 um gt 0 to 65535 343153 Rev B 5 97 7 14 Surfscan 6200 Operations Table 7 2 TFF Format Extra Precision Range of Range of Range of TFF Field Type Format Measured Values Diameter Values Stored Values Particles Std gt 32 767 to 3276 7 um gt 32 767 to 3276 7 um gt 327 to 32767 Particles Ext gt 0 to 32767 nm gt 0 to 32767 nm 32768 to 65535 Areas Std gt 843 26 um gt 32 767 to 3276 7 um gt 327 to 32767 to 8 432 mm Areas Ext gt 0 to 843 26 um gt 0 to 32767 nm 32768 to 65535 Overflow Value 7 Touse the TFF filename as the Wafer ID check the Use TFF Filename as the Wafer ID check box 8 Choose OK to close the Tencor File Format dialog box 7 7 2 SETTING DATABASE IDS Tencor File Format TFF files require that product ID process level ID and processing equipment ID information be assigned to user ID fields If a database ID field assigned to product process or equipment is blank the default is used product ID is set to the instrument model 6200 for example process ID is set to
154. ils on instrument configuration and user account management You should also refer to Chapter 8 Working with the Database for details on setting up and using the instrument database 3 2 USING THE DOS SHELL For advanced users When you switch to the DOS shell close all other Surfscan 6000 series applications and use the C icon in the Surfscan 6000 series System Menu CAUTION Exiting to DOS by any other means except the C icon can damage the instrument motion subsystem When you are finished using the DOS shell press the Reset button to reboot the computer 3 3 DISK AND DATABASE SPACE The hard disk contains many types of data files including the Surfscan 6000 series database file It is important that free space be available on the hard disk at all times and that the database file be maintained on a regular basis In general you should consider the database full when it contains 10 000 or more wafer summaries or 300 or more wafer maps You should consider the hard disk full when less than 15 MB are free 343153 Rev B 5 97 Getting Started 3 5 The Tencor Instruments banner at the top of the screen contains a disk status icon Tencor Instruments Disk status icon When the disk status icon is green disk and database space is available When the disk status icon is yellow free disk or database space is getting low and your system manager needs to increase free space When the disk status icon is red the
155. in parentheses communication mode Local or Remote and window control buttons Trend chart A plot of data that preserves the time order sequence in which the values occur Also called a running record User ID A customer defined data field that is stored in the database User names The names assigned to operators engineers system managers and other instrument users This name must be supplied when starting the instrument and determines which functions the user is allowed to perform Variables In statistical process control those characteristics of a part or process that can be measured Variables are measured on a continuous scale and are described by normal statistics Wafer comment A comment that can be applied to a wafer Wafer ID A name number or other identifier applied to a wafer Wafer IDs are stored in the database Wafer map An area on the screen that displays a defect or haze map of the wafer A part of the Scan and Browser Review windows Wafer summary An area that displays wafer scan results defect and haze ranges and controls for enabling or disabling the display of ranges Wafer summaries are displayed in the Scan and Browser Review windows Window Rectangular area for displaying and running an application program The Scan application displays the Scan window X MR chart In statistical process control a variables control chart used to track the mean and moving range of a data set having a sample si
156. indow Tencor struments Tois hecna 0 Toimil loam E Figure 11 1 System Log Window The System Log window displays a blank log listing The View Report and Delete menus can be used as follows e The View menu allows you to view all or selected records from the System Log to specify sorting options to choose the columns to list and to clear the listing See Section 11 1 Viewing the System Log e The Report menu allows you to print a system log report using the current selected log entries You can preview the report on the screen before printing See Section 11 2 Viewing and Printing System Log Reports e The Delete menu allows you to delete entries from the System Log You can delete all log entries or selected log entries e The Help menu allows you to run the Surfscan Help system You can select the main help contents screen select help on using the Viewlog utility or select instructions on using the help system You can also display the About Viewlog message box 343153 Rev B 5 97 W200 Surfscan 6200 Operations 11 1 VIEWING THE SYSTEM LOG This section describes how to view entries in the System Log You can e View all entries or select the log entries to view e Sort the entry list e Move columns from one location to another e Change column widths To view all entries in the system log 1 Ifany entries currently appear in the log choose Clear All Selections from the View menu 2 Choose Al
157. ing keys can be used when editing a calibration curve Key Function gt Moves the cursor in small steps in the direction of the arrow T I Moves the cursor in large steps N moves the cursor to the right 4 moves the cursor to the left ENTER Confirms a point add or point change NEXT Moves the cursor in large steps to the right CANCEL Cancels curve editing 343153 Rev B 5 97 Calibration Key SEL UNDO ZOOM 6 15 Function Moves the cursor in large steps to the right including moving it exactly over a point Deletes a point When the cursor is exactly over a point allows you to delete or change the location of the point When the cursor is not exactly over a point allows you to add a point Displays a bounding box around the point to add delete or change To move the calibration curve cursor Move the mouse or press gt T 4 and SEL To add a point to the calibration curve l 2 3 Move the cursor to the location on the curve to add the point Double click the left button or press ZOOM to enter edit mode The bounding box shows the limits for the point Calibration Curves 5 pilicon Dioxide 10004A C j E 5 5 C t l E r p mi J 1 2 z Diameter pm Calibrated Tue Feb 18 1992 02 59 PM Adding new calibration point Press ENTER to add now Diameter 0 6145pm Fress CANCEL to abandon this change Cross section 1 030pm Figure 6 13 Ad
158. ing the report and the default printer is set to one of the following e HP LaserJet e HP DeskJet or DeskJet Plus e HP PaintJet or PaintJet XL e Generic Text Only Best results are obtained by using a fast continuous form feed printer supporting 66 lines per page If this printer type is available set the default Windows printer to Generic Text Only and set up the printer as follows in the Windows Printer utility Parameter Printer Paper Size Paper Feed No Page Break Printer Codes 343153 Rev B 5 97 Setting Text Only Letter Continuous Disabled All Blank Working with the Database 8 1 8 WORKING WITH THE DATABASE This chapter describes the database system and provides instructions for e Managing disk space and the database so out of space errors do not occur e Backing up and restoring the database e Printing recipe settings user configuration and system configuration e Using database queries You must have Analysis Manager access to use database utilities 8 1 ABOUT THE DATABASE SYSTEM The database is stored on the hard disk and contains the results of scans recipe definitions system and user configuration tables user account records system log entries and calibration tables 8 1 1 DATABASE UTILITIES Using database utilities you can e Back up data to floppy disks the hard disk or a network disk e Print recipe system configuration and user configuration reports e Export and import
159. int options press PRINT twice in rapid succession If the graphics printer is set to FILE the instrument prints the wafer maps to a disk file See Section 9 12 Setting Printer Configuration 5 6 4 AUTOMATIC SAVING The instrument automatically saves wafer summaries wafer maps and Tencor File Format TFF files as specified in the recipe s Detailed Save Configuration dialog box For more information on TFF files see Section 9 7 Setting up for TFF Files By choosing SAVE in the Scan window you can save data not already saved To set automatic save operations 1 Open the recipe by choosing View Modify from the Recipe menu 2 Click the Auto Save select button to display the Detailed Save Configuration dialog box Detailed Save Configuration Summary All Wafers Failed Wafers Passed Wafers None Map O AH Weiers Fated Walters CO Poeeccod Waters None TFF O Al Waters O Failed Wafers gt Passed Wafers None Figure 5 14 Detailed Save Configuration Dialog Box 3 Choose automatic saving options for summaries wafer maps and Tencor File Format TFF files Save Option Description All Wafers Save data for both passed and failed wafers Failed Wafers Save data only if wafer fails Passed Wafers Save data only if wafer passes 343153 Rev B 5 97 Recipes 5 25 Save Option Description None Do not save data The instrument has the following disk and database limitations e Wh
160. into the existing work space For example if a list of filenames is longer than will fit in a list box vertical scroll bars are displayed to allow you to view the names not shown Scroll arrow Scroll bar Scroll box Figure 2 20 Scroll Bar To scroll with the mouse refer to the following table To scroll One line One window Continuously To any position Indexing Do this Click a vertical scroll arrow Click in the scroll bar above or below the scroll box Hold down the left mouse button while pointing to one of the scroll arrows When the desired information appears release the button Drag the scroll box along the scroll bar to the desired position The length of the scroll bar indicates the amount of the information in the list so moving the scroll box to the middle of the scroll bar displays information in the middle of the list or document You can also scroll to a specific part of the file list using the indexing approach Click on the field above the file list to display the text cursor then type the first few letters of the filename and press ENTER The list will scroll to the first filename having the unique combination of characters entered To scroll with the operator keypad Press T or J to move the selection bar vertically through the list A list is automatically scrolled as necessary Press HOME to display the top of the list 343153 Rev B 5 97 Basic Skills 2 19 2 6 PRINTING
161. iological Products of the National Center for Devices and Radiological Health CDRH This product conforms to the requirements for a Class I Laser product HIGH VOLTAGE This system contains components requiring high voltage between 500 and 2500 VDC 343153 Rev B 5 97 vii REVISION LOG This manual describes the operation of the Surfscan 6100 and 6200 instruments with soft ware version 3 2 This manual and the Surfscan 6100 6200 Wafer Surface Analysis Sys tem Reference Manual replace the single Surfscan 6100 6200 Wafer Surface Analysis System User Manual provided with software versions 3 1 and prior Other than rearrangement of material into two volumes the following changes have been made e Chapter 6 Calibration This chapter was revised to include the new automatic calibration curve generation feature for oxides and nitrides e Chapter 15 Patlite Option This is a new chapter describing the Patlite option 343153 Rev B 5 97 Table of Contents TABLE OF CONTENTS 1 Introduction 1 1 1 2 1 3 Before Starting About the Instrument About this Manual 1 3 1 Conventions 1 3 2 How Information is Organized 1 3 3 Related Manuals 2 Basic Skills 2 1 2 6 Operator Interface 2 1 1 Auxiliary Panel 2 1 2 Keypad 2 1 3 Mouse 2 1 4 Floppy Disk Drive 2 1 5 Working with Cassettes Using the Instrument Working with Application Windows Working with Menus Working with Dialog Boxes 2 5 1 Usi
162. ion fill the cassette with dummy wafers and use the Move command to unload and load wafers for each slot Watch for handling errors If any occur consider using different cassettes or contact your Tencor Service Representative for a system adjustment To add a cassette type L 2 J Choose Cassette from the Calibration application Procedure menu Choose the wafer diameter size from the Size menu The program displays the Select Cassette dialog box default gt Hew Test Cassette properties Cassette height Hormal Humber of slots in Figure 6 23 Select Cassette Dialog Box Type the new cassette name in the text box 4 Using the cycle control select a cassette height e Normal for most cassettes e Empac for Empac cassettes e Stretch for cassettes with greater than usual distance between slots Fluoroware Teflon cassettes for example After being added you cannot change the cassette height setting for a stored cassette type To reset the cassette height parameter for a cassette type you must delete the cassette type add the cassette type back to the list specify the new cassette height and recalibrate the cassette Choose the Add button 343153 Rev B 5 97 6 30 Surfscan 6200 Operations 6 Choose the OK button to remove the Select Cassette dialog box To delete a cassette type 1 Choose Cassette from the Calibration application Procedure menu 2 Choose the wafer diameter size from the Siz
163. ipe listing Database Reports utility 5 1 RECIPE MENUS Recipe menus in the Scan and Setup applications provide recipe actions 2 Recipe 1 Load Setup Application Recipe Actions Scan Application Recipe Actions Figure 5 1 Recipe Menus 343153 Rev B 5 97 5 2 Surfscan 6200 Operations Menu items with the same titles in the Scan and Setup applications perform identical actions Recipe actions are Choose This To Do This Load Open and load a selected recipe Displays the recipe selection dialog box View Modify View or change the current recipe Displays the Recipe dialog box New Create a new recipe Displays the New Name dialog box Type the recipe name and choose OK The instrument sets initial data collection data display except haze range and haze from and configuration values to the previous recipe s values The instru ment sets haze display and sort parameters to maximum values Use View Modify to change recipe settings Save Save the recipe using the current recipe name Save As Save the current recipe using a new name Displays the New Name dialog box Delete Delete a selected recipe Displays the selection dialog box 343153 Rev B 5 97 Recipes 5 2 USING THE RECIPE DIALOG BOX A recipe can be created modified or viewed by opening the Recipe dialog box from the Scan or Setup applications The dialog box contains four general parameter areas data collection data di
164. iption recipe name Name of the recipe enclosed in brackets RECT1 Scribe mark exclusion zone definitions From one to five zones RECT2 can be entered for each recipe RECT3 RECT4 RECTS5 X X coordinate of the scribe mark y Y coordinate of the scribe mark dx Width of the scribe mark exclusion zone in microns dy Height of the scribe mark exclusion zone in microns 0 Rotation angle 90 to 90 degrees The SMEZ keeps its defined width and height and rotates around its center point Use a positive value to rotate the SMEZ counterclockwise Use a negative value to rotate the SMEZ clockwise Figure 12 12 shows a scribe mark exclusion zone and the resulting SMEZ defini tion Diagnostic Tools 12 15 Scribe mark at 10000 Y 5000 Scribe mark exclusion zone 800 um 1200 um X SMEZ INI definition RECTI 10000 5000 1200 800 QO Figure 12 12 SMEZ Definition Example Figure 12 12 shows the scribe mark exclusion zone rotated 45 degrees Scribe mark at 10000 Y 5000 Scribe mark exclusion zone Yso um DN i To rotate A counterclockwise use a positive angle bith 200 um X X SMEZ INI definition RECT1I 10000 5000 1200 800 45 Figure 12 13 SMEZ Definition Example Rotated 45 Degrees The SMEZ is rotated around its center 343153 Rev B 5 97 X Y Coordinates Option 13 1 13 X Y COORDINATES OPTION The X Y Coordinates Option allows you to apply a user de
165. isson statistics Poisson distributions have the following characteristics e The distribution is skewed e The data can range from zero to plus infinity e The data range is discrete e The distribution is uniquely defined by its mean Variables are characteristics of the process that can be measured For example line width in micrometers film thickness in Angstroms or resistance in Ohms are variables Variables are measured using a continuous range of values and are described using Gaussian normal statistics Normal distributions have the following characteristics e The distribution is symmetric and bell shaped e The data can range from minus infinity to plus infinity e The data range is continuous e The distribution is uniquely defined by its mean and standard deviation If the characteristic to be tracked is an attribute described by Poisson statistics a C chart is needed A C chart is valid for all sample sizes provided that the sample size 1s constant If the characteristic to be tracked in a variable described by normal statistics an X MR chart is used where MR stands for moving range The moving range is calculated by taking the difference between successive data points Particle counts being attributes should be charted using a control chart technique based on Poisson statistics that is a C chart To construct a C chart 1 Select a constant sample size usually one wafer 2 For each inspection unit c
166. istics on the other axis For example defect type versus number of each defect type Path to file The location of a file or directory A complete path consists of a drive identifier A for example followed by the directory and subdirectory names In C DATA TEMP TEST DAT the path to the TEST DAT file is C DATA TEMP Pie chart A plot of data represented by a circle divided into pie shaped segments Each segment represents a characteristic of the data set The size of each segment is proportional to the percentage of the full data set represented by the characteristic Point To move the mouse until the tip of the pointer overlaps points to an item on the screen See pointer Pointer The object on the screen that moves when you move the mouse The pointer changes into other shapes to indicate certain modes or when the system is busy For example the pointer changes into the Tencor logo when the software requires time to perform an action The Tencor logo pointer can be moved on the screen but you cannot perform another action until the pointer changes back to its normal shape Process The combination of people machine equipment raw materials and environment that produces a given product or service PSL spheres Polystyrene latex PSL spheres on a substrate are used when calibrating the instrument for a given substrate film thickness and defect size Query A term that refers to obtaining a subset of data from a database
167. ize menu 3 The application automatically uses the lt default gt cassette type unless more than one cassette type has been defined for the wafer size Then the application displays the Select Cassette dialog box Select the cassette being used and choose OK The application displays the Haze Calibration Value dialog box 4 Choose the haze value of interest If the value is not listed choose an unused option to define a new value 5 If you are an analysis user choose the Select button to set haze scan recipe parameters Choose Haze Calibration Value Calibration Recipe Parameters Haze values 0 100 ppm gt 0 500 ppm C 1 00 ppm gt 5 00 ppm O 10 0 ppm 50 0 ppm lt gt 100 ppm gt 500 ppm gt 1000 ppm gt 5000 ppm 10000 ppm gt 50000 ppm Haze value ppm Maximum C 2 Edge exclusion mm PHT gain setting Haze range Limited Lower display limit ppm 0 040 Upper display limit ppm 0 20 Figure 6 17 Select Haze Calibration Value Dialog Box 6 Verify recipe parameters and change as required Recipe Parameter Haze Value ppm Description Selected haze value in parts per million Use this field to enter a new value when unused is selected in the haze value option group If you enter a value other than the selected haze value the program displays an error mes sage To delete the selected haze value enter 0 and choose OK The selected diameter is set to unused
168. k box 2 14 Command button 2 13 Cycle control 2 16 Data entry field 2 17 List box 2 15 Pull down list 2 16 Radio button 2 14 Select button 2 17 Selection bar 2 13 Direct access 4 7 Disk and database space 3 4 Disk full messages 8 4 Disk full recovery 8 6 Disk management 8 3 Disk usage icon 3 5 Disk checking usage 8 5 Displaying SPC charts 14 5 DOS 3 4 DOS shell warning 3 4 Double clicking the mouse 2 5 Dragging the mouse 2 5 E Early warning system 12 1 Function controls 12 3 Main controls 12 8 Starting 12 2 Emergency off button 2 2 Exclusion patterns 7 7 Exiting an application 3 3 Expanded I O option 13 6 Export data selecting 10 6 Export Import utility starting 10 1 Exporting recipes 10 8 Extend puck 4 12 Extract for SPC command 9 7 Extracting data for SPC 14 4 F Factory set options system config 7 20 343153 Rev B 5 97 Surfscan 6200 Operations Files saving TFFs 4 14 Film calibration 6 4 Floppy disk drive 2 6 G Generic Text Only printer Wide carriage printing 7 24 Getting started 3 1 Graphic printer selecting 7 22 Graphics file types 7 24 H Haze 4 10 Haze autorange autozoom 5 15 Haze average 4 16 Haze bin splits 5 15 Haze calibration 6 20 Haze region 4 16 Help 3 4 HELP key 2 3 Help menu 4 11 Histogram LPD 4 20 Using 4 20 Zooming 4 20 HOME key 2 4 Icon Disk status 3 5 System menu 3 2 ID key 2 3 IDs database 7 14 Import list viewing 10 3 Importing data 10 4 Instru
169. k on the magnifying glass icon in the tool bar to reduce the page to fit within the View Report window click on the magnifying glass again to return to normal view To close the active report window Click Close in the tool bar at the bottom of the Viewlog Report window Fig 11 6 11 2 3 PRINTING A REPORT You can print short or full System Log reports You can also print a fast report to the default printer and export a report to a text file To view and print a report from the System Log window 1 Choose View and Print from the Report menu 2 Choose Short Report or Full Report from the submenu The Viewlog Report window appears Fig 11 6 343153 Rev B 5 97 ViewLog Click on the Print icon in the tool bar at the bottom of the Viewlog Short or Long Report window The Print dialog box appears HP LaseWet 451 451 HX on tennet pub4si LPT1 o _Cancei 3 Printer Print Range EJ Collate Copies Figure 11 8 Print Dialog Box 4 Select the desired print options range of pages number of copies and so on Then click OK to print the report To fast print to the default printer 1 Choose Print All from the Report menu 2 Choose Long Report or Short Report from the submenu The selected report is sent immediately to the default printer To export to a text file 1 Choose Export to Text from the Report menu 2 Choose Long Report or Short Report from the submenu The following dialog box appear
170. l Film Records Message Box Selecting Films to Export Dialog Box Export All Exclusion Patterns Message Box Selecting Exclusion Patterns to Export Dialog Box Export All Access Codes Message Box Selecting Access Codes to Export Dialog Box System Log Window View By Order Dialog Box View By Columns Dialog Box Changing the Width of a Column Print Dialog Box OO GO CO CO e 00 CO Oe p p p pd ee ee O ooN nanan f ARA Wee ee ON MW WN 9 8 9 8 9 9 9 9 9 10 9 10 10 2 10 3 10 3 10 4 10 5 10 5 10 6 10 7 10 8 10 9 10 10 10 11 10 12 10 13 10 13 10 14 10 15 11 1 11 2 11 3 11 3 11 4 List of Figures and Tables Figure 11 6 Figure 11 7 Figure 11 8 Figure 11 9 Figure 11 10 Figure 11 11 Figure 11 12 Figure 11 13 Figure 11 14 Figure 12 1 Figure 12 2 Figure 12 3 Figure 12 4 Figure 12 5 Figure 12 6 Figure 12 7 Figure 12 8 Figure 12 9 Figure 12 10 Figure 12 11 Figure 12 12 Figure 12 13 Figure 13 1 Figure 13 2 Figure 13 3 Figure 13 4 Figure 13 5 Figure 14 1 Figure 14 2 Figure 14 3 Figure 14 4 TABLES Table 4 1 Table 5 1 Table 5 2 Table 6 1 Table 6 2 Table 6 3 System Log Report System Log Page Buttons Print Dialog Box Save Export Text As Dialog Box View Selected Dialog Box Log Message Selection Dialog Box User Selection Dialog Box Access Class Selection Dialog Box User Selection Dialog Box Early Warning System Window Data Dialog Box Display Dialog Box Data Collection Control
171. l from the View menu The utility lists all log entries To view selected entries See Section 11 3 Selecting Entries Using Dialog Boxes To sort entries by entry number date and time user or access class 1 Select and view log entries 2 Choose By Order from the View menu ViewLog displays the View By Order dialog box Event No C3 Ase O Desc DateTime O Ase O Desc None User O Ase Desc None Access Class Co Ase O Desc None Pan ae Figure 11 2 View By Order Dialog Box Choose Asc ascending order Desc descending order or None for each field 4 Choose OK The View by Order dialog box disappears and the System Log 1s redisplayed in the desired order 343153 Rev B 5 97 ViewLog To choose the columns to list 11 3 1 Choose By Columns from the View menu The utility displays the View By Columns dialog box Access Class Date Time Description Log Message User Figure 11 3 View By Columns Dialog Box 2 Select one or more columns to display Then choose OK The current entry list is modified as specified in this dialog box To change the width of a column 1 In the column head area the top of the column move the mouse pointer over the column s right boundary line The pointer changes into a expand reduce cursor Tencor Instruments 7 Total Records 77 Total Frames 1 Event Date Time Log Message 19 25 24 26 23
172. lear all lights and turn the green one on COMMENTS e If no Surfscan condition clearly meets the requirements for a steady red light the steady red light is not used e Error messages displayed on the screen while the Scan application is not running for example while Calib or Setup is running do not cause a flashing red display NoScan has priority by being first in the file e The presence or absence of a cassette on either indexer seems to be unimportant and is thus ignored If you required the light to flash yellow if the Scan was ready but had no material to process you could add the following entry after the Complete Clear Yellow FlashSlow entry Ready NoCassette Clear Yellow FlashSlow e The low order Handoff mode and special Robotics modes of Scan are ignored since they do not apply These states never occur 343153 Rev B 5 97 Glossary Glossary 1 GLOSSARY 6XX0 Term used to specify any of the Surfscan 6000 series instruments Access code The characters a user must enter at the logon screen Application A software program such as the Scan application Application icon Graphic symbol representing a software application The System Menu displays application icons Application window The main window opened by an application Area The term that identifies events larger than the maximum particle size for a scan as set by the recipe s Area From parameter Defect maps display areas as a series of chords
173. lected in the PSL diameter option group If you enter a value other than the selected diameter the program displays an error message To delete the selected diameter enter 0 and choose OK The diameter is set to unused Maximum CV Maximum coefficient of variation CV This value is a product of variations of instrument sensitivity geometric sampling errors Poisson noise broadening and the natu ral dispersion of PSL sphere sizes If the CV calculated for the calibration scan exceeds the displayed value the program alerts you and allows you to accept or cancel the calibration CV can be from to 30 Edge Exclusion mm The edge exclusion distance in mm Edge exclusion can be from 2 to 30 PMT Gain Setting The gain max size setting to be used for the calibration scan See Chapter 5 Recipes Threshold um The cross section threshold used for data collection Threshold is the smallest value collected and displayed Lower Display Limit The smallest cross section defect size used in calcula um tions Upper Display Limit The largest cross section defect size used in calculations um Choose OK to close the recipe parameters Then choose OK again to close the PSL Spheres Diameter dialog box To start the calibration scan press START The application displays the calibration results window and prompts you to insert the sample substrate Insert the sample wafer in the bottom slot of the cassette or the selected ca
174. lected reference points Haze maps and haze summary statistics are not affected by the data in scribe mark exclusion zones When a SMEZ intersects an edge or flat notch exclusion zone the edge or flat notch exclusion zone takes precedence A SMEZ cannot be used to measure the surface outside of the flat or notch exclusion zone Data within a SMEZ are drawn in the final wafer maps but are not drawn in the real time map 343153 Rev B 5 97 Diagnostic Tools 12 13 12 3 1 CONFIGURING SMEZ Scribe mark exclusion zones are defined in the SMEZ INI file SMEZ INI is a text file that can be edited using the Microsoft Windows Notepad accessory Users with Analysis Manager access can edit the SMEZ INI file by clicking the Diagnostic Tools icon and then clicking the SMEZ INI icon For best results set wafer orientation and coordinate origin location before defining scribe mark exclusion zones A SMEZ is defined by specifying its center point scribe mark coordinates its width and height and angle A SMEZ is defined relative to the orientation and coordinate system specified in the User Configuration dialog box If you change the wafer orientation or flat or notch rotation the SMEZ center point will also have to be changed Also if the origin location is changed SMEZ center point will have to be changed 12 3 2 APPLYING SMEZ DEFINITIONS Scribe mark exclusion zones are applied to data that is stored in the database When a map is saved the SM
175. libration slot and choose Start Scan The instrument scans the substrate If the coefficient of variation calculated for the scan is larger than the maximum recipe setting the Calib dialog box displays the calculated CV value and asks if you want to continue 343153 Rev B 5 97 6 12 Surfscan 6200 Operations with the calibration T 805 Coefficient of Yariation is too large computed 11 2 limit is 10 Figure 6 10 Calibration Error Choose OK to continue with the calibration or choose Cancel to end the calibration The application displays a wafer map scan summary and histogram See Fig 6 11 Map of Scanned Water Histogram of Spheres hisa S jan Saj dew akn rra LEE r 0 006 1 Oe bol iii Crase Secon wer Figure 6 11 Calibration Results Window The histogram displays the distribution of cross section values Dashed lines identify the mean and standard deviation Ideally the peak of the histogram and the mean cross section value coincide The summary lists the following data 343153 Rev B 5 97 Calibration 6 13 Summary Field Description substrate The substrate name and film thickness PSL diameter The selected PSL diameter Select The range of selected defects Spheres The number of spheres collected out of the total found Mean C Section The mean cross section value Coefficient of Variation The calculated CV value To display the calibration curve for the substrate including the results ju
176. libration poinr ss ENTER to change now Diameter 0 3640pm Press UNDO to delete point now Cross section 0 6670pm Press CANCEL to abandon thie change Figure 6 14 Moving a Calibration Curve Point 343153 Rev B 5 97 Calibration 6 17 3 Move the mouse or press N or J to move the point up or down within the bounding box Enlarged portion of The bounding box shows the Substrate Calibration Curve limits for changing a point Point to edit 4 Press ENTER to complete the point change and exit edit mode To cancel curve editing or exit the curve results window Click the right button or press CANCEL 6 3 CALIBRATING THE TENCOR STANDARD CURVE The instrument s standard substrate calibration curve or other Tencor supplied curve can be calibrated and the results applied to all the custom film curves Tencor Instruments recommends calibrating the standard substrate curve at least once per month To calibrate for bare silicon 1 Start the Calibration application and choose PSL Spheres on Substrate from the Procedure menu 2 Choose the Bare Silicon substrate 3 Select the substrate size and one of the standard PSL sphere diameters Note that you cannot select recipe parameters for standard calibrations The Specify Actual PSL Sphere Diameter dialog box appears to allow you to calibrate using a different PSL sphere size Specify Actual PSL Sphere Diameter Actual diameter of the PSL spheres on the wafer 0 36400 The
177. log Box 2 Enter the ID for the substrate and choose OK The ID appears in the scan summary and in the Lot Summary To enter a Wafer ID after scanning the lot At the Lot Summary screen enter IDs for substrates and the lot as required Choose OK to keep IDs and close the Lot Summary screen or choose a print command To enter a comment 1 Choose the comment button the minus button in the Summary or press the minus key on the keypad The Scan application displays the Comments dialog box Figure 4 13 Comments Dialog Box 2 Enter comments of up to 40 characters and choose OK The comment appears in the summary 343153 Rev B 5 97 Scanning 4 17 To enable or disable a bin Click on the bin button Or press NEXT repeatedly until the summary is selected Press the number of the bin s to change Buttons 1 through 8 represent bin splits for the primary data Button 0 overlays the alternate data Button 9 overlays area data When a bin is disabled the Scan application removes the color coded bin data from the map and histogram when the window is refreshed Also its data values are dimmed and are not included in count totals To refresh the map and histogram after selecting or changing bins Click the left button in the map or histogram or press NEXT To overlay the alternate data in the map Choose button 0 To display area data Choose button 9 To print the current summary Choose Short Summary or Long Su
178. log menu The following dialog box appears From ay Drive A 5 25 p Figure 8 11 Retrieve Catalog Dialog Box Choose the appropriate drive from the pull down list If restoring from a network drive select MS DOS Path and type in the correct path If restoring from diskettes the following message box appears T Insert the last diskette of the backup set into drive A Lox _cancer_ Figure 8 12 Insert Last Diskette Message Box Insert the last diskette from the backup set as prompted and click OK The backup catalog file is always written to the last diskette in a backup set The catalog file is copied onto the hard drive and the following message appears gt Retrieve is complete Lax Figure 8 13 Retrieve Complete Message Box Click OK Double click on the Restore Files drive usually drive C to restore all files on the backup diskettes or click on the Select Files button to select specific files for restoring 343153 Rev B 5 97 8 14 Surfscan 6200 Operations 7 Click on the Start Restore button The following dialog box appears Durning a backup compare or restore Microsoft Backup needs to have exclusive access to the floppy disk drives Microsoft Backup will make the floppy disk drives unavailable to your other applications until the backup compare or restore is complete You should not try to read or write to any floppy disk while a backup compare or restore is In progress
179. longer expand If this happens you can free database space by deleting data and you might have to reduce the size of the database by restoring a previously backed up smaller one You should regularly remove unneeded files such as user document files bitmap files TFF files and others from the hard disk 343153 Rev B 5 97 8 4 Surfscan 6200 Operations 8 2 1 e When moving data from the instrument to a Surfscan 6000 series Desktop use the Backup and Restore utility to move large amounts of data and the Export Import utility to move small amounts of data Large amounts of data would be 1000 or more wafer summaries or 25 or more wafer maps Small amounts of data would be less than 200 wafer summaries and less than 10 wafer maps The system provides warning messages when disk or database warning limits are exceeded When these messages appear you should delete entries from the database remove nonessential files from the hard disk or do both before attempting to save additional data The warning messages are Disk space is getting low lt number gt bytes remain free When the instrument is reset the system warns you when free disk space falls below 15 MB Excessive number of summaries lt number gt in database When you attempt to save a wafer summary the system alerts you when the database already contains more than 9 999 summaries Excessive number of maps lt number gt in database When you attempt to save a w
180. ls 2 15 To select a radio button Click on the radio button Or press NEXT to select the desired group of options and then use the arrow keys to select the desired radio button 2 5 5 USING LIST BOXES List boxes display lists of options When a list is longer than the list box scroll bars are provided so you can view the remainder of the list Selection box DEMO PATTERN List box PROCO 231 PROCO 32 Figure 2 16 List Boxes See Section 2 5 10 Using Scroll Bars for details on scrolling To select a list item Click on the item to display the item in the selection box then choose OK to begin the action associated with the list Or use the arrow keys to move the selection bar up or down through the list and press ENTER to select the item displayed in the text box To select a list item by typing the list item name Click on the selection box and type the full or partial name of the item to be selected If the full name is typed choose OK to begin the action If the partial name is typed click on OK to display a list of items matching the item name typed Use the mouse or the operator keypad to select the item as described above 343153 Rev B 5 97 2 16 Surfscan 6200 Operations 2 5 6 USING PULL DOWN LISTS Pull down lists display the current or default choice in the selection box The arrow button to the right of the field opens a list of available choices If the list contains more items than can be di
181. m the menu bar Browser reports the number of records that will be extracted Choose OK to continue or Cancel to select a different set of records You must associate the data with an existing SPC data file Select the file from the File Selector dialog box and choose OK The SPC Display utility automatically runs showing the default data display See Chapter 14 Statistical Process Control Option for details on SPC 9 4 DISPLAYING MAP TO MAP The map to map feature can be used to display comparisons between two wafers You can view a difference common map added defects map removed defects map before map and after map Map to map requires that maps were saved with the X Y Coordinates Option enabled To display map to map 1 Select data with maps from the database using options from the Select menu 2 Select one map from the Review window 343153 Rev B 5 97 9 8 Surfscan 6200 Operations NOTE Return to the Review window and select the other map Choose Map to Map Browser displays the map to map window and enables the Map to Map menu Tencor Instruments Thi Jan 05 1995 EEIE E Hgm Map H Aided Map Sloman Toon iba id dbl Lrois Serhan Ppi Figure 9 7 Map to Map Display The wafer window displays the difference map Before map after map and defect total information is listed at the left of the window You can select a map option from the summary area or display a map by choosing an op
182. ment Log on 3 1 Power up 3 1 Shutting down 3 4 Instrument basics 2 8 K Key switch 2 2 Keypad instrument 2 3 L Landscape printing for SPC data 14 6 Limitations Database 5 25 Disk space 5 25 List box 2 15 Loading a cassette 2 7 Index Log event selection 7 5 Logging off 3 3 Logging on 3 1 Login method 7 3 Logon screen 3 2 Lot ID 4 8 Lot ID entering 4 4 4 14 Lot summary 4 34 Lot Summary suppressing 7 4 Lot Summary viewing and printing 4 8 LPD mean count 4 15 LPD standard deviation 4 15 M Map to map 9 7 Common particle radius 9 9 Memory available 12 9 Memory usage 12 9 MENU key 2 3 Menus System menu 3 2 Working with icons and pull downs 2 10 Message notification 7 3 Microscan MICROSCOPE key 2 3 MICROSCOPE key 2 3 MicroView Analysis 4 30 Display formats 4 26 Highest peak 4 28 Setting view manually 4 29 Threshold 4 29 Views 4 26 Wireframe 4 26 Mouse 2 4 2 5 N NEXT key 2 4 NO key 2 3 O Out of control rules SPC 14 9 Overlaying alternate data 4 17 P Pareto chart 14 7 Particle radius for map to map 9 9 PCT Macintosh PICT format 7 24 Power off button 2 2 Power on button 2 2 Powering down the instrument 2 8 Powering up the instrument 2 8 3 1 Index 3 PRINT key 2 4 Printer Resume a print job 4 32 Setup 4 35 Printer configuration 7 22 132 columns 7 24 Fast System Log reports 7 26 Text and graphics printers 7 22 Printer selection 4 35 Printing Lot summary 4 8 P
183. mmary from the Print menu 343153 Rev B 5 97 4 6 USING THE CASSETTE CATALOG The Scan application displays the Cassette catalog at the right of the screen To display the contents of the cassette loaded on the indexer press CASS The instrument catalogs the cassette displaying substrates by slot number CASS changes the scan order HOME homes the indexer and clears the catalog Cassette catalog Pa 14a 12 A 175 E 154 ok ely _ 28 Occupied slots are numbered Ei b4 ig Diaa Daves Gat 13b Lii Sn Lae pain aun af A Cech tes 1025 M Haza Megin iii 2 072 Dppin Scan Sequence Figure 4 14 Cassette Processing Commands and Indicators You can scan substrates in a cassette in sequence from bottom to top or top to bottom or select two or more substrates from the catalog or select a single substrate from the catalog The status box displays the current scan sequence The slot selector can be used to choose a substrate to scan The Cassette catalog displays the cassette s substrate status as follows e If the status of a slot cannot be determined the slot contains a question mark e A white slot number indicates that the substrate has not yet been scanned e A green slot number indicates that the substrate has been scanned and has passed all pass fail criteria e A red slot number indicates that the substrate has been scanned and has failed one or more pass fail criteria e A y
184. n Dialog Box Choose values for one or more selection fields Only those records matching all the values entered in this dialog box are selected A blank selection field is a wildcard that matches all field values If you do not enter any selection values in this dialog box and Has Map field is Yes No Wafer Size is All Sizes and the Slot Number is Any Import Export selects all wafer records in the database Data can be selected using the fields described in the following table Field Name Description Recipe Name of arecipe The pull down list gives current recipe names ID The substrate ID ID 1 ID 7 User ID fields Pull down lists give current field values Has Map Indicates whether the record must have a map Yes No or Yes No Yes No matches data that is with or without a map Substrate The substrate size All Sizes matches all wafer sizes Slot Number Slot number Any matches any slot number Defect Range The defect range of interest Enter the starting defect total in the From box and the ending defect total in the To box Export and Import 10 11 Field Name Description Date Range The creation date range Enter the starting date in the From field and the ending date in the To field The following keys can be used within the Date field period fills in the current date UNDO erases the date field SEL displays the calendar dialog box Use arrow keys or mouse to select a date Use the scroll arrows to vie
185. n at least 3 MB of free space is shown at the bottom of the File Manager window close the File Manager and reset the instrument When the instrument initializes delete data from the database first exporting any you wish to save and delete any additional files from the hard disk that are not essential Working with the Database 8 7 8 2 4 REDUCING THE SIZE OF THE DATABASE If you want to reduce the size of the database you can replace the current database with a smaller previously backed up one Deleting data from the database does not reduce the size of the database file CAUTION The procedure described in this section removes all data from the current database and replaces it with the data from a previously restored database Before restoring the smaller database export any system calibration user account system log entries maps or summaries you want to save To reduce the size of the database 1 Export all calibration tables user configuration system configuration user ac counts and essential recipes and summaries See Chapter 10 Export and Import NOTE Using the C TEMP directory or a network drive for the export destina tion can save time Export to the C TEMP directory only if sufficient hard disk space is available 2 Restore a previously backed up database that is smaller than the current one See Section 8 3 2 Restoring Data If you do not have a database containing the essential data con
186. nce point 1 Press ZOOM to magnify the map and display the Panning window 2 Move the cross hairs to the general area of the point you want to delete and press ZOOM Move the cursor to the point and press its point number 1 or 2 The instrument displays the Reference Coordinate dialog box 3 Choose Delete Reference Point button The point is deleted and you can define this point at another feature point on the map Note The point number is not erased from the Panning window and map until the screen is redrawn To delete both reference points 1 Display the map 2 Choose Reference Coordinate from the XY menu The instrument displays the Reference Coordinates dialog box 3 Choose Delete Reference Points To assign reference points to any location on the map 1 Zoom the map to the location 2 Select a magnification level by pressing SEL 3 Press NEXT The map remains zoomed but is no longer in zoom mode 4 Move the target cursor to the location Press 1 to define reference point 1 or press 2 to define reference point 2 The application displays the Reference Coordinates dialog box Enter coordinate values and choose Save to define the point To transmit defect coordinates and size to the COMS3 port NOTE The Expanded I O Option is required for sending data over COMS 1 Zoom the wafer map and move the particle cursor to the defect of interest 2 Press SEL The coordinates and size are sent as a series of ASCII character
187. ncor Instruments for further in formation Sets slot 1 to the top of the cassette ladder rather than the bottom default Changes cassette processing to start at the slot at the top of the cassette rather than at the bottom 343153 Rev B 5 97 1 4 Surfscan 6200 Operations Configuration Option Description Destination Slot Specifies that the slot number displayed in wafer sum Numbering maries saved in the database printed on reports and saved in TFF files will be the destination slot number rather than the source slot number If the instrument cannot determine the destination slot number the slot number is set to 99 and remains set to 99 even when the wafer is moved to the destination slot L lt Failed Wafers Changes the destination for failed wafers from the right cassette to the left cassette Suppress Lot Summa Eliminates the Lot Summary screen that appears at the ry Display end of a cassette scan or when the HOME key is pressed Reverse Destination Enables reverse filling of the destination cassette wa Filling fers are put in the destination cassette from the bottom up using the first available empty slot Default Cassette Slots The number of slots in your cassettes The second part of the User Configuration dialog box provides the configuration buttons and log event options For a description of the system events that can be recorded see Section 7 2 Selecting Events for the System Log
188. nd Maps A confirmation dialog box appears Click OK to delete all wafer summaries and maps from the database or choose Cancel to return to the Select dialog without deleting To review records before deleting 1 Select wafer records as described in Section 9 1 Selecting Summaries and Maps 2 Choose Select from the Select dialog box to display the Review window 3 Select the records you want to delete and choose Delete or choose Delete All to delete all records listed in the window Browser asks you to confirm the delete operation 4 Choose OK to confirm the delete records operation or choose Cancel to abort the operation 343153 Rev B 5 97 Export and Import 10 1 10 EXPORT AND IMPORT This chapter describes exporting data from the instrument s database to a floppy disk to the hard disk or to a network disk drive if available This chapter also describes importing data into the database from an export data file To export or import data you must start the Export Import database utility To export data you must select the records to export specify the export filename and choose the Export action To import data you must specify the import filename and choose the Import action To view the contents of an import file you must specify the filename of the import file and choose the Get Import Listing action 10 1 EXPORT AND IMPORT GUIDELINES Keep the following guidelines in mind when exporting and importing data e
189. nd displays an application window or menu window The number of icons displayed in your System Menu might be different than shown in the example System Menu The selected icon is highlighted Diagnostics mf aia E I Tools oa Ces Prompt oe Pia cad sabiti ite Hiren plu dee paren Seer Ares per an ger Brees i Figure 2 10 Example of a System Menu In an icon menu the mouse pointer changes to the Tencor Instruments logo To start an application Double click on the application icon Or press NEXT repeatedly to select the desired icon and then press ENTER You can also use the arrow keys to select an icon from an icon based menu 343153 Rev B 5 97 Basic Skills 9 11 A pull down menu is an object in a window that displays a list of choices The window s menu bar lists the titles of menus available by the application When you choose the menu title the menu opens When you select a menu item the program performs the action and closes the menu Menus or menu items that are unavailable are dimmed Pull Down Menu Menu Item 8 Go Remote Figure 2 11 Pull Down Menu NOTE In the Scan window the menu bar displays ID CASS AUTO HOME SAVE and PRINT commands which when clicked perform the same action as pressing those keys on the keypad To open a menu from the menu bar Move the mouse pointer over the menu title and click the left mouse button Or press MENU to select the menu bar press lt
190. ndow to the general area of a feature you want to use as a reference point Press ZOOM to activate the zoom cursor 343153 Rev B 5 97 X Y Coordinates Option 13 3 3 ay In the wafer map move the cursor to the feature LPD s 13676 P2865 Diam 1 86 pri I I I I I l l I l Ft l I I I I I I l l I I 4 l I a Icro View aea Figure 13 1 Moving the Cursor to an LPD You can move the cursor to a given feature using the mouse or from feature to feature with the arrow keys Press 1 to define reference point 1 or press 2 to define reference point 2 Points can be defined in either order If the point you specify already exists on the map the old reference point is deleted The instrument displays the Reference Coordinate dialog box Reference Coordinate Point 1 X um save Y um Cance _Delete reference point _ Figure 13 2 Reference Coordinate Dialog Box If user coordinates for the reference point are known enter them in the dialog box X and Y fields If user coordinates for the point are not known you can leave the 343153 Rev B 5 97 13 4 Surfscan 6200 Operations fields set to 0 Choose Save The instrument displays the point number next to the feature in the panning window and in the map A defined reference point uX 2092 u 26647 Figure 13 3 Defined X Y Reference Point Return to Step 2 if you
191. ndows bitmap file set the graphics printer to FILE and then choose the Setup button to set file path and filenaming conventions 3 Choose OK 343153 Rev B 5 97 Recipes 5 1 5 RECIPES This chapter describes recipes Recipes allow you to specify data collection data display configuration pass fail sort settings and automatic saving and printing operations for a given wafer substrate size and type To create a new recipe or modify an existing recipe you must know how to use Recipe menus and the Recipe dialog box and know how to set recipe parameters Also your user account must allow you to create edit and save recipes The instrument stores recipes in the database by name A recipe name can be up to 19 characters long and can contain any combination of alphabetic numeric or special characters When you load a recipe from the database the recipe becomes the current recipe or the recipe used for scanning Scan and Setup application windows display the current recipe name in parentheses in their title bars and the Recipe dialog box displays the current recipe name as its title in parentheses For step by step instructions on setting recipe parameters see Section 5 3 5 Selecting Substrate Parameters Recipe actions are available from the following applications To Use Create delete load save or rename a recipe Scan or Setup applications Export or import recipes Database Export Import utility Print a rec
192. ng the Selection Bar 2 5 2 Using Command Buttons 2 5 3 Using Check Boxes 2 5 4 Using Radio Buttons 2 5 5 Using List Boxes 2 9 6 Using Pull Down Lists 2 5 7 Using Cycle Controls 2 9 8 Using Select Buttons 2 5 9 Using Data Entry Fields 2 5 10 Using Scroll Bars Printing Screens 3 Getting Started 3 1 3 2 3 3 Setting Up for the First Time Using the DOS Shell Disk and Database Space 4 Scanning 4 1 4 2 Starting the Scan Application Scanning Methods 4 2 1 About Scanning 4 2 2 Scanning All Substrates 4 2 3 Scanning Selected Substrates 1 1 1 2 1 4 1 4 1 4 1 4 2 1 2 1 2 2 2 3 2 4 2 6 2 6 2 8 2 9 2 10 2 12 2 13 2 13 2 14 2 14 2 15 2 16 2 16 2 17 2 17 2 18 2 19 3 1 3 4 3 4 3 4 4 1 4 2 4 4 4 6 4 6 4 6 343153 Rev B 5 97 4 2 4 Scanning One Substrate Direct Access 4 2 5 Lot Summary 4 3 Using the Scan Window 4 3 1 Menus and Commands 4 4 Quick Reference 4 4 1 General Procedures 4 5 Using the Summary Box 4 6 Using the Cassette Catalog 4 7 Using the Histogram 4 7 1 Zooming the Histogram 4 7 2 Editing Bin Splits 4 8 Using the Wafer Map 4 9 Zooming the Map 4 10 Examining a MicroView 4 10 1 Displaying a MicroView 4 10 2 Changing MicroView Display Options 4 10 3 Using the MicroView Cursor 4 10 4 Setting the MicroView Threshold 4 10 5 Manually Choosing a MicroView View 4 10 6 Using MicroViews for Defect Analysis 4 11 Printing Summaries 4 11 1 Printing a Wafer Summary 4 11 2
193. ng tor cassette io Cassete Caimi results ben Hac Humber of cassette shots Figure 6 22 Cassette Calibration Window 5 As stated by the Place Cassette dialog box make sure that wafers are loaded only into slots that are second from the top and second from the bottom of the cassette The major flats of wafers must face toward the front of the cassette Firmly seat the cassette on the locator plate 6 Choose Start Calibration to calibrate The instrument indexes the cassette and informs you if it does not find wafers in both slots If one or both wafers are not found return to Step 4 7 The puck moves toward the wafer in the upper slot with vacuum turned on and pauses momentarily when a reduction in pressure is sensed The puck then moves to the wafer in the lower slot and repeats the test The instrument displays a summary of the calibration results If the calibration was unsuccessful start the calibration again If the wafers are tilted toward the front or back as the puck finds the substrate verify that e The cassette is firmly seated on the locator e The locator is correctly installed e The substrates do not touch the rails or back of the cassette 343153 Rev B 5 97 Calibration 6 29 The flats of wafers face forward Start the calibration again If the substrates still tilt move them 2 to 3 mm approximately 1 8 in toward the front of the cassette Before using the new calibrated cassette for product
194. o Lo Lo a e 287 i re ra oo oo FE 8 30 9999 Scratches and Areas E gu ra T wn pl S t T Humber of Bins Bin Spht Sequential Figure 5 15 Defect Histogram Bin Splits Dialog Box To enable bin limits set Bin Limit to On To disable bin limits set Bin Limit to Off To set bin limits 1 Choose the Bin Limit SEL button to open the Defect Histogram Bin Splits dialog box 2 Enter bin limits e Click on a bin limit box and enter a value Or press NEXT repeatedly until the text cursor appears in the Limit text box at the top of the dialog box e Enter the bin limit To move to another limit box use T or J 3 Choose OK to save bin limits and close the dialog box 5 7 1 HAZE DEVIATION SORT PARAMETERS By setting sort criteria for haze deviation you can pass or fail a substrate depending on how much the haze level varies from the average haze The variation can be absolute expressed in PPM or relative expressed as a percentage You can also define the percentage of the wafer surface that must fall within the deviation limits for the wafer to pass 343153 Rev B 5 97 Recipes 5 27 To set haze deviation sort parameters 1 Choose the Haze Average SEL button to open the Haze Deviation Sort Parameters dialog box Haze Deviation Sort Parameters Sort Mode Ceiling Floor Region Figure 5 16 Haze Deviation Sort Parameters Dialog Box
195. o On to use the bin limits specified in the Bin Limit dialog box Bin limits set the number of LPDs allowed for each LPD bin Total number of areas allowed areas scratches Defaults to 9999 Total of all areas allowed in mm 0 to 9999 Number of scratches allowed 0 to 9999 Defaults to 9999 Total of all scratches allowed in mm The total of LPD Count and Area Count allowed Defaults to 9999 The maximum allowable haze when expressed as the average of haze in ppm over the measurable surface area The allowable amount of deviation of the haze level from the average expressed in either absolute PPM or relative percent terms over a user selectable percentage of the water s surface See Section 5 7 1 Haze Deviation Sort Parameters for details 343153 Rev B 5 97 5 10 Surfscan 6200 Operations Sort Parameter Description Haze Peak The maximum allowable haze value in parts per million Haze Region The maximum allowable wafer area containing haze ex pressed as a percentage of the measurable wafer surface area 5 3 5 SELECTING SUBSTRATE PARAMETERS This section and succeeding sections provide a step by step discussion of setting recipe parameters starting with substrate parameters See Section 5 3 Recipe Parameters for a summary of all recipe parameters and their values A recipe specifies the diameter and edge exclusion for the substrate and specifies which substrate film thickness calibration cu
196. oView threshold and choose OK or choose Use Recipe Threshold to use the current recipe value and choose OK 4 10 5 MANUALLY CHOOSING A MICROVIEW VIEW You can manually set the MicroView viewing angle by using the mouse in the Panning window Note that manually setting the viewing angle requires patience to perform properly You might have to try several times before you become comfortable with setting the viewing angle manually using the mouse Manually setting the viewing angle is not available through the keypad 343153 Rev B 5 97 To choose a viewing angle 1 In the Panning window press the left mouse button without moving the mouse A three dimensional outline of the MicroView area appears on the screen Current view MicroView outline Bottom Figure 4 25 Outline of MicroView Area 2 If the outline does not appear release the mouse button and return to Step 1 Continue to hold down the mouse button 4 Move the mouse up down left or right The outline rotates and tilts and the current viewing direction is indicated at the top left of the MicroView window 5 To see the MicroView at the new angle release the mouse button 6 You can return to a standard view by pressing through 7 4 10 6 USING MICROVIEWS FOR DEFECT ANALYSIS MicroViews can be useful for identifying and analyzing light point defects areas and scratches The characteristic patterns of light point defects LPD scr
197. og box and then pressing the START key or choosing START from the menu bar To modify or view an existing recipe 1 Open the Scan or Setup window 2 If the recipe you want to work on is not the recipe shown in the window s title bar choose Load from the Recipe menu and open the recipe 3 Choose View Modify from the Recipe menu or press RCP The instrument displays the Recipe dialog box 343153 Rev B 5 97 5 4 Surfscan 6200 Operations To change recipe settings I 2 A Open the Recipe dialog box Change recipe settings as desired Click OK or press ENTER The changes you made to the recipe parameters remain in effect To save the changes you made choose Save from the Recipe menu to save changes to the current recipe or choose Save As from the Recipe menu to save the recipe using a different recipe name 5 3 RECIPE PARAMETERS This section describes the parameters listed in the Recipe dialog box Data collection parameters specify the substrate data collection range and instru ment throughput Data display parameters specify primary and secondary data types wafer map and histogram display options the number of bin splits to be used and haze display parameters Configuration parameters specify cassette usage sorting option automatic opera tions and substrate type and thickness Sort parameters establish the pass fail limits for wafers If scan results exceed any of the enabl
198. om the menu bar Select the substrate and thickness to view Choose OK 3 Choose Results from the menu bar The application displays the calibration curve for the selected substrate and thickness 343153 Rev B 5 97 6 14 Surfscan 6200 Operations The calibration curve window displays editing commands in the menu bar the substrate name the current calibration curve the edit cursor cursor location box and curve points ee ate TT _ 2 Custom Entered C j oO 5 Cc t l oO g p m a 0 2 0 5 1 2 5 Diameter pm Calibrated Tue Feb 18 1992 03 02 PM C section Dia C Section 0 0206 364 0 667 0 0880 614 1 05 0 170 09 1 72 0 306 00 5 30 Figure 6 12 Calibration Curve Colors identify how the curve was created Red identifies a custom curve that can be edited Yellow identifies points measured by calibration scans Measured points are shown for reference Green identifies Tencor Instruments supplied curves Except for bare silicon Tencor Instruments supplied curves can be modified and when modified change to red You can add a point to the curve delete a point or change a point s location by using the dotted line cursor The custom diameter at the cursor appears at the top of the graph The box at the lower right of the graph shows the measured cross section and Tencor standard cross section if any The points defining the curve are listed at the bottom of the window The follow
199. on maintenance theory of operations the Desktop package and network options A list of error messages is included for reference during troubleshooting The Surfscan 6XX0 SECS Interface Manual is a reference guide covering the implemen tation of the GEM SECS Option 343153 Rev B 5 97 Basic Skills 2 1 2 BASIC SKILLS This chapter describes instrument controls including keypad mouse floppy drive and cassette indexer This chapter also describes how to load a cassette and introduces you to basic program operation using the mouse or keypad 2 1 OPERATOR INTERFACE The instrument is operated through the instrument s video display auxiliary panel keypad mouse and the floppy disk drive The video display provides system messages application windows and utility screens The auxiliary panel provides power and reset buttons The keypad provides data entry cursor control and command keys The mouse can be used to perform most of the actions available through the keypad The floppy disk drive can be used for installing software updates and for backing up data files Auxiliary Panel Displ ve csc O o Cassette Keypad Locator Mouse Floppy Disk Drive Figure 2 1 Surfscan 6100 6200 Major Components 343153 Rev B 5 97 2 2 Surfscan 6200 Operations 2 1 1 AUXILIARY PANEL The Auxiliary Panel contains main instrument controls EMERGENCY OFF POWER ON Disk in use Indicator
200. on Curves Haze Calibration 6 4 1 Measuring Haze 6 4 2 Using the Haze Calibration Curve 6 4 3 Importing and Exporting the Haze Table Cassette Calibration 7 Setting Up the System 7 8 7 9 7 10 7 11 User Configuration Dialog Box Selecting Events for the System Log Setting Wafer Orientation Defining Exclusion Patterns 7 4 1 Exclusion Regions Setting Data Colors Setting Data Compression Setting Up for TFF Files 7 7 1 Setting TFF Filenaming 7 7 2 Setting Database IDs Managing User Accounts 7 8 1 Adding or Modifying User Accounts 7 8 2 Deleting a User Account 7 8 3 Testing a User Account Managing Recipes Setting System Configuration Setting Printer Configuration 7 11 1 Selecting Text and Graphics Printers 7 11 2 Setting Up for Printing 132 Column Reports 7 11 3 Setting Up for Fast Printing of System Log Reports XI 5 22 5 23 5 24 5 25 5 26 5 27 6 1 6 1 6 3 6 4 6 9 6 13 6 17 6 19 6 20 6 20 6 24 6 26 6 27 7 1 7 2 7 6 1 1 7 10 7 11 7 12 7 12 7 14 7 15 7 15 7 18 7 18 7 19 7 19 7 22 7 22 7 24 7 26 343153 Rev B 5 97 XII Surfscan 6200 Operations 8 Working with the Database About the Database System 8 1 8 2 8 3 8 4 8 1 1 8 1 2 Database Utilities Avoiding Disk Full or Database Full Conditions Managing the Disk and Database 8 2 1 8 2 2 8 2 3 8 2 4 8 2 5 Disk Full Messages Checking Disk and Database Free Space Recovering from a Di
201. on for the Surfscan 6200 Gain Versus Diameter Defect Histogram Bin Splits Dialog Box Areas as a Series of Chords Detailed Haze Bin Splits Detailed Print Configuration Dialog Box Detailed Save Configuration Dialog Box Defect Histogram Bin Splits Dialog Box Haze Deviation Sort Parameters Dialog Box Calibration Window Select Cassette Slot Dialog Box Select Substrate Type and Thickness Dialog Box Adding a New Substrate Adding a New Substrate Calibration Tables Import Export Dialog Box Select Cassette Dialog Box Specify Thickness Dialog Box PSL Sphere Diameter Dialog Box Calibration Error Calibration Results Window 4 22 4 23 4 24 4 25 4 26 4 27 4 28 4 29 4 30 4 31 4 31 4 32 4 33 4 33 4 34 4 35 5 1 5 3 5 10 5 11 5 12 5 12 5 13 5 13 5 14 5 18 5 20 5 21 5 23 5 24 5 26 5 27 6 1 6 4 6 5 6 8 6 9 6 9 6 10 6 12 6 12 Figure 6 12 Figure 6 13 Figure 6 14 Figure 6 15 Figure 6 16 Figure 6 17 Figure 6 18 Figure 6 19 Figure 6 20 Figure 6 21 Figure 6 22 Figure 6 23 Figure 6 24 Figure 7 1 Figure 7 2 Figure 7 3 Figure 7 4 Figure 7 5 Figure 7 6 Figure 7 7 Figure 7 8 Figure 7 9 Figure 7 10 Figure 7 11 Figure 7 12 Figure 7 13 Figure 7 14 Figure 7 15 Figure 7 16 Figure 8 1 Figure 8 2 Figure 8 3 Figure 8 4 Figure 8 5 Figure 8 6 Figure 8 7 Figure 8 8 Figure 8 9 Figure 8 10 Figure 8 11 Figure 8 12 Figure 8 13 Figure 8 14 List of Figures and Tables Calibration Curve Ad
202. on in the upper left corner of the application window to display the control menu Then choose the Close option Or double click on the application s control button Or choose the Exit command from the first pull down menu To log off the system 1 Exit the current application The System Menu is displayed 2 Choose Log Off The Log On screen appears 343153 Rev B 5 97 3 4 Surfscan 6200 Operations To shut down the instrument 1 Log off the system 2 Press the auxiliary panel s Power Off button CAUTION When you power up or reset the instrument allow the instrument to complete its power up or reset sequence before resetting or powering down the instrument If your instrument s Reset button has a disk in use indicator wait for the indicator to go off before powering off or resetting the instrument See Section 2 1 1 Auxiliary Panel To obtain help Double click on the Help icon or press the HELP key The Surfscan 6000 series Help System window appears You can obtain information about each Surfscan 6000 series application procedures for scanning and using other features and descrip tions of the instrument To obtain help from an application window choose a topic from the application s Help menu or press the HELP key 3 1 SETTING UP FOR THE FIRST TIME For system managers or administrators If you are setting up the instrument for the first time see Chapter 7 Setting Up the System for deta
203. ontain any of the items described in this section check boxes radio buttons command buttons data entry fields list boxes cycle controls and scroll bars The instrument also uses dialog boxes to display warnings error messages online help and confirmation messages 343153 Rev B 5 97 Basic Skills 2 13 2 5 1 USING THE SELECTION BAR When working with a dialog box you can use the mouse to directly select the items discussed in this section If you use the keypad you must move the selection bar to the item to select and choose an option Key Action NEXT Moves the selection bar to the next item or group of items SEL Selects a check box or chooses a select button N 4 fe 5 Moves the selection bar in the direction of the arrow ENTER Chooses the selected command button CANCEL Chooses the Cancel command button 2 5 2 USING COMMAND BUTTONS Command buttons perform the action described by the button s title Command buttons with ellipses open another dialog box Command buttons with greater than symbols gt gt after the title expand the current dialog box Buttons that are unavailable are dimmed DEMO PATTERN PROCO 231 PROCO232 TEST Command buttons Figure 2 13 Command Buttons In most dialog boxes one button is the default button and can be chosen by pressing ENTER The selected command button is highlighted with a dark border Where a dialog box contains OK and Cancel buttons the Cancel button canc
204. operator changes the recipe New Recipe The operator creates a new recipe System Configuration Change User Configuration Change The operator changes the system configuration The user changes the user configuration dialog box Status A system status message appears Warning A warning message appears Caution A caution message appears Error An error message appears To have the system enter the name of the last user logged on as the startup user Check the Last User Name for System Startup check box 343153 Rev B 5 97 7 6 Surfscan 6200 Operations 7 3 SETTING WAFER ORIENTATION Wafers can be oriented to a flat or notch and the origin position can be set using the Standard Orientation Selection dialog box When a wafer is scanned the wafer can be automatically oriented to the selected position by setting the Auto Align XY recipe parameter to On or by choosing Rotate to Edge Feature from the XY menu Wafer rotation requires the X Y Coordinates Option See Chapter 13 X Y Coordinates Option When using TFF files on a Tencor DataHub Data Analysis System Surfscan SWIFT Station or Surfscan Revisit Station set wafer origin position to Center of Wafer To select wafer orientation 1 Choose User from the Config menu The Setup application displays the User Configuration dialog box 2 Choose the More button to open the second part of the dialog box Choose Wafer Orientation The Setup application displays t
205. or one instrument should not be used on another instrument as calibration data will not be accurate e Film curves created on one instrument should not used on another instrument as LPD sizing will be inaccurate e When you choose the Tencor Instruments standard curve T appears next to the substrate name in the recipe dialog box C appears for custom curves e Custom calibration curves do not apply when the recipe specifies Bare Silicon diameter display and either Tencor T or custom C curve Table 6 2 Calibration Curves used for Diameter and Cross Section Film Standard 343153 Rev B 5 97 6 20 Surfscan 6200 Operations e The following tables summarizes the calibration curves used for recipe substrate and display type combinations Table 6 3 Calibration Curves used in Defect Sizing Curve Recipe Substrate Type Show Type Calibration Curve s Used Bare Silicon T Diameter Tencor standard non editable white curve Bare Silicon T Cross section Diameter Tencor standard non editable white curve Cross section Tencor standard editable green curve Bare Silicon C Diameter Tencor standard non editable white curve Bare Silicon C Cross section Diameter Tencor non editable white curve Cross section Custom red curve Film T Diameter Diameter Tencor standard non editable curve Cross section Tencor editable curve Diameter Film curve T Cross section Diameter Tencor standard non editable w
206. ose OK to add the new user To verify that you have set user privileges correctly proceed to Section 7 8 3 Testing a User Account To modify a user account l AF a Choose Modify User from the Access menu Setup displays the User Account Record dialog box as shown in the adding a user account procedure above Choose the user name to modify Change privileges as required Choose OK To verify that you have set user privileges correctly proceed to Section 7 8 3 Testing a User Account 343153 Rev B 5 97 7 18 Surfscan 6200 Operations 7 8 2 DELETING A USER ACCOUNT When a user account is no longer needed it should be deleted from the database The user name and access code can no longer be used for log on To delete a user 1 Choose Delete User from the Access menu Setup displays the Delete A User dialog box Delete User User Name Ken Lok Leme Figure 7 12 Delete a User Dialog Box 2 Click on the User Name cycle control to cycle through the user name list 3 Choose OK to delete the selected user name or choose Cancel to abandon the action A message will appear asking you to confirm a delete Choose Yes to confirm the delete or No to cancel 7 8 3 TESTING A USER ACCOUNT After creating or modifying a user account you can verify that the correct password and access was selected by temporarily logging on as the user accessing Surfscan 6200 software functions and logging off as th
207. oss section scattering efficiency measurements to defect diameters for a given substrate or that matches measured haze to actual haze Cassette catalog A part of the Scan window When a cassette 1s loaded on an indexer and cataloged the cassette catalog displays which slots are occupied The cassette catalog can be used to select one or more wafers for scanning Catalog a cassette To list the cassette slots occupied by wafers Catalog scan To catalog and then scan wafers from a cassette The cassette can be cataloged by slot number in 1 to 25 order or 25 to 1 order Choose To pick a menu item or other item that starts an action You can choose an item using the mouse or keypad Chord A line representing one sweep in an area defect A series of chords forms an area See area Click Pressing and releasing the left or right mouse button without moving the mouse Click the left button on a menu title on an icon on a dialog box option or command button or in a window to select the item Left and right buttons have different functions when clicking Compare to double click Coefficient of variation A calculated value used when calibrating PSL spheres or haze This value is the product of variations in instrument sensitivity sampling errors Poisson noise broadening and the natural dispersion of PSL sphere sizes For a given sample the coefficient of variation standard deviation mean x 100 Control chart In statistical proce
208. ou can change the colors used to identify bins areas and haze These changes effect water maps and histograms To change colors l 343153 Rev B 5 97 Choose User from the Setup application s Config menu The User Configuration dialog box appears Click the More button The dialog box expands Click the Particle Colors button The Particle Color Selection dialog box appears Particle Color Selection Available colors Area Haze Figure 7 6 Particle Color Selection Dialog Box Click on the data category you want to change in the Colors Selected list Click on an unused color from the Available Colors palette To assign a currently used color to a different data category first unassign it from its current category and then reassign it to the new category Repeat Steps 4 and 5 until all color changes have been made If you want to return to the default colors at any time click the Tencor Defaults button Click Ok when all changes have been made Setting Up the System S 7 6 SETTING DATA COMPRESSION When saving wafer maps and other data you can conserve disk space by choosing a data compression method The compression options available are None Light Moderate and Heavy When compression is used the instrument takes longer to save the data but uses less disk space The Heavy compression method reduces data to a minimum amount of space and requires the most amount of time to save the data The data compression s
209. ount the number of defectives C 3 After 20 data points have been collected calculate the process average C bar and the process standard deviation S C bar total number of defects number of samples S SQRT C bar 4 Plot the total counts C Calculate the upper control limit UCL and lower control limits LCL UCL C bar 3 SQRT C bar LCL C bar 3 SQRT C bar or zero whichever is larger 343153 Rev B 5 97 Statistical Process Control Option 14 9 6 Plot UCL and LCL To construct an X MR chart 1 Sample size 1 2 Foreach data point calculate the moving range R The moving range is the absolute value of the difference between today s measurement and yesterday s measure ment There will not be a moving range for the first point 3 After 20 data points have been collected calculate the process average X bar and the process moving range average MR bar 4 Plot the measurement on the X MR chart 5 Calculate the upper control limit UCL and lower control limit LCL 6 Plot UCL and LCL When the chart has been constructed and the limits calculated subsequent data points can be tested against these limits to determine whether a point is in control or out of control Control status can be determined using a set of rules as developed by AT amp T and based upon probability concepts The probability of a pattern of events occurring by chance alone is calculated If that probability is less than 1
210. ow has a title bar that contains the application name a menu bar that contains menu titles and in some applications commands a control menu icon that contains window options a communications mode indicator and a work area Communications mode appears here Control Menu icon Title Bar Menu Bar Figure 2 9 Surfscan 6000 Series Application Window The window s title bar can contain information related to the application such as the current recipe name and cassette slot number The communication indicator can be either Local indicating instrument control through the keypad and mouse or Remote indicating instrument control from a host computer requires remote communications option 343153 Rev B 5 97 2 10 Surfscan 6200 Operations To use an application choose menus or commands displayed in the menu bar or use keypad commands When the application needs more information about an action it displays a dialog box An application also displays a dialog box to inform you of an error or to provide a help message Section 2 4 Working with Menus and Section 2 5 Working with Dialog Boxes tell you how to use these items 2 4 WORKING WITH MENUS Menus list actions you can select The instrument uses two types of menus icon menus and pull down menus The System Menu is an icon based menu Each icon represents an application or a system action When you double click on an application icon the application starts a
211. peration The instrument displays a bin split indicator at the top of the histogram and a bin change cursor Using the mouse 1 Move the cursor under the bin boundary to change Click the left mouse button 2 Drag the cursor using the left mouse button The bin split indicator changes to reflect the new boundary 343153 Rev B 5 97 Using the keypad 1 Press SEL to select the boundary to change 2 Press lt or gt to change the boundary The bin split indicator changes to reflect the new boundaries 3 Press ENTER to apply the new bin splits to the map and histogram Bin split cursor Current bin split value Bin split Indicator 0 6 08 10 1 2 1 4 Diameter pm 1 60 Figure 4 17 Histogram Bin Splits 4 8 USING THE WAFER MAP The Scan application can display a wafer map of LPDs or haze The wafer map can be displayed in combination with a histogram The recipe sets the initial substrate map histogram display combination and the combination can be changed for the current scan by using the Display menu You can magnify zoom the wafer map set and apply user defined coordinates to the map X Y Coordinate Option required and MicroView an area of the wafer When you zoom the histogram window change bin split ranges through the histogram the changes are applied to the wafer map the next time it is redrawn on the screen To change the display combination Choose a display type from the Display menu To magnify
212. pes 5 15 Table 5 1 Haze Range 0 098 25 0 196 50 0 392 100 o eo 0 02 5 0 0392 10 0 0784 20 0 0049 1 25 0 0098 2 5 0 02 5 0 8 0 001 0 25 0 002 0 5 0 00392 1 0 6200 only Haze From is the smallest haze value collected Haze From defaults to 1 250 the current Haze Range setting but can be set to a different value as needed During a scan the instrument collects haze data from the measurable wafer surface separated into 832 x 860 um segments called tiles Haze maps display the average haze value per tile Haze histograms display the distribution of haze values Average haze for a wafer is calculated by averaging the haze values of all tiles on the wafer When you choose Autorange the instrument chooses the range that provides the best resolution The collected data is automatically zoomed at the peak You can narrow the range of data in the zoomed histogram by entering a percentage smaller than 100 For example if you enter 90 the lower and upper limits of the histogram are adjusted inward toward the peak by up to 10 of the haze pixels When the autorange autozoom feature is used e The zoomed histogram never excludes more pixels than specified in the recipe e When autozoom completes the haze bin splits are recomputed and evenly divided across the new zoomed range e If ahaze map is displayed it will be redisplayed after the autozoom has completed If substrate sorting is dependant upon haze results the so
213. quency of those values on the other axis In the Scan application the histogram displays the distribution of defects or haze from the last scan When 343153 Rev B 5 97 Glossary Glossary 5 a defect map is displayed the histogram shows defect size versus counts When a haze map 1s displayed the histogram shows haze value ppm versus counts Histogram zoom Changing the defect or haze range through the histogram Hold a scan Press the MICROSCOPE key When a scan is on hold a MicroView can be performed on the wafer Home The position of the indexer when it is fully raised Import To load data previously saved in an export file See export Indexer The mechanism that moves the cassette up and down Keypad Operator keypad provided on the instrument console The keypad can be used to enter data move cursors and execute commands Light point defect An event characterized as a particle Limit marker The marker used to change defect or haze bin limits in the histogram Local area network A computer network connecting a host computer to other nodes on the network The system provides a DECnet local area network option Locator The plate upon which a cassette rests when in the indexer The locator must be changed for different cassette sizes Log off Sign off from the instrument by choosing the Log Off icon from the System Menu Log on Sign on to the instrument by entering your access code Lot ID The ID assigned
214. r A single character followed by a colon For example C refers to drive C Edge exclusion The area at the edge of the substrate that is excluded from data collection during a scan Exclusion regions Regions on a substrate that are excluded from data collection Export To save selected data such as recipes wafer summaries and wafer maps to diskette Exported data can be imported into another Surfscan 6000 series system See import Field A rectangle in a dialog box used for entering data The text cursor a vertical bar generally appears in the first field in a dialog box Also a data item stored in a database A collection of related fields 1s called a record Gain A recipe parameter that sets the overall measurable defect or haze data collection range Graphics cursor Graphics cursors appear as vertical bars in histogram windows and can be used to change defect bin splits Haze Background scatter caused by imperfections in the surface of the substrate such as intrinsic substrate roughness and polishing damage Haze data can be displayed in a map histogram or both Haze is measured in parts per million ppm of the incident beam Haze average The total haze in parts per million divided by the measurable wafer surface area Haze peak The maximum measured haze value Haze region The percentage of the measurable wafer surface area containing haze Histogram A plot of data that has possible values on one axis and fre
215. rate record from the Select Substrate Type and Thickness dialog box The selection only applies when exporting a record but must be made to enable the Import Export menu item Choose Import Export from the Procedure menu The application displays the Calibration Tables Import Export dialog box PSL Sphere Calibration File Import Export Functions IMPORT Calibration File EXPORT Calibration File PSL Sphere Calibration for YYZ 1000A is currently selected __ Figure 6 6 Calibration Tables Import Export Dialog Box Type the name of the import file in the From File field and choose Import If the imported substrate record already exists in the database the programs asks if you want to overwrite the current record Choose OK to overwrite or Cancel to cancel the import Repeat Step 3 to import more substrate records or choose Exit to close the dialog box To export a substrate record l 343153 Rev B 5 97 Select the substrate record to export from the Select Substrate Type and Thickness dialog box Choose Import Export from the Procedure menu The application displays the Calibration Tables Import Export dialog box The dialog box lists the selected substrate record at the bottom of the Export Calibration File field If this is not the correct substrate record choose Exit and return to Step 1 Type the name of the export file in the To File field and choose Export If the file already exists the programs asks if you
216. ration measurement as described in Section 6 4 1 Measuring Haze 22 Measured Value 0 996 ppm Custom Entered 1 00 ppm Press 1 to show Standard Measured values Press 2 to use Custom Entered values E ool 10 20 50 100 200 500 1000 K000 20000 100000 Actual Haze Yalue ppm Calibrated Wed Feb 19 1992 09 13 AM Changing existing calibration point Press ENTER to change now Display this value 1 000 ppm Fress UNDO to delete point now When Measuring this value 1 000 ppm Press CANCEL to abandon this change Figure 6 20 Haze Calibration Curve You can add a point to the curve delete a point or change a point s location by using the dotted line cursor The custom haze value at the cursor appears at the top of the graph The box at the lower right of the graph shows the measured haze value and the custom value if any The points defining the curve are listed at the bottom of the window The following keys can be used when editing a calibration curve Key Function e gt Moves the cursor in small steps in the direction of the arrow N 4 Moves the cursor in large steps N moves the cursor to the right N moves the cursor to the left ENTER Confirms a point add or point change NEXT Moves the cursor in large steps to the right CANCEL Cancels curve editing 343153 Rev B 5 97 Calibration SEL UNDO ZOOM i 6 25 Function Moves the cursor in large steps to the right including moving it exactly
217. rdinates Option e The Print menu provides short and long wafer summary printouts and allows you to choose the text and graphics printers The Lot Summary choice is not available e The Display menu provides map and histogram display options 343153 Rev B 5 97 9 2 Surfscan 6200 Operations To choose the text and graphics printers 1 Choose Select Printers from the Print menu Browser displays the Printer Selection dialog box Text Printer Graphics Printer Epson Fx 65 Epson Fx 65 Epson Fx 850 Epson FX 650 Generic Text Only FILE HF DeskJet Plus Generic Text Only HP LaserJet INS HP DeskJet Plus HP LaserJet IIIS PostScript HP LaserJet INS Figure 9 2 Printer Selection Dialog Box 2 Choose a text and graphics printer from the lists The system uses the text printer to print summaries and reports and the graphics printer to print wafer maps and screen printouts One printer can be assigned as both the text and graphics printer To print wafer maps and screens the graphics printer must not be assigned to a text only printer 3 Choose OK 9 1 SELECTING SUMMARIES AND MAPS This section describes the steps to take to select wafer summaries and maps stored in the database The selected records can be viewed extracted for statistical process control requires SPC option when records were saved or deleted To select wafer records you choose field values that will be matched against each wafer record in the da
218. re 1s no free space and the database cannot be initialized You must create free disk space before proceeding See Section 8 2 3 Recov ering from a Disk Full Condition You can check the hard disk and database usage by double clicking on the disk icon The Hard Disk and Database Usage Statistics dialog box reports the used space and free space statistics for the hard disk and database file For details on disk and database usage see Section 8 2 Managing the Disk and Database 343153 Rev B 5 97 Scanning 4 1 4 SCANNING This chapter describes the operation of the Scan application Using the Scan application you can scan wafers or other substrates examine the results of scans using analysis tools and save or print the results To scan a substrate you need to know how to start the Scan application load a cassette and select a recipe You also might need to choose scanning options and select individual substrates to scan The first part of this chapter describes these procedures To analyze scan results you can magnify zoom the LPD or haze map zoom the histogram and MicroView the substrate Recipes contain preset data collection data display pass fail sorting automatic printing and saving options cassette and other options See Chapter 5 Recipes for details This chapter contains the following sections Title Section 4 1 Starting the Scan Application Section 4 2 Scanning Methods
219. re allows you to examine a three dimensional representation of the surface of the substrate The amplitude axis Z axis is evenly scaled from the smallest to largest amplitudes in the MicroView area 343153 Rev B 5 97 Scanning 4 25 You can view the MicroView area from different angles display the MicroView in color or wireframe format and use the MicroView cursor to obtain approximate defect ampli tude or sizing Also you can change the threshold level A MicroView removes the haze data and sizing information is given in approximate diameter or cross section units 4 10 1 DISPLAYING A MICROVIEW A MicroView includes only defect data the haze component of the data has been removed To display a MicroView 1 Press MICROSCOPE to keep the next scanned substrate on the puck 2 Scan the substrate 3 Double click the left mouse button in the map or press NEXT repeatedly to select the map and then press ZOOM The instrument displays the Panning window and magnifies the map 4 Move the panning cursor to the area of interest by using the mouse or arrow keys Then press MICROSCOPE The instrument displays the MicroView area in the Panning window and displays the 3 D MicroView in the map See Fig 4 20 Panning Panning window shows cursor MicroView area In a particle vamin ia MicroView the Maa legend shows defect size in diameter or cross section units MicroView rendering MicroView information
220. richo wes es Prog Manager Prompt ial Access Class Picadas sabiti ite ECHO pIi dee ki parie User Name eee Ares per an oe reg es ie Figure 3 2 System Menu Analysis Manager Access Figure 3 2 shows the System Menu for a user with Analysis Manager access Note that the colors in this figure are different from the screen display colors The System Menu displays application icons the Log Off icon that returns you to the Log On screen and the Help icon that opens the Surfscan 6000 series Help System Your access 343153 Rev B 5 97 Getting Started 3 3 class determines the icons that will be displayed in the system menu For example a fab operator menu might have only three icons eral Help Log Off Double click the Scan Double click the Help Double click the Log icon to start the Scan icon to open the Off icon when you application where you Surfscan 6000 series have finished using the can scan substrates Help System The Help instrument System gives you instructions on using the instrument To start Scan Double click on the Scan icon in the System Menu Or select the Scan icon if necessary and press ENTER To start any application Double click on the icon of the application you want to start Or press NEXT one or more times to highlight the icon you want to choose and then press ENTER You also can use the arrow keys to highlight an icon To close an application Click on the control butt
221. rinter selection 4 35 Recipes 8 15 System configuration 8 15 User configuration 8 15 Wafer Summary 4 17 Printing a bitmap to disk 7 23 Printing a wafer map to file 7 22 Printing screens 2 4 2 19 Printing SPC data 14 6 Printing automatic 5 23 PSL spheres calibration curves exporting 10 11 Puck 4 12 Pull down list 2 16 Q Quick reference Scan application 4 11 R Radio button 2 14 RCP key 2 3 Recipe Area display options 5 19 Automatic operations 5 22 Automatic printing 5 23 Automatic saving 5 24 Automatic sorting of wafers 5 22 Automatic wafer alignment 5 22 Data collection parameters 5 4 Data collection range 5 11 Data display parameters 5 7 Defect display options 5 17 Dialog box 5 3 Display options 5 16 Guidelines 5 27 Haze display options 5 20 Haze range 5 14 Loading 4 3 LPD range 5 12 Parameter list 5 4 5 8 Printing report 8 15 Sort options 5 25 Sorting parameters 5 9 343153 Rev B 5 97 Index 4 Substrate selection 5 10 Throughput selection 5 16 Recipe menu 4 11 5 1 Recipes 5 1 Exporting 10 8 10 9 Managing 7 19 Printing 8 15 Reference Coordinate dialog box 13 3 Repairing the database 8 7 Report 8 15 Choosing a printer 8 18 Exiting 8 19 Fast printing 8 19 Print all selected 8 19 Recipe 8 19 Recipes 8 16 8 18 Selecting 8 16 8 18 System configuration 8 16 8 18 8 19 User configuration 8 16 8 18 8 19 Viewing 8 16 8 18 Report utillity database 8 15 Reset button 2 2 Resetting the instrument
222. riteria 343153 Rev B 5 97 ViewLog 3 Click the Log Message Selections button The following dialog box appears below the View Selected dialog box Recipe Change Hew Recipe Figure 11 11 Log Message Selection Dialog Box Choose one or more message types to list by first selecting from the Possible Log Messages in the list box on the left side then using the move buttons as follows Button Description gt Adds the selected message type to Selected Log Messages list lt Removes the selected message type from Selected Log Messages gt gt Adds all message types to Selected Log Messages lt lt Removes all message types from the Selected Log Messages list When all desired types of messages are selected choose OK to select by the messages chosen 11 3 2 SELECTING BY USER To select users to list l Choose Selected from the View menu The utility displays the View Selected dialog box Fig 11 10 Click the check box in front of the User entry on the left side of the dialog box The button to the right is activated to allow you to define selection criteria 343153 Rev B 5 97 11 10 3 Surfscan 6200 Operations Click the User Selection button The following dialog box appears below the View Selected dialog box TENCOR Service Figure 11 12 User Selection Dialog Box Choose one or more message types to list by first selecting from the Possible User in the list box on the left side then
223. rom Panning window to magnified map Click in the Panning window or press ZOOM The LPD Data box and cursor appear in the map Click in the map or press CANCEL to move back to the Panning window 343153 Rev B 5 97 4 24 Surfscan 6200 Operations To identify an LPD Move the cursor using the mouse or the keypad arrow keys When you move the mouse the cursor jumps to the nearest LPD When you use the arrow keys the cursor moves to the next LPD in the direction of the key The LPD data box displays the X Y coordinates and dimensions of the LPD at the cursor Note that you cannot move the cursor outside the border of the magnified map but you can magnify a different portion of the map by using the Panning window The cursor is particularly useful for specifying X Y reference points requires X Y Coordinates Option To return to the Panning window click the left or right mouse button or press CANCEL LPL m 13676 Y 720EE LPD Data Diam 7 66 pr i l l I l l I 1 1 I 5 I l l 1 I 1 a m mm mm m D 7 m Figure 4 19 Locating Defects in the Zoomed Wafer Map To reduce unzoom a map Click the right button in the Map or Panning windows or press UNDO NOTE For details on setting X Y coordinates rotating a map and sending X Y coordinates over the COM3 port see Chapter 13 X Y Coordinates Option 4 10 EXAMINING A MICROVIEW The Surfscan 6000 series MicroView featu
224. rt decision is made after the haze bin splits are recomputed e When autozoom is enabled the results saved in the database reflect the zoom and the evenly distributed haze bin splits e It is not possible to unzoom the results of an autozoom The unit of measurement for haze data is parts per million ppm of the incident scan beam NOTE The instrument uses a haze calibration curve to determine haze values This curve can be customized as required See Chapter 7 Calibration 343153 Rev B 5 97 5 16 Surfscan 6200 Operations 5 4 3 SELECTING THROUGHPUT Throughput affects the wafer processing speed relative instrument sensitivity and mi croscan viewing area dimensions Table 5 2 Throughput Wafer Velocity Relative Microscan Viewing Throughput Pitch um Sensitivity um Area mm Low throughput results in highest instrument sensitivity but produces the lowest wafer per hour processing speed In general use the highest throughput that produces acceptable results 5 5 SELECTING DISPLAY OPTIONS This section describes defect and haze display options The recipe specifies which types of data will be collected during a scan how to display data in the Scan window wafer map histogram or both the LPD size calculation method LPD cross section in Um or LPD diameter in Um defect bin splits haze bin splits and initial area and scratch display 5 5 1 SELECTING THE DATA DISPLAY The Display Option parameter s
225. rve to use for calculating LPD sizes NOTE If the Show parameter is set to Cross Section the instrument calculates LPD size using measured scattering efficiency normalized by the in strument s standard response curve Select the Substrate Diameter and Edge Exclusion for the substrate Substrate diameter can be 2 in 3 in 82 mm 100 mm 125 mm 150 mm or 200 mm The recommended edge exclusion value is 4 mm Wafer Measurable Surface Area Edge Exclusion Figure 5 3 Measurable Surface Area The instrument collects data only from within the measurable surface area of a wafer To select a different thickness using the currently selected substrate Cycle through the thicknesses displayed to the right of the substrate name 343153 Rev B 5 97 Recipes 5 11 To select a new substrate and thickness Choose the select button at the bottom left of the Recipe dialog box The instrument displays the following dialog box Film Calibration Curves Film Type Thickness LJ Recipe Limits from Calibration Curve Figure 5 4 Recipe Film Calibration Curves Dialog Box The dialog box lists all substrates and thicknesses currently calibrated for the instrument If the substrate you want is not listed you can calibrate the instrument for the new substrate See Chapter 7 Calibration Choose the Substrate Type and film thickness for the recipe and choose OK The Recipe dialog box displays the substrate name and thi
226. s Continuous OO Histogram Lower Limit 2880 Figure 12 3 Display Dialog Box Set display options as follows Display Option Units Display Scale Limits Display Interval Description The unit of measurement for the Y axis The scale linear or logarithmic The number of limits to use Bidirectional sets the lower and upper limits and warnings as shown by Threshold values Unidirectional sets upper limits and warning The time interval months days hours minutes or seconds and the period of time to display If the interval from the first and last data point is less than the selected display interval EWS displays only that interval Diagnostic Tools 12 5 Display Option Description Display Type The method used to plot data data points steps continuous or histogram Thresholds The upper limit and warning level the lower limit and warning level the expected nominal value and minimum or maximum values as applicable The types of threshold parameters listed are determined by the Limits setting Red lines are limits yellow lines are warnings a light blue line is the nominal value and gray lines are minimum or maximum chart levels Trend Data Enables trend data display Default values for functions are listed in Table 12 1 Table 12 1 Default EWS Function Values Function Limit Warning Nominal Warning Limit 12 1 4 COLLECTION PARAMETERS Collection options for a function can be viewed The
227. s Directories c sovabin Save File as Type Teton E Figure 11 9 Save Export Text As Dialog Box Select the desired path and enter a file name in the File Name field You can also 3 select a file name that already exists 1f any from the list box below the File Name field 4 Click OK and the text file 1s created in the selected directory 343153 Rev B 5 97 11 3 SELECTING ENTRIES USING DIALOG BOXES This section describes how you can select entries to view in the System Log window You can list and print selected entries based upon message type user accounts access class or dates For example you can list all user logon entries all logons by a specific user or all logons over a given period of time Using the Selected item in the View menu you create a selection criteria This criteria is tested against all the entries in the System Log Entries that match the criteria can be listed in the System Log window To view the entries that match your current selection criteria choose All from the View menu See Section 11 1 Viewing the System Log 11 3 1 SELECTING BY LOG MESSAGES To select log messages to list 1 Choose Selected from the View menu The utility displays the View Selected dialog box Figure 11 10 View Selected Dialog Box 2 Click the check box in front of Log Message entry on the left side of the dialog box The button to the right is activated to allow you to define selection c
228. s Box This area displays the histogram Figure 4 1 Scan Application Window The Scan window displays the recipe name in the title bar and the scan sequence in the status box Scan sequence indicates the order in which slots are scanned from top to bottom or bottom to top Before scanning 1 Choose the recipe to be used 2 Load the cassette of substrates onto the right locator 3 Choose scan options Scan options allow you to change the scan sequence and to enable automatic scan operation 4 Enter a Lot ID if desired 343153 Rev B 5 97 Scanning 4 3 To choose a recipe 1 Ifthe recipe name shown in the title bar is not correct choose Load from the Recipe menu to display the Load Recipe dialog box Or press MENU J and then ENTER to display the Load Recipe dialog box Figure 4 2 Recipe Selection Dialog Box 2 Click on the recipe name to load Or press J to select a recipe from the list 3 Click OK or press ENTER on the keypad to load the recipe To load a cassette Place the cassette of substrates on the right locator See Section 2 1 5 Working with Cassettes for details on cassette loading To change the scan sequence Click CASS or press CASS on the keypad The status box displays the current scan sequence To select automatic operation Click AUTO or press AUTO on the keypad When Auto is on the status box displays Auto and all selected substrates are automatically processed when you
229. s Message Box Click Yes to proceed or No to cancel Export and Import 10 15 To select Access Codes for export l Click on Select next to the Access Codes row in the Selected Items to be Exported section see Fig 10 1 The system displays the Select dialog box Possible Values Selected Values Users none Customer Manager Customer SuperUser TENCOR A amp E TENCOR Service Tencor Super ser User Operator a E aa Figure 10 17 Selecting Access Codes to Export Dialog Box The Possible Values list box displays Access Codes currently available in the database The Selected Values list box displays Access Codes selected for export The move buttons allow you to move items to or from the Selected Values list as described below Button Description gt Adds the selected Access Code s to the Selected Values list lt Removes the selected Access Code s from the Selected Values list gt gt Adds all Access Codes to the Selected Values list lt lt Removes all Access Codes from the Selected Values list Select the Access Code s to add to the export list using the Move buttons Use the horizontal scroll bars at the bottom of each list to see additional data Choose OK to add these selections to the export list The number of selected Access Codes appears in the Count column to the right 343153 Rev B 5 97 10 16 Surfscan 6200 Operations 10 5 7 SELECTING CALIBRATION TABLES The following tables can only be
230. s over the COM3 port The format of the string is X Y Size cr If Where X and Y are the defect coordinates Size is the defect size and cr lf are carriage return and line feed characters ASCII 13 ASCII 10 343153 Rev B 5 97 Statistical Process Control Option TT 14 STATISTICAL PROCESS CONTROL OPTION This chapter describes the Surfscan 6000 series Statistical Process Control SPC package a software billable option The SPC feature provides an SPC Editor SPC Display utility and a database extraction function using Browser Using the SPC Editor you can create an SPC definition for displaying control charts and tabular data You can specify the data to analyze the upper and lower chart limits and the default data display X MR chart C Chart tabular or any combina tion of these displays Fab and Process IDs can be entered for each SPC definition Using the SPC Display utility you can display the current data assigned to an SPC file in chart table or chart and table form You also can change the range of points used in charts and tables SPC charts can be printed using the standard instrument screen print features The contents of an SPC data file can be printed in tabular format Browser is used to extract wafer records from the database The extracted data is stored in an SPC data file NOTE For an introduction to statistical process control and for instructions on using SPC control charts see Section 14
231. s the Power On button on the auxiliary panel Allow approximately 10 minutes for a full warm up To reset the instrument hardware and software without powering off Press the Reset button on the auxiliary panel Instrument electronics and mechanics are initialized and the software is reset CAUTION Whenever you power up or reset the instrument allow the instrument to complete its power up or reset sequence before resetting or powering down the instrument To power down the instrument Press the Power Off button on the auxiliary panel 343153 Rev B 5 97 Basic Skills 2 9 2 3 WORKING WITH APPLICATION WINDOWS Application Window The instrument communicates with an operator using the Microsoft Windows environ ment In this environment windows display information menus provide lists of com mands and dialog boxes request additional information about a command and display error messages The instrument provides a set of applications software programs Each application has its own window and menus When you want to scan wafers for example you must start the Scan application When Scan starts it displays its application window on the screen Using this window you can start a scan catalog a cassette change a recipe parameter or choose other available actions The blank areas of the Scan application window display the results of a wafer scan Each application displays a separate application window An application wind
232. s to be acted upon and is selected from one of the following keywords None Green Yellow Red White Blue Beeper lt Action gt specifies what is to be done to the selected light and is selected from one of the following keywords Off On FlashSlow FlashFast The following rules are followed when specifying and processing the ASCII file 343153 Rev B 5 97 The fully qualified name of the file is C SOVA DATA PATLITE DEF A menu selection will be made available that will invokes Notepad to edit this file The file is read and its syntax checked during system startup If any error is found processing of the file stops and a message box is displayed that clearly states the error that was found along with the line number on which it was found The Surfscan continues to initialize normally but the Patlite feature is disabled Each line in the file is assumed to end with CR LF a carriage return and line feed Lines that are empty and those that begin with either a space or an asterisk are considered to be comments and are ignored Each keyword must be separated by one or more spaces Spaces on either side of the equal sign are optional All keywords can be written in mixed case as desired All syntax checks are performed without regard to case When looking for a match of the current Surfscan status and a lt Status gt file entry searching always proceeds from the first file entry in the file toward the last Whenever a
233. se options are factory set and should not be changed 343153 Rev B 5 97 12 6 Surfscan 6200 Operations To view collection parameters for the selected function 1 Choose Collection from the Variables menu EWS displays the Data Collection Control dialog box Eg 7 FORWARD SWEEP TIME Data Type Compression Method Binary y Integer a Unsigned Integer Average gt Maximum O tan coo gt Float Double gt Random Conversion Data Form Figure 12 4 Data Collection Control Dialog Box You can choose the data type and the compression method for a function Data is compressed in 60 second 60 minute 24 hour and 30 day intervals 2 Choose one of the compression methods described below e Average use the average data value for the period e Maximum use the maximum data value for the period e Minimum use the minimum data value for the period e Last use the last data value for the period e Random select a random data value from the period 3 Choose OK to set new collection parameters or Cancel to close the dialog box 343153 Rev B 5 97 Diagnostic Tools 12 7 12 1 5 PANEL CONTROLS EWS provides three system panels Each panel can contain up to eight functions You can set display options for all EWS panels To view a panel Choose a panel from the Panel menu or choose Prev or Next from the menu bar To switch from full screen function view to panel view Choose 3 Function from the menu
234. see Fig 10 1 The system displays the Select Recipes to Export dialog box Possible Values Selected Yalues TL Figure 10 10 Select Recipes to Export Dialog Box The Possible Values list box displays recipes currently available in the database The Selected Values list box displays recipes selected for export The move buttons allow you to move recipe items to or from the Selected Values list as described below Button Description gt Adds the selected recipe to the Selected Values list lt Removes the selected recipe from the Selected Values list gt gt Adds all recipes to the Selected Values list lt lt Removes all recipes from the Selected Values list 2 Select the recipe s to add to the export list using the Move buttons Use the horizontal scroll bars at the bottom of each list to see additional data 3 Choose OK to add these selections to the export list The number of selected Recipes appears in the Count column to the right 343153 Rev B 5 97 10 10 Surfscan 6200 Operations 10 5 3 SELECTING SUMMARIES AND MAPS Wafer summaries and maps can be selected for export as described in this section To select all wafer records from the database 343153 Rev B 5 97 l Choose select Summaries Maps from the Export Import Select menu The follow ing dialog box appears Has Map Substrate All sizes El Slot Number Ranges From To Delete ALL Summaries and Maps_ Figure 10 11 Data Selectio
235. sent immediately to the default printer A recipe report includes all recipe settings including the settings of each detailed configuration scratch print save defect bin splits and haze bin splits To exit the Report utility Choose Exit from the Instrument menu 343153 Rev B 5 97 Browser 9 1 9 BROWSER This chapter describes the Browser database utility Using Browser you can display wafer summaries and maps stored in the database display map to map delete wafer records from the database and perform X Y coordinate functions This chapter describes Starting the Browser utility Reviewing wafer records Displaying map to map X Y option required Deleting Summaries and Maps Extracting wafer records for statistical process control See Chapter 8 Working with the Database for a discussion of database concepts To start the Browser utility Choose the Browser icon from the Database Menu The Browser window appears The Database menu provides data selection User ID selection and wafer record review options Section 9 2 Reviewing Data 1 Database Display 1 Select 1 Short Summary 40 col Figure 9 1 Browser Menus Other menu titles appear in the menu bar after wafers have been selected or displayed e The XY menu provides wafer orientation reference point definition and Tencor File Format TFF file output options See Chapter 13 X Y Coordinates Option for details on the X Y Coo
236. size See Section 6 2 Calibrating PSL Spheres on a Substrate Start the haze calibration procedure You must choose a substrate size before viewing the current calibration data or making a haze calibration scan See Section 6 4 Haze Calibration Loads a wafer from the left or right cassette Use the submenu to indicate where the wafer is 1 Right Indexer Displays the Export Import dialog box that allows you to export or import the database record associated with the current checked calibration procedure Extends the puck for inspection and cleaning Quits the Calibration application The Substrate menu title displays the Substrate Name and Film Thickness selection dialog box used for selecting adding changing or deleting substrate calibration records The Size menu displays substrate diameter choices Size must be chosen for all calibration procedures Results displays the most recent calibration results for the selected calibration For example if you have selected PSL Spheres on Substrate silicon dioxide 500A film 343153 Rev B 5 97 Calibration 6 3 thickness and 150 mm substrate diameter the instrument displays the associated calibra tion curve Press START to begin the calibration procedure selected in the Procedure menu To choose the slot to use for calibration scanning 1 Choose Load Wafer From from the Procedure menu When you choose Right Indexer or Left Indexer the instrument
237. sk Full Condition Reducing the Size of the Database Repairing The Database Backing Up and Restoring the Database 8 3 1 8 3 2 Reports 8 4 1 8 4 2 9 Browser Backing Up Data Restoring Data Viewing Reports Printing Reports 9 1 Selecting Summaries and Maps 9 2 Reviewing Data 9 3 Using the Browser Window 9 4 Displaying Map to Map 9 5 Deleting Summaries and Maps 10 Export and Import 10 1 Export and Import Guidelines 10 2 Starting the Export Import Utility 10 3 Viewing an Import List 10 4 Importing Data 10 5 Exporting Data 10 5 1 Selecting Data for Export An Overview 10 5 2 Selecting Recipes 10 5 3 Selecting Summaries and Maps 10 5 4 Selecting PSL Spheres on Substrate Records 10 5 5 Selecting Exclusion Patterns 10 5 6 Selecting Access Codes 10 5 7 Selecting Calibration Tables 10 5 8 Selecting Configuration Tables 11 ViewLog 11 1 Viewing the System Log 11 2 Viewing and Printing System Log Reports 343153 Rev B 5 97 11 2 1 Choosing a Printer 11 2 2 Viewing a Report 11 2 3 Printing a Report 8 1 8 1 8 1 8 1 8 3 8 4 8 5 8 6 8 7 8 7 8 9 8 10 8 12 8 15 8 16 8 18 9 1 9 2 9 5 9 7 9 11 10 1 10 1 10 1 10 3 10 4 10 6 10 7 10 8 10 10 10 11 10 13 10 14 10 16 10 16 11 1 11 2 11 4 11 4 11 5 11 6 Table of Contents Selecting Entries Using Dialog Boxes 11 3 1 Selecting by Log Messages 11 3 2 Selecting by User 11 3 3 Selecting by Access Class 11 3 4 Selecting by Da
238. splay configuration and sort Substrate Name and Thickness DATA COLLECTION substrate Diameter Edge Exclusion 2 Flat Notch Exclusion lt None gt Haze Suppression 0 ppm Max FF m Gain 3 Threshold 2 ym Throughput Medium CONFIGURATION Cassette lt default gt Sorting Off Auto Align x v Auto Gain Setting Off Auto Print sey Off Auto Save sey Off Silicon Dioxide mefe oO Figure 5 2 Recipe Dialog Box To select recipe parameters the dialog box provides cycle controls select buttons and 5 3 Current Recipe DATA DISPLAY Display Option Detect Haze oe Display Type Map Histogram gt show Diameter Co Bin Split SEL i Area From SEL TF im Haze Range 1000 ppm Full Haze From 4 SORT PARAMETERS LPD Count 30000 160 Bin Limit SEL Ott Area Count 9999 9999 scratch Count 9999 9999 Sum of all 4999 Haze Average 500 ppm Haze Peak 500 ppm Region 100 data entry fields These objects can be used as described in Chapter 3 Basic Skills Choose OK to keep the settings as shown in the dialog box The current settings apply to scans but the settings are not saved in the database permanently saved until you choose Save from the Recipe menu Choose Cancel to exit the Recipe dialog box without keeping any changes In the Scan application choose the Start button to start a scan using the current recipe settings This button performs the same function as choosing OK in the Recipe dial
239. splayed in the list box scroll bars are provided a Pull down button Pull down list ID 3 ID 4 ID 5 PRODUCTID ID 6 PROCESSID Lok J L caca ll Figure 2 17 Pull Down Lists To choose pull down list items Click on the pull down button to open the list Click on the desired item Scroll the list if necessary to find the desired item Alternatively type the first character of the desired item in the edit field to scroll to the item 2 5 7 USING CYCLE CONTROLS Cycle controls allow you to select from a list of predefined values Cycle control DATA DISPLAY Display Option Defect f Haze of Display Type Map Histogram gt Show Diamete a Select button Bin Split SEL g Area From 1 6 pm Haze Range 250 ppm f Full oe Haze From 0 96 ppm Figure 2 18 Cycle Controls To select an item using a cycle control Click on the cycle control with the left mouse button to cycle forward through the choices or with the right mouse button to cycle backward through the choices Or press NEXT until the desired option group is highlighted Press J or T to move to the desired option field Press lt or gt to cycle through the choices 343153 Rev B 5 97 Basic Skills 2 17 2 5 8 USING SELECT BUTTONS Select SEL buttons indicate that the option can be defined through a dialog box To display the dialog box Click on the SEL button with the mouse Or use NEXT
240. ss Except where noted otherwise in this manual you can use the keypad mouse or a combination of both input devices to enter data or issue instrument commands 343153 Rev B 5 97 Basic Skills 2 5 For best results move the mouse only when it is on the mouse pad Figure 2 4 Mouse and Mouse Pad Mouse Mouse Pad The mouse has three buttons The left and right buttons are used to indicate an action such as starting an application The middle button is not used Mouse Action Click Double click Drag Using the mouse Without moving the mouse press and release the left or right mouse button Press and release the left or right mouse button twice in rapid suc cession Press and hold the left or right mouse button move the mouse and then release the button The action is used to Select an item or cancel an opera tion Select an item and starts the action associated with the item Select an option from a menu view information not currently visible in a list box or window scroll change the width of a column Actions performed by clicking double clicking or dragging can be different when using the left button or right button 343153 Rev B 5 97 2 6 Surfscan 6200 Operations 2 1 4 FLOPPY DISK DRIVE The floppy disk drive allows you to install new software upgrade existing software back up and restore the system hard disk and save export or insert import selected data
241. ss control a graphic representation of a characteristic of a process showing plotted values of some statistic gathered from that characteristic and one or two control limits A control chart is used to judge if a process is in control and as an aid in achieving and maintaining statistical control Control limit In statistical process control a line or lines on a control chart that are used as a basis for judging the significance of variations from subgroup to subgroup Variation beyond a control limit 1s evidence that special causes are affecting the process Control limits are calculated from process data 343153 Rev B 5 97 Glossary Glossary 3 Cursor An object on the screen that can be moved with the mouse or arrow keys and that allows the user to locate or edit data See limit cursor particle cursor and text cursor Cycle control A control within dialog boxes that when clicked presents options one at a time Click the left button to cycle forward through the list of options Click the right button to cycle backward Data compression A technique used to reduce the amount of disk space required to store data DataHub A Tencor Instruments data analysis system Database A collection of data organized by records The instrument s database can contain data summaries maps user IDs system log records recipe records and other data DECnet A local area network protocol that allows the instrument to transfer files to a host comput
242. ssed printing mode Refer to your printer manual for details on manually configuring your printer NOTE For more information about using the Windows Control Panel refer to the Microsoft Windows documentation To set the Generic Text Only printer to wide carriage 1 At the System Menu choose the Windows Program Manager icon The Surfscan 6200 System Menu reduces to an icon Open the Windows Control Panel accessory Open the Control Panel Printers utility Choose the Generic Text printer from the list of printers Choose the Setup button to display the Generic Text Only setup dialog box oy ek Gee ae a Select the Wide Carriage check box An X appears 343153 Rev B 5 97 Setting Up the System 7 25 ae 8 Close the Control Panel dialog boxes by choosing OK at each box To return to the System Menu double click on the Surfscan 6200 icon at the bottom of the screen Be sure your Text printer is set to Generic Text Only To configure your printer for 132 column compressed mode printing I oy aes A 10 11 12 13 Open the Microsoft Windows Program Manager window Open the Control Panel and then open the Printers utility The Printer utility displays the Printers dialog box Choose the Generic Text Only printer Choose the Setup button to display the Generic Text Only dialog box Choose the Add button to display the Add dialog box Enter the name for your 132 column printer in the New Printer Name tex
243. st measured Click Resume or press SEL Proceed to Section 6 2 3 Using the Substrate Calibra tion Curve To exit the calibration scan without saving calibration measurements 1 Click Cancel or press CANCEL The application displays a confirmation dialog box 2 Choose OK to continue the calibration or choose Cancel to end the calibration 6 2 3 USING THE SUBSTRATE CALIBRATION CURVE A calibration curve normalizes the response of the Surfscan 6200 to a substrate film thickness pair When a substrate is added to the database and the first sample wafer scanned the instrument displays the standard calibration curve in red and the measured diameter to cross section point in yellow You can use the Substrate Calibration Curve window to view or edit a substrate and film thickness calibration curve To display the calibration curve window view the current calibration curve by selecting PSL Spheres on Substrate from the Procedure menu and choosing Results from the menu bar or accept the results of a calibration measurement as described in Section 6 2 2 Measuring PSL Spheres Using the results of calibration scans and other data the analyst can create a customized monotonic curve for a selected substrate Using the mouse or keypad you can change the location of points and add or delete points as necessary To view a substrate calibration curve 1 Choose PSL Spheres on Substrates from the Procedure menu 2 Choose Substrate fr
244. strate from the Procedures menu 2 Choose Substrate from the menu bar The application displays the Select Substrate Type and Thickness dialog box Select Substrate Type and Thickness Substrate name Thickness HITRIDE I wH tride ALSTI J BACESIDE 5S Bare Silicon BPSG J DLHOX S HITRIDE NOY TIN J Figure 6 3 Select Substrate Type and Thickness Dialog Box The Substrate Name box lists the current substrate names The Thickness box lists the current thicknesses for each selected substrate 343153 Rev B 5 97 Calibration 6 5 To select a substrate and film thickness 1 Choose a substrate name Available values appear in the Thickness box to the right 2 Choose a thickness 3 Choose OK To view the calibration curve for this substrate choose Results from the menu bar To add a new measured substrate calibration record 1 Choose Substrate from the Calibration menu bar The application displays the Select Substrate Type and Thickness dialog box 2 Choose Select to expand the dialog box and select the Measured radio button if it is not already selected Select Substrate Type and Thickness Substrate name Thickness ee Heasured C3 Automatic Optical Configuration Illumination P polarized Collector Polarization S polarized Figure 6 4 Adding a New Substrate Type the new substrate name and thickness Choose the optical configuration 4 Choose Add The instrument adds the new substrate
245. summaries and TFF files of the primary data and alternate data Gf collected Choose Write to TFF from the XY menu Or press MENU use the arrow keys to select the XY menu and choose Write to TFF and then press ENTER Press START Scanning 4 13 4 4 1 GENERAL PROCEDURES General procedures when using the Scan application are listed in this section To enter user ID information 1 Choose Set IDs from the Recipe menu Scan displays the following dialog box D EMO DEMO DEMOS DEMOA PRODUCTID PROCESSID Eg a a a a a a LOTID i i Figure 4 9 Database ID Definitions Dialog Box 2 Enter the User ID information required Use the pull down lists to view or select previously entered data Note User IDs are customer defined Consult with your system manager for rules on using these fields 343153 Rev B 5 97 AAA Sirsa 6200 Operations To enter the Lot ID 1 Choose Lot ID from the Recipe menu Scan displays the Lot ID dialog box Please enter Lot ID LOTTEST Persistence Next scan only Until end of cassette O All subsequent scans Figure 4 10 Lot ID Dialog Box 2 Enter the new Lot ID and choose OK The Lot ID appears in Lot Summary reports and the Lot Summary screen and is required for saving Tencor File Format TFF files Lot ID also can be entered at the Lot Summary screen To save Tencor Format File TFF manually 1 After scanning the substrate choose Write to TFF from the X
246. t Of Limits Values Alarm when a data value exceeds a limit for the function Alarm On Warning Levels Alarm when a warning level is exceeded Alarm On Projected Limits Alarm when a function s data is projected to exceed a limit Alarm On Projected Warnings Alarm when a function s data is projected to exceed a warning level 343153 Rev B 5 97 Diagnostic Tools 12 9 12 1 8 PREFERENCES Using the Preferences dialog box you can choose to display vertical grids and dotted lines on function charts To set preferences 1 Choose Preferences from the Variables menu EWS displays the Preferences dialog box E Small Graph Vertical Grids _ Dotted Lines On Large Grids L Dotted Lines On Small Grids Lok _cencet_ Figure 12 7 Preferences Dialog Box 2 Choose options and click OK Preference Description Large Graph Vertical Grids Show vertical grids on full screen function charts Small Graph Vertical Grids Show vertical grids on function charts shown in panel displays Dotted Lines On Large Grids Show dotted lines on full screen function charts Dotted Lines On Small Grids Show dotted lines on function charts shown in panel displays 12 2 SYSTEM STATUS The System Control and Status application allows you to view and print system status and version information To start the System Status and Control application Choose the Status icon from the Diagnostics Tools menu The System Control and Status window appears
247. t box Using a computer keyboard type the control code for setting 132 column mode in the 17 c p 1 characters per inch field Check your printer manual for the control codes for compressed printing Printer type Control Code ASCII Code Use with ALT key Dot matrix 9 and 24 pin printers Ctrl O O15 HP PaintJet Esc amp k2S 027 038 107 050 083 For example to set an HP PaintJet for 132 column mode press ESC the 17 c p 1 field shows lt ESC gt and then type amp k2S The k must be lowercase and the must be uppercase You can also use decimal codes by pressing and holding the ALT key and then typing the three digit decimal codes on the numeric keypad For example you can type ALT 027 ALT 038 ALT 107 ALT 050 and ALT 083 Click OK to close the Add dialog box Check the Wide Carriage and No Page Break options in the Generic Text Only dialog box and choose OK Choose Close to close the Printers dialog box Close the Control Panel accessory Open the Surfscan 6000 series application by double clicking on theSurfscan 6200 icon Open the Setup application and choose System from the Config menu Choose the Printers button and choose the Generic Text Only printer for your Text Printer 343153 Rev B 5 97 7 26 Surfscan 6200 Operations 7 11 3 SETTING UP FOR FAST PRINTING OF SYSTEM LOG REPORTS When printing system log reports faster printing can be achieved if the Windows default printer is used for print
248. tabase The database contains wafer maps wafer summaries system log entries system calibration tables user account information and recipes Wafer maps summaries and system log entries take the majority of database space The database size is in part limited by the size of the hard disk As new maps summaries or log entries are saved into the database the database file automatically expands as necessary using available free disk space If you save data to the database but do not remove old data from the database the database grows and can eventually consume all available free disk space You should periodically export old maps summaries and log entries to floppy disks and then delete them from the database to make more space Note however that by deleting maps summaries or log events from the database you make database space available but you do not make disk space available In other words the database file does not reduce in size when you delete entries for it Access to a large unmaintained database is slower than for a well maintained database It is good practice to back up your database when it is small and contains essential recipes user accounts system calibration tables system configuration and user configuration data This small database can be used to reduce the size of your database at a future time if required If the disk becomes full additional data cannot be saved into the database since it can no
249. tabase A record must match all entered values to be selected For quickest results you should use the fewest values necessary to identify the data to review Database access time improves when less than 100 records have been selected for review In general you can limit the data selection to a smaller number of records by using a narrow date or time range or by using other key fields that more closely identify the wafer records you want to select 343153 Rev B 5 97 Browser 9 3 To select wafer records l Choose the Database icon from the System menu Then choose the Browser icon on the Database Menu to start the Browser utility 2 Choose Set IDs from the Database menu to display the Desired IDs dialog box 3 C Ib 1 C 1b 2 C ID 3 C Ib 4 5k cancer Figure 9 3 Desired IDs Dialog Box Select the IDs you wish to use for data selection and choose OK Only the IDs fields checked can be used for record selection at Step 4 4 Choose Select from the Database menu to display the Select dialog box Show oD Sustate Anes JO ID Hi Slot Number LI ID 2 Ranges From To ID 3 Defet Jf Jo ID 4 Date 12703794 4 027032935 E ID 5 Time 12 00am ID 6 ID 7 Figure 9 4 Data Selection Dialog Box Choose values for one or more selection fields Only those records matching all the values entered in this dialog box are selected A blank selection field is a wildcard that match
250. tabase free space conditions e When the disk icon is green disk and database free space are within acceptable limits e When the disk icon is yellow the disk or database is nearly full You should free up disk space or database space as soon as possible e When the disk icon is red the disk or database is full You should immediately free up disk or database space You must not continue saving data until more free space is made available To view disk and database statistics Double click on the disk icon to open the Hard Disk and Database Usage Statistics dialog box Hard disk utilization Drive O HB of total Database T2 2f Free 56 2 Database Utilization Maps Co Summaries L Used 4 used Maps Summaries 0 OF Warning Critical oe Figure 8 2 Hard Disk and Database Usage Statistics Dialog Box 343153 Rev B 5 97 8 6 Surfscan 6200 Operations The Hard Disk and Database Usage Statistics dialog box shows the amount of disk space used and free the amount of database space used and free and the number of maps and summaries used Choose the Help button to view on screen information about disk and database space 8 2 3 RECOVERING FROM A DISK FULL CONDITION If the hard disk becomes full you must delete enough non essential files from the disk to free 3 MB or more of disk space To recover from a disk full condition l 2 Connect an AT keyboard to the instrument Start the Windows File
251. tact your Tencor Service Representative 3 Import the data saved at Step 1 See Chapter 10 Export and Import CAUTION The calibration verification procedure should be performed after restor ing the database 8 2 5 REPAIRING THE DATABASE Under certain conditions the Surfscan database might become corrupt This can happen if there is a power loss or the instrument is reset while accessing the database Depending on the type and amount of damage to the database it might be possible to repair it As always this should not be considered a substitute for regular backups as there are conditions where the database cannot be repaired See Section 8 3 Backing Up and Restoring the Database for backup procedures To repair the database 1 Exit the Surfscan application The database cannot be repaired if the Surfscan application is running Microsoft Access must have exclusive access to the data base 2 Double click on the Microsoft Office group icon in the Program Manager Double click on the Microsoft Access icon in the Microsoft Office group 343153 Rev B 5 97 8 8 4 10 11 12 Surfscan 6200 Operations Select the Repair from the File menu The Repair Database dialog box is displayed E gt c Cem Es database remote mdb Databases mdb E c tencor so E Figure 8 3 Repair Database Dialog Box The default database locations are C DATABASE LOCAL MDB and C DATA BASE REMOTE MDB
252. te 11 4 System Log Entry Descriptions 12 Diagnostic Tools 12 1 12 2 12 3 Early Warning System 12 1 1 Function Controls 12 1 2 Viewing Data Values 12 1 3 Function Display 12 1 4 Collection Parameters 12 1 5 Panel Controls 12 1 6 EWS Controls 12 1 7 Alarms 12 1 8 Preferences System Status Scribe Mark Exclusion Zones 12 3 1 Configuring SMEZ 12 3 2 Applying SMEZ Definitions 12 3 3 Creating Scribe Mark Exclusion Zones 13 X Y Coordinates Option 13 1 13 2 Rotating a Map Translating X Y Coordinates 14 Statistical Process Control Option 14 1 Editing SPC Data Files 14 2 Extracting Data for SPC 14 3 Displaying SPC Data 14 4 Printing SPC Data 14 5 SPC Tutorial 14 5 1 Introduction 14 5 2 Control Charts 14 5 3 Implementation Guidelines 15 Patlite Option 15 1 Introduction 15 1 1 System Configuration 15 1 2 Lighting Options 15 2 Status Information Available 15 2 1 Scan State 15 2 2 Cassette State 15 3 Configuring the Patlite xiii 11 8 11 8 11 9 11 10 11 11 11 13 12 1 12 1 12 3 12 3 12 4 12 5 12 7 12 8 12 8 12 9 12 9 12 12 12 13 12 13 12 13 13 1 13 2 13 2 14 1 14 1 14 4 14 5 14 6 14 6 14 6 14 7 14 10 15 1 15 1 15 1 15 1 15 1 15 1 15 3 15 5 343153 Rev B 5 97 XiV Surfscan 6200 Operations 15 3 1 ASCII File Format 15 5 15 3 2 An Example 15 7 Glossary Glossary 1 Index Index 1 343153 Rev B 5 97 Figure 1 1 Figure 1 2 Figure 2 1 Figure 2 2 F
253. te processing See Section 4 2 5 Lot Summary 343153 Rev B 5 97 Scanning 4 35 4 11 3 CHOOSING AUTOMATIC PRINTING OPTIONS Automatic printing options are specified in the recipe The recipe can specify the type of summary to print none one line short or long and the screen print setting off normal or swap black and white For details see Section 5 6 3 Automatic Printing 4 11 4 SETTING UP PRINTERS To choose the text and graphics printers 1 Choose Select Printers from the Print menu Scan displays the Printer Selection dialog box Text Printer Graphics Printer Epson Fx 65 Epson Fx 65 Epson Fx 850 Epson FXx 650 Generic Text Only FILE HF DeskJet Plus Generic Text Only HP LaserJet INS HP DeskJet Plus HP LaserJet INS PostScript HP LaserJet INS Figure 4 32 Printer Selection Dialog Box 2 Choose a text and graphics printer The system uses the text printer to print summaries and reports and the graphics printer to print maps and screen printouts One printer can be assigned as both the text and graphics printer To print 132 column reports set your Text printer to Generic Text Only The printer must be configured as described in Section 7 11 2 Setting Up for Printing 132 Column Reports To print to a video printer set the Graphics Printer to VIDEO To print maps and screens the graphics printer must not be assigned to a text only printer To print screens to a Wi
254. ted record to the database by clicking No e At any time that this dialog box is displayed you can click Yes to All to finish 343153 Rev B 5 97 10 6 Surfscan 6200 Operations importing all remaining selected records or Abort Import to stop the importing process 8 Ifanitem of the same name already exists in the database the following dialog box will also appear Recipe WEGGIE Do you wish to overwrite the record already in the data base Yestoan Yes __No__ stor import Figure 10 7 Record Already Exists in Database Dialog Box The Record Already Exists in Database dialog box allows you several options If you do not want to be prompted before overwriting of the indicated record and subsequent records to the database click Yes to All and all selected records with the same name will be overwritten e You can also confirm the overwriting of the indicated record to the database by clicking Yes the utility will proceed then redisplay the dialog box for the next selected file Or you can skip overwriting the indicated record and keep the original in the database by clicking No e At any time that this dialog box is displayed you can click Yes to All to accept overwriting any remaining selected records that might seem to already exist or Abort Import to stop the importing process 9 When the import of selected records is complete all selected records that were imported will be prefixed with the letter
255. that a TFF file contains the wafer data currently displayed in the map including any changes made to bin splits map orientation and origin TFF files can be automatically saved if specified in the recipe s Detailed Save Configuration For details on setting up for TFF files see Section 7 7 Setting Up for TFF Files The Print menu allows you to print wafer summaries and lot summaries on the text printer Summaries can be printed in 40 80 or 132 column format The Select Printers item allows you to select the text and graphics printers for the system The Resume Printer item starts a suspended print job See Section 4 11 Printing Summaries for details on printing The Display menu provides data display combinations defect map only defect histogram only defect map plus histogram haze map only haze histogram only or haze map plus histogram The recipe specifies the initial data display The Help menu provides help topics Choose Using Scan to view the help topics related to the Scan application or choose Contents to open the help system Choosing Using Help displays the Microsoft Windows Using Help topics 4 4 QUICK REFERENCE The following table summarizes the actions available when using the Scan application To Do this Change the scan order Press CASS Change the data display Choose a display option from the Display menu Or press MENU use arrow keys to highlight the Display title and press arrow keys to open
256. the Browser utility as follows at the System menu choose the Database icon The Database menu appears Choose the Browser icon Select the wafers to extract from the database as follows e Choose Select from the Database menu Browser displays the Select dialog box e Using the selection fields choose the wafers to extract and choose OK Browsers displays the list of wafers in the Review window If the list is correct proceed to step 3 If the list is not correct return to step 2 Choose Extract to SPC from the Browser menu bar Browser displays the number of records to extract Choose OK Browser asks for the SPC filename Select an SPC file from the list and choose OK The data is copied into the SPC file Any data currently in the SPC file is replaced by the new data Browser automatically runs the SPC display utility where you can display an X MR chart C chart data table or combination of displays See Section 14 3 Displaying SPC Data for details Statistical Process Control Option 14 5 14 3 DISPLAYING SPC DATA Data stored in an SPC file can be displayed in an X MR chart C chart data table or combination of displays using the SPC Display utility To start the SPC Display utility Choose the SPC Display icon from the Database menu The SPC Display window appears I mit Mae CF Asi ca rd Hiri i X MR Chart Figure 14 4 SPC Display Window To display an SPC data file 1 Open the data file to
257. tion user configuration data compression and TFF database ID association Access menu items provide user account management actions as described in Section 7 8 Managing User Accounts 343153 Rev B 5 97 7 2 Surfscan 6200 Operations Recipe menu items provide recipe management actions as described in Section 7 9 Managing Recipes To exit the Setup application Choose Exit from the Config menu 7 1 USER CONFIGURATION DIALOG BOX Many configuration options are set through the Setup application s User Configuration dialog box To print a user configuration report see Section 8 4 Reports To open the User Configuration dialog box 1 Choose User from the Config menu Setup displays the User Configuration dialog box Click the More button to open the second part of the dialog box User Configuration History Log Events Login Method Code m ae L User Logon LJ Warning Access Time Dut 200 L User Logoff L Caution Messages L Mode Change L Error Status Off L Recipe Change Warning OFf L New Recipe Caution Off _ System Configuration Change Error Off LJ User Configuration Change Show Sign On Banner L Use last User Name for System Startup EJ Simulated Data L Reverse Ladder L Reverse Cassette Processing L_ Destination Slot Humbering C L lt Failed Wafers C Suppress Lot Summary Display LJ Extended Particle Channel L Reverse Destination Filling 25 Default casse
258. tion from the Map to Map menu Map to Map 1 Before map Figure 9 8 Map to Map Menu When saving a TFF file using map to map the file contains only the data displayed in the added removed or difference map 343153 Rev B 5 97 Browser 9 9 To set the common particle radius 1 Choose Preferences from the Map to Map menu Browser displays the Map to Map Preferences dialog box Figure 9 9 Map to Map Preferences 2 Enter the radius value and choose OK When particles on both maps that are within this distance of each other Browser reports them as being common If the radius value is 0 no common particles will be found When you choose OK Browser recalculates the difference map To view a map of removed defects Choose Removed Defects Map from the Map to Map menu Thi Jan 05 T995 144 nie LPO Gat 16 iT IM 1 ill IL 210 I Cross Section iyi 250 MINT Figure 9 10 Removed Defects Map 343153 Rev B 5 97 9 10 Surfscan 6200 Operations To view a map of added defects Choose Added Defects Map from the Map to Map menu Tencar Inst arity 14 47 22 WE Lom 14 J6 195 Pb ral 15 2i 22 z h Jit oa eat l4 zgi mst Sho iges no tbh T M igi i i ulmi mh Litas SEED tum Jal Figure 9 11 Added Defects Map If Browser is already displaying wafers map to map you can return to the Review window and select another map for comparison Browser displays a selection dialog
259. tion report see Section 8 4 Reports 343153 Rev B 5 97 7 20 Surfscan 6200 Operations To view the instrument s system configuration Choose System from the Config menu Setup displays the System Configuration dialog box Processor Type Intel 486 Model Number SF S6200 Machine Type Instrument Lager Type Argan bon samping Rate ingie Analog Board Type PIN 723670 Water Handling standard indexer Configuration Lott Righi Maximum Haze at Gain 1 SO000 ppm Captions CI Juggier _ Removcabte Msk C Streaming Tape Cl Debug Figure 7 14 System Configuration Dialog Box Select the Printer button to configure printers See Section 7 11 Setting Printer Config uration System configuration options are factory set at Tencor Instruments and should not be changed unless instrument hardware is upgraded These options include Factory Set Options Description Processor Type Computer system microprocessor type Model Number Surfscan model SFS6100 or SFS6200 Machine Type Options are Blind Instrument or Desktop Laser Type Laser used by instrument Argon Ion Surfscan 6200 or HeNe Surfscan 6100 Sampling Rate Sampling rate of instrument Single 343153 Rev B 5 97 Setting Up the System Factory Set Options Analog Board Type Wafer Handling Indexer Configuration Maximum Haze at Gain 1 GEM Version 7 21 Description The analog board type used by the instrument Unknown desktop system
260. tion window frame i ipe Z Print J Window SYSTEM STATUS Dias mod Tire Tus Sapi i ide hiamo Stet ed 352 SK 1 Hk Copia Lote eek Pree n bates ii 12 a4 Taal Disk Spare n betes C i Si Bei Uka Hami Ciara hanaga Li Tapa Ucar Fanaa Figure 12 10 Tiled Windows VERSIONS Cinks ood Tirri Tum Sap 17 pe i Sie Hanham erwin 1 0 Yirmi Sere ri SE 0 Sofware Yeronr 343153 Rev B 5 97 12 12 Surfscan 6200 Operations Cascaded windows overlap each other View Z Print 3 Window SYSTEM STATUS Date and Tine Tue Sep 17 1991 13 33 Memory Availabe 15K MAE Contiguous Total Disk Free in bytes Gr 121954304 Total Disk Space in bytes T 219176960 User Hame Cintomner Hanraper User Type User Manager Figure 12 11 Cascaded Windows 12 3 SCRIBE MARK EXCLUSION ZONES When a scribe mark is placed on wafers for use as a reference point by a SEM the scribe mark and associated surface damage can be excluded from scan summary statistics by defining a scribe mark exclusion zone SMEZ From one to five zones can be defined Events within a SMEZ are captured by a scan sized located by X and Y coordinates and painted on maps However the events are not included in scan summary statistics for example LPD counts area count and bin counts and the data within the zones are not used for sorting passed and failed wafers or in map to map statistics Events within a SMEZ are not reported in Tencor File Format TFF files except as se
261. tions e Forward sweep time e Reverse sweep time e Scanner period the total of the forward and reverse sweep times e Scanner symmetry the difference between the forward and reverse sweep times e Laser current at all gains e PMT voltage at each gain setting The Early Warning System collects data from instrument hardware plots the data in function charts and saves the data to disk e EWS can sample data every 100 scans e EWS can display the data values for the preceding 200 seconds and can plot data within the selected display interval of seconds minutes hours days or months e EWS data can be saved to disk at any time EWS data files are standard DOS files Using the EWS application you can set data collection parameters for each instrument function set graphic display options for each function and for entire panels and specify EWS graph options and alarm conditions EWS provides three levels of control function controls panel controls and EWS controls as described in this chapter 343153 Rev B 5 97 12 2 Surfscan 6200 Operations To start the EWS application Double click the Early Warning icon from the System Menu The instrument displays the Early Warning System window showing Panel 1 1 POR WAHD SALLF T L LASUR OUHACAT AT 2 i fini ee ia b PHI AHH OL TAGE A zd i J Ea P ail L Tl a ET Pi il F SCARNA PEA T PWT HIGH WOLTAGE AT G 7 i SCANNER Srk rit eae I Figure 12 1 E
262. ton If there are no higher peaks within the range of the cursor the cursor does not move To move the cursor to the highest peak in the MicroView Double click the left mouse button Highest peak in MicroView When you ang double click the mouse the cursor jumps to the highest peak within the MicroView area Eien mir eee ad PE biaa zE is L ee t SERN i Figure 4 23 Moving the MicroView Cursor by Clicking and Double Clicking 343153 Rev B 5 97 Scanning 4 29 To move the cursor along one or more adjacent defects a scratch for example Drag the mouse along the Y axis Press and hold the mouse button while moving the mouse up or down To return to the Panning window Press MICROSCOPE UNDO CANCEL or the right mouse button The MicroView cursor disappears 4 10 4 SETTING THE MICROVIEW THRESHOLD You can set the threshold for MicroViews For example if the MicroView shows a haze component you can set the threshold to a point above the main body of the haze to better view defects above the haze The threshold remains in effect until you reset the threshold to a new value or you scan a new wafer To set a new MicroView threshold 1 Perform a MicroView by pressing MICROSCOPE 2 Press RCP to display the MicroView Display Options dialog box HMicro iew Display Options 2 00 Recipe Threshold JAHIL MicroView Threshold Figure 4 24 MicroView Display Options Dialog Box 3 Enter the Micr
263. tte slots OK Cancet Figure 7 2 User Configuration Dialog Box 343153 Rev B 5 97 Setting Up the System 7 3 The following configuration options can be set Configuration Option Control Type Login Method Access Time Out Messages Show Sign On Banner Simulated Data Reverse Ladder Numbering Reverse Cassette Processing Description Selects the type of instrument control local or host Local Instrument is controlled locally using the opera tor keypad mouse and display Host A host computer controls the instrument The logon access method None No password or key is required for instrument operation Code The user must enter a password code to access the system Key Not implemented Code and Key Not implemented Time out value in minutes Not implemented Message alert notification Messages are listed in order of severity with errors being the most critical Off The system displays messages with no audible alert or flashing message border Flash The system displays messages with flashing bor ders Sound The system displays messages and beeps Flash and Sound The system displays the message using sound and flashing border Enables the display of the instrument s system banner at startup This option is normally disabled Normally disabled Should only be used for diagnostic purposes or when using the Surfscan 6000 series Desk top option Contact Te
264. tton If backing up to floppy diskettes insert the first diskette into the floppy drive Click on the Start Backup button If backing up to floppy diskettes the following message box appears Durning a backup compare or restore Microsoft Backup needs to have exclusive access to the floppy disk drives Microsoft Backup will make the floppy disk drives unavailable to your other applications until the backup compare or restore is complete You should not try to read or write to any floppy disk while a backup compare or restore is In progress Figure 8 6 Disk Access Message Box Click OK to proceed with the backup Workingwiththe Database TT 7 The following window appears showing the progress of the backup Figure 8 7 Backup Progress Window When prompted remove the first diskette insert the next and click OK or press ENTER If backing up to a network there are no disks to add and no prompt appears 8 When the backup is completed the following message box appears gt Backup Complete Files Selected 6 Files Backed Up 6 Figure 8 8 Backup Complete Message Box Click OK or press ENTER to return to the main Backup window 9 Click on Quit in the button bar The following message box appears You are about to exit Microsoft Backup L Figure 8 9 Exit Backup Message Box Click OK 343153 Rev B 5 97 8 12 Surfscan 6200 Operations 8 3 2 RESTORING DATA The procedure that follows
265. u must log on to the system and select the application you want to use To power up the instrument Press the Power On button on the instrument s auxiliary panel Allow 10 minutes for a full warm up The instrument displays status messages and the Log On dialog box appears when the system is initialized To log on to the instrument Using the on screen keypad click on each character of your access code For each character clicked an asterisk appears in the access code text box When you have entered all characters click the Enter button Please Enter Access Gode Use the on screen keypad to enter your access code with the jcjoje mouse ajeji OC ed a Aps tfulyiwls EA a Figure 3 1 Logon Dialog Box NOTE If your access code is a number you can use the instrument keypad to enter it 343153 Rev B 5 97 3 2 Surfscan 6200 Operations NOTE The screen blanks out when there is no operator entry for over 1 minute To display the Log On screen again press any key on the keypad You cannot use the mouse to redisplay the screen If you enter a valid code the system displays the System Menu If you enter the wrong code the system displays an error dialog box Choose the OK button to re enter your access code The System Menu contains three or more icons depending upon your user access level Mouse pointer The selected icon Is highlighted Diagnostics Tools Menu Type Wi
266. ue from 1 to 7 for the Surfscan 6100 1 to 8 for the Surfscan 6200 Max Size indicates the maximum LPD size for this gain When you change Gain the instrument automatically sets Area From to Max Size and sets Threshold and Haze Range to their default values Surfscan 6100 6200 Max Size and Threshold values are listed in the table that follows cm ee z e E ee ee eae es 0 12 0 005 6200 only sf se 343153 Rev B 5 97 5 6 Threshold Throughput 343153 Rev B 5 97 Surfscan 6200 Operations Threshold specifies the smallest LPD size to be included in the scan result Threshold defaults to the standard value for the current gain setting If you set threshold to O the instrument automatically supplies the default value If you set threshold to a value equal to or greater than Max Size data will be collected for one size only P ae Default Threshold um um ee a ee 1 8 0 07 0 0001 6200 only The speed at which the wafer is processed through the instrument high medium normal or low Throughput sets wafer scan speed and relative scanning sensitivity and determines microscan viewing dimensions Recipes 5 7 5 3 2 DATA DISPLAY PARAMETERS Data display parameters specify the primary and secondary data type of display map histogram or both show size diameter or cross section bin splits area boundary and haze range Data Display Parameter Display Option Display Type S
267. urfscan 6200 Operations 3 343153 Rev B 5 97 Enter the thickness of the substrate in um or click Default to use the SEMI standard thickness for the substrate size See Table 6 1 Click OK Table 6 1 SEMI Substrate Thickness Substrate Size SEMI Thickness mm um 100 575 125 625 150 675 200 725 The application displays the Choose PSL Sphere Diameter dialog box See Fig 6 9 Choose the PSL diameter supplied on the sample wafer To define a diameter not listed choose one of the radio buttons shown as unused If you are an analysis user you can choose Select to show calibration recipe parameters The dialog box expands to show data collection and data display parameters Choose PSL Sphere Diameter Calibration Recipe Parameters Sphere diameter pm Silicon dioxide 10004 p um Sphere diameters 0 100 pm 0 117 pm Maximum C 22 C 0 136 pm Edge exclusion mm C 0 157 pm 0 204 pm O 0 238 pm Threshold ym 0 305 pm 0 364 um l a 2 1 09 pm Upper display limit pm C 4 00 pm gt unused 2 unused Gain 4 MinThresh 0 0220 MaxSize 2 50 PHT gain setting Lower display limit pm Figure 6 9 PSL Sphere Diameter Dialog Box Calibration 6 11 If necessary change the default parameters as described in the following table Recipe Parameter Description Sphere Diameter Um The PSL sphere diameter Use this field to enter a new diameter when unused is se
268. w a different month Choose OK to use the selected date Time Range The creation time range Enter the starting time in the From field and the ending time in the To field 10 5 4 SELECTING PSL SPHERES ON SUBSTRATE RECORDS Selected PSL spheres on substrate records can be exported as described in this section To select all PSL Spheres on Substrate records for export 1 Click on the check box at the left of the PSL Spheres on Substrates row in the Selected Items to be Exported section see Fig 10 1 2 When you click on Export the following message box appears Exportimport No Films records selected Do you want to Export all records Figure 10 12 Export All Film Records Message Box Click Yes to proceed or No to cancel 343153 Rev B 5 97 10 12 Surfscan 6200 Operations To select PSL Spheres on Substrate records for export 1 Click on Select next to the PSL Spheres on Substrates row in the Selected Items to be Exported section see Fig 10 1 The system displays the Select dialog box Possible Values Selected Values Films Thickness Films Thickness l Figure 10 13 Selecting Films to Export Dialog Box The Possible Values list box displays Film records currently available in the database The Selected Values list box displays Film records selected for export The move buttons allow you to move items to or from the Selected Values list as described below Button Description gt Adds the selected Film
269. want to collect data for LPDs in the 4 to 8 um range the shaded area in the table you would set Gain to 3 and set Threshold to the smallest LPD size of interest The instrument collects displays and records LPDs within the range set by the Threshold and Area From parameters Area From defaults to 10 um for Gain 3 If desired bin splits can be used to display any segment of data within the Threshold to Area From range A A 100 7 28 10 4 1 1 Oo a 1 40 0 21 N 0 32 via 0 16 0 12 D 0 21 I j i mo O 0 16 0 13 0 10 ae 0 08 0 01 a y Gain 1 2 3 4 5 6 7 8 y Figure 5 9 Gain Versus Diameter If you want to collect LPDs in the range of 0 1um to 0 15 um for example you would set Gain to 7 and Threshold to 0 1 If the LPD range of interest exceeds the range of a single gain you can scan wafers twice changing Gain and Threshold values between each scan To automate the process different recipes can be used for each scan If you set Threshold to 0 or Area From to less than Max Size the instrument automatically enters the default value for the parameter 9 4 2 SELECTING A HAZE RANGE The haze range collected during a scan is determined by the gain setting Haze Range value and Haze From value Haze Range determines the maximum haze value collected during a scan You can select from the three haze ranges for each gain setting as listed in Table 5 1 or choose the Autorange setting 343153 Rev B 5 97 Reci
270. want to define the other reference point or to change the location of the reference point you just defined 7 Press CANCEL to exit the zoom mode 343153 Rev B 5 97 X Y Coordinates Option 13 5 To change coordinates for reference points 1 Choose Reference Points from the XY menu The instrument displays the Reference Coordinates dialog box showing the current coordinates for point 1 and point 2 Standard Tencor Instruments coordinates are listed on the right 2 User coordinates are listed on the left under SEM Enter new coordinates for each reference point for example Reference Coordinates SEM TENCOR Point l x um E 4108 Y um 70000 80366 Point 2 um 70000 143858 Y um 70000 72690 eee onc Figure 13 4 Reference Coordinates Dialog Box 3 Choose Apply to Wafer to apply the user coordinates to the map The origin point is repositioned as necessary Origin a uA 1240260 u 140544 Figure 13 5 Applying User Coordinates to the Wafer Map When you apply reference points to a wafer the points appear in both defect maps and haze maps 343153 Rev B 5 97 13 6 Surfscan 6200 Operations To remove user coordinates from the map 1 Choose Reference Coordinate from the XY menu Browser displays the Reference Coordinates dialog box 2 Choose Un apply The user coordinates are removed from the map and Tencor Instruments system coordinates are applied To delete a refere
271. x if necessary to view all data contained in the import file See Section 10 3 Viewing an Import List for more information about generating an import listing 5 To select a single record click on the desired row in the Status box To select multiple records CTRL click on each desired row 6 When you have finished selecting records from the list in the Status box click on Import in the menu bar The following dialog box appears 2 records have been selected for import import Selected Records __Import Al Recorde _Cancel_ Figure 10 5 Selected Import Dialog Box Click Import Selected Records to proceed You can also click on Import All Records to import every item in the import file or Cancel to abort the import process 7 The Confirm Write to Database dialog box appears Do you wish the following record to be added to the data base Recipe WEGGIE Lvestoal ves J oono Stop impor Figure 10 6 Confirm Write to Database Dialog Box The Confirm Write to Database dialog box allows you several options e If you do not want to confirm the writing of any of the indicated records to the database click Yes to All and all the selected records will be written to the database e You can also confirm the writing of the indicated record to the database by clicking Yes the utility will proceed then redisplay the Confirm Write dialog box for the next selected file Or you can skip writing the indica
272. ys a list of defined exclusion patterns a diagram of exclusion regions for the selected pattern and region dimensions To define an exclusion pattern 1 Start the Setup application 2 Choose User from the Config menu The Setup application displays the User Configuration dialog box 3 Choose the More button to open the second part of the User Configuration dialog box 343153 Rev B 5 97 7 8 Surfscan 6200 Operations 4 Click Exclusion Pattern The Exclusion Pattern dialog box appears The dialog box lists the current pattern names a diagram of the exclusion regions for the selected pattern and region parameters Cachan atom Eeclucion Potters Nome Exclgins Geqeon s Dosgeam Exrclongon Parameters WaS mm G ae 240 mm aa S50 mm J 1409 Figure 7 4 Exclusion Pattern Dialog Box 5 Choose New to create a new exclusion pattern The New Exclusion Pattern Selection dialog box appears Exclusion Pattern Hame Flat Exclusion Pattern Bottom Left O Bottom Right gt Top Left O Top Right Hotch Exclusion Pattern O Bottom Left O Bottom Right O Bottom Top Left Top Right Top Bottom Top Left O Bottom op Aight OO Bottom Top Figure 7 5 New Exclusion Pattern Selection Dialog Box 343153 Rev B 5 97 Setting Up the System 7 9 Se et eS Enter a pattern name in the Exclusion Pattern Name field Choose the flat or notch pattern you want to
273. ze of one The moving range is calculated by taking the absolute value of the difference between successive data points 343153 Rev B 5 97 Glossary Glossary 11 XY coordinate tracking An optional feature that allows extremely accurate X Y coordinate tracking between the Surfscan 6000 series instrument and other devices such as a scanning electron microscope Zoom To magnify a wafer map The instrument provides five magnification levels 343153 Rev B 5 97 Index INDEX Index 1 A Access class select by 11 10 Access code at logon 3 1 Access code defining 7 16 Access codes exporting 10 14 Adding calibration record Automatic 6 6 Measured 6 5 Application Exiting 3 3 Starting 3 3 Application Windows 2 9 Area count 4 15 Areas and scratches classifying 5 19 AUTO key 2 4 Automatic calib curve 6 6 Automatic printing 5 23 Automatic saving of records and files 5 24 Automatic sorting of wafers 5 22 Automatic wafer alignment 5 22 Autorange haze 5 15 Autozoom haze 5 15 Auxiliary Panel 2 2 B Backing up the database 8 9 Bin splits 4 15 Editing through histogram 4 21 Setting defect histogram 5 17 Turning off 4 17 Turning on 4 17 Bitmap formats graphics files 7 24 BMP Windows bitmap format 7 24 Browser utility 9 1 Browser using 9 6 C Calibrating PSL spheres 6 3 Calibration Cassettes 6 27 Haze 6 20 How substrate curves are used 6 19 Standard curve 6 17 Substrate curve 6 13 Calibration application 6 1

Surfscan® 6100/6200 Operations Manual Main Contents

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Surfscan® 6100/6200 Operations Manual Main Contents