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Turbo-V 750/850 TwisTorr

1. 82 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Antes de poner en funcionamiento el Turbo V 750 850 TwisTorr Pumping System despu s de un periodo de detenci n prolongado se debe activar la funci n especial SOFT START El sistema se pone en funcionamiento gradualmente hasta alcanzar la maxima velocidad en un tiempo de aproximadamente 35 minutos Despu s de que el sistema ha alcanzado la maxima velocidad se puede deshabilitar el procedimiento de Soft Start y las puestas en funcionamiento posteriores se pueden llevar a cabo en la modalidad normal Para mantener el nivel de protecci n IP 54 utilizar exclusivamente los conectores suministrados con la bomba Para el cable de alimentaci n utilizar s lo los PN 969 9957 o 969 9958 Utilizar el cable y la clavija junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 83 406 4 Manual de istrucciones G mo parar el Turbo V 750 850 TwisTorr Pumping System Para parar la bomba se puede emplear uno de los siguientes m todos 1 desconectar el contraconector de E S en dotaci n 2 enviar la se al de STOP a distancia mediante el conector E S consultar el apartado J1 REMOTE I O en el anexo Technical Information 3 enviar la se al de STOP a distancia mediante la interfaz se
2. UM AH Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento o una ejecucidn especifica gue de no realizarse correctamente podria provocar graves lesiones personales ATENCI N Los mensajes de atenci n se visualizan antes de los procedimientos que de no cumplirse podr an provocar da os al aparato Las notas contienen informaci n importante extra da del texto 72 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Almacenamiento Para garantizar el nivel maximo de funcionalidad y fiabilidad de las bombas turbomoleculares Agilent deberan aplicarse las siguientes instrucciones a durante el transporte desplazamiento y almacenamiento de las bombas no deberan superarse las siguientes condiciones ambientales temperatura entre 20 C y 70 C humedad relativa entre O y 90 no condensante a el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una bomba turbomolecular es de diez meses a contar de la fecha de env o al cliente ATENCI N En caso de superarse por cualquier motivo el per odo m ximo permitido de almacenamiento ser necesario devolver la bomba al fabricante Para mayores informaciones al respecto se ruega contactar con el representante local de Agilent Turbo V 750 850 T
3. 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 361 406 17 Technical Information Command SOFT START ON Source PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destination Controller 02 80 31 30 30 31 30 03 42 33 STX ADDR WINDOW WR OFF ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC 362 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Window Meanings Tab 9 N Read Write Data Type Technical Information 17 Description Admitted Values 101 R W 102 RW 103 R W L Start Stop in remote mode the window is a read only Low Speed in remote mode the window is read only Remote default or Serial configuration Soft Start write only in Stop condition Set Point type Set Point threshold ex
4. Detta visar pa viktig information i texten 146 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet for Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rhallanden respekteras Temperaturomrade 20 C till 70 C Relativ fuktighet O till 90 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna nar de mottas och s tts i drift f r f rsta g ngen a De turbomolekyl ra pumparna kan lagras i 10 m nader fran leveransdatumet jts aa Om lagringstiden av n gon anledning r l ngre m ste pumpen skickas tillbaka till fabriken Var god och kontakta den lokala Agilent terf rs ljaren f r ytterligare information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 147 406 8 Bruksanvisning F rberedelser f r installationen Turbo V 750 850 TwisTorr Pumping System levereras i ett s rskilt skyddande emballage Kontakta det lokala f rs ljningskontoret om emballaget visar tecken p skador som kan ha uppst tt under transporten Se till att Turbo V 750 850 TwisTorr Pumping System inte tappas eller uts tts f r st tar vid uppackningen OBSERVER Vissa modeller v ger ver 18 Kg modellerna 969 8814 969 8816 969 6014 969 6016 969 6017 I dessa fall skall pumpen hanteras med hj lp av
5. Technical Information 78 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Uso del Turbo V 750 850 TwisTorr Pumping System En este apartado se presentan los procedimientos operativos principales Antes de utilizar el sistema realizar todas las conexiones el ctricas y neum ticas Durante el calentamiento eventual de la c mara de vac o la temperatura en la brida de entrada no debe ser superior a 80 C El operador debe asegurarse de programar la modalidad de enfriamiento correcta WIN 106 1 para enfriamiento mediante agua 0 para enfriamiento por aire forzado modalidad por default programando el mando serial WIN 106 Para mayor informaci n consultar el anexo Technical Information El operador debe asegurarse de programar la modalidad de funcionamiento correcta de acuerdo con el gas que se desea bombear bombear WIN 157 1 para N y gases mas livianos 0 para Arg n modalidad por default programando el mando serial WIN 157 Para mayor informaci n consultar el anexo Technical Information iADVERTENCIA No poner en funcionamiento por ningun motivo la bomba si la brida de entrada no esta conectada a la camara de vacio o si no esta cerrada con la brida de cierre No tocar la turbo bomba y sus accesorios eventuales durante las operaciones de calentamiento La temperatura elevada puede provocar da os a las personas Turbo V 750 850 TwisTorr User Manual 87 9
6. s riov ho p ipojen Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 239 406 13 Navod k Pou it Instalace POZOR P ed p ipojen m turbomolekularni v v vy do syst mu nesund vejte roubovac v ko 240 406 Postava 2 Toto za zen instalujte pouze v m stnosti a v dn m p pad v v vu nepou vejte v prost ed s atmosf rick mi sr kami d sn h led prachem agresivn mi plyny nebo ve v bu n m prost ed a v prost ed kde hroz nebezpe po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m maxim ln tlak Z bary nad atmosf rick m tlakem teplota vzduchu od 5 C do 45 C a relativn vlhkost O 90 bez sr en V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz podrobn informace v p loze Technical Information V v va Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou se mus p ipojit k prim rn mu erpadlu viz Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A N vod k Pou it 13 Upevn n v v vy 3 32 18 08 Nedodr en t chto pokyn pro instalaci m e v p pad poruchy rotoru zp sobit odd len v v vy ze syst mu a zp sobit kody v n zran n nebo smrt V v va Turbo V 750 850 TwisTorr Pumping System m e b t nainstalov na v libov
7. 248 dr ba 249 Likvidace 250 P eklad origin ln ho n vodu 5 Agilent Technologies 233 406 13 Navod k Pou it Bezpe nostni navod pro Turbomolekularni vyv wy Turbomolekularni vyv wy jak jsou popisovany v nasledujicim navodu obsahuji velk mno stvi kinetick energie diky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen rotoru m e doj t k uvoln n rota n energie NA 174234180 Pokyny k instalaci uveden v tomto n vodu musi b t p sn dodr ov ny za elem prevence po kozen za zen a zran n obsluhy 234 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod k Pou iti 13 V eobecne informace Toto za zen je ur eno pro odborn ky U ivatel by si m l p ed pou it m za zen p e st tento n vod a v echny dal informace dodan firmou Agilent Firma Agilent neodpov d za jak koli nehody kter vzniknou n sledkem i ste n ho nedodr en t chto pokyn nespr vn m pou v n m neznal mi osobami neopr vn n m z sahem do za zen nebo jakoukoli innost kter je v rozporu s pokyny uveden mi v p slu n ch st tn ch norm ch V v va Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou je integrovan syst m s turbomolekul rn v v vou a p slu n m regul torem pro takov
8. Anvandning av Turbo V 750 850 TwisTorr Pumping System153 Hur Turbo V 750 850 TwisTorr Pumping System startas154 Hur Turbo V 750 850 TwisTorr Pumping System st ngs av 157 N dstopp 157 Underhall 158 Bortskaffning 159 vers ttning av originalinstruktionerna EE Agilent Technologies 143 405 8 Bruksanvisning Sakerhetsanvisningar for Molekylara turbopumpar De molekyl ra turbopumparna som beskrivs i bruksanvisningen har en h g kinetisk energi beroende pa den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppsta i systemet t ex pa grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det handa att rotationsenergin frigors VARNING For att undvika skador pa utrustningen och f rhindra att skador orsakas pa operat rer maste installationsinstruktionerna som beskrivs i den har bruksanvisningen f ljas noga 144 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 Allman Information Utrustningen r avsedd for yrkesm ssig anv ndning Anv ndaren b r lasa denna bruksanvisning samt vrig dokumentation fran Agilent f re anvandning av utrustningen Agilent tar inget ansvar f r skador helt eller delvis till f ljd av sidos ttande av instruktionerna ol mplig anvandning av person utan tillr cklig kunskap obeh rigt bruk av utrustningen eller hantering som strider mot g llande lokala foreskrifter Systemet Turbo V 750 850
9. Bortskaffelse 142 Overs ttelse af originalinstruktionerne pige Agilent Technologies 125 406 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper De molekyl re turbopumper der er beskrevet i n rv rende brugsanvisning har en stor kinetisk energi der skyldes den haje omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan omdrejningsenergien spredes LETE For at undg materielle skader samt at operat rerne kommer til skade er det strengt n dvendigt n je at overholde installeringsvejledningen i denne brugsanvisning 126 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 Generel Information Dette udstyr er beregnet til professionel anvendelse Brugeren b r l se denne brugsanvisning og anden yderligere information fra Agilent f r udstyret anvendes Agilent tager ikke ansvar for skader helt eller delvis som f lge af tilsides ttelse af disse instruktioner fejlagtig brug af personer uden tilstr kkeligt kendskab ukorrekt anvendelse af udstyret eller h ndtering der strider imod g ldende lokale regler Turbo V 750 850 TwisTorr Pumping System systemet omfatter en turbomolekyl r pumpe til h je eller meget h je vakuumtilpasninger og aktuel styreenhed Systemet er i stand til at pumpe en hvilken som helst form for gas el
10. Fast tent Pumpen er i normal rotasjon Sakte blinking periode p cirka 400 ms Systemet er i status for rampe eller bremsing eller Stop eller Waiting for interlock a Hurtig blinking periode pa cirka 200 ms feilforhold Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 173 406 9 Instruksjon Manual VIE Nar str mmen er tilkoblet og motkoblingsstykket med 15 pin som f lger med FORSIKTIG er satt inn vil Turbo V 750 850 TwisTorr Pumping System startes automatisk Kontrolleren leveres allerede mekanisk og elektrisk tilkoblet til pumpen Adskillelsen av kontrolleren fra pumpehuset kan bare gjores av godkjent personale fra Agilent Vacuum Technologies Nar Turbo V 750 850 TwisTorr Pumping System startes etter en periode med lengre stillestans f r systemet settes i gang ma spesialfunksjonen SOFT START kobles inn Systemet settes i gang trinn etter trinn frem til full hastighet over en tid som er pa cirka 35 minutter Etter at systemet har nadd full hastighet kan fremgangsmaten for soft start kobles ut og de p f lgende oppstartene kan utfares pa normalt vis For a opprettholde verneniv et IP 54 bruk kun koblingsstykkene som leveres med pumpen For matekabelen bruk kun PN 969 9957 eller 969 9958 Bruk denne kabelen og st psel sammen med en stikkontakt som er korrekt jordet for a unnga elektrisk stat samt a etterkomme kravene i EU standardene 174 406 Turbo V 750 850 TwisTorr User Manual
11. REMOTE I O IP 54 a szivatty elind t s hoz sz ks ges integr lt csatlakoz sokkal b 9eresellencsatlakoz SERIAL IP 54 a soros csatlakoz shoz Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 203 406 11 Felhaszn l i K zik nyv Telep t s FIGYELEM Ne t vol tsa el az ntapad s v d kupakot a turb szivatty nak a rendszerhez val csatlakoztat sa el tt 204 406 bra 2 Csak belt ri k rnyezetbe telep tse az eszk zt s semmilyen esetben se haszn lja atmoszf rikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani maxim lis nyom s 2 bar a l gk ri nyom s felett a leveg h m rs klete 5 C t l 45 C ig a relativ p ratartalom 0 90 nem kondenz l M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information A Turbo V 750 850 TwisTorr Pumping System et els dleges szivatty hoz kell csatlakoztatni l sd Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 A szivatty r gz t se VESZ LY Ezeknek az sszeszerel si utas t soknak be nem tart sa a rotor meghib sod sa eset n ezt eredm nyezheti hogy a s
12. SCRIPTION Soft Start frequency steps are as follow 350 Hz 450 Hz 550 Hz 650 Hz 750 Hz and 825 Hz The pump remains at each step for 300 sec and the minimum ramp up time in soft Start mode is 35 minutes Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 367 406 17 Technical Information Leak Check Mode 368 406 Leak check mode is provided to run the pump when a leak check is needed on the system Basically both Vent and Purge valves are closed in order to avoid any artificial leak The power usable by the pump is limited to 20 of the set maximum power WIN 168 Leak check mode can be enabled disabled only when the pump is in STOP and it becomes effec tive at the next NORMAL condition Leak check mode can be enabled disabled through serial line a Leak check mode enabled WIN 186 1 a Leak check mode disabled WIN 186 0 When the Leak check mode is enabled the pump will start with the maximum power available When it reaches full speed normal the status condition WIN 205 is identified by value 7 and the power is limited to 20 of the set maximum power WIN 168 Both Vent and Purge valves are closed Leak check mode must be explicitly disabled set ting WIN 186 to value 0 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Agilent T Plus Agilent T plus Turbo Pumps Linked User Software is the communication control and monitoring software for Agilent Turb
13. Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline 1 43 ISO 160K 9 99 253 8 Figure 30 Turbo V 750 TwisTorr Pumping System ISO 160 K with mounted Fan and Purge Vent device accessories Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 333 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline Nitrogen Argon Helium Hydrogen Figure 31 Graph of Pumping Speed vs Inlet Pressure for Turbo V 750 TwisTorr pump Nitrogen Argon Helium Hydrogen Figure 32 Graph of Pumping Speed vs Inlet Pressure for Turbo V 850 TwisTorr pump 334 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline Argon Helium Figure 33 Graph of Compression Ratio vs Foreline Pressure Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 335 406 17 Technical Information Output Power during High Temperature Condition During operation the controller limits the power provided to the motor according to Gas type load selectable WIN 157 see the following Window Meanings paragraph Cooling mode selectable WIN 106 see the
14. ele nato ko se je seznanil s pogoji in z merili kupopordajne pogodbe Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 285 406 15 Priro nik za Navodila Odlaganje opadkov 286 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 16 Instructions for Use Safety Guideline for Turbomolecular Pumps 288 General Information 289 Storage 291 Preparation for Installation 292 Installation 294 Pump Fixing 295 Use of Turbo V 750 850 TwisTorr Pumping System 297 How to Start the Turbo V 750 850 TwisTorr Pumping System 298 How to Stop the Turbo V 750 850 TwisTorr Pumping System 300 Emergency Stop 301 Maintenance 302 Disposal 303 Original Instructions 5 Agilent Technologies 287 406 16 Instructions for Use Safety Guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational energy may be released WARNING To avoid damage to eguipment and to prevent injuries to operating personnel the installation instructions as given in this manual should be strictly followed 288 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 General Information Thi
15. possibile alimentare un ventilatore aggiuntivo comandare il gruppo di purge vent aggiuntivo pilotarlo da remoto tramite un computer host collegato con linea seriale RS232 o RS485 Nei paragrafi seguenti sono riportate tutte le informazioni necessarie a garantire la sicurezza dell operatore durante l utilizzo dell apparecchiatura Informazioni dettagliate sono fornite nell appendice Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 17 406 1 Istruzioni per l uso Questo manuale utilizza le seguenti convenzioni ANTI 411172 messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali aaia yA aa messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura Le note contengono informazioni importanti estrapolate dal testo 18 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Immagazzinamento Per garantire il massimo livello di funzionalita ed affidabilita delle pompe Turbomolecolari Agilent devono essere osservate le seguenti prescrizioni durante il trasporto lo spostamento e l immagazzinamento delle pompe non devono essere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da O a 90 non cond
16. 1 pro chlazen vodou O pro chlazen nucen m ob hem vzduchu p ednastaven re im nastaven m s riov ho ovl dac ho p kazu WIN 106 Podrobn j informace najdete v p loze Technical Information Obsluha se mus ujistit o p prav spr vn ho zp sobu innosti s ohledem na erpan plyn WIN 157 1 pro N a leh plyny 0 pro argon p ednastaven re im nastaven m s riov ho ovl dac ho p kazu WIN 157 Podrobn j informace najdete v p loze Technical Information NEBEZPE Nenech vejte v v vu v innosti kdy vstupn p ruba nen p ipojena k vakuov komo e nebo kdy nen uzav ena uzav rac p rubou Nedot kejte se turbov v vy a jej ho p slu enstv b hem operac oh evu Vysok teplota by mohla zp sobit zran n osob Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 243 406 13 Navod k Pou it POZOR Zabra te narazum nebo prudkym posunum wyv wy b hem jeji innosti Mohlo by plyn zbaven prachu nebo stic Vstupn tlak prost ednictv m p slu n ho portu mus b t ni ne 2 bar mimo atmosf rick ho tlaku Pro erp n plyn s obsahem stic nebo agresivn ch zne i uj c ch l tek pro lo iska jsou tyto v v vy vybaveny p slu n m portem nebo specifick m vestav n m p slu enstv m pro proplachov n odvzdu ov n jeho prost ednictv m je t eba do v v vy dodat proud inertn h
17. 14 Navod na Obsluhu N vod na pou itie obsahuje tieto tandardn ozna enia 1 3 34J 4H 40 Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos nespr vne vykonanie ktor ch m e sp sobi v ne zranenie POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia Pozn mky upozor uju na d le it inform cie z textu 254 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Uchovavanie Ak chcete aby turbomolekularne vyvevy zna ky Agilent podavali maximalny a spolahlivy v kon dodr iavajte nasleduj ce pokyny neprekra ujte nasleduj ce pecifik cie prostredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 90 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy postupova pomaly a postupne a skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia spolo nosti Agilent pre predaj a servis Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 255 406 14 Navod na Obsluhu Priprava na in talaciu Zariadenie Turbo V 750 850 TwisTorr Pumping System sa dodava v
18. 87 901 020 01 A Instruksjon Manual 9 Hvordan stanse Turbo V 750 850 TwisTorr Pumping System For a stanse pumpen kan en av f lgende metoder benyttes 1 Veda fjerne motkoblingsstykket I O som f lger med 2 Ved sende et stoppsignal via fjerninnretning gjennom koblingsstykket I O se avsnittet JI REMOTE I O i vedlegget Technical Information 3 Ved sende et stoppsignal via fjerninnretning gjennom serialt grensesnitt RS 232 485 se avsnittet RS 232 485 Communication Description i vedlegget Technical Information For ivareta brukerens sikkerhet skal transformatoren 969 6521 til TV750 850 TwisTorr Pumping System str mf res med en tre tr ds matekabel se avsnittet ACCESSORIES AND SPARE PARTS i vedlegget Technical Information utstyrt med et st psel godkjent p internasjonalt niv Bruk denne kabelen og st psel sammen med en stikkontakt som er korrekt jordet for unng elektrisk st t samt etterkomme kravene i EU standardene H yspenningen som utvikles i kontrolleren kan for rsake alvorlige skader eller d dsfall F r det utf res vedlikeholdsinngrep inne i enheten koble fra matekabelen N dstopp F r stanse Turbo V 750 850 TwisTorr Pumping System ved n dstopp m matekabelen kobles fra str mtilf rselen Det m dog tas med i beregningen at dette inngrepet foruten koble ut pumpens str mtilf rsel fullstendig ogs kobler ut alle andre funksjoner for kontrolleren som for e
19. Bevestiging van de pomp 115 Gebruik van het Turbo V 750 850 TwisTorr Pumping System 117 Onderhoud 123 Afvalverwerking 124 7 Istruktionsbog 125 Sikkerhedsanvisninger for Molekyl re turbopumper 126 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 7 406 Contents 8 406 Generel Information 127 Opbevaring 129 Forberedelse far installation 130 Installation 132 Fastgorelse af pumpe 133 Brug af Turbo V 750 850 TwisTorr Pumping System 135 Vedligeholdelse 141 Bortskaffelse 142 Bruksanvisning 143 Sakerhetsanvisningar f r Molekylara turbopumpar144 Allman Information 145 F rvaring 147 F rberedelser f r installationen 148 Installation 150 Fasts ttning av pump 151 Anvandning av Turbo V 750 850 TwisTorr Pumping System 153 Underhall 158 Bortskaffning 159 Instruksjon Manual 161 Sikkerhetsanvisninger for Turbomolekylare pumper 162 Generell informasjon163 Lagring 165 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Contents Klargjgre til installasjon 166 Installasjon 168 Festing av pumpen 169 Bruk av Turbo V 750 850 TwisTorr Pumping System 171 Vedlikehold 176 Eliminering 177 10 Ohjek sikirja 179 Turbomolekyylipumppujen Turvaohjeet 180 Yleisi tietoja 181 Varastointi 183 Valmistelut asennusta varten184 Asennus 186 Pumpun kiinnitys 187 Turbo V 750 850 TwisTorr Pumping Systemin K ytt 189 Huolto 195 H vitt minen 196 11 Felhasznal i Kezik nyv 197 Biztonsagi tmutat Tur
20. CF 8 969 9335 Vibration isolator CF 10 969 9336 aa TOS i 5 A ue A JE Purge valve with 7 16 M12 10 SCCM 969 9240 1 O Purge valve 7 16 M12 20 SCCM 969 9242 TURBO V 750 850 TWISTORR PURGE VENT DEVICE 9 69 6502 e TURBO V 750 850 TWISTORR PURGE VENT 5 m EXTENSION CABLE 9 69 6504 a TURBO V 750 850 TWISTORR PURGE VENT 15 m EXTENSION 969 6505 398 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Description Part number CABLE ET E A CABLE TURBO V 750 850 AG RACK CNT 969 9525 TURBO V 750 850 AG RACK CNT PROFIBUS 969 9526 ROA m mn nn Forepump DS 302 with 1 ph universal motor 949 9325 Triscroll Dry Vacuum Pump PTS 300 single phase universal motor PTS03001UNIV Triscroll Dry Vacuum Pump PTS 300 3 phase universal motor PTS03003UNIV Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 399 406 17 Technical Information Accessories and Spare Parts 400 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Agilent Technologies Vacuum Products Division Dear Customer Thank you for purchasing an Agilent vacuum product At Agilent Vacuum Products Division we make every effort to ensure that you will be satisfied with the product and or service you have purchased As part of our Continuous Improvement effort we ask that you report to us any problem you may have had with the purchase or operation of our products On the back side you find a Corrective Ac
21. CFF 8 20 20 Nm CFF 10 24 20 Nm V v va Turbo V 750 850 TwisTorr Pumping system nesm b t p ipevn na prost ednictv m sv z kladny V v va Turbo V 750 850 TwisTorr Pumping System pat do druh kategorie nebo p ep t instalace ve smyslu sm rnice EN 61010 1 Prove te p ipojen za zen k nap jec mu p vodu tak aby spl ovalo po adavky pro uvedenou kategorii Pro zachov n t dy ochrany IP 54 pou ijte dodan konektory protikusy V v va Turbo V 750 850 TwisTorr Pumping System je vybavena konektory vstup v stup a s riov komunikace kter mus b t p ipojeny k extern m obvod m tak aby zabra ovaly p stupu k elektrick m stem Ujist te se e izolace za zen p ipojen ho k v v ve Turbo V 750 850 TwisTorr Pumping System je vhodn i pro p pad d l poruchy ve smyslu normy EN 61010 1 242 406 Pro instalaci voliteln ho p slu enstv si p e t te p lohu Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A N vod k Pou it 13 Pou it v v vy Turbo V 750 850 TwisTorr Pumping System V tomto odstavci jsou uvedeny z kladn provozn postupy P ed pou it m syst mu prove te v echna elektrick a pneumatick p ipojen B hem p padn ho oh evu vakuov komory nesm b t teplota na vstupn p rub vy ne 80 C Obsluha se mus ujistit o p prav spr vn ho zp sobu chlazen WIN 106
22. D 2 Z Z Z Cycle time in minutes zeroed by 0 to 999999 the reset command 301 R N Cycle number zeroed by the 0 to 999999 reset command 302 R N Pump life in hours zeroed by the 0 to 999999 reset command 310 to Reserved to Agilent service 400 R A CRC EPROM QE QE8XXXX where XXXX are variable 402 R A CRC Param PA PA8XXXX where XXXX are variables 404 R A CRC parameter structure XXXX 406 R A Program Listing code 8 revision XXXX 407 R A Parameter Listing code amp XXXX revision 500 to Reserved to Agilent service 503 R W RS 485 address 504 R W L Serial type select 0 RS 232 1 RS 485 default 0 366 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 7 6 5 4 3 2 1 0 TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP T bearing gt 60 C OVERVOLTAGE CONTROLL OVERTEMP T gt 65 C OUTPUT FAIL POWER FAIL V supply lt 43 Vdc Figure 57 Window N 206 Bit Description Soft Start Soft Start mode is provided to start the pump after a protracted stop of the Turbo V 750 850 TwisTorr Pumping System This allows a better grease distribution in the bearings The Soft Start mode is disabled by default To enable the Soft Start mode it must be activated by the suitable software or Remote I O com mand see the paragraphs INTERCONNECTIONS and RS 232 485 COMMUNICATION DE
23. Tab 3 FLANSCH ANZ ANZUGSMOMENT CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Das Turbo V 750 850 TwisTorr Pumping System kann nicht mittels seiner Basis befestigt werden VORSICHT Das Turbo V 750 850 TwisTorr Pumping System geh rt zur zweiten Kategorie oder Uberspannung der Installation nach der Richtlinie EN61010 1 Den Anschluss der Vorrichtung unter Einhaltung der Anforderungen dieser Kategorie ausf hren Die gelieferten Gegenstecker verwenden um den Schutzgrad IP 54 zu erhalten Das Turbo V 750 850 TwisTorr Pumping System ist mit Input Output Steckern und Steckern der seriellen Verbindung ausgestattet die an externe Kreisl ufe angeschlossen werden m ssen um die elektrischen Teile unzug nglich zu machen Sicherstellen dass die am Turbo V 750 850 TwisTorr Pumping System angeschlossene Vorrichtung eine geeignete Isolierung auch f r Einzelfehler besitzt wie in der Vorschrift EN 61010 1 vorgesehen ist 42 406 Fur die Installation der Optionsteile siehe im Anhang Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Nutzung des Turbo V 750 850 TwisTorr Pumping Systems In diesem Absatz sind die wichtigsten Arbeitsschritte beschrieben Bevor man das System verwendet alle elektrischen und pneumatischen Anschlisse ausfiihren Wahrend des eventuellen Erhitzens der Vakuumkammer darf die Temperatur auf dem Eingangsflansch die 80 C nicht berschreite
24. Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 299 406 16 Instructions for Use In order to maintain the IP 54 protection level you must use only the connectors provided with the pump Use connectors PN 969 9957 or 969 9958 for the power cable Use this cable and plug together with a properly grounded plug to prevent electric shocks and to comply with EC Standards How to Stop the Turbo V 750 850 TwisTorr Pumping System To stop the pump you can use one of the following methods 1 Unplugging the provided mating I O connector 2 Giving a remote stop signal through the I O connector see para J1 REMOTE I O of annex Technical Information 3 Givinga remote stop signal via the serial RS 232 485 interface see para RS232 RS 485 Communication Description of annex Technical Information WARNING The Turbo V 750 850 TwisTorr Pumping System Power Supply 969 6521 300 406 must be powered with 3 wire power cord see para ACCESSORIES AND SPARE PARTS in the annex Technical Information and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to satisfy CE reguirements High voltage developed in the controller can cause severe injury or death Before servicing the unit disconnect the input power cable Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16
25. U Figure 56 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 357 406 17 Technical Information RS 232 RS 485 Communication Description Both the RS 232 and the RS 485 interfaces are available on the connector P2 The communication protocol is the same see the structure below but only the RS 485 manages the address field Therefore to enable the RS 485 is necessary to select the type of communication as well as the device address by means of the T Plus software Communication Format 8 data bit a no parity 1 stop bit a baud rate 600 1200 2400 4800 9600 19200 38400 programmable default setting 9600 Communication Protocol The communication protocol is a MASTER SLAVE type where a Host MASTER Controller SLAVE The communication is performed in the following way 1 the host MASTER send a MESSAGE CRC to the controller SLAVE 2 the controller answer with an ANSWER CRC to the host The MESSAGE is a string with the following format lt STX gt lt ADDR gt lt WIN gt lt COM gt lt DATA gt lt ETX gt lt CRC gt where When a data is indicated between two quotes it means that the indicated data is the correspond ing A CII character 358 406 a lt STX gt Start of transmission 0x02 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 lt ADDR gt Unit address 0x80 for RS 232 lt ADDR gt Unit
26. Window Meanings section for details A third thermistor sensor is mounted inside the controller in order to monitor the internal board temperature the actual value can be read by WIN 216 If the thermistor reading exceeds 65 C the pump fails and stops with Error Code 4 WIN 206 See Window Meanings section for details During normal operation the motor is fed with a voltage of 27 Vac three phase at frequency minor or equals 825 Hz During operation the controller limits the power provided to the motor according to Gas type load selectable WIN 157 see the following Window Meanings paragraph Cooling mode selectable WIN 106 see the following Window Meanings paragraph Body temperature can be read by WIN 222 Electronics temperature can be read by WIN 216 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 WARNING The user must set the gas type load WIN 157 and the cooling mode WIN 106 before starting the pump For details on the applied power derate see the Output Power during High Temperature condition paragraph The applied power limit is readable by serial line WIN 155 The pump is balanced after assembly with residual vibration amplitude less than 0 01 um The pump can operate in any position and can be supported on the high vacuum flange The connection of the forevacuum on the side of the pump is a KF 25 flange KF40 for models 969 8819 a
27. culaires d crites dans le Manuel d Instructions suivant ont une nergie cin tique lev e due a la grande vitesse de rotation associ e a la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation pourrait tre lib r e AHSA AU Pour viter tout d g t aux appareillages et emp cher toute blessure aux op rateurs il faut suivre attentivement les instructions d installation d crites dans ce manuel 52 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 Indications generales Cet appareillage a t concu en vue d une utilisation professionnelle Avant toute utilisation de l appareil il est conseill l utilisateur de lire attentivement cette notice d instructions ainsi gue toute autre indication suppl mentaire fournie par Agilent qui d cline par cons quent toute responsabilit en cas de non respect total ou partiel des instructions donn es d utilisation impropre par un personnel non forme d op rations non autoris es ou d emploi contraire aux r glementations nationales specifigues Le Turbo V 750 850 TwisTorr Pumping System est un syst me int gr constitu d une pompe turbomol culaire concue pour des applications de vide pouss et ultrapouss et dot d un contr leur Le syst me est a meme de pomper tous les types de gaz et de compos s gazeux mais il n est pas
28. napajalnika 969 6521 3 v vakuumski komori vzpostavite tlak 0 1 mbar 4 za enite START sistem Turbo V 750 850 TwisTorr Pumping System na enega od naslednjih na inov a priklju ite prilo eni protikonektor I O b spro ite oddaljeni signal za zagon START preko konektorja I O oglejte si del J1 REMOTE I O v dodatku Technical Information c spro ite oddaljeni signal za zagon START preko serijskega vmesnika RS 232 485 oglejte si del RS 232 485 Communication Description v dodatku Technical Information Vgrajeni kontroler samodejno prepozna prisotnost signalov INTERLOCK in START in za ene rpalko Na in Soft Start je predviden za zagon rpalke po dalj em obdobju nedelovanja To omogo a optimalno distribucijo masti znotraj le ajev Za omogo enje na ina Soft Start je potrebna uporaba posebne programske opreme ali daljinskega ukaza I O oglejte si dela INTERCONNECTION in RS 232 485 COMMUNICATION DESCRIPTION v dodatku Technical Information Sistem je opremljen s signalom stanja z zeleno LED lu ko Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 281 406 15 Priro nik za Navodila Zelena LED lu ka name ena na prednji plo i podno ja sistema 750 850 TwisTorr Pumping System s pogostostjo utripanja ozna uje stanje delovanja sistema stalno sveti rpalka se normalno vrti po asi utripa pribli no 400 ms sistem je v ustavljanja in sicer zaviranja upo asnjevanja
29. 020 01 A Instruksjon Manual 9 Bruk av Turbo V 750 850 TwisTorr Pumping System I dette avsnittet gjengis hovedfremgangsmatene for drift F r systemet tas i bruk utfgre alle elektriske koblinger og trykkluft Under den eventuelle oppvarmingen av vakuumkammeret ma temperaturen pa inngangsflensen ikke v re hgyere enn 80 C Brukeren ma forsikre seg om at kjelemetoden er korrekt WIN 106 1 for nedkj ling med vann 0 for nedkj ling med tvungen luft default modus ved a stille inn serialkommandoen WIN 106 For ytterligere detaljer se vedlegget Technical Information Brukeren ma forsikre seg om at driftsmetoden pa grunnlag av typen gass som skal pumpes er korrekt WIN 157 1 for N og lettere gasser 0 for Argon default modus ved stille inn serialkommandoen WIN 157 For ytterligere detaljer se vedlegget Technical Information Sett aldri pumpen i drift hvis inngangsflensen ikke er tilkoblet vakuumkammeret eller ikke er lukket med lukkeflensen Ikke ta pa turbopumpen og dens eventuelle tilbeh r under oppvarmingsinngrepene Den h ye temperaturen kan medf re skader pa mennesker ista Unng st t svingninger eller br e forflytningen av pumpen mens den er i drift Kulelagrene kan g i stykker For luftmating til pumpen bruk luft eller uvirksom gass uten st v eller partikler Inngangstrykket gjennom den egnede d ren m v re mindre enn 2 bar forbi det atmosf riske trykket Ved pumping av gasser som inneholder
30. 2 x 108 2 5 x 106 gt 1 x 10 lt 1 x 10 10 mbar lt 1 x 10 19 Torr According to standard DIN 28 428 the base pressure is that measured in a leak free test dome 48 hours after the completion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump ISO 200 K CF 10 150200 F ISO 160 K CF 8 CF 6 rack version only ISO 160 F KF 25 KF40 for ISO 200 F inlet flange 49500 rpm lt 3 minutes with integrated controller DS 302 TriScroll 300 5 C to 45 C 80 C at inlet flange max Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Cooling requirements Coolant water Noise level Power supply Input for Turbo V 750 850 TwisTorr Pumping System Power Supply 969 6521 Input voltage Input freq Max input power Max operating power Power supply Input for Turbo V 750 850 TwisTorr Pumping System Input voltage Input freg Max input power Max output power International Protection of Pumping System Controller Pump 969 6521 Compliance with Power cable Serial communication T Plus kit Installation category Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Protection fuse for power supply system Immunity level for Industrial Application Technical Information 17 lt 0 01 um at inlet flange Permanent lubrication Forced air up to 35 C ambient temperature Water mandatory if ambi
31. 25 Turbo V 850 TwisTorr Pump CFF 10 969 6016 328 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline total vertical space required for pump connector elbow type insertion Figure 26 Turbo V 750 TwisTorr Pump CFF 6 969 6017 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 329 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline 4 80 D 4 15 1055 WATER COOLING 1 8 G 8 86 0225 total vertical space required for pump connector elbow type insertion Figure 27 Turbo V 750 TwisTorr Pump ISO 160 F 969 6018 330 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline 110 WATER COOLING 1 8 G total vertical space required for pump connector elbow type insertion Figure 28 Turbo V 850 TwisTorr Pump ISO 200 F 969 6019 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 331 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline Sj 6 38 WATER COOLING 1 8 G Turbo V 750 TwisTorr Pump ISO 160 K with mounted Fan and Figure 29 Purge Vent device accessories Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 332 406
32. 274 Monta a 276 Pritrjevanje rpalke 277 Uporaba sistema Turbo V 750 850 TwisTorr Pumping System 279 Vzdr evanje 284 Odlaganje opadkov 285 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 11 406 Contents 12 406 16 Instructions for Use 287 Safety Guideline for Turbomolecular Pumps 288 General Information 289 Storage 291 Preparation for Installation 292 Installation 294 Pump Fixing 295 Use of Turbo V 750 850 TwisTorr Pumping System 297 Maintenance 302 Disposal 303 17 Technical Information 305 Description of the Turbo V 750 850 TwisTorr 308 Technical Specification 316 Turbo V 750 850 TwisTorr Pumping System Outline 319 Output Power during High Temperature Condition 336 Interconnections 339 Auto Pump Speed Mode with Purge Vent Device Accessory Only 349 On Command Mode with Purge Vent Device Accessory Only 349 Auto Time Mode with Purge Vent Device Accessory Only 349 Stop Speed Reading 350 Serial Cable Installation 356 Procedure to Connect the Serial and 1 0 Ports to an External Cable 356 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Contents RS 232 RS 485 Communication Description 358 Soft Start 367 Leak Check Mode 368 Agilent T Plus 369 Inlet screen installation 372 Air Gooling Kit Installation 374 Water Cooling Kit Connection 379 Vibration Isolator Installation 382 Connection of the High Vacuum Flange 382 Connection of the Fore Vacuum Pump 386 Connection to
33. 48 V likestrams spenning gjennom en ekstern transformator 969 6521 3 Bring trykket inne i vakuumkammeret pa 0 1 mbar 4 Gi startsignalet til Turbo V 750 850 Twistorr Pumping System pa en av folgende mater a Koble til motkoblingsstykket I O som f lger med 172 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instruksjon Manual 9 b GI startsignalet via fjerninnretning gjennom koblingsstykket I O se avsnittet J1 REMOTE I O i vedlegget Technical Information c GI startsignalet via fjerninnretning gjennom serialt grensesnitt RS 232 485 se avsnittet RS 232 485 Communication Description i vedlegget Technical Information Den innebygde kontrolleren gjenkjenner automatisk om det oppst r signaler for INTERLOCK og START og starter pumpen Modusen Soft Start er forutsett for sl p pumpen etter lengre tids stillestans Dette gj r det mulig fordele fettet optimalt i kulelagrene For koble inn modusen Soft Start m den kobles inn ved hjelp av egnet programvare eller via fjerninnretning gjennom remote I O se avsnittetene INTERCONNECTION og RS 232 485 COMMUNICATION DESCRIPTION i vedlegget Technical Information Systemet er utstyrt med et statussignal med en gr nn lysemitterende diode Den gr nne lysemitterende dioden som er plassert p frontdekselet p grunndelen av 750 850 TwisTorr Pumping System angir gjennom hyppigheten av blinkingen dens systemets operative forhold
34. 5 C do 45 C wzgl dna wilgo O 90 bez opar W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information Turbo V 750 850 TwisTorr Pumping System musi by pod czony do g wnej pompy patrz schemat w Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 Mocowanie pompy ZAGROZENIE Nieprzestrzeganie niniejszych instrukcji dotycz cych instalacji w przypadku usterki wirnika mo e doprowadzi do od czenia si pompy od uk adu powoduj c powa ne szkody rzeczowe obra enia cielesne lub nawet mier Turbo V 750 850 TwisTorr Pumping System mo e by zainstalowana w dowolnym po o eniu Zamocowa Turbo V 750 850 TwisTorr Pumping System w pozycji stabilnej montuj c ko nierz wej cia turbopompy do ko nierza systemu dokr caj c w taki spos b aby po czenie to wytrzyma o moment 8000 Nm wok w asnej osi Ko nierz ISO K mo e by przymocowany z wykorzystaniem zacisk w ze stali o wysokiej wytrzyma o ci typu model Agilent IC 63250 DCM2 Poni sza tabela podaje dla ka dego rozmiaru ko nierza ilo koniecznych zacisk w IC63250DCMZ oraz moment dokr cania potrzebny do ich zaci ni cia Tab 1 KO NIERZ Nr MOMENT DOKR CENIA ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Poni sza tabe
35. A 81 406 4 Manual de istrucciones iADVERTENCIA La modalidad Soft Start est prevista para poner en funcionamiento la bomba despu s de un periodo de detenci n prolongado Esto permite una ptima distribuci n de la grasa en los cojinetes Para habilitar la modalidad Soft Start es necesario activarla mediante el software correspondiente o un mando de E S a distancia consultar los apartados INTERCONNECTION y RS 232 485 COMMUNICATION DESCRIPTION en el anexo Technical Information El sistema est provisto de una se al de estado con un led verde El LED verde ubicado en el panel frontal de la base del 750 850 TwisTorr Pumping System indica con la frecuencia de su parpadeo las condiciones operativas del sistema encendido fijo la bomba gira normalmente parpadeo lento periodo de aproximadamente 400 ms el sistema se encuentra en estado de rampa de frenada de Stop o de Waiting for interlock parpadeo r pido per odo de aproximadamente 200 ms condici n de error Cuando se suministra la alimentaci n y el contraconector de 15 pines en dotaci n est conectado el Turbo V 750 850 TwisTorr Pumping System se pone en funcionamiento autom ticamente ATENCI N El controlador se suministra ya conectado mec nica y el ctricamente a la bomba La desconexi n del controlador del cuerpo de la bomba s lo puede ser realizada por personal autorizado por Agilent Vacuum Technologies
36. Agilent Technologies 107 406 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt kan de rotatie energie vrijkomen VNG EIS TIN Om schade aan de apparatuur en letsel bij de bedieners te voorkomen moeten de installatie instructies in deze handleiding nauwgezet worden opgevolgd 108 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Algemene informatie Deze apparatuur is bestemd voor beroepsmatig gebruik De gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Agilent verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen Agilent acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen onoordeelkundig gebruik door niet hiervoor opgeleid personeel reparaties waarvoor geen toestemming is verkregen of gebruik in strijd met de specifieke nationale wetgeving Het Turbo V 750 850 TwisTorr Pumping System is een geintegreerd systeem dat uit een turbomoleculaire pomp voor hoge en ultrahoge vacuiimtoepassingen plus bijbehorende controller bestaat Het systeem is in
37. Controller PNP 5 Vdc JAK 24 Vdc Controller 5 Vde Cc TE NPN TT Figure 52 Case 2 with transistor utilisation Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 353 406 17 Technical Information How to Connect the Outputs of the Controller The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The following figure refers to the programmable set point signal on pins 11 and 9 PI JI Controller As 0 45 08 1 a 9 24 V 2 Og 4 Figure 53 Typical output connection The following figure shows a typical output connection to a relay coil ELAY 81812 Figure 54 Output to a relay coil 354 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 J2 Serial Figure 55 This is a 9 pin D type serial input output connector to control via an RS 232 or RS 485 connection the Turbo V 750 850 TwisTorr Pumping System Tab 6 PIN N SIGNAL NAME 5V OUT TX RS232 M s K A RS422 optional 1 2 5 6 A serial communication kit with a serial cable and the T Plus software 969 9883 is available optional Turbo V 750 850 TwisTorr User Manual 87 901
38. Emergency Stop To immediately stop the Turbo V 750 850 TwisTorr Pumping System in an emergency condition it is necessary to remove the supply cable from the mains plug It must be however noted that this operation in addition to cutting off the pump power also cuts off all other controller functions such as Purge and Controlled Vent management and the capability of communicating with the system in which the pump is integrated via I Os Serial or Profibus Furthermore this operation may not ensure the immediate stopping of the rotor Rotation speed of the rotor will decrease according to the degree of vacuum present in the system Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 301 406 16 Instructions for Use Maintenance The Turbo V 750 850 TwisTorr Pumping System does not require any maintenance Any work performed on the system must be carried out by authorized personnel Before carrying out any work on the system disconnect it from the mains vent the pump by opening the appropriate valve wait until the rotor has stopped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown its possible benefits to the Agilent repair service or Agilent advanced exchange service that can supply a reconditioned system to replace that broken down Before returning the system to the constructor for repairs or replacement with a reconditioned unit the Health and Safet
39. ON when a system fault condition is detected ON Output Voltage lt 1 V OFF Output Voltage 24 V Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 345 406 17 Technical Information OUTPUTS CONFIGURATION OPEN COLLECTOR EA LOAD Figure 46 PROGRAMMABLE SET POINT this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vde when activated or low level active that is the output is normally at 24 Vdc and becomes 0 Vdc when activated Moreover if the reference quantity is the frequency or the current drawn it is possible to set the hysteresis in of the threshold value to avoid bouncing For example reference quantity frequency threshold 500 Hz a hysteresis 1 activation type high level 346 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 N A Set point output Vdc 495 500 595 Frequency Hz Figure 47 The set point output stays at 0 Vdc until the frequency becomes higher than 505 Hz that is 500 Hz 1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency becomes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programmable delay time Th
40. Ohjekasikirja Hatapysaytys Turbo V 750 850 TwisTorr Pumping Systemin pys ytt miseksi h t tilassa virtajohto tulee kytke irti virransy t sta On kuitenkin pidett v mieless ett pumpun deaktivoimisen lis ksi t m toimenpide 3399kytkee pois my s kaikki muut controllerin toiminnot kuten esimerkiksi Purge ja valvottu Vent sek mahdollisuuden kommunikoida j rjestelm n kanssa johon pumppu on liitetty I Os n sarjaliit nn n tai Profi busin kautta T m toimenpide ei voi kuitenkaan taata roottorin v lit nt pys htymist jonka nopeus pienenee suhteessa j rjestelm n sis iseen tyhji asteeseen 194 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Huolto Ohjekasikirja 10 Turbo V 750 850 TwisTorr Pumping System ei vaadi lainkaan huoltoa Mahdolliset toimenpiteet tulee jattaa valtuutetun henkil n tehtavaksi VAROITUS Ennen mink n tyyppist toimenpidett j rjestelm ss kytkek se irti s hk verkosta p st k pumppuun ilmaa avaamalla siihen tarkoitettu venttiili ja odottakaa roottorin taydellista pys htymist Antakaa t m n j lkeen pumpun pintalimm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle Ennen j rjestelm n l hett mist valmistajalle korjausta tai vaihtopalvelua varten on ehdotto
41. Para parar a bomba possivel utilizar um dos seguintes m todos 1 retirar o conta conector I O fornecido com o equipamento 2 enviar um sinal de STOP dist ncia mediante o conector I O ver o par grafo J1 REMOTE I O no ap ndice Technical Information 3 enviar um sinal de STOP dist ncia mediante a interface serial RS 232 485 ver o paragrafo RS 232 485 Communication Description no ap ndice Technical Information Para a seguranca do operador o Alimentador 969 6521 do TV750 850 TwisTorr Pumping System deve ser alimentado com um cabo de alimentacao de 3 fios ver paragrafo ACCESSORIES AND SPARE PARTS no ap ndice Technical Information eguipado com uma ficha aprovada a nivel internacional Utilizar este cabo e ficha junto com uma tomada com ligac o a terra adeguada para evitar descargas el ctricas e satisfazer os requisitos das normas CE As outras tens es desenvolvidas no controller podem provocar graves les es ou at mesmo a morte Antes de realizar as operac es de manutenc o no interior da unidade desconectar o cabo de alimentacao Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 103 406 5 Manual de Istru es 104 406 Paragem de Emergencia Para parar imediatamente o Turbo V 750 850 TwisTorr Pumping System em condi es de emerg ncia necessario desconectar o cabo de alimentac o da rede No entanto necessario considerar que esta operacao al m de desabilitar completam
42. Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 65 406 3 Mode d emploi Arret d urgence Pour arr ter le Turbo V 750 850 TwisTorr Pumping System en urgence d branchez le cable d alimentation de I alimentation Rappelons que cette op ration interrompt totalement l alimentation lectrique de la pompe et d sactive toutes les fonctions du contr leur telles que la gestion de la purge et de l vent et la capacit de communiquer avec le syst me dans lequel la pompe a t int gr e via les ports d E S s rie ou Profibus En outre cette op ration ne peut pas garantir l arr t imm diat du rotor dont la vitesse de rotation diminuera en fonction du niveau de vide dans le syst me 66 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Entretien Mode d emploi 3 Le Turbo V 750 850 TwisTorr Pumping System n exige aucun entretien particulier Toute intervention doit tre effectu e par un personnel agr AVERTISSEMENT Avant toute intervention sur le syst me le d brancher refouler l air de la pompe en ouvrant la soupape pr vue cet effet attendre jusqu l arr t complet du rotor et jusqu ce que la temp rature superficielle de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me endommag Avant de renvoy
43. a rotor failure which could cause property damage or serious injury or death The Turbo V 750 850 TwisTorr Pumping System can be installed in any position Fix the Turbo V 750 850 TwisTorr Pumping System in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connec tion capable of withstanding a torgue of 8000 Nm around its axis The ISO K flange can be fixed using high strength steel clamps like Agilent model IC63250DCMZ The following table shows for each flange the necessary number of IC63250DCMZ clamps and the relevant fixing torque Tab 1 FLANGE N FIXING TOROUE ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm The following table shows for each ISO F flange the necessary number of steel bolts and the relevant fixing torgue as recommended by Agilent Tab 2 FLANGE BOLT SIZE N FIXING TOROUE ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm The strength class of the steel screws for F flange must be 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 295 406 16 Instructions for Use The following table shows for each CF flange the necessary number of screws and the relevant fixing torque as recommended by Agilent Please use the appropriate Agilent hardware See the appendix Technical Information for a detailed description Tab 3 FLANGE N FIXING TORQUE CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm The Turbo V 750 850 TwisTorr Pu
44. accurately positioned by spacer rings The TwisTorr stators are in the form of selfpositioning machined discs On each disc there are parallel spiral pumping channels designed to pump in centrifugal direction on one side and in centripetal directions on the other side These are made of aluminium alloy Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 313 406 17 Technical Information WARNING The pump must always be cooled before starting using it Running the pump 314 406 without cooling it could damage inside components The pump can be cooled by water or by forced air in the first case the customer can use the dedicated stainless steel channel on the pump body in the second case an external optional fan 48 Vdc is available model 969 6503 A first thermistor sensor is mounted near the upper bearing in order to read the bearing temperature and to prevent the pump from overheating the actual value can be read by WIN 204 If the thermistor reading exceeds 60 C the pump fails and stops with Error Code 2 WIN 206 If the thermistor reading is below 0 C the pump fails and stops with Error Code 1 WIN 206 See Window Meanings section for details A second thermistor sensor is mounted near the water cooling channel in order to evaluate the wa ter cooling efficiency the actual value can be read by WIN 222 If the thermistor reading exceeds 55 C the pump fails and stops with Error Code 2 WIN 206 See
45. and sampling period Select Data 16 Hours from now in sample of 10 minutes m 3 Download and anaylze pump data Connected to Turbo 750 850 AG Ready to download Base User Figure 60 370 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 In this screen the user would Select the pump data download file This file could be a new or an existing file When any file is selected Start Download button will be enabled If an exiting file is selected Start Download and Show Graph buttons will be enabled Select the pump data download period and appropriate sample time The max data download period is limited to 16 hours edit field having default value 16 and fixed sample time of 10 minutes only a Initiate download by pressing the Start Download button which would be enabled after selecting a file When the user clicks on this button the input data would be validated and the download would begin During the download process the Start Download button would read Abort Downloading This could be used to abort the data download midway Click the Graph Button This button would be enabled when the file download is complete and or the destination file specified is present on the computer Clicking this button would in voke the Graph control and the trend for the entire data for that period would be plotted in the Graph Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 37
46. aplikace kde se po aduje vysok a ultravysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic erp n zaji uje velmi rychl turb na max 49500 ot min poh n n vysoce v konn m trojf zov m elektromotorem V v va Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou neobsahuje dn kontaminuj c l tky a proto se hod pro aplikace vy aduj c ist vakuum D le je vybavena pomocn mi konektory pro p ipojen p davn ho ventil toru ovl d n p davn proplachovac odvzdu ovac jednotky a jej zen na d lku prost ednictv m hostitelsk ho po ta e p ipojen ho s riovou linkou RS232 nebo RS485 N sleduj c odstavce obsahuj informace pot ebn k zaji t n bezpe nosti obsluhy p i pou v n t to v v vy Podrobn informace jsou uvedeny v p loze Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 235 406 13 Navod k Pou it Tento manual pou iva nasledujici standardni protokol 313241818 Nebezpe hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo innosti kter by v p pad nedodr en mohly zp sobit v n raz POZOR Pozor hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen Pozn mky obsahuj d le it informace p evzat
47. avoided because it may cause uncontrolled venting A too rapid slow down of the rotor may seriously dam age the pump and void the pump warranty Please use the integrated purge vent device ac cessory 969 6502 and Agilent Controlled Vent Procedure or contact Agilent Venting Procedure with Contaminants and or Gorrosive Gases With Purge Vent Device Accessory 1 Close the process gases flowing into the sys tem before sending the STOP signal to the Turbo V 750 850 TwisTorr Pumping System Leaving the Turbo V 750 850 TwisTorr Pump ing System and the backing pump running and the purge gas flowing wait for enough time to evacuate the process gases from the system e g to reach the typical basic process pressure Then close the gate valve connecting the Tur bo pump to the chamber if present and the valve connecting the Turbo pump to the rough pump if present Turn off the Turbo pump by sending the STOP signal to the controller The Turbo V 750 850 TwisTorr Pumping Sys tem will automatically start the Auto Pump Speed mode by default This means that the integrated vent valve will allow a flow of vent ing gas e g Nitrogen automatically actuated by the controller in order to slow the rotor down in controlled manner to a rotational fre quency of 100 Hz by adopting the SSR Stop Speed Reading function All other system op erations e g opening of the additional system vent valve should be carried out at rotation
48. ce c ble et la fiche avec une prise de courant branch e terre pour viter les d charges lectriques et satisfaire les prescriptions des normes CE 64 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 Comment arreter le Turbo V 750 850 TwisTorr Pumping System Pour arr ter la pompe proc dez selon une des modalit s suivantes 1 retirez le contre connecteur d E S fourni 2 envoyez un signal de STOP depuis un dispositif de commande distant a travers le connecteur d E S cf paragraphe J1 REMOTE I O a l annexe Technical Information 3 envoyez un signal de STOP depuis un dispositif de commande distant travers l interface s rie RS 232 485 cf paragraphe RS 232 485 Communication Description l annexe Technical Information Pour la s curit des op rateurs l alimentation 969 6521 du TV750 850 TwisTorr Pumping System doit tre raccord e avec un c ble lectrique 3 fils cf paragraphe ACCESSORIES AND SPARE PARTS l annexe Technical Information muni d une prise approuv e au niveau international Branchez ce c ble dans une prise raccord e la terre afin de pr venir les d charges lectriques et respecter les normes CE Les hautes tensions g n r es l int rieur du contr leur peuvent provoquer de graves l sions ou la mort Avant de proc der aux op rations de maintenance l int rieur de l appareil d branchez le c ble d alimentation
49. destru da proceder sua eliminac o respeitando as normas nacionais espec ficas Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 105 406 5 Manual de Istruc es Eliminacao Significado do log tipo WEEE presente nos r tulos O simbolo abaixo indicado aplicado de acordo com a directiva CE denominada WEEE Este simbolo valido apenas para os pa ses da Comunidade Europeia indica gue o produto no gual esta aplicado NAO deve ser eliminado juntamente com os residuos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o utilizador final a contactar o fornecedor do dispositivo seja este o fabricante ou um revendedor para encaminhar o processo de recolha e eliminac o apos a oportuna verifica o dos termos e condic es do contrato de venda X ana NTT 4 NA N J S N OY 106 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 6 Bedrijfshandleiding Veiligheidsinstructies voor Turbomoleculaire pompen 108 Algemene informatie 109 Opslag 111 Uitpakken 112 Installatie 114 Bevestiging van de pomp 115 Gebruik van het Turbo V 750 850 TwisTorr Pumping System 117 Inschakelen van het Turbo V 750 850 TwisTorr Pumping System 119 Uitschakelen van het Turbo V 750 850 TwisTorr Pumping System 121 Noodstop 122 Onderhoud 123 Afvalverwerking 124 Vertaling van de originele instructies e
50. di gas esplosivi La pompa progettata per avere un alto trasferimento di Azoto Argon e gas pi leggeri Nel caso in cui ci fosse la necessit di pompare gas pi pesanti dell Argon si prega di prendere contatti con l Assistenza Tecnica della Agilent per informazioni Come avviare il Turbo V 750 850 TwisTorr Pumping System Prima dell avvio del sistema controllare che il controconnettore I O sia rimosso Se il sistema collegato ad un dispositivo di I O remoto assicurarsi che il segnale di STOP sia attivo vedere il paragrafo J1 REMOTE I O nell appendice Technical Information Per avviare il sistema eseguire i seguenti passi 1 rimuovere se presente il controconnettore I O di sistema 2 per accendere il Turbo V 750 850 TwisTorr Pumping System necessario fornire una tensione a 48 Vcc mediante un Alimentatore esterno 969 6521 3 portare la pressione all interno della camera a vuoto a 0 1 mbar 4 fornire al Turbo V 750 850 TwisTorr Pumping System il segnale di START in uno dei seguenti modi a collegare il controconnettore I O in dotazione b dare il segnale di START da remoto tramite il connettore I O vedere il paragrafo J1 REMOTE I O nell appendice Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 c dare il segnale di START da remoto tramite l interfaccia seriale RS 232 485 vedere il paragrafo RS 232 485 Communication Description nell app
51. ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastointiaika on 10 kuukautta toimitusp iv st Jos varastointiaika on jostain syyst pidempi pumppu tulee palauttaa tehtaalle Pyyd lis tietoja paikalliselta Agilent edustajalta Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 183 406 10 Ohjekasikirja Valmistelut asennusta varten Turbo V 750 850 TwisTorr Pumping System toimitetaan erityisess suojapakkauksessa mik li siina on mahdollisesti kuljetuksen aikana tapahtuneita vaurioita ottakaa yhteys paikalliseen myyntitoimistoon Pakkauksen purkamisen aikana tulee varoa erityisesti Turbo V 750 850 TwisTorr Pumping Systemin putoamista tai siihen kohdistuvia iskuja tai t rin it VAROITUS Jotkut mallit painavat yli 18 Kg mallit 969 8814 969 8816 969 6014 969 6016 969 6017 N iss tapauksissa pumppua tulee k sitell sopivien nostolaitteiden avulla tai v hint n kahden henkil n toimesta Pakkausta ei tule j tt ymparist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa ymp rist n suojeluun liittyvaa EY direktiivia 94 62 EY ja seuraavia muutoksia Jotta kaasun vuoto ongelmilta v ltytt isiin ei tyhji lle altistuviin osiin tule koskea paljain kasin K ytt k aina kasineita tai muuta sopivaa suojau
52. following Window Meanings paragraph Body temperature can be read by WIN 222 Electronics temperature can be read by WIN 216 WARNING The user must set the gas type load WIN 157 and Cooling mode WIN 106 before starting the pump For details on the applied power derate see the following figures The applied power limit is readable by serial line WIN 155 If the body temperature exceed 55 C or the Controller temperature exceed 65 C the controller goes in status 6 Fail 336 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 17 Technical Information NITROGEN Forced Air Cooling 250 200 E E 150 a 3 100 lt 50 N PETIT o 5 10 15 20 25 30 35 40 45 50 55 60 65 70 CPU Temperature C BODY Temperature C Figure 34 Applied Power Limit for Nitrogen or lighter gases and Forced Air Cooling BLUE line integrated controller RED line rack controller ARGON Forced Air Cooling 250 200 E 3 1507 5 a 1007 8 lt 50 I I I 0 7 7 7 7 T 7 7 7 T f 0 5 10 15 20 25 30 35 40 45 50 55 60 BODY Temperature C Figure 35 Applied Power Limit for Argon and Forced Air Cooling Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 337 406 17 Technical Information Applied Power Limit W Figure 36 NITROGEN Water Cooling 350 300 gt 250 gt 200 gt 150 gt 100
53. gt 50 O koria eee rata 0 5 10 15 20 25 30 35 40 45 50 55 60 BODY Temperature C Applied Power Limit for Nitrogen or lighter gases and Water Cooling ARGON Water Cooling 250 s 9 E o 3 150 I 5 I l y 100 gt 2 a I lt lt 50 I I o HR 1 0 5 10 15 20 25 30 35 40 45 50 55 60 BODY Temperature C Figure 37 338 406 Applied Power Limit for Argon and Water Cooling Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Interconnections Technical Information 17 The following figure shows the Turbo V 750 850 TwisTorr Pumping System interconnections fe C VACUUM TECHNOLOGIES 2 Earth Ground P2 Fan E Atila JI Input Output LED Status PI Purge Vent A mutOunu TED Status J2 Serial Line Output Power Supply Figure 38 Earth Ground Connection We recommend that you fit a separate earth ground conductor to the Turbo V 750 850 TwisTorr Pumping System Use a separate insu lated green yellow conductor and use a M5 x 10 screw and shake proof washer fitted to the earth hole on the pump to secure the earth conductor to the pump The screw must be fixed with a 2 Nm torque The impedance between the
54. high vacuum flange The Turbo V 850 TwisTorr Pumping System models are Model 969 8815 with ISO 200 K high vacuum flange Model 969 8816 with ConFlat 10 high vacuum flange Model 969 8819 with ISO 200 F high vacuum flange and KF40 foreline flange The following figure shows the six models Figure 3 Model 969 8813 308 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 laerrintinn nf tha Turh V TEN QF TwuieTarr Description of the Turbo V 750 850 TwisTorr Figure 4 Model 969 8814 Figure 5 Model 969 8815 Figure 6 Model 969 8816 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 309 406 17 Technical Information 310 406 Figure 7 Model 969 8818 Figure 8 Model 969 8819 The pumps only are available with the following seven models 1 Turbo V 750 TwisTorr pump Model 969 6013 with ISO 160 K high vacuum flange Model 969 6014 with ConFlat 8 high vacuum flange Model 969 6017 with ConFlat 6 high vacuum flange Model 969 6018 with ISO 160 F high vacuum flange Turbo V 850 TwisTorr pump Model 969 6015 with ISO 200 K high vacuum flange Model 969 6016 with ConFlat 10 high vacuum flange Model 969 6019 with ISO 200 F high vacuum flange and KF40 foreline flange Turbo V 750 850 Twis
55. interlock lampejante r pido periodo de aproximadamente 200 ms condi o de erro Ouando fornecida alimentac o e o contra conector de 15 vias fornecido com o eguipamento est conectado o Turbo V 750 850 TwisTorr Pumping System arranca automaticamente O controller fornecido com todas as ligac es mec nicas e as conex es el ctricas com a bomba j instaladas O controller pode ser separado do corpo da bomba exclusivamente por pessoal autorizado pela Agilent Vacuum Techmologies Quando o Turbo V 750 850 TwisTorr Pumping System arrancado apos um periodo de pausa prolongada antes de arrancar o sistema deve se activar a func o especial SOFT START O sistema arrancado em passos sucessivos ate a velocidade total em um tempo de aproximadamente 35 minutos Depois gue o sistema atingir a velocidade total o procedimento de soft start pode ser desabilitado e os arrangues posteriores podem ser realizados no modo normal Para manter o nivel de protecc o IP 54 utilizar exclusivamente os conectores fornecidos com a bomba Para o cabo de alimentac o utilizar somente os PN 969 9957 ou 969 9958 Utilizar este cabo e ficha junto com uma tomada com ligac o a terra adeguada para evitar descargas el ctricas e satisfazer os reguisitos das normas CE 102 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Como parar o Turbo V 750 850 TwisTorr Pumping System ATENCAO
56. must be activated by the suitable software or Remote I O command see the paragraphs INTERCONNECTIONS and RS 232 485 COMMUNICATION DESCRIPTION in the appendix Technical Information The system is provided with a green status led signal The green LED located on the Turbo V 750 850 TwisTorr Pumping System base front panel indicates with its flashing frequency the system operating conditions with no flashing the pump is normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition When power is supplied and factory default 15 pin mating connector is inserted the Turbo V 750 850 TwisTorr Pumping System will start automatically The controller is furnished already mechanically and electrically connected to the pump Detaching of the controller from the pump must be carried out by authorized Agilent Vacuum Technologies personnel only When you run the Turbo V 750 850 TwisTorr Pumping System after a protracted stop the special SOFT START function must be activated before starting the pump see the annex Technical Information The system is launched step by step at full speed in a time of about 35 minutes After the system has reached the full speed the soft start procedure can be disabled and the following starts can be performed in the normal way
57. na vstupnej prirube vy ia ako 80 C Obsluha sa mus uisti o pr prave spr vneho sp sobu chladenia WIN 106 1 pre chladenie vodou 0 pre chladenie nutenym obehom vzduchu prednastaven re im nastaven m s riov ho ovl dacieho pr kazu WIN 106 Podrobnej ie inform cie n jdete v pr lohe Technical Information Obsluha sa mus uisti o pr prave spr vneho sp sobu innosti s oh adom na erpan plyn WIN 157 1 pre N a ah ie plyny O pre arg n prednastaven re im nastaven m s riov ho ovl dacieho pr kazu WIN 157 Podrobnej inform cie n jdete v pr lohe Technical Information NEBEZPE E Nenech vajte v vevu v innosti ak vstupn priruba nie je pripojen k v kuovej komore alebo ke nie je uzatvoren uzatv racou prirubou Nedotykajte sa turbov vevy a jej prislu enstva po as ohrevu Vysok teplota by mohla sp sobi zranenia os b Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 261 406 14 Navod na Obsluhu POZOR Zabr te narazom alebo prudk m posunom v vevy po as jej innosti Mohlo by d js k po kodeniu lo sk Pre zavzdu nenie v vevy pou ite vzduch alebo inertn plyn zbaven prachu alebo astic Vstupn tlak prostrednictvom prislusn ho obsahom ast c alebo agresivnych zne istujucich latok pre lo iska s tieto v vevy vybaven prislu nym portom alebo pecifick m vstaven m prislu enstvom pre preplachovanie odvzdu
58. number e Units returned for evaluation will be evaluated and a quote for repair will be issued If you choose to have the unit repaired the cost of the evaluation will be deducted from the final repair pricing A Purchase Order for the final repair price should be issued within 3 weeks of quotation date Units without a Purchase Order for repair will be returned to the customer and the evaluation fee will be invoiced e A Special Cleaning fee will apply to all exposed products per Section 4 of this document e If requesting a calibration service units must be functionally capable of being calibrated Pg 3 3 United States Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 Benelux Agilent Technologies Netherlands B V Vacuum Products Division Herculesweg 8 4338 PL Middelburg The Netherlands Tel 31 118 671570 Fax 31 118 671569 Toll Free 00 800 234 234 00 Canada Central coordination through Agilent Technologies Vacuum Products Division 121 Hartwell Avenue Lexington MA 02421 USA Tel 1 781 861 7200 Fax 1 781 860 5437 Toll Free 1 800 882 7426 China Agilent Technologies China Co Ltd Vacuum Products Division No 3 Wang Jing Bei Lu Chao Yang District Beijing 100102 China Tel 86 10 6439 7718 Toll Free 800 820 6556 France Agilent Technologies France Vacuum Products
59. of the Fore Vacuum Pump 386 Connection to the Pump 387 Pump used with Corrosive Gases Pump Purging 388 Purging the Pump through the Standard Purge Port Purge Valve Installation 388 Purging the Pump through the Integrated Purge Vent Device Accessory Purge Vent Device Installation 390 Venting the Turbo V 750 850 TwisTorr Pumping System 393 Venting Procedure without Contaminants and or Corrosive Gases Manually Venting 393 Venting procedure with Contaminants and or Corrosiv Gases Without Purge Vent Device Accessory394 Venting Procedure with Contaminants and or Corrosiv Gases With Purge Vent Device Accessory 395 Pump used in Presence of Magnetic Fields 397 Accessories and Spare Parts 398 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 307 406 17 Technical Information Description of the Turbo V 750 850 TwisTorr The Turbo V 750 850 TwisTorr is a turbomolecular pump available both as a stand alone pump driven with the dedicated rack controller and as a pumping system The pumping system consists of a pump with a dedicated integrated controller The system is available in three models for Turbo V 750 TwisTorr and three models for TV 850 TwisTorr The models of each group differ in the high vacuum flange The Turbo V 750 TwisTorr Pumping System models are Model 969 8813 with ISO 160 K high vacuum flange Model 969 8814 with ConFlat 8 high vacuum flange Model 969 8818 with ISO 160 F
60. ovanie prostrednictvom ktor ho je potrebn v veve doda pr d inertn ho plynu dus k h lium alebo arg n pre ochranu lo sk vi pr loha Technical Information POZOR Nikdy nepou vajte v vevu v pre koroz vne plyne alebo v pary ktor by mohli po kodi materi ly pou it vo vn tri v vevy Pri pou it v vevy pre erpanie toxick ch hor av ch alebo r dioakt vnych plynov dodr ujte pr slu n postup pre ka d druh plynu Nepou vajte v vevu za pr tomnosti v bu n ch plynov V veva bola navrhnut pre erpanie dus ka arg nu a ahk ch plynov V pr pade ak bude chcie erpa plyny a ie ako arg n bude potrebn po iada o inform cie Servisn slu bu firmy Agilent 262 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Sp sob uvedenia zariadenia Turbo V 750 850 TwisTorr Pumping system do innosti Pred uveden m syst mu do innosti skontrolujte i je odpojen konektor protikus I O Ked je system pripojeny k zariadeniu I O z dia kov ho ovl dacieho miesta uistite sa e signal STOP je akt vny vi odsek J1 REMOTE 1 0 v pr lohe Technical Information Uvedenie syst mu do innosti sa vykon va pod a nasleduj ceho postupu 1 odpojte ak je s as ou konektor protikus I O syst mu 2 pre zapnutie zariadenia Turbo V 750 850 TwisTorr Pumping System je potrebn doda nap tie 48 V prostredn ctvom ex
61. personer FORSIGTIG Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder direktivet 94 62 EF og efterf lgende ndringer om milj beskyttelse Komponenter der skal uds ttes for vakuum m ikke ber res med bare h nder idet der er risiko for afgasning Anvend altid handsker eller anden lignende beskyttelse Normal atmosf risk p virkning kan ikke skade Turbo V 750 850 TwisTorr Pumping System Det anbefales dog at opbevare pumpen i en lukket kasse indtil den skal installeres Herved forhindres at der kommer st v i pumpen 130 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 Turbo 0 850 TwisTorr Pumpin fem C POWER SUPPLY 6521 Figur 1 Emballagen for Turbo V 750 850 TwisTorr Pumping System indeholder 1 Pumpe med indbygget kontroller 2 Indgangsskarm monteret 3 Denne instruktionsmanual p cd rom 4 Kasse med tilbeh r a Modstik med 15 stikben REMOTE I O IP 54 med den alle de n dvendige stikforbindelser til at starte pumpen indbygget b Modstik med 9 stikben SERIAL IP 54 som skal udvendes til den serielle tilslutning Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 131 406 7 Istruktionsbog Installation Mill Tapen og beskyttelsesproppen fjernes f rst n r turbopumpen tilsluttes systemet 132 406 Figur 2 Dette apparat m kun installeres i lukkede omgivelser og m under inge
62. por agua 0 para arrefecimento por ar forcado modo de default programando o comando serial WIN 106 Para mais detalhes ver o ap ndice Technical Information O operador deve certificar se de predispor o modo de funcionamento correcto em func o do gas a bombear WIN 157 1 para N e gases mais ligeiros 0 para Argon modo de default programando o comando serial WIN 157 Para mais detalhes ver o ap ndice Technical Information ATENCAO Nunca colocar a bomba em funcionamento se a flange de entrada n o estiver conectada a c mara de v cuo ou n o estiver fechada com a flange de fechamento Nao tocar a turbobomba e os seus eventuais acess rios durante as operac es de aquecimento A temperatura elevada pode causar les es as pessoas Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 99 406 5 Manual de Istruc es Evitar golpes oscilac es ou deslocamentos bruscos da bomba quando a mesma estiver em funcionamento Os rolamentos poderiam danificar se Para o envio de ar da bomba utilizar ar ou gas inerte sem poeiras ou particulas A press o de entrada pela porta adequada deve ser inferior a 2 bar al m da press o atmosf rica Para a bombagem de gas com particulas ou poluentes agressivos para os rolamentos estas bombas s o equipadas com uma porta adequada ou um acess rio dispositivo de purge vent especifico integrado atrav s da gual necessario fornecer a bomba um fluxo de gas inerte Nitrog nio H
63. poruchy rotora sp sobi oddelenie v vevy od syst mu a sp sobi kody v ne zranenia alebo smi Zariadenie Turbo V 750 850 TwisTorr Pumping System m e by nain talovan v ubovo nej polohe Upevnite zariadenie Turbo V 750 850 TwisTorr Pumping System do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k protipr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8000 Nm okolo vlastnej osi Pr ruba ISO K m e by pripevnen pomocou svoriek z vysoko odolnej ocele typ model Agilent IC 63250 DCMZ Nasleduj ca tabu ka popisuje pre ka d rozmer pr ruby potrebn po et svoriek IC63250DCMZ a pr slu n u ahovac moment Tab 1 pr ruba PO ET STANOVEN TO IV MOMENT ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Nasleduj ca tabu ka popisuje pre ka d pr rubu ISO F potrebn po et oce ov ch skrutiek a pr slu n u ahovac moment Utiahnite ich pod a odpor an firmy Agilent Tab 2 pr ruba ROZMER SKRUTIEK PO ET STANOVEN TO IV MOMENT ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Trieda odolnosti oce ov ch skrutiek pre pr rubu F mus by 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 259 406 14 Navod na Obsluhu Nasleduj ca tabulka popisuje pre ka du prirubu CF potrebny po et skrutiek a prislu ny utahovaci moment Utiahnite ich podla odporu enia firmy Agilent Odporu a sa pou i vhodn
64. pouze PN 969 9957 or 969 9958 Pou ijte tento kabel a z str ku spolu s n le it uzemn nou z suvkou aby se zabr nilo z sahu elektrick m proudem a aby byly spln ny po adavky p edpis ES Zp sob zastaven v v vy Turbo V 750 850 TwisTorr Pumping System P i zastaven v v vy lze pou t jeden ze dvou n sleduj c ch zp sob 1 odpojen m konektoru protikusu I O Z p slu enstv 2 odesl n m sign lu STOP z d lkov ho ovl dac ho m sta prost ednictv m konektoru I O viz odstavec JI REMOTE I O v p loze Technical Information 3 odesl n m sign lu STOP z d lkov ho ovl dac ho m sta prost ednictv m s riov ho rozhran RS 232 485 viz odstavec RS 232 485 Communication Description v p loze Technical Information NEBEZPE Pro bezpe nost obsluhy nap jec ho zdroje 969 6521 mus b t v v va TV750 850 TwisTorr Pumping System nap jena nap jec m kabelem se 3 vodi i viz odstavec ACCESSORIES AND SPARE PARTS v p loze Technical Information vybaven m z str kou schv lenou na mezin rodn rovni Pou ijte tento kabel a z str ku spolu s n le it uzemn nou z suvkou aby se zabr nilo z sahu elektrick m proudem a aby byly spln ny po adavky p edpis ES Vysok nap t kter vznik v dic m za zen m e zp sobit v n zran n nebo smrt P ed proveden m operac dr by uvnit jednotky odpojte nap jec k
65. provides about 20 sccm when fed with 1 bar 14 psi absolute atmospheric pressure The following instructions detail how to install the purge vent device on the pump 1 Unscrew the four M x 20 screws fixing the standard purge port block Figure 81 2 Remove the standard purge block paying attention to not remove the sealing o ring placed on the body 3 Insert the purge vent device into the rectangular seat previously occupied by the standard purge block see the following picture for correct alignment and orientation Pay attention that the sealing o ring on the body remains well positioned on its seat during this operation Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 391 406 17 Technical Information Pump used with Corrosive Ge ump Purging Figure 82 4 Use the previously unscrewed four M x 20 screws to fix the purge vent device to the pump body 5 Turbo V 750 850 TwisTorr Pumping System insert the connection cable with the plug in the connection P1 on the integrated controller Figure 83 6 Turbo V 750 850 TwisTorr pump with Rack Controller add to the connection cable the proper extension cable models 969 6504 969 6505 969 6506 969 6507 needed to reach the controller Insert the plug in the connection P1 on the rack controller rear panel 392 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Venting t
66. pump body and the earth connection point must be lt 0 1 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 339 406 17 Technical Information Power Supply Input The controller must be supplied with a voltage of 48 Vdc 10 according to the drawing use 3 pins for each pole Input current during Normal Operation 8 5 A JA P lu a VDC P101 B LU I N S Common e 48 VDC 8 5A Figure 39 P1 Purge Vent The Turbo V 750 850 TwisTorr Pumping system can have as an optional accessory the purge vent device model 969 6502 Through P1 connector the controller is able to drive both the Purge Valve and the Vent Valve placed on the accessory gt 69 PURGE VENT N 4 a CON IGURATION PINS PIN 3 4 25VDC PIN 1 VENT OPEN COLLECTOR PIN 2 PJRGE OPEN COLLECTOR Figure 40 340 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 P2 External Fan This is a dedicated 48 Vdc connector M12 to supply the optional external fan Ed EXT FAN VAS o 7 CONFIGURATION PINS PIN 1 2 COMMON Figure 41 J1 In Out Figure 42 This connector carries all the input and output signals to remote control the Turbo V 750 850 TwisTorr Pumping System It is a 15 pins D type connector the available signals are detailed in the table the fol
67. resistencia de los tornillos de acero para la brida F debe ser 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 71 406 4 Manual de istrucciones La tabla a continuaci n describe la cantidad de tornillos necesarios para cada brida CF y el par de apriete para apretarlos segun las recomendaciones de Agilent Se recomienda usar el material Agilent adecuado Para la descripci n detallada consultar el anexo Technical Information Tab 3 BRIDA N PAR DE APRIETE CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm EI Turbo V 750 850 TwisTorr Pumping System no se puede fijar desde su base ATENCI N El Turbo V 750 850 TwisTorr Pumping System pertenece a la segunda categor a o sobretensi n de instalaci n seg n la directiva EN 61010 1 Realizar la conexi n del dispositivo a la linea de alimentaci n respetando los requerimientos previstos por dicha categor a Utilizar los contraconectores suministrados a los fines de mantener el grado de protecci n IP 54 El Turbo V 750 850 TwisTorr Pumping System est provisto de conectores de Entrada Salida y de comunicaci n serial que se deben conectar a circuitos externos para impedir el acceso a las partes el ctricas Asegurarse de que el aislamiento del dispositivo conectado al Turbo V 750 850 TwisTorr Pumping System sea el adecuado incluso en caso de simple aver a seg n lo previsto por la norma EN 61010 1 Para instalar los accesorios opcionales v ase
68. roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa pyorimisenergia saattaa vapautua VAROITUS T ss kaytt ohjeessa kuvattuja asennusohjeita on noudatettava tarkasti 180 406 laitteiston vaurioitumisen ja kayttajien vahingoittumisen v ltt miseksi Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Ohjekasikirja 10 Yleisia tietoja Tama laite on tarkoitettu ammattimaiseen k ytt n Ennen laitteen k ytt nottoa tulee k ytt j n lukea huolellisesti ohjekirja ja muut Agilentin toimittamat lis tiedot Agilent ei ota vastuuta seurauksista jotka johtuvat laitteen k yttoohjeiden t ydellisest tai osittaisesta laiminlyonnista ammattitaidottoman henkil n virheellisesta laitteen k yt st valtuuttamattomista toimenpiteista tai kansallisen lains d nnon vastaisesta kaytosta Turbo V 750 850 TwisTorr Pumping System on kokonaisjarjestelma joka muodostuu valvojalla varustetusta turbomolekyylipumpusta korkean ja ultrakorkean tyhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeudella 49500 kierrosta min max py riv n turbiinin avulla jota k ytt korkeatehoinen kolmivaiheinen sihk moottori Turbo V 750 850 TwisTorr Pumping System jarjestelmassa ei ole lainkaan
69. rozbi rce nale y przyst pi do jego eliminacji zgodnie z obowi zuj cymi krajowymi normami w meritum sprawy Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 231 406 12 Podrecznik Instrukcji Przetworstwo odpadow 232 406 Objasnienie znajdujacego sie na etykiecie znaczenia logo WEEE Uzyty ponizej symbol jest zgodny z wymogiem zarzadzenia WEEE Unii Europejskiej Symbol ten prawomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przerobki zroznicowanej Dlatego tez poleca sie uzytkownikowi po uprzedniej weryfikacji terminu i warunkow zawartych w kontrakcie sprzedazy nawiazac kontakt z dostawca lub sprzedawca urzadzenia w celu uruchomienia procesu zbiorki i przerobu NES N N b 4 JA 4 DL Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 13 Navod k Pou iti Bezpe nostni navod pro Turbomolekularni vyv vy 234 V eobecn informace 235 Uskladn n 237 P prava kinstalaci 238 Instalace 240 Upevn n v v vy 241 Pou it v v vy Turbo V 750 850 TwisTorr Pumping System 243 Zp sob uveden v v vy Turbo V 750 850 TwisTorr Pumping system do innosti 245 Zp sob zastaven v v vy Turbo V 750 850 TwisTorr Pumping System 247 Nouzov zastaven
70. servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan Ne vr t te za zen v robci na opravu nebo v m nu za repasovan za zen mus te vyplnit list Health and Safety Zdrav a bezpe nost p ilo en k tomuto n vodu a zaslat jej m stn prodejn kancel i P ed odesl n m za zen mus te k za zen p ibalit kopii tohoto listu Pokud se m za zen vy adit mus se zlikvidovat v souladu s konkr tn mi st tn mi normami Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 249 406 13 Navod k Pou it Likvidace Vyznam loga WEEE nachazejiciho se na titku Ni e uvedeny symbol odpov d sm rnic m CE pojmenovanym WEEE Tento symbol platn jen pro st ty Evropsk Unie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v robek likvidovat doporu ujeme aby se nakontaktoval p mo s v robcem nebo prodejcem kter se po pat i n m prov en term n a smluvn ch podm nek postar o kompletn likvidaci uveden ho v robku IX A 4 o pI 250 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 14 Navod
71. te uvnit vakuov komory tlak 0 1 mbar 4 dodejte do vyv vy Turbo V 750 850 TwisTorr Pumping System sign l START jedn m ze dvou zp sob a p ipojen m konektoru protikusu I O z p slu enstv b prost ednictv m sign lu START z d lkov ho ovl dac ho m sta prost ednictv m konektoru I O viz odstavec JI REMOTE 1 0 v p loze Technical Information c prost ednictv m sign lu START z d lkov ho ovl dac ho m sta prost ednictv m s riov ho rozhran RS 232 485 viz odstavec Popis komunikace RS 232 485 v p loze Technical Information Vestav n dic za zen automaticky rozezn p tomnost sign l INTERLOCK a START a uvede v v vu do innosti Re im Soft Start se pou v pro uveden v v vy do chodu po del m obdob ne innosti Umo uje optim ln distribuci mazac ho tuku v lo isc ch Aktivace re imu Soft Start se prov d prost ednictv m p slu n ho softwaru nebo ovl dac m p kazem z d lkov ho I O viz odstavce INTERCONNECTION a RS 232 485 COMMUNICATION DESCRIPTION v p loze Technical Information Syst m je vybaven sign lem o stavu zobrazovan m prost ednictv m zelen LED Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 245 406 13 Navod k Pou it Zelena LED um st n na elnim panelu zaklady v v vy 750 850 TwisTorr Pumping System informuje prost ednictv m sv frekvence o provoz
72. vacuum chamber with different flange Agilentts there exists the chance of twisting or tearing off in case the rotor is suddenly blocked The combination of different flange types is not allowed in any case Agilent Vacuum will not accept any liability for all damages resulting from not allowed fastening Installation of ISO K Flange For ISO K flange connections fix the two flanges with the clamps as shown in the following figure a protective screen can optionally be used ET Figure 75 Use the required number of claw clamps a 10 for ISO 160 flange a 18 for ISO 200 flange Tighten the claw clamps with a torque of 25 Nm Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 383 406 17 Technical Information Installation of ISO F Flange For ISO F flange connections fix the two flanges with the screws as shown in the following figure a protective screen can optionally be used S Figure 76 Use the reguired number of hex screws 8 for ISO 160 flange a 12 for ISO 200 flange Tighten the screws with a torque of 25 Nm Installation of ConFlat Flange For ConFlat flange connections fix the two flanges with the screws as shown in the following figures a protective screen can optionally be used 384 406 Turbo V 750 850 TwisTorr User Man
73. vagy speci lis integr lt purge vent kieg sz t berendez ssel amelyen kereszt l a szivatty hoz iners g zt kell adni nitrog nt h liumot vagy argont a szivatty csap gyainak meg v sa v gett l sd a Technical Information f ggel ket FIGYELEM Soha ne haszn lja a szivatty t olyan korrod l g z vagy g z jelenl t ben amely a szivatty belsej ben l v anyagokat k ros thatja VESZ LY Ha a szivatty val m rgez gy l kony vagy r di akt v g zokat szivatty zunk az egyes g zokra vonatkoz speci lis elj r sokat k vess k apr l kosan Ne haszn ljuk a szivatty t robban g zok jelenl t ben A szivatty t nitrog n argon s k nnyebb g zok szivatty z s ra tervezt k Amennyiben az argonn l nehezebb g z szivatty z s ra lenne sz ks g forduljon a Agilent m szaki gyf lszolg lat hoz felvil gos t s v gett 208 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 A Turbo V 750 850 TwisTorr Pumping System inditasa A rendszer elinditasa el tt ellen rizze hogy az I O ellencsatlakoz el legyen tavolitva Ha a rendszer egy kiil n szabalyozott I O berendez shez van k tve gy z dj n meg arr l hogy a STOP jelz s akt v legyen l sd a J1 REMOTE I O szakaszt a Technical Information f ggel kben A rendszer elind t s hoz a k vetkez ket kell tenni 1 t vol tsa el ha van a rendszer I O ellencsatl
74. w przypadku cz ciowego lub ca kowitego braku przestrzegania instrukcji w przypadku niew a ciwego u ytkowania przez nieprzeszkolony personel w przypadku nieupowa nionych interwencji jak i w przypadku braku zastosowania odpowiednich norm krajowych System Turbo V 750 850 TwisTorr Pumping System jest zintegrowanym systeme sk adaj cym si z pompy turbomolekularnej dla zastosowa wysokich i ultra wysokich pr ni jak i przez odpowiedni system sterowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane poprzez obrotow turbin o wysokiej pr dko ci max 49500 obr min nap dzan przez elektryczny silnik tr jfazowy o wysokiej wydajno ci System Turbo V 750 850 TwisTorr Pumping System jest ca kowicie bez czynnik w zanieczyszczaj cych I dlatego te to system odpowiedni do zastosowa gdzie jest wymagana tzw ezysta pr nia Poza tym posiada z cza pomocnicze poprzez kt re istnieje mo liwo zasilania dodatkowego wentylatora sterowania dodatkowym zespo em purge vent zdalnego pilotowania go poprzez g wny komputer pod czony szeregowo do portu RS232 lub RS485 W nast pnych paragrafach zosta y przedstawione wszystkie potrzebne informacje w celu zagwarantowania bezpiecze stwa operatora podczas u ytkowania aparatury Szczeg owe informacje zosta y przedsta
75. 0 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Le Turbo V 750 850 TwisTorr Pumping System ne peut pas tre fix par la base Le Turbo V 750 850 TwisTorr Pumping System appartient a la seconde cat gorie ou surtension d installation au sens de la directive EN 61010 1 Raccordez l appareil au circuit d alimentation dans le respect des exigences de la directive pour cette cat gorie Utilisez les contre connecteurs fournis afin de conserver le degr de protection IP 54 Le Turbo V 750 850 TwisTorr Pumping System est dot de connecteurs d entr e sortie et de communication s rie gui servent a raccorder des circuits externes de mani re a emp cher tout acc s aux parties lectriques V rifiez que l appareil reli au Turbo V 750 850 TwisTorr Pumping System est correctement isol notamment en cas de panne individuelle comme le pr voit la norme EN 61010 1 60 406 Pour l installation des accessoires en option se reporter a Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 Utilisation du Turbo V 750 850 TwisTorr pumping system Ce paragraphe d crit les principales procedures d utilisation Avant d utiliser le systeme effectuez tous les branchements lectriques et pneumatiques Pendant le r chauffement de la chambre a vide la temperature de la bride d entr e ne doit pas d passer 80 C L op rateur doit s lectionner le bon mode de refroidissement WIN 106 1 pour le ref
76. 0 TwisTorr Pumping System dotato di connettori di Input Output e di comunicazione seriale che devono essere collegati a circuiti esterni in modo tale da rendere inaccessibili le parti elettriche Assicurarsi che l isolamento del dispositivo connesso al Turbo V 750 850 TwisTorr Pumping System abbia un isolamento adeguato anche in condizione di guasto singolo come previsto dalla normativa EN 61010 1 24 406 Per l installazione degli accessori opzionali vedere Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Uso del Turbo V 750 850 TwisTorr Pumping System In guesto paragrafo sono riportate le principali procedure operative Prima di usare il sistema effettuare tutti i collegamenti elettrici e pneumatici Durante l eventuale riscaldamento della camera da vuoto la temperatura sulla flangia di ingresso non deve essere superiore a 80 C L operatore deve assicurarsi di predisporre il corretto modo di raffreddamento WIN 106 1 per raffreddamento ad Acgua 0 per raffreddamento ad aria forzata modo di default impostando il comando seriale WIN 106 Per ulteriori dettagli vedere appendice Technical Information L operatore deve assicurarsi di predisporre il corretto modo di funzionamento in funzione del gas da pompare WIN 157 1 per N e gas pi leggeri 0 per Argon modo di default impostando il comando seriale WIN 157 Per ulteriori dettagli vedere l appendice Tec
77. 01 020 01 A Manual de istrucciones 4 Como poner en funcionamiento el Turbo V 750 850 TwisTorr Pumping System Antes de poner en funcionamiento el sistema controlar que se haya desconectado el contraconector E S Si el sistema esta conectado a un dispositivo de E S a distancia asegurarse de que la sefial de STOP est activa consultar el apartado J1 REMOTE I O en el anexo Technical Information Para poner en funcionamiento el sistema llevar a cabo los siguientes pasos 1 desconectar si est presente el contraconector E S del sistema 2 para poner en funcionamiento el Turbo V 750 850 TwisTorr Pumping System se debe suministrar una tensi n de 48 Vee mediante un Alimentador externo 969 6521 3 llevar la presi n en el interior de la c mara de vac o a 0 1 mbar 4 dar la se al de START al Turbo V 750 850 TwisTorr Pumping System de una de las siguientes maneras a conectar el contraconector E S en dotaci n b dar la se al de START a distancia mediante el conector E S consultar el apartado J1 REMOTE I O en el anexo Technical Information c dar la se al de START a distancia mediante la interfaz serial RS 232 485 consultar el apartado RS 232 485 Communication Description en el anexo Technical Information El controlador integrado reconoce autom ticamente la presencia de las se ales de INTERLOCK y START y pone en funcionamiento la bomba Turbo V 750 850 TwisTorr User Manual 87 901 020 01
78. 01 020 01 A 79 406 4 Manual de istrucciones ATENCI N Evitar choques oscilaciones o desplazamientos bruscos de la bomba cuando est en funcionamiento Los cojinetes podr an da arse Para hacer funcionar la bomba utilizar aire o gas inerte libre de polvo o particulas La presi n de entrada a trav s de la puerta correspondiente debe ser inferior a 2 bar m s las presi n atmosf rica Para bombear gases que contengan particulas o sustancias contaminantes agresivas para los cojinetes estas bombas est n provistas de una puerta especifica o de un accesorio dispositivo especifico de purge vent integrado a trav s del cual se debe suministrar a la bomba un flujo de gas inerte Nitr geno Helio o Arg n para proteger los cojinetes de la misma consultar el anexo Technical Information ATENCI N No utilizar por ning n motivo la bomba en presencia de gases o vapores corrosivos que puedan da ar los materiales internos de la misma Cuando la bomba se utiliza para bombear gases t xicos inflamables o radiactivos seguir los procedimientos adecuados t picos para cada gas No usar la bomba en presencia de gases explosivos La bomba est dise ada para bombear Nitr geno Arg n y gases m s livianos En caso de que surja la necesidad de bombear gases m s pesados que el Arg n se solicita contactar con la Asistencia T cnica de Agilent para obtener informaci n 80 406 Turbo V 750 850 TwisTorr User Manual 87 9
79. 020 01 A 355 406 17 Technical Information Serial Cable Installation In order to maintain the IP 54 protection level please use a certified IP 54 connector or the one provided by Agilent The supplied serial cable must be installed when the Turbo V 750 850 TwisTorr Pumping System has to be controlled by means of a remote com puter The cable is installed fixing the 9 pin D type con nector into the J2 serial connector Procedure to Connect the Serial and 1 0 Ports to an External Cable In the following picture it has showed the right procedure to connect a cable to the I O or to the serial port A shielded cable of 30 m maximum length has to be utilized for both serial and I O port connection Remove the metallic enclosure on both the ends of the cable picture b and after it is necessary to connect the wires to the single pins like showed in the picture c Take care to have a good contact between the metallic case and the external shield of the wire Moreover this operation has to be done at least on the controller side In this way you will be sure to reduce the influence of the external noise and to accomplish the EMC requests In picture d is showed the cable assembled 356 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 SHIEL s SHIELD SOLDER ED TO ECTOR METALL IC CASE SHELL Tii ASSEMBLED SHELL TI
80. 1 406 17 Technical Information Inlet screen installation Figure 61 Figure 62 Figure 63 372 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 The inlet screens mod 969 9302 969 9304 and 969 9316 prevent the blades of the pump from be ing damaged by debris greater than 0 7 mm diameter The inlet screen however does reduce the pumping speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure Figure 64 The screen can be mounted on each pump The screen can be removed as shown in the following figure Figure 65 The overall flange dimensions with the protection screen fitted on pump do not change as the inlet screen remains inside the pump profile Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 373 406 17 Technical Information Air Cooling Kit Installation An air cooling kit mod 969 6503 is available to improve the Turbo V 750 850 TwisTorr Pumping System cooling during operational conditions with out heavy gas loads Fan specifications a air flow 187 m h input voltage 48 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 5 W Figure 66 374 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System with Integrated Controller To fix the
81. 19 Output Power during High Temperature Condition 336 Interconnections 339 Earth Ground Connection 339 Power Supply Input 340 P1 Purge Vent 340 P2 External Fan 341 J1 In Out 341 Auto Pump Speed Mode with Purge Vent Device Accessory Only 349 On Command Mode with Purge Vent Device Accessory Only 349 Auto Time Mode with Purge Vent Device Accessory Only 349 Original Instructions 5 Agilent Technologies 305 406 17 Technical Information 306 406 Stop Speed Reading 350 How to Connect the Open Collector Inputs of the Controller 351 How to Connect the Outputs of the Controller 354 J2 Serial 355 Serial Cable Installation 356 Procedure to Connect the Serial and 1 0 Ports to an External Cable 356 RS 232 RS 485 Communication Description 358 Window Meanings 363 Soft Start 367 Leak Check Mode 368 Agilent T Plus 369 Embedded Data logger Manager New Function 370 Inlet screen installation 372 Air Cooling Kit Installation 374 Turbo V 750 850 TwisTorr Pumping System with Integrated Controller 375 Turbo V 750 850 TwisTorr Pump with Standard Rack Controller 376 Drive the External Fan 378 Water Cooling Kit Connection 379 Vibration Isolator Installation 382 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Connection of the High Vacuum Flange 382 Installation of ISO K Flange 383 Installation of ISO F Flange 384 Installation of ConFlat Flange 384 Connection
82. 50 Ubersetzung der Originalanleitungen a le Agilent Technologies 33 406 2 Gebrauchsanleitung Sicherheitshinweise fir Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verfiigen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren uber eine grof e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k nnte diese Rotationsenergie freigesetzt werden WARNUNG Um Sch den am Ger t zu vermeiden und um Verletzungen der Bediener vorzubeugen befolgen Sie bitte aufmerksam die in diesem Handbuch beschriebenen Installationshinweise 34 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Allgemeine Informationen Dieser Apparat ist fur den fachmannischen Gebrauch be stimmt Vor dem Gebrauch hat der Benutzer dieses Handbuch sowie alle weiteren mitgelieferten Zusatzdokumentationen genau zu lesen Bei auch teilweiser Nichtbeachtung der enthaltenen Anweisungen unsachgem em Gebrauch durch ungeschultes Personal nicht autorisierten Eingriffen und Mi achtung der nationalen einschl gigen Normen bernimmt die Firma Agilent keinerlei Haftung Modell Turbo V 750 850 TwisTorr Pumping System ist ein integriertes System das aus einer Turbomolekularpumpe f r Hoch und H chstvakuum anwendungen integriert mit einem ents
83. 50 850 TwisTorr User Manual 87 901 020 01 A 57 406 3 Mode d emploi Installation atv Ne d coller l adh sif et ne retirer le couvercle de protection qu au moment de brancher la turbopompe au syst me 58 406 Figure 2 Installer cet appareil uniquement dans un local ferm et ne jamais l utiliser dans un milieu expos aux conditions atmosph riques pluie gel neige la poussi re aux gaz agressifs encore moins dans un milieu pouvant pr senter un risque d explosion ou d incendie Pendant le fonctionnement il est n cessaire de respecter les conditions environnementales suivantes pression maxi 2 bar au del de la pression atmosph rique temp rature de 5 C 45 C Cf graphique dans Technical Information a humidit relative O 90 non condensante En presence de champs magn tiques la pompe doit tre prot g e a l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le Turbo V 750 850 TwisTorr Pumping System doit tre connect une pompe primaire Cf sch ma dans Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 Fixation de la pompe AHSA AU Tout non respect des pr sentes instructions lors de l installation du syst me risque de provoguer un d crochement de la pompe du systeme en cas de panne du rotor et d entrainer des dommages des blessures g
84. 69 8814 969 8816 969 6014 969 6016 969 6017 Nestes casos a manipula o da bomba deve ser realizada com o auxilio de meios de eleva o adequados ou por pelo menos duas pessoas N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a directiva para a protec o do meio ambiente 94 62 CE e posteriores modifica es Para evitar problemas de perdas de g s n o tocar com as m os os componentes destinados exposi o do v cuo Utilizar sempre luvas ou outra protec o adequada O Turbo V 750 850 TwisTorr Pumping System n o pode ser danificado permanecendo simplesmente exposto atmosfera Aconselha se no entanto manter a bomba fechada at o momento da instala o no sistema para evitar eventuais acumula es de p 94 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Turdo 0 850 TwisTorr Pumpin stem C POWER SUPPLY 969 652 Figura 1 A embalagem do Turbo V 750 850 TwisTorr Pumping System cont m 1 Bomba com controller integrado 2 Inlet screen montado 3 Este manual de instruc es em CD ROM 4 Caixa de acess rios a contra conector de 15 vias REMOTE I O IP 54 contendo com as conex es necessarias para arrancar a bomba b contra conector de 9 vias SERIAL IP 54 a ser utilizado para a conex o serial Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 95 406 5 Manual d
85. 750 850 TwisTorr Pumping System anhalt Um die Pumpe anzuhalten kann man eine der folgenden Methoden anwenden 1 Den mitgelieferten Gegenstecker I O entfernen 2 Ein ferngesteuertes STOPP Signal mittels dem Stecker I O senden siehe Absatz J1 REMOTE I O im Anhang Technical Information 3 Ein ferngesteuertes STOPP Signal mittels serieller Schnittstelle RS 232 485 senden siehe Absatz RS 232 485 Communication Description im Anhang Technical Information WARNUNG Fiir die Sicherheit des Bedieners muss der Speiser 969 6521 des TV750 850 TwisTorr Pumping Systems mit einem Dreileiterkabel versorgt werden siehe Absatz ACCESSORIES AND SPARE PARTS im Anhang Technical Information ausgestattet mit einer Buchse auf internationaler Ebene anerkannt Dieses Kabel und den Stecker an eine angemessen geerdete Buchse anschlie en um elektrische Schl ge zu vermeiden und den CE Normen zu entsprechen Die hohen Spannungen die sich im Controller entwickeln k nnen schwere Verletzungen und Tod verursachen Bevor man Wartungsarbeiten im Inneren der Einheit durchf hrt das Speisekabel trennen Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 47 406 2 Gehrauchsanleitung Not Aus Um im Notfall sofort das Turbo V 750 850 TwisTorr Pumping System abzustellen muss man das Speisekabel entfernen Zu beachten ist dass bei diesem Vorgang nicht nur die Versorgung der Pumpe vollst ndig unterbrochen wird sondern auch a
86. 957 alebo 969 9958 Pou ite tento kabel a zastr ku spolu s nale ite uzemnenou zasuvkou aby sa zabranilo zasahu elektrickym prudom a aby boli splnen po iadavky predpisov ES Sp sob zastavenia zariadenia Turbo V 750 850 TwisTorr Pumping System NEBEZPE E Pri zastaven v vevy je mo n pou i jeden z dvoch nasleduj cich sp sobov 1 odpojen m konektora protikusu I O z prislu enstva 2 odoslan m sign lu STOP z dia kov ho ovl dacieho miesta prostredn ctvom konektora I O vi odsek JI REMOTE I O v pr lohe Technical Information 3 odslanim signalu STOP z dia kov ho ovl dacieho miesta prostredn ctvom s riov ho rozhrania RS 232 485 vi odsek RS 232 485 Communication Description v pr lohe Technical Information Pre bezpe nos obsluhy mus by nap jac zdroj 969 6521 zariadenia TV750 850 TwisTorr Pumping System nap jan nap jac m k blom s 3 vodi mi vi odsek PR SLU ENSTVO A N HRADN DIELY v pr lohe Technical Information vybaven m z str kou schv lenou na medzin rodnej rovni Pou ite tento k bel a z str ku spolu s n le ite uzemnenou z suvkou aby sa zabr nilo z sahu elektrick m pr dom a aby boli splnen po iadavky predpisov ES Vysok nap tie ktor vznik v riadiacom zariaden m e sp sobi v ne zranenie alebo smr Pred vykonan m dr by vo vn tri jednotky odpojte nap jac k bel Turbo V 750 850 Twi
87. 969 8816 969 6014 969 7016 969 6017 V t chto p padech mus b t manipulace s v v vou prov d na pomoc vhodn ch zvedac ch prost edk nebo alespo dv ma osobami Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice 94 62 ES na ochranu ivotn ho prost ed ve smyslu pozd j ch prav Aby se zamezilo probl m m s odply ov n m nepou vejte hol ruce p i manipulaci s komponenty kter budou vystaveny vakuu V dy pou vejte rukavice nebo jinou vhodnou ochranu Norm ln prost ed nechr n nou v v vu Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou nem e po kodit P esto doporu ujeme abyste ji nechali zakrytou dokud nebude nainstalov na do syst mu a t m se ochr nila p ed jak mkoli zne i t n m a prachem 238 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod k Pou iti 13 Turbo 850 TwisTorr Pumping System BVDC POWER PPLY 969 6521 Postava 1 Obal vyv vy Turbo V 750 850 TwissTorr Pumping System obsahuje 1 2 3 V v vu s vestav n m dic m za zen m Vstupn m ku namontovanou Tento n vod na CD ROM Krabici s p slu enstv m a Konektor protikus 15 p lovy REMOTE I O IP 54 s vestav n mi pot ebn mi p ipojen mi pro uveden v v vy do chodu b Konektor protikus 9 p lov SERIAL IP 54 pro pou it
88. C par une alimentation externe 969 6521 3 amener la pression int rieure de la chambre vide 0 1 mbar 4 donner au Turbo V 750 850 TwisTorr Pumping System le signal de START en proc dant selon une des modalit s suivantes a raccordez le contre connecteur d E S fourni b donnez le signal de START depuis un dispositif de commande distant travers le connecteur E S cf paragraphe J1 REMOTE 1 0 l annexe Technical Information c donnez le signal de START depuis un dispositif de commande distant travers l interface s rie RS 232 485 cf paragraphe RS 232 485 Communication Description l annexe Technical Information Le contr leur int gr d tecte automatiquement la pr sence des signaux d INTERLOCK et de START et d marre la pompe Le mode Soft Start est pr vu pour mettre en marche la pompe apr s une longue p riode d inutilisation Ceci permet une distribution optimale de la graisse dans les roulements Pour activer le mode Soft Start utilisez le logiciel pr vu cet effet ou une commande d E S distante cf paragraphes INTERCONNECTION et RS 232 485 COMMUNICATION DESCRIPTION l annexe Technical Information Le syst me g n re un signal d tat reli une led verte La led verte situ e en fa ade du 750 850 TwisTorr Pumping System indique en fonction de la vitesse de clignotement les conditions de fonctionnement du syst me a allum fixe la pompe est en rotation
89. C t A kezel nek meg kell gy z dnie arr l hogy megfelel h t st k sz tett el WIN 1069 1 vizes h t shez 0 k nyszerleveg s h t sn l alapbe ll t s a sorozatvez rl st WIN 106 ra be ll tva A tov bbi r szletekhez l sd a Technical Information f ggel ket A kezel nek meg kell gy z dnie arr l hogy a helyes m k d st el k sz tette a szivatty zand g z f ggv ny ben WIN 157 1 N hoz s k nnyeb g zokhoz 0 Argonhoz alapbe ll t s a sorozatvez rl st WIN 157 re be ll tva A tov bbi r szletekhez l sd a Technical Information f ggel ket VESZ LY Soha ne haszn lja a turb szivatty t amikor a bemeneti karima nincs csatlakoztatva a v kuumkamr hoz vagy nincs kiiktatva Ne rintse meg a turb szivatty t vagy annak tartoz kait a meleg t si folyamat k zben Magas h m rs klet g st okozhat Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 207 406 11 Felhaszn l i K zik nyv FIGYELEM Ker lj k el hogy a szivatty t dj k ingadozz k vagy hirtelen elmozduljon m k d s k zben A csap gyak k rosodhatnak A szivatty bemeneti leveg j hez por s szemcsementes leveg t vagy iners g zt haszn ljunk A megfelel ny l son a bemen nyom s 2 bar alatt legyen a l gnyom son fel l A partikul tumot vagy a csap gyakra agressz v szennyez d st tartalmaz g z szivatty z s hoz ezek a szivatty k megfelel ny l ssal vannak ell tva
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91. E pa etikettene Symbolet nedenunder som finnes er anvendt i henhold til EC direktiv kalt WEEE Dette symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter pa IKKE ma behandles som vanlig hus industriavfall men ma legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anordningen henvende seg til leverand ren av anordningen som kan v re et firma eller en forhandler som s rger for oppsamling og eliminering etter ha kontrollert avtal og betingelser i kj pekontrakten Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 177 406 9 Instruksjon Manual Eliminering 178 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 10 Ohjekasikirja Turbomolekyylipumppujen Turvaohjeet 180 Yleisi tietoja 181 Varastointi 183 Valmistelut asennusta varten 184 Asennus 186 Pumpun kiinnitys 187 Turbo V 750 850 TwisTorr Pumping Systemin K ytto 189 Miten Turbo V 750 850 TwisTorr Pumping System k ynnistet n 190 Miten Turbo V 750 850 TwisTorr Pumping System pys ytet n 193 H t pys ytys 194 Huolto 195 H vitt minen 196 Alkuper isen ohjeiden k nn s o Agilent Technologies 179 406 10 Ohjekasikirja Turbomolekyylipumppujen Turvaohjeet Tassa kayttoohjeessa kuvatuissa turbomolekyylipumpuissa on korkea maara kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyna pumppujen
92. Error code on display Other Damaged sealing area Other LEAK DETECTORS INSTRUMENTS Cannot calibrate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error cade on display Other SCROLL AND ROTARY VANE PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach vacuum Cooling coil damage Pump seized Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale e Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements e Customers receiving an Advance Exchange product agree to return the defective rebuildable part to Agilent Technologies within 15 business days Failure to do so or returning a non rebuildable part crashed will result in an invoice for the non returned non rebuildable part e Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur a restocking fee Please reference the original purchase order
93. Gegenstecker 9 fach SERIAL IP 54 f r die serielle Verbindung zu verwenden Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 39 406 2 Gebrauchsanleitung Installation VORSICHT Das Klebeband abziehen und den Schutzdeckel erst bei Anschlu der Turbopumpe an das System abnehmen 40 406 Abbildung 2 Das Ger t darf nur in geschlossenen Umgebungen installiert und nicht in Umgebungen benutzt werden wo es Witterungsbedingungen Regen Frost und Schnee Staub oder tzenden Gasen ausgesetzt ist oder die explosionsf hig oder mit einer erh hten Brandgefahr sind Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden Maximaler Druck 2 bar ber dem atmosph rischen Druck Temperatur von 5 C bis 45 C siehe Diagramm im Anhang Technical Information a Relative Luftfeuchtigkeit 0 90 nicht kondensierend Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell Turbo V 750 850 TwisTorr Pumping System ist an eine Prim rpumpe anzuschlie en siehe Schema in Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Befestigung der Pumpe WARNUNG Die Nichtachtung dieser Installationsanleitungen kann im Falle eines Rotorschadens das Abtrennen der Pumpe vom System hervorrufen und damit Schaden s
94. Manual de istrucciones 4 Turdo 0 850 TwisTorr Pumpin stem C POWER SUPPLY 969 652 Figura 1 El embalaje del Turbo V 750 850 TwisTorr Pumping System incluye 1 Bomba con controlador integrado 2 Inlet screen montado 3 Este manual de instrucciones en CD ROM 4 Caja de accesorios a contraconector de 15 v as REMOTE I O IP 54 con las conexiones necesarias poner en funcionamiento la bomba integradas b contraconector de 9 vias SERIAL IP 54 para utilizar en la conexi n serial Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 75 406 4 Manual de istrucciones Instalaci n ATENCI N Despegar el adhesivo y quitar el tap n de protecci n s lo al conectar la bomba al sistema Figura 2 Este equipo debe ser instalado s lo en ambientes cerrados y en ninguna circunstancia podr utilizarse en ambientes expuestos a agentes atmosf ricos lluvia hielo nieve polvos gases agresivos ni en ambientes explosivos o sujetos a elevado riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales siguientes presi n m xima 2 bares por encima de la presi n atmosf rica temperatura de 5 C a 45 C v ase gr fico en el anexo Technical Information humedad relativa O 90 no condensadora Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Techn
95. Manuale di istruzioni Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Manual de istruc es Bedrijfshandleiding Istrukstionsbog Bruksanvisning 87 901 020 01 A 04 2011 Turbo V 750 850 TwisTorr Pump models 969 6013 969 6014 969 6015 969 6016 969 6017 969 6018 969 6019 Pumping System models 969 8813 969 8814 969 8815 969 8816 969 8818 969 8819 Instruksjon manual Ohjek sikirja Felhaszn l i k zik nyv Podrecznik instrukcji N vod k pou it N vod na obsluhu Priro nik za navodila User Manual ote Agilent Technologies Notices Agilent Technologies Inc 2011 No part of this manual may be reproduced in any form or by any means including electronic storage and retrieval or translation into a foreign language without prior agreement and written consent from Agilent Technologies Inc as governed by United States and international copyright laws Manual Part Number Publication Number 87 901 020 01 A Edition Edition 04 2011 Printed in ITALY Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini TO ITALY Warranty The material contained in this document is provided as is and is subject to being changed without notice in future editions Further to the maximum extent permitted by applicable law Agilent disclaims all warranties either express or implied with regard to this manual and any information containe
96. N and lighter gases 0 for Argon default by means of WIN 157 serial command See the annex Technical Information for details WARNING Never use the turbopump when the inlet flange is not connected to the vacuum chamber or is not blanked Do not touch the turbopump or any of its accessories during the heating process The high temperatures may cause burns CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become dam aged Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure For pumping gases containing particulate or aggressive pollutants for the bearings these pumps are fitted with a special port or the integrated purge vent device accessory to allow a steady flow of inert gas like He Na Ar for pump bearing protection see the annex Technical Information CAUTION Never use the pump with corrosive gases or vapor to avoid damage to the internal materials of the pump Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 297 406 16 Instructions for Use WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow the reguired procedures for each gas disposal Do not use the pump in presence of explosive gases The pump is designed to pump high throughput of Na Ar and lighter gas Should you need to pump gases hea
97. OMENT ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm F ljande tabell beskriver for varje ISO F flans analet stalskruvar som kr vs och med vilket moment som de skall skruvas at enligt rekommendationerna fran Agilent Tab 2 FLANS SKRUVARNAS STORLEK ANT ATDRAGNINGS MOMENT ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Stalskruvarnas motstandsklass f r fl ns F m ste vara 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 151 406 8 Bruksanvisning F ljande tabell beskriver for varje CF fl ns analet skruvar som kr vs och med vilket moment som de skall skruvas at enligt rekommendationerna fran Agilent Det rekommenderas att anvanda motsvarande material fran Agilent Se bilagan Technical Information for en detaljerad beskrivning Tab 3 FLANS ANT ATDRAGNINGS MOMENT CFF 6 16 20 Nm CFF 8 20 20 Nm GFF 10 24 20 Nm Turbo V 750 850 TwisTorr Pumping System kan installeras i med hjalp av sitt fundament OBSERVER Turbo V 750 850 TwisTorr Pumping System tillh r den andra installationsklassen eller oversp nning enligt direktivet EN 61010 1 Anslut anordningen till str mf rs rjningen f r att uppfylla kraven som f rutses f r denna klass Anv nd motkontakterna som medf ljer f r att bevara skyddsklassen IP 54 Turbo V 750 850 TwisTorr Pumping System har Input Output kontakter och en seriekommunikation som maste anslutas till externa kretsar sa att de elektriska delarna inte kan kom
98. ON Com Name Contact Name Tel Email Fax Customer Ship To Customer Bill To Europe only VAT reg Number USA Canada only LI Taxable O Non taxable 2 PRODUCT IDENTIFICATION Product Description Agilent P N Agilent S N Original Purchasing Reference 3 TYPE OF RETURN Choose one from each row and supply Purchase Order if reguesting a billable service 3A LI Non Billable LI Billable mmm New PO hard copy must be submitted with this form 3B exchange Repair upgrade _IConsignment Demo calibration evaluation Return for Credit 4 HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS RADIOACTIVE MATERIAL OR MERCURY AT ITS FACILITY Call Agilent Technologies to discuss alternatives if this requirement presents a problem The equipment listed above check one HAS NOT pumped or been exposed to any toxic or hazardous materials OR L HAS pumped or been exposed ta the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed L IToxic Gorrosive Reactive 1 Flammable El Explosive 1 Biological Radioactive List all toxic hazardous materials Include product name chemical name and chemical symbol or formula NOTE If a product is received at Agilent which is contaminated with a toxic or hazardous material th
99. R AANHAAL KOPPEL CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Het Turbo V 750 850 TwisTorr Pumping System kan niet bevestigd worden via zijn basis OORZICHTIG Het Turbo V 750 850 TwisTorr Pumping System behoort tot de tweede installatiecategorie overspanningscategorie volgens de richtlijn EN 61010 1 Voer de aansluiting van het apparaat op de voedingsleiding zo uit dat aan de vereisten voor die categorie wordt voldaan Gebruik de geleverde contraconnectoren met beschermingsgraad P 54 Het Turbo V 750 850 TwisTorr Pumping System is voorzien van connectoren voor de ingangen uitgangen en voor de seri le communicatie die aangesloten moeten worden op de externe circuits zodat de elektrische onderdelen niet toegankelijk zijn Controleer of het apparaat dat op het Turbo V 750 850 TwisTorr Pumping System is aangesloten goed geisoleerd is ook in geval van een enkele storing zoals voorzien door de norm EN 61010 1 116 406 Zie Technical Information voor installatie van accessoires die als optie verkrijgbaar zijn Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Gebruik van het Turbo V 750 850 TwisTorr Pumping System In deze paragraaf worden de belangrijkste bedrijfsprocedures vermeld Alvorens het systeem te gebruiken moeten alle elektrische en pneumatische aansluitingen tot stand worden gebracht Tijdens de eventuele verwarming van de vacuiimkamer mag de temperatuur op de inlaatfl
100. ROM 4 katulu s prislu enstvom a Konektor protikus 15 p lovy REMOTE I O IP 54 so zabudovanymi kontaktmi pre uvedenie vyvevy do chodu b Konektor protikus 9 p lov SERIAL IP 54 pre pou itie pre s riov pripojenie Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 257 406 14 Navod na Obsluhu In tal cia POZOR Neodstra ujte priskrutkovan ochrann kryt sk r ne pripoj te turbov vevu k syst mu 258 406 Postava 2 Zariadenie v dy nain talujte v miestnosti a v iadnom pr pade ho nepou vajte v prostred v ktorom by bolo vystaven vplyvu po asia d sneh mr z prachu agresivnym plynom v bu n m alebo ve mi hor av m l tkam Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia maxim lny pretlak 2 bary nad rov ou atmosf rick ho tlaku teplota vzduchu od 5 C do 45 C a relat vna vlhkos 0 90 bez kondenz cie V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie Turbo V 750 850 TwisTorr Pumping System sa mus pripoji k prim rnej v veve pozri Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Upevnenie vyvevy 1 5 54 4H 48 Nedodr anie t chto pokynov pre in tal ciu m e v pr pade
101. Tel 52 5 523 9465 Fax 52 5 523 9472 Singapore Agilent Technologies Singapore Pte Ltd Vacuum Products Division Agilent Technologies Building 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Agilent Technologies Inc 2011 Printed in ITALY 04 2011 Publication Number 87 901 020 01 A Agilent Technologies Southeast Asia Agilent Technologies Sales Sdn Bhd Vacuum Products Division Unit 201 Level 2 uptown 2 2 Jalan SS21 37 Damansara Uptown 47400 Petaling Jaya Selangor Malaysia Tel 603 7712 6106 Fax 603 6733 8121 Taiwan Agilent Technologies Taiwan Limited Vacuum Products Division 3F 20 Kao Shuang Rd Pin Chen City 324 Taoyuan Hsien Taiwan R 0 C Tel 886 34959281 Toll Free 0800 051 342 UK and Ireland Agilent Technologies UK Ltd Vacuum Products Division 6 Mead Road Oxford Industrial Park Yarnton Oxford 0X5 10U UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 Other Countries Agilent Technologies Italia S p A Vacuum Products Division Via F Ili Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Customer Support 8 Service NORTH AMERICA Toll Free 800 882 7426 Option 3 vpl raQagilent com EUROPE Toll Free 00 800 234 234 00 vpt customercare agilent com PACIFIC RIM please visit our website for individual of
102. Torr Pumping System o sinal de START em um dos modos a seguir a conectar o conta conector I O fornecido com o equipamento b daro sinal de START dist ncia mediante o conector I O ver o paragrafo J1 REMOTE I O no ap ndice Technical Information c daro sinal de START dist ncia mediante a interface serial RS 232 485 ver o paragrafo RS 232 485 Communication Description no ap ndice Technical Information O controller integrado reconhece automaticamente a presenca dos sinais de INTERLOCK e START e arranca a bomba O modo Soft Start est previsto para ligar a bomba ap s um periodo de paragem prolongado Isto permite uma distribuic o ideal de massa lubrificante nos rolamentos Para habilitar o modo Soft Start 6 necessario faz lo pelo software adeguado ou um comando de I O A distancia ver os par grafos INTERCONNECTION e RS 232 485 COMMUNICATION DESCRIPTION no ap ndice Technical Information O sistema est eguipado com um sinal de estado com um led verde O LED verde posicionado no painel frontal da base do 750 850 TwisTorr Pumping System indica com a fregu ncia do seu lampejo as condi es operacionais do sistema Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 101 406 ATENCAO Manual de Istruc es aceso fixo a bomba est em rota o normal a lampejante lento periodo de aproximadamente 400 ms o sistema esta em estado de rampa de travagem de stop ou de Waiting for
103. Torr User Manual 87 901 020 01 A _ Technical Information 17 The following figure shows the seven models Figure 9 Model 969 6013 Figure 10 Model 969 6014 Figure 11 Model 969 6015 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 311 406 17 Technical Information kia tha Turh V 7EN ORN Tx Tar tion of the 1UrDo V 90 09 WIS IO Figure 12 Model 969 6016 Figure 13 Model 969 6017 Figure 14 Model 969 6018 312 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Figure 15 Model 969 6019 The pumps must be driven with the dedicated rack controller models 969 9525 969 9526 Pump Description The Turbo V 750 850 TwisTorr pump consists of a high freguency motor driving a turbine fitted with 5 bladed stages and 2 TwisTorr drag stages The turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end The turbine is made of high strength aluminium alloy machined from a single block The TwisTorr stages are in the form of three discs The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump The static blades of the stators are made of stainless steel or aluminium alloy These are supported and
104. TwisTorr Pumping System Ta del opisuje osnovne delovne postopke Pred uporabo sistema izvedite vse elektri ne in pnevmatske vezave Med morebitnim segrevanjem vakuumske komore temperatura na vhodni prirobnici ne sme presegati 80 C Upravljavec mora zagotoviti ustrezno hlajenje WIN 106 1 za vodno hlajenje 0 za prisilno zra no hlajenje privzeti na in na serijskem upravljalniku WIN 106 Za podrobnej e informacije si oglejte dodatek Technical Information Upravljavec mora poskrbeti za pravilno uporabo skladno s plinom ki ga bo naprava rpala WIN 157 1 za N in la je pline 0 za argon privzeti na in na serijskem upravljalniku WIN 157 Za podrobnej e informacije si oglejte dodatek Technical Information rpalke nikoli ne vklju ite e vhodna prirobnica ni povezana z vakuumsko komoro ali ni zaprta z zaporno prirobnico Med fazo segrevanja se turbo rpalke in njene morebitne dodatne opreme ne dotikajte Zaradi visoke temperature obstaja nevarnost opeklin Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 279 406 15 Priro nik za Navodila Izogibajte se udarcem nihanju in sunkovitim premikom rpalke med delovanjem slednje saj bi lahko pri lo do po kodbe le ajev Za dovod zraka rpalki uporabite zrak ali inertni plin brez prahu in delcev Vhodni tlak dovajan skozi ustrezna vrata mora biti ni ji od 2 barov vi ji od atmosferskega tlaka Za rpanje plinov ki vsebujejo trdne delce ali onesn
105. TwisTorr Pumping System bestar av en turbomolekyl r pump for h ga och mycket h ga vakuumtill mpningar och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock limpar sig inte systemet f r pumpning av vatskor eller fasta partiklar Pumpningen astadkoms med hjalp av en h gvarvig turbin max 49500 varv minut som drivs av en trefas h geffektsmotor Inga tillsats mnen anv nds i Turbo V 750 850 TwisTorr Pumping System som darf r passar f r tillimpningar som kraver ett rent vakuum Det har dessutom en hj lpkontakter som g r det m jlig att f rse str m till en extra ventilator att styra den extra gruppen purge vent och att fjarrstyra den med hj lp av en host dator som ar ansluten genom seriell forbindelse RS 232 RS 485 De f ljande avsnitten innehaller all information som beh vs f r att garantera operatorens s kerhet under anv ndningen Detaljerade uppgifter finns i bilagan Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 145 406 8 Bruksanvisning I bruksanvisningen anv nds foljande standardrubriker VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en viss typ av arbete maste utf ras exakt enligt anvisningarna annat fall finns risk f r svara personskador Mudo Detta varningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk for maskinskada skall uppsta
106. VIEN KOKO MAA RA KIRISTYS MOMENTTI ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Terasruuvin lujuusluokka laipassa F tulee olla 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 187 406 10 Ohjekasikirja Seuraavassa taulukossa kuvataan jokaista CF laippaa kohti tarvittavien ruuvien m r ja niiden kiristysmomentit Agilentin antamien suositusten mukaisesti Kayta tarkoituksenmukaista Agilent materiaalia Katso yksityiskohtainen kuvaus liitteesta Technical Information Tab 3 LAIPPA MAA RA KIRISTYS MOMENTTI CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Turbo V 750 850 TwisTorr Pumping Systemi ei voi kiinnitt siihen kuuluvan jalustan kautta HUOMIO Turbo V 750 850 TwisTorr Pumping System kuuluu asennusluokkaan II tai ylij nnite direktiivin EN 61010 1 mukaisesti Liitt k laite virransy tt linjaan siten ett kyseist luokkaa koskevat vaatimukset t ytet n K ytt k toimitettuja vastaliittimi jotta suojaluokka IP 54 s ilyy Turbo V 750 850 TwisTorr Pumping System on varustettu Input Output ja sarjaliittimill jotka tulee liitt ulkoisiin piireihin siten ett s hk osiin ei p st Varmista ett Turbo V 750 850 TwisTorr Pumping Systemiin liitetetyn laitteen eristys k y my s yksitt isen vian syntyess EN 61010 1 s d ksen mukaisesti Lis varusteiden asennusta varten ks liite Technical Information 188 406 Turbo V 750 850 TwisT
107. a evala ki bi bila agresivna za le aje so te rpalke opremljene s posebnimi vrati ali posebno dodatno napravo za i enje prezra evanje skozi katera je treba rpalki dovajati inertni plin du ik helij ali argon za za ito le ajev rpalke oglejte si dodatek Technical Information rpalke nikoli ne uporabljajte v prisotnosti razjednih plinov ali hlapov ki bi lahko po kodovali inertne materiale rpalke Ko rpalko uporabljate za rpanje toksi nih vnetljivih ali radioaktivnih plinov vedno upo tevajte ustrezne postopke zna ilne za vsak posamezni plin rpalke nikoli ne uporabljajte ob prisotnosti eksplozivnih plinov rpalka je zasnovana za rpanje du ika argona in la jih plinov e bi bilo potrebno rpati pline ki so te ji od argona se posvetujte s slu bo za tehni no pomo Agilent 280 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Zagon sistema Turbo V 750 850 TwisTorr Pumping System Pred zagonom sistema preverite ali je protikonektor I O odstranjen e je sistem vezan na oddaljeno vhodno izhodno napravo preverite ali je signal STOP aktiven oglejte si odstavek J1 REMOTE I O v dodatku Technical Information Za zagon sistema sledite naslednjim korakom 1 odstranite sistemski protikonektor I O e je name en 2 pred vklopom sistema Turbo V 750 850 TwisTorr Pumpins System vzpostavite napetost 48 Vcc s pomo jo zunanjega
108. a di serraggio stringerli Tab 1 FLANGIA N COPPIA DI SERRAGGIO ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm La seguente tabella descrive per ogni flangia ISO F il numero di viti d acciaio necessarie e con guale coppia di serraggio stringerle secondo le raccomandazioni di Agilent Tab 2 FLANGIA DIMENSIONE VITI N COPPIA DI SERRAGGIO ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm La classe di resistenza delle viti d acciaio per la flangia F deve essere 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 23 406 1 Istruzioni per l uso La seguente tabella descrive per ogni flangia CF il numero di viti necessarie e con quale coppia di serraggio stringerle secondo le raccomandazioni di Agilent Si suggerisce di usare il materiale Agilent appropriato Vedere l appendice Technical Information per la descrizione dettagliata Tab 3 FLANGIA N FIXING TORQUE CFF 6 16 20 Nm CFF 8 20 20 Nm GFF 10 24 20 Nm Il Turbo V 750 850 TwisTorr Pumping System non pu essere fissato mediante la sua base ATTENZIONE Il Turbo V 750 850 TwisTorr Pumping System appartiene alla seconda categoria o sovratensione di installazione secondo la direttiva EN 61010 1 Effettuare il collegamento del dispositivo alla linea d alimentazione in modo da soddisfare i requisiti previsti da tale categoria Utilizzare i controconnettori forniti al fine di conservare il grado di protezione IP 54 Il Turbo V 750 85
109. abel Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 247 406 13 Navod k Pou it 248 406 Nouzove zastaveni Pro okam it zastaven v v vy Turbo V 750 850 TwisTorr Pumping System v podm nk ch nouzov ho stavu je t eba odpojit nap jec kabel od nap jec ho p vodu Je v ak t eba m t na pam ti e tato operace nejen kompletn vypne nap jen v v vy ale zru i v echny ostatn funkce dic ho za zen jako nap spr vu zen ho proplachov n Purge a odvzdu n n Vent zru i schopnost s riov komunikace komunikace prost ednictv m sb rnice Profibus nebo prost ednictv m I Os se syst mem do kter ho byla v v va vestav na Krom toho tato operace nedok e zaru it okam it zastaven rotoru jeho rychlost klesne v z vislosti na stupni vakua kter se nach z v syst mu Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Udr ba Navod k Pou iti 13 V v va Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou nevy aduje dnou dr bu Ve ker pr ce na tomto za zen mus prov d t opr vn n osoby NEBEZPE Ne za nete prov d t jak koli pr ce na tomto za zen odpojte jej od s t odvzdu n te v v vu otev en m p slu n ho ventilu po kejte a se rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn
110. adapt au pompage de liguides ou de particules solides L effet de pompage est obtenu gr ce a une turbine tournant a vitesse lev e 49500 tr min maxi mue par un moteur lectrique triphas a haut rendement Le Turbo V 750 850 TwisTorr Pumping System est totalement exempt d agents polluants et il est par cons guent indigu pour toutes les applications exigeant un vide propre Le Turbo V 750 850 TwisTorr Pumping System est en outre dot de connecteurs auxiliaires permettant d alimenter un ventilateur suppl mentaire de commander le groupe purge vent suppl mentaire de le piloter a distance depuis un ordinateur host connect via une ligne s rie RS232 ou RS485 Les paragraphes suivants fournissent toutes les indications n cessaires garantir la s curit de l op rateur pendant l utilisation de l appareillage Des renseignements plus d taill s se trouvent dans l appendice Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 53 406 3 Mode d emploi Cette notice utilise les signes conventionnels suivants NES ANA Les messages d avertissement attirent l attention de l op rateur sur une procedure ou une man uvre sp ciale qui effectu e de fa on impropre risque de provoquer de graves l sions Vasile Les messages d attention apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage Les notes contiennent des rense
111. address 0x80 device number 0 to 31 for RS 485 lt WIN gt Window a string of 3 numeric char acter indicating the window number from 000 to 999 for the meaning of each window see the relevant paragraph lt COM gt Command 0x30 to read the window 0x31 to write into the window lt DATA gt an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type as per the following table Tab 7 Data Type Field Length ValidCharacters Logic L 1 0 lt OFF Numeric N 6 0 Y right justified with 0 Alphanumeric A 10 from blank to ASCII lt ETX gt End of transmission 0x03 lt CRC gt XOR of all characters subsequent to lt STX gt and including the lt ETX gt terminator The value is hexadecimal coded and indicated by two ASCII character Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 359 406 17 Technical Information The addressed SLAVE will respond with an ANSWER whose structure depends from the MESSAGE type When the MESSAGE is a reading command the SLAVE will respond transmitting a string with the same structure of the MESSAGE Using the RS 485 interface the message structure re mains identical to the one used for the RS 232 interface the only difference being that the value assigned to the ADDRESS lt ADDR gt T
112. akoz j t 2 a Turbo V 750 850 TwisTorr Pumping System bekapcsol s hoz k ls t pl l val 48 Vcc fesz lts get kell biztos tani 969 6521 3 vigye a v kuumkamr ban a nyom st 0 1 mbarra 4 adjon a Turbo V 750 850 TwisTorr Pumping Systemnek START jelz st az al bbi m dok egyik n a csatlakoztassa a term kkel sz ll tott I O ellencsatlakoz t b adjon t volt l az I O csatlakoz n kereszt l START jelet l sd a J1 REMOTE I O szakaszt a Technical Information f ggel kben c adjon t volt l a Serial RS 232 485 interf szen kereszt l kereszt l START jelet l sd a RS 232 485 Communication Description szakaszt a Technical Information f ggel kben A be p tett controller automatikusan felismeri az INTERLOCK s START jelz seket s elind tja a szivatty t A Soft Start m d a szivatty huzamos ideig val ll s t k vet inditasra szolg l Ez a csap gyakban a ken olaj optim lis eloszl s t teszi lehet v A Soft Start ind t s hoz a megfelel szoftvert vagy t volr l az 1 0 vez rl st kell elind tani l sd az INTERCONNECTION s RS 232 485 COMMUNICATION DESCRIPTION szakaszokat a Technical Information f ggel kben A rendszer rendelkezik egy z ld ledes llapotjelz vel Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 209 406 11 Felhaszn l i K zik nyv A 750 850 TwisTorr Pumping System alapj nak homlokzati panel n l v z ld LED villog s nak gyakor
113. al frequencies of less than 100 Hz Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 395 406 17 Technical Information 6 When the Turbo V 750 850 TwisTorr Pumping System and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump In doing this leave the chamber or the Turbo V vent valve positioned on the enve lope opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating For water cooling shut off the water supply Evidently the default settings can be bypassed and the Controlled Venting Procedure can be eliminated as explained in a previous section of this manual In this case one of the previous described venting procedures can be followed 396 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Pump used in Presence of Magnetic Fields Magnetic fields induce eddy currents in the rotor of a turbomolecular pump that tend to oppose to its rotation The result is increased electrical power consumption by the motor most of which is dissipated in the rotor Since the rotor is not in contact with the stator the above power can leave the rotor mainly by radiation and hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity tim
114. ali stana Waiting for interlock a hitro utripa pribli no 200 ms napaka SVARILO Ko je vzpostavljeno napajanje in je 15 potni protikonektor priklju en se sistem Turbo V 750 850 TwisTorr Pumping System samodejno za ene Prilo eni kontroler je mehansko in elektri no e vezan na rpalko Odklop kontrolerja s rpalke lahko izvedejo samo osebe poobla ene s strani dru be Agilent Vacuum Technologies K Ob zagonu sistema Turbo V 750 850 TwisTorr Pumping System po dalj em obdobju nedelovanja je treba omogo iti posebno funkcijo SOFT START Sistem se zaganja v zaporednih korakih dokler v pribli no 35 minutah ne dose e polne delovne hitrosti Ko sistem dose e polno hitrost se lahko funkcijo soft start onemogo i in slede e zagone se lahko izvede na obi ajen na in Za ohranitev ravni za ite IP 54 uporabljajte izklju no konektorje ki so prilo eni rpalki Za napajalni kabel uporabljajte samo PN 969 9957 ali 969 9958 Ta kabel in vti uporabite skupaj z ustrezno ozemljeno vti nico ki prepre uje elektri ne udare in izpolnjuje zahteve standardov ES 282 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Zaustavitev sistema Turbo V 750 850 TwisTorr Pumping System Za zaustavitev rpalke ravnajte na enega od naslednjih na inov 1 odklopite prilo eni protikonektor I O 2 po ljite oddaljeni signal za zaustavitev STOP preko konektorja I O oglejte
115. angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten Die Hinweise enthalten wichtige Informationen die aus dem Text hervorgehoben werden 36 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Lagerung Um ein H chstma an Effizienz und Zuverl ssigkeit der Agilent Turbomolekularpumpen zu gew hrleisten sind die folgenden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlagerung der Pumpen diirfen die folgenden Grenzwerte nicht iiberschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 90 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets im Modus Soft Start in Gang zu setzen Die Lagerdauer f r eine Turbomolekularpumpe betr gt 10 Monate ab dem Speditionsdatum VORSICHT Falls die Lagerdauer aus verschiedenen Gr nden die genannte Frist berschreiten sollte ist die Pumpe an das Werk zur ckzusenden F r Informationen wenden Sie sich bitte an den rtlichen Agilent Vertreter Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 37 406 2 Gehrauchsanleitung Vor der Installation Modell Turbo V 750 850 TwisTorr Pumping System wird in einer speziellen Schutzverpackung geliefert Eventuelle Transportsch den sind der zust ndigen rtlichen Verkaufsstelle zu melden Modell Turbo V 750 850 TwisTorr Pumping System ist vorsi
116. are responsible for loss or damage in transit e Agilent Technologies is not responsible for returning customer provided packaging or containers e Clearly label package with RA number Using the shipping label provided will ensure the proper address and RA number are on the package Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will be returned Return only products for which the RA was issued Product being returned under a RA must be received within 15 business days Ship to the location specified on the printable label which will be sent along with the RA number as soon as we have received all of the required information Customer is responsible for freight charges on returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier requirements RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION EUROPE NORTH AMERICA PACIFIC RIM Fax 00 39 011 9979 330 Fax Free 00 800 345 345 00 Fax 1 781 860 9252 please visit our website for individual Toll Free 00 800 234 234 00 Toll Free 800 882 7426 Option 3 office information vpt customercare agilent com vpl ra agilent com http www agilent com Pg 1 3 A sj Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please read important policy information on Page 3 that applies to all returns 1 CUSTOMER INFORMATI
117. at was not disclosed the customer will be held responsible for all costs incurred to ensure the safe handling of the product and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product Print Name Authorized Signature Date 5 FAILURE INFORMATION Failure Mode REQUIRED FIELD See next Detailed Description of Malfunction Please provide the error message Application system and model I understand and agree to the terms of Section 6 Page 3 3 Print Name Authorized Signature 1 1 1 1 21 2 1111 Pg 2 3 s Agilent Technologies Vacuum Products Division Request for Return Form Health and Safety Certification Please use these Failure Mode to describe the concern about the product on Page 2 TURBO PUMPS and TURBO CONTROLLERS APPARENT DEFECT MALFUNCTION POSITION PARAMETERS Does not start Noise Vertical Power Rotational Speed Does not spin freely Vibrations Horizontal Current Inlet Pressure Does not reach full speed Leak Upside down Temp 1 Fareline Pressure Mechanical Contact Overtemperature Temp 2 Purge flow Cooling defective Clogging OPERATING TIME ION PUMPS CONTROLLERS VALVES COMPONENTS Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Salenoid failure Damaged flange
118. awienie go na dzia anie atmosfery Mimo to zaleca si aby pompa do momentu jej instalacji na systemie pozosta a zamkni ta w celu unikni cia zanieczyszczenia jej py em 220 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 Turbo 350 TwisTorr Pumping System C POWER PPLY 969 Posta 1 Opakowanie Turbo V 750 850 TwisTorr Pumping System zawiera 1 2 3 Pomp z wbudowanym sterownikiem Inlet screen zamontowany Niniejsz instrukcj obs ugi na CD ROM Pude ko z akcesoriami a Przeciwzlacze 15 drogowe REMOTE I O IP 54 z wbudowanymi pod czeniami koniecznymi do uruchomienia pompy b Przeciwztacze 9 drogowe SERIAL IP 54 do wykorzystania przy podtaczeniu szeregowym Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 221 406 12 Podrecznik Instrukcji Instalacja Usun ta m klej c i zdj korek zabezpieczaj cy tylko w momencie po czenia pompy do systemu 222 406 Posta 2 Zainstalowa ten aparat tylko w zamkni tych miejscach i nie stosowa go w miejscach wystawionych na dzia anie czynnik w atmosferycznych deszcz mr z nieg py w niszcz cych gaz w w rodowiskach wybuchowych lub z wysokim ryzykiem po arowym Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce warunki otoczenia maksymalne ci nienie Z bary ponad ci nieniem atmosferycznym temperatura powietrza od
119. b molekul ris szivattyukhoz 198 Altalanos Inform ci 199 T rol s 201 El k sz t s telep t sre 202 Telep t s 204 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 9 406 Contents 10 406 12 13 A szivattyu r gzitese 205 A Turbo V 750 850 TwisTorr Pumping System Hasznalata 207 Karbantart s 212 Megsemmisites 213 Podrecznik Instrukcji 215 Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 216 Og lne informacje 217 Magazynowanie 219 Przygotowanie do instalacji 220 Instalacja 222 Mocowanie pompy 223 Obs uga Turbo V 750 850 TwisTorr Pumping System 225 Konserwacja 231 Przetworstwo odpadow 232 Navod k Pou iti 233 Bezpe nostn n vod pro Turbomolekul rn v v vy 234 V eobecn informace 235 Uskladn n 237 P prava k instalaci 238 Instalace 240 Upevn n v v vy241 Pou it v v vy Turbo V 750 850 TwisTorr Pumping System243 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Contents Udr ba 249 Likvidace 250 14 N vod na Obsluhu 251 Bezpe nostn n vod pre Turbomolekul rne v vevy 252 V eobecn inform cie 253 Uchov vanie 255 Pr prava na in tal ciu 256 In tal cia 258 Upevnenie v vevy 259 Pou itie zariadenia Turbo V 750 850 TwisTorr Pumping System 261 Udr ba 267 Likvidacia 268 15 Priro nik za Navodila 269 Varnostna navodila za Turbomolekularne rpalke 270 Splo ne informacije 271 Shranjevanje 273 Priprava za monta o
120. bo V 750 850 TwisTorr User Manual 87 901 020 01 A 289 406 16 Instructions for Use This manual uses the following standard protocol WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment The notes contain important information taken from the text 290 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the following guidelines must be followed when shipping moving and storing pumps the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range O to 90 non condensing a the turbomolecular pumps must be always soft started when received and operated for the first time by the customer a the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and Service representative for informations Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 291 406 16 Instruct
121. chtig auszupacken wobei es vor dem Herunterfallen und vor St en und Vibrationen zu sch tzen ist Einige Modelle wiegen mehr als 18 Kg Modell 969 8814 969 8816 969 6014 969 6016 969 6017 In diesen F llen muss die Handhabung der Pumpe mithilfe geeigneter Hebemittel oder durch mindestens zwei Personen erfolgen VORSICHT Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recycelbar und entspricht der Richtlinie 94 62 EG und nachfolgender Anderungen f r den Umweltschutz Um Entgasungen zu vermeiden d rfen die Teile die mit dem Vakuum in Ber hrung kommen nicht mit den blo en H nden angefasst werden Es sind stets Schutzhandschuhe oder andere Schutzmittel zu verwenden Modell Turbo V 750 850 TwisTorr Pumping System kann durch die Umgebung an sich keine Sch den erleiden Es sollte jedoch bis zur Installation an der Anlage geschlossen bleiben um Verunreinigungen durch Staub zu vermeiden 38 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Turdo gt 0 850 TwisTorr Pumpin stem C POWER SUPPLY 969 652 Abbildung 1 Die Verpackung des Turbo V 750 850 TwisTorr Pumping Systems besteht aus 1 Pumpe mit integriertem Controller 2 Zulaufsiebung montiert 3 Dieses Bedienungshandbuch auf CD ROM 4 Schachtel mit Zubeh r a Gegenstecker 15 fach REMOTE 1 0 IP 54 mit den notwendigen Anschl ssen um die Pumpe zu starten b
122. chwere Verletzungen oder Tod verursachen Das Turbo V 750 850 TwisTorr Pumping System kann in jeder Position installiert werden Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 000 Nm um die eigene Achse standhalten Der Flansch ISO K kann mit sehr widerstandsfahigen Stahlzwingen befestigt werden Modelltyp Agilent IC 63250 DCMZ Die nachfolgende Tabelle beschreibt f r jede Flanschgr e die Anzahl der notwendigen Zwingen IC63250DCMZ und mit welchem Anzugsmoment sie festzuschrauben sind Tab 1 FLANSCH ANZ ANZUGSMOMENT ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Die nachfolgende Tabelle beschreibt f r jeden Flansch ISO F die Anzahl der notwendigen Stahlschrauben und mit welchem Anzugsmoment sie gem Empfehlung von Agilent festzuschrauben sind Tab 2 FLANSCH SCHRAUBEN GR SSE ANZ ANZUGSMOMENT ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Die Widerstandsklasse der Stahlschrauben f r den Flansch F muss 12 9 sein Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 41 406 2 Gehrauchsanleitung Die nachfolgende Tabelle beschreibt fiir jeden Flansch CF die Anzahl der notwendigen Schrauben und mit welchem Anzugsmoment sie gemaB Empfehlung von Agilent festzuschrauben sind Man empfiehlt die Verwendung von passendem Agilent Material Fiir eine detaillierte Beschreibung bitte im Anhang Technical Information nachschauen
123. ctor SERIAL IP 54 te gebruiken voor de seri le verbinding Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 113 406 6 Bedrijfshandleiding Installatie Oye Alleen op het moment waarop de turbopomp op het systeem wordt aangesloten mogen de sticker en de beschermdop verwijderd worden 114 406 Figuur 2 Installeer dit apparaat uitsluitend in gesloten ruimten en gebruik het in elk geval niet in ruimten die aan de weersomstandigheden regen vorst sneeuw stof of agressieve gassen zijn blootgesteld of in ruimten met explosiegevaar of groot risico op brand Tijdens de werking moeten de volgende omgevingscondities aanwezig zijn max druk Z bar boven de atmosferische druk temperatuur van 5 C tot 45 C a relatieve vochtigheid O 90 niet condenserend In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie Het Turbo V 750 850 TwisTorr Pumping System moet op een primaire pomp aangesloten zijn zie schema in Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Bevestiging van de pomp VY RIM OVINOS Indien deze installatie instructies niet worden opgevolgd kan bij optreden van een defect aan de rotor de pomp van het systeem losraken met als gevolg schade aan voorwerpen of ernstig letsel of levensgevaar voor personen He
124. d default 126 R W N Vent valve opening delay expressed 0 to 65535 in 0 2 sec Corresponding to 0 to 13107 sec Default 1 143 R W N External Fan Configuration 0 0N 364 406 1 automatic 2 serial default 2 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 N Read Write Data Description Admitted Type Values 144 R W L External Fan activation 0 OFF 1 0N default 0 145 R W L Set purge Valve open close 0 close N C 1 open Default 1 147 R W N Vent Valve opening Time 0 to 65535 bit expressed in 0 2 sec 0 infinite 1 0 2 sec Max 13107 sec default 0 155 R N Power Limit Applied W 157 R W L Gas Load Type 0 Ar 1 N2 default 0 167 R W L Stop Speed Reading 0 No 1 Yes default 1 186 R W L Leak check mode 0 disabled 1 enabled default 0 200 R N Pump current in mA dc 201 R N 3 phase voltage in Vdc 202 R N Pump power in W pump current x pump voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 205 R N Pump status Stop lt 0 Waiting intlk 1 Starting 2 Auto tuning 3 Braking 4 Normal 5 Fail 6 Leak Check 7 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 365 406 17 Technical Information N Read Write Data Description Admitted Type Values 206 R N Error code Bit description see the following figure Electronics temperature C Body temperature C Rotational frequency Hz D 3 DI
125. d herein including but not limited to the implied warranties of merchantability and fitness for a particular purpose Agilent shall not be liable for errors or for incidental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime contract or subcontract Software is delivered and licensed as Commercial computer software as defined in DFAR 252 227 7014 June 1995 or as a commercial item as defined in FAR 2 101 a or as Restricted computer software as defined in FAR 52 227 19 June 1987 or any equivalent agency regulation or contract clause Use duplication or disclosure of Software is subject to Agilent Technologies standard commercial license terms and non DOD Departments and Agencies of the U S Government will receive no greater than Restricted Rights as defined in FAR 52 227 19 c 1 2 June 1987 U S Government users will receive no gr
126. das instruc es originais Agilent Technologies 39 40 5 Manual de Istru es Indicac es de Seguranca para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de Instru es tem uma alta quantidade de energia cin tica devida alta velocidade de rotac o unida a massa especifica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rotor a energia de rotac o poderia ser liberada ATENCAO Para evitar danos a aparelhagem e prevenir les es aos operadores necessario seguir atentamente as instruc es de instalac o descritas neste manual 90 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Informac es gerais Esta aparelhagem destina se a uso profissional O utilizador deve ler atentamente o presente manual de instruc es e todas as informac es adicionais fornecidas pela Agilent antes de utilizar a aparelhagem A Agilent n o se responsabiliza pela inobserv ncia total ou parcial das instruc es pelo uso indevido por parte de pessoas n o treinadas por operac es n o autorizadas ou pelo uso contrario s normas nacionais especificas O Turbo V 750 850 TwisTorr Pumping System um sistema integrado constituido por uma bomba turbomolecular para aplicac es de alto e ultra alto vacuo integrada no relativo controller O sistema capaz de bombear gualguer tipo de ga
127. dertil egnede skjermer Se Technical Information for detaljer Turbo V 750 850 TwisTorr Pumping System m koples til en hovedpumpe se skjema i Technical information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instruksjon Manual 9 Festing av pumpen ONIN EIN Manglende overholdelse av disse installasjonsanvisningene i tilfelle det oppstar et problem med eller en skade pa rotoren kan medf re at pumpen kobles fra systemet og dermed forarsake skader alvorlig personskader eller d d Turbo V 750 850 TwisTorr Pumping System kan installeres i hvilken som helst posisjon Fest Turbo V 750 850 TwisTorr Pumping System i en stabil posisjon monter turbopumpens innl psflens til systemets motflens med en tilkopling som er i stand til tale et dreiemoment p 8000 Nm rundt sin egen akse Flensen ISO K kan festes ved bruk av motstandsdyktige skruklemmer i stal type modell Agilent IC 63250 DCMZ F lgende tabell beskriver for hver type flense antallet pakrevde klemskruer IC63250DCMZ og hvilket dreiemoment som skal brukes for a stramme dem Tab 1 FLENS ANT STRAMMEMOMENT ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm F lgende tabell beskriver for hver type flense ISO F antallet pakrevde stalskruer og hvilket dreiemoment som skal brukes for a stramme dem i samsvar med anbefalingene fra Agilent Tab 2 FLENS STORRELSE PA SKRUER ANT STRAMMEMOMENT ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Mots
128. e 277 Uporaba sistema Turbo V 750 850 TwisTorr Pumping System 279 Zagon sistema Turbo V 750 850 TwisTorr Pumping System281 Zaustavitev sistema Turbo V 750 850 TwisTorr Pumping System 283 Zaustavitez v sili 283 Vzdr evanje 284 Odlaganje opadkov 285 Prevod navodil v izvirniku 5 Agilent Technologies 259 406 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke Turbomolekularne rpalke opisane v naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko sprosti rotacijska energija SVARILO Da bi se izognili po kodbam opreme in prepre ili po kodbe osebja morate natan no slediti navodilom za name anje iz tega priro nika 270 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Splo ne informacije Oprema je namenjena za profesionalno uporabo Pred uporabo mora uporabnik prebrati navodila za uporabo in vse dodatne informacije ki mu jih je posredoval Agilent Agilent ni odgovoren za dogodke ki bi nastali zaradi neupo tevanja teh navodil nepravilne uporabe in nepoobla enega poseganja v opremo ali kakr nega koli dejanja ki niso v skladu s standardi Turbo V 750 850 TwisTorr Pumping System je integriran sistem s turbomolekularno rpalko za visoko in ultra viso
129. e Istruc es Instalac o CUIDADO Remover a etigueta autocolante e retirar a tampa de protecc o somente no momento de ligar a turbobomba ao sistema 96 406 Figura 2 Instale este eguipamento somente em locais fechados e para todos os efeitos n o utilize o eguipamento em ambientes expostos aos efeitos delet rios do tempo chuva gelo neve em ambientes sujeitos a p gases agressivos ambientes explosivos ou com alto risco de inc ndio Durante o funcionamento necess rio gue sejam respeitadas as seguintes condic es ambientais press o m xima 2 bar al m da press o atmosf rica temperatura de 5 C a 45 C consultar a planilha no ap ndice Technical Information a humidade relativa O 90 n o condensante Na presenca de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O Turbo V 750 850 TwisTorr Pumping System deve ser ligado a uma bomba prim ria consultar esquema em Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Fixacao da bomba ATENCAO A inobserv ncia destas instruc es de instalac o caso sejam verificadas avarias do rotor pode provocar o desengate da bomba do sistema causando danos feridas graves ou at mesmo a morte 0 Turbo V 750 850 TwisTorr Pumping System pode ser ins
130. e PROGRAMMABLE SET POINT signal has the following default settings a reference quantity frequency threshold 742 Hz a hysteresis 2 a activation type high level delay time O second PURGE VENT VALVES the Turbo V 750 850 TwisTorr Pumping System can integrate the Purge and Vent valves The two valves are Normally Closed N C so if a power fail occurs the valves will remain closed The valves operating mode can be set only by serial line with WIN 125 WIN 122 and WIN 145 see following diagram for details Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 347 406 17 Technical Information Interconnections 1 z On Command mode 2 Auto Pump Speed mode Win 122 set the VENT valve Open 1 Win 126 set the Vent Valve Opening Delay Close 0 ime Win 147 set the Vent Valve Open Time Win 145 set the PURGE valve O Autotime mode Open 1 Close 0 Command START o Status Speed Fail Vent and Purge Purge Valve CLOSED OPEN 1670 Power Fail Vent and Win 147 0 Purge CLOSED CLOSED m JAD 18570 Vent Valve Win 147 0 Controlled Venting Win 147 0 Figure 48 348 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Auto Pump Speed Mode with Purge Vent Device Accessory Only The default setting for vent operating mode is Au to Pump Speed Win 125 2 When activated the procedure guarantees t
131. e er lukket med lukkeflangen R r aldrig ved turbopumpen og dens eventuelle ekstraudstyr under opvarmningen Den h je temperatur kan give forbr ndinger Abile Undg st d svingninger eller pludselige bev gelser af pumpen n r den er i drift Kuglelejerne kan blive beskadigede Til fremf ring af luft fra pumpen skal der anvendes luft eller inerte gasser fri for st v og partikler Indgangstrykket gennem den relevante bning skal v re under 2 bar over det atmosf riske tryk For at pumpe gas der indeholder partikler eller forurenende stoffer som kan beskadige kuglelejerne er disse pumper udstyret med en bning eller en specifik anordning til purge vent som ekstraudstyr gennem hvilken det er n dvendigt at forsyne pumpen med inerte gasser nitrogen helium eller argon for at beskytte pumpens kuglelejer se bilaget Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 135 406 7 Istruktionsbog dijiste le Anvend aldrig pumpen hvis der forefindes tsende gasser eller dampe som kan beskadige pumpens inerte materialer N r pumpen anvendes til at pumpe giftige br ndbare eller radioaktive gasser skal de passende standardprocedurer for hver slags gas anvendes Anvend ikke pumpen ved tilstedev relse af eksplosive gasser Pumpen er projekteret til at pumpe nitrogen argon og lettere gasser S fremt der er behov for at pumpe gas som er tungere end argon bedes man kontakte Agilents tekn
132. e following figures show the Turbo V 750 850 TwisTorr Pumping System outlines dimensions are in mm inches i i i ISO 160K Turbo 700 Tutu Torr Figure 16 Turbo V 750 TwisTorr Pumping System ISO 160 K 969 8813 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 319 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline 1 91 48 4 0 47 12 1 43 36 4 Figure 17 Turbo V 750 TwisTorr Pumping System CFF 8 969 8814 320 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline rum wenn a Dup wapen 40 LON OG Figure 18 Turbo V 850 TwisTorr Pumping System ISO 200 K 969 8815 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 321 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline 1 43 36 4 Figure 19 Turbo V 850 TwisTorr Pumping System CFF 10 969 8816 322 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline 4 33 110 Turbo V 750 TwisTorr Pumping System ISO 160 F 969 8818 Figure 20 323 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 17 Technical Information Turbo V 750 850 TwisTorr Pumping Syst
133. e function and distribution of the magnetic field In general therefore an increase in pump current can be expected If this increase is lower than 50 of the current value drawn by the motor in high vacuum operation no particular problem should be expected However if the effect is greater than the case should be carefully reviewed by Agilent s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and applied to the rotor Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 397 406 17 Technical Information Accessories and Spare Parts Tab 10 Accessories and spare parts Description Part number TURBO V 750 850 TWISTORR POWER SUPPLY 5 m CABLE 969 6521 T Plus software and serial cable 969 9883 e aa an i AM Mains cable European Plug 3m long 969 9957 TURBO V 750 850 TWISTORR 10 m PUMP EXTENSION CABLE 969 6518 TURBO V 750 850 TWISTORR 20 m PUMP EXTENSION CABLE 969 6519 Inlet screen CFF 6 969 9302 Inlet screen ISO 160 and CFF 8 969 9304 i Tr o SMAR Water cooling kit plastic model 969 9347 Water cooling kit metallic model TURBO V 750 850 TWISTORR FAN 969 6503 TURBO V 750 850 TWISTORR FAN 5 m EXTENSION CABLE 969 6514 TURBO V 750 850 TWISTORR FAN 15 m EXTENSION CABLE 969 6515 TURBO V 750 850 TWISTORR FAN 25 m EXTENSION CABLE 9 69 6516 Vibration isolator ISO 160 969 9345 Vibration isolator ISO 200 969 9346 ET i E ze Vibration isolator
134. e purge vent int gr a travers leguel il est n cessaire de fournir a la pompe un flux de gaz inerte azote h lium ou argon pour prot ger les roulements de la pompe cf annexe Technical Information ATTENTION N utilisez jamais la pompe en pr sence de gaz ou de vapeurs corrosives risguant d endommager les mat riaux internes de la pompe AVERTISSEMENT Quand la pompe est utilis e pour le pompage de gaz toxiques inflammables ou radioactifs respectez les proc dures sp cifigues a chaque gaz N utilisez pas la pompe en pr sence de gaz explosifs La pompe est concue pour pomper de l azote de l argon et des gaz plus l gers En cas de n cessit de pomper des gaz plus lourds que l argon veuillez prendre contact avec l assistance technique de Agilent pour plus d informations Comment demarrer le Turbo V 750 850 TwisTorr Pumping System 62 406 Avant de d marrer le syst me v rifiez que le contre connecteur E S est d mont Si le syst me est raccord un dispositif d E S distant v rifiez que le signal de STOP est activ cf paragraphe J1 REMOTE 1 0 l annexe Technical Information Pour d marrer le syst me proc dez comme suit Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 1 d montez si pr sent le contre connecteur E S du syst me 2 pour mettre en marche le Turbo V 750 850 TwisTorr Pumping System celui ci doit tre aliment par une tension de 48 VC
135. eater than Limited Rights as defined in FAR 52 227 14 June 1987 or DFAR 252 227 7015 b 2 November 1995 as applicable in any technical data Trademarks Windows and MS Windows are U S registered trademarks of Microsoft Corporation Safety Notices A CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in damage to the product or loss of important data Do not proceed beyond a CAUTION notice until the indicated conditions are fully understood and met A WARNING notice denotes a hazard It calls attention to an operating procedure practice or the like that if not correctly performed or adhered to could result in personal injury or death Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr Turbo V 750 850 TwisTorr Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 3 406 Turbo V 750 850 TwisTorr 4 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Contents Contents 1 Istruzioni per l uso 15 Indicazioni di Sicurezza per Pompe Turbomolecolari 16 Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 20 Installazione 22 Fissaggio della pompa 23 Uso del Turbo V 750 850 TwisTorr Pumping System 25 Manut
136. echnical Information Figure 70 4 Add to the connection cable the proper exten sion cable models 969 6514 969 6515 969 6516 969 6517 needed to reach the control ler Insert the plug in the connection P2 on the rack controller rear panel Start the FAN as explained in the following section Drive the external fan Drive the External Fan There are three different ways to drive the external Fan 1 378 406 Always ON Set the serial command WIN 143 0 value in WIN 144 is not considered Automatic the external fan is always ON during the Ramp status and On Command when the pump reaches the target speed That means that WIN 144 determines the Fan status when the pump reaches the normal status Set WIN 143 1 WIN 144 1 external fan ON or WIN 144 0 external fan OFF Serial the fan behaviour depends only on WIN 144 value Set WIN 143 2 WIN 144 1 external fan ON or WIN 144 0 external fan OFF Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Water Gooling Kit Connection The Turbo V 750 850 TwisTorr Pumping System has a water cooling loop made of a corrosion re sistant stainless steel pipe with two standard 1 8 G connections Two types of water cooling kits are available to be mounted The two model part numbers are 969 9337 metallic model and 969 9347 plastic model Figure 71 M
137. edingseenheid 969 6521 3 breng de druk in de vacuiimkamer op 0 1 mbar 4 geef het Turbo V 750 850 TwisTorr Pumping System op een van de volgende manieren het START signaal a sluit de bijgeleverde I O contraconnector aan b geef een remote START signaal via de I O connector zie paragraaf J1 REMOTE I O in de bijlage Technical Information c geef een remote START signaal via de seri le interface RS 232 485 zie paragraaf RS 232 485 Communication Description in de bijlage Technical Information De ingebouwde controller herkent de aanwezigheid van INTERLOCK en START signalen automatisch en start de pomp De Soft Start modus is voorzien om de pomp na een langdurige periode van stilstand in te schakelen Hierdoor kan het vet in de lagers optimaal worden verdeeld Om met Soft Start te starten moet deze modus via de software of een remote I O sturing worden vrijgegeven zie de paragrafen INTERCONNECTION en RS 232 485 COMMUNICATION DESCRIPTION in de bijlage Technical Information Het systeem is voorzien van een statussignaal met een groene led Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 119 406 6 Bedrijfshandleiding De groene LED op het voorpaneel van de basis van het 750 850 TwisTorr Pumping System geeft door de frequentie waarmee hij knippert de werkcondities van het systeem aan brandt onafgebroken de pomp draait normaal a knippert langzaam periode van circa 400 ms het systeem is i
138. een mounted This instruction manual on CD ROM Accessories bag a 15 pin mating connector IP 54 for REMOTE I O connector with all the interconnections necessary to start the pump b 9 pin mating connector IP 54 for SERIAL connector to be used for serial connection Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 293 406 16 Instructions for Use Installation CAUTION Do not remove the bolted cap before connecting the tur bopump to the system 294 406 Figure 2 Install this device only in indoors ambient and in any case don t use in an environment exposed to atmospheric agents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected maximum pressure 2 bar above atmospheric pressure air temperature from 5 C to 45 C a relative humidity 0 90 non condensing In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The Turbo V 750 850 TwisTorr Pumping System must be connected to a primary pump see Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 Pump Fixing WARNING Failure to comply with these installation instructions could result in the pump detaching from the system in the event of
139. eg owych informacji zamieszczono w za czniku Technical Information Nigdy nie uruchamia pompy je eli ko nierz wej ciowy nie jest pod czony do komory pr niowej lub nie jest zamkni ty odpowiednim ko nierzem zamykaj cym Nie dotyka turbopompy i jej ewentualnych akcesori w podczas operacji nagrzewania Wysoka temperatura mo e doprowadzi do obra e cielesnych Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 225 406 12 Podrecznik Instrukcji Unika uderze wahnie gwa townych przesuni podczas dzia ania pompy Takie sytuacje mog doprowadzi do uszkodzenia o ysk Do przewietrzania pompy nale y stosowa powietrze lub gaz oboj tny pozbawione py w i cz steczek sta ych Ci nienie w otworze wlotowym musi by ni sze od 2 bar powy ej ci nienia atmosferycznego W celu pompowania gaz w zwieraj cych cz stki lub substancje agresywne do o ysk pompy te zosta y wyposa one w odpowiedni wlot lub specjalne dodatkowe wbudowane urz dzenie purge vent poprzez kt re nale y wprowadzi do pompy strumie gazu oboj tnego azot hel lub argon w celu zabezpieczenia o ysk pompy wi cej informacji podano w za czniku Technical Information Nigdy nie stosowa pompy w obecno ci gaz w lub opar w powoduj cych korozj poniewa mog one uszkodzi elementy wewn trzne pompy ZAGROZENIE Kiedy pompa jest stosowana do pompowania gaz w toksycznych palnych lub
140. ego za po rednictwem z cza I O patrz punkt J1 REMOTE 1 0 w za czniku Technical Information 3 przes anie sygna u STOP z urz dzenia zdalnego za po rednictwem interfejsu szeregowego RS 232 485 patrz punkt RS 232 485 Communication Description w za czniku Technical Information ZAGROZENIE Dla bezpiecze stwa operatora zasilacz 969 6521 TV750 850 TwisTorr Pumping System musi by zasilany za pomoc kabla 3 y owego patrz punkt ACCESSORIES AND SPARE PARTS w za czniku Technical Information wyposa onego we wtyczk zatwierdzon na poziomie mi dzynarodowym Ten kabel i wtyczk nale y stosowa razem z odpowiednio uziemionym gniazdkiem aby unikn pora enia pr dem elektrycznym i w celu spe nienia wymaga norm CE Wysokie napi cie jakie pojawia si w sterowniku mo e doprowadzi do powa nych obra e a nawet mierci Przed przyst pieniem do realizacji prac konserwacyjnych wewn trz jednostki nale y od czy kabel zasilania Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 229 406 12 Podrecznik Instrukcji Zatrzymanie Alarmowe Aby natychmiast zatrzyma Turbo V 750 850 TwisTorr Pumping System w przypadku zagro enia nale y od czy kabel zasilania od r d a zasilania Nale y jednak pami ta e tego typu dzia anie prowadzi nie tylko do ca kowitego odci cia zasilania pompy ale powoduje r wnie wy czenie wszystkich innych funkcji sterownika ta
141. eksi suorittakaa seuraavat toimenpiteet 1 irrottakaa jos paikalla j rjestelm n vastaliitin I O 2 Turbo V 750 850 TwisTorr Pumping Systemin k ynnist miseksi on tarpeen sy tt 48 Vcc virtaa ulkoisen tehonl hteen kautta 969 6521 3 asettakaa tyhji kammion sis inen paine 0 1 mbariin 4 sy tt k Turbo V 750 850 TwisTorr Pumping Systemille START signaali yhdell seuraavista tavoista a liitt k varustuksiin kuuluva I O vastaliitin b sy tt k START signaali kauko ohjauksesta liittimen I O avulla ks kappale J1 REMOTE I O liitteest Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Ohjekasikirja 10 c syottakaa START signaali kauko ohjauksella sarjaliitinnan RS 232 485 kautta ks kappale RS 232 485 Communication Description liitteesta Technical Information Integroitu controller tunnistaa automaattisesti INTERLOCK ja START signaalin ja k ynnist pumpun Soft Start tila on k ytett viss pumpun k ynnist miseksi pitkan seisokkiajan jalkeen Talla tavoin rasva saadaan leviimaan tasaisesti laakereihin Soft Start tavan aktivoimiseksi on k ytett v tarkoituksenmukaista ohjelmistoa tai kaukok ytt ist I O ohjausta ks kappaleet INTERCONNECTION ja RS 232 485 COMMUNICATION DESCRIPTION liitteesta Technical Information J rjestelm n kuuluu tilaan liittyva signaali jossa on vihre led valo 750 850 TwisTorr Pumping Systemin ja
142. el en s lyos s r l shez vezethet TANT A Figyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem k vetnek a berendez s k rosod s t okozhatj k A megjegyz sek a sz vegb l vett fontos inform ci t tartalmaznak 200 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 T rol s A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek garant l s ra a k vetkez tmutat sokat kell k vetni szivatty k sz ll t sakor mozgat sakor s t rol sakor a k vetkez k rnyezeti param tereket nem szabad t ll pni h6m rs klettartomany 20 C 70 C relativ p ratartalom O 90 nem kondenz l a A turbomolekularis szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbonukle ris szivatty raktarozhatasi ideje 10 h nap a sz ll t s d tum t l FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuumkereskedelmi s szolg ltat si k pviselethez Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 201 406 11 Felhaszn l i K zik nyv El k sz t s telep t sre A Turbo V 750 850 TwisTorr Pumping System et k l nleges v d csomagol sban sz ll tj k Ha ez s r l s jeleit mutatja ami sz ll t s k zben fe
143. elio ou Argon para proteger os rolamentos da bomba ver o apendice Technical Information Nunca usar a bomba na presenca de gases ou vapores corrosivos que possam danificar os materiais internos da bomba ATENCAO Ouando a bomba for utilizada para a bombagem de gases t xicos inflam veis ou radioactivos seguir os procedimentos normais adeguados para gualguer tipo de g s N o usar a bomba na presenca de gases explosivos A bomba est projectada para bombear Nitrog nio Argon e gases mais ligeiros Caso seja necess rio bombear gases mais pesados gue o Argon pede se entrar em contacto com a Assistencia Tecnica da Agilent para mais informac es 100 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Como arrancar o Turbo V 750 850 TwisTorr Pumping System Antes do arranque do sistema verificar que o contra conector I O seja removido Se o sistema estiver conectado a um dispositivo de I O remoto certificar se de que o sinal de STOP esteja activo ver o paragrafo J1 REMOTE I O no ap ndice Technical Information Para arrancar o sistema realizar os seguintes passos 1 remover se presente o contra conector I O do sistema 2 para ligar o Turbo V 750 850 TwisTorr Pumping System necessario fornecer uma tens o de 48 Vcc atrav s de um Alimentador externo 969 6521 3 colocar a press o no interior da c mara de vacuo em 0 1 mbar 4 fornecer ao Turbo V 750 850 Twis
144. em Leaving the Turbo V 750 850 TwisTorr Pumping System and the backing pump running and the purge gas flowing wait for enough time to evacuate the process gases from the system e g to reach the typical basic process pressure Then close the gate valve connecting the Turbo pump to the chamber if present Switch off the backing pump or close a fore vacuum valve if present Turn off the Turbo pump by sending the STOP signal to the controller Open the Turbo V vent port positioned on the envelope slowly until to reach atmospheric pressure in the system To safely slow down the pump use a venting flow able to decelerate the rotor at a rate lower than 5 Hz s To monitor the deceleration rate activate the Stop Speed Reading function by serial line WIN 167 and read the pump rotational speed through WIN 232 394 406 When the Turbo V 750 850 TwisTorr Pumping System and the backing pump are stopped and the system is at atmospheric pressure for a better bearing protection it is advisable to leave the purge gas flowing into the Turbo V pump In doing this leave the chamber or the Turbo V vent valve positioned on the envelope opened to avoid system overpressures If the vent valve can t be kept opened the backing pump should be left operating For water cooling shut off the water supply Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 WART The described venting modality should be
145. em Outline Figure 21 Turbo V 750 TwisTorr Pumping System ISO 160 F 969 8819 324 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline 4 80 122 4 15 105 5 WATER COOLING 1 8 G total vertical space required for pump connector elbow type insertion Figure 22 Turbo V 750 TwisTorr Pump ISO 160 K 969 6013 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 325 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline 4 80 122 2 68 CFF8 total vertical space reguired for pump connector elbow type insertion Figure23 Turbo V 750 TwisTorr Pump CFF 8 969 6014 326 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline 4 80 122 4 15 105 5 total vertical space required for pump connector elbow type insertion Figure 24 Turbo V 850 TwisTorr Pump ISO 200 K 969 6015 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 327 406 17 Technical Information Turbo V 750 850 TwisTorr Pumping System Outline WATER COOLING 1 8 G CFF10 total vertical space required for pump connector elbow type insertion Figure
146. emo liwi dost p do cz ci elektrycznych Upewni si czy izolacja urz dzenia pod czonego do Turbo V 750 850 TwisTorr Pumping System zachowuje odpowiedni poziom odizolowania r wnie przy pojedynczym uszkodzeniu zgodnie z zaleceniami normy EN 61010 1 224 406 Informacje na temat zainstalowania wyposa ania opcjonalnego podano w za czniku Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 Obs uga Turbo V 750 850 TwisTorr Pumping System W tym punkcie podano podstawowe procedury operacyjne Przed rozpocz ciem wykorzystywania systemu nale y wykona wszystkie pod czenia elektryczne i pneumatyczne Podczas ewentualnego nagrzewania komory pr niowej temperatura na ko nierzu wej ciowym nie mo e przekroczy 80 C Operator musi si upewni czy zosta ustawiony odpowiedni tryb ch odzenia WIN 106 1 dla ch odzenia wod O dla ch odzenia powietrzem o obiegu wymuszonym tryb standardowy default poprzez odpowiednie ustawienie szeregowego elementu sterowania WIN 106 Wi cej szczeg owych informacji zamieszczono w za czniku Technical Information Operator musi si upewni czy zosta ustawiony odpowiedni tryb dzia ania w zale no ci od pompowanego gazu WIN 157 1 dla N i gaz w l ejszych 0 dla Argonu tryb standardowy default poprzez odpowiednie ustawienie szeregowego elementu sterowania WIN 157 Wi cej szcz
147. en med regn is sn damm fr tande gaser eller i omraden med h g explosions eller brandrisk F ljande krav p omgivningsf rh llanden g ller vid drift maximitryck 2 bar over atmosf riskt tryck temperatur fran 5 C till 45 C a relativ luftfuktighet O 90 utan kondens I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar Turbo V 750 850 TwisTorr Pumping System m ste anslutas till en huvudpump se schemat i Technical information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 Fastsattning av pump VARNING Om dessa installationsinstruktioner inte iakttas kan det orsaka att pumpen kopplas fr n systemet om det uppst r skada p rotorn vilket orsakar skador allvarliga kroppsskador eller d den Turbo V 750 850 TwisTorr Pumping System kan installeras i vilken som helst position F st Turbo V 750 850 TwisTorr Pumping System i ett stabilt l ge genom att ansluta turbopumpens intagsfl ns till systemets fl ns som m ste t la ett vridmoment p 8000 Nm kring sin axel Fl nset ISO K kan f stas med hj lp av kl mmor av st l med h g motst ndskraft typ modellen Agilent IC 63250 DCMZ F ljande tabell beskriver f r varje dimension av fl nset antalet kl mmor IC63250DCMZ som kr vs och med vilket moment som de skall skruvas t Tab 1 FL NS ANT TDRAGNINGS M
148. endice Technical Information AAV Quando viene fornita l alimentazione ed il controconnettore a 15 pin in dotazione inserito il Turbo V 750 850 TwisTorr Pumping System si avvia automaticamente mia kalan Il controller viene fornito gi connesso meccanicamente ed elettricamente alla pompa La separazione del controller dal corpo pompa pu solo essere effettuata da personale autorizzato dalla Agilent Vacuum Technologies Quando si avvia il Turbo V 750 850 TwisTorr Pumping System dopo un periodo di fermo prolungato prima di avviare il sistema deve essere attivata la speciale funzione SOFT START Il sistema viene avviato a passi successivi fino alla piena velocit in un tempo di circa 35 minuti Dopo che il sistema ha raggiunto la piena velocit la procedura di soft start pu essere disabilitata e gli avvii successivi possono essere eseguiti nel modo normale Per mantenere il livello di protezione IP 54 utilizzare esclusi vamente i connettori forniti con la pompa Per il cavo di alimentazione utilizzare solo i PN 969 9957 or 969 9958 Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 27 406 1 Istruzioni per l uso Come arrestare il Turbo V 750 850 TwisTorr Pumping System Per arrestare la pompa si pu usare uno dei seguenti metodi 1 togliendo il c
149. ens niet meer dan 80 C bedragen De bediener moet controleren of de juiste koelmethode is voorbereid WIN 106 1 voor waterkoeling O voor geforceerde luchtkoeling standaard modus door de seri le besturing WIN 106 in te stellen Raadpleeg Technical Information voor nadere gegevens De bediener moet ervoor zorgen dat de juiste bedrijfsmodus is gekozen op basis van het te verpompen gas WIN 157 1 voor N en lichtere gassen 0 voor Argon standaardmodus door de seri le besturing WIN 157 in te stellen Raadpleeg Technical Information voor nadere gegevens WAARSCHUWING Laat de pomp nooit draaien als de inlaatflens niet op de vacuiimkamer is aangesloten of als de afsluitflens niet gesloten is Raak de turbopomp en eventuele accessoires niet aan tijdens het verwarmen De hoge temperatuur kan lichamelijk letsel veroorzaken Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 117 406 6 Bedrijfshandleiding u rate tie Vermijd schokken trillingen of bruuske verplaatsingen van de pomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pomp lucht of inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmosferische druk bedragen Deze pompen zijn voor het pompen van gassen met roetdeeltjes of vervuilende stoffen die de lagers aantasten van een speciale poort of een specifiek ingebouwd purge vent acce
150. ensante a il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start guando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione agaaa Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per ogni informazione si prega di contattare il locale rappresentante della Agilent Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 19 406 1 Istruzioni per l uso Preparazione per l installazione Il Turbo V 750 850 TwisTorr Pumping System viene fornito in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere il Turbo V 750 850 TwisTorr Pumping System e a non sottoporlo ad urti o vibrazioni VAU AL Ny Alcuni modelli pesano oltre 18 Kg modelli 969 8814 969 8816 969 6014 969 6016 969 6017 In questi casi la manipolazione della pompa deve avvenire con l ausilio di idonei mezzi di sollevamento o almeno di due persone ATTENZIONE Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva per la tutela dell ambiente 94 62 CE e successive modifiche Onde evitare problemi di degasamento non toccare con le mani n
151. ent temperature gt 35 C Minimum flow 100 1 h 0 89 GPM Temperature 15 C to 30 C Pressure 3 to 5 bar 45 to 75 psi FAN off lt 52 dB A at 1 meter FAN on lt 55 dB A at 1 meter 100 240 Vac 10 50 60 Hz 550 VA 450 W 48 Vdc 10 DC 450 W 400 W Ramp status 300 W Normal Autotuning status with water cooling 200 W Normal Autotuning status with forced air cooling IP54 UNI EN 292 2 EN 61010 1 2001 EN 61326 1 2006 Emission level Class B for Residential Application With European or NEMA plug 3 meters long optional RS232 cable with a 9 pin D type male connector and a 9 pin D type female connector and T Plus software optional 317 406 17 Technical Information Technical Specification Pollution degree 2 Storage temperature 20 C to 70 C Weight kg Ibs Pumping System Pump ISO 160 K 15 9 35 1 15 7 35 0 CF 8 22 5 49 6 22 3 49 2 ISO 200 K 16 1 35 5 15 8 35 0 CF 10 22 6 50 0 22 4 49 4 CF 6 22 0 48 5 ISO 160 F 16 7 37 16 5 36 5 ISO 200 F 17 37 5 16 8 37 When the Turbo V 750 850 TwisTorr Pumping Sys tem has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature 318 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Turbo V 750 850 TwisTorr Pumping System Outline Turbo V 750 850 TwisTorr Pumping System Outline Th
152. ente a alimentacao da bomba desabilita tamb m todas as outras funcionalidades do controller como por exemplo a gest o do Purge e do Vent Controlado e a capacidade de comunicar com o sistema no gual a bomba esta integrada via I Os Serial ou Profibus Al m disso esta opera o pode n o garantir a paragem imediata do rotor cuja velocidade de rota o diminuir em fun o do grau de vazio presente no sistema Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Manutencao O Turbo V 750 850 TwisTorr Pumping System n o requer qualquer manutenc o Todas as operac es devem ser efectuadas por pessoal autorizado ATENCAO Antes de executar gualguer operac o no sistema deslig lo da alimentac o introduzir ar na bomba abrindo a v lvula especifica aguardar at a completa paragem do rotor e at gue a temperatura superficial da bomba seja inferior a 50 C Em caso de defeito possivel usufruir do servi o de assistencia Agilent ou do Agilent advanced exchange service que permite obter um sistema regenerado que substitua a bomba com defeito Antes de reenviar ao fabricante um sistema para as repara es ou o advanced exchange service indispensavel preencher e enviar ao escrit rio de vendas local a ficha Seguranca e Sa de anexa ao presente manual de instruc es A c pia da mesma deve ser colocada na embalagem do sistema antes da expedic o Caso uma bomba deva ser
153. enzione 30 Smaltimento 31 2 Gebrauchsanleitung 33 Sicherheitshinweise fur Turbomolekularpumpen 34 Allgemeine Informationen 35 Lagerung 37 Vor der Installation 38 Installation 40 Befestigung der Pumpe 41 Nutzung des Turbo V 750 850 TwisTorr Pumping Systems43 Wartung 49 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 5 406 Contents 6 406 Entsorgung 50 Mode d emploi 51 Normes de s curit pour Pompe Turbomol culaires 52 Indications generales 53 Stockage 55 Preparation pour l installation 56 Installation 58 Fixation de la pompe59 Utilisation du Turbo V 750 850 TwisTorr pumping system 61 Entretien 67 Mise au rebut 68 Manual de istrucciones 69 Indicaciones de Seguridad para Bombas Turbomoleculares 70 Informaci n general 71 Almacenamiento 73 Preparaci n para la instalaci n 74 Instalaci n 76 Fijaci n de la bomba 77 Uso del Turbo V 750 850 TwisTorr Pumping System 79 Mantenimiento 86 Eliminaci n 87 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Contents 5 Manual de Istruc es 89 Indicac es de Seguranca para Bombas Turbomoleculares 90 Informac es gerais 91 Armazenagem 93 Preparac o para a instalac o 94 Instalac o 96 Fixac o da bomba 97 Uso do Turbo V 750 850 TwisTorr Pumping System 99 Manutenc o 105 Eliminac o 106 6 Bedrijfshandleiding 107 Veiligheidsinstructies voor Turbomoleculaire pompen 108 Algemene informatie 109 Opslag 111 Uitpakken 112 Installatie 114
154. er for hver flangest rrelse antallet af klemmer IC63250DCMZ der kr ves og med hvilket moment de skal fastsp ndes Tab 1 FLANGE ANT SP NDINGSMOMENT ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Den nedenstaende tabel beskriver for hver ISO F flange antallet af stalskruer der kr ves og med hvilket moment de skal fastsp ndes iht Agilents anbefalinger Tab 2 FLANGE SKRUE STORRELSE ANT SPANDINGS MOMENT ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Resistensklassen for stalskruer til flangen F skal vare 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 133 406 7 Istruktionsbog FORSIGTIG Den nedenst ende tabel beskriver for hver CF flange antallet af skruer der kr ves og med hvilket moment de skal fastsp ndes iht Agilents anbefalinger Det anbefales at anvende passende Agilent materiale Se bilaget Technical Information for en detaljeret beskrivelse Tab 3 LANGE ANT SP NDINGSMOMENT CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Turbo V 750 850 TwisTorr Pumping System m ikke fastg res vha dets sokkel Turbo V 750 850 TwisTorr Pumping System tilh rer installationskategori to eller oversp nding iht standarden EN 61010 1 Tilslut anordningen til str mforsyningen s ledes at rekvisitterne for denne kategori opfyldes Anvend de medf lgende modstik for at bevare beskyttelsesgraden IP 54 Turbo V 750 850 TwisTorr Pumping System er udstyret med stikforbinde
155. er une pompe au constructeur pour r paration ou advanced exchange service remplir et faire parvenir au bureau Agilent de votre r gion la fiche S curit et Sante jointe au pr sent manuel d instructions Une copie de cette fiche devra tre mise dans l emballage de la pompe avant l exp dition En cas de mise au rebut de la pompe proc der son limination conform ment aux r glementations nationales concernant la gestion des d chets Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 67 406 3 Mode d emploi Mise au rebut 68 406 Signification du logo WEEE figurant sur les tiquettes Le symbole ci dessous est appliqu conform ment a la directive CE nomm e WEEE Ce symbole unique ment valide pour les pays de la Communaut euro p enne indique que le produit sur leguel il est appligu NE doit PAS tre mis au rebut avec les ordures m na g res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rifi les termes et conditions du contrat de vente utilisateur final est donc pri de contacter le fournisseur du dispositif maison m re ou revendeur pour mettre en oeuvre le processus de collecte et mise au rebut X nn N TI 4 NA N J S N OY Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares 70 Inf
156. erator to set all the programmable feature 350 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 How to Connect the Open Collector Inputs of the Controller Here below there are the typical connections of the open collector input of the integrated controller to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage a GROUND signal and the open collector pin are available 24Vdc 5 Vdc Customer device Controller si E via NPN mi 24 Vdc L PNP 5 Vdc Customer s device Controller AK Figure 50 Case1 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 351 406 17 Technical Information 352 406 24 Vdc Customer s i device ess Controller x 5 Vdc AST 24 Vdc Controller Customer s 5 Vdc device i SJE JAK Figure 51 Case 2 with relay utilisation Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Customer s device Le lt Customer s device 24 Vdc
157. erial o Profibus Ademas esta operaci n no puede garantizar la parada inmediata del rotor cuya velocidad de rotaci n disminuir en funci n del grado de vacio presente en el sistema Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 85 406 4 Manual de istrucciones Mantenimiento El Turbo V 750 850 TwisTorr Pumping System no necesita ningun mantenimiento Cualguier operaci n debera ser realizada por personal autorizado iADVERTENCIA Antes de realizar cualguier operaci n en el sistema desconectarlo de la corriente enviar aire de la bomba abriendo la v lvula oportuna esperar hasta gue el rotor se pare completamente y esperar a gue la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para sustituir el averiado Antes de enviar al fabricante un sistema para su reparaci n o advanced exchange service es imprescindible cumplimentar y remitir a la oficina local de ventas la ficha de Seguridad y Salud adjunta al presente manual de instrucciones Una copia de la misma se debera introducir en el embalaje del sistema antes de enviarlo 86 406 En caso de gue el sistema se tenga gue desguazar eliminarlo respetando las normas nacionales especificas Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Elimi
158. etens alla funktioner som till exempel hanteringen av Purge och Vent och kapaciteten att kommunicera med systemet i vilket pumpen byggts in genom I Os Seriale eller Profibus Denna operation kan inte garantera ett omedelbart stopp av rotorn vars rotationshastighet minskar i funktion till vakuumet som finns i systemet Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 157 406 8 Bruksanvisning Underh ll Turbo V 750 850 TwisTorr Pumping System r underhallsfritt Allt servicearbete m ste utf ras av auktoriserad personal Innan n got arbete utf rs p systemet maste pumpens str mf rs rjning avbrytas och pumpen luftas genom att den aktuella ventilen oppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renoverat system Innan systemet l mnas in till tillverkaren f r reparation eller utbyte mot en renoverad enhet m ste h lso och s kerhetsbladet som medf ljer bruksanvisningen fyllas i och skickas in till den lokala terf rs ljaren Bifoga dessutom en kopia av bladet med pumpen 158 406 Skrotning av pumpen skall ske enligt g llande lagstiftning Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 Bortskaffning Betydelse av logotypen WEEE pa etiketterna Symbolen som visas nedan har tillimpats i enlighe
159. f re alvorlig personskade eller d dsfald Frakobl str mforsyningskablet f r der udf res vedligeholdelse inden i enheden Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 139 406 7 Istruktionsbog Nodstop For omgaende at stoppe Turbo V 750 850 TwisTorr Pumping System i n dstilf lde skal man frakoble stramforsyningskablet Man skal dog v re opm rksom p at denne handling udover at afbryde forsyningen af pumpen fuldst ndigt ogs inaktiverer alle kontrollerens andre funktioner som f eks styringen af Purge og kontrolleret Vent samt evnen til at kommunikere med systemet som pumpen er blevet indbygget i via I O seriel eller profibus Desuden garanterer denne handling ikke at rotoren stopper med det samme dens hastighed s nkes gradvist i funktion af vakuumgraden i systemet 140 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 Vedligeholdelse Turbo V 750 850 TwisTorr Pumping System beh ver ikke nogen vedligeholdelse Ethvert indgreb skal foretages af autoriseret personale ONIN KIN Inden der foretages noget som helst indgreb p systemet skal str mmen f rst afbrydes og luften i pumpen skal fjernes ved at bne ventilen Vent med foretagelse af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted eller Agilent advanced exchange service der
160. fabryki W celu jakiejkolwiek informacji prosimy skontaktowa sie z miejscowym przedstawicielem firmy Agilent Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 219 406 12 Podrecznik Instrukcji Przygotowanie do instalacji System Turbo V 750 850 TwisTorr Pumping System jest dostarczany w specjanym ochronnym opakowaniu w przypadku lad w uszkodze do kt rych mog oby doj podczas transportu nale y skontaktowa si z miejscowym biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu Turbo V 750 850 TwisTorr Pumping System ani nie poddawa go uderzeniom lub wibracjom ZAGROZENIE Ci ar niekt rych modeli przekracza 18kG sa to modele 969 8814 969 8816 969 6014 969 6016 969 6017 W takich przypadkach wszelkie operacje zwiazane z manipulowaniem pompa musza by realizowane za pomoca odpowiednich rodk w do podnoszenia lub przez co najmniej dwie osoby Nie wyrzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu i jest zgodny z dyrektyw 94 62 CE dotycz c ochrony rodowiska i jej kolejnymi zmianami UWAGA Aby unikn problem w odgazowywania nale y nie dotyka go ymi r koma cz ci przeznaczone do pr ni Nale y zawsze stosowa odpowiednie r kawice ochronne lub odpowiednie zabezpieczenie System Turbo V 750 850 TwisTorr Pumping System nie mo e by uszkodzony poprzez wyst
161. fan to the Turbo V 750 850 TwisTorr Pumping System execute the following procedure 1 Insert the connection cable with the plug in the connection P2 on the integrated controller Figure 67 2 Position the fan ensuring that the holes in the plate line up with those in the pump base make sure that the cable remains between the fan and the pump body internally to the plastic shroud 3 Insert the three screws enclosed into the package and tighten with a screwdriver Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 375 406 17 Technical Information Air Cooling Kit Installation Figure 68 4 Start the FAN as explained in the following section Drive the external fan Turbo V 750 850 TwisTorr Pump with Standard Rack Controller To fix the fan to the Turbo V 750 850 TwisTorr pump execute the following procedure 1 Lock the connection cable in one of two slots placed laterally to the fan so that the cable connector remains outside the plastic fan protection 376 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Air Cooling Kit Installation Figure 69 2 Position the fan ensuring that the holes in the plate line up with those in the pump base 3 Insert the three screws enclosed into the package and tighten with a screwdriver Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 377 406 17 T
162. fice information http www agilent com Worldwide Web Site Catalog and Order On line www agilent com Representative in most countries 12 10
163. formation f ggel ket Tab 3 KARIMA SZ R GZIT NYOMATEK CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm A Turbo V 750 850 TwisTorr Pumping System et nem lehet az alapjaval r gziteni 97383016 A Turbo V 750 850 TwisTorr Pumping System az EN 61010 1 szabv ny szerint a m sodik vagy t lfesz ltsegi sszeszerel si kateg ri ba tartozik A berendez st k vetelm nyeknek A term kkel adott ellencsatlakoz kat haszn lja az IP 54 v delmi fok megtart sa v gett A Turbo V 750 850 TwisTorr Pumping System Input Output s sorozat k t s csatlakoz kkal rendelkezik amelyeket a k ls k r kh z gy kell csatlakoztatni hogy el rhetetlenek legyenek az elektromos r szek Gy z dj k meg arr l hogy a Turbo V 750 850 TwisTorr Pumping Systemhez csatlakoztatott berendez s szigetel se megfelel legyen egyedi meghib sod s eset n is ahogy azt az EN 61010 1szabvany el rja A v laszthat kieg sz t k sszeszerel s hez l sd a Technical Information f ggel ket 206 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 A Turbo V 750 850 TwisTorr Pumping System Haszn lata Ebben a szakaszban a legfontosabb m k dtet si elj r sok tal lhat k A rendszer haszn lata el tt v gezze el az sszes elektromos s pneumatikus csatlakoztat st A v kuumkamra esetleges meleg t se alatt a bemeneti karim n l v h m rs klet nem haladhatja meg a 80
164. g System uruchamia sie automatycznie Dostarczony sterownik jest ju podtaczony mechanicznie i elektrycznie do pompy Oddzielenie sterownika od korpusu pompy mo e zosta wykonane tylko i wy cznie przez uprawnionych pracownik w firmy Agilent Vacuum Technologies Kiedy uruchamia si Turbo V 750 850 TwisTorr Pumping System po d u szym okresie przestoju przed uruchomieniem systemu nale y uaktywni specjaln funkcj SOFT START System jest uruchamiany przechodz c przez kolejne fazy a do osi gni cia pe nej pr dko ci w czasie oko o 35 minut Po osi gni ciu przez system pe nej pr dko ci mo na wy czy procedur soft start a kolejne uruchomienia mog ju by wykonywane w trybie normalnym 228 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 W celu utrzymania poziomu ochrony IP 54 nale y stosowa tylko i wy cznie z cza dostarczone razem z pomp Do zasilania mo na stosowa wy cznie kabel PN 969 9957 lub 969 9958 Ten kabel i wtyczka musz by stosowane razem z odpowiednio uziemionym gniazdkiem w celu unikni cia pora enia pr dem elektrycznym oraz w celu spe nienia wymaga norm CE W jaki spos b zatrzyma Turbo V 750 850 TwisTorr Pumping System Do zatrzymania pompy mo na wykorzysta jedni z ni ej opisanych metod 1 wymontowanie przeciwz cza I O kt re stanowi element wyposa enia 2 przes anie sygna u STOP z urz dzenia zdaln
165. g zusatzlich integriert zum Purgieren Entliften durch welchen es notwendig ist sie mit einem inerten Gasstrom zu beliefern Stickstoff Helium Argon um die Pumpenlager zu schiitzen siehe Anhang Technical Information MI TT IN Die Pumpe niemals bei Pr senz von korrosiven Gasen oder D mpfen die die inneren Materialien beschadigen k nnten verwenden WARNUNG Wird die Pumpe zum Pumpen von giftigen brennbaren oder radioaktiven Gasen verwendet die entsprechenden Verfahren fiir das jeweilige Gas befolgen Die Pumpe nicht bei Pr senz von explosiven Gasen verwenden Die Pumpe ist entworfen worden um Stickstoff Argon und leichtere Gase zu pumpen Sollte die Notwendigkeit bestehen schwereres Gas als Argon pumpen zu miissen wenden Sie sich bitte fiir Informationen an den Technischen Kundendienst der Agilent 44 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Wie man das Turbo V 750 850 TwisTorr Pumping System startet Vor dem Systemstart kontrollieren dass der Gegenstecker I O entfernt wurde Ist das System an einer ferngesteuerten I O Vorrichtung angeschlossen sichergehen dass das STOPP Signal aktiv ist siehe Absatz J1 REMOTE I O im Anhang Technical Information Folgende Schritte ausfiihren um das System zu starten 1 Den Gegenstecker I O vom System falls vorhanden entfernen 2 Um das Turbo V 750 850 TwisTorr Pumping System einzuschalten ist eine Spannung vo
166. hat the pump is slowed down properly modulating in automated way the vent valve CAUTION The vent could damage the pump Please use the Agilent Auto Pump Speed mode or refer to Agilent personnel On Command Mode with Purge Vent Device Accessory Only If WIN 125 1 the vent valve is opened via serial but the Auto Pump Speed mode is automatically activated until the speed of the pump is 100 Hz Auto Time Mode with Purge Vent Device Accessory Only If WIN 125 0 the vent valve is opened as a func tion of time see the figure below for details The timing are configurable through WIN 126 Vent Valve Opening Delay and WIN 147 Vent Valve Opening Time Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 349 406 17 Technical Information Purge Valve CLOSED la am m o OPEN Vent Valve CLOSED L OPEN i i STOP RAMP i i NORMAL Vent Valve Delay Vent Valve Open Win 126 Time Win 126 o o START command STOP command Figure 49 Vent and Purge valves diagram for Auto Time mode Stop Speed Reading This function allows the user to read the pump rotational frequency window 232 even after a stop command The function can be activated deactivated by serial line WIN 167 If activated all the related functions set point out output voltage will follow the freguency reading The T Plus Software optional allows the op
167. he Turbo V 750 850 TwisTorr Pumping System After the turbopump is switched off it must be vented to avoid contamination due to particles streaming back from the fore vacuum section The recommended procedures to vent the system are described in the following Venting Procedure without Gontaminants and or Gorrosive Gases Manually Venting 1 Close the process gases flowing into the sys tem before sending the STOP signal to the Turbo V 750 850 TwisTorr Pumping System Close the gate valve connecting the Turbo pump to the chamber if present Switch off the backing pump or close a fore vacuum valve if present Turn off the Turbo pump by sending the STOP signal to the controller Open the Turbo V vent port positioned on the envelope slowly until to reach atmospheric pressure in the system CAUTION To safely slow down the pump use a venting flow able to decelerate the rotor at a rate lower than 5 Hz s To monitor the deceleration rate activate the Stop Speed Reading function by serial line WIN 167 and read the pump rotational speed through WIN 232 For water cooling shut off the water supply Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 393 406 17 Technical Information Venting procedure with Contaminants and or Corrosive Gases Without Purge Vent Device Accessory 1 Close the process gases flowing into the system before sending the STOP signal to the Turbo V 750 850 TwisTorr Pumping Syst
168. he controller can answers with the following response types Tab 8 Response types Type Length Value Description Logic 1 byte After a read instruction of a logic window Numeric 6 bytes After a read instruction of a numeric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execu tion has been failed Unknown 1 byte 0x32 The specified window in the command is not Window a valid window Data Type 1 byte 0x33 The data type specified in the command Error Logic Numeric or Alphanu meric is not accorded with the specified Win dow Out of Range 1 byte 0x34 The value expressed during a write command is out of the range value of the specified window Win Disabled 1 byte 0x35 The specified window is Read Only or temporarily disabled for ex ample you can t write the Soft Start when the Pump is running 360 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Examples Command START Source PC Destination Controller Technical Information 17 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller
169. he water electrical conductance must be lt 500 us cm When the conductance is higher in closed water circuit the use of up to 20 of Ethyl Glycole is suggested Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 381 406 17 Technical Information Vibration Isolator Installation Five vibration isolators for ISO and CFF inlet flange version pumps are available as accesso ries The five model part numbers are the following model 969 9345 for ISO 160 flange model 969 9346 for ISO 200 flange model 969 9334 for CFF 6 flange model 969 9335 for CFF 8 flange model 969 9336 for CFF 10 flange They typically reduce the vibration transmitted from the Turbo V 750 850 TwisTorr Pumping System to the system by a factor of 20 Please refer to the relevant instruction manual for installation Connection of the High Vacuum Flange In the case the rotor is suddenly blocked the torque arising from the system and the high vacuum flange must be absorbed Only the components listed in the following can be used to fasten the pump to the high vacuum flange It is mandatory to connect the pump in such a way to withstand the torque specified in the IN STRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque 382 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 WARNING If the pump is fastened on a
170. hnical Information Non far funzionare mai la pompa se la flangia di ingresso non collegata alla camera a vuoto o non chiusa con la flangia di chiusura Non toccare la turbopompa e i suoi eventuali accessori durante le operazioni di riscaldamento L elevata temperatura pu causare lesioni alle persone agaia rda Evitare urti oscillazioni o bruschi spostamenti della pompa quando in funzione I cuscinetti potrebbero danneggiarsi Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar oltre la pressione atmosferica Per il pompaggio di gas contenenti particolato o inquinanti aggressivi per i cuscinetti queste pompe sono dotate di una apposita porta 0 uno specifico accessorio dispositivo di purge vent integrato attraverso la quale necessario fornire alla pompa un flusso di gas inerte Azoto Elio o Argon per proteggere i cuscinetti della pompa vedere l appendice Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 25 406 1 Istruzioni per l uso PNA Non usare mai la pompa in presenza di gas o vapori corrosivi che possano danneggiare i materiali interni alla pompa AVN Quando la pompa viene utilizzata per il pompaggio di gas tossici infiammabili 26 406 o radioattivi seguire le appropriate procedure tipiche di ciascun gas Non usare la pompa in presenza
171. hteellinen kosteus O 90 ei tiivist v Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest Turbo V 750 850 TwisTorr Pumping System tulee kytke p pumppuun ks Technical Information liitteen kaaviota Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Ohjekasikirja 10 Pumpun kiinnitys VAN TN Asennusohjeiden noudattamatta j tt minen mik li roottorissa syntyy vika voi aiheuttaa pumpun irtoamisen j rjestelm st ja n in ollen vahinkoja vakavia vammoja tai kuoleman Turbo V 750 850 TwisTorr Pumping System voidaan asentaa mihin asentoon tahansa Kiinnitt k Turbo V 750 850 TwisTorr Pumping System vakaaseen asentoon asentamalla turbopumpun sis ntulolaippa j rjestelm n vastalaippaan liitoksella joka kest 8000 Nm n momentin akselinsa ymp ri ISO K laippa voidaan kiinnitt k ytt m ll ter ksisi erikoislujia puristimia kuten malli Agilent IC 63250 DCMZ Seuraavassa taulukossa kuvataan jokaista laippakokoa kohti tarvittavien liittimien IC63250DCMZ m r ja niiden kiristysmomentit Tab 1 LAIPPA MAA RA KIRISTYS MOMENTTI ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Seuraavassa taulukossa kuvataan jokaista ISO F laippaa kohti tarvittavien terasruuvien m r ja niiden kiristysmomentit Agilentin antamien suositusten mukaisesti Tab 2 LAIPPA RUU
172. ical Information para m s detalles El Turbo V 750 850 TwisTorr Pumping System ha de conectarse a una bomba primaria v ase diagrama en Technical Information 76 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Fijaci n de la bomba CAGUA La falta de cumplimiento de estas instrucciones de instalaci n en caso de que se produzca la averia del rotor puede hacer que la bomba se desconecte del sistema causando dafios heridas graves o la muerte El Turbo V 750 850 TwisTorr Pumping System se puede instalar en cualquier posici n Fijar el Turbo V 750 850 TwisTorr Pumping System en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8000 Nm en torno a su propio eje La brida ISO K se puede fijar utilizando tornillos de acero de alta resistencia tipo modelo Agilent IC 63250 DCMZ La tabla a continuaci n describe la cantidad de tornillos IC63250DCMZ necesarios para cada tama o de brida y el par de apriete para apretarlos Tab 1 BRIDA N PAR DE APRIETE ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm La tabla a continuaci n describe la cantidad de tornillos de acero necesarios para cada brida ISO F y el par de apriete para apretarlos segun las recomendaciones de Agilent Tab 2 BRIDA TAMA O TORNILLOS N PAR DE APRIETE 150 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm La clase de
173. ignements importants extrapol s du texte 54 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 Stockage Pour garantir les performances et la fiabilit maximales des pompes turbomol culaires Agilent il est indispensable de respecter les instructions suivantes Le transport la manutention et le stockage des pompes doivent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de O 95 non condensante a A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start a Le temps de stockage d une pompe turbomol culaire est de 10 mois compter de la date d exp dition f r iD En cas de d passement du temps de stockage la pompe doit tre retourn e en usine Pour tout renseignement contacter le repr sentant Agilent de zone Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 55 406 3 Mode d emploi Preparation pour l installation Le Turbo V 750 850 TwisTorr Pumping System est livr dans un emballage de protection sp cial en cas d endommagement de l emballage pouvant s tre produit pendant le transport contacter le bureau de vente local Pendant l op ration d ouverture de l emballage veiller tout particuli rement ne pas laisser tomber le Turbo V 750 850 TwisTorr Pumping System et ne lui faire subir aucun choc et aucune vibrat
174. ion AVERTISSEMENT Certains mod les p sent plus de 18 kg mod les 969 8814 969 8816 969 6016 969 6017 Dans ce cas la manipulation de la pompe doit se faire Vaide de moyen de levage ad quats ou par deux personnes ATTENTION Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 94 62 et modifications successives en mati re de protection de l environnement Afin d viter tout probl me de d gazage ne pas toucher mains nues les l ments devant tre expos s au vide Mettre toujours des gants ou toute autre protection appropri e Le TV 801 ISO F ne peut s endommager en restant simplement expos l atmosph re Toutefois afin d viter toute pollution due la poussi re il est conseill de le garder dans son emballage clos jusqu au moment de l installation 56 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Mode d emploi 3 Turdo gt 0 850 TwisTorr Pumpin stem C POWER SUPPLY 969 652 Figure 1 Contenu de l emballage du Turbo V 750 850 TwisTorr Pumping System 1 Pompe contr leur int gr 2 Inlet screen mont 3 Un mode d emploi sur CD ROM 4 Boite d accessoires a contre connecteur 15 voies REMOTE I O IP 54 comprenant les connexions n cessaires pour d marrer la pompe b contre connecteur 9 voies SERIAL IP 54 destin la prise de connexion s rie Turbo V 7
175. ion a Langsam blinkend Zeit etwa 400 ms Das System ist auf der Rampe am Bremsen oder am Stoppen oder Waiting for interlock a Schnell blinkend Zeit etwa 200 ms Fehlerzustand WARNUNG Das Turbo V 750 850 TwisTorr Pumping System startet automatisch wenn es gespeist wird und der 15 Pin Gegenstecker eingeschaltet ist VORSICHT Der Controller wird schon mechanisch und elektrisch an der Pumpe angeschlossen geliefert Die Trennung des Controllers vom Pumpenk rper kann nur von Agilent Vacuum Technologies bevollm chtigtem Personal ausgef hrt werden Wenn man das Turbo V 750 850 TwisTorr Pumping System nach einem langeren Stillstand startet muss vor dem Start die spezielle Funktion SOFT START aktiviert werden Das System wird schrittweise gestartet und erreicht nach etwa 35 Minuten die volle Geschwindigkeit Nachdem das System die volle Geschwindigkeit erreicht hat kann die Prozedur soft start gesperrt werden und die nachfolgenden Starts erfolgen auf normale Weise 46 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Gebrauchsanleitung 2 Um den Stand des Schutzgrades IP 54 beizubehalten muss man ausschlieRlich die mit der Pumpe mitgelieferten Stecker verwenden Fiir das Speisekabel nur die PN benutzen 969 9957 oder 969 9958 Dieses Kabel und den Stecker an eine angemessen geerdete Buchse anschlieRen um elektrische Schl ge zu vermeiden und den CE Normen zu entsprechen Wie man dasTurbo V
176. ions for Use Preparation for Installation The Turbo V 750 850 TwisTorr Pumping System is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the system be sure not to drop it and avoid any kind of sudden impact or shock vibration to it Some models weight more than 18 Kg models 969 8814 969 8816 969 6014 969 6016 969 6017 In those cases the handling of the pump must be carried out with proper weight lifting equipment or at least by two people Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 94 62 and successive modifications to protect the environment In order to prevent outgassing problems do not use bare hands to handle components which will be exposed to vacuum Always use gloves or other appropriate protection Normal exposure to the environment cannot damage the Tur bo V 750 850 TwisTorr Pumping System Nevertheless it is advisable to keep it closed until it is installed in the system thus preventing any form of pollution by dust 292 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 Turbo TwisTorr Pumpin fem C POWER PPLY 969 6 Figure 1 T The Turbo V 750 850 TwisTorr Pumping System package includes 1 2 3 Pump with integrated controller Inlet scr
177. is g val a rendszer m k d si helyzet t mutatja lland an vil g t a szivatty norm lis forg sban van a lassu villog s kb 400 ms peri dus a rendszer r mpa f kez s Stop vagy Waiting for interlock llapotban van gyors villog s kb 200 ms peri dus hiba llapot VESZ LY Amennyiben a term khez t p tartozik s 15 kivezet ses ellencsatlakoz be van p tve a Turbo V 750 850 TwisTorr Pumping System automatikusan elindul FIGYELEM A controllert gy sz ll tjuk hogy a szivatty hoz m r elektromosan s mechanikusan csatlakoztatva van A controllert a szivatty test t l csak a Agilent Vacuum Technologies ltal erre felhatalmazott szem ly v laszthatja el Amennyiben a Turbo V 750 850 TwisTorr Pumping Systemet hosszabb le ll s ut n kell beind tani a rendszer elind t sa el tt a speci lis SOFT START funkci t kell elind tani A rendszer a k vetkez fokozatokhoz a teljes sebess g el r s ig kb 35 perc id tartam alatt jut el Miut n a rendszer el rte a teljes sebess get a soft start elj r st ki lehet kapcsolni s az ezt k vet ind t sok norm lis m don t rt nhetnek 210 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 Az IP 54v delmi szint megtart s hoz kiz r lag a szivatty val egy tt adott csatlakoz kat haszn lja A t pvezet kk nt csak PN 969 9957 or 969 9958 t haszn ljon E
178. iske kundeservice for yderligere oplysninger Start af Turbo V 750 850 TwisTorr Pumping System F r systemet startes skal man kontrollere at I O modstikkene er fjernede S fremt systemet et sluttet til en fjernstyret I O anordning skal man s rge for at STOP signalet er aktivt se afsnit J1 REMOTE I O i bilaget Technical Information For at starte systemet udf res de f lgende trin 1 Fjern hvis tilstede systemets I O modstik 2 For at f adgang til Turbo V 750 850 TwisTorr Pumping System skal der leveres en sp nding p 48 Vec vha en ekstern str mforsyning 969 6521 3 Indstil trykket i vakuumkammeret til 0 1 mbar 4 Giv Turbo V 750 850 TwisTorr Pumping System START signalet p en af f lgende m der a Ved at tilslutte det medf lgende I O modstik b Ved at give START signalet via fjernbetjening gennem I O stikket se afsnit J1 REMOTE I O i bilaget Technical Information 136 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 c Vedat give START signalet via fjernbetjening gennem den serielle gr nseflade RS 232 485 se afsnit RS 232 485 Communication Description i bilaget Technical Information Den Indbyggede kontroller genkender automatisk tilstedev relsen af signalerne INTERLOCK og START og starter pumpen Funktionen Soft Start er beregnet til at t nde pumpen efter en l ngere inaktivitetsperiode Den sikrer en optimal fordeling af fedt i kuglelejer
179. jakov za prirobnico F mora biti 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 277 406 15 Priro nik za Navodila Naslednja preglednica navaja potrebno tevilo vijakov in zatezni moment vija enja slednjih za vsako prirobnico CF po priporo ilih Agilenta Svetuje se uporaba ustreznega materiala Agilent Za podrobnej i opis si oglejte dodatek Technical Information Tab 3 PRIROBNICA T NAVOR CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Sistema Turbo V 750 850 TwisTorr Pumping System ni mogo e pritrditi s pomo jo lastnega podno ja Sistem Turbo V 750 850 TwisTorr Pumping System spada v drugo kategorijo ali prenapetost namestitve skladno s standardom EN 61010 1 Napravo ve ite na napajalni vod skladno z zahtevami ki veljajo za to kategorijo Uporabite prilo ene protikonektorje da zagotovite stopnjo za ite IP 54 Sistem Turbo V 750 850 TwisTorr Pumping System je opremljen z vhodnimi izhodnimi konektorji in tistimi za serijsko komunikacijo ki jih je treba vezati na zunanje tokokroge tako da elektri ni deli niso ve dosegljivi Zagotovite ustrezno izolacijo sistema Turbo V 750 850 TwisTorr Pumping System tudi v primeru posamezne okvare kakor predvideva standard EN 61010 1 218 406 Za namestitev dodatne opreme si oglejte dodatek Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Uporaba sistema Turbo V 750 850
180. k nyv V szle ll t s A Turbo V 750 850 TwisTorr Pumping System v szhelyzetben val azonnali le ll t s hoz a t pvezet ket azonnal sz t kell csatlakoztatni Figyelni kell azonban arra hogy ez a m velet a szivatty teljes kikapcsol s n t l kikapcsolja a controller minden m s m k d si lehet s g t is mint pl az ellen rz tt Purge s a Vent ir ny t st azzal a rendszerrel val kapcsolatot amelybe Os Serial vagy Profibus tj n a szivatty t integr lt k Ezenfel l ez a m velet nem biztos thatja a rotor azonnali meg ll s t ez ut bbi sebess ge a rendszerben l v v kuum fok nak f ggv ny ben fog cs kkenni Karbantart s A Turbo V 750 850 TwisTorr Pumping System nem ig nyel karbantart st A rendszeren v gzett b rmely munk t jogosult szem lyzetnek kell elv geznie VESZ LY A rendszeren b rmely munka v gz se el tt v lassza le azt a t pfesz lts gr l szell ztesse a szivatty t a megfelel elektromos szelep kinyit s val v rjon am g a rotor forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s helyett Miel tt jav t sra vagy cser re visszak ldi a rendszert a gy rt hoz az ehhez a g pk nyvh z csatolt Eg szs g s biztons g lapot ki kell t lteni s el kell k ldeni a helyi kereskedel
181. kich jak na przyk ad nadzorowanie urz dzenia Purge i Vent sterowanego oraz mo liwo komunikowania si z systemem z kt rym pompa jest po czona poprzez I Os linie szeregow lub Profibus Ponadto ta operacja nie mo e zagwarantowa natychmiastowego zatrzymania si wirnika kt rego pr dko b dzie si zmniejsza a w zale no ci od poziomu pr ni w systemie 230 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 Konserwacja Turbo V 750 850 TwisTorr Pumping System nie wymaga adnej konserwacji Jakakolwiek interwencja musi by wykonana przez upowa niony personel Przed przystapieniem do jakiejkolwiek interwencji w systemie nalezy odlaczyc go od zrodla zasilania otworzyc odpowiedni zawor pompy odczekac az wirnik sie zatrzyma calkowicie i temperatura powierzchni obudowy pompy obnizy sie ponizej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszkodzonego systemu Przed wysy k do konstruktora systemu do naprawy lub advanced exchange service nale y obowi zkowo wype ni i przekaza do miejscowego biura sprzeda y kart Bezpiecze stwo i Zdrowie za czon do niniejszej instrukcji Jeden egzemplarz kopia karty musi by w o ony do opakowania systemu przed jego wysy k Je eli system musi by poddany
182. ko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinov ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje se izvaja preko hitre turbine maks 49500 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor Turbo V 750 850 TwisTorr Pumping System ne vsebuje onesna evalnih agentov in je primeren za isto vakuumiranje Opremljen je s pomo nimi priklju ki za dodaten ventilator ki skrbi za nadzor obe za zrak ki je nadzorovana z ra unalnikom preko serijske povezave RS232 ali RS485 Naslednji odstavki vsebujejo informacije ki so potrebne za varnost tistega ki uporablja to opremo Podrobne informacije lahko najdete v prilogi Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 271 406 15 Priro nik za Navodila Navodila so napisana po naslednjem standardnem protokolu SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pri katerih lahko pride do resnih po kodb e se jih ne dr i POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme Opombe vsebujejo pomebne informacije iz besedila 212 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Shranjevanje Da bi zagotovili maksimalni u inek in zanesljivost rpalk Agilent Turbomolecular se morate dr ati naslednjih vodil a Pri po iljanju premikanju in sh
183. kroppsskador 31 Undvik st tar sv ngningar eller pl tsliga f rflyttningar av pumpen n r den r i funktion Lagren kan skadas F r luftf rs rjningen av pumpen anv nd luft eller inertgas som inte f r inneh lla damm eller partiklar Det ing ende trycket genom intaget skall vara under 2 bar ut ver atmosf rtrycket F r pumpningen av gas som innehaller aggressiva partiklar eller f roreningar f r lager r dessa pumpar utrustade med ett l mpligt uttag eller ett specifikt tillbeh r for Purge Vent integrerat genom vilken det r n dv ndigt att ge pumpen ett fl de med inertgas kv ve helium eller argon f r att skydda lagren pa pumpen se bilagan Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 153 406 8 Bruksanvisning st Anv nd aldrig pumpen om det finns korrosiva gaser eller ngor som kan skada materialen i pumpen VARNING N r pumpen anv nds f r en pumpning av giftiga ant ndabara eller radioaktiva gaser f lj de typiska procedurerna f r varje gas Anv nd inte pumpen med explosiva gaser Pumpen har formgetts f r att pumpa kv ve argon och l ttare gaser Om gaser som r tyngre n argon m ste pumpas kontakta Agilents kundtj nst f r information Hur Turbo V 750 850 TwisTorr Pumping System startas Innan systemet startas kontrollera att motkontakten I O kopplats fran Om systemet kopplats till en fj rrkontroll I O se till att STOP signale
184. ksempel styring av Purge og Kontrollert Vent samt evnen til kommunisere med systemet der pumpen er integrert ved hjelp av I Os Serialport eller Profibus Dessuten kan dette inngrepet ikke garantere at rotoren hvis rotasjonshastighet vil senkes p grunnlag av graden vakuum som finnes i systemet vil stanses yeblikkelig Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 175 406 9 Instruksjon Manual Vedlikehold Turbo V 750 850 TwisTorr Pumping System er vedlikeholdsfritt Alt arbeid pa systemet ma kun utfgres av autorisert personell OKI For noe arbeid gj res p systemet m det frakoples tilf rselen pumpen m luftes ved a apne den aktuelle ventilen og deretter vente til rotoren har stanset og pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser ma du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatning for det delagte systemet Far systemet returneres til produsenten for reparasjon eller som innbytte for et overhalt system ma det vedlagte skjemaet Helse og sikkerhet fylles inn og sendes til det lokale salgskontoret En kopi av dette arket ma vedlegges systemet som sendes tilbake Dersom et system skal kasseres ma dette skje i henhold til nasjonale bestemmelser 176 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instruksjon Manual 9 Eliminering Betydelsen av symbolet pa logo WEE
185. l mpliga lyftmedel eller minst tv personer Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller direktiv 94 62 EG och f ljande ndringar Komponenter som skall uts ttas f r vakuum f r inte hanteras med bara h nder p g a kontamineringsrisken Anv nd alltid handskar eller liknande skydd Normal p verkan fr n omgivningen kan inte skada Turbo V 750 850 TwisTorr Pumping System Trots det r det s krast att h lla pumpen nerpackad tills den har installerats i systemet f r att f rhindra att det kommer in damm eller annat i den 148 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 Turbo V 8 TwisTorr Pumpin tem C POWER PPLY 6 Figur 1 I f rpackningen f r Turbo V 750 850 TwisTorr Pumping System finns f ljande 1 Pump med integrerad kontrollenhet 2 Inlet screen monterad 3 Instruktionsboken p CD ROM 4 L da med tillbeh r a 15 v gs motkontakt REMOTE I O IP 54 med integrerade n dv ndiga anslutningar f r start av pumpen b 9 v gs motkontakt SERIAL IP 54 som skall anv ndas f r serieanslutningen Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 149 406 8 Bruksanvisning Installation Misa Ta bort tejpen och skyddsproppen f rst n r turbopumpen ska anslutas till systemet 150 406 Figur 2 Denna apparat f r endast installeras inomhus Den f r inte anv ndas i omr d
186. la alle 2 baria ilmanpaineen lis ksi Hiukkasia tai laakereille aggressiivisia saasteita sis lt vien kaasujen pumppaamista varten pumput on varustettu tarkoituksenmukaisella portilla tai erityisell integroidulla purge vent lis varusteella jonka kautta pumpulle on toimitettava jalokaasuvirtaus typpi helium tai argon pumpun laakereiden suojaamista varten ks liite Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 189 406 10 Ohjekasikirja lk koskaan k ytt k pumppua jos paikalla on sy vytt vi kaasuja tai h yryja jotka voivat vahingoittaa pumpun sis ll olevia materiaaleja VAN IK Kun pumppua k ytet n myrkyllisten palavien tai radioaktiivisten kaasujen 190 406 pumppaamiseen noudata jokaiselle kaasutyypille kuuluvia menetelmi l k yt pumppua jos paikalla on r j ht vi kaasuja Pumppu on suunniteltu typen argonin tai kevyempien kaasujen pumppaamiseen Mik li argoniin n hden painavampia kaasuja joudutaan pumppaamaan ottakaa yhteytt Agilentin tekniseen huoltoon lis tietoja varten Miten Turbo V 750 850 TwisTorr Pumping System k ynnistet n Ennen j rjestelm n k ynnist mist tarkistakaa ett vastaliitin I O on irrotettu Jos j rjestelm on liitetty kauko ohjattavaan I O laitteeseen varmistakaa ett STOP signaali on p ll ks kappale J1 REMOTE I O liitteest Technical Information J rjestelm n k ynnist mis
187. la podaje dla ka dego ko nierza ISO F ilo koniecznych rub stalowych oraz odpowiadaj cy im moment dokr cania zgodnie z zaleceniami Agilent Tab 2 KO NIERZ ROZMIAR RUB Nr MOMENT DOKR CENIA ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Klasa wytrzyma o ci rub stalowych dla ko nierza F to 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 223 406 12 Podrecznik Instrukcji Poni sza tabela podaje dla ka dego ko nierza CF ilo koniecznych rub oraz odpowiadaj cy im moment dokr cania zgodnie z zaleceniami firmy Agilent Zaleca si stosowanie odpowiednich materia w firmy Agilent W za czniku Technical Information zamieszczono szczeg owy opis Tab 3 KO NIERZ Nr MOMENT DOKR CENIA CFF 6 16 20 Nm CFF 8 20 20 Nm GFF 10 24 20 Nm Turbo V 750 850 TwisTorr Pumping System nie mo e by mocowana z wykorzystaniem swojej podstawy Turbo V 750 850 TwisTorr Pumping System nale y do drugiej kategorii lub przepi cia instalacji zgodnie z dyrektyw EN 61010 1 Wykona pod czenia urz dzenia do linii zasilania w taki spos b aby spe nione by y wymagania przewidziane dla tej kategorii Wykorzysta dostarczone przeciwz cza w celu zachowania stopnia ochrony IP 54 Turbo V 750 850 TwisTorr Pumping System jest wyposa ony w z cza Input Output i do komunikacji szeregowej kt re musz by pod czone do obwod w zewn trznych w taki spos b aby uni
188. led pump it is advisable to install a suitable trap be tween the turbopump and the fore vacuum pump in order to prevent oil backstreaming 386 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Connection to the Pump THERMISTOR BEARING re hd 1 1 PUMP THERMISTOR BODY MOTOR TURBO V PUMP Figure 78 The turbopump is connected to the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pins A andF are connected to the bearing temperature sensor NTC type 30 KQ resistance at 25 C pins A and G are connected to the body temperature sensor NTC type 10 KQ resistance at 25 C and pin H is not connected If the bearing temperature sensor is disconnected the pump will not start To prevent damage to the pump when the temperature exceeds 60 C the sensor automatically cuts out the power supply Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 387 406 17 Technical Information Pump used with Corrosive Gases Pump Purging For pumping gases containing particulate or ag gressive pollutants for the bearings the Turbo V 750 850 TwisTorr Pumping System is fitted with a special port or the integrated purge vent device accessory to allow a steady flow of inert gas like He N Ar for pump bearing protection To prevent damage to the bearings an inert gas must flow into the
189. ler gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ved hj lp af en hurtigroterende turbine 49500 omdr min Turbinen drives af en elektrisk trefasemotor med h j effekt Turbo V 750 850 TwisTorr Pumping System er ikke fremstillet af skadelige stoffer og er derfor egnet til anvendelse der kr ver rent vakuum Turbo V 750 850 TwisTorr Pumping System har endvidere hj lpestik der g r det muligt at forsyne en ekstra ventilator styre den ekstra purge vent enhed og fjernstyre den ved hj lp af en v rtscomputer gennem seriel forbindelse RS 232 eller RS 485 De f lgende afsnit indeholder oplysningerne der er n dvendige for at garantere sikkerhed for operat ren i forbindelse med anvendelse af udstyret Bilaget Technical Information indeholder detaljerede oplysninger Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 127 406 7 Istruktionsbog I brugsanvisningen anvendes f lgende standardrubrikker OKI Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type arbejde skal udf res pr cist efter anvisningerne I modsat fald er der risiko for sv re personskader dose Denne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader Dette g r opm rksom p vigtig information i teksten 128 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A I
190. likaavia aineita joten se soveltuu my s puhdasta tyhji t vaativiin k ytt tarpeisiin Turbo V 750 850 TwisTorr Pumping System j rjestelm n kuuluu lis ksi apuliittimi joiden avulla on mahdollista ohjata ylim r ist purge venti yksikk k ytt j rjestelm kauko ohjauksella sarjakytketyn is nt tietokoneen avulla RS 232 RS 485 Seuraavissa kappaleissa on kaikki tarpeelliset tiedot laitteen k ytt j n turvallisuuden takaamiseksi laitteen k yt n aikana Yksityiskohtaiset tiedot l ytyv t osasta Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 181 406 10 Ohjekasikirja Tama k sikirja k ytt seuraavanlaisia merkint j ALUKSEN Vaara merkinnat saavat k ytt j n huomion kiinnittym n erityisiin toimintotapoihin joiden seuraamatta j tt minen voi aiheuttaa vakavia henkil vaurioita Huomio merkit varoittavat toiminnoista joiden laiminly nti voi johtaa laitteen vahingoittumiseen Huomautukset sis lt v t t rke tekstiss k sitelty tietoa 182 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Ohjekasikirja 10 Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi erittain tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavia ymp r ivi olosuhteita ei tule ylitt a l mp tila 20 C 70 C suhteellinen kosteus O 90
191. lle anderen Funktionen des Controllers wie zum Beispiel die Verwaltung des kontrollierten Purgierens und Entliftens und die Fahigkeit mit dem Pumpensystem uber I Os Serielle oder Profibus zu kommunizieren AuBerdem kann dieser Vorgang nicht den sofortigen Stillstand des Rotors gew hrleisten dessen Geschwindigkeit sich abh ngig vom Grad des Vakuums innerhalb des Systems verringern wird 48 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Wartung Gebrauchsanleitung 2 Modell Turbo V 750 850 TwisTorr Pumping System erfordert keine Wartung Eventuelle Eingriffe diirfen nur von autorisiertem Fachpersonal ausgefiihrt werden Vor jedem Eingriff am System den Netzstecker ziehen die Pumpe iiber Offnung des entsprechenden Ventils beliiften und abwarten bis der Rotor vollkommen stillsteht und die Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein generaliiberholtes System als Ersatz fiir das defekte System zur Verfiigung stellt Bevor Fa Agilent ein System zur Reparatur oder den Umtauschdienst eingesandt wird ist das Formular Sicherheit und Gesundheit das diesem Handbuch beiliegt ausgef llt an die rtliche Verkaufsstelle zu senden Eine Kopie ist der Verpackung des Systems vor dem Versand beizulegen Eine eventuelle Verschrottung hat unter Beachtung der einschl gigen nationalen Vor
192. lmer lhet forduljon a helyi szolg ltat si irod hoz A rendszer kicsomagol sakor gyeljen arra hogy ne ejtse le s ker lje annak b rmilyen hirtelen t s t vagy r zk d s t VESZ LY Bizonyos modellek t bb mint 18 kg s ly ak a 969 8814 969 8816 969 6014 969 6016 969 6017 modellek Ilyen esetben a szivatty t megfelel eszk z kkel vagy legal bb k t embernek kell mozgatnia FIGYELEM Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az 94 62 EK ir nyelvnek s az azt k vet m dos t soknak G zkivon si probl m k elker l s re ne haszn ljon puszta kezeket v kuumnak kitett komponensek kezel s re Mindig haszn ljon keszty t vagy m s alkalmas v delmet A k rnyezetnek val norm l kitetts g nem k ros thatja a Turbo V 750 850 TwisTorr Pumping System et M gis aj nlatos z rva tartani a rendszerbe val telep t sig igy megakad lyozva a por ltali szennyez d s b rmely form j t 202 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 Turbo 850 TwisTorr Pumping System C POWER SUPPLY 652 bra 1 A Turbo V 750 850 TwisTorr Pumping System csomagol sa az al bbiakat tartalmazza 1 2 3 4 Szivatty integr lt vez rl vel Inlet screen beszerelve Ez a k zik nyv CD ROMON A kieg sz t k doboza a 15 eres ellencsatlakoz
193. lowing paragraphs describe the signal characteristics and use Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 341 406 17 Technical Information 342 406 Tab 5 PIN N SIGNAL NAME INPUT OUTPUT 1 2 3 INTERLOCK IN 4 INTERLOCK IN 1 6 6 bl m 7 SOFT START IN E su n p gt 10 CONTACT NORMALLY OPEN OUT nn mm can EE TTT Z 13 FAULT OUTPUT OUT 1 gt ar GSO PROGRAMMABLE ANALOG SIGNAL When no external input output device is available this connector must be closed with the supplied mating connector that short circuits the START and INTERLOCK inputs with the GROUND and 24 Vdc OUT Signal description START STOP input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin and the START STOP signal to the GROUND pin in this condition the pump automatically starts as soon as the controller recognises the input supply Plug amp Pump INTERLOCK input signal to control the pump rotation With the supplied cover connector the interlock signal is connected to the 24 Vdc pin and the interlock signal to the GROUND pin Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 CONTACT This output signal OPTOMOS solid state relay is enabled when the reference quantity chosen frequency current time is higher than the set threshold The signal is normally
194. lser af typen Input Output og til seriel kommunikation som skal tilsluttes til eksterne kredsl b s ledes at de elektriske dele g res utilg ngelige S rg for at af anordningen sluttet til Turbo V 750 850 TwisTorr Pumping System har en passende isolering ogs i tilf lde af fejl som p kr vet af standarden EN 61010 1 134 406 For installation af ekstraudstyr henvises til bilaget Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 Brug af Turbo V 750 850 TwisTorr Pumping System I dette afsnit beskrives de vigtigste operative procedurer Alle de elektriske og pneumatiske tilslutninger skal udfores for systemet tages i brug Under den eventuelle opvarmning af vakuumkammeret ma indgangsflangens temperatur ikke overstige 80 C Operat ren skal s rge for at afk lingen er korrekt indstillet WIN 106 1 for vandafkgling 0 for tvungen luftafkaling standardindstilling ved indstilling af den serielle styring WIN 106 For yderligere oplysninger henvises til bilaget Technical Information Operat ren skal s rge for at indstille driften korrekt i funktion af den type gas som skal pumpes WIN 157 1 for N eller lettere gasser 0 for argon standardindstilling ved indstilling af den serielle styring WIN 157 For yderligere oplysninger henvises til bilaget Technical Information S t aldrig pumpen i drift hvis indgangsflangen ikke er tilsluttet vakuumkammeret eller ikk
195. lustaan asennettuun etupaneeliin kuuluva vihre LED valo osoittaa vilkkumistiheydell n j rjestelm n k ytt tilaa a palaa kiinte n pumppu pyorii normaaliin tapaan a vilkkuu hitaasti noin 400 ms jakso j rjestelm on ramppi jarrutus Stop tai Waiting for interlock tilassa a vilkkuu nopeasti noin 200 ms jakso virhetila VAROITUS Kun virtaa sy tet n ja varustuksiin kuuluva 15 nastainen vastaliitin on kytketty Turbo V 750 850 TwisTorr Pumping System kaynnistyy automaattisesti Controller toimitetaan mekaanisesti ja sahk isesti pumppuun liitettyna Controllerin saa erottaa pumpun rungosta yksinomaan Agilent Vacuum Technologiesin valtuuttama henkil st Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 191 406 10 Ohjekasikirja Kun Turbo V 750 850 TwisTorr Pumping System k ynnistet n pitk n seisokkiajan j lkeen ennen jarjestelman k ynnist mist erityinen SOFT START toiminto tulee aktivoi da J rjestelm k ynnistet n askel askeleelta ja t ysi nopeus saavutetaan noin 35 minuutissa Kun jarjestelma on saavuttanut t yden nopeuden soft start menetelm voidaan deaktivoida ja seuraavat k ynnistykset voidaan suorittaa normaaliin tapaan IP 54 suojaustason s ilytt miseksi k ytt k yksinomaan pumpun kanssa toimitettuja liittimi K ytt k virtajohtona yksinomaan PN 969 9957 tai 969 9958 K ytt k t t kaapelia ja pistoketta yhdess tarkoituk
196. mas at Se till att isoleringen av anordningen som anslutits till Turbo V 750 850 TwisTorr Pumping System har en l mplig isolering ven vid en enstaka skada enligt standarden EN 61010 1 152 406 F r en installation av tillbeh ren se bilagan Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 Anvandning av Turbo V 750 850 TwisTorr Pumping System Detta avsnitt innehaller de huvudsakliga funktionsprocedurerna Innan du anvander systemet utf r alla elektriska och pneumatiska anslutningar Under en eventuell uppvarmning av vakuumkammaren far temperaturen pa ingangens fl ns inte verstiga 80 C Operat ren skall se till att f rutse ett korrekt kylningslage WIN 106 1 f r kylning med vatten O f r kylning med forcerad luft standardlage vid installning av seriekontroll WIN 106 For ytterligare information se bilagan Technical Information Operat ren skall se till att forutse ett korrekt funktionsl ge i funktion till gasen som skall pumpas WIN 157 1 for N och lattare gaser 0 for argon standardl ge vid installning av seriekontroll WIN 157 F r ytterligare information se bilagan Technical Information VARNING L t aldrig pumpen fungera om ing ngens fl ns inte kopplats till vakuumkammaren eller inte r st ngd med fl nset f r st ngning Vidr r inte turbopumpen och dess eventuella tillbeh r under uppv rmningarna Den h ga temperaturen kan orsaka
197. masti t ytett v ja toimitettava paikalliseen myyntitoimistoon Turvallisuus ja Terveys kaavake joka on liitteen ohjekirjassa Kyseisen kaavakkeen kopio tulee liitt j rjestelm n pakkaukseen ennen sen l hett mist Mik li pumppu t ytyy romuttaa toimikaa sen h vitt misess kansallisen lains d nn n m r m ll tavalla Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 195 406 10 Ohjekasikirja Havittaminen Pakkausmerkinn iss olevan WEEE logon merkitys Alla n kyv merkki on lisatty pakkaukseen EY n ns WEEE direktiivin mukaisesti Merkki koskee ainoastaan Euroopan Unionin jisenmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusjatteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottamaan ker ys ja h vitt misprosessia varten yhteytta laitteen toimittajaan olipa se sitten laitteen valmistaja tai jalleenmyyja tarkastettuaan ensin kaupan sopimusehdot p N A x 196 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual e Q0 gt 11 0 Felhaszn l i K zik nyv o e e ij Mi Biztons gi tmutat Turb molekul ris szivatty khoz 198 a Altalanos Inform ci 199 Tarolas 201 El k sz t s telep t sre 202 Telep t s 204 A szivatty r gz t se 205 A Turbo V 750 850 TwisTorr Pumping System Haszn lata 207 A Turb
198. materi l od firmy Agilent Vi priloha Technical Information oh adne podrobn ho popisu Tab 3 priruba PO ET STANOVENY TO IVY MOMENT CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Zariadenie Turbo V 750 850 TwisTorr Pumping system nesmie byt pripevneny o svoju zaklad u Zariadenie Turbo V 750 850 TwisTorr Pumping System patri do druhej kategorie alebo prepatia in talacie v zmysle smernice EN 61010 1 Pripojte zariadenie k napajaciemu privodu tak aby sp alo po iadavky pre uveden kategoriu Pre zachovanie triedy ochrany IP 54 pou ite dodane konektory protikusy Zariadenie Turbo V 750 850 TwisTorr Pumping System je vybaven konektormi vstupov vystupov a seriovej komunikacie ktor musia byt pripojen k externym obvodom tak aby zabra owali pristupu k elektrickym astiam Uistite sa e izol cia zariadenia pripojen ho k vyveve Turbo V 750 850 TwisTorr Pumping System je vhodn aj pre pr pad lok lnej poruchy v zmysle normy EN 61010 1 260 406 Pre in tal ciu volite n ho pr slu enstva si pre tajte pr lohu Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Pou itie zariadenia Turbo V 750 850 TwisTorr Pumping System V tomto odseku su uveden z kladn prev dzkov postupy Pred pou it m syst mu vykonajte v etky elektrick a pneumatick pripojenia Po as pr padn ho ohrevu v kuovej komory nesmie by teplota
199. mi irod hoz A lap egy m solat t sz ll t s el tt be kell illeszteni a rendszercsomagba 212 406 Ha a rendszert le kell selejtezni azt rtalmatlan tani kell a konkr t nemzeti szabv nyoknak megfelel en Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 Megsemmis t s A c mk n jelenl v WEEE logo jelent se Az al bb l that szimb lum az EK WEEE elnevez s ir nyelv vel sszhangban ker l alkalmaz sra Ez a szimb lum mely csak az Eur pai K z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s megsemmis t si elj r s beind t sa c lj b l az ad sv teli szerz d s hat rid inek s felt teleinek alapos ttanulm nyoz sa ut n fel kell vennie a kapcsolatot a berendez s sz ll t j val legyen ez a gy rt vagy egy viszontelad N EY x AS Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 213 406 11 Felhaszn l i K zik nyv Megsemmisites 214 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych 216 Og lne informacje 217 Magazynowanie 219 Przygotowanie d
200. mping System cannot be fixed by means of its base FIDE The Turbo V 750 850 TwisTorr Pumping System belongs to the second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category Use the provided mating connectors in order to maintain the IP 54 protection level The Turbo V 750 850 TwisTorr Pumping System has In put Output and serial communication connectors that must be connected to external circuits in such a way that no electrical part is accessible Be sure that the insulation of the device connected to the Turbo V 750 850 TwisTorr Pumping System is adequate even in the case of single fault as per directive EN 61010 1 For installation of optional accessories see Technical Information 296 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 Use of Turbo V 750 850 TwisTorr Pumping System This paragraph details the fundamental operating procedures Make all electrical and pneumatic connections before the use of the system While heating the vacuum chamber the temperature of the inlet flange must not exceed 80 C The user must be sure to set the correct cooling mode WIN 106 1 for Water cooling O for forced air cooling default by means of WIN 106 serial command See the annex Technical Information for details The user must be sure to set the correct gas mode according to the pumped gas WIN 157 1 for
201. mzeti szabv nyokkal ellent tes b rmely m velet miatt t rt ntek A Turbo V 750 850 TwisTorr Pumping System egy integr lt rendszer turbo molekul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk k szivatty z s ra A szivatty z si m veletet egy nagyteljes tm ny 3 f zis elektromos motorral hajtott nagysebess g turbina max 49500 fordulat perc biztos tja A Turbo V 750 850 TwisTorr Pumping System szennyez anyagokt l mentes s ez rt alkalmas tiszta v kuumot ig nyl alkalmaz sokra Fel van szerelve k ls csatlakoz kkal hogy tov bbi ventill tort t pl ljon vez relje a ventill tor szelepet amit t voli helyr l ir ny t egy soros vonalon RS232 vagy RS485 kereszt l csatlakoztatott gazdag p seg ts g vel A k vetkez bekezd sek a berendez st haszn l kezel biztons g nak garant l s hoz sz ks ges sszes inform ci t tartalmazz k R szletes inform ci t tal l a Technical Information f ggel kben Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 199 406 11 Felhaszn l i K zik nyv Ez a k zik nyv a k vetkez szabv nyos protokollt haszn lja VI 35438 400 A figyelmeztet zenetek felh vj k a kezel figyelm t egy konkr t elj r sra vagy gyakorlatra amit ha nem k vetnek megfel
202. n Der Bediener muss sicherstellen dass er die korrekte Kuh lungsart WIN 106 vorbereitet hat 1 f r Wasserk hlung O f r Geblisekiihlung Standard Einstellung iiber serielle Steuerung WIN 106 Fiir weitere Details im Anhang Technical Information nachschauen Der Bediener muss sicherstellen dass er die korrekte Be triebsart abh ngig vom zu pumpenden Gas vorbereitet hat WIN 157 1 f r N und leichtere Gase 0 fiir Argon Standard Einstellung iiber serielle Steuerung WIN 157 Fiir weitere Details im Anhang Technical Information nachschauen Die Pumpe niemals in Betrieb nehmen wenn der Eingangsflansch nicht an die Vakuumkammer angeschlossen oder der Verschlussflansch nicht geschlossen ist Wahrend der Erhitzung nicht die Turbopumpe und ihr eventuelles Zubeh r anfassen Die erh hte Temperatur kann Verletzungen an Personen verursachen Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 43 406 2 Gebrauchsanleitung Te Wenn die Pumpe in Betrieb ist St e Schwingungen oder br ske Verschiebungen vermeiden Die Lager k nnten besch digt werden Fur die Luftzufuhr der Pumpe inerte Luft oder Gas frei von Staub und Teilchen verwenden Der Eingangsdruck durch den entsprechenden Eingang muss unter 2 bar liegen ber dem Luftdruck F r die F rderung von Gasen mit Partikulaten oder aggressiven Schadstoffen fir die Lager haben diese Pumpen einen eigens dafiir vorgesehenen Eingang oder eine spezifische Vorrichtun
203. n r aktiv se avsnittet J1 REMOTE I O i bilagan Technical Information F r att starta systemet utf r f ljande steg 1 ta bort i f rekommande fall systemets motkontakt I O 2 f r att satta p Turbo V 750 850 TwisTorr Pumping System m ste en sp nning p 48 V likstr m f rutses genom ett extert n taggregat 969 6521 3 stall trycket i vakuumkammaren p 0 1 mbar 4 aktivera START signalen f r Turbo V 750 850 TwisTorr Pumping System p ett av de f ljande s tten a anslut motkontakten I O som medf ljer b aktivera START signalen genom fj rrkontroll med kontakten I O se avsnittet J1 REMOTE I O i bilagan Technical Information 154 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 c aktivera START signalen genom fj rrkontroll med seriegranssnittet RS 232 485 se avsnittet RS 232 485 Communication Description i bilagan Technical Information Den integrerade kontrollenheten k nner automatiskt igen de narvarande signalerna f r INTERLOCK och START och startar pumpen Liget Soft Start ar forutsett for att tinda pumpen efter ett langre stillastaende Detta tillater en optimal f rdelning av fettet i lagren Soft Start aktiveras genom motsvarande programvara eller genom fjarrkontrollen I O se avsnittet INTERCONNECTION och RS 232 485 COMMUNICATION DESCRIPTION i bilagan Technical Information Systemet ar f rutsett med en signal som visar statuset med e
204. n ch podm nk ch syst mu rozsvicena st l m sv tlem erpadlo se nach z ve stavu b n ho ot en pomalu blik s periodou p ibli n 400 ms syst m se nach z ve stavu rampy brzd n zastaven nebo ek n na sign l vz jemn ho propojen rychle blik s periodou p ibli n 200 ms v skyt poruchy NEBEZPE Po p iveden nap jen p i zasunut m 15 p lov m konektoru protikusu bude v v va Turbo V 750 850 TwisTorr Pumping system uvedena do innosti automaticky dic za zen je dod v no ji mechanicky a elektricky spojen s v v vou Odd len dic ho za zen z t lesa v v vy m e b t provedeno pouze person lem autorizovan m firmou Agilent Vacuum Technologies P i uveden v v vy Turbo V 750 850 TwisTorr Pumping System do chodu po del m obdob ne innosti je t eba je t p ed zveden m syst mu do innosti aktivovat speci ln funkci SOFT START Syst m bude uveden do chodu postupn a do dosa en pln rychlosti v pr b hu p ibli n 35 minut Pot co syst m dos hnul pln rychlosti postup soft start m e b t vypnut a n sleduj c uveden do chodu mohou b t provedena obvykl m zp sobem 246 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A N vod k Pou it 13 Pro zachov n t dy ochrany IP 54 pou vejte v hradn konektory dodan s v v vou Pro nap jec kabel pou ijte
205. n de status oploop of remmen of stop of waiting for interlock a knippert snel periode van circa 200 ms fouttoestand WAARSCHUWING Wanneer de voeding wordt geleverd en de bijgeleverde 15 polige contraconnector is aangesloten wordt het Turbo V 750 850 TwisTorr Pumping System automatisch gestart VOORZICHTIG De controller is bij levering reeds mechanisch en elektrisch met de pomp verbonden De controller mag alleen van het pomphuis worden gescheiden door personeel dat door Agilent Vacuum Technologies werd geautoriseerd Bij inschakeling van het Turbo V 750 850 TwisTorr Pumping System na een lange periode van stilstand moet de speciale SOFT START functie geactiveerd worden voordat het systeem wordt gestart Het systeem wordt in een tijd van ca 35 minuten in achtereenvolgende stappen gestart en op volle snelheid gebracht Nadat het systeem de volle snelheid heeft bereikt kan de soft start procedure worden uitgeschakeld en kan het systeem de volgende keren normaal worden gestart 120 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Om het beschermingsniveau IP 54 te behouden moeten uitsluitend de bij de pomp geleverde connectoren worden gebruikt Gebruik voor de voedingskabel alleen de PN 969 9957 of 969 9958 Gebruik deze kabel en stekker samen met een goed geaard stopcontact om elektrische schokken te voorkomen en aan de vereisten van de EG normen te
206. n soft start proceduren sl s fra og de efterf lgende opstarter kan udf res p normal vis For at bibeholde beskyttelsesniveauet IP 54 ma der udelukkende anvendes de stikforbindelser som f lger med pumpen Til stramforsyningskablet ma der udelukkende anvendes PN 969 9957 eller 969 9958 Anvend dette kabel og stik sammen med en stikkontakt med korrekt jordforbindelse der lever op til EF reglerne for at undga elektriske stad 138 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 Stop af Turbo V 750 850 TwisTorr Pumping System Pumpen kan stoppes pa en af de f lgende m der 1 ved at tr kke det medf lgende I O modstik ud 2 ved at sende STOP signalet via fjernbetjening gennem I O stikket se afsnit J1 REMOTE I O i bilaget Technical Information 3 ved at sende STOP signalet via fjernbetjening gennem den serielle gr nseflade RS 232 485 se afsnit RS 232 485 Communication Description i bilaget Technical Information Af hensyn til operat rens sikkerhed skal str mforsyningen 969 6521 til TV750 850 TwisTorr Pumping System forsynes med et str mforsyningskabel med 3 ledninger se afsnittet ACCESSORIES AND SPARE PARTS i bilaget Technical Information med et internationalt godkendt stik Anvend dette kabel og stik sammen med en stikkontakt med korrekt jordforbindelse der lever op til EF reglerne for at undg elektriske st d H jsp ndingen i kontrolleren kan med
207. n 48 V DC zu liefern dies mittels eines externen Speisers 969 6521 3 Den Druck in der Vakuumkammer auf 0 1 mbar bringen 4 Dem Turbo V 750 850 TwisTorr Pumping System das START Signal auf eine der folgenden Arten geben a Den mitgelieferten Gegenstecker I O anschlie en b Ferngesteuert das START Signal geben mittels Stecker I O siehe Absatz J1 REMOTE I O im Anhang Technical Information c Ferngesteuert das START Signal mittels serieller Schnittstelle RS 232 485 geben siehe Absatz RS 232 485 Communication Description im Anhang Technical Information Der integrierte Controller erkennt automatisch die Prasenz der Signale von INTERLOCK und START und startet die Pumpe Die Art Soft Start ist zum Starten der Pumpe nach einem langen Stillstand vorgesehen Dies erlaubt eine optimale Schmierverteilung in den Lagern Um die Art Soft Start zuzulassen muss man diesen mittels entsprechender Software oder Fernsteuerung I O zulassen siehe Abs tze INTERCONNECTION und RS 232 485 COMMUNICATION DESCRIPTION im Anhang Technical Information Das System hat eine griine Led als Signal fiir die Zustandsmeldung Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 45 406 2 Gehrauchsanleitung Das griine LED auf der Stirntafel der Basis des 750 850 TwisTorr Pumping Systems zeigt mit der Frequenz seines Blinkens die Betriebsbedingungen des Systems an a Fix eingeschaltet Die Pumpe ist in normaler Rotat
208. n gr n lysdiod Den gr na lysdioden pa frampanelen pa 750 850 TwisTorr Pumping System anger genom en blinkning systemets funktionstillstand t nd med fast sken pumpen roterar normalt blinkar l ngsamt period p ungef r 400 ms systemet star p rampa eller ir bromsat eller pa Stop eller Waiting for interlock blinkar snabbt period p ungef r 200 ms feltillst nd Nar str mf rs rjningen s tts pa och den 15 v gs motkontakten som medf ljer s tts i startas Turbo V 750 850 TwisTorr Pumping System automatiskt 1121933173526 Kontrollenheten levereras redan mekaniskt och elektriskt ansluten till pumpen Separeringen av kontrollenheten fran pumphuset kan endast g ras av en auktoriserad personal fran Agilent Vacuum Technologies Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 155 406 8 Bruksanvisning N r Turbo V 750 850 TwisTorr Pumping System startas efter ett l ngre stillast ende innan systemet startas skall den speciella funktionen SOFT START aktiveras Systemet startas stegvis till en maximal hastighet inom en tid p ungef r 35 minuter Efter att systemet n tt en maximal hastighet kan proceduren soft start inaktiveras och f ljande starter kan utf ras p normalt s tt F r att bibeh lla skyddsniv n IP 54 anv nd endast kontaktdonen som medf ljer pumpen Anv nd endast elkablarna PN 969 9957 or 969 9958 Anv nd denna kabel och kontakt tillsammans med ett jorda
209. n omst ndigheder benyttes p steder med skiftende vejrforhold regn is sne st v aggressive luftarter eller i omgivelser med eksplosionsfare eller get risiko for brand F lgende krav til omgivelsesforholdene g lder ved drift max tryk 2 bar over det atmosf riske tryk temperatur fra 5 C til 45 C se illustrationen i bilaget Technical Information a relativ luftfugtighed 0 90 ikke kondenserende Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger Turbo V 750 850 TwisTorr Pumping System skal tilsluttes en hovedpumpe se skemaet Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruktionsbog 7 Fastgorelse af pumpe DIE Manglende overholdelse af disse installationsinstruktioner kan s fremt der opst r en fejl pa rotoren medf re at pumpen river sig los fra systemet og medf rer alvorlige personskader eller d dsfald Turbo V 750 850 TwisTorr Pumping System kan installeres i en hvilken som helst position Mont r Turbo V 750 850 TwisTorr Pumping System i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 8000 Nm omkring dens egen akse ISO K flangen kan fastg res med st lklemmerne med h j resistens typen model Agilent IC 63250 DCMZ Den nedenst ende tabel beskriv
210. n vallen en geen stoten of trillingen te verduren krijgt WAARSCHUWING Sommige modellen wegen meer dan 18 Kg modellen 969 8814 969 8816 969 6014 969 6016 969 6017 In dat geval moet de pomp met behulp van geschikte hefmiddelen of in elk geval door twee personen gehanteerd worden OORZICHTIG Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de milieurichtlijn 94 62 EG en latere wijzigingen Om ontgassingsproblemen te voorkomen mogen de componenten die met het vacuiim in aanraking komen niet met de blote handen aangeraakt worden Gebruik altijd handschoenen of een andere geschikte bescherming Het Turbo V 750 850 TwisTorr Pumping System kan niet beschadigd worden door eenvoudigweg aan de atmosfeer blootgesteld te worden Toch wordt aangeraden om de pomp gesloten te houden zolang deze niet in het systeem wordt ingebouwd zodat eventuele vervuiling door stof wordt voorkomen 112 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Turbo V 7 8 TwisTorr Pumpin tem C POWER PPLY 6 Figuur 1 De verpakking van het Turbo V 750 850 TwisTorr Pumping System bevat 1 Pomp met ingebouwde controller 2 Inlet screen gemonteerd 3 Deze handleiding op CD ROM 4 Doos met toebehoren a 15 polige contraconnector REMOTE I O IP 54 met ingebouwde verbindingen voor het starten van de pomp b 9 polige contraconne
211. na Obsluhu Bezpe nostn n vod pre Turbomolekularne v vevy 252 V eobecn inform cie 253 Uchov vanie 255 Priprava na in talaciu 256 In talacia 258 Upevnenie vyvevy 259 Pou itie zariadenia Turbo V 750 850 TwisTorr Pumping System 261 Sp sob uvedenia zariadenia Turbo V 750 850 TwisTorr Pumping system do innosti 263 Sp sob zastavenia zariadenia Turbo V 750 850 TwisTorr Pumping System 265 Nudzov zastavenie 266 Udr ba 267 Likvidacia 268 Preklad originalneho navodu 5 Agilent Technologies 251 406 14 Navod na Obsluhu Bezpe nostne navod pre Turbomolekularne wyvewy Turbomolekularne vyvevy ak s nasledovne popisovan obsahuju velk mno stvo kinetickej energie vd aka vysokej ota avej rychlosti v kombinacii s konkretnym objemom ich rotorov V pripade syst movej poruchy napr pri kontakte rotora a statora alebo pri zlomeni rotora sa mo e uvolnit rota na energia 3372115088 Pokyny k in tal cii uveden v tomto n vode musia by d sledne dodr ovan aby nedo lo k po kodeniu zariadenia alebo k zraneniu obsluhy 252 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A N vod na Obsluhu 14 V eobecne informacie Toto zariadenie je ur en pre profesion lnych pracovnikov Skor ne za nete zariadenie pou ivat pre itajte si navod na pou itie a v etky al ie pokyny spolo nosti Agilent Spolo nos Agilent nenesie iadnu zodpovednost za ak kolvek udalosti zapri i
212. naci n Significado del logotipo WEEE presente en las etiquetas El simbolo que se indica a continuaci n es aplicado en observancia de la directiva CE denominada WEEE Este simbolo valido s lo para los paises miembros de la Comunidad Europea indica gue el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto se invita al usuario final a ponerse en contacto con el proveedor del dispositivo tanto si ste es la casa fabricante o un distribuidor para poder proveer a la recogida y eliminaci n del producto despu s de haber efectuado una verificaci n de los t rminos y condiciones contractuales de venta V m Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 87 406 4 Manual de istrucciones Eliminaci n 88 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual Manual de Istruc es Indicac es de Seguranca para Bombas Turbomoleculares 90 Informac es gerais 91 Armazenagem 93 Preparac o para a instalac o 94 Instalac o 96 Fixac o da bomba 97 Uso do Turbo V 750 850 TwisTorr Pumping System 99 Como arrancar o Turbo V 750 850 TwisTorr Pumping System 101 Como parar o Turbo V 750 850 TwisTorr Pumping System 103 Paragem de Emerg ncia 104 Manutenc o 105 Eliminac o 106 Traduc o
213. nced exchange service ktor zabezpe v menu syst mu s poruchou za regenerovan syst m Sk r ne syst m odo lete na opravu alebo v menu mus te vyplni dotazn k Zdravie a bezpe nos Dotazn k pripojen k n vodu na pou itie je potrebn vyplni a odosla miestnemu predajcovi K piu dotazn ka vlo te do bal ka so syst mom a odo lite spolu s n m Ak je potrebn likvid cia syst mu mus prebehn v s lade so pecifick mi predpismi danej krajiny Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 267 406 14 Navod na Obsluhu Likvidacia Vyznam loga WEEE nachadzajuceho sa na titkoch Aplikovanie doluozzna en ho symbolu dodr uje smernicu EU s n zvom WEEE Tento symbol platn iba pre taty Eur pskej Unie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa skontaktoval s dod vate om pr stroja i u je to v robca alebo predajca za elom jeho likvid cie pod a zmluvn ch podmienok predaja NE Sl p xt pr A 268 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 15 Priro nik za Navodila Varnostna navodila za Turbomolekularne rpalke 270 Splo ne informacije 271 Shranjevanje 273 Priprava za monta o 274 Monta a 276 Pritrjevanje rpalk
214. nd 969 6019 Controller Description The integrated controller is a solid state freguency converter which is driven by a single chip DSP and is composed of one PCB which include 3 phase output analog and input output section Digital Signal Processor and digital section The controller converts a 48Vdc voltage supply into a 3 phase low voltage medium frequency output which is required to power the pump The controller can be operated by a remote host computer via the serial connection A Windows based software is available T Plus optional An external Power Supply model 969 6521 is available in order to supply the voltage 48 Vdc to the pumping system Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 315 406 17 Technical Information Technical Specification Tab 4 Technical Specification Pumping speed N2 He H2 Ar Gas throughput at full rotational speed with recommended forepump N2 He Ar Compression ratio N2 He H2 Base pressure with recommended forepump Inlet flange Foreline flange Rotational speed Start up time Recommended forepump Operating position Operating ambient temperature Relative humidity of air Bakeout temperature 316 406 680 I s 160 sccm ISO 200 CF 10 750 I s 690 I s 590 I s 700 1 s Water cooling best conditions 600 sccm 700 sccm 180 sccm 700 I s 680 I s 580 l s Air cooling best conditions 250 sccm 450 sccm 1 x 101
215. ne For at aktivere funktionen Soft Start skal den sl s til med den tilh rende software eller med en I O kommando fra fjernbetjeningen se afsnittene INTERCONNECTION og RS 232 485 COMMUNICATION DESCRIPTION i bilaget Technical Information Systemet er udstyret med et statussignal med en gr n diode Den gr nne diode p frontpanelet af 750 850 TwisTorr Pumping System viser systemets drifttilstand med frekvensen af sine blink a konstant t ndt pumpen drejer normalt blinker langsomt periode p cirka 400 ms systemet er i en tilstand med acceleration opbremsning stop eller Venter p sammenkobling a blinker hurtigt periode p cirka 200 ms fejltilstand IONES N r str mmen forsynes gennem det medf lgende modstik med 15 stikben starter Turbo V 750 850 TwisTorr Pumping System automatisk lehrer Kontrolleren leveres med de mekaniske og elektriske tilslutninger til pumpen allerede udf rt Adskillelse af kontrolleren fra pumpehuset ma udelukkende udf res af autoriseret personale fra Agilent Vacuum Technologies Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 137 406 7 Istruktionsbog Nar man starter Turbo V 750 850 TwisTorr Pumping System efter en l ngere inaktivitetsperiode skal man aktivere specialfunktionen SOFT START far systemet startes Systemet startes i gradvise trin indtil det opn r fuld hastighed efter cirka 35 minutter Efter at systemet har n et fuld hastighed ka
216. nen postupom ktory nie je v sulade dokonca ani v iasto nom sulade s tymito pokynmi zapri inen nespr vn m pou ivanim zariadenia nepou en mi osobami neopr vnenou pravou zariadenia alebo ak mkolvek postupom ktor je V rozpore so pecifick mi tandardmi danej krajiny Zariadenie Turbo V 750 850 TwisTorr Pumping System predstavuje integrovan syst m s turbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontrol rom Syst m doka e vy erpa ubovo n typ plynu alebo plynnej zmesi Nie je vhodn na vy erp vanie tekut n alebo pevn ch ast Vy erp vanie zabezpe uje ve mi r chla turb na max 49500 ot ok min tu poh an vysokov konn m 3 f zov m elektrick m motorom Zariadenie Turbo V 750 850 TwisTorr Pumping System neobsahuje iadne kontamina n inidl a preto sa hod pre aplik cie vy aduj ce ist v kuum Zariadenie m pomocn konektory na pripojenie pr davn ho ventil tora na ovl danie pr davnej preplachovcej odvzdu ovacej jednotky a jej riadenie na dia ku pomocou hostite sk ho po ta a pripojen ho cez s riov port RS232 alebo RS485 Nasleduj ce asti obsahuj v etky potrebn inform cie ktor zaru uj bezpe nos pracovn ka v priebehu pr ce so zariaden m Podrobn inform cie sa nach dzaj v dodatku Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 253 406
217. ng mee dat hierdoor behalve de voeding van de pomp ook alle andere functies van de controller worden uitgeschakeld zoals bijvoorbeeld het beheer van de gestuurde Purge en Vent en de mogelijkheid om te communiceren met het systeem waarin de pomp via I O s Seri le of Profibus verbindingen is opgenomen Bovendien kan deze bewerking niet garanderen dat de rotor onmiddellijk stopt omdat de draaisnelheid van de rotor afneemt op basis van het vacuiimniveau in het systeem Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Onderhoud Het Turbo V 750 850 TwisTorr Pumping System is onderhoudsvrij Eventuele werkzaamheden moeten door bevoegd persozneel worden uitgevoerd WAARSCHUWING Alvorens werkzaamheden aan het systeem uit te voeren de stekker verwijderen de pomp met behulp van de hiervoor bestemde klep ontluchten en wachten totdat de rotor volledig stil staat en de oppervlaktetemperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter vervanging van de defecte pomp Alvorens de pomp ter reparatie of ruil naar de fabrikant op te sturen moet de bij deze handleiding gevoegde kaart Veiligheid en Gezondheid volledig ingevuld naar het plaatselijke verkoopkantoor worden gestuurd Een kopie van deze kaart moet v r versturing bij de pom
218. ngen bevatten belangrijke informatie die uit de tekst is gelicht 110 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Opslag Om een zo goed mogelijke werking en betrouwbaarheid van de Turbomoleculaire pompen van Agilent te garanderen moeten de volgende voorschriften in acht worden genomen a tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 90 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 maanden vanaf de verzenddatum nf ie Indien om een willekeurige reden de opslagtijd langer is moet de pomp weer naar de fabriek worden gestuurd Voor meer informatie wordt verzocht contact op te nemen met de plaatselijke vertegenwoordiger van Agilent Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 111 406 6 Bedrijfshandleiding Uitpakken Het Turbo V 750 850 TwisTorr Pumping System wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou kunnen zijn meteen contact opnemen met het plaatselijke verkoopkantoor Zorg er bij het uitpakken voor dat het Turbo V 750 850 TwisTorr Pumping System niet ka
219. ni all apparecchiatura e prevenire lesioni agli operatori necessario seguire attentamente le istruzioni di installazione descritte nel presente manuale 16 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Informazioni Generali Questa apparecchiatura destinata ad uso professionale L utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell utilizzo dell apparecchiatura La Agilent si ritiene sollevata da eventuali responsabilit dovute all inosservanza totale o parziale delle istruzioni ad uso improprio da parte di personale non addestrato ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche Il Turbo V 750 850 TwisTorr Pumping System un sistema integrato costituito da una pompa turbomolecolare per applicazioni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effetto pompante ottenuto tramite una turbina rotante ad elevata velocit 49500 giri min max mossa da un motore elettrico trifase ad alto rendimento Il Turbo V 750 850 TwisTorr Pumping System totalmente privo di agenti contaminanti ed quindi adatto per applicazioni che richiedono un vuoto pulito Ha inoltre dei connettori ausiliari tramite i quali
220. nkt J1 REMOTE I O w za czniku Technical Information c przes a sygna START z urz dzenia zdalnego poprzez interfejs szeregowy RS 232 485 patrz punkt RS 232 485 Communication Description w za czniku Technical Information Wbudowany sterownik automatycznie rozpoznaje obecno sygna w INTERLOCK i START i uruchamia pomp Tryb Soft Start jest przewidziany do w czenia pompy po d u szym przestoju Pozwala on na optymalne rozprowadzenie smaru w o yskach Aby uaktywni tryb Soft Start nale y w czy go poprzez odpowiedni program software lub polecenie I O z urz dzenia zdalnego patrz punkty INTERCONNECTION i RS 232 485 COMMUNICATION DESCRIPTION w za czniku Technical Information System jest wyposa ony w zielona diode sygnalizujaca jego stan Zielona DIODA umieszczona na panelu czo owym podstawy 750 850 TwisTorr Pumping System wskazuje poprzez cz stotliwo migania warunki operacyjne uk adu a wieci si wiat em sta ym pompa pracuje normalnie miga powoli co oko o 400 ms system jest w stanie zwi kszania pr dko ci lub hamowania lub Stop lub Waiting for interlock Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 227 406 12 Podrecznik Instrukcji miga szybko co oko o 200 ms stan b du ZAGROZENIE Kiedy zostaje doprowadzone zasilanie i jest wtaczone dostarczone przeciwztacze 15 stykowe Turbo V 750 850 TwisTorr Pumpin
221. normale a clignotement lent p riode d environ 400 ms le syst me est en tat de rampe de freinage ou d arr t ou de Waiting for interlock a clignotement rapide p riode d environ 200 ms condition d erreur Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 63 406 3 Mode d emploi VALSSIA Si le syst me est mis sous tension pendant que le contre connecteur 15 ATTENTION broches fourni est ins r le Turbo V 750 850 TwisTorr Pumping System d marre automatiquement Le contr leur fourni est raccord m caniguement et lectriquement a la pompe La d pose du contr leur du corps de pompe ne peut tre effectu e que par un personnel agr par Agilent Vacuum Technologies Quand le Turbo V 750 850 TwisTorr Pumping System est mis en marche au terme d une longue periode d inutilisation la fonction sp ciale SOFT START doit tre activ e avant la mise en marche Le syst me d marre progressivement et atteint la vitesse de r gime en 35 minutes environ Une fois que le syst me tourne pleine vitesse la proc dure de Soft Start peut tre d sactiv e et les d marrages successifs peuvent se faire normalement Pour maintenir le niveau de protection IP 54 utiliser exclusive ment les connecteurs fournis avec la pompe Pour l alimentation utiliser exclusivement un c ble type PN 969 9957 ou 969 9958 et le fixer au contr leur l aide de la bride pr vue voir la figure ci dessous Utiliser
222. nstallation etc CORRECTIVE ACTION PLAN ACTUATION by AGILENT VPD XXX Code for dialing Italy from your country es 01139 from USA 00139 from Japan etc I Agilent Technologies Agilent Technologies Vacuum Products Division Instructions for returning products Dear Customer Please follow these instructions whenever one of our products needs to be returned 1 2 3 4 5 6 7 Complete the attached Request for Return form and send it to Agilent Technologies see below taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials After evaluating the information Agilent Technologies will provide you with a Return Authorization RA number via email or fax as requested Note Depending on the type of return a Purchase Order may be required at the time the Request for Return is submitted We will quote any necessary services evaluation repair special cleaning eg Important steps for the shipment of returning product e Remove all accessories from the core product e g inlet screens vent valves e Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue e If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product e Seal the product in a plastic bag and package product carefully to avoid damage in transit You
223. nte il funzionamento necessario che siano rispettate le seguenti condizioni ambientali pressione massima 2 bar oltre la pressione atmosferica temperatura da 5 C a 45 C umidit relativa 0 90 non condensante In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli Il Turbo V 750 850 TwisTorr Pumping System deve essere collegato ad una pompa primaria vedere schema nell appendice Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Fissaggio della pompa NU A T La mancata osservazione di queste istruzioni di installazione nel caso in cui si verifichi un guasto del rotore pu provocare il distacco della pompa dal sistema causando danneggiamenti gravi ferite o morte Il Turbo V 750 850 TwisTorr Pumping System pu essere installato in qualsiasi posizione Fissare il Turbo V 750 850 TwisTorr Pumping System in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia di 8000 Nm attorno al proprio asse La flangia ISO K pu essere fissata usando morsetti in acciaio ad alta resistenza tipo modello Agilent IC 63250 DCMZ La seguente tabella descrive per ogni dimensione di flangia il numero di morsetti IC63250DCMZ necessari e con quale cop pi
224. ntes destacadas do texto 92 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Armazenagem Para garantir o nivel Maximo de funcionalidade e fiabilidade das bombas Turbomoleculares Agilent devem ser observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condic es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de O a 90 n o condensante ao acionar as bombas turbomoleculares pela primeira vez o cliente deve ativa las sempre em modalidade Soft Start 0 tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a contar da data da expedic o CUIDADO Se por uma razdo qualquer o periodo de armazenagem for superior sera necessario enviar outra vez a bomba para o fabricante Para mais informac es contatar o representante local da Agilent Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 93 406 5 Manual de Istruc es Preparac o para a instalac o O Turbo V 750 850 TwisTorr Pumping System fornecido numa embalagem protectora especial se esta apresentar sinais de danos gue poderiam ter ocorrido durante o transporte entrar em contacto com o escritorio de vendas local Durante a remoc o da embalagem tomar muito cuidado para nao deixar cair o controller e para n o submet lo a choques ou vibra es ia Alguns modelos pesam mais de 18 kg modelos 9
225. o molecular Pumps and all other Agilent products featuring the Agilent Window Serial Protocol With T plus you can simultaneously drive and control one or more Turbo Pumps connected to a PC through an RS232 or an RS485 serial communication and by an easy User Interface it is possible to obtain totally control of the Vacuum Pumps Automatic identification of the connected Pumps description of each command always on screen and User Interface adaptable to the Pump Status are only some of the features developed to make the approach to pump settings easy and to reduce the number of steps during pump configuration Moreover special care is given to the GUI Graph ical User Interface to reproduce the environment of well known User Interfaces such as Microsoft Windows applications to obtain a real User Friendly tool and to reduce the user learning time T plus software features several options like Data Logging Chart Representation and Network Con figuration to help you configure your Vacuum de vices quickly and to check your vacuum system status at any time Exhaustive online Help is also included providing the user with a complete easy to learn system tailored to customer requirements ES T plus Turbo V 750 850 AG sau v PI Start Stop Agilent T pl 106 Error Code gi en us 186 Leak Check a DI configuration Turbo Pumps Linked User Software E 3 i Connected to Turbo V750 850 AG la
226. o V 750 850 TwisTorr Pumping System inditasa 209 A Turbo V 750 850 TwisTorr Pumping System leallitasa211 Veszleallitas 212 Karbantartas 212 Megsemmisites 213 Az eredeti utasitas forditasa 25 Agilent Technologies 197 40 11 Felhaszn l i K zik nyv Biztons gi tmutat Turb molekul ris szivatty khoz A turb molekul ris szivatty k ahogy a k vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a forg r sz sz tt r se eset n a forg si energia felszabadulhat VESZELY A berendez s k rosod s nak s a kezel szem lyzet s r l s nek megel z s re az ebben a g pk nyvben adott telep t si utas t sokat szigor an be kell tartani 198 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Felhaszn l i K zik nyv 11 Altalanos Inform ci A berendez st professzion lis felhaszn l k sz m ra tervezt k A felhaszn l nak a berendez s m k dtet se el tt el kell olvasnia ezt a g pk nyvet s a Agilent ltal biztos tott b rmely inform ci t A Agilent nem vonhat felel ss gre olyan esem nyek rt amelyek az ezen utas t soknak val ak r r szbeni meg nem felel s szakk pzetlen szem lyek ltali nem megfelel haszn lat a berendez sbe val jogosulatlan beavatkoz s vagy a konkr t ne
227. o instalacji 220 Instalacja 222 Mocowanie pompy 223 Obs uga Turbo V 750 850 TwisTorr Pumping System 225 W jaki spos b uruchomi Turbo V 750 850 TwisTorr Pumping System 226 W jaki spos b zatrzyma Turbo V 750 850 TwisTorr Pumping System 229 Zatrzymanie Alarmowe 230 Konserwacja 231 Przetworstwo odpadow 232 T umaczenie instrukcji oryginalnej Ee Agilent Technologies 215 406 12 Podrecznik Instrukcji Wskaz wki dotycz ce bezpiecze stwa dla Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obs ugi posiadaj wysok ilo energii kinetycznej spowodowanej bardzo wysok pr dko ci obrotow razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa mo e by zwolniona ZAGROZENIE Aby unikna uszkodzenia aparatury i zapobiec uszkodzeniom ciata operator w nale y obowi zkowo przestrzega zalece dotycz cych instalacji opisanych w niniejszej instrukcji obs ugi 216 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 Og lne informacje Ta aparatura jest przeznaczona do u ytku zawodowego U ytkownik musi przeczyta bardzo uwa nie niniejsz instrukcj ka d dodatkow informacj dostarczon przez firm Agilent przed u ytkowaniem aparatury Firma Agilent uchyla si od jakiejkolwiek odpowiedzialno ci
228. o plynu dus k helium nebo argon pro ochranu lo isek v v vy viz p loha Technical Information POZOR Nikdy nepou vejte v v vu za p tomnosti korozivn ch plyn nebo v par kter by mohly po kodit materi ly kter se nach zej uvnit v v vy P i pou it v v vy pro erp n toxick ch ho lav ch nebo radioaktivn ch plyn dodr ujte p slu n postup pro ka d druh plynu Nepou vejte v v vu za p tomnosti v bu n ch plyn V v va byla navr ena pro erp n dus ku argonu a lehk ch plyn V p pad e by bylo t eba erpat plyny t ne argon je t eba po dat o informace Servisn slu bu firmy Agilent 244 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod k Pou iti 13 Zp sob uvedeni vyv wy Turbo V 750 850 TwisTorr Pumping system do innosti P ed uvedenim syst mu do innosti zkontrolujte zda je odpojen konektor protikus I O Kdy je syst m p ipojen k za zen I O z d lkov ho ovl dac ho m sta ujist te se e sign l STOP je aktivn viz odstavec Jl REMOTE I O v p loze Technical Information Uveden syst mu do innosti se prov d dle n sleduj c ho postupu 1 odpojte je li p tomen konektor protikus I O syst mu 2 pro zapnut v v vy Turbo V 750 850 TwisTorr Pumping System je t eba dodat nap t 48 V prost ednictv m extern ho nap jec ho zdroje 969 6521 3 zajist
229. odel 969 9337 Figure 72 Model 969 9347 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 379 406 17 Technical Information Water Cooling Kit Connection CAUTION The items of the plastic model kit must be assembled as shown in the following figure Figure 73 The assembled kit must be screwed into the suitable holes of the stainless steel pipe with a recom mended closing torgue of 5 Nm Figure 74 380 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Two 6 mm 1 4 internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles These hoses must be held on the respective noz zles using hose clips to avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must be between 15 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow higher than 100 l h T
230. oft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang a Lagringstiden for en turbomolekyl r pumpe er 10 m neder fra sendedato il IST ei AN Hvis lagringstiden av en hvilken som helst grunn er lenger m pumpen returneres til fabrikken Vennligst kontakt den lokale Agilent forhandleren for informasjon Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 165 406 9 Instruksjon Manual Klargjore til installasjon Turbo V 750 850 TwisTorr Pumping System leveres i en spesiell beskyttelsesemballasje Viser denne tegn pa skader som kan ha oppstatt under transporten ma du ta kontakt med det lokale salgskontoret Nar Turbo V 750 850 TwisTorr Pumping System pakkes ut ma du se til at det ikke slippes ned eller utsettes for noen form for stot AVATARS Noen modeller veier mer enn 18 Kg modellene 969 8814 969 8816 969 6014 969 6016 969 6017 I disse tilfelle ma handteringen av pumpen skje ved bruk av passende lofteredskaper eller minst to personer m til Emballasjen m ikke kastes p en ulovlig mate Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 94 62 og p f lgende endringer om milj beskyttelse d and Fora unng avgassingsproblemer m ingen del som skal utsettes for vakuum h ndteres med bare hendene Bruk alltid hansker eller andre og passende verneutstyr Normale milj messige belastninger kan ikke delegge Turbo V 750 850 TwisTorr Pumping S
231. olje mora rpalka biti zaStitena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information Turbo V 750 850 TwisTorr Pumping System morate priklju iti na primarno rpalko glej Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Pritrjevanje rpalke SVARILO Neupo tevanje teh navodil glede namestitve lahko v primeru okvare rotorja povzro i odklop rpalke s sistema s posledi nimi okvarami hudimi po kodbami ali celo smrtjo Sistem Turbo V 750 850 TwisTorr Pumping System je mogo e namestiti v kakr nem koli polo aju Namestite TV 801 Navigator Bolted Flang na stabilno pozicijo tako da zmontirate dovodno prirobnico turbo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 8000 Nm okoli osi Prirobnico ISO K je mogo e pritrditi s pomo jo visoko odpornih jeklenih sponk model Agilent IC 63250 DCMZ Slede a preglednica opisuje za vsako velikost prirobnice tevilo potrebnih sponk IC63250DCMZ in zatezni moment za vija enje slednjih Tab 1 PRIROBNICA N NAVOR ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Naslednja preglednica navaja potrebno tevilo jeklenih vijakov in zatezni moment vija enja slednjih za vsako prirobnico ISO F po priporo ilih Agilenta Tab 2 PRIROBNICA VELIKOST VIJAKOV T NAVOR ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Razred trdnosti jeklenih vi
232. oln poloze V v vu Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou um st te do stabiln polohy a p vodn p rubu turbomolekul rn v v vy p ipevn te k protip rub syst mu pomoc p pojky kter odol to iv mu momentu 8000 Nm kolem sv osy P ruba ISO K m e b t p ipevn na s pou it m svorek z vysoce odoln oceli typ model Agilent IC 63250 DCMZ N sleduj c tabulka popisuje pro ka d rozm r p ruby pot ebn po et svorek IC63250DCMZ a p slu n utahovac moment Tab 1 P RUBA PO ET UTAHOVAC MOMENT ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm N sleduj c tabulka popisuje pro ka dou p rubu ISO F pot ebn po et ocelkov ch roub a p slu n utahovac moment Ut hn te je dle doporu en firmy Agilent Tab 2 P RUBA ROZM R ROUB PO ET UTAHOVAC MOMENT ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm T da odolnosti ocelov ch roub pro p rubu F mus b t 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 241 406 13 Navod k Pou it N sleduj c tabulka popisuje pro ka dou p rubu CF pot ebn po et roub a p slu n utahovac moment Ut hn te je dle doporu en firmy Agilent Doporu uje se pou t vhodn materi l od firmy Agilent Viz p loha Technical Information ohledn podrobn ho popisu Tab 3 P RUBA PO ET UTAHOVAC MOMENT CFF 6 16 20 Nm
233. onalit del controller come ad esempio la gestione del Purge e del Vent Controllato e la capacit di comunicare con il sistema in cui la pompa stata integrata via I Os Seriale o Profibus Inoltre questa operazione non pu garantire l arresto immediato del rotore la cui velocit di rotazione diminuir in funzione del grado di vuoto presente nel sistema Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 29 406 1 Istruzioni per l uso Manutenzione Il Turbo V 750 850 TwisTorr Pumping System non richiede alcuna manutenzione Qualsiasi intervento deve essere eseguito da personale autorizzato AVVERTENZA Prima di effettuare qualsiasi intervento sul sistema scollegarlo dall alimentazione mandare all aria la pompa aprendo I apposita valvola attendere fino al completo arresto del rotore ed attendere che la temperatura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituzione di quello guasto Prima di rispedire al costruttore una pompa per riparazioni o advanced exchange service indispensabile compilare e far pervenire al locale ufficio vendite la scheda Sicurezza e Salute allegata al presente manuale di istruzioni Copia della stessa deve essere inserita nell imballo del sistema prima della spedizione 30 406 Qualora un sistema d
234. ontroconnettore di I O in dotazione 2 inviando un segnale di STOP da remoto tramite il connettore I O vedere il paragrafo J1 REMOTE I O nel appendice Technical Information inviando un segnale di STOP da remoto tramite l interfaccia seriale RS 232 485 vedere il paragrafo RS 232 485 Communication Description nell appendice Technical Information Per la sicurezza dell operatore I Alimentatore 969 6521 del TV750 850 TwisTorr Pumping System deve essere alimentato con un cavo di alimentazione a 3 fili vedere il paragrafo ACCESSORIES AND SPARE PARTS nell appendice Technical Information dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel controller possono provocare gravi lesioni o la morte Prima di eseguire delle operazioni di manutenzione all interno dell unit scollegare il cavo di alimentazione 28 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Arresto di Emergenza Per arrestare immediatamente in condizioni di emergenza il Turbo V 750 850 TwisTorr Pumping System occorre staccare il cavo di alimentazione dall alimentazione Occorre per tenere conto che questa operazione oltre a disabilitare completamente l alimentazione della pompa disabilita anche tutte le altre funzi
235. open it will close the circuit when activated or normally close The factory default setting are a Frequency 720 Hz 90 of the max rotational frequency a Hysteresis 2 a Activation type normally open a Delay time O sec These setting can be changed by serial interfaces see windows meaning table windows 101 to 105 The same settings are used by the programmable set point OUTPUT CONFIGURATION i OPTOMIS s fr A J Figure 43 SPEED SETTING PWM input signal to set the pump speed The PWM signal characteristics must be the following a frequency 100 Hz 20 26 a amplitude from 5 to 24 V max duty cycle range from 25 to 75 toff T corresponding to a rotational frequency from 350 Hz to 825 Hz linearly i e pin 5 connected to pin 9 and pin 6 connected to pin 15 default value is 350 Hz Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 343 406 17 Technical Information The duty cycle percentage is referred to the low level portion of the PWM signal High Speed is the nominal rotational frequency of the pump 825 Hz Low Speed 350 Hz corre sponds to the rotational frequency for a stand by status Users can set rotational frequency between these two values 344 406 If any signal isn t applied no connection the driving frequency is set to Maximum ROTATIONAL frequency the default value is 825 Hz it is set
236. ormaci n general 71 Almacenamiento 73 Preparaci n para la instalaci n 74 Instalaci n 76 Fijaci n de la bomba 77 Uso del Turbo V 750 850 TwisTorr Pumping System 79 C mo poner en funcionamiento el Turbo V 750 850 TwisTorr Pumping System 81 C mo parar el Turbo V 750 850 TwisTorr Pumping System 84 Parada de Emergencia 85 Mantenimiento 86 Eliminaci n 87 Traducci n de las instrucciones originales Agilent Technologies 60 40 4 Manual de istrucciones Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor la energ a de rotaci n podr a ser liberada AOE ANNP Para evitar da os a los equipos y prevenir lesiones a los operadores es necesario seguir atentamente las instrucciones de instalaci n descritas en el presente manual 70 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Informaci n general Este equipo es para uso profesional El usuario ha de leer atentamente el presente manual de instrucciones y cualquier otra informaci n suplementaria facilitada por Agilent antes de usar el aparato Agilent se considera libre de po
237. orr User Manual 87 901 020 01 A Ohjekasikirja 10 Turbo V 750 850 TwisTorr Pumping Systemin Kaytto T ss kappaleessa esitet n t rkeimm t k yttomenetelm t Ennen j rjestelm n k ytt suorittakaa kaikki s hk ja paineilmaliit nn t Vakuumikammion mahdollisen kuumenemisen aikana sis nmenossa olevan laipan l mp tila ei saa ylittaa 80 C K ytt j n tulee varmistaa oikea j hdytystapa WIN 106 1 vesij hdytyst 0 pakoteltua ilmaj hdytyst varten oletustapa asettamalla WIN 106 sarjaohjaus Lisatietoja varten ks liite Technical Information Kayttajan on varmistettava oikea toimintatapa pumpattavan kaasun perusteella WIN 157 1 Ns ja kevyempi kaasuja varten 0 Argon kaasua varten oletustapa asettamalla WIN 157 sarjaohjaus Lis tietoja varten ks liite Technical Information VAROITUS Alkaa koskaan antako pumpun toimia jos sis nmenossa olevaa laippaa ei ole kiinnitetty vakuumikammioon ja suljettu sulkulaipalla lk koskeko turbopumppuun ja siihen liittyviin lis varusteisiin l mmitystoimenpiteiden aikana Korkea l mp tila voi aiheuttaa henkil vahinkoja HUOMIO V ltt k pumpun kolhimista kallistamista tai killisi siirtoja sen toiminnan aikana Laakerit voivat vahingoittua K ytt k pumpun paineensy t ss ilmaa tai jalokaasua joka ei sis ll p ly tai hiukkasia Sis nmenossa olevan tarkoituksenmukaisen portin l pi kulkevan paineen tulee ol
238. ovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Smaltimento Significato del logo WEEE presente sulle etichette II simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata WEEE Questo simbolo valido solo per i paesi della Comunita Europea indica che il prodotto sul guale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a contattare il fornitore del dispositivo sia esso la casa madre o un rivenditore per avviare il processo di raccolta e smaltimento dopo opportuna verifica dei termini e condizioni contrattuali di vendita Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 31 406 1 Istruzioni per l uso Smaltimento 32 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual Gebrauchsanleitung Sicherheitshinweise fur Turbomolekularpumpen 34 Allgemeine Informationen 35 Lagerung 37 Vor der Installation 38 Installation 40 Befestigung der Pumpe 41 Nutzung des Turbo V 750 850 TwisTorr Pumping Systems43 Wie man das Turbo V 750 850 TwisTorr Pumping System startet45 Wie man dasTurbo V 750 850 TwisTorr Pumping System anh lt 47 Not Aus 48 Wartung 49 Entsorgung
239. p in de verpakking worden gevoegd Mocht het systeem gesloopt worden ga dan overeenkomstig de specifieke nationale wetgeving te werk Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 123 406 6 Bedrijfshandleiding Afvalverwerking 124 406 Betekenis van het logo WEEE op de etiketten Het onderstaande symbool wordt aangebracht in overeenstemming met de EG richtlijn WEEE Dit symbool alleen geldig voor de landen van de Europese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen met de leverancier van het apparaat zij het de fabrikant of een wederverkoper om het proces van gescheiden inzameling en verwerking in gang te zetten na de van toepassing zijnde termen en voorwaarden van het verkoopcontract te hebben gecontroleerd ES 4 vei X 4 o Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 7 Istruktionsbog Sikkerhedsanvisninger for Molekyl re turbopumper 126 Generel Information 127 Opbevaring 129 Forberedelse f r installation 130 Installation 132 Fastg relse af pumpe 133 Brug af Turbo V 750 850 TwisTorr Pumping System 135 Start af Turbo V 750 850 TwisTorr Pumping System 136 Stop af Turbo V 750 850 TwisTorr Pumping System 139 Nadstop 140 Vedligeholdelse 141
240. partikler eller aggressive stoffer som er forurensende for kulelagrene er disse pumpene utstyrt med en spesiell d r eller en spesifikk ekstra innretning for integrert purge vent som det er n dvendig bruke for mate pumpen med en str m av uvirksom gass nitrogen helium eller argon for beskytte pumpens lagre se vedlegget Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 171 406 9 Instruksjon Manual isla a Bruk aldri pumpen med etsende gasser eller damp som kan skade materiale inne i pumpen N r pumpen brukes for pumpe giftige brennbare eller radioaktive gasser f lg de passende fremgangsm tene som er typisk riktige for hver type gass Bruk ikke pumpene med eksplosive gasser Pumpen er prosjektert for pumpe nitrogen argon og lettere gasser I tilfelle det skulle v re n dvendig pumpe tyngre gasser enn argon ber vi om at det tas kontakt med Agilents Tekniske Assistanse for opplysninger Hvordan starte Turbo V 750 850 Twistorr Pumping System F r systemet startes kontrollere at motkoblingsstykket I O er fjernet Hvis systemet er tilkoblet en innretning med remote I O se til at signalet for STOP er aktivt se avsnittet J1 REMOTE I O i vedlegget Technical Information For starte systemet utf re f lgende skritt 1 ta bort systemets motkoblingsstykke I O om dette finnes 2 For sl pa Turbo V 750 850 TwisTorr Pumping System er det n dvendig a yte en
241. pecialnom ochrannom baleni Ak je balenie po koden o sa mo e sta napr klad po as dopravy obr te sa na zastupenie spolo nosti Agilent Po as vyba ovania syst mu dbajte na to aby zariadenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu NEBEZPE IE Niektor modely v ia viac ako 18 kg modely 969 8814 969 8816 969 6014 969 7016 969 6017 V t chto pr padoch sa mus s v vevou manipulova pomocou vhodn ch zdv hac ch zariaden alebo aspo dvomi osobami Obalov materi l zlikvidujte predp san m sp sobom Tento materi l je 100 recyklovate n a sp a po iadavky smernice 94 62 ES na ochranu ivotn ho prostredia v zmysle nasleduj cich prav Ak chcete pred s probl mom s odply ovan m nechytajte komponenty ktor bud vystaven v kuu hol mi rukami V dy pou vajte rukavice alebo in vhodn ochranu Be n vystavenie vplyvu prostredia nem e zariadenie Turbo V 750 850 TwisTorr Pumping System po kodi Napriek tomu je vhodn aby zariadenie zostalo zabalen a do in tal cie kv li prevencii usadzovania prachu 256 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Turbo V 8 TwisTorr Pumpin tem C POWER PPLY 6 Postava 1 Obal zariadenia Turbo V 750 850 TwissTorr Pumping System obsahuje 1 Vyvevu so vstavan m riadiacim zariaden m 2 Vstupn mrie ku namontovan 3 Tento n vod na CD
242. prechenden Controller besteht Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtourige Turbine max 49500 1 min erreicht die von einem Hochleistungs drehstrommotor angetrieben wird Modell Turbo V 750 850 TwisTorr Pumping System enth lt keinerlei umweltsch dliche Substanzen und eignet sich deshalb auch f r An wendungen die ein sauberes Vakuum erfordern Es verf gt des weiteren ber Zusatzanschl sse ber die ein zus tzlicher Ventilator versorgt das zus tzliche Aggregat purgieren entl ften gesteuert oder die Vorrichtung von einem Host Computer ber eine serielle Leitung gesteuert werden kann RS232 oder RS485 In den folgenden Abschnitten sind alle erforderlichen Informationen f r die Sicherheit des Bedieners bei der Anwendung des Ger ts aufgef hrt Detaillierte technische Informationen sind im Anhang Technical Information enthalten Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 35 406 2 Gebrauchsanleitung In dieser Gebrauchsanleitung werden Sicherheitshinweise folgenderma en hervorgehoben WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang oder eine bestimmte Ausf hrungsweise die bei unkorrekter Ausf hrung schwere Verletzungen hervorrufen k nnten VORSICHT Die Vorsichtshinweise werden vor Vorg ngen
243. pressed in Hz Set Point delay time between the pump start and the set point check seconds Set Point signal activation type the signal can be high level active or low level active Set point hysteresis in of threshold Cooling mode Active Stop write only in stop Start 1 Stop 0 0 OFF 1 0N default 0 Remote 1 Serial 0 default 1 0 Frequency 1 Power default 742 0 to 999999 default 0 0 high level active 1 low level active default 0 0 to 100 default 2 1 WATER default 0 0 NO Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 363 406 17 Technical Information N Read Write Data Description Admitted Type Values 108 R W N Baud rate 600 0 1200 1 2400 lt 2 4800 lt 3 9600 lt 4 19200 lt 5 38400 lt 6 110 R W L Interlock type Impulse 0 Continuous 1 default 1 111 R W L Analog output type output voltage 0 frequency signal proportional to frequency or 1 power power default 0 117 R W N Low speed setting Hz 350 to Win 121 default lt 750 120 R W N High speed setting Hz 350 to Win 121 default 825 121 R W N Maximum rotational frequency in Hz 350 to 825 active only in stop condition default lt 825 122 R W L Set Vent Valve open close N C 1 lt open 0 lt close default lt 0 125 R W L Valves operating mode 0 lt Auto Time 1 lt On Command 2 lt Auto Pump Spee
244. prevadzkovych podmienkach systemu rozsvieten st lym svetlom v veva sa nach dza v stave be n ho ot ania pomaly blik s peri dou pribli ne 400 ms syst m sa nach dza v stave rampy brzdenia zastavenia alebo akania na sign l vz jomn ho prepojenia r chlo blik s peri dou pribli ne 200 ms v skyt poruchy NEBEZPE IE Po priveden nap jania pri zasunutom 15 p lov m konektore protikuse bude zariadenie Turbo V 750 850 TwisTorr Pumping system uveden do innosti automaticky Riadiace zariadenie je dod van u mechanicky a elektricky spojen s v vevou Oddelenie riadiaceho zariadenia z telesa v vevy m e by vykonan len person lom autorizovan m firmou Agilent Vacuum Technologies Pri uveden zariadenia Turbo V 750 850 TwisTorr Pumping System do chodu po dlh om obdob ne innosti je potrebn e te pred uveden m syst mu do innosti aktivova peci lnu funkciu SOFT START Syst m bude uveden do chodu postupne a k m nedosiahne pln r chlos v priebehu pribli ne 35 min t Potom o syst m dosiahne pln r chlos postup soft star m e by vypnut a nasleduj ce uvedenia do chodu m u by vykonan obvykl m sp sobom 264 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Pre zachovanie triedy ochrany IP 54 pou ivajte vyhradne konektory dodane s wyvevou Pre napajaci kabel pou ite len PN 969 9
245. pump body around the upper bearing towards the forevacuum line Keep the gas purge on at all times during pump operation during stops and even if there is no flow of aggressive gases This will keep the pressure in the bearings area higher than in the foreline and will prevent pollution or powder from flowing back mainly into the bearings area Disrespect of these simple basic rules may cause seriously damage the pump bearings and void pump warranty Purging the Pump through the Standard Purge Port Purge Valve Installation 388 406 A gas purge valve models 969 9239 969 9240 969 9241 and 969 9242 is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To supply the inert purge gas to the pump through the purge port connect a gas purge valve between the pressure regulator and the pump To install the gas purge valve it is necessary to unscrew the standard purge port cover as shown in the following figure Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Figure 79 Then screw the gas purge valve with a torque of 2 5 Nm Adjust the pressure regulator in order to read a gas flow rate of 0 1 to 0 8 mbar 1 s CAUTION To prevent bearing damage Agilent suggests a minimum purge gas flow rate of 10 sccm 0 17 mbar I s This value can be exceeded according to the process reguirements Please contact Va
246. radioaktywnych nale y post powa zgodnie z procedurami dotycz cymi ka dego typu gazu Nie stosowa pompy w obecno ci gaz w wybuchowych Pompa jest zaprojektowana do pompowania azotu argonu i gaz w l ejszych W przypadku konieczno ci pompowania gaz w ci szych od argonu nale y skontaktowa si z dzia em Obs ugi Technicznej firmy Agilent w celu uzyskania odpowiednich informacji W jaki spos b uruchomi Turbo V 750 850 TwisTorr Pumping System 226 406 Przed uruchomieniem systemu sprawdzi czy przeciwz cze I O zosta o usuni te Je eli uk ad jest pod czony do zdalnego urz dzenia I O upewni si czy sygna STOP jest aktywny patrz punkt J1 REMOTE I O w za czniku Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 W celu uruchomienia systemu nale y wykona ni ej wymienione operacje 1 wymontowa je eli istnieje przeciwzlacze I O systemu 2 w celu w czenia Turbo V 750 850 TwisTorr Pumping System nale y do niego doprowadzi napi cie 48 V pr du sta ego za pomoc zewn trznego zasilacza 969 6521 3 doprowadzi ci nienie w komorze pr niowej do 0 1 mbar 4 przekaza do Turbo V 750 850 TwisTorr Pumping System sygna START w jeden z ni ej podanych sposob w a pod czy przeciwzlacze I O b d ce cz ci wyposa enia b przes a sygna START z urz dzenia zdalnego poprzez przeciwz cze I O patrz pu
247. ranjevanju rpalk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti O do 90 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga prese ete ivljenjsko dobo je treba rpalko vrniti v tovarno Za dodatne informacije kontaktirajte lokalnega predstavnika prodaje in storitev za Agilent Vacuum Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 273 406 15 Priro nik za Navodila Priprava za monta o Turbo V 750 850 TwisTorr Pumping System je dobavljen v posebni za itni embala i e je embala a po kodovana kontaktirajte lokalno prodajno pisarno Pri odpiranju sistema pazite da vam ne pade iz rok oz ga ne stresajte SVARILO Nekateri modeli so te ki ve kot 18 kg modeli 969 8814 969 8816 969 6014 969 6016 969 6017 V teh primerih morate rpalko premikati s pomo jo ustreznih dvi nih sredstev ali pa morata pri tem posegu sodelovati vsaj dve osebi Embala o zavrzite v skladu s pravili Material je mogo e v celoti reciklirati in je skladen z direktivo EGS t 85 399 Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj boste tako prepre ili probleme pu anja Zmeraj uporabite rokavice ali drugo primerno za ito Normalna i
248. raves ou la mort Le Turbo V 750 850 TwisTorr Pumping System peut tre install dans n importe guelle position Fixer le Turbo V 750 850 TwisTorr Pumping System de facon stable en assurant la collerette d entr e de la turbopompe a la contre collerette du syst me au moyen d une connexion en mesure de r sister a un couple de 8000 Nm autour de son axe La bride ISO K peut tre fix e a l aide d triers en acier a haute resistance type modele Agilent IC 63250 DCMZ Le tableau ci dessous d crit pour chague taille de bride le nombre d triers IC63250DCMZ n cessaires et le couple de serrage correspondant Tab 1 BRIDE N COUPLE DE SERRAGE ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Le tableau ci dessous d crit pour chague bride ISO F le nombre de vis en acier n cessaires et le couple de serrage pr conis par Agilent Tab 2 BRIDE DIMENSION VIS N COUPLE DE SERRAGE ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm La classe de resistance des vis en acier pour la bride F doit tre 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 59 406 3 Mode d emploi ATTENTION Le tableau ci dessous d crit pour chaque bride CF le nombre de vis n cessaire et le couple de serrage pr conis par Agilent Il est recommand d utiliser le mat riel Agilent appropri Consultez l annexe Technical Information pour une description d taill e Tab 3 FLANSCH ANZ ANZUGSMOMENT CFF 6 16 2
249. rbo V 750 850 TwisTorr Pumping System n o pode ser fixado pela sua base O Turbo V 750 850 TwisTorr Pumping System pertence segunda categoria ou sobretens o de instalac o de acordo com a directiva EN 61010 1 Realizar a conex o do dispositivo na linha de alimentac o de modo a satisfazer os reguisitos previstos para esta categoria Utilizar os contra conectores fornecidos para conservar o grau de protecc o IP 54 O Turbo V 750 850 TwisTorr Pumping System eguipado com conectores de Input Output e de comunicac o serial gue devem ser conectados a circuitos externos de modo a tornar as partes el ctricas inacessiveis Certificar se de que o isolamento do dispositivo conectado ao Turbo V 750 850 TwisTorr Pumping System possua um isolamento adeguado mesmo em condic o de avaria simples como previsto pela normativa EN 61010 1 98 406 Para a instalac o dos acess rios opcionais consultar Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de Istruc es 5 Uso do Turbo V 750 850 TwisTorr Pumping System Neste paragrafo s o apresentados os principais procedimentos operacionais Antes de usar o sistema realizar todas as conex es el ctricas e pneum ticas Durante o eventual aguecimento da c mara de v cuo a temperatura na flange de entrada n o deve ser superior a 80 C O operador deve certificar se de predispor o modo de arrefecimento correcto WIN 106 1 para arrefecimento
250. ri an for specific applications The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 389 406 17 Technical Information Pump used with Corrosive Gases Pump Purging Purging the Pump through the Integrated Purge Vent Device Accessory Purge Vent Device Installation An integrated purging and venting device 969 6502 is available as an accessory to both purge and vent the TV750 850 TwisTorr Pumping System As shown in the following figure the purge vent device is made up of an aluminium block with two solenoid valves fixed on it All mechanical and electrical connections are made in such a way to guarantee the IP54 protection class The two sole noid valves are Normally Closed in case of power fail both the vent and the purge lines are shut off When the pump is powered on their default set tings from the factory are as follow Vent valve Closed a Purge valve Open The valves operating mode can be set only by se rial line with WIN 125 WIN 122 and WIN 145 Figure 80 390 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Both valves are fed through a single gas port with 1 8 Gas thread To supply the inert purge gas to the pump through the purge vent device connect a gas purge line to the common 1 8 Gas thread port The purging device automatically
251. rial RS 232 485 consultar el apartado RS 232 485 Communication Description en el anexo Technical Information iADVERTENCIA Para la seguridad del operador el Alimentador 969 6521 del TV750 850 TwisTorr Pumping System debe ser alimentado con un cable de alimentaci n de 3 hilos consultar el apartado ACCESSORIES AND SPARE PARTS en el anexo Technical Information provisto de una clavija aprobada a nivel internacional Utilizar el cable y la clavija junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los reguerimientos de las normas CE Las altas tensiones gue se verifican en el controlador pueden provocar graves da os o la muerte Desconectar el cable de alimentaci n antes de llevar a cabo las operaciones de mantenimiento en el interior de la unidad 84 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Manual de istrucciones 4 Parada de Emergencia Para parar inmediatamente en situaciones de emergencia el Turbo V 750 850 TwisTorr Pumping System se debe desconectar el cable de alimentaci n de la tensi n Sin embargo se debe tener en cuenta que esta operaci n ademas de inhabilitar completamente la alimentaci n de la bomba tambi n inhabilita todas las otras funciones del controlador como por ejemplo la gesti n del Purge y del Vent Controlado y la capacidad de comunicarse con el sistema en el que se ha integrado la bomba mediante E Ss S
252. roidissement eau O pour le refroidissement air puls mode par d faut en r glant la commande s rie WIN 106 Pour plus de d tails consultez l annexe Technical Information L op rateur doit galement s lectionner le bon mode de fonctionnement en fonction du gaz pomper WIN 157 1 pour le N et les gaz plus l gers 0 pour l argon mode par d faut en r glant la commande s rie WIN 157 Pour plus de d tails consultez l annexe Technical Information AVERTISSEMENT Ne faites jamais fonctionner la pompe si la bride d entr e n est pas raccord e a la chambre a vide ou si elle n est pas ferm e par la bride de fermeture Ne touchez pas la pompe et les ventuels accessoires pendant les operations de chauffage La temperature lev e peut entrainer des l sions aux personnes Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 61 406 3 Mode d emploi ATTENTION Evitez les chocs les oscillations et les deplacements brusques de la pompe pendant son fonctionnement Les roulements peuvent tre endommag s Pour l alimentation en air de la pompe utilisez de l air ou un gaz inerte exempt de poussi re ou de particules La pression d entr e a travers le port pr vu a cet effet doit tre inf rieure a 2 bar outre la pression atmosph rigue Pour le pompage de gaz contenant des particules ou des polluants agressifs pour les roulements ces pompes sont dot es d un port sp cial ou d un dispositif sp cifigue d
253. s n P N 9699525 Z serial Settings VN D Remote 1 0 I vaives M set Port Pump Status I counters x E temita Stop Programming Gauge Reading Configuration Controller Functionality Mode Remote Soft Start Disable The Measure of Confidence Cooling Figure 58 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 369 406 17 Technical Information Agilent T Plus Embedded Data logger Manager New Function This controller integrates the data logger function it enables the controller to manage some log files with a big amount of data The user can download this data using the T plus software EA T plus Turbo V 750 850 AG File MSS Save Global Windows Status View Diagnostic Data List Insert Unknown Window Ag i e nt T p u S Enter Authentication Code Embedded Data Logger Manager Turbo Pumps Linked User Software Readings Connected to Turbo V 750 850 AG CA speed Settings O Power Settings DO serial Settings P N 9699525 S N O Remote 1 0 O Valves O set Point Pump Status O counters O identification CA Programming Gauge Reading Configuration Controller Functionality Mode Soft Start The Measure of Confidence Cooling Figure 59 The EDLM Interface will be as shown below zi T plus Embedded Data Logger Manager Turbo V 750 850 AG 1 Select file to which pump data would be downloaded File Browse 2 Select pump data download period
254. s equipment is destined for use by professionals The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment Agilent will not be held responsible for any events occurring due to non compliance even partial with these instructions improper use by untrained persons non authorized interference with the equipment or any action contrary to that provided for by specific national standards The Turbo V 750 850 TwisTorr Pumping System is an inte grated system with a turbo molecular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pumping action is obtained through a high speed turbine max 49500 rpm driven by a high performance 3 phase electric motor The Turbo V 750 850 TwisTorr Pumping System is free of contaminating agents and therefore is suitable for applications requiring a clean vacuum It is equipped with auxiliary connectors to supply an additional fan to control the additional purge vent block and to be controlled from a remote site by means of a host computer connected through a serial line RS232 or RS485 The following paragraphs contain all the information necessary to guarantee the safety of the operator when using the eguipment Detailed information is supplied in the appendix Technical Information Tur
255. s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta velocidade 49500 r p m max movida por um motor el ctrico trifasico de alto rendimento O Turbo V 750 850 TwisTorr Pumping System totalmente isentos de agentes contaminadores e portanto adequado para aplicac es que reguerem um vacuo limpo Alem disso o Turbo V 750 850 TwisTorr Pumping System tem conectores auxiliares atrav s dos quais poss vel alimentar um ventilador adicional comandar o grupo de purge vent adicional accion lo por um controlo remoto atrav s de um computer host conectado por meio de linhas seriais RS 232 RS 485 Nos seguintes par grafos est o descritas todas as informac es necessarias para garantir a seguranca do operador durante o uso da aparelhagem Informac es detalhadas sao fornecidas no apEndice Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 91 406 5 Manual de Istruc es Este manual utiliza as seguintes convenc es HI As mensagens de aten o chamam a aten o do operador para um procedimento ou uma pr tica espec fica que se n o efectuada correctamente pode provocar graves les es pessoais CUIDADO As mensagens de cuidado s o visualizadas antes de procedimentos que se n o observados podem causar danos aparelhagem As notas cont m informa es importa
256. sTorr User Manual 87 901 020 01 A 265 406 14 Navod na Obsluhu 266 406 Nudzove zastavenie Pre okam it zastavenie zariadenia Turbo V 750 850 TwisTorr Pumping System v podmienkach nudzov ho stavu je potrebn odpojit nap jac k bel od nap jacieho pr vodu Je v ak potrebn ma na pamiti e t to oper cia nielen plne vypne nap janie vyvevy ale zru aj v etky ostatn funkcie riadiaceho zariadenia ako napr spr vu riaden ho preplachovania Purge a odvzdu nenia Vent zru aj schopnost s riovej komunikacie komunikacie prostrednictvom zbernice Profibus alebo prostrednictvom I O so systemom do ktor ho bola vyveva zabudovana Okrem toho t to operacia nedok e zaru i okam it zastavenie rotora r chlos ktor ho klesne v z vislosti na stupni v kua ktor sa nach dza v syst me Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod na Obsluhu 14 Udr ba Zariadenie Turbo V 750 850 TwisTorr Pumping System nevy aduje iadnu dr bu Ak kolvek pravy a opravy syst mu mus vykonat kvalifikovan person l 417119138 Sk r ne za nete oko vek robi v syst me odpojte ho od zdroja nap jania vyvetrajte v vevu tak e otvor te pr slu n ventil po kajte k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia m ete vyu i miestne servisn stredisko firmy Agilent alebo slu bu Agilent adva
257. schriften zu erfolgen Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 49 406 2 Gehrauchsanleitung Entsorgung 50 406 Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Ubereinstimmung mit der EU Richtlinie WEEE Waste Electrical and Electronic Equipment angebracht Dieses Symbol nur in den EU Lindern giiltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsmull entsorgt werden darf sondern einem speziellen Sammelsystem zugefiihrt werden muss Der Endabnehmer sollte daher den Lieferanten des Ger ts d h die Muttergesellschaft oder den Wiederverkaufer kontaktieren um den Entsorgungsprozess zu starten nachdem er die Verkaufsbedingungen gepruft hat X ana Ker NZ ZLA EN OY Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 3 Mode d emploi Normes de s curit pour Pompe Turbomol culaires 52 Indications generales 53 Stockage 55 Preparation pour l installation 56 Installation 58 Fixation de la pompe 59 Utilisation du Turbo V 750 850 TwisTorr pumping system 61 Comment d marrer le Turbo V 750 850 TwisTorr Pumping System62 Comment arreter le Turbo V 750 850 TwisTorr Pumping System 65 Arret durgence 66 Entretien 67 Mise au rebut 68 Traduction de la mode d emploi originale Agilent Technologies 51 1 3 Mode d emploi Normes de s curit pour Pompe Turbomoleculaires Les pompes Turbomol
258. senmukaisesti maadoitetun pistorasian kanssa s hk iskujen v ltt miseksi ja CE normien asettamien vaatimusten tyydytt miseksi 192 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Ohjekasikirja 10 Miten Turbo V 750 850 TwisTorr Pumping System pysaytetaan Pumpun pys ytt miseksi voidaan k ytt yht seuraavista menetelmista 1 kytke varustuksiin kuuluva I O vastaliitin irti 2 l hett STOP signaali kauko ohjauksesta liittimen I O avulla ks kappale J1 REMOTE I O liitteesta Technical Information 3 l hett STOP signaali kauko ohjauksesta sarjaliit nn n RS 232 485 kautta ks kappale RS 232 485 Communication Description liitteesta Technical Information VAROITUS K ytt j n turvallisuuden kannalta 969 6521 TV750 850 TwisTorr Pumping Systemiin on sy tett v virtaa 3 johtoista virtajohtoa k ytt m ll ks kappale ACCESSORIES AND SPARE PARTS liitteesta Technical Information joka on varustettu pistokkeella hyv ksytty kansainv lisell tasolla K ytt k tata kaapelia ja pistoketta yhdess tarkoituksenmukaisesti maadoitetun pistorasian kanssa sahk iskujen valttamiseksi ja CE normien asettamien vaatimusten tyydyttamiseksi Controllerissa syntyva korkeajannitys voi aiheuttaa vakavia vahinkoja tai kuoleman Ennen huoltotoimenpiteiden suorittamista yksik n sisalla kytke virtajohto irti Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 193 406 10
259. si del J1 REMOTE I O v dodatku Technical Information 3 po ljite oddaljeni signal za zaustavitev STOP preko serijskega vmesnika RS 232 485 oglejte si del RS 232 485 Communication Description v dodatku Technical Information SVARILO Za zagotovitev varnosti upravljavca je na napajalniku 969 6521 sistema TV750 850 TwisTorr Pumping System obvezna uporaba tri ilnega kabla oglejte si del ACCESSORIES AND SPARE PARTS v dodatku Technical Information z vti em odobrenim na mednarodni ravni Ta kabel in vti uporabite skupaj z ustrezno ozemljeno vti nico ki prepre uje elektri ne udare in izpolnjuje zahteve standardov ES Visoka napetost ki nastaja v kontrolerju lahko povzro i hude po kodbe ali celo smrt Pred kakr nimi koli vzdr evalnimi deli v notranjosti enote odklopite napajalni kabel Zaustavitez v sili Za takoj njo zaustavitev sistema Turbo V 750 850 TwisTorr Pumping System v sili je treba napajalni kabel izvle i iz vti nice Vedeti pa je treba da ta postopek poleg popolnega izklopa napajanja rpalke onemogo i tudi vse druge funkcije kontrolerja kot so na primer nadzor Purge in Vent ter sposobnost komunikacije s sistemom v katerega je rpalka vgrajena preko I O serijskega ali Profibus vmesnika Poleg tega ta postopek ne zagotovi takoj nje zaustavitve rotorja katerega hitrost vrtenja se zmanj uje glede na stopnjo vakuuma ki je prisoten v sistemu Turbo V 750 850 TwisTorr User Man
260. sibles responsabilidades debidas al incumplimiento total o parcial de las instrucciones al uso impropio por parte de personal no preparado a operaciones no autorizadas o a un uso contrario a las normas nacionales especificas El Turbo V 750 850 TwisTorr Pumping System es un sistema integrado compuesto por una bomba turbomolecular para aplicaciones de alto y ultra alto vacio integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear liguidos o particulas s lidas El efecto de bombeo se obtiene mediante una turbina rotativa de alta velocidad 49500 r p m max movida por un motor el ctrico trifasico de alto rendimiento El Turbo V 750 850 TwisTorr Pumping System no posee ningun agente contaminante y por lo tanto es adecuado para aplicaciones que reguieren un vacio limpio Asimismo posee conectores auxiliares con los gue se puede alimentar un ventilador adicional controlar el grupo de purge vent adicional pilotarlo a distancia con un ordenador host conectado mediante linea serial RS232 o RS485 A continuaci n se facilita toda la informaci n necesaria para garantizar la seguridad del operador al usar el aparato En el anexo Technical Information se facilita informaci n mas detallada Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 71 406 4 Manual de istrucciones Este manual utiliza los simbolos convencionales siguientes
261. ssoire voorzien waardoor de pomp een stroom inert gas stikstof helium of argon ter bescherming van de pomplagers krijgt geleverd zie bijlage Technical Information azalii Gebruik de pomp nooit bij corrosieve gassen of dampen die het materiaal aan de binnenkant van de pomp kunnen beschadigen Wanneer de pomp wordt gebruikt voor het pompen van brandbare giftige of radioactieve gassen moeten de procedures worden gevolgd die speciaal voor elk type gas zijn opgesteld Gebruik de pomp niet in aanwezigheid van explosieve gassen De pomp is voor het verpompen van stikstof argon en lichtere gassen ontworpen Indien de noodzaak bestaat om zwaardere gassen dan argon te pompen wordt u verzocht om voor informatie contact op te nemen met de Technische Service van Agilent 118 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bedrijfshandleiding 6 Inschakelen van het Turbo V 750 850 TwisTorr Pumping System Controleer alvorens het systeem te starten of de I O contraconnector is verwijderd Indien het systeem op een remote I O apparaat is aangesloten controleren of het STOP signaal actief is zie paragraaf JI REMOTE I O in de bijlage Technical Information Om het systeem te starten gaat men als volgt te werk 1 verwijder indien aanwezig de I O contraconnector van het systeem 2 om het Turbo V 750 850 TwisTorr Pumping System in te schakelen moet een spanning worden geleverd op 48 Vec via een externe vo
262. sta Turbo V 750 850 TwisTorr Pumping System ei vahingoitu ollessaan kosketuksissa ilman kanssa auki On kuitenkin suositeltavaa pit se suljettuna kunnes se asennetaan j rjestelm n Siten v ltet n laitteen mahdollinen p lysaastuminen 184 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Ohjekasikirja 10 Turbo 850 TwisTorr Pumpin vstem C POWER PPLY 6521 Kuva 1 Turbo V 750 850 TwisTorr Pumping System jarjestelman pakkaus sisaltaa 1 Integroidulla controllerilla varustetun pumpun 2 Inlet screenin asennettu 3 T m n k yttoohjeen CD ROM muodossa 4 Lis varustelaatikon a 15 tie REMOTE I O IP 54 vastaliitin johon kuuluu tarvittavat liit nn t pumpun k ynnist mist varten b sarjakytkenn ss k ytett v 9 tie SERIAL IP 54 liitin Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 185 406 10 Ohjekasikirja Asennus HUOMIO Irrottakaa teippi ja poistakaa suojakansi vasta kun turbopumppu kytket n j rjestelm n 186 406 Kuva 2 Asenna laite ainoastaan suljettuun tilaan l k yt sit ilmastotekij ille sade pakkanen lumi p lylle tai sy vytt ville kaasuille altistuvissa r j hdysvaarallisissa tai eritt in palovaarallisissa tiloissa K yt n aikana on noudatettava seuraavia ymp rist koskevia ehtoja maksimipaine 2 baaria yli atmosf risen paineen l mp tila 5 C 45 C su
263. staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen door een zeer snel draaiende turbine max 49500 toeren min die aangedreven wordt door een elektrische draaistroommotor met hoog rendement Het Turbo V 150 850 TwisTorr Pumping System is volledig vrij van verontreinigingen en is dus ook geschikt voor toepassingen die een sehoon vacuum verlangen Het Turbo V 750 850 TwisTorr Pumping System is bovendien van hulpconnectoren voorzien waarmee een extra ventilator kan worden gevoed de aanvullende purge vent unit kan worden aangestuurd en waarmee het systeem d m v een serieel aangesloten host computer op afstand kan worden bediend RS 232 RS 485 In de volgende paragrafen is alle informatie vermeld om de veiligheid van de operator tijdens het gebruik van de apparatuur te verzekeren Gedetailleerde informatie is te vinden in de bijlage Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 109 406 6 Bedrijfshandleiding Deze handleiding hanteert de volgende symbolen UDVISTE MING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale procedure of methode die indien niet correct uitgevoerd ernstig lichamelijk letsel kan veroorzaken 0 le pe Bij dit symbool staat tekst met procedures die indien niet opgevolgd schade aan apparatuur kunnen veroorzaken De opmerki
264. struktionsbog 7 Opbevaring Det er n dvendigt at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra O til 90 ikke kondenserende a Kunden skal altid starte de turbomolekylare pumper ved hj lp af Soft Start funktionen ved modtagelse og start af pumperne for forste gang De turbomolekyleere pumper m opbevares i 10 m neder fra forsendelsesdatoen diste e Hvis opbevaringsperioden af en eller anden grund er l ngere er det n dvendigt at sende pumpen tilbage til fabrikken Yderligere oplysninger f s ved henvendelse til den lokale Agilent repr sentant Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 129 406 7 Istruktionsbog Forberedelse for installation Turbo V 750 850 TwisTorr Pumping System leveres i en speciel beskyttende emballage Kontakt den lokale forhandler hvis emballagen viser tegn pa skader der kan v re opst et under transporten S rg for at Turbo V 750 850 TwisTorr Pumping System ikke tabes eller uds ttes for st d ved udpakningen ADVARSEL Nogle modeller vejer over 18 kg modellerne 969 8814 969 8816 969 6014 969 6016 969 6017 I disse tilf lde ma pumpen kun h ndteres vha passende l ftemidler eller af mindst to
265. t Turbo V 750 850 TwisTorr Pumping System kan in alle standen worden geinstalleerd Bevestig het Turbo V 750 850 TwisTorr Pumping System in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8000 Nm rondom de eigen as te weerstaan De ISO K flens moet worden bevestigd met behulp van stalen klemmen met een hoge weerstand modeltype Agilent IC 63250 DCMZ In de volgende tabel is voor elke flensmaat het aantal benodigde klemmen IC63250DCMZ aangegeven en met welk aanhaalkoppel ze vastgezet moeten worden Tab 1 FLENS NR AANHAAL KOPPEL ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm In de volgende tabel is voor elke ISO F flens het aantal benodigde stalen bouten aangegeven en het door Agilent aanbevolen aanhaalkoppel waarmee ze vastgezet moeten worden Tab 2 FLENS MAAT BOUTEN NR AANHAAL KOPPEL ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm De weerstandsklasse van de stalen bouten voor de F flens moet 12 9 zijn Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 115 406 6 Bedrijfshandleiding In de volgende tabel is voor elke CF flens het aantal benodigde bouten aangegeven en het door Agilent aanbevolen aanhaalkoppel waarmee ze vastgezet moeten worden Aangeraden wordt het geschikte Agilent materiaal te gebruiken Zie de bijlage Technical Information voor de gedetailleerde beschrijving Tab 3 FLENS N
266. t med CD direktivet som har betecknats som WEEE Den har symbolen g ller endast i de l nder som tillh r den Europeiska Unionen indikerar att produkten pa vilken symbolen har applicerats INTE far skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar darf r att slutanv ndaren tar kontakt med leverant ren av anordningen oberoende om det handlar om moderf retaget eller aterf rsaljaren f r att kunna starta uppsamlings och bortskaffningsprocessen detta efter limplig kontroll av kontraktsenliga tidsgr nser och forsaljningsvillkor NES N A Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 159 406 8 Bruksanvisning Bortskaffning 160 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper 162 Generell informasjon 163 Lagring 165 Klargj re til installasjon 166 Installasjon 168 Festing av pumpen 169 Bruk av Turbo V 750 850 TwisTorr Pumping System 171 Hvordan starte Turbo V 750 850 Twistorr Pumping System 172 Hvordan stanse Turbo V 750 850 TwisTorr Pumping System 175 N dstopp 175 Vedlikehold 176 Eliminering 177 Oversetting av den opprinnelige samsvarserkl ringen e Agilent Technologies 161 206 9 Instruksjon Manual Sikkerhetsanvisninger for Turbomolekyl re pumper Turbomolek
267. t uttag f r att undvika st tar och f r en verensst mmelse med EG standarderna 156 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Bruksanvisning 8 Hur Turbo V 750 850 TwisTorr Pumping System stangs av Pumpen kan stangas av pa ett av de foljande s tten 1 koppla fran motkontakten I O som medf ljer 2 s nd en STOP signal genom fj rrkontroll med kontakten I O se avsnittet J1 REMOTE I O i bilagan Technical Information 3 sand en STOP signal genom fj rrkontroll med seriegr nssnittet RS 232 485 se avsnittet RS 232 485 Communication Description i bilagan Technical Information VARNING F r operat rens s kerhet skall n taggregatet 969 6521 f r TV750 850 TwisTorr Pumping System f rs rjas med en tretradig elkabel se avsnittet ACCESSORIES AND SPARE PARTS i bilagan Technical Information med en kontakt godk nd enligt internationella normer Anvand denna kabel och kontakt tillsammans med ett jordat uttag f r att undvika st tar och f r en verensst mmelse med EG standarderna H ga sp nningar som utvecklas i kontrollenheten kan orsaka allvarliga skador eller d den Koppla fran elkabeln innan ett underhall utf rs inuti enheten N dstopp F r ett omedelbart n dstopp av Turbo V 750 850 TwisTorr Pumping System koppla fran elkabeln fran str mf rs rjningen Kom dock ihag att denna operation stanger av str mf rs rjningen till pumpen och inaktiverar ven kontrollenh
268. table via serial line by means of window 121 see the serial command table If a continuous signal is applied pin 5 connected to pin 9 the driving frequency is set to Low Speed the default value is 350 Hz it is settable via serial line by means of window 117 see the serial command table The Low Speed function can also be activated by serial line with win 001 and the low speed value can be adjusted via serial command win 117 Both low speed value win 117 and high speed value win 120 are limited between 350 Hz can t be set by the user and Maximum excitation freguency win 121 825 Hz default SOFT START input signal to activate the soft start function This function must be activated pin 7 shorted with pin 9 if the pump remains unused for a protracted stop and deactivated for the next run up See the paragraph SOFT START for a more detailed description PROGRAMMABLE ANALOG SIGNAL this output signal is a voltage from 0 to 10 Vdc max load 1 5 mA proportional to a reference quantity frequency or power set by the user The default setting is the frequency see the following example diagram Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Technical Information 17 Output V 825 Frequency Hz Figure 44 The analog output for power is showed in the fo lowing diagram Output V Power W 200 Figure 45 FAULT this open collector output signal is
269. talado em gualguer posic o Colocar o Turbo V 750 850 TwisTorr Pumping System em posic o estavel fixando o flange de entrada da turbobomba ao contra flange do sistema com uma ligacao gue resista a um torque de 8000 Nm volta do seu eixo A flange ISO K pode ser fixada usando terminais de ago de alta resist ncia tipo modelo Agilent IC 63250 DCMZ A tabela a seguir descreve para cada tipo de flange o n mero de terminais IC63250DCMZ necess rios e com gual torque de aperto devem ser apertados Tab 1 FLANGE N TORQUE DE APERTO ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm A tabela a seguir descreve para cada flange ISO F o n mero de parafusos de aco necessarios e com gual tor gue de aperto devem ser apertados de acordo com as recomendac es da Agilent Tab 2 FLANGE DIMENS O PARAFUSOS N TORQUE DE APERTO ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm A classe de resistencia dos parafusos de ago para a flange F deve ser de 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 97 406 5 Manual de Istru es A tabela a seguir descreve para cada flange CF o numero de parafusos necessarios e com qual torque de aperto devem ser apertados de acordo com as recomendac es da Agilent Recomenda se o uso de material Agilent apropriado Ver o apEndice Technical Information para a descric o detalhada Tab 3 FLANGE N TORQUE DE APERTO CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm O Tu
270. tandsklassen for stalskruene for flensen F ma v re 12 9 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 169 406 9 Instruksjon Manual F lgende tabell beskriver for hver flense CF antallet pakrevde skruer og hvilket dreiemoment som skal brukes for a stramme dem i samsvar med anbefalingene fra Agilent Det anbefales a bruke passende materialer fra Agilent Se vedlegget Technical Information for detaljerte beskrivelser Tab 3 FLENS ANT STRAMMEMOMENT CFF 6 16 20 Nm CFF 8 20 20 Nm CFF 10 24 20 Nm Turbo V 750 850 TwisTorr Pumping System kan ikke festes ved hjelp av grunndelen sin FORSIKTIG Turbo V 750 850 TwisTorr Pumping System tilhgrer andre installasjonskategori eller overspenning i henhold til direktivet EN 61010 1 Utfgre tilkoblingen av innretningen til matelinjen slik at kravene for denne kategorien oppfylles Bruk motkoblingsstykkene som leveres for a bevare vernegraden IP 54 Turbo V 750 850 TwisTorr Pumping System er utstyrt med koblingsstykker for Input Output og seriekommunikasjon som m kobles til eksterne kretser slik at de elektriske delene ikke er tilgjengelige Se til at isoleringen til innretningen som er tilkoblet Turbo V 750 850 TwisTorr Pumping System har en passende isolering ogsa i tifelle enkeltvis feil som forutsett i regelverket EN 61010 1 170 406 For installasjon av tilleggsutstyr vises det til Technical Information Turbo V 750 850 TwisTorr User Manual 87 901
271. tern ho nap jacieho zdroja 969 6521 3 zaistite vo vn tri v kuovej komory tlak 0 1 mbar 4 prive te do zariadenia Turbo V 750 850 TwisTorr Pumping System sign l TART jedn m z troch sp sobov a pripojen m konektora protikusu I O z pr slu enstva b prostredn ctvom sign lu TART z dia kov ho ovl dacieho miesta prostredn ctvom konektora I O vi odsek J1 REMOTE I O v pr lohe Technical Information c prostredn ctvom sign lu TART z dia kov ho ovl dacieho miesta prostredn ctvom s riov ho rozhrania RS 232 485 vi odsek RS 232 485 Communication Description v pr lohe Technical Information Vstaven riadiace zariadenie automaticky rozozn sign ly INTERLOCK a TART a uvedie v vevu do innosti Re im Soft Start sa pou va pre uvedenie v vevy do chodu po dlh om obdob ne innosti Umo uje optim lnu distrib ciu mazacieho tuku v lo isk ch Aktiv cia re imu Soft Start sa vykon va prostredn ctvom pr slu n ho softwaru alebo ovl dac m pr kazom z dia kov ho I O vi odseky INTERCONNECTION a RS 232 485 COMMUNICATION DESCRIPTION v pr lohe Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 263 406 14 Navod na Obsluhu Syst m signalizuje stav prostrednictvom zelenej LED Zelena LED umiestnena na elnom paneli zakladne zariadenia 150 850 TwisTorr Pumping System informuje prostrednictvom svojej frekvencie o
272. the Pump 387 Pump used with Corrosive Gases Pump Purging 388 Venting the Turbo V 750 850 TwisTorr Pumping System 393 Pump used in Presence of Magnetic Fields 397 Accessories and Spare Parts 398 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 13 406 Contents 14 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual o o o o e e e e ete 200 Oe 1 0 Istruzioni per I uso o e e z e Indicazioni di Sicurezza per Pompe Turbomolecolari 16 N Informazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 20 Installazione 22 Fissaggio della pompa 23 Uso del Turbo V 750 850 TwisTorr Pumping System 25 Come avviare il Turbo V 750 850 TwisTorr Pumping System 26 Come arrestare il Turbo V 750 850 TwisTorr Pumping System 28 Arresto di Emergenza 29 Manutenzione 30 Smaltimento 31 Traduzione delle istruzioni originali Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 15 406 1 Istruzioni per l uso Indicazioni di Sicurezza per Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia di rotazione potrebbe essere rilasciata NAUEN Per evitare dan
273. tion request form that you may fill out in the first part and return to us This form is intended to supplement normal lines of communications and to resolve problems that existing systems are not addressing in an adequate or timely manner Upon receipt of your Corrective Action Request we will determine the Root Cause of the problem and take the necessary actions to eliminate it You will be contacted by one of our employees who will review the problem with you and update you with the second part of the same form on our actions Your business is very important to us Please take the time and let us know how we can improve Sincerely Giampaolo LEVI Vice President and General Manager Agilent Vacuum Products Division Note Fax or mail the Customer Request for Action see backside page to Agilent Vacuum Products Division Torino Quality Assurance or to your nearest Agilent representative for onward transmission to the same address CUSTOMER REQUEST FOR CORRECTIVE PREVENTIVE IMPROVEMENT ACTION TO AGILENT VACUUM PRODUCTS DIVISION TORINO QUALITY ASSURANCE FAX N XXXX 011 9979350 ADDRESS AGILENT TECHNOLOGIES ITALIA S p A Vacuum Products Division Vla F Ili Varian 54 10040 Leini TO Italy E MAIL vpd qualityassurance_pdl ext agilent com COMPANY FUNCTION ADDRESS TEL N E MAIL PROBLEM SUGGESTION REFERENCE INFORMATION model n serial n ordering information time to failure after i
274. ual 87 901 020 01 A Technical Information 17 Figure 77 Use the required number of screws 16 for CFF 6 a 20 for CFF 8 a 24 for CFF 110 Attach the units and tighten each screw in turn Re peat the sequential tightening until the flange faces meet Tighten the screws with a torque of 20 Nm For ConFlat flange connections we recommend using Agilent hardware To facilitate assembly and dismantling apply Felpro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts and flange Note that in some cases the connections can be made only with the bolt in the lower side Exercise care when tightening nuts and bolts to avoid creating dents in the envelope as this may cause the pump rotor to lock Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 385 406 17 Technical Information Connection of the Fore Vacuum Pump A flange KF 25 NW is available to connect the Turbo V 750 850 TwisTorr Pumping System to the fore vacuum pump A hose or vacuum approved pipe can be used If a rigid pipe is used any vibration generated by the mechanical pump must be eliminated through the use of bellows The Turbo V 750 850 TwisTorr Pumping System is characterized by its high compression ratio also for oil vapors When using a mechanical oil sea
275. ual 87 901 020 01 A 283 406 15 Priro nik za Navodila Vzdr evanje Naprave Turbo V 750 850 TwisTorr Pumping System ni potrebno vzdr evati Kakr no koli delo na sistemu mora opraviti avtorizirano osebje SVARILO Pred za etkom dela na sistemu ga izklju ite iz napetosti pre istite rpalko tako da odprete primerno odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem z novim Preden odnesete sistem na popravilo ali zamenjavo z drugo enoto morate izpolniti Health and Safety obrazec ki je pri lo en navodilom in ga poslate lokalni prodajni pisarni Pred po iljanjem morate kopijo obrazca vstaviti v embala o sistema 284 406 Sistem je treba uni iti v skladu z dolo enimi nacionalnimi standardi Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Odlaganje opadkov Pomen znamke WEEE na etiketah Spodaj navedeni simbol je v skladu z direktivo ES znano pod imenom WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri prodajalnem centru ali pa pri prodajalcu seznani o postopku lo evanja in odstranitve odpadkov
276. ude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata Il Turbo V 750 850 TwisTorr Pumping System non pu essere danneggiato rimanendo semplicemente esposto all atmosfera Si consiglia comunque di mantenere chiusa la pompa fino al momento dell installazione sul sistema onde evitare eventuale inquinamento da polvere 20 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Istruzioni per l uso 1 Turdo gt 0 850 TwisTorr Pumpin stem C POWER SUPPLY 969 652 Figura 1 L imballo del Turbo V 750 850 TwisTorr Pumping System comprende 1 Pompa con controller integrato 2 Inlet screen montato 3 Questo manuale di istruzioni su CD ROM 4 Scatola accessori a controconnettore a 15 vie REMOTE 1 0 IP 54 con integrate le connessioni necessarie a far partire la pompa b controconnettore a 9 vie SERIAL IP 54 da utilizzare per la connessione seriale Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 21 406 1 Istruzioni per l uso Installazione Fatal Staccare l adesivo e togliere il tappo di protezione solo al momento del collegamento della turbopompa al sistema 22 406 Figura 2 Installare questo apparato solo in ambienti chiusi ed in ogni caso non utilizzarlo in ambienti esposti ad agenti atmosferici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Dura
277. udskifter systemet med et repareret system Inden systemet sendes til reparationsv rkstedet eller Agilent advanced axchange service skal Sikkerheds og tilstandsdokumentet der er vedlagt denne instruktionsmanual udfyldes En kopi af dette dokument skal inds ttes i systemets emballage inden afsendelse Skrotning af systemet skal foreg i overensstemmelse med det p g ldende lands s rlige love Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 141 406 7 Istruktionsbog Bortskaffelse 142 406 Betydningen af WEEE logoet pa m rkaterne Nedenst ende symbol anvendes i overensstemmelse med det sakaldte EU direktiv WEEE Symbolet kun g ldende for EU landene viser at produktet som det sidder pa IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte leverand ren af anordningen enten fabrikken eller en forhandler for igangs ttelse af afhentnings og bortskaffelsesprocessen efter n je at have kontrolleret betingelserne i salgskontrakten X ana Ker NZ PN AN OY Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Turbo V 750 850 TwisTorr User Manual 8 Bruksanvisning Sakerhetsanvisningar f r Molekylara turbopumpar 144 Allman Information 145 F rvaring 147 F rberedelser f r installationen 148 Installation 150 Fastsattning av pump 151
278. vier than Ar please contact Agilent technical support for information How to Start the Turbo V 750 850 TwisTorr Pumping System Before starting the system please check that the mating I O connector is unplugged If the system is connected to a remote I O make sure the stop signal see para J1 REMOTE I O of annex Technical Information is given To start the system please follow the following steps 1 unplug if present the system mating I O connector 2 to switch on the Turbo V 750 850 TwisTorr Pumping System it is necessary to supply a voltage of 48 Vdc using an external Power Supply 969 6521 3 pump the vacuum chamber down to 0 1 mbar 4 sive the Turbo V 750 850 TwisTorr Pumping System a start signal by one of the following methods a connecting the provided mating I O connector b giving a remote start signal through the I O connector see para J1 REMOTE I O of annex Technical Information c giving a remote start signal via the serial RS 232 485 interface see para RS232 RS 485 Communication Description of annex Technical Information The integrated controller automatically recognizes the interlock and start signals presence and start up the pump 298 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 Soft Start mode is provided to start the pump after a protracted stop This allows a better grease distribution in the bearings To enable the Soft Start mode it
279. voldoen Uitschakelen van het Turbo V 750 850 TwisTorr Pumping System De pomp kan op een van de volgende manieren worden uitgeschakeld 1 door de bijgeleverde I O connector af te koppelen 2 door een remote STOP signaal te geven via de I O connector zie paragraaf J1 REMOTE I O in de bijlage Technical Information 3 door een remote STOP signaal te geven via de seri le interface RS 232 485 zie de paragraaf RS 232 485 Communication Description in de bijlage Technical Information WAARSCHUWING Voor de veiligheid van de bediener dient de voedingseenheid 969 6521 van het TV750 850 TwisTorr Pumping System gevoed zijn met een driedradige voedingskabel zie paragraaf ACCESSORIES AND SPARE PARTS in de bijlage Technical Information voorzien van een stekker met internationale goedkeuring Gebruik deze kabel en stekker samen met een goed geaard stopcontact om elektrische schokken te voorkomen en aan de vereisten van de EG normen te voldoen De hoge voltage die in de controller ontstaat kan ernstig of dodelijk letsel veroorzaken Maak de voedingskabel los alvorens onderhoudswerkzaamheden aan het systeem uit te voeren Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 121 406 6 Bedrijfshandleiding 122 406 Noodstop Om het Turbo V 750 850 TwisTorr Pumping System in noodomstandigheden onmiddellijk te stoppen moet de stroomtoevoerkabel van de voedingseenheid afgekoppeld worden Houd er echter rekeni
280. wione w dodatku dotycz cym informacji technicznych Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 217 406 12 Podrecznik Instrukcji W tej instrukcji zastosowano nastepujace umowne znaczenia ZAGROZENIE Komunikaty niebezpiecze stwa przyci gaj uwag operatora co do danej procedzury lub danego post powania kt rego nieprawid owe wykonanie mog oby spowodowa powa ne uszkodzenia cia a Komunikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury S to wa ne informacje wyci gni te z tekstu 218 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Podrecznik Instrukcji 12 Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalnego i niezawodno ci pomp turbomolekularnych Agilent musz by przestrzegane nast puj ce zalecenia podczas transportu przesuni cia i magazynowania pomp nie mog by przekroczone nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C a wilgotnosc wzgledna od 0 do 90 bez opar a klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je zawsze uruchomi w spos b Soft Start czas magazynowania danej pompy turbomolekularnej wynosi 10 miesi cy od daty wysy ki UWAGA Je eli z jakiegokolwiek powodu czas magazynowania jest dtu szy nale y odesta pompe do
281. wisTorr User Manual 87 901 020 01 A 73 406 4 Manual de istrucciones Preparaci n para la instalaci n El Turbo V 750 850 TwisTorr Pumping System se suministra en un embalaje especial de protecci n si se observan dafios que podrian haberse producido durante el transporte ponerse en contacto con la oficina local de ventas Durante la operaci n de desembalaje tener cuidado de que no se caiga el Turbo V 750 850 TwisTorr Pumping System y de no someterlo a golpes o vibraciones iADVERTENCIA ATENCI N Algunos modelos pesan m s de 18 kg modelos 969 8814 969 8816 969 6014 969 6016 969 6017 en estos casos la manipulaci n de la bomba debe ser llevada a cabo con los medios de elevaci n adecuados o al menos por dos personas No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva 94 62 CE y modificaciones siguientes para la preservaci n del medio ambiente Para evitar problemas de desgasificaci n no tocar con las manos desnudas los componentes destinados a exponerse al vac o Utilizar siempre guantes u otra protecci n adecuada El Turbo V 750 850 TwisTorr Pumping System no puede da arse permaneciendo simplemente expuesto a la atm sfera De todas formas se aconseja mantener cerrada la bomba hasta que se instale en el sistema para evitar su posible contaminaci n por polvo 74 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A
282. y sheet attached to this instruction manual must be filled in and sent to the local sales office A copy of the sheet must be in serted in the system package before shipping 302 406 If a system is to be scrapped it must be disposed of in accordance with the specific national standards Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instructions for Use 16 Disposal Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Directive This symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore invited to contact the supplier of the device whether the Parent Company or a retailer to initiate the collection and disposal process after checking the contractual terms and conditions of sale p Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 303 406 16 Instructions for Use Disposal 304 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A N e ete Ge 17 sve e Turbo V 750 850 TwisTorr User Manual Technical Information Description of the Turbo V 750 850 TwisTorr 308 Pump Description 313 Controller Description 315 Technical Specification 316 Turbo V 750 850 TwisTorr Pumping System Outline 3
283. yl rpumpene som er beskrevet i den f lgende Bruksanvisningen har et h yt kinetisk energiniva som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel pa grunn av en kontakt mellom rotor og stator eller brudd pa rotoren kan roteringsenergien bli frigitt AIP IE For unng skader p utstyret og forebygge operat rskader ma installasjonsanvisningene beskrevet i denne manualen f lges n ye 162 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instruksjon Manual 9 Generell informasjon Dette utstyret er beregnet til bruk av profesjonelle brukere Brukeren b r lese denne brukerveiledningen og all annen informasjon fra Agilent for utstyret tas i bruk Agilent kan ikke holdes ansvarlig for hendelser som skjer pa grunn av manglende oppfalging av disse instruksjonene selv delvis feilaktig bruk av utrent personell ikke autoriserte endringer av utstyret eller handlinger som pa noen mate er i strid med nasjonale bestemmelser Turbo V 750 850 TwisTorr Pumping System systemet best r av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste partikler Pumpingen oppn s med en h yhastighetsturbin maks 49500 opm koplet til en trefase elektrisk motor Turbo V 750 850 TwisTorr Pumping S
284. ystem Likevel anbefaler vi holde pumpen lukket til den er montert i systemet slik at den ikke forurenses eller utsettes for nedst ving 166 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instruksjon Manual 9 Turbo 850 TwisTorr Pumping System BVDC POWER PPLY 969 6521 Figur 1 Emballasjen til Turbo V 750 850 TwisTorr Pumping System inkluderer 1 Pumpe med innebygd controller 2 Inlet screen montert 3 Denne bruksanvisningen pa CD ROM 4 Eske med tilbeh r a 15 veis motkoblingsstykke REMOTE I O IP 54 med de koblingene som er n dvendige for a sette pumpen i gang innebygd b 9 veis motkoblingsstykke SERIAL IP 54 som skal brukes for serietilkobling Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 167 406 9 Instruksjon Manual Installasjon da and Tapen og beskyttelsesproppen skal fjernes f rst nar turbopumpen koples til systemet 168 406 Figur 2 Dette apparatet ma bare installeres i lukkede lokaler Det ma iallfall ikke installeres i lokaler som er utsatt for v r og vind regn frost sn st v aggressive gasser i eksplosive eller brannfarlige milj er Under bruk m f lgende forhold respekteres maksimalt trykk 2 bar over atmosf risk trykk temperatur fra 5 C til 45 C se diagram i tillegget Technical Information a relativ fuktighet 0 90 uten kondens Ved magnetfelt m pumpen beskyttes av
285. ystem har ingen forurensende stoffer og er derfor egnet for anlegg med behov for rene vakuum Turbo V 750 850 TwisTorr Pumping System har dessuten hjelpekontakter som gir muligheter for forsyning av en ekstra vifte styring av ekstra gruppe for purge vent og fjernstyring av systemet med en serietilkoplet vertsmaskin RS232 o RS485 De f lgende avsnitt inneholder all informasjon som er n dvendig for a sikre brukeren nar utstyret er i bruk For mer detaljert bruk vises det til tillegget Technical Information Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 163 406 9 Instruksjon Manual Denne manualen bruker f lgende standardprotokoll OKI Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremgangsm te eller praksis som hvis den ikke f lges kan medf re alvorlige skader d are Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan fore til at utstyret skades Merknadene inneholder viktig informasjon som er hentet fra teksten 164 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Instruksjon Manual 9 Lagring For a garantere optimal drift og palitelighet for Agilent turbomolekylare pumper ma f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra O til 90 uten kondensering Kunden m alltid s
286. z textu 236 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Navod k Pou iti 13 Uskladneni Aby byla zaji t na maximalni provozuschopnost a spolehlivost turbomolekul rnich vyv v firmy Agilent musite dodr ovat nasledujici pokyny a Pri p eprav p em s ov n a skladov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti O a 90 bez sr en turbomolekul rni v v vy mus u ivatel po dod vce a poprv v dycky spou t t pozvoln a skladovatelnost turbomolekul rn vyv vy je 10 m s c ode dne doru en POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prodej a servis v v v firmy Agilent Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 237 406 13 Navod k Pou it Priprava k instalaci V v va Turbo V 750 850 TwisTorr Pumping System se roubovanou p rubou se dod v ve specialnim ochrann m balen Pokud toto balen vykazuje zn mky po kozen k n mu mohlo doj t b hem p epravy kontaktujte va i m stn prodejn pobo ku P i vybalov n d vejte pozor aby za zen nespadlo a chra te jej p ed v emi nenad l mi n razy ot esy nebo vibracemi NEBEZPE N kter modely v v ce ne 18 kg modely 969 8814
287. zivatty elv lik a rendszert l s ezzel k rt s lyos s r l st vagy hal lt okozhat A Turbo V 750 850 TwisTorr Pumping System et b rmilyen helyzetben ssze lehet szerelni R gz tse a Turbo V 750 850 TwisTorr Pumping System et stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 8000 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal Az ISO K karim t a magas ellen ll s ac lszor t k haszn lat val lehet r gz teni Agilent IC 63250 DCMZ modelltipus Az al bbi t bl zat karimam retenk nt megadja a sz ks ges IC63250DCMZ szor t sz mot valamint a szor t shoz sz ks ges nyomat kot Tab 1 KARIMA SZ R GZIT NYOMATEK ISO 160 K 10 25 Nm ISO 200 K 18 25 Nm Az alabbi tablazat ISO F karim nk nt megadja a sz ks ges ac lcsavarok sz m t valamint a Agilent ltal aj nlott szoritashoz sz ks ges nyomat kot Tab 2 KARIMA CSAVARM RET SZ R GZIT NYOMATEK ISO 160 F M10 8 25 Nm ISO 200 F M10 12 25 Nm Az F karimahoz az acelcsavar ellenallasi osztalya 12 9 legyen Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 205 406 11 Felhaszn l i K zik nyv Az al bbi t bl zat CF karim nk nt megadja a sz ks ges ac lcsavarok sz m t valamint a Agilent ltal aj nlott szor t shoz sz ks ges nyomat kot Aj nlatos a megfelel Agilent anyagot haszn lni A r szletes le r shoz l sd a Technical In
288. zpostavljenost na okolje ne more po kodovati naprave Turbo V 750 850 TwisTorr Pumping System Kljub temu je priporo ljivo da je enota zaprta dokler je ne namestite v sistem S tem boste prepre ili onesna enje s prahom 274 406 Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A Priro nik za Navodila 15 Turbo TwisTorr Pumpin fem C POWER PPLY 969 6 Slika 1 Embala a naprave Turbo V 750 850 TwisTorr Pumping System vsebuje 1 rpalka z vgrajenim kontrolerjem 2 Inlet screen name en 3 Ta priro nik z navodili na CD ROMU 4 katla z dodatno opremo a 15 potni protikonektor REMOTE 1 0 IP 54 z vgrajenimi povezavami ki so potrebne za zagon rpalke b 9 potni protikonektor SERIAL IP 54 za serijsko povezavo Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 275 406 15 Priro nik za Navodila Monta a POZOR Lepljiv in za itni pokrov ne odstranjujte dokler ne pove ete turbo rpalko na sistem 216 406 Slika 2 Napravo name ajte samo odznotraj in v nobenem primeru je ne name ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo tovati naslednje pogoje Maksimalen pritisk 2 bara nad pritiskom atmosfere Temperatura zraka od 5 C od 45 C Relativna vlaZnost 0 90 brez kondenza V prisotnosti magnetnih p
289. zt a vezet ket s dug t csak megfelel en f ldelt aljzattal haszn lja az ram t sek elker l se s az uni s szabv nyok k vetelm nyeinek megtart sa v gett A Turbo V 750 850 TwisTorr Pumping System leallitasa A szivattyu le ll t s hoz a k vetkez m dszerek egyik t hasznalhatja 1 csatlakoztassa sz t a term kkel szallitott I O ellencsatlakoz t 2 adjon t volt l az I O csatlakoz n kereszt l STOP jelet l sd a JI REMOTE I O szakaszt a Technical Information f ggel kben 3 adjon t volt l a Serial RS 232 485 interf szen kereszt l kereszt l STOP jelet l sd a RS 232 485 Communication Description szakaszt a Technical Information f ggel kben A kezel biztons ga rdek ben a TV750 850 TwisTorr Pumping System 969 6521 t pl l j t 3 eres nemzetk zi szinten elfogadott dug val rendelkez tapvezetekkel kell taplalni l sd az ACCESSORIES AND SPARE PARTS szakaszt a Technical Information f ggel kben Ezt a vezet ket s dug t csak megfelel en f ldelt aljzattal haszn lja az ram t sek elker l se s az uni s szabv nyok k vetelm nyeinek megtart sa v gett A controllerben l trej het olyan magas fesz lts g amely s lyos s r l st vagy hal lt okozhat Az egys g belsej ben v gzend karbantart si munk latok megkezd se el tt a t pvezet ket csatlakoztassa sz t Turbo V 750 850 TwisTorr User Manual 87 901 020 01 A 211 406 11 Felhaszn l i K zi

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